+----------+--------+--------+--------+-------+------+--------+------+------+-------+------+------+------+------+------+------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+----------+------+
| rgprec   | totreg | dem    | rep    | aip   | paf  | msc    | lib  | nlp  | grn   | ref  | dcl  | mr   | mrs  | miss | ms   | male   | female | hispdem | hisprep | hispdcl | hispoth | jewdem | jewrep | jewdcl | jewoth | kordem | korrep | kordcl | koroth | japdem | japrep | japdcl | japoth | chidem | chirep | chidcl | chioth | inddem | indrep | inddcl | indoth | vietdem | vietrep | vietdcl | vietoth | fildem | filrep | fildcl | filoth | demm1824 | demm2534 | demm3544 | demm4554 | demm5564 | demm65pl | demmunk | demf1824 | demf2534 | demf3544 | demf4554 | demf5564 | demf65pl | demfunk | repm1824 | repm2534 | repm3544 | repm4554 | repm5564 | repm65pl | repmunk | repf1824 | repf2534 | repf3544 | repf4554 | repf5564 | repf65pl | repfunk | dclm1824 | dclm2534 | dclm3544 | dclm4554 | dclm5564 | dclm65pl | dclmunk | dclf1824 | dclf2534 | dclf3544 | dclf4554 | dclf5564 | dclf65pl | dclfunk | othm1824 | othm2534 | othm3544 | othm4554 | othm5564 | othm65pl | othmunk | othf1824 | othf2534 | othf3544 | othf4554 | othf5564 | othf65pl | othfunk | dreg1g | dreg2g | dreg3g | dreg4g | dreg5g | dreg6g | dreg7g | dreg8g | dreg9g | rreg1g | rreg2g | rreg3g | rreg4g | rreg5g | rreg6g | rreg7g | rreg8g | rreg9g | ireg1g | ireg2g | ireg3g | ireg4g | ireg5g | ireg6g | ireg7g | ireg8g | ireg9g | oreg1g | oreg2g | oreg3g | oreg4g | oreg5g | oreg6g | oreg7g | oreg8g | oreg9g | county | election | type |
+----------+--------+--------+--------+-------+------+--------+------+------+-------+------+------+------+------+------+------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+----------+------+
| 20010000 |    691 |    486 |     61 |     3 |    0 |    111 |    1 |    0 |    29 |    0 |    0 |    0 |    0 |    0 |    0 |    327 |    364 |       4 |       0 |       0 |       2 |     79 |      1 |      0 |     12 |      1 |      2 |      0 |      0 |     13 |      0 |      0 |      0 |     13 |      2 |      0 |      6 |      7 |      0 |      0 |      3 |       1 |       0 |       0 |       2 |      5 |      0 |      0 |      1 |       23 |       19 |       19 |       41 |       48 |       23 |      43 |       17 |       21 |       45 |       47 |       59 |       33 |      48 |        3 |        3 |        4 |        3 |        6 |        6 |       6 |        0 |        1 |        3 |        4 |        4 |        5 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       15 |        9 |       19 |       14 |        6 |       6 |        9 |       10 |        9 |       16 |       11 |        6 |       3 |      0 |      6 |     28 |     75 |     33 |     12 |     23 |    309 |      0 |      0 |      0 |      4 |     14 |      3 |      3 |      0 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     23 |      8 |      5 |      3 |     91 |      0 |      1 | s03      | R    |
| 20020001 |    109 |     82 |     10 |     1 |    0 |     12 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     58 |     51 |       2 |       0 |       0 |       0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      5 |      1 |      0 |      0 |      1 |       3 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        6 |        6 |       12 |        8 |       5 |        2 |        1 |        6 |        4 |       13 |        6 |       7 |        0 |        2 |        0 |        0 |        0 |        2 |       1 |        0 |        1 |        0 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        0 |        2 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        3 |        0 |       0 |      0 |      2 |      6 |     11 |      5 |      5 |      7 |     46 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |     12 |      0 |      1 | s03      | R    |
| 20020002 |    594 |    391 |     82 |     3 |    0 |     96 |    2 |    1 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    274 |    320 |       9 |       3 |       0 |       1 |     44 |      5 |      0 |     10 |      3 |      0 |      0 |      0 |      6 |      1 |      0 |      1 |     11 |      1 |      0 |      6 |      3 |      0 |      0 |      0 |       0 |       1 |       0 |       2 |      0 |      0 |      0 |      0 |       11 |       12 |       14 |       47 |       36 |       18 |      23 |        9 |       21 |       14 |       69 |       55 |       27 |      35 |        0 |        5 |        2 |        8 |        7 |       10 |      16 |        0 |        2 |        0 |        0 |        7 |        3 |      22 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       15 |        8 |       15 |       11 |        7 |       2 |       10 |       12 |        5 |       11 |       13 |        3 |       2 |      0 |      1 |     32 |     58 |     38 |     21 |     23 |    218 |      0 |      0 |      0 |      9 |      7 |      3 |      5 |      2 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     18 |      8 |      6 |      3 |     72 |      0 |      1 | s03      | R    |
| 20030000 |    595 |    393 |     69 |     2 |    0 |    103 |    2 |    2 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    282 |    313 |      13 |       1 |       0 |       5 |     60 |      5 |      0 |     13 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |     14 |      2 |      0 |      5 |      3 |      0 |      0 |      4 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        6 |       14 |       18 |       33 |       23 |       40 |      37 |        7 |       20 |       28 |       32 |       41 |       42 |      52 |        1 |        3 |        6 |        0 |        6 |        6 |      14 |        0 |        2 |        2 |        3 |        7 |        7 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       17 |       14 |       14 |        9 |        7 |       2 |        8 |       14 |        8 |       10 |        8 |        8 |       2 |      0 |      2 |     25 |     51 |     32 |     17 |     20 |    246 |      0 |      0 |      0 |      1 |      8 |      5 |      1 |      6 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     19 |     12 |      8 |      4 |      4 |     82 |      0 |      1 | s03      | R    |
| 20060001 |    630 |    388 |     63 |     4 |    0 |    138 |    2 |    0 |    35 |    0 |    0 |    0 |    0 |    0 |    0 |    311 |    319 |       1 |       0 |       0 |       6 |     60 |      8 |      0 |     12 |      3 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |     11 |      0 |      0 |      9 |      1 |      0 |      0 |      5 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |       13 |       13 |       27 |       24 |       42 |       34 |      18 |       12 |       26 |       27 |       42 |       38 |       36 |      36 |        1 |        1 |        4 |        1 |       10 |       10 |       7 |        0 |        4 |        4 |        3 |        5 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       31 |       20 |       21 |       13 |        5 |       2 |        6 |       13 |       20 |       15 |       11 |        6 |       2 |      0 |      2 |     32 |     39 |     29 |     13 |     14 |    259 |      0 |      0 |      0 |      3 |      6 |      3 |      2 |      2 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     22 |      9 |      9 |      4 |    112 |      0 |      1 | s03      | R    |
| 20060002 |      9 |      7 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      6 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20070000 |    676 |    453 |     48 |     3 |    0 |    129 |    1 |    1 |    41 |    0 |    0 |    0 |    0 |    0 |    0 |    333 |    343 |       8 |       0 |       0 |       5 |     58 |      5 |      0 |     24 |      2 |      1 |      0 |      3 |      6 |      0 |      0 |      0 |     14 |      2 |      0 |     13 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |       10 |       26 |       33 |       33 |       44 |       28 |      39 |       17 |       17 |       27 |       53 |       48 |       32 |      46 |        0 |        2 |        2 |        5 |        3 |        4 |       9 |        0 |        2 |        2 |        2 |        5 |        4 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       20 |       14 |       18 |       14 |        5 |       7 |       11 |       24 |       13 |       15 |       11 |        3 |       3 |      0 |      1 |     35 |     71 |     39 |     15 |     21 |    271 |      0 |      0 |      1 |      2 |      5 |      2 |      3 |      1 |     34 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     23 |     19 |      6 |      5 |      4 |    116 |      0 |      1 | s03      | R    |
| 20080000 |    628 |    412 |     69 |     2 |    0 |    104 |    6 |    2 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    290 |    338 |       6 |       1 |       0 |       6 |     68 |      5 |      0 |     13 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      4 |      1 |      0 |      2 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      1 |       10 |       15 |       30 |       37 |       28 |       26 |      32 |       12 |       16 |       40 |       50 |       48 |       27 |      41 |        1 |        2 |        6 |        4 |        4 |       11 |       9 |        0 |        2 |        1 |        8 |        4 |       10 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       13 |       15 |       13 |       17 |        7 |       2 |        5 |       16 |       15 |       20 |       10 |        4 |       2 |      0 |      1 |     46 |     61 |     29 |     11 |     21 |    243 |      0 |      0 |      0 |      3 |     12 |      3 |      2 |      2 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     27 |     16 |     18 |      5 |      2 |     77 |      0 |      1 | s03      | R    |
| 20100001 |    451 |    317 |     50 |     4 |    0 |     68 |    0 |    1 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    217 |    234 |       9 |       5 |       0 |       1 |     47 |      5 |      0 |     11 |      1 |      1 |      0 |      2 |      6 |      0 |      0 |      2 |      6 |      2 |      0 |      8 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      3 |      0 |      0 |      0 |       10 |       15 |       32 |       20 |       24 |       21 |      29 |        6 |       18 |       18 |       35 |       33 |       21 |      35 |        1 |        0 |        4 |        4 |        4 |        7 |       5 |        0 |        1 |        3 |        5 |        3 |        4 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        8 |        4 |        7 |        8 |        3 |       0 |        4 |       12 |        8 |        9 |        6 |        3 |       1 |      0 |      1 |     29 |     42 |     23 |     16 |     14 |    192 |      0 |      0 |      1 |      3 |      8 |      1 |      2 |      1 |     34 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |      6 |      1 |      1 |      0 |     61 |      0 |      1 | s03      | R    |
| 20100002 |     48 |     35 |      5 |     0 |    0 |      6 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     28 |       2 |       0 |       0 |       1 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        4 |        2 |        2 |       1 |        2 |        1 |        5 |        2 |        6 |        3 |       3 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        3 |        1 |        0 |       0 |      0 |      0 |      2 |      5 |      2 |      0 |      2 |     24 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 20110001 |     55 |     33 |      7 |     0 |    0 |     13 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     30 |     25 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        3 |        1 |        1 |        4 |        4 |       2 |        1 |        3 |        1 |        2 |        6 |        0 |       4 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        2 |        2 |        1 |        3 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       1 |      0 |      0 |      4 |      2 |      7 |      3 |      2 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      2 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 20110002 |    273 |    170 |     25 |     2 |    0 |     63 |    0 |    2 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    140 |    133 |       3 |       0 |       0 |       9 |     33 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      5 |      1 |      0 |      4 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |        8 |        5 |       11 |       23 |        5 |      12 |        7 |       11 |       12 |       21 |       20 |        9 |      19 |        2 |        1 |        4 |        1 |        1 |        1 |       5 |        0 |        1 |        3 |        1 |        0 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       15 |       13 |        7 |        8 |        2 |       1 |        6 |        7 |        4 |        3 |        3 |        1 |       0 |      0 |      2 |      8 |     24 |     20 |      8 |      5 |    103 |      0 |      0 |      0 |      1 |      4 |      1 |      1 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     14 |      7 |      0 |      1 |     48 |      0 |      1 | s03      | R    |
| 20110003 |    298 |    215 |     14 |     0 |    0 |     52 |    2 |    1 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    151 |    147 |       7 |       1 |       0 |       4 |     32 |      1 |      0 |      8 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      2 |      1 |      0 |      4 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        3 |       17 |       14 |        8 |       28 |       18 |      15 |        6 |        9 |       13 |       20 |       30 |       13 |      21 |        1 |        0 |        2 |        2 |        0 |        1 |       2 |        0 |        0 |        0 |        1 |        0 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        8 |        9 |       10 |        9 |        2 |       1 |        6 |        6 |        7 |        7 |        3 |        0 |       0 |      0 |      2 |     15 |     31 |     19 |      3 |     12 |    133 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      6 |      7 |      4 |      0 |     46 |      0 |      1 | s03      | R    |
| 20110004 |     42 |     28 |      6 |     0 |    0 |      7 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     18 |     24 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        3 |        1 |        3 |       0 |        2 |        2 |        2 |        4 |        3 |        1 |       4 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      2 |      1 |      4 |     18 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 20130001 |     54 |     36 |      1 |     1 |    0 |     11 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     23 |     31 |       5 |       0 |       0 |       0 |     10 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        3 |        2 |        1 |        0 |       1 |        3 |        9 |        4 |        1 |        5 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        3 |        3 |        0 |        2 |       0 |        1 |        3 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      5 |      4 |      2 |      0 |      2 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |     13 |      0 |      1 | s03      | R    |
| 20130002 |    515 |    348 |     28 |     2 |    0 |     90 |    6 |    0 |    41 |    0 |    0 |    0 |    0 |    0 |    0 |    265 |    250 |       9 |       0 |       0 |       3 |     56 |      2 |      0 |     16 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      2 |      4 |      4 |      0 |      5 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |       12 |       20 |       26 |       35 |       30 |       25 |      16 |       13 |       20 |       26 |       45 |       32 |       24 |      24 |        1 |        2 |        3 |        1 |        5 |        1 |       3 |        0 |        0 |        4 |        1 |        2 |        1 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       24 |       15 |       11 |       14 |        2 |       0 |       10 |       13 |       12 |        8 |        7 |        3 |       1 |      0 |      2 |     21 |     45 |     19 |     18 |     18 |    225 |      0 |      0 |      0 |      1 |      6 |      2 |      1 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     26 |     16 |      4 |      7 |      3 |     83 |      0 |      1 | s03      | R    |
| 20130003 |      6 |      2 |      0 |     0 |    0 |      2 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 20140001 |    641 |    428 |     53 |     4 |    0 |    126 |    2 |    1 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    319 |    322 |      12 |       1 |       0 |       6 |     52 |      2 |      0 |     14 |      1 |      0 |      0 |      4 |      5 |      0 |      0 |      2 |     19 |      2 |      0 |     13 |      2 |      0 |      0 |      1 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      1 |       16 |       31 |       26 |       28 |       43 |       30 |      19 |       10 |       36 |       30 |       37 |       50 |       42 |      30 |        4 |        4 |        5 |        3 |        7 |        8 |       3 |        0 |        3 |        1 |        1 |        2 |        7 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       29 |       11 |       16 |       17 |        9 |       0 |       12 |       26 |        7 |        8 |       10 |        5 |       0 |      0 |      0 |     34 |     45 |     26 |     23 |     27 |    273 |      0 |      0 |      0 |      3 |     10 |      1 |      1 |      0 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     27 |     11 |      8 |      1 |     97 |      0 |      1 | s03      | R    |
| 20140002 |     79 |     52 |      5 |     0 |    0 |     15 |    0 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |     35 |     44 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      5 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        6 |        4 |        1 |        4 |        0 |       0 |        2 |       12 |        6 |        5 |        3 |        3 |       1 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        6 |        2 |        0 |        0 |       0 |        3 |        2 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |      6 |      7 |      3 |      0 |      2 |     34 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      5 |      1 |      0 |      1 |     10 |      0 |      1 | s03      | R    |
| 20140003 |    140 |     87 |     12 |     1 |    0 |     26 |    1 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |     62 |     78 |       4 |       2 |       0 |       3 |     12 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     12 |      4 |      0 |      5 |      0 |      0 |      0 |      1 |       2 |       1 |       0 |       1 |      1 |      0 |      0 |      0 |        9 |        2 |        6 |        2 |        5 |        9 |       1 |       12 |        6 |        7 |        6 |        6 |       13 |       3 |        1 |        0 |        0 |        0 |        1 |        3 |       0 |        2 |        0 |        0 |        1 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        6 |        3 |        0 |        1 |        4 |       0 |        9 |        5 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     11 |      4 |      8 |      1 |      6 |     57 |      0 |      0 |      0 |      2 |      3 |      0 |      2 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      5 |      3 |      0 |      0 |     29 |      0 |      1 | s03      | R    |
| 20141001 |    343 |    222 |     35 |     2 |    0 |     54 |    1 |    0 |    29 |    0 |    0 |    0 |    0 |    0 |    0 |    169 |    174 |       4 |       0 |       0 |       0 |     25 |      1 |      0 |      9 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      7 |      3 |      0 |      4 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        6 |       10 |       12 |       16 |       22 |       15 |      17 |        7 |       15 |       10 |       23 |       31 |       29 |       9 |        1 |        2 |        1 |        5 |        3 |        3 |       3 |        0 |        2 |        2 |        3 |        2 |        5 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       15 |       10 |       13 |        5 |        1 |       0 |        4 |       11 |        4 |        6 |        6 |        1 |       1 |      0 |      1 |     13 |     31 |     14 |     10 |     12 |    141 |      0 |      0 |      2 |      3 |      2 |      4 |      2 |      2 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     13 |      2 |      3 |      0 |     55 |      0 |      1 | s03      | R    |
| 20141002 |    239 |    148 |     19 |     0 |    0 |     53 |    3 |    1 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    114 |    125 |       0 |       0 |       0 |       2 |     24 |      3 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |      4 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        4 |        6 |       12 |       14 |       14 |       12 |       7 |        2 |       12 |       15 |       13 |       16 |        9 |      12 |        0 |        0 |        1 |        3 |        2 |        2 |       2 |        0 |        1 |        1 |        1 |        3 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       13 |        5 |        7 |        4 |        1 |       1 |        6 |       11 |        7 |        6 |        5 |        1 |       1 |      0 |      1 |     17 |     24 |     12 |      8 |      4 |     82 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     10 |      3 |      0 |      2 |     46 |      0 |      1 | s03      | R    |
| 20150001 |    364 |    250 |     35 |     1 |    0 |     59 |    0 |    1 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    179 |    185 |       4 |       0 |       0 |       2 |     40 |      1 |      0 |      8 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      1 |      4 |      3 |      0 |      4 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      2 |        9 |       17 |       20 |       18 |       21 |       17 |      17 |        4 |       15 |       17 |       37 |       29 |       11 |      18 |        3 |        3 |        2 |        2 |        2 |        4 |       2 |        4 |        2 |        2 |        1 |        1 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        6 |        6 |       10 |       10 |        3 |       0 |        7 |        9 |        9 |        2 |        5 |        5 |       0 |      0 |      0 |     22 |     52 |     18 |     10 |      9 |    139 |      0 |      0 |      0 |      1 |      4 |      4 |      1 |      2 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      6 |      5 |      4 |      2 |     50 |      0 |      1 | s03      | R    |
| 20150002 |    199 |    120 |     17 |     0 |    0 |     47 |    2 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |     91 |    108 |       1 |       0 |       0 |       2 |     17 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      7 |      0 |      0 |      3 |      1 |      0 |      0 |      3 |       2 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        4 |        4 |       10 |       13 |        9 |        4 |       3 |        7 |       13 |       11 |       18 |       13 |        6 |       5 |        1 |        0 |        0 |        3 |        1 |        3 |       3 |        1 |        1 |        0 |        2 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        7 |        9 |        8 |        2 |        5 |       0 |        8 |        8 |        5 |        4 |        3 |        1 |       0 |      0 |      0 |      6 |     21 |     16 |      2 |     10 |     65 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     12 |      5 |      2 |      0 |     37 |      0 |      1 | s03      | R    |
| 20170000 |    383 |    206 |     16 |     5 |    0 |    127 |    2 |    1 |    26 |    0 |    0 |    0 |    0 |    0 |    0 |    195 |    188 |       6 |       1 |       0 |       9 |     11 |      0 |      0 |     11 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |     13 |      1 |      0 |     24 |      4 |      0 |      0 |      1 |       7 |       1 |       0 |       1 |      2 |      0 |      0 |      1 |       18 |       21 |       22 |        6 |       15 |       16 |       3 |       18 |       29 |       20 |        7 |       13 |        8 |      10 |        1 |        1 |        3 |        0 |        0 |        1 |       2 |        4 |        1 |        0 |        0 |        0 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       26 |       26 |       18 |       10 |        4 |        2 |       0 |       34 |       21 |        4 |        8 |        3 |        5 |       0 |      0 |      0 |     21 |     28 |     11 |      4 |      9 |    133 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     13 |     11 |      4 |      2 |      0 |    127 |      0 |      1 | s03      | R    |
| 20190001 |     72 |     48 |      4 |     1 |    0 |     14 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     33 |     39 |       0 |       0 |       0 |       3 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        3 |        5 |        4 |        2 |       5 |        2 |        2 |        2 |        6 |        5 |        4 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        4 |        1 |        1 |        2 |       0 |        0 |        3 |        2 |        1 |        3 |        1 |       0 |      0 |      0 |      3 |      1 |      4 |      1 |      3 |     36 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      2 |      0 |      0 |     14 |      0 |      1 | s03      | R    |
| 20190002 |    723 |    389 |     40 |     9 |    0 |    231 |    5 |    1 |    48 |    0 |    0 |    0 |    0 |    0 |    0 |    366 |    357 |      16 |       3 |       0 |      13 |     46 |      0 |      0 |     14 |      3 |      0 |      0 |      3 |      8 |      0 |      0 |      4 |     17 |      3 |      0 |     29 |      5 |      1 |      0 |      5 |       2 |       0 |       0 |       4 |      1 |      0 |      0 |      1 |       23 |       36 |       26 |       30 |       32 |       14 |      13 |       36 |       58 |       30 |       29 |       30 |       23 |       9 |        2 |        8 |        3 |        1 |        2 |        5 |       2 |        6 |        3 |        2 |        2 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       43 |       56 |       22 |       19 |       16 |       12 |       1 |       32 |       48 |       20 |        9 |        8 |        7 |       1 |      0 |      2 |     20 |     53 |     32 |      7 |     12 |    263 |      0 |      0 |      0 |      4 |      5 |      1 |      0 |      2 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     24 |     27 |      9 |      6 |      3 |    223 |      0 |      1 | s03      | R    |
| 20190003 |    114 |     52 |      6 |     0 |    0 |     45 |    2 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |     61 |     53 |       1 |       0 |       0 |       0 |     10 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      3 |      2 |      0 |      0 |      3 |       0 |       0 |       0 |       1 |      0 |      1 |      0 |      0 |        9 |        9 |        1 |        2 |        3 |        6 |       0 |        2 |        8 |        4 |        4 |        1 |        3 |       0 |        1 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       14 |        2 |        2 |        0 |        1 |       0 |       17 |        5 |        1 |        1 |        3 |        2 |       1 |      0 |      2 |      9 |      8 |      5 |      1 |      0 |     27 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |      6 |      1 |      0 |      0 |     39 |      0 |      1 | s03      | R    |
| 20201001 |    636 |    331 |     32 |     5 |    0 |    207 |    4 |    1 |    56 |    0 |    0 |    0 |    0 |    0 |    0 |    301 |    335 |      19 |       3 |       0 |      15 |     19 |      2 |      0 |     12 |      5 |      1 |      0 |      4 |      3 |      0 |      0 |      6 |     12 |      1 |      0 |     33 |      5 |      1 |      0 |      3 |       5 |       1 |       0 |       7 |      5 |      1 |      0 |      3 |       21 |       49 |       24 |       19 |       18 |        8 |       4 |       34 |       64 |       32 |       21 |       15 |       15 |       7 |        4 |        2 |        5 |        3 |        1 |        1 |       0 |        6 |        3 |        0 |        2 |        1 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       36 |       62 |       27 |       11 |        3 |        3 |       0 |       46 |       43 |       21 |       12 |        5 |        4 |       0 |      0 |      3 |     33 |     29 |     11 |      7 |      5 |    243 |      0 |      0 |      0 |      2 |      4 |      1 |      1 |      1 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     32 |     22 |      1 |      5 |      1 |    209 |      0 |      1 | s03      | R    |
| 20201002 |    372 |    178 |     31 |     5 |    0 |    119 |    6 |    1 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    167 |    205 |       4 |       1 |       0 |      10 |     20 |      3 |      0 |      3 |      2 |      1 |      0 |      2 |      2 |      0 |      0 |      3 |     22 |      4 |      0 |     18 |      6 |      0 |      0 |      2 |       2 |       0 |       0 |       3 |      3 |      0 |      0 |      1 |       16 |       33 |        9 |        4 |        5 |        2 |       2 |       27 |       37 |        3 |        8 |       16 |       12 |       4 |        5 |        7 |        2 |        0 |        0 |        1 |       0 |        2 |        5 |        0 |        1 |        3 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       22 |       38 |        8 |        6 |        1 |        5 |       1 |       41 |       30 |        1 |        5 |        1 |        4 |       0 |      0 |      1 |     22 |     23 |     10 |      3 |      6 |    113 |      0 |      0 |      0 |      5 |      2 |      2 |      3 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     19 |      6 |      2 |      0 |    115 |      0 |      1 | s03      | R    |
| 20211001 |     73 |     23 |      7 |     1 |    0 |     36 |    0 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     38 |     35 |       3 |       1 |       0 |       2 |      2 |      1 |      0 |      1 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      7 |      1 |      0 |      0 |      2 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        3 |        3 |        0 |        0 |        0 |       0 |        9 |        1 |        2 |        0 |        2 |        0 |       0 |        3 |        0 |        0 |        1 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        6 |        5 |        2 |        1 |        1 |       0 |       16 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      3 |      2 |      0 |      0 |     34 |      0 |      1 | s03      | R    |
| 20211002 |    538 |    296 |     41 |     6 |    0 |    159 |    2 |    2 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    274 |    264 |      18 |       3 |       0 |      20 |     33 |      1 |      0 |     11 |      4 |      1 |      0 |      7 |      7 |      0 |      0 |      4 |     23 |      6 |      0 |     17 |      2 |      0 |      0 |      4 |       0 |       0 |       0 |       7 |      2 |      0 |      0 |      5 |       24 |       47 |       23 |       21 |        9 |       13 |       2 |       26 |       56 |       27 |       21 |       17 |        7 |       3 |        6 |        3 |        6 |        4 |        0 |        1 |       3 |        5 |        4 |        2 |        0 |        1 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       32 |       37 |       17 |       10 |       11 |        4 |       1 |       27 |       36 |       13 |        5 |        4 |        3 |       1 |      0 |      3 |     32 |     38 |     21 |      5 |      9 |    188 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      2 |     32 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |     17 |      7 |      0 |      1 |    154 |      0 |      1 | s03      | R    |
| 20231001 |    505 |    220 |     41 |     4 |    0 |    164 |    2 |    2 |    72 |    0 |    0 |    0 |    0 |    0 |    0 |    271 |    234 |      24 |       4 |       0 |       9 |     19 |      0 |      0 |     19 |      1 |      2 |      0 |      1 |      5 |      1 |      0 |      2 |     10 |      6 |      0 |     27 |      5 |      1 |      0 |      5 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |       60 |       27 |        8 |        7 |       13 |        2 |       2 |       48 |       15 |       16 |        5 |        3 |        7 |       7 |       11 |       11 |        2 |        1 |        1 |        0 |       1 |        8 |        4 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       73 |       41 |        6 |        4 |        1 |        0 |       0 |       81 |       30 |        4 |        2 |        1 |        1 |       0 |      0 |      0 |     20 |     22 |      7 |      4 |      6 |    161 |      0 |      0 |      0 |      1 |     10 |      0 |      0 |      1 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     27 |     21 |      5 |      1 |      1 |    188 |      0 |      1 | s03      | R    |
| 20231002 |     81 |     32 |      8 |     1 |    0 |     26 |    1 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |     37 |     44 |       5 |       1 |       0 |       7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        8 |        1 |        0 |        0 |        0 |       0 |        2 |       13 |        5 |        1 |        1 |        0 |       0 |        0 |        4 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       14 |        5 |        0 |        1 |        0 |       0 |        2 |        7 |        9 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     36 |      0 |      1 | s03      | R    |
| 20240001 |    661 |    272 |     64 |     6 |    0 |    277 |    8 |    1 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    330 |    331 |      44 |       5 |       0 |      26 |     20 |      4 |      0 |     15 |     12 |      2 |      0 |     13 |      2 |      0 |      0 |      2 |     23 |     10 |      0 |     65 |     13 |      4 |      0 |     16 |       7 |       1 |       0 |       7 |      2 |      3 |      0 |      6 |       97 |       24 |        0 |        2 |        0 |        0 |       0 |      129 |       15 |        2 |        1 |        0 |        0 |       2 |       36 |        7 |        1 |        1 |        0 |        0 |       0 |       16 |        3 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      127 |       32 |        1 |        1 |        0 |        0 |       1 |      144 |       17 |        1 |        0 |        0 |        0 |       1 |      0 |      0 |      6 |      6 |      1 |      0 |      0 |    259 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      0 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      1 |      0 |      0 |      0 |    315 |      0 |      1 | s03      | R    |
| 20240002 |     47 |     29 |      2 |     1 |    0 |     12 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |     47 |       4 |       1 |       0 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       25 |        3 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |     14 |      0 |      1 | s03      | R    |
| 20240003 |    188 |     83 |     18 |     3 |    0 |     75 |    1 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |     85 |    103 |      13 |       1 |       0 |      12 |      1 |      0 |      0 |      2 |      4 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     13 |      5 |      0 |     21 |      3 |      0 |      0 |      2 |       1 |       1 |       0 |       1 |      1 |      0 |      0 |      2 |       34 |        1 |        0 |        0 |        0 |        0 |       0 |       46 |        2 |        0 |        0 |        0 |        0 |       0 |       13 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       35 |        2 |        0 |        0 |        0 |        0 |       0 |       49 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |     80 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     85 |      0 |      1 | s03      | R    |
| 20240004 |      9 |      1 |      2 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      6 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       1 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      1 |      1 |      0 |      1 | s03      | R    |
| 20241001 |      2 |      0 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 20241002 |     10 |      6 |      0 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      6 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        2 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 20241003 |    883 |    354 |     52 |     3 |    0 |    335 |   16 |    3 |   120 |    0 |    0 |    0 |    0 |    0 |    0 |    433 |    450 |      31 |       3 |       0 |      23 |     30 |      3 |      0 |     32 |      4 |      1 |      0 |      4 |      5 |      2 |      0 |      5 |     21 |      2 |      0 |     36 |      7 |      2 |      0 |      7 |       3 |       1 |       0 |       6 |      6 |      0 |      0 |      6 |       75 |       48 |       22 |       10 |        8 |        4 |       1 |      107 |       44 |       12 |       10 |        6 |        6 |       1 |       14 |       11 |        3 |        2 |        0 |        0 |       0 |       12 |        5 |        2 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      165 |       53 |        9 |        5 |        2 |        1 |       0 |      192 |       35 |        7 |        5 |        2 |        0 |       1 |      0 |      0 |     44 |     37 |      8 |      5 |      3 |    257 |      0 |      0 |      0 |      9 |      1 |      2 |      2 |      0 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     50 |     25 |      3 |      2 |      1 |    394 |      0 |      1 | s03      | R    |
| 20242000 |    322 |    187 |     31 |     3 |    0 |     69 |    1 |    1 |    30 |    0 |    0 |    0 |    0 |    0 |    0 |    162 |    160 |       5 |       0 |       0 |       4 |     23 |      2 |      0 |      7 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      6 |      2 |      0 |      6 |      1 |      1 |      0 |      1 |       2 |       0 |       0 |       3 |      0 |      0 |      0 |      0 |       14 |       13 |       14 |       18 |       17 |        8 |       8 |       15 |        9 |       15 |       17 |       18 |       11 |      10 |        4 |        2 |        3 |        1 |        3 |        3 |       0 |        3 |        2 |        2 |        2 |        2 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       19 |        6 |        5 |        3 |        4 |       0 |       21 |       16 |        4 |        5 |        3 |        0 |       1 |      0 |      0 |     10 |     26 |      5 |      6 |      8 |    132 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      9 |     11 |      5 |      1 |      2 |     74 |      0 |      1 | s03      | R    |
| 20250000 |    671 |    280 |     96 |     4 |    0 |    249 |    8 |   14 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    289 |    382 |      27 |       6 |       0 |      23 |     29 |      8 |      0 |     16 |     10 |      4 |      0 |     10 |      3 |      1 |      0 |      2 |     30 |     12 |      0 |     55 |      8 |      2 |      0 |     13 |       2 |       1 |       0 |       6 |      6 |      3 |      0 |      1 |       52 |       30 |        3 |        3 |        0 |        3 |       0 |      138 |       39 |        1 |        3 |        3 |        1 |       4 |       38 |       20 |        3 |        2 |        1 |        0 |       0 |       19 |       11 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       73 |       52 |        4 |        3 |        1 |        0 |       1 |      132 |       26 |        1 |        2 |        0 |        0 |       0 |      0 |      2 |     29 |     27 |      2 |      0 |      0 |    220 |      0 |      0 |      0 |     11 |     15 |      1 |      1 |      1 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     22 |     25 |      1 |      0 |      1 |    238 |      0 |      1 | s03      | R    |
| 20251000 |    634 |    292 |     88 |    13 |    0 |    192 |    4 |    3 |    42 |    0 |    0 |    0 |    0 |    0 |    0 |    297 |    337 |      28 |       2 |       0 |      18 |     33 |      5 |      0 |     20 |      7 |      3 |      0 |     10 |      3 |      0 |      0 |      3 |      8 |      5 |      0 |     22 |      9 |      1 |      0 |      3 |       4 |       2 |       0 |       2 |      5 |      0 |      0 |      2 |       87 |       33 |        1 |        1 |        0 |        1 |       1 |      135 |       31 |        1 |        1 |        0 |        0 |       0 |       22 |       18 |        0 |        2 |        0 |        0 |       1 |       34 |       10 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       91 |       36 |        1 |        2 |        0 |        0 |       0 |       95 |       27 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     24 |     22 |      1 |      0 |      0 |    244 |      0 |      0 |      0 |     13 |     11 |      0 |      0 |      0 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     22 |      0 |      0 |      1 |    207 |      0 |      1 | s03      | R    |
| 20252000 |    542 |    251 |     57 |    10 |    0 |    191 |   10 |    1 |    22 |    0 |    0 |    0 |    0 |    0 |    0 |    256 |    286 |      13 |       3 |       0 |       9 |     36 |      4 |      0 |     12 |      5 |      0 |      0 |      7 |      1 |      0 |      0 |      6 |     23 |      7 |      0 |     33 |      5 |      2 |      0 |      6 |       6 |       0 |       0 |       8 |      4 |      1 |      0 |      7 |       66 |       21 |        5 |        4 |        0 |        0 |       0 |      134 |       13 |        1 |        3 |        1 |        0 |       3 |       20 |       16 |        0 |        0 |        0 |        1 |       0 |       14 |        6 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       89 |       30 |        3 |        1 |        0 |        0 |       0 |       91 |       19 |        1 |        0 |        0 |        0 |       0 |      0 |      2 |     13 |     19 |      3 |      1 |      4 |    209 |      0 |      0 |      0 |      4 |     16 |      1 |      0 |      0 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     17 |     17 |      3 |      0 |      0 |    194 |      0 |      1 | s03      | R    |
| 20254000 |    687 |    301 |    101 |     9 |    0 |    237 |   11 |    1 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    426 |    261 |      35 |       4 |       0 |      26 |     15 |      7 |      0 |     12 |      5 |      2 |      0 |     11 |      5 |      1 |      0 |      1 |     20 |     10 |      0 |     21 |      9 |      2 |      0 |      3 |       1 |       1 |       0 |       2 |      3 |      0 |      0 |      5 |      112 |       42 |        4 |        3 |        0 |        1 |       1 |      109 |       24 |        3 |        1 |        1 |        0 |       0 |       51 |       23 |        2 |        0 |        0 |        0 |       0 |       17 |        7 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      149 |       34 |        1 |        1 |        1 |        0 |       1 |       68 |       27 |        1 |        0 |        1 |        0 |       1 |      0 |      1 |     24 |     25 |      2 |      0 |      3 |    246 |      0 |      0 |      0 |      9 |     12 |      2 |      0 |      0 |     78 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     19 |      0 |      0 |      3 |    235 |      0 |      1 | s03      | R    |
| 20260001 |     66 |     31 |      4 |     1 |    0 |     28 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     35 |     31 |       4 |       1 |       0 |       0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       3 |      1 |      0 |      0 |      1 |        7 |        4 |        0 |        2 |        1 |        0 |       0 |       12 |        5 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        4 |        0 |        0 |        2 |        1 |       0 |       10 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     24 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     26 |      0 |      1 | s03      | R    |
| 20260002 |    624 |    270 |     52 |    17 |    0 |    262 |    4 |    1 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    277 |    347 |      36 |       5 |       0 |      38 |     14 |      1 |      0 |     12 |      7 |      3 |      0 |     13 |      4 |      1 |      0 |      4 |     37 |     11 |      0 |     36 |      5 |      0 |      0 |     11 |      16 |       0 |       0 |       4 |      6 |      0 |      0 |      9 |      100 |        7 |        0 |        0 |        0 |        0 |       0 |      157 |        5 |        0 |        0 |        0 |        0 |       1 |       27 |        1 |        0 |        1 |        0 |        0 |       0 |       21 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      127 |        9 |        1 |        0 |        0 |        0 |       4 |      152 |        7 |        0 |        0 |        0 |        0 |       2 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |    260 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     50 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |      2 |      0 |      0 |      0 |    288 |      0 |      1 | s03      | R    |
| 20263001 |    348 |    159 |     36 |     5 |    0 |    126 |    3 |    1 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    179 |    169 |      10 |       2 |       0 |      13 |     12 |      0 |      0 |      6 |     11 |      2 |      0 |     10 |      5 |      0 |      0 |      4 |     24 |      8 |      0 |     19 |      8 |      0 |      0 |      5 |       5 |       0 |       0 |       3 |      5 |      0 |      0 |      2 |       45 |       22 |        5 |        2 |        4 |        0 |       0 |       50 |       21 |        4 |        2 |        4 |        0 |       0 |       10 |       10 |        3 |        0 |        1 |        0 |       0 |       11 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       44 |       23 |        4 |        3 |        3 |        0 |       0 |       53 |       20 |        1 |        2 |        0 |        0 |       0 |      0 |      2 |     16 |     18 |      2 |      1 |      1 |    119 |      0 |      0 |      2 |      2 |      6 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     13 |     13 |      1 |      0 |      0 |    124 |      0 |      1 | s03      | R    |
| 20263002 |    924 |    417 |     71 |    15 |    0 |    386 |    8 |    3 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    419 |    505 |      52 |       5 |       0 |      38 |     35 |      2 |      0 |     11 |     18 |      5 |      0 |     18 |      6 |      0 |      0 |      4 |     43 |     10 |      0 |     92 |     22 |      4 |      0 |      9 |      13 |       2 |       0 |      18 |      4 |      1 |      0 |      8 |      160 |        9 |        0 |        1 |        0 |        0 |       0 |      233 |       12 |        0 |        0 |        0 |        2 |       0 |       38 |        4 |        0 |        0 |        0 |        1 |       0 |       23 |        5 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      196 |       10 |        0 |        0 |        0 |        0 |       0 |      219 |       10 |        0 |        0 |        0 |        0 |       1 |      0 |      0 |     30 |     14 |      0 |      0 |      0 |    373 |      0 |      0 |      0 |      4 |      9 |      0 |      0 |      0 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     30 |     15 |      0 |      0 |      0 |    385 |      0 |      1 | s03      | R    |
| 20270000 |    611 |    285 |     74 |     8 |    0 |    213 |    1 |    1 |    29 |    0 |    0 |    0 |    0 |    0 |    0 |    268 |    343 |      29 |       2 |       0 |      16 |     21 |      4 |      0 |     13 |      5 |      1 |      0 |      5 |      2 |      1 |      0 |      1 |     26 |     15 |      0 |     34 |      6 |      0 |      0 |      8 |       5 |       0 |       0 |       5 |      0 |      0 |      0 |      2 |       80 |       10 |        1 |        2 |        0 |        0 |       3 |      162 |        9 |        8 |        3 |        3 |        2 |       2 |       33 |        4 |        0 |        1 |        1 |        0 |       1 |       29 |        2 |        1 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      116 |        6 |        2 |        3 |        4 |        1 |       0 |      111 |        6 |        0 |        1 |        2 |        0 |       0 |      0 |      1 |      4 |      6 |      5 |      1 |      3 |    265 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      6 |      0 |      1 |      0 |    237 |      0 |      1 | s03      | R    |
| 20271001 |    647 |    357 |     50 |    11 |    0 |    183 |    1 |    1 |    44 |    0 |    0 |    0 |    0 |    0 |    0 |    295 |    352 |      16 |       1 |       0 |      14 |     28 |      2 |      0 |     24 |      6 |      1 |      0 |      7 |      5 |      0 |      0 |      2 |     26 |      7 |      0 |     26 |     17 |      2 |      0 |     11 |       6 |       0 |       0 |       3 |      4 |      0 |      0 |      2 |       44 |       35 |       16 |       20 |       12 |        5 |       5 |       87 |       37 |       23 |       25 |       22 |       18 |       8 |       15 |       10 |        3 |        3 |        1 |        3 |       0 |        5 |        2 |        0 |        0 |        1 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       59 |       41 |       15 |        6 |        1 |        1 |       0 |       59 |       24 |       19 |        6 |        5 |        4 |       0 |      0 |      5 |     22 |     34 |     20 |     12 |      3 |    261 |      0 |      0 |      1 |      5 |      4 |      0 |      1 |      1 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     17 |     24 |      7 |      3 |      1 |    183 |      0 |      1 | s03      | R    |
| 20271002 |     91 |     53 |      1 |     0 |    0 |     31 |    0 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     50 |     41 |       4 |       0 |       0 |       1 |      7 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      4 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        4 |        9 |        5 |        4 |        2 |        0 |       1 |        2 |        9 |        5 |        6 |        2 |        3 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        8 |        3 |        2 |        1 |        0 |       0 |        3 |        5 |        2 |        0 |        3 |        0 |       0 |      0 |      0 |      6 |      4 |      3 |      0 |      3 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      3 |      1 |     30 |      0 |      1 | s03      | R    |
| 20272001 |    292 |    135 |     26 |     1 |    0 |    110 |    2 |    1 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    176 |    116 |      14 |       1 |       0 |       6 |     12 |      1 |      0 |     10 |      4 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      7 |      1 |      0 |     18 |      6 |      1 |      0 |      8 |       2 |       0 |       0 |       5 |      1 |      0 |      0 |      1 |       53 |       21 |        3 |        4 |        2 |        1 |       0 |       33 |       10 |        3 |        2 |        1 |        2 |       0 |       11 |        4 |        0 |        0 |        0 |        0 |       0 |       10 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       53 |       20 |        1 |        3 |        0 |        0 |       0 |       41 |        9 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |     17 |     11 |      4 |      0 |      0 |    103 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |      9 |      0 |      1 |      0 |    101 |      0 |      1 | s03      | R    |
| 20272002 |    170 |     89 |      7 |     3 |    0 |     61 |    2 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |     72 |     98 |      11 |       0 |       0 |       2 |      2 |      1 |      0 |      2 |      5 |      0 |      0 |      6 |      2 |      0 |      0 |      2 |     15 |      2 |      0 |     21 |      1 |      0 |      0 |      3 |       1 |       0 |       0 |       2 |      0 |      0 |      0 |      1 |       15 |       13 |        5 |        2 |        1 |        0 |       2 |       29 |       11 |        7 |        2 |        1 |        0 |       1 |        0 |        3 |        1 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |        8 |        0 |        3 |        0 |        0 |       0 |       35 |        9 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      5 |      9 |      3 |      0 |      1 |     71 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |     69 |      0 |      1 | s03      | R    |
| 20290000 |    639 |    382 |     59 |     6 |    0 |    147 |    1 |    0 |    44 |    0 |    0 |    0 |    0 |    0 |    0 |    284 |    355 |      10 |       2 |       0 |       7 |     68 |      9 |      0 |     24 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      0 |     10 |      5 |      0 |      3 |      4 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      1 |      1 |      0 |      5 |       14 |       19 |       23 |       30 |       39 |       15 |      15 |       26 |       44 |       35 |       39 |       45 |       22 |      16 |        4 |        1 |        8 |        5 |        6 |        3 |       9 |        2 |        3 |        7 |        3 |        3 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       29 |       21 |        6 |       14 |        6 |       2 |       35 |       39 |       12 |        2 |        5 |       11 |       1 |      0 |      3 |     29 |     60 |     21 |     20 |     15 |    234 |      0 |      0 |      0 |      2 |      9 |      3 |      0 |      5 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     23 |     10 |      4 |      1 |    138 |      0 |      1 | s03      | R    |
| 20310000 |    681 |    474 |     64 |     6 |    0 |    112 |    1 |    0 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    318 |    363 |       8 |       2 |       0 |       7 |     82 |      4 |      0 |     12 |      2 |      0 |      0 |      1 |      5 |      0 |      0 |      1 |      6 |      4 |      0 |      5 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       14 |       19 |       30 |       38 |       45 |       33 |      29 |       16 |       33 |       31 |       64 |       53 |       33 |      36 |        1 |        1 |        2 |        2 |        7 |        9 |       8 |        0 |        3 |        3 |        5 |        3 |       11 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       17 |       16 |        8 |        9 |        9 |       5 |       12 |       14 |       10 |        8 |       12 |        6 |       1 |      0 |      0 |     53 |     49 |     28 |     15 |     24 |    305 |      0 |      0 |      1 |      1 |      5 |      8 |      2 |      4 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     13 |     11 |      3 |      1 |     94 |      0 |      1 | s03      | R    |
| 20320001 |    546 |    365 |     89 |     4 |    0 |     71 |    0 |    1 |    16 |    0 |    0 |    0 |    0 |    0 |    0 |    257 |    289 |       6 |       2 |       0 |       1 |     84 |      4 |      0 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |       18 |       12 |       21 |       28 |       39 |       21 |      22 |       14 |       28 |       22 |       40 |       47 |       29 |      24 |        4 |        1 |        4 |        7 |       10 |       12 |      11 |        0 |        1 |        4 |       10 |        7 |        8 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       13 |        5 |        7 |        5 |        6 |       0 |        9 |       11 |       11 |        5 |        7 |        1 |       1 |      0 |      0 |     37 |     71 |     20 |     12 |      9 |    216 |      0 |      0 |      0 |      2 |     14 |      3 |      3 |      5 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |     16 |      5 |      4 |      2 |     55 |      0 |      1 | s03      | R    |
| 20320002 |     46 |     35 |      3 |     0 |    0 |      6 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     26 |       1 |       0 |       0 |       1 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        6 |        0 |        0 |       8 |        1 |        1 |        4 |        4 |        2 |        3 |       4 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      3 |      2 |      2 |     23 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      5 |      0 |      1 | s03      | R    |
| 20330001 |    592 |    407 |     52 |     5 |    0 |    102 |    1 |    0 |    25 |    0 |    0 |    0 |    0 |    0 |    0 |    260 |    332 |       8 |       1 |       0 |       4 |     58 |      6 |      0 |     16 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      3 |      4 |      1 |      0 |      2 |      1 |      0 |      0 |      1 |       1 |       0 |       0 |       1 |      1 |      0 |      0 |      1 |        7 |       32 |       32 |       33 |       46 |       13 |      10 |       24 |       34 |       37 |       44 |       47 |       29 |      19 |        1 |        4 |        4 |        4 |        6 |        6 |       3 |        1 |        1 |        0 |        6 |        7 |        3 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       16 |       16 |       11 |        6 |        2 |       1 |       19 |       21 |       16 |        8 |        8 |        1 |       1 |      0 |      4 |     31 |     56 |     36 |     29 |     19 |    232 |      0 |      0 |      1 |      1 |      4 |      0 |      1 |      2 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |     20 |      8 |      3 |      1 |     84 |      0 |      1 | s03      | R    |
| 20330002 |     18 |     12 |      4 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |     10 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        1 |        2 |       0 |        1 |        0 |        0 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20340000 |    638 |    437 |     51 |     6 |    0 |    106 |    2 |    1 |    35 |    0 |    0 |    0 |    0 |    0 |    0 |    283 |    355 |       7 |       2 |       0 |       5 |     55 |      4 |      0 |     10 |      3 |      0 |      0 |      0 |      4 |      1 |      0 |      3 |      4 |      4 |      0 |      8 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |       10 |       21 |       33 |       40 |       33 |       23 |      21 |       19 |       42 |       37 |       50 |       46 |       38 |      24 |        4 |        3 |        5 |        3 |        2 |        3 |       5 |        5 |        2 |        4 |        4 |        1 |        1 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       21 |       12 |       11 |       12 |        5 |       2 |       12 |       18 |       15 |       14 |       11 |        3 |       0 |      0 |      1 |     41 |     60 |     34 |     12 |     29 |    260 |      0 |      0 |      0 |      1 |      4 |      5 |      4 |      1 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     10 |      9 |      9 |      3 |     99 |      0 |      1 | s03      | R    |
| 20350000 |    757 |    483 |     56 |     3 |    0 |    169 |    1 |    1 |    44 |    0 |    0 |    0 |    0 |    0 |    0 |    335 |    422 |      14 |       1 |       0 |       7 |     56 |      4 |      0 |     21 |      2 |      0 |      0 |      2 |      6 |      1 |      0 |      3 |     24 |      4 |      0 |     30 |      3 |      0 |      0 |      3 |       0 |       1 |       0 |       3 |      4 |      0 |      0 |      1 |       15 |       33 |       18 |       26 |       36 |       43 |      19 |       29 |       39 |       30 |       48 |       36 |       90 |      21 |        2 |        6 |        2 |        3 |        6 |        9 |       4 |        2 |        1 |        3 |        2 |        1 |        9 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       26 |       21 |       12 |        7 |       27 |       1 |       17 |       25 |       10 |       10 |       12 |       30 |       1 |      0 |      2 |     40 |     76 |     32 |     12 |     19 |    302 |      0 |      0 |      0 |      2 |      7 |      0 |      1 |      7 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     29 |     12 |      2 |      8 |    145 |      0 |      1 | s03      | R    |
| 20380000 |    934 |    585 |     43 |    10 |    0 |    200 |    6 |    3 |    87 |    0 |    0 |    0 |    0 |    0 |    0 |    438 |    496 |      26 |       1 |       0 |      19 |     90 |      2 |      0 |     27 |      2 |      0 |      0 |      4 |     10 |      0 |      0 |      3 |     17 |      1 |      0 |     12 |      7 |      0 |      0 |      1 |       2 |       0 |       0 |       3 |      4 |      0 |      0 |      6 |       19 |       45 |       54 |       58 |       41 |       23 |      18 |       22 |       62 |       73 |       69 |       51 |       25 |      25 |        2 |        6 |        3 |        4 |        7 |        0 |       3 |        3 |        2 |        0 |        2 |        3 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |       53 |       37 |       22 |       11 |        8 |       1 |       37 |       48 |       29 |       20 |       10 |        6 |       1 |      0 |      1 |     50 |    109 |     55 |     19 |     20 |    331 |      0 |      0 |      0 |      2 |      3 |      2 |      3 |      3 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     30 |     32 |     14 |      8 |      2 |    217 |      0 |      1 | s03      | R    |
| 20400000 |    562 |    328 |     26 |     8 |    0 |    133 |    4 |    2 |    61 |    0 |    0 |    0 |    0 |    0 |    0 |    265 |    297 |      13 |       0 |       0 |      12 |     39 |      2 |      0 |     14 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      3 |      0 |      9 |      7 |      0 |      0 |      5 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |       10 |       30 |       28 |       29 |       24 |       12 |       6 |       32 |       31 |       32 |       35 |       35 |       16 |       8 |        2 |        3 |        3 |        2 |        3 |        1 |       1 |        2 |        3 |        0 |        4 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       40 |       24 |       14 |       10 |        5 |       1 |       28 |       37 |       18 |        5 |        5 |        3 |       1 |      0 |      2 |     27 |     45 |     32 |     11 |     17 |    194 |      0 |      0 |      0 |      2 |      5 |      2 |      2 |      3 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     26 |     15 |      9 |      4 |      1 |    149 |      0 |      1 | s03      | R    |
| 20410001 |    407 |    246 |     19 |     1 |    0 |     97 |    3 |    0 |    41 |    0 |    0 |    0 |    0 |    0 |    0 |    200 |    207 |      20 |       0 |       0 |       6 |     41 |      1 |      0 |     21 |      7 |      0 |      0 |      0 |      6 |      1 |      0 |      3 |      8 |      2 |      0 |     10 |      0 |      0 |      0 |      5 |       2 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        9 |       33 |       19 |       21 |       11 |        4 |       8 |       12 |       43 |       27 |       24 |       13 |       11 |      11 |        3 |        3 |        2 |        1 |        2 |        1 |       2 |        3 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |       22 |       14 |        8 |        9 |        3 |       2 |        9 |       21 |       10 |       12 |        7 |        1 |       1 |      0 |      1 |     28 |     35 |     18 |      5 |     11 |    148 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     18 |     14 |      7 |      8 |      0 |     93 |      0 |      1 | s03      | R    |
| 20410002 |     90 |     44 |      2 |     0 |    0 |     30 |    1 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |     40 |     50 |       3 |       0 |       0 |       3 |      3 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        4 |        7 |        3 |        2 |        2 |        0 |       0 |        7 |        7 |        4 |        3 |        5 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        7 |        0 |        3 |        2 |        0 |       0 |       13 |        4 |        1 |        2 |        3 |        0 |       0 |      0 |      0 |      8 |      2 |      6 |      1 |      1 |     26 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     36 |      0 |      1 | s03      | R    |
| 20421001 |    578 |    267 |     45 |     3 |    0 |    226 |    8 |    3 |    26 |    0 |    0 |    0 |    0 |    0 |    0 |    277 |    301 |      17 |       4 |       0 |      18 |     23 |      0 |      0 |     11 |     17 |      7 |      0 |     26 |      2 |      1 |      0 |      6 |     25 |      7 |      0 |     41 |      6 |      0 |      0 |     11 |      14 |       3 |       0 |       8 |      3 |      1 |      0 |      7 |       41 |       32 |       14 |        9 |        9 |        6 |       2 |       87 |       26 |       13 |       12 |        8 |        5 |       3 |       15 |        7 |        5 |        3 |        0 |        0 |       1 |        8 |        0 |        0 |        3 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       55 |       49 |       10 |       13 |        6 |        0 |       0 |       90 |       32 |        7 |        3 |        1 |        0 |       0 |      0 |      0 |     26 |     24 |      9 |      1 |     10 |    197 |      0 |      0 |      0 |      3 |      3 |      1 |      1 |      0 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     22 |     17 |      4 |      4 |      0 |    215 |      0 |      1 | s03      | R    |
| 20421002 |    629 |    384 |     31 |     7 |    0 |    158 |    7 |    0 |    42 |    0 |    0 |    0 |    0 |    0 |    0 |    276 |    353 |      19 |       0 |       0 |      10 |     51 |      1 |      0 |     20 |      6 |      0 |      0 |      4 |      5 |      0 |      0 |      3 |     15 |      5 |      0 |     17 |      2 |      0 |      0 |      4 |       6 |       1 |       0 |       2 |      2 |      1 |      0 |      0 |       21 |       32 |       25 |       36 |       17 |       12 |       4 |       39 |       58 |       35 |       38 |       45 |       14 |       8 |        4 |        9 |        7 |        1 |        1 |        1 |       0 |        2 |        3 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       27 |       47 |       14 |        7 |        7 |        3 |       1 |       36 |       39 |       11 |       12 |        8 |        2 |       0 |      0 |      3 |     41 |     43 |     28 |     18 |     19 |    232 |      0 |      0 |      0 |      5 |      4 |      2 |      1 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |     26 |      5 |      3 |      0 |    158 |      0 |      1 | s03      | R    |
| 20421003 |     19 |     10 |      2 |     0 |    0 |      2 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |     12 |       1 |       1 |       0 |       1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |        2 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 20422001 |   1253 |    554 |     79 |    12 |    0 |    512 |    9 |    5 |    82 |    0 |    0 |    0 |    0 |    0 |    0 |    607 |    646 |      44 |       2 |       0 |      38 |     46 |      6 |      0 |     36 |     15 |      6 |      0 |     38 |      6 |      0 |      0 |      9 |     46 |      8 |      0 |     85 |     23 |      4 |      0 |     27 |      13 |       5 |       0 |      12 |      9 |      1 |      0 |      8 |       96 |       62 |       24 |       22 |       15 |       13 |       8 |      156 |       74 |       27 |       23 |       16 |       12 |       6 |       27 |       12 |        3 |        3 |        2 |        0 |       0 |       18 |        6 |        0 |        2 |        3 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      173 |       87 |       18 |       28 |        8 |        3 |       3 |      200 |       71 |        9 |        9 |        6 |        5 |       0 |      0 |      2 |     56 |     59 |     19 |      3 |      9 |    406 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |     70 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     53 |     41 |     10 |      3 |      3 |    507 |      0 |      1 | s03      | R    |
| 20422002 |     37 |     25 |      0 |     0 |    0 |      9 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     22 |     15 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        5 |        2 |        3 |        0 |        0 |       1 |        1 |        7 |        2 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      2 |      1 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 20430001 |    331 |    167 |     24 |     2 |    0 |    110 |    3 |    0 |    25 |    0 |    0 |    0 |    0 |    0 |    0 |    148 |    183 |       7 |       0 |       0 |       7 |     18 |      0 |      0 |      7 |      6 |      2 |      0 |      5 |      0 |      0 |      0 |      0 |      8 |      1 |      0 |     15 |      8 |      1 |      0 |      7 |       4 |       0 |       0 |       3 |      5 |      0 |      0 |      2 |       20 |       14 |       10 |        8 |        4 |        3 |       5 |       44 |       24 |        7 |        8 |       14 |        4 |       2 |        4 |        6 |        2 |        2 |        1 |        0 |       0 |        5 |        1 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       28 |       22 |        7 |        5 |        3 |        4 |       0 |       25 |       21 |       13 |        7 |        5 |        0 |       0 |      0 |      3 |     15 |     21 |      7 |      3 |      4 |    114 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     13 |     12 |      3 |      3 |      2 |    105 |      0 |      1 | s03      | R    |
| 20430002 |    499 |    285 |     23 |     8 |    0 |    133 |    0 |    6 |    44 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    267 |      12 |       0 |       0 |      14 |     32 |      0 |      0 |     13 |      4 |      1 |      0 |      3 |      3 |      0 |      0 |      3 |     14 |      0 |      0 |     11 |      2 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      1 |      0 |      0 |      2 |       22 |       24 |       16 |       22 |       14 |       11 |       7 |       30 |       28 |       31 |       25 |       30 |       13 |      12 |        3 |        4 |        2 |        3 |        1 |        0 |       1 |        3 |        0 |        0 |        1 |        2 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |       31 |       14 |       15 |       14 |        4 |       1 |       35 |       25 |       11 |       10 |        5 |        3 |       0 |      0 |      1 |     28 |     31 |     25 |      8 |     10 |    182 |      0 |      0 |      0 |      4 |      2 |      0 |      1 |      1 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     24 |     17 |     11 |      5 |      0 |    130 |      0 |      1 | s03      | R    |
| 20430003 |     46 |     30 |      1 |     0 |    0 |     11 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     19 |     27 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        4 |        3 |        1 |       1 |        1 |        5 |        4 |        5 |        0 |        2 |       3 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        3 |        0 |        1 |        1 |        0 |       0 |        1 |        3 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      4 |      1 |      4 |      1 |      3 |     17 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |     12 |      0 |      1 | s03      | R    |
| 20430004 |    301 |    186 |      7 |     3 |    0 |     74 |    2 |    1 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    133 |    168 |       4 |       0 |       0 |       7 |     13 |      1 |      0 |      6 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       3 |      0 |      0 |      0 |      2 |        8 |       22 |       23 |       10 |        6 |        3 |       2 |       18 |       23 |       23 |       21 |       16 |        9 |       2 |        0 |        3 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       25 |       10 |        6 |        3 |        0 |       0 |       21 |       15 |       10 |        6 |        2 |        1 |       0 |      0 |      2 |     17 |     34 |      9 |     10 |      9 |    105 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      7 |     11 |      6 |      2 |      0 |     80 |      0 |      1 | s03      | R    |
| 20431000 |    503 |    275 |     24 |     8 |    0 |    137 |    7 |    0 |    52 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    266 |      24 |       2 |       0 |      10 |     28 |      3 |      0 |     14 |      3 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |     17 |      1 |      0 |     10 |      4 |      1 |      0 |      2 |       0 |       0 |       0 |       6 |      0 |      0 |      0 |      0 |       30 |       22 |       18 |       17 |       17 |       11 |       7 |       35 |       27 |       16 |       26 |       26 |       15 |       8 |        3 |        4 |        1 |        1 |        2 |        0 |       1 |        5 |        0 |        2 |        1 |        2 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       36 |       26 |       15 |       14 |        6 |        6 |       0 |       37 |       31 |       11 |        8 |        9 |        4 |       1 |      0 |      0 |     20 |     44 |     18 |      6 |     10 |    177 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     22 |     19 |      8 |      2 |      1 |    147 |      0 |      1 | s03      | R    |
| 20451001 |    720 |    335 |     47 |     9 |    0 |    255 |    5 |    3 |    66 |    0 |    0 |    0 |    0 |    0 |    0 |    327 |    393 |      17 |       0 |       0 |      26 |     34 |      2 |      0 |     21 |      7 |      5 |      0 |     19 |     11 |      3 |      0 |      6 |     31 |     13 |      0 |     57 |     10 |      0 |      0 |     11 |       6 |       1 |       0 |       2 |      3 |      0 |      0 |      7 |       47 |       46 |       18 |       16 |       14 |        4 |       2 |       80 |       52 |       20 |       15 |       13 |        5 |       3 |        9 |       10 |        2 |        5 |        1 |        0 |       1 |       11 |        5 |        0 |        0 |        0 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       66 |       59 |       13 |        9 |        5 |        0 |       0 |       95 |       68 |       11 |        5 |        5 |        2 |       0 |      0 |      2 |     35 |     54 |      5 |      6 |      8 |    225 |      0 |      0 |      0 |      7 |      6 |      0 |      0 |      1 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     37 |     26 |      6 |      6 |      1 |    259 |      0 |      1 | s03      | R    |
| 20451002 |     64 |     39 |      4 |     1 |    0 |     14 |    0 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     32 |     32 |       2 |       0 |       0 |       0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |       11 |        3 |        1 |        6 |        0 |        0 |       0 |        4 |        3 |        4 |        3 |        3 |        1 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        2 |        1 |        0 |        0 |       0 |        6 |        5 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      2 |      1 |      1 |      3 |     28 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     14 |      0 |      1 | s03      | R    |
| 20451003 |    249 |     99 |     18 |     2 |    0 |    111 |    1 |    0 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    115 |    134 |      12 |       0 |       0 |       9 |      8 |      2 |      0 |      4 |      1 |      3 |      0 |      4 |      2 |      0 |      0 |      2 |      6 |      3 |      0 |     19 |      4 |      0 |      0 |     11 |       3 |       0 |       0 |       3 |      0 |      0 |      0 |      1 |       18 |       16 |        8 |        4 |        2 |        1 |       1 |       26 |       13 |        4 |        4 |        2 |        0 |       0 |        4 |        6 |        0 |        1 |        0 |        0 |       1 |        3 |        3 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |       22 |        7 |        2 |        0 |        0 |       2 |       51 |       24 |        3 |        1 |        0 |        0 |       0 |      0 |      1 |      8 |     16 |      0 |      1 |      3 |     70 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     12 |      1 |      1 |      0 |     99 |      0 |      1 | s03      | R    |
| 20460000 |    938 |    429 |     62 |    11 |    0 |    372 |    8 |    1 |    55 |    0 |    0 |    0 |    0 |    0 |    0 |    448 |    490 |      36 |       2 |       0 |      24 |     32 |      5 |      0 |     19 |     11 |      5 |      0 |     34 |     11 |      0 |      0 |      6 |     40 |     17 |      0 |     57 |     22 |      1 |      0 |     19 |      11 |       0 |       0 |      14 |      9 |      2 |      0 |      8 |       59 |       56 |       16 |       17 |       16 |       19 |       0 |      126 |       49 |       16 |       15 |        7 |       30 |       3 |       21 |       15 |        0 |        0 |        0 |        6 |       0 |       14 |        5 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      114 |       66 |       18 |        8 |        6 |       10 |       1 |      159 |       39 |        9 |        5 |        6 |        6 |       0 |      0 |      0 |     43 |     43 |      9 |      9 |      9 |    316 |      0 |      0 |      2 |      5 |     10 |      0 |      0 |      1 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     48 |     31 |      8 |      4 |      2 |    349 |      0 |      1 | s03      | R    |
| 20480001 |    168 |     88 |     13 |     2 |    0 |     56 |    2 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |     91 |     77 |       5 |       0 |       0 |       8 |      8 |      0 |      0 |      1 |      4 |      2 |      0 |      4 |      3 |      0 |      0 |      1 |      6 |      3 |      0 |      8 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       4 |      0 |      1 |      0 |      2 |       17 |       15 |        5 |        5 |        4 |        2 |       0 |       15 |        8 |        6 |        4 |        5 |        2 |       0 |        7 |        3 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       14 |        1 |        1 |        3 |        0 |       0 |       29 |        6 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      7 |     13 |      5 |      3 |     52 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      8 |      2 |      0 |      0 |     54 |      0 |      1 | s03      | R    |
| 20480002 |    394 |    207 |     29 |     1 |    0 |    131 |    2 |    1 |    23 |    0 |    0 |    0 |    0 |    0 |    0 |    214 |    180 |      11 |       4 |       0 |      10 |     13 |      2 |      0 |      3 |     12 |      1 |      0 |      7 |      5 |      0 |      0 |      0 |     24 |      9 |      0 |     28 |      6 |      2 |      0 |      5 |       9 |       0 |       0 |       2 |      2 |      0 |      0 |      6 |       34 |       37 |        7 |        5 |        8 |        8 |       0 |       43 |       46 |        3 |        4 |        4 |        8 |       0 |       10 |        9 |        0 |        1 |        0 |        0 |       0 |        7 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       37 |       35 |       13 |        3 |        2 |        3 |       2 |       33 |       19 |        2 |        3 |        3 |        3 |       0 |      0 |      0 |     20 |     19 |      1 |      2 |      3 |    162 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     13 |      6 |      0 |      0 |    120 |      0 |      1 | s03      | R    |
| 20490000 |   1148 |    485 |     79 |    18 |    0 |    469 |   10 |    7 |    80 |    0 |    0 |    0 |    0 |    0 |    0 |    533 |    615 |     102 |       4 |       0 |      69 |     21 |      5 |      0 |     31 |     18 |      3 |      0 |     24 |      3 |      5 |      0 |      5 |     43 |     18 |      0 |     93 |     14 |      1 |      0 |     12 |      13 |       2 |       0 |      17 |      6 |      1 |      0 |      8 |      115 |       73 |       14 |        7 |        5 |        4 |       0 |      178 |       64 |       11 |        6 |        3 |        2 |       3 |       19 |       18 |        2 |        1 |        2 |        0 |       0 |       21 |        6 |        2 |        3 |        0 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      141 |      103 |       14 |        6 |        7 |        2 |       0 |      230 |       62 |       12 |        2 |        2 |        3 |       0 |      0 |      1 |     44 |     41 |      4 |      2 |      2 |    391 |      0 |      0 |      0 |      8 |     11 |      5 |      1 |      2 |     52 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     62 |     27 |      4 |      1 |      1 |    479 |      0 |      1 | s03      | R    |
| 20492001 |    481 |    215 |     41 |     9 |    0 |    169 |    8 |    1 |    38 |    0 |    0 |    0 |    0 |    0 |    0 |    262 |    219 |      24 |       3 |       0 |      18 |      5 |      0 |      0 |     10 |      8 |      3 |      0 |      7 |      2 |      0 |      0 |      4 |     25 |      4 |      0 |     24 |      5 |      0 |      0 |      4 |       5 |       1 |       0 |       5 |      0 |      0 |      0 |      0 |       37 |       27 |       17 |       17 |       14 |        2 |       0 |       55 |       25 |        7 |        6 |        1 |        5 |       2 |       12 |        7 |        4 |        3 |        2 |        3 |       0 |        5 |        4 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       40 |       34 |       18 |       15 |        9 |        0 |       1 |       72 |       20 |        6 |        6 |        3 |        0 |       1 |      0 |      1 |     29 |     27 |      3 |      2 |      0 |    153 |      0 |      0 |      0 |      4 |      4 |      1 |      1 |      0 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     17 |      6 |      2 |      0 |    172 |      0 |      1 | s03      | R    |
| 20492002 |    804 |    377 |     58 |    10 |    0 |    330 |   10 |    0 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    382 |    422 |      72 |       6 |       0 |      46 |     25 |      2 |      0 |     17 |     14 |      5 |      0 |     21 |      3 |      0 |      0 |      2 |     49 |     11 |      0 |     74 |      7 |      0 |      0 |     15 |      13 |       4 |       0 |      13 |     10 |      0 |      0 |      7 |      153 |        7 |        1 |        0 |        0 |        0 |       2 |      198 |       16 |        0 |        0 |        0 |        0 |       0 |       35 |        3 |        0 |        0 |        0 |        0 |       0 |       18 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      167 |       11 |        0 |        1 |        0 |        0 |       2 |      184 |        4 |        0 |        0 |        0 |        0 |       0 |      0 |      3 |     14 |     16 |      0 |      0 |      0 |    344 |      0 |      0 |      1 |      5 |      4 |      0 |      0 |      0 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     15 |     14 |      0 |      0 |      0 |    333 |      0 |      1 | s03      | R    |
| 20500001 |    472 |    324 |     42 |     1 |    0 |     80 |    2 |    2 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    213 |    259 |      11 |       1 |       0 |       3 |     62 |      0 |      0 |     17 |      1 |      0 |      0 |      0 |      4 |      4 |      0 |      1 |      7 |      1 |      0 |      5 |      3 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        7 |        6 |       21 |       35 |       27 |       23 |      18 |       10 |       19 |       27 |       40 |       41 |       20 |      30 |        0 |        1 |        4 |        2 |        3 |        2 |       7 |        1 |        1 |        0 |        3 |        5 |        6 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       11 |       14 |       13 |       12 |        2 |       0 |       11 |        9 |        9 |       11 |        7 |        2 |       0 |      0 |      3 |     24 |     41 |     29 |     14 |     25 |    188 |      0 |      0 |      1 |      1 |      8 |      2 |      3 |      1 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     16 |      6 |      4 |      3 |     61 |      0 |      1 | s03      | R    |
| 20500002 |    144 |     92 |     18 |     2 |    0 |     25 |    0 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |     78 |     66 |       1 |       0 |       0 |       2 |      5 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        7 |        5 |        6 |       11 |        5 |       6 |        4 |        9 |        4 |       10 |        9 |        6 |       7 |        0 |        2 |        1 |        1 |        2 |        2 |       5 |        0 |        0 |        1 |        1 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        6 |        5 |        1 |        5 |        2 |       0 |        2 |        4 |        2 |        3 |        0 |        1 |       0 |      0 |      0 |     15 |     12 |      8 |      2 |      4 |     51 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      5 |      1 |      2 |      1 |     16 |      0 |      1 | s03      | R    |
| 20501001 |     83 |     54 |      9 |     2 |    0 |     15 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     42 |     41 |       2 |       1 |       0 |       1 |      5 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        3 |        2 |        7 |       11 |       4 |        0 |        2 |        1 |        6 |        5 |        7 |       1 |        0 |        1 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        0 |        2 |        0 |        0 |       1 |        2 |        3 |        1 |        4 |        3 |        0 |       0 |      0 |      0 |      5 |      3 |      6 |      1 |      4 |     35 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |     12 |      0 |      1 | s03      | R    |
| 20501002 |     11 |      8 |      0 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      6 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        0 |        0 |       1 |        0 |        1 |        1 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 20510000 |    767 |    545 |     71 |     5 |    0 |    122 |    2 |    0 |    22 |    0 |    0 |    0 |    0 |    0 |    0 |    358 |    409 |      15 |       0 |       0 |       9 |     96 |      3 |      0 |     21 |      2 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |     15 |      2 |      0 |      3 |      8 |      2 |      0 |      4 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       23 |       22 |       20 |       47 |       49 |       38 |      37 |       19 |       27 |       35 |       74 |       68 |       37 |      49 |        2 |        3 |        2 |        5 |        4 |       14 |      13 |        2 |        0 |        2 |        5 |        5 |        3 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       18 |       10 |       21 |       12 |        5 |       1 |       16 |       12 |       10 |       16 |        9 |        8 |       1 |      0 |      2 |     53 |     58 |     45 |     24 |     40 |    323 |      0 |      0 |      0 |      3 |      7 |      3 |      3 |      4 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     25 |     19 |      7 |      8 |      7 |     81 |      0 |      1 | s03      | R    |
| 20520000 |    796 |    556 |     75 |     3 |    0 |    126 |    1 |    4 |    31 |    0 |    0 |    0 |    0 |    0 |    0 |    393 |    403 |      12 |       1 |       0 |       7 |     59 |      9 |      0 |     15 |      3 |      0 |      0 |      2 |     15 |      1 |      0 |      4 |      9 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      0 |       18 |       23 |       28 |       62 |       57 |       32 |      39 |       10 |       23 |       45 |       67 |       61 |       40 |      51 |        3 |        3 |        3 |        8 |        9 |        9 |      10 |        0 |        1 |        3 |        4 |        9 |        4 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       17 |       19 |       12 |       23 |        7 |       2 |       12 |       17 |       10 |       16 |       13 |        6 |       2 |      0 |      2 |     47 |     98 |     51 |     14 |     22 |    322 |      0 |      0 |      1 |      3 |      7 |      3 |      7 |      5 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     31 |     13 |      8 |      2 |     95 |      0 |      1 | s03      | R    |
| 20540001 |    504 |    359 |     36 |     4 |    0 |     76 |    3 |    0 |    26 |    0 |    0 |    0 |    0 |    0 |    0 |    205 |    299 |       9 |       3 |       0 |       2 |     42 |      1 |      0 |      7 |      2 |      0 |      0 |      0 |     13 |      4 |      0 |      2 |     13 |      1 |      0 |      8 |      2 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        4 |       13 |       19 |       42 |       27 |       13 |      16 |       16 |       14 |       51 |       54 |       49 |       16 |      25 |        0 |        1 |        2 |        2 |        3 |        0 |       5 |        1 |        0 |        1 |        4 |        2 |        3 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       14 |       16 |        8 |       12 |        2 |       1 |        7 |        8 |        7 |       12 |       12 |        5 |       0 |      0 |      1 |     31 |     49 |     23 |     18 |     28 |    209 |      0 |      0 |      0 |      1 |      1 |      2 |      1 |      1 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |      8 |      5 |     13 |      2 |     70 |      0 |      1 | s03      | R    |
| 20540002 |     42 |     29 |      6 |     0 |    0 |      4 |    0 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     22 |       0 |       0 |       0 |       0 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        2 |        4 |        1 |       2 |        0 |        0 |        3 |        3 |        7 |        3 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      8 |      3 |      1 |      3 |     11 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      4 |      0 |      1 | s03      | R    |
| 20550001 |    759 |    529 |     61 |     3 |    0 |    113 |    8 |    5 |    40 |    0 |    0 |    0 |    0 |    0 |    0 |    348 |    411 |       7 |       1 |       0 |       6 |     71 |      3 |      0 |     14 |      1 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      5 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |       19 |       11 |       37 |       46 |       53 |       31 |      30 |       15 |       25 |       53 |       60 |       71 |       37 |      41 |        1 |        5 |        6 |        3 |        6 |        7 |       4 |        0 |        2 |        1 |        3 |        3 |        6 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       19 |       16 |       22 |       12 |        6 |       2 |        3 |       23 |       15 |       12 |       17 |       10 |       0 |      0 |      1 |     56 |     74 |     37 |     19 |     20 |    322 |      0 |      0 |      1 |      3 |      8 |      3 |      2 |      3 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     20 |     38 |      5 |      9 |      8 |     85 |      0 |      1 | s03      | R    |
| 20550002 |      9 |      8 |      0 |     0 |    0 |      0 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20555001 |    102 |     62 |     10 |     0 |    0 |     25 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     48 |     54 |       0 |       0 |       0 |       2 |     12 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        7 |        5 |        4 |        5 |        4 |       4 |        2 |        6 |        7 |        5 |        3 |        5 |       3 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        9 |        4 |        0 |        2 |        0 |       0 |        0 |        4 |        4 |        3 |        2 |        1 |       0 |      0 |      0 |      5 |      8 |      5 |      1 |      2 |     41 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      1 |      2 |      0 |     21 |      0 |      1 | s03      | R    |
| 20555002 |     14 |     10 |      0 |     0 |    0 |      2 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        3 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 20555003 |    128 |     77 |     13 |     2 |    0 |     29 |    0 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |     59 |     69 |       3 |       0 |       0 |       4 |      8 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      2 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        6 |        7 |       10 |        5 |        1 |       1 |        0 |        7 |       10 |        9 |       13 |        4 |       4 |        1 |        2 |        0 |        0 |        1 |        2 |       1 |        0 |        1 |        1 |        0 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        7 |        9 |        3 |        0 |        0 |       2 |        1 |        8 |        2 |        2 |        1 |        0 |       2 |      0 |      2 |      6 |      9 |      9 |      1 |      3 |     47 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      3 |      2 |      0 |      0 |     27 |      0 |      1 | s03      | R    |
| 20555004 |     21 |     14 |      1 |     0 |    0 |      1 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |     13 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        1 |        0 |       1 |        0 |        0 |        0 |        8 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      3 |      1 |      2 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      5 |      0 |      1 | s03      | R    |
| 20555005 |     12 |      8 |      0 |     0 |    0 |      3 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |      4 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 20560000 |    544 |    382 |     44 |     4 |    0 |     75 |    1 |    1 |    37 |    0 |    0 |    0 |    0 |    0 |    0 |    250 |    294 |       8 |       1 |       0 |       5 |     52 |      0 |      0 |     15 |      2 |      1 |      0 |      2 |      7 |      4 |      0 |      2 |     16 |      3 |      0 |      5 |      3 |      1 |      0 |      3 |       0 |       1 |       0 |       0 |      4 |      0 |      0 |      0 |        8 |       17 |       32 |       33 |       37 |       13 |      22 |        5 |       29 |       35 |       50 |       43 |       26 |      32 |        0 |        4 |        2 |        5 |        4 |        0 |       6 |        0 |        0 |        2 |        4 |        6 |        3 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       16 |       15 |       12 |       13 |        3 |       0 |        4 |       19 |       13 |        6 |        8 |        1 |       0 |      0 |      1 |     31 |     52 |     28 |     17 |     28 |    225 |      0 |      0 |      0 |      1 |      9 |      1 |      1 |      3 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     19 |      3 |      4 |      3 |     67 |      0 |      1 | s03      | R    |
| 20570000 |    827 |    539 |     83 |     8 |    0 |    147 |    3 |    1 |    46 |    0 |    0 |    0 |    0 |    0 |    0 |    388 |    439 |      10 |       1 |       0 |       4 |     75 |      4 |      0 |     21 |      1 |      2 |      0 |      0 |      7 |      2 |      0 |      0 |     11 |      4 |      0 |      8 |      4 |      0 |      0 |      0 |       3 |       0 |       0 |       0 |      1 |      0 |      0 |      5 |       24 |       11 |       25 |       52 |       54 |       27 |      36 |       21 |       31 |       49 |       69 |       67 |       35 |      38 |        3 |        1 |        4 |        8 |        8 |        9 |       8 |        3 |        1 |        6 |        4 |        5 |        4 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       34 |       18 |       21 |       13 |       11 |       3 |       11 |       19 |       16 |       20 |       10 |       10 |       1 |      0 |      2 |     36 |     71 |     34 |     22 |     33 |    341 |      0 |      0 |      0 |      7 |      5 |      3 |      1 |      6 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     23 |     27 |      7 |      7 |      9 |    130 |      0 |      1 | s03      | R    |
| 20580000 |    662 |    464 |     45 |     1 |    0 |    105 |    2 |    0 |    45 |    0 |    0 |    0 |    0 |    0 |    0 |    307 |    355 |      11 |       2 |       0 |       2 |     56 |      2 |      0 |     17 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      4 |      5 |      5 |      0 |     12 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      2 |        6 |       20 |       33 |       48 |       42 |       28 |      25 |       12 |       32 |       39 |       54 |       53 |       37 |      35 |        0 |        4 |        4 |        3 |        5 |        2 |       4 |        0 |        0 |        2 |        3 |        2 |        5 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       18 |       14 |       14 |       10 |       10 |       4 |        6 |       18 |       14 |       15 |        7 |        6 |       4 |      0 |      2 |     35 |     56 |     51 |     21 |     27 |    272 |      0 |      0 |      0 |      1 |      9 |      4 |      2 |      1 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     10 |     15 |     13 |     10 |      5 |     98 |      0 |      1 | s03      | R    |
| 20590001 |     76 |     51 |      9 |     0 |    0 |     13 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     32 |     44 |       3 |       0 |       0 |       1 |      2 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        4 |        3 |        4 |        2 |       0 |        2 |        5 |        6 |        9 |        6 |        4 |       2 |        0 |        1 |        0 |        2 |        0 |        2 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        3 |        3 |        1 |        0 |       1 |        1 |        0 |        1 |        3 |        1 |        0 |       0 |      0 |      1 |      7 |     10 |      2 |      4 |      1 |     26 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      3 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 20590002 |    605 |    409 |     50 |     5 |    0 |    107 |    4 |    1 |    29 |    0 |    0 |    0 |    0 |    0 |    0 |    276 |    329 |       4 |       1 |       0 |       3 |     49 |      0 |      0 |     24 |      0 |      0 |      0 |      0 |     11 |      6 |      0 |      3 |      6 |      4 |      0 |      8 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      2 |        8 |       23 |       30 |       43 |       36 |       16 |      18 |       12 |       30 |       45 |       55 |       42 |       19 |      32 |        1 |        3 |        1 |        5 |        3 |        5 |       5 |        2 |        1 |        3 |        0 |        3 |        5 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       26 |       19 |       14 |       12 |        1 |       2 |        8 |       21 |       19 |        7 |        3 |        6 |       3 |      0 |      2 |     31 |     46 |     37 |     22 |     22 |    249 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      6 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     13 |      7 |      8 |      2 |     97 |      0 |      1 | s03      | R    |
| 20600001 |    606 |    411 |     61 |     3 |    0 |     92 |    2 |    2 |    35 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    328 |      12 |       1 |       0 |       3 |     67 |      7 |      0 |     17 |      2 |      0 |      0 |      1 |      9 |      2 |      0 |      2 |     19 |      5 |      0 |      9 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        9 |       22 |       27 |       31 |       40 |       21 |      26 |       12 |       26 |       37 |       45 |       42 |       34 |      39 |        1 |        4 |        7 |        6 |        0 |        5 |       7 |        0 |        3 |        3 |        4 |        3 |        5 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       23 |       14 |       14 |        5 |        7 |       1 |       12 |       15 |       14 |        9 |        5 |        3 |       4 |      0 |      2 |     30 |     56 |     31 |     22 |     16 |    254 |      0 |      0 |      0 |      3 |      8 |      2 |      2 |      3 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     16 |     10 |      9 |      2 |     84 |      0 |      1 | s03      | R    |
| 20600002 |      4 |      2 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 20610001 |    711 |    507 |     45 |     6 |    0 |    110 |    1 |    0 |    42 |    0 |    0 |    0 |    0 |    0 |    0 |    325 |    386 |       6 |       2 |       0 |       3 |     89 |      5 |      0 |     20 |      1 |      0 |      0 |      0 |      6 |      1 |      0 |      2 |      3 |      0 |      0 |      6 |      4 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       11 |       32 |       30 |       38 |       44 |       25 |      36 |       17 |       31 |       46 |       61 |       54 |       34 |      48 |        0 |        3 |        5 |        5 |        4 |        4 |       6 |        2 |        0 |        5 |        0 |        0 |        4 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       10 |       17 |       13 |       16 |       11 |       0 |       15 |       17 |       13 |       18 |        8 |        5 |       1 |      0 |      1 |     53 |     69 |     24 |     20 |     19 |    321 |      0 |      0 |      0 |      4 |      9 |      0 |      0 |      1 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     24 |     19 |     10 |      5 |      2 |     96 |      0 |      1 | s03      | R    |
| 20610002 |     26 |     21 |      1 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |     15 |       0 |       0 |       0 |       1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        5 |        3 |       0 |        2 |        1 |        1 |        1 |        4 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      6 |      4 |      1 |      1 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 20620001 |     20 |     10 |      3 |     0 |    0 |      4 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |      9 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        2 |        0 |       0 |        0 |        1 |        0 |        3 |        0 |        0 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      1 |      1 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 20620002 |    635 |    409 |     38 |     6 |    0 |    139 |    3 |    3 |    37 |    0 |    0 |    0 |    0 |    0 |    0 |    285 |    350 |      14 |       0 |       0 |       5 |     52 |      5 |      0 |     23 |      2 |      1 |      0 |      2 |      3 |      0 |      0 |      1 |     11 |      2 |      0 |      7 |      1 |      1 |      0 |      2 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      2 |       10 |       35 |       23 |       33 |       31 |       28 |      11 |       20 |       46 |       38 |       44 |       36 |       40 |      14 |        7 |        1 |        4 |        3 |        0 |        3 |       1 |        0 |        4 |        2 |        1 |        1 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       32 |       18 |       14 |        7 |        5 |       0 |       20 |       34 |        5 |       15 |       11 |        7 |       1 |      0 |      1 |     46 |     64 |     29 |      7 |     22 |    240 |      0 |      0 |      2 |      5 |      5 |      2 |      0 |      0 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     21 |      6 |      2 |      3 |    129 |      0 |      1 | s03      | R    |
| 20630000 |    338 |    215 |     20 |     1 |    0 |     71 |    1 |    0 |    30 |    0 |    0 |    0 |    0 |    0 |    0 |    162 |    176 |      10 |       2 |       0 |       6 |     28 |      1 |      0 |      8 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      6 |      0 |      0 |      5 |      2 |      0 |      0 |      2 |       1 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |       10 |       19 |       19 |       13 |       22 |       10 |       6 |        9 |       21 |       14 |       26 |       27 |       10 |       9 |        0 |        3 |        1 |        2 |        0 |        4 |       1 |        0 |        1 |        1 |        0 |        2 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       18 |       13 |        8 |        2 |        4 |       0 |        5 |       26 |        9 |        7 |        2 |        2 |       0 |      0 |      3 |     18 |     31 |     12 |      7 |      8 |    136 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     11 |      2 |      7 |      0 |     71 |      0 |      1 | s03      | R    |
| 20640000 |    693 |    417 |     37 |     6 |    0 |    164 |    6 |    1 |    62 |    0 |    0 |    0 |    0 |    0 |    0 |    319 |    374 |      10 |       2 |       0 |      12 |     47 |      0 |      0 |     15 |      2 |      1 |      0 |      2 |      1 |      0 |      0 |      1 |     16 |      1 |      0 |     16 |      2 |      0 |      0 |      2 |       4 |       0 |       0 |       4 |      2 |      0 |      0 |      2 |       11 |       50 |       27 |       32 |       30 |       18 |       8 |       20 |       58 |       32 |       42 |       44 |       32 |      13 |        3 |        8 |        8 |        2 |        1 |        2 |       0 |        3 |        3 |        1 |        3 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       21 |       45 |       25 |       12 |       11 |        3 |       2 |       24 |       45 |       16 |       19 |        9 |        6 |       1 |      0 |      3 |     44 |     72 |     33 |      6 |     20 |    239 |      0 |      0 |      0 |      4 |      6 |      2 |      2 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     39 |     21 |     15 |      8 |      2 |    152 |      0 |      1 | s03      | R    |
| 20650000 |    742 |    408 |     35 |     5 |    0 |    227 |    7 |    3 |    57 |    0 |    0 |    0 |    0 |    0 |    0 |    356 |    386 |      17 |       1 |       0 |      10 |     35 |      0 |      0 |     17 |      9 |      3 |      0 |      6 |      3 |      1 |      0 |      3 |     33 |      5 |      0 |     45 |      9 |      0 |      0 |      6 |       5 |       0 |       0 |       6 |      2 |      0 |      0 |      1 |       34 |       43 |       27 |       27 |       29 |        6 |       3 |       52 |       60 |       27 |       43 |       36 |       10 |      11 |        6 |        8 |        3 |        2 |        1 |        1 |       1 |        7 |        1 |        0 |        1 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       55 |       59 |       17 |       14 |       14 |        3 |       3 |       52 |       36 |       13 |       11 |       17 |        3 |       2 |      0 |      1 |     40 |     54 |     34 |      5 |     13 |    261 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      1 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     38 |     23 |     10 |      6 |      3 |    218 |      0 |      1 | s03      | R    |
| 20670001 |    660 |    373 |     44 |     6 |    0 |    193 |    2 |    3 |    39 |    0 |    0 |    0 |    0 |    0 |    0 |    300 |    360 |      23 |       2 |       0 |      15 |     43 |      1 |      0 |     17 |      2 |      2 |      0 |      4 |      5 |      1 |      0 |      5 |     16 |      2 |      0 |     27 |      5 |      0 |      0 |      3 |       2 |       0 |       0 |       4 |      2 |      1 |      0 |      0 |       11 |       41 |       29 |       30 |       24 |       10 |       5 |       23 |       52 |       40 |       36 |       31 |       33 |       8 |        6 |        2 |        4 |        2 |        4 |        2 |       3 |        4 |        3 |        2 |        1 |        2 |        4 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       31 |       46 |       17 |       12 |       12 |        9 |       0 |       33 |       36 |       10 |       10 |       12 |       15 |       0 |      0 |      2 |     42 |     55 |     30 |      9 |     21 |    214 |      0 |      0 |      0 |      3 |      5 |      2 |      2 |      2 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     25 |     26 |     17 |      8 |      5 |    158 |      0 |      1 | s03      | R    |
| 20670002 |     57 |     32 |      2 |     1 |    0 |     14 |    0 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |     30 |     27 |       3 |       0 |       0 |       0 |      6 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        6 |        2 |        7 |        1 |       0 |        1 |        4 |        5 |        3 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        6 |        2 |        4 |        0 |        0 |       0 |        3 |        2 |        3 |        2 |        0 |        1 |       0 |      0 |      0 |      2 |      6 |      4 |      3 |      3 |     14 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      1 |      0 |     16 |      0 |      1 | s03      | R    |
| 20670003 |     39 |     18 |      3 |     0 |    0 |     13 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     17 |     22 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        0 |        3 |        0 |        0 |       0 |        3 |        2 |        0 |        2 |        3 |        3 |       1 |        0 |        1 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        5 |        4 |        0 |        0 |        0 |       0 |        0 |        6 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |      2 |      2 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     14 |      0 |      1 | s03      | R    |
| 20680001 |    287 |    146 |     18 |     4 |    0 |     94 |    4 |    1 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    158 |    129 |      13 |       2 |       0 |       7 |     11 |      2 |      0 |     11 |      3 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      7 |      2 |      0 |     15 |      2 |      0 |      0 |      1 |       2 |       2 |       0 |       1 |      3 |      0 |      0 |      0 |       15 |       21 |       10 |       16 |       10 |        2 |       1 |       20 |       23 |        8 |        7 |        7 |        5 |       1 |        3 |        3 |        1 |        3 |        3 |        0 |       0 |        3 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       27 |       14 |        5 |       10 |        0 |       0 |       19 |       24 |        5 |        1 |        4 |        0 |       0 |      0 |      0 |     22 |     21 |      6 |      4 |      4 |     89 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     19 |      6 |      0 |      2 |     82 |      0 |      1 | s03      | R    |
| 20680002 |    435 |    210 |     23 |     1 |    0 |    144 |    3 |    1 |    53 |    0 |    0 |    0 |    0 |    0 |    0 |    195 |    240 |       6 |       1 |       0 |      11 |     15 |      2 |      0 |     12 |      5 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     26 |      3 |      0 |     31 |      6 |      0 |      0 |      8 |       1 |       0 |       0 |       1 |      4 |      0 |      0 |      1 |       16 |       20 |       14 |       17 |        5 |        7 |       3 |       37 |       28 |       12 |        9 |        9 |       30 |       3 |        4 |        5 |        0 |        1 |        3 |        1 |       1 |        0 |        2 |        0 |        0 |        0 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       41 |       27 |        6 |        5 |        6 |       11 |       2 |       46 |       28 |        5 |        9 |        1 |       15 |       0 |      0 |      3 |     27 |     19 |     11 |      4 |      6 |    140 |      0 |      0 |      0 |      2 |      2 |      2 |      1 |      2 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     25 |      6 |      2 |      9 |      2 |    155 |      0 |      1 | s03      | R    |
| 20680003 |    174 |     94 |      8 |     3 |    0 |     52 |    1 |    1 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |     90 |     84 |       5 |       0 |       0 |       4 |      7 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      3 |      2 |      0 |      2 |      4 |      0 |      0 |      2 |       0 |       0 |       0 |       2 |      0 |      0 |      0 |      0 |        8 |       12 |        9 |        8 |        6 |        1 |       2 |       10 |       10 |       10 |        5 |        9 |        2 |       2 |        4 |        0 |        1 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       12 |       13 |        2 |        3 |        1 |       0 |        9 |       13 |        7 |        5 |        1 |        0 |       0 |      0 |      1 |     13 |     11 |      1 |      0 |      8 |     60 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |      3 |      3 |      2 |      0 |     48 |      0 |      1 | s03      | R    |
| 20700001 |     29 |     16 |      2 |     0 |    0 |      8 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     13 |     16 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        2 |        2 |       2 |        0 |        0 |        2 |        3 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        2 |        2 |        2 |        0 |        1 |       0 |      0 |      0 |      2 |      2 |      4 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      8 |      0 |      1 | s03      | R    |
| 20700002 |    479 |    321 |     23 |     6 |    0 |     91 |    0 |    0 |    38 |    0 |    0 |    0 |    0 |    0 |    0 |    206 |    273 |      14 |       1 |       0 |       2 |     46 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |     11 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |       2 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |        4 |       19 |       28 |       25 |       27 |       14 |      11 |       10 |       36 |       40 |       36 |       33 |       11 |      27 |        0 |        5 |        0 |        2 |        1 |        1 |       2 |        0 |        2 |        2 |        0 |        1 |        2 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       27 |       11 |       10 |        7 |        3 |       0 |        7 |       22 |       19 |       13 |        4 |        3 |       0 |      0 |      1 |     38 |     33 |     28 |     13 |     11 |    197 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     21 |      7 |      6 |      3 |     83 |      0 |      1 | s03      | R    |
| 20700003 |     30 |     21 |      4 |     0 |    0 |      3 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |     16 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        3 |        0 |        3 |       0 |        0 |        1 |        3 |        4 |        2 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      2 |      1 |      1 |      4 |     10 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 20700004 |     73 |     44 |      0 |     1 |    0 |     21 |    0 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |     32 |     41 |       2 |       0 |       0 |       1 |     10 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        3 |        3 |        7 |        2 |       0 |        3 |        7 |        9 |        2 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        4 |        3 |        0 |        2 |        0 |       1 |        1 |        8 |        2 |        3 |        2 |        0 |       0 |      0 |      0 |      9 |      7 |      2 |      2 |      1 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      2 |      1 |      1 |     21 |      0 |      1 | s03      | R    |
| 20701001 |    364 |    247 |     17 |     2 |    0 |     53 |    2 |    1 |    42 |    0 |    0 |    0 |    0 |    0 |    0 |    159 |    205 |       7 |       1 |       0 |       1 |     31 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      5 |      4 |      0 |      1 |      7 |      1 |      0 |      2 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        7 |       17 |       21 |       20 |       21 |        9 |       6 |       10 |       15 |       26 |       38 |       28 |       17 |      12 |        1 |        1 |        2 |        2 |        0 |        0 |       2 |        0 |        0 |        0 |        1 |        1 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       14 |       13 |       10 |        6 |        2 |       0 |        6 |       15 |       13 |       10 |        4 |        2 |       0 |      0 |      0 |     26 |     49 |     22 |      9 |      8 |    133 |      0 |      0 |      2 |      1 |      3 |      1 |      1 |      1 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     13 |      3 |      9 |      0 |     59 |      0 |      1 | s03      | R    |
| 20701002 |     34 |     17 |      2 |     0 |    0 |     14 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     19 |     15 |       1 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        2 |        1 |        1 |        0 |       1 |        1 |        1 |        2 |        1 |        1 |        1 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        5 |        0 |        0 |        1 |       0 |        2 |        0 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 20710001 |     25 |     13 |      4 |     0 |    0 |      6 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     15 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        5 |        1 |        1 |        1 |       1 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        2 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      9 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 20710002 |    467 |    335 |     22 |     4 |    0 |     67 |    1 |    0 |    38 |    0 |    0 |    0 |    0 |    0 |    0 |    205 |    262 |      14 |       0 |       0 |       2 |     53 |      2 |      0 |      7 |      1 |      0 |      0 |      1 |     13 |      3 |      0 |      2 |      7 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |        8 |       13 |       27 |       31 |       24 |       13 |      21 |       10 |       12 |       41 |       56 |       42 |       20 |      17 |        1 |        4 |        1 |        1 |        0 |        1 |       6 |        0 |        0 |        2 |        0 |        0 |        1 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       11 |       11 |        9 |        9 |        5 |       1 |       11 |       10 |       12 |       10 |        7 |        5 |       1 |      0 |      0 |     32 |     53 |     29 |     15 |     16 |    190 |      0 |      0 |      0 |      1 |      5 |      1 |      1 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |     11 |     13 |     10 |      1 |     58 |      0 |      1 | s03      | R    |
| 20720001 |     36 |     28 |      0 |     0 |    0 |      5 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     16 |       0 |       0 |       0 |       1 |      7 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        5 |        3 |        1 |        2 |        1 |       2 |        2 |        2 |        3 |        2 |        2 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        2 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      5 |      2 |      2 |      1 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      4 |      0 |      1 | s03      | R    |
| 20720002 |    556 |    348 |     39 |     7 |    0 |    109 |    3 |    1 |    49 |    0 |    0 |    0 |    0 |    0 |    0 |    256 |    300 |      19 |       3 |       0 |      10 |     26 |      3 |      0 |     16 |      0 |      0 |      0 |      2 |     12 |      3 |      0 |      1 |     25 |      9 |      0 |     12 |      1 |      1 |      0 |      1 |       1 |       0 |       0 |       1 |      2 |      0 |      0 |      1 |        7 |       27 |       24 |       40 |       23 |       11 |      17 |       13 |       29 |       39 |       47 |       28 |       14 |      29 |        1 |        4 |        1 |        5 |        2 |        3 |       2 |        3 |        1 |        1 |        2 |        1 |        9 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       29 |       20 |       15 |       11 |        5 |       1 |       17 |       20 |       13 |       13 |        9 |        4 |       4 |      0 |      3 |     35 |     57 |     33 |     11 |      8 |    201 |      0 |      0 |      0 |      5 |      3 |      3 |      1 |      2 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     23 |     11 |      5 |      1 |    106 |      0 |      1 | s03      | R    |
| 20730001 |    570 |    348 |     28 |     2 |    0 |    124 |    3 |    0 |    65 |    0 |    0 |    0 |    0 |    0 |    0 |    271 |    299 |      12 |       0 |       0 |       6 |     35 |      1 |      0 |     14 |      4 |      1 |      0 |      2 |      9 |      0 |      0 |      1 |      9 |      3 |      0 |     19 |      2 |      0 |      0 |      4 |       1 |       1 |       0 |       2 |      3 |      0 |      0 |      2 |        8 |       33 |       32 |       26 |       33 |        9 |      13 |       10 |       40 |       41 |       44 |       35 |       16 |       8 |        0 |        3 |        3 |        1 |        4 |        1 |       5 |        2 |        1 |        2 |        1 |        1 |        0 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       40 |       18 |       12 |        8 |        5 |       1 |       15 |       33 |       18 |        9 |       12 |        7 |       0 |      0 |      0 |     29 |     66 |     33 |     10 |     15 |    195 |      0 |      0 |      0 |      2 |      3 |      1 |      2 |      2 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     25 |     25 |      8 |      9 |      0 |    124 |      0 |      1 | s03      | R    |
| 20730002 |      7 |      4 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20750001 |      8 |      4 |      3 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      5 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20750002 |    576 |    328 |     26 |     5 |    0 |    167 |    3 |    1 |    46 |    0 |    0 |    0 |    0 |    0 |    0 |    286 |    290 |      23 |       2 |       0 |      10 |     33 |      1 |      0 |     11 |      4 |      2 |      0 |      2 |      9 |      2 |      0 |      4 |     12 |      2 |      0 |     18 |      2 |      0 |      0 |      5 |       7 |       0 |       0 |       2 |      1 |      0 |      0 |      3 |       22 |       52 |       22 |       30 |       21 |        6 |       5 |       15 |       51 |       35 |       31 |       22 |       10 |       6 |        3 |        4 |        2 |        4 |        0 |        1 |       2 |        1 |        2 |        1 |        1 |        3 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       46 |       16 |       19 |        8 |        5 |       0 |       24 |       58 |        4 |        8 |       10 |        5 |       1 |      0 |      0 |     44 |     54 |     25 |      7 |     13 |    185 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     27 |     24 |      5 |      2 |      0 |    161 |      0 |      1 | s03      | R    |
| 20760001 |    592 |    257 |     53 |    13 |    0 |    223 |    8 |    4 |    34 |    0 |    0 |    0 |    0 |    0 |    0 |    333 |    259 |      26 |       7 |       0 |      18 |      7 |      4 |      0 |     15 |      5 |      2 |      0 |      8 |      1 |      0 |      0 |      5 |     28 |      4 |      0 |     38 |      8 |      1 |      0 |      3 |       8 |       2 |       0 |       6 |      5 |      0 |      0 |      5 |       51 |       31 |       19 |       11 |       11 |        3 |       3 |       62 |       30 |        8 |        7 |       15 |        5 |       1 |       16 |        9 |        1 |        5 |        5 |        3 |       0 |        4 |        5 |        1 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       71 |       44 |       14 |       18 |       16 |        0 |       2 |       78 |       25 |        4 |        7 |        3 |        0 |       0 |      0 |      0 |     17 |     24 |      6 |      2 |      3 |    205 |      0 |      0 |      0 |      4 |      4 |      1 |      2 |      2 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     24 |     23 |      2 |      0 |      1 |    231 |      0 |      1 | s03      | R    |
| 20760002 |    284 |    125 |     22 |     2 |    0 |    111 |    0 |    0 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    135 |    149 |       9 |       2 |       0 |       5 |      7 |      1 |      0 |      5 |      3 |      2 |      0 |     14 |      1 |      0 |      0 |      0 |     21 |      8 |      0 |     21 |      3 |      0 |      0 |      4 |       5 |       1 |       0 |       9 |      4 |      0 |      0 |      2 |       18 |       17 |        8 |       12 |        3 |        1 |       0 |       30 |       20 |        6 |        6 |        4 |        0 |       0 |        5 |        6 |        0 |        0 |        1 |        0 |       0 |        2 |        8 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       33 |       17 |        8 |        4 |        2 |        0 |       0 |       50 |       19 |        1 |        0 |        3 |        0 |       0 |      0 |      1 |     12 |     10 |      5 |      2 |      3 |     92 |      0 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     10 |      2 |      2 |      0 |    108 |      0 |      1 | s03      | R    |
| 20770000 |    985 |    494 |     63 |    14 |    0 |    318 |    8 |    2 |    86 |    0 |    0 |    0 |    0 |    0 |    0 |    510 |    475 |      55 |       2 |       0 |      30 |     42 |      4 |      0 |     25 |      9 |      2 |      0 |      9 |      5 |      1 |      0 |      1 |     50 |      9 |      0 |     53 |     17 |      1 |      0 |     13 |       6 |       2 |       0 |       8 |      9 |      1 |      0 |      5 |       77 |       57 |       32 |       27 |       24 |       17 |       5 |       84 |       74 |       19 |       24 |       27 |       24 |       3 |       11 |       11 |        7 |        5 |        3 |        0 |       0 |       12 |        4 |        1 |        2 |        3 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       80 |       84 |       20 |       19 |       14 |       17 |       0 |       80 |       68 |       12 |        6 |       11 |       14 |       3 |      0 |      2 |     48 |     74 |     21 |      5 |     11 |    333 |      0 |      0 |      1 |     10 |      4 |      0 |      1 |      4 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     65 |     47 |      9 |      4 |      1 |    302 |      0 |      1 | s03      | R    |
| 20800001 |    575 |    333 |     26 |     8 |    0 |    157 |    8 |    0 |    43 |    0 |    0 |    0 |    0 |    0 |    0 |    260 |    315 |      23 |       3 |       0 |      15 |     25 |      2 |      0 |     15 |      3 |      0 |      0 |      1 |      4 |      0 |      0 |      2 |     15 |      2 |      0 |     18 |      3 |      0 |      0 |      5 |       3 |       1 |       0 |       1 |      2 |      0 |      0 |      1 |       21 |       42 |       28 |       18 |       14 |        9 |       5 |       21 |       47 |       39 |       34 |       30 |       19 |       6 |        2 |        5 |        2 |        5 |        1 |        0 |       1 |        0 |        4 |        1 |        1 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       26 |       38 |       15 |       14 |       12 |        2 |       0 |       21 |       41 |       18 |       13 |        8 |        6 |       2 |      0 |      1 |     44 |     67 |     23 |      5 |      7 |    186 |      0 |      0 |      0 |      4 |      5 |      1 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     28 |     34 |      8 |      3 |      4 |    138 |      0 |      1 | s03      | R    |
| 20800002 |      3 |      1 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20801001 |    100 |     61 |     15 |     0 |    0 |     20 |    0 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     34 |     66 |       3 |       0 |       0 |       1 |      4 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      0 |        2 |        2 |        2 |        3 |        2 |        4 |       1 |        0 |        3 |        4 |        5 |        1 |       25 |       7 |        0 |        0 |        0 |        0 |        0 |        6 |       2 |        0 |        1 |        0 |        1 |        0 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        5 |        1 |        0 |        1 |        3 |       0 |        0 |        2 |        1 |        3 |        1 |        7 |       0 |      0 |      0 |      6 |      7 |      2 |      2 |      4 |     40 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      1 |     16 |      0 |      1 | s03      | R    |
| 20801002 |    713 |    410 |     33 |     7 |    0 |    180 |    9 |    2 |    72 |    0 |    0 |    0 |    0 |    0 |    0 |    339 |    374 |      36 |       3 |       0 |      23 |     28 |      2 |      0 |     13 |      1 |      1 |      0 |      3 |     10 |      3 |      0 |      2 |     16 |      2 |      0 |     14 |      2 |      0 |      0 |      2 |       3 |       1 |       0 |       6 |      5 |      0 |      0 |      1 |       10 |       50 |       35 |       41 |       21 |        9 |       9 |       15 |       51 |       55 |       48 |       37 |       15 |      14 |        1 |        2 |        1 |        4 |        6 |        2 |       1 |        2 |        3 |        4 |        3 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       25 |       63 |       28 |       19 |        7 |        5 |       0 |       20 |       38 |       35 |       16 |        9 |        5 |       0 |      0 |      2 |     48 |     80 |     28 |     17 |     10 |    225 |      0 |      0 |      1 |      5 |      9 |      3 |      1 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     35 |     33 |      9 |      6 |      2 |    181 |      0 |      1 | s03      | R    |
| 20802000 |    293 |    171 |      7 |     3 |    0 |     69 |    2 |    2 |    39 |    0 |    0 |    0 |    0 |    0 |    0 |    133 |    160 |       6 |       0 |       0 |       7 |      9 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      2 |      4 |      1 |      0 |      3 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |       26 |       14 |       14 |        8 |       10 |       2 |        3 |       16 |       23 |       11 |       20 |       17 |       6 |        0 |        0 |        1 |        0 |        0 |        2 |       1 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       15 |        7 |        9 |        5 |        3 |       0 |        2 |       29 |       11 |       10 |        5 |        3 |       1 |      0 |      1 |     24 |     22 |      7 |      1 |      7 |    109 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     12 |      6 |      1 |      0 |     85 |      0 |      1 | s03      | R    |
| 20810001 |     56 |     40 |      0 |     2 |    0 |     11 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     36 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |       10 |        0 |        2 |        1 |        0 |       1 |        1 |       11 |        2 |        4 |        1 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        2 |        1 |        1 |        0 |       0 |        4 |        2 |        2 |        0 |        2 |        0 |       0 |      0 |      0 |      5 |      4 |      1 |      0 |      2 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |     10 |      0 |      1 | s03      | R    |
| 20810002 |    518 |    355 |     20 |     4 |    0 |     88 |    1 |    0 |    50 |    0 |    0 |    0 |    0 |    0 |    0 |    238 |    280 |      20 |       0 |       0 |       6 |     24 |      1 |      0 |     15 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      6 |      0 |      0 |      7 |      4 |      0 |      0 |      1 |       2 |       1 |       0 |       1 |      4 |      0 |      0 |      1 |       15 |       26 |       29 |       37 |       29 |        8 |       8 |       18 |       45 |       32 |       51 |       28 |       10 |      19 |        0 |        1 |        3 |        3 |        1 |        1 |       1 |        0 |        1 |        0 |        1 |        3 |        1 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       21 |       14 |       16 |       11 |        3 |       0 |        9 |       20 |       10 |       18 |        6 |        4 |       0 |      0 |      2 |     35 |     47 |     32 |      6 |     21 |    212 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      2 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     31 |     14 |     11 |      5 |      0 |     81 |      0 |      1 | s03      | R    |
| 20811001 |    548 |    325 |     26 |     2 |    0 |    125 |    4 |    1 |    65 |    0 |    0 |    0 |    0 |    0 |    0 |    253 |    295 |      12 |       2 |       0 |       8 |     31 |      1 |      0 |     23 |      4 |      0 |      0 |      2 |     13 |      1 |      0 |      1 |     10 |      4 |      0 |      9 |      5 |      0 |      0 |      2 |       1 |       0 |       0 |       1 |      3 |      0 |      0 |      1 |       27 |       32 |       21 |       20 |       22 |        8 |      11 |       26 |       40 |       25 |       46 |       26 |       11 |      10 |        2 |        3 |        1 |        3 |        4 |        2 |       0 |        2 |        1 |        2 |        3 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       26 |       31 |       14 |       13 |       10 |        2 |       1 |       26 |       33 |       17 |       10 |        9 |        5 |       0 |      0 |      2 |     32 |     37 |     21 |     11 |     20 |    202 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      1 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     14 |      5 |      6 |      2 |    143 |      0 |      1 | s03      | R    |
| 20811002 |     52 |     31 |      2 |     0 |    0 |     15 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     23 |     29 |       2 |       0 |       0 |       2 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        2 |        3 |        1 |        1 |       1 |        2 |        4 |        3 |        2 |        3 |        2 |       4 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        2 |        1 |        0 |        0 |        1 |       1 |        2 |        4 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      5 |      3 |      2 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |     17 |      0 |      1 | s03      | R    |
| 20820001 |    599 |    337 |     23 |     5 |    0 |    152 |    3 |    3 |    76 |    0 |    0 |    0 |    0 |    0 |    0 |    255 |    344 |      18 |       1 |       0 |      16 |     30 |      2 |      0 |     19 |      0 |      1 |      0 |      3 |      6 |      0 |      0 |      3 |     12 |      1 |      0 |     14 |      1 |      0 |      0 |      2 |       1 |       1 |       0 |       0 |      1 |      0 |      0 |      1 |       18 |       21 |       31 |       31 |       21 |        8 |       2 |       23 |       49 |       39 |       39 |       34 |       13 |       8 |        2 |        3 |        3 |        4 |        1 |        2 |       1 |        1 |        0 |        0 |        1 |        2 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       35 |       28 |       13 |       11 |        3 |       2 |       29 |       42 |       27 |       11 |       15 |        5 |       3 |      0 |      1 |     36 |     61 |     26 |     11 |     13 |    189 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     33 |     24 |      9 |     14 |      1 |    155 |      0 |      1 | s03      | R    |
| 20820002 |     32 |     18 |      4 |     0 |    0 |      9 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |     20 |       1 |       1 |       0 |       1 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        2 |        1 |        0 |        3 |        0 |       0 |        0 |        4 |        4 |        0 |        1 |        1 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        0 |        1 |        0 |       0 |        1 |        3 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 20821001 |    633 |    401 |     16 |     5 |    0 |    139 |    4 |    5 |    63 |    0 |    0 |    0 |    0 |    0 |    0 |    294 |    339 |      16 |       2 |       0 |      12 |     30 |      3 |      0 |     13 |      1 |      1 |      0 |      1 |      4 |      1 |      0 |      0 |     16 |      0 |      0 |      8 |      1 |      0 |      0 |      2 |       5 |       0 |       0 |       3 |      3 |      0 |      0 |      3 |       20 |       33 |       24 |       50 |       19 |       12 |      14 |       28 |       46 |       48 |       44 |       31 |       15 |      17 |        2 |        2 |        2 |        3 |        3 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       27 |       30 |       17 |       13 |       17 |        5 |       0 |       23 |       35 |       23 |       15 |       10 |        1 |       0 |      0 |      2 |     47 |     46 |     31 |     12 |     17 |    246 |      0 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     33 |     18 |     10 |      5 |      2 |    143 |      0 |      1 | s03      | R    |
| 20821002 |     53 |     32 |      3 |     1 |    0 |     14 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     32 |     21 |      11 |       0 |       0 |       3 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        7 |        2 |        4 |        0 |        3 |        1 |       1 |        3 |        3 |        2 |        3 |        2 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        0 |        7 |        1 |        0 |       0 |        3 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      0 |      1 |      0 |      0 |     11 |      0 |      1 | s03      | R    |
| 20830001 |     17 |     10 |      1 |     1 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        3 |        0 |        1 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |      0 |      1 | s03      | R    |
| 20830002 |    833 |    565 |     22 |    11 |    0 |    176 |    2 |    2 |    55 |    0 |    0 |    0 |    0 |    0 |    0 |    336 |    497 |      25 |       0 |       0 |      13 |     30 |      4 |      0 |     32 |      2 |      0 |      0 |      2 |      6 |      1 |      0 |      1 |      4 |      0 |      0 |      5 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       4 |      1 |      0 |      0 |      1 |       17 |       34 |       39 |       44 |       38 |       10 |      20 |       27 |       56 |       69 |       67 |       57 |       40 |      47 |        2 |        2 |        3 |        2 |        2 |        0 |       1 |        2 |        2 |        1 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       21 |       48 |       13 |       24 |       10 |        5 |       1 |       30 |       36 |       24 |       17 |       13 |        3 |       1 |      0 |      3 |     76 |     84 |     33 |     12 |     21 |    336 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      1 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     42 |     33 |     12 |      9 |      4 |    143 |      0 |      1 | s03      | R    |
| 20831001 |      9 |      8 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20831002 |    632 |    420 |     20 |     8 |    0 |    117 |    2 |    5 |    60 |    0 |    0 |    0 |    0 |    0 |    0 |    270 |    362 |      21 |       5 |       0 |      16 |     13 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      0 |      0 |      7 |      1 |      2 |      0 |      3 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       14 |       32 |       39 |       26 |       21 |       14 |       9 |       27 |       55 |       54 |       36 |       40 |       30 |      23 |        3 |        5 |        3 |        5 |        0 |        0 |       0 |        0 |        0 |        3 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       35 |       21 |       20 |        8 |        2 |       0 |       14 |       32 |       22 |       12 |        6 |        5 |       2 |      0 |      2 |     50 |     63 |     33 |     10 |     18 |    244 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     26 |     26 |      2 |      4 |      0 |    131 |      0 |      1 | s03      | R    |
| 20840000 |    717 |    431 |     29 |     6 |    0 |    168 |    3 |    5 |    75 |    0 |    0 |    0 |    0 |    0 |    0 |    314 |    403 |      30 |       1 |       0 |      20 |     22 |      1 |      0 |     19 |      1 |      0 |      0 |      0 |      9 |      2 |      0 |      3 |      3 |      2 |      0 |      7 |      1 |      0 |      0 |      3 |       0 |       1 |       0 |       3 |      1 |      0 |      0 |      1 |       10 |       29 |       36 |       29 |       31 |       12 |      17 |       23 |       50 |       45 |       54 |       37 |       32 |      26 |        2 |        7 |        4 |        9 |        3 |        0 |       1 |        0 |        0 |        0 |        0 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       49 |       24 |       20 |       11 |        5 |       1 |       24 |       58 |       24 |       15 |        5 |        7 |       0 |      0 |      1 |     42 |     51 |     43 |     12 |     19 |    263 |      0 |      0 |      0 |      0 |      7 |      3 |      0 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     37 |     25 |     10 |      3 |      2 |    175 |      0 |      1 | s03      | R    |
| 20841001 |    326 |    186 |     16 |     3 |    0 |     88 |    1 |    0 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    165 |    161 |      16 |       0 |       0 |       9 |     16 |      1 |      0 |      7 |      0 |      1 |      0 |      1 |      7 |      2 |      0 |      3 |      8 |      0 |      0 |      9 |      6 |      0 |      0 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       15 |       11 |       13 |       23 |        8 |        6 |       2 |       14 |       30 |       22 |       14 |       12 |        7 |       9 |        2 |        2 |        1 |        2 |        3 |        1 |       0 |        0 |        1 |        0 |        0 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       27 |       14 |       14 |        1 |        3 |       2 |       13 |       16 |        5 |        9 |        4 |        0 |       1 |      0 |      2 |     20 |     26 |     15 |      9 |      7 |    107 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     23 |      4 |      4 |      1 |     76 |      0 |      1 | s03      | R    |
| 20841003 |    151 |    105 |      6 |     2 |    0 |     28 |    0 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |     57 |     94 |       2 |       0 |       0 |       0 |      6 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        8 |        9 |        4 |        6 |        0 |       4 |        5 |       18 |       15 |       12 |       13 |        4 |       5 |        1 |        1 |        0 |        1 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        4 |        3 |        6 |        3 |        2 |       0 |        5 |        4 |        3 |        4 |        2 |        2 |       0 |      0 |      0 |      7 |     16 |      8 |      1 |      8 |     65 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      9 |      4 |      1 |      0 |     20 |      0 |      1 | s03      | R    |
| 20842000 |    111 |     52 |      6 |     0 |    0 |     40 |    0 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |     57 |     54 |       4 |       0 |       0 |       1 |      5 |      0 |      0 |      4 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |       1 |       0 |       0 |       2 |      0 |      1 |      0 |      0 |        9 |        5 |        3 |        3 |        4 |        2 |       1 |        5 |        9 |        1 |        6 |        4 |        0 |       0 |        0 |        3 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        9 |        5 |        1 |        4 |        1 |       0 |       11 |        9 |        1 |        3 |        4 |        0 |       0 |      0 |      0 |      5 |      7 |      0 |      2 |      0 |     38 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      5 |      1 |      0 |     41 |      0 |      1 | s03      | R    |
| 20850001 |    193 |    116 |      6 |     1 |    0 |     54 |    2 |    1 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |     99 |     94 |      11 |       0 |       0 |       5 |     10 |      1 |      0 |      3 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      5 |      1 |      0 |      4 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |       18 |        7 |        4 |       12 |        6 |        4 |       2 |       10 |       13 |        7 |       13 |        4 |       15 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       19 |        7 |        5 |        5 |        1 |       0 |        9 |        7 |        4 |        4 |        0 |        2 |       0 |      0 |      1 |      9 |     12 |     10 |      2 |      6 |     76 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |      9 |      4 |      0 |      3 |     42 |      0 |      1 | s03      | R    |
| 20850002 |    318 |    194 |     15 |     3 |    0 |     72 |    2 |    0 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    159 |    159 |      11 |       2 |       0 |       4 |     13 |      1 |      0 |      7 |      1 |      1 |      0 |      0 |      6 |      2 |      0 |      1 |      2 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |       13 |       20 |       18 |       18 |        6 |      12 |       10 |       15 |       18 |       25 |       19 |        9 |       6 |        3 |        1 |        0 |        3 |        1 |        2 |       1 |        1 |        0 |        0 |        0 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       15 |       12 |        8 |        8 |        2 |       3 |        9 |       13 |       12 |        8 |        7 |        4 |       0 |      0 |      0 |     27 |     41 |     10 |      7 |     10 |     99 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |     14 |      4 |      2 |      0 |     70 |      0 |      1 | s03      | R    |
| 20851001 |      2 |      1 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20851002 |    509 |    306 |     15 |     5 |    0 |    133 |    2 |    1 |    47 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    277 |      11 |       0 |       0 |      19 |     12 |      0 |      0 |     11 |      0 |      1 |      0 |      0 |      6 |      0 |      0 |      1 |      7 |      0 |      0 |      5 |      2 |      1 |      0 |      4 |       0 |       0 |       0 |       2 |      2 |      0 |      0 |      2 |       12 |       20 |       15 |       31 |       19 |       24 |       5 |       15 |       24 |       28 |       25 |       31 |       40 |      17 |        0 |        2 |        0 |        4 |        0 |        2 |       0 |        0 |        3 |        1 |        1 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       35 |       15 |       18 |       10 |        2 |       2 |       18 |       32 |       13 |       15 |        6 |        6 |       0 |      0 |      5 |     36 |     50 |     25 |      7 |     10 |    173 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     26 |     20 |      4 |      4 |      0 |    130 |      0 |      1 | s03      | R    |
| 20860000 |    442 |    248 |     15 |     2 |    0 |    105 |    2 |    0 |    70 |    0 |    0 |    0 |    0 |    0 |    0 |    197 |    245 |      15 |       0 |       0 |      11 |     23 |      0 |      0 |     17 |      2 |      0 |      0 |      3 |      6 |      0 |      0 |      1 |      3 |      0 |      0 |      5 |      5 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      3 |      0 |      0 |      0 |       10 |       19 |       18 |       20 |       12 |        9 |      10 |       20 |       32 |       27 |       32 |       15 |        9 |      15 |        1 |        0 |        1 |        2 |        2 |        1 |       1 |        2 |        1 |        0 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       44 |       16 |        8 |        9 |        1 |       0 |       19 |       35 |       12 |       12 |        9 |        0 |       1 |      0 |      2 |     22 |     37 |     16 |      7 |     10 |    154 |      0 |      0 |      0 |      1 |      2 |      2 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     22 |     13 |      5 |      8 |      0 |    128 |      0 |      1 | s03      | R    |
| 20861001 |    690 |    403 |     24 |     6 |    0 |    169 |    3 |    6 |    79 |    0 |    0 |    0 |    0 |    0 |    0 |    314 |    376 |      21 |       2 |       0 |       7 |     18 |      1 |      0 |     20 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      3 |      8 |      0 |      0 |      7 |      4 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      3 |      0 |      0 |      3 |       12 |       37 |       34 |       40 |       25 |       21 |      11 |       22 |       45 |       43 |       44 |       24 |       21 |      24 |        2 |        6 |        3 |        2 |        1 |        2 |       0 |        1 |        3 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       44 |       27 |       14 |       12 |        8 |       1 |       33 |       60 |       19 |       16 |       11 |        5 |       1 |      0 |      2 |     50 |     71 |     14 |      7 |     14 |    245 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     42 |     30 |     15 |      6 |      1 |    164 |      0 |      1 | s03      | R    |
| 20861002 |     14 |     12 |      0 |     0 |    0 |      1 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        2 |        0 |        0 |       1 |        0 |        1 |        1 |        3 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20861003 |    366 |    204 |     12 |     4 |    0 |     91 |    5 |    2 |    48 |    0 |    0 |    0 |    0 |    0 |    0 |    149 |    217 |       9 |       0 |       0 |       9 |     12 |      1 |      0 |     15 |      0 |      0 |      0 |      1 |      2 |      3 |      0 |      0 |      4 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        8 |       20 |       13 |       20 |       12 |        3 |       4 |       12 |       32 |       23 |       24 |       18 |        9 |       6 |        0 |        1 |        3 |        3 |        0 |        0 |       1 |        0 |        2 |        0 |        0 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       24 |       10 |        8 |        6 |        2 |       0 |       19 |       23 |       17 |       18 |       10 |        2 |       0 |      0 |      0 |     19 |     38 |     11 |      5 |     12 |    119 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     17 |     12 |      6 |      3 |      1 |    108 |      0 |      1 | s03      | R    |
| 20862001 |    146 |     77 |      6 |     3 |    0 |     41 |    2 |    2 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |     61 |     85 |       8 |       0 |       0 |       1 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      1 |        4 |        3 |        6 |        6 |        3 |        1 |       2 |        6 |       13 |       14 |        8 |        5 |        4 |       2 |        0 |        0 |        1 |        3 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |       16 |        4 |        8 |        2 |        0 |       0 |        8 |       12 |        7 |        3 |        1 |        0 |       1 |      0 |      0 |     11 |     12 |      5 |      4 |      7 |     38 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      8 |      3 |      3 |      0 |     41 |      0 |      1 | s03      | R    |
| 20862002 |    211 |    120 |     14 |     1 |    0 |     56 |    0 |    1 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    106 |    105 |       8 |       1 |       0 |       3 |     11 |      0 |      0 |      9 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |       10 |        9 |       11 |       11 |        7 |        4 |       4 |       11 |       21 |        9 |        9 |        4 |        7 |       3 |        3 |        3 |        1 |        1 |        0 |        1 |       0 |        1 |        2 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       22 |        3 |        3 |        3 |        2 |       1 |        7 |       15 |        4 |        6 |        2 |        2 |       0 |      0 |      1 |     13 |     17 |      4 |      2 |      3 |     80 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     16 |      2 |      0 |      0 |     48 |      0 |      1 | s03      | R    |
| 20870000 |   1262 |    751 |     51 |    24 |    0 |    312 |    8 |    9 |   107 |    0 |    0 |    0 |    0 |    0 |    0 |    546 |    716 |      65 |       2 |       0 |      42 |     36 |      1 |      0 |     27 |      6 |      1 |      0 |      3 |      4 |      0 |      0 |      4 |      8 |      3 |      0 |     14 |     13 |      0 |      0 |     10 |       5 |       4 |       0 |       1 |      2 |      0 |      0 |      1 |       27 |       67 |       57 |       51 |       40 |       30 |      22 |       52 |       94 |       76 |       82 |       54 |       55 |      44 |        2 |        9 |        7 |        4 |        3 |        1 |       2 |        4 |        6 |        4 |        3 |        2 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       39 |      108 |       33 |       25 |       13 |        3 |       3 |       64 |      102 |       35 |       22 |       10 |        3 |       0 |      0 |      5 |     87 |     91 |     37 |     17 |     29 |    485 |      0 |      0 |      0 |     11 |      4 |      0 |      0 |      0 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     55 |     43 |     11 |      6 |      1 |    338 |      0 |      1 | s03      | R    |
| 20880000 |    797 |    490 |     20 |    14 |    0 |    182 |    6 |    7 |    78 |    0 |    0 |    0 |    0 |    0 |    0 |    360 |    437 |      36 |       1 |       0 |      13 |     23 |      1 |      0 |     13 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      1 |      0 |      5 |      6 |      0 |      0 |      2 |       2 |       1 |       0 |       3 |      0 |      0 |      0 |      1 |       24 |       45 |       47 |       46 |       25 |       15 |       7 |       39 |       71 |       52 |       51 |       31 |       18 |      19 |        0 |        1 |        4 |        3 |        2 |        2 |       0 |        3 |        1 |        0 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       21 |       65 |       24 |        9 |       15 |        5 |       0 |       32 |       67 |       27 |       12 |        8 |        2 |       0 |      0 |      6 |     63 |     62 |     19 |      6 |     12 |    322 |      0 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     50 |     26 |      4 |      2 |      2 |    199 |      0 |      1 | s03      | R    |
| 20881001 |    687 |    491 |     22 |     6 |    0 |    118 |    3 |    7 |    40 |    0 |    0 |    0 |    0 |    0 |    0 |    259 |    428 |      23 |       0 |       0 |      14 |     19 |      0 |      0 |      7 |      3 |      1 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      5 |      2 |      0 |      0 |      5 |       2 |       2 |       0 |       5 |      1 |      0 |      0 |      1 |        9 |       30 |       32 |       31 |       20 |       32 |      19 |       29 |       41 |       59 |       59 |       37 |       44 |      49 |        2 |        4 |        1 |        0 |        1 |        2 |       1 |        1 |        2 |        2 |        0 |        2 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       30 |       17 |        9 |        4 |        2 |       0 |       12 |       39 |       17 |       20 |        6 |        4 |       1 |      0 |      3 |     49 |     76 |     26 |     13 |     17 |    307 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      3 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     27 |     21 |      3 |      1 |      0 |    119 |      0 |      1 | s03      | R    |
| 20881002 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 20881003 |    135 |     93 |     12 |     2 |    0 |     22 |    0 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     60 |     75 |      13 |       2 |       0 |       0 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |        6 |       11 |        8 |        6 |        4 |       4 |        5 |       12 |        8 |       10 |        5 |        9 |       2 |        0 |        3 |        2 |        2 |        0 |        1 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        4 |        1 |        2 |        0 |        0 |       0 |        3 |       12 |        2 |        0 |        2 |        1 |       0 |      0 |      0 |     12 |     13 |      7 |      6 |      0 |     55 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     21 |      0 |      1 | s03      | R    |
| 20890001 |    413 |    273 |     18 |     5 |    0 |     84 |    3 |    2 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    157 |    256 |      13 |       0 |       0 |      10 |      8 |      1 |      0 |      8 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |       2 |       2 |       0 |       3 |      2 |      0 |      0 |      0 |        4 |       24 |       20 |       19 |       17 |        9 |       4 |       18 |       31 |       33 |       32 |       24 |       19 |      19 |        1 |        1 |        2 |        2 |        1 |        0 |       1 |        1 |        2 |        5 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       22 |       10 |       10 |        3 |        1 |       1 |       17 |       28 |       12 |        8 |        5 |        0 |       0 |      0 |      1 |     40 |     50 |     15 |      8 |      9 |    150 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     14 |      7 |      1 |      0 |     83 |      0 |      1 | s03      | R    |
| 20890002 |    378 |    249 |     11 |     2 |    0 |     86 |    3 |    7 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    158 |    220 |      21 |       1 |       0 |      10 |      4 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        3 |       19 |       20 |       13 |       13 |       19 |      10 |        9 |       16 |       29 |       32 |       19 |       19 |      28 |        0 |        2 |        3 |        0 |        1 |        1 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       16 |       14 |        5 |        4 |        4 |       3 |       17 |       21 |        7 |       10 |        6 |        3 |       0 |      0 |      1 |     21 |     34 |     21 |      5 |     13 |    154 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     15 |     23 |      1 |      0 |      2 |     74 |      0 |      1 | s03      | R    |
| 20891001 |    168 |    119 |      6 |     1 |    0 |     36 |    0 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     70 |     98 |       6 |       1 |       0 |       1 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |       11 |        6 |       10 |        7 |        6 |       4 |        4 |       14 |       18 |       18 |        2 |        8 |       8 |        1 |        3 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        7 |        4 |        3 |        0 |        0 |       0 |       10 |        6 |        2 |        5 |        0 |        1 |       0 |      0 |      0 |     10 |     27 |     11 |      2 |      3 |     66 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      4 |      0 |      0 |      0 |     27 |      0 |      1 | s03      | R    |
| 20891002 |    630 |    453 |     21 |     7 |    0 |    119 |    1 |    3 |    26 |    0 |    0 |    0 |    0 |    0 |    0 |    246 |    384 |       9 |       2 |       0 |      13 |     12 |      1 |      0 |      9 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      5 |      1 |      0 |     10 |      3 |      0 |      0 |      2 |       1 |       0 |       0 |       1 |      3 |      0 |      0 |      1 |       13 |       28 |       27 |       26 |       17 |       26 |      16 |       20 |       49 |       38 |       49 |       40 |       59 |      45 |        1 |        4 |        2 |        1 |        0 |        2 |       0 |        1 |        2 |        6 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       37 |        7 |       10 |        5 |        8 |       0 |        7 |       29 |       12 |       14 |        5 |        6 |       0 |      0 |      2 |     42 |     68 |     29 |      5 |     21 |    286 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     28 |     24 |      5 |      3 |      0 |     92 |      0 |      1 | s03      | R    |
| 20900000 |    672 |    490 |     11 |     6 |    0 |    107 |    2 |    0 |    56 |    0 |    0 |    0 |    0 |    0 |    0 |    272 |    400 |      21 |       1 |       0 |      11 |     23 |      1 |      0 |     13 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      4 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |       1 |       1 |       0 |       2 |      0 |      0 |      0 |      1 |       15 |       27 |       32 |       39 |       19 |       11 |      35 |       12 |       39 |       67 |       68 |       39 |       27 |      60 |        0 |        2 |        2 |        1 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       25 |       23 |       22 |        9 |        5 |       0 |        9 |       32 |       21 |       12 |        9 |        1 |       0 |      0 |      2 |     40 |     70 |     41 |     14 |     19 |    304 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     25 |      9 |      7 |      4 |    103 |      0 |      1 | s03      | R    |
| 20901000 |    755 |    516 |     26 |    10 |    0 |    148 |    2 |    8 |    45 |    0 |    0 |    0 |    0 |    0 |    0 |    321 |    434 |      41 |       2 |       0 |      15 |     21 |      1 |      0 |     16 |      3 |      1 |      0 |      1 |      1 |      2 |      0 |      1 |      1 |      0 |      0 |      8 |      2 |      0 |      0 |      2 |       1 |       0 |       0 |       2 |      2 |      0 |      0 |      5 |       12 |       31 |       35 |       36 |       31 |       27 |      27 |       25 |       39 |       67 |       53 |       45 |       34 |      54 |        2 |        3 |        3 |        3 |        0 |        1 |       1 |        1 |        5 |        0 |        2 |        1 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       39 |       22 |       22 |       10 |        3 |       1 |       19 |       29 |       27 |       16 |       10 |        2 |       1 |      0 |      3 |     57 |     72 |     33 |     17 |     22 |    312 |      0 |      0 |      0 |      2 |      5 |      2 |      2 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     38 |     24 |      7 |      3 |      4 |    136 |      0 |      1 | s03      | R    |
| 20910000 |    693 |    454 |     22 |     2 |    0 |    134 |    6 |    5 |    70 |    0 |    0 |    0 |    0 |    0 |    0 |    291 |    402 |      23 |       3 |       0 |       6 |     24 |      0 |      0 |     19 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |     14 |      2 |      0 |      9 |      0 |      1 |      0 |      1 |       0 |       0 |       0 |       3 |      4 |      0 |      0 |      2 |        9 |       31 |       25 |       36 |       22 |        8 |      20 |       10 |       55 |       62 |       69 |       30 |       27 |      50 |        2 |        3 |        4 |        0 |        1 |        4 |       0 |        0 |        4 |        0 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       44 |       32 |       22 |       12 |        1 |       1 |       15 |       33 |       21 |       14 |        5 |        2 |       1 |      0 |      2 |     35 |     69 |     34 |     19 |     15 |    280 |      0 |      0 |      0 |      2 |      0 |      4 |      2 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     37 |     32 |      5 |      3 |      2 |    137 |      0 |      1 | s03      | R    |
| 20911000 |    605 |    428 |     21 |     3 |    0 |     96 |    5 |    1 |    51 |    0 |    0 |    0 |    0 |    0 |    0 |    282 |    323 |      33 |       3 |       0 |       8 |     27 |      0 |      0 |     11 |      2 |      1 |      0 |      0 |     10 |      1 |      0 |      3 |      6 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      2 |       13 |       18 |       46 |       43 |       27 |       20 |      22 |       15 |       26 |       50 |       57 |       33 |       26 |      32 |        1 |        1 |        2 |        4 |        1 |        2 |       1 |        1 |        0 |        1 |        1 |        2 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       27 |       20 |       11 |        7 |        7 |       1 |       13 |       12 |       17 |       19 |        7 |        6 |       1 |      0 |      3 |     40 |     72 |     41 |     10 |     15 |    247 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     26 |     27 |      6 |      7 |      0 |     87 |      0 |      1 | s03      | R    |
| 20920000 |    881 |    562 |     41 |     5 |    0 |    200 |    5 |    5 |    63 |    0 |    0 |    0 |    0 |    0 |    0 |    387 |    494 |      32 |       2 |       0 |      20 |     36 |      5 |      0 |     19 |      4 |      1 |      0 |      2 |      4 |      0 |      0 |      1 |     16 |      2 |      0 |     11 |      5 |      0 |      0 |      4 |       1 |       3 |       0 |       3 |      0 |      0 |      0 |      4 |       10 |       33 |       41 |       48 |       36 |       53 |      11 |       22 |       47 |       50 |       58 |       47 |       85 |      21 |        0 |        4 |        1 |        3 |        2 |        7 |       1 |        1 |        5 |        2 |        2 |        7 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       39 |       21 |       23 |       18 |       22 |       1 |       19 |       34 |       24 |       16 |       12 |       33 |       3 |      0 |      7 |     62 |     84 |     43 |      8 |     20 |    338 |      0 |      0 |      0 |      6 |      4 |      1 |      1 |      1 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     31 |     33 |     16 |      4 |      1 |    189 |      0 |      1 | s03      | R    |
| 20930000 |   1134 |    663 |     61 |     6 |    0 |    263 |    6 |    1 |   134 |    0 |    0 |    0 |    0 |    0 |    0 |    517 |    617 |      56 |       6 |       0 |      29 |     41 |      2 |      0 |     28 |      3 |      0 |      0 |      1 |     10 |      0 |      0 |      4 |     27 |      5 |      0 |     25 |     12 |      1 |      0 |      8 |       4 |       1 |       0 |       5 |      3 |      0 |      0 |      0 |       21 |       59 |       65 |       51 |       36 |       15 |      18 |       39 |       90 |       84 |       80 |       50 |       28 |      27 |        3 |       11 |        4 |        4 |        8 |        3 |       1 |        1 |       11 |        4 |        2 |        4 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       30 |       85 |       50 |       29 |       17 |        6 |       1 |       34 |       81 |       34 |       24 |       12 |        7 |       0 |      0 |      6 |     66 |    116 |     40 |     22 |     22 |    391 |      0 |      0 |      0 |      6 |     11 |      2 |      2 |      1 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     50 |     51 |     19 |     10 |      3 |    272 |      0 |      1 | s03      | R    |
| 20931000 |   1160 |    782 |     45 |     7 |    0 |    216 |   11 |    5 |    94 |    0 |    0 |    0 |    0 |    0 |    0 |    516 |    644 |      31 |       2 |       0 |      14 |     69 |      1 |      0 |     15 |      5 |      0 |      0 |      4 |     34 |      9 |      0 |      4 |     16 |      1 |      0 |     14 |      6 |      0 |      0 |      3 |       9 |       0 |       0 |      12 |      5 |      0 |      0 |      2 |       21 |       46 |       61 |       83 |       47 |       22 |      36 |       38 |       66 |       79 |      103 |       77 |       44 |      59 |        1 |        4 |        2 |        5 |        3 |        3 |       8 |        0 |        5 |        3 |        4 |        2 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       57 |       40 |       33 |       16 |        8 |       1 |       31 |       47 |       34 |       18 |       21 |        6 |       2 |      0 |      4 |     74 |    116 |     54 |     27 |     28 |    479 |      0 |      0 |      1 |      3 |      5 |      1 |      0 |      2 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     34 |     45 |     23 |     10 |      5 |    211 |      0 |      1 | s03      | R    |
| 20940000 |    929 |    631 |     45 |     5 |    0 |    171 |    4 |    2 |    71 |    0 |    0 |    0 |    0 |    0 |    0 |    397 |    532 |      23 |       2 |       0 |      17 |     53 |      3 |      0 |     15 |      3 |      0 |      0 |      0 |     31 |      5 |      0 |     13 |     25 |      7 |      0 |     20 |      6 |      1 |      0 |      5 |       7 |       0 |       0 |       0 |      8 |      0 |      0 |      6 |       10 |       29 |       48 |       63 |       41 |       29 |      27 |       14 |       60 |       76 |       86 |       71 |       29 |      48 |        0 |        3 |        2 |        7 |        4 |        7 |       2 |        0 |        2 |        3 |        4 |        2 |        2 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       25 |       32 |       30 |       15 |        8 |       1 |       14 |       38 |       32 |       22 |       14 |        8 |       0 |      0 |      2 |     61 |    112 |     50 |     20 |     37 |    349 |      0 |      0 |      1 |      2 |     10 |      1 |      0 |      2 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     34 |     32 |     15 |     10 |      7 |    155 |      0 |      1 | s03      | R    |
| 20941001 |    349 |    230 |     23 |     2 |    0 |     59 |    3 |    0 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    151 |    198 |       7 |       1 |       0 |       3 |     28 |      2 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      3 |      5 |      2 |      0 |      7 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        5 |       19 |       19 |       19 |       16 |        5 |       3 |        7 |       23 |       26 |       34 |       28 |       12 |      14 |        5 |        2 |        2 |        2 |        0 |        4 |       1 |        0 |        0 |        2 |        3 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       10 |       13 |        5 |        4 |        4 |       1 |        6 |       14 |       10 |        8 |        6 |        1 |       2 |      0 |      4 |     23 |     32 |     17 |     10 |     13 |    131 |      0 |      0 |      0 |      1 |      6 |      0 |      3 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     10 |      7 |      2 |      2 |     66 |      0 |      1 | s03      | R    |
| 20941002 |    322 |    211 |     18 |     2 |    0 |     63 |    1 |    0 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    142 |    180 |      11 |       1 |       0 |       2 |     20 |      0 |      0 |      9 |      2 |      0 |      0 |      0 |     15 |      2 |      0 |      0 |      3 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |        7 |        8 |       24 |       21 |       19 |        4 |       9 |        6 |       13 |       23 |       23 |       26 |        8 |      20 |        2 |        0 |        0 |        0 |        4 |        1 |       3 |        0 |        1 |        0 |        1 |        1 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       15 |       10 |        6 |        4 |        3 |       0 |        5 |       17 |       14 |       11 |        4 |        2 |       0 |      0 |      2 |     26 |     29 |     14 |      6 |     10 |    124 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     12 |      5 |      5 |      3 |     52 |      0 |      1 | s03      | R    |
| 20951001 |    597 |    385 |     28 |     3 |    0 |    124 |    3 |    2 |    52 |    0 |    0 |    0 |    0 |    0 |    0 |    264 |    333 |      20 |       0 |       0 |       6 |     37 |      4 |      0 |     10 |      1 |      0 |      0 |      1 |     14 |      4 |      0 |      4 |     12 |      6 |      0 |      9 |      1 |      1 |      0 |      2 |       5 |       0 |       0 |       0 |      2 |      0 |      0 |      3 |        5 |       18 |       35 |       45 |       28 |       14 |      15 |       12 |       30 |       58 |       47 |       34 |       14 |      30 |        1 |        3 |        3 |        4 |        1 |        1 |       1 |        1 |        2 |        1 |        2 |        2 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       34 |       19 |       14 |       16 |        2 |       1 |        7 |       33 |       20 |       20 |        9 |        4 |       1 |      0 |      2 |     48 |     53 |     37 |     13 |     23 |    209 |      0 |      0 |      0 |      2 |      6 |      2 |      0 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     28 |     11 |      6 |      2 |    110 |      0 |      1 | s03      | R    |
| 20951002 |    386 |    265 |     13 |     2 |    0 |     72 |    1 |    0 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    176 |    210 |       6 |       1 |       0 |       3 |     29 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      4 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |       3 |       0 |       0 |       1 |      8 |      0 |      0 |      0 |        5 |       15 |       22 |       33 |       18 |        7 |      12 |       11 |       25 |       28 |       39 |       29 |       11 |      10 |        0 |        2 |        1 |        2 |        1 |        0 |       0 |        1 |        2 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       19 |       11 |       11 |        4 |        4 |       0 |        6 |       15 |        9 |        9 |        7 |        4 |       0 |      0 |      0 |     33 |     42 |     15 |      8 |     13 |    154 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      8 |      2 |      3 |      3 |     84 |      0 |      1 | s03      | R    |
| 20960001 |    734 |    483 |     29 |     9 |    0 |    151 |    4 |    6 |    52 |    0 |    0 |    0 |    0 |    0 |    0 |    321 |    413 |      83 |       1 |       0 |      29 |     17 |      1 |      0 |     13 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |      5 |      0 |      0 |      7 |      4 |      1 |      0 |      2 |       3 |       3 |       0 |       5 |      1 |      3 |      0 |      2 |       12 |       23 |       47 |       40 |       23 |       14 |      29 |       21 |       54 |       50 |       61 |       27 |       29 |      53 |        1 |        4 |        5 |        1 |        2 |        1 |       4 |        1 |        2 |        0 |        2 |        1 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       42 |       21 |       24 |        8 |        6 |       2 |       16 |       38 |       32 |        9 |        5 |        7 |       0 |      0 |      1 |     49 |     71 |     36 |     10 |     22 |    294 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     35 |     10 |      8 |      1 |    141 |      0 |      1 | s03      | R    |
| 20960002 |     10 |      6 |      4 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      4 |       2 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 20961001 |    518 |    305 |     23 |     6 |    0 |    130 |    3 |    1 |    50 |    0 |    0 |    0 |    0 |    0 |    0 |    264 |    254 |      15 |       2 |       0 |       8 |     17 |      0 |      0 |      8 |      2 |      0 |      0 |      4 |      8 |      0 |      0 |      1 |      2 |      1 |      0 |      4 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |       23 |       29 |       32 |       20 |       17 |       5 |        5 |       42 |       26 |       44 |       31 |       16 |       8 |        0 |        3 |        3 |        5 |        1 |        2 |       0 |        1 |        2 |        0 |        4 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       39 |       18 |       28 |       16 |        2 |       0 |        8 |       35 |       13 |        7 |        6 |        4 |       0 |      0 |      6 |     32 |     36 |     27 |     14 |     17 |    173 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     10 |      8 |      7 |      3 |    135 |      0 |      1 | s03      | R    |
| 20961002 |     93 |     64 |      6 |     0 |    0 |     15 |    0 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |     40 |     53 |      13 |       1 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |       2 |       0 |       0 |       0 |      3 |      1 |      0 |      6 |        1 |        3 |        3 |        4 |        6 |        6 |       2 |        3 |       11 |        8 |        6 |        5 |        4 |       2 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        7 |        3 |        1 |        1 |        0 |       0 |        1 |        5 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     12 |     14 |      2 |      2 |      3 |     31 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      2 |      1 |      0 |     15 |      0 |      1 | s03      | R    |
| 20961003 |      2 |      0 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 20961004 |      2 |      0 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 20970001 |    686 |    416 |     26 |     9 |    0 |    176 |    2 |    0 |    57 |    0 |    0 |    0 |    0 |    0 |    0 |    301 |    385 |      75 |       4 |       0 |      27 |     19 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |     13 |      0 |      2 |      0 |      1 |       1 |       3 |       0 |       1 |      4 |      0 |      0 |      1 |       13 |       30 |       21 |       36 |       27 |       23 |       9 |       13 |       60 |       55 |       47 |       36 |       19 |      27 |        1 |        2 |        3 |        3 |        3 |        0 |       0 |        2 |        4 |        2 |        2 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       48 |       27 |       18 |       13 |        4 |       1 |       15 |       41 |       21 |       19 |       10 |        7 |       1 |      0 |      1 |     34 |     85 |     21 |     10 |     28 |    237 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     29 |     29 |     11 |      6 |      7 |    159 |      0 |      1 | s03      | R    |
| 20970002 |     55 |     31 |      4 |     1 |    0 |     15 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     28 |     27 |       6 |       0 |       0 |       3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        3 |        5 |        3 |       0 |        1 |        4 |        3 |        5 |        4 |        1 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        3 |        2 |        3 |        0 |       0 |        0 |        2 |        0 |        2 |        1 |        3 |       0 |      0 |      0 |      4 |      5 |      6 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      2 |     12 |      0 |      1 | s03      | R    |
| 20971001 |    739 |    488 |     21 |     5 |    0 |    165 |    6 |    1 |    53 |    0 |    0 |    0 |    0 |    0 |    0 |    321 |    418 |      71 |       5 |       0 |      24 |     25 |      0 |      0 |      7 |      0 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      8 |      0 |      0 |      4 |      2 |      1 |      0 |      3 |       2 |       0 |       0 |       2 |      2 |      0 |      0 |      2 |       20 |       33 |       42 |       47 |       33 |       14 |      14 |       27 |       55 |       51 |       62 |       38 |       30 |      22 |        1 |        0 |        1 |        3 |        1 |        1 |       0 |        1 |        3 |        5 |        1 |        4 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       31 |       26 |       22 |        7 |        8 |       3 |       16 |       35 |       27 |       23 |       11 |        5 |       2 |      0 |      5 |     57 |     82 |     37 |      9 |     20 |    278 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     40 |     34 |     13 |      7 |      0 |    135 |      0 |      1 | s03      | R    |
| 20971002 |     83 |     54 |      2 |     0 |    0 |     21 |    1 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     33 |     50 |       3 |       1 |       0 |       1 |      6 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        5 |        5 |        3 |        2 |       0 |        1 |        5 |        9 |       10 |        5 |        2 |       4 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        4 |        3 |        2 |        2 |        1 |       0 |        3 |        7 |        1 |        2 |        0 |        0 |       0 |      0 |      1 |      5 |      8 |      4 |      4 |      3 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      0 |     15 |      0 |      1 | s03      | R    |
| 20971003 |      9 |      6 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      6 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20980001 |    726 |    452 |     21 |     6 |    0 |    178 |    5 |    3 |    61 |    0 |    0 |    0 |    0 |    0 |    0 |    331 |    395 |      51 |       1 |       0 |      33 |     24 |      1 |      0 |     10 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      3 |      5 |      0 |      0 |      3 |      6 |      0 |      0 |      5 |       5 |       1 |       0 |       4 |      2 |      0 |      0 |      4 |       16 |       39 |       41 |       44 |       25 |       20 |      11 |       26 |       48 |       52 |       53 |       30 |       28 |      19 |        1 |        2 |        7 |        1 |        1 |        1 |       1 |        1 |        0 |        3 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       25 |       38 |       28 |       15 |       11 |        2 |       2 |       29 |       47 |       21 |       20 |       13 |        2 |       0 |      0 |      5 |     46 |     85 |     30 |     11 |     11 |    264 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     38 |     32 |     11 |      5 |      2 |    164 |      0 |      1 | s03      | R    |
| 20980002 |     18 |      9 |      0 |     0 |    0 |      8 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      9 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        1 |        0 |       0 |        0 |        4 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 20980003 |      1 |      0 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 20990001 |    475 |    296 |     18 |     4 |    0 |    104 |    4 |    2 |    47 |    0 |    0 |    0 |    0 |    0 |    0 |    249 |    226 |      30 |       3 |       0 |       9 |     22 |      0 |      0 |     13 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      2 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |       10 |       17 |       29 |       44 |       30 |       12 |      10 |        9 |       26 |       25 |       32 |       30 |       12 |      10 |        0 |        1 |        1 |        4 |        3 |        2 |       0 |        0 |        0 |        1 |        2 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       25 |       24 |       18 |       10 |        5 |       0 |        7 |       24 |       22 |       11 |        8 |        3 |       0 |      0 |      0 |     30 |     50 |     18 |      9 |      8 |    181 |      0 |      0 |      0 |      3 |      2 |      1 |      2 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     13 |     13 |      4 |      4 |    101 |      0 |      1 | s03      | R    |
| 20990002 |     24 |     12 |      1 |     1 |    0 |      9 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     14 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        3 |        1 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        1 |        0 |       0 |        2 |        2 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 21300002 |    386 |    222 |     67 |     4 |    0 |     77 |    6 |    0 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    193 |    193 |       4 |       1 |       0 |       3 |     21 |      6 |      0 |      8 |      1 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      5 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |       10 |       20 |       28 |       18 |       16 |       3 |        2 |       22 |       23 |       32 |       25 |       17 |       6 |        1 |        3 |        7 |        7 |       12 |        6 |       3 |        1 |        1 |        5 |        6 |        5 |        5 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       14 |       13 |       15 |        8 |        4 |       0 |        4 |        9 |        6 |        9 |        6 |        4 |       0 |      0 |      1 |     29 |     46 |     15 |      2 |      8 |    121 |      0 |      0 |      0 |      2 |     25 |      1 |      0 |      1 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     12 |     23 |      6 |      0 |      0 |     54 |      0 |      1 | s03      | R    |
| 21310001 |    841 |    496 |    128 |     4 |    0 |    163 |    4 |    4 |    42 |    0 |    0 |    0 |    0 |    0 |    0 |    422 |    419 |       7 |       2 |       0 |       5 |     65 |     11 |      0 |     26 |      2 |      1 |      0 |      2 |      3 |      1 |      0 |      0 |      9 |      4 |      0 |      8 |      6 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |       11 |       20 |       38 |       54 |       51 |       40 |      20 |        7 |       25 |       44 |       68 |       62 |       38 |      18 |        3 |        7 |       10 |       13 |        9 |       15 |      12 |        2 |        7 |       12 |       11 |        8 |       11 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       25 |       22 |       24 |       21 |       13 |       2 |       11 |       23 |       16 |       17 |       18 |       13 |       0 |      0 |      7 |     62 |     98 |     43 |     17 |     19 |    250 |      0 |      0 |      3 |     19 |     18 |      8 |      3 |      3 |     74 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     28 |     36 |     12 |      7 |      2 |    129 |      0 |      1 | s03      | R    |
| 21310002 |    115 |     63 |     15 |     1 |    0 |     25 |    5 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     62 |     53 |       0 |       0 |       0 |       0 |      8 |      1 |      0 |      5 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        2 |        7 |        7 |        7 |        2 |       4 |        0 |        5 |        3 |        7 |        7 |        7 |       4 |        0 |        0 |        0 |        0 |        0 |        4 |       3 |        0 |        0 |        1 |        0 |        1 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        7 |        3 |        5 |        6 |        2 |       0 |        3 |        2 |        3 |        4 |        0 |        0 |       0 |      0 |      0 |      4 |     12 |      4 |      1 |      3 |     39 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |     10 |      1 |      2 |      0 |     21 |      0 |      1 | s03      | R    |
| 21320001 |     98 |     48 |     24 |     2 |    0 |     23 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     44 |     54 |       3 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        2 |        5 |        5 |        5 |        0 |       1 |        4 |        5 |        6 |        8 |        3 |        1 |       1 |        1 |        1 |        4 |        3 |        1 |        4 |       0 |        1 |        3 |        2 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        4 |        3 |        0 |        1 |       0 |        0 |        2 |        2 |       10 |        1 |        1 |       0 |      0 |      1 |      8 |      8 |      3 |      1 |      1 |     26 |      0 |      0 |      0 |      3 |      9 |      0 |      2 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      4 |      0 |      0 |     16 |      0 |      1 | s03      | R    |
| 21320002 |    430 |    223 |     71 |    13 |    0 |    103 |    6 |    0 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    182 |    248 |       9 |       4 |       0 |       7 |     12 |      1 |      0 |      3 |      3 |      0 |      0 |      7 |      4 |      0 |      0 |      2 |     18 |      8 |      0 |     18 |      3 |      0 |      0 |      2 |       0 |       0 |       0 |       2 |      7 |      2 |      0 |      1 |        0 |       16 |       35 |       11 |       12 |        4 |       1 |        6 |       43 |       35 |       34 |       19 |        6 |       1 |        2 |       13 |       15 |        3 |        1 |        3 |       0 |        3 |        6 |       10 |        5 |        3 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       28 |       22 |        6 |        4 |        2 |       0 |        4 |       33 |       19 |        9 |        3 |        2 |       0 |      0 |      1 |     39 |     47 |      5 |      1 |      3 |    127 |      0 |      0 |      1 |     17 |      8 |      1 |      0 |      2 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     29 |     18 |      1 |      1 |      0 |     86 |      0 |      1 | s03      | R    |
| 21320003 |     59 |     32 |     14 |     0 |    0 |     13 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     34 |     25 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        7 |        2 |        2 |        3 |       1 |        0 |        3 |        4 |        4 |        1 |        3 |       0 |        0 |        3 |        0 |        3 |        3 |        0 |       0 |        0 |        0 |        1 |        1 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        5 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |      4 |      7 |      5 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |      5 |      0 |      1 | s03      | R    |
| 21320004 |     17 |     14 |      3 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |      9 |       2 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        4 |        1 |       0 |        1 |        1 |        1 |        2 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 21320005 |     11 |      8 |      1 |     0 |    0 |      1 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |      4 |       1 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 21330001 |     55 |     39 |      6 |     0 |    0 |      9 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     32 |     23 |       1 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        2 |        3 |        8 |        5 |        3 |       0 |        1 |        1 |        1 |        5 |        6 |        2 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        0 |        2 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |     10 |      8 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 21330002 |    540 |    253 |    177 |     9 |    0 |     91 |    1 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    253 |    287 |       6 |       2 |       0 |       2 |     40 |     16 |      0 |      7 |      4 |      1 |      0 |      2 |      3 |      0 |      0 |      0 |      9 |      7 |      0 |     10 |      0 |      0 |      0 |      2 |       0 |       1 |       0 |       0 |      3 |      0 |      0 |      0 |        3 |        5 |        8 |        8 |       33 |       42 |       4 |        5 |        9 |        9 |       29 |       46 |       50 |       2 |        1 |        2 |        7 |        8 |       28 |       43 |       1 |        1 |        3 |       10 |       14 |       18 |       39 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        6 |       12 |       11 |        9 |       19 |       0 |        6 |        4 |        9 |        5 |       17 |        9 |       0 |      0 |      0 |     25 |     80 |     23 |      9 |      5 |    111 |      0 |      0 |      2 |     22 |     45 |     19 |      5 |      4 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     24 |      7 |      0 |      1 |     62 |      0 |      1 | s03      | R    |
| 21340000 |    734 |    435 |    116 |    11 |    0 |    141 |    4 |    0 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    349 |    385 |      17 |       5 |       0 |      13 |     47 |      7 |      0 |     12 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      3 |      8 |      1 |      0 |      5 |      1 |      1 |      0 |      1 |       3 |       0 |       0 |       0 |      4 |      1 |      0 |      1 |        9 |       21 |       46 |       43 |       37 |       15 |      13 |       13 |       18 |       65 |       74 |       50 |       13 |      18 |        1 |        4 |       18 |       20 |        8 |        5 |       8 |        0 |        6 |       11 |       11 |        7 |        5 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       19 |       30 |       26 |       15 |        2 |       1 |        6 |       19 |       24 |       20 |       11 |        2 |       0 |      0 |      2 |     32 |     64 |     48 |     23 |     27 |    239 |      0 |      0 |      0 |     10 |     15 |      9 |      3 |      8 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     27 |     27 |     17 |      3 |      2 |    105 |      0 |      1 | s03      | R    |
| 21341001 |    165 |     86 |     39 |     0 |    0 |     30 |    2 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |     92 |     73 |       2 |       0 |       0 |       0 |     10 |      3 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        3 |       10 |       10 |        9 |        6 |       5 |        0 |        2 |        7 |       11 |       12 |        6 |       2 |        0 |        2 |        3 |        6 |        6 |        4 |       1 |        0 |        0 |        4 |        4 |        4 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        8 |        5 |        6 |        2 |       0 |        0 |        4 |        6 |        3 |        1 |        2 |       0 |      0 |      1 |      7 |     20 |      5 |      0 |      5 |     48 |      0 |      0 |      0 |      4 |      8 |      1 |      0 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      6 |      3 |      1 |      1 |     21 |      0 |      1 | s03      | R    |
| 21341002 |      4 |      3 |      0 |     1 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 21350000 |    937 |    496 |    247 |    10 |    0 |    162 |    3 |    0 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    444 |    493 |      25 |       4 |       0 |      13 |     58 |     13 |      0 |     14 |      4 |      1 |      0 |      0 |      8 |      2 |      0 |      3 |     32 |     25 |      0 |     20 |      0 |      0 |      0 |      2 |       1 |       2 |       0 |       0 |      4 |      3 |      0 |      0 |        9 |       19 |       45 |       73 |       39 |       17 |      18 |       10 |       24 |       72 |       66 |       57 |       31 |      16 |        2 |       11 |       44 |       16 |       26 |       20 |      11 |        2 |       10 |       27 |       20 |       17 |       24 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       27 |       23 |       22 |       10 |        5 |       0 |       10 |       21 |       27 |       16 |       16 |       10 |       0 |      0 |      3 |     59 |    124 |     40 |     11 |     22 |    237 |      0 |      0 |      2 |     18 |     60 |     17 |      5 |      9 |    136 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     33 |     27 |      9 |      3 |      2 |    119 |      0 |      1 | s03      | R    |
| 21360000 |    581 |    359 |     73 |     9 |    0 |    104 |    4 |    1 |    31 |    0 |    0 |    0 |    0 |    0 |    0 |    273 |    308 |      12 |       3 |       0 |       5 |     35 |      2 |      0 |     20 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      3 |      0 |      0 |      6 |      4 |      0 |      0 |      3 |       0 |       1 |       0 |       0 |      3 |      0 |      0 |      1 |        3 |       17 |       39 |       42 |       30 |       14 |      16 |        8 |       26 |       47 |       54 |       31 |       15 |      17 |        0 |        5 |       14 |       10 |        5 |        5 |       5 |        2 |        1 |       10 |        4 |        3 |        5 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       12 |       13 |       20 |       12 |        4 |       2 |        5 |       24 |       21 |       20 |        7 |        3 |       1 |      0 |      3 |     34 |     59 |     35 |     11 |     24 |    193 |      0 |      0 |      1 |      8 |     14 |      6 |      1 |      2 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     22 |      8 |      4 |      5 |     86 |      0 |      1 | s03      | R    |
| 21370000 |    705 |    437 |    115 |     7 |    0 |    123 |    0 |    0 |    23 |    0 |    0 |    0 |    0 |    0 |    0 |    329 |    376 |      17 |       4 |       0 |       6 |     35 |      2 |      0 |     11 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      5 |     20 |      1 |      0 |      5 |      1 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      5 |      0 |      0 |      1 |        4 |       21 |       43 |       50 |       41 |       13 |      16 |        7 |       40 |       51 |       64 |       42 |       21 |      24 |        1 |       11 |       14 |        8 |       10 |        8 |       8 |        0 |        7 |        5 |       11 |       15 |        8 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       15 |       22 |       18 |       11 |        5 |       1 |       13 |       20 |       17 |       12 |        5 |        3 |       2 |      0 |      2 |     42 |     83 |     33 |     12 |     26 |    239 |      0 |      0 |      1 |      8 |     14 |      7 |      3 |      6 |     76 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     26 |     10 |      8 |      6 |     81 |      0 |      1 | s03      | R    |
| 21380000 |    475 |    271 |    103 |     5 |    0 |     90 |    0 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    229 |    246 |       5 |       0 |       0 |       1 |     19 |      7 |      0 |      3 |      1 |      1 |      0 |      2 |      6 |      1 |      0 |      2 |      9 |      5 |      0 |      7 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        5 |        5 |       30 |       35 |       25 |       12 |       5 |        9 |       17 |       35 |       48 |       21 |       13 |      11 |        3 |        5 |       10 |       15 |        9 |        8 |       5 |        2 |        4 |       13 |        7 |        7 |        6 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        9 |       17 |       15 |        7 |        4 |       1 |        6 |        5 |       11 |       13 |        6 |        3 |       0 |      0 |      2 |     22 |     63 |     21 |      5 |      5 |    153 |      0 |      0 |      0 |     17 |     24 |      6 |      2 |      0 |     54 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |     14 |      6 |      1 |      3 |     60 |      0 |      1 | s03      | R    |
| 21381000 |    397 |    244 |     81 |     9 |    0 |     52 |    1 |    2 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    173 |    224 |       9 |       0 |       0 |       3 |     23 |      5 |      0 |      4 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      2 |      0 |      1 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      2 |        2 |        9 |       33 |       17 |       18 |       10 |      11 |        7 |       12 |       35 |       33 |       23 |       10 |      24 |        0 |        3 |       12 |        6 |       10 |        3 |       8 |        0 |        0 |        8 |        3 |        6 |        9 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        6 |       12 |        7 |        2 |        4 |       0 |        5 |       14 |       10 |        7 |        2 |        2 |       1 |      0 |      2 |     20 |     40 |     12 |     11 |      5 |    154 |      0 |      0 |      0 |      4 |     15 |      4 |      1 |      5 |     52 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |      5 |      3 |      3 |      1 |     42 |      0 |      1 | s03      | R    |
| 21390001 |     16 |      9 |      2 |     0 |    0 |      4 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |      8 |       1 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        0 |        1 |        0 |        0 |        1 |       1 |        0 |        1 |        2 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      0 |      1 | s03      | R    |
| 21390002 |    389 |    225 |     92 |     2 |    0 |     59 |    0 |    1 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    191 |    198 |       5 |       1 |       0 |       0 |     23 |      4 |      0 |      8 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |        9 |       21 |       32 |       19 |        5 |       7 |        6 |       11 |       32 |       37 |       23 |        8 |       9 |        1 |        4 |       11 |        5 |       12 |        6 |      11 |        3 |        1 |        8 |        4 |        5 |        6 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        6 |       13 |        9 |        3 |        4 |       0 |        4 |        5 |       10 |        6 |        2 |        3 |       0 |      0 |      1 |     13 |     50 |     19 |     10 |     16 |    116 |      0 |      0 |      0 |      6 |     12 |      4 |      4 |      3 |     63 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     12 |      3 |      1 |      1 |     49 |      0 |      1 | s03      | R    |
| 21391000 |    223 |    138 |     55 |     1 |    0 |     24 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    101 |    122 |       4 |       0 |       0 |       0 |     18 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        4 |       17 |       15 |        9 |        6 |       5 |        2 |        4 |       19 |       22 |       13 |        9 |      11 |        0 |        3 |        9 |        7 |        3 |        2 |       8 |        0 |        2 |        4 |        4 |        4 |        2 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        4 |        4 |        2 |        0 |       0 |        2 |        4 |        6 |        3 |        4 |        0 |       0 |      0 |      0 |     11 |     17 |     18 |      9 |      4 |     79 |      0 |      0 |      0 |      0 |      7 |      6 |      1 |      5 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      4 |      1 |      1 |      0 |     14 |      0 |      1 | s03      | R    |
| 21400000 |    568 |    331 |     67 |     8 |    0 |    118 |    5 |    0 |    39 |    0 |    0 |    0 |    0 |    0 |    0 |    253 |    315 |      11 |       3 |       0 |       5 |     35 |      4 |      0 |     14 |      6 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      8 |      1 |      0 |      7 |      0 |      0 |      0 |      1 |       2 |       1 |       0 |       2 |      0 |      0 |      0 |      2 |        4 |       27 |       48 |       23 |       18 |       18 |       5 |       14 |       53 |       37 |       29 |       24 |       20 |      11 |        1 |        3 |        2 |        2 |        4 |        6 |       6 |        0 |        5 |        5 |        2 |        6 |       11 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       29 |       24 |       10 |        3 |        6 |       0 |       30 |       28 |        8 |        6 |        6 |        6 |       0 |      0 |      1 |     29 |     51 |     18 |     16 |     11 |    205 |      0 |      0 |      0 |      4 |      7 |      4 |      4 |      1 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     14 |      6 |      5 |      0 |    126 |      0 |      1 | s03      | R    |
| 21410000 |    730 |    435 |    159 |     7 |    0 |    105 |    1 |    0 |    23 |    0 |    0 |    0 |    0 |    0 |    0 |    319 |    411 |      19 |       6 |       0 |       4 |     44 |      1 |      0 |      8 |      1 |      0 |      0 |      1 |      7 |      1 |      0 |      0 |     12 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        6 |       10 |       41 |       52 |       31 |       17 |      12 |        7 |       31 |       59 |       58 |       44 |       45 |      22 |        0 |        5 |       22 |        7 |       11 |       14 |      14 |        2 |        2 |        7 |       12 |       10 |       32 |      21 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       13 |       23 |       14 |       15 |        7 |       0 |        5 |       13 |       20 |        8 |        8 |        4 |       1 |      0 |      4 |     48 |     66 |     40 |     22 |     24 |    231 |      0 |      0 |      0 |      7 |     24 |     13 |      5 |      8 |    102 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     31 |     17 |      4 |      4 |      2 |     77 |      0 |      1 | s03      | R    |
| 21420000 |    570 |    298 |    157 |     3 |    0 |    102 |    2 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    272 |    298 |       1 |       1 |       0 |       6 |     41 |     15 |      0 |      8 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |     13 |      2 |      0 |      3 |      6 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        8 |       14 |       24 |       28 |       33 |       12 |      11 |       16 |       20 |       24 |       43 |       38 |       14 |      13 |        3 |        6 |        8 |       19 |       11 |       25 |      13 |        2 |        3 |       10 |       10 |       10 |       19 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        8 |       16 |        7 |       10 |        6 |       1 |        8 |       17 |       10 |       10 |        9 |        3 |       1 |      0 |      2 |     36 |     63 |     16 |      4 |     18 |    159 |      0 |      0 |      0 |     17 |     23 |     17 |      5 |      6 |     89 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     25 |     17 |      5 |      2 |      0 |     66 |      0 |      1 | s03      | R    |
| 21430001 |    579 |    355 |    108 |     4 |    0 |     96 |    0 |    1 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    279 |    300 |       9 |       4 |       0 |       3 |     42 |      3 |      0 |     16 |      2 |      0 |      0 |      1 |      5 |      0 |      0 |      1 |      5 |      1 |      0 |      2 |      2 |      0 |      0 |      2 |       0 |       1 |       0 |       1 |      1 |      0 |      0 |      1 |        5 |        8 |       38 |       38 |       33 |       17 |      16 |       14 |       11 |       40 |       56 |       40 |       20 |      19 |        5 |        4 |       13 |        9 |       18 |        8 |       7 |        0 |        4 |        8 |        7 |       15 |        7 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       12 |       13 |       15 |       10 |        7 |       0 |        9 |       13 |        9 |       15 |        7 |        3 |       0 |      0 |      4 |     41 |     74 |     39 |      7 |     13 |    177 |      0 |      0 |      1 |     10 |     27 |     13 |      6 |      2 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     19 |      9 |      1 |      1 |     67 |      0 |      1 | s03      | R    |
