+---------+---------+--------+--------+-------+------+-------+------+------+-------+------+--------+------+------+------+------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+----------+------+
| rgprec  | totreg  | dem    | rep    | aip   | paf  | msc   | lib  | nlp  | grn   | ref  | dcl    | mr   | mrs  | miss | ms   | male   | female | hispdem | hisprep | hispdcl | hispoth | jewdem | jewrep | jewdcl | jewoth | kordem | korrep | kordcl | koroth | japdem | japrep | japdcl | japoth | chidem | chirep | chidcl | chioth | inddem | indrep | inddcl | indoth | vietdem | vietrep | vietdcl | vietoth | fildem | filrep | fildcl | filoth | demm1824 | demm2534 | demm3544 | demm4554 | demm5564 | demm65pl | demmunk | demf1824 | demf2534 | demf3544 | demf4554 | demf5564 | demf65pl | demfunk | repm1824 | repm2534 | repm3544 | repm4554 | repm5564 | repm65pl | repmunk | repf1824 | repf2534 | repf3544 | repf4554 | repf5564 | repf65pl | repfunk | dclm1824 | dclm2534 | dclm3544 | dclm4554 | dclm5564 | dclm65pl | dclmunk | dclf1824 | dclf2534 | dclf3544 | dclf4554 | dclf5564 | dclf65pl | dclfunk | othm1824 | othm2534 | othm3544 | othm4554 | othm5564 | othm65pl | othmunk | othf1824 | othf2534 | othf3544 | othf4554 | othf5564 | othf65pl | othfunk | dreg1g | dreg2g | dreg3g | dreg4g | dreg5g | dreg6g | dreg7g | dreg8g | dreg9g | rreg1g | rreg2g | rreg3g | rreg4g | rreg5g | rreg6g | rreg7g | rreg8g | rreg9g | ireg1g | ireg2g | ireg3g | ireg4g | ireg5g | ireg6g | ireg7g | ireg8g | ireg9g | oreg1g | oreg2g | oreg3g | oreg4g | oreg5g | oreg6g | oreg7g | oreg8g | oreg9g | county | election | type |
+---------+---------+--------+--------+-------+------+-------+------+------+-------+------+--------+------+------+------+------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+----------+------+
| 1000000 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1000200 |       2 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1000500 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1001000 |      11 |      5 |      3 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      5 |       3 |       0 |       1 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1002200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1002300 |       4 |      4 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      4 |       4 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1050000 |     763 |    213 |    415 |    10 |    0 |     6 |    1 |    1 |     0 |    0 |    117 |    0 |    0 |    0 |    0 |    310 |    453 |       1 |       5 |       0 |       0 |     47 |     22 |     23 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        0 |        0 |        2 |        6 |       68 |       0 |        0 |        0 |        1 |        8 |       17 |      109 |       2 |        0 |        0 |        1 |        5 |       20 |      145 |       2 |        0 |        0 |        2 |        7 |       28 |      200 |       5 |        0 |        1 |        0 |        2 |        4 |       43 |       1 |        1 |        1 |        2 |        1 |       10 |       50 |       1 |        0 |        0 |        0 |        1 |        1 |        8 |       0 |        0 |        0 |        0 |        0 |        1 |        7 |       0 |      0 |      0 |     26 |     49 |     12 |     13 |      7 |    106 |      0 |      0 |      6 |     31 |     56 |     35 |     22 |     25 |    240 |      0 |      0 |      0 |     21 |     14 |      6 |      6 |      4 |     66 |      0 |      0 |      0 |      1 |      9 |      0 |      3 |      0 |      5 |      0 |     37 | s03      | R    |
| 1050100 |      26 |      7 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |      9 |     17 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        0 |        3 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        2 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1050200 |     808 |    181 |    478 |     9 |    0 |     3 |    3 |    1 |     2 |    0 |    131 |    0 |    0 |    0 |    0 |    381 |    427 |       2 |       5 |       2 |       0 |     36 |     42 |     12 |      2 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      3 |     10 |      6 |      0 |      0 |      1 |      0 |      0 |       1 |       1 |       1 |       0 |      0 |      3 |      0 |      0 |        3 |        1 |        4 |        7 |       11 |       41 |       2 |        7 |        7 |        7 |       24 |       19 |       48 |       0 |       14 |        9 |       18 |       41 |       48 |      104 |       4 |        6 |       11 |       20 |       46 |       49 |      107 |       1 |        6 |        5 |        9 |       14 |       13 |       17 |       0 |        8 |        3 |        9 |       16 |        9 |       22 |       0 |        5 |        1 |        1 |        0 |        1 |        2 |       0 |        1 |        1 |        2 |        0 |        0 |        4 |       0 |      0 |      0 |     13 |     26 |     17 |      8 |     33 |     84 |      0 |      0 |      4 |     43 |     77 |     43 |     12 |     52 |    247 |      0 |      0 |      0 |     14 |     17 |      7 |      1 |     11 |     81 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1050400 |     463 |    119 |    274 |     6 |    0 |     3 |    1 |    0 |     0 |    0 |     60 |    0 |    0 |    0 |    0 |    179 |    284 |       3 |       1 |       1 |       0 |     19 |     18 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        4 |       39 |       1 |        0 |        0 |        1 |        5 |        9 |       59 |       1 |        0 |        1 |        1 |        1 |        7 |       99 |       2 |        0 |        1 |        0 |        4 |       19 |      137 |       2 |        0 |        0 |        1 |        0 |        1 |       16 |       1 |        1 |        0 |        0 |        2 |        8 |       30 |       0 |        0 |        0 |        0 |        1 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        5 |       0 |      0 |      1 |     12 |     14 |     11 |      5 |      8 |     68 |      0 |      0 |      0 |     25 |     42 |     20 |     15 |     18 |    154 |      0 |      0 |      0 |      5 |      8 |      0 |      6 |      1 |     40 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1050500 |     556 |    128 |    284 |    10 |    0 |     5 |    5 |    1 |     2 |    0 |    121 |    0 |    0 |    0 |    0 |    259 |    297 |       2 |      19 |       2 |       0 |     33 |     11 |     11 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      5 |      2 |      6 |      4 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        8 |        3 |        6 |       11 |       20 |        4 |       0 |        4 |        6 |       12 |       26 |       12 |       16 |       0 |        9 |        4 |       17 |       40 |       36 |       33 |       0 |       11 |        8 |       31 |       32 |       27 |       34 |       2 |       10 |        6 |       10 |        7 |       12 |        8 |       0 |       13 |        6 |       14 |       14 |       13 |        8 |       0 |        2 |        2 |        1 |        6 |        3 |        1 |       0 |        0 |        1 |        1 |        4 |        1 |        1 |       0 |      0 |      0 |     18 |     15 |      8 |      8 |      7 |     72 |      0 |      0 |      2 |     49 |     51 |     10 |     11 |     38 |    123 |      0 |      0 |      1 |     22 |     10 |      3 |      3 |      9 |     73 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |     17 |      0 |     37 | s03      | R    |
| 1050800 |       3 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      1 |       1 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1051000 |     474 |    128 |    263 |    11 |    0 |     2 |    1 |    1 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    213 |    261 |       7 |       3 |       3 |       0 |     15 |     12 |      5 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        3 |        1 |       12 |       16 |        7 |        5 |       3 |        5 |        3 |       19 |       19 |       12 |       21 |       2 |        4 |        8 |       23 |       25 |       21 |       34 |      11 |        3 |        9 |       18 |       21 |       22 |       43 |      21 |        4 |        5 |        4 |        5 |        9 |        3 |       3 |        4 |        8 |        5 |        8 |        4 |        1 |       4 |        1 |        0 |        3 |        1 |        0 |        2 |       0 |        1 |        2 |        0 |        1 |        3 |        1 |       1 |      0 |      1 |     15 |     16 |      6 |     11 |      2 |     77 |      0 |      0 |      1 |     17 |     37 |     14 |      6 |     16 |    172 |      0 |      0 |      0 |      8 |      9 |      3 |      5 |      3 |     39 |      0 |      0 |      0 |      3 |      3 |      1 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 1051100 |     496 |    110 |    303 |     4 |    0 |     2 |    0 |    1 |     2 |    0 |     74 |    0 |    0 |    0 |    0 |    237 |    259 |       8 |      12 |       4 |       2 |     16 |     23 |      3 |      1 |      0 |      1 |      1 |      0 |      2 |      1 |      1 |      0 |      0 |      1 |      1 |      1 |      2 |      4 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        3 |        2 |        4 |       18 |       10 |        8 |       5 |        4 |        3 |       10 |       19 |       10 |        9 |       5 |        9 |       12 |       21 |       29 |       27 |       36 |      11 |        9 |        7 |       25 |       37 |       23 |       40 |      17 |       10 |        0 |        5 |       12 |        8 |        1 |       1 |        5 |        4 |        7 |       10 |        3 |        6 |       2 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |     14 |     18 |      3 |      3 |      3 |     69 |      0 |      0 |      1 |     19 |     42 |     21 |     14 |     11 |    195 |      0 |      0 |      0 |      9 |      8 |      4 |      1 |      4 |     48 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1051200 |     531 |    139 |    323 |     7 |    0 |     1 |    0 |    1 |     0 |    0 |     60 |    0 |    0 |    0 |    0 |    208 |    323 |       4 |       9 |       0 |       0 |     31 |     23 |      8 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        1 |        4 |       44 |       1 |        0 |        0 |        0 |        1 |       15 |       68 |       5 |        0 |        2 |        1 |        3 |       13 |      113 |       3 |        0 |        1 |        2 |        4 |       24 |      149 |       8 |        0 |        0 |        0 |        3 |        4 |       16 |       0 |        0 |        0 |        1 |        0 |       13 |       22 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        7 |       0 |      0 |      1 |     23 |     21 |     12 |      6 |      5 |     71 |      0 |      0 |      2 |     29 |     50 |     25 |     14 |     20 |    183 |      0 |      0 |      0 |     14 |      4 |      5 |      0 |      2 |     35 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1051300 |     390 |    104 |    220 |     4 |    0 |     1 |    0 |    0 |     0 |    0 |     61 |    0 |    0 |    0 |    0 |    151 |    239 |       1 |       2 |       2 |       0 |     16 |      7 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        3 |       32 |       2 |        0 |        1 |        0 |        2 |        9 |       51 |       1 |        0 |        0 |        1 |        1 |        3 |       77 |       1 |        1 |        0 |        1 |        2 |       17 |      111 |       5 |        0 |        0 |        0 |        0 |        9 |       17 |       1 |        0 |        0 |        0 |        3 |        5 |       25 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |      0 |      0 |     16 |     10 |      7 |      3 |     11 |     57 |      0 |      0 |      0 |     27 |     42 |     18 |      6 |     15 |    112 |      0 |      0 |      2 |      7 |      7 |      8 |      2 |      0 |     35 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1051500 |     204 |     69 |     86 |     6 |    0 |     3 |    0 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |     73 |    131 |       0 |       1 |       1 |       0 |      8 |     10 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        0 |        1 |        1 |        2 |       21 |       0 |        0 |        0 |        0 |        1 |        5 |       37 |       1 |        0 |        0 |        0 |        0 |        6 |       20 |       0 |        0 |        0 |        0 |        1 |       14 |       45 |       0 |        0 |        0 |        0 |        3 |        3 |       11 |       0 |        0 |        0 |        0 |        2 |        4 |       16 |       0 |        0 |        0 |        1 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        2 |        3 |       0 |      0 |      0 |      3 |     16 |      6 |      4 |      3 |     37 |      0 |      0 |      2 |     10 |      9 |      5 |      5 |      4 |     51 |      0 |      0 |      0 |     10 |      4 |      3 |      1 |      0 |     21 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 1052000 |     164 |     40 |     85 |     2 |    0 |     3 |    2 |    1 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |     74 |     90 |       1 |       3 |       3 |       1 |      6 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        3 |        2 |        3 |        1 |        0 |        3 |       1 |        1 |        1 |        3 |        9 |        6 |        5 |       2 |        4 |        4 |        7 |       12 |        6 |       10 |       1 |        3 |        2 |        8 |       10 |        5 |        8 |       5 |        0 |        2 |        2 |        3 |        3 |        3 |       0 |        1 |        3 |        5 |        3 |        1 |        3 |       1 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |        2 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      3 |      1 |      1 |      5 |     23 |      0 |      0 |      0 |      4 |     15 |      1 |      5 |      8 |     52 |      0 |      0 |      0 |      5 |      2 |      1 |      1 |      1 |     20 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1052100 |     274 |     89 |    128 |     6 |    0 |     0 |    0 |    0 |     0 |    0 |     51 |    0 |    0 |    0 |    0 |     94 |    180 |       5 |       4 |       4 |       0 |      9 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        2 |        3 |        1 |        2 |       19 |       1 |        3 |        3 |        2 |        6 |        7 |       37 |       3 |        1 |        1 |       11 |        4 |        8 |       18 |       2 |        3 |        3 |        8 |        4 |        7 |       51 |       7 |        1 |        1 |        3 |        3 |        6 |        7 |       0 |        2 |        2 |        2 |        3 |        8 |       11 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        5 |       0 |      0 |      1 |     23 |      9 |     11 |      1 |      0 |     44 |      0 |      0 |      1 |     19 |     20 |      8 |      4 |      5 |     71 |      0 |      0 |      2 |      8 |      9 |      2 |      1 |      0 |     29 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1053800 |     935 |    255 |    449 |    12 |    0 |     2 |    9 |    4 |     8 |    0 |    196 |    0 |    0 |    0 |    0 |    430 |    505 |      24 |      19 |       7 |       2 |     17 |     20 |     11 |      3 |      0 |      0 |      2 |      0 |      1 |      0 |      3 |      0 |      3 |      5 |      7 |      0 |      3 |      0 |      2 |      0 |       3 |       1 |       1 |       0 |      2 |      1 |      3 |      0 |        4 |       12 |       19 |       28 |       15 |       24 |       2 |        8 |       23 |       21 |       33 |       31 |       35 |       0 |       15 |       28 |       38 |       42 |       45 |       45 |       2 |       10 |       25 |       38 |       55 |       52 |       53 |       1 |        9 |       21 |        9 |       20 |       23 |       14 |       0 |       10 |       23 |       17 |       28 |       12 |        9 |       1 |        4 |        3 |        4 |        3 |        1 |        0 |       0 |        4 |        2 |        4 |        7 |        2 |        1 |       0 |      0 |      2 |     32 |     30 |     17 |     11 |     12 |    151 |      0 |      0 |      4 |     48 |     67 |     13 |     16 |     23 |    278 |      0 |      0 |      0 |     29 |     25 |      7 |      1 |      5 |    129 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 1053900 |     514 |     93 |    332 |     5 |    0 |     3 |    1 |    0 |     1 |    0 |     79 |    0 |    0 |    0 |    0 |    230 |    284 |       2 |       5 |       2 |       2 |     13 |     19 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      1 |      3 |      0 |       0 |       1 |       0 |       0 |      2 |      2 |      1 |      0 |        1 |        0 |        6 |        4 |        7 |       16 |       0 |        2 |        3 |        6 |       10 |       11 |       25 |       2 |        8 |       12 |        6 |       23 |       38 |       66 |       0 |        4 |        6 |        6 |       33 |       47 |       80 |       3 |        5 |        4 |        3 |        7 |        8 |       11 |       0 |        1 |        1 |        5 |       13 |       10 |       11 |       0 |        1 |        0 |        0 |        1 |        3 |        0 |       0 |        1 |        0 |        1 |        0 |        2 |        1 |       0 |      0 |      0 |     15 |      6 |      7 |     11 |      5 |     49 |      0 |      0 |      2 |     44 |     61 |     24 |     13 |     30 |    158 |      0 |      0 |      1 |     16 |      9 |      2 |      4 |      3 |     44 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 1054000 |     367 |     97 |    193 |     2 |    0 |     2 |    3 |    0 |     0 |    0 |     70 |    0 |    0 |    0 |    0 |    147 |    220 |       2 |       4 |       2 |       0 |     13 |     25 |      8 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        3 |        3 |        5 |       25 |       0 |        4 |        2 |        2 |       11 |        7 |       32 |       1 |        1 |        5 |       11 |        9 |       15 |       40 |       0 |        2 |        7 |        9 |       11 |       22 |       60 |       1 |        1 |        0 |        1 |        4 |        5 |       13 |       0 |        2 |        7 |        2 |        8 |       10 |       16 |       1 |        0 |        0 |        1 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      7 |     20 |      6 |      9 |      8 |     47 |      0 |      0 |      0 |     21 |     29 |     13 |      6 |     18 |    106 |      0 |      0 |      0 |     11 |      8 |      4 |      1 |      2 |     44 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1054100 |     754 |    216 |    355 |    15 |    0 |     5 |    5 |    3 |     4 |    0 |    151 |    0 |    0 |    0 |    0 |    327 |    427 |      21 |      28 |      13 |       1 |     22 |     22 |     10 |      1 |      1 |      8 |      1 |      2 |      2 |      1 |      2 |      0 |      3 |      0 |      4 |      0 |      3 |      1 |      0 |      0 |       0 |       1 |       3 |       0 |      1 |      4 |      3 |      1 |        4 |       14 |       17 |       19 |        9 |       13 |       1 |        6 |       23 |       23 |       45 |       20 |       21 |       1 |        8 |       28 |       42 |       37 |       24 |       32 |       1 |        9 |       32 |       36 |       40 |       22 |       44 |       0 |        6 |       15 |       13 |       12 |        7 |        9 |       0 |        9 |       20 |       25 |       17 |       10 |        8 |       0 |        2 |        5 |        3 |        0 |        4 |        2 |       0 |        2 |        5 |        5 |        2 |        2 |        0 |       0 |      0 |      1 |     26 |     40 |     16 |      4 |     13 |    116 |      0 |      0 |      0 |     40 |     31 |     15 |     10 |     22 |    237 |      0 |      0 |      1 |     24 |     16 |      4 |      0 |      7 |     99 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      1 |     20 |      0 |     37 | s03      | R    |
| 1054200 |     817 |    204 |    447 |    16 |    0 |     4 |    5 |    1 |     3 |    0 |    137 |    0 |    0 |    0 |    0 |    347 |    470 |      12 |      13 |       8 |       1 |     28 |     20 |     16 |      2 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      1 |      1 |      0 |      1 |      0 |      2 |      0 |       0 |       1 |       0 |       0 |      1 |      7 |      2 |      0 |        1 |        6 |        6 |       13 |       12 |       31 |       0 |        7 |       12 |       21 |       15 |       30 |       49 |       1 |        6 |       22 |       24 |       25 |       45 |       85 |       1 |       10 |       17 |       27 |       37 |       44 |      103 |       1 |        6 |        8 |        4 |        7 |       10 |       21 |       0 |        5 |       12 |        8 |       17 |       23 |       16 |       0 |        1 |        4 |        1 |        4 |        0 |        4 |       0 |        1 |        0 |        3 |        2 |        4 |        5 |       0 |      0 |      2 |     34 |     22 |     13 |      7 |     21 |    105 |      0 |      0 |      1 |     51 |     60 |     33 |     14 |     45 |    243 |      0 |      0 |      2 |     11 |      8 |     16 |      4 |      8 |     88 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      1 |     21 |      0 |     37 | s03      | R    |
| 1054300 |     586 |    159 |    302 |     7 |    0 |     6 |    1 |    0 |     1 |    0 |    110 |    0 |    0 |    0 |    0 |    282 |    304 |       3 |       6 |       1 |       2 |     14 |     11 |      3 |      1 |      4 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      4 |      5 |     10 |      2 |      1 |      4 |      4 |      0 |       1 |       1 |       0 |       0 |      2 |      8 |      5 |      0 |        3 |        3 |        9 |       14 |       10 |       29 |       1 |        3 |        5 |       15 |       22 |       17 |       26 |       2 |       17 |        6 |       23 |       37 |       29 |       45 |       0 |        6 |        4 |       21 |       38 |       24 |       51 |       1 |        6 |        1 |        5 |       12 |       11 |       13 |       1 |        9 |        7 |        8 |       18 |        9 |       10 |       0 |        0 |        1 |        2 |        1 |        1 |        2 |       0 |        3 |        1 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     22 |     30 |      5 |      7 |     35 |     60 |      0 |      0 |      1 |     38 |     50 |     25 |      8 |     53 |    127 |      0 |      0 |      2 |     18 |     10 |      7 |      3 |     10 |     60 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1054400 |     423 |    115 |    232 |     7 |    0 |     5 |    4 |    0 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    182 |    241 |       3 |       8 |       2 |       1 |     23 |     20 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        6 |        5 |        1 |       34 |       0 |        1 |        2 |        0 |       10 |       14 |       42 |       0 |        2 |        1 |        6 |        9 |       11 |       72 |       2 |        1 |        2 |        2 |       13 |       20 |       88 |       3 |        3 |        0 |        2 |        4 |        4 |       12 |       0 |        3 |        2 |        2 |        4 |        8 |       15 |       0 |        0 |        1 |        1 |        0 |        2 |        4 |       0 |        0 |        0 |        2 |        1 |        0 |        6 |       0 |      0 |      1 |      8 |     18 |      8 |      6 |     18 |     56 |      0 |      0 |      2 |     28 |     38 |     12 |     12 |     32 |    108 |      0 |      0 |      2 |     10 |      4 |      6 |      1 |      5 |     31 |      0 |      0 |      1 |      3 |      5 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1054500 |     302 |     79 |    155 |     6 |    0 |     3 |    0 |    0 |     0 |    0 |     59 |    0 |    0 |    0 |    0 |    126 |    176 |       7 |       5 |       1 |       0 |     14 |      9 |     11 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        8 |       21 |       0 |        0 |        0 |        3 |        0 |        6 |       39 |       2 |        1 |        1 |        0 |        4 |       12 |       44 |       1 |        0 |        1 |        0 |        2 |       23 |       54 |      12 |        0 |        0 |        0 |        2 |        6 |       20 |       0 |        0 |        0 |        1 |        3 |        8 |       18 |       1 |        0 |        0 |        0 |        0 |        1 |        5 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |      0 |      0 |      8 |     18 |      6 |      4 |      2 |     41 |      0 |      0 |      4 |     13 |     26 |     12 |      5 |      5 |     90 |      0 |      0 |      0 |      8 |      6 |      3 |      0 |      2 |     40 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1054600 |     193 |     52 |     91 |     7 |    0 |     1 |    1 |    0 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |     94 |     99 |       9 |      11 |       5 |       0 |      2 |      8 |      4 |      1 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        3 |        5 |        9 |        3 |        2 |        0 |       0 |        4 |       10 |        7 |        7 |        2 |        0 |       0 |        7 |       16 |       13 |        7 |        5 |        1 |       0 |        6 |       10 |        9 |       11 |        3 |        3 |       0 |        5 |        5 |        3 |        4 |        1 |        1 |       0 |        8 |       11 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |        1 |        4 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |     44 |      0 |      0 |      1 |     12 |      6 |      0 |      0 |      0 |     72 |      0 |      0 |      0 |      7 |      6 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1055000 |     255 |     74 |    146 |     5 |    0 |     4 |    0 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |    108 |    147 |       5 |       2 |       0 |       0 |      4 |      9 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |       0 |       1 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        1 |        0 |        2 |        2 |       24 |       1 |        0 |        0 |        0 |        0 |        4 |       38 |       2 |        0 |        1 |        0 |        0 |       11 |       48 |       4 |        0 |        0 |        0 |        1 |       19 |       53 |       9 |        0 |        0 |        1 |        0 |        3 |        7 |       0 |        0 |        0 |        1 |        1 |        4 |        8 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        2 |        4 |       0 |      0 |      0 |      5 |     17 |      9 |      2 |      3 |     38 |      0 |      0 |      3 |     18 |     24 |     14 |      5 |      8 |     74 |      0 |      0 |      0 |      5 |      2 |      2 |      0 |      1 |     15 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1055100 |     554 |    174 |    277 |     9 |    0 |     4 |    3 |    0 |     0 |    0 |     87 |    0 |    0 |    0 |    0 |    233 |    321 |       8 |       4 |       6 |       1 |     18 |     15 |     15 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      3 |      0 |      0 |        0 |        1 |        3 |        3 |       17 |       46 |       3 |        1 |        2 |        0 |        4 |       18 |       73 |       3 |        1 |        1 |        1 |        4 |       17 |       84 |       4 |        0 |        0 |        1 |        7 |       22 |      127 |       8 |        0 |        1 |        2 |        2 |       12 |       24 |       0 |        0 |        1 |        1 |        4 |       14 |       26 |       0 |        0 |        0 |        0 |        0 |        1 |        6 |       0 |        0 |        1 |        1 |        0 |        0 |        7 |       0 |      0 |      0 |     26 |     30 |      8 |      6 |      5 |     99 |      0 |      0 |      3 |     30 |     52 |     23 |     11 |     13 |    145 |      0 |      0 |      1 |     14 |     18 |      7 |      1 |      0 |     46 |      0 |      0 |      1 |      4 |      5 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1056000 |      83 |     28 |     42 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     36 |     47 |       2 |       2 |       1 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        3 |        5 |       0 |        0 |        0 |        0 |        0 |        2 |       14 |       2 |        0 |        0 |        0 |        1 |        3 |       14 |       0 |        0 |        0 |        0 |        1 |        5 |       17 |       1 |        0 |        1 |        0 |        0 |        1 |        5 |       0 |        0 |        0 |        0 |        0 |        1 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      2 |      1 |      3 |      0 |     17 |      0 |      0 |      0 |      5 |      9 |      2 |      3 |      3 |     20 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1057000 |     268 |     93 |    125 |     7 |    0 |     3 |    0 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |     72 |    196 |       4 |       0 |       2 |       1 |      9 |      7 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      0 |        0 |        0 |        0 |        1 |        4 |       12 |       2 |        1 |        1 |        0 |        2 |        6 |       62 |       2 |        0 |        0 |        1 |        0 |        8 |       26 |       2 |        0 |        0 |        2 |        0 |       10 |       71 |       5 |        0 |        0 |        0 |        0 |        1 |        9 |       0 |        0 |        0 |        0 |        1 |       10 |       17 |       1 |        0 |        0 |        1 |        0 |        2 |        3 |       0 |        0 |        0 |        0 |        1 |        1 |        3 |       0 |      0 |      0 |     11 |     16 |      8 |      7 |      4 |     47 |      0 |      0 |      0 |     11 |     15 |      9 |      9 |      6 |     75 |      0 |      0 |      0 |      9 |      8 |      0 |      3 |      0 |     19 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 1058000 |     539 |    109 |    339 |     7 |    0 |     3 |    4 |    0 |     1 |    0 |     76 |    0 |    0 |    0 |    0 |    255 |    284 |       4 |       1 |       2 |       0 |      3 |     14 |      5 |      1 |      0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      3 |      2 |      0 |      0 |       0 |       2 |       0 |       0 |      1 |      3 |      0 |      0 |        1 |        2 |        4 |        7 |        6 |       19 |       1 |        4 |        8 |        8 |       10 |       11 |       22 |       6 |        6 |       11 |       15 |       19 |       28 |       74 |      14 |        4 |        3 |       22 |       16 |       30 |       79 |      18 |        3 |        3 |        9 |        9 |        8 |        8 |       0 |        2 |        5 |        3 |        7 |       10 |        8 |       1 |        0 |        2 |        1 |        2 |        1 |        2 |       0 |        1 |        0 |        2 |        2 |        0 |        2 |       0 |      0 |      0 |     13 |     15 |      7 |      4 |      3 |     67 |      0 |      0 |      2 |     32 |     64 |     20 |     15 |     16 |    190 |      0 |      0 |      0 |     10 |     11 |      2 |      0 |      3 |     50 |      0 |      0 |      1 |      1 |      2 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1059100 |     337 |     66 |    212 |     6 |    0 |     3 |    4 |    0 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |    158 |    179 |       5 |       4 |       4 |       0 |      5 |      9 |      3 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        6 |        6 |        2 |        4 |       0 |        2 |        2 |        8 |        6 |        8 |       11 |       9 |        2 |        7 |       20 |       15 |       14 |       36 |      11 |        2 |        1 |       17 |       15 |       17 |       49 |       6 |        5 |        1 |        3 |        8 |        7 |        3 |       1 |        2 |        2 |        6 |        1 |        5 |        2 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        1 |        1 |        3 |        1 |        1 |       0 |      0 |      0 |      6 |     11 |      3 |      0 |      0 |     46 |      0 |      0 |      0 |     17 |     38 |     11 |      4 |     11 |    131 |      0 |      0 |      0 |      8 |      8 |      3 |      1 |      4 |     22 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1060000 |     355 |     59 |    245 |     2 |    0 |     2 |    2 |    1 |     0 |    0 |     44 |    0 |    0 |    0 |    0 |    164 |    191 |       4 |       0 |       1 |       0 |      4 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        5 |        6 |       13 |       0 |        0 |        0 |        6 |       10 |        6 |       10 |       1 |        3 |        3 |       13 |       18 |       16 |       55 |       8 |        2 |        3 |        9 |        8 |       23 |       67 |      17 |        2 |        0 |        2 |        1 |        4 |       10 |       0 |        2 |        0 |        7 |        0 |        4 |       11 |       1 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |      7 |     14 |      8 |      3 |      1 |     26 |      0 |      0 |      4 |     30 |     26 |      9 |     13 |      8 |    155 |      0 |      0 |      2 |      8 |      7 |      1 |      0 |      0 |     26 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1060500 |     318 |     76 |    188 |     1 |    0 |     2 |    0 |    0 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    140 |    178 |       4 |       7 |       4 |       1 |      9 |     14 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        2 |        2 |        1 |        7 |        8 |       1 |        2 |        4 |        7 |       13 |       18 |        7 |       2 |        1 |        9 |       15 |       17 |       21 |       32 |       2 |        1 |        6 |       15 |       12 |       13 |       38 |       6 |        3 |        1 |        4 |        5 |        2 |        3 |       1 |        4 |        4 |        3 |       10 |        1 |        7 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        2 |        0 |       0 |      0 |      2 |      6 |     12 |      3 |      3 |      4 |     46 |      0 |      0 |      1 |     16 |     30 |      9 |      8 |     10 |    114 |      0 |      0 |      0 |      4 |      7 |      4 |      0 |      0 |     34 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1060600 |     789 |    198 |    373 |    16 |    0 |     5 |    4 |    1 |     6 |    0 |    186 |    0 |    0 |    0 |    0 |    360 |    429 |      21 |      20 |      17 |       2 |     12 |     29 |     14 |      2 |      0 |      1 |      2 |      0 |      1 |      3 |      1 |      0 |      4 |      3 |      9 |      1 |      5 |      0 |      3 |      0 |       3 |       4 |       6 |       0 |      4 |      5 |      5 |      0 |        5 |       19 |       18 |       17 |       10 |       11 |       0 |        9 |       27 |       25 |       27 |       17 |       12 |       1 |        7 |       39 |       50 |       40 |       27 |       17 |       0 |       15 |       45 |       48 |       43 |       20 |       22 |       0 |        8 |       22 |       19 |       18 |       12 |        7 |       0 |       10 |       26 |       28 |       21 |       10 |        5 |       0 |        1 |        3 |        4 |        4 |        1 |        1 |       0 |        1 |        7 |        3 |        5 |        1 |        1 |       0 |      0 |      1 |     29 |     19 |      0 |      0 |      0 |    149 |      0 |      0 |      3 |     65 |     36 |      0 |      0 |      1 |    268 |      0 |      0 |      3 |     23 |      9 |      1 |      0 |      0 |    150 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 1061000 |     319 |     51 |    202 |     7 |    0 |     3 |    1 |    1 |     0 |    0 |     54 |    0 |    0 |    0 |    0 |    150 |    169 |       0 |       3 |       3 |       1 |      6 |     11 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        1 |        0 |        4 |        4 |       12 |       0 |        2 |        4 |        2 |        4 |        5 |       10 |       2 |        3 |        4 |        6 |        9 |       21 |       47 |       6 |        1 |        3 |        7 |       11 |       23 |       48 |      13 |        0 |        4 |        5 |        2 |        4 |        7 |       2 |        1 |        3 |        4 |        6 |        5 |       11 |       0 |        3 |        0 |        0 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        2 |       0 |      0 |      0 |      5 |      7 |      2 |      3 |      3 |     31 |      0 |      0 |      2 |     26 |     35 |      3 |      4 |      9 |    123 |      0 |      0 |      1 |      8 |      5 |      4 |      1 |      2 |     33 |      0 |      0 |      0 |      6 |      1 |      0 |      1 |      0 |      4 |      0 |     37 | s03      | R    |
| 1061100 |     290 |     85 |    134 |     8 |    0 |     2 |    1 |    0 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    130 |    160 |       5 |       5 |       4 |       0 |      7 |      8 |      2 |      0 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        2 |        6 |        5 |        6 |       11 |       0 |        4 |        7 |        8 |        5 |       11 |       16 |       1 |        4 |       10 |       12 |        9 |        9 |       24 |       1 |        2 |        9 |        6 |       10 |       11 |       25 |       2 |        2 |        6 |        4 |        6 |        1 |        3 |       1 |        2 |        7 |        5 |        8 |        3 |       11 |       0 |        1 |        0 |        0 |        1 |        2 |        1 |       0 |        0 |        0 |        2 |        1 |        3 |        1 |       0 |      0 |      1 |     18 |      6 |      2 |      2 |      1 |     55 |      0 |      0 |      0 |     19 |     12 |      8 |      4 |      2 |     89 |      0 |      0 |      2 |     10 |      3 |      3 |      0 |      2 |     39 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 1061200 |     485 |    170 |    197 |    17 |    0 |     2 |    3 |    3 |     0 |    0 |     93 |    0 |    0 |    0 |    0 |    192 |    293 |      17 |      12 |       5 |       2 |     19 |      6 |      6 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      3 |      1 |      1 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        7 |       12 |       12 |        9 |        4 |       14 |       0 |        5 |       11 |       18 |       31 |       27 |       20 |       0 |        7 |       17 |       15 |       20 |       10 |       10 |       1 |        6 |        9 |       17 |       33 |       23 |       28 |       1 |        0 |       11 |        9 |       10 |        4 |        5 |       0 |        5 |       12 |       13 |        8 |        8 |        8 |       0 |        2 |        5 |        1 |        5 |        0 |        2 |       0 |        3 |        2 |        2 |        1 |        0 |        2 |       0 |      0 |      0 |     24 |     27 |      8 |      5 |      2 |    104 |      0 |      0 |      0 |     21 |     29 |     13 |      5 |      7 |    122 |      0 |      0 |      0 |     13 |      8 |      2 |      1 |      2 |     67 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 1061300 |     557 |    125 |    333 |     5 |    0 |     0 |    3 |    1 |     1 |    0 |     89 |    0 |    0 |    0 |    0 |    251 |    306 |       2 |       5 |       2 |       0 |     24 |     23 |     13 |      2 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      2 |      1 |      1 |       0 |       1 |       0 |       0 |      1 |      1 |      1 |      0 |        2 |        3 |        3 |        3 |       10 |       22 |       0 |        4 |        7 |        5 |       10 |       17 |       39 |       0 |        9 |       10 |        8 |       16 |       25 |       94 |       0 |        6 |       11 |       10 |       18 |       34 |       92 |       0 |        1 |        4 |        3 |        6 |        7 |       18 |       0 |        4 |        5 |        3 |       12 |        9 |       17 |       0 |        0 |        2 |        2 |        1 |        1 |        1 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |     11 |     10 |      7 |     10 |     78 |      0 |      0 |      2 |     32 |     45 |     29 |     17 |     36 |    172 |      0 |      0 |      1 |     15 |     19 |      2 |      5 |      2 |     45 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1062000 |     599 |    173 |    336 |    15 |    0 |     4 |    1 |    1 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    219 |    380 |       3 |       7 |       1 |       0 |     30 |     22 |     11 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        1 |        6 |       49 |       2 |        0 |        1 |        0 |        4 |        9 |       98 |       3 |        0 |        1 |        0 |        4 |        8 |      106 |       8 |        0 |        1 |        1 |        1 |       17 |      183 |       6 |        1 |        0 |        0 |        1 |        2 |       17 |       0 |        0 |        0 |        0 |        1 |        5 |       39 |       2 |        0 |        0 |        0 |        0 |        2 |       11 |       0 |        0 |        0 |        0 |        0 |        0 |        9 |       0 |      0 |      1 |     25 |     25 |     13 |      4 |      6 |     99 |      0 |      0 |      3 |     39 |     42 |     14 |     11 |     14 |    213 |      0 |      0 |      0 |     16 |      6 |      1 |      2 |      3 |     40 |      0 |      0 |      0 |      4 |      5 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1063000 |     361 |    102 |    196 |     4 |    0 |     1 |    0 |    0 |     0 |    0 |     58 |    0 |    0 |    0 |    0 |    150 |    211 |       4 |       1 |       3 |       0 |     12 |      6 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        0 |        2 |        1 |        7 |       32 |       1 |        0 |        1 |        1 |        4 |        7 |       43 |       1 |        0 |        1 |        0 |        0 |       14 |       61 |       3 |        1 |        1 |        3 |        1 |       16 |       86 |       9 |        0 |        2 |        0 |        0 |        6 |       15 |       0 |        1 |        0 |        0 |        5 |        7 |       21 |       1 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      1 |     21 |     20 |      4 |      7 |      1 |     48 |      0 |      0 |      2 |     21 |     34 |     12 |     10 |     13 |    104 |      0 |      0 |      3 |      3 |      9 |      2 |      2 |      3 |     36 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1063400 |      10 |      4 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      7 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1063500 |      40 |     10 |     19 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     21 |     19 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       1 |        2 |        0 |        1 |        1 |        1 |        2 |       0 |        2 |        0 |        7 |        2 |        1 |        0 |       0 |        0 |        1 |        4 |        2 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     13 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1063600 |     280 |     71 |    149 |     1 |    0 |     0 |    3 |    1 |     0 |    0 |     55 |    0 |    0 |    0 |    0 |    145 |    135 |       6 |       4 |       1 |       0 |      9 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      6 |      6 |      1 |      0 |      3 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      1 |      0 |        1 |        2 |        6 |       12 |        6 |        3 |       1 |        3 |        6 |        9 |       12 |        5 |        5 |       0 |        7 |        4 |       23 |       26 |       15 |        6 |       0 |        4 |        4 |       26 |       19 |       11 |        4 |       0 |        5 |        2 |        6 |       14 |        2 |        1 |       0 |        2 |        2 |        8 |       11 |        2 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     13 |     13 |     12 |      4 |      2 |     27 |      0 |      0 |      3 |     17 |     40 |     14 |     14 |      3 |     58 |      0 |      0 |      0 |      6 |     10 |      1 |      1 |      0 |     37 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1064000 |     350 |     91 |    170 |     3 |    0 |     4 |    2 |    1 |     4 |    0 |     75 |    0 |    0 |    0 |    0 |    162 |    188 |       8 |       6 |       1 |       1 |      4 |      3 |      5 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      1 |      0 |        6 |        3 |        7 |       11 |        5 |        3 |       6 |        2 |        7 |       12 |       11 |        8 |        6 |       4 |        6 |        9 |       18 |       18 |        7 |       14 |       8 |        4 |       10 |       17 |       16 |       17 |       12 |      14 |        7 |        5 |        6 |        8 |        4 |        3 |       1 |        8 |        9 |       10 |        8 |        4 |        2 |       0 |        1 |        1 |        2 |        0 |        3 |        0 |       0 |        4 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     10 |     17 |      4 |      2 |      8 |     50 |      0 |      0 |      1 |     11 |     29 |      6 |      5 |     10 |    108 |      0 |      0 |      0 |     15 |      9 |      0 |      0 |      2 |     49 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 1064100 |     231 |     53 |     94 |     9 |    0 |     2 |    4 |    1 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    101 |    130 |       7 |       7 |       6 |       1 |      2 |      5 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      1 |      0 |      0 |        0 |        5 |        8 |        0 |        3 |        1 |       0 |        5 |       10 |       10 |        7 |        2 |        2 |       0 |        4 |       18 |       10 |        8 |        2 |        3 |       0 |       12 |       12 |        7 |       14 |        3 |        1 |       0 |        3 |       13 |        8 |        6 |        2 |        0 |       0 |        6 |       15 |        7 |        5 |        2 |        0 |       0 |        2 |        0 |        3 |        2 |        0 |        0 |       0 |        1 |        4 |        4 |        1 |        0 |        0 |       0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |     49 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |     89 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     65 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1064200 |     443 |    108 |    229 |    14 |    0 |     0 |    2 |    0 |     3 |    0 |     87 |    0 |    0 |    0 |    0 |    198 |    245 |      11 |       8 |       8 |       0 |      9 |     10 |      2 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      2 |      0 |      0 |      1 |      2 |      0 |       0 |       1 |       0 |       0 |      1 |      2 |      1 |      0 |        1 |        0 |        6 |       11 |       11 |        9 |       3 |        4 |        7 |       17 |       21 |        7 |        8 |       3 |        7 |        6 |       23 |       32 |       14 |       14 |       7 |       10 |        6 |       33 |       25 |       20 |       17 |      15 |        5 |        8 |       11 |        9 |        5 |        4 |       1 |       13 |        7 |        8 |       10 |        5 |        0 |       1 |        1 |        1 |        4 |        3 |        1 |        1 |       0 |        3 |        1 |        3 |        1 |        0 |        0 |       0 |      0 |      1 |     10 |     22 |      2 |      9 |      4 |     60 |      0 |      0 |      2 |     29 |     38 |     10 |      7 |     10 |    133 |      0 |      0 |      1 |     13 |     14 |     10 |      1 |      0 |     48 |      0 |      0 |      0 |      2 |      4 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 1064300 |     322 |     82 |    155 |    12 |    0 |     2 |    2 |    0 |     2 |    0 |     67 |    0 |    0 |    0 |    0 |    125 |    197 |      11 |       4 |       7 |       1 |      2 |     12 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |       2 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        0 |        4 |        6 |        4 |        5 |        3 |       1 |        5 |       10 |       11 |       20 |       10 |        3 |       0 |        5 |       16 |       23 |       13 |        8 |        3 |       1 |        1 |       14 |       24 |       17 |       10 |       13 |       7 |        4 |        6 |        2 |       10 |        1 |        1 |       0 |        6 |        9 |        7 |       15 |        4 |        0 |       2 |        2 |        3 |        2 |        1 |        0 |        1 |       0 |        2 |        1 |        3 |        2 |        1 |        0 |       0 |      0 |      1 |     11 |     15 |      2 |      2 |      0 |     51 |      0 |      0 |      1 |     23 |     18 |      3 |      0 |      2 |    108 |      0 |      0 |      0 |     12 |      7 |      0 |      0 |      0 |     48 |      0 |      0 |      1 |      3 |      3 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1064400 |     570 |    153 |    355 |     9 |    0 |     2 |    0 |    0 |     1 |    0 |     50 |    0 |    0 |    0 |    0 |    196 |    374 |       0 |       1 |       0 |       0 |     23 |     24 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |       52 |       0 |        0 |        0 |        0 |        0 |        1 |      100 |       0 |        0 |        0 |        0 |        1 |        0 |      120 |       1 |        0 |        0 |        0 |        0 |        0 |      230 |       3 |        0 |        0 |        0 |        0 |        0 |       18 |       0 |        0 |        0 |        0 |        0 |        0 |       32 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        8 |       0 |      0 |      1 |     31 |     18 |     12 |      5 |     14 |     72 |      0 |      0 |      3 |     42 |     79 |     29 |     27 |     31 |    144 |      0 |      0 |      1 |     11 |     10 |      3 |      0 |      1 |     24 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 1064800 |     231 |     64 |     95 |     7 |    0 |     2 |    0 |    2 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    106 |    125 |       6 |       5 |       5 |       0 |      6 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      1 |        5 |        4 |        2 |        7 |        8 |        2 |       0 |        5 |        8 |       10 |        9 |        2 |        2 |       0 |        5 |        4 |       10 |       11 |        7 |        5 |       0 |        5 |        6 |       14 |       16 |        6 |        6 |       0 |        6 |        3 |        6 |        9 |        5 |        2 |       0 |        6 |        1 |       10 |        5 |        5 |        2 |       0 |        1 |        2 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        4 |        0 |       0 |      0 |      0 |      8 |      5 |      1 |      2 |      3 |     45 |      0 |      0 |      1 |     13 |     12 |      5 |      4 |      6 |     54 |      0 |      0 |      0 |      8 |      7 |      1 |      3 |      1 |     40 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1064900 |     199 |     41 |    115 |     4 |    0 |     3 |    1 |    0 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |    100 |     99 |       2 |       3 |       2 |       0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        0 |        4 |        4 |        5 |        2 |       0 |        2 |        1 |        3 |       10 |        4 |        2 |       2 |        9 |        4 |        9 |       19 |        6 |        5 |       6 |        4 |        5 |       11 |       14 |       12 |        5 |       6 |        5 |        2 |        7 |        2 |        2 |        1 |       1 |        1 |        1 |        4 |        3 |        2 |        3 |       1 |        0 |        2 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      5 |      8 |      4 |      0 |      3 |     21 |      0 |      0 |      1 |     16 |     11 |     11 |      2 |      7 |     67 |      0 |      0 |      1 |      9 |      3 |      0 |      0 |      1 |     21 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1065000 |     628 |    187 |    286 |    13 |    0 |     2 |    5 |    1 |     3 |    0 |    131 |    0 |    0 |    0 |    0 |    306 |    322 |      21 |      19 |      15 |       0 |     25 |      7 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      3 |      1 |      5 |      1 |      3 |      1 |      1 |      1 |       2 |       3 |       1 |       0 |     12 |     10 |      9 |      1 |        8 |        6 |       10 |       24 |       14 |        9 |       0 |       13 |        7 |       29 |       33 |       21 |       12 |       1 |       14 |       12 |       36 |       40 |       26 |       16 |       0 |        5 |       14 |       38 |       48 |       21 |       16 |       0 |       18 |       11 |       19 |       18 |        5 |        5 |       0 |        5 |        9 |       14 |       15 |        6 |        6 |       0 |        4 |        4 |        3 |        4 |        0 |        0 |       0 |        3 |        2 |        0 |        2 |        2 |        0 |       0 |      0 |      1 |     28 |     23 |     12 |      5 |     27 |     91 |      0 |      0 |      1 |     42 |     45 |     23 |     12 |     15 |    148 |      0 |      0 |      0 |     17 |     16 |      5 |      3 |      5 |     85 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |      1 |     16 |      0 |     37 | s03      | R    |
| 1065100 |     196 |     59 |     87 |     7 |    0 |     1 |    0 |    0 |     2 |    0 |     40 |    0 |    0 |    0 |    0 |     93 |    103 |       8 |       6 |       6 |       0 |      5 |      5 |      5 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       1 |      2 |      0 |      0 |      0 |        4 |        2 |        0 |        9 |        3 |        3 |       1 |        4 |        1 |        9 |        8 |        9 |        6 |       0 |        3 |        6 |       11 |       11 |       13 |        3 |       0 |        2 |        8 |       14 |        5 |        7 |        2 |       2 |        4 |        2 |        4 |        6 |        2 |        1 |       0 |        6 |        2 |        6 |        3 |        1 |        2 |       1 |        0 |        0 |        0 |        3 |        1 |        1 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      9 |      5 |      5 |      4 |      1 |     35 |      0 |      0 |      1 |     11 |     12 |      8 |      0 |      4 |     51 |      0 |      0 |      0 |      7 |      2 |      1 |      0 |      0 |     30 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 1065200 |     600 |    157 |    287 |    13 |    0 |     4 |    4 |    0 |     9 |    0 |    126 |    0 |    0 |    0 |    0 |    288 |    312 |      15 |      18 |       7 |       3 |     10 |     17 |      6 |      2 |      0 |      1 |      1 |      0 |      2 |      3 |      2 |      0 |      3 |      5 |      8 |      1 |      3 |      1 |      2 |      0 |       0 |       1 |       1 |       0 |      6 |     10 |      4 |      1 |        8 |       12 |        9 |       17 |       14 |        4 |       0 |        6 |       10 |       27 |       28 |       12 |       10 |       0 |        8 |       21 |       31 |       41 |       17 |       20 |       0 |        8 |       28 |       42 |       30 |       16 |       24 |       1 |        8 |       16 |       18 |       12 |        7 |        7 |       0 |        6 |       10 |       13 |       18 |        7 |        3 |       1 |        4 |        5 |        3 |        6 |        0 |        0 |       0 |        5 |        3 |        2 |        1 |        1 |        0 |       0 |      0 |      1 |     20 |     16 |      6 |      4 |      9 |    101 |      0 |      0 |      1 |     31 |     38 |     21 |      8 |      6 |    182 |      0 |      0 |      0 |     15 |     14 |      5 |      1 |      2 |     89 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |     24 |      0 |     37 | s03      | R    |
| 1065300 |     557 |    150 |    258 |    15 |    0 |     4 |    2 |    1 |     3 |    0 |    124 |    0 |    0 |    0 |    0 |    247 |    310 |      17 |      18 |      19 |       4 |      8 |     15 |      2 |      0 |      0 |      3 |      1 |      0 |      0 |      3 |      0 |      0 |      5 |      2 |     10 |      1 |      9 |      2 |      4 |      2 |       0 |       2 |       1 |       0 |      3 |      9 |      4 |      0 |        5 |       10 |       14 |       15 |       12 |        3 |       0 |        7 |       12 |       17 |       34 |       17 |        4 |       0 |        6 |       25 |       29 |       36 |       11 |        5 |       0 |       14 |       36 |       34 |       37 |       17 |        8 |       0 |       12 |       11 |       17 |       11 |        5 |        6 |       0 |       10 |       16 |       10 |       15 |        8 |        2 |       1 |        0 |        6 |        3 |        5 |        0 |        0 |       0 |        3 |        1 |        2 |        3 |        1 |        1 |       0 |      0 |      1 |     26 |     20 |      8 |     12 |     12 |     71 |      0 |      0 |      3 |     22 |     36 |     17 |     21 |      9 |    150 |      0 |      0 |      1 |     12 |      6 |      7 |      7 |      2 |     89 |      0 |      0 |      1 |      3 |      2 |      2 |      0 |      2 |     15 |      0 |     37 | s03      | R    |
| 1065400 |       5 |      0 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      1 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1065500 |     683 |    169 |    336 |    17 |    0 |     6 |    1 |    2 |     2 |    0 |    150 |    0 |    0 |    0 |    0 |    332 |    351 |       8 |      22 |       6 |       1 |     20 |     10 |     11 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      6 |      9 |      4 |      0 |      2 |      0 |      8 |      0 |       0 |       0 |       1 |       1 |      2 |      5 |      3 |      1 |        7 |        6 |       10 |       26 |       12 |        8 |       1 |        5 |        5 |       17 |       36 |       15 |       19 |       2 |       12 |       11 |       32 |       36 |       42 |       36 |       3 |       13 |       18 |       28 |       43 |       32 |       29 |       1 |       12 |       12 |        9 |       19 |       16 |        7 |       1 |       18 |        6 |       14 |       17 |       13 |        3 |       3 |        2 |        4 |        4 |        3 |        0 |        1 |       0 |        4 |        2 |        2 |        2 |        3 |        1 |       0 |      0 |      1 |     11 |     39 |     17 |      4 |      9 |     88 |      0 |      0 |      1 |     42 |     54 |     19 |     12 |     17 |    191 |      0 |      0 |      2 |     25 |     23 |      8 |      4 |      5 |     83 |      0 |      0 |      0 |      7 |      6 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1065700 |     536 |    120 |    259 |    16 |    0 |     0 |    2 |    2 |     2 |    0 |    135 |    0 |    0 |    0 |    0 |    264 |    272 |      11 |      16 |       4 |       0 |     10 |     22 |      7 |      1 |      0 |      3 |      1 |      0 |      7 |      4 |      1 |      0 |      3 |      6 |     10 |      0 |      4 |      4 |      7 |      0 |       3 |       4 |       9 |       2 |      1 |     10 |      1 |      1 |        7 |        2 |       14 |       19 |        9 |        7 |       0 |        4 |        1 |       21 |       23 |        9 |        4 |       0 |        9 |        3 |       38 |       45 |       27 |       13 |       1 |       10 |        7 |       32 |       49 |       15 |       10 |       0 |        6 |        7 |       14 |       24 |        9 |        2 |       0 |       15 |        2 |       17 |       24 |       12 |        3 |       0 |        2 |        0 |        4 |        1 |        0 |        1 |       0 |        2 |        2 |        5 |        3 |        1 |        1 |       0 |      0 |      1 |     15 |     25 |     20 |      5 |      1 |     53 |      0 |      0 |      0 |     23 |     79 |     40 |     26 |      2 |     89 |      0 |      0 |      2 |     19 |     22 |     12 |      6 |      0 |     74 |      0 |      0 |      1 |      4 |      4 |      3 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1065800 |     418 |    130 |    167 |    10 |    0 |     2 |    3 |    1 |     1 |    0 |    104 |    0 |    0 |    0 |    0 |    194 |    224 |      10 |       6 |      10 |       0 |      4 |      3 |      6 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      6 |      0 |      4 |      1 |      2 |      0 |       1 |       2 |       1 |       0 |      3 |      4 |      1 |      0 |        3 |       16 |       13 |       12 |        4 |        4 |       0 |       10 |       19 |       25 |       15 |        5 |        4 |       0 |        3 |       17 |       31 |       23 |        8 |        1 |       0 |        8 |       26 |       26 |       18 |        3 |        3 |       0 |        7 |       19 |       12 |        9 |        3 |        0 |       0 |       10 |       11 |       14 |       11 |        7 |        1 |       0 |        2 |        2 |        1 |        3 |        0 |        1 |       0 |        0 |        4 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |     12 |      9 |      4 |      2 |      0 |    103 |      0 |      0 |      0 |     21 |     23 |      4 |      6 |      1 |    112 |      0 |      0 |      0 |     11 |      6 |      1 |      1 |      0 |     85 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1065900 |     484 |    157 |    202 |    11 |    0 |     2 |    3 |    1 |     4 |    0 |    104 |    0 |    0 |    0 |    0 |    220 |    264 |      15 |       3 |      12 |       0 |     10 |     15 |      4 |      2 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      1 |      4 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      1 |      1 |      0 |        7 |        7 |        8 |       26 |       12 |        5 |       1 |        2 |        9 |       30 |       28 |       13 |        7 |       2 |        5 |       12 |       31 |       23 |       13 |        7 |       3 |       10 |       11 |       32 |       28 |       15 |        7 |       5 |        5 |        3 |       16 |       15 |        5 |        4 |       0 |        8 |       10 |       16 |       13 |        4 |        4 |       1 |        5 |        0 |        3 |        1 |        2 |        1 |       0 |        2 |        2 |        0 |        3 |        1 |        1 |       0 |      0 |      1 |     22 |     24 |     17 |      5 |     10 |     78 |      0 |      0 |      1 |     25 |     38 |     14 |     10 |      4 |    110 |      0 |      0 |      0 |     17 |     12 |      6 |      2 |      1 |     66 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1066000 |      41 |     12 |     20 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     22 |     19 |       2 |       0 |       2 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        3 |        0 |       0 |        1 |        2 |        4 |        2 |        4 |        0 |       0 |        1 |        1 |        1 |        3 |        1 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        1 |       0 |        1 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      4 |     11 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1066100 |     250 |     76 |    102 |     7 |    0 |     3 |    4 |    0 |     2 |    0 |     56 |    0 |    0 |    0 |    0 |    107 |    143 |       9 |       9 |       4 |       1 |      2 |      5 |      4 |      1 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      1 |      1 |      0 |      0 |        3 |       12 |        8 |        5 |        2 |        2 |       0 |        2 |       12 |       11 |        9 |        1 |        9 |       0 |        5 |       19 |       12 |        5 |        1 |        2 |       0 |        4 |       22 |       11 |        8 |        7 |        6 |       0 |        2 |       11 |        5 |        2 |        1 |        2 |       0 |        8 |       11 |        8 |        5 |        0 |        1 |       0 |        0 |        2 |        4 |        2 |        0 |        0 |       0 |        3 |        3 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      8 |      3 |      1 |      0 |      0 |     64 |      0 |      0 |      1 |     14 |      3 |      1 |      0 |      0 |     83 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     50 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1066200 |      57 |      7 |     40 |     0 |    0 |     2 |    0 |    1 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     32 |     25 |       1 |       4 |       0 |       0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        2 |       0 |        1 |        2 |        9 |        7 |        2 |        1 |       0 |        0 |        3 |        7 |        6 |        2 |        0 |       0 |        3 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |     11 |      6 |      2 |      0 |     16 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1066300 |     214 |     65 |     78 |     6 |    0 |     1 |    3 |    1 |     2 |    0 |     58 |    0 |    0 |    0 |    0 |     94 |    120 |      11 |       9 |       7 |       3 |      3 |      2 |      7 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      4 |      0 |      0 |      1 |        1 |        4 |        7 |        5 |        1 |        3 |       0 |        5 |       16 |       11 |        5 |        3 |        4 |       0 |        3 |       16 |       17 |        4 |        1 |        1 |       0 |        6 |       14 |       10 |        2 |        2 |        2 |       0 |        2 |        9 |        5 |        5 |        3 |        0 |       0 |        8 |       12 |        7 |        4 |        3 |        0 |       0 |        1 |        2 |        3 |        0 |        1 |        0 |       0 |        2 |        0 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |      8 |      5 |      0 |      0 |      2 |     50 |      0 |      0 |      0 |     11 |      1 |      2 |      0 |      0 |     64 |      0 |      0 |      0 |      6 |      6 |      1 |      0 |      3 |     42 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1066400 |     289 |     84 |    133 |     9 |    0 |     1 |    2 |    1 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    104 |    185 |       3 |       5 |       4 |       2 |      7 |      5 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        0 |        7 |        9 |        2 |        3 |        6 |       0 |        3 |        9 |       14 |       13 |        8 |        6 |       4 |        0 |       17 |        9 |       13 |        4 |        7 |       2 |        1 |       10 |       14 |       23 |       12 |       18 |       3 |        2 |        8 |        5 |        3 |        2 |        3 |       0 |        4 |        8 |       12 |        1 |        4 |        3 |       2 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        5 |        1 |        3 |        1 |        3 |       0 |      0 |      0 |     22 |     12 |      3 |      3 |      1 |     43 |      0 |      0 |      0 |      8 |     18 |      7 |      3 |      6 |     91 |      0 |      0 |      0 |     11 |      4 |      0 |      1 |      0 |     41 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1100000 |     740 |    218 |    331 |    15 |    0 |     4 |    2 |    3 |     4 |    0 |    163 |    0 |    0 |    0 |    0 |    349 |    391 |      31 |      23 |      12 |       1 |     12 |     14 |     10 |      3 |      4 |      0 |      2 |      0 |      2 |      1 |      3 |      0 |     18 |     22 |     17 |      4 |      7 |      3 |      7 |      0 |       7 |       2 |       1 |       0 |     14 |     24 |     22 |      3 |        5 |       11 |        9 |       44 |       19 |        5 |       0 |       12 |       19 |       18 |       49 |       23 |        4 |       0 |       23 |       12 |       32 |       62 |       36 |        9 |       0 |       15 |       14 |       30 |       57 |       33 |        7 |       1 |       11 |        6 |       11 |       15 |       18 |        3 |       0 |       22 |       16 |       19 |       20 |       15 |        7 |       0 |        7 |        2 |        2 |        5 |        1 |        1 |       0 |        2 |        2 |        3 |        2 |        1 |        0 |       0 |      0 |      0 |     20 |     28 |     15 |     12 |     46 |     97 |      0 |      0 |      1 |     35 |     50 |     24 |      7 |     68 |    146 |      0 |      0 |      2 |     22 |     18 |      9 |      3 |     25 |     84 |      0 |      0 |      1 |      8 |      7 |      0 |      1 |      1 |     10 |      0 |     37 | s03      | R    |
| 1100100 |     374 |    103 |    163 |     9 |    0 |     8 |    0 |    0 |     3 |    0 |     88 |    0 |    0 |    0 |    0 |    172 |    202 |      10 |       6 |       5 |       1 |      4 |     13 |      6 |      1 |      0 |      1 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       4 |       1 |       0 |      3 |      5 |      3 |      0 |        3 |        8 |        3 |       10 |       11 |        4 |       0 |        5 |        8 |       16 |       15 |       18 |        2 |       0 |        5 |        7 |       21 |       21 |       19 |        9 |       0 |        5 |        9 |       16 |       21 |       21 |        9 |       0 |        8 |        4 |        9 |       12 |        7 |        3 |       0 |        7 |        8 |       11 |        8 |        5 |        6 |       0 |        1 |        2 |        1 |        2 |        1 |        1 |       0 |        4 |        4 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |     14 |     16 |     13 |      0 |      0 |     60 |      0 |      0 |      0 |     24 |     27 |      4 |      3 |      4 |    101 |      0 |      0 |      0 |     15 |     15 |      5 |      1 |      1 |     51 |      0 |      0 |      6 |      2 |      2 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1100200 |     389 |    117 |    170 |     6 |    0 |     7 |    1 |    0 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    194 |    195 |      19 |      22 |       5 |       3 |      5 |      1 |      7 |      3 |      6 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      4 |      4 |      0 |      0 |      0 |      4 |      0 |       3 |       3 |       0 |       0 |      7 |      9 |      3 |      1 |        9 |        2 |        5 |       17 |       16 |        6 |       0 |        4 |        6 |       15 |       23 |        9 |        4 |       1 |        5 |        9 |       16 |       28 |       20 |        8 |       0 |       10 |       11 |       17 |       24 |       19 |        3 |       0 |       10 |        8 |        5 |        7 |       12 |        4 |       0 |        9 |        4 |        5 |       10 |        6 |        7 |       0 |        0 |        1 |        2 |        1 |        3 |        0 |       0 |        0 |        1 |        0 |        5 |        1 |        1 |       0 |      0 |      0 |     12 |     14 |      9 |      3 |     14 |     65 |      0 |      0 |      1 |     22 |     23 |     21 |      7 |      6 |     90 |      0 |      0 |      1 |      8 |     10 |      5 |      6 |      2 |     55 |      0 |      0 |      0 |      1 |      7 |      2 |      1 |      1 |      3 |      0 |     37 | s03      | R    |
| 1100300 |     443 |    127 |    202 |     9 |    0 |     2 |    8 |    2 |     4 |    0 |     89 |    0 |    0 |    0 |    0 |    200 |    243 |      13 |      17 |       5 |       0 |      8 |     11 |      7 |      1 |      0 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      2 |      1 |      1 |      1 |      0 |      0 |       0 |       5 |       0 |       1 |      3 |      4 |      2 |      0 |        2 |        7 |       17 |        8 |        6 |        5 |       0 |        4 |        8 |       25 |       29 |       10 |        6 |       0 |       10 |        8 |       27 |       32 |       20 |        6 |       1 |        4 |        5 |       33 |       30 |       14 |       11 |       1 |        3 |       12 |        8 |        8 |        2 |        3 |       0 |        6 |       17 |       13 |       12 |        3 |        2 |       0 |        4 |        3 |        3 |        3 |        2 |        0 |       0 |        2 |        3 |        2 |        1 |        1 |        1 |       0 |      0 |      0 |     14 |     17 |     14 |      4 |      5 |     73 |      0 |      0 |      1 |     28 |     30 |     11 |      9 |     11 |    112 |      0 |      0 |      0 |     10 |     12 |      3 |      1 |      3 |     60 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1100400 |     509 |    161 |    203 |    12 |    0 |     6 |    6 |    3 |     5 |    0 |    113 |    0 |    0 |    0 |    0 |    199 |    310 |      24 |      20 |       9 |       1 |      2 |      5 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      2 |      1 |      1 |      0 |      0 |      0 |       0 |       2 |       6 |       0 |      7 |      5 |      4 |      1 |        3 |       12 |        9 |       14 |        9 |        5 |       0 |       10 |       33 |       25 |       24 |        6 |       11 |       0 |        7 |       22 |       21 |       21 |       11 |        4 |       0 |       12 |       24 |       26 |       29 |       13 |       13 |       0 |       16 |        9 |       14 |        8 |        4 |        0 |       0 |        9 |       19 |       17 |       13 |        2 |        2 |       0 |        2 |        3 |        0 |        3 |        1 |        1 |       0 |        2 |        4 |        3 |        9 |        3 |        1 |       0 |      0 |      0 |     22 |     20 |      8 |      6 |      6 |     99 |      0 |      0 |      0 |     27 |     29 |      8 |      3 |      4 |    132 |      0 |      0 |      0 |     15 |     10 |      0 |      2 |      2 |     84 |      0 |      0 |      0 |      5 |      8 |      0 |      0 |      3 |     16 |      0 |     37 | s03      | R    |
| 1100500 |     433 |    187 |    126 |    14 |    0 |     3 |    0 |    1 |     1 |    0 |    101 |    0 |    0 |    0 |    0 |    198 |    235 |      41 |      30 |      21 |       0 |      7 |      0 |      3 |      0 |     10 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      2 |      2 |      3 |      0 |      1 |      0 |       8 |       8 |       2 |       2 |     13 |     25 |      7 |      2 |        4 |        9 |       10 |       13 |        7 |       32 |       0 |       12 |       12 |       18 |       20 |       14 |       36 |       0 |       11 |        5 |       15 |       11 |        6 |       14 |       1 |        5 |        7 |       11 |        8 |        9 |       22 |       1 |        2 |       10 |        9 |        5 |        4 |       16 |       0 |        9 |        3 |       11 |        9 |        4 |       19 |       0 |        1 |        4 |        1 |        3 |        2 |        3 |       0 |        1 |        0 |        0 |        1 |        2 |        1 |       0 |      0 |      1 |     21 |     21 |      8 |      0 |      3 |    133 |      0 |      0 |      2 |     10 |     16 |      4 |      2 |      3 |     89 |      0 |      0 |      0 |     12 |     12 |      3 |      1 |      2 |     71 |      0 |      0 |      2 |      1 |      5 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1100600 |     278 |    100 |     99 |     4 |    0 |     2 |    2 |    0 |     0 |    0 |     71 |    0 |    0 |    0 |    0 |    138 |    140 |       9 |      12 |       6 |       0 |     14 |      1 |      7 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      6 |      0 |      3 |      3 |      1 |      0 |       5 |       5 |       3 |       1 |      3 |      5 |      3 |      0 |        4 |        3 |        9 |       12 |        9 |        2 |       0 |        3 |       11 |       16 |       19 |        8 |        4 |       0 |        4 |        1 |       13 |       20 |       10 |        4 |       0 |        4 |        2 |       11 |       15 |       11 |        4 |       0 |        6 |        6 |       10 |       13 |        7 |        1 |       0 |        4 |        1 |        8 |       11 |        3 |        1 |       0 |        0 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |      0 |      2 |      7 |     19 |      9 |      6 |     14 |     43 |      0 |      0 |      1 |     10 |     16 |      9 |      4 |     26 |     33 |      0 |      0 |      0 |     13 |     22 |      4 |      1 |      6 |     25 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1100700 |     117 |     20 |     67 |     2 |    0 |     2 |    0 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     56 |     61 |       6 |       8 |       1 |       0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        0 |        1 |        2 |        3 |        0 |       0 |        0 |        0 |        1 |        7 |        4 |        1 |       0 |        4 |        3 |        6 |       11 |        5 |        5 |       0 |        6 |        5 |        5 |       10 |        3 |        4 |       0 |        4 |        0 |        2 |        4 |        0 |        1 |       0 |        2 |        1 |        2 |        6 |        1 |        2 |       0 |        2 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      4 |      1 |      0 |      2 |     12 |      0 |      0 |      0 |     10 |      8 |      4 |      3 |      3 |     39 |      0 |      0 |      0 |      4 |      2 |      1 |      2 |      0 |     16 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1100800 |     205 |     67 |     84 |     2 |    0 |     5 |    1 |    1 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |    104 |    101 |      11 |      21 |       7 |       0 |      0 |      3 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      3 |      4 |      0 |      0 |      0 |      4 |      1 |       2 |       2 |       1 |       0 |      7 |      3 |      7 |      1 |        6 |        4 |        5 |       12 |        6 |        1 |       0 |        3 |        3 |        9 |       15 |        1 |        2 |       0 |        5 |        1 |       15 |       19 |        4 |        2 |       0 |        4 |        3 |       11 |       16 |        1 |        3 |       0 |        3 |        1 |        4 |        6 |        3 |        2 |       0 |        3 |        7 |        4 |        7 |        1 |        3 |       0 |        0 |        2 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        1 |       0 |      0 |      3 |     12 |     29 |      4 |      2 |      0 |     17 |      0 |      0 |      1 |     15 |     36 |      9 |      0 |      0 |     23 |      0 |      0 |      0 |      5 |     16 |     10 |      1 |      0 |     12 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1100900 |     199 |     49 |     99 |     1 |    0 |     0 |    0 |    1 |     3 |    0 |     46 |    0 |    0 |    0 |    0 |     99 |    100 |       9 |       2 |       2 |       2 |      0 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      1 |        1 |        2 |        1 |       12 |        4 |        0 |       1 |        3 |        2 |        3 |       10 |        7 |        3 |       0 |        6 |        3 |       12 |       17 |       12 |        2 |       0 |        7 |        5 |       16 |       13 |        3 |        3 |       0 |        1 |        2 |        8 |        5 |        4 |        2 |       0 |        5 |        3 |        5 |        6 |        4 |        1 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      6 |      3 |      0 |      5 |     29 |      0 |      0 |      0 |     10 |     16 |      9 |      0 |     11 |     53 |      0 |      0 |      1 |      9 |      7 |      0 |      2 |      2 |     25 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1101000 |     434 |    117 |    231 |     9 |    0 |     1 |    4 |    0 |     5 |    0 |     67 |    0 |    0 |    0 |    0 |    204 |    230 |       6 |      10 |       4 |       1 |      6 |      8 |      2 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      2 |      1 |       0 |       0 |       1 |       0 |      2 |      8 |      2 |      0 |        3 |        2 |       10 |       17 |        8 |        4 |       1 |        4 |        8 |       22 |       18 |        9 |        5 |       6 |       12 |       14 |       36 |       24 |       14 |       12 |       3 |       12 |        9 |       31 |       33 |       17 |       14 |       0 |        4 |        4 |       12 |        9 |        4 |        2 |       0 |        5 |        8 |       12 |        6 |        1 |        0 |       0 |        2 |        0 |        1 |        2 |        2 |        2 |       0 |        2 |        1 |        2 |        2 |        2 |        1 |       0 |      0 |      1 |     11 |     15 |      8 |      2 |      5 |     75 |      0 |      0 |      0 |     34 |     27 |     18 |      7 |     13 |    132 |      0 |      0 |      2 |     11 |      5 |      4 |      2 |      4 |     39 |      0 |      0 |      0 |      4 |      2 |      3 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 1101100 |     428 |    115 |    190 |    11 |    0 |     0 |    8 |    1 |     3 |    0 |    100 |    0 |    0 |    0 |    0 |    213 |    215 |      15 |       8 |       5 |       3 |      5 |      8 |      1 |      1 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      3 |      5 |      1 |        2 |        5 |        8 |       17 |        6 |        4 |       1 |        3 |       13 |       18 |       20 |       11 |        5 |       2 |        7 |       15 |       23 |       27 |       19 |       10 |       0 |        9 |       11 |       26 |       28 |        6 |        7 |       2 |       10 |       12 |       15 |        8 |        7 |        5 |       0 |        7 |        5 |        8 |       14 |        7 |        2 |       0 |        4 |        1 |        3 |        4 |        0 |        0 |       0 |        3 |        3 |        3 |        2 |        0 |        0 |       0 |      0 |      1 |     14 |     18 |      7 |      5 |      4 |     66 |      0 |      0 |      0 |     29 |     36 |      7 |      5 |      6 |    107 |      0 |      0 |      1 |     17 |     15 |      9 |      1 |      2 |     55 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1101200 |     339 |    109 |    137 |     5 |    0 |     2 |    1 |    3 |     2 |    0 |     80 |    0 |    0 |    0 |    0 |    165 |    174 |      18 |      15 |       5 |       1 |      4 |      5 |      3 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |      2 |      3 |      0 |      0 |      1 |      5 |      0 |       1 |       0 |       0 |       0 |      2 |      4 |      1 |      0 |        6 |        7 |       11 |        7 |        7 |        9 |       1 |        6 |       13 |       16 |       15 |        2 |        7 |       2 |        5 |       15 |       18 |       19 |       10 |        3 |       3 |        3 |       12 |       17 |       18 |        7 |        6 |       1 |        8 |        6 |        7 |       11 |        2 |        1 |       0 |        9 |       12 |        9 |        9 |        6 |        0 |       0 |        3 |        1 |        4 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     11 |     13 |     11 |      1 |      3 |     69 |      0 |      0 |      1 |     15 |     17 |      3 |      5 |      2 |     94 |      0 |      0 |      1 |      4 |      7 |      3 |      0 |      0 |     65 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1101300 |     439 |    116 |    199 |    10 |    0 |     4 |    3 |    2 |     2 |    0 |    103 |    0 |    0 |    0 |    0 |    215 |    224 |      10 |       6 |       5 |       0 |      2 |      7 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       2 |       0 |      0 |      4 |      1 |      0 |        3 |        5 |       17 |       11 |        9 |        3 |       4 |        2 |       10 |       17 |       17 |       10 |        4 |       4 |        3 |       10 |       28 |       29 |       19 |        8 |       0 |        8 |       16 |       36 |       24 |       10 |        5 |       3 |        8 |       10 |       10 |       10 |       11 |        2 |       1 |        3 |       13 |       13 |       15 |        3 |        2 |       2 |        3 |        3 |        6 |        2 |        0 |        0 |       0 |        0 |        3 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |     11 |     19 |     10 |      2 |      8 |     65 |      0 |      0 |      2 |     32 |     31 |     20 |      3 |     12 |     99 |      0 |      0 |      3 |     10 |     13 |      5 |      1 |      2 |     69 |      0 |      0 |      0 |      6 |      4 |      1 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 1101400 |     418 |    106 |    200 |     8 |    0 |     7 |    4 |    2 |     3 |    0 |     88 |    0 |    0 |    0 |    0 |    205 |    213 |      16 |      28 |      11 |       2 |      7 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      2 |      3 |     10 |      1 |      0 |      0 |      0 |      0 |       4 |       2 |       0 |       0 |      6 |      8 |      7 |      0 |        4 |        3 |       16 |       11 |        6 |        1 |       0 |        1 |        4 |       23 |       22 |       10 |        5 |       0 |        3 |       15 |       30 |       31 |       22 |        1 |       0 |        4 |       16 |       36 |       28 |       12 |        2 |       0 |       10 |        9 |        9 |       14 |        4 |        1 |       0 |        7 |        9 |       11 |       11 |        1 |        2 |       0 |        2 |        5 |        4 |        3 |        1 |        0 |       0 |        1 |        3 |        3 |        1 |        1 |        0 |       0 |      0 |      0 |     13 |     18 |     20 |      4 |      0 |     51 |      0 |      0 |      0 |     31 |     38 |     37 |     14 |      0 |     80 |      0 |      0 |      0 |     16 |     13 |      5 |      2 |      0 |     52 |      0 |      0 |      4 |      4 |      4 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1101500 |     274 |     59 |    150 |     2 |    0 |     1 |    2 |    0 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    141 |    133 |       2 |      20 |       7 |       0 |      0 |      3 |      2 |      0 |      2 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |      1 |      7 |      6 |      0 |      2 |      1 |      3 |      0 |       2 |       1 |       3 |       0 |      0 |      2 |      2 |      0 |        3 |        0 |       12 |        9 |        3 |        1 |       0 |        1 |        2 |       18 |        7 |        2 |        1 |       0 |        4 |        7 |       39 |       19 |        8 |        4 |       0 |        1 |       17 |       30 |       18 |        2 |        1 |       0 |        1 |        4 |       11 |        8 |        2 |        1 |       0 |        1 |        6 |       16 |        2 |        4 |        3 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     27 |      0 |      0 |      1 |      0 |     31 |      0 |      0 |      0 |     78 |      1 |      1 |      0 |      0 |     70 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      0 |     33 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1101800 |      34 |     11 |     12 |     0 |    0 |     2 |    0 |    0 |     1 |    0 |      8 |    0 |    0 |    0 |    0 |     17 |     17 |       2 |       1 |       0 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        0 |        2 |        1 |        1 |        1 |        2 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        3 |        2 |        3 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1101900 |     344 |     99 |    164 |     4 |    0 |     2 |    0 |    0 |     1 |    0 |     74 |    0 |    0 |    0 |    0 |    159 |    185 |       7 |      11 |       8 |       0 |      3 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      5 |      0 |      5 |      0 |      3 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        2 |        2 |        8 |        6 |       13 |        9 |       0 |        5 |        3 |       14 |       14 |       12 |       10 |       1 |        3 |        5 |       21 |       19 |       20 |       11 |       0 |        7 |        6 |       21 |       24 |       17 |       10 |       0 |        6 |        3 |        6 |        7 |        8 |        4 |       1 |        7 |        9 |        7 |        5 |        9 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        2 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      9 |     17 |      9 |      8 |      5 |     51 |      0 |      0 |      1 |     23 |     28 |     10 |     12 |     10 |     80 |      0 |      0 |      0 |     21 |      6 |      0 |      1 |      6 |     40 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1102000 |     355 |    100 |    177 |     9 |    0 |     0 |    4 |    1 |     0 |    0 |     64 |    0 |    0 |    0 |    0 |    173 |    182 |      13 |      11 |       2 |       0 |      6 |      9 |      7 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      0 |      1 |      0 |      5 |      0 |      0 |      1 |       0 |       1 |       2 |       0 |      2 |      4 |      2 |      1 |        4 |        3 |        8 |       10 |       10 |        8 |       0 |        1 |        6 |       11 |       16 |       11 |        7 |       5 |       11 |        3 |       15 |       22 |       18 |       17 |       6 |        8 |        5 |       22 |       13 |       19 |       16 |       2 |        4 |        8 |        6 |        8 |        3 |        1 |       1 |        9 |        4 |        7 |        5 |        5 |        2 |       1 |        1 |        1 |        3 |        2 |        0 |        0 |       0 |        1 |        0 |        1 |        5 |        0 |        0 |       0 |      0 |      1 |     18 |     17 |      7 |      2 |      4 |     51 |      0 |      0 |      0 |     25 |     27 |      7 |      2 |      7 |    109 |      0 |      0 |      1 |      8 |      5 |      6 |      2 |      0 |     42 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1102100 |       6 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      4 |       1 |       0 |       1 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1102300 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1102400 |     304 |     59 |    169 |     5 |    0 |     5 |    0 |    1 |     2 |    0 |     63 |    0 |    0 |    0 |    0 |    140 |    164 |       4 |       7 |       2 |       0 |      7 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      2 |     10 |      4 |      0 |        1 |        7 |        4 |        5 |        3 |        2 |       0 |        2 |        7 |       12 |       10 |        3 |        3 |       0 |        6 |       16 |       26 |       21 |        7 |        9 |       0 |        3 |       19 |       28 |       19 |       11 |        4 |       0 |        2 |        8 |        9 |        6 |        2 |        2 |       0 |        3 |        6 |       13 |        6 |        3 |        2 |       1 |        2 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        1 |        4 |        1 |        2 |       0 |      0 |      0 |      7 |     14 |      6 |      1 |      1 |     30 |      0 |      0 |      1 |     16 |     24 |      9 |      7 |     14 |     98 |      0 |      0 |      0 |      6 |      8 |      2 |      0 |      1 |     46 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1102700 |      55 |     16 |     33 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     23 |     32 |       0 |       0 |       0 |       0 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |       10 |       0 |        0 |        0 |        0 |        0 |        0 |       13 |       0 |        0 |        0 |        0 |        0 |        0 |       19 |       1 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1103100 |     425 |    139 |    145 |    13 |    0 |     4 |    6 |    1 |     3 |    0 |    114 |    0 |    0 |    0 |    0 |    178 |    247 |      18 |       9 |      14 |       3 |      7 |      3 |      4 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      3 |      2 |      0 |      4 |      0 |      2 |      0 |       1 |       8 |       1 |       0 |      2 |      3 |      5 |      1 |        3 |        8 |       15 |       18 |        4 |        3 |       1 |        8 |       18 |       26 |       19 |        9 |        7 |       0 |        3 |       20 |       25 |       16 |        3 |        2 |       0 |        6 |       18 |       20 |       22 |        4 |        6 |       0 |        2 |       13 |       17 |        9 |        4 |        1 |       0 |       11 |       19 |       13 |       17 |        4 |        4 |       0 |        2 |        4 |        1 |        2 |        2 |        0 |       0 |        2 |        2 |       12 |        0 |        0 |        0 |       0 |      0 |      0 |     21 |     15 |      8 |      7 |      0 |     88 |      0 |      0 |      0 |     16 |     12 |     12 |      6 |      2 |     97 |      0 |      0 |      1 |     17 |      4 |      3 |      3 |      0 |     86 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1103400 |     251 |     75 |    111 |     7 |    0 |     0 |    0 |    0 |     2 |    0 |     56 |    0 |    0 |    0 |    0 |    121 |    130 |      15 |       5 |      13 |       0 |      0 |      5 |      6 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      4 |      0 |      0 |      1 |       0 |       1 |       0 |       0 |      3 |      6 |      5 |      0 |        7 |        2 |        4 |        5 |       10 |        3 |       0 |        3 |       11 |        9 |       12 |        4 |        5 |       0 |        3 |       15 |       16 |       14 |        4 |        3 |       0 |        6 |        9 |       18 |       12 |        5 |        6 |       0 |        7 |       11 |        7 |        5 |        1 |        0 |       0 |        3 |        8 |        7 |        3 |        1 |        3 |       0 |        1 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |      9 |     11 |      3 |      3 |      0 |     49 |      0 |      0 |      1 |     11 |     10 |      9 |      7 |      0 |     73 |      0 |      0 |      1 |      3 |      6 |      2 |      2 |      0 |     42 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1103500 |     470 |    142 |    195 |    23 |    0 |     7 |    3 |    2 |     3 |    0 |     95 |    0 |    0 |    0 |    0 |    213 |    257 |      31 |      22 |      23 |       4 |      4 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       3 |       3 |       0 |     12 |     16 |      6 |      0 |        8 |        9 |       14 |       12 |        9 |        4 |       1 |        7 |       24 |       23 |       15 |       11 |        4 |       1 |        4 |       33 |       22 |       16 |        9 |        7 |       1 |       12 |       21 |       34 |       15 |       13 |        7 |       1 |        5 |       18 |       12 |       11 |        2 |        2 |       0 |        7 |       12 |        6 |       10 |        6 |        4 |       0 |        2 |        7 |        0 |        4 |        1 |        0 |       0 |        0 |        8 |        5 |        5 |        4 |        2 |       0 |      0 |      0 |     16 |     17 |      4 |      3 |      5 |     97 |      0 |      0 |      0 |     26 |     17 |     10 |      5 |      5 |    132 |      0 |      0 |      0 |     13 |      8 |      3 |      3 |      2 |     66 |      0 |      0 |      0 |      9 |      5 |      1 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 1103600 |     446 |    153 |    160 |    13 |    0 |     7 |    5 |    2 |     0 |    0 |    106 |    0 |    0 |    0 |    0 |    199 |    247 |      11 |       9 |      13 |       3 |      6 |      3 |      3 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      1 |      2 |       3 |       0 |       1 |       0 |      4 |      5 |      7 |      0 |        2 |       15 |       17 |       14 |        6 |       13 |       1 |        3 |       19 |       21 |       14 |       10 |       16 |       2 |        2 |       21 |       21 |        9 |        6 |        5 |       3 |        4 |       18 |       23 |       15 |       15 |       15 |       3 |        6 |       13 |       11 |        9 |        9 |        2 |       0 |        9 |       12 |       10 |       15 |        5 |        4 |       1 |        1 |        2 |        5 |        4 |        1 |        1 |       0 |        0 |        5 |        2 |        4 |        1 |        1 |       0 |      0 |      0 |     13 |     19 |      8 |      4 |      4 |    105 |      0 |      0 |      0 |     13 |     17 |      7 |      4 |      7 |    112 |      0 |      0 |      0 |     12 |      9 |      2 |      0 |      1 |     82 |      0 |      0 |      1 |      3 |      9 |      0 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 1103700 |     327 |    112 |    113 |    11 |    0 |     3 |    3 |    0 |     4 |    0 |     81 |    0 |    0 |    0 |    0 |    153 |    174 |      16 |      10 |      12 |       1 |      4 |      1 |      3 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      5 |      0 |        7 |        8 |       10 |       12 |        9 |        2 |       0 |        4 |       14 |       12 |       26 |        4 |        4 |       0 |        4 |       11 |       15 |       12 |        5 |        4 |       0 |        9 |       14 |        6 |       17 |        7 |        9 |       0 |        7 |       15 |        3 |        8 |        3 |        4 |       0 |       10 |        5 |        6 |       10 |        6 |        4 |       0 |        4 |        3 |        2 |        3 |        0 |        2 |       0 |        0 |        2 |        3 |        1 |        1 |        0 |       0 |      0 |      0 |     15 |     19 |      3 |      3 |      3 |     69 |      0 |      0 |      0 |     16 |     14 |      3 |      1 |      4 |     75 |      0 |      0 |      1 |      4 |      8 |      0 |      3 |      1 |     64 |      0 |      0 |      0 |      2 |      4 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1103800 |     343 |     93 |    135 |    10 |    0 |     4 |    0 |    0 |     3 |    0 |     98 |    0 |    0 |    0 |    0 |    160 |    183 |      11 |      12 |      13 |       1 |      7 |      4 |      4 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      2 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |       2 |       1 |       1 |       0 |      3 |      2 |      2 |      0 |        2 |       12 |        8 |        6 |        1 |        0 |       0 |       12 |       21 |       15 |       11 |        5 |        0 |       0 |        9 |       23 |       20 |       18 |        5 |        3 |       0 |        7 |       18 |       14 |       10 |        6 |        2 |       0 |        9 |       16 |        8 |        6 |        3 |        2 |       0 |       11 |       25 |        9 |        7 |        1 |        1 |       0 |        2 |        4 |        0 |        3 |        0 |        0 |       0 |        4 |        2 |        1 |        0 |        0 |        1 |       0 |      0 |      1 |      6 |      3 |      0 |      0 |      0 |     83 |      0 |      0 |      1 |      8 |      7 |      0 |      1 |      1 |    117 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |     90 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1103900 |     626 |    162 |    327 |    11 |    0 |     7 |    3 |    2 |     2 |    0 |    112 |    0 |    0 |    0 |    0 |    321 |    305 |      15 |      22 |       2 |       0 |      9 |     14 |      7 |      0 |      0 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      0 |      1 |      0 |       1 |       1 |       3 |       0 |      1 |      7 |      1 |      1 |        5 |        9 |       14 |       17 |       19 |        8 |       3 |        5 |       12 |       22 |       22 |       18 |        7 |       1 |       16 |       27 |       30 |       45 |       36 |       21 |       3 |        5 |       14 |       37 |       40 |       27 |       20 |       6 |       11 |        6 |       11 |       14 |       10 |        3 |       0 |       15 |        6 |       17 |        7 |       12 |        0 |       0 |        4 |        1 |        2 |        4 |        0 |        2 |       0 |        3 |        1 |        3 |        4 |        1 |        0 |       0 |      0 |      1 |     21 |     30 |     11 |      1 |      6 |     92 |      0 |      0 |      2 |     44 |     68 |     19 |     11 |     22 |    161 |      0 |      0 |      1 |     16 |      9 |     12 |      2 |      5 |     67 |      0 |      0 |      1 |      5 |      5 |      3 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1104000 |     229 |     95 |     69 |     4 |    0 |     4 |    1 |    0 |     2 |    0 |     54 |    0 |    0 |    0 |    0 |    102 |    127 |      30 |      15 |      11 |       1 |      1 |      0 |      2 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       1 |       2 |       3 |       1 |     10 |     16 |      8 |      0 |        5 |        6 |        7 |        6 |        3 |       13 |       0 |        3 |        5 |       12 |       11 |        6 |       16 |       2 |        1 |        8 |        3 |        5 |        2 |       12 |       0 |        2 |        4 |       11 |        2 |        3 |       16 |       0 |        3 |        2 |        2 |        7 |        3 |       10 |       0 |        3 |        5 |        4 |        2 |        3 |       10 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        2 |        3 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |     13 |     18 |      4 |      0 |      1 |     57 |      0 |      0 |      1 |      5 |     12 |      3 |      0 |      1 |     47 |      0 |      0 |      1 |      3 |     16 |      1 |      1 |      0 |     32 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1104100 |     404 |    117 |    180 |    15 |    0 |     6 |    2 |    1 |     2 |    0 |     81 |    0 |    0 |    0 |    0 |    199 |    205 |      20 |      17 |      15 |       3 |     10 |      6 |      4 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       3 |       5 |       3 |       1 |      0 |      7 |      4 |      0 |        4 |        6 |        6 |       18 |       11 |        8 |       1 |        9 |        4 |       14 |       17 |       11 |        7 |       1 |        8 |       15 |       18 |       23 |       17 |       14 |       1 |        4 |       15 |       17 |       19 |       15 |       13 |       1 |        5 |        9 |        9 |        9 |        5 |        0 |       0 |        8 |       10 |       10 |        9 |        5 |        2 |       0 |        1 |        2 |        3 |        3 |        0 |        3 |       0 |        5 |        2 |        4 |        2 |        0 |        1 |       0 |      0 |      1 |     14 |     14 |      1 |      2 |     12 |     73 |      0 |      0 |      0 |     16 |     26 |      6 |      4 |      8 |    120 |      0 |      0 |      0 |     16 |     10 |      2 |      1 |      1 |     51 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 1104200 |     527 |    160 |    246 |     6 |    0 |     4 |    4 |    2 |     3 |    0 |    102 |    0 |    0 |    0 |    0 |    251 |    276 |       7 |      14 |       5 |       2 |     10 |      3 |      3 |      1 |      0 |      3 |      2 |      1 |      1 |      3 |      1 |      0 |      2 |      2 |      4 |      1 |      6 |      1 |      0 |      0 |       2 |       0 |       2 |       0 |      3 |      5 |      4 |      0 |        5 |        3 |       14 |       24 |       15 |        6 |       2 |        9 |       12 |       13 |       41 |       11 |        3 |       2 |       18 |       11 |       18 |       42 |       29 |       10 |       1 |       10 |       12 |       21 |       42 |       22 |        9 |       1 |        6 |        8 |        5 |       12 |        6 |        3 |       1 |       17 |        8 |        7 |       17 |        8 |        2 |       2 |        2 |        4 |        1 |        3 |        2 |        0 |       0 |        1 |        2 |        1 |        3 |        0 |        0 |       0 |      0 |      1 |     13 |     40 |     12 |      5 |     11 |     78 |      0 |      0 |      1 |     24 |     48 |     15 |      5 |     13 |    140 |      0 |      0 |      0 |     15 |     11 |      2 |      3 |      4 |     67 |      0 |      0 |      1 |      2 |      7 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1104300 |     781 |    183 |    383 |    18 |    0 |     6 |    4 |    3 |     7 |    0 |    177 |    0 |    0 |    0 |    0 |    368 |    413 |      15 |      18 |      14 |       0 |     15 |     14 |     12 |      1 |      3 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |      2 |      6 |      8 |      1 |      1 |      0 |      4 |      0 |       1 |       3 |       3 |       0 |     11 |     15 |      8 |      0 |        2 |       16 |       21 |       18 |        8 |        4 |       0 |        9 |       25 |       35 |       32 |       11 |        2 |       0 |       12 |       24 |       65 |       63 |       27 |        9 |       1 |       12 |       19 |       63 |       57 |       20 |       10 |       1 |       13 |       12 |       22 |       18 |       12 |        3 |       1 |       21 |       22 |       14 |       28 |        6 |        5 |       0 |        4 |        2 |        4 |        5 |        1 |        1 |       0 |        1 |        6 |        8 |        6 |        0 |        0 |       0 |      0 |      1 |     25 |     29 |      7 |      4 |     19 |     98 |      0 |      0 |      2 |     44 |     65 |     25 |     17 |     52 |    178 |      0 |      0 |      2 |     19 |     19 |      7 |     10 |     14 |    106 |      0 |      0 |      0 |      3 |      9 |      3 |      1 |      1 |     21 |      0 |     37 | s03      | R    |