| 21440000 |    703 |    421 |    123 |     4 |    0 |    126 |    3 |    1 |    25 |    0 |    0 |    0 |    0 |    0 |    0 |    330 |    373 |      16 |       5 |       0 |      10 |     57 |      3 |      0 |      8 |      3 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      2 |      0 |      0 |      2 |       0 |       3 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |       15 |       33 |       48 |       45 |       18 |      14 |       17 |       36 |       46 |       62 |       46 |       18 |      17 |        3 |        4 |       11 |        9 |       15 |       10 |      14 |        0 |        8 |       13 |        4 |        7 |       14 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       18 |       12 |       20 |       12 |        4 |       1 |       14 |       21 |       12 |       13 |        9 |        5 |       0 |      0 |      4 |     30 |     77 |     36 |     30 |     23 |    221 |      0 |      0 |      1 |      7 |     27 |      6 |      4 |      2 |     76 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     30 |     22 |      8 |      5 |      3 |     89 |      0 |      1 | s03      | R    |
| 21450001 |     73 |     42 |     17 |     0 |    0 |     11 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     37 |     36 |       2 |       0 |       0 |       0 |      5 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        4 |        7 |        3 |        3 |       1 |        2 |        4 |        4 |        2 |        4 |        3 |       3 |        0 |        1 |        0 |        0 |        1 |        4 |       4 |        0 |        0 |        0 |        0 |        4 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        3 |        1 |        1 |       0 |        1 |        0 |        4 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      9 |      1 |      1 |      6 |     21 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      3 |      5 |      0 |      1 | s03      | R    |
| 21450002 |     36 |     20 |      5 |     2 |    0 |      8 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     17 |     19 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        2 |        3 |       0 |        1 |        0 |        1 |        1 |        4 |        4 |       1 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      4 |      3 |      0 |      2 |      8 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      6 |      0 |      1 | s03      | R    |
| 21450003 |    469 |    319 |     70 |     3 |    0 |     62 |    4 |    0 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    235 |    234 |      14 |       1 |       0 |       5 |     32 |      3 |      0 |      7 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      2 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |       10 |       24 |       29 |       30 |       28 |        9 |      13 |        9 |       22 |       41 |       40 |       41 |        6 |      17 |        0 |        8 |        8 |        3 |        6 |        7 |       9 |        0 |        1 |        3 |        3 |        6 |        7 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       17 |       14 |        3 |        6 |        5 |       1 |        3 |       12 |        5 |        3 |        2 |        3 |       1 |      0 |      5 |     30 |     47 |     19 |      7 |      9 |    202 |      0 |      0 |      3 |      2 |      5 |      6 |      1 |      4 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     13 |      3 |      3 |      0 |     49 |      0 |      1 | s03      | R    |
| 21450004 |     54 |     33 |      7 |     0 |    0 |     13 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     27 |     27 |       1 |       0 |       0 |       1 |      7 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        3 |        2 |        2 |       1 |        0 |        1 |        5 |        4 |        7 |        3 |       1 |        1 |        0 |        0 |        0 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        0 |        1 |        4 |        1 |       0 |        0 |        3 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      4 |      8 |      0 |      1 |      3 |     17 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 21460000 |    706 |    419 |     75 |     9 |    0 |    159 |    3 |    2 |    39 |    0 |    0 |    0 |    0 |    0 |    0 |    375 |    331 |      19 |       8 |       0 |      10 |     42 |      2 |      0 |     19 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      9 |      2 |      0 |      6 |      1 |      0 |      0 |      2 |       2 |       0 |       0 |       2 |      2 |      0 |      0 |      1 |        9 |       42 |       35 |       37 |       37 |       24 |      12 |       20 |       43 |       38 |       37 |       48 |       17 |      20 |        5 |       19 |        6 |        6 |        5 |        2 |       5 |        4 |        6 |        1 |        2 |        6 |        1 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       44 |       31 |       25 |       10 |       11 |       1 |       11 |       39 |       17 |        4 |        3 |        5 |       2 |      0 |      5 |     44 |     64 |     27 |     10 |     18 |    251 |      0 |      0 |      0 |      5 |      8 |      4 |      2 |      1 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     27 |     19 |     13 |      2 |      2 |    149 |      0 |      1 | s03      | R    |
| 21470000 |    570 |    361 |     44 |     7 |    0 |    112 |    5 |    2 |    39 |    0 |    0 |    0 |    0 |    0 |    0 |    285 |    285 |      18 |       1 |       0 |      11 |     32 |      2 |      0 |     14 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      9 |      1 |      0 |      2 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |       43 |       33 |       38 |       29 |        9 |       7 |        4 |       56 |       45 |       36 |       34 |        8 |      13 |        1 |        3 |        8 |        5 |        2 |        2 |       6 |        0 |        1 |        3 |        0 |        5 |        2 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       36 |       23 |       10 |        9 |        4 |       0 |        9 |       33 |       15 |        5 |        6 |        2 |       2 |      0 |      2 |     34 |     67 |     28 |     11 |     17 |    202 |      0 |      0 |      1 |      4 |      7 |      1 |      0 |      3 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     19 |     10 |      6 |      1 |    101 |      0 |      1 | s03      | R    |
| 21480000 |    562 |    348 |     50 |     4 |    0 |    129 |    4 |    3 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    246 |    316 |      18 |       5 |       0 |       9 |     41 |      5 |      0 |     10 |      2 |      0 |      0 |      1 |      7 |      1 |      0 |      2 |      8 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |       27 |       48 |       29 |       25 |        5 |       4 |        5 |       52 |       43 |       53 |       33 |       14 |       7 |        3 |        8 |        7 |        1 |        2 |        1 |       3 |        1 |        6 |        2 |        2 |        2 |        5 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       34 |       28 |        9 |        2 |        0 |       0 |        9 |       36 |       22 |        9 |        5 |        2 |       1 |      0 |      0 |     52 |     62 |     29 |      9 |     19 |    177 |      0 |      0 |      0 |      6 |      5 |      1 |      0 |      1 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     24 |     19 |      1 |      5 |      6 |    108 |      0 |      1 | s03      | R    |
| 21500001 |    230 |    132 |      3 |     0 |    0 |     59 |    4 |    0 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |     98 |    132 |       7 |       1 |       0 |       1 |     12 |      1 |      0 |      6 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      1 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |       19 |       15 |        1 |        8 |        0 |       2 |        3 |       28 |       17 |       14 |       11 |        8 |       5 |        0 |        2 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       29 |       10 |        4 |        2 |        0 |       0 |        5 |       24 |        9 |        5 |        1 |        2 |       0 |      0 |      0 |     14 |     21 |      3 |      2 |      4 |     88 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      8 |      9 |      2 |      1 |      0 |     72 |      0 |      1 | s03      | R    |
| 21500002 |    516 |    333 |     31 |     9 |    0 |    106 |    0 |    1 |    36 |    0 |    0 |    0 |    0 |    0 |    0 |    223 |    293 |       6 |       0 |       0 |       2 |     49 |      1 |      0 |     18 |      1 |      1 |      0 |      0 |     11 |      0 |      0 |      2 |      5 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |       1 |       0 |       0 |       1 |      2 |      1 |      0 |      2 |       12 |       29 |       29 |       24 |       25 |        8 |      12 |        9 |       46 |       38 |       37 |       32 |       14 |      18 |        2 |        3 |        3 |        3 |        2 |        1 |       0 |        2 |        4 |        2 |        2 |        1 |        1 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       27 |       14 |        7 |        3 |        4 |       2 |       14 |       39 |       14 |        6 |        8 |        1 |       0 |      0 |      4 |     33 |     49 |     25 |      8 |     11 |    203 |      0 |      0 |      0 |      1 |      5 |      3 |      0 |      0 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     17 |     14 |      3 |      1 |      0 |    114 |      0 |      1 | s03      | R    |
| 21510001 |    368 |    200 |     14 |     4 |    0 |     97 |    2 |    0 |    51 |    0 |    0 |    0 |    0 |    0 |    0 |    164 |    204 |      12 |       1 |       0 |      12 |     13 |      0 |      0 |     12 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      2 |        4 |       29 |       17 |       11 |       10 |        6 |       5 |        5 |       39 |       17 |       21 |       16 |        9 |      11 |        1 |        1 |        1 |        0 |        2 |        0 |       1 |        1 |        3 |        3 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       44 |       16 |        6 |        1 |        2 |       0 |       16 |       41 |       12 |        7 |        2 |        0 |       0 |      0 |      0 |     28 |     29 |     14 |      6 |      7 |    116 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     23 |     13 |      1 |      1 |      0 |    114 |      0 |      1 | s03      | R    |
| 21510002 |    223 |    149 |     16 |     2 |    0 |     41 |    2 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    102 |    121 |       6 |       2 |       0 |       0 |     15 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      3 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |       10 |       17 |       11 |       10 |        4 |       5 |        8 |       13 |       18 |       14 |       19 |       10 |       6 |        0 |        3 |        2 |        2 |        2 |        0 |       2 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        9 |        6 |        7 |        4 |        1 |       0 |        4 |       10 |        7 |        5 |        2 |        0 |       0 |      0 |      0 |     10 |     30 |     10 |      6 |      6 |     87 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      7 |      5 |      4 |      0 |     36 |      0 |      1 | s03      | R    |
| 21511000 |    394 |    280 |     17 |     3 |    0 |     74 |    0 |    0 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    180 |    214 |      11 |       2 |       0 |       5 |     18 |      2 |      0 |     10 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      3 |        8 |       29 |       31 |       22 |       10 |       10 |       9 |        6 |       51 |       31 |       28 |       12 |       11 |      22 |        1 |        3 |        1 |        2 |        1 |        0 |       2 |        0 |        3 |        1 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       25 |       12 |        3 |        6 |        2 |       0 |        3 |       24 |       11 |        6 |        2 |        0 |       0 |      0 |      0 |     34 |     38 |     18 |      6 |     15 |    169 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     24 |      8 |      1 |      1 |      1 |     59 |      0 |      1 | s03      | R    |
| 21512000 |    606 |    372 |     31 |    11 |    0 |    140 |    0 |    4 |    48 |    0 |    0 |    0 |    0 |    0 |    0 |    254 |    352 |      13 |       1 |       0 |      13 |     45 |      4 |      0 |     17 |      1 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |     15 |      2 |      0 |      8 |      1 |      0 |      0 |      4 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      3 |        7 |       36 |       41 |       25 |       14 |        9 |       5 |       11 |       76 |       61 |       30 |       29 |       15 |      13 |        0 |        6 |        5 |        0 |        2 |        4 |       2 |        1 |        3 |        3 |        1 |        0 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       37 |       21 |       16 |        8 |        2 |       1 |       17 |       41 |       22 |        9 |       12 |        3 |       1 |      0 |      4 |     24 |     47 |     24 |      8 |     16 |    249 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     23 |     23 |      8 |      6 |      2 |    140 |      0 |      1 | s03      | R    |
| 21520001 |    584 |    383 |     18 |     2 |    0 |    107 |    5 |    1 |    68 |    0 |    0 |    0 |    0 |    0 |    0 |    257 |    327 |      15 |       2 |       0 |      15 |     23 |      1 |      0 |     15 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      4 |      0 |      0 |      5 |       0 |       1 |       0 |       2 |      0 |      0 |      0 |      3 |        8 |       46 |       42 |       26 |       15 |        8 |      10 |       13 |       55 |       57 |       31 |       32 |       21 |      19 |        0 |        2 |        2 |        1 |        1 |        0 |       2 |        0 |        3 |        2 |        2 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       35 |       30 |       12 |        6 |        1 |       0 |       11 |       42 |       16 |       16 |        3 |        1 |       0 |      0 |      1 |     38 |     66 |     22 |      6 |     11 |    239 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     24 |     22 |      7 |      4 |      3 |    121 |      0 |      1 | s03      | R    |
| 21520002 |    100 |     63 |      6 |     3 |    0 |     18 |    0 |    0 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |     45 |     55 |      11 |       0 |       0 |       2 |      4 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |       11 |        3 |        5 |        2 |        3 |       0 |        3 |       22 |        6 |        4 |        2 |        1 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        9 |        4 |        1 |        1 |        1 |       0 |        3 |        9 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      7 |     11 |      4 |      0 |      0 |     41 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     26 |      0 |      1 | s03      | R    |
| 21521000 |    400 |    266 |     19 |     7 |    0 |     77 |    3 |    1 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    182 |    218 |      18 |       1 |       0 |       4 |     36 |      1 |      0 |     12 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      5 |      4 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        6 |       32 |       37 |       21 |       13 |        6 |       5 |        8 |       58 |       35 |       12 |       16 |       11 |       6 |        1 |        2 |        2 |        1 |        0 |        1 |       3 |        1 |        0 |        0 |        1 |        3 |        0 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       19 |       16 |        5 |        6 |        2 |       0 |        6 |       30 |        9 |        9 |        7 |        2 |       0 |      0 |      1 |     28 |     39 |     13 |      5 |     11 |    169 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      2 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     11 |      3 |      4 |      3 |     80 |      0 |      1 | s03      | R    |
| 21530000 |    719 |    451 |     53 |     5 |    0 |    163 |    5 |    4 |    38 |    0 |    0 |    0 |    0 |    0 |    0 |    328 |    391 |      21 |       3 |       0 |       3 |     51 |      3 |      0 |     23 |      1 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |     11 |      1 |      0 |      5 |      1 |      2 |      0 |      2 |       0 |       0 |       0 |       1 |      6 |      0 |      0 |      2 |        8 |       32 |       41 |       36 |       36 |       12 |      13 |       18 |       68 |       56 |       57 |       35 |       16 |      23 |        1 |        5 |        5 |        5 |        9 |        5 |       1 |        0 |        4 |        4 |        3 |        3 |        4 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       47 |       36 |       18 |        6 |        3 |       2 |        7 |       36 |       27 |       14 |        8 |        4 |       0 |      0 |      2 |     62 |     55 |     27 |     19 |     22 |    264 |      0 |      0 |      0 |      2 |     12 |      0 |      2 |      5 |     32 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     32 |     42 |      7 |      5 |      3 |    121 |      0 |      1 | s03      | R    |
| 21540001 |    617 |    388 |     45 |     9 |    0 |    121 |    1 |    2 |    51 |    0 |    0 |    0 |    0 |    0 |    0 |    277 |    340 |      15 |       2 |       0 |       7 |     41 |      0 |      0 |     16 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      1 |     10 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |       1 |       1 |       0 |       0 |      3 |      0 |      0 |      0 |        5 |       22 |       36 |       43 |       26 |        5 |       7 |       10 |       50 |       62 |       64 |       30 |       12 |      16 |        1 |        7 |        6 |        6 |        4 |        4 |       4 |        0 |        3 |        3 |        1 |        1 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       42 |       29 |       13 |        9 |        2 |       0 |       11 |       28 |       23 |       12 |        5 |        4 |       0 |      0 |      4 |     41 |     66 |     29 |     12 |     17 |    219 |      0 |      0 |      0 |      3 |      9 |      3 |      1 |      1 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     19 |     10 |      8 |      0 |    124 |      0 |      1 | s03      | R    |
| 21540002 |     22 |     15 |      0 |     0 |    0 |      4 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     12 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        0 |        0 |        2 |        1 |       0 |        1 |        3 |        3 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 21550001 |    716 |    454 |     47 |     6 |    0 |    143 |    1 |    2 |    63 |    0 |    0 |    0 |    0 |    0 |    0 |    306 |    410 |      14 |       0 |       0 |       9 |     48 |      0 |      0 |     18 |      3 |      0 |      0 |      3 |     11 |      0 |      0 |      1 |      7 |      1 |      0 |     12 |      2 |      0 |      0 |      1 |       1 |       1 |       0 |       1 |      4 |      0 |      0 |      0 |        2 |       31 |       45 |       47 |       21 |       10 |      10 |       10 |       62 |       75 |       71 |       29 |       24 |      17 |        0 |        4 |        5 |        1 |        4 |        7 |       2 |        1 |        4 |        3 |        1 |        0 |        7 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       33 |       38 |       18 |       10 |        7 |       0 |        7 |       29 |       29 |       19 |        5 |        8 |       1 |      0 |      1 |     46 |     58 |     46 |     18 |     20 |    265 |      0 |      0 |      0 |      3 |      4 |      5 |      1 |      1 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     30 |     26 |      8 |      6 |      1 |    142 |      0 |      1 | s03      | R    |
| 21550002 |     59 |     37 |      4 |     1 |    0 |     15 |    0 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     22 |     37 |       1 |       0 |       0 |       0 |      5 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        0 |        3 |        3 |        0 |       0 |        2 |       11 |        7 |        3 |        3 |        0 |       1 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        2 |        0 |        1 |        2 |       0 |        1 |        4 |        0 |        0 |        0 |        3 |       0 |      0 |      0 |      4 |      5 |      0 |      1 |      3 |     24 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     15 |      0 |      1 | s03      | R    |
| 21560001 |    145 |     75 |     13 |     2 |    0 |     39 |    0 |    1 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |     74 |     71 |       4 |       1 |       0 |       3 |      6 |      3 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        2 |       10 |        6 |       10 |        4 |        1 |       1 |        0 |       16 |        9 |       11 |        3 |        2 |       0 |        0 |        3 |        3 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       18 |        4 |        5 |        1 |        0 |       0 |        8 |       12 |        5 |        0 |        0 |        0 |       0 |      0 |      0 |     14 |     13 |      6 |      2 |      1 |     39 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      6 |      0 |      0 |      0 |     43 |      0 |      1 | s03      | R    |
| 21560002 |    295 |    181 |     15 |    11 |    0 |     62 |    4 |    2 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    122 |    173 |       7 |       0 |       0 |       9 |      6 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      4 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |       13 |       21 |       16 |        7 |        8 |       1 |        4 |       30 |       26 |       22 |       13 |       16 |       4 |        0 |        6 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |       20 |       13 |        6 |        4 |        3 |       0 |       13 |       19 |        7 |        7 |        4 |        2 |       0 |      0 |      1 |     27 |     37 |     15 |      5 |      4 |     92 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     13 |     12 |      2 |      0 |      0 |     69 |      0 |      1 | s03      | R    |
| 21561000 |    614 |    337 |     25 |    12 |    0 |    163 |    7 |    3 |    67 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    336 |      29 |       6 |       0 |      17 |     10 |      0 |      0 |     16 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      5 |      6 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      5 |      0 |      0 |      1 |        9 |       29 |       36 |       30 |       17 |       12 |       8 |        6 |       60 |       52 |       34 |       25 |       12 |       7 |        0 |        6 |        5 |        2 |        0 |        3 |       0 |        1 |        2 |        2 |        1 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       59 |       27 |       10 |        4 |        4 |       0 |       17 |       65 |       32 |       10 |        4 |        2 |       1 |      0 |      2 |     39 |     48 |     21 |      8 |     11 |    208 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     37 |     23 |      5 |      3 |      1 |    181 |      0 |      1 | s03      | R    |
| 21562000 |      3 |      1 |      0 |     0 |    0 |      1 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 21570000 |    871 |    459 |     44 |     9 |    0 |    253 |    9 |    3 |    94 |    0 |    0 |    0 |    0 |    0 |    0 |    378 |    493 |      25 |       1 |       0 |      19 |     23 |      0 |      0 |     22 |      3 |      0 |      0 |      1 |      5 |      0 |      0 |      3 |     13 |      3 |      0 |     10 |      1 |      0 |      0 |      1 |       0 |       2 |       0 |       6 |      1 |      1 |      0 |      2 |        9 |       45 |       56 |       30 |       18 |       13 |       6 |       17 |       81 |       62 |       57 |       28 |       25 |      12 |        0 |        5 |        6 |        3 |        7 |        5 |       1 |        2 |        4 |        1 |        5 |        2 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       85 |       43 |       22 |        9 |        2 |       0 |       25 |       93 |       40 |       22 |       14 |        0 |       0 |      0 |      6 |     50 |     58 |     33 |     17 |     17 |    278 |      0 |      0 |      0 |      9 |      5 |      3 |      2 |      0 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     47 |     32 |     17 |      2 |      1 |    263 |      0 |      1 | s03      | R    |
| 21580000 |    792 |    405 |     32 |    13 |    0 |    247 |   11 |    6 |    78 |    0 |    0 |    0 |    0 |    0 |    0 |    347 |    445 |      30 |       1 |       0 |      22 |     18 |      1 |      0 |     20 |      1 |      1 |      0 |      1 |      4 |      1 |      0 |      4 |      6 |      3 |      0 |      2 |      5 |      2 |      0 |      4 |       3 |       1 |       0 |       0 |      1 |      0 |      0 |      1 |       12 |       45 |       45 |       33 |       11 |       10 |       7 |       19 |       80 |       53 |       40 |       27 |       12 |      11 |        0 |        8 |        3 |        5 |        1 |        3 |       0 |        1 |        0 |        4 |        2 |        0 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |       92 |       26 |       20 |        4 |        2 |       0 |       31 |      106 |       28 |       13 |       11 |        1 |       1 |      0 |      4 |     67 |     62 |     34 |      6 |      5 |    227 |      0 |      0 |      0 |      2 |      4 |      2 |      2 |      1 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     62 |     27 |      3 |      3 |      1 |    256 |      0 |      1 | s03      | R    |
| 21590000 |    466 |    224 |     29 |     5 |    0 |    162 |    0 |    5 |    41 |    0 |    0 |    0 |    0 |    0 |    0 |    215 |    251 |      13 |       4 |       0 |      13 |      5 |      0 |      0 |      9 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      7 |      5 |      0 |      0 |      1 |      10 |       7 |       0 |      12 |      6 |      2 |      0 |      9 |       13 |       17 |       22 |       20 |       10 |        6 |       1 |       12 |       40 |       24 |       32 |       15 |        9 |       3 |        0 |        4 |        5 |        3 |        2 |        4 |       1 |        1 |        4 |        1 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       51 |       19 |       15 |        5 |        0 |       1 |       13 |       55 |       14 |       16 |        4 |        3 |       1 |      0 |      0 |     29 |     32 |     11 |      5 |      7 |    140 |      0 |      0 |      0 |      2 |     11 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     35 |     20 |      4 |      2 |      2 |    147 |      0 |      1 | s03      | R    |
| 21591000 |      1 |      0 |      0 |     0 |    0 |      0 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 22300000 |    712 |    450 |     56 |     8 |    0 |    146 |    2 |    1 |    49 |    0 |    0 |    0 |    0 |    0 |    0 |    294 |    418 |      19 |       0 |       0 |       7 |     52 |      3 |      0 |     15 |      5 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |     14 |      4 |      0 |     14 |      3 |      0 |      0 |      3 |       4 |       0 |       0 |       0 |      6 |      1 |      0 |      1 |        8 |       40 |       31 |       31 |       18 |       38 |       1 |       17 |       52 |       43 |       36 |       34 |       93 |       8 |        0 |        7 |        6 |        2 |        4 |       10 |       1 |        0 |        1 |        3 |        2 |        4 |       13 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       47 |       19 |       13 |        4 |        4 |       0 |       16 |       47 |       20 |        7 |        4 |       15 |       0 |      0 |      1 |     53 |     67 |     20 |     12 |      8 |    289 |      0 |      0 |      0 |      6 |     14 |      4 |      3 |      0 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     27 |     14 |      5 |      4 |      1 |    153 |      0 |      1 | s03      | R    |
| 22301001 |     27 |     12 |      2 |     0 |    0 |     10 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |     13 |       2 |       0 |       0 |       3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        1 |        0 |        1 |       1 |        0 |        4 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        1 |        0 |        1 |        0 |       0 |        2 |        2 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      9 |      0 |      1 | s03      | R    |
| 22301002 |    872 |    511 |     45 |    10 |    0 |    201 |    7 |    0 |    98 |    0 |    0 |    0 |    0 |    0 |    0 |    366 |    506 |      23 |       1 |       0 |      22 |     52 |      4 |      0 |     23 |      5 |      1 |      0 |      5 |      5 |      0 |      0 |      2 |      7 |      1 |      0 |      6 |      6 |      0 |      0 |      0 |       3 |       1 |       0 |       2 |      2 |      1 |      0 |      4 |        2 |       43 |       45 |       45 |       37 |       19 |       9 |       11 |       72 |       72 |       68 |       36 |       44 |       8 |        1 |        8 |        2 |        6 |        1 |        2 |       1 |        1 |        0 |        6 |        1 |        2 |        9 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       63 |       29 |       24 |       12 |        7 |       2 |       33 |       64 |       34 |       22 |        9 |        9 |       0 |      0 |      3 |     60 |     96 |     28 |     11 |     25 |    288 |      0 |      0 |      0 |      2 |      6 |      1 |      3 |      1 |     32 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     43 |     35 |      9 |      9 |      3 |    215 |      0 |      1 | s03      | R    |
| 22310000 |    275 |    163 |     29 |     2 |    0 |     62 |    2 |    1 |    16 |    0 |    0 |    0 |    0 |    0 |    0 |    123 |    152 |       2 |       1 |       0 |       7 |     21 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       3 |      0 |      0 |      0 |      0 |        1 |       10 |       17 |       14 |       16 |        9 |       3 |        3 |       16 |       25 |       20 |       22 |        5 |       2 |        0 |        0 |        1 |        1 |        5 |        1 |       5 |        0 |        1 |        2 |        2 |        3 |        4 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       16 |        9 |        8 |        4 |        0 |       0 |        2 |       15 |        9 |       11 |        4 |        2 |       0 |      0 |      0 |     17 |     30 |     13 |     12 |     11 |     80 |      0 |      0 |      1 |      0 |      5 |      0 |      2 |      1 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     14 |      6 |      4 |      1 |     43 |      0 |      1 | s03      | R    |
| 22311001 |     92 |     43 |      6 |     1 |    0 |     36 |    0 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     41 |     51 |       2 |       0 |       0 |       1 |      8 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        8 |        3 |        3 |        2 |        1 |       0 |        5 |        5 |        6 |        1 |        2 |        0 |       1 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        4 |        2 |        3 |        1 |        0 |       0 |       10 |       12 |        4 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      6 |      1 |      0 |      0 |     32 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |      0 |     35 |      0 |      1 | s03      | R    |
| 22311002 |     77 |     51 |      6 |     1 |    0 |     15 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     36 |     41 |       1 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        7 |        5 |        3 |        2 |        3 |       1 |        0 |        6 |        9 |        5 |        5 |        4 |       1 |        0 |        1 |        2 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        2 |        2 |        1 |        0 |       0 |        1 |        3 |        3 |        1 |        2 |        0 |       0 |      0 |      0 |     10 |      9 |      2 |      2 |      0 |     28 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     13 |      0 |      1 | s03      | R    |
| 22320000 |    595 |    361 |     53 |     7 |    0 |    123 |    4 |    1 |    46 |    0 |    0 |    0 |    0 |    0 |    0 |    255 |    340 |      16 |       0 |       0 |       5 |     28 |      3 |      0 |      9 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      4 |      1 |      0 |      4 |      3 |      0 |      0 |      4 |       2 |       1 |       0 |       0 |      2 |      0 |      0 |      1 |        2 |       34 |       36 |       24 |       29 |       16 |       2 |        5 |       45 |       48 |       41 |       37 |       39 |       3 |        1 |        4 |        3 |        4 |        3 |        4 |       3 |        2 |        3 |        4 |        3 |        3 |       13 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       27 |       23 |       15 |       16 |        5 |       0 |        9 |       32 |       30 |        7 |        7 |        6 |       0 |      0 |      0 |     46 |     59 |     23 |     14 |     15 |    204 |      0 |      0 |      1 |      7 |      3 |      5 |      2 |      1 |     34 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     28 |     16 |      8 |      3 |      1 |    123 |      0 |      1 | s03      | R    |
| 22330000 |    942 |    549 |     81 |    11 |    0 |    202 |   14 |    1 |    84 |    0 |    0 |    0 |    0 |    0 |    0 |    404 |    538 |      30 |       4 |       0 |      12 |     48 |      4 |      0 |     27 |      0 |      1 |      0 |      0 |      6 |      0 |      0 |      2 |     17 |      5 |      0 |     10 |      2 |      0 |      0 |      1 |       1 |       2 |       0 |       0 |      5 |      1 |      0 |      0 |        7 |       51 |       59 |       44 |       39 |       18 |       6 |       12 |       88 |       87 |       65 |       39 |       24 |      10 |        1 |        3 |        9 |        6 |        6 |        6 |       7 |        2 |        9 |        4 |        2 |        4 |       18 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       57 |       34 |       15 |       14 |        8 |       0 |       16 |       71 |       42 |       26 |        4 |       10 |       1 |      0 |      7 |     81 |     90 |     40 |     17 |     20 |    294 |      0 |      0 |      0 |      7 |     12 |      7 |      3 |      6 |     46 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     56 |     34 |     14 |      5 |      1 |    201 |      0 |      1 | s03      | R    |
| 22340000 |    764 |    489 |    123 |     5 |    0 |    115 |    1 |    2 |    29 |    0 |    0 |    0 |    0 |    0 |    0 |    248 |    516 |      22 |       1 |       0 |       5 |     47 |      9 |      0 |      9 |      3 |      0 |      0 |      0 |     14 |      2 |      0 |      1 |     18 |      5 |      0 |      6 |      1 |      0 |      0 |      3 |       1 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |        1 |       26 |       31 |       14 |        9 |       51 |       6 |        6 |       70 |       54 |       25 |       12 |      173 |      11 |        0 |        4 |        6 |        1 |        2 |       25 |       3 |        0 |        5 |        1 |        0 |        1 |       65 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       26 |       18 |        3 |        4 |       12 |       2 |        3 |       33 |       20 |        8 |        2 |       16 |       1 |      0 |      3 |     63 |     80 |     31 |     14 |     23 |    275 |      0 |      0 |      0 |     22 |     18 |      9 |      3 |      4 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     19 |     12 |      4 |      1 |      0 |    112 |      0 |      1 | s03      | R    |
| 22400001 |    136 |     90 |     24 |     3 |    0 |     16 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     68 |     68 |       0 |       1 |       0 |       0 |     13 |      2 |      0 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |       13 |        6 |       14 |        5 |       1 |        1 |        4 |       11 |       12 |       11 |        4 |       5 |        0 |        3 |        4 |        4 |        1 |        0 |       3 |        0 |        2 |        2 |        1 |        1 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        3 |        2 |        3 |        0 |       0 |        1 |        3 |        1 |        5 |        1 |        0 |       0 |      0 |      3 |     21 |      7 |      3 |      3 |      5 |     48 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      0 |      2 |      4 |      9 |      0 |      1 | s03      | R    |
| 22400002 |    454 |    279 |     91 |     6 |    0 |     64 |    2 |    0 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    214 |    240 |      13 |       3 |       0 |       3 |     23 |      8 |      0 |      5 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      9 |      3 |      0 |      5 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      1 |        3 |       13 |       26 |       29 |       30 |       13 |      11 |        5 |       21 |       30 |       40 |       36 |        8 |      14 |        0 |        3 |       11 |        6 |        9 |        8 |       4 |        1 |        7 |        8 |        9 |        6 |       10 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        9 |       10 |        9 |        6 |        3 |       5 |        5 |        6 |       14 |        4 |        4 |        2 |       1 |      0 |      1 |     21 |     43 |     29 |     13 |     21 |    151 |      0 |      0 |      2 |      3 |     16 |      3 |      4 |      2 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     12 |     10 |      4 |      1 |     51 |      0 |      1 | s03      | R    |
| 22410001 |    538 |    339 |     52 |    10 |    0 |    101 |    2 |    1 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    248 |    290 |      15 |       2 |       0 |       4 |     34 |      4 |      0 |     14 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      8 |      4 |      0 |      6 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        7 |       20 |       26 |       33 |       27 |        9 |      14 |        5 |       37 |       38 |       57 |       37 |       11 |      18 |        2 |        4 |        4 |        7 |        7 |        6 |       3 |        1 |        2 |        3 |        2 |        4 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       21 |       24 |       14 |        9 |        3 |       1 |        7 |       15 |       23 |       15 |        6 |        2 |       0 |      0 |      0 |     39 |     58 |     27 |     14 |     18 |    183 |      0 |      0 |      1 |      4 |     10 |      2 |      3 |      5 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     17 |     14 |      3 |      4 |     85 |      0 |      1 | s03      | R    |
| 22410002 |     10 |      4 |      5 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      4 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 22420001 |    469 |    314 |     36 |     6 |    0 |     87 |    1 |    2 |    23 |    0 |    0 |    0 |    0 |    0 |    0 |    213 |    256 |      13 |       1 |       0 |       9 |     25 |      1 |      0 |      3 |      2 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |     16 |      4 |      0 |      6 |      1 |      0 |      0 |      6 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        6 |       20 |       29 |       42 |       18 |       18 |       6 |        5 |       24 |       56 |       40 |       19 |       20 |      11 |        1 |        3 |        4 |        5 |        4 |        3 |       3 |        1 |        1 |        3 |        2 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       13 |       18 |        4 |        6 |        4 |       0 |        4 |       20 |       17 |       16 |        6 |        4 |       1 |      0 |      0 |     42 |     55 |     27 |     14 |     22 |    154 |      0 |      0 |      0 |      1 |      3 |      4 |      2 |      2 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     23 |     14 |      4 |      1 |      5 |     70 |      0 |      1 | s03      | R    |
| 22420002 |    228 |    156 |     26 |     2 |    0 |     39 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    110 |    118 |       6 |       0 |       0 |       1 |     13 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |       10 |       28 |       14 |       10 |        4 |       3 |        4 |       18 |       29 |       14 |       10 |        1 |       9 |        3 |        0 |        2 |        3 |        2 |        0 |       1 |        0 |        3 |        1 |        1 |        5 |        0 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       10 |       10 |        1 |        3 |        0 |       1 |        4 |        3 |        9 |        2 |        0 |        0 |       0 |      0 |      1 |     17 |     20 |     12 |      2 |      6 |     98 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      6 |      3 |      0 |      0 |     30 |      0 |      1 | s03      | R    |
| 22430001 |    150 |     91 |     10 |     0 |    0 |     33 |    2 |    1 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |     62 |     88 |       8 |       0 |       0 |       4 |      7 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        6 |        9 |        8 |        6 |        1 |       2 |        0 |       13 |       13 |       15 |        5 |        8 |       4 |        0 |        0 |        1 |        2 |        0 |        1 |       1 |        0 |        1 |        0 |        1 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        5 |       14 |        3 |        2 |        0 |       0 |        3 |       10 |        5 |        4 |        1 |        2 |       0 |      0 |      0 |     13 |     12 |      9 |      3 |      5 |     49 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      9 |      2 |      2 |      0 |     30 |      0 |      1 | s03      | R    |
| 22430002 |    444 |    284 |     29 |     8 |    0 |    100 |    1 |    2 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    173 |    271 |      19 |       1 |       0 |       6 |     26 |      3 |      0 |     10 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |      3 |      0 |     19 |      0 |      0 |      0 |      2 |       3 |       3 |       0 |       5 |      1 |      0 |      0 |      1 |        2 |       12 |       36 |       19 |       13 |       14 |       8 |        2 |       20 |       58 |       26 |       23 |       43 |       8 |        0 |        7 |        5 |        2 |        1 |        2 |       1 |        0 |        2 |        2 |        3 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       17 |        9 |        6 |        3 |       12 |       0 |        3 |       20 |       23 |       10 |        5 |       18 |       1 |      0 |      2 |     21 |     65 |     22 |      6 |      7 |    161 |      0 |      0 |      0 |      1 |      4 |      4 |      2 |      2 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     23 |     15 |      5 |      0 |      5 |     80 |      0 |      1 | s03      | R    |
| 22431001 |    195 |    128 |     12 |     4 |    0 |     41 |    0 |    0 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |     85 |    110 |      10 |       0 |       0 |       3 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     10 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |       12 |       16 |        7 |        8 |        8 |       1 |        6 |       15 |       14 |       18 |       11 |        5 |       4 |        0 |        0 |        1 |        1 |        0 |        1 |       1 |        0 |        2 |        0 |        0 |        2 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |        5 |        8 |        2 |        1 |       0 |        5 |       10 |       10 |        2 |        0 |        2 |       0 |      0 |      1 |     15 |     26 |      9 |      1 |      4 |     72 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     14 |      0 |      0 |      1 |     35 |      0 |      1 | s03      | R    |
| 22440001 |    217 |    141 |     26 |     3 |    0 |     41 |    1 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     76 |    141 |       6 |       1 |       0 |       5 |      6 |      0 |      0 |      4 |      1 |      0 |      0 |      1 |      2 |      3 |      0 |      1 |     10 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        1 |        8 |       14 |       11 |        7 |        1 |       6 |        1 |        9 |       30 |       26 |       11 |        6 |      10 |        0 |        2 |        3 |        2 |        0 |        1 |       2 |        0 |        2 |        6 |        0 |        1 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        5 |        4 |        3 |        3 |        1 |       1 |        5 |       12 |        4 |        4 |        3 |        2 |       2 |      0 |      1 |     13 |     21 |     22 |      5 |      7 |     72 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      1 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      4 |      3 |      2 |      1 |     32 |      0 |      1 | s03      | R    |
| 22441000 |    317 |    187 |     25 |     6 |    0 |     82 |    3 |    2 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    137 |    180 |      22 |       0 |       0 |       7 |      5 |      1 |      0 |      4 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      2 |      8 |      0 |      0 |     25 |      0 |      0 |      0 |      1 |       3 |       2 |       0 |       4 |      6 |      0 |      0 |      3 |        3 |       11 |       17 |       19 |        9 |        9 |       2 |        3 |       29 |       22 |       26 |       14 |       17 |       6 |        2 |        1 |        0 |        3 |        0 |        2 |       1 |        1 |        2 |        0 |        1 |        3 |        6 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       18 |       12 |       12 |        2 |        6 |       0 |        7 |       16 |       10 |        2 |        6 |        3 |       3 |      0 |      1 |     22 |     32 |      9 |      3 |      7 |    113 |      0 |      0 |      0 |      1 |      5 |      1 |      2 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     13 |      3 |      2 |      1 |     70 |      0 |      1 | s03      | R    |
| 22442001 |     14 |      8 |      0 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      8 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 22442002 |     77 |     54 |      5 |     0 |    0 |     15 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     36 |     41 |       5 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      1 |      1 |      0 |      0 |        0 |        3 |        4 |        5 |        7 |        6 |       0 |        0 |        8 |        3 |        4 |        2 |       10 |       2 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        1 |        2 |        2 |        0 |       0 |        1 |        3 |        1 |        1 |        2 |        1 |       0 |      0 |      0 |     13 |      5 |      1 |      3 |      0 |     32 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      1 |     11 |      0 |      1 | s03      | R    |
| 22450000 |    827 |    533 |     74 |     9 |    0 |    161 |    5 |    0 |    45 |    0 |    0 |    0 |    0 |    0 |    0 |    369 |    458 |      19 |       1 |       0 |       4 |     40 |      3 |      0 |      9 |      1 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |     25 |     11 |      0 |     26 |      5 |      0 |      0 |      1 |       0 |       1 |       0 |       0 |     11 |      2 |      0 |      3 |       13 |       43 |       49 |       52 |       31 |       12 |      15 |       14 |       54 |       89 |       86 |       37 |       19 |      19 |        0 |        4 |        8 |        8 |        4 |        5 |       6 |        0 |        3 |        3 |        6 |        5 |        8 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       28 |       37 |       20 |       17 |        7 |       2 |        2 |       24 |       31 |       22 |       12 |        8 |       2 |      0 |      2 |     44 |     94 |     39 |     19 |     33 |    302 |      0 |      0 |      0 |      6 |      5 |      3 |      0 |      4 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     41 |     14 |      5 |      3 |    122 |      0 |      1 | s03      | R    |
| 22460000 |    883 |    576 |     90 |     5 |    0 |    166 |    5 |    0 |    41 |    0 |    0 |    0 |    0 |    0 |    0 |    368 |    515 |      35 |       4 |       0 |       6 |     53 |      4 |      0 |     18 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      2 |     35 |      8 |      0 |     28 |      4 |      0 |      0 |      1 |       2 |       0 |       0 |       2 |      4 |      1 |      0 |      1 |        9 |       23 |       45 |       71 |       29 |       14 |      16 |       12 |       58 |       97 |      114 |       51 |       18 |      19 |        0 |       12 |        4 |        8 |       10 |        5 |       9 |        1 |        3 |        4 |        5 |        4 |        6 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       21 |       43 |       19 |       15 |        7 |       2 |        9 |       23 |       28 |       21 |       15 |        7 |       1 |      0 |     12 |     57 |     83 |     62 |     18 |     31 |    313 |      0 |      0 |      0 |      5 |     14 |      6 |      3 |      3 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     40 |     16 |      9 |      1 |    124 |      0 |      1 | s03      | R    |
| 22470000 |    495 |    319 |     31 |     8 |    0 |    111 |    2 |    3 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    223 |    272 |      16 |       4 |       0 |       9 |      8 |      1 |      0 |      3 |      3 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     15 |      3 |      0 |     18 |      1 |      0 |      0 |      1 |       5 |       0 |       0 |       1 |      5 |      0 |      0 |      1 |       10 |       31 |       24 |       33 |       20 |       22 |       4 |       10 |       37 |       38 |       47 |       23 |       15 |       5 |        1 |        2 |        4 |        2 |        2 |        3 |       1 |        1 |        4 |        6 |        0 |        1 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       23 |       12 |       13 |        4 |        5 |       1 |       14 |       27 |       20 |        4 |        7 |        9 |       0 |      0 |      1 |     55 |     51 |     30 |      8 |     11 |    163 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      1 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     19 |      5 |      2 |      3 |     94 |      0 |      1 | s03      | R    |
| 22471000 |     75 |     53 |     10 |     0 |    0 |      8 |    0 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     28 |     47 |       2 |       3 |       0 |       0 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        4 |        6 |        6 |        2 |        2 |       1 |        1 |        6 |        5 |       10 |        7 |        2 |       1 |        0 |        0 |        2 |        0 |        0 |        0 |       1 |        0 |        0 |        2 |        1 |        0 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |        1 |        2 |        0 |        2 |        3 |        0 |       0 |      0 |      0 |      3 |      7 |      8 |      4 |      3 |     28 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 22480000 |    717 |    456 |     60 |     9 |    0 |    143 |    4 |    2 |    43 |    0 |    0 |    0 |    0 |    0 |    0 |    326 |    391 |      25 |       1 |       0 |      12 |     57 |      2 |      0 |      9 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     17 |      5 |      0 |     18 |      3 |      0 |      0 |      3 |       5 |       2 |       0 |       3 |      4 |      3 |      0 |      1 |       11 |       27 |       47 |       44 |       31 |       16 |      11 |       14 |       52 |       54 |       70 |       44 |       23 |      12 |        0 |        4 |        6 |        9 |        6 |        6 |       3 |        0 |        2 |        3 |        6 |        6 |        5 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       31 |       21 |       26 |       13 |        9 |       1 |       10 |       27 |       24 |       18 |       13 |        4 |       0 |      0 |      7 |     56 |     66 |     44 |     19 |     16 |    248 |      0 |      0 |      0 |      7 |      7 |      3 |      6 |      0 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     33 |     23 |     12 |      4 |      3 |    126 |      0 |      1 | s03      | R    |
| 22490000 |    471 |    288 |     61 |     3 |    0 |     95 |    3 |    0 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    217 |    254 |      16 |       2 |       0 |       5 |     25 |      3 |      0 |     10 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      4 |      0 |      8 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       2 |      3 |      0 |      0 |      4 |        6 |       19 |       27 |       26 |       26 |        9 |      12 |        8 |       15 |       39 |       38 |       33 |       12 |      18 |        0 |        8 |        3 |        5 |        4 |        7 |       3 |        0 |        1 |        5 |        4 |       10 |        5 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       12 |       19 |       11 |        7 |        6 |       0 |        2 |       21 |       21 |        4 |        8 |        4 |       0 |      0 |      2 |     17 |     55 |     25 |     11 |     13 |    165 |      0 |      0 |      0 |      3 |      8 |      2 |      2 |      0 |     46 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     17 |      6 |      2 |      2 |     74 |      0 |      1 | s03      | R    |
| 22491000 |    178 |    118 |     10 |     1 |    0 |     37 |    3 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |     68 |    110 |       7 |       0 |       0 |       3 |     17 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        6 |       10 |       12 |        6 |        1 |       4 |        0 |       17 |       25 |       20 |       11 |        2 |       4 |        0 |        1 |        2 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |       10 |        5 |        4 |        0 |       1 |        2 |        5 |       12 |        4 |        1 |        2 |       0 |      0 |      1 |     16 |     18 |      4 |      5 |      5 |     69 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      7 |      0 |      3 |      2 |     35 |      0 |      1 | s03      | R    |
| 22500001 |    445 |    283 |     13 |     5 |    0 |    105 |    5 |    1 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    185 |    260 |      17 |       1 |       0 |       7 |     23 |      0 |      0 |     10 |      1 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      3 |        4 |       33 |       26 |       18 |       18 |        6 |       6 |       17 |       40 |       45 |       33 |       21 |        8 |       8 |        0 |        2 |        1 |        1 |        2 |        0 |       1 |        0 |        2 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       28 |       16 |       10 |        5 |        3 |       0 |        7 |       42 |       16 |        9 |        6 |        1 |       1 |      0 |      1 |     34 |     37 |     18 |      5 |      7 |    181 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     27 |     12 |      7 |      2 |      1 |     97 |      0 |      1 | s03      | R    |
| 22500003 |     66 |     38 |      3 |     0 |    0 |     16 |    0 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |     38 |     28 |       0 |       2 |       0 |       1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        3 |        6 |        4 |        4 |        0 |       2 |        0 |        4 |        4 |        6 |        1 |        1 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        5 |        3 |        2 |        0 |       0 |        0 |        6 |        2 |        0 |        1 |        1 |       0 |      0 |      0 |      4 |      9 |      0 |      1 |      4 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |     19 |      0 |      1 | s03      | R    |
| 22510001 |    815 |    489 |     33 |     5 |    0 |    188 |    5 |    5 |    90 |    0 |    0 |    0 |    0 |    0 |    0 |    325 |    490 |      23 |       3 |       0 |      15 |     42 |      2 |      0 |     13 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      8 |      3 |      0 |      3 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       2 |      5 |      2 |      0 |      5 |        8 |       42 |       39 |       32 |       20 |       13 |      12 |       13 |       72 |       81 |       69 |       33 |       34 |      21 |        1 |        6 |        3 |        2 |        1 |        2 |       1 |        1 |        6 |        0 |        0 |        2 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       58 |       38 |       18 |       12 |        4 |       0 |       15 |       58 |       31 |       23 |       14 |        8 |       1 |      0 |      3 |     84 |     84 |     31 |      7 |     20 |    260 |      0 |      0 |      0 |      4 |      8 |      1 |      2 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     45 |     38 |      7 |      9 |      2 |    187 |      0 |      1 | s03      | R    |
| 22510002 |      5 |      1 |      1 |     0 |    0 |      2 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 22520001 |    554 |    305 |     26 |    11 |    0 |    157 |    3 |    4 |    48 |    0 |    0 |    0 |    0 |    0 |    0 |    252 |    302 |      19 |       1 |       0 |      16 |     18 |      1 |      0 |     10 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      5 |      0 |      3 |      3 |      0 |      0 |      1 |       9 |       1 |       0 |       3 |      3 |      0 |      0 |      3 |        8 |       41 |       38 |       15 |       18 |       11 |       2 |       14 |       59 |       39 |       26 |       15 |       14 |       5 |        1 |        6 |        3 |        1 |        2 |        1 |       1 |        0 |        4 |        3 |        3 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       48 |       27 |       12 |        7 |        1 |       2 |       24 |       56 |       21 |       11 |        5 |        2 |       0 |      0 |      3 |     50 |     52 |     14 |      3 |      9 |    174 |      0 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     39 |     28 |      2 |      1 |      3 |    150 |      0 |      1 | s03      | R    |
| 22520002 |     12 |      5 |      2 |     0 |    0 |      4 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 22530000 |    811 |    470 |     50 |     9 |    0 |    204 |    7 |    0 |    71 |    0 |    0 |    0 |    0 |    0 |    0 |    349 |    462 |      18 |       3 |       0 |       9 |     38 |      1 |      0 |     24 |      4 |      1 |      0 |      1 |      7 |      2 |      0 |      4 |      5 |      0 |      0 |      4 |      5 |      1 |      0 |      3 |       0 |       0 |       0 |       2 |      6 |      3 |      0 |      2 |        9 |       38 |       50 |       38 |       26 |        9 |       5 |        7 |       89 |       65 |       61 |       41 |       27 |       5 |        1 |       10 |        4 |        4 |        7 |        5 |       2 |        0 |        1 |        3 |        3 |        3 |        7 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       78 |       26 |       13 |       14 |        3 |       0 |        8 |       71 |       35 |       19 |       13 |        3 |       1 |      0 |      3 |     48 |     82 |     38 |     10 |     14 |    275 |      0 |      0 |      0 |      9 |     13 |      3 |      1 |      2 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     40 |     31 |     12 |      4 |      4 |    196 |      0 |      1 | s03      | R    |
| 22540002 |   1224 |    770 |     95 |    10 |    0 |    286 |    7 |    2 |    54 |    0 |    0 |    0 |    0 |    0 |    0 |    511 |    713 |      55 |       3 |       0 |      24 |     52 |      2 |      0 |     17 |      5 |      2 |      0 |      4 |      6 |      3 |      0 |      3 |     17 |      6 |      0 |     10 |      4 |      0 |      0 |      6 |       0 |       0 |       0 |       7 |      5 |      0 |      0 |      6 |        6 |       89 |       81 |       46 |       40 |       20 |       4 |       13 |      142 |       98 |      102 |       76 |       44 |       9 |        0 |       15 |       11 |        9 |        5 |        9 |       3 |        1 |       10 |        5 |       11 |        5 |        7 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       70 |       50 |       27 |       14 |        4 |       1 |       19 |       82 |       34 |       27 |       16 |        8 |       0 |      0 |      5 |     97 |    127 |     55 |     14 |     24 |    448 |      0 |      0 |      1 |      7 |     14 |      6 |      1 |      6 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     46 |     42 |     14 |      5 |      4 |    248 |      0 |      1 | s03      | R    |
| 22550001 |      6 |      2 |      1 |     0 |    0 |      2 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 22550002 |    141 |     80 |      7 |     2 |    0 |     40 |    3 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |     59 |     82 |       5 |       0 |       0 |       2 |      6 |      1 |      0 |      4 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        7 |        9 |        7 |        4 |        4 |       0 |        6 |       17 |        8 |       11 |        4 |        2 |       0 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |        6 |        5 |        1 |        0 |       0 |        3 |       16 |        6 |        3 |        1 |        3 |       0 |      0 |      1 |      7 |     15 |      7 |      2 |      4 |     44 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     10 |      5 |      2 |      0 |      1 |     34 |      0 |      1 | s03      | R    |
| 22560001 |    747 |    464 |     48 |    10 |    0 |    178 |    1 |    0 |    46 |    0 |    0 |    0 |    0 |    0 |    0 |    298 |    449 |      36 |       1 |       0 |      16 |     23 |      1 |      0 |     16 |      5 |      0 |      0 |      2 |      7 |      2 |      0 |      2 |     14 |      4 |      0 |     21 |      0 |      0 |      0 |      2 |       4 |       0 |       0 |       2 |      1 |      0 |      0 |      1 |        8 |       36 |       40 |       40 |       24 |       18 |       2 |        9 |       91 |       65 |       65 |       37 |       23 |       6 |        0 |        6 |        3 |        7 |        6 |        3 |       1 |        3 |        5 |        3 |        4 |        3 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       40 |       31 |       17 |        6 |        2 |       0 |       17 |       57 |       14 |       22 |        9 |       11 |       1 |      0 |      2 |     54 |     87 |     25 |     13 |     16 |    267 |      0 |      0 |      0 |      3 |      6 |      0 |      2 |      4 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     31 |     31 |      7 |      5 |      3 |    156 |      0 |      1 | s03      | R    |
| 22560002 |      3 |      2 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 22570001 |    702 |    421 |     55 |    12 |    0 |    160 |    4 |    4 |    46 |    0 |    0 |    0 |    0 |    0 |    0 |    297 |    405 |      18 |       3 |       0 |       9 |     30 |      1 |      0 |     17 |      2 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |     14 |      5 |      0 |     13 |      4 |      0 |      0 |      1 |       4 |       1 |       0 |       3 |      4 |      2 |      0 |      1 |        8 |       36 |       34 |       43 |       29 |       14 |       4 |       14 |       56 |       42 |       63 |       48 |       27 |       3 |        1 |        6 |        1 |        7 |        5 |        2 |       3 |        2 |        4 |        4 |        4 |        3 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |       34 |       35 |       21 |       11 |        3 |       0 |       16 |       38 |       31 |       20 |       12 |        5 |       0 |      0 |      3 |     52 |     66 |     38 |     21 |     19 |    222 |      0 |      0 |      1 |      8 |      7 |      2 |      0 |      2 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     39 |     24 |      4 |      7 |      2 |    148 |      0 |      1 | s03      | R    |
| 22570002 |    209 |    120 |     24 |     4 |    0 |     51 |    3 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |     94 |    115 |       8 |       1 |       0 |       2 |      5 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |       13 |       18 |       10 |        6 |        1 |       0 |        4 |       19 |       17 |       18 |        7 |        5 |       1 |        0 |        1 |        1 |        3 |        5 |        4 |       1 |        1 |        1 |        0 |        2 |        2 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       13 |        5 |        5 |        3 |        1 |       0 |        5 |       14 |        9 |        5 |        1 |        1 |       0 |      0 |      0 |     15 |     14 |     15 |      3 |      5 |     68 |      0 |      0 |      0 |      1 |      3 |      3 |      3 |      2 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      7 |      3 |      1 |      0 |     43 |      0 |      1 | s03      | R    |
| 22571001 |   1082 |    666 |    102 |    20 |    0 |    205 |    5 |    6 |    78 |    0 |    0 |    0 |    0 |    0 |    0 |    467 |    615 |      32 |       3 |       0 |      11 |     50 |      5 |      0 |     16 |      4 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |     19 |      5 |      0 |     10 |      2 |      0 |      0 |      5 |       5 |       0 |       0 |       2 |      5 |      1 |      0 |      4 |       13 |       51 |       65 |       60 |       35 |       30 |       7 |       11 |       89 |       94 |       86 |       47 |       67 |      11 |        3 |       10 |        7 |        3 |        7 |       11 |       7 |        1 |        6 |        3 |        7 |        4 |       24 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       52 |       51 |       27 |       14 |        5 |       3 |       10 |       81 |       29 |       20 |        7 |        8 |       1 |      0 |      5 |     80 |    128 |     45 |     16 |     21 |    371 |      0 |      0 |      0 |      5 |     20 |      4 |      8 |      7 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     37 |     32 |     10 |      7 |      4 |    219 |      0 |      1 | s03      | R    |
| 22580000 |    555 |    346 |     43 |     4 |    0 |    125 |    4 |    0 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    323 |      20 |       1 |       0 |       2 |     28 |      3 |      0 |     14 |      1 |      0 |      0 |      1 |      7 |      0 |      0 |      2 |     17 |      0 |      0 |     11 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      7 |      1 |      0 |      4 |        0 |       28 |       33 |       34 |       24 |        4 |       2 |        7 |       58 |       52 |       54 |       37 |        9 |       4 |        1 |        5 |        9 |        6 |        0 |        5 |       0 |        0 |        5 |        2 |        5 |        1 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       33 |       23 |       10 |        9 |        4 |       0 |       10 |       36 |       19 |       11 |        6 |        3 |       0 |      0 |      4 |     45 |     61 |     21 |      8 |      9 |    198 |      0 |      0 |      1 |      6 |      4 |      0 |      1 |      4 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     18 |      4 |      1 |      1 |    120 |      0 |      1 | s03      | R    |
| 22581000 |    647 |    364 |     41 |     8 |    0 |    168 |    8 |    4 |    54 |    0 |    0 |    0 |    0 |    0 |    0 |    290 |    357 |      29 |       0 |       0 |      11 |     27 |      2 |      0 |     15 |      2 |      0 |      0 |      1 |      4 |      2 |      0 |      2 |      9 |      4 |      0 |     10 |      6 |      1 |      0 |      4 |       2 |       1 |       0 |       1 |      4 |      0 |      0 |      1 |        4 |       41 |       51 |       29 |       13 |        7 |       3 |       10 |       67 |       60 |       38 |       25 |       11 |       5 |        0 |        4 |        6 |        2 |        2 |        7 |       0 |        1 |        4 |        5 |        2 |        0 |        7 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       52 |       24 |       18 |        9 |        7 |       1 |       13 |       50 |       30 |       13 |       10 |        5 |       0 |      0 |      2 |     45 |     64 |     17 |     13 |     11 |    212 |      0 |      0 |      1 |      5 |      4 |      2 |      1 |      3 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     29 |     22 |     11 |      2 |      0 |    175 |      0 |      1 | s03      | R    |
| 22590000 |    786 |    532 |     92 |     5 |    0 |    127 |    2 |    0 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    361 |    425 |      24 |       3 |       0 |       5 |     57 |      3 |      0 |      9 |      3 |      0 |      0 |      3 |      9 |      6 |      0 |      5 |     16 |     11 |      0 |     13 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      5 |      0 |      0 |      3 |        8 |       22 |       62 |       64 |       45 |       15 |      15 |       10 |       37 |       60 |       78 |       57 |       21 |      38 |        0 |        4 |       11 |        7 |        7 |        9 |       8 |        0 |        5 |        5 |        7 |        4 |        8 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       21 |       26 |       19 |        7 |        3 |       3 |       13 |       21 |       12 |       18 |        7 |        4 |       3 |      0 |      8 |     44 |     79 |     41 |     13 |     20 |    327 |      0 |      0 |      0 |      6 |     12 |      4 |      7 |      2 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     11 |      5 |      3 |      4 |    116 |      0 |      1 | s03      | R    |
| 22591000 |    703 |    413 |     55 |     9 |    0 |    163 |    5 |    2 |    56 |    0 |    0 |    0 |    0 |    0 |    0 |    293 |    410 |      21 |       2 |       0 |       9 |     24 |      3 |      0 |     24 |      4 |      0 |      0 |      3 |     11 |      2 |      0 |      6 |     13 |      6 |      0 |     15 |      2 |      0 |      0 |      2 |       3 |       0 |       0 |       2 |      5 |      1 |      0 |      2 |        5 |       36 |       33 |       44 |       16 |       10 |       2 |        5 |       88 |       74 |       47 |       30 |       14 |       9 |        0 |        7 |        5 |        4 |        4 |        7 |       4 |        0 |       10 |        4 |        0 |        1 |        7 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |       45 |       40 |       10 |       13 |        6 |       1 |        7 |       60 |       23 |       14 |       10 |        5 |       0 |      0 |      1 |     57 |     75 |     19 |     15 |      8 |    238 |      0 |      0 |      0 |      4 |     11 |      0 |      0 |      1 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     42 |     19 |      5 |      3 |      1 |    164 |      0 |      1 | s03      | R    |
| 22610000 |    718 |    449 |    144 |     9 |    0 |     98 |    5 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    351 |    367 |      14 |       7 |       0 |       6 |     64 |      7 |      0 |      9 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     19 |      6 |      0 |      4 |      3 |      1 |      0 |      1 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      4 |       10 |       23 |       37 |       47 |       43 |       14 |      21 |       14 |       22 |       47 |       71 |       54 |       18 |      28 |        1 |        6 |       10 |       12 |       26 |       14 |      15 |        0 |        4 |        9 |       11 |       11 |        8 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |        8 |       14 |       21 |       10 |        4 |       1 |       10 |        7 |       15 |       10 |        8 |        2 |       1 |      0 |      5 |     36 |     54 |     25 |     13 |     31 |    285 |      0 |      0 |      0 |      5 |     18 |     15 |     11 |      7 |     88 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     13 |     10 |      3 |      8 |     75 |      0 |      1 | s03      | R    |
| 22620000 |    966 |    689 |     64 |    11 |    0 |    168 |    5 |    1 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    434 |    532 |      16 |       2 |       0 |       8 |     48 |      6 |      0 |     14 |      4 |      1 |      0 |      2 |      4 |      3 |      0 |      0 |     12 |      7 |      0 |     11 |      1 |      0 |      0 |      3 |       2 |       0 |       0 |       0 |      6 |      0 |      0 |      2 |       11 |       32 |       63 |       69 |       46 |       22 |      39 |       15 |       53 |      100 |       80 |       48 |       49 |      62 |        0 |        3 |        8 |        6 |        5 |        2 |       7 |        0 |        3 |        7 |        6 |        3 |        3 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       19 |       33 |       30 |       13 |        7 |       2 |       13 |       17 |       24 |       18 |       10 |        9 |       1 |      0 |      4 |     62 |    107 |     64 |     17 |     36 |    399 |      0 |      0 |      0 |      5 |      5 |      3 |      6 |      2 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     43 |     19 |      7 |      8 |    101 |      0 |      1 | s03      | R    |
| 22630001 |    142 |     87 |     17 |     1 |    0 |     29 |    2 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     60 |     82 |       1 |       0 |       0 |       0 |      5 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      3 |      0 |      6 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        7 |        7 |        8 |        3 |       3 |        3 |        7 |       15 |       11 |        6 |        7 |       6 |        0 |        2 |        3 |        0 |        0 |        1 |       4 |        0 |        0 |        2 |        1 |        1 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        6 |        4 |        4 |        2 |        1 |       1 |        0 |        7 |        5 |        3 |        2 |        1 |       2 |      0 |      0 |      9 |     15 |      6 |      8 |      4 |     45 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      4 |      2 |      1 |     27 |      0 |      1 | s03      | R    |
| 22630002 |    572 |    379 |     99 |     7 |    0 |     81 |    2 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    264 |    308 |       7 |       2 |       0 |       0 |     35 |      4 |      0 |     10 |      0 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |     13 |     14 |      0 |      6 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      2 |      1 |      0 |      2 |        8 |        7 |       34 |       50 |       38 |        7 |      17 |       12 |       24 |       50 |       58 |       42 |       10 |      22 |        0 |        3 |       16 |        6 |       11 |        4 |       8 |        0 |        6 |       12 |        5 |        6 |        8 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       11 |       14 |       15 |        7 |        0 |       0 |        5 |        8 |        8 |       10 |        3 |        4 |       1 |      0 |      2 |     35 |     62 |     22 |      9 |     22 |    227 |      0 |      0 |      0 |     11 |     10 |      6 |      7 |      3 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     16 |      3 |      1 |      5 |     55 |      0 |      1 | s03      | R    |
| 22640001 |    225 |    139 |     29 |     1 |    0 |     44 |    2 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    104 |    121 |       7 |       2 |       0 |       0 |      8 |      2 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       5 |      0 |      0 |      0 |      0 |        1 |        9 |       13 |       13 |       14 |        4 |       2 |        2 |       10 |       17 |       20 |       15 |       11 |       8 |        0 |        2 |        5 |        3 |        1 |        1 |       2 |        0 |        4 |        4 |        2 |        1 |        0 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        8 |        9 |        3 |        9 |        0 |       0 |        2 |        6 |        7 |        4 |        2 |        2 |       0 |      0 |      1 |     14 |     29 |      9 |      0 |     11 |     75 |      0 |      0 |      0 |      0 |      9 |      1 |      1 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     10 |      5 |      1 |      1 |     32 |      0 |      1 | s03      | R    |
| 22640002 |    467 |    281 |    102 |     1 |    0 |     71 |    2 |    0 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    226 |    241 |       9 |       2 |       0 |       3 |     34 |      4 |      0 |      7 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |     13 |      9 |      0 |      5 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      3 |      0 |      1 |        5 |       10 |       24 |       32 |       25 |        4 |      19 |        7 |       17 |       21 |       50 |       35 |        7 |      25 |        3 |       10 |       15 |       10 |       10 |        7 |       9 |        1 |        2 |        8 |       11 |        4 |        7 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |        5 |        7 |        4 |        8 |        5 |       0 |        7 |        6 |       11 |       12 |        4 |        1 |       0 |      0 |      1 |     21 |     36 |     23 |     15 |     21 |    164 |      0 |      0 |      0 |      5 |     14 |     12 |      3 |      6 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     14 |      6 |      1 |      4 |     43 |      0 |      1 | s03      | R    |
| 24400000 |    753 |    430 |    164 |     8 |    0 |    123 |    3 |    0 |    25 |    0 |    0 |    0 |    0 |    0 |    0 |    372 |    381 |      16 |       4 |       0 |       6 |     34 |     12 |      0 |     10 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |     11 |      2 |      0 |      4 |      3 |      3 |      0 |      4 |       1 |       1 |       0 |       1 |      5 |      1 |      0 |      0 |        7 |       21 |       34 |       50 |       45 |       18 |      25 |        9 |       21 |       56 |       58 |       53 |       18 |      15 |        2 |        6 |        9 |       15 |       26 |       21 |       7 |        3 |        9 |        9 |       11 |       16 |       12 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       21 |       28 |       15 |       14 |        2 |       0 |        8 |       14 |       19 |       14 |       13 |        5 |       0 |      0 |      3 |     40 |     63 |     37 |     12 |     17 |    258 |      0 |      0 |      0 |      7 |     25 |     11 |      3 |     10 |    108 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |     23 |     13 |      6 |      1 |     94 |      0 |      1 | s03      | R    |
| 24401000 |    504 |    288 |     98 |     7 |    0 |     91 |    5 |    0 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    235 |    269 |      11 |       1 |       0 |       3 |     24 |      4 |      0 |     12 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      9 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      2 |      2 |      0 |      0 |        2 |       10 |       26 |       30 |       28 |       11 |      14 |       12 |        9 |       47 |       47 |       26 |        9 |      17 |        0 |        7 |        9 |       10 |       10 |        4 |      14 |        2 |        3 |        6 |        5 |        7 |        6 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       10 |       17 |       16 |        9 |        2 |       2 |        4 |        7 |       21 |       13 |        8 |        4 |       1 |      0 |      2 |     26 |     37 |     23 |     12 |     19 |    169 |      0 |      0 |      0 |      6 |     10 |      2 |      5 |      6 |     69 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      8 |     14 |     14 |      2 |      1 |     76 |      0 |      1 | s03      | R    |
| 24410000 |    651 |    402 |    112 |     4 |    0 |    104 |    2 |    0 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    309 |    342 |       8 |       1 |       0 |       2 |     48 |      4 |      0 |     12 |      2 |      4 |      0 |      1 |      2 |      1 |      0 |      0 |     10 |      4 |      0 |      6 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      6 |      1 |      0 |      2 |       11 |       26 |       29 |       46 |       35 |       19 |       8 |       11 |       28 |       46 |       60 |       48 |       12 |      23 |        1 |        3 |       10 |       12 |       15 |       13 |      12 |        0 |        6 |        5 |        3 |        8 |       12 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       12 |       15 |       18 |        9 |        7 |       3 |        5 |       25 |       16 |        6 |        7 |        8 |       1 |      0 |      4 |     42 |     49 |     33 |     13 |     25 |    236 |      0 |      0 |      0 |      5 |     13 |     12 |      5 |      3 |     74 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     12 |     12 |      2 |      5 |     83 |      0 |      1 | s03      | R    |
| 24420000 |    716 |    432 |    106 |     9 |    0 |    138 |    3 |    0 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    341 |    375 |      25 |       3 |       0 |      10 |     48 |      1 |      0 |     11 |      8 |      5 |      0 |      2 |      4 |      1 |      0 |      3 |     10 |      3 |      0 |      7 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      0 |      1 |       10 |       15 |       46 |       47 |       36 |       10 |      20 |       12 |       31 |       53 |       71 |       39 |       10 |      32 |        0 |        3 |       19 |        7 |       13 |        9 |       7 |        3 |        6 |       10 |        8 |        5 |        6 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       17 |       25 |       22 |       17 |        8 |       1 |        7 |       24 |       23 |       13 |        8 |        4 |       0 |      0 |      4 |     48 |     78 |     22 |     19 |     20 |    241 |      0 |      0 |      0 |      8 |     15 |      5 |      7 |      4 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     34 |      9 |      5 |      5 |    105 |      0 |      1 | s03      | R    |
| 24430000 |   1138 |    686 |    205 |     9 |    0 |    207 |    8 |    1 |    22 |    0 |    0 |    0 |    0 |    0 |    0 |    554 |    584 |      22 |       2 |       0 |       5 |     61 |     13 |      0 |     15 |      5 |      0 |      0 |      0 |     11 |      3 |      0 |      3 |     32 |      3 |      0 |     17 |      3 |      0 |      0 |      2 |       1 |       2 |       0 |       1 |      1 |      1 |      0 |      0 |       12 |       35 |       60 |       85 |       75 |       21 |      17 |       16 |       44 |       75 |      126 |       84 |       17 |      19 |        1 |       10 |       21 |       17 |       21 |       23 |      20 |        2 |        3 |       20 |       16 |       15 |       17 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       28 |       36 |       27 |       28 |       10 |       2 |        7 |       29 |       29 |       22 |       16 |        6 |       2 |      0 |     12 |     60 |    129 |     60 |     30 |     44 |    351 |      0 |      0 |      2 |     20 |     19 |      5 |     14 |     10 |    135 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     35 |     44 |     11 |      6 |      6 |    142 |      0 |      1 | s03      | R    |
| 24440000 |    858 |    480 |    150 |    14 |    0 |    187 |    5 |    1 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    395 |    463 |      29 |       3 |       0 |       6 |     48 |     11 |      0 |     13 |      4 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |      7 |      8 |      0 |     20 |      5 |      2 |      0 |      5 |       2 |       0 |       0 |       1 |      7 |      1 |      0 |      2 |        9 |       32 |       44 |       54 |       35 |       23 |      15 |       11 |       46 |       65 |       66 |       36 |       21 |      23 |        2 |       11 |       11 |       14 |       20 |       11 |       5 |        6 |        6 |       10 |       16 |       11 |       10 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       22 |       35 |       12 |       17 |       10 |       2 |       11 |       26 |       35 |       20 |       15 |        9 |       3 |      0 |      2 |     55 |     76 |     28 |     11 |     26 |    282 |      0 |      0 |      0 |     12 |     27 |      9 |      3 |      5 |     94 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     45 |      9 |      5 |      3 |    138 |      0 |      1 | s03      | R    |
| 24450000 |    760 |    427 |    144 |     3 |    0 |    160 |    3 |    0 |    23 |    0 |    0 |    0 |    0 |    0 |    0 |    369 |    391 |      15 |       5 |       0 |       7 |     37 |      6 |      0 |     13 |      1 |      1 |      0 |      2 |      7 |      1 |      0 |      2 |     12 |      5 |      0 |     13 |      5 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      3 |        5 |       21 |       44 |       43 |       39 |       15 |      15 |        8 |       21 |       60 |       48 |       60 |       25 |      23 |        1 |        4 |       18 |       16 |       15 |       15 |      12 |        0 |        6 |       10 |       12 |        6 |       10 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       21 |       27 |       16 |       19 |       11 |       5 |        7 |       16 |       25 |       18 |        9 |        5 |       3 |      0 |      2 |     59 |     72 |     20 |      8 |     24 |    242 |      0 |      0 |      1 |      6 |     18 |     10 |      7 |      3 |     99 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |     26 |     10 |      6 |      4 |    124 |      0 |      1 | s03      | R    |
| 24460000 |    618 |    359 |    140 |     5 |    0 |     96 |    4 |    1 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    290 |    328 |      18 |       2 |       0 |       3 |     34 |      2 |      0 |      9 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      1 |      6 |      3 |      0 |      3 |      1 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      5 |      2 |      0 |      2 |       10 |       12 |       25 |       43 |       39 |       10 |      12 |       15 |       23 |       42 |       69 |       33 |       14 |      12 |        6 |        2 |       10 |       13 |       15 |       12 |      16 |        2 |        6 |       12 |        8 |       14 |        6 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       10 |       18 |       20 |        5 |        4 |       0 |       10 |        5 |       16 |       14 |        5 |        3 |       1 |      0 |      3 |     25 |     68 |     29 |     18 |     21 |    195 |      0 |      0 |      0 |     13 |     19 |      5 |      7 |      6 |     90 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     20 |     21 |      5 |      6 |      4 |     60 |      0 |      1 | s03      | R    |
| 24470001 |    170 |     98 |     34 |     2 |    0 |     27 |    3 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     80 |     90 |       4 |       0 |       0 |       1 |     11 |      1 |      0 |      6 |      2 |      1 |      0 |      0 |      3 |      0 |      0 |      1 |      5 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        3 |        6 |       15 |        6 |        7 |        2 |       3 |        0 |       10 |       17 |       10 |       10 |        6 |       3 |        0 |        2 |        0 |        2 |        4 |        3 |       5 |        0 |        1 |        0 |        3 |        4 |        4 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        3 |        7 |        3 |        4 |        2 |       0 |        2 |        2 |        6 |        1 |        4 |        1 |       0 |      0 |      0 |     16 |     18 |      4 |      5 |      0 |     55 |      0 |      0 |      0 |      1 |      0 |      3 |      1 |      0 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      7 |      1 |      1 |      1 |     22 |      0 |      1 | s03      | R    |
| 24470002 |    648 |    392 |    122 |    13 |    0 |    105 |    1 |    0 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    315 |    333 |      11 |       2 |       0 |       5 |     40 |     12 |      0 |     12 |      4 |      0 |      0 |      2 |      8 |      0 |      0 |      1 |      5 |      4 |      0 |      2 |      2 |      0 |      0 |      1 |       0 |       1 |       0 |       2 |      3 |      0 |      0 |      1 |       14 |       13 |       31 |       37 |       42 |       23 |      13 |        8 |       18 |       46 |       67 |       39 |       21 |      20 |        3 |        3 |        7 |       14 |       18 |       13 |      10 |        0 |        4 |        4 |        6 |       14 |        7 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       12 |       16 |       16 |       11 |        4 |       2 |       12 |       13 |       10 |       12 |        9 |        4 |       0 |      0 |      1 |     36 |     60 |     25 |     19 |     13 |    238 |      0 |      0 |      3 |      8 |     11 |      7 |      4 |      8 |     81 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     13 |     10 |      6 |      2 |     90 |      0 |      1 | s03      | R    |
| 24480001 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 24480002 |    782 |    457 |    164 |    13 |    0 |    121 |    2 |    0 |    25 |    0 |    0 |    0 |    0 |    0 |    0 |    369 |    413 |      10 |       1 |       0 |       6 |     60 |     10 |      0 |     11 |      0 |      1 |      0 |      0 |      8 |      4 |      0 |      4 |     10 |      3 |      0 |      2 |      4 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      4 |       11 |       14 |       27 |       56 |       52 |       18 |      19 |       12 |       19 |       59 |       74 |       47 |       22 |      27 |        2 |        6 |       11 |       18 |       18 |       17 |      15 |        2 |        6 |       10 |       13 |       12 |       16 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       10 |       22 |       27 |       15 |        3 |       1 |        2 |       14 |       24 |       20 |        8 |        8 |       0 |      0 |      1 |     52 |     74 |     30 |     22 |     28 |    250 |      0 |      0 |      0 |     12 |     23 |      6 |      6 |      8 |    109 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |     19 |     20 |      6 |      6 |     88 |      0 |      1 | s03      | R    |
| 24490001 |    613 |    351 |    114 |     7 |    0 |    114 |    4 |    1 |    22 |    0 |    0 |    0 |    0 |    0 |    0 |    281 |    332 |      25 |       2 |       0 |       7 |     33 |      3 |      0 |      8 |      4 |      0 |      0 |      0 |      9 |      3 |      0 |      0 |     10 |      1 |      0 |      3 |      3 |      0 |      0 |      1 |       1 |       0 |       0 |       2 |      2 |      0 |      0 |      0 |        7 |       10 |       28 |       34 |       36 |       19 |      13 |        8 |       21 |       45 |       60 |       33 |       20 |      17 |        0 |        6 |       15 |        9 |        6 |       11 |      13 |        1 |        2 |        6 |        5 |        9 |       12 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       16 |       24 |       15 |        8 |        5 |       0 |       11 |       14 |       17 |       19 |        8 |        5 |       0 |      0 |      3 |     31 |     57 |     27 |     16 |     15 |    202 |      0 |      0 |      1 |      7 |     10 |      2 |      1 |      7 |     86 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     23 |     28 |     17 |      0 |      3 |     76 |      0 |      1 | s03      | R    |
| 24490002 |     50 |     31 |      8 |     2 |    0 |      9 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     26 |     24 |       1 |       1 |       0 |       0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      5 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        3 |        5 |        6 |        2 |        1 |       0 |        0 |        1 |        2 |        4 |        4 |        3 |       0 |        0 |        1 |        0 |        0 |        1 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        2 |       1 |        0 |        2 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |      1 |      9 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 24500001 |    705 |    465 |    124 |     5 |    0 |    100 |    2 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    340 |    365 |      20 |       0 |       0 |       2 |     55 |      9 |      0 |     13 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     18 |      4 |      0 |      1 |      1 |      0 |      0 |      1 |       0 |       2 |       0 |       0 |      3 |      0 |      0 |      2 |        8 |       12 |       37 |       72 |       37 |       13 |      23 |       13 |       22 |       64 |       82 |       39 |       21 |      22 |        5 |        4 |       11 |       11 |       13 |       13 |      16 |        1 |        3 |        3 |        6 |       12 |       11 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       11 |       20 |       12 |       11 |        9 |       0 |        5 |       13 |        7 |        6 |       14 |        6 |       0 |      0 |      2 |     49 |     79 |     46 |     14 |     18 |    257 |      0 |      0 |      0 |      8 |     15 |      4 |      6 |      4 |     87 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     14 |      8 |      3 |      2 |     73 |      0 |      1 | s03      | R    |
| 24500002 |     16 |      9 |      3 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |      9 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       1 |        1 |        2 |        0 |        1 |        0 |        0 |       2 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 24510001 |    787 |    490 |    113 |     9 |    0 |    140 |    4 |    1 |    30 |    0 |    0 |    0 |    0 |    0 |    0 |    368 |    419 |      26 |       0 |       0 |       5 |     46 |      4 |      0 |      9 |      0 |      0 |      0 |      0 |      6 |      4 |      0 |      2 |     15 |      2 |      0 |      8 |      1 |      0 |      0 |      0 |       4 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        8 |       19 |       38 |       59 |       49 |       23 |      16 |       12 |       28 |       54 |       80 |       58 |       24 |      22 |        1 |        4 |       11 |        8 |       10 |        6 |      15 |        1 |        4 |       11 |        8 |       12 |        7 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       21 |       30 |       22 |       13 |        4 |       0 |        6 |       16 |       23 |       19 |       16 |        3 |       0 |      0 |      2 |     40 |     75 |     48 |     21 |     26 |    278 |      0 |      0 |      0 |      5 |     10 |     12 |      6 |      4 |     76 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     30 |     30 |     13 |      5 |      7 |     96 |      0 |      1 | s03      | R    |
| 24510002 |      2 |      1 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 24520000 |    569 |    318 |    155 |     9 |    0 |     69 |    5 |    1 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    256 |    313 |      20 |       1 |       0 |       4 |     34 |     12 |      0 |      3 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      2 |     15 |      4 |      0 |      5 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      6 |      0 |      0 |      0 |        4 |       15 |       28 |       26 |       30 |       10 |      23 |       10 |       21 |       37 |       40 |       42 |       14 |      18 |        2 |        7 |       11 |       11 |       13 |       20 |      10 |        1 |        5 |       11 |       11 |       14 |       20 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       10 |       12 |        4 |        5 |        7 |       1 |        7 |       10 |       12 |       12 |        6 |        2 |       1 |      0 |      2 |     33 |     57 |     20 |      6 |     13 |    187 |      0 |      0 |      0 |      7 |     22 |     10 |      9 |      4 |    103 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |      9 |      4 |      4 |      2 |     56 |      0 |      1 | s03      | R    |
| 24530000 |    648 |    342 |    143 |    15 |    0 |    134 |    6 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    330 |    318 |       7 |       1 |       0 |       3 |     53 |      8 |      0 |     11 |      2 |      0 |      0 |      2 |      6 |      0 |      0 |      2 |      9 |      6 |      0 |      4 |      1 |      0 |      0 |      3 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        9 |       10 |       28 |       42 |       38 |       18 |      12 |        8 |       12 |       36 |       52 |       41 |       18 |      18 |        1 |        6 |        7 |       16 |       18 |       15 |      15 |        1 |        2 |        8 |        7 |       14 |       13 |      20 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       13 |       22 |       27 |       14 |        7 |       0 |        8 |       13 |       15 |       14 |        9 |        8 |       1 |      0 |      0 |     33 |     54 |     40 |     14 |     17 |    184 |      0 |      0 |      0 |     11 |     21 |     14 |      5 |      9 |     83 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     26 |     24 |     13 |      6 |      3 |     91 |      0 |      1 | s03      | R    |
| 26010001 |     15 |      5 |      0 |     0 |    0 |      9 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |     10 |       1 |       0 |       0 |       2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      0 |      1 | s03      | R    |
| 26010002 |    289 |    139 |     32 |     1 |    0 |     87 |    2 |    0 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    131 |    158 |      33 |       1 |       0 |      13 |      4 |      3 |      0 |      9 |      1 |      1 |      0 |      1 |      2 |      0 |      0 |      1 |      4 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        6 |       30 |       21 |        4 |        2 |        0 |       0 |       14 |       36 |       17 |        6 |        3 |        0 |       0 |        4 |       11 |        2 |        0 |        0 |        0 |       0 |        5 |        9 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       37 |        8 |        0 |        0 |        0 |       0 |       12 |       38 |       14 |        2 |        1 |        0 |       0 |      0 |      1 |     11 |     11 |      4 |      0 |      0 |    112 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      6 |      0 |      2 |      0 |    104 |      0 |      1 | s03      | R    |
| 26030001 |    302 |    182 |     19 |     5 |    0 |     77 |    2 |    0 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    122 |    180 |       7 |       2 |       0 |       3 |      5 |      1 |      0 |      6 |      0 |      0 |      0 |      3 |      2 |      2 |      0 |      1 |     15 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      3 |      2 |      0 |      0 |        2 |       15 |       18 |       16 |        7 |        4 |       8 |        2 |       24 |       19 |       32 |       14 |       10 |      11 |        0 |        1 |        2 |        0 |        1 |        1 |       2 |        0 |        1 |        1 |        1 |        0 |        2 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       11 |       10 |       12 |        4 |        2 |       0 |        6 |       22 |       13 |        8 |        5 |        2 |       0 |      0 |      0 |     18 |     43 |     16 |      6 |      5 |     94 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     13 |      2 |      3 |      3 |     66 |      0 |      1 | s03      | R    |
| 26030002 |    295 |    144 |     39 |     1 |    0 |     88 |    2 |    0 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    134 |    161 |      13 |       4 |       0 |      20 |      7 |      3 |      0 |      6 |      4 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        5 |       32 |       14 |        4 |        0 |        0 |       0 |        9 |       55 |       19 |        1 |        4 |        1 |       0 |        2 |       17 |        2 |        1 |        0 |        0 |       0 |        3 |       12 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       40 |        8 |        3 |        1 |        1 |       0 |        9 |       35 |       10 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |    140 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |      0 |    103 |      0 |      1 | s03      | R    |
| 26040000 |    656 |    377 |     77 |     5 |    0 |    156 |    9 |    1 |    31 |    0 |    0 |    0 |    0 |    0 |    0 |    295 |    361 |      25 |       2 |       0 |      11 |     25 |      2 |      0 |     14 |      3 |      1 |      0 |      4 |      7 |      1 |      0 |      4 |     13 |      7 |      0 |     23 |      5 |      0 |      0 |      3 |       2 |       4 |       0 |       2 |      3 |      0 |      0 |      1 |        9 |       30 |       21 |       47 |       26 |       10 |       7 |       11 |       52 |       40 |       58 |       33 |       16 |      17 |        4 |       10 |        9 |        5 |        7 |        4 |       3 |        3 |        7 |        3 |        2 |        8 |        8 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       32 |       23 |       20 |        9 |        5 |       1 |       13 |       31 |       19 |       22 |       11 |        2 |       1 |      0 |      2 |     59 |     57 |     35 |     13 |     13 |    198 |      0 |      0 |      0 |      8 |      9 |      3 |      2 |      7 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     30 |     32 |     12 |      2 |      3 |    122 |      0 |      1 | s03      | R    |
| 26060001 |    735 |    422 |     90 |     8 |    0 |    171 |    3 |    0 |    41 |    0 |    0 |    0 |    0 |    0 |    0 |    334 |    401 |      35 |       4 |       0 |      10 |     34 |      3 |      0 |     10 |      3 |      2 |      0 |      3 |      5 |      4 |      0 |      0 |     19 |      6 |      0 |     41 |      2 |      0 |      0 |      2 |       2 |       0 |       0 |       4 |      7 |      1 |      0 |      1 |       12 |       25 |       24 |       35 |       31 |       17 |      20 |       13 |       48 |       51 |       60 |       41 |       15 |      30 |        1 |       12 |        4 |        6 |        8 |       11 |      11 |        0 |        2 |        5 |        7 |        2 |       12 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       36 |       22 |       26 |        9 |        6 |       1 |       18 |       30 |       20 |       17 |       13 |        7 |       1 |      0 |      3 |     52 |     70 |     23 |     13 |      9 |    252 |      0 |      0 |      0 |      3 |      9 |      9 |      9 |      0 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     31 |     23 |     10 |      4 |      2 |    151 |      0 |      1 | s03      | R    |
| 26061000 |    723 |    386 |    101 |    14 |    0 |    197 |    6 |    0 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    343 |    380 |      22 |       4 |       0 |      11 |     14 |      5 |      0 |      5 |     11 |      1 |      0 |      8 |     12 |      1 |      0 |      3 |     51 |     20 |      0 |     55 |      4 |      0 |      0 |      3 |       4 |       1 |       0 |       4 |      1 |      1 |      0 |      5 |       12 |       24 |       23 |       33 |       29 |       39 |       1 |       17 |       34 |       33 |       46 |       43 |       49 |       3 |        0 |       13 |        9 |        5 |        9 |       18 |       1 |        3 |        7 |        3 |        2 |       12 |       16 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       30 |       24 |       20 |       15 |       19 |       1 |       18 |       24 |       19 |       19 |       15 |       14 |       0 |      0 |      4 |     58 |     47 |     28 |     16 |     16 |    217 |      0 |      0 |      1 |      7 |     16 |     11 |      4 |      3 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     30 |     27 |     12 |      3 |      5 |    157 |      0 |      1 | s03      | R    |
| 26080000 |    762 |    425 |     92 |    12 |    0 |    170 |    3 |    2 |    58 |    0 |    0 |    0 |    0 |    0 |    0 |    349 |    413 |      40 |       3 |       0 |      12 |     34 |      4 |      0 |     17 |      5 |      0 |      0 |      1 |      6 |      1 |      0 |      3 |     20 |     14 |      0 |     36 |      2 |      2 |      0 |      0 |       2 |       2 |       0 |       2 |      7 |      0 |      0 |      3 |       13 |       34 |       37 |       44 |       23 |       23 |      14 |       19 |       46 |       50 |       44 |       33 |       26 |      19 |        2 |        7 |        6 |        7 |        4 |        9 |       4 |        2 |        4 |        8 |        6 |        9 |       17 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       24 |       25 |       23 |       24 |       12 |       13 |       1 |       18 |       26 |       22 |       32 |       13 |       12 |       0 |      0 |      4 |     36 |     58 |     35 |     12 |     11 |    269 |      0 |      0 |      0 |      7 |     16 |      4 |      3 |      3 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     32 |     28 |      7 |     11 |      4 |    160 |      0 |      1 | s03      | R    |
| 26090001 |    748 |    466 |     96 |     2 |    0 |    137 |    2 |    1 |    44 |    0 |    0 |    0 |    0 |    0 |    0 |    330 |    418 |      19 |       5 |       0 |       6 |     49 |      8 |      0 |     13 |      1 |      1 |      0 |      4 |     11 |      1 |      0 |      3 |     22 |     10 |      0 |     22 |      2 |      0 |      0 |      0 |       4 |       2 |       0 |       1 |      4 |      1 |      0 |      0 |       10 |       20 |       37 |       59 |       25 |       18 |      14 |        8 |       24 |       66 |       84 |       54 |       23 |      24 |        4 |        4 |        7 |       10 |        7 |        6 |       8 |        1 |        3 |        3 |       11 |       10 |        9 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       18 |       23 |       25 |       15 |        4 |       2 |       13 |       12 |       23 |       26 |        5 |        5 |       1 |      0 |      1 |     48 |     71 |     50 |     33 |     17 |    246 |      0 |      0 |      0 |      5 |     10 |     10 |      7 |      7 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     33 |     15 |      9 |      2 |    104 |      0 |      1 | s03      | R    |
| 26090002 |     40 |     28 |      3 |     1 |    0 |      5 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     18 |     22 |       3 |       0 |       0 |       1 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        2 |        1 |        3 |        2 |        0 |       1 |        1 |        0 |        6 |        4 |        0 |        4 |       2 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        0 |        1 |       0 |        2 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      2 |      1 |      0 |      1 |     20 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      7 |      0 |      1 | s03      | R    |
| 26100001 |    792 |    526 |     90 |     6 |    0 |    126 |    4 |    2 |    38 |    0 |    0 |    0 |    0 |    0 |    0 |    354 |    438 |      25 |       2 |       0 |       5 |     31 |      2 |      0 |     14 |      0 |      0 |      0 |      0 |     17 |      0 |      0 |      2 |     13 |      6 |      0 |     19 |      7 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      1 |       13 |       22 |       44 |       66 |       41 |       23 |      21 |       22 |       25 |       59 |       79 |       55 |       30 |      26 |        2 |        5 |        3 |        9 |        6 |        3 |      12 |        1 |        8 |        3 |        8 |        4 |        6 |      20 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       16 |       21 |       20 |       11 |        7 |       1 |       16 |       22 |       15 |       18 |       14 |        6 |       1 |      0 |      6 |     62 |     86 |     51 |     23 |     36 |    262 |      0 |      0 |      0 |      4 |     14 |      4 |      2 |      2 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     25 |     23 |     13 |      8 |      3 |    101 |      0 |      1 | s03      | R    |
| 26100002 |     17 |     13 |      0 |     0 |    0 |      3 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      8 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        1 |        2 |        0 |       1 |        0 |        0 |        0 |        4 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 26130001 |    823 |    516 |     64 |     5 |    0 |    180 |    5 |    1 |    52 |    0 |    0 |    0 |    0 |    0 |    0 |    361 |    462 |      30 |       3 |       0 |      12 |     35 |      6 |      0 |     23 |      5 |      0 |      0 |      3 |     10 |      1 |      0 |      3 |     13 |      3 |      0 |     16 |      1 |      0 |      0 |      2 |       3 |       0 |       0 |       2 |      8 |      0 |      0 |      2 |        8 |       41 |       39 |       46 |       41 |       16 |      21 |       21 |       63 |       51 |       81 |       33 |       30 |      25 |        1 |        8 |        7 |       10 |        1 |        4 |       4 |        0 |        6 |        1 |        6 |        5 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |       34 |       24 |       20 |        8 |        3 |       2 |       18 |       42 |       22 |       25 |       10 |        9 |       3 |      0 |      4 |     53 |     76 |     38 |     19 |     18 |    308 |      0 |      0 |      0 |      8 |      6 |      3 |      2 |      4 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     34 |     23 |     10 |      5 |      3 |    165 |      0 |      1 | s03      | R    |
| 26130002 |     24 |     14 |      4 |     0 |    0 |      3 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |     10 |       2 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        4 |        1 |        0 |        0 |       0 |        0 |        4 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 26140000 |    649 |    410 |     46 |     6 |    0 |    143 |    3 |    2 |    39 |    0 |    0 |    0 |    0 |    0 |    0 |    288 |    361 |      26 |       0 |       0 |      11 |     29 |      1 |      0 |     10 |      0 |      1 |      0 |      2 |      6 |      0 |      0 |      2 |     18 |      9 |      0 |     16 |      2 |      0 |      0 |      4 |       2 |       1 |       0 |       3 |      3 |      0 |      0 |      3 |        9 |       23 |       44 |       40 |       27 |       17 |      16 |       11 |       37 |       47 |       55 |       43 |       22 |      19 |        0 |        9 |        5 |        3 |        3 |        4 |       2 |        2 |        3 |        2 |        3 |        3 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       28 |       17 |       18 |       10 |        4 |       0 |       19 |       23 |       23 |       27 |       11 |        4 |       0 |      0 |      4 |     45 |     82 |     26 |     13 |     10 |    230 |      0 |      0 |      0 |      0 |     11 |      5 |      0 |      0 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     39 |     33 |      6 |      3 |      0 |    112 |      0 |      1 | s03      | R    |
| 26160001 |    104 |     68 |     12 |     0 |    0 |     22 |    1 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     46 |     58 |       3 |       0 |       0 |       1 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        3 |        8 |        8 |        4 |        0 |       2 |        0 |        8 |        7 |       14 |        4 |        4 |       4 |        1 |        0 |        0 |        1 |        0 |        0 |       3 |        0 |        0 |        1 |        2 |        2 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        5 |        1 |        4 |        0 |        1 |       0 |        4 |        1 |        2 |        1 |        1 |        1 |       0 |      0 |      0 |      4 |     19 |      7 |      0 |      1 |     37 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      3 |      0 |      1 |     12 |      0 |      1 | s03      | R    |
| 26160002 |    683 |    433 |     57 |     6 |    0 |    129 |    8 |    0 |    50 |    0 |    0 |    0 |    0 |    0 |    0 |    304 |    379 |      19 |       4 |       0 |       8 |     38 |      3 |      0 |     20 |      1 |      1 |      0 |      1 |     13 |      2 |      0 |      5 |     17 |      2 |      0 |     11 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       1 |      9 |      0 |      0 |      3 |       13 |       24 |       34 |       42 |       17 |       14 |      23 |       14 |       35 |       55 |       68 |       34 |       23 |      37 |        2 |        5 |        4 |        7 |        3 |        3 |       6 |        1 |        2 |        7 |        6 |        4 |        1 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       33 |       16 |       22 |       16 |        5 |       2 |       14 |       24 |       15 |       17 |       11 |        4 |       1 |      0 |      1 |     42 |     72 |     24 |     16 |     19 |    259 |      0 |      0 |      0 |      4 |      4 |      6 |      1 |      5 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     27 |     15 |     12 |      7 |      5 |    126 |      0 |      1 | s03      | R    |
| 26170001 |    642 |    446 |     62 |     5 |    0 |    102 |    0 |    0 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    277 |    365 |      27 |       2 |       0 |      11 |     39 |      1 |      0 |      6 |      1 |      1 |      0 |      0 |     15 |      3 |      0 |      2 |     16 |      1 |      0 |     14 |      2 |      2 |      0 |      1 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      0 |       11 |       21 |       28 |       47 |       38 |       15 |      14 |       13 |       40 |       39 |       83 |       36 |       34 |      27 |        3 |        4 |        6 |        4 |        3 |        5 |       8 |        1 |        2 |        5 |        3 |        6 |        4 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       17 |       13 |       18 |       12 |        2 |       2 |        7 |       20 |       13 |       14 |        4 |        4 |       2 |      0 |      3 |     38 |     59 |     37 |     16 |     19 |    274 |      0 |      0 |      0 |      4 |      8 |      5 |      0 |      1 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     18 |      7 |      6 |      3 |     85 |      0 |      1 | s03      | R    |
| 26170002 |      7 |      4 |      0 |     0 |    0 |      2 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      1 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 26200000 |    817 |    601 |     59 |     5 |    0 |    113 |    6 |    1 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    339 |    478 |      25 |       0 |       0 |      11 |     76 |      3 |      0 |     14 |      3 |      0 |      0 |      0 |     18 |      0 |      0 |      2 |     10 |      5 |      0 |      8 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      2 |       10 |       21 |       41 |       65 |       49 |       14 |      24 |       34 |       42 |       75 |      100 |       51 |       28 |      47 |        1 |        6 |        3 |        7 |        4 |        4 |      11 |        0 |        2 |        2 |        3 |        4 |        4 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |        9 |       20 |       23 |       11 |        4 |       0 |        9 |       13 |       17 |       22 |       14 |        3 |       0 |      0 |      1 |     65 |     92 |     46 |     22 |     33 |    342 |      0 |      0 |      0 |      4 |      2 |      1 |      3 |      0 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     29 |     30 |     12 |      7 |      1 |     78 |      0 |      1 | s03      | R    |
| 26210001 |    473 |    321 |     46 |     3 |    0 |     71 |    1 |    1 |    30 |    0 |    0 |    0 |    0 |    0 |    0 |    209 |    264 |       8 |       0 |       0 |       4 |     44 |      1 |      0 |      6 |      1 |      0 |      0 |      0 |     10 |      1 |      0 |      0 |      8 |      5 |      0 |      8 |      3 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |       11 |       15 |       13 |       33 |       38 |       12 |      17 |       11 |       18 |       35 |       46 |       42 |       15 |      15 |        2 |        0 |        5 |        4 |        5 |        3 |       5 |        1 |        0 |        1 |        5 |        0 |        5 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        8 |        3 |       12 |        7 |        6 |       4 |       12 |       12 |        6 |       14 |        8 |        6 |       2 |      0 |      3 |     31 |     51 |     30 |     14 |      5 |    187 |      0 |      0 |      0 |      2 |      5 |      4 |      3 |      6 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |     12 |      8 |      2 |      1 |     72 |      0 |      1 | s03      | R    |
| 26210002 |    202 |    149 |     19 |     0 |    0 |     27 |    2 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     87 |    115 |       1 |       1 |       0 |       2 |     13 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        5 |        3 |        6 |       16 |       10 |        9 |       8 |        6 |       10 |       15 |       27 |       16 |        4 |      14 |        1 |        1 |        0 |        2 |        3 |        1 |       3 |        0 |        0 |        1 |        1 |        0 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        3 |        4 |        3 |        2 |        2 |       0 |        0 |        2 |        5 |        4 |        1 |        2 |       1 |      0 |      0 |      9 |     25 |     16 |      4 |      7 |     88 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      2 |      3 |      2 |      0 |     21 |      0 |      1 | s03      | R    |
| 28010000 |    770 |    469 |    125 |    10 |    0 |    136 |    2 |    1 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    360 |    410 |      17 |       1 |       0 |      10 |     54 |      4 |      0 |     16 |      0 |      1 |      0 |      1 |      4 |      0 |      0 |      1 |     28 |     11 |      0 |     31 |      2 |      1 |      0 |      2 |       4 |       1 |       0 |       2 |      0 |      0 |      0 |      2 |       27 |        7 |       32 |       72 |       38 |       12 |      14 |       17 |       23 |       55 |       89 |       48 |       10 |      25 |        2 |        6 |        8 |       15 |       12 |        7 |      11 |        0 |        7 |        6 |       14 |       15 |        8 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       22 |       14 |       14 |       28 |       14 |        4 |       1 |       11 |       10 |       12 |       24 |       11 |       10 |       1 |      0 |      2 |     38 |     61 |     44 |     19 |     31 |    274 |      0 |      0 |      1 |      8 |     12 |     11 |      5 |     14 |     74 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     35 |     21 |     11 |      9 |      4 |     92 |      0 |      1 | s03      | R    |
| 28030001 |     92 |     44 |     27 |     0 |    0 |     20 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     49 |     43 |       4 |       0 |       0 |       0 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        1 |        2 |        7 |        3 |        6 |       1 |        0 |        2 |        5 |       11 |        2 |        2 |       2 |        2 |        1 |        2 |        2 |        3 |        5 |       2 |        1 |        0 |        1 |        0 |        2 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        5 |        3 |        0 |       1 |        1 |        2 |        1 |        3 |        2 |        0 |       0 |      0 |      0 |      5 |      6 |      6 |      2 |      1 |     24 |      0 |      0 |      2 |      2 |      2 |      0 |      1 |      2 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      4 |      1 |      1 |      9 |      0 |      1 | s03      | R    |
| 28030002 |    242 |    135 |     60 |     2 |    0 |     35 |    1 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    113 |    129 |       2 |       2 |       0 |       0 |     16 |      2 |      0 |      5 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      4 |      0 |      2 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |       11 |        5 |        9 |       17 |       13 |        4 |       3 |        9 |        2 |       17 |       23 |       11 |        5 |       6 |        1 |        1 |        3 |        6 |        4 |        7 |       9 |        2 |        1 |        6 |        7 |        4 |        2 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        1 |        4 |        4 |        2 |        0 |       1 |       10 |        3 |        5 |        8 |        0 |        1 |       0 |      0 |      0 |     10 |     20 |      9 |      3 |      7 |     86 |      0 |      0 |      0 |      3 |      3 |      6 |      3 |      4 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      6 |      1 |      0 |      1 |     36 |      0 |      1 | s03      | R    |
| 28030003 |    402 |    201 |    110 |     2 |    0 |     78 |    1 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    186 |    216 |       2 |       1 |       0 |       0 |     22 |      6 |      0 |      6 |      0 |      2 |      0 |      1 |      3 |      0 |      0 |      0 |      9 |      6 |      0 |     11 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        8 |        6 |        7 |       33 |       17 |        5 |       5 |       10 |       11 |       19 |       33 |       26 |       10 |      11 |        2 |        3 |        7 |       14 |        9 |       10 |       6 |        1 |        4 |        9 |       18 |        8 |        6 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        6 |       12 |       17 |        6 |        3 |       1 |        6 |        6 |       12 |        7 |        3 |        2 |       1 |      0 |      3 |     14 |     35 |     19 |      7 |      9 |    114 |      0 |      0 |      1 |      6 |     19 |     16 |      3 |      7 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      8 |      7 |      3 |      5 |     56 |      0 |      1 | s03      | R    |
| 28040000 |    624 |    336 |    174 |     6 |    0 |     91 |    1 |    1 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    280 |    344 |       8 |       5 |       0 |       6 |     41 |      8 |      0 |      5 |      2 |      1 |      0 |      5 |      3 |      0 |      0 |      4 |     17 |      4 |      0 |      8 |      2 |      1 |      0 |      3 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |       17 |        3 |       26 |       45 |       27 |        8 |      12 |       16 |        5 |       36 |       75 |       38 |        9 |      19 |        4 |        3 |       16 |       23 |       10 |        9 |      18 |        2 |        6 |       18 |       18 |       11 |        8 |      28 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |        7 |       11 |       16 |        8 |        2 |       2 |       17 |        8 |        8 |       15 |        2 |        3 |       2 |      0 |      2 |     32 |     40 |     41 |     20 |     15 |    186 |      0 |      0 |      1 |     14 |     26 |     11 |      9 |      8 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |     18 |      6 |      4 |      5 |     71 |      0 |      1 | s03      | R    |
| 28050001 |    328 |    125 |    139 |     5 |    0 |     54 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    158 |    170 |       5 |       3 |       0 |       0 |     16 |      7 |      0 |      6 |      1 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |      6 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        9 |        5 |        8 |       14 |       13 |        3 |       2 |        9 |        5 |       12 |       19 |       13 |        7 |       6 |        5 |        4 |        9 |        8 |       14 |       11 |      14 |        3 |        5 |       13 |        7 |       15 |       11 |      20 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        2 |        7 |       11 |       10 |        2 |       0 |        6 |        6 |        3 |        6 |        3 |        1 |       0 |      0 |      0 |      8 |     15 |     11 |      7 |      5 |     79 |      0 |      0 |      0 |      6 |     18 |      3 |      8 |     10 |     94 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     10 |      4 |      1 |      2 |     38 |      0 |      1 | s03      | R    |
| 28050002 |    410 |    203 |    126 |     5 |    0 |     72 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    194 |    216 |       2 |       1 |       0 |       1 |     25 |      7 |      0 |      7 |      1 |      1 |      0 |      3 |      2 |      0 |      0 |      0 |     11 |      4 |      0 |     11 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        9 |        5 |       15 |       21 |       20 |        6 |       5 |        9 |       10 |       17 |       48 |       26 |        1 |      11 |        8 |        2 |        8 |       17 |       16 |        4 |      10 |        2 |        0 |        9 |       11 |       11 |        8 |      20 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       10 |        4 |       11 |        9 |        2 |       2 |        9 |        4 |        7 |        5 |        5 |        2 |       1 |      0 |      2 |     20 |     29 |     20 |     13 |     20 |     99 |      0 |      0 |      0 |      9 |     11 |     11 |      2 |      5 |     88 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     17 |      7 |      2 |      4 |     38 |      0 |      1 | s03      | R    |
| 28070000 |    731 |    342 |    242 |     9 |    0 |    128 |    1 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    349 |    382 |       9 |       1 |       0 |       2 |     40 |     16 |      0 |     10 |      1 |      2 |      0 |      4 |      6 |      4 |      0 |      3 |     28 |     15 |      0 |     25 |      1 |      1 |      0 |      3 |       4 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       18 |        8 |       14 |       52 |       39 |       16 |       8 |       13 |       20 |       24 |       63 |       43 |       10 |      14 |        3 |        9 |       21 |       20 |       26 |       21 |      24 |        7 |        4 |       14 |       25 |       21 |       22 |      25 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        8 |       12 |       22 |       13 |        4 |       1 |       17 |        9 |       14 |       23 |        9 |        4 |       1 |      0 |      3 |     26 |     54 |     35 |     19 |     25 |    180 |      0 |      0 |      1 |     11 |     34 |     16 |      8 |     12 |    160 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     13 |     25 |      6 |      2 |      5 |     93 |      0 |      1 | s03      | R    |
| 28080000 |    736 |    293 |    307 |     9 |    0 |    114 |    4 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    354 |    382 |       0 |       7 |       0 |       2 |     56 |     24 |      0 |     16 |      4 |      5 |      0 |      3 |      2 |      0 |      0 |      1 |     24 |      8 |      0 |     20 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       2 |      0 |      0 |      0 |      0 |       13 |        6 |       19 |       34 |       26 |       14 |      12 |       22 |       11 |       23 |       51 |       33 |       14 |      15 |        8 |        9 |       25 |       23 |       29 |       37 |      34 |        3 |        8 |       15 |       20 |       28 |       30 |      38 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |        9 |        9 |       11 |       14 |        6 |       1 |       16 |       12 |       18 |       16 |        7 |        2 |       0 |      0 |      1 |     27 |     43 |     31 |     12 |      7 |    172 |      0 |      0 |      1 |     16 |     33 |     20 |     13 |     27 |    197 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |     25 |      7 |      3 |      3 |     76 |      0 |      1 | s03      | R    |
| 28100001 |     83 |     40 |     24 |     0 |    0 |     19 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     40 |     43 |       2 |       0 |       0 |       0 |      3 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      6 |      0 |      9 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        1 |        1 |        6 |        6 |        0 |       0 |        1 |        2 |        3 |        8 |        6 |        1 |       1 |        1 |        0 |        1 |        2 |        3 |        3 |       3 |        1 |        0 |        3 |        0 |        3 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        4 |        0 |        2 |       0 |        3 |        0 |        2 |        4 |        0 |        1 |       0 |      0 |      0 |      4 |      8 |      2 |      2 |      1 |     23 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      5 |      0 |     11 |      0 |      1 | s03      | R    |
| 28100002 |    598 |    278 |    219 |     1 |    0 |     91 |    2 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    271 |    327 |       4 |       5 |       0 |       5 |     49 |     12 |      0 |     10 |      3 |      1 |      0 |      1 |      9 |      1 |      0 |      1 |     15 |     10 |      0 |     15 |      4 |      0 |      0 |      1 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        6 |        4 |        8 |       33 |       30 |       17 |      10 |       23 |       15 |       23 |       52 |       33 |       14 |      10 |        5 |        6 |       10 |       18 |       19 |       27 |      20 |        3 |        4 |       13 |       18 |       19 |       24 |      33 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |        7 |       11 |       13 |       10 |        2 |       1 |       12 |        3 |       13 |        7 |        5 |        3 |       0 |      0 |      1 |     32 |     53 |     24 |     11 |     15 |    142 |      0 |      0 |      0 |     14 |     23 |     14 |      8 |     14 |    146 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      9 |     20 |      9 |      4 |      4 |     52 |      0 |      1 | s03      | R    |
| 28100003 |      9 |      3 |      2 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 28120001 |    280 |    107 |    127 |     3 |    0 |     40 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    136 |    144 |       0 |       0 |       0 |       0 |     15 |      2 |      0 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      7 |      5 |      0 |      5 |      1 |      1 |      0 |      4 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        7 |        4 |       13 |       10 |        9 |       2 |        8 |        3 |        4 |       23 |       14 |        4 |       3 |        1 |        1 |       11 |        9 |       10 |       18 |      12 |        1 |        1 |       12 |       12 |        6 |       16 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        2 |        1 |        5 |        6 |        4 |       1 |        7 |        2 |        0 |        5 |        3 |        3 |       0 |      0 |      1 |      9 |     17 |     15 |      5 |      6 |     54 |      0 |      0 |      0 |      8 |     15 |      5 |      6 |      5 |     88 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      5 |      1 |      2 |      2 |     29 |      0 |      1 | s03      | R    |
| 28120002 |    321 |    138 |    136 |     0 |    0 |     45 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    154 |    167 |       2 |       0 |       0 |       0 |     35 |      9 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |     10 |     11 |      0 |      4 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        3 |        8 |       17 |       13 |       13 |       6 |        9 |        2 |       12 |       26 |       10 |        8 |       5 |        2 |        2 |        4 |       17 |       11 |       16 |       9 |        3 |        4 |       10 |       17 |       15 |       15 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        4 |        3 |        8 |        6 |        2 |       0 |        4 |        1 |        1 |        6 |        3 |        3 |       2 |      0 |      2 |     16 |     22 |     12 |      6 |      6 |     74 |      0 |      0 |      0 |      3 |     18 |     11 |      6 |      8 |     90 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      6 |      4 |      0 |      1 |     29 |      0 |      1 | s03      | R    |
| 28130001 |     15 |      3 |      9 |     0 |    0 |      2 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 | s03      | R    |
| 28130002 |    574 |    231 |    240 |     6 |    0 |     88 |    1 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    259 |    315 |       6 |       0 |       0 |       2 |     31 |     11 |      0 |      5 |      1 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |      6 |      4 |      0 |     11 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        5 |       11 |       20 |       30 |        9 |       7 |       17 |        9 |       23 |       46 |       29 |        8 |      12 |        4 |        4 |       20 |       21 |       24 |       21 |      20 |        7 |        5 |       20 |       17 |       26 |       21 |      30 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |        8 |       10 |       18 |        7 |        3 |       0 |        8 |        7 |       13 |        8 |        3 |        6 |       0 |      0 |      0 |     21 |     32 |     27 |      9 |     21 |    121 |      0 |      0 |      1 |     14 |     40 |     13 |     12 |     10 |    150 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     24 |     18 |      5 |      2 |      1 |     51 |      0 |      1 | s03      | R    |
| 28150000 |    492 |    300 |    113 |     5 |    0 |     60 |    1 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    225 |    267 |       9 |       2 |       0 |       0 |     29 |      4 |      0 |      9 |      3 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |     26 |      3 |      0 |     19 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      4 |      0 |      0 |      0 |        8 |        8 |       26 |       46 |       28 |       14 |       8 |       16 |        9 |       29 |       59 |       30 |        7 |      12 |        1 |        5 |        9 |       12 |       11 |        5 |      14 |        0 |        3 |        7 |        5 |        9 |        8 |      24 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        1 |        7 |        8 |        8 |        1 |       0 |       10 |        7 |       10 |       17 |        4 |        1 |       0 |      0 |      1 |     28 |     46 |     31 |      6 |     19 |    169 |      0 |      0 |      0 |      3 |     13 |      8 |      3 |      5 |     81 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     17 |      6 |      1 |      4 |     44 |      0 |      1 | s03      | R    |
| 28160001 |    235 |    114 |     41 |     5 |    0 |     66 |    0 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    107 |    128 |       1 |       1 |       0 |       1 |     12 |      2 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     10 |      4 |      0 |     24 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      2 |        8 |        6 |       10 |       16 |        5 |        2 |       3 |        8 |        7 |       17 |       13 |       13 |        0 |       6 |        0 |        2 |        4 |        3 |        5 |        2 |       3 |        0 |        0 |        3 |        4 |        4 |        7 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        9 |        7 |        7 |        3 |        4 |       0 |        5 |       10 |        6 |        7 |        7 |        7 |       0 |      0 |      0 |     10 |     13 |     11 |      4 |      2 |     74 |      0 |      0 |      1 |      4 |      1 |      1 |      1 |      1 |     32 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     13 |      4 |      2 |      0 |     48 |      0 |      1 | s03      | R    |
| 28160002 |    834 |    483 |    180 |     6 |    0 |    142 |    3 |    1 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    399 |    435 |      13 |       3 |       0 |       7 |     44 |      4 |      0 |     17 |      6 |      0 |      0 |      6 |      4 |      1 |      0 |      0 |     27 |     15 |      0 |     28 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      0 |       14 |       14 |       32 |       86 |       50 |        4 |       9 |       30 |       24 |       44 |       95 |       48 |       12 |      21 |        8 |        5 |       15 |       23 |       16 |       11 |      20 |        2 |        4 |       17 |       10 |       13 |        7 |      29 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |        7 |       13 |       23 |       22 |        8 |       0 |       16 |        9 |       16 |       21 |       11 |        6 |       0 |      0 |      3 |     35 |     65 |     47 |     33 |     33 |    267 |      0 |      0 |      0 |     12 |     17 |     11 |      9 |      9 |    122 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     26 |     19 |     10 |      3 |      4 |    105 |      0 |      1 | s03      | R    |
| 30000001 |    576 |    295 |    141 |     5 |    0 |    125 |    1 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    264 |    312 |      34 |      15 |       0 |      21 |      7 |      4 |      0 |      1 |      0 |      1 |      0 |      0 |     10 |      2 |      0 |      2 |     18 |      7 |      0 |     24 |      1 |      1 |      0 |      0 |       8 |       4 |       0 |       6 |      7 |      7 |      0 |      6 |        4 |       16 |       23 |       28 |       16 |       20 |      15 |       12 |       12 |       29 |       33 |       24 |       31 |      32 |        2 |        6 |       21 |       18 |       10 |        8 |       9 |        5 |        3 |       10 |       11 |       12 |       13 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       15 |       13 |       14 |        5 |       11 |       1 |       13 |       12 |       23 |        7 |        7 |        8 |       2 |      0 |      0 |     31 |     41 |      9 |      5 |     17 |    192 |      0 |      0 |      0 |      8 |     17 |     15 |      2 |     18 |     81 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     16 |     11 |      2 |      4 |     84 |      0 |      1 | s03      | R    |
| 30000002 |    114 |     62 |     45 |     3 |    0 |      3 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     28 |     86 |       1 |       0 |       0 |       0 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |       16 |       2 |        0 |        0 |        0 |        0 |        0 |       43 |       1 |        0 |        0 |        0 |        0 |        0 |        7 |       1 |        0 |        0 |        0 |        0 |        0 |       28 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        5 |       0 |      0 |      0 |      6 |      1 |      0 |      1 |      0 |     54 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      0 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 30010000 |    557 |    286 |    179 |    10 |    0 |     76 |    4 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    248 |    309 |      13 |       3 |       0 |       3 |     28 |      8 |      0 |      5 |      3 |      1 |      0 |      4 |      7 |      2 |      0 |      1 |     37 |     22 |      0 |     21 |      6 |      0 |      0 |      1 |       4 |       3 |       0 |       3 |      5 |      2 |      0 |      0 |       11 |        6 |       14 |       33 |       36 |       15 |       2 |       11 |        8 |       26 |       57 |       37 |       28 |       2 |        1 |        1 |       12 |       17 |       21 |       32 |       0 |        3 |        5 |       11 |       34 |       23 |       18 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        7 |        6 |       13 |        8 |        7 |       0 |       10 |        4 |        7 |       13 |        8 |        3 |       0 |      0 |      1 |     24 |     46 |     24 |     17 |     14 |    160 |      0 |      0 |      0 |     14 |     32 |     17 |     13 |     17 |     86 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     14 |     20 |      5 |      1 |      6 |     43 |      0 |      1 | s03      | R    |
| 30011000 |    773 |    393 |    205 |     8 |    0 |    161 |    2 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    347 |    426 |      29 |       2 |       0 |       8 |     24 |     12 |      0 |      2 |      3 |      2 |      0 |      6 |     13 |      3 |      0 |      2 |     35 |     21 |      0 |     35 |     10 |      1 |      0 |      3 |       8 |       0 |       0 |       6 |      9 |      2 |      0 |      5 |        6 |       20 |       30 |       30 |       33 |       25 |      14 |       10 |       32 |       46 |       54 |       35 |       30 |      28 |        7 |       10 |       21 |       16 |       16 |       21 |      10 |        2 |        7 |       20 |       14 |       18 |       24 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       13 |       27 |       20 |       13 |        9 |       0 |       10 |        8 |       25 |       31 |        7 |        5 |       1 |      0 |      4 |     36 |     83 |     36 |     17 |     10 |    207 |      0 |      0 |      3 |     13 |     42 |     11 |      5 |     10 |    121 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     30 |     13 |      5 |      1 |    105 |      0 |      1 | s03      | R    |
| 30012000 |    491 |    252 |    159 |     6 |    0 |     61 |    3 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    205 |    286 |      17 |       7 |       0 |       3 |     19 |      2 |      0 |      4 |      3 |      4 |      0 |      2 |      1 |      0 |      0 |      1 |     15 |     12 |      0 |      8 |      0 |      0 |      0 |      1 |       0 |       4 |       0 |       2 |      2 |      3 |      0 |      3 |        3 |        6 |       14 |       19 |       13 |       24 |       9 |        4 |       12 |       25 |       36 |       26 |       29 |      32 |        1 |        6 |       14 |        9 |       13 |       26 |      12 |        1 |        7 |        8 |       11 |       10 |       33 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        9 |        4 |        8 |        7 |        2 |       1 |        3 |        8 |       11 |        9 |        8 |        3 |       2 |      0 |      0 |     26 |     38 |     23 |      7 |     10 |    148 |      0 |      0 |      0 |     12 |     24 |      4 |      7 |     12 |    100 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |     15 |      5 |      1 |      2 |     46 |      0 |      1 | s03      | R    |
| 30013000 |    741 |    373 |    214 |    16 |    0 |    127 |    2 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    319 |    422 |      12 |       5 |       0 |      12 |     19 |      7 |      0 |      6 |      1 |      5 |      0 |      6 |      3 |      2 |      0 |      3 |     34 |     10 |      0 |     16 |      2 |      2 |      0 |      0 |       0 |       3 |       0 |       2 |      3 |      2 |      0 |      3 |       10 |       16 |       24 |       32 |       20 |       38 |      18 |        8 |       15 |       28 |       48 |       28 |       55 |      33 |        3 |       10 |       13 |       11 |       21 |       24 |      14 |        2 |        7 |       14 |       21 |       20 |       36 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        8 |       13 |       16 |       14 |        8 |       0 |       13 |       18 |       23 |       12 |       15 |        8 |       0 |      0 |      1 |     33 |     42 |     16 |     10 |     21 |    250 |      0 |      0 |      0 |     26 |     24 |     14 |      4 |     14 |    132 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     23 |     24 |      6 |      3 |      5 |     92 |      0 |      1 | s03      | R    |
| 30014000 |    490 |    224 |    124 |     6 |    0 |    129 |    2 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    253 |      25 |      12 |       0 |       7 |      9 |      4 |      0 |      1 |      1 |      4 |      0 |      3 |      4 |      6 |      0 |      0 |     43 |     21 |      0 |     50 |      3 |      1 |      0 |      1 |       2 |       0 |       0 |       3 |      8 |      5 |      0 |      1 |        3 |       11 |       34 |       37 |        5 |        5 |       0 |        2 |       16 |       47 |       38 |       15 |       11 |       0 |        0 |       14 |       22 |       11 |       15 |        4 |       1 |        1 |        9 |       12 |       18 |        8 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       11 |       29 |       20 |        3 |        7 |       0 |        3 |       10 |       27 |       18 |        5 |        4 |       0 |      0 |      3 |     29 |     58 |     18 |     10 |     10 |     96 |      0 |      0 |      1 |     17 |     29 |     14 |      4 |      9 |     50 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     18 |     31 |      5 |      3 |      2 |     80 |      0 |      1 | s03      | R    |
| 30015000 |    829 |    353 |    253 |     8 |    0 |    204 |    3 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    402 |    427 |      21 |      10 |       0 |       6 |     14 |      6 |      0 |      6 |      8 |      6 |      0 |     12 |     13 |      4 |      0 |      2 |     61 |     49 |      0 |     93 |      7 |      0 |      0 |      2 |       7 |       4 |       0 |       6 |     12 |      3 |      0 |      3 |       11 |       13 |       33 |       64 |       24 |       13 |       3 |       14 |       11 |       38 |       86 |       26 |       13 |       4 |        6 |        5 |       18 |       52 |       31 |       17 |       1 |        4 |        5 |       34 |       42 |       22 |       14 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       11 |       21 |       41 |       12 |       14 |       0 |        9 |       15 |       30 |       31 |       10 |       17 |       0 |      0 |      8 |     32 |     57 |     41 |     26 |     59 |    130 |      0 |      0 |      0 |     25 |     49 |     26 |     29 |     31 |     93 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     29 |     40 |     19 |      9 |     14 |    111 |      0 |      1 | s03      | R    |
| 30016000 |    510 |    225 |    159 |     4 |    0 |    114 |    1 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    224 |    286 |      12 |       6 |       0 |      12 |     16 |      5 |      0 |      5 |      2 |      1 |      0 |      5 |      6 |      1 |      0 |      1 |     15 |     23 |      0 |     19 |      2 |      1 |      0 |      6 |       1 |       1 |       0 |       2 |      4 |      0 |      0 |      4 |        3 |        7 |       14 |       21 |       21 |       16 |       0 |        4 |       12 |       25 |       41 |       29 |       31 |       1 |        1 |       10 |       13 |       19 |       17 |       23 |       1 |        0 |        6 |       11 |       21 |       17 |       17 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        5 |        9 |       13 |       16 |       11 |       0 |        6 |       10 |       14 |       23 |        7 |        7 |       1 |      0 |      1 |     14 |     39 |     28 |     16 |     12 |    115 |      0 |      0 |      0 |     15 |     24 |     18 |      7 |     14 |     81 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     22 |      9 |      6 |      3 |     69 |      0 |      1 | s03      | R    |
| 30017000 |    566 |    255 |    183 |     3 |    0 |    119 |    4 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    275 |    291 |      14 |      10 |       0 |       4 |     14 |      9 |      0 |      6 |      5 |      2 |      0 |      4 |      3 |      0 |      0 |      1 |     33 |     28 |      0 |     35 |      2 |      3 |      0 |      4 |       4 |       3 |       0 |       1 |     12 |      4 |      0 |      4 |        6 |        8 |       12 |       41 |       20 |       20 |       0 |       12 |       10 |       24 |       50 |       32 |       18 |       2 |        4 |        9 |       20 |       17 |       21 |       25 |       1 |        2 |        4 |       19 |       16 |       16 |       29 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        6 |       14 |       22 |       14 |        7 |       0 |        8 |        4 |       14 |       19 |        8 |        4 |       0 |      0 |      2 |     33 |     43 |     26 |      8 |     28 |    115 |      0 |      0 |      2 |     25 |     28 |     17 |     10 |     22 |     79 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     28 |     11 |      5 |      9 |     60 |      0 |      1 | s03      | R    |
| 30018000 |    661 |    313 |    196 |     6 |    0 |    137 |    0 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    316 |    345 |      26 |       6 |       0 |       7 |     20 |     14 |      0 |      4 |      2 |      1 |      0 |      6 |      5 |      1 |      0 |      1 |     44 |     29 |      0 |     36 |      2 |      1 |      0 |      0 |       1 |       3 |       0 |       3 |      5 |      4 |      0 |      3 |        7 |        9 |       15 |       32 |       30 |       35 |       1 |        9 |       17 |       34 |       48 |       44 |       31 |       1 |        6 |        9 |       21 |       27 |       25 |       25 |       1 |        1 |        5 |       15 |       17 |       18 |       25 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        6 |       16 |       19 |        9 |       12 |       1 |        5 |        2 |       24 |       17 |       17 |       13 |       1 |      0 |      5 |     19 |     53 |     42 |     19 |     16 |    159 |      0 |      0 |      2 |     17 |     32 |     16 |     15 |     11 |    103 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     30 |     22 |     10 |      6 |      1 |     83 |      0 |      1 | s03      | R    |
| 30019000 |    471 |    199 |    128 |    11 |    0 |    131 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    225 |    246 |       6 |       3 |       0 |       5 |      4 |      3 |      0 |      1 |      2 |      2 |      0 |      6 |      3 |      5 |      0 |      2 |     43 |     23 |      0 |     56 |      7 |      0 |      0 |      3 |       0 |       5 |       0 |       7 |      2 |      2 |      0 |      1 |        6 |        8 |       26 |       37 |        8 |        4 |       0 |        5 |        7 |       45 |       39 |       11 |        3 |       0 |        1 |        5 |       15 |       30 |       12 |        3 |       0 |        2 |        0 |       23 |       25 |        4 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        8 |       14 |       25 |       11 |        4 |       1 |       12 |        8 |       25 |       20 |        3 |        4 |       2 |      0 |      0 |     45 |     35 |     19 |      6 |      6 |     88 |      0 |      0 |      3 |     14 |     28 |     20 |      9 |      0 |     54 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     27 |     22 |      3 |      6 |      3 |     83 |      0 |      1 | s03      | R    |
| 30020000 |    547 |    267 |    139 |     8 |    0 |    126 |    1 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    255 |    292 |      28 |       5 |       0 |      11 |     14 |      4 |      0 |      2 |      3 |      3 |      0 |     11 |      5 |      1 |      0 |      3 |     43 |     17 |      0 |     28 |      0 |      0 |      0 |      1 |       2 |       1 |       0 |       4 |     13 |      2 |      0 |      7 |        5 |       10 |       24 |       23 |       23 |       21 |       5 |        7 |       14 |       27 |       32 |       34 |       32 |      10 |        0 |        6 |       15 |       16 |       15 |       14 |       4 |        2 |        7 |       15 |       16 |       11 |       15 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       19 |       14 |       16 |       10 |        8 |       0 |        8 |       10 |       21 |       17 |        7 |        4 |       0 |      0 |      2 |     19 |     36 |     15 |      9 |     22 |    164 |      0 |      0 |      0 |      8 |     30 |      8 |      2 |      4 |     87 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     14 |      7 |      4 |      4 |     91 |      0 |      1 | s03      | R    |
| 30021000 |    752 |    325 |    241 |    10 |    0 |    169 |    3 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    337 |    415 |       9 |       6 |       0 |      10 |     33 |     19 |      0 |      9 |      9 |      8 |      0 |     10 |      9 |      8 |      0 |      3 |     47 |     33 |      0 |     58 |      2 |      1 |      0 |      0 |       2 |       2 |       0 |       3 |      3 |      3 |      0 |      2 |       10 |        9 |       13 |       59 |       29 |       14 |       2 |       11 |       13 |       31 |       72 |       40 |       19 |       3 |       10 |        8 |       15 |       26 |       30 |       29 |       0 |        1 |        9 |       16 |       37 |       36 |       20 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        5 |       12 |       26 |       19 |        9 |       1 |       18 |        9 |       21 |       30 |       20 |        5 |       0 |      0 |      2 |     27 |     58 |     22 |     15 |     31 |    170 |      0 |      0 |      0 |     12 |     34 |     24 |      8 |     32 |    131 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     21 |     34 |     18 |      5 |      9 |     96 |      0 |      1 | s03      | R    |
| 30030000 |    747 |    386 |    192 |    11 |    0 |    139 |    2 |    1 |    16 |    0 |    0 |    0 |    0 |    0 |    0 |    339 |    408 |      28 |      13 |       0 |       9 |     17 |      4 |      0 |      1 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      5 |     20 |     19 |      0 |     30 |      5 |      1 |      0 |      2 |       4 |       4 |       0 |       6 |     10 |      2 |      0 |      3 |       10 |       22 |       22 |       35 |       19 |       30 |      25 |        6 |       27 |       50 |       37 |       28 |       40 |      35 |        4 |        7 |       26 |       21 |       15 |       11 |      18 |        2 |        6 |       16 |       21 |       12 |       16 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        9 |       28 |       14 |        6 |        6 |       2 |       16 |       15 |       26 |       19 |       12 |        6 |       1 |      0 |      1 |     25 |     54 |     29 |      9 |     16 |    252 |      0 |      0 |      1 |     14 |     30 |     17 |      6 |     13 |    111 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     28 |     10 |      1 |      3 |    107 |      0 |      1 | s03      | R    |
| 30040001 |     20 |     10 |      9 |     0 |    0 |      0 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |      9 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        1 |        0 |        2 |       1 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       2 |        0 |        2 |        0 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 30040002 |    535 |    271 |    140 |    11 |    0 |     97 |    3 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    230 |    305 |      22 |       5 |       0 |       7 |     11 |     12 |      0 |      5 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      3 |      0 |     10 |      1 |      0 |      0 |      0 |       6 |       2 |       0 |       7 |      3 |      6 |      0 |      5 |        3 |        9 |       20 |       28 |       15 |       14 |       6 |        7 |       27 |       34 |       38 |       23 |       22 |      25 |        4 |        5 |       10 |       13 |       15 |        7 |      17 |        3 |        7 |        7 |       12 |        7 |       15 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       13 |       18 |        8 |       13 |        2 |       1 |       10 |        9 |       14 |       15 |       10 |        2 |       0 |      0 |      1 |     22 |     40 |     14 |      8 |     11 |    175 |      0 |      0 |      1 |     10 |     18 |      7 |      8 |      4 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     20 |      4 |      3 |      3 |     71 |      0 |      1 | s03      | R    |
| 30040003 |     93 |     51 |     25 |     0 |    0 |     14 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     42 |     51 |       1 |       0 |       0 |       1 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        3 |        1 |        8 |        2 |        2 |       2 |        1 |        3 |        3 |       10 |        8 |        4 |       4 |        0 |        0 |        2 |        2 |        2 |        5 |       2 |        0 |        0 |        1 |        0 |        2 |        4 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        2 |        1 |        2 |        1 |        2 |       0 |        0 |        2 |        2 |        0 |        1 |        1 |       0 |      0 |      1 |      3 |     11 |      4 |      0 |      5 |     27 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      1 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     11 |      0 |      1 | s03      | R    |
| 30070000 |    590 |    307 |    174 |     2 |    0 |    103 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    273 |    317 |      25 |       1 |       0 |       7 |     16 |      2 |      0 |      5 |      0 |      0 |      0 |      0 |      6 |      1 |      0 |      1 |      7 |      3 |      0 |      6 |      2 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      3 |      0 |      0 |        5 |        9 |       36 |       31 |       22 |       13 |      12 |        4 |       31 |       40 |       41 |       31 |       15 |      17 |        4 |        5 |       14 |       17 |       14 |       14 |      16 |        1 |        7 |       11 |       13 |       16 |       21 |      21 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       14 |       15 |       13 |        7 |        6 |       1 |        5 |        6 |       15 |       14 |        2 |        5 |       1 |      0 |      1 |     23 |     51 |     26 |      8 |      7 |    191 |      0 |      0 |      0 |     14 |     23 |      7 |      5 |      7 |    118 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     18 |      7 |      2 |      4 |     58 |      0 |      1 | s03      | R    |
| 30080001 |    609 |    316 |    196 |     8 |    0 |     81 |    2 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    276 |    333 |       6 |       7 |       0 |       6 |     23 |      6 |      0 |      1 |      3 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |      7 |      4 |      0 |      6 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      6 |      0 |      0 |      3 |        6 |        9 |       23 |       32 |       25 |       18 |      11 |        7 |       17 |       39 |       46 |       30 |       24 |      29 |        4 |        5 |       13 |       16 |       19 |       20 |      20 |        3 |        6 |       12 |       12 |       18 |       23 |      25 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        7 |       14 |       16 |        9 |        3 |       0 |        7 |        5 |        9 |        8 |        7 |        5 |       1 |      0 |      1 |     35 |     47 |     26 |     11 |      3 |    193 |      0 |      0 |      0 |     12 |     19 |     11 |      3 |     22 |    129 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     12 |      5 |      3 |      0 |     55 |      0 |      1 | s03      | R    |
| 30080002 |      9 |      1 |      6 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 30110001 |     97 |     51 |     14 |     3 |    0 |     25 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     43 |     54 |       8 |       1 |       0 |       1 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        2 |        5 |        2 |        2 |       0 |        3 |        2 |       11 |       11 |        4 |        2 |       1 |        0 |        0 |        4 |        3 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        1 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        1 |        4 |        5 |        2 |        1 |       0 |        5 |        2 |        4 |        2 |        0 |        1 |       0 |      0 |      0 |      3 |     11 |      3 |      1 |      4 |     29 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      3 |      2 |      0 |      0 |     21 |      0 |      1 | s03      | R    |
| 30110002 |    554 |    342 |    100 |    10 |    0 |     87 |    0 |    2 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    247 |    307 |      31 |       5 |       0 |       2 |     20 |      3 |      0 |      5 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      3 |      5 |      0 |      0 |      9 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      1 |      0 |      1 |        7 |       15 |       36 |       44 |       14 |        9 |      16 |       15 |       20 |       50 |       49 |       30 |       12 |      25 |        2 |        3 |        9 |        9 |        8 |        6 |       7 |        1 |        7 |       10 |        9 |        9 |        8 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        8 |       18 |       18 |        9 |        2 |       1 |        3 |        7 |       19 |       12 |        4 |        5 |       0 |      0 |      1 |     29 |     59 |     23 |      7 |     15 |    208 |      0 |      0 |      1 |      2 |     14 |      9 |      4 |      7 |     63 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     23 |      8 |      0 |      5 |     63 |      0 |      1 | s03      | R    |
| 30120001 |    405 |    246 |     69 |     8 |    0 |     72 |    1 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    187 |    218 |      15 |       4 |       0 |       6 |      5 |      3 |      0 |      4 |      4 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      3 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |       0 |       2 |       0 |       1 |      4 |      4 |      0 |      2 |        9 |       11 |       33 |       21 |       15 |       12 |       9 |       10 |       15 |       30 |       34 |       23 |       13 |      11 |        1 |        2 |       11 |        6 |       10 |        5 |       4 |        3 |        4 |        3 |        3 |        6 |        5 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        5 |       11 |       11 |        4 |        2 |       0 |        7 |       10 |       12 |       10 |        8 |        5 |       0 |      0 |      1 |     25 |     34 |     17 |      5 |     11 |    153 |      0 |      0 |      1 |      2 |      7 |      5 |      1 |      4 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     13 |      3 |      7 |      4 |     52 |      0 |      1 | s03      | R    |
| 30120002 |    337 |    194 |     62 |     4 |    0 |     68 |    1 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    154 |    183 |      21 |       1 |       0 |       5 |      7 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |     11 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      2 |      3 |      0 |      1 |        4 |       11 |       18 |       23 |       12 |        6 |       6 |        8 |       12 |       32 |       29 |       13 |       13 |       7 |        1 |        8 |        5 |        9 |        4 |        4 |       1 |        0 |        5 |        4 |        8 |        7 |        2 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       11 |       13 |        7 |        6 |        2 |       1 |        5 |       10 |       16 |        5 |        3 |        0 |       0 |      0 |      2 |     26 |     29 |     16 |     11 |      6 |    104 |      0 |      0 |      0 |      1 |      7 |      5 |      4 |      4 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      9 |     10 |      6 |      2 |      3 |     49 |      0 |      1 | s03      | R    |
| 30140000 |    697 |    355 |    183 |    10 |    0 |    136 |    1 |    0 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    303 |    394 |      19 |       9 |       0 |      15 |     25 |      6 |      0 |      8 |      3 |      5 |      0 |      2 |      1 |      0 |      0 |      0 |     22 |      7 |      0 |     24 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       6 |     10 |      2 |      0 |      1 |        4 |       10 |       29 |       35 |       27 |       21 |       9 |        6 |       28 |       46 |       55 |       37 |       22 |      26 |        3 |       11 |       12 |       21 |       17 |       20 |      13 |        4 |        5 |       10 |        9 |       18 |       18 |      22 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       16 |       16 |       15 |       11 |        8 |       1 |       18 |       15 |       25 |       17 |        6 |        5 |       2 |      0 |      0 |     34 |     49 |     39 |     12 |     12 |    209 |      0 |      0 |      0 |     11 |     21 |     12 |      3 |     11 |    125 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     28 |     23 |     11 |      2 |      1 |     94 |      0 |      1 | s03      | R    |
| 30151000 |    613 |    316 |    152 |    13 |    0 |    120 |    4 |    6 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    266 |    347 |      27 |       3 |       0 |       8 |     14 |      7 |      0 |      1 |      1 |      0 |      0 |      2 |      3 |      3 |      0 |      3 |      7 |      0 |      0 |      7 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     12 |      2 |      0 |      2 |        4 |       11 |       17 |       38 |       12 |       36 |      10 |        5 |       15 |       28 |       35 |       40 |       43 |      22 |        2 |        9 |        6 |        7 |        6 |       21 |      15 |        1 |        5 |        8 |       13 |        2 |       35 |      22 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       17 |       12 |       10 |       11 |       17 |       1 |        4 |       15 |       10 |       15 |       15 |       11 |       3 |      0 |      0 |     34 |     49 |     14 |     10 |     10 |    199 |      0 |      0 |      0 |      9 |     17 |      5 |      6 |      3 |    112 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     10 |     16 |      6 |      7 |      3 |    100 |      0 |      1 | s03      | R    |
| 30152001 |     10 |      7 |      1 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      7 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 30152002 |    624 |    344 |    133 |    12 |    0 |    119 |    2 |    2 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    248 |    376 |      33 |       5 |       0 |      10 |     20 |      6 |      0 |      6 |      1 |      1 |      0 |      2 |      1 |      1 |      0 |      1 |      6 |      6 |      0 |     12 |      3 |      0 |      0 |      1 |       3 |       0 |       0 |       1 |      3 |      3 |      0 |      4 |        5 |        9 |       17 |       24 |       27 |       30 |       4 |        7 |       29 |       26 |       48 |       44 |       57 |      17 |        2 |        9 |       15 |        4 |       12 |       17 |       6 |        1 |        6 |        8 |        6 |        9 |       30 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       19 |       13 |       10 |        5 |       12 |       1 |        7 |       22 |       15 |       14 |        9 |       13 |       0 |      0 |      1 |     51 |     62 |     20 |      9 |      7 |    194 |      0 |      0 |      0 |      7 |     18 |      6 |      3 |      4 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     16 |      5 |      2 |      0 |     97 |      0 |      1 | s03      | R    |
| 30180000 |    844 |    454 |    175 |    12 |    0 |    170 |    9 |    2 |    22 |    0 |    0 |    0 |    0 |    0 |    0 |    369 |    475 |      46 |       2 |       0 |      17 |     35 |     10 |      0 |      8 |      9 |      1 |      0 |      4 |      3 |      0 |      0 |      1 |     18 |      4 |      0 |     11 |      2 |      0 |      0 |      1 |       5 |       6 |       0 |       2 |     11 |      0 |      0 |      8 |       13 |       23 |       29 |       48 |       24 |       17 |      11 |       17 |       45 |       65 |       65 |       41 |       27 |      29 |        5 |       16 |       21 |       20 |       16 |        7 |       9 |        2 |       12 |       12 |       17 |       12 |       13 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       18 |       30 |       30 |        9 |        6 |       0 |        9 |       28 |       23 |       21 |       13 |       11 |       0 |      0 |      2 |     35 |     72 |     41 |     14 |     22 |    268 |      0 |      0 |      0 |     13 |     37 |     14 |     12 |      8 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     32 |     25 |     13 |      9 |      2 |    131 |      0 |      1 | s03      | R    |
| 30190001 |    600 |    312 |     88 |    17 |    0 |    148 |   11 |    2 |    22 |    0 |    0 |    0 |    0 |    0 |    0 |    253 |    347 |      36 |       6 |       0 |      13 |     14 |      0 |      0 |      5 |      3 |      3 |      0 |      3 |      1 |      1 |      0 |      2 |     15 |      3 |      0 |     23 |      1 |      2 |      0 |      1 |       3 |       2 |       0 |       4 |      8 |      7 |      0 |      9 |        6 |       22 |       19 |       27 |       14 |       16 |       7 |       14 |       29 |       41 |       38 |       30 |       33 |      16 |        2 |        3 |       12 |       10 |        6 |        4 |       6 |        1 |        9 |        6 |        7 |        6 |       10 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       26 |       21 |       18 |       10 |       13 |       1 |       10 |       33 |       21 |       16 |        5 |       16 |       0 |      0 |      1 |     32 |     58 |     31 |     12 |     13 |    165 |      0 |      0 |      1 |      8 |     12 |      4 |      1 |      1 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     22 |     10 |      5 |      1 |    135 |      0 |      1 | s03      | R    |
| 30190002 |    255 |    144 |     47 |     8 |    0 |     43 |    1 |    0 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    120 |    135 |       5 |       2 |       0 |       3 |      3 |      3 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |       13 |       12 |       11 |       11 |        7 |       3 |        8 |       11 |       20 |       25 |        6 |        6 |       7 |        1 |        2 |       12 |        5 |        8 |        2 |       1 |        2 |        1 |        2 |        4 |        4 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       11 |        5 |        3 |        4 |        1 |       0 |        5 |       11 |        3 |       12 |        4 |        1 |       0 |      0 |      0 |     23 |     20 |     11 |      1 |      1 |     88 |      0 |      0 |      0 |      5 |     10 |      5 |      0 |      1 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     12 |      6 |      4 |      0 |      2 |     37 |      0 |      1 | s03      | R    |
| 30200000 |    902 |    485 |    176 |    19 |    0 |    196 |    4 |    1 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    437 |    465 |      52 |       8 |       0 |       8 |     24 |      8 |      0 |     15 |      3 |      4 |      0 |      3 |      6 |      0 |      0 |      1 |     17 |      5 |      0 |     32 |      2 |      0 |      0 |      4 |       6 |       0 |       0 |       2 |      9 |      3 |      0 |      4 |       12 |       19 |       52 |       66 |       38 |       26 |      12 |       11 |       39 |       58 |       49 |       50 |       35 |      18 |        2 |       14 |       20 |       17 |        8 |       22 |      10 |        2 |       10 |       10 |       14 |       10 |       24 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       36 |       22 |       17 |       17 |       14 |       2 |       14 |       34 |       25 |       32 |        9 |        7 |       1 |      0 |      6 |     55 |     88 |     22 |      8 |     19 |    287 |      0 |      0 |      2 |      9 |     28 |     13 |      2 |      9 |    113 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     36 |     28 |     14 |      4 |      7 |    150 |      0 |      1 | s03      | R    |
| 30210001 |    401 |    236 |     62 |    10 |    0 |     78 |    3 |    1 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    150 |    251 |      33 |       3 |       0 |       7 |      6 |      5 |      0 |      4 |      5 |      0 |      0 |      1 |      6 |      0 |      0 |      2 |      5 |      0 |      0 |      4 |      4 |      1 |      0 |      1 |       4 |       1 |       0 |       5 |      6 |      2 |      0 |      3 |        4 |       15 |       21 |       11 |       10 |        8 |      13 |        5 |       29 |       32 |       25 |       23 |       32 |       8 |        1 |        3 |        7 |       10 |        0 |        2 |       3 |        0 |        3 |        0 |        8 |        1 |       16 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       14 |       13 |        4 |        2 |        3 |       1 |        6 |       10 |       11 |       12 |        5 |       16 |       1 |      0 |      1 |     18 |     31 |     19 |      1 |      7 |    159 |      0 |      0 |      0 |      3 |      5 |      3 |      2 |      2 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     13 |      2 |      0 |      3 |     73 |      0 |      1 | s03      | R    |
| 30210002 |    105 |     57 |     17 |     4 |    0 |     23 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     47 |     58 |      11 |       3 |       0 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       1 |       3 |       0 |       1 |      0 |      1 |      0 |      0 |        0 |        5 |        7 |        8 |        4 |        2 |       1 |        0 |        9 |        8 |        6 |        4 |        1 |       2 |        0 |        2 |        2 |        2 |        1 |        2 |       0 |        1 |        0 |        1 |        2 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        1 |        1 |        4 |        0 |       1 |        2 |        6 |        4 |        3 |        3 |        2 |       0 |      0 |      1 |     11 |      7 |      2 |      1 |      3 |     32 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      6 |      3 |      1 |      2 |     16 |      0 |      1 | s03      | R    |
| 30210003 |    133 |     74 |     27 |     3 |    0 |     24 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     57 |     76 |      10 |       5 |       0 |       7 |      4 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      1 |        2 |        3 |       10 |        8 |        5 |        0 |       4 |        5 |        9 |        8 |       10 |        6 |        2 |       2 |        0 |        2 |        3 |        2 |        3 |        1 |       2 |        1 |        2 |        2 |        2 |        3 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        4 |        2 |        2 |        0 |       0 |        5 |        7 |        4 |        2 |        0 |        2 |       0 |      0 |      0 |     11 |      9 |      6 |      1 |      4 |     43 |      0 |      0 |      0 |      1 |      5 |      1 |      3 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      0 |     23 |      0 |      1 | s03      | R    |
| 30220001 |    653 |    337 |    169 |     8 |    0 |    116 |    3 |    0 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    306 |    347 |      12 |       4 |       0 |       7 |     15 |      6 |      0 |      6 |      2 |      1 |      0 |      0 |      6 |      3 |      0 |      2 |     13 |      2 |      0 |      8 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      8 |      4 |      0 |      1 |        9 |       14 |       25 |       34 |       27 |       15 |      13 |        7 |       27 |       36 |       58 |       24 |       20 |      28 |        6 |        8 |       21 |       23 |       10 |       15 |      11 |        0 |        6 |       10 |       13 |       14 |       18 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       13 |       17 |       18 |       11 |        3 |       2 |       14 |       10 |       26 |       12 |        5 |        4 |       1 |      0 |      2 |     25 |     59 |     27 |      8 |     15 |    201 |      0 |      0 |      1 |     17 |     28 |     12 |      3 |      7 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     24 |      8 |      1 |      3 |     88 |      0 |      1 | s03      | R    |
| 30220002 |     19 |      8 |      8 |     0 |    0 |      2 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |     11 |       2 |       1 |       0 |       0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        1 |       1 |        0 |        0 |        3 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 30230000 |    554 |    279 |     87 |    12 |    0 |    146 |   10 |    3 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    258 |    296 |      27 |       7 |       0 |      22 |     12 |      2 |      0 |     10 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      2 |      0 |     21 |      0 |      0 |      0 |      3 |       8 |      11 |       0 |      16 |     15 |      6 |      0 |      9 |        5 |       19 |       32 |       24 |       12 |       13 |       7 |       11 |       30 |       50 |       34 |       18 |       18 |       6 |        5 |       11 |        8 |       14 |        7 |        3 |       3 |        2 |        7 |        3 |       10 |        4 |        7 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       25 |       25 |       21 |       10 |        5 |       0 |       17 |       25 |       22 |       19 |        8 |        2 |       0 |      0 |      1 |     31 |     43 |     17 |      6 |      9 |    172 |      0 |      0 |      2 |     11 |      5 |      3 |      2 |      2 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     26 |     25 |      7 |      3 |      1 |    122 |      0 |      1 | s03      | R    |
| 30240000 |    614 |    342 |     95 |     7 |    0 |    152 |    2 |    1 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    276 |    338 |      40 |       4 |       0 |      17 |     17 |      0 |      0 |      6 |      1 |      1 |      0 |      0 |      5 |      2 |      0 |      6 |     11 |      2 |      0 |     19 |      2 |      0 |      0 |      0 |      24 |       9 |       0 |       7 |     16 |      6 |      0 |      8 |        4 |       23 |       26 |       30 |       26 |       16 |       6 |       14 |       33 |       44 |       51 |       32 |       19 |      18 |        2 |       10 |       17 |        9 |       11 |        5 |       0 |        4 |        9 |        9 |        8 |        3 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       19 |       18 |       16 |       15 |        7 |       2 |       15 |       26 |       15 |       18 |        7 |        4 |       1 |      0 |      0 |     43 |     54 |     25 |      9 |      6 |    205 |      0 |      0 |      0 |      8 |     18 |      7 |      4 |      1 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     27 |      6 |      5 |      1 |    110 |      0 |      1 | s03      | R    |
| 30250000 |    629 |    331 |    121 |    11 |    0 |    138 |    4 |    1 |    23 |    0 |    0 |    0 |    0 |    0 |    0 |    259 |    370 |      58 |      13 |       0 |      17 |     10 |      4 |      0 |      1 |      4 |      0 |      0 |      4 |      2 |      0 |      0 |      1 |      6 |      3 |      0 |     13 |      4 |      0 |      0 |      1 |       3 |       6 |       0 |       7 |     13 |      3 |      0 |      6 |        4 |       27 |       28 |       29 |       10 |       19 |       2 |       10 |       46 |       38 |       50 |       31 |       31 |       6 |        1 |        9 |       12 |        9 |        9 |        9 |       3 |        3 |        9 |       10 |       12 |        7 |       25 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       25 |       18 |       18 |       11 |        7 |       0 |        9 |       28 |       22 |       15 |        8 |        6 |       1 |      0 |      1 |     43 |     49 |     20 |      5 |      9 |    204 |      0 |      0 |      0 |     12 |     21 |      7 |      2 |      6 |     73 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     31 |      4 |      0 |      1 |    121 |      0 |      1 | s03      | R    |
| 30251000 |    715 |    395 |    111 |    14 |    0 |    160 |    6 |    3 |    26 |    0 |    0 |    0 |    0 |    0 |    0 |    309 |    406 |      47 |       8 |       0 |      17 |     16 |      4 |      0 |      6 |     12 |      3 |      0 |      8 |      5 |      0 |      0 |      2 |     22 |      4 |      0 |     13 |      3 |      0 |      0 |      0 |       2 |       2 |       0 |       5 |      7 |      3 |      0 |      5 |        7 |       34 |       28 |       29 |       19 |       22 |       5 |       12 |       61 |       56 |       42 |       34 |       32 |      14 |        1 |       10 |       14 |       11 |       14 |        4 |       3 |        5 |       10 |       10 |       11 |       11 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       35 |       24 |       24 |       10 |        2 |       1 |       15 |       33 |       29 |       14 |        7 |        2 |       1 |      0 |      4 |     36 |     60 |     23 |      6 |     12 |    254 |      0 |      0 |      0 |     17 |     23 |      7 |      1 |      4 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     20 |      3 |      3 |      2 |    154 |      0 |      1 | s03      | R    |
| 30270001 |      3 |      3 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 30270002 |    823 |    441 |    123 |    20 |    0 |    211 |    3 |    0 |    25 |    0 |    0 |    0 |    0 |    0 |    0 |    337 |    486 |      62 |      14 |       0 |      30 |     17 |      2 |      0 |     11 |      0 |      1 |      0 |      2 |      1 |      1 |      0 |      0 |     21 |      6 |      0 |     30 |      1 |      0 |      0 |      2 |      18 |       9 |       0 |      15 |      9 |      4 |      0 |      4 |       12 |       28 |       39 |       40 |       25 |       19 |       6 |       23 |       55 |       57 |       61 |       37 |       29 |      10 |        0 |       15 |       14 |       15 |        7 |        4 |       2 |        4 |       11 |       12 |        9 |        9 |       13 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       33 |       20 |       23 |       13 |        8 |       1 |       22 |       39 |       35 |       20 |       19 |       10 |       3 |      0 |      3 |     49 |     70 |     24 |      5 |     15 |    275 |      0 |      0 |      0 |     15 |     19 |      7 |      2 |      8 |     72 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     44 |     32 |      6 |      4 |      2 |    168 |      0 |      1 | s03      | R    |
| 30300000 |    763 |    371 |    144 |    26 |    0 |    181 |   10 |    0 |    31 |    0 |    0 |    0 |    0 |    0 |    0 |    354 |    409 |      46 |       6 |       0 |      16 |     13 |      1 |      0 |      8 |      3 |      0 |      0 |      3 |      9 |      0 |      0 |      2 |     10 |      4 |      0 |     11 |      1 |      1 |      0 |      2 |       1 |       1 |       0 |       2 |     12 |      6 |      0 |      5 |       10 |       24 |       30 |       49 |       24 |       11 |      14 |       11 |       32 |       55 |       46 |       26 |       25 |      14 |        3 |        3 |       24 |       12 |       14 |        9 |       5 |        2 |        8 |       18 |       15 |        9 |       14 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       27 |       28 |       31 |        9 |       11 |       2 |        7 |       31 |       35 |       31 |       16 |        5 |       1 |      0 |      2 |     46 |     67 |     42 |      8 |     12 |    194 |      0 |      0 |      2 |     11 |     21 |     12 |      4 |      9 |     85 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     35 |     40 |      4 |      1 |      5 |    159 |      0 |      1 | s03      | R    |
| 30320000 |    696 |    359 |    126 |    17 |    0 |    176 |    2 |    1 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    323 |    373 |      37 |       5 |       0 |      18 |      8 |      2 |      0 |     16 |      3 |      1 |      0 |      4 |      2 |      0 |      0 |      0 |     31 |     12 |      0 |     27 |      3 |      2 |      0 |      3 |       8 |       2 |       0 |       6 |     12 |      2 |      0 |      8 |        5 |       40 |       41 |       21 |       19 |       20 |       8 |       16 |       44 |       37 |       39 |       27 |       33 |       9 |        0 |       11 |       13 |        9 |       10 |       10 |       6 |        2 |        6 |       11 |       10 |       12 |       16 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       36 |       29 |       17 |       11 |        9 |       0 |       14 |       33 |       24 |       12 |       10 |        6 |       2 |      0 |      3 |     46 |     39 |     24 |     10 |      5 |    232 |      0 |      0 |      2 |     13 |     14 |      7 |      5 |      6 |     79 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     22 |     22 |     10 |      1 |      0 |    153 |      0 |      1 | s03      | R    |
| 30330001 |    415 |    183 |    131 |     6 |    0 |     87 |    1 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    177 |    238 |       8 |       2 |       0 |       3 |     10 |      5 |      0 |      6 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |     13 |      9 |      0 |     26 |      3 |      0 |      0 |      0 |       1 |       1 |       0 |       4 |      1 |      2 |      0 |      0 |        0 |        7 |       13 |       10 |       11 |       18 |       6 |        4 |       13 |       22 |       11 |       22 |       29 |      17 |        3 |        4 |        8 |       13 |        9 |       15 |      15 |        0 |        1 |        1 |        8 |        4 |       32 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        7 |        8 |       11 |        6 |       10 |       1 |        9 |        5 |       10 |       15 |        9 |        7 |       1 |      0 |      4 |     22 |     23 |      9 |      1 |      5 |    119 |      0 |      0 |      2 |      6 |     12 |      8 |      5 |      8 |     90 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     14 |      7 |      3 |      3 |     56 |      0 |      1 | s03      | R    |
| 30330002 |    249 |    126 |     44 |     3 |    0 |     69 |    1 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    114 |    135 |       8 |       1 |       0 |       2 |      7 |      2 |      0 |      5 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      5 |      1 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |       10 |        8 |       12 |        7 |        6 |       3 |        5 |       19 |       17 |       18 |        6 |        8 |       5 |        2 |        5 |        8 |        1 |        2 |        4 |       1 |        0 |        3 |        4 |        5 |        2 |        5 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       12 |       11 |        9 |        3 |        3 |       1 |        3 |        8 |        9 |        6 |        6 |        4 |       0 |      0 |      1 |     17 |     19 |      7 |      1 |      7 |     74 |      0 |      0 |      1 |      2 |      8 |      0 |      3 |      4 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     11 |      3 |      1 |      2 |     56 |      0 |      1 | s03      | R    |
| 30331000 |    451 |    187 |    142 |     2 |    0 |    111 |    3 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    217 |    234 |      21 |       9 |       0 |      13 |     11 |      4 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     42 |     23 |      0 |     49 |      2 |      2 |      0 |      3 |       3 |       5 |       0 |       3 |      5 |      5 |      0 |      4 |        3 |        9 |        8 |       15 |       12 |       22 |       9 |        5 |       13 |       15 |       24 |       11 |       25 |      16 |        2 |        7 |       11 |        9 |       12 |       22 |      13 |        0 |        3 |        6 |        9 |       15 |       15 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       13 |        4 |        8 |       13 |       18 |       2 |        8 |       11 |        5 |       14 |        8 |       11 |       2 |      0 |      1 |     14 |     34 |      8 |      1 |      9 |    120 |      0 |      0 |      0 |      4 |     19 |     11 |      6 |     11 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |     22 |      9 |      2 |      3 |     78 |      0 |      1 | s03      | R    |
| 30340001 |    426 |    223 |     93 |     4 |    0 |     74 |    8 |    2 |    22 |    0 |    0 |    0 |    0 |    0 |    0 |    203 |    223 |      16 |       4 |       0 |       5 |     16 |      4 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      1 |        2 |       18 |       14 |       29 |       15 |        9 |      13 |        4 |       21 |       28 |       30 |       19 |       14 |       7 |        1 |        5 |        9 |        9 |       12 |       11 |       2 |        1 |        3 |        8 |        7 |        7 |        5 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       17 |       13 |        9 |        6 |        2 |       2 |        3 |       18 |       17 |        8 |        5 |        5 |       0 |      0 |      0 |     18 |     36 |     21 |      8 |     10 |    130 |      0 |      0 |      1 |      2 |     11 |      4 |      2 |      6 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     10 |      7 |      2 |      1 |      3 |     85 |      0 |      1 | s03      | R    |
| 30340002 |    283 |    133 |    105 |     1 |    0 |     34 |    7 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    134 |    149 |      10 |       2 |       0 |       2 |      9 |      7 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      9 |      4 |      0 |      2 |      0 |      0 |      0 |      1 |       4 |       0 |       0 |       2 |      1 |      0 |      0 |      1 |        4 |        1 |        9 |       18 |        9 |       10 |       5 |        4 |       10 |       15 |       24 |       13 |        6 |       5 |        1 |        8 |        6 |       11 |       10 |       10 |       6 |        3 |        4 |        8 |        7 |       13 |       10 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        8 |        1 |        5 |        4 |        3 |       1 |        1 |        4 |        4 |        5 |        3 |        1 |       1 |      0 |      0 |     16 |     24 |      9 |      6 |      6 |     72 |      0 |      0 |      0 |     14 |     14 |      4 |      4 |     12 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      8 |      5 |      1 |      1 |     23 |      0 |      1 | s03      | R    |
| 30350000 |    677 |    364 |    139 |    11 |    0 |    140 |    5 |    0 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    308 |    369 |      44 |      13 |       0 |      16 |     12 |      5 |      0 |      6 |      2 |      3 |      0 |      2 |      6 |      2 |      0 |      2 |      8 |      2 |      0 |      7 |      1 |      0 |      0 |      1 |       2 |       3 |       0 |       2 |      7 |      3 |      0 |      4 |        5 |       19 |       31 |       30 |       26 |       24 |      12 |        8 |       26 |       52 |       54 |       35 |       28 |      14 |        1 |       11 |       18 |       15 |       10 |       15 |       5 |        1 |        8 |       15 |       12 |        7 |       15 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       18 |       27 |       25 |        5 |        3 |       0 |       15 |       26 |       10 |       14 |       16 |        4 |       3 |      0 |      5 |     37 |     65 |     21 |      9 |     13 |    214 |      0 |      0 |      2 |     14 |     27 |     10 |      9 |     10 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     19 |     27 |      6 |      0 |      2 |    115 |      0 |      1 | s03      | R    |
| 30360000 |    506 |    269 |     94 |    12 |    0 |    109 |    3 |    0 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    230 |    276 |      18 |       9 |       0 |       8 |      8 |      9 |      0 |      5 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      8 |      1 |      0 |      0 |      0 |       4 |       0 |       0 |       0 |      7 |      1 |      0 |      1 |        4 |       15 |       29 |       31 |       16 |        6 |       4 |        5 |       31 |       39 |       41 |       21 |       16 |      11 |        3 |        4 |        7 |       12 |       11 |        8 |       3 |        1 |        8 |        6 |        9 |       10 |        5 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       29 |       10 |       15 |       12 |        6 |       0 |        2 |       24 |        9 |       15 |        8 |        8 |       0 |      0 |      3 |     37 |     41 |     21 |      3 |      6 |    158 |      0 |      0 |      0 |      7 |     12 |      4 |      5 |      5 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     17 |     10 |      2 |      2 |     92 |      0 |      1 | s03      | R    |
| 30370000 |    732 |    414 |    109 |    13 |    0 |    157 |    4 |    1 |    34 |    0 |    0 |    0 |    0 |    0 |    0 |    353 |    379 |      68 |       9 |       0 |      32 |     11 |      5 |      0 |      6 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |     12 |      2 |      0 |     14 |      0 |      0 |      0 |      0 |      11 |       4 |       0 |       8 |     27 |      8 |      0 |      7 |       10 |       19 |       40 |       41 |       34 |       23 |       9 |        7 |       40 |       53 |       49 |       42 |       28 |      19 |        3 |        8 |       20 |       14 |        6 |        8 |       7 |        2 |        7 |        8 |        7 |        7 |        9 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       41 |       23 |       16 |       10 |        7 |       2 |       11 |       33 |       21 |       13 |       13 |        6 |       1 |      0 |      1 |     42 |     63 |     40 |     10 |     24 |    234 |      0 |      0 |      0 |     16 |     15 |      7 |      2 |      8 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     39 |     12 |      0 |      7 |    124 |      0 |      1 | s03      | R    |
| 30380001 |    299 |    151 |     54 |     6 |    0 |     78 |    3 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    128 |    171 |      12 |       4 |       0 |      10 |      7 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      1 |      0 |      5 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       6 |      5 |      2 |      0 |      4 |        3 |        9 |       24 |       14 |        9 |        5 |       2 |        7 |       13 |       23 |       22 |       10 |        5 |       5 |        1 |        8 |        3 |        3 |        5 |        3 |       1 |        0 |        7 |        5 |        6 |        6 |        2 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       10 |        6 |       11 |        5 |        1 |       1 |        5 |       12 |       15 |       17 |        5 |        2 |       0 |      0 |      0 |     14 |     24 |     14 |      4 |      5 |     90 |      0 |      0 |      1 |      1 |      4 |      3 |      4 |      1 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     13 |      7 |      2 |      2 |     58 |      0 |      1 | s03      | R    |
| 30380002 |    343 |    200 |     53 |     5 |    0 |     79 |    3 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    171 |    172 |      30 |       2 |       0 |       6 |      9 |      3 |      0 |      6 |      0 |      1 |      0 |      3 |      4 |      3 |      0 |      1 |      5 |      0 |      0 |      9 |      0 |      0 |      0 |      3 |       6 |       0 |       0 |       3 |      7 |      1 |      0 |      1 |        6 |       15 |       17 |       13 |       21 |       14 |       4 |        8 |       18 |       25 |       21 |       23 |       11 |       4 |        2 |        1 |        0 |       10 |       14 |        3 |       0 |        0 |        0 |        4 |        8 |        8 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       10 |       11 |       16 |        8 |        1 |       1 |        5 |        6 |       11 |        9 |        7 |        0 |       1 |      0 |      0 |     23 |     35 |     12 |      4 |      3 |    123 |      0 |      0 |      0 |     10 |      8 |      5 |      1 |      2 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     10 |      3 |      2 |      2 |     55 |      0 |      1 | s03      | R    |
| 30400001 |     74 |     42 |     16 |     0 |    0 |     13 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     38 |     36 |       5 |       1 |       0 |       1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        0 |        5 |        0 |        4 |        3 |        0 |       2 |        0 |       10 |        5 |        4 |        7 |        1 |       1 |        0 |        0 |        4 |        4 |        3 |        2 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        3 |        1 |        3 |        0 |       0 |        1 |        1 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      6 |      3 |      0 |      2 |     27 |      0 |      0 |      0 |      3 |      1 |      3 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     11 |      0 |      1 | s03      | R    |
| 30400002 |    652 |    326 |    151 |    10 |    0 |    143 |    7 |    3 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    293 |    359 |      31 |       4 |       0 |      19 |     20 |     12 |      0 |      7 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      4 |      0 |      5 |      1 |      1 |      0 |      3 |       5 |       4 |       0 |       4 |     15 |      2 |      0 |      6 |        5 |       16 |       28 |       33 |       22 |       12 |      14 |        7 |       37 |       43 |       46 |       20 |       22 |      21 |        3 |        8 |       21 |       16 |       12 |       11 |       5 |        5 |        7 |        8 |       21 |       15 |       11 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       25 |       20 |       22 |        9 |        2 |       3 |       13 |       30 |       20 |       10 |        8 |        5 |       2 |      0 |      2 |     32 |     62 |     19 |      5 |     15 |    191 |      0 |      0 |      0 |     14 |     20 |      7 |      8 |      9 |     93 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     26 |     24 |      6 |      4 |      2 |    110 |      0 |      1 | s03      | R    |
| 30410000 |    617 |    321 |    111 |    14 |    0 |    157 |    6 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    290 |    327 |      27 |       6 |       0 |      11 |     16 |      5 |      0 |      6 |      1 |      1 |      0 |      6 |      2 |      2 |      0 |      2 |      9 |      1 |      0 |     14 |      1 |      0 |      0 |      3 |       2 |       2 |       0 |       1 |      3 |      0 |      0 |      0 |        4 |       25 |       25 |       28 |       20 |       24 |       2 |        7 |       36 |       32 |       46 |       34 |       33 |       5 |        0 |       13 |       10 |        7 |       16 |       10 |       2 |        2 |       13 |        7 |        7 |        4 |       17 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       31 |       28 |       18 |        9 |       11 |       0 |        7 |       33 |       15 |       10 |        9 |        6 |       1 |      0 |      3 |     42 |     34 |     14 |      5 |      4 |    219 |      0 |      0 |      0 |      5 |     19 |      5 |      4 |      5 |     73 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |     20 |      5 |      1 |      0 |    141 |      0 |      1 | s03      | R    |
| 30412001 |    446 |    211 |    129 |     3 |    0 |     98 |    1 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    201 |    245 |      15 |       6 |       0 |       9 |     11 |      3 |      0 |      7 |      0 |      0 |      0 |      0 |      7 |      4 |      0 |      0 |     38 |     19 |      0 |     34 |      5 |      2 |      0 |      1 |       4 |       5 |       0 |       0 |     15 |      2 |      0 |      1 |        4 |        9 |       11 |       16 |       10 |       20 |      15 |        0 |        8 |       17 |       26 |       25 |       31 |      19 |        2 |        8 |        9 |        7 |        9 |       20 |      13 |        1 |        5 |        7 |        8 |        3 |       18 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        7 |       10 |        9 |        6 |       12 |       2 |        8 |       13 |       10 |        9 |        4 |        8 |       6 |      0 |      0 |     23 |     30 |     12 |      4 |      7 |    135 |      0 |      0 |      1 |      7 |     15 |      5 |      3 |      3 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     14 |      6 |      3 |      1 |     67 |      0 |      1 | s03      | R    |
| 30412002 |    282 |    136 |     35 |     3 |    0 |     90 |    5 |    1 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    128 |    154 |      10 |       1 |       0 |      20 |      4 |      4 |      0 |      3 |      2 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      3 |      2 |      0 |      4 |      4 |      0 |      0 |      2 |       0 |       0 |       0 |       2 |      3 |      0 |      0 |      1 |        3 |       14 |       12 |       16 |        1 |        6 |       0 |        7 |       21 |       18 |       14 |       11 |       12 |       1 |        0 |        4 |        2 |        2 |        3 |        8 |       1 |        0 |        3 |        2 |        2 |        2 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       19 |       14 |       10 |        4 |        6 |       0 |        6 |       18 |       15 |        4 |       10 |        2 |       0 |      0 |      1 |      9 |     20 |      9 |      2 |      4 |     91 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      1 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     12 |      2 |      1 |      0 |     74 |      0 |      1 | s03      | R    |
| 30420000 |    632 |    333 |    173 |     5 |    0 |    106 |    5 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    280 |    352 |      26 |      15 |       0 |       3 |     19 |      3 |      0 |      5 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |     13 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |       2 |       0 |       0 |       8 |      2 |      0 |      0 |      3 |        9 |        9 |       24 |       38 |       20 |       19 |      14 |        6 |       17 |       53 |       49 |       34 |       20 |      21 |        3 |        7 |       19 |       18 |       16 |       11 |      14 |        6 |        1 |       11 |       17 |       13 |       25 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       11 |       17 |        9 |        9 |        6 |       0 |       13 |       12 |       15 |       18 |        5 |        3 |       1 |      0 |      2 |     39 |     46 |     22 |      5 |     15 |    204 |      0 |      0 |      3 |     12 |     23 |     15 |      3 |      8 |    109 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |     19 |      5 |      2 |      4 |     77 |      0 |      1 | s03      | R    |
| 30450001 |    112 |     67 |     13 |     3 |    0 |     21 |    3 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     50 |     62 |       6 |       2 |       0 |       3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      2 |        2 |        1 |        5 |        4 |        5 |        5 |       5 |        2 |        5 |        7 |       10 |        9 |        6 |       1 |        0 |        1 |        1 |        1 |        2 |        1 |       1 |        0 |        1 |        0 |        1 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        4 |        2 |        3 |        3 |       0 |        1 |        4 |        2 |        2 |        5 |        2 |       0 |      0 |      0 |      4 |     11 |      2 |      0 |      4 |     46 |      0 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      4 |      0 |      1 |     19 |      0 |      1 | s03      | R    |
| 30450002 |    633 |    326 |     88 |    13 |    0 |    173 |    4 |    1 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    294 |    339 |      42 |       7 |       0 |      22 |     10 |      0 |      0 |      8 |      3 |      1 |      0 |      3 |      2 |      0 |      0 |      1 |     13 |      1 |      0 |     12 |      3 |      0 |      0 |      0 |       4 |       2 |       0 |       2 |     14 |      3 |      0 |     11 |        2 |       26 |       38 |       36 |       23 |       14 |       6 |        6 |       27 |       48 |       32 |       28 |       26 |      14 |        1 |       10 |       11 |        8 |        8 |        6 |       2 |        1 |        9 |        9 |        3 |        7 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       37 |       28 |       11 |        7 |        9 |       0 |       16 |       38 |       24 |       20 |       11 |        6 |       1 |      0 |      2 |     35 |     55 |     17 |      5 |      5 |    207 |      0 |      0 |      1 |      5 |     19 |      5 |      3 |      6 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     34 |     27 |      7 |      4 |      2 |    145 |      0 |      1 | s03      | R    |
| 30460001 |    723 |    406 |    106 |    11 |    0 |    172 |    8 |    1 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    361 |    362 |      44 |       8 |       0 |      15 |     18 |      1 |      0 |      8 |      2 |      0 |      0 |      2 |      3 |      1 |      0 |      1 |      5 |      5 |      0 |     19 |      6 |      0 |      0 |      0 |       5 |       1 |       0 |       4 |     10 |      0 |      0 |      6 |        5 |       34 |       42 |       43 |       20 |       19 |      12 |        9 |       37 |       56 |       45 |       34 |       33 |      17 |        5 |        8 |       15 |        8 |        9 |       10 |      10 |        0 |        6 |        8 |        6 |        4 |       11 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       33 |       36 |       23 |       13 |        5 |       0 |       11 |       27 |       25 |       15 |        7 |        4 |       1 |      0 |      1 |     49 |     68 |     32 |     14 |     14 |    228 |      0 |      0 |      0 |      9 |     18 |      6 |      1 |      8 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     32 |     32 |     10 |      2 |      2 |    130 |      0 |      1 | s03      | R    |
| 30460002 |    159 |     77 |     24 |     3 |    0 |     42 |    1 |    0 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |     67 |     92 |      15 |       1 |       0 |       4 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      3 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      5 |        2 |        8 |        5 |        4 |        5 |        3 |       0 |        3 |       12 |       13 |       10 |        7 |        4 |       1 |        0 |        0 |        3 |        1 |        3 |        4 |       1 |        1 |        2 |        2 |        3 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       15 |        4 |        5 |        2 |        0 |       0 |        3 |       13 |        8 |        1 |        2 |        3 |       0 |      0 |      0 |      9 |     10 |      2 |      2 |      4 |     50 |      0 |      0 |      0 |      1 |      5 |      3 |      1 |      1 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |      7 |      3 |      0 |      0 |     39 |      0 |      1 | s03      | R    |
| 30470001 |    298 |    156 |     44 |     7 |    0 |     86 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    130 |    168 |      19 |       5 |       0 |       9 |      6 |      0 |      0 |      4 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      8 |      3 |      0 |      0 |      1 |       4 |       5 |       0 |       2 |      4 |      7 |      0 |      5 |        2 |       10 |       14 |       12 |        8 |        8 |       8 |        5 |       13 |       20 |       15 |       16 |       15 |      10 |        2 |        2 |        4 |        6 |        2 |        4 |       2 |        0 |        1 |        5 |        3 |        4 |        6 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       12 |       11 |       10 |        7 |        3 |       0 |        8 |       13 |       14 |        9 |        4 |        4 |       0 |      0 |      2 |     26 |     14 |      7 |      1 |      5 |    101 |      0 |      0 |      0 |      4 |      5 |      4 |      0 |      3 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     13 |      2 |      0 |      4 |     65 |      0 |      1 | s03      | R    |
| 30470002 |     28 |     19 |      7 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |     24 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |       16 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 30470003 |      6 |      1 |      2 |     0 |    0 |      2 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 30470004 |    448 |    231 |     81 |     6 |    0 |    113 |    5 |    0 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    204 |    244 |      35 |      10 |       0 |      11 |     10 |      1 |      0 |      9 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      3 |      0 |      7 |      0 |      0 |      0 |      0 |       4 |       2 |       0 |       5 |      6 |      3 |      0 |      6 |        1 |       15 |       31 |       21 |       16 |        8 |       3 |        6 |       29 |       31 |       30 |       20 |        9 |      11 |        1 |        9 |        7 |       10 |        9 |        6 |       2 |        0 |        5 |        3 |        7 |       10 |        9 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       19 |       18 |       11 |        9 |        4 |       1 |        6 |       17 |       24 |       10 |       11 |        3 |       0 |      0 |      3 |     19 |     28 |     15 |      9 |      8 |    149 |      0 |      0 |      0 |      6 |     13 |      7 |      4 |      2 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     13 |      3 |      1 |      2 |     91 |      0 |      1 | s03      | R    |
| 30480001 |    572 |    313 |     74 |    16 |    0 |    145 |    2 |    2 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    263 |    309 |      53 |       6 |       0 |      20 |     10 |      4 |      0 |      5 |      2 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      6 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |       5 |       2 |       0 |      11 |     10 |      3 |      0 |      2 |        7 |       18 |       29 |       29 |       15 |       14 |      11 |       14 |       28 |       42 |       48 |       26 |       19 |      13 |        2 |        6 |       13 |       12 |       11 |        1 |       0 |        2 |        2 |        5 |        5 |       10 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       22 |       22 |       23 |        8 |       11 |       0 |       17 |       23 |       17 |       15 |        8 |        9 |       1 |      0 |      1 |     24 |     47 |     27 |      7 |     10 |    197 |      0 |      0 |      1 |     10 |     10 |      9 |      3 |      6 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     22 |      5 |      1 |      0 |    141 |      0 |      1 | s03      | R    |
| 30480002 |    175 |     95 |     30 |     6 |    0 |     41 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     84 |     91 |      19 |       5 |       0 |       9 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       5 |       3 |       0 |       1 |      2 |      4 |      0 |      1 |        3 |        6 |       13 |       11 |        6 |        6 |       0 |        4 |       16 |        2 |       11 |       12 |        4 |       1 |        3 |        3 |        2 |        0 |        2 |        1 |       1 |        0 |        1 |        5 |        6 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       13 |        4 |        4 |        1 |        2 |       0 |        3 |        9 |        7 |        3 |        0 |        0 |       1 |      0 |      0 |     10 |     20 |      9 |      3 |      2 |     51 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      3 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |     11 |      2 |      0 |      0 |     31 |      0 |      1 | s03      | R    |
| 30480003 |    118 |     79 |     18 |     1 |    0 |     19 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     52 |     66 |      10 |       6 |       0 |       3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      4 |      0 |      3 |        3 |        5 |        7 |       10 |        4 |        5 |       1 |        6 |        5 |       12 |       12 |        1 |        6 |       2 |        1 |        2 |        2 |        2 |        0 |        3 |       0 |        0 |        0 |        2 |        1 |        1 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        2 |        1 |       0 |        1 |        1 |        2 |        1 |        6 |        2 |       1 |      0 |      1 |     10 |     11 |      4 |      2 |      4 |     47 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      1 |      1 |      0 |     13 |      0 |      1 | s03      | R    |
| 30490001 |    189 |    100 |     21 |     4 |    0 |     62 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     84 |    105 |      18 |       4 |       0 |      10 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      1 |      0 |     14 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |     20 |      5 |      0 |      6 |        1 |        5 |        9 |        6 |        9 |        5 |       1 |        1 |       12 |       16 |       10 |       13 |        8 |       4 |        1 |        1 |        2 |        5 |        1 |        2 |       2 |        0 |        0 |        2 |        3 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        8 |        5 |        5 |        3 |        5 |       0 |        7 |        6 |        6 |       11 |        3 |        1 |       0 |      0 |      0 |      5 |     18 |      5 |      2 |      1 |     69 |      0 |      0 |      0 |      3 |      2 |      1 |      1 |      2 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |      9 |      4 |      1 |      0 |     42 |      0 |      1 | s03      | R    |
| 30490002 |    460 |    270 |     54 |     7 |    0 |    118 |    0 |    2 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    218 |    242 |      37 |       6 |       0 |      16 |      7 |      0 |      0 |      6 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     28 |      1 |      0 |     16 |      0 |      0 |      0 |      0 |       2 |       5 |       0 |      10 |     17 |      2 |      0 |      6 |        7 |       15 |       32 |       29 |       17 |       12 |       9 |        8 |       22 |       34 |       38 |       19 |       18 |      10 |        2 |        7 |        7 |        5 |        4 |        2 |       2 |        0 |        3 |        5 |        3 |        4 |        5 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       23 |       15 |       13 |       11 |        2 |       1 |        8 |       19 |        9 |       20 |        4 |        8 |       0 |      0 |      0 |     30 |     49 |     24 |      7 |      7 |    153 |      0 |      0 |      0 |      4 |      3 |      5 |      2 |      1 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     17 |     21 |      6 |      7 |      3 |     79 |      0 |      1 | s03      | R    |
| 30500001 |    667 |    400 |     81 |    14 |    0 |    155 |    4 |    1 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    284 |    383 |      65 |       9 |       0 |      16 |     14 |      3 |      0 |      3 |      5 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     14 |      3 |      0 |     28 |      0 |      0 |      0 |      0 |       5 |       1 |       0 |       5 |     16 |      9 |      0 |     14 |       11 |       29 |       33 |       34 |       12 |       20 |      14 |       16 |       46 |       56 |       60 |       23 |       30 |      16 |        3 |        5 |        8 |        4 |        5 |        8 |       4 |        0 |        4 |        7 |       12 |        7 |        6 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       24 |       26 |       19 |        8 |        9 |       2 |       10 |       21 |       17 |       18 |       10 |       15 |       1 |      0 |      5 |     38 |     83 |     28 |      8 |     12 |    226 |      0 |      0 |      0 |      5 |     15 |      5 |      1 |      5 |     50 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     35 |     15 |      1 |     12 |    102 |      0 |      1 | s03      | R    |
| 30500002 |      2 |      2 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 30501001 |    841 |    433 |    192 |    14 |    0 |    179 |    7 |    2 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    374 |    467 |      22 |      13 |       0 |      10 |     17 |      7 |      0 |      9 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |     24 |      8 |      0 |     40 |      4 |      0 |      0 |      1 |       1 |       1 |       0 |       1 |     15 |      2 |      0 |      4 |        2 |       14 |       26 |       15 |       39 |       67 |       4 |        6 |       21 |       22 |       40 |       49 |      123 |       5 |        1 |        8 |       13 |       17 |       35 |       31 |       1 |        0 |        2 |       11 |       10 |       22 |       40 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       12 |       16 |       27 |       13 |       27 |       0 |        6 |       19 |       19 |       26 |       19 |       26 |       0 |      0 |      5 |     68 |     61 |     35 |     18 |     20 |    226 |      0 |      0 |      1 |     22 |     27 |     25 |     11 |      9 |     97 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     40 |     20 |     10 |      6 |      2 |    134 |      0 |      1 | s03      | R    |
| 30501002 |      4 |      2 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 30510001 |    223 |     79 |     66 |     6 |    0 |     64 |    2 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     85 |    138 |      13 |       7 |       0 |       7 |      4 |      3 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        9 |       10 |        3 |        1 |        0 |       0 |        5 |       22 |       17 |        7 |        2 |        1 |       0 |        4 |       10 |       11 |        2 |        0 |        1 |       1 |       11 |       13 |        9 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       13 |        9 |        3 |        0 |        0 |       0 |       11 |       19 |       15 |        1 |        1 |        0 |       0 |      0 |      1 |      7 |      6 |      0 |      0 |      0 |     65 |      0 |      0 |      1 |      6 |      4 |      0 |      0 |      0 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     71 |      0 |      1 | s03      | R    |
| 30510002 |    204 |    136 |     22 |     2 |    0 |     40 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     78 |    126 |      24 |       3 |       0 |       4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       7 |      5 |      0 |      0 |      2 |        6 |        7 |        8 |       10 |        8 |        9 |       1 |       10 |       13 |       18 |       22 |       11 |       11 |       2 |        2 |        3 |        1 |        2 |        0 |        1 |       0 |        1 |        3 |        2 |        2 |        1 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        4 |        4 |        5 |        1 |        4 |       0 |        8 |        2 |        9 |        4 |        1 |        2 |       0 |      0 |      0 |     20 |     26 |     10 |      5 |      7 |     68 |      0 |      0 |      1 |      5 |      1 |      3 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     11 |      1 |      1 |      0 |     19 |      0 |      1 | s03      | R    |
| 30511000 |    203 |     93 |     37 |     7 |    0 |     50 |    2 |    1 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    103 |    100 |       7 |       3 |       0 |       1 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      2 |        3 |        7 |       12 |       12 |        6 |        0 |       0 |        5 |       15 |       13 |       12 |        6 |        2 |       0 |        1 |        9 |        3 |        3 |        6 |        1 |       0 |        0 |        4 |        1 |        5 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       20 |        8 |        5 |        1 |        2 |       0 |        2 |       10 |        9 |       10 |        1 |        1 |       0 |      0 |      0 |      6 |      7 |      2 |      1 |      0 |     77 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      0 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |      8 |      1 |      0 |      2 |     50 |      0 |      1 | s03      | R    |
| 30540000 |    759 |    399 |    144 |    15 |    0 |    181 |    4 |    2 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    349 |    410 |      49 |      15 |       0 |      19 |     20 |      2 |      0 |      9 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      6 |      6 |      0 |     26 |      3 |      0 |      0 |      0 |       5 |       2 |       0 |       4 |     20 |      8 |      0 |     11 |        6 |       21 |       23 |       52 |       21 |       23 |      14 |       11 |       39 |       40 |       60 |       35 |       28 |      26 |        1 |       12 |       15 |        8 |       13 |       22 |       8 |        2 |       14 |       11 |        8 |       14 |        9 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       32 |       26 |       22 |       16 |        6 |       1 |        8 |       29 |       22 |       21 |       15 |       10 |       1 |      0 |      3 |     24 |     61 |     25 |      8 |     11 |    267 |      0 |      0 |      0 |     13 |     17 |      9 |      7 |     14 |     84 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     26 |     28 |     10 |      3 |      6 |    140 |      0 |      1 | s03      | R    |
| 30541000 |    668 |    304 |    173 |     8 |    0 |    158 |    4 |    4 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    338 |    330 |      28 |      10 |       0 |      14 |     20 |      6 |      0 |      8 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      3 |      5 |      0 |      5 |      2 |      1 |      0 |      0 |       1 |       0 |       0 |       2 |      5 |      0 |      0 |      5 |        9 |       25 |       19 |       29 |       29 |       18 |       8 |       12 |       39 |       33 |       23 |       38 |       18 |       4 |        1 |       11 |       13 |       18 |       26 |       17 |       6 |        2 |       12 |        9 |       19 |       16 |       16 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       28 |       22 |       26 |       12 |       12 |       0 |       14 |       18 |       17 |       19 |        8 |        6 |       0 |      0 |      4 |     44 |     29 |     13 |      5 |      5 |    204 |      0 |      0 |      1 |     17 |     23 |     11 |      6 |      5 |    110 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     27 |     21 |      6 |      2 |      2 |    131 |      0 |      1 | s03      | R    |
| 30550001 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 30550002 |    911 |    567 |     87 |    19 |    0 |    225 |    3 |    2 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    360 |    551 |      66 |      14 |       0 |      38 |      8 |      2 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |      4 |      0 |     18 |     13 |      1 |      0 |      3 |      11 |       3 |       0 |      10 |     21 |      4 |      0 |     13 |       25 |       37 |       48 |       43 |       31 |       22 |       2 |       59 |       85 |       84 |       69 |       38 |       20 |       4 |        2 |       14 |       14 |        5 |        8 |        4 |       0 |        2 |        6 |        7 |        8 |       12 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |       20 |       26 |       23 |        8 |        7 |       1 |       31 |       33 |       35 |       32 |       10 |       10 |       1 |      0 |      8 |     83 |     69 |     22 |      7 |      5 |    373 |      0 |      0 |      0 |      9 |      7 |      9 |      1 |      2 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     43 |     30 |      8 |      0 |      3 |    169 |      0 |      1 | s03      | R    |
| 30560001 |    331 |    182 |     48 |     8 |    0 |     87 |    1 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    144 |    187 |      27 |       7 |       0 |      10 |      2 |      1 |      0 |      2 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     28 |      5 |      0 |     36 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       5 |      9 |      1 |      0 |      6 |       11 |       11 |        6 |        9 |        9 |       12 |       6 |        7 |       16 |       16 |       26 |       17 |       20 |      16 |        0 |        2 |        4 |        7 |        6 |        6 |       3 |        2 |        2 |        2 |        2 |        2 |        4 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        5 |       15 |       11 |       10 |        7 |       1 |       10 |        7 |       10 |        9 |        6 |        7 |       0 |      0 |      0 |     12 |     33 |     12 |      4 |      6 |    115 |      0 |      0 |      0 |      1 |      8 |      5 |      1 |      3 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |     23 |      7 |      0 |      1 |     59 |      0 |      1 | s03      | R    |
| 30560002 |    297 |    165 |     33 |     8 |    0 |     78 |    3 |    0 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    131 |    166 |      26 |       3 |       0 |      13 |      5 |      1 |      0 |      1 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     10 |      3 |      0 |      8 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       1 |      8 |      1 |      0 |      3 |        5 |        4 |       14 |       17 |       13 |        4 |       7 |        7 |       14 |       24 |       19 |       12 |       11 |      14 |        1 |        1 |        5 |        4 |        4 |        3 |       1 |        0 |        4 |        2 |        2 |        3 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        9 |       14 |        6 |        8 |        6 |       0 |        3 |       12 |       15 |        8 |       10 |        3 |       0 |      0 |      1 |     12 |     28 |      8 |      0 |      4 |    112 |      0 |      0 |      0 |      4 |      7 |      2 |      1 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     12 |      6 |      1 |      2 |     63 |      0 |      1 | s03      | R    |
| 30570001 |    600 |    325 |     94 |    10 |    0 |    151 |    5 |    1 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    281 |    319 |      33 |       4 |       0 |      14 |     17 |      5 |      0 |     11 |      0 |      2 |      0 |      1 |      2 |      0 |      0 |      1 |     10 |      7 |      0 |     13 |      5 |      0 |      0 |      1 |       3 |       2 |       0 |       2 |      7 |      5 |      0 |      8 |       10 |       29 |       34 |       27 |       28 |        9 |       3 |       10 |       35 |       47 |       35 |       28 |       26 |       4 |        4 |        6 |       10 |        7 |        8 |       11 |       3 |        2 |        5 |       13 |        8 |        7 |        7 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       23 |       25 |       22 |       10 |        5 |       2 |        8 |       25 |       23 |       18 |       10 |        5 |       0 |      0 |      5 |     37 |     37 |     17 |     13 |      6 |    210 |      0 |      0 |      1 |      6 |     17 |      5 |      4 |      2 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     25 |      9 |      3 |      2 |    121 |      0 |      1 | s03      | R    |
| 30570002 |      5 |      4 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 30570003 |    234 |    128 |     37 |     5 |    0 |     56 |    2 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    103 |    131 |       7 |       5 |       0 |      11 |     11 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      4 |      0 |      8 |      4 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |      3 |      4 |      0 |      1 |        3 |        8 |        6 |       11 |        9 |       12 |       1 |        1 |       10 |       14 |       18 |       18 |       16 |       1 |        0 |        2 |        6 |        5 |        4 |        0 |       0 |        0 |        2 |        2 |        5 |        5 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |       14 |        7 |        4 |        6 |        5 |       0 |        2 |        7 |        7 |        6 |        8 |        2 |       1 |      0 |      0 |     12 |     24 |     13 |      4 |      6 |     69 |      0 |      0 |      1 |      5 |     10 |      6 |      0 |      2 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     13 |     10 |      4 |      1 |      2 |     37 |      0 |      1 | s03      | R    |
| 31000000 |    558 |    373 |     19 |     4 |    0 |    115 |    3 |    6 |    38 |    0 |    0 |    0 |    0 |    0 |    0 |    228 |    330 |       5 |       0 |       0 |       8 |      8 |      1 |      0 |      7 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       7 |       3 |       0 |       1 |      3 |      0 |      0 |      3 |        6 |       19 |       26 |       32 |       11 |       28 |      13 |       19 |       35 |       35 |       43 |       31 |       46 |      29 |        0 |        2 |        2 |        2 |        4 |        0 |       0 |        1 |        2 |        2 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       37 |       14 |       13 |        7 |        4 |       0 |       10 |       34 |       13 |       16 |        3 |        7 |       0 |      0 |      3 |     51 |     54 |     20 |      9 |     19 |    217 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     22 |     22 |      2 |      1 |      2 |    113 |      0 |      1 | s03      | R    |
| 31010001 |    294 |    193 |      6 |     2 |    0 |     69 |    2 |    1 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    129 |    165 |       6 |       0 |       0 |       8 |      8 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |       13 |        8 |       15 |       12 |       16 |        9 |       5 |        5 |       26 |       26 |       20 |       16 |       10 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       24 |       13 |        4 |        2 |        0 |       0 |       10 |       14 |       11 |        4 |        5 |        0 |       0 |      0 |      0 |     29 |     25 |     15 |      6 |     10 |    108 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      9 |      2 |      1 |      0 |     74 |      0 |      1 | s03      | R    |
| 31010002 |    204 |    132 |      6 |     2 |    0 |     40 |    3 |    2 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |     97 |    107 |       1 |       0 |       0 |       2 |      7 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       7 |      1 |      0 |      0 |      1 |        3 |        7 |       14 |       13 |        9 |        5 |       5 |        2 |        9 |       23 |       11 |       12 |       10 |       9 |        0 |        1 |        0 |        0 |        1 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       14 |       14 |        6 |        1 |        0 |       0 |        6 |       15 |        2 |        6 |        0 |        0 |       0 |      0 |      0 |     19 |     19 |     12 |      1 |      5 |     76 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     12 |      2 |      1 |      2 |     41 |      0 |      1 | s03      | R    |
| 31011000 |    521 |    363 |      6 |    13 |    0 |    100 |    3 |    5 |    31 |    0 |    0 |    0 |    0 |    0 |    0 |    197 |    324 |      23 |       0 |       0 |       7 |      5 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      3 |      0 |      0 |      2 |        8 |       24 |       35 |       23 |       20 |       12 |       9 |       23 |       39 |       43 |       49 |       28 |       27 |      23 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       16 |       14 |       12 |        9 |        1 |       1 |       15 |       37 |       14 |       14 |        5 |        4 |       0 |      0 |      4 |     45 |     60 |     32 |      7 |     16 |    199 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     19 |      4 |      2 |      0 |    104 |      0 |      1 | s03      | R    |
| 31020001 |      9 |      7 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      8 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 31020002 |    643 |    398 |     17 |     9 |    0 |    148 |    5 |    7 |    59 |    0 |    0 |    0 |    0 |    0 |    0 |    258 |    385 |      12 |       3 |       0 |       7 |     16 |      0 |      0 |     15 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      3 |      0 |      0 |     13 |      6 |      1 |      0 |      7 |       2 |       0 |       0 |       0 |      6 |      0 |      0 |      3 |        8 |       26 |       35 |       36 |       20 |       16 |      11 |       18 |       42 |       40 |       58 |       34 |       34 |      20 |        0 |        0 |        2 |        2 |        0 |        3 |       1 |        0 |        2 |        2 |        2 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       42 |       16 |       17 |        8 |        6 |       0 |       17 |       57 |       19 |       28 |        6 |        3 |       0 |      0 |      3 |     50 |     54 |     23 |      8 |     12 |    248 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     39 |     37 |      9 |      2 |      1 |    140 |      0 |      1 | s03      | R    |
| 31030000 |    708 |    466 |     26 |     3 |    0 |    165 |    6 |   11 |    31 |    0 |    0 |    0 |    0 |    0 |    0 |    288 |    420 |      10 |       0 |       0 |       6 |     17 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      3 |      2 |      0 |      0 |      2 |       0 |       0 |       0 |       2 |      3 |      0 |      0 |      1 |       11 |       24 |       30 |       50 |       25 |       19 |      11 |       16 |       37 |       46 |       80 |       48 |       40 |      29 |        1 |        3 |        5 |        4 |        2 |        2 |       1 |        0 |        3 |        0 |        0 |        1 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       35 |       28 |       16 |       10 |        2 |       0 |       12 |       31 |       34 |       23 |       11 |        5 |       0 |      0 |      2 |     62 |     72 |     13 |     16 |     21 |    280 |      0 |      0 |      0 |      4 |      3 |      1 |      1 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     34 |     32 |      9 |      2 |      0 |    132 |      0 |      1 | s03      | R    |
| 31040000 |    763 |    527 |     28 |     4 |    0 |    146 |    3 |    5 |    50 |    0 |    0 |    0 |    0 |    0 |    0 |    304 |    459 |      22 |       2 |       0 |      10 |      5 |      0 |      0 |     11 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |      3 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |       0 |       1 |       0 |       2 |      0 |      0 |      0 |      1 |       12 |       22 |       46 |       44 |       23 |       29 |      20 |       29 |       59 |       60 |       52 |       40 |       42 |      49 |        2 |        2 |        5 |        0 |        4 |        1 |       1 |        0 |        2 |        7 |        1 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       31 |       24 |       16 |        9 |        5 |       2 |       16 |       32 |       33 |       17 |       15 |        2 |       0 |      0 |      3 |     62 |     82 |     23 |     11 |     18 |    328 |      0 |      0 |      1 |      4 |      4 |      0 |      0 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     36 |     26 |      3 |      0 |      1 |    139 |      0 |      1 | s03      | R    |
| 31050001 |     65 |     43 |      3 |     1 |    0 |     18 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     26 |     39 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        1 |        4 |        4 |        3 |       2 |        1 |        6 |        6 |        6 |        0 |        1 |       5 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        0 |        2 |        0 |        0 |       0 |        0 |        3 |        3 |        7 |        0 |        0 |       0 |      0 |      1 |      5 |      5 |      2 |      1 |      1 |     28 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |     12 |      0 |      1 | s03      | R    |
| 31050002 |    586 |    426 |     14 |     6 |    0 |    110 |    2 |    6 |    22 |    0 |    0 |    0 |    0 |    0 |    0 |    217 |    369 |      16 |       0 |       0 |       7 |      8 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      3 |      0 |      1 |      7 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |       24 |       25 |       31 |       22 |       24 |      12 |       19 |       44 |       62 |       50 |       45 |       30 |      34 |        0 |        1 |        1 |        1 |        2 |        0 |       2 |        3 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       27 |       12 |       13 |        3 |        7 |       1 |       16 |       36 |       14 |        4 |        5 |        3 |       0 |      0 |      3 |     44 |     73 |     33 |      5 |     25 |    243 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      2 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     18 |     18 |      4 |      2 |      1 |     99 |      0 |      1 | s03      | R    |
| 31060001 |    309 |    193 |      2 |     8 |    0 |     71 |    1 |    2 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    129 |    180 |       5 |       0 |       0 |       7 |     12 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |       1 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |        6 |       14 |       21 |       13 |        8 |        7 |       6 |       18 |       21 |       19 |       23 |       14 |       11 |      12 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       20 |        8 |        9 |        3 |        2 |       0 |       16 |       28 |        7 |        6 |        4 |        0 |       0 |      0 |      3 |     30 |     29 |      8 |      1 |      9 |    113 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |      9 |      2 |      1 |      1 |     80 |      0 |      1 | s03      | R    |
| 31060002 |    444 |    301 |      7 |     5 |    0 |     93 |    2 |    1 |    35 |    0 |    0 |    0 |    0 |    0 |    0 |    178 |    266 |      10 |       1 |       0 |      10 |      7 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |       2 |       1 |       0 |       2 |      3 |      0 |      0 |      2 |        7 |       13 |       19 |       23 |       21 |        9 |      14 |       14 |       21 |       38 |       52 |       20 |       16 |      34 |        0 |        2 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       32 |       17 |        6 |        1 |        3 |       0 |       13 |       35 |        7 |        9 |        2 |        2 |       1 |      0 |      2 |     25 |     52 |     15 |      2 |      9 |    196 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     17 |     16 |      0 |      1 |      1 |     96 |      0 |      1 | s03      | R    |
| 31061000 |    461 |    316 |     15 |     5 |    0 |     93 |    2 |    2 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    213 |    248 |       7 |       1 |       0 |       8 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      1 |      0 |      2 |      0 |      0 |      0 |      2 |       0 |       1 |       0 |       2 |      1 |      0 |      0 |      3 |       12 |       16 |       32 |       16 |       25 |       18 |      15 |       14 |       28 |       30 |       36 |       24 |       20 |      30 |        0 |        2 |        0 |        3 |        0 |        1 |       2 |        1 |        1 |        2 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       27 |       12 |       11 |        2 |        1 |       1 |       14 |       19 |       14 |        6 |        4 |        2 |       0 |      0 |      0 |     35 |     52 |     20 |      3 |      4 |    202 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     15 |     14 |      6 |      3 |      1 |     88 |      0 |      1 | s03      | R    |
| 31070001 |    478 |    330 |     10 |     5 |    0 |     85 |    3 |    2 |    43 |    0 |    0 |    0 |    0 |    0 |    0 |    182 |    296 |       5 |       0 |       0 |       9 |      6 |      1 |      0 |      8 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |       1 |       0 |       0 |       1 |      3 |      0 |      0 |      0 |        8 |       24 |       18 |       23 |       12 |       22 |       9 |       13 |       44 |       30 |       26 |       29 |       54 |      18 |        0 |        3 |        1 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       26 |        8 |        7 |        5 |        4 |       0 |       17 |       36 |        9 |        8 |        4 |        3 |       0 |      0 |      6 |     39 |     46 |     14 |      8 |     20 |    197 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     23 |     18 |      1 |      0 |      0 |     93 |      0 |      1 | s03      | R    |
| 31070002 |    206 |    137 |      3 |     2 |    0 |     45 |    1 |    1 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |     94 |    112 |       3 |       0 |       0 |       3 |      5 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        4 |        8 |       12 |       11 |       10 |       12 |       4 |        2 |       13 |       15 |       12 |       13 |        9 |      12 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       17 |        7 |        3 |        1 |        0 |       0 |        5 |       16 |        9 |        5 |        0 |        0 |       0 |      0 |      1 |     16 |     18 |      8 |      1 |      3 |     90 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      6 |      0 |      0 |      0 |     52 |      0 |      1 | s03      | R    |
| 31080000 |    679 |    414 |     22 |     5 |    0 |    146 |    5 |    2 |    85 |    0 |    0 |    0 |    0 |    0 |    0 |    301 |    378 |      28 |       5 |       0 |      10 |     26 |      0 |      0 |     13 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      5 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      2 |      0 |      0 |      1 |       10 |       32 |       36 |       46 |       22 |       12 |      13 |       17 |       51 |       44 |       54 |       28 |       24 |      25 |        3 |        4 |        2 |        2 |        2 |        1 |       1 |        0 |        1 |        1 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       48 |       27 |       11 |       10 |        3 |       1 |       21 |       50 |       27 |       15 |       11 |        3 |       1 |      0 |      5 |     53 |     56 |     30 |      9 |      8 |    253 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     46 |     34 |      2 |      3 |      2 |    149 |      0 |      1 | s03      | R    |
| 31090000 |    778 |    422 |     40 |     9 |    0 |    217 |   10 |    3 |    77 |    0 |    0 |    0 |    0 |    0 |    0 |    375 |    403 |      28 |       0 |       0 |      15 |     26 |      2 |      0 |     20 |      2 |      2 |      0 |      1 |      2 |      1 |      0 |      4 |      6 |      0 |      0 |      6 |      1 |      0 |      0 |      1 |       1 |       0 |       0 |       2 |      7 |      1 |      0 |      4 |       24 |       61 |       36 |       26 |       22 |        7 |      11 |       23 |       88 |       42 |       29 |       18 |       16 |      19 |        2 |       12 |        5 |        2 |        1 |        1 |       2 |        0 |        7 |        2 |        1 |        2 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |       84 |       36 |       16 |        5 |        1 |       1 |       27 |       82 |       30 |        5 |        5 |        3 |       1 |      0 |      6 |     63 |     62 |     24 |      9 |     13 |    245 |      0 |      0 |      1 |      3 |      4 |      2 |      0 |      0 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     54 |     42 |      7 |      5 |      0 |    201 |      0 |      1 | s03      | R    |
| 31100000 |    614 |    414 |     15 |    12 |    0 |    125 |    1 |    6 |    41 |    0 |    0 |    0 |    0 |    0 |    0 |    277 |    337 |      15 |       0 |       0 |       3 |     18 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      3 |      4 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |       11 |       36 |       34 |       30 |       21 |       15 |      20 |       20 |       48 |       46 |       44 |       27 |       26 |      36 |        1 |        1 |        4 |        1 |        0 |        3 |       1 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       39 |       24 |       20 |        3 |        0 |       0 |       11 |       32 |       25 |        8 |        7 |        2 |       1 |      0 |      0 |     40 |     49 |     35 |      7 |     10 |    273 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     41 |     24 |      5 |      3 |      0 |    111 |      0 |      1 | s03      | R    |
| 31110000 |    664 |    411 |     21 |     4 |    0 |    163 |   10 |    4 |    51 |    0 |    0 |    0 |    0 |    0 |    0 |    294 |    370 |      11 |       0 |       0 |      16 |     19 |      2 |      0 |     17 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      3 |      2 |      0 |      5 |      2 |      0 |      0 |      2 |       2 |       0 |       0 |       0 |      2 |      1 |      0 |      5 |       14 |       35 |       32 |       29 |       18 |       15 |      14 |       17 |       57 |       50 |       39 |       34 |       21 |      36 |        0 |        1 |        2 |        2 |        4 |        2 |       2 |        0 |        1 |        2 |        3 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |       63 |       18 |       12 |       10 |        1 |       0 |       16 |       60 |       13 |       13 |        3 |        3 |       0 |      0 |      4 |     51 |     61 |     20 |      7 |     12 |    256 |      0 |      0 |      0 |      2 |      3 |      3 |      1 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     46 |     27 |      4 |      0 |      0 |    153 |      0 |      1 | s03      | R    |
| 31120000 |    696 |    448 |     15 |    15 |    0 |    148 |    7 |    7 |    56 |    0 |    0 |    0 |    0 |    0 |    0 |    305 |    391 |       8 |       0 |       0 |      11 |     12 |      1 |      0 |     12 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |       2 |       0 |       0 |       3 |      3 |      0 |      0 |      2 |       17 |       30 |       34 |       42 |       19 |       26 |      15 |       22 |       47 |       44 |       52 |       27 |       40 |      33 |        1 |        1 |        2 |        3 |        1 |        2 |       1 |        0 |        2 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       48 |       25 |       13 |        7 |        4 |       2 |       18 |       52 |       26 |       18 |        5 |        2 |       1 |      0 |      4 |     36 |     80 |     37 |      7 |     10 |    274 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     39 |     15 |      8 |      1 |      0 |    165 |      0 |      1 | s03      | R    |
| 31130000 |    489 |    318 |     12 |     5 |    0 |    116 |    1 |    1 |    36 |    0 |    0 |    0 |    0 |    0 |    0 |    213 |    276 |       6 |       0 |       0 |       4 |     12 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |       15 |       36 |       18 |       20 |       12 |       12 |      16 |       15 |       39 |       31 |       41 |       19 |       24 |      20 |        0 |        2 |        2 |        2 |        0 |        0 |       1 |        1 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       38 |       11 |       10 |        3 |        3 |       1 |       16 |       39 |       13 |        4 |        5 |        3 |       2 |      0 |      3 |     50 |     43 |     14 |     12 |     16 |    180 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |     16 |      4 |      2 |      0 |    119 |      0 |      1 | s03      | R    |
| 31140001 |    263 |    188 |      2 |     3 |    0 |     55 |    1 |    1 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    109 |    154 |       9 |       0 |       0 |       6 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        7 |       18 |       16 |        8 |       12 |       6 |        8 |       16 |       13 |       27 |       13 |       19 |      19 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       15 |        8 |        2 |        4 |        2 |       0 |        4 |       21 |        4 |        3 |        3 |        4 |       0 |      0 |      3 |     19 |     31 |     11 |      5 |      3 |    116 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      9 |      2 |      4 |      0 |     47 |      0 |      1 | s03      | R    |
| 31140002 |    506 |    333 |     16 |     5 |    0 |    121 |    2 |    3 |    26 |    0 |    0 |    0 |    0 |    0 |    0 |    215 |    291 |      12 |       0 |       0 |       8 |      5 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |       11 |       29 |       25 |       23 |       20 |       13 |      10 |       17 |       36 |       49 |       32 |       16 |       32 |      20 |        1 |        1 |        0 |        2 |        6 |        2 |       0 |        1 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       31 |       21 |        9 |        1 |        3 |       0 |       16 |       34 |       20 |        9 |        5 |        1 |       0 |      0 |      3 |     47 |     51 |     16 |      5 |     10 |    201 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     31 |     17 |      6 |      2 |      0 |     99 |      0 |      1 | s03      | R    |
| 31150000 |    666 |    460 |     19 |     9 |    0 |    125 |    3 |    6 |    44 |    0 |    0 |    0 |    0 |    0 |    0 |    268 |    398 |      24 |       1 |       0 |      11 |     11 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      8 |      1 |      0 |      2 |       7 |       4 |       0 |       4 |      0 |      0 |      0 |      1 |       13 |       27 |       28 |       41 |       17 |       28 |      15 |       26 |       52 |       53 |       64 |       27 |       34 |      35 |        2 |        3 |        2 |        2 |        2 |        2 |       1 |        0 |        3 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       35 |       18 |        9 |        5 |        4 |       0 |       15 |       36 |       25 |       15 |        7 |        4 |       0 |      0 |      6 |     72 |     83 |     29 |     19 |      9 |    242 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     32 |     21 |      3 |      1 |      4 |    123 |      0 |      1 | s03      | R    |
| 31151001 |    466 |    331 |     11 |     8 |    0 |     87 |    4 |    5 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    195 |    271 |       2 |       0 |       0 |       3 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      1 |        7 |       25 |       18 |       32 |       21 |       11 |      15 |       13 |       40 |       35 |       46 |       28 |       27 |      13 |        1 |        1 |        2 |        1 |        0 |        1 |       1 |        0 |        0 |        2 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       21 |       12 |       10 |        7 |        1 |       0 |       11 |       20 |       17 |       12 |        2 |        3 |       0 |      0 |      2 |     43 |     58 |     25 |      3 |     13 |    187 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     23 |     19 |      1 |      2 |      1 |     76 |      0 |      1 | s03      | R    |
| 31151002 |     59 |     43 |      4 |     1 |    0 |      7 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     28 |     31 |       2 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        3 |        4 |        2 |        2 |        2 |       1 |        4 |        3 |        8 |        4 |        3 |        2 |       2 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      5 |      5 |      0 |      1 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      1 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 31170001 |    320 |    222 |     18 |    13 |    0 |     59 |    0 |    5 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    114 |    206 |       8 |       0 |       0 |       4 |      3 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      2 |      0 |      5 |       1 |       2 |       0 |       0 |      0 |      0 |      0 |      1 |        8 |        9 |       14 |       22 |       11 |        8 |       3 |       17 |       24 |       26 |       29 |       13 |       21 |      17 |        1 |        1 |        3 |        2 |        1 |        1 |       0 |        2 |        2 |        3 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |       13 |        5 |        6 |        3 |        1 |       1 |        9 |       19 |        8 |        6 |        3 |        4 |       1 |      0 |      4 |     27 |     32 |     13 |      4 |      6 |    136 |      0 |      0 |      0 |      4 |      3 |      1 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     15 |      1 |      0 |      0 |     44 |      0 |      1 | s03      | R    |
| 31170002 |    141 |     99 |      3 |     6 |    0 |     25 |    0 |    5 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     59 |     82 |       3 |       0 |       0 |       2 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        8 |        7 |        5 |        5 |        4 |       2 |        6 |       13 |        9 |       12 |        8 |       11 |       6 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        9 |        2 |        3 |        1 |        2 |       0 |        5 |        6 |        2 |        2 |        0 |        1 |       0 |      0 |      0 |     16 |     15 |      7 |      0 |      6 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      8 |      0 |      0 |      0 |     28 |      0 |      1 | s03      | R    |
| 31180001 |    458 |    328 |      8 |     4 |    0 |     81 |    4 |    6 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    192 |    266 |      14 |       1 |       0 |       8 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      0 |      0 |      3 |      3 |      0 |      0 |      4 |       3 |       1 |       0 |       4 |      2 |      0 |      0 |      1 |       11 |       17 |       23 |       19 |       23 |       18 |      12 |       14 |       30 |       39 |       39 |       30 |       29 |      24 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       18 |       15 |       16 |        9 |        0 |       1 |        9 |       12 |       23 |        8 |        5 |        1 |       0 |      0 |      2 |     36 |     54 |     16 |      3 |     10 |    207 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     15 |      8 |      3 |      1 |     77 |      0 |      1 | s03      | R    |
| 31180002 |    241 |    170 |      9 |     3 |    0 |     48 |    0 |    3 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |     94 |    147 |       2 |       2 |       0 |       7 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |       0 |       2 |       0 |       2 |      1 |      0 |      0 |      0 |        6 |        5 |       17 |        9 |       14 |       11 |       7 |       13 |       17 |       20 |       17 |        8 |       13 |      13 |        0 |        0 |        1 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |       12 |        4 |        2 |        1 |        1 |       0 |        7 |       21 |        4 |        5 |        3 |        2 |       0 |      0 |      2 |     22 |     27 |      8 |      1 |      6 |    104 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     12 |      0 |      0 |      0 |     38 |      0 |      1 | s03      | R    |
| 32300001 |    592 |    323 |     41 |     9 |    0 |    165 |    3 |    0 |    51 |    0 |    0 |    0 |    0 |    0 |    0 |    271 |    321 |      23 |       1 |       0 |      13 |     30 |      0 |      0 |      8 |      2 |      0 |      0 |      1 |      2 |      1 |      0 |      2 |      5 |      8 |      0 |     23 |      3 |      0 |      0 |      2 |       2 |       0 |       0 |       7 |      3 |      0 |      0 |      0 |        4 |       35 |       42 |       22 |       16 |        8 |       1 |        9 |       52 |       39 |       42 |       36 |       12 |       5 |        0 |       10 |        4 |        3 |        2 |        1 |       3 |        2 |        4 |        2 |        1 |        1 |        5 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       47 |       33 |       13 |       11 |        9 |       1 |       11 |       51 |       15 |       16 |        9 |        5 |       1 |      0 |      0 |     41 |     55 |     23 |      9 |     16 |    179 |      0 |      0 |      0 |      4 |      8 |      1 |      1 |      0 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     30 |      4 |      3 |      5 |    160 |      0 |      1 | s03      | R    |
| 32300002 |    288 |    164 |     19 |     7 |    0 |     66 |    1 |    1 |    30 |    0 |    0 |    0 |    0 |    0 |    0 |    133 |    155 |       8 |       1 |       0 |       7 |      9 |      1 |      0 |      3 |      4 |      1 |      0 |      2 |      1 |      0 |      0 |      2 |      4 |      3 |      0 |      2 |      2 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |       16 |       23 |       15 |        6 |        6 |       0 |        3 |       33 |       23 |       23 |        3 |        7 |       0 |        0 |        1 |        5 |        3 |        0 |        1 |       0 |        1 |        3 |        1 |        0 |        0 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       20 |       12 |        9 |        3 |        3 |       0 |        7 |       26 |        7 |        9 |        4 |        1 |       0 |      0 |      1 |     25 |     33 |      9 |      5 |      4 |     87 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     11 |      0 |      5 |      3 |     72 |      0 |      1 | s03      | R    |
| 32310001 |     57 |     28 |     13 |     0 |    0 |     14 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     34 |     23 |       2 |       0 |       0 |       0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      8 |      0 |      6 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        7 |        1 |        1 |       1 |        1 |        1 |        2 |        3 |        2 |        2 |       2 |        0 |        1 |        2 |        0 |        1 |        1 |       3 |        0 |        0 |        2 |        0 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        3 |        1 |        1 |        2 |       0 |        0 |        0 |        2 |        0 |        2 |        1 |       0 |      0 |      0 |      1 |      1 |      3 |      2 |      5 |     16 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      4 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 32310002 |    751 |    440 |     46 |     9 |    0 |    205 |    6 |    2 |    43 |    0 |    0 |    0 |    0 |    0 |    0 |    305 |    446 |      16 |       1 |       0 |      21 |     23 |      1 |      0 |     17 |      3 |      2 |      0 |      2 |      6 |      1 |      0 |      2 |     34 |      7 |      0 |     26 |      2 |      0 |      0 |      4 |       1 |       1 |       0 |       5 |      3 |      2 |      0 |      3 |        4 |       49 |       41 |       42 |       11 |       11 |       2 |       10 |       78 |       62 |       57 |       39 |       28 |       6 |        1 |        2 |        4 |        5 |        2 |        7 |       3 |        1 |        4 |        2 |        3 |        4 |        4 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       40 |       28 |       15 |       14 |       11 |       2 |       10 |       71 |       30 |       15 |        9 |        9 |       0 |      0 |      4 |     52 |     87 |     30 |      9 |     13 |    245 |      0 |      0 |      0 |      8 |      9 |      4 |      0 |      2 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     35 |     30 |     14 |      4 |      3 |    176 |      0 |      1 | s03      | R    |
| 32320001 |    769 |    407 |     67 |    14 |    0 |    225 |    2 |    2 |    52 |    0 |    0 |    0 |    0 |    0 |    0 |    342 |    427 |      16 |       4 |       0 |       7 |      9 |      1 |      0 |     16 |      5 |      3 |      0 |      3 |      2 |      0 |      0 |      2 |     85 |     36 |      0 |     95 |      1 |      0 |      0 |      0 |      14 |       1 |       0 |       8 |      7 |      1 |      0 |      4 |        4 |       33 |       39 |       35 |       16 |       25 |      11 |       13 |       67 |       50 |       53 |       27 |       16 |      18 |        2 |        7 |        6 |        4 |        5 |        7 |       6 |        1 |        4 |        2 |        3 |        1 |        8 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       40 |       27 |       21 |       16 |       21 |       5 |       17 |       56 |       20 |       33 |       13 |       13 |       1 |      0 |      1 |     67 |     78 |     25 |     15 |     11 |    210 |      0 |      0 |      0 |      5 |      6 |      6 |      0 |      3 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     40 |     50 |     20 |      6 |      3 |    176 |      0 |      1 | s03      | R    |
| 32320002 |     19 |     11 |      1 |     0 |    0 |      6 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |      8 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        2 |        1 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 32330001 |     63 |     31 |      2 |     0 |    0 |     24 |    0 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     22 |     41 |       2 |       0 |       0 |       4 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        4 |        7 |        0 |        1 |       0 |        1 |        3 |        6 |        5 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        6 |        2 |        1 |        0 |        0 |       0 |        0 |       10 |        5 |        2 |        3 |        1 |       0 |      0 |      0 |      6 |      8 |      1 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     23 |      0 |      1 | s03      | R    |
| 32330002 |    452 |    239 |     49 |     1 |    0 |    133 |    4 |    2 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    190 |    262 |       5 |       2 |       0 |       4 |     10 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |      8 |      2 |      0 |      1 |     27 |     17 |      0 |     44 |      0 |      0 |      0 |      1 |       2 |       1 |       0 |       2 |      2 |      0 |      0 |      1 |        5 |       14 |       15 |       25 |       12 |        9 |       8 |        7 |       40 |       34 |       31 |       16 |        8 |      15 |        0 |        2 |        7 |        3 |        6 |        5 |       2 |        0 |        4 |        2 |        4 |        3 |        2 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       16 |       21 |       16 |        7 |       12 |       0 |        6 |       24 |       18 |       15 |       12 |       11 |       1 |      0 |      4 |     30 |     27 |     20 |      4 |     12 |    142 |      0 |      0 |      0 |      2 |      6 |      3 |      1 |      5 |     32 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     18 |     28 |      7 |      8 |      5 |     95 |      0 |      1 | s03      | R    |
| 32500001 |     12 |      9 |      0 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      7 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 32500002 |    616 |    338 |     20 |     8 |    0 |    179 |    4 |    1 |    66 |    0 |    0 |    0 |    0 |    0 |    0 |    275 |    341 |      19 |       0 |       0 |      17 |     18 |      1 |      0 |     17 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      4 |      3 |      0 |      0 |      2 |       0 |       1 |       0 |       3 |      1 |      0 |      0 |      7 |        2 |       37 |       24 |       38 |       15 |        9 |       1 |       12 |       77 |       44 |       42 |       14 |       20 |       3 |        0 |        3 |        3 |        1 |        3 |        0 |       2 |        1 |        2 |        1 |        1 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       66 |       30 |       19 |        7 |        2 |       1 |       16 |       59 |       18 |       17 |        8 |        3 |       0 |      0 |      1 |     45 |     60 |     20 |      1 |      7 |    204 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     37 |     23 |      3 |      2 |      3 |    187 |      0 |      1 | s03      | R    |
| 32510001 |      4 |      4 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 32510002 |    538 |    338 |     30 |     7 |    0 |    120 |    7 |    4 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    246 |    292 |      23 |       0 |       0 |      11 |     12 |      1 |      0 |     14 |      4 |      0 |      0 |      4 |      2 |      0 |      0 |      3 |      6 |      1 |      0 |      5 |      7 |      0 |      0 |      0 |       3 |       1 |       0 |       0 |      4 |      0 |      0 |      1 |        5 |       32 |       52 |       37 |       13 |       10 |       5 |       10 |       56 |       43 |       41 |       22 |        7 |       5 |        1 |        5 |        5 |        4 |        1 |        3 |       1 |        0 |        1 |        4 |        1 |        1 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       31 |       13 |       10 |        6 |        5 |       0 |       12 |       56 |       14 |        5 |        7 |        3 |       1 |      0 |      2 |     64 |     55 |     17 |      6 |      9 |    185 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      2 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     28 |      3 |      3 |      2 |    115 |      0 |      1 | s03      | R    |
| 32511001 |    488 |    314 |     34 |     4 |    0 |    107 |    2 |    0 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    211 |    277 |      18 |       3 |       0 |       9 |     21 |      1 |      0 |     10 |      1 |      1 |      0 |      1 |      5 |      1 |      0 |      3 |      5 |      0 |      0 |      5 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       1 |      2 |      1 |      0 |      3 |        3 |       33 |       34 |       23 |       16 |       10 |       2 |        2 |       54 |       44 |       43 |       34 |       15 |       1 |        0 |        6 |        2 |        4 |        3 |        5 |       0 |        0 |        3 |        6 |        2 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       32 |       20 |        7 |        3 |        2 |       0 |       11 |       31 |        7 |       13 |        6 |        2 |       0 |      0 |      1 |     42 |     58 |     16 |      5 |     13 |    179 |      0 |      0 |      0 |      2 |      9 |      2 |      2 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     18 |     17 |      4 |      2 |      3 |     93 |      0 |      1 | s03      | R    |
| 32511002 |    216 |    121 |      3 |     1 |    0 |     71 |    3 |    0 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    103 |    113 |       3 |       1 |       0 |       8 |      6 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |       6 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        5 |       13 |       16 |        5 |        8 |        4 |       1 |        7 |       21 |       12 |       12 |        9 |        7 |       1 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       30 |        9 |        3 |        3 |        2 |       0 |        9 |       21 |        2 |        5 |        2 |        3 |       1 |      0 |      1 |     21 |     13 |      6 |      4 |      2 |     74 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      8 |      2 |      0 |      1 |     69 |      0 |      1 | s03      | R    |
| 32520001 |    369 |    229 |     18 |     5 |    0 |     84 |    4 |    1 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    165 |    204 |      11 |       1 |       0 |       6 |     11 |      2 |      0 |      8 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      5 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      2 |        2 |       25 |       20 |       23 |       12 |        4 |       1 |        4 |       50 |       29 |       28 |       17 |       14 |       0 |        0 |        5 |        1 |        3 |        0 |        1 |       0 |        2 |        3 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       33 |       19 |        4 |        5 |        4 |       0 |        5 |       29 |        8 |        5 |        5 |        2 |       0 |      0 |      2 |     40 |     30 |      7 |      4 |      8 |    138 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     16 |      4 |      0 |      0 |     85 |      0 |      1 | s03      | R    |
| 32520002 |    631 |    371 |     25 |    10 |    0 |    173 |    4 |    2 |    46 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    353 |      25 |       1 |       0 |      12 |     18 |      0 |      0 |     11 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |      2 |      5 |      1 |      0 |      7 |      1 |      0 |      0 |      2 |       2 |       1 |       0 |       0 |      2 |      0 |      0 |      2 |        6 |       53 |       37 |       26 |       16 |       11 |       1 |        7 |       90 |       50 |       34 |       26 |       10 |       4 |        0 |        6 |        1 |        4 |        0 |        0 |       0 |        1 |       11 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       56 |       33 |       10 |        4 |        4 |       2 |       12 |       66 |       26 |        9 |        2 |        2 |       1 |      0 |      2 |     64 |     58 |     15 |     12 |     15 |    205 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     35 |     24 |      5 |      2 |      1 |    165 |      0 |      1 | s03      | R    |
| 32530001 |    193 |    106 |     23 |     1 |    0 |     46 |    3 |    0 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |     77 |    116 |       6 |       1 |       0 |       7 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      3 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        1 |        4 |        9 |        6 |       10 |        3 |       0 |        3 |       25 |       16 |       12 |       10 |        7 |       0 |        1 |        2 |        3 |        3 |        4 |        2 |       1 |        1 |        3 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       15 |        4 |        2 |        1 |        1 |       0 |        7 |       19 |        5 |        4 |        1 |        0 |       0 |      0 |      1 |     18 |     27 |      5 |      4 |      1 |     50 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      2 |      2 |      0 |      0 |     48 |      0 |      1 | s03      | R    |
| 32530002 |    534 |    333 |     48 |     7 |    0 |    138 |    0 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    200 |    334 |      16 |       1 |       0 |       3 |      2 |      4 |      0 |      4 |     41 |      4 |      0 |     18 |      1 |      0 |      0 |      0 |     51 |     10 |      0 |     79 |      2 |      1 |      0 |      1 |       1 |       1 |       0 |       1 |      1 |      1 |      0 |      2 |        0 |        8 |        7 |        3 |        8 |       84 |       2 |        2 |       10 |        6 |        9 |       10 |      176 |       8 |        0 |        2 |        0 |        0 |        0 |       20 |       0 |        0 |        1 |        1 |        0 |        2 |       20 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |       10 |        1 |        2 |        1 |       51 |       0 |        4 |        8 |        8 |        5 |        3 |       59 |       0 |      0 |      5 |     59 |     78 |     16 |      8 |      5 |    162 |      0 |      0 |      1 |      4 |     13 |      5 |      3 |      1 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     22 |      1 |      0 |      0 |     95 |      0 |      1 | s03      | R    |
| 32530003 |    267 |    145 |     13 |     1 |    0 |     80 |    3 |    1 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    135 |    132 |      14 |       0 |       0 |       6 |      7 |      0 |      0 |      5 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      1 |      0 |      3 |        3 |       21 |       24 |       22 |       10 |        1 |       0 |        3 |       27 |       13 |       11 |        5 |        3 |       2 |        0 |        1 |        4 |        0 |        0 |        1 |       0 |        2 |        2 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       24 |       11 |        7 |        3 |        1 |       0 |        9 |       27 |       12 |        9 |        3 |        1 |       0 |      0 |      1 |     21 |     24 |      4 |      2 |      2 |     91 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |      9 |      1 |      3 |      2 |     77 |      0 |      1 | s03      | R    |
| 32540000 |    677 |    441 |     34 |    10 |    0 |    159 |    2 |    2 |    29 |    0 |    0 |    0 |    0 |    0 |    0 |    292 |    385 |      28 |       1 |       0 |      12 |     17 |      1 |      0 |      4 |      2 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      7 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      3 |      1 |      0 |      0 |        7 |       43 |       36 |       34 |       30 |       13 |       4 |       15 |       81 |       62 |       54 |       40 |       13 |       9 |        1 |        5 |        3 |        3 |        4 |        0 |       0 |        1 |        4 |        6 |        2 |        3 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       51 |       29 |       14 |        7 |        1 |       0 |        9 |       48 |       19 |       10 |        5 |        2 |       0 |      0 |      4 |     83 |     79 |     28 |      5 |      8 |    234 |      0 |      0 |      1 |      4 |      4 |      1 |      0 |      0 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     34 |     21 |      3 |      3 |      2 |    139 |      0 |      1 | s03      | R    |
| 32550000 |    720 |    470 |     55 |    12 |    0 |    146 |    5 |    0 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    308 |    412 |      25 |       0 |       0 |      10 |     17 |      8 |      0 |      9 |      1 |      2 |      0 |      2 |      5 |      0 |      0 |      1 |      8 |      3 |      0 |     10 |      5 |      1 |      0 |      2 |       4 |       0 |       0 |       2 |      3 |      0 |      0 |      2 |        1 |       37 |       51 |       47 |       25 |       18 |       3 |        9 |       72 |       56 |       44 |       57 |       44 |       6 |        1 |        9 |        2 |        0 |        7 |        7 |       3 |        0 |        4 |        3 |        3 |        3 |       11 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       36 |       27 |       13 |       11 |        5 |       0 |        8 |       34 |       25 |       12 |       10 |        9 |       0 |      0 |      5 |     50 |     80 |     35 |      9 |     19 |    272 |      0 |      0 |      0 |      5 |      4 |      5 |      2 |      6 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     30 |     25 |      2 |      2 |      2 |    131 |      0 |      1 | s03      | R    |
| 32551000 |    610 |    385 |     39 |     7 |    0 |    152 |    1 |    0 |    26 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    332 |      24 |       2 |       0 |      14 |     18 |      1 |      0 |     10 |      4 |      0 |      0 |      4 |      3 |      0 |      0 |      2 |     13 |      1 |      0 |      8 |      4 |      1 |      0 |      1 |       0 |       2 |       0 |       0 |      1 |      0 |      0 |      0 |        7 |       32 |       47 |       29 |       24 |       20 |       0 |        8 |       61 |       57 |       47 |       27 |       23 |       3 |        1 |        3 |        5 |        8 |        3 |        1 |       1 |        0 |        3 |        1 |        2 |        2 |        6 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       31 |       35 |       12 |       10 |        3 |       0 |        6 |       39 |       18 |       13 |       11 |        2 |       0 |      0 |      0 |     61 |     69 |     29 |      7 |     12 |    207 |      0 |      0 |      0 |      3 |      6 |      2 |      1 |      5 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     21 |     23 |      5 |      4 |      2 |    128 |      0 |      1 | s03      | R    |
| 32560001 |    796 |    469 |    121 |     9 |    0 |    158 |    0 |    2 |    37 |    0 |    0 |    0 |    0 |    0 |    0 |    298 |    498 |      30 |       1 |       0 |      12 |     33 |     11 |      0 |     10 |      2 |      1 |      0 |      3 |      5 |      0 |      0 |      0 |     10 |      3 |      0 |      8 |      2 |      1 |      0 |      6 |       2 |       0 |       0 |       2 |      3 |      0 |      0 |      0 |        3 |       37 |       38 |       25 |       17 |       43 |       1 |        8 |       66 |       43 |       31 |       19 |      124 |      14 |        0 |        4 |        6 |        1 |        6 |       19 |       4 |        0 |        3 |        4 |        0 |        2 |       64 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       37 |       20 |       10 |        8 |       13 |       0 |       10 |       48 |       18 |       11 |        2 |       20 |       3 |      0 |      6 |     64 |     54 |     23 |      7 |     17 |    298 |      0 |      0 |      3 |     12 |     11 |      5 |      6 |      8 |     76 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     21 |     19 |      5 |      2 |      1 |    153 |      0 |      1 | s03      | R    |
| 32560002 |     55 |     33 |      6 |     3 |    0 |     10 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     42 |     13 |       1 |       0 |       0 |       1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        4 |       11 |        4 |        2 |       0 |        0 |        0 |        1 |        3 |        4 |        0 |       0 |        0 |        1 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        6 |        3 |        2 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |      8 |      4 |      3 |      0 |      0 |     18 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 32570000 |    644 |    377 |     42 |    12 |    0 |    166 |    0 |    3 |    44 |    0 |    0 |    0 |    0 |    0 |    0 |    316 |    328 |      16 |       4 |       0 |       9 |     25 |      1 |      0 |     11 |      1 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      9 |      1 |      0 |     11 |      1 |      0 |      0 |      3 |       3 |       1 |       0 |       1 |      3 |      0 |      0 |      1 |        7 |       48 |       49 |       32 |       23 |       13 |       1 |        5 |       68 |       46 |       38 |       28 |       19 |       0 |        1 |        8 |        3 |        3 |        4 |        5 |       2 |        0 |        2 |        2 |        4 |        1 |        5 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       47 |       30 |       19 |        4 |        9 |       3 |        8 |       49 |       25 |       13 |        7 |        6 |       0 |      0 |      1 |     53 |     63 |     22 |     11 |     15 |    212 |      0 |      0 |      0 |      6 |      4 |      2 |      1 |      1 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     31 |      6 |      6 |      3 |    152 |      0 |      1 | s03      | R    |
| 32571000 |    601 |    366 |     37 |     9 |    0 |    156 |    2 |    1 |    30 |    0 |    0 |    0 |    0 |    0 |    0 |    268 |    333 |      20 |       2 |       0 |       9 |     26 |      2 |      0 |      5 |      2 |      0 |      0 |      8 |      2 |      0 |      0 |      1 |      8 |      2 |      0 |     11 |      1 |      0 |      0 |      2 |       3 |       0 |       0 |       1 |      4 |      0 |      0 |      2 |        2 |       53 |       46 |       28 |       17 |        9 |       2 |        8 |       85 |       46 |       30 |       21 |       16 |       3 |        0 |        5 |        4 |        4 |        4 |        6 |       2 |        0 |        2 |        2 |        1 |        1 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       36 |       24 |       12 |        7 |        3 |       0 |       12 |       56 |       24 |       12 |        6 |        2 |       0 |      0 |      3 |     48 |     56 |     18 |      5 |     10 |    226 |      0 |      0 |      0 |      5 |      9 |      0 |      2 |      2 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     27 |     17 |      5 |      1 |      2 |    145 |      0 |      1 | s03      | R    |
| 32580000 |    558 |    334 |     39 |     6 |    0 |    140 |    2 |    1 |    36 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    321 |      20 |       1 |       0 |       4 |     17 |      2 |      0 |      9 |      2 |      1 |      0 |      3 |      3 |      0 |      0 |      0 |      4 |      1 |      0 |      6 |      1 |      0 |      0 |      4 |       3 |       0 |       0 |       1 |      6 |      2 |      0 |      4 |        3 |       33 |       37 |       28 |       17 |        7 |       2 |       10 |       65 |       44 |       33 |       32 |       20 |       3 |        0 |        7 |        8 |        1 |        2 |        5 |       1 |        0 |        2 |        3 |        2 |        2 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       38 |       23 |        6 |        9 |        6 |       0 |        7 |       39 |       20 |       19 |       10 |        4 |       0 |      0 |      5 |     31 |     49 |     22 |     10 |      4 |    213 |      0 |      0 |      0 |      4 |      3 |      1 |      3 |      4 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     30 |     22 |      6 |      1 |      2 |    119 |      0 |      1 | s03      | R    |
| 32590000 |    729 |    470 |     43 |     9 |    0 |    167 |    3 |    4 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    338 |    391 |      35 |       2 |       0 |      12 |     26 |      2 |      0 |     18 |      2 |      2 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      8 |      6 |      0 |      0 |      1 |       2 |       4 |       0 |       4 |      5 |      0 |      0 |      2 |        5 |       49 |       65 |       43 |       27 |       17 |       4 |       12 |       95 |       56 |       41 |       35 |       18 |       3 |        0 |       10 |        7 |        3 |        2 |        6 |       0 |        1 |        5 |        1 |        4 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       29 |       31 |       17 |        9 |        8 |       0 |       10 |       55 |       25 |       11 |        9 |        6 |       0 |      0 |      2 |     65 |     68 |     31 |      5 |     12 |    287 |      0 |      0 |      0 |      2 |      9 |      3 |      1 |      4 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     31 |     24 |      8 |      0 |      1 |    148 |      0 |      1 | s03      | R    |
| 32591000 |    636 |    369 |     69 |    15 |    0 |    137 |    4 |    2 |    40 |    0 |    0 |    0 |    0 |    0 |    0 |    277 |    359 |      18 |       2 |       0 |       9 |     33 |      3 |      0 |     12 |      3 |      0 |      0 |      5 |      1 |      0 |      0 |      3 |      4 |      4 |      0 |      1 |      3 |      1 |      0 |      3 |       1 |       0 |       0 |       0 |      3 |      2 |      0 |      3 |        7 |       30 |       48 |       28 |       20 |       18 |       2 |       10 |       56 |       42 |       45 |       27 |       31 |       5 |        1 |        3 |        2 |        7 |        4 |       11 |       2 |        1 |        2 |        1 |        5 |        5 |       23 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       37 |       24 |       14 |       10 |        4 |       1 |        5 |       52 |       21 |        9 |        7 |       10 |       0 |      0 |      2 |     48 |     64 |     19 |      7 |      8 |    221 |      0 |      0 |      1 |     11 |     10 |      3 |      3 |      2 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     20 |      2 |      2 |      2 |    150 |      0 |      1 | s03      | R    |
| 33310001 |      1 |      0 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 33310002 |   1010 |    550 |    177 |    19 |    0 |    215 |    3 |    3 |    43 |    0 |    0 |    0 |    0 |    0 |    0 |    470 |    540 |      49 |       7 |       0 |      14 |     23 |     10 |      0 |      9 |      5 |      0 |      0 |      2 |      6 |      3 |      0 |      2 |     19 |     14 |      0 |     12 |      5 |      0 |      0 |      1 |       8 |       4 |       0 |       5 |      1 |      1 |      0 |      2 |       12 |       46 |       56 |       55 |       36 |       47 |       3 |       10 |       68 |       37 |       42 |       32 |       97 |       9 |        2 |        6 |       11 |       15 |        6 |       32 |       2 |        2 |        4 |        2 |        5 |        8 |       72 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       60 |       27 |       21 |       14 |        9 |       0 |        7 |       71 |       21 |       16 |        8 |       19 |       0 |      0 |      3 |     78 |     85 |     22 |     12 |     15 |    335 |      0 |      0 |      1 |     32 |     25 |      7 |      3 |      7 |    102 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     49 |     29 |      5 |      0 |      2 |    197 |      0 |      1 | s03      | R    |
| 33320000 |    936 |    546 |     67 |    15 |    0 |    247 |    6 |    5 |    50 |    0 |    0 |    0 |    0 |    0 |    0 |    427 |    509 |      40 |       5 |       0 |      19 |     33 |      5 |      0 |     13 |      7 |      2 |      0 |      3 |      3 |      0 |      0 |      2 |     19 |      2 |      0 |     22 |      6 |      0 |      0 |      2 |       6 |       1 |       0 |       2 |      7 |      0 |      0 |      3 |        7 |       72 |       54 |       42 |       31 |       29 |       0 |       21 |      104 |       63 |       59 |       28 |       32 |       4 |        1 |       13 |        7 |        3 |        4 |        7 |       1 |        2 |        8 |        5 |        1 |        2 |       11 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       71 |       31 |       20 |       10 |       10 |       1 |       24 |       86 |       29 |       14 |        6 |        7 |       1 |      0 |      3 |     82 |     63 |     22 |      6 |     15 |    355 |      0 |      0 |      0 |      9 |      2 |      3 |      5 |      0 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     40 |     27 |      6 |      1 |      1 |    244 |      0 |      1 | s03      | R    |
| 33330001 |    465 |    247 |     42 |    10 |    0 |    151 |    0 |    1 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    228 |       4 |       2 |       0 |       9 |     10 |      1 |      0 |      6 |      7 |      0 |      0 |      3 |      3 |      1 |      0 |      1 |     63 |     12 |      0 |     79 |      1 |      0 |      0 |      4 |       4 |       0 |       0 |       6 |      3 |      0 |      0 |      2 |        3 |       18 |       18 |       15 |       17 |       46 |       1 |        2 |       16 |       10 |        9 |       12 |       77 |       3 |        0 |        0 |        4 |        0 |        5 |       13 |       1 |        0 |        1 |        0 |        3 |        4 |       11 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       25 |       15 |        7 |        2 |       42 |       0 |        3 |        9 |        3 |        9 |        3 |       53 |       0 |      0 |      1 |     36 |     54 |     11 |      5 |     13 |    127 |      0 |      0 |      0 |      3 |      9 |      4 |      2 |      1 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     30 |     50 |      1 |      1 |      2 |     91 |      0 |      1 | s03      | R    |
| 33330002 |      1 |      0 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 33340000 |    583 |    239 |     43 |    12 |    0 |    273 |    2 |    2 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    256 |    327 |       8 |       0 |       0 |       3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      4 |    114 |     26 |      0 |    206 |      2 |      0 |      0 |      1 |      16 |       2 |       0 |      15 |      1 |      1 |      0 |      1 |        4 |       19 |       18 |       22 |        6 |       27 |       3 |        4 |       41 |       25 |       23 |       14 |       28 |       5 |        2 |        7 |        6 |        3 |        1 |        1 |       3 |        2 |        1 |        6 |        2 |        2 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       11 |       24 |       23 |       20 |       46 |       1 |       13 |       38 |       27 |       28 |       14 |       46 |       1 |      0 |      2 |     27 |     49 |      6 |      5 |      7 |    143 |      0 |      0 |      0 |      4 |      7 |      1 |      1 |      0 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     35 |     64 |      8 |      2 |      2 |    188 |      0 |      1 | s03      | R    |
| 33341000 |    543 |    274 |     66 |     7 |    0 |    178 |    6 |    2 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    268 |    275 |      13 |       4 |       0 |      12 |     14 |      4 |      0 |     10 |      2 |      1 |      0 |      5 |     10 |      0 |      0 |      3 |     17 |     10 |      0 |     14 |      0 |      0 |      0 |      1 |       3 |       0 |       0 |       4 |      5 |      2 |      0 |      3 |        6 |       47 |       36 |       20 |       12 |        9 |       0 |       10 |       50 |       28 |       26 |       22 |        8 |       0 |        1 |       19 |        4 |        2 |        5 |        5 |       1 |        1 |       14 |        4 |        1 |        6 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       41 |       26 |       14 |        5 |        5 |       0 |        6 |       52 |       23 |       10 |        6 |        5 |       0 |      0 |      1 |     17 |     20 |      9 |      2 |      2 |    223 |      0 |      0 |      0 |      2 |      8 |      2 |      1 |      1 |     52 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     10 |     15 |      3 |      0 |      1 |    171 |      0 |      1 | s03      | R    |
| 33350001 |    773 |    459 |     42 |    11 |    0 |    197 |    5 |    5 |    54 |    0 |    0 |    0 |    0 |    0 |    0 |    340 |    433 |      30 |       2 |       0 |      23 |     37 |      1 |      0 |     18 |      2 |      0 |      0 |      5 |      4 |      0 |      0 |      3 |      5 |      4 |      0 |     16 |      1 |      0 |      0 |      2 |       0 |       1 |       0 |       3 |      9 |      1 |      0 |      6 |       11 |       49 |       54 |       36 |       23 |       13 |       3 |       14 |       87 |       60 |       46 |       35 |       23 |       5 |        0 |        7 |        5 |        3 |        4 |        2 |       2 |        0 |        4 |        3 |        1 |        2 |        6 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       57 |       39 |       12 |        8 |        6 |       0 |       15 |       70 |       28 |       16 |        7 |        8 |       0 |      0 |      7 |     59 |     59 |     41 |      6 |      9 |    278 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     34 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     26 |     30 |      8 |      1 |      2 |    201 |      0 |      1 | s03      | R    |
| 33350002 |     12 |      6 |      0 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      8 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        4 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 33360000 |    756 |    449 |     62 |     8 |    0 |    204 |    4 |    0 |    29 |    0 |    0 |    0 |    0 |    0 |    0 |    334 |    422 |      25 |       2 |       0 |      14 |     29 |      4 |      0 |      9 |      2 |      0 |      0 |      3 |      3 |      2 |      0 |      1 |     22 |      6 |      0 |     38 |      1 |      0 |      0 |      3 |       3 |       1 |       0 |       5 |      1 |      1 |      0 |      1 |        3 |       30 |       41 |       34 |       25 |       53 |       2 |       13 |       57 |       40 |       30 |       45 |       73 |       3 |        2 |        7 |        4 |        3 |        5 |        9 |       2 |        1 |        4 |        1 |        2 |        7 |       13 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       38 |       22 |       10 |        8 |       25 |       1 |       12 |       50 |       18 |       12 |        5 |       34 |       0 |      0 |      2 |     57 |     73 |     19 |      8 |     12 |    278 |      0 |      0 |      1 |      4 |      9 |      6 |      1 |      4 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     35 |     29 |      4 |      0 |      0 |    173 |      0 |      1 | s03      | R    |
| 33370000 |    791 |    473 |     47 |     4 |    0 |    211 |    1 |    4 |    51 |    0 |    0 |    0 |    0 |    0 |    0 |    328 |    463 |      36 |       3 |       0 |      19 |     21 |      2 |      0 |     15 |      1 |      1 |      0 |      3 |      2 |      1 |      0 |      4 |      7 |      4 |      0 |      9 |      6 |      0 |      0 |      3 |       8 |       1 |       0 |       8 |      2 |      0 |      0 |      2 |       15 |       43 |       55 |       35 |       20 |       11 |       2 |       14 |      119 |       49 |       48 |       36 |       22 |       4 |        1 |        8 |        2 |        2 |        2 |        3 |       2 |        1 |        6 |        4 |        3 |        3 |        4 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       59 |       29 |       18 |        8 |        8 |       1 |       16 |       80 |       24 |       17 |        6 |        1 |       0 |      0 |      5 |     77 |     76 |     25 |      5 |      5 |    280 |      0 |      0 |      0 |      6 |      9 |      1 |      4 |      0 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     32 |     32 |      8 |      4 |      2 |    192 |      0 |      1 | s03      | R    |
| 33380001 |    824 |    464 |     39 |    16 |    0 |    263 |    1 |    6 |    35 |    0 |    0 |    0 |    0 |    0 |    0 |    407 |    417 |      36 |       1 |       0 |      21 |     13 |      0 |      0 |      8 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     34 |      7 |      0 |     55 |      7 |      0 |      0 |      3 |      40 |      12 |       0 |      38 |      5 |      1 |      0 |      0 |       12 |       52 |       42 |       55 |       43 |       27 |       6 |       29 |       64 |       46 |       40 |       21 |       25 |       2 |        3 |        4 |        8 |        3 |        5 |        4 |       0 |        0 |        2 |        1 |        4 |        2 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       51 |       32 |       20 |       15 |       14 |       1 |       26 |       71 |       29 |       25 |        7 |       18 |       2 |      0 |      5 |     69 |     96 |     20 |      5 |      8 |    261 |      0 |      0 |      0 |      6 |      8 |      3 |      1 |      2 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     54 |     47 |      5 |      2 |      2 |    208 |      0 |      1 | s03      | R    |
| 33380002 |     36 |     16 |      4 |     3 |    0 |     10 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     19 |     17 |       5 |       1 |       0 |       1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        0 |        2 |       1 |        1 |        4 |        3 |        1 |        0 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        3 |        1 |        0 |        2 |       0 |        1 |        2 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     11 |      0 |      1 | s03      | R    |
| 33390000 |    945 |    530 |     56 |    15 |    0 |    310 |    6 |    5 |    23 |    0 |    0 |    0 |    0 |    0 |    0 |    451 |    494 |      77 |      10 |       0 |      34 |     10 |      0 |      0 |      4 |      5 |      1 |      0 |      2 |      7 |      1 |      0 |      0 |     68 |      7 |      0 |    114 |      1 |      0 |      0 |      1 |      32 |      12 |       0 |      60 |      9 |      0 |      0 |      4 |       14 |       36 |       46 |       53 |       34 |       54 |       8 |       21 |       45 |       46 |       49 |       35 |       81 |       8 |        0 |        7 |        8 |        7 |        6 |        6 |       0 |        0 |        9 |        3 |        4 |        2 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       44 |       29 |       32 |       14 |       37 |       2 |       23 |       42 |       33 |       20 |       14 |       54 |       1 |      0 |      2 |     55 |    107 |     37 |     14 |     26 |    289 |      0 |      0 |      0 |      6 |      9 |      2 |      1 |      1 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     44 |     56 |     16 |      0 |      6 |    233 |      0 |      1 | s03      | R    |
| 33391000 |    100 |     42 |     15 |     0 |    0 |     25 |    3 |    1 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |     64 |     36 |       2 |       2 |       0 |       2 |      0 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        5 |        8 |        3 |        7 |       0 |        1 |        2 |        3 |        6 |        3 |        3 |       0 |        1 |        1 |        3 |        1 |        2 |        2 |       0 |        0 |        1 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        7 |       12 |        6 |        1 |       0 |        0 |        1 |        6 |        4 |        2 |        0 |       0 |      0 |      1 |      6 |      4 |      2 |      0 |      1 |     28 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      5 |      1 |      1 |      0 |     28 |      0 |      1 | s03      | R    |
| 33392000 |    108 |     44 |      6 |     1 |    0 |     44 |    1 |    1 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |     45 |     63 |      14 |       1 |       0 |       8 |      2 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |       2 |       0 |       0 |       4 |      0 |      3 |      0 |      1 |        4 |        3 |        4 |        1 |        3 |        3 |       1 |        3 |        7 |        6 |        4 |        4 |        1 |       0 |        0 |        1 |        1 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |       10 |        2 |        1 |        4 |        3 |       0 |        7 |       15 |        6 |        4 |        4 |        1 |       0 |      0 |      0 |      2 |      6 |      2 |      1 |      2 |     31 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      7 |      1 |      2 |      1 |     40 |      0 |      1 | s03      | R    |
| 33400000 |    877 |    472 |     61 |    25 |    0 |    291 |    5 |   10 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    407 |    470 |      65 |       6 |       0 |      34 |      4 |      1 |      0 |      9 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |     30 |     11 |      0 |     71 |      1 |      0 |      0 |      0 |      39 |      22 |       0 |      47 |      5 |      2 |      0 |      5 |       21 |       35 |       43 |       39 |       32 |       29 |       8 |       35 |       63 |       51 |       54 |       31 |       22 |       9 |        1 |        5 |        5 |        6 |        9 |        9 |       2 |        2 |        5 |        4 |        3 |        3 |        5 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |       48 |       32 |       28 |       14 |       20 |       1 |       31 |       66 |       27 |       27 |       13 |       17 |       0 |      0 |      6 |     72 |     91 |     22 |      7 |     12 |    262 |      0 |      0 |      0 |      7 |      9 |      2 |      0 |      4 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     40 |     59 |      8 |      2 |      3 |    229 |      0 |      1 | s03      | R    |
| 33410000 |   1102 |    629 |     70 |    18 |    0 |    315 |    7 |    9 |    54 |    0 |    0 |    0 |    0 |    0 |    0 |    484 |    618 |      67 |       7 |       0 |      32 |     13 |      0 |      0 |     18 |      1 |      0 |      0 |      5 |      0 |      2 |      0 |      2 |     37 |      9 |      0 |     67 |      5 |      0 |      0 |      0 |      31 |       7 |       0 |      32 |      5 |      3 |      0 |      4 |       17 |       64 |       59 |       59 |       41 |       21 |       5 |       30 |       90 |       67 |       68 |       50 |       46 |      12 |        2 |       10 |        6 |        5 |        5 |        4 |       1 |        1 |        7 |        9 |        6 |        3 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       68 |       34 |       27 |       14 |       22 |       3 |       37 |       94 |       34 |       33 |       13 |        7 |       0 |      0 |      5 |     93 |    115 |     26 |      7 |     14 |    369 |      0 |      0 |      0 |     12 |     13 |      2 |      0 |      1 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     63 |     65 |      7 |      0 |      2 |    259 |      0 |      1 | s03      | R    |
| 33450000 |    116 |     59 |      8 |     5 |    0 |     31 |    4 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |     58 |     58 |       7 |       1 |       0 |       4 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        2 |        1 |        4 |        9 |        5 |        1 |       0 |        2 |        7 |        8 |       10 |       10 |        0 |       0 |        0 |        2 |        0 |        4 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        6 |       10 |        3 |        4 |        1 |       0 |        1 |       12 |        4 |        2 |        1 |        0 |       0 |      0 |      0 |     11 |     15 |      4 |      0 |      1 |     28 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      8 |      1 |      1 |      0 |     30 |      0 |      1 | s03      | R    |
| 33451000 |      2 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 33460001 |    725 |    434 |     43 |    10 |    0 |    202 |    2 |    1 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    349 |    376 |     185 |      13 |       0 |      65 |      8 |      3 |      0 |      9 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      8 |      0 |      0 |     21 |      4 |      0 |      0 |      2 |       9 |       2 |       0 |       8 |      6 |      1 |      0 |      1 |       22 |       36 |       48 |       36 |       25 |       13 |       8 |       36 |       61 |       54 |       34 |       30 |       23 |       8 |        1 |        6 |        4 |        6 |        2 |        5 |       0 |        1 |        4 |        4 |        4 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       47 |       32 |       21 |       12 |        6 |       0 |       16 |       47 |       26 |       12 |        8 |        2 |       0 |      0 |      2 |     53 |     73 |     21 |     12 |     13 |    260 |      0 |      0 |      0 |      3 |     10 |      1 |      3 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     44 |     43 |      3 |      2 |      3 |    151 |      0 |      1 | s03      | R    |
| 33460002 |     39 |     14 |      0 |     0 |    0 |     16 |    0 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |     22 |     17 |       3 |       0 |       0 |       2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        1 |        3 |        1 |        1 |        0 |        0 |       0 |        1 |        2 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        8 |        5 |        1 |        2 |        0 |       0 |        4 |        4 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      0 |      3 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |      1 |     18 |      0 |      1 | s03      | R    |
| 33470000 |    580 |    359 |     38 |     8 |    0 |    143 |    7 |    1 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    277 |    303 |     163 |      11 |       0 |      56 |     11 |      1 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      3 |      0 |      2 |      1 |      0 |      0 |      2 |       2 |       5 |       0 |       1 |      6 |      0 |      0 |      2 |       17 |       38 |       26 |       25 |       16 |       25 |       8 |       22 |       51 |       33 |       26 |       19 |       42 |      11 |        3 |        2 |        4 |        9 |        2 |        2 |       1 |        0 |        3 |        2 |        1 |        1 |        7 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       37 |       23 |       10 |        7 |        5 |       1 |       23 |       42 |        5 |        8 |        4 |        2 |       0 |      0 |      7 |     67 |     55 |     10 |      1 |      7 |    212 |      0 |      0 |      1 |      6 |     10 |      1 |      0 |      1 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     23 |     27 |      7 |      2 |      1 |    119 |      0 |      1 | s03      | R    |
| 33500001 |    498 |    322 |     12 |     9 |    0 |    121 |    0 |    6 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    229 |    269 |      14 |       0 |       0 |      10 |      5 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      1 |        7 |       26 |       26 |       33 |       13 |       22 |      14 |       11 |       45 |       29 |       43 |       15 |       18 |      20 |        0 |        1 |        3 |        0 |        1 |        1 |       0 |        1 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       32 |       19 |       12 |        7 |        1 |       1 |        9 |       36 |       18 |        9 |        6 |        4 |       0 |      0 |      2 |     38 |     35 |     14 |      7 |      9 |    217 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     23 |     29 |      2 |      1 |      0 |    106 |      0 |      1 | s03      | R    |
| 33500002 |     46 |     19 |      1 |     1 |    0 |     12 |    1 |    0 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |     27 |     19 |       4 |       0 |       0 |       3 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        7 |        2 |        1 |        0 |        0 |       0 |        3 |        4 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        8 |        5 |        0 |        1 |        1 |       0 |        4 |        7 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     22 |      0 |      1 | s03      | R    |
| 33500004 |     25 |      8 |      1 |     0 |    0 |     14 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     17 |      8 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        3 |        2 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        7 |        1 |        1 |        0 |        1 |       0 |        2 |        2 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |     12 |      0 |      1 | s03      | R    |
| 33500005 |    360 |    234 |     13 |     7 |    0 |     84 |    0 |    1 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    183 |    177 |      21 |       1 |       0 |      11 |     11 |      2 |      0 |      9 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        4 |       17 |       27 |       29 |       12 |       17 |       6 |        9 |       30 |       26 |       23 |       13 |        8 |      13 |        0 |        2 |        2 |        1 |        0 |        0 |       1 |        2 |        2 |        0 |        1 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       31 |       17 |        6 |        7 |        1 |       1 |       11 |       15 |       12 |        5 |        2 |        3 |       0 |      0 |      2 |     35 |     29 |     17 |      4 |     14 |    133 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     13 |      1 |      1 |      0 |     77 |      0 |      1 | s03      | R    |
| 33510001 |    734 |    481 |     30 |    16 |    0 |    160 |    5 |    1 |    41 |    0 |    0 |    0 |    0 |    0 |    0 |    344 |    390 |      11 |       2 |       0 |      14 |      9 |      1 |      0 |     14 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      3 |      2 |      0 |      3 |      4 |      0 |      0 |      1 |       2 |       0 |       0 |       1 |      1 |      0 |      0 |      1 |        7 |       37 |       45 |       54 |       30 |       18 |       8 |       26 |       40 |       49 |       67 |       33 |       38 |      29 |        0 |        4 |        2 |        5 |        6 |        2 |       1 |        0 |        3 |        4 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       44 |       31 |       27 |       12 |        3 |       0 |       10 |       43 |       20 |       18 |        4 |        3 |       0 |      0 |      3 |     83 |     77 |     30 |      3 |     13 |    272 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     44 |     24 |      3 |      1 |      0 |    149 |      0 |      1 | s03      | R    |
| 33510002 |     83 |     59 |      2 |     0 |    0 |     20 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     29 |     54 |       4 |       0 |       0 |       1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        1 |        4 |        3 |        3 |        6 |        2 |       1 |        2 |       13 |        7 |        8 |        2 |        1 |       6 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        5 |        0 |        1 |        1 |        0 |       0 |        2 |        8 |        3 |        1 |        1 |        0 |       0 |      0 |      0 |      7 |      6 |      2 |      2 |      1 |     41 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     16 |      0 |      1 | s03      | R    |
| 33510003 |     12 |      9 |      0 |     1 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 33520001 |    386 |    279 |      9 |     9 |    0 |     79 |    0 |    5 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    177 |    209 |       6 |       0 |       0 |      10 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |      2 |      1 |      0 |      2 |        9 |       16 |       23 |       25 |       16 |       34 |       7 |       11 |       25 |       20 |       37 |       17 |       33 |       6 |        0 |        0 |        0 |        1 |        1 |        1 |       1 |        1 |        1 |        1 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        8 |        8 |        7 |        5 |       12 |       0 |       11 |       16 |       11 |        8 |        3 |        5 |       1 |      0 |      3 |     29 |     52 |     18 |      4 |      6 |    167 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     23 |      1 |      0 |      1 |     51 |      0 |      1 | s03      | R    |
| 33520002 |    182 |    127 |      2 |     1 |    0 |     43 |    0 |    4 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     87 |     95 |       6 |       1 |       0 |       2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |       13 |       12 |        9 |        7 |       11 |       2 |        3 |       16 |        9 |       12 |       12 |       13 |       8 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        8 |        8 |        6 |        5 |        0 |       0 |        5 |        8 |        5 |        1 |        2 |        1 |       0 |      0 |      2 |     21 |     19 |      9 |      5 |      4 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     12 |      7 |      1 |      0 |      0 |     30 |      0 |      1 | s03      | R    |
| 33530001 |    773 |    480 |     43 |    13 |    0 |    195 |    6 |    4 |    32 |    0 |    0 |    0 |    0 |    0 |    0 |    330 |    443 |      22 |       4 |       0 |      22 |     10 |      0 |      0 |      9 |      2 |      2 |      0 |      4 |      1 |      0 |      0 |      0 |      3 |      3 |      0 |      7 |      3 |      0 |      0 |      1 |       3 |       1 |       0 |       3 |      6 |      3 |      0 |      2 |       12 |       41 |       35 |       38 |       32 |       26 |       2 |       24 |       89 |       68 |       49 |       21 |       30 |      13 |        0 |        2 |        7 |        4 |        6 |        6 |       2 |        1 |        3 |        3 |        2 |        2 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       57 |       26 |       12 |       11 |        3 |       0 |       25 |       65 |       23 |       11 |        5 |        4 |       0 |      0 |      9 |     73 |     80 |     28 |      4 |     10 |    276 |      0 |      0 |      1 |      7 |      6 |      2 |      0 |      1 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     47 |     26 |      4 |      5 |      1 |    164 |      0 |      1 | s03      | R    |
| 33530003 |     24 |     12 |      1 |     1 |    0 |      7 |    2 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     15 |      9 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        2 |        1 |        1 |        0 |       0 |        3 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        0 |        0 |        2 |        0 |       0 |        3 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 33540001 |    264 |    184 |     16 |     7 |    0 |     47 |    0 |    8 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     99 |    165 |       5 |       4 |       0 |       0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       1 |       1 |       0 |       1 |      0 |      0 |      0 |      1 |        4 |       14 |       10 |       10 |        6 |       12 |       5 |       12 |       28 |       37 |       22 |        8 |       12 |       4 |        1 |        0 |        1 |        3 |        1 |        0 |       2 |        1 |        0 |        4 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        9 |        7 |        4 |        1 |        3 |       0 |        3 |       11 |       10 |        6 |        2 |        0 |       2 |      0 |      4 |     23 |     22 |     12 |      2 |      3 |    118 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     13 |     18 |      1 |      1 |      1 |     26 |      0 |      1 | s03      | R    |
| 33540002 |    380 |    278 |     10 |     5 |    0 |     66 |    2 |    4 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    130 |    250 |       6 |       0 |       0 |       5 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |       4 |       0 |       0 |       2 |      4 |      0 |      0 |      0 |       11 |        9 |       16 |       21 |       16 |       10 |       9 |       14 |       42 |       40 |       35 |       19 |       22 |      14 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       10 |        7 |        3 |        1 |        3 |       1 |       11 |       27 |        8 |        5 |        5 |        2 |       0 |      0 |      4 |     37 |     42 |     15 |      3 |      5 |    172 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     15 |      0 |      1 |      0 |     62 |      0 |      1 | s03      | R    |
| 33550001 |     69 |     37 |      2 |     3 |    0 |     21 |    1 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     39 |     30 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        6 |        4 |        8 |        2 |        2 |       0 |        2 |        3 |        4 |        3 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        9 |        2 |        5 |        0 |        0 |       0 |        1 |        5 |        3 |        1 |        2 |        1 |       1 |      0 |      1 |      4 |      9 |      0 |      1 |      0 |     22 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |     25 |      0 |      1 | s03      | R    |
| 33550003 |    593 |    391 |     35 |    14 |    0 |    128 |    5 |    3 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    266 |    327 |      19 |       2 |       0 |      10 |      7 |      0 |      0 |      3 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      5 |      1 |      0 |      0 |      0 |       6 |       6 |       0 |       6 |      3 |      0 |      0 |      1 |       12 |       24 |       36 |       39 |       21 |       22 |       6 |       28 |       51 |       55 |       38 |       18 |       30 |      11 |        2 |        5 |        4 |        3 |        3 |        1 |       0 |        4 |        6 |        3 |        2 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       29 |       21 |       11 |        9 |        2 |       0 |       17 |       29 |       17 |       12 |        2 |        1 |       1 |      0 |      1 |     58 |     58 |     23 |      6 |     14 |    231 |      0 |      0 |      0 |      6 |      5 |      1 |      1 |      1 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     26 |      4 |      2 |      2 |    111 |      0 |      1 | s03      | R    |
| 33560001 |    105 |     67 |      1 |     0 |    0 |     30 |    0 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     31 |     74 |       9 |       0 |       0 |       2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |       5 |       0 |       0 |       3 |      0 |      0 |      0 |      0 |        0 |        2 |        3 |        4 |        5 |        3 |       1 |        4 |        6 |       12 |       11 |        7 |        4 |       5 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        2 |        1 |        1 |        0 |       0 |        6 |        8 |        6 |        1 |        2 |        1 |       1 |      0 |      1 |      7 |     11 |      5 |      1 |      1 |     41 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      2 |      1 |      0 |      0 |     26 |      0 |      1 | s03      | R    |
| 33560002 |    133 |     89 |      3 |     2 |    0 |     33 |    1 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     44 |     89 |       2 |       0 |       0 |       1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |       2 |       0 |       0 |       5 |      0 |      0 |      0 |      0 |        0 |        4 |       10 |        4 |        4 |        0 |       2 |        2 |       14 |       19 |        9 |       11 |        4 |       6 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |       10 |        1 |        4 |        2 |        0 |       1 |        5 |        9 |        4 |        5 |        0 |        0 |       0 |      0 |      2 |      8 |     15 |      4 |      2 |      2 |     56 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |      8 |      1 |      0 |      0 |     21 |      0 |      1 | s03      | R    |
| 33560003 |      6 |      2 |      0 |     0 |    0 |      3 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 33560004 |    340 |    218 |     20 |     8 |    0 |     78 |    2 |    3 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    139 |    201 |       7 |       0 |       0 |       3 |      3 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       4 |      0 |      1 |      0 |      1 |       10 |       12 |       17 |       17 |       12 |        9 |       9 |       11 |       21 |       28 |       33 |       12 |       18 |       9 |        1 |        0 |        2 |        3 |        1 |        1 |       2 |        0 |        3 |        2 |        1 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       16 |        3 |        9 |        3 |        2 |       1 |       14 |       20 |        9 |       11 |        4 |        1 |       0 |      0 |      4 |     31 |     41 |      7 |      0 |      6 |    129 |      0 |      0 |      0 |      6 |      5 |      2 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     11 |      0 |      1 |      0 |     75 |      0 |      1 | s03      | R    |
| 33570001 |     76 |     50 |      6 |     3 |    0 |     13 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     26 |     50 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        2 |        5 |        1 |        1 |       0 |        2 |       15 |       12 |        2 |        4 |        5 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        4 |        5 |        0 |        0 |       0 |        0 |        2 |        4 |        1 |        1 |        0 |       0 |      0 |      0 |      9 |      7 |      4 |      3 |      0 |     27 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     13 |      0 |      1 | s03      | R    |
| 33570002 |    503 |    298 |     28 |    10 |    0 |    128 |    7 |   12 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    225 |      16 |       0 |       0 |      14 |     10 |      3 |      0 |      6 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      5 |      3 |      0 |      0 |      3 |      12 |       2 |       0 |      13 |      7 |      0 |      0 |      4 |        5 |       14 |       26 |       32 |       17 |       56 |       2 |       15 |       24 |       23 |       24 |       21 |       35 |       4 |        0 |        0 |        2 |        0 |        1 |       10 |       0 |        1 |        4 |        2 |        2 |        1 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       46 |       14 |       14 |        5 |       21 |       1 |       10 |       21 |        8 |        7 |        4 |       13 |       1 |      0 |      4 |     52 |     53 |     20 |      1 |      6 |    162 |      0 |      0 |      0 |      5 |      2 |      1 |      2 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     29 |     28 |      1 |      0 |      1 |    114 |      0 |      1 | s03      | R    |
| 33570003 |    413 |    217 |     20 |    11 |    0 |    144 |    3 |    2 |    16 |    0 |    0 |    0 |    0 |    0 |    0 |    219 |    194 |      10 |       4 |       0 |       9 |      6 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |     11 |      3 |      0 |     53 |      1 |      0 |      0 |      2 |       2 |       1 |       0 |       2 |      1 |      0 |      0 |      1 |        3 |       11 |       23 |       23 |       27 |       24 |       0 |        7 |       20 |       20 |       15 |       17 |       25 |       2 |        0 |        1 |        1 |        0 |        1 |        8 |       0 |        1 |        2 |        0 |        2 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       21 |       16 |       19 |        8 |       28 |       1 |        6 |       17 |        7 |       11 |        5 |       33 |       0 |      0 |      2 |     35 |     17 |      8 |      4 |      8 |    143 |      0 |      0 |      0 |      4 |      4 |      1 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     27 |     23 |      2 |      3 |      0 |    120 |      0 |      1 | s03      | R    |
| 33580000 |    656 |    436 |     28 |    18 |    0 |    150 |    5 |    4 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    402 |    254 |      19 |       1 |       0 |       7 |      6 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      1 |      0 |     12 |      4 |      0 |      0 |      1 |       0 |       1 |       0 |       6 |      1 |      2 |      0 |      0 |        3 |       10 |       51 |       82 |       51 |       67 |       1 |        8 |       12 |       24 |       44 |       35 |       48 |       0 |        0 |        0 |        2 |        9 |        3 |        2 |       0 |        0 |        2 |        3 |        2 |        2 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       15 |       28 |       32 |       22 |       16 |       1 |        6 |       12 |       14 |       11 |       10 |       18 |       0 |      0 |      3 |     73 |     91 |     10 |      3 |      9 |    247 |      0 |      0 |      1 |      7 |      7 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     35 |     38 |      3 |      0 |      2 |    114 |      0 |      1 | s03      | R    |
| 33590001 |    321 |    227 |     17 |     5 |    0 |     57 |    1 |    8 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    127 |    194 |       2 |       0 |       0 |       5 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      3 |      9 |      1 |      0 |      1 |       1 |       0 |       0 |       2 |      4 |      1 |      0 |      0 |        7 |       15 |       21 |       18 |        9 |        6 |       6 |       20 |       24 |       42 |       30 |       16 |       11 |       2 |        1 |        2 |        2 |        1 |        0 |        1 |       0 |        1 |        3 |        2 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       11 |        6 |        6 |        1 |        7 |       0 |        6 |       13 |        7 |        9 |        1 |        3 |       0 |      0 |      3 |     25 |     42 |     13 |      0 |     10 |    134 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |     19 |      2 |      0 |      0 |     46 |      0 |      1 | s03      | R    |
| 33590002 |    482 |    335 |     21 |    11 |    0 |    101 |    2 |    4 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    217 |    265 |      18 |       0 |       0 |      11 |      6 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     11 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |       2 |       2 |       0 |       2 |      1 |      0 |      0 |      2 |        9 |       24 |       22 |       26 |       25 |       20 |       6 |       20 |       47 |       39 |       42 |       26 |       20 |       9 |        2 |        3 |        5 |        2 |        2 |        4 |       1 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       18 |       13 |       11 |        7 |        5 |       2 |       11 |       22 |        7 |       13 |        3 |        4 |       0 |      0 |      4 |     39 |     50 |     32 |      5 |     16 |    189 |      0 |      0 |      0 |      3 |      3 |      1 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     23 |      3 |      0 |      2 |     76 |      0 |      1 | s03      | R    |
| 33600000 |    593 |    403 |     19 |     9 |    0 |    142 |    2 |    7 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    242 |    351 |      12 |       0 |       0 |       5 |     11 |      1 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      7 |      0 |      1 |      0 |      1 |       0 |       0 |       0 |       3 |      1 |      1 |      0 |      0 |       15 |       22 |       37 |       39 |       18 |       12 |       8 |       19 |       39 |       59 |       60 |       27 |       29 |      19 |        0 |        2 |        1 |        2 |        1 |        1 |       1 |        1 |        2 |        3 |        4 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       36 |       17 |        9 |        2 |        5 |       2 |       21 |       25 |       20 |       12 |        4 |        6 |       0 |      0 |      3 |     70 |     38 |     16 |      6 |      9 |    261 |      0 |      0 |      5 |      3 |      1 |      1 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     34 |     38 |      4 |      0 |      0 |     94 |      0 |      1 | s03      | R    |
| 33610002 |    278 |    203 |     11 |     5 |    0 |     45 |    2 |    5 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    103 |    175 |       8 |       1 |       0 |       3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        5 |       11 |       10 |       15 |       12 |       11 |       7 |        7 |       25 |       29 |       28 |       10 |       16 |      17 |        0 |        3 |        0 |        0 |        0 |        0 |       1 |        3 |        2 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        8 |        7 |        7 |        2 |        2 |       0 |        9 |        9 |        4 |        7 |        4 |        3 |       0 |      0 |      2 |     35 |     30 |      9 |      3 |      9 |    115 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      9 |      1 |      1 |      1 |     42 |      0 |      1 | s03      | R    |
| 33610003 |    155 |     94 |      6 |     6 |    0 |     37 |    1 |    3 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |     62 |     93 |       2 |       3 |       0 |       3 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        2 |       11 |        7 |        8 |        4 |        3 |       2 |        3 |       10 |       13 |        7 |        5 |       10 |       9 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        3 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        8 |        7 |        4 |        2 |        0 |       0 |        4 |        9 |        6 |       10 |        1 |        1 |       0 |      0 |      0 |     13 |     12 |      4 |      1 |      4 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      5 |      5 |      2 |      1 |     34 |      0 |      1 | s03      | R    |
| 33610004 |    233 |    143 |     16 |     6 |    0 |     51 |    0 |    1 |    16 |    0 |    0 |    0 |    0 |    0 |    0 |    104 |    129 |       8 |       1 |       0 |       9 |      2 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       3 |       1 |       0 |       4 |      1 |      0 |      0 |      0 |        4 |        8 |       16 |       10 |       12 |        7 |       2 |       12 |       19 |       14 |       14 |       10 |        9 |       6 |        1 |        2 |        2 |        2 |        1 |        1 |       0 |        1 |        2 |        3 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       18 |        9 |        3 |        2 |        1 |       0 |        9 |        9 |        9 |        2 |        8 |        0 |       1 |      0 |      1 |     15 |     18 |      6 |      6 |      4 |     93 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      7 |      0 |      1 |      0 |     55 |      0 |      1 | s03      | R    |
| 33620001 |    485 |    327 |     24 |    17 |    0 |    100 |    2 |    5 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    196 |    289 |      16 |       4 |       0 |       6 |      8 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |       3 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        9 |       25 |       25 |       27 |       23 |        8 |       5 |       15 |       56 |       46 |       28 |       23 |       29 |       8 |        0 |        1 |        4 |        2 |        3 |        0 |       1 |        5 |        3 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       26 |       11 |        8 |        4 |        1 |       1 |       21 |       24 |        9 |        7 |        6 |        3 |       1 |      0 |      2 |     65 |     51 |      9 |      1 |     10 |    189 |      0 |      0 |      0 |      7 |      2 |      1 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     18 |     16 |      5 |      1 |      0 |     92 |      0 |      1 | s03      | R    |
| 33620002 |      3 |      1 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 33620003 |    250 |    158 |     12 |     8 |    0 |     55 |    1 |    2 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    101 |    149 |      15 |       0 |       0 |       5 |      2 |      2 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        2 |       14 |        7 |       17 |       15 |        4 |       3 |        6 |       13 |       28 |       24 |        7 |        8 |      10 |        0 |        1 |        1 |        3 |        0 |        1 |       0 |        0 |        1 |        2 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        7 |        9 |        8 |        1 |        1 |       2 |        6 |       20 |       10 |        7 |        3 |        1 |       0 |      0 |      1 |     22 |     25 |      8 |      0 |      5 |     97 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     11 |      1 |      0 |      1 |     58 |      0 |      1 | s03      | R    |
| 33640001 |    283 |    162 |     12 |     4 |    0 |     76 |    3 |    2 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    147 |    136 |      42 |       4 |       0 |      13 |      4 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       1 |      0 |      1 |      0 |      1 |        7 |       15 |       16 |       23 |        6 |        8 |       3 |        7 |       16 |       22 |       13 |        9 |       10 |       7 |        1 |        1 |        2 |        3 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       18 |       14 |       10 |        8 |        6 |       0 |        5 |       26 |        9 |        5 |        3 |        1 |       0 |      0 |      3 |     21 |     27 |     10 |      1 |     10 |     90 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     18 |      2 |      1 |      1 |     67 |      0 |      1 | s03      | R    |
| 33640002 |    329 |    181 |     11 |     8 |    0 |     93 |    0 |    7 |    29 |    0 |    0 |    0 |    0 |    0 |    0 |    158 |    171 |      13 |       0 |       0 |       7 |      4 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        6 |       19 |       13 |       16 |       10 |        9 |       6 |       11 |       25 |       15 |       19 |       11 |       10 |      11 |        1 |        1 |        3 |        0 |        1 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       29 |       15 |       12 |        3 |        1 |       1 |        7 |       27 |       18 |        7 |        3 |        1 |       1 |      0 |      0 |     25 |     35 |     11 |      1 |      4 |    105 |      0 |      0 |      0 |      5 |      2 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     26 |      3 |      1 |      0 |     86 |      0 |      1 | s03      | R    |
| 33650001 |     10 |      7 |      0 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 33650002 |    184 |    134 |      7 |     3 |    0 |     34 |    0 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     70 |    114 |       3 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |        9 |       11 |        7 |       10 |        2 |       4 |        6 |       25 |       14 |       20 |        7 |        7 |       5 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        8 |        1 |        0 |        0 |       0 |        3 |       12 |        6 |        1 |        3 |        1 |       0 |      0 |      1 |     12 |     24 |     10 |      3 |      3 |     81 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     35 |      0 |      1 | s03      | R    |
| 33650003 |    130 |     98 |      3 |     1 |    0 |     25 |    0 |    3 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     40 |     90 |       4 |       0 |       0 |       1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       5 |      0 |      0 |      0 |      0 |        4 |        5 |        5 |        5 |        4 |        3 |       1 |        2 |       13 |       14 |       14 |       17 |       10 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        2 |        4 |        4 |        0 |       0 |        1 |        7 |        1 |        4 |        1 |        2 |       0 |      0 |      0 |     26 |     15 |      2 |      3 |      0 |     52 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      6 |      0 |      0 |      1 |     15 |      0 |      1 | s03      | R    |
| 33650004 |    343 |    236 |      8 |     7 |    0 |     73 |    2 |    3 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    148 |    195 |      19 |       0 |       0 |       8 |      6 |      1 |      0 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      2 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        7 |        5 |       16 |       11 |       16 |       24 |       8 |       20 |       23 |       27 |       28 |       16 |       21 |      14 |        2 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       12 |       16 |        9 |        4 |        4 |       0 |        8 |       18 |        7 |        4 |        5 |        2 |       0 |      0 |      2 |     40 |     17 |     15 |      4 |      5 |    153 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     14 |      3 |      0 |      0 |     62 |      0 |      1 | s03      | R    |
| 33660001 |     10 |      5 |      2 |     1 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      5 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 33660002 |    530 |    377 |     12 |    18 |    0 |    105 |    1 |   11 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    177 |    353 |       7 |       0 |       0 |       5 |      6 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      4 |       4 |       0 |       0 |       4 |      0 |      1 |      0 |      3 |       11 |       17 |       33 |       23 |       18 |       12 |       2 |       27 |       61 |       54 |       46 |       34 |       30 |       9 |        0 |        1 |        1 |        7 |        0 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       17 |       11 |        3 |        5 |        4 |       0 |       25 |       28 |       14 |       11 |        7 |        4 |       1 |      0 |      5 |     56 |     40 |     16 |      6 |     11 |    243 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     32 |      6 |      1 |      0 |     88 |      0 |      1 | s03      | R    |
| 33660003 |      2 |      0 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 33661001 |     64 |     52 |      4 |     0 |    0 |      3 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     23 |     41 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        3 |        4 |        2 |        2 |       5 |        1 |        6 |        5 |        6 |        5 |        7 |       3 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        5 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      8 |      3 |      2 |      1 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 33661002 |    463 |    346 |      9 |     6 |    0 |     91 |    0 |    6 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    177 |    286 |      14 |       0 |       0 |       5 |      7 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |       3 |       2 |       0 |       3 |      0 |      0 |      0 |      0 |       13 |       28 |       23 |       33 |       14 |       14 |       1 |       24 |       42 |       53 |       29 |       31 |       34 |       7 |        1 |        1 |        0 |        0 |        3 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       12 |        8 |        5 |        3 |        3 |       0 |       11 |       27 |       14 |       10 |        1 |        0 |       0 |      0 |      0 |     49 |     41 |     17 |      1 |      6 |    232 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     15 |      3 |      0 |      0 |     77 |      0 |      1 | s03      | R    |
| 33661003 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 33671000 |    689 |    500 |     29 |    11 |    0 |    128 |    1 |    7 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    306 |    383 |       6 |       0 |       0 |       1 |      5 |      1 |      0 |      0 |     33 |      2 |      0 |     10 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      3 |      2 |      0 |      0 |      2 |       4 |       3 |       0 |       3 |      2 |      0 |      0 |      1 |        7 |       20 |       33 |       37 |       30 |       60 |      14 |       21 |       39 |       51 |       43 |       43 |       84 |      18 |        2 |        2 |        1 |        8 |        2 |        4 |       0 |        1 |        1 |        2 |        1 |        2 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       23 |       14 |       16 |        9 |       18 |       1 |       14 |       26 |        9 |        6 |        6 |       12 |       1 |      0 |     19 |     69 |     79 |     25 |     13 |     17 |    278 |      0 |      0 |      0 |      4 |      5 |      1 |      1 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     29 |     31 |      7 |      3 |      1 |     84 |      0 |      1 | s03      | R    |
| 33680001 |    229 |    167 |      4 |     3 |    0 |     49 |    0 |    6 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     71 |    158 |       5 |       1 |       0 |       2 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |       15 |       12 |       11 |        4 |        7 |       2 |        9 |       32 |       22 |       23 |       13 |       17 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        4 |        5 |        2 |        1 |        3 |       0 |        9 |       11 |        7 |        5 |        4 |        3 |       0 |      0 |      3 |     17 |     15 |     11 |      3 |      2 |    116 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |     15 |      1 |      0 |      0 |     34 |      0 |      1 | s03      | R    |
| 33680002 |      4 |      2 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 33680003 |    113 |     86 |      5 |     1 |    0 |     19 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     39 |     74 |       3 |       0 |       0 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      7 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        1 |        4 |        6 |        6 |        4 |        4 |       1 |        6 |        7 |        8 |        5 |       11 |       19 |       4 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        4 |        1 |        2 |       0 |        1 |        0 |        2 |        2 |        0 |        7 |       0 |      0 |      0 |      9 |     16 |      9 |      2 |      0 |     50 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      1 |     14 |      0 |      1 | s03      | R    |
| 33680004 |     60 |     40 |      3 |     1 |    0 |     16 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     34 |     26 |       1 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        1 |        3 |        6 |        8 |        1 |        3 |       1 |        1 |        3 |        2 |        6 |        4 |        0 |       1 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        2 |        0 |        3 |       0 |        1 |        4 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |      6 |     13 |      1 |      1 |      0 |     19 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 33681001 |    248 |    132 |     16 |     7 |    0 |     76 |    2 |    1 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    106 |    142 |       9 |       2 |       0 |       8 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     19 |      4 |      0 |     36 |      1 |      0 |      0 |      0 |       6 |       1 |       0 |       4 |      6 |      4 |      0 |      1 |        1 |        4 |        4 |       10 |        1 |       25 |       1 |        1 |       15 |        7 |        5 |        5 |       51 |       2 |        0 |        0 |        2 |        0 |        2 |        2 |       1 |        0 |        3 |        2 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       12 |       11 |        9 |        2 |       15 |       0 |        3 |       13 |        4 |        4 |        2 |       21 |       0 |      0 |      1 |     19 |     29 |     12 |      6 |      1 |     64 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |      6 |      3 |      2 |      0 |     74 |      0 |      1 | s03      | R    |
| 33681003 |     26 |     16 |      0 |     0 |    0 |      8 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |     15 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        3 |        1 |        3 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        3 |        1 |        0 |        0 |       0 |        2 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 33690000 |    397 |    229 |     32 |     5 |    0 |    116 |    2 |    0 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    160 |       5 |       1 |       0 |       5 |      4 |      2 |      0 |      5 |      3 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     35 |      5 |      0 |     63 |      0 |      0 |      0 |      0 |       5 |       1 |       0 |       8 |      7 |      2 |      0 |      4 |        3 |       14 |       30 |       46 |       29 |       20 |       0 |        5 |       14 |       17 |       21 |       14 |       15 |       1 |        1 |        2 |        6 |        4 |        5 |        5 |       2 |        0 |        2 |        1 |        3 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        7 |       19 |       13 |       12 |       18 |       0 |        1 |       17 |       12 |       13 |       12 |       11 |       0 |      0 |      1 |     35 |     27 |      4 |      1 |      2 |    159 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      1 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     17 |      0 |      0 |      1 |     97 |      0 |      1 | s03      | R    |
| 33691000 |    145 |     81 |     10 |     2 |    0 |     39 |    2 |    0 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |     89 |     56 |       3 |       0 |       0 |       2 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        6 |        8 |       11 |       13 |        6 |       0 |        1 |        7 |       11 |        5 |        4 |        6 |       1 |        0 |        0 |        1 |        3 |        2 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       10 |       10 |        4 |        4 |        2 |       1 |        4 |        4 |        5 |        4 |        0 |        0 |       1 |      0 |      1 |     12 |     20 |      0 |      0 |      0 |     48 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      5 |      0 |      0 |      0 |     40 |      0 |      1 | s03      | R    |
| 33692001 |      8 |      2 |      1 |     0 |    0 |      3 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 33700000 |    615 |    230 |     79 |    11 |    0 |    293 |    0 |    2 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    305 |    310 |      10 |       0 |       0 |       2 |      2 |      1 |      0 |      0 |      5 |      5 |      0 |      7 |      6 |      0 |      0 |      1 |    109 |     53 |      0 |    220 |      3 |      0 |      0 |      3 |       5 |       4 |       0 |      15 |      1 |      0 |      0 |      3 |        4 |       12 |       17 |       21 |       15 |       47 |       2 |        1 |       12 |       22 |       23 |       14 |       39 |       1 |        1 |        4 |        3 |        6 |        8 |       19 |       4 |        0 |        2 |        3 |        2 |        6 |       15 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        7 |       19 |       16 |       18 |       74 |       0 |        4 |       17 |       12 |       20 |       23 |       85 |       3 |      0 |      1 |     36 |     45 |      6 |      3 |      7 |    132 |      0 |      0 |      0 |      9 |     13 |      7 |      2 |      5 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     57 |     67 |     11 |      2 |      5 |    164 |      0 |      1 | s03      | R    |
| 33710000 |    772 |    408 |     40 |    12 |    0 |    264 |    6 |    3 |    39 |    0 |    0 |    0 |    0 |    0 |    0 |    376 |    396 |      26 |       2 |       0 |      20 |      7 |      3 |      0 |     18 |     18 |      2 |      0 |     26 |      1 |      0 |      0 |      3 |     19 |      8 |      0 |     57 |      1 |      0 |      0 |      2 |       4 |       1 |       0 |       5 |      7 |      1 |      0 |      5 |        8 |       46 |       36 |       27 |       26 |       48 |       3 |       13 |       53 |       34 |       28 |       11 |       67 |       8 |        1 |        2 |        4 |        3 |        8 |        5 |       1 |        1 |        4 |        3 |        2 |        2 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       52 |       29 |       20 |       11 |       33 |       1 |       14 |       66 |       19 |       13 |        9 |       44 |       1 |      0 |      4 |     61 |     73 |      8 |      2 |      9 |    251 |      0 |      0 |      1 |      5 |      8 |      2 |      2 |      1 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     62 |     46 |      1 |      2 |      0 |    206 |      0 |      1 | s03      | R    |
| 33711001 |    498 |    158 |     27 |     7 |    0 |    303 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    215 |    283 |       2 |       2 |       0 |       4 |      1 |      0 |      0 |      0 |      9 |      2 |      0 |      8 |      0 |      0 |      0 |      0 |     65 |      9 |      0 |    235 |      0 |      0 |      0 |      0 |      12 |       3 |       0 |      18 |      0 |      1 |      0 |      0 |        3 |        3 |        4 |       14 |       18 |       42 |       1 |        2 |        4 |        4 |        7 |        7 |       48 |       1 |        0 |        2 |        3 |        1 |        1 |        8 |       0 |        0 |        3 |        0 |        0 |        2 |        7 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        5 |        5 |       10 |       10 |       82 |       0 |        4 |        7 |       18 |       15 |        5 |      148 |       1 |      0 |      0 |     27 |     49 |      5 |      1 |      2 |     74 |      0 |      0 |      0 |      3 |      8 |      2 |      3 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     72 |     92 |      7 |      1 |      3 |    138 |      0 |      1 | s03      | R    |
| 33711002 |     75 |     25 |      2 |     0 |    0 |     48 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     25 |     50 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     19 |      1 |      0 |     35 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       6 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        9 |       0 |        0 |        0 |        1 |        0 |        0 |       14 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |       11 |       1 |        0 |        0 |        1 |        0 |        1 |       32 |       0 |      0 |      0 |      2 |      7 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     22 |      0 |      0 |      0 |     17 |      0 |      1 | s03      | R    |
| 33720000 |     13 |     10 |      1 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      4 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        2 |        1 |        0 |       1 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 34400000 |    600 |    357 |     65 |     8 |    0 |    148 |    3 |    4 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    368 |      69 |      15 |       0 |      23 |     12 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     18 |     13 |      0 |     13 |      3 |      0 |      0 |      0 |       7 |       3 |       0 |       4 |      5 |      6 |      0 |      7 |       14 |       13 |       35 |       20 |       18 |       16 |       5 |       22 |       49 |       54 |       43 |       32 |       23 |      13 |        0 |        6 |        7 |        9 |        7 |        5 |       2 |        1 |        4 |        5 |       10 |        1 |        7 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       19 |       16 |       10 |       13 |        6 |       0 |       18 |       26 |       28 |       17 |        5 |        7 |       2 |      0 |      5 |     49 |     53 |     20 |     14 |      8 |    208 |      0 |      0 |      1 |      7 |     20 |      5 |      4 |      2 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     26 |     29 |      9 |      1 |      5 |    108 |      0 |      1 | s03      | R    |
| 34401000 |     92 |     54 |      6 |     0 |    0 |     25 |    1 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     41 |     51 |      18 |       0 |       0 |       3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        2 |       10 |        6 |        4 |        2 |        0 |       0 |        3 |        5 |        9 |        9 |        3 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        5 |        1 |        6 |        1 |        0 |       0 |        4 |        7 |        3 |        1 |        1 |        0 |       0 |      0 |      1 |      7 |     16 |      3 |      3 |      0 |     24 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      2 |      2 |      1 |      0 |     21 |      0 |      1 | s03      | R    |
| 34410001 |    815 |    522 |     73 |    11 |    0 |    188 |    6 |    4 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    371 |    444 |      74 |      15 |       0 |      20 |     13 |      3 |      0 |      4 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      3 |     36 |      5 |      0 |     64 |      0 |      0 |      0 |      0 |      12 |       1 |       0 |       7 |      6 |      0 |      0 |      3 |       21 |       49 |       43 |       41 |       25 |       30 |      17 |       31 |       54 |       68 |       68 |       28 |       24 |      23 |        2 |       10 |       10 |        8 |        7 |        2 |       1 |        3 |        8 |        6 |        6 |        5 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       31 |       24 |       21 |        8 |       11 |       1 |       18 |       34 |       26 |       16 |       14 |        6 |       1 |      0 |      4 |     52 |    101 |     31 |      8 |     15 |    311 |      0 |      0 |      1 |      2 |      9 |      4 |      3 |      5 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     33 |      5 |      1 |      4 |    142 |      0 |      1 | s03      | R    |
| 34410002 |    107 |     68 |      8 |     3 |    0 |     23 |    1 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     53 |     54 |       9 |       4 |       0 |      10 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |       6 |       0 |       0 |       3 |      0 |      0 |      0 |      0 |        6 |        9 |        3 |        4 |        3 |        4 |       0 |        7 |       11 |        6 |        9 |        1 |        4 |       1 |        1 |        0 |        4 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        2 |        6 |        3 |        1 |       0 |        3 |        0 |        5 |        3 |        2 |        1 |       0 |      0 |      1 |      8 |     12 |      4 |      0 |      0 |     43 |      0 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      7 |      1 |      0 |      0 |     16 |      0 |      1 | s03      | R    |
| 34411000 |    571 |    342 |     36 |     9 |    0 |    167 |    2 |    4 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    235 |    336 |      55 |       7 |       0 |      29 |      4 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     14 |      2 |      0 |     41 |      0 |      0 |      0 |      4 |       9 |       5 |       0 |      13 |      3 |      2 |      0 |      6 |        9 |       18 |       25 |       32 |       23 |       19 |       6 |       23 |       42 |       47 |       44 |       29 |       17 |       8 |        1 |        2 |        3 |        5 |        2 |        3 |       1 |        0 |        6 |        1 |        5 |        4 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       20 |       18 |       20 |        9 |        7 |       2 |       14 |       33 |       18 |       21 |       12 |        8 |       1 |      0 |      4 |     40 |     57 |     17 |      7 |     12 |    205 |      0 |      0 |      0 |      4 |     13 |      1 |      0 |      2 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     23 |     28 |      6 |      1 |      2 |    132 |      0 |      1 | s03      | R    |
| 34420001 |   1051 |    648 |     70 |    13 |    0 |    279 |    3 |    3 |    35 |    0 |    0 |    0 |    0 |    0 |    0 |    442 |    609 |      49 |       6 |       0 |      22 |     16 |      4 |      0 |      8 |      6 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     46 |      6 |      0 |     74 |     10 |      0 |      0 |      1 |      12 |       6 |       0 |      11 |     11 |      3 |      0 |      4 |       14 |       60 |       48 |       53 |       32 |       24 |       5 |       34 |       81 |       87 |       92 |       60 |       40 |      18 |        2 |       11 |        7 |        7 |        7 |        4 |       2 |        1 |        7 |        7 |        6 |        2 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       48 |       26 |       35 |       23 |       14 |       2 |       22 |       40 |       38 |       34 |       20 |       11 |       2 |      0 |      3 |     75 |    101 |     43 |      9 |     31 |    386 |      0 |      0 |      0 |     11 |     10 |      5 |      3 |      3 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     48 |     48 |     16 |      3 |      0 |    217 |      0 |      1 | s03      | R    |
| 34420002 |     26 |     19 |      0 |     0 |    0 |      7 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     16 |       7 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        3 |        3 |        1 |        1 |        0 |       0 |        0 |        1 |        5 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        2 |        2 |       0 |      0 |      0 |      2 |      1 |      3 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      5 |      0 |      1 | s03      | R    |
| 34430000 |    662 |    436 |     46 |     6 |    0 |    146 |    2 |    2 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    282 |    380 |      16 |       0 |       0 |       6 |     30 |      1 |      0 |      5 |      2 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     30 |      2 |      0 |     38 |      1 |      0 |      0 |      2 |       3 |       0 |       0 |       9 |      6 |      0 |      0 |      1 |       12 |       26 |       36 |       51 |       28 |       11 |       9 |       16 |       37 |       58 |       78 |       39 |       18 |      17 |        0 |        2 |        2 |        2 |        5 |        4 |       7 |        0 |        4 |        4 |        1 |        4 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       12 |       27 |       20 |        6 |        7 |       1 |       10 |       27 |       21 |       19 |        7 |        9 |       0 |      0 |      3 |     38 |     77 |     38 |     17 |     16 |    247 |      0 |      0 |      1 |      4 |      3 |      2 |      0 |      2 |     34 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     26 |     13 |      2 |      3 |    116 |      0 |      1 | s03      | R    |
| 34440000 |    660 |    390 |    125 |     9 |    0 |    112 |    1 |    2 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    296 |    364 |      24 |       5 |       0 |       5 |     36 |      5 |      0 |     12 |      1 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |     22 |     22 |      0 |     24 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      5 |      0 |      0 |      2 |        6 |       14 |       32 |       46 |       29 |       18 |      21 |        7 |       24 |       51 |       68 |       33 |       22 |      19 |        1 |        4 |       17 |        7 |       11 |       14 |      12 |        0 |        4 |        6 |        6 |       10 |       11 |      22 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       13 |       18 |       12 |       13 |        4 |       0 |        5 |       18 |       24 |       11 |       10 |       10 |       3 |      0 |      5 |     37 |     54 |     41 |     14 |     22 |    217 |      0 |      0 |      0 |      3 |     21 |      9 |      4 |      2 |     86 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     20 |      8 |      3 |      5 |     85 |      0 |      1 | s03      | R    |
| 34450000 |    661 |    375 |     56 |     8 |    0 |    178 |    2 |    2 |    40 |    0 |    0 |    0 |    0 |    0 |    0 |    284 |    377 |      29 |       5 |       0 |      14 |     15 |      1 |      0 |      8 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |     24 |      4 |      0 |     46 |      2 |      0 |      0 |      1 |       2 |       0 |       0 |       6 |      1 |      1 |      0 |      6 |        8 |       24 |       26 |       36 |       13 |       19 |       6 |       15 |       45 |       55 |       65 |       31 |       16 |      16 |        2 |        5 |        4 |        9 |        4 |        7 |       1 |        0 |        3 |        5 |        2 |        3 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       30 |       27 |       24 |       17 |        7 |       1 |       21 |       24 |       27 |       21 |       13 |        4 |       0 |      0 |      4 |     47 |     48 |     29 |      9 |     16 |    222 |      0 |      0 |      0 |      7 |     11 |      1 |      3 |      2 |     32 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     28 |     34 |     13 |      4 |      3 |    144 |      0 |      1 | s03      | R    |
| 34460000 |    647 |    428 |     48 |     5 |    0 |    142 |    1 |    2 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    369 |      34 |       2 |       0 |      17 |     23 |      5 |      0 |      9 |      1 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     39 |      3 |      0 |     34 |      0 |      0 |      0 |      1 |       2 |       2 |       0 |       2 |      4 |      1 |      0 |      2 |        8 |       22 |       41 |       46 |       25 |       15 |       9 |       13 |       46 |       66 |       71 |       32 |       18 |      16 |        2 |        5 |        2 |        9 |        0 |        6 |       7 |        1 |        5 |        3 |        2 |        2 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       10 |       22 |       18 |       11 |        8 |       1 |        6 |       22 |       17 |       24 |       14 |        6 |       1 |      0 |      2 |     48 |     72 |     33 |      8 |     20 |    245 |      0 |      0 |      1 |      3 |      7 |      1 |      3 |      2 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     17 |     31 |      7 |      5 |      6 |    100 |      0 |      1 | s03      | R    |
| 34470000 |    589 |    381 |     79 |     7 |    0 |     94 |    3 |    3 |    22 |    0 |    0 |    0 |    0 |    0 |    0 |    266 |    323 |      23 |       4 |       0 |       7 |     31 |      2 |      0 |     17 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      4 |      9 |      1 |      0 |      4 |      3 |      1 |      0 |      3 |       0 |       1 |       0 |       1 |      7 |      1 |      0 |      3 |        7 |       15 |       32 |       37 |       23 |       17 |      23 |        7 |       28 |       48 |       69 |       26 |       24 |      25 |        0 |        2 |        8 |        7 |        4 |        7 |      11 |        0 |        4 |        7 |        5 |        3 |        8 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       10 |       18 |       18 |       11 |        3 |       0 |        4 |        8 |       11 |       13 |       15 |        4 |       1 |      0 |      0 |     30 |     61 |     35 |     19 |     17 |    219 |      0 |      0 |      0 |      2 |     10 |      3 |      6 |      4 |     54 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     20 |      5 |      1 |     12 |     76 |      0 |      1 | s03      | R    |
| 34480001 |    427 |    260 |     67 |     4 |    0 |     74 |    1 |    1 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    182 |    245 |      12 |       3 |       0 |       7 |     27 |      3 |      0 |     10 |      2 |      0 |      0 |      0 |      5 |      3 |      0 |      2 |      8 |      5 |      0 |      4 |      0 |      1 |      0 |      2 |       1 |       2 |       0 |       3 |      0 |      0 |      0 |      1 |        3 |       15 |       30 |       17 |       13 |       13 |       8 |        7 |       19 |       42 |       40 |       27 |       14 |      12 |        1 |        4 |        6 |        5 |        5 |        6 |      10 |        2 |        1 |        7 |        4 |        3 |        5 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        6 |       20 |        7 |        4 |        2 |       1 |        6 |       13 |       18 |        9 |        5 |        3 |       0 |      0 |      3 |     26 |     33 |     20 |      9 |      9 |    160 |      0 |      0 |      0 |      2 |     10 |      2 |      4 |      3 |     46 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |      6 |      9 |      4 |      1 |     66 |      0 |      1 | s03      | R    |
| 34480002 |    179 |    102 |     36 |     1 |    0 |     38 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     87 |     92 |      12 |       3 |       0 |       1 |      8 |      4 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      3 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      0 |      0 |      0 |      0 |        4 |        4 |        5 |       17 |        5 |        8 |       5 |        1 |        6 |       15 |       11 |       10 |        3 |       8 |        0 |        4 |        2 |        3 |        2 |        5 |       2 |        0 |        2 |        3 |        0 |        1 |        6 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        6 |        7 |        2 |        3 |        0 |       0 |        5 |        4 |        5 |        2 |        3 |        1 |       0 |      0 |      0 |      7 |     15 |      9 |      5 |      6 |     60 |      0 |      0 |      0 |      3 |      4 |      5 |      1 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      3 |      3 |      3 |      4 |     23 |      0 |      1 | s03      | R    |
| 34490001 |    720 |    467 |     79 |     4 |    0 |    138 |    0 |    2 |    30 |    0 |    0 |    0 |    0 |    0 |    0 |    320 |    400 |      27 |       2 |       0 |      20 |     29 |      3 |      0 |      7 |      0 |      1 |      0 |      1 |      7 |      2 |      0 |      2 |     36 |      8 |      0 |     26 |      2 |      0 |      0 |      3 |       5 |       1 |       0 |       5 |      3 |      1 |      0 |      3 |        8 |       21 |       37 |       51 |       34 |       29 |       9 |        6 |       36 |       50 |       79 |       49 |       37 |      21 |        1 |        6 |        7 |        7 |        7 |        8 |       7 |        0 |        4 |        7 |        4 |        6 |        8 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       23 |       14 |       21 |       11 |        8 |       0 |       15 |       25 |       12 |       13 |       14 |        7 |       0 |      0 |      4 |     62 |     73 |     41 |     19 |     21 |    247 |      0 |      0 |      0 |      9 |     10 |      2 |      1 |      3 |     54 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     44 |      4 |      6 |      4 |     81 |      0 |      1 | s03      | R    |
| 34490002 |     69 |     45 |      0 |     1 |    0 |     23 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     35 |     34 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        8 |        4 |        2 |        5 |        3 |        1 |       0 |        5 |        8 |        1 |        4 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        4 |        0 |        1 |        0 |       0 |        2 |        4 |        4 |        1 |        1 |        0 |       0 |      0 |      0 |      0 |      6 |      2 |      0 |      1 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     16 |      0 |      1 | s03      | R    |
| 34491000 |    100 |     65 |     14 |     2 |    0 |     15 |    0 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     48 |     52 |       3 |       0 |       0 |       3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        4 |        4 |        6 |        5 |       7 |        0 |        4 |        6 |        6 |        6 |        4 |      10 |        0 |        0 |        1 |        1 |        2 |        0 |       2 |        0 |        1 |        1 |        2 |        1 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        1 |        4 |        1 |        1 |        0 |       1 |        2 |        2 |        3 |        0 |        0 |        1 |       0 |      0 |      0 |      6 |      4 |      2 |      2 |      1 |     50 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      4 |      1 |      0 |      0 |     11 |      0 |      1 | s03      | R    |
| 34500000 |    825 |    509 |     76 |    10 |    0 |    208 |    1 |    3 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    331 |    494 |      55 |       4 |       0 |      14 |     25 |      1 |      0 |      4 |      4 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     42 |     13 |      0 |     73 |      0 |      0 |      0 |      2 |      13 |       3 |       0 |      11 |      3 |      3 |      0 |      3 |       18 |       42 |       36 |       41 |       21 |       14 |      11 |       17 |       68 |       73 |       83 |       37 |       27 |      21 |        0 |        6 |        9 |        3 |        8 |        6 |       2 |        3 |       13 |        4 |        6 |        5 |        9 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       25 |       24 |       23 |        9 |       11 |       3 |       12 |       41 |       30 |       23 |        9 |       10 |       1 |      0 |      6 |     67 |     91 |     33 |     16 |     13 |    283 |      0 |      0 |      1 |      9 |     11 |      7 |      1 |      5 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     29 |     36 |     12 |      3 |      2 |    155 |      0 |      1 | s03      | R    |
| 34510000 |    830 |    534 |     58 |    16 |    0 |    182 |    2 |    5 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    337 |    493 |      49 |       8 |       0 |      14 |      8 |      0 |      0 |      7 |      1 |      0 |      0 |      6 |      2 |      3 |      0 |      1 |     42 |      7 |      0 |     44 |      7 |      0 |      0 |      1 |       3 |       6 |       0 |      12 |      4 |      0 |      0 |      1 |       16 |       33 |       52 |       42 |       21 |       21 |       6 |       26 |       72 |       68 |       88 |       51 |       30 |       8 |        2 |        1 |        5 |        5 |        3 |       10 |       4 |        1 |        4 |        6 |        4 |        6 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       34 |       25 |       25 |       15 |        8 |       0 |       18 |       43 |       24 |       18 |       13 |        6 |       0 |      0 |      2 |     54 |     98 |     42 |     11 |     11 |    316 |      0 |      0 |      0 |      6 |      8 |      3 |      1 |      1 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     42 |     33 |     15 |      4 |      1 |    142 |      0 |      1 | s03      | R    |
| 34520000 |    748 |    563 |     29 |    15 |    0 |    116 |    2 |    4 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    313 |    435 |      40 |       5 |       0 |      13 |     13 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      2 |      0 |      3 |      4 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |      2 |      0 |      0 |      1 |       19 |       32 |       39 |       57 |       40 |       21 |      24 |       20 |       45 |       63 |       79 |       58 |       25 |      41 |        0 |        1 |        1 |        3 |        3 |        4 |       3 |        3 |        1 |        3 |        1 |        1 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       19 |       17 |       11 |        4 |        5 |       0 |       11 |       34 |       19 |       17 |        3 |        5 |       1 |      0 |      0 |     52 |     66 |     44 |     18 |     21 |    362 |      0 |      0 |      0 |      2 |      2 |      3 |      0 |      0 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     22 |     24 |      8 |      2 |      2 |     95 |      0 |      1 | s03      | R    |
| 34530002 |     13 |      6 |      3 |     0 |    0 |      3 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |     11 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 34530003 |    222 |    100 |      2 |     1 |    0 |     77 |    1 |    0 |    41 |    0 |    0 |    0 |    0 |    0 |    0 |     23 |    199 |       9 |       0 |       0 |      10 |      4 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        2 |        2 |        0 |        1 |        0 |       0 |       56 |       22 |        7 |        7 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |        2 |        2 |        0 |        2 |       1 |       70 |       23 |        5 |        2 |        1 |        1 |       1 |      0 |      1 |      5 |      3 |      6 |      1 |      0 |     84 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      4 |      1 |      1 |      0 |    106 |      0 |      1 | s03      | R    |
| 34531000 |    474 |    330 |     22 |     9 |    0 |     94 |    2 |    7 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    201 |    273 |      17 |       0 |       0 |      12 |     10 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      2 |        9 |       24 |       23 |       31 |       24 |       14 |      12 |       10 |       34 |       36 |       46 |       30 |       15 |      22 |        0 |        1 |        2 |        2 |        3 |        2 |       1 |        0 |        2 |        1 |        1 |        0 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       24 |       10 |       10 |        5 |        1 |       0 |        3 |       18 |       15 |       19 |        5 |        5 |       4 |      0 |      3 |     36 |     45 |     24 |      7 |     24 |    191 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      2 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     27 |      4 |      3 |      1 |     66 |      0 |      1 | s03      | R    |
| 34540000 |    876 |    571 |    112 |    10 |    0 |    145 |    3 |    5 |    30 |    0 |    0 |    0 |    0 |    0 |    0 |    368 |    508 |      32 |       2 |       0 |      14 |     33 |      5 |      0 |      9 |      5 |      1 |      0 |      3 |      6 |      0 |      0 |      2 |     16 |     13 |      0 |     17 |      5 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      3 |      3 |      0 |      2 |        6 |       21 |       53 |       60 |       36 |       25 |      16 |       23 |       57 |       62 |       77 |       58 |       46 |      31 |        2 |        4 |        5 |       10 |       10 |       13 |      12 |        0 |        5 |        7 |       12 |        7 |       10 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       26 |       26 |       19 |       11 |        6 |       0 |       14 |       31 |       26 |       10 |       13 |        4 |       0 |      0 |      4 |     61 |     86 |     38 |     15 |     29 |    338 |      0 |      0 |      1 |      2 |     14 |      6 |      7 |      5 |     77 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     24 |     34 |      9 |      4 |      2 |    118 |      0 |      1 | s03      | R    |
| 34550000 |    640 |    406 |     55 |    11 |    0 |    136 |    4 |    1 |    27 |    0 |    0 |    0 |    0 |    0 |    0 |    259 |    381 |      30 |       2 |       0 |      14 |     18 |      2 |      0 |      7 |      2 |      0 |      0 |      1 |      3 |      1 |      0 |      2 |     17 |      1 |      0 |     24 |      0 |      0 |      0 |      0 |       9 |       4 |       0 |      11 |      4 |      2 |      0 |      2 |        5 |       30 |       30 |       30 |       25 |       10 |      13 |       15 |       51 |       57 |       66 |       43 |       11 |      20 |        1 |        1 |        3 |        2 |        5 |        3 |       5 |        0 |        4 |        4 |        5 |        4 |        7 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       20 |       25 |       22 |        9 |        6 |       1 |        7 |       24 |       13 |       21 |       12 |        4 |       2 |      0 |      3 |     38 |     73 |     32 |     11 |     11 |    238 |      0 |      0 |      0 |      2 |     10 |      2 |      2 |      3 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     25 |     34 |     12 |      6 |      1 |     98 |      0 |      1 | s03      | R    |
| 34560000 |    507 |    311 |     74 |     3 |    0 |     93 |    1 |    1 |    24 |    0 |    0 |    0 |    0 |    0 |    0 |    209 |    298 |      23 |       1 |       0 |       8 |     21 |      2 |      0 |      6 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      3 |     11 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |       0 |       3 |       0 |       2 |      4 |      4 |      0 |      0 |        3 |       12 |       28 |       27 |       20 |       16 |      14 |       11 |       20 |       38 |       49 |       35 |       17 |      21 |        1 |        2 |        8 |        5 |        4 |        8 |       7 |        0 |        2 |        4 |        9 |        1 |        9 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       13 |        9 |       10 |       10 |        7 |       1 |        5 |       15 |       22 |       14 |        7 |        3 |       2 |      0 |      1 |     38 |     52 |     35 |      9 |     13 |    163 |      0 |      0 |      0 |      0 |      7 |      6 |      2 |      1 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     14 |     20 |      8 |      3 |      4 |     69 |      0 |      1 | s03      | R    |
| 34561000 |    156 |    110 |     18 |     0 |    0 |     24 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     72 |     84 |       5 |       0 |       0 |       2 |      5 |      0 |      0 |      2 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        3 |        2 |       11 |       13 |        7 |        5 |       5 |        2 |       11 |       14 |       23 |        7 |        3 |       4 |        0 |        1 |        2 |        0 |        2 |        2 |       1 |        0 |        2 |        1 |        1 |        0 |        2 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        5 |        2 |        6 |        1 |       1 |        3 |        2 |        0 |        2 |        1 |        1 |       1 |      0 |      0 |     17 |     15 |      6 |      2 |      5 |     65 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     23 |      0 |      1 | s03      | R    |
| 34570000 |    747 |    465 |    100 |     8 |    0 |    142 |    3 |    1 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    318 |    429 |      34 |       3 |       0 |      12 |     26 |      5 |      0 |      9 |      5 |      0 |      0 |      0 |     12 |      1 |      0 |      2 |     32 |      3 |      0 |     28 |      1 |      0 |      0 |      0 |       2 |       0 |       0 |       1 |      1 |      2 |      0 |      2 |        6 |       16 |       45 |       44 |       29 |       15 |      13 |       16 |       44 |       59 |       81 |       36 |       26 |      35 |        2 |       10 |       11 |       11 |        9 |        4 |       9 |        0 |        3 |       12 |        6 |        5 |        6 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       20 |       23 |       25 |        6 |        5 |       2 |        8 |       18 |       25 |       25 |        9 |        3 |       0 |      0 |      2 |     55 |     62 |     45 |     22 |     23 |    256 |      0 |      0 |      1 |      6 |     15 |      9 |      5 |      7 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     22 |      7 |      7 |      4 |    107 |      0 |      1 | s03      | R    |
| 34571000 |    100 |     54 |     22 |     1 |    0 |     20 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     48 |     52 |       5 |       1 |       0 |       5 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        8 |        6 |        3 |        6 |        0 |       2 |        0 |        8 |        6 |        8 |        1 |        2 |       4 |        0 |        1 |        3 |        2 |        3 |        1 |       0 |        0 |        1 |        3 |        4 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        4 |        3 |        3 |        0 |       0 |        0 |        8 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |      9 |      3 |      0 |      2 |     35 |      0 |      0 |      0 |      1 |      1 |      3 |      4 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      5 |      1 |      1 |      1 |     13 |      0 |      1 | s03      | R    |
| 34580000 |    390 |    218 |     94 |     3 |    0 |     64 |    1 |    0 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    174 |    216 |       9 |       2 |       0 |       2 |      7 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |     20 |     14 |      0 |     16 |      1 |      2 |      0 |      2 |       4 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |        2 |        4 |       18 |       16 |       26 |       16 |       8 |        8 |        9 |       26 |       22 |       18 |       21 |      24 |        0 |        1 |        9 |        6 |        6 |       14 |       8 |        0 |        4 |       10 |        6 |        3 |       15 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        6 |        9 |        8 |        5 |        7 |       2 |        2 |        7 |        8 |       13 |        4 |        3 |       1 |      0 |      0 |     20 |     25 |     17 |     10 |      8 |    138 |      0 |      0 |      0 |      4 |     12 |      6 |      2 |      1 |     69 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      6 |      6 |      5 |      1 |     49 |      0 |      1 | s03      | R    |
| 34590001 |    534 |    338 |     77 |     3 |    0 |    106 |    0 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    234 |    300 |      24 |       5 |       0 |       9 |     19 |      2 |      0 |      7 |      7 |      0 |      0 |      4 |      3 |      1 |      0 |      1 |     20 |      7 |      0 |     23 |      1 |      2 |      0 |      1 |       1 |       0 |       0 |       3 |      2 |      1 |      0 |      1 |        8 |       14 |       25 |       31 |       24 |       11 |      12 |       19 |       32 |       35 |       48 |       30 |       32 |      17 |        1 |        9 |        9 |        8 |        7 |        9 |       4 |        3 |        1 |        3 |        4 |        3 |        8 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       13 |       16 |       11 |        7 |        7 |       0 |       11 |       10 |       12 |       15 |        6 |        3 |       0 |      0 |      4 |     31 |     71 |     27 |     17 |     15 |    173 |      0 |      0 |      0 |      9 |     16 |      6 |      2 |      0 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     18 |     17 |      7 |      2 |      2 |     71 |      0 |      1 | s03      | R    |
| 34590002 |    110 |     78 |     13 |     1 |    0 |     14 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     51 |     59 |       1 |       0 |       0 |       1 |      6 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        7 |       10 |        8 |        3 |       5 |        5 |        3 |        7 |       10 |       10 |        3 |       6 |        0 |        0 |        1 |        2 |        2 |        2 |       0 |        0 |        0 |        1 |        2 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        0 |        4 |        0 |        1 |       0 |        0 |        3 |        3 |        2 |        1 |        0 |       0 |      0 |      0 |      6 |      8 |      4 |      1 |      7 |     52 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      4 |      0 |      1 |      0 |      9 |      0 |      1 | s03      | R    |
| 34600000 |    440 |    221 |     37 |    10 |    0 |    154 |    4 |    2 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    191 |    249 |      35 |       1 |       0 |      10 |      7 |      3 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |     27 |      6 |      0 |     71 |      3 |      0 |      0 |      0 |      10 |       1 |       0 |      18 |      1 |      0 |      0 |      3 |        6 |       18 |       16 |       19 |        9 |       17 |       6 |        9 |       21 |       29 |       29 |       21 |       14 |       7 |        1 |        0 |        3 |        4 |        2 |        9 |       1 |        0 |        2 |        2 |        4 |        1 |        4 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       19 |       16 |        9 |       14 |       11 |       0 |       14 |       29 |       16 |       19 |       13 |       10 |       1 |      0 |      1 |     28 |     35 |     19 |      1 |      7 |    130 |      0 |      0 |      0 |      5 |      5 |      2 |      2 |      2 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     18 |     27 |      8 |      3 |      0 |    123 |      0 |      1 | s03      | R    |
| 34610000 |    838 |    525 |     55 |    12 |    0 |    212 |    4 |    4 |    26 |    0 |    0 |    0 |    0 |    0 |    0 |    390 |    448 |      92 |      13 |       0 |      33 |     12 |      0 |      0 |      6 |      6 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |     25 |      5 |      0 |     50 |      3 |      1 |      0 |      1 |      13 |       5 |       0 |      16 |      4 |      0 |      0 |      1 |       22 |       46 |       38 |       51 |       30 |       32 |       5 |       24 |       59 |       65 |       62 |       44 |       29 |      18 |        2 |        7 |        7 |        8 |        7 |        1 |       1 |        1 |        6 |        4 |        6 |        2 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       29 |       31 |       29 |       14 |       13 |       1 |       17 |       30 |       24 |       27 |       16 |       10 |       1 |      0 |      3 |     60 |    101 |     26 |      8 |     26 |    301 |      0 |      0 |      0 |      7 |     10 |      3 |      2 |      0 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     26 |     42 |     12 |      0 |      6 |    172 |      0 |      1 | s03      | R    |
| 34620000 |    575 |    340 |     47 |    11 |    0 |    159 |    1 |    6 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    244 |    331 |      71 |       7 |       0 |      30 |      4 |      0 |      0 |      4 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |     21 |      2 |      0 |     31 |      0 |      0 |      0 |      0 |      25 |       8 |       0 |      12 |      1 |      1 |      0 |      6 |       15 |       31 |       29 |       23 |       16 |       15 |       3 |       22 |       37 |       52 |       44 |       22 |       23 |       8 |        2 |        8 |        6 |        3 |        4 |        2 |       1 |        1 |        4 |        5 |        7 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       23 |       31 |        6 |        9 |        5 |       2 |       11 |       29 |       32 |       17 |        7 |        4 |       2 |      0 |      3 |     49 |     55 |     13 |      3 |      7 |    210 |      0 |      0 |      0 |      6 |      8 |      5 |      3 |      2 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     48 |      7 |      2 |      1 |    108 |      0 |      1 | s03      | R    |
| 34640000 |    589 |    381 |     53 |    14 |    0 |    122 |    3 |    5 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    238 |    351 |      73 |       5 |       0 |      38 |     10 |      0 |      0 |      6 |      3 |      4 |      0 |      2 |      1 |      0 |      0 |      1 |     17 |      5 |      0 |     12 |      2 |      0 |      0 |      0 |       3 |       8 |       0 |       8 |      2 |      0 |      0 |      7 |       15 |       29 |       29 |       22 |       18 |       15 |       8 |       33 |       52 |       51 |       42 |       32 |       17 |      18 |        3 |        6 |        6 |        4 |        4 |        2 |       0 |        1 |        6 |       10 |        4 |        1 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       17 |       21 |       14 |        7 |        3 |       2 |        7 |       30 |       11 |       16 |        8 |        4 |       2 |      0 |      2 |     65 |     60 |     26 |      6 |      6 |    216 |      0 |      0 |      0 |      8 |     12 |      1 |      0 |      2 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     31 |     28 |      4 |      2 |      3 |     84 |      0 |      1 | s03      | R    |
| 34700000 |    365 |    277 |     17 |     3 |    0 |     53 |    1 |    3 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    143 |    222 |      29 |       3 |       0 |       7 |      9 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      1 |      0 |      0 |      0 |       11 |       18 |       32 |       22 |       18 |        3 |       4 |       14 |       27 |       31 |       35 |       37 |       10 |      15 |        0 |        2 |        3 |        2 |        2 |        0 |       0 |        0 |        1 |        0 |        2 |        1 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        6 |        3 |        7 |        2 |        2 |       0 |        4 |       14 |        9 |       12 |        5 |        1 |       0 |      0 |      2 |     46 |     46 |     23 |      5 |     15 |    140 |      0 |      0 |      0 |      4 |      3 |      0 |      4 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |     10 |      3 |      0 |      1 |     38 |      0 |      1 | s03      | R    |
| 34710001 |    285 |    211 |      6 |     5 |    0 |     51 |    1 |    3 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    105 |    180 |      29 |       4 |       0 |       5 |      5 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |       15 |       19 |       16 |        8 |        7 |       5 |       13 |       29 |       24 |       36 |       12 |       15 |       9 |        1 |        2 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        8 |        8 |        4 |        4 |        0 |       0 |        8 |       11 |       12 |        4 |        7 |        0 |       0 |      0 |      2 |     24 |     45 |     18 |      5 |      7 |    110 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |     10 |      1 |      2 |      0 |     43 |      0 |      1 | s03      | R    |
| 34710002 |    374 |    282 |     26 |     3 |    0 |     55 |    1 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    137 |    237 |      13 |       0 |       0 |       4 |      8 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       1 |       0 |       2 |      1 |      1 |      0 |      0 |       11 |       16 |       16 |       25 |       17 |        4 |      11 |        9 |       28 |       37 |       56 |       20 |       13 |      19 |        0 |        2 |        1 |        3 |        2 |        0 |       3 |        2 |        2 |        0 |        4 |        1 |        2 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        8 |        7 |        5 |        4 |        0 |       0 |        5 |       11 |       14 |        5 |        2 |        3 |       0 |      0 |      2 |     32 |     57 |     25 |      3 |     15 |    148 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     13 |      6 |      3 |      1 |     34 |      0 |      1 | s03      | R    |
| 34711000 |    808 |    581 |     33 |    16 |    0 |    166 |    0 |    6 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    335 |    473 |     118 |      16 |       0 |      52 |      7 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |       3 |       0 |       0 |       7 |     12 |      2 |      0 |      5 |       22 |       38 |       50 |       47 |       30 |       27 |      18 |       33 |       69 |       79 |       80 |       41 |       27 |      20 |        2 |        3 |        3 |        2 |        2 |        1 |       1 |        2 |        7 |        3 |        3 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       22 |       24 |       18 |        9 |        1 |       0 |       30 |       22 |       24 |       15 |        7 |        7 |       0 |      0 |      5 |     89 |     90 |     39 |     16 |     18 |    324 |      0 |      0 |      0 |      3 |      6 |      2 |      0 |      1 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     28 |     38 |      5 |      0 |      2 |    116 |      0 |      1 | s03      | R    |
| 34720000 |    501 |    331 |     28 |     5 |    0 |    127 |    3 |    4 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    228 |    273 |      56 |       6 |       0 |      31 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      5 |      2 |      0 |      5 |      0 |      0 |      0 |      0 |       3 |       3 |       0 |       8 |      2 |      1 |      0 |      2 |       18 |       21 |       22 |       33 |       20 |       19 |       8 |       16 |       37 |       31 |       33 |       35 |       22 |      16 |        2 |        3 |        0 |        5 |        2 |        2 |       0 |        2 |        1 |        5 |        3 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       16 |       22 |       13 |        9 |        5 |       1 |       14 |       23 |       18 |        9 |        2 |        3 |       0 |      0 |      1 |     40 |     60 |     11 |      3 |      9 |    207 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     21 |      2 |      2 |      1 |     94 |      0 |      1 | s03      | R    |
| 34730000 |    550 |    401 |     20 |    10 |    0 |     99 |    1 |   10 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    227 |    323 |      50 |       2 |       0 |      18 |     12 |      1 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |       1 |       1 |       0 |       4 |      2 |      0 |      0 |      0 |       14 |       33 |       21 |       25 |       26 |       18 |      10 |       21 |       48 |       31 |       64 |       42 |       22 |      26 |        1 |        0 |        3 |        4 |        3 |        0 |       1 |        2 |        0 |        0 |        2 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       20 |       12 |       15 |        3 |        6 |       2 |       10 |       21 |       13 |       11 |        2 |        2 |       2 |      0 |      2 |     49 |     65 |     23 |     11 |     28 |    223 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     24 |     32 |      2 |      3 |      0 |     63 |      0 |      1 | s03      | R    |
| 35330000 |    507 |    280 |     26 |    14 |    0 |    159 |    3 |    0 |    25 |    0 |    0 |    0 |    0 |    0 |    0 |    215 |    292 |      17 |       1 |       0 |      13 |     13 |      0 |      0 |      8 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |     29 |      7 |      0 |     27 |      3 |      0 |      0 |      1 |      12 |       2 |       0 |       6 |      3 |      0 |      0 |      2 |        8 |       34 |       32 |       22 |        9 |        7 |       3 |       13 |       59 |       32 |       29 |       18 |       11 |       3 |        0 |        3 |        2 |        2 |        4 |        1 |       0 |        1 |        4 |        0 |        1 |        2 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       35 |       21 |       14 |        6 |        7 |       0 |       18 |       49 |       21 |       17 |        6 |        1 |       1 |      0 |      3 |     43 |     37 |     12 |      6 |     13 |    166 |      0 |      0 |      0 |      1 |      5 |      1 |      1 |      3 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     38 |      4 |      2 |      2 |    132 |      0 |      1 | s03      | R    |
| 35331000 |    931 |    515 |     62 |    15 |    0 |    278 |    5 |    7 |    49 |    0 |    0 |    0 |    0 |    0 |    0 |    401 |    530 |      38 |       2 |       0 |      19 |     14 |      1 |      0 |      8 |      2 |      2 |      0 |      3 |      3 |      0 |      0 |      1 |     59 |     26 |      0 |     76 |      1 |      0 |      0 |      1 |      33 |       8 |       0 |      42 |      7 |      1 |      0 |      5 |       12 |       46 |       43 |       47 |       20 |       25 |      13 |       16 |       80 |       66 |       62 |       29 |       28 |      28 |        4 |        4 |       14 |        7 |        0 |        8 |       5 |        1 |        4 |        5 |        3 |        3 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       42 |       31 |       27 |       22 |       17 |       0 |       19 |       86 |       45 |       25 |       17 |        8 |       1 |      0 |      6 |     66 |     72 |     29 |     11 |     11 |    320 |      0 |      0 |      0 |      5 |     10 |      6 |      3 |      0 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     54 |     51 |      6 |      7 |      3 |    232 |      0 |      1 | s03      | R    |
| 35340001 |    605 |    337 |     29 |     7 |    0 |    196 |    3 |    0 |    33 |    0 |    0 |    0 |    0 |    0 |    0 |    247 |    358 |      29 |       1 |       0 |      13 |     13 |      0 |      0 |      9 |      3 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |     19 |      6 |      0 |     27 |      5 |      0 |      0 |      5 |      11 |       3 |       0 |      10 |      3 |      0 |      0 |      3 |       10 |       28 |       35 |       27 |       16 |       10 |       3 |       15 |       65 |       53 |       33 |       23 |       12 |       7 |        1 |       10 |        3 |        4 |        0 |        1 |       0 |        1 |        1 |        3 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       38 |       25 |       18 |        3 |        6 |       0 |       19 |       55 |       34 |       20 |       10 |        1 |       1 |      0 |      5 |     49 |     45 |     19 |      4 |      7 |    208 |      0 |      0 |      0 |      4 |      5 |      0 |      1 |      2 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     40 |     26 |      4 |      5 |      1 |    162 |      0 |      1 | s03      | R    |
| 35340002 |    169 |     97 |     11 |     4 |    0 |     42 |    0 |    0 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |     78 |     91 |       7 |       2 |       0 |       2 |      6 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       4 |      0 |      0 |      0 |      2 |        2 |       14 |        7 |       11 |        2 |        5 |       1 |        2 |       16 |       11 |       11 |        9 |        4 |       2 |        0 |        2 |        3 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       12 |        9 |        5 |        3 |        0 |       0 |        1 |       19 |        7 |        2 |        1 |        0 |       0 |      0 |      0 |      9 |     14 |      9 |      1 |      0 |     64 |      0 |      0 |      0 |      0 |      2 |      2 |      2 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |      8 |      1 |      0 |      1 |     40 |      0 |      1 | s03      | R    |
| 35340003 |     65 |     35 |      4 |     0 |    0 |     20 |    0 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |     25 |     40 |       1 |       0 |       0 |       3 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      1 |        2 |        5 |        3 |        2 |        0 |        1 |       0 |        1 |       10 |        4 |        4 |        1 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        3 |        2 |        0 |        0 |       0 |        1 |       11 |        2 |        3 |        0 |        0 |       0 |      0 |      0 |      6 |      5 |      1 |      1 |      1 |     21 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      1 |     17 |      0 |      1 | s03      | R    |
| 35350000 |    161 |     81 |      7 |     3 |    0 |     50 |    2 |    1 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |     66 |     95 |       8 |       0 |       0 |       2 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      1 |      0 |      4 |      0 |      0 |      0 |      2 |       1 |       0 |       0 |       3 |      1 |      0 |      0 |      3 |        0 |       13 |        6 |        6 |        1 |        1 |       0 |        0 |       18 |       12 |       13 |        8 |        3 |       0 |        1 |        3 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       14 |       12 |        2 |        3 |        0 |       0 |        3 |       24 |        8 |        3 |        1 |        0 |       0 |      0 |      0 |      9 |     18 |      8 |      0 |      1 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      4 |      3 |      0 |      0 |     56 |      0 |      1 | s03      | R    |
| 35360001 |    181 |    114 |      4 |     3 |    0 |     51 |    1 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |     83 |     98 |      10 |       0 |       0 |       2 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |       7 |       1 |       0 |      10 |      0 |      0 |      0 |      0 |        5 |        6 |       10 |       10 |        8 |        3 |       1 |        9 |       11 |       18 |       10 |        4 |        7 |      12 |        0 |        0 |        1 |        0 |        1 |        0 |       1 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        8 |        9 |        7 |        4 |        3 |       0 |        6 |        2 |        8 |        4 |        4 |        2 |       0 |      0 |      0 |     18 |     15 |      7 |      4 |      4 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     13 |      1 |      1 |      1 |     33 |      0 |      1 | s03      | R    |
| 35360002 |    553 |    319 |     23 |     9 |    0 |    164 |    3 |    4 |    31 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    321 |      20 |       0 |       0 |      14 |      8 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |      6 |      0 |     44 |      1 |      0 |      0 |      1 |      13 |       4 |       0 |      15 |      3 |      3 |      0 |      2 |        5 |       25 |       29 |       20 |       19 |       14 |       8 |       19 |       45 |       43 |       31 |       31 |       17 |      13 |        0 |        2 |        3 |        2 |        2 |        3 |       2 |        0 |        3 |        1 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       32 |       22 |       13 |        5 |       12 |       2 |       14 |       36 |       22 |       14 |       19 |        7 |       1 |      0 |      1 |     41 |     45 |     27 |      5 |     12 |    188 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      1 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     39 |     10 |      1 |      0 |    137 |      0 |      1 | s03      | R    |
| 35380001 |    355 |    211 |     21 |     4 |    0 |    111 |    1 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    162 |    193 |      16 |       1 |       0 |       4 |      5 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |     31 |      5 |      0 |     47 |      0 |      0 |      0 |      0 |       4 |       2 |       0 |       9 |      1 |      1 |      0 |      1 |        9 |       18 |       17 |       12 |       10 |       11 |      11 |       13 |       27 |       20 |       25 |       10 |       22 |       6 |        0 |        2 |        0 |        4 |        0 |        2 |       1 |        1 |        1 |        1 |        3 |        1 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       24 |        9 |       12 |        7 |        4 |       1 |        9 |       18 |       10 |       11 |        7 |        3 |       0 |      0 |      1 |     21 |     45 |     13 |      3 |      6 |    122 |      0 |      0 |      0 |      3 |      7 |      0 |      1 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     23 |     26 |      1 |      0 |      2 |     68 |      0 |      1 | s03      | R    |
| 35380002 |    138 |     79 |      4 |     2 |    0 |     38 |    2 |    1 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |     62 |     76 |      11 |       0 |       0 |       5 |     10 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      1 |      0 |      0 |      0 |        0 |       10 |        5 |        6 |        8 |        3 |       2 |        2 |        9 |        7 |       11 |        9 |        3 |       4 |        0 |        1 |        1 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        8 |        7 |        1 |        2 |        2 |       0 |        2 |       16 |        7 |        4 |        0 |        1 |       0 |      0 |      1 |      7 |     16 |      5 |      1 |      4 |     45 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      9 |      2 |      3 |      0 |     34 |      0 |      1 | s03      | R    |
| 35380003 |     29 |     16 |      1 |     0 |    0 |     11 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     13 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        5 |        0 |        0 |       0 |        0 |        3 |        3 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        0 |        1 |        1 |        0 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      4 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      8 |      0 |      1 | s03      | R    |
| 35390001 |    628 |    363 |     46 |     8 |    0 |    191 |    2 |    0 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    257 |    371 |      44 |       2 |       0 |      16 |      4 |      1 |      0 |      3 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |     33 |      9 |      0 |     69 |      0 |      0 |      0 |      2 |      21 |      13 |       0 |      30 |      1 |      0 |      0 |      2 |        9 |       19 |       28 |       22 |       20 |       19 |      15 |       22 |       54 |       37 |       35 |       30 |       31 |      22 |        1 |        0 |        9 |        4 |        4 |        2 |       2 |        2 |        5 |        9 |        4 |        1 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       34 |       18 |       15 |       14 |       12 |       1 |       20 |       41 |       18 |       16 |       10 |       10 |       1 |      0 |      2 |     50 |     52 |     22 |      5 |      7 |    225 |      0 |      0 |      1 |      5 |      8 |      3 |      2 |      0 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     33 |     48 |      6 |      2 |      2 |    125 |      0 |      1 | s03      | R    |
| 35390002 |    142 |     87 |     11 |     0 |    0 |     39 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     55 |     87 |      12 |       3 |       0 |       3 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |       5 |       3 |       0 |       5 |      0 |      0 |      0 |      0 |        5 |        8 |       10 |        2 |        1 |        2 |       3 |        6 |       11 |       11 |       10 |        7 |        6 |       5 |        0 |        0 |        0 |        2 |        0 |        0 |       1 |        2 |        3 |        1 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        5 |        7 |        1 |        1 |        3 |       0 |        0 |        9 |        5 |        3 |        4 |        2 |       0 |      0 |      1 |      9 |     14 |      0 |      1 |      5 |     57 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      6 |      0 |      1 |      1 |     29 |      0 |      1 | s03      | R    |
| 35390003 |    106 |     78 |      6 |     1 |    0 |     17 |    1 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     51 |     55 |       5 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      4 |      0 |      0 |      0 |      1 |       8 |       1 |       0 |       1 |      1 |      0 |      0 |      1 |        4 |        8 |       15 |        5 |        3 |        2 |       2 |        2 |        8 |        8 |        8 |        5 |        6 |       2 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        0 |        2 |        1 |        1 |       2 |        2 |        5 |        3 |        0 |        0 |        0 |       1 |      0 |      2 |     14 |     16 |      7 |      3 |      3 |     33 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |     17 |      0 |      1 | s03      | R    |
| 35390004 |    245 |    137 |      9 |     8 |    0 |     75 |    3 |    1 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    108 |    137 |      13 |       0 |       0 |       4 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      3 |      0 |      4 |      0 |      0 |      0 |      2 |       5 |       0 |       0 |       1 |      1 |      0 |      0 |      1 |        6 |       21 |        9 |        7 |        4 |        5 |       1 |       18 |       21 |       14 |       15 |        8 |        6 |       2 |        0 |        2 |        1 |        1 |        0 |        1 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       24 |       13 |        5 |        1 |        1 |       0 |       11 |       25 |        7 |        4 |        0 |        2 |       0 |      0 |      4 |     26 |     14 |      8 |      2 |      0 |     83 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |      5 |      3 |      0 |      0 |     72 |      0 |      1 | s03      | R    |
| 35400001 |    908 |    524 |     63 |    20 |    0 |    263 |    1 |    9 |    28 |    0 |    0 |    0 |    0 |    0 |    0 |    425 |    483 |      88 |       6 |       0 |      44 |     15 |      0 |      0 |      8 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |     35 |      6 |      0 |     73 |      2 |      0 |      0 |      5 |      45 |      29 |       0 |      58 |      4 |      3 |      0 |      6 |       15 |       37 |       36 |       54 |       32 |       38 |      16 |       29 |       64 |       63 |       41 |       37 |       42 |      20 |        1 |        9 |       10 |       13 |        6 |        2 |       1 |        0 |        3 |        3 |        5 |        5 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       21 |       37 |       30 |       28 |       22 |       15 |       2 |       28 |       40 |       27 |       33 |       18 |       19 |       1 |      0 |      4 |     61 |    100 |     24 |      5 |     13 |    317 |      0 |      0 |      2 |      3 |     16 |      3 |      2 |      1 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     39 |     65 |     11 |      8 |      3 |    191 |      0 |      1 | s03      | R    |
| 35400002 |    126 |     71 |      4 |     2 |    0 |     47 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     62 |     64 |      14 |       1 |       0 |       5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |       8 |       1 |       0 |      16 |      0 |      0 |      0 |      0 |        3 |       11 |        6 |        4 |        5 |        3 |       0 |        7 |       11 |        5 |        8 |        7 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        6 |        7 |        3 |        5 |       0 |        8 |        2 |        5 |        1 |        3 |        3 |       0 |      0 |      1 |     13 |     14 |      3 |      0 |      2 |     38 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      7 |      1 |      0 |      0 |     31 |      0 |      1 | s03      | R    |
| 35410001 |    304 |    210 |     14 |     3 |    0 |     66 |    2 |    3 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    135 |    169 |      21 |       3 |       0 |       4 |      6 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |     15 |      5 |      0 |      0 |      0 |       8 |       1 |       0 |      11 |      5 |      0 |      0 |      0 |        4 |       10 |       23 |       18 |       13 |       13 |       8 |        8 |       23 |       26 |       24 |       18 |       11 |      11 |        0 |        1 |        0 |        2 |        0 |        1 |       1 |        1 |        2 |        1 |        2 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        4 |       13 |       10 |        5 |        2 |       0 |        3 |       13 |        8 |        7 |        5 |        2 |       1 |      0 |      3 |     17 |     33 |     17 |      2 |      9 |    129 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     15 |      2 |      0 |      0 |     53 |      0 |      1 | s03      | R    |