| 1104500 |     869 |    192 |    432 |    13 |    0 |     9 |    3 |    4 |     1 |    0 |    215 |    0 |    0 |    0 |    0 |    449 |    420 |      29 |      48 |      23 |       1 |      8 |     21 |      5 |      2 |      2 |      6 |      2 |      0 |      2 |      1 |      2 |      0 |      4 |      9 |     10 |      0 |      2 |      2 |      0 |      1 |       2 |       3 |       6 |       0 |      6 |     11 |     13 |      2 |        7 |        7 |       22 |       28 |       15 |        6 |       0 |       12 |       11 |       23 |       41 |        9 |       11 |       0 |       13 |       25 |       68 |       71 |       32 |       17 |       1 |       15 |       25 |       71 |       59 |       19 |       16 |       0 |       19 |       23 |       32 |       26 |       13 |        7 |       0 |       17 |       20 |       28 |       17 |       12 |        1 |       0 |        3 |        6 |        4 |        1 |        2 |        1 |       0 |        2 |        2 |        2 |        1 |        4 |        2 |       0 |      0 |      0 |     25 |     20 |     13 |      5 |     31 |     98 |      0 |      0 |      1 |     50 |     73 |     31 |     27 |     51 |    199 |      0 |      0 |      0 |     32 |     34 |     11 |     13 |     11 |    114 |      0 |      0 |      0 |      5 |      8 |      4 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1104600 |     179 |     35 |    109 |     2 |    0 |     3 |    0 |    0 |     2 |    0 |     28 |    0 |    0 |    0 |    0 |     90 |     89 |       4 |       3 |       2 |       1 |      2 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        4 |        3 |        1 |        1 |       0 |        2 |        2 |        4 |        8 |        6 |        2 |       1 |        8 |        2 |       11 |       23 |       12 |        3 |       0 |        9 |        3 |        9 |       21 |        5 |        3 |       0 |        0 |        4 |        4 |        5 |        1 |        1 |       0 |        2 |        1 |        5 |        4 |        1 |        0 |       0 |        1 |        2 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      4 |      3 |      1 |      2 |      5 |     20 |      0 |      0 |      0 |     13 |      9 |      6 |      7 |     17 |     57 |      0 |      0 |      0 |      5 |      4 |      2 |      0 |      3 |     14 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      1 |      2 |      0 |     37 | s03      | R    |
| 1104700 |     590 |    174 |    268 |     8 |    0 |     4 |    3 |    1 |     3 |    0 |    129 |    0 |    0 |    0 |    0 |    277 |    313 |      13 |      22 |      12 |       3 |      6 |     11 |      3 |      2 |      1 |      5 |      2 |      0 |      2 |      0 |      3 |      0 |      5 |      9 |      3 |      0 |      3 |      1 |      4 |      0 |       3 |       4 |       5 |       1 |      8 |     11 |      3 |      1 |        4 |       12 |       16 |       23 |       11 |        5 |       0 |       12 |       23 |       24 |       25 |       10 |        9 |       0 |        8 |       23 |       36 |       46 |        9 |        9 |       1 |       11 |       32 |       36 |       37 |       18 |        2 |       0 |       13 |       19 |       14 |       12 |        6 |        2 |       0 |       13 |       18 |       14 |        9 |        7 |        1 |       1 |        0 |        3 |        1 |        0 |        1 |        3 |       0 |        4 |        5 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |     24 |     22 |      8 |      4 |      2 |    114 |      0 |      0 |      1 |     30 |     28 |     21 |     22 |      3 |    163 |      0 |      0 |      2 |     20 |     11 |      9 |      4 |      1 |     82 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1104800 |     256 |     76 |    125 |     8 |    0 |     3 |    0 |    0 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |    108 |    148 |       7 |       6 |       6 |       3 |      8 |      7 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |     10 |      2 |      0 |        0 |        5 |        5 |        6 |        1 |        4 |       0 |        3 |        9 |       10 |       18 |        9 |        6 |       0 |        3 |        9 |       21 |       10 |        7 |       10 |       0 |        4 |        9 |       18 |       15 |       11 |        8 |       0 |        3 |        7 |        3 |        4 |        3 |        0 |       0 |        4 |        7 |        3 |        5 |        1 |        3 |       0 |        1 |        1 |        3 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        2 |       0 |      0 |      0 |     21 |      9 |      0 |      4 |      5 |     37 |      0 |      0 |      2 |     26 |     18 |      8 |      5 |     10 |     56 |      0 |      0 |      0 |      7 |      1 |      1 |      0 |      1 |     33 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 1104900 |     550 |    152 |    279 |     8 |    0 |     3 |    2 |    2 |     1 |    0 |    103 |    0 |    0 |    0 |    0 |    269 |    281 |      13 |      15 |       4 |       1 |     14 |     26 |      6 |      1 |      2 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      5 |     14 |     15 |      0 |      2 |      2 |      0 |      0 |       1 |       1 |       2 |       0 |      3 |     13 |      3 |      2 |        3 |        9 |       19 |       19 |       11 |        6 |       0 |        2 |        9 |       32 |       27 |       10 |        5 |       0 |        8 |       10 |       59 |       40 |       20 |       12 |       0 |        1 |       13 |       50 |       39 |       17 |       10 |       0 |        4 |        4 |       17 |       11 |        4 |        3 |       0 |        3 |        3 |       24 |       21 |        5 |        4 |       0 |        0 |        4 |        1 |        2 |        0 |        3 |       0 |        0 |        1 |        1 |        2 |        1 |        1 |       0 |      0 |      2 |     26 |     40 |     14 |      0 |      0 |     70 |      0 |      0 |      1 |     45 |     93 |     36 |      0 |      0 |    104 |      0 |      0 |      0 |     24 |     29 |     10 |      0 |      0 |     40 |      0 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1105000 |     243 |     74 |     95 |     8 |    0 |     3 |    2 |    1 |     3 |    0 |     57 |    0 |    0 |    0 |    0 |     90 |    153 |       3 |       6 |       5 |       4 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        1 |       10 |        5 |        3 |        4 |        2 |       0 |        5 |       11 |       10 |       11 |        4 |        7 |       1 |        2 |       10 |       13 |        7 |        4 |        6 |       0 |        2 |       13 |       15 |       10 |        4 |        9 |       0 |        2 |        3 |        7 |        4 |        0 |        0 |       0 |        5 |       12 |        9 |        7 |        1 |        6 |       1 |        1 |        0 |        3 |        3 |        0 |        0 |       0 |        3 |        2 |        1 |        2 |        2 |        0 |       0 |      0 |      1 |     10 |      6 |      0 |      1 |      4 |     52 |      0 |      0 |      1 |      8 |     14 |      5 |      1 |      6 |     60 |      0 |      0 |      0 |      6 |      4 |      2 |      2 |      0 |     43 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1105100 |     569 |    191 |    227 |    11 |    0 |     5 |    2 |    1 |     3 |    0 |    129 |    0 |    0 |    0 |    0 |    281 |    288 |      18 |      12 |       8 |       4 |      7 |     14 |      4 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      4 |     10 |      1 |      0 |      0 |      2 |      0 |       3 |       5 |       5 |       0 |     13 |     13 |      7 |      1 |        9 |       11 |       22 |       16 |       13 |       14 |       0 |        5 |       15 |       25 |       28 |       25 |        7 |       1 |       12 |       16 |       34 |       42 |       14 |        6 |       0 |        5 |       11 |       34 |       26 |       20 |        7 |       0 |        3 |       12 |       14 |       22 |        6 |        4 |       0 |       12 |       11 |       20 |       15 |        8 |        2 |       0 |        2 |        3 |        3 |        2 |        1 |        0 |       0 |        1 |        3 |        4 |        1 |        1 |        1 |       0 |      0 |      0 |     22 |     18 |      9 |      7 |      7 |    128 |      0 |      0 |      0 |     17 |     35 |     19 |      6 |     15 |    135 |      0 |      0 |      2 |     17 |     15 |     12 |      1 |      1 |     81 |      0 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1105200 |     715 |    249 |    323 |     7 |    0 |     8 |    5 |    3 |     4 |    0 |    116 |    0 |    0 |    0 |    0 |    356 |    359 |      30 |      18 |      19 |       2 |     13 |      7 |      2 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |     10 |      7 |      0 |      0 |      0 |      0 |      0 |       5 |       6 |       1 |       0 |     21 |     30 |      8 |      0 |       13 |        8 |       19 |       34 |       24 |        8 |       3 |       11 |       13 |       25 |       53 |       22 |       16 |       0 |       15 |       10 |       31 |       69 |       34 |       12 |       0 |       15 |       14 |       32 |       57 |       25 |        9 |       0 |        8 |       17 |        7 |       25 |        5 |        1 |       1 |        7 |        7 |       14 |       17 |        4 |        3 |       0 |        1 |        2 |        2 |        5 |        1 |        1 |       0 |        3 |        6 |        2 |        3 |        0 |        1 |       0 |      0 |      2 |     24 |     31 |     18 |      9 |     20 |    145 |      0 |      0 |      0 |     28 |     47 |     30 |     14 |     15 |    189 |      0 |      0 |      2 |     16 |     19 |      6 |      4 |      8 |     61 |      0 |      0 |      0 |      4 |      8 |      1 |      4 |      1 |      9 |      0 |     37 | s03      | R    |
| 1105300 |     852 |    224 |    394 |    14 |    0 |     8 |    6 |    1 |     8 |    0 |    197 |    0 |    0 |    0 |    0 |    387 |    465 |      17 |      33 |      29 |       3 |      9 |     20 |     12 |      2 |      2 |      3 |      3 |      0 |      0 |      4 |      0 |      1 |     11 |      6 |      7 |      1 |      1 |      2 |      7 |      0 |       3 |       8 |       8 |       2 |      9 |     14 |      7 |      0 |        2 |       14 |       20 |       20 |       11 |        8 |       0 |        6 |       32 |       43 |       40 |       18 |       10 |       0 |       11 |       35 |       64 |       45 |       22 |       16 |       0 |       15 |       45 |       53 |       43 |       23 |       22 |       0 |        5 |       16 |       31 |       26 |       13 |        6 |       0 |       11 |       27 |       27 |       20 |        9 |        6 |       0 |        2 |       10 |        4 |        3 |        3 |        0 |       0 |        3 |        4 |        2 |        3 |        3 |        0 |       0 |      0 |      1 |     31 |     27 |     18 |      6 |      0 |    141 |      0 |      0 |      1 |     55 |     54 |     37 |     15 |      0 |    232 |      0 |      0 |      2 |     20 |     24 |     20 |      3 |      0 |    128 |      0 |      0 |      1 |      2 |      4 |      1 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 1105400 |     263 |     83 |    126 |     6 |    0 |     5 |    3 |    2 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |    121 |    142 |      15 |      11 |       4 |       0 |      5 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      1 |      0 |       2 |       1 |       0 |       0 |      3 |      7 |      0 |      2 |        0 |        2 |       12 |       13 |        4 |        1 |       0 |        1 |       10 |       18 |       14 |        5 |        3 |       0 |        1 |       12 |       22 |       21 |        4 |        3 |       0 |        1 |       18 |       22 |       13 |        3 |        6 |       0 |        3 |        2 |        7 |        4 |        0 |        1 |       0 |        2 |        5 |        7 |        5 |        2 |        0 |       0 |        0 |        2 |        2 |        3 |        0 |        2 |       0 |        0 |        0 |        3 |        2 |        0 |        2 |       0 |      0 |      0 |      9 |     15 |      2 |      4 |      3 |     50 |      0 |      0 |      0 |     14 |     27 |     10 |      5 |      4 |     66 |      0 |      0 |      1 |      4 |      6 |      2 |      1 |      0 |     24 |      0 |      0 |      1 |      2 |      5 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1105500 |     404 |    122 |    179 |     9 |    0 |     4 |    2 |    0 |     4 |    0 |     84 |    0 |    0 |    0 |    0 |    197 |    207 |       8 |       6 |      12 |       0 |     10 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      2 |      4 |      1 |      0 |      0 |      1 |      1 |       0 |       1 |       0 |       0 |      6 |      4 |      3 |      0 |        3 |        8 |        6 |       17 |       17 |        4 |       0 |        4 |        8 |       18 |       24 |       10 |        3 |       0 |        7 |       15 |       18 |       30 |       14 |        8 |       0 |        7 |       10 |       24 |       27 |       12 |        7 |       0 |        2 |        3 |       11 |        9 |       13 |        2 |       0 |       10 |        7 |        5 |       11 |        6 |        5 |       0 |        6 |        0 |        1 |        0 |        3 |        0 |       0 |        2 |        0 |        1 |        3 |        0 |        3 |       0 |      0 |      0 |     17 |     16 |      9 |      7 |     11 |     62 |      0 |      0 |      0 |     23 |     48 |     11 |      7 |      5 |     85 |      0 |      0 |      0 |     17 |     12 |      2 |      0 |      1 |     52 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1105600 |     653 |    191 |    288 |    11 |    0 |     4 |    0 |    9 |     2 |    0 |    148 |    0 |    0 |    0 |    0 |    328 |    325 |      34 |      62 |      22 |       5 |      2 |      4 |      4 |      0 |      4 |      2 |      1 |      1 |      0 |      4 |      0 |      0 |      3 |     14 |     17 |      1 |      4 |      4 |      3 |      0 |       5 |      23 |      11 |       9 |     11 |     28 |     19 |      0 |        5 |        8 |       20 |       37 |       12 |       10 |       0 |       13 |        9 |       22 |       41 |       10 |        4 |       0 |       10 |       18 |       35 |       52 |       23 |        8 |       0 |        9 |       20 |       39 |       42 |       21 |       11 |       0 |       11 |       13 |       20 |       23 |        7 |        1 |       1 |       15 |        9 |       22 |       12 |       13 |        1 |       0 |        2 |        5 |        1 |        4 |        1 |        1 |       0 |        2 |        3 |        4 |        3 |        0 |        0 |       0 |      0 |      1 |     21 |     38 |     13 |      6 |     39 |     73 |      0 |      0 |      1 |     30 |     54 |     29 |     12 |     61 |    101 |      0 |      0 |      1 |     17 |     22 |      9 |      4 |     13 |     82 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      1 |     18 |      0 |     37 | s03      | R    |
| 1105700 |     516 |    158 |    228 |    11 |    0 |     5 |    5 |    0 |     4 |    0 |    105 |    0 |    0 |    0 |    0 |    269 |    247 |      15 |      21 |       8 |       1 |      9 |     13 |     11 |      1 |      3 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      3 |      1 |      0 |      3 |      0 |      2 |      0 |       1 |       0 |       1 |       0 |      1 |      3 |      0 |      0 |        7 |       12 |       14 |       18 |       12 |        5 |       5 |       10 |        8 |       12 |       30 |       16 |        6 |       3 |       11 |        9 |       32 |       39 |       20 |        9 |       4 |        5 |       12 |       26 |       37 |       14 |        9 |       1 |       12 |        7 |       15 |       12 |        9 |        5 |       1 |        6 |       10 |        7 |       10 |        4 |        5 |       2 |        4 |        3 |        1 |        2 |        1 |        0 |       0 |        3 |        2 |        5 |        3 |        0 |        1 |       0 |      0 |      1 |     22 |     27 |     12 |      7 |      7 |     82 |      0 |      0 |      1 |     18 |     30 |     20 |     19 |      6 |    134 |      0 |      0 |      0 |     11 |     13 |      4 |      3 |      3 |     71 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1105800 |     733 |    187 |    328 |    13 |    0 |     5 |    9 |    4 |     5 |    0 |    182 |    0 |    0 |    0 |    0 |    349 |    384 |      20 |      19 |      18 |       1 |      5 |     10 |     10 |      1 |      4 |      4 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |      3 |      2 |      0 |       2 |       9 |       5 |       0 |      6 |      4 |      4 |      2 |        3 |       17 |       13 |       16 |       11 |        9 |       0 |       11 |       30 |       34 |       18 |       12 |       13 |       0 |       13 |       45 |       34 |       33 |       23 |       15 |       0 |       22 |       39 |       36 |       37 |       21 |       10 |       0 |       14 |       33 |       18 |       16 |       10 |        5 |       0 |       20 |       32 |       17 |        7 |        7 |        3 |       0 |        0 |        8 |        5 |        4 |        3 |        1 |       0 |        1 |        6 |        2 |        1 |        3 |        2 |       0 |      0 |      0 |     14 |     31 |      3 |      3 |      1 |    135 |      0 |      0 |      3 |     36 |     36 |      9 |      8 |      4 |    232 |      0 |      0 |      1 |     12 |     21 |      0 |      2 |      0 |    146 |      0 |      0 |      1 |      3 |      2 |      1 |      1 |      0 |     28 |      0 |     37 | s03      | R    |
| 1105900 |     471 |    124 |    218 |    11 |    0 |     3 |    0 |    0 |     4 |    0 |    111 |    0 |    0 |    0 |    0 |    224 |    247 |       9 |      18 |       8 |       2 |     11 |     10 |      6 |      1 |      0 |      4 |      2 |      0 |      2 |      4 |      1 |      0 |      5 |      2 |      4 |      0 |      0 |      0 |      1 |      0 |       1 |       3 |       0 |       1 |      1 |     15 |     11 |      0 |        4 |       16 |       17 |       10 |        4 |        1 |       0 |        3 |       10 |       22 |       27 |        7 |        2 |       1 |        5 |       17 |       36 |       32 |       11 |        9 |       0 |        4 |       27 |       34 |       23 |        7 |       12 |       1 |        5 |        9 |       14 |       16 |        5 |        3 |       0 |        3 |       16 |       19 |       13 |        4 |        4 |       0 |        2 |        4 |        2 |        0 |        1 |        1 |       0 |        1 |        0 |        1 |        3 |        2 |        1 |       0 |      0 |      1 |     14 |     14 |      9 |      5 |      0 |     81 |      0 |      0 |      1 |     26 |     44 |     28 |     12 |      0 |    107 |      0 |      0 |      1 |     19 |     14 |      1 |      7 |      0 |     69 |      0 |      0 |      1 |      1 |      5 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1106000 |      21 |      6 |      8 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      5 |    0 |    0 |    0 |    0 |      8 |     13 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1106100 |     982 |    258 |    460 |    17 |    0 |    11 |    2 |    2 |     5 |    0 |    227 |    0 |    0 |    0 |    0 |    493 |    489 |      36 |      32 |      33 |       3 |     11 |     24 |      6 |      0 |      3 |      5 |      2 |      0 |      2 |      3 |      5 |      0 |     19 |     31 |     44 |      6 |     15 |      2 |      9 |      2 |       4 |      16 |      12 |       2 |     15 |     35 |     14 |      0 |       11 |        7 |       19 |       52 |       12 |       12 |       0 |       16 |       15 |       39 |       49 |       16 |        9 |       1 |       19 |       11 |       67 |       94 |       37 |       13 |       0 |       18 |       16 |       86 |       70 |       20 |        8 |       1 |       18 |        9 |       33 |       39 |       17 |        6 |       0 |       17 |        6 |       31 |       38 |        9 |        4 |       0 |        4 |        2 |        4 |        5 |        0 |        2 |       0 |        5 |        2 |        2 |        7 |        4 |        0 |       0 |      0 |      1 |     23 |     67 |     41 |     48 |      0 |     78 |      0 |      0 |      0 |     64 |    102 |     95 |     68 |      1 |    130 |      0 |      0 |      0 |     40 |     34 |     27 |     30 |      0 |     96 |      0 |      0 |      0 |      4 |     12 |      4 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 1106200 |     339 |     85 |    168 |     6 |    0 |     4 |    0 |    2 |     0 |    0 |     74 |    0 |    0 |    0 |    0 |    171 |    168 |      13 |      13 |       8 |       2 |      8 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      7 |     22 |     11 |      2 |      2 |      4 |      1 |      0 |       0 |       4 |       1 |       1 |      9 |      9 |      2 |      0 |        3 |        5 |        7 |       25 |        3 |        1 |       0 |        9 |        4 |        9 |       15 |        4 |        0 |       0 |        9 |        9 |       31 |       28 |        9 |        1 |       0 |        5 |        7 |       30 |       28 |        6 |        5 |       0 |        5 |        7 |        7 |       13 |        2 |        0 |       0 |       12 |        5 |       11 |        8 |        3 |        1 |       0 |        0 |        2 |        2 |        2 |        0 |        0 |       0 |        2 |        0 |        1 |        3 |        0 |        0 |       0 |      0 |      1 |      6 |     24 |      5 |      3 |      0 |     46 |      0 |      0 |      1 |     23 |     61 |      7 |      9 |      0 |     67 |      0 |      0 |      0 |      6 |     21 |      7 |      0 |      0 |     40 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1106300 |     332 |     83 |    164 |     7 |    0 |     1 |    1 |    0 |     1 |    0 |     75 |    0 |    0 |    0 |    0 |    165 |    167 |       8 |       8 |       8 |       2 |      4 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      4 |      8 |      6 |      0 |      2 |      0 |      0 |      0 |       0 |       2 |       5 |       1 |      3 |      9 |      0 |      1 |        7 |        3 |        9 |       11 |        5 |        2 |       0 |        5 |        4 |       14 |       17 |        5 |        1 |       0 |        7 |        4 |       33 |       31 |        8 |        3 |       0 |       10 |        2 |       27 |       32 |        5 |        2 |       0 |        6 |        2 |        4 |       17 |        6 |        2 |       0 |        4 |        3 |       13 |       13 |        3 |        2 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        3 |        0 |        0 |       0 |      0 |      1 |     11 |     31 |     10 |      1 |      0 |     29 |      0 |      0 |      0 |     19 |     66 |     28 |      0 |      0 |     51 |      0 |      0 |      2 |     10 |     19 |      8 |      1 |      0 |     35 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1106400 |     666 |    208 |    268 |     7 |    0 |     3 |    6 |    2 |     2 |    0 |    170 |    0 |    0 |    0 |    0 |    335 |    331 |      31 |      28 |      34 |       4 |     18 |     11 |      3 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |     11 |     21 |     24 |      3 |      0 |      0 |      4 |      0 |       1 |       5 |       6 |       2 |     11 |      8 |     10 |      1 |        6 |        3 |       25 |       41 |        6 |        3 |       0 |       12 |        8 |       53 |       38 |       11 |        2 |       0 |       15 |       10 |       55 |       53 |       12 |        7 |       0 |        6 |        8 |       52 |       39 |        5 |        6 |       0 |       11 |        5 |       29 |       34 |        4 |        7 |       0 |       13 |        6 |       29 |       25 |        4 |        2 |       1 |        0 |        0 |        6 |        2 |        0 |        1 |       0 |        4 |        3 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |     27 |     84 |     20 |      0 |      0 |     76 |      0 |      0 |      1 |     25 |    142 |     27 |      0 |      0 |     73 |      0 |      0 |      0 |     19 |     41 |     13 |      0 |      0 |     97 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1106500 |     493 |    118 |    243 |    10 |    0 |     5 |    4 |    0 |     4 |    0 |    109 |    0 |    0 |    0 |    0 |    254 |    239 |      15 |      27 |      15 |       2 |      2 |     14 |      4 |      1 |      3 |      5 |      3 |      0 |      0 |      0 |      1 |      0 |      2 |      3 |     11 |      0 |      3 |      0 |      0 |      1 |       1 |      13 |       6 |       2 |      9 |      7 |     14 |      0 |        3 |        7 |       10 |       18 |       13 |        5 |       0 |        7 |        7 |       11 |       28 |        7 |        2 |       0 |       10 |       12 |       24 |       45 |       22 |       13 |       0 |        7 |        7 |       42 |       37 |       16 |        8 |       0 |       10 |        8 |        7 |       19 |        8 |        7 |       0 |        8 |        6 |       15 |       12 |        8 |        1 |       0 |        3 |        3 |        1 |        4 |        0 |        2 |       0 |        4 |        2 |        2 |        1 |        1 |        0 |       0 |      0 |      1 |     16 |     25 |      5 |      6 |     22 |     43 |      0 |      0 |      2 |     28 |     49 |     21 |     16 |     45 |     82 |      0 |      0 |      0 |     16 |     13 |      1 |      4 |     19 |     56 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 1106600 |     378 |    104 |    176 |     9 |    0 |     1 |    5 |    0 |     2 |    0 |     81 |    0 |    0 |    0 |    0 |    190 |    188 |      13 |       3 |       2 |       0 |      5 |      2 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      7 |     14 |      7 |      0 |      4 |      0 |      2 |      0 |       2 |       4 |       3 |       3 |      0 |      7 |      1 |      1 |        3 |        3 |       16 |       16 |        5 |        1 |       0 |        0 |        3 |       28 |       18 |       11 |        0 |       0 |        4 |        4 |       42 |       27 |       11 |        5 |       1 |        0 |        8 |       51 |       16 |        4 |        3 |       0 |        2 |        5 |       17 |       15 |        2 |        0 |       0 |        3 |        5 |       18 |       10 |        4 |        0 |       0 |        0 |        1 |        5 |        3 |        2 |        0 |       0 |        2 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      1 |     13 |     49 |      0 |      1 |      0 |     40 |      0 |      0 |      3 |     19 |    100 |      0 |      0 |      0 |     54 |      0 |      0 |      0 |     15 |     34 |      0 |      0 |      0 |     32 |      0 |      0 |      1 |      1 |      8 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1106700 |      14 |      2 |      7 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      4 |     10 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1106800 |     685 |    165 |    354 |    11 |    0 |     1 |    3 |    1 |     6 |    0 |    144 |    0 |    0 |    0 |    0 |    338 |    347 |      25 |      25 |      19 |       2 |      7 |     10 |     18 |      2 |      1 |      1 |      3 |      0 |      2 |      0 |      0 |      1 |      7 |      9 |     17 |      1 |      1 |      1 |      0 |      0 |       5 |      12 |       5 |       3 |      6 |     24 |      7 |      1 |        8 |        4 |       13 |       24 |       10 |        2 |       0 |       14 |       12 |       32 |       31 |       11 |        4 |       0 |       17 |       10 |       60 |       67 |       26 |        6 |       0 |       13 |       16 |       58 |       55 |       19 |        5 |       2 |       16 |        6 |       26 |       17 |        5 |        4 |       1 |       13 |        5 |       20 |       20 |        6 |        5 |       0 |        3 |        1 |        6 |        4 |        1 |        1 |       0 |        2 |        0 |        0 |        3 |        1 |        0 |       0 |      0 |      1 |     12 |     34 |      9 |      2 |     16 |     91 |      0 |      0 |      1 |     37 |     79 |     29 |      8 |     38 |    162 |      0 |      0 |      0 |     14 |     23 |     12 |      0 |      7 |     88 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1106900 |     784 |    216 |    345 |    14 |    0 |     7 |    3 |    4 |     4 |    0 |    191 |    0 |    0 |    0 |    0 |    378 |    406 |      32 |      49 |      21 |       5 |      9 |     13 |      5 |      1 |      1 |      5 |      1 |      0 |      0 |      0 |      1 |      0 |      7 |     16 |     19 |      0 |      4 |      0 |      7 |      1 |       9 |      13 |       5 |       0 |     11 |     32 |     13 |      0 |        8 |       13 |       32 |       33 |        7 |        3 |       0 |        8 |       17 |       42 |       37 |       11 |        5 |       0 |       10 |       21 |       56 |       58 |       21 |        8 |       0 |        9 |       20 |       81 |       45 |       10 |        6 |       0 |       17 |       14 |       26 |       26 |        6 |        3 |       0 |       17 |       15 |       30 |       30 |        5 |        2 |       0 |        2 |        1 |        6 |        6 |        1 |        0 |       0 |        3 |        2 |        7 |        3 |        0 |        1 |       0 |      0 |      1 |     23 |     26 |      5 |      4 |     12 |    145 |      0 |      0 |      2 |     23 |     31 |     21 |     26 |     17 |    225 |      0 |      0 |      2 |     14 |     17 |      8 |      6 |      7 |    137 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |     24 |      0 |     37 | s03      | R    |
| 1107000 |     605 |    175 |    265 |    13 |    0 |     6 |    3 |    2 |     3 |    0 |    138 |    0 |    0 |    0 |    0 |    291 |    314 |      26 |      21 |      17 |       8 |      9 |      8 |      1 |      1 |      1 |      2 |      0 |      0 |      1 |      1 |      4 |      0 |      4 |      1 |      6 |      0 |      1 |      0 |      0 |      0 |       2 |       5 |       0 |       0 |      2 |      5 |      3 |      1 |       10 |        7 |       11 |       17 |       17 |        6 |       2 |       12 |       14 |       22 |       27 |       22 |        7 |       1 |       13 |       18 |       28 |       35 |       27 |        6 |       6 |       13 |       13 |       31 |       42 |       23 |        7 |       3 |       13 |       19 |       12 |       14 |        7 |        6 |       0 |       10 |       11 |       13 |       18 |       12 |        3 |       0 |        0 |        7 |        5 |        2 |        1 |        2 |       0 |        1 |        3 |        2 |        3 |        1 |        0 |       0 |      0 |      0 |     15 |     24 |     16 |      6 |      9 |    105 |      0 |      0 |      0 |     35 |     43 |     14 |     15 |     17 |    141 |      0 |      0 |      0 |     23 |     17 |      7 |      3 |      6 |     82 |      0 |      0 |      0 |      7 |     10 |      5 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 1107100 |     377 |    115 |    185 |     9 |    0 |     4 |    0 |    1 |     1 |    0 |     62 |    0 |    0 |    0 |    0 |    188 |    189 |      14 |      10 |       5 |       2 |     11 |      6 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       3 |       0 |       1 |      1 |      9 |      6 |      0 |       12 |        4 |        5 |       17 |       10 |        4 |       1 |        8 |        5 |       14 |       18 |       13 |        3 |       1 |        7 |       10 |       16 |       27 |       21 |       12 |       2 |        5 |       12 |       15 |       33 |       13 |       12 |       0 |        5 |        8 |        1 |       11 |        6 |        3 |       0 |        9 |        3 |        4 |        4 |        6 |        2 |       0 |        1 |        3 |        2 |        0 |        0 |        0 |       0 |        5 |        0 |        0 |        3 |        1 |        0 |       0 |      0 |      0 |     15 |      9 |      4 |      3 |      5 |     79 |      0 |      0 |      0 |     20 |     30 |     14 |      7 |     13 |    101 |      0 |      0 |      1 |      7 |      9 |      6 |      0 |      2 |     37 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1107200 |     314 |     85 |    146 |     6 |    0 |     5 |    3 |    0 |     0 |    0 |     69 |    0 |    0 |    0 |    0 |    155 |    159 |      13 |      14 |       2 |       0 |      3 |      6 |      2 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      5 |      2 |      1 |      2 |      0 |      2 |      0 |       6 |       4 |       2 |       0 |      8 |      9 |      3 |      0 |        4 |        3 |        6 |       15 |        7 |        5 |       0 |        3 |        4 |       10 |       16 |       11 |        1 |       0 |        7 |        7 |       19 |       21 |       15 |        3 |       0 |        7 |        9 |       22 |       17 |       10 |        9 |       0 |        3 |       10 |        3 |       15 |        3 |        2 |       0 |        8 |        8 |        6 |        6 |        3 |        2 |       0 |        2 |        0 |        2 |        2 |        0 |        1 |       0 |        0 |        3 |        3 |        0 |        1 |        0 |       0 |      0 |      0 |     12 |     16 |      5 |      4 |      4 |     44 |      0 |      0 |      0 |     16 |     30 |      2 |      6 |     13 |     79 |      0 |      0 |      1 |      7 |     12 |      7 |      2 |      3 |     37 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 1107300 |     564 |    146 |    276 |     8 |    0 |     6 |    5 |    5 |     3 |    0 |    115 |    0 |    0 |    0 |    0 |    279 |    285 |      17 |      25 |      20 |       1 |      3 |     16 |      4 |      0 |      3 |      1 |      3 |      0 |      1 |      1 |      3 |      1 |      3 |      0 |      2 |      1 |      2 |      1 |      1 |      0 |       1 |       7 |       2 |       1 |     16 |     26 |     15 |      7 |        2 |       10 |        7 |       16 |       12 |       15 |       1 |        2 |       10 |       21 |       22 |       20 |        8 |       0 |        7 |       21 |       34 |       33 |       27 |       27 |       0 |        9 |       21 |       27 |       27 |       26 |       17 |       0 |        6 |        7 |        8 |       15 |       11 |        5 |       0 |       11 |       12 |       14 |       14 |        6 |        6 |       0 |        3 |        4 |        2 |        2 |        2 |        2 |       0 |        2 |        6 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     17 |     21 |     14 |      8 |      8 |     78 |      0 |      0 |      1 |     32 |     65 |     21 |     13 |      5 |    139 |      0 |      0 |      0 |     24 |     18 |      4 |      2 |      2 |     65 |      0 |      0 |      0 |      5 |     12 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1107400 |     568 |    184 |    254 |    10 |    0 |     3 |    4 |    4 |     7 |    0 |    102 |    0 |    0 |    0 |    0 |    296 |    272 |      29 |      23 |       9 |       3 |      5 |     10 |      2 |      1 |      0 |      3 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |      0 |       1 |       1 |       0 |       0 |     15 |     11 |      8 |      0 |        9 |       11 |       13 |       22 |       24 |        2 |       0 |        7 |        9 |       20 |       37 |       23 |        6 |       1 |       15 |        9 |       33 |       38 |       28 |       10 |       0 |        8 |       13 |       32 |       35 |       26 |        6 |       1 |       13 |       10 |        9 |       16 |       10 |        4 |       0 |        9 |        3 |       11 |        5 |        9 |        3 |       0 |        7 |        6 |        1 |        4 |        2 |        0 |       0 |        3 |        0 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |     19 |     29 |     12 |     12 |     14 |     98 |      0 |      0 |      2 |     24 |     45 |     33 |      9 |     10 |    131 |      0 |      0 |      1 |     14 |     14 |      3 |      2 |      2 |     66 |      0 |      0 |      0 |      9 |      7 |      0 |      1 |      1 |     10 |      0 |     37 | s03      | R    |
| 1107500 |     519 |    149 |    255 |     6 |    0 |     2 |    2 |    0 |     4 |    0 |    101 |    0 |    0 |    0 |    0 |    262 |    257 |      11 |       9 |       5 |       2 |     10 |     14 |      1 |      1 |      3 |      1 |      1 |      0 |      3 |      2 |      1 |      0 |      4 |      3 |     10 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      8 |      2 |      0 |        8 |        6 |       15 |       18 |       13 |        6 |       0 |        3 |        4 |       27 |       24 |       20 |        5 |       0 |       16 |       12 |       36 |       43 |       32 |        4 |       0 |        7 |       12 |       34 |       37 |       18 |        4 |       0 |        2 |       10 |       14 |       10 |       11 |        0 |       0 |       10 |       12 |       12 |       13 |        5 |        2 |       0 |        1 |        0 |        1 |        2 |        2 |        0 |       0 |        1 |        2 |        1 |        1 |        3 |        0 |       0 |      0 |      0 |     23 |     30 |     12 |      9 |      6 |     69 |      0 |      0 |      1 |     33 |     55 |     16 |      6 |     12 |    132 |      0 |      0 |      0 |     15 |     15 |      4 |      1 |      3 |     63 |      0 |      0 |      0 |      2 |      2 |      3 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1107600 |     111 |     31 |     51 |     1 |    0 |     1 |    0 |    1 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     54 |     57 |       1 |       1 |       4 |       0 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |       3 |       0 |       1 |       1 |      0 |      1 |      2 |      0 |        3 |        2 |        2 |        5 |        3 |        1 |       1 |        0 |        2 |        4 |        6 |        1 |        1 |       0 |        2 |        1 |        3 |       14 |        2 |        0 |       0 |        6 |        2 |        3 |       14 |        3 |        1 |       0 |        3 |        3 |        3 |        3 |        3 |        0 |       0 |        2 |        0 |        2 |        3 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |      2 |      4 |      2 |      2 |      2 |     18 |      0 |      0 |      1 |      8 |      3 |      4 |      1 |      3 |     31 |      0 |      0 |      1 |      3 |      2 |      0 |      2 |      1 |     17 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1107700 |     640 |    156 |    319 |    11 |    0 |     4 |    2 |    1 |     4 |    0 |    143 |    0 |    0 |    0 |    0 |    315 |    325 |      25 |      22 |      13 |       1 |      5 |     24 |      7 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      1 |      0 |      6 |      4 |      0 |      1 |      5 |      5 |      3 |      0 |       3 |       9 |       3 |       1 |      3 |     11 |      4 |      1 |        4 |        8 |       10 |       30 |       14 |        8 |       0 |       11 |        7 |       18 |       34 |       10 |        2 |       0 |       13 |        9 |       35 |       60 |       30 |        9 |       1 |       12 |       12 |       42 |       58 |       26 |       11 |       1 |       15 |       10 |       14 |       20 |       11 |        4 |       0 |       14 |        8 |       12 |       19 |       12 |        2 |       2 |        3 |        1 |        3 |        3 |        0 |        0 |       0 |        3 |        3 |        3 |        2 |        1 |        0 |       0 |      0 |      0 |     16 |     31 |     11 |      8 |      2 |     88 |      0 |      0 |      1 |     36 |     64 |     27 |      7 |     20 |    164 |      0 |      0 |      0 |     27 |     23 |      6 |      5 |      8 |     74 |      0 |      0 |      0 |      2 |      6 |      1 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 1107800 |     526 |    154 |    245 |     9 |    0 |     4 |    4 |    2 |     1 |    0 |    107 |    0 |    0 |    0 |    0 |    243 |    283 |      23 |      33 |      13 |       2 |      5 |      7 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      1 |      0 |      4 |      0 |       3 |       4 |       0 |       0 |      9 |      7 |      7 |      1 |       11 |        9 |       11 |       20 |       14 |        5 |       0 |       10 |       13 |       10 |       32 |       18 |        0 |       1 |       11 |       15 |       28 |       30 |       20 |       12 |       0 |       18 |       17 |       30 |       35 |       22 |        7 |       0 |       13 |        7 |        6 |       13 |        6 |        2 |       0 |       17 |        6 |       10 |       20 |        4 |        3 |       0 |        0 |        2 |        3 |        3 |        2 |        0 |       0 |        1 |        4 |        2 |        1 |        1 |        1 |       0 |      0 |      1 |     15 |     31 |      5 |      7 |     11 |     84 |      0 |      0 |      1 |     26 |     30 |     14 |     10 |     18 |    146 |      0 |      0 |      0 |     17 |      4 |     10 |      1 |      5 |     70 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1107900 |     414 |    101 |    198 |    10 |    0 |     0 |    6 |    0 |     2 |    0 |     97 |    0 |    0 |    0 |    0 |    199 |    215 |      18 |      17 |       8 |       1 |      4 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      6 |      4 |      8 |      0 |      4 |      2 |      2 |      0 |       3 |      13 |       2 |       0 |      2 |     15 |      8 |      0 |        6 |        3 |       11 |       11 |        8 |        3 |       0 |        8 |        3 |       18 |       16 |        8 |        4 |       2 |        6 |        5 |       37 |       32 |       13 |       11 |       0 |       10 |        8 |       34 |       31 |        6 |        4 |       1 |        6 |        5 |       11 |       16 |        8 |        2 |       0 |       11 |        4 |       12 |       14 |        6 |        2 |       0 |        1 |        0 |        1 |        2 |        1 |        0 |       0 |        2 |        3 |        7 |        0 |        0 |        1 |       0 |      0 |      0 |     16 |     12 |      4 |      0 |     14 |     55 |      0 |      0 |      3 |     18 |     34 |     19 |     16 |     18 |     90 |      0 |      0 |      1 |     15 |     15 |      6 |      4 |     10 |     46 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1108000 |     210 |     33 |    124 |     3 |    0 |     1 |    1 |    1 |     2 |    0 |     45 |    0 |    0 |    0 |    0 |    105 |    105 |       1 |       4 |       1 |       0 |      5 |      6 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |       1 |       4 |       2 |       0 |      0 |      2 |      2 |      0 |        0 |        0 |        5 |        5 |        0 |        1 |       0 |        2 |        1 |       11 |        6 |        1 |        1 |       0 |        6 |        5 |       24 |       20 |       14 |        2 |       0 |        4 |        4 |       21 |       17 |        5 |        2 |       0 |        2 |        3 |        7 |        4 |        2 |        1 |       0 |        6 |        2 |        9 |        5 |        4 |        0 |       0 |        3 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     31 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |    123 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     45 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1108400 |      38 |      4 |     27 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     20 |     18 |       0 |       1 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        4 |        0 |        5 |        4 |        1 |        0 |       0 |        0 |        1 |        7 |        5 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      5 |      7 |      0 |      1 |      1 |     13 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1108600 |     202 |     47 |    118 |     3 |    0 |     0 |    0 |    1 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |    100 |    102 |       7 |      14 |       6 |       0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      1 |      0 |      0 |       3 |       4 |       3 |       0 |      1 |      5 |      1 |      0 |        0 |        2 |        8 |        8 |        1 |        0 |       0 |        6 |        5 |        6 |       11 |        0 |        0 |       0 |        3 |        6 |       18 |       28 |        5 |        4 |       0 |        3 |        9 |       19 |       19 |        3 |        1 |       0 |        5 |        4 |        1 |        5 |        0 |        1 |       0 |        2 |        2 |        5 |        6 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      9 |      7 |      1 |      5 |     19 |      0 |      0 |      0 |     12 |     31 |     13 |      6 |     21 |     35 |      0 |      0 |      0 |      3 |      6 |      1 |      0 |      3 |     19 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 1108700 |     145 |     41 |     65 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |     73 |     72 |       0 |       4 |       4 |       0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |       4 |       3 |       1 |       0 |      3 |      2 |      3 |      2 |        2 |        4 |        5 |        8 |        1 |        3 |       0 |        1 |        3 |        6 |        5 |        2 |        1 |       0 |        0 |        2 |        8 |       14 |        3 |        4 |       0 |        3 |        6 |        7 |       12 |        4 |        2 |       0 |        0 |        8 |        3 |        4 |        1 |        1 |       0 |        4 |        3 |        8 |        2 |        2 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      2 |     10 |      5 |      4 |      3 |      6 |     11 |      0 |      0 |      0 |      3 |     12 |      4 |      2 |     19 |     25 |      0 |      0 |      0 |      3 |      3 |      2 |      5 |      3 |     20 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1108900 |      17 |      2 |     10 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     11 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        2 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1109000 |     310 |     63 |    173 |     8 |    0 |     0 |    0 |    0 |     0 |    0 |     66 |    0 |    0 |    0 |    0 |    157 |    153 |       4 |      11 |       3 |       0 |      5 |      9 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      5 |      4 |      2 |      0 |      2 |      1 |      0 |       0 |       3 |       2 |       0 |      4 |      3 |      1 |      0 |        0 |        6 |       11 |        4 |        6 |        2 |       0 |        2 |        7 |       12 |        8 |        5 |        0 |       0 |        3 |       21 |       30 |       16 |       17 |        5 |       0 |        4 |       19 |       32 |       15 |        6 |        5 |       0 |        4 |       12 |        5 |        4 |        5 |        2 |       0 |        6 |       11 |        7 |        3 |        5 |        2 |       0 |        0 |        0 |        0 |        4 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     62 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |    171 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     66 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1109100 |      20 |      3 |      9 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     10 |     10 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        2 |        0 |        2 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1109200 |     386 |    109 |    164 |     6 |    0 |     3 |    0 |    2 |     1 |    0 |    101 |    0 |    0 |    0 |    0 |    200 |    186 |       8 |       5 |      11 |       1 |      7 |     12 |      4 |      1 |      2 |      5 |      1 |      1 |      3 |      1 |      0 |      0 |     10 |      9 |     12 |      1 |      0 |      0 |      2 |      0 |       2 |       7 |      10 |       3 |      1 |      4 |      4 |      0 |        4 |       16 |       20 |       11 |        1 |        2 |       0 |        3 |       15 |       21 |       11 |        4 |        1 |       0 |        5 |       21 |       30 |       14 |       10 |        7 |       0 |        5 |       30 |       20 |       16 |        5 |        1 |       0 |        4 |       13 |       22 |       11 |        2 |        1 |       0 |        6 |       11 |       19 |       10 |        1 |        1 |       0 |        0 |        3 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        3 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    109 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    164 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1109300 |     195 |     49 |     87 |     1 |    0 |     0 |    0 |    1 |     3 |    0 |     54 |    0 |    0 |    0 |    0 |     95 |    100 |       3 |       7 |       1 |       0 |      4 |      4 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      5 |      5 |     15 |      0 |      3 |      0 |      2 |      0 |       2 |       9 |       2 |       1 |      2 |      2 |      1 |      0 |        1 |        0 |        7 |       14 |        2 |        1 |       0 |        2 |        4 |        9 |        9 |        0 |        0 |       0 |        2 |        0 |       17 |       14 |        4 |        4 |       0 |        1 |        3 |       16 |       22 |        2 |        2 |       0 |        5 |        3 |        7 |       10 |        3 |        0 |       0 |        7 |        3 |       11 |        3 |        2 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     23 |      0 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |     40 |      0 |      0 |      1 |      0 |     46 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |     38 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1109800 |     270 |     72 |    125 |     5 |    0 |     2 |    1 |    0 |     3 |    0 |     62 |    0 |    0 |    0 |    0 |    132 |    138 |       4 |      11 |       5 |       0 |      6 |      6 |      4 |      0 |      2 |      2 |      4 |      0 |      2 |      0 |      2 |      0 |      3 |      4 |      3 |      0 |      2 |      0 |      1 |      0 |       5 |       5 |       3 |       0 |      2 |      2 |      1 |      0 |        3 |       11 |        9 |        2 |        5 |        1 |       0 |        1 |       24 |       11 |        2 |        2 |        1 |       0 |        2 |       22 |       25 |       10 |        4 |        1 |       0 |        1 |       28 |       21 |        5 |        4 |        2 |       0 |        1 |       20 |        5 |        4 |        2 |        0 |       0 |        2 |       14 |        8 |        4 |        2 |        0 |       0 |        0 |        4 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     72 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    125 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     62 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1109900 |      96 |     16 |     47 |     1 |    0 |     2 |    1 |    1 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     50 |     46 |       1 |       5 |       3 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       4 |       2 |       1 |      3 |      7 |      5 |      2 |        0 |        1 |        4 |        2 |        1 |        0 |       0 |        0 |        1 |        6 |        0 |        1 |        0 |       0 |        3 |        5 |        3 |       11 |        4 |        2 |       0 |        3 |        1 |        4 |        7 |        4 |        0 |       0 |        0 |        1 |        5 |        6 |        1 |        0 |       0 |        4 |        2 |        6 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      1 |      4 |      3 |      2 |      0 |      6 |      0 |      0 |      0 |      7 |      5 |      9 |     12 |      1 |     13 |      0 |      0 |      0 |      3 |      3 |      6 |      2 |      0 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1110000 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1111000 |     132 |     32 |     72 |     1 |    0 |     1 |    1 |    0 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |     66 |     66 |       2 |       5 |       2 |       0 |      3 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        5 |        2 |        0 |       0 |        0 |        5 |        5 |        6 |        3 |        3 |       0 |        0 |       10 |       13 |       11 |        5 |        3 |       0 |        0 |        4 |        8 |        9 |        5 |        3 |       1 |        2 |        0 |        1 |        3 |        3 |        3 |       0 |        1 |        2 |        3 |        3 |        3 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |     10 |      8 |      0 |      0 |      0 |     54 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1111100 |     211 |     44 |    113 |     5 |    0 |     1 |    1 |    0 |     0 |    0 |     47 |    0 |    0 |    0 |    0 |    107 |    104 |       0 |       5 |       0 |       0 |      4 |     10 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      3 |      4 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        7 |        7 |        3 |        1 |       0 |        2 |        3 |        6 |        8 |        1 |        2 |       0 |        2 |        3 |       26 |       14 |       10 |        6 |       0 |        0 |        3 |       28 |       14 |        6 |        1 |       0 |        1 |        1 |        9 |        6 |        2 |        1 |       0 |        4 |        1 |       13 |        8 |        1 |        0 |       0 |        1 |        1 |        2 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     42 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |    104 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     44 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1111200 |     634 |    169 |    315 |    10 |    0 |     0 |    2 |    2 |     1 |    0 |    135 |    0 |    0 |    0 |    0 |    304 |    330 |       9 |       9 |       8 |       0 |     37 |     21 |     13 |      1 |      0 |      0 |      3 |      0 |      0 |      4 |      3 |      0 |      6 |      7 |     16 |      0 |      1 |      0 |      3 |      0 |       0 |       4 |       4 |       0 |      1 |      2 |      2 |      0 |        4 |        2 |       12 |       28 |       10 |       11 |       0 |        3 |        6 |       32 |       36 |       14 |       10 |       1 |        5 |       10 |       57 |       47 |       19 |       22 |       0 |       12 |       13 |       54 |       38 |       23 |       13 |       2 |        9 |        4 |       25 |       16 |        4 |        9 |       0 |        9 |        5 |       28 |       17 |        6 |        3 |       0 |        2 |        0 |        4 |        2 |        2 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |      0 |      3 |     43 |     31 |      9 |      6 |      2 |     75 |      0 |      0 |      1 |     77 |     84 |      6 |      9 |      1 |    137 |      0 |      0 |      1 |     15 |     23 |      7 |      2 |      0 |     87 |      0 |      0 |      0 |      5 |      2 |      1 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 1111300 |    1080 |    268 |    496 |    12 |    0 |     3 |   10 |    0 |     2 |    0 |    289 |    0 |    0 |    0 |    0 |    527 |    553 |       8 |      24 |       7 |       1 |     44 |     23 |     27 |      3 |      1 |      1 |      1 |      1 |      4 |      4 |      0 |      0 |     12 |     25 |     57 |      0 |      6 |      3 |      3 |      0 |       4 |      12 |       3 |       2 |      0 |      3 |      2 |      2 |        6 |        4 |       47 |       44 |        4 |        3 |       0 |        7 |       13 |       73 |       51 |       11 |        5 |       0 |        7 |       21 |      120 |       76 |       28 |        7 |       1 |       16 |       29 |      120 |       53 |       14 |        4 |       0 |       14 |       11 |       56 |       43 |       16 |        2 |       0 |       10 |       18 |       58 |       45 |       13 |        3 |       0 |        2 |        4 |        5 |        4 |        1 |        1 |       0 |        0 |        1 |        6 |        3 |        0 |        0 |       0 |      0 |      2 |     36 |      2 |      0 |      0 |      0 |    228 |      0 |      0 |      2 |     70 |      3 |      0 |      1 |      0 |    420 |      0 |      0 |      1 |     50 |      1 |      2 |      1 |      0 |    234 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 1111400 |      73 |     22 |     35 |     1 |    0 |     1 |    1 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     38 |     35 |       0 |       0 |       0 |       0 |      2 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        0 |        2 |        3 |        1 |        1 |       0 |        0 |        2 |        3 |        5 |        3 |        1 |       0 |        1 |        1 |        5 |       10 |        2 |        2 |       0 |        0 |        0 |        1 |        8 |        3 |        2 |       0 |        0 |        0 |        2 |        1 |        4 |        0 |       0 |        0 |        1 |        0 |        2 |        3 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1111700 |     794 |    210 |    371 |     8 |    0 |     7 |   11 |    1 |     5 |    0 |    181 |    0 |    0 |    0 |    0 |    362 |    432 |       7 |      13 |       7 |       1 |     18 |     15 |     13 |      1 |      3 |      3 |      3 |      0 |      1 |      6 |      0 |      0 |      4 |      7 |     13 |      1 |      3 |      5 |      2 |      0 |       2 |       5 |       3 |       0 |      1 |      1 |      4 |      0 |        7 |       18 |       14 |       21 |        5 |        8 |       0 |        6 |       33 |       54 |       24 |       14 |        4 |       2 |        8 |       40 |       71 |       41 |       25 |        5 |       0 |        8 |       55 |       53 |       36 |       18 |        9 |       2 |        9 |       24 |       28 |       15 |        3 |        3 |       0 |       12 |       43 |       23 |       15 |        6 |        0 |       0 |        3 |        6 |        4 |        3 |        1 |        0 |       0 |        3 |        5 |        5 |        2 |        0 |        0 |       0 |      0 |      0 |     14 |      5 |      3 |      0 |      0 |    188 |      0 |      0 |      1 |     15 |     12 |      0 |      3 |      1 |    339 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      1 |    170 |      0 |      0 |      0 |      6 |      1 |      0 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 1111800 |     815 |    220 |    367 |    14 |    0 |     3 |    5 |    2 |     4 |    0 |    200 |    0 |    0 |    0 |    0 |    415 |    400 |      14 |      13 |       7 |       0 |     28 |     26 |      3 |      7 |      3 |      4 |      4 |      0 |      0 |      4 |      0 |      0 |     14 |     16 |     26 |      1 |      4 |      3 |      3 |      2 |       4 |       9 |       6 |       0 |      1 |      3 |      2 |      0 |        3 |       20 |       34 |       24 |       10 |        6 |       0 |        6 |       26 |       51 |       25 |        8 |        6 |       1 |        7 |       41 |       85 |       42 |       16 |        4 |       0 |        6 |       41 |       69 |       37 |       16 |        3 |       0 |        5 |       20 |       50 |       26 |        5 |        2 |       0 |        6 |       24 |       38 |       17 |        4 |        3 |       0 |        1 |        2 |        9 |        2 |        1 |        0 |       0 |        1 |        4 |        5 |        1 |        1 |        1 |       0 |      0 |      1 |     17 |      2 |      1 |      0 |      0 |    199 |      0 |      0 |      4 |     27 |      7 |      0 |      1 |      0 |    328 |      0 |      0 |      3 |     19 |      2 |      0 |      1 |      0 |    175 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 1111900 |     181 |     54 |     77 |     3 |    0 |     0 |    1 |    1 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |     95 |     86 |       6 |       3 |       3 |       0 |      4 |      6 |      1 |      2 |      0 |      3 |      1 |      0 |      2 |      2 |      0 |      1 |      6 |      3 |     15 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       3 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        7 |        5 |        6 |        1 |       0 |        1 |        9 |        8 |        6 |        7 |        0 |       0 |        1 |        4 |       16 |       12 |        4 |        5 |       0 |        2 |        2 |       15 |        6 |        8 |        2 |       0 |        0 |        2 |       16 |        4 |        4 |        1 |       0 |        3 |        2 |        5 |        3 |        3 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     19 |      6 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |     19 |     11 |      0 |      0 |      0 |     47 |      0 |      0 |      0 |     13 |      1 |      0 |      0 |      0 |     30 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1112100 |    1580 |    413 |    688 |    18 |    0 |     5 |    9 |    5 |     7 |    0 |    435 |    0 |    0 |    0 |    0 |    766 |    814 |      24 |      15 |      21 |       3 |     46 |     41 |     29 |      5 |      4 |      3 |      6 |      0 |      3 |     10 |      2 |      1 |     27 |     21 |     48 |      2 |      7 |      3 |     10 |      0 |       5 |      13 |       9 |       1 |      5 |      7 |      4 |      1 |       11 |       40 |       63 |       44 |        7 |        7 |       0 |       10 |       82 |       90 |       37 |       17 |        5 |       0 |       16 |      106 |      128 |       61 |       20 |       13 |       0 |       18 |      122 |      120 |       53 |       20 |       11 |       0 |       19 |       64 |       81 |       41 |       10 |       12 |       0 |       20 |       78 |       68 |       25 |        9 |        8 |       0 |        0 |       12 |        5 |        3 |        3 |        0 |       0 |        5 |        9 |        3 |        3 |        1 |        0 |       0 |      0 |      0 |     18 |      2 |      1 |      2 |      0 |    390 |      0 |      0 |      6 |     25 |      4 |      3 |      0 |      0 |    650 |      0 |      0 |      3 |     13 |      1 |      0 |      0 |      0 |    418 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     44 |      0 |     37 | s03      | R    |
| 1112200 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1112700 |      86 |     16 |     55 |     2 |    0 |     1 |    2 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     47 |     39 |       2 |       4 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        2 |        0 |        2 |       0 |        0 |        2 |        2 |        3 |        1 |        0 |       0 |        0 |        3 |        6 |       13 |        6 |        2 |       0 |        1 |        0 |        6 |       11 |        5 |        2 |       0 |        2 |        0 |        0 |        0 |        2 |        1 |       0 |        1 |        1 |        1 |        0 |        1 |        1 |       0 |        2 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      0 |      2 |      0 |      1 |      8 |      0 |      0 |      0 |      6 |      9 |      7 |      2 |      7 |     24 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1112800 |      23 |      8 |      8 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     11 |     12 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       1 |       0 |      1 |      1 |      1 |      0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        2 |        3 |        0 |        0 |       0 |        1 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1112900 |     189 |     65 |     85 |     3 |    0 |     0 |    2 |    0 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |     92 |     97 |       9 |       9 |       3 |       0 |     10 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       1 |       7 |       1 |       0 |      0 |      7 |      5 |      0 |        4 |        4 |        5 |       11 |        3 |        3 |       0 |        7 |        5 |        9 |        9 |        3 |        2 |       0 |        3 |        5 |        9 |       16 |        6 |        2 |       0 |        6 |        3 |       12 |       16 |        2 |        5 |       0 |        3 |        2 |        6 |        4 |        1 |        2 |       0 |        3 |        3 |        3 |        1 |        3 |        2 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     12 |      5 |      1 |      2 |      3 |     42 |      0 |      0 |      1 |     13 |     18 |      4 |      0 |     11 |     38 |      0 |      0 |      0 |      5 |      4 |      1 |      1 |      1 |     21 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1150000 |     107 |     30 |     64 |     1 |    0 |     0 |    1 |    0 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     53 |     54 |       0 |       4 |       2 |       0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        7 |        6 |        0 |        0 |       0 |        0 |        1 |        9 |        5 |        1 |        0 |       0 |        1 |        2 |       10 |       11 |        4 |        2 |       0 |        1 |        4 |       14 |       10 |        4 |        1 |       0 |        1 |        1 |        3 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1150100 |     118 |     18 |     63 |     1 |    0 |     3 |    0 |    0 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |     55 |     63 |       0 |       0 |       0 |       0 |      3 |      4 |      5 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        4 |        1 |        2 |       0 |        1 |        1 |        0 |        2 |        4 |        1 |       0 |        1 |        1 |        3 |        8 |       10 |        6 |       0 |        1 |        0 |        8 |       11 |        8 |        6 |       0 |        4 |        0 |        0 |        5 |        5 |        2 |       0 |        2 |        0 |        3 |        7 |        5 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |      0 |      0 |      2 |      5 |      3 |      0 |      2 |      6 |      0 |      0 |      0 |      9 |      6 |      3 |      5 |      7 |     33 |      0 |      0 |      0 |      7 |      6 |      3 |      0 |      4 |     13 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1150200 |     134 |     18 |     98 |     0 |    0 |     2 |    0 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     62 |     72 |       0 |       0 |       0 |       0 |      8 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        4 |       0 |        1 |        0 |        0 |        1 |        2 |        9 |       0 |        0 |        0 |        1 |        4 |       14 |       31 |       0 |        0 |        0 |        0 |        2 |       14 |       32 |       0 |        0 |        0 |        0 |        1 |        1 |        5 |       0 |        0 |        0 |        2 |        1 |        4 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      1 |      2 |      0 |      1 |      3 |     11 |      0 |      0 |      1 |     15 |     18 |      7 |      4 |      8 |     45 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      2 |      8 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1150300 |     453 |    163 |    180 |     5 |    0 |     2 |    1 |    2 |     4 |    0 |     96 |    0 |    0 |    0 |    0 |    220 |    233 |       8 |       7 |       5 |       0 |     23 |     17 |      5 |      1 |      2 |      0 |      2 |      0 |      1 |      1 |      1 |      0 |      3 |      9 |     15 |      0 |      4 |      1 |      2 |      1 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        4 |       23 |       33 |        1 |        6 |       1 |        3 |        9 |       34 |       35 |        6 |        6 |       0 |        6 |        7 |       38 |       25 |        9 |       11 |       0 |        3 |        9 |       38 |       27 |        3 |        4 |       0 |        8 |        4 |       15 |       18 |        2 |        2 |       0 |        4 |       10 |       19 |       10 |        2 |        2 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        1 |        5 |        1 |        0 |        2 |       0 |      0 |      0 |     23 |     50 |     19 |      5 |      1 |     65 |      0 |      0 |      0 |     28 |     59 |     13 |      4 |      5 |     71 |      0 |      0 |      0 |     15 |     19 |      1 |      1 |      3 |     57 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1150400 |     624 |    188 |    284 |    13 |    0 |     4 |    4 |    1 |     2 |    0 |    128 |    0 |    0 |    0 |    0 |    286 |    338 |       9 |       5 |       4 |       1 |     42 |     23 |     17 |      1 |      1 |      1 |      1 |      4 |      1 |      0 |      0 |      0 |      3 |      4 |     16 |      1 |      0 |      0 |      3 |      0 |       4 |       2 |       0 |       0 |      1 |      2 |      0 |      0 |        5 |        1 |       11 |       31 |       19 |        3 |       0 |        7 |       12 |       29 |       50 |       15 |        5 |       0 |        5 |        5 |       35 |       49 |       41 |        8 |       0 |       12 |       14 |       33 |       51 |       22 |        9 |       0 |       11 |        7 |       14 |       23 |        6 |        3 |       0 |       13 |        6 |       14 |       21 |        8 |        2 |       0 |        0 |        2 |        3 |        2 |        1 |        1 |       0 |        2 |        2 |        5 |        3 |        3 |        0 |       0 |      0 |      0 |     28 |     31 |     10 |     10 |     27 |     82 |      0 |      0 |      0 |     33 |     55 |     21 |     25 |     39 |    111 |      0 |      0 |      1 |     16 |     17 |      9 |      7 |      3 |     75 |      0 |      0 |      0 |      6 |      4 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1150500 |     915 |    275 |    389 |    20 |    0 |     4 |    3 |    4 |     5 |    0 |    215 |    0 |    0 |    0 |    0 |    441 |    474 |       6 |      10 |       7 |       1 |     43 |     33 |     21 |      3 |      1 |      1 |      2 |      0 |      4 |      3 |      4 |      0 |      4 |     20 |     17 |      4 |      1 |      2 |      4 |      0 |       1 |       2 |       3 |       0 |      2 |      3 |      1 |      0 |        8 |        8 |       22 |       51 |       24 |        5 |       0 |        4 |       10 |       43 |       71 |       21 |        8 |       0 |       13 |       10 |       55 |       65 |       31 |       14 |       1 |       10 |       12 |       65 |       67 |       32 |       14 |       0 |       16 |       11 |       25 |       31 |       20 |        9 |       3 |       13 |       10 |       31 |       23 |       16 |        7 |       0 |        4 |        1 |        7 |        2 |        2 |        3 |       0 |        2 |        4 |        3 |        7 |        1 |        0 |       0 |      0 |      2 |     38 |     65 |     18 |      9 |      9 |    134 |      0 |      0 |      1 |     41 |     67 |     25 |     22 |     18 |    215 |      0 |      0 |      0 |     23 |     20 |     24 |      4 |      6 |    138 |      0 |      0 |      0 |      3 |     12 |      5 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 1150600 |     529 |    199 |    189 |     5 |    0 |     4 |    4 |    1 |     2 |    0 |    125 |    0 |    0 |    0 |    0 |    216 |    313 |      10 |      10 |       5 |       0 |     21 |     12 |      8 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      3 |      2 |      2 |      0 |      1 |      1 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        4 |        7 |       19 |       16 |       12 |       13 |       0 |        3 |       16 |       31 |       37 |       26 |       15 |       0 |        5 |       16 |       20 |       21 |       14 |       12 |       1 |        2 |       28 |       18 |       23 |       14 |       15 |       0 |        2 |       20 |       11 |        8 |        3 |        3 |       0 |       14 |       18 |       12 |       14 |        8 |       12 |       0 |        2 |        0 |        5 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        3 |        1 |        2 |       0 |      0 |      5 |     37 |     19 |      8 |      4 |      9 |    117 |      0 |      0 |      0 |     27 |     15 |     13 |      2 |      7 |    125 |      0 |      0 |      1 |     16 |     10 |      5 |      1 |      0 |     92 |      0 |      0 |      1 |      4 |      4 |      1 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 1150700 |     767 |    258 |    325 |    14 |    0 |     3 |   10 |    5 |     8 |    0 |    144 |    0 |    0 |    0 |    0 |    346 |    421 |      12 |      17 |       3 |       2 |     38 |     26 |     13 |      2 |      1 |      4 |      1 |      0 |      1 |      0 |      1 |      0 |      7 |      4 |     12 |      1 |      1 |      1 |      3 |      2 |       4 |       1 |       1 |       0 |      2 |      2 |      1 |      0 |        5 |       16 |       15 |       13 |       19 |       23 |       1 |        8 |       21 |       30 |       46 |       28 |       33 |       0 |        5 |       22 |       31 |       39 |       29 |       33 |       0 |        3 |       13 |       35 |       46 |       31 |       38 |       0 |        7 |       22 |       15 |       13 |        8 |        9 |       0 |        7 |       14 |       19 |       17 |        9 |        4 |       0 |        4 |        8 |        3 |        3 |        2 |        1 |       0 |        1 |        8 |        2 |        4 |        4 |        0 |       0 |      0 |      1 |     47 |     42 |      9 |     10 |     17 |    132 |      0 |      0 |      1 |     35 |     51 |     27 |     14 |     25 |    172 |      0 |      0 |      2 |     16 |     11 |      8 |      4 |      2 |    101 |      0 |      0 |      1 |      9 |      6 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 1150800 |       5 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1150900 |     853 |    272 |    341 |    24 |    0 |     4 |    4 |    4 |     4 |    0 |    200 |    0 |    0 |    0 |    0 |    382 |    471 |      10 |      15 |       5 |       7 |     38 |     24 |     25 |      3 |      1 |      5 |      4 |      1 |      2 |      2 |      0 |      0 |      5 |      9 |     18 |      0 |      5 |      5 |      6 |      1 |       0 |       2 |       1 |       0 |      1 |      2 |      0 |      0 |        6 |       15 |       22 |       27 |       16 |       22 |       1 |       10 |       22 |       34 |       49 |       20 |       28 |       0 |       10 |       30 |       50 |       33 |       20 |       21 |       0 |        8 |       35 |       46 |       37 |       17 |       33 |       1 |        7 |       27 |       19 |       19 |       13 |        7 |       0 |       13 |       23 |       31 |       20 |        6 |       15 |       0 |        2 |        5 |        5 |        1 |        3 |        1 |       0 |        5 |        5 |        7 |        4 |        1 |        1 |       0 |      0 |      0 |     26 |     21 |     16 |      8 |      8 |    193 |      0 |      0 |      1 |     29 |     15 |     10 |     11 |      5 |    270 |      0 |      0 |      1 |     24 |     15 |      8 |      3 |      7 |    142 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 1151000 |     855 |    240 |    393 |    10 |    0 |     1 |    5 |    1 |     4 |    0 |    201 |    0 |    0 |    0 |    0 |    412 |    443 |       9 |      10 |       6 |       0 |     24 |     12 |     14 |      1 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      7 |      7 |      9 |      2 |      3 |      7 |      5 |      0 |       0 |       3 |       0 |       0 |      5 |      2 |      2 |      1 |        4 |        6 |       19 |       37 |       17 |       11 |       0 |        7 |       11 |       35 |       46 |       32 |       15 |       0 |       15 |       19 |       49 |       52 |       36 |       34 |       0 |       14 |       14 |       37 |       63 |       30 |       30 |       0 |       13 |       14 |       15 |       32 |       19 |       10 |       1 |        6 |       16 |       29 |       21 |       18 |        7 |       0 |        0 |        0 |        4 |        4 |        1 |        0 |       0 |        1 |        2 |        3 |        3 |        2 |        1 |       0 |      0 |      1 |     37 |     47 |     16 |     13 |     12 |    114 |      0 |      0 |      0 |     53 |     45 |     36 |     24 |     21 |    214 |      0 |      0 |      1 |     27 |     24 |     11 |      9 |      9 |    120 |      0 |      0 |      0 |      8 |      2 |      0 |      0 |      2 |      9 |      0 |     37 | s03      | R    |
| 1151200 |     284 |     65 |    146 |     8 |    0 |     2 |    0 |    0 |     2 |    0 |     61 |    0 |    0 |    0 |    0 |    136 |    148 |       2 |       1 |       0 |       0 |     13 |     11 |     10 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        2 |        4 |        7 |        8 |       0 |        3 |        2 |        6 |        7 |       16 |        6 |       0 |        4 |        4 |       10 |       18 |       14 |       22 |       0 |        5 |        3 |        7 |       18 |       19 |       22 |       0 |        3 |        2 |        4 |        9 |        4 |       11 |       0 |        1 |        1 |        7 |       10 |        4 |        5 |       0 |        1 |        1 |        2 |        0 |        1 |        1 |       0 |        0 |        0 |        2 |        3 |        0 |        1 |       0 |      0 |      0 |      9 |     17 |      4 |      0 |      4 |     31 |      0 |      0 |      3 |     17 |     28 |      3 |      6 |     14 |     75 |      0 |      0 |      0 |      7 |      8 |      3 |      0 |      3 |     40 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1151300 |     284 |    107 |    129 |     5 |    0 |     2 |    1 |    0 |     4 |    0 |     36 |    0 |    0 |    0 |    0 |    140 |    144 |       1 |       3 |       1 |       3 |     16 |     10 |      4 |      2 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        3 |        9 |       16 |       10 |        5 |       4 |        2 |        2 |       13 |       13 |       20 |        4 |       5 |        6 |        7 |       15 |       12 |        9 |       13 |       9 |        2 |        6 |       13 |       12 |        7 |       10 |       8 |        2 |        2 |        4 |        5 |        3 |        0 |       0 |        5 |        2 |        3 |        3 |        5 |        1 |       1 |        1 |        1 |        1 |        1 |        0 |        1 |       0 |        3 |        0 |        1 |        1 |        0 |        2 |       0 |      0 |      1 |     11 |     16 |      7 |      2 |      5 |     65 |      0 |      0 |      0 |     13 |     31 |      7 |      7 |      5 |     66 |      0 |      0 |      0 |      4 |      2 |      5 |      1 |      3 |     21 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1151400 |     302 |     91 |    140 |     7 |    0 |     0 |    6 |    1 |     5 |    0 |     52 |    0 |    0 |    0 |    0 |    148 |    154 |       2 |      10 |       4 |       1 |     12 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      5 |      1 |      3 |      0 |      0 |      0 |       1 |       0 |       1 |       1 |      0 |      0 |      0 |      0 |        2 |        2 |        6 |       11 |        7 |        7 |       3 |        1 |        1 |       12 |       13 |       13 |        8 |       5 |        4 |        4 |       10 |       21 |       17 |       15 |       3 |        2 |        7 |       10 |       19 |       10 |       12 |       6 |        6 |        5 |        2 |        6 |        3 |        3 |       1 |        3 |        3 |        5 |        3 |        7 |        5 |       0 |        1 |        1 |        2 |        3 |        1 |        2 |       0 |        2 |        1 |        3 |        1 |        0 |        2 |       0 |      0 |      0 |     12 |      5 |      9 |      3 |      9 |     53 |      0 |      0 |      2 |      5 |     33 |     14 |      6 |     14 |     66 |      0 |      0 |      0 |      8 |      4 |      4 |      1 |      4 |     31 |      0 |      0 |      0 |      2 |      8 |      0 |      1 |      1 |      7 |      0 |     37 | s03      | R    |
| 1151500 |     491 |    158 |    169 |     9 |    0 |     1 |    7 |    1 |     3 |    0 |    143 |    0 |    0 |    0 |    0 |    246 |    245 |      15 |       5 |      13 |       2 |     24 |     16 |     10 |      3 |      0 |      0 |      1 |      0 |      2 |      1 |      2 |      0 |      2 |      3 |     13 |      2 |      2 |      3 |      5 |      0 |       0 |       3 |       1 |       0 |      1 |      0 |      2 |      0 |        5 |       13 |       17 |       19 |        7 |        6 |       0 |        8 |       21 |       24 |       24 |        2 |       12 |       0 |        6 |       14 |       20 |       27 |        9 |        9 |       0 |        9 |       15 |       20 |       22 |        9 |        9 |       0 |       11 |       19 |       22 |       19 |        8 |        4 |       1 |        7 |       13 |       22 |       14 |        1 |        2 |       0 |        1 |        0 |        2 |        5 |        1 |        1 |       0 |        2 |        5 |        3 |        1 |        0 |        0 |       0 |      0 |      1 |     24 |     14 |     10 |      1 |      6 |    102 |      0 |      0 |      0 |     17 |     19 |     11 |     10 |     10 |    102 |      0 |      0 |      0 |     15 |     13 |      1 |      4 |      2 |    108 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1151600 |       6 |      2 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1151700 |     492 |    136 |    222 |     9 |    0 |     2 |    4 |    2 |     1 |    0 |    116 |    0 |    0 |    0 |    0 |    195 |    297 |       6 |      14 |       7 |       1 |     14 |     19 |     13 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      6 |      5 |      6 |      0 |      2 |      0 |      2 |      1 |       0 |       1 |       1 |       0 |      1 |      0 |      2 |      0 |        0 |       10 |       16 |       11 |        5 |        2 |       0 |        3 |       16 |       20 |       33 |       14 |        6 |       0 |        2 |       17 |       35 |       20 |        9 |        9 |       0 |        7 |       29 |       41 |       27 |       14 |       12 |       0 |        1 |        8 |       17 |       11 |       13 |        1 |       0 |        8 |       17 |       18 |       14 |        6 |        2 |       0 |        1 |        3 |        4 |        0 |        0 |        0 |       0 |        0 |        2 |        3 |        2 |        3 |        0 |       0 |      0 |      1 |     15 |     21 |      2 |      2 |      3 |     92 |      0 |      0 |      0 |     27 |     41 |      5 |      2 |      6 |    141 |      0 |      0 |      0 |     15 |      8 |      0 |      0 |      1 |     92 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1151800 |     446 |    150 |    171 |     9 |    0 |     1 |    2 |    1 |     3 |    0 |    109 |    0 |    0 |    0 |    0 |    192 |    254 |       1 |       1 |       3 |       0 |     22 |     16 |      7 |      2 |      0 |      3 |      3 |      0 |      0 |      2 |      0 |      0 |      7 |      3 |      5 |      0 |      1 |      2 |      1 |      0 |       0 |       0 |       3 |       0 |      0 |      1 |      0 |      0 |        1 |        7 |       11 |       16 |       11 |        6 |       1 |        5 |        8 |       24 |       34 |       15 |       11 |       0 |        2 |        8 |       21 |       29 |       16 |       10 |       1 |        5 |       11 |       18 |       26 |       18 |        6 |       0 |        2 |       10 |       14 |       11 |        7 |        5 |       0 |        4 |        6 |       18 |       16 |        6 |       10 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        2 |        2 |        3 |        4 |        2 |        0 |       0 |      0 |      2 |     18 |     23 |     10 |      6 |      6 |     85 |      0 |      0 |      4 |     21 |     29 |      9 |     12 |     11 |     85 |      0 |      0 |      0 |     21 |     12 |      3 |      3 |      6 |     64 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 1151900 |     683 |    190 |    317 |    17 |    0 |     2 |    1 |    1 |     1 |    0 |    154 |    0 |    0 |    0 |    0 |    330 |    353 |       9 |      11 |       2 |       0 |     21 |     31 |     17 |      3 |      0 |      2 |      2 |      0 |      3 |      5 |      1 |      2 |     12 |     11 |     14 |      1 |      1 |      2 |      6 |      0 |       0 |       6 |       2 |       1 |      1 |      4 |      2 |      0 |        5 |        4 |       20 |       32 |        9 |        5 |       0 |        5 |        8 |       45 |       45 |        3 |        9 |       0 |        7 |        8 |       58 |       63 |       22 |        7 |       1 |        8 |       12 |       60 |       49 |       16 |        6 |       0 |        9 |        2 |       32 |       30 |        7 |        4 |       1 |        8 |       12 |       24 |       19 |        4 |        2 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        5 |        2 |        7 |        4 |        0 |        0 |       0 |      0 |      0 |     40 |     56 |      0 |      1 |      0 |     93 |      0 |      0 |      1 |     52 |    114 |      3 |     11 |      3 |    133 |      0 |      0 |      2 |     29 |     28 |      0 |      4 |      0 |     91 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1152000 |     366 |    137 |    127 |     7 |    0 |     5 |    2 |    0 |     3 |    0 |     85 |    0 |    0 |    0 |    0 |    176 |    190 |       3 |       2 |       0 |       1 |      6 |      5 |      8 |      1 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      4 |      3 |      0 |      0 |      1 |      3 |      0 |       0 |       0 |       1 |       0 |      1 |      2 |      3 |      0 |        0 |        8 |       10 |       12 |       18 |       10 |       4 |        3 |        6 |       10 |       22 |       24 |        8 |       2 |        6 |        8 |       10 |       14 |       18 |        9 |       3 |        4 |        4 |        9 |       18 |       12 |        8 |       4 |        3 |        7 |        6 |       11 |       11 |        3 |       0 |        5 |        6 |        8 |       14 |        6 |        5 |       0 |        1 |        1 |        1 |        0 |        1 |        1 |       0 |        6 |        1 |        2 |        1 |        2 |        0 |       0 |      0 |      1 |     12 |     21 |      4 |      6 |      1 |     92 |      0 |      0 |      0 |     12 |     19 |     10 |     10 |      5 |     71 |      0 |      0 |      0 |     11 |     11 |      1 |      3 |      7 |     52 |      0 |      0 |      1 |      2 |      2 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 1152100 |     452 |    173 |    155 |     7 |    0 |     3 |    1 |    1 |     0 |    0 |    112 |    0 |    0 |    0 |    0 |    215 |    237 |       4 |       2 |       3 |       1 |     15 |     11 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |      0 |      2 |      0 |      3 |      0 |      4 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        5 |        8 |       11 |       14 |        8 |        9 |       6 |        5 |       23 |       23 |       27 |       20 |       10 |       4 |        5 |        9 |       24 |       17 |       11 |       14 |       4 |        1 |       11 |       14 |       13 |       16 |       13 |       3 |        8 |        8 |       15 |       15 |        6 |        9 |       1 |        3 |       16 |        9 |        9 |        7 |        5 |       1 |        1 |        1 |        2 |        2 |        0 |        2 |       0 |        0 |        0 |        3 |        0 |        1 |        0 |       0 |      0 |      0 |     16 |     22 |     11 |      5 |      7 |    112 |      0 |      0 |      0 |     18 |     20 |      4 |     10 |     10 |     93 |      0 |      0 |      1 |     14 |     12 |      8 |      1 |      4 |     72 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 1152200 |     294 |     92 |    142 |     2 |    0 |     1 |    2 |    0 |     3 |    0 |     52 |    0 |    0 |    0 |    0 |    140 |    154 |       1 |       2 |       2 |       1 |     13 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        2 |        3 |       11 |        7 |        7 |       5 |        4 |        5 |       11 |       13 |       11 |        4 |       6 |        4 |        6 |        5 |       12 |       24 |       21 |       4 |        1 |        4 |        8 |        9 |       18 |       22 |       4 |        2 |        5 |        1 |        5 |        3 |        6 |       0 |        3 |        2 |        2 |        7 |       11 |        5 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |      7 |     14 |      8 |      1 |      4 |     58 |      0 |      0 |      0 |     18 |     27 |     10 |      6 |      9 |     72 |      0 |      0 |      0 |      3 |      5 |      3 |      2 |      1 |     38 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1152300 |     536 |    201 |    199 |     4 |    0 |     6 |    6 |    0 |     8 |    0 |    112 |    0 |    0 |    0 |    0 |    258 |    278 |      12 |       4 |       4 |       1 |     13 |     14 |     13 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      3 |      9 |      5 |      0 |      0 |      0 |      2 |      0 |       1 |       2 |       0 |       0 |      0 |      2 |      1 |      0 |        4 |       14 |       16 |       16 |       13 |       12 |      10 |        4 |        9 |       15 |       29 |       22 |       23 |      14 |        3 |       16 |       17 |       13 |       25 |       16 |      14 |        3 |        9 |       22 |       16 |       11 |       16 |      18 |        5 |       17 |       15 |       10 |        5 |        3 |       3 |        5 |        8 |       12 |       15 |        8 |        5 |       1 |        1 |        1 |        4 |        1 |        3 |        1 |       0 |        2 |        4 |        2 |        1 |        2 |        2 |       0 |      0 |      2 |     14 |     30 |     13 |      3 |     12 |    127 |      0 |      0 |      1 |     21 |     27 |      6 |      8 |      9 |    127 |      0 |      0 |      0 |     17 |     12 |      4 |      5 |      2 |     72 |      0 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 1152400 |     503 |    173 |    195 |    14 |    0 |     4 |    4 |    3 |     3 |    0 |    107 |    0 |    0 |    0 |    0 |    208 |    295 |      15 |      11 |       2 |       1 |     20 |     13 |      6 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      8 |      6 |     13 |      1 |      1 |      0 |      3 |      0 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |        3 |       14 |       21 |       14 |        4 |        6 |       1 |        4 |       23 |       30 |       29 |       14 |       10 |       0 |        6 |       16 |       21 |       14 |       16 |        7 |       0 |        8 |       28 |       27 |       30 |       12 |       10 |       0 |        8 |       13 |       10 |        9 |        8 |        1 |       1 |        7 |       14 |       13 |       15 |        5 |        3 |       0 |        0 |        5 |        7 |        3 |        0 |        0 |       0 |        0 |        4 |        3 |        3 |        1 |        2 |       0 |      0 |      1 |     34 |     30 |      5 |      1 |      0 |    102 |      0 |      0 |      2 |     29 |     24 |      4 |      4 |      2 |    130 |      0 |      0 |      1 |     16 |     13 |      1 |      0 |      0 |     76 |      0 |      0 |      0 |     12 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1152500 |     560 |    222 |    212 |     8 |    0 |     0 |    2 |    2 |     7 |    0 |    107 |    0 |    0 |    0 |    0 |    273 |    287 |       7 |       6 |       2 |       1 |     26 |      8 |      9 |      2 |      0 |      0 |      1 |      0 |      3 |      0 |      1 |      0 |      2 |      4 |      3 |      0 |      0 |      3 |      1 |      0 |       0 |       2 |       2 |       0 |      0 |      1 |      0 |      0 |        2 |       10 |       18 |       21 |       23 |       10 |      11 |        5 |       10 |       29 |       34 |       24 |       18 |       7 |        4 |       17 |       16 |       28 |       26 |        9 |       8 |        8 |        6 |       20 |       29 |       15 |       16 |      10 |       10 |       11 |        9 |       16 |       11 |        6 |       1 |        8 |       11 |        8 |       11 |        2 |        2 |       1 |        1 |        3 |        0 |        1 |        0 |        1 |       0 |        4 |        3 |        2 |        3 |        1 |        0 |       0 |      0 |      3 |     18 |     38 |     14 |      7 |     10 |    132 |      0 |      0 |      1 |     21 |     26 |     15 |      9 |     12 |    128 |      0 |      0 |      0 |     14 |      6 |      4 |     10 |      1 |     72 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 1152600 |     429 |    166 |    162 |     3 |    0 |     4 |    5 |    1 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    214 |    215 |       6 |       0 |       0 |       0 |     33 |      8 |     11 |      0 |      2 |      2 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      2 |      0 |      3 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        6 |        3 |        5 |       13 |       26 |       10 |       9 |       11 |        4 |       17 |       24 |       22 |       11 |       5 |        7 |        8 |       14 |       18 |       20 |       13 |       4 |        3 |        3 |       11 |       23 |       22 |        9 |       7 |        5 |        3 |        8 |       15 |        9 |        8 |       0 |        7 |        4 |       10 |        7 |        6 |        4 |       1 |        3 |        2 |        2 |        1 |        0 |        1 |       1 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     14 |     18 |      8 |      8 |      8 |    110 |      0 |      0 |      1 |      9 |     28 |      7 |      5 |     15 |     97 |      0 |      0 |      0 |     12 |     16 |      4 |      3 |      5 |     47 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1152800 |     622 |    186 |    280 |    10 |    0 |     1 |    6 |    1 |     2 |    0 |    136 |    0 |    0 |    0 |    0 |    302 |    320 |       3 |       6 |       3 |       0 |     29 |     35 |     18 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |     12 |     10 |     22 |      0 |      0 |      0 |      2 |      1 |       1 |       3 |       1 |       0 |      2 |      3 |      3 |      0 |        8 |       11 |        8 |       37 |       15 |        6 |       1 |        5 |       10 |       19 |       41 |       21 |        4 |       0 |       10 |        9 |       29 |       44 |       31 |       14 |       1 |       10 |       16 |       32 |       50 |       20 |       14 |       0 |        8 |        5 |        7 |       35 |        8 |        5 |       0 |        8 |        5 |       20 |       22 |        9 |        4 |       0 |        1 |        1 |        1 |        5 |        2 |        0 |       0 |        4 |        3 |        1 |        1 |        1 |        0 |       0 |      0 |      1 |     32 |     28 |      9 |      3 |     14 |     99 |      0 |      0 |      1 |     32 |     45 |      7 |     11 |     18 |    166 |      0 |      0 |      3 |     24 |     18 |      4 |      3 |      4 |     80 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 1152900 |     715 |    187 |    314 |    17 |    0 |     2 |    2 |    3 |     4 |    0 |    186 |    0 |    0 |    0 |    0 |    304 |    411 |      12 |      15 |       9 |       0 |     14 |     12 |     11 |      4 |      3 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      5 |      2 |     15 |      0 |      3 |      2 |      3 |      0 |       0 |       1 |       1 |       0 |      4 |      2 |      3 |      0 |        5 |       20 |       20 |       17 |        4 |        2 |       0 |        8 |       39 |       34 |       18 |       11 |        9 |       0 |        6 |       58 |       36 |       23 |       13 |        7 |       0 |       15 |       57 |       45 |       29 |       12 |       13 |       0 |        6 |       40 |       21 |       11 |        3 |        2 |       0 |        5 |       46 |       26 |       14 |       10 |        2 |       0 |        4 |        3 |        1 |        2 |        0 |        0 |       0 |        1 |        6 |        6 |        2 |        3 |        0 |       0 |      0 |      0 |     15 |      5 |      3 |      1 |      2 |    161 |      0 |      0 |      0 |     13 |      9 |      1 |      3 |      2 |    286 |      0 |      0 |      0 |      6 |      2 |      1 |      0 |      1 |    176 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 1153000 |     613 |    241 |    222 |    11 |    0 |     3 |    6 |    2 |     8 |    0 |    120 |    0 |    0 |    0 |    0 |    318 |    295 |      13 |       3 |       4 |       1 |     30 |     12 |      6 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      1 |      2 |      2 |      4 |      0 |      2 |      1 |      2 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      1 |      1 |        3 |        6 |       23 |       29 |       29 |       15 |       7 |        7 |        7 |       29 |       36 |       31 |       11 |       8 |        5 |       15 |       12 |       32 |       30 |       19 |       6 |        6 |        4 |       16 |       30 |       26 |       16 |       5 |       14 |       12 |       16 |       20 |        9 |        2 |       1 |        3 |        6 |       12 |       15 |        7 |        2 |       1 |        0 |        3 |        4 |        4 |        1 |        1 |       0 |        1 |        3 |        5 |        6 |        2 |        0 |       0 |      0 |      0 |     24 |     38 |     18 |     10 |     12 |    139 |      0 |      0 |      1 |     24 |     45 |      7 |      9 |      9 |    127 |      0 |      0 |      0 |     11 |     14 |      3 |      3 |      3 |     86 |      0 |      0 |      0 |      2 |      5 |      2 |      1 |      1 |     19 |      0 |     37 | s03      | R    |