| 35410002 |    521 |    339 |     20 |    12 |    0 |    127 |    4 |    2 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    210 |    311 |      24 |       1 |       0 |      10 |     15 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      0 |     15 |      0 |      0 |      0 |      0 |       2 |       2 |       0 |      13 |      4 |      2 |      0 |      2 |       11 |       22 |       21 |       24 |       34 |       11 |      12 |       14 |       55 |       32 |       39 |       27 |       22 |      15 |        0 |        2 |        2 |        6 |        0 |        0 |       0 |        0 |        2 |        1 |        4 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       20 |       13 |       14 |        9 |        1 |       1 |       18 |       33 |       23 |       15 |        5 |        1 |       2 |      0 |      4 |     47 |     52 |     18 |      6 |     11 |    201 |      0 |      0 |      0 |      1 |      4 |      2 |      1 |      2 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     27 |     19 |      4 |      0 |      1 |    107 |      0 |      1 | s03      | R    |
| 35411001 |    169 |    106 |     13 |     0 |    0 |     40 |    0 |    0 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |     65 |    104 |      18 |       2 |       0 |      10 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       3 |      0 |      3 |      0 |      1 |        1 |        6 |        8 |        8 |        6 |        6 |       2 |        6 |        4 |       13 |       17 |       12 |       10 |       7 |        0 |        0 |        1 |        1 |        1 |        2 |       0 |        0 |        0 |        1 |        3 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        5 |        5 |        4 |        3 |       1 |        4 |        6 |        4 |        7 |        3 |        3 |       0 |      0 |      0 |      7 |     22 |      9 |      2 |      3 |     63 |      0 |      0 |      0 |      2 |      1 |      1 |      2 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |      6 |      2 |      3 |      2 |     24 |      0 |      1 | s03      | R    |
| 35411002 |    413 |    275 |     35 |     1 |    0 |     78 |    0 |    1 |    23 |    0 |    0 |    0 |    0 |    0 |    0 |    175 |    238 |      27 |       5 |       0 |      11 |      9 |      1 |      0 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |      7 |      0 |      8 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |      9 |      2 |      0 |      6 |        8 |        9 |       21 |       23 |       17 |       21 |       7 |        6 |       25 |       32 |       35 |       27 |       22 |      22 |        0 |        2 |        4 |        2 |        2 |        3 |       4 |        0 |        2 |        2 |        2 |        5 |        2 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       12 |        9 |       12 |        7 |        6 |       1 |        5 |       19 |        8 |       11 |        5 |        3 |       0 |      0 |      2 |     27 |     42 |     33 |     11 |     13 |    147 |      0 |      0 |      1 |      2 |      9 |      2 |      0 |      1 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     14 |      9 |      2 |      2 |     56 |      0 |      1 | s03      | R    |
| 35412001 |    251 |    183 |      7 |     4 |    0 |     51 |    0 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    108 |    143 |      17 |       2 |       0 |       7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |     13 |      1 |      0 |      0 |      0 |       5 |       0 |       0 |       3 |      5 |      0 |      0 |      1 |       10 |       10 |       11 |        8 |       14 |       10 |      16 |        8 |       19 |       18 |       25 |       12 |       12 |      10 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        2 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |        2 |        9 |        3 |        2 |       0 |        2 |       10 |        9 |        5 |        2 |        5 |       2 |      0 |      2 |     27 |     21 |     14 |      1 |     11 |    107 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |     19 |      3 |      3 |      0 |     28 |      0 |      1 | s03      | R    |
| 35412002 |     20 |     14 |      0 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |     14 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        0 |        0 |        0 |       1 |        0 |        1 |        1 |        4 |        0 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 35412003 |    158 |     94 |     42 |     3 |    0 |     18 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     48 |    110 |       5 |       2 |       0 |       1 |      9 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       2 |       3 |       0 |       5 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        1 |        1 |       16 |       4 |        1 |        2 |        2 |        0 |        3 |       53 |       8 |        0 |        0 |        0 |        1 |        0 |       10 |       3 |        0 |        0 |        0 |        0 |        0 |       26 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        6 |        1 |        0 |        0 |        2 |       0 |        1 |        3 |        3 |        1 |        0 |        5 |       0 |      0 |      1 |      7 |     11 |      3 |      2 |      6 |     64 |      0 |      0 |      0 |      2 |      2 |      5 |      2 |      7 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |     16 |      0 |      1 | s03      | R    |
| 35430000 |    769 |    464 |     64 |    14 |    0 |    206 |    0 |   11 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    333 |    436 |     106 |      10 |       0 |      44 |      2 |      0 |      0 |      1 |      9 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |     22 |      9 |      0 |     31 |      1 |      0 |      0 |      0 |      14 |      12 |       0 |      32 |      5 |      2 |      0 |      3 |       19 |       29 |       41 |       37 |       20 |       24 |      12 |       37 |       55 |       54 |       44 |       31 |       32 |      29 |        2 |       13 |        4 |        2 |        5 |        5 |       2 |       10 |        4 |        8 |        4 |        3 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       22 |       29 |       31 |       13 |       10 |       11 |       2 |       29 |       34 |       29 |       14 |        9 |        8 |       0 |      0 |      6 |     68 |     79 |     16 |      3 |     14 |    278 |      0 |      0 |      0 |     16 |     12 |      3 |      1 |      1 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     41 |     51 |      8 |      0 |      1 |    134 |      0 |      1 | s03      | R    |
| 35440000 |    786 |    521 |     34 |    13 |    0 |    193 |    1 |    6 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    319 |    467 |      75 |       4 |       0 |      27 |      7 |      0 |      0 |      5 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     16 |      4 |      0 |     28 |      1 |      0 |      0 |      1 |      28 |       7 |       0 |      30 |     10 |      0 |      0 |      1 |       12 |       31 |       46 |       44 |       31 |       25 |       9 |       47 |       64 |       54 |       48 |       38 |       42 |      30 |        2 |        2 |        3 |        5 |        4 |        0 |       0 |        3 |        5 |        5 |        2 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       22 |       30 |       17 |       12 |       10 |       0 |       21 |       31 |       27 |       19 |       13 |       13 |       2 |      0 |      9 |     81 |     86 |     23 |      6 |     17 |    299 |      0 |      0 |      0 |      6 |      4 |      1 |      1 |      0 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     34 |     37 |      5 |      4 |      4 |    145 |      0 |      1 | s03      | R    |
| 35450001 |    649 |    438 |     34 |    16 |    0 |    145 |    0 |   10 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    286 |    363 |      87 |       3 |       0 |      32 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     14 |      3 |      0 |     35 |      0 |      0 |      0 |      0 |      19 |       9 |       0 |      22 |      5 |      1 |      0 |      1 |       15 |       38 |       40 |       24 |       23 |       20 |      19 |       31 |       49 |       52 |       45 |       29 |       27 |      26 |        4 |        5 |        4 |        4 |        0 |        3 |       1 |        1 |        3 |        4 |        1 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       22 |       20 |       11 |        8 |       11 |       1 |       17 |       27 |       25 |       12 |        5 |        5 |       0 |      0 |      1 |     67 |     65 |     20 |      8 |     15 |    262 |      0 |      0 |      0 |      7 |      3 |      3 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     29 |     42 |      3 |      4 |      0 |     99 |      0 |      1 | s03      | R    |
| 35450002 |     46 |     29 |      2 |     1 |    0 |     12 |    0 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     28 |     18 |       4 |       0 |       0 |       3 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        2 |        6 |        4 |        0 |       1 |        3 |        1 |        1 |        3 |        0 |        1 |       3 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        2 |        4 |        0 |        0 |       0 |        3 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      4 |      3 |      2 |      1 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 35450003 |     98 |     63 |      5 |     2 |    0 |     26 |    0 |    2 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     45 |     53 |      28 |       1 |       0 |      12 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      0 |      2 |      0 |      1 |        7 |        3 |        4 |        6 |        0 |        6 |       1 |        3 |        9 |        6 |        8 |        4 |        4 |       2 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        4 |        4 |        0 |        2 |       0 |        3 |        7 |        2 |        3 |        0 |        0 |       0 |      0 |      1 |      3 |     15 |      1 |      3 |      1 |     39 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      8 |      1 |      0 |      0 |     17 |      0 |      1 | s03      | R    |
| 35460000 |    320 |    187 |     22 |     4 |    0 |     98 |    2 |    3 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    156 |    164 |      94 |       2 |       0 |      35 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |      5 |      0 |     25 |      1 |      0 |      0 |      2 |      11 |       3 |       0 |      16 |      5 |      0 |      0 |      3 |        5 |       23 |       12 |       10 |       16 |       18 |       6 |       11 |       25 |       14 |       18 |       13 |       13 |       3 |        1 |        2 |        1 |        2 |        1 |        1 |       1 |        1 |        6 |        2 |        2 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       19 |        7 |        9 |        8 |        4 |       1 |       12 |       16 |        9 |        7 |        3 |        7 |       0 |      0 |      3 |     31 |     45 |     10 |      3 |      3 |     92 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     21 |      5 |      2 |      0 |     70 |      0 |      1 | s03      | R    |
| 35470000 |    871 |    556 |     54 |    18 |    0 |    223 |    2 |    8 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    405 |    466 |     194 |      17 |       0 |      91 |      4 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      1 |      0 |     16 |      4 |      0 |      0 |      2 |      12 |       2 |       0 |      15 |     14 |      2 |      0 |      4 |       16 |       37 |       52 |       41 |       24 |       51 |       5 |       35 |       84 |       49 |       49 |       45 |       57 |      11 |        3 |        1 |        4 |       10 |        6 |        4 |       2 |        2 |        2 |        3 |        3 |        6 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       50 |       26 |       25 |       13 |       14 |       4 |       15 |       35 |       25 |       14 |       13 |        7 |       3 |      0 |      7 |     73 |    116 |     35 |      3 |     13 |    309 |      0 |      0 |      0 |      5 |     11 |      7 |      2 |      1 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     54 |     56 |     10 |      0 |      3 |    138 |      0 |      1 | s03      | R    |
| 35471000 |    455 |    271 |     25 |    12 |    0 |    138 |    0 |    3 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    200 |    255 |      91 |       3 |       0 |      44 |      6 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     17 |      3 |      0 |     24 |      0 |      0 |      0 |      1 |      12 |       5 |       0 |      12 |      2 |      0 |      0 |      0 |       15 |       24 |       19 |       27 |       11 |       21 |       4 |       33 |       40 |       29 |       16 |       12 |       15 |       5 |        1 |        4 |        4 |        0 |        2 |        1 |       0 |        4 |        4 |        4 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       24 |        9 |       11 |        3 |        9 |       0 |       14 |       24 |       26 |       15 |        4 |        9 |       0 |      0 |      1 |     39 |     68 |     12 |      2 |      6 |    143 |      0 |      0 |      0 |      5 |      6 |      0 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     34 |     39 |      2 |      0 |      0 |     80 |      0 |      1 | s03      | R    |
| 35490001 |    528 |    355 |     29 |     6 |    0 |    119 |    1 |    6 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    242 |    286 |      50 |       3 |       0 |      14 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     11 |      3 |      0 |      9 |      1 |      0 |      0 |      0 |      16 |       7 |       0 |      24 |      2 |      0 |      0 |      1 |       12 |       20 |       41 |       37 |       20 |       14 |       8 |       19 |       43 |       39 |       34 |       30 |       21 |      17 |        1 |        2 |        2 |        3 |        4 |        2 |       0 |        4 |        4 |        1 |        1 |        0 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       16 |       16 |       10 |        7 |        8 |       3 |       14 |       17 |       14 |       10 |        6 |        6 |       1 |      0 |      1 |     41 |     43 |     28 |      6 |     13 |    223 |      0 |      0 |      1 |      6 |      4 |      0 |      2 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     19 |     27 |      7 |      1 |      1 |     84 |      0 |      1 | s03      | R    |
| 35490002 |     64 |     40 |      3 |     3 |    0 |     13 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |     26 |     38 |       4 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |        1 |        1 |        4 |        6 |        2 |        4 |       0 |        6 |        4 |        5 |        2 |        3 |        1 |       1 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        1 |       0 |        5 |        3 |        3 |        1 |        2 |        1 |       0 |      0 |      0 |      4 |      9 |      1 |      0 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     13 |      0 |      1 | s03      | R    |
| 35491000 |    833 |    547 |     69 |    14 |    0 |    179 |    2 |    5 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    346 |    487 |     170 |       7 |       0 |      49 |     13 |      2 |      0 |      2 |      1 |      1 |      0 |      1 |      3 |      2 |      0 |      0 |     13 |      4 |      0 |     25 |      1 |      0 |      0 |      0 |      13 |      13 |       0 |      13 |      7 |      3 |      0 |      1 |       14 |       30 |       44 |       35 |       27 |       45 |      13 |       34 |       45 |       63 |       45 |       47 |       85 |      20 |        1 |       10 |        6 |        7 |        5 |        5 |       2 |        3 |        4 |        4 |        4 |        5 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       22 |       24 |       19 |       13 |       12 |       1 |       19 |       36 |       19 |       18 |       11 |       11 |       1 |      0 |      1 |     78 |    104 |     37 |      7 |     13 |    307 |      0 |      0 |      0 |      8 |     15 |      2 |      2 |      1 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     37 |     33 |      4 |      4 |      1 |    137 |      0 |      1 | s03      | R    |
| 35500001 |    467 |    297 |     26 |    13 |    0 |    108 |    1 |    2 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    196 |    271 |      66 |       6 |       0 |      30 |      2 |      0 |      0 |      4 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      3 |      0 |     24 |      0 |      0 |      0 |      1 |      11 |       1 |       0 |       7 |      6 |      1 |      0 |      5 |        8 |       22 |       23 |       29 |       21 |       10 |       5 |       19 |       36 |       34 |       38 |       19 |       24 |       9 |        1 |        3 |        3 |        1 |        3 |        1 |       1 |        1 |        2 |        4 |        2 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       12 |       16 |        8 |        7 |       10 |       0 |       12 |       19 |       19 |       17 |        6 |        6 |       0 |      0 |      2 |     50 |     55 |     16 |      7 |     13 |    154 |      0 |      0 |      0 |      2 |      8 |      1 |      1 |      1 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     18 |     17 |      6 |      3 |      1 |     97 |      0 |      1 | s03      | R    |
| 35500002 |    104 |     66 |      9 |     2 |    0 |     25 |    0 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     44 |     60 |      21 |       2 |       0 |       5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |       3 |       3 |       0 |       1 |      1 |      0 |      0 |      3 |        4 |        5 |        7 |        2 |        6 |        2 |       3 |        5 |        7 |        6 |        7 |        6 |        3 |       3 |        0 |        1 |        1 |        1 |        0 |        0 |       1 |        0 |        1 |        1 |        0 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        2 |        3 |        2 |        1 |       0 |        3 |        3 |        5 |        4 |        2 |        1 |       0 |      0 |      0 |      5 |     14 |      1 |      1 |      1 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      5 |      1 |      0 |      0 |     18 |      0 |      1 | s03      | R    |
| 35510000 |    575 |    369 |     49 |    10 |    0 |    135 |    0 |    3 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    230 |    345 |      99 |      11 |       0 |      34 |      5 |      1 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |     10 |      0 |      0 |     16 |      4 |      0 |      0 |      0 |      12 |       2 |       0 |      12 |      1 |      0 |      0 |      2 |       14 |       22 |       19 |       26 |       24 |       21 |       8 |       26 |       44 |       43 |       54 |       23 |       29 |      16 |        1 |        5 |        2 |        4 |        6 |        3 |       0 |        7 |        3 |        2 |        2 |        2 |        7 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       14 |       18 |       13 |        6 |        8 |       1 |       11 |       24 |       18 |       18 |        2 |        9 |       0 |      0 |      4 |     49 |     60 |     21 |      5 |      8 |    222 |      0 |      0 |      0 |      9 |      9 |      5 |      2 |      1 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     37 |      2 |      0 |      4 |     91 |      0 |      1 | s03      | R    |
| 35520001 |    681 |    442 |     41 |     9 |    0 |    163 |    1 |    5 |    20 |    0 |    0 |    0 |    0 |    0 |    0 |    281 |    400 |      97 |      15 |       0 |      37 |     11 |      2 |      0 |      7 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |     29 |      7 |      0 |     35 |      0 |      0 |      0 |      0 |      22 |       8 |       0 |      20 |      4 |      0 |      0 |      6 |       12 |       32 |       33 |       30 |       26 |       18 |      12 |       23 |       71 |       44 |       47 |       50 |       28 |      16 |        1 |        4 |        3 |        5 |        1 |        3 |       1 |        3 |        5 |        3 |        4 |        3 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       29 |       17 |       14 |       14 |       10 |       3 |       20 |       26 |       18 |       20 |        9 |        5 |       0 |      0 |      6 |     51 |     99 |     35 |      8 |     13 |    230 |      0 |      0 |      0 |      2 |      7 |      7 |      0 |      4 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     36 |     48 |      8 |      0 |      0 |    104 |      0 |      1 | s03      | R    |
| 35600001 |    665 |    464 |     32 |    15 |    0 |    134 |    2 |    8 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    267 |    398 |     101 |       7 |       0 |      24 |      6 |      1 |      0 |      6 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      8 |      0 |      0 |     14 |      2 |      0 |      0 |      0 |       7 |       2 |       0 |       7 |      2 |      0 |      0 |      1 |       20 |       36 |       41 |       32 |       19 |       13 |      12 |       27 |       55 |       53 |       67 |       40 |       27 |      22 |        1 |        3 |        5 |        3 |        3 |        2 |       2 |        0 |        3 |        4 |        1 |        1 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       22 |       21 |       10 |        8 |        5 |       0 |       13 |       35 |       25 |       14 |        4 |        2 |       1 |      0 |      5 |     52 |     90 |     23 |      9 |     14 |    271 |      0 |      0 |      0 |      4 |      5 |      1 |      2 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     39 |      3 |      2 |      3 |     95 |      0 |      1 | s03      | R    |
| 35600002 |     75 |     48 |      3 |     0 |    0 |     20 |    0 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     27 |     48 |      24 |       0 |       0 |       8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      2 |        0 |        7 |        2 |        5 |        1 |        1 |       1 |        4 |       11 |        6 |        4 |        4 |        1 |       1 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        1 |        1 |        1 |        2 |        0 |       0 |        3 |        2 |        5 |        3 |        1 |        1 |       0 |      0 |      1 |      7 |     11 |      2 |      1 |      0 |     26 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     18 |      0 |      1 | s03      | R    |
| 35610000 |    578 |    376 |     38 |    18 |    0 |    125 |    2 |    1 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    243 |    335 |      88 |      10 |       0 |      37 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |       5 |       4 |       0 |       8 |      3 |      0 |      0 |      4 |       11 |       20 |       28 |       34 |       19 |       28 |      14 |       26 |       39 |       33 |       44 |       31 |       33 |      16 |        0 |        4 |        6 |        4 |        2 |        3 |       2 |        0 |        2 |        3 |        5 |        1 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       22 |        9 |       12 |        6 |        8 |       0 |       20 |       25 |       22 |       15 |        6 |        8 |       0 |      0 |      0 |     51 |     57 |     21 |      9 |     13 |    225 |      0 |      0 |      0 |      6 |     11 |      1 |      2 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     31 |     21 |      0 |      2 |      0 |    108 |      0 |      1 | s03      | R    |
| 35620000 |    477 |    296 |     29 |    11 |    0 |    118 |    1 |    4 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    214 |    263 |     127 |      10 |       0 |      48 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      10 |       3 |       0 |       8 |      7 |      0 |      0 |     10 |       12 |       13 |       33 |       27 |       18 |       21 |       3 |       15 |       30 |       33 |       33 |       25 |       24 |       9 |        1 |        1 |        2 |        4 |        4 |        2 |       1 |        1 |        1 |        4 |        2 |        0 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       22 |       18 |       13 |        3 |        3 |       1 |       17 |       29 |       14 |       11 |        6 |        3 |       0 |      0 |      2 |     38 |     67 |     15 |      7 |      9 |    158 |      0 |      0 |      0 |      2 |      9 |      0 |      0 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     30 |      4 |      1 |      0 |     95 |      0 |      1 | s03      | R    |
| 35621000 |    467 |    309 |     26 |     4 |    0 |    101 |    0 |    4 |    23 |    0 |    0 |    0 |    0 |    0 |    0 |    204 |    263 |     103 |       9 |       0 |      51 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |       2 |       4 |       0 |       5 |      1 |      0 |      0 |      1 |       15 |       20 |       32 |       23 |       11 |       18 |      11 |       14 |       36 |       32 |       31 |       28 |       17 |      21 |        1 |        1 |        3 |        1 |        3 |        3 |       0 |        2 |        4 |        1 |        0 |        4 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       17 |       14 |       11 |        4 |        2 |       1 |       19 |       10 |        9 |       19 |        9 |        3 |       1 |      0 |      4 |     34 |     51 |     15 |      4 |     14 |    187 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     26 |      3 |      1 |      3 |     77 |      0 |      1 | s03      | R    |
| 35630000 |    523 |    345 |     32 |     5 |    0 |    119 |    2 |    2 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    216 |    307 |     103 |       5 |       0 |      39 |      2 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     14 |      2 |      0 |     24 |      0 |      0 |      0 |      0 |      11 |       5 |       0 |      12 |      3 |      2 |      0 |      2 |       16 |       27 |       24 |       25 |       18 |       14 |       7 |       21 |       54 |       27 |       38 |       26 |       33 |      15 |        2 |        2 |        3 |        5 |        3 |        3 |       1 |        1 |        2 |        3 |        3 |        1 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       16 |        7 |       16 |        7 |        8 |       0 |       14 |       15 |       13 |       22 |       12 |        4 |       0 |      0 |      3 |     32 |     62 |     20 |      9 |     16 |    203 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      1 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     37 |      5 |      0 |      4 |     78 |      0 |      1 | s03      | R    |
| 35640000 |    507 |    364 |     20 |    12 |    0 |    105 |    1 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    216 |    291 |     191 |       6 |       0 |      49 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      1 |      0 |      9 |      3 |      0 |      0 |      0 |       5 |       1 |       0 |       8 |      4 |      0 |      0 |      0 |       11 |       31 |       29 |       28 |       15 |       23 |      15 |       28 |       45 |       39 |       31 |       29 |       30 |      10 |        1 |        2 |        1 |        3 |        2 |        2 |       0 |        0 |        3 |        1 |        1 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       12 |       13 |        7 |        4 |        6 |       0 |       16 |       20 |       10 |       11 |        8 |        4 |       1 |      0 |      1 |     60 |     84 |     24 |      2 |     11 |    182 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     23 |     32 |      2 |      0 |      1 |     62 |      0 |      1 | s03      | R    |
| 35641000 |    650 |    430 |     36 |    10 |    0 |    158 |    2 |    6 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    296 |    354 |     245 |      15 |       0 |      93 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      7 |      0 |     18 |      2 |      0 |      0 |      0 |       5 |       1 |       0 |       5 |      9 |      0 |      0 |      7 |       26 |       38 |       34 |       28 |       29 |       25 |      10 |       35 |       49 |       30 |       38 |       30 |       47 |      11 |        2 |        6 |        4 |        4 |        2 |        2 |       0 |        1 |        3 |        4 |        6 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       24 |       19 |       13 |        7 |        9 |       0 |       18 |       33 |       10 |       12 |       16 |        9 |       0 |      0 |      2 |     67 |     91 |     22 |      8 |      9 |    231 |      0 |      0 |      0 |      5 |      7 |      5 |      1 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     28 |     46 |      1 |      6 |      4 |     98 |      0 |      1 | s03      | R    |
| 35650000 |    538 |    373 |     52 |     7 |    0 |     93 |    3 |    3 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    211 |    327 |     181 |      13 |       0 |      50 |      8 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      4 |      3 |      0 |      0 |      0 |       5 |       0 |       0 |      11 |      3 |      2 |      0 |      3 |       11 |       24 |       23 |       19 |       15 |       37 |       9 |       23 |       41 |       30 |       20 |       32 |       74 |      15 |        0 |        5 |        5 |        4 |        2 |       10 |       1 |        0 |        3 |        2 |        1 |        3 |       16 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        9 |        8 |        5 |        6 |       10 |       1 |        9 |       17 |       12 |       12 |        6 |       11 |       0 |      0 |      2 |     53 |     91 |     21 |      3 |      6 |    197 |      0 |      0 |      2 |     10 |      7 |      2 |      0 |      0 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     18 |      3 |      1 |      2 |     72 |      0 |      1 | s03      | R    |
| 36090000 |     65 |     37 |      5 |     3 |    0 |     20 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     30 |     35 |      11 |       0 |       0 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        2 |        2 |        3 |        1 |        0 |        2 |       5 |        2 |        5 |        3 |        6 |        1 |        5 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        5 |        2 |        2 |        0 |       0 |        0 |        2 |        3 |        3 |        0 |        0 |       1 |      0 |      0 |      8 |      6 |      0 |      0 |      1 |     22 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      0 |     15 |      0 |      1 | s03      | R    |
| 36100000 |    633 |    354 |     29 |     8 |    0 |    186 |    8 |    5 |    43 |    0 |    0 |    0 |    0 |    0 |    0 |    320 |    313 |      83 |      10 |       0 |      48 |      6 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      5 |      1 |      1 |      0 |      2 |       3 |       1 |       0 |       6 |      8 |      0 |      0 |      2 |        8 |       35 |       38 |       33 |       22 |       19 |       8 |       22 |       32 |       37 |       44 |       17 |       21 |      18 |        0 |        4 |        2 |        2 |        3 |        5 |       3 |        1 |        2 |        2 |        0 |        0 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       68 |       25 |       20 |       10 |        6 |       0 |       18 |       52 |       28 |        9 |        4 |        0 |       1 |      0 |      3 |     52 |     67 |     22 |     12 |     12 |    186 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     55 |     41 |     12 |      1 |      1 |    136 |      0 |      1 | s03      | R    |
| 36110000 |    260 |    163 |     20 |     4 |    0 |     62 |    2 |    3 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    127 |    133 |      45 |       6 |       0 |      17 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        5 |       12 |       11 |       26 |       11 |        3 |       5 |        9 |       10 |       19 |       20 |       11 |       11 |      10 |        0 |        1 |        3 |        3 |        2 |        1 |       0 |        0 |        1 |        4 |        3 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       13 |       13 |        7 |        0 |        2 |       0 |        7 |       14 |       11 |        1 |        0 |        0 |       0 |      0 |      1 |     28 |     25 |     11 |      1 |      6 |     91 |      0 |      0 |      0 |      0 |      5 |      2 |      3 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |      9 |      1 |      0 |      0 |     50 |      0 |      1 | s03      | R    |
| 36111000 |    643 |    486 |     27 |     6 |    0 |    101 |    2 |   18 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    266 |    377 |     107 |      14 |       0 |      42 |      7 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |       2 |       0 |       0 |       1 |      2 |      0 |      0 |      2 |       10 |       32 |       39 |       30 |       20 |       41 |      17 |       21 |       49 |       48 |       51 |       38 |       63 |      27 |        1 |        6 |        3 |        4 |        0 |        0 |       1 |        0 |        5 |        1 |        3 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       16 |       16 |       12 |        2 |        5 |       0 |       15 |       16 |        9 |       10 |        8 |        9 |       1 |      0 |      3 |     65 |    106 |     28 |      5 |     14 |    265 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     34 |      4 |      0 |      0 |     65 |      0 |      1 | s03      | R    |
| 36112000 |      2 |      2 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 36120000 |    471 |    330 |     22 |    15 |    0 |     93 |    0 |   11 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    161 |    310 |      14 |       0 |       0 |       4 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |     10 |      2 |      0 |      0 |      0 |      10 |       5 |       0 |       7 |      1 |      0 |      0 |      0 |       14 |       21 |       17 |       19 |       17 |       13 |       7 |       29 |       48 |       48 |       38 |       24 |       19 |      16 |        1 |        3 |        0 |        1 |        2 |        1 |       1 |        3 |        1 |        2 |        3 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        5 |       10 |        8 |        5 |        5 |       0 |       14 |       22 |       20 |       13 |        2 |        4 |       0 |      0 |      8 |     55 |     46 |     23 |      4 |      8 |    186 |      0 |      0 |      0 |      4 |      4 |      0 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     23 |      1 |      0 |      0 |     73 |      0 |      1 | s03      | R    |
| 36130000 |    430 |    329 |     15 |    10 |    0 |     71 |    1 |    4 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    184 |    246 |      55 |       4 |       0 |      27 |      7 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |       6 |       0 |       0 |       5 |      0 |      0 |      0 |      0 |        8 |       18 |       33 |       26 |       21 |        9 |      12 |       15 |       36 |       33 |       31 |       29 |       21 |      37 |        0 |        1 |        2 |        1 |        0 |        1 |       3 |        2 |        1 |        0 |        1 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       17 |       12 |        7 |        5 |        2 |       1 |        5 |       15 |        8 |        5 |        2 |        2 |       0 |      0 |     10 |     50 |     45 |     14 |      5 |     10 |    195 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |     22 |      2 |      0 |      0 |     45 |      0 |      1 | s03      | R    |
| 36140000 |    522 |    380 |     25 |     7 |    0 |     92 |    1 |   14 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    217 |    305 |      27 |       0 |       0 |      16 |      7 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      1 |      2 |      0 |      0 |       12 |       23 |       27 |       28 |       28 |       21 |      16 |       25 |       38 |       24 |       48 |       29 |       29 |      32 |        1 |        0 |        4 |        3 |        1 |        1 |       1 |        0 |        6 |        5 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       10 |        8 |       12 |        7 |        4 |       1 |       14 |       18 |       11 |       12 |        3 |        6 |       2 |      0 |      3 |     47 |     50 |     25 |      7 |     15 |    233 |      0 |      0 |      1 |      9 |      1 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     31 |      4 |      1 |      0 |     65 |      0 |      1 | s03      | R    |
| 36150000 |    571 |    424 |     22 |     7 |    0 |    104 |    3 |    7 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    213 |    358 |      68 |       2 |       0 |      18 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       3 |       0 |       1 |      2 |      0 |      0 |      1 |        6 |       30 |       25 |       35 |       11 |       18 |      17 |       27 |       30 |       42 |       39 |       25 |       89 |      30 |        1 |        4 |        3 |        2 |        0 |        0 |       1 |        0 |        2 |        4 |        2 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       19 |       10 |       10 |        4 |        3 |       0 |       15 |       21 |        8 |        9 |        7 |        5 |       0 |      0 |      1 |     58 |     70 |     14 |     11 |     27 |    243 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     20 |     25 |      2 |      1 |      2 |     72 |      0 |      1 | s03      | R    |
| 36200000 |    549 |    386 |     39 |     7 |    0 |     97 |    4 |   11 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    240 |    309 |     109 |      15 |       0 |      40 |      2 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |      3 |      1 |      0 |      0 |      1 |       6 |       9 |       0 |       6 |      6 |      2 |      0 |      2 |       15 |       31 |       31 |       32 |       17 |       30 |       5 |       22 |       53 |       43 |       32 |       33 |       28 |      14 |        2 |        7 |        2 |        6 |        3 |        4 |       1 |        2 |        3 |        1 |        3 |        0 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       13 |        9 |        9 |        4 |        4 |       0 |       17 |       18 |       10 |       15 |        4 |        6 |       0 |      0 |      3 |     72 |     63 |     17 |      6 |      8 |    217 |      0 |      0 |      2 |      3 |      6 |      2 |      0 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     24 |     26 |      1 |      0 |      0 |     70 |      0 |      1 | s03      | R    |
| 36210000 |    605 |    448 |     24 |    13 |    0 |    103 |    1 |   13 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    261 |    344 |      87 |       7 |       0 |      26 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |       1 |       3 |       0 |       3 |      5 |      0 |      0 |      2 |       13 |       36 |       34 |       31 |       20 |       23 |      18 |       30 |       44 |       53 |       47 |       28 |       35 |      36 |        1 |        5 |        3 |        2 |        1 |        0 |       1 |        1 |        4 |        3 |        0 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       18 |       10 |       13 |        5 |       10 |       1 |       10 |       17 |       15 |        7 |        6 |        4 |       1 |      0 |      3 |     61 |     77 |     27 |     16 |      8 |    256 |      0 |      0 |      2 |      4 |      6 |      3 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     30 |     39 |      3 |      3 |      2 |     52 |      0 |      1 | s03      | R    |
| 36211000 |    511 |    369 |     22 |     6 |    0 |    100 |    1 |   11 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    217 |    294 |      79 |       5 |       0 |      30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      4 |      2 |      0 |      0 |      0 |       1 |       1 |       0 |       5 |      3 |      1 |      0 |      1 |       16 |       24 |       30 |       31 |       21 |       24 |      11 |       23 |       44 |       32 |       31 |       26 |       31 |      25 |        0 |        1 |        1 |        2 |        3 |        4 |       0 |        1 |        1 |        1 |        3 |        1 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       12 |       10 |        8 |        6 |        5 |       1 |        7 |       25 |       12 |       13 |        6 |        8 |       0 |      0 |      2 |     53 |     66 |     17 |     10 |      9 |    212 |      0 |      0 |      0 |      2 |      5 |      1 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     40 |      1 |      1 |      1 |     62 |      0 |      1 | s03      | R    |
| 36220000 |    733 |    536 |     30 |    21 |    0 |    136 |    1 |    5 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    310 |    423 |      69 |      10 |       0 |      28 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |       1 |       3 |       0 |       5 |      2 |      0 |      0 |      0 |       22 |       38 |       36 |       53 |       29 |       31 |      12 |       32 |       49 |       72 |       58 |       28 |       52 |      24 |        1 |        4 |        2 |        2 |        2 |        1 |       2 |        1 |        2 |        6 |        2 |        1 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       22 |       19 |       17 |        4 |        2 |       2 |       18 |       29 |       18 |       12 |        4 |        8 |       3 |      0 |      6 |     77 |     86 |     26 |      8 |     16 |    317 |      0 |      0 |      0 |      6 |      7 |      2 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     46 |      1 |      1 |      0 |     93 |      0 |      1 | s03      | R    |
| 36230001 |    710 |    528 |     29 |    14 |    0 |    127 |    1 |    7 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    284 |    426 |      71 |       7 |       0 |      36 |      6 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |       7 |       2 |       0 |       2 |      6 |      0 |      0 |      0 |       13 |       28 |       48 |       43 |       24 |       23 |      20 |       31 |       58 |       61 |       58 |       38 |       40 |      43 |        2 |        3 |        3 |        3 |        2 |        0 |       2 |        2 |        3 |        4 |        2 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       22 |       13 |        8 |        8 |        5 |       2 |       15 |       30 |       17 |       11 |        2 |        8 |       0 |      0 |      8 |     62 |     74 |     29 |      5 |     16 |    334 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     25 |     34 |      4 |      3 |      0 |     87 |      0 |      1 | s03      | R    |
| 36230002 |    114 |     95 |      5 |     2 |    0 |      9 |    0 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     43 |     71 |       2 |       1 |       0 |       1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        3 |        2 |        2 |        7 |        6 |       8 |        2 |        6 |       13 |       16 |        9 |        4 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       2 |        0 |        1 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        1 |        2 |        2 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      8 |      8 |      6 |      2 |      6 |     65 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |     10 |      0 |      1 | s03      | R    |
| 36250001 |    233 |    173 |     11 |     4 |    0 |     40 |    1 |    3 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     94 |    139 |      40 |       1 |       0 |      11 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        4 |       13 |       14 |       14 |       10 |        8 |       5 |       13 |       18 |       11 |       19 |       16 |       15 |      13 |        2 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        6 |        2 |        2 |        1 |        2 |       1 |        6 |       11 |        4 |        7 |        1 |        1 |       0 |      0 |      1 |     18 |     35 |     10 |      1 |      7 |    101 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     12 |      1 |      1 |      1 |     23 |      0 |      1 | s03      | R    |
| 36250002 |    197 |    150 |     11 |     3 |    0 |     24 |    0 |    8 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     91 |    106 |      22 |       1 |       0 |      10 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       4 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        7 |       13 |       13 |       15 |        6 |       16 |       0 |        6 |       22 |       15 |       14 |       10 |        9 |       4 |        0 |        0 |        3 |        0 |        2 |        0 |       0 |        2 |        0 |        3 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        5 |        4 |        1 |        1 |       0 |        3 |        7 |        5 |        2 |        2 |        1 |       0 |      0 |      1 |     33 |     17 |      7 |      1 |      8 |     83 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     12 |      0 |      0 |      0 |     18 |      0 |      1 | s03      | R    |
| 36251000 |    951 |    757 |     24 |    14 |    0 |    141 |    1 |   13 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    385 |    566 |      53 |       5 |       0 |      19 |      8 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |       1 |       0 |       0 |       3 |      4 |      0 |      0 |      0 |       28 |       33 |       59 |       64 |       38 |       33 |      30 |       30 |       70 |       77 |      113 |       63 |       54 |      65 |        0 |        1 |        5 |        2 |        3 |        0 |       1 |        0 |        7 |        0 |        4 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       15 |       23 |       15 |       12 |        3 |       2 |       14 |       24 |       15 |       16 |        7 |        4 |       2 |      0 |      7 |     92 |    108 |     58 |     17 |     23 |    452 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |      1 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     25 |     35 |      3 |      1 |      3 |    100 |      0 |      1 | s03      | R    |
| 36260001 |    688 |    534 |     27 |    11 |    0 |     93 |    0 |    7 |    16 |    0 |    0 |    0 |    0 |    0 |    0 |    269 |    419 |      47 |       2 |       0 |      10 |     10 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |       1 |       0 |       0 |       1 |      4 |      0 |      0 |      2 |        5 |       37 |       45 |       41 |       37 |       23 |      10 |       22 |       53 |       64 |       82 |       47 |       39 |      29 |        0 |        2 |        3 |        6 |        1 |        1 |       2 |        0 |        5 |        1 |        4 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       16 |       11 |       12 |        7 |        2 |       0 |        8 |       25 |       18 |       11 |        8 |        1 |       0 |      0 |      4 |     76 |     73 |     42 |      6 |     20 |    313 |      0 |      0 |      2 |      2 |      3 |      2 |      1 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     30 |     20 |      6 |      0 |      2 |     68 |      0 |      1 | s03      | R    |
| 36270000 |    707 |    529 |     26 |     6 |    0 |    117 |    2 |   11 |    16 |    0 |    0 |    0 |    0 |    0 |    0 |    279 |    428 |      18 |       1 |       0 |      13 |     10 |      1 |      0 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      3 |      0 |      2 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |     11 |        7 |       31 |       36 |       45 |       33 |       15 |      28 |       22 |       53 |       64 |       85 |       48 |       21 |      41 |        0 |        2 |        1 |        1 |        2 |        2 |       2 |        0 |        1 |        3 |        3 |        2 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       16 |       23 |       18 |       10 |        3 |       1 |        8 |       18 |       22 |       17 |        8 |        4 |       1 |      0 |      3 |     58 |     81 |     35 |     16 |     23 |    313 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      3 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     30 |     16 |      4 |      1 |     83 |      0 |      1 | s03      | R    |
| 36271000 |    665 |    486 |     32 |     6 |    0 |    117 |    2 |    3 |    19 |    0 |    0 |    0 |    0 |    0 |    0 |    273 |    392 |      15 |       2 |       0 |       5 |     13 |      3 |      0 |     11 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      5 |      2 |      0 |      3 |      2 |      1 |      0 |      1 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |       32 |       39 |       35 |       35 |       19 |      14 |       17 |       44 |       64 |       63 |       54 |       31 |      33 |        2 |        1 |        3 |        1 |        2 |        2 |       4 |        3 |        6 |        1 |        2 |        2 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       24 |       22 |       13 |       10 |        1 |       1 |        8 |       18 |       17 |       17 |        8 |        1 |       0 |      0 |      3 |     47 |     60 |     37 |     18 |     25 |    296 |      0 |      0 |      0 |      5 |      7 |      1 |      0 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     27 |     10 |      4 |      4 |     88 |      0 |      1 | s03      | R    |
| 36280001 |    486 |    398 |     18 |     7 |    0 |     55 |    2 |    3 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    198 |    288 |      15 |       2 |       0 |       1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      2 |       10 |       13 |       23 |       38 |       37 |       22 |      19 |       21 |       20 |       41 |       57 |       38 |       35 |      24 |        0 |        0 |        2 |        2 |        1 |        0 |       0 |        2 |        0 |        1 |        3 |        0 |        2 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       10 |        5 |        6 |        5 |        2 |       0 |        5 |        8 |        7 |       12 |        4 |        3 |       0 |      0 |      1 |     30 |     64 |     25 |     15 |     30 |    233 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      2 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     15 |      1 |      2 |      1 |     38 |      0 |      1 | s03      | R    |
| 36280002 |    293 |    206 |     12 |     4 |    0 |     56 |    1 |    3 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    134 |    159 |      15 |       2 |       0 |       2 |      7 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |       1 |       2 |       0 |       1 |      2 |      0 |      0 |      1 |        2 |       14 |       27 |       16 |       18 |       12 |       6 |        3 |       16 |       29 |       25 |       16 |       11 |      11 |        1 |        1 |        3 |        2 |        1 |        0 |       0 |        2 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |        7 |        7 |        7 |        0 |       0 |        2 |        9 |       16 |       11 |        3 |        2 |       1 |      0 |      5 |     24 |     29 |     13 |      2 |      7 |    126 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     14 |      2 |      0 |      0 |     46 |      0 |      1 | s03      | R    |
| 36290000 |    680 |    496 |     25 |    10 |    0 |    125 |    1 |   13 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    265 |    415 |      29 |       4 |       0 |      11 |      7 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      1 |      1 |      0 |      2 |        9 |       26 |       33 |       40 |       31 |       23 |      10 |       28 |       47 |       45 |       90 |       54 |       49 |      11 |        1 |        5 |        3 |        4 |        4 |        1 |       2 |        0 |        1 |        0 |        1 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       23 |       12 |       15 |        7 |        2 |       2 |       20 |       27 |       16 |       13 |        5 |        4 |       1 |      0 |      9 |     62 |     91 |     35 |     15 |     20 |    264 |      0 |      0 |      0 |      2 |      7 |      4 |      1 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     22 |     31 |      6 |      4 |      1 |     92 |      0 |      1 | s03      | R    |
| 36300001 |    796 |    621 |     27 |     6 |    0 |    124 |    1 |   13 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    318 |    478 |      33 |       4 |       0 |      13 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      1 |      0 |      0 |      1 |       1 |       4 |       0 |       3 |      5 |      1 |      0 |      0 |       20 |       32 |       42 |       45 |       36 |       32 |      25 |       24 |       62 |       67 |       72 |       63 |       45 |      56 |        3 |        3 |        3 |        3 |        2 |        1 |       1 |        3 |        3 |        0 |        1 |        0 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       17 |       17 |       14 |        8 |        1 |       1 |       25 |       19 |       19 |        9 |        4 |        2 |       0 |      0 |      3 |     69 |     99 |     51 |     15 |     26 |    358 |      0 |      0 |      0 |      3 |      4 |      1 |      1 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     28 |     33 |      3 |      3 |      0 |     79 |      0 |      1 | s03      | R    |
| 36300002 |    188 |    153 |      4 |     0 |    0 |     30 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     74 |    114 |       8 |       3 |       0 |       2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |        9 |       13 |        9 |        8 |        9 |       6 |        6 |       16 |       21 |       21 |       11 |       12 |       9 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |        3 |        1 |        0 |        0 |       0 |        7 |        5 |        1 |        4 |        0 |        0 |       0 |      0 |      4 |     21 |     25 |      7 |      3 |      9 |     84 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      7 |      0 |      0 |      0 |     16 |      0 |      1 | s03      | R    |
| 36301001 |    247 |    211 |      5 |     0 |    0 |     29 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    101 |    146 |       7 |       0 |       0 |       6 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |      1 |      0 |      0 |      0 |        4 |        5 |       11 |       15 |       14 |       13 |      17 |        5 |       15 |       17 |       30 |       11 |       23 |      31 |        0 |        0 |        0 |        0 |        1 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |        3 |        3 |        2 |        0 |       0 |        2 |        6 |        1 |        2 |        1 |        1 |       0 |      0 |      1 |     33 |     19 |     10 |      5 |      9 |    134 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      5 |      1 |      0 |      1 |     15 |      0 |      1 | s03      | R    |
| 36301002 |    318 |    260 |     12 |     4 |    0 |     39 |    0 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    126 |    192 |      19 |       0 |       0 |       3 |      8 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        4 |       14 |       21 |       17 |       12 |       14 |      15 |        4 |       20 |       35 |       30 |       24 |       24 |      26 |        1 |        2 |        0 |        0 |        1 |        1 |       1 |        0 |        1 |        0 |        2 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        5 |        6 |        8 |        2 |        2 |       0 |        7 |        6 |        3 |        4 |        2 |        1 |       0 |      0 |      3 |     27 |     46 |     18 |      4 |     18 |    144 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |     14 |      2 |      0 |      0 |     22 |      0 |      1 | s03      | R    |
| 36310000 |    564 |    425 |     23 |     8 |    0 |     95 |    2 |    9 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    243 |    321 |      51 |       2 |       0 |      32 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |       6 |       2 |       0 |       0 |      5 |      1 |      0 |      1 |       26 |       30 |       35 |       34 |       24 |       15 |      15 |       25 |       40 |       49 |       46 |       37 |       21 |      28 |        1 |        3 |        3 |        1 |        0 |        2 |       0 |        1 |        2 |        5 |        0 |        2 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        7 |       16 |       12 |        3 |        5 |       1 |        9 |       16 |       15 |       10 |        6 |        5 |       1 |      0 |      3 |     66 |     63 |     28 |      7 |     13 |    245 |      0 |      0 |      0 |      5 |      3 |      1 |      0 |      1 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     30 |      1 |      2 |      3 |     58 |      0 |      1 | s03      | R    |
| 36320000 |    677 |    520 |     27 |    18 |    0 |     97 |    2 |   11 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    273 |    404 |      53 |       5 |       0 |      25 |     11 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |       2 |       0 |       0 |       5 |      5 |      0 |      0 |      1 |       11 |       27 |       33 |       43 |       22 |       36 |      23 |       24 |       54 |       59 |       51 |       40 |       41 |      56 |        1 |        1 |        3 |        3 |        0 |        1 |       2 |        2 |        4 |        4 |        4 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       16 |       13 |       12 |        4 |        6 |       0 |       13 |       14 |       12 |       12 |        6 |        5 |       1 |      0 |      6 |     60 |     88 |     29 |      6 |     17 |    314 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     27 |     35 |      2 |      2 |      2 |     62 |      0 |      1 | s03      | R    |
| 36330001 |    316 |    255 |      7 |     7 |    0 |     39 |    1 |    6 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    129 |    187 |      16 |       0 |       0 |       9 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |       12 |       16 |       22 |       10 |       15 |      18 |       12 |       13 |       31 |       25 |       20 |       24 |      30 |        2 |        1 |        1 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        5 |        4 |        5 |        3 |        2 |       1 |        2 |        9 |        6 |        5 |        4 |        4 |       0 |      0 |      1 |     26 |     38 |     13 |      7 |      5 |    165 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     22 |      1 |      0 |      1 |     24 |      0 |      1 | s03      | R    |
| 36330002 |     94 |     67 |      6 |     2 |    0 |     15 |    0 |    4 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     35 |     59 |       6 |       0 |       0 |       5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        3 |        7 |        7 |        2 |        1 |       1 |        0 |        6 |       13 |        7 |        8 |        5 |       3 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        2 |        1 |        0 |        1 |       0 |        4 |        2 |        2 |        4 |        0 |        1 |       1 |      0 |      1 |     10 |     13 |      3 |      0 |      2 |     38 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      3 |      1 |      0 |      1 |      8 |      0 |      1 | s03      | R    |
| 36331001 |    157 |    124 |      4 |     3 |    0 |     21 |    0 |    5 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     59 |     98 |       4 |       0 |       0 |       2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        3 |        6 |        9 |       11 |        4 |        7 |       5 |        7 |        9 |       17 |        9 |       18 |        5 |      14 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        2 |        3 |        2 |        2 |       0 |        2 |        5 |        2 |        4 |        1 |        2 |       0 |      0 |      2 |     12 |     13 |      8 |      4 |      5 |     80 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |     11 |      1 |      0 |      0 |     12 |      0 |      1 | s03      | R    |
| 36331002 |    237 |    190 |     10 |     3 |    0 |     26 |    0 |    7 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     92 |    145 |      10 |       2 |       0 |       3 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        8 |       12 |       14 |       10 |        6 |      16 |        9 |       18 |       14 |       24 |       11 |       13 |      31 |        0 |        0 |        2 |        2 |        0 |        0 |       1 |        1 |        0 |        3 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        3 |        6 |        1 |        0 |       0 |        1 |        4 |        6 |        8 |        0 |        1 |       0 |      0 |      3 |     19 |     22 |     20 |      4 |      7 |    115 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     14 |      0 |      0 |      0 |     17 |      0 |      1 | s03      | R    |
| 36340001 |     19 |     15 |      0 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |     11 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        4 |        0 |        0 |       0 |        0 |        0 |        5 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      0 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 36340002 |    488 |    381 |     11 |    14 |    0 |     75 |    0 |    4 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    186 |    302 |      43 |       4 |       0 |      26 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |       13 |       20 |       30 |       16 |       22 |       19 |      24 |       18 |       49 |       46 |       48 |       22 |       23 |      31 |        3 |        2 |        1 |        0 |        1 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       11 |        7 |        6 |        1 |        3 |       0 |       12 |       20 |       14 |       10 |        3 |        3 |       0 |      0 |      5 |     50 |     57 |     21 |      7 |     11 |    230 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     12 |     20 |      2 |      2 |      1 |     56 |      0 |      1 | s03      | R    |
| 36341000 |    263 |    222 |      7 |     1 |    0 |     29 |    0 |    4 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    105 |    158 |      10 |       0 |       0 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       10 |       15 |       19 |       15 |        9 |       12 |       5 |       10 |       26 |       22 |       35 |       17 |       11 |      16 |        0 |        4 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        4 |        5 |        0 |        1 |       0 |        1 |        8 |        6 |        2 |        1 |        2 |       0 |      0 |      0 |     24 |     34 |     11 |      6 |     10 |    137 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     12 |      2 |      0 |      1 |     16 |      0 |      1 | s03      | R    |
| 36350000 |    175 |    139 |      6 |     2 |    0 |     24 |    0 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     69 |    106 |       4 |       0 |       0 |       0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        2 |        6 |        9 |       13 |        6 |       12 |       3 |        6 |       15 |       22 |       15 |       14 |        7 |       9 |        0 |        1 |        0 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        4 |        1 |        1 |        0 |       0 |        3 |        5 |        2 |        3 |        3 |        0 |       0 |      0 |      1 |     17 |     16 |     10 |      4 |      9 |     82 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |     12 |      0 |      0 |      0 |     11 |      0 |      1 | s03      | R    |
| 36351000 |    519 |    392 |     17 |     6 |    0 |     89 |    1 |    4 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    201 |    318 |      19 |       5 |       0 |      18 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |       0 |       3 |       0 |       1 |      3 |      0 |      0 |      1 |       17 |       21 |       30 |       33 |       15 |       16 |      10 |       21 |       58 |       37 |       55 |       34 |       23 |      22 |        0 |        0 |        1 |        3 |        3 |        0 |       0 |        2 |        2 |        3 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       18 |       13 |        5 |        4 |        1 |       2 |       17 |       16 |        8 |        9 |        5 |        3 |       0 |      0 |      3 |     67 |     62 |     18 |      2 |     12 |    228 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     27 |      2 |      0 |      0 |     59 |      0 |      1 | s03      | R    |
| 36360000 |    475 |    356 |     14 |    12 |    0 |     77 |    1 |   12 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    207 |    268 |      38 |       2 |       0 |      14 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |       3 |       0 |       0 |       5 |      0 |      0 |      0 |      1 |       15 |       28 |       30 |       29 |       17 |       13 |      13 |       16 |       46 |       41 |       37 |       30 |       16 |      25 |        0 |        4 |        1 |        1 |        0 |        2 |       0 |        2 |        1 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       14 |        7 |        7 |        4 |        8 |       0 |        9 |       20 |       10 |        8 |        1 |        3 |       0 |      0 |      2 |     49 |     64 |     16 |     10 |      8 |    207 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     28 |      3 |      1 |      1 |     57 |      0 |      1 | s03      | R    |
| 36400000 |    198 |    108 |     55 |     1 |    0 |     33 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     91 |    107 |       3 |       2 |       0 |       2 |     11 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      5 |      3 |      0 |      9 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        2 |        4 |       10 |       13 |       13 |       7 |        3 |        5 |        5 |       14 |       14 |        7 |       8 |        0 |        2 |        2 |        1 |        4 |        8 |       6 |        0 |        1 |        2 |        2 |        4 |       13 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        2 |        3 |        3 |        1 |       0 |        4 |        6 |        2 |        2 |        3 |        2 |       0 |      0 |      0 |      5 |     12 |     10 |      5 |      8 |     68 |      0 |      0 |      0 |      3 |      3 |      4 |      3 |      4 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      4 |      2 |      1 |      1 |     22 |      0 |      1 | s03      | R    |
| 36401000 |     36 |     18 |     12 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     20 |       0 |       0 |       0 |       0 |      8 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        4 |       1 |        0 |        0 |        0 |        1 |        4 |        5 |       1 |        0 |        0 |        0 |        1 |        1 |        5 |       0 |        0 |        0 |        1 |        0 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        2 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |     13 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 36402000 |      5 |      4 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 | s03      | R    |
| 36410000 |    470 |    268 |    101 |     3 |    0 |     83 |    3 |    1 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    226 |    244 |      10 |       0 |       0 |       3 |     15 |      4 |      0 |     12 |      1 |      0 |      0 |      1 |      4 |      2 |      0 |      1 |     19 |     13 |      0 |     13 |      3 |      0 |      0 |      2 |       1 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        8 |        8 |       18 |       32 |       24 |       14 |      14 |       13 |       12 |       20 |       33 |       37 |       12 |      23 |        1 |        3 |        6 |        7 |        8 |       14 |      16 |        1 |        4 |        1 |        6 |       11 |        8 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       12 |       15 |       10 |        8 |        1 |       0 |        9 |        7 |       11 |        7 |        8 |        3 |       3 |      0 |      4 |     30 |     44 |     14 |      8 |     17 |    151 |      0 |      0 |      0 |      6 |     14 |      6 |      0 |      5 |     70 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |     17 |      8 |      3 |      7 |     47 |      0 |      1 | s03      | R    |
| 36420001 |     37 |     25 |      9 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     22 |     15 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        2 |        1 |        8 |        0 |       1 |        1 |        0 |        1 |        2 |        4 |        0 |       2 |        0 |        1 |        0 |        0 |        0 |        2 |       2 |        0 |        0 |        1 |        0 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      2 |      0 |      0 |     17 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 36420002 |    464 |    280 |    116 |     7 |    0 |     49 |    6 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    214 |    250 |       8 |       4 |       0 |       1 |     24 |      9 |      0 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |      5 |      0 |      6 |      1 |      0 |      0 |      0 |       3 |       0 |       0 |       0 |      8 |      0 |      0 |      0 |        5 |       11 |       20 |       16 |       28 |       18 |      21 |       13 |       11 |       17 |       34 |       33 |       30 |      23 |        1 |        3 |        6 |        7 |       14 |       17 |      14 |        1 |        2 |        2 |        8 |       14 |        9 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        4 |        5 |        7 |        6 |        6 |       0 |        5 |        2 |        9 |        9 |        8 |        2 |       0 |      0 |      1 |     32 |     42 |     28 |      6 |      8 |    163 |      0 |      0 |      2 |      5 |     12 |      6 |      6 |      9 |     76 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |     13 |      5 |      5 |      2 |     34 |      0 |      1 | s03      | R    |
| 36430001 |    179 |    118 |     27 |     3 |    0 |     27 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     87 |     92 |       0 |       2 |       0 |       2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        6 |        7 |        9 |       12 |       11 |       7 |        6 |        6 |        8 |       20 |        7 |       10 |       8 |        2 |        1 |        4 |        2 |        3 |        2 |       1 |        0 |        0 |        3 |        2 |        0 |        2 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        3 |        3 |        5 |        2 |        3 |       0 |        0 |        1 |        8 |        0 |        3 |        3 |       0 |      0 |      0 |     10 |     16 |     12 |      2 |      3 |     75 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      2 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      9 |      0 |      1 |      0 |     15 |      0 |      1 | s03      | R    |
| 36430002 |    415 |    271 |     68 |     3 |    0 |     63 |    0 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    190 |    225 |      18 |       2 |       0 |       4 |     19 |      1 |      0 |      4 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     10 |      7 |      0 |      9 |      2 |      2 |      0 |      0 |       2 |       0 |       0 |       1 |      2 |      1 |      0 |      0 |        5 |       17 |       27 |       27 |       20 |       11 |      11 |       10 |       16 |       28 |       38 |       24 |       22 |      15 |        0 |        9 |        5 |        7 |       10 |        3 |       2 |        0 |        4 |        3 |        3 |        6 |       11 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        5 |       12 |        5 |        4 |        2 |       2 |        1 |       11 |       13 |       10 |        3 |        2 |       0 |      0 |      1 |     27 |     45 |     14 |      5 |     19 |    160 |      0 |      0 |      0 |      5 |     15 |      6 |      2 |      1 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |      8 |      3 |      0 |      3 |     50 |      0 |      1 | s03      | R    |
| 36431001 |    289 |    183 |     44 |     2 |    0 |     52 |    3 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    130 |    159 |      20 |       0 |       0 |       1 |      5 |      2 |      0 |      1 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |     19 |      5 |      0 |     17 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        5 |       14 |       24 |       17 |        3 |       2 |        8 |        8 |       26 |       47 |       19 |        4 |       1 |        2 |        3 |        5 |       11 |        3 |        3 |       0 |        0 |        0 |        4 |        6 |        3 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |        7 |        8 |        6 |        2 |       0 |        2 |        6 |        9 |        7 |        3 |        1 |       1 |      0 |      1 |     24 |     30 |     15 |     13 |     20 |     80 |      0 |      0 |      0 |     12 |      4 |      0 |      1 |     10 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     17 |      1 |      0 |      7 |     29 |      0 |      1 | s03      | R    |
| 36431002 |    317 |    145 |     80 |     4 |    0 |     86 |    0 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    153 |    164 |       5 |       0 |       0 |       1 |     10 |      2 |      0 |      5 |      0 |      4 |      0 |      0 |      2 |      4 |      0 |      0 |     14 |     17 |      0 |     30 |      4 |      2 |      0 |      0 |       1 |       0 |       0 |       1 |      1 |      1 |      0 |      0 |        3 |        2 |       10 |       19 |       15 |       12 |       0 |       14 |        3 |       13 |       32 |       12 |        8 |       2 |        1 |        2 |        5 |       11 |       11 |       12 |       0 |        2 |        0 |        3 |       16 |        8 |        8 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        7 |        4 |       14 |       12 |        6 |       1 |        9 |        6 |        9 |       11 |        5 |        2 |       0 |      0 |      0 |     21 |     24 |     12 |     10 |     14 |     64 |      0 |      0 |      0 |      9 |     11 |      7 |     11 |     11 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     12 |     31 |      3 |      3 |      3 |     38 |      0 |      1 | s03      | R    |
| 36440000 |    763 |    478 |     79 |    15 |    0 |    163 |    4 |    6 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    299 |    464 |      24 |       5 |       0 |      11 |     14 |      5 |      0 |      8 |      1 |      0 |      0 |      2 |      5 |      0 |      0 |      3 |      5 |      1 |      0 |      9 |      3 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      5 |      2 |      0 |      0 |       10 |       36 |       38 |       35 |       30 |        9 |       4 |       17 |       78 |       63 |       69 |       50 |       30 |       9 |        1 |        5 |        6 |        8 |        6 |        6 |       3 |        0 |       15 |        9 |        7 |        5 |        4 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       38 |       16 |       18 |       11 |        4 |       1 |        8 |       32 |       29 |       16 |       12 |        6 |       1 |      0 |      2 |     68 |     85 |     22 |      8 |     13 |    280 |      0 |      0 |      0 |      5 |     19 |      5 |      1 |      7 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     25 |     38 |      5 |      3 |      0 |    135 |      0 |      1 | s03      | R    |
| 36450000 |    287 |    218 |     27 |     4 |    0 |     35 |    0 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    139 |    148 |       7 |       0 |       0 |       0 |      8 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      9 |      8 |      0 |      6 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      2 |        9 |        6 |       18 |       24 |       18 |       16 |       9 |        5 |       10 |       14 |       33 |       20 |       16 |      20 |        0 |        1 |        3 |        2 |        2 |        2 |       3 |        0 |        2 |        0 |        2 |        3 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        6 |        3 |        7 |        1 |        2 |       0 |        5 |        5 |        1 |        4 |        1 |        0 |       0 |      0 |      0 |     24 |     32 |     23 |      9 |     10 |    120 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      3 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      4 |      1 |      0 |      2 |     22 |      0 |      1 | s03      | R    |
| 36451001 |    476 |    371 |     40 |     1 |    0 |     59 |    0 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    211 |    265 |       8 |       2 |       0 |       2 |     15 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      4 |      0 |      3 |     21 |      9 |      0 |     10 |      3 |      0 |      0 |      0 |       2 |       0 |       0 |       1 |      7 |      1 |      0 |      0 |        7 |       13 |       19 |       33 |       35 |       23 |      21 |       18 |       20 |       32 |       44 |       52 |       25 |      29 |        1 |        1 |        3 |        4 |        1 |        6 |       4 |        1 |        1 |        1 |        1 |        3 |        5 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        8 |        6 |       11 |        5 |        2 |       1 |        2 |        5 |        6 |        5 |        4 |        1 |       2 |      0 |      2 |     28 |     60 |     25 |      6 |     27 |    223 |      0 |      0 |      0 |      3 |      7 |      1 |      2 |      2 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     13 |      5 |      2 |      1 |     38 |      0 |      1 | s03      | R    |
| 36451002 |     14 |     10 |      3 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        1 |        0 |        0 |       1 |        0 |        1 |        0 |        1 |        2 |        1 |       1 |        0 |        1 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 36460001 |    525 |    385 |     28 |     5 |    0 |     75 |    0 |    2 |    30 |    0 |    0 |    0 |    0 |    0 |    0 |    239 |    286 |      20 |       2 |       0 |       6 |      8 |      0 |      0 |      8 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      8 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      0 |        6 |       19 |       23 |       46 |       41 |        8 |      14 |       15 |       31 |       43 |       48 |       43 |       20 |      28 |        1 |        3 |        1 |        7 |        1 |        3 |       1 |        0 |        5 |        2 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       19 |       19 |       12 |       10 |        0 |       1 |        6 |       11 |       10 |       11 |        9 |        0 |       0 |      0 |      1 |     41 |     63 |     30 |      9 |     16 |    225 |      0 |      0 |      0 |      3 |      2 |      2 |      3 |      2 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     14 |     18 |     10 |      4 |      2 |     62 |      0 |      1 | s03      | R    |
| 36460002 |     21 |     14 |      1 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |     12 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        3 |        1 |        1 |        3 |        1 |       2 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 36461000 |    402 |    293 |     27 |     5 |    0 |     67 |    2 |    3 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    167 |    235 |      38 |       1 |       0 |       6 |      5 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       2 |      2 |      0 |      0 |      0 |        6 |       12 |       24 |       31 |       20 |        8 |       5 |       13 |       31 |       39 |       54 |       25 |       13 |      12 |        3 |        2 |        2 |        3 |        3 |        1 |       3 |        1 |        3 |        0 |        3 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       12 |       13 |        9 |        5 |        1 |       1 |        4 |        8 |        5 |       13 |        4 |        3 |       1 |      0 |      0 |     20 |     55 |     23 |     12 |     12 |    171 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |     16 |      5 |      2 |      1 |     46 |      0 |      1 | s03      | R    |
| 36470000 |    386 |    279 |     25 |     4 |    0 |     57 |    1 |    3 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    152 |    234 |      11 |       1 |       0 |       5 |     11 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |       2 |       2 |       0 |       4 |      2 |      0 |      0 |      0 |        8 |       11 |       18 |       24 |       24 |       10 |      11 |       11 |       31 |       34 |       36 |       32 |       16 |      13 |        0 |        0 |        2 |        4 |        0 |        3 |       3 |        1 |        2 |        2 |        2 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        7 |       10 |       13 |        2 |        1 |       0 |        6 |       12 |       14 |        8 |        5 |        1 |       2 |      0 |      1 |     29 |     52 |     18 |      7 |     11 |    161 |      0 |      0 |      1 |      1 |      8 |      1 |      2 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     15 |      3 |      0 |      0 |     49 |      0 |      1 | s03      | R    |
| 36475000 |    424 |    302 |     14 |    16 |    0 |     72 |    1 |    4 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    161 |    263 |      14 |       2 |       0 |      11 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      1 |      0 |      2 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       11 |       14 |       23 |       28 |       13 |       15 |       5 |       11 |       41 |       36 |       54 |       23 |       16 |      12 |        0 |        1 |        1 |        1 |        1 |        1 |       1 |        0 |        3 |        2 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       21 |        7 |        6 |        6 |        1 |       1 |        8 |       20 |       17 |       11 |        2 |        4 |       0 |      0 |      3 |     44 |     50 |     18 |      8 |      9 |    170 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     23 |      6 |      0 |      1 |     57 |      0 |      1 | s03      | R    |
| 36480000 |    657 |    476 |     39 |     8 |    0 |    115 |    3 |   15 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    248 |    409 |      20 |       6 |       0 |       5 |      7 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      8 |      1 |      0 |      0 |      1 |       0 |       3 |       0 |       2 |      1 |      2 |      0 |      1 |       19 |       27 |       43 |       32 |       24 |       13 |      11 |       29 |       53 |       75 |       54 |       51 |       26 |      19 |        4 |        1 |        5 |        6 |        1 |        4 |       0 |        2 |        6 |        5 |        2 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       11 |       13 |       10 |        9 |        4 |       1 |       10 |       34 |       18 |       12 |        7 |        3 |       0 |      0 |      6 |     61 |     75 |     37 |      8 |     18 |    271 |      0 |      0 |      0 |     13 |      5 |      1 |      0 |      1 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     45 |      3 |      4 |      2 |     71 |      0 |      1 | s03      | R    |
| 36490000 |    607 |    419 |     45 |    16 |    0 |     88 |    3 |    7 |    29 |    0 |    0 |    0 |    0 |    0 |    0 |    266 |    341 |      30 |       4 |       0 |      12 |     11 |      3 |      0 |     11 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |       2 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        3 |       32 |       32 |       31 |       30 |       19 |      20 |       14 |       27 |       53 |       63 |       35 |       22 |      38 |        2 |        2 |        9 |        4 |        2 |        3 |       2 |        0 |        3 |        3 |        3 |        4 |        1 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       18 |       14 |       15 |       15 |        5 |       1 |       11 |       19 |       12 |       13 |        9 |        2 |       2 |      0 |      4 |     33 |     70 |     31 |     13 |     32 |    236 |      0 |      0 |      0 |      3 |      1 |      5 |      0 |      0 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     20 |     33 |      4 |      3 |      3 |     77 |      0 |      1 | s03      | R    |
| 36500001 |    147 |    110 |      1 |     2 |    0 |     28 |    0 |    3 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     62 |     85 |       5 |       0 |       0 |       3 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        4 |       12 |        5 |       10 |        7 |       1 |        6 |       10 |        9 |       15 |       14 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        3 |        2 |        6 |        2 |        0 |       0 |        3 |        7 |        2 |        3 |        1 |        1 |       0 |      0 |      0 |     14 |     10 |      6 |      2 |      8 |     70 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      6 |      1 |      0 |      0 |     24 |      0 |      1 | s03      | R    |
| 36500002 |    369 |    264 |     18 |     7 |    0 |     66 |    4 |    7 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    160 |    209 |      12 |       0 |       0 |       2 |      6 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |       17 |       21 |       23 |       14 |       12 |      11 |       14 |       25 |       33 |       35 |       17 |       16 |      20 |        2 |        1 |        1 |        3 |        0 |        0 |       1 |        0 |        0 |        2 |        2 |        1 |        0 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       12 |        7 |       15 |        4 |        3 |       0 |        8 |        8 |       10 |        5 |        5 |        2 |       1 |      0 |      3 |     29 |     47 |     11 |      5 |     10 |    159 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     22 |      2 |      2 |      1 |     48 |      0 |      1 | s03      | R    |
| 36510000 |    687 |    493 |     61 |    11 |    0 |     98 |    4 |    2 |    18 |    0 |    0 |    0 |    0 |    0 |    0 |    304 |    383 |      28 |       2 |       0 |       5 |     17 |      1 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      5 |      3 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |       12 |       33 |       37 |       54 |       36 |       27 |      12 |       14 |       33 |       49 |       75 |       57 |       28 |      26 |        3 |        1 |        7 |        4 |        5 |        7 |       3 |        3 |        6 |        3 |        7 |        5 |        5 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       13 |       19 |       10 |        9 |        3 |       1 |        6 |       20 |       23 |       12 |        6 |        3 |       0 |      0 |      3 |     53 |     74 |     41 |     17 |     20 |    285 |      0 |      0 |      0 |      4 |      8 |      4 |      6 |      2 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     19 |      6 |      2 |      5 |     82 |      0 |      1 | s03      | R    |
| 36520000 |    540 |    420 |     15 |     6 |    0 |     81 |    1 |   10 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    222 |    318 |      21 |       2 |       0 |      14 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      1 |      0 |      0 |       17 |       24 |       34 |       35 |       32 |       13 |      13 |       18 |       47 |       46 |       64 |       46 |       17 |      14 |        1 |        1 |        1 |        2 |        0 |        1 |       0 |        2 |        2 |        0 |        0 |        1 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       15 |       11 |        9 |        4 |        2 |       0 |       14 |       15 |       14 |        7 |        2 |        3 |       2 |      0 |      3 |     61 |     67 |     40 |      7 |     30 |    212 |      0 |      0 |      1 |      3 |      1 |      1 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     29 |      4 |      1 |      1 |     57 |      0 |      1 | s03      | R    |
| 37310001 |     18 |      8 |      5 |     0 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        2 |        1 |        1 |        1 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 37310002 |    577 |    464 |     13 |     6 |    0 |     83 |    0 |    9 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    264 |    313 |      27 |       3 |       0 |      11 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |       11 |       24 |       41 |       37 |       22 |       21 |      46 |       18 |       28 |       48 |       43 |       18 |       31 |      76 |        1 |        0 |        4 |        1 |        2 |        0 |       1 |        1 |        0 |        0 |        1 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        9 |       13 |       15 |        5 |        1 |       2 |        7 |       17 |        7 |       11 |        2 |        0 |       3 |      0 |      5 |     47 |     61 |     27 |      9 |     21 |    294 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     28 |      2 |      0 |      1 |     53 |      0 |      1 | s03      | R    |
| 37311000 |      2 |      1 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 37340000 |    618 |    452 |     27 |    15 |    0 |    111 |    2 |    8 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    259 |    359 |      75 |       6 |       0 |      32 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       1 |      1 |      1 |      0 |      0 |       24 |       24 |       27 |       37 |       18 |       22 |      28 |       29 |       48 |       43 |       49 |       32 |       32 |      39 |        1 |        4 |        4 |        2 |        2 |        2 |       1 |        3 |        3 |        3 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       11 |       21 |       14 |        4 |        0 |       0 |       22 |       26 |       13 |       10 |        2 |        3 |       0 |      0 |      2 |     62 |     64 |     33 |      7 |     19 |    265 |      0 |      0 |      0 |      8 |      1 |      2 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     34 |     23 |      4 |      3 |      0 |     75 |      0 |      1 | s03      | R    |
| 37350000 |    595 |    463 |     22 |    11 |    0 |     87 |    1 |   10 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    252 |    343 |      58 |       4 |       0 |      17 |      3 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |       1 |       0 |       0 |       3 |      3 |      0 |      0 |      1 |       19 |       22 |       42 |       47 |       19 |       32 |      14 |       23 |       44 |       47 |       44 |       35 |       42 |      33 |        0 |        2 |        1 |        4 |        2 |        1 |       0 |        0 |        4 |        3 |        0 |        2 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       12 |       11 |        6 |        6 |        2 |       2 |       12 |       19 |       16 |        8 |        6 |        2 |       0 |      0 |      6 |     58 |     68 |     33 |      8 |     24 |    266 |      0 |      0 |      0 |      8 |      2 |      0 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     20 |      2 |      2 |      1 |     58 |      0 |      1 | s03      | R    |
| 37360001 |    597 |    461 |     21 |     6 |    0 |     92 |    2 |    9 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    262 |    335 |      55 |       2 |       0 |      24 |      6 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |       15 |       33 |       31 |       37 |       29 |       24 |      21 |       26 |       55 |       51 |       41 |       35 |       25 |      38 |        5 |        2 |        2 |        0 |        0 |        2 |       1 |        0 |        3 |        1 |        3 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       16 |       15 |        9 |        4 |        3 |       0 |       11 |       17 |       12 |       10 |        2 |        3 |       0 |      0 |      5 |     56 |     76 |     31 |     12 |     16 |    265 |      0 |      0 |      0 |      5 |      0 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     23 |      4 |      0 |      0 |     68 |      0 |      1 | s03      | R    |
| 37360002 |     41 |     28 |      1 |     1 |    0 |     10 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |     27 |       1 |       1 |       0 |       5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        3 |        2 |        0 |       1 |        3 |        4 |        3 |        1 |        2 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        3 |        1 |        3 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      5 |      2 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 37370001 |    525 |    401 |     19 |    14 |    0 |     81 |    3 |    3 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    194 |    331 |      70 |       7 |       0 |      33 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      2 |       12 |       33 |       27 |       27 |       21 |       17 |      11 |       19 |       49 |       44 |       64 |       29 |       28 |      20 |        1 |        2 |        3 |        0 |        3 |        0 |       1 |        3 |        2 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       12 |       10 |        6 |        4 |        0 |       1 |       16 |       29 |        9 |        9 |        5 |        1 |       0 |      0 |      7 |     55 |     52 |     21 |     10 |     10 |    246 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     25 |     17 |      3 |      0 |      0 |     57 |      0 |      1 | s03      | R    |
| 37370002 |     30 |     20 |      2 |     2 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |     16 |       1 |       1 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        4 |        1 |        2 |        0 |       0 |        1 |        2 |        1 |        3 |        0 |        3 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 37380001 |     93 |     77 |      2 |     2 |    0 |     10 |    0 |    2 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     36 |     57 |      12 |       1 |       0 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        3 |        4 |        5 |        7 |        2 |        5 |       1 |        2 |       19 |        6 |        9 |        5 |        7 |       2 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        0 |        0 |        1 |        1 |       0 |        2 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      1 |     12 |     15 |      7 |      1 |      2 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 37380002 |      4 |      3 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 37390000 |    383 |    297 |     12 |     9 |    0 |     58 |    1 |    4 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    142 |    241 |      15 |       2 |       0 |       5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       2 |      5 |      1 |      0 |      1 |       10 |       16 |       14 |       28 |       14 |       14 |       9 |       20 |       36 |       37 |       35 |       34 |       13 |      17 |        1 |        0 |        0 |        0 |        1 |        1 |       1 |        2 |        3 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       12 |        4 |        7 |        4 |        1 |       1 |       11 |        9 |       15 |        3 |        1 |        1 |       1 |      0 |      3 |     45 |     57 |     18 |      6 |      9 |    159 |      0 |      0 |      0 |      3 |      0 |      1 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     16 |      0 |      0 |      1 |     42 |      0 |      1 | s03      | R    |
| 37391000 |    334 |    261 |     11 |     9 |    0 |     46 |    0 |    5 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    115 |    219 |      14 |       1 |       0 |       1 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |        6 |       16 |       20 |       16 |       11 |       13 |       6 |       13 |       36 |       31 |       46 |       14 |       23 |      10 |        2 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        9 |        2 |        5 |        2 |        0 |       0 |        3 |       14 |       16 |        4 |        2 |        1 |       0 |      0 |      4 |     37 |     34 |     21 |      5 |      9 |    151 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     14 |      1 |      2 |      0 |     29 |      0 |      1 | s03      | R    |
| 37392001 |    126 |    109 |      4 |     2 |    0 |     10 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     46 |     80 |       6 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        6 |        8 |        9 |        5 |        6 |       3 |        6 |        8 |        6 |       18 |        9 |       13 |       9 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        3 |        2 |        1 |        0 |        2 |       0 |      0 |      0 |     10 |     18 |     13 |      0 |      0 |     68 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 37392002 |     12 |      7 |      1 |     1 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 38020000 |    816 |    520 |     37 |    14 |    0 |    199 |    4 |    2 |    40 |    0 |    0 |    0 |    0 |    0 |    0 |    364 |    452 |      50 |       5 |       0 |      22 |     21 |      2 |      0 |     12 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |     12 |      2 |      0 |     12 |     29 |      1 |      0 |     19 |       3 |       0 |       0 |       0 |      9 |      0 |      0 |      3 |        7 |       34 |       55 |       45 |       26 |       35 |       7 |       19 |       55 |       52 |       62 |       39 |       69 |      15 |        1 |        2 |        5 |        2 |        4 |        3 |       0 |        3 |        1 |        4 |        3 |        2 |        5 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       44 |       27 |       22 |       11 |       17 |       1 |       25 |       49 |       13 |       18 |        5 |       10 |       1 |      0 |      0 |     58 |     89 |     45 |     11 |     17 |    300 |      0 |      0 |      0 |      5 |      3 |      2 |      1 |      2 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     25 |     19 |     13 |      2 |      3 |    194 |      0 |      1 | s03      | R    |
| 38030000 |    837 |    489 |     47 |    21 |    0 |    207 |   10 |    2 |    61 |    0 |    0 |    0 |    0 |    0 |    0 |    388 |    449 |      27 |       2 |       0 |      21 |     35 |      3 |      0 |     11 |      4 |      1 |      0 |      3 |      9 |      0 |      0 |      4 |     14 |      1 |      0 |      9 |      2 |      0 |      0 |      0 |       6 |       0 |       0 |       2 |      4 |      0 |      0 |      2 |        7 |       48 |       55 |       38 |       27 |       17 |       6 |       20 |       77 |       51 |       58 |       48 |       32 |       5 |        0 |       11 |        9 |        8 |        2 |        0 |       0 |        0 |        6 |        4 |        4 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       61 |       50 |       19 |       11 |        5 |       0 |       13 |       55 |       34 |       18 |       14 |        6 |       1 |      0 |      4 |     76 |     53 |     29 |     15 |     15 |    297 |      0 |      0 |      1 |      3 |      5 |      4 |      1 |      0 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     28 |     32 |     10 |      6 |      0 |    215 |      0 |      1 | s03      | R    |
| 38040000 |    580 |    369 |     30 |     4 |    0 |    129 |    3 |    3 |    42 |    0 |    0 |    0 |    0 |    0 |    0 |    241 |    339 |      24 |       2 |       0 |      10 |     23 |      1 |      0 |     11 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      1 |      0 |      4 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       2 |      2 |      2 |      0 |      1 |        6 |       34 |       37 |       32 |       14 |       14 |       3 |       12 |       42 |       65 |       46 |       27 |       24 |      13 |        1 |        3 |        5 |        4 |        1 |        2 |       0 |        2 |        2 |        4 |        3 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       32 |       26 |       15 |        6 |        2 |       0 |       18 |       36 |       17 |       14 |        8 |        3 |       0 |      0 |      0 |     37 |     53 |     15 |     10 |     12 |    242 |      0 |      0 |      1 |      5 |      6 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     15 |      9 |      4 |      3 |    130 |      0 |      1 | s03      | R    |
| 38050000 |    433 |    248 |     69 |     7 |    0 |     86 |    8 |    0 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    200 |    233 |       7 |       4 |       0 |       6 |     30 |      3 |      0 |     10 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      3 |     11 |      8 |      0 |     13 |      3 |      0 |      0 |      1 |       2 |       0 |       0 |       2 |      2 |      0 |      0 |      0 |        1 |       10 |       13 |       23 |       22 |       39 |       0 |        0 |       15 |       15 |       25 |       35 |       48 |       2 |        2 |        5 |        4 |        3 |        8 |       14 |       0 |        3 |        6 |        4 |        1 |        8 |       10 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       13 |       13 |       11 |        8 |        7 |       0 |        8 |       14 |       10 |        5 |       13 |       10 |       0 |      0 |      0 |     37 |     35 |     21 |     10 |      9 |    136 |      0 |      0 |      3 |      0 |     13 |      9 |      1 |      3 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     11 |      9 |      0 |      4 |     79 |      0 |      1 | s03      | R    |
| 38060000 |    595 |    329 |     96 |     8 |    0 |    137 |    7 |    1 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    300 |    295 |       6 |       1 |       0 |       6 |     37 |      5 |      0 |     14 |      5 |      1 |      0 |      5 |      4 |      2 |      0 |      1 |     15 |      8 |      0 |     25 |      6 |      0 |      0 |      2 |       1 |       0 |       0 |       1 |      4 |      2 |      0 |      3 |        4 |       23 |       24 |       30 |       35 |       35 |       2 |        2 |       18 |       22 |       29 |       47 |       51 |       7 |        1 |        7 |        6 |        4 |       15 |       16 |       2 |        2 |        5 |        3 |        6 |       12 |       14 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       21 |       17 |       11 |       22 |       20 |       0 |        3 |       13 |       16 |       10 |       18 |       14 |       0 |      0 |      3 |     37 |     64 |     17 |     14 |     17 |    177 |      0 |      0 |      0 |      9 |     13 |     10 |      4 |      4 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     16 |      9 |      2 |      3 |    117 |      0 |      1 | s03      | R    |
| 38070000 |    813 |    394 |    144 |    11 |    0 |    249 |    5 |    0 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    395 |    418 |      28 |       9 |       0 |      13 |     29 |      7 |      0 |     12 |     10 |      7 |      0 |     22 |      5 |      2 |      0 |      2 |     33 |     31 |      0 |     62 |      5 |      1 |      0 |     11 |       1 |       1 |       0 |       4 |      4 |      1 |      0 |      3 |       23 |       36 |       34 |       27 |       19 |       25 |       0 |       41 |       64 |       27 |       45 |       23 |       27 |       3 |        9 |       23 |       15 |        9 |       16 |       15 |       0 |       11 |       19 |        4 |        2 |       11 |        9 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       27 |       61 |       21 |        8 |       15 |       11 |       1 |       35 |       48 |       18 |        7 |       12 |       11 |       0 |      0 |      2 |     31 |     44 |     17 |      7 |     23 |    270 |      0 |      0 |      1 |      9 |     16 |      7 |      5 |      7 |     99 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     31 |     28 |     11 |      2 |      0 |    202 |      0 |      1 | s03      | R    |
| 39400000 |      1 |      0 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 | s03      | R    |
| 39410000 |      4 |      3 |      0 |     0 |    0 |      0 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 40010000 |    626 |    359 |    154 |     7 |    0 |     90 |    4 |    2 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    288 |    338 |      23 |       2 |       0 |       6 |     23 |     11 |      0 |      6 |      0 |      2 |      0 |      3 |      2 |      0 |      0 |      1 |     13 |      4 |      0 |     11 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      0 |      2 |        5 |       13 |       35 |       48 |       26 |       13 |      16 |        9 |       20 |       38 |       54 |       33 |       24 |      25 |        1 |        9 |       18 |       14 |       13 |        9 |      15 |        4 |        7 |        5 |       14 |       18 |        8 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       10 |       13 |       10 |        9 |        7 |       0 |        5 |       13 |       18 |       14 |        4 |        5 |       1 |      0 |      4 |     37 |     55 |     25 |     12 |     21 |    205 |      0 |      0 |      0 |      7 |     17 |      5 |      4 |      9 |    112 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     21 |     14 |      3 |      4 |     54 |      0 |      1 | s03      | R    |
| 40020000 |    745 |    586 |     57 |     7 |    0 |     87 |    1 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    332 |    413 |      15 |       2 |       0 |       1 |     15 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        9 |       21 |       44 |       41 |       67 |       41 |      26 |       22 |       34 |       56 |       70 |       78 |       33 |      44 |        0 |        3 |        2 |        8 |        5 |        5 |       6 |        2 |        0 |        3 |        2 |        6 |        6 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       18 |       13 |        8 |        5 |        1 |       1 |        3 |        9 |       10 |       16 |        5 |        3 |       2 |      0 |      3 |     32 |     82 |     43 |     25 |     45 |    356 |      0 |      0 |      0 |      1 |      6 |      7 |      1 |      2 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     23 |     17 |      8 |      3 |      5 |     44 |      0 |      1 | s03      | R    |
| 40030000 |    592 |    448 |     67 |     4 |    0 |     66 |    0 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    264 |    328 |       7 |       0 |       0 |       0 |      9 |      1 |      0 |      2 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      4 |      2 |      0 |      0 |      0 |       0 |       4 |       0 |       1 |      0 |      0 |      0 |      0 |       12 |       12 |       28 |       33 |       53 |       26 |      22 |       16 |       26 |       48 |       44 |       60 |       39 |      29 |        0 |        1 |        7 |        2 |        1 |       11 |      13 |        1 |        2 |        3 |        2 |        3 |        8 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       10 |        9 |        7 |        4 |        3 |       2 |        6 |        2 |        8 |        7 |        7 |        3 |       1 |      0 |      3 |     34 |     62 |     28 |     11 |     33 |    277 |      0 |      0 |      0 |      4 |      9 |      1 |      3 |      1 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     14 |     12 |      0 |      3 |     39 |      0 |      1 | s03      | R    |
| 40031000 |    245 |    176 |     24 |     2 |    0 |     38 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     98 |    147 |       7 |       0 |       0 |       1 |      7 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        8 |        4 |       14 |       23 |       10 |       1 |        4 |       16 |       11 |       32 |       33 |       15 |       1 |        0 |        3 |        2 |        1 |        3 |        2 |       0 |        0 |        1 |        1 |        2 |        3 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        6 |        6 |        3 |        5 |       0 |        1 |        4 |        3 |        6 |        6 |        2 |       0 |      0 |      2 |     18 |     29 |     13 |      6 |     14 |     94 |      0 |      0 |      0 |      2 |      2 |      1 |      3 |      3 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      8 |      1 |      2 |      3 |     26 |      0 |      1 | s03      | R    |
| 40032000 |     27 |     18 |      5 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |     16 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        2 |        1 |       0 |        0 |        1 |        3 |        1 |        5 |        1 |       1 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |      1 |      5 |      2 |      0 |      0 |      9 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 40040000 |    540 |    419 |     50 |     3 |    0 |     62 |    0 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    262 |    278 |       7 |       1 |       0 |       1 |     13 |      1 |      0 |      3 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      0 |      0 |      1 |        8 |       14 |       21 |       36 |       50 |       33 |      25 |       11 |       14 |       31 |       57 |       51 |       33 |      35 |        0 |        3 |        2 |        8 |        4 |        1 |       9 |        0 |        1 |        2 |        1 |        6 |        5 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        7 |       10 |       10 |        5 |        7 |       2 |        4 |        4 |        5 |        7 |        2 |        0 |       1 |      0 |      2 |     28 |     64 |     28 |     11 |     25 |    261 |      0 |      0 |      0 |      5 |      6 |      2 |      0 |      7 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |     15 |      4 |      3 |      1 |     38 |      0 |      1 | s03      | R    |
| 40050001 |    510 |    381 |     48 |     5 |    0 |     61 |    2 |    2 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    213 |    297 |      23 |       6 |       0 |       4 |     13 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      3 |      4 |      0 |      0 |      1 |       2 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |        9 |       25 |       13 |       37 |       27 |       28 |      16 |        8 |       29 |       43 |       69 |       40 |       22 |      15 |        0 |        2 |        3 |        6 |        3 |        4 |       6 |        2 |        2 |        4 |        2 |        3 |        2 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        9 |       11 |        8 |        1 |        3 |       0 |        8 |       13 |       11 |        4 |        8 |        3 |       0 |      0 |      4 |     41 |     69 |     33 |     17 |     28 |    189 |      0 |      0 |      0 |      2 |      5 |      3 |      1 |      1 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     13 |      4 |      0 |      2 |     52 |      0 |      1 | s03      | R    |
| 40060000 |    712 |    523 |     81 |     2 |    0 |     92 |    0 |    4 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    327 |    385 |      12 |       1 |       0 |       6 |     15 |      2 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      4 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      0 |        7 |       20 |       40 |       41 |       48 |       40 |      28 |       15 |       28 |       41 |       63 |       55 |       49 |      48 |        2 |        2 |        4 |        7 |        5 |       11 |      12 |        0 |        1 |        4 |        1 |        7 |        8 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       13 |       11 |       11 |        9 |        6 |       0 |        8 |       13 |        7 |       10 |        8 |        2 |       0 |      0 |      1 |     51 |     97 |     44 |      9 |     24 |    297 |      0 |      0 |      0 |      6 |     12 |      6 |      0 |      4 |     53 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     20 |      6 |      2 |      8 |     56 |      0 |      1 | s03      | R    |
| 40070000 |    764 |    618 |     33 |     6 |    0 |    100 |    2 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    335 |    429 |       5 |       0 |       0 |       6 |     14 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      2 |      2 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |       13 |       32 |       35 |       34 |       55 |       39 |      48 |       25 |       54 |       47 |       62 |       59 |       38 |      77 |        0 |        3 |        3 |        1 |        2 |        2 |       8 |        1 |        3 |        2 |        2 |        0 |        1 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       20 |       17 |       10 |        4 |        3 |       1 |       11 |       12 |       15 |        8 |        3 |        3 |       1 |      0 |      5 |     49 |     81 |     51 |     17 |     32 |    383 |      0 |      0 |      0 |      4 |      6 |      2 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     20 |     21 |      5 |      1 |      7 |     55 |      0 |      1 | s03      | R    |
| 40080000 |    688 |    536 |     29 |     9 |    0 |     98 |    3 |    6 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    270 |    418 |      24 |       3 |       0 |      10 |      9 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      4 |      1 |      2 |      0 |      3 |       2 |       0 |       0 |       1 |      1 |      1 |      0 |      1 |       13 |       33 |       29 |       56 |       24 |       21 |      23 |       25 |       55 |       64 |       86 |       45 |       35 |      27 |        0 |        1 |        3 |        2 |        4 |        0 |       6 |        2 |        0 |        2 |        1 |        3 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       11 |       14 |       11 |        8 |        3 |       1 |        6 |       18 |       16 |       14 |        8 |        4 |       2 |      0 |      7 |     68 |     88 |     50 |     11 |     38 |    274 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |      3 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     30 |      6 |      5 |      2 |     59 |      0 |      1 | s03      | R    |
| 40090000 |    717 |    579 |     32 |    13 |    0 |     81 |    2 |    5 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    282 |    435 |      17 |       2 |       0 |       8 |      9 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |       15 |       24 |       43 |       42 |       32 |       26 |      29 |       21 |       66 |       65 |       71 |       49 |       63 |      33 |        2 |        2 |        5 |        3 |        3 |        0 |       6 |        1 |        1 |        1 |        2 |        3 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        9 |       16 |       12 |        6 |        2 |       2 |       11 |       13 |       10 |       10 |        8 |        3 |       1 |      0 |      4 |     82 |     62 |     46 |     18 |     30 |    337 |      0 |      0 |      0 |      6 |      5 |      1 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     24 |     23 |      5 |      2 |      2 |     50 |      0 |      1 | s03      | R    |
| 40100000 |    651 |    522 |     23 |     6 |    0 |     92 |    0 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    297 |    354 |      16 |       0 |       0 |       2 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      4 |      2 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      1 |        9 |       28 |       33 |       43 |       49 |       34 |      29 |       19 |       42 |       50 |       57 |       53 |       33 |      43 |        1 |        2 |        5 |        2 |        2 |        3 |       0 |        1 |        1 |        0 |        0 |        1 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       10 |       18 |        9 |        5 |        8 |       0 |        8 |       11 |       12 |        8 |        8 |        2 |       0 |      0 |      3 |     52 |     83 |     43 |     19 |     35 |    287 |      0 |      0 |      0 |      4 |      7 |      1 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     19 |      3 |      4 |      1 |     56 |      0 |      1 | s03      | R    |
| 40110000 |    683 |    544 |     23 |    11 |    0 |     97 |    3 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    296 |    387 |      20 |       1 |       0 |       1 |     13 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       1 |      3 |      0 |      0 |      1 |       21 |       35 |       39 |       49 |       40 |       18 |      22 |       19 |       65 |       56 |       84 |       47 |       16 |      33 |        0 |        5 |        2 |        3 |        1 |        1 |       0 |        2 |        0 |        2 |        4 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       16 |       17 |        9 |        4 |        2 |       0 |       11 |       22 |       12 |        5 |        3 |        2 |       1 |      0 |      4 |     58 |     86 |     45 |      8 |     29 |    314 |      0 |      0 |      0 |      4 |      5 |      1 |      1 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     20 |      4 |      0 |      2 |     68 |      0 |      1 | s03      | R    |
| 40120000 |    527 |    418 |     18 |     6 |    0 |     78 |    0 |    6 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    196 |    331 |      18 |       2 |       0 |       8 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       10 |       16 |       37 |       33 |       26 |        6 |      19 |       20 |       50 |       50 |       56 |       35 |       24 |      36 |        1 |        2 |        1 |        2 |        2 |        2 |       1 |        1 |        0 |        0 |        0 |        3 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        6 |       16 |        4 |        6 |        3 |       0 |        8 |       15 |        9 |       10 |        9 |        2 |       0 |      0 |      2 |     53 |     64 |     25 |     14 |     21 |    239 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     17 |      8 |      1 |      2 |     41 |      0 |      1 | s03      | R    |
| 40200001 |    234 |    171 |      1 |     5 |    0 |     51 |    1 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     80 |    154 |      11 |       0 |       0 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        2 |        7 |       14 |        8 |       11 |        9 |       4 |        8 |       34 |       29 |       24 |        8 |        8 |       5 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       10 |        3 |        2 |        1 |        2 |       0 |       10 |       10 |       11 |        4 |        2 |        1 |       0 |      0 |      3 |     33 |     21 |     11 |      1 |      7 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     13 |      0 |      0 |      0 |     34 |      0 |      1 | s03      | R    |
| 40200002 |     31 |     24 |      0 |     0 |    0 |      7 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |     24 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        2 |        3 |        0 |       0 |        1 |        4 |        7 |        3 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 40201000 |    186 |    137 |      6 |     4 |    0 |     35 |    0 |    4 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     65 |    121 |      15 |       1 |       0 |       7 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        4 |        8 |        9 |        7 |       10 |        7 |       4 |        7 |       20 |       24 |       23 |        9 |        3 |       2 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        4 |        3 |        4 |        2 |        0 |       0 |        6 |        9 |        8 |        3 |        1 |        1 |       0 |      0 |      2 |     25 |     22 |      6 |      3 |      5 |     74 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     11 |      1 |      0 |      1 |     20 |      0 |      1 | s03      | R    |
| 40210001 |    186 |    150 |      5 |     2 |    0 |     21 |    0 |    6 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     84 |    102 |      19 |       3 |       0 |       3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |       11 |       10 |       11 |       10 |       11 |       8 |        5 |       18 |       12 |       12 |       20 |       12 |       8 |        1 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |        2 |        1 |        2 |        2 |       0 |        1 |        4 |        5 |        2 |        0 |        1 |       1 |      0 |      2 |     13 |     35 |      2 |      1 |      5 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      8 |      0 |      0 |      0 |     19 |      0 |      1 | s03      | R    |
| 40210002 |    135 |     95 |     12 |     3 |    0 |     24 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     56 |     79 |       3 |       2 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |       11 |        6 |        3 |        3 |        4 |       3 |       11 |       12 |       16 |       11 |        5 |        3 |       3 |        0 |        4 |        0 |        1 |        0 |        0 |       1 |        0 |        4 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        8 |        6 |        0 |        0 |        0 |       0 |        6 |        4 |        2 |        0 |        0 |        0 |       0 |      0 |      3 |     12 |     27 |      3 |      1 |      2 |     47 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |     19 |      0 |      1 | s03      | R    |
| 40211001 |    119 |     84 |      7 |     6 |    0 |     20 |    1 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     47 |     72 |      17 |       1 |       0 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        4 |       14 |        6 |        2 |        2 |       3 |        2 |       10 |       14 |        9 |        5 |        6 |       6 |        0 |        0 |        2 |        0 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        3 |        1 |        2 |        0 |        0 |       0 |        4 |        5 |        5 |        3 |        0 |        1 |       0 |      0 |      0 |     19 |     16 |      8 |      0 |      0 |     41 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      8 |      3 |      0 |      0 |      0 |     15 |      0 |      1 | s03      | R    |
| 40211002 |     32 |     21 |      5 |     2 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     15 |     17 |       0 |       0 |       0 |       2 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        3 |        1 |        1 |        1 |        0 |       1 |        1 |        4 |        1 |        3 |        1 |        3 |       1 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |     16 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 41010000 |    633 |    503 |     24 |    10 |    0 |     88 |    0 |    6 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    255 |    378 |      60 |       5 |       0 |      12 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |       13 |       22 |       38 |       36 |       30 |       24 |      33 |       33 |       57 |       50 |       50 |       38 |       35 |      44 |        2 |        1 |        2 |        3 |        3 |        2 |       1 |        0 |        3 |        3 |        1 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       16 |       11 |        7 |        5 |        3 |       0 |       17 |       17 |       11 |       10 |        4 |        2 |       0 |      0 |      6 |     58 |     69 |     31 |      5 |     19 |    315 |      0 |      0 |      0 |      3 |      3 |      1 |      1 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     31 |      4 |      0 |      2 |     52 |      0 |      1 | s03      | R    |
| 41011001 |    413 |    312 |     15 |     9 |    0 |     65 |    1 |   10 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    170 |    243 |      47 |       6 |       0 |      18 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       1 |      3 |      0 |      0 |      1 |        6 |       24 |       35 |       22 |       18 |       13 |      11 |       18 |       45 |       32 |       38 |       21 |       12 |      17 |        0 |        0 |        3 |        1 |        0 |        1 |       0 |        2 |        1 |        2 |        1 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        7 |       13 |        7 |        3 |        1 |       0 |       11 |       12 |       10 |       10 |        4 |        3 |       0 |      0 |      5 |     49 |     52 |     14 |      7 |      8 |    177 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |     19 |      1 |      3 |      0 |     46 |      0 |      1 | s03      | R    |
| 41011002 |     74 |     57 |      3 |     4 |    0 |     10 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     24 |     50 |       6 |       2 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        7 |        3 |        1 |        2 |       0 |        3 |        7 |        6 |        8 |        8 |        6 |       4 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        0 |        0 |        2 |        1 |       0 |        2 |        3 |        1 |        0 |        1 |        0 |       0 |      0 |      2 |      9 |      6 |      5 |      0 |      2 |     33 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 41020000 |    692 |    497 |     27 |    25 |    0 |    131 |    1 |    8 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    267 |    425 |      59 |       6 |       0 |      28 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      4 |      1 |      0 |      0 |      0 |       1 |       3 |       0 |       5 |      3 |      0 |      0 |      0 |       16 |       33 |       34 |       32 |       38 |       27 |      12 |       29 |       60 |       61 |       65 |       32 |       37 |      21 |        5 |        0 |        5 |        3 |        0 |        0 |       2 |        0 |        3 |        4 |        3 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       19 |       12 |        8 |        6 |        3 |       2 |       27 |       30 |       18 |       22 |        8 |        1 |       2 |      0 |      9 |     64 |     89 |     25 |     14 |     12 |    284 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     24 |     34 |      3 |      0 |      0 |    101 |      0 |      1 | s03      | R    |
| 41030001 |    449 |    347 |     16 |    15 |    0 |     61 |    1 |    6 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    187 |    262 |      53 |       6 |       0 |      18 |     11 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |       10 |       22 |       27 |       29 |       15 |        9 |      26 |       17 |       48 |       37 |       42 |       25 |       17 |      23 |        2 |        1 |        0 |        1 |        2 |        3 |       1 |        1 |        0 |        1 |        0 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       12 |        8 |        7 |        2 |        3 |       0 |        8 |       13 |       11 |       10 |        3 |        1 |       1 |      0 |      3 |     49 |     43 |     27 |      7 |     15 |    203 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     15 |      3 |      1 |      0 |     49 |      0 |      1 | s03      | R    |
| 41030002 |     78 |     64 |      2 |     3 |    0 |      8 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     32 |     46 |      18 |       2 |       0 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        3 |        5 |        4 |        6 |        1 |       1 |        1 |        9 |        8 |        7 |        9 |        6 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        2 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |      5 |      9 |      7 |      3 |      2 |     38 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 41040001 |     16 |     10 |      0 |     1 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |     10 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        2 |        0 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        3 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 41040002 |    624 |    503 |     18 |    10 |    0 |     81 |    0 |    8 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    392 |      18 |       1 |       0 |       7 |      7 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |       21 |       25 |       37 |       29 |       19 |       25 |      22 |       23 |       45 |       81 |       63 |       62 |       27 |      24 |        1 |        0 |        0 |        3 |        1 |        3 |       1 |        5 |        0 |        1 |        0 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       15 |       12 |        9 |        2 |        3 |       0 |       15 |       17 |        9 |       12 |        2 |        2 |       1 |      0 |      4 |     65 |     78 |     34 |     15 |     22 |    285 |      0 |      0 |      0 |      3 |      1 |      1 |      3 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     23 |     26 |      4 |      0 |      0 |     47 |      0 |      1 | s03      | R    |
| 41050000 |    685 |    515 |     32 |    13 |    0 |    110 |    0 |   12 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    281 |    404 |      83 |      11 |       0 |      25 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      6 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      7 |      1 |      0 |      1 |       18 |       24 |       43 |       43 |       29 |       31 |      13 |       30 |       62 |       60 |       54 |       50 |       31 |      27 |        0 |        0 |        5 |        5 |        1 |        5 |       0 |        3 |        4 |        4 |        3 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       17 |       17 |        9 |        8 |        2 |       0 |       10 |       17 |       15 |       20 |       10 |        2 |       0 |      0 |      2 |     68 |     89 |     39 |      9 |     17 |    291 |      0 |      0 |      0 |      4 |      8 |      3 |      1 |      4 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     41 |      2 |      2 |      1 |     72 |      0 |      1 | s03      | R    |
| 41060000 |    707 |    584 |     18 |     4 |    0 |     87 |    2 |    6 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    286 |    421 |      30 |       1 |       0 |       4 |      8 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |     11 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      6 |      0 |      0 |      0 |       18 |       34 |       43 |       41 |       33 |       25 |      28 |       27 |       48 |       59 |       77 |       45 |       37 |      69 |        0 |        1 |        1 |        3 |        1 |        3 |       0 |        2 |        1 |        1 |        1 |        1 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       14 |        6 |       10 |        6 |        9 |       3 |        2 |        9 |       16 |        9 |        7 |        6 |       1 |      0 |      5 |     57 |     89 |     36 |      8 |     23 |    366 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     10 |      5 |      0 |      2 |     70 |      0 |      1 | s03      | R    |
| 41070001 |     13 |      6 |      1 |     0 |    0 |      5 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |     11 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        3 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 41070002 |    724 |    598 |     28 |    15 |    0 |     73 |    1 |    6 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    301 |    423 |      58 |       4 |       0 |      17 |      8 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |       2 |       1 |       0 |       1 |      2 |      0 |      0 |      1 |       17 |       42 |       46 |       39 |       35 |       32 |      22 |       26 |       60 |       75 |       75 |       58 |       32 |      39 |        2 |        2 |        3 |        2 |        1 |        3 |       1 |        2 |        3 |        4 |        3 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       14 |       11 |        7 |        9 |        6 |       1 |        6 |       14 |       13 |        3 |        5 |        3 |       0 |      0 |      7 |     69 |    103 |     53 |     18 |     31 |    317 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      2 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     15 |     19 |      3 |      1 |      2 |     53 |      0 |      1 | s03      | R    |
| 41500000 |    359 |    266 |     15 |     8 |    0 |     68 |    0 |    2 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    133 |    226 |      47 |       1 |       0 |      16 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |       10 |       11 |       17 |       22 |       13 |       13 |       4 |       17 |       32 |       37 |       39 |       21 |       15 |      15 |        1 |        2 |        3 |        1 |        0 |        1 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       11 |       10 |        6 |        1 |        2 |       0 |       11 |       13 |        4 |       12 |        1 |        1 |       1 |      0 |      7 |     31 |     33 |     17 |      6 |      9 |    163 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |     12 |      3 |      0 |      0 |     45 |      0 |      1 | s03      | R    |
| 41520000 |    648 |    511 |     19 |    14 |    0 |     97 |    0 |    5 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    416 |      79 |       4 |       0 |      19 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       2 |       0 |       5 |      1 |      2 |      0 |      2 |       21 |       27 |       43 |       33 |       21 |       17 |      15 |       30 |       72 |       57 |       61 |       35 |       51 |      28 |        2 |        3 |        2 |        3 |        2 |        1 |       0 |        1 |        3 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       10 |       10 |       10 |        4 |        1 |       0 |       17 |       18 |       14 |       13 |        5 |        9 |       0 |      0 |      7 |     81 |     85 |     27 |      9 |     19 |    283 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     27 |      2 |      0 |      0 |     67 |      0 |      1 | s03      | R    |
| 41530000 |    668 |    537 |     28 |    15 |    0 |     81 |    0 |    4 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    284 |    384 |      83 |       5 |       0 |      19 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       4 |       0 |       0 |      9 |      0 |      0 |      3 |        9 |       13 |       51 |       53 |       33 |       38 |      30 |       16 |       46 |       55 |       62 |       44 |       34 |      53 |        1 |        3 |        1 |        1 |        2 |        1 |       3 |        5 |        1 |        3 |        5 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        9 |       15 |        3 |        4 |        2 |       1 |        7 |       14 |       13 |       11 |        8 |        4 |       1 |      0 |      4 |     48 |     97 |     37 |      7 |     21 |    323 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     26 |      2 |      0 |      4 |     45 |      0 |      1 | s03      | R    |
| 41540000 |    404 |    307 |     21 |     7 |    0 |     63 |    1 |    3 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    177 |    227 |      57 |       5 |       0 |      26 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       2 |      1 |      0 |      0 |      0 |       13 |       16 |       23 |       31 |       13 |       17 |      23 |       17 |       26 |       34 |       30 |       19 |       22 |      23 |        1 |        0 |        2 |        5 |        1 |        2 |       0 |        2 |        3 |        0 |        0 |        3 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |       11 |        6 |        1 |        2 |       0 |        9 |       17 |        7 |       10 |        2 |        1 |       0 |      0 |      5 |     34 |     41 |     26 |      5 |     11 |    185 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      1 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     15 |      2 |      1 |      1 |     45 |      0 |      1 | s03      | R    |
| 41550000 |    488 |    374 |     29 |     7 |    0 |     67 |    3 |    6 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    205 |    283 |      22 |       4 |       0 |      11 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       5 |       5 |       0 |       3 |      2 |      1 |      0 |      1 |       13 |       22 |       33 |       20 |       20 |       18 |      26 |       19 |       29 |       49 |       36 |       22 |       18 |      49 |        1 |        1 |        5 |        3 |        0 |        0 |       3 |        2 |        4 |        4 |        2 |        1 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       12 |        7 |        6 |        5 |        1 |       1 |        6 |       11 |       15 |        5 |        5 |        2 |       1 |      0 |      1 |     34 |     58 |     21 |     10 |     23 |    227 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     22 |      3 |      1 |      0 |     46 |      0 |      1 | s03      | R    |
| 41551001 |     14 |      1 |      5 |     1 |    0 |      5 |    2 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     13 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 41551002 |    262 |    197 |      9 |     9 |    0 |     41 |    0 |    6 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    102 |    160 |      36 |       3 |       0 |       9 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |       13 |       14 |       15 |        9 |        8 |       5 |       14 |       18 |       23 |       22 |       16 |       20 |      14 |        0 |        1 |        1 |        2 |        0 |        0 |       1 |        1 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        8 |        5 |        4 |        4 |        0 |       1 |        6 |       16 |        4 |        2 |        0 |        1 |       0 |      0 |      0 |     29 |     34 |      8 |      5 |      7 |    114 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |     12 |      2 |      0 |      0 |     35 |      0 |      1 | s03      | R    |
| 41560000 |    528 |    394 |     23 |     6 |    0 |     88 |    2 |   10 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    214 |    314 |      38 |       3 |       0 |      16 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        9 |       20 |       30 |       26 |       11 |       33 |      18 |       18 |       36 |       48 |       42 |       22 |       34 |      47 |        2 |        1 |        3 |        3 |        0 |        1 |       3 |        1 |        2 |        3 |        2 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       16 |       11 |       11 |        3 |        0 |       2 |       11 |       16 |       15 |        8 |        4 |        2 |       1 |      0 |      2 |     39 |     61 |     27 |      4 |     17 |    244 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     23 |      1 |      1 |      0 |     64 |      0 |      1 | s03      | R    |
| 41570000 |    357 |    295 |      6 |     4 |    0 |     47 |    0 |    4 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    143 |    214 |      13 |       1 |       0 |       4 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        8 |       17 |       26 |       19 |       13 |       14 |      17 |       17 |       16 |       33 |       30 |       28 |       20 |      37 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        8 |        9 |        4 |        1 |        0 |       1 |        4 |        9 |        9 |        4 |        2 |        1 |       1 |      0 |      5 |     35 |     39 |     19 |      6 |     10 |    181 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     14 |      0 |      0 |      1 |     32 |      0 |      1 | s03      | R    |
| 41580000 |    658 |    523 |     20 |    14 |    0 |     86 |    1 |   12 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    241 |    417 |      36 |       3 |       0 |      18 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |       3 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |       17 |       32 |       35 |       38 |       17 |       23 |      25 |       35 |       48 |       73 |       64 |       31 |       36 |      49 |        3 |        1 |        0 |        2 |        0 |        3 |       2 |        2 |        1 |        0 |        1 |        0 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        9 |        7 |        8 |        5 |        3 |       0 |       15 |       20 |       17 |        6 |        7 |        6 |       1 |      0 |      4 |     55 |     83 |     38 |      9 |     19 |    315 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     27 |      3 |      1 |      1 |     62 |      0 |      1 | s03      | R    |
| 41590000 |    578 |    479 |     18 |     8 |    0 |     66 |    2 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    239 |    339 |      26 |       5 |       0 |      13 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |       16 |       24 |       34 |       38 |       18 |       20 |      37 |       23 |       38 |       46 |       66 |       28 |       29 |      62 |        0 |        1 |        2 |        2 |        1 |        4 |       1 |        1 |        3 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       12 |       11 |        6 |        3 |        5 |       2 |       11 |       10 |       10 |        7 |        1 |        1 |       0 |      0 |      5 |     50 |     68 |     31 |      9 |     22 |    294 |      0 |      0 |      0 |      6 |      5 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     18 |      2 |      0 |      1 |     43 |      0 |      1 | s03      | R    |
| 41600000 |    196 |    160 |     10 |     3 |    0 |     20 |    1 |    2 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     76 |    120 |       7 |       2 |       0 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        9 |       12 |        7 |        7 |       11 |      14 |        6 |       11 |       19 |       19 |       11 |       10 |      23 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        2 |        2 |        0 |        0 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        6 |        1 |        3 |        1 |        0 |       0 |        4 |        4 |        4 |        2 |        0 |        0 |       0 |      0 |      3 |     19 |     18 |     12 |      6 |      8 |     94 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      7 |      0 |      1 |      1 |     14 |      0 |      1 | s03      | R    |
| 42001000 |      1 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 42003001 |     77 |     52 |      6 |     1 |    0 |     17 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     37 |     40 |      36 |       1 |       0 |       9 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |       0 |       0 |       0 |       1 |      5 |      0 |      0 |      0 |        1 |        4 |        4 |        4 |        1 |        8 |       1 |        2 |        4 |        5 |        7 |        5 |        5 |       1 |        0 |        1 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        4 |        2 |        0 |        2 |        0 |       0 |        1 |        4 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |      9 |      2 |      0 |      5 |     31 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     15 |      0 |      1 | s03      | R    |
| 42005001 |    183 |    124 |     20 |     5 |    0 |     30 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     91 |     92 |      87 |      10 |       0 |      27 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      1 |        2 |       10 |       16 |       10 |        5 |       10 |       6 |        4 |       10 |       12 |       11 |        8 |       14 |       6 |        0 |        3 |        2 |        3 |        1 |        1 |       0 |        2 |        0 |        3 |        2 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        4 |        9 |        3 |        1 |        3 |       0 |        1 |        5 |        3 |        2 |        4 |        2 |       0 |      0 |      0 |     13 |     32 |     14 |      2 |      5 |     58 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     19 |      0 |      1 |      0 |     15 |      0 |      1 | s03      | R    |
| 42005002 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 42020001 |    230 |    145 |     37 |     5 |    0 |     38 |    2 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    108 |    122 |      39 |      10 |       0 |      16 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      2 |      2 |      0 |      1 |       3 |       1 |       0 |       1 |      6 |      2 |      0 |      3 |        4 |       12 |       15 |        9 |        6 |        7 |       9 |        5 |       17 |       20 |       16 |        4 |        8 |      13 |        0 |        4 |        5 |        4 |        4 |        1 |       2 |        3 |        2 |        3 |        2 |        4 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        8 |        4 |        5 |        0 |       1 |        4 |        7 |        5 |        4 |        1 |        1 |       0 |      0 |      0 |     20 |     23 |      2 |      2 |      1 |     97 |      0 |      0 |      0 |      3 |      6 |      4 |      0 |      3 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      9 |      0 |      0 |      1 |     30 |      0 |      1 | s03      | R    |
| 42020002 |     21 |     14 |      1 |     1 |    0 |      4 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |     10 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        4 |        3 |       0 |        0 |        0 |        1 |        1 |        2 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      1 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 42020003 |    234 |    145 |     32 |     3 |    0 |     49 |    1 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     93 |    141 |      63 |       7 |       0 |      29 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       1 |      3 |      4 |      0 |      2 |        5 |        9 |       14 |       13 |        5 |        7 |       2 |        8 |       21 |       22 |       18 |       10 |        7 |       4 |        1 |        3 |        3 |        4 |        2 |        2 |       0 |        2 |        0 |        6 |        5 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        8 |        7 |        3 |        3 |        1 |       0 |        7 |        9 |        8 |        6 |        3 |        1 |       0 |      0 |      0 |     26 |     29 |      6 |      1 |      5 |     78 |      0 |      0 |      0 |      6 |      8 |      1 |      1 |      2 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      7 |      1 |      0 |      1 |     38 |      0 |      1 | s03      | R    |
| 42021001 |    196 |    125 |     35 |     4 |    0 |     29 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     88 |    108 |      39 |      15 |       0 |      13 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      4 |      0 |      0 |      1 |        4 |        9 |       14 |       11 |        5 |        3 |       4 |        6 |       14 |       17 |       17 |        4 |       10 |       7 |        2 |        6 |        2 |        4 |        4 |        2 |       0 |        1 |        3 |        3 |        1 |        3 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        3 |        3 |        4 |        2 |       1 |        6 |        2 |        3 |        5 |        1 |        1 |       0 |      0 |      2 |      8 |     32 |      6 |      5 |      3 |     69 |      0 |      0 |      0 |      1 |      9 |      4 |      1 |      3 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      6 |      1 |      1 |      0 |     20 |      0 |      1 | s03      | R    |
| 42021003 |    295 |    205 |     40 |     3 |    0 |     41 |    1 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    151 |    144 |      87 |       9 |       0 |      14 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      7 |      1 |      0 |      8 |        3 |       13 |       19 |       18 |       13 |       17 |      17 |        5 |       13 |       17 |       25 |       13 |       18 |      14 |        0 |        1 |        7 |        3 |        5 |        4 |       1 |        0 |        1 |        2 |        7 |        2 |        1 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        7 |        9 |        5 |        1 |        3 |       1 |        2 |        4 |        8 |        2 |        2 |        1 |       1 |      0 |      3 |     19 |     23 |     24 |      4 |     11 |    121 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      3 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      8 |      7 |      1 |      1 |     28 |      0 |      1 | s03      | R    |
| 42030000 |    165 |     95 |     44 |     6 |    0 |     20 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     68 |     97 |      11 |       2 |       0 |       2 |      2 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |       1 |       0 |       0 |       0 |      5 |      1 |      0 |      0 |        0 |        3 |        5 |       11 |        8 |        8 |       0 |        2 |       10 |        8 |       14 |       20 |        6 |       0 |        1 |        1 |        4 |        3 |        8 |        3 |       0 |        0 |        3 |        4 |        1 |       10 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        3 |        0 |        4 |        1 |       1 |        0 |        3 |        2 |        6 |        2 |        0 |       0 |      0 |      0 |      9 |     17 |      8 |      5 |      5 |     51 |      0 |      0 |      0 |      0 |      7 |      5 |      1 |      3 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      1 |      1 |      1 |      1 |     17 |      0 |      1 | s03      | R    |
| 42031002 |     22 |     10 |      7 |     0 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     15 |      7 |       1 |       0 |       0 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |        1 |        1 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        5 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 42031003 |     18 |      7 |      3 |     1 |    0 |      6 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |      6 |       3 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        3 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 42042002 |      2 |      2 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      2 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 42050001 |      1 |      0 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 42050002 |    460 |    261 |     97 |     7 |    0 |     89 |    2 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    224 |    236 |      68 |      13 |       0 |      14 |      7 |      2 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      9 |      7 |      0 |      4 |      8 |      6 |      0 |      6 |      10 |       4 |       0 |       6 |     16 |      8 |      0 |     10 |        6 |       12 |       25 |       27 |       16 |       20 |       9 |       15 |       14 |       26 |       38 |       20 |       22 |      11 |        1 |        7 |       10 |       13 |       11 |        7 |       2 |        1 |        3 |       10 |        9 |        8 |        9 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       15 |       13 |       12 |        7 |        6 |       0 |        7 |        6 |        8 |       13 |        4 |        6 |       0 |      0 |      0 |     26 |     52 |     38 |      5 |      8 |    132 |      0 |      0 |      2 |     11 |     20 |     18 |      4 |      9 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     16 |     25 |      7 |      3 |      0 |     48 |      0 |      1 | s03      | R    |
| 42050003 |    275 |    160 |     31 |     5 |    0 |     72 |    2 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    129 |    146 |      25 |       3 |       0 |       9 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      4 |      1 |      0 |      2 |       3 |       0 |       0 |       0 |      2 |      1 |      0 |      5 |        6 |       17 |       21 |       10 |        8 |        7 |       1 |       13 |       28 |       23 |       13 |        8 |        4 |       1 |        3 |        3 |        4 |        5 |        3 |        0 |       0 |        2 |        4 |        5 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       17 |       11 |        2 |        4 |        1 |       0 |        9 |       16 |       10 |        4 |        3 |        1 |       0 |      0 |      1 |     17 |     18 |      4 |      0 |      3 |    117 |      0 |      0 |      1 |      3 |      5 |      1 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |      7 |      3 |      0 |      0 |     64 |      0 |      1 | s03      | R    |
| 42050004 |     11 |      4 |      3 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      7 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       1 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 42060001 |      1 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 42060003 |    800 |    381 |    229 |    11 |    0 |    168 |    4 |    3 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    356 |    444 |      68 |      34 |       0 |      32 |      6 |      8 |      0 |      3 |      5 |      3 |      0 |      8 |      4 |      0 |      0 |      0 |     22 |     18 |      0 |     27 |     11 |      7 |      0 |      2 |       2 |       7 |       0 |       8 |     32 |     19 |      0 |     20 |       14 |       14 |       13 |       17 |       37 |       55 |       5 |       10 |       11 |       13 |       26 |       39 |      120 |       7 |        5 |       11 |       11 |       18 |       23 |       32 |       7 |        4 |        8 |        6 |       22 |       25 |       47 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       20 |       12 |       13 |       24 |       18 |       0 |        7 |       14 |        6 |       21 |       23 |       24 |       1 |      0 |      4 |     27 |     67 |     36 |     20 |     21 |    206 |      0 |      0 |      0 |     14 |     37 |     17 |     14 |     20 |    127 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     28 |     14 |      3 |     11 |    111 |      0 |      1 | s03      | R    |
| 42070001 |    804 |    491 |    145 |    14 |    0 |    144 |    7 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    402 |    402 |     149 |      20 |       0 |      55 |      6 |      5 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      7 |      6 |      2 |      0 |      0 |       4 |       2 |       0 |       4 |     11 |      3 |      0 |      4 |       13 |       26 |       41 |       42 |       32 |       37 |      42 |       15 |       34 |       39 |       50 |       34 |       32 |      54 |        6 |        9 |       14 |       19 |        7 |       13 |      12 |        2 |        6 |       10 |       12 |        8 |        9 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       18 |       16 |       21 |       12 |        5 |       2 |       10 |       15 |       18 |       20 |       10 |        5 |       1 |      0 |      6 |     41 |     90 |     40 |      8 |     28 |    278 |      0 |      0 |      1 |      6 |     28 |     15 |      2 |      8 |     85 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     28 |     11 |      4 |      6 |    100 |      0 |      1 | s03      | R    |
| 42080000 |    240 |    153 |     30 |     5 |    0 |     48 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    116 |    124 |      84 |      10 |       0 |      32 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |       1 |       0 |       0 |       4 |      7 |      2 |      0 |      0 |        6 |       10 |       13 |       13 |        6 |        9 |       7 |       11 |       14 |       16 |       13 |        8 |        8 |      19 |        1 |        3 |        5 |        4 |        2 |        0 |       2 |        1 |        2 |        2 |        5 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        9 |        3 |        8 |        4 |        2 |       1 |        3 |        6 |        2 |        5 |        2 |        4 |       0 |      0 |      0 |     15 |     26 |     16 |      3 |      7 |     86 |      0 |      0 |      0 |      2 |      8 |      1 |      1 |      2 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     15 |      1 |      1 |      0 |     35 |      0 |      1 | s03      | R    |
| 42090001 |    435 |    287 |     63 |    10 |    0 |     67 |    1 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    185 |    250 |     119 |      12 |       0 |      20 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |       1 |       1 |       0 |       2 |      5 |      3 |      0 |      0 |       11 |       10 |       24 |       25 |       20 |       16 |       8 |       11 |       26 |       30 |       24 |       26 |       35 |      21 |        0 |        3 |        4 |        6 |        4 |        4 |       5 |        2 |        2 |       11 |        7 |        5 |        4 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       15 |       11 |       10 |        5 |        2 |       0 |        5 |        8 |       12 |        6 |        7 |        2 |       0 |      0 |      1 |     22 |     47 |     20 |      8 |     17 |    172 |      0 |      0 |      1 |      7 |      9 |      4 |      5 |      3 |     34 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |     17 |      8 |      1 |      3 |     45 |      0 |      1 | s03      | R    |
| 42090002 |     76 |     36 |     13 |     2 |    0 |     23 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     34 |     42 |       5 |       3 |       0 |       5 |      2 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |        1 |        2 |        0 |        1 |       0 |        3 |        9 |        3 |        9 |        1 |        1 |       0 |        0 |        5 |        2 |        0 |        0 |        0 |       0 |        1 |        4 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |       10 |        1 |        5 |        1 |        0 |       0 |        1 |        3 |        5 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      1 |      3 |      0 |      0 |     30 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     26 |      0 |      1 | s03      | R    |
| 42100001 |     67 |     37 |     14 |     2 |    0 |     13 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     30 |     37 |       9 |       1 |       0 |       5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      1 |      1 |      0 |      2 |        0 |        1 |        5 |        2 |        3 |        4 |       2 |        1 |        2 |        4 |        2 |        0 |        4 |       7 |        0 |        2 |        0 |        1 |        2 |        0 |       1 |        1 |        1 |        0 |        1 |        2 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        2 |        2 |        1 |        0 |       0 |        2 |        2 |        1 |        4 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      4 |      1 |      0 |     26 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      9 |      0 |      1 | s03      | R    |
| 42100002 |    349 |    191 |     68 |    15 |    0 |     70 |    1 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    170 |    179 |      46 |      12 |       0 |      20 |      7 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      7 |      0 |      0 |      5 |      8 |      1 |      0 |      1 |       2 |       2 |       0 |       6 |      6 |      5 |      0 |      6 |        5 |       11 |        8 |       19 |       11 |       10 |      16 |        7 |       17 |       18 |       17 |       16 |       14 |      22 |        1 |        4 |        6 |        8 |        3 |        6 |       5 |        2 |        2 |        3 |        9 |        4 |       10 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       15 |       11 |       12 |        7 |        5 |       2 |        3 |        5 |       10 |        6 |        5 |        3 |       1 |      0 |      3 |     14 |     24 |     16 |      2 |      4 |    128 |      0 |      0 |      0 |      6 |     10 |      7 |      2 |      5 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |     12 |     11 |      3 |      6 |     50 |      0 |      1 | s03      | R    |
| 42100003 |     27 |     18 |      3 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |     16 |       1 |       2 |       0 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        2 |        2 |        1 |        0 |        0 |       2 |        1 |        1 |        4 |        2 |        1 |        0 |       2 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 42110001 |    303 |    192 |     59 |     2 |    0 |     43 |    5 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    143 |    160 |      21 |       5 |       0 |      13 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |     10 |      1 |      0 |      6 |        8 |        7 |        8 |       21 |        8 |       10 |      15 |        4 |       22 |       14 |       19 |       11 |       22 |      23 |        0 |        2 |        7 |       10 |        7 |        8 |       4 |        1 |        1 |        6 |        5 |        1 |        1 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        9 |        6 |        3 |        2 |       1 |        4 |        5 |        6 |        2 |        2 |        4 |       1 |      0 |      0 |     20 |     25 |     11 |      8 |     15 |    113 |      0 |      0 |      0 |      2 |     11 |      4 |      1 |      3 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      7 |      2 |      0 |      2 |     32 |      0 |      1 | s03      | R    |
| 42110002 |    460 |    278 |     66 |    11 |    0 |     97 |    0 |    4 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    211 |    249 |      62 |      12 |       0 |      21 |      4 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      7 |      4 |      0 |     13 |      4 |      6 |      0 |      0 |       0 |       2 |       0 |       2 |      7 |      1 |      0 |      3 |       10 |        6 |       30 |       27 |       16 |       14 |      12 |       11 |       36 |       38 |       36 |       18 |       11 |      13 |        1 |       11 |        9 |        3 |        5 |        6 |       4 |        4 |        5 |        4 |        6 |        3 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       15 |       10 |       13 |        8 |        3 |       1 |       13 |       16 |       15 |       11 |        1 |        3 |       0 |      0 |      3 |     31 |     49 |     31 |      4 |      9 |    151 |      0 |      0 |      0 |      6 |     12 |      6 |      1 |      2 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     13 |      5 |      2 |      1 |     78 |      0 |      1 | s03      | R    |
| 42110003 |      7 |      4 |      1 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      5 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 42120001 |    150 |     84 |     41 |     1 |    0 |     24 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     64 |     86 |      29 |       5 |       0 |       7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       1 |       4 |       0 |       0 |      2 |      0 |      0 |      1 |        0 |        3 |        9 |        6 |        3 |        7 |       3 |        4 |       12 |        6 |        9 |       10 |        7 |       5 |        2 |        2 |        6 |        3 |        3 |        2 |       3 |        3 |        5 |        2 |        3 |        2 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        6 |        2 |        0 |        0 |       0 |        1 |        2 |        5 |        4 |        0 |        0 |       1 |      0 |      2 |      5 |     11 |     10 |      2 |      4 |     50 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      3 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      3 |      1 |      3 |     12 |      0 |      1 | s03      | R    |
| 42120002 |    446 |    275 |     84 |    10 |    0 |     67 |    3 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    214 |    232 |      72 |       6 |       0 |      17 |      7 |      4 |      0 |      5 |      2 |      0 |      0 |      1 |      7 |      2 |      0 |      0 |      2 |      2 |      0 |      3 |      5 |      1 |      0 |      3 |       8 |       1 |       0 |       6 |      5 |      1 |      0 |      1 |        6 |       18 |       24 |       30 |       10 |       14 |      20 |       12 |       22 |       30 |       25 |       16 |       25 |      23 |        3 |        6 |        6 |        8 |        4 |        7 |      10 |        4 |        5 |        6 |        7 |        3 |        6 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       11 |        9 |        9 |        7 |        2 |       3 |        5 |       12 |        6 |        6 |        3 |        4 |       3 |      0 |      1 |     35 |     41 |     27 |     11 |     17 |    143 |      0 |      0 |      0 |      1 |     12 |      4 |      6 |      3 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     20 |      3 |      2 |      1 |     43 |      0 |      1 | s03      | R    |
| 42130001 |     27 |     18 |      5 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |     15 |       5 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        3 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        5 |        2 |        1 |        2 |       1 |        0 |        2 |        0 |        0 |        0 |        0 |       1 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      6 |      0 |      3 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 42130002 |    640 |    398 |    107 |    15 |    0 |    110 |    4 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    311 |    329 |     142 |      11 |       0 |      44 |      4 |      3 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      6 |      6 |      1 |      0 |      1 |       1 |       0 |       0 |       0 |     17 |      9 |      0 |      4 |        8 |       28 |       42 |       35 |       18 |       16 |      30 |       14 |       33 |       36 |       45 |       20 |       27 |      46 |        1 |        6 |       21 |        8 |        9 |        6 |       7 |        0 |        7 |       11 |        9 |        7 |        7 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       20 |       20 |       16 |        4 |        6 |       2 |        8 |       12 |       17 |       14 |        5 |        3 |       0 |      0 |      2 |     45 |     77 |     32 |     10 |     15 |    217 |      0 |      0 |      0 |      4 |     25 |      5 |      4 |      7 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     31 |     29 |      9 |      1 |      2 |     60 |      0 |      1 | s03      | R    |
| 42140001 |     62 |     49 |      2 |     0 |    0 |     11 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     29 |     33 |      20 |       2 |       0 |       4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        1 |        7 |        1 |        2 |       6 |        2 |        1 |        6 |        2 |        3 |        7 |       6 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        2 |        0 |       0 |        2 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      9 |      4 |      1 |      1 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 42140002 |      7 |      3 |      2 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      3 |       3 |       2 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 42140003 |    456 |    307 |     67 |    10 |    0 |     69 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    210 |    246 |     107 |       8 |       0 |      25 |      5 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      1 |      0 |     10 |      2 |      1 |      0 |      1 |       0 |       5 |       0 |       2 |     13 |      0 |      0 |      8 |        8 |       16 |       26 |       33 |       16 |       14 |      25 |       16 |       21 |       37 |       24 |       21 |       15 |      35 |        3 |        3 |        6 |        7 |        5 |        2 |       3 |        4 |        2 |       13 |        5 |        2 |        6 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        8 |       14 |        4 |        5 |        5 |       0 |        6 |        7 |       11 |        9 |        5 |        1 |       0 |      0 |      1 |     32 |     52 |     30 |      6 |     12 |    174 |      0 |      0 |      0 |      4 |      6 |      8 |      1 |      2 |     46 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     19 |      6 |      0 |      1 |     41 |      0 |      1 | s03      | R    |
| 42150001 |    403 |    254 |     44 |    18 |    0 |     79 |    5 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    184 |    219 |      79 |      13 |       0 |      34 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |     18 |      1 |      0 |      4 |       4 |       1 |       0 |       3 |      5 |      2 |      0 |      3 |        9 |       17 |       25 |       29 |       12 |       13 |       3 |       25 |       27 |       35 |       37 |       14 |        7 |       1 |        3 |        5 |        3 |        4 |        1 |        2 |       0 |        2 |        9 |        4 |        6 |        3 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       21 |       10 |       12 |        6 |        0 |       0 |       14 |        7 |       11 |        8 |        3 |        3 |       1 |      0 |      3 |     36 |     52 |     12 |      3 |      9 |    139 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      2 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     15 |      4 |      2 |      0 |     68 |      0 |      1 | s03      | R    |
| 42150002 |     26 |     12 |      4 |     2 |    0 |      8 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     10 |       9 |       1 |       0 |       1 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        5 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        1 |        1 |        0 |       0 |        0 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 42150003 |     26 |     17 |      5 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     13 |     13 |       4 |       2 |       0 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       4 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        3 |        2 |        2 |        1 |       1 |        0 |        1 |        1 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      9 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 42151001 |    229 |    149 |     35 |     3 |    0 |     41 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     96 |    133 |      46 |       2 |       0 |       7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      5 |      2 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      3 |      0 |      1 |        2 |        8 |        6 |        7 |       13 |       11 |       5 |        5 |       15 |       17 |       21 |       11 |       17 |      11 |        1 |        1 |        2 |        4 |        3 |        6 |       2 |        1 |        2 |        5 |        2 |        2 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        5 |        5 |        4 |        2 |       1 |        2 |        4 |        3 |        3 |        4 |        4 |       0 |      0 |      1 |     14 |     24 |      6 |      1 |     10 |     93 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      3 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |     10 |      3 |      0 |      1 |     21 |      0 |      1 | s03      | R    |
| 42151002 |    205 |    138 |     18 |     7 |    0 |     40 |    1 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     78 |    127 |      50 |       4 |       0 |      17 |      5 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      1 |       1 |       1 |       0 |       5 |      6 |      1 |      0 |      1 |        3 |       11 |       11 |       12 |        7 |        6 |       0 |        9 |       27 |       13 |       20 |       10 |        9 |       0 |        0 |        3 |        2 |        1 |        0 |        0 |       0 |        2 |        2 |        2 |        2 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        4 |        5 |        5 |        1 |        0 |       0 |        3 |       11 |        5 |        5 |        2 |        1 |       0 |      0 |      2 |     13 |     27 |      3 |      3 |      5 |     85 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      6 |      2 |      0 |      0 |     36 |      0 |      1 | s03      | R    |
| 42160001 |    433 |    263 |     82 |     8 |    0 |     77 |    0 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    181 |    252 |      74 |       7 |       0 |      31 |      4 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |      7 |      0 |      0 |      2 |       3 |       5 |       0 |       4 |     10 |      0 |      0 |      3 |        9 |       13 |       15 |       18 |       11 |       17 |      16 |        8 |       27 |       27 |       37 |       13 |       29 |      23 |        3 |        2 |        8 |        7 |        9 |        4 |       5 |        3 |        2 |       12 |        7 |        4 |        7 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       10 |       10 |        8 |        5 |        3 |       0 |        7 |       10 |        9 |        7 |        5 |        4 |       2 |      0 |      0 |     28 |     44 |     14 |      7 |     13 |    157 |      0 |      0 |      0 |      5 |     15 |      8 |      0 |      6 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     11 |     14 |      3 |      2 |      1 |     53 |      0 |      1 | s03      | R    |
| 42160002 |     52 |     31 |      6 |     1 |    0 |     14 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     23 |     29 |      16 |       2 |       0 |       6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |        2 |        2 |        2 |        3 |        1 |       0 |        1 |        3 |        4 |        6 |        1 |        3 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        1 |        0 |        2 |        0 |       0 |        3 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      7 |      1 |      1 |      2 |     17 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 42170001 |    286 |    178 |     43 |     3 |    0 |     57 |    2 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    126 |    160 |      58 |      10 |       0 |      17 |      1 |      2 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      4 |      0 |      0 |      2 |       0 |       3 |       0 |       5 |      3 |      1 |      0 |      1 |        0 |        8 |       16 |       18 |        6 |       13 |      12 |        7 |        9 |       23 |       12 |       13 |       17 |      24 |        3 |        3 |        4 |        4 |        2 |        3 |       3 |        1 |        0 |        4 |        7 |        2 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        8 |        9 |        4 |        3 |        3 |       1 |        8 |        7 |        6 |        7 |        4 |        2 |       0 |      0 |      4 |     11 |     29 |     10 |      5 |      7 |    112 |      0 |      0 |      0 |      3 |     12 |      0 |      1 |      1 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      7 |     10 |      3 |      0 |      3 |     40 |      0 |      1 | s03      | R    |
| 42170002 |    277 |    181 |     47 |     1 |    0 |     47 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    127 |    150 |      49 |       7 |       0 |       7 |      3 |      5 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      7 |      0 |      0 |      2 |      5 |      1 |      0 |      4 |       0 |       0 |       0 |       0 |      7 |      7 |      0 |      4 |        2 |        6 |       11 |       18 |        7 |       16 |      16 |        8 |        8 |       18 |       23 |       11 |       11 |      26 |        0 |        1 |        4 |        4 |        6 |        4 |       5 |        1 |        1 |        3 |        5 |        3 |        5 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        6 |        7 |        4 |        4 |        2 |       1 |        4 |        3 |        5 |        6 |        1 |        3 |       0 |      0 |      2 |     13 |     26 |     15 |      4 |      5 |    116 |      0 |      0 |      1 |      6 |      7 |      4 |      1 |      2 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      9 |      2 |      1 |      1 |     24 |      0 |      1 | s03      | R    |
| 42180000 |    586 |    367 |     96 |    14 |    0 |     98 |    2 |    6 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    267 |    319 |     112 |      19 |       0 |      34 |      5 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      0 |      0 |      6 |     12 |      2 |      0 |      2 |       0 |       5 |       0 |       5 |     16 |      1 |      0 |      9 |       12 |       21 |       27 |       24 |       17 |       31 |      23 |       17 |       30 |       34 |       30 |       23 |       49 |      29 |        5 |        5 |       10 |       10 |        8 |       12 |       3 |        0 |        5 |        7 |        6 |        7 |       11 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        8 |       10 |       12 |       10 |        7 |       1 |        3 |       13 |       10 |       16 |        4 |       17 |       1 |      0 |      2 |     26 |     60 |     34 |      7 |     19 |    219 |      0 |      0 |      2 |      8 |     12 |      6 |      1 |      4 |     63 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     18 |     27 |      7 |      1 |      4 |     64 |      0 |      1 | s03      | R    |
| 42190000 |    507 |    301 |     46 |    27 |    0 |    124 |    2 |    3 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    270 |      97 |       9 |       0 |      42 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      4 |      8 |      2 |      0 |      8 |      10 |       3 |       0 |      19 |      9 |      0 |      0 |      4 |       11 |       17 |       37 |       28 |       17 |       11 |       4 |       24 |       22 |       51 |       36 |       24 |       16 |       3 |        1 |        7 |        2 |        7 |        3 |        2 |       0 |        3 |        9 |        5 |        4 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       23 |       18 |       17 |        9 |        9 |       1 |        8 |       23 |       21 |        9 |        5 |        3 |       1 |      0 |      4 |     39 |     53 |     17 |      4 |      7 |    177 |      0 |      0 |      2 |      7 |      5 |      2 |      0 |      1 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     30 |     33 |      4 |      3 |      1 |     83 |      0 |      1 | s03      | R    |
| 42191000 |    526 |    325 |     59 |    20 |    0 |    114 |    1 |    3 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    258 |    268 |      96 |       8 |       0 |      28 |      6 |      4 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      5 |     14 |      5 |      0 |      7 |       1 |       1 |       0 |      10 |     26 |      5 |      0 |      5 |       12 |       21 |       31 |       28 |       22 |       35 |       6 |       17 |       30 |       39 |       33 |       29 |       15 |       7 |        2 |        5 |        4 |        4 |        5 |       10 |       0 |        3 |        4 |        7 |        5 |        4 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       15 |       18 |       10 |        4 |       10 |       1 |       16 |       16 |       17 |        9 |        6 |        5 |       0 |      0 |      2 |     35 |     91 |     16 |      1 |     11 |    169 |      0 |      0 |      0 |      6 |      6 |      7 |      1 |      2 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     22 |      2 |      0 |      3 |     88 |      0 |      1 | s03      | R    |
| 42200000 |    846 |    451 |    213 |     9 |    0 |    159 |   10 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    392 |    454 |     118 |      29 |       0 |      34 |      8 |     14 |      0 |      6 |      1 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |     13 |      7 |      0 |     12 |      2 |      1 |      0 |      4 |       5 |       0 |       0 |       2 |     16 |      8 |      0 |     17 |        6 |       21 |       37 |       40 |       25 |       26 |      26 |       18 |       29 |       57 |       55 |       44 |       32 |      35 |        5 |        8 |       30 |       18 |       16 |       16 |      17 |        4 |        9 |       16 |       18 |       17 |       20 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       17 |       24 |       19 |       11 |        8 |       5 |       11 |       12 |       23 |       20 |        7 |        6 |       2 |      0 |      1 |     35 |     87 |     44 |     13 |     14 |    257 |      0 |      0 |      4 |      7 |     41 |     20 |      6 |      8 |    127 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     32 |     10 |      5 |      2 |    113 |      0 |      1 | s03      | R    |
| 42210000 |    627 |    370 |    125 |    16 |    0 |    111 |    2 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    279 |    348 |      77 |      13 |       0 |      26 |     17 |      6 |      0 |      0 |      0 |      1 |      0 |      3 |      2 |      2 |      0 |      1 |      5 |      1 |      0 |     10 |     11 |      1 |      0 |      6 |      13 |       6 |       0 |       5 |     13 |      7 |      0 |      5 |       10 |       17 |       30 |       37 |       21 |       22 |      12 |       16 |       26 |       35 |       50 |       29 |       30 |      35 |        2 |        6 |       13 |       15 |       10 |        9 |       6 |        0 |        9 |       11 |       14 |        6 |       14 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        9 |       13 |       18 |        4 |       14 |       1 |       11 |       12 |       16 |       13 |        7 |        3 |       1 |      0 |      5 |     40 |     60 |     29 |      7 |      5 |    224 |      0 |      0 |      0 |      9 |     21 |     16 |      6 |      6 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     24 |     23 |      6 |      1 |      5 |     70 |      0 |      1 | s03      | R    |
| 42211000 |    554 |    341 |     99 |    12 |    0 |     97 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    275 |    279 |      71 |      20 |       0 |      13 |     10 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      2 |      0 |      4 |      8 |      0 |      0 |      1 |       1 |       5 |       0 |       5 |     16 |      3 |      0 |      2 |       10 |       31 |       29 |       31 |       19 |       21 |      12 |       14 |       32 |       27 |       37 |       28 |       30 |      20 |        3 |        7 |       13 |       10 |        3 |        6 |       3 |        1 |        7 |       13 |       18 |        2 |       11 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       13 |       20 |       24 |       11 |        5 |       0 |        5 |       11 |        9 |        4 |        4 |        4 |       0 |      0 |      1 |     39 |     43 |     25 |     14 |     15 |    204 |      0 |      0 |      1 |      5 |     18 |      5 |      3 |      6 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     26 |     12 |      3 |      4 |     60 |      0 |      1 | s03      | R    |
| 42220001 |    401 |    227 |     88 |     4 |    0 |     81 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    177 |    224 |      54 |      12 |       0 |      25 |      8 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |     11 |      3 |      0 |      3 |       1 |       1 |       0 |       3 |     11 |     10 |      0 |      7 |        9 |       14 |       13 |       24 |       14 |       13 |      11 |        8 |       16 |       24 |       31 |       18 |       18 |      14 |        1 |        8 |        6 |        5 |        7 |        6 |       4 |        4 |        8 |        9 |       10 |        5 |        9 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       10 |        8 |        8 |        4 |        3 |       3 |        7 |       10 |       11 |       10 |        3 |        0 |       3 |      0 |      0 |     25 |     23 |     19 |      7 |      9 |    144 |      0 |      0 |      0 |      3 |     17 |      2 |      3 |      8 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     16 |      3 |      2 |      0 |     52 |      0 |      1 | s03      | R    |
| 42221000 |    490 |    297 |     73 |    15 |    0 |     97 |    2 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    227 |    263 |      76 |      16 |       0 |      24 |      2 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     26 |      1 |      0 |      5 |       0 |       1 |       0 |       1 |     14 |      7 |      0 |     10 |        6 |       13 |       24 |       32 |       29 |       18 |       8 |       23 |       28 |       26 |       41 |       24 |       14 |      11 |        1 |        7 |        8 |       13 |        3 |        5 |       4 |        1 |        1 |        2 |        6 |        4 |        8 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       12 |       12 |       13 |        6 |        8 |       0 |       11 |       20 |       10 |        9 |        7 |        6 |       1 |      0 |      0 |     19 |     48 |     30 |      6 |      9 |    185 |      0 |      0 |      0 |      4 |     11 |      5 |      5 |      3 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     28 |      4 |      2 |      9 |     55 |      0 |      1 | s03      | R    |
| 42230000 |    621 |    383 |    103 |    14 |    0 |    115 |    5 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    274 |    347 |      95 |      33 |       0 |      34 |      5 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |     20 |      0 |      0 |     12 |       0 |       3 |       0 |       4 |     17 |      5 |      0 |      9 |       15 |       21 |       34 |       28 |       18 |       17 |      24 |       22 |       29 |       47 |       48 |       28 |       23 |      29 |        3 |        8 |       13 |        7 |        9 |        7 |       6 |        2 |        5 |       11 |        6 |        7 |        9 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       15 |       14 |       18 |        5 |        4 |       4 |       15 |       17 |       16 |       11 |        6 |        4 |       2 |      0 |      1 |     28 |     69 |     37 |      4 |     18 |    226 |      0 |      0 |      2 |     11 |     19 |      6 |      5 |      7 |     53 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     24 |     17 |      4 |      2 |      2 |     85 |      0 |      1 | s03      | R    |
| 42240000 |    516 |    303 |     96 |    14 |    0 |    102 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    212 |    304 |      84 |      19 |       0 |      38 |      7 |      8 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      2 |     13 |      0 |      0 |      3 |       3 |       1 |       0 |       4 |     19 |      7 |      0 |      6 |        8 |       14 |       18 |       22 |       17 |       20 |      13 |       16 |       27 |       38 |       26 |       35 |       25 |      24 |        4 |        3 |        4 |       11 |        7 |        8 |       9 |        2 |        2 |        7 |       12 |        7 |       11 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       10 |       14 |       10 |        7 |        4 |       1 |       11 |       12 |       17 |       13 |        6 |        4 |       0 |      0 |      2 |     24 |     39 |     24 |      7 |     10 |    197 |      0 |      0 |      0 |      6 |     17 |     12 |      4 |      6 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     24 |     10 |      2 |      5 |     61 |      0 |      1 | s03      | R    |
| 42250000 |    574 |    358 |     91 |    11 |    0 |    111 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    273 |    301 |     125 |      15 |       0 |      35 |      4 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      8 |      3 |      0 |      4 |     16 |      1 |      0 |      3 |       1 |       3 |       0 |       3 |     28 |     17 |      0 |     22 |       11 |       32 |       22 |       27 |       24 |       26 |      18 |       16 |       30 |       27 |       32 |       34 |       29 |      30 |        3 |        6 |       12 |       13 |        7 |       11 |       6 |        3 |        4 |        7 |        9 |        3 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       12 |        9 |       12 |        6 |        9 |       1 |        7 |       15 |       13 |       15 |        9 |       10 |       1 |      0 |      2 |     34 |     73 |     23 |      6 |     11 |    209 |      0 |      0 |      0 |      2 |     10 |     10 |      5 |      5 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     29 |      4 |      0 |      1 |     72 |      0 |      1 | s03      | R    |
| 42260000 |    691 |    415 |    102 |    20 |    0 |    147 |    2 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    324 |    367 |     141 |      22 |       0 |      63 |     12 |      2 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      1 |      0 |      1 |     16 |      2 |      0 |      6 |       4 |       4 |       0 |       8 |     26 |     16 |      0 |     26 |       19 |       26 |       38 |       36 |       33 |       25 |      16 |       20 |       38 |       44 |       43 |       29 |       26 |      22 |        2 |        4 |        7 |       10 |       11 |        5 |       7 |        3 |        8 |       12 |       12 |        8 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       20 |        9 |       20 |       13 |        9 |       1 |       20 |       21 |       18 |       15 |       10 |        5 |       0 |      0 |      0 |     38 |     76 |     35 |     13 |     17 |    236 |      0 |      0 |      0 |      9 |     15 |      6 |      6 |      5 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     34 |     30 |      9 |      7 |      2 |     91 |      0 |      1 | s03      | R    |
| 42270000 |    486 |    298 |     93 |     6 |    0 |     83 |    3 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    241 |    245 |      93 |      12 |       0 |      20 |      4 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      2 |      0 |      8 |      5 |      0 |      0 |      2 |       1 |       4 |       0 |      11 |     11 |      6 |      0 |      4 |        5 |       16 |       28 |       21 |       19 |       29 |      20 |        6 |       19 |       31 |       21 |       20 |       28 |      35 |        1 |        8 |        8 |       16 |        7 |        5 |       4 |        7 |        4 |        5 |        9 |        5 |        8 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       11 |       13 |        8 |        8 |        5 |       2 |        6 |       10 |       12 |        6 |        5 |        2 |       0 |      0 |      4 |     18 |     37 |     22 |      6 |     22 |    189 |      0 |      0 |      1 |     12 |      8 |      9 |      2 |      3 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |     18 |      8 |      2 |      2 |     55 |      0 |      1 | s03      | R    |
| 42280000 |    529 |    323 |    108 |    12 |    0 |     80 |    2 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    252 |    277 |      55 |      12 |       0 |      20 |      5 |      3 |      0 |      1 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      7 |      1 |      0 |      6 |      6 |      0 |      0 |      4 |      18 |       5 |       0 |       3 |      6 |      5 |      0 |      1 |        7 |       17 |       29 |       29 |       18 |       29 |      15 |        7 |       15 |       30 |       30 |       28 |       51 |      18 |        2 |        4 |       12 |       15 |        5 |       13 |       6 |        3 |        5 |       10 |        8 |        3 |       12 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       10 |       12 |       16 |        5 |        3 |       0 |        3 |        4 |       18 |        9 |        5 |        5 |       3 |      0 |      2 |     33 |     69 |     27 |      5 |     16 |    171 |      0 |      0 |      0 |      7 |     21 |      7 |      7 |      5 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |     24 |      8 |      3 |      0 |     53 |      0 |      1 | s03      | R    |
| 42281000 |    850 |    476 |    176 |    18 |    0 |    169 |    3 |    5 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    394 |    456 |     121 |      23 |       0 |      47 |      9 |      2 |      0 |      3 |      2 |      4 |      0 |      1 |      6 |      2 |      0 |      1 |     15 |     16 |      0 |     22 |     23 |      2 |      0 |      8 |      16 |      14 |       0 |      22 |     63 |     23 |      0 |     22 |       11 |       44 |       30 |       34 |       46 |       28 |      11 |       12 |       55 |       49 |       52 |       44 |       41 |      19 |        5 |       14 |       17 |       15 |       23 |       14 |       7 |        3 |        9 |       13 |        9 |       18 |       22 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       28 |       16 |       12 |       12 |       14 |       2 |       17 |       16 |       16 |       21 |       22 |       11 |       0 |      0 |      2 |     46 |     87 |     49 |     18 |     20 |    254 |      0 |      0 |      0 |      7 |     37 |     14 |      5 |     19 |     94 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     23 |     44 |      6 |      1 |      7 |    113 |      0 |      1 | s03      | R    |
| 42290001 |    500 |    290 |    111 |    11 |    0 |     80 |    2 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    230 |    270 |      76 |       9 |       0 |      21 |      9 |      4 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      5 |      1 |      0 |      5 |     10 |      0 |      0 |      3 |       3 |       7 |       0 |       2 |     12 |      2 |      0 |      7 |       10 |       12 |       25 |       23 |        9 |       34 |       7 |       10 |       22 |       23 |       35 |       24 |       41 |      15 |        1 |        6 |       11 |       12 |        6 |       11 |       6 |        0 |       11 |        7 |       14 |        8 |       12 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        6 |       16 |        7 |       11 |        8 |       2 |       10 |        6 |        6 |       11 |        5 |        4 |       0 |      0 |      1 |     27 |     57 |     19 |     10 |     19 |    157 |      0 |      0 |      0 |      7 |     33 |     11 |      3 |      4 |     53 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     14 |     21 |      5 |      0 |      3 |     53 |      0 |      1 | s03      | R    |
| 42290002 |     23 |     12 |      3 |     1 |    0 |      5 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |     11 |       4 |       1 |       0 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        1 |        2 |        1 |        1 |       0 |        0 |        1 |        1 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |      4 |      2 |      1 |      1 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 42291000 |    742 |    419 |    107 |    12 |    0 |    197 |    2 |    3 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    302 |    440 |     111 |      21 |       0 |      47 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      2 |     21 |      7 |      0 |     49 |     15 |      0 |      0 |      3 |      15 |       5 |       0 |      13 |     18 |     14 |      0 |     16 |       11 |       25 |       32 |       28 |       15 |       42 |       5 |       14 |       40 |       53 |       41 |       37 |       68 |       8 |        3 |        7 |       10 |       11 |        7 |       14 |       0 |        4 |        7 |        9 |        8 |       11 |       14 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       19 |       15 |       14 |        7 |       24 |       1 |       20 |       20 |       21 |       15 |       10 |       38 |       0 |      0 |      4 |     45 |     86 |     28 |      9 |     19 |    228 |      0 |      0 |      0 |     13 |     24 |      7 |      5 |      4 |     54 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     36 |     55 |      6 |      2 |      5 |    107 |      0 |      1 | s03      | R    |
| 42300000 |    751 |    465 |    105 |    17 |    0 |    156 |    5 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    359 |    392 |     209 |      30 |       0 |      82 |      5 |      2 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      7 |     18 |      4 |      0 |      4 |       2 |       2 |       0 |       1 |     40 |     18 |      0 |     18 |       18 |       32 |       42 |       40 |       29 |       39 |      19 |       27 |       53 |       38 |       36 |       29 |       38 |      25 |        2 |       11 |       12 |       15 |       10 |        6 |       1 |        4 |        5 |        5 |       13 |       10 |        8 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       16 |       17 |       17 |       10 |        8 |       0 |       17 |       29 |       13 |       22 |        8 |        8 |       1 |      0 |      2 |     42 |     91 |     50 |     11 |     13 |    256 |      0 |      0 |      2 |      8 |     20 |     15 |      4 |     14 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     28 |     42 |      7 |      1 |      5 |     96 |      0 |      1 | s03      | R    |
| 42310001 |    300 |    190 |     52 |     5 |    0 |     51 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    144 |    156 |      80 |       8 |       0 |      24 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      9 |      2 |      0 |      1 |       0 |       0 |       0 |       1 |     11 |      0 |      0 |      7 |        8 |        6 |       18 |       16 |        7 |       14 |      17 |       12 |       11 |       22 |       11 |       14 |       14 |      20 |        3 |        5 |        5 |        7 |        3 |        3 |       4 |        0 |        2 |        3 |        6 |        2 |        3 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       11 |        3 |        3 |        4 |        5 |       0 |        5 |        5 |        7 |        7 |        3 |        2 |       1 |      0 |      0 |     17 |     30 |     21 |      4 |      4 |    114 |      0 |      0 |      0 |      4 |      8 |      1 |      0 |      1 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |     16 |      4 |      2 |      4 |     29 |      0 |      1 | s03      | R    |
| 42310002 |    460 |    270 |     82 |     5 |    0 |     98 |    1 |    3 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    208 |    252 |      78 |      27 |       0 |      21 |      2 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |     17 |      6 |      0 |     13 |     17 |      4 |      0 |      9 |       8 |      12 |       0 |      10 |     16 |      4 |      0 |      8 |        6 |       22 |       23 |       29 |       17 |       18 |       2 |        9 |       27 |       26 |       36 |       33 |       19 |       3 |        3 |        5 |        7 |       18 |        7 |        7 |       0 |        2 |        1 |        6 |       16 |        6 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        7 |        9 |       10 |        9 |        3 |       0 |       11 |       15 |       13 |       17 |        5 |        2 |       1 |      0 |      3 |     28 |     58 |     23 |     10 |      7 |    141 |      0 |      0 |      1 |      3 |     22 |      8 |      4 |      4 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     19 |      8 |      0 |      5 |     57 |      0 |      1 | s03      | R    |
| 42330000 |    465 |    287 |    102 |     9 |    0 |     59 |    1 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    204 |    261 |      55 |       6 |       0 |      13 |     10 |      9 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      2 |      0 |      0 |      4 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      3 |        3 |        7 |       11 |       20 |       24 |       34 |       9 |        5 |       12 |       23 |       42 |       37 |       52 |       8 |        1 |        3 |        9 |       13 |        9 |        9 |       6 |        1 |        5 |        6 |        7 |       10 |       16 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        9 |        9 |       10 |        6 |        5 |       4 |        3 |        8 |        1 |        7 |        8 |        3 |       0 |      0 |      0 |     35 |     46 |     39 |      5 |     17 |    145 |      0 |      0 |      0 |      9 |     17 |      6 |      8 |      5 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |     13 |      7 |      2 |      4 |     39 |      0 |      1 | s03      | R    |
| 42340000 |    614 |    353 |    110 |    12 |    0 |    128 |    4 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    336 |      85 |      15 |       0 |      33 |      5 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      5 |     30 |     12 |      0 |     12 |     18 |      7 |      0 |      5 |       3 |       8 |       0 |       6 |      9 |      3 |      0 |      8 |       10 |       19 |       33 |       32 |       12 |       21 |      23 |       14 |       28 |       37 |       48 |       24 |       19 |      33 |        2 |        6 |        8 |       13 |        8 |       14 |       6 |        4 |        8 |       10 |       12 |        6 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       13 |       17 |       16 |        8 |        5 |       2 |       14 |       15 |       18 |       17 |        6 |        9 |       1 |      0 |      2 |     24 |     70 |     25 |      5 |     18 |    209 |      0 |      0 |      2 |     16 |     25 |      7 |      2 |     13 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |     17 |      8 |      4 |      2 |    102 |      0 |      1 | s03      | R    |
| 42350000 |    526 |    345 |     89 |    14 |    0 |     69 |    5 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    220 |    306 |      83 |      10 |       0 |      27 |     13 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      6 |      4 |      0 |      0 |      4 |       0 |       0 |       0 |       0 |     13 |      3 |      0 |      7 |        4 |       12 |       17 |       17 |       24 |       43 |      20 |       11 |       18 |       15 |       27 |       32 |       78 |      27 |        2 |        3 |        9 |        5 |        3 |       23 |       1 |        2 |        1 |        4 |        3 |        7 |       24 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        9 |       11 |        6 |        4 |        5 |       0 |       10 |        6 |       10 |        8 |       10 |        8 |       3 |      0 |      3 |     27 |     49 |     25 |      8 |     17 |    216 |      0 |      0 |      0 |     10 |     13 |      7 |      2 |      6 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     16 |      5 |      3 |      3 |     55 |      0 |      1 | s03      | R    |
| 42360000 |    649 |    376 |    182 |     9 |    0 |     79 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    272 |    377 |      52 |      16 |       0 |      10 |     10 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      0 |      0 |      3 |      3 |      1 |      0 |      5 |       1 |       2 |       0 |       3 |     16 |      2 |      0 |      4 |        2 |        6 |        6 |       13 |       20 |       91 |       9 |        3 |        4 |        2 |       13 |       40 |      153 |      14 |        0 |        2 |        7 |        5 |       14 |       42 |       7 |        1 |        1 |        5 |       12 |       16 |       67 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        6 |        5 |        6 |       14 |       17 |       0 |        4 |        2 |        3 |        5 |       13 |       15 |       1 |      0 |      3 |     54 |     60 |     32 |     13 |     29 |    185 |      0 |      0 |      2 |     13 |     32 |     19 |     11 |     10 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     16 |      6 |      2 |      3 |     50 |      0 |      1 | s03      | R    |