| 1153100 |     515 |    177 |    218 |     7 |    0 |     4 |    2 |    1 |     5 |    0 |    101 |    0 |    0 |    0 |    0 |    248 |    267 |       6 |       3 |       2 |       0 |     29 |     21 |     14 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        2 |        3 |        9 |       11 |       21 |       25 |       2 |        1 |       13 |       13 |       14 |       38 |       23 |       2 |        4 |        6 |       12 |       12 |       32 |       47 |       0 |        2 |        8 |       10 |       22 |       26 |       35 |       2 |        3 |        6 |        7 |       12 |        8 |       12 |       0 |        3 |        3 |        7 |       12 |       18 |       10 |       0 |        4 |        1 |        2 |        2 |        5 |        0 |       0 |        2 |        0 |        0 |        0 |        1 |        2 |       0 |      0 |      0 |     16 |     30 |      5 |     14 |      8 |    104 |      0 |      0 |      0 |     22 |     47 |     14 |      8 |      9 |    118 |      0 |      0 |      0 |     12 |     17 |      5 |      1 |      1 |     65 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1153200 |       1 |      0 |      0 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1153300 |      31 |      4 |     18 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     17 |     14 |       0 |       2 |       0 |       0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        3 |        5 |       0 |        0 |        1 |        0 |        2 |        4 |        2 |       0 |        2 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      4 |      2 |      1 |      1 |      9 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1153500 |     133 |     28 |     81 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     61 |     72 |       0 |       1 |       0 |       0 |      4 |      9 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        5 |        3 |       0 |        2 |        1 |        3 |        7 |        3 |        2 |       0 |        2 |        0 |        3 |       13 |       12 |       11 |       0 |        0 |        1 |        7 |       15 |       10 |        7 |       0 |        0 |        1 |        1 |        2 |        6 |        0 |       0 |        2 |        0 |        1 |        7 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      8 |      5 |      0 |      0 |     13 |      0 |      0 |      0 |     14 |     14 |      6 |      8 |      2 |     37 |      0 |      0 |      0 |     10 |      0 |      3 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1153600 |      47 |      4 |     35 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     21 |     26 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |       10 |        4 |        2 |       0 |        0 |        4 |        6 |        4 |        1 |        3 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      7 |      6 |      2 |      1 |      0 |     19 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1153700 |      43 |      9 |     27 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     17 |     26 |       0 |       0 |       0 |       0 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        1 |        0 |        1 |        0 |        2 |        1 |       0 |        0 |        0 |        1 |        2 |        5 |        4 |       0 |        0 |        0 |        3 |        5 |        3 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        2 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      1 |      1 |      2 |      0 |      4 |      0 |      0 |      0 |      1 |      6 |      2 |      0 |      5 |     13 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1153900 |     855 |    242 |    402 |    13 |    0 |     7 |    1 |    2 |     1 |    0 |    187 |    0 |    0 |    0 |    0 |    416 |    439 |       3 |      14 |       2 |       1 |     39 |     20 |     15 |      1 |      0 |      2 |      6 |      0 |      0 |      4 |      0 |      0 |     14 |     15 |     28 |      2 |      5 |      4 |     13 |      0 |       0 |       2 |       0 |       0 |      1 |      3 |      0 |      0 |        4 |        3 |       28 |       53 |       14 |        5 |       0 |       12 |        7 |       36 |       58 |       17 |        5 |       0 |       12 |        4 |       57 |       87 |       32 |        7 |       1 |       14 |       11 |       74 |       73 |       22 |        8 |       0 |        9 |        4 |       23 |       44 |       14 |        6 |       0 |        9 |        8 |       25 |       37 |        6 |        2 |       0 |        2 |        0 |        2 |        4 |        1 |        0 |       0 |        1 |        1 |        5 |        7 |        1 |        0 |       0 |      0 |      1 |     31 |     73 |     23 |     11 |      1 |    102 |      0 |      0 |      1 |     85 |    106 |     33 |     24 |      3 |    150 |      0 |      0 |      2 |     27 |     33 |     10 |      9 |      1 |    105 |      0 |      0 |      0 |      2 |     12 |      0 |      2 |      0 |      8 |      0 |     37 | s03      | R    |
| 1154000 |     552 |    150 |    264 |     6 |    0 |     5 |    2 |    4 |     3 |    0 |    118 |    0 |    0 |    0 |    0 |    268 |    284 |       8 |       2 |       2 |       0 |     32 |     18 |     14 |      3 |      1 |      5 |      1 |      1 |      1 |      0 |      0 |      0 |      9 |      6 |     21 |      1 |      0 |      1 |      3 |      0 |       1 |       2 |       1 |       1 |      0 |      0 |      1 |      0 |        7 |        7 |       11 |       22 |       10 |        5 |       0 |        9 |        5 |       18 |       34 |       12 |        9 |       1 |        6 |       10 |       19 |       49 |       30 |       13 |       0 |       13 |       12 |       28 |       50 |       25 |        8 |       1 |       10 |        7 |       12 |       20 |       14 |        3 |       0 |        7 |        4 |       15 |       18 |        3 |        5 |       0 |        4 |        1 |        2 |        1 |        3 |        2 |       0 |        0 |        0 |        3 |        3 |        1 |        0 |       0 |      0 |      1 |     24 |     30 |      4 |      9 |      7 |     75 |      0 |      0 |      0 |     48 |     46 |     14 |     15 |     33 |    108 |      0 |      0 |      1 |     19 |     16 |      7 |      2 |      5 |     68 |      0 |      0 |      0 |     10 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1154100 |       2 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1154200 |      41 |      4 |     24 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     20 |     21 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        7 |        2 |       0 |        1 |        0 |        4 |        1 |        5 |        2 |       0 |        0 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        2 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      3 |      2 |      2 |      3 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |     37 | s03      | R    |
| 1154600 |     639 |    180 |    304 |     8 |    0 |     4 |    2 |    0 |     2 |    0 |    139 |    0 |    0 |    0 |    0 |    312 |    327 |       5 |      11 |       4 |       0 |     40 |     26 |     18 |      2 |      0 |      3 |      0 |      0 |      2 |      2 |      2 |      1 |      6 |     17 |     20 |      0 |      5 |      3 |      5 |      0 |       0 |       1 |       2 |       1 |      0 |      4 |      3 |      0 |        3 |        1 |       16 |       39 |       14 |        2 |       0 |        9 |        1 |       44 |       42 |        6 |        3 |       0 |       14 |        4 |       47 |       63 |       29 |        8 |       0 |        6 |        8 |       52 |       47 |       18 |        7 |       1 |        7 |        2 |       21 |       20 |       13 |        2 |       0 |       10 |        5 |       26 |       26 |        6 |        1 |       0 |        1 |        0 |        2 |        0 |        3 |        1 |       0 |        2 |        0 |        4 |        0 |        3 |        0 |       0 |      0 |      2 |     51 |     38 |      8 |      2 |      0 |     79 |      0 |      0 |      2 |     91 |     50 |     18 |      6 |      0 |    137 |      0 |      0 |      2 |     35 |      9 |      6 |      0 |      0 |     87 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1154800 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1155000 |     610 |    187 |    239 |    18 |    0 |     3 |    4 |    1 |     2 |    0 |    156 |    0 |    0 |    0 |    0 |    289 |    321 |      14 |      15 |       9 |       2 |     10 |     11 |     16 |      1 |      3 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      5 |      9 |      8 |      0 |      4 |      0 |      1 |      1 |       4 |       1 |       1 |       1 |      6 |      3 |      6 |      0 |       10 |       22 |       12 |       19 |       10 |        8 |       0 |        3 |       31 |       22 |       26 |       13 |       11 |       0 |        9 |       47 |       30 |       24 |        9 |        6 |       0 |       10 |       32 |       22 |       19 |       17 |       14 |       0 |        5 |       32 |       15 |       10 |        3 |        2 |       1 |       12 |       36 |       20 |       11 |        5 |        4 |       0 |        1 |        4 |        7 |        0 |        1 |        2 |       0 |        3 |        1 |        5 |        3 |        0 |        1 |       0 |      0 |      0 |     32 |     25 |      2 |      0 |      0 |    128 |      0 |      0 |      1 |     28 |     41 |      2 |      0 |      0 |    167 |      0 |      0 |      1 |     21 |     11 |      0 |      0 |      0 |    123 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 1155100 |     571 |    166 |    238 |     8 |    0 |     6 |    5 |    0 |     2 |    0 |    146 |    0 |    0 |    0 |    0 |    276 |    295 |       4 |       7 |       3 |       1 |     33 |     17 |     21 |      2 |      1 |      2 |      3 |      0 |      2 |      1 |      0 |      0 |      6 |      6 |     18 |      2 |      6 |      1 |      5 |      1 |       0 |       5 |       1 |       0 |      0 |      1 |      1 |      0 |        2 |        6 |       23 |       32 |        6 |        2 |       0 |        6 |        5 |       45 |       33 |        2 |        3 |       1 |        6 |        3 |       61 |       36 |       13 |        5 |       1 |        1 |        9 |       52 |       40 |        4 |        7 |       0 |        4 |        2 |       24 |       25 |        8 |        4 |       0 |       16 |        6 |       29 |       22 |        4 |        2 |       0 |        0 |        2 |        8 |        3 |        0 |        0 |       0 |        1 |        1 |        5 |        1 |        0 |        0 |       0 |      0 |      1 |     45 |     11 |      0 |      0 |      0 |    109 |      0 |      0 |      3 |     63 |     12 |      0 |      0 |      0 |    160 |      0 |      0 |      1 |     36 |      4 |      0 |      0 |      1 |    104 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1155200 |     278 |     82 |    120 |     4 |    0 |     1 |    5 |    1 |     3 |    0 |     62 |    0 |    0 |    0 |    0 |    133 |    145 |       4 |       4 |       1 |       0 |      3 |      8 |      3 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        2 |        9 |       13 |        7 |        5 |        2 |       0 |        1 |       15 |       15 |        7 |        2 |        4 |       0 |        2 |       10 |       24 |       12 |        5 |        4 |       0 |        3 |       13 |       20 |       16 |        7 |        3 |       1 |        0 |        9 |       11 |        5 |        1 |        3 |       0 |        2 |       10 |       10 |        4 |        6 |        1 |       0 |        2 |        3 |        3 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        1 |        0 |       0 |      0 |      2 |      5 |      6 |      1 |      1 |      0 |     67 |      0 |      0 |      2 |     12 |      8 |      8 |      2 |      0 |     88 |      0 |      0 |      0 |     10 |      1 |      1 |      0 |      0 |     50 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1155300 |      34 |     16 |      6 |     2 |    0 |     0 |    1 |    0 |     2 |    0 |      7 |    0 |    0 |    0 |    0 |     15 |     19 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        2 |        1 |        1 |       0 |        1 |        1 |        1 |        2 |        4 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       1 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1200000 |     905 |    356 |    175 |    15 |    0 |     4 |    8 |    2 |    41 |    0 |    304 |    0 |    0 |    0 |    0 |    464 |    441 |      47 |      14 |      28 |       6 |     32 |     12 |      5 |      7 |      9 |      3 |      3 |      0 |      2 |      0 |      2 |      0 |     14 |     11 |     15 |      0 |      5 |      4 |      7 |      1 |       5 |       2 |       4 |       2 |      4 |      0 |      4 |      0 |       15 |      121 |       28 |        2 |        1 |        1 |       0 |       20 |      130 |       26 |       12 |        0 |        0 |       0 |        8 |       70 |       11 |        2 |        0 |        1 |       0 |       16 |       57 |        8 |        2 |        0 |        0 |       0 |       18 |      122 |       19 |        0 |        1 |        1 |       0 |       27 |      101 |       14 |        1 |        0 |        0 |       0 |        6 |       31 |        3 |        1 |        2 |        0 |       0 |        1 |       26 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |     41 |     30 |      2 |      0 |      0 |    281 |      0 |      0 |      0 |     21 |     13 |      1 |      0 |      0 |    140 |      0 |      0 |      0 |     36 |     15 |      0 |      0 |      0 |    253 |      0 |      0 |      1 |      5 |      3 |      0 |      0 |      0 |     61 |      0 |     37 | s03      | R    |
| 1200100 |      12 |      1 |      7 |     0 |    0 |     0 |    3 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      7 |      5 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1200200 |     408 |    172 |    100 |    11 |    0 |     4 |    3 |    2 |     8 |    0 |    108 |    0 |    0 |    0 |    0 |    180 |    228 |      19 |       7 |       8 |       1 |     13 |      2 |      5 |      1 |      5 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      8 |      5 |     10 |      0 |      1 |      1 |      2 |      0 |       1 |       1 |       5 |       0 |      1 |      2 |      2 |      0 |       22 |       18 |        7 |        4 |        6 |       10 |       1 |       29 |       18 |       13 |       17 |       13 |       12 |       2 |       10 |       14 |        7 |       10 |        3 |        7 |       1 |        8 |        7 |        7 |        6 |        7 |        9 |       4 |        8 |       20 |        9 |        2 |        3 |        3 |       0 |       20 |       17 |        8 |        7 |        3 |        8 |       0 |        5 |        4 |        3 |        2 |        1 |        0 |       0 |        3 |        1 |        3 |        3 |        0 |        3 |       0 |      0 |      0 |     13 |     12 |      5 |      2 |      5 |    135 |      0 |      0 |      2 |      9 |     10 |      4 |      4 |      4 |     67 |      0 |      0 |      0 |      7 |      3 |      3 |      1 |      3 |     91 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      1 |     18 |      0 |     37 | s03      | R    |
| 1200300 |     960 |    378 |    297 |    12 |    0 |     4 |    9 |    1 |    18 |    0 |    241 |    0 |    0 |    0 |    0 |    455 |    505 |      22 |      11 |      16 |       1 |     35 |     17 |     13 |      3 |      4 |      1 |      1 |      0 |      5 |      3 |      2 |      0 |     11 |      8 |     14 |      1 |      2 |      1 |      5 |      1 |       2 |       1 |       3 |       0 |      3 |      1 |      1 |      0 |       25 |       39 |       25 |       30 |       14 |       24 |       1 |       28 |       75 |       25 |       37 |       34 |       21 |       0 |       16 |       44 |       32 |       17 |       17 |       23 |       0 |       22 |       28 |       26 |       26 |       19 |       27 |       0 |       34 |       41 |       25 |       13 |        8 |        5 |       0 |       35 |       33 |       16 |       15 |       10 |        6 |       0 |        3 |       10 |        6 |        1 |        1 |        1 |       0 |        6 |        8 |        3 |        4 |        1 |        0 |       0 |      0 |      3 |     38 |     33 |      6 |      2 |      3 |    293 |      0 |      0 |      1 |     33 |     55 |      6 |      2 |      5 |    195 |      0 |      0 |      0 |     19 |     18 |      4 |      0 |      0 |    200 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 1200400 |     487 |    188 |     74 |    12 |    0 |     2 |    4 |    0 |    14 |    0 |    193 |    0 |    0 |    0 |    0 |    174 |    313 |      22 |       3 |      14 |       5 |      4 |      3 |      8 |      0 |      6 |      1 |     12 |      0 |      0 |      1 |      3 |      0 |     10 |      5 |     28 |      4 |     10 |      3 |      6 |      2 |      11 |       4 |       9 |       0 |      3 |      3 |      0 |      0 |       55 |        0 |        1 |        1 |        0 |        0 |       0 |      128 |        1 |        0 |        2 |        0 |        0 |       0 |       35 |        0 |        0 |        0 |        0 |        0 |       0 |       39 |        0 |        0 |        0 |        0 |        0 |       0 |       70 |        0 |        0 |        0 |        0 |        0 |       0 |      122 |        1 |        0 |        0 |        0 |        0 |       0 |       12 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |    184 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     73 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |    192 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 1200500 |     227 |    106 |     33 |     5 |    0 |     0 |    5 |    1 |     9 |    0 |     68 |    0 |    0 |    0 |    0 |     93 |    134 |      10 |       3 |       5 |       2 |      6 |      1 |      6 |      1 |      1 |      1 |      1 |      0 |      2 |      1 |      1 |      0 |     10 |      1 |     10 |      1 |      8 |      0 |      0 |      0 |       4 |       3 |       5 |       1 |      6 |      1 |      1 |      0 |       36 |        0 |        1 |        1 |        0 |        0 |       0 |       67 |        1 |        0 |        0 |        0 |        0 |       0 |       12 |        0 |        0 |        0 |        0 |        0 |       0 |       21 |        0 |        0 |        0 |        0 |        0 |       0 |       32 |        0 |        0 |        0 |        0 |        0 |       0 |       36 |        0 |        0 |        0 |        0 |        0 |       0 |       10 |        1 |        0 |        0 |        0 |        0 |       0 |        9 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |    104 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     68 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1200600 |     235 |    104 |     31 |     4 |    0 |     1 |    0 |    1 |     6 |    0 |     88 |    0 |    0 |    0 |    0 |    110 |    125 |      17 |       2 |       9 |       1 |      3 |      2 |      4 |      0 |      4 |      3 |      4 |      1 |      2 |      0 |      3 |      0 |     10 |      2 |     12 |      0 |      5 |      0 |      2 |      0 |       1 |       0 |       4 |       0 |      2 |      0 |      0 |      0 |       43 |        0 |        2 |        1 |        0 |        1 |       0 |       55 |        1 |        0 |        0 |        0 |        1 |       0 |       11 |        0 |        0 |        0 |        0 |        0 |       0 |       20 |        0 |        0 |        0 |        0 |        0 |       0 |       47 |        0 |        1 |        0 |        0 |        0 |       0 |       39 |        1 |        0 |        0 |        0 |        0 |       0 |        4 |        0 |        0 |        0 |        0 |        0 |       0 |        8 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |    101 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     88 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1200700 |     232 |     88 |     38 |     5 |    0 |     0 |    2 |    1 |     4 |    0 |     94 |    0 |    0 |    0 |    0 |     86 |    146 |      15 |       3 |       5 |       1 |      4 |      1 |      5 |      1 |      2 |      2 |      6 |      0 |      3 |      1 |      2 |      0 |     13 |      7 |     17 |      1 |      0 |      1 |      3 |      0 |       5 |       1 |       5 |       0 |      0 |      1 |      1 |      0 |       31 |        4 |        1 |        0 |        0 |        0 |       0 |       48 |        3 |        1 |        0 |        0 |        0 |       0 |       16 |        1 |        0 |        0 |        0 |        0 |       0 |       21 |        0 |        0 |        0 |        0 |        0 |       0 |       25 |        4 |        0 |        0 |        0 |        0 |       0 |       63 |        2 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |        8 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     85 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     38 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     94 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1200800 |     518 |    158 |    215 |     8 |    0 |     1 |    1 |    1 |     6 |    0 |    128 |    0 |    0 |    0 |    0 |    208 |    310 |       9 |       8 |       3 |       1 |     28 |     13 |     13 |      1 |      2 |      3 |      3 |      0 |      1 |      1 |      1 |      0 |      2 |      3 |      6 |      0 |      2 |      2 |      3 |      0 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        7 |       18 |        5 |        6 |        2 |       23 |       0 |       19 |       20 |        5 |       10 |        1 |       42 |       0 |        4 |       27 |       19 |        8 |        4 |       29 |       0 |       14 |       29 |        8 |        4 |        7 |       61 |       1 |        4 |       20 |        7 |        2 |        4 |       11 |       0 |       18 |       30 |        7 |        2 |        2 |       20 |       1 |        1 |        4 |        0 |        0 |        0 |        3 |       0 |        4 |        3 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |     11 |     27 |      2 |      2 |      0 |    115 |      0 |      0 |      0 |     19 |     32 |     10 |      5 |      0 |    149 |      0 |      0 |      0 |     11 |     10 |      1 |      0 |      0 |    106 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1200900 |     460 |    163 |    142 |    14 |    0 |     4 |    6 |    1 |    12 |    0 |    118 |    0 |    0 |    0 |    0 |    228 |    232 |      10 |       9 |       1 |       2 |     20 |      6 |     11 |      3 |      1 |      2 |      5 |      0 |      0 |      2 |      0 |      0 |     16 |      5 |     10 |      2 |      0 |      1 |      3 |      0 |       2 |       1 |       1 |       0 |      4 |      1 |      1 |      0 |       20 |       21 |       11 |        5 |        6 |        4 |       0 |       27 |       24 |       14 |       13 |       10 |        8 |       0 |       15 |       27 |        8 |        6 |        7 |        6 |       4 |       13 |       17 |       10 |        5 |        9 |       11 |       4 |       22 |       18 |       14 |        4 |        4 |        2 |       0 |       13 |       24 |        7 |        4 |        1 |        5 |       0 |        4 |       11 |        2 |        3 |        2 |        1 |       1 |        4 |        6 |        0 |        1 |        1 |        1 |       0 |      0 |      1 |     23 |     14 |      2 |      5 |      1 |    117 |      0 |      0 |      0 |     15 |     13 |      0 |      1 |      3 |    110 |      0 |      0 |      2 |      9 |      6 |      3 |      0 |      2 |     96 |      0 |      0 |      0 |     10 |      3 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 1201000 |       1 |      0 |      0 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1201100 |     779 |    300 |    184 |    10 |    0 |     3 |    7 |    1 |    11 |    0 |    263 |    0 |    0 |    0 |    0 |    360 |    419 |      29 |      10 |      14 |       2 |     37 |     10 |     12 |      0 |      8 |      6 |      5 |      0 |      5 |      1 |      6 |      0 |     20 |      7 |     23 |      2 |      5 |      1 |      2 |      1 |       8 |       3 |       5 |       3 |      3 |      1 |      4 |      0 |       25 |       38 |       19 |       11 |        3 |       15 |       0 |       50 |       68 |       27 |       18 |        6 |       20 |       0 |       20 |       34 |       18 |       10 |        8 |        6 |       0 |       30 |       23 |       17 |        6 |        5 |        7 |       0 |       39 |       64 |       22 |        6 |        2 |        6 |       0 |       42 |       46 |       15 |       10 |        4 |        7 |       0 |        4 |        3 |        5 |        0 |        1 |        1 |       0 |        9 |        5 |        2 |        0 |        2 |        0 |       0 |      0 |      3 |     22 |     25 |     10 |      3 |      0 |    237 |      0 |      0 |      2 |     14 |     11 |      7 |      3 |      0 |    147 |      0 |      0 |      4 |     20 |      8 |      4 |      0 |      0 |    227 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 1201200 |     206 |     60 |     95 |     4 |    0 |     1 |    1 |    0 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    104 |    102 |       2 |       0 |       0 |       1 |     19 |      8 |      4 |      0 |      0 |      0 |      2 |      1 |      3 |      1 |      0 |      0 |      0 |      2 |      5 |      1 |      2 |      2 |      1 |      1 |       0 |       0 |       0 |       1 |      0 |      2 |      1 |      0 |        3 |        3 |        2 |        4 |        7 |       11 |       0 |        0 |        1 |        1 |        8 |        8 |       12 |       0 |        1 |        4 |        3 |        9 |       18 |       17 |       1 |        2 |        0 |        7 |        8 |        9 |       16 |       0 |        0 |        1 |        2 |        3 |        6 |        6 |       0 |        1 |        0 |        5 |        7 |        9 |        5 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |      7 |     12 |      2 |      3 |      8 |     27 |      0 |      0 |      0 |     10 |     18 |      3 |      8 |      9 |     47 |      0 |      0 |      0 |      4 |     12 |      1 |      2 |      6 |     20 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 1201300 |     302 |    107 |     65 |    10 |    0 |     0 |    4 |    3 |    11 |    0 |    102 |    0 |    0 |    0 |    0 |    156 |    146 |       8 |       0 |       3 |       0 |      8 |      2 |      3 |      1 |      2 |      2 |      6 |      1 |      0 |      0 |      1 |      0 |     11 |      1 |     11 |      1 |      2 |      0 |      3 |      2 |       2 |       1 |       3 |       0 |      1 |      1 |      2 |      0 |       15 |       17 |        7 |        4 |        2 |        2 |       0 |       23 |       25 |        5 |        2 |        2 |        2 |       1 |       12 |       11 |        9 |        3 |        1 |        3 |       0 |       11 |        7 |        2 |        3 |        0 |        3 |       0 |       15 |       24 |        6 |        4 |        0 |        0 |       0 |       26 |       18 |        6 |        0 |        0 |        2 |       1 |       11 |        8 |        1 |        1 |        0 |        0 |       0 |        3 |        4 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      7 |      2 |      3 |      3 |      0 |     90 |      0 |      0 |      0 |      7 |      4 |      0 |      0 |      1 |     53 |      0 |      0 |      2 |      7 |      5 |      1 |      0 |      0 |     87 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 1201400 |     576 |    215 |    169 |    15 |    0 |     1 |    9 |    3 |     4 |    0 |    160 |    0 |    0 |    0 |    0 |    262 |    314 |      18 |       4 |       5 |       1 |     22 |     16 |     11 |      2 |      1 |      2 |      3 |      0 |      1 |      3 |      1 |      0 |     11 |      6 |     19 |      0 |      3 |      0 |      6 |      0 |       1 |       3 |       5 |       0 |      1 |      1 |      2 |      0 |       24 |       33 |       15 |        6 |        5 |        5 |       0 |       41 |       48 |       12 |       11 |        7 |        8 |       0 |       14 |       40 |       13 |        8 |        4 |        6 |       0 |       18 |       34 |       14 |        7 |        5 |        6 |       0 |       20 |       31 |       13 |        4 |        1 |        4 |       0 |       30 |       38 |       10 |        2 |        4 |        3 |       0 |        1 |       11 |        3 |        0 |        1 |        0 |       0 |        6 |        4 |        1 |        1 |        1 |        3 |       0 |      0 |      2 |     12 |      8 |      3 |      2 |      1 |    187 |      0 |      0 |      0 |      7 |     10 |      2 |      0 |      0 |    150 |      0 |      0 |      0 |      5 |      2 |      2 |      0 |      1 |    150 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 1201500 |     594 |    244 |    180 |    14 |    0 |     3 |    5 |    0 |     7 |    0 |    141 |    0 |    0 |    0 |    0 |    270 |    324 |      15 |       5 |       2 |       3 |     36 |     16 |      9 |      3 |      2 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      7 |      4 |     10 |      1 |      3 |      0 |      1 |      0 |       1 |       1 |       2 |       0 |      2 |      4 |      3 |      0 |        8 |       18 |       13 |       22 |        9 |       22 |       0 |       23 |       24 |       20 |       21 |       28 |       36 |       0 |       13 |       20 |       18 |       17 |       14 |       15 |       0 |        6 |       16 |       19 |       14 |        9 |       18 |       1 |       12 |       21 |       11 |       11 |        9 |        3 |       0 |       14 |       22 |        7 |       13 |       12 |        6 |       0 |        2 |        3 |        4 |        4 |        1 |        0 |       0 |        6 |        1 |        0 |        3 |        2 |        3 |       0 |      0 |      2 |     36 |     24 |     13 |      8 |      7 |    154 |      0 |      0 |      1 |     15 |     27 |      7 |      7 |     10 |    113 |      0 |      0 |      1 |     17 |     18 |      4 |      3 |      3 |     95 |      0 |      0 |      0 |      4 |      5 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1201600 |     705 |    257 |    225 |    19 |    0 |     3 |    4 |    0 |    12 |    0 |    185 |    0 |    0 |    0 |    0 |    329 |    376 |      19 |      10 |       7 |       2 |     30 |      8 |     20 |      2 |      0 |      2 |      1 |      0 |      6 |      0 |      1 |      0 |     10 |      4 |     12 |      1 |      0 |      4 |      1 |      0 |       0 |       0 |       1 |       0 |      6 |      4 |      0 |      1 |       13 |       24 |       18 |       14 |       14 |       13 |       3 |       18 |       35 |       18 |       32 |       32 |       18 |       5 |       12 |       26 |       25 |       16 |       22 |       12 |       1 |        4 |       20 |       17 |       28 |       16 |       26 |       0 |       13 |       30 |       25 |       16 |        8 |        8 |       2 |       11 |       29 |       15 |       13 |        6 |        9 |       0 |        2 |        4 |        2 |        2 |        3 |        1 |       0 |        8 |        3 |        2 |        7 |        2 |        2 |       0 |      0 |      1 |     25 |     27 |      8 |      8 |      9 |    179 |      0 |      0 |      3 |     29 |     25 |      6 |      6 |      8 |    148 |      0 |      0 |      1 |     16 |     11 |      8 |      8 |      2 |    139 |      0 |      0 |      0 |      6 |      4 |      2 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 1201700 |    1247 |    403 |    468 |    23 |    0 |     8 |    7 |    1 |    14 |    0 |    323 |    0 |    0 |    0 |    0 |    584 |    663 |      12 |      14 |      22 |       2 |     69 |     30 |     35 |      5 |      1 |      3 |      6 |      0 |      3 |      1 |      2 |      1 |     19 |      6 |     23 |      2 |      8 |      4 |      3 |      0 |       7 |       2 |       1 |       1 |      4 |      4 |      6 |      1 |       44 |       56 |       26 |        8 |        6 |       37 |       0 |       49 |       53 |       11 |       17 |        8 |       88 |       0 |       42 |       65 |       32 |       19 |        7 |       68 |       0 |       48 |       49 |       18 |       12 |       10 |       97 |       1 |       46 |       55 |       11 |        6 |        3 |       21 |       1 |       69 |       54 |       12 |        9 |        4 |       32 |       0 |       12 |       12 |        4 |        0 |        1 |        2 |       0 |        4 |        7 |        4 |        0 |        0 |        7 |       0 |      0 |      4 |     14 |      7 |      0 |      0 |      0 |    378 |      0 |      0 |      3 |     37 |     24 |      3 |      0 |      1 |    400 |      0 |      0 |      4 |     10 |      4 |      0 |      0 |      0 |    305 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     49 |      0 |     37 | s03      | R    |
| 1201800 |     191 |     76 |     63 |     4 |    0 |     1 |    1 |    2 |     3 |    0 |     41 |    0 |    0 |    0 |    0 |     87 |    104 |       3 |       1 |       2 |       1 |      9 |      0 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      5 |      3 |      2 |      0 |      2 |      0 |      0 |      2 |       0 |       2 |       0 |       1 |      2 |      0 |      0 |      0 |        3 |        5 |        6 |        3 |        4 |        9 |       0 |        8 |       10 |        4 |       10 |        7 |        7 |       0 |        3 |        8 |        6 |        4 |        5 |        5 |       0 |        4 |        6 |        2 |        7 |        6 |        7 |       0 |        3 |        6 |        5 |        1 |        2 |        3 |       0 |        5 |        7 |        1 |        3 |        4 |        1 |       0 |        1 |        3 |        1 |        0 |        1 |        0 |       0 |        0 |        3 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      8 |      9 |      2 |      1 |      1 |     55 |      0 |      0 |      0 |     10 |      5 |      0 |      5 |      3 |     40 |      0 |      0 |      0 |      5 |      2 |      3 |      0 |      0 |     31 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1201900 |     313 |    129 |     97 |     3 |    0 |     0 |    3 |    1 |     8 |    0 |     72 |    0 |    0 |    0 |    0 |    151 |    162 |       7 |       4 |       2 |       0 |      8 |      4 |     10 |      2 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      5 |      1 |      2 |      1 |      0 |      1 |       1 |       0 |       0 |       0 |      2 |      2 |      2 |      0 |        8 |        9 |       10 |        8 |       10 |       10 |       0 |       10 |       10 |        9 |       12 |       18 |       15 |       0 |        7 |        4 |        5 |        6 |        9 |       13 |       0 |        2 |        7 |        8 |       10 |        8 |       18 |       0 |        8 |       10 |        9 |        6 |        5 |        3 |       0 |       11 |        7 |        4 |        3 |        0 |        6 |       0 |        4 |        1 |        1 |        2 |        2 |        1 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     20 |     25 |      4 |      3 |      4 |     73 |      0 |      0 |      1 |      7 |     13 |      7 |      1 |      6 |     62 |      0 |      0 |      0 |      7 |      7 |      5 |      0 |      3 |     50 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1202000 |     240 |    102 |     56 |     6 |    0 |     1 |    5 |    0 |     4 |    0 |     66 |    0 |    0 |    0 |    0 |    109 |    131 |       7 |       3 |       6 |       1 |      7 |      0 |      7 |      1 |      0 |      1 |      3 |      1 |      0 |      1 |      1 |      0 |      7 |      0 |      3 |      1 |      1 |      1 |      1 |      0 |       1 |       0 |       2 |       0 |      0 |      1 |      0 |      0 |        7 |       13 |        4 |        8 |        7 |        3 |       0 |        9 |       16 |        8 |       11 |       10 |        6 |       0 |        4 |       11 |        3 |        2 |        2 |        5 |       0 |        3 |        7 |        4 |        8 |        4 |        3 |       0 |        8 |       10 |        6 |        2 |        2 |        2 |       0 |       16 |       11 |        4 |        2 |        2 |        1 |       0 |        3 |        4 |        1 |        1 |        1 |        0 |       0 |        2 |        0 |        0 |        0 |        3 |        1 |       0 |      0 |      0 |      8 |      7 |      6 |      1 |      3 |     77 |      0 |      0 |      0 |      9 |      4 |      0 |      3 |      0 |     40 |      0 |      0 |      1 |      4 |      4 |      0 |      0 |      0 |     57 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1202100 |     358 |    143 |     87 |    11 |    0 |     6 |    1 |    0 |     3 |    0 |    107 |    0 |    0 |    0 |    0 |    171 |    187 |      17 |       8 |       9 |       3 |     12 |      5 |      7 |      1 |      2 |      0 |      2 |      1 |      4 |      0 |      0 |      0 |      3 |      4 |      5 |      0 |      1 |      0 |      2 |      0 |       5 |       2 |       4 |       1 |      0 |      1 |      4 |      1 |       13 |       17 |       11 |       10 |        2 |        8 |       0 |       14 |       22 |       10 |        9 |        5 |       22 |       0 |        4 |       15 |        5 |        7 |        1 |        6 |       0 |        9 |       15 |        2 |        6 |        1 |       15 |       1 |       14 |       26 |        6 |        4 |        4 |        3 |       0 |       22 |       14 |        8 |        4 |        1 |        1 |       0 |        7 |        7 |        1 |        0 |        0 |        0 |       0 |        2 |        3 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |     20 |      8 |      3 |      1 |      0 |    111 |      0 |      0 |      0 |     12 |      4 |      0 |      1 |      3 |     67 |      0 |      0 |      0 |      7 |      3 |      1 |      1 |      0 |     95 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 1202200 |     808 |    288 |    193 |    14 |    0 |     4 |   13 |    1 |    17 |    0 |    278 |    0 |    0 |    0 |    0 |    386 |    422 |      23 |      15 |      12 |       5 |     26 |     10 |      8 |      3 |      4 |      2 |      6 |      1 |      4 |      0 |      4 |      0 |     21 |      8 |     29 |      0 |      1 |      2 |     10 |      1 |       6 |       2 |       2 |       1 |      3 |      0 |      6 |      0 |       27 |       43 |       20 |       13 |        6 |        6 |       0 |       56 |       69 |       15 |       13 |        7 |       12 |       1 |       20 |       51 |       14 |        6 |        4 |        6 |       0 |       27 |       32 |       11 |        5 |       13 |        4 |       0 |       48 |       58 |       15 |        6 |        8 |        3 |       0 |       62 |       42 |       18 |        8 |        4 |        6 |       0 |        9 |        9 |        3 |        8 |        0 |        3 |       0 |       10 |        3 |        1 |        2 |        1 |        0 |       0 |      0 |      2 |     25 |     13 |      4 |      4 |      1 |    239 |      0 |      0 |      2 |     20 |      5 |      1 |      2 |      1 |    162 |      0 |      0 |      2 |     11 |      4 |      2 |      1 |      2 |    256 |      0 |      0 |      1 |      4 |      2 |      0 |      1 |      0 |     41 |      0 |     37 | s03      | R    |
| 1202300 |     273 |     89 |     76 |     5 |    0 |     1 |    2 |    0 |     5 |    0 |     95 |    0 |    0 |    0 |    0 |    131 |    142 |      10 |       5 |       9 |       1 |      2 |      3 |      7 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      6 |      1 |      9 |      0 |      1 |      0 |      2 |      0 |       2 |       2 |       6 |       0 |      0 |      1 |      2 |      0 |       10 |       10 |        5 |        9 |        4 |        2 |       0 |        8 |       15 |        9 |        3 |        6 |        7 |       1 |       13 |       11 |        2 |        2 |        4 |        5 |       1 |        6 |       10 |        8 |        5 |        3 |        5 |       1 |       20 |       18 |        8 |        1 |        1 |        1 |       0 |       19 |       16 |        5 |        3 |        2 |        1 |       0 |        2 |        1 |        0 |        1 |        0 |        0 |       0 |        3 |        1 |        2 |        1 |        2 |        0 |       0 |      0 |      1 |      9 |      7 |      1 |      0 |      1 |     70 |      0 |      0 |      0 |      1 |      7 |      2 |      0 |      4 |     62 |      0 |      0 |      1 |      9 |      3 |      1 |      0 |      0 |     81 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1202400 |     771 |    286 |    268 |    17 |    0 |     5 |    6 |    3 |     4 |    0 |    182 |    0 |    0 |    0 |    0 |    338 |    433 |      15 |      11 |      11 |       2 |     39 |     14 |     20 |      4 |      2 |      3 |      3 |      0 |      2 |      2 |      1 |      0 |      8 |     13 |      9 |      0 |      2 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      4 |      1 |      2 |      0 |       14 |       22 |       22 |       18 |       20 |       25 |       2 |       18 |       23 |       24 |       32 |       26 |       39 |       1 |       14 |       20 |       15 |       21 |       16 |       28 |       2 |       10 |       21 |       17 |       27 |       21 |       52 |       4 |       14 |       19 |       14 |       15 |       12 |        7 |       0 |       15 |       19 |       15 |       21 |       11 |       20 |       0 |        3 |        5 |        4 |        3 |        2 |        1 |       0 |        2 |        2 |        2 |        4 |        2 |        5 |       0 |      0 |      1 |     37 |     48 |     18 |      6 |     12 |    164 |      0 |      0 |      0 |     25 |     27 |      7 |     11 |     13 |    185 |      0 |      0 |      2 |     20 |     13 |     11 |      5 |      5 |    126 |      0 |      0 |      0 |      4 |      5 |      3 |      0 |      1 |     22 |      0 |     37 | s03      | R    |
| 1202500 |     336 |    140 |     83 |     6 |    0 |     1 |    2 |    1 |     7 |    0 |     96 |    0 |    0 |    0 |    0 |    135 |    201 |       6 |       5 |       8 |       0 |     13 |      5 |      3 |      0 |      4 |      1 |      1 |      1 |      1 |      0 |      3 |      0 |     10 |      3 |     10 |      1 |      1 |      1 |      4 |      0 |       2 |       0 |       2 |       1 |      3 |      1 |      6 |      0 |       13 |       13 |        6 |        3 |        2 |        5 |       0 |       33 |       24 |        7 |       14 |        8 |       11 |       1 |        8 |       12 |        7 |        6 |        4 |        6 |       0 |        6 |        9 |        5 |        5 |        7 |        8 |       0 |       17 |        8 |        9 |        3 |        1 |        3 |       1 |       20 |       17 |        6 |        4 |        6 |        1 |       0 |        4 |        4 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        2 |        3 |        1 |        0 |       0 |      0 |      1 |     10 |     15 |      4 |      2 |      1 |    107 |      0 |      0 |      0 |      9 |     15 |      4 |      2 |      3 |     50 |      0 |      0 |      2 |      7 |     10 |      1 |      1 |      0 |     75 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 1202600 |     272 |     81 |     97 |     7 |    0 |     2 |    2 |    1 |     3 |    0 |     79 |    0 |    0 |    0 |    0 |    130 |    142 |       5 |      10 |       4 |       3 |      8 |      5 |      5 |      2 |      1 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      7 |      3 |      8 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       3 |       0 |      2 |      1 |      2 |      0 |        7 |        9 |        6 |        6 |        1 |        3 |       0 |       13 |       17 |        5 |        4 |        2 |        8 |       0 |        8 |       23 |        9 |        5 |        3 |        2 |       0 |       11 |       21 |        5 |        5 |        2 |        3 |       0 |        9 |       24 |        4 |        0 |        2 |        1 |       0 |       11 |       16 |        6 |        2 |        3 |        1 |       0 |        0 |        4 |        2 |        1 |        0 |        1 |       0 |        4 |        3 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      8 |      2 |      3 |      0 |     66 |      0 |      0 |      1 |     11 |      4 |      1 |      0 |      2 |     78 |      0 |      0 |      0 |      7 |      2 |      1 |      0 |      0 |     69 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1202700 |     339 |    123 |    100 |    10 |    0 |     0 |    3 |    0 |     6 |    0 |     97 |    0 |    0 |    0 |    0 |    163 |    176 |      10 |       8 |       2 |       0 |      8 |      4 |      9 |      0 |      1 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      5 |      0 |      1 |      1 |      2 |      0 |       1 |       1 |       0 |       2 |      3 |      0 |      1 |      0 |        8 |       25 |        7 |        4 |        3 |        4 |       0 |       15 |       27 |        9 |       13 |        6 |        2 |       0 |       11 |       21 |       10 |        7 |        2 |        6 |       0 |       10 |       14 |        5 |        7 |        3 |        4 |       0 |        9 |       19 |       10 |        2 |        0 |        3 |       0 |       13 |       31 |        5 |        1 |        1 |        3 |       0 |        2 |        6 |        3 |        0 |        1 |        0 |       0 |        3 |        2 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      7 |      6 |      0 |      3 |      1 |    106 |      0 |      0 |      2 |     11 |      6 |      1 |      0 |      0 |     80 |      0 |      0 |      0 |      8 |      5 |      0 |      0 |      0 |     84 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1202800 |     242 |     98 |     76 |     4 |    0 |     2 |    4 |    0 |     3 |    0 |     55 |    0 |    0 |    0 |    0 |    100 |    142 |      13 |       7 |       2 |       1 |      9 |      3 |      1 |      0 |      2 |      0 |      2 |      0 |      3 |      0 |      3 |      0 |      5 |      3 |      3 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |       12 |        9 |        4 |        0 |        3 |       0 |       16 |       20 |        9 |       11 |        2 |        6 |       2 |        5 |       13 |        5 |        4 |        5 |        1 |       0 |        2 |       10 |        9 |        7 |        6 |        9 |       0 |        6 |       12 |        7 |        2 |        0 |        0 |       0 |        2 |       14 |        8 |        2 |        2 |        0 |       0 |        1 |        3 |        2 |        1 |        0 |        1 |       0 |        1 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      7 |     12 |      1 |      2 |      1 |     74 |      0 |      0 |      0 |      7 |     13 |      6 |      1 |      1 |     48 |      0 |      0 |      1 |      4 |      3 |      1 |      0 |      0 |     46 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 1202900 |     224 |     74 |    107 |     1 |    0 |     2 |    1 |    1 |     1 |    0 |     37 |    0 |    0 |    0 |    0 |     98 |    126 |       9 |       6 |       4 |       0 |      6 |      4 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      0 |        3 |        2 |        8 |        6 |        5 |        4 |       0 |        2 |        7 |       12 |       12 |        5 |        8 |       0 |        3 |        5 |       11 |        9 |       10 |        9 |       0 |        3 |        9 |        9 |       16 |       13 |       10 |       0 |        1 |        4 |        4 |        3 |        3 |        3 |       0 |        2 |        6 |        4 |        3 |        2 |        2 |       0 |        1 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      2 |     15 |      9 |      3 |      3 |      2 |     40 |      0 |      0 |      1 |     15 |     16 |      5 |      1 |     11 |     58 |      0 |      0 |      0 |      5 |      7 |      0 |      1 |      0 |     24 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1203000 |     535 |    206 |    148 |    10 |    0 |     2 |   11 |    0 |     8 |    0 |    150 |    0 |    0 |    0 |    0 |    275 |    260 |      10 |       6 |       4 |       1 |     12 |     10 |     11 |      1 |      6 |      2 |      5 |      0 |      1 |      1 |      1 |      0 |      3 |      4 |     10 |      1 |      7 |      0 |      2 |      1 |       2 |       1 |       5 |       0 |      3 |      1 |      3 |      0 |       26 |       27 |       14 |       11 |        8 |       11 |       0 |       26 |       25 |       14 |       15 |       10 |       18 |       1 |        9 |       27 |       20 |       12 |       10 |        7 |       0 |       10 |       17 |       13 |        5 |       10 |        8 |       0 |       25 |       19 |       14 |        4 |        2 |        6 |       0 |       31 |       21 |       13 |        5 |        6 |        4 |       0 |       12 |        7 |        1 |        1 |        1 |        1 |       0 |        6 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |     18 |     15 |      3 |      4 |      6 |    159 |      0 |      0 |      0 |     10 |     18 |      5 |      9 |      3 |    103 |      0 |      0 |      2 |      8 |      4 |      8 |      1 |      1 |    126 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 1203100 |     626 |    189 |    234 |    20 |    0 |     7 |    8 |    1 |     4 |    0 |    163 |    0 |    0 |    0 |    0 |    298 |    328 |      14 |      15 |       7 |       3 |     19 |     14 |     15 |      3 |      4 |      2 |      1 |      0 |      1 |      1 |      4 |      0 |     11 |      7 |      9 |      0 |      2 |      1 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |       15 |       22 |       16 |       11 |        8 |       11 |       0 |       18 |       31 |       17 |       17 |       12 |       11 |       0 |       10 |       33 |       23 |       19 |       10 |       22 |       0 |       12 |       27 |       19 |       27 |       17 |       15 |       0 |       13 |       27 |       22 |        8 |        8 |        4 |       0 |       22 |       27 |       13 |        7 |        7 |        5 |       0 |        3 |        6 |        2 |        2 |        2 |        1 |       0 |        6 |        8 |        2 |        6 |        1 |        1 |       0 |      0 |      1 |     24 |     18 |      6 |      7 |      4 |    129 |      0 |      0 |      0 |     28 |     29 |      6 |      6 |      6 |    159 |      0 |      0 |      2 |     11 |      8 |      0 |      2 |      2 |    138 |      0 |      0 |      0 |      6 |      6 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 1203200 |     800 |    280 |    249 |    19 |    0 |     3 |    7 |    1 |     7 |    0 |    234 |    0 |    0 |    0 |    0 |    381 |    419 |      10 |      14 |      17 |       2 |     33 |     10 |     23 |      2 |      4 |      2 |      3 |      1 |      3 |      1 |      1 |      0 |     10 |      6 |      8 |      1 |      6 |      0 |      3 |      0 |       2 |       2 |       6 |       0 |      2 |      0 |      1 |      0 |       17 |       28 |       24 |       18 |        9 |       22 |       0 |       30 |       46 |       26 |       19 |       17 |       23 |       1 |       33 |       32 |       21 |       13 |       15 |        9 |       1 |       33 |       45 |       15 |       11 |       11 |       10 |       0 |       26 |       49 |       16 |       13 |       11 |        6 |       0 |       31 |       35 |       17 |        6 |       12 |       12 |       0 |        6 |        3 |        3 |        4 |        1 |        1 |       0 |        6 |        8 |        2 |        2 |        1 |        0 |       0 |      0 |      4 |     13 |     32 |      2 |      0 |      0 |    229 |      0 |      0 |      0 |      5 |     20 |      5 |      0 |      0 |    219 |      0 |      0 |      0 |     13 |      8 |      0 |      0 |      0 |    213 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 1203300 |     212 |     60 |    101 |     3 |    0 |     1 |    1 |    0 |     3 |    0 |     43 |    0 |    0 |    0 |    0 |     95 |    117 |       2 |       8 |       0 |       0 |     18 |      8 |      4 |      1 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        2 |        8 |        8 |       0 |        2 |        4 |        6 |        3 |       13 |       10 |       1 |        1 |        5 |        7 |       10 |       10 |       16 |       0 |        1 |        6 |        3 |       12 |       15 |       15 |       0 |        2 |        3 |        1 |        4 |        5 |        5 |       0 |        2 |        4 |        3 |        6 |        3 |        5 |       0 |        0 |        0 |        0 |        2 |        2 |        1 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |     10 |     22 |      5 |      0 |      0 |     23 |      0 |      0 |      2 |     11 |     43 |      7 |      0 |      0 |     38 |      0 |      0 |      1 |      3 |      9 |      3 |      0 |      0 |     27 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1203400 |     277 |     72 |    121 |     1 |    0 |     2 |    4 |    0 |     5 |    0 |     72 |    0 |    0 |    0 |    0 |    142 |    135 |       4 |       1 |       1 |       0 |      6 |      3 |      4 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      2 |      5 |      9 |      0 |      1 |      1 |      1 |      0 |       0 |       1 |       1 |       0 |      1 |      0 |      1 |      0 |        3 |       10 |       10 |        6 |        2 |        0 |       0 |        5 |       17 |        6 |        7 |        5 |        1 |       0 |        4 |       26 |       14 |        3 |       12 |        2 |       0 |        8 |       20 |        8 |       12 |       10 |        2 |       0 |       10 |       17 |        7 |        4 |        4 |        1 |       0 |        3 |       13 |        3 |        2 |        6 |        2 |       0 |        1 |        4 |        1 |        0 |        1 |        0 |       0 |        1 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |     58 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |     98 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |      0 |     56 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1203500 |     415 |    137 |    158 |     9 |    0 |     2 |    3 |    1 |     1 |    0 |    104 |    0 |    0 |    0 |    0 |    197 |    218 |      10 |       7 |       7 |       0 |     22 |     16 |      9 |      3 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      7 |      5 |     11 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        2 |        8 |        9 |       14 |       11 |       11 |       0 |        2 |       15 |        9 |       22 |       19 |       15 |       0 |        2 |       15 |       18 |       15 |       17 |       16 |       0 |        2 |       13 |       15 |       14 |       14 |       17 |       0 |        6 |       13 |       14 |        5 |        9 |        7 |       0 |        3 |        9 |       11 |       10 |       10 |        7 |       0 |        0 |        2 |        1 |        1 |        0 |        1 |       0 |        1 |        1 |        5 |        3 |        0 |        1 |       0 |      0 |      0 |     25 |     20 |      6 |     14 |      0 |     72 |      0 |      0 |      1 |     26 |     26 |     15 |     12 |      0 |     78 |      0 |      0 |      0 |     15 |     16 |      3 |      3 |      0 |     67 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1203600 |     273 |     97 |    117 |     2 |    0 |     0 |    1 |    0 |     0 |    0 |     56 |    0 |    0 |    0 |    0 |    122 |    151 |       3 |       6 |       0 |       1 |     11 |     16 |      5 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      8 |      4 |      8 |      0 |      1 |      0 |      2 |      0 |       1 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |        4 |        6 |        9 |        1 |        3 |       11 |       0 |        7 |        8 |        9 |        8 |       12 |       18 |       1 |        3 |       14 |       11 |       12 |        7 |       14 |       0 |        1 |       10 |        8 |        9 |       12 |       16 |       0 |        5 |        6 |        7 |        2 |        6 |        1 |       0 |        8 |        7 |        2 |        4 |        5 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     10 |      8 |      8 |      4 |      4 |     63 |      0 |      0 |      0 |     17 |     15 |      5 |      9 |      7 |     64 |      0 |      0 |      0 |      3 |      5 |      0 |      1 |      0 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1203700 |     224 |     82 |     86 |     2 |    0 |     1 |    0 |    1 |     2 |    0 |     50 |    0 |    0 |    0 |    0 |    100 |    124 |       5 |       6 |       1 |       0 |     14 |      8 |      4 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      6 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        8 |        5 |        8 |        6 |        4 |        5 |       0 |        6 |       12 |        8 |        8 |        6 |        6 |       0 |        3 |        8 |       10 |        4 |        2 |       10 |       0 |        2 |       13 |        9 |        7 |        8 |       10 |       0 |        7 |        6 |        6 |        4 |        0 |        1 |       0 |       10 |        3 |        3 |        4 |        3 |        3 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      7 |     10 |      5 |      1 |      1 |     57 |      0 |      0 |      0 |     10 |      7 |      3 |      1 |      2 |     63 |      0 |      0 |      0 |      8 |      4 |      0 |      2 |      0 |     36 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1205000 |      16 |      1 |      6 |     0 |    0 |     1 |    1 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     10 |      6 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1250000 |     583 |    250 |    163 |     9 |    0 |     1 |    2 |    3 |    16 |    0 |    139 |    0 |    0 |    0 |    0 |    290 |    293 |      15 |       6 |       4 |       0 |     47 |     20 |     17 |      6 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |     10 |     10 |     11 |      1 |      1 |      1 |      4 |      1 |       3 |       2 |       2 |       0 |      1 |      1 |      1 |      1 |        6 |       26 |        8 |       14 |       18 |       28 |       5 |       12 |       23 |       16 |       30 |       26 |       30 |       8 |        9 |        9 |        7 |       13 |       26 |       18 |       3 |        2 |        9 |       14 |       11 |       20 |       18 |       4 |        5 |       25 |        7 |       10 |       15 |       18 |       1 |        9 |       15 |        6 |        7 |       12 |        8 |       1 |        2 |        9 |        3 |        2 |        1 |        2 |       0 |        1 |        5 |        2 |        0 |        4 |        0 |       0 |      0 |      0 |     29 |     36 |     16 |     10 |      8 |    151 |      0 |      0 |      1 |     16 |     24 |     11 |      6 |      5 |    100 |      0 |      0 |      3 |     22 |     13 |      3 |      3 |      4 |     91 |      0 |      0 |      0 |      3 |      7 |      1 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 1250500 |     312 |    101 |    146 |     4 |    0 |     3 |    1 |    0 |     5 |    0 |     52 |    0 |    0 |    0 |    0 |    136 |    176 |       4 |       3 |       1 |       0 |     15 |      8 |      9 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |       10 |        6 |        5 |       11 |       1 |        1 |        7 |       14 |        9 |       13 |       18 |       2 |        4 |        4 |       13 |       14 |       10 |       24 |       6 |        1 |        8 |       10 |        9 |        7 |       28 |       8 |        2 |        3 |        3 |        3 |        2 |        4 |       0 |        2 |        7 |        5 |       10 |        2 |        7 |       2 |        1 |        1 |        2 |        0 |        1 |        2 |       0 |        1 |        1 |        2 |        0 |        0 |        2 |       0 |      0 |      1 |     12 |     15 |      3 |      3 |      5 |     62 |      0 |      0 |      2 |     18 |     17 |      8 |      4 |      6 |     91 |      0 |      0 |      0 |      8 |      6 |      3 |      1 |      2 |     32 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1250600 |     279 |     72 |    141 |     1 |    0 |     0 |    1 |    0 |     3 |    0 |     61 |    0 |    0 |    0 |    0 |    134 |    145 |       0 |       1 |       3 |       0 |     20 |     12 |     14 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      1 |      0 |       0 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        3 |        2 |        6 |        9 |       3 |        4 |        2 |        4 |        9 |        9 |       14 |       2 |        4 |        5 |        8 |       10 |       22 |       23 |       2 |        2 |        8 |        4 |       15 |       11 |       23 |       4 |        3 |        6 |        1 |        3 |        5 |       10 |       2 |        4 |        1 |        4 |        3 |       12 |        6 |       1 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |     17 |     11 |      0 |      4 |     39 |      0 |      0 |      0 |      8 |     28 |     14 |      4 |      4 |     83 |      0 |      0 |      0 |      7 |     10 |      6 |      2 |      4 |     32 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1251500 |     341 |    101 |    163 |     4 |    0 |     3 |    2 |    0 |     3 |    0 |     65 |    0 |    0 |    0 |    0 |    155 |    186 |       0 |       1 |       2 |       0 |      9 |     12 |      4 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      2 |      1 |      0 |        2 |        5 |        7 |        5 |       11 |       11 |       1 |        2 |       14 |        6 |        9 |       16 |        9 |       3 |        3 |        4 |        9 |       14 |       12 |       26 |       2 |        2 |        6 |       13 |       15 |       14 |       35 |       8 |        3 |        5 |        5 |        9 |       10 |        4 |       1 |        2 |        6 |        9 |        4 |        4 |        3 |       0 |        0 |        1 |        3 |        0 |        1 |        1 |       0 |        0 |        0 |        2 |        2 |        1 |        1 |       0 |      0 |      1 |      6 |     17 |      7 |      2 |      2 |     66 |      0 |      0 |      0 |     17 |     34 |      4 |      6 |      6 |     96 |      0 |      0 |      0 |      7 |      7 |      1 |      2 |      2 |     46 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1251600 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1252600 |     487 |    144 |    221 |    12 |    0 |     4 |    2 |    1 |     4 |    0 |     99 |    0 |    0 |    0 |    0 |    225 |    262 |       3 |       0 |       6 |       1 |     23 |     20 |     10 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        2 |       11 |        6 |        9 |       11 |       22 |       2 |        4 |        7 |        9 |        9 |       20 |       31 |       1 |        3 |        5 |       18 |       21 |       18 |       39 |       1 |        4 |        8 |       10 |       19 |       27 |       47 |       1 |        4 |        7 |       10 |        8 |       11 |        7 |       0 |        4 |       12 |        9 |       10 |        3 |       14 |       0 |        1 |        5 |        1 |        0 |        1 |        2 |       0 |        4 |        5 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |     21 |     17 |      6 |      2 |      2 |     96 |      0 |      0 |      0 |     25 |     40 |      6 |      8 |      7 |    135 |      0 |      0 |      1 |     15 |     11 |      1 |      1 |      2 |     68 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 1252700 |      48 |     18 |     18 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     21 |     27 |       3 |       2 |       2 |       1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        5 |        0 |        0 |       0 |        1 |        0 |        4 |        2 |        1 |        2 |       0 |        0 |        1 |        2 |        3 |        2 |        1 |       0 |        0 |        1 |        2 |        0 |        3 |        3 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        3 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      0 |      0 |      1 |      1 |     11 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |     12 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1253000 |     530 |    150 |    277 |    16 |    0 |     1 |    2 |    0 |     1 |    0 |     83 |    0 |    0 |    0 |    0 |    187 |    343 |       1 |       2 |       2 |       0 |     22 |     19 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        0 |        1 |        7 |        3 |        6 |       35 |       1 |        1 |        6 |        1 |        7 |        8 |       72 |       2 |        2 |        7 |        8 |        8 |       15 |       56 |       3 |        5 |        4 |        3 |       11 |       20 |      132 |       3 |        0 |        5 |        4 |        3 |        3 |       15 |       0 |        1 |        6 |        8 |        7 |        7 |       24 |       0 |        0 |        0 |        0 |        0 |        3 |        2 |       0 |        0 |        0 |        2 |        1 |        0 |       12 |       0 |      0 |      1 |     21 |     25 |      6 |      2 |      1 |     94 |      0 |      0 |      1 |     35 |     39 |      8 |     13 |      9 |    172 |      0 |      0 |      1 |      9 |     17 |      6 |      1 |      0 |     49 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1254000 |     386 |    116 |    172 |    18 |    0 |     2 |    2 |    0 |     5 |    0 |     71 |    0 |    0 |    0 |    0 |    170 |    216 |      10 |       3 |       3 |       2 |     22 |      8 |      8 |      2 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      5 |      0 |      0 |        1 |        6 |        6 |       11 |        8 |       15 |       0 |        3 |       12 |        8 |        5 |       13 |       28 |       0 |        3 |       10 |       18 |       19 |       11 |       17 |       1 |        3 |       10 |       11 |       12 |       15 |       41 |       1 |        2 |        9 |        8 |        3 |        4 |        6 |       0 |        4 |       11 |        5 |        8 |        5 |        6 |       0 |        2 |        2 |        1 |        0 |        1 |        6 |       0 |        0 |        3 |        2 |        3 |        2 |        5 |       0 |      0 |      1 |     10 |     20 |      3 |      2 |      2 |     78 |      0 |      0 |      1 |     15 |     35 |      6 |      6 |      3 |    106 |      0 |      0 |      1 |      4 |      6 |      2 |      1 |      0 |     57 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 1254500 |     435 |    103 |    235 |     6 |    0 |     1 |    0 |    2 |     3 |    0 |     85 |    0 |    0 |    0 |    0 |    172 |    263 |       5 |       1 |       8 |       0 |     19 |     10 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      1 |        0 |        3 |        8 |        2 |        5 |       22 |       1 |        0 |        9 |        4 |        5 |        8 |       35 |       1 |        2 |        5 |        8 |        7 |       13 |       60 |       3 |        0 |        4 |        9 |        7 |       14 |       98 |       5 |        0 |        6 |        3 |        6 |        6 |       10 |       0 |        0 |        8 |        7 |        4 |        5 |       30 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        2 |        0 |        1 |        3 |        1 |        3 |       0 |      0 |      1 |     16 |     12 |      2 |      3 |      6 |     63 |      0 |      0 |      0 |     33 |     36 |      9 |      9 |      8 |    140 |      0 |      0 |      2 |     14 |     15 |      3 |      1 |      2 |     48 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1255500 |     600 |    232 |    196 |    16 |    0 |     2 |    3 |    2 |     9 |    0 |    140 |    0 |    0 |    0 |    0 |    265 |    335 |      20 |       3 |       7 |       1 |     23 |      6 |      6 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      3 |      3 |      0 |      2 |      0 |      0 |      0 |       4 |       1 |       1 |       0 |      1 |      1 |      0 |      0 |        8 |       14 |       20 |       16 |       11 |       12 |       0 |        9 |       23 |       24 |       27 |       24 |       43 |       1 |        5 |       19 |       27 |       13 |       11 |       15 |       3 |        5 |       21 |       16 |       14 |       12 |       31 |       4 |        3 |       30 |       21 |        5 |       11 |        2 |       1 |        7 |       19 |        6 |       13 |        9 |       11 |       2 |        1 |        9 |        2 |        2 |        2 |        2 |       0 |        1 |        3 |        3 |        5 |        0 |        2 |       0 |      0 |      0 |     36 |     39 |     14 |      2 |      6 |    135 |      0 |      0 |      1 |     25 |     25 |      8 |      4 |      6 |    127 |      0 |      0 |      1 |     10 |     28 |      6 |      0 |      1 |     94 |      0 |      0 |      2 |      5 |      8 |      0 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 1255600 |     332 |    123 |    121 |     7 |    0 |     5 |    0 |    3 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    159 |    173 |       3 |       2 |       4 |       2 |     18 |      4 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        5 |       10 |       10 |        8 |        8 |        8 |       3 |        2 |        5 |       15 |       14 |       15 |       17 |       3 |        3 |       13 |       10 |       12 |        5 |       14 |       1 |        1 |       13 |        5 |       10 |       10 |       24 |       0 |        4 |       14 |        8 |        9 |        2 |        4 |       0 |        1 |       16 |        5 |        5 |        2 |        1 |       0 |        1 |        4 |        1 |        1 |        1 |        0 |       0 |        1 |        2 |        1 |        2 |        2 |        1 |       0 |      0 |      0 |     17 |     17 |      7 |      1 |      4 |     77 |      0 |      0 |      1 |     17 |     21 |      4 |      4 |      4 |     70 |      0 |      0 |      0 |     15 |      8 |      2 |      0 |      1 |     45 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1256000 |     386 |    143 |    168 |     8 |    0 |     2 |    3 |    0 |     5 |    0 |     57 |    0 |    0 |    0 |    0 |    187 |    199 |       6 |       7 |       0 |       0 |     14 |      9 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |       12 |        5 |        6 |        7 |       19 |       4 |        5 |        9 |       10 |       12 |       23 |       22 |       5 |        6 |       11 |       11 |        7 |       15 |       30 |      10 |        3 |        5 |        5 |       17 |       16 |       26 |       6 |        4 |        4 |        4 |        8 |        3 |        8 |       0 |        1 |        6 |        0 |        8 |        5 |        4 |       2 |        1 |        2 |        2 |        1 |        2 |        1 |       0 |        0 |        3 |        0 |        1 |        3 |        2 |       0 |      0 |      1 |     12 |     27 |      4 |      5 |      8 |     86 |      0 |      0 |      2 |     18 |     24 |      9 |     11 |      8 |     96 |      0 |      0 |      0 |      6 |      4 |      1 |      2 |      2 |     42 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      2 |      9 |      0 |     37 | s03      | R    |
| 1257500 |     597 |    218 |    205 |    12 |    0 |     5 |   10 |    2 |    12 |    0 |    133 |    0 |    0 |    0 |    0 |    264 |    333 |       5 |       8 |       7 |       0 |     35 |     14 |      7 |      2 |      3 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      2 |      6 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        3 |       12 |       21 |       13 |       13 |       10 |       9 |       10 |       29 |       24 |       29 |       26 |       17 |       2 |        3 |       16 |       29 |       15 |       14 |       17 |       4 |        7 |       15 |       20 |       20 |       11 |       27 |       7 |        6 |       16 |       23 |       14 |        7 |        3 |       0 |        6 |       22 |       18 |        6 |        2 |        8 |       2 |        2 |        5 |        6 |        2 |        1 |        0 |       0 |        3 |        5 |        9 |        3 |        4 |        1 |       0 |      0 |      0 |     31 |     29 |      9 |      4 |     10 |    135 |      0 |      0 |      0 |     26 |     33 |      3 |      6 |      9 |    128 |      0 |      0 |      2 |     23 |     12 |      2 |      1 |      3 |     90 |      0 |      0 |      1 |      6 |      6 |      0 |      2 |      0 |     26 |      0 |     37 | s03      | R    |
| 1258000 |     254 |     72 |     98 |     8 |    0 |     4 |    5 |    0 |     2 |    0 |     65 |    0 |    0 |    0 |    0 |    122 |    132 |       8 |       1 |       5 |       0 |      6 |      6 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        6 |        8 |        5 |        1 |        1 |       3 |        2 |       13 |       10 |        6 |        7 |        8 |       0 |        3 |       15 |        6 |       10 |        6 |       11 |       2 |        5 |       12 |        7 |        9 |        6 |        5 |       1 |        5 |        9 |       10 |        4 |        3 |        1 |       0 |        4 |        9 |       12 |        3 |        4 |        1 |       0 |        1 |        1 |        3 |        2 |        1 |        3 |       0 |        1 |        2 |        3 |        0 |        1 |        1 |       0 |      0 |      0 |     12 |      5 |      2 |      2 |      0 |     51 |      0 |      0 |      2 |     12 |      9 |      1 |      1 |      2 |     71 |      0 |      0 |      0 |      7 |      6 |      1 |      0 |      1 |     50 |      0 |      0 |      0 |      6 |      6 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1258100 |     335 |    120 |    108 |    11 |    0 |     2 |    2 |    1 |     9 |    0 |     82 |    0 |    0 |    0 |    0 |    169 |    166 |       7 |       7 |       2 |       3 |     15 |      2 |      6 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        7 |       15 |        6 |        9 |        7 |        4 |       1 |        4 |       26 |       19 |       11 |        7 |        4 |       0 |        3 |       14 |       14 |       12 |        9 |        7 |       1 |        4 |       10 |       12 |        9 |        5 |        6 |       2 |        1 |       22 |       11 |        5 |        3 |        2 |       0 |        1 |       23 |        8 |        3 |        1 |        2 |       0 |        0 |       10 |        3 |        2 |        0 |        1 |       0 |        1 |        4 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |     18 |     18 |      3 |      1 |      1 |     79 |      0 |      0 |      0 |      5 |     19 |      2 |      3 |      5 |     74 |      0 |      0 |      0 |      6 |      1 |      1 |      0 |      1 |     73 |      0 |      0 |      0 |      3 |      1 |      1 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 1258500 |     298 |    124 |    106 |     3 |    0 |     1 |    3 |    1 |     9 |    0 |     51 |    0 |    0 |    0 |    0 |    126 |    172 |       7 |       1 |       1 |       0 |     15 |      3 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        2 |        6 |        9 |        7 |        3 |       15 |       1 |        2 |       14 |        9 |       15 |        8 |       26 |       7 |        1 |        8 |       10 |        4 |        5 |       13 |       3 |        0 |        5 |        7 |        6 |       11 |       29 |       4 |        1 |        8 |        3 |        8 |        3 |        5 |       1 |        2 |        5 |        2 |        3 |        2 |        7 |       1 |        3 |        4 |        0 |        1 |        2 |        0 |       0 |        1 |        1 |        2 |        1 |        0 |        2 |       0 |      0 |      1 |     14 |     17 |      6 |      2 |      8 |     76 |      0 |      0 |      0 |     19 |      6 |      5 |      4 |      6 |     66 |      0 |      0 |      0 |     11 |      3 |      2 |      0 |      2 |     33 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1260500 |     326 |     86 |    187 |     2 |    0 |     0 |    1 |    2 |     0 |    0 |     48 |    0 |    0 |    0 |    0 |    159 |    167 |       6 |       2 |       1 |       0 |      4 |     10 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |        4 |        1 |        5 |        6 |        5 |        7 |       6 |        4 |        4 |        9 |       10 |       12 |        8 |       5 |        6 |        9 |       17 |       16 |       23 |       25 |       4 |        2 |        4 |       18 |       12 |       21 |       26 |       4 |        6 |        3 |        3 |        5 |        2 |        3 |       0 |        1 |        2 |        6 |        8 |        6 |        3 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |     22 |      0 |      2 |      8 |     47 |      0 |      0 |      1 |     14 |     36 |     15 |      5 |     12 |    104 |      0 |      0 |      0 |      6 |      6 |      1 |      4 |      1 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1260600 |     403 |     97 |    208 |     8 |    0 |     3 |    4 |    1 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    196 |    207 |       2 |       5 |       4 |       1 |     12 |      7 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        2 |        1 |       12 |       10 |        7 |        8 |       0 |        1 |        2 |       16 |       15 |       10 |       11 |       2 |        6 |       10 |       16 |       24 |       22 |       22 |       4 |        5 |        6 |       19 |       23 |       18 |       22 |      11 |        3 |        9 |        8 |        9 |        9 |        3 |       2 |        4 |        5 |       10 |        9 |        6 |        4 |       0 |        1 |        1 |        1 |        1 |        4 |        1 |       0 |        1 |        0 |        2 |        3 |        0 |        2 |       0 |      0 |      0 |     11 |     28 |      4 |      4 |      7 |     43 |      0 |      0 |      1 |     19 |     42 |      8 |      5 |     11 |    122 |      0 |      0 |      0 |     19 |     11 |      6 |      2 |      0 |     43 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1261000 |     301 |     94 |    146 |     2 |    0 |     2 |    3 |    1 |     4 |    0 |     49 |    0 |    0 |    0 |    0 |    141 |    160 |       3 |       8 |       6 |       0 |     12 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      1 |        3 |        2 |        7 |       16 |        4 |        5 |       2 |        4 |        3 |       11 |       19 |        6 |       11 |       1 |        2 |        8 |       16 |       11 |       17 |       15 |       2 |        7 |        7 |       19 |        7 |       16 |       15 |       4 |        3 |        6 |        6 |        5 |        2 |        2 |       1 |        7 |        5 |        3 |        8 |        0 |        0 |       1 |        0 |        2 |        0 |        1 |        3 |        0 |       0 |        0 |        1 |        1 |        2 |        1 |        1 |       0 |      0 |      0 |     22 |     30 |      7 |      1 |      4 |     30 |      0 |      0 |      2 |     14 |     24 |      8 |      9 |      7 |     82 |      0 |      0 |      0 |      5 |      3 |      4 |      1 |      0 |     36 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1261500 |     180 |     44 |    101 |     0 |    0 |     0 |    1 |    3 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |     83 |     97 |       1 |       1 |       0 |       2 |      2 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        2 |        4 |        5 |        4 |       0 |        2 |        1 |        3 |       12 |        7 |        1 |       0 |        4 |        4 |        3 |       11 |       14 |        8 |       2 |        8 |        5 |        7 |        9 |       10 |       11 |       5 |        3 |        1 |        3 |        5 |        1 |        2 |       0 |        0 |        1 |        5 |        1 |        1 |        7 |       0 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      8 |     10 |      3 |      1 |      2 |     20 |      0 |      0 |      0 |     13 |     15 |     11 |      1 |      7 |     54 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      1 |     21 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1262500 |     150 |     55 |     66 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     66 |     84 |       0 |       1 |       1 |       0 |      7 |      4 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        0 |        0 |        6 |        5 |        3 |       1 |        1 |        6 |        1 |       12 |       11 |        7 |       0 |        0 |        4 |        4 |        6 |       11 |        6 |       3 |        1 |        3 |        9 |        4 |        4 |        8 |       3 |        1 |        2 |        2 |        5 |        1 |        1 |       1 |        0 |        0 |        1 |        7 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      8 |      2 |      1 |      6 |     34 |      0 |      0 |      0 |      6 |     11 |      1 |      0 |      6 |     42 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1262900 |     134 |     50 |     54 |     3 |    0 |     1 |    2 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     63 |     71 |       2 |       3 |       2 |       1 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        8 |        4 |        5 |       1 |        0 |        2 |        5 |        6 |        5 |        9 |       1 |        0 |        1 |       11 |        6 |        7 |        4 |       1 |        0 |        2 |        9 |        5 |        1 |        7 |       0 |        1 |        1 |        0 |        2 |        1 |        3 |       0 |        3 |        2 |        4 |        3 |        2 |        2 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |      0 |      0 |      5 |     10 |      3 |      2 |      3 |     27 |      0 |      0 |      1 |      4 |     17 |      3 |      4 |      4 |     21 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |     18 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1263000 |     316 |    110 |    122 |     4 |    0 |     0 |    2 |    2 |     7 |    0 |     69 |    0 |    0 |    0 |    0 |    142 |    174 |       7 |       9 |       2 |       1 |      7 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |       11 |        7 |        4 |        8 |       2 |        3 |        8 |       18 |       19 |       11 |       14 |       2 |        0 |       11 |       19 |       17 |        2 |        6 |       4 |        2 |        8 |       17 |        8 |        6 |       17 |       5 |        2 |        5 |       15 |       13 |        3 |        2 |       0 |        5 |        5 |       15 |        3 |        1 |        0 |       0 |        1 |        2 |        3 |        1 |        1 |        0 |       0 |        0 |        2 |        4 |        1 |        0 |        0 |       0 |      0 |      0 |     10 |     30 |      6 |      1 |     10 |     53 |      0 |      0 |      0 |     16 |     28 |      5 |      1 |      2 |     70 |      0 |      0 |      1 |     12 |      8 |      3 |      0 |      3 |     42 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1263100 |     119 |     51 |     43 |     4 |    0 |     1 |    0 |    1 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     56 |     63 |       1 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      3 |      0 |        0 |        1 |        2 |        9 |        3 |        3 |       1 |        0 |        2 |       14 |        5 |        5 |        3 |       3 |        0 |        7 |        8 |        2 |        1 |        2 |       1 |        1 |        3 |        8 |        4 |        2 |        3 |       1 |        1 |        3 |        3 |        2 |        2 |        1 |       0 |        1 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        2 |        0 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |     10 |      9 |      3 |      2 |      1 |     26 |      0 |      0 |      0 |      6 |      6 |      1 |      1 |      4 |     25 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |     13 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1263500 |     215 |     72 |     88 |     5 |    0 |     2 |    1 |    0 |     1 |    0 |     46 |    0 |    0 |    0 |    0 |    105 |    110 |       3 |       1 |       2 |       0 |     13 |      5 |      3 |      2 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      3 |      6 |      0 |      3 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        7 |        2 |        8 |        3 |        8 |       2 |        0 |        8 |        9 |        8 |        9 |        5 |       3 |        3 |        0 |       10 |        7 |        6 |       17 |       1 |        0 |        4 |        3 |        5 |       11 |       15 |       6 |        3 |        4 |        4 |        5 |        4 |        3 |       2 |        2 |        3 |        8 |        1 |        3 |        3 |       1 |        0 |        0 |        2 |        2 |        0 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      7 |     12 |      3 |      3 |      7 |     40 |      0 |      0 |      0 |      3 |     17 |      5 |      4 |      2 |     57 |      0 |      0 |      1 |     10 |      4 |      0 |      0 |      1 |     30 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 1263900 |      73 |     29 |     27 |     3 |    0 |     1 |    1 |    1 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     33 |     40 |       2 |       0 |       0 |       1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        2 |        1 |        4 |        1 |        1 |       0 |        2 |        1 |        3 |        7 |        0 |        7 |       0 |        2 |        4 |        3 |        5 |        1 |        0 |       0 |        0 |        2 |        3 |        6 |        1 |        0 |       0 |        0 |        0 |        1 |        3 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        2 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      3 |      2 |      1 |      3 |     14 |      0 |      0 |      0 |      2 |      7 |      1 |      2 |      2 |     13 |      0 |      0 |      0 |      3 |      2 |      0 |      3 |      1 |      2 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1264000 |     168 |     51 |     75 |     4 |    0 |     3 |    0 |    1 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |     82 |     86 |       2 |       2 |       4 |       1 |      7 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        1 |        3 |        6 |        4 |        2 |       2 |        3 |        2 |        6 |       10 |        6 |        3 |       2 |        4 |        5 |        8 |        8 |        5 |        7 |       5 |        0 |        3 |        7 |        7 |        7 |        8 |       1 |        1 |        3 |        4 |        3 |        1 |        3 |       0 |        1 |        3 |        5 |        1 |        3 |        4 |       1 |        0 |        3 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |      4 |      8 |      1 |      1 |      2 |     35 |      0 |      0 |      0 |      4 |     17 |      2 |      3 |      5 |     44 |      0 |      0 |      0 |      3 |      4 |      1 |      3 |      1 |     21 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1265500 |     218 |     72 |    106 |     7 |    0 |     0 |    0 |    1 |     4 |    0 |     28 |    0 |    0 |    0 |    0 |    100 |    118 |       4 |       0 |       0 |       0 |      8 |      4 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        1 |        5 |        6 |        9 |        8 |       0 |        0 |        3 |        5 |       11 |        9 |       11 |       3 |        3 |        2 |       10 |        7 |        9 |       16 |       5 |        0 |        5 |        5 |        5 |        8 |       25 |       6 |        2 |        0 |        3 |        2 |        4 |        2 |       0 |        1 |        2 |        5 |        1 |        3 |        3 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        3 |        0 |        1 |        2 |       0 |      0 |      4 |      6 |     10 |      3 |      4 |      4 |     41 |      0 |      0 |      0 |     11 |     12 |      9 |      1 |      9 |     64 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      1 |     21 |      0 |      0 |      0 |      3 |      0 |      3 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 1265600 |     272 |     78 |    142 |     3 |    0 |     2 |    2 |    1 |     2 |    0 |     42 |    0 |    0 |    0 |    0 |    140 |    132 |       4 |       4 |       0 |       0 |     11 |     14 |      5 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |      2 |      1 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      1 |      0 |        2 |        2 |        4 |       12 |        5 |        5 |       5 |        2 |        1 |        7 |       13 |        9 |        9 |       2 |        4 |        2 |       11 |       13 |       14 |       24 |       6 |        0 |        4 |       13 |        9 |       14 |       21 |       7 |        3 |        2 |        3 |        3 |        8 |        6 |       1 |        1 |        0 |        2 |        4 |        4 |        4 |       1 |        0 |        2 |        0 |        2 |        0 |        1 |       0 |        2 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     10 |     12 |      3 |      6 |      2 |     45 |      0 |      0 |      0 |     11 |     21 |      9 |     14 |      7 |     80 |      0 |      0 |      0 |      6 |      7 |      0 |      0 |      2 |     27 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 1265700 |     246 |     52 |    157 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |    117 |    129 |       2 |       3 |       1 |       0 |     11 |     10 |      7 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        3 |        0 |        5 |        8 |        2 |       3 |        1 |        3 |        1 |       10 |        6 |        7 |       1 |        1 |        4 |       10 |       21 |       10 |       26 |       6 |        0 |        2 |       13 |       15 |       14 |       22 |      13 |        3 |        0 |        2 |        4 |        4 |        2 |       1 |        2 |        3 |        2 |        6 |        1 |        3 |       3 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |     17 |      3 |      2 |      0 |     24 |      0 |      0 |      2 |     11 |     23 |      9 |      8 |     10 |     94 |      0 |      0 |      0 |      6 |      1 |      1 |      2 |      2 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1266500 |     174 |     54 |     86 |     2 |    0 |     2 |    0 |    0 |     2 |    0 |     28 |    0 |    0 |    0 |    0 |     79 |     95 |       0 |       0 |       1 |       0 |      2 |     13 |      4 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        3 |        9 |        4 |        4 |       2 |        1 |        1 |        5 |        6 |        9 |        6 |       1 |        1 |        3 |        5 |        8 |        8 |       12 |       2 |        2 |        3 |        8 |        6 |        7 |       17 |       4 |        1 |        1 |        3 |        3 |        1 |        2 |       0 |        3 |        1 |        4 |        5 |        2 |        1 |       1 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     10 |      9 |      9 |      1 |      3 |     22 |      0 |      0 |      0 |      6 |     14 |      8 |      2 |      4 |     52 |      0 |      0 |      0 |      8 |      1 |      1 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1267000 |     336 |     84 |    184 |     3 |    0 |     1 |    0 |    2 |     3 |    0 |     59 |    0 |    0 |    0 |    0 |    163 |    173 |       1 |       7 |       0 |       0 |     18 |     14 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        5 |        1 |        5 |        8 |       10 |        8 |       1 |        2 |        5 |        6 |       11 |       11 |       10 |       1 |        9 |        6 |        9 |       14 |       20 |       30 |       8 |        1 |        4 |       11 |       21 |       17 |       20 |      14 |        1 |        5 |        4 |        4 |        5 |        6 |       1 |        9 |        1 |        2 |        9 |        8 |        3 |       1 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      4 |     12 |     10 |      5 |      5 |      6 |     42 |      0 |      0 |      0 |     17 |     41 |      6 |      5 |     13 |    102 |      0 |      0 |      0 |     14 |      5 |      2 |      1 |      2 |     35 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1267100 |     180 |     48 |     89 |     8 |    0 |     0 |    0 |    0 |     2 |    0 |     33 |    0 |    0 |    0 |    0 |     89 |     91 |       3 |       8 |       1 |       0 |      7 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        3 |        2 |        4 |        4 |        4 |        3 |       1 |        2 |        3 |        5 |        7 |        3 |        4 |       3 |        5 |        2 |        5 |        8 |       12 |       16 |       4 |        0 |        2 |        4 |        8 |        9 |        9 |       5 |        2 |        1 |        0 |        3 |        5 |        3 |       0 |        4 |        0 |        1 |        5 |        6 |        3 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        2 |        3 |        1 |        0 |        1 |       0 |      0 |      0 |      7 |      9 |      7 |      0 |      2 |     23 |      0 |      0 |      1 |      6 |     19 |      8 |      2 |      1 |     52 |      0 |      0 |      1 |      8 |      4 |      0 |      5 |      0 |     15 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1267500 |     452 |    146 |    230 |     7 |    0 |     1 |    1 |    2 |     0 |    0 |     65 |    0 |    0 |    0 |    0 |    217 |    235 |       2 |       3 |       2 |       0 |     17 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      4 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        5 |        8 |       16 |       17 |       13 |       1 |        4 |        5 |       10 |       20 |       17 |       15 |      11 |        7 |        7 |       22 |       19 |       18 |       27 |      13 |        8 |        7 |       18 |       22 |       11 |       40 |      11 |        3 |        5 |       10 |        7 |        8 |        3 |       0 |        8 |        4 |        6 |        5 |        4 |        1 |       1 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        2 |        2 |        1 |        0 |        0 |        2 |       0 |      0 |      0 |     16 |     16 |     11 |      8 |      8 |     87 |      0 |      0 |      1 |     26 |     41 |     10 |      4 |      7 |    141 |      0 |      0 |      1 |      9 |      7 |      4 |      0 |      3 |     41 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1267600 |      89 |     17 |     47 |     1 |    0 |     2 |    0 |    0 |     1 |    0 |     21 |    0 |    0 |    0 |    0 |     40 |     49 |       0 |       0 |       0 |       1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        2 |        2 |       1 |        0 |        0 |        0 |        5 |        2 |        3 |       0 |        2 |        2 |        0 |        2 |        7 |        7 |       1 |        3 |        0 |        2 |        8 |        7 |        6 |       0 |        3 |        1 |        1 |        2 |        2 |        1 |       0 |        3 |        1 |        2 |        1 |        3 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      9 |      0 |      0 |      0 |     14 |      6 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 1269900 |     423 |    124 |    222 |     5 |    0 |     1 |    0 |    0 |     5 |    0 |     66 |    0 |    0 |    0 |    0 |    184 |    239 |       3 |       3 |       2 |       1 |     17 |     13 |     11 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        3 |        5 |       10 |        9 |       12 |       1 |        6 |        4 |        9 |       20 |       19 |       14 |      10 |        5 |        3 |       12 |       13 |       26 |       42 |       9 |        5 |        5 |       16 |       23 |       19 |       35 |       9 |        1 |        1 |        4 |       10 |        6 |        5 |       1 |        8 |        8 |        7 |        7 |        7 |        1 |       0 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |        1 |        1 |        0 |        2 |        2 |        0 |       1 |      0 |      0 |      7 |     25 |      6 |      0 |      9 |     77 |      0 |      0 |      1 |     29 |     46 |      9 |      7 |     13 |    117 |      0 |      0 |      0 |      8 |     10 |      4 |      2 |      0 |     42 |      0 |      0 |      0 |      2 |      5 |      0 |      2 |      0 |      2 |      0 |     37 | s03      | R    |
| 1270000 |     251 |     55 |    145 |     6 |    0 |     2 |    0 |    0 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |    123 |    128 |       4 |       0 |       1 |       0 |      9 |     12 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        0 |        6 |        3 |        5 |        7 |       1 |        1 |        2 |        4 |        5 |       11 |        6 |       3 |        1 |        2 |        6 |        6 |       24 |       26 |       7 |        0 |        2 |        6 |        8 |       22 |       28 |       7 |        1 |        1 |        5 |        2 |        4 |        8 |       2 |        2 |        3 |        0 |        7 |        2 |        6 |       0 |        0 |        0 |        0 |        2 |        1 |        2 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |     19 |      5 |      4 |      0 |     25 |      0 |      0 |      1 |     11 |     17 |     16 |      8 |      5 |     87 |      0 |      0 |      0 |      3 |      6 |      5 |      3 |      0 |     26 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1270100 |     267 |     71 |    136 |     3 |    0 |     0 |    1 |    2 |     2 |    0 |     52 |    0 |    0 |    0 |    0 |    122 |    145 |       3 |       2 |       0 |       0 |      6 |      8 |      8 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      3 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        7 |        7 |        7 |        3 |        9 |       1 |        4 |        6 |        5 |        6 |        5 |        7 |       3 |        5 |        4 |        9 |       13 |       15 |       13 |       2 |        6 |        7 |        9 |       21 |       10 |       19 |       3 |        1 |        9 |        3 |        6 |        3 |        2 |       0 |        6 |        8 |        4 |        5 |        3 |        1 |       1 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     11 |      9 |      2 |      2 |      0 |     47 |      0 |      0 |      0 |      9 |     21 |      9 |      6 |      2 |     89 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      4 |     40 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 1270200 |     518 |    155 |    233 |     7 |    0 |     5 |    8 |    1 |     2 |    0 |    107 |    0 |    0 |    0 |    0 |    236 |    282 |       4 |       6 |       3 |       0 |     16 |     18 |      9 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        5 |        2 |        7 |       16 |        9 |       21 |       3 |        1 |       10 |       18 |       15 |       10 |       37 |       1 |        4 |       10 |        8 |       23 |       21 |       41 |       4 |        3 |        9 |        9 |       20 |       16 |       56 |       9 |        3 |       12 |        5 |        8 |        8 |       15 |       0 |        4 |       13 |        9 |       12 |        9 |        9 |       0 |        1 |        2 |        4 |        1 |        1 |        2 |       0 |        0 |        0 |        4 |        2 |        1 |        5 |       0 |      0 |      1 |     25 |     27 |      6 |      4 |      5 |     87 |      0 |      0 |      2 |     26 |     48 |      9 |      6 |     12 |    130 |      0 |      0 |      0 |     17 |     10 |      2 |      0 |      1 |     77 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1270600 |     285 |     79 |    135 |     5 |    0 |     3 |    0 |    0 |     0 |    0 |     63 |    0 |    0 |    0 |    0 |    144 |    141 |       5 |       3 |       0 |       0 |      6 |      9 |      1 |      1 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      3 |      5 |      6 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        1 |        5 |        5 |        4 |       13 |       2 |        2 |        2 |        7 |        8 |        9 |       16 |       4 |        2 |        7 |        5 |       13 |       10 |       30 |       6 |        2 |        3 |        8 |        6 |        9 |       23 |      11 |        4 |        5 |        5 |        4 |        9 |        8 |       2 |        1 |        3 |        7 |        5 |        6 |        4 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        3 |        0 |        0 |        1 |       0 |      0 |      0 |     12 |     16 |      3 |      2 |      5 |     41 |      0 |      0 |      0 |     20 |     21 |      5 |      3 |      8 |     78 |      0 |      0 |      0 |     10 |     12 |      6 |      2 |      1 |     32 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1271500 |     417 |     98 |    245 |     3 |    0 |     4 |    1 |    0 |     0 |    0 |     66 |    0 |    0 |    0 |    0 |    198 |    219 |       6 |       0 |       1 |       1 |      9 |     12 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        5 |        5 |        8 |       17 |        3 |       2 |        1 |        3 |        7 |       12 |       15 |       11 |       7 |        5 |        6 |       14 |       18 |       15 |       40 |      21 |        6 |        7 |       13 |       15 |       26 |       49 |      10 |        3 |        4 |        8 |        8 |        2 |        7 |       0 |        5 |        6 |        8 |        6 |        5 |        4 |       0 |        1 |        0 |        1 |        0 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |     10 |     21 |      4 |      6 |      3 |     54 |      0 |      0 |      1 |     27 |     43 |     13 |      8 |     11 |    142 |      0 |      0 |      0 |     15 |      8 |      3 |      0 |      2 |     38 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1272000 |     406 |    101 |    233 |     7 |    0 |     2 |    3 |    0 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    199 |    207 |       6 |       1 |       3 |       0 |      8 |     20 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      4 |      1 |      0 |        5 |        6 |        7 |       10 |        5 |        6 |       3 |        1 |        5 |       11 |        9 |       14 |       15 |       4 |        3 |        9 |       18 |       21 |       22 |       31 |      13 |        3 |        8 |       19 |       17 |       18 |       34 |      17 |        3 |        9 |        5 |        3 |        4 |        6 |       2 |        0 |        4 |        7 |        5 |        7 |        2 |       2 |        0 |        1 |        0 |        2 |        1 |        4 |       0 |        0 |        1 |        2 |        0 |        0 |        2 |       0 |      0 |      0 |     14 |     20 |      3 |      6 |      2 |     56 |      0 |      0 |      0 |     22 |     48 |     11 |      4 |      9 |    139 |      0 |      0 |      1 |      6 |      5 |      1 |      2 |      0 |     44 |      0 |      0 |      0 |      1 |      5 |      1 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 1272100 |    1015 |    275 |    527 |    16 |    0 |     5 |    4 |    1 |     6 |    0 |    181 |    0 |    0 |    0 |    0 |    473 |    542 |       9 |      13 |       2 |       2 |     57 |     35 |     20 |      5 |      0 |      3 |      2 |      0 |      0 |      3 |      4 |      0 |     13 |     13 |      7 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      7 |      3 |      0 |        4 |        5 |        9 |       24 |       28 |       40 |       1 |        7 |        8 |       21 |       21 |       44 |       59 |       4 |        8 |       12 |       32 |       33 |       51 |       98 |      17 |        8 |       12 |       24 |       47 |       74 |       88 |      23 |       11 |        5 |       14 |       21 |       15 |       25 |       3 |        8 |        3 |       11 |       19 |       20 |       24 |       2 |        1 |        2 |        3 |        1 |        4 |        6 |       0 |        0 |        3 |        2 |        4 |        1 |        5 |       0 |      0 |      2 |     50 |     50 |     12 |     17 |      9 |    135 |      0 |      0 |      3 |     58 |     97 |     29 |     22 |     29 |    289 |      0 |      0 |      0 |     26 |     25 |      2 |      6 |      3 |    119 |      0 |      0 |      0 |      7 |      7 |      4 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 1272500 |     634 |    159 |    339 |     5 |    0 |     5 |    1 |    2 |     4 |    0 |    119 |    0 |    0 |    0 |    0 |    304 |    330 |       4 |      15 |       8 |       0 |     21 |     26 |     16 |      2 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |       0 |       1 |       0 |       0 |      2 |      0 |      1 |      1 |        3 |        4 |       16 |       10 |       17 |       15 |       4 |        4 |        9 |       18 |        9 |       19 |       28 |       3 |        6 |       12 |       15 |       30 |       32 |       54 |      13 |        8 |       12 |       24 |       23 |       44 |       53 |      13 |        6 |        1 |        9 |       16 |       15 |       16 |       1 |        7 |        6 |        3 |       15 |       11 |       11 |       2 |        0 |        5 |        0 |        2 |        1 |        1 |       0 |        1 |        1 |        3 |        1 |        2 |        0 |       0 |      0 |      2 |     22 |     33 |      6 |      7 |     11 |     78 |      0 |      0 |      2 |     33 |     62 |     14 |     17 |     26 |    185 |      0 |      0 |      1 |     20 |     14 |     12 |      5 |      5 |     62 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1272700 |     594 |    185 |    285 |     3 |    0 |     3 |    1 |    1 |     2 |    0 |    114 |    0 |    0 |    0 |    0 |    295 |    299 |       9 |       8 |       7 |       0 |     43 |     27 |     11 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      3 |      3 |      0 |      3 |      1 |      4 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        8 |        6 |        9 |       15 |       23 |       15 |       7 |       11 |        7 |       12 |       19 |       27 |       19 |       7 |        5 |        8 |       17 |       15 |       43 |       52 |      11 |        7 |        6 |       23 |       22 |       30 |       35 |      11 |       10 |        3 |        9 |        8 |       12 |       12 |       2 |        2 |        5 |       12 |       14 |       13 |       10 |       2 |        2 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        3 |        0 |        2 |        0 |       0 |      0 |      1 |     26 |     30 |      8 |      3 |      9 |    108 |      0 |      0 |      1 |     37 |     40 |     17 |     10 |     15 |    165 |      0 |      0 |      0 |     25 |     19 |      5 |      1 |      5 |     59 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1273000 |     438 |    119 |    235 |     2 |    0 |     4 |    4 |    1 |     4 |    0 |     69 |    0 |    0 |    0 |    0 |    214 |    224 |       2 |      10 |       4 |       0 |     11 |     11 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        9 |       10 |        9 |       19 |       2 |        7 |        4 |        8 |       14 |       17 |       10 |       5 |        7 |        8 |       22 |       17 |       21 |       25 |      13 |        5 |        8 |       18 |       21 |       17 |       38 |      15 |        3 |        5 |        8 |        8 |        5 |        7 |       1 |        4 |        3 |        5 |       12 |        2 |        5 |       1 |        0 |        3 |        4 |        0 |        1 |        2 |       0 |        0 |        2 |        1 |        0 |        0 |        2 |       0 |      0 |      1 |     17 |     27 |      4 |      1 |      5 |     64 |      0 |      0 |      2 |     30 |     43 |     13 |      5 |      6 |    136 |      0 |      0 |      2 |      8 |     12 |      1 |      2 |      2 |     42 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1273100 |     288 |     83 |    131 |     4 |    0 |     2 |    5 |    0 |     1 |    0 |     62 |    0 |    0 |    0 |    0 |    146 |    142 |       2 |       3 |       2 |       0 |     11 |     10 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      6 |      8 |      0 |      2 |      0 |      2 |      0 |       3 |       0 |       1 |       0 |      1 |      1 |      2 |      0 |        6 |        6 |        6 |        6 |        7 |        8 |       0 |        0 |        3 |       10 |       16 |        7 |        7 |       1 |        3 |        3 |       12 |       28 |       14 |        8 |       0 |        1 |        5 |       20 |       20 |        8 |        8 |       1 |        2 |        2 |       10 |        9 |        6 |        1 |       0 |        2 |        5 |        5 |       11 |        7 |        2 |       0 |        3 |        0 |        4 |        1 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |      0 |      1 |     22 |     15 |      0 |      0 |      0 |     45 |      0 |      0 |      0 |     37 |     27 |      0 |      0 |      0 |     67 |      0 |      0 |      0 |     15 |     12 |      1 |      0 |      0 |     34 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1273200 |     335 |     89 |    186 |     5 |    0 |     1 |    2 |    1 |     1 |    0 |     50 |    0 |    0 |    0 |    0 |    150 |    185 |       6 |       7 |       4 |       1 |     16 |     20 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        5 |        4 |        4 |       16 |       1 |        6 |        2 |        9 |        2 |       15 |       20 |       0 |        3 |        4 |        7 |        8 |       16 |       48 |       0 |        3 |        2 |        3 |       20 |       23 |       48 |       1 |        3 |        1 |        3 |        8 |        4 |        6 |       1 |        2 |        2 |        3 |        3 |        6 |        8 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        1 |        3 |        1 |       0 |      0 |      0 |     14 |      9 |      3 |      6 |      5 |     52 |      0 |      0 |      1 |     25 |     24 |      8 |      8 |     12 |    108 |      0 |      0 |      0 |      2 |     13 |      4 |      1 |      0 |     30 |      0 |      0 |      1 |      0 |      3 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1274000 |     382 |    111 |    186 |     4 |    0 |     4 |    1 |    0 |     2 |    0 |     74 |    0 |    0 |    0 |    0 |    197 |    185 |       7 |       1 |       2 |       0 |     27 |     21 |     13 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      7 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        6 |        6 |       15 |       13 |       2 |        3 |        6 |        8 |       12 |       18 |       15 |       2 |        8 |        8 |       12 |       11 |       22 |       25 |      10 |        7 |        7 |        9 |       11 |       23 |       19 |      14 |        2 |       10 |        7 |        7 |       11 |        6 |       3 |        3 |        5 |        6 |        3 |        8 |        1 |       2 |        2 |        3 |        2 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |     11 |     23 |     10 |      0 |      2 |     64 |      0 |      0 |      0 |     18 |     27 |     13 |      6 |      8 |    114 |      0 |      0 |      2 |     16 |      5 |      3 |      1 |      3 |     44 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1274100 |     339 |    111 |    145 |    11 |    0 |     0 |    1 |    1 |     3 |    0 |     67 |    0 |    0 |    0 |    0 |    160 |    179 |       4 |       8 |       5 |       1 |     36 |     18 |     10 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |        3 |        7 |        4 |        6 |        8 |       18 |       4 |        6 |        1 |       10 |       11 |        9 |       17 |       7 |        3 |        3 |       11 |       12 |       12 |       22 |       5 |        5 |        5 |       10 |       14 |       11 |       22 |      10 |        5 |        6 |        6 |        1 |       12 |        7 |       0 |        5 |        0 |        5 |        6 |        8 |        6 |       0 |        2 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        3 |        2 |        4 |        0 |        2 |       0 |      0 |      0 |     10 |     21 |      3 |      1 |      8 |     68 |      0 |      0 |      1 |     15 |     24 |      6 |     13 |     13 |     73 |      0 |      0 |      1 |     15 |      6 |      3 |      0 |      1 |     41 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 1275400 |     214 |     81 |    100 |     2 |    0 |     1 |    2 |    0 |     2 |    0 |     26 |    0 |    0 |    0 |    0 |     97 |    117 |       2 |       1 |       0 |       0 |     10 |     15 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        4 |       11 |        5 |        7 |       4 |        5 |        2 |        8 |       10 |        8 |        8 |       6 |        4 |        3 |        5 |       13 |        5 |       13 |       4 |        0 |        4 |        7 |        5 |        9 |       21 |       7 |        2 |        1 |        1 |        4 |        1 |        4 |       0 |        0 |        1 |        5 |        2 |        2 |        3 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |      0 |      0 |      4 |     19 |      3 |      1 |      0 |     54 |      0 |      0 |      2 |      7 |     18 |      3 |      3 |      1 |     66 |      0 |      0 |      1 |      1 |      6 |      3 |      1 |      2 |     12 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1275500 |     331 |    100 |    146 |     6 |    0 |     3 |    6 |    0 |     5 |    0 |     65 |    0 |    0 |    0 |    0 |    139 |    192 |       7 |       4 |       0 |       3 |     13 |      9 |      9 |      0 |      0 |      2 |      1 |      0 |      1 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        2 |        7 |        2 |        6 |        9 |       12 |       0 |        4 |       10 |        4 |       11 |        7 |       25 |       1 |        0 |       14 |       11 |        6 |        5 |       29 |       0 |        5 |        8 |        4 |        4 |       15 |       42 |       3 |        3 |        5 |        3 |        1 |        2 |       15 |       0 |        3 |        5 |        3 |        2 |        6 |       16 |       1 |        1 |        1 |        1 |        2 |        0 |        2 |       0 |        1 |        2 |        1 |        2 |        5 |        2 |       0 |      0 |      1 |     26 |     13 |      2 |      3 |      3 |     52 |      0 |      0 |      0 |     20 |     16 |      7 |      9 |      5 |     89 |      0 |      0 |      0 |      9 |      7 |      3 |      0 |      3 |     43 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1276000 |     401 |    154 |    161 |     4 |    0 |     7 |    0 |    1 |     3 |    0 |     71 |    0 |    0 |    0 |    0 |    199 |    202 |       1 |       0 |       0 |       0 |     39 |     11 |     14 |      0 |      0 |      0 |      1 |      1 |      2 |      2 |      2 |      0 |      2 |      5 |      3 |      0 |      0 |      3 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        2 |        1 |        6 |        6 |       16 |       26 |      12 |        3 |        3 |        8 |        7 |        8 |       34 |      22 |        4 |        6 |        8 |        9 |       14 |       38 |       4 |        3 |        4 |        8 |        8 |       16 |       31 |       8 |        5 |        6 |        2 |        6 |        7 |       13 |       0 |        3 |        5 |        5 |        4 |        8 |        6 |       1 |        2 |        0 |        1 |        1 |        1 |        3 |       0 |        1 |        2 |        1 |        1 |        0 |        2 |       0 |      0 |      0 |      9 |     29 |      9 |     11 |      7 |     89 |      0 |      0 |      0 |     13 |     31 |      5 |      7 |     12 |     93 |      0 |      0 |      1 |      6 |     16 |      2 |      0 |      4 |     42 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1276500 |     211 |     80 |     92 |     3 |    0 |     0 |    0 |    0 |     3 |    0 |     33 |    0 |    0 |    0 |    0 |    102 |    109 |       1 |       2 |       0 |       1 |     16 |     11 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        2 |        2 |        4 |        6 |        7 |       10 |       5 |        4 |        3 |        5 |        5 |        7 |       11 |       9 |        4 |        2 |        5 |       10 |        7 |       10 |       8 |        1 |        7 |        7 |        7 |        5 |       13 |       6 |        3 |        2 |        4 |        3 |        2 |        2 |       1 |        0 |        1 |        4 |        6 |        2 |        1 |       2 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |      0 |      0 |      9 |     19 |      1 |      0 |      5 |     46 |      0 |      0 |      0 |      8 |     16 |      7 |      0 |      5 |     56 |      0 |      0 |      0 |      8 |      4 |      4 |      0 |      1 |     16 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1277000 |     459 |    220 |    148 |     5 |    0 |     2 |    3 |    0 |     3 |    0 |     78 |    0 |    0 |    0 |    0 |    202 |    257 |      10 |       5 |       0 |       0 |     40 |      9 |      7 |      3 |      1 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      3 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        4 |        6 |       13 |       17 |       22 |       19 |       4 |       10 |       14 |       11 |       27 |       40 |       25 |       8 |        5 |        6 |       15 |       14 |       10 |       21 |       5 |        2 |        2 |       17 |       15 |        7 |       22 |       7 |        5 |        6 |        3 |       14 |        6 |        2 |       0 |        7 |        6 |       10 |       11 |        5 |        3 |       0 |        1 |        2 |        1 |        0 |        0 |        1 |       0 |        1 |        3 |        1 |        1 |        1 |        1 |       0 |      0 |      3 |     17 |     31 |     15 |      8 |      9 |    137 |      0 |      0 |      3 |     15 |     25 |      3 |      5 |      5 |     92 |      0 |      0 |      0 |     14 |      5 |      4 |      2 |      2 |     51 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1277100 |     478 |    172 |    206 |     3 |    0 |     2 |    2 |    2 |     1 |    0 |     90 |    0 |    0 |    0 |    0 |    238 |    240 |       5 |       3 |       2 |       0 |     54 |     30 |     17 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      6 |      0 |      0 |      0 |      2 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        7 |       10 |       19 |       13 |       16 |      10 |       10 |        8 |       10 |       26 |       16 |       12 |      10 |        7 |        4 |       10 |       10 |       26 |       39 |       9 |        3 |        3 |        7 |       17 |       22 |       36 |      13 |        6 |        1 |        6 |       14 |       11 |        7 |       1 |       10 |        2 |        8 |       11 |        7 |        6 |       0 |        5 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |      0 |      1 |     17 |     15 |      7 |      4 |     10 |    118 |      0 |      0 |      0 |     31 |     29 |      7 |      4 |      8 |    127 |      0 |      0 |      1 |     20 |      7 |      1 |      1 |      8 |     52 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1300000 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1300200 |      13 |      3 |      2 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |      9 |      4 |       0 |       0 |       1 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1300300 |     502 |    159 |    197 |    13 |    0 |     3 |    6 |    2 |     3 |    0 |    119 |    0 |    0 |    0 |    0 |    223 |    279 |      22 |      26 |      16 |       3 |      5 |      3 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      5 |      3 |      8 |      0 |      1 |      2 |      0 |      0 |       4 |      16 |       4 |       2 |     15 |     12 |     10 |      2 |        3 |       16 |       18 |       10 |        9 |        4 |       0 |        8 |       21 |       27 |       21 |       14 |        8 |       0 |        9 |       19 |       33 |       24 |        8 |        4 |       0 |        8 |       20 |       37 |       25 |        6 |        4 |       0 |        9 |       21 |        8 |        9 |        4 |        2 |       0 |       10 |       22 |       16 |        9 |        6 |        3 |       0 |        1 |        4 |        2 |        4 |        2 |        0 |       0 |        1 |        6 |        6 |        1 |        0 |        0 |       0 |      0 |      0 |     27 |     27 |     12 |      1 |      7 |     85 |      0 |      0 |      0 |     23 |     31 |     16 |      6 |      2 |    119 |      0 |      0 |      4 |     10 |     15 |      9 |      0 |      0 |     81 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 1300400 |       3 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1300500 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1300700 |     303 |    100 |    108 |     8 |    0 |     3 |    4 |    1 |     3 |    0 |     76 |    0 |    0 |    0 |    0 |    150 |    153 |       5 |       4 |       4 |       1 |      7 |      4 |      7 |      2 |      2 |      5 |      2 |      0 |      1 |      0 |      4 |      2 |      4 |      3 |      6 |      1 |      1 |      0 |      1 |      0 |       0 |       1 |       1 |       0 |      1 |      3 |      5 |      0 |        5 |        7 |        8 |       12 |        8 |        4 |       0 |        4 |        8 |       19 |       11 |       10 |        4 |       0 |        7 |       15 |       16 |       15 |        6 |        3 |       0 |        6 |        5 |       18 |       13 |        3 |        1 |       0 |        1 |        9 |       12 |        7 |        3 |        2 |       0 |        5 |        8 |       13 |        5 |        8 |        3 |       0 |        1 |        2 |        5 |        1 |        1 |        0 |       0 |        0 |        0 |        5 |        2 |        1 |        1 |       0 |      0 |      1 |     12 |     11 |     11 |      6 |      0 |     59 |      0 |      0 |      0 |      9 |      9 |      8 |     10 |      0 |     72 |      0 |      0 |      0 |      4 |      7 |      4 |      0 |      0 |     61 |      0 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1300800 |     250 |     67 |    115 |     3 |    0 |     1 |    0 |    0 |     3 |    0 |     61 |    0 |    0 |    0 |    0 |    114 |    136 |       9 |      11 |       6 |       2 |      3 |      3 |      5 |      1 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      2 |      2 |      6 |      0 |      1 |      0 |      0 |      0 |       5 |       9 |       7 |       1 |      7 |      8 |      2 |      0 |        3 |        9 |        4 |        5 |        1 |        3 |       0 |        3 |        8 |       10 |       12 |        5 |        4 |       0 |        5 |        8 |       19 |       12 |        6 |        5 |       0 |        2 |       15 |       25 |        7 |        7 |        4 |       0 |        3 |       13 |        6 |        5 |        3 |        1 |       0 |        2 |       12 |        9 |        4 |        2 |        1 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     10 |     15 |      1 |      3 |      0 |     38 |      0 |      0 |      0 |      8 |     46 |      2 |      1 |      0 |     58 |      0 |      0 |      0 |      7 |     14 |      1 |      2 |      0 |     37 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1300900 |     407 |    157 |    146 |     7 |    0 |     1 |    2 |    2 |     5 |    0 |     87 |    0 |    0 |    0 |    0 |    210 |    197 |       8 |       5 |       7 |       0 |      4 |      7 |      4 |      0 |      0 |      0 |      3 |      0 |      3 |      0 |      1 |      0 |      5 |     10 |      9 |      1 |      3 |      1 |      1 |      0 |       4 |       8 |       2 |       0 |      3 |      2 |      1 |      0 |        6 |       11 |       16 |       16 |       10 |        9 |       0 |        3 |       14 |       33 |       24 |       10 |        5 |       0 |        3 |        8 |       35 |       21 |       12 |        6 |       0 |        3 |        6 |       24 |       16 |        7 |        5 |       0 |        6 |        5 |       18 |        9 |        5 |        4 |       0 |        5 |        6 |       16 |        9 |        1 |        3 |       0 |        1 |        3 |        4 |        2 |        0 |        0 |       0 |        0 |        0 |        3 |        4 |        0 |        0 |       0 |      0 |      2 |     20 |     70 |      0 |      0 |      0 |     65 |      0 |      0 |      0 |     23 |     65 |      0 |      0 |      0 |     58 |      0 |      0 |      1 |     13 |     22 |      0 |      0 |      0 |     51 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1301000 |     387 |    130 |    135 |     8 |    0 |     4 |    3 |    1 |     2 |    0 |    104 |    0 |    0 |    0 |    0 |    181 |    206 |      14 |      16 |       8 |       2 |     10 |      7 |      6 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |       1 |       1 |       2 |       0 |      3 |      0 |      2 |      0 |        4 |       15 |       12 |        6 |        8 |        1 |       0 |        6 |       25 |       20 |       19 |        7 |        7 |       0 |        7 |       26 |       13 |       11 |        6 |        2 |       0 |        8 |       21 |       16 |        9 |        9 |        7 |       0 |        5 |       28 |       13 |        9 |        2 |        3 |       0 |        7 |       13 |        8 |       12 |        4 |        0 |       0 |        1 |        5 |        2 |        1 |        1 |        0 |       0 |        2 |        2 |        2 |        1 |        0 |        1 |       0 |      0 |      1 |     12 |     14 |      5 |      3 |      1 |     94 |      0 |      0 |      0 |     11 |      9 |      1 |      2 |      3 |    109 |      0 |      0 |      3 |     14 |      3 |      3 |      2 |      1 |     78 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1301100 |     432 |    151 |    171 |     5 |    0 |     2 |    1 |    1 |     5 |    0 |     96 |    0 |    0 |    0 |    0 |    215 |    217 |      10 |       1 |       6 |       0 |      9 |     10 |      4 |      2 |      0 |      0 |      4 |      1 |      1 |      1 |      2 |      0 |      9 |      7 |     10 |      2 |      3 |      0 |      3 |      0 |       5 |       9 |       4 |       0 |      2 |      5 |      2 |      0 |        3 |       10 |       25 |       21 |        6 |        5 |       0 |        5 |       13 |       32 |       18 |        7 |        6 |       0 |        2 |       19 |       36 |       12 |       10 |        8 |       0 |        5 |       17 |       32 |       16 |       10 |        4 |       0 |        3 |       13 |       17 |       14 |        0 |        4 |       0 |        4 |       12 |       15 |       10 |        2 |        2 |       0 |        0 |        1 |        3 |        2 |        1 |        0 |       0 |        0 |        3 |        2 |        1 |        0 |        1 |       0 |      0 |      7 |     55 |      6 |      0 |      0 |      0 |     83 |      0 |      0 |      5 |     49 |     15 |      0 |      0 |      0 |    102 |      0 |      0 |      2 |     29 |      4 |      0 |      0 |      0 |     61 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1301200 |       2 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1301300 |       7 |      3 |      1 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1301500 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1301900 |     581 |    210 |    211 |    12 |    0 |     4 |    6 |    0 |     6 |    0 |    132 |    0 |    0 |    0 |    0 |    270 |    311 |      45 |      45 |      20 |       6 |      7 |      7 |      6 |      2 |      0 |      2 |      5 |      0 |      2 |      0 |      1 |      0 |      4 |      6 |      8 |      0 |      3 |      3 |      1 |      0 |       6 |       9 |      10 |       0 |     14 |     27 |     18 |      2 |        1 |       18 |       26 |       15 |        9 |       10 |       0 |        8 |       38 |       37 |       24 |        9 |       15 |       0 |       11 |       26 |       33 |       23 |       14 |        9 |       0 |        6 |       23 |       25 |       17 |       10 |       14 |       0 |        4 |       16 |       19 |       14 |        3 |        4 |       0 |        7 |       18 |       16 |       18 |        5 |        8 |       0 |        0 |        3 |        3 |        6 |        2 |        1 |       0 |        2 |        5 |        3 |        1 |        2 |        0 |       0 |      0 |      2 |     25 |     40 |      4 |      1 |      1 |    137 |      0 |      0 |      3 |     21 |     44 |      9 |      2 |      4 |    128 |      0 |      0 |      2 |     18 |      9 |      0 |      0 |      0 |    103 |      0 |      0 |      0 |      4 |      3 |      2 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1302000 |     391 |    111 |    157 |    13 |    0 |     7 |    2 |    1 |     3 |    0 |     97 |    0 |    0 |    0 |    0 |    185 |    206 |      12 |      12 |       9 |       3 |      3 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      1 |      0 |      0 |      0 |       6 |       7 |       1 |       0 |      3 |      6 |      3 |      0 |        3 |       12 |       11 |       11 |        6 |        6 |       4 |        7 |        9 |        8 |        8 |       13 |       10 |       3 |        7 |       12 |       12 |       19 |       12 |       11 |       3 |        6 |       19 |       13 |       16 |       15 |        9 |       3 |        8 |       11 |        7 |       10 |        5 |        5 |       0 |       12 |       15 |        4 |        6 |        7 |        6 |       1 |        1 |        2 |        2 |        2 |        2 |        1 |       0 |        2 |        3 |        3 |        4 |        3 |        1 |       0 |      0 |      0 |     16 |     17 |      2 |      4 |      3 |     69 |      0 |      0 |      2 |     21 |     25 |      6 |      5 |     12 |     86 |      0 |      0 |      2 |     11 |     12 |      3 |      1 |      0 |     68 |      0 |      0 |      0 |      3 |      9 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1302100 |     881 |    273 |    341 |    20 |    0 |     9 |   11 |    2 |     6 |    0 |    219 |    0 |    0 |    0 |    0 |    399 |    482 |      39 |      44 |      18 |       6 |     13 |     13 |     11 |      3 |      1 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      4 |      5 |      7 |      0 |      0 |      3 |      1 |      0 |       6 |      19 |       9 |       0 |     18 |     30 |     19 |      2 |        5 |       29 |       23 |       21 |       15 |       13 |       1 |       10 |       38 |       35 |       45 |       13 |       23 |       2 |       13 |       38 |       41 |       39 |       15 |       16 |       0 |        8 |       39 |       40 |       43 |       25 |       24 |       0 |       13 |       33 |       30 |       17 |        4 |       11 |       0 |       23 |       32 |       25 |       15 |        9 |        6 |       1 |        1 |       12 |        4 |        1 |        4 |        0 |       0 |        5 |       11 |        2 |        5 |        2 |        1 |       0 |      0 |      0 |     29 |     40 |     10 |      8 |     14 |    172 |      0 |      0 |      0 |     45 |     49 |     11 |     14 |     23 |    199 |      0 |      0 |      3 |     22 |     24 |      9 |      6 |      1 |    154 |      0 |      0 |      0 |      6 |      7 |      0 |      1 |      1 |     33 |      0 |     37 | s03      | R    |
| 1302200 |     381 |    114 |    159 |     9 |    0 |     1 |    3 |    1 |     3 |    0 |     91 |    0 |    0 |    0 |    0 |    188 |    193 |      18 |      19 |      14 |       1 |      5 |      7 |      0 |      0 |      2 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      4 |      5 |      1 |      0 |      0 |      0 |      3 |      0 |       5 |       9 |       8 |       0 |      3 |      8 |      1 |      0 |        9 |        7 |       10 |        9 |        6 |        7 |       3 |        6 |        6 |        8 |       18 |       11 |        8 |       6 |        8 |       15 |       13 |       20 |       18 |        8 |       1 |        6 |       19 |       16 |       15 |       15 |        3 |       2 |       11 |        8 |        5 |       12 |        3 |        3 |       0 |       11 |       13 |        7 |        7 |        6 |        5 |       0 |        1 |        3 |        3 |        2 |        2 |        1 |       0 |        2 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      1 |      9 |      8 |      2 |      1 |      4 |     89 |      0 |      0 |      0 |     23 |     27 |      8 |      2 |      5 |     94 |      0 |      0 |      0 |     10 |     10 |      3 |      3 |      2 |     63 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1302300 |     421 |    117 |    181 |    14 |    0 |     5 |    1 |    2 |     6 |    0 |     95 |    0 |    0 |    0 |    0 |    215 |    206 |      25 |      25 |      12 |       1 |      2 |      9 |      4 |      1 |      0 |      4 |      0 |      1 |      1 |      3 |      0 |      0 |      2 |      2 |      2 |      1 |      0 |      1 |      0 |      0 |       4 |       9 |      10 |       2 |      9 |      9 |      8 |      0 |        4 |        6 |        7 |       11 |       15 |        6 |       1 |        3 |       11 |       10 |       19 |       16 |        5 |       3 |       10 |        9 |       20 |       26 |       17 |       10 |       7 |        7 |       15 |       21 |       13 |       16 |        7 |       3 |        6 |       10 |       11 |       10 |       11 |        3 |       0 |        4 |       11 |        6 |        9 |       13 |        1 |       0 |        0 |        3 |        7 |        1 |        3 |        1 |       0 |        2 |        5 |        1 |        3 |        2 |        0 |       0 |      0 |      1 |     12 |     18 |      7 |      4 |      1 |     74 |      0 |      0 |      1 |     15 |     27 |     20 |      5 |     13 |    100 |      0 |      0 |      0 |     15 |     20 |      6 |      3 |      3 |     48 |      0 |      0 |      0 |      7 |     10 |      1 |      0 |      2 |      8 |      0 |     37 | s03      | R    |
| 1302400 |     336 |    108 |    137 |     8 |    0 |     4 |    2 |    0 |     1 |    0 |     76 |    0 |    0 |    0 |    0 |    186 |    150 |      23 |      17 |       6 |       3 |      0 |      3 |      3 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       4 |       4 |       0 |      3 |      8 |      5 |      1 |        7 |        9 |       10 |       10 |       11 |        2 |       3 |        4 |       13 |        9 |       16 |        8 |        3 |       3 |        3 |       16 |       20 |       18 |       13 |        4 |       3 |        4 |       22 |       12 |        8 |        8 |        5 |       1 |       11 |       12 |        9 |        5 |        4 |        2 |       2 |        6 |        9 |        7 |        3 |        3 |        1 |       2 |        2 |        2 |        4 |        3 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     16 |      8 |      4 |      0 |      2 |     78 |      0 |      0 |      0 |     17 |     21 |      8 |      9 |      6 |     76 |      0 |      0 |      1 |      9 |      5 |      4 |      1 |      0 |     56 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      1 |      9 |      0 |     37 | s03      | R    |
| 1302500 |     366 |    129 |    132 |     8 |    0 |     5 |    2 |    0 |     3 |    0 |     87 |    0 |    0 |    0 |    0 |    182 |    184 |      11 |      22 |      11 |       3 |      8 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       7 |       5 |       4 |       0 |      2 |      9 |      6 |      0 |        2 |        8 |        8 |       17 |       13 |        6 |       2 |        2 |       15 |       12 |       21 |       15 |        4 |       4 |        9 |       16 |       19 |       11 |        9 |        8 |       1 |        5 |       14 |       10 |       13 |       10 |        5 |       2 |        3 |        6 |       12 |        9 |        4 |        5 |       2 |        1 |       12 |       12 |       11 |        4 |        4 |       2 |        0 |        6 |        1 |        2 |        1 |        2 |       0 |        0 |        1 |        0 |        2 |        1 |        2 |       0 |      0 |      0 |      8 |     15 |     11 |      8 |      8 |     79 |      0 |      0 |      1 |      9 |     12 |      9 |      7 |     10 |     84 |      0 |      0 |      1 |     12 |     11 |      2 |      0 |      3 |     58 |      0 |      0 |      0 |      5 |      8 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1302600 |     542 |    169 |    217 |    12 |    0 |     4 |    1 |    2 |     1 |    0 |    136 |    0 |    0 |    0 |    0 |    268 |    274 |      33 |      33 |      18 |       1 |      7 |      5 |      5 |      1 |      2 |      3 |      0 |      2 |      1 |      1 |      2 |      0 |      2 |      4 |      8 |      0 |      1 |      0 |      0 |      0 |       2 |      13 |       7 |       0 |      7 |     34 |     26 |      1 |        8 |       19 |       19 |       11 |       16 |        8 |       1 |       10 |       31 |       16 |       17 |        6 |        7 |       0 |        7 |       25 |       23 |       21 |       20 |       10 |       0 |       15 |       27 |       18 |       24 |       13 |       13 |       1 |       16 |       18 |       11 |       12 |        9 |        6 |       0 |       14 |       17 |        9 |       11 |        9 |        4 |       0 |        1 |        3 |        2 |        0 |        1 |        1 |       0 |        5 |        2 |        1 |        3 |        1 |        0 |       0 |      0 |      1 |     17 |     24 |      5 |      4 |      3 |    115 |      0 |      0 |      0 |     25 |     34 |     14 |      5 |      2 |    137 |      0 |      0 |      0 |     14 |     10 |      6 |      2 |      2 |    102 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |     14 |      0 |     37 | s03      | R    |
| 1302700 |     595 |    173 |    273 |    12 |    0 |     1 |    6 |    4 |     1 |    0 |    125 |    0 |    0 |    0 |    0 |    304 |    291 |      18 |      47 |      11 |       3 |      9 |      5 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |     17 |      8 |      0 |      1 |      2 |      1 |      2 |       9 |      32 |      11 |       2 |     21 |     21 |     18 |      1 |        5 |       16 |        9 |       21 |       15 |       10 |       5 |        9 |       20 |        9 |       21 |       16 |        7 |      10 |       19 |       24 |       23 |       32 |       26 |       12 |       8 |        8 |       30 |       22 |       27 |       20 |       15 |       7 |       13 |       17 |        9 |       12 |        4 |        7 |       2 |       11 |       10 |        8 |       15 |       12 |        5 |       0 |        2 |        2 |        2 |        5 |        3 |        1 |       0 |        2 |        3 |        1 |        1 |        2 |        0 |       0 |      0 |      0 |     22 |     22 |      9 |      4 |     11 |    105 |      0 |      0 |      2 |     24 |     42 |     21 |     13 |     21 |    150 |      0 |      0 |      3 |     12 |     18 |      7 |      6 |      5 |     74 |      0 |      0 |      1 |      6 |      4 |      3 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1302800 |     243 |     95 |     73 |    12 |    0 |     2 |    5 |    2 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    124 |    119 |      33 |      14 |       7 |       1 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      2 |      2 |      3 |      1 |      2 |      0 |      1 |      0 |       3 |       2 |       5 |       3 |      5 |      9 |      2 |      0 |        4 |        9 |       12 |        7 |       10 |        4 |       3 |        3 |       11 |        4 |       10 |       10 |        5 |       3 |        5 |        4 |        6 |       11 |        4 |        5 |       2 |        6 |        7 |        5 |        9 |        7 |        1 |       1 |        4 |        2 |        4 |        7 |        6 |        1 |       1 |        5 |        7 |        7 |        5 |        3 |        1 |       0 |        0 |        6 |        4 |        2 |        1 |        0 |       0 |        3 |        3 |        1 |        0 |        2 |        0 |       0 |      0 |      0 |     11 |     14 |      5 |      1 |      2 |     62 |      0 |      0 |      1 |      4 |     10 |      7 |      2 |      2 |     47 |      0 |      0 |      0 |     14 |      8 |      3 |      1 |      1 |     26 |      0 |      0 |      0 |      4 |      3 |      2 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 1302900 |     250 |     90 |    110 |     5 |    0 |     1 |    1 |    0 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |    132 |    118 |       6 |      12 |       7 |       0 |      1 |      6 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      0 |      0 |       5 |       7 |       2 |       0 |      4 |     11 |      3 |      0 |        4 |       10 |        9 |        4 |       10 |        4 |       4 |        7 |       10 |        5 |        8 |        7 |        4 |       4 |        6 |        9 |       16 |       16 |        9 |        6 |       1 |        2 |        6 |        8 |       12 |       10 |        6 |       3 |        1 |        7 |        6 |        4 |        2 |        1 |       0 |        3 |        6 |        2 |        4 |        4 |        3 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     13 |      7 |      9 |      5 |      6 |     50 |      0 |      0 |      1 |     13 |     15 |      6 |      0 |      8 |     67 |      0 |      0 |      0 |      4 |      7 |      6 |      1 |      0 |     25 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1303000 |     363 |    114 |    154 |     4 |    0 |     2 |    0 |    1 |     0 |    0 |     88 |    0 |    0 |    0 |    0 |    187 |    176 |      12 |      21 |      18 |       4 |      2 |      5 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      12 |      13 |       7 |       1 |      5 |     16 |     10 |      0 |        3 |        8 |       16 |        9 |        5 |        8 |       2 |        3 |        8 |       11 |       16 |       14 |        8 |       3 |        8 |       12 |       17 |       17 |       15 |       13 |       4 |        5 |       10 |       11 |       18 |        7 |       12 |       5 |        9 |        9 |        9 |        9 |        6 |        3 |       0 |       11 |       11 |        7 |        4 |        4 |        5 |       1 |        0 |        2 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |      8 |     13 |      3 |      2 |      5 |     81 |      0 |      0 |      1 |     10 |     31 |      7 |      7 |     12 |     86 |      0 |      0 |      0 |      6 |      9 |      2 |      3 |      6 |     62 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1303100 |     276 |     78 |    124 |     8 |    0 |     2 |    3 |    0 |     0 |    0 |     61 |    0 |    0 |    0 |    0 |    146 |    130 |      10 |      14 |       4 |       0 |      2 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |       5 |       8 |       4 |       0 |      7 |      8 |      2 |      1 |        3 |        5 |        8 |        5 |        4 |       11 |       2 |        3 |        6 |        5 |        9 |        6 |        9 |       2 |        5 |        8 |       14 |       15 |       10 |       15 |       0 |        4 |        9 |       11 |       13 |       10 |        7 |       3 |        3 |        8 |        8 |        4 |        3 |        5 |       1 |        9 |        5 |        7 |        3 |        2 |        3 |       0 |        0 |        3 |        2 |        1 |        1 |        2 |       0 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |      0 |      1 |     15 |     15 |      3 |      2 |      1 |     41 |      0 |      0 |      0 |     15 |      9 |      6 |      6 |      4 |     84 |      0 |      0 |      0 |     10 |      6 |      2 |      0 |      2 |     41 |      0 |      0 |      2 |      0 |      2 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1303200 |      87 |     26 |     41 |     1 |    0 |     0 |    0 |    0 |     2 |    0 |     17 |    0 |    0 |    0 |    0 |     36 |     51 |       0 |       7 |       2 |       0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        2 |        0 |        1 |        1 |       0 |        3 |        1 |        9 |        4 |        0 |        0 |       0 |        2 |        3 |        5 |        5 |        1 |        2 |       0 |        3 |        4 |        6 |        4 |        4 |        2 |       0 |        1 |        1 |        3 |        1 |        1 |        0 |       0 |        3 |        3 |        0 |        3 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      8 |      1 |      0 |      0 |      0 |     32 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1303300 |     494 |    158 |    209 |     9 |    0 |     7 |    6 |    3 |     1 |    0 |    101 |    0 |    0 |    0 |    0 |    254 |    240 |      29 |      20 |       5 |       1 |      3 |      5 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |       3 |      22 |       9 |       2 |      7 |     10 |      4 |      2 |        5 |        9 |        9 |       12 |       13 |       12 |      10 |        7 |       12 |       15 |       24 |       14 |       11 |       5 |        5 |       23 |       29 |       17 |       17 |       25 |       4 |        9 |       16 |       21 |        8 |       22 |        7 |       6 |        7 |        8 |       13 |        8 |        4 |        6 |       2 |       12 |       11 |        4 |        9 |        6 |        9 |       2 |        2 |        5 |        1 |        1 |        5 |        2 |       0 |        2 |        5 |        0 |        3 |        0 |        0 |       0 |      0 |      2 |     16 |     21 |      8 |      4 |      8 |     99 |      0 |      0 |      1 |     15 |     35 |     13 |     10 |     10 |    125 |      0 |      0 |      0 |     18 |     12 |      2 |      4 |      2 |     63 |      0 |      0 |      0 |      4 |     10 |      1 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 1303500 |     502 |    135 |    245 |    10 |    0 |     1 |    2 |    4 |     4 |    0 |    101 |    0 |    0 |    0 |    0 |    262 |    240 |      17 |      36 |       9 |       1 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      2 |     13 |      4 |      0 |      0 |      0 |      0 |      0 |      18 |      34 |      20 |       4 |     14 |     17 |      5 |      0 |        9 |        9 |       11 |       14 |        8 |       10 |       2 |       12 |       10 |       14 |       15 |        6 |       10 |       5 |       10 |       19 |       28 |       30 |       25 |       17 |       4 |       12 |       18 |       21 |       28 |       17 |       15 |       1 |        8 |        9 |        8 |       15 |        6 |        5 |       0 |        9 |        9 |       13 |       12 |        3 |        3 |       1 |        1 |        5 |        4 |        1 |        3 |        0 |       1 |        0 |        1 |        3 |        1 |        1 |        0 |       0 |      0 |      1 |     11 |     27 |      3 |      4 |      1 |     88 |      0 |      0 |      0 |     32 |     71 |     13 |     11 |      2 |    116 |      0 |      0 |      0 |      8 |     20 |      2 |      5 |      4 |     62 |      0 |      0 |      0 |      1 |      4 |      4 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 1303600 |     691 |    207 |    295 |    18 |    0 |     2 |    2 |    4 |     1 |    0 |    162 |    0 |    0 |    0 |    0 |    353 |    338 |      18 |      24 |      20 |       3 |      9 |     24 |      9 |      2 |      0 |      4 |      2 |      0 |      3 |      2 |      0 |      0 |     11 |     15 |     16 |      1 |      3 |      6 |      2 |      0 |       4 |       7 |       8 |       3 |      8 |     15 |     11 |      1 |       12 |       15 |       26 |       26 |       12 |        6 |       0 |       11 |       28 |       27 |       20 |       15 |        8 |       1 |        4 |       38 |       42 |       27 |       34 |       13 |       0 |       13 |       35 |       34 |       26 |       25 |        4 |       0 |       14 |       20 |       15 |       21 |        7 |        7 |       0 |        5 |       19 |       29 |       12 |        8 |        5 |       0 |        1 |        7 |        3 |        3 |        0 |        0 |       0 |        1 |        5 |        4 |        2 |        1 |        0 |       0 |      0 |      3 |     25 |     34 |      9 |      2 |      0 |    134 |      0 |      0 |      1 |     38 |     64 |     23 |      8 |      0 |    161 |      0 |      0 |      0 |     20 |     18 |      9 |      1 |      0 |    114 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1303700 |     590 |    176 |    286 |    11 |    0 |     4 |    1 |    1 |     4 |    0 |    107 |    0 |    0 |    0 |    0 |    288 |    302 |      19 |      20 |      13 |       2 |      6 |      9 |      3 |      1 |      0 |      0 |      1 |      0 |      2 |      1 |      1 |      0 |      2 |      5 |      5 |      0 |      0 |      3 |      2 |      0 |       7 |      21 |       3 |       0 |      8 |     32 |      5 |      1 |        6 |       12 |       12 |       15 |       13 |        9 |       9 |        7 |       18 |       20 |       15 |       19 |       11 |      10 |        8 |       32 |       29 |       35 |       23 |       15 |       5 |       15 |       21 |       30 |       30 |       20 |       14 |       9 |       12 |       12 |       19 |        4 |        4 |        1 |       2 |       12 |       12 |        9 |        9 |        6 |        3 |       2 |        2 |        1 |        1 |        4 |        1 |        2 |       0 |        3 |        3 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     14 |     23 |      6 |      3 |      9 |    121 |      0 |      0 |      2 |     27 |     47 |     20 |     16 |      8 |    166 |      0 |      0 |      2 |     12 |     14 |      7 |      1 |      2 |     69 |      0 |      0 |      1 |      3 |      6 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1303800 |     674 |    223 |    257 |    10 |    0 |     9 |    7 |    1 |     4 |    0 |    163 |    0 |    0 |    0 |    0 |    346 |    328 |      44 |      44 |      20 |       4 |     12 |     14 |      5 |      1 |      1 |      0 |      1 |      0 |      1 |      2 |      4 |      0 |      0 |      3 |      3 |      0 |      1 |      1 |      2 |      1 |       7 |      13 |       8 |       0 |     21 |     15 |     10 |      3 |       11 |       12 |       23 |       23 |       15 |       11 |       3 |       10 |       17 |       28 |       27 |       23 |       14 |       6 |       10 |       19 |       27 |       31 |       28 |       13 |       4 |       16 |       21 |       26 |       35 |       19 |        7 |       1 |       13 |       23 |       18 |       25 |       11 |        4 |       2 |       11 |       16 |       10 |       17 |        9 |        4 |       0 |        2 |        6 |        6 |        3 |        1 |        2 |       0 |        1 |        1 |        4 |        4 |        1 |        0 |       0 |      0 |      0 |     43 |     37 |     15 |      0 |     10 |    118 |      0 |      0 |      4 |     31 |     41 |     12 |     11 |     14 |    144 |      0 |      0 |      0 |     31 |     19 |      5 |      5 |      5 |     98 |      0 |      0 |      1 |      3 |      7 |      2 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1303900 |     153 |     49 |     70 |     4 |    0 |     0 |    2 |    1 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |     75 |     78 |       6 |      11 |       4 |       0 |      1 |      4 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      1 |      1 |      0 |        5 |        6 |        1 |        3 |        5 |        3 |       0 |        3 |        6 |        5 |        3 |        7 |        2 |       0 |        2 |        6 |        7 |        9 |        6 |        4 |       0 |        2 |        5 |        2 |       15 |        5 |        7 |       0 |        5 |        4 |        2 |        3 |        0 |        2 |       0 |        2 |        4 |        1 |        3 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |      9 |      3 |      1 |      2 |      6 |     28 |      0 |      0 |      2 |     11 |      7 |      4 |      4 |      3 |     39 |      0 |      0 |      0 |      8 |      3 |      1 |      1 |      0 |     14 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1304000 |     431 |    148 |    189 |     8 |    0 |     4 |    4 |    1 |     2 |    0 |     75 |    0 |    0 |    0 |    0 |    218 |    213 |      22 |      19 |       7 |       2 |      4 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      6 |      4 |      1 |      3 |      1 |      1 |      0 |       5 |       5 |       4 |       0 |      9 |      8 |      5 |      0 |        4 |       12 |       13 |       13 |       14 |        4 |       6 |        8 |       10 |       13 |       20 |       17 |        5 |       9 |        6 |       13 |       21 |       24 |       17 |       14 |       6 |       10 |       15 |       15 |       15 |       19 |       13 |       1 |        2 |       15 |        4 |       10 |        9 |        4 |       0 |        9 |        8 |        6 |        6 |        2 |        0 |       0 |        3 |        1 |        1 |        0 |        2 |        0 |       0 |        2 |        2 |        3 |        4 |        1 |        0 |       0 |      0 |      0 |     22 |     19 |     17 |      5 |      2 |     83 |      0 |      0 |      1 |     24 |     30 |      9 |      4 |     10 |    111 |      0 |      0 |      0 |     12 |     11 |      3 |      2 |      1 |     46 |      0 |      0 |      0 |      5 |      2 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1304100 |     496 |    170 |    210 |     5 |    0 |     6 |    5 |    0 |     4 |    0 |     96 |    0 |    0 |    0 |    0 |    245 |    251 |      28 |      18 |       9 |       1 |     10 |      6 |      9 |      1 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      4 |      2 |      2 |      1 |      1 |      1 |      0 |      0 |       4 |      10 |       3 |       1 |      9 |     10 |      6 |      0 |        6 |       14 |       13 |       21 |       13 |       10 |       2 |        9 |       12 |       18 |       22 |       18 |       10 |       2 |        8 |       21 |       29 |       19 |       18 |       13 |       3 |       10 |       18 |       22 |       12 |       16 |       16 |       5 |        4 |       11 |       15 |        6 |        6 |        0 |       3 |       13 |        8 |        8 |       11 |        7 |        4 |       0 |        1 |        3 |        2 |        3 |        1 |        0 |       0 |        1 |        4 |        4 |        0 |        1 |        0 |       0 |      0 |      2 |     20 |     27 |      9 |      2 |      5 |    105 |      0 |      0 |      2 |     21 |     27 |     14 |      7 |      5 |    134 |      0 |      0 |      0 |     10 |     11 |      4 |      2 |      2 |     67 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1304200 |     360 |    113 |    158 |     9 |    0 |     3 |    6 |    2 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    189 |    171 |      19 |      14 |       7 |       1 |      7 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      2 |      0 |      1 |      2 |      0 |      3 |      1 |      0 |       2 |      10 |       5 |       1 |      7 |     14 |     10 |      3 |        7 |        9 |        5 |        8 |       10 |        6 |       3 |        8 |       10 |       13 |       10 |       13 |        5 |       6 |        9 |       17 |       13 |       24 |       17 |       10 |       3 |        5 |       13 |        9 |       16 |       11 |        9 |       2 |       11 |        6 |        6 |        5 |        4 |        4 |       0 |        3 |       10 |        3 |        6 |        6 |        4 |       0 |        2 |        4 |        1 |        4 |        1 |        0 |       0 |        1 |        2 |        1 |        0 |        5 |        0 |       0 |      0 |      0 |     17 |     10 |      5 |      0 |      2 |     79 |      0 |      0 |      1 |     16 |     28 |     13 |      6 |      9 |     85 |      0 |      0 |      0 |      6 |      8 |      1 |      2 |      4 |     47 |      0 |      0 |      0 |      1 |      6 |      2 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 1304300 |     408 |    138 |    171 |     4 |    0 |     4 |    3 |    0 |     5 |    0 |     83 |    0 |    0 |    0 |    0 |    214 |    194 |      35 |      31 |      31 |       4 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      3 |      8 |      5 |      0 |      1 |      0 |      1 |      0 |       3 |       7 |       1 |       2 |     10 |     24 |      7 |      0 |        7 |       11 |       10 |       20 |        8 |        6 |       1 |       11 |       12 |        9 |       25 |        8 |       10 |       0 |       14 |       19 |       20 |       28 |        6 |       13 |       0 |        6 |       12 |       13 |       23 |        8 |        9 |       0 |        8 |        8 |        2 |        8 |       10 |        4 |       0 |        9 |        8 |        8 |       11 |        4 |        3 |       0 |        1 |        4 |        4 |        1 |        0 |        1 |       0 |        2 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |     13 |     25 |     11 |      4 |      9 |     76 |      0 |      0 |      0 |     15 |     44 |     17 |      9 |     12 |     74 |      0 |      0 |      2 |     10 |     14 |      4 |      4 |      3 |     46 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1304400 |     519 |    188 |    206 |     7 |    0 |     3 |    2 |    5 |     0 |    0 |    108 |    0 |    0 |    0 |    0 |    270 |    249 |      40 |      17 |      10 |       1 |      3 |      6 |      3 |      1 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      12 |       8 |       3 |       1 |      7 |     16 |      7 |      0 |       13 |       13 |       20 |       12 |       15 |       11 |       4 |       10 |       16 |       15 |       23 |       21 |       11 |       4 |        5 |       18 |       32 |       28 |       25 |        5 |       3 |        6 |       16 |       26 |       17 |       19 |        5 |       1 |        6 |       10 |       14 |       15 |        6 |        4 |       2 |        5 |       12 |       11 |        8 |       11 |        4 |       0 |        1 |        3 |        4 |        0 |        0 |        0 |       1 |        1 |        3 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     16 |     32 |     11 |      2 |     10 |    117 |      0 |      0 |      1 |     24 |     47 |     10 |     12 |      8 |    104 |      0 |      0 |      0 |     18 |     14 |      6 |      5 |      0 |     65 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1304500 |     427 |    120 |    187 |     4 |    0 |     3 |    6 |    1 |     4 |    0 |    102 |    0 |    0 |    0 |    0 |    224 |    203 |      18 |      24 |      18 |       1 |      1 |      3 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      4 |      6 |      1 |      1 |      0 |      4 |      0 |      12 |      17 |      10 |       1 |     13 |     37 |     14 |      1 |        3 |        9 |       14 |       12 |        9 |        2 |       0 |        5 |       13 |       26 |       13 |       10 |        4 |       0 |       14 |       12 |       30 |       26 |       19 |        7 |       0 |        6 |       18 |       15 |       22 |       14 |        4 |       0 |        8 |        5 |       11 |       17 |       14 |        3 |       0 |       10 |        6 |       10 |       10 |        5 |        2 |       1 |        0 |        1 |        5 |        2 |        1 |        0 |       0 |        0 |        2 |        1 |        3 |        2 |        1 |       0 |      0 |      0 |     14 |     21 |      9 |     13 |      3 |     60 |      0 |      0 |      0 |     30 |     33 |     16 |     30 |     10 |     68 |      0 |      0 |      0 |      9 |     15 |      6 |     13 |      4 |     55 |      0 |      0 |      0 |      3 |      4 |      4 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 1304600 |     410 |    126 |    178 |     5 |    0 |     1 |    1 |    1 |     2 |    0 |     96 |    0 |    0 |    0 |    0 |    224 |    186 |      24 |      21 |      17 |       1 |      6 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      1 |      0 |      0 |       4 |      17 |       8 |       1 |     10 |     26 |      7 |      0 |        6 |       11 |       15 |       11 |        6 |       13 |       2 |        4 |        8 |       12 |       14 |        9 |       10 |       5 |       12 |       15 |       27 |       22 |       17 |        7 |       1 |        8 |       11 |       20 |       19 |        9 |        8 |       2 |        8 |        5 |       19 |        7 |        9 |        2 |       1 |       12 |        5 |       13 |        7 |        5 |        2 |       1 |        0 |        3 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     19 |     14 |      9 |      7 |      2 |     75 |      0 |      0 |      0 |     20 |     32 |     11 |     13 |      7 |     95 |      0 |      0 |      3 |     11 |      8 |      6 |      8 |      1 |     59 |      0 |      0 |      0 |      3 |      1 |      0 |      3 |      1 |      2 |      0 |     37 | s03      | R    |
| 1304700 |     891 |    259 |    389 |    19 |    0 |    12 |    7 |    6 |     7 |    0 |    192 |    0 |    0 |    0 |    0 |    451 |    440 |      50 |      48 |      25 |       2 |     10 |     21 |     11 |      5 |      0 |      2 |      0 |      0 |      1 |      1 |      1 |      0 |      4 |      3 |      5 |      0 |      0 |      0 |      1 |      0 |      15 |      23 |      15 |       6 |     11 |     17 |     12 |      2 |        6 |       25 |       22 |       30 |       18 |        5 |       7 |       11 |       29 |       23 |       46 |       20 |        9 |       8 |       13 |       40 |       52 |       61 |       26 |       10 |       2 |       15 |       28 |       42 |       61 |       19 |       15 |       5 |       13 |       25 |       21 |       29 |        9 |        2 |       2 |       19 |       30 |       17 |       12 |        8 |        4 |       1 |        4 |       13 |        9 |        4 |        3 |        0 |       0 |        6 |        6 |        4 |        1 |        1 |        0 |       0 |      0 |      1 |     40 |     37 |     19 |     12 |      9 |    141 |      0 |      0 |      2 |     50 |     64 |     28 |     17 |     23 |    205 |      0 |      0 |      3 |     26 |     16 |      9 |      6 |      3 |    129 |      0 |      0 |      1 |      6 |     13 |      2 |      0 |      1 |     28 |      0 |     37 | s03      | R    |
| 1304800 |     589 |    201 |    253 |     8 |    0 |     8 |    6 |    3 |     5 |    0 |    105 |    0 |    0 |    0 |    0 |    295 |    294 |      24 |      37 |      15 |       1 |      7 |      5 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      7 |      0 |      1 |      0 |      0 |      0 |      1 |      13 |      17 |       3 |       1 |     15 |     20 |     13 |      0 |        9 |       13 |       18 |       23 |        9 |       16 |       4 |       12 |       15 |       21 |       22 |       12 |       19 |       8 |        9 |       22 |       29 |       31 |       18 |       17 |       6 |       18 |       15 |       24 |       30 |       16 |       12 |       6 |       10 |        9 |        9 |       12 |        4 |        5 |       3 |        7 |       18 |        5 |       12 |        3 |        6 |       2 |        3 |        5 |        4 |        4 |        2 |        1 |       0 |        3 |        3 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |     21 |     24 |      5 |      1 |      5 |    145 |      0 |      0 |      0 |     28 |     45 |     15 |      6 |      5 |    154 |      0 |      0 |      0 |     21 |     10 |      1 |      1 |      0 |     72 |      0 |      0 |      0 |      2 |     11 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1305000 |     848 |    284 |    342 |    23 |    0 |     4 |    7 |    3 |     8 |    0 |    177 |    0 |    0 |    0 |    0 |    439 |    409 |      62 |      63 |      27 |       5 |      2 |      7 |      2 |      2 |      2 |      5 |      1 |      0 |      0 |      0 |      1 |      0 |      2 |      8 |      6 |      0 |      0 |      1 |      0 |      1 |      17 |      26 |       9 |       2 |     24 |     27 |     17 |      1 |       15 |       26 |       22 |       26 |       22 |       16 |      11 |       15 |       25 |       33 |       20 |       28 |       13 |      12 |       18 |       37 |       40 |       33 |       18 |       25 |       6 |       19 |       32 |       42 |       26 |       19 |       19 |       8 |       16 |       24 |       21 |       15 |       13 |        9 |       0 |       17 |       29 |       14 |        7 |        8 |        4 |       0 |        2 |       12 |        6 |        2 |        3 |        1 |       0 |        6 |        5 |        7 |        1 |        0 |        0 |       0 |      0 |      0 |     39 |     21 |     14 |      7 |     12 |    191 |      0 |      0 |      0 |     37 |     39 |     20 |     15 |      3 |    228 |      0 |      0 |      0 |     21 |      8 |      8 |      2 |      2 |    136 |      0 |      0 |      0 |      3 |     10 |      0 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 1305100 |     599 |    200 |    238 |    18 |    0 |     7 |    8 |    0 |     3 |    0 |    125 |    0 |    0 |    0 |    0 |    306 |    293 |      27 |      37 |      20 |       7 |      6 |     10 |      5 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      9 |      1 |      1 |      0 |      0 |      0 |      0 |       5 |      14 |       7 |       2 |     19 |     19 |      8 |      0 |       11 |       14 |       13 |       29 |        8 |        8 |       1 |       18 |       17 |       26 |       26 |       13 |       10 |       6 |       11 |       26 |       26 |       26 |       21 |       15 |       9 |        8 |       29 |        9 |       17 |       13 |       20 |       8 |       17 |       17 |        7 |       10 |        9 |        4 |       3 |       12 |       20 |        8 |        7 |        3 |        7 |       1 |        2 |        8 |        6 |        4 |        1 |        0 |       0 |        2 |        8 |        2 |        2 |        1 |        0 |       0 |      0 |      2 |     20 |     20 |      3 |      0 |      8 |    147 |      0 |      0 |      2 |     28 |     27 |     13 |      5 |     12 |    151 |      0 |      0 |      0 |     18 |     10 |      4 |      5 |      0 |     88 |      0 |      0 |      0 |      6 |      2 |      0 |      2 |      1 |     25 |      0 |     37 | s03      | R    |
| 1305200 |     247 |     78 |    107 |     2 |    0 |     1 |    1 |    1 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    119 |    128 |      13 |      16 |      11 |       0 |      1 |      7 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |       4 |       5 |       4 |       0 |     17 |     22 |      6 |      2 |        2 |        5 |        9 |        7 |        7 |        6 |       1 |        6 |       11 |        7 |        6 |        6 |        4 |       1 |        1 |        7 |       12 |       16 |       13 |        5 |       0 |        4 |       11 |        8 |       11 |       11 |        8 |       0 |        4 |        7 |        4 |        4 |        3 |        0 |       1 |        6 |        6 |        7 |        7 |        6 |        0 |       0 |        1 |        1 |        2 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     10 |     12 |      4 |      4 |      3 |     45 |      0 |      0 |      0 |     14 |     24 |      5 |      2 |      6 |     56 |      0 |      0 |      0 |      6 |      8 |      7 |      1 |      0 |     33 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1305300 |     336 |    102 |    131 |    11 |    0 |     3 |    0 |    2 |     2 |    0 |     85 |    0 |    0 |    0 |    0 |    170 |    166 |      12 |      15 |      10 |       2 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |       5 |      12 |      14 |       3 |     11 |     12 |      5 |      1 |        6 |        6 |       11 |       10 |        4 |        5 |       0 |        3 |       13 |       11 |       17 |        8 |        8 |       0 |        5 |       16 |       23 |       19 |        6 |        7 |       0 |        1 |        6 |       19 |       16 |        6 |        7 |       0 |        7 |        8 |       10 |       12 |        5 |        1 |       0 |        6 |       10 |        9 |       14 |        1 |        2 |       0 |        0 |        3 |        1 |        3 |        0 |        1 |       1 |        2 |        2 |        2 |        2 |        0 |        1 |       0 |      0 |      1 |     11 |     19 |      4 |      7 |      5 |     55 |      0 |      0 |      1 |     20 |     25 |     12 |      4 |      4 |     65 |      0 |      0 |      1 |     11 |     12 |      8 |      0 |      3 |     50 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1305400 |     173 |     48 |     78 |     4 |    0 |     1 |    1 |    0 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |     87 |     86 |       5 |      18 |       9 |       0 |      4 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       4 |       4 |       3 |       0 |      4 |     11 |      4 |      0 |        0 |        2 |        3 |        4 |        7 |        2 |       0 |        4 |        3 |        7 |        6 |        7 |        3 |       0 |        7 |        9 |        6 |       11 |        5 |        5 |       0 |        2 |        7 |        9 |        7 |        5 |        5 |       0 |        5 |        8 |        3 |        2 |        1 |        3 |       0 |        5 |        2 |        2 |        2 |        6 |        2 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |      9 |      6 |      3 |      0 |      3 |     27 |      0 |      0 |      0 |      8 |      9 |      5 |      1 |      8 |     47 |      0 |      0 |      0 |      5 |      2 |      4 |      0 |      1 |     29 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1305500 |     434 |    119 |    209 |    16 |    0 |     6 |    1 |    0 |     2 |    0 |     81 |    0 |    0 |    0 |    0 |    233 |    201 |      26 |      31 |      17 |       5 |      5 |      5 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |       5 |      18 |       7 |       2 |     10 |     15 |      5 |      1 |        3 |       13 |       12 |       23 |        9 |        3 |       0 |        6 |        6 |       21 |       14 |        6 |        3 |       0 |       11 |       19 |       36 |       30 |       12 |       10 |       0 |       12 |       17 |       22 |       22 |       12 |        6 |       0 |        5 |        7 |        7 |       11 |        6 |        4 |       0 |        4 |       13 |        9 |        8 |        3 |        4 |       0 |        2 |        3 |        2 |        3 |        1 |        1 |       0 |        1 |        5 |        2 |        4 |        0 |        1 |       0 |      0 |      1 |     16 |     27 |      6 |      1 |      6 |     62 |      0 |      0 |      0 |     27 |     28 |     14 |     17 |     10 |    113 |      0 |      0 |      0 |     16 |     16 |      6 |      0 |      4 |     39 |      0 |      0 |      0 |      3 |      4 |      2 |      3 |      1 |     12 |      0 |     37 | s03      | R    |
| 1305600 |    1007 |    323 |    397 |     9 |    0 |     7 |    8 |    1 |     3 |    0 |    259 |    0 |    0 |    0 |    0 |    508 |    499 |      41 |      36 |      36 |       3 |      7 |     11 |      8 |      2 |      6 |      1 |      1 |      0 |      1 |      3 |      1 |      0 |     11 |     11 |     26 |      1 |      9 |      5 |      8 |      0 |       9 |      22 |      13 |       1 |     13 |     28 |     13 |      1 |       11 |       38 |       39 |       24 |       15 |       14 |       2 |        7 |       54 |       49 |       37 |       19 |       14 |       0 |       13 |       57 |       69 |       48 |       16 |        7 |       0 |       11 |       57 |       61 |       27 |       23 |        8 |       0 |       12 |       42 |       42 |       21 |       15 |        4 |       0 |       19 |       44 |       29 |       17 |       10 |        3 |       1 |        1 |        6 |        5 |        6 |        1 |        0 |       0 |        2 |        1 |        3 |        3 |        0 |        0 |       0 |      0 |      3 |     47 |     36 |      1 |      1 |      0 |    235 |      0 |      0 |      1 |     70 |     44 |      1 |      0 |      1 |    280 |      0 |      0 |      3 |     37 |     24 |      0 |      0 |      0 |    195 |      0 |      0 |      1 |      7 |      1 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1305700 |     361 |    110 |    147 |     7 |    0 |     2 |    1 |    3 |     1 |    0 |     90 |    0 |    0 |    0 |    0 |    189 |    172 |      18 |      32 |      22 |       3 |      2 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |       9 |      18 |       7 |       0 |     23 |     38 |     16 |      1 |        8 |       15 |       10 |       12 |        7 |        4 |       1 |        7 |        6 |       10 |       14 |        9 |        7 |       0 |        3 |       18 |       13 |       18 |       16 |        7 |       0 |        4 |       12 |       19 |       17 |       11 |        9 |       0 |       11 |       12 |        8 |        9 |        8 |        4 |       0 |        6 |        5 |        7 |       10 |        6 |        4 |       0 |        0 |        2 |        1 |        0 |        1 |        1 |       0 |        1 |        4 |        2 |        1 |        0 |        1 |       0 |      0 |      1 |     18 |     11 |      4 |      2 |      6 |     68 |      0 |      0 |      1 |     11 |     31 |     18 |      5 |     15 |     66 |      0 |      0 |      1 |     10 |      9 |      4 |      2 |      7 |     57 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      2 |      5 |      0 |     37 | s03      | R    |
| 1305800 |     327 |     98 |    122 |    13 |    0 |     0 |    5 |    1 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    162 |    165 |      11 |      12 |      13 |       2 |      1 |      4 |      1 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      7 |      3 |      5 |      1 |      4 |      1 |      0 |      0 |       8 |      18 |      10 |       3 |     11 |     11 |     13 |      1 |        6 |       10 |       13 |        5 |        4 |        5 |       0 |       10 |       16 |       14 |       10 |        3 |        2 |       0 |        5 |       24 |       22 |       15 |        2 |        1 |       0 |        5 |       18 |       10 |       12 |        4 |        4 |       0 |        4 |       10 |       12 |        8 |        3 |        2 |       0 |        8 |       11 |       17 |        7 |        3 |        2 |       0 |        2 |        3 |        3 |        0 |        3 |        0 |       0 |        0 |        5 |        3 |        0 |        1 |        0 |       0 |      0 |      1 |     24 |      1 |      1 |      0 |      0 |     71 |      0 |      0 |      0 |     26 |      6 |      1 |      0 |      1 |     88 |      0 |      0 |      1 |     23 |      1 |      0 |      0 |      0 |     62 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |     15 |      0 |     37 | s03      | R    |
| 1305900 |     516 |    148 |    235 |    10 |    0 |     3 |    4 |    2 |     5 |    0 |    109 |    0 |    0 |    0 |    0 |    298 |    218 |      22 |      29 |       8 |       2 |      6 |      9 |      4 |      0 |      5 |      1 |      0 |      0 |      1 |      2 |      2 |      0 |      4 |      6 |     10 |      1 |      1 |      0 |      0 |      1 |      20 |      52 |      14 |       2 |      9 |     17 |     15 |      0 |        9 |       14 |       20 |       22 |        5 |        5 |       2 |       10 |       17 |       18 |       16 |        6 |        4 |       0 |        8 |       26 |       36 |       47 |       13 |       13 |       0 |        7 |       19 |       27 |       27 |        3 |        8 |       1 |        8 |       20 |       18 |       13 |        4 |        2 |       0 |       13 |       11 |        6 |        5 |        5 |        3 |       1 |        2 |        4 |        2 |        4 |        1 |        0 |       0 |        1 |        1 |        5 |        3 |        1 |        0 |       0 |      0 |      3 |     14 |     17 |      8 |      8 |      6 |     92 |      0 |      0 |      1 |     28 |     47 |     32 |     15 |      8 |    104 |      0 |      0 |      0 |     16 |     10 |      4 |      5 |      0 |     74 |      0 |      0 |      0 |      3 |      3 |      4 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 1306000 |     538 |    168 |    221 |    19 |    0 |     3 |    4 |    2 |     2 |    0 |    119 |    0 |    0 |    0 |    0 |    272 |    266 |      31 |      32 |      27 |       5 |      6 |      7 |      3 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      6 |      9 |      5 |      0 |      0 |      0 |      1 |      0 |      10 |      19 |       7 |       2 |      7 |     11 |      9 |      1 |        7 |       20 |       15 |       22 |       11 |        8 |       0 |        5 |       23 |       17 |       23 |        9 |        8 |       0 |       12 |       28 |       34 |       20 |       13 |        7 |       1 |       13 |       24 |       27 |       24 |       12 |        6 |       0 |        8 |       17 |       13 |       12 |        2 |        5 |       0 |       12 |       16 |       14 |       12 |        3 |        5 |       0 |        2 |        7 |        2 |        3 |        1 |        2 |       0 |        5 |        4 |        0 |        3 |        1 |        0 |       0 |      0 |      1 |     13 |     24 |     17 |      6 |      1 |    106 |      0 |      0 |      0 |     20 |     26 |     18 |     12 |      0 |    145 |      0 |      0 |      2 |     14 |     16 |      9 |      5 |      0 |     73 |      0 |      0 |      0 |      3 |      7 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1306100 |     573 |    167 |    244 |     7 |    0 |     2 |    6 |    1 |     2 |    0 |    144 |    0 |    0 |    0 |    0 |    277 |    296 |      35 |      52 |      34 |       2 |      7 |      4 |      2 |      1 |      3 |      1 |      1 |      0 |      0 |      2 |      1 |      0 |      3 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |       9 |       6 |       4 |       1 |     15 |     25 |     12 |      0 |        6 |       13 |       12 |       20 |        6 |       15 |       5 |        7 |       22 |       14 |       19 |       14 |       11 |       3 |       12 |       21 |       22 |       24 |       24 |       12 |       3 |       12 |       26 |       23 |       25 |       18 |       17 |       5 |       19 |       19 |       12 |       11 |        5 |        5 |       1 |       13 |       25 |       12 |       10 |        7 |        5 |       0 |        1 |        3 |        1 |        3 |        1 |        1 |       0 |        3 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |     15 |     28 |      4 |      0 |     11 |    109 |      0 |      0 |      1 |     20 |     36 |     13 |      6 |     13 |    155 |      0 |      0 |      2 |     24 |     10 |      4 |      5 |      2 |     97 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1306200 |     244 |     78 |     93 |    10 |    0 |     3 |    1 |    4 |     0 |    0 |     55 |    0 |    0 |    0 |    0 |    128 |    116 |      15 |      13 |      10 |       1 |      3 |      3 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       8 |       7 |       7 |       4 |      3 |     15 |     10 |      1 |        6 |        1 |        7 |        9 |        8 |        5 |       0 |        6 |        5 |        5 |       11 |        9 |        6 |       0 |        5 |        6 |       12 |       12 |        9 |        5 |       0 |        5 |        7 |        4 |       17 |        2 |        8 |       1 |        6 |        8 |        4 |        4 |        6 |        1 |       1 |        6 |        6 |        5 |        5 |        1 |        2 |       0 |        4 |        3 |        2 |        1 |        1 |        2 |       0 |        2 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      6 |     13 |      2 |      2 |      4 |     51 |      0 |      0 |      1 |     18 |      6 |      9 |      4 |      3 |     52 |      0 |      0 |      0 |      6 |      4 |      1 |      2 |      1 |     41 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1306300 |     831 |    244 |    363 |    26 |    0 |     4 |    6 |    2 |     3 |    0 |    183 |    0 |    0 |    0 |    0 |    455 |    376 |      44 |      62 |      23 |       5 |     11 |      7 |      4 |      1 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |     10 |     13 |     14 |      1 |      4 |      0 |      1 |      0 |      36 |      32 |      34 |       3 |     20 |     34 |     19 |      3 |       16 |       20 |       25 |       26 |       19 |       13 |       0 |       10 |       24 |       27 |       31 |       22 |       11 |       0 |       18 |       28 |       56 |       54 |       26 |       21 |       2 |        7 |       32 |       41 |       43 |       16 |       19 |       0 |       25 |       30 |       12 |       27 |        6 |        6 |       0 |       16 |       13 |       19 |       14 |        8 |        7 |       0 |        2 |        7 |        8 |        4 |        2 |        1 |       1 |        1 |        3 |        8 |        2 |        1 |        1 |       0 |      0 |      5 |     24 |     35 |     15 |      8 |     16 |    141 |      0 |      0 |      3 |     43 |     59 |     32 |     12 |     23 |    191 |      0 |      0 |      3 |     27 |     17 |      5 |      3 |      8 |    120 |      0 |      0 |      0 |     14 |      6 |      2 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1306400 |     427 |    140 |    164 |     8 |    0 |     0 |    7 |    0 |     2 |    0 |    106 |    0 |    0 |    0 |    0 |    208 |    219 |      21 |      31 |      11 |       0 |      4 |      6 |     12 |      1 |      1 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      3 |      2 |      3 |      1 |      0 |      2 |      2 |      0 |       5 |       3 |       5 |       0 |      3 |     11 |      2 |      0 |        9 |       24 |       14 |        5 |        8 |        2 |       1 |       16 |       29 |       11 |       13 |        4 |        4 |       0 |       11 |       37 |       16 |        9 |        4 |        4 |       0 |       23 |       34 |        6 |       11 |        7 |        2 |       0 |        6 |       25 |       10 |        7 |        1 |        1 |       0 |       18 |       23 |        6 |        6 |        3 |        0 |       0 |        3 |        4 |        4 |        3 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      7 |      2 |      1 |      5 |    118 |      0 |      0 |      1 |      8 |     11 |      3 |      0 |      1 |    140 |      0 |      0 |      0 |      4 |      5 |      2 |      0 |      0 |     95 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1306600 |      75 |     21 |     31 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     39 |     36 |       2 |       5 |       4 |       0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      1 |      1 |      0 |       2 |       5 |       4 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        6 |        3 |        0 |        1 |       0 |        3 |        0 |        4 |        3 |        1 |        0 |       0 |        2 |        1 |        3 |        7 |        1 |        0 |       0 |        3 |        2 |        1 |        9 |        2 |        0 |       0 |        2 |        1 |        4 |        1 |        6 |        1 |       0 |        0 |        1 |        4 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      5 |      6 |      0 |      0 |      8 |      0 |      0 |      0 |      4 |      4 |     11 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      5 |      6 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1306700 |     109 |     29 |     43 |     2 |    0 |     2 |    0 |    0 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |     65 |     44 |       6 |      14 |       4 |       3 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      4 |      0 |      0 |      1 |      1 |      0 |       3 |       6 |       3 |       0 |      4 |      4 |      4 |      0 |        1 |        6 |        2 |        4 |        2 |        2 |       0 |        0 |        2 |        4 |        4 |        1 |        1 |       0 |        3 |        7 |        5 |        8 |        3 |        2 |       0 |        2 |        2 |        2 |        4 |        3 |        2 |       0 |        4 |        3 |        3 |        4 |        1 |        1 |       0 |        3 |        7 |        1 |        3 |        2 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |     10 |      5 |      0 |      0 |     11 |      0 |      0 |      1 |      5 |     11 |      6 |      0 |      0 |     20 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     24 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1306800 |     248 |     97 |     89 |     7 |    0 |     2 |    0 |    4 |     3 |    0 |     46 |    0 |    0 |    0 |    0 |    119 |    129 |      22 |      15 |      12 |       1 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      2 |      0 |       3 |       7 |       4 |       0 |     11 |      9 |      4 |      2 |        5 |        4 |        9 |        7 |        8 |        6 |       3 |        4 |        8 |        9 |       13 |        7 |        8 |       6 |        6 |        6 |        8 |        9 |       12 |        4 |       0 |        6 |        9 |       11 |        9 |        5 |        4 |       0 |        2 |        3 |       10 |        3 |        1 |        0 |       1 |        9 |        4 |        5 |        4 |        2 |        1 |       1 |        1 |        4 |        1 |        2 |        2 |        2 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     13 |     16 |      6 |      4 |      3 |     55 |      0 |      0 |      0 |     12 |     13 |     13 |      3 |      3 |     45 |      0 |      0 |      3 |      4 |     10 |      0 |      0 |      0 |     29 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1306900 |     391 |    141 |    152 |    10 |    0 |     9 |    2 |    1 |     0 |    0 |     76 |    0 |    0 |    0 |    0 |    193 |    198 |      23 |      15 |      17 |       1 |      3 |      3 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |       5 |       6 |       4 |       1 |     12 |     15 |      2 |      1 |        1 |       12 |       10 |       11 |        8 |       11 |       6 |        4 |       11 |       16 |       17 |       14 |       10 |      10 |        8 |       15 |       22 |       17 |       13 |        5 |       7 |        5 |       12 |       14 |       14 |       11 |        6 |       3 |        8 |        6 |        8 |        4 |        7 |        3 |       0 |        7 |        8 |        9 |        8 |        5 |        3 |       0 |        1 |        3 |        0 |        4 |        2 |        0 |       1 |        3 |        6 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     23 |     26 |      4 |      2 |      8 |     77 |      0 |      0 |      0 |     19 |     24 |      8 |      3 |      9 |     89 |      0 |      0 |      0 |     12 |      9 |      4 |      3 |      3 |     45 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1307000 |     248 |     95 |     94 |     4 |    0 |     1 |    2 |    0 |     2 |    0 |     50 |    0 |    0 |    0 |    0 |    129 |    119 |      15 |      10 |       5 |       1 |      3 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |       8 |       8 |       5 |       1 |      9 |     10 |      8 |      0 |        4 |        7 |        7 |        8 |       11 |        4 |       5 |        6 |        7 |        8 |        5 |       10 |        8 |       5 |        2 |        6 |       14 |       10 |       10 |        7 |       1 |        6 |        8 |        8 |        6 |       10 |        6 |       0 |        4 |        9 |        4 |        4 |        0 |        4 |       1 |        4 |        7 |        2 |        7 |        3 |        1 |       0 |        0 |        0 |        2 |        2 |        0 |        3 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      7 |      4 |      3 |      7 |     67 |      0 |      0 |      3 |     13 |     14 |      3 |      0 |      5 |     56 |      0 |      0 |      0 |      3 |      5 |      1 |      1 |      0 |     40 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1307100 |     519 |    151 |    219 |    13 |    0 |     0 |    4 |    3 |     4 |    0 |    125 |    0 |    0 |    0 |    0 |    265 |    254 |      33 |      32 |      23 |       6 |      2 |      6 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      3 |      0 |      1 |      0 |      0 |      0 |       5 |      21 |      11 |       2 |     17 |     18 |     13 |      2 |        8 |        6 |       15 |        9 |       14 |       12 |       3 |        7 |       15 |       17 |       16 |        9 |       13 |       7 |        8 |       13 |       21 |       27 |       24 |       17 |       6 |       13 |       16 |       22 |       15 |       21 |       12 |       4 |       13 |       18 |       13 |       13 |        5 |        9 |       1 |        7 |       11 |       15 |       10 |        5 |        5 |       0 |        2 |        3 |        1 |        0 |        1 |        3 |       0 |        3 |        6 |        3 |        0 |        1 |        1 |       0 |      0 |      0 |     23 |     18 |      8 |      3 |      3 |     96 |      0 |      0 |      3 |     28 |     25 |     13 |     12 |      7 |    131 |      0 |      0 |      1 |     24 |     18 |      1 |      0 |      0 |     81 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1307200 |     249 |     98 |     91 |     9 |    0 |     1 |    1 |    0 |     2 |    0 |     47 |    0 |    0 |    0 |    0 |    125 |    124 |      20 |       7 |       5 |       1 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       1 |       2 |      8 |      6 |      3 |      0 |        4 |       10 |       10 |       10 |        5 |        5 |       6 |        3 |       11 |        7 |        9 |        8 |        5 |       5 |        2 |       14 |        8 |        9 |        4 |        5 |       2 |        7 |        9 |        5 |       14 |        8 |        3 |       1 |        2 |        5 |        2 |        4 |        3 |        4 |       0 |        8 |       13 |        1 |        3 |        0 |        2 |       0 |        2 |        3 |        3 |        0 |        2 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      2 |     14 |     19 |      6 |      1 |      4 |     52 |      0 |      0 |      2 |     10 |     13 |      4 |      5 |      5 |     52 |      0 |      0 |      0 |      5 |      7 |      2 |      1 |      1 |     31 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1307300 |     173 |     51 |     58 |     7 |    0 |     2 |    2 |    4 |     0 |    0 |     49 |    0 |    0 |    0 |    0 |     90 |     83 |      13 |       4 |       6 |       2 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       5 |       2 |       4 |       1 |      9 |      0 |      7 |      0 |        2 |        2 |        9 |        2 |        1 |        6 |       2 |        1 |        4 |        4 |        7 |        3 |        5 |       3 |        2 |        7 |        5 |       11 |        7 |        3 |       1 |        0 |        5 |        6 |        3 |        3 |        3 |       2 |        4 |        2 |        3 |        3 |        6 |        2 |       0 |        4 |        6 |        5 |        9 |        4 |        1 |       0 |        1 |        3 |        3 |        1 |        0 |        2 |       0 |        2 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      6 |      0 |      1 |      2 |     34 |      0 |      0 |      0 |      7 |     16 |      2 |      6 |      5 |     22 |      0 |      0 |      0 |      6 |      9 |      1 |      1 |      1 |     31 |      0 |      0 |      2 |      3 |      2 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1307700 |      61 |     27 |     23 |     1 |    0 |     0 |    2 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     30 |     31 |       3 |       4 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        6 |        3 |        0 |        1 |       0 |        2 |        4 |        2 |        4 |        1 |        3 |       0 |        1 |        5 |        3 |        2 |        2 |        0 |       0 |        1 |        3 |        2 |        4 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      5 |      0 |      0 |     18 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1307800 |     111 |     36 |     39 |     5 |    0 |     0 |    1 |    3 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |     64 |     47 |       5 |       3 |       7 |       1 |      2 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       5 |       6 |       2 |       2 |      0 |      0 |      2 |      1 |        0 |        4 |        9 |        2 |        4 |        0 |       0 |        1 |        6 |        4 |        3 |        2 |        1 |       0 |        1 |        8 |       10 |        2 |        1 |        1 |       0 |        0 |        4 |        4 |        4 |        3 |        1 |       0 |        0 |        5 |        7 |        3 |        0 |        1 |       0 |        0 |        5 |        4 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        3 |        0 |        2 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |     26 |      0 |      0 |      1 |     16 |      7 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      7 |      1 |      0 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1308000 |     872 |    270 |    376 |    25 |    0 |     7 |    8 |    3 |     1 |    0 |    182 |    0 |    0 |    0 |    0 |    441 |    431 |      57 |      64 |      34 |      10 |     11 |      7 |      6 |      1 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      5 |      5 |      3 |      0 |      1 |      1 |      1 |      0 |      10 |      14 |       6 |       4 |     27 |     35 |     19 |      1 |        8 |       26 |       28 |       26 |       15 |       16 |       3 |       10 |       24 |       34 |       27 |       24 |       20 |       9 |       13 |       39 |       63 |       40 |       25 |       25 |       4 |       17 |       41 |       32 |       27 |       24 |       21 |       5 |       17 |       23 |       12 |       14 |       12 |        7 |       0 |       24 |       19 |       20 |       18 |        8 |        4 |       4 |        2 |        6 |        9 |        4 |        1 |        3 |       0 |        4 |        3 |        3 |        5 |        3 |        1 |       0 |      0 |      4 |     42 |     38 |     23 |      8 |      5 |    150 |      0 |      0 |      2 |     44 |     59 |     25 |     12 |     10 |    224 |      0 |      0 |      1 |     24 |     21 |      5 |      5 |      6 |    120 |      0 |      0 |      0 |      6 |      7 |      3 |      1 |      0 |     27 |      0 |     37 | s03      | R    |
| 1308100 |     164 |     54 |     70 |     3 |    0 |     1 |    0 |    0 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |     66 |     98 |       6 |       2 |       0 |       0 |      9 |      6 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        2 |       14 |       4 |        0 |        0 |        0 |        1 |       10 |       20 |       1 |        0 |        1 |        1 |        1 |        8 |       17 |       2 |        0 |        1 |        0 |        1 |        1 |       33 |       4 |        0 |        0 |        1 |        3 |        1 |        6 |       1 |        1 |        0 |        0 |        1 |        9 |       10 |       1 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        2 |       0 |      0 |      0 |     14 |      7 |      3 |      1 |      3 |     26 |      0 |      0 |      3 |     14 |      6 |      2 |      2 |      6 |     37 |      0 |      0 |      0 |      2 |      5 |      1 |      1 |      1 |     24 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1308200 |     219 |     99 |     88 |     4 |    0 |     4 |    2 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     98 |    121 |       2 |       5 |       0 |       0 |      5 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        2 |        4 |        7 |        8 |       16 |       2 |        1 |        0 |        0 |        6 |       13 |       39 |       1 |        0 |        1 |        0 |        3 |        7 |       25 |       2 |        0 |        0 |        1 |        4 |       10 |       35 |       0 |        0 |        1 |        1 |        1 |        5 |        6 |       0 |        0 |        1 |        1 |        1 |        1 |        4 |       0 |        0 |        0 |        0 |        2 |        0 |        5 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |      0 |      0 |     24 |     10 |      4 |      4 |      8 |     49 |      0 |      0 |      1 |     12 |      5 |      5 |      6 |     10 |     49 |      0 |      0 |      0 |      2 |      5 |      0 |      1 |      0 |     14 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 1308300 |     446 |    158 |    180 |     8 |    0 |     8 |    2 |    3 |     2 |    0 |     85 |    0 |    0 |    0 |    0 |    220 |    226 |      27 |      16 |      12 |       1 |      8 |      8 |      3 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |       3 |       6 |       2 |       2 |     11 |     17 |     11 |      0 |        7 |       13 |        7 |       16 |       16 |       11 |       4 |        8 |       12 |       16 |        9 |       20 |       14 |       5 |        7 |       12 |       26 |       21 |       12 |       16 |       2 |        5 |       13 |       14 |       17 |       17 |       15 |       3 |        3 |       10 |        8 |        7 |        3 |        5 |       1 |        5 |        9 |       11 |        7 |        6 |       10 |       0 |        2 |        3 |        2 |        1 |        3 |        2 |       0 |        1 |        1 |        2 |        1 |        1 |        3 |       1 |      0 |      0 |     17 |     23 |      6 |      3 |      4 |    105 |      0 |      0 |      0 |     22 |     25 |     10 |      9 |      9 |    105 |      0 |      0 |      3 |     13 |     10 |      1 |      5 |      1 |     52 |      0 |      0 |      0 |      5 |      7 |      1 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 1308400 |     696 |    243 |    273 |    11 |    0 |     6 |    6 |    0 |     4 |    0 |    153 |    0 |    0 |    0 |    0 |    327 |    369 |      30 |      29 |      26 |       0 |     11 |      7 |      4 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      5 |      0 |      7 |      4 |      6 |      0 |      2 |      4 |      1 |      0 |       4 |      10 |       2 |       1 |     14 |     11 |      9 |      0 |       12 |       17 |       14 |       14 |       18 |       19 |       2 |       12 |       30 |       23 |       25 |       37 |       19 |       1 |       10 |       28 |       28 |       30 |       25 |       19 |       0 |        8 |       37 |       23 |       26 |       21 |       15 |       3 |       11 |       24 |       17 |        7 |        8 |        8 |       1 |       15 |       17 |       12 |       12 |       14 |        7 |       0 |        2 |        4 |        6 |        2 |        1 |        0 |       0 |        4 |        1 |        4 |        0 |        1 |        2 |       0 |      0 |      1 |     46 |     37 |     14 |      5 |      9 |    131 |      0 |      0 |      3 |     35 |     39 |     12 |      6 |      9 |    169 |      0 |      0 |      1 |     25 |      7 |      8 |      0 |      4 |    108 |      0 |      0 |      1 |      6 |      4 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1308500 |     387 |    126 |    144 |     9 |    0 |     2 |    2 |    0 |     5 |    0 |     99 |    0 |    0 |    0 |    0 |    174 |    213 |      18 |      20 |       6 |       0 |      4 |     10 |      3 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |      0 |      4 |      0 |      1 |      1 |      2 |      2 |       1 |       3 |       1 |       0 |      1 |      4 |      2 |      1 |        8 |       22 |        7 |        4 |        8 |        1 |       0 |       13 |       31 |       17 |        7 |        4 |        4 |       0 |       11 |       30 |       19 |        3 |        1 |        2 |       0 |       26 |       35 |       15 |        2 |        0 |        0 |       0 |        7 |       29 |        5 |        6 |        1 |        0 |       0 |       15 |       22 |        6 |        4 |        4 |        0 |       0 |        2 |        5 |        0 |        3 |        0 |        0 |       0 |        3 |        3 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      8 |      2 |      1 |      1 |    113 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |    138 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |     91 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1308600 |     521 |    204 |    155 |    12 |    0 |     8 |    5 |    1 |     2 |    0 |    134 |    0 |    0 |    0 |    0 |    235 |    286 |      40 |      25 |      24 |       0 |      7 |      5 |      3 |      2 |      3 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      1 |      5 |      0 |      2 |      0 |      1 |      0 |       7 |       3 |       4 |       0 |      3 |      8 |      6 |      0 |       15 |       21 |       19 |       20 |        5 |        8 |       0 |        6 |       33 |       28 |       18 |       21 |        9 |       1 |        6 |       17 |       18 |       15 |        6 |        8 |       1 |        6 |       23 |       16 |       13 |       13 |       13 |       0 |        6 |       24 |       12 |        9 |        8 |        3 |       0 |       10 |       26 |       16 |       10 |        8 |        2 |       0 |        3 |        2 |        4 |        3 |        1 |        1 |       0 |        2 |        5 |        3 |        2 |        2 |        0 |       0 |      0 |      0 |     15 |     21 |      4 |      3 |     10 |    151 |      0 |      0 |      1 |     18 |     21 |      7 |      4 |      3 |    101 |      0 |      0 |      1 |     15 |     13 |      5 |      0 |      2 |     98 |      0 |      0 |      0 |      4 |      5 |      1 |      0 |      1 |     17 |      0 |     37 | s03      | R    |