| 42361000 |    700 |    396 |    168 |    14 |    0 |    114 |    5 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    312 |    388 |      78 |      22 |       0 |      26 |     15 |      7 |      0 |      6 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     11 |      3 |      0 |     15 |     11 |      0 |      0 |      5 |       8 |       4 |       0 |       6 |     26 |      8 |      0 |      5 |       11 |       13 |       26 |       32 |       35 |       42 |       2 |       11 |       22 |       26 |       37 |       44 |       88 |       7 |        4 |        8 |       14 |       13 |       14 |       23 |       4 |        2 |        9 |       12 |       10 |       15 |       35 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       13 |       19 |       15 |       10 |        9 |       0 |        3 |       10 |       14 |        6 |       14 |       18 |       0 |      0 |      1 |     47 |     85 |     39 |     12 |     24 |    188 |      0 |      0 |      1 |     14 |     39 |     10 |      8 |      7 |     89 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     27 |     29 |      5 |      4 |      4 |     65 |      0 |      1 | s03      | R    |
| 42371000 |    725 |    432 |    112 |    20 |    0 |    151 |    3 |    5 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    340 |    385 |     118 |      29 |       0 |      44 |      7 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |     13 |      5 |      0 |     20 |     19 |      1 |      0 |      9 |      16 |       9 |       0 |      18 |     23 |     14 |      0 |     11 |       14 |       28 |       45 |       46 |       17 |       27 |       1 |       14 |       53 |       59 |       47 |       28 |       42 |      11 |        2 |        5 |       25 |       15 |       12 |        4 |       1 |        0 |        6 |        9 |       18 |        6 |        7 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       16 |       30 |       21 |       12 |        8 |       0 |        7 |       21 |       19 |       19 |       11 |        4 |       2 |      0 |      2 |     43 |     82 |     38 |     15 |     11 |    241 |      0 |      0 |      1 |      7 |     28 |     11 |      5 |      3 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     26 |      7 |      2 |      2 |    117 |      0 |      1 | s03      | R    |
| 42400000 |   1104 |    614 |    220 |    15 |    0 |    238 |    9 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    514 |    590 |     148 |      35 |       0 |      46 |      7 |      4 |      0 |      6 |      3 |      1 |      0 |      4 |      0 |      0 |      0 |      2 |     25 |     11 |      0 |     26 |     12 |      3 |      0 |     11 |      16 |      13 |       0 |      10 |     32 |      8 |      0 |     21 |       19 |       37 |       56 |       68 |       32 |       21 |      21 |       27 |       65 |       85 |       70 |       33 |       41 |      39 |       11 |       14 |       32 |       24 |       13 |       10 |      11 |        6 |       11 |       15 |       28 |       13 |       12 |      20 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       23 |       50 |       33 |       12 |        8 |       6 |       20 |       26 |       45 |       14 |       12 |        6 |       2 |      0 |     12 |     69 |    106 |     38 |      9 |     18 |    362 |      0 |      0 |      2 |     23 |     26 |     15 |      6 |      4 |    144 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     35 |     33 |      9 |      1 |      5 |    181 |      0 |      1 | s03      | R    |
| 42410000 |    594 |    329 |    155 |    10 |    0 |     94 |    2 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    281 |    313 |      78 |      14 |       0 |      24 |      4 |      5 |      0 |      6 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |      4 |      1 |      0 |      1 |       0 |       1 |       0 |       0 |     10 |      4 |      0 |      0 |        7 |       16 |       27 |       36 |       14 |       24 |      18 |        9 |       26 |       38 |       34 |       18 |       30 |      32 |        4 |       10 |       19 |       10 |       11 |       11 |      19 |        2 |        4 |       11 |        9 |       11 |       12 |      22 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       10 |       13 |       13 |        4 |        4 |       1 |        6 |       20 |       11 |       10 |        3 |        3 |       2 |      0 |      3 |     24 |     55 |     20 |     15 |     13 |    199 |      0 |      0 |      0 |      9 |     21 |      9 |      5 |      8 |    103 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     17 |     20 |      3 |      5 |      2 |     60 |      0 |      1 | s03      | R    |
| 42420000 |     70 |     46 |     12 |     1 |    0 |      8 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     38 |     32 |      12 |       0 |       0 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       4 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        2 |        3 |        6 |        2 |        5 |       5 |        0 |        1 |        5 |        4 |        3 |        7 |       3 |        1 |        0 |        2 |        2 |        1 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      2 |     13 |     10 |      1 |      0 |     20 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      3 |      1 |      1 |      0 |      4 |      0 |      1 | s03      | R    |
| 42430000 |    580 |    358 |    101 |    16 |    0 |     98 |    1 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    275 |    305 |     108 |      11 |       0 |      30 |      4 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |     13 |      0 |      0 |      7 |       15 |       19 |       32 |       33 |       14 |       27 |      14 |       18 |       19 |       34 |       55 |       22 |       35 |      21 |        3 |        6 |        9 |        7 |        8 |       10 |       7 |        3 |        7 |       11 |       11 |        6 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |        8 |       21 |       12 |        8 |        3 |       4 |        9 |       14 |       11 |        7 |        5 |        4 |       0 |      0 |      1 |     41 |     44 |     33 |     19 |     18 |    202 |      0 |      0 |      0 |      8 |     18 |      6 |      3 |      6 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     27 |      4 |      2 |      3 |     62 |      0 |      1 | s03      | R    |
| 42440000 |    537 |    323 |    101 |    12 |    0 |     93 |    2 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    251 |    286 |      80 |      17 |       0 |      33 |      6 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |     10 |      2 |      0 |      0 |      8 |      2 |      0 |      2 |       1 |       3 |       0 |       1 |      1 |      2 |      0 |      3 |       20 |       14 |       29 |       30 |       18 |       18 |      11 |       11 |       25 |       48 |       36 |       19 |       27 |      17 |        4 |        9 |       16 |        7 |        5 |        7 |       6 |        2 |        7 |       13 |       10 |        4 |        7 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        8 |       15 |       11 |        8 |        2 |       2 |        9 |       17 |       12 |       14 |        2 |        1 |       1 |      0 |      1 |     28 |     66 |     30 |     17 |     13 |    168 |      0 |      0 |      2 |     10 |     16 |     11 |      4 |      6 |     52 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     18 |      7 |      3 |      1 |     65 |      0 |      1 | s03      | R    |
| 42450000 |    459 |    252 |    121 |     6 |    0 |     78 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    227 |    232 |      56 |      10 |       0 |      16 |      8 |      4 |      0 |      4 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      3 |      3 |      0 |      0 |      1 |       0 |       1 |       0 |       0 |      4 |      4 |      0 |      3 |        8 |       16 |       17 |       31 |       16 |       16 |      12 |        9 |       14 |       26 |       30 |       15 |       22 |      20 |        5 |        4 |       13 |       19 |        7 |        5 |       8 |        3 |        5 |        7 |       12 |        9 |        9 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       10 |       14 |        7 |       10 |        1 |       1 |        9 |        6 |       11 |        5 |        1 |        4 |       0 |      0 |      1 |     13 |     37 |     21 |      6 |     15 |    159 |      0 |      0 |      0 |      8 |     15 |      7 |      7 |      5 |     79 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     20 |      7 |      1 |      1 |     43 |      0 |      1 | s03      | R    |
| 42460000 |    535 |    331 |     78 |    17 |    0 |    100 |    3 |    3 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    247 |    288 |     145 |      16 |       0 |      29 |      5 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      6 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      4 |       17 |       20 |       26 |       34 |       16 |       20 |       4 |       21 |       37 |       31 |       42 |       25 |       16 |      22 |        3 |        5 |       13 |       11 |        7 |        2 |       4 |        1 |        9 |        5 |        7 |        6 |        0 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       16 |       14 |       11 |        5 |        5 |       3 |       18 |       10 |       11 |       11 |        5 |        5 |       1 |      0 |      2 |     39 |     59 |     22 |     11 |      9 |    189 |      0 |      0 |      0 |      6 |     16 |      8 |      2 |      2 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     22 |      3 |      4 |      4 |     67 |      0 |      1 | s03      | R    |
| 43010001 |    734 |    472 |     80 |    17 |    0 |    153 |    4 |    4 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    336 |    398 |     171 |      21 |       0 |      51 |     11 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      7 |      2 |      0 |      7 |      5 |      0 |      0 |      4 |       1 |       3 |       0 |       3 |      7 |      1 |      0 |      5 |       14 |       37 |       48 |       47 |       23 |       14 |      11 |       25 |       71 |       56 |       59 |       24 |       21 |      22 |        3 |        8 |       11 |        5 |        7 |        7 |       3 |        3 |        8 |        8 |        6 |        4 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       28 |       21 |       30 |        2 |        5 |       0 |       19 |       26 |       17 |       14 |        6 |        2 |       0 |      0 |      3 |     59 |     89 |     29 |     12 |     15 |    265 |      0 |      0 |      1 |      3 |     16 |      6 |      3 |      2 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     32 |     24 |      4 |      4 |      2 |    114 |      0 |      1 | s03      | R    |
| 43010003 |      1 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43010004 |      4 |      2 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 43040000 |    375 |    218 |     68 |     8 |    0 |     72 |    3 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    172 |    203 |      47 |       2 |       0 |       6 |      7 |      3 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      1 |      0 |      0 |      1 |       0 |       1 |       0 |       2 |      5 |      4 |      0 |      0 |        4 |       15 |       16 |       23 |       19 |       15 |       8 |        9 |       21 |       21 |       21 |       17 |       15 |      14 |        0 |        5 |       10 |        4 |        4 |        1 |       6 |        2 |        6 |        4 |        1 |        6 |       11 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       12 |        9 |       10 |        2 |        5 |       0 |        4 |       13 |       11 |       10 |        4 |        4 |       1 |      0 |      1 |     23 |     37 |     14 |      9 |      4 |    130 |      0 |      0 |      0 |      8 |     12 |      6 |      2 |      3 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     15 |      8 |      2 |      4 |     49 |      0 |      1 | s03      | R    |
| 43041000 |      4 |      2 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43050001 |     45 |     36 |      5 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     25 |       8 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        3 |        1 |        1 |        4 |       0 |        0 |        3 |        2 |        2 |        3 |       10 |       1 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      6 |      3 |      0 |      1 |     21 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 43050002 |      2 |      1 |      0 |     0 |    0 |      0 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 43060001 |    234 |    153 |     22 |     5 |    0 |     53 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    107 |    127 |      39 |       4 |       0 |       6 |      3 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      5 |      0 |      0 |     10 |      2 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |      4 |      0 |      0 |      2 |        3 |       17 |       12 |       19 |       10 |        3 |       0 |        9 |       24 |       20 |       15 |       13 |        4 |       4 |        0 |        4 |        1 |        2 |        2 |        1 |       0 |        1 |        3 |        3 |        3 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       14 |        7 |        5 |        1 |        2 |       1 |        5 |        6 |        6 |        5 |        4 |        0 |       0 |      0 |      4 |     29 |     22 |     10 |      1 |      1 |     86 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      8 |      0 |      1 |      0 |     43 |      0 |      1 | s03      | R    |
| 43060002 |      2 |      1 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 43060003 |    596 |    348 |    117 |    10 |    0 |    109 |    5 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    298 |    298 |      84 |       8 |       0 |      25 |      8 |      5 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      2 |      0 |      5 |      3 |      2 |      0 |      1 |       0 |       0 |       0 |       0 |      7 |      2 |      0 |      2 |        3 |       25 |       42 |       41 |       22 |       22 |       4 |       16 |       37 |       47 |       31 |       22 |       30 |       6 |        4 |       10 |       15 |        9 |       13 |       11 |       1 |        4 |        9 |        6 |        8 |        8 |       19 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       17 |       27 |       12 |        6 |        3 |       1 |       12 |       10 |       13 |        8 |        8 |        3 |       1 |      0 |      5 |     33 |     58 |     24 |      6 |     15 |    207 |      0 |      0 |      0 |      8 |     19 |      7 |      6 |      9 |     68 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     20 |      9 |      3 |      3 |     81 |      0 |      1 | s03      | R    |
| 43070001 |    429 |    217 |    112 |     8 |    0 |     84 |    1 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    181 |    248 |      31 |       6 |       0 |       6 |      9 |      3 |      0 |      3 |      2 |      2 |      0 |      5 |      2 |      1 |      0 |      1 |     14 |      9 |      0 |      6 |      2 |      2 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      3 |      0 |      4 |        4 |       14 |       17 |       17 |       14 |       10 |       0 |        4 |       24 |       27 |       31 |       26 |       26 |       3 |        0 |       14 |       12 |       11 |        6 |       14 |       0 |        2 |       14 |        8 |        7 |       12 |        8 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |       16 |       11 |        8 |        8 |        5 |       0 |        7 |       11 |       13 |        9 |        6 |        5 |       1 |      0 |      1 |     19 |     44 |     25 |      9 |      7 |    112 |      0 |      0 |      0 |      8 |     23 |     11 |      5 |      6 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     19 |      9 |      2 |      1 |     51 |      0 |      1 | s03      | R    |
| 43070002 |     74 |     41 |     15 |     2 |    0 |     15 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     26 |     48 |       6 |       2 |       0 |       1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        3 |        2 |        3 |       0 |        1 |        2 |        7 |       10 |        3 |        5 |       2 |        0 |        2 |        2 |        2 |        1 |        1 |       0 |        0 |        2 |        1 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        5 |        0 |        2 |        0 |       0 |        0 |        2 |        5 |        0 |        2 |        2 |       0 |      0 |      2 |      8 |      8 |      1 |      2 |      1 |     19 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      2 |      9 |      0 |      1 | s03      | R    |
| 43071000 |     55 |     33 |      9 |     1 |    0 |     10 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     22 |     33 |       6 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        0 |        3 |        3 |        1 |        1 |        3 |       3 |        2 |        2 |        2 |        6 |        2 |        2 |       3 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        2 |        0 |        1 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        4 |        2 |        0 |        3 |        0 |        0 |       0 |      0 |      1 |      6 |      6 |      4 |      1 |      1 |     14 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 43072000 |    144 |     80 |     31 |     0 |    0 |     28 |    2 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     65 |     79 |      10 |       1 |       0 |       5 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      6 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        7 |        5 |        4 |        5 |        4 |       1 |        3 |        7 |       11 |       10 |       16 |        5 |       0 |        0 |        6 |        3 |        3 |        3 |        2 |       0 |        0 |        2 |        2 |        1 |        3 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        5 |        4 |        5 |        3 |        2 |       0 |        1 |        5 |        2 |        1 |        3 |        1 |       0 |      0 |      3 |      9 |     14 |     10 |      0 |      2 |     42 |      0 |      0 |      0 |      3 |      3 |      2 |      1 |      1 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      6 |      2 |      0 |      1 |     22 |      0 |      1 | s03      | R    |
| 43073000 |    180 |    113 |     28 |     7 |    0 |     28 |    2 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     72 |    108 |      21 |       3 |       0 |       9 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |        4 |        7 |       14 |       10 |        3 |        2 |       2 |        9 |       23 |        9 |       18 |        6 |        5 |       1 |        0 |        2 |        5 |        2 |        2 |        1 |       0 |        3 |        4 |        4 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        5 |        4 |        3 |        3 |        0 |       0 |        4 |        9 |        2 |        2 |        2 |        2 |       0 |      0 |      0 |     20 |     15 |      6 |      2 |      5 |     65 |      0 |      0 |      0 |      6 |      3 |      0 |      3 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      8 |      2 |      0 |      1 |     21 |      0 |      1 | s03      | R    |
| 43074000 |      2 |      2 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43080000 |    277 |    176 |     40 |     5 |    0 |     52 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    111 |    166 |       9 |       6 |       0 |       7 |      5 |      1 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      2 |      3 |      0 |      3 |      3 |      0 |      0 |      2 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      2 |        3 |        8 |       12 |       19 |        7 |        7 |       1 |       13 |       26 |       18 |       26 |       18 |       14 |       4 |        0 |        7 |        4 |        4 |        3 |        2 |       0 |        3 |        6 |        1 |        1 |        3 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       14 |        5 |        6 |        2 |        5 |       0 |        2 |        6 |        6 |        6 |        4 |        2 |       1 |      0 |      1 |     28 |     24 |     11 |      2 |      9 |    101 |      0 |      0 |      0 |      2 |      7 |      2 |      2 |      1 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      7 |      0 |      2 |      2 |     43 |      0 |      1 | s03      | R    |
| 43081000 |    213 |    125 |     74 |     3 |    0 |     11 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     60 |    153 |       7 |       0 |       0 |       0 |      7 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |       33 |       2 |        0 |        0 |        0 |        0 |        0 |       80 |      10 |        1 |        0 |        0 |        2 |        0 |       14 |       4 |        0 |        0 |        0 |        0 |        0 |       49 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |       10 |       0 |      0 |      1 |     12 |     14 |      8 |      2 |      4 |     84 |      0 |      0 |      0 |      7 |     13 |      3 |      0 |      0 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      1 |      2 |      0 |      4 |      0 |      1 | s03      | R    |
| 43090001 |     75 |     46 |      9 |     5 |    0 |     12 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     32 |     43 |       6 |       2 |       0 |       6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        5 |        2 |        7 |        3 |       1 |        0 |        8 |        5 |        4 |        3 |        6 |       0 |        0 |        1 |        2 |        0 |        0 |        2 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        3 |        0 |        1 |        0 |       0 |        3 |        3 |        4 |        2 |        1 |        0 |       0 |      0 |      0 |     10 |     10 |      4 |      0 |      1 |     21 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      2 |      1 |      0 |     11 |      0 |      1 | s03      | R    |
| 43090002 |    468 |    282 |     78 |    13 |    0 |     83 |    3 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    210 |    258 |      41 |      10 |       0 |      18 |      9 |      1 |      0 |      3 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      2 |      0 |      4 |      1 |      1 |      0 |      1 |       5 |       0 |       0 |       3 |      5 |      2 |      0 |      2 |        7 |       22 |       29 |       28 |       10 |       15 |       3 |       10 |       30 |       31 |       45 |       26 |       20 |       6 |        1 |        9 |        9 |        9 |        4 |        4 |       3 |        1 |       10 |        7 |        5 |        4 |        6 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       18 |       10 |       12 |        3 |        3 |       0 |        9 |       13 |       11 |       11 |        6 |        1 |       0 |      0 |      5 |     28 |     52 |     28 |      9 |     13 |    147 |      0 |      0 |      2 |     12 |     16 |      4 |      0 |      1 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     17 |      5 |      1 |      0 |     71 |      0 |      1 | s03      | R    |
| 43100000 |    429 |    277 |     68 |     9 |    0 |     63 |    5 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    186 |    243 |      54 |       6 |       0 |      12 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |     12 |      0 |      0 |      1 |        8 |       20 |       22 |       27 |       18 |       15 |       6 |       10 |       21 |       35 |       39 |       26 |       17 |      13 |        2 |        6 |        7 |        7 |        4 |        5 |       3 |        1 |        5 |        5 |        6 |        4 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        9 |       12 |        7 |        3 |        0 |       1 |        6 |       15 |       15 |        6 |        3 |        2 |       1 |      0 |      1 |     33 |     49 |     22 |      6 |     12 |    154 |      0 |      0 |      1 |      6 |     15 |      3 |      2 |      2 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |     19 |      0 |      2 |      3 |     48 |      0 |      1 | s03      | R    |
| 43110000 |    589 |    342 |    134 |    12 |    0 |     88 |    6 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    244 |    345 |      65 |      13 |       0 |      19 |      2 |      5 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |       1 |       7 |       0 |       0 |      6 |      4 |      0 |      2 |       10 |       21 |       22 |       25 |       17 |       14 |      11 |       15 |       34 |       48 |       40 |       36 |       35 |      14 |        4 |       11 |        8 |       15 |       16 |       10 |       4 |        2 |        5 |        8 |       13 |        9 |       18 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       14 |       16 |        8 |        6 |        8 |       0 |       15 |       13 |       13 |        7 |        3 |        6 |       0 |      0 |      2 |     34 |     47 |     23 |     10 |      9 |    217 |      0 |      0 |      1 |     12 |     11 |     10 |      6 |      4 |     90 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     26 |     24 |      6 |      1 |      1 |     52 |      0 |      1 | s03      | R    |
| 43111000 |     10 |      5 |      0 |     1 |    0 |      3 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 43112000 |      3 |      3 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43120000 |      9 |      3 |      3 |     0 |    0 |      2 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       2 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 43121000 |     36 |     24 |      6 |     1 |    0 |      4 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |     24 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |        1 |        2 |        4 |        0 |        1 |        0 |       0 |        1 |        5 |        6 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        3 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      1 |      5 |      3 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 43130000 |     86 |     45 |     17 |     1 |    0 |     20 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     41 |     45 |       5 |       2 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      3 |        1 |        2 |        3 |        4 |        3 |        2 |       3 |        3 |        6 |        4 |        8 |        0 |        2 |       4 |        1 |        2 |        3 |        1 |        0 |        0 |       1 |        0 |        0 |        4 |        1 |        1 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        3 |        3 |        1 |        3 |       0 |        1 |        0 |        4 |        2 |        2 |        0 |       0 |      0 |      0 |      7 |      7 |      4 |      3 |      1 |     23 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      3 |      3 |      0 |      1 |      9 |      0 |      1 | s03      | R    |
| 43131000 |     72 |     47 |      8 |     0 |    0 |     17 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     41 |     31 |       7 |       0 |       0 |       4 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        1 |        2 |        7 |        4 |        3 |        1 |       5 |        1 |        1 |       10 |        2 |        5 |        0 |       5 |        0 |        1 |        0 |        5 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        7 |        2 |        1 |        1 |       0 |        0 |        1 |        2 |        3 |        0 |        0 |       0 |      0 |      0 |      6 |     12 |      6 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      0 |      1 |      0 |      8 |      0 |      1 | s03      | R    |
| 43140000 |    171 |     88 |     28 |     2 |    0 |     49 |    4 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     77 |     94 |      14 |       6 |       0 |       4 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |        2 |        4 |        9 |        6 |       10 |        2 |       3 |        3 |       14 |       14 |       10 |        6 |        4 |       1 |        0 |        1 |        5 |        5 |        1 |        3 |       1 |        0 |        1 |        3 |        2 |        3 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        9 |        5 |        5 |        1 |        2 |       0 |        6 |        9 |        4 |        8 |        2 |        1 |       0 |      0 |      1 |     20 |      6 |      3 |      0 |      3 |     55 |      0 |      0 |      0 |      6 |      7 |      0 |      0 |      2 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      6 |      3 |      1 |      1 |     35 |      0 |      1 | s03      | R    |
| 43141000 |     24 |     15 |      2 |     1 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     14 |       1 |       0 |       0 |       3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        1 |        0 |        2 |        0 |        1 |       0 |        1 |        3 |        2 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      2 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 43150000 |    130 |     69 |     33 |     8 |    0 |     19 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     64 |     66 |       6 |       1 |       0 |       3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      1 |        1 |        5 |        5 |        8 |        2 |        1 |       2 |        2 |        7 |        9 |       11 |        8 |        6 |       2 |        0 |        5 |        2 |        9 |        3 |        2 |       0 |        0 |        1 |        2 |        4 |        1 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        6 |        4 |        3 |        4 |        1 |       0 |        2 |        4 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |      7 |     14 |      9 |      2 |      6 |     31 |      0 |      0 |      0 |      6 |      7 |      3 |      1 |      3 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      7 |      3 |      0 |      0 |     15 |      0 |      1 | s03      | R    |
| 43160001 |    382 |    232 |     58 |     6 |    0 |     76 |    2 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    155 |    227 |      51 |       6 |       0 |       9 |      7 |      3 |      0 |      4 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |       12 |       19 |       26 |       13 |        9 |       5 |       15 |       17 |       30 |       38 |       14 |       27 |       4 |        1 |        5 |        6 |        5 |        6 |        7 |       0 |        1 |        4 |        0 |        7 |        4 |       11 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       10 |        8 |        9 |        3 |        2 |       1 |        4 |       14 |       19 |        9 |        6 |        2 |       0 |      0 |      2 |     32 |     41 |     19 |      7 |      6 |    125 |      0 |      0 |      0 |      5 |     12 |      3 |      0 |      5 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     14 |     15 |      7 |      4 |      0 |     50 |      0 |      1 | s03      | R    |
| 43160002 |    178 |     99 |     20 |     2 |    0 |     52 |    1 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     65 |    113 |      14 |       2 |       0 |       3 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       2 |       0 |       0 |      4 |      0 |      0 |      1 |        2 |        7 |        7 |        8 |        3 |        2 |       2 |        5 |       10 |       15 |       17 |        7 |        8 |       6 |        0 |        2 |        4 |        1 |        1 |        0 |       0 |        0 |        3 |        2 |        2 |        0 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        7 |        7 |        4 |        1 |        2 |       1 |        7 |        9 |        6 |        4 |        5 |        2 |       0 |      0 |      0 |     14 |     16 |      9 |      2 |      0 |     58 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      3 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |      9 |      2 |      0 |      1 |     38 |      0 |      1 | s03      | R    |
| 43161000 |     31 |     21 |      4 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     21 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        1 |        2 |        0 |       1 |        0 |        3 |        3 |        2 |        2 |        4 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |      2 |      7 |      4 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 43170001 |     25 |     11 |      6 |     2 |    0 |      5 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |     11 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        2 |        0 |        0 |       2 |        1 |        1 |        0 |        1 |        0 |        1 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      0 |      3 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43170002 |    132 |     69 |     26 |     5 |    0 |     30 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     61 |     71 |       8 |       5 |       0 |       6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        2 |        3 |        1 |        8 |        6 |        2 |       4 |        2 |        6 |        7 |       11 |        9 |        0 |       8 |        0 |        2 |        4 |        2 |        5 |        1 |       2 |        0 |        1 |        0 |        3 |        2 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        4 |        3 |        6 |        2 |        0 |       2 |        5 |        4 |        1 |        4 |        4 |        0 |       0 |      0 |      0 |      3 |      7 |      6 |      3 |      8 |     42 |      0 |      0 |      0 |      2 |      2 |      2 |      2 |      3 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     11 |      1 |      3 |      1 |     17 |      0 |      1 | s03      | R    |
| 43170003 |      3 |      2 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43180001 |    392 |    235 |     69 |     7 |    0 |     71 |    2 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    185 |    207 |      49 |      12 |       0 |      17 |      9 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      5 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      2 |        5 |        8 |       29 |       32 |       14 |        7 |       9 |       11 |       22 |       30 |       32 |       22 |        9 |       5 |        2 |        9 |        9 |       10 |        4 |        2 |       2 |        3 |        5 |        7 |        8 |        2 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        5 |       10 |        8 |        7 |        4 |       1 |        4 |        8 |       12 |       12 |        3 |        5 |       1 |      0 |      2 |     26 |     40 |     18 |     12 |      5 |    132 |      0 |      0 |      1 |      6 |     12 |      3 |      3 |      4 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     10 |     10 |      1 |      0 |     57 |      0 |      1 | s03      | R    |
| 43180002 |    107 |     62 |     20 |     3 |    0 |     22 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     47 |     60 |       6 |       2 |       0 |       3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        2 |        5 |        6 |        1 |        5 |        5 |       0 |        3 |        4 |        9 |        7 |        3 |        9 |       3 |        1 |        5 |        1 |        1 |        0 |        2 |       0 |        1 |        4 |        1 |        0 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        3 |        1 |        1 |        3 |       0 |        2 |        3 |        1 |        1 |        1 |        4 |       0 |      0 |      2 |      8 |      8 |      5 |      1 |      1 |     37 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      4 |      1 |      2 |      0 |     14 |      0 |      1 | s03      | R    |
| 43180003 |     43 |     18 |     16 |     0 |    0 |      8 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     27 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        1 |        1 |        3 |        2 |       0 |        2 |        2 |        0 |        2 |        4 |        1 |       0 |        0 |        0 |        0 |        0 |        3 |        2 |       0 |        1 |        0 |        1 |        2 |        3 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        1 |        2 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |      6 |      4 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      5 |      0 |      1 | s03      | R    |
| 43180004 |      2 |      0 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 43190000 |    154 |     97 |     32 |     1 |    0 |     23 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     77 |     77 |       6 |       2 |       0 |       2 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        6 |        7 |       13 |        6 |        5 |       0 |        4 |       11 |       10 |       15 |        8 |        7 |       1 |        3 |        6 |        4 |        5 |        3 |        3 |       0 |        1 |        1 |        1 |        3 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        5 |        0 |        1 |        2 |        1 |       0 |        3 |        5 |        0 |        2 |        2 |        1 |       0 |      0 |      2 |      8 |     10 |      9 |      9 |      4 |     55 |      0 |      0 |      0 |      4 |      4 |      2 |      2 |      3 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     18 |      0 |      1 | s03      | R    |
| 43200001 |    358 |    239 |     44 |    10 |    0 |     63 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    165 |    193 |      76 |      12 |       0 |      22 |      4 |      2 |      0 |      3 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      4 |      1 |      1 |      0 |      6 |       1 |       0 |       0 |       1 |      3 |      1 |      0 |      0 |        3 |       10 |       24 |       24 |       11 |       18 |      12 |        9 |       25 |       15 |       22 |       18 |       31 |      17 |        1 |        2 |        7 |        4 |        2 |        7 |       0 |        1 |        6 |        0 |        2 |        7 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        8 |       10 |        5 |        5 |        3 |       0 |        3 |        9 |       11 |        9 |        0 |        3 |       0 |      0 |      0 |     23 |     38 |     15 |      5 |     13 |    145 |      0 |      0 |      1 |      3 |     12 |      1 |      2 |      2 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     12 |      2 |      3 |      1 |     43 |      0 |      1 | s03      | R    |
| 43200003 |     67 |     38 |     12 |     1 |    0 |     16 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     33 |     34 |      15 |       6 |       0 |       4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        3 |        4 |        4 |        3 |       1 |        2 |        5 |        3 |        3 |        1 |        3 |       3 |        1 |        1 |        1 |        2 |        1 |        0 |       0 |        2 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        2 |        0 |        3 |        0 |        1 |       0 |        0 |        3 |        1 |        2 |        1 |        1 |       0 |      0 |      0 |      1 |      5 |      2 |      2 |      2 |     26 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |     10 |      0 |      1 | s03      | R    |
| 43200004 |    120 |     75 |     12 |     3 |    0 |     27 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     61 |     59 |      21 |       3 |       0 |      15 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        5 |       11 |        9 |        4 |        4 |       0 |        3 |       12 |        7 |        7 |        7 |        2 |       3 |        2 |        1 |        1 |        3 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        5 |        4 |        2 |        1 |       0 |        3 |        5 |        1 |        3 |        2 |        0 |       0 |      0 |      1 |     10 |     11 |      9 |      2 |      3 |     39 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      5 |      2 |      1 |      1 |     17 |      0 |      1 | s03      | R    |
| 43200005 |     24 |     18 |      0 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     14 |       7 |       0 |       0 |       6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        1 |        1 |        0 |        1 |       0 |        1 |        1 |        4 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 43200006 |     19 |      8 |      5 |     2 |    0 |      2 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |     11 |       3 |       0 |       0 |       3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        1 |        0 |       1 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 43210000 |    539 |    334 |     69 |    16 |    0 |    112 |    3 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    247 |    292 |     131 |      20 |       0 |      38 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      6 |      7 |      0 |      0 |      5 |       3 |       0 |       0 |       1 |     10 |      2 |      0 |      4 |       15 |       32 |       31 |       21 |       23 |       14 |      15 |       17 |       48 |       34 |       25 |       18 |       20 |      21 |        0 |        5 |        7 |        9 |        4 |        6 |       1 |        4 |        8 |        8 |        3 |        3 |        8 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       20 |       21 |       11 |        3 |        3 |       0 |       12 |       17 |       22 |       15 |        3 |        3 |       0 |      0 |      2 |     34 |     57 |     21 |      4 |     11 |    205 |      0 |      0 |      0 |      6 |     13 |      1 |      1 |      2 |     46 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     26 |     10 |      3 |      1 |     75 |      0 |      1 | s03      | R    |
| 43211000 |    422 |    267 |     53 |    15 |    0 |     80 |    3 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    193 |    229 |      82 |       4 |       0 |      32 |      6 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |     15 |      2 |      0 |      5 |       0 |       2 |       0 |       1 |      8 |      2 |      0 |      7 |       10 |       26 |       28 |       22 |       19 |       10 |       7 |       14 |       35 |       29 |       30 |       11 |       13 |      13 |        1 |        5 |        2 |        9 |        5 |        6 |       2 |        2 |        0 |        7 |        3 |        4 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        8 |       11 |        7 |        5 |        2 |       1 |        7 |       23 |       11 |       10 |        6 |        3 |       1 |      0 |      1 |     30 |     52 |     24 |      5 |      3 |    152 |      0 |      0 |      0 |      1 |      7 |      2 |      1 |      5 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |     26 |      6 |      2 |      1 |     56 |      0 |      1 | s03      | R    |
| 43220000 |    649 |    398 |    102 |     9 |    0 |    133 |    1 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    295 |    354 |     107 |      15 |       0 |      28 |      3 |      0 |      0 |      1 |      2 |      1 |      0 |      2 |      7 |      2 |      0 |      1 |      1 |      3 |      0 |      2 |      7 |      0 |      0 |      9 |       6 |       3 |       0 |       1 |     10 |      5 |      0 |     10 |       10 |       37 |       34 |       27 |       17 |       25 |       8 |       18 |       65 |       47 |       36 |       20 |       40 |      14 |        4 |       13 |       15 |       10 |        3 |        7 |       4 |        1 |       11 |        8 |       10 |        3 |       12 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       18 |       28 |       15 |        2 |        8 |       0 |       14 |       18 |       15 |       16 |        2 |        3 |       0 |      0 |      4 |     56 |     74 |     20 |      9 |     11 |    224 |      0 |      0 |      0 |     13 |     17 |     15 |      2 |      6 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     16 |      5 |      1 |      2 |    110 |      0 |      1 | s03      | R    |
| 43230000 |    623 |    373 |    103 |    14 |    0 |    121 |    3 |    3 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    252 |    371 |     116 |      31 |       0 |      55 |      2 |      1 |      0 |      2 |      0 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      2 |      0 |      3 |      2 |      1 |      0 |      0 |       5 |       5 |       0 |       2 |     12 |      1 |      0 |      5 |        6 |       20 |       30 |       31 |       17 |       16 |      15 |       22 |       53 |       56 |       43 |       14 |       24 |      26 |       10 |       10 |       14 |        9 |        4 |        6 |       3 |        6 |       10 |        5 |       11 |        4 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       14 |       16 |       15 |        4 |        2 |       0 |       22 |       23 |       22 |       10 |        4 |        5 |       0 |      0 |      2 |     45 |     67 |     18 |      9 |     14 |    218 |      0 |      0 |      1 |      8 |     17 |      5 |      3 |      3 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     28 |      2 |      1 |      5 |     97 |      0 |      1 | s03      | R    |
| 43240001 |    193 |    121 |     29 |     3 |    0 |     39 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     93 |    100 |      58 |       3 |       0 |      16 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        3 |        6 |       15 |        8 |        7 |        9 |       8 |        2 |       17 |        6 |       16 |        6 |        8 |      10 |        2 |        3 |        1 |        6 |        2 |        1 |       1 |        2 |        1 |        3 |        2 |        1 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        7 |        4 |        2 |        1 |        1 |       0 |        6 |        6 |        4 |        4 |        0 |        2 |       0 |      0 |      0 |     11 |     40 |      4 |      1 |      4 |     61 |      0 |      0 |      1 |      7 |      5 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      9 |      1 |      1 |      0 |     23 |      0 |      1 | s03      | R    |
| 43240002 |    365 |    229 |     45 |    13 |    0 |     72 |    2 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    178 |    187 |      65 |       7 |       0 |      17 |      2 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      3 |      1 |      0 |      1 |       3 |       1 |       0 |       1 |      5 |      0 |      0 |      0 |        9 |       20 |       22 |       19 |       14 |       10 |       4 |        7 |       36 |       27 |       25 |       17 |       13 |       6 |        2 |        5 |        6 |        4 |        4 |        5 |       0 |        2 |        3 |        5 |        3 |        3 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       10 |       14 |       13 |        7 |        4 |       0 |        5 |        6 |       14 |        7 |        2 |        2 |       1 |      0 |      1 |     24 |     41 |     19 |      8 |      6 |    130 |      0 |      0 |      0 |      7 |      8 |      4 |      1 |      0 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     10 |      8 |      1 |      0 |     51 |      0 |      1 | s03      | R    |
| 43250000 |    408 |    281 |     49 |    10 |    0 |     61 |    4 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    210 |    198 |     107 |       6 |       0 |      20 |      7 |      1 |      0 |      3 |      2 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |     10 |      2 |      0 |      4 |       15 |       23 |       23 |       31 |       15 |       15 |      15 |       10 |       29 |       29 |       27 |       21 |       15 |      13 |        0 |        6 |        8 |        4 |        1 |        3 |       4 |        1 |        2 |        5 |        4 |        1 |        7 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        7 |       11 |       10 |        6 |        3 |       0 |        6 |        7 |        7 |        5 |        4 |        0 |       2 |      0 |      2 |     38 |     42 |     26 |      9 |     16 |    148 |      0 |      0 |      0 |      4 |      4 |      4 |      1 |      3 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     25 |      4 |      1 |      0 |     32 |      0 |      1 | s03      | R    |
| 43260000 |    715 |    453 |    121 |    15 |    0 |    121 |    2 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    348 |    367 |     121 |      12 |       0 |      33 |     11 |      1 |      0 |      4 |      3 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      7 |      6 |      0 |     11 |     12 |      0 |      0 |      4 |      11 |       3 |       0 |       4 |     13 |      1 |      0 |      6 |        7 |       19 |       48 |       40 |       21 |       33 |      32 |       14 |       17 |       49 |       52 |       26 |       45 |      50 |        3 |        4 |       15 |       17 |        7 |       11 |       5 |        3 |        7 |       12 |       12 |        6 |       10 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       20 |       19 |       23 |        4 |        7 |       4 |       10 |        9 |       12 |       13 |        2 |        8 |       1 |      0 |      2 |     29 |     77 |     50 |     12 |     15 |    268 |      0 |      0 |      1 |      3 |     28 |     11 |      3 |      4 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     21 |     27 |      8 |      1 |      0 |     84 |      0 |      1 | s03      | R    |
| 43270000 |    506 |    319 |     78 |     4 |    0 |    100 |    1 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    240 |    266 |     115 |      14 |       0 |      30 |      8 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |      4 |      0 |      8 |     15 |      1 |      0 |      4 |      11 |       3 |       0 |       3 |      8 |      3 |      0 |      9 |       10 |       26 |       30 |       24 |       22 |       20 |      10 |       23 |       25 |       31 |       34 |       29 |       22 |      13 |        1 |       11 |       15 |       10 |        4 |        4 |       0 |        2 |        9 |        7 |        8 |        3 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       11 |       14 |        9 |        6 |        2 |       1 |        8 |       16 |       10 |       12 |        6 |        4 |       0 |      0 |      0 |     43 |     42 |     24 |     10 |     10 |    190 |      0 |      0 |      0 |      9 |     12 |      7 |      1 |      5 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     21 |      4 |      3 |      2 |     66 |      0 |      1 | s03      | R    |
| 43271000 |    501 |    292 |     61 |     8 |    0 |    136 |    1 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    245 |    256 |      99 |      12 |       0 |      30 |      6 |      1 |      0 |      2 |      3 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      3 |      0 |     19 |      5 |      1 |      0 |      4 |       1 |       7 |       0 |       4 |     22 |      4 |      0 |     17 |       16 |       30 |       30 |       27 |       14 |       14 |       3 |       16 |       28 |       35 |       38 |       19 |       14 |       8 |        3 |        4 |        6 |        7 |       10 |        2 |       2 |        1 |        3 |        3 |        8 |        6 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       13 |       12 |       18 |       11 |        4 |       0 |       17 |       18 |       10 |       16 |        6 |        4 |       0 |      0 |      3 |     36 |     71 |     19 |      4 |      8 |    151 |      0 |      0 |      1 |      6 |     12 |      3 |      2 |      6 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     24 |     27 |      5 |      3 |      6 |     82 |      0 |      1 | s03      | R    |
| 43281000 |    572 |    335 |     70 |     9 |    0 |    148 |    3 |    5 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    335 |      69 |      11 |       0 |      34 |      5 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      8 |      2 |      0 |      5 |       5 |       2 |       0 |       6 |     15 |      2 |      0 |      9 |       10 |       28 |       31 |       26 |       22 |        7 |       1 |       30 |       51 |       59 |       35 |       25 |        9 |       1 |        0 |       13 |        5 |        9 |        6 |        2 |       1 |        4 |        6 |        5 |        9 |        5 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       24 |       18 |       16 |        7 |        1 |       2 |       15 |       24 |       23 |       20 |        6 |        1 |       2 |      0 |      5 |     52 |     50 |     21 |      2 |     11 |    194 |      0 |      0 |      2 |      4 |     11 |      2 |      1 |      3 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     30 |     22 |      5 |      1 |      0 |    107 |      0 |      1 | s03      | R    |
| 43290000 |    851 |    437 |    177 |    18 |    0 |    205 |    7 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    410 |    441 |      79 |      14 |       0 |      38 |     12 |      5 |      0 |      6 |      1 |      1 |      0 |      1 |      3 |      1 |      0 |      4 |      9 |      5 |      0 |     19 |      7 |      2 |      0 |      7 |       5 |       1 |       0 |       5 |      7 |      7 |      0 |      9 |        6 |       51 |       38 |       37 |       32 |       17 |       8 |       22 |       54 |       52 |       63 |       26 |       19 |      12 |        3 |       23 |       22 |       21 |       13 |        8 |       8 |        4 |       10 |       21 |       14 |       13 |        7 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       38 |       29 |       19 |       14 |        5 |       0 |       16 |       38 |       24 |       20 |       11 |        4 |       1 |      0 |      3 |     60 |     78 |     30 |     10 |     14 |    242 |      0 |      0 |      0 |     11 |     20 |     15 |      6 |     15 |    110 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     29 |     34 |      3 |      2 |      1 |    166 |      0 |      1 | s03      | R    |
| 43291000 |      3 |      0 |      3 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43300001 |    475 |    295 |     65 |     7 |    0 |     96 |    2 |    3 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    226 |    249 |     102 |      13 |       0 |      39 |      6 |      1 |      0 |      5 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      7 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      9 |      2 |      0 |      5 |       13 |       20 |       32 |       24 |       20 |       14 |       1 |       17 |       37 |       30 |       36 |       27 |       16 |       8 |        4 |       10 |        9 |        7 |        3 |        5 |       2 |        3 |        6 |        3 |        3 |        3 |        2 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       14 |       20 |       10 |        5 |        2 |       2 |        8 |       22 |       11 |        8 |        2 |        2 |       0 |      0 |      4 |     36 |     62 |     22 |      8 |     12 |    151 |      0 |      0 |      1 |     12 |     11 |      0 |      1 |      0 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     19 |     20 |      3 |      0 |      0 |     69 |      0 |      1 | s03      | R    |
| 43300002 |     87 |     43 |     20 |     0 |    0 |     21 |    2 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     46 |     41 |       7 |       3 |       0 |       4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        2 |        6 |        4 |        4 |        2 |        2 |       0 |        0 |       10 |        5 |        3 |        3 |        1 |       1 |        1 |        1 |        4 |        2 |        3 |        1 |       1 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        4 |        1 |        2 |        1 |       1 |        0 |        4 |        2 |        2 |        2 |        1 |       0 |      0 |      1 |      5 |      7 |      6 |      0 |      0 |     24 |      0 |      0 |      0 |      3 |      3 |      1 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      1 |     15 |      0 |      1 | s03      | R    |
| 43310001 |     12 |      8 |      2 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      3 |       2 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 43310002 |    282 |    174 |     45 |     4 |    0 |     57 |    1 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    145 |    137 |      54 |      15 |       0 |      16 |      0 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      4 |       10 |       10 |       16 |       18 |       13 |        9 |       8 |        8 |        8 |       18 |       21 |       13 |       10 |      12 |        0 |        4 |        7 |        6 |        5 |        1 |       2 |        6 |        2 |        6 |        4 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        9 |        8 |        7 |        6 |        3 |       0 |        4 |        3 |       10 |        5 |        4 |        1 |       0 |      0 |      0 |     18 |     27 |     18 |      5 |      6 |    100 |      0 |      0 |      0 |      6 |      7 |      0 |      2 |      1 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     16 |      3 |      1 |      0 |     34 |      0 |      1 | s03      | R    |
| 43311000 |      1 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43320001 |     88 |     55 |      8 |     5 |    0 |     20 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     34 |     54 |       7 |       0 |       0 |       5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |        1 |        7 |        6 |        3 |        0 |        3 |       1 |        5 |       11 |       10 |        4 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        1 |        2 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        0 |        1 |        2 |        0 |       0 |        3 |        8 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |      8 |     15 |      3 |      1 |      0 |     28 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      4 |      0 |      0 |      0 |     17 |      0 |      1 | s03      | R    |
| 43320002 |    591 |    363 |    105 |    14 |    0 |    102 |    5 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    313 |     103 |      10 |       0 |      28 |     10 |      4 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      6 |      2 |      0 |      2 |       0 |       0 |       0 |       3 |      8 |      1 |      0 |      4 |        7 |       24 |       42 |       43 |       14 |       14 |      18 |       21 |       32 |       48 |       37 |       21 |       21 |      21 |       10 |        7 |        5 |       13 |        7 |        9 |       1 |        6 |        2 |       10 |       15 |        6 |        8 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       23 |        7 |       10 |        5 |        5 |       1 |        9 |       16 |       14 |        8 |        8 |        4 |       0 |      0 |      6 |     44 |     60 |     30 |      4 |     10 |    209 |      0 |      0 |      0 |      5 |     18 |     10 |      3 |      7 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     18 |      6 |      0 |      1 |     78 |      0 |      1 | s03      | R    |
| 43330000 |     73 |     42 |     16 |     1 |    0 |     13 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     35 |     38 |       3 |       3 |       0 |       1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        4 |        3 |        3 |       1 |        1 |        2 |        4 |        1 |        7 |        7 |       5 |        1 |        3 |        2 |        1 |        1 |        2 |       1 |        0 |        0 |        0 |        1 |        1 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        5 |        1 |        1 |        1 |        0 |       0 |        3 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      5 |      4 |      4 |      5 |     20 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      2 |      9 |      0 |      1 | s03      | R    |
| 43340000 |    807 |    423 |    200 |    18 |    0 |    157 |    0 |    4 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    372 |    435 |      59 |      14 |       0 |      20 |     13 |     10 |      0 |      4 |      2 |      2 |      0 |      0 |      5 |      2 |      0 |      1 |     12 |     12 |      0 |     20 |      3 |      2 |      0 |      6 |       8 |       0 |       0 |       7 |     10 |      1 |      0 |      5 |       11 |       23 |       28 |       46 |       30 |       21 |      20 |        5 |       37 |       36 |       65 |       55 |       25 |      21 |        7 |       11 |       16 |       24 |       23 |       14 |       7 |        4 |        8 |       13 |       18 |       30 |       14 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       13 |       22 |       24 |       10 |        9 |       3 |       15 |       21 |       19 |       14 |       16 |        6 |       2 |      0 |      3 |     38 |     85 |     37 |     19 |     37 |    204 |      0 |      0 |      2 |     13 |     31 |     20 |      8 |     18 |    108 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     34 |     29 |     14 |      4 |      6 |     92 |      0 |      1 | s03      | R    |
| 43350000 |    499 |    280 |     75 |    13 |    0 |    119 |    1 |    2 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    212 |    287 |      39 |       3 |       0 |      13 |      8 |      6 |      0 |      4 |      1 |      1 |      0 |      3 |      1 |      0 |      0 |      0 |     23 |      3 |      0 |     11 |      5 |      2 |      0 |     10 |       0 |       1 |       0 |       1 |      7 |      1 |      0 |      7 |       13 |       13 |       21 |       23 |       24 |       10 |       3 |       39 |       19 |       29 |       33 |       33 |       19 |       1 |        4 |        5 |        7 |        6 |       11 |        8 |       0 |        0 |        7 |        5 |        6 |        8 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       14 |       13 |       11 |        6 |        5 |       0 |       30 |       23 |       10 |        9 |        5 |        3 |       0 |      0 |      7 |     43 |     42 |     19 |      8 |      9 |    152 |      0 |      0 |      0 |      3 |     12 |      5 |      4 |      5 |     46 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     19 |      6 |      5 |      2 |     96 |      0 |      1 | s03      | R    |
| 43351000 |    251 |    110 |     49 |     3 |    0 |     75 |    2 |    5 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    127 |    124 |      23 |       5 |       0 |       8 |      1 |      1 |      0 |      4 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      5 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      3 |        5 |       17 |       14 |        6 |        7 |        1 |       0 |       18 |       18 |        8 |        9 |        5 |        2 |       0 |        8 |       10 |        5 |        3 |        3 |        3 |       0 |        4 |        6 |        1 |        0 |        4 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       18 |       13 |        3 |        0 |        0 |       0 |       17 |       21 |        4 |        2 |        3 |        0 |       0 |      0 |      3 |     11 |     16 |      2 |      2 |      2 |     74 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      3 |      0 |      0 |      1 |     79 |      0 |      1 | s03      | R    |
| 43360001 |    273 |    131 |     73 |     7 |    0 |     60 |    2 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    145 |    128 |       7 |       6 |       0 |       3 |      5 |      0 |      0 |      5 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      1 |      1 |      7 |      0 |      6 |      5 |      1 |      0 |      2 |       1 |       1 |       0 |       1 |      3 |      2 |      0 |      0 |        3 |        7 |       18 |       20 |       12 |        3 |       1 |        6 |        8 |       16 |       23 |       11 |        3 |       0 |        2 |        4 |       11 |       14 |        8 |        4 |       0 |        5 |        2 |        8 |        7 |        4 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        3 |       13 |        8 |        8 |        2 |       0 |        7 |        2 |        8 |        8 |        5 |        1 |       0 |      0 |      2 |     14 |     14 |     12 |      5 |      3 |     81 |      0 |      0 |      0 |      3 |     13 |      4 |      0 |      3 |     50 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |      3 |      2 |      2 |      4 |     46 |      0 |      1 | s03      | R    |
| 43361000 |    839 |    454 |    211 |    18 |    0 |    147 |    1 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    410 |    429 |      44 |      22 |       0 |      17 |     11 |      6 |      0 |      8 |      3 |      1 |      0 |      0 |      5 |      0 |      0 |      2 |     17 |     11 |      0 |     16 |     14 |      9 |      0 |      9 |       5 |       3 |       0 |       4 |      6 |      0 |      0 |      6 |        8 |       19 |       39 |       52 |       56 |       23 |       5 |       23 |       31 |       46 |       68 |       55 |       19 |      10 |        5 |       18 |       14 |       26 |       37 |        8 |       6 |        4 |        9 |       12 |       20 |       35 |       11 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       24 |       21 |       13 |       18 |        9 |       1 |       20 |        7 |       13 |       13 |       20 |        6 |       1 |      0 |      6 |     48 |     86 |     33 |     15 |     21 |    245 |      0 |      0 |      2 |     17 |     34 |     13 |      9 |     13 |    123 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     35 |     12 |      3 |      6 |     98 |      0 |      1 | s03      | R    |
| 43362000 |      1 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43370001 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43370002 |    730 |    371 |    178 |    11 |    0 |    134 |    8 |    3 |    25 |    0 |    0 |    0 |    0 |    0 |    0 |    367 |    363 |      42 |       5 |       0 |      17 |     22 |      6 |      0 |     11 |      3 |      0 |      0 |      0 |      6 |      0 |      0 |      2 |      2 |      0 |      0 |      4 |      5 |      1 |      0 |      7 |       1 |       0 |       0 |       3 |      9 |      6 |      0 |      5 |        7 |       21 |       32 |       45 |       35 |       14 |      11 |       13 |       38 |       33 |       53 |       35 |       25 |       9 |        4 |       13 |       17 |       25 |       18 |       19 |       2 |        4 |       14 |       16 |       19 |       11 |       13 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       25 |       30 |       18 |       16 |        6 |       0 |        9 |       22 |       19 |       18 |        8 |        1 |       0 |      0 |      1 |     48 |     63 |     25 |     14 |     20 |    200 |      0 |      0 |      2 |     19 |     20 |     15 |      5 |     12 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     28 |      7 |      4 |      3 |    117 |      0 |      1 | s03      | R    |
| 43371000 |    300 |    152 |     87 |     5 |    0 |     55 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    150 |    150 |       8 |       4 |       0 |       6 |      2 |      3 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      5 |      9 |      5 |      0 |      9 |      3 |      0 |      0 |      5 |       0 |       0 |       0 |       1 |      4 |      1 |      0 |      5 |        3 |        9 |       14 |       22 |       15 |        5 |       1 |        6 |        5 |       23 |       24 |       19 |        5 |       1 |        4 |        6 |       13 |       13 |       13 |        4 |       1 |        0 |        4 |       10 |        9 |        8 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        6 |        5 |        9 |        2 |       0 |        4 |        2 |       13 |       11 |        3 |        1 |       0 |      0 |      1 |     13 |     67 |     18 |      5 |      6 |     42 |      0 |      0 |      0 |     12 |     42 |      9 |      0 |      1 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     17 |      3 |      0 |      1 |     27 |      0 |      1 | s03      | R    |
| 43380000 |    372 |    165 |    144 |     7 |    0 |     51 |    3 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    182 |    190 |       7 |       1 |       0 |       5 |      7 |      7 |      0 |      5 |      2 |      2 |      0 |      2 |      3 |      0 |      0 |      2 |      8 |     12 |      0 |      2 |      8 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        3 |        9 |        6 |       11 |       21 |       15 |       9 |        5 |        3 |       12 |       18 |       23 |       15 |      15 |        4 |        5 |        8 |        8 |       21 |       25 |       7 |        1 |        2 |        6 |       11 |       20 |       12 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        7 |        4 |        9 |        4 |        2 |       0 |        3 |        7 |        4 |        3 |        8 |        7 |       1 |      0 |      2 |     12 |     27 |      8 |     14 |      9 |     93 |      0 |      0 |      0 |      8 |     14 |      9 |      4 |      4 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      8 |     12 |      0 |      2 |      3 |     36 |      0 |      1 | s03      | R    |
| 43390001 |     64 |     30 |     14 |     3 |    0 |     17 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     28 |     36 |       4 |       0 |       0 |       2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        3 |        2 |        1 |        2 |       0 |        1 |        5 |        1 |        5 |        6 |        2 |       1 |        0 |        1 |        0 |        1 |        1 |        3 |       0 |        1 |        3 |        0 |        3 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        5 |        3 |        2 |        1 |        2 |       0 |        1 |        2 |        1 |        0 |        2 |        1 |       0 |      0 |      1 |      1 |      7 |      5 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |      9 |      0 |      1 | s03      | R    |
| 43390002 |    341 |    159 |    118 |     2 |    0 |     57 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    167 |    174 |      15 |       3 |       0 |       3 |      6 |      2 |      0 |      2 |      0 |      2 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      6 |      0 |      3 |      2 |      2 |      0 |      2 |       1 |       0 |       0 |       0 |      2 |      3 |      0 |      2 |        1 |        5 |        9 |       17 |       21 |       11 |       8 |        0 |       10 |       15 |       21 |       15 |       10 |      16 |        3 |        5 |        2 |       20 |        5 |       14 |      12 |        1 |        4 |        1 |       14 |       10 |        9 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        4 |        9 |        6 |        6 |        4 |       1 |        6 |        4 |        7 |        7 |        4 |        1 |       1 |      0 |      1 |     11 |     25 |     14 |      8 |     10 |     90 |      0 |      0 |      1 |      9 |     15 |      5 |      1 |      7 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     14 |      5 |      0 |      2 |     33 |      0 |      1 | s03      | R    |
| 43812000 |     14 |      4 |      8 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        2 |        1 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 43814000 |      2 |      0 |      0 |     1 |    0 |      0 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 43850000 |      8 |      1 |      5 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 44010000 |    600 |    311 |    166 |    11 |    0 |    103 |    3 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    265 |    335 |      54 |      17 |       0 |      19 |     11 |      8 |      0 |      4 |      2 |      1 |      0 |      3 |      3 |      3 |      0 |      1 |      8 |      6 |      0 |     13 |      7 |      3 |      0 |      0 |       1 |       1 |       0 |       3 |     16 |      6 |      0 |      6 |        7 |       14 |       25 |       18 |       11 |       22 |      24 |        7 |       17 |       35 |       35 |       11 |       32 |      53 |        8 |        4 |       17 |       16 |        9 |       12 |      17 |        5 |        6 |       15 |       11 |       10 |       14 |      22 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       10 |       15 |       14 |        7 |        4 |       3 |       12 |        7 |       21 |       10 |        4 |        5 |       3 |      0 |      2 |     16 |     36 |     30 |      4 |     14 |    209 |      0 |      0 |      0 |      8 |     27 |      9 |      4 |      6 |    112 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     18 |      4 |      2 |      1 |     82 |      0 |      1 | s03      | R    |
| 44020000 |    725 |    408 |    188 |    17 |    0 |    103 |    4 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    331 |    394 |      96 |      22 |       0 |      12 |     13 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      2 |      4 |      0 |      5 |      7 |      2 |      0 |      2 |       0 |       4 |       0 |       2 |      5 |      6 |      0 |      5 |        5 |       19 |       42 |       30 |       15 |       19 |      40 |       17 |       23 |       49 |       39 |       23 |       32 |      55 |        6 |        4 |       21 |       22 |       13 |        6 |      24 |        6 |       12 |       14 |       15 |        8 |        7 |      30 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       16 |       16 |       15 |        5 |        5 |       1 |       11 |       10 |       12 |       15 |        5 |        8 |       3 |      0 |      0 |     38 |     51 |     32 |     14 |     16 |    257 |      0 |      0 |      0 |     13 |     29 |     11 |      5 |     10 |    120 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     13 |     14 |      8 |      1 |      3 |     88 |      0 |      1 | s03      | R    |
| 44030001 |    373 |    231 |     75 |     6 |    0 |     58 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    176 |    197 |      69 |      13 |       0 |      20 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      4 |      0 |      4 |      4 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      3 |      0 |      0 |        4 |       14 |       11 |       25 |       14 |       14 |      19 |        6 |       11 |       19 |       33 |       13 |       21 |      27 |        0 |        3 |       14 |        6 |        8 |        2 |       2 |        3 |        7 |       10 |        7 |        2 |        8 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        4 |       10 |       11 |        6 |        1 |       1 |        7 |        7 |        5 |        3 |        2 |        3 |       0 |      0 |      0 |     14 |     36 |     21 |      6 |      3 |    151 |      0 |      0 |      0 |      5 |     19 |      7 |      3 |      5 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     13 |      4 |      1 |      1 |     41 |      0 |      1 | s03      | R    |
| 44030002 |    217 |    127 |     45 |     2 |    0 |     42 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    106 |    111 |      32 |       3 |       0 |       8 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      1 |      0 |      3 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      2 |      0 |      2 |        7 |        5 |        9 |       13 |       12 |        8 |       9 |        2 |       12 |        9 |       11 |       13 |        5 |      12 |        1 |        4 |        0 |        7 |        3 |        3 |       1 |        0 |        1 |        3 |        9 |        2 |        3 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        1 |       11 |        3 |        3 |        0 |       0 |        3 |        2 |        4 |        6 |        2 |        2 |       2 |      0 |      2 |      5 |     23 |     10 |      4 |      7 |     76 |      0 |      0 |      0 |      4 |      7 |      4 |      1 |      4 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      7 |      5 |      1 |      0 |     23 |      0 |      1 | s03      | R    |
| 44030003 |     85 |     39 |     27 |     0 |    0 |     18 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     41 |     44 |       5 |       2 |       0 |       1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |        1 |        0 |        4 |        3 |        1 |        2 |       3 |        0 |        4 |        4 |        4 |        5 |        3 |       5 |        1 |        2 |        3 |        2 |        3 |        3 |       2 |        0 |        0 |        1 |        3 |        0 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        0 |        6 |        1 |        0 |        0 |       0 |        1 |        1 |        3 |        3 |        0 |        0 |       0 |      0 |      1 |      2 |      3 |      1 |      0 |      2 |     30 |      0 |      0 |      0 |      2 |      7 |      5 |      0 |      3 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      5 |      2 |      0 |      0 |     10 |      0 |      1 | s03      | R    |
| 44040001 |    410 |    238 |     90 |     7 |    0 |     70 |    2 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    186 |    224 |      46 |       6 |       0 |      18 |      9 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |       0 |       2 |       0 |       0 |      5 |      0 |      0 |      3 |        6 |       15 |       15 |       24 |       13 |       15 |      12 |        9 |       18 |       29 |       37 |       14 |       14 |      17 |        2 |        6 |       16 |        7 |        4 |        2 |       6 |        1 |        4 |       11 |       10 |        9 |        6 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        5 |        8 |       13 |        4 |        6 |       0 |       10 |        9 |        8 |        4 |        3 |        1 |       4 |      0 |      0 |     17 |     51 |     26 |      3 |     13 |    128 |      0 |      0 |      0 |      6 |     15 |      7 |      2 |      3 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     14 |      8 |      2 |      3 |     42 |      0 |      1 | s03      | R    |
| 44040002 |    357 |    211 |     79 |     9 |    0 |     54 |    0 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    167 |    190 |      42 |       7 |       0 |      12 |      8 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      2 |        5 |        9 |       15 |       20 |        9 |        3 |      20 |        7 |       18 |       28 |       26 |       16 |       12 |      23 |        2 |        3 |       17 |        7 |        6 |        3 |       7 |        1 |        3 |        8 |        4 |        3 |        5 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        8 |       11 |        7 |        4 |        3 |       1 |        6 |        5 |        5 |        7 |        2 |        1 |       0 |      0 |      1 |     11 |     31 |     25 |      4 |      6 |    133 |      0 |      0 |      0 |      2 |     10 |     12 |      3 |      2 |     50 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     14 |      5 |      1 |      1 |     41 |      0 |      1 | s03      | R    |
| 44050000 |    631 |    366 |    142 |    14 |    0 |    102 |    2 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    272 |    359 |      77 |       6 |       0 |      16 |     11 |      2 |      0 |      5 |      1 |      0 |      0 |      0 |      5 |      2 |      0 |      3 |     12 |      4 |      0 |      5 |      1 |      0 |      0 |      0 |       3 |       2 |       0 |       4 |      8 |      7 |      0 |      4 |        3 |       14 |       21 |       40 |       15 |       15 |      37 |        7 |       31 |       42 |       41 |       26 |       23 |      51 |        3 |        6 |       10 |       17 |        8 |        9 |      13 |        1 |       11 |       10 |       14 |        8 |       13 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       12 |       12 |        9 |        5 |       11 |       3 |       12 |       15 |       11 |        8 |        3 |        9 |       4 |      0 |      3 |     28 |     61 |     28 |      7 |      9 |    230 |      0 |      0 |      0 |      3 |     23 |     11 |     10 |      3 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     18 |      3 |      1 |      5 |     78 |      0 |      1 | s03      | R    |
| 44060000 |    483 |    282 |    109 |     8 |    0 |     80 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    222 |    261 |      58 |       4 |       0 |      19 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |     12 |      2 |      0 |     14 |      1 |      0 |      0 |      1 |       1 |       1 |       0 |       0 |      2 |      3 |      0 |      0 |        8 |       12 |       19 |       24 |        8 |       17 |      32 |       10 |       13 |       18 |       34 |       21 |       27 |      39 |        2 |        4 |       12 |       13 |       12 |        4 |      12 |        2 |        3 |       12 |        8 |        3 |       10 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        7 |       10 |       12 |        5 |        3 |       1 |        5 |       11 |       13 |       10 |        5 |        5 |       0 |      0 |      3 |     17 |     31 |     19 |      6 |     12 |    194 |      0 |      0 |      0 |      7 |     14 |      7 |      3 |      7 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     19 |      5 |      1 |      4 |     49 |      0 |      1 | s03      | R    |
| 44061001 |     38 |     25 |      5 |     2 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     15 |     23 |       7 |       0 |       0 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        1 |        2 |        2 |        1 |       0 |        2 |        0 |        2 |        3 |        3 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        3 |        1 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      4 |      2 |      0 |      1 |     15 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 44061002 |    611 |    322 |    154 |     9 |    0 |    122 |    3 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    281 |    330 |      68 |      16 |       0 |      21 |      8 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |     24 |      5 |      0 |     21 |      4 |      0 |      0 |      1 |       3 |       0 |       0 |       5 |      6 |      6 |      0 |     11 |       13 |       12 |       23 |       29 |       13 |       18 |      26 |       12 |       20 |       25 |       35 |       24 |       30 |      42 |        6 |        7 |       19 |       19 |        7 |       11 |      11 |        1 |        4 |       12 |       17 |       10 |       13 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       10 |       16 |       15 |        7 |        4 |       3 |       11 |        8 |       24 |       15 |        1 |        7 |       2 |      0 |      1 |     21 |     44 |     35 |      6 |     11 |    204 |      0 |      0 |      1 |      8 |     21 |     16 |      4 |      9 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     18 |     12 |      3 |      5 |     74 |      0 |      1 | s03      | R    |
| 44070001 |    454 |    278 |     95 |     2 |    0 |     72 |    3 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    204 |    250 |      64 |       8 |       0 |      25 |     11 |      6 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      3 |      0 |      5 |      5 |      1 |      0 |      0 |       1 |       2 |       0 |       0 |      8 |      0 |      0 |      3 |       12 |        8 |       16 |       27 |       19 |       17 |      22 |       18 |       13 |       22 |       42 |       10 |       15 |      37 |        3 |        3 |       11 |        9 |        6 |        1 |       8 |        6 |        3 |        9 |       12 |        5 |        6 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       10 |        9 |        8 |        6 |        2 |       0 |        9 |        9 |        6 |        8 |        2 |        5 |       0 |      0 |      0 |     15 |     41 |     20 |      4 |      8 |    190 |      0 |      0 |      0 |      3 |     16 |      9 |      2 |      7 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |     15 |      3 |      0 |      2 |     43 |      0 |      1 | s03      | R    |
| 44070002 |     57 |     44 |      9 |     0 |    0 |      3 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     22 |     35 |      10 |       2 |       0 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        2 |        4 |        2 |        2 |        1 |       4 |        3 |        3 |        4 |        5 |        3 |        3 |       7 |        0 |        1 |        0 |        2 |        1 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      2 |     10 |      3 |      0 |      2 |     27 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      1 | s03      | R    |
| 44070003 |     45 |     23 |     13 |     0 |    0 |      8 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     27 |     18 |       7 |       2 |       0 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        3 |        3 |        4 |        3 |        0 |       1 |        1 |        1 |        1 |        2 |        1 |        1 |       1 |        0 |        0 |        2 |        1 |        3 |        1 |       1 |        0 |        0 |        0 |        2 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        1 |       0 |        2 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      2 |      9 |      3 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      4 |      0 |      1 |      0 |      1 | s03      | R    |
| 44080000 |    624 |    345 |    157 |     5 |    0 |    106 |    5 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    282 |    342 |      62 |      10 |       0 |      22 |     16 |      9 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |     11 |      6 |      0 |     16 |      2 |      0 |      0 |      1 |       3 |       1 |       0 |       3 |      9 |      5 |      0 |      3 |        9 |       20 |       20 |       30 |       19 |       23 |      29 |       12 |       19 |       27 |       42 |       24 |       27 |      44 |        3 |        5 |       10 |       19 |        6 |       10 |      19 |        7 |        2 |        9 |       19 |        7 |       12 |      29 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       21 |       10 |       14 |        7 |        4 |       0 |       15 |       13 |       13 |       12 |        6 |        2 |       1 |      0 |      1 |     22 |     66 |     20 |     15 |     15 |    206 |      0 |      0 |      0 |     12 |     19 |      8 |      3 |     13 |    102 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     25 |     12 |      0 |      4 |     63 |      0 |      1 | s03      | R    |
| 44090000 |    864 |    493 |    185 |    21 |    0 |    151 |    3 |    5 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    421 |    443 |     110 |      17 |       0 |      37 |     17 |     12 |      0 |      4 |      4 |      0 |      0 |      3 |      1 |      1 |      0 |      2 |     16 |      2 |      0 |     20 |      5 |      6 |      0 |      4 |       1 |       2 |       0 |       4 |     13 |      5 |      0 |      6 |       17 |       27 |       43 |       50 |       31 |       25 |      32 |       26 |       32 |       51 |       61 |       33 |       29 |      36 |        5 |       13 |       18 |       24 |       18 |        9 |       8 |        5 |       18 |       15 |       19 |        8 |       11 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       25 |       18 |       20 |       14 |        8 |       3 |       13 |       20 |       18 |       21 |        6 |        3 |       4 |      0 |      2 |     50 |     67 |     28 |      9 |     31 |    306 |      0 |      0 |      1 |     21 |     29 |     10 |      5 |      4 |    115 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     36 |     25 |     10 |      6 |      5 |    102 |      0 |      1 | s03      | R    |
| 44100001 |     24 |     17 |      4 |     1 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |     10 |       8 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        2 |        3 |        0 |        1 |       3 |        1 |        2 |        2 |        2 |        0 |        0 |       1 |        0 |        0 |        1 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 44100002 |    670 |    401 |    137 |    14 |    0 |    104 |    3 |    0 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    290 |    380 |      84 |      10 |       0 |      24 |      6 |      2 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |     13 |      2 |      0 |     17 |      6 |      0 |      0 |      1 |       2 |       0 |       0 |       1 |     11 |      2 |      0 |      6 |        8 |       25 |       35 |       36 |       21 |       18 |      20 |       18 |       35 |       44 |       46 |       33 |       22 |      40 |        1 |        4 |       23 |       15 |       10 |        7 |       9 |        2 |        4 |       16 |       17 |        7 |        9 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       12 |       16 |       12 |        4 |        1 |       1 |       14 |       13 |       20 |       17 |        7 |        2 |       1 |      0 |      2 |     40 |     62 |     32 |     10 |     22 |    233 |      0 |      0 |      0 |      9 |     17 |     15 |      6 |     10 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     23 |     11 |      5 |      5 |     74 |      0 |      1 | s03      | R    |
| 44110001 |    738 |    412 |    167 |    14 |    0 |    127 |    5 |    1 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    346 |    392 |      88 |      12 |       0 |      34 |     17 |     10 |      0 |     11 |      0 |      1 |      0 |      3 |      1 |      0 |      0 |      0 |      7 |      1 |      0 |      4 |      5 |      2 |      0 |      1 |       5 |       1 |       0 |       1 |     13 |      0 |      0 |      4 |       16 |       29 |       38 |       43 |       16 |       16 |      20 |       17 |       32 |       40 |       45 |       32 |       32 |      36 |        4 |       10 |       19 |       25 |        7 |        6 |      15 |        6 |       12 |       14 |       20 |        5 |       13 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       23 |       15 |       24 |       10 |        2 |       2 |       19 |       15 |       15 |       13 |        8 |        4 |       3 |      0 |      0 |     32 |     67 |     49 |      5 |      6 |    253 |      0 |      0 |      1 |      7 |     21 |      8 |      5 |      6 |    119 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     19 |     10 |      6 |      8 |     89 |      0 |      1 | s03      | R    |
| 44110003 |     38 |     19 |      5 |     2 |    0 |     12 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     17 |     21 |       2 |       0 |       0 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        4 |        0 |        0 |       1 |        1 |        0 |        1 |        2 |        1 |        5 |       1 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        2 |        1 |        0 |        2 |       0 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      8 |      0 |      1 | s03      | R    |
| 44130001 |     37 |     23 |      9 |     0 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     17 |     20 |      12 |       0 |       0 |       3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      1 |        0 |        1 |        0 |        2 |        4 |        2 |       1 |        2 |        2 |        3 |        3 |        1 |        1 |       1 |        0 |        0 |        2 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      8 |      2 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 44130002 |     49 |     28 |     16 |     1 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     29 |       7 |       2 |       0 |       1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        3 |        1 |        1 |        3 |        1 |       2 |        0 |        5 |        1 |        2 |        4 |        0 |       5 |        0 |        0 |        1 |        2 |        0 |        0 |       4 |        1 |        0 |        1 |        1 |        1 |        0 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      3 |      1 |      2 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 44130003 |    569 |    348 |    106 |    11 |    0 |     93 |    5 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    260 |    309 |      83 |       9 |       0 |      23 |      5 |      1 |      0 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      3 |      0 |      6 |      1 |      0 |      0 |      0 |       7 |       2 |       0 |       3 |     11 |      0 |      0 |      6 |       10 |       14 |       34 |       28 |       11 |       11 |      38 |       13 |       29 |       43 |       41 |       19 |       27 |      30 |        1 |       10 |       15 |       15 |        5 |        5 |       6 |        2 |        3 |        7 |        6 |        8 |        9 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       10 |       18 |       10 |        6 |        6 |       0 |       10 |       11 |       13 |       15 |        8 |        0 |       1 |      0 |      0 |     19 |     48 |     30 |     16 |     16 |    219 |      0 |      0 |      0 |      9 |     15 |      6 |      3 |      7 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     27 |     23 |      4 |      3 |      4 |     54 |      0 |      1 | s03      | R    |
| 44140000 |    776 |    448 |    158 |    14 |    0 |    149 |    5 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    337 |    439 |     119 |      28 |       0 |      28 |     11 |      3 |      0 |      5 |      3 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |     14 |      6 |      0 |     20 |      7 |      3 |      0 |      2 |       3 |       2 |       0 |       6 |     12 |      5 |      0 |      8 |       20 |       18 |       36 |       34 |       19 |       34 |      23 |       18 |       24 |       43 |       47 |       23 |       70 |      39 |        5 |        5 |       16 |       18 |        4 |       15 |       5 |        7 |        7 |       15 |       16 |        8 |       23 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       16 |       14 |       24 |        9 |       18 |       0 |       13 |       15 |       17 |       19 |       10 |       10 |       1 |      0 |      1 |     44 |     76 |     51 |     11 |     14 |    251 |      0 |      0 |      0 |      9 |     18 |     14 |      9 |      7 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     31 |     25 |     14 |      5 |      3 |     91 |      0 |      1 | s03      | R    |
| 44200000 |    490 |    279 |    113 |    12 |    0 |     79 |    2 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    226 |    264 |      59 |      14 |       0 |      27 |      5 |      6 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      0 |      2 |      0 |      2 |       0 |       1 |       0 |       2 |      9 |      4 |      0 |      4 |        9 |       15 |       20 |       15 |       13 |       16 |      30 |        6 |       21 |       34 |       31 |       11 |       22 |      36 |        2 |        5 |        6 |       16 |       11 |        6 |      10 |        2 |        6 |       10 |        9 |        5 |        8 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        9 |       15 |       11 |        6 |        6 |       2 |        7 |       16 |        7 |        6 |        4 |        5 |       1 |      0 |      6 |     22 |     27 |     22 |      9 |     13 |    180 |      0 |      0 |      2 |      6 |     12 |      7 |      2 |     10 |     74 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     20 |      6 |      1 |      4 |     47 |      0 |      1 | s03      | R    |
| 44210000 |    485 |    288 |    115 |     7 |    0 |     70 |    4 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    229 |    256 |      45 |      11 |       0 |      18 |     11 |      3 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      2 |      0 |      7 |      2 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |     15 |      2 |      0 |      2 |        9 |       10 |       32 |       23 |       12 |       21 |      28 |        5 |       16 |       26 |       23 |       22 |       28 |      33 |        0 |        7 |        5 |        6 |        7 |       10 |      15 |        3 |        3 |       12 |       11 |        3 |       14 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        7 |       13 |        7 |        7 |        2 |       0 |        5 |        5 |       14 |        8 |        2 |        3 |       1 |      0 |      0 |     22 |     42 |     19 |     11 |      8 |    186 |      0 |      0 |      1 |      9 |     11 |      6 |      3 |      9 |     76 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      8 |      3 |      7 |      2 |     49 |      0 |      1 | s03      | R    |
| 44220001 |     57 |     33 |      8 |     0 |    0 |     16 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     23 |     34 |      12 |       2 |       0 |       4 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        4 |        4 |        4 |        0 |       2 |        1 |        2 |        4 |        2 |        2 |        4 |       3 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        2 |        3 |        3 |        2 |        1 |        0 |       1 |      0 |      1 |      3 |      6 |      4 |      1 |      0 |     18 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     12 |      0 |      1 | s03      | R    |
| 44220002 |    446 |    282 |     82 |    10 |    0 |     67 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    200 |    246 |      67 |      16 |       0 |      27 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      5 |      2 |      1 |      0 |      4 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      3 |      2 |      0 |      2 |        6 |       16 |       11 |       26 |       16 |       14 |      32 |       15 |       22 |       26 |       22 |        8 |       26 |      42 |        3 |        8 |        9 |        4 |        4 |        4 |       7 |        3 |        4 |        4 |        5 |        9 |        4 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        7 |       11 |        6 |        5 |        2 |       2 |        9 |        7 |        8 |       11 |        3 |        1 |       3 |      0 |      0 |     25 |     35 |     18 |      2 |      7 |    195 |      0 |      0 |      0 |      3 |     15 |      6 |      1 |      1 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     12 |      7 |      3 |      1 |     50 |      0 |      1 | s03      | R    |
| 44260001 |    108 |     67 |     12 |     2 |    0 |     27 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     51 |     57 |       5 |       0 |       0 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      2 |        3 |        5 |        5 |       11 |        4 |        0 |       1 |        0 |        9 |       10 |       12 |        4 |        3 |       0 |        0 |        4 |        0 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        6 |        4 |        4 |        1 |        0 |       0 |        1 |        6 |        4 |        1 |        0 |        1 |       0 |      0 |      1 |      8 |      6 |      2 |      0 |      1 |     49 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      7 |      4 |      0 |      0 |     13 |      0 |      1 | s03      | R    |
| 44260002 |    686 |    399 |    109 |    20 |    0 |    154 |    3 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    342 |    344 |      74 |      22 |       0 |      35 |      5 |      2 |      0 |      5 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |     27 |     14 |      0 |     47 |      4 |      4 |      0 |      1 |       9 |      11 |       0 |       7 |     27 |      2 |      0 |     15 |       18 |       31 |       43 |       41 |       20 |       21 |      11 |       22 |       34 |       40 |       50 |       22 |       30 |      16 |        2 |        6 |       21 |       10 |        6 |       15 |       4 |        3 |        8 |       11 |       11 |        1 |        7 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       21 |       19 |       20 |        6 |       12 |       0 |        7 |       21 |       16 |       26 |        9 |        6 |       0 |      0 |      4 |     44 |     91 |     25 |     11 |      2 |    222 |      0 |      0 |      2 |     10 |     18 |      9 |      0 |      5 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     24 |     36 |      5 |      2 |      0 |    109 |      0 |      1 | s03      | R    |
| 44270000 |    717 |    425 |    130 |     4 |    0 |    152 |    2 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    333 |    384 |     110 |      20 |       0 |      23 |     12 |      3 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     18 |      6 |      0 |     45 |      2 |      0 |      0 |      1 |       7 |       4 |       0 |       7 |     17 |      4 |      0 |      8 |       11 |       24 |       23 |       50 |       15 |       27 |      36 |       14 |       20 |       40 |       58 |       15 |       33 |      59 |        5 |        9 |       12 |       14 |        6 |       12 |      12 |        2 |       10 |        8 |       13 |        3 |       10 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       12 |       16 |       18 |        8 |       13 |       2 |        8 |       14 |       23 |       14 |       16 |        9 |       1 |      0 |      0 |     41 |     50 |     25 |     12 |     11 |    286 |      0 |      0 |      0 |     13 |     21 |     14 |      3 |      5 |     74 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     40 |     10 |      4 |      2 |     88 |      0 |      1 | s03      | R    |
| 44280000 |    559 |    334 |    102 |    13 |    0 |    101 |    2 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    322 |      77 |      15 |       0 |      30 |      8 |      1 |      0 |      9 |      0 |      1 |      0 |      1 |      2 |      2 |      0 |      0 |      1 |      0 |      0 |      2 |      3 |      0 |      0 |      2 |       2 |       3 |       0 |       3 |     15 |      3 |      0 |      3 |        8 |       18 |       32 |       24 |       19 |       20 |      11 |       14 |       34 |       31 |       46 |       17 |       39 |      21 |        4 |        8 |       12 |       10 |        3 |        7 |       7 |        3 |        8 |        4 |       18 |        8 |        8 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       12 |       15 |        9 |        5 |        5 |       1 |       12 |       20 |       11 |       12 |        7 |        6 |       1 |      0 |      1 |     37 |     56 |     28 |     13 |      7 |    192 |      0 |      0 |      1 |      7 |     23 |      2 |      4 |      5 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     26 |     10 |      4 |      1 |     60 |      0 |      1 | s03      | R    |
| 44300000 |    527 |    331 |     79 |     9 |    0 |     98 |    5 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    251 |    276 |      96 |      19 |       0 |      29 |     11 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      7 |      3 |      0 |      4 |      7 |      0 |      0 |      3 |       1 |       0 |       0 |       1 |      7 |      2 |      0 |      2 |        7 |       18 |       33 |       40 |       14 |       25 |       7 |        8 |       39 |       40 |       40 |       27 |       20 |      13 |        1 |        7 |       19 |        7 |        4 |        3 |       3 |        2 |        7 |        6 |        6 |        7 |        5 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       17 |       12 |       12 |       10 |        5 |       1 |        3 |       19 |       15 |        7 |        9 |        1 |       0 |      0 |      1 |     33 |     69 |     34 |      7 |      8 |    179 |      0 |      0 |      0 |      6 |     16 |     10 |      5 |      3 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |     28 |      6 |      4 |      4 |     56 |      0 |      1 | s03      | R    |
| 44310001 |    296 |    181 |     37 |     9 |    0 |     65 |    1 |    3 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    127 |    169 |      44 |       7 |       0 |      15 |      5 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      3 |      1 |      0 |      4 |       1 |       1 |       0 |       2 |      5 |      3 |      0 |      2 |        4 |        9 |       12 |       23 |       10 |        9 |       4 |        6 |       24 |       22 |       24 |       14 |       12 |       8 |        2 |        1 |        5 |        4 |        2 |        5 |       0 |        1 |        3 |        2 |        5 |        2 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        8 |        8 |       10 |        3 |        2 |       1 |        3 |       15 |        6 |       12 |        2 |        2 |       1 |      0 |      3 |     31 |     32 |     13 |      2 |      6 |     94 |      0 |      0 |      0 |      4 |      2 |      5 |      3 |      2 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |     15 |      3 |      2 |      0 |     36 |      0 |      1 | s03      | R    |
| 44310002 |     10 |      3 |      6 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      5 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 44310003 |    431 |    269 |     65 |     9 |    0 |     84 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    200 |    231 |      85 |       6 |       0 |      19 |      6 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |     10 |      4 |      0 |      4 |      5 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       2 |      7 |      2 |      0 |      2 |       12 |       23 |       22 |       24 |       11 |       15 |      12 |       12 |       19 |       38 |       35 |       15 |       18 |      13 |        1 |        6 |        8 |       11 |        7 |        0 |       1 |        1 |        6 |        6 |        6 |        4 |        5 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       14 |       13 |        7 |        4 |        2 |       0 |        6 |       15 |       12 |       10 |        1 |        6 |       0 |      0 |      1 |     27 |     50 |     18 |      9 |     10 |    154 |      0 |      0 |      0 |     10 |     15 |     10 |      1 |      4 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     19 |      2 |      1 |      3 |     54 |      0 |      1 | s03      | R    |
| 44320001 |    363 |    226 |     35 |     7 |    0 |     88 |    3 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    163 |    200 |      43 |      13 |       0 |      26 |      3 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      6 |      6 |      0 |      0 |      2 |       1 |       0 |       0 |       0 |      3 |      3 |      0 |      2 |       10 |       18 |       14 |       24 |       14 |       13 |       4 |       12 |       29 |       30 |       22 |       20 |        9 |       7 |        1 |        0 |        5 |        7 |        3 |        1 |       0 |        2 |        3 |        5 |        3 |        1 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       14 |        8 |       13 |        9 |        1 |       0 |        9 |       17 |       16 |        5 |        3 |        3 |       0 |      0 |      4 |     30 |     31 |     16 |      4 |      5 |    136 |      0 |      0 |      1 |      5 |      9 |      2 |      0 |      2 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |      7 |      2 |      1 |      3 |     72 |      0 |      1 | s03      | R    |
| 44320002 |    235 |    148 |     42 |     9 |    0 |     30 |    3 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    115 |    120 |      36 |      10 |       0 |       5 |      5 |      2 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |       1 |       0 |       0 |       0 |      2 |      1 |      0 |      3 |        3 |       11 |       16 |       11 |       10 |       11 |       8 |        3 |        9 |       12 |       16 |       12 |        9 |      17 |        1 |        1 |        6 |        3 |        3 |        7 |       3 |        0 |        4 |        1 |        4 |        1 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        6 |        2 |        8 |        1 |        1 |       0 |        2 |        8 |        5 |        7 |        2 |        0 |       0 |      0 |      2 |      9 |     27 |     11 |      4 |      9 |     86 |      0 |      0 |      0 |      3 |      3 |      1 |      4 |      6 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      9 |      2 |      0 |      2 |     28 |      0 |      1 | s03      | R    |
| 44330001 |    635 |    431 |     65 |    11 |    0 |    115 |    2 |    7 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    258 |    377 |      71 |      11 |       0 |      27 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |     11 |      3 |      0 |      5 |      4 |      0 |      0 |      5 |       1 |       1 |       0 |       0 |     20 |      6 |      0 |     11 |        7 |       36 |       36 |       38 |       15 |       19 |      11 |       27 |       66 |       67 |       48 |       22 |       24 |      15 |        2 |        6 |        6 |        7 |        3 |        4 |       3 |        3 |        9 |        1 |        8 |        5 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       15 |        9 |       17 |        9 |        6 |       0 |       14 |       19 |       20 |       14 |        4 |        3 |       0 |      0 |      4 |     54 |     91 |     25 |      3 |     10 |    244 |      0 |      0 |      0 |      8 |      5 |      2 |      2 |      3 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     20 |      5 |      2 |      2 |     84 |      0 |      1 | s03      | R    |
| 44330002 |     49 |     27 |      8 |     1 |    0 |     13 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     29 |       4 |       1 |       0 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        0 |        3 |        1 |        4 |        1 |        1 |       0 |        4 |        3 |        4 |        2 |        1 |        2 |       1 |        0 |        2 |        0 |        0 |        0 |        2 |       0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        3 |       0 |        1 |        3 |        0 |        0 |        3 |        1 |       0 |      0 |      0 |      7 |      4 |      2 |      0 |      1 |     13 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 44340000 |    879 |    585 |     99 |    31 |    0 |    147 |    3 |    8 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    356 |    523 |      94 |      18 |       0 |      40 |      8 |      5 |      0 |      4 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     12 |      3 |      0 |      1 |      3 |      1 |      0 |      2 |       6 |       4 |       0 |       2 |     12 |      2 |      0 |      9 |       13 |       50 |       43 |       46 |       35 |       24 |       1 |       21 |       99 |       94 |       78 |       34 |       39 |       8 |        3 |       10 |       13 |        5 |       11 |        6 |       3 |        2 |       10 |        9 |        7 |        5 |       13 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       21 |       24 |       16 |        6 |        8 |       2 |       14 |       32 |       27 |       12 |       10 |        7 |       0 |      0 |      5 |     97 |    100 |     33 |     13 |     15 |    322 |      0 |      0 |      2 |     15 |     13 |     10 |      4 |      2 |     53 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     43 |     41 |      4 |      2 |      3 |    100 |      0 |      1 | s03      | R    |
| 44350000 |    570 |    387 |     74 |    13 |    0 |     86 |    2 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    238 |    332 |      96 |      12 |       0 |      24 |      4 |      3 |      0 |      0 |      1 |      1 |      0 |      2 |      2 |      0 |      0 |      1 |      4 |      2 |      0 |      3 |     12 |      2 |      0 |      2 |       1 |       3 |       0 |       3 |      5 |      3 |      0 |      2 |       12 |       27 |       32 |       29 |       23 |       24 |       7 |       15 |       47 |       59 |       47 |       18 |       30 |      17 |        2 |        6 |        9 |        4 |        8 |        2 |       1 |        4 |       10 |       12 |        7 |        5 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       12 |       14 |       11 |        7 |        4 |       1 |        8 |       15 |       17 |        9 |        2 |        5 |       1 |      0 |      1 |     46 |     73 |     28 |      3 |     12 |    224 |      0 |      0 |      1 |     18 |     13 |      8 |      0 |      1 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     20 |     18 |      7 |      1 |      0 |     60 |      0 |      1 | s03      | R    |
| 44360000 |    446 |    296 |     57 |     8 |    0 |     77 |    4 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    192 |    254 |      75 |      15 |       0 |      16 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |     14 |      4 |      0 |     10 |      2 |      1 |      0 |      0 |       2 |       0 |       0 |       5 |      9 |      0 |      0 |      5 |        8 |       18 |       26 |       30 |        9 |       24 |       6 |        8 |       28 |       29 |       29 |       27 |       34 |      20 |        2 |        3 |        3 |       10 |        3 |        5 |       1 |        3 |        4 |        4 |        2 |        7 |        7 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       10 |       13 |        9 |        5 |        0 |       2 |        5 |       12 |       13 |       13 |        3 |        2 |       1 |      0 |      3 |     43 |     59 |     20 |      7 |      6 |    158 |      0 |      0 |      1 |      4 |      8 |      2 |      2 |      2 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     22 |      1 |      1 |      0 |     43 |      0 |      1 | s03      | R    |
| 44370000 |    367 |    212 |     68 |     4 |    0 |     74 |    2 |    3 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    183 |    184 |      25 |       4 |       0 |      13 |      6 |      4 |      0 |      1 |      2 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      6 |      1 |      0 |      8 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      2 |        3 |       16 |       20 |       22 |       19 |       11 |       3 |        7 |       20 |       31 |       28 |       12 |       11 |       9 |        1 |        8 |       12 |        7 |        2 |        5 |       6 |        1 |        4 |        6 |        5 |        3 |        4 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       14 |       11 |       10 |        6 |        4 |       0 |        2 |        6 |       11 |        9 |        7 |        3 |       1 |      0 |      1 |     18 |     45 |     25 |      2 |      8 |    113 |      0 |      0 |      1 |      8 |      7 |      7 |      6 |      5 |     34 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     10 |     14 |      5 |      4 |      1 |     51 |      0 |      1 | s03      | R    |
| 44380000 |    245 |    143 |     42 |     5 |    0 |     47 |    3 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    116 |    129 |      38 |       5 |       0 |       6 |      5 |      5 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      2 |      0 |      0 |      5 |      1 |      0 |      1 |      1 |      0 |      0 |      3 |       0 |       1 |       0 |       0 |      4 |      2 |      0 |      0 |        7 |        4 |        8 |       17 |       10 |       12 |       6 |        4 |        7 |       13 |       23 |       11 |        9 |      12 |        2 |        2 |        5 |        7 |        5 |        1 |       3 |        0 |        2 |        6 |        2 |        3 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        4 |       11 |        3 |        1 |       0 |        5 |        6 |       11 |        5 |        4 |        1 |       1 |      0 |      1 |     16 |     19 |     10 |      6 |      8 |     83 |      0 |      0 |      0 |      4 |      6 |      2 |      0 |      3 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |      9 |      1 |      5 |      1 |     31 |      0 |      1 | s03      | R    |
| 44701001 |      1 |      0 |      0 |     0 |    0 |      0 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 44710002 |     33 |     21 |      3 |     1 |    0 |      7 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     18 |     15 |       2 |       0 |       0 |       2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        4 |        2 |        2 |       0 |        0 |        0 |        3 |        3 |        3 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 44720000 |    727 |    426 |    157 |    12 |    0 |    125 |    2 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    339 |    388 |      53 |      10 |       0 |      11 |     18 |      6 |      0 |      2 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |      2 |     10 |      6 |      0 |     12 |      2 |      4 |      0 |      1 |       1 |       1 |       0 |       1 |      5 |      4 |      0 |      2 |        8 |       25 |       36 |       40 |       19 |       23 |      32 |        9 |       42 |       42 |       49 |       30 |       28 |      43 |        3 |       11 |       16 |       13 |        5 |       11 |      16 |        2 |        9 |       15 |       12 |        7 |       12 |      25 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        9 |       30 |       22 |       11 |        1 |       3 |        4 |       16 |       14 |       15 |        5 |        7 |       2 |      0 |      1 |     45 |     53 |     42 |      8 |     20 |    257 |      0 |      0 |      0 |      6 |     19 |     11 |      4 |     11 |    106 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     15 |     32 |     13 |      2 |      1 |     78 |      0 |      1 | s03      | R    |
| 44721001 |      5 |      3 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 44721002 |      7 |      5 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 44722000 |     35 |     16 |     13 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     15 |     20 |       2 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        0 |        0 |        2 |        3 |        0 |        1 |       1 |        0 |        2 |        0 |        5 |        0 |        0 |       2 |        0 |        0 |        0 |        2 |        0 |        1 |       2 |        0 |        3 |        0 |        2 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 44723000 |      7 |      1 |      5 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      3 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 | s03      | R    |
| 44730001 |     98 |     58 |     13 |     5 |    0 |     21 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     44 |     54 |      10 |       1 |       0 |       2 |      5 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        1 |        5 |       10 |        2 |        2 |        4 |       3 |        1 |        5 |        6 |       11 |        3 |        5 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        1 |        4 |        0 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        4 |        1 |        1 |        1 |       1 |        2 |        6 |        1 |        3 |        1 |        1 |       0 |      0 |      2 |      6 |      9 |      1 |      1 |      4 |     35 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |     18 |      0 |      1 | s03      | R    |
| 44730002 |     73 |     37 |     25 |     0 |    0 |     11 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     34 |     39 |       4 |       3 |       0 |       1 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        6 |        2 |        1 |        1 |       2 |        0 |        3 |        7 |        5 |        3 |        2 |       5 |        1 |        1 |        3 |        3 |        2 |        1 |       4 |        1 |        1 |        2 |        1 |        2 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        2 |        0 |       1 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |      0 |      1 |      4 |      4 |      6 |      2 |      1 |     19 |      0 |      0 |      0 |      3 |      5 |      0 |      1 |      1 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      8 |      0 |      1 | s03      | R    |
| 44731001 |      5 |      0 |      1 |     1 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       1 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 44731002 |    112 |     61 |     23 |     0 |    0 |     24 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     48 |     64 |       5 |       2 |       0 |       3 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        2 |        5 |        3 |        3 |        2 |        4 |       4 |        0 |        4 |        8 |        9 |        3 |        9 |       5 |        0 |        3 |        1 |        0 |        3 |        3 |       1 |        1 |        0 |        1 |        3 |        2 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        5 |        3 |        3 |        2 |        1 |       0 |        2 |        5 |        2 |        0 |        1 |        4 |       0 |      0 |      0 |      8 |     13 |      1 |      2 |      1 |     36 |      0 |      0 |      0 |      3 |      7 |      2 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |     21 |      0 |      1 | s03      | R    |
| 44740001 |      3 |      3 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 44740002 |    548 |    301 |    116 |    10 |    0 |    103 |    6 |    4 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    249 |    299 |      28 |      10 |       0 |       6 |      6 |      2 |      0 |      6 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      4 |     11 |      0 |     15 |      9 |      2 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      1 |        6 |       22 |       29 |       30 |       22 |       13 |       8 |       12 |       24 |       23 |       54 |       28 |       20 |      10 |        4 |        5 |        8 |       15 |        9 |       12 |       3 |        2 |        4 |       14 |       13 |        7 |       15 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       13 |       15 |       13 |        6 |        8 |       1 |        7 |       19 |       14 |       12 |        9 |        7 |       0 |      0 |      1 |     23 |     50 |     22 |      4 |     14 |    187 |      0 |      0 |      0 |     12 |     22 |      4 |      4 |      6 |     68 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     24 |      6 |      3 |      5 |     77 |      0 |      1 | s03      | R    |
| 44741000 |     14 |      8 |      4 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      9 |       2 |       2 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        2 |        0 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 44751000 |     16 |      5 |      6 |     0 |    0 |      3 |    2 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |      8 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      1 | s03      | R    |
| 44752000 |      9 |      5 |      3 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 44760001 |    302 |    161 |     65 |     8 |    0 |     60 |    1 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    153 |    149 |      15 |       1 |       0 |      12 |      4 |      4 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      4 |      0 |      2 |        2 |       11 |       17 |       13 |       11 |        8 |       9 |        5 |       12 |       20 |       15 |       14 |       12 |      12 |        2 |        2 |        9 |        5 |        6 |        5 |       5 |        0 |        3 |        9 |        5 |        4 |        6 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       11 |       12 |        8 |        4 |        3 |       1 |        3 |       10 |        5 |        7 |        1 |        1 |       1 |      0 |      1 |      9 |     24 |      9 |      5 |      5 |    108 |      0 |      0 |      0 |      6 |      8 |      7 |      2 |      3 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |      6 |      4 |      1 |      0 |     56 |      0 |      1 | s03      | R    |
| 44760002 |    387 |    222 |     71 |    11 |    0 |     78 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    197 |    190 |      33 |       7 |       0 |      13 |      3 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      5 |      0 |      0 |      6 |      6 |      4 |      0 |      7 |       0 |       0 |       0 |       2 |      4 |      2 |      0 |      3 |        5 |       17 |       20 |       19 |       20 |        7 |       6 |        8 |       14 |       28 |       26 |       26 |       17 |       9 |        1 |        7 |        8 |        6 |       12 |        6 |       5 |        2 |        4 |        4 |        6 |        3 |        5 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       18 |       10 |       13 |        4 |        4 |       2 |        4 |       13 |        7 |        9 |        2 |        1 |       0 |      0 |      2 |     34 |     38 |     18 |      3 |     10 |    117 |      0 |      0 |      0 |      5 |     15 |      2 |      6 |      1 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     12 |     18 |      7 |      0 |      1 |     54 |      0 |      1 | s03      | R    |
| 44761000 |     25 |     15 |      5 |     0 |    0 |      4 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |     14 |       0 |       0 |       0 |       2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        2 |        0 |        1 |        2 |        2 |        0 |       0 |        0 |        2 |        0 |        3 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |      0 |      1 |      0 |      5 |      0 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 44762000 |     27 |     14 |      7 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     11 |       3 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      1 |        0 |        1 |        0 |        2 |        1 |        3 |       2 |        0 |        0 |        0 |        0 |        4 |        0 |       1 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      9 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 44763000 |     30 |     15 |     10 |     0 |    0 |      3 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     14 |       1 |       0 |       0 |       0 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        4 |        0 |        1 |       1 |        1 |        0 |        1 |        3 |        0 |        2 |       0 |        2 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      1 |      0 |      1 |      9 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      3 |      0 |      1 | s03      | R    |
| 44770000 |    217 |     90 |     65 |     8 |    0 |     51 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    101 |    116 |       8 |       6 |       0 |      10 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      2 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      1 |        3 |        7 |       10 |        9 |        3 |        6 |       0 |        2 |       12 |       14 |        9 |        5 |        5 |       5 |        6 |        8 |        5 |       11 |        1 |        1 |       2 |        1 |       10 |        5 |        5 |        4 |        1 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        8 |        7 |        7 |        2 |        1 |       0 |        5 |       12 |        8 |        4 |        2 |        2 |       0 |      0 |      1 |      8 |     12 |      9 |      2 |      2 |     56 |      0 |      0 |      1 |      9 |     11 |      4 |      0 |      2 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |     12 |      4 |      0 |      1 |     37 |      0 |      1 | s03      | R    |
| 44772000 |     76 |     39 |     23 |     1 |    0 |     12 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     33 |     43 |       4 |       3 |       0 |       3 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        5 |        5 |        0 |        2 |       1 |        2 |        3 |        5 |        7 |        1 |        4 |       2 |        0 |        1 |        3 |        2 |        3 |        2 |       1 |        1 |        3 |        1 |        1 |        2 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        3 |        0 |       0 |        2 |        2 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |     12 |      4 |      0 |      0 |      1 |     22 |      0 |      0 |      0 |      9 |      5 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      9 |      0 |      1 | s03      | R    |
| 44773001 |      7 |      4 |      1 |     1 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      3 |       2 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 44773002 |     53 |     29 |     14 |     0 |    0 |      9 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     21 |     32 |       6 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |        1 |        0 |        2 |        4 |        2 |        1 |       0 |        1 |        2 |        3 |        9 |        0 |        3 |       1 |        0 |        0 |        1 |        1 |        1 |        3 |       0 |        2 |        1 |        0 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        2 |        1 |       0 |        2 |        0 |        1 |        0 |        0 |        1 |       1 |      0 |      0 |      2 |      5 |      1 |      0 |      2 |     19 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 45020000 |    843 |    459 |    203 |    13 |    0 |    157 |    4 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    389 |    454 |      83 |      29 |       0 |      20 |     13 |     14 |      0 |      2 |      1 |      1 |      0 |      2 |      7 |      4 |      0 |      1 |     43 |     13 |      0 |     57 |      5 |      1 |      0 |      1 |      16 |      12 |       0 |       6 |     12 |      4 |      0 |      5 |        8 |       15 |       38 |       41 |       22 |       36 |      34 |       14 |       30 |       45 |       57 |       34 |       37 |      48 |        9 |       15 |       15 |       13 |       17 |       13 |      14 |        5 |       15 |       16 |       17 |       14 |       21 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       14 |       24 |       25 |        9 |       11 |       1 |        9 |       22 |       14 |       19 |        9 |        7 |       2 |      0 |      3 |     40 |     61 |     42 |      9 |     23 |    281 |      0 |      0 |      2 |     16 |     34 |     14 |      7 |     10 |    120 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |     40 |      9 |      2 |      4 |    108 |      0 |      1 | s03      | R    |
| 45030000 |    463 |    253 |    119 |     5 |    0 |     85 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    211 |    252 |      38 |      12 |       0 |      10 |      0 |      2 |      0 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      4 |      0 |     19 |      9 |      3 |      0 |      1 |       4 |       2 |       0 |       1 |      2 |      1 |      0 |      1 |        7 |       11 |       14 |       18 |       12 |       18 |      30 |        7 |       14 |       20 |       19 |       16 |       25 |      42 |        1 |        7 |        9 |        9 |       12 |       11 |      10 |        3 |       10 |        7 |        9 |       12 |        8 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       12 |        8 |        9 |        6 |        3 |       0 |        7 |       12 |       15 |       11 |        1 |        2 |       1 |      0 |      2 |     18 |     33 |     20 |      5 |      6 |    169 |      0 |      0 |      0 |      8 |     22 |      3 |      3 |     10 |     73 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     22 |      7 |      1 |      0 |     41 |      0 |      1 | s03      | R    |
| 45040000 |    646 |    365 |    125 |    12 |    0 |    143 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    295 |    351 |      51 |       9 |       0 |      15 |     13 |      5 |      0 |      3 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |     31 |     14 |      0 |     42 |      3 |      3 |      0 |      1 |      14 |       6 |       0 |      11 |      6 |      1 |      0 |      7 |        9 |       22 |       27 |       31 |       16 |       23 |      34 |       13 |       35 |       27 |       37 |       23 |       21 |      47 |        2 |       10 |        8 |       20 |        4 |       14 |       3 |        1 |       11 |       11 |       15 |        3 |        4 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       14 |       17 |       15 |       12 |        5 |       1 |       19 |       20 |        8 |       16 |       12 |        6 |       3 |      0 |      3 |     32 |     46 |     34 |      7 |      7 |    236 |      0 |      0 |      0 |      8 |     19 |      9 |      9 |      8 |     72 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     21 |     22 |     10 |      5 |      7 |     88 |      0 |      1 | s03      | R    |
| 45050000 |    447 |    245 |     99 |     9 |    0 |     90 |    3 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    221 |    226 |      42 |      11 |       0 |      14 |      7 |      6 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     17 |      6 |      0 |     10 |      2 |      1 |      0 |      0 |       5 |       0 |       0 |       7 |      7 |      4 |      0 |      2 |        5 |       10 |       23 |       19 |       10 |       19 |      30 |       10 |       17 |       13 |       30 |        5 |       21 |      33 |        3 |        7 |        5 |        7 |       12 |       12 |       6 |        2 |        2 |        7 |        3 |        3 |       14 |      16 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        6 |       12 |       13 |        6 |        7 |       1 |        6 |       11 |       13 |       10 |        5 |        5 |       0 |      0 |      0 |     14 |     30 |     17 |      8 |      8 |    168 |      0 |      0 |      1 |      7 |      9 |      4 |      3 |      4 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     15 |      8 |      2 |      5 |     59 |      0 |      1 | s03      | R    |
| 45060000 |    566 |    332 |    141 |     4 |    0 |     84 |    2 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    267 |    299 |      57 |      14 |       0 |      18 |     13 |      7 |      0 |      6 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      7 |      8 |      0 |     11 |      6 |      3 |      0 |      1 |       3 |       1 |       0 |       1 |     14 |      1 |      0 |      1 |        7 |       15 |       21 |       21 |       20 |       25 |      45 |        6 |       12 |       28 |       26 |       14 |       31 |      61 |        3 |        8 |       14 |       12 |        6 |       13 |      10 |        1 |        9 |        8 |       12 |       11 |       12 |      22 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       10 |       10 |        6 |       10 |        3 |       3 |       12 |        3 |       16 |        6 |        2 |        5 |       2 |      0 |      1 |     18 |     45 |     21 |      8 |      9 |    230 |      0 |      0 |      0 |      7 |     21 |     14 |      6 |      8 |     85 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     20 |      3 |      1 |      2 |     49 |      0 |      1 | s03      | R    |
| 45061000 |    844 |    430 |    225 |     6 |    0 |    179 |    1 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    352 |    492 |      36 |      16 |       0 |      18 |     28 |      5 |      0 |      2 |      6 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     41 |     38 |      0 |     78 |      6 |      4 |      0 |      3 |      11 |      11 |       0 |      20 |     14 |      8 |      0 |      6 |       10 |       13 |       15 |       24 |       26 |       71 |       7 |       13 |       18 |       24 |       29 |       31 |      132 |      17 |        6 |        7 |        9 |       15 |       14 |       40 |       4 |        9 |        7 |       11 |        8 |       13 |       70 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       16 |       23 |       20 |        9 |       15 |       2 |        7 |       12 |       20 |       20 |       18 |       21 |       0 |      0 |      3 |     74 |     62 |     27 |      6 |     16 |    242 |      0 |      0 |      2 |     15 |     51 |     18 |      9 |      7 |    123 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     28 |     41 |      7 |      2 |      6 |    102 |      0 |      1 | s03      | R    |
| 45080000 |    721 |    326 |    127 |    14 |    0 |    247 |    3 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    368 |    353 |      51 |      14 |       0 |      20 |      2 |      2 |      0 |      5 |      6 |      2 |      0 |      9 |      4 |      3 |      0 |      0 |     73 |     31 |      0 |    112 |      9 |      1 |      0 |      7 |      14 |      19 |       0 |      27 |     19 |     14 |      0 |      8 |        7 |       42 |       45 |       37 |       16 |        8 |       0 |       10 |       46 |       58 |       32 |       18 |        6 |       1 |        1 |       18 |       22 |       12 |       15 |        1 |       0 |        1 |       23 |       19 |        6 |        5 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       29 |       50 |       30 |       12 |       12 |       1 |        7 |       33 |       35 |       27 |       12 |        8 |       2 |      0 |     10 |     50 |     25 |     10 |      8 |      3 |    220 |      0 |      0 |      3 |     13 |     11 |      6 |      2 |      2 |     90 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     33 |     26 |      6 |      1 |      2 |    195 |      0 |      1 | s03      | R    |
| 45091001 |      4 |      3 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 45092000 |      1 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 45100001 |    763 |    427 |    166 |    14 |    0 |    153 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    346 |    417 |      83 |       9 |       0 |      27 |     11 |      3 |      0 |      5 |      4 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     18 |      9 |      0 |     31 |      9 |      1 |      0 |      2 |       5 |       6 |       0 |      24 |     11 |      5 |      0 |      8 |       13 |       14 |       32 |       34 |       17 |       23 |      50 |       15 |       26 |       44 |       48 |       27 |       33 |      51 |        4 |        8 |       17 |       18 |        8 |        9 |      14 |        4 |        5 |       17 |       12 |       16 |       10 |      24 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       17 |       26 |       10 |        9 |       13 |       0 |       17 |       16 |       22 |       12 |        9 |        8 |       1 |      0 |      0 |     38 |     55 |     36 |      9 |     12 |    277 |      0 |      0 |      0 |      8 |     28 |     17 |      7 |      5 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     29 |     20 |     10 |      4 |      2 |    100 |      0 |      1 | s03      | R    |
| 45100002 |     51 |     25 |     14 |     1 |    0 |     10 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     21 |     30 |       7 |       1 |       0 |       3 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        1 |        1 |        1 |       2 |        1 |        4 |        5 |        4 |        1 |        1 |       2 |        3 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        1 |        2 |        2 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        2 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      2 |      2 |      1 |      0 |     17 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 45140000 |    517 |    310 |     96 |    14 |    0 |     91 |    1 |    4 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    228 |    289 |      52 |      13 |       0 |      14 |      6 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |      2 |      0 |     10 |      1 |      1 |      0 |      0 |       2 |       0 |       0 |       2 |     12 |      2 |      0 |      7 |       15 |       19 |       25 |       27 |       11 |       22 |       8 |       13 |       23 |       37 |       33 |       17 |       45 |      15 |        1 |        6 |        7 |       10 |       12 |        6 |       7 |        2 |        4 |       10 |        6 |        8 |       13 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        9 |       10 |       12 |        4 |        8 |       2 |        8 |       19 |       10 |        7 |        6 |        9 |       0 |      0 |      4 |     25 |     53 |     23 |      5 |      7 |    193 |      0 |      0 |      2 |      7 |     20 |      4 |      3 |      4 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     13 |      5 |      3 |      3 |     69 |      0 |      1 | s03      | R    |
| 45151001 |     29 |     20 |      6 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |     17 |      11 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        0 |        3 |        1 |       0 |        1 |        1 |        1 |        3 |        3 |        1 |       3 |        0 |        1 |        2 |        0 |        0 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      1 |      1 |      1 |      0 |     12 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 45151002 |    231 |    145 |     34 |     3 |    0 |     44 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    109 |    122 |      30 |       3 |       0 |      11 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      2 |      4 |      0 |      0 |      1 |       0 |       0 |       0 |       2 |      6 |      0 |      0 |      1 |        7 |        5 |       11 |       19 |        6 |        7 |      15 |        2 |        4 |       18 |       17 |        6 |       10 |      18 |        0 |        0 |        3 |        5 |        2 |        4 |       5 |        2 |        2 |        2 |        2 |        3 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        5 |        6 |        3 |        1 |        1 |       0 |        8 |        3 |        9 |        6 |        4 |        2 |       0 |      0 |      0 |     11 |     16 |     16 |      3 |      9 |     90 |      0 |      0 |      0 |      2 |      4 |      2 |      2 |      1 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      9 |      6 |      1 |      1 |     27 |      0 |      1 | s03      | R    |
| 45151003 |    566 |    291 |    116 |    13 |    0 |    136 |    5 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    255 |    311 |      80 |      15 |       0 |      25 |     12 |      0 |      0 |      7 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     24 |      6 |      0 |     40 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       2 |      7 |      2 |      0 |      9 |        7 |       17 |       26 |       24 |        7 |       11 |      26 |        9 |       30 |       23 |       36 |       16 |       24 |      35 |        4 |        9 |       13 |       13 |        7 |        5 |       7 |        2 |        5 |        9 |       12 |        6 |       10 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       14 |       17 |       19 |       10 |        7 |       5 |       11 |        6 |       23 |       18 |        9 |       10 |       3 |      0 |      0 |     24 |     34 |     29 |      4 |     10 |    190 |      0 |      0 |      1 |      9 |     13 |      7 |      7 |      8 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     27 |     11 |      4 |      5 |     90 |      0 |      1 | s03      | R    |
| 45160000 |   1127 |    634 |    236 |    29 |    0 |    218 |    5 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    512 |    615 |     125 |      24 |       0 |      31 |     22 |      4 |      0 |     10 |      6 |      2 |      0 |      3 |      1 |      0 |      0 |      0 |     41 |     13 |      0 |     49 |     10 |      2 |      0 |      2 |      10 |       6 |       0 |      15 |     14 |      4 |      0 |      8 |       17 |       19 |       40 |       52 |       34 |       36 |      65 |       31 |       42 |       59 |       58 |       36 |       60 |      85 |        2 |       18 |       19 |       25 |       13 |       14 |      20 |        6 |       14 |       22 |       25 |        7 |       22 |      29 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       28 |       36 |       25 |       13 |       15 |       4 |       18 |       22 |       36 |       22 |       10 |        9 |       2 |      0 |      2 |     70 |     81 |     48 |     15 |     28 |    390 |      0 |      0 |      0 |     12 |     32 |     20 |      4 |     13 |    155 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     54 |     21 |      2 |      5 |    140 |      0 |      1 | s03      | R    |
| 45170000 |    870 |    498 |    182 |    12 |    0 |    165 |    6 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    414 |    456 |     118 |      27 |       0 |      55 |     17 |      7 |      0 |      6 |      4 |      1 |      0 |      0 |      6 |      1 |      0 |      2 |     19 |     11 |      0 |     26 |      1 |      0 |      0 |      1 |       2 |       1 |       0 |       4 |     26 |      8 |      0 |     21 |        8 |       18 |       45 |       46 |       34 |       31 |      42 |       15 |       39 |       52 |       38 |       44 |       29 |      57 |        6 |       10 |       15 |       24 |       15 |        8 |      18 |        4 |        9 |       11 |       26 |        9 |       15 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       22 |       26 |       23 |        9 |        5 |       1 |       10 |       20 |       25 |       18 |       13 |        8 |       2 |      0 |      0 |     51 |     54 |     47 |      8 |     19 |    319 |      0 |      0 |      0 |     11 |     33 |     15 |      6 |     11 |    106 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     24 |     36 |     11 |      5 |     12 |    102 |      0 |      1 | s03      | R    |
| 45190000 |    556 |    320 |    124 |     7 |    0 |     94 |    0 |    2 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    254 |    302 |      68 |      13 |       0 |      18 |      4 |      8 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      3 |     13 |      5 |      0 |     17 |      5 |      1 |      0 |      0 |       5 |       5 |       0 |       8 |      8 |      2 |      0 |      5 |        5 |       12 |       24 |       24 |       11 |       24 |      34 |        9 |       14 |       40 |       30 |       17 |       22 |      54 |        1 |        1 |       14 |       12 |        8 |       12 |      13 |        3 |        5 |       10 |        5 |        9 |       13 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        9 |       14 |       16 |        9 |        5 |       0 |        8 |        8 |       10 |       17 |        7 |        2 |       1 |      0 |      1 |     24 |     51 |     37 |      5 |      8 |    194 |      0 |      0 |      0 |     10 |     15 |      8 |      0 |      6 |     85 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     28 |      5 |      2 |      7 |     51 |      0 |      1 | s03      | R    |
| 45200002 |     11 |      7 |      2 |     0 |    0 |      0 |    2 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |      3 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        0 |        0 |        2 |        0 |        0 |       2 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 45210001 |      1 |      0 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 45210002 |    511 |    324 |     94 |     9 |    0 |     82 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    233 |    278 |      66 |       5 |       0 |      13 |     12 |      3 |      0 |      4 |      0 |      1 |      0 |      0 |      4 |      1 |      0 |      0 |     21 |      6 |      0 |     13 |      1 |      0 |      0 |      0 |      10 |       9 |       0 |       6 |      6 |      2 |      0 |      0 |        8 |       17 |       19 |       26 |       15 |       15 |      38 |        8 |       19 |       24 |       30 |       24 |       27 |      54 |        2 |        7 |       11 |        8 |        3 |        4 |      14 |        0 |        2 |       12 |       11 |        4 |        3 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        7 |        8 |        7 |        4 |        8 |       3 |        7 |       11 |       10 |       12 |        2 |        5 |       0 |      0 |      0 |     13 |     42 |     26 |      4 |     16 |    223 |      0 |      0 |      0 |      5 |     19 |     10 |      4 |      5 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |     20 |      5 |      0 |      3 |     54 |      0 |      1 | s03      | R    |
| 45220000 |    768 |    418 |    160 |     9 |    0 |    175 |    1 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    356 |    412 |      84 |      29 |       0 |      42 |      8 |      2 |      0 |      5 |      3 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |     25 |     12 |      0 |     27 |      1 |      0 |      0 |      4 |      10 |       6 |       0 |      16 |     27 |     15 |      0 |     11 |       11 |       26 |       20 |       38 |       28 |       32 |      32 |       12 |       34 |       40 |       34 |       37 |       43 |      31 |        3 |        9 |       16 |       10 |        7 |       32 |       5 |        1 |        4 |       19 |       15 |        8 |       14 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       20 |       24 |       13 |        7 |        9 |       4 |       16 |       19 |       20 |       20 |       15 |       10 |       3 |      0 |      0 |     33 |     68 |     32 |     16 |     15 |    254 |      0 |      0 |      0 |     11 |     31 |     13 |      6 |      8 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     24 |     45 |      8 |      4 |      5 |    101 |      0 |      1 | s03      | R    |
| 45230001 |    728 |    410 |    162 |    12 |    0 |    134 |    2 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    331 |    397 |      61 |      16 |       0 |      20 |     13 |      6 |      0 |      7 |      6 |      0 |      0 |      5 |      6 |      5 |      0 |      2 |     16 |     12 |      0 |     15 |      5 |      1 |      0 |      0 |       5 |       3 |       0 |       3 |     19 |      6 |      0 |      8 |        6 |       15 |       22 |       37 |       41 |       35 |      15 |        6 |       26 |       34 |       42 |       58 |       50 |      23 |        6 |        7 |       14 |       16 |       12 |       24 |       9 |        1 |        3 |        9 |       10 |       17 |       26 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       14 |       20 |       18 |        8 |        7 |       2 |        5 |       10 |       19 |       24 |       13 |       11 |       2 |      0 |      4 |     42 |     58 |     40 |     13 |     27 |    226 |      0 |      0 |      0 |     20 |     28 |      8 |      6 |     20 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     24 |     10 |      7 |      7 |     95 |      0 |      1 | s03      | R    |
| 45230002 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 45240002 |    921 |    501 |    200 |    27 |    0 |    173 |    4 |    0 |    16 |    0 |    0 |    0 |    0 |    0 |    0 |    429 |    492 |     105 |      20 |       0 |      37 |     17 |     11 |      0 |      9 |      1 |      1 |      0 |      1 |      5 |      1 |      0 |      2 |      6 |      6 |      0 |     12 |      2 |      0 |      0 |      2 |       4 |       5 |       0 |       2 |     12 |      4 |      0 |      6 |       10 |       25 |       50 |       44 |       29 |       35 |      18 |       15 |       36 |       64 |       57 |       41 |       50 |      27 |        1 |       20 |       22 |       26 |       26 |       11 |       7 |        3 |        9 |       20 |       17 |        8 |       15 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       25 |       28 |       19 |       12 |        5 |       4 |       19 |       35 |       24 |       20 |        9 |        8 |       0 |      0 |      4 |     61 |     84 |     37 |     11 |     10 |    294 |      0 |      0 |      0 |     18 |     31 |     12 |      8 |      8 |    123 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     34 |     41 |     11 |      2 |      3 |    129 |      0 |      1 | s03      | R    |
| 45250001 |    297 |    184 |     40 |     0 |    0 |     72 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    145 |    152 |      57 |       7 |       0 |      15 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |       4 |       2 |       0 |       6 |      9 |      2 |      0 |      3 |        4 |        9 |       17 |       15 |        8 |       14 |      14 |        3 |       15 |       15 |       18 |       16 |       18 |      18 |        1 |        4 |        5 |        5 |        2 |        4 |       3 |        0 |        3 |        1 |        3 |        2 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       13 |        6 |        9 |        3 |        4 |       0 |        8 |        5 |       11 |        6 |        2 |        1 |       0 |      0 |      1 |     21 |     39 |     10 |      2 |     10 |    101 |      0 |      0 |      0 |      4 |      4 |      1 |      1 |      1 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |     16 |      5 |      2 |      1 |     42 |      0 |      1 | s03      | R    |
| 45250002 |    344 |    198 |     66 |    12 |    0 |     64 |    2 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    156 |    188 |      34 |       7 |       0 |       9 |     10 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      1 |      0 |      1 |       5 |       0 |       0 |       1 |      3 |      2 |      0 |      4 |        5 |       19 |       23 |        7 |       15 |        6 |       9 |        8 |       24 |       25 |       20 |       16 |       13 |       8 |        2 |        2 |       10 |        3 |        5 |        6 |       2 |        1 |        6 |        6 |        8 |        4 |        4 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        6 |       12 |        9 |        9 |        5 |       0 |        3 |       10 |       10 |        5 |        5 |        4 |       1 |      0 |      0 |     29 |     20 |     18 |      4 |      2 |    125 |      0 |      0 |      0 |      6 |     13 |      3 |      2 |      2 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     19 |      2 |      1 |      3 |     43 |      0 |      1 | s03      | R    |
| 45310001 |    791 |    475 |    141 |    11 |    0 |    141 |    3 |    3 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    342 |    449 |      67 |       6 |       0 |      20 |     11 |      3 |      0 |      5 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     12 |      4 |      0 |     16 |      9 |      2 |      0 |      1 |       3 |       1 |       0 |       3 |      8 |      3 |      0 |      3 |        5 |       27 |       39 |       48 |       22 |       27 |      19 |       10 |       38 |       43 |       69 |       41 |       62 |      25 |        4 |        2 |       14 |       11 |       13 |       17 |      11 |        1 |       10 |        5 |        9 |        8 |       23 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       21 |       17 |       19 |       11 |        4 |       0 |        9 |       26 |       19 |       21 |       10 |        5 |       2 |      0 |      4 |     47 |     90 |     28 |     14 |     24 |    268 |      0 |      0 |      0 |     11 |      9 |     10 |      5 |      6 |    100 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     36 |     19 |      9 |      7 |      2 |     99 |      0 |      1 | s03      | R    |
| 45310002 |     74 |     45 |     15 |     3 |    0 |     10 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     36 |     38 |       8 |       1 |       0 |       3 |      2 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |        2 |        1 |        2 |        6 |        6 |        3 |       1 |        1 |        2 |        1 |       10 |        4 |        2 |       4 |        1 |        0 |        3 |        1 |        3 |        0 |       0 |        0 |        0 |        2 |        1 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        4 |        1 |        0 |       0 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |      0 |      1 |      2 |      5 |      2 |      1 |      3 |     31 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      3 |      1 |      0 |      2 |      6 |      0 |      1 | s03      | R    |
| 45310003 |      1 |      0 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 45330001 |     11 |      8 |      1 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      2 |        1 |        0 |        1 |        0 |        2 |        0 |       1 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 45330002 |    587 |    355 |     92 |     9 |    0 |    125 |    2 |    3 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    286 |    301 |     118 |      10 |       0 |      36 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      8 |      1 |      0 |     17 |      4 |      0 |      0 |      4 |       5 |       0 |       0 |       6 |     21 |      5 |      0 |     13 |       11 |       21 |       29 |       23 |       30 |       19 |      32 |       14 |       22 |       32 |       36 |       23 |       20 |      43 |        2 |        2 |        9 |       13 |        4 |        5 |       9 |        3 |        3 |       10 |       10 |        5 |        7 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       13 |       12 |       25 |        6 |        5 |       1 |       15 |        9 |       12 |       18 |        6 |        3 |       0 |      0 |      1 |     33 |     64 |     13 |      7 |     13 |    224 |      0 |      0 |      1 |     12 |     13 |      5 |      5 |      6 |     50 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     24 |     30 |     10 |      2 |      4 |     68 |      0 |      1 | s03      | R    |
| 45340000 |    662 |    401 |     81 |    13 |    0 |    157 |    2 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    324 |    338 |      86 |      16 |       0 |      32 |      5 |      2 |      0 |      4 |      4 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |     15 |     10 |      0 |     42 |      5 |      1 |      0 |      1 |      10 |       2 |       0 |       2 |     23 |      6 |      0 |     16 |       11 |       25 |       61 |       31 |       20 |       24 |      16 |       15 |       47 |       48 |       34 |       24 |       27 |      18 |        4 |        5 |       14 |       13 |        6 |        6 |       2 |        3 |        6 |        6 |       10 |        4 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       19 |       19 |       23 |        9 |        7 |       0 |       15 |       26 |       19 |       22 |        9 |        3 |       0 |      0 |      1 |     46 |     86 |     20 |      8 |     16 |    224 |      0 |      0 |      0 |      7 |     10 |      6 |      2 |      2 |     54 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     37 |      9 |      2 |      2 |    102 |      0 |      1 | s03      | R    |
| 45350001 |    505 |    300 |    109 |    10 |    0 |     78 |    2 |    3 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    236 |    269 |      74 |      12 |       0 |      13 |     12 |      8 |      0 |      3 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      2 |      3 |      1 |      0 |     13 |      8 |      0 |      0 |      1 |       1 |       3 |       0 |       3 |     15 |      2 |      0 |      8 |        6 |       10 |       18 |       26 |       15 |       21 |      31 |       12 |       18 |       21 |       26 |       13 |       37 |      46 |        3 |        5 |        5 |       12 |        7 |       11 |      12 |        3 |        4 |        6 |        9 |        6 |       14 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        9 |       11 |       15 |        7 |        3 |       2 |        5 |        5 |       12 |       11 |        7 |        2 |       0 |      0 |      1 |     20 |     38 |     18 |      7 |      6 |    210 |      0 |      0 |      0 |      5 |     21 |      3 |      4 |      5 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     28 |      6 |      1 |      3 |     45 |      0 |      1 | s03      | R    |
| 45350002 |    560 |    353 |     87 |    10 |    0 |    104 |    0 |    3 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    260 |    300 |     108 |      17 |       0 |      33 |      5 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     18 |      6 |      0 |     18 |      8 |      0 |      0 |      0 |       1 |       3 |       0 |       1 |     23 |     11 |      0 |      4 |        7 |       15 |       36 |       34 |       20 |       16 |      20 |       21 |       20 |       42 |       33 |       31 |       29 |      29 |        3 |        5 |       14 |       10 |        7 |        9 |       5 |        1 |        1 |        8 |        6 |        5 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       14 |       12 |       10 |        9 |        6 |       2 |       11 |       13 |       15 |        7 |       10 |        3 |       2 |      0 |      3 |     38 |     65 |     25 |      5 |     16 |    201 |      0 |      0 |      0 |      9 |     18 |     11 |      1 |      5 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     26 |      6 |      3 |      2 |     66 |      0 |      1 | s03      | R    |
| 45350003 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 45370002 |    620 |    364 |    133 |     6 |    0 |    113 |    1 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    285 |    335 |      69 |      15 |       0 |      14 |      9 |      4 |      0 |      2 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |     26 |      9 |      0 |     33 |      7 |      0 |      0 |      1 |       4 |       3 |       0 |       4 |     15 |      5 |      0 |      2 |        4 |       19 |       29 |       22 |       17 |       22 |      38 |       12 |       19 |       31 |       37 |       15 |       36 |      63 |        3 |       15 |       13 |       14 |        6 |       14 |       9 |        1 |        8 |        9 |        8 |        6 |       17 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       16 |        6 |       14 |        8 |       10 |       0 |       14 |       11 |       11 |       12 |        3 |       10 |       2 |      0 |      1 |     25 |     41 |     31 |      6 |     20 |    240 |      0 |      0 |      2 |     12 |     26 |      9 |      2 |      4 |     78 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     34 |      4 |      6 |      3 |     62 |      0 |      1 | s03      | R    |
| 45390001 |    478 |    298 |     94 |     8 |    0 |     76 |    1 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    235 |    243 |      56 |       7 |       0 |      15 |      5 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |     18 |      1 |      0 |     20 |      2 |      0 |      0 |      0 |       6 |       8 |       0 |       6 |     15 |      0 |      0 |      1 |        4 |       20 |       15 |       21 |       11 |       20 |      40 |        7 |       13 |       19 |       34 |       12 |       26 |      56 |        1 |        4 |        6 |       10 |        8 |       10 |      16 |        0 |        1 |        6 |        6 |        7 |        8 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        8 |       10 |        8 |        8 |        6 |       1 |        2 |        5 |       12 |        8 |        8 |        2 |       0 |      0 |      2 |     15 |     58 |     20 |      3 |     14 |    186 |      0 |      0 |      0 |      3 |     20 |      6 |      0 |      6 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |     18 |     10 |      0 |      3 |     49 |      0 |      1 | s03      | R    |
| 45390002 |     90 |     54 |     14 |     3 |    0 |     19 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     45 |     45 |      15 |       0 |       0 |       3 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       4 |      2 |      1 |      0 |      3 |        1 |        1 |        3 |        3 |        4 |        5 |       7 |        3 |        3 |        4 |        6 |        1 |        3 |      10 |        0 |        0 |        0 |        3 |        2 |        1 |       2 |        0 |        1 |        0 |        3 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        2 |        3 |        3 |        1 |       0 |        1 |        1 |        1 |        0 |        3 |        2 |       1 |      0 |      0 |      2 |      9 |      2 |      1 |      1 |     39 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      3 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |     11 |      0 |      1 | s03      | R    |
| 45390003 |    254 |    161 |     55 |     3 |    0 |     34 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     82 |    172 |      24 |       0 |       0 |       3 |      3 |      1 |      0 |      4 |      2 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      6 |      6 |      0 |      7 |      4 |      2 |      0 |      2 |       0 |       2 |       0 |       2 |      4 |      3 |      0 |      0 |        5 |        5 |        4 |        6 |        1 |       12 |      16 |        1 |        7 |        6 |        9 |        5 |       61 |      23 |        1 |        2 |        5 |        1 |        3 |        4 |       3 |        1 |        3 |        4 |        5 |        4 |       14 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        2 |        3 |        0 |        6 |       0 |        5 |        3 |        2 |        4 |        2 |        8 |       0 |      0 |      1 |     11 |     35 |      9 |      6 |      6 |     93 |      0 |      0 |      0 |      6 |     14 |      2 |      0 |      6 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      9 |      5 |      0 |      2 |     16 |      0 |      1 | s03      | R    |
| 45392000 |    717 |    353 |    146 |    19 |    0 |    189 |    2 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    345 |    372 |      68 |      18 |       0 |      28 |      9 |      2 |      0 |      4 |      1 |      1 |      0 |      5 |      3 |      1 |      0 |      1 |     24 |     27 |      0 |     50 |      0 |      0 |      0 |      1 |       2 |       3 |       0 |       7 |      5 |      4 |      0 |      8 |        6 |       26 |       36 |       39 |       22 |       24 |       0 |       16 |       52 |       37 |       37 |       31 |       27 |       0 |        2 |       22 |       18 |       15 |       19 |        7 |       2 |        7 |       15 |       13 |       10 |        7 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       38 |       20 |       19 |       14 |        8 |       0 |       20 |       38 |       16 |       19 |        9 |        9 |       0 |      0 |      4 |     35 |     57 |     20 |      9 |      8 |    220 |      0 |      0 |      1 |      9 |     22 |      8 |      7 |     10 |     89 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     28 |     30 |      6 |      1 |      5 |    145 |      0 |      1 | s03      | R    |
| 45410001 |    575 |    340 |    102 |     8 |    0 |    115 |    5 |    3 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    256 |    319 |      47 |      11 |       0 |      21 |     12 |      4 |      0 |      5 |      1 |      3 |      0 |      1 |      1 |      0 |      0 |      0 |     15 |      2 |      0 |     22 |      1 |      2 |      0 |      1 |       0 |       1 |       0 |       1 |      6 |      2 |      0 |      5 |        8 |       23 |       36 |       25 |       15 |       22 |       6 |       14 |       32 |       42 |       41 |       20 |       39 |      17 |        2 |        7 |        8 |       14 |        4 |       13 |       1 |        3 |        7 |        5 |        8 |        7 |       20 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       27 |       13 |       10 |        7 |        9 |       0 |        7 |       17 |        7 |       16 |        9 |        5 |       0 |      0 |      0 |     40 |     54 |     23 |     12 |     10 |    201 |      0 |      0 |      2 |     12 |     17 |      4 |      6 |      6 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     16 |     22 |     11 |      4 |      2 |     75 |      0 |      1 | s03      | R    |
| 45410002 |     33 |     16 |      7 |     0 |    0 |     10 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |     22 |       3 |       3 |       0 |       3 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        1 |        0 |        3 |        0 |        0 |       0 |        1 |        5 |        2 |        1 |        2 |        1 |       0 |        0 |        1 |        0 |        2 |        1 |        0 |       0 |        0 |        3 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        2 |        2 |        1 |        0 |        1 |        1 |       0 |      0 |      1 |      2 |      1 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 45421000 |      9 |      6 |      1 |     1 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      5 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 45422000 |     28 |     15 |      4 |     2 |    0 |      7 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     13 |     15 |       3 |       0 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |        1 |        5 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        2 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 45423000 |      2 |      0 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 45450002 |    798 |    463 |    155 |     6 |    0 |    165 |    4 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    361 |    437 |     113 |      14 |       0 |      27 |      3 |      4 |      0 |      8 |      4 |      2 |      0 |      5 |      2 |      3 |      0 |      0 |     49 |     40 |      0 |     43 |      3 |      3 |      0 |      0 |       3 |       0 |       0 |       4 |     15 |      8 |      0 |      3 |        9 |       28 |       37 |       32 |       33 |       37 |      15 |       13 |       55 |       45 |       51 |       49 |       39 |      20 |        5 |       13 |       12 |       13 |       22 |       16 |       1 |        3 |       10 |       11 |       12 |       12 |       20 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       24 |       20 |       15 |        5 |       11 |       1 |       11 |       26 |       20 |       17 |        6 |       11 |       1 |      0 |      1 |     50 |     79 |     30 |     17 |     13 |    273 |      0 |      0 |      0 |      7 |     25 |     20 |      1 |     10 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     29 |     29 |     10 |      3 |      2 |    105 |      0 |      1 | s03      | R    |
| 45450003 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 45450004 |      2 |      1 |      0 |     0 |    0 |      0 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 45470001 |      6 |      4 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      2 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 45470002 |     34 |     21 |      2 |     1 |    0 |      9 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     19 |     15 |       2 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      2 |        0 |        1 |        4 |        0 |        1 |        1 |       1 |        2 |        3 |        1 |        4 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        3 |        2 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      0 |      2 |      0 |      1 |     12 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      3 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 45470003 |    276 |    148 |     65 |     4 |    0 |     57 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    119 |    157 |      36 |      12 |       0 |       6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      9 |      7 |      0 |     21 |      0 |      2 |      0 |      0 |       4 |       2 |       0 |       4 |      5 |      5 |      0 |      4 |        5 |        7 |       10 |        6 |        9 |       11 |      11 |        2 |        6 |       13 |       20 |       12 |       21 |      15 |        1 |        2 |        9 |        5 |        5 |        4 |       4 |        2 |        3 |        3 |        6 |        4 |        7 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       10 |        5 |        7 |        2 |        3 |       0 |        6 |        8 |        5 |        6 |        2 |        6 |       0 |      0 |      0 |     12 |     30 |     11 |      4 |      4 |     87 |      0 |      0 |      0 |      3 |      5 |      7 |      3 |      3 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     15 |      2 |      1 |      1 |     32 |      0 |      1 | s03      | R    |
| 45470005 |      7 |      5 |      0 |     1 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      4 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 | s03      | R    |
| 45500001 |    787 |    525 |    100 |    11 |    0 |    137 |    2 |    4 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    332 |    455 |      96 |       9 |       0 |      28 |      6 |      1 |      0 |      2 |      1 |      0 |      0 |      1 |      3 |      1 |      0 |      3 |      9 |      3 |      0 |     16 |      2 |      0 |      0 |      3 |       1 |       1 |       0 |       0 |      9 |      2 |      0 |      2 |       10 |       44 |       44 |       41 |       21 |       26 |      15 |       30 |       58 |       62 |       58 |       49 |       49 |      18 |        1 |        6 |       10 |       13 |        6 |       12 |       5 |        6 |        4 |        8 |       12 |        5 |       10 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       21 |       19 |       14 |        9 |        5 |       1 |       12 |       32 |       11 |       21 |        6 |        2 |       0 |      0 |      4 |     69 |     87 |     42 |      9 |     11 |    303 |      0 |      0 |      0 |     10 |     10 |      5 |      5 |      6 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     33 |      7 |      4 |      2 |     93 |      0 |      1 | s03      | R    |
| 45500002 |     39 |     24 |      9 |     4 |    0 |      1 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     18 |     21 |       8 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        1 |        0 |        2 |        4 |        2 |        2 |       0 |        1 |        1 |        1 |        4 |        1 |        3 |       2 |        1 |        0 |        1 |        2 |        1 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      8 |      1 |      0 |      2 |     12 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      1 |      0 |      1 | s03      | R    |
| 45510001 |    444 |    290 |     58 |    10 |    0 |     78 |    1 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    186 |    258 |      53 |       4 |       0 |      12 |      8 |      3 |      0 |      2 |      2 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      2 |      1 |      0 |      2 |      3 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      2 |        8 |       24 |       25 |       23 |       16 |       10 |       3 |       14 |       37 |       37 |       31 |       26 |       24 |      12 |        3 |        7 |        9 |        6 |        2 |        5 |       0 |        0 |        5 |        7 |        4 |        5 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |       18 |        9 |        7 |        5 |        5 |       0 |        9 |       17 |       11 |        4 |        7 |        3 |       0 |      0 |      1 |     27 |     37 |     23 |      5 |     19 |    178 |      0 |      0 |      0 |      3 |      9 |      4 |      2 |      1 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     12 |     13 |      3 |      4 |      0 |     62 |      0 |      1 | s03      | R    |
| 45510002 |    134 |     85 |     17 |     3 |    0 |     27 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     62 |     72 |      11 |       0 |       0 |       6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        4 |       10 |        4 |       13 |       3 |        2 |        2 |       10 |        9 |       10 |       13 |       3 |        0 |        0 |        1 |        1 |        3 |        2 |       1 |        0 |        0 |        0 |        1 |        4 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        0 |        4 |        4 |        4 |        2 |       0 |        2 |        2 |        3 |        4 |        1 |        2 |       0 |      0 |      0 |      7 |     13 |      9 |      2 |      4 |     50 |      0 |      0 |      0 |      2 |      3 |      3 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      3 |      0 |      0 |     22 |      0 |      1 | s03      | R    |
| 45520001 |    108 |     60 |     17 |     7 |    0 |     20 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     49 |     59 |       9 |       2 |       0 |       5 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        6 |        6 |        0 |        3 |       2 |        1 |        9 |       10 |        7 |        3 |        7 |       2 |        0 |        2 |        2 |        0 |        1 |        2 |       0 |        0 |        2 |        0 |        1 |        3 |        1 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        8 |        4 |        3 |        0 |        2 |       2 |        2 |        1 |        0 |        2 |        3 |        2 |       0 |      0 |      0 |      5 |      7 |     11 |      3 |      1 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      7 |      4 |      0 |      0 |     17 |      0 |      1 | s03      | R    |
| 45520002 |    179 |    126 |     29 |     2 |    0 |     20 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     81 |     98 |      22 |       2 |       0 |       3 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      2 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |        3 |        6 |       10 |       12 |        8 |        4 |      14 |        2 |        5 |        9 |       15 |        7 |        8 |      23 |        0 |        2 |        3 |        6 |        0 |        1 |       4 |        3 |        1 |        1 |        4 |        1 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        1 |        1 |        0 |        1 |       0 |        1 |        5 |        6 |        4 |        0 |        0 |       0 |      0 |      1 |      8 |     11 |      9 |      0 |      8 |     89 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      1 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      4 |      1 |      0 |      1 |     12 |      0 |      1 | s03      | R    |
| 45530001 |     40 |     24 |      7 |     0 |    0 |      9 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     20 |       7 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        2 |        2 |        3 |        2 |        0 |        1 |       0 |        1 |        3 |        2 |        3 |        1 |        3 |       1 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        4 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      2 |      0 |      2 |     14 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |      3 |      0 |      1 | s03      | R    |
| 45530002 |    748 |    448 |    130 |    11 |    0 |    149 |    5 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    337 |    411 |      98 |      21 |       0 |      33 |      7 |      5 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     26 |      8 |      0 |     43 |      2 |      2 |      0 |      2 |       4 |       3 |       0 |       6 |     14 |      4 |      0 |      3 |       12 |       26 |       35 |       33 |       31 |       31 |      27 |       15 |       33 |       52 |       48 |       24 |       36 |      45 |        3 |        8 |       17 |       16 |        8 |        8 |       5 |        1 |        1 |       10 |       20 |        6 |       17 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       16 |       19 |       13 |       10 |        7 |       2 |       13 |       25 |       15 |       21 |       11 |        7 |       1 |      0 |      2 |     51 |     62 |     43 |     10 |     22 |    258 |      0 |      0 |      1 |      9 |     26 |      8 |      5 |      4 |     77 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     29 |     33 |     14 |      1 |      1 |     92 |      0 |      1 | s03      | R    |
| 45540001 |     87 |     57 |     12 |     4 |    0 |     14 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     33 |     54 |      11 |       0 |       0 |       6 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        2 |        5 |        2 |        5 |       2 |        3 |        4 |        3 |        9 |        3 |       11 |       2 |        1 |        0 |        1 |        1 |        0 |        1 |       1 |        0 |        1 |        1 |        2 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        2 |        0 |        0 |        0 |       0 |        1 |        4 |        2 |        0 |        1 |        4 |       0 |      0 |      0 |      3 |     10 |      8 |      3 |      1 |     32 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |      9 |      0 |      1 | s03      | R    |
| 45540002 |    334 |    211 |     24 |     9 |    0 |     82 |    2 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    135 |    199 |      36 |       2 |       0 |      21 |      6 |      1 |      0 |      3 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      7 |      2 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      4 |        6 |       11 |       20 |       14 |       11 |       12 |       1 |       15 |       30 |       29 |       28 |       16 |       15 |       3 |        1 |        0 |        3 |        1 |        1 |        2 |       1 |        0 |        3 |        1 |        2 |        1 |        5 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       11 |       13 |       12 |        6 |        1 |       1 |        8 |       15 |       14 |        4 |        7 |        0 |       0 |      0 |      1 |     26 |     36 |     11 |      6 |      6 |    125 |      0 |      0 |      0 |      1 |      2 |      5 |      1 |      2 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     16 |      5 |      0 |      3 |     53 |      0 |      1 | s03      | R    |
| 45540004 |    522 |    325 |     73 |     8 |    0 |    106 |    4 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    219 |    303 |      58 |       5 |       0 |      15 |      4 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |      2 |      0 |      0 |      0 |     18 |      3 |      0 |     23 |      4 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      3 |      1 |      0 |      2 |        6 |       20 |       21 |       24 |       13 |       21 |      15 |       13 |       32 |       44 |       31 |       21 |       27 |      37 |        3 |        4 |        6 |        3 |        8 |        7 |       2 |        2 |        5 |        4 |        9 |        5 |        5 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       12 |       14 |       18 |        8 |        5 |       1 |        5 |        8 |       17 |       13 |        8 |        7 |       0 |      0 |      2 |     31 |     39 |     17 |      9 |     20 |    207 |      0 |      0 |      0 |      9 |     14 |      5 |      5 |      2 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     19 |      8 |      5 |      5 |     71 |      0 |      1 | s03      | R    |
| 45540005 |     16 |      9 |      4 |     1 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      7 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       1 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 45550001 |     81 |     40 |     24 |     1 |    0 |     16 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     35 |     46 |       4 |       3 |       0 |       1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |      5 |      0 |      0 |      0 |        0 |        2 |        2 |        2 |        2 |        3 |       6 |        0 |        4 |        3 |        5 |        0 |        3 |       8 |        0 |        0 |        2 |        0 |        2 |        4 |       2 |        0 |        0 |        0 |        3 |        4 |        2 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        4 |        1 |        0 |       1 |        1 |        3 |        1 |        1 |        3 |        0 |       0 |      0 |      0 |      0 |      6 |      2 |      0 |      4 |     28 |      0 |      0 |      1 |      1 |      2 |      1 |      3 |      1 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      2 |      1 |      0 |      9 |      0 |      1 | s03      | R    |
| 45550002 |    471 |    269 |    124 |     5 |    0 |     61 |    5 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    214 |    257 |      44 |      20 |       0 |       9 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      5 |      0 |     15 |      1 |      0 |      0 |      0 |       0 |       3 |       0 |       3 |      5 |      4 |      0 |      0 |        8 |       11 |       16 |       27 |       12 |       16 |      16 |       10 |       22 |       21 |       23 |       20 |       32 |      35 |        3 |       12 |       15 |        8 |        8 |        6 |      13 |        2 |        8 |        9 |       14 |        3 |        5 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |       12 |       10 |        7 |        2 |       2 |        6 |        2 |        8 |       10 |        5 |        4 |       0 |      0 |      0 |     16 |     34 |     17 |      8 |     13 |    181 |      0 |      0 |      0 |     12 |     12 |     13 |      4 |      6 |     77 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     20 |      4 |      0 |      0 |     44 |      0 |      1 | s03      | R    |
| 45570001 |    185 |    102 |     41 |     1 |    0 |     38 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     75 |    110 |      12 |       1 |       0 |       8 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      1 |      0 |      1 |        0 |        3 |        7 |        7 |        2 |        8 |       9 |        2 |        7 |       11 |        7 |       10 |       11 |      18 |        1 |        0 |        4 |        4 |        2 |        1 |       7 |        0 |        0 |        4 |        5 |        2 |        5 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        6 |        8 |        1 |        1 |       0 |        3 |        4 |        7 |        4 |        1 |        2 |       1 |      0 |      2 |      3 |     21 |      8 |      2 |      2 |     64 |      0 |      0 |      0 |      1 |      4 |      4 |      2 |      2 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      7 |      2 |      1 |      0 |     25 |      0 |      1 | s03      | R    |
| 45570002 |     47 |     26 |     17 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     23 |     24 |       4 |       4 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        2 |        3 |        2 |        2 |        1 |       1 |        1 |        1 |        4 |        3 |        2 |        1 |       2 |        0 |        1 |        4 |        1 |        1 |        0 |       3 |        0 |        1 |        1 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      2 |      6 |      3 |      0 |      1 |     14 |      0 |      0 |      0 |      1 |      1 |      4 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 45570003 |    213 |    122 |     56 |     4 |    0 |     29 |    2 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    100 |    113 |      18 |       3 |       0 |       3 |      4 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      1 |      0 |      8 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        3 |       16 |        9 |        4 |        6 |      11 |        0 |        5 |       18 |       16 |        6 |        9 |      18 |        0 |        9 |        6 |        2 |        2 |        7 |       4 |        0 |        2 |        1 |        2 |        1 |       10 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        6 |        4 |        0 |        1 |       2 |        3 |        0 |        4 |        3 |        2 |        3 |       0 |      0 |      1 |     10 |     19 |      9 |      6 |      7 |     70 |      0 |      0 |      0 |      3 |      6 |      3 |      1 |      3 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |     11 |      0 |      1 |      1 |     16 |      0 |      1 | s03      | R    |
| 45590001 |    395 |    253 |     91 |     3 |    0 |     42 |    2 |    3 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    176 |    219 |      33 |       9 |       0 |       8 |      9 |      3 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      4 |      0 |      4 |      2 |      0 |      0 |      0 |       0 |       1 |       0 |       3 |      4 |      1 |      0 |      2 |       10 |        9 |       24 |       19 |       21 |       13 |       5 |        7 |       12 |       30 |       34 |       27 |       35 |       7 |        0 |        2 |        4 |       11 |       11 |       17 |       1 |        0 |        1 |        9 |       12 |        8 |       11 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        7 |        6 |        5 |        6 |        0 |       1 |        4 |        6 |        3 |        1 |        5 |        3 |       0 |      0 |      4 |     35 |     43 |     21 |     11 |     13 |    126 |      0 |      0 |      0 |      8 |     17 |      9 |      1 |      7 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |     11 |      2 |      1 |      1 |     28 |      0 |      1 | s03      | R    |
| 45590002 |     97 |     64 |     10 |     2 |    0 |     18 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     42 |     55 |      10 |       1 |       0 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        2 |        3 |        8 |        4 |        4 |       1 |        5 |        6 |       13 |        6 |        3 |        6 |       2 |        0 |        0 |        0 |        2 |        2 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        5 |        5 |        1 |        0 |       0 |        1 |        4 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |     13 |     12 |      1 |      3 |      1 |     34 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      4 |      1 |      2 |      0 |     14 |      0 |      1 | s03      | R    |
| 45610001 |    526 |    318 |     62 |     7 |    0 |    128 |    4 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    241 |    285 |      65 |      13 |       0 |      28 |      5 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |      4 |      7 |      0 |      0 |     16 |      4 |      0 |      0 |      1 |       2 |       0 |       0 |       1 |     12 |      4 |      0 |      6 |        8 |       22 |       37 |       25 |       18 |       19 |       4 |       14 |       38 |       35 |       30 |       19 |       35 |      14 |        2 |        2 |        8 |        4 |        8 |        1 |       1 |        2 |        6 |        6 |       10 |        1 |        7 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       15 |       29 |       12 |        5 |        5 |       2 |        6 |       21 |       13 |       14 |        5 |        5 |       0 |      0 |      0 |     46 |     55 |     18 |      7 |     16 |    176 |      0 |      0 |      1 |      2 |     16 |      5 |      0 |      1 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     20 |      6 |      2 |      2 |     95 |      0 |      1 | s03      | R    |
| 45610002 |    285 |    167 |     38 |     7 |    0 |     69 |    0 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    120 |    165 |      39 |       8 |       0 |      17 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      1 |      0 |     11 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       1 |      8 |      2 |      0 |      4 |        6 |        9 |       11 |       19 |        7 |        8 |       5 |        7 |       20 |       16 |       24 |       12 |       15 |       8 |        1 |        0 |        5 |        8 |        2 |        3 |       0 |        1 |        2 |        3 |        3 |        5 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        4 |       10 |       10 |        5 |        4 |       0 |        6 |       12 |        6 |       10 |        5 |        5 |       0 |      0 |      3 |     14 |     30 |     17 |      1 |      4 |     98 |      0 |      0 |      0 |      7 |      4 |      3 |      1 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     20 |      5 |      3 |      0 |     41 |      0 |      1 | s03      | R    |
| 45620000 |    939 |    504 |    263 |    13 |    0 |    152 |    1 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    391 |    548 |      86 |      16 |       0 |      18 |     11 |     12 |      0 |      8 |      2 |      1 |      0 |      3 |      6 |      1 |      0 |      1 |     12 |      5 |      0 |     15 |      8 |      0 |      0 |      0 |       0 |       1 |       0 |       5 |     12 |      3 |      0 |      4 |       14 |       15 |       34 |       37 |       28 |       28 |      29 |       19 |       40 |       44 |       69 |       36 |       51 |      60 |       10 |       12 |       18 |       24 |       20 |       15 |      20 |        2 |       11 |       18 |       29 |       18 |       39 |      27 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       15 |       14 |       20 |       11 |       11 |       2 |        9 |       10 |       19 |       24 |       11 |       10 |       2 |      0 |      4 |     47 |     68 |     37 |     14 |     16 |    318 |      0 |      0 |      2 |     21 |     32 |     16 |     12 |     29 |    151 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     35 |     21 |      7 |      6 |      8 |     95 |      0 |      1 | s03      | R    |
| 45650000 |    593 |    343 |    158 |     9 |    0 |     74 |    4 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    276 |    317 |      35 |       6 |       0 |      10 |     28 |      6 |      0 |      4 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      2 |      2 |      1 |      0 |      2 |      4 |      0 |      0 |      2 |       1 |       1 |       0 |       2 |      2 |      0 |      0 |      1 |        8 |       11 |       29 |       43 |       20 |       15 |      20 |        5 |       14 |       42 |       55 |       27 |       20 |      34 |        3 |        5 |       10 |       17 |       14 |       12 |      16 |        4 |        6 |       17 |       14 |       11 |       10 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        6 |        7 |       16 |        6 |        6 |       3 |        6 |        7 |       10 |        8 |        5 |        2 |       1 |      0 |      2 |     30 |     68 |     30 |     13 |     15 |    185 |      0 |      0 |      0 |      9 |     12 |      8 |     10 |      7 |    112 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |     14 |      8 |      3 |      3 |     52 |      0 |      1 | s03      | R    |
| 45660000 |    498 |    221 |    188 |     9 |    0 |     78 |    0 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    218 |    280 |      27 |       8 |       0 |       3 |      6 |      6 |      0 |      3 |      0 |      3 |      0 |      0 |      2 |      5 |      0 |      0 |      9 |     15 |      0 |     10 |      1 |      0 |      0 |      1 |       1 |       0 |       0 |       2 |      2 |      2 |      0 |      5 |        5 |        8 |       10 |       19 |       11 |       19 |      23 |        4 |       12 |       18 |       31 |       12 |       24 |      25 |        2 |        3 |        6 |       13 |       10 |       25 |      24 |        2 |        4 |       12 |       10 |        9 |       23 |      45 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        2 |       10 |        8 |        4 |        5 |       4 |       12 |        7 |        8 |        6 |        6 |        7 |       3 |      0 |      1 |     20 |     32 |     13 |      7 |      8 |    140 |      0 |      0 |      1 |     11 |     25 |      4 |      7 |      2 |    138 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     16 |      5 |      0 |      1 |     57 |      0 |      1 | s03      | R    |
| 45670000 |    490 |    224 |    200 |     3 |    0 |     60 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    228 |    262 |      24 |       4 |       0 |       4 |     11 |     11 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |     15 |     12 |      0 |     13 |      2 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      2 |      4 |      0 |      1 |        7 |        5 |       13 |       18 |       15 |       16 |      19 |        4 |        6 |       13 |       23 |       22 |       28 |      35 |        4 |        2 |       12 |       10 |       14 |       24 |      31 |        1 |        6 |        6 |       12 |       16 |       35 |      27 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        2 |       10 |        5 |        9 |        7 |       1 |        2 |        7 |        7 |        6 |        5 |        1 |       0 |      0 |      1 |      9 |     30 |     22 |      5 |      9 |    148 |      0 |      0 |      0 |     16 |     15 |     15 |      8 |     15 |    131 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     15 |      6 |      3 |      2 |     33 |      0 |      1 | s03      | R    |
| 45690001 |    182 |     89 |     57 |     4 |    0 |     27 |    1 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     84 |     98 |       9 |       0 |       0 |       0 |      4 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      7 |      1 |      0 |      9 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      3 |        3 |        4 |        8 |       10 |        8 |        3 |       4 |        2 |        8 |        6 |       13 |        4 |        8 |       8 |        0 |        2 |        8 |        4 |        3 |        8 |       7 |        0 |        1 |        4 |        1 |        2 |        9 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        2 |        6 |        1 |       0 |        2 |        5 |        6 |        2 |        6 |        2 |       1 |      0 |      1 |     13 |     11 |      8 |      4 |      3 |     49 |      0 |      0 |      0 |      4 |     10 |      5 |      2 |      1 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      7 |      3 |      1 |      1 |     21 |      0 |      1 | s03      | R    |
| 45690002 |    348 |    173 |    124 |     2 |    0 |     46 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    154 |    194 |      26 |       3 |       0 |       4 |      2 |      8 |      0 |      0 |      0 |      2 |      0 |      2 |      8 |      3 |      0 |      1 |      5 |     15 |      0 |      9 |      1 |      8 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        2 |        9 |       11 |       13 |        9 |       11 |      11 |        3 |       12 |       17 |       21 |       17 |       20 |      17 |        6 |        3 |        6 |       14 |       13 |       12 |      10 |        6 |        5 |        4 |        6 |       11 |       13 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        4 |        7 |        2 |        4 |        1 |       2 |        2 |        6 |        7 |        4 |        4 |        3 |       1 |      0 |      0 |     11 |     30 |     17 |      6 |      6 |    103 |      0 |      0 |      0 |      5 |     15 |      9 |      5 |     13 |     77 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      8 |      2 |      1 |      1 |     31 |      0 |      1 | s03      | R    |
| 45691000 |    128 |     59 |     50 |     2 |    0 |     15 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     68 |     60 |       6 |       0 |       0 |       1 |      3 |      2 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        7 |       10 |        5 |        2 |       1 |        2 |        3 |        9 |        4 |        6 |        3 |       1 |        1 |        2 |        5 |        4 |        5 |        3 |       4 |        0 |        2 |        3 |        4 |        4 |        6 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        4 |        2 |        0 |        0 |        4 |       0 |        1 |        1 |        2 |        0 |        1 |        1 |       0 |      0 |      0 |      8 |      8 |      4 |      4 |      2 |     33 |      0 |      0 |      0 |      2 |      5 |      1 |      2 |      4 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      1 |      0 |     14 |      0 |      1 | s03      | R    |
| 45710000 |    688 |    426 |    114 |     8 |    0 |    119 |    5 |    1 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    294 |    394 |      40 |       9 |       0 |      16 |     10 |     10 |      0 |      5 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |     14 |      4 |      0 |     15 |      3 |      0 |      0 |      3 |       0 |       1 |       0 |       0 |      8 |      1 |      0 |      5 |        5 |       17 |       41 |       41 |       19 |       18 |      20 |       15 |       40 |       55 |       63 |       34 |       24 |      34 |        2 |        6 |       11 |       18 |       10 |        5 |       7 |        2 |        2 |       10 |       13 |        8 |       12 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       20 |       15 |       17 |       10 |        5 |       0 |        7 |       16 |       22 |       13 |       10 |        6 |       0 |      0 |      6 |     35 |     78 |     31 |     11 |     14 |    251 |      0 |      0 |      1 |      7 |     24 |      7 |      4 |      6 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     24 |     26 |      6 |      2 |      4 |     82 |      0 |      1 | s03      | R    |
| 45730000 |    829 |    534 |    119 |    14 |    0 |    140 |    3 |    2 |    17 |    0 |    0 |    0 |    0 |    0 |    0 |    350 |    479 |      82 |       9 |       0 |      23 |     32 |      6 |      0 |      7 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      1 |     11 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       1 |      4 |      1 |      0 |      3 |        7 |       21 |       55 |       56 |       28 |       25 |      16 |       17 |       38 |       84 |       83 |       37 |       44 |      23 |        2 |        9 |       19 |       10 |        8 |        5 |       7 |        1 |        9 |        9 |        8 |       10 |       10 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       12 |       22 |       19 |       18 |        4 |       0 |       12 |       15 |       19 |       22 |       14 |       10 |       2 |      0 |      2 |     68 |     94 |     46 |     25 |     23 |    276 |      0 |      0 |      3 |      9 |     23 |      3 |      5 |      4 |     72 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     23 |     33 |     10 |      6 |      3 |     98 |      0 |      1 | s03      | R    |
| 45740000 |    662 |    377 |    168 |    12 |    0 |     90 |    0 |    1 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    298 |    364 |      32 |       2 |       0 |       8 |     19 |      5 |      0 |      4 |      2 |      0 |      0 |      0 |     14 |      3 |      0 |      2 |     12 |      6 |      0 |      8 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      3 |      0 |      0 |      1 |        5 |       19 |       34 |       49 |       30 |       14 |      16 |        8 |       22 |       47 |       66 |       26 |       18 |      23 |        6 |        2 |       10 |       18 |       15 |       11 |      13 |        1 |        4 |       18 |       21 |       12 |       16 |      21 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       13 |       18 |        7 |        5 |        3 |       0 |       11 |       12 |       15 |       16 |        4 |        3 |       0 |      0 |      1 |     42 |     64 |     30 |     19 |     22 |    199 |      0 |      0 |      0 |     10 |     25 |     10 |     10 |     15 |     98 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     24 |      5 |      5 |      2 |     64 |      0 |      1 | s03      | R    |
| 45750001 |    651 |    371 |    140 |     8 |    0 |    119 |    2 |    1 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    286 |    365 |      43 |       9 |       0 |      12 |     15 |     10 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      9 |      1 |      0 |      3 |      2 |      2 |      0 |      1 |       0 |       0 |       0 |       1 |      4 |      1 |      0 |      1 |       16 |       10 |       23 |       33 |       23 |       20 |      15 |       10 |       34 |       49 |       59 |       38 |       19 |      22 |        6 |        3 |       11 |       17 |       12 |        6 |      14 |        4 |        8 |       10 |        9 |        9 |       10 |      21 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       14 |       16 |       22 |       13 |        4 |       0 |       10 |       14 |       13 |       21 |        2 |        2 |       1 |      0 |      6 |     34 |     49 |     32 |     19 |     17 |    214 |      0 |      0 |      1 |     10 |     18 |      5 |      7 |      7 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     31 |      6 |      5 |      3 |     73 |      0 |      1 | s03      | R    |
| 45750002 |    478 |    285 |     92 |     6 |    0 |     88 |    1 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    191 |    287 |      48 |       9 |       0 |      14 |      6 |      5 |      0 |      3 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      5 |      0 |      3 |      3 |      1 |      0 |      1 |       1 |       1 |       0 |       0 |      4 |      1 |      0 |      2 |        3 |       16 |       32 |       19 |       10 |       20 |       7 |        5 |       18 |       39 |       29 |       32 |       48 |       7 |        3 |        3 |        5 |        7 |        7 |        6 |       1 |        4 |        3 |        8 |        8 |        5 |       25 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       11 |       18 |       10 |        6 |        5 |       0 |        6 |       17 |       10 |        9 |        2 |        5 |       0 |      0 |      2 |     20 |     53 |     15 |      7 |     14 |    174 |      0 |      0 |      0 |      3 |     19 |      7 |      4 |      6 |     53 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |     14 |      6 |      1 |      0 |     61 |      0 |      1 | s03      | R    |
| 45770000 |    797 |    485 |    137 |    10 |    0 |    141 |    3 |    0 |    21 |    0 |    0 |    0 |    0 |    0 |    0 |    348 |    449 |      56 |      13 |       0 |      23 |     19 |      5 |      0 |      5 |      1 |      0 |      0 |      1 |      4 |      1 |      0 |      2 |     14 |      0 |      0 |     17 |      2 |      0 |      0 |      1 |       3 |       0 |       0 |       0 |     12 |      5 |      0 |      2 |       13 |       21 |       39 |       49 |       29 |       23 |      22 |       17 |       40 |       57 |       70 |       43 |       38 |      24 |        3 |       11 |       14 |       13 |        9 |        9 |       7 |        3 |        5 |        7 |       13 |       13 |       16 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       23 |       18 |       17 |       14 |        3 |       1 |       17 |       26 |       17 |       18 |        7 |        3 |       1 |      0 |      3 |     52 |     89 |     39 |     16 |     24 |    262 |      0 |      0 |      1 |     14 |     22 |      2 |      3 |      8 |     87 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     38 |     10 |      4 |      2 |    105 |      0 |      1 | s03      | R    |
| 45790000 |    685 |    404 |    112 |    11 |    0 |    138 |    4 |    2 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    289 |    396 |      48 |      10 |       0 |      14 |     19 |      3 |      0 |      6 |      1 |      1 |      0 |      0 |      4 |      2 |      0 |      3 |      3 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      6 |      0 |      0 |      1 |        7 |       21 |       29 |       31 |       23 |       19 |      12 |       16 |       39 |       60 |       48 |       35 |       40 |      24 |        2 |        8 |       14 |       12 |        7 |       12 |       4 |        2 |        5 |        6 |        7 |        4 |       21 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       29 |       22 |       17 |        7 |        7 |       1 |        9 |       14 |       24 |       20 |       10 |        3 |       1 |      0 |      2 |     44 |     56 |     20 |     11 |     14 |    257 |      0 |      0 |      1 |      7 |     16 |      4 |      2 |      0 |     82 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     31 |     25 |      7 |      3 |      2 |     98 |      0 |      1 | s03      | R    |
| 45810000 |    403 |    254 |     67 |    11 |    0 |     64 |    1 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    178 |    225 |      82 |      10 |       0 |      28 |      8 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      9 |      1 |      0 |      1 |        7 |        9 |       22 |       23 |       17 |       12 |       9 |        9 |       31 |       37 |       34 |       16 |       14 |      14 |        1 |        5 |       10 |        6 |        5 |        4 |       3 |        2 |        5 |        6 |        6 |        2 |        5 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |       13 |       10 |        7 |        4 |       1 |        7 |        5 |       10 |        5 |        6 |        3 |       1 |      0 |      3 |     30 |     52 |     14 |      7 |      7 |    141 |      0 |      0 |      0 |      3 |     12 |      3 |      4 |      4 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     11 |      6 |      3 |      0 |     49 |      0 |      1 | s03      | R    |
| 45820000 |    554 |    365 |     66 |     9 |    0 |    106 |    1 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    247 |    307 |      81 |       6 |       0 |      25 |     16 |      2 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      8 |      4 |      0 |     10 |      1 |      0 |      0 |      1 |       3 |       1 |       0 |       3 |      7 |      1 |      0 |      2 |        6 |       25 |       38 |       33 |       27 |       18 |       8 |       15 |       34 |       51 |       39 |       30 |       29 |      12 |        0 |       10 |        9 |        5 |        5 |        3 |       1 |        2 |        7 |        8 |        3 |        3 |        5 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       11 |       17 |       12 |        3 |        6 |       0 |        8 |       15 |       16 |       13 |        6 |        4 |       2 |      0 |      0 |     36 |     77 |     33 |      9 |      9 |    201 |      0 |      0 |      1 |     10 |     12 |      8 |      0 |      4 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     14 |     20 |      5 |      3 |      3 |     76 |      0 |      1 | s03      | R    |
| 45830001 |    733 |    472 |     99 |     8 |    0 |    135 |    3 |    3 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    339 |    394 |      95 |       8 |       0 |      30 |     10 |      7 |      0 |      3 |      2 |      1 |      0 |      4 |      2 |      2 |      0 |      2 |     21 |      7 |      0 |     17 |      2 |      1 |      0 |      2 |       5 |       1 |       0 |       4 |     13 |      3 |      0 |      7 |        7 |       31 |       49 |       51 |       24 |       21 |      17 |       11 |       54 |       53 |       57 |       31 |       28 |      38 |        3 |        7 |        8 |        8 |       11 |       10 |       6 |        0 |        5 |        6 |       13 |        5 |        6 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       24 |       28 |       11 |        7 |       10 |       0 |        8 |       26 |       22 |        5 |        7 |        7 |       1 |      0 |      3 |     52 |     68 |     31 |     16 |     12 |    290 |      0 |      0 |      0 |      5 |      9 |      6 |      8 |      5 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |     17 |      4 |      6 |      4 |    112 |      0 |      1 | s03      | R    |
| 45830002 |    125 |     77 |     23 |     0 |    0 |     23 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     54 |     71 |       5 |       2 |       0 |       1 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      1 |        2 |        1 |        5 |       10 |        3 |        6 |       0 |        1 |        9 |        3 |        9 |       13 |       15 |       0 |        0 |        1 |        4 |        4 |        2 |        2 |       0 |        0 |        2 |        0 |        2 |        2 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        1 |        2 |        2 |        2 |       0 |        0 |        0 |        3 |        6 |        1 |        1 |       0 |      0 |      1 |     10 |     16 |      3 |      3 |      6 |     38 |      0 |      0 |      0 |      3 |      6 |      3 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      4 |      1 |      1 |      0 |     15 |      0 |      1 | s03      | R    |
| 45850000 |    550 |    344 |     97 |     7 |    0 |     95 |    2 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    226 |    324 |      48 |       7 |       0 |      14 |     14 |      7 |      0 |      2 |      2 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     10 |      4 |      0 |     11 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      6 |      5 |      0 |      5 |       13 |       18 |       28 |       29 |       15 |       18 |       5 |       13 |       31 |       33 |       45 |       21 |       60 |      15 |        0 |        7 |       10 |       11 |        6 |       12 |       3 |        2 |        3 |        3 |        3 |        1 |       28 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       14 |       10 |        8 |        8 |        6 |       0 |        4 |       11 |       11 |       13 |        6 |       11 |       2 |      0 |      4 |     42 |     35 |     22 |     12 |      6 |    223 |      0 |      0 |      0 |      8 |     18 |      7 |      6 |      2 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     10 |      7 |      4 |      4 |     69 |      0 |      1 | s03      | R    |
| 45880000 |    900 |    552 |    126 |    20 |    0 |    191 |    3 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    407 |    493 |     184 |      14 |       0 |      50 |     10 |      5 |      0 |      4 |      3 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |     13 |      5 |      0 |     31 |      8 |      0 |      0 |      1 |       6 |       7 |       0 |       5 |     45 |     11 |      0 |     20 |       10 |       33 |       50 |       56 |       26 |       30 |      32 |       22 |       43 |       47 |       70 |       41 |       46 |      46 |        1 |        5 |        8 |       13 |       10 |       15 |       9 |        3 |        9 |       14 |       10 |       12 |        9 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       26 |       23 |       26 |       18 |        4 |       0 |       11 |       30 |       19 |       22 |       18 |       12 |       1 |      0 |      3 |     58 |    111 |     29 |      9 |     14 |    328 |      0 |      0 |      3 |     11 |     20 |     14 |      5 |      9 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     38 |     51 |     11 |      6 |      3 |    113 |      0 |      1 | s03      | R    |
| 45890000 |    650 |    413 |    110 |    11 |    0 |    104 |    5 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    296 |    354 |     188 |      28 |       0 |      40 |      8 |      3 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      4 |      4 |      0 |      0 |      0 |       3 |       0 |       0 |       0 |     26 |     11 |      0 |     13 |        9 |       24 |       31 |       43 |       24 |       19 |      22 |       27 |       35 |       51 |       49 |       20 |       32 |      27 |        4 |        6 |        9 |       15 |        3 |       11 |       5 |        8 |        9 |       10 |       12 |        8 |        7 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       10 |       15 |       12 |       10 |       11 |       2 |       11 |        9 |       10 |       11 |       10 |        5 |       0 |      0 |      3 |     42 |     84 |     26 |      9 |     10 |    239 |      0 |      0 |      0 |      9 |     24 |      3 |      4 |      5 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     22 |     10 |      0 |      2 |     67 |      0 |      1 | s03      | R    |
| 46400001 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 46400002 |      5 |      4 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      1 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 46410000 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 46430001 |      6 |      3 |      2 |     0 |    0 |      0 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      2 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 46450000 |     61 |     31 |     17 |     1 |    0 |     10 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     27 |     34 |       2 |       2 |       0 |       3 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        0 |        2 |        5 |        2 |        1 |       1 |        1 |        2 |        2 |        4 |        5 |        2 |       2 |        0 |        0 |        0 |        3 |        2 |        3 |       1 |        1 |        0 |        2 |        0 |        3 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        2 |        0 |        0 |       0 |        2 |        2 |        0 |        3 |        1 |        0 |       0 |      0 |      0 |      6 |      4 |      1 |      1 |      2 |     17 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 46460000 |      9 |      1 |      3 |     1 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      6 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 46463000 |      2 |      0 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 46464000 |     60 |     20 |     32 |     0 |    0 |      8 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     29 |     31 |       3 |       6 |       0 |       1 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        3 |        5 |       0 |        0 |        1 |        1 |        1 |        0 |        8 |       0 |        0 |        3 |        5 |        1 |        1 |        3 |       3 |        1 |        0 |        5 |        2 |        3 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |      3 |      0 |      2 |      3 |      1 |     11 |      0 |      0 |      0 |      6 |      4 |      0 |      1 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 46465000 |     43 |     19 |     18 |     1 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     15 |     28 |       2 |       1 |       0 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        1 |        0 |        2 |        1 |       1 |        1 |        0 |        5 |        4 |        0 |        0 |       3 |        1 |        0 |        2 |        2 |        1 |        2 |       0 |        0 |        3 |        1 |        2 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      2 |      1 |     11 |      0 |      0 |      1 |      1 |      0 |      2 |      1 |      2 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      0 |      1 | s03      | R    |
| 46466000 |    119 |     57 |     41 |     0 |    0 |     19 |    0 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     61 |     58 |       3 |       7 |       0 |       1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        9 |        6 |        5 |       2 |        3 |        3 |        8 |        7 |        4 |        3 |       2 |        2 |        2 |        5 |        5 |        2 |        5 |       2 |        1 |        1 |        3 |        6 |        3 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        5 |        2 |        2 |        1 |        0 |       0 |        1 |        1 |        4 |        2 |        2 |        0 |       0 |      0 |      1 |      6 |     11 |      5 |      5 |      5 |     24 |      0 |      0 |      0 |      6 |      8 |      1 |      1 |      1 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      2 |      1 |      0 |     10 |      0 |      1 | s03      | R    |
| 47010000 |    159 |     82 |     39 |     5 |    0 |     31 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     66 |     93 |       7 |       4 |       0 |       4 |      1 |      3 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        3 |        4 |        5 |        9 |        3 |        4 |       5 |        1 |        2 |        4 |       14 |       11 |        8 |       9 |        1 |        1 |        4 |        3 |        2 |        2 |       2 |        1 |        2 |        0 |        4 |        7 |        2 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        2 |        5 |        3 |        0 |       0 |        6 |        4 |        2 |        2 |        5 |        1 |       0 |      0 |      0 |     13 |     10 |     10 |      1 |      3 |     45 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      2 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      3 |      6 |      0 |      1 |     22 |      0 |      1 | s03      | R    |
| 47011000 |     32 |     15 |      9 |     0 |    0 |      5 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     17 |     15 |       3 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |        3 |        2 |        2 |        2 |        0 |        1 |       0 |        0 |        3 |        1 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 47040000 |    559 |    276 |    168 |     7 |    0 |     95 |    5 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    261 |    298 |      53 |      12 |       0 |      13 |     12 |      4 |      0 |      6 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      1 |      0 |      0 |      2 |       0 |       3 |       0 |       0 |      0 |      1 |      0 |      0 |        6 |       14 |       24 |       30 |       14 |       13 |      22 |       11 |       18 |       36 |       33 |       16 |       21 |      18 |        8 |        9 |       14 |       18 |       14 |        7 |      17 |        5 |        5 |       11 |       17 |       11 |       12 |      20 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        8 |       11 |       16 |        5 |        2 |       1 |       11 |       15 |       13 |       11 |        8 |        5 |       1 |      0 |      2 |     24 |     43 |     28 |     11 |      5 |    163 |      0 |      0 |      0 |     20 |     31 |     13 |      3 |      7 |     94 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     14 |     19 |      5 |      3 |      4 |     67 |      0 |      1 | s03      | R    |
| 47050000 |    584 |    316 |    134 |    11 |    0 |    103 |    6 |    0 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    264 |    320 |      52 |       8 |       0 |      29 |      8 |      3 |      0 |     12 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      5 |      2 |      0 |      3 |      5 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      5 |      3 |      0 |      1 |        1 |       13 |       32 |       28 |       22 |       16 |      22 |        5 |       25 |       37 |       48 |       22 |       17 |      28 |        2 |       11 |       15 |       11 |        8 |        7 |       9 |        2 |       11 |        8 |       16 |        7 |        7 |      20 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       14 |       24 |       15 |        4 |        4 |       3 |        8 |       15 |       21 |       14 |        6 |        2 |       1 |      0 |      1 |     28 |     56 |     28 |     12 |     12 |    179 |      0 |      0 |      0 |     13 |     23 |      3 |      6 |      4 |     85 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |     25 |      5 |      4 |      5 |     83 |      0 |      1 | s03      | R    |
| 47060000 |    925 |    481 |    276 |    16 |    0 |    138 |    5 |    2 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    356 |    569 |      52 |       9 |       0 |      24 |     26 |      8 |      0 |      7 |      1 |      6 |      0 |      1 |      2 |      1 |      0 |      2 |      5 |      2 |      0 |      3 |      4 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      9 |      1 |      0 |      1 |        6 |       22 |       30 |       31 |       18 |       33 |      15 |       11 |       38 |       50 |       43 |       31 |      116 |      37 |        3 |       20 |       20 |       15 |        8 |       40 |       5 |        3 |       13 |       16 |       16 |        8 |       92 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       24 |       18 |       16 |        6 |       15 |       2 |        8 |       11 |       17 |       12 |        9 |       20 |       1 |      0 |      1 |     57 |     71 |     47 |     14 |      8 |    283 |      0 |      0 |      4 |     35 |     50 |     17 |     23 |      9 |    138 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     27 |     27 |     17 |      2 |      1 |     94 |      0 |      1 | s03      | R    |
| 47070000 |    299 |    178 |     46 |     6 |    0 |     67 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    132 |    167 |      25 |       5 |       0 |       9 |      4 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      3 |      1 |      0 |      3 |        5 |       14 |       15 |       14 |        5 |        6 |       1 |       13 |       27 |       23 |       20 |       15 |       15 |       5 |        1 |        5 |        7 |        5 |        4 |        5 |       1 |        1 |        3 |        3 |        3 |        1 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       13 |       12 |        8 |        2 |        2 |       0 |        7 |       13 |        5 |        4 |        2 |        0 |       0 |      0 |      3 |     19 |     25 |     12 |      5 |      4 |    110 |      0 |      0 |      0 |      5 |      3 |      1 |      3 |      1 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      7 |      1 |      0 |      1 |     57 |      0 |      1 | s03      | R    |
| 47080001 |    658 |    337 |    188 |    18 |    0 |    102 |    4 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    302 |    356 |      43 |       9 |       0 |      14 |     12 |      3 |      0 |      3 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      6 |      5 |      0 |      9 |      3 |      1 |      0 |      2 |       3 |       1 |       0 |       0 |      5 |      7 |      0 |      3 |        7 |       17 |       25 |       33 |       19 |       16 |      23 |       10 |       22 |       36 |       41 |       22 |       31 |      35 |        5 |       22 |       24 |       14 |       13 |       10 |       9 |        5 |       22 |       17 |       12 |        9 |       13 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       16 |       18 |       12 |        6 |        3 |       0 |        8 |       25 |       15 |       13 |        2 |        5 |       0 |      0 |      3 |     28 |     46 |     23 |      3 |     13 |    221 |      0 |      0 |      0 |     14 |     30 |     12 |      8 |      5 |    119 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     21 |     19 |      8 |      6 |      0 |     79 |      0 |      1 | s03      | R    |
| 47090000 |    418 |    227 |     96 |    11 |    0 |     72 |    3 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    195 |    223 |      37 |       8 |       0 |      11 |      8 |      6 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |      2 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |      2 |      2 |      0 |      0 |        6 |       21 |       18 |       16 |        8 |       18 |       6 |        7 |       25 |       16 |       32 |       21 |       16 |      17 |        3 |        8 |       12 |        9 |       10 |        3 |       8 |        1 |        9 |        7 |        8 |        5 |        6 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       16 |        5 |       13 |        4 |        5 |       1 |        2 |       18 |       11 |       13 |        2 |        0 |       0 |      0 |      1 |     37 |     29 |     11 |      5 |      9 |    135 |      0 |      0 |      0 |     12 |     17 |      5 |      2 |      4 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |     12 |      6 |      2 |      1 |     55 |      0 |      1 | s03      | R    |
| 47100000 |      4 |      1 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 47120000 |    435 |    256 |     87 |     9 |    0 |     69 |    7 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    174 |    261 |      41 |       8 |       0 |      16 |      6 |      1 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      5 |      2 |      1 |      0 |      2 |       4 |       2 |       0 |       1 |      9 |      0 |      0 |      0 |        5 |        8 |       11 |       17 |       17 |       24 |      11 |       10 |       12 |       30 |       21 |       21 |       55 |      14 |        1 |        1 |        9 |       11 |        3 |        4 |       4 |        1 |        5 |       10 |       12 |        5 |       16 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |       14 |        9 |       10 |        5 |       0 |        2 |       10 |       10 |        8 |        3 |       11 |       0 |      0 |      2 |     31 |     41 |     21 |      4 |      6 |    151 |      0 |      0 |      0 |      9 |     15 |      4 |      3 |      1 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     11 |      4 |      2 |      0 |     61 |      0 |      1 | s03      | R    |
| 47130000 |    730 |    368 |    186 |    17 |    0 |    139 |    9 |    1 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    338 |    392 |      53 |      12 |       0 |      17 |      9 |      6 |      0 |      5 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      7 |      0 |     16 |      8 |      2 |      0 |      1 |       1 |       2 |       0 |       1 |      5 |      4 |      0 |      3 |       13 |       30 |       27 |       26 |       24 |       12 |      23 |       11 |       37 |       43 |       54 |       22 |       24 |      22 |        5 |       18 |       24 |       20 |        9 |       10 |       6 |        7 |       17 |       26 |       11 |        9 |       15 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       19 |       27 |       17 |       14 |        3 |       1 |       13 |       26 |       18 |       12 |        8 |        6 |       2 |      0 |      2 |     44 |     51 |     22 |      8 |     12 |    229 |      0 |      0 |      2 |     25 |     40 |      9 |      8 |      7 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     29 |     25 |     12 |      5 |      1 |    102 |      0 |      1 | s03      | R    |
| 47170000 |    521 |    237 |    180 |     5 |    0 |     89 |    4 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    234 |    287 |      29 |       8 |       0 |       7 |     17 |     13 |      0 |      9 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |     13 |      7 |      0 |     15 |      4 |      0 |      0 |      1 |       3 |       0 |       0 |       0 |      6 |      0 |      0 |      3 |        5 |       10 |       14 |       24 |       16 |       19 |       7 |        7 |       21 |       24 |       29 |       21 |       18 |      22 |        4 |       14 |       11 |       23 |       16 |       10 |      10 |        5 |        4 |       16 |       19 |       12 |       23 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       11 |        7 |       13 |        9 |        6 |       0 |        6 |       11 |       14 |       10 |        3 |        9 |       0 |      0 |      0 |     24 |     41 |     11 |      6 |     13 |    142 |      0 |      0 |      1 |     21 |     31 |     15 |      4 |      5 |    103 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     15 |     23 |      4 |      1 |      0 |     58 |      0 |      1 | s03      | R    |
| 47180001 |    423 |    216 |    121 |     6 |    0 |     73 |    3 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    204 |    219 |      21 |       6 |       0 |       1 |     14 |      6 |      0 |      4 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      4 |      0 |      8 |      2 |      2 |      0 |      0 |       0 |       0 |       0 |       1 |      7 |      4 |      0 |      3 |        4 |       13 |       20 |       23 |        9 |       13 |      11 |        5 |       12 |       24 |       29 |       19 |       14 |      20 |        4 |        1 |       14 |       15 |       14 |        6 |      15 |        1 |        5 |       12 |        9 |        7 |        6 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        5 |       12 |       10 |        6 |        4 |       0 |        5 |       10 |       12 |        7 |        6 |        4 |       0 |      0 |      1 |     17 |     23 |     22 |     11 |     10 |    132 |      0 |      0 |      0 |      8 |     21 |      6 |      3 |      5 |     78 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     15 |      7 |      1 |      4 |     46 |      0 |      1 | s03      | R    |
| 47180002 |    346 |    192 |     86 |     7 |    0 |     54 |    4 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    175 |    171 |      19 |       0 |       0 |       3 |      4 |      7 |      0 |      6 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      3 |      3 |      0 |      3 |      2 |      3 |      0 |      3 |       0 |       0 |       0 |       2 |      3 |      3 |      0 |      4 |        2 |        8 |       18 |       20 |       13 |        9 |      16 |       10 |       13 |       15 |       27 |       17 |        9 |      15 |        7 |        7 |        3 |       11 |       12 |        3 |       7 |        3 |        0 |        9 |       11 |        2 |        4 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        8 |       12 |        9 |        2 |        3 |       0 |        6 |        0 |       11 |        5 |        6 |        1 |       0 |      0 |      0 |     10 |     28 |     15 |      5 |     17 |    117 |      0 |      0 |      0 |      9 |      7 |      7 |      2 |      6 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     13 |      5 |      0 |      1 |     39 |      0 |      1 | s03      | R    |
| 47181000 |     25 |     13 |      6 |     2 |    0 |      3 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |     13 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        4 |        0 |        1 |       3 |        1 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 47190001 |    774 |    384 |    228 |    16 |    0 |    133 |    6 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    375 |    399 |      53 |      16 |       0 |       7 |     15 |      6 |      0 |      2 |      2 |      1 |      0 |      4 |      1 |      2 |      0 |      2 |     21 |     17 |      0 |     19 |      8 |      0 |      0 |      1 |       6 |       1 |       0 |       6 |      6 |      2 |      0 |      3 |        9 |       18 |       32 |       34 |       35 |       21 |      20 |        9 |       28 |       40 |       52 |       42 |       28 |      16 |        8 |       10 |       24 |       26 |       19 |       15 |      10 |        9 |        8 |       21 |       29 |        9 |       22 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       17 |       21 |       26 |        5 |        8 |       2 |       13 |       11 |       16 |       16 |        7 |        5 |       0 |      0 |      0 |     40 |     45 |     36 |     22 |     19 |    222 |      0 |      0 |      3 |     14 |     42 |     20 |     11 |      9 |    129 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     28 |     25 |     11 |      4 |      6 |     88 |      0 |      1 | s03      | R    |
| 47190002 |     58 |     37 |      7 |     1 |    0 |     12 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     24 |     34 |       5 |       0 |       0 |       2 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        6 |        4 |        0 |       1 |        2 |        2 |        7 |        4 |        3 |        2 |       3 |        0 |        0 |        3 |        0 |        0 |        0 |       1 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        1 |        3 |        3 |        1 |        0 |       0 |      0 |      0 |      5 |      3 |      4 |      1 |      1 |     23 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      9 |      0 |      1 | s03      | R    |
| 47191001 |     66 |     31 |     18 |     0 |    0 |     13 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     30 |     36 |       2 |       3 |       0 |       0 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        0 |        1 |        3 |        2 |        1 |        1 |       4 |        1 |        2 |        3 |        6 |        2 |        1 |       4 |        0 |        0 |        3 |        2 |        1 |        1 |       1 |        0 |        0 |        5 |        0 |        0 |        0 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        4 |        3 |        0 |       0 |        0 |        0 |        2 |        3 |        2 |        0 |       0 |      0 |      1 |      5 |      2 |      1 |      0 |      2 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     12 |      0 |      1 | s03      | R    |
| 47191002 |     10 |      7 |      3 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 47191003 |      6 |      4 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 47200001 |    508 |    272 |    144 |    11 |    0 |     72 |    1 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    239 |    269 |      24 |       6 |       0 |       7 |     21 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      6 |      0 |      6 |      2 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      2 |      1 |      0 |      0 |        3 |        8 |       26 |       23 |       21 |       16 |      24 |       14 |       13 |       29 |       34 |       24 |       16 |      21 |        4 |        3 |       13 |       21 |       13 |        5 |      12 |        4 |        5 |       16 |       13 |       11 |       13 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        5 |       16 |       11 |        5 |        2 |       0 |        9 |        7 |       10 |       13 |        4 |        2 |       0 |      0 |      0 |     30 |     29 |     29 |     10 |     15 |    159 |      0 |      0 |      0 |      8 |     17 |     11 |      5 |      8 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     12 |     10 |      2 |      5 |     47 |      0 |      1 | s03      | R    |
| 47200002 |     40 |     24 |     11 |     0 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     18 |     22 |       7 |       0 |       0 |       1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        2 |        2 |        2 |       2 |        2 |        0 |        0 |        6 |        1 |        2 |       3 |        1 |        0 |        2 |        0 |        1 |        1 |       0 |        1 |        1 |        0 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      4 |      2 |      0 |     14 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 47210000 |    578 |    250 |    219 |     8 |    0 |     91 |    2 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    277 |    301 |      20 |       8 |       0 |       6 |      6 |      4 |      0 |      1 |      2 |      1 |      0 |      2 |      5 |      3 |      0 |      2 |      4 |      5 |      0 |      5 |      8 |      3 |      0 |      1 |       0 |       3 |       0 |       1 |      9 |      4 |      0 |      0 |        5 |        9 |       17 |       35 |       19 |       14 |      18 |        9 |       11 |       15 |       33 |       18 |       25 |      22 |        6 |       11 |       12 |       28 |       17 |       12 |      19 |        6 |        7 |       16 |       27 |       17 |       20 |      21 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       11 |        9 |       14 |       10 |        5 |       0 |        5 |       11 |        8 |       17 |        8 |        3 |       2 |      0 |      0 |     16 |     33 |     13 |     11 |     19 |    158 |      0 |      0 |      0 |     23 |     26 |     15 |     15 |      9 |    131 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |     18 |      7 |      5 |      2 |     61 |      0 |      1 | s03      | R    |
| 47220000 |    776 |    391 |    188 |    19 |    0 |    164 |    5 |    2 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    346 |    430 |      67 |      19 |       0 |      28 |      7 |      3 |      0 |     10 |      3 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      1 |      3 |      0 |      5 |      3 |      0 |      0 |      3 |       0 |       1 |       0 |       1 |      7 |      4 |      0 |      0 |       11 |       33 |       35 |       37 |       22 |       14 |       8 |       17 |       48 |       49 |       40 |       24 |       41 |      12 |        8 |       25 |       29 |       14 |        8 |        5 |       5 |        8 |       26 |       18 |       13 |       11 |       12 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       21 |       22 |       14 |       13 |        7 |       0 |       15 |       32 |       26 |       16 |       10 |        6 |       0 |      0 |      4 |     41 |     67 |     28 |      9 |      7 |    235 |      0 |      0 |      0 |     20 |     33 |     13 |     11 |     13 |     98 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     29 |     36 |      9 |      6 |      0 |    115 |      0 |      1 | s03      | R    |
| 47230000 |    731 |    395 |    144 |    24 |    0 |    150 |    9 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    307 |    424 |      56 |      14 |       0 |      18 |     13 |      6 |      0 |      6 |      2 |      1 |      0 |      7 |      2 |      0 |      0 |      0 |      3 |      1 |      0 |      4 |      2 |      2 |      0 |      1 |       0 |       0 |       0 |       1 |      8 |      1 |      0 |      2 |        6 |       27 |       22 |       32 |       24 |       25 |      10 |       14 |       45 |       42 |       56 |       33 |       33 |      26 |        5 |       11 |       14 |       11 |       10 |        7 |       5 |        3 |       13 |       11 |       13 |       11 |       19 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       26 |       25 |       17 |       10 |        3 |       0 |        8 |       28 |       24 |       19 |        8 |        4 |       3 |      0 |      3 |     38 |     56 |     30 |     14 |      8 |    246 |      0 |      0 |      3 |     11 |     13 |      7 |      6 |      9 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     35 |     31 |      8 |      6 |      2 |    109 |      0 |      1 | s03      | R    |
| 47240000 |    949 |    489 |    288 |     5 |    0 |    148 |    4 |    1 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    434 |    515 |      49 |      21 |       0 |      20 |     21 |     16 |      0 |      6 |      4 |      2 |      0 |      3 |      9 |      5 |      0 |      0 |     21 |      8 |      0 |     16 |      6 |      4 |      0 |      2 |       0 |       1 |       0 |       1 |     11 |      3 |      0 |      4 |       20 |       15 |       42 |       45 |       36 |       23 |      33 |       11 |       20 |       56 |       73 |       35 |       34 |      46 |       10 |       17 |       23 |       28 |       21 |       13 |      20 |       12 |       11 |       19 |       39 |       20 |       28 |      27 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       18 |       19 |       17 |       10 |        8 |       0 |       20 |       14 |       21 |       15 |        8 |        6 |       0 |      0 |      2 |     49 |     65 |     52 |     19 |     20 |    282 |      0 |      0 |      3 |     23 |     42 |     24 |      3 |     15 |    178 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     33 |      8 |      2 |      5 |    106 |      0 |      1 | s03      | R    |
| 47250000 |    560 |    278 |    162 |    13 |    0 |     98 |    4 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    258 |    302 |      28 |       4 |       0 |      11 |     14 |      7 |      0 |      5 |      0 |      1 |      0 |      1 |      4 |      0 |      0 |      1 |     10 |      8 |      0 |      2 |     10 |      3 |      0 |      3 |       2 |       2 |       0 |       0 |      7 |      0 |      0 |      1 |        6 |       13 |       24 |       28 |       11 |       17 |      18 |       15 |       12 |       44 |       26 |       21 |       21 |      22 |        5 |        8 |       13 |       20 |       14 |        4 |      14 |        7 |        6 |       12 |       21 |       10 |       10 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       10 |       10 |       14 |        9 |        4 |       1 |       10 |       12 |       14 |       12 |        4 |        3 |       2 |      0 |      6 |     26 |     41 |     19 |      7 |      4 |    175 |      0 |      0 |      0 |     13 |     25 |      7 |     10 |     12 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     14 |     11 |      0 |      4 |     68 |      0 |      1 | s03      | R    |
| 47261000 |    423 |    212 |    134 |     4 |    0 |     69 |    3 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    195 |    228 |      23 |       4 |       0 |       8 |      8 |      6 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      4 |      5 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      5 |      0 |      2 |        6 |        4 |       23 |       18 |       11 |        7 |      17 |       12 |       10 |       19 |       30 |       20 |        8 |      27 |        5 |        3 |       15 |       16 |       10 |        6 |      12 |        2 |        8 |       11 |       12 |        8 |       13 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        5 |       16 |       10 |        5 |        0 |       0 |        9 |        6 |       11 |        4 |        4 |        1 |       0 |      0 |      0 |     14 |     24 |     13 |     10 |      7 |    144 |      0 |      0 |      3 |     13 |     19 |      6 |      4 |      9 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     11 |      5 |      2 |      3 |     48 |      0 |      1 | s03      | R    |
| 47262000 |    237 |    116 |     72 |     6 |    0 |     39 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    108 |    129 |       9 |       4 |       0 |       4 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      4 |      0 |      7 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |        6 |        7 |        5 |        5 |        8 |      11 |        4 |        6 |       12 |       12 |        9 |       15 |      13 |        2 |        7 |        7 |       10 |        2 |        3 |       4 |        0 |        6 |        6 |        6 |        4 |        5 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        3 |        9 |        6 |        2 |        3 |       1 |        2 |        3 |        6 |        4 |        1 |        5 |       0 |      0 |      1 |     11 |     12 |      9 |      3 |      2 |     78 |      0 |      0 |      0 |      2 |     17 |      5 |      3 |      2 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     11 |      0 |      1 |      0 |     31 |      0 |      1 | s03      | R    |
| 47270000 |    380 |    213 |    102 |     5 |    0 |     53 |    0 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    159 |    221 |      23 |       7 |       0 |       6 |     12 |      8 |      0 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |       1 |       1 |       0 |       0 |      4 |      2 |      0 |      2 |        6 |       12 |        9 |       17 |       11 |       17 |      10 |        6 |       22 |       21 |       18 |       17 |       31 |      16 |        3 |        7 |        5 |        8 |       11 |        9 |       4 |        3 |        8 |        7 |        9 |        8 |       14 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        5 |       10 |        9 |        0 |        5 |       0 |        7 |        5 |        4 |        7 |        4 |        8 |       0 |      0 |      2 |     17 |     36 |     21 |      6 |      6 |    125 |      0 |      0 |      0 |     11 |     22 |      5 |      3 |      4 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |     12 |      4 |      3 |      1 |     36 |      0 |      1 | s03      | R    |
| 47280000 |    127 |     63 |     35 |     4 |    0 |     22 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     63 |     64 |      10 |       1 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |       4 |       1 |       0 |       1 |      1 |      2 |      0 |      0 |        1 |        4 |        5 |        9 |        4 |        3 |       2 |        4 |        3 |        8 |        7 |        3 |        4 |       6 |        2 |        2 |        4 |        3 |        5 |        1 |       1 |        0 |        2 |        3 |        4 |        2 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        7 |        3 |        1 |        2 |       0 |        3 |        3 |        4 |        1 |        0 |        1 |       0 |      0 |      0 |      7 |     12 |      6 |      3 |      0 |     35 |      0 |      0 |      0 |      4 |      4 |      2 |      5 |      1 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      6 |      0 |      2 |      0 |     18 |      0 |      1 | s03      | R    |
| 47292000 |      1 |      0 |      0 |     1 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 47300000 |    595 |    284 |    220 |     7 |    0 |     76 |    3 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    295 |    300 |      22 |      10 |       0 |       2 |     22 |      9 |      0 |      6 |      1 |      1 |      0 |      2 |      5 |      2 |      0 |      2 |      5 |     11 |      0 |     12 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      0 |      0 |       10 |        7 |       22 |       25 |       21 |       14 |      29 |        9 |       22 |       28 |       37 |       17 |       11 |      32 |        8 |       13 |       22 |       28 |        8 |       11 |      23 |        2 |        8 |       16 |       17 |       15 |       18 |      31 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |        7 |       11 |       11 |       10 |        3 |       0 |        4 |        8 |        7 |        9 |        7 |        0 |       2 |      0 |      2 |     31 |     27 |     15 |     14 |     16 |    179 |      0 |      0 |      0 |     25 |     24 |     13 |      8 |     14 |    136 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     17 |      7 |      2 |      2 |     52 |      0 |      1 | s03      | R    |
| 47310001 |    446 |    241 |    147 |     5 |    0 |     52 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    207 |    239 |      27 |       5 |       0 |       7 |      8 |      6 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |      5 |      5 |      1 |      0 |      0 |       2 |       1 |       0 |       1 |      6 |      1 |      0 |      0 |        4 |        6 |       15 |       19 |       19 |       18 |      24 |        4 |       15 |       18 |       29 |       16 |       25 |      29 |        3 |        6 |       16 |       14 |       11 |        8 |      14 |        4 |        4 |       12 |       15 |       10 |        6 |      24 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        3 |        4 |        7 |        8 |        1 |       0 |        6 |        2 |        8 |        7 |        2 |        2 |       1 |      0 |      2 |      9 |     31 |     22 |     15 |     14 |    148 |      0 |      0 |      1 |      8 |     23 |     10 |      8 |      6 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      7 |      7 |      0 |      1 |     31 |      0 |      1 | s03      | R    |
| 47310002 |     15 |      8 |      3 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |     10 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        1 |        0 |        1 |        0 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      1 | s03      | R    |
| 47320001 |     81 |     31 |     29 |     2 |    0 |     16 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     37 |     44 |       2 |       2 |       0 |       0 |      4 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        2 |        1 |        1 |        1 |        3 |       3 |        0 |        0 |        2 |        5 |        6 |        1 |       6 |        1 |        1 |        2 |        3 |        3 |        2 |       2 |        0 |        0 |        4 |        1 |        0 |        7 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        1 |        5 |        2 |        1 |       0 |        2 |        2 |        2 |        1 |        0 |        2 |       0 |      0 |      0 |      4 |      2 |      3 |      1 |      3 |     18 |      0 |      0 |      0 |      6 |      5 |      0 |      0 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      1 |     13 |      0 |      1 | s03      | R    |
| 47320002 |     44 |     15 |     22 |     0 |    0 |      6 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     22 |     22 |       0 |       2 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        6 |        1 |        1 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       1 |        0 |        1 |        0 |        1 |        6 |        2 |       0 |        1 |        0 |        0 |        3 |        7 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      2 |      0 |      2 |      7 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      1 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 47320003 |    418 |    148 |    215 |     5 |    0 |     44 |    2 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    196 |    222 |       4 |       4 |       0 |       1 |     10 |      9 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      1 |      0 |      2 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      1 |        4 |        1 |        5 |       22 |       10 |       15 |       9 |        2 |        2 |       14 |       18 |       14 |       20 |      12 |        6 |        6 |       20 |       16 |       21 |       21 |      18 |        6 |        4 |       15 |       17 |       18 |       17 |      30 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        4 |        7 |        4 |        3 |       0 |        4 |        5 |        7 |       12 |        1 |        3 |       1 |      0 |      0 |     10 |     15 |     15 |     12 |     10 |     86 |      0 |      0 |      1 |     17 |     38 |     13 |      6 |     14 |    126 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     14 |      2 |      0 |      1 |     26 |      0 |      1 | s03      | R    |
| 47320004 |     98 |     30 |     49 |     1 |    0 |     16 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     40 |     58 |       0 |       1 |       0 |       0 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        3 |        2 |        3 |       1 |        2 |        2 |        5 |        0 |        2 |        3 |       3 |        1 |        0 |        3 |        5 |        4 |        2 |       5 |        4 |        1 |        4 |        5 |        5 |        6 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        3 |        1 |       0 |        3 |        3 |        1 |        2 |        0 |        0 |       3 |      0 |      0 |      3 |      5 |      3 |      3 |      2 |     14 |      0 |      0 |      0 |      3 |      9 |      5 |      4 |      1 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |     16 |      0 |      1 | s03      | R    |
| 47330001 |    266 |    109 |    112 |     7 |    0 |     37 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    118 |    148 |       7 |       6 |       0 |       8 |      3 |      4 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      4 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        2 |        8 |        6 |       13 |       9 |        7 |        7 |       10 |       14 |       11 |        9 |      10 |        2 |        8 |        3 |        8 |       10 |       12 |       8 |        1 |        5 |        7 |        9 |       10 |       10 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        7 |        6 |        3 |        4 |        5 |       0 |        4 |        4 |        2 |        2 |        5 |        2 |       0 |      0 |      0 |      8 |     11 |      4 |      3 |      3 |     80 |      0 |      0 |      0 |      2 |     24 |      5 |      7 |      3 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      8 |      4 |      1 |      0 |     27 |      0 |      1 | s03      | R    |
| 47330002 |    171 |     86 |     55 |     1 |    0 |     28 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     88 |     83 |      20 |       6 |       0 |       5 |      5 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      3 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        4 |        6 |        4 |        9 |        9 |        4 |       2 |        3 |        4 |        4 |       19 |       12 |        3 |       3 |        2 |        1 |        6 |        4 |       10 |        6 |       4 |        1 |        2 |        5 |        3 |        2 |        4 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        0 |        3 |        7 |        2 |        0 |       1 |        3 |        2 |        2 |        4 |        1 |        1 |       0 |      0 |      0 |      9 |      3 |      8 |      6 |     10 |     50 |      0 |      0 |      0 |      7 |     11 |      0 |      3 |      6 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      5 |      2 |      1 |      3 |     13 |      0 |      1 | s03      | R    |
| 47330003 |    131 |     66 |     52 |     1 |    0 |     11 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     60 |     71 |       6 |       0 |       0 |       1 |      6 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        2 |        4 |        6 |        7 |        6 |       4 |        6 |        2 |        5 |        7 |        8 |        4 |       5 |        2 |        1 |        1 |       10 |        5 |        4 |       2 |        5 |        1 |        2 |        8 |        4 |        5 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        0 |        1 |        1 |        0 |        1 |       0 |        1 |        2 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |      9 |      9 |      6 |      3 |      2 |     37 |      0 |      0 |      1 |      6 |      6 |      2 |      5 |      4 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |     10 |      0 |      1 | s03      | R    |
| 47330004 |     82 |     34 |     37 |     0 |    0 |     10 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     38 |     44 |      11 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        3 |        3 |        4 |        2 |       0 |        0 |        0 |        2 |        4 |        6 |        4 |       5 |        1 |        1 |        3 |        1 |        2 |        7 |       4 |        0 |        1 |        4 |        1 |        3 |        4 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        0 |        1 |        2 |        0 |       0 |        0 |        3 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |     28 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      2 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      2 |      2 |      0 |      3 |      0 |      1 | s03      | R    |
| 47340000 |    461 |    217 |    147 |     8 |    0 |     84 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    220 |    241 |      22 |       9 |       0 |      11 |     15 |      3 |      0 |      4 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      2 |        8 |        7 |       16 |       22 |       16 |       13 |      14 |        3 |       16 |       34 |       21 |       14 |       13 |      20 |        3 |        9 |       17 |       11 |       14 |        4 |      14 |        5 |        5 |       17 |       13 |        9 |        9 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       10 |       14 |       11 |        9 |        3 |       1 |        5 |       10 |       11 |       11 |        4 |        4 |       0 |      0 |      1 |     21 |     28 |     24 |     11 |     13 |    119 |      0 |      0 |      2 |     11 |     24 |      6 |      2 |      9 |     93 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     24 |     14 |      6 |      4 |      4 |     45 |      0 |      1 | s03      | R    |
| 47350000 |    572 |    299 |    180 |     6 |    0 |     79 |    5 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    266 |    306 |      11 |       9 |       0 |       1 |     14 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |     12 |      2 |      0 |     13 |      1 |      0 |      0 |      3 |       0 |       0 |       0 |       2 |      4 |      3 |      0 |      0 |        5 |       13 |       14 |       37 |       19 |       11 |      23 |        7 |       12 |       32 |       48 |       25 |       27 |      26 |        5 |        2 |       25 |       20 |       13 |       10 |      15 |        7 |        7 |       16 |       17 |       11 |       15 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        5 |        7 |       17 |        7 |        5 |       2 |        4 |        8 |        4 |       16 |        6 |        1 |       0 |      0 |      1 |     27 |     32 |     23 |     13 |     22 |    181 |      0 |      0 |      2 |     14 |     28 |     13 |     10 |      5 |    108 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     18 |      9 |      3 |      3 |     46 |      0 |      1 | s03      | R    |
| 47360001 |    475 |    204 |    184 |     7 |    0 |     73 |    3 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    243 |      22 |       6 |       0 |      11 |      9 |      7 |      0 |      2 |      2 |      0 |      0 |      1 |      4 |      4 |      0 |      0 |      6 |      2 |      0 |      4 |      2 |      0 |      0 |      1 |       1 |       1 |       0 |       1 |      1 |      0 |      0 |      5 |        1 |        5 |       18 |       23 |        9 |       12 |      14 |        7 |       12 |       19 |       26 |       16 |       14 |      28 |        6 |        8 |       17 |       21 |       19 |       15 |      10 |        5 |        5 |       21 |       15 |       15 |        9 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       11 |       11 |       15 |        4 |        9 |       1 |        5 |        3 |       13 |       10 |        1 |        1 |       0 |      0 |      0 |     12 |     21 |     21 |     18 |      6 |    126 |      0 |      0 |      0 |      7 |     29 |     21 |      7 |      7 |    113 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |     12 |      4 |      0 |      4 |     57 |      0 |      1 | s03      | R    |
| 47360002 |     33 |     17 |      7 |     0 |    0 |      7 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |     21 |       2 |       1 |       0 |       0 |      2 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        2 |       0 |        0 |        4 |        3 |        4 |        0 |        1 |       1 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |      3 |      2 |      1 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 47370000 |    399 |    180 |    172 |     4 |    0 |     37 |    3 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    188 |    211 |      18 |       9 |       0 |       5 |      3 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       3 |      2 |      1 |      0 |      3 |        7 |        5 |       12 |       14 |        5 |       18 |      15 |        6 |        4 |       17 |       21 |       13 |       21 |      22 |        4 |        4 |       15 |       19 |        9 |       21 |      16 |       10 |        0 |       11 |       13 |        8 |       22 |      20 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        2 |        5 |        8 |        3 |        1 |       1 |        6 |        4 |        6 |        2 |        3 |        1 |       1 |      0 |      0 |     16 |     13 |     17 |     13 |      6 |    115 |      0 |      0 |      0 |      6 |     28 |     14 |      7 |      9 |    108 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |     12 |      1 |      0 |      4 |     20 |      0 |      1 | s03      | R    |
| 47380001 |    388 |    182 |    131 |     8 |    0 |     61 |    3 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    170 |    218 |      13 |       8 |       0 |       6 |      6 |      4 |      0 |      6 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      6 |      1 |      0 |      5 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      0 |        3 |        0 |       13 |       23 |       14 |        8 |       7 |        6 |        8 |       21 |       33 |       17 |       14 |      15 |        2 |        6 |       15 |       20 |        8 |       11 |       7 |        7 |        7 |        9 |       11 |       11 |        8 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        4 |       10 |        6 |        6 |        1 |       2 |        8 |        8 |       11 |        8 |        5 |        1 |       1 |      0 |      0 |     13 |     25 |     14 |     12 |     12 |    106 |      0 |      0 |      0 |      9 |     22 |      5 |      1 |     14 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |      7 |      7 |      7 |      3 |     39 |      0 |      1 | s03      | R    |
| 47380002 |    295 |    131 |    108 |     5 |    0 |     48 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    142 |    153 |       8 |       3 |       0 |       0 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      4 |      3 |      0 |      3 |      2 |      2 |      0 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        5 |       10 |       16 |        7 |        4 |      11 |        5 |       12 |        9 |       26 |        6 |        9 |      10 |        3 |        4 |       16 |       11 |        9 |        8 |      10 |        2 |        4 |        9 |        5 |        7 |        9 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        7 |        4 |        6 |        4 |        1 |       1 |        2 |        5 |        9 |        8 |        4 |        1 |       0 |      0 |      2 |     15 |     21 |      9 |      5 |      8 |     71 |      0 |      0 |      0 |      7 |     17 |      9 |      2 |      4 |     69 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      7 |     10 |      2 |      2 |      0 |     33 |      0 |      1 | s03      | R    |
| 47390000 |    664 |    304 |    230 |     8 |    0 |    115 |    2 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    323 |    341 |      29 |      10 |       0 |      12 |     13 |      8 |      0 |      3 |      3 |      2 |      0 |      0 |      3 |      3 |      0 |      2 |     14 |     21 |      0 |     22 |      2 |      2 |      0 |      3 |       0 |       0 |       0 |       2 |      5 |      0 |      0 |      0 |       24 |        6 |       22 |       45 |       26 |        6 |       0 |       25 |        9 |       25 |       83 |       27 |        3 |       3 |       14 |        9 |       14 |       61 |       25 |        8 |       1 |       11 |        5 |       12 |       50 |       14 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |        6 |        6 |       20 |       10 |        1 |       0 |       27 |        5 |        8 |       19 |        6 |        3 |       0 |      0 |      0 |     23 |     34 |     28 |     10 |     27 |    182 |      0 |      0 |      0 |     16 |     33 |     18 |     12 |     35 |    116 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     18 |      4 |      3 |      6 |     78 |      0 |      1 | s03      | R    |
| 47392001 |    238 |    121 |     83 |     2 |    0 |     27 |    2 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    119 |    119 |      24 |       1 |       0 |       3 |      3 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |      3 |      6 |      0 |      2 |      4 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        6 |        6 |        6 |       17 |       12 |        8 |       0 |        3 |        3 |        8 |       28 |       15 |        8 |       1 |        8 |        3 |        9 |       13 |        7 |        5 |       2 |        2 |        0 |        5 |       13 |       10 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        2 |        7 |        4 |        1 |       1 |        6 |        2 |        3 |        5 |        1 |        0 |       0 |      0 |      0 |     12 |     16 |     11 |      3 |      8 |     71 |      0 |      0 |      0 |      5 |     16 |     10 |      7 |      3 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      5 |      3 |      0 |      2 |     18 |      0 |      1 | s03      | R    |
| 47392002 |    249 |    108 |     93 |     3 |    0 |     42 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    124 |    125 |       7 |       6 |       0 |       3 |      5 |      6 |      0 |      3 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      1 |      4 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       1 |      0 |      0 |      0 |      0 |        5 |        7 |        6 |       15 |       12 |        4 |       2 |        8 |        4 |        9 |       20 |       11 |        3 |       2 |        9 |        2 |        3 |       13 |       13 |        4 |       1 |        4 |        6 |        8 |       19 |        7 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |        2 |        0 |        7 |        5 |        0 |       0 |        6 |        1 |        2 |        9 |        2 |        0 |       0 |      0 |      0 |      7 |     15 |      5 |      2 |      6 |     73 |      0 |      0 |      3 |     13 |     11 |      9 |      2 |      4 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      7 |      8 |      5 |      4 |      3 |     19 |      0 |      1 | s03      | R    |
| 47400000 |    489 |    227 |    160 |     7 |    0 |     85 |    5 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    244 |    245 |      18 |      10 |       0 |       2 |      7 |     13 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      3 |      4 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       0 |      4 |      0 |      0 |      1 |        7 |        7 |       14 |       29 |       14 |       12 |      15 |        8 |        8 |       21 |       33 |       26 |       17 |      16 |        7 |       11 |       11 |       19 |       11 |       16 |      12 |        4 |        8 |       10 |       19 |       10 |       13 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        4 |       12 |       17 |        8 |        7 |       2 |        4 |        8 |        9 |        9 |        5 |        6 |       2 |      0 |      0 |     22 |     37 |     21 |      5 |      7 |    135 |      0 |      0 |      0 |     11 |     24 |     16 |     10 |      8 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     18 |      7 |      3 |      5 |     56 |      0 |      1 | s03      | R    |
| 47401001 |    174 |     99 |     45 |     1 |    0 |     25 |    0 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     82 |     92 |       7 |       2 |       0 |       1 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      4 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        1 |        9 |       10 |        8 |        7 |       5 |        3 |        4 |        9 |       15 |        7 |        9 |       8 |        0 |        1 |        1 |        4 |        3 |        3 |       7 |        0 |        3 |        5 |        4 |        1 |        4 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        3 |        5 |        4 |        0 |        2 |       2 |        0 |        2 |        5 |        1 |        1 |        1 |       1 |      0 |      0 |     13 |     10 |      6 |      2 |      4 |     64 |      0 |      0 |      0 |      2 |      4 |      5 |      0 |      2 |     32 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      6 |      1 |      0 |      0 |     15 |      0 |      1 | s03      | R    |
| 47401002 |     53 |     26 |     22 |     0 |    0 |      4 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     25 |     28 |       2 |       1 |       0 |       0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        0 |        2 |        1 |        4 |        3 |        1 |       0 |        3 |        0 |        4 |        6 |        2 |        0 |       0 |        3 |        1 |        1 |        2 |        3 |        1 |       0 |        0 |        1 |        1 |        2 |        3 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      7 |      0 |      0 |     15 |      0 |      0 |      0 |      3 |      5 |      2 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 47401003 |     18 |      5 |     10 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      9 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      1 | s03      | R    |
| 47402001 |    390 |    220 |    101 |     6 |    0 |     58 |    2 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    179 |    211 |      18 |       4 |       0 |       6 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      9 |      0 |      6 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      3 |        8 |        6 |       17 |       28 |        9 |       15 |      15 |        4 |        9 |       25 |       34 |       20 |       16 |      14 |        2 |        4 |       11 |       10 |        9 |        5 |       8 |        2 |        6 |        8 |       11 |        3 |       12 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        2 |        7 |       14 |        5 |        0 |       0 |        3 |       12 |        5 |       11 |        6 |        0 |       0 |      0 |      0 |      8 |     26 |     21 |     16 |     15 |    134 |      0 |      0 |      2 |      8 |     13 |      9 |      2 |      7 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     10 |     15 |      2 |      8 |      2 |     30 |      0 |      1 | s03      | R    |
| 47402002 |      9 |      3 |      4 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 47410001 |     76 |     36 |     28 |     0 |    0 |     10 |    0 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     37 |     39 |       3 |       0 |       0 |       0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        0 |        4 |        5 |        1 |        4 |       4 |        1 |        1 |        3 |        3 |        1 |        3 |       5 |        1 |        1 |        2 |        4 |        1 |        2 |       0 |        1 |        0 |        4 |        2 |        2 |        3 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        3 |        0 |        0 |        1 |       1 |        0 |        0 |        1 |        2 |        0 |        1 |       1 |      0 |      0 |      0 |      4 |      5 |      1 |      3 |     23 |      0 |      0 |      0 |      1 |      2 |      1 |      2 |      1 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |      5 |      0 |      1 | s03      | R    |
| 47410002 |     14 |      6 |      7 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |      4 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       2 |        0 |        0 |        0 |        1 |        0 |        1 |       1 |        0 |        2 |        0 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 47420000 |    738 |    346 |    271 |    16 |    0 |     94 |    2 |    2 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    354 |    384 |      25 |      18 |       0 |       4 |      5 |      6 |      0 |      0 |      1 |      0 |      0 |      2 |      4 |      2 |      0 |      2 |      3 |     11 |      0 |      7 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      0 |      0 |      1 |       14 |       11 |       30 |       43 |       19 |       13 |      25 |       10 |       11 |       44 |       53 |       28 |       24 |      21 |       12 |       12 |       29 |       29 |       19 |       16 |      17 |        8 |        7 |       28 |       27 |       17 |       25 |      25 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       15 |        8 |       19 |        3 |        4 |       2 |        7 |       11 |       15 |       14 |        2 |        5 |       2 |      0 |      2 |     26 |     47 |     38 |     19 |     20 |    194 |      0 |      0 |      4 |     21 |     49 |     18 |     13 |     11 |    155 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     17 |     11 |      1 |      4 |     75 |      0 |      1 | s03      | R    |
| 47430000 |    484 |    233 |    158 |     8 |    0 |     77 |    3 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    222 |    262 |      13 |       8 |       0 |       4 |     10 |      9 |      0 |      1 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |     14 |      5 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        7 |        9 |       18 |       25 |       11 |       11 |       7 |       10 |       14 |       26 |       28 |       22 |       22 |      23 |        8 |        6 |       13 |       20 |       18 |       13 |       8 |        2 |        8 |       13 |       18 |        9 |        9 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |        3 |       11 |       12 |        8 |        0 |       0 |        8 |        3 |       12 |       14 |        5 |        2 |       1 |      0 |      1 |     13 |     34 |     19 |     12 |     18 |    136 |      0 |      0 |      0 |     15 |     28 |      6 |      5 |     15 |     89 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     16 |      4 |      4 |      1 |     57 |      0 |      1 | s03      | R    |
| 47450000 |    715 |    352 |    231 |    14 |    0 |    109 |    4 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    332 |    383 |      34 |      12 |       0 |       7 |     28 |      5 |      0 |      5 |      3 |      0 |      0 |      6 |      2 |      2 |      0 |      0 |      6 |     14 |      0 |      8 |      3 |      1 |      0 |      0 |       0 |       0 |       0 |       1 |      8 |      5 |      0 |      3 |       11 |       15 |       19 |       38 |       25 |       25 |      25 |       10 |       25 |       26 |       33 |       32 |       32 |      36 |        6 |       22 |       18 |       21 |       11 |       13 |      16 |        3 |       14 |       28 |       19 |       14 |       22 |      24 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        9 |       16 |       15 |       15 |        2 |       0 |       12 |       11 |       12 |       15 |        7 |        8 |       0 |      0 |      3 |     28 |     47 |     22 |     16 |     14 |    222 |      0 |      0 |      2 |     27 |     35 |     16 |      5 |     10 |    136 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     22 |      6 |      6 |      5 |     74 |      0 |      1 | s03      | R    |
| 47460000 |    730 |    368 |    209 |    16 |    0 |    122 |    6 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    351 |    379 |      27 |       8 |       0 |       9 |     10 |      1 |      0 |      4 |      2 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      5 |      3 |      0 |     14 |      1 |      0 |      0 |      4 |       0 |       1 |       0 |       0 |      9 |      1 |      0 |      0 |        5 |       16 |       27 |       36 |       25 |       12 |      21 |       15 |       28 |       46 |       56 |       28 |       21 |      32 |       10 |       16 |       19 |       31 |       12 |       17 |       6 |        5 |       11 |       14 |       24 |       16 |       12 |      16 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       21 |       23 |       25 |       10 |        6 |       1 |       11 |        7 |       17 |       12 |        4 |        2 |       2 |      0 |      0 |     41 |     59 |     30 |      8 |     22 |    208 |      0 |      0 |      0 |     16 |     34 |     17 |      9 |      8 |    125 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     21 |     13 |      8 |      4 |     79 |      0 |      1 | s03      | R    |
| 47470001 |    634 |    325 |    169 |    16 |    0 |    113 |    4 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    284 |    350 |      35 |      12 |       0 |      12 |     10 |      4 |      0 |      9 |      2 |      1 |      0 |      1 |      3 |      1 |      0 |      0 |     12 |      3 |      0 |      2 |      2 |      1 |      0 |      1 |       3 |       0 |       0 |       0 |      4 |      0 |      0 |      1 |        3 |       11 |       21 |       35 |       20 |       17 |      18 |       14 |       17 |       35 |       46 |       24 |       35 |      29 |       11 |       10 |       18 |       14 |        9 |        9 |      11 |        6 |        9 |       13 |       13 |       13 |       14 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       18 |       15 |       20 |        7 |        6 |       0 |        6 |       15 |       16 |       14 |        6 |        6 |       0 |      0 |      2 |     24 |     56 |     28 |     15 |      3 |    197 |      0 |      0 |      1 |     12 |     29 |      8 |      9 |      5 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     18 |     10 |      3 |     10 |     76 |      0 |      1 | s03      | R    |
| 47470002 |      5 |      3 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      2 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 47472001 |     54 |     20 |     23 |     1 |    0 |      9 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     34 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        0 |        4 |       0 |        2 |        1 |        3 |        2 |        1 |        2 |       2 |        1 |        0 |        1 |        2 |        1 |        1 |       2 |        3 |        0 |        2 |        1 |        1 |        3 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        3 |       0 |      0 |      0 |      5 |      1 |      3 |      1 |      0 |     10 |      0 |      0 |      0 |      2 |      4 |      0 |      2 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      7 |      0 |      1 | s03      | R    |
| 47472002 |      9 |      4 |      4 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 47490000 |    744 |    361 |    188 |    24 |    0 |    158 |    5 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    333 |    411 |      35 |       6 |       0 |      17 |     11 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |     11 |      4 |      3 |      0 |      6 |       0 |       0 |       0 |       5 |      6 |      7 |      0 |      6 |       12 |       18 |       17 |       39 |       18 |       24 |      18 |       15 |       36 |       38 |       44 |       24 |       37 |      21 |        8 |       15 |       18 |       15 |       18 |       14 |       9 |        8 |       12 |       20 |       15 |       10 |       14 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       19 |       22 |       20 |        9 |        5 |       3 |       15 |       21 |       31 |       17 |       14 |        4 |       3 |      0 |      1 |     37 |     55 |     27 |     14 |     17 |    210 |      0 |      0 |      3 |     20 |     36 |      5 |      4 |      8 |    112 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     28 |     19 |      7 |      4 |      2 |    135 |      0 |      1 | s03      | R    |
| 47500000 |    764 |    382 |    248 |     5 |    0 |    122 |    3 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    363 |    401 |      35 |      15 |       0 |      14 |     28 |     19 |      0 |      8 |      0 |      0 |      0 |      0 |     10 |      1 |      0 |      2 |     13 |      5 |      0 |     14 |      2 |      3 |      0 |      4 |       0 |       1 |       0 |       0 |      5 |      0 |      0 |      0 |       13 |        7 |       27 |       43 |       29 |       24 |      14 |        9 |       16 |       34 |       58 |       46 |       42 |      20 |        6 |        7 |       24 |       31 |       38 |       25 |      12 |        3 |       13 |       12 |       30 |       20 |       20 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        9 |        7 |       18 |       12 |        8 |       1 |       13 |        7 |       15 |       20 |       10 |        2 |       4 |      0 |      1 |     47 |     42 |     35 |     18 |     26 |    213 |      0 |      0 |      1 |     24 |     35 |     10 |      7 |     23 |    148 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     21 |     18 |     11 |      1 |      6 |     77 |      0 |      1 | s03      | R    |
| 47501000 |      2 |      2 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 47510000 |    761 |    347 |    281 |    14 |    0 |    114 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    387 |    374 |      32 |       8 |       0 |       6 |     22 |      9 |      0 |      5 |      3 |      1 |      0 |      3 |      5 |      1 |      0 |      0 |     19 |     12 |      0 |      6 |      0 |      0 |      0 |      4 |       1 |       1 |       0 |       0 |      5 |      4 |      0 |      2 |       17 |       14 |       19 |       29 |       40 |       24 |      22 |       12 |       18 |       19 |       42 |       42 |       23 |      26 |        9 |       14 |       16 |       27 |       30 |       36 |      13 |        4 |       13 |       20 |       27 |       31 |       26 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       18 |       10 |       16 |       16 |        6 |       1 |        8 |       12 |       13 |       12 |        8 |        3 |       0 |      0 |      1 |     28 |     50 |     17 |     10 |     17 |    224 |      0 |      0 |      1 |     21 |     48 |     12 |     15 |     19 |    165 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     25 |      8 |      1 |      6 |     72 |      0 |      1 | s03      | R    |
| 47520001 |    724 |    315 |    249 |    10 |    0 |    142 |    3 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    347 |    377 |      39 |      12 |       0 |       9 |     10 |      5 |      0 |      4 |      4 |      2 |      0 |      3 |      1 |      0 |      0 |      3 |     36 |     34 |      0 |     36 |     10 |      3 |      0 |      7 |       0 |       1 |       0 |       2 |      3 |      1 |      0 |      5 |        7 |       14 |       30 |       33 |       22 |       14 |      16 |        9 |       25 |       31 |       46 |       34 |       20 |      14 |        6 |       14 |       34 |       25 |       20 |       22 |       8 |        7 |       14 |       23 |       31 |       18 |       17 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       10 |       12 |       27 |       10 |        9 |       0 |        5 |       19 |       19 |       19 |       10 |        5 |       1 |      0 |      3 |     25 |     53 |     31 |     30 |     15 |    158 |      0 |      0 |      5 |     17 |     44 |     16 |     22 |     15 |    130 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     43 |      8 |      2 |      4 |     75 |      0 |      1 | s03      | R    |
| 47521000 |      9 |      4 |      2 |     0 |    0 |      2 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      3 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 | s03      | R    |
| 47530000 |    131 |     39 |     65 |     2 |    0 |     20 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     65 |     66 |       1 |       6 |       0 |       2 |      9 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |      0 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        3 |        0 |        3 |        2 |        3 |       3 |        2 |        0 |        5 |        6 |        4 |        4 |       3 |        8 |        3 |        3 |        9 |        6 |        6 |       0 |        0 |        3 |        4 |        9 |        8 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        5 |        3 |        1 |        2 |       0 |        2 |        3 |        3 |        0 |        3 |        1 |       0 |      0 |      1 |      6 |      4 |      2 |      4 |      0 |     22 |      0 |      0 |      0 |      8 |     11 |     13 |      8 |      1 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      7 |      3 |      0 |      0 |     13 |      0 |      1 | s03      | R    |
| 47550000 |   1086 |    486 |    337 |    11 |    0 |    241 |    7 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    536 |    550 |      51 |      18 |       0 |      21 |     15 |      7 |      0 |      5 |     16 |     14 |      0 |      9 |     10 |      5 |      0 |      0 |     53 |     66 |      0 |     90 |     17 |      2 |      0 |      7 |       7 |       3 |       0 |       5 |     16 |      9 |      0 |     14 |       14 |       13 |       31 |       78 |       48 |       21 |       3 |       21 |       23 |       56 |      103 |       48 |       22 |       5 |        8 |       22 |       39 |       61 |       40 |       19 |       0 |        6 |       19 |       32 |       56 |       21 |       14 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       21 |       21 |       30 |       37 |       22 |        8 |       0 |       20 |       14 |       32 |       36 |       15 |        7 |       0 |      0 |      8 |     39 |     92 |     61 |     45 |     46 |    195 |      0 |      0 |      1 |     26 |     66 |     39 |     40 |     25 |    140 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     32 |     50 |     25 |     13 |      7 |    136 |      0 |      1 | s03      | R    |
| 47552000 |   1275 |    501 |    394 |    16 |    0 |    352 |    2 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    608 |    667 |      38 |      18 |       0 |      18 |      7 |     10 |      0 |      9 |      7 |      7 |      0 |     14 |      5 |      3 |      0 |      3 |    107 |     76 |      0 |    144 |     15 |      4 |      0 |     13 |       8 |       8 |       0 |       7 |      9 |     10 |      0 |     11 |       10 |       22 |       59 |       72 |       36 |       13 |       4 |       15 |       43 |       70 |       92 |       38 |       23 |       4 |       11 |       26 |       66 |       63 |       28 |        9 |       1 |       12 |       32 |       51 |       57 |       28 |        9 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       29 |       62 |       48 |       26 |        9 |       1 |       23 |       35 |       58 |       58 |       14 |        2 |       2 |      0 |      6 |     76 |     75 |     28 |     15 |     14 |    287 |      0 |      0 |      6 |     49 |     71 |     24 |     20 |     14 |    210 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     62 |     46 |     13 |     12 |      9 |    233 |      0 |      1 | s03      | R    |
| 47553001 |      2 |      2 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 47553002 |     21 |     11 |      3 |     0 |    0 |      7 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |     10 |       3 |       2 |       0 |       1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        3 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      1 |      1 |      5 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      3 |      0 |      1 | s03      | R    |
| 47560000 |     68 |     25 |     34 |     2 |    0 |      6 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     32 |     36 |       2 |       6 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        5 |        0 |       2 |        0 |        0 |        4 |        2 |        3 |        3 |       3 |        0 |        0 |        7 |        6 |        1 |        4 |       0 |        2 |        2 |        3 |        6 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |     20 |      0 |      0 |      0 |      6 |      5 |      4 |      3 |      3 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      3 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 47610000 |    948 |    407 |    294 |    11 |    0 |    225 |    6 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    439 |    509 |      50 |      11 |       0 |      10 |     13 |     11 |      0 |      5 |      5 |      6 |      0 |      6 |      7 |      1 |      0 |      0 |     39 |     37 |      0 |     68 |     12 |      3 |      0 |      9 |       1 |       0 |       0 |       3 |     17 |      4 |      0 |      4 |       15 |       15 |       54 |       59 |       18 |        8 |       0 |       14 |       23 |       91 |       68 |       24 |       16 |       2 |        3 |       24 |       62 |       38 |       11 |        9 |       0 |        7 |       22 |       61 |       32 |       16 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       19 |       45 |       37 |        8 |        7 |       0 |       11 |       15 |       53 |       33 |        7 |        5 |       0 |      0 |      3 |     76 |    101 |     15 |      8 |     10 |    194 |      0 |      0 |      2 |     62 |     75 |     14 |      8 |      8 |    125 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     53 |     43 |      7 |      2 |      2 |    137 |      0 |      1 | s03      | R    |
| 48110001 |     18 |     10 |      5 |     1 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |     11 |       2 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       2 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      2 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 48110002 |    120 |     78 |     16 |     2 |    0 |     24 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     58 |     62 |      17 |       7 |       0 |       7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |       3 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        4 |        6 |       11 |        7 |        6 |       2 |        4 |        5 |        6 |        8 |        4 |        7 |       7 |        0 |        0 |        2 |        3 |        1 |        0 |       0 |        0 |        0 |        2 |        2 |        1 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        1 |        2 |        4 |        3 |       0 |        2 |        2 |        3 |        2 |        1 |        1 |       0 |      0 |      0 |      5 |     16 |      6 |      2 |      2 |     47 |      0 |      0 |      0 |      1 |      4 |      0 |      2 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      6 |      3 |      0 |      1 |     12 |      0 |      1 | s03      | R    |
| 48120001 |    149 |    100 |     24 |     0 |    0 |     22 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     69 |     80 |      19 |       4 |       0 |       5 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      0 |      0 |      1 |        3 |       11 |        3 |        9 |        7 |        3 |       4 |        5 |       13 |        6 |       17 |        6 |        9 |       4 |        0 |        4 |        2 |        3 |        3 |        0 |       0 |        0 |        3 |        2 |        3 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        6 |        2 |        4 |        0 |       0 |        1 |        4 |        0 |        1 |        1 |        0 |       1 |      0 |      1 |      9 |     12 |     11 |      3 |      1 |     63 |      0 |      0 |      0 |      3 |      4 |      1 |      2 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      2 |     13 |      0 |      1 | s03      | R    |
| 48120002 |    585 |    341 |     97 |     9 |    0 |    125 |    4 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    281 |    304 |      99 |      16 |       0 |      36 |      4 |      2 |      0 |      4 |      0 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      1 |      0 |      3 |      2 |      0 |      0 |      1 |       2 |       0 |       0 |       0 |      5 |      1 |      0 |      7 |       10 |       22 |       34 |       41 |       16 |       16 |      11 |       16 |       36 |       35 |       51 |       24 |       16 |      13 |        2 |        7 |       15 |        8 |        6 |        9 |       1 |        4 |        7 |        8 |        8 |        8 |       11 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       20 |       16 |       20 |        8 |        8 |       1 |        7 |       20 |       15 |        9 |        8 |        4 |       1 |      0 |      2 |     37 |     65 |     30 |      9 |      8 |    190 |      0 |      0 |      1 |     10 |     19 |      8 |      1 |      5 |     53 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     27 |     29 |     11 |      1 |      6 |     71 |      0 |      1 | s03      | R    |
| 48120003 |     81 |     49 |     12 |     4 |    0 |     16 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     33 |     48 |      13 |       4 |       0 |       7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      5 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      2 |        0 |        4 |        6 |        4 |        3 |        2 |       1 |        1 |        8 |        1 |        6 |        6 |        5 |       2 |        0 |        1 |        1 |        1 |        1 |        1 |       1 |        0 |        0 |        2 |        0 |        1 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        2 |        1 |        0 |        2 |       0 |        2 |        3 |        5 |        2 |        0 |        1 |       0 |      0 |      0 |      6 |     10 |      1 |      0 |      0 |     32 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     17 |      0 |      1 | s03      | R    |
| 48130001 |    393 |    207 |     87 |    13 |    0 |     79 |    0 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    187 |    206 |      54 |      10 |       0 |      24 |      6 |      3 |      0 |      4 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      3 |       0 |       7 |       0 |       1 |      6 |      1 |      0 |      1 |        7 |       12 |       22 |       21 |        9 |       14 |       4 |       10 |       18 |       24 |       25 |        9 |       22 |      10 |        5 |        6 |        9 |       13 |       11 |        5 |       2 |        1 |        4 |        5 |        8 |        6 |        8 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       12 |       14 |        8 |        7 |        3 |       0 |        2 |       12 |       18 |       10 |        7 |        1 |       2 |      0 |      1 |     25 |     44 |     18 |      4 |      8 |    107 |      0 |      0 |      2 |      8 |     18 |      3 |      5 |      6 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     21 |      6 |      1 |      3 |     46 |      0 |      1 | s03      | R    |
| 48130002 |     28 |     13 |      4 |     0 |    0 |      9 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     15 |     13 |       6 |       0 |       0 |       3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        4 |        0 |        0 |       1 |        0 |        0 |        1 |        3 |        0 |        0 |       2 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        2 |        0 |        0 |        0 |       0 |        2 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      3 |      0 |      5 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      1 |      1 |      0 |      4 |      0 |      1 | s03      | R    |
| 48140000 |    389 |    243 |     59 |     8 |    0 |     69 |    4 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    167 |    222 |      56 |       8 |       0 |      14 |      6 |      3 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      3 |      0 |      1 |       11 |       10 |       19 |       20 |       18 |       13 |       4 |        9 |       30 |       41 |       27 |       14 |       18 |       9 |        3 |        2 |        5 |       10 |        6 |        3 |       1 |        1 |        2 |        5 |        7 |        1 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        8 |       10 |       11 |        6 |        3 |       0 |        6 |       13 |        9 |       10 |        4 |        2 |       1 |      0 |      1 |     28 |     46 |     17 |      3 |      5 |    143 |      0 |      0 |      2 |      4 |     12 |      2 |      2 |      3 |     34 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     13 |     16 |      5 |      3 |      0 |     48 |      0 |      1 | s03      | R    |
| 48141000 |    498 |    273 |    112 |    11 |    0 |     87 |    3 |    2 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    230 |    268 |      44 |      19 |       0 |      16 |     11 |      6 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      2 |      1 |      0 |      1 |       1 |       3 |       0 |       1 |      1 |      2 |      0 |      2 |        7 |       11 |       28 |       25 |       17 |       18 |       8 |        5 |       21 |       28 |       28 |       22 |       37 |      18 |        1 |       11 |       14 |        5 |       12 |       10 |       4 |        1 |       10 |        9 |        5 |        6 |       17 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       16 |       14 |       11 |        3 |        6 |       2 |       13 |       12 |       10 |       10 |        4 |        5 |       0 |      0 |      3 |     32 |     26 |     20 |      3 |     12 |    177 |      0 |      0 |      0 |     13 |     12 |      7 |      3 |     11 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     14 |     13 |      5 |      2 |      1 |     76 |      0 |      1 | s03      | R    |
| 48142001 |      9 |      7 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      4 |       1 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        1 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 48142002 |      1 |      0 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 48150000 |    716 |    422 |    148 |    10 |    0 |    128 |    3 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    326 |    390 |     105 |      15 |       0 |      34 |      9 |      4 |      0 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      5 |     12 |      1 |      0 |      3 |       2 |       1 |       0 |       2 |     13 |     10 |      0 |      3 |        9 |       25 |       39 |       39 |       21 |       24 |      18 |       21 |       41 |       48 |       49 |       24 |       39 |      25 |        2 |       17 |       17 |       12 |       10 |       13 |       7 |        3 |       17 |        9 |       10 |       11 |       11 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       20 |       21 |       11 |        7 |        6 |       0 |       16 |       21 |       15 |       10 |        6 |        5 |       0 |      0 |      3 |     46 |     64 |     31 |      7 |     12 |    259 |      0 |      0 |      0 |     20 |     18 |      6 |      4 |      9 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     35 |     25 |      4 |      2 |      1 |     75 |      0 |      1 | s03      | R    |
| 48151000 |     61 |     45 |      3 |     3 |    0 |      7 |    1 |    2 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     21 |     40 |      14 |       1 |       0 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        5 |        2 |        3 |        1 |       1 |        7 |        9 |        3 |        8 |        3 |        2 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        0 |        1 |        0 |        1 |       0 |        0 |        3 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |      6 |      8 |      2 |      0 |      1 |     28 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 48152001 |     84 |     56 |      8 |     3 |    0 |     14 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     39 |     45 |      21 |       2 |       0 |       7 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        4 |        9 |        7 |        3 |        2 |       0 |        3 |        1 |        9 |        7 |        6 |        2 |       0 |        1 |        1 |        0 |        0 |        0 |        2 |       0 |        1 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        2 |        1 |        1 |       0 |        1 |        3 |        3 |        2 |        4 |        0 |       0 |      0 |      1 |      7 |      9 |      8 |      1 |      3 |     27 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      2 |      1 |      0 |     12 |      0 |      1 | s03      | R    |
| 48152002 |     57 |     42 |      7 |     1 |    0 |      7 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     18 |     39 |      20 |       1 |       0 |       6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        5 |        3 |        3 |        2 |       0 |        5 |        7 |        6 |        4 |        4 |        3 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        3 |        0 |        1 |       0 |      0 |      0 |      5 |      9 |      5 |      0 |      5 |     18 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 48152003 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 48180000 |    527 |    330 |     72 |    14 |    0 |     91 |   10 |    3 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    249 |    278 |     137 |      21 |       0 |      37 |      9 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      1 |       2 |       0 |       0 |       2 |      6 |      1 |      0 |      3 |        9 |       24 |       27 |       26 |       21 |       15 |      12 |       13 |       30 |       45 |       31 |       34 |       28 |      15 |        4 |       13 |        7 |       11 |        2 |        3 |       2 |        3 |       12 |        4 |        6 |        2 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       21 |       17 |       11 |        8 |        3 |       2 |       13 |       11 |       14 |        5 |        7 |        2 |       0 |      0 |      2 |     47 |     51 |     20 |      7 |     13 |    190 |      0 |      0 |      1 |      7 |     17 |      2 |      0 |      3 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     35 |     22 |      7 |      1 |      2 |     55 |      0 |      1 | s03      | R    |
| 48181000 |    186 |    109 |     26 |     2 |    0 |     44 |    0 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     75 |    111 |      28 |       4 |       0 |      12 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      2 |      3 |      0 |      3 |        0 |        6 |        9 |       10 |        5 |        4 |       1 |        4 |       20 |       21 |       16 |        6 |        4 |       3 |        1 |        1 |        2 |        6 |        3 |        1 |       0 |        0 |        4 |        2 |        3 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        5 |        8 |        8 |        1 |        0 |       1 |        3 |        1 |       14 |        3 |        3 |        1 |       0 |      0 |      1 |     12 |     18 |     13 |      1 |      2 |     62 |      0 |      0 |      0 |      3 |      6 |      2 |      0 |      2 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      9 |      4 |      1 |      0 |     30 |      0 |      1 | s03      | R    |
| 48190001 |    177 |    113 |     16 |     5 |    0 |     41 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     87 |     90 |      41 |       5 |       0 |      19 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      2 |        6 |       11 |       13 |        7 |        7 |        6 |       1 |        6 |       12 |       20 |       13 |        6 |        3 |       2 |        2 |        1 |        4 |        4 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        7 |        7 |        5 |        1 |        2 |       0 |        3 |        6 |        3 |        7 |        4 |        1 |       0 |      0 |      2 |     12 |     19 |      6 |      3 |      9 |     62 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      7 |      8 |      0 |      1 |      0 |     30 |      0 |      1 | s03      | R    |
| 48190002 |      9 |      9 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      6 |       3 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        0 |        0 |       1 |        1 |        3 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 48191001 |    177 |    106 |     21 |     1 |    0 |     45 |    1 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     81 |     96 |      31 |       4 |       0 |      18 |      5 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |       4 |       1 |       0 |       3 |      6 |      0 |      0 |      0 |        3 |        7 |       10 |        8 |        9 |        7 |       3 |        6 |       15 |        8 |       10 |        8 |       10 |       2 |        0 |        2 |        3 |        3 |        2 |        3 |       0 |        1 |        1 |        2 |        1 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        5 |        8 |        2 |        3 |        1 |       1 |        8 |        4 |        7 |        3 |        4 |        3 |       0 |      0 |      0 |     13 |     22 |      6 |      0 |      4 |     61 |      0 |      0 |      0 |      1 |      9 |      1 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      6 |      1 |      0 |      1 |     31 |      0 |      1 | s03      | R    |
| 48191002 |     13 |      8 |      0 |     1 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |      5 |       4 |       0 |       0 |       5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 48200001 |     45 |     23 |      6 |     0 |    0 |     15 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     27 |     18 |       2 |       0 |       0 |       3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        3 |        4 |        1 |        2 |        2 |       2 |        0 |        1 |        0 |        4 |        2 |        1 |       0 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        2 |        2 |        1 |        0 |       0 |        1 |        1 |        2 |        2 |        2 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      1 |      2 |     16 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     12 |      0 |      1 | s03      | R    |
| 48200002 |     53 |     30 |     11 |     2 |    0 |      8 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     21 |     32 |       3 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        2 |        2 |        2 |        2 |        2 |       0 |        0 |        2 |        5 |        1 |        6 |        3 |       2 |        0 |        0 |        2 |        0 |        0 |        1 |       2 |        0 |        2 |        1 |        0 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        3 |        2 |        1 |       0 |      0 |      0 |      4 |      5 |      2 |      1 |      3 |     15 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 48203000 |     31 |     18 |      6 |     1 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     15 |       2 |       0 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        3 |        1 |        2 |       1 |        0 |        2 |        2 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      9 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      4 |      0 |      1 | s03      | R    |
| 48300000 |    596 |    351 |     95 |    23 |    0 |    121 |    5 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    269 |    327 |      89 |      17 |       0 |      38 |     12 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      6 |      6 |      3 |      0 |      4 |       1 |       1 |       0 |       3 |      9 |      2 |      0 |      2 |       10 |       21 |       28 |       26 |       21 |       23 |      13 |       17 |       45 |       42 |       49 |       22 |       24 |      10 |        3 |        7 |       18 |        9 |        5 |        1 |       2 |        1 |        9 |       13 |       13 |        1 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       19 |       21 |       21 |        5 |        4 |       0 |       11 |       18 |       18 |       14 |        5 |        2 |       0 |      0 |      5 |     40 |     56 |     30 |      8 |     12 |    200 |      0 |      0 |      0 |     11 |     16 |      5 |      2 |      3 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     25 |     32 |      6 |      0 |      3 |     84 |      0 |      1 | s03      | R    |
| 48400000 |      3 |      0 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 48410001 |    107 |     59 |     24 |     2 |    0 |     17 |    3 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     58 |     49 |      16 |       8 |       0 |       9 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      1 |        1 |        3 |        8 |        9 |        3 |        2 |       2 |        3 |        7 |        2 |        6 |        3 |        5 |       5 |        3 |        3 |        2 |        2 |        2 |        3 |       1 |        1 |        0 |        2 |        3 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        6 |        3 |        1 |        2 |        1 |       0 |        0 |        1 |        3 |        4 |        2 |        0 |       0 |      0 |      0 |      3 |      8 |      4 |      0 |      1 |     43 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      1 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      2 |      0 |      1 |     16 |      0 |      1 | s03      | R    |
| 48410002 |     16 |     11 |      4 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      7 |       4 |       2 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        1 |        1 |       1 |        0 |        1 |        2 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
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| 48430000 |      3 |      2 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 49002000 |      7 |      3 |      3 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      3 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 49004000 |     17 |     15 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |     11 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        2 |        1 |       0 |        2 |        1 |        2 |        3 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 49010000 |     50 |     20 |     24 |     0 |    0 |      3 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     28 |     22 |       3 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        3 |        3 |        0 |       2 |        1 |        0 |        1 |        2 |        3 |        0 |       3 |        0 |        1 |        2 |        2 |        2 |        3 |       4 |        0 |        1 |        2 |        1 |        1 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      4 |      3 |      2 |      3 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 49020001 |     10 |      5 |      2 |     0 |    0 |      2 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      6 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      1 | s03      | R    |
| 49021000 |      3 |      0 |      3 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 49100000 |    765 |    475 |    130 |    10 |    0 |    135 |    2 |    3 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    345 |    420 |      56 |      13 |       0 |      15 |     11 |     10 |      0 |      3 |      2 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      7 |      2 |      0 |      6 |      6 |      0 |      0 |      2 |       1 |       2 |       0 |       3 |      7 |      1 |      0 |      3 |       12 |       22 |       35 |       52 |       27 |       28 |      17 |       19 |       38 |       53 |       75 |       48 |       25 |      24 |        4 |       11 |       14 |       15 |       11 |        6 |       6 |        5 |        9 |       12 |       15 |       13 |        5 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       18 |       18 |       21 |       10 |        8 |       0 |       10 |       20 |       22 |       18 |        4 |        1 |       0 |      0 |      3 |     48 |     78 |     42 |     13 |     25 |    266 |      0 |      0 |      0 |      9 |     17 |     14 |      6 |      7 |     77 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     33 |     30 |     10 |      3 |      5 |     78 |      0 |      1 | s03      | R    |
| 49102000 |      3 |      1 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 49105000 |     45 |     28 |      7 |     1 |    0 |      8 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     25 |       2 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        0 |        2 |        1 |        3 |        0 |       1 |        2 |        6 |        1 |        8 |        1 |        2 |       0 |        2 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        3 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      2 |      0 |      0 |     18 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 49109000 |      2 |      1 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 49110001 |    773 |    461 |    123 |    11 |    0 |    159 |    7 |    4 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    365 |    408 |      46 |       9 |       0 |      20 |      9 |      6 |      0 |      5 |      4 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      3 |      1 |      0 |      2 |      6 |      1 |      0 |      2 |       3 |       0 |       0 |       3 |     17 |      6 |      0 |      6 |       12 |       26 |       34 |       57 |       30 |       21 |      11 |       22 |       35 |       44 |       83 |       38 |       30 |      18 |        4 |        3 |       12 |       24 |       16 |        3 |       4 |        6 |        7 |        8 |       19 |       10 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       20 |       32 |       22 |       13 |        7 |       1 |       10 |       12 |       31 |       23 |        2 |        3 |       0 |      0 |      2 |     45 |     74 |     37 |      6 |     35 |    262 |      0 |      0 |      0 |     12 |     20 |      8 |      5 |      9 |     69 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     24 |     44 |     15 |      3 |      4 |     94 |      0 |      1 | s03      | R    |
| 49110002 |     57 |     41 |      5 |     0 |    0 |     11 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     28 |     29 |       6 |       2 |       0 |       4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      4 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        0 |        3 |        3 |        6 |        5 |        1 |       1 |        2 |        6 |        3 |        8 |        1 |        2 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        1 |        1 |        0 |        2 |        0 |       0 |      0 |      0 |      4 |     14 |      2 |      1 |      1 |     19 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 49112000 |    482 |    333 |     54 |     4 |    0 |     84 |    0 |    3 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    224 |    258 |      23 |       7 |       0 |      14 |     10 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      4 |      0 |      6 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      7 |      1 |      0 |      0 |       10 |       14 |       37 |       31 |       23 |       14 |      14 |        9 |       29 |       33 |       43 |       28 |       20 |      28 |        3 |        3 |        6 |        7 |        5 |        2 |       3 |        0 |        2 |        1 |        8 |        9 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       10 |       10 |       13 |        6 |        3 |       1 |        5 |       12 |        9 |        9 |        6 |        1 |       1 |      0 |      0 |     19 |     37 |     33 |     10 |     21 |    213 |      0 |      0 |      0 |      2 |      7 |      6 |      5 |      4 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     26 |      8 |      2 |      1 |     46 |      0 |      1 | s03      | R    |
| 49114001 |     60 |     21 |     23 |     0 |    0 |     16 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     30 |     30 |       1 |       3 |       0 |       1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      3 |        0 |        0 |        3 |        3 |        2 |        2 |       0 |        1 |        1 |        2 |        3 |        3 |        1 |       0 |        1 |        1 |        3 |        5 |        1 |        2 |       0 |        1 |        1 |        3 |        3 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        4 |        0 |        2 |       0 |        2 |        1 |        3 |        2 |        0 |        1 |       0 |      0 |      0 |      6 |      1 |      0 |      1 |      3 |     10 |      0 |      0 |      0 |      8 |      3 |      1 |      2 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      1 |      0 |      8 |      0 |      1 | s03      | R    |
| 49114002 |    490 |    222 |    130 |     8 |    0 |    127 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    247 |    243 |      12 |       6 |       0 |       5 |      7 |      2 |      0 |      5 |      2 |      6 |      0 |      1 |      2 |      0 |      0 |      0 |     15 |     13 |      0 |     35 |     16 |      2 |      0 |      4 |       7 |       1 |       0 |       4 |      9 |      2 |      0 |      4 |        2 |       14 |       40 |       27 |        7 |        6 |       0 |        3 |       28 |       49 |       35 |        3 |        7 |       1 |        0 |       23 |       27 |       15 |        5 |        5 |       0 |        1 |       14 |       16 |       14 |        5 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       10 |       27 |       27 |        4 |        6 |       0 |        2 |       15 |       26 |        8 |        7 |        4 |       0 |      0 |      3 |     57 |     12 |      7 |      1 |      4 |    138 |      0 |      0 |      2 |     21 |      9 |      8 |      1 |      3 |     86 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     30 |      6 |      4 |      1 |      0 |     92 |      0 |      1 | s03      | R    |
| 49114003 |    136 |     74 |     25 |     2 |    0 |     35 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     69 |     67 |      11 |       2 |       0 |       2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     20 |      4 |      0 |     14 |      5 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        1 |        7 |        9 |        4 |        6 |        4 |       0 |        1 |        7 |       24 |        6 |        5 |        0 |       0 |        0 |        3 |       10 |        1 |        0 |        2 |       0 |        0 |        3 |        4 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        3 |       11 |        1 |        3 |        0 |       0 |        1 |        3 |        5 |        5 |        1 |        0 |       0 |      0 |      0 |     12 |      9 |      2 |      0 |      4 |     47 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      6 |      0 |      0 |      1 |     24 |      0 |      1 | s03      | R    |
| 49120001 |    227 |    136 |     45 |     7 |    0 |     32 |    0 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    107 |    120 |      15 |       0 |       0 |       2 |     11 |      4 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      3 |        3 |        6 |        7 |       11 |       11 |        5 |      13 |        2 |       10 |        7 |       21 |       15 |       10 |      15 |        2 |        3 |        3 |        5 |        5 |        3 |       3 |        1 |        1 |        5 |        5 |        3 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        9 |        4 |        7 |        2 |        1 |       2 |        5 |        3 |        5 |        2 |        1 |        3 |       0 |      0 |      1 |      5 |     16 |     11 |      5 |      8 |     90 |      0 |      0 |      0 |      3 |      5 |      2 |      2 |      4 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     13 |      2 |      1 |      2 |     24 |      0 |      1 | s03      | R    |
| 49120002 |    249 |    156 |     39 |     1 |    0 |     47 |    1 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    104 |    145 |      24 |       2 |       0 |       7 |      4 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      4 |        5 |       14 |       16 |       10 |       10 |        6 |       1 |        6 |       18 |       22 |       23 |        8 |       13 |       4 |        1 |        2 |        3 |        3 |        2 |        4 |       2 |        1 |        1 |        3 |        5 |        4 |        7 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        7 |        7 |        6 |        1 |        2 |       0 |        3 |        4 |       10 |        9 |        1 |        2 |       0 |      0 |      0 |     23 |     31 |      8 |      2 |      5 |     87 |      0 |      0 |      0 |      3 |      8 |      3 |      3 |      5 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     12 |      4 |      1 |      4 |     30 |      0 |      1 | s03      | R    |
| 49121001 |     21 |     10 |      8 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      8 |     13 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        1 |       1 |        0 |        0 |        1 |        3 |        0 |        1 |       1 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 49121002 |    395 |    222 |     96 |     4 |    0 |     71 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    185 |    210 |      31 |      14 |       0 |       5 |      4 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      2 |      1 |      0 |      4 |      1 |      2 |      0 |      2 |       0 |       0 |       0 |       0 |      5 |      0 |      0 |      1 |       11 |        7 |       15 |       24 |       18 |       10 |      12 |        7 |       15 |       22 |       42 |       13 |       11 |      15 |        5 |        6 |        8 |       12 |        9 |        6 |       6 |        4 |        5 |        6 |       13 |        8 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        7 |        7 |        8 |        4 |        1 |       0 |        3 |        7 |        4 |       18 |        4 |        3 |       2 |      0 |      0 |     27 |     39 |     21 |      7 |     12 |    116 |      0 |      0 |      0 |      9 |     11 |      5 |      2 |     14 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     12 |      8 |      2 |      1 |     40 |      0 |      1 | s03      | R    |
| 49121003 |    241 |    138 |     40 |     7 |    0 |     51 |    0 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    105 |    136 |      20 |       4 |       0 |       5 |      3 |      5 |      0 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      4 |      0 |      5 |      0 |      0 |      0 |      0 |       3 |       1 |       0 |       0 |      8 |      3 |      0 |      4 |        0 |        9 |       11 |       12 |       10 |        8 |       6 |        5 |       11 |       13 |       16 |       16 |        7 |      14 |        0 |        4 |        2 |        7 |        0 |        3 |       1 |        2 |        5 |        6 |        3 |        3 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        3 |        9 |        8 |        6 |        0 |       2 |        1 |       10 |        9 |        7 |        2 |        1 |       1 |      0 |      0 |     10 |     22 |     15 |      7 |      3 |     81 |      0 |      0 |      0 |      5 |     10 |      4 |      0 |      3 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |      7 |      8 |      0 |      4 |     35 |      0 |      1 | s03      | R    |
| 49130001 |    813 |    482 |    171 |    10 |    0 |    135 |    6 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    382 |    431 |      56 |      14 |       0 |      18 |     17 |      7 |      0 |      4 |      2 |      0 |      0 |      2 |      5 |      2 |      0 |      2 |     17 |      3 |      0 |      7 |      5 |      3 |      0 |      0 |       1 |       0 |       0 |       0 |     13 |      0 |      0 |      2 |       14 |       25 |       42 |       52 |       35 |       24 |      24 |       11 |       36 |       49 |       72 |       34 |       30 |      34 |        2 |        6 |       10 |       29 |       20 |       12 |       8 |        2 |       10 |       16 |       19 |       19 |        8 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       15 |       19 |       13 |       18 |        5 |       2 |       13 |       22 |       18 |       13 |        9 |        3 |       3 |      0 |      2 |     52 |     71 |     41 |     10 |     31 |    275 |      0 |      0 |      1 |     17 |     23 |     13 |     13 |     14 |     90 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     31 |     19 |     13 |      4 |      5 |     88 |      0 |      1 | s03      | R    |
| 49130002 |     25 |     14 |      4 |     1 |    0 |      5 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |     13 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        2 |       2 |        0 |        0 |        2 |        1 |        2 |        0 |       3 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |     10 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 49140001 |    350 |    192 |     82 |     3 |    0 |     66 |    2 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    171 |    179 |      18 |       5 |       0 |       5 |     11 |      5 |      0 |      5 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      4 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      2 |        5 |        5 |       13 |       30 |       12 |       10 |      13 |        8 |       10 |       15 |       28 |       17 |       11 |      15 |        1 |        8 |        5 |        9 |        5 |       10 |       6 |        3 |        1 |        6 |        6 |        5 |        9 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        8 |       14 |        4 |        6 |        3 |       0 |        9 |        9 |        4 |        5 |        6 |        2 |       2 |      0 |      1 |     10 |     35 |     20 |      5 |      9 |    112 |      0 |      0 |      0 |      3 |     14 |      9 |      2 |      9 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     13 |      9 |      2 |      0 |     40 |      0 |      1 | s03      | R    |
| 49140002 |     24 |     11 |      8 |     1 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     12 |     12 |       2 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       2 |        1 |        1 |        0 |        1 |        0 |        2 |       2 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 49140003 |     14 |      6 |      5 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      9 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        2 |        0 |       1 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      4 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 49140004 |     12 |      4 |      3 |     0 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |      5 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      1 | s03      | R    |
| 49140005 |     19 |     11 |      5 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |      9 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        1 |        0 |        3 |        1 |        0 |       1 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 49141000 |      5 |      2 |      3 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
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| 49160002 |    136 |     80 |     32 |     2 |    0 |     20 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     68 |     68 |      10 |       0 |       0 |       2 |      5 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        4 |        4 |        8 |        3 |        7 |       8 |        1 |        4 |        8 |       10 |        7 |        5 |      10 |        1 |        0 |        4 |        1 |        6 |        3 |       4 |        0 |        0 |        1 |        2 |        2 |        5 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        3 |        4 |        1 |        3 |        0 |       0 |        1 |        2 |        0 |        4 |        2 |        0 |       1 |      0 |      0 |      6 |     10 |      2 |      5 |      6 |     51 |      0 |      0 |      0 |      2 |      7 |      1 |      2 |      1 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |     15 |      0 |      1 | s03      | R    |
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| 49163000 |     88 |     39 |     33 |     2 |    0 |     13 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     40 |     48 |       3 |       2 |       0 |       4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        6 |        3 |        1 |       3 |        3 |        1 |        5 |        5 |        2 |        2 |       4 |        0 |        4 |        3 |        0 |        4 |        2 |       1 |        1 |        3 |        3 |        3 |        6 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        2 |        2 |        1 |        1 |       0 |        2 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      1 |      1 |      2 |      3 |      2 |      4 |     26 |      0 |      0 |      0 |      3 |      7 |      2 |      2 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 49164001 |     26 |     12 |     11 |     0 |    0 |      2 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     17 |      9 |       0 |       1 |       0 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        4 |        1 |       1 |        0 |        1 |        0 |        1 |        4 |        1 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
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| 49200000 |     75 |     10 |     53 |     2 |    0 |     10 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     29 |     46 |       1 |       0 |       0 |       5 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        3 |       2 |        1 |        0 |        3 |        7 |        2 |        5 |       4 |        6 |        2 |        2 |       10 |        1 |        7 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        2 |       0 |        3 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      7 |      0 |      0 |      0 |      4 |      7 |      4 |      4 |      1 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      2 |      1 |      0 |      6 |      0 |      1 | s03      | R    |
| 49201000 |     57 |     36 |     15 |     0 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     25 |     32 |      10 |       0 |       0 |       1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        2 |        1 |        2 |        1 |        5 |       4 |        0 |        2 |        1 |        6 |        3 |        2 |       6 |        0 |        1 |        1 |        0 |        2 |        0 |       2 |        0 |        2 |        0 |        1 |        3 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      5 |      4 |      1 |      3 |     20 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
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| 49204000 |      4 |      2 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 49210000 |     19 |      8 |      8 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |     14 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        2 |        0 |        0 |        2 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        1 |        0 |        2 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 49820001 |      6 |      5 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 49820002 |     29 |     18 |      7 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |     15 |       2 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        1 |        0 |        1 |       1 |        0 |        1 |        3 |        3 |        3 |        1 |       1 |        0 |        1 |        2 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 49830001 |     39 |     12 |     16 |     1 |    0 |      8 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     18 |     21 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        3 |        0 |       0 |        1 |        1 |        0 |        2 |        4 |        0 |       1 |        0 |        1 |        2 |        3 |        3 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        2 |        1 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      8 |      0 |      0 |      1 |      0 |      5 |      0 |      2 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      1 |      6 |      0 |      1 | s03      | R    |
| 49900000 |      8 |      4 |      2 |     1 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      4 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 50010000 |    628 |    228 |    229 |    22 |    0 |    138 |    6 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    350 |      25 |       5 |       0 |      15 |     12 |     13 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       1 |      7 |      5 |      0 |      4 |        5 |       13 |       25 |       17 |       10 |       15 |       6 |        7 |       25 |       31 |       34 |       15 |       18 |       7 |        4 |       15 |       38 |       27 |        5 |       13 |       6 |        9 |       14 |       35 |       22 |       17 |       16 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       18 |       28 |       17 |        1 |        4 |       0 |       13 |       22 |       30 |       13 |        6 |        7 |       1 |      0 |      0 |     23 |     50 |     14 |      8 |     20 |    113 |      0 |      0 |      0 |     33 |     42 |     17 |      8 |     18 |    111 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     27 |     33 |     14 |      4 |      5 |     86 |      0 |      1 | s03      | R    |
| 50011000 |    871 |    346 |    313 |    15 |    0 |    186 |    0 |    1 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    439 |    432 |      55 |      19 |       0 |      23 |      9 |     14 |      0 |      5 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      2 |      1 |      3 |      0 |      2 |      5 |      2 |      0 |      3 |       1 |       2 |       0 |       4 |      5 |      5 |      0 |      4 |       10 |       15 |       47 |       38 |       23 |       10 |       3 |       14 |       19 |       69 |       61 |       16 |       18 |       3 |       15 |       25 |       58 |       50 |       17 |        7 |       1 |        8 |       27 |       44 |       40 |       17 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       22 |       21 |       40 |       24 |       12 |        1 |       0 |       22 |       18 |       27 |       18 |        3 |        3 |       1 |      0 |      6 |     35 |     53 |     37 |     13 |     17 |    185 |      0 |      0 |      2 |     33 |     72 |     26 |      9 |     20 |    151 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     21 |     35 |     13 |      8 |      7 |    128 |      0 |      1 | s03      | R    |
| 50012000 |    616 |    236 |    246 |    16 |    0 |    101 |    9 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    305 |    311 |      29 |      16 |       0 |      10 |      7 |     12 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      3 |      1 |      0 |      2 |       1 |       0 |       0 |       0 |      2 |      1 |      0 |      1 |        6 |       14 |       23 |       33 |       13 |        4 |       8 |       10 |       20 |       37 |       38 |       16 |        5 |       9 |       11 |       15 |       49 |       34 |       22 |        4 |       3 |        5 |       18 |       35 |       31 |        8 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       15 |       17 |       11 |        6 |        2 |       2 |       11 |       13 |       24 |       11 |        8 |        1 |       0 |      0 |      2 |     24 |     50 |     30 |      6 |     13 |    111 |      0 |      0 |      2 |     22 |     46 |     19 |     16 |     12 |    129 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     13 |     27 |     11 |      5 |      1 |     74 |      0 |      1 | s03      | R    |
| 50013001 |    562 |    179 |    261 |    17 |    0 |     99 |    2 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    271 |    291 |      13 |      21 |       0 |       5 |      7 |      9 |      0 |     10 |      2 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      8 |      4 |      0 |      3 |      5 |      2 |      0 |      1 |       1 |       0 |       0 |       0 |      4 |      0 |      0 |      3 |        6 |        9 |       22 |       22 |        9 |        6 |       2 |        7 |       14 |       33 |       30 |        8 |        9 |       2 |       10 |       14 |       58 |       36 |        7 |        7 |       1 |        8 |       25 |       58 |       25 |        7 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        8 |       23 |       18 |        6 |        2 |       0 |       11 |       10 |       18 |       16 |        3 |        1 |       1 |      0 |      2 |     12 |     45 |     10 |      3 |      5 |    102 |      0 |      0 |      0 |     27 |     78 |     11 |     11 |      9 |    125 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     34 |      4 |      1 |      3 |     65 |      0 |      1 | s03      | R    |
| 50013002 |    655 |    229 |    253 |    15 |    0 |    146 |    5 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    317 |    338 |      38 |      17 |       0 |      10 |      7 |      2 |      0 |      5 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |      1 |      5 |      6 |      0 |      9 |      4 |      3 |      0 |      2 |       2 |       1 |       0 |       2 |      2 |      2 |      0 |      1 |        2 |       13 |       39 |       20 |       10 |        6 |       0 |        6 |       31 |       64 |       20 |       10 |        5 |       3 |        8 |       32 |       56 |       31 |       10 |        2 |       0 |       10 |       34 |       36 |       21 |       11 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |       19 |       44 |       15 |        7 |        2 |       0 |       10 |       25 |       32 |       15 |        3 |        0 |       0 |      0 |      1 |     48 |     40 |      7 |      3 |      5 |    125 |      0 |      0 |      1 |     54 |     31 |     12 |      1 |      1 |    153 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     34 |      3 |      0 |      1 |    100 |      0 |      1 | s03      | R    |
| 50014000 |   1042 |    353 |    431 |    31 |    0 |    218 |    2 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    523 |    519 |      40 |      27 |       0 |      13 |      6 |     13 |      0 |      9 |      0 |      0 |      0 |      1 |      6 |      3 |      0 |      2 |      4 |      5 |      0 |     14 |      4 |      3 |      0 |      9 |       3 |       0 |       0 |       5 |      4 |      6 |      0 |      2 |        5 |       19 |       63 |       28 |       15 |        5 |       4 |        9 |       45 |       81 |       46 |       19 |       13 |       1 |        7 |       39 |      124 |       43 |       24 |        9 |       1 |        7 |       44 |       78 |       31 |       16 |        7 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       24 |       57 |       35 |       11 |        0 |       0 |        7 |       29 |       50 |       25 |        9 |        1 |       0 |      0 |      6 |     73 |     48 |     17 |      6 |      8 |    195 |      0 |      0 |     10 |    100 |     65 |     18 |      5 |     10 |    223 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     54 |     32 |      9 |      0 |      1 |    157 |      0 |      1 | s03      | R    |
| 50015000 |    227 |     86 |     90 |     4 |    0 |     44 |    3 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    110 |    117 |      20 |       5 |       0 |       8 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        3 |        5 |        9 |        7 |        5 |        3 |       1 |        5 |       10 |       14 |        6 |        9 |        4 |       5 |        3 |        5 |       19 |       12 |        6 |        1 |       1 |        6 |        5 |       14 |       10 |        4 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        5 |       13 |        5 |        1 |        2 |       0 |        3 |        4 |        6 |        4 |        3 |        1 |       0 |      0 |      0 |      6 |     11 |      4 |      6 |      4 |     55 |      0 |      0 |      2 |     10 |     22 |     11 |      6 |      2 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      5 |      2 |      3 |      3 |     26 |      0 |      1 | s03      | R    |
| 50020000 |    808 |    348 |    252 |    33 |    0 |    170 |    1 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    343 |    465 |      48 |      21 |       0 |      23 |     14 |     14 |      0 |      8 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      2 |      2 |      0 |      2 |      8 |      4 |      0 |      3 |       1 |       0 |       0 |       0 |      7 |      2 |      0 |      3 |        5 |       15 |       27 |       30 |       15 |       22 |       4 |        7 |       34 |       49 |       47 |       24 |       65 |       4 |        8 |       16 |       38 |       31 |        6 |       21 |       4 |        3 |       14 |       35 |       24 |       21 |       29 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       22 |       32 |       19 |        7 |       13 |       0 |       11 |       23 |       31 |       12 |       13 |       16 |       1 |      0 |      7 |     30 |     75 |     26 |     16 |     16 |    178 |      0 |      0 |      4 |     27 |     58 |     17 |     11 |     15 |    120 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     32 |     45 |     14 |      5 |      2 |    104 |      0 |      1 | s03      | R    |
| 50021000 |    673 |    264 |    227 |    26 |    0 |    149 |    1 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    327 |    346 |      47 |       9 |       0 |      20 |     11 |      8 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      4 |      2 |      0 |      3 |      1 |      1 |      0 |      7 |       1 |       4 |       0 |       2 |      3 |      3 |      0 |      2 |        6 |       16 |       36 |       36 |       15 |        6 |       1 |       12 |       24 |       40 |       47 |       16 |        9 |       0 |        7 |       23 |       45 |       30 |        9 |        8 |       0 |        5 |       25 |       41 |       18 |        7 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       15 |       30 |       22 |        8 |        4 |       0 |        5 |       27 |       34 |       17 |        7 |        3 |       0 |      0 |      3 |     25 |     45 |     36 |     11 |     13 |    131 |      0 |      0 |      0 |     20 |     41 |     21 |      6 |     18 |    121 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     31 |     22 |     15 |      4 |      6 |    103 |      0 |      1 | s03      | R    |
| 50022001 |     35 |      8 |     16 |     3 |    0 |      8 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     23 |     12 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        0 |        0 |        0 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       1 |        0 |        0 |        2 |        2 |        4 |        1 |       0 |        0 |        0 |        2 |        0 |        3 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        4 |        1 |        3 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      5 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      5 |      0 |      1 | s03      | R    |
| 50022002 |      6 |      2 |      2 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      3 |       1 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 50023000 |    638 |    260 |    228 |    20 |    0 |    119 |    8 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    292 |    346 |      34 |       8 |       0 |       9 |     12 |     10 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       2 |      4 |      5 |      0 |      0 |        7 |       21 |       23 |       27 |       13 |       10 |       6 |       12 |       22 |       34 |       37 |       30 |       11 |       7 |        9 |       25 |       26 |       26 |       19 |       11 |       0 |        6 |       20 |       28 |       25 |       19 |       14 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       14 |       21 |       15 |        5 |        3 |       0 |       10 |       24 |       23 |       16 |        4 |        3 |       1 |      0 |      0 |     22 |     45 |     20 |     13 |     17 |    143 |      0 |      0 |      1 |     21 |     42 |     24 |     15 |     17 |    108 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |     30 |     10 |      2 |      4 |     82 |      0 |      1 | s03      | R    |
| 50030000 |    735 |    286 |    248 |    22 |    0 |    164 |    8 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    333 |    402 |      34 |      19 |       0 |      18 |     16 |      4 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      2 |      0 |      8 |      1 |      1 |      0 |      3 |       3 |       2 |       0 |       0 |      1 |      0 |      0 |      3 |       11 |       22 |       28 |       20 |       12 |       12 |       5 |       17 |       33 |       55 |       38 |       15 |       10 |       8 |        7 |       33 |       28 |       30 |       13 |        5 |       7 |       14 |       33 |       31 |       19 |       14 |        6 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       39 |       20 |       11 |       11 |        1 |       2 |       15 |       35 |       18 |       18 |        8 |        7 |       0 |      0 |      4 |     32 |     45 |     14 |      8 |     13 |    170 |      0 |      0 |      3 |     22 |     37 |      9 |      9 |      9 |    159 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     21 |      7 |      2 |      4 |    132 |      0 |      1 | s03      | R    |
| 50031000 |    580 |    197 |    265 |    14 |    0 |    101 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    290 |    290 |      17 |      13 |       0 |      11 |     11 |     15 |      0 |      4 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        6 |        8 |       17 |       23 |       12 |        6 |       4 |        3 |       21 |       24 |       42 |       22 |        7 |       2 |        9 |       12 |       45 |       47 |       25 |       10 |       4 |       10 |       11 |       34 |       28 |       15 |        7 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       11 |       16 |       13 |        6 |        1 |       0 |       12 |        8 |       19 |        9 |        6 |        2 |       0 |      0 |      0 |     20 |     34 |     16 |     11 |     11 |    105 |      0 |      0 |      0 |     21 |     61 |     27 |     11 |     19 |    126 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     23 |      5 |      4 |      2 |     67 |      0 |      1 | s03      | R    |
| 50032000 |    734 |    248 |    325 |     8 |    0 |    148 |    2 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    342 |    392 |      19 |      11 |       0 |       6 |     14 |      6 |      0 |     11 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      1 |      0 |     11 |      8 |      0 |      0 |      0 |       1 |       2 |       0 |       1 |      3 |      5 |      0 |      3 |        6 |       16 |       26 |       19 |       18 |       10 |       0 |       11 |       21 |       44 |       38 |       22 |       16 |       1 |        7 |       14 |       72 |       45 |       21 |        8 |       1 |       11 |       26 |       59 |       41 |        9 |       10 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       12 |       15 |       24 |       11 |        2 |       0 |       12 |       10 |       24 |       23 |        8 |        5 |       0 |      0 |      0 |     39 |     37 |     25 |      9 |     18 |    120 |      0 |      0 |      1 |     31 |     64 |     36 |     29 |     16 |    148 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     20 |     42 |      9 |      6 |      7 |     73 |      0 |      1 | s03      | R    |
| 50033000 |    622 |    240 |    248 |    11 |    0 |    108 |    6 |    2 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    306 |    316 |      24 |      21 |       0 |       5 |      2 |      9 |      0 |      9 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      2 |        9 |       19 |       12 |       25 |       25 |        7 |      14 |        9 |       11 |       28 |       39 |       21 |        4 |      17 |        9 |       22 |       25 |       30 |       23 |        6 |       9 |       13 |       21 |       24 |       26 |       22 |        8 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       11 |       18 |       14 |        9 |        4 |       0 |       18 |       13 |       11 |       15 |        4 |        2 |       0 |      0 |      2 |     12 |     45 |     24 |      9 |     10 |    138 |      0 |      0 |      1 |     26 |     34 |     10 |      3 |     20 |    154 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     12 |     18 |      6 |      5 |      3 |     87 |      0 |      1 | s03      | R    |
| 50034000 |    735 |    237 |    348 |    15 |    0 |    126 |    3 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    383 |    352 |      18 |       7 |       0 |      12 |      6 |      8 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      6 |      0 |      3 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       2 |      0 |      1 |      0 |      2 |        6 |       14 |       24 |       20 |       21 |        9 |      14 |        8 |       15 |       23 |       35 |       19 |        9 |      20 |        9 |       18 |       49 |       41 |       21 |       20 |      26 |        8 |       19 |       44 |       32 |       17 |       16 |      28 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       22 |       14 |       21 |       21 |       10 |        3 |       0 |        9 |       12 |       17 |        8 |        7 |        5 |       1 |      0 |      1 |     31 |     40 |     19 |      6 |      5 |    135 |      0 |      0 |      0 |     21 |     79 |     26 |     13 |     22 |    187 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     27 |      9 |      7 |      2 |     88 |      0 |      1 | s03      | R    |
| 50035000 |    742 |    237 |    346 |     9 |    0 |    136 |    8 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    379 |    363 |      14 |      23 |       0 |       8 |     18 |     14 |      0 |      4 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      5 |      0 |      4 |     16 |      4 |      0 |      1 |       0 |       2 |       0 |       4 |      5 |      9 |      0 |      2 |        9 |       11 |       32 |       36 |       15 |        6 |       0 |        5 |       18 |       42 |       43 |       10 |        8 |       2 |       18 |       19 |       53 |       58 |       25 |        9 |       0 |       14 |       25 |       52 |       54 |       12 |        7 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       14 |       23 |       19 |       10 |        2 |       1 |       12 |       21 |       21 |       12 |        4 |        1 |       0 |      0 |      1 |     22 |     57 |     24 |     18 |      7 |    108 |      0 |      0 |      1 |     22 |    104 |     40 |     13 |     26 |    140 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     32 |     23 |      8 |      3 |      1 |     92 |      0 |      1 | s03      | R    |
| 50040000 |    565 |    237 |    229 |    10 |    0 |     83 |    4 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    273 |    292 |      12 |       5 |       0 |       5 |     14 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      2 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |        7 |       19 |       12 |       17 |       12 |      26 |        6 |       12 |       24 |       27 |       14 |       21 |      34 |        5 |        8 |       24 |       27 |       13 |       12 |      31 |        6 |        7 |       13 |       20 |       14 |       17 |      32 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       11 |       15 |       12 |        7 |        1 |       2 |        8 |        6 |       14 |        6 |        8 |        3 |       0 |      0 |      1 |     14 |     17 |     16 |     12 |     16 |    161 |      0 |      0 |      1 |     24 |     25 |      9 |      9 |     12 |    149 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     13 |     12 |      1 |      4 |     54 |      0 |      1 | s03      | R    |
| 50041000 |    224 |     82 |     87 |     2 |    0 |     52 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    107 |    117 |       7 |       4 |       0 |       1 |      0 |      5 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      4 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        4 |       10 |       13 |        4 |        1 |       1 |        3 |        7 |       16 |       15 |        2 |        3 |       2 |        1 |        4 |       17 |        8 |        7 |        5 |       0 |        0 |        4 |       22 |       12 |        6 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        3 |       14 |        5 |        5 |        0 |       0 |        4 |        2 |        8 |        8 |        1 |        0 |       1 |      0 |      0 |      4 |      4 |      2 |      0 |      4 |     68 |      0 |      0 |      0 |      3 |      6 |      3 |      1 |      1 |     73 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      1 |     46 |      0 |      1 | s03      | R    |
| 50050000 |    958 |    294 |    438 |    22 |    0 |    192 |    8 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    480 |    478 |      16 |      19 |       0 |      16 |     18 |     20 |      0 |     16 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      3 |      0 |      2 |      3 |      2 |      0 |      3 |       0 |       4 |       0 |       0 |      5 |      0 |      0 |      4 |       14 |        5 |       33 |       39 |       22 |        8 |       2 |        7 |       12 |       62 |       58 |       20 |        8 |       4 |        8 |       18 |       71 |       87 |       36 |       18 |       0 |       10 |       25 |       71 |       55 |       24 |       14 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |        8 |       43 |       39 |       11 |        2 |       0 |       11 |       15 |       31 |       40 |        8 |        2 |       0 |      0 |      7 |     48 |     65 |     29 |     13 |      7 |    125 |      0 |      0 |      3 |     86 |     92 |     31 |     16 |      9 |    201 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     48 |     55 |     10 |      7 |      6 |     97 |      0 |      1 | s03      | R    |
| 50060000 |    799 |    310 |    351 |     7 |    0 |    120 |    7 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    396 |    403 |      15 |      11 |       0 |       9 |     15 |     12 |      0 |      5 |      0 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      1 |      3 |      0 |      2 |      1 |      3 |      0 |      2 |       0 |       0 |       0 |       1 |      4 |      2 |      0 |      1 |        5 |       10 |       21 |       28 |       22 |       17 |      32 |        9 |       12 |       40 |       25 |       23 |       24 |      42 |       11 |       23 |       34 |       44 |       24 |       19 |      33 |        8 |       12 |       35 |       30 |       21 |       20 |      37 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       23 |       15 |        9 |       11 |        5 |       2 |       10 |       13 |       17 |       16 |        6 |        2 |       1 |      0 |      2 |     21 |     41 |     24 |      8 |     13 |    201 |      0 |      0 |      0 |     27 |     57 |     32 |     15 |      6 |    214 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     33 |      8 |      4 |      1 |     75 |      0 |      1 | s03      | R    |
| 50070000 |    510 |    223 |    171 |    18 |    0 |     87 |    7 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    235 |    275 |      27 |      17 |       0 |      11 |      7 |      8 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      2 |      0 |      3 |      1 |      1 |      0 |      0 |      10 |       2 |       0 |      10 |      3 |      2 |      0 |      0 |       11 |       15 |       19 |       24 |        5 |       12 |      13 |        9 |       20 |       22 |       15 |       22 |       15 |      21 |        7 |        8 |       19 |       17 |        9 |        9 |       7 |        7 |        8 |       22 |       21 |       11 |       10 |      16 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       17 |       16 |       10 |        8 |        4 |       1 |        9 |       15 |       14 |       10 |        3 |        3 |       2 |      0 |      4 |     17 |     41 |     15 |      6 |     15 |    125 |      0 |      0 |      1 |     17 |     33 |     10 |      5 |      5 |    100 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     12 |     25 |     11 |      4 |      4 |     58 |      0 |      1 | s03      | R    |
| 50080000 |    655 |    278 |    239 |    15 |    0 |    111 |    4 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    295 |    360 |      30 |      13 |       0 |      13 |      7 |      9 |      0 |      5 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      1 |      0 |      4 |        4 |       10 |       19 |       31 |       10 |       14 |      21 |       11 |       27 |       41 |       34 |       16 |       19 |      21 |        9 |       16 |       36 |       22 |       14 |        9 |      16 |        8 |       15 |       28 |       21 |       12 |       13 |      20 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       20 |       19 |       10 |        4 |        3 |       2 |       19 |       18 |       19 |       13 |        5 |        0 |       0 |      0 |      2 |     20 |     39 |     25 |     18 |     16 |    158 |      0 |      0 |      2 |     21 |     40 |      9 |     12 |     15 |    140 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |     25 |      7 |      2 |      1 |     86 |      0 |      1 | s03      | R    |
| 50091001 |    505 |    202 |    164 |    18 |    0 |    110 |    5 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    235 |    270 |      19 |       8 |       0 |       9 |     14 |      2 |      0 |      8 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |       0 |       1 |       0 |       0 |      4 |      1 |      0 |      3 |        2 |       11 |       13 |       19 |       17 |        8 |      13 |        6 |       11 |       23 |       24 |       20 |       23 |      12 |        7 |       22 |       21 |       14 |        4 |       10 |       4 |        6 |       12 |       10 |       18 |        8 |       20 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       17 |       16 |       16 |        7 |        3 |       0 |       12 |       24 |        9 |        8 |        8 |        8 |       0 |      0 |      0 |     12 |     34 |     14 |      9 |      8 |    125 |      0 |      0 |      3 |     14 |     22 |     10 |      6 |      8 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     13 |     10 |      6 |      2 |     94 |      0 |      1 | s03      | R    |
| 50091002 |    161 |     61 |     66 |     4 |    0 |     27 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     76 |     85 |       4 |       2 |       0 |       1 |      4 |      5 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        7 |        5 |        5 |        3 |       2 |        0 |        2 |        8 |       10 |        7 |        5 |       4 |        2 |        4 |        8 |        4 |       10 |        4 |       3 |        1 |        5 |        7 |        6 |        6 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        3 |        6 |        2 |        1 |       0 |        3 |        2 |        7 |        4 |        1 |        1 |       0 |      0 |      1 |      6 |      3 |     10 |      1 |      3 |     37 |      0 |      0 |      0 |      7 |     10 |      2 |      6 |      4 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      3 |      2 |      3 |      3 |     15 |      0 |      1 | s03      | R    |
| 50100001 |    113 |     56 |     32 |     3 |    0 |     19 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     47 |     66 |       6 |       2 |       0 |       1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        2 |        5 |        7 |        2 |        4 |       0 |        1 |        7 |        8 |        6 |        5 |        5 |       4 |        2 |        3 |        5 |        2 |        2 |        0 |       0 |        2 |        6 |        5 |        2 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        6 |        2 |        1 |        1 |       0 |        3 |        1 |        4 |        3 |        1 |        0 |       0 |      0 |      1 |      8 |      5 |     11 |      2 |      2 |     27 |      0 |      0 |      1 |      5 |      4 |      1 |      0 |      1 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |     16 |      0 |      1 | s03      | R    |
| 50100002 |     46 |     15 |     27 |     2 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     26 |       1 |       4 |       0 |       1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        3 |        3 |        2 |        1 |        1 |       3 |        0 |        3 |        1 |        2 |        3 |        3 |       3 |        0 |        3 |        0 |        2 |        2 |        0 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |     11 |      0 |      0 |      0 |      1 |      7 |      0 |      1 |      1 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 50100003 |    700 |    316 |    230 |    16 |    0 |    133 |    4 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    307 |    393 |      40 |      15 |       0 |      14 |     14 |      6 |      0 |      3 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      1 |      1 |      1 |      0 |      2 |       1 |       0 |       0 |       2 |      6 |      3 |      0 |      3 |        9 |       15 |       24 |       23 |       13 |       30 |      10 |        9 |       21 |       19 |       31 |       19 |       78 |      15 |        8 |       15 |       21 |       18 |       14 |       20 |       4 |       12 |       14 |       13 |       19 |       12 |       53 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       23 |       25 |        6 |        5 |        6 |       0 |        8 |       17 |       23 |       10 |        1 |       10 |       2 |      0 |      6 |     49 |     35 |     18 |     11 |     15 |    182 |      0 |      0 |      1 |     31 |     33 |     16 |     12 |     11 |    126 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     28 |     26 |      6 |      4 |      1 |     88 |      0 |      1 | s03      | R    |
| 50100004 |     53 |     24 |     17 |     1 |    0 |      9 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     28 |     25 |       1 |       2 |       0 |       2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        4 |        3 |        0 |        2 |       0 |        1 |        3 |        3 |        4 |        2 |        1 |       0 |        0 |        4 |        1 |        1 |        2 |        1 |       1 |        1 |        1 |        1 |        2 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        3 |        2 |        0 |       0 |        1 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      8 |      7 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |      7 |      0 |      1 | s03      | R    |
| 50120000 |    653 |    271 |    225 |    20 |    0 |    122 |    6 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    281 |    372 |      23 |       5 |       0 |      16 |      8 |      7 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      2 |      0 |      4 |        7 |       13 |       19 |       31 |       21 |        9 |       7 |       14 |       17 |       31 |       46 |       20 |       17 |      19 |        2 |       14 |       21 |       21 |       14 |       13 |      10 |       10 |       25 |       33 |       22 |       13 |       16 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       22 |       18 |       16 |        9 |        3 |       1 |        8 |       17 |       20 |       18 |        8 |        7 |       0 |      0 |      1 |     21 |     40 |     22 |      9 |      6 |    172 |      0 |      0 |      3 |     31 |     25 |     16 |      8 |     11 |    131 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     30 |      8 |      4 |      4 |     88 |      0 |      1 | s03      | R    |
| 50130001 |    367 |    146 |    145 |     8 |    0 |     63 |    2 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    164 |    203 |       9 |       4 |       0 |       4 |      6 |      5 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        5 |        3 |        7 |       19 |        6 |       10 |       6 |        4 |        9 |       24 |       18 |       10 |       16 |       9 |        5 |        7 |       14 |       23 |       14 |        5 |       7 |        4 |        6 |       17 |       24 |        7 |        6 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        6 |       11 |        5 |        4 |        1 |       1 |        5 |        4 |       11 |       14 |        6 |        3 |       0 |      0 |      2 |      7 |     27 |     15 |      8 |     11 |     76 |      0 |      0 |      2 |      5 |     17 |     14 |     11 |     12 |     84 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     10 |      1 |      4 |      7 |     41 |      0 |      1 | s03      | R    |
| 50130002 |    347 |    118 |    154 |    12 |    0 |     61 |    2 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    163 |    184 |       8 |      12 |       0 |       1 |      5 |      9 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      2 |      0 |      3 |        2 |        6 |       10 |        8 |        9 |        7 |       6 |        2 |       11 |       13 |       15 |        8 |       14 |       7 |        3 |       12 |       20 |       22 |        8 |        9 |       7 |        5 |        6 |       17 |       15 |       13 |       10 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        9 |        8 |        9 |        2 |        1 |       0 |        3 |        8 |       15 |       10 |        3 |        2 |       0 |      0 |      3 |      8 |     16 |      6 |      3 |      1 |     81 |      0 |      0 |      0 |     19 |     25 |      9 |      2 |      8 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     14 |      2 |      0 |      3 |     48 |      0 |      1 | s03      | R    |
| 50130003 |    130 |     43 |     56 |     3 |    0 |     28 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     60 |     70 |       2 |       0 |       0 |       1 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        1 |        1 |        1 |        4 |        4 |        1 |       3 |        4 |        1 |        5 |        4 |        9 |        3 |       2 |        0 |        4 |        3 |        6 |       12 |        3 |       1 |        1 |        2 |        3 |        6 |        7 |        5 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        6 |        3 |        4 |        1 |       1 |        2 |        2 |        4 |        1 |        5 |        1 |       0 |      0 |      0 |      4 |      6 |      4 |      2 |      5 |     22 |      0 |      0 |      0 |      5 |     13 |      4 |      0 |      3 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      7 |      1 |      1 |      1 |     17 |      0 |      1 | s03      | R    |
| 50130004 |     56 |     13 |     32 |     1 |    0 |     10 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     26 |     30 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        3 |        1 |        0 |        1 |        5 |        1 |       0 |        0 |        3 |        1 |        5 |        7 |        1 |       0 |        1 |        3 |        1 |        6 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        2 |        2 |        0 |       0 |        2 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      2 |      5 |      3 |      4 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 50140001 |    135 |     46 |     58 |     4 |    0 |     25 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     53 |     82 |       6 |       0 |       0 |       2 |      3 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        3 |        2 |        1 |        1 |        7 |       1 |        0 |        4 |        4 |        7 |        0 |       13 |       1 |        0 |        3 |        7 |        3 |        0 |        5 |       1 |        1 |        2 |        6 |        1 |        1 |       26 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        5 |        6 |        4 |        0 |        2 |       0 |        0 |        3 |        4 |        0 |        1 |        6 |       0 |      0 |      1 |      6 |      5 |      3 |      0 |      1 |     30 |      0 |      0 |      0 |     12 |      8 |      2 |      2 |      1 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |     23 |      0 |      1 | s03      | R    |
| 50140002 |    758 |    308 |    270 |    20 |    0 |    146 |    7 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    349 |    409 |      27 |      19 |       0 |      14 |     17 |      8 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      1 |      3 |      1 |      0 |      1 |       0 |       0 |       0 |       1 |      3 |      1 |      0 |      1 |        9 |       17 |       23 |       33 |       18 |       15 |      15 |       14 |       32 |       23 |       42 |       21 |       24 |      22 |       13 |       21 |       27 |       25 |       17 |       16 |      16 |        5 |       12 |       20 |       28 |       15 |       26 |      29 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       27 |       20 |       14 |        8 |        3 |       0 |       20 |       32 |       21 |       11 |        7 |        4 |       1 |      0 |      2 |     35 |     38 |     11 |      7 |     16 |    199 |      0 |      0 |      1 |     22 |     37 |     18 |     12 |      7 |    173 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     30 |     27 |      8 |      3 |      2 |    109 |      0 |      1 | s03      | R    |
| 50141001 |    790 |    319 |    328 |    17 |    0 |    117 |    6 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    380 |    410 |      43 |      14 |       0 |      14 |      9 |     17 |      0 |      5 |      3 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      2 |      0 |      1 |        8 |       13 |       30 |       31 |       18 |       19 |      28 |       14 |       17 |       38 |       32 |       17 |       23 |      31 |       12 |       20 |       47 |       30 |       25 |        8 |      23 |       11 |       20 |       40 |       34 |       16 |       18 |      24 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       17 |       15 |       14 |        7 |        4 |       2 |       19 |       16 |       25 |        8 |        5 |        1 |       1 |      0 |      5 |     28 |     37 |     28 |     14 |     15 |    192 |      0 |      0 |      0 |     20 |     68 |     23 |      8 |     17 |    192 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     18 |     26 |     11 |      7 |      3 |     76 |      0 |      1 | s03      | R    |
| 50141002 |      7 |      3 |      3 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 50150000 |    620 |    237 |    254 |    15 |    0 |    105 |    4 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    300 |    320 |      29 |      13 |       0 |      10 |     10 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |       0 |       2 |       0 |       1 |      4 |      2 |      0 |      3 |        4 |        9 |       19 |       28 |       17 |       19 |      15 |        5 |       17 |       27 |       24 |       18 |       10 |      25 |        6 |       21 |       41 |       28 |       16 |        4 |       8 |        9 |       16 |       39 |       20 |       19 |        9 |      18 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        9 |       22 |       14 |        8 |        3 |       1 |       11 |       14 |       18 |       15 |        5 |        1 |       0 |      0 |      2 |     26 |     31 |     10 |      6 |     10 |    152 |      0 |      0 |      2 |     21 |     32 |     26 |      7 |     19 |    147 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     17 |     10 |      5 |      4 |     70 |      0 |      1 | s03      | R    |
| 50160000 |    369 |    131 |    147 |     8 |    0 |     77 |    2 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    184 |    185 |      12 |      11 |       0 |       6 |      2 |      4 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      3 |       0 |       0 |       0 |       0 |      4 |      2 |      0 |      0 |        3 |       10 |       14 |       11 |        7 |        5 |       9 |        3 |       12 |       16 |       13 |       10 |       10 |       8 |        4 |       19 |       12 |       11 |       17 |       12 |       1 |        5 |       10 |       10 |       13 |       12 |       13 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       16 |       11 |        9 |        4 |        3 |       0 |       10 |        7 |       12 |        8 |        4 |        0 |       1 |      0 |      1 |      6 |     19 |      8 |      8 |      7 |     82 |      0 |      0 |      2 |      5 |     18 |      7 |      8 |     13 |     94 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     16 |      4 |      2 |      4 |     51 |      0 |      1 | s03      | R    |
| 50161000 |    727 |    277 |    321 |     9 |    0 |    112 |    2 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    362 |    365 |      16 |       8 |       0 |       4 |      7 |     20 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      2 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        8 |        9 |       12 |       27 |       40 |       15 |      16 |        9 |        8 |       20 |       42 |       47 |       17 |       7 |        5 |       15 |       24 |       46 |       47 |       22 |      11 |       10 |        7 |       19 |       42 |       37 |       20 |      16 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       10 |        6 |       19 |       11 |        4 |       2 |       19 |        4 |       12 |       18 |        9 |        1 |       1 |      0 |      1 |     21 |     38 |     22 |     11 |     13 |    171 |      0 |      0 |      1 |     24 |     64 |     24 |      7 |     17 |    184 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     17 |      4 |      4 |      1 |     91 |      0 |      1 | s03      | R    |
| 50162001 |    123 |     41 |     55 |     2 |    0 |     24 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     67 |     56 |       4 |       8 |       0 |       0 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      0 |      0 |      0 |      2 |        1 |        1 |        8 |        3 |        3 |        1 |       3 |        1 |        1 |        6 |        5 |        6 |        1 |       1 |        2 |        0 |        9 |       11 |        7 |        4 |       0 |        3 |        0 |       10 |        3 |        5 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        4 |        3 |        4 |        1 |       0 |        1 |        2 |        2 |        5 |        2 |        1 |       0 |      0 |      0 |      4 |      5 |      9 |      0 |      1 |     22 |      0 |      0 |      0 |      9 |     12 |      6 |      6 |      2 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      1 |      2 |      0 |     17 |      0 |      1 | s03      | R    |
| 50162002 |    656 |    237 |    290 |     9 |    0 |    114 |    4 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    314 |    342 |      20 |       5 |       0 |       2 |      9 |      4 |      0 |      9 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |       0 |       1 |       0 |       0 |      5 |      0 |      0 |      0 |        7 |        6 |       11 |       24 |       27 |       11 |       9 |       13 |       11 |       26 |       33 |       33 |       16 |      10 |        5 |        8 |       32 |       49 |       21 |       20 |      16 |        5 |       10 |       32 |       37 |       24 |       17 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |        5 |        9 |       14 |       19 |        4 |       2 |       11 |       10 |       11 |       17 |       10 |        2 |       0 |      0 |      1 |     24 |     33 |     22 |      8 |     10 |    139 |      0 |      0 |      2 |     25 |     54 |     17 |     25 |     17 |    150 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     16 |     23 |      5 |      2 |      4 |     75 |      0 |      1 | s03      | R    |
| 50163000 |   1118 |    373 |    519 |    14 |    0 |    201 |    3 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    556 |    562 |      32 |      24 |       0 |      14 |     17 |     18 |      0 |      9 |      2 |      1 |      0 |      4 |      5 |      5 |      0 |      1 |     11 |      8 |      0 |     11 |      5 |      3 |      0 |      4 |       0 |       6 |       0 |       1 |      2 |      2 |      0 |      3 |        6 |       11 |       26 |       50 |       38 |       20 |      13 |        7 |       16 |       47 |       72 |       36 |       18 |      13 |       19 |       25 |       67 |       76 |       56 |       19 |      13 |       24 |       21 |       69 |       63 |       40 |       15 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       24 |        6 |       26 |       34 |       20 |        5 |       2 |       21 |       14 |       30 |       30 |       10 |        2 |       2 |      0 |      1 |     44 |     37 |     30 |     14 |     36 |    211 |      0 |      0 |      3 |     75 |     78 |     32 |     15 |     37 |    279 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     43 |     21 |     16 |      6 |     12 |    127 |      0 |      1 | s03      | R    |
| 50164000 |    634 |    168 |    339 |    10 |    0 |    116 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    310 |    324 |       8 |       9 |       0 |       4 |     11 |     16 |      0 |      9 |      1 |      2 |      0 |      1 |      1 |      3 |      0 |      0 |      5 |     11 |      0 |      5 |      5 |      2 |      0 |      3 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      1 |        3 |        5 |       26 |       20 |        8 |        3 |       1 |        2 |       10 |       46 |       27 |        9 |        8 |       0 |        6 |       10 |       92 |       28 |       30 |        8 |       0 |        5 |       18 |       78 |       30 |       24 |        8 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        9 |       33 |       11 |       10 |        1 |       1 |        4 |       10 |       26 |       10 |        6 |        1 |       0 |      0 |      1 |     18 |      9 |      9 |      2 |      3 |    126 |      0 |      0 |      3 |     23 |     33 |      9 |      3 |     13 |    255 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     16 |      9 |      5 |      0 |      1 |     93 |      0 |      1 | s03      | R    |
| 50165000 |     47 |     11 |     29 |     0 |    0 |      7 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     22 |     25 |       0 |       0 |       0 |       0 |      0 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        1 |        2 |        0 |       0 |        1 |        0 |        2 |        3 |        0 |        0 |       0 |        1 |        1 |        4 |        4 |        4 |        0 |       0 |        0 |        1 |        4 |        3 |        4 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 50170000 |    308 |    123 |    117 |     8 |    0 |     53 |    3 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    148 |    160 |       3 |       7 |       0 |       7 |      5 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        6 |        7 |       10 |        7 |        3 |      16 |        5 |        6 |       11 |       15 |       13 |        8 |      12 |        1 |       12 |       17 |       11 |        6 |        6 |       7 |        3 |       10 |       18 |        7 |        5 |        6 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        9 |        4 |        7 |        5 |        4 |       2 |        7 |        6 |        8 |        4 |        3 |        3 |       2 |      0 |      1 |     13 |     15 |      5 |      4 |      4 |     81 |      0 |      0 |      0 |     10 |     20 |      6 |      6 |      3 |     72 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     11 |      2 |      2 |      3 |     43 |      0 |      1 | s03      | R    |
| 50173000 |    306 |     95 |    158 |     8 |    0 |     44 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    142 |    164 |       3 |       0 |       0 |       4 |      4 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        2 |        4 |        6 |        6 |        3 |        8 |       4 |        3 |        2 |        7 |       14 |       16 |        8 |      12 |        7 |        5 |        8 |       11 |       16 |       15 |      15 |        3 |       13 |       13 |       13 |       13 |        9 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        6 |        3 |        8 |        4 |        5 |       1 |        1 |        5 |        7 |        2 |        3 |        2 |       1 |      0 |      0 |      4 |     17 |      6 |      3 |      7 |     58 |      0 |      0 |      1 |      7 |     21 |      8 |      3 |     17 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      3 |      6 |      0 |      4 |     29 |      0 |      1 | s03      | R    |
| 50180000 |    667 |    257 |    276 |    14 |    0 |    108 |    5 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    309 |    358 |      21 |       8 |       0 |      11 |      9 |     14 |      0 |      4 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      6 |      6 |      0 |      4 |        3 |       10 |       10 |       18 |       17 |       14 |      21 |        6 |       25 |       24 |       33 |       25 |       20 |      31 |       11 |       26 |       43 |       23 |       19 |        6 |      22 |        8 |       15 |       29 |       19 |       19 |       13 |      23 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       22 |       15 |       11 |        5 |        1 |       1 |       15 |        9 |       22 |       11 |        8 |        2 |       1 |      0 |      4 |     15 |     35 |     12 |     10 |     16 |    165 |      0 |      0 |      2 |     30 |     50 |     17 |      8 |     15 |    154 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     22 |      9 |      5 |      6 |     69 |      0 |      1 | s03      | R    |
| 50183000 |    796 |    300 |    315 |    14 |    0 |    154 |    5 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    388 |    408 |      27 |      18 |       0 |       6 |      9 |     12 |      0 |      6 |      1 |      2 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |       1 |       1 |       0 |       0 |      2 |      2 |      0 |      1 |        3 |       14 |       27 |       39 |       18 |        7 |      18 |       15 |       18 |       39 |       40 |       25 |       11 |      26 |       10 |       16 |       48 |       33 |       27 |       13 |      16 |        9 |       12 |       46 |       41 |       15 |       13 |      16 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       19 |       24 |       23 |       13 |        4 |       2 |       22 |       17 |       20 |       16 |        5 |        1 |       1 |      0 |      2 |     24 |     44 |     22 |      9 |     25 |    174 |      0 |      0 |      2 |     32 |     56 |     21 |     18 |     18 |    168 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     31 |     31 |      7 |      2 |     10 |    100 |      0 |      1 | s03      | R    |
| 50184000 |    804 |    342 |    270 |    28 |    0 |    149 |   10 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    397 |    407 |      30 |       7 |       0 |      14 |     15 |      8 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      4 |      1 |      0 |      2 |       0 |       0 |       0 |       2 |      1 |      0 |      0 |      2 |       10 |       16 |       37 |       29 |       34 |       15 |      21 |       11 |       22 |       44 |       37 |       30 |       15 |      21 |        6 |       15 |       37 |       30 |       22 |       10 |      17 |        7 |       23 |       22 |       34 |       20 |        8 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       18 |       32 |       16 |       15 |        6 |       1 |       22 |       15 |       28 |       18 |        8 |        2 |       1 |      0 |      1 |     36 |     60 |     19 |     10 |     24 |    192 |      0 |      0 |      3 |     24 |     53 |     22 |      7 |     14 |    147 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     32 |     16 |      7 |      9 |    101 |      0 |      1 | s03      | R    |
| 50190000 |      7 |      0 |      7 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        3 |        0 |       1 |        0 |        0 |        0 |        0 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 50191000 |    895 |    298 |    410 |    24 |    0 |    157 |    4 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    436 |    459 |      16 |      15 |       0 |       4 |      8 |      7 |      0 |      7 |      1 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      8 |      2 |      0 |      6 |      2 |      1 |      0 |      4 |       0 |       0 |       0 |       0 |      8 |      3 |      0 |      3 |        9 |        4 |       19 |       29 |       32 |       20 |      15 |        6 |       14 |       23 |       54 |       33 |       19 |      21 |       15 |       13 |       58 |       48 |       38 |       13 |      23 |        5 |       16 |       65 |       43 |       38 |       16 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       13 |       20 |       29 |       14 |        6 |       1 |       18 |       10 |       23 |       25 |        7 |        4 |       0 |      0 |      1 |     25 |     52 |     20 |     13 |     11 |    176 |      0 |      0 |      4 |     48 |     90 |     27 |     12 |     29 |    200 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     41 |     27 |     10 |      8 |      8 |     92 |      0 |      1 | s03      | R    |
| 50200001 |    759 |    292 |    328 |    16 |    0 |    115 |    5 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    344 |    415 |      26 |      10 |       0 |      11 |      7 |     17 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      5 |      0 |      5 |      2 |      0 |      0 |      2 |       0 |       0 |       0 |       5 |      9 |      2 |      0 |      2 |        6 |       13 |       15 |       27 |       25 |        8 |      22 |        6 |       29 |       31 |       35 |       27 |       19 |      29 |       10 |       21 |       33 |       28 |       24 |       24 |      19 |        8 |       17 |       29 |       34 |       25 |       27 |      29 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       12 |       14 |       13 |       11 |        6 |       2 |       12 |       18 |       13 |        9 |        9 |        8 |       1 |      0 |      0 |     14 |     41 |     25 |     14 |     13 |    185 |      0 |      0 |      0 |     22 |     71 |     19 |     11 |     17 |    188 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     26 |      9 |      4 |      6 |     73 |      0 |      1 | s03      | R    |
| 50200002 |      7 |      3 |      0 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      3 |       0 |       0 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 50201000 |    634 |    240 |    262 |    22 |    0 |    105 |    1 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    305 |    329 |      15 |       7 |       0 |       5 |      9 |     15 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      3 |      0 |      0 |      4 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |       11 |       22 |       18 |       18 |       14 |      16 |       10 |        9 |       21 |       36 |       31 |       12 |      19 |        9 |       12 |       20 |       27 |       24 |       16 |      23 |        8 |       13 |       15 |       24 |       22 |       26 |      23 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       15 |       15 |       15 |        8 |        7 |       3 |        7 |       13 |       13 |       13 |        7 |        6 |       1 |      0 |      3 |     16 |     30 |     22 |      7 |      9 |    153 |      0 |      0 |      1 |     21 |     35 |     13 |      6 |     20 |    166 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |     23 |      5 |      5 |      4 |     76 |      0 |      1 | s03      | R    |
| 50202000 |    698 |    198 |    373 |    10 |    0 |    112 |    3 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    345 |    353 |       5 |      13 |       0 |       9 |     12 |     19 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      0 |      1 |       0 |       1 |       0 |       0 |      5 |      0 |      0 |      2 |       10 |        5 |       19 |       25 |       10 |        8 |       7 |        5 |        7 |       36 |       36 |       16 |        9 |       5 |       12 |        9 |       59 |       68 |       32 |       17 |       1 |       13 |       14 |       59 |       48 |       24 |       14 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        6 |       12 |       24 |        8 |        4 |       1 |       11 |        6 |       17 |       21 |        7 |        2 |       0 |      0 |      0 |     19 |     58 |     17 |      7 |      1 |     96 |      0 |      0 |      2 |     40 |    129 |     24 |     14 |     20 |    144 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     40 |      4 |      4 |      1 |     58 |      0 |      1 | s03      | R    |
| 50203000 |    628 |    229 |    300 |    11 |    0 |     86 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    310 |    318 |      17 |      15 |       0 |      11 |      6 |     12 |      0 |      6 |      2 |      1 |      0 |      1 |      1 |      1 |      0 |      1 |      4 |      5 |      0 |      3 |      1 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        4 |        7 |       23 |       23 |       21 |       10 |       8 |        8 |       16 |       28 |       32 |       23 |        7 |      19 |        6 |       20 |       37 |       31 |       35 |       18 |      13 |       14 |       21 |       22 |       31 |       28 |       15 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        9 |       16 |       13 |        2 |        2 |       1 |        7 |        7 |       15 |       11 |        4 |        1 |       0 |      0 |      1 |     26 |     30 |     12 |     14 |     13 |    133 |      0 |      0 |      2 |     29 |     51 |     21 |     11 |     17 |    169 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     14 |      7 |      1 |      3 |     54 |      0 |      1 | s03      | R    |
| 50210001 |    161 |     53 |     69 |     4 |    0 |     34 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     82 |     79 |       3 |       2 |       0 |       1 |      3 |      9 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |       11 |        8 |        4 |        2 |       4 |        2 |        1 |        7 |        3 |        4 |        4 |       2 |        2 |        4 |        6 |        5 |        3 |        5 |       4 |        1 |        5 |        9 |        4 |        5 |        5 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        4 |        8 |        6 |        2 |        0 |       0 |        1 |        4 |        8 |        1 |        2 |        0 |       0 |      0 |      1 |      3 |      8 |      1 |      0 |      2 |     38 |      0 |      0 |      0 |      2 |     18 |      3 |      0 |      1 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      6 |      1 |      0 |      1 |     25 |      0 |      1 | s03      | R    |
| 50210002 |    410 |    162 |    132 |     9 |    0 |    103 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    192 |    218 |      16 |       6 |       0 |      13 |      4 |      3 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      4 |      1 |      0 |      1 |        3 |       13 |       11 |       16 |       10 |        7 |       7 |       11 |       13 |       20 |       24 |        8 |        6 |      13 |        4 |        9 |       16 |       14 |        9 |        6 |      12 |        2 |       16 |       18 |        5 |        6 |        3 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       13 |       11 |       15 |        3 |        6 |       1 |       14 |       14 |       14 |       11 |        4 |        3 |       1 |      0 |      0 |     30 |     22 |     11 |      5 |      5 |     89 |      0 |      0 |      3 |     11 |     24 |      4 |      2 |      8 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     21 |      7 |      0 |      1 |     72 |      0 |      1 | s03      | R    |
| 50210004 |     13 |      3 |      4 |     1 |    0 |      3 |    0 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      7 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 50210005 |      2 |      1 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 50220001 |    627 |    248 |    283 |    10 |    0 |     83 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    314 |    313 |      14 |       9 |       0 |      13 |      8 |     13 |      0 |      4 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      3 |      6 |      0 |      4 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      5 |      0 |      0 |        3 |        7 |       17 |       16 |       34 |       21 |      14 |        8 |       10 |       20 |       27 |       36 |       22 |      13 |        9 |       10 |       32 |       30 |       42 |       19 |      12 |        3 |        8 |       26 |       34 |       31 |       15 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        8 |        8 |       12 |        5 |        4 |       2 |        7 |        9 |       15 |        6 |        7 |        3 |       1 |      0 |      1 |     19 |     38 |     16 |      7 |     25 |    142 |      0 |      0 |      2 |     16 |     43 |     30 |     18 |     27 |    147 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     18 |      6 |      2 |      4 |     46 |      0 |      1 | s03      | R    |
| 50220002 |     76 |     18 |     25 |     3 |    0 |     27 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     36 |     40 |       1 |       1 |       0 |       3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        1 |        3 |        0 |        4 |        0 |        1 |       0 |        0 |        3 |        2 |        2 |        1 |        1 |       0 |        4 |        2 |        3 |        1 |        1 |        0 |       0 |        3 |        2 |        4 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |        3 |        2 |        1 |        0 |       0 |        2 |        7 |        5 |        2 |        1 |        0 |       0 |      0 |      1 |      2 |      4 |      1 |      1 |      1 |      8 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |     24 |      0 |      1 | s03      | R    |
| 50221001 |    558 |    208 |    205 |    25 |    0 |    119 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    242 |    316 |      25 |      15 |       0 |      12 |     13 |      6 |      0 |      4 |      2 |      1 |      0 |      5 |      5 |      4 |      0 |      0 |      5 |      0 |      0 |      4 |      0 |      1 |      0 |      2 |       1 |       0 |       0 |       0 |      4 |      2 |      0 |      2 |        5 |       14 |       19 |       15 |       11 |        9 |       1 |        9 |       26 |       23 |       27 |       34 |       11 |       4 |        8 |       16 |       28 |       18 |       16 |        7 |       0 |        9 |       26 |       30 |       23 |       12 |       11 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       13 |       21 |       16 |        5 |        8 |       0 |       17 |       17 |       17 |       11 |        5 |        3 |       0 |      0 |      1 |     19 |     43 |      7 |      3 |      7 |    128 |      0 |      0 |      0 |     38 |     39 |     16 |      4 |      2 |    106 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     14 |      4 |      0 |      0 |    104 |      0 |      1 | s03      | R    |
| 50221002 |    177 |     83 |     64 |     3 |    0 |     23 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     73 |    104 |       2 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        3 |        1 |        8 |        7 |        8 |       1 |        0 |        5 |        4 |        9 |       12 |       21 |       3 |        1 |        2 |        5 |        6 |        8 |       11 |       0 |        2 |        3 |        5 |        7 |        1 |       12 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        2 |        1 |        0 |        1 |        3 |       0 |        3 |        3 |        2 |        3 |        7 |        1 |       0 |      0 |      0 |     14 |     14 |     10 |      5 |      4 |     36 |      0 |      0 |      0 |      4 |      8 |      8 |      4 |      3 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     23 |      0 |      1 | s03      | R    |
| 50222000 |    274 |     81 |    124 |     8 |    0 |     55 |    3 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    137 |    137 |       0 |       0 |       0 |       4 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       1 |      0 |      1 |      0 |      2 |        1 |        3 |        8 |       14 |        8 |        4 |       1 |        2 |        4 |        9 |       11 |        8 |        8 |       0 |        5 |        2 |       20 |       21 |       10 |        5 |       0 |        4 |        1 |       30 |       14 |        7 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |        9 |       10 |        3 |        3 |       0 |        5 |        4 |       12 |        9 |        3 |        1 |       0 |      0 |      0 |     17 |     25 |     17 |      0 |      0 |     22 |      0 |      0 |      2 |     15 |     31 |     33 |      6 |      0 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     14 |      4 |      2 |      0 |     27 |      0 |      1 | s03      | R    |
| 50230000 |    849 |    277 |    399 |    18 |    0 |    145 |    5 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    410 |    439 |      28 |      22 |       0 |       9 |     15 |     17 |      0 |      6 |      1 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      1 |      0 |      8 |      2 |      2 |      0 |      1 |       0 |       2 |       0 |       1 |      8 |      3 |      0 |      1 |        4 |       13 |       27 |       42 |       15 |        8 |       1 |        7 |       19 |       45 |       52 |       23 |       16 |       5 |       14 |       18 |       72 |       55 |       38 |       10 |       1 |       14 |       21 |       71 |       51 |       25 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       12 |       28 |       28 |       10 |        1 |       0 |        9 |       15 |       29 |       14 |       12 |        2 |       0 |      0 |      4 |     38 |     66 |     33 |     16 |     15 |    105 |      0 |      0 |      2 |     51 |    126 |     33 |     26 |      6 |    155 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     42 |     18 |      5 |      2 |     82 |      0 |      1 | s03      | R    |
| 50231000 |     23 |      6 |      8 |     0 |    0 |      6 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |      7 |       1 |       0 |       0 |       1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        3 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 50240001 |    442 |    173 |    167 |    13 |    0 |     82 |    2 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    226 |    216 |      24 |       6 |       0 |       8 |     11 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      3 |      0 |      1 |      3 |      2 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      2 |      0 |      1 |        4 |        8 |       19 |       24 |       15 |        7 |       4 |        5 |       15 |       16 |       20 |       18 |       14 |       4 |        7 |       18 |       25 |       12 |       13 |        1 |       6 |        6 |       15 |       32 |       13 |       10 |        6 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       12 |       20 |       10 |        7 |        3 |       1 |        8 |        9 |       10 |        7 |        4 |        1 |       0 |      0 |      0 |     24 |     30 |     11 |     10 |     14 |     84 |      0 |      0 |      1 |     18 |     34 |      6 |     10 |     10 |     88 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     14 |      7 |      2 |      4 |     54 |      0 |      1 | s03      | R    |
| 50240002 |    303 |    142 |    107 |     6 |    0 |     42 |    3 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    141 |    162 |      13 |       4 |       0 |       8 |      6 |      3 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        5 |       14 |       14 |        9 |        6 |       6 |        4 |       13 |       17 |       19 |       10 |        9 |      13 |        1 |       11 |       13 |       13 |        8 |        4 |       7 |        3 |       11 |       10 |        7 |        6 |        1 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        9 |        9 |        1 |        1 |        0 |       0 |        7 |        7 |        7 |        3 |        0 |        3 |       0 |      0 |      0 |     14 |     28 |      7 |      3 |      8 |     82 |      0 |      0 |      0 |      8 |     19 |     11 |      1 |      9 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      9 |      1 |      0 |      0 |     37 |      0 |      1 | s03      | R    |
| 50241001 |    267 |    116 |     93 |     6 |    0 |     49 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    128 |    139 |      26 |      13 |       0 |       8 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        4 |       15 |        6 |        6 |        8 |       7 |        2 |       12 |        9 |       16 |        6 |       12 |       9 |        1 |        7 |        8 |       10 |        7 |        7 |       7 |        1 |        4 |       14 |        6 |        4 |        9 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        7 |        8 |        7 |        2 |        1 |       0 |        3 |        6 |       10 |        4 |        2 |        2 |       0 |      0 |      0 |     11 |     25 |      6 |      3 |      3 |     68 |      0 |      0 |      0 |     21 |     12 |      7 |      1 |      3 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     11 |      5 |      0 |      0 |     27 |      0 |      1 | s03      | R    |
| 50241002 |    302 |    136 |     95 |     5 |    0 |     65 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    144 |    158 |      34 |       7 |       0 |      12 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |        8 |       16 |       13 |        9 |        5 |        4 |       7 |        3 |       11 |       14 |       16 |       12 |        7 |      11 |        6 |        9 |       18 |        7 |        4 |        0 |       6 |        2 |        7 |        9 |        5 |        9 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       10 |        5 |        8 |        2 |        2 |       1 |        6 |       12 |        8 |       11 |        1 |        1 |       0 |      0 |      0 |     14 |     24 |     13 |      4 |      6 |     75 |      0 |      0 |      0 |      9 |     14 |      3 |      3 |      1 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     10 |      4 |      2 |      2 |     39 |      0 |      1 | s03      | R    |
| 50250001 |    217 |     93 |     61 |     9 |    0 |     52 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     99 |    118 |      16 |       6 |       0 |      10 |      4 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        3 |        8 |       12 |        3 |        7 |       5 |        5 |       10 |       11 |        7 |        4 |       12 |       5 |        3 |        4 |        8 |        7 |        2 |        7 |       0 |        2 |        4 |        5 |        8 |        4 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        8 |        8 |        6 |        1 |        0 |       0 |       10 |        4 |       11 |        3 |        3 |        3 |       0 |      0 |      0 |     11 |     13 |      6 |      4 |      3 |     56 |      0 |      0 |      0 |      6 |     12 |      7 |      5 |      2 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      8 |     11 |      3 |      1 |      1 |     37 |      0 |      1 | s03      | R    |
| 50250002 |    559 |    256 |    160 |    15 |    0 |    122 |    3 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    266 |    293 |      80 |      19 |       0 |      26 |      7 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      8 |      3 |      0 |      6 |       13 |       15 |       26 |       28 |        9 |       12 |      10 |       12 |       28 |       34 |       30 |       17 |       14 |       8 |        6 |       12 |       29 |       20 |        2 |       10 |       3 |        4 |       12 |       26 |       16 |        8 |        9 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       19 |       18 |       16 |        4 |        3 |       1 |       11 |       21 |       17 |       12 |        7 |        3 |       1 |      0 |      1 |     20 |     51 |     21 |     11 |     10 |    142 |      0 |      0 |      0 |     10 |     33 |     13 |      4 |      7 |     93 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     36 |     10 |      1 |      3 |     73 |      0 |      1 | s03      | R    |
| 50260002 |    659 |    275 |    197 |    28 |    0 |    147 |    4 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    302 |    357 |      60 |      13 |       0 |      38 |     10 |      6 |      0 |      9 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      7 |      2 |      0 |      2 |        5 |       17 |       24 |       24 |       17 |       11 |       8 |        9 |       40 |       45 |       30 |       17 |       19 |       9 |       11 |       22 |       29 |       19 |        8 |        6 |       4 |        9 |       32 |       23 |       17 |        4 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       29 |       28 |       15 |        9 |        3 |       1 |       16 |       28 |       24 |        9 |        9 |        2 |       2 |      0 |      3 |     23 |     51 |     22 |      5 |     10 |    161 |      0 |      0 |      0 |     24 |     30 |      6 |      5 |      2 |    130 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     34 |     32 |     12 |      2 |      1 |    105 |      0 |      1 | s03      | R    |
| 50260003 |     89 |     36 |     18 |     2 |    0 |     29 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     49 |     40 |       2 |       2 |       0 |       5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        6 |        3 |        1 |        0 |        0 |       1 |        1 |       13 |        8 |        1 |        0 |        0 |       1 |        3 |        7 |        1 |        3 |        0 |        0 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       10 |        6 |        2 |        3 |        0 |       0 |        2 |        6 |        1 |        1 |        2 |        0 |       0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      2 |      0 |      0 |     27 |      0 |      1 | s03      | R    |