| 1308800 |      18 |      2 |     10 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     12 |      6 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        3 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       1 |        0 |        1 |        4 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1308900 |     130 |     45 |     43 |     1 |    0 |     2 |    2 |    1 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |     68 |     62 |      11 |       6 |       8 |       0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      1 |      0 |      1 |      0 |       5 |       2 |       2 |       0 |      1 |      6 |      2 |      0 |        2 |        8 |        2 |        4 |        3 |        1 |       2 |        4 |        7 |        5 |        1 |        3 |        1 |       2 |        3 |        7 |        2 |        1 |        3 |        3 |       1 |        3 |        7 |        5 |        4 |        4 |        0 |       0 |        7 |        8 |        1 |        3 |        0 |        1 |       1 |        7 |        4 |        1 |        2 |        0 |        0 |       0 |        0 |        4 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      4 |      6 |      0 |      1 |      1 |     31 |      0 |      0 |      1 |      3 |      9 |      1 |      0 |      2 |     27 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     31 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1309000 |     256 |     76 |    109 |     3 |    0 |     6 |    4 |    1 |     1 |    0 |     56 |    0 |    0 |    0 |    0 |    131 |    125 |      11 |      15 |       2 |       2 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |       1 |       7 |       0 |       0 |      6 |     13 |      6 |      0 |        7 |        5 |        7 |       13 |        2 |        2 |       0 |        1 |       13 |        5 |       13 |        4 |        4 |       0 |        3 |       12 |       13 |       15 |        6 |        4 |       0 |        4 |        9 |       14 |       14 |        8 |        7 |       0 |        5 |        6 |        8 |        6 |        5 |        2 |       0 |        5 |        8 |        5 |        6 |        0 |        0 |       0 |        0 |        0 |        2 |        5 |        2 |        1 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     11 |     10 |      0 |      3 |      1 |     51 |      0 |      0 |      0 |     22 |     14 |      9 |      2 |      3 |     59 |      0 |      0 |      0 |      5 |      6 |      2 |      2 |      0 |     41 |      0 |      0 |      0 |      5 |      3 |      1 |      1 |      1 |      4 |      0 |     37 | s03      | R    |
| 1309100 |     289 |     90 |    135 |     7 |    0 |     6 |    2 |    0 |     0 |    0 |     49 |    0 |    0 |    0 |    0 |    150 |    139 |      17 |      13 |       3 |       2 |      6 |      2 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |      1 |      0 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |       3 |       7 |       6 |       0 |      3 |     17 |      3 |      0 |        5 |        5 |        9 |        9 |        6 |        8 |       1 |        1 |       11 |        9 |       14 |        6 |        5 |       1 |        6 |       12 |       20 |       13 |        8 |        7 |       6 |        7 |        7 |       13 |       14 |       10 |        7 |       5 |        5 |        7 |        4 |        6 |        2 |        2 |       0 |        6 |        6 |        2 |        4 |        4 |        0 |       1 |        1 |        0 |        4 |        3 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        3 |        0 |       0 |      0 |      0 |     12 |     14 |      8 |      2 |      4 |     50 |      0 |      0 |      0 |     15 |     23 |      5 |      5 |      4 |     83 |      0 |      0 |      0 |      8 |      2 |      4 |      0 |      0 |     35 |      0 |      0 |      0 |      1 |      8 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1309200 |       6 |      1 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1309300 |     586 |    195 |    204 |    19 |    0 |     9 |    4 |    1 |     3 |    0 |    151 |    0 |    0 |    0 |    0 |    285 |    301 |      29 |      22 |      13 |       5 |      7 |     11 |      3 |      1 |      0 |      2 |      1 |      0 |      1 |      0 |      1 |      0 |      2 |      3 |      2 |      1 |      0 |      1 |      1 |      0 |       7 |       8 |      10 |       1 |      6 |      7 |     10 |      0 |        5 |       23 |       19 |       15 |        5 |       10 |       0 |       20 |       34 |       24 |       17 |       14 |        9 |       0 |       16 |       33 |       20 |       20 |       10 |        5 |       0 |       22 |       30 |       17 |       15 |        9 |        7 |       0 |       12 |       28 |       17 |       11 |        6 |        6 |       0 |       14 |       29 |        9 |       11 |        3 |        5 |       0 |        4 |       12 |        5 |        1 |        2 |        0 |       0 |        2 |        4 |        0 |        4 |        2 |        0 |       0 |      0 |      0 |     19 |     15 |      9 |      5 |      4 |    143 |      0 |      0 |      2 |     16 |     18 |      6 |      3 |      2 |    157 |      0 |      0 |      1 |     12 |      7 |      1 |      1 |      2 |    127 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 1309400 |      99 |     39 |     38 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     48 |     51 |       2 |       0 |       2 |       0 |      2 |      3 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |       1 |       3 |       0 |      0 |      2 |      2 |      0 |        0 |        0 |        5 |        1 |        4 |        3 |       2 |        1 |        3 |        6 |        1 |        5 |        5 |       3 |        2 |        3 |        5 |        3 |        3 |        3 |       1 |        1 |        4 |        3 |        3 |        2 |        2 |       3 |        2 |        3 |        3 |        1 |        1 |        1 |       1 |        1 |        3 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      9 |      4 |      0 |      0 |     24 |      0 |      0 |      0 |      6 |      5 |      4 |      1 |      1 |     21 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1309500 |      77 |     28 |     20 |     1 |    0 |     3 |    1 |    0 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     35 |     42 |       2 |       2 |       4 |       2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       1 |       0 |      2 |      2 |      0 |      1 |        1 |        3 |        3 |        1 |        1 |        3 |       0 |        1 |        4 |        7 |        0 |        2 |        2 |       0 |        0 |        1 |        1 |        2 |        1 |        2 |       0 |        1 |        4 |        2 |        4 |        1 |        1 |       0 |        1 |        4 |        3 |        1 |        1 |        2 |       0 |        2 |        3 |        4 |        0 |        1 |        1 |       0 |        2 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      4 |      0 |      1 |      1 |     19 |      0 |      0 |      0 |      4 |      7 |      2 |      1 |      0 |      6 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 1309600 |      73 |     17 |     24 |     6 |    0 |     0 |    1 |    0 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     38 |     35 |       4 |       3 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       7 |       1 |      0 |      2 |      0 |      1 |        1 |        3 |        1 |        1 |        0 |        0 |       0 |        0 |        3 |        2 |        4 |        2 |        0 |       0 |        1 |        2 |        3 |        3 |        2 |        3 |       0 |        1 |        2 |        1 |        2 |        2 |        1 |       1 |        2 |        2 |        5 |        5 |        0 |        2 |       0 |        2 |        2 |        1 |        2 |        1 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      1 |      2 |      3 |      0 |      2 |      1 |      8 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      1 |     16 |      0 |      0 |      1 |      3 |      3 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 1309700 |     110 |     35 |     43 |     4 |    0 |     2 |    0 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     56 |     54 |       2 |       3 |       3 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |       1 |       4 |       4 |       0 |      2 |      2 |      0 |      0 |        2 |        2 |        4 |        4 |        0 |        2 |       0 |        1 |        3 |        3 |        4 |        6 |        3 |       1 |        1 |        4 |        4 |        5 |        4 |        5 |       0 |        2 |        3 |        3 |        4 |        5 |        2 |       1 |        1 |        4 |        6 |        0 |        2 |        0 |       2 |        5 |        0 |        3 |        1 |        1 |        1 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      7 |      2 |      0 |      3 |     20 |      0 |      0 |      0 |      9 |      5 |      3 |      0 |      1 |     25 |      0 |      0 |      0 |      6 |      6 |      2 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1309800 |      22 |      6 |      9 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |      8 |     14 |       1 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      1 |      1 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1350000 |     422 |    130 |    176 |    12 |    0 |     3 |    2 |    0 |     2 |    0 |     97 |    0 |    0 |    0 |    0 |    210 |    212 |      25 |      12 |      12 |       0 |      3 |      6 |      8 |      1 |      1 |      1 |      2 |      0 |      2 |      1 |      1 |      0 |      3 |      2 |      4 |      1 |      1 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      4 |      4 |      3 |      0 |        3 |       17 |       18 |       10 |        4 |        6 |       0 |        4 |       26 |       13 |       19 |        7 |        3 |       0 |        4 |       27 |       30 |       19 |       15 |        1 |       0 |        1 |       24 |       23 |       18 |       10 |        4 |       0 |        2 |       17 |       14 |        7 |        3 |        3 |       0 |        0 |       17 |       11 |       14 |        4 |        5 |       0 |        4 |        0 |        3 |        2 |        0 |        1 |       0 |        2 |        6 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      6 |      2 |      1 |      9 |    111 |      0 |      0 |      0 |     10 |     11 |      6 |      0 |      2 |    147 |      0 |      0 |      0 |      8 |      2 |      2 |      2 |      3 |     80 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1350100 |     491 |    153 |    226 |    14 |    0 |     4 |    2 |    1 |     8 |    0 |     83 |    0 |    0 |    0 |    0 |    241 |    250 |       4 |       5 |       3 |       1 |     11 |      4 |      5 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      2 |      1 |      4 |      3 |      1 |      1 |      0 |      2 |      0 |      0 |       2 |       1 |       0 |       0 |      2 |      1 |      2 |      0 |        6 |        7 |        7 |       16 |       12 |       10 |       6 |        4 |        6 |       17 |       27 |       21 |        5 |       9 |        3 |       10 |       21 |       20 |       37 |       17 |       8 |        4 |        5 |       21 |       21 |       35 |       14 |      10 |        5 |        6 |       11 |       13 |       10 |        3 |       1 |        4 |        6 |        5 |        6 |        8 |        4 |       1 |        3 |        3 |        3 |        3 |        0 |        0 |       0 |        4 |        3 |        4 |        2 |        4 |        0 |       0 |      0 |      1 |     16 |     23 |      6 |      5 |      5 |     97 |      0 |      0 |      0 |     24 |     44 |     15 |     13 |     11 |    119 |      0 |      0 |      0 |     10 |     12 |      3 |      3 |      5 |     50 |      0 |      0 |      0 |      4 |      7 |      2 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 1350200 |     620 |    196 |    281 |    13 |    0 |     5 |    3 |    2 |     3 |    0 |    117 |    0 |    0 |    0 |    0 |    303 |    317 |      15 |      10 |       5 |       0 |      6 |     10 |      3 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      0 |      0 |      0 |        6 |        9 |       17 |       20 |       22 |       15 |       2 |        8 |       11 |       16 |       31 |       22 |       12 |       5 |        8 |       16 |       28 |       24 |       32 |       24 |      12 |        3 |       15 |       29 |       28 |       24 |       23 |      15 |        8 |        8 |       12 |       13 |       10 |        4 |       2 |       14 |       11 |       11 |       11 |        9 |        4 |       0 |        2 |        2 |        2 |        0 |        5 |        0 |       0 |        3 |        1 |        2 |        3 |        3 |        3 |       0 |      0 |      1 |     24 |     20 |     17 |      5 |     13 |    116 |      0 |      0 |      5 |     35 |     40 |     11 |      8 |     14 |    168 |      0 |      0 |      3 |     16 |     14 |      6 |      5 |      4 |     69 |      0 |      0 |      0 |      3 |      9 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1350300 |     711 |    195 |    341 |    17 |    0 |     4 |   12 |    3 |     6 |    0 |    133 |    0 |    0 |    0 |    0 |    340 |    371 |       8 |      11 |       6 |       3 |     10 |     28 |      9 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      1 |      0 |      0 |       1 |       1 |       0 |       0 |      2 |      0 |      2 |      1 |        8 |        6 |       13 |       19 |       14 |       15 |       3 |        2 |        8 |       28 |       30 |       26 |       16 |       7 |        7 |       16 |       29 |       25 |       44 |       40 |      16 |        3 |       11 |       23 |       38 |       40 |       34 |      15 |        8 |        7 |       11 |       12 |       14 |        8 |       2 |        6 |       10 |       15 |       17 |       15 |        7 |       1 |        7 |        7 |        2 |        5 |        1 |        1 |       0 |        2 |        6 |        3 |        4 |        4 |        0 |       0 |      0 |      3 |     22 |     32 |     11 |      3 |     14 |    110 |      0 |      0 |      1 |     28 |     61 |     23 |     15 |     34 |    179 |      0 |      0 |      0 |     23 |     20 |      6 |      1 |      4 |     79 |      0 |      0 |      1 |      8 |      6 |      1 |      1 |      2 |     23 |      0 |     37 | s03      | R    |
| 1350400 |     267 |     93 |    112 |     7 |    0 |     4 |    2 |    1 |     2 |    0 |     46 |    0 |    0 |    0 |    0 |    115 |    152 |       6 |       3 |       0 |       1 |      3 |      6 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       1 |      1 |      0 |      0 |      1 |        3 |        7 |        8 |       14 |        3 |        5 |       0 |        3 |       10 |       11 |       11 |       11 |        7 |       0 |        1 |        8 |        9 |        8 |        7 |       15 |       1 |        3 |        8 |       12 |       14 |       16 |       10 |       0 |        0 |        2 |        8 |        2 |        4 |        3 |       0 |        4 |        4 |        5 |        6 |        5 |        3 |       0 |        1 |        3 |        1 |        1 |        0 |        1 |       0 |        0 |        2 |        3 |        2 |        1 |        1 |       0 |      0 |      1 |     11 |      7 |      5 |      0 |      4 |     65 |      0 |      0 |      1 |     15 |     19 |      3 |      3 |      1 |     70 |      0 |      0 |      0 |      7 |      4 |      1 |      1 |      2 |     31 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1350500 |     509 |    159 |    195 |    11 |    0 |     4 |    5 |    0 |     3 |    0 |    132 |    0 |    0 |    0 |    0 |    207 |    302 |      23 |      14 |      11 |       2 |      7 |      5 |      6 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      4 |      0 |      0 |      0 |      2 |      0 |       0 |       1 |       2 |       0 |      4 |      3 |      2 |      0 |        4 |       23 |       15 |        8 |        5 |        1 |       2 |        5 |       35 |       24 |       18 |       13 |        6 |       0 |       10 |       29 |       17 |       18 |       10 |        6 |       0 |        9 |       42 |       24 |       12 |       11 |        7 |       0 |        6 |       19 |        9 |       11 |        3 |        2 |       0 |       12 |       28 |       20 |       11 |        8 |        3 |       0 |        4 |        1 |        2 |        1 |        1 |        0 |       0 |        2 |        4 |        6 |        2 |        0 |        0 |       0 |      0 |      2 |     20 |      7 |      3 |      4 |      0 |    123 |      0 |      0 |      1 |     23 |     11 |      6 |      3 |      1 |    150 |      0 |      0 |      2 |     13 |     10 |      3 |      3 |      1 |    100 |      0 |      0 |      0 |      1 |      2 |      2 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 1350600 |     851 |    262 |    365 |    21 |    0 |     6 |    7 |    4 |     2 |    0 |    184 |    0 |    0 |    0 |    0 |    381 |    470 |      22 |      12 |       7 |       1 |     20 |     12 |     11 |      1 |      2 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      3 |      4 |      1 |      0 |      1 |      0 |      3 |      0 |       2 |       1 |       2 |       0 |      3 |      7 |      4 |      1 |        4 |       21 |       14 |       16 |       21 |       15 |       4 |        8 |       25 |       26 |       36 |       42 |       25 |       5 |        8 |       28 |       45 |       30 |       37 |       26 |       5 |        9 |       29 |       34 |       41 |       37 |       32 |       4 |       10 |       15 |       19 |       18 |       20 |        3 |       0 |       15 |       19 |       17 |       25 |       14 |        8 |       1 |        2 |        9 |        5 |        1 |        2 |        3 |       0 |        2 |        5 |        4 |        3 |        2 |        2 |       0 |      0 |      0 |     36 |     24 |     17 |      5 |     16 |    164 |      0 |      0 |      1 |     38 |     58 |     15 |     14 |     18 |    221 |      0 |      0 |      0 |     21 |     20 |      3 |      6 |      5 |    129 |      0 |      0 |      0 |      5 |      8 |      3 |      1 |      1 |     22 |      0 |     37 | s03      | R    |
| 1350700 |     224 |     72 |    100 |     7 |    0 |     2 |    2 |    0 |     2 |    0 |     39 |    0 |    0 |    0 |    0 |    110 |    114 |       7 |       2 |       0 |       1 |     22 |     10 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      1 |      2 |      2 |      0 |        4 |        1 |        3 |       10 |       12 |        4 |       0 |        6 |        3 |        4 |       11 |       10 |        4 |       0 |        4 |        4 |       11 |       14 |       17 |        6 |       0 |        2 |        2 |        7 |       17 |       10 |        6 |       0 |        1 |        1 |        2 |        7 |        1 |        1 |       0 |        7 |        1 |        7 |        8 |        2 |        1 |       0 |        3 |        1 |        1 |        0 |        0 |        2 |       0 |        2 |        0 |        1 |        1 |        0 |        2 |       0 |      0 |      0 |      5 |     11 |      4 |      2 |      4 |     46 |      0 |      0 |      0 |     13 |     21 |      8 |      0 |      5 |     53 |      0 |      0 |      0 |      7 |      6 |      1 |      0 |      0 |     25 |      0 |      0 |      0 |      2 |      1 |      3 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1350800 |     615 |    176 |    310 |    10 |    0 |     4 |    5 |    0 |     3 |    0 |    107 |    0 |    0 |    0 |    0 |    299 |    316 |      10 |      13 |      14 |       1 |     14 |     16 |     13 |      1 |      0 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      5 |      3 |      4 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        6 |        3 |       21 |       22 |       12 |        6 |       1 |        8 |       14 |       17 |       45 |       15 |        6 |       0 |       10 |       16 |       32 |       41 |       37 |       18 |       2 |        6 |       12 |       52 |       44 |       19 |       21 |       0 |       15 |        8 |       15 |        9 |        4 |        5 |       0 |        5 |        9 |        6 |       18 |        7 |        6 |       0 |        4 |        1 |        3 |        2 |        5 |        1 |       0 |        1 |        0 |        3 |        1 |        0 |        1 |       0 |      0 |      3 |     20 |     22 |      5 |      8 |     13 |    105 |      0 |      0 |      0 |     42 |     49 |     23 |      7 |     18 |    171 |      0 |      0 |      0 |     19 |      7 |      6 |      6 |      2 |     67 |      0 |      0 |      0 |      5 |      3 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1350900 |      84 |     17 |     43 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     36 |     48 |       2 |       4 |       2 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        3 |        1 |        2 |        1 |        0 |       1 |        0 |        4 |        2 |        2 |        1 |        0 |       0 |        3 |        6 |        4 |        2 |        3 |        1 |       0 |        5 |        6 |        6 |        7 |        0 |        0 |       0 |        2 |        2 |        2 |        2 |        0 |        0 |       0 |        3 |        7 |        4 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     43 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1351000 |     745 |    161 |    420 |     7 |    0 |     0 |    0 |    0 |     4 |    0 |    153 |    0 |    0 |    0 |    0 |    367 |    378 |      14 |      21 |      10 |       0 |     15 |     20 |     13 |      0 |      3 |      4 |      6 |      1 |      0 |      3 |      1 |      0 |     12 |     13 |     18 |      1 |      8 |      1 |      5 |      0 |       4 |      12 |       9 |       0 |      1 |     10 |      2 |      1 |        4 |        3 |       33 |       19 |        3 |        1 |       1 |        4 |        6 |       46 |       32 |        4 |        4 |       1 |        8 |       15 |       98 |       70 |       18 |        9 |       0 |        9 |       16 |      107 |       49 |       13 |        8 |       0 |        9 |       11 |       30 |       26 |        4 |        1 |       0 |        9 |       10 |       33 |       14 |        4 |        2 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        2 |        1 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |     42 |     46 |      0 |      0 |      0 |     72 |      0 |      0 |      4 |    112 |    128 |      0 |      0 |      0 |    176 |      0 |      0 |      0 |     33 |     32 |      0 |      0 |      0 |     88 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1351100 |     473 |    140 |    205 |     6 |    0 |     2 |    1 |    1 |     1 |    0 |    117 |    0 |    0 |    0 |    0 |    227 |    246 |      16 |      14 |       6 |       0 |     11 |     12 |      5 |      1 |      1 |      3 |      4 |      1 |      1 |      1 |      2 |      0 |      4 |      2 |      6 |      0 |      0 |      0 |      1 |      0 |       0 |       3 |       9 |       1 |      2 |     12 |      2 |      0 |        4 |       13 |       13 |        8 |        6 |        8 |       0 |        7 |       25 |       21 |       17 |       14 |        4 |       0 |        5 |       22 |       50 |       18 |        6 |        6 |       0 |        3 |       20 |       37 |       23 |        6 |        8 |       1 |        6 |       18 |       19 |       14 |        3 |        1 |       1 |        2 |       17 |       16 |       12 |        7 |        1 |       0 |        0 |        2 |        3 |        0 |        1 |        0 |       0 |        1 |        2 |        0 |        1 |        1 |        0 |       0 |      0 |      3 |     17 |     38 |      0 |      0 |      0 |     82 |      0 |      0 |      2 |     40 |     50 |      0 |      0 |      0 |    113 |      0 |      0 |      2 |     19 |     14 |      0 |      0 |      0 |     82 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1351200 |     394 |     88 |    217 |     6 |    0 |     2 |    1 |    2 |     0 |    0 |     78 |    0 |    0 |    0 |    0 |    200 |    194 |      11 |      16 |       7 |       1 |      5 |     10 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      8 |     12 |      7 |      2 |      3 |      0 |      2 |      0 |       1 |       7 |       3 |       0 |      1 |      7 |      1 |      0 |        4 |        3 |       19 |       11 |        4 |        2 |       0 |        4 |       10 |       20 |        8 |        1 |        2 |       0 |        6 |       26 |       53 |       21 |        8 |        2 |       0 |        9 |       24 |       44 |       19 |        2 |        2 |       1 |        1 |        8 |       12 |       14 |        0 |        0 |       0 |        3 |        9 |       17 |       13 |        0 |        1 |       0 |        1 |        1 |        2 |        2 |        0 |        0 |       0 |        0 |        2 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |     17 |     14 |      4 |      0 |      0 |     53 |      0 |      0 |      3 |     34 |     22 |      5 |      0 |      0 |    153 |      0 |      0 |      0 |      9 |      4 |      6 |      0 |      0 |     59 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1351300 |     476 |    133 |    219 |    11 |    0 |     0 |    4 |    1 |     1 |    0 |    107 |    0 |    0 |    0 |    0 |    217 |    259 |      14 |      10 |       7 |       0 |     12 |     12 |      6 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      6 |      5 |      6 |      0 |      1 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      3 |      4 |      2 |      0 |        2 |        3 |       14 |       19 |        6 |        8 |       0 |        2 |       14 |       30 |       19 |       11 |        5 |       0 |        6 |       12 |       43 |       27 |       11 |        2 |       0 |        5 |       18 |       46 |       32 |        9 |        8 |       0 |        4 |       16 |       13 |       12 |        8 |        1 |       0 |        5 |       13 |       22 |        9 |        3 |        1 |       0 |        2 |        2 |        5 |        1 |        0 |        0 |       0 |        1 |        0 |        5 |        1 |        0 |        0 |       0 |      0 |      0 |     27 |     48 |      0 |      0 |      0 |     58 |      0 |      0 |      2 |     37 |     90 |      0 |      2 |      2 |     86 |      0 |      0 |      1 |     17 |     23 |      0 |      1 |      0 |     65 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1351400 |     702 |    203 |    305 |    18 |    0 |    10 |    2 |    3 |     1 |    0 |    160 |    0 |    0 |    0 |    0 |    315 |    387 |      29 |      21 |      13 |       1 |      5 |     19 |     10 |      2 |      5 |      1 |      4 |      0 |      0 |      4 |      2 |      0 |      2 |      8 |      4 |      0 |      4 |      1 |      0 |      0 |       0 |       0 |       3 |       0 |      3 |      4 |      7 |      1 |        8 |       17 |       21 |       15 |        6 |        5 |       0 |        5 |       37 |       40 |       29 |       13 |        7 |       0 |       14 |       40 |       49 |       31 |       17 |        6 |       0 |       17 |       32 |       37 |       29 |       23 |       10 |       0 |        8 |       22 |       25 |        8 |        6 |        4 |       0 |       10 |       27 |       23 |       15 |        8 |        4 |       0 |        1 |        5 |        5 |        2 |        0 |        0 |       0 |        0 |        5 |        6 |        4 |        5 |        1 |       0 |      0 |      0 |     19 |     29 |      5 |      2 |      0 |    148 |      0 |      0 |      0 |     43 |     34 |      9 |      5 |      0 |    214 |      0 |      0 |      0 |     11 |     14 |      9 |      0 |      0 |    126 |      0 |      0 |      1 |      3 |      6 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 1351600 |      68 |     23 |     29 |     0 |    0 |     0 |    0 |    0 |     2 |    0 |     14 |    0 |    0 |    0 |    0 |     33 |     35 |       3 |       0 |       1 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        3 |        3 |        0 |       2 |        0 |        3 |        4 |        1 |        2 |        0 |       3 |        0 |        2 |        3 |        3 |        5 |        1 |       0 |        0 |        4 |        3 |        2 |        2 |        2 |       2 |        0 |        2 |        2 |        1 |        0 |        3 |       0 |        2 |        1 |        0 |        0 |        2 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      4 |     15 |      0 |      0 |      0 |      2 |      3 |      2 |      2 |      1 |     19 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      4 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1351700 |     437 |    107 |    232 |     5 |    0 |     6 |    4 |    0 |     0 |    0 |     83 |    0 |    0 |    0 |    0 |    202 |    235 |       8 |       6 |       3 |       0 |     10 |     15 |      8 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      0 |      0 |      0 |        3 |        1 |        3 |        7 |       14 |       14 |       1 |        5 |        3 |        8 |       22 |       16 |       10 |       0 |        7 |        7 |       14 |       19 |       40 |       21 |       2 |        6 |        7 |       21 |       35 |       34 |       18 |       1 |        6 |        5 |        4 |       14 |        7 |        5 |       1 |        9 |        3 |        2 |       11 |       12 |        4 |       0 |        0 |        0 |        1 |        2 |        3 |        1 |       0 |        1 |        0 |        2 |        2 |        3 |        0 |       0 |      0 |      0 |     14 |     19 |     12 |      4 |      6 |     52 |      0 |      0 |      1 |     14 |     39 |      9 |     13 |     17 |    139 |      0 |      0 |      1 |      5 |     13 |      1 |      2 |      2 |     59 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      2 |      5 |      0 |     37 | s03      | R    |
| 1351800 |     749 |    205 |    370 |     7 |    0 |     3 |    2 |    0 |     0 |    0 |    162 |    0 |    0 |    0 |    0 |    367 |    382 |      17 |      12 |       8 |       0 |     19 |     18 |     11 |      1 |      6 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      5 |      5 |     13 |      0 |      9 |      4 |      8 |      0 |       1 |      10 |       6 |       0 |      3 |      7 |      2 |      0 |        6 |        9 |       38 |       24 |        8 |        5 |       1 |        3 |       19 |       44 |       30 |       13 |        5 |       0 |        5 |       21 |       87 |       57 |       14 |       10 |       0 |        4 |       23 |       80 |       46 |       12 |       10 |       1 |        4 |       10 |       26 |       24 |        8 |        3 |       0 |       11 |       10 |       37 |       19 |        7 |        3 |       0 |        1 |        1 |        1 |        3 |        1 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |     74 |     43 |      0 |      0 |      0 |     86 |      0 |      0 |      3 |    140 |     55 |      1 |      0 |      1 |    170 |      0 |      0 |      1 |     58 |     12 |      1 |      0 |      0 |     90 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1351900 |     711 |    200 |    331 |    12 |    0 |     0 |    3 |    1 |     5 |    0 |    159 |    0 |    0 |    0 |    0 |    339 |    372 |      12 |      26 |       8 |       1 |      8 |     18 |      7 |      0 |      3 |      4 |      1 |      0 |      0 |      2 |      0 |      0 |      5 |      5 |     10 |      1 |      1 |      3 |      4 |      2 |       2 |       3 |       1 |       1 |      7 |      7 |      5 |      0 |        1 |       23 |       25 |       14 |        5 |        3 |       0 |        7 |       39 |       48 |       21 |       10 |        4 |       0 |        7 |       50 |       73 |       32 |       13 |        4 |       0 |        1 |       50 |       61 |       23 |        9 |        8 |       0 |        7 |       24 |       28 |       15 |        6 |        0 |       0 |        9 |       31 |       19 |       11 |        5 |        4 |       0 |        0 |        4 |        3 |        1 |        1 |        0 |       0 |        2 |        5 |        1 |        1 |        3 |        0 |       0 |      0 |      3 |     64 |     20 |      0 |      0 |      0 |    113 |      0 |      0 |      2 |     86 |     24 |      0 |      0 |      1 |    218 |      0 |      0 |      3 |     37 |     14 |      1 |      0 |      0 |    104 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1352000 |     350 |     86 |    201 |     7 |    0 |     0 |    1 |    1 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    180 |    170 |       1 |       5 |       2 |       2 |      8 |     12 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       3 |       0 |      0 |      0 |      0 |      0 |        6 |        6 |        4 |       10 |       13 |        1 |       0 |        4 |        2 |        7 |       22 |       11 |        0 |       0 |        8 |        8 |       20 |       32 |       28 |        9 |       0 |        8 |        6 |       22 |       37 |       14 |        9 |       0 |        5 |        2 |        3 |       11 |        7 |        1 |       1 |        8 |        1 |        7 |        5 |        2 |        0 |       0 |        3 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |      8 |     10 |      3 |      5 |     15 |     44 |      0 |      0 |      0 |     19 |     32 |     12 |     12 |     22 |    104 |      0 |      0 |      0 |     10 |      6 |      2 |      1 |      5 |     29 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1352100 |     679 |    196 |    350 |    13 |    0 |     3 |    2 |    1 |     4 |    0 |    110 |    0 |    0 |    0 |    0 |    331 |    348 |      16 |      17 |       6 |       1 |     19 |     19 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      2 |      0 |      3 |      2 |      2 |      0 |       3 |       0 |       0 |       0 |      1 |      4 |      2 |      0 |        5 |        5 |       15 |       22 |       16 |        6 |       6 |        9 |       11 |       25 |       36 |       17 |       16 |       7 |       11 |       29 |       37 |       39 |       40 |       24 |       7 |       14 |       16 |       37 |       37 |       36 |       14 |       9 |       11 |        5 |       13 |       18 |        8 |        1 |       0 |        9 |       11 |       11 |       13 |        7 |        2 |       1 |        3 |        2 |        2 |        3 |        1 |        2 |       0 |        1 |        4 |        2 |        1 |        2 |        0 |       0 |      0 |      0 |     29 |     30 |     15 |      5 |     12 |    105 |      0 |      0 |      0 |     44 |     68 |     23 |      9 |     22 |    184 |      0 |      0 |      1 |     18 |     19 |      5 |      0 |      3 |     64 |      0 |      0 |      0 |      2 |      5 |      0 |      2 |      0 |     14 |      0 |     37 | s03      | R    |
| 1352200 |     557 |    143 |    267 |     7 |    0 |     2 |    2 |    3 |     1 |    0 |    132 |    0 |    0 |    0 |    0 |    265 |    292 |      13 |      17 |       9 |       1 |     11 |     15 |      4 |      1 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      9 |      3 |      0 |      1 |      2 |      3 |      0 |       1 |      14 |       6 |       0 |      6 |      7 |      2 |      1 |        2 |        6 |       19 |       23 |        8 |        9 |       0 |        3 |        6 |       30 |       21 |       10 |        6 |       0 |        3 |       11 |       42 |       42 |       22 |       14 |       0 |        4 |       13 |       41 |       40 |       21 |       13 |       1 |        7 |        3 |       17 |       17 |        9 |        5 |       0 |        8 |       12 |       22 |       19 |       11 |        2 |       0 |        0 |        1 |        4 |        1 |        0 |        0 |       0 |        1 |        2 |        1 |        4 |        0 |        1 |       0 |      0 |      0 |     23 |     55 |      8 |      0 |      0 |     57 |      0 |      0 |      0 |     26 |    112 |     22 |      0 |      0 |    107 |      0 |      0 |      1 |     34 |     26 |      3 |      0 |      0 |     68 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1352300 |     699 |    246 |    315 |    11 |    0 |     9 |    2 |    3 |     2 |    0 |    111 |    0 |    0 |    0 |    0 |    346 |    353 |      11 |       4 |       2 |       3 |     16 |     15 |      8 |      0 |      0 |      0 |      1 |      0 |      6 |      5 |      1 |      1 |      3 |      5 |      4 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     11 |      7 |      1 |      0 |       11 |        5 |       15 |       38 |       27 |       14 |       2 |       10 |        7 |       32 |       47 |       28 |        9 |       1 |       10 |       13 |       33 |       47 |       48 |       11 |       0 |        7 |       15 |       28 |       42 |       46 |       14 |       1 |       10 |        7 |       16 |       10 |       12 |        5 |       0 |        7 |        5 |       16 |       10 |       10 |        2 |       1 |        6 |        0 |        3 |        2 |        1 |        0 |       0 |        1 |        1 |        1 |        5 |        5 |        1 |       1 |      0 |      1 |     25 |     41 |     10 |     10 |     21 |    138 |      0 |      0 |      1 |     33 |     64 |     20 |     14 |     21 |    162 |      0 |      0 |      2 |      9 |     15 |      2 |      2 |      9 |     72 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1352400 |     811 |    250 |    415 |    18 |    0 |     1 |    2 |    3 |     3 |    0 |    119 |    0 |    0 |    0 |    0 |    398 |    413 |      23 |      33 |      12 |       0 |     26 |     21 |      6 |      2 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      5 |      4 |      1 |      1 |      2 |      2 |      2 |      0 |       3 |      10 |       4 |       1 |     16 |     20 |      5 |      0 |        2 |        6 |       24 |       40 |       15 |       13 |       2 |       15 |        8 |       27 |       58 |       29 |        9 |       2 |       11 |       23 |       40 |       69 |       53 |       22 |       2 |       11 |       14 |       38 |       70 |       43 |       18 |       1 |        9 |        8 |       10 |       17 |       11 |        4 |       0 |        5 |        7 |       18 |       17 |       10 |        3 |       0 |        3 |        4 |        4 |        3 |        2 |        1 |       0 |        1 |        3 |        4 |        2 |        0 |        0 |       0 |      0 |      0 |     43 |     34 |     19 |     16 |     26 |    112 |      0 |      0 |      0 |     49 |     49 |     38 |     27 |     65 |    187 |      0 |      0 |      0 |     17 |     17 |     11 |      1 |     13 |     60 |      0 |      0 |      0 |      2 |      7 |      2 |      0 |      1 |     15 |      0 |     37 | s03      | R    |
| 1352500 |     529 |    152 |    232 |     8 |    0 |     0 |    3 |    2 |     1 |    0 |    131 |    0 |    0 |    0 |    0 |    262 |    267 |      18 |      12 |       5 |       1 |      8 |      5 |     10 |      1 |      0 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      4 |      6 |      0 |      2 |      2 |      8 |      0 |       3 |      11 |       6 |       1 |      3 |      1 |      2 |      0 |        4 |        7 |       20 |       19 |        7 |        4 |       0 |        7 |       14 |       33 |       30 |        6 |        1 |       0 |        5 |       19 |       60 |       36 |       12 |        3 |       0 |        4 |       15 |       44 |       24 |        7 |        3 |       0 |        2 |        5 |       24 |       19 |        4 |        4 |       1 |        5 |       10 |       31 |       18 |        3 |        5 |       0 |        1 |        1 |        3 |        2 |        0 |        0 |       0 |        0 |        2 |        5 |        0 |        0 |        0 |       0 |      0 |      2 |     45 |     33 |      0 |      0 |      0 |     72 |      0 |      0 |      2 |     85 |     40 |      1 |      0 |      1 |    103 |      0 |      0 |      0 |     47 |     17 |      0 |      0 |      0 |     67 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1352600 |     499 |    133 |    251 |    12 |    0 |     3 |    1 |    0 |     0 |    0 |     99 |    0 |    0 |    0 |    0 |    235 |    264 |      21 |      16 |       7 |       1 |      6 |     10 |      6 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      6 |     10 |      0 |      0 |      1 |      0 |      0 |       5 |       6 |       2 |       1 |      2 |     10 |      3 |      0 |        0 |        9 |       20 |        6 |        3 |        4 |       0 |        3 |       24 |       36 |       20 |        4 |        4 |       0 |        5 |       40 |       66 |       25 |        3 |        1 |       0 |        5 |       36 |       47 |       15 |        3 |        5 |       0 |        5 |        9 |       17 |       11 |        1 |        2 |       0 |        2 |       18 |       21 |        5 |        3 |        5 |       0 |        0 |        1 |        5 |        2 |        0 |        0 |       0 |        2 |        2 |        2 |        2 |        0 |        0 |       0 |      0 |      2 |     30 |      3 |      0 |      1 |      0 |     97 |      0 |      0 |      7 |     62 |      3 |      0 |      3 |      0 |    176 |      0 |      0 |      2 |     21 |      0 |      0 |      1 |      0 |     75 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1352700 |    1030 |    234 |    538 |    16 |    0 |     3 |    5 |    1 |     2 |    0 |    231 |    0 |    0 |    0 |    0 |    530 |    500 |      21 |      32 |      13 |       0 |     24 |     34 |     14 |      0 |      1 |      7 |      7 |      0 |      0 |      0 |      1 |      0 |      6 |     25 |     20 |      2 |      7 |     10 |      6 |      0 |       5 |      22 |      18 |       3 |      4 |     27 |      8 |      0 |        2 |       14 |       34 |       36 |       20 |        2 |       0 |        2 |       23 |       60 |       30 |        9 |        2 |       0 |        4 |       36 |      128 |       68 |       39 |       13 |       0 |       10 |       46 |       95 |       64 |       30 |        5 |       0 |        7 |       20 |       47 |       23 |       11 |        8 |       0 |       15 |       22 |       50 |       22 |        4 |        2 |       0 |        2 |        4 |        7 |        4 |        1 |        0 |       0 |        0 |        4 |        3 |        2 |        0 |        0 |       0 |      0 |      4 |     10 |      1 |      0 |      0 |      0 |    219 |      0 |      0 |      4 |     24 |      2 |      0 |      0 |      0 |    508 |      0 |      0 |      2 |      7 |      0 |      3 |      0 |      1 |    218 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 1352800 |     118 |     43 |     50 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     60 |     58 |       2 |       1 |       1 |       0 |      1 |      1 |      1 |      0 |      2 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      4 |      1 |      1 |      1 |      0 |      0 |       1 |       7 |       2 |       0 |      4 |      0 |      0 |      0 |        4 |        2 |        3 |        8 |        0 |        1 |       0 |        2 |        5 |        3 |        5 |        8 |        2 |       0 |        0 |        4 |       12 |        4 |        4 |        2 |       0 |        0 |        4 |       10 |        5 |        2 |        3 |       0 |        0 |        3 |        4 |        4 |        5 |        0 |       0 |        1 |        0 |        2 |        5 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      9 |      7 |      5 |      0 |      0 |     21 |      0 |      0 |      0 |      3 |     17 |      3 |      2 |      0 |     25 |      0 |      0 |      0 |      5 |      3 |      3 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1353000 |      15 |      3 |      6 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |      7 |      8 |       0 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1353200 |     451 |    145 |    196 |     5 |    0 |     1 |    0 |    2 |     2 |    0 |    100 |    0 |    0 |    0 |    0 |    200 |    251 |       9 |      18 |       8 |       0 |      5 |      9 |      9 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      3 |      4 |      0 |      0 |      1 |      0 |      0 |       3 |       4 |       5 |       0 |      4 |      4 |      2 |      0 |        5 |        9 |       14 |       13 |        4 |        3 |       0 |        7 |       21 |       24 |       30 |       11 |        3 |       1 |        4 |       20 |       29 |       24 |       14 |       10 |       0 |        3 |       19 |       27 |       22 |       14 |       10 |       0 |        4 |       18 |       13 |        5 |        5 |        3 |       0 |        6 |       11 |       15 |       14 |        5 |        1 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        1 |        4 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |     18 |     34 |     12 |      3 |      0 |     78 |      0 |      0 |      3 |     23 |     40 |     18 |      5 |      0 |    107 |      0 |      0 |      2 |     18 |      5 |      6 |      0 |      0 |     69 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1353300 |     239 |     82 |     95 |     4 |    0 |     1 |    3 |    0 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    111 |    128 |       2 |       1 |       1 |       0 |      7 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      6 |      3 |      1 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      4 |      0 |      0 |      0 |        3 |        3 |       13 |       13 |        0 |        2 |       0 |        3 |        7 |       12 |       16 |        8 |        2 |       0 |        4 |        7 |       19 |       16 |        4 |        3 |       0 |        1 |        4 |       17 |       15 |        2 |        3 |       0 |        2 |        4 |        4 |        6 |        1 |        3 |       0 |        2 |        6 |       12 |        9 |        3 |        1 |       0 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      1 |      8 |     19 |     11 |      2 |      0 |     41 |      0 |      0 |      0 |     10 |     27 |      6 |      0 |      0 |     52 |      0 |      0 |      0 |     13 |      6 |      2 |      1 |      0 |     31 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1353500 |     112 |     17 |     67 |     6 |    0 |     0 |    0 |    1 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     52 |     60 |       0 |       2 |       0 |       0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       4 |       0 |      0 |      3 |      0 |      0 |        0 |        0 |        2 |        3 |        0 |        0 |       0 |        3 |        0 |        5 |        1 |        3 |        0 |       0 |        3 |        4 |        6 |        9 |        8 |        2 |       0 |        3 |        6 |        7 |       13 |        4 |        2 |       0 |        2 |        1 |        4 |        4 |        1 |        0 |       0 |        3 |        1 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |     13 |      1 |      3 |      0 |      0 |     50 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |     17 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1353600 |     203 |     43 |    119 |     5 |    0 |     0 |    0 |    0 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |    101 |    102 |       2 |       5 |       0 |       0 |      4 |      2 |      2 |      0 |      0 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      1 |        1 |        0 |        2 |       12 |        0 |        4 |       0 |        1 |        0 |        4 |       15 |        1 |        3 |       0 |        4 |        3 |       11 |       17 |       16 |        7 |       0 |        6 |        1 |       20 |       18 |        9 |        7 |       0 |        2 |        2 |        3 |        9 |        3 |        4 |       0 |        1 |        0 |        5 |        2 |        3 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |      6 |     16 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |     20 |     57 |      0 |      0 |      0 |     42 |      0 |      0 |      0 |      8 |     13 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1353700 |     172 |     44 |     82 |     2 |    0 |     0 |    2 |    0 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |     78 |     94 |       1 |       4 |       2 |       0 |      1 |      6 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      6 |      0 |      2 |      2 |      1 |      0 |       0 |       3 |       2 |       0 |      0 |      1 |      3 |      0 |        1 |        0 |        7 |        6 |        0 |        0 |       0 |        0 |        2 |       21 |        6 |        1 |        0 |       0 |        0 |        2 |       17 |       19 |        2 |        1 |       0 |        1 |        5 |       21 |       12 |        0 |        2 |       0 |        1 |        3 |       11 |        5 |        1 |        0 |       0 |        3 |        4 |        9 |        5 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     19 |      6 |      0 |      0 |      0 |     19 |      0 |      0 |      1 |     33 |     18 |      0 |      0 |      0 |     30 |      0 |      0 |      0 |     15 |      2 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1354000 |     105 |     44 |     34 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     27 |     78 |      11 |       2 |       6 |       1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        7 |        0 |        2 |        1 |        0 |        1 |       0 |       21 |        4 |        6 |        2 |        0 |        0 |       0 |        4 |        0 |        2 |        0 |        1 |        1 |       0 |       10 |       10 |        6 |        0 |        0 |        0 |       0 |        3 |        4 |        1 |        0 |        0 |        0 |       0 |        8 |        6 |        4 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     42 |      0 |      0 |      1 |      4 |      0 |      1 |      0 |      0 |     28 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1354100 |     507 |    111 |    283 |    12 |    0 |     1 |    2 |    1 |     2 |    0 |     95 |    0 |    0 |    0 |    0 |    244 |    263 |       4 |       7 |       3 |       2 |     13 |     14 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      1 |        4 |        0 |        9 |       22 |        7 |        7 |       1 |        6 |        2 |       12 |       24 |       12 |        4 |       1 |       11 |        7 |       25 |       52 |       38 |       10 |       1 |       11 |        6 |       35 |       55 |       26 |        5 |       1 |        6 |        3 |        7 |       16 |        7 |        2 |       0 |       10 |        5 |        8 |       20 |        9 |        2 |       0 |        1 |        0 |        3 |        1 |        2 |        2 |       0 |        2 |        4 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |     15 |     17 |     10 |      0 |     14 |     55 |      0 |      0 |      0 |     35 |     56 |     19 |     17 |     25 |    131 |      0 |      0 |      1 |     19 |      8 |      4 |      5 |      3 |     55 |      0 |      0 |      0 |      4 |      6 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1354200 |     869 |    258 |    424 |    16 |    0 |     5 |    1 |    1 |     2 |    0 |    162 |    0 |    0 |    0 |    0 |    427 |    442 |      14 |       3 |       5 |       1 |     46 |     17 |     21 |      4 |      0 |      1 |      2 |      0 |      5 |      4 |      0 |      0 |      4 |      8 |      6 |      0 |      0 |      1 |      0 |      0 |       1 |       1 |       2 |       0 |      1 |      2 |      1 |      0 |       15 |        4 |       18 |       39 |       25 |        9 |       2 |        6 |        8 |       26 |       72 |       25 |        8 |       1 |       12 |        7 |       40 |       81 |       61 |       22 |       0 |       15 |        9 |       41 |       79 |       36 |       21 |       0 |       18 |        4 |       14 |       31 |       14 |        3 |       1 |       16 |        6 |       17 |       27 |        8 |        3 |       0 |        1 |        0 |        1 |        3 |        2 |        0 |       0 |        5 |        1 |        2 |        5 |        5 |        0 |       0 |      0 |      1 |     37 |     55 |     15 |     12 |     25 |    113 |      0 |      0 |      3 |     49 |     75 |     26 |     19 |     43 |    209 |      0 |      0 |      1 |     28 |     24 |     13 |      5 |      9 |     82 |      0 |      0 |      0 |      5 |      6 |      2 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 1354300 |     294 |     78 |    152 |     4 |    0 |     3 |    0 |    0 |     0 |    0 |     57 |    0 |    0 |    0 |    0 |    139 |    155 |       0 |       4 |       1 |       0 |      8 |     13 |      9 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      3 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        4 |       10 |        9 |        2 |       0 |        5 |        2 |       11 |       25 |        3 |        2 |       0 |        3 |        2 |       23 |       20 |       15 |        8 |       0 |        6 |        4 |       28 |       27 |        9 |        6 |       1 |        2 |        0 |        7 |       17 |        9 |        1 |       0 |        5 |        2 |        6 |        5 |        1 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |     30 |      4 |      1 |      3 |      4 |     36 |      0 |      0 |      1 |     52 |      9 |      7 |      7 |     10 |     66 |      0 |      0 |      0 |     11 |      6 |      0 |      2 |      4 |     34 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 1354600 |     160 |     40 |     75 |     3 |    0 |     3 |    0 |    0 |     2 |    0 |     37 |    0 |    0 |    0 |    0 |     77 |     83 |       4 |       3 |       2 |       1 |      1 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |       1 |       1 |       0 |       0 |      3 |      0 |      4 |      0 |        0 |        1 |        7 |        2 |        2 |        1 |       0 |        1 |        3 |       12 |        6 |        4 |        1 |       0 |        0 |        6 |       18 |       10 |        3 |        1 |       0 |        2 |        4 |       22 |        8 |        1 |        0 |       0 |        2 |        6 |        7 |        6 |        0 |        0 |       0 |        1 |        1 |        8 |        4 |        2 |        0 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |     24 |      0 |      0 |      1 |      0 |     50 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      0 |     30 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1354700 |      21 |      5 |      8 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     10 |     11 |       0 |       0 |       0 |       0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        3 |        0 |        1 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1354800 |      95 |     27 |     48 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     52 |     43 |       5 |       5 |       3 |       0 |      4 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       3 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        6 |        1 |        3 |        2 |       0 |        0 |        5 |        4 |        3 |        1 |        0 |       0 |        0 |        5 |       16 |        6 |        3 |        0 |       0 |        0 |        4 |       10 |        2 |        2 |        0 |       0 |        1 |        0 |        3 |        2 |        0 |        1 |       0 |        1 |        3 |        6 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     14 |      2 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |     18 |     13 |      0 |      1 |      0 |     16 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1355000 |      33 |     13 |     13 |     0 |    0 |     1 |    0 |    1 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     14 |     19 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        0 |        1 |       0 |        0 |        2 |        2 |        2 |        1 |        1 |       0 |        1 |        1 |        1 |        2 |        0 |        2 |       0 |        0 |        1 |        0 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      2 |      4 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1355100 |      41 |     12 |     20 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     19 |     22 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        1 |        3 |        5 |        1 |        0 |       0 |        1 |        0 |        2 |        3 |        2 |        2 |       0 |        1 |        0 |        4 |        3 |        2 |        0 |       0 |        0 |        0 |        3 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      2 |      0 |      1 |      5 |      0 |      0 |      0 |      3 |      8 |      1 |      1 |      1 |      6 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1355200 |     129 |     38 |     49 |     5 |    0 |     1 |    1 |    0 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |     61 |     68 |       3 |       3 |       6 |       0 |      1 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       4 |       0 |      2 |      0 |      0 |      0 |        0 |        3 |        2 |        5 |        2 |        1 |       0 |        1 |        4 |        6 |       10 |        3 |        1 |       0 |        0 |        3 |       10 |       10 |        1 |        2 |       0 |        0 |        5 |        8 |        6 |        1 |        3 |       0 |        1 |        4 |        9 |        4 |        0 |        2 |       0 |        1 |        2 |        9 |        2 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        3 |        0 |        0 |       0 |      0 |      0 |      6 |      3 |      7 |      5 |      0 |     17 |      0 |      0 |      0 |      9 |     11 |      7 |      1 |      0 |     21 |      0 |      0 |      0 |      8 |      4 |      6 |      1 |      0 |     16 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1355400 |     275 |     72 |    139 |     3 |    0 |     2 |    1 |    2 |     4 |    0 |     52 |    0 |    0 |    0 |    0 |    133 |    142 |       2 |       2 |       0 |       0 |      6 |      8 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |        4 |        1 |        3 |        5 |        6 |        4 |       1 |        4 |        1 |       10 |       18 |       10 |        2 |       3 |        7 |        5 |        6 |       22 |       22 |       10 |       1 |        3 |        4 |       13 |       20 |       16 |       10 |       0 |        3 |        4 |        5 |       10 |        7 |        0 |       0 |        5 |        2 |        3 |        7 |        5 |        1 |       0 |        2 |        2 |        0 |        2 |        1 |        0 |       0 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |     20 |      5 |      2 |      4 |     37 |      0 |      0 |      0 |     11 |     25 |      9 |      5 |      8 |     81 |      0 |      0 |      0 |      6 |     12 |      4 |      3 |      0 |     27 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1355500 |      95 |     28 |     43 |     1 |    0 |     0 |    2 |    0 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     50 |     45 |       1 |       4 |       1 |       0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      1 |       0 |       1 |       0 |       0 |      2 |      0 |      1 |      0 |        0 |        0 |        6 |        5 |        1 |        1 |       0 |        0 |        2 |        8 |        4 |        1 |        0 |       0 |        0 |        5 |       10 |        2 |        5 |        0 |       0 |        0 |        4 |        5 |        6 |        5 |        1 |       0 |        1 |        1 |        6 |        3 |        2 |        1 |       0 |        3 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |     12 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      7 |     11 |      2 |      0 |      0 |     23 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1355600 |     321 |    112 |    131 |     3 |    0 |     2 |    2 |    0 |     2 |    0 |     69 |    0 |    0 |    0 |    0 |    155 |    166 |       8 |       7 |      10 |       0 |     10 |      8 |      5 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      4 |      3 |      2 |      0 |       0 |       0 |       1 |       0 |      4 |      1 |      3 |      0 |        1 |        7 |       21 |       12 |        5 |        1 |       0 |        3 |       16 |       20 |       17 |        6 |        3 |       0 |        2 |       21 |       28 |       10 |        8 |        1 |       0 |        1 |       14 |       21 |       12 |        8 |        5 |       0 |        1 |        8 |       10 |        9 |        6 |        1 |       0 |        2 |        8 |       18 |        3 |        2 |        1 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        1 |        1 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |     40 |      0 |      0 |      0 |     66 |      0 |      0 |      0 |     14 |     47 |      1 |      0 |      1 |     68 |      0 |      0 |      0 |      5 |     24 |      1 |      0 |      0 |     39 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1355700 |      31 |      6 |     18 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     14 |     17 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        1 |        0 |        0 |       0 |        0 |        3 |        1 |        2 |        0 |        0 |       0 |        0 |        2 |        9 |        0 |        1 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1355900 |       4 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1404000 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1407000 |     311 |     73 |    154 |     9 |    0 |     3 |    2 |    0 |     0 |    0 |     70 |    0 |    0 |    0 |    0 |    155 |    156 |      15 |      21 |      18 |       3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      0 |       14 |       12 |        6 |        2 |        1 |        0 |       0 |        7 |       16 |       14 |        0 |        1 |        0 |       0 |       27 |       28 |       18 |        3 |        0 |        2 |       0 |       21 |       33 |       17 |        4 |        1 |        0 |       0 |       18 |       12 |        4 |        1 |        0 |        0 |       0 |        5 |       14 |       12 |        3 |        1 |        0 |       0 |        3 |        2 |        0 |        1 |        0 |        1 |       0 |        2 |        1 |        3 |        1 |        0 |        0 |       0 |      0 |      2 |     13 |      1 |      0 |      0 |      0 |     57 |      0 |      0 |      0 |     18 |      3 |      0 |      0 |      0 |    133 |      0 |      0 |      0 |      6 |      1 |      0 |      0 |      0 |     63 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1408100 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1450000 |     401 |    154 |    154 |     6 |    0 |     4 |    5 |    0 |     4 |    0 |     74 |    0 |    0 |    0 |    0 |    192 |    209 |      10 |       1 |       3 |       0 |      9 |      4 |      3 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      2 |      3 |      2 |      1 |        8 |        9 |       12 |       10 |       11 |       11 |       7 |        7 |        7 |       11 |       20 |       13 |       16 |      12 |        7 |        6 |       20 |       14 |        8 |       14 |       8 |        7 |        4 |       19 |       10 |       11 |       16 |      10 |        6 |        9 |        6 |        5 |        5 |        3 |       2 |        5 |        8 |        9 |        7 |        4 |        4 |       1 |        2 |        2 |        4 |        1 |        0 |        2 |       0 |        1 |        2 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |     19 |     39 |      6 |      1 |      7 |     82 |      0 |      0 |      0 |     19 |     22 |     11 |      5 |      7 |     90 |      0 |      0 |      1 |      8 |      6 |      4 |      0 |      2 |     53 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 1450100 |     444 |    156 |    165 |     8 |    0 |     5 |    3 |    2 |     6 |    0 |     99 |    0 |    0 |    0 |    0 |    231 |    213 |      11 |       6 |       6 |       3 |     19 |      3 |      8 |      1 |      0 |      2 |      2 |      0 |      1 |      0 |      1 |      0 |      4 |      2 |      5 |      0 |      0 |      2 |      2 |      0 |       6 |       2 |       8 |       1 |      1 |      2 |      2 |      0 |       13 |        5 |        7 |       21 |       15 |        7 |       7 |        8 |        6 |        5 |       28 |       22 |        6 |       6 |        9 |        9 |       13 |       24 |       19 |       12 |       5 |        4 |        8 |        7 |       18 |       17 |       16 |       4 |        7 |       12 |        8 |        7 |       10 |        7 |       0 |        6 |        8 |       14 |        9 |        7 |        3 |       1 |        1 |        6 |        2 |        3 |        1 |        1 |       0 |        1 |        1 |        4 |        1 |        0 |        3 |       0 |      0 |      1 |     14 |     21 |     14 |      1 |      9 |     96 |      0 |      0 |      1 |     11 |     27 |     11 |      5 |     10 |    100 |      0 |      0 |      1 |     10 |     13 |      6 |      2 |      3 |     64 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1451000 |     678 |    263 |    263 |    16 |    0 |     5 |    2 |    1 |     0 |    0 |    128 |    0 |    0 |    0 |    0 |    269 |    409 |       8 |       9 |       0 |       1 |     27 |     16 |     10 |      5 |      1 |      2 |      1 |      0 |      1 |      2 |      3 |      0 |      3 |      3 |      3 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      3 |      0 |      0 |      0 |        7 |        2 |        5 |        4 |       10 |       73 |       1 |        0 |        3 |        6 |        6 |       20 |      125 |       1 |        3 |        6 |        8 |        9 |       16 |       54 |       0 |        1 |        7 |        7 |       15 |       21 |      112 |       4 |       10 |        4 |        2 |        0 |       10 |       33 |       0 |        7 |        7 |        4 |        2 |       16 |       32 |       1 |        0 |        1 |        1 |        0 |        2 |        8 |       0 |        1 |        1 |        1 |        0 |        2 |        7 |       0 |      0 |      0 |     32 |     47 |      6 |     13 |      8 |    157 |      0 |      0 |      1 |     39 |     38 |     12 |     10 |     12 |    151 |      0 |      0 |      1 |     22 |     22 |      4 |      2 |      1 |     76 |      0 |      0 |      0 |      2 |      8 |      0 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 1452000 |     502 |    181 |    213 |     8 |    0 |     5 |    2 |    0 |     5 |    0 |     88 |    0 |    0 |    0 |    0 |    238 |    264 |       7 |       9 |       6 |       0 |     21 |     10 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      3 |      8 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      4 |      3 |      2 |      0 |       10 |        7 |       11 |       29 |       12 |       10 |       2 |       14 |        9 |       21 |       25 |       15 |       10 |       6 |        5 |        4 |       12 |       27 |       27 |       25 |       3 |       10 |        7 |       22 |       24 |       16 |       26 |       5 |        6 |        8 |        7 |       14 |        6 |        3 |       0 |        7 |        8 |        5 |       12 |        2 |        8 |       2 |        2 |        2 |        2 |        1 |        2 |        1 |       0 |        2 |        3 |        1 |        2 |        2 |        0 |       0 |      0 |      0 |     18 |     31 |      6 |      3 |      5 |    118 |      0 |      0 |      0 |     24 |     43 |      8 |     13 |      4 |    121 |      0 |      0 |      0 |     15 |     12 |      3 |      0 |      1 |     57 |      0 |      0 |      1 |      3 |      3 |      2 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 1455000 |     404 |    149 |    177 |     1 |    0 |     3 |    3 |    2 |     3 |    0 |     66 |    0 |    0 |    0 |    0 |    197 |    207 |       3 |       5 |       3 |       0 |     20 |      8 |      5 |      3 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      2 |      9 |      1 |      0 |      0 |      0 |      0 |       4 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |       11 |        3 |        9 |       16 |       10 |        4 |       3 |        9 |        6 |       15 |       33 |       11 |       13 |       6 |        9 |       10 |       15 |       15 |       17 |       23 |       9 |        4 |        2 |       13 |        6 |       19 |       21 |      14 |        4 |        6 |        7 |        9 |        5 |        4 |       0 |        4 |        4 |        6 |        8 |        6 |        1 |       2 |        5 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |     16 |     19 |      9 |      3 |      4 |     96 |      0 |      0 |      0 |     14 |     25 |      9 |     10 |      5 |    114 |      0 |      0 |      0 |      9 |      7 |      4 |      1 |      3 |     42 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1456000 |     473 |    187 |    161 |     7 |    0 |     2 |    1 |    3 |     9 |    0 |    103 |    0 |    0 |    0 |    0 |    238 |    235 |      18 |       9 |       7 |       0 |     14 |     13 |     10 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      2 |      1 |      3 |      7 |      4 |      0 |      0 |      2 |      0 |      0 |       1 |       6 |       1 |       0 |      1 |      0 |      3 |      0 |       13 |       10 |       18 |       14 |       13 |        9 |       4 |        7 |       14 |       17 |       24 |       18 |       16 |      10 |        6 |       16 |       18 |       16 |       12 |       13 |       9 |        5 |        8 |       13 |        7 |       16 |       13 |       9 |        7 |        3 |       16 |       16 |        4 |        9 |       0 |       14 |        9 |       10 |        6 |        4 |        5 |       0 |        4 |        2 |        1 |        2 |        3 |        0 |       0 |        0 |        1 |        2 |        3 |        3 |        1 |       0 |      0 |      0 |     29 |     25 |     11 |      3 |      1 |    118 |      0 |      0 |      0 |     10 |     31 |      9 |      2 |      4 |    105 |      0 |      0 |      4 |     16 |     10 |      4 |      1 |      2 |     66 |      0 |      0 |      0 |      3 |      5 |      1 |      2 |      0 |     11 |      0 |     37 | s03      | R    |
| 1457000 |     414 |    153 |    154 |     3 |    0 |     3 |    3 |    2 |     2 |    0 |     94 |    0 |    0 |    0 |    0 |    200 |    214 |       6 |       1 |       5 |       0 |     19 |     11 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |      1 |      3 |      0 |      0 |        7 |       12 |        3 |       13 |       14 |        8 |       7 |        5 |       12 |        9 |       17 |       22 |       14 |      10 |        5 |        7 |       12 |       14 |       17 |       14 |      11 |        2 |        2 |        8 |        9 |       17 |       22 |      14 |        8 |        9 |        3 |        7 |        9 |        8 |       2 |       16 |        8 |        6 |        5 |        4 |        5 |       4 |        2 |        3 |        2 |        1 |        1 |        1 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     17 |     26 |     11 |      3 |      2 |     94 |      0 |      0 |      0 |     18 |     24 |      5 |      4 |      5 |     98 |      0 |      0 |      0 |      9 |     11 |      4 |      4 |      4 |     62 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1458000 |     515 |    199 |    217 |     7 |    0 |     1 |    5 |    1 |     3 |    0 |     82 |    0 |    0 |    0 |    0 |    252 |    263 |      14 |       9 |       3 |       1 |     15 |     23 |      5 |      3 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |     10 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |       0 |       1 |       1 |       0 |      1 |      0 |      1 |      0 |        8 |        5 |        9 |       17 |       17 |       17 |      10 |        7 |        9 |       15 |       24 |       21 |       24 |      16 |        7 |        4 |       24 |       19 |       14 |       34 |      17 |        3 |        4 |       10 |       14 |       17 |       29 |      21 |        7 |       10 |        7 |        7 |        6 |        3 |       2 |        9 |        7 |        9 |        6 |        4 |        4 |       1 |        2 |        2 |        0 |        2 |        1 |        1 |       0 |        0 |        1 |        3 |        2 |        3 |        0 |       0 |      0 |      0 |     21 |     36 |      7 |     11 |      7 |    117 |      0 |      0 |      1 |     11 |     36 |      9 |      6 |     13 |    141 |      0 |      0 |      1 |     12 |     12 |      7 |      1 |      0 |     49 |      0 |      0 |      0 |      1 |      7 |      3 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 1458100 |     380 |    149 |    138 |     6 |    0 |     2 |    1 |    0 |     3 |    0 |     81 |    0 |    0 |    0 |    0 |    160 |    220 |       8 |       3 |       6 |       0 |     14 |      8 |      5 |      1 |      0 |      1 |      0 |      0 |      2 |      1 |      3 |      0 |      2 |      1 |      3 |      0 |      1 |      4 |      0 |      0 |       1 |       0 |       1 |       0 |      0 |      0 |      1 |      0 |        2 |        6 |       12 |        7 |        8 |       13 |       6 |        9 |        3 |       14 |       24 |       13 |       22 |      10 |        1 |        8 |       15 |       13 |        8 |       12 |       7 |        2 |        7 |       17 |        9 |       13 |       21 |       5 |        5 |       10 |        9 |        6 |        3 |        3 |       0 |        7 |       10 |        5 |        8 |       11 |        3 |       1 |        1 |        1 |        1 |        2 |        0 |        1 |       0 |        1 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     14 |     20 |     12 |      8 |      6 |     89 |      0 |      0 |      0 |     12 |     24 |      9 |      2 |      7 |     84 |      0 |      0 |      0 |     12 |     17 |      1 |      2 |      0 |     49 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1459000 |     528 |    181 |    226 |     6 |    0 |     4 |    3 |    1 |     6 |    0 |    101 |    0 |    0 |    0 |    0 |    230 |    298 |      11 |       4 |       3 |       1 |     20 |      9 |      8 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      4 |      6 |      7 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        7 |        5 |       10 |        4 |       12 |       20 |       5 |        3 |       12 |       15 |       12 |       15 |       53 |       8 |        5 |       10 |       14 |       11 |       14 |       37 |      16 |        2 |       11 |        9 |       10 |       27 |       48 |      12 |        3 |       14 |        6 |        8 |        4 |       13 |       2 |        6 |        2 |        8 |        6 |       12 |       17 |       0 |        3 |        0 |        5 |        1 |        1 |        0 |       0 |        1 |        2 |        3 |        1 |        1 |        2 |       0 |      0 |      0 |     26 |     26 |     10 |      5 |      6 |    108 |      0 |      0 |      1 |     22 |     28 |     12 |      5 |     12 |    146 |      0 |      0 |      2 |     14 |      9 |      6 |      2 |      5 |     63 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1459100 |     173 |     61 |     84 |     3 |    0 |     0 |    0 |    0 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |     83 |     90 |       2 |       2 |       0 |       0 |      9 |      5 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        2 |        6 |        3 |        5 |       2 |        3 |        5 |        4 |        7 |        7 |       12 |       1 |        1 |        3 |       10 |        6 |        6 |       18 |       3 |        0 |        3 |        6 |        2 |        9 |       13 |       4 |        2 |        0 |        2 |        1 |        1 |        3 |       3 |        3 |        2 |        1 |        2 |        2 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |     15 |      5 |      1 |      1 |     35 |      0 |      0 |      0 |      5 |     28 |      4 |      3 |      1 |     43 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |     20 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1460000 |     454 |    176 |    144 |     7 |    0 |     5 |    7 |    0 |     7 |    0 |    108 |    0 |    0 |    0 |    0 |    223 |    231 |      11 |       6 |      11 |       0 |     16 |     12 |     11 |      1 |      1 |      1 |      2 |      0 |      2 |      0 |      2 |      0 |      6 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      4 |      1 |      2 |      0 |        5 |       10 |       11 |       16 |       12 |       21 |       2 |        8 |       20 |       14 |       20 |       18 |       17 |       2 |        3 |        6 |       19 |       16 |        8 |       21 |       4 |        2 |        6 |        8 |       10 |       10 |       24 |       7 |       11 |       11 |        9 |        8 |        6 |        9 |       3 |       10 |       10 |       10 |        9 |        5 |        6 |       1 |        0 |        2 |        4 |        3 |        1 |        2 |       0 |        4 |        2 |        3 |        2 |        1 |        2 |       0 |      0 |      2 |     17 |     29 |     11 |      4 |      5 |    108 |      0 |      0 |      0 |      8 |     30 |      2 |      5 |      3 |     96 |      0 |      0 |      1 |     14 |     14 |      6 |      2 |      4 |     67 |      0 |      0 |      0 |      4 |      7 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1461000 |     423 |    133 |    195 |     3 |    0 |     1 |    7 |    2 |     2 |    0 |     80 |    0 |    0 |    0 |    0 |    194 |    229 |       5 |       5 |       0 |       0 |     16 |     12 |      9 |      1 |      0 |      0 |      0 |      0 |      6 |      3 |      0 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      1 |        3 |        3 |        5 |       21 |        7 |        8 |       5 |        9 |        5 |        8 |       24 |       12 |       17 |       6 |        1 |        7 |       17 |       12 |       19 |       27 |      13 |        3 |        8 |       12 |       16 |       25 |       18 |      17 |        4 |        7 |        6 |        6 |       13 |        3 |       0 |        8 |        7 |        9 |        6 |        9 |        2 |       0 |        1 |        1 |        1 |        4 |        0 |        0 |       0 |        0 |        2 |        2 |        3 |        0 |        1 |       0 |      0 |      0 |     16 |     22 |      8 |      6 |      9 |     72 |      0 |      0 |      0 |     12 |     38 |     13 |      7 |      6 |    119 |      0 |      0 |      0 |     13 |      7 |      3 |      4 |      6 |     47 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1462000 |     504 |    188 |    207 |     3 |    0 |     4 |    7 |    0 |     6 |    0 |     89 |    0 |    0 |    0 |    0 |    246 |    258 |       8 |      11 |       5 |       1 |     32 |     19 |     13 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      9 |      2 |      3 |      0 |      0 |      0 |       1 |       1 |       0 |       2 |      0 |      0 |      0 |      0 |        9 |        5 |       12 |       20 |       15 |       13 |       2 |       12 |        8 |       15 |       33 |       17 |       20 |       7 |        8 |        9 |       19 |       26 |       20 |       22 |       4 |        8 |        7 |       13 |       20 |       23 |       21 |       7 |       10 |       10 |        4 |       17 |        8 |        1 |       0 |       11 |        2 |        8 |       14 |        4 |        0 |       0 |        4 |        2 |        1 |        2 |        2 |        1 |       0 |        1 |        0 |        1 |        1 |        3 |        2 |       0 |      0 |      1 |     20 |     40 |     10 |      4 |      7 |    106 |      0 |      0 |      0 |     24 |     43 |     10 |      8 |     12 |    110 |      0 |      0 |      0 |     14 |     13 |      3 |      4 |      4 |     51 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1464000 |     513 |    191 |    220 |    11 |    0 |     4 |    1 |    2 |     4 |    0 |     80 |    0 |    0 |    0 |    0 |    254 |    259 |       2 |       3 |       1 |       1 |     14 |     14 |      4 |      1 |      0 |      1 |      0 |      0 |      4 |      2 |      1 |      0 |      5 |      1 |      4 |      2 |      1 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |       13 |        9 |       13 |       20 |       15 |       11 |       7 |       11 |        7 |       20 |       25 |       14 |       20 |       6 |        5 |        5 |       22 |       16 |       13 |       38 |       7 |        4 |        3 |       14 |       14 |       25 |       37 |      17 |        6 |        5 |       13 |       10 |        7 |        6 |       1 |        1 |        4 |        8 |        7 |        8 |        4 |       0 |        2 |        5 |        0 |        0 |        3 |        2 |       0 |        1 |        3 |        3 |        2 |        0 |        1 |       0 |      0 |      0 |     22 |     25 |      5 |      2 |      7 |    130 |      0 |      0 |      0 |     16 |     46 |     13 |     10 |     12 |    123 |      0 |      0 |      0 |     14 |      8 |      9 |      2 |      2 |     45 |      0 |      0 |      0 |      5 |      7 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1466000 |     507 |    196 |    234 |     7 |    0 |     4 |    4 |    1 |     4 |    0 |     57 |    0 |    0 |    0 |    0 |    236 |    271 |       6 |       4 |       1 |       1 |     23 |     10 |      8 |      3 |      2 |      0 |      1 |      0 |      8 |      0 |      2 |      0 |      3 |      5 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |       10 |        7 |       18 |       17 |       22 |       7 |        8 |       12 |       13 |       21 |       23 |       26 |       9 |        5 |       12 |       17 |       19 |       20 |       27 |      13 |        5 |        7 |       14 |       22 |       22 |       34 |      17 |        3 |        7 |        7 |        3 |        6 |        2 |       0 |        7 |        7 |        4 |        3 |        4 |        4 |       0 |        3 |        0 |        3 |        1 |        1 |        3 |       0 |        1 |        2 |        2 |        1 |        1 |        1 |       1 |      0 |      1 |     19 |     43 |     12 |      4 |      8 |    109 |      0 |      0 |      0 |     15 |     36 |     13 |     13 |     10 |    147 |      0 |      0 |      1 |      7 |      9 |      1 |      3 |      1 |     35 |      0 |      0 |      0 |      3 |      5 |      2 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 1468000 |     456 |    182 |    170 |     6 |    0 |     2 |    4 |    1 |     7 |    0 |     84 |    0 |    0 |    0 |    0 |    230 |    226 |      11 |       3 |       2 |       1 |     16 |     12 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      8 |      5 |      0 |      0 |      0 |      3 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        9 |        9 |        7 |       14 |       14 |       21 |       5 |       10 |        8 |       21 |       11 |       14 |       27 |      12 |        7 |        4 |       19 |       14 |        8 |       26 |      12 |        1 |        5 |        9 |        9 |       12 |       27 |      17 |        7 |        7 |        9 |        8 |        6 |        7 |       2 |       10 |        6 |       11 |        4 |        2 |        5 |       0 |        5 |        1 |        2 |        4 |        1 |        2 |       0 |        0 |        0 |        1 |        4 |        0 |        0 |       0 |      0 |      0 |     23 |     27 |     12 |      5 |     13 |    102 |      0 |      0 |      1 |     13 |     34 |      2 |      6 |      5 |    109 |      0 |      0 |      0 |     11 |      8 |      4 |      1 |      1 |     59 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1470000 |     350 |    143 |    150 |     4 |    0 |     2 |    1 |    0 |     2 |    0 |     48 |    0 |    0 |    0 |    0 |    165 |    185 |       9 |       1 |       4 |       0 |     15 |     11 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        7 |        4 |        5 |       16 |       10 |        9 |       7 |        7 |        3 |       13 |       24 |       11 |       17 |      10 |        1 |        6 |        8 |       16 |       17 |       21 |       9 |        2 |        3 |       10 |       10 |       15 |       21 |      11 |        2 |        2 |        3 |        6 |        6 |        3 |       2 |        3 |        4 |        4 |        5 |        5 |        2 |       1 |        1 |        1 |        2 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        2 |       0 |      0 |      0 |     11 |     32 |      7 |      3 |      9 |     81 |      0 |      0 |      0 |      5 |     21 |     10 |      4 |      8 |    102 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      0 |     36 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1471000 |     265 |    104 |    110 |     4 |    0 |     3 |    0 |    0 |     2 |    0 |     42 |    0 |    0 |    0 |    0 |    119 |    146 |       7 |       1 |       0 |       0 |     11 |      7 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        4 |        7 |        8 |        6 |        8 |       6 |        6 |        5 |        9 |        8 |       11 |       16 |       8 |        1 |        4 |       11 |        6 |        7 |       21 |       4 |        0 |        2 |        7 |        5 |        4 |       30 |       8 |        1 |        2 |        4 |        9 |        1 |        3 |       0 |        5 |        2 |        2 |        4 |        4 |        4 |       1 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        1 |        2 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |     14 |     15 |      6 |      0 |      5 |     64 |      0 |      0 |      1 |      8 |     23 |      6 |      2 |      5 |     65 |      0 |      0 |      1 |      5 |      6 |      3 |      1 |      1 |     25 |      0 |      0 |      0 |      3 |      3 |      0 |      2 |      0 |      1 |      0 |     37 | s03      | R    |
| 1472000 |     287 |    101 |    125 |     6 |    0 |     2 |    0 |    2 |     1 |    0 |     50 |    0 |    0 |    0 |    0 |    138 |    149 |       6 |       4 |       1 |       0 |     13 |      2 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |      1 |      0 |       0 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        5 |        1 |        8 |        7 |        6 |      10 |        4 |        5 |        6 |       20 |        9 |        7 |      11 |        5 |        1 |        8 |       15 |       19 |       10 |       8 |        4 |        3 |        7 |        9 |       13 |       14 |       9 |        4 |        3 |        4 |        6 |        1 |        5 |       2 |        6 |        3 |        5 |        1 |        2 |        6 |       2 |        3 |        2 |        2 |        0 |        0 |        1 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |     12 |     14 |     11 |      5 |      4 |     55 |      0 |      0 |      2 |      9 |     19 |      2 |      5 |      8 |     80 |      0 |      0 |      1 |      4 |      7 |      5 |      1 |      0 |     32 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1472100 |     366 |    125 |    162 |     6 |    0 |     4 |    3 |    1 |     2 |    0 |     63 |    0 |    0 |    0 |    0 |    165 |    201 |       5 |      11 |       2 |       2 |     12 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      2 |      9 |      0 |      1 |      0 |      1 |      0 |       2 |       0 |       0 |       0 |      4 |      1 |      0 |      0 |        1 |        3 |        6 |        7 |       13 |        6 |       4 |       15 |        8 |        9 |       20 |       17 |        8 |       8 |        2 |        6 |       13 |       20 |       15 |       19 |       8 |        1 |        2 |       15 |       21 |       15 |       15 |      10 |        2 |        6 |        4 |        6 |        3 |        9 |       2 |        5 |        4 |        6 |        7 |        3 |        5 |       1 |        3 |        4 |        1 |        0 |        2 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        2 |       0 |      0 |      1 |     14 |     13 |     14 |      7 |      4 |     72 |      0 |      0 |      0 |     15 |     32 |      9 |      4 |     12 |     90 |      0 |      0 |      1 |      7 |      5 |      2 |      3 |      1 |     44 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1500000 |      60 |     22 |     26 |     1 |    0 |     1 |    2 |    0 |     1 |    0 |      7 |    0 |    0 |    0 |    0 |     31 |     29 |       1 |       1 |       0 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        4 |        3 |        3 |        1 |       0 |        1 |        0 |        2 |        4 |        2 |        1 |       0 |        0 |        1 |        4 |        1 |        4 |        3 |       0 |        0 |        1 |        0 |        5 |        3 |        4 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      2 |      1 |      2 |      1 |      0 |     20 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1501000 |     214 |     69 |     78 |    10 |    0 |     6 |    7 |    0 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |     97 |    117 |       6 |       2 |       4 |       5 |      1 |      2 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       2 |       4 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        9 |        7 |        5 |        4 |        0 |       1 |        2 |        8 |        7 |       13 |        3 |        7 |       1 |        1 |        7 |       12 |       12 |        5 |        4 |       1 |        3 |        9 |        7 |        6 |        5 |        6 |       0 |        1 |        7 |        4 |        3 |        4 |        0 |       0 |        5 |        9 |        4 |        4 |        1 |        1 |       0 |        1 |        3 |        1 |        1 |        0 |        2 |       0 |        2 |        3 |        3 |        7 |        0 |        1 |       0 |      0 |      2 |     10 |     10 |      0 |      4 |      2 |     41 |      0 |      0 |      2 |     12 |     13 |      1 |      2 |      0 |     48 |      0 |      0 |      1 |      9 |      6 |      0 |      0 |      1 |     26 |      0 |      0 |      0 |      4 |      6 |      0 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 1501100 |     463 |    186 |    157 |    11 |    0 |     5 |    3 |    2 |     3 |    0 |     96 |    0 |    0 |    0 |    0 |    218 |    245 |      35 |      16 |      17 |       1 |     10 |      2 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        2 |       12 |       17 |       14 |        9 |       17 |      12 |        6 |       19 |       14 |       20 |       13 |       23 |       8 |        4 |       10 |       18 |       16 |        7 |       12 |       4 |        4 |       16 |       16 |       19 |        4 |       20 |       7 |        6 |       12 |       15 |        9 |        7 |        3 |       0 |        3 |       10 |       13 |        8 |        6 |        4 |       0 |        0 |        2 |        5 |        4 |        0 |        1 |       0 |        2 |        4 |        4 |        1 |        0 |        1 |       0 |      0 |      0 |     19 |     47 |      5 |      6 |      7 |    102 |      0 |      0 |      1 |     14 |     28 |     12 |      3 |      8 |     91 |      0 |      0 |      1 |      9 |     13 |      3 |      1 |      2 |     67 |      0 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1501200 |     191 |     58 |     83 |     3 |    0 |     2 |    4 |    0 |     4 |    0 |     37 |    0 |    0 |    0 |    0 |     96 |     95 |       4 |       3 |       2 |       3 |      4 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        3 |        4 |        5 |        3 |        5 |        2 |       0 |        1 |        7 |        9 |        6 |        7 |        6 |       0 |        2 |        5 |       11 |        8 |       11 |        7 |       0 |        2 |        2 |        7 |        7 |       11 |       10 |       0 |        0 |        9 |        5 |        1 |        6 |        3 |       0 |        1 |        2 |        3 |        5 |        0 |        2 |       0 |        1 |        2 |        0 |        0 |        2 |        1 |       0 |        0 |        1 |        2 |        2 |        1 |        1 |       0 |      0 |      1 |     11 |     10 |      1 |      1 |      0 |     34 |      0 |      0 |      1 |      7 |     16 |      3 |      3 |      3 |     50 |      0 |      0 |      1 |      3 |      9 |      1 |      0 |      2 |     21 |      0 |      0 |      1 |      1 |      3 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 1501900 |      33 |     12 |     14 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     18 |     15 |       0 |       0 |       2 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        2 |        1 |       0 |        0 |        0 |        1 |        1 |        2 |        2 |       0 |        0 |        0 |        1 |        3 |        3 |        2 |       0 |        0 |        1 |        1 |        0 |        0 |        3 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      1 |      1 |      1 |      1 |      5 |      0 |      0 |      0 |      1 |      5 |      0 |      2 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1502000 |     405 |    120 |    200 |     6 |    0 |     4 |    2 |    0 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    194 |    211 |       9 |       2 |       6 |       0 |      9 |     16 |      3 |      2 |      0 |      2 |      0 |      0 |      1 |      4 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |       11 |        2 |       10 |        7 |       19 |       4 |        4 |        4 |       10 |       14 |       10 |       18 |       5 |        3 |        8 |       11 |       17 |       14 |       30 |      10 |        3 |        9 |        8 |       17 |       20 |       37 |      13 |        3 |        9 |        6 |        4 |        7 |        9 |       1 |        3 |        5 |        5 |        8 |        4 |        6 |       1 |        0 |        1 |        4 |        1 |        0 |        1 |       0 |        0 |        2 |        2 |        1 |        2 |        0 |       0 |      0 |      0 |     10 |     21 |     11 |      3 |      5 |     70 |      0 |      0 |      0 |      9 |     37 |     11 |      6 |     11 |    126 |      0 |      0 |      1 |      9 |     11 |      2 |      0 |      2 |     46 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1504000 |     328 |     92 |    130 |    12 |    0 |     1 |    3 |    0 |     6 |    0 |     84 |    0 |    0 |    0 |    0 |    145 |    183 |      11 |       8 |       8 |       1 |      4 |      8 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      3 |      0 |        2 |       14 |       13 |        6 |        3 |        3 |       2 |        4 |       15 |       10 |        8 |        5 |        7 |       0 |        6 |        9 |       16 |       11 |        9 |        6 |       3 |        6 |       14 |       17 |        9 |       10 |       11 |       3 |        2 |       16 |        8 |        5 |        3 |        2 |       0 |       14 |       28 |        1 |        2 |        1 |        2 |       0 |        2 |        1 |        1 |        2 |        0 |        0 |       0 |        5 |        4 |        4 |        2 |        1 |        0 |       0 |      0 |      1 |      6 |      8 |      2 |      6 |      0 |     69 |      0 |      0 |      1 |     10 |     21 |      5 |      4 |      0 |     89 |      0 |      0 |      0 |     11 |      2 |      1 |      0 |      0 |     70 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1504100 |     476 |    143 |    197 |    11 |    0 |     7 |    5 |    1 |     4 |    0 |    108 |    0 |    0 |    0 |    0 |    218 |    258 |       7 |       6 |       6 |       2 |      7 |      7 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      2 |      0 |        5 |        5 |       10 |        9 |        8 |       12 |       7 |        6 |       10 |       16 |       16 |       12 |       22 |       5 |        7 |       15 |       13 |       18 |       12 |       24 |       6 |       10 |        8 |       21 |       12 |       15 |       28 |       8 |        6 |       17 |       17 |        5 |        3 |        3 |       2 |        9 |       21 |       10 |        7 |        3 |        4 |       1 |        2 |        3 |        2 |        0 |        2 |        5 |       0 |        3 |        3 |        2 |        0 |        1 |        5 |       0 |      0 |      2 |     21 |     28 |      4 |      3 |      2 |     83 |      0 |      0 |      1 |     21 |     31 |      6 |      5 |      5 |    128 |      0 |      0 |      0 |     19 |      8 |      2 |      1 |      3 |     75 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 1504200 |       4 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1506000 |     374 |    137 |    170 |     4 |    0 |     2 |    6 |    2 |     1 |    0 |     52 |    0 |    0 |    0 |    0 |    177 |    197 |       5 |       1 |       2 |       0 |      5 |     10 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        5 |       11 |       14 |        6 |       18 |       2 |        3 |        9 |       16 |       14 |        8 |       25 |       6 |        6 |        7 |       10 |       17 |        9 |       27 |       4 |        0 |        6 |       13 |       12 |       14 |       35 |      10 |        2 |        3 |       17 |        4 |        3 |        4 |       0 |        0 |        5 |        2 |        5 |        1 |        4 |       2 |        1 |        3 |        0 |        0 |        3 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        3 |       0 |      0 |      2 |     11 |     27 |      4 |      4 |      7 |     82 |      0 |      0 |      1 |     16 |     30 |      8 |     12 |      5 |     98 |      0 |      0 |      0 |     11 |      7 |      1 |      2 |      3 |     28 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 1506200 |     583 |    224 |    253 |    11 |    0 |     4 |    2 |    0 |     7 |    0 |     82 |    0 |    0 |    0 |    0 |    294 |    289 |      17 |      10 |       7 |       0 |     13 |      5 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      0 |      2 |      0 |       1 |       2 |       0 |       0 |      1 |      3 |      0 |      0 |        2 |       19 |       19 |       23 |       16 |       22 |       4 |        5 |       18 |       19 |       25 |       18 |       30 |       4 |        9 |       21 |       25 |       22 |       16 |       36 |       3 |        6 |       14 |       24 |       23 |       13 |       39 |       2 |        3 |       11 |       16 |       11 |        2 |        0 |       1 |        2 |       13 |        6 |       12 |        3 |        2 |       0 |        3 |        1 |        2 |        3 |        3 |        1 |       0 |        2 |        0 |        5 |        3 |        0 |        1 |       0 |      0 |      1 |     23 |     39 |     17 |      4 |      5 |    135 |      0 |      0 |      2 |     22 |     47 |     12 |     10 |     12 |    148 |      0 |      0 |      0 |     10 |     14 |      4 |      4 |      0 |     50 |      0 |      0 |      0 |      3 |      9 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1508000 |     407 |    137 |    174 |     3 |    0 |     7 |    6 |    0 |     4 |    0 |     76 |    0 |    0 |    0 |    0 |    195 |    212 |      17 |       8 |       4 |       0 |      3 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      1 |      1 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        7 |       17 |       11 |       10 |       13 |       3 |        7 |       10 |       13 |       10 |        9 |       20 |       5 |        4 |       18 |       21 |       17 |        6 |       18 |       3 |        7 |       12 |       20 |       13 |        8 |       22 |       5 |        2 |       13 |        8 |        5 |        3 |        0 |       5 |        7 |       13 |        4 |        6 |        4 |        3 |       3 |        2 |        1 |        2 |        2 |        0 |        2 |       0 |        1 |        4 |        0 |        3 |        2 |        1 |       0 |      0 |      2 |     15 |     19 |      9 |      4 |      6 |     82 |      0 |      0 |      0 |     24 |     30 |      8 |      7 |      8 |     97 |      0 |      0 |      1 |      4 |      7 |      0 |      2 |      0 |     62 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1510000 |     368 |    151 |    129 |     7 |    0 |     5 |    3 |    1 |     8 |    0 |     64 |    0 |    0 |    0 |    0 |    170 |    198 |      13 |       7 |       6 |       0 |      3 |      6 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      3 |      2 |      0 |        3 |        8 |        8 |       17 |       10 |       10 |       3 |        3 |       10 |       27 |       18 |        8 |       19 |       7 |        2 |       14 |       13 |       13 |        3 |       11 |       6 |        1 |        9 |       16 |        9 |        8 |       19 |       5 |        4 |        8 |        8 |        6 |        4 |        5 |       1 |        4 |        6 |        7 |        3 |        3 |        4 |       1 |        1 |        2 |        3 |        3 |        2 |        2 |       0 |        1 |        0 |        4 |        2 |        1 |        3 |       0 |      0 |      2 |     17 |     30 |      8 |      6 |     10 |     78 |      0 |      0 |      0 |     12 |     27 |      2 |      5 |      5 |     78 |      0 |      0 |      1 |      2 |     10 |      1 |      1 |      2 |     47 |      0 |      0 |      0 |      3 |      9 |      2 |      2 |      0 |      8 |      0 |     37 | s03      | R    |
| 1512000 |     721 |    220 |    318 |    19 |    0 |    11 |    8 |    6 |     6 |    0 |    133 |    0 |    0 |    0 |    0 |    351 |    370 |      14 |      11 |       4 |       2 |     12 |     12 |      6 |      2 |      1 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      5 |      3 |      0 |      1 |      1 |      0 |      0 |       2 |       0 |       2 |       0 |      1 |      1 |      1 |      0 |        6 |       16 |       15 |       19 |       12 |       13 |       9 |        4 |       23 |       23 |       29 |       24 |       18 |       9 |        6 |       16 |       31 |       46 |       35 |       15 |      11 |       12 |       15 |       29 |       37 |       30 |       25 |      10 |        7 |       14 |       21 |        8 |       10 |        2 |       4 |       14 |       12 |       15 |       13 |        6 |        4 |       3 |        3 |        7 |        9 |        8 |        2 |        6 |       0 |        0 |        4 |        0 |        3 |        4 |        4 |       0 |      0 |      1 |     27 |     30 |     14 |      9 |     14 |    125 |      0 |      0 |      2 |     37 |     52 |     23 |      8 |     12 |    184 |      0 |      0 |      1 |     20 |      9 |      4 |      5 |      3 |     91 |      0 |      0 |      1 |      6 |     17 |      3 |      0 |      1 |     22 |      0 |     37 | s03      | R    |
| 1514000 |     428 |    131 |    202 |     8 |    0 |    10 |    7 |    1 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    207 |    221 |       8 |      17 |       3 |       1 |     10 |     13 |      2 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        5 |        8 |       10 |       13 |        3 |       11 |       6 |        2 |       10 |       10 |       19 |       12 |       12 |      10 |        5 |        8 |       26 |       24 |       13 |       14 |      12 |        7 |        5 |       22 |       19 |       11 |       26 |      10 |        3 |        8 |        4 |       11 |        3 |        1 |       1 |        4 |        6 |        9 |       11 |        5 |        1 |       1 |        0 |        5 |        7 |        2 |        1 |        3 |       0 |        1 |        2 |        2 |        1 |        0 |        2 |       1 |      0 |      2 |      7 |     31 |      9 |      3 |      2 |     77 |      0 |      0 |      1 |     22 |     43 |     16 |      6 |      3 |    111 |      0 |      0 |      1 |      4 |     11 |      5 |      2 |      0 |     45 |      0 |      0 |      0 |      2 |      9 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1514100 |     472 |    194 |    155 |    13 |    0 |     3 |    4 |    0 |     5 |    0 |     98 |    0 |    0 |    0 |    0 |    210 |    262 |      11 |       9 |      10 |       0 |      5 |     10 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |       1 |       2 |       4 |       0 |      1 |      1 |      2 |      0 |        5 |       13 |       27 |        8 |        7 |       16 |       3 |        7 |       19 |       22 |       28 |       14 |       19 |       6 |        6 |       15 |       15 |       14 |        7 |       17 |       4 |        4 |       18 |        9 |       12 |        8 |       24 |       2 |        5 |       12 |       10 |        9 |        0 |        5 |       0 |        9 |       14 |       16 |       11 |        2 |        4 |       1 |        2 |        5 |        0 |        4 |        1 |        0 |       0 |        2 |        5 |        4 |        0 |        1 |        1 |       0 |      0 |      1 |     19 |     30 |      8 |      8 |      3 |    125 |      0 |      0 |      3 |     22 |     26 |      4 |      4 |      7 |     89 |      0 |      0 |      1 |     17 |      6 |      2 |      2 |      0 |     70 |      0 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 1516000 |     374 |    178 |    119 |     6 |    0 |     5 |    3 |    0 |     0 |    0 |     63 |    0 |    0 |    0 |    0 |    178 |    196 |      28 |       7 |       4 |       1 |      9 |      5 |      6 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      3 |      2 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      2 |      0 |      1 |      0 |        6 |       14 |       17 |       11 |        8 |       12 |       5 |        5 |       13 |       23 |       25 |        9 |       25 |       5 |        4 |        7 |       14 |       21 |        7 |        9 |       2 |        1 |        4 |       14 |        9 |        5 |       12 |      10 |        6 |        8 |        8 |        4 |        0 |        4 |       0 |        4 |        8 |        7 |        9 |        1 |        4 |       0 |        0 |        1 |        5 |        3 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      2 |     12 |     36 |      4 |      4 |      9 |    111 |      0 |      0 |      1 |     15 |     20 |      3 |      5 |      4 |     71 |      0 |      0 |      1 |      9 |      5 |      1 |      2 |      2 |     43 |      0 |      0 |      0 |      4 |      2 |      1 |      2 |      1 |      4 |      0 |     37 | s03      | R    |
| 1518000 |     557 |    178 |    251 |    10 |    0 |     7 |    1 |    3 |     4 |    0 |    103 |    0 |    0 |    0 |    0 |    265 |    292 |      16 |      15 |       5 |       0 |     10 |      6 |      9 |      2 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      4 |      0 |      8 |      0 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      2 |      0 |        1 |        2 |       15 |       23 |        9 |       24 |       6 |        4 |        7 |       18 |       21 |        8 |       28 |      12 |        8 |       13 |       33 |       18 |       11 |       25 |      12 |        7 |        9 |       36 |       21 |       18 |       27 |      13 |        7 |        6 |       10 |       17 |        6 |        4 |       0 |        4 |        7 |       19 |       12 |        5 |        5 |       1 |        1 |        3 |        4 |        3 |        1 |        3 |       0 |        2 |        3 |        1 |        2 |        2 |        0 |       0 |      0 |      0 |     26 |     34 |      7 |      4 |      6 |    101 |      0 |      0 |      0 |     39 |     47 |      9 |      9 |     14 |    133 |      0 |      0 |      3 |     17 |     18 |      6 |      3 |      0 |     56 |      0 |      0 |      1 |      0 |      8 |      1 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 1520000 |     515 |    176 |    180 |    17 |    0 |    11 |   11 |    1 |     4 |    0 |    115 |    0 |    0 |    0 |    0 |    249 |    266 |      25 |      12 |       9 |       4 |     13 |      9 |      5 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       3 |       1 |       0 |      3 |      2 |      1 |      1 |        8 |       10 |       11 |       20 |       10 |       14 |       5 |        8 |       18 |       17 |       30 |        6 |       15 |       4 |        6 |       13 |       25 |       19 |        7 |       12 |       7 |        5 |       21 |       20 |       14 |       13 |       11 |       7 |        6 |       18 |       18 |        9 |        3 |        4 |       0 |        5 |       17 |       19 |        6 |        5 |        3 |       2 |        5 |        5 |        7 |        3 |        3 |        0 |       1 |        2 |        7 |        6 |        2 |        2 |        1 |       0 |      0 |      1 |     22 |     36 |     17 |      4 |      8 |     88 |      0 |      0 |      0 |     25 |     31 |      3 |      7 |      3 |    111 |      0 |      0 |      3 |     12 |     12 |      2 |      3 |      0 |     83 |      0 |      0 |      1 |      8 |      8 |      0 |      2 |      1 |     24 |      0 |     37 | s03      | R    |
| 1522000 |     509 |    154 |    220 |    15 |    0 |     7 |   10 |    1 |     4 |    0 |     98 |    0 |    0 |    0 |    0 |    239 |    270 |      33 |      25 |      10 |       6 |     10 |     10 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       3 |       2 |       0 |       1 |      0 |      1 |      0 |      0 |        7 |       10 |        9 |       18 |        9 |        8 |       3 |       12 |       15 |       15 |       21 |        8 |       13 |       6 |        6 |       18 |       29 |       21 |       15 |       14 |       5 |        9 |       22 |       18 |       27 |       11 |       22 |       3 |        4 |       11 |       12 |        5 |        6 |        3 |       2 |        7 |       15 |       15 |        7 |        2 |        7 |       2 |        3 |        6 |        4 |       10 |        0 |        1 |       0 |        1 |        5 |        2 |        4 |        1 |        0 |       0 |      0 |      2 |     20 |     24 |      3 |      3 |      2 |    100 |      0 |      0 |      1 |     23 |     44 |     11 |      8 |     11 |    122 |      0 |      0 |      1 |     12 |      7 |      2 |      3 |      0 |     73 |      0 |      0 |      0 |      9 |      7 |      1 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 1524000 |     328 |    135 |    116 |     7 |    0 |     6 |    2 |    1 |     3 |    0 |     58 |    0 |    0 |    0 |    0 |    159 |    169 |      29 |      12 |       9 |       1 |      8 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       1 |      4 |      2 |      4 |      0 |        3 |        8 |       14 |       12 |        5 |       16 |       4 |        5 |       13 |       12 |       16 |       13 |       12 |       2 |        7 |        5 |       17 |       13 |        4 |        8 |       1 |        1 |        6 |       17 |       11 |       10 |       12 |       4 |        4 |       11 |        8 |        8 |        1 |        1 |       0 |        5 |        9 |        5 |        4 |        1 |        1 |       0 |        0 |        2 |        4 |        2 |        0 |        1 |       0 |        2 |        1 |        2 |        2 |        1 |        2 |       0 |      0 |      2 |     14 |     22 |      7 |      3 |      6 |     81 |      0 |      0 |      0 |     19 |     23 |      3 |      8 |      5 |     58 |      0 |      0 |      1 |     10 |      1 |      1 |      0 |      0 |     45 |      0 |      0 |      0 |      1 |      8 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1524100 |     315 |    115 |    124 |    13 |    0 |     4 |    6 |    1 |     4 |    0 |     48 |    0 |    0 |    0 |    0 |    128 |    187 |       9 |      13 |       8 |       0 |      5 |      5 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       1 |      3 |      2 |      2 |      1 |        5 |        7 |        7 |       10 |        7 |       10 |       1 |        3 |        7 |       13 |       10 |        6 |       25 |       4 |        0 |        8 |        8 |        7 |        5 |       14 |       3 |        3 |       13 |        5 |        8 |        5 |       41 |       4 |        4 |        3 |        6 |        5 |        0 |        2 |       0 |        5 |       10 |        5 |        2 |        2 |        4 |       0 |        1 |        6 |        4 |        2 |        2 |        1 |       0 |        0 |        4 |        1 |        4 |        0 |        3 |       0 |      0 |      0 |     10 |     21 |      8 |      0 |      5 |     71 |      0 |      0 |      1 |     14 |     20 |      6 |      4 |      0 |     79 |      0 |      0 |      0 |      6 |      2 |      2 |      1 |      0 |     37 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1526000 |     459 |    184 |    156 |    10 |    0 |     5 |    5 |    2 |     7 |    0 |     90 |    0 |    0 |    0 |    0 |    233 |    226 |      24 |       7 |       9 |       4 |      9 |      1 |      7 |      3 |      0 |      0 |      1 |      0 |      2 |      4 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       1 |       0 |      3 |      2 |      1 |      0 |        4 |        6 |       14 |       16 |       12 |       21 |       6 |        5 |       17 |       16 |       19 |        8 |       31 |       9 |        6 |        9 |       22 |       24 |       10 |       17 |       2 |        1 |        7 |       16 |       13 |        5 |       20 |       4 |       10 |       10 |       12 |       10 |        2 |        3 |       0 |        6 |       16 |        7 |        7 |        3 |        3 |       1 |        2 |        3 |        5 |        1 |        1 |        5 |       0 |        2 |        4 |        3 |        1 |        0 |        2 |       0 |      0 |      2 |     16 |     37 |      3 |      8 |     13 |    105 |      0 |      0 |      4 |     21 |     37 |      7 |      3 |      3 |     81 |      0 |      0 |      1 |     11 |     10 |      2 |      0 |      4 |     62 |      0 |      0 |      0 |      7 |      7 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1528000 |     426 |    172 |    157 |     5 |    0 |     8 |    0 |    5 |     8 |    0 |     71 |    0 |    0 |    0 |    0 |    191 |    235 |      17 |       7 |       1 |       4 |     16 |      5 |      5 |      3 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |       2 |       1 |       1 |      0 |      0 |      1 |      0 |        3 |        9 |        9 |       15 |       11 |       23 |       5 |        8 |       13 |       13 |       18 |        7 |       29 |       9 |        3 |        7 |       16 |       16 |       12 |       19 |       4 |        5 |        6 |       10 |       12 |        9 |       27 |      11 |        1 |        4 |       10 |        7 |        1 |        4 |       1 |        5 |       10 |       12 |        9 |        2 |        5 |       0 |        0 |        4 |        1 |        3 |        0 |        3 |       0 |        2 |        4 |        1 |        4 |        1 |        3 |       0 |      0 |      0 |     10 |     43 |      7 |     12 |      6 |     94 |      0 |      0 |      1 |     17 |     27 |      6 |     11 |      4 |     91 |      0 |      0 |      3 |      9 |     10 |      4 |      2 |      2 |     41 |      0 |      0 |      0 |      4 |      7 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1530000 |     484 |    192 |    169 |    13 |    0 |     9 |    3 |    1 |     7 |    0 |     90 |    0 |    0 |    0 |    0 |    229 |    255 |      39 |      18 |       7 |       3 |      5 |      6 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        4 |        6 |       20 |       19 |       10 |       16 |       5 |        6 |       13 |       17 |       25 |       20 |       24 |       7 |        5 |       13 |       15 |       19 |       17 |       14 |       4 |        4 |       12 |       18 |       14 |       12 |       17 |       5 |        4 |        7 |       13 |       12 |        1 |        2 |       2 |        8 |       16 |       13 |        7 |        3 |        2 |       0 |        0 |        8 |        6 |        4 |        2 |        0 |       1 |        3 |        2 |        3 |        2 |        1 |        1 |       0 |      0 |      2 |     25 |     50 |      5 |      4 |      1 |    105 |      0 |      0 |      0 |     17 |     44 |      5 |      8 |      5 |     90 |      0 |      0 |      2 |     18 |     11 |      3 |      1 |      1 |     54 |      0 |      0 |      0 |      7 |      5 |      2 |      1 |      1 |     17 |      0 |     37 | s03      | R    |
| 1532000 |     327 |    140 |     97 |     8 |    0 |     4 |    2 |    1 |     1 |    0 |     74 |    0 |    0 |    0 |    0 |    155 |    172 |      38 |      10 |      13 |       2 |      9 |      1 |      7 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      1 |      1 |      0 |        8 |        7 |       20 |       10 |        7 |        9 |       2 |        3 |       18 |       15 |        9 |       10 |       18 |       4 |        3 |       12 |       13 |        6 |        7 |        6 |       1 |        1 |       10 |       14 |        3 |        2 |       13 |       6 |        6 |        7 |        8 |        8 |        5 |        1 |       0 |        8 |        7 |       14 |        6 |        2 |        1 |       1 |        1 |        0 |        3 |        1 |        1 |        2 |       1 |        1 |        2 |        2 |        1 |        0 |        1 |       0 |      0 |      3 |     24 |     14 |      5 |      2 |      1 |     91 |      0 |      0 |      0 |     20 |     11 |      6 |      1 |      0 |     59 |      0 |      0 |      2 |      6 |     14 |      3 |      0 |      1 |     48 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1534000 |     540 |    185 |    223 |    14 |    0 |     4 |    6 |    4 |     1 |    0 |    103 |    0 |    0 |    0 |    0 |    262 |    278 |      10 |       8 |       5 |       2 |      9 |     13 |      9 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      3 |      0 |      2 |        1 |        4 |       14 |       20 |        8 |       16 |      14 |        8 |       10 |       19 |       25 |       13 |       19 |      14 |        6 |       11 |       35 |       23 |       16 |       17 |      10 |        7 |        7 |       25 |       16 |       17 |       25 |       8 |        4 |       10 |       10 |       17 |        5 |        5 |       2 |        3 |        8 |        9 |       14 |        9 |        3 |       4 |        0 |        2 |        6 |        4 |        1 |        1 |       0 |        1 |        0 |        4 |        7 |        2 |        1 |       0 |      0 |      6 |      8 |     46 |     10 |     10 |      8 |     97 |      0 |      0 |      2 |     17 |     58 |      9 |     10 |      3 |    124 |      0 |      0 |      3 |     17 |     18 |      5 |      2 |      3 |     55 |      0 |      0 |      0 |      4 |      9 |      2 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 1536000 |     547 |    197 |    199 |    13 |    0 |    13 |   10 |    5 |     2 |    0 |    108 |    0 |    0 |    0 |    0 |    272 |    275 |      21 |      15 |      13 |       1 |     13 |      3 |      3 |      3 |      0 |      2 |      0 |      0 |      1 |      5 |      1 |      0 |      6 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |       6 |       2 |       5 |       3 |      5 |      2 |      3 |      0 |        3 |       13 |       11 |       14 |        7 |       29 |      10 |        5 |       12 |       20 |       30 |        9 |       26 |       8 |        5 |       13 |       23 |       26 |       10 |       19 |       4 |        6 |       13 |       24 |       15 |       11 |       23 |       7 |        7 |        9 |       20 |       10 |        7 |        7 |       1 |        7 |       10 |       13 |       12 |        1 |        3 |       1 |        1 |        5 |        4 |        8 |        3 |        2 |       1 |        3 |        4 |        4 |        2 |        2 |        4 |       0 |      0 |      0 |     15 |     33 |      8 |      5 |      4 |    132 |      0 |      0 |      0 |     23 |     40 |      3 |      8 |      8 |    117 |      0 |      0 |      0 |     15 |     11 |      7 |      2 |      1 |     72 |      0 |      0 |      0 |      6 |     12 |      1 |      0 |      1 |     23 |      0 |     37 | s03      | R    |
| 1538000 |     510 |    231 |    161 |    13 |    0 |     4 |    4 |    2 |     2 |    0 |     93 |    0 |    0 |    0 |    0 |    251 |    259 |      19 |       6 |       6 |       1 |      5 |      6 |      4 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |       1 |       3 |       2 |       0 |      4 |      3 |      2 |      0 |        5 |        6 |       20 |       19 |       12 |       14 |      23 |       10 |       16 |       20 |       29 |       10 |       20 |      27 |        5 |        8 |       15 |       21 |        8 |       20 |       4 |        2 |       10 |       20 |       19 |       15 |       10 |       4 |        7 |       14 |       17 |        9 |        3 |        5 |       2 |        8 |        6 |        8 |        6 |        4 |        3 |       1 |        2 |        2 |        3 |        3 |        1 |        3 |       0 |        0 |        5 |        3 |        2 |        0 |        1 |       0 |      0 |      2 |     23 |     24 |     12 |     11 |      6 |    153 |      0 |      0 |      1 |     19 |     36 |      5 |      4 |     11 |     85 |      0 |      0 |      0 |     11 |     16 |      2 |      1 |      2 |     61 |      0 |      0 |      0 |      4 |      6 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1542000 |     610 |    227 |    214 |    13 |    0 |    10 |    4 |    2 |     6 |    0 |    134 |    0 |    0 |    0 |    0 |    280 |    330 |      33 |      18 |      16 |       5 |      9 |      6 |      6 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      4 |      5 |      5 |      0 |      0 |      2 |      0 |      0 |       7 |       1 |       2 |       1 |      1 |      1 |      3 |      0 |        9 |       11 |       18 |       18 |       12 |       16 |      11 |       13 |       29 |       20 |       25 |       10 |       15 |      20 |        7 |       18 |       27 |       17 |       12 |       15 |      11 |        9 |       19 |       23 |       14 |        9 |       19 |      14 |        8 |       16 |       15 |       11 |        3 |        2 |       2 |       18 |       17 |       14 |       19 |        0 |        6 |       3 |        7 |        3 |        4 |        3 |        1 |        3 |       0 |        6 |        3 |        0 |        4 |        1 |        0 |       0 |      0 |      3 |     20 |     34 |     12 |      7 |      4 |    147 |      0 |      0 |      2 |      9 |     33 |      6 |      4 |      1 |    159 |      0 |      0 |      1 |     17 |     12 |      3 |      1 |      2 |     98 |      0 |      0 |      3 |      2 |      5 |      1 |      0 |      1 |     23 |      0 |     37 | s03      | R    |
| 1544000 |     361 |    119 |    125 |    13 |    0 |     4 |    5 |    2 |     9 |    0 |     84 |    0 |    0 |    0 |    0 |    179 |    182 |      35 |      12 |       8 |       4 |      7 |     13 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |      13 |       3 |       0 |      5 |      2 |      0 |      0 |        6 |        4 |        9 |       14 |        7 |        5 |       3 |        3 |       13 |       16 |       17 |        9 |        7 |       6 |        9 |       14 |       16 |       15 |       10 |        4 |       0 |        7 |        6 |       14 |       14 |        6 |        7 |       3 |        9 |       14 |       11 |        3 |        2 |        6 |       1 |       10 |       10 |        5 |        6 |        3 |        4 |       0 |        2 |        8 |        3 |        2 |        1 |        1 |       0 |        5 |        2 |        7 |        1 |        0 |        1 |       0 |      0 |      1 |     13 |     18 |      2 |      1 |      2 |     82 |      0 |      0 |      0 |     17 |     20 |      5 |      1 |      4 |     78 |      0 |      0 |      2 |      8 |      4 |      1 |      0 |      1 |     68 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 1548000 |     425 |    132 |    205 |     6 |    0 |     9 |    2 |    1 |     4 |    0 |     66 |    0 |    0 |    0 |    0 |    199 |    226 |      11 |      10 |       5 |       1 |      7 |      4 |      3 |      0 |      1 |      1 |      1 |      0 |      0 |      4 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       2 |       2 |       0 |       1 |      1 |      0 |      0 |      0 |        1 |        7 |        7 |       12 |        8 |       10 |       9 |        5 |        5 |       12 |       24 |        6 |       16 |      10 |        6 |       11 |       21 |       19 |       11 |       23 |      12 |        5 |        4 |       21 |       18 |       17 |       17 |      20 |        3 |        6 |        6 |        8 |        3 |        2 |       1 |        7 |        7 |        9 |        8 |        5 |        1 |       0 |        2 |        5 |        2 |        2 |        1 |        0 |       1 |        1 |        1 |        2 |        3 |        1 |        1 |       0 |      0 |      0 |     12 |     17 |     11 |      3 |      5 |     84 |      0 |      0 |      0 |     17 |     43 |      7 |      8 |     13 |    117 |      0 |      0 |      0 |      6 |      7 |      7 |      3 |      3 |     40 |      0 |      0 |      1 |      1 |      8 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 1550000 |     260 |     96 |    101 |     6 |    0 |     6 |    1 |    0 |     1 |    0 |     49 |    0 |    0 |    0 |    0 |    132 |    128 |      10 |       6 |       2 |       0 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        4 |        7 |        7 |       11 |        6 |       5 |        3 |        3 |       12 |        9 |        5 |       17 |       4 |        2 |       10 |       11 |        9 |        4 |       11 |       9 |        1 |        2 |       10 |       11 |        1 |        9 |      11 |        2 |        4 |        5 |        8 |        3 |        3 |       0 |        3 |        2 |        4 |        8 |        4 |        3 |       0 |        1 |        3 |        2 |        1 |        1 |        0 |       0 |        0 |        1 |        2 |        1 |        1 |        1 |       0 |      0 |      1 |     10 |     15 |     11 |      1 |      3 |     55 |      0 |      0 |      0 |      9 |     12 |      9 |      3 |      7 |     61 |      0 |      0 |      0 |     10 |     10 |      3 |      2 |      1 |     23 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1552000 |     453 |    151 |    205 |     9 |    0 |     9 |    2 |    1 |     3 |    0 |     73 |    0 |    0 |    0 |    0 |    215 |    238 |      17 |       3 |       5 |       3 |      4 |      9 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      1 |      0 |        4 |       10 |       13 |       10 |        6 |        9 |      13 |        5 |        5 |       18 |       19 |        8 |       11 |      20 |        6 |       14 |       24 |       17 |       13 |       12 |      15 |        3 |       13 |       25 |       11 |        9 |       27 |      16 |        6 |        8 |        9 |        7 |        3 |        3 |       0 |        7 |        5 |        9 |        7 |        5 |        2 |       2 |        1 |        2 |        2 |        5 |        1 |        2 |       0 |        1 |        1 |        3 |        1 |        1 |        4 |       0 |      0 |      1 |     16 |     12 |      8 |      1 |      1 |    112 |      0 |      0 |      2 |     21 |     22 |      6 |     11 |      7 |    136 |      0 |      0 |      1 |     13 |      5 |      8 |      1 |      2 |     43 |      0 |      0 |      0 |      5 |     10 |      1 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 1552500 |      57 |     24 |     21 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     27 |     30 |       3 |       1 |       3 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        4 |        3 |        1 |        1 |       2 |        0 |        2 |        1 |        1 |        1 |        3 |       5 |        1 |        0 |        6 |        1 |        1 |        2 |       0 |        0 |        2 |        1 |        1 |        3 |        1 |       2 |        0 |        0 |        1 |        1 |        0 |        1 |       2 |        1 |        1 |        1 |        1 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      4 |      5 |      1 |      2 |      0 |      9 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1554000 |     380 |    147 |    159 |     5 |    0 |     6 |    3 |    0 |     2 |    0 |     58 |    0 |    0 |    0 |    0 |    186 |    194 |       9 |       9 |       2 |       1 |      7 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        3 |        9 |       15 |        7 |       16 |       8 |        3 |        6 |       15 |       17 |        8 |       26 |      10 |        1 |        7 |       11 |       18 |        6 |       21 |      14 |        6 |        5 |       15 |       16 |        3 |       19 |      17 |        5 |        3 |        5 |       13 |        5 |        3 |       0 |        6 |        2 |        7 |        3 |        4 |        1 |       1 |        2 |        2 |        4 |        2 |        0 |        2 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      1 |     18 |     23 |     12 |      3 |      6 |     84 |      0 |      0 |      0 |     13 |     23 |      5 |      9 |      4 |    105 |      0 |      0 |      1 |      5 |      7 |      3 |      4 |      5 |     33 |      0 |      0 |      1 |      2 |      4 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 1555000 |     403 |    115 |    207 |     3 |    0 |     2 |    4 |    3 |     5 |    0 |     64 |    0 |    0 |    0 |    0 |    198 |    205 |      10 |       5 |       1 |       4 |     13 |      5 |      3 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      3 |      0 |      0 |        2 |        2 |        7 |       15 |        8 |        9 |       7 |        2 |        7 |        9 |       15 |       12 |        7 |      13 |        9 |       10 |       19 |       27 |       10 |       10 |      14 |        2 |       11 |       25 |       18 |       15 |       15 |      22 |        3 |        9 |       12 |        6 |        3 |        3 |       2 |        2 |        4 |        9 |        7 |        2 |        2 |       0 |        1 |        4 |        3 |        2 |        0 |        1 |       0 |        0 |        1 |        1 |        2 |        0 |        2 |       0 |      0 |      2 |      8 |     17 |      9 |      2 |      2 |     75 |      0 |      0 |      1 |     21 |     38 |      7 |      3 |      5 |    132 |      0 |      0 |      0 |      5 |      9 |      1 |      1 |      3 |     45 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1600000 |     430 |    185 |    147 |     8 |    0 |     7 |    3 |    0 |     4 |    0 |     76 |    0 |    0 |    0 |    0 |    193 |    237 |       9 |       2 |       8 |       3 |     16 |      5 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      4 |      2 |      2 |      1 |        5 |        6 |       18 |        8 |        7 |       27 |       7 |        7 |       10 |       11 |       21 |       15 |       31 |      12 |        4 |        5 |       13 |        7 |       10 |       19 |       7 |        2 |        3 |       14 |       10 |       16 |       26 |      11 |        9 |        8 |        4 |        6 |        5 |       11 |       0 |        6 |        4 |        4 |        9 |        5 |        5 |       0 |        0 |        1 |        2 |        0 |        1 |        3 |       0 |        2 |        3 |        1 |        1 |        1 |        7 |       0 |      0 |      3 |     27 |     27 |      4 |      9 |      7 |    108 |      0 |      0 |      0 |     22 |     18 |      4 |      6 |      7 |     90 |      0 |      0 |      1 |     14 |      3 |      4 |      1 |      1 |     52 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1602000 |     527 |    173 |    239 |    11 |    0 |     4 |    1 |    3 |     4 |    0 |     92 |    0 |    0 |    0 |    0 |    245 |    282 |      14 |      16 |      10 |       0 |      3 |     12 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       2 |       0 |      0 |      1 |      0 |      1 |        0 |        6 |        8 |       15 |       13 |        9 |      18 |        9 |        3 |       16 |       21 |       18 |       13 |      24 |        5 |       10 |       32 |       20 |       12 |       20 |      15 |        1 |       14 |       23 |       20 |       19 |       24 |      24 |       12 |        9 |        4 |        8 |        8 |        5 |       6 |        4 |        6 |        8 |       11 |        5 |        2 |       4 |        1 |        1 |        1 |        3 |        1 |        3 |       0 |        2 |        2 |        4 |        1 |        2 |        2 |       0 |      0 |      0 |     11 |     10 |     13 |      6 |      5 |    128 |      0 |      0 |      1 |     24 |     32 |      8 |      7 |     12 |    155 |      0 |      0 |      1 |      8 |      9 |      5 |      1 |      2 |     66 |      0 |      0 |      0 |      1 |      8 |      4 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 1603000 |     678 |    240 |    292 |    10 |    0 |    10 |   11 |    5 |     6 |    0 |    104 |    0 |    0 |    0 |    0 |    328 |    350 |      15 |      19 |       6 |       0 |     22 |      3 |      9 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      7 |      9 |      1 |      0 |        5 |        7 |       22 |       21 |       14 |       23 |      12 |        4 |       10 |       21 |       25 |       19 |       35 |      22 |        7 |       10 |       32 |       30 |       24 |       27 |      19 |        6 |       11 |       29 |       22 |       19 |       30 |      26 |        3 |       10 |       15 |       14 |        5 |        5 |       0 |        8 |       13 |       11 |        7 |        4 |        3 |       6 |        0 |        4 |        3 |        8 |        5 |        3 |       0 |        4 |        2 |        6 |        3 |        3 |        0 |       1 |      0 |      0 |     16 |     42 |     19 |      9 |      8 |    146 |      0 |      0 |      0 |     18 |     43 |     14 |     14 |     13 |    190 |      0 |      0 |      2 |     15 |     10 |      6 |      2 |      1 |     68 |      0 |      0 |      0 |      9 |     14 |      2 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 1603100 |     495 |    163 |    212 |    10 |    0 |     8 |    3 |    0 |     2 |    0 |     97 |    0 |    0 |    0 |    0 |    223 |    272 |       9 |      14 |       7 |       0 |     12 |      9 |      2 |      1 |      2 |      1 |      0 |      0 |      4 |      1 |      1 |      0 |      2 |      3 |      3 |      0 |      0 |      0 |      1 |      1 |       0 |       2 |       0 |       0 |      2 |      0 |      0 |      1 |        3 |        5 |        9 |       16 |       15 |        9 |      10 |        6 |        5 |       21 |       18 |       23 |       12 |      11 |        4 |       12 |       14 |       28 |       22 |       15 |       7 |        4 |       10 |       16 |       28 |       20 |       19 |      13 |        4 |        8 |        8 |       13 |        4 |        4 |       4 |        7 |       11 |       14 |        9 |        6 |        5 |       0 |        0 |        1 |        1 |        4 |        2 |        1 |       0 |        5 |        1 |        4 |        2 |        1 |        1 |       0 |      0 |      0 |     16 |     21 |     13 |      1 |      4 |    108 |      0 |      0 |      1 |     16 |     37 |     15 |     11 |      8 |    124 |      0 |      0 |      0 |     11 |      8 |      9 |      4 |      4 |     61 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 1604000 |     357 |    124 |    163 |     7 |    0 |     1 |    6 |    0 |     2 |    0 |     54 |    0 |    0 |    0 |    0 |    188 |    169 |       6 |       3 |       1 |       1 |      1 |      4 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |       2 |       8 |       3 |       1 |      2 |      2 |      1 |      0 |        3 |        8 |       13 |       12 |        7 |        7 |       7 |        2 |        8 |       10 |       16 |       10 |       10 |      11 |        6 |        9 |       15 |       24 |       12 |       17 |       8 |        2 |       12 |       13 |       16 |        8 |       14 |       7 |        3 |        6 |        5 |        6 |        3 |        5 |       1 |        1 |        6 |        6 |        8 |        1 |        2 |       1 |        2 |        4 |        2 |        2 |        0 |        1 |       0 |        2 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     17 |     10 |     14 |      4 |      5 |     74 |      0 |      0 |      1 |     22 |     27 |      7 |      4 |      5 |     97 |      0 |      0 |      0 |     11 |      8 |      2 |      5 |      0 |     28 |      0 |      0 |      0 |      3 |      3 |      0 |      2 |      0 |      8 |      0 |     37 | s03      | R    |
| 1605000 |     444 |    163 |    174 |     9 |    0 |     8 |    8 |    0 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    216 |    228 |      12 |       5 |       5 |       3 |     10 |      3 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       0 |      1 |      0 |      3 |      0 |        8 |       13 |        7 |       15 |       11 |       15 |      10 |        3 |        6 |       12 |       17 |       13 |       17 |      16 |        4 |       13 |       23 |       11 |       10 |       15 |      12 |        4 |        9 |       22 |       13 |       14 |       12 |      12 |        4 |        6 |        6 |       11 |        3 |        3 |       2 |        4 |        9 |       13 |        5 |        6 |        4 |       5 |        2 |        4 |        3 |        3 |        1 |        1 |       0 |        4 |        4 |        2 |        0 |        0 |        2 |       0 |      0 |      0 |     23 |     22 |      6 |      6 |      3 |    103 |      0 |      0 |      1 |     14 |     31 |     12 |      5 |      6 |    105 |      0 |      0 |      2 |      7 |      9 |      2 |      5 |      2 |     54 |      0 |      0 |      0 |      4 |      7 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1605100 |     631 |    230 |    253 |     8 |    0 |     5 |    7 |    3 |     5 |    0 |    120 |    0 |    0 |    0 |    0 |    277 |    354 |      21 |      18 |       8 |       2 |     16 |     13 |      8 |      0 |      1 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      4 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      1 |     10 |      0 |      0 |        5 |       11 |       14 |       26 |       12 |       15 |       0 |        5 |       18 |       15 |       49 |       39 |       21 |       0 |        5 |       18 |       22 |       30 |       29 |       18 |       0 |        6 |       12 |       21 |       40 |       27 |       24 |       1 |        6 |       11 |       15 |       11 |        6 |       10 |       0 |        6 |       11 |       13 |       14 |       13 |        4 |       0 |        1 |        2 |        0 |        4 |        5 |        1 |       0 |        0 |        4 |        2 |        5 |        3 |        1 |       0 |      0 |      1 |     21 |     44 |     13 |      9 |      7 |    135 |      0 |      0 |      0 |     31 |     45 |     18 |      4 |     17 |    138 |      0 |      0 |      2 |     17 |      6 |      7 |      4 |      3 |     81 |      0 |      0 |      1 |      4 |      5 |      2 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1606000 |     294 |    117 |    124 |     5 |    0 |     5 |    3 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |    143 |    151 |       8 |       7 |       2 |       1 |     11 |      8 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      1 |      2 |      1 |      0 |        4 |        5 |        6 |       14 |        5 |        4 |       8 |        1 |       12 |       12 |       19 |        7 |       11 |       9 |        3 |        7 |       17 |       12 |        3 |       17 |       6 |        2 |        4 |       10 |       13 |        6 |       19 |       5 |        4 |        0 |        6 |        5 |        5 |        3 |       1 |        3 |        2 |        5 |        2 |        3 |        0 |       0 |        0 |        2 |        3 |        2 |        1 |        0 |       0 |        1 |        0 |        2 |        0 |        1 |        2 |       0 |      0 |      2 |     12 |     12 |      8 |      0 |      7 |     76 |      0 |      0 |      0 |     10 |     25 |      6 |      2 |      4 |     77 |      0 |      0 |      0 |      2 |      4 |      2 |      4 |      0 |     27 |      0 |      0 |      0 |      2 |      7 |      0 |      1 |      0 |      4 |      0 |     37 | s03      | R    |
| 1607000 |     335 |    110 |    138 |     5 |    0 |     5 |    2 |    1 |     3 |    0 |     71 |    0 |    0 |    0 |    0 |    161 |    174 |       6 |       8 |       4 |       1 |      7 |      5 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       4 |       0 |      2 |      0 |      0 |      0 |        0 |        5 |        8 |       13 |        2 |       11 |       5 |        2 |       10 |       10 |       15 |        3 |       17 |       9 |        4 |        8 |       10 |       16 |       13 |       13 |       8 |        1 |        8 |       11 |       14 |       15 |        7 |      10 |        5 |        8 |        7 |        6 |        4 |        5 |       1 |        9 |        5 |        5 |        4 |        8 |        3 |       1 |        4 |        0 |        3 |        2 |        0 |        0 |       0 |        1 |        2 |        2 |        1 |        0 |        1 |       0 |      0 |      1 |     18 |     12 |      8 |      4 |      7 |     60 |      0 |      0 |      3 |     13 |     19 |      8 |      3 |      5 |     87 |      0 |      0 |      1 |      4 |      4 |      4 |      1 |      1 |     56 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 1607100 |     410 |    116 |    205 |     7 |    0 |     6 |    1 |    4 |     1 |    0 |     70 |    0 |    0 |    0 |    0 |    200 |    210 |       6 |      12 |       4 |       2 |      8 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       0 |      0 |      5 |      1 |      0 |        5 |        2 |        9 |       11 |        3 |        5 |       8 |        4 |        8 |       11 |       18 |        8 |       11 |      13 |        8 |        8 |       22 |       20 |       19 |       17 |      14 |        0 |        8 |       21 |       18 |        9 |       20 |      21 |        3 |        7 |        9 |        4 |        5 |        4 |       2 |        5 |        7 |       10 |        7 |        2 |        4 |       1 |        2 |        4 |        2 |        4 |        1 |        2 |       0 |        1 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      8 |     18 |     13 |      6 |      2 |     69 |      0 |      0 |      1 |     21 |     21 |     12 |      6 |      7 |    137 |      0 |      0 |      1 |      8 |      9 |      2 |      2 |      2 |     46 |      0 |      0 |      1 |      2 |      7 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1608000 |     512 |    190 |    157 |    20 |    0 |     1 |    8 |    2 |     3 |    0 |    131 |    0 |    0 |    0 |    0 |    232 |    280 |      40 |      22 |      27 |       3 |      6 |      6 |      4 |      1 |      0 |      4 |      2 |      0 |      0 |      0 |      1 |      1 |      4 |      1 |      6 |      0 |      0 |      0 |      1 |      0 |       2 |      10 |       5 |       1 |      2 |      3 |      0 |      1 |        4 |       20 |       12 |       11 |       14 |        9 |       6 |       19 |       11 |       16 |       25 |       16 |       17 |      10 |        3 |       27 |       19 |       17 |        9 |        6 |       1 |       12 |       23 |       12 |       11 |        3 |       13 |       1 |       10 |       19 |       10 |        9 |        1 |        6 |       0 |       19 |       19 |       19 |        8 |       11 |        0 |       0 |        5 |        5 |        1 |        4 |        1 |        3 |       0 |        5 |        5 |        4 |        0 |        0 |        1 |       0 |      0 |      0 |     18 |     20 |      7 |      5 |      3 |    137 |      0 |      0 |      1 |     19 |     23 |      3 |      2 |      1 |    108 |      0 |      0 |      0 |     16 |     16 |      0 |      5 |      2 |     92 |      0 |      0 |      1 |      4 |      5 |      1 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 1608100 |     588 |    247 |    197 |    10 |    0 |     4 |    0 |    2 |    10 |    0 |    118 |    0 |    0 |    0 |    0 |    278 |    310 |      44 |      14 |      13 |       2 |     10 |      3 |      5 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      1 |      1 |      0 |      0 |       4 |      13 |       6 |       1 |      7 |      6 |      0 |      1 |       10 |        9 |       28 |       26 |       20 |       12 |       8 |        8 |       21 |       28 |       28 |       19 |       16 |      14 |        6 |       24 |       19 |       30 |        8 |       13 |       9 |        8 |       15 |       20 |       17 |        9 |       12 |       7 |        4 |       12 |       12 |        8 |        7 |        2 |       0 |       12 |       22 |       16 |        9 |        7 |        6 |       1 |        1 |        0 |        5 |        1 |        3 |        1 |       0 |        3 |        6 |        5 |        1 |        0 |        0 |       0 |      0 |      2 |     31 |     44 |     13 |     10 |      3 |    144 |      0 |      0 |      1 |     22 |     23 |     15 |      3 |      5 |    128 |      0 |      0 |      2 |     15 |     15 |      5 |      2 |      2 |     77 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 1609000 |     613 |    214 |    250 |    19 |    0 |     6 |    2 |    2 |     2 |    0 |    118 |    0 |    0 |    0 |    0 |    318 |    295 |      19 |      13 |       8 |       2 |      9 |     14 |      1 |      1 |      0 |      1 |      0 |      0 |      6 |      0 |      1 |      0 |      1 |      2 |      5 |      1 |      2 |      0 |      0 |      0 |       4 |       6 |       2 |       2 |      1 |      4 |      5 |      2 |        6 |        8 |       15 |       20 |       15 |       14 |      19 |        4 |        9 |       31 |       25 |       14 |       17 |      17 |       10 |       28 |       37 |       34 |       14 |       13 |      15 |        2 |       16 |       19 |       14 |        7 |       20 |      21 |        6 |        8 |       20 |        9 |        8 |        3 |       3 |        9 |       12 |       17 |       12 |        6 |        4 |       1 |        2 |        3 |        3 |        3 |        1 |        1 |       0 |        3 |        2 |        7 |        2 |        3 |        1 |       0 |      0 |      2 |     23 |     24 |     16 |      9 |     17 |    123 |      0 |      0 |      2 |     28 |     30 |     12 |     10 |     17 |    151 |      0 |      0 |      1 |     16 |      9 |      5 |      3 |      1 |     83 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 1610000 |     373 |    148 |    154 |    12 |    0 |     3 |    0 |    0 |     5 |    0 |     51 |    0 |    0 |    0 |    0 |    197 |    176 |      10 |       9 |       4 |       0 |      5 |      5 |      3 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |       1 |       0 |       1 |       2 |      1 |      0 |      1 |      0 |        6 |        8 |       14 |       14 |        5 |       11 |      15 |        2 |       10 |       13 |       10 |       11 |       19 |      10 |        4 |        8 |       13 |       24 |        5 |       13 |      11 |        2 |        5 |       17 |       15 |        6 |       15 |      16 |        5 |        8 |        6 |        8 |        2 |        2 |       0 |        3 |        3 |        2 |        5 |        3 |        3 |       1 |        2 |        1 |        5 |        2 |        2 |        3 |       0 |        1 |        1 |        0 |        1 |        1 |        1 |       0 |      0 |      0 |     14 |     18 |      7 |      3 |      4 |    102 |      0 |      0 |      0 |     13 |     27 |      1 |      6 |      5 |    102 |      0 |      0 |      1 |      4 |      5 |      2 |      1 |      0 |     38 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1611000 |     471 |    175 |    178 |     9 |    0 |     7 |    3 |    1 |     3 |    0 |     95 |    0 |    0 |    0 |    0 |    216 |    255 |      16 |       6 |       6 |       0 |     14 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |       2 |       1 |       1 |       0 |      3 |      5 |      2 |      0 |        6 |       13 |       17 |       13 |        9 |        9 |       8 |       10 |       10 |       22 |       18 |        9 |       15 |      16 |        3 |       12 |       30 |       17 |        4 |       13 |       7 |        7 |       10 |       24 |       19 |       12 |       12 |       8 |        8 |        7 |       10 |        5 |        5 |        1 |       2 |       16 |       11 |       11 |       11 |        2 |        5 |       1 |        3 |        1 |        2 |        6 |        3 |        2 |       0 |        1 |        2 |        0 |        1 |        0 |        2 |       0 |      0 |      1 |     16 |     21 |      8 |      4 |      3 |    122 |      0 |      0 |      1 |     21 |     36 |      8 |      7 |      9 |     96 |      0 |      0 |      0 |      4 |      6 |      4 |      3 |      2 |     76 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 1611100 |     519 |    215 |    151 |    14 |    0 |     4 |    4 |    4 |     6 |    0 |    121 |    0 |    0 |    0 |    0 |    212 |    307 |      40 |      11 |      11 |       4 |      9 |      7 |      3 |      1 |      3 |      6 |      2 |      0 |      1 |      0 |      1 |      0 |      3 |      1 |      1 |      0 |      2 |      1 |      1 |      0 |       0 |       6 |       3 |       0 |      3 |      2 |      4 |      0 |        8 |       18 |       11 |       16 |        6 |        6 |       0 |       16 |       33 |       30 |       32 |       21 |       18 |       0 |        6 |       20 |       16 |       12 |        9 |        5 |       0 |        7 |       30 |       16 |       12 |       10 |        8 |       0 |       16 |       17 |        7 |       15 |        6 |        2 |       0 |       12 |       18 |        6 |       11 |        9 |        2 |       0 |        1 |        9 |        4 |        0 |        1 |        1 |       0 |        2 |        8 |        2 |        3 |        0 |        1 |       0 |      0 |      3 |     23 |     25 |      5 |      6 |      4 |    149 |      0 |      0 |      1 |     17 |     19 |      2 |      2 |      3 |    107 |      0 |      0 |      2 |     11 |     11 |      1 |      2 |      2 |     92 |      0 |      0 |      1 |      2 |      4 |      1 |      0 |      1 |     23 |      0 |     37 | s03      | R    |
| 1611300 |     383 |    147 |    123 |    16 |    0 |     0 |    3 |    3 |     1 |    0 |     90 |    0 |    0 |    0 |    0 |    164 |    219 |      17 |       7 |       9 |       0 |     11 |      3 |      4 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      1 |      0 |      2 |      0 |       1 |       1 |       1 |       0 |      1 |      1 |      0 |      0 |        5 |       13 |       12 |        7 |        5 |       10 |       0 |       12 |       23 |        8 |       14 |        8 |       28 |       2 |        4 |       13 |       10 |        9 |        8 |       10 |       1 |        7 |       10 |       13 |       12 |        7 |       19 |       0 |       11 |       10 |       10 |        4 |        3 |        8 |       0 |        7 |       12 |        7 |        4 |        2 |       12 |       0 |        2 |        5 |        1 |        0 |        1 |        2 |       0 |        0 |        3 |        1 |        0 |        1 |        7 |       0 |      0 |      0 |     18 |     18 |      5 |      9 |      4 |     93 |      0 |      0 |      0 |     16 |     18 |      4 |      5 |      0 |     80 |      0 |      0 |      0 |      3 |      9 |      3 |      4 |      1 |     70 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1612000 |     471 |    167 |    142 |    12 |    0 |     6 |    7 |    3 |     4 |    0 |    130 |    0 |    0 |    0 |    0 |    220 |    251 |      34 |      12 |      16 |       9 |      5 |      5 |      8 |      3 |      3 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      3 |      3 |      4 |      0 |      1 |      2 |      3 |      0 |       4 |       2 |       3 |       0 |      3 |      0 |      2 |      0 |       14 |       10 |        6 |       14 |        7 |       10 |       0 |       22 |       32 |       13 |       11 |       13 |       15 |       0 |        8 |       21 |       12 |       14 |       11 |        6 |       0 |       13 |       21 |        7 |       12 |       12 |        5 |       0 |       16 |       21 |        9 |       10 |        6 |        4 |       0 |       28 |       10 |        8 |        9 |        4 |        5 |       0 |        1 |       13 |        3 |        4 |        0 |        0 |       0 |        2 |        3 |        2 |        3 |        1 |        0 |       0 |      0 |      0 |     21 |     15 |      2 |      0 |      2 |    127 |      0 |      0 |      0 |     13 |     16 |      7 |      4 |      0 |    102 |      0 |      0 |      0 |      7 |      8 |      1 |      0 |      2 |    112 |      0 |      0 |      1 |      2 |      5 |      0 |      1 |      0 |     23 |      0 |     37 | s03      | R    |
| 1612100 |     555 |    198 |    226 |    10 |    0 |     5 |    3 |    3 |     2 |    0 |    108 |    0 |    0 |    0 |    0 |    277 |    278 |      42 |      21 |      14 |       3 |      3 |      7 |      4 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      1 |      1 |      5 |      0 |      0 |       1 |       8 |       3 |       2 |      3 |      7 |      3 |      1 |        5 |       11 |       14 |       24 |        9 |       16 |      14 |        6 |       15 |       23 |       17 |       12 |       14 |      18 |       10 |       18 |       33 |       26 |       15 |       14 |       8 |        3 |       14 |       22 |       22 |       12 |       18 |      11 |        5 |        9 |       16 |        7 |        4 |        5 |       4 |       11 |       14 |       10 |       10 |        3 |        7 |       3 |        1 |        1 |        1 |        3 |        3 |        1 |       0 |        3 |        3 |        3 |        3 |        1 |        0 |       0 |      0 |      0 |     20 |     24 |      8 |      8 |      3 |    135 |      0 |      0 |      2 |     32 |     33 |     12 |      2 |      9 |    136 |      0 |      0 |      0 |     16 |      6 |     10 |      1 |      1 |     74 |      0 |      0 |      0 |      4 |      6 |      0 |      2 |      0 |     11 |      0 |     37 | s03      | R    |
| 1612200 |     588 |    230 |    160 |    31 |    0 |     7 |    5 |    3 |     5 |    0 |    147 |    0 |    0 |    0 |    0 |    285 |    303 |      35 |      17 |      10 |       4 |     11 |      4 |      4 |      1 |      3 |      1 |      1 |      1 |      1 |      1 |      0 |      0 |      3 |      0 |      5 |      0 |      3 |      0 |      3 |      0 |       3 |       3 |       3 |       1 |      2 |      3 |      0 |      2 |       16 |       22 |       23 |       10 |       11 |        7 |       0 |       28 |       31 |       23 |       20 |       13 |       26 |       0 |       16 |       17 |       27 |        9 |        7 |       13 |       1 |       20 |       12 |        7 |        8 |        5 |       16 |       2 |       23 |       28 |        9 |        4 |        5 |        2 |       0 |       27 |       27 |        8 |        6 |        4 |        4 |       0 |        8 |       13 |        2 |        8 |        1 |        3 |       0 |        5 |        4 |        3 |        1 |        1 |        2 |       0 |      0 |      3 |     32 |     21 |      5 |      2 |      4 |    163 |      0 |      0 |      1 |     21 |     18 |      1 |      7 |      1 |    111 |      0 |      0 |      2 |     15 |      5 |      2 |      0 |      0 |    123 |      0 |      0 |      0 |      4 |      8 |      2 |      0 |      0 |     37 |      0 |     37 | s03      | R    |
| 1613000 |     430 |    172 |    134 |    12 |    0 |     6 |    4 |    2 |    10 |    0 |     90 |    0 |    0 |    0 |    0 |    207 |    223 |      22 |       6 |       5 |       0 |      7 |      7 |      8 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      2 |      0 |      0 |      1 |      1 |      0 |       7 |       4 |       2 |       0 |      3 |      1 |      1 |      1 |        7 |        9 |       10 |       17 |       12 |        7 |      15 |        0 |       16 |       18 |       23 |       10 |       10 |      18 |        1 |       14 |       12 |       13 |        8 |        7 |       6 |        5 |        9 |       16 |       14 |        6 |       12 |      11 |        4 |       10 |       15 |       11 |        4 |        3 |       0 |        9 |        6 |        9 |       15 |        0 |        3 |       1 |        3 |        3 |        6 |        5 |        3 |        1 |       1 |        1 |        3 |        3 |        4 |        0 |        1 |       0 |      0 |      1 |     20 |      9 |     11 |     13 |     11 |    107 |      0 |      0 |      0 |     16 |     17 |      5 |      2 |      4 |     90 |      0 |      0 |      1 |     19 |     14 |      5 |      4 |      1 |     46 |      0 |      0 |      0 |      5 |      5 |      4 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 1614000 |     409 |    161 |    148 |     8 |    0 |     1 |    2 |    0 |     3 |    0 |     86 |    0 |    0 |    0 |    0 |    186 |    223 |      15 |      11 |       3 |       2 |      6 |      8 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      3 |      1 |      0 |        4 |       10 |       10 |        9 |        6 |       13 |       9 |       11 |       10 |       16 |       18 |       15 |       14 |      16 |        4 |       10 |       19 |       15 |        8 |        8 |       5 |        6 |       10 |       17 |        9 |       13 |       16 |       8 |        7 |       11 |        8 |        9 |        6 |        4 |       1 |       10 |        9 |        8 |        4 |        7 |        2 |       0 |        1 |        4 |        3 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |     19 |     20 |      4 |      4 |      5 |    109 |      0 |      0 |      3 |     12 |     17 |      3 |      4 |      8 |    101 |      0 |      0 |      0 |     11 |      9 |      4 |      0 |      1 |     61 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1615000 |     303 |    106 |    114 |     6 |    0 |    10 |    7 |    1 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    145 |    158 |      25 |      10 |       5 |       5 |      4 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       7 |       5 |       2 |      0 |      0 |      0 |      0 |        5 |        6 |        3 |       12 |        5 |        6 |       7 |        6 |        5 |       13 |       12 |        4 |       12 |      10 |        6 |       10 |        7 |       18 |        4 |       10 |       4 |        5 |        7 |       10 |       11 |        4 |       14 |       4 |        2 |        3 |       10 |       10 |        2 |        1 |       0 |        4 |        6 |        7 |        8 |        2 |        2 |       0 |        0 |        2 |        2 |        5 |        2 |        3 |       0 |        2 |        2 |        2 |        3 |        1 |        2 |       0 |      0 |      1 |      6 |     16 |      3 |      1 |      5 |     74 |      0 |      0 |      0 |      4 |     15 |      2 |      3 |      4 |     86 |      0 |      0 |      1 |     14 |      4 |      5 |      1 |      0 |     32 |      0 |      0 |      1 |      1 |     10 |      2 |      2 |      1 |      9 |      0 |     37 | s03      | R    |
| 1615100 |     501 |    194 |    175 |    14 |    0 |     7 |    1 |    2 |     3 |    0 |    105 |    0 |    0 |    0 |    0 |    242 |    259 |      31 |      11 |      16 |       2 |      6 |      6 |      5 |      2 |      0 |      1 |      3 |      0 |      2 |      3 |      0 |      0 |      4 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |       9 |       8 |      10 |       2 |      3 |      3 |      4 |      1 |        3 |       10 |       20 |       14 |        9 |       17 |      11 |       10 |       18 |       13 |       23 |       17 |       21 |       8 |        7 |       12 |       15 |       14 |       11 |       20 |       4 |        6 |       10 |       21 |       18 |       14 |       16 |       7 |       11 |       21 |       11 |        6 |        6 |        3 |       0 |       12 |       16 |        7 |        5 |        3 |        4 |       0 |        1 |        5 |        3 |        5 |        2 |        1 |       0 |        4 |        3 |        0 |        1 |        1 |        1 |       0 |      0 |      0 |     27 |     25 |     14 |      4 |     10 |    114 |      0 |      0 |      0 |     19 |     21 |     11 |      4 |     10 |    110 |      0 |      0 |      1 |     14 |     10 |      3 |      1 |      1 |     75 |      0 |      0 |      0 |      3 |     10 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1616000 |     681 |    262 |    246 |    16 |    0 |     7 |    4 |    1 |     8 |    0 |    137 |    0 |    0 |    0 |    0 |    323 |    358 |      55 |      32 |      20 |       1 |     15 |     11 |      3 |      2 |      1 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      5 |      2 |      6 |      0 |      3 |      2 |      1 |      0 |      14 |      10 |      10 |       2 |      1 |      5 |      3 |      0 |       12 |       18 |       21 |       15 |       16 |       17 |      16 |       13 |       23 |       31 |       32 |       12 |       20 |      16 |       10 |       28 |       27 |       29 |       10 |       12 |       8 |       10 |       12 |       34 |       23 |       16 |       17 |      10 |       11 |       12 |       10 |       17 |       12 |        3 |       3 |       14 |       19 |       14 |       11 |        5 |        5 |       1 |        2 |        6 |        3 |        3 |        0 |        2 |       0 |        3 |        5 |        4 |        4 |        1 |        3 |       0 |      0 |      5 |     22 |     37 |     13 |      3 |      8 |    174 |      0 |      0 |      1 |     32 |     41 |     17 |      4 |     11 |    140 |      0 |      0 |      0 |     16 |     22 |      2 |      3 |      3 |     91 |      0 |      0 |      2 |      4 |      9 |      1 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 1617000 |     518 |    203 |    207 |     7 |    0 |    11 |    2 |    4 |     3 |    0 |     81 |    0 |    0 |    0 |    0 |    250 |    268 |      25 |      14 |       5 |       3 |      9 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       3 |       2 |       0 |      3 |      1 |      1 |      0 |        2 |        5 |       16 |       16 |        7 |       20 |      19 |        3 |       13 |       16 |       17 |       15 |       24 |      30 |        6 |       14 |       21 |       23 |       11 |       13 |      15 |        3 |        6 |       23 |       25 |       12 |       12 |      23 |        7 |        6 |       10 |       16 |        3 |        2 |       2 |        7 |        5 |       14 |        3 |        3 |        2 |       1 |        1 |        2 |        3 |        7 |        2 |        1 |       0 |        2 |        1 |        3 |        4 |        0 |        1 |       0 |      0 |      1 |     16 |     35 |      4 |      5 |      2 |    140 |      0 |      0 |      1 |     23 |     38 |      9 |      7 |      5 |    124 |      0 |      0 |      0 |      5 |     13 |      4 |      2 |      2 |     55 |      0 |      0 |      0 |      4 |     13 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1619000 |     490 |    200 |    183 |     5 |    0 |    10 |    1 |    1 |     4 |    0 |     86 |    0 |    0 |    0 |    0 |    232 |    258 |      10 |       3 |       5 |       2 |      5 |     11 |      5 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      1 |       0 |       1 |       0 |       0 |      0 |      1 |      1 |      0 |        4 |        4 |       14 |       16 |       12 |       14 |      16 |        5 |        9 |       15 |       28 |       14 |       24 |      25 |        3 |        7 |       29 |       14 |        5 |       25 |      17 |        2 |       11 |       15 |       11 |        5 |       23 |      16 |       10 |        5 |        5 |       14 |        2 |        4 |       2 |        9 |        9 |       12 |        6 |        3 |        5 |       0 |        2 |        1 |        2 |        4 |        1 |        0 |       0 |        1 |        0 |        2 |        1 |        2 |        5 |       0 |      0 |      1 |     19 |     19 |     14 |      5 |      7 |    135 |      0 |      0 |      1 |     15 |     29 |      3 |      1 |      4 |    130 |      0 |      0 |      0 |     13 |     11 |      8 |      3 |      1 |     50 |      0 |      0 |      0 |      4 |      9 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 1621000 |     649 |    270 |    247 |    13 |    0 |     6 |    5 |    2 |     6 |    0 |    100 |    0 |    0 |    0 |    0 |    312 |    337 |      43 |      14 |      10 |       2 |      4 |     10 |      5 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |       4 |       2 |       3 |       0 |      7 |      4 |      2 |      0 |        6 |       15 |       20 |       23 |       10 |       19 |      30 |        9 |       13 |       26 |       27 |       17 |       27 |      28 |        5 |       11 |       35 |       21 |       15 |       21 |      13 |        9 |       16 |       25 |       22 |       18 |       17 |      19 |        7 |       10 |       12 |       11 |        7 |        2 |       1 |        8 |       15 |       11 |        5 |        7 |        2 |       2 |        7 |        4 |        4 |        3 |        0 |        0 |       0 |        2 |        3 |        3 |        6 |        0 |        0 |       0 |      0 |      1 |     20 |     31 |     13 |     10 |     10 |    185 |      0 |      0 |      1 |     21 |     40 |     16 |     13 |     11 |    145 |      0 |      0 |      1 |     17 |     11 |      6 |      1 |      2 |     62 |      0 |      0 |      1 |      6 |      9 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1622000 |     589 |    192 |    221 |    17 |    0 |     8 |   11 |    0 |     5 |    0 |    135 |    0 |    0 |    0 |    0 |    281 |    308 |      22 |      25 |      13 |       2 |      4 |      6 |      2 |      4 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      2 |      1 |       4 |       8 |       3 |       0 |      1 |      5 |      2 |      0 |        7 |       14 |       11 |       17 |        8 |       18 |       5 |       12 |       13 |       16 |       23 |       18 |       13 |      17 |       10 |       22 |       26 |       24 |       16 |       12 |       9 |       11 |       14 |       21 |       20 |       16 |       13 |       7 |       12 |       13 |       16 |       14 |        3 |        4 |       2 |       17 |       14 |       12 |       11 |       11 |        6 |       0 |        1 |        6 |        3 |        5 |        1 |        2 |       0 |        4 |        3 |        6 |        4 |        1 |        5 |       0 |      0 |      1 |     18 |     16 |     11 |      2 |      7 |    137 |      0 |      0 |      0 |     17 |     38 |     11 |      6 |     11 |    138 |      0 |      0 |      1 |     19 |     12 |      3 |      0 |      3 |     97 |      0 |      0 |      0 |      5 |     10 |      1 |      1 |      0 |     24 |      0 |     37 | s03      | R    |
| 1624000 |     333 |    124 |    128 |     4 |    0 |     5 |    2 |    2 |     0 |    0 |     68 |    0 |    0 |    0 |    0 |    171 |    162 |      20 |      17 |       5 |       1 |      6 |      4 |      6 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       4 |       0 |      2 |      2 |      1 |      0 |        4 |        8 |       15 |        9 |        7 |        5 |       9 |        6 |        7 |       14 |       15 |        6 |       13 |       6 |        8 |        8 |       19 |       12 |       14 |        5 |       7 |        4 |       14 |       12 |        7 |        5 |        7 |       6 |        4 |       10 |       13 |        3 |        2 |        2 |       0 |        7 |        4 |        8 |       10 |        3 |        1 |       1 |        1 |        1 |        3 |        2 |        0 |        0 |       0 |        0 |        4 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     20 |     10 |      6 |      4 |      2 |     82 |      0 |      0 |      0 |     11 |     22 |      4 |      7 |      5 |     79 |      0 |      0 |      1 |      4 |      4 |      1 |      0 |      1 |     57 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1625000 |     468 |    197 |    158 |    14 |    0 |     2 |    2 |    2 |     2 |    0 |     91 |    0 |    0 |    0 |    0 |    217 |    251 |      26 |      18 |      13 |       2 |      8 |      7 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |       9 |       6 |       0 |       0 |      4 |      3 |      1 |      0 |        8 |       11 |       15 |       14 |        8 |       15 |       7 |        8 |       11 |       15 |       25 |       13 |       28 |      19 |        3 |       12 |       21 |       20 |       12 |        6 |       7 |        4 |       14 |       13 |       15 |        4 |       20 |       7 |        7 |        9 |       16 |        6 |        4 |        2 |       0 |        6 |       13 |       10 |        7 |        5 |        6 |       0 |        5 |        2 |        2 |        3 |        1 |        1 |       0 |        3 |        3 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |     20 |     29 |      8 |      5 |      6 |    129 |      0 |      0 |      2 |     15 |     32 |      8 |      5 |      3 |     93 |      0 |      0 |      0 |      9 |     10 |      3 |      3 |      2 |     64 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 1625100 |     548 |    192 |    255 |    10 |    0 |     7 |    5 |    1 |     3 |    0 |     75 |    0 |    0 |    0 |    0 |    270 |    278 |      36 |      17 |      22 |       1 |      2 |      7 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      4 |      2 |      2 |      0 |      2 |      0 |      0 |      0 |       1 |      13 |       3 |       1 |      6 |      6 |      1 |      0 |        6 |        7 |        6 |       12 |       16 |       21 |      11 |        6 |       12 |       16 |       26 |       22 |       15 |      16 |        6 |       15 |       23 |       31 |       14 |       35 |      11 |       11 |        6 |       27 |       19 |        9 |       39 |       9 |        8 |        9 |        4 |        7 |        9 |        3 |       0 |       12 |        8 |        3 |        6 |        2 |        4 |       0 |        4 |        5 |        2 |        3 |        1 |        1 |       0 |        3 |        0 |        1 |        3 |        0 |        3 |       0 |      0 |      0 |     17 |     25 |     11 |      6 |     12 |    121 |      0 |      0 |      0 |     24 |     41 |     18 |     10 |     14 |    148 |      0 |      0 |      3 |      7 |      6 |      6 |      1 |      0 |     52 |      0 |      0 |      0 |      7 |      4 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1625200 |     108 |     47 |     28 |     4 |    0 |     0 |    1 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     56 |     52 |       7 |       2 |       4 |       0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        3 |        9 |        2 |        0 |       5 |        1 |        3 |        4 |        4 |        3 |        2 |       7 |        0 |        4 |        6 |        1 |        2 |        0 |       1 |        0 |        5 |        5 |        2 |        0 |        0 |       2 |        3 |        3 |        1 |        4 |        2 |        3 |       0 |        1 |        3 |        5 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      7 |      3 |      0 |      2 |     33 |      0 |      0 |      0 |      1 |      6 |      3 |      0 |      1 |     17 |      0 |      0 |      0 |      2 |      4 |      4 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1626000 |     435 |    144 |    179 |    13 |    0 |     6 |    0 |    1 |     3 |    0 |     89 |    0 |    0 |    0 |    0 |    205 |    230 |      14 |       6 |       4 |       0 |     12 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      3 |      0 |      1 |      3 |      2 |      1 |      0 |       4 |       4 |       3 |       2 |      5 |      3 |      2 |      0 |        2 |        4 |       11 |       11 |        9 |       10 |      17 |        4 |        8 |       10 |       14 |        8 |       21 |      15 |        5 |       10 |       21 |       18 |        8 |       15 |      10 |        6 |        9 |       16 |       15 |       15 |       20 |      11 |       12 |        6 |        8 |       11 |        3 |        2 |       3 |        7 |        8 |        8 |       10 |        5 |        5 |       1 |        1 |        3 |        1 |        3 |        0 |        1 |       0 |        5 |        2 |        4 |        1 |        2 |        0 |       0 |      0 |      0 |     11 |     18 |     10 |      3 |      1 |    101 |      0 |      0 |      1 |     21 |     26 |     11 |      5 |      7 |    108 |      0 |      0 |      1 |     17 |     15 |      3 |      0 |      0 |     53 |      0 |      0 |      0 |      2 |      7 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1626500 |     127 |     49 |     60 |     2 |    0 |     1 |    0 |    0 |     1 |    0 |     14 |    0 |    0 |    0 |    0 |     60 |     67 |      12 |       7 |       0 |       1 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |       1 |       1 |       1 |       1 |      0 |      0 |      0 |      0 |        2 |        4 |        0 |        3 |        3 |        9 |       0 |        3 |        2 |        2 |        6 |        5 |        7 |       3 |        2 |        4 |        4 |        5 |        3 |        6 |       3 |        1 |        4 |        7 |        6 |        8 |        5 |       2 |        0 |        1 |        2 |        2 |        2 |        0 |       2 |        0 |        0 |        0 |        3 |        0 |        1 |       1 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      5 |      4 |      0 |      4 |     29 |      0 |      0 |      1 |      8 |     11 |      4 |      1 |      3 |     32 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |     11 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1627000 |     399 |    142 |    165 |     5 |    0 |     7 |    2 |    1 |     4 |    0 |     73 |    0 |    0 |    0 |    0 |    186 |    213 |      12 |       7 |      10 |       2 |      7 |     10 |      4 |      2 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       3 |       6 |       0 |      3 |      3 |      1 |      0 |        2 |        2 |        9 |        6 |        4 |       15 |      12 |        3 |        9 |       20 |       16 |       10 |       10 |      24 |        5 |       10 |       20 |       16 |       13 |       10 |       9 |        3 |        4 |       15 |        8 |       10 |       27 |      15 |        7 |        6 |        7 |        8 |        5 |        3 |       4 |        4 |        8 |        6 |        4 |        4 |        4 |       3 |        1 |        0 |        6 |        3 |        1 |        2 |       0 |        1 |        2 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |     14 |     22 |      5 |      2 |      7 |     92 |      0 |      0 |      0 |     16 |     21 |     10 |      5 |     17 |     96 |      0 |      0 |      1 |      8 |      5 |      2 |      1 |      1 |     55 |      0 |      0 |      1 |      7 |      5 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1630000 |     553 |    187 |    239 |     8 |    0 |     4 |    4 |    1 |     5 |    0 |    105 |    0 |    0 |    0 |    0 |    249 |    304 |      19 |      11 |       8 |       2 |      5 |     10 |      5 |      0 |      1 |      0 |      1 |      0 |      5 |      1 |      2 |      0 |      2 |      1 |      3 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       1 |       1 |      7 |      4 |      4 |      0 |        6 |        8 |       12 |       12 |       10 |       18 |       7 |        7 |       10 |       13 |       22 |       14 |       25 |      23 |        7 |       11 |       27 |       19 |       15 |       20 |      10 |        8 |        9 |       27 |       20 |       17 |       27 |      22 |        5 |       13 |       11 |        8 |        8 |        5 |       4 |        7 |       12 |        9 |       11 |        5 |        6 |       1 |        1 |        4 |        3 |        2 |        3 |        0 |       0 |        1 |        1 |        3 |        2 |        1 |        1 |       0 |      0 |      0 |     21 |     22 |     10 |      4 |      7 |    123 |      0 |      0 |      0 |     28 |     31 |     17 |     17 |      7 |    139 |      0 |      0 |      0 |     20 |      9 |      5 |      2 |      7 |     62 |      0 |      0 |      0 |      7 |      6 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1631000 |     433 |    154 |    176 |     8 |    0 |    10 |    3 |    0 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    215 |    218 |      22 |       7 |       8 |       2 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |       1 |       8 |       7 |       0 |      0 |      6 |      1 |      0 |        6 |        3 |       14 |        9 |        9 |       14 |      12 |        2 |        5 |       16 |       19 |       11 |       19 |      15 |        5 |        7 |       22 |       15 |       11 |       14 |      16 |        3 |        7 |       15 |       13 |       13 |       21 |      14 |        9 |        9 |       12 |       13 |        1 |        0 |       3 |        5 |       10 |        7 |        4 |        1 |        4 |       3 |        2 |        3 |        2 |        2 |        1 |        1 |       0 |        0 |        1 |        1 |        3 |        2 |        4 |       0 |      0 |      1 |     10 |     26 |      7 |      2 |      4 |    104 |      0 |      0 |      2 |     12 |     31 |      6 |     12 |     12 |    101 |      0 |      0 |      1 |     13 |      5 |      5 |      2 |      0 |     55 |      0 |      0 |      0 |      3 |      8 |      0 |      1 |      2 |      8 |      0 |     37 | s03      | R    |
| 1631100 |     535 |    209 |    206 |    12 |    0 |     9 |    7 |    1 |     5 |    0 |     86 |    0 |    0 |    0 |    0 |    255 |    280 |      36 |      11 |      12 |       4 |      3 |      5 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       3 |       4 |       1 |       0 |      2 |      2 |      1 |      0 |        6 |        8 |       15 |       16 |       12 |       19 |      15 |        4 |        4 |       21 |       31 |       13 |       26 |      19 |        5 |       11 |       26 |       13 |       17 |       14 |      16 |        2 |        8 |       21 |       13 |       17 |       28 |      15 |        3 |       10 |       12 |       15 |        1 |        3 |       1 |        9 |        4 |       15 |        3 |        3 |        5 |       2 |        4 |        1 |        5 |        3 |        3 |        1 |       0 |        1 |        6 |        5 |        2 |        2 |        1 |       0 |      0 |      0 |     25 |     26 |     18 |      4 |      8 |    128 |      0 |      0 |      0 |     27 |     30 |     16 |      7 |      6 |    120 |      0 |      0 |      2 |     15 |     11 |      4 |      3 |      1 |     50 |      0 |      0 |      2 |      6 |      8 |      3 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1632000 |     429 |    150 |    187 |     8 |    0 |     5 |    6 |    3 |     1 |    0 |     69 |    0 |    0 |    0 |    0 |    207 |    222 |      14 |      10 |       3 |       3 |     11 |     20 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      2 |      0 |      1 |      0 |       2 |       6 |       3 |       0 |      2 |      5 |      1 |      0 |        2 |        5 |       11 |       16 |        7 |       12 |       9 |        3 |        6 |       20 |       12 |        7 |       20 |      20 |        8 |       15 |       23 |       20 |        4 |       15 |      11 |        2 |       10 |       31 |       15 |        6 |       14 |      13 |        4 |        7 |       10 |        7 |        4 |        2 |       2 |        8 |        4 |        7 |        6 |        4 |        4 |       0 |        1 |        4 |        3 |        4 |        0 |        1 |       0 |        2 |        1 |        6 |        0 |        0 |        1 |       0 |      0 |      0 |     16 |     14 |     13 |      3 |      7 |     97 |      0 |      0 |      0 |     22 |     30 |     13 |      7 |      4 |    111 |      0 |      0 |      0 |     11 |      7 |      5 |      2 |      0 |     44 |      0 |      0 |      0 |      2 |      4 |      4 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 1633000 |     507 |    186 |    205 |    16 |    0 |    12 |    3 |    4 |     2 |    0 |     79 |    0 |    0 |    0 |    0 |    240 |    267 |      29 |       6 |       7 |       4 |      5 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |      0 |       5 |       3 |       3 |       0 |      1 |      3 |      2 |      0 |        7 |        3 |       12 |       18 |       12 |       14 |      12 |        6 |        7 |       26 |       19 |        9 |       16 |      25 |        6 |        9 |       23 |       15 |       18 |       17 |      11 |        7 |        8 |       16 |       18 |       14 |       19 |      24 |        7 |        6 |        8 |       12 |        2 |        2 |       5 |        5 |        7 |        6 |       11 |        2 |        4 |       2 |        0 |        2 |       11 |        2 |        1 |        5 |       0 |        2 |        4 |        3 |        6 |        0 |        1 |       0 |      0 |      1 |     15 |     21 |     11 |      6 |      3 |    129 |      0 |      0 |      1 |     21 |     27 |      7 |      4 |     14 |    131 |      0 |      0 |      0 |     12 |      5 |      2 |      3 |      3 |     54 |      0 |      0 |      0 |      5 |     18 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1635000 |     771 |    348 |    228 |    25 |    0 |    10 |   11 |    2 |    14 |    0 |    133 |    0 |    0 |    0 |    0 |    341 |    430 |      66 |      22 |      13 |       8 |      7 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      1 |      0 |      4 |      0 |      1 |      0 |      0 |      0 |      12 |       6 |      12 |       4 |      8 |      4 |      1 |      0 |        8 |       16 |       19 |       25 |       19 |       36 |      15 |       16 |       17 |       23 |       26 |       33 |       76 |      19 |       14 |       14 |       22 |       19 |       13 |       24 |       6 |        6 |       14 |       16 |       14 |       16 |       46 |       4 |       10 |       15 |        9 |        9 |        5 |        7 |       2 |       16 |       16 |       12 |        7 |        9 |       15 |       1 |        6 |       10 |        1 |        9 |        2 |        6 |       0 |        4 |        4 |        2 |        4 |        4 |       10 |       0 |      0 |      4 |     50 |     52 |      6 |     12 |      5 |    219 |      0 |      0 |      0 |     37 |     24 |      6 |      8 |     13 |    140 |      0 |      0 |      1 |     17 |     16 |      4 |      1 |      2 |     92 |      0 |      0 |      0 |     10 |     16 |      1 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 1650100 |     223 |     99 |     79 |     3 |    0 |     6 |    1 |    2 |     3 |    0 |     30 |    0 |    0 |    0 |    0 |    121 |    102 |      17 |       3 |       3 |       3 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       4 |       6 |       4 |       2 |      0 |      0 |      0 |      0 |        2 |       10 |        4 |        6 |        4 |       12 |      12 |        2 |        4 |        4 |        6 |        7 |       12 |      14 |        3 |        4 |        9 |       11 |       10 |        4 |       4 |        1 |        5 |        7 |        6 |        5 |        7 |       3 |        6 |        2 |        2 |        5 |        2 |        1 |       0 |        4 |        1 |        2 |        4 |        1 |        0 |       0 |        1 |        2 |        2 |        0 |        1 |        2 |       0 |        1 |        1 |        1 |        1 |        1 |        2 |       0 |      0 |      1 |     11 |     12 |      3 |      1 |      4 |     67 |      0 |      0 |      0 |      6 |     10 |      4 |      8 |      3 |     48 |      0 |      0 |      1 |      3 |      2 |      4 |      1 |      0 |     19 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1650500 |     359 |    147 |    138 |     5 |    0 |     3 |    5 |    0 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    141 |    218 |      19 |       6 |       7 |       2 |      5 |      3 |      2 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        8 |        8 |       10 |        9 |       15 |       5 |        3 |        7 |        7 |       10 |       14 |       46 |       5 |        1 |        4 |       11 |       13 |        9 |       18 |       1 |        4 |        3 |        9 |       14 |       14 |       34 |       3 |        1 |        3 |        5 |        6 |        6 |        3 |       0 |        2 |        3 |        7 |       11 |        7 |        6 |       0 |        0 |        0 |        1 |        2 |        1 |        1 |       0 |        2 |        0 |        2 |        0 |        1 |        4 |       0 |      0 |      0 |     27 |     15 |      8 |      3 |      5 |     89 |      0 |      0 |      2 |     16 |     18 |     10 |     10 |      4 |     78 |      0 |      0 |      2 |      9 |      8 |      3 |      1 |      1 |     36 |      0 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1651000 |     214 |     47 |     98 |    10 |    0 |     2 |    1 |    1 |     3 |    0 |     52 |    0 |    0 |    0 |    0 |    126 |     88 |       4 |       5 |       4 |       0 |      2 |      4 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        6 |        6 |        4 |        7 |        3 |        1 |       0 |        2 |       11 |        2 |        2 |        2 |        1 |       0 |        4 |       13 |       20 |       14 |        3 |        3 |       1 |        7 |       15 |        7 |        5 |        4 |        2 |       0 |        5 |       15 |        3 |        4 |        1 |        1 |       0 |        6 |       10 |        4 |        2 |        1 |        0 |       0 |        4 |        3 |        3 |        2 |        0 |        0 |       0 |        2 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |     44 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      0 |     88 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 1710000 |     461 |    124 |    198 |    17 |    0 |     3 |    0 |    2 |     1 |    0 |    116 |    0 |    0 |    0 |    0 |    158 |    303 |      13 |      20 |      21 |       3 |      0 |      9 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      7 |      0 |        5 |       12 |       11 |        1 |        1 |        0 |       0 |       13 |       40 |       33 |        5 |        1 |        2 |       0 |        8 |       34 |       30 |        1 |        1 |        3 |       0 |       14 |       52 |       44 |        9 |        1 |        1 |       0 |        7 |       22 |       11 |        1 |        0 |        0 |       0 |       12 |       29 |       28 |        4 |        1 |        1 |       0 |        5 |        1 |        3 |        1 |        0 |        0 |       0 |        1 |        8 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |     18 |      5 |      1 |      0 |      0 |    100 |      0 |      0 |      0 |     17 |     11 |      2 |      0 |      0 |    168 |      0 |      0 |      0 |     12 |      6 |      2 |      0 |      0 |     96 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1710100 |     310 |     71 |    144 |     9 |    0 |     4 |    3 |    0 |     1 |    0 |     78 |    0 |    0 |    0 |    0 |    103 |    207 |      11 |      22 |      14 |       0 |      1 |      4 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      2 |      1 |        3 |        5 |        6 |        0 |        0 |        0 |       0 |        6 |       24 |       23 |        3 |        1 |        0 |       0 |        3 |       24 |       30 |        4 |        0 |        0 |       0 |        7 |       41 |       27 |        7 |        1 |        0 |       0 |        7 |        8 |        5 |        1 |        1 |        0 |       0 |       12 |       20 |       18 |        5 |        0 |        1 |       0 |        0 |        4 |        2 |        0 |        0 |        0 |       0 |        0 |        5 |        5 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     66 |      0 |      0 |      0 |      5 |      2 |      4 |      0 |      0 |    133 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     73 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1710300 |     103 |     18 |     60 |     2 |    0 |     0 |    0 |    0 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     31 |     72 |       1 |       4 |       3 |       2 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        0 |        0 |        0 |       0 |        1 |        3 |        9 |        0 |        0 |        0 |       0 |        2 |        7 |        7 |        0 |        0 |        0 |       0 |        4 |       16 |       24 |        0 |        0 |        0 |       0 |        3 |        5 |        0 |        2 |        0 |        0 |       0 |        1 |        5 |        5 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     55 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1710400 |     305 |     97 |    142 |     5 |    0 |     1 |    2 |    1 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    152 |    153 |      14 |       7 |       4 |       0 |      7 |      9 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |       0 |       4 |       3 |       0 |      4 |      2 |      1 |      0 |        5 |        4 |        3 |       13 |        9 |        4 |       0 |        2 |        3 |        9 |       14 |       11 |       19 |       1 |        4 |        5 |       10 |       19 |       18 |       20 |       0 |        3 |        4 |       10 |       16 |       15 |       18 |       0 |        4 |        5 |        6 |        8 |        5 |        3 |       0 |        4 |        5 |        2 |        8 |        3 |        2 |       0 |        1 |        0 |        3 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        2 |       0 |      0 |      0 |      8 |     17 |      0 |      4 |      3 |     65 |      0 |      0 |      1 |     16 |     31 |     15 |      9 |      2 |     68 |      0 |      0 |      1 |      8 |     10 |      0 |      0 |      3 |     33 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 1710500 |     584 |    188 |    281 |    11 |    0 |     3 |    0 |    1 |     5 |    0 |     95 |    0 |    0 |    0 |    0 |    300 |    284 |       9 |       8 |       7 |       0 |      7 |     13 |      8 |      1 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       2 |       6 |       6 |       0 |      1 |      3 |      6 |      1 |       10 |        2 |       11 |       21 |       21 |       12 |       1 |        4 |        6 |       21 |       35 |       32 |       12 |       0 |       15 |        9 |       32 |       40 |       42 |       18 |       1 |        5 |       13 |       24 |       29 |       33 |       18 |       2 |       11 |        6 |        7 |       11 |       10 |        7 |       1 |        5 |        8 |        5 |       14 |        6 |        4 |       0 |        2 |        2 |        2 |        4 |        2 |        0 |       0 |        3 |        1 |        1 |        2 |        1 |        0 |       0 |      0 |      1 |     26 |     26 |     12 |      5 |      4 |    114 |      0 |      0 |      1 |     34 |     57 |     19 |      9 |     14 |    147 |      0 |      0 |      0 |     12 |     13 |      5 |      0 |      2 |     63 |      0 |      0 |      0 |      3 |      6 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1710600 |     567 |    192 |    217 |    11 |    0 |     1 |    4 |    1 |     4 |    0 |    137 |    0 |    0 |    0 |    0 |    259 |    308 |      14 |      16 |       7 |       1 |     13 |      6 |      5 |      0 |      3 |      0 |      1 |      0 |      5 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |       0 |       1 |       0 |       0 |      2 |      2 |      3 |      0 |       11 |       21 |       13 |       11 |        9 |        5 |       1 |       21 |       38 |       21 |       21 |       13 |        7 |       0 |       10 |       29 |       22 |       25 |       19 |       12 |       0 |       13 |       26 |       19 |       21 |       14 |        7 |       0 |       13 |       19 |       16 |       10 |        3 |        0 |       0 |       19 |       19 |       14 |       13 |        8 |        3 |       0 |        1 |        4 |        1 |        3 |        1 |        0 |       0 |        4 |        4 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |     16 |     18 |      5 |      2 |      4 |    147 |      0 |      0 |      2 |     20 |     24 |      8 |      6 |      5 |    152 |      0 |      0 |      0 |     12 |      6 |      2 |      0 |      2 |    115 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1710700 |     666 |    185 |    259 |    12 |    0 |     3 |    7 |    1 |    14 |    0 |    185 |    0 |    0 |    0 |    0 |    332 |    334 |      19 |      15 |       9 |       3 |     10 |      4 |     11 |      1 |      2 |      1 |      0 |      1 |      3 |      0 |      1 |      0 |      0 |      3 |      3 |      0 |      1 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      2 |      0 |      0 |       14 |       28 |       14 |       12 |        6 |        5 |       0 |       22 |       48 |       18 |       11 |        6 |        1 |       0 |       38 |       47 |       34 |       14 |        8 |        5 |       0 |       40 |       38 |       15 |        9 |        6 |        5 |       0 |       19 |       43 |       17 |        5 |        5 |        1 |       0 |       45 |       34 |       11 |        2 |        2 |        1 |       0 |        7 |        9 |        0 |        1 |        0 |        0 |       0 |        9 |        6 |        1 |        3 |        0 |        1 |       0 |      0 |      0 |      7 |      6 |      0 |      1 |      0 |    171 |      0 |      0 |      2 |     12 |      4 |      1 |      1 |      1 |    238 |      0 |      0 |      0 |      7 |      4 |      1 |      0 |      0 |    173 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     36 |      0 |     37 | s03      | R    |