| 50271000 |    693 |    290 |    230 |    17 |    0 |    144 |    7 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    333 |    360 |      59 |      15 |       0 |      16 |      8 |      8 |      0 |     18 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      8 |      5 |      0 |      4 |       12 |       13 |       24 |       29 |       16 |       21 |      12 |        7 |       24 |       37 |       35 |       16 |       23 |      21 |       15 |       14 |       23 |       24 |       14 |       18 |       9 |        8 |       13 |       29 |       18 |       20 |       16 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       15 |       31 |       16 |        7 |        3 |       2 |       13 |       20 |       19 |       15 |       11 |        6 |       0 |      0 |      4 |     33 |     54 |     25 |     20 |      9 |    145 |      0 |      0 |      0 |     18 |     51 |     15 |     13 |     14 |    119 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     38 |     29 |     14 |      2 |      1 |     87 |      0 |      1 | s03      | R    |
| 50272000 |    869 |    333 |    330 |    23 |    0 |    171 |    5 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    434 |    435 |      35 |      19 |       0 |      21 |     14 |     20 |      0 |      5 |      0 |      0 |      0 |      0 |      4 |      4 |      0 |      4 |      3 |      3 |      0 |      3 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |     11 |      6 |      0 |      1 |        4 |       12 |       38 |       38 |       16 |       10 |      11 |        6 |       23 |       60 |       55 |       30 |       12 |      18 |       18 |       15 |       51 |       55 |       22 |       13 |       8 |       12 |       18 |       44 |       37 |       19 |        8 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |       25 |       36 |       25 |       12 |        4 |       1 |        5 |       21 |       32 |       17 |        6 |        0 |       2 |      0 |      1 |     41 |     63 |     26 |      7 |     12 |    183 |      0 |      0 |      1 |     34 |     83 |     23 |      8 |     12 |    169 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     27 |     46 |     13 |      5 |      7 |    107 |      0 |      1 | s03      | R    |
| 50274000 |    920 |    344 |    366 |    19 |    0 |    171 |    4 |    1 |    15 |    0 |    0 |    0 |    0 |    0 |    0 |    447 |    473 |      45 |      22 |       0 |      16 |      9 |     14 |      0 |     13 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      4 |      0 |      1 |      3 |      4 |      0 |      0 |       2 |       0 |       0 |       0 |      7 |      3 |      0 |      0 |        7 |       26 |       35 |       31 |       22 |        8 |      21 |       10 |       32 |       51 |       34 |       31 |       13 |      23 |       14 |       42 |       62 |       40 |       25 |        2 |      15 |        5 |       41 |       43 |       42 |       13 |        6 |      16 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       23 |       27 |       24 |        7 |        1 |       2 |       16 |       29 |       27 |       24 |        8 |        5 |       4 |      0 |      1 |     45 |     49 |     33 |     16 |     11 |    189 |      0 |      0 |      3 |     25 |     65 |     28 |     19 |     24 |    202 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     31 |     29 |      9 |      3 |      4 |    133 |      0 |      1 | s03      | R    |
| 50280000 |    723 |    342 |    239 |    14 |    0 |    116 |    5 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    352 |    371 |      45 |      12 |       0 |      14 |     13 |     12 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      6 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      1 |        7 |       19 |       25 |       48 |       29 |        7 |       9 |       12 |       29 |       44 |       50 |       38 |       13 |      12 |        7 |       17 |       44 |       33 |       20 |        9 |       3 |        8 |       17 |       31 |       29 |       12 |        5 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       22 |       17 |       17 |        7 |        4 |       1 |        6 |       19 |       18 |       11 |       10 |        3 |       0 |      0 |      1 |     31 |     69 |     24 |     11 |     16 |    190 |      0 |      0 |      0 |     20 |     64 |     16 |     14 |      5 |    120 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     21 |      9 |      6 |      5 |     79 |      0 |      1 | s03      | R    |
| 50290000 |    857 |    301 |    349 |    25 |    0 |    174 |    2 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    439 |    418 |      27 |      15 |       0 |      17 |     15 |      8 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      2 |      8 |      0 |      2 |      2 |      1 |      0 |      0 |       2 |       1 |       0 |       1 |      3 |      6 |      0 |      5 |        7 |       18 |       31 |       36 |       22 |        7 |       9 |        7 |       17 |       48 |       39 |       35 |       15 |      10 |       10 |       19 |       65 |       48 |       40 |       10 |       4 |        9 |       23 |       39 |       47 |       23 |       10 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       18 |       38 |       29 |       13 |        2 |       0 |       14 |       20 |       28 |       22 |        7 |        3 |       0 |      0 |      0 |     36 |     61 |     28 |     10 |      7 |    159 |      0 |      0 |      1 |     36 |     93 |     32 |     14 |     12 |    161 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     46 |     41 |     11 |      5 |      5 |     99 |      0 |      1 | s03      | R    |
| 50291000 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 50292001 |    151 |     52 |     51 |     2 |    0 |     45 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     64 |     87 |       4 |       3 |       0 |       2 |      2 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       3 |      0 |      1 |      0 |      2 |        1 |        6 |        7 |        4 |        1 |        0 |       0 |        1 |       15 |       10 |        5 |        1 |        1 |       0 |        1 |       13 |        2 |        3 |        0 |        1 |       0 |        0 |       15 |       12 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        9 |        8 |        7 |        1 |        0 |       0 |        2 |        8 |        7 |        4 |        2 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |     46 |      0 |      0 |      1 |      7 |      2 |      0 |      0 |      0 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      3 |      2 |      1 |      0 |     36 |      0 |      1 | s03      | R    |
| 51010000 |    150 |     44 |     71 |     4 |    0 |     24 |    4 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     76 |     74 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      2 |        3 |        2 |        4 |        2 |        5 |        3 |       1 |        4 |        2 |        3 |        8 |        2 |        4 |       1 |        3 |        0 |        8 |       10 |        9 |        3 |       5 |        2 |        3 |        4 |       12 |        3 |        6 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        3 |        6 |        2 |        4 |       0 |        2 |        2 |        6 |        1 |        6 |        0 |       0 |      0 |      1 |      6 |      3 |      3 |      1 |      1 |     29 |      0 |      0 |      1 |     11 |     11 |      2 |      1 |      8 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      6 |      3 |      2 |      2 |     16 |      0 |      1 | s03      | R    |
| 51011000 |     37 |     14 |     19 |     1 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     18 |     19 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        3 |        1 |       0 |        1 |        1 |        3 |        1 |        2 |        0 |       0 |        1 |        2 |        3 |        0 |        2 |        2 |       0 |        0 |        1 |        3 |        1 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      8 |      0 |      0 |      1 |      0 |      6 |      1 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51013000 |     17 |      1 |     12 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |     10 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       1 |        1 |        1 |        0 |        2 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51015000 |      8 |      4 |      2 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 51016001 |     19 |      4 |     13 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |     10 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        2 |        0 |        2 |       0 |        0 |        1 |        2 |        0 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51016002 |      3 |      0 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51020000 |     75 |     20 |     38 |     0 |    0 |     17 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     35 |     40 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        2 |        0 |        3 |        2 |        0 |       0 |        1 |        1 |        3 |        3 |        0 |        3 |       2 |        4 |        0 |        1 |        6 |        7 |        3 |       0 |        0 |        2 |        1 |        4 |        4 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        0 |        2 |        1 |        0 |        1 |       0 |        3 |        0 |        2 |        5 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      2 |      1 |      2 |     12 |      0 |      0 |      1 |      0 |     11 |      2 |      1 |      5 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      6 |      2 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 51030001 |    339 |     96 |    179 |     6 |    0 |     54 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    174 |    165 |       3 |       6 |       0 |       3 |      2 |      9 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        3 |        3 |        6 |       13 |        7 |        7 |       5 |        3 |        5 |        5 |        7 |       14 |        8 |      10 |        6 |        8 |       22 |       23 |       20 |       12 |       7 |        4 |        6 |       17 |       21 |       17 |        8 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        6 |        4 |        5 |        8 |        4 |       2 |        2 |        6 |        7 |        6 |        8 |        2 |       1 |      0 |      2 |      4 |     16 |      5 |      5 |      3 |     61 |      0 |      0 |      2 |     17 |     30 |      7 |      7 |     16 |    100 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     15 |      6 |      3 |      0 |     32 |      0 |      1 | s03      | R    |
| 51030002 |     69 |     25 |     38 |     0 |    0 |      5 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     35 |     34 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        3 |        2 |        0 |       6 |        0 |        0 |        2 |        1 |        4 |        2 |       2 |        0 |        3 |        3 |        1 |        6 |        4 |       1 |        1 |        1 |        2 |        5 |        6 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       2 |      0 |      0 |      0 |      2 |      1 |      1 |      2 |     19 |      0 |      0 |      0 |      1 |      8 |      4 |      0 |      6 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 51031000 |     13 |      7 |      5 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      8 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51040002 |      5 |      2 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51040003 |     66 |     26 |     28 |     7 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     33 |     33 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        2 |        2 |        3 |       2 |        0 |        0 |        3 |        4 |        3 |        4 |       1 |        0 |        1 |        1 |        4 |        8 |        0 |       1 |        1 |        2 |        1 |        4 |        4 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        5 |        2 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        1 |        1 |       0 |      0 |      0 |      0 |      3 |      1 |      3 |      2 |     17 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      2 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 51041001 |     16 |      5 |      9 |     1 |    0 |      0 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |      6 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        1 |        1 |        1 |        1 |       1 |        0 |        1 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 51041002 |      6 |      1 |      4 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      4 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51042000 |     28 |      8 |     18 |     1 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     18 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        2 |        2 |       0 |        0 |        0 |        2 |        0 |        4 |        1 |       0 |        0 |        2 |        1 |        2 |        4 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      2 |      1 |      1 |      2 |      2 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51050002 |    111 |     40 |     52 |     1 |    0 |     18 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     57 |     54 |       2 |       1 |       0 |       1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        1 |        2 |        2 |        0 |        5 |       3 |        1 |        2 |        6 |        3 |        1 |        7 |       6 |        3 |        3 |        7 |        4 |        6 |        5 |       4 |        0 |        0 |        5 |        5 |        1 |        3 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        3 |        5 |        0 |        1 |       0 |        0 |        0 |        4 |        1 |        3 |        0 |       0 |      0 |      0 |      1 |      4 |      2 |      1 |      1 |     31 |      0 |      0 |      2 |      0 |     14 |      2 |      4 |      1 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      4 |      1 |      0 |      1 |      6 |      0 |      1 | s03      | R    |
| 51050003 |      5 |      3 |      1 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51060001 |     40 |     15 |     20 |     1 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     19 |     21 |       2 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        2 |       1 |        0 |        2 |        0 |        1 |        4 |        1 |       1 |        0 |        1 |        0 |        4 |        2 |        3 |       1 |        0 |        1 |        0 |        1 |        3 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      1 |      3 |      0 |      8 |      0 |      0 |      0 |      0 |      5 |      2 |      2 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      1 | s03      | R    |
| 51060002 |     56 |     24 |     24 |     1 |    0 |      7 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     25 |     31 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        0 |        2 |        1 |        4 |        0 |       3 |        2 |        0 |        1 |        2 |        4 |        2 |       2 |        0 |        0 |        0 |        4 |        2 |        1 |       2 |        0 |        0 |        2 |        3 |        3 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        4 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       1 |      0 |      0 |      1 |      0 |      1 |      1 |      3 |     18 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      3 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      5 |      0 |      1 | s03      | R    |
| 51061000 |     39 |     17 |     16 |     2 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     23 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        2 |        1 |       2 |        0 |        0 |        3 |        2 |        3 |        0 |       2 |        1 |        2 |        2 |        1 |        0 |        0 |       0 |        1 |        4 |        2 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |     12 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      1 | s03      | R    |
| 51073000 |      3 |      0 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 51080000 |     33 |      7 |     18 |     0 |    0 |      4 |    4 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     13 |     20 |       0 |       5 |       0 |       1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        2 |        1 |       0 |        1 |        0 |        3 |        0 |        2 |        2 |       1 |        0 |        0 |        3 |        3 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        2 |        0 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      2 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 51081000 |    133 |     42 |     67 |     2 |    0 |     19 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     63 |     70 |       1 |       1 |       0 |       1 |      1 |      2 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        2 |        5 |        3 |        5 |       1 |        5 |        2 |        4 |        2 |        3 |        3 |       4 |        2 |        3 |        6 |       10 |        6 |        5 |       1 |        1 |        5 |        8 |        4 |        7 |        5 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        5 |        2 |        1 |       0 |        5 |        0 |        1 |        3 |        3 |        1 |       0 |      0 |      0 |      8 |      6 |      1 |      0 |      1 |     26 |      0 |      0 |      2 |      9 |     12 |      2 |      4 |      1 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      2 |      2 |      1 |      0 |      9 |      0 |      1 | s03      | R    |
| 51084000 |    109 |     25 |     57 |     2 |    0 |     21 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |     59 |     50 |       1 |       3 |       0 |       2 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        2 |        2 |        5 |        0 |       0 |        1 |        1 |        2 |        5 |        3 |        0 |       0 |        0 |        1 |        7 |       12 |        4 |        6 |       0 |        3 |        1 |        2 |       10 |        4 |        5 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        3 |        8 |        2 |        0 |       0 |        3 |        0 |        2 |        3 |        2 |        1 |       0 |      0 |      0 |      0 |      5 |      3 |      1 |      1 |     15 |      0 |      0 |      0 |      5 |     13 |      3 |      5 |      2 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |      3 |      0 |      1 |      3 |     10 |      0 |      1 | s03      | R    |
| 51090000 |     19 |     10 |      5 |     2 |    0 |      1 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |      8 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        1 |        3 |       0 |        0 |        1 |        0 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      1 | s03      | R    |
| 51093000 |      8 |      2 |      4 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      5 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 52000000 |    289 |    136 |     95 |    11 |    0 |     44 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    143 |    146 |       5 |       4 |       0 |       2 |      5 |      6 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      0 |      0 |      0 |        2 |       10 |       11 |       14 |        8 |        7 |      14 |        4 |        8 |       19 |       11 |        6 |       11 |      11 |        1 |        4 |       13 |       10 |        3 |        5 |      11 |        0 |        6 |       12 |        9 |        4 |        5 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        6 |        9 |        8 |        2 |        1 |       0 |        5 |        3 |        9 |        4 |        3 |        4 |       0 |      0 |      0 |      5 |     11 |     16 |      3 |      6 |     95 |      0 |      0 |      0 |      7 |     10 |      5 |      2 |      4 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     10 |      2 |      2 |      0 |     31 |      0 |      1 | s03      | R    |
| 52010000 |    382 |    171 |    142 |     7 |    0 |     58 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    180 |    202 |      30 |       7 |       0 |       8 |      5 |      4 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      4 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        6 |        7 |       18 |       13 |       10 |        7 |       9 |        7 |       14 |       13 |       19 |       19 |       10 |      19 |        4 |        7 |       28 |       22 |        5 |        9 |       5 |        2 |       13 |       19 |       10 |        5 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        7 |        8 |        1 |        0 |        3 |       1 |        1 |       10 |       14 |        3 |        3 |        5 |       3 |      0 |      2 |     13 |     16 |     18 |      6 |      4 |    112 |      0 |      0 |      0 |     19 |     23 |     16 |      4 |      9 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |     11 |      6 |      2 |      1 |     40 |      0 |      1 | s03      | R    |
| 52011000 |    771 |    295 |    325 |    14 |    0 |    130 |    4 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    372 |    399 |      25 |      17 |       0 |       3 |     14 |     18 |      0 |      7 |      0 |      2 |      0 |      2 |      4 |      2 |      0 |      0 |      5 |      1 |      0 |      6 |      1 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      6 |      0 |      0 |        6 |       14 |       16 |       39 |       23 |       12 |       0 |       15 |       18 |       34 |       59 |       31 |       27 |       1 |        8 |       24 |       42 |       52 |       27 |       25 |       1 |        8 |       16 |       38 |       32 |       29 |       23 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       13 |       22 |       24 |        3 |        9 |       0 |        4 |       15 |       16 |       23 |        4 |        6 |       0 |      0 |      4 |     33 |     51 |     21 |     14 |     11 |    161 |      0 |      0 |      3 |     29 |     66 |     24 |     18 |     18 |    167 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     27 |     18 |      8 |      2 |      6 |     87 |      0 |      1 | s03      | R    |
| 52012000 |    380 |    142 |    138 |     9 |    0 |     86 |    1 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    160 |    220 |       8 |       3 |       0 |       6 |      4 |      6 |      0 |      4 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      5 |      0 |      2 |      0 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      1 |        1 |        2 |        8 |       13 |        5 |       11 |       1 |        3 |        9 |       23 |       18 |       11 |       35 |       2 |        1 |       12 |       30 |       17 |        3 |        9 |       3 |        1 |        6 |       22 |        9 |        3 |       21 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        8 |       17 |        9 |        6 |        3 |       0 |        5 |        6 |       21 |        9 |        4 |       11 |       0 |      0 |      0 |     26 |     37 |     14 |      0 |      5 |     60 |      0 |      0 |      1 |     22 |     48 |      7 |      1 |      5 |     54 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     24 |      6 |      2 |      4 |     46 |      0 |      1 | s03      | R    |
| 52020000 |    423 |    165 |    161 |     7 |    0 |     86 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    192 |    231 |      13 |       4 |       0 |       9 |      6 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      5 |      0 |      1 |      3 |      1 |      0 |      2 |       0 |       0 |       0 |       2 |      1 |      2 |      0 |      0 |        6 |        6 |        8 |       19 |       11 |        8 |       7 |        7 |       16 |       16 |       24 |       16 |       10 |      11 |        2 |       16 |       15 |       21 |       13 |       12 |       5 |        7 |        7 |       19 |       20 |        5 |       13 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       13 |       12 |       10 |        6 |        0 |       0 |        7 |       17 |       14 |       13 |        3 |        0 |       0 |      0 |      0 |     11 |     22 |      8 |     13 |     11 |    100 |      0 |      0 |      1 |     18 |     22 |     20 |      6 |      8 |     86 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      9 |     13 |      5 |      3 |      5 |     60 |      0 |      1 | s03      | R    |
| 52021000 |    899 |    315 |    410 |    13 |    0 |    149 |    5 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    440 |    459 |      13 |      20 |       0 |      13 |     17 |     14 |      0 |      8 |      3 |      2 |      0 |      1 |      3 |      3 |      0 |      4 |      9 |     14 |      0 |      7 |      0 |      2 |      0 |      5 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        7 |       15 |       27 |       31 |       36 |       15 |      11 |       13 |       20 |       36 |       41 |       39 |       13 |      11 |       12 |       22 |       54 |       52 |       39 |       19 |      11 |       12 |       17 |       58 |       50 |       39 |       14 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       14 |       28 |       21 |        9 |        3 |       2 |       15 |       11 |       22 |       20 |       14 |        2 |       1 |      0 |      5 |     28 |     44 |     23 |     17 |     12 |    186 |      0 |      0 |      2 |     41 |     73 |     43 |     28 |     20 |    203 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     27 |     32 |     12 |      4 |      5 |     93 |      0 |      1 | s03      | R    |
| 52022001 |    767 |    208 |    388 |     6 |    0 |    156 |    6 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    379 |    388 |      11 |       5 |       0 |       5 |     19 |     22 |      0 |      3 |      2 |      1 |      0 |      1 |      2 |      2 |      0 |      3 |     11 |     16 |      0 |     13 |      2 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        8 |        9 |       15 |       28 |       22 |        5 |       3 |        6 |        6 |       29 |       54 |       17 |        3 |       3 |       11 |        4 |       45 |       82 |       46 |       13 |       2 |       18 |        7 |       40 |       76 |       31 |       11 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |        6 |       18 |       27 |       19 |        2 |       0 |       17 |        6 |       21 |       27 |       13 |        1 |       0 |      0 |      4 |     26 |     40 |     29 |     15 |     14 |     80 |      0 |      0 |      1 |     50 |     96 |     58 |     37 |     34 |    112 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     24 |     28 |     16 |      6 |      7 |     87 |      0 |      1 | s03      | R    |
| 52022002 |    221 |     73 |     94 |     8 |    0 |     46 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    111 |    110 |       2 |       2 |       0 |       1 |      4 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        3 |        0 |        7 |       10 |        3 |        2 |       1 |        4 |        1 |       11 |       19 |        9 |        2 |       1 |        3 |        0 |       11 |       24 |        6 |        6 |       1 |        6 |        1 |       10 |       18 |        5 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        2 |        9 |       10 |        7 |        1 |       0 |        3 |        0 |        8 |        8 |        1 |        0 |       0 |      0 |      2 |     11 |     14 |      6 |      3 |      4 |     33 |      0 |      0 |      2 |      3 |     28 |     17 |      3 |     11 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      9 |      5 |      6 |      4 |      5 |     23 |      0 |      1 | s03      | R    |
| 52023000 |    728 |    283 |    309 |     9 |    0 |    120 |    5 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    303 |    425 |      19 |      16 |       0 |       4 |      9 |     12 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      3 |      7 |      6 |      0 |     13 |      4 |      0 |      0 |      1 |       0 |       5 |       0 |       4 |      1 |      3 |      0 |      1 |        0 |        5 |       16 |       15 |       11 |       43 |       6 |        8 |       10 |       33 |       18 |       27 |       81 |      10 |        1 |       11 |       34 |       22 |       17 |       56 |       3 |        4 |       10 |       22 |       20 |       19 |       85 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        6 |       14 |       16 |        7 |       13 |       1 |       10 |        5 |       15 |        9 |       10 |       22 |       2 |      0 |      4 |     27 |     62 |     22 |      8 |     13 |    147 |      0 |      0 |      0 |     31 |     82 |     24 |      8 |     25 |    139 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     13 |     21 |      8 |      6 |     11 |     73 |      0 |      1 | s03      | R    |
| 52024000 |    878 |    205 |    466 |    15 |    0 |    187 |    2 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    438 |    440 |       6 |      15 |       0 |       6 |     14 |     41 |      0 |     12 |      0 |      3 |      0 |      3 |      0 |      2 |      0 |      0 |     13 |      8 |      0 |     18 |      2 |      3 |      0 |     11 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      2 |       11 |        3 |       18 |       44 |       13 |        4 |       2 |        5 |        4 |       26 |       58 |       14 |        2 |       1 |       11 |        7 |       72 |      109 |       41 |       10 |       0 |       11 |        8 |       82 |       80 |       30 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |        5 |       22 |       38 |       12 |        2 |       0 |       15 |       13 |       35 |       34 |       15 |        2 |       0 |      0 |      4 |     48 |     34 |      6 |     10 |      3 |    100 |      0 |      0 |     11 |     98 |     97 |     13 |     14 |      7 |    226 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     45 |     27 |      6 |      2 |      0 |    126 |      0 |      1 | s03      | R    |
| 52025000 |    273 |     73 |    148 |     2 |    0 |     47 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    136 |    137 |       2 |       2 |       0 |       0 |      8 |      9 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      8 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        2 |        1 |        9 |       10 |        7 |        0 |       0 |        4 |        2 |       15 |       18 |        3 |        2 |       0 |        3 |        4 |       28 |       36 |        9 |        2 |       0 |        3 |        0 |       31 |       17 |       11 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        9 |        8 |        5 |        1 |       0 |        2 |        1 |       13 |       10 |        1 |        0 |       0 |      0 |      0 |     11 |     21 |      2 |      0 |      2 |     37 |      0 |      0 |      2 |     14 |     47 |      3 |      5 |      2 |     75 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |     11 |      3 |      0 |      0 |     31 |      0 |      1 | s03      | R    |
| 52030001 |     28 |     12 |     13 |     1 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     19 |      9 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        1 |        1 |        2 |       1 |        1 |        0 |        0 |        2 |        1 |        1 |       0 |        3 |        1 |        0 |        2 |        2 |        1 |       1 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 | s03      | R    |
| 52030002 |    544 |    248 |    175 |    18 |    0 |     99 |    2 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    312 |      25 |       8 |       0 |      11 |      8 |      6 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |       1 |       1 |       0 |       1 |      6 |      2 |      0 |      1 |        5 |       12 |       19 |       13 |       11 |       18 |       8 |        8 |       30 |       30 |       36 |       18 |       28 |      12 |        4 |       24 |       26 |       16 |        8 |       11 |       4 |        2 |       21 |       19 |       11 |        7 |       14 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       15 |       12 |       12 |        6 |        5 |       0 |       13 |       15 |       13 |       19 |        4 |        3 |       1 |      0 |      1 |     19 |     49 |     13 |     11 |     12 |    143 |      0 |      0 |      3 |     17 |     28 |     15 |      3 |      9 |    100 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     19 |      5 |      2 |      3 |     71 |      0 |      1 | s03      | R    |
| 52031001 |    418 |    169 |    179 |     9 |    0 |     54 |    2 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    201 |    217 |      14 |       2 |       0 |       2 |     10 |     12 |      0 |      7 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        5 |        8 |       10 |       20 |       11 |        8 |       6 |        6 |       12 |       20 |       27 |       12 |       11 |      13 |        4 |        9 |       24 |       16 |       10 |       11 |      16 |        4 |        6 |       23 |       13 |       16 |       10 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        7 |       11 |       12 |        8 |        2 |       1 |        1 |        4 |        7 |        7 |        5 |        3 |       0 |      0 |      0 |     11 |     34 |     16 |      5 |      5 |     98 |      0 |      0 |      2 |     17 |     35 |     12 |      9 |      4 |    100 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     12 |      4 |      5 |      0 |     39 |      0 |      1 | s03      | R    |
| 52031002 |    217 |     82 |     88 |     3 |    0 |     42 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     95 |    122 |       6 |       3 |       0 |       3 |      2 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        5 |        3 |        7 |        6 |        9 |       4 |        3 |        2 |        6 |        7 |        8 |       18 |       4 |        2 |        1 |        7 |        8 |        8 |        8 |       8 |        0 |        5 |        6 |        5 |        7 |       14 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        6 |        4 |        8 |        0 |        0 |       0 |        4 |        5 |        7 |        4 |        3 |        4 |       1 |      0 |      1 |      6 |      9 |      8 |      6 |      4 |     48 |      0 |      0 |      0 |      7 |     13 |      2 |      4 |      4 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      2 |      3 |      1 |      1 |     30 |      0 |      1 | s03      | R    |
| 52032000 |    785 |    315 |    293 |    16 |    0 |    153 |    4 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    367 |    418 |      24 |       8 |       0 |       6 |     19 |     13 |      0 |      5 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |      7 |      5 |      0 |     18 |      2 |      1 |      0 |      4 |       0 |       0 |       0 |       0 |      5 |      3 |      0 |      1 |        9 |       27 |       25 |       26 |       23 |       13 |      11 |        5 |       16 |       49 |       57 |       23 |       15 |      16 |        5 |       25 |       39 |       35 |       19 |       10 |      11 |        6 |       29 |       30 |       35 |       23 |       11 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       18 |       28 |       19 |        6 |        4 |       3 |       15 |       22 |       24 |       19 |        6 |        1 |       1 |      0 |      2 |     29 |     68 |     31 |      8 |     12 |    165 |      0 |      0 |      5 |     20 |     60 |     25 |     13 |     12 |    158 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     24 |      8 |      7 |      4 |    114 |      0 |      1 | s03      | R    |
| 52040000 |    640 |    276 |    250 |    14 |    0 |     91 |    5 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    323 |    317 |      18 |       6 |       0 |       6 |      9 |      5 |      0 |      4 |      0 |      1 |      0 |      3 |      6 |      3 |      0 |      2 |      5 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        6 |       14 |       28 |       33 |       25 |       13 |      12 |        7 |       16 |       35 |       45 |       19 |        9 |      14 |        5 |       18 |       29 |       31 |       21 |       18 |      10 |        6 |        9 |       25 |       34 |       16 |       14 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       18 |       11 |       13 |        6 |        5 |       1 |        8 |       10 |       14 |       10 |        8 |        2 |       2 |      0 |      2 |     35 |     35 |     24 |     16 |     18 |    146 |      0 |      0 |      5 |     19 |     42 |     23 |     13 |     13 |    135 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     18 |      6 |      3 |      2 |     68 |      0 |      1 | s03      | R    |
| 52041000 |    247 |     74 |    112 |     1 |    0 |     60 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    129 |    118 |       7 |       2 |       0 |       1 |      1 |      4 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      5 |      2 |      1 |      0 |      0 |       0 |       1 |       0 |       1 |      1 |      3 |      0 |      3 |        2 |        0 |        4 |       16 |        4 |        1 |       0 |        4 |        0 |       14 |       19 |        5 |        5 |       0 |        6 |        2 |       13 |       32 |       12 |        2 |       0 |        2 |        1 |       15 |       20 |        6 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        1 |        6 |       18 |        2 |        1 |       0 |        5 |        2 |        8 |        8 |        1 |        2 |       0 |      0 |      2 |      5 |     15 |      1 |      5 |      9 |     37 |      0 |      0 |      0 |     14 |     35 |     12 |      9 |     16 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     15 |      5 |      2 |      2 |     32 |      0 |      1 | s03      | R    |
| 52042000 |    464 |    137 |    235 |     7 |    0 |     79 |    1 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    223 |    241 |       4 |       3 |       0 |       3 |     15 |     12 |      0 |      4 |      0 |      1 |      0 |      2 |      0 |      2 |      0 |      0 |      3 |      4 |      0 |      4 |      3 |      3 |      0 |      4 |       0 |       3 |       0 |       2 |      3 |      1 |      0 |      1 |        6 |        3 |        7 |       15 |       10 |        5 |       2 |        9 |        3 |       27 |       22 |       15 |        7 |       6 |        6 |        7 |       33 |       37 |       30 |       12 |       8 |        3 |        7 |       23 |       29 |       20 |       12 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        4 |       14 |       11 |        5 |        3 |       1 |        9 |        7 |       14 |       12 |        5 |        2 |       1 |      0 |      5 |     13 |     22 |      4 |      6 |      7 |     80 |      0 |      0 |      3 |     22 |     23 |     19 |      9 |     12 |    147 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |      7 |      6 |      0 |      4 |     58 |      0 |      1 | s03      | R    |
| 52044000 |     50 |     15 |     21 |     1 |    0 |     13 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     25 |     25 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        3 |        0 |       0 |        0 |        1 |        3 |        3 |        1 |        0 |       0 |        1 |        1 |        4 |        3 |        2 |        1 |       0 |        0 |        0 |        3 |        5 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        2 |        1 |        0 |       0 |        1 |        1 |        1 |        3 |        2 |        0 |       0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      3 |      2 |      2 |      1 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      4 |      1 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 52050001 |    354 |    113 |    173 |     6 |    0 |     53 |    2 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    183 |    171 |       6 |       2 |       0 |       1 |      9 |      3 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      8 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      1 |        0 |        1 |       14 |        9 |       10 |        6 |      10 |        6 |        2 |       13 |       16 |        7 |        8 |      11 |        9 |        3 |       16 |       18 |       26 |       14 |       7 |        1 |        1 |       17 |       25 |       18 |        8 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |       10 |       11 |        6 |        2 |       1 |        6 |        2 |       10 |        4 |        3 |        0 |       3 |      0 |      1 |      7 |     23 |      6 |      4 |      5 |     67 |      0 |      0 |      1 |     14 |     33 |      8 |      8 |      9 |    100 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     13 |      8 |      4 |      2 |     35 |      0 |      1 | s03      | R    |
| 52050002 |    291 |    124 |    116 |     2 |    0 |     46 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    140 |    151 |      10 |      17 |       0 |       1 |      6 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |        4 |       11 |       16 |        6 |        5 |       9 |        2 |        5 |       17 |       16 |        9 |        6 |      15 |        4 |        4 |       15 |       14 |       16 |        7 |       0 |        1 |        3 |       14 |       18 |        7 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        8 |        7 |        5 |        1 |       0 |        1 |        2 |        9 |        7 |        2 |        2 |       2 |      0 |      3 |      8 |     17 |      5 |      9 |      5 |     77 |      0 |      0 |      1 |     10 |     15 |     19 |      5 |     10 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     12 |      3 |      3 |      0 |     20 |      0 |      1 | s03      | R    |
| 52050003 |     48 |     18 |     18 |     1 |    0 |     10 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     24 |     24 |       0 |       0 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        4 |        0 |       3 |        0 |        1 |        1 |        5 |        2 |        0 |       1 |        2 |        0 |        2 |        2 |        1 |        0 |       1 |        1 |        1 |        2 |        2 |        1 |        0 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        1 |        2 |        0 |        1 |       0 |        1 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      1 |      3 |     10 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      2 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      2 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 52051000 |    427 |    128 |    231 |     3 |    0 |     63 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    194 |    233 |      10 |       7 |       0 |       2 |      5 |      6 |      0 |      5 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      5 |      8 |      0 |      9 |      4 |      1 |      0 |      2 |       0 |       2 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        0 |        6 |       25 |       11 |        3 |       1 |        6 |        5 |       14 |       41 |        9 |        4 |       1 |        2 |        4 |       22 |       52 |       26 |        7 |       0 |        9 |       13 |       25 |       46 |       16 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |       10 |       11 |        6 |        1 |       0 |        9 |        4 |       11 |        7 |        1 |        3 |       0 |      0 |      0 |      9 |     22 |     16 |     10 |     15 |     56 |      0 |      0 |      2 |     23 |     56 |     22 |     28 |     21 |     79 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     16 |      5 |      0 |      3 |     37 |      0 |      1 | s03      | R    |
| 52060001 |    594 |    223 |    209 |    18 |    0 |    131 |    3 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    275 |    319 |      23 |      15 |       0 |      14 |     12 |      7 |      0 |      6 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      4 |      0 |      5 |      2 |      0 |      0 |      3 |       0 |       0 |       0 |       1 |      2 |      3 |      0 |      0 |        7 |       15 |       28 |       13 |       13 |       10 |       3 |       11 |       33 |       28 |       31 |       16 |       11 |       4 |        3 |       25 |       32 |       21 |       14 |       11 |       0 |       10 |       33 |       21 |       19 |        9 |        9 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       27 |       25 |       12 |        4 |        5 |       0 |        8 |       27 |       23 |       14 |        4 |        5 |       1 |      0 |      0 |     22 |     34 |     11 |      5 |     13 |    138 |      0 |      0 |      0 |     24 |     33 |      9 |      8 |      8 |    127 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     20 |     29 |      4 |      3 |      2 |    100 |      0 |      1 | s03      | R    |
| 52060002 |    479 |    239 |    147 |     7 |    0 |     77 |    4 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    167 |    312 |      17 |       8 |       0 |       6 |     12 |      7 |      0 |      7 |      1 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      5 |     12 |      0 |     15 |      9 |      1 |      0 |      5 |       0 |       0 |       0 |       0 |      6 |      0 |      0 |      3 |        4 |        7 |       13 |       11 |        4 |       33 |       4 |        2 |       16 |       27 |       11 |        7 |       98 |       2 |        2 |       11 |       18 |        8 |        4 |       15 |       0 |        1 |        9 |       20 |        6 |        3 |       50 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |       10 |        7 |        7 |        0 |        8 |       0 |        8 |       13 |       16 |        8 |        0 |       15 |       0 |      0 |      0 |     18 |     36 |     13 |     22 |      4 |    146 |      0 |      0 |      1 |     12 |     17 |      6 |      6 |      1 |    104 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |     13 |      4 |      1 |      0 |     68 |      0 |      1 | s03      | R    |
| 52061000 |    332 |    148 |    123 |     4 |    0 |     48 |    5 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    157 |    175 |      12 |       8 |       0 |       4 |      4 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        8 |       12 |       12 |       12 |        7 |        4 |       7 |        3 |       13 |       22 |       15 |       11 |       13 |       9 |        1 |       11 |       24 |       16 |        6 |        8 |       3 |        3 |        6 |       15 |       11 |       11 |        2 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        7 |       11 |        3 |        3 |        1 |       0 |        5 |       10 |       10 |        8 |        2 |        0 |       0 |      0 |      1 |     22 |     14 |     12 |      1 |      3 |     95 |      0 |      0 |      2 |     14 |     28 |     12 |      4 |      8 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      9 |      2 |      0 |      1 |     36 |      0 |      1 | s03      | R    |
| 52063000 |    368 |    146 |    132 |     6 |    0 |     78 |    1 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    162 |    206 |      10 |       5 |       0 |       6 |      9 |     11 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        3 |        5 |       16 |       10 |       11 |        6 |       3 |        3 |       19 |       18 |       18 |       15 |       13 |       6 |        1 |        9 |       16 |       21 |       13 |        1 |       5 |        4 |       10 |       20 |       14 |        6 |        5 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |       15 |        9 |        7 |        1 |       0 |        7 |       12 |        6 |       10 |        9 |        4 |       0 |      0 |      0 |     13 |     34 |     10 |      0 |      0 |     89 |      0 |      0 |      2 |     10 |     24 |      7 |      4 |      2 |     83 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     22 |      2 |      0 |      1 |     52 |      0 |      1 | s03      | R    |
| 52070001 |    341 |     83 |    193 |     4 |    0 |     58 |    0 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    173 |    168 |       5 |      11 |       0 |       2 |      4 |     14 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      3 |      0 |      3 |      4 |      6 |      0 |      5 |       1 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        2 |       15 |        9 |        1 |       2 |        4 |        3 |       10 |       17 |       11 |        3 |       2 |        7 |        7 |       11 |       45 |       27 |       11 |       1 |        3 |        3 |       20 |       35 |       15 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        2 |        3 |       11 |        3 |        6 |       1 |        6 |        6 |        4 |        9 |        5 |        4 |       0 |      0 |      1 |      8 |     16 |      9 |      1 |      9 |     39 |      0 |      0 |      0 |     22 |     60 |     13 |     11 |     18 |     69 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |     15 |      9 |      1 |      3 |     30 |      0 |      1 | s03      | R    |
| 52070002 |    510 |    156 |    246 |     9 |    0 |     94 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    240 |    270 |       9 |       9 |       0 |       4 |     12 |     11 |      0 |      4 |      0 |      2 |      0 |      1 |      1 |      2 |      0 |      0 |      4 |      4 |      0 |      4 |      3 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      4 |        4 |       10 |        9 |        7 |       10 |       16 |       1 |        6 |       15 |       16 |       28 |       17 |       15 |       2 |        8 |       25 |       16 |       24 |       34 |       24 |       1 |        3 |       14 |       22 |       27 |       25 |       23 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       15 |       12 |       12 |        8 |        2 |       0 |        7 |       10 |        9 |       15 |       13 |        3 |       0 |      0 |      2 |     14 |     32 |     15 |      7 |      8 |     78 |      0 |      0 |      2 |     18 |     66 |     28 |     10 |     10 |    112 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |     27 |      8 |      2 |      5 |     54 |      0 |      1 | s03      | R    |
| 52071001 |    484 |    121 |    267 |     9 |    0 |     83 |    3 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    235 |    249 |      15 |       8 |       0 |       6 |      5 |     12 |      0 |      6 |      1 |      1 |      0 |      2 |      0 |      5 |      0 |      1 |      4 |     11 |      0 |     10 |      6 |      1 |      0 |      3 |       0 |       1 |       0 |       3 |      1 |      1 |      0 |      2 |        4 |        5 |        8 |       18 |        7 |        4 |       0 |        2 |        7 |       22 |       35 |        6 |        3 |       0 |       10 |        3 |       39 |       59 |       24 |        3 |       0 |       10 |        8 |       50 |       44 |       12 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        2 |       16 |       18 |        9 |        2 |       0 |       10 |        0 |       10 |       22 |        1 |        2 |       0 |      0 |      1 |     15 |     31 |      9 |      3 |      6 |     56 |      0 |      0 |      3 |     52 |     55 |     25 |     12 |     18 |    102 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     20 |     18 |      6 |      2 |      1 |     45 |      0 |      1 | s03      | R    |
| 52071002 |    149 |     54 |     66 |     0 |    0 |     29 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     78 |     71 |       6 |       2 |       0 |       0 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      1 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      1 |      2 |      0 |      1 |        2 |        2 |        9 |        8 |        2 |        1 |       0 |        2 |        6 |        9 |       11 |        1 |        1 |       0 |        2 |        4 |       14 |       14 |        2 |        1 |       0 |        2 |        3 |       13 |        9 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        2 |        7 |        3 |        0 |        1 |       1 |        2 |        2 |        4 |        2 |        1 |        0 |       1 |      0 |      1 |      9 |     19 |      0 |      0 |      1 |     24 |      0 |      0 |      0 |      4 |     38 |      0 |      1 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      9 |      0 |      0 |      0 |     13 |      0 |      1 | s03      | R    |
| 52072000 |     77 |     20 |     38 |     0 |    0 |     18 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     37 |     40 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      3 |      0 |      1 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        5 |        0 |        1 |       0 |        2 |        0 |        4 |        3 |        1 |        2 |       0 |        1 |        0 |        6 |        8 |        3 |        2 |       0 |        1 |        0 |        5 |        5 |        2 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        3 |        3 |        1 |        1 |       0 |        0 |        2 |        4 |        3 |        0 |        1 |       0 |      0 |      0 |      4 |      2 |      2 |      1 |      0 |     11 |      0 |      0 |      1 |     12 |      4 |      2 |      1 |      2 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |     12 |      0 |      1 | s03      | R    |
| 52074000 |      7 |      4 |      3 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 52081000 |    642 |    266 |    267 |    11 |    0 |     92 |    3 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    307 |    335 |      31 |      20 |       0 |       6 |      7 |      7 |      0 |      3 |      0 |      3 |      0 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      6 |      6 |      1 |      0 |      1 |       0 |       1 |       0 |       0 |      2 |      1 |      0 |      0 |       10 |       20 |       25 |       26 |       13 |        6 |      13 |        7 |       24 |       45 |       25 |       24 |       10 |      18 |        6 |       26 |       34 |       23 |       22 |       12 |      12 |        7 |       26 |       31 |       27 |       19 |        9 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        9 |       14 |       16 |        6 |        3 |       1 |        5 |        8 |       10 |       12 |        9 |        3 |       3 |      0 |      0 |     25 |     44 |     25 |      7 |     15 |    150 |      0 |      0 |      1 |     27 |     44 |     20 |      6 |     16 |    153 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      9 |     20 |      7 |      2 |      4 |     64 |      0 |      1 | s03      | R    |
| 52082000 |    527 |    240 |    166 |    11 |    0 |    104 |    3 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    250 |    277 |      22 |      11 |       0 |       9 |     12 |      5 |      0 |      2 |      2 |      1 |      0 |      5 |      4 |      3 |      0 |      1 |      3 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       3 |      3 |      9 |      0 |      1 |        6 |       11 |       18 |       24 |       13 |        9 |      21 |        7 |       16 |       35 |       32 |       23 |       13 |      12 |        6 |       12 |       26 |       20 |       11 |        6 |       7 |        3 |       13 |       21 |       19 |       11 |        4 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       16 |       14 |       16 |        8 |        2 |       0 |        9 |       11 |       15 |       11 |        9 |        5 |       1 |      0 |      0 |     20 |     30 |     19 |      4 |     14 |    153 |      0 |      0 |      0 |     19 |     28 |     12 |      6 |     12 |     89 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |     15 |      9 |      4 |      4 |     71 |      0 |      1 | s03      | R    |
| 52083000 |    686 |    315 |    239 |    13 |    0 |    111 |    0 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    345 |    341 |      26 |       7 |       0 |      12 |      9 |      7 |      0 |      6 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      2 |      0 |      4 |      1 |      2 |      0 |      0 |       2 |       0 |       0 |       1 |     16 |      4 |      0 |      6 |       16 |       15 |       25 |       25 |       32 |        5 |      25 |        9 |       26 |       32 |       45 |       30 |        8 |      22 |       10 |       17 |       29 |       36 |       21 |        8 |       5 |        7 |       14 |       38 |       29 |       13 |        5 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       13 |       26 |       15 |        9 |        2 |       2 |       12 |        9 |       18 |        9 |        5 |        1 |       2 |      0 |      1 |     25 |     42 |     22 |      8 |     18 |    199 |      0 |      0 |      3 |     18 |     42 |     15 |     12 |     19 |    130 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     23 |     26 |      8 |      2 |      4 |     68 |      0 |      1 | s03      | R    |
| 52084000 |    442 |    135 |    215 |     9 |    0 |     82 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    221 |    221 |       6 |       6 |       0 |       6 |     10 |      9 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      3 |      2 |      1 |      0 |      2 |       0 |       2 |       0 |       0 |      2 |      4 |      0 |      0 |        3 |        2 |       14 |       18 |       14 |        5 |       1 |        5 |        2 |       24 |       32 |        5 |        9 |       1 |        8 |        5 |       29 |       42 |       19 |        9 |       1 |       11 |        3 |       28 |       41 |       11 |        7 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        4 |       13 |       17 |        7 |        1 |       0 |        7 |        7 |       14 |        7 |        6 |        0 |       0 |      0 |      1 |     16 |     21 |     13 |      8 |      6 |     70 |      0 |      0 |      0 |     27 |     48 |     22 |     12 |     17 |     89 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |     15 |      7 |      2 |      3 |     46 |      0 |      1 | s03      | R    |
| 52085000 |    647 |    269 |    248 |    12 |    0 |    109 |    0 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    302 |    345 |      21 |      10 |       0 |       3 |     11 |      7 |      0 |      4 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      3 |      7 |      4 |      0 |      7 |      3 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      5 |      0 |      0 |        7 |       15 |       21 |       30 |       17 |        3 |      16 |       12 |       23 |       35 |       44 |       21 |        7 |      18 |        8 |       12 |       36 |       27 |       23 |        3 |      16 |        5 |       20 |       31 |       28 |       20 |        7 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       17 |       20 |       14 |        8 |        0 |       0 |       12 |        8 |       19 |       14 |        5 |        2 |       2 |      0 |      2 |     17 |     52 |     27 |      3 |     15 |    153 |      0 |      0 |      3 |     21 |     59 |     23 |     10 |     16 |    116 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     24 |     12 |      6 |      1 |     65 |      0 |      1 | s03      | R    |
| 52086000 |   1083 |    383 |    366 |    21 |    0 |    304 |    6 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    479 |    604 |      38 |      21 |       0 |      14 |     15 |     13 |      0 |      6 |      2 |      4 |      0 |      8 |      6 |      5 |      0 |      1 |     20 |     15 |      0 |     53 |     12 |      2 |      0 |     13 |       2 |       4 |       0 |       3 |      5 |      3 |      0 |      4 |        8 |       32 |       40 |       29 |       20 |        9 |       1 |       18 |       60 |       67 |       49 |       25 |       23 |       2 |        8 |       41 |       50 |       31 |       25 |       15 |       0 |       13 |       56 |       48 |       43 |       18 |       17 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       46 |       49 |       39 |       14 |        2 |       1 |       15 |       38 |       69 |       23 |       14 |        5 |       0 |      0 |      6 |     59 |     74 |      6 |      3 |      1 |    234 |      0 |      0 |      4 |     53 |     61 |      6 |      4 |      7 |    231 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     42 |     31 |      5 |      0 |      0 |    254 |      0 |      1 | s03      | R    |
| 52087001 |    192 |     74 |     76 |     1 |    0 |     40 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     90 |    102 |       2 |       1 |       0 |       1 |      2 |      2 |      0 |      3 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      0 |      0 |      2 |        0 |        5 |        6 |        2 |        5 |        2 |       8 |        2 |        5 |        8 |       12 |       10 |        3 |       6 |        5 |        3 |        8 |       12 |        3 |        7 |       2 |        2 |        4 |       13 |       10 |        4 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        2 |        7 |        5 |        2 |        2 |       0 |        3 |        6 |        2 |        5 |        4 |        0 |       0 |      0 |      2 |      4 |     13 |      7 |      1 |      3 |     44 |      0 |      0 |      0 |      4 |     15 |      5 |      3 |      2 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      8 |      4 |      1 |      0 |     26 |      0 |      1 | s03      | R    |
| 52087002 |      9 |      5 |      1 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      3 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 52110000 |    570 |    246 |    222 |     5 |    0 |     89 |    3 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    272 |    298 |      21 |       7 |       0 |       4 |     14 |      8 |      0 |      5 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      1 |      3 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      4 |        8 |       10 |       15 |       28 |       15 |       13 |      15 |        9 |       11 |       29 |       47 |       19 |        5 |      22 |        2 |       10 |       27 |       26 |       15 |       12 |      20 |        4 |        9 |       29 |       30 |       11 |       12 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        5 |       15 |       10 |       10 |        4 |       1 |        9 |        9 |        9 |        7 |        9 |        2 |       1 |      0 |      3 |     16 |     26 |     21 |      7 |     11 |    162 |      0 |      0 |      0 |     17 |     40 |     21 |     10 |     10 |    124 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     11 |      6 |      1 |      5 |     65 |      0 |      1 | s03      | R    |
| 52111000 |    127 |     46 |     53 |     3 |    0 |     25 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     55 |     72 |       2 |       1 |       0 |       0 |      4 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        2 |        3 |        2 |        3 |       1 |        1 |        3 |        9 |        4 |        5 |        5 |       5 |        0 |        1 |       11 |        5 |        3 |        4 |       2 |        4 |        3 |        9 |        3 |        1 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        2 |        7 |        0 |        1 |       0 |        5 |        1 |        4 |        2 |        0 |        1 |       0 |      0 |      1 |      3 |      6 |      4 |      2 |      3 |     27 |      0 |      0 |      0 |      6 |     13 |      1 |      2 |      1 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |     13 |      2 |      0 |      0 |     10 |      0 |      1 | s03      | R    |
| 52120000 |    762 |    267 |    339 |    14 |    0 |    135 |    3 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    371 |    391 |      30 |      16 |       0 |       9 |     14 |      9 |      0 |      6 |      0 |      1 |      0 |      3 |      4 |      1 |      0 |      4 |      3 |      3 |      0 |      7 |      3 |      3 |      0 |      1 |       0 |       0 |       0 |       1 |      2 |      2 |      0 |      2 |       11 |        6 |       10 |       44 |       21 |       10 |       2 |        6 |       11 |       40 |       54 |       30 |       11 |      11 |       11 |       19 |       39 |       53 |       35 |       28 |       6 |        9 |       15 |       36 |       34 |       31 |       12 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       10 |       24 |       25 |        9 |        4 |       0 |       13 |        9 |       21 |       22 |       10 |        5 |       0 |      0 |      0 |     18 |     45 |     21 |      8 |     18 |    157 |      0 |      0 |      4 |     29 |     61 |     36 |     15 |     25 |    169 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     16 |     27 |     16 |      5 |      6 |     82 |      0 |      1 | s03      | R    |
| 52130000 |    356 |    158 |    139 |     4 |    0 |     50 |    2 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    172 |    184 |      12 |       4 |       0 |       3 |      8 |      7 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      1 |        5 |        2 |       15 |       19 |        8 |       12 |       8 |        4 |        6 |       15 |       22 |       16 |       12 |      14 |        2 |        8 |       18 |       14 |       18 |        8 |       7 |        2 |        4 |       10 |       18 |       13 |        9 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        4 |        6 |        4 |        5 |        3 |       2 |        7 |        2 |       13 |        6 |        3 |        0 |       0 |      0 |      2 |     12 |     37 |      5 |      3 |      6 |     93 |      0 |      0 |      0 |     13 |     22 |     16 |     10 |      6 |     72 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     10 |      1 |      0 |      1 |     36 |      0 |      1 | s03      | R    |
| 52131001 |    395 |    135 |    146 |    10 |    0 |     96 |    3 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    191 |    204 |       9 |       8 |       0 |      10 |      5 |      8 |      0 |      5 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      4 |      0 |      4 |      6 |      0 |      0 |      3 |       2 |       2 |       0 |       0 |      4 |      1 |      0 |      4 |        4 |       18 |       11 |        8 |        9 |        6 |       0 |        5 |       18 |       19 |       17 |       15 |        5 |       0 |        4 |       32 |       15 |       17 |       17 |        5 |       0 |        5 |       13 |       16 |        7 |       12 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       18 |        9 |       11 |        3 |        0 |       0 |       12 |       28 |       13 |        9 |        4 |        3 |       0 |      0 |      2 |     16 |     11 |      8 |      4 |      5 |     89 |      0 |      0 |      0 |     19 |     17 |      3 |      0 |      2 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      7 |      0 |      1 |      4 |     95 |      0 |      1 | s03      | R    |
| 52131002 |      3 |      1 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 52132000 |    449 |    180 |    189 |     4 |    0 |     73 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    190 |    259 |      11 |       5 |       0 |       2 |     12 |      9 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      4 |      1 |      0 |      7 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      1 |        6 |        6 |        9 |        7 |       16 |       14 |       4 |        3 |       17 |       12 |       19 |       36 |       26 |       5 |        3 |        4 |       11 |       20 |       20 |       31 |       1 |        5 |        7 |        9 |       20 |       19 |       33 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        8 |        8 |        4 |        9 |        8 |       0 |        6 |        6 |        7 |       11 |        6 |        6 |       0 |      0 |      3 |     21 |     20 |     15 |      5 |      4 |    112 |      0 |      0 |      1 |     17 |     41 |     17 |     12 |     12 |     89 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     14 |      8 |      4 |      4 |      3 |     45 |      0 |      1 | s03      | R    |
| 52140000 |    452 |    156 |    197 |    10 |    0 |     88 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    223 |    229 |      15 |       7 |       0 |       4 |     10 |     10 |      0 |      4 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      6 |      0 |      0 |     15 |      2 |      0 |      0 |      2 |       0 |       0 |       0 |       0 |      6 |      1 |      0 |      3 |       10 |        1 |       10 |       16 |       15 |        3 |       9 |        7 |        9 |       18 |       29 |        9 |        7 |      13 |        7 |        4 |       28 |       34 |       17 |       11 |       5 |        2 |        6 |       23 |       26 |       18 |        8 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        8 |       10 |       19 |        3 |        4 |       1 |       13 |        4 |       15 |       11 |        2 |        1 |       0 |      0 |      1 |     10 |     25 |     10 |      7 |     16 |     87 |      0 |      0 |      0 |     18 |     48 |     16 |     12 |     26 |     77 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     28 |     10 |      0 |      4 |     43 |      0 |      1 | s03      | R    |
| 52141000 |    337 |    119 |    158 |     8 |    0 |     49 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    167 |    170 |       5 |       8 |       0 |       4 |      7 |      6 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        1 |        2 |        6 |       15 |       11 |       10 |       9 |        0 |        8 |        9 |       11 |       15 |       11 |      11 |        4 |        6 |       15 |       15 |       15 |       13 |      10 |        0 |        3 |       14 |       13 |       18 |       20 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |       10 |        7 |        4 |        2 |       2 |        3 |        5 |        6 |        6 |        5 |        0 |       0 |      0 |      2 |     16 |     17 |      4 |      2 |      6 |     72 |      0 |      0 |      1 |     17 |     26 |      6 |      6 |     17 |     85 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      9 |     10 |      4 |      3 |      1 |     31 |      0 |      1 | s03      | R    |
| 52150000 |    474 |    171 |    181 |    10 |    0 |    106 |    4 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    227 |    247 |      15 |      10 |       0 |       5 |      6 |      9 |      0 |      8 |      1 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |     12 |     15 |      0 |     11 |      7 |      4 |      0 |      3 |       2 |       4 |       0 |       3 |      7 |      3 |      0 |      0 |        3 |       11 |       16 |       15 |       10 |        3 |       0 |        4 |       20 |       35 |       31 |       12 |       10 |       1 |        3 |       16 |       27 |       26 |       15 |       11 |       1 |        4 |       18 |       29 |       12 |       11 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       18 |       24 |       17 |        6 |        1 |       0 |        4 |       11 |       21 |        6 |        9 |        1 |       0 |      0 |      4 |     21 |     21 |     16 |      5 |      4 |    100 |      0 |      0 |      3 |     26 |     29 |      9 |      6 |      2 |    106 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     17 |      8 |      1 |      0 |     81 |      0 |      1 | s03      | R    |
| 52151000 |    173 |     53 |     59 |     4 |    0 |     55 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     80 |     93 |       1 |       0 |       0 |       5 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      6 |      2 |      0 |      7 |      7 |      0 |      0 |      5 |       1 |       0 |       0 |       1 |      0 |      2 |      0 |      1 |        2 |        0 |        6 |       10 |        4 |        0 |       1 |        1 |        3 |        7 |       15 |        3 |        1 |       0 |        3 |        0 |        6 |       10 |        8 |        3 |       0 |        1 |        2 |        8 |        8 |        6 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        6 |       10 |        4 |        2 |       0 |        4 |        4 |       13 |        9 |        3 |        1 |       0 |      0 |      0 |     13 |      6 |      1 |      1 |      3 |     29 |      0 |      0 |      0 |     12 |     12 |      2 |      1 |      4 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |      6 |      0 |      1 |      1 |     39 |      0 |      1 | s03      | R    |
| 52160000 |     10 |      0 |      8 |     1 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 52170000 |      6 |      3 |      2 |     1 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 52200000 |    606 |    260 |    166 |    16 |    0 |    145 |   13 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    270 |    336 |      36 |      10 |       0 |      17 |      9 |      5 |      0 |      7 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      5 |      0 |      5 |      3 |      1 |      0 |      2 |       0 |       1 |       0 |       0 |      7 |      0 |      0 |      1 |        5 |       30 |       21 |       20 |        9 |        4 |       0 |       20 |       47 |       35 |       29 |       21 |       15 |       4 |        7 |       25 |       24 |       19 |        5 |        2 |       0 |        4 |       28 |       15 |       19 |        9 |        8 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       38 |       27 |       15 |        6 |        3 |       0 |       19 |       31 |       15 |        9 |        4 |        2 |       1 |      0 |      0 |     29 |     26 |     17 |      9 |      8 |    171 |      0 |      0 |      0 |     17 |     28 |      5 |      3 |      6 |    107 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     24 |      4 |      6 |      2 |    121 |      0 |      1 | s03      | R    |
| 52201000 |    791 |    335 |    296 |    20 |    0 |    130 |    1 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    370 |    421 |      23 |      15 |       0 |       8 |     14 |      7 |      0 |      4 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      2 |      3 |      4 |      0 |      5 |      4 |      1 |      0 |      2 |       1 |       0 |       0 |       0 |      5 |      9 |      0 |      8 |        8 |       20 |       35 |       23 |       22 |       14 |      10 |       15 |       38 |       46 |       40 |       36 |       11 |      17 |       12 |       16 |       47 |       38 |       24 |       12 |       8 |       13 |       13 |       40 |       27 |       29 |        5 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       18 |       25 |       13 |       10 |        3 |       1 |       10 |       20 |       26 |       13 |        7 |        2 |       1 |      0 |      4 |     38 |     55 |     24 |     12 |     24 |    178 |      0 |      0 |      3 |     29 |     50 |     27 |      6 |     18 |    163 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     27 |     23 |     14 |      1 |      6 |     88 |      0 |      1 | s03      | R    |
| 52202000 |    847 |    312 |    342 |    19 |    0 |    164 |    3 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    439 |    408 |      27 |      25 |       0 |       9 |      8 |     13 |      0 |      8 |      2 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |     16 |     16 |      0 |     20 |      5 |      0 |      0 |      3 |       0 |       2 |       0 |       1 |      9 |      3 |      0 |      5 |       19 |       13 |       20 |       55 |       21 |        9 |       0 |       24 |       17 |       34 |       68 |       26 |        4 |       2 |       14 |        9 |       40 |       76 |       40 |       11 |       1 |       14 |       10 |       31 |       55 |       28 |       11 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       22 |       15 |       25 |       30 |       16 |        3 |       0 |       16 |        9 |       25 |       23 |        7 |        1 |       1 |      0 |      2 |     36 |     49 |     18 |     11 |     24 |    172 |      0 |      0 |      3 |     33 |     55 |     35 |     19 |     34 |    163 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     33 |     35 |     17 |      2 |      8 |     97 |      0 |      1 | s03      | R    |
| 52210000 |    703 |    307 |    263 |    12 |    0 |    117 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    344 |    359 |      25 |      11 |       0 |       4 |     13 |     13 |      0 |      8 |      1 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      4 |      6 |      0 |     11 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       2 |      9 |      1 |      0 |      0 |        0 |       19 |       31 |       36 |       21 |       18 |       7 |       11 |       18 |       46 |       48 |       26 |       18 |       8 |        9 |       11 |       42 |       36 |       23 |       10 |       6 |        7 |       13 |       35 |       40 |       20 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |        9 |       20 |       22 |        9 |        2 |       0 |        9 |        9 |       13 |       13 |       10 |        2 |       2 |      0 |      3 |     27 |     67 |     22 |     10 |     25 |    153 |      0 |      0 |      1 |     17 |     52 |     16 |     17 |     13 |    147 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     32 |     19 |      6 |      1 |      5 |     68 |      0 |      1 | s03      | R    |
| 52211000 |    801 |    284 |    381 |     8 |    0 |    120 |    4 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    381 |    420 |       8 |      14 |       0 |       2 |      5 |     16 |      0 |      5 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      1 |      1 |      4 |      0 |      9 |      3 |      1 |      0 |      1 |       0 |       1 |       0 |       0 |      1 |      2 |      0 |      0 |        8 |       15 |       13 |       30 |       34 |       10 |      17 |       13 |       14 |       26 |       40 |       34 |        9 |      21 |       11 |       15 |       35 |       41 |       44 |       25 |      17 |       13 |       18 |       30 |       43 |       40 |       23 |      26 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       11 |       15 |       16 |       12 |        4 |       2 |       17 |        9 |        9 |       23 |        6 |        4 |       2 |      0 |      2 |     23 |     50 |     18 |      9 |     25 |    157 |      0 |      0 |      1 |     29 |     56 |     46 |     15 |     23 |    211 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     13 |     11 |      2 |     10 |     85 |      0 |      1 | s03      | R    |
| 52212000 |    730 |    242 |    334 |    15 |    0 |    135 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    357 |    373 |      17 |       8 |       0 |       6 |      6 |     10 |      0 |      4 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      3 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        6 |        8 |       14 |       29 |       19 |        9 |      19 |       14 |       14 |       28 |       34 |       20 |        9 |      19 |       13 |       15 |       42 |       44 |       32 |       11 |      22 |       10 |        8 |       32 |       41 |       24 |       11 |      29 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       12 |       17 |       13 |       11 |        3 |       2 |       17 |       17 |       17 |       20 |        7 |        1 |       1 |      0 |      1 |     21 |     41 |     17 |      8 |     20 |    134 |      0 |      0 |      0 |     33 |     66 |     19 |     12 |     15 |    189 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     19 |     19 |     14 |      3 |      4 |     91 |      0 |      1 | s03      | R    |
| 52213000 |    707 |    211 |    322 |    13 |    0 |    156 |    2 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    332 |    375 |      16 |      15 |       0 |       5 |     11 |     12 |      0 |      9 |      1 |      5 |      0 |      0 |      0 |      1 |      0 |      1 |     18 |     18 |      0 |     33 |     11 |      4 |      0 |     11 |       0 |       1 |       0 |       0 |      2 |      2 |      0 |      1 |        2 |        7 |       24 |       32 |        7 |        8 |       2 |        7 |       13 |       50 |       29 |       18 |        8 |       4 |        9 |       12 |       62 |       48 |       20 |       14 |       0 |       10 |        8 |       58 |       50 |       14 |       17 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        9 |       30 |       24 |       11 |        4 |       0 |        6 |        9 |       30 |       35 |        5 |        4 |       0 |      0 |      2 |     27 |     59 |     22 |      4 |      3 |     94 |      0 |      0 |      2 |     46 |     88 |     52 |     13 |     11 |    110 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     57 |     11 |      1 |      1 |     76 |      0 |      1 | s03      | R    |
| 52214001 |    594 |    207 |    199 |    21 |    0 |    153 |    3 |    0 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    281 |    313 |      20 |       4 |       0 |       5 |      9 |     11 |      0 |     11 |      2 |      1 |      0 |      0 |      3 |      2 |      0 |      3 |      4 |      4 |      0 |     21 |      4 |      2 |      0 |      7 |       1 |       2 |       0 |       5 |      5 |      5 |      0 |      1 |        6 |       18 |       29 |       13 |       12 |        7 |       0 |        4 |       22 |       31 |       38 |       13 |       14 |       0 |        3 |       16 |       37 |       27 |       12 |        6 |       0 |        1 |       17 |       37 |       23 |       14 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       12 |       23 |       33 |       14 |        1 |       0 |       13 |       19 |       32 |       17 |       10 |        2 |       0 |      0 |      4 |     36 |     51 |      8 |      2 |      5 |    101 |      0 |      0 |      2 |     26 |     58 |     13 |      4 |     10 |     86 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     35 |     32 |     11 |      0 |      4 |    105 |      0 |      1 | s03      | R    |
| 52214002 |     15 |      5 |      8 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |     11 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 52215001 |    515 |    184 |    207 |    13 |    0 |    104 |    4 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    242 |    273 |      22 |       7 |       0 |       4 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |     10 |      6 |      0 |     12 |      1 |      2 |      0 |      0 |       3 |       0 |       0 |       2 |      0 |      0 |      0 |      1 |        6 |        4 |       22 |       20 |       14 |        7 |       0 |        4 |        9 |       35 |       32 |       18 |       11 |       2 |        8 |        3 |       29 |       41 |       15 |        7 |       1 |        5 |        9 |       30 |       38 |       15 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        6 |       18 |       26 |        5 |        2 |       0 |        9 |        8 |       20 |       18 |        2 |        1 |       1 |      0 |      1 |     27 |     24 |     15 |     16 |     22 |     79 |      0 |      0 |      1 |     23 |     46 |     22 |     19 |     23 |     73 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     34 |     18 |      5 |      3 |      4 |     58 |      0 |      1 | s03      | R    |
| 52215002 |    119 |     40 |     43 |     1 |    0 |     34 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     52 |     67 |       3 |       3 |       0 |       0 |      4 |      3 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        1 |        6 |        4 |        0 |        2 |       0 |        0 |        3 |        9 |        8 |        3 |        1 |       0 |        1 |        1 |        8 |        4 |        6 |        2 |       0 |        0 |        1 |        5 |        5 |        5 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        5 |        5 |        1 |        0 |       0 |        3 |        0 |        9 |        7 |        1 |        2 |       0 |      0 |      0 |      7 |      8 |      1 |      2 |      3 |     19 |      0 |      0 |      1 |      5 |     11 |      4 |      3 |      4 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      5 |      1 |      1 |      0 |     20 |      0 |      1 | s03      | R    |
| 52216000 |    271 |     88 |     81 |     5 |    0 |     93 |    3 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    140 |    131 |      11 |       4 |       0 |       2 |      2 |      6 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |     18 |      9 |      0 |     32 |      5 |      0 |      0 |      2 |       0 |       0 |       0 |       1 |      3 |      1 |      0 |      1 |        0 |        8 |       21 |        7 |        5 |        3 |       0 |        3 |        8 |       23 |        7 |        2 |        1 |       0 |        1 |        5 |       26 |        9 |        1 |        0 |       0 |        1 |       10 |       22 |        5 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        6 |       25 |       16 |        3 |        1 |       0 |        4 |        9 |       21 |       11 |        1 |        1 |       1 |      0 |      2 |     20 |      9 |      2 |      0 |      0 |     55 |      0 |      0 |      2 |     18 |      6 |      1 |      5 |      1 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |      2 |      1 |      0 |      0 |     83 |      0 |      1 | s03      | R    |
| 52220000 |    652 |    222 |    322 |    12 |    0 |     92 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    312 |    340 |       7 |       9 |       0 |       4 |     14 |     13 |      0 |      3 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      6 |      5 |      0 |     10 |      0 |      0 |      0 |      1 |       0 |       2 |       0 |       1 |      1 |      0 |      0 |      0 |        8 |        3 |       10 |       37 |       25 |        4 |       4 |       16 |       10 |       22 |       44 |       23 |        9 |       7 |       17 |        7 |       30 |       45 |       39 |       24 |       5 |       20 |       11 |       31 |       41 |       31 |       14 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        5 |       12 |       16 |       13 |        2 |       0 |        9 |        4 |       12 |       16 |       10 |        3 |       0 |      0 |      1 |     24 |     32 |     20 |      9 |     10 |    126 |      0 |      0 |      0 |     26 |     78 |     27 |     12 |     25 |    154 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |     23 |      7 |      1 |      4 |     54 |      0 |      1 | s03      | R    |
| 52240000 |    448 |    167 |    194 |    13 |    0 |     68 |    3 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    210 |    238 |      13 |       7 |       0 |       4 |     11 |      7 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      2 |      0 |      4 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      4 |      2 |      0 |      1 |        5 |        5 |       10 |       21 |       11 |        7 |       7 |        7 |        8 |       22 |       25 |       20 |       10 |       9 |        8 |       10 |       20 |       24 |       24 |        9 |      10 |        9 |       10 |       12 |       28 |       18 |        4 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        5 |        3 |       10 |       10 |        4 |       1 |        4 |        5 |       15 |       11 |        8 |        5 |       0 |      0 |      0 |     10 |     25 |     10 |      6 |     13 |    103 |      0 |      0 |      1 |     15 |     35 |     15 |      9 |     14 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     10 |      6 |      2 |      2 |     51 |      0 |      1 | s03      | R    |
| 52241000 |    181 |     66 |     84 |     2 |    0 |     27 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     88 |     93 |       1 |       1 |       0 |       0 |      2 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        6 |        1 |        9 |        7 |        7 |        1 |       2 |        2 |        0 |       14 |        5 |        8 |        3 |       1 |        1 |        2 |       10 |       11 |       10 |        4 |       2 |        4 |        4 |        7 |       11 |        9 |        3 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        4 |        6 |        2 |        1 |       0 |        4 |        1 |        5 |        4 |        2 |        0 |       0 |      0 |      0 |     13 |     10 |      6 |      2 |      1 |     34 |      0 |      0 |      1 |     14 |     14 |      9 |      7 |      4 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      8 |      3 |      0 |      1 |     15 |      0 |      1 | s03      | R    |
| 52310000 |    440 |    156 |    171 |    13 |    0 |     90 |    7 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    223 |    217 |      19 |      10 |       0 |       6 |      7 |      2 |      0 |      2 |      1 |      6 |      0 |      4 |      1 |      0 |      0 |      5 |     14 |      4 |      0 |     17 |      3 |      1 |      0 |      5 |       2 |       0 |       0 |       0 |      5 |      1 |      0 |      2 |        4 |        9 |       20 |       28 |        6 |        2 |       0 |        5 |        9 |       37 |       26 |        7 |        3 |       0 |        6 |        9 |       31 |       34 |       10 |        3 |       0 |        4 |        6 |       33 |       20 |       11 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       11 |       24 |       16 |        4 |        2 |       0 |        7 |        6 |       24 |       12 |        2 |        1 |       0 |      0 |      2 |     19 |     42 |     19 |      2 |     15 |     57 |      0 |      0 |      2 |     16 |     50 |     17 |      7 |     21 |     58 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     25 |     12 |      0 |      5 |     54 |      0 |      1 | s03      | R    |
| 52311000 |    791 |    310 |    328 |    14 |    0 |    127 |    5 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    384 |    407 |      26 |      16 |       0 |      10 |     16 |     18 |      0 |      9 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      5 |      2 |      0 |      7 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      5 |      7 |      0 |      2 |       12 |       11 |       22 |       30 |       18 |       12 |      15 |       18 |       21 |       42 |       50 |       20 |       19 |      20 |        8 |       16 |       38 |       41 |       34 |       25 |      12 |        5 |       16 |       36 |       35 |       31 |       18 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       15 |       18 |       18 |       10 |        8 |       2 |       10 |        5 |       26 |       12 |        6 |        3 |       1 |      0 |      3 |     32 |     32 |     26 |      6 |     18 |    193 |      0 |      0 |      0 |     16 |     73 |     21 |      9 |     19 |    190 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     21 |     10 |      3 |      4 |     98 |      0 |      1 | s03      | R    |
| 52320001 |    227 |     87 |    101 |     5 |    0 |     32 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    109 |    118 |       6 |       3 |       0 |       3 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      3 |      1 |      0 |      0 |        4 |        3 |        4 |       12 |        4 |        6 |       4 |        6 |        2 |       11 |       12 |        3 |       10 |       6 |        2 |        1 |       11 |       11 |        6 |        9 |      10 |        1 |        1 |        9 |        7 |        7 |       11 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        3 |        6 |        3 |        2 |        2 |       1 |        2 |        4 |        3 |        5 |        1 |        1 |       1 |      0 |      0 |      5 |     15 |      4 |      4 |      3 |     56 |      0 |      0 |      1 |      8 |     19 |      2 |      6 |      3 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      4 |      3 |      3 |      2 |     21 |      0 |      1 | s03      | R    |
| 52320002 |    279 |     89 |    137 |     3 |    0 |     46 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    130 |    149 |       3 |       0 |       0 |       0 |      2 |      7 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        4 |        3 |        2 |       14 |        2 |        8 |       3 |        2 |        4 |        7 |       12 |        8 |        9 |      11 |        4 |        5 |       15 |       17 |        7 |        7 |       9 |        6 |        6 |       19 |       11 |       13 |        7 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        4 |       11 |        5 |        2 |        1 |       2 |        3 |        4 |        5 |        2 |        3 |        3 |       3 |      0 |      0 |      8 |     18 |      6 |      4 |      7 |     46 |      0 |      0 |      1 |     15 |     19 |      9 |      6 |     12 |     75 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     14 |      3 |      1 |      0 |     27 |      0 |      1 | s03      | R    |
| 52330000 |    448 |    175 |    194 |     5 |    0 |     70 |    3 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    224 |    224 |      10 |       1 |       0 |       5 |      7 |      9 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      4 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        8 |       10 |       13 |       13 |       11 |        7 |      17 |        4 |       13 |       16 |       18 |       19 |        9 |      17 |        6 |       11 |       33 |       17 |       15 |       11 |      14 |        3 |        8 |       27 |       11 |       14 |        5 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        7 |       14 |        9 |        3 |        1 |       0 |        4 |        5 |       10 |       14 |        3 |        5 |       0 |      0 |      1 |     13 |     21 |      5 |      4 |      3 |    128 |      0 |      0 |      1 |     19 |     28 |     15 |      5 |     10 |    116 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     12 |      2 |      0 |      3 |     51 |      0 |      1 | s03      | R    |
| 52331000 |    359 |    149 |    152 |     7 |    0 |     46 |    0 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    176 |    183 |      10 |       4 |       0 |       3 |     11 |      7 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        3 |       18 |       13 |        9 |        9 |      10 |        6 |        6 |       21 |       19 |       12 |       10 |      11 |        3 |        7 |       14 |       21 |       12 |       10 |      12 |        5 |        2 |       15 |       13 |       17 |       11 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        5 |        7 |        6 |        3 |        2 |       0 |        8 |        2 |        5 |        6 |        3 |        1 |       0 |      0 |      0 |      7 |     30 |     12 |      5 |      9 |     86 |      0 |      0 |      1 |      8 |     31 |     17 |      5 |      6 |     84 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      9 |      5 |      2 |      4 |     30 |      0 |      1 | s03      | R    |
| 52360001 |     80 |     31 |     38 |     2 |    0 |      9 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     41 |     39 |       2 |       1 |       0 |       1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        1 |        2 |        4 |        3 |        1 |       1 |        1 |        2 |        3 |        4 |        2 |        0 |       6 |        1 |        5 |        3 |        5 |        2 |        1 |       3 |        2 |        1 |        2 |        6 |        4 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        1 |        0 |        0 |        1 |        0 |       1 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      4 |      8 |      4 |      2 |      3 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      9 |      0 |      1 | s03      | R    |
| 52360002 |    660 |    265 |    272 |    10 |    0 |    110 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    299 |    361 |      13 |       7 |       0 |       9 |     19 |     16 |      0 |      9 |      1 |      1 |      0 |      0 |      3 |      2 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      3 |      2 |      0 |      1 |        7 |        7 |       12 |       24 |       19 |       20 |      10 |        7 |       14 |       34 |       33 |       36 |       25 |      17 |        4 |       15 |       32 |       26 |       27 |       22 |      14 |       10 |        8 |       20 |       31 |       26 |       22 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |        9 |        9 |       15 |        9 |        3 |       1 |        5 |       17 |       17 |       13 |        5 |        6 |       0 |      0 |      2 |     26 |     26 |     15 |     16 |     20 |    160 |      0 |      0 |      1 |     25 |     35 |     22 |     15 |     13 |    161 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     19 |      6 |      1 |      1 |     76 |      0 |      1 | s03      | R    |
| 52370000 |    727 |    274 |    276 |    10 |    0 |    162 |    3 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    370 |    357 |      21 |      11 |       0 |       3 |      9 |      4 |      0 |      4 |      1 |      2 |      0 |      2 |      1 |      0 |      0 |      1 |      6 |     19 |      0 |     33 |     17 |      1 |      0 |     10 |       0 |       2 |       0 |       1 |      4 |      1 |      0 |      2 |       17 |        3 |       21 |       48 |       20 |        9 |       1 |       16 |       11 |       39 |       53 |       26 |        9 |       1 |        8 |       12 |       49 |       55 |       24 |        4 |       1 |        6 |       15 |       45 |       44 |        9 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       11 |       26 |       36 |        5 |        5 |       0 |       12 |       10 |       21 |       27 |        5 |        3 |       1 |      0 |      2 |     25 |     42 |     27 |     19 |     21 |    138 |      0 |      0 |      6 |     25 |     56 |     36 |      7 |     29 |    117 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     37 |     14 |      8 |      5 |     93 |      0 |      1 | s03      | R    |
| 52371000 |    687 |    218 |    300 |    11 |    0 |    152 |    2 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    344 |    343 |      15 |       4 |       0 |      10 |     10 |     17 |      0 |      6 |      0 |      0 |      0 |      2 |      7 |      2 |      0 |      5 |     12 |     11 |      0 |     25 |     13 |      4 |      0 |      4 |       2 |       5 |       0 |       2 |      2 |      3 |      0 |      3 |        7 |        4 |       18 |       35 |       22 |        2 |       1 |        6 |       12 |       38 |       48 |       15 |        8 |       2 |       14 |       10 |       39 |       76 |       23 |        9 |       1 |        7 |        7 |       36 |       60 |       10 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       10 |       20 |       28 |       10 |        1 |       0 |       15 |       15 |       22 |       27 |        5 |        2 |       0 |      0 |      4 |     22 |     50 |     18 |      9 |     12 |    103 |      0 |      0 |      0 |     33 |     59 |     34 |     15 |     28 |    131 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     24 |     27 |     13 |      4 |      7 |     93 |      0 |      1 | s03      | R    |
| 52372000 |    754 |    268 |    335 |    12 |    0 |    134 |    2 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    365 |    389 |      25 |      13 |       0 |       7 |     10 |     18 |      0 |      7 |      3 |      1 |      0 |      2 |      9 |      4 |      0 |      3 |      6 |      7 |      0 |      6 |      5 |      0 |      0 |      8 |       1 |       0 |       0 |       0 |      4 |      2 |      0 |      3 |       10 |        5 |       20 |       36 |       26 |        4 |      10 |        9 |       18 |       33 |       43 |       31 |       13 |      10 |       15 |       11 |       37 |       54 |       41 |       11 |       9 |       13 |       11 |       40 |       41 |       34 |        7 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        6 |       23 |       22 |       11 |        3 |       0 |       14 |        7 |       24 |       21 |        8 |        1 |       0 |      0 |      0 |     28 |     38 |     22 |     12 |     10 |    158 |      0 |      0 |      2 |     27 |     70 |     26 |     16 |     24 |    170 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     24 |     14 |      7 |      6 |     81 |      0 |      1 | s03      | R    |
| 52380000 |    787 |    300 |    333 |    21 |    0 |    124 |    3 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    370 |    417 |      13 |      17 |       0 |       4 |      8 |     18 |      0 |      9 |      0 |      1 |      0 |      2 |      1 |      1 |      0 |      1 |      6 |      2 |      0 |      7 |      0 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        6 |       18 |       23 |       23 |       22 |       23 |      16 |       11 |       17 |       33 |       34 |       28 |       28 |      18 |       10 |       14 |       42 |       35 |       26 |       12 |      19 |       12 |        9 |       43 |       38 |       25 |       19 |      29 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       16 |       11 |       22 |       12 |        4 |       2 |       11 |       13 |       16 |       16 |       13 |        2 |       2 |      0 |      0 |     24 |     47 |     19 |      5 |     15 |    190 |      0 |      0 |      2 |     50 |     56 |     31 |     13 |     15 |    166 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     26 |     25 |      4 |      4 |     13 |     78 |      0 |      1 | s03      | R    |
| 53220001 |      1 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 53230000 |     12 |      7 |      3 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      6 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        2 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
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| 53530000 |     58 |     17 |     21 |     2 |    0 |     17 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     27 |     31 |       2 |       2 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        6 |        1 |        2 |       0 |        1 |        1 |        2 |        6 |        0 |        0 |       1 |        3 |        2 |        1 |        1 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        2 |        0 |        2 |        0 |       0 |        3 |        3 |        4 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      3 |     10 |      0 |      1 | s03      | R    |
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| 53550000 |      8 |      2 |      5 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      5 |       1 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 54010000 |    762 |    272 |    299 |    10 |    0 |    161 |   11 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    380 |    382 |      23 |      10 |       0 |      11 |      9 |     14 |      0 |      9 |      1 |      1 |      0 |      4 |      2 |      1 |      0 |      2 |     10 |      7 |      0 |      7 |      4 |      3 |      0 |      2 |       2 |       3 |       0 |       4 |      4 |      8 |      0 |      6 |       12 |       11 |       17 |       42 |       19 |        8 |       0 |       10 |       18 |       35 |       59 |       26 |       15 |       0 |       14 |       11 |       33 |       53 |       35 |       17 |       0 |        8 |        6 |       35 |       48 |       24 |       15 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |       14 |       18 |       29 |       18 |        6 |       0 |       18 |        8 |       18 |       20 |       14 |        5 |       0 |      0 |      3 |     32 |     49 |     26 |     15 |     22 |    125 |      0 |      0 |      0 |     23 |     55 |     37 |     18 |     31 |    135 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     25 |     32 |     13 |      5 |      9 |    107 |      0 |      1 | s03      | R    |
| 54020000 |    731 |    308 |    278 |    16 |    0 |    121 |    5 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    353 |    378 |      29 |       6 |       0 |      12 |     15 |     23 |      0 |      6 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      5 |        8 |       12 |       29 |       24 |       31 |       13 |      13 |       12 |       18 |       45 |       37 |       30 |       16 |      20 |        8 |       23 |       36 |       30 |       25 |       17 |      13 |       10 |       14 |       23 |       22 |       27 |       15 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       19 |       16 |       18 |        5 |        4 |       0 |       14 |       13 |       21 |       12 |       11 |        3 |       0 |      0 |      1 |     29 |     44 |     25 |      7 |     13 |    189 |      0 |      0 |      2 |     25 |     54 |     20 |     13 |     17 |    147 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     22 |     13 |      6 |      8 |     74 |      0 |      1 | s03      | R    |
| 54030000 |    845 |    294 |    387 |    25 |    0 |    136 |    2 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    404 |    441 |      23 |      15 |       0 |      11 |     14 |     12 |      0 |      6 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      8 |     15 |      0 |      5 |      7 |      4 |      0 |      8 |       3 |       0 |       0 |       1 |      3 |      3 |      0 |      2 |        8 |        7 |       27 |       45 |       20 |        7 |       4 |       18 |       17 |       36 |       66 |       27 |        9 |       3 |       16 |       10 |       47 |       61 |       39 |       15 |       0 |       15 |       19 |       57 |       60 |       24 |       19 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |        6 |       21 |       32 |       12 |        4 |       0 |       14 |        8 |       18 |       19 |        6 |        1 |       0 |      0 |      3 |     27 |     72 |     34 |     17 |     20 |    121 |      0 |      0 |      4 |     36 |     59 |     46 |     28 |     33 |    181 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     18 |     28 |     12 |      3 |      7 |     94 |      0 |      1 | s03      | R    |
| 54050000 |    952 |    382 |    399 |    11 |    0 |    152 |    4 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    464 |    488 |      26 |      13 |       0 |      14 |     15 |     16 |      0 |      6 |      1 |      5 |      0 |      2 |      4 |      4 |      0 |      0 |      6 |     11 |      0 |      4 |      9 |      2 |      0 |      7 |       0 |       0 |       0 |       1 |      2 |      4 |      0 |      1 |       10 |       18 |       27 |       39 |       27 |       20 |      20 |       13 |       28 |       54 |       45 |       40 |       23 |      18 |       13 |       31 |       37 |       39 |       42 |       28 |      13 |        8 |       29 |       40 |       49 |       34 |       14 |      22 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       20 |       20 |       21 |       17 |        3 |       3 |       12 |       16 |       20 |        5 |       13 |        3 |       2 |      0 |      2 |     34 |     65 |     27 |     11 |     15 |    228 |      0 |      0 |      3 |     43 |     61 |     26 |     17 |     20 |    229 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     28 |      8 |      1 |      2 |    106 |      0 |      1 | s03      | R    |
| 54051000 |    530 |    212 |    195 |    13 |    0 |    105 |    3 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    244 |    286 |      21 |      15 |       0 |       8 |      6 |     19 |      0 |      2 |      7 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |     10 |     13 |      0 |     17 |      4 |      1 |      0 |      2 |       0 |       1 |       0 |       3 |      4 |      4 |      0 |      2 |        7 |       16 |       22 |       22 |       14 |        6 |       0 |        8 |       13 |       36 |       38 |       20 |        9 |       1 |        4 |       11 |       27 |       26 |       19 |        8 |       0 |        4 |        8 |       33 |       30 |       14 |       11 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       10 |       18 |       18 |        8 |        2 |       0 |        6 |        6 |       18 |       22 |        7 |        2 |       0 |      0 |      3 |     33 |     27 |     14 |      4 |     10 |    121 |      0 |      0 |      1 |     26 |     31 |     12 |      6 |      6 |    113 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     15 |      4 |      2 |      3 |     79 |      0 |      1 | s03      | R    |
| 54060000 |    651 |    268 |    245 |     7 |    0 |    126 |    4 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    306 |    345 |      21 |      16 |       0 |       7 |     13 |      7 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |     12 |      4 |      0 |     11 |      4 |      0 |      0 |      0 |       2 |       0 |       0 |       5 |     10 |      5 |      0 |      2 |        6 |       18 |       20 |       25 |       21 |        9 |      11 |       11 |       11 |       45 |       38 |       21 |       15 |      17 |        6 |       18 |       36 |       26 |       21 |       11 |       9 |        2 |       23 |       34 |       24 |       13 |       16 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       19 |       16 |       13 |        7 |        7 |       0 |       11 |       18 |       15 |       16 |        4 |        3 |       2 |      0 |      0 |     22 |     50 |     30 |      4 |     15 |    147 |      0 |      0 |      3 |     21 |     49 |     23 |     10 |      9 |    130 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     20 |     23 |      6 |      0 |      2 |     84 |      0 |      1 | s03      | R    |
| 54070000 |    579 |    291 |    163 |    13 |    0 |    107 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    289 |    290 |      44 |      23 |       0 |       7 |     14 |      9 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      6 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       1 |      4 |      3 |      0 |      0 |       10 |       17 |       35 |       29 |       17 |       12 |      10 |       17 |       19 |       35 |       36 |       27 |       13 |      14 |        1 |       14 |       27 |       21 |       10 |        8 |       5 |        2 |       21 |       22 |       10 |        3 |       12 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       17 |       26 |       13 |        5 |        2 |       0 |        9 |        9 |       16 |        8 |        5 |        4 |       1 |      0 |      1 |     30 |     37 |     24 |     12 |     19 |    168 |      0 |      0 |      1 |     12 |     32 |      9 |      2 |      9 |     98 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     25 |      6 |      1 |      1 |     68 |      0 |      1 | s03      | R    |
| 54080000 |    567 |    247 |    191 |    11 |    0 |    108 |    1 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    268 |    299 |      40 |       7 |       0 |      10 |      1 |     11 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      2 |      2 |      0 |      1 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       2 |     10 |      4 |      0 |      2 |        5 |       12 |       23 |       23 |       15 |       10 |      20 |       11 |       19 |       29 |       33 |       15 |       15 |      17 |        6 |       18 |       36 |       20 |        5 |        4 |       7 |        3 |       25 |       27 |       19 |       13 |        1 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       13 |       20 |       15 |        9 |        1 |       0 |       13 |       14 |       19 |       12 |        4 |        3 |       0 |      0 |      2 |     22 |     25 |     21 |      7 |      9 |    161 |      0 |      0 |      1 |     24 |     27 |     22 |      6 |      5 |    106 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     22 |     11 |      4 |      4 |     68 |      0 |      1 | s03      | R    |
| 54100001 |    510 |    226 |    168 |    16 |    0 |     93 |    3 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    273 |      43 |      10 |       0 |      10 |      4 |      5 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      1 |      0 |      0 |      1 |       1 |       1 |       0 |       3 |      2 |      7 |      0 |      2 |        3 |        9 |       23 |       26 |        8 |        4 |      13 |       11 |       17 |       40 |       34 |       16 |        9 |      13 |        6 |       18 |       32 |       12 |        7 |        4 |       7 |        3 |       21 |       17 |       14 |       11 |        9 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |        5 |       22 |       13 |        5 |        4 |       3 |       11 |        8 |       20 |        9 |        3 |        0 |       0 |      0 |      2 |     22 |     24 |     17 |     11 |     13 |    137 |      0 |      0 |      1 |     12 |     38 |      9 |      4 |      7 |     97 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     16 |      8 |      3 |      7 |     61 |      0 |      1 | s03      | R    |
| 54100002 |    231 |     90 |     74 |     5 |    0 |     59 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    111 |    120 |      11 |       2 |       0 |       4 |      6 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      3 |      2 |      0 |      0 |       0 |       0 |       0 |       1 |      3 |      0 |      0 |      3 |        1 |        2 |       15 |       10 |        6 |        2 |       1 |        3 |       12 |       11 |       17 |        6 |        4 |       0 |        2 |       12 |       13 |        5 |        5 |        3 |       0 |        4 |        8 |       10 |        8 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       12 |       11 |        1 |        2 |        2 |       0 |        7 |       10 |        8 |        5 |        2 |        1 |       0 |      0 |      0 |     13 |     11 |     12 |      2 |      6 |     46 |      0 |      0 |      0 |      7 |     16 |      6 |      0 |      4 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      7 |      3 |      2 |      4 |     43 |      0 |      1 | s03      | R    |
| 54110000 |    565 |    248 |    201 |    13 |    0 |     98 |    3 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    271 |    294 |      26 |      12 |       0 |       7 |     10 |     14 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      4 |       2 |       0 |       0 |       0 |      5 |      3 |      0 |      3 |       12 |       10 |       22 |       21 |       14 |       15 |      16 |        9 |       21 |       29 |       24 |       18 |       13 |      24 |        9 |        8 |       32 |       19 |       12 |       10 |      12 |        5 |        7 |       20 |       27 |       16 |       10 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       17 |       21 |        7 |        4 |        1 |       1 |       16 |        9 |       14 |       13 |        3 |        2 |       0 |      0 |      2 |     15 |     40 |     24 |      6 |     11 |    150 |      0 |      0 |      0 |     16 |     31 |     13 |      9 |      9 |    123 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     21 |      9 |      0 |      4 |     69 |      0 |      1 | s03      | R    |
| 54200000 |    659 |    311 |    198 |    19 |    0 |    122 |    4 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    314 |    345 |      60 |      17 |       0 |      21 |     14 |     11 |      0 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      6 |      0 |      2 |     10 |      0 |      0 |      7 |       2 |       2 |       0 |       1 |      5 |      0 |      0 |      0 |        9 |       18 |       40 |       22 |       17 |       17 |      10 |       15 |       23 |       38 |       37 |       21 |       19 |      25 |        3 |       16 |       29 |       29 |       10 |        2 |       5 |        9 |       16 |       31 |       25 |        9 |        8 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       17 |       23 |       20 |        6 |        5 |       2 |       15 |       15 |       14 |        9 |        3 |        6 |       1 |      0 |      3 |     30 |     49 |     19 |      8 |     18 |    184 |      0 |      0 |      1 |     13 |     42 |     24 |     10 |      8 |    100 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     22 |      9 |      3 |      3 |     92 |      0 |      1 | s03      | R    |
| 54220000 |    661 |    287 |    222 |    10 |    0 |    131 |    6 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    309 |    352 |      49 |      25 |       0 |      16 |      7 |     13 |      0 |      4 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      7 |      1 |      0 |      8 |      4 |      2 |      0 |      4 |       2 |       1 |       0 |       2 |      0 |      1 |      0 |      2 |        6 |       13 |       22 |       30 |       11 |       15 |      19 |        9 |       13 |       55 |       36 |       22 |       16 |      20 |        9 |       15 |       46 |       27 |        8 |        7 |      11 |        5 |       14 |       25 |       19 |       12 |       10 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       15 |       26 |       13 |        4 |        1 |       1 |       24 |       13 |       22 |       13 |        8 |        2 |       0 |      0 |      1 |     33 |     27 |     27 |     10 |     14 |    175 |      0 |      0 |      1 |     24 |     30 |     18 |      7 |      8 |    134 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     19 |      7 |      4 |      8 |     93 |      0 |      1 | s03      | R    |
| 54300000 |    693 |    314 |    242 |    13 |    0 |    117 |    3 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    335 |    358 |      45 |      16 |       0 |      11 |      6 |     11 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |     11 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      7 |      3 |      0 |      3 |        7 |       14 |       28 |       29 |       28 |       10 |      10 |       18 |       23 |       37 |       41 |       25 |       20 |      24 |        9 |       27 |       31 |       26 |       16 |       21 |       8 |        4 |       12 |       31 |       15 |       23 |       12 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       20 |       21 |       10 |        7 |        1 |       0 |        8 |       13 |       20 |       15 |        7 |        2 |       1 |      0 |      1 |     27 |     47 |     35 |      9 |      6 |    189 |      0 |      0 |      1 |     27 |     46 |     14 |      6 |     16 |    132 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     27 |     23 |      7 |      3 |      2 |     75 |      0 |      1 | s03      | R    |
| 54330000 |    894 |    391 |    295 |    17 |    0 |    179 |    3 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    430 |    464 |      30 |      11 |       0 |       8 |     14 |      9 |      0 |     12 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      6 |      6 |      0 |      5 |      5 |      2 |      0 |      3 |       1 |       1 |       0 |       0 |      4 |      6 |      0 |      7 |       14 |       31 |       38 |       27 |       17 |        8 |      19 |       18 |       51 |       60 |       44 |       24 |       15 |      25 |        8 |       46 |       39 |       35 |       17 |       11 |      11 |       12 |       37 |       27 |       21 |       13 |        8 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       21 |       36 |       21 |       21 |        6 |        2 |       2 |       25 |       26 |       22 |       17 |        5 |        2 |       2 |      0 |      2 |     28 |     44 |     25 |      6 |     13 |    273 |      0 |      0 |      1 |     19 |     39 |     19 |      4 |      4 |    209 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     26 |     27 |      6 |      0 |      3 |    143 |      0 |      1 | s03      | R    |
| 54400000 |    445 |    162 |    160 |    10 |    0 |    108 |    2 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    197 |    248 |      15 |      11 |       0 |       9 |      9 |      6 |      0 |      9 |      1 |      0 |      0 |      4 |      0 |      2 |      0 |      1 |      7 |      2 |      0 |      4 |      4 |      4 |      0 |      2 |       1 |       0 |       0 |       0 |      5 |      4 |      0 |      2 |        4 |       25 |        8 |       14 |        3 |        4 |       0 |       13 |       37 |       25 |       14 |       11 |        3 |       1 |        5 |       29 |       13 |       16 |       13 |        9 |       0 |        7 |       23 |       16 |       18 |        7 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       26 |       15 |        7 |        2 |        1 |       0 |        8 |       27 |       19 |       10 |        2 |        3 |       0 |      0 |      2 |     13 |     16 |      5 |      0 |      7 |    119 |      0 |      0 |      1 |     17 |     25 |      7 |      0 |      8 |    102 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |      3 |      3 |      2 |      3 |    101 |      0 |      1 | s03      | R    |
| 54440000 |    569 |    227 |    205 |    11 |    0 |    118 |    4 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    259 |    310 |      29 |      10 |       0 |       8 |     21 |      4 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      3 |      0 |      3 |      4 |      2 |      0 |      2 |       3 |       0 |       0 |       1 |     10 |      5 |      0 |      3 |        9 |       12 |       16 |       28 |       18 |        6 |       3 |       10 |       21 |       39 |       34 |       15 |       13 |       3 |       10 |       17 |       23 |       34 |        8 |        7 |       1 |        4 |       20 |       25 |       30 |       18 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |        9 |       21 |       14 |        9 |        1 |       0 |        6 |       13 |       24 |       20 |        4 |        3 |       0 |      0 |      1 |     26 |     34 |     22 |      6 |     12 |    126 |      0 |      0 |      0 |     24 |     34 |     14 |     11 |     13 |    109 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     13 |     11 |      1 |      6 |     83 |      0 |      1 | s03      | R    |
| 54500000 |    402 |    168 |    112 |    11 |    0 |    109 |    1 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    180 |    222 |      23 |      10 |       0 |      14 |      5 |      6 |      0 |      3 |      0 |      1 |      0 |      2 |      2 |      2 |      0 |      0 |      6 |      1 |      0 |      1 |      3 |      2 |      0 |      0 |       0 |       0 |       0 |       1 |      4 |      1 |      0 |      4 |        7 |       19 |       18 |        8 |        7 |        5 |       0 |       14 |       39 |       22 |       17 |        5 |        7 |       0 |        2 |       29 |       17 |        9 |        1 |        3 |       0 |        7 |       27 |        4 |        7 |        5 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       26 |       14 |        3 |        2 |        1 |       0 |       18 |       25 |       13 |        6 |        3 |        2 |       0 |      0 |      1 |     19 |     24 |      6 |      0 |      3 |    115 |      0 |      0 |      3 |      7 |     13 |      5 |      0 |      3 |     81 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     11 |      1 |      0 |      2 |     92 |      0 |      1 | s03      | R    |
| 54550000 |    729 |    245 |    300 |    14 |    0 |    158 |    6 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    328 |    401 |      16 |      10 |       0 |       8 |     16 |     15 |      0 |     10 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      5 |      0 |      6 |      1 |      3 |      0 |      3 |       0 |       0 |       0 |       1 |      5 |      3 |      0 |      1 |        8 |       10 |       14 |       36 |       17 |        7 |       0 |       13 |       19 |       38 |       46 |       27 |        8 |       2 |        9 |       29 |       46 |       43 |       20 |        7 |       0 |       11 |       35 |       34 |       36 |       19 |        9 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       29 |       20 |       12 |        7 |        1 |       0 |       13 |       30 |       21 |       21 |       11 |        6 |       0 |      0 |      2 |     20 |     37 |     24 |      8 |     23 |    131 |      0 |      0 |      1 |     24 |     37 |     36 |     16 |     20 |    166 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     16 |     16 |     10 |      4 |      6 |    129 |      0 |      1 | s03      | R    |
| 54600000 |   1334 |    487 |    484 |    33 |    0 |    311 |    9 |    2 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    664 |    670 |      53 |      26 |       0 |      18 |     23 |     25 |      0 |     20 |      2 |      3 |      0 |      5 |      5 |      2 |      0 |      2 |     22 |     14 |      0 |     35 |     13 |      5 |      0 |     12 |       4 |       3 |       0 |       8 |      6 |     10 |      0 |      7 |       12 |       42 |       63 |       46 |       25 |        7 |       2 |       25 |       89 |       91 |       48 |       22 |       15 |       0 |       13 |       78 |      105 |       49 |       21 |        6 |       1 |       15 |       65 |       66 |       42 |       16 |        7 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       63 |       67 |       31 |       17 |        2 |       0 |       18 |       58 |       63 |       21 |        7 |        2 |       0 |      0 |      5 |     70 |     33 |     12 |      4 |      1 |    362 |      0 |      0 |      4 |     48 |     29 |     14 |      6 |      3 |    380 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     38 |     28 |      9 |      1 |      2 |    282 |      0 |      1 | s03      | R    |
| 54660000 |    560 |    214 |    188 |     9 |    0 |    147 |    2 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    272 |    288 |      27 |       9 |       0 |      14 |     11 |      6 |      0 |      1 |      6 |      0 |      0 |      2 |      6 |      2 |      0 |      2 |     12 |     11 |      0 |     23 |     13 |      4 |      0 |      7 |       5 |       9 |       0 |       2 |      6 |      5 |      0 |      6 |        6 |       35 |       22 |       13 |       11 |        6 |       0 |        8 |       43 |       34 |       19 |       12 |        5 |       0 |        6 |       38 |       25 |       12 |       11 |        6 |       0 |        7 |       37 |       25 |        7 |       10 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       34 |       25 |       13 |        2 |        3 |       0 |        5 |       35 |       22 |       10 |        4 |        1 |       0 |      0 |      1 |      6 |      9 |      3 |      0 |      0 |    195 |      0 |      0 |      0 |      5 |      5 |      0 |      3 |      1 |    174 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      5 |      3 |      1 |      1 |    145 |      0 |      1 | s03      | R    |
| 54770000 |   1037 |    332 |    413 |    18 |    0 |    264 |    5 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    530 |    507 |      39 |      22 |       0 |      24 |     10 |     11 |      0 |      5 |      5 |      5 |      0 |      4 |      5 |      0 |      0 |      0 |     36 |     35 |      0 |     66 |      9 |      7 |      0 |     11 |      10 |       7 |       0 |      11 |      9 |      6 |      0 |      4 |        4 |       37 |       57 |       29 |       11 |        6 |       1 |       11 |       61 |       60 |       32 |       12 |       10 |       1 |       14 |       63 |       82 |       42 |       24 |        5 |       0 |        3 |       56 |       67 |       35 |       18 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       39 |       56 |       29 |       10 |        6 |       0 |       13 |       41 |       43 |       24 |       14 |        1 |       1 |      0 |      2 |     11 |     18 |      4 |      3 |      3 |    291 |      0 |      0 |      0 |     19 |     21 |      7 |      5 |      5 |    356 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     15 |     15 |      4 |      1 |      0 |    252 |      0 |      1 | s03      | R    |
| 54772000 |      2 |      0 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 81511001 |     11 |      4 |      5 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      7 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 81511002 |      3 |      0 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 81901000 |      7 |      0 |      4 |     0 |    0 |      1 |    2 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 81902000 |     23 |      6 |     10 |     1 |    0 |      6 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     13 |     10 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        1 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        3 |        0 |       0 |        0 |        2 |        1 |        0 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 81911001 |      3 |      0 |      3 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 81911002 |      2 |      1 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 82010000 |     68 |     34 |     13 |     0 |    0 |     17 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     30 |     38 |       7 |       1 |       0 |       4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        8 |        3 |        0 |        0 |       0 |        0 |        5 |        5 |        6 |        2 |        3 |       0 |        0 |        3 |        2 |        0 |        1 |        1 |       0 |        0 |        3 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        5 |        3 |        0 |        0 |       0 |        3 |        4 |        1 |        1 |        2 |        0 |       0 |      0 |      0 |      4 |      3 |      2 |      0 |      0 |     25 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      1 |     13 |      0 |      1 | s03      | R    |
| 82020000 |     55 |     17 |     14 |     2 |    0 |     20 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     26 |     29 |       1 |       1 |       0 |       4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        2 |        2 |        2 |        2 |        1 |        0 |       0 |        1 |        1 |        3 |        0 |        3 |        0 |       0 |        0 |        4 |        1 |        0 |        0 |        1 |       0 |        0 |        2 |        3 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        4 |        3 |        0 |        0 |       0 |        1 |        1 |        6 |        3 |        1 |        1 |       0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      3 |      0 |      1 |     16 |      0 |      1 | s03      | R    |
| 82101000 |      2 |      0 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 82110000 |    216 |     79 |    121 |     3 |    0 |     13 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     75 |    141 |       2 |       1 |       0 |       0 |      3 |      6 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |       24 |       0 |        0 |        0 |        0 |        1 |        0 |       52 |       1 |        0 |        0 |        1 |        0 |        0 |       41 |       0 |        0 |        0 |        0 |        0 |        0 |       78 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        8 |       0 |      0 |      0 |      6 |     21 |      4 |      1 |      3 |     44 |      0 |      0 |      3 |     13 |     23 |     10 |      5 |      2 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     12 |      0 |      1 | s03      | R    |
| 82111001 |    808 |    461 |    152 |    13 |    0 |    172 |    6 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    377 |    431 |      92 |      14 |       0 |      33 |     11 |      6 |      0 |      3 |      3 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |     10 |      5 |      0 |     14 |     17 |      3 |      0 |      2 |       5 |       0 |       0 |       3 |     21 |      8 |      0 |     11 |       14 |       46 |       47 |       34 |       24 |       20 |      14 |       13 |       48 |       56 |       63 |       41 |       26 |      15 |        4 |       10 |       18 |       22 |       12 |       10 |       2 |        8 |        9 |       16 |       10 |       13 |       13 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       23 |       27 |       20 |       10 |        5 |       2 |       19 |       24 |       18 |       22 |        5 |        6 |       1 |      0 |      3 |     47 |     65 |     43 |     15 |     18 |    270 |      0 |      0 |      1 |     13 |     22 |     11 |      8 |      6 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     33 |     37 |     13 |      4 |      7 |    100 |      0 |      1 | s03      | R    |
| 82111002 |     27 |     17 |      7 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |     18 |       2 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        1 |        3 |        5 |        2 |        3 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      2 |      1 |      1 |      8 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 82112000 |    590 |    240 |    100 |    12 |    0 |    233 |    3 |    2 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    309 |    281 |      32 |       9 |       0 |      21 |      2 |      1 |      0 |      3 |      7 |      3 |      0 |     12 |      3 |      0 |      0 |      2 |     34 |     18 |      0 |     75 |     39 |      9 |      0 |     17 |      18 |      10 |       0 |      27 |     14 |      6 |      0 |      7 |        6 |       28 |       43 |       18 |       13 |        5 |       1 |        9 |       42 |       36 |       22 |       13 |        4 |       0 |        1 |       22 |       22 |       11 |        6 |        0 |       0 |        5 |        8 |       14 |        7 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       34 |       61 |       20 |        9 |        4 |       0 |        9 |       35 |       41 |       21 |        9 |        2 |       0 |      0 |      6 |     37 |     12 |      2 |      0 |      2 |    181 |      0 |      0 |      2 |     11 |     13 |      7 |      3 |      4 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     37 |     23 |      7 |      1 |      0 |    177 |      0 |      1 | s03      | R    |
| 82113000 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 82120000 |    852 |    439 |    163 |    14 |    0 |    226 |    3 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    414 |    438 |     112 |      30 |       0 |      37 |     12 |      4 |      0 |      9 |      7 |      2 |      0 |      8 |      4 |      1 |      0 |      0 |     17 |     10 |      0 |     53 |     17 |      7 |      0 |     12 |       5 |       5 |       0 |       6 |     32 |     11 |      0 |     20 |       14 |       29 |       37 |       57 |       24 |       26 |      10 |       16 |       48 |       52 |       57 |       28 |       26 |      15 |        3 |       25 |       25 |       18 |       12 |       11 |       1 |        0 |       14 |       23 |       14 |        8 |        4 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       30 |       29 |       27 |       11 |       10 |       1 |       19 |       35 |       18 |       25 |       16 |       14 |       1 |      0 |      0 |     42 |     59 |     30 |     16 |     13 |    279 |      0 |      0 |      1 |     17 |     35 |     12 |      1 |      5 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     30 |     40 |     11 |      3 |      3 |    159 |      0 |      1 | s03      | R    |
| 82121000 |    603 |    359 |     85 |     6 |    0 |    144 |    3 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    268 |    335 |     123 |      20 |       0 |      46 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      5 |      1 |      1 |      0 |      0 |     11 |      4 |      0 |     19 |     12 |      2 |      0 |     10 |       1 |       1 |       0 |       3 |     18 |      4 |      0 |      8 |       14 |       29 |       25 |       34 |       21 |       20 |       6 |       22 |       31 |       50 |       40 |       32 |       30 |       5 |        2 |       10 |        7 |       10 |        5 |        4 |       2 |        7 |        3 |       11 |        9 |        8 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       21 |       14 |       15 |       11 |        3 |       0 |       12 |       21 |       19 |       12 |       11 |        4 |       1 |      0 |      1 |     30 |     72 |     27 |      9 |     16 |    204 |      0 |      0 |      0 |      6 |     14 |     10 |      2 |      5 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     28 |      8 |      1 |      0 |     96 |      0 |      1 | s03      | R    |
| 82130000 |    606 |    360 |    114 |     7 |    0 |    118 |    3 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    300 |    306 |     113 |      13 |       0 |      18 |      7 |      2 |      0 |      2 |      4 |      0 |      0 |      1 |      5 |      2 |      0 |      2 |     11 |      3 |      0 |     14 |     12 |      6 |      0 |      8 |       1 |       1 |       0 |       6 |     14 |      8 |      0 |      5 |       16 |       22 |       23 |       36 |       26 |       18 |      16 |       18 |       32 |       31 |       50 |       32 |       20 |      20 |        6 |        6 |       15 |       15 |        9 |        6 |       8 |        0 |        4 |        7 |       12 |       15 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       16 |       17 |       23 |        8 |        3 |       1 |        4 |       16 |        9 |       17 |        5 |        2 |       1 |      0 |      1 |     37 |     53 |     38 |      6 |     27 |    198 |      0 |      0 |      0 |      7 |     18 |     11 |      4 |      5 |     69 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |     19 |      5 |      0 |      3 |     88 |      0 |      1 | s03      | R    |
| 82131000 |     39 |     25 |      7 |     0 |    0 |      6 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     25 |     14 |       4 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      5 |      0 |      0 |      2 |        0 |        2 |        1 |        7 |        2 |        3 |       0 |        2 |        0 |        2 |        3 |        2 |        1 |       0 |        1 |        2 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      4 |      0 |      7 |      6 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 82140000 |    675 |    393 |    143 |     4 |    0 |    125 |    4 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    337 |    338 |     111 |      27 |       0 |      18 |      2 |      5 |      0 |      2 |      5 |      1 |      0 |      1 |     10 |      3 |      0 |      3 |     16 |     11 |      0 |     28 |     23 |      5 |      0 |      3 |       2 |       1 |       0 |       2 |      5 |     10 |      0 |      4 |       12 |       19 |       31 |       38 |       34 |       37 |      22 |       10 |       20 |       27 |       32 |       36 |       64 |      11 |        6 |       11 |       11 |       14 |       12 |       14 |       3 |        9 |        6 |        8 |       17 |       15 |       12 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       19 |       10 |        8 |        6 |       15 |       1 |        8 |       14 |       11 |       13 |        6 |       12 |       2 |      0 |      2 |     46 |     49 |     23 |     11 |     22 |    240 |      0 |      0 |      1 |     10 |     19 |     10 |      2 |      4 |     97 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     21 |      8 |      3 |      3 |     83 |      0 |      1 | s03      | R    |
| 82150001 |    222 |    132 |     35 |     1 |    0 |     53 |    0 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    101 |    121 |      55 |       8 |       0 |      15 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      5 |      5 |      3 |      0 |      2 |       1 |       0 |       0 |       0 |      3 |      2 |      0 |      0 |        8 |        9 |       10 |       10 |        7 |        6 |       6 |        6 |       15 |       16 |       13 |       14 |        6 |       6 |        0 |        4 |        6 |        4 |        0 |        3 |       3 |        1 |        5 |        1 |        2 |        1 |        2 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        7 |        5 |        6 |        2 |        2 |       0 |        3 |       13 |        5 |        6 |        3 |        0 |       0 |      0 |      1 |      9 |     21 |     13 |      2 |      7 |     79 |      0 |      0 |      1 |      3 |      2 |      3 |      0 |      2 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      7 |      3 |      0 |      0 |     35 |      0 |      1 | s03      | R    |
| 82150002 |    577 |    281 |    124 |     8 |    0 |    154 |    2 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    273 |    304 |      74 |      19 |       0 |      22 |      2 |      2 |      0 |      2 |      2 |      1 |      0 |      1 |      3 |      2 |      0 |      2 |     15 |     11 |      0 |     56 |     14 |      3 |      0 |     13 |       0 |       6 |       0 |       5 |     12 |      6 |      0 |      5 |        6 |       11 |       20 |       29 |       12 |       23 |       8 |        8 |       22 |       24 |       27 |       25 |       47 |      19 |        2 |        9 |       16 |       20 |       14 |       11 |       1 |        1 |        4 |        9 |       10 |        7 |       17 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       12 |       22 |       17 |       11 |       19 |       0 |        9 |        5 |       25 |       18 |        9 |       15 |       0 |      0 |      4 |     30 |     38 |     23 |     11 |      7 |    168 |      0 |      0 |      1 |     12 |     22 |     14 |      3 |      8 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     26 |     12 |      6 |      0 |    107 |      0 |      1 | s03      | R    |
| 82160000 |    728 |    480 |     99 |     9 |    0 |    130 |    2 |    4 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    347 |    381 |     247 |      33 |       0 |      64 |      3 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |     10 |      4 |      0 |      7 |     23 |      0 |      0 |      5 |       1 |       0 |       0 |       1 |     25 |      3 |      0 |      4 |       18 |       36 |       32 |       44 |       42 |       24 |      14 |       19 |       50 |       51 |       51 |       49 |       34 |      16 |        2 |        7 |       19 |       10 |       13 |        4 |       2 |        1 |        5 |        8 |       10 |       10 |        4 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       17 |       22 |       12 |        7 |        5 |       0 |       16 |       15 |       10 |       13 |        9 |        5 |       1 |      0 |      0 |     49 |    113 |     46 |     14 |     33 |    225 |      0 |      0 |      1 |      7 |     24 |     12 |      2 |      4 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     23 |     31 |      8 |      3 |      3 |     78 |      0 |      1 | s03      | R    |
| 82170000 |    687 |    379 |    123 |    13 |    0 |    163 |    3 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    317 |    370 |     104 |      21 |       0 |      41 |      7 |      2 |      0 |      2 |      2 |      2 |      0 |      4 |      4 |      1 |      0 |      1 |     24 |      7 |      0 |     22 |     19 |      0 |      0 |      7 |       2 |       2 |       0 |       3 |     21 |     11 |      0 |     13 |       16 |       25 |       26 |       48 |       27 |       16 |       5 |       18 |       45 |       35 |       63 |       29 |       20 |       6 |        2 |        6 |       10 |       13 |       18 |        6 |       1 |        6 |        8 |       10 |       20 |       10 |       11 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       21 |       13 |       25 |       14 |        6 |       1 |       15 |       20 |       13 |       25 |        8 |        6 |       0 |      0 |      2 |     40 |     64 |     36 |     13 |     19 |    205 |      0 |      0 |      0 |      8 |     23 |     15 |      4 |     12 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     30 |     20 |     13 |      3 |      4 |    110 |      0 |      1 | s03      | R    |
| 82171000 |    694 |    437 |    157 |     9 |    0 |     85 |    0 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    299 |    395 |      63 |       9 |       0 |       8 |     16 |      5 |      0 |      2 |      2 |      2 |      0 |      4 |      4 |      0 |      0 |      0 |      2 |      1 |      0 |      6 |      6 |      1 |      0 |      2 |       3 |       5 |       0 |       2 |     22 |     11 |      0 |      9 |        3 |       14 |       10 |       18 |       33 |       86 |      10 |        0 |       10 |       19 |       24 |       67 |      132 |      11 |        0 |        5 |        4 |        6 |       13 |       40 |       4 |        0 |        3 |        3 |        4 |       23 |       45 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        7 |        8 |        8 |       10 |       15 |       1 |        5 |        4 |        3 |        5 |       20 |       10 |       0 |      0 |      2 |     36 |     57 |     36 |     17 |     36 |    253 |      0 |      0 |      0 |     13 |     29 |      8 |      4 |     12 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     12 |      4 |      5 |      2 |     63 |      0 |      1 | s03      | R    |
| 82172000 |     32 |     11 |      5 |     0 |    0 |     14 |    0 |    2 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     16 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     10 |      3 |      1 |      0 |      1 |       0 |       1 |       0 |       1 |      1 |      0 |      0 |      1 |        1 |        0 |        2 |        3 |        0 |        0 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        3 |        4 |        0 |        0 |       0 |        0 |        0 |        5 |        2 |        1 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      2 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 82173001 |    262 |    152 |     41 |     5 |    0 |     60 |    3 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    111 |    151 |      50 |      11 |       0 |      14 |      2 |      4 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      3 |     10 |      4 |      0 |      4 |       1 |       0 |       0 |       3 |     10 |      3 |      0 |     12 |        9 |       17 |       12 |       11 |        4 |        9 |       1 |        8 |       19 |       15 |       18 |       17 |       10 |       2 |        5 |        0 |        1 |        7 |        3 |        4 |       1 |        2 |        3 |        4 |        4 |        3 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        7 |        5 |        3 |        4 |        3 |       0 |        6 |       11 |        5 |        9 |        6 |        5 |       0 |      0 |      1 |     16 |     29 |     23 |      2 |      2 |     79 |      0 |      0 |      1 |      6 |      6 |      4 |      0 |      1 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     18 |      9 |      0 |      1 |     28 |      0 |      1 | s03      | R    |
| 82173002 |    273 |    167 |     32 |     5 |    0 |     65 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    132 |    141 |      59 |       6 |       0 |      17 |      4 |      1 |      0 |      5 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      5 |     11 |      0 |      0 |      4 |       0 |       6 |       0 |       2 |     14 |      4 |      0 |      6 |        4 |       16 |       22 |       14 |       11 |        9 |       0 |        5 |       22 |       20 |       20 |       10 |       12 |       2 |        1 |        2 |        7 |        3 |        2 |        3 |       0 |        1 |        1 |        3 |        3 |        1 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       12 |        8 |        5 |        6 |        1 |       0 |        1 |        9 |       10 |       10 |        3 |        3 |       0 |      0 |      3 |     18 |     31 |     14 |      7 |      8 |     86 |      0 |      0 |      1 |      3 |      6 |      3 |      1 |      2 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |     13 |      8 |      5 |      0 |     36 |      0 |      1 | s03      | R    |
| 82180000 |    686 |    401 |    108 |    11 |    0 |    164 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    354 |    332 |      96 |      20 |       0 |      36 |      2 |      2 |      0 |      2 |      1 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     10 |      3 |      0 |     16 |     47 |      7 |      0 |     22 |       7 |       3 |       0 |      11 |     28 |      9 |      0 |     13 |       21 |       34 |       40 |       44 |       26 |       18 |       2 |       21 |       39 |       71 |       46 |       17 |       19 |       3 |        6 |       11 |       12 |       19 |        9 |       10 |       0 |        1 |        5 |        5 |       15 |       10 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       25 |       25 |       21 |       15 |        4 |       0 |       12 |       20 |       12 |       18 |        9 |        2 |       2 |      0 |      7 |     34 |     75 |     26 |     12 |     10 |    237 |      0 |      0 |      0 |      4 |     31 |     10 |      3 |      5 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     28 |     16 |      1 |      3 |    114 |      0 |      1 | s03      | R    |
| 82181000 |    577 |    335 |    104 |     8 |    0 |    125 |    3 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    271 |    306 |      80 |      22 |       0 |      33 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |     15 |      8 |      0 |     17 |     17 |      1 |      0 |     10 |      14 |       8 |       0 |      10 |     36 |     17 |      0 |     17 |       10 |       24 |       37 |       32 |       25 |       16 |       3 |       16 |       34 |       48 |       38 |       30 |       19 |       3 |        5 |        5 |       12 |        8 |       18 |        8 |       2 |        3 |        9 |        7 |       12 |        7 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       15 |       18 |       18 |        7 |        4 |       0 |        9 |       18 |       16 |       18 |        8 |        3 |       0 |      0 |      1 |     29 |     61 |     36 |      4 |     13 |    191 |      0 |      0 |      1 |      5 |     16 |      8 |      5 |     12 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     37 |      6 |      2 |      4 |     71 |      0 |      1 | s03      | R    |
| 82190000 |    795 |    406 |    159 |    10 |    0 |    208 |    2 |    3 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    393 |    402 |     109 |      37 |       0 |      58 |      1 |      2 |      0 |      1 |      1 |      4 |      0 |      4 |      1 |      0 |      0 |      1 |      9 |      4 |      0 |     17 |     34 |      7 |      0 |     16 |      16 |       7 |       0 |      12 |     43 |     21 |      0 |     15 |        9 |       32 |       44 |       49 |       34 |       23 |       8 |       23 |       42 |       34 |       44 |       30 |       25 |       9 |        5 |       13 |       19 |       24 |       16 |        7 |       1 |        6 |        7 |       15 |       20 |       10 |       14 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       18 |       26 |       25 |       18 |        4 |       4 |       17 |       34 |       21 |       25 |       13 |        9 |       2 |      0 |      3 |     44 |     66 |     47 |      9 |     16 |    221 |      0 |      0 |      1 |     16 |     25 |     16 |      5 |      8 |     88 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     29 |     43 |     16 |      2 |      2 |    134 |      0 |      1 | s03      | R    |
| 82191001 |     84 |     57 |      4 |     0 |    0 |     22 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     37 |     47 |      14 |       0 |       0 |      10 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      6 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      6 |      1 |      0 |      0 |        4 |        2 |        3 |       10 |        3 |        4 |       1 |        4 |        4 |        3 |       10 |        3 |        5 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        1 |        4 |        0 |        0 |       0 |        1 |        3 |        2 |        4 |        3 |        2 |       0 |      0 |      0 |      6 |     17 |      4 |      3 |      3 |     24 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      7 |      1 |      0 |      1 |      9 |      0 |      1 | s03      | R    |
| 82191002 |    683 |    344 |    138 |    15 |    0 |    181 |    3 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    311 |    372 |      80 |      28 |       0 |      39 |     12 |      3 |      0 |      1 |      1 |      4 |      0 |      1 |      2 |      0 |      0 |      1 |     16 |      9 |      0 |     24 |     14 |      6 |      0 |     13 |       3 |       2 |       0 |      10 |     54 |     26 |      0 |     34 |       14 |       15 |       23 |       30 |       33 |       23 |       1 |       21 |       36 |       27 |       46 |       34 |       41 |       0 |        7 |       12 |        9 |       18 |       21 |        7 |       0 |        9 |       10 |        7 |       14 |       15 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       20 |       11 |       15 |       13 |       21 |       1 |       14 |       31 |       12 |       14 |       15 |       16 |       1 |      0 |      2 |     39 |     60 |     24 |     10 |     20 |    189 |      0 |      0 |      1 |     11 |     25 |     20 |      5 |     13 |     63 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     34 |     32 |     15 |      6 |      7 |    106 |      0 |      1 | s03      | R    |
| 82200000 |    731 |    354 |    157 |    21 |    0 |    193 |    4 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    371 |    360 |      59 |      24 |       0 |      31 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      7 |      3 |      0 |      4 |     27 |     14 |      0 |     43 |     33 |      6 |      0 |     19 |       6 |      14 |       0 |      10 |     33 |     11 |      0 |     19 |       16 |       13 |       32 |       59 |       32 |       15 |       1 |       20 |       22 |       53 |       61 |       17 |       13 |       0 |        9 |        7 |       18 |       35 |       18 |        7 |       0 |        3 |        7 |       11 |       31 |        6 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       14 |       22 |       33 |       14 |       11 |       1 |       22 |       15 |       29 |       30 |       12 |        3 |       0 |      0 |      3 |     49 |     72 |     26 |     12 |     28 |    164 |      0 |      0 |      0 |     10 |     31 |     18 |      5 |     13 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     37 |     27 |      6 |     14 |    110 |      0 |      1 | s03      | R    |
| 82201000 |    908 |    380 |    234 |     8 |    0 |    279 |    1 |    3 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    471 |    437 |      78 |      41 |       0 |      52 |      5 |      5 |      0 |      2 |      1 |      2 |      0 |      3 |      1 |      1 |      0 |      2 |     37 |     27 |      0 |     59 |     36 |      8 |      0 |     25 |      14 |      18 |       0 |      11 |     39 |     33 |      0 |     39 |       23 |       22 |       25 |       61 |       27 |       26 |       0 |       33 |       33 |       27 |       56 |       27 |       20 |       0 |       10 |       16 |       18 |       48 |       28 |       13 |       0 |        8 |       14 |       15 |       34 |       18 |       12 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |       24 |       27 |       40 |       25 |       15 |       0 |       23 |       22 |       26 |       35 |       19 |       15 |       0 |      0 |      1 |     36 |     85 |     39 |      7 |     17 |    195 |      0 |      0 |      2 |     12 |     43 |     26 |     10 |     22 |    119 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     43 |     61 |     24 |      4 |     11 |    148 |      0 |      1 | s03      | R    |
| 82202000 |    118 |     46 |     27 |     0 |    0 |     45 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     63 |     55 |      12 |       1 |       0 |       3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |     24 |      9 |      3 |      0 |      5 |       2 |       4 |       0 |       1 |      8 |      1 |      0 |      2 |        5 |        2 |        5 |       10 |        1 |        0 |       0 |        0 |        4 |       10 |        6 |        2 |        1 |       0 |        0 |        2 |        7 |        5 |        1 |        1 |       0 |        1 |        2 |        4 |        4 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        1 |        8 |        5 |        4 |        2 |       0 |        2 |        2 |        8 |        8 |        1 |        0 |       0 |      0 |      0 |      2 |      5 |      2 |      1 |      0 |     36 |      0 |      0 |      1 |      0 |      1 |      3 |      1 |      3 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      3 |      2 |      1 |      1 |     35 |      0 |      1 | s03      | R    |
| 82220000 |    572 |    240 |    156 |     4 |    0 |    169 |    2 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    292 |    280 |      38 |      21 |       0 |      21 |      8 |      1 |      0 |      3 |      4 |      3 |      0 |      5 |      5 |      8 |      0 |      2 |     23 |     14 |      0 |     51 |     27 |     11 |      0 |      5 |       0 |       4 |       0 |       6 |     19 |     14 |      0 |     17 |        6 |       12 |       18 |       32 |       20 |       19 |       1 |       14 |       12 |       26 |       49 |       19 |       11 |       1 |        8 |        7 |       13 |       29 |       21 |        3 |       0 |        6 |        7 |       10 |       32 |       14 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       11 |       25 |       32 |       13 |       10 |       0 |       10 |       11 |       14 |       23 |       13 |        2 |       0 |      0 |      1 |     28 |     47 |     24 |      4 |     25 |    111 |      0 |      0 |      2 |     11 |     28 |     15 |      7 |     20 |     73 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |     37 |     11 |      3 |     13 |     94 |      0 |      1 | s03      | R    |
| 82230000 |      4 |      0 |      1 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      1 | s03      | R    |
| 82290000 |    261 |    142 |     67 |     5 |    0 |     43 |    1 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    117 |    144 |      38 |       9 |       0 |      15 |      4 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        5 |        5 |       15 |       10 |        7 |        8 |       9 |        2 |       14 |       24 |       16 |        9 |       11 |       7 |        0 |        6 |        5 |        9 |        7 |        0 |       5 |        1 |        3 |        6 |        4 |        8 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        7 |        6 |        4 |        1 |        1 |       0 |        5 |        3 |        8 |        5 |        1 |        1 |       3 |      0 |      0 |     14 |     27 |     13 |      5 |      3 |     80 |      0 |      0 |      0 |      6 |     12 |      6 |      0 |      4 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      6 |      3 |      1 |      2 |     33 |      0 |      1 | s03      | R    |
| 82300001 |    346 |    206 |     71 |     9 |    0 |     60 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    156 |    190 |     100 |      14 |       0 |      26 |      8 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      2 |      4 |      0 |      0 |      5 |       2 |       3 |       0 |       0 |     15 |      0 |      0 |      3 |        4 |       16 |       12 |       22 |       12 |       16 |       3 |       12 |       20 |       21 |       36 |       15 |        9 |       8 |        3 |        5 |        5 |        8 |        4 |        7 |       2 |        3 |        5 |        8 |        7 |        5 |        6 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       11 |        7 |        6 |        3 |        1 |       0 |        8 |        9 |        5 |        5 |        3 |        2 |       0 |      0 |      0 |     11 |     38 |     23 |      2 |      8 |    124 |      0 |      0 |      0 |      2 |     12 |      3 |      3 |      7 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |     14 |      4 |      2 |      3 |     36 |      0 |      1 | s03      | R    |
| 82300002 |     14 |      8 |      4 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      8 |       3 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 82302000 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 82310001 |    575 |    444 |     47 |     9 |    0 |     72 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    276 |    299 |     374 |      31 |       0 |      52 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      9 |      3 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |       16 |       35 |       51 |       31 |       21 |       27 |      22 |       20 |       50 |       52 |       44 |       16 |       36 |      23 |        5 |       11 |       10 |        4 |        3 |        0 |       0 |        1 |        6 |        0 |        2 |        1 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       11 |        8 |       10 |        2 |        0 |       1 |       11 |       11 |        8 |        7 |        3 |        3 |       1 |      0 |      2 |     42 |     80 |     38 |      8 |     22 |    252 |      0 |      0 |      1 |      4 |     11 |      4 |      1 |      2 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     20 |      2 |      0 |      3 |     44 |      0 |      1 | s03      | R    |
| 82310002 |    119 |     60 |     20 |     2 |    0 |     36 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     64 |     55 |      16 |       4 |       0 |      13 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      1 |      0 |      7 |      2 |      1 |      0 |      0 |       2 |       2 |       0 |       2 |     10 |      0 |      0 |      7 |        0 |        4 |       14 |        8 |        4 |        1 |       0 |        2 |        7 |       11 |        4 |        2 |        2 |       1 |        0 |        2 |        4 |        4 |        0 |        0 |       0 |        0 |        3 |        5 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        9 |        7 |        2 |        3 |        2 |       0 |        1 |        2 |        4 |        1 |        6 |        2 |       0 |      0 |      1 |     16 |      7 |      1 |      2 |      0 |     33 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      5 |      3 |      0 |      0 |     26 |      0 |      1 | s03      | R    |
| 82310003 |     49 |     36 |      7 |     2 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     21 |     28 |      31 |       3 |       0 |       3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        1 |        0 |        2 |        2 |        3 |        2 |       4 |        2 |        7 |        1 |        1 |        3 |        3 |       5 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |      4 |      9 |      1 |      0 |      1 |     21 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 82320000 |    669 |    464 |     66 |    13 |    0 |    117 |    1 |    3 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    334 |    335 |     349 |      31 |       0 |      85 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      6 |      5 |      0 |      0 |      3 |       0 |       2 |       0 |       4 |     12 |      2 |      0 |      6 |       26 |       39 |       42 |       43 |       23 |       19 |      32 |       22 |       34 |       53 |       33 |       28 |       39 |      31 |        3 |        7 |       11 |        7 |        3 |        2 |       1 |        6 |        5 |        9 |        6 |        2 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       15 |       24 |       10 |        7 |        3 |       2 |       16 |       14 |       16 |        8 |        6 |        3 |       0 |      0 |      1 |     58 |     79 |     27 |     12 |     17 |    270 |      0 |      0 |      0 |      8 |     15 |      4 |      2 |      2 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     31 |     27 |      8 |      1 |      1 |     68 |      0 |      1 | s03      | R    |
| 82330000 |    426 |    300 |     46 |    13 |    0 |     63 |    1 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    207 |    219 |     225 |      19 |       0 |      49 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |       3 |       0 |       0 |       1 |      3 |      0 |      0 |      0 |       15 |       26 |       36 |       25 |        8 |       15 |       8 |       20 |       26 |       35 |       36 |        7 |       21 |      22 |        4 |        4 |        8 |        8 |        2 |        2 |       0 |        1 |        2 |        5 |        4 |        3 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       12 |       13 |        6 |        4 |        3 |       1 |        6 |        8 |        9 |        9 |        1 |        1 |       0 |      0 |      0 |     35 |     61 |     30 |      7 |      7 |    160 |      0 |      0 |      1 |      5 |      6 |      2 |      3 |      2 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     22 |      1 |      1 |      0 |     41 |      0 |      1 | s03      | R    |
| 82331000 |     36 |     29 |      2 |     1 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     16 |     20 |      26 |       2 |       0 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        3 |        4 |        1 |        2 |       1 |        1 |        4 |        5 |        0 |        4 |        1 |       1 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      7 |      4 |      4 |      0 |      1 |     13 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 82340000 |   1108 |    617 |    199 |    16 |    0 |    263 |    2 |    3 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    543 |    565 |     135 |      25 |       0 |      51 |      9 |      4 |      0 |      2 |      8 |      0 |      0 |      4 |     11 |      9 |      0 |      5 |     53 |     21 |      0 |     81 |     38 |      8 |      0 |     16 |      10 |       3 |       0 |       6 |     34 |     11 |      0 |     15 |       26 |       41 |       70 |       52 |       47 |       30 |      14 |       28 |       60 |       87 |       69 |       32 |       34 |      27 |        6 |       15 |       36 |       20 |       18 |        9 |       3 |        4 |       17 |       22 |       24 |       12 |        9 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       21 |       32 |       46 |       31 |       17 |        9 |       0 |       21 |       35 |       30 |       25 |       15 |        9 |       1 |      0 |      3 |     83 |     81 |     53 |     18 |     15 |    364 |      0 |      0 |      0 |     34 |     35 |     15 |     10 |      4 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     62 |     43 |     18 |      1 |      5 |    159 |      0 |      1 | s03      | R    |
| 82350000 |    599 |    383 |    112 |     7 |    0 |     96 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    299 |    300 |     101 |      22 |       0 |      18 |     16 |      2 |      0 |      5 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      2 |      5 |      2 |      0 |     11 |     19 |      1 |      0 |      5 |       3 |       1 |       0 |       2 |     16 |      2 |      0 |      6 |       20 |       26 |       24 |       38 |       26 |       28 |      18 |       16 |       18 |       35 |       51 |       23 |       31 |      29 |        5 |        7 |       15 |       18 |       10 |        6 |       5 |        2 |        6 |       11 |        6 |        8 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       10 |       15 |       12 |        3 |        4 |       1 |        9 |       14 |       11 |        8 |        4 |        4 |       1 |      0 |      0 |     31 |     55 |     26 |     17 |     23 |    231 |      0 |      0 |      2 |      8 |     25 |      3 |      4 |      6 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     14 |      6 |      1 |      2 |     68 |      0 |      1 | s03      | R    |
| 82351000 |    511 |    321 |     87 |    11 |    0 |     87 |    2 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    230 |    281 |      83 |      17 |       0 |      26 |     11 |      3 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      2 |      4 |      0 |      0 |      3 |       1 |       0 |       0 |       0 |     17 |      7 |      0 |      6 |        4 |       14 |       22 |       35 |       21 |       25 |      10 |       17 |       24 |       42 |       28 |       28 |       32 |      19 |        1 |        5 |       16 |        7 |        9 |        8 |       3 |        6 |        4 |        9 |        6 |        5 |        7 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       14 |       17 |        5 |        7 |        0 |       0 |       11 |        9 |       13 |       10 |        7 |        3 |       0 |      0 |      0 |     25 |     44 |     39 |     10 |     23 |    180 |      0 |      0 |      0 |      5 |     17 |      4 |      2 |      4 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     26 |     11 |      2 |      3 |     49 |      0 |      1 | s03      | R    |
| 82360001 |    523 |    313 |     78 |     5 |    0 |    117 |    2 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    260 |    263 |      66 |      20 |       0 |      35 |      5 |      0 |      0 |      0 |      5 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      3 |      0 |      6 |     15 |      3 |      0 |      2 |       8 |       1 |       0 |       8 |     36 |     14 |      0 |     17 |       11 |       16 |       30 |       25 |       25 |       21 |      14 |       11 |       26 |       27 |       27 |       43 |       23 |      14 |        7 |        8 |       10 |        5 |        8 |        5 |       3 |        2 |        5 |        4 |        6 |        8 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       18 |       16 |       11 |       13 |        5 |       3 |       15 |       13 |       13 |        8 |        6 |        5 |       0 |      0 |      1 |     30 |     52 |     21 |      7 |     14 |    188 |      0 |      0 |      0 |      7 |      8 |      6 |      6 |      5 |     46 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     33 |     10 |      2 |      4 |     59 |      0 |      1 | s03      | R    |
| 82360002 |     17 |      6 |      6 |     1 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |      6 |       1 |       0 |       0 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 82361000 |    694 |    385 |    143 |    13 |    0 |    145 |    2 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    327 |    367 |      96 |      30 |       0 |      38 |      4 |      1 |      0 |      2 |      2 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      5 |      6 |      0 |     15 |     27 |      2 |      0 |     11 |       3 |       1 |       0 |       4 |     40 |     16 |      0 |     23 |        6 |       26 |       27 |       27 |       37 |       30 |      19 |       14 |       23 |       31 |       51 |       41 |       28 |      25 |       10 |        6 |        8 |       19 |       17 |        8 |       3 |        9 |       12 |        7 |       15 |       19 |        9 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       25 |       12 |       18 |       12 |        8 |       2 |       16 |       12 |       19 |       18 |        5 |       10 |       2 |      0 |      1 |     22 |     79 |     36 |      8 |     20 |    219 |      0 |      0 |      0 |      8 |     28 |     15 |      3 |     13 |     76 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     27 |     15 |      5 |      4 |     92 |      0 |      1 | s03      | R    |
| 82362000 |    560 |    315 |    115 |     6 |    0 |    121 |    0 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    252 |    308 |      71 |      24 |       0 |      39 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      6 |      0 |      0 |      4 |     16 |      3 |      0 |     10 |       0 |       1 |       0 |       1 |     43 |     14 |      0 |     20 |        4 |       22 |       15 |       33 |       20 |       25 |      19 |       13 |       34 |       32 |       37 |       29 |       19 |      13 |        5 |        6 |        9 |       14 |        7 |       10 |       4 |        4 |        7 |        9 |       15 |       11 |        9 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       11 |       14 |       11 |        7 |        7 |       2 |       16 |        9 |       11 |       13 |        9 |       12 |       1 |      0 |      2 |     25 |     53 |     33 |      6 |     17 |    179 |      0 |      0 |      0 |      9 |     18 |     16 |      5 |      6 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     21 |      6 |      0 |      2 |     77 |      0 |      1 | s03      | R    |
| 82370001 |    224 |     85 |     54 |     6 |    0 |     77 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    113 |    111 |       6 |      10 |       0 |      10 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     12 |      8 |      0 |     35 |     12 |      0 |      0 |      7 |       5 |       2 |       0 |       2 |      2 |      2 |      0 |      1 |        1 |        7 |       12 |       10 |        5 |        1 |       0 |        5 |       15 |       14 |       10 |        3 |        2 |       0 |        1 |        4 |       11 |        8 |        3 |        3 |       0 |        0 |        5 |        7 |        7 |        2 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        8 |       18 |       10 |        2 |        6 |       0 |        8 |        5 |       12 |        7 |        3 |        3 |       0 |      0 |      1 |      8 |     10 |      5 |      1 |      2 |     58 |      0 |      0 |      0 |      9 |      5 |      6 |      1 |      2 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |      6 |      1 |      5 |      0 |     64 |      0 |      1 | s03      | R    |
| 82370002 |    592 |    239 |    123 |     4 |    0 |    224 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    303 |    289 |      29 |      17 |       0 |      12 |      4 |      3 |      0 |      5 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |     42 |     11 |      0 |     89 |     19 |      2 |      0 |     13 |      29 |      21 |       0 |      20 |     28 |     13 |      0 |     16 |        6 |       10 |       39 |       33 |       13 |       11 |       0 |       10 |       15 |       49 |       34 |       10 |        9 |       0 |        0 |        3 |       25 |       28 |        8 |        4 |       1 |        0 |        7 |       21 |       13 |       10 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       17 |       55 |       29 |        9 |        4 |       0 |       11 |       13 |       39 |       27 |        8 |       10 |       0 |      0 |      3 |     40 |     81 |      7 |      6 |      4 |     98 |      0 |      0 |      0 |     21 |     40 |      6 |      3 |      5 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     45 |     52 |      7 |      1 |      1 |    121 |      0 |      1 | s03      | R    |
| 82371001 |    668 |    331 |    133 |     9 |    0 |    187 |    2 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    302 |    366 |      94 |      37 |       0 |      43 |      6 |      2 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      8 |      3 |      0 |     31 |     25 |      6 |      0 |     15 |       8 |       6 |       0 |       1 |     49 |     30 |      0 |     39 |        9 |       19 |       27 |       34 |       28 |       22 |       0 |       17 |       42 |       39 |       35 |       39 |       19 |       1 |        2 |       10 |       11 |       22 |       14 |        9 |       0 |        5 |        8 |       12 |       19 |       13 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       20 |       16 |       22 |       14 |        6 |       0 |       21 |       23 |       25 |       18 |       13 |        8 |       1 |      0 |      3 |     34 |     48 |     36 |     14 |     22 |    174 |      0 |      0 |      1 |     10 |     20 |     16 |      6 |     11 |     69 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     41 |     20 |      2 |      7 |    114 |      0 |      1 | s03      | R    |
| 82371002 |     15 |      7 |      1 |     0 |    0 |      7 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |      8 |       0 |       0 |       0 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      2 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        2 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      3 |      0 |      1 | s03      | R    |
| 82372000 |    498 |    208 |    122 |     5 |    0 |    160 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    244 |    254 |      46 |      16 |       0 |      27 |      3 |      1 |      0 |      0 |      2 |      1 |      0 |      2 |      0 |      1 |      0 |      1 |     37 |     21 |      0 |     61 |     16 |      9 |      0 |     14 |       3 |       4 |       0 |       7 |     18 |     16 |      0 |     10 |       10 |        7 |       17 |       40 |       17 |        7 |       0 |        8 |       13 |       26 |       43 |       11 |        9 |       0 |        4 |        4 |       18 |       25 |       15 |        7 |       0 |        0 |        8 |       11 |       17 |        9 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |        6 |       17 |       21 |       10 |        7 |       0 |       17 |       13 |       21 |       25 |       11 |        7 |       1 |      0 |      0 |     27 |     59 |     29 |      8 |      8 |     77 |      0 |      0 |      1 |     11 |     34 |     16 |      8 |      3 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     31 |     19 |      3 |      2 |     92 |      0 |      1 | s03      | R    |
| 82373000 |    801 |    447 |    133 |    12 |    0 |    195 |    6 |    4 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    388 |    413 |     177 |      40 |       0 |      51 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      3 |      1 |      1 |      0 |      0 |     16 |     10 |      0 |     32 |     28 |      6 |      0 |     11 |       5 |       8 |       0 |      14 |     41 |     12 |      0 |     23 |       17 |       24 |       46 |       47 |       31 |       27 |      12 |       28 |       42 |       57 |       45 |       35 |       25 |      11 |        5 |       10 |       23 |       16 |        9 |        6 |       0 |        5 |       12 |       17 |       12 |       12 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       25 |       26 |       28 |       16 |        5 |       3 |       18 |       27 |       28 |       17 |       10 |        6 |       0 |      0 |      2 |     67 |     83 |     39 |      7 |     20 |    229 |      0 |      0 |      1 |     20 |     23 |     11 |      2 |     11 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     36 |     38 |     10 |      1 |      2 |    129 |      0 |      1 | s03      | R    |
| 82380001 |    669 |    343 |    144 |    16 |    0 |    156 |    6 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    334 |    335 |      85 |      36 |       0 |      39 |      2 |      9 |      0 |      1 |      5 |      1 |      0 |      3 |      2 |      0 |      0 |      1 |      9 |      7 |      0 |     27 |     24 |      7 |      0 |     11 |       5 |       4 |       0 |       8 |     39 |     17 |      0 |     28 |       12 |       29 |       27 |       29 |       45 |       25 |       1 |       13 |       32 |       29 |       42 |       44 |       11 |       4 |        5 |       15 |       11 |       21 |       16 |       12 |       0 |        6 |       16 |        7 |       11 |       15 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       21 |       16 |       19 |       15 |        6 |       0 |       15 |       22 |       20 |       20 |       11 |        8 |       0 |      0 |      2 |     43 |     64 |     30 |      7 |     15 |    182 |      0 |      0 |      3 |      8 |     38 |     17 |      4 |     10 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     25 |     27 |     24 |      7 |      3 |     90 |      0 |      1 | s03      | R    |
| 82380002 |    303 |    130 |     82 |     5 |    0 |     82 |    3 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    156 |    147 |      22 |      11 |       0 |       5 |      0 |      2 |      0 |      1 |      4 |      0 |      0 |      1 |      4 |      0 |      0 |      2 |      7 |     17 |      0 |     28 |     16 |      4 |      0 |      5 |       6 |       8 |       0 |       4 |      8 |      3 |      0 |      7 |        5 |       12 |       13 |       18 |        8 |        3 |       0 |        8 |       17 |       13 |       22 |        7 |        4 |       0 |        4 |        1 |       15 |       24 |        5 |        4 |       0 |        1 |        4 |       12 |       11 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |       14 |       14 |        6 |        5 |       1 |       10 |        9 |       13 |        8 |        4 |        2 |       1 |      0 |      1 |     16 |     30 |     21 |      3 |      0 |     59 |      0 |      0 |      0 |      5 |     23 |     21 |      8 |      3 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |     15 |      9 |      2 |      0 |     50 |      0 |      1 | s03      | R    |
| 82381001 |    438 |    255 |     68 |     8 |    0 |     99 |    2 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    208 |    230 |      48 |       7 |       0 |      22 |      3 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      2 |      0 |     11 |     21 |      2 |      0 |      7 |       2 |       1 |       0 |       4 |     33 |      9 |      0 |     23 |        7 |       13 |       18 |       14 |       32 |       17 |      10 |       16 |       28 |       18 |       27 |       20 |       21 |      14 |        1 |        4 |        7 |        8 |        8 |        7 |       2 |        5 |        3 |        4 |        7 |        6 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       15 |       10 |       12 |        9 |        6 |       1 |       10 |       12 |       10 |       11 |        9 |        3 |       0 |      0 |      0 |     24 |     35 |     26 |      4 |      6 |    160 |      0 |      0 |      0 |      2 |     12 |      4 |      2 |      5 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     19 |      7 |      3 |      3 |     65 |      0 |      1 | s03      | R    |
| 82381002 |    300 |    150 |     59 |     6 |    0 |     81 |    0 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    155 |    145 |      31 |       4 |       0 |      18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |      9 |      3 |      0 |      7 |      9 |      2 |      0 |      6 |       5 |       3 |       0 |       5 |     26 |     21 |      0 |     15 |        9 |       12 |       16 |       18 |       13 |        9 |       0 |        5 |       11 |       15 |       15 |       17 |       10 |       0 |        2 |        2 |        7 |        5 |        6 |        3 |       0 |        3 |        7 |        6 |        7 |        5 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       15 |       10 |        9 |        8 |        3 |       0 |        5 |        9 |        9 |        9 |        5 |        1 |       0 |      0 |      1 |     17 |     31 |     13 |      9 |      6 |     73 |      0 |      0 |      0 |      3 |      9 |     10 |      4 |      6 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     17 |     12 |      1 |      1 |     48 |      0 |      1 | s03      | R    |
| 82390000 |    750 |    447 |    139 |     9 |    0 |    150 |    1 |    3 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    365 |    385 |     113 |      35 |       0 |      30 |     10 |      1 |      0 |      1 |      2 |      1 |      0 |      0 |      5 |      1 |      0 |      3 |     15 |      2 |      0 |     13 |     25 |      3 |      0 |     16 |      10 |       3 |       0 |       7 |     49 |     24 |      0 |     25 |       17 |       27 |       19 |       49 |       48 |       25 |      13 |       24 |       40 |       31 |       61 |       48 |       33 |      12 |        8 |        8 |       15 |       14 |       19 |       15 |       1 |        5 |       10 |       10 |       13 |       12 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       21 |       16 |       17 |       16 |        7 |       0 |       15 |       16 |       13 |       13 |        7 |       11 |       2 |      0 |      4 |     42 |     80 |     52 |     22 |     26 |    221 |      0 |      0 |      0 |     13 |     26 |     14 |      6 |     16 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     27 |     38 |     13 |      0 |      1 |     85 |      0 |      1 | s03      | R    |
| 83010000 |    611 |    268 |    181 |     4 |    0 |    149 |    3 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    299 |    312 |      37 |      26 |       0 |      17 |      3 |      6 |      0 |      3 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     25 |     31 |      0 |     51 |     41 |      7 |      0 |     14 |       5 |       2 |       0 |       6 |     23 |     18 |      0 |     12 |        9 |       21 |       19 |       27 |       26 |       23 |       0 |       18 |       20 |       24 |       35 |       29 |       17 |       0 |        6 |       13 |       13 |       23 |       22 |       10 |       2 |        5 |       13 |       13 |       25 |       27 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       18 |       15 |       22 |       15 |        7 |       0 |        8 |       13 |       14 |       20 |       14 |        8 |       0 |      0 |      1 |     21 |     43 |     19 |      9 |     14 |    161 |      0 |      0 |      2 |      5 |     35 |     13 |      4 |     14 |    108 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     30 |      4 |     11 |      7 |     87 |      0 |      1 | s03      | R    |
| 83020000 |    517 |    280 |    132 |     5 |    0 |     94 |    1 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    232 |    285 |      45 |      11 |       0 |       8 |     10 |      2 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      6 |      0 |     14 |      2 |      3 |      0 |      7 |       2 |       7 |       0 |       8 |     11 |     11 |      0 |      9 |        5 |        9 |        9 |       23 |       19 |       48 |       5 |        5 |       11 |       12 |       20 |       27 |       79 |       8 |        6 |        3 |        6 |        9 |       13 |       22 |       3 |        0 |        0 |        2 |       13 |       12 |       41 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       11 |       10 |       10 |        6 |       11 |       0 |        6 |        8 |        9 |        6 |       11 |       13 |       0 |      0 |      0 |     28 |     47 |     29 |     10 |     28 |    138 |      0 |      0 |      1 |      5 |     19 |     20 |      7 |     15 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     17 |      8 |      6 |      4 |     48 |      0 |      1 | s03      | R    |
| 83021000 |    792 |    364 |    176 |    13 |    0 |    230 |    4 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    404 |    388 |      47 |      24 |       0 |      19 |     10 |      9 |      0 |      6 |      8 |      0 |      0 |      3 |      5 |      6 |      0 |      3 |     51 |     32 |      0 |     71 |     38 |     10 |      0 |     25 |      10 |       4 |       0 |       8 |     49 |     17 |      0 |     22 |       13 |       25 |       44 |       46 |       28 |       17 |       1 |       12 |       35 |       48 |       50 |       26 |       19 |       0 |       10 |       14 |       18 |       34 |       17 |        7 |       1 |        6 |        7 |       20 |       28 |        9 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       21 |       33 |       31 |       17 |       10 |       0 |       19 |       24 |       31 |       34 |       10 |        5 |       0 |      0 |      1 |     42 |     63 |     26 |     14 |     27 |    191 |      0 |      0 |      1 |      9 |     40 |     16 |     15 |     16 |     79 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     30 |     58 |      8 |     10 |     10 |    133 |      0 |      1 | s03      | R    |
| 83022000 |    776 |    322 |    191 |    18 |    0 |    234 |    5 |    3 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    390 |    386 |      57 |      31 |       0 |      31 |      1 |     11 |      0 |      4 |      5 |      0 |      0 |     11 |      2 |      3 |      0 |      1 |     21 |     14 |      0 |     47 |     57 |      9 |      0 |     34 |      10 |      19 |       0 |       9 |     22 |     15 |      0 |     14 |       18 |       22 |       31 |       39 |       27 |       10 |       0 |       26 |       29 |       29 |       54 |       31 |        5 |       1 |        5 |       11 |       19 |       37 |       26 |        5 |       2 |        4 |       10 |       13 |       33 |       16 |       10 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |       14 |       39 |       35 |       16 |       13 |       1 |       17 |       30 |       26 |       31 |       17 |        4 |       0 |      0 |      5 |     23 |     65 |     24 |      9 |     16 |    180 |      0 |      0 |      0 |     16 |     39 |     10 |      5 |     22 |     99 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     43 |     55 |     11 |      5 |      9 |    137 |      0 |      1 | s03      | R    |
| 83030000 |    490 |    199 |    106 |     5 |    0 |    177 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    239 |    251 |      21 |       6 |       0 |       8 |      8 |      6 |      0 |      1 |      3 |      1 |      0 |      3 |      4 |      2 |      0 |      1 |     25 |     19 |      0 |     81 |     24 |      3 |      0 |     13 |      11 |       4 |       0 |       4 |     12 |     10 |      0 |      3 |        2 |        5 |       31 |       29 |        9 |       10 |       0 |        5 |       17 |       39 |       29 |       12 |       11 |       0 |        3 |        7 |       19 |       18 |        8 |        5 |       0 |        2 |        7 |       16 |        8 |        8 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       16 |       44 |       15 |        7 |        5 |       0 |        2 |       16 |       47 |       18 |        3 |        6 |       0 |      0 |      0 |     21 |     30 |     27 |     16 |     24 |     81 |      0 |      0 |      1 |     10 |     14 |     15 |     13 |     12 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     40 |      9 |      7 |      5 |    101 |      0 |      1 | s03      | R    |
| 83031000 |    554 |    201 |    116 |    10 |    0 |    224 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    283 |    271 |      14 |      24 |       0 |       8 |      3 |      0 |      0 |      2 |      2 |      0 |      0 |      6 |      1 |      2 |      0 |      1 |     31 |     20 |      0 |    107 |     36 |      4 |      0 |     25 |      14 |      10 |       0 |       7 |      6 |     12 |      0 |     10 |        4 |        7 |       37 |       32 |        7 |        4 |       1 |       10 |       19 |       43 |       26 |        7 |        4 |       0 |        8 |        8 |       27 |       21 |        5 |        4 |       0 |        4 |        9 |       11 |       14 |        1 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |       16 |       56 |       26 |        9 |        9 |       0 |        7 |       24 |       51 |       23 |        7 |        7 |       0 |      0 |      2 |     10 |     42 |     26 |     14 |     11 |     96 |      0 |      0 |      2 |     15 |     26 |     20 |      8 |      8 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     47 |     20 |      3 |      4 |    140 |      0 |      1 | s03      | R    |
| 83040002 |      8 |      2 |      0 |     0 |    0 |      5 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 83050000 |    862 |    349 |    201 |    11 |    0 |    289 |    5 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    442 |    420 |      48 |      23 |       0 |      25 |      9 |      2 |      0 |      2 |     12 |      1 |      0 |      6 |      8 |      3 |      0 |      1 |     41 |     39 |      0 |    102 |     32 |     10 |      0 |     31 |      11 |       3 |       0 |      16 |     24 |     26 |      0 |     19 |        5 |       22 |       53 |       47 |       21 |        4 |       0 |       14 |       32 |       65 |       53 |       25 |        8 |       0 |        4 |       11 |       48 |       34 |       17 |        9 |       0 |        3 |        7 |       24 |       27 |       13 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       25 |       78 |       29 |       15 |        9 |       0 |       16 |       21 |       52 |       35 |       13 |        7 |       1 |      0 |      3 |     36 |     76 |     40 |     17 |     24 |    153 |      0 |      0 |      4 |     20 |     39 |     35 |     24 |     25 |     54 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     35 |     61 |     25 |      5 |     11 |    175 |      0 |      1 | s03      | R    |
| 83060000 |    401 |    168 |     71 |     9 |    0 |    147 |    2 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    182 |    219 |      17 |       6 |       0 |      10 |     11 |      2 |      0 |      2 |      4 |      1 |      0 |      2 |      3 |      1 |      0 |      4 |     11 |     12 |      0 |     38 |     10 |      0 |      0 |      9 |       3 |       0 |       0 |       6 |      6 |      3 |      0 |      6 |        3 |       10 |       26 |       20 |        5 |        3 |       0 |        5 |       29 |       24 |       32 |        9 |        2 |       0 |        2 |       12 |       12 |       11 |        1 |        0 |       0 |        2 |       13 |        6 |        7 |        3 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       19 |       32 |       10 |        4 |        4 |       0 |        8 |       24 |       30 |       13 |        5 |        5 |       0 |      0 |      2 |     15 |     37 |      7 |      9 |      8 |     90 |      0 |      0 |      0 |      3 |     13 |      6 |      3 |      2 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     23 |      7 |      3 |      1 |    111 |      0 |      1 | s03      | R    |
| 83070000 |    600 |    265 |    129 |    11 |    0 |    188 |    3 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    290 |    310 |      33 |      11 |       0 |      20 |     12 |      2 |      0 |      4 |      4 |      2 |      0 |      5 |      4 |      0 |      0 |      4 |     36 |     15 |      0 |     65 |     20 |      4 |      0 |     24 |       4 |       6 |       0 |       8 |     17 |      8 |      0 |      8 |        5 |       14 |       38 |       37 |       18 |       11 |       0 |        8 |       27 |       44 |       36 |       13 |       13 |       1 |        3 |        5 |       23 |       25 |        8 |        3 |       0 |        2 |        7 |       20 |       14 |       15 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       16 |       34 |       28 |        7 |       11 |       0 |        8 |       16 |       36 |       26 |       11 |        8 |       1 |      0 |      0 |     24 |     35 |     20 |     13 |     37 |    136 |      0 |      0 |      0 |      9 |     27 |     11 |     13 |     20 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     36 |     40 |      8 |      8 |      8 |    105 |      0 |      1 | s03      | R    |
| 83080000 |    283 |    122 |     65 |     4 |    0 |     88 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    145 |    138 |      12 |       3 |       0 |      10 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      9 |      0 |      0 |     23 |      9 |      1 |      0 |     11 |      13 |       1 |       0 |       4 |      5 |      7 |      0 |     13 |        4 |       10 |       17 |       15 |       11 |        3 |       0 |        1 |        8 |       25 |       15 |        9 |        4 |       0 |        1 |        5 |       13 |        7 |        7 |        5 |       0 |        1 |        3 |       12 |        5 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        5 |       21 |       10 |        3 |        3 |       0 |        6 |        8 |       15 |       10 |        2 |        7 |       1 |      0 |      1 |     12 |     33 |     20 |      4 |      3 |     49 |      0 |      0 |      0 |      7 |     11 |     10 |      2 |     11 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     18 |      6 |      2 |      3 |     56 |      0 |      1 | s03      | R    |
| 83100000 |    775 |    396 |    155 |    11 |    0 |    205 |    6 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    372 |    403 |     104 |      21 |       0 |      36 |      4 |      2 |      0 |      1 |      2 |      0 |      0 |      1 |      2 |      1 |      0 |      2 |     22 |     12 |      0 |     34 |     19 |      7 |      0 |     10 |       3 |       4 |       0 |      14 |     24 |     11 |      0 |     16 |        9 |       22 |       31 |       39 |       45 |       19 |       0 |       19 |       48 |       33 |       49 |       51 |       28 |       3 |        5 |       13 |       19 |       13 |       26 |       12 |       1 |        3 |        8 |       17 |       19 |       12 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       34 |       24 |       21 |       12 |       13 |       1 |       19 |       20 |       18 |       18 |       19 |       12 |       0 |      0 |      3 |     30 |     69 |     23 |     17 |     37 |    217 |      0 |      0 |      0 |     13 |     35 |     15 |      4 |     14 |     74 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     39 |      7 |      5 |      5 |    145 |      0 |      1 | s03      | R    |
| 83110000 |    663 |    349 |    142 |    14 |    0 |    154 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    342 |    321 |      77 |      17 |       0 |      25 |     15 |      9 |      0 |      1 |      3 |      0 |      0 |     10 |      3 |      0 |      0 |      2 |     32 |     10 |      0 |     40 |     15 |      7 |      0 |     16 |       6 |       7 |       0 |       3 |     25 |      9 |      0 |      6 |        9 |       25 |       40 |       49 |       24 |       11 |       8 |       13 |       30 |       37 |       44 |       26 |       24 |       9 |        6 |       13 |       24 |       25 |        8 |        6 |       3 |        3 |        8 |       18 |       12 |        7 |        5 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       14 |       19 |       21 |       11 |       14 |       1 |       10 |       18 |       23 |       18 |        8 |        4 |       0 |      0 |      2 |     43 |     60 |     32 |      8 |     16 |    188 |      0 |      0 |      1 |      8 |     35 |     13 |      8 |     15 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     29 |     35 |      9 |      2 |      0 |     93 |      0 |      1 | s03      | R    |
| 83120000 |    882 |    370 |    260 |    14 |    0 |    230 |    5 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    446 |    436 |      50 |      24 |       0 |      23 |     12 |      6 |      0 |      4 |      5 |      8 |      0 |      9 |      7 |      6 |      0 |      0 |     52 |     54 |      0 |     96 |     31 |      5 |      0 |     18 |       4 |       9 |       0 |       7 |     16 |     12 |      0 |      8 |       13 |       16 |       39 |       57 |       33 |       11 |       0 |       24 |       28 |       43 |       58 |       31 |       16 |       1 |       10 |       13 |       24 |       49 |       35 |       11 |       1 |       11 |        5 |       21 |       43 |       26 |        9 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       31 |       31 |       29 |       18 |       11 |       0 |       12 |       17 |       29 |       35 |       19 |        6 |       0 |      0 |      1 |     27 |     55 |     38 |     17 |     38 |    194 |      0 |      0 |      0 |     22 |     48 |     23 |     15 |     41 |    111 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     38 |     50 |     25 |      6 |      9 |    121 |      0 |      1 | s03      | R    |
| 83121000 |    657 |    333 |    169 |    13 |    0 |    136 |    0 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    327 |    330 |      64 |      14 |       0 |      16 |     16 |      9 |      0 |      6 |      3 |      1 |      0 |     10 |      1 |      0 |      0 |      1 |     13 |      5 |      0 |     16 |      6 |      2 |      0 |      2 |       4 |       4 |       0 |       4 |      7 |      2 |      0 |      3 |        4 |       23 |       28 |       29 |       36 |       14 |      14 |        8 |       27 |       41 |       45 |       34 |       12 |      18 |        6 |       15 |       25 |       16 |       23 |        5 |       4 |        5 |       11 |       18 |       12 |       15 |        6 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       24 |       14 |       18 |       13 |        4 |       3 |       10 |       14 |       13 |       24 |        6 |        2 |       1 |      0 |      1 |     27 |     43 |     45 |     15 |     21 |    181 |      0 |      0 |      0 |     16 |     32 |     12 |     10 |     11 |     88 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     31 |      4 |      3 |      2 |     92 |      0 |      1 | s03      | R    |
| 83122000 |     12 |      6 |      5 |     0 |    0 |      0 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 83123000 |    785 |    371 |    189 |    16 |    0 |    193 |    6 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    406 |    379 |      65 |      23 |       0 |      21 |     12 |      6 |      0 |     10 |      2 |      0 |      0 |      4 |      2 |      0 |      0 |      4 |     35 |     16 |      0 |     41 |     17 |      2 |      0 |     13 |       6 |       9 |       0 |       7 |     23 |      7 |      0 |      6 |       10 |       33 |       41 |       38 |       34 |       21 |       3 |       14 |       36 |       42 |       37 |       38 |       22 |       2 |        9 |       18 |       24 |       26 |       19 |       12 |       2 |        4 |       17 |       13 |       20 |       13 |       10 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       23 |       38 |       21 |       17 |        7 |       1 |       11 |       24 |       32 |       23 |       13 |        6 |       0 |      0 |      5 |     40 |     70 |     24 |      7 |     16 |    209 |      0 |      0 |      1 |     14 |     52 |     14 |      8 |      8 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     24 |     33 |     18 |      4 |      6 |    135 |      0 |      1 | s03      | R    |
| 83130000 |    606 |    313 |    158 |    10 |    0 |    121 |    2 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    302 |    304 |      59 |      15 |       0 |      14 |      7 |      9 |      0 |      4 |      3 |      1 |      0 |      1 |      1 |      2 |      0 |      1 |      8 |     11 |      0 |     11 |     18 |      1 |      0 |      7 |       0 |       1 |       0 |       4 |      2 |      2 |      0 |      6 |        8 |       26 |       26 |       36 |       18 |       12 |      11 |       13 |       26 |       32 |       42 |       31 |       13 |      19 |        9 |       11 |       23 |       13 |       12 |        7 |       5 |        7 |        9 |       18 |       14 |       16 |        6 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       14 |       22 |       20 |       13 |        4 |       1 |        7 |       14 |       17 |        7 |        4 |        0 |       1 |      0 |      0 |     27 |     42 |     30 |     15 |      5 |    194 |      0 |      0 |      2 |     16 |     31 |      9 |      2 |      5 |     93 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     23 |      9 |      0 |      4 |     78 |      0 |      1 | s03      | R    |
| 83131000 |    672 |    304 |    177 |    13 |    0 |    167 |    4 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    340 |    332 |      57 |      13 |       0 |      18 |      7 |     10 |      0 |      1 |      0 |      4 |      0 |      2 |      5 |      0 |      0 |      1 |     25 |     14 |      0 |     58 |     15 |      5 |      0 |     14 |       6 |       6 |       0 |       1 |     22 |      8 |      0 |     11 |       14 |       30 |       25 |       27 |       33 |       15 |       6 |       14 |       25 |       30 |       26 |       32 |       20 |       7 |        4 |        7 |       24 |       18 |       17 |       17 |       2 |        0 |       12 |       27 |       18 |       16 |       11 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       30 |       21 |       12 |       19 |       10 |       1 |       10 |       20 |       22 |       18 |       11 |        9 |       0 |      0 |      4 |     24 |     67 |     18 |      8 |     13 |    170 |      0 |      0 |      0 |     11 |     50 |     12 |      4 |     15 |     85 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     42 |      9 |      7 |      4 |    101 |      0 |      1 | s03      | R    |