| 1710800 |     292 |     95 |    114 |    10 |    0 |     1 |    1 |    2 |     0 |    0 |     69 |    0 |    0 |    0 |    0 |     94 |    198 |      11 |      22 |       7 |       1 |      0 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        4 |       15 |        7 |        3 |        0 |        0 |       0 |       10 |       19 |       29 |        7 |        1 |        0 |       0 |        2 |       15 |       22 |        0 |        1 |        1 |       0 |       16 |       25 |       29 |        1 |        1 |        1 |       0 |        0 |       11 |        8 |        1 |        0 |        0 |       0 |       18 |       17 |       12 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |        2 |        5 |        3 |        0 |        0 |        0 |       0 |      0 |      1 |     18 |      1 |      0 |      0 |      0 |     75 |      0 |      0 |      0 |     17 |      1 |      0 |      0 |      0 |     96 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |      0 |     53 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1710900 |     360 |    102 |    188 |     5 |    0 |     3 |    1 |    1 |     0 |    0 |     60 |    0 |    0 |    0 |    0 |    179 |    181 |      14 |       9 |       2 |       0 |      7 |      7 |      4 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |     14 |      5 |      0 |      1 |      0 |      0 |      0 |       0 |       9 |       5 |       1 |      2 |      1 |      2 |      0 |        4 |        6 |        5 |        4 |       12 |        6 |       1 |        3 |        3 |        7 |       17 |       19 |       14 |       1 |       11 |        6 |       18 |       28 |       29 |       13 |       0 |       10 |        5 |       16 |       17 |       21 |       14 |       0 |        5 |        6 |        5 |        9 |        3 |        3 |       0 |        3 |        3 |        3 |       13 |        3 |        4 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        2 |        0 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |     18 |     13 |      4 |      6 |      3 |     58 |      0 |      0 |      0 |     17 |     36 |      9 |      4 |     10 |    112 |      0 |      0 |      0 |     13 |      7 |      2 |      2 |      3 |     33 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1711000 |     490 |    190 |    186 |     7 |    0 |     4 |    4 |    1 |     1 |    0 |     97 |    0 |    0 |    0 |    0 |    210 |    280 |      12 |      10 |       7 |       0 |     15 |      8 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       2 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        8 |       16 |       18 |       14 |        7 |       17 |       0 |        3 |       18 |       14 |       21 |       30 |       23 |       1 |        5 |       11 |       16 |       14 |       15 |       16 |       3 |        7 |        7 |       17 |       17 |       27 |       25 |       6 |        1 |        7 |       10 |        9 |        9 |        6 |       0 |       11 |       18 |        9 |        5 |        8 |        4 |       0 |        1 |        2 |        2 |        3 |        0 |        0 |       0 |        1 |        3 |        0 |        2 |        2 |        1 |       0 |      0 |      1 |     27 |     35 |      8 |      8 |      1 |    110 |      0 |      0 |      3 |     27 |     24 |      9 |     10 |      4 |    109 |      0 |      0 |      3 |     14 |      6 |      3 |      0 |      3 |     68 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1711100 |     495 |    158 |    210 |    10 |    0 |    10 |    5 |    4 |    10 |    0 |     88 |    0 |    0 |    0 |    0 |    224 |    271 |       7 |      12 |       6 |       1 |     17 |     15 |      4 |      3 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |       1 |       1 |       1 |       0 |      6 |      5 |      3 |      1 |        2 |        6 |       13 |       13 |       17 |       11 |       2 |        3 |       12 |       15 |       28 |       17 |       13 |       6 |        4 |       13 |       29 |       13 |       18 |       12 |       5 |        6 |       21 |       20 |       20 |       28 |       14 |       7 |        9 |       15 |        8 |       10 |        2 |        2 |       0 |        5 |        8 |       11 |        5 |        9 |        4 |       0 |        3 |        4 |        2 |        3 |        6 |        2 |       0 |        3 |        6 |        3 |        4 |        0 |        3 |       0 |      0 |      0 |     17 |     21 |     12 |     10 |      2 |     96 |      0 |      0 |      2 |     21 |     27 |      3 |      7 |      8 |    142 |      0 |      0 |      4 |     15 |     11 |      2 |      1 |      2 |     53 |      0 |      0 |      0 |      4 |     13 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 1711200 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1711300 |     603 |    205 |    303 |     5 |    0 |     3 |    3 |    0 |     4 |    0 |     80 |    0 |    0 |    0 |    0 |    303 |    300 |      17 |      13 |       7 |       1 |     17 |     17 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      7 |      6 |      1 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      3 |      4 |      1 |      0 |        6 |        7 |       12 |       21 |       18 |       19 |      12 |        9 |        9 |       18 |       16 |       28 |       15 |      15 |       10 |       18 |       38 |       24 |       27 |       24 |      17 |        8 |       12 |       26 |       25 |       31 |       27 |      16 |        3 |       12 |        9 |        8 |        3 |        3 |       1 |        2 |        7 |       12 |       10 |        4 |        4 |       2 |        2 |        2 |        4 |        2 |        1 |        0 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     22 |     31 |     11 |      6 |      9 |    126 |      0 |      0 |      3 |     27 |     41 |     16 |      9 |      6 |    201 |      0 |      0 |      0 |     16 |      8 |      4 |      1 |      5 |     46 |      0 |      0 |      1 |      1 |      5 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1711400 |     531 |    161 |    266 |    10 |    0 |     4 |    7 |    1 |     0 |    0 |     82 |    0 |    0 |    0 |    0 |    260 |    271 |      20 |      12 |       2 |       0 |     14 |     11 |      7 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       4 |       3 |       2 |      0 |      6 |      0 |      0 |        2 |        4 |       10 |       13 |       13 |       14 |      10 |        2 |        6 |       14 |       23 |       15 |       17 |      18 |        8 |       16 |       20 |       18 |       29 |       30 |      15 |        4 |       10 |       21 |       19 |       37 |       18 |      21 |        4 |        4 |        6 |        9 |       12 |       10 |       1 |        5 |        7 |        6 |        9 |        7 |        2 |       0 |        2 |        1 |        5 |        2 |        1 |        1 |       0 |        2 |        1 |        3 |        1 |        3 |        0 |       0 |      0 |      1 |     15 |     24 |      6 |      7 |      4 |    104 |      0 |      0 |      1 |     24 |     39 |     18 |     11 |     17 |    156 |      0 |      0 |      1 |     16 |     10 |      9 |      0 |      2 |     44 |      0 |      0 |      2 |      3 |      8 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1711500 |     457 |    183 |    177 |     9 |    0 |     7 |    0 |    0 |     2 |    0 |     79 |    0 |    0 |    0 |    0 |    189 |    268 |      13 |       7 |       1 |       1 |     17 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      3 |      2 |      0 |      1 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        1 |       12 |        8 |       21 |       11 |       12 |       0 |        3 |       17 |       19 |       39 |       27 |       12 |       1 |        8 |       13 |       23 |       10 |       12 |       16 |       0 |        4 |       16 |       21 |       19 |       16 |       17 |       2 |        0 |        4 |        8 |       10 |        5 |        5 |       0 |        3 |        4 |       12 |       12 |       11 |        5 |       0 |        0 |        0 |        3 |        5 |        2 |        0 |       0 |        1 |        1 |        1 |        2 |        2 |        1 |       0 |      0 |      2 |     20 |     29 |     13 |      5 |     11 |    103 |      0 |      0 |      1 |     16 |     24 |     12 |      8 |      8 |    108 |      0 |      0 |      0 |     13 |      5 |      5 |      4 |      3 |     49 |      0 |      0 |      0 |      2 |      8 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1711600 |     642 |    214 |    258 |    10 |    0 |     6 |    2 |    1 |    10 |    0 |    141 |    0 |    0 |    0 |    0 |    301 |    341 |      28 |      17 |      10 |       0 |      8 |     14 |      9 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |       2 |       5 |       2 |       2 |      7 |      4 |      2 |      1 |        2 |        5 |       15 |       20 |       14 |       14 |      10 |        6 |       13 |       25 |       31 |       26 |       16 |      17 |        5 |       10 |       31 |       25 |       34 |       14 |      16 |       10 |       14 |       30 |       24 |       24 |       13 |       8 |       11 |        7 |       17 |       16 |       11 |        6 |       3 |       13 |       13 |       12 |       19 |        7 |        5 |       1 |        4 |        3 |        4 |        2 |        0 |        2 |       0 |        3 |        1 |        6 |        3 |        1 |        0 |       0 |      0 |      0 |     19 |     30 |     17 |      8 |      3 |    137 |      0 |      0 |      0 |     25 |     40 |     17 |      6 |     12 |    158 |      0 |      0 |      0 |     16 |     10 |      8 |      2 |      4 |    101 |      0 |      0 |      1 |      4 |      4 |      0 |      3 |      0 |     17 |      0 |     37 | s03      | R    |
| 1711700 |     109 |     46 |     35 |     3 |    0 |     1 |    0 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     42 |     67 |       4 |       1 |       0 |       0 |     10 |      2 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        6 |        3 |        1 |        3 |       0 |        1 |        3 |        3 |       14 |        3 |        8 |       0 |        0 |        2 |        3 |        5 |        3 |        4 |       0 |        0 |        2 |        2 |        3 |        5 |        6 |       0 |        0 |        1 |        3 |        2 |        1 |        2 |       0 |        0 |        4 |        3 |        4 |        2 |        2 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      5 |      7 |      3 |      5 |      2 |     24 |      0 |      0 |      0 |      2 |     12 |      1 |      0 |      0 |     20 |      0 |      0 |      1 |      3 |      1 |      0 |      2 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1711800 |     726 |    239 |    311 |     9 |    0 |     4 |    4 |    1 |     5 |    0 |    153 |    0 |    0 |    0 |    0 |    353 |    373 |      14 |      10 |       5 |       1 |     19 |     19 |     12 |      2 |      1 |      3 |      0 |      0 |      0 |      2 |      3 |      0 |      6 |      4 |      3 |      0 |      1 |      3 |      3 |      0 |       3 |      12 |      11 |       1 |      5 |      0 |      1 |      0 |        5 |       18 |       16 |       22 |       19 |       11 |       1 |        8 |       27 |       29 |       45 |       25 |       11 |       2 |        4 |       34 |       40 |       39 |       23 |       21 |       1 |        5 |       16 |       41 |       41 |       28 |       16 |       2 |        8 |       19 |       19 |       23 |       15 |        7 |       2 |        6 |       16 |       14 |       10 |        9 |        4 |       1 |        0 |        0 |        1 |        3 |        1 |        1 |       0 |        3 |        3 |        4 |        5 |        2 |        0 |       0 |      0 |      3 |     33 |     32 |      4 |     10 |     17 |    140 |      0 |      0 |      3 |     37 |     53 |     16 |     29 |      8 |    165 |      0 |      0 |      1 |     22 |     22 |      8 |      4 |      5 |     91 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 1712000 |     560 |    169 |    251 |     9 |    0 |     2 |    4 |    2 |     1 |    0 |    122 |    0 |    0 |    0 |    0 |    277 |    283 |      20 |      14 |      10 |       1 |     11 |      7 |      8 |      0 |      2 |      4 |      0 |      0 |      1 |      0 |      4 |      0 |      6 |      8 |      5 |      1 |      2 |      0 |      0 |      0 |       3 |      12 |       9 |       2 |      0 |      1 |      0 |      0 |        2 |       13 |       19 |       34 |       11 |        4 |       0 |        6 |       15 |       27 |       23 |       13 |        2 |       0 |        4 |       14 |       43 |       36 |       16 |        7 |       2 |        6 |       25 |       38 |       33 |       12 |       13 |       2 |        8 |        7 |       18 |       18 |        5 |        3 |       1 |        7 |        9 |       22 |       18 |        5 |        1 |       0 |        0 |        3 |        5 |        1 |        2 |        1 |       0 |        0 |        1 |        1 |        3 |        1 |        0 |       0 |      0 |      1 |     25 |     26 |     11 |     19 |      4 |     83 |      0 |      0 |      1 |     31 |     36 |     26 |     43 |      3 |    111 |      0 |      0 |      0 |     24 |     19 |      6 |      6 |      0 |     67 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1712100 |     466 |    146 |    187 |    12 |    0 |     7 |    5 |    2 |     3 |    0 |    104 |    0 |    0 |    0 |    0 |    205 |    261 |       9 |       7 |      18 |       1 |     14 |      4 |      5 |      2 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      0 |       3 |       0 |       0 |       1 |      0 |      3 |      3 |      0 |        4 |        7 |       13 |        9 |        8 |       12 |       0 |        7 |       17 |        9 |       26 |       20 |       13 |       1 |        6 |       19 |       17 |       22 |       13 |       16 |       1 |        5 |       13 |       12 |       16 |       22 |       21 |       4 |        5 |        9 |        8 |        9 |        7 |        6 |       1 |        8 |       14 |       10 |       15 |        4 |        8 |       0 |        2 |        5 |        3 |        1 |        1 |        1 |       0 |        2 |        6 |        2 |        3 |        3 |        0 |       0 |      0 |      0 |      8 |     23 |     14 |      2 |      6 |     93 |      0 |      0 |      1 |     17 |     19 |     12 |      6 |     10 |    122 |      0 |      0 |      2 |      6 |      8 |      6 |      3 |      3 |     76 |      0 |      0 |      1 |      3 |      6 |      1 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1712200 |     611 |    194 |    284 |     9 |    0 |     2 |    4 |    1 |     0 |    0 |    117 |    0 |    0 |    0 |    0 |    303 |    308 |       7 |       4 |       3 |       2 |     16 |     26 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      7 |      3 |      1 |      3 |      3 |      3 |      0 |       1 |       0 |       1 |       1 |      0 |      1 |      0 |      0 |        3 |        4 |       11 |       32 |       19 |       16 |       2 |        9 |        7 |       12 |       38 |       31 |       10 |       0 |        6 |        6 |       19 |       32 |       51 |       34 |       1 |        2 |        9 |       17 |       37 |       41 |       27 |       2 |        9 |        2 |       12 |       15 |       19 |        5 |       0 |       11 |        5 |        4 |       17 |       14 |        4 |       0 |        1 |        3 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        7 |        1 |        2 |       0 |      0 |      1 |     23 |     49 |     20 |      3 |     11 |     87 |      0 |      0 |      1 |     32 |     63 |     13 |     20 |     13 |    142 |      0 |      0 |      5 |     21 |     21 |      6 |      1 |      6 |     57 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1712300 |     428 |    131 |    211 |     4 |    0 |     3 |    4 |    1 |     0 |    0 |     74 |    0 |    0 |    0 |    0 |    214 |    214 |      12 |      11 |       6 |       1 |     10 |     15 |      4 |      1 |      2 |      2 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      1 |      0 |       1 |      11 |       4 |       0 |      0 |      0 |      2 |      0 |        3 |        6 |        9 |       21 |       15 |        3 |       1 |        6 |        3 |       16 |       30 |       12 |        6 |       0 |        1 |        5 |       37 |       28 |       25 |       16 |       0 |        4 |        4 |       36 |       35 |       15 |        5 |       0 |        3 |        4 |        7 |       15 |        5 |        3 |       0 |        3 |        2 |       12 |       11 |        7 |        2 |       0 |        0 |        1 |        1 |        3 |        0 |        2 |       0 |        0 |        1 |        1 |        1 |        2 |        0 |       0 |      0 |      2 |     14 |     27 |     25 |     16 |      0 |     47 |      0 |      0 |      2 |     24 |     47 |     46 |     31 |      0 |     61 |      0 |      0 |      0 |      6 |     12 |     11 |      8 |      0 |     37 |      0 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 1712400 |     355 |    106 |    150 |     8 |    0 |     4 |    3 |    1 |     2 |    0 |     81 |    0 |    0 |    0 |    0 |    138 |    217 |       9 |       7 |       3 |       1 |      5 |     13 |      2 |      1 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      4 |      4 |      0 |      0 |      1 |      0 |      0 |       2 |       3 |       2 |       0 |      0 |      3 |      2 |      0 |        3 |        6 |        4 |       11 |        4 |        4 |       0 |        5 |       15 |       12 |       23 |       16 |        3 |       0 |        1 |        9 |       25 |       26 |        8 |        2 |       0 |        8 |       12 |       21 |       20 |       13 |        5 |       0 |        3 |        2 |       10 |        3 |        7 |        3 |       1 |        3 |       15 |        9 |        8 |       14 |        3 |       0 |        1 |        1 |        0 |        1 |        3 |        0 |       0 |        0 |        3 |        3 |        2 |        2 |        2 |       0 |      0 |      0 |     15 |     12 |      8 |      7 |      3 |     61 |      0 |      0 |      0 |     21 |     32 |     14 |     16 |      2 |     65 |      0 |      0 |      0 |     10 |      4 |      1 |     10 |      0 |     56 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1712500 |     412 |    136 |    145 |    12 |    0 |     2 |    1 |    2 |     3 |    0 |    111 |    0 |    0 |    0 |    0 |    176 |    236 |      13 |      11 |       5 |       3 |      7 |      3 |      6 |      2 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |      2 |      5 |      1 |      0 |      1 |      0 |      1 |       4 |       0 |       3 |       0 |      2 |      0 |      1 |      0 |        2 |        8 |       13 |       12 |        4 |        6 |       0 |        9 |       16 |       18 |       24 |       12 |       12 |       0 |        3 |       15 |       27 |       15 |        6 |        3 |       0 |        5 |       18 |       18 |       19 |       11 |        5 |       0 |        2 |       14 |       14 |       15 |        5 |        0 |       0 |        6 |       22 |       16 |       10 |        6 |        1 |       0 |        1 |        4 |        4 |        3 |        0 |        0 |       0 |        2 |        3 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     16 |     23 |      8 |     10 |      0 |     79 |      0 |      0 |      1 |     20 |     21 |      6 |      8 |      0 |     89 |      0 |      0 |      1 |      8 |     10 |      7 |      2 |      0 |     83 |      0 |      0 |      0 |      2 |      1 |      2 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 1712600 |     183 |     56 |     86 |     7 |    0 |     1 |    0 |    1 |     1 |    0 |     31 |    0 |    0 |    0 |    0 |     93 |     90 |       2 |       3 |       1 |       0 |      5 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      3 |      0 |      0 |      4 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        3 |        7 |        7 |        5 |       0 |        3 |        2 |        5 |        9 |        8 |        5 |       0 |        2 |        4 |       12 |       11 |       18 |        1 |       0 |        3 |        3 |       12 |        9 |        9 |        2 |       0 |        4 |        4 |        5 |        1 |        1 |        1 |       0 |        4 |        4 |        4 |        1 |        1 |        1 |       0 |        2 |        0 |        1 |        0 |        0 |        2 |       0 |        2 |        0 |        1 |        0 |        1 |        1 |       0 |      0 |      0 |      2 |      7 |      1 |      4 |      5 |     37 |      0 |      0 |      1 |      8 |     16 |      5 |      3 |      9 |     44 |      0 |      0 |      0 |      4 |      4 |      2 |      4 |      1 |     16 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1715000 |     558 |    226 |    222 |    11 |    0 |     5 |    4 |    0 |     2 |    0 |     88 |    0 |    0 |    0 |    0 |    242 |    316 |      16 |       5 |       7 |       0 |     14 |     11 |      2 |      1 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |       11 |       10 |       22 |       14 |       15 |       4 |        7 |       13 |       22 |       45 |       27 |       21 |      10 |        5 |       13 |       25 |       23 |       16 |       19 |       8 |        5 |       14 |       22 |       18 |       26 |       20 |       8 |        7 |        9 |       11 |        6 |        5 |        2 |       0 |        8 |        9 |       17 |        6 |        6 |        2 |       0 |        1 |        4 |        1 |        3 |        1 |        2 |       0 |        2 |        4 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |     23 |     36 |     13 |      6 |      7 |    140 |      0 |      0 |      0 |     26 |     29 |     14 |     15 |      7 |    131 |      0 |      0 |      0 |     14 |     10 |      2 |      0 |      5 |     57 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1715100 |     563 |    199 |    223 |    11 |    0 |     6 |    4 |    1 |     1 |    0 |    118 |    0 |    0 |    0 |    0 |    224 |    339 |      22 |      12 |       8 |       1 |     14 |      8 |      5 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      5 |      0 |      0 |      1 |      0 |      1 |       1 |       4 |       1 |       0 |      4 |      5 |      2 |      0 |        5 |       11 |       17 |       12 |        8 |        8 |       0 |        6 |       24 |       35 |       36 |       20 |       17 |       0 |        6 |       22 |       37 |       15 |        8 |       12 |       0 |        5 |       24 |       38 |       24 |       22 |       10 |       0 |        8 |       20 |        8 |       11 |        6 |        1 |       0 |        8 |       19 |       14 |       15 |        6 |        2 |       0 |        4 |        1 |        2 |        2 |        0 |        0 |       0 |        2 |        3 |        2 |        4 |        2 |        1 |       0 |      0 |      2 |     25 |     54 |      9 |      4 |      0 |    105 |      0 |      0 |      0 |     31 |     51 |     13 |      4 |      1 |    123 |      0 |      0 |      1 |     14 |     17 |      5 |      0 |      0 |     81 |      0 |      0 |      0 |      2 |      2 |      3 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1715200 |     414 |    157 |    180 |     5 |    0 |     2 |    1 |    1 |     2 |    0 |     66 |    0 |    0 |    0 |    0 |    201 |    213 |       9 |      11 |       2 |       0 |     11 |     12 |      4 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      0 |      2 |      0 |        4 |        8 |       12 |       15 |       17 |        9 |       9 |        4 |        8 |       14 |       23 |       16 |        7 |      11 |        6 |        7 |       15 |       21 |       17 |       19 |       6 |        6 |        6 |       10 |       20 |       22 |       14 |      11 |        1 |        4 |        9 |        7 |        7 |        1 |       1 |        7 |        7 |        9 |        4 |        6 |        2 |       1 |        1 |        2 |        1 |        1 |        0 |        1 |       0 |        0 |        2 |        1 |        1 |        0 |        1 |       0 |      0 |      1 |     14 |     23 |      8 |      2 |     16 |     93 |      0 |      0 |      1 |     21 |     24 |     12 |      8 |      4 |    110 |      0 |      0 |      2 |     11 |     12 |      4 |      0 |      1 |     36 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1715300 |     176 |     49 |     85 |     1 |    0 |     2 |    1 |    0 |     2 |    0 |     36 |    0 |    0 |    0 |    0 |     86 |     90 |       1 |       4 |       2 |       1 |      7 |      8 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |       1 |       1 |       1 |      1 |      2 |      0 |      0 |        2 |        0 |        2 |        7 |        1 |        5 |       1 |        2 |        3 |        5 |       10 |        7 |        4 |       0 |        2 |        2 |        3 |       12 |       11 |       12 |       5 |        4 |        2 |        4 |        7 |        7 |       12 |       2 |        4 |        4 |        3 |        3 |        2 |        1 |       0 |        5 |        1 |        5 |        4 |        4 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |     11 |      1 |      2 |      1 |     28 |      0 |      0 |      1 |     11 |     15 |      9 |      5 |      3 |     41 |      0 |      0 |      0 |      2 |      5 |      3 |      1 |      1 |     24 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1715400 |     614 |    196 |    297 |     9 |    0 |     8 |    7 |    0 |     5 |    0 |     92 |    0 |    0 |    0 |    0 |    303 |    311 |      17 |      20 |       7 |       0 |     15 |     17 |      7 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       4 |       1 |       1 |      5 |      8 |      3 |      2 |        4 |       13 |        6 |       27 |       25 |       10 |       4 |       10 |        6 |       17 |       30 |       24 |       11 |       9 |       14 |       16 |       34 |       28 |       36 |       20 |       7 |       14 |       12 |       25 |       31 |       36 |       19 |       5 |        5 |        7 |       10 |       10 |        5 |        4 |       1 |        6 |        9 |       12 |        8 |       12 |        3 |       0 |        3 |        5 |        2 |        2 |        4 |        1 |       0 |        3 |        3 |        1 |        2 |        2 |        1 |       0 |      0 |      2 |     21 |     28 |     13 |     10 |     15 |    107 |      0 |      0 |      0 |     27 |     54 |     28 |     16 |      6 |    166 |      0 |      0 |      0 |     19 |     12 |      5 |      1 |      0 |     55 |      0 |      0 |      0 |      2 |      7 |      2 |      1 |      1 |     16 |      0 |     37 | s03      | R    |
| 1715500 |     204 |     64 |     86 |     3 |    0 |     0 |    3 |    0 |     0 |    0 |     48 |    0 |    0 |    0 |    0 |     99 |    105 |       3 |       1 |       1 |       1 |      5 |      3 |      1 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      2 |      0 |      0 |      0 |        2 |        1 |        2 |        6 |        9 |        3 |       0 |        1 |        2 |        8 |       13 |       15 |        2 |       0 |        5 |        0 |        8 |       11 |       15 |        4 |       1 |        1 |        3 |        9 |        7 |       11 |       10 |       1 |        6 |        2 |        3 |        8 |        8 |        3 |       0 |        5 |        2 |        3 |        5 |        2 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        3 |        0 |       0 |      0 |      1 |      4 |      7 |      4 |      5 |      2 |     41 |      0 |      0 |      0 |      8 |     16 |      9 |      1 |      6 |     46 |      0 |      0 |      1 |      3 |     10 |      1 |      0 |      1 |     32 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1750800 |      61 |     19 |     31 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     31 |     30 |       2 |       0 |       2 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        3 |        3 |        1 |       0 |        1 |        0 |        1 |        6 |        1 |        2 |       0 |        2 |        0 |        5 |        4 |        4 |        1 |       0 |        2 |        1 |        3 |        5 |        2 |        2 |       0 |        4 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      3 |      0 |      4 |      8 |      0 |      0 |      1 |      1 |      8 |      1 |      0 |      5 |     15 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1750900 |     122 |     55 |     44 |     2 |    0 |     1 |    0 |    1 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     63 |     59 |       2 |       1 |       0 |       0 |      9 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        4 |        3 |        1 |        5 |        7 |        5 |       2 |        1 |        0 |        3 |        9 |        8 |        6 |       1 |        2 |        4 |        4 |        2 |        4 |        2 |       0 |        2 |        3 |       11 |        4 |        2 |        4 |       0 |        1 |        1 |        5 |        5 |        0 |        0 |       1 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |        1 |        2 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |     13 |      2 |      1 |      2 |     35 |      0 |      0 |      0 |     10 |      8 |      0 |      2 |      7 |     17 |      0 |      0 |      0 |      4 |      9 |      1 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1751000 |     473 |    172 |    225 |     6 |    0 |     0 |    0 |    0 |     2 |    0 |     68 |    0 |    0 |    0 |    0 |    226 |    247 |      12 |       4 |       2 |       1 |     21 |      8 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        6 |        9 |       20 |       15 |        9 |       2 |        8 |        9 |       12 |       31 |       19 |       16 |      13 |        7 |       12 |       23 |       23 |       23 |       25 |      12 |        5 |        5 |       13 |       28 |       20 |       16 |      13 |        7 |        5 |        5 |        6 |        9 |        4 |       0 |        3 |        3 |       10 |        6 |        3 |        4 |       3 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |     15 |     37 |     20 |      6 |     11 |     83 |      0 |      0 |      0 |     23 |     36 |      5 |     18 |      8 |    135 |      0 |      0 |      0 |      8 |     13 |      3 |      3 |      2 |     39 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 1751100 |     347 |    128 |    147 |    10 |    0 |     3 |    5 |    3 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    169 |    178 |      10 |       5 |       2 |       1 |     14 |      9 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      2 |      3 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        5 |        1 |       10 |       10 |       19 |        6 |       5 |        2 |        8 |       12 |       22 |       15 |        5 |       8 |        1 |        5 |       13 |       17 |       14 |       16 |       7 |        2 |        7 |       20 |       17 |        9 |       10 |       9 |        8 |        2 |        7 |        3 |        2 |        3 |       0 |        3 |        5 |        5 |        5 |        3 |        3 |       0 |        4 |        1 |        3 |        0 |        5 |        2 |       0 |        1 |        1 |        1 |        3 |        1 |        1 |       0 |      0 |      0 |     10 |     30 |      5 |      6 |      3 |     74 |      0 |      0 |      0 |     11 |     27 |      2 |      2 |     20 |     85 |      0 |      0 |      1 |     11 |      6 |      4 |      3 |      3 |     21 |      0 |      0 |      1 |      4 |      1 |      1 |      2 |      0 |     14 |      0 |     37 | s03      | R    |
| 1751200 |     498 |    187 |    184 |    13 |    0 |     4 |    6 |    3 |     3 |    0 |     98 |    0 |    0 |    0 |    0 |    200 |    298 |      14 |      16 |      10 |       1 |     13 |      5 |      1 |      3 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       0 |      1 |      3 |      0 |      0 |        2 |       13 |       16 |       18 |        5 |        9 |       2 |        1 |       29 |       25 |       25 |       18 |       13 |      11 |        5 |       22 |       19 |       19 |       11 |        9 |       4 |        7 |       21 |       19 |       17 |       15 |       10 |       6 |        5 |       10 |        7 |        3 |        3 |        1 |       0 |        9 |       19 |       13 |       15 |        7 |        5 |       1 |        3 |        8 |        1 |        3 |        1 |        1 |       0 |        2 |        6 |        3 |        1 |        0 |        0 |       0 |      0 |      3 |     34 |     19 |      9 |      6 |      2 |    114 |      0 |      0 |      1 |     26 |     23 |      8 |      5 |      9 |    112 |      0 |      0 |      2 |     10 |      6 |      4 |      3 |      4 |     69 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1751500 |     146 |     55 |     60 |     4 |    0 |     1 |    0 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     68 |     78 |       3 |       5 |       0 |       0 |      5 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        4 |       12 |        3 |        1 |       2 |        3 |        4 |        9 |       10 |        4 |        1 |       1 |        1 |        2 |        8 |        9 |        5 |        3 |       0 |        1 |        4 |        6 |       12 |        4 |        5 |       0 |        6 |        1 |        3 |        2 |        1 |        2 |       0 |        3 |        1 |        3 |        1 |        0 |        2 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       1 |      0 |      0 |      8 |      6 |      4 |      3 |      1 |     33 |      0 |      0 |      0 |      6 |     11 |      3 |      3 |      6 |     31 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      2 |     16 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1751600 |     438 |    150 |    197 |     8 |    0 |     3 |    1 |    1 |     5 |    0 |     73 |    0 |    0 |    0 |    0 |    212 |    226 |      11 |      10 |       9 |       2 |     13 |     13 |      5 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        6 |        1 |       10 |       10 |       11 |       13 |       6 |        3 |        6 |       17 |       28 |       11 |       20 |       8 |        8 |        5 |       21 |       21 |       23 |       14 |      15 |        4 |        5 |       22 |       18 |       18 |       15 |       8 |        3 |        8 |        4 |       10 |        6 |        7 |       0 |        2 |        5 |        9 |        5 |        5 |        9 |       0 |        3 |        0 |        6 |        1 |        0 |        0 |       0 |        2 |        2 |        2 |        1 |        0 |        1 |       0 |      0 |      0 |     18 |     32 |     12 |     10 |      7 |     71 |      0 |      0 |      0 |     28 |     25 |      9 |      7 |     18 |    110 |      0 |      0 |      0 |      7 |     10 |      5 |      6 |      0 |     45 |      0 |      0 |      0 |      4 |      4 |      3 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1751800 |     193 |     54 |    106 |     1 |    0 |     0 |    0 |    1 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |     95 |     98 |       3 |       3 |       1 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        1 |        4 |        3 |        9 |        6 |        2 |       0 |        0 |        4 |        3 |        6 |        7 |        6 |       3 |        2 |        6 |        9 |       12 |        8 |       13 |       3 |        4 |        3 |       14 |       12 |        3 |       11 |       6 |        4 |        3 |        3 |        1 |        3 |        2 |       1 |        0 |        2 |        4 |        3 |        3 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |      3 |      9 |      3 |      1 |      4 |     33 |      0 |      0 |      1 |     17 |     13 |      9 |      3 |      9 |     54 |      0 |      0 |      0 |      7 |      3 |      2 |      0 |      1 |     18 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1752500 |     913 |    317 |    409 |    24 |    0 |    12 |    8 |    1 |     6 |    0 |    136 |    0 |    0 |    0 |    0 |    421 |    492 |      22 |      12 |      11 |       5 |     26 |     14 |     16 |      3 |      2 |      0 |      1 |      0 |      1 |      3 |      0 |      0 |      1 |      3 |      3 |      0 |      2 |      1 |      1 |      0 |       2 |       1 |       0 |       0 |      2 |      0 |      3 |      0 |        5 |       14 |       16 |       25 |       18 |       22 |      22 |       14 |       20 |       28 |       43 |       29 |       31 |      30 |        9 |       19 |       41 |       38 |       42 |       28 |      23 |       14 |       17 |       37 |       37 |       42 |       35 |      27 |       10 |       14 |       11 |       10 |       12 |       11 |       5 |       10 |       14 |       11 |       12 |        6 |        7 |       3 |        5 |        3 |        5 |        5 |        3 |        5 |       0 |        1 |        4 |        7 |        5 |        5 |        3 |       0 |      0 |      1 |     33 |     50 |     13 |     16 |     11 |    193 |      0 |      0 |      1 |     43 |     56 |     18 |     13 |     26 |    252 |      0 |      0 |      0 |     22 |     16 |     10 |      4 |      4 |     80 |      0 |      0 |      0 |      8 |     15 |      0 |      2 |      1 |     25 |      0 |     37 | s03      | R    |
| 1753000 |     745 |    273 |    339 |    13 |    0 |     6 |    6 |    6 |     2 |    0 |    100 |    0 |    0 |    0 |    0 |    349 |    396 |      23 |       9 |       7 |       1 |     19 |     16 |      9 |      4 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      3 |      1 |       11 |        4 |       15 |       17 |       24 |       18 |      27 |       12 |       15 |       20 |       25 |       28 |       23 |      34 |       17 |       14 |       37 |       28 |       23 |       28 |      25 |       11 |       18 |       24 |       29 |       24 |       33 |      28 |        4 |        8 |       10 |       10 |        7 |        6 |       1 |        7 |       11 |       10 |       10 |        6 |        8 |       2 |        1 |        5 |        2 |        2 |        3 |        2 |       0 |        4 |        6 |        3 |        1 |        3 |        0 |       1 |      0 |      0 |     24 |     33 |     13 |     12 |     10 |    181 |      0 |      0 |      2 |     34 |     53 |     18 |     16 |     13 |    203 |      0 |      0 |      0 |     22 |     20 |      3 |      0 |      4 |     51 |      0 |      0 |      2 |      3 |     10 |      1 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 1754000 |     516 |    172 |    209 |     9 |    0 |     4 |    3 |    3 |     6 |    0 |    110 |    0 |    0 |    0 |    0 |    240 |    276 |      17 |       9 |      10 |       0 |      8 |      9 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      1 |      5 |      2 |      0 |       10 |       16 |        3 |       10 |       12 |        8 |       9 |       19 |       23 |        7 |       16 |       10 |       17 |      12 |       16 |       20 |       20 |       14 |        7 |       14 |      10 |       17 |       14 |       18 |       17 |       11 |       19 |      12 |       15 |       12 |        7 |       11 |        5 |        2 |       3 |       21 |        8 |       10 |        9 |        4 |        1 |       2 |        4 |        6 |        2 |        4 |        0 |        0 |       0 |        2 |        1 |        3 |        0 |        1 |        1 |       1 |      0 |      2 |     12 |     11 |     10 |      1 |      5 |    131 |      0 |      0 |      1 |     21 |     20 |     10 |      5 |      4 |    148 |      0 |      0 |      1 |      8 |      3 |      6 |      1 |      3 |     88 |      0 |      0 |      1 |      2 |      2 |      2 |      2 |      1 |     15 |      0 |     37 | s03      | R    |
| 1754100 |     667 |    239 |    223 |    17 |    0 |    10 |    4 |    6 |     8 |    0 |    160 |    0 |    0 |    0 |    0 |    309 |    358 |      29 |      25 |      11 |       4 |     18 |     13 |     10 |      2 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      1 |      0 |      1 |       0 |       0 |       1 |       0 |      5 |      2 |      1 |      0 |       15 |       23 |       17 |       24 |        7 |        9 |       1 |       19 |       29 |       25 |       29 |       15 |       26 |       0 |       15 |       41 |       23 |       15 |       12 |        8 |       4 |       14 |       31 |       21 |       12 |       13 |       12 |       2 |       20 |       22 |       11 |        7 |       10 |        3 |       0 |       24 |       26 |       11 |       12 |        9 |        5 |       0 |        5 |        8 |        3 |        4 |        1 |        1 |       0 |        5 |        5 |        3 |        7 |        1 |        2 |       0 |      0 |      3 |     22 |     22 |     11 |     10 |      4 |    167 |      0 |      0 |      3 |     27 |     15 |      3 |      3 |      4 |    168 |      0 |      0 |      2 |     18 |      7 |      5 |      1 |      3 |    124 |      0 |      0 |      1 |      6 |      3 |      1 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 1756000 |     314 |     96 |    162 |     6 |    0 |     2 |    1 |    2 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |    145 |    169 |      17 |       8 |       3 |       0 |      6 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       3 |       0 |       0 |       1 |      0 |      1 |      0 |      0 |        7 |        5 |        8 |        9 |        6 |        2 |      11 |        2 |        7 |       13 |       10 |        3 |        7 |       6 |        4 |       11 |       13 |       15 |        7 |       15 |       8 |        7 |        7 |       16 |       14 |       11 |       18 |      16 |        2 |        2 |        9 |        2 |        1 |        3 |       0 |        5 |        2 |        8 |        5 |        3 |        2 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        2 |        2 |        0 |        1 |       0 |      0 |      0 |     15 |     15 |      4 |      2 |      1 |     59 |      0 |      0 |      2 |     13 |     28 |      7 |      6 |      9 |     97 |      0 |      0 |      0 |      4 |      3 |      4 |      0 |      0 |     33 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      7 |      0 |     37 | s03      | R    |
| 1760000 |     444 |    158 |    193 |    11 |    0 |     4 |    2 |    1 |     0 |    0 |     75 |    0 |    0 |    0 |    0 |    208 |    236 |      19 |      19 |       6 |       0 |     11 |     12 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |       13 |       10 |        5 |       16 |      18 |        5 |       12 |       15 |       17 |       16 |       11 |      16 |        4 |        9 |       17 |       16 |       12 |       20 |      14 |        5 |        8 |       22 |       12 |       10 |       25 |      19 |       12 |        6 |       13 |        3 |        2 |        2 |       2 |        4 |       12 |        9 |        5 |        2 |        2 |       1 |        2 |        4 |        3 |        1 |        0 |        0 |       0 |        0 |        0 |        5 |        1 |        1 |        1 |       0 |      0 |      1 |     11 |     16 |     10 |      7 |      5 |    108 |      0 |      0 |      1 |     16 |     22 |     12 |      7 |      5 |    130 |      0 |      0 |      0 |     16 |      6 |      3 |      4 |      3 |     43 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1761000 |     359 |    127 |    159 |    12 |    0 |     2 |    3 |    1 |     3 |    0 |     52 |    0 |    0 |    0 |    0 |    177 |    182 |       9 |       1 |       1 |       0 |     11 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       5 |       0 |       0 |      0 |      0 |      1 |      0 |        4 |        8 |        7 |       12 |        5 |       12 |      12 |        4 |        8 |       12 |       12 |        3 |       13 |      15 |        5 |        7 |       17 |       19 |        7 |       14 |      10 |        5 |        4 |       11 |       18 |       11 |       14 |      17 |        3 |        5 |        9 |        7 |        0 |        2 |       3 |        4 |        0 |        8 |        3 |        3 |        0 |       5 |        0 |        3 |        3 |        0 |        2 |        1 |       0 |        3 |        2 |        1 |        1 |        2 |        3 |       0 |      0 |      1 |     12 |     12 |      6 |      1 |      4 |     91 |      0 |      0 |      0 |     14 |     28 |     15 |      5 |      5 |     92 |      0 |      0 |      0 |     10 |      2 |      3 |      0 |      1 |     36 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 1761100 |     206 |     78 |     86 |     4 |    0 |     0 |    1 |    1 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |     89 |    117 |       9 |       9 |       2 |       1 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       2 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |       10 |        3 |        5 |        9 |       3 |        3 |        3 |        7 |       11 |        3 |        8 |       9 |        3 |        7 |        7 |        7 |        2 |        7 |       4 |        1 |        8 |       13 |        5 |        6 |       10 |       6 |        1 |        0 |        5 |        4 |        3 |        0 |       0 |        2 |        4 |        5 |        5 |        2 |        2 |       1 |        1 |        2 |        2 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      7 |     12 |      4 |      1 |      3 |     51 |      0 |      0 |      1 |      6 |     11 |      3 |      2 |      3 |     60 |      0 |      0 |      0 |      4 |      9 |      2 |      1 |      0 |     18 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1763000 |     223 |     82 |     92 |     3 |    0 |     2 |    1 |    2 |     3 |    0 |     38 |    0 |    0 |    0 |    0 |    103 |    120 |      14 |       7 |       2 |       1 |      4 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        6 |        2 |        8 |        8 |       7 |        0 |        4 |        9 |       11 |        5 |       11 |       7 |        5 |        6 |       15 |        5 |        4 |        5 |       6 |        2 |        5 |       10 |        6 |        7 |        9 |       7 |        3 |        2 |        3 |        5 |        2 |        1 |       0 |        8 |        3 |        5 |        4 |        1 |        1 |       0 |        2 |        0 |        0 |        2 |        0 |        2 |       0 |        3 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |     10 |     10 |      6 |      2 |      1 |     53 |      0 |      0 |      0 |     19 |     10 |      3 |      1 |      3 |     56 |      0 |      0 |      3 |      5 |      4 |      1 |      0 |      0 |     25 |      0 |      0 |      1 |      1 |      5 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1763100 |     220 |     69 |    115 |     5 |    0 |     3 |    0 |    0 |     2 |    0 |     26 |    0 |    0 |    0 |    0 |    109 |    111 |       3 |       4 |       4 |       1 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        3 |        7 |        5 |        2 |        5 |       4 |        1 |        1 |        5 |        7 |        4 |       12 |      10 |        2 |        4 |       14 |       16 |        6 |       15 |       5 |        3 |        4 |       11 |        7 |        5 |       13 |      10 |        2 |        5 |        2 |        2 |        0 |        1 |       0 |        2 |        3 |        3 |        2 |        3 |        1 |       0 |        2 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        2 |       0 |      0 |      0 |      3 |      5 |      7 |      3 |      3 |     48 |      0 |      0 |      1 |     10 |     17 |      8 |      1 |      8 |     70 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      3 |     16 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1764000 |     439 |    190 |    158 |     7 |    0 |     5 |    2 |    2 |     1 |    0 |     74 |    0 |    0 |    0 |    0 |    210 |    229 |      17 |       8 |       3 |       0 |     13 |     10 |      7 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |       3 |       2 |       3 |       0 |      3 |      0 |      0 |      0 |        5 |        6 |       15 |       14 |       11 |       17 |      13 |        7 |       12 |       19 |       21 |       14 |       18 |      18 |        4 |       17 |       17 |       19 |        5 |       14 |       8 |        2 |       12 |       16 |       15 |       11 |       11 |       7 |        3 |        3 |        5 |       12 |        7 |        4 |       4 |        4 |        3 |        9 |       10 |        4 |        6 |       0 |        2 |        1 |        0 |        1 |        1 |        2 |       0 |        1 |        4 |        3 |        1 |        1 |        0 |       0 |      0 |      1 |     28 |     33 |      8 |      0 |      8 |    112 |      0 |      0 |      2 |     17 |     14 |      6 |      1 |      8 |    110 |      0 |      0 |      0 |     13 |      3 |      5 |      0 |      8 |     45 |      0 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1765000 |     535 |    220 |    224 |    13 |    0 |     2 |    1 |    2 |     8 |    0 |     65 |    0 |    0 |    0 |    0 |    240 |    295 |      11 |       5 |       3 |       2 |     17 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        7 |        7 |       14 |       13 |       14 |       18 |      14 |        5 |       12 |       27 |       15 |       26 |       25 |      23 |        7 |       12 |       28 |       16 |       12 |       16 |      16 |        8 |       12 |       19 |       21 |       14 |       20 |      23 |        5 |        2 |        7 |        5 |        5 |        2 |       2 |        6 |        8 |        7 |        7 |        5 |        3 |       1 |        3 |        5 |        4 |        2 |        1 |        3 |       0 |        1 |        5 |        0 |        0 |        1 |        1 |       0 |      0 |      1 |     13 |     25 |     13 |      7 |     11 |    150 |      0 |      0 |      0 |     11 |     26 |     14 |      9 |     12 |    152 |      0 |      0 |      0 |     10 |      6 |      7 |      1 |      2 |     39 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1765100 |     236 |    104 |     86 |     4 |    0 |     1 |    2 |    0 |     3 |    0 |     36 |    0 |    0 |    0 |    0 |    110 |    126 |       5 |       0 |       1 |       0 |      9 |      7 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        3 |        8 |       12 |        4 |        7 |       5 |        0 |        4 |       12 |       19 |        8 |       15 |       2 |        3 |        4 |        6 |       11 |        9 |       12 |       1 |        0 |        9 |        5 |        6 |        8 |        7 |       5 |        1 |        2 |        2 |        3 |        3 |        3 |       0 |        1 |        2 |        4 |        8 |        4 |        2 |       1 |        1 |        1 |        2 |        0 |        1 |        1 |       0 |        0 |        3 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |     11 |     12 |      6 |      3 |      6 |     66 |      0 |      0 |      0 |     12 |      9 |      4 |      1 |      4 |     56 |      0 |      0 |      0 |      7 |      4 |      0 |      1 |      1 |     23 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 1765200 |      18 |      5 |     10 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      6 |     12 |       0 |       0 |       2 |       0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        3 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1766100 |     567 |    227 |    220 |     9 |    0 |     2 |    7 |    1 |     2 |    0 |     99 |    0 |    0 |    0 |    0 |    240 |    327 |      12 |       8 |       7 |       1 |     35 |     11 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        5 |        8 |       10 |       19 |        8 |       30 |       2 |        4 |       13 |       18 |       32 |       21 |       53 |       4 |        4 |        9 |       15 |       18 |       22 |       25 |       6 |        3 |        7 |       19 |       22 |       28 |       38 |       4 |        6 |        6 |        7 |       17 |        6 |        8 |       0 |       10 |        6 |        8 |        3 |       12 |       10 |       0 |        3 |        1 |        1 |        1 |        0 |        3 |       0 |        3 |        4 |        1 |        2 |        0 |        2 |       0 |      0 |      3 |     33 |     30 |     22 |     10 |     11 |    118 |      0 |      0 |      5 |     17 |     39 |     12 |      8 |      8 |    131 |      0 |      0 |      1 |      8 |     19 |      8 |      1 |      5 |     57 |      0 |      0 |      1 |      2 |      2 |      2 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 1767000 |     510 |    189 |    218 |     9 |    0 |     2 |    5 |    1 |     3 |    0 |     83 |    0 |    0 |    0 |    0 |    234 |    276 |      11 |      14 |       6 |       1 |     23 |      9 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      4 |      0 |       2 |       2 |       2 |       0 |      2 |      0 |      2 |      0 |        4 |        6 |       11 |       17 |        6 |       19 |      18 |        5 |        5 |       19 |       22 |       17 |       21 |      19 |        8 |       12 |       26 |       15 |       14 |       17 |      17 |        8 |       18 |       21 |       12 |       13 |       18 |      19 |        6 |        8 |       10 |        6 |        5 |        0 |       0 |        7 |       10 |        9 |       10 |        6 |        4 |       2 |        1 |        1 |        2 |        3 |        0 |        2 |       0 |        1 |        1 |        4 |        4 |        1 |        0 |       0 |      0 |      1 |     14 |     15 |      8 |      5 |      2 |    144 |      0 |      0 |      2 |     22 |     30 |     11 |      4 |     12 |    137 |      0 |      0 |      0 |     12 |     13 |      2 |      0 |      4 |     52 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1768000 |     451 |    156 |    227 |     7 |    0 |     4 |    6 |    1 |     0 |    0 |     50 |    0 |    0 |    0 |    0 |    195 |    256 |      21 |       7 |       6 |       2 |     11 |     16 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |        2 |        2 |       13 |       10 |        9 |       15 |      12 |        5 |        9 |        7 |       16 |       15 |       28 |      13 |        8 |       12 |       25 |       18 |        9 |       20 |      11 |        9 |       11 |       28 |       20 |       14 |       23 |      19 |        2 |        2 |       10 |        3 |        2 |        3 |       0 |        4 |        6 |        4 |        9 |        1 |        2 |       2 |        1 |        1 |        2 |        1 |        2 |        0 |       0 |        1 |        2 |        1 |        3 |        1 |        3 |       0 |      0 |      1 |     17 |     21 |      8 |      6 |      5 |     98 |      0 |      0 |      1 |     19 |     28 |      8 |      9 |     14 |    148 |      0 |      0 |      1 |      4 |     10 |      5 |      2 |      0 |     28 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1770000 |     385 |    141 |    162 |    12 |    0 |     6 |    1 |    0 |     3 |    0 |     60 |    0 |    0 |    0 |    0 |    190 |    195 |      12 |       9 |       3 |       1 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      0 |       11 |        5 |       11 |       13 |        3 |       11 |       9 |        3 |        8 |       22 |       17 |        2 |       11 |      15 |        8 |       13 |       24 |       13 |       11 |        7 |       4 |        8 |       12 |       20 |        9 |       10 |       14 |       9 |        4 |        8 |       10 |       12 |        1 |        1 |       1 |        2 |        5 |        8 |        3 |        2 |        3 |       0 |        2 |        1 |        4 |        1 |        2 |        0 |       0 |        0 |        3 |        2 |        3 |        3 |        1 |       0 |      0 |      2 |     19 |     16 |     10 |      3 |      5 |     86 |      0 |      0 |      1 |     28 |     25 |      6 |      8 |      6 |     88 |      0 |      0 |      1 |      7 |      8 |      7 |      4 |      2 |     31 |      0 |      0 |      0 |      4 |      4 |      2 |      2 |      1 |      9 |      0 |     37 | s03      | R    |
| 1772000 |     329 |    129 |    152 |     5 |    0 |     2 |    2 |    0 |     2 |    0 |     37 |    0 |    0 |    0 |    0 |    153 |    176 |      12 |       6 |       2 |       0 |      3 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        5 |        4 |       13 |        5 |        7 |        7 |      10 |        4 |        8 |       16 |       15 |       11 |       11 |      13 |        3 |        9 |       14 |        9 |        9 |       19 |      11 |        4 |       10 |       11 |        6 |       10 |       19 |      18 |        3 |        3 |        4 |        4 |        5 |        1 |       2 |        2 |        1 |        5 |        2 |        3 |        2 |       0 |        2 |        1 |        0 |        2 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        2 |       0 |      0 |      1 |     15 |     21 |      7 |      3 |      3 |     79 |      0 |      0 |      0 |     11 |     24 |      5 |      3 |      8 |    101 |      0 |      0 |      1 |      5 |      6 |      2 |      1 |      1 |     21 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1773000 |     412 |    117 |    226 |     8 |    0 |     2 |    2 |    1 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    191 |    221 |       7 |      11 |       6 |       0 |     13 |      9 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        1 |        7 |       12 |        8 |        9 |      11 |        2 |        4 |        9 |       13 |       11 |       13 |      13 |        1 |        9 |       15 |       13 |       11 |       31 |      20 |        6 |        8 |       12 |       22 |       12 |       38 |      28 |        6 |        6 |        5 |        4 |        5 |        4 |       2 |        4 |        1 |        3 |        6 |        4 |        3 |       2 |        0 |        1 |        0 |        5 |        0 |        1 |       0 |        2 |        2 |        1 |        0 |        0 |        2 |       0 |      0 |      0 |     15 |     16 |      4 |      5 |      1 |     76 |      0 |      0 |      3 |     22 |     32 |      3 |      8 |      6 |    152 |      0 |      0 |      2 |     10 |      4 |      1 |      1 |      1 |     36 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1773100 |     851 |    342 |    330 |    14 |    0 |     6 |    6 |    1 |     4 |    0 |    148 |    0 |    0 |    0 |    0 |    362 |    489 |      23 |      12 |      12 |       1 |     45 |     18 |     14 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      2 |      0 |      2 |      3 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      3 |      6 |      1 |      0 |        8 |       13 |       27 |       27 |       11 |       47 |       4 |       14 |       24 |       19 |       23 |       32 |       90 |       3 |       20 |       29 |       10 |       13 |       24 |       47 |       1 |       17 |       31 |       15 |       16 |       18 |       83 |       6 |       12 |       12 |        7 |       10 |        8 |       14 |       0 |       11 |       20 |       12 |        7 |        8 |       27 |       0 |        3 |        9 |        3 |        0 |        1 |        2 |       0 |        4 |        3 |        1 |        2 |        1 |        2 |       0 |      0 |      0 |     49 |     38 |     11 |      6 |     13 |    225 |      0 |      0 |      0 |     30 |     50 |     11 |     10 |     19 |    210 |      0 |      0 |      2 |     19 |      8 |      5 |      4 |      8 |    102 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 1773200 |     355 |    141 |    161 |     2 |    0 |     2 |    2 |    1 |     2 |    0 |     44 |    0 |    0 |    0 |    0 |    185 |    170 |      10 |       7 |       1 |       1 |     16 |     10 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        3 |        4 |       15 |        8 |       13 |      13 |        4 |        4 |       12 |       19 |        9 |       16 |      18 |        8 |        9 |       20 |       18 |        9 |       20 |      12 |        6 |        7 |        9 |       11 |        9 |       13 |      10 |        5 |        1 |        4 |        6 |        5 |        1 |       1 |        4 |        2 |        2 |        9 |        2 |        1 |       1 |        2 |        0 |        2 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |     11 |     21 |     16 |      5 |      7 |     80 |      0 |      0 |      0 |     18 |     31 |      2 |      5 |      4 |    101 |      0 |      0 |      0 |      8 |      3 |      5 |      1 |      1 |     26 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1774000 |     285 |     87 |    165 |     3 |    0 |     1 |    0 |    0 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |    134 |    151 |       9 |       9 |       1 |       0 |      3 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       2 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        5 |        5 |        9 |        3 |        7 |       5 |        2 |        9 |       12 |        9 |        4 |        5 |      11 |        1 |        9 |       18 |        8 |        5 |       20 |      20 |        4 |        8 |       11 |        9 |        5 |       22 |      25 |        1 |        2 |        3 |        4 |        2 |        1 |       4 |        2 |        3 |        2 |        1 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      8 |     15 |      3 |      4 |      2 |     55 |      0 |      0 |      1 |     11 |     27 |      6 |      2 |     11 |    107 |      0 |      0 |      1 |      2 |      2 |      2 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1774100 |     182 |     78 |     69 |     2 |    0 |     1 |    3 |    1 |     2 |    0 |     26 |    0 |    0 |    0 |    0 |     76 |    106 |       6 |       4 |       1 |       0 |     10 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        3 |        5 |        3 |        3 |        6 |        4 |       7 |        4 |        4 |        4 |       13 |        5 |       10 |       7 |        2 |        2 |        3 |        6 |        7 |        4 |       5 |        3 |        4 |        7 |        4 |       11 |        3 |       8 |        1 |        1 |        1 |        3 |        2 |        4 |       0 |        2 |        3 |        2 |        2 |        1 |        3 |       1 |        0 |        1 |        0 |        2 |        0 |        1 |       0 |        2 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |     10 |      1 |      2 |      2 |     57 |      0 |      0 |      0 |      5 |      9 |      2 |      5 |      2 |     46 |      0 |      0 |      0 |      5 |      4 |      2 |      2 |      0 |     13 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1775000 |     364 |    126 |    174 |     8 |    0 |     2 |    2 |    1 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    166 |    198 |       5 |       3 |       3 |       0 |     16 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |       0 |       2 |       2 |       0 |      0 |      0 |      0 |      0 |        3 |        4 |       10 |       11 |       10 |       13 |       6 |        5 |        5 |       11 |       12 |       11 |       14 |      11 |        2 |        4 |       12 |        9 |       10 |       19 |      21 |        1 |        7 |       13 |       13 |        5 |       27 |      31 |        5 |        3 |        5 |        4 |        3 |        4 |       2 |        2 |        7 |        2 |        4 |        5 |        2 |       1 |        2 |        1 |        2 |        0 |        1 |        0 |       0 |        2 |        1 |        2 |        2 |        1 |        1 |       0 |      0 |      1 |     10 |     13 |      7 |      4 |      4 |     87 |      0 |      0 |      3 |     12 |     21 |      6 |      9 |      6 |    117 |      0 |      0 |      2 |      5 |      6 |      2 |      1 |      3 |     30 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 1801000 |     487 |    188 |    219 |     7 |    0 |     8 |    3 |    0 |     6 |    0 |     56 |    0 |    0 |    0 |    0 |    231 |    256 |      13 |       6 |       6 |       3 |     23 |     12 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       1 |       0 |      2 |      0 |      0 |      0 |        6 |       11 |       11 |       10 |       11 |       18 |      14 |        4 |        9 |       12 |       15 |       19 |       24 |      24 |        9 |        5 |       16 |       21 |       12 |       23 |      20 |        2 |       10 |       20 |       19 |        8 |       33 |      21 |        5 |        3 |        9 |        4 |        5 |        7 |       0 |        3 |        2 |        4 |        5 |        4 |        3 |       2 |        3 |        1 |        1 |        1 |        3 |        2 |       0 |        1 |        3 |        3 |        3 |        2 |        1 |       0 |      0 |      1 |     18 |     15 |     10 |      8 |      5 |    131 |      0 |      0 |      1 |     16 |     31 |     12 |      8 |     14 |    137 |      0 |      0 |      0 |      5 |      7 |      3 |      1 |      0 |     40 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 1804000 |     688 |    245 |    337 |     5 |    0 |     3 |    2 |    3 |     2 |    0 |     91 |    0 |    0 |    0 |    0 |    323 |    365 |       4 |       5 |       1 |       0 |     56 |     31 |     17 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      3 |      0 |      3 |      0 |      0 |      0 |       3 |       0 |       0 |       0 |      0 |      5 |      2 |      0 |       10 |       10 |        7 |       21 |       20 |       17 |      15 |       11 |        7 |       20 |       25 |       26 |       35 |      21 |        3 |       14 |       21 |       28 |       29 |       47 |      31 |        5 |        6 |       23 |       19 |       31 |       46 |      34 |        9 |        4 |        8 |        7 |        7 |        3 |       3 |       12 |        3 |       10 |       15 |        5 |        4 |       1 |        1 |        2 |        2 |        0 |        1 |        3 |       0 |        1 |        1 |        0 |        1 |        2 |        1 |       0 |      0 |      2 |     22 |     31 |     13 |      8 |     23 |    146 |      0 |      0 |      1 |     36 |     33 |     17 |     14 |     18 |    218 |      0 |      0 |      2 |     16 |      9 |      6 |      1 |      5 |     52 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 1806000 |     376 |    121 |    199 |     6 |    0 |     1 |    3 |    1 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    170 |    206 |       3 |      10 |       0 |       0 |     12 |      7 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        1 |        3 |        8 |        7 |       13 |      12 |        3 |        6 |        6 |       16 |       12 |       13 |      15 |        2 |        7 |       20 |       14 |       10 |       26 |      16 |        3 |        8 |       16 |       11 |       11 |       29 |      26 |        3 |        6 |        3 |        6 |        3 |        0 |       2 |        2 |        1 |        4 |        5 |        4 |        5 |       1 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        2 |        1 |        3 |        1 |        1 |        1 |       0 |      0 |      0 |      5 |     18 |      2 |      2 |      6 |     88 |      0 |      0 |      1 |     16 |     20 |     13 |      2 |      7 |    140 |      0 |      0 |      0 |      8 |      4 |      1 |      0 |      1 |     31 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1807000 |     784 |    308 |    311 |    16 |    0 |     9 |    2 |    3 |     3 |    0 |    132 |    0 |    0 |    0 |    0 |    336 |    448 |      14 |      11 |       5 |       0 |     40 |     21 |     19 |      3 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      2 |      0 |      5 |      0 |      2 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        4 |       13 |        7 |       28 |       18 |       41 |       8 |        8 |       12 |       20 |       30 |       40 |       59 |      20 |        5 |        6 |       23 |       28 |       21 |       34 |      20 |        5 |       17 |       15 |       29 |       30 |       52 |      26 |       12 |        7 |       11 |       11 |        9 |       12 |       1 |       12 |        7 |       12 |       10 |        7 |       20 |       1 |        2 |        5 |        0 |        2 |        3 |        5 |       0 |        2 |        2 |        6 |        2 |        3 |        1 |       0 |      0 |      2 |     35 |     42 |     12 |     16 |     18 |    183 |      0 |      0 |      1 |     21 |     46 |     17 |     12 |     10 |    204 |      0 |      0 |      1 |     24 |     19 |      0 |      2 |      5 |     81 |      0 |      0 |      1 |      4 |      8 |      2 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 1808000 |     425 |    124 |    239 |     6 |    0 |     1 |    3 |    0 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    205 |    220 |       8 |       0 |       2 |       2 |      4 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       0 |      0 |      3 |      0 |      0 |        3 |        5 |        6 |       12 |        8 |       10 |       9 |        3 |        5 |       12 |       11 |        9 |       20 |      11 |        9 |       10 |       15 |       15 |       10 |       33 |      26 |        5 |        5 |       14 |       15 |       10 |       44 |      28 |        2 |        3 |        5 |        8 |        3 |        5 |       1 |        2 |        3 |        5 |        4 |        3 |        5 |       2 |        0 |        2 |        0 |        5 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |     14 |     19 |      5 |      7 |     12 |     67 |      0 |      0 |      1 |     30 |     25 |     12 |      6 |     13 |    152 |      0 |      0 |      0 |      8 |      8 |      1 |      1 |      1 |     32 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 1809000 |     136 |     51 |     51 |     6 |    0 |     0 |    0 |    0 |     1 |    0 |     27 |    0 |    0 |    0 |    0 |     53 |     83 |       3 |       0 |       1 |       0 |     11 |      6 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        6 |        1 |        4 |        3 |        3 |       2 |        2 |        3 |        4 |        7 |        5 |        7 |       4 |        3 |        2 |        4 |        2 |        6 |        3 |       0 |        0 |        4 |        4 |        4 |        3 |       14 |       2 |        1 |        4 |        3 |        2 |        1 |        1 |       1 |        2 |        3 |        4 |        1 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        3 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |      6 |      0 |      4 |      2 |     34 |      0 |      0 |      0 |      6 |      9 |      1 |      1 |      1 |     33 |      0 |      0 |      1 |      2 |      4 |      0 |      1 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1809100 |     778 |    292 |    343 |     9 |    0 |     3 |    6 |    2 |     3 |    0 |    120 |    0 |    0 |    0 |    0 |    350 |    428 |      10 |       3 |       7 |       0 |     47 |     24 |     14 |      2 |      1 |      1 |      2 |      0 |      0 |      3 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        7 |       10 |       11 |       18 |       18 |       34 |      15 |        9 |       13 |       21 |       35 |       31 |       55 |      15 |        4 |       15 |       22 |       22 |       31 |       42 |      29 |        3 |       16 |       22 |       25 |       41 |       39 |      32 |       11 |       10 |        7 |       15 |        8 |        6 |       5 |        8 |       10 |        9 |       12 |       10 |        8 |       1 |        4 |        1 |        2 |        2 |        1 |        0 |       0 |        3 |        1 |        3 |        3 |        1 |        2 |       0 |      0 |      0 |     32 |     38 |     22 |      4 |     16 |    180 |      0 |      0 |      2 |     32 |     38 |     13 |      9 |     18 |    231 |      0 |      0 |      3 |     19 |     11 |      9 |      6 |      4 |     68 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 1809200 |     524 |    176 |    256 |     6 |    0 |     3 |    4 |    3 |     3 |    0 |     73 |    0 |    0 |    0 |    0 |    241 |    283 |      25 |      14 |       4 |       2 |     13 |     13 |      6 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        4 |       10 |       15 |       12 |       15 |      11 |        4 |       10 |       20 |       23 |       22 |       16 |      10 |        8 |       10 |       13 |       29 |       19 |       28 |      18 |        5 |       14 |       20 |       23 |       23 |       30 |      16 |        4 |        7 |        2 |        8 |        7 |        3 |       2 |       10 |        7 |        6 |        8 |        2 |        6 |       1 |        2 |        1 |        3 |        2 |        3 |        1 |       0 |        0 |        0 |        3 |        3 |        0 |        0 |       1 |      0 |      1 |     26 |     21 |     12 |      4 |      9 |    103 |      0 |      0 |      0 |     25 |     43 |     18 |     11 |     12 |    147 |      0 |      0 |      0 |      9 |      6 |      3 |      2 |      2 |     51 |      0 |      0 |      0 |      8 |      2 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1809300 |     106 |     35 |     46 |     3 |    0 |     0 |    0 |    2 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     51 |     55 |       2 |       6 |       0 |       1 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        4 |        0 |        2 |        1 |       2 |        0 |        4 |        4 |        4 |        3 |        1 |       6 |        1 |        7 |        6 |        3 |        4 |        2 |       2 |        1 |        4 |        3 |        1 |        5 |        2 |       5 |        0 |        3 |        3 |        4 |        0 |        0 |       0 |        0 |        5 |        2 |        0 |        0 |        1 |       2 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      8 |      3 |      0 |      0 |     21 |      0 |      0 |      0 |      8 |      8 |      3 |      0 |      1 |     26 |      0 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1810100 |     349 |    122 |    157 |     3 |    0 |     6 |    3 |    0 |     1 |    0 |     57 |    0 |    0 |    0 |    0 |    169 |    180 |       9 |      10 |       3 |       0 |      8 |      6 |      4 |      0 |      0 |      2 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      1 |      1 |      0 |      0 |        3 |        6 |        5 |       11 |       12 |        9 |       3 |        4 |        5 |       13 |       22 |        9 |       10 |      10 |        2 |        7 |       16 |       17 |       13 |       15 |      11 |        1 |       10 |       16 |        8 |       15 |       11 |      15 |        7 |        6 |        4 |        6 |        3 |        3 |       2 |        2 |        2 |        7 |        7 |        3 |        4 |       1 |        1 |        1 |        0 |        2 |        3 |        1 |       0 |        0 |        2 |        0 |        1 |        1 |        1 |       0 |      0 |      2 |     17 |     20 |      6 |      3 |      8 |     66 |      0 |      0 |      1 |      9 |     17 |     12 |      7 |     10 |    101 |      0 |      0 |      2 |      3 |      8 |      3 |      2 |      1 |     38 |      0 |      0 |      0 |      0 |      5 |      0 |      2 |      0 |      6 |      0 |     37 | s03      | R    |
| 1810300 |     534 |    190 |    237 |     8 |    0 |     3 |    1 |    3 |     5 |    0 |     87 |    0 |    0 |    0 |    0 |    250 |    284 |       6 |      11 |       6 |       0 |     12 |      8 |      6 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       5 |       3 |       2 |      2 |      4 |      0 |      0 |        3 |        5 |       12 |       16 |       18 |       16 |      10 |        8 |       16 |       12 |       22 |       23 |       13 |      16 |        4 |        9 |       24 |       20 |       25 |       22 |      12 |        6 |       11 |       28 |       20 |       21 |       22 |      13 |        5 |        8 |        7 |        9 |        5 |        6 |       2 |        9 |        8 |        8 |        6 |        6 |        3 |       5 |        5 |        2 |        4 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        3 |        3 |        0 |       0 |      0 |      0 |     12 |     35 |      2 |      9 |     10 |    122 |      0 |      0 |      0 |     25 |     41 |      8 |     12 |     15 |    136 |      0 |      0 |      0 |     11 |     11 |      1 |      1 |      3 |     60 |      0 |      0 |      2 |      3 |      4 |      0 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 1810400 |     808 |    315 |    315 |    22 |    0 |     6 |   10 |    2 |     4 |    0 |    134 |    0 |    0 |    0 |    0 |    374 |    434 |      28 |      22 |      11 |       5 |     24 |     13 |      5 |      3 |      2 |      0 |      0 |      0 |      2 |      6 |      1 |      1 |      0 |      1 |      1 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      7 |      5 |      3 |      0 |       14 |       30 |       27 |       24 |       14 |       20 |      26 |       15 |       38 |       24 |       26 |       19 |       19 |      19 |        9 |       31 |       30 |       23 |       13 |       19 |      14 |        6 |       32 |       45 |       25 |       22 |       23 |      23 |       10 |       21 |       17 |        8 |        4 |        3 |       0 |       11 |       24 |       13 |       11 |        9 |        3 |       0 |        4 |        5 |        3 |        2 |        3 |        0 |       0 |        3 |        6 |        6 |        7 |        3 |        2 |       0 |      0 |      3 |     26 |     20 |     12 |      9 |     10 |    235 |      0 |      0 |      2 |     31 |     30 |     15 |      7 |      9 |    221 |      0 |      0 |      0 |     17 |     13 |      1 |      1 |      1 |    101 |      0 |      0 |      2 |      3 |      6 |      0 |      0 |      0 |     33 |      0 |     37 | s03      | R    |
| 1810500 |      83 |     39 |     31 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     38 |     45 |       2 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        2 |        3 |        1 |        4 |       1 |        1 |        3 |        2 |        6 |        3 |        5 |       5 |        0 |        1 |        2 |        1 |        5 |        4 |       4 |        1 |        4 |        3 |        0 |        0 |        2 |       4 |        1 |        0 |        2 |        4 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      4 |      0 |     31 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      1 |     24 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1810600 |     173 |     60 |     80 |     7 |    0 |     2 |    1 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     71 |    102 |       6 |       5 |       0 |       2 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        4 |        1 |        4 |        6 |        4 |       5 |        2 |        3 |        8 |        5 |        9 |        4 |       5 |        6 |        0 |        9 |        6 |        2 |       10 |       2 |        6 |        4 |        5 |       10 |        8 |        7 |       5 |        1 |        0 |        4 |        2 |        0 |        0 |       0 |        4 |        2 |        4 |        2 |        2 |        1 |       1 |        0 |        1 |        3 |        0 |        0 |        1 |       0 |        0 |        1 |        3 |        0 |        0 |        1 |       0 |      0 |      0 |      9 |      9 |      1 |      0 |      5 |     36 |      0 |      0 |      0 |      7 |     11 |      4 |      6 |      4 |     48 |      0 |      0 |      0 |      6 |      2 |      1 |      0 |      0 |     14 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1811000 |     226 |     72 |    109 |     3 |    0 |     6 |    2 |    2 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |    107 |    119 |       4 |       5 |       0 |       0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      3 |      0 |      2 |      0 |        1 |        3 |        5 |        6 |        5 |        4 |       3 |        4 |        5 |       10 |        6 |        6 |        9 |       5 |        2 |        4 |       13 |        7 |        3 |       14 |      13 |        2 |        7 |        4 |        9 |        3 |       12 |      16 |        3 |        2 |        3 |        5 |        2 |        2 |       0 |        1 |        3 |        6 |        3 |        1 |        1 |       0 |        0 |        0 |        2 |        2 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        2 |        2 |       0 |      0 |      0 |      7 |     10 |      4 |      2 |      2 |     47 |      0 |      0 |      0 |      9 |     19 |      9 |      6 |      0 |     66 |      0 |      0 |      0 |      8 |      3 |      2 |      1 |      1 |     17 |      0 |      0 |      0 |      1 |      5 |      2 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 1812000 |     344 |    113 |    171 |     5 |    0 |     3 |    1 |    1 |     1 |    0 |     49 |    0 |    0 |    0 |    0 |    162 |    182 |       8 |       4 |       2 |       0 |     29 |     14 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        2 |        9 |        8 |       12 |       6 |        3 |        6 |        7 |       16 |       20 |       10 |       9 |        8 |        5 |        7 |       16 |       11 |       26 |      15 |        1 |        6 |       11 |       10 |       18 |       18 |      19 |        2 |        2 |        1 |        6 |        7 |        5 |       1 |        4 |        4 |        1 |        2 |        7 |        5 |       2 |        0 |        3 |        2 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |      0 |      0 |     11 |     11 |      5 |     10 |      7 |     69 |      0 |      0 |      0 |     12 |     18 |      9 |     11 |      7 |    114 |      0 |      0 |      0 |      5 |      8 |      4 |      0 |      1 |     31 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1812100 |     185 |     74 |     83 |     1 |    0 |     1 |    0 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |    103 |     82 |       3 |       2 |       1 |       0 |     10 |      8 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        8 |        8 |        7 |        5 |        3 |       3 |        4 |        3 |        4 |       10 |        6 |        6 |       7 |        2 |        1 |       12 |        9 |        9 |       16 |       4 |        1 |        4 |        5 |        2 |        1 |       12 |       5 |        1 |        3 |        1 |        4 |        4 |        1 |       0 |        3 |        1 |        1 |        3 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      9 |      4 |      5 |      2 |      4 |     49 |      0 |      0 |      0 |      8 |     13 |      4 |      5 |      5 |     48 |      0 |      0 |      0 |      3 |      6 |      0 |      2 |      0 |     14 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1812200 |     293 |     83 |    171 |     1 |    0 |     6 |    0 |    0 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |    138 |    155 |       4 |       4 |       0 |       1 |     24 |     12 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        2 |        7 |        7 |        5 |       15 |       0 |        0 |        4 |        3 |       12 |       12 |       13 |       2 |        0 |        1 |        5 |        7 |       24 |       43 |       4 |        1 |        3 |        8 |       16 |       23 |       33 |       3 |        2 |        2 |        2 |        6 |        1 |        2 |       0 |        0 |        1 |        3 |        5 |        3 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        1 |        0 |        1 |        2 |        1 |       0 |      0 |      0 |      9 |     10 |      4 |      2 |      3 |     55 |      0 |      0 |      0 |     10 |     26 |     10 |      8 |     10 |    107 |      0 |      0 |      0 |      6 |      4 |      1 |      1 |      0 |     20 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      2 |      0 |     37 | s03      | R    |
| 1812300 |      73 |     21 |     33 |     3 |    0 |     2 |    0 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     37 |     36 |       0 |       0 |       2 |       0 |      3 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        0 |        0 |        1 |        4 |       1 |        0 |        0 |        3 |        2 |        3 |        3 |       0 |        2 |        4 |        2 |        1 |        5 |        5 |       0 |        3 |        1 |        2 |        2 |        3 |        3 |       0 |        0 |        0 |        1 |        0 |        1 |        3 |       0 |        1 |        2 |        2 |        0 |        2 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      5 |      3 |      1 |      0 |     12 |      0 |      0 |      0 |      1 |      5 |      2 |      3 |      0 |     22 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      2 |      0 |     37 | s03      | R    |
| 1812400 |      78 |     23 |     41 |     2 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     43 |     35 |       1 |       3 |       0 |       0 |      0 |      2 |      2 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        2 |        1 |        2 |        2 |        3 |       0 |        1 |        1 |        2 |        2 |        4 |        2 |       0 |        1 |        3 |        3 |        2 |        4 |        9 |       0 |        0 |        3 |        2 |        4 |        4 |        6 |       0 |        0 |        0 |        0 |        5 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      2 |      2 |      0 |      0 |     16 |      0 |      0 |      0 |      6 |      2 |      3 |      3 |      1 |     26 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1813000 |     445 |    151 |    228 |     9 |    0 |     2 |    3 |    1 |     1 |    0 |     50 |    0 |    0 |    0 |    0 |    208 |    237 |       8 |      13 |       1 |       1 |     20 |     13 |      5 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |       1 |       5 |       0 |       0 |      0 |      1 |      1 |      0 |        6 |        3 |        7 |       14 |       11 |        9 |       9 |        2 |        8 |       15 |       16 |       18 |       17 |      16 |        2 |        8 |       11 |       22 |       22 |       35 |      24 |        7 |        3 |       13 |       15 |       21 |       27 |      18 |        1 |        4 |        4 |        5 |        4 |        0 |       2 |        4 |        6 |        0 |        5 |        7 |        3 |       5 |        0 |        1 |        1 |        0 |        1 |        2 |       0 |        3 |        5 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |     13 |     24 |     11 |      6 |     14 |     83 |      0 |      0 |      0 |     18 |     25 |     10 |     13 |      6 |    156 |      0 |      0 |      1 |      8 |      1 |      1 |      3 |      5 |     31 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1814000 |     458 |    164 |    210 |     4 |    0 |     2 |    2 |    3 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    220 |    238 |       8 |       6 |       2 |       0 |     41 |     34 |      8 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      3 |      3 |      0 |      0 |        4 |        3 |        6 |       18 |       13 |       11 |      12 |        5 |        6 |       13 |       26 |       17 |       16 |      14 |        7 |       11 |       10 |       15 |       20 |       32 |      18 |        1 |        1 |       12 |       20 |       21 |       26 |      16 |        4 |        1 |        7 |       11 |        3 |        6 |       2 |        3 |        2 |        6 |        8 |        8 |        7 |       3 |        3 |        2 |        1 |        0 |        0 |        0 |       0 |        3 |        1 |        0 |        0 |        2 |        0 |       1 |      0 |      0 |     12 |     23 |      6 |      9 |     15 |     99 |      0 |      0 |      0 |     14 |     32 |      8 |     13 |      8 |    135 |      0 |      0 |      0 |     12 |      2 |      3 |      5 |      5 |     44 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1816000 |     436 |    163 |    188 |     9 |    0 |     4 |    3 |    0 |     3 |    0 |     66 |    0 |    0 |    0 |    0 |    204 |    232 |       9 |       9 |       5 |       1 |     20 |      6 |      7 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |       17 |       12 |        6 |       12 |      11 |        3 |       20 |       19 |       13 |       14 |       16 |      16 |       10 |        2 |       16 |       18 |        7 |       22 |      17 |        7 |        7 |       14 |       10 |        8 |       29 |      21 |        6 |        9 |        8 |        7 |        1 |        7 |       1 |        8 |        2 |        6 |        6 |        2 |        3 |       0 |        2 |        1 |        2 |        2 |        4 |        0 |       0 |        1 |        1 |        1 |        1 |        3 |        1 |       0 |      0 |      0 |     18 |     18 |     14 |      6 |      7 |    100 |      0 |      0 |      0 |      7 |     18 |      5 |      7 |      8 |    143 |      0 |      0 |      0 |      6 |      3 |      4 |      0 |      0 |     53 |      0 |      0 |      0 |      2 |      1 |      4 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 1817000 |     374 |    142 |    169 |     1 |    0 |     2 |    2 |    0 |     1 |    0 |     57 |    0 |    0 |    0 |    0 |    171 |    203 |      13 |       5 |       2 |       0 |     19 |     10 |      6 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        1 |        6 |        8 |       10 |       10 |       13 |       8 |        1 |       11 |       14 |       14 |       10 |       19 |      17 |        3 |        8 |        9 |       14 |       12 |       22 |       9 |        4 |        5 |       11 |       14 |        9 |       22 |      27 |        5 |        6 |        4 |        5 |        6 |        7 |       1 |        1 |        0 |        2 |        5 |        9 |        5 |       1 |        2 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      2 |     16 |     16 |     14 |      4 |      6 |     84 |      0 |      0 |      1 |     15 |     13 |      4 |      6 |      4 |    126 |      0 |      0 |      0 |      7 |      5 |      1 |      5 |      1 |     38 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1817100 |     498 |    171 |    202 |    12 |    0 |     3 |    6 |    2 |     4 |    0 |     98 |    0 |    0 |    0 |    0 |    235 |    263 |      30 |      15 |      13 |       5 |     12 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      1 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      2 |      1 |      0 |        9 |       17 |        9 |       14 |        8 |       16 |       1 |        7 |       30 |       14 |       19 |       13 |       14 |       0 |        9 |       20 |       19 |       19 |        9 |       17 |       1 |       15 |       17 |       20 |       18 |       13 |       23 |       2 |        9 |       22 |        6 |        4 |        8 |        4 |       0 |       12 |       11 |        9 |        4 |        6 |        3 |       0 |        5 |        3 |        1 |        3 |        1 |        1 |       0 |        4 |        3 |        3 |        1 |        1 |        1 |       0 |      0 |      0 |     17 |     25 |      4 |      2 |      9 |    114 |      0 |      0 |      0 |     25 |     19 |     11 |     14 |      3 |    130 |      0 |      0 |      1 |     16 |      7 |      3 |      1 |      0 |     70 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 1818000 |     249 |     78 |    141 |     5 |    0 |     1 |    2 |    0 |     1 |    0 |     21 |    0 |    0 |    0 |    0 |    114 |    135 |       9 |       2 |       3 |       0 |      8 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      2 |      1 |        2 |        4 |        6 |        6 |        3 |        6 |       6 |        2 |        3 |        8 |        6 |        5 |        8 |      13 |        2 |        4 |       10 |        7 |        7 |       17 |      18 |        3 |        8 |        7 |        6 |       10 |       24 |      18 |        0 |        1 |        5 |        2 |        0 |        3 |       0 |        1 |        1 |        3 |        2 |        2 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        3 |       0 |        0 |        1 |        0 |        1 |        0 |        2 |       0 |      0 |      0 |      7 |      9 |      0 |      3 |      4 |     55 |      0 |      0 |      1 |     11 |     11 |      2 |      2 |      2 |    112 |      0 |      0 |      0 |      6 |      6 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1820000 |     470 |    148 |    250 |     8 |    0 |     7 |    2 |    0 |     5 |    0 |     50 |    0 |    0 |    0 |    0 |    233 |    237 |       4 |       2 |       5 |       1 |     15 |      5 |      1 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      5 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        6 |        8 |        8 |        7 |       10 |      15 |        4 |        7 |       14 |       17 |        9 |       26 |      13 |        4 |       13 |       23 |       25 |       16 |       28 |      31 |        3 |        8 |       14 |       12 |       10 |       31 |      32 |        5 |        2 |        4 |        3 |        4 |        3 |       1 |        4 |        3 |        5 |        4 |        6 |        3 |       3 |        1 |        2 |        4 |        3 |        0 |        3 |       0 |        0 |        3 |        1 |        0 |        2 |        3 |       0 |      0 |      0 |      9 |     16 |      9 |      8 |      9 |     97 |      0 |      0 |      0 |     20 |     37 |      8 |      5 |      6 |    174 |      0 |      0 |      0 |      9 |      5 |      2 |      0 |      2 |     32 |      0 |      0 |      0 |      6 |      7 |      0 |      1 |      1 |      7 |      0 |     37 | s03      | R    |
| 1820100 |     351 |    135 |    160 |     8 |    0 |     4 |    1 |    1 |     2 |    0 |     40 |    0 |    0 |    0 |    0 |    173 |    178 |       6 |       7 |       3 |       2 |     21 |      8 |      7 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        4 |        3 |       15 |        4 |       10 |       17 |       9 |        4 |        4 |       12 |       10 |       12 |       16 |      15 |        3 |        5 |       15 |       16 |       13 |       19 |      10 |        3 |        9 |       10 |       16 |       11 |       12 |      18 |        7 |        3 |        3 |        2 |        5 |        1 |       0 |        3 |        1 |        4 |        0 |        3 |        5 |       3 |        1 |        1 |        3 |        2 |        0 |        2 |       0 |        1 |        2 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     12 |     16 |      4 |      5 |      3 |     95 |      0 |      0 |      0 |     10 |     19 |      7 |      6 |     10 |    108 |      0 |      0 |      0 |      4 |      3 |      1 |      1 |      0 |     31 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1822000 |     293 |    126 |    112 |     8 |    0 |     2 |    0 |    2 |     2 |    0 |     41 |    0 |    0 |    0 |    0 |    136 |    157 |      15 |       7 |       5 |       1 |      9 |      8 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      1 |      0 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        4 |        5 |        8 |       12 |        3 |        7 |      10 |        4 |        8 |       13 |       14 |        5 |       13 |      20 |        3 |        8 |       13 |       10 |        4 |       11 |       7 |        2 |        2 |        8 |       15 |        6 |       11 |      12 |        2 |        6 |        2 |        7 |        0 |        4 |       2 |        1 |        6 |        3 |        6 |        0 |        1 |       1 |        1 |        2 |        1 |        3 |        0 |        1 |       0 |        0 |        1 |        2 |        1 |        2 |        0 |       0 |      0 |      0 |      8 |     18 |      4 |      4 |      4 |     88 |      0 |      0 |      0 |      9 |     22 |      6 |      6 |      3 |     66 |      0 |      0 |      0 |      2 |      7 |      2 |      1 |      2 |     27 |      0 |      0 |      1 |      1 |      3 |      1 |      1 |      1 |      6 |      0 |     37 | s03      | R    |
| 1823000 |     411 |    126 |    210 |     7 |    0 |     6 |    3 |    2 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    186 |    225 |      11 |       8 |       8 |       2 |      4 |      5 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        7 |        8 |        6 |        7 |        7 |      11 |        2 |        7 |        9 |       19 |        7 |       14 |      19 |        7 |       11 |       24 |       16 |        4 |       16 |      19 |       11 |       11 |       19 |       19 |        7 |       20 |      26 |        5 |        4 |        3 |        8 |        2 |        4 |       0 |        4 |        6 |        9 |        6 |        2 |        1 |       1 |        2 |        2 |        5 |        3 |        0 |        2 |       0 |        1 |        1 |        3 |        0 |        1 |        0 |       0 |      0 |      0 |     11 |     21 |      5 |      6 |      5 |     78 |      0 |      0 |      0 |     21 |     30 |      9 |      8 |      7 |    135 |      0 |      0 |      0 |      8 |      6 |      3 |      0 |      3 |     35 |      0 |      0 |      1 |      3 |      7 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1823100 |      97 |     24 |     45 |     5 |    0 |     0 |    3 |    0 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     48 |     49 |       3 |       1 |       2 |       1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        1 |        2 |        3 |        1 |        2 |       0 |        1 |        1 |        7 |        3 |        0 |        1 |       1 |        2 |        1 |        8 |        8 |        5 |        1 |       0 |        1 |        2 |        5 |        9 |        1 |        2 |       0 |        1 |        0 |        0 |        5 |        2 |        1 |       0 |        6 |        0 |        0 |        2 |        2 |        1 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      8 |      1 |      0 |      2 |      0 |     13 |      0 |      0 |      1 |      4 |      6 |      2 |      4 |      1 |     27 |      0 |      0 |      0 |      2 |      6 |      1 |      2 |      0 |      9 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1823200 |      81 |     32 |     31 |     3 |    0 |     1 |    0 |    0 |     1 |    0 |     13 |    0 |    0 |    0 |    0 |     41 |     40 |       3 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      1 |        0 |        1 |        4 |        3 |        0 |        1 |       0 |        1 |        2 |        8 |        6 |        4 |        2 |       0 |        1 |        2 |        4 |        8 |        2 |        3 |       0 |        0 |        1 |        2 |        2 |        5 |        1 |       0 |        3 |        1 |        1 |        2 |        3 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |     11 |      0 |      3 |      1 |     12 |      0 |      0 |      0 |      6 |      7 |      1 |      1 |      1 |     15 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 1823300 |     332 |    144 |    140 |     3 |    0 |     2 |    2 |    0 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |    161 |    171 |      12 |       6 |       3 |       0 |     18 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      3 |      1 |      1 |      0 |       0 |       6 |       0 |       0 |      0 |      1 |      0 |      0 |        9 |        7 |        4 |       15 |       12 |       13 |      12 |        4 |        4 |       10 |       12 |       14 |       11 |      17 |        2 |        9 |        8 |       15 |        9 |       16 |       7 |        3 |        7 |       14 |       14 |       14 |       12 |      10 |        5 |        3 |        8 |        3 |        2 |        0 |       0 |        6 |        3 |        4 |        5 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        2 |        2 |        0 |       0 |      0 |      0 |     12 |     16 |      6 |      4 |      5 |    101 |      0 |      0 |      0 |     15 |     27 |     13 |      1 |      7 |     77 |      0 |      0 |      1 |      6 |      8 |      3 |      0 |      0 |     23 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1824000 |     232 |     85 |     95 |     6 |    0 |     3 |    4 |    4 |     2 |    0 |     33 |    0 |    0 |    0 |    0 |    107 |    125 |       6 |       0 |       3 |       0 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |        8 |        3 |        5 |        5 |       6 |        7 |        6 |        8 |        6 |        6 |       10 |       9 |        1 |        4 |        8 |        3 |        8 |       17 |       7 |        2 |        3 |        8 |        4 |        7 |       15 |       8 |        2 |        5 |        2 |        3 |        1 |        2 |       0 |        8 |        2 |        3 |        0 |        2 |        2 |       1 |        4 |        3 |        1 |        2 |        1 |        0 |       0 |        0 |        2 |        0 |        4 |        1 |        1 |       0 |      0 |      0 |      8 |     10 |      3 |      3 |      2 |     59 |      0 |      0 |      1 |      9 |     13 |      5 |      4 |      2 |     61 |      0 |      0 |      1 |      3 |      1 |      3 |      1 |      0 |     24 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 1824100 |     128 |     53 |     48 |     4 |    0 |     2 |    1 |    0 |     1 |    0 |     19 |    0 |    0 |    0 |    0 |     60 |     68 |       8 |       1 |       3 |       1 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        2 |        3 |        4 |        1 |        4 |       2 |        0 |        5 |        8 |        9 |        3 |        4 |       7 |        1 |        4 |        4 |        7 |        4 |        7 |       2 |        0 |        0 |        5 |        3 |        3 |        4 |       4 |        2 |        1 |        3 |        2 |        0 |        2 |       0 |        2 |        2 |        1 |        0 |        1 |        1 |       2 |        0 |        1 |        1 |        0 |        1 |        1 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      1 |     11 |      4 |      1 |      2 |     33 |      0 |      0 |      1 |      2 |     11 |      4 |      2 |      2 |     26 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      0 |     12 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 1826000 |     379 |    142 |    174 |     5 |    0 |     6 |    4 |    0 |     4 |    0 |     44 |    0 |    0 |    0 |    0 |    164 |    215 |      10 |       4 |       7 |       3 |     10 |     18 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      1 |      2 |      0 |        2 |        6 |        6 |       11 |        4 |        6 |      13 |        3 |        9 |       15 |       23 |        6 |       19 |      19 |        2 |        7 |       15 |       10 |       14 |       27 |      10 |        6 |        7 |       14 |       11 |       10 |       19 |      22 |        5 |        4 |        3 |        6 |        0 |        2 |       0 |        7 |        5 |        4 |        7 |        0 |        1 |       0 |        0 |        4 |        1 |        2 |        2 |        2 |       0 |        1 |        3 |        2 |        1 |        0 |        1 |       0 |      0 |      0 |     16 |     18 |      6 |      5 |      2 |     95 |      0 |      0 |      0 |     19 |     15 |      5 |      9 |      9 |    117 |      0 |      0 |      0 |      4 |      3 |      2 |      2 |      3 |     30 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 1827000 |     275 |    117 |    116 |     4 |    0 |     4 |    2 |    0 |     2 |    0 |     30 |    0 |    0 |    0 |    0 |    131 |    144 |      21 |       9 |       3 |       0 |      6 |     13 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |       13 |       10 |        7 |        7 |       9 |        3 |        5 |        9 |       17 |        9 |        9 |      16 |        4 |        5 |        7 |        8 |        8 |       12 |      15 |        0 |        2 |       11 |       10 |        7 |        9 |      18 |        2 |        2 |        4 |        5 |        2 |        0 |       0 |        3 |        5 |        4 |        2 |        1 |        0 |       0 |        1 |        1 |        3 |        1 |        1 |        1 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |      0 |      1 |     11 |     18 |      9 |      2 |      4 |     72 |      0 |      0 |      0 |     12 |     15 |      4 |      1 |      4 |     80 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1831000 |     615 |    246 |    255 |    12 |    0 |     6 |    5 |    1 |     4 |    0 |     86 |    0 |    0 |    0 |    0 |    269 |    346 |      25 |       8 |       6 |       1 |     10 |     16 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        4 |        6 |       15 |       18 |        9 |       17 |      29 |        7 |       10 |       18 |       32 |       18 |       33 |      30 |        3 |       16 |       23 |       25 |       12 |       18 |      18 |        5 |       10 |       33 |       19 |       11 |       27 |      35 |       10 |        7 |        9 |        8 |        4 |        7 |       0 |        8 |        7 |       11 |        5 |        3 |        7 |       0 |        0 |        2 |        2 |        5 |        1 |        1 |       0 |        3 |        7 |        3 |        2 |        2 |        0 |       0 |      0 |      1 |     21 |     24 |     12 |      5 |      3 |    180 |      0 |      0 |      0 |     20 |     27 |     13 |     10 |     13 |    172 |      0 |      0 |      2 |     19 |     11 |      2 |      3 |      1 |     48 |      0 |      0 |      0 |      2 |      6 |      2 |      0 |      1 |     17 |      0 |     37 | s03      | R    |