| 83140000 |    668 |    329 |    142 |    22 |    0 |    163 |    6 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    315 |    353 |      54 |       8 |       0 |      28 |      7 |      4 |      0 |      9 |      2 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     19 |      7 |      0 |     40 |      9 |      3 |      0 |      8 |       5 |       4 |       0 |       4 |     18 |      9 |      0 |     10 |       13 |       21 |       27 |       33 |       24 |       19 |       4 |       15 |       32 |       26 |       48 |       38 |       22 |       7 |        2 |       11 |       17 |       14 |       17 |       12 |       3 |        3 |        9 |       20 |       13 |        8 |       12 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       24 |       21 |       23 |       13 |        9 |       1 |        8 |       24 |       19 |       24 |       12 |       11 |       1 |      0 |      3 |     41 |     50 |     20 |     10 |     15 |    190 |      0 |      0 |      0 |     11 |     35 |     11 |      4 |      8 |     73 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     24 |     52 |      7 |      9 |      3 |    100 |      0 |      1 | s03      | R    |
| 83141000 |    807 |    403 |    184 |    24 |    0 |    192 |    0 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    382 |    425 |      68 |      26 |       0 |      25 |     11 |      3 |      0 |      6 |      1 |      2 |      0 |      3 |      8 |      5 |      0 |      3 |     36 |      9 |      0 |     53 |     31 |      8 |      0 |     18 |       8 |       6 |       0 |       3 |     25 |      6 |      0 |     10 |        7 |       30 |       41 |       41 |       26 |       21 |       6 |       22 |       42 |       50 |       50 |       40 |       21 |       6 |        6 |       16 |       24 |       24 |       12 |       12 |       2 |        8 |       13 |       25 |       20 |       12 |        8 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       23 |       28 |       16 |       19 |       11 |       2 |       17 |       23 |       19 |       26 |       15 |        5 |       1 |      0 |      2 |     44 |     97 |     26 |      6 |     20 |    208 |      0 |      0 |      1 |     17 |     39 |     12 |     15 |      8 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     28 |     40 |      7 |      0 |      7 |    134 |      0 |      1 | s03      | R    |
| 83150000 |    818 |    387 |    250 |    12 |    0 |    162 |    6 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    383 |    435 |      48 |      18 |       0 |      14 |     13 |     15 |      0 |      5 |      6 |      2 |      0 |      6 |     11 |      3 |      0 |      7 |     32 |     15 |      0 |     21 |      7 |      4 |      0 |     14 |       5 |       1 |       0 |       5 |     19 |     12 |      0 |     11 |       10 |       26 |       28 |       27 |       29 |       30 |      15 |       18 |       34 |       49 |       40 |       30 |       27 |      24 |       11 |       15 |       26 |       32 |       25 |        9 |       5 |        8 |       20 |       31 |       26 |       22 |       14 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       16 |       25 |       17 |       19 |        9 |       1 |       17 |       15 |       18 |       15 |       16 |        4 |       1 |      0 |      1 |     29 |     53 |     30 |     12 |     11 |    251 |      0 |      0 |      0 |     18 |     46 |     24 |     13 |     16 |    133 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     41 |      9 |      3 |      9 |     92 |      0 |      1 | s03      | R    |
| 83151000 |    759 |    393 |    212 |    17 |    0 |    128 |    3 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    367 |    392 |      78 |      19 |       0 |      22 |      7 |      9 |      0 |      2 |      3 |      1 |      0 |      2 |      8 |      4 |      0 |      1 |     14 |      4 |      0 |     15 |      3 |      3 |      0 |      5 |       2 |       3 |       0 |       2 |     12 |      1 |      0 |     10 |       10 |       22 |       24 |       40 |       48 |       22 |      17 |       14 |       47 |       32 |       43 |       32 |       22 |      20 |        6 |       11 |       24 |       21 |       25 |        9 |      11 |        7 |        9 |       16 |       23 |       23 |       15 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       13 |       26 |       10 |       12 |        9 |       2 |       13 |       10 |       24 |       10 |       11 |        8 |       1 |      0 |      2 |     22 |     57 |     34 |     15 |     32 |    231 |      0 |      0 |      1 |     14 |     30 |     17 |     12 |     14 |    124 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     29 |      7 |      5 |      7 |     83 |      0 |      1 | s03      | R    |
| 83160000 |    634 |    298 |    209 |    21 |    0 |    100 |    1 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    299 |    335 |      39 |      16 |       0 |       9 |      7 |      2 |      0 |      1 |      4 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |     23 |      4 |      0 |     22 |      7 |      3 |      0 |      3 |       1 |       0 |       0 |       4 |     12 |      1 |      0 |      3 |        7 |       19 |       29 |       20 |       20 |       14 |      15 |       10 |       34 |       25 |       36 |       23 |       28 |      18 |        5 |       19 |       14 |       16 |       28 |       13 |      15 |        2 |       16 |       18 |       15 |       23 |        9 |      16 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       11 |       14 |       17 |        7 |        7 |       2 |        7 |       13 |       18 |       12 |        6 |        6 |       0 |      0 |      2 |     29 |     56 |     20 |     11 |     20 |    160 |      0 |      0 |      1 |     10 |     30 |     15 |      9 |     12 |    132 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     26 |     31 |      3 |      5 |      1 |     59 |      0 |      1 | s03      | R    |
| 83161000 |    517 |    244 |    139 |    10 |    0 |    120 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    280 |      32 |      15 |       0 |      13 |      9 |      8 |      0 |      5 |      2 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |      3 |     15 |      0 |     22 |     13 |      3 |      0 |      6 |       4 |       2 |       0 |       4 |     11 |      4 |      0 |      4 |        8 |       11 |       16 |       17 |       24 |       23 |       6 |        7 |       27 |       20 |       38 |       20 |       21 |       6 |        6 |       11 |       10 |       20 |       15 |       12 |       2 |        3 |        9 |       10 |       16 |       12 |       11 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       12 |       12 |       13 |        6 |        7 |       0 |       11 |       11 |       23 |       17 |        7 |        9 |       0 |      0 |      0 |     33 |     39 |     18 |      6 |      7 |    141 |      0 |      0 |      0 |     14 |     26 |      5 |     10 |     10 |     74 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     16 |     36 |     11 |      1 |      6 |     62 |      0 |      1 | s03      | R    |
| 83166000 |    534 |    228 |    160 |    11 |    0 |    132 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    267 |    267 |      35 |       6 |       0 |      12 |      6 |      1 |      0 |      6 |      8 |      6 |      0 |      3 |      3 |      6 |      0 |      3 |     34 |     33 |      0 |     54 |     17 |      3 |      0 |     12 |       5 |       1 |       0 |       6 |      9 |     10 |      0 |      8 |        8 |       14 |       18 |       30 |       24 |       12 |       1 |        8 |       23 |       22 |       32 |       17 |       18 |       1 |        4 |       10 |       13 |       19 |       22 |       16 |       1 |        4 |        6 |       11 |       23 |       27 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       11 |        9 |       18 |       20 |        6 |       1 |       11 |        8 |       11 |       25 |       12 |        3 |       1 |      0 |      2 |     10 |     36 |     23 |     12 |     16 |    129 |      0 |      0 |      0 |     13 |     35 |      4 |      9 |     14 |     85 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     27 |     14 |      3 |      6 |     75 |      0 |      1 | s03      | R    |
| 83170000 |    723 |    320 |    167 |    10 |    0 |    208 |    5 |    1 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    361 |    362 |      31 |      15 |       0 |      23 |      8 |      7 |      0 |      5 |      2 |      0 |      0 |      6 |      3 |      5 |      0 |      1 |     31 |     19 |      0 |     58 |     19 |      3 |      0 |     13 |       3 |       1 |       0 |       3 |     14 |      7 |      0 |      7 |        4 |       35 |       35 |       41 |       24 |       11 |       4 |        5 |       50 |       38 |       36 |       21 |       10 |       6 |        4 |       18 |       17 |       17 |       22 |       11 |       0 |        5 |       19 |        9 |       14 |       14 |       13 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       35 |       42 |       13 |        9 |        8 |       1 |       11 |       30 |       34 |       24 |       16 |        3 |       0 |      0 |      2 |     23 |     42 |     19 |      4 |      9 |    221 |      0 |      0 |      0 |     14 |     30 |     10 |      5 |     12 |     96 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     24 |     40 |      4 |      1 |      6 |    157 |      0 |      1 | s03      | R    |
| 83171000 |    545 |    262 |    119 |    18 |    0 |    132 |    6 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    233 |    312 |      56 |       7 |       0 |      14 |      9 |      6 |      0 |      9 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      5 |      2 |      0 |      2 |      5 |      2 |      0 |      9 |       0 |       1 |       0 |       4 |      1 |      3 |      0 |     13 |        6 |       19 |       27 |       23 |       13 |        6 |       2 |       10 |       35 |       48 |       34 |       26 |       12 |       1 |        1 |       23 |       19 |        9 |        5 |        5 |       0 |        1 |       17 |       15 |       13 |        7 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       22 |       22 |       10 |       10 |        3 |       0 |       11 |       35 |       21 |       14 |        6 |        2 |       0 |      0 |      2 |     28 |     42 |      9 |     13 |      9 |    159 |      0 |      0 |      1 |     13 |     13 |      5 |      7 |      4 |     76 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     29 |     14 |      2 |      2 |      2 |    112 |      0 |      1 | s03      | R    |
| 83180000 |    729 |    422 |    152 |    18 |    0 |    129 |    2 |    3 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    357 |    372 |      85 |      18 |       0 |      30 |     14 |      4 |      0 |      5 |      4 |      1 |      0 |      2 |      7 |      1 |      0 |      0 |     19 |     10 |      0 |     19 |     19 |      0 |      0 |      3 |       7 |       8 |       0 |       5 |      8 |      2 |      0 |      2 |        8 |       26 |       42 |       46 |       36 |       15 |      16 |       16 |       30 |       51 |       45 |       40 |       23 |      28 |        7 |       11 |       20 |       18 |       13 |        9 |       8 |        2 |        7 |       18 |       16 |        6 |        9 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       18 |       26 |       16 |        6 |        5 |       2 |       11 |       20 |       22 |       11 |        5 |        3 |       1 |      0 |      3 |     44 |     63 |     36 |     12 |     23 |    241 |      0 |      0 |      2 |      9 |     32 |     11 |      6 |      9 |     83 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     23 |     27 |      5 |      0 |      0 |     95 |      0 |      1 | s03      | R    |
| 83181000 |    606 |    375 |    132 |     4 |    0 |     88 |    1 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    287 |    319 |      87 |      10 |       0 |      17 |      3 |      3 |      0 |      2 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |     11 |      2 |      0 |      7 |     11 |      4 |      0 |      3 |       6 |       2 |       0 |       0 |      2 |      5 |      0 |      2 |        8 |       22 |       26 |       39 |       26 |       21 |      25 |       23 |       36 |       30 |       40 |       29 |       22 |      28 |        5 |        8 |       19 |       13 |        9 |        8 |      12 |        4 |        6 |        7 |       17 |        6 |        3 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        9 |       12 |       10 |        2 |        4 |       1 |        7 |       13 |       15 |        8 |        6 |        3 |       1 |      0 |      3 |     26 |     62 |     36 |     10 |     10 |    228 |      0 |      0 |      0 |     11 |     12 |     10 |      6 |     13 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     13 |     15 |      6 |      4 |      1 |     59 |      0 |      1 | s03      | R    |
| 83182000 |    417 |    212 |    125 |    10 |    0 |     65 |    1 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    176 |    241 |      51 |       9 |       0 |       6 |     15 |      6 |      0 |      4 |      1 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      7 |      3 |      0 |     14 |      5 |      1 |      0 |      1 |       1 |       1 |       0 |       5 |     10 |      3 |      0 |      1 |        4 |       11 |       20 |       11 |       16 |       13 |      11 |        7 |       17 |       29 |       18 |       16 |       22 |      17 |        1 |        9 |       11 |       20 |        5 |        9 |       3 |        0 |        5 |        9 |       21 |       15 |        9 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        6 |        6 |        6 |        8 |        1 |       0 |       10 |       13 |       10 |        7 |        6 |        2 |       0 |      0 |      0 |     25 |     34 |     11 |      6 |     12 |    124 |      0 |      0 |      1 |      7 |     16 |     10 |      4 |      6 |     81 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      8 |     11 |      4 |      1 |      2 |     52 |      0 |      1 | s03      | R    |
| 83183000 |    484 |    280 |    105 |     7 |    0 |     81 |    4 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    245 |    239 |      75 |       5 |       0 |      21 |     13 |      9 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      1 |      0 |      4 |      5 |      1 |      0 |      3 |       1 |       0 |       0 |       4 |      9 |      2 |      0 |      4 |       14 |       13 |       21 |       36 |       15 |       16 |      19 |       12 |       21 |       25 |       36 |       17 |       10 |      25 |        4 |       14 |       14 |       17 |        6 |        4 |       2 |        2 |        7 |        9 |       11 |        2 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       13 |       14 |       10 |        2 |        2 |       3 |       13 |       11 |        5 |       13 |        2 |        5 |       0 |      0 |      2 |     18 |     47 |     18 |      5 |     18 |    172 |      0 |      0 |      1 |      7 |     19 |      6 |      2 |      2 |     68 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     24 |      1 |      0 |      0 |     58 |      0 |      1 | s03      | R    |
| 83190000 |    601 |    272 |    157 |    18 |    0 |    144 |    4 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    291 |    310 |      41 |      19 |       0 |      20 |      8 |     11 |      0 |      3 |      1 |      1 |      0 |      8 |      0 |      0 |      0 |      1 |      7 |      6 |      0 |     31 |      8 |      5 |      0 |      6 |       2 |       0 |       0 |       4 |      4 |      1 |      0 |      4 |       14 |       10 |       30 |       24 |       12 |       16 |      11 |       13 |       23 |       38 |       30 |       17 |       17 |      17 |        2 |        7 |       17 |       24 |       11 |       13 |       6 |        7 |        8 |       18 |       11 |        9 |       12 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       16 |       32 |       11 |        6 |       15 |       0 |        9 |       18 |       20 |       12 |        5 |       14 |       0 |      0 |      1 |     26 |     34 |     17 |     11 |     14 |    169 |      0 |      0 |      0 |     14 |     24 |      4 |      5 |     17 |     93 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     17 |     25 |      5 |      3 |      5 |    114 |      0 |      1 | s03      | R    |
| 83191000 |    631 |    326 |    170 |     8 |    0 |    118 |    3 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    277 |    354 |      58 |      16 |       0 |      19 |      5 |     10 |      0 |      4 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |     13 |      3 |      0 |      0 |      3 |       2 |       0 |       0 |       5 |     12 |      4 |      0 |      5 |       11 |       17 |       28 |       28 |       10 |       14 |      17 |       15 |       23 |       42 |       45 |       22 |       26 |      28 |        7 |        8 |       20 |       25 |        8 |       13 |       9 |        5 |       13 |       15 |       17 |        9 |       12 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        9 |       19 |       11 |        8 |        8 |       1 |       15 |       12 |       21 |       13 |        7 |        3 |       2 |      0 |      3 |     28 |     42 |     20 |     13 |     18 |    202 |      0 |      0 |      0 |      9 |     40 |     12 |      4 |     10 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     20 |     18 |      4 |      0 |      3 |     88 |      0 |      1 | s03      | R    |
| 83192000 |    683 |    360 |    148 |    11 |    0 |    151 |    4 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    327 |    356 |      66 |      21 |       0 |      32 |      3 |      4 |      0 |      3 |      3 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      9 |      3 |      0 |     17 |     20 |      3 |      0 |      8 |      13 |       1 |       0 |       3 |     17 |      3 |      0 |      9 |       13 |       25 |       36 |       40 |       27 |       16 |       3 |       16 |       39 |       44 |       48 |       20 |       23 |      10 |        7 |       10 |       14 |       15 |       13 |        8 |       8 |        7 |        8 |        9 |        9 |       20 |       11 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       27 |       14 |       22 |       11 |        7 |       1 |       11 |       29 |       17 |       14 |        8 |        4 |       0 |      0 |      2 |     58 |     59 |     24 |      4 |     11 |    202 |      0 |      0 |      2 |     16 |     25 |      6 |      8 |      7 |     84 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     32 |     25 |     12 |      1 |      2 |    101 |      0 |      1 | s03      | R    |
| 83193000 |    675 |    350 |    170 |     9 |    0 |    135 |    1 |    2 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    326 |    349 |      69 |      22 |       0 |      12 |      7 |      4 |      0 |      1 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      6 |      0 |      7 |     12 |      0 |      0 |      4 |       3 |       1 |       0 |       4 |     12 |      4 |      0 |      5 |        7 |       19 |       34 |       31 |       31 |       17 |      20 |       19 |       30 |       53 |       31 |       19 |       23 |      16 |        8 |       13 |       27 |       19 |       12 |        6 |       3 |       12 |       11 |       16 |       13 |       12 |       12 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       18 |       22 |       13 |        5 |        8 |       2 |       10 |       19 |       23 |       12 |        4 |        7 |       1 |      0 |      2 |     43 |     41 |     34 |     12 |     15 |    203 |      0 |      0 |      1 |     17 |     21 |      6 |     10 |     10 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     16 |     24 |      9 |      0 |      4 |     99 |      0 |      1 | s03      | R    |
| 83200000 |    890 |    415 |    206 |    23 |    0 |    231 |    3 |    3 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    451 |    439 |      68 |      15 |       0 |      28 |     14 |      6 |      0 |      5 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     10 |     13 |      0 |     48 |     24 |      3 |      0 |     16 |       3 |       4 |       0 |      12 |     26 |      4 |      0 |     10 |       12 |       21 |       49 |       45 |       24 |       15 |      23 |       14 |       45 |       51 |       44 |       22 |       28 |      22 |        9 |       19 |       32 |       24 |       19 |        3 |       6 |        5 |       22 |       26 |       19 |        9 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       33 |       45 |       27 |       19 |       12 |       0 |       15 |       33 |       28 |       26 |       10 |        6 |       1 |      0 |      0 |     45 |     60 |     25 |     13 |     14 |    258 |      0 |      0 |      0 |     26 |     44 |      7 |      6 |      9 |    114 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     47 |     30 |     11 |      5 |      3 |    168 |      0 |      1 | s03      | R    |
| 83201000 |    768 |    429 |    174 |    13 |    0 |    139 |    6 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    366 |    402 |     119 |      14 |       0 |      22 |      5 |     10 |      0 |      4 |      5 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |     13 |      7 |      0 |     16 |     21 |      4 |      0 |      5 |       0 |       1 |       0 |       4 |     19 |      8 |      0 |      9 |       15 |       30 |       42 |       48 |       19 |       32 |      17 |       14 |       30 |       61 |       35 |       30 |       34 |      22 |        2 |       15 |       34 |       17 |        8 |        7 |       5 |        7 |       10 |       28 |       11 |        8 |       16 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       18 |       25 |       11 |        8 |        5 |       0 |        9 |       23 |       22 |       17 |        8 |       11 |       0 |      0 |      2 |     67 |     55 |     28 |      9 |     27 |    241 |      0 |      0 |      0 |     17 |     28 |     11 |     11 |      9 |     98 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     29 |     22 |      8 |      1 |      4 |    100 |      0 |      1 | s03      | R    |
| 83210000 |    522 |    262 |    118 |    17 |    0 |    109 |    8 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    255 |    267 |      56 |       3 |       0 |      12 |     13 |      4 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      4 |      0 |     14 |     14 |      5 |      0 |      3 |       5 |       1 |       0 |       0 |      4 |      1 |      0 |      6 |        7 |       21 |       32 |       26 |       13 |       15 |       6 |       16 |       24 |       30 |       29 |       17 |       16 |      10 |        3 |        8 |       17 |       13 |       11 |        5 |       7 |        4 |        5 |       15 |        8 |        4 |       12 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       20 |       19 |       10 |        9 |        7 |       1 |        8 |       16 |       16 |       15 |       10 |        4 |       2 |      0 |      2 |     26 |     44 |     10 |      8 |      7 |    165 |      0 |      0 |      0 |     14 |     15 |      8 |     13 |      3 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     16 |      3 |      0 |      4 |     96 |      0 |      1 | s03      | R    |
| 83211000 |    644 |    262 |    230 |    14 |    0 |    127 |    4 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    310 |    334 |      17 |      18 |       0 |       9 |     11 |     10 |      0 |      6 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      3 |      8 |      3 |      0 |     13 |      6 |      1 |      0 |      2 |       3 |       0 |       0 |       7 |     11 |      7 |      0 |      5 |        7 |       12 |       29 |       26 |       19 |       13 |       9 |        5 |       16 |       32 |       30 |       22 |       21 |      21 |        5 |        9 |       26 |       19 |       19 |       20 |      20 |        3 |        8 |       16 |       22 |       14 |       23 |      26 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       21 |       20 |       11 |        6 |        8 |       2 |       10 |       17 |       16 |       12 |       11 |        7 |       2 |      0 |      0 |     13 |     30 |     19 |      9 |     22 |    169 |      0 |      0 |      3 |     22 |     24 |     16 |     12 |     11 |    142 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     18 |     16 |     12 |      6 |      4 |     95 |      0 |      1 | s03      | R    |
| 83220000 |    584 |    228 |    231 |    10 |    0 |    112 |    3 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    279 |    305 |      16 |      12 |       0 |       9 |     11 |      9 |      0 |      3 |      1 |      2 |      0 |      1 |      2 |      0 |      0 |      1 |      6 |      9 |      0 |     20 |      2 |      0 |      0 |      6 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        1 |        6 |       23 |       22 |       13 |       15 |      18 |        6 |        9 |       24 |       25 |       18 |       28 |      20 |        3 |        5 |       36 |       23 |        6 |       24 |      21 |        4 |        2 |       16 |       23 |        6 |       29 |      33 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        6 |       23 |       16 |        6 |        4 |       3 |        6 |        7 |       18 |       23 |        6 |        2 |       0 |      0 |      2 |     13 |     27 |     13 |      5 |     16 |    152 |      0 |      0 |      3 |      7 |     44 |      3 |      7 |      9 |    158 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     13 |     15 |      1 |      2 |      4 |     87 |      0 |      1 | s03      | R    |
| 83221001 |    167 |     70 |     38 |     3 |    0 |     52 |    3 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     83 |     84 |       9 |       3 |       0 |       2 |      3 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      9 |      3 |      1 |      0 |      5 |       0 |       1 |       0 |       2 |      1 |      1 |      0 |      0 |        0 |        6 |       10 |        7 |        3 |        5 |       1 |        4 |        7 |        8 |        7 |        6 |        5 |       1 |        3 |        5 |        6 |        7 |        0 |        2 |       1 |        1 |        2 |        4 |        2 |        2 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        8 |        6 |        6 |        4 |        2 |       0 |        6 |       10 |        9 |        1 |        5 |        1 |       0 |      0 |      2 |     12 |     11 |      5 |      1 |      0 |     39 |      0 |      0 |      0 |      7 |      9 |      2 |      1 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |      3 |      0 |      1 |      1 |     44 |      0 |      1 | s03      | R    |
| 83221002 |    280 |    146 |     76 |     4 |    0 |     51 |    1 |    2 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    134 |    146 |      14 |       4 |       0 |       3 |      7 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      3 |      1 |      0 |      8 |      5 |      1 |      0 |      3 |       2 |       1 |       0 |       5 |      5 |      0 |      0 |      0 |        0 |       10 |       13 |       13 |        9 |       11 |       8 |        7 |       11 |       15 |       20 |        5 |       14 |      10 |        1 |        1 |        8 |       12 |        6 |        4 |       4 |        0 |        2 |       11 |        8 |        8 |        3 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        2 |        7 |        5 |        7 |        4 |       2 |        0 |        3 |        7 |        6 |        1 |        7 |       0 |      0 |      0 |     15 |     22 |     10 |      4 |     13 |     82 |      0 |      0 |      0 |      9 |      7 |      7 |      6 |      5 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |      7 |      3 |      1 |      0 |     35 |      0 |      1 | s03      | R    |
| 83230000 |    619 |    298 |    205 |    10 |    0 |     97 |    3 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    292 |    327 |      59 |      12 |       0 |      13 |     11 |      6 |      0 |      3 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      1 |      6 |      1 |      0 |      5 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      5 |      7 |      0 |      3 |        6 |       17 |       19 |       35 |       13 |       11 |      25 |       11 |       14 |       33 |       35 |       23 |       19 |      37 |        3 |        8 |       24 |       30 |       10 |       14 |      10 |        8 |       10 |       22 |       25 |       11 |        7 |      23 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       11 |       13 |       17 |        7 |        3 |       1 |        5 |        9 |       13 |        9 |        5 |        6 |       2 |      0 |      1 |     21 |     48 |     20 |      5 |     11 |    192 |      0 |      0 |      1 |     17 |     37 |      9 |      3 |     11 |    127 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     17 |      4 |      1 |      4 |     75 |      0 |      1 | s03      | R    |
| 83231000 |    582 |    243 |    252 |     8 |    0 |     73 |    2 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    274 |    308 |      19 |      16 |       0 |       7 |      8 |      4 |      0 |      2 |      0 |      2 |      0 |      0 |      3 |      3 |      0 |      1 |      2 |      5 |      0 |      9 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        6 |        6 |        9 |       25 |       20 |        9 |      22 |        5 |        6 |       23 |       38 |       26 |       21 |      27 |        7 |        7 |       26 |       33 |       13 |       18 |      22 |        3 |        7 |       32 |       24 |       13 |       24 |      23 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        8 |       14 |       10 |        6 |        4 |       0 |        6 |        5 |       12 |       10 |        1 |        2 |       0 |      0 |      1 |     16 |     29 |     20 |     11 |     14 |    152 |      0 |      0 |      1 |     13 |     37 |     17 |     20 |     14 |    150 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     15 |      7 |      1 |      2 |     53 |      0 |      1 | s03      | R    |
| 83240001 |    516 |    224 |    169 |    10 |    0 |    103 |    7 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    247 |    269 |      24 |      16 |       0 |      12 |     17 |      6 |      0 |      2 |      2 |      2 |      0 |      1 |      2 |      0 |      0 |      2 |      4 |      0 |      0 |      9 |      3 |      1 |      0 |      3 |       3 |       3 |       0 |       7 |      6 |      2 |      0 |      1 |        8 |        9 |       19 |       22 |        9 |       11 |      17 |        4 |        9 |       27 |       36 |       12 |       17 |      24 |        8 |        8 |       13 |       24 |       12 |       10 |      11 |        6 |        4 |       18 |       24 |       10 |       10 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       12 |       14 |       23 |        5 |        3 |       0 |       14 |        6 |       19 |       11 |        5 |        1 |       1 |      0 |      1 |      9 |     30 |     22 |      9 |     20 |    133 |      0 |      0 |      2 |     13 |     20 |      9 |      7 |     12 |    106 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     15 |     11 |      3 |      2 |     72 |      0 |      1 | s03      | R    |
| 83240002 |     90 |     53 |     15 |     1 |    0 |     20 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     51 |     39 |      12 |       3 |       0 |       1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |       1 |       0 |       0 |       1 |      3 |      1 |      0 |      1 |        1 |        6 |        7 |        6 |        3 |        4 |       2 |        2 |        4 |        9 |        3 |        0 |        5 |       1 |        1 |        2 |        2 |        2 |        1 |        1 |       0 |        0 |        3 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        6 |        3 |        0 |        0 |       0 |        1 |        4 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      7 |      6 |      3 |      3 |     31 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      0 |     16 |      0 |      1 | s03      | R    |
| 83241000 |    539 |    246 |    208 |     8 |    0 |     74 |    0 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    236 |    303 |      34 |       8 |       0 |       9 |     11 |      1 |      0 |      5 |      1 |      2 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      3 |      0 |      3 |      2 |      2 |      0 |      1 |       1 |       2 |       0 |       0 |      2 |      3 |      0 |      4 |        2 |        4 |       20 |       24 |       15 |       17 |      17 |        6 |       15 |       31 |       30 |       21 |       22 |      22 |        6 |        5 |       31 |       18 |       18 |       12 |      11 |        6 |        9 |       28 |       22 |       19 |        9 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        4 |        7 |       12 |        4 |        2 |       1 |        3 |       12 |       13 |       13 |        6 |        2 |       0 |      0 |      1 |     25 |     30 |     18 |     12 |     13 |    147 |      0 |      0 |      0 |     13 |     39 |     13 |     10 |      7 |    126 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     14 |     16 |      9 |      1 |      0 |     44 |      0 |      1 | s03      | R    |
| 83250000 |    644 |    293 |    250 |     6 |    0 |     87 |    5 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    308 |    336 |      34 |      12 |       0 |       7 |     10 |     13 |      0 |      3 |      1 |      2 |      0 |      3 |      6 |      3 |      0 |      0 |      5 |      2 |      0 |      8 |      5 |      0 |      0 |      6 |       1 |       6 |       0 |       0 |      7 |      2 |      0 |      0 |        8 |        5 |       20 |       30 |       25 |       16 |      23 |        4 |       15 |       35 |       43 |       13 |       28 |      28 |        7 |       11 |       23 |       29 |       20 |       25 |      17 |        5 |       10 |       21 |       18 |       18 |       24 |      22 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        4 |       22 |       10 |        5 |        2 |       1 |        2 |        7 |       24 |        9 |        2 |        5 |       3 |      0 |      1 |     29 |     36 |     11 |      8 |     14 |    194 |      0 |      0 |      0 |     14 |     45 |     15 |      8 |     11 |    157 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     15 |     16 |     13 |      4 |      1 |     50 |      0 |      1 | s03      | R    |
| 83251001 |    546 |    267 |    174 |    10 |    0 |     86 |    2 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    257 |    289 |      38 |      10 |       0 |       6 |      5 |     11 |      0 |      2 |      2 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      8 |      1 |      1 |      0 |      4 |       1 |       1 |       0 |       0 |      5 |      3 |      0 |      3 |        8 |       11 |       20 |       24 |       12 |       16 |      19 |        2 |       21 |       23 |       36 |       23 |       22 |      30 |        2 |        6 |       20 |       17 |       14 |       18 |      10 |        3 |        7 |       25 |       10 |       17 |       18 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       12 |       18 |       13 |        7 |        4 |       0 |        8 |        7 |       12 |       12 |        3 |        3 |       0 |      0 |      3 |     13 |     55 |     15 |      7 |     10 |    164 |      0 |      0 |      7 |      5 |     29 |     21 |      6 |     13 |     93 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     19 |      8 |      4 |      3 |     54 |      0 |      1 | s03      | R    |
| 83260001 |    618 |    333 |    137 |    13 |    0 |    122 |    2 |    0 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    306 |    312 |      73 |      10 |       0 |      16 |      7 |      5 |      0 |      5 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      7 |      5 |      0 |     20 |     17 |      6 |      0 |      1 |      13 |       2 |       0 |       4 |     10 |      3 |      0 |      5 |       12 |       18 |       31 |       30 |       14 |       31 |      15 |       11 |       23 |       33 |       28 |       24 |       42 |      21 |        4 |       15 |       18 |       14 |       10 |        7 |       4 |        3 |        6 |       14 |       13 |        7 |       12 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       19 |       17 |       14 |       13 |        6 |       1 |        9 |       14 |       13 |       13 |        9 |        6 |       1 |      0 |      0 |     35 |     46 |     14 |     10 |     22 |    206 |      0 |      0 |      1 |      9 |     24 |     13 |      5 |      8 |     77 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     23 |     22 |      4 |      2 |      2 |     92 |      0 |      1 | s03      | R    |
| 83261001 |    107 |     53 |     21 |     1 |    0 |     31 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     49 |     58 |       9 |       5 |       0 |       3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      6 |      1 |      1 |      0 |      1 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      3 |        2 |        5 |        6 |        4 |        1 |        1 |       0 |        1 |        7 |        6 |        7 |        4 |        8 |       1 |        1 |        1 |        4 |        0 |        0 |        3 |       0 |        1 |        4 |        1 |        1 |        0 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        5 |        4 |        5 |        2 |        5 |       0 |        1 |        2 |        3 |        2 |        2 |        2 |       0 |      0 |      2 |      7 |     14 |      6 |      0 |      0 |     24 |      0 |      0 |      1 |      1 |      3 |      1 |      3 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      5 |      2 |      0 |      0 |     21 |      0 |      1 | s03      | R    |
| 83261002 |    264 |    154 |     34 |     6 |    0 |     67 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    125 |    139 |      36 |       5 |       0 |       5 |      4 |      1 |      0 |      3 |      5 |      4 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      8 |      5 |      1 |      0 |      1 |       5 |       1 |       0 |       2 |      3 |      1 |      0 |      3 |        3 |       18 |       13 |       16 |        8 |       13 |       0 |       11 |        4 |       18 |       16 |       13 |       20 |       1 |        0 |        5 |        7 |        5 |        2 |        2 |       0 |        2 |        5 |        1 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        4 |        7 |        9 |        3 |        6 |       0 |        8 |       10 |       10 |        8 |        3 |        4 |       0 |      0 |      0 |     17 |     29 |      4 |      4 |      4 |     96 |      0 |      0 |      0 |      3 |      3 |      1 |      1 |      2 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     10 |      3 |      1 |      2 |     47 |      0 |      1 | s03      | R    |
| 83262001 |    146 |     67 |     43 |     2 |    0 |     31 |    1 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     76 |     70 |      18 |       1 |       0 |       4 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      4 |      1 |      0 |      0 |      2 |       1 |       1 |       0 |       3 |      3 |      0 |      0 |      0 |        0 |       10 |        3 |        9 |        4 |        4 |       5 |        7 |        3 |        4 |        9 |        2 |        4 |       3 |        0 |        1 |        4 |        7 |        2 |        3 |       1 |        5 |        1 |        7 |        5 |        2 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        3 |        5 |        2 |        3 |        2 |       0 |        3 |        0 |        5 |        3 |        1 |        1 |       0 |      0 |      1 |      6 |      4 |      9 |      1 |      1 |     45 |      0 |      0 |      0 |      6 |      7 |      3 |      3 |      4 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      9 |      0 |      0 |      1 |     20 |      0 |      1 | s03      | R    |
| 83262002 |    418 |    249 |     78 |     3 |    0 |     84 |    0 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    203 |    215 |      46 |      12 |       0 |      16 |     21 |      4 |      0 |      4 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |     10 |      9 |      1 |      0 |      3 |       3 |       3 |       0 |       4 |      4 |      4 |      0 |      4 |        7 |       16 |       13 |       34 |       13 |       15 |       9 |       14 |       17 |       29 |       34 |       12 |       25 |      11 |        5 |        6 |        9 |       10 |        7 |        7 |       5 |        2 |        4 |        7 |        5 |        5 |        4 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       10 |        8 |        8 |        6 |        7 |       0 |        6 |        9 |       13 |        7 |        4 |        3 |       2 |      0 |      2 |     29 |     31 |     16 |      8 |     12 |    151 |      0 |      0 |      2 |      4 |     13 |      2 |      3 |      3 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     10 |      5 |      3 |      0 |     64 |      0 |      1 | s03      | R    |
| 83270001 |     95 |     54 |     24 |     1 |    0 |     16 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     44 |     51 |      14 |       2 |       0 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      2 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        0 |        1 |        6 |        2 |        6 |        5 |       2 |        3 |        3 |        2 |        7 |        5 |       10 |       2 |        1 |        2 |        4 |        1 |        4 |        0 |       1 |        3 |        2 |        1 |        1 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        2 |        1 |        2 |        1 |       0 |        3 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      1 |      7 |      4 |      2 |      1 |      1 |     38 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |     10 |      0 |      1 | s03      | R    |
| 83270002 |    262 |    118 |     55 |     8 |    0 |     77 |    1 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    133 |    129 |      16 |       7 |       0 |      11 |      3 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |      6 |      9 |      3 |      0 |      7 |       1 |       1 |       0 |       0 |      1 |      2 |      0 |      1 |        4 |       11 |       12 |        9 |       10 |        5 |       0 |        5 |       17 |       16 |       12 |       13 |        4 |       0 |        4 |       12 |       10 |        3 |        4 |        2 |       1 |        0 |        6 |        2 |        5 |        2 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       16 |       10 |       11 |        2 |        1 |       0 |        7 |       20 |        8 |        5 |        2 |        1 |       0 |      0 |      1 |     11 |     17 |      6 |      2 |      1 |     80 |      0 |      0 |      0 |      5 |      8 |      1 |      2 |      4 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |     11 |      4 |      3 |      0 |     48 |      0 |      1 | s03      | R    |
| 83271000 |    641 |    309 |    143 |    13 |    0 |    156 |    6 |    2 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    327 |    314 |      58 |       8 |       0 |      11 |      8 |      2 |      0 |     10 |      3 |      0 |      0 |      4 |      0 |      2 |      0 |      0 |     12 |      4 |      0 |     22 |     11 |      4 |      0 |      6 |       3 |       2 |       0 |       1 |     10 |      1 |      0 |      3 |       12 |       17 |       34 |       33 |       14 |       18 |      17 |       15 |       26 |       28 |       34 |       17 |       26 |      18 |        3 |       15 |       30 |       15 |        8 |        8 |       2 |        1 |        7 |       20 |       12 |        8 |        9 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       25 |       23 |       23 |       11 |        5 |       0 |       12 |       16 |       25 |       24 |        7 |        3 |       1 |      0 |      0 |     23 |     49 |     27 |      7 |     21 |    182 |      0 |      0 |      1 |     11 |     26 |      7 |      4 |     10 |     84 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     32 |     31 |      9 |      4 |      4 |    108 |      0 |      1 | s03      | R    |
| 83280000 |    561 |    294 |    123 |    13 |    0 |    119 |    7 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    291 |    270 |      82 |      13 |       0 |      27 |     12 |      3 |      0 |      2 |      5 |      0 |      0 |      1 |      2 |      1 |      0 |      2 |      8 |      4 |      0 |      7 |      8 |      0 |      0 |      4 |       5 |       3 |       0 |       9 |      7 |      4 |      0 |      2 |        8 |       18 |       26 |       19 |       13 |       24 |      22 |       15 |       22 |       28 |       29 |       27 |       20 |      23 |        0 |       11 |       17 |       18 |        7 |       10 |       5 |        2 |       14 |        9 |       12 |        5 |        7 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |       17 |       31 |        6 |        9 |        6 |       1 |        9 |        6 |       16 |       11 |        6 |        2 |       1 |      0 |      2 |     27 |     44 |     21 |      7 |      9 |    184 |      0 |      0 |      0 |     10 |     19 |      5 |      4 |      7 |     78 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     25 |     26 |      9 |      3 |      3 |     74 |      0 |      1 | s03      | R    |
| 83281000 |    620 |    337 |    125 |    15 |    0 |    133 |    7 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    314 |    306 |      66 |       8 |       0 |      30 |     11 |      6 |      0 |     10 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      1 |      0 |     11 |     15 |      1 |      0 |      5 |       5 |       3 |       0 |       2 |     10 |      2 |      0 |      2 |       13 |       18 |       36 |       34 |       18 |       26 |      13 |       20 |       29 |       42 |       36 |       18 |       19 |      15 |        3 |       10 |       23 |       13 |        8 |        6 |       6 |        2 |        6 |       23 |        7 |        5 |        8 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       14 |       30 |       20 |        5 |        8 |       1 |       14 |       14 |       22 |       11 |        5 |        3 |       2 |      0 |      4 |     27 |     42 |     15 |     20 |     16 |    213 |      0 |      0 |      1 |     17 |     20 |      9 |      6 |      5 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     21 |     25 |     12 |      4 |      6 |     88 |      0 |      1 | s03      | R    |
| 83290000 |    691 |    369 |    175 |    13 |    0 |    125 |    2 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    338 |    353 |      78 |      18 |       0 |      20 |      9 |      8 |      0 |      2 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      1 |     18 |      0 |      0 |     19 |      3 |      1 |      0 |      5 |       1 |       2 |       0 |       4 |     11 |      6 |      0 |      4 |        6 |       23 |       39 |       31 |       13 |       23 |      27 |       20 |       30 |       55 |       30 |       17 |       30 |      25 |        7 |        8 |       30 |       24 |       13 |        6 |       7 |        4 |       10 |       18 |       15 |        8 |       13 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       17 |       28 |       14 |       10 |        0 |       0 |       13 |       13 |       22 |        8 |        7 |        1 |       2 |      0 |      1 |     45 |     52 |     24 |     12 |     13 |    222 |      0 |      0 |      2 |     16 |     29 |     10 |     12 |     15 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     22 |     15 |     12 |      6 |      3 |     86 |      0 |      1 | s03      | R    |
| 83291000 |    649 |    330 |    157 |    14 |    0 |    140 |    1 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    295 |    354 |      68 |      12 |       0 |      31 |      5 |      4 |      0 |      4 |      0 |      3 |      0 |      2 |      3 |      1 |      0 |      1 |      7 |      8 |      0 |     16 |      9 |      3 |      0 |      4 |       5 |       3 |       0 |       6 |     10 |      5 |      0 |      7 |        7 |       14 |       30 |       31 |       23 |       16 |      17 |       17 |       33 |       36 |       32 |       32 |       17 |      25 |        4 |        8 |       24 |       17 |       12 |        8 |       1 |        4 |       15 |       19 |       17 |       18 |        7 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       11 |       22 |       23 |        8 |        4 |       5 |       10 |       15 |       16 |       18 |       14 |        5 |       1 |      0 |      5 |     22 |     40 |     21 |     13 |     14 |    215 |      0 |      0 |      3 |     13 |     26 |      7 |      5 |     11 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     25 |      8 |      3 |      2 |    100 |      0 |      1 | s03      | R    |
| 83300001 |    160 |     97 |     16 |     4 |    0 |     41 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     82 |     78 |      48 |       1 |       0 |      11 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      7 |      0 |      0 |      1 |        2 |        6 |       15 |       11 |        6 |        6 |       2 |        6 |       11 |       13 |        6 |        8 |        2 |       3 |        0 |        2 |        4 |        1 |        1 |        0 |       1 |        1 |        1 |        3 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        5 |        6 |        4 |        2 |        4 |       1 |        6 |        6 |        6 |        1 |        0 |        3 |       0 |      0 |      0 |     10 |     20 |      8 |      2 |      4 |     53 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      9 |      7 |      1 |      0 |      0 |     29 |      0 |      1 | s03      | R    |
| 83300002 |    442 |    239 |     90 |    11 |    0 |     91 |    7 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    211 |    231 |      79 |       7 |       0 |      14 |      4 |      9 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      3 |      4 |      0 |      3 |       0 |       3 |       0 |       3 |      5 |      3 |      0 |      5 |       12 |       22 |       21 |       18 |        8 |       11 |       9 |       17 |       21 |       28 |       31 |       16 |       12 |      13 |        3 |        5 |       13 |       13 |        6 |        4 |       4 |        3 |       10 |       14 |        7 |        2 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       17 |       19 |       14 |        3 |        4 |       0 |        6 |       14 |       15 |        5 |        5 |        6 |       0 |      0 |      2 |     26 |     40 |     20 |     11 |      7 |    133 |      0 |      0 |      1 |      6 |     23 |      7 |      2 |      5 |     46 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     11 |     19 |      4 |      3 |      2 |     73 |      0 |      1 | s03      | R    |
| 83301001 |    216 |    121 |     42 |     7 |    0 |     43 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    102 |    114 |      42 |       2 |       0 |       6 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       5 |      5 |      0 |      0 |      0 |        9 |        7 |        8 |       13 |        5 |        8 |       4 |        8 |       12 |       15 |        9 |       10 |        7 |       6 |        1 |        1 |        8 |        5 |        0 |        4 |       1 |        1 |        3 |        9 |        4 |        3 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        5 |        7 |        1 |        8 |        1 |       0 |        5 |        6 |        4 |        7 |        1 |        2 |       0 |      0 |      0 |      8 |     29 |      5 |      8 |      7 |     64 |      0 |      0 |      0 |      4 |     10 |      5 |      1 |      4 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      6 |      1 |      3 |      0 |     36 |      0 |      1 | s03      | R    |
| 83301002 |    486 |    266 |    118 |     8 |    0 |     89 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    229 |    257 |      92 |       7 |       0 |      17 |      6 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      3 |      0 |      0 |      5 |      0 |      1 |      0 |      0 |       0 |       4 |       0 |       7 |      6 |      6 |      0 |      5 |        8 |       14 |       19 |       26 |       15 |       20 |      14 |       13 |       24 |       36 |       27 |       14 |       23 |      13 |        3 |        5 |       16 |       15 |        5 |       10 |       3 |        4 |        9 |       15 |       18 |        3 |        8 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        9 |       20 |       14 |        4 |        3 |       1 |        7 |       11 |       16 |        8 |        2 |        2 |       0 |      0 |      4 |     24 |     36 |     15 |     16 |     16 |    155 |      0 |      0 |      1 |      8 |     20 |     10 |      1 |     12 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     19 |      8 |      1 |      3 |     53 |      0 |      1 | s03      | R    |
| 83310001 |    234 |    109 |     70 |     5 |    0 |     47 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    117 |    117 |      16 |       2 |       0 |       6 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      4 |      1 |      0 |      6 |      4 |      1 |      0 |      3 |       0 |       0 |       0 |       3 |      1 |      5 |      0 |      0 |        3 |        2 |       10 |       18 |        3 |        3 |       8 |        4 |        4 |       18 |       16 |        4 |        5 |      11 |        4 |        1 |        9 |       11 |        4 |        6 |       5 |        3 |        2 |       10 |        6 |        3 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        3 |        8 |       13 |        0 |        2 |       0 |        3 |        4 |        5 |        9 |        4 |        0 |       0 |      0 |      0 |      9 |     13 |      3 |      4 |      6 |     74 |      0 |      0 |      1 |      8 |     10 |      3 |      2 |      7 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      9 |      3 |      1 |      1 |     37 |      0 |      1 | s03      | R    |
| 83310002 |    359 |    187 |     70 |     8 |    0 |     81 |    6 |    0 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    165 |    194 |      50 |       8 |       0 |      16 |      6 |      6 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      4 |      0 |      7 |      0 |      1 |      0 |      3 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      2 |        9 |        9 |       14 |       16 |       10 |       14 |       6 |       10 |       18 |       22 |       25 |       14 |        8 |      12 |        2 |        3 |       12 |       12 |        3 |        1 |       1 |        1 |        6 |       11 |        6 |        3 |        3 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        9 |       19 |        8 |        7 |        1 |       0 |       10 |       13 |       13 |        9 |        3 |        1 |       0 |      0 |      2 |     20 |     15 |     16 |      9 |     12 |    113 |      0 |      0 |      0 |      8 |      7 |      9 |      0 |      4 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     22 |      7 |      5 |      3 |     53 |      0 |      1 | s03      | R    |
| 83311001 |    659 |    337 |    163 |    13 |    0 |    138 |    3 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    318 |    341 |      53 |       4 |       0 |      28 |     21 |      3 |      0 |      3 |      0 |      2 |      0 |      0 |      3 |      1 |      0 |      4 |      8 |      3 |      0 |     12 |      6 |      3 |      0 |      1 |       1 |       1 |       0 |       3 |      3 |      0 |      0 |      3 |        9 |       16 |       25 |       30 |       14 |       20 |      32 |       18 |       23 |       41 |       33 |       19 |       25 |      32 |       11 |        7 |       21 |       17 |       11 |       10 |      12 |        1 |        5 |       15 |       15 |       18 |        8 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       14 |       26 |       15 |        9 |        6 |       1 |       14 |       13 |       21 |       16 |        3 |        7 |       2 |      0 |      0 |     39 |     54 |     18 |     13 |     13 |    200 |      0 |      0 |      2 |     11 |     28 |     11 |      3 |      9 |     99 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     17 |     10 |     11 |      7 |     96 |      0 |      1 | s03      | R    |
| 83320000 |    633 |    368 |    120 |    13 |    0 |    125 |    4 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    311 |    322 |      62 |       6 |       0 |      21 |     17 |     10 |      0 |      3 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      9 |      2 |      0 |     15 |      5 |      1 |      0 |      3 |       3 |       5 |       0 |       4 |      8 |      1 |      0 |      4 |       13 |       19 |       34 |       33 |       27 |       27 |      17 |       14 |       28 |       35 |       48 |       28 |       17 |      28 |        4 |        9 |       18 |       15 |        8 |        5 |      10 |        1 |       10 |       12 |        8 |        5 |        5 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       10 |       22 |       18 |        5 |        5 |       0 |        8 |       15 |       21 |       12 |        4 |       12 |       1 |      0 |      2 |     37 |     50 |     25 |     13 |     12 |    229 |      0 |      0 |      2 |      8 |     22 |      4 |      5 |      2 |     77 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     15 |     27 |      3 |      2 |      1 |     96 |      0 |      1 | s03      | R    |
| 83321000 |    748 |    385 |    192 |    16 |    0 |    149 |    1 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    363 |    385 |      63 |      18 |       0 |      16 |      6 |      5 |      0 |      2 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |     12 |      1 |      0 |     17 |      5 |      1 |      0 |      2 |       1 |       1 |       0 |       0 |      2 |      2 |      0 |      7 |        9 |       18 |       41 |       38 |       23 |       24 |      22 |       19 |       31 |       38 |       38 |       26 |       27 |      31 |        4 |        8 |       18 |       30 |       11 |       18 |       7 |        3 |       12 |       26 |       26 |        7 |       13 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       18 |       29 |       14 |        9 |        5 |       2 |       12 |       17 |       21 |       14 |        6 |        6 |       3 |      0 |      4 |     33 |     45 |     23 |     22 |     25 |    233 |      0 |      0 |      1 |     14 |     44 |     10 |      5 |     17 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     24 |     24 |     15 |      3 |      5 |     99 |      0 |      1 | s03      | R    |
| 83322000 |    343 |    124 |     93 |     3 |    0 |    118 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    173 |    170 |      17 |      14 |       0 |      10 |      2 |      3 |      0 |      2 |      1 |      2 |      0 |      4 |      4 |      0 |      0 |      1 |     13 |      6 |      0 |     35 |      4 |      4 |      0 |      5 |       5 |       7 |       0 |       7 |     10 |      3 |      0 |      8 |        2 |       10 |       19 |       11 |        6 |        5 |       1 |        1 |       19 |       21 |       23 |        2 |        2 |       2 |        0 |        7 |       20 |       16 |        5 |        2 |       0 |        0 |        7 |       18 |        9 |        4 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |       15 |       23 |       14 |        4 |        9 |       0 |        3 |       19 |       20 |        5 |        3 |        7 |       0 |      0 |      1 |      7 |     47 |      3 |      2 |      1 |     63 |      0 |      0 |      1 |     10 |     44 |      1 |      0 |      1 |     36 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |     34 |      0 |      0 |      3 |     71 |      0 |      1 | s03      | R    |
| 83330000 |    732 |    371 |    189 |    18 |    0 |    143 |    8 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    336 |    396 |      76 |      15 |       0 |      29 |     11 |      9 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      9 |      3 |      0 |     16 |      6 |      5 |      0 |      3 |      11 |       5 |       0 |       9 |     11 |      6 |      0 |      7 |       10 |       21 |       44 |       32 |       16 |       18 |      18 |       16 |       33 |       39 |       35 |       22 |       24 |      43 |        9 |       11 |       25 |       29 |       10 |        6 |      12 |        3 |       13 |       21 |       18 |        9 |       11 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       15 |       15 |       17 |       10 |        4 |       0 |       17 |       27 |       23 |       17 |        7 |        6 |       0 |      0 |      2 |     22 |     48 |     21 |     14 |     25 |    239 |      0 |      0 |      2 |     13 |     30 |     13 |     12 |      9 |    110 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     16 |     24 |      3 |      3 |      5 |    117 |      0 |      1 | s03      | R    |
| 83331000 |    679 |    325 |    183 |    12 |    0 |    151 |    4 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    337 |    342 |      70 |      17 |       0 |      18 |      7 |      9 |      0 |      5 |      1 |      2 |      0 |      1 |      1 |      0 |      0 |      1 |      8 |      6 |      0 |     21 |      7 |      3 |      0 |      8 |       9 |       9 |       0 |       3 |     10 |      3 |      0 |      5 |        8 |       18 |       27 |       28 |       19 |       23 |      21 |       10 |       24 |       45 |       28 |       21 |       26 |      27 |        9 |       20 |       24 |       19 |       12 |        7 |       7 |        3 |        9 |       21 |       13 |       17 |       12 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       19 |       23 |       24 |       10 |        4 |       2 |       12 |       23 |       19 |       15 |        3 |        4 |       0 |      0 |      1 |     28 |     40 |     26 |     10 |     17 |    203 |      0 |      0 |      2 |      9 |     29 |     13 |     10 |     10 |    110 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     25 |     26 |      9 |      6 |      6 |     95 |      0 |      1 | s03      | R    |
| 83340000 |    819 |    392 |    165 |    16 |    0 |    229 |    9 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    368 |    451 |      67 |      12 |       0 |      22 |      7 |      8 |      0 |      1 |      3 |      1 |      0 |      3 |      1 |      4 |      0 |      2 |     14 |      3 |      0 |     55 |     18 |      6 |      0 |     10 |       1 |       1 |       0 |       2 |     13 |      1 |      0 |      3 |       11 |       23 |       35 |       22 |       27 |       25 |       8 |       22 |       40 |       47 |       43 |       29 |       45 |      15 |        5 |        9 |       29 |       17 |       10 |       10 |       5 |        6 |       12 |       18 |       13 |        7 |       19 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       32 |       29 |       24 |        6 |       31 |       0 |       26 |       31 |       16 |       21 |        9 |       26 |       1 |      0 |      3 |     31 |     78 |     27 |     14 |     12 |    227 |      0 |      0 |      0 |     17 |     27 |     22 |      7 |      5 |     87 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     29 |     40 |     10 |     10 |      1 |    167 |      0 |      1 | s03      | R    |
| 83341000 |    580 |    271 |    183 |    12 |    0 |    104 |    4 |    2 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    275 |    305 |      68 |      14 |       0 |      24 |     10 |      8 |      0 |      8 |      4 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      3 |      3 |      0 |      8 |      3 |      3 |      0 |      1 |       2 |       0 |       0 |       1 |      4 |      6 |      0 |      0 |        9 |       23 |       19 |       21 |       16 |       13 |      14 |       12 |       17 |       21 |       41 |       26 |       18 |      21 |        6 |        9 |       24 |       33 |        7 |        9 |       7 |        3 |       14 |       19 |       22 |       11 |        8 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       12 |       10 |       19 |        5 |        3 |       2 |        5 |       17 |       17 |       16 |        2 |        1 |       3 |      0 |      0 |     20 |     33 |     13 |      4 |     14 |    187 |      0 |      0 |      1 |     17 |     29 |     11 |      9 |     11 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     20 |      9 |      1 |      2 |     73 |      0 |      1 | s03      | R    |
| 83350000 |    668 |    324 |    184 |    15 |    0 |    140 |    2 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    328 |    340 |      66 |      11 |       0 |      13 |      8 |      4 |      0 |      5 |      7 |      2 |      0 |      6 |      3 |      0 |      0 |      3 |      9 |     20 |      0 |     17 |     15 |      6 |      0 |      4 |       7 |       9 |       0 |       6 |     20 |     11 |      0 |      8 |        9 |       22 |       22 |       39 |       20 |       15 |      11 |       13 |       29 |       44 |       44 |       25 |       21 |      10 |        3 |       22 |       27 |       23 |       16 |       15 |       2 |        2 |        5 |       24 |       17 |       11 |        8 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       18 |       26 |       16 |        5 |        8 |       0 |        9 |       20 |       25 |       13 |        7 |        4 |       0 |      0 |      0 |     22 |     51 |     20 |      8 |     19 |    204 |      0 |      0 |      0 |     12 |     38 |     12 |      4 |     16 |    102 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     25 |     28 |     11 |      1 |      1 |     93 |      0 |      1 | s03      | R    |
| 83351000 |    699 |    402 |    137 |    13 |    0 |    141 |    5 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    337 |    362 |     122 |      13 |       0 |      37 |      3 |      2 |      0 |      2 |      1 |      3 |      0 |      2 |      0 |      0 |      0 |      1 |      7 |      3 |      0 |      9 |     11 |      1 |      0 |      8 |       3 |       4 |       0 |       3 |     13 |      3 |      0 |      4 |       19 |       17 |       43 |       44 |       16 |       18 |      19 |       15 |       22 |       58 |       52 |       26 |       22 |      31 |        6 |       10 |       15 |       18 |       12 |        7 |       5 |        5 |        3 |       23 |       12 |        6 |        7 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       12 |       40 |       18 |        6 |        1 |       0 |       17 |       10 |       17 |       20 |        6 |        2 |       0 |      0 |      1 |     43 |     69 |     36 |     13 |     16 |    224 |      0 |      0 |      1 |     12 |     19 |      7 |      8 |      8 |     82 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     27 |     36 |      9 |      5 |      2 |     78 |      0 |      1 | s03      | R    |
| 83360000 |    699 |    341 |    171 |    13 |    0 |    160 |    4 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    335 |    364 |     101 |      18 |       0 |      30 |      7 |     10 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     17 |      3 |      0 |     27 |      8 |      1 |      0 |      2 |       9 |      11 |       0 |       4 |     17 |      6 |      0 |      6 |        8 |       24 |       29 |       38 |       27 |       14 |      23 |        8 |       30 |       32 |       41 |       26 |       16 |      25 |        3 |       10 |       22 |       27 |       15 |        6 |       4 |        2 |       12 |       14 |       25 |       14 |       10 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       15 |       25 |       12 |       12 |        5 |       2 |       20 |       24 |       24 |       19 |        7 |        7 |       1 |      0 |      3 |     21 |     72 |     25 |      9 |     20 |    191 |      0 |      0 |      2 |      9 |     26 |     15 |      7 |     15 |     97 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     21 |     38 |     14 |      5 |      4 |    104 |      0 |      1 | s03      | R    |
| 83361000 |    487 |    240 |    121 |    19 |    0 |    100 |    2 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    219 |    268 |      41 |      11 |       0 |      18 |     12 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      4 |      6 |      1 |      0 |      0 |       9 |       9 |       0 |      13 |      6 |      4 |      0 |      0 |        3 |       12 |       19 |       27 |       12 |       18 |       2 |       10 |       19 |       21 |       45 |       26 |       23 |       3 |        3 |       10 |       14 |       19 |        9 |       10 |       1 |        1 |       10 |       12 |        9 |        8 |        9 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        9 |       21 |       18 |        2 |        6 |       0 |        9 |       16 |       17 |       15 |        6 |        3 |       0 |      0 |      0 |     18 |     41 |     24 |     13 |     12 |    132 |      0 |      0 |      2 |     13 |     16 |      7 |      3 |      8 |     72 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     24 |     24 |      2 |     10 |      1 |     61 |      0 |      1 | s03      | R    |
| 83370000 |    628 |    336 |    127 |    13 |    0 |    142 |    3 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    313 |    315 |      46 |      10 |       0 |      14 |      5 |      2 |      0 |      3 |      2 |      2 |      0 |      3 |      2 |      0 |      0 |      3 |     11 |      8 |      0 |     25 |     12 |      1 |      0 |      2 |       5 |       0 |       0 |       2 |     19 |      3 |      0 |      6 |        8 |       26 |       36 |       46 |       21 |       11 |       3 |        9 |       28 |       56 |       42 |       18 |       22 |      10 |        4 |       16 |       22 |       18 |        8 |        5 |       1 |        2 |        9 |       13 |       10 |        8 |        7 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       24 |       28 |       16 |        4 |        5 |       1 |       11 |       13 |       23 |       16 |        4 |        9 |       1 |      0 |      1 |     40 |     74 |     15 |      9 |      8 |    189 |      0 |      0 |      1 |      8 |     21 |      8 |      4 |      3 |     82 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     23 |     20 |     10 |      1 |      1 |    106 |      0 |      1 | s03      | R    |
| 83371000 |    698 |    381 |    146 |    17 |    0 |    142 |    7 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    357 |    341 |     104 |      17 |       0 |      28 |      9 |      2 |      0 |      3 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |     12 |      1 |      0 |     17 |      8 |      1 |      0 |      1 |       5 |       5 |       0 |       5 |      9 |      3 |      0 |      5 |       16 |       36 |       31 |       34 |       26 |       28 |      13 |       21 |       38 |       45 |       37 |       18 |       23 |      15 |        4 |       17 |       24 |       14 |        9 |        6 |       3 |        5 |       14 |       22 |       12 |        7 |        5 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       15 |       22 |       32 |        6 |        5 |       0 |       19 |       16 |       17 |       13 |        8 |        1 |       1 |      0 |      2 |     40 |     61 |     35 |     13 |     14 |    216 |      0 |      0 |      2 |     17 |     27 |      8 |      4 |      7 |     81 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     24 |     11 |      3 |      2 |    104 |      0 |      1 | s03      | R    |
| 83372000 |    466 |    258 |     88 |     7 |    0 |    106 |    4 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    223 |    243 |      79 |      11 |       0 |      21 |      7 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      2 |      0 |      5 |     13 |      1 |      0 |      2 |       1 |       9 |       0 |       8 |      8 |      1 |      0 |      0 |       12 |       22 |       16 |       28 |       17 |       11 |       9 |       12 |       16 |       34 |       40 |       21 |        9 |      11 |        0 |       10 |       11 |       10 |        6 |        5 |       0 |        3 |        8 |       10 |       12 |       10 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       14 |       20 |       12 |        6 |        2 |       2 |       16 |        7 |       14 |        5 |        6 |        5 |       1 |      0 |      1 |     20 |     40 |     26 |      8 |     12 |    151 |      0 |      0 |      0 |      9 |     21 |      3 |      1 |      6 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |     22 |      8 |      0 |      2 |     68 |      0 |      1 | s03      | R    |
| 83400001 |    663 |    301 |    191 |     8 |    0 |    148 |    6 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    315 |    348 |      42 |      14 |       0 |      11 |     11 |      7 |      0 |      5 |      3 |      1 |      0 |      1 |      2 |      2 |      0 |      1 |     11 |     10 |      0 |     22 |      8 |      1 |      0 |      4 |       2 |       3 |       0 |       3 |      2 |      0 |      0 |      5 |        4 |       13 |       23 |       31 |       26 |       13 |      12 |        7 |       21 |       34 |       38 |       35 |       24 |      20 |        3 |       14 |       21 |       26 |       18 |        9 |       7 |        4 |       11 |       15 |       20 |       15 |       17 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       19 |       23 |       16 |       15 |        8 |       3 |       10 |       12 |       16 |       16 |       16 |        5 |       1 |      0 |      2 |     24 |     46 |     25 |      9 |     17 |    178 |      0 |      0 |      2 |      9 |     33 |     16 |      3 |     17 |    111 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     28 |     25 |     12 |      2 |      4 |     99 |      0 |      1 | s03      | R    |
| 83401001 |    305 |    145 |     93 |     5 |    0 |     55 |    5 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    151 |    154 |      24 |      15 |       0 |      14 |      5 |      4 |      0 |      2 |      0 |      3 |      0 |      0 |      5 |      3 |      0 |      1 |      4 |      5 |      0 |      1 |      9 |      4 |      0 |      3 |       5 |       0 |       0 |       0 |      3 |      1 |      0 |      1 |        8 |        5 |       10 |       23 |       16 |        8 |       0 |        9 |        7 |       16 |       26 |        7 |        6 |       4 |        0 |        7 |        9 |       17 |       11 |        5 |       0 |        4 |        3 |        9 |       19 |        6 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        4 |        9 |       11 |        1 |        2 |       0 |       10 |        6 |        8 |        8 |        2 |        1 |       0 |      0 |      1 |     14 |     25 |      8 |     13 |     12 |     72 |      0 |      0 |      2 |      8 |     16 |      7 |     12 |      5 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      7 |      6 |      2 |      1 |     43 |      0 |      1 | s03      | R    |
| 83401002 |    153 |     69 |     47 |     1 |    0 |     35 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     81 |     72 |       5 |       0 |       0 |       1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      2 |      2 |      4 |      0 |      4 |      6 |      1 |      0 |      4 |       1 |       0 |       0 |       0 |      0 |      2 |      0 |      1 |        3 |        1 |       11 |       12 |        3 |        3 |       0 |        1 |        5 |        9 |       18 |        2 |        1 |       0 |        1 |        3 |        6 |       14 |        4 |        1 |       0 |        1 |        2 |        5 |        6 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        5 |        3 |        3 |        0 |       0 |        0 |        5 |        8 |        4 |        1 |        0 |       0 |      0 |      0 |      1 |     18 |      3 |      6 |      6 |     35 |      0 |      0 |      1 |      4 |      8 |      4 |      2 |      5 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     10 |      1 |      0 |      3 |     19 |      0 |      1 | s03      | R    |
| 83402000 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83410000 |    608 |    295 |    160 |     2 |    0 |    138 |    2 |    0 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    268 |    340 |      24 |       7 |       0 |      14 |     15 |      4 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      3 |      1 |      0 |      6 |      2 |      1 |      0 |      2 |       3 |       0 |       0 |       0 |      7 |      3 |      0 |      2 |        4 |       20 |       20 |       23 |       24 |       12 |       4 |        8 |       44 |       30 |       43 |       33 |       21 |       9 |        1 |       15 |       16 |       13 |       16 |       13 |       7 |        1 |        9 |       10 |       15 |       15 |       20 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       20 |       21 |       20 |        7 |        3 |       1 |        6 |       25 |       18 |       10 |       10 |        2 |       2 |      0 |      4 |     35 |     42 |     17 |      7 |      3 |    187 |      0 |      0 |      0 |     13 |     26 |      7 |      5 |      9 |    100 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     16 |      7 |      4 |      1 |     98 |      0 |      1 | s03      | R    |
| 83420000 |    765 |    400 |    165 |    18 |    0 |    158 |    5 |    3 |    16 |    0 |    0 |    0 |    0 |    0 |    0 |    373 |    392 |     117 |      13 |       0 |      27 |     17 |      8 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      2 |      0 |      6 |      0 |      2 |      0 |      2 |       1 |       0 |       0 |       0 |      3 |      3 |      0 |      1 |        7 |       27 |       42 |       43 |       34 |       16 |      13 |        9 |       37 |       59 |       56 |       29 |       13 |      15 |        5 |        9 |       26 |       28 |       12 |       12 |       2 |        4 |        7 |       20 |       19 |        8 |        9 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       22 |       24 |       21 |        8 |        4 |       1 |       10 |       23 |       38 |       17 |        8 |        6 |       1 |      0 |      2 |     41 |     77 |     35 |     16 |     24 |    205 |      0 |      0 |      2 |      9 |     27 |      9 |     16 |     15 |     87 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     35 |     15 |      8 |      6 |    109 |      0 |      1 | s03      | R    |
| 83430000 |    596 |    255 |    221 |    12 |    0 |     89 |    5 |    0 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    293 |    303 |      24 |       8 |       0 |      10 |      7 |      5 |      0 |      3 |      0 |      1 |      0 |      1 |      6 |      6 |      0 |      0 |      1 |      2 |      0 |      2 |      2 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      1 |        4 |        6 |       20 |       30 |       15 |       18 |      20 |        9 |        8 |       29 |       30 |       23 |       23 |      20 |        5 |       11 |       31 |       21 |       15 |       13 |      19 |        4 |        2 |       20 |       25 |       10 |       18 |      27 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |        5 |       12 |       17 |       12 |        6 |       0 |        8 |        7 |       12 |       18 |        6 |        4 |       0 |      0 |      0 |     16 |     44 |     17 |     13 |     18 |    147 |      0 |      0 |      0 |     15 |     42 |     15 |     10 |     21 |    118 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |     16 |     12 |      6 |      6 |     66 |      0 |      1 | s03      | R    |
| 83432000 |      2 |      0 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83440000 |    321 |    183 |     74 |     5 |    0 |     47 |    6 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    135 |    186 |      25 |       3 |       0 |       8 |      5 |      4 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      3 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      6 |      1 |      0 |      0 |        1 |        5 |        7 |        3 |        8 |       34 |       5 |        6 |        4 |        6 |        7 |       20 |       65 |      12 |        1 |        4 |        3 |        1 |        5 |       24 |       1 |        0 |        2 |        0 |        1 |        6 |       22 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        8 |        3 |        7 |        7 |        4 |       2 |        3 |        3 |        5 |        4 |        3 |       10 |       3 |      0 |      0 |     15 |     39 |      9 |      9 |     18 |     93 |      0 |      0 |      0 |     11 |     14 |      3 |      3 |      4 |     39 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      9 |      8 |      6 |      0 |      0 |     39 |      0 |      1 | s03      | R    |
| 83441000 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83450000 |    642 |    337 |    135 |    21 |    0 |    128 |    8 |    2 |    11 |    0 |    0 |    0 |    0 |    0 |    0 |    301 |    341 |      80 |      10 |       0 |      15 |     16 |      6 |      0 |     10 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      3 |      4 |      3 |      0 |      5 |      5 |      2 |      0 |      2 |       1 |       2 |       0 |       0 |      4 |      2 |      0 |      4 |        6 |       17 |       30 |       38 |       23 |       10 |      17 |       10 |       18 |       39 |       63 |       24 |       26 |      16 |        7 |        6 |       23 |       19 |       12 |        3 |       4 |        3 |        5 |       25 |       14 |        7 |        4 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       18 |       19 |       26 |        7 |        5 |       2 |       12 |       18 |       27 |       14 |        9 |        4 |       0 |      0 |      0 |     26 |     44 |     22 |     19 |     25 |    201 |      0 |      0 |      1 |     11 |     27 |     10 |     12 |     12 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     17 |     39 |     13 |      5 |      3 |     92 |      0 |      1 | s03      | R    |
| 83451001 |     22 |      7 |      8 |     2 |    0 |      4 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     11 |     11 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        5 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |      2 |      0 |      1 | s03      | R    |
| 83451002 |    312 |    150 |     79 |     5 |    0 |     72 |    3 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    157 |    155 |      19 |       8 |       0 |       3 |      3 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      2 |     11 |      4 |      0 |     14 |     18 |      3 |      0 |      6 |       1 |       1 |       0 |       0 |      5 |      0 |      0 |      6 |        2 |        8 |        9 |       16 |       25 |       10 |       1 |        6 |       12 |       10 |       19 |       22 |        8 |       2 |        4 |        1 |       12 |       15 |        8 |        3 |       0 |        2 |        0 |       10 |       10 |        6 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        6 |       11 |        6 |        6 |        9 |       0 |        7 |        4 |       12 |       11 |        5 |        1 |       0 |      0 |      0 |      8 |     30 |     10 |      3 |     10 |     89 |      0 |      0 |      0 |      4 |     11 |     11 |      1 |      7 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     12 |     11 |      4 |      6 |      3 |     46 |      0 |      1 | s03      | R    |
| 83452000 |    259 |    109 |     85 |     2 |    0 |     60 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    124 |    135 |      12 |       2 |       0 |       1 |      3 |      4 |      0 |      3 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      5 |      0 |      8 |      9 |      0 |      0 |      5 |       0 |       0 |       0 |       2 |      1 |      3 |      0 |      2 |        4 |        6 |        8 |        8 |        8 |       11 |       2 |        4 |        7 |        6 |       22 |       16 |        6 |       1 |        0 |        4 |       10 |       12 |       12 |        4 |       1 |        0 |        5 |        4 |       17 |        7 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        3 |       12 |        8 |        3 |        1 |       1 |        5 |        7 |        6 |       10 |        1 |        1 |       1 |      0 |      2 |     12 |     16 |      9 |      4 |      4 |     62 |      0 |      0 |      0 |      9 |     11 |      8 |      5 |     12 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      9 |      1 |      1 |      1 |     44 |      0 |      1 | s03      | R    |
| 83460000 |    624 |    273 |    186 |    10 |    0 |    143 |    6 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    305 |    319 |      42 |      17 |       0 |      11 |      6 |      4 |      0 |      8 |      0 |      0 |      0 |      0 |     12 |      1 |      0 |      4 |      5 |     11 |      0 |     10 |      8 |      3 |      0 |     11 |       2 |       1 |       0 |       3 |      3 |      1 |      0 |      2 |       10 |       21 |       22 |       25 |       27 |       16 |       7 |        7 |       19 |       29 |       43 |       25 |        8 |      14 |       10 |       10 |       24 |       28 |       12 |       11 |       3 |        8 |       14 |       21 |       22 |        7 |       12 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       16 |       18 |       22 |       11 |        2 |       3 |       18 |       21 |       17 |       18 |        3 |        7 |       2 |      0 |      2 |     29 |     40 |     14 |      6 |     13 |    169 |      0 |      0 |      1 |     21 |     34 |     13 |      7 |     13 |     97 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |     23 |      6 |      5 |      6 |    106 |      0 |      1 | s03      | R    |
| 83470000 |    664 |    279 |    161 |    12 |    0 |    202 |    7 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    341 |    323 |      30 |      19 |       0 |      17 |      8 |      4 |      0 |      3 |      1 |      3 |      0 |      3 |      5 |      5 |      0 |      2 |     36 |     19 |      0 |     49 |     26 |      4 |      0 |     26 |       4 |       4 |       0 |      10 |      8 |      5 |      0 |      4 |        7 |       15 |       47 |       46 |       12 |        8 |       0 |       13 |       19 |       49 |       44 |       12 |        7 |       0 |        5 |       11 |       30 |       28 |        7 |        6 |       0 |        6 |       13 |       20 |       25 |        7 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       18 |       45 |       31 |       10 |        6 |       1 |        8 |       22 |       39 |       22 |       11 |        3 |       0 |      0 |      2 |     32 |     69 |     21 |     11 |     20 |    124 |      0 |      0 |      1 |     12 |     31 |     19 |     10 |     15 |     73 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     34 |     48 |     10 |      3 |      4 |    121 |      0 |      1 | s03      | R    |
| 83500000 |    640 |    332 |    150 |    18 |    0 |    124 |    8 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    309 |    331 |      37 |       9 |       0 |       8 |      9 |      5 |      0 |      4 |      4 |      0 |      0 |      5 |      4 |      2 |      0 |      2 |     17 |     12 |      0 |     18 |     13 |      1 |      0 |      8 |       2 |       2 |       0 |       3 |     11 |      0 |      0 |      3 |       15 |       16 |       31 |       36 |       24 |       16 |       6 |       14 |       24 |       36 |       51 |       29 |       25 |       9 |        2 |       10 |       17 |       25 |       13 |        5 |       2 |        5 |        9 |       17 |       16 |       14 |       12 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |       17 |       20 |       20 |       15 |        6 |       0 |       11 |       18 |       14 |       10 |       11 |        3 |       0 |      0 |      4 |     39 |     44 |     36 |     12 |     27 |    170 |      0 |      0 |      0 |     11 |     20 |      6 |     11 |      8 |     94 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     17 |     23 |      6 |      2 |      4 |    103 |      0 |      1 | s03      | R    |
| 83501001 |    506 |    238 |    133 |     7 |    0 |    118 |    3 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    269 |      39 |       9 |       0 |      12 |      4 |      5 |      0 |      9 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      6 |      6 |      1 |      0 |      6 |       5 |       1 |       0 |       0 |     10 |      2 |      0 |      3 |        6 |       10 |       19 |       25 |       10 |        6 |      19 |       12 |       16 |       22 |       31 |       15 |       18 |      29 |        3 |        7 |       20 |       20 |        9 |        6 |       6 |        1 |        6 |       14 |       12 |        9 |       12 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |        8 |       16 |       17 |        8 |        5 |       0 |        7 |       14 |       18 |       12 |        8 |        3 |       2 |      0 |      2 |     14 |     30 |     11 |     12 |     12 |    157 |      0 |      0 |      1 |      8 |     25 |     11 |      6 |     11 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     16 |     21 |      8 |      2 |      2 |     85 |      0 |      1 | s03      | R    |
| 83501002 |    101 |     55 |     20 |     2 |    0 |     20 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |     41 |     60 |       9 |       0 |       0 |       5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      2 |        2 |        0 |        5 |        4 |        1 |        3 |       2 |        0 |        4 |        8 |       12 |        5 |        7 |       2 |        0 |        5 |        3 |        0 |        1 |        0 |       1 |        0 |        3 |        3 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        4 |        4 |        2 |        0 |       0 |        1 |        3 |        3 |        5 |        0 |        0 |       0 |      0 |      0 |      6 |     13 |      8 |      1 |      1 |     26 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      1 |     18 |      0 |      1 | s03      | R    |
| 83510000 |    756 |    359 |    183 |    11 |    0 |    183 |    6 |    1 |    13 |    0 |    0 |    0 |    0 |    0 |    0 |    351 |    405 |      62 |      13 |       0 |      20 |     21 |      4 |      0 |      8 |      1 |      1 |      0 |      6 |      5 |      0 |      0 |      3 |      6 |      6 |      0 |     28 |     19 |      6 |      0 |      6 |       5 |       2 |       0 |       5 |     10 |      9 |      0 |      3 |       10 |       20 |       32 |       28 |       28 |       34 |       8 |       11 |       29 |       36 |       45 |       30 |       34 |      14 |        6 |       13 |       20 |       23 |        9 |       11 |       4 |        9 |       15 |       22 |       16 |       11 |       13 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       26 |       18 |       22 |       19 |       11 |       2 |        9 |       26 |       34 |       19 |       11 |       10 |       0 |      0 |      2 |     40 |     76 |     26 |     10 |     18 |    187 |      0 |      0 |      2 |     16 |     34 |     19 |     13 |     12 |     87 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     25 |     42 |     12 |      5 |      6 |    121 |      0 |      1 | s03      | R    |
| 83520000 |    349 |    186 |     58 |     7 |    0 |     90 |    3 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    171 |    178 |      32 |       7 |       0 |      12 |      7 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      5 |      5 |      0 |     11 |     10 |      5 |      0 |      4 |       3 |       0 |       0 |       1 |      7 |      0 |      0 |      2 |        5 |       22 |       14 |       16 |        9 |        4 |       3 |       10 |       27 |       21 |       26 |       11 |       17 |       1 |        6 |        9 |        8 |        6 |        3 |        0 |       0 |        4 |        4 |        3 |        6 |        1 |        5 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       26 |       14 |       11 |        3 |        4 |       1 |        5 |       12 |       12 |        8 |        0 |        2 |       0 |      0 |      1 |     18 |     33 |      6 |      3 |      6 |    119 |      0 |      0 |      1 |      5 |     12 |      1 |      1 |      1 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |     21 |      6 |      3 |      0 |     54 |      0 |      1 | s03      | R    |
| 83530001 |    628 |    338 |    144 |     9 |    0 |    130 |    4 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    238 |    390 |      28 |       5 |       0 |      14 |     10 |      2 |      0 |      6 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     13 |      3 |      0 |     10 |     12 |      3 |      0 |      9 |       0 |       0 |       0 |       0 |      8 |      2 |      0 |      4 |        7 |       20 |       16 |       20 |        9 |       51 |       2 |        6 |       25 |       22 |       15 |       23 |      117 |       5 |        2 |        3 |        4 |        3 |        9 |       28 |       1 |        3 |        9 |        3 |        3 |        9 |       64 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       15 |       14 |       10 |        9 |        7 |       1 |       16 |       16 |        9 |       11 |        4 |       27 |       0 |      0 |      2 |     44 |     50 |     14 |      6 |     12 |    210 |      0 |      0 |      0 |     20 |     13 |      8 |      0 |      4 |     99 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     23 |      2 |      1 |      1 |     99 |      0 |      1 | s03      | R    |
| 83530002 |     21 |      5 |      8 |     1 |    0 |      6 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |      7 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        3 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 83531000 |    922 |    402 |    196 |    16 |    0 |    292 |    8 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    428 |    494 |      40 |      13 |       0 |      31 |     12 |      7 |      0 |      7 |      4 |      2 |      0 |      3 |      7 |      4 |      0 |      4 |     45 |     22 |      0 |     77 |     18 |      5 |      0 |     17 |       8 |       3 |       0 |      10 |     11 |      3 |      0 |     10 |        5 |       46 |       34 |       25 |       13 |       35 |       1 |       15 |       54 |       38 |       20 |       18 |       89 |       9 |        5 |       30 |       19 |       12 |       14 |       16 |       0 |        4 |       23 |       11 |       11 |        7 |       42 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       57 |       47 |       27 |       15 |       15 |       1 |       16 |       41 |       31 |       22 |       11 |       28 |       2 |      0 |      4 |     46 |     59 |     22 |      1 |      8 |    262 |      0 |      0 |      1 |     18 |     22 |      3 |      7 |      6 |    139 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     45 |     35 |      4 |      2 |      3 |    233 |      0 |      1 | s03      | R    |
| 83540001 |    998 |    424 |    356 |    18 |    0 |    190 |    2 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    499 |    499 |      59 |      29 |       0 |      16 |      7 |      1 |      0 |      3 |      0 |      1 |      0 |      4 |      3 |      2 |      0 |      1 |     18 |      9 |      0 |     21 |     12 |     10 |      0 |     11 |       6 |       9 |       0 |       5 |     23 |      9 |      0 |     11 |        7 |       21 |       28 |       62 |       44 |       32 |      10 |       15 |       24 |       39 |       57 |       40 |       32 |      13 |        8 |       26 |       58 |       31 |       20 |       31 |      10 |        9 |       23 |       36 |       30 |       25 |       40 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       21 |       29 |       13 |       20 |        9 |       2 |       12 |       22 |       30 |       26 |        4 |       10 |       3 |      0 |      2 |     34 |     65 |     46 |     16 |     21 |    240 |      0 |      0 |      0 |     22 |     66 |     29 |     14 |     23 |    202 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     24 |     39 |     14 |      4 |      6 |    129 |      0 |      1 | s03      | R    |
| 83540002 |     29 |     13 |      7 |     1 |    0 |      8 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     14 |     15 |       3 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        5 |        0 |        0 |        2 |       0 |        1 |        1 |        3 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 83550001 |     15 |      4 |      1 |     0 |    0 |      8 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        2 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |      1 | s03      | R    |
| 83550002 |    575 |    277 |    139 |     8 |    0 |    139 |    6 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    283 |    292 |      36 |      13 |       0 |      14 |     11 |      7 |      0 |      5 |      3 |      2 |      0 |      2 |      3 |      1 |      0 |      3 |     10 |      4 |      0 |     20 |      6 |      4 |      0 |      6 |       0 |       0 |       0 |       0 |     13 |      4 |      0 |      6 |       14 |       24 |       18 |       34 |       20 |       18 |       3 |        9 |       26 |       37 |       36 |       21 |       14 |       3 |        2 |       16 |       16 |        8 |       22 |        4 |       1 |        2 |       12 |       21 |       10 |       17 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |       26 |       24 |       15 |        5 |        7 |       0 |       10 |       20 |       14 |       19 |       11 |        2 |       0 |      0 |      0 |     28 |     46 |     12 |     10 |     21 |    160 |      0 |      0 |      0 |     10 |     32 |      7 |      7 |      7 |     76 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     24 |      2 |      6 |      5 |    109 |      0 |      1 | s03      | R    |
| 83560000 |    586 |    258 |    141 |    15 |    0 |    163 |    1 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    271 |    315 |      39 |      10 |       0 |      15 |      9 |      8 |      0 |      5 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      2 |     10 |      6 |      0 |     39 |     20 |      2 |      0 |     14 |       3 |       1 |       0 |       0 |      8 |      2 |      0 |      4 |        5 |       19 |       23 |       29 |       14 |       15 |       3 |       10 |       23 |       41 |       34 |       20 |       18 |       4 |        4 |       15 |       15 |       17 |        7 |        7 |       3 |        4 |       12 |       18 |       16 |       11 |       12 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       23 |       24 |       25 |        6 |        7 |       0 |       14 |       26 |       21 |       15 |       11 |        5 |       0 |      0 |      1 |     28 |     39 |     16 |     14 |     11 |    149 |      0 |      0 |      0 |     12 |     27 |      7 |      5 |      6 |     84 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |     29 |      9 |      3 |      7 |    117 |      0 |      1 | s03      | R    |
| 83561000 |    749 |    326 |    208 |    13 |    0 |    194 |    2 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    367 |    382 |      39 |      19 |       0 |      18 |      5 |     10 |      0 |      5 |      2 |      1 |      0 |      0 |      3 |      2 |      0 |      3 |     22 |     24 |      0 |     53 |     18 |      6 |      0 |     11 |       3 |       6 |       0 |       9 |     13 |      9 |      0 |      8 |        3 |       21 |       34 |       34 |       29 |       20 |       2 |       13 |       18 |       40 |       46 |       32 |       30 |       4 |       10 |       14 |       22 |       24 |       23 |       12 |       1 |        6 |       24 |       14 |       28 |       18 |       10 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       18 |       31 |       26 |       18 |       13 |       0 |       17 |       23 |       16 |       20 |        7 |       14 |       0 |      0 |      0 |     42 |     59 |     31 |     12 |     17 |    165 |      0 |      0 |      0 |     25 |     46 |     11 |      8 |     30 |     88 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     26 |     37 |      8 |      4 |      5 |    135 |      0 |      1 | s03      | R    |
| 83570001 |    110 |     57 |     11 |     0 |    0 |     40 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     43 |     67 |       9 |       0 |       0 |       3 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |       2 |       0 |       0 |       0 |      6 |      0 |      0 |      0 |        4 |        4 |        3 |        2 |        1 |        4 |       0 |        3 |       12 |       12 |        3 |        6 |        3 |       0 |        1 |        1 |        5 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        3 |        4 |        1 |        1 |        3 |       0 |        5 |        6 |        5 |        4 |        3 |        2 |       0 |      0 |      0 |      9 |      3 |      0 |      1 |      0 |     44 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |      1 |     33 |      0 |      1 | s03      | R    |
| 83570002 |     16 |      9 |      3 |     0 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |     10 |       7 |       0 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        3 |       1 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 83570003 |    588 |    232 |    133 |    14 |    0 |    196 |    4 |    0 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    273 |    315 |      19 |      11 |       0 |      11 |      9 |      8 |      0 |      9 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      5 |     12 |      6 |      0 |     28 |     11 |      4 |      0 |      7 |       2 |       1 |       0 |       4 |      6 |      3 |      0 |      7 |        5 |       40 |       19 |       11 |        9 |        2 |       0 |       13 |       62 |       29 |       27 |       11 |        4 |       0 |        3 |       31 |       15 |       14 |        8 |        4 |       0 |        6 |       23 |       12 |        6 |        6 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |       51 |       25 |       18 |       12 |        2 |       1 |        8 |       59 |       19 |       16 |        7 |        2 |       0 |      0 |      0 |     21 |     26 |      2 |      2 |      1 |    180 |      0 |      0 |      3 |      4 |     16 |      5 |      1 |      3 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     28 |     15 |      2 |      0 |      0 |    175 |      0 |      1 | s03      | R    |
| 83570004 |    315 |    140 |     72 |     3 |    0 |     96 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    166 |    149 |      17 |      10 |       0 |       6 |      1 |      1 |      0 |      3 |      7 |      2 |      0 |      1 |      0 |      0 |      0 |      2 |     11 |      3 |      0 |     19 |      8 |      0 |      0 |      5 |       4 |       1 |       0 |       2 |      2 |      0 |      0 |      0 |        2 |       20 |       20 |       10 |       10 |        7 |       0 |        1 |       20 |       22 |       16 |        6 |        6 |       0 |        2 |       10 |       10 |        9 |        5 |        3 |       0 |        4 |       10 |        8 |        5 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |       21 |       17 |        9 |        3 |        3 |       0 |        2 |       16 |       15 |        7 |        3 |        2 |       0 |      0 |      0 |     21 |     10 |      3 |      1 |      0 |    105 |      0 |      0 |      0 |     12 |      5 |      4 |      2 |      0 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     24 |      5 |      5 |      1 |      0 |     68 |      0 |      1 | s03      | R    |
| 83571000 |    715 |    293 |    169 |     8 |    0 |    236 |    3 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    345 |    370 |      61 |      12 |       0 |      21 |     13 |      6 |      0 |     10 |      4 |      2 |      0 |      3 |      2 |      2 |      0 |      2 |     33 |     21 |      0 |     76 |      9 |      7 |      0 |     16 |       4 |       4 |       0 |       6 |      8 |      5 |      0 |      5 |        9 |       20 |       41 |       32 |       13 |       10 |       1 |       10 |       40 |       49 |       27 |       23 |       14 |       4 |        3 |       17 |       39 |       20 |        5 |        5 |       0 |        1 |       16 |       27 |       14 |       10 |        9 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       26 |       40 |       29 |       12 |       15 |       0 |       13 |       32 |       37 |       23 |       10 |        8 |       0 |      0 |      2 |     34 |     77 |     12 |      5 |      9 |    154 |      0 |      0 |      1 |     20 |     47 |      8 |      7 |      4 |     82 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     30 |     46 |      7 |      3 |      7 |    158 |      0 |      1 | s03      | R    |
| 83573000 |      2 |      2 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83580000 |    733 |    355 |    149 |    19 |    0 |    196 |    6 |    2 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    340 |    393 |      94 |      18 |       0 |      35 |      8 |      4 |      0 |      7 |      2 |      2 |      0 |      1 |      3 |      0 |      0 |      2 |     10 |      2 |      0 |     24 |      6 |      4 |      0 |     11 |       3 |       1 |       0 |       2 |      7 |      1 |      0 |      1 |       11 |       32 |       34 |       34 |       14 |        8 |       9 |       24 |       62 |       44 |       38 |       21 |       14 |      10 |        4 |       30 |       22 |       17 |        4 |        3 |       1 |        5 |       24 |       14 |       10 |        5 |        8 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       29 |       31 |       22 |       12 |        4 |       0 |       16 |       45 |       26 |       14 |       10 |        1 |       0 |      0 |      6 |     30 |     56 |     11 |      5 |     15 |    232 |      0 |      0 |      1 |     17 |     15 |      8 |      3 |      3 |    102 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |     25 |      8 |      5 |      4 |    168 |      0 |      1 | s03      | R    |
| 83581001 |    146 |     81 |     33 |     3 |    0 |     27 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     57 |     89 |      23 |       0 |       0 |      10 |      3 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      5 |      0 |      4 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        2 |        9 |        2 |        5 |        5 |       3 |        6 |        9 |       15 |        7 |        3 |        8 |       6 |        0 |        3 |        2 |        6 |        2 |        2 |       1 |        0 |        5 |        2 |        3 |        3 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        4 |        3 |        2 |        1 |        1 |       0 |        8 |        5 |        2 |        0 |        2 |        1 |       0 |      0 |      1 |      8 |     17 |      8 |      4 |      4 |     39 |      0 |      0 |      0 |      6 |      6 |      2 |      2 |      2 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      8 |      1 |      0 |      0 |     20 |      0 |      1 | s03      | R    |
| 83581002 |    328 |    178 |     65 |     8 |    0 |     65 |    3 |    2 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    152 |    176 |      52 |       5 |       0 |      17 |      7 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      6 |      6 |      1 |      0 |      2 |       1 |       1 |       0 |       3 |      3 |      3 |      0 |      1 |        7 |       11 |       22 |       15 |        6 |        7 |       3 |       12 |       13 |       27 |       25 |       10 |       15 |       5 |        2 |        5 |       13 |        8 |        5 |        5 |       0 |        3 |        4 |        8 |        5 |        3 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        7 |        9 |       12 |        4 |        2 |       0 |        8 |       11 |       13 |        7 |        2 |        1 |       0 |      0 |      2 |     22 |     35 |     15 |      5 |     17 |     82 |      0 |      0 |      0 |      3 |      9 |      0 |      6 |      4 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |     12 |      3 |      2 |      1 |     56 |      0 |      1 | s03      | R    |
| 83582001 |     66 |     36 |     14 |     0 |    0 |     14 |    0 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     24 |     42 |       3 |       3 |       0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      0 |        0 |        2 |        5 |        0 |        1 |        3 |       0 |        0 |        7 |        6 |        5 |        3 |        4 |       0 |        0 |        1 |        3 |        1 |        1 |        0 |       0 |        0 |        2 |        0 |        4 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        2 |        1 |        0 |       0 |        0 |        7 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      5 |      5 |      2 |      2 |     20 |      0 |      0 |      0 |      2 |      2 |      1 |      3 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      1 |     10 |      0 |      1 | s03      | R    |
| 83582002 |    428 |    188 |    112 |     8 |    0 |    108 |    6 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    207 |    221 |      19 |       2 |       0 |      10 |      4 |      3 |      0 |      4 |      4 |      2 |      0 |      3 |      1 |      1 |      0 |      1 |      4 |      4 |      0 |     20 |      8 |      4 |      0 |      2 |       0 |       3 |       0 |       4 |      2 |      1 |      0 |      1 |        4 |       17 |       23 |       15 |       12 |        4 |       1 |        9 |       38 |       15 |       18 |       12 |       19 |       1 |        2 |       25 |       19 |        9 |        8 |        3 |       1 |        3 |       15 |        7 |        7 |        9 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       24 |       14 |       11 |        4 |        3 |       0 |        9 |       23 |       11 |       14 |        4 |        3 |       0 |      0 |      1 |     23 |     30 |      8 |      4 |      4 |    118 |      0 |      0 |      0 |     11 |     14 |      4 |      2 |      4 |     77 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     19 |      1 |      1 |      2 |     94 |      0 |      1 | s03      | R    |
| 83590000 |    432 |    206 |     93 |    11 |    0 |    106 |    6 |    1 |     9 |    0 |    0 |    0 |    0 |    0 |    0 |    211 |    221 |      46 |      10 |       0 |      13 |      2 |      1 |      0 |      7 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      5 |      7 |      0 |      0 |      2 |       2 |       0 |       0 |       1 |      5 |      1 |      0 |      1 |        8 |       15 |       15 |       23 |        8 |       11 |       4 |        9 |       27 |       27 |       27 |       14 |       15 |       3 |        3 |       11 |       20 |       12 |        4 |        5 |       1 |        0 |       10 |        9 |        7 |        5 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       20 |       20 |       12 |        5 |        6 |       0 |       15 |       21 |        8 |       12 |        2 |        3 |       1 |      0 |      0 |     24 |     44 |      8 |      4 |      4 |    122 |      0 |      0 |      2 |     11 |     25 |      3 |      3 |      4 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     14 |      7 |      0 |      1 |     84 |      0 |      1 | s03      | R    |
| 83591000 |    567 |    267 |    146 |    13 |    0 |    127 |    5 |    1 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    269 |    298 |      35 |      12 |       0 |      17 |     20 |      9 |      0 |      9 |      1 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |      4 |      3 |      0 |     15 |     13 |      1 |      0 |      6 |       7 |       1 |       0 |       3 |      3 |      0 |      0 |      3 |        8 |       16 |       23 |       22 |       21 |       18 |       1 |       14 |       22 |       26 |       32 |       23 |       39 |       2 |        5 |       16 |       16 |       13 |       15 |        9 |       2 |        3 |        5 |       21 |       20 |       10 |       11 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       14 |       13 |       21 |        9 |       15 |       0 |       10 |       11 |       17 |       14 |       11 |        6 |       1 |      0 |      4 |     33 |     40 |     24 |     18 |     17 |    131 |      0 |      0 |      0 |     11 |     32 |     12 |     12 |      5 |     74 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     19 |     22 |     10 |      6 |      3 |     93 |      0 |      1 | s03      | R    |
| 83600000 |    722 |    258 |    236 |     3 |    0 |    214 |    3 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    357 |    365 |      15 |      11 |       0 |       8 |      9 |     12 |      0 |      6 |      3 |      2 |      0 |      5 |     13 |      2 |      0 |      0 |     47 |     32 |      0 |    119 |     11 |      2 |      0 |      4 |       3 |       5 |       0 |       2 |      3 |      5 |      0 |      0 |       11 |        7 |       24 |       34 |       21 |       19 |       2 |       15 |       10 |       28 |       36 |       33 |       13 |       5 |        6 |        2 |       12 |       41 |       36 |       25 |       4 |        7 |        2 |       16 |       29 |       31 |       20 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       10 |       24 |       41 |       12 |        9 |       0 |       15 |       14 |       31 |       33 |       18 |        3 |       1 |      0 |      0 |     25 |     34 |     19 |     10 |      8 |    162 |      0 |      0 |      0 |     14 |     46 |     13 |      8 |     16 |    139 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     32 |     37 |     11 |      5 |      7 |    134 |      0 |      1 | s03      | R    |
| 83601000 |    417 |    173 |    121 |     0 |    0 |    120 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    207 |    210 |      10 |       3 |       0 |       3 |     10 |      5 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     30 |     19 |      0 |     63 |      5 |      1 |      0 |      6 |       0 |       0 |       0 |       2 |      2 |      1 |      0 |      0 |        6 |        7 |       14 |       17 |       16 |        7 |       4 |        7 |        6 |       16 |       24 |       20 |       17 |      12 |        6 |        6 |        9 |       17 |       10 |        7 |      11 |        6 |        4 |        8 |        6 |       11 |       10 |      10 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |        6 |       19 |       25 |        3 |        7 |       3 |        6 |        4 |       13 |       20 |        6 |        4 |       0 |      0 |      1 |     10 |     22 |     18 |      5 |     12 |    105 |      0 |      0 |      0 |     16 |     15 |      9 |      8 |      8 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     21 |     13 |      8 |      1 |      6 |     74 |      0 |      1 | s03      | R    |
| 83610001 |    341 |    122 |     94 |     3 |    0 |    119 |    3 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    174 |    167 |      11 |       5 |       0 |       1 |      3 |      2 |      0 |      1 |      1 |      1 |      0 |      4 |      3 |      0 |      0 |      3 |     15 |      6 |      0 |     73 |      5 |      0 |      0 |      1 |       0 |       2 |       0 |       0 |      4 |      1 |      0 |      1 |        5 |        6 |        9 |       13 |       12 |        8 |       4 |        2 |        4 |       11 |        8 |       17 |       10 |      13 |        1 |        5 |        7 |        7 |       12 |       12 |      13 |        0 |        3 |        3 |        7 |        9 |        9 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        3 |       23 |       15 |        8 |        5 |       2 |        6 |        5 |       27 |       13 |        7 |        6 |       1 |      0 |      0 |      6 |     19 |      4 |      4 |      9 |     80 |      0 |      0 |      0 |      8 |     10 |      4 |      3 |      8 |     61 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     16 |     21 |      3 |      2 |      5 |     75 |      0 |      1 | s03      | R    |
| 83610002 |    363 |    121 |    101 |     3 |    0 |    135 |    3 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    183 |    180 |       9 |       0 |       0 |       0 |      0 |      5 |      0 |      2 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |     27 |     23 |      0 |     88 |     18 |      6 |      0 |     12 |       5 |       3 |       0 |       3 |      0 |      0 |      0 |      0 |        8 |        6 |       11 |        8 |       11 |       10 |       1 |       10 |        3 |       14 |       21 |        7 |       11 |       0 |        4 |        4 |        7 |       25 |       11 |        9 |       1 |        1 |        2 |        4 |       19 |        6 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        6 |       14 |       31 |        7 |        0 |       0 |       11 |        8 |       23 |       21 |        8 |        3 |       0 |      0 |      2 |     10 |     29 |      7 |      5 |      6 |     62 |      0 |      0 |      2 |      7 |     19 |     10 |     10 |     10 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     16 |     18 |      8 |      5 |      9 |     78 |      0 |      1 | s03      | R    |
| 83611000 |    674 |    271 |    186 |     4 |    0 |    209 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    339 |    335 |      20 |       7 |       0 |       7 |     23 |     13 |      0 |      8 |      3 |      2 |      0 |      2 |      5 |      0 |      0 |      0 |     26 |     20 |      0 |    109 |     11 |      7 |      0 |     15 |       2 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        9 |        9 |       21 |       26 |       21 |       22 |      10 |       12 |       10 |       21 |       46 |       22 |       22 |      20 |       13 |        9 |       14 |       26 |       26 |       16 |       8 |        5 |        8 |        5 |       21 |       18 |       14 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |        9 |       31 |       42 |       11 |        5 |       2 |       14 |        8 |       41 |       26 |        6 |        6 |       7 |      0 |      1 |     15 |     40 |     15 |     16 |     10 |    174 |      0 |      0 |      3 |     18 |     26 |     11 |      8 |     11 |    109 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     35 |     24 |     11 |      6 |      6 |    134 |      0 |      1 | s03      | R    |
| 83620000 |    440 |    161 |    100 |     1 |    0 |    177 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    220 |    220 |       8 |       4 |       0 |       5 |      5 |      3 |      0 |      2 |      4 |      1 |      0 |      3 |      3 |      4 |      0 |      1 |     48 |     38 |      0 |    115 |     23 |      3 |      0 |      6 |       3 |       1 |       0 |       2 |      2 |      2 |      0 |      1 |        8 |        8 |        5 |       25 |       15 |        4 |       3 |       16 |        8 |       16 |       30 |       15 |        6 |       2 |        4 |        0 |        8 |       23 |       17 |        2 |       0 |        4 |        3 |        7 |       19 |       10 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        4 |       22 |       38 |       16 |        9 |       1 |       10 |        8 |       21 |       23 |        9 |        9 |       1 |      0 |      1 |     27 |     33 |      9 |      4 |      9 |     78 |      0 |      0 |      0 |      4 |     24 |      6 |      8 |      9 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     28 |     32 |      8 |      8 |     12 |     87 |      0 |      1 | s03      | R    |
| 83621001 |    105 |     40 |     29 |     0 |    0 |     34 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     50 |     55 |       6 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      4 |      0 |     12 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        1 |        4 |        4 |       3 |        1 |        1 |        3 |        7 |        4 |        1 |       6 |        0 |        2 |        2 |        2 |        3 |        4 |       1 |        1 |        1 |        3 |        1 |        1 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        1 |        7 |        4 |        2 |        0 |       1 |        3 |        1 |        3 |        7 |        2 |        1 |       0 |      0 |      0 |      0 |      2 |      2 |      2 |      2 |     32 |      0 |      0 |      0 |      0 |      4 |      1 |      2 |      1 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      1 |     29 |      0 |      1 | s03      | R    |
| 83621002 |      1 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83621003 |    297 |     86 |     55 |     2 |    0 |    154 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    148 |    149 |       3 |       3 |       0 |       2 |      4 |      5 |      0 |      1 |      2 |      4 |      0 |      6 |      0 |      1 |      0 |      0 |     26 |     14 |      0 |     97 |      9 |      1 |      0 |      9 |       2 |       8 |       0 |       5 |      1 |      1 |      0 |      1 |        1 |        3 |       12 |       17 |        6 |        3 |       0 |        0 |        1 |       18 |       15 |        5 |        4 |       1 |        1 |        1 |       13 |       12 |        3 |        1 |       0 |        1 |        0 |       12 |        5 |        3 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        2 |       28 |       32 |        5 |        4 |       0 |        6 |        3 |       36 |       31 |        2 |        2 |       1 |      0 |      6 |     10 |     11 |      2 |      3 |      4 |     50 |      0 |      0 |      4 |      4 |      9 |      7 |      5 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |     21 |      8 |      7 |      3 |      4 |     96 |      0 |      1 | s03      | R    |
| 83622000 |      2 |      2 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83630001 |    276 |    131 |     74 |     2 |    0 |     66 |    0 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    139 |    137 |       5 |       2 |       0 |       3 |     10 |      1 |      0 |      4 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      1 |      0 |     30 |      4 |      2 |      0 |      2 |       2 |       1 |       0 |       2 |      4 |      1 |      0 |      0 |        8 |        1 |        9 |       15 |       12 |        3 |      12 |        4 |        2 |       14 |       19 |        6 |       16 |      10 |        4 |        5 |        7 |        8 |        5 |        5 |       5 |        2 |        0 |        5 |        8 |        5 |        3 |      12 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        0 |        7 |       15 |        7 |        2 |       1 |        2 |        0 |       11 |       13 |        2 |        2 |       1 |      0 |      1 |      6 |     22 |     11 |      9 |      7 |     75 |      0 |      0 |      0 |      4 |     14 |      6 |      1 |      6 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |     10 |      3 |      2 |      2 |     47 |      0 |      1 | s03      | R    |
| 83630002 |    293 |    118 |     89 |     4 |    0 |     74 |    1 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    152 |    141 |       9 |       3 |       0 |       3 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |     12 |     17 |      0 |     39 |      6 |      0 |      0 |      2 |       1 |       2 |       0 |       0 |      2 |      1 |      0 |      0 |        7 |        4 |        9 |       10 |       12 |        9 |       4 |        5 |        2 |       10 |       20 |        8 |        8 |      10 |        3 |        3 |        9 |       17 |        5 |       12 |       4 |        3 |        2 |        5 |       13 |        5 |        4 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        3 |       13 |       13 |       10 |        0 |       0 |        5 |        2 |       13 |       17 |        3 |        2 |       0 |      0 |      0 |      5 |      7 |     16 |      5 |      1 |     84 |      0 |      0 |      0 |      5 |     13 |      5 |      3 |      7 |     56 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |      8 |      7 |      3 |      1 |     56 |      0 |      1 | s03      | R    |
| 83631000 |    400 |    150 |     88 |     9 |    0 |    150 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    203 |    197 |      12 |       3 |       0 |       9 |      5 |      5 |      0 |      5 |      5 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |     21 |     13 |      0 |     71 |      9 |      1 |      0 |      9 |       0 |       1 |       0 |       5 |      1 |      0 |      0 |      0 |        6 |        6 |       15 |       14 |       14 |        9 |       2 |        9 |       11 |        8 |       23 |       13 |       14 |       6 |        4 |        4 |        3 |       12 |       11 |       10 |       3 |        2 |        2 |        3 |       14 |        9 |       10 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |        7 |       24 |       25 |       17 |        4 |       1 |        7 |        9 |       18 |       28 |        8 |        2 |       0 |      0 |      0 |      9 |     19 |     13 |      4 |      8 |     97 |      0 |      0 |      0 |      6 |      7 |     13 |      6 |      5 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     23 |      6 |      5 |      1 |    103 |      0 |      1 | s03      | R    |
| 83640000 |    454 |    178 |    164 |     1 |    0 |    101 |    5 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    219 |    235 |       6 |       4 |       0 |       0 |     14 |      4 |      0 |      5 |      1 |      0 |      0 |      2 |      3 |      4 |      0 |      3 |     13 |     17 |      0 |     47 |      1 |      2 |      0 |      1 |       1 |       4 |       0 |       0 |      0 |      5 |      0 |      0 |        9 |        4 |        9 |       15 |        7 |       15 |      15 |        9 |        6 |       14 |       25 |       10 |       10 |      30 |        3 |        4 |        8 |       24 |       16 |       13 |      16 |        8 |        4 |        8 |       18 |       10 |       13 |      19 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       10 |        9 |       21 |        5 |        7 |       0 |        9 |        6 |       10 |       13 |        9 |        3 |       1 |      0 |      1 |      7 |     15 |     11 |      7 |     11 |    126 |      0 |      0 |      0 |     11 |     19 |      8 |     12 |     18 |     96 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     14 |     10 |      3 |      9 |      4 |     70 |      0 |      1 | s03      | R    |
| 83641001 |    333 |    125 |    113 |     5 |    0 |     86 |    3 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    165 |    168 |       8 |       3 |       0 |       2 |      4 |      3 |      0 |      3 |      0 |      2 |      0 |      3 |      3 |      2 |      0 |      2 |     13 |      8 |      0 |     47 |      0 |      1 |      0 |      4 |       1 |       2 |       0 |       6 |      2 |      0 |      0 |      0 |        3 |        2 |        8 |       11 |        7 |        5 |      12 |        6 |        8 |       16 |       11 |        8 |       13 |      15 |        5 |        4 |       11 |       16 |        6 |        8 |      12 |        1 |        1 |       12 |       11 |        7 |        8 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        3 |       12 |       22 |        5 |        6 |       2 |        9 |        2 |       14 |        9 |        3 |        3 |       0 |      0 |      1 |      6 |     21 |      6 |      2 |     11 |     78 |      0 |      0 |      1 |      3 |     16 |      9 |      6 |      3 |     75 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     13 |      9 |      3 |      0 |      3 |     65 |      0 |      1 | s03      | R    |
| 83641002 |     11 |      5 |      4 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      7 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 83650000 |    653 |    290 |    144 |     6 |    0 |    200 |    4 |    2 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    293 |    360 |      48 |       6 |       0 |      18 |     19 |      5 |      0 |      4 |      1 |      5 |      0 |      9 |      2 |      0 |      0 |      0 |     18 |      7 |      0 |     68 |     12 |      2 |      0 |     13 |       0 |       0 |       0 |       2 |      7 |      1 |      0 |      3 |       11 |        9 |       20 |       22 |       19 |       15 |      16 |       14 |       17 |       32 |       47 |       21 |       25 |      22 |        7 |        5 |       15 |       22 |       16 |        1 |       7 |        4 |        7 |       19 |       17 |       11 |        6 |       7 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       12 |       27 |       28 |       13 |        8 |       1 |       22 |       13 |       28 |       29 |       11 |        7 |       1 |      0 |      4 |     19 |     58 |     16 |      9 |     15 |    169 |      0 |      0 |      2 |     15 |     23 |      6 |      3 |     12 |     83 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     27 |     34 |     11 |      0 |      3 |    138 |      0 |      1 | s03      | R    |
| 83651000 |    641 |    255 |    200 |     7 |    0 |    170 |    1 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    325 |    316 |      28 |       6 |       0 |      11 |     13 |     10 |      0 |      3 |      5 |      1 |      0 |      6 |      1 |      9 |      0 |      2 |     25 |     11 |      0 |     76 |      7 |      2 |      0 |      6 |       1 |       4 |       0 |       0 |      1 |      3 |      0 |      0 |       10 |        7 |       15 |       28 |       19 |       16 |      19 |       16 |        8 |       23 |       33 |       23 |       15 |      23 |        7 |        7 |       21 |       20 |       19 |       11 |      19 |        2 |        3 |       14 |       17 |       20 |       14 |      26 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       12 |       27 |       38 |        9 |        7 |       3 |        8 |        8 |       28 |       25 |        6 |        4 |       0 |      0 |      0 |     14 |     30 |      9 |      5 |      8 |    189 |      0 |      0 |      2 |      8 |     27 |     13 |      7 |      7 |    136 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     22 |     26 |      4 |      6 |      5 |    122 |      0 |      1 | s03      | R    |
| 83660000 |    606 |    264 |    169 |    10 |    0 |    151 |    4 |    0 |     8 |    0 |    0 |    0 |    0 |    0 |    0 |    304 |    302 |      38 |       5 |       0 |       7 |      9 |     11 |      0 |      5 |      4 |      2 |      0 |      6 |     10 |      2 |      0 |      0 |     15 |      7 |      0 |     46 |      6 |      0 |      0 |      6 |       0 |       1 |       0 |       6 |      0 |      2 |      0 |      3 |       10 |       11 |       16 |       38 |       19 |       13 |      19 |        8 |       13 |       22 |       33 |       21 |       20 |      21 |        8 |       11 |       13 |       21 |       11 |       12 |       8 |        8 |        1 |       19 |       19 |       13 |       14 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       15 |       13 |       30 |       14 |        7 |       1 |       13 |        7 |       24 |       23 |        8 |        3 |       1 |      0 |      4 |     12 |     37 |     16 |     16 |     15 |    164 |      0 |      0 |      3 |      5 |     21 |     20 |      4 |     12 |    104 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     25 |     26 |     10 |      6 |      4 |     99 |      0 |      1 | s03      | R    |
| 83700001 |    358 |    158 |     98 |     3 |    0 |     94 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    167 |    191 |      16 |       9 |       0 |       8 |      6 |      2 |      0 |      6 |      1 |      2 |      0 |      0 |      3 |      1 |      0 |      2 |      4 |     12 |      0 |     28 |      0 |      2 |      0 |      6 |       1 |       3 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |        3 |        8 |       20 |       13 |       17 |       6 |        3 |        4 |       14 |       21 |       14 |       24 |       8 |        2 |        2 |        8 |       21 |       10 |        7 |       1 |        2 |        2 |       11 |       10 |        8 |        9 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |       16 |       12 |        9 |        4 |       1 |        9 |        5 |       12 |       20 |        7 |        3 |       0 |      0 |      0 |      9 |     20 |     11 |      3 |      9 |    106 |      0 |      0 |      1 |      7 |      7 |      8 |      6 |      4 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     21 |      3 |      1 |      4 |     61 |      0 |      1 | s03      | R    |
| 83700002 |    361 |    144 |    109 |     3 |    0 |     99 |    1 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    172 |    189 |      16 |       8 |       0 |       3 |      6 |      6 |      0 |      1 |      0 |      1 |      0 |      1 |      5 |      3 |      0 |      2 |     17 |     16 |      0 |     29 |      4 |      4 |      0 |     15 |       0 |       3 |       0 |       2 |      5 |      1 |      0 |      1 |        3 |        5 |        8 |       10 |       15 |       13 |       9 |        8 |        9 |        9 |       15 |       24 |       11 |       5 |        5 |        3 |        7 |       16 |       11 |        8 |       5 |        2 |        5 |        9 |       11 |       12 |       13 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        3 |       15 |       16 |        6 |        3 |       1 |        4 |        8 |       13 |       15 |        9 |        5 |       0 |      0 |      1 |     11 |     16 |     11 |      6 |      8 |     91 |      0 |      0 |      0 |     12 |     20 |      8 |      4 |     10 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     11 |     16 |      9 |      2 |      8 |     56 |      0 |      1 | s03      | R    |
| 83704001 |      2 |      0 |      0 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 83704002 |      3 |      2 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 83710000 |    818 |    348 |    210 |    13 |    0 |    236 |    4 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    383 |    435 |      32 |      13 |       0 |       6 |     16 |      7 |      0 |     10 |      4 |      6 |      0 |      6 |      3 |      3 |      0 |      4 |     28 |     30 |      0 |    128 |      9 |      1 |      0 |      6 |      13 |       2 |       0 |       9 |      1 |      0 |      0 |      0 |       15 |        8 |       23 |       42 |       21 |       18 |      15 |       26 |       18 |       50 |       39 |       28 |       22 |      23 |       10 |        7 |       15 |       31 |       22 |       10 |       8 |        4 |        9 |       22 |       29 |       14 |       13 |      16 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |        9 |       48 |       45 |       19 |        6 |       0 |       14 |        6 |       49 |       35 |       10 |        6 |       2 |      0 |      6 |     32 |     37 |     22 |     17 |     12 |    222 |      0 |      0 |      4 |     20 |     34 |     11 |      6 |     17 |    118 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     40 |     31 |     19 |      7 |      4 |    150 |      0 |      1 | s03      | R    |
| 83720000 |    504 |    249 |    119 |     7 |    0 |    127 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    208 |    296 |      27 |       8 |       0 |       5 |      2 |      6 |      0 |      0 |      8 |      3 |      0 |      4 |      0 |      2 |      0 |      1 |     27 |     16 |      0 |     51 |     20 |      5 |      0 |      9 |       5 |       1 |       0 |       2 |      6 |      2 |      0 |      1 |        5 |        3 |       13 |       30 |       13 |       17 |       0 |        9 |       12 |       26 |       35 |       25 |       55 |       6 |        4 |        6 |       11 |       17 |       14 |        7 |       3 |        3 |        3 |       10 |       18 |       14 |        6 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |        5 |       13 |       21 |        5 |        9 |       0 |        9 |        5 |       19 |       21 |        6 |       11 |       0 |      0 |      1 |     15 |     43 |     19 |     12 |     10 |    149 |      0 |      0 |      0 |      8 |     21 |     10 |     13 |      7 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     23 |     14 |      6 |      2 |      5 |     85 |      0 |      1 | s03      | R    |
| 83721000 |    257 |    137 |     57 |     1 |    0 |     60 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     93 |    164 |       6 |       1 |       0 |       1 |      3 |      1 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      7 |      0 |     25 |      2 |      3 |      0 |      3 |       0 |       6 |       0 |       1 |      1 |      2 |      0 |      3 |        7 |        1 |        3 |        7 |        5 |       10 |       1 |        2 |        0 |        8 |       20 |       11 |       54 |       8 |        2 |        1 |        9 |        8 |        5 |        4 |       0 |        1 |        0 |        5 |        5 |        4 |       10 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        2 |       10 |       10 |        1 |        1 |       1 |        3 |        3 |       10 |        9 |        3 |        5 |       0 |      0 |      1 |     13 |     23 |     12 |     13 |      7 |     68 |      0 |      0 |      0 |      3 |      8 |      2 |      0 |      7 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      6 |      7 |      8 |      3 |      1 |     36 |      0 |      1 | s03      | R    |
| 83730001 |    712 |    330 |    161 |    19 |    0 |    184 |    5 |    1 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    345 |    367 |      49 |      10 |       0 |      10 |      4 |      3 |      0 |      9 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      4 |     23 |     18 |      0 |     75 |     11 |      3 |      0 |      7 |       3 |       2 |       0 |       2 |      5 |      0 |      0 |      3 |       10 |       18 |       22 |       47 |       20 |       13 |      20 |        7 |       22 |       38 |       47 |       19 |       18 |      29 |        8 |        9 |       17 |       31 |       10 |        8 |       5 |        5 |        8 |       22 |       20 |        7 |        7 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       17 |       41 |       26 |        9 |        1 |       1 |       19 |       16 |       41 |       26 |        5 |        6 |       1 |      0 |      2 |     29 |     54 |     27 |     12 |     25 |    181 |      0 |      0 |      2 |     11 |     35 |      8 |     10 |     12 |     83 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 |     30 |      7 |      1 |      3 |    143 |      0 |      1 | s03      | R    |
| 83730002 |     12 |      3 |      2 |     0 |    0 |      6 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      7 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      2 |      0 |      1 | s03      | R    |
| 83740002 |    932 |    344 |    276 |    11 |    0 |    292 |    7 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    464 |    468 |      23 |       3 |       0 |       2 |      7 |      9 |      0 |      4 |      6 |      2 |      0 |      9 |      5 |      1 |      0 |      1 |     26 |     56 |      0 |     99 |     74 |     14 |      0 |     46 |       9 |      25 |       0 |       8 |      4 |      6 |      0 |      5 |       11 |       12 |       32 |       52 |       36 |       15 |       0 |       27 |       18 |       39 |       55 |       29 |       16 |       2 |        4 |        5 |       29 |       56 |       35 |       16 |       0 |        7 |        7 |       23 |       47 |       33 |       12 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |       13 |       34 |       64 |       19 |        8 |       0 |       16 |       17 |       40 |       57 |       16 |        5 |       0 |      0 |      5 |     35 |     77 |     34 |     10 |     38 |    145 |      0 |      0 |      2 |     19 |     45 |     28 |     27 |     54 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |     37 |     53 |     14 |      6 |     18 |    178 |      0 |      1 | s03      | R    |
| 83750001 |     20 |     11 |      4 |     0 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |     11 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      1 |      4 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        0 |        1 |       0 |        0 |        1 |        0 |        3 |        0 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      2 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 83750002 |    629 |    232 |    193 |    12 |    0 |    183 |    3 |    0 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    321 |    308 |      26 |       7 |       0 |      12 |      8 |      9 |      0 |      5 |      1 |      0 |      0 |      8 |      1 |      1 |      0 |      1 |     31 |     35 |      0 |     83 |     15 |      2 |      0 |      8 |       7 |       1 |       0 |       7 |      3 |      5 |      0 |      7 |        8 |        9 |       20 |       20 |       27 |       10 |       8 |        9 |       20 |       22 |       33 |       17 |       13 |      16 |       11 |       17 |       16 |       22 |       24 |       12 |       6 |        5 |        9 |       16 |       20 |       19 |       12 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       18 |       14 |       31 |       29 |       14 |        4 |       1 |       16 |       12 |       31 |       21 |        9 |        3 |       1 |      0 |      1 |     13 |     25 |     14 |      7 |     16 |    156 |      0 |      0 |      0 |     18 |     33 |     13 |      3 |     17 |    109 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |     23 |     27 |      9 |      5 |      7 |    125 |      0 |      1 | s03      | R    |
| 83750003 |     90 |     28 |     31 |     0 |    0 |     30 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     53 |     37 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      8 |      0 |     14 |     14 |      3 |      0 |      5 |       2 |       8 |       0 |       1 |      0 |      2 |      0 |      0 |        2 |        2 |        2 |        6 |        5 |        1 |       1 |        1 |        1 |        1 |        3 |        1 |        2 |       0 |        0 |        1 |        5 |        8 |        1 |        4 |       0 |        1 |        0 |        5 |        5 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        0 |        1 |        5 |        5 |        0 |       0 |        2 |        4 |        2 |        4 |        3 |        1 |       0 |      0 |      0 |      2 |      7 |      1 |      2 |      4 |     12 |      0 |      0 |      0 |      5 |      6 |     10 |      3 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      4 |      3 |      2 |      0 |     18 |      0 |      1 | s03      | R    |
| 83760001 |      6 |      1 |      2 |     0 |    0 |      3 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 83760002 |    747 |    268 |    234 |     9 |    0 |    233 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    379 |    368 |       9 |       5 |       0 |       2 |     10 |      6 |      0 |      1 |      6 |      7 |      0 |      4 |      7 |      2 |      0 |      2 |     32 |     60 |      0 |    115 |     53 |     14 |      0 |     27 |       0 |       3 |       0 |       3 |      7 |      3 |      0 |      0 |       10 |       17 |       15 |       35 |       33 |       16 |       1 |       22 |       14 |       20 |       35 |       33 |       15 |       2 |       15 |        5 |       16 |       41 |       34 |       19 |       0 |        4 |        9 |       15 |       35 |       29 |       10 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       14 |       21 |       44 |       21 |       10 |       0 |       15 |       13 |       41 |       33 |       17 |        4 |       0 |      0 |      3 |     26 |     45 |     17 |      4 |     24 |    149 |      0 |      0 |      8 |     24 |     28 |     27 |     10 |     19 |    118 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     39 |     37 |     10 |     11 |      8 |    131 |      0 |      1 | s03      | R    |
| 83760003 |    203 |     56 |     53 |     1 |    0 |     91 |    0 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    107 |     96 |       3 |       2 |       0 |       5 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     26 |     21 |      0 |     64 |     10 |      0 |      0 |      8 |       2 |       2 |       0 |       6 |      0 |      0 |      0 |      0 |        4 |        4 |        3 |        8 |        9 |        2 |       0 |        5 |        3 |        4 |       10 |        4 |        0 |       0 |        0 |        4 |        7 |        6 |        6 |        1 |       0 |        0 |        2 |        8 |       14 |        4 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        4 |       14 |       27 |        3 |        1 |       1 |        4 |        5 |       15 |       14 |        2 |        1 |       0 |      0 |      0 |      5 |     11 |      1 |      3 |      8 |     28 |      0 |      0 |      0 |      4 |      9 |      5 |      4 |      7 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     12 |     11 |      7 |      0 |      7 |     52 |      0 |      1 | s03      | R    |
| 83770000 |    801 |    266 |    267 |     7 |    0 |    255 |    2 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    403 |    398 |      19 |       5 |       0 |       6 |     11 |     12 |      0 |     11 |      8 |      7 |      0 |      7 |      7 |      8 |      0 |      2 |     30 |     35 |      0 |    103 |     38 |     15 |      0 |     30 |       6 |      19 |       0 |      17 |      3 |      5 |      0 |      3 |       10 |       10 |       19 |       43 |       30 |       13 |       0 |       17 |       17 |       30 |       43 |       20 |       14 |       0 |       14 |       13 |       24 |       46 |       33 |       13 |       1 |        2 |        6 |       34 |       45 |       25 |       11 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       13 |       37 |       43 |       19 |        6 |       0 |       14 |       10 |       40 |       45 |       15 |        9 |       1 |      0 |      1 |     22 |     47 |     27 |     15 |     31 |    123 |      0 |      0 |      3 |     30 |     51 |     24 |     16 |     42 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     40 |     45 |     16 |     12 |     25 |    126 |      0 |      1 | s03      | R    |
| 83771000 |    474 |    156 |    136 |     3 |    0 |    178 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    246 |    228 |       7 |       2 |       0 |       4 |      2 |      2 |      0 |      2 |      4 |      4 |      0 |      7 |      1 |      0 |      0 |      0 |     27 |     48 |      0 |     89 |     51 |      9 |      0 |     32 |       5 |       8 |       0 |       7 |      1 |      3 |      0 |      1 |       15 |        7 |       11 |       23 |       14 |       10 |       0 |       12 |        9 |       12 |       30 |        6 |        6 |       1 |        3 |        5 |       17 |       32 |       12 |        6 |       0 |        3 |        2 |       16 |       29 |        8 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |        4 |       16 |       42 |        7 |       10 |       0 |       12 |        2 |       28 |       30 |        5 |       14 |       0 |      0 |      3 |     18 |     20 |     13 |      5 |      4 |     93 |      0 |      0 |      4 |     12 |     33 |     22 |     11 |      7 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     30 |     28 |     15 |      6 |      5 |     98 |      0 |      1 | s03      | R    |
| 83780000 |    641 |    203 |    178 |     7 |    0 |    246 |    3 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    318 |    323 |      11 |      10 |       0 |      10 |      8 |     11 |      0 |      5 |      1 |      1 |      0 |     11 |      7 |      4 |      0 |      2 |     37 |     34 |      0 |     98 |     27 |      5 |      0 |     31 |       3 |      10 |       0 |       9 |      5 |      4 |      0 |      5 |        9 |       13 |       16 |       25 |       15 |        8 |       1 |       16 |       16 |       27 |       36 |       17 |        4 |       0 |       10 |        9 |       12 |       39 |       21 |        7 |       0 |        6 |        8 |       21 |       24 |       16 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |        9 |       29 |       54 |       14 |       12 |       0 |       20 |       18 |       35 |       36 |        8 |       10 |       0 |      0 |      5 |     15 |     38 |      9 |      4 |     19 |    113 |      0 |      0 |      0 |     14 |     29 |     13 |      5 |     22 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     29 |     40 |     19 |      6 |     11 |    150 |      0 |      1 | s03      | R    |
| 83790000 |    470 |    164 |    130 |     5 |    0 |    164 |    5 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    242 |    228 |      14 |       6 |       0 |       1 |     13 |      3 |      0 |      4 |      2 |      3 |      0 |      2 |      3 |      3 |      0 |      4 |     26 |     17 |      0 |     82 |     21 |      5 |      0 |     22 |       1 |       1 |       0 |       0 |      1 |      1 |      0 |      1 |        7 |        7 |       10 |       17 |       15 |       10 |       7 |       11 |        8 |       18 |       23 |       23 |        5 |       3 |        3 |        7 |       13 |       21 |       25 |        9 |       4 |        2 |        3 |        6 |       18 |       11 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |        6 |       22 |       33 |       10 |        2 |       0 |       14 |       11 |       29 |       30 |        3 |        2 |       0 |      0 |      2 |     14 |     17 |      9 |      4 |      9 |    109 |      0 |      0 |      3 |      7 |     18 |      8 |      4 |     12 |     78 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     26 |     21 |      8 |      2 |      5 |    110 |      0 |      1 | s03      | R    |
| 83800000 |    835 |    283 |    284 |     6 |    0 |    258 |    3 |    1 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    410 |    425 |       5 |      12 |       0 |      11 |     13 |      9 |      0 |      3 |      2 |      4 |      0 |      5 |      6 |      7 |      0 |      0 |     35 |     44 |      0 |    112 |     42 |      7 |      0 |     29 |       4 |       5 |       0 |       9 |      9 |      7 |      0 |      3 |        8 |       14 |       13 |       36 |       33 |       13 |       2 |       18 |       16 |       22 |       53 |       40 |       11 |       4 |        8 |       15 |       15 |       48 |       44 |       16 |       3 |       11 |        8 |       16 |       50 |       30 |       17 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       27 |       14 |       25 |       43 |       24 |        8 |       1 |       19 |       15 |       27 |       44 |       13 |        8 |       0 |      0 |      1 |     42 |     46 |     17 |     10 |     20 |    147 |      0 |      0 |      2 |     13 |     38 |     23 |     15 |     31 |    162 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     37 |     46 |     15 |     12 |      5 |    140 |      0 |      1 | s03      | R    |
| 83810000 |    488 |    141 |    193 |    11 |    0 |    140 |    3 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    251 |    237 |       9 |       4 |       0 |       3 |      4 |      8 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      5 |      0 |      0 |     29 |     38 |      0 |     74 |     10 |      8 |      0 |     11 |       1 |      10 |       0 |       3 |      6 |      0 |      0 |      2 |        2 |        7 |       11 |       16 |       16 |       11 |       0 |        5 |        6 |       16 |       22 |       20 |        8 |       1 |       10 |        9 |        8 |       29 |       26 |       20 |       0 |        6 |        6 |       12 |       26 |       28 |       13 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |        7 |       19 |       30 |        9 |        4 |       0 |        7 |        5 |       17 |       29 |        7 |        3 |       0 |      0 |      0 |      9 |     23 |     14 |      2 |     13 |     80 |      0 |      0 |      6 |     18 |     29 |     11 |     16 |     14 |     99 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |     32 |     25 |      7 |      3 |      3 |     79 |      0 |      1 | s03      | R    |
| 83811000 |   1253 |    378 |    308 |    15 |    0 |    541 |    4 |    2 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    669 |    584 |      14 |       6 |       0 |       5 |      7 |     10 |      0 |      2 |      4 |      3 |      0 |     10 |      0 |      3 |      0 |      1 |     73 |    111 |      0 |    300 |    111 |     36 |      0 |     99 |       8 |      10 |       0 |       9 |      3 |      4 |      0 |      5 |       28 |       22 |       34 |       62 |       30 |       10 |       1 |       22 |       21 |       50 |       67 |       20 |       11 |       0 |       13 |       11 |       39 |       80 |       28 |        9 |       0 |       13 |        8 |       29 |       54 |       17 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       44 |       27 |       79 |       99 |       32 |       21 |       0 |       35 |       14 |       93 |       80 |       25 |       18 |       0 |      0 |      2 |     46 |     64 |     20 |     16 |     33 |    197 |      0 |      0 |      9 |     38 |     48 |     27 |     24 |     42 |    120 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |     77 |     86 |     24 |     14 |     11 |    344 |      0 |      1 | s03      | R    |
| 83820000 |    521 |    240 |    113 |    12 |    0 |    141 |    4 |    1 |    10 |    0 |    0 |    0 |    0 |    0 |    0 |    262 |    259 |      24 |       7 |       0 |      10 |      3 |      2 |      0 |      2 |      5 |      3 |      0 |      3 |      2 |      1 |      0 |      2 |     19 |      3 |      0 |     38 |     13 |      1 |      0 |     11 |       1 |       3 |       0 |       8 |      6 |      2 |      0 |      1 |        5 |       16 |       23 |       25 |       13 |        7 |      12 |        6 |       31 |       26 |       40 |        8 |       15 |      13 |        0 |       14 |       19 |       19 |        7 |        9 |       1 |        4 |        9 |        9 |        8 |        4 |        8 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       27 |       29 |       18 |        3 |        5 |       0 |        7 |       18 |       21 |       19 |        7 |        3 |       1 |      0 |      2 |     28 |     32 |      9 |      7 |     10 |    152 |      0 |      0 |      2 |      5 |     13 |      9 |      6 |     12 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     22 |     13 |      1 |      3 |    102 |      0 |      1 | s03      | R    |
| 83830000 |    644 |    270 |    167 |     7 |    0 |    190 |    4 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    328 |    316 |      36 |      13 |       0 |      14 |     10 |     13 |      0 |      3 |      8 |      0 |      0 |      3 |      3 |      1 |      0 |      4 |     23 |     15 |      0 |     57 |     22 |      3 |      0 |     14 |       7 |       4 |       0 |       6 |     13 |      2 |      0 |      2 |        4 |       19 |       31 |       26 |       21 |       12 |       1 |       10 |       39 |       33 |       37 |       31 |        6 |       0 |        5 |       13 |       21 |       36 |       13 |        5 |       1 |        4 |       10 |       20 |       18 |       11 |       10 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       23 |       31 |       26 |       16 |       15 |       1 |       10 |       20 |       23 |       20 |        8 |        6 |       0 |      0 |      3 |     29 |     50 |     22 |      6 |     12 |    148 |      0 |      0 |      2 |     14 |     31 |     14 |     14 |     14 |     78 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     42 |     30 |      7 |      6 |      5 |    116 |      0 |      1 | s03      | R    |
| 83840000 |    637 |    281 |    175 |     5 |    0 |    159 |    5 |    0 |    12 |    0 |    0 |    0 |    0 |    0 |    0 |    328 |    309 |      32 |      11 |       0 |      18 |      9 |      3 |      0 |      1 |      5 |      1 |      0 |      3 |      5 |      3 |      0 |      3 |     13 |      5 |      0 |     36 |      3 |      2 |      0 |      4 |       7 |       2 |       0 |       8 |      4 |      2 |      0 |      4 |        2 |       12 |       30 |       29 |       29 |       17 |      11 |       11 |       23 |       25 |       39 |       20 |       15 |      18 |        8 |       11 |       23 |       28 |       15 |        3 |       8 |        2 |       10 |       21 |       21 |       12 |        5 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       14 |       28 |       21 |       15 |        6 |       1 |       11 |       11 |       26 |       18 |        8 |        3 |       2 |      0 |      3 |     19 |     35 |     26 |     12 |     17 |    169 |      0 |      0 |      0 |     13 |     32 |      8 |      6 |     11 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     33 |     22 |      4 |      7 |      5 |    108 |      0 |      1 | s03      | R    |
| 83850001 |    393 |    180 |    108 |     7 |    0 |     91 |    5 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    201 |    192 |      19 |       4 |       0 |       7 |      2 |      7 |      0 |      4 |      1 |      2 |      0 |      1 |      2 |      0 |      0 |      0 |     13 |      5 |      0 |     27 |      3 |      1 |      0 |      4 |       3 |       4 |       0 |       1 |      6 |      2 |      0 |      3 |        5 |       15 |       12 |       19 |       12 |       14 |       8 |        2 |       12 |       19 |       24 |       13 |       12 |      13 |        2 |       10 |       11 |       20 |       13 |        3 |       3 |        2 |        3 |       15 |        7 |        8 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        8 |       16 |       14 |        6 |        4 |       0 |        5 |       11 |       13 |       15 |        4 |        3 |       0 |      0 |      0 |     16 |     29 |     15 |      4 |      8 |    108 |      0 |      0 |      1 |      6 |     17 |     13 |      2 |     14 |     55 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     24 |      9 |      6 |      0 |      2 |     61 |      0 |      1 | s03      | R    |
| 83850002 |    327 |    139 |     86 |    12 |    0 |     84 |    1 |    1 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    164 |    163 |      13 |       8 |       0 |      11 |      1 |      1 |      0 |      3 |      2 |      0 |      0 |      4 |      1 |      2 |      0 |      1 |      9 |      5 |      0 |     23 |      6 |      0 |      0 |      4 |       2 |       2 |       0 |       3 |      4 |      1 |      0 |      0 |        3 |       11 |       11 |       13 |       11 |        9 |       2 |        3 |        6 |       14 |       20 |       13 |       12 |      11 |        1 |        7 |       13 |       16 |        5 |        5 |       7 |        4 |        4 |        7 |       12 |        3 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        9 |       14 |        8 |        7 |        8 |       0 |        7 |        7 |       16 |        8 |        7 |        7 |       0 |      0 |      0 |      7 |     17 |     13 |      5 |      7 |     90 |      0 |      0 |      0 |      9 |     12 |      2 |      7 |      8 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |     11 |      6 |      4 |      3 |     65 |      0 |      1 | s03      | R    |
| 83860000 |    648 |    269 |    200 |    11 |    0 |    156 |    5 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    326 |    322 |      31 |      13 |       0 |      10 |      5 |     12 |      0 |      9 |      0 |      3 |      0 |      2 |      1 |      0 |      0 |      0 |     12 |      6 |      0 |     23 |     17 |      0 |      0 |     10 |       8 |       1 |       0 |       4 |      3 |      2 |      0 |      1 |       11 |       14 |       28 |       32 |       15 |       13 |      12 |       10 |       20 |       34 |       41 |       14 |       14 |      11 |        2 |       15 |       23 |       36 |       16 |       10 |       5 |        5 |       10 |       25 |       24 |       16 |       10 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       11 |       24 |       28 |        8 |        5 |       3 |       14 |       16 |       19 |       25 |        8 |        2 |       1 |      0 |      1 |     24 |     34 |     16 |     14 |     27 |    153 |      0 |      0 |      1 |     13 |     28 |     21 |     12 |     20 |    105 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     17 |     26 |     11 |      6 |      6 |    111 |      0 |      1 | s03      | R    |
| 83870000 |    836 |    348 |    251 |     8 |    0 |    225 |    2 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    427 |    409 |      47 |      25 |       0 |      22 |      2 |      6 |      0 |     11 |      4 |      4 |      0 |      1 |      4 |      1 |      0 |      5 |     25 |     13 |      0 |     37 |     28 |      8 |      0 |     16 |      29 |      27 |       0 |      29 |     17 |     13 |      0 |      5 |       14 |       17 |       40 |       51 |       30 |        7 |       3 |       17 |       27 |       49 |       62 |       22 |        8 |       1 |       10 |        4 |       35 |       54 |       20 |        7 |       0 |        6 |        6 |       39 |       44 |       21 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       22 |       40 |       32 |       14 |        7 |       1 |       18 |       15 |       29 |       27 |        8 |        5 |       0 |      0 |      7 |     41 |     57 |     25 |     12 |     15 |    191 |      0 |      0 |      3 |     19 |     47 |     28 |      8 |     23 |    123 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 |     36 |     11 |      8 |     11 |    134 |      0 |      1 | s03      | R    |
| 83880000 |    330 |    107 |    117 |     2 |    0 |    100 |    1 |    0 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    173 |    157 |      10 |       9 |       0 |       3 |      2 |      6 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |     15 |     25 |      0 |     22 |     12 |      3 |      0 |     11 |       9 |      24 |       0 |      17 |      4 |      1 |      0 |      6 |        5 |        5 |       19 |       13 |        7 |        4 |       1 |        4 |        3 |       19 |       19 |        8 |        0 |       0 |        2 |        0 |       22 |       25 |        7 |        8 |       0 |        1 |        1 |       21 |       25 |        4 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |        4 |       11 |       21 |        2 |        4 |       0 |       11 |        8 |       13 |       13 |        2 |        4 |       0 |      0 |      0 |     11 |     16 |     16 |      2 |      1 |     61 |      0 |      0 |      2 |     24 |     24 |     27 |      3 |      2 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     12 |      9 |      2 |      0 |     59 |      0 |      1 | s03      | R    |
| 83900000 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83902001 |      6 |      3 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      4 |      2 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 83902002 |      2 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 83904003 |      1 |      0 |      1 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83904004 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83905001 |     83 |     37 |     22 |     1 |    0 |     22 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     43 |     40 |       5 |       1 |       0 |       2 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      3 |      0 |      0 |      1 |       2 |       1 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        8 |        5 |        3 |        2 |        2 |       1 |        0 |        7 |        2 |        5 |        1 |        0 |       0 |        0 |        4 |        4 |        2 |        0 |        1 |       0 |        0 |        5 |        2 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        5 |        1 |        0 |        1 |       0 |        3 |        3 |        4 |        4 |        0 |        0 |       0 |      0 |      1 |      5 |      2 |      0 |      0 |      0 |     29 |      0 |      0 |      1 |      0 |      3 |      2 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     21 |      0 |      1 | s03      | R    |
| 83910002 |      8 |      1 |      0 |     0 |    0 |      7 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      6 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
| 83921001 |      1 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83921002 |      3 |      1 |      2 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83921003 |     66 |     14 |     35 |     2 |    0 |     14 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |     30 |     36 |       1 |       3 |       0 |       5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        4 |        0 |       0 |        0 |        0 |        3 |        2 |        2 |        1 |       0 |        2 |        4 |        4 |        4 |        1 |        1 |       2 |        1 |        1 |        4 |        2 |        5 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        1 |        0 |       0 |        1 |        5 |        1 |        2 |        2 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      2 |      5 |      5 |      0 |      0 |      0 |      4 |      5 |      1 |      1 |      4 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     14 |      0 |      1 | s03      | R    |
| 83921004 |      2 |      2 |      0 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 83930000 |     33 |      8 |     13 |     1 |    0 |     10 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     13 |     20 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        1 |       1 |        0 |        0 |        2 |        1 |        0 |        2 |       0 |        0 |        1 |        1 |        2 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        3 |        0 |        1 |       0 |        0 |        0 |        2 |        2 |        0 |        1 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      7 |      0 |      1 | s03      | R    |
| 83931001 |      4 |      1 |      1 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 83933000 |     77 |     25 |     21 |     1 |    0 |     30 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     38 |     39 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      8 |      0 |     10 |      7 |      5 |      0 |     16 |       1 |       5 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        1 |        2 |        1 |        0 |       0 |        4 |        2 |        3 |        5 |        2 |        0 |       0 |        0 |        1 |        2 |        5 |        4 |        0 |       0 |        1 |        0 |        2 |        5 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        2 |        7 |        4 |        0 |       0 |        2 |        3 |        2 |        5 |        2 |        0 |       0 |      0 |      2 |      6 |      6 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      4 |      4 |      5 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      6 |      2 |      1 |      1 |     15 |      0 |      1 | s03      | R    |
| 83953000 |    382 |    115 |    121 |     2 |    0 |    142 |    1 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    194 |    188 |      10 |       8 |       0 |       4 |      1 |      1 |      0 |      6 |      3 |      1 |      0 |      4 |      0 |      5 |      0 |      0 |     25 |     39 |      0 |     62 |     25 |      7 |      0 |      4 |       9 |      12 |       0 |      20 |      3 |      0 |      0 |      1 |        4 |        5 |       16 |       14 |        6 |        6 |       0 |        6 |        4 |       16 |       25 |        5 |        8 |       0 |        3 |        3 |       10 |       24 |       18 |        3 |       1 |        2 |        6 |       12 |       22 |       14 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |        5 |       20 |       27 |       10 |        6 |       1 |       13 |       11 |       13 |       16 |        9 |        3 |       0 |      0 |      0 |     25 |      7 |      8 |      0 |      3 |     72 |      0 |      0 |      1 |     22 |     16 |      7 |      3 |      2 |     70 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     14 |     22 |      6 |      2 |      1 |     98 |      0 |      1 | s03      | R    |
| 85030001 |      2 |      1 |      0 |     0 |    0 |      0 |    0 |    0 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 85030002 |    680 |    351 |    152 |    13 |    0 |    160 |    0 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    344 |    336 |      58 |      12 |       0 |      25 |      5 |      3 |      0 |      8 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      8 |      0 |     11 |     30 |      5 |      0 |     10 |       5 |       2 |       0 |       7 |     22 |      9 |      0 |     17 |       14 |       18 |       30 |       41 |       33 |       19 |       7 |       16 |       31 |       40 |       42 |       33 |       19 |       8 |        5 |        9 |       25 |       18 |        8 |       12 |       3 |        7 |       12 |       18 |       17 |        7 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       18 |       26 |       17 |       13 |       12 |       2 |        4 |       14 |       17 |       15 |        9 |       12 |       4 |      0 |      3 |     30 |     69 |     37 |     10 |     20 |    182 |      0 |      0 |      1 |      9 |     32 |     18 |      4 |     10 |     78 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     23 |     46 |     10 |      4 |      5 |     85 |      0 |      1 | s03      | R    |
| 85031000 |      9 |      8 |      0 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      5 |      4 |       2 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 85032000 |    514 |    245 |    123 |    12 |    0 |    129 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    237 |    277 |      38 |       5 |       0 |      16 |      4 |      3 |      0 |      4 |      4 |      3 |      0 |      4 |      0 |      0 |      0 |      2 |     11 |      4 |      0 |     17 |     12 |      4 |      0 |      2 |       2 |       2 |       0 |       2 |      5 |      2 |      0 |      4 |        4 |       17 |       27 |       29 |       13 |        9 |       0 |       10 |       29 |       36 |       36 |       25 |        8 |       2 |        0 |       12 |       23 |       14 |       10 |        8 |       0 |        3 |        7 |       17 |       15 |       11 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       19 |       15 |       20 |        6 |        3 |       1 |        8 |       19 |       14 |       22 |        8 |        4 |       0 |      0 |      1 |     33 |     37 |     20 |     18 |     13 |    123 |      0 |      0 |      0 |     15 |     16 |     10 |      6 |      7 |     69 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     24 |      6 |      4 |      5 |     85 |      0 |      1 | s03      | R    |
| 85033000 |    750 |    332 |    163 |    14 |    0 |    231 |    3 |    1 |     6 |    0 |    0 |    0 |    0 |    0 |    0 |    352 |    398 |      49 |      11 |       0 |      24 |     10 |      9 |      0 |      4 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      2 |     18 |     22 |      0 |     48 |     11 |      2 |      0 |      8 |       6 |       8 |       0 |       9 |     14 |      7 |      0 |     11 |       11 |       27 |       32 |       31 |       16 |        9 |       0 |        9 |       47 |       49 |       45 |       27 |       27 |       2 |        1 |       21 |       30 |       22 |        8 |       10 |       0 |        4 |       17 |       21 |       12 |       10 |        7 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       27 |       44 |       29 |       13 |       11 |       0 |        9 |       35 |       38 |       18 |       14 |        6 |       1 |      0 |      3 |     49 |     65 |     19 |      9 |     22 |    165 |      0 |      0 |      1 |     21 |     33 |     13 |      6 |      5 |     84 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     39 |     42 |     12 |      5 |      2 |    151 |      0 |      1 | s03      | R    |
| 85040000 |    579 |    338 |    120 |    12 |    0 |    102 |    4 |    1 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    284 |    295 |      86 |      16 |       0 |      14 |      9 |      4 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      4 |     15 |      4 |      0 |      4 |     12 |      3 |      0 |      6 |       2 |       5 |       0 |       1 |     11 |      0 |      0 |      7 |       13 |       19 |       19 |       26 |       34 |       25 |      15 |       11 |       22 |       37 |       34 |       40 |       25 |      18 |        3 |        4 |       19 |       17 |       14 |        6 |       7 |        5 |        3 |       13 |        6 |       16 |        3 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |       12 |       17 |        8 |       10 |        5 |       3 |       13 |       10 |       17 |        7 |        4 |        6 |       1 |      0 |      2 |     20 |     60 |     23 |     13 |     19 |    201 |      0 |      0 |      0 |      9 |     21 |     11 |      4 |      9 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     19 |     17 |      4 |      8 |      3 |     67 |      0 |      1 | s03      | R    |
| 85041001 |     25 |     14 |      6 |     1 |    0 |      4 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     17 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        3 |        0 |       0 |        0 |        1 |        1 |        2 |        2 |        0 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     10 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 85041002 |    735 |    391 |    176 |    10 |    0 |    149 |    4 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    357 |    378 |      98 |      21 |       0 |      34 |     13 |      5 |      0 |      2 |      3 |      2 |      0 |      3 |      3 |      6 |      0 |      2 |      2 |      2 |      0 |     10 |     12 |     12 |      0 |      9 |       2 |       0 |       0 |       6 |     18 |      3 |      0 |      6 |       13 |       20 |       38 |       34 |       27 |       31 |      15 |       14 |       27 |       42 |       49 |       36 |       27 |      18 |        6 |       14 |       30 |       21 |        9 |       10 |       6 |        4 |        8 |       25 |       13 |        9 |        8 |      13 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       15 |       24 |       18 |       12 |        2 |       3 |       13 |       21 |       28 |       10 |        6 |        4 |       3 |      0 |      2 |     45 |     65 |     23 |     11 |     26 |    219 |      0 |      0 |      0 |     16 |     31 |     14 |     11 |     10 |     94 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     27 |     26 |     14 |      5 |      1 |     92 |      0 |      1 | s03      | R    |
| 85042000 |    542 |    290 |    134 |    12 |    0 |    100 |    2 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    278 |    264 |      54 |       6 |       0 |      10 |     15 |      3 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |     10 |      6 |      0 |     15 |     15 |      3 |      0 |      8 |       6 |       6 |       0 |       4 |     10 |      6 |      0 |      7 |        9 |       18 |       23 |       35 |       23 |       14 |      11 |       11 |       28 |       31 |       37 |       32 |       11 |       7 |        2 |        8 |       17 |       23 |       15 |       11 |       4 |        3 |        5 |       13 |       13 |        9 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       10 |       13 |       17 |        9 |        5 |       1 |       11 |       10 |       10 |       13 |        6 |        3 |       0 |      0 |      4 |     32 |     46 |     24 |      9 |     21 |    154 |      0 |      0 |      0 |      8 |     26 |      6 |      8 |     11 |     75 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     23 |     17 |      6 |      4 |      2 |     64 |      0 |      1 | s03      | R    |
| 85050000 |    891 |    465 |    188 |    30 |    0 |    199 |    4 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    430 |    461 |     100 |      29 |       0 |      43 |      9 |      8 |      0 |      5 |      3 |      2 |      0 |      2 |      1 |      5 |      0 |      1 |     16 |      9 |      0 |     24 |     35 |      4 |      0 |     17 |       3 |       8 |       0 |       6 |     20 |      6 |      0 |     13 |       16 |       26 |       50 |       56 |       31 |       10 |      17 |       24 |       37 |       61 |       60 |       33 |       21 |      23 |        2 |       14 |       28 |       20 |       13 |       11 |       7 |        3 |       13 |       30 |       20 |       17 |        5 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       22 |       34 |       36 |       12 |        9 |       1 |       20 |       23 |       27 |       19 |        9 |        5 |       6 |      0 |      1 |     45 |     71 |     32 |     13 |     11 |    292 |      0 |      0 |      2 |     21 |     35 |     18 |     11 |     14 |     87 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     46 |     31 |     16 |      4 |      1 |    136 |      0 |      1 | s03      | R    |
| 85060000 |    967 |    532 |    184 |    21 |    0 |    220 |    6 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    468 |    499 |     185 |      31 |       0 |      59 |     11 |      5 |      0 |      5 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |     17 |      2 |      0 |     21 |     31 |      2 |      0 |     14 |       5 |       8 |       0 |       6 |     18 |     10 |      0 |     19 |       22 |       44 |       44 |       40 |       36 |       33 |      15 |       35 |       70 |       56 |       52 |       29 |       32 |      24 |        6 |       33 |       33 |       17 |        9 |        5 |       3 |        6 |       18 |       21 |       13 |        6 |       10 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       34 |       32 |       23 |        7 |       10 |       3 |       22 |       36 |       26 |       25 |       10 |        3 |       1 |      0 |      4 |     70 |     73 |     26 |     11 |     13 |    335 |      0 |      0 |      0 |     14 |     36 |     11 |      8 |      8 |    107 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     37 |     35 |      8 |      5 |      1 |    163 |      0 |      1 | s03      | R    |
| 85080000 |    559 |    333 |     88 |    15 |    0 |    116 |    1 |    3 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    240 |    319 |     147 |      19 |       0 |      54 |      6 |      4 |      0 |      4 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      6 |      4 |      0 |      6 |     18 |      3 |      0 |      6 |       2 |       0 |       0 |       2 |      8 |      4 |      0 |      5 |       10 |       22 |       29 |       26 |       21 |       18 |       9 |       26 |       40 |       36 |       33 |       21 |       29 |      13 |        4 |        9 |       14 |        9 |        1 |        0 |       1 |        6 |       11 |        9 |        7 |        9 |        6 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       14 |       22 |       17 |       10 |        3 |        1 |       0 |       15 |       20 |       20 |       13 |        1 |        2 |       0 |      0 |      1 |     30 |     51 |     12 |      9 |      9 |    221 |      0 |      0 |      0 |      9 |      6 |      4 |      2 |      4 |     63 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     22 |     13 |      4 |      2 |      5 |     90 |      0 |      1 | s03      | R    |
| 85081000 |    692 |    376 |    139 |    11 |    0 |    158 |    4 |    2 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    356 |    336 |      72 |      17 |       0 |      28 |      4 |      2 |      0 |      2 |      1 |      3 |      0 |      2 |      6 |      0 |      0 |      1 |     10 |      7 |      0 |     17 |     17 |      4 |      0 |     13 |       1 |       4 |       0 |       4 |     30 |     11 |      0 |      8 |       13 |       29 |       51 |       34 |       34 |       14 |       8 |       21 |       32 |       40 |       43 |       27 |       20 |      10 |        4 |       11 |       27 |       12 |       10 |        8 |       2 |        2 |       11 |       25 |       10 |        8 |        6 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       12 |       23 |       22 |       13 |        9 |       1 |       10 |       20 |       25 |       10 |        7 |        3 |       3 |      0 |      2 |     30 |     81 |     28 |     14 |     10 |    211 |      0 |      0 |      2 |     12 |     34 |     13 |      5 |      9 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     31 |     29 |      9 |      5 |      1 |    102 |      0 |      1 | s03      | R    |
| 85090000 |    797 |    408 |    221 |    17 |    0 |    144 |    2 |    0 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    394 |    403 |      80 |      26 |       0 |      23 |     11 |      6 |      0 |      8 |      1 |      1 |      0 |      1 |      7 |      4 |      0 |      0 |      9 |      8 |      0 |      4 |     19 |      4 |      0 |      7 |       2 |       4 |       0 |       4 |     15 |      7 |      0 |      7 |       11 |       23 |       30 |       43 |       38 |       19 |      16 |       17 |       34 |       38 |       60 |       42 |       23 |      14 |       12 |       12 |       20 |       27 |       24 |        9 |       7 |        8 |       12 |       27 |       28 |       15 |       12 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       21 |       20 |       17 |       22 |       14 |        7 |       2 |        6 |       13 |       16 |       15 |       10 |        5 |       0 |      0 |      2 |     46 |     67 |     30 |     22 |     18 |    223 |      0 |      0 |      3 |     19 |     34 |     19 |     10 |     12 |    124 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     28 |     26 |     11 |      4 |      7 |     88 |      0 |      1 | s03      | R    |
| 85100000 |    814 |    422 |    178 |    18 |    0 |    191 |    1 |    0 |     4 |    0 |    0 |    0 |    0 |    0 |    0 |    417 |    397 |      84 |      24 |       0 |      28 |     11 |      3 |      0 |      6 |      5 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |     15 |      5 |      0 |     28 |     20 |      3 |      0 |      4 |       5 |       3 |       0 |       3 |     18 |      3 |      0 |     10 |       15 |       28 |       31 |       52 |       35 |       19 |      11 |       17 |       38 |       51 |       45 |       35 |       31 |      14 |        3 |       20 |       30 |       24 |       15 |       12 |       4 |        5 |        9 |       15 |       17 |       10 |        3 |      11 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       19 |       25 |       26 |       31 |       13 |        4 |       0 |       13 |       24 |       26 |       18 |        6 |        9 |       0 |      0 |      2 |     49 |     55 |     27 |     20 |     20 |    249 |      0 |      0 |      1 |     16 |     19 |     13 |      9 |     14 |    106 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     51 |     39 |     12 |      6 |      2 |    101 |      0 |      1 | s03      | R    |
| 85120000 |    699 |    396 |    142 |    11 |    0 |    140 |    4 |    1 |     5 |    0 |    0 |    0 |    0 |    0 |    0 |    345 |    354 |     119 |      27 |       0 |      28 |     10 |      3 |      0 |     10 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      3 |      3 |      3 |      0 |      7 |      9 |      2 |      0 |      6 |       2 |       5 |       0 |       5 |      9 |      3 |      0 |      3 |       19 |       25 |       32 |       35 |       26 |       23 |      15 |       19 |       34 |       45 |       63 |       22 |       16 |      22 |        6 |       14 |       24 |       20 |       10 |        6 |       4 |        4 |        6 |       18 |       12 |        7 |        5 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       19 |       27 |       18 |        8 |        2 |       1 |       11 |       12 |       26 |       13 |        9 |        4 |       0 |      0 |      4 |     43 |     72 |     29 |     16 |     25 |    207 |      0 |      0 |      1 |     12 |     24 |     10 |     10 |      7 |     78 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     28 |     35 |      9 |      4 |      3 |     79 |      0 |      1 | s03      | R    |
| 85130000 |    710 |    390 |    155 |    13 |    0 |    138 |    6 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    326 |    384 |     110 |      12 |       0 |      29 |      7 |      6 |      0 |      6 |      3 |      0 |      0 |      2 |      9 |      2 |      0 |      0 |     13 |      3 |      0 |     14 |     12 |      3 |      0 |      5 |       5 |       2 |       0 |       0 |     15 |      8 |      0 |      6 |        5 |       37 |       39 |       25 |       22 |       16 |      14 |       16 |       40 |       53 |       57 |       25 |       29 |      12 |        5 |        8 |       23 |       14 |       14 |        8 |       8 |        6 |       11 |       22 |       10 |       11 |        6 |       9 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       12 |       18 |       23 |       16 |       12 |        7 |       0 |       13 |       17 |       19 |       11 |       10 |        3 |       4 |      0 |      3 |     43 |     68 |     33 |     12 |     26 |    205 |      0 |      0 |      1 |     17 |     28 |      9 |     12 |     10 |     78 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |     14 |     34 |     11 |      3 |      6 |     93 |      0 |      1 | s03      | R    |
| 85150000 |    709 |    323 |    244 |    11 |    0 |    123 |    4 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    355 |    354 |      42 |      11 |       0 |      12 |     16 |     14 |      0 |      7 |      1 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |     10 |      9 |      0 |      7 |     10 |      3 |      0 |      2 |       0 |       1 |       0 |       2 |     12 |      3 |      0 |      3 |        8 |       16 |       25 |       28 |       30 |       22 |      12 |        8 |       16 |       33 |       41 |       35 |       25 |      24 |        3 |       14 |       21 |       27 |       30 |       24 |      13 |        5 |        9 |       22 |       13 |       26 |       20 |      17 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |       13 |       20 |       12 |       11 |        4 |       5 |       13 |       14 |       12 |        8 |        7 |        2 |       4 |      0 |      2 |     35 |     52 |     23 |     14 |     14 |    183 |      0 |      0 |      1 |     19 |     46 |     16 |     12 |     13 |    137 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     26 |     26 |      8 |      2 |      6 |     73 |      0 |      1 | s03      | R    |
| 85151000 |    714 |    353 |    205 |     7 |    0 |    143 |    4 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    303 |    411 |      65 |      13 |       0 |       9 |     13 |     10 |      0 |      4 |      3 |      1 |      0 |      2 |      3 |      1 |      0 |      1 |     19 |     12 |      0 |     56 |      8 |      1 |      0 |      2 |       1 |       1 |       0 |       1 |     13 |      3 |      0 |      0 |        6 |        7 |       16 |       22 |       19 |       38 |      26 |       13 |       11 |       22 |       29 |       31 |       84 |      29 |        4 |        8 |       20 |       17 |       10 |       10 |      18 |        6 |        2 |       20 |       16 |       17 |       36 |      21 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        6 |        1 |       16 |       15 |        9 |       31 |       4 |        4 |        6 |       11 |        8 |        3 |       40 |       2 |      0 |      1 |     33 |     58 |     30 |     12 |     18 |    201 |      0 |      0 |      0 |     12 |     38 |     10 |     13 |     11 |    121 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     11 |     33 |      6 |      1 |      7 |     96 |      0 |      1 | s03      | R    |
| 85152000 |    716 |    347 |    219 |    10 |    0 |    130 |    5 |    3 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |    363 |    353 |      53 |      14 |       0 |      16 |     13 |      4 |      0 |      5 |      2 |      0 |      0 |      0 |      5 |      4 |      0 |      2 |     15 |     12 |      0 |      7 |      7 |      1 |      0 |      3 |       3 |       1 |       0 |       2 |     11 |      5 |      0 |      6 |       10 |       19 |       27 |       39 |       34 |       15 |      16 |       16 |       14 |       44 |       40 |       28 |       20 |      25 |        5 |       16 |       34 |       21 |       17 |       15 |      14 |        5 |       14 |       18 |       18 |       19 |        9 |      14 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        7 |       16 |       23 |       18 |        8 |        7 |       2 |        6 |       19 |       17 |       12 |        6 |        7 |       2 |      0 |      3 |     28 |     57 |     28 |     20 |     25 |    186 |      0 |      0 |      1 |     12 |     41 |     13 |     14 |     18 |    120 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     22 |     34 |     10 |      4 |      5 |     72 |      0 |      1 | s03      | R    |
| 85160000 |    528 |    309 |    124 |    10 |    0 |     79 |    6 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |    243 |    285 |     113 |      15 |       0 |      26 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      2 |      0 |      0 |      4 |      5 |      1 |      0 |      3 |       1 |       1 |       0 |       1 |      0 |      4 |      0 |      1 |       13 |       21 |       23 |       22 |       16 |       12 |      28 |       14 |       34 |       32 |       36 |       16 |       19 |      23 |        2 |        5 |       18 |       11 |        8 |       10 |       6 |        1 |        7 |       15 |        4 |       10 |       12 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       10 |        9 |       12 |        4 |        1 |       3 |        6 |       16 |       11 |        8 |        4 |        0 |       2 |      0 |      2 |     33 |     54 |     25 |      3 |     17 |    175 |      0 |      0 |      0 |     10 |     19 |      7 |      1 |      7 |     80 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     18 |     20 |      2 |      3 |      3 |     47 |      0 |      1 | s03      | R    |
| 85170000 |    668 |    336 |    188 |     7 |    0 |    125 |    4 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    313 |    355 |      68 |      19 |       0 |      28 |     10 |      8 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      4 |      6 |      0 |      4 |     13 |      3 |      0 |      5 |       1 |       1 |       0 |       1 |      6 |      4 |      0 |      4 |        5 |       20 |       28 |       27 |       17 |       21 |      28 |       12 |       24 |       34 |       35 |       35 |       23 |      27 |        4 |        9 |       23 |       22 |       20 |       11 |      10 |        4 |        9 |       16 |       14 |       15 |       16 |      15 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       11 |       12 |       14 |       14 |        9 |        4 |       4 |       16 |       18 |       15 |       10 |       11 |        4 |       2 |      0 |      2 |     29 |     57 |     22 |      5 |     18 |    203 |      0 |      0 |      1 |     13 |     32 |     18 |      8 |     10 |    106 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     25 |     26 |      7 |      3 |      4 |     77 |      0 |      1 | s03      | R    |
| 85180000 |    758 |    380 |    177 |    17 |    0 |    174 |    2 |    1 |     7 |    0 |    0 |    0 |    0 |    0 |    0 |    354 |    404 |      75 |      21 |       0 |      36 |      7 |      6 |      0 |      7 |      3 |      2 |      0 |      5 |      4 |      0 |      0 |      3 |      4 |      1 |      0 |     11 |      9 |      0 |      0 |      3 |       4 |       0 |       0 |       2 |     15 |      4 |      0 |      9 |       12 |       19 |       22 |       38 |       25 |       19 |      24 |       16 |       23 |       43 |       57 |       28 |       27 |      27 |        6 |        8 |       16 |       24 |       22 |       10 |       7 |        6 |       11 |       15 |       20 |       13 |       11 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       20 |       22 |       19 |       15 |        7 |       4 |       16 |       22 |       20 |       23 |        8 |        8 |       2 |      0 |      2 |     38 |     67 |     27 |     14 |     20 |    212 |      0 |      0 |      0 |      9 |     35 |     16 |     13 |     12 |     92 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     20 |     54 |     16 |      4 |      3 |    103 |      0 |      1 | s03      | R    |
| 85190000 |    454 |    278 |     75 |    11 |    0 |     84 |    4 |    1 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    222 |    232 |     125 |       9 |       0 |      34 |      5 |      2 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      2 |       1 |       0 |       0 |       4 |      8 |      1 |      0 |      3 |       10 |       18 |       25 |       24 |       23 |       11 |      16 |       10 |       22 |       23 |       26 |       21 |       20 |      29 |        3 |        9 |        6 |       12 |        2 |        5 |       3 |        2 |        1 |        8 |        6 |        5 |        5 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       10 |       14 |       11 |        2 |        6 |       3 |       14 |        6 |       12 |       10 |        1 |        2 |       1 |      0 |      5 |     32 |     48 |     15 |      5 |      8 |    165 |      0 |      0 |      1 |      2 |     17 |      6 |      3 |      1 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |     18 |      3 |      1 |      5 |     57 |      0 |      1 | s03      | R    |
| 85200000 |    551 |    327 |    113 |    12 |    0 |     93 |    3 |    2 |     1 |    0 |    0 |    0 |    0 |    0 |    0 |    252 |    299 |      83 |      17 |       0 |      22 |      0 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      1 |      2 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |       4 |       7 |       0 |       8 |     16 |      2 |      0 |      5 |        8 |       13 |       33 |       35 |       14 |       16 |      24 |       14 |       34 |       36 |       38 |       15 |       21 |      26 |        3 |       12 |       13 |       15 |        6 |        4 |       5 |        5 |        8 |       13 |       12 |        6 |        6 |       5 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        9 |       13 |       12 |        8 |        6 |        3 |       0 |        6 |       20 |       13 |       13 |        2 |        5 |       1 |      0 |      2 |     34 |     58 |     27 |     11 |     15 |    180 |      0 |      0 |      1 |      8 |     21 |      6 |      4 |      7 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     12 |     29 |      4 |      3 |      4 |     57 |      0 |      1 | s03      | R    |
| 85201000 |    741 |    375 |    185 |    18 |    0 |    153 |    5 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    354 |    387 |     129 |      29 |       0 |      43 |      8 |      6 |      0 |      4 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      3 |      0 |      5 |     13 |      8 |      0 |      4 |       2 |       1 |       0 |       7 |     11 |      7 |      0 |      7 |       16 |       24 |       36 |       21 |       20 |       22 |      21 |       14 |       29 |       33 |       51 |       26 |       33 |      29 |        7 |       12 |       30 |       22 |       14 |        8 |       2 |        4 |        7 |       21 |       25 |       13 |       12 |       8 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       16 |       18 |       26 |       24 |        8 |        5 |       2 |       14 |       18 |       21 |       12 |       10 |        5 |       2 |      0 |      2 |     38 |     57 |     29 |     16 |      8 |    225 |      0 |      0 |      1 |     16 |     38 |     11 |      9 |     13 |     97 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     34 |     26 |     13 |      0 |      2 |    105 |      0 |      1 | s03      | R    |
| 85210000 |    631 |    375 |    103 |     8 |    0 |    135 |    5 |    2 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    304 |    327 |     133 |      18 |       0 |      48 |      7 |      3 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      3 |      0 |      1 |     11 |      3 |      0 |     11 |      6 |      5 |      0 |      2 |       3 |       0 |       0 |       3 |     16 |      4 |      0 |      6 |       14 |       28 |       30 |       41 |       22 |       21 |       7 |       18 |       42 |       47 |       45 |       16 |       29 |      15 |        4 |       15 |       19 |       11 |        7 |        5 |       1 |        6 |        9 |        9 |        5 |        6 |        5 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       15 |       23 |       15 |       12 |        9 |        5 |       0 |       13 |       18 |       18 |       10 |       10 |        2 |       3 |      0 |      4 |     52 |     66 |     29 |     11 |     20 |    193 |      0 |      0 |      1 |     14 |     19 |      8 |      4 |      7 |     50 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |     29 |     11 |      7 |      3 |     81 |      0 |      1 | s03      | R    |
| 85220000 |    486 |    284 |     73 |     8 |    0 |    112 |    5 |    1 |     3 |    0 |    0 |    0 |    0 |    0 |    0 |    234 |    252 |      83 |      14 |       0 |      40 |      7 |      4 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |     19 |      1 |      0 |      1 |       4 |       2 |       0 |       6 |     13 |      7 |      0 |      7 |        6 |       12 |       29 |       32 |        9 |       21 |      15 |       16 |       21 |       33 |       31 |       18 |       24 |      17 |        5 |        4 |       10 |       10 |        5 |        4 |       4 |        3 |        3 |        6 |        8 |        5 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |       16 |       12 |       14 |        6 |        7 |       3 |        8 |       17 |       17 |        7 |        6 |        5 |       1 |      0 |      2 |     40 |     42 |     13 |      8 |      7 |    172 |      0 |      0 |      0 |      5 |      7 |      4 |      4 |      4 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     28 |     25 |      5 |      0 |      1 |     69 |      0 |      1 | s03      | R    |
| 86680001 |     40 |     22 |     17 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     18 |     22 |       2 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        2 |        2 |        2 |       0 |        0 |        2 |        2 |        4 |        3 |        2 |       0 |        0 |        2 |        1 |        2 |        3 |        0 |       0 |        0 |        1 |        3 |        4 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      5 |      6 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      2 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 86680002 |    349 |    152 |    116 |     2 |    0 |     65 |    0 |    0 |    14 |    0 |    0 |    0 |    0 |    0 |    0 |    168 |    181 |       5 |       1 |       0 |       3 |      9 |      4 |      0 |      3 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        5 |        6 |       13 |       16 |        5 |      10 |        4 |       10 |       17 |       28 |       21 |        7 |       8 |        2 |        5 |        9 |       18 |       12 |       10 |      10 |        4 |        3 |        8 |       14 |       11 |        4 |       6 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |       11 |       11 |       10 |        5 |       0 |        3 |        5 |        7 |        8 |        7 |        4 |       2 |      0 |      2 |      8 |     18 |      7 |      6 |     13 |     98 |      0 |      0 |      5 |     10 |     13 |      7 |      5 |      9 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |     13 |      6 |      6 |      2 |     45 |      0 |      1 | s03      | R    |
| 86681001 |     40 |      8 |     21 |     1 |    0 |     10 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     19 |     21 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        3 |        1 |        1 |       0 |        0 |        0 |        3 |        3 |        3 |        2 |       1 |        1 |        0 |        1 |        1 |        3 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        2 |        0 |        1 |       0 |        1 |        0 |        2 |        1 |        2 |        0 |       0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      9 |      0 |      1 | s03      | R    |
| 86681002 |      4 |      0 |      4 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 86682001 |     89 |     36 |     28 |     1 |    0 |     21 |    1 |    0 |     2 |    0 |    0 |    0 |    0 |    0 |    0 |     45 |     44 |       3 |       1 |       0 |       1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        1 |        3 |        6 |        6 |        1 |       0 |        2 |        0 |        2 |        5 |        7 |        2 |       1 |        1 |        3 |        1 |        2 |        2 |        2 |       1 |        1 |        1 |        3 |        4 |        2 |        3 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        5 |        1 |        1 |        6 |        3 |        0 |       0 |        4 |        0 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |      0 |      9 |      2 |      2 |      1 |     22 |      0 |      0 |      0 |      1 |      8 |      1 |      1 |      1 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      4 |      1 |      1 |      0 |     17 |      0 |      1 | s03      | R    |
| 86684000 |      4 |      0 |      4 |     0 |    0 |      0 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 86685000 |      3 |      0 |      2 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
| 86691000 |     22 |      6 |     11 |     0 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     12 |       0 |       0 |       0 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        3 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       2 |        0 |        0 |        1 |        3 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      1 | s03      | R    |
| 86710001 |      8 |      2 |      5 |     0 |    0 |      1 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      3 |      5 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 | s03      | R    |
| 86710002 |     22 |      8 |     10 |     0 |    0 |      3 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     10 |     12 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        0 |        1 |        2 |        2 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 86720001 |     17 |      6 |      6 |     0 |    0 |      5 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      9 |      8 |       2 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       1 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      0 |      1 | s03      | R    |
| 86720002 |     42 |     14 |     20 |     1 |    0 |      6 |    1 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |     20 |     22 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        1 |        3 |        0 |       0 |        2 |        0 |        1 |        1 |        3 |        1 |       0 |        1 |        0 |        1 |        4 |        3 |        0 |       0 |        1 |        0 |        2 |        4 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |      0 |      4 |      2 |      1 |      1 |      6 |      0 |      0 |      0 |      1 |      4 |      5 |      1 |      3 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      1 | s03      | R    |
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| 88010001 |     12 |      3 |      7 |     0 |    0 |      2 |    0 |    0 |     0 |    0 |    0 |    0 |    0 |    0 |    0 |      6 |      6 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 | s03      | R    |
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