| 1833000 |     376 |    115 |    209 |     3 |    0 |     3 |    1 |    1 |     5 |    0 |     39 |    0 |    0 |    0 |    0 |    173 |    203 |       2 |       0 |       0 |       0 |     25 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        6 |        7 |       13 |        5 |       10 |      11 |        1 |        3 |       11 |       10 |        7 |       13 |      18 |        2 |        2 |       13 |       20 |        6 |       26 |      24 |        6 |        3 |       15 |       17 |       19 |       35 |      21 |        3 |        1 |        4 |        5 |        3 |        2 |       2 |        2 |        4 |        4 |        2 |        1 |        4 |       2 |        3 |        2 |        0 |        1 |        1 |        1 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     11 |     16 |      2 |      3 |      3 |     80 |      0 |      0 |      1 |     16 |     34 |      7 |      9 |      8 |    134 |      0 |      0 |      0 |      4 |      7 |      0 |      3 |      2 |     23 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1837000 |     280 |    117 |    114 |     1 |    0 |     4 |    2 |    1 |     2 |    0 |     39 |    0 |    0 |    0 |    0 |    132 |    148 |       6 |       3 |       1 |       0 |      8 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        5 |        7 |        7 |        3 |       15 |      12 |        1 |        5 |       15 |       13 |        4 |       15 |      13 |        3 |        5 |       16 |       10 |        5 |        6 |      13 |        1 |        8 |       13 |       14 |        3 |        9 |       8 |        3 |        3 |        5 |        3 |        0 |        4 |       0 |        4 |        4 |        2 |        2 |        3 |        4 |       2 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |        3 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      7 |     16 |      4 |      2 |      3 |     85 |      0 |      0 |      1 |     12 |     22 |      2 |      3 |      2 |     72 |      0 |      0 |      0 |      5 |      6 |      4 |      1 |      1 |     22 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 1839000 |     319 |    141 |    119 |     5 |    0 |     5 |    0 |    2 |     4 |    0 |     43 |    0 |    0 |    0 |    0 |    145 |    174 |      11 |       7 |       3 |       1 |      4 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      3 |      0 |      0 |      0 |        5 |        6 |        8 |       14 |        7 |        5 |      11 |        9 |       11 |       15 |       17 |        9 |        7 |      17 |        1 |        3 |       14 |       13 |        4 |        6 |      15 |        1 |        2 |       15 |        9 |        7 |       11 |      18 |        5 |        7 |        6 |        3 |        2 |        2 |       1 |        6 |        4 |        6 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        3 |        2 |        1 |       0 |        0 |        1 |        5 |        1 |        1 |        1 |       0 |      0 |      1 |     10 |     17 |      5 |      5 |      6 |     97 |      0 |      0 |      0 |     10 |     25 |      4 |      3 |      5 |     72 |      0 |      0 |      0 |      5 |      4 |      3 |      1 |      0 |     30 |      0 |      0 |      1 |      1 |      5 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1841000 |     306 |    124 |    134 |     9 |    0 |     0 |    0 |    0 |     0 |    0 |     39 |    0 |    0 |    0 |    0 |    119 |    187 |       6 |       1 |       0 |       0 |      8 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        5 |       39 |       1 |        0 |        0 |        0 |        5 |       14 |       53 |       5 |        0 |        2 |        1 |        2 |        7 |       34 |       3 |        0 |        1 |        0 |        0 |        8 |       70 |       6 |        0 |        1 |        0 |        2 |        4 |       12 |       0 |        0 |        0 |        0 |        1 |        7 |       11 |       1 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        1 |        1 |        3 |       0 |      0 |      1 |     17 |     17 |     11 |      4 |      5 |     69 |      0 |      0 |      1 |     10 |     22 |      2 |      8 |      7 |     84 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      1 |     30 |      0 |      0 |      0 |      2 |      4 |      1 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 1842000 |     347 |    120 |    165 |     3 |    0 |     1 |    4 |    0 |     2 |    0 |     52 |    0 |    0 |    0 |    0 |    161 |    186 |      10 |       7 |       1 |       0 |      8 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      0 |      0 |      2 |      0 |        5 |        2 |        9 |        9 |        4 |       12 |      10 |        4 |        5 |       10 |        9 |        9 |       15 |      17 |        4 |        4 |       17 |        8 |        7 |       19 |      13 |        3 |        6 |       15 |       15 |       10 |       31 |      13 |        5 |        7 |        8 |        5 |        3 |        3 |       0 |        1 |        5 |        6 |        3 |        3 |        1 |       2 |        1 |        2 |        2 |        0 |        1 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |     11 |     15 |      4 |      2 |      1 |     87 |      0 |      0 |      1 |     16 |     22 |      6 |      8 |      8 |    104 |      0 |      0 |      1 |      5 |     12 |      3 |      1 |      1 |     29 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1842100 |     177 |     72 |     70 |     5 |    0 |     1 |    1 |    2 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     75 |    102 |       8 |       1 |       0 |       0 |      6 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        1 |        0 |        1 |        2 |        2 |       22 |       0 |        2 |        1 |        3 |        4 |       13 |       20 |       1 |        0 |        2 |        1 |        3 |       10 |       15 |       0 |        2 |        1 |        0 |        3 |        5 |       27 |       1 |        0 |        5 |        0 |        1 |        3 |        4 |       0 |        0 |        1 |        0 |        2 |        6 |        4 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        5 |       0 |      0 |      0 |      9 |     11 |      1 |      2 |      5 |     44 |      0 |      0 |      0 |     13 |     12 |      5 |      1 |      4 |     35 |      0 |      0 |      0 |      7 |      3 |      0 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1844000 |     530 |    190 |    217 |     9 |    0 |     6 |    6 |    2 |     6 |    0 |     94 |    0 |    0 |    0 |    0 |    239 |    291 |      20 |       8 |      10 |       0 |     11 |      9 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      7 |      1 |      1 |      1 |        2 |       16 |       23 |       15 |        8 |        6 |      15 |        5 |       15 |       28 |       25 |        9 |       15 |       8 |        4 |       18 |       23 |       15 |        6 |        9 |      17 |       11 |       22 |       11 |       19 |       13 |       25 |      24 |        8 |       12 |       14 |        5 |        2 |        2 |       3 |        5 |       16 |       12 |        3 |        7 |        4 |       1 |        1 |        3 |        7 |        4 |        0 |        0 |       1 |        3 |        2 |        2 |        3 |        1 |        2 |       0 |      0 |      1 |     18 |     18 |     13 |      3 |      3 |    134 |      0 |      0 |      1 |     16 |     20 |     11 |      4 |      6 |    159 |      0 |      0 |      2 |     15 |      9 |      4 |      1 |      0 |     63 |      0 |      0 |      1 |      4 |      4 |      5 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 1844100 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1845000 |     297 |    107 |    148 |     7 |    0 |     0 |    0 |    0 |     1 |    0 |     34 |    0 |    0 |    0 |    0 |    133 |    164 |      12 |      12 |       3 |       1 |      6 |      8 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        3 |        3 |        6 |        7 |        5 |       12 |       6 |        1 |        7 |       15 |       11 |        2 |       18 |      11 |        6 |        5 |       14 |       17 |        5 |       18 |       8 |        2 |        9 |       20 |       10 |        9 |        9 |      16 |        3 |        3 |        6 |        2 |        2 |        0 |       0 |        1 |        2 |        3 |        7 |        1 |        2 |       2 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        2 |        0 |        0 |        1 |        1 |        2 |       0 |      0 |      1 |     12 |     21 |      5 |      1 |      2 |     65 |      0 |      0 |      0 |     17 |     18 |      7 |      2 |      1 |    103 |      0 |      0 |      0 |      9 |      7 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 1845100 |     201 |     76 |     71 |     1 |    0 |     4 |    3 |    1 |     3 |    0 |     42 |    0 |    0 |    0 |    0 |     79 |    122 |      13 |       3 |       5 |       2 |      4 |      2 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      6 |      4 |      1 |      0 |        2 |        1 |        8 |        1 |        3 |        6 |       3 |        3 |       13 |       11 |        8 |        9 |        5 |       3 |        2 |        5 |        6 |        6 |        3 |        5 |       3 |        8 |        9 |       10 |        5 |        5 |        2 |       2 |        1 |        6 |        5 |        3 |        5 |        1 |       0 |        2 |       13 |        2 |        3 |        0 |        1 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |        4 |        4 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     13 |     13 |      0 |      0 |      0 |     50 |      0 |      0 |      0 |      4 |      8 |      2 |      1 |      0 |     56 |      0 |      0 |      1 |      7 |      6 |      3 |      1 |      0 |     24 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 1846000 |     517 |    209 |    198 |    14 |    0 |     4 |    1 |    2 |     3 |    0 |     86 |    0 |    0 |    0 |    0 |    243 |    274 |      14 |      11 |       3 |       1 |     11 |      6 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      1 |      0 |        5 |        7 |       15 |       19 |       11 |       14 |      18 |        5 |       14 |       25 |       19 |       15 |       19 |      23 |        9 |       13 |       21 |       19 |        8 |       11 |      15 |        5 |        7 |       17 |       13 |        9 |       27 |      24 |        5 |        9 |        8 |       10 |        9 |        1 |       2 |        6 |        9 |       12 |        8 |        3 |        2 |       2 |        1 |        5 |        3 |        3 |        1 |        1 |       0 |        1 |        4 |        3 |        1 |        0 |        1 |       0 |      0 |      0 |     16 |     24 |      7 |      5 |      9 |    148 |      0 |      0 |      2 |     23 |     26 |      4 |      4 |      6 |    133 |      0 |      0 |      1 |     10 |     14 |      7 |      3 |      3 |     48 |      0 |      0 |      0 |      8 |      6 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1847000 |      84 |     24 |     39 |     5 |    0 |     1 |    0 |    0 |     1 |    0 |     14 |    0 |    0 |    0 |    0 |     35 |     49 |       6 |       2 |       1 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        0 |        1 |        2 |        4 |        0 |        1 |       2 |        0 |        3 |        1 |        1 |        1 |        3 |       5 |        1 |        1 |        0 |        6 |        3 |        3 |       3 |        1 |        4 |        2 |        5 |        2 |        4 |       4 |        1 |        0 |        2 |        2 |        0 |        0 |       1 |        2 |        1 |        0 |        2 |        1 |        2 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      3 |      0 |      0 |     18 |      0 |      0 |      0 |      2 |      6 |      1 |      1 |      2 |     27 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |     12 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1848000 |     358 |    150 |    140 |     2 |    0 |     3 |    2 |    0 |     2 |    0 |     59 |    0 |    0 |    0 |    0 |    173 |    185 |      16 |       6 |       4 |       0 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        1 |        5 |       12 |        9 |        7 |       11 |      20 |        1 |       11 |       12 |       16 |        6 |       22 |      17 |        6 |        5 |       21 |       31 |        3 |        4 |       4 |        3 |        2 |       15 |       16 |        6 |       16 |       8 |        4 |        7 |        6 |        6 |        3 |        3 |       1 |        8 |        5 |        9 |        5 |        1 |        0 |       1 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        1 |       0 |      0 |      1 |      8 |     15 |      8 |      3 |      4 |    111 |      0 |      0 |      1 |     11 |     23 |      7 |      9 |      7 |     82 |      0 |      0 |      0 |     10 |      5 |      1 |      6 |      2 |     35 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 1848200 |     264 |     99 |    109 |     5 |    0 |     4 |    0 |    0 |     2 |    0 |     45 |    0 |    0 |    0 |    0 |    119 |    145 |      10 |       5 |       4 |       1 |      9 |      9 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      0 |      0 |      0 |        0 |        3 |        6 |        9 |        6 |        8 |       8 |        2 |       11 |       11 |        8 |        7 |       10 |      10 |        0 |        9 |        7 |       11 |        6 |        9 |       7 |        2 |        8 |       13 |       10 |        7 |       11 |       9 |        2 |        5 |        4 |        8 |        1 |        2 |       1 |        5 |        7 |        6 |        2 |        0 |        2 |       0 |        0 |        4 |        1 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      9 |     15 |      4 |      2 |      4 |     65 |      0 |      0 |      0 |     16 |     18 |      3 |      2 |      3 |     67 |      0 |      0 |      0 |      6 |      2 |      0 |      1 |      3 |     33 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 1853000 |     239 |     93 |     83 |     4 |    0 |     2 |    2 |    0 |     4 |    0 |     51 |    0 |    0 |    0 |    0 |     98 |    141 |      12 |      11 |       8 |       1 |      6 |      3 |      4 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |        2 |        7 |        5 |        3 |        3 |        5 |       2 |       10 |       23 |       10 |        6 |        7 |        9 |       1 |        5 |        9 |        8 |        7 |        8 |        5 |       3 |        5 |        8 |        5 |        6 |        6 |        5 |       3 |        3 |        8 |        3 |        4 |        1 |        2 |       0 |        5 |       11 |        6 |        2 |        5 |        1 |       0 |        1 |        4 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |      8 |     10 |      2 |      2 |      3 |     68 |      0 |      0 |      0 |      3 |      6 |      3 |      2 |      3 |     66 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      0 |     45 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1853200 |     341 |    121 |    111 |    11 |    0 |     1 |    3 |    0 |     4 |    0 |     90 |    0 |    0 |    0 |    0 |    157 |    184 |      30 |       8 |      13 |       1 |      3 |      2 |      2 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      3 |      0 |      1 |      0 |       0 |       0 |       2 |       0 |      2 |      3 |      2 |      2 |        9 |       12 |       14 |        8 |        3 |        8 |       0 |       20 |       16 |       11 |       10 |        4 |        5 |       1 |        8 |       25 |       14 |       10 |        2 |        3 |       0 |       11 |       20 |        9 |        4 |        0 |        5 |       0 |        6 |       16 |        7 |        2 |        2 |        0 |       0 |       18 |       21 |       12 |        0 |        4 |        2 |       0 |        1 |        4 |        1 |        1 |        1 |        0 |       0 |        7 |        1 |        1 |        2 |        0 |        0 |       0 |      0 |      3 |     12 |     12 |      3 |      2 |      1 |     88 |      0 |      0 |      0 |      4 |      5 |      3 |      2 |      3 |     94 |      0 |      0 |      2 |      9 |      3 |      1 |      0 |      0 |     75 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 1853300 |     578 |    244 |    184 |    17 |    0 |    10 |    4 |    1 |     4 |    0 |    114 |    0 |    0 |    0 |    0 |    248 |    330 |      31 |       9 |       3 |       1 |     18 |     14 |      6 |      2 |      1 |      0 |      1 |      0 |      3 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      2 |      2 |      1 |        4 |       28 |       16 |        8 |        5 |       25 |       4 |        4 |       42 |       18 |       20 |       15 |       51 |       4 |        2 |       18 |       28 |       10 |        7 |       24 |       1 |        4 |       20 |       10 |        9 |       12 |       37 |       2 |        7 |       13 |        8 |       11 |        5 |        7 |       1 |        8 |       20 |        8 |        4 |        4 |       17 |       1 |        2 |        3 |        4 |        3 |        2 |        2 |       0 |        3 |        7 |        3 |        2 |        2 |        3 |       0 |      0 |      2 |     31 |     29 |     10 |      8 |      5 |    159 |      0 |      0 |      2 |     27 |     20 |      4 |      8 |      4 |    119 |      0 |      0 |      0 |      9 |     10 |      3 |      2 |      2 |     88 |      0 |      0 |      0 |      7 |      8 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 1853400 |     526 |    174 |    195 |    18 |    0 |     4 |    2 |    3 |     6 |    0 |    124 |    0 |    0 |    0 |    0 |    271 |    255 |      33 |      15 |       8 |       3 |      7 |      4 |      6 |      2 |      0 |      2 |      1 |      0 |      2 |      2 |      4 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      1 |      1 |      4 |      0 |        6 |       24 |       12 |       22 |        5 |        7 |       0 |        9 |       39 |       21 |       14 |        8 |        7 |       0 |       10 |       41 |       28 |       17 |        8 |        8 |       0 |       15 |       26 |       13 |       11 |        6 |       11 |       1 |        5 |       32 |       14 |        7 |        4 |        0 |       0 |       14 |       29 |        5 |        9 |        4 |        1 |       0 |        1 |        8 |        3 |        5 |        1 |        3 |       0 |        2 |        4 |        2 |        2 |        1 |        1 |       0 |      0 |      1 |     17 |     18 |      5 |      6 |      2 |    125 |      0 |      0 |      0 |     16 |     18 |      8 |      3 |      5 |    145 |      0 |      0 |      0 |     13 |      2 |      2 |      1 |      0 |    106 |      0 |      0 |      2 |      3 |      0 |      1 |      1 |      0 |     26 |      0 |     37 | s03      | R    |
| 1853500 |     541 |    195 |    211 |    13 |    0 |     4 |    7 |    2 |     1 |    0 |    108 |    0 |    0 |    0 |    0 |    257 |    284 |      29 |      14 |      12 |       4 |      8 |      9 |      8 |      2 |      0 |      0 |      0 |      0 |      5 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      4 |      2 |      1 |      0 |        6 |       14 |       12 |       21 |       15 |       12 |       0 |        9 |       21 |       19 |       21 |       21 |       22 |       2 |        6 |       20 |       30 |       24 |       19 |       14 |       1 |        7 |       18 |       14 |       16 |       19 |       21 |       2 |        4 |       24 |       10 |        4 |        4 |        4 |       0 |       11 |       22 |        6 |       10 |        6 |        3 |       0 |        1 |        7 |        2 |        3 |        0 |        0 |       0 |        2 |        5 |        2 |        2 |        1 |        2 |       0 |      0 |      2 |     29 |     17 |     13 |      6 |      5 |    123 |      0 |      0 |      0 |     21 |     28 |     12 |      7 |     10 |    133 |      0 |      0 |      1 |     14 |      7 |      2 |      0 |      0 |     84 |      0 |      0 |      0 |      5 |      5 |      0 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 1853600 |      19 |      7 |      7 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      4 |    0 |    0 |    0 |    0 |     14 |      5 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1853700 |     303 |    141 |     91 |     7 |    0 |     2 |    4 |    0 |     0 |    0 |     58 |    0 |    0 |    0 |    0 |    120 |    183 |      22 |       3 |       6 |       0 |     17 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      3 |      0 |      2 |      0 |        2 |       11 |        8 |        9 |        6 |       11 |       1 |        5 |       17 |       18 |       13 |       15 |       25 |       0 |        5 |       11 |       11 |        5 |        6 |        2 |       0 |        2 |       14 |        9 |        5 |        7 |       13 |       1 |        4 |       11 |        3 |        3 |        1 |        2 |       0 |        2 |       10 |        5 |        8 |        5 |        4 |       0 |        0 |        0 |        3 |        1 |        2 |        2 |       0 |        0 |        2 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |     23 |     22 |      3 |      6 |      3 |     84 |      0 |      0 |      0 |      7 |     10 |      6 |      2 |      1 |     65 |      0 |      0 |      0 |      9 |      5 |      2 |      1 |      0 |     41 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 1853800 |       1 |      0 |      0 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 1901400 |     357 |     90 |    147 |    16 |    0 |     1 |    5 |    0 |     1 |    0 |     97 |    0 |    0 |    0 |    0 |    150 |    207 |      11 |       6 |       9 |       0 |      4 |      6 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |      1 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      1 |      1 |      0 |        3 |       15 |        8 |        2 |        2 |        0 |       0 |        9 |       31 |       12 |        4 |        4 |        0 |       0 |        9 |       40 |       16 |        1 |        3 |        2 |       0 |       21 |       29 |       15 |        4 |        1 |        6 |       0 |        9 |       19 |        4 |        3 |        0 |        0 |       0 |       26 |       26 |        5 |        4 |        1 |        0 |       0 |        2 |       10 |        1 |        1 |        0 |        0 |       0 |        3 |        4 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |     82 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |    142 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     97 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 1902000 |     402 |    159 |    167 |     8 |    0 |     4 |    4 |    0 |     4 |    0 |     56 |    0 |    0 |    0 |    0 |    192 |    210 |      12 |       9 |       1 |       0 |     14 |      9 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      1 |      0 |      2 |      2 |      1 |      0 |       3 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        4 |        8 |       15 |       12 |        4 |        3 |      17 |        8 |       16 |       20 |       15 |        7 |       16 |      14 |        2 |       16 |       16 |       13 |        7 |       17 |      13 |        5 |        9 |       16 |       14 |        7 |       17 |      15 |        4 |        6 |       10 |        7 |        3 |        3 |       2 |        1 |        4 |        7 |        2 |        1 |        4 |       2 |        1 |        2 |        4 |        2 |        1 |        0 |       0 |        0 |        3 |        2 |        1 |        0 |        4 |       0 |      0 |      0 |     18 |     16 |      3 |      4 |      1 |    117 |      0 |      0 |      0 |     18 |     30 |      7 |      5 |      6 |    101 |      0 |      0 |      1 |      3 |      5 |      2 |      3 |      2 |     40 |      0 |      0 |      0 |      6 |      3 |      0 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 1903000 |     850 |    244 |    346 |    24 |    0 |     5 |    5 |    1 |     7 |    0 |    218 |    0 |    0 |    0 |    0 |    407 |    443 |      26 |      16 |      16 |       1 |     17 |     27 |     15 |      1 |      1 |      0 |      1 |      0 |      3 |      1 |      0 |      0 |      5 |      5 |      4 |      1 |      2 |      0 |      2 |      1 |       3 |       4 |       4 |       0 |      2 |      8 |      1 |      1 |        8 |       28 |       26 |       17 |        7 |        5 |       0 |        8 |       47 |       35 |       37 |       22 |        3 |       1 |       12 |       56 |       49 |       27 |       26 |        9 |       1 |        9 |       48 |       43 |       39 |       20 |        7 |       0 |       16 |       44 |       25 |       11 |       14 |        3 |       1 |       12 |       46 |       20 |       13 |        8 |        5 |       0 |        3 |       12 |        1 |        3 |        1 |        2 |       0 |        3 |        5 |        4 |        4 |        2 |        2 |       0 |      0 |      5 |     46 |      1 |      0 |      0 |      0 |    192 |      0 |      0 |      3 |     67 |      1 |      2 |      0 |      0 |    273 |      0 |      0 |      3 |     35 |      3 |      0 |      0 |      0 |    177 |      0 |      0 |      1 |     10 |      1 |      0 |      0 |      0 |     30 |      0 |     37 | s03      | R    |
| 1903100 |     371 |    109 |    146 |    11 |    0 |     4 |    1 |    0 |     3 |    0 |     97 |    0 |    0 |    0 |    0 |    163 |    208 |      11 |       9 |       4 |       4 |     11 |     10 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       1 |       1 |      0 |      0 |      2 |      0 |        3 |       14 |       10 |        8 |        4 |        1 |       0 |        6 |       23 |       11 |       17 |        9 |        3 |       0 |        9 |       22 |       17 |        8 |       13 |        4 |       0 |        7 |       28 |       15 |       10 |        9 |        4 |       0 |        5 |       13 |       11 |        7 |        4 |        0 |       0 |        7 |       25 |        7 |        9 |        6 |        3 |       0 |        1 |        6 |        1 |        1 |        1 |        0 |       0 |        2 |        0 |        3 |        3 |        0 |        1 |       0 |      0 |      0 |     19 |      0 |      0 |      1 |      0 |     89 |      0 |      0 |      2 |     31 |      1 |      0 |      0 |      0 |    112 |      0 |      0 |      0 |     22 |      0 |      0 |      1 |      0 |     74 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1904000 |     546 |    217 |    200 |    15 |    0 |     6 |    2 |    3 |     4 |    0 |     99 |    0 |    0 |    0 |    0 |    253 |    293 |      32 |       8 |      14 |       1 |      4 |      5 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |      3 |      0 |      0 |       2 |       3 |       2 |       2 |      0 |      1 |      0 |      0 |        5 |        6 |       11 |       24 |       13 |       12 |      15 |        7 |       13 |       25 |       30 |       18 |       19 |      19 |        5 |       12 |       24 |       20 |        7 |       16 |      15 |        8 |       11 |       18 |       16 |        9 |       21 |      18 |        7 |       15 |       12 |       13 |        3 |        6 |       1 |       11 |       10 |        5 |        6 |        6 |        3 |       1 |        1 |        1 |        2 |        2 |        2 |        3 |       0 |        3 |        4 |        5 |        4 |        1 |        1 |       1 |      0 |      2 |     22 |     30 |     10 |      9 |     10 |    134 |      0 |      0 |      2 |     12 |     29 |     10 |      6 |      4 |    137 |      0 |      0 |      0 |     20 |      9 |      2 |      3 |      5 |     60 |      0 |      0 |      0 |      6 |      6 |      4 |      2 |      0 |     12 |      0 |     37 | s03      | R    |
| 1905000 |     461 |    185 |    142 |    19 |    0 |     7 |    5 |    3 |     4 |    0 |     96 |    0 |    0 |    0 |    0 |    216 |    245 |      19 |      16 |       7 |       3 |     10 |      7 |      3 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      0 |      2 |      0 |       4 |       4 |       3 |       0 |      1 |      1 |      0 |      0 |        3 |       11 |       11 |       20 |        9 |       12 |      13 |        6 |       11 |       16 |       18 |       14 |       21 |      20 |        3 |       10 |       23 |       14 |        7 |        8 |       7 |        6 |        8 |       16 |        9 |       10 |       10 |      11 |        5 |        7 |       10 |        9 |        7 |        5 |       2 |        6 |       13 |       10 |       12 |        7 |        2 |       1 |        0 |        5 |        4 |        7 |        2 |        2 |       0 |        0 |        4 |        2 |        7 |        2 |        3 |       0 |      0 |      0 |     19 |     20 |      4 |      9 |      3 |    130 |      0 |      0 |      1 |     15 |     18 |      7 |      3 |      8 |     90 |      0 |      0 |      0 |     15 |      9 |      2 |      1 |      6 |     63 |      0 |      0 |      0 |      7 |      9 |      4 |      2 |      1 |     15 |      0 |     37 | s03      | R    |
| 1905100 |     393 |    142 |    124 |    12 |    0 |     6 |    3 |    0 |     2 |    0 |    104 |    0 |    0 |    0 |    0 |    170 |    223 |      19 |      11 |      14 |       3 |      5 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      1 |      3 |      0 |      1 |      3 |      0 |      0 |       1 |       0 |       0 |       1 |      2 |      0 |      2 |      0 |        5 |       11 |       11 |       17 |        6 |        1 |       0 |       12 |       12 |       18 |       22 |       19 |        8 |       0 |        9 |       12 |       13 |       16 |        3 |        6 |       0 |        9 |       21 |        8 |       12 |        9 |        6 |       0 |        7 |       18 |        5 |        8 |        6 |        4 |       0 |       13 |       19 |       10 |        6 |        5 |        3 |       0 |        3 |        3 |        2 |        1 |        1 |        2 |       0 |        2 |        3 |        2 |        1 |        2 |        1 |       0 |      0 |      1 |     11 |     21 |      4 |      9 |      6 |     90 |      0 |      0 |      1 |     15 |     20 |      2 |      3 |      5 |     78 |      0 |      0 |      0 |     17 |      8 |      0 |      4 |      2 |     73 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 1905300 |     302 |     95 |     89 |    10 |    0 |     5 |    2 |    0 |     5 |    0 |     96 |    0 |    0 |    0 |    0 |    141 |    161 |      15 |       8 |      17 |       2 |      6 |      2 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       3 |       0 |      4 |      0 |      1 |      1 |        0 |       12 |       10 |        9 |        5 |        3 |       0 |        9 |       13 |       13 |       11 |        4 |        6 |       0 |        5 |       16 |       12 |       10 |        3 |        2 |       0 |        7 |        9 |        9 |       10 |        3 |        3 |       0 |       10 |       14 |       11 |        7 |        1 |        1 |       0 |       14 |       18 |        8 |        5 |        4 |        3 |       0 |        2 |        4 |        1 |        1 |        1 |        1 |       0 |        2 |        1 |        2 |        5 |        1 |        1 |       0 |      0 |      1 |     12 |      8 |      1 |      2 |      1 |     70 |      0 |      0 |      2 |      4 |      7 |      1 |      4 |      1 |     70 |      0 |      0 |      0 |     10 |      5 |      0 |      0 |      1 |     80 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 1906000 |     286 |    110 |     84 |     3 |    0 |     4 |    2 |    2 |     2 |    0 |     79 |    0 |    0 |    0 |    0 |    116 |    170 |      14 |       6 |      12 |       0 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       2 |       1 |       0 |      4 |      5 |      4 |      0 |        6 |       12 |        3 |        4 |        6 |        4 |       1 |       13 |       11 |       14 |       13 |       12 |        8 |       3 |        7 |        6 |        8 |       10 |        5 |        2 |       2 |        9 |        8 |       10 |        6 |        4 |        4 |       3 |        5 |       10 |        8 |        8 |        2 |        0 |       0 |       10 |       12 |       12 |        6 |        1 |        5 |       0 |        2 |        0 |        4 |        0 |        0 |        1 |       0 |        0 |        4 |        0 |        2 |        0 |        0 |       0 |      0 |      2 |     12 |     12 |      4 |      3 |      4 |     73 |      0 |      0 |      0 |      7 |      8 |      2 |      2 |      1 |     64 |      0 |      0 |      0 |      9 |      8 |      1 |      1 |      3 |     57 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 1908000 |     636 |    230 |    235 |    14 |    0 |     7 |    7 |    2 |     9 |    0 |    132 |    0 |    0 |    0 |    0 |    294 |    342 |      30 |       9 |      10 |       4 |     10 |     10 |      5 |      6 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |       3 |       6 |       3 |       1 |      1 |      2 |      7 |      0 |        4 |        8 |       15 |       11 |       15 |       23 |      12 |        8 |       21 |       28 |       16 |       18 |       27 |      24 |        4 |       18 |       30 |       16 |       15 |       23 |      10 |        9 |        8 |       26 |       14 |       15 |       32 |      15 |        6 |       10 |       18 |       19 |        6 |        7 |       2 |       13 |       10 |       16 |       14 |        4 |        6 |       1 |        2 |        5 |        5 |        6 |        2 |        2 |       0 |        3 |        5 |        2 |        3 |        2 |        2 |       0 |      0 |      1 |     16 |     27 |     14 |      4 |      9 |    159 |      0 |      0 |      0 |     19 |     24 |     13 |      7 |      4 |    168 |      0 |      0 |      0 |     21 |     10 |      8 |      3 |      6 |     84 |      0 |      0 |      0 |      3 |     12 |      0 |      2 |      1 |     21 |      0 |     37 | s03      | R    |
| 1911000 |     399 |    175 |    144 |     5 |    0 |     3 |    2 |    2 |     4 |    0 |     64 |    0 |    0 |    0 |    0 |    176 |    223 |      27 |       9 |       6 |       1 |     10 |      8 |      4 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       0 |      2 |      0 |      2 |      0 |        1 |        5 |       20 |       12 |        6 |       12 |      14 |        6 |        9 |       20 |       17 |       16 |       15 |      22 |        5 |        6 |       10 |       14 |        6 |       12 |      10 |        2 |        7 |       21 |       10 |       15 |       19 |       7 |        5 |        8 |        4 |       11 |        3 |        3 |       0 |        3 |        5 |       10 |        4 |        3 |        5 |       0 |        0 |        3 |        2 |        2 |        1 |        1 |       0 |        0 |        1 |        2 |        1 |        2 |        1 |       0 |      0 |      3 |     14 |     24 |      7 |      5 |      5 |    117 |      0 |      0 |      3 |      8 |     31 |      3 |      5 |      4 |     90 |      0 |      0 |      0 |     14 |      3 |      7 |      1 |      0 |     39 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 1913000 |     718 |    274 |    275 |    23 |    0 |     2 |    4 |    1 |    11 |    0 |    128 |    0 |    0 |    0 |    0 |    344 |    374 |      24 |      24 |      19 |       3 |     12 |      3 |      4 |      0 |      2 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      4 |      4 |      6 |      1 |      1 |      0 |      2 |      0 |       2 |       5 |       3 |       0 |      6 |      7 |      2 |      0 |        8 |        6 |       16 |       23 |       13 |       22 |      23 |        8 |       19 |       26 |       35 |       17 |       29 |      29 |       12 |       29 |       24 |       39 |       20 |       19 |      10 |        5 |       15 |       26 |       23 |       15 |       21 |      17 |        9 |       13 |       10 |       13 |        4 |        9 |       1 |       19 |       13 |       13 |       10 |        7 |        7 |       0 |        3 |        7 |        2 |        5 |        1 |        3 |       0 |        2 |        3 |        6 |        4 |        3 |        2 |       0 |      0 |      1 |     30 |     29 |      8 |      7 |      9 |    190 |      0 |      0 |      0 |     29 |     49 |     11 |     11 |     10 |    165 |      0 |      0 |      0 |     18 |      9 |      8 |      2 |      5 |     86 |      0 |      0 |      0 |      4 |      8 |      5 |      1 |      0 |     23 |      0 |     37 | s03      | R    |
| 1915000 |     618 |    221 |    251 |    11 |    0 |     8 |    2 |    3 |     4 |    0 |    118 |    0 |    0 |    0 |    0 |    301 |    317 |      33 |      12 |      16 |       1 |      9 |     12 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      1 |      0 |       4 |       5 |      13 |       0 |      0 |      2 |      3 |      0 |        7 |       15 |       11 |       16 |        5 |       17 |      17 |        5 |        9 |       30 |       28 |       10 |       27 |      24 |        5 |        8 |       29 |       24 |       15 |       21 |      22 |        5 |       15 |       21 |       17 |       14 |       23 |      32 |       10 |       12 |       14 |       10 |       12 |       10 |       4 |        8 |        9 |        5 |        8 |        8 |        8 |       0 |        4 |        2 |        3 |        5 |        1 |        2 |       0 |        0 |        3 |        0 |        5 |        2 |        1 |       0 |      0 |      1 |     19 |     27 |     10 |      5 |     10 |    149 |      0 |      0 |      2 |     16 |     35 |     11 |      4 |     11 |    172 |      0 |      0 |      1 |     22 |     12 |      2 |      1 |      2 |     78 |      0 |      0 |      1 |      7 |     11 |      1 |      2 |      0 |      6 |      0 |     37 | s03      | R    |
| 1917000 |     353 |    135 |    135 |     8 |    0 |     6 |    5 |    2 |     3 |    0 |     59 |    0 |    0 |    0 |    0 |    170 |    183 |      18 |       8 |       7 |       5 |      7 |      4 |      3 |      4 |      1 |      1 |      0 |      0 |      2 |      0 |      1 |      0 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       2 |       2 |       0 |      2 |      4 |      1 |      1 |        5 |        5 |        5 |       11 |        7 |       12 |      16 |        4 |        6 |        6 |       16 |        9 |       19 |      14 |        8 |        7 |       18 |       14 |        5 |       11 |       6 |        1 |        8 |       11 |       19 |        3 |       16 |       8 |        5 |        2 |       10 |        5 |        2 |        3 |       2 |        6 |        6 |        9 |        4 |        2 |        2 |       1 |        0 |        3 |        2 |        4 |        1 |        1 |       0 |        3 |        3 |        3 |        2 |        0 |        2 |       0 |      0 |      0 |      6 |     16 |      5 |      2 |      9 |     97 |      0 |      0 |      0 |     11 |     21 |      7 |      6 |      9 |     81 |      0 |      0 |      0 |      8 |      5 |      3 |      2 |      1 |     40 |      0 |      0 |      0 |      3 |      8 |      1 |      1 |      1 |     10 |      0 |     37 | s03      | R    |
| 1922000 |     569 |    209 |    248 |    11 |    0 |     2 |    3 |    1 |     2 |    0 |     93 |    0 |    0 |    0 |    0 |    270 |    299 |      24 |      22 |      10 |       1 |      8 |      8 |      7 |      1 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      6 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       4 |       4 |       7 |       0 |      1 |      3 |      2 |      0 |        5 |        3 |       14 |       25 |        7 |       14 |      21 |        4 |        5 |       26 |       29 |       12 |       20 |      24 |        2 |       16 |       16 |       29 |       13 |       20 |      19 |       13 |       11 |       19 |       22 |        9 |       37 |      22 |        9 |       11 |        9 |        7 |        7 |        6 |       1 |        8 |       11 |        9 |        8 |        2 |        2 |       3 |        0 |        2 |        3 |        7 |        2 |        2 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |     13 |     26 |     11 |      5 |      7 |    147 |      0 |      0 |      1 |     26 |     30 |     12 |      8 |     10 |    161 |      0 |      0 |      0 |     12 |     11 |      5 |      1 |      1 |     63 |      0 |      0 |      0 |      5 |      3 |      3 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 1926000 |     334 |    120 |    139 |     8 |    0 |     8 |    0 |    2 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    161 |    173 |      28 |      13 |       8 |       0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      3 |      0 |      3 |      1 |       2 |       8 |       6 |       2 |      2 |      0 |      0 |      1 |        7 |        5 |       12 |       10 |        1 |        7 |       2 |        6 |       14 |       18 |       14 |        7 |        9 |       8 |        2 |        9 |       25 |       18 |        3 |       10 |       8 |        7 |        8 |       13 |       11 |        7 |       14 |       4 |        4 |        7 |        7 |        4 |        3 |        3 |       0 |        7 |        9 |        5 |        4 |        1 |        1 |       0 |        3 |        3 |        5 |        1 |        1 |        1 |       0 |        1 |        1 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |     11 |     22 |      2 |      2 |      2 |     81 |      0 |      0 |      1 |     20 |     10 |      4 |      5 |      7 |     92 |      0 |      0 |      0 |      4 |      9 |      1 |      0 |      2 |     39 |      0 |      0 |      0 |      4 |      4 |      1 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 1929000 |     534 |    175 |    253 |     6 |    0 |     4 |    4 |    4 |     7 |    0 |     81 |    0 |    0 |    0 |    0 |    257 |    277 |      12 |      10 |       4 |       1 |      6 |      6 |      2 |      1 |      0 |      1 |      2 |      0 |      2 |      2 |      2 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |       1 |       1 |       1 |       0 |      1 |      5 |      1 |      0 |        3 |        3 |       14 |       20 |        7 |       14 |      17 |        3 |       13 |       15 |       21 |        8 |       21 |      16 |        3 |       15 |       21 |       29 |       12 |       20 |      25 |        4 |       10 |       21 |       22 |       11 |       28 |      32 |        6 |        5 |        7 |       10 |        4 |        4 |       2 |        2 |        8 |        7 |       12 |        5 |        8 |       1 |        4 |        1 |        4 |        3 |        3 |        1 |       0 |        4 |        2 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |     21 |     29 |      4 |      3 |      6 |    112 |      0 |      0 |      0 |     11 |     34 |     15 |     15 |      7 |    171 |      0 |      0 |      1 |      6 |     11 |      2 |      1 |      0 |     60 |      0 |      0 |      1 |      2 |      5 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 1929100 |     197 |     76 |     91 |     3 |    0 |     3 |    0 |    1 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     96 |    101 |      15 |       0 |       2 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        1 |        4 |        2 |        6 |       6 |        1 |        4 |        8 |        7 |        6 |       12 |      13 |        2 |        4 |       11 |        7 |        2 |       11 |       9 |        2 |        6 |        6 |        6 |        8 |        6 |      11 |        0 |        5 |        2 |        6 |        1 |        2 |       3 |        3 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      8 |      9 |      2 |      1 |      5 |     51 |      0 |      0 |      1 |      7 |     12 |      5 |      1 |      1 |     64 |      0 |      0 |      0 |      2 |      0 |      4 |      1 |      0 |     15 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 1930000 |     447 |    131 |    230 |     4 |    0 |     9 |    5 |    2 |     3 |    0 |     63 |    0 |    0 |    0 |    0 |    198 |    249 |      18 |      16 |       5 |       1 |      4 |      4 |      2 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        8 |       14 |        8 |        5 |       11 |      10 |        2 |        6 |       10 |       13 |        8 |       19 |      16 |        3 |        3 |       18 |       21 |       11 |       25 |      18 |        2 |        6 |       20 |       19 |       15 |       45 |      24 |        5 |        5 |        9 |        4 |        4 |        5 |       0 |        2 |        4 |        7 |        5 |        6 |        7 |       0 |        2 |        2 |        1 |        2 |        1 |        2 |       0 |        2 |        4 |        2 |        4 |        0 |        1 |       0 |      0 |      0 |      9 |     19 |      9 |      2 |      4 |     88 |      0 |      0 |      0 |     20 |     40 |      7 |     11 |      5 |    147 |      0 |      0 |      1 |      9 |      4 |      3 |      2 |      3 |     41 |      0 |      0 |      0 |      1 |      9 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 1933000 |     403 |    158 |    167 |     4 |    0 |     5 |    3 |    1 |     3 |    0 |     62 |    0 |    0 |    0 |    0 |    181 |    222 |      20 |       6 |       7 |       0 |      8 |     10 |      2 |      1 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       3 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |        5 |        8 |        9 |        9 |        4 |       14 |      15 |        1 |        8 |       17 |       18 |       10 |       20 |      20 |        3 |        9 |       15 |       10 |       14 |       12 |       8 |        3 |       10 |       13 |       17 |       14 |       18 |      21 |        5 |        5 |        9 |        8 |        3 |        4 |       2 |        5 |        9 |        8 |        3 |        0 |        0 |       1 |        1 |        1 |        2 |        2 |        1 |        3 |       0 |        1 |        0 |        1 |        1 |        2 |        0 |       1 |      0 |      0 |     16 |     23 |      2 |      6 |      7 |    104 |      0 |      0 |      1 |     20 |     17 |     13 |      9 |      3 |    104 |      0 |      0 |      2 |     16 |      7 |      0 |      1 |      0 |     36 |      0 |      0 |      0 |      1 |      8 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 1935000 |     418 |    154 |    160 |     7 |    0 |     1 |    5 |    0 |     1 |    0 |     90 |    0 |    0 |    0 |    0 |    173 |    245 |      25 |      19 |      15 |       0 |      1 |      6 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       6 |       1 |       1 |      1 |      7 |      3 |      0 |        3 |       18 |       12 |        4 |        8 |        9 |       3 |       22 |       29 |       12 |        9 |       10 |        9 |       6 |        8 |       20 |       22 |       12 |        9 |        3 |       2 |       18 |       33 |       11 |        9 |        7 |        2 |       4 |       10 |       10 |        8 |        2 |        2 |        0 |       2 |       16 |       28 |       10 |        2 |        0 |        0 |       0 |        0 |        4 |        2 |        0 |        0 |        0 |       0 |        0 |        4 |        1 |        3 |        0 |        0 |       0 |      0 |      3 |     20 |      9 |      5 |      6 |      1 |    110 |      0 |      0 |      0 |     14 |     12 |     11 |      2 |      2 |    119 |      0 |      0 |      1 |      6 |      4 |      0 |      1 |      1 |     77 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 1935100 |     309 |    120 |    110 |     7 |    0 |     6 |    3 |    3 |     2 |    0 |     58 |    0 |    0 |    0 |    0 |    160 |    149 |      18 |       8 |       8 |       0 |      5 |      0 |      2 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       4 |       6 |       1 |       0 |      0 |      2 |      0 |      0 |        2 |        8 |       11 |       16 |        5 |        7 |       9 |        1 |        8 |        8 |       11 |        7 |       10 |      17 |        2 |        4 |       16 |       13 |        8 |       10 |       5 |        4 |        6 |       11 |       10 |        4 |       10 |       7 |        3 |        9 |        6 |        5 |        2 |        5 |       2 |        4 |        4 |        6 |        6 |        3 |        2 |       1 |        3 |        3 |        3 |        3 |        0 |        0 |       0 |        1 |        0 |        4 |        3 |        1 |        0 |       0 |      0 |      1 |     11 |     18 |      6 |      3 |      5 |     76 |      0 |      0 |      0 |     12 |     11 |      2 |      5 |      4 |     76 |      0 |      0 |      1 |     11 |      7 |      4 |      0 |      4 |     31 |      0 |      0 |      1 |      3 |      4 |      1 |      1 |      1 |     10 |      0 |     37 | s03      | R    |
| 1950200 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 1950300 |     872 |    317 |    356 |    21 |    0 |     7 |    5 |    2 |     4 |    0 |    160 |    0 |    0 |    0 |    0 |    374 |    498 |      27 |      29 |      16 |       2 |     31 |     22 |     18 |      1 |      0 |      1 |      2 |      0 |      0 |      4 |      0 |      0 |      2 |      2 |      2 |      0 |      1 |      0 |      2 |      0 |       0 |       0 |       1 |       0 |      3 |      5 |      2 |      0 |        1 |       12 |       22 |       22 |       20 |       33 |       2 |       11 |       27 |       36 |       30 |       27 |       73 |       1 |        4 |       23 |       20 |       24 |       22 |       61 |       1 |       14 |       29 |       19 |       28 |       35 |       75 |       1 |        6 |       24 |       14 |       14 |       12 |       17 |       0 |        8 |       10 |       11 |       12 |        9 |       23 |       0 |        1 |        7 |        3 |        3 |        2 |        4 |       0 |        1 |        4 |        2 |        2 |        5 |        5 |       0 |      0 |      4 |     43 |     43 |     15 |     23 |     10 |    179 |      0 |      0 |      2 |     52 |     41 |     11 |     20 |     19 |    211 |      0 |      0 |      3 |     16 |     15 |      7 |      8 |      3 |    108 |      0 |      0 |      0 |      5 |      6 |      1 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 1950400 |     181 |     53 |     67 |     4 |    0 |     2 |    3 |    0 |     3 |    0 |     49 |    0 |    0 |    0 |    0 |    104 |     77 |       8 |       4 |       6 |       3 |      5 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |        0 |        8 |        8 |        5 |        3 |        2 |       0 |        1 |        6 |        4 |        5 |        2 |        9 |       0 |        3 |        8 |        7 |        5 |       11 |        7 |       0 |        2 |        7 |        4 |        5 |        3 |        5 |       0 |        1 |       13 |        5 |        5 |        5 |        0 |       0 |        1 |        5 |        4 |        7 |        3 |        0 |       0 |        0 |        1 |        1 |        4 |        0 |        2 |       0 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |      6 |      3 |      3 |      1 |     36 |      0 |      0 |      0 |      7 |      8 |      3 |      2 |      1 |     46 |      0 |      0 |      0 |      5 |      8 |      3 |      0 |      0 |     33 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 1950500 |     386 |    151 |    114 |    14 |    0 |     3 |    5 |    1 |     1 |    0 |     97 |    0 |    0 |    0 |    0 |    171 |    215 |      21 |      10 |       8 |       3 |     12 |      3 |      6 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      3 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      2 |      3 |      0 |        3 |       12 |       14 |       12 |        9 |        5 |       1 |        7 |       31 |       16 |       20 |       15 |        6 |       0 |        3 |       15 |       13 |       13 |        7 |        4 |       1 |        3 |       16 |        9 |       12 |       11 |        7 |       0 |        3 |       15 |       12 |        8 |        6 |        4 |       2 |        7 |       21 |        3 |        7 |        7 |        2 |       0 |        1 |        3 |        2 |        3 |        0 |        0 |       0 |        1 |        4 |        4 |        5 |        1 |        0 |       0 |      0 |      2 |     20 |     20 |      2 |      2 |      1 |    104 |      0 |      0 |      0 |     13 |     10 |      4 |      5 |      2 |     80 |      0 |      0 |      0 |     17 |      5 |      3 |      2 |      0 |     70 |      0 |      0 |      1 |      5 |      2 |      0 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 1950600 |     677 |    224 |    248 |    23 |    0 |     5 |    3 |    0 |     5 |    0 |    169 |    0 |    0 |    0 |    0 |    321 |    356 |      33 |      14 |      19 |       4 |     12 |     14 |      6 |      4 |      1 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      1 |      3 |      0 |      1 |      2 |      0 |      0 |      1 |       2 |       1 |       0 |       0 |      1 |      2 |      1 |      1 |        8 |       33 |       14 |       15 |        8 |       10 |       0 |       15 |       51 |       20 |       25 |       12 |       13 |       0 |       11 |       49 |       21 |       17 |       22 |       11 |       1 |       22 |       41 |       11 |       24 |       11 |        7 |       0 |       21 |       38 |       17 |        6 |        1 |        2 |       0 |       23 |       37 |       13 |        5 |        6 |        0 |       0 |        2 |        6 |        6 |        1 |        1 |        0 |       0 |        8 |        5 |        3 |        1 |        1 |        2 |       0 |      0 |      1 |     23 |     14 |      1 |      2 |      4 |    179 |      0 |      0 |      0 |     11 |      9 |      4 |      3 |      1 |    220 |      0 |      0 |      0 |     12 |      2 |      1 |      0 |      1 |    153 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 1950700 |     703 |    235 |    252 |    10 |    0 |     6 |    8 |    2 |     4 |    0 |    186 |    0 |    0 |    0 |    0 |    331 |    372 |      18 |      21 |      16 |       2 |     18 |     11 |     10 |      3 |      1 |      1 |      1 |      0 |      1 |      2 |      1 |      0 |      2 |      5 |      1 |      0 |      1 |      0 |      4 |      0 |       0 |       1 |       0 |       0 |      6 |      3 |      1 |      0 |        9 |       27 |       15 |       15 |       13 |       12 |       0 |       19 |       55 |       18 |       17 |       19 |       16 |       0 |       15 |       45 |       27 |       11 |       15 |       10 |       1 |       27 |       41 |       19 |       14 |       16 |       11 |       0 |       21 |       43 |       19 |       12 |        6 |        2 |       0 |       19 |       37 |       10 |        8 |        3 |        6 |       0 |        1 |        6 |        1 |        2 |        2 |        1 |       0 |        3 |        7 |        1 |        3 |        0 |        3 |       0 |      0 |      1 |     32 |     23 |      4 |      3 |      0 |    172 |      0 |      0 |      0 |     29 |     21 |     11 |      5 |      0 |    186 |      0 |      0 |      1 |     19 |      6 |      0 |      0 |      0 |    160 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 1950800 |     625 |    212 |    225 |    14 |    0 |     3 |    8 |    1 |     2 |    0 |    160 |    0 |    0 |    0 |    0 |    264 |    361 |      33 |      19 |      22 |       4 |     10 |      2 |      7 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      2 |      1 |      1 |       0 |       2 |       1 |       0 |      3 |      4 |      1 |      0 |       11 |       36 |       15 |        7 |        8 |        3 |       0 |       18 |       55 |       25 |       20 |        7 |        6 |       1 |       10 |       40 |       32 |       13 |        8 |        3 |       0 |       12 |       58 |       18 |       10 |       16 |        4 |       1 |       10 |       30 |       14 |        8 |        2 |        1 |       0 |       30 |       40 |       15 |        3 |        4 |        3 |       0 |        1 |        7 |        2 |        1 |        1 |        1 |       0 |        4 |        5 |        1 |        4 |        1 |        0 |       0 |      0 |      0 |     22 |      9 |      6 |      1 |      2 |    172 |      0 |      0 |      0 |     16 |      9 |      1 |      2 |      3 |    194 |      0 |      0 |      0 |     11 |      3 |      1 |      0 |      0 |    145 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |     23 |      0 |     37 | s03      | R    |
| 1950900 |     451 |    147 |    152 |     8 |    0 |     1 |    4 |    0 |     7 |    0 |    132 |    0 |    0 |    0 |    0 |    210 |    241 |      19 |      11 |       7 |       2 |      8 |      8 |      8 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      5 |      0 |      0 |      0 |      1 |      0 |       2 |       0 |       0 |       0 |      5 |      1 |      1 |      0 |       14 |       27 |        9 |        2 |        6 |        3 |       0 |       23 |       34 |        7 |       14 |        5 |        3 |       0 |       15 |       36 |       18 |        5 |        4 |        1 |       0 |       18 |       36 |       11 |        6 |        1 |        1 |       0 |        9 |       29 |        6 |        8 |        4 |        1 |       0 |       23 |       38 |       10 |        3 |        0 |        1 |       0 |        2 |        7 |        2 |        2 |        0 |        0 |       0 |        4 |        3 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    147 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    152 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    132 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 2000000 |     461 |    190 |    142 |    16 |    0 |     2 |    4 |    0 |     5 |    0 |    102 |    0 |    0 |    0 |    0 |    209 |    252 |      34 |      23 |      10 |       1 |      3 |      7 |      7 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       7 |       6 |       1 |       0 |      2 |      2 |      4 |      0 |       21 |       21 |       16 |       15 |        5 |        6 |       1 |       28 |       24 |       13 |       24 |        8 |        7 |       1 |       23 |       17 |       12 |        9 |        5 |        4 |       1 |       20 |       20 |       11 |       11 |        6 |        3 |       0 |       13 |       13 |        9 |        4 |        1 |        0 |       0 |       25 |       20 |        5 |        7 |        1 |        3 |       1 |        6 |        5 |        1 |        1 |        0 |        0 |       0 |        5 |        4 |        1 |        2 |        2 |        0 |       0 |      0 |      2 |     19 |     14 |      2 |      2 |      0 |    151 |      0 |      0 |      1 |     10 |      7 |      4 |      3 |      0 |    117 |      0 |      0 |      1 |     10 |      2 |      1 |      0 |      0 |     88 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 2001000 |     618 |    230 |    205 |    13 |    0 |     8 |   10 |    5 |     9 |    0 |    138 |    0 |    0 |    0 |    0 |    264 |    354 |      36 |      18 |      12 |       4 |     13 |      6 |     11 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |       0 |       0 |       0 |       2 |      0 |      2 |      4 |      0 |        6 |       12 |       18 |       21 |       15 |        9 |       6 |       21 |       26 |       18 |       25 |       17 |       16 |      20 |        8 |       29 |       18 |       11 |       10 |       12 |       9 |       17 |       17 |       20 |       14 |       16 |       17 |       7 |        9 |       18 |       11 |        7 |        3 |        6 |       1 |       18 |       25 |       12 |        8 |        8 |       10 |       2 |        5 |        5 |        3 |        8 |        4 |        0 |       0 |        5 |        5 |        4 |        1 |        2 |        3 |       0 |      0 |      2 |     22 |     25 |     11 |      5 |      4 |    161 |      0 |      0 |      1 |     20 |     18 |     17 |      7 |      3 |    139 |      0 |      0 |      1 |     10 |      8 |      2 |      0 |      2 |    115 |      0 |      0 |      0 |      5 |     12 |      1 |      1 |      0 |     26 |      0 |     37 | s03      | R    |
| 2002000 |     457 |    153 |    195 |     9 |    0 |     8 |    2 |    2 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    222 |    235 |      23 |      21 |      13 |       1 |     11 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |       3 |       3 |       0 |       1 |      2 |      3 |      0 |      0 |        0 |       13 |       18 |       11 |       11 |       13 |       5 |        5 |        8 |       14 |       15 |       13 |       16 |      11 |       10 |       21 |       20 |       16 |       14 |       11 |      11 |        2 |       22 |       20 |       16 |        9 |       15 |       8 |        6 |       10 |        6 |        7 |        1 |        8 |       1 |        6 |       13 |       12 |        9 |        3 |        4 |       1 |        1 |        3 |        1 |        4 |        0 |        0 |       0 |        0 |        2 |        5 |        2 |        2 |        2 |       0 |      0 |      1 |     25 |     19 |      4 |      1 |      9 |     94 |      0 |      0 |      1 |     22 |     30 |      2 |      7 |      9 |    124 |      0 |      0 |      1 |     10 |      8 |      3 |      3 |      2 |     60 |      0 |      0 |      0 |      4 |      5 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2004000 |     172 |     56 |     76 |     6 |    0 |     1 |    0 |    1 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |     82 |     90 |       6 |       2 |       1 |       1 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      1 |      0 |        0 |        4 |        6 |        6 |        4 |        2 |       0 |        3 |        8 |        4 |        7 |        9 |        3 |       0 |        1 |        8 |        8 |        7 |        7 |        8 |       1 |        0 |        7 |        8 |        5 |       10 |        5 |       1 |        3 |        4 |        3 |        1 |        2 |        3 |       0 |        2 |        6 |        3 |        2 |        3 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      2 |     11 |      5 |      2 |      2 |      0 |     34 |      0 |      0 |      1 |      6 |      7 |      3 |      3 |      2 |     54 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2005000 |     487 |    216 |    165 |    13 |    0 |     5 |    2 |    1 |     2 |    0 |     83 |    0 |    0 |    0 |    0 |    240 |    247 |      24 |       6 |       9 |       5 |      1 |      9 |      3 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      1 |      3 |      0 |      0 |       2 |       5 |       5 |       0 |      2 |      0 |      0 |      0 |        3 |        8 |       21 |       13 |       11 |       19 |      17 |        5 |       18 |       18 |       22 |       18 |       19 |      24 |        6 |        4 |       24 |       13 |       15 |       11 |      12 |        3 |       10 |       20 |       15 |        7 |       15 |      10 |        4 |        7 |       19 |       11 |        4 |        4 |       0 |        4 |        8 |        9 |        6 |        4 |        3 |       0 |        1 |        4 |        3 |        2 |        1 |        3 |       0 |        1 |        3 |        1 |        3 |        0 |        1 |       0 |      0 |      2 |     22 |     27 |      9 |      4 |      4 |    148 |      0 |      0 |      0 |     23 |     19 |      7 |      8 |      5 |    103 |      0 |      0 |      0 |     14 |     16 |      2 |      0 |      2 |     49 |      0 |      0 |      0 |      4 |      3 |      3 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2007000 |     512 |    220 |    154 |    12 |    0 |     9 |    4 |    4 |     4 |    0 |    105 |    0 |    0 |    0 |    0 |    239 |    273 |      57 |      16 |      13 |       1 |      7 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       9 |       5 |       8 |       5 |      4 |      0 |      0 |      0 |        6 |        9 |       10 |       17 |        9 |       24 |      11 |        8 |       17 |       19 |       19 |       21 |       26 |      24 |        6 |        6 |       18 |       14 |        9 |       12 |       9 |        2 |        8 |       16 |       16 |        9 |       25 |       4 |       11 |       17 |       16 |       11 |        5 |        2 |       2 |       14 |        7 |        6 |        9 |        2 |        0 |       3 |        2 |        5 |        1 |        3 |        3 |        1 |       0 |        3 |        5 |        3 |        2 |        2 |        3 |       0 |      0 |      3 |     19 |     29 |      6 |      5 |     10 |    148 |      0 |      0 |      1 |     16 |     28 |      4 |      5 |      3 |     97 |      0 |      0 |      0 |     15 |      8 |      3 |      3 |      5 |     71 |      0 |      0 |      2 |      8 |      6 |      1 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 2008000 |     608 |    225 |    205 |    21 |    0 |     4 |    2 |    0 |     3 |    0 |    148 |    0 |    0 |    0 |    0 |    276 |    332 |      22 |      10 |      20 |       3 |     22 |      7 |     12 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      5 |      0 |       0 |       2 |       0 |       0 |      1 |      0 |      1 |      0 |       11 |       15 |       20 |       13 |        6 |       12 |       2 |       11 |       33 |       23 |       27 |       15 |       35 |       2 |       10 |       28 |       15 |       12 |       17 |       22 |       2 |       11 |       22 |       14 |       10 |       13 |       27 |       2 |        6 |       23 |       17 |       12 |        7 |        9 |       0 |        8 |       33 |       11 |       13 |        7 |        2 |       0 |        0 |        3 |        7 |        3 |        2 |        2 |       0 |        3 |        4 |        1 |        3 |        1 |        1 |       0 |      0 |      1 |     35 |     24 |      8 |      3 |      8 |    146 |      0 |      0 |      1 |     19 |     25 |      5 |      6 |      9 |    140 |      0 |      0 |      0 |     14 |      5 |      1 |      2 |      3 |    123 |      0 |      0 |      1 |      6 |      4 |      2 |      1 |      1 |     15 |      0 |     37 | s03      | R    |
| 2008200 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2010000 |     563 |    263 |    135 |    12 |    0 |     6 |    3 |    2 |     6 |    0 |    136 |    0 |    0 |    0 |    0 |    291 |    272 |      60 |      14 |      22 |       3 |      3 |      2 |      3 |      1 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |     12 |      3 |      6 |      3 |      1 |      0 |      0 |      0 |      51 |      38 |      41 |       8 |      9 |      8 |      4 |      0 |       12 |       22 |       20 |       17 |       18 |       24 |      10 |       20 |       20 |       19 |       22 |       19 |       28 |      12 |        7 |       12 |       16 |       23 |       11 |        8 |       1 |        6 |       13 |       11 |       10 |        5 |        7 |       5 |       16 |       23 |       10 |        7 |        8 |        9 |       2 |       16 |       15 |        9 |       12 |        3 |        6 |       0 |        3 |        3 |        4 |        0 |        2 |        3 |       0 |        1 |        4 |        3 |        2 |        1 |        3 |       0 |      0 |      4 |     36 |     20 |      1 |      3 |      1 |    198 |      0 |      0 |      0 |     21 |     14 |      5 |      3 |      4 |     88 |      0 |      0 |      2 |     10 |     10 |      2 |      1 |      0 |    111 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 2011000 |     520 |    228 |    150 |    11 |    0 |     8 |    5 |    3 |     3 |    0 |    112 |    0 |    0 |    0 |    0 |    266 |    254 |      31 |      19 |      16 |       3 |      2 |      6 |      4 |      4 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |     15 |      3 |      9 |      2 |      3 |      0 |      0 |      1 |      22 |      25 |      15 |       3 |      5 |     11 |      1 |      0 |       12 |       17 |       13 |       18 |       17 |       20 |      10 |       13 |       27 |       23 |       16 |        8 |       19 |      15 |        8 |       18 |       18 |       12 |        9 |       12 |       1 |       11 |       18 |       11 |        9 |        9 |       11 |       3 |       15 |       14 |       14 |        8 |        6 |        5 |       2 |       14 |       15 |        4 |        7 |        3 |        3 |       2 |        1 |        7 |        3 |        2 |        1 |        3 |       0 |        4 |        2 |        1 |        2 |        2 |        1 |       1 |      0 |      1 |     26 |     26 |      5 |      3 |     10 |    157 |      0 |      0 |      0 |     16 |     18 |      3 |      4 |      3 |    106 |      0 |      0 |      2 |     13 |      8 |      4 |      1 |      0 |     84 |      0 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 2011100 |     339 |    124 |    122 |     2 |    0 |    11 |    2 |    1 |     0 |    0 |     77 |    0 |    0 |    0 |    0 |    180 |    159 |      28 |      16 |      15 |       1 |      2 |      0 |      2 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      13 |      23 |      18 |       1 |     16 |     19 |      7 |      1 |        5 |        4 |        9 |       12 |        7 |       15 |       5 |        9 |       10 |        8 |       10 |        5 |       10 |      15 |        7 |       13 |       19 |        8 |        4 |       19 |       3 |        2 |        5 |       10 |        7 |        7 |       11 |       7 |        8 |       14 |        4 |        6 |        4 |        3 |       1 |        9 |        8 |        6 |        3 |        5 |        5 |       1 |        0 |        2 |        4 |        0 |        0 |        4 |       0 |        0 |        0 |        1 |        0 |        1 |        4 |       0 |      0 |      2 |     14 |     20 |      3 |      4 |      2 |     79 |      0 |      0 |      2 |     15 |     22 |      9 |      3 |      6 |     65 |      0 |      0 |      1 |     12 |      4 |      3 |      0 |      0 |     57 |      0 |      0 |      0 |      0 |      8 |      1 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 2012100 |     433 |    150 |    151 |    12 |    0 |     2 |    0 |    1 |     6 |    0 |    111 |    0 |    0 |    0 |    0 |    198 |    235 |      21 |      22 |      17 |       2 |      4 |      5 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      3 |      2 |      4 |      0 |      2 |      1 |      0 |      0 |       2 |       1 |       0 |       0 |      4 |      2 |      3 |      0 |        8 |       25 |       11 |       10 |        3 |        3 |       0 |       18 |       29 |       20 |        5 |       11 |        7 |       0 |       10 |       18 |       24 |        4 |        3 |        4 |       0 |       19 |       27 |       21 |        9 |        1 |       11 |       0 |       18 |       27 |        9 |        5 |        1 |        2 |       0 |       10 |       19 |       13 |        5 |        1 |        1 |       0 |        3 |        5 |        2 |        1 |        2 |        0 |       0 |        3 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     20 |     16 |      1 |      1 |      3 |    109 |      0 |      0 |      2 |     18 |     11 |      1 |      2 |      0 |    117 |      0 |      0 |      0 |     16 |      9 |      3 |      1 |      0 |     82 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 2013000 |     193 |    112 |     37 |     8 |    0 |     0 |    2 |    2 |     2 |    0 |     30 |    0 |    0 |    0 |    0 |     99 |     94 |      45 |       9 |       8 |       6 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      15 |       4 |       6 |       0 |      2 |      4 |      1 |      0 |        7 |        7 |       15 |        9 |        8 |       13 |       0 |        9 |        4 |       16 |       12 |        6 |        6 |       0 |        1 |        5 |        3 |        2 |        2 |        4 |       0 |        3 |        3 |        3 |        2 |        5 |        4 |       0 |        4 |        4 |        2 |        1 |        1 |        3 |       0 |        4 |        3 |        2 |        1 |        3 |        2 |       0 |        4 |        1 |        2 |        0 |        0 |        1 |       0 |        3 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |     10 |      6 |      1 |      0 |      2 |     92 |      0 |      0 |      1 |      1 |      5 |      1 |      0 |      0 |     29 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     25 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 2013100 |     538 |    202 |    188 |     9 |    0 |     5 |    3 |    4 |     3 |    0 |    124 |    0 |    0 |    0 |    0 |    242 |    296 |      29 |      17 |      20 |       4 |     11 |      4 |      7 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      2 |      0 |      0 |      0 |       5 |       4 |       9 |       1 |     11 |      5 |      5 |      0 |        9 |       11 |       19 |       18 |       10 |       13 |       5 |        4 |       29 |       29 |       20 |       16 |       14 |       5 |        5 |       24 |       24 |       16 |        8 |       10 |       4 |        9 |       18 |       31 |       18 |       10 |        8 |       3 |       10 |       15 |       12 |        8 |        5 |        2 |       1 |       15 |       18 |       18 |       11 |        5 |        4 |       0 |        1 |        2 |        4 |        1 |        3 |        2 |       0 |        1 |        3 |        4 |        1 |        1 |        1 |       0 |      0 |      2 |     20 |     23 |      8 |      5 |      4 |    140 |      0 |      0 |      1 |     25 |     19 |      6 |      7 |      7 |    123 |      0 |      0 |      3 |     11 |     11 |      0 |      3 |      3 |     93 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 2013200 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2015000 |     185 |     81 |     45 |    10 |    0 |     3 |    3 |    1 |     2 |    0 |     40 |    0 |    0 |    0 |    0 |     92 |     93 |      22 |       2 |       3 |       3 |      0 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       5 |       1 |       1 |      0 |      0 |      0 |      0 |        4 |        3 |        5 |        8 |        8 |        2 |       6 |        5 |        4 |        8 |        8 |        8 |        3 |       9 |        2 |        5 |        2 |        5 |        5 |        5 |       2 |        2 |        3 |        6 |        5 |        0 |        3 |       0 |        4 |        6 |        1 |        6 |        1 |        0 |       0 |        7 |        3 |        4 |        6 |        1 |        0 |       1 |        3 |        4 |        2 |        3 |        0 |        0 |       0 |        1 |        1 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |      7 |     11 |      7 |      1 |      1 |     54 |      0 |      0 |      0 |      4 |     10 |      2 |      2 |      0 |     27 |      0 |      0 |      1 |      4 |      3 |      4 |      1 |      0 |     27 |      0 |      0 |      2 |      3 |      2 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2017000 |     346 |    136 |    104 |    10 |    0 |     6 |    3 |    1 |     7 |    0 |     79 |    0 |    0 |    0 |    0 |    181 |    165 |      31 |      14 |      17 |       5 |      6 |      5 |      2 |      6 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       6 |      10 |      10 |       0 |      2 |      1 |      1 |      0 |        5 |       18 |       11 |       17 |        8 |       12 |       3 |        3 |        9 |       10 |       13 |        8 |       12 |       7 |        5 |        7 |       17 |       11 |        5 |        7 |       3 |        2 |       10 |        6 |       11 |        6 |       10 |       4 |        4 |        7 |        9 |        8 |        4 |        3 |       0 |       10 |       11 |        6 |        8 |        8 |        1 |       0 |        4 |        3 |        4 |        3 |        1 |        2 |       0 |        3 |        0 |        0 |        4 |        2 |        1 |       0 |      0 |      1 |     17 |     26 |      5 |      4 |      4 |     79 |      0 |      0 |      0 |     10 |     16 |      0 |      2 |      0 |     76 |      0 |      0 |      1 |      5 |      6 |      1 |      2 |      1 |     63 |      0 |      0 |      0 |      4 |      8 |      0 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 2019000 |     401 |    195 |    119 |    13 |    0 |     2 |    2 |    1 |     7 |    0 |     62 |    0 |    0 |    0 |    0 |    188 |    213 |      47 |      15 |      14 |       5 |      5 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |       7 |       8 |       3 |       0 |      0 |      2 |      1 |      0 |        3 |       16 |       10 |       11 |       12 |        9 |      14 |       14 |       15 |       20 |       19 |       12 |       20 |      20 |        5 |       10 |       10 |       17 |       13 |       10 |       3 |        5 |        5 |       10 |       13 |        7 |       11 |       0 |        3 |        9 |        3 |        7 |        2 |        5 |       0 |        7 |        8 |        9 |        4 |        3 |        2 |       0 |        1 |        7 |        5 |        3 |        0 |        0 |       0 |        1 |        1 |        3 |        3 |        1 |        0 |       0 |      0 |      0 |     17 |     27 |      7 |      3 |      6 |    135 |      0 |      0 |      2 |     13 |      9 |     14 |      3 |      6 |     72 |      0 |      0 |      2 |      9 |      6 |      0 |      3 |      0 |     42 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      3 |     16 |      0 |     37 | s03      | R    |
| 2019200 |     625 |    205 |    263 |    18 |    0 |     5 |    2 |    3 |     4 |    0 |    125 |    0 |    0 |    0 |    0 |    287 |    338 |      18 |      12 |      18 |       3 |     17 |     11 |      8 |      1 |      0 |      1 |      1 |      0 |      3 |      0 |      1 |      0 |      1 |      3 |      0 |      0 |      1 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      3 |      3 |      0 |        7 |       17 |       14 |       16 |       10 |       19 |       0 |       13 |       19 |        9 |       22 |       32 |       26 |       1 |       11 |       23 |       24 |       18 |       23 |       30 |       1 |       12 |       27 |       19 |       24 |       23 |       28 |       0 |        8 |       13 |        8 |       12 |       11 |        6 |       0 |       16 |       20 |       10 |        5 |       12 |        4 |       0 |        0 |        7 |        1 |        1 |        4 |        3 |       0 |        5 |        3 |        3 |        2 |        2 |        1 |       0 |      0 |      0 |     23 |     20 |     10 |      7 |     13 |    132 |      0 |      0 |      1 |     39 |     42 |      9 |      6 |     15 |    151 |      0 |      0 |      1 |     19 |     10 |      2 |      4 |      6 |     83 |      0 |      0 |      0 |      3 |      7 |      2 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 2019500 |     298 |     88 |    129 |     2 |    0 |     2 |    1 |    0 |     1 |    0 |     75 |    0 |    0 |    0 |    0 |    136 |    162 |       8 |       9 |       8 |       0 |      6 |      6 |      6 |      0 |      1 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        2 |        5 |        2 |        8 |        5 |        4 |       0 |        3 |       11 |       11 |       17 |       17 |        3 |       0 |        2 |       16 |       12 |       16 |        9 |       12 |       0 |        1 |       10 |       15 |       13 |       14 |        9 |       0 |        2 |       11 |        6 |        9 |        6 |        4 |       0 |        4 |        4 |        8 |       11 |        7 |        2 |       1 |        0 |        0 |        1 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |     17 |      3 |      9 |      3 |     49 |      0 |      0 |      0 |     17 |     21 |      9 |      4 |      8 |     70 |      0 |      0 |      1 |     11 |      6 |      7 |      1 |      3 |     46 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 2021000 |     439 |    194 |    150 |     8 |    0 |     6 |    4 |    0 |     4 |    0 |     73 |    0 |    0 |    0 |    0 |    200 |    239 |      34 |      14 |       7 |       5 |     10 |      7 |      1 |      1 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      3 |      0 |      2 |      0 |       6 |       0 |       2 |       1 |      2 |      1 |      1 |      0 |        6 |        4 |        9 |       19 |       10 |       14 |      12 |        7 |       13 |       14 |       20 |       21 |       30 |      15 |        7 |       14 |       15 |       12 |        4 |       18 |       9 |        9 |        7 |       17 |        7 |        8 |       13 |      10 |        5 |        7 |        7 |       10 |        2 |        3 |       0 |        7 |        5 |       10 |        8 |        3 |        6 |       0 |        0 |        4 |        3 |        1 |        3 |        2 |       0 |        2 |        0 |        4 |        0 |        2 |        1 |       0 |      0 |      1 |     24 |     27 |      6 |      6 |     11 |    119 |      0 |      0 |      2 |     13 |     18 |      3 |      3 |      5 |    106 |      0 |      0 |      1 |     11 |     11 |      4 |      1 |      2 |     43 |      0 |      0 |      0 |      4 |      5 |      1 |      1 |      2 |      9 |      0 |     37 | s03      | R    |
| 2021100 |     518 |    184 |    225 |     5 |    0 |     8 |    1 |    4 |     2 |    0 |     89 |    0 |    0 |    0 |    0 |    216 |    302 |      14 |      12 |       6 |       2 |     18 |     15 |      1 |      2 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |       4 |      10 |       4 |       0 |      1 |      3 |      2 |      0 |        2 |        9 |       14 |       21 |       22 |       10 |       0 |        5 |       10 |       16 |       38 |       23 |       14 |       0 |        1 |       11 |        9 |       16 |       24 |       20 |       1 |        5 |       16 |       19 |       29 |       44 |       30 |       0 |        5 |        5 |        5 |       13 |        9 |        8 |       1 |        5 |        5 |        6 |       12 |       10 |        5 |       0 |        0 |        2 |        2 |        1 |        2 |        2 |       1 |        0 |        1 |        4 |        2 |        0 |        3 |       0 |      0 |      1 |     37 |     19 |      9 |      4 |      9 |    105 |      0 |      0 |      2 |     38 |     42 |     10 |      9 |     12 |    112 |      0 |      0 |      0 |     14 |     10 |      2 |      6 |      4 |     53 |      0 |      0 |      1 |      1 |      8 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 2022000 |     426 |    207 |    106 |     9 |    0 |     8 |    3 |    3 |     1 |    0 |     89 |    0 |    0 |    0 |    0 |    215 |    211 |      68 |      15 |      17 |       4 |      6 |      1 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      27 |      20 |      16 |       3 |      1 |      3 |      1 |      0 |       10 |       12 |       16 |       18 |       13 |       17 |       6 |       17 |       23 |       13 |       20 |       18 |       15 |       9 |        6 |       13 |       13 |       12 |        7 |        7 |       1 |        7 |        6 |       12 |        9 |        4 |        9 |       0 |       10 |       13 |        6 |        6 |       11 |        3 |       0 |       10 |        9 |       12 |        1 |        4 |        3 |       1 |        3 |        4 |        4 |        0 |        4 |        0 |       0 |        0 |        2 |        4 |        0 |        1 |        2 |       0 |      0 |      1 |     36 |     20 |      5 |      4 |      5 |    136 |      0 |      0 |      1 |     14 |     16 |      3 |      0 |      3 |     69 |      0 |      0 |      0 |      9 |      2 |      4 |      0 |      0 |     74 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 2024000 |     411 |    204 |     99 |    11 |    0 |     5 |    1 |    2 |     4 |    0 |     85 |    0 |    0 |    0 |    0 |    205 |    206 |      56 |      17 |      16 |       4 |      2 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       6 |       8 |      15 |       2 |      2 |      3 |      1 |      0 |       13 |       12 |       16 |       25 |        7 |       11 |       9 |        5 |       18 |       17 |       18 |       14 |       24 |      15 |        5 |       11 |       16 |        9 |        9 |        6 |       1 |        7 |        6 |        8 |        8 |        2 |        9 |       2 |       12 |       11 |        7 |        6 |        4 |        3 |       1 |       16 |       13 |        6 |        5 |        1 |        0 |       0 |        3 |        2 |        1 |        2 |        0 |        2 |       1 |        3 |        2 |        3 |        2 |        1 |        1 |       0 |      0 |      2 |     26 |     27 |     10 |      2 |      2 |    135 |      0 |      0 |      2 |      9 |     16 |      4 |      4 |      2 |     62 |      0 |      0 |      1 |     14 |      6 |      4 |      3 |      1 |     56 |      0 |      0 |      1 |      6 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2024100 |     218 |     80 |     64 |     5 |    0 |     2 |    3 |    0 |     1 |    0 |     63 |    0 |    0 |    0 |    0 |    105 |    113 |      23 |      20 |      13 |       3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |       2 |       2 |       5 |       2 |      6 |      4 |      2 |      0 |        2 |        4 |        7 |        7 |        2 |        6 |       4 |        7 |        4 |        6 |       12 |        3 |        7 |       9 |        3 |        8 |       10 |        2 |        5 |        6 |       2 |        4 |        3 |        5 |        3 |        3 |        7 |       3 |        7 |        6 |        2 |        7 |        4 |        3 |       1 |        9 |        6 |        8 |        5 |        2 |        3 |       0 |        3 |        1 |        0 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        2 |        0 |       0 |      0 |      1 |      6 |     15 |      4 |      4 |      3 |     47 |      0 |      0 |      0 |      7 |     11 |      3 |      6 |      1 |     36 |      0 |      0 |      0 |      6 |      9 |      1 |      3 |      3 |     41 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2027000 |     285 |    122 |     78 |     6 |    0 |     4 |    5 |    1 |     7 |    0 |     62 |    0 |    0 |    0 |    0 |    134 |    151 |      15 |      10 |      12 |       1 |      7 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |      0 |      1 |      1 |       3 |       5 |       4 |       3 |      0 |      0 |      0 |      0 |        1 |        6 |        6 |       13 |        9 |        7 |       5 |        7 |       10 |       11 |       14 |       10 |       10 |      13 |        1 |        6 |       11 |        9 |        6 |        7 |       3 |        5 |        5 |        7 |        7 |        5 |        4 |       2 |        4 |       11 |        3 |        6 |        4 |        2 |       1 |        5 |       10 |        8 |        7 |        0 |        0 |       1 |        1 |        7 |        3 |        2 |        0 |        0 |       0 |        2 |        3 |        1 |        2 |        2 |        0 |       0 |      0 |      1 |      9 |     24 |      3 |      2 |      4 |     79 |      0 |      0 |      0 |     14 |     11 |      2 |      3 |      4 |     44 |      0 |      0 |      1 |      6 |      9 |      0 |      0 |      0 |     46 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 2027100 |     262 |     93 |     81 |     9 |    0 |     6 |    3 |    2 |     2 |    0 |     66 |    0 |    0 |    0 |    0 |    116 |    146 |      21 |       9 |      12 |       3 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       8 |       3 |       7 |       4 |      1 |      0 |      0 |      0 |        1 |        1 |        8 |       12 |        5 |        6 |       7 |        3 |        8 |        9 |       10 |        7 |       10 |       6 |        1 |        6 |        8 |       11 |        5 |        3 |       4 |        6 |        4 |       10 |       12 |        3 |        6 |       2 |        5 |       10 |        3 |        3 |        2 |        3 |       1 |       12 |        9 |        7 |        6 |        4 |        1 |       0 |        3 |        2 |        2 |        2 |        1 |        1 |       0 |        3 |        2 |        1 |        2 |        2 |        1 |       0 |      0 |      0 |     12 |     13 |      6 |      1 |      1 |     60 |      0 |      0 |      1 |     10 |      6 |      1 |      0 |      4 |     59 |      0 |      0 |      1 |      8 |      1 |      3 |      1 |      2 |     50 |      0 |      0 |      0 |      4 |      8 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 2027200 |     263 |     99 |     96 |     5 |    0 |     8 |    1 |    2 |     2 |    0 |     50 |    0 |    0 |    0 |    0 |    115 |    148 |       9 |       8 |       3 |       2 |      8 |      3 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       5 |       0 |       1 |       1 |      0 |      0 |      1 |      0 |        2 |        1 |        4 |       11 |        7 |       13 |       0 |        2 |        2 |        6 |       16 |       11 |       24 |       0 |        1 |        2 |        1 |        6 |        9 |       22 |       0 |        2 |        1 |        4 |        7 |        5 |       36 |       0 |        2 |        4 |        1 |        4 |        7 |        5 |       0 |        7 |        1 |        5 |        4 |        6 |        4 |       0 |        0 |        0 |        3 |        3 |        4 |        3 |       0 |        1 |        0 |        1 |        1 |        0 |        2 |       0 |      0 |      1 |     11 |     14 |      3 |      2 |      2 |     66 |      0 |      0 |      0 |      9 |     20 |      6 |      5 |      1 |     55 |      0 |      0 |      0 |      4 |      8 |      2 |      0 |      3 |     33 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 2101000 |     647 |    224 |    214 |    18 |    0 |     6 |    5 |    5 |    10 |    0 |    165 |    0 |    0 |    0 |    0 |    328 |    319 |      49 |      13 |      21 |       2 |      7 |     11 |      7 |      1 |      1 |      1 |      0 |      1 |      2 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |       1 |       2 |       2 |       0 |      0 |      2 |      2 |      0 |       16 |       29 |       21 |        9 |        9 |        8 |       3 |       18 |       44 |       16 |       18 |       14 |       14 |       5 |       18 |       36 |       21 |       16 |       13 |        7 |       3 |       12 |       36 |       18 |       13 |       11 |        7 |       3 |       23 |       36 |       17 |        7 |        6 |        0 |       1 |       28 |       23 |       11 |        6 |        3 |        4 |       0 |        6 |       11 |        9 |        2 |        1 |        0 |       0 |        3 |        7 |        1 |        1 |        1 |        2 |       0 |      0 |      0 |     21 |     20 |      5 |      1 |      5 |    172 |      0 |      0 |      1 |     21 |     16 |      6 |      2 |      6 |    162 |      0 |      0 |      1 |     15 |      7 |      1 |      0 |      0 |    141 |      0 |      0 |      3 |      8 |      0 |      0 |      0 |      0 |     33 |      0 |     37 | s03      | R    |
| 2101100 |      82 |     27 |     35 |     1 |    0 |     0 |    2 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     39 |     43 |       0 |       1 |       1 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      1 |      0 |        1 |        1 |        0 |        3 |        4 |        1 |       1 |        3 |        7 |        2 |        1 |        3 |        0 |       0 |        0 |        4 |        1 |        4 |        2 |        3 |       0 |        3 |        5 |        2 |        1 |        0 |       10 |       0 |        2 |        7 |        1 |        0 |        0 |        1 |       0 |        3 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      4 |      2 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |      6 |      1 |      2 |      5 |      0 |     21 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2101900 |     230 |     76 |     64 |     5 |    0 |     0 |    3 |    1 |     3 |    0 |     78 |    0 |    0 |    0 |    0 |     94 |    136 |      14 |       7 |      18 |       0 |      5 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       1 |      3 |      0 |      1 |      0 |       21 |        5 |        2 |        1 |        0 |        0 |       0 |       34 |        7 |        1 |        1 |        1 |        3 |       0 |       21 |        2 |        2 |        1 |        1 |        0 |       0 |       34 |        1 |        1 |        0 |        0 |        1 |       0 |       19 |        6 |        4 |        1 |        1 |        1 |       0 |       40 |        4 |        1 |        0 |        0 |        1 |       0 |        5 |        0 |        1 |        0 |        0 |        0 |       0 |        5 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     71 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      0 |     58 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |     74 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2102000 |     638 |    212 |    228 |    11 |    0 |     7 |    9 |    2 |     5 |    0 |    164 |    0 |    0 |    0 |    0 |    285 |    353 |      42 |      20 |      15 |       2 |      5 |      5 |     11 |      1 |      1 |      2 |      1 |      0 |      1 |      2 |      0 |      0 |      5 |      4 |      3 |      1 |      1 |      1 |      2 |      0 |       2 |       0 |       0 |       0 |      1 |      3 |      3 |      1 |       14 |       19 |       20 |       14 |        9 |        8 |       1 |       21 |       34 |       17 |       23 |       14 |       15 |       3 |       17 |       35 |       14 |       17 |        8 |       14 |       1 |       26 |       30 |       14 |       17 |       11 |       21 |       3 |       18 |       24 |       18 |        7 |        2 |        6 |       0 |       24 |       34 |       13 |        7 |        7 |        4 |       0 |        2 |       11 |        4 |        1 |        0 |        1 |       0 |        4 |        5 |        2 |        3 |        1 |        0 |       0 |      0 |      5 |     22 |     17 |     10 |      2 |      4 |    152 |      0 |      0 |      2 |     21 |     18 |      8 |      6 |      2 |    171 |      0 |      0 |      3 |     28 |     13 |      2 |      4 |      0 |    114 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 2102100 |     621 |    231 |    243 |    12 |    0 |     7 |    4 |    2 |     9 |    0 |    113 |    0 |    0 |    0 |    0 |    280 |    341 |      17 |      12 |      11 |       2 |     16 |      7 |      9 |      5 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      1 |      5 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        9 |       18 |       12 |       20 |       11 |       20 |       8 |        9 |       17 |       14 |       18 |       32 |       32 |      11 |        8 |       20 |       15 |       12 |       12 |       31 |       7 |       10 |       17 |       16 |       20 |       21 |       37 |      17 |        7 |       23 |       10 |        3 |        6 |        4 |       1 |       13 |       12 |        8 |        8 |        8 |        8 |       2 |        6 |        3 |        3 |        7 |        2 |        2 |       0 |        0 |        5 |        1 |        1 |        1 |        3 |       0 |      0 |      2 |     28 |     31 |     15 |      5 |     12 |    138 |      0 |      0 |      0 |     26 |     24 |     15 |      6 |      8 |    164 |      0 |      0 |      1 |     10 |      7 |      3 |      2 |      1 |     89 |      0 |      0 |      1 |      2 |      5 |      1 |      1 |      0 |     24 |      0 |     37 | s03      | R    |
| 2105000 |     550 |    207 |    212 |    11 |    0 |     7 |    8 |    9 |     6 |    0 |     90 |    0 |    0 |    0 |    0 |    281 |    269 |      23 |      16 |       7 |       6 |     13 |     20 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |     10 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      1 |      0 |        3 |        8 |       17 |       23 |       12 |       17 |      17 |        4 |       15 |       20 |       16 |       19 |       22 |      14 |        9 |       11 |       18 |       20 |       16 |       19 |      16 |        4 |        7 |       12 |       20 |       15 |       26 |      19 |        3 |       12 |       14 |        7 |        7 |        2 |       0 |        7 |        7 |        8 |       12 |        2 |        7 |       2 |        3 |        5 |        6 |        7 |        4 |        5 |       0 |        0 |        2 |        3 |        5 |        1 |        0 |       0 |      0 |      2 |     20 |     20 |     10 |      7 |     11 |    137 |      0 |      0 |      0 |     17 |     30 |      8 |      6 |     10 |    141 |      0 |      0 |      1 |     11 |      3 |      3 |      4 |      0 |     68 |      0 |      0 |      0 |      8 |      8 |      0 |      0 |      1 |     24 |      0 |     37 | s03      | R    |
| 2107000 |     453 |    176 |    188 |     8 |    0 |    10 |    6 |    2 |     5 |    0 |     58 |    0 |    0 |    0 |    0 |    231 |    222 |       9 |      13 |       1 |       4 |      7 |      5 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        3 |        8 |       13 |       23 |       11 |       16 |      10 |        4 |        6 |       12 |       19 |       18 |       17 |      16 |        6 |        7 |       16 |       18 |       18 |       21 |       8 |        3 |        7 |       11 |       17 |       12 |       25 |      19 |        5 |        1 |        8 |        8 |        3 |        4 |       2 |        3 |        6 |        7 |        3 |        2 |        4 |       2 |        3 |        3 |        7 |        3 |        1 |        5 |       0 |        1 |        2 |        2 |        3 |        0 |        1 |       0 |      0 |      0 |     12 |     24 |     11 |      6 |      4 |    119 |      0 |      0 |      2 |     15 |     31 |      7 |      9 |     13 |    111 |      0 |      0 |      0 |      2 |      4 |      9 |      1 |      0 |     42 |      0 |      0 |      0 |      3 |     10 |      1 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 2110000 |     361 |    128 |    155 |     3 |    0 |     4 |    1 |    2 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    170 |    191 |      14 |       5 |       1 |       2 |      8 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        3 |        8 |       12 |       11 |       11 |       9 |        4 |        6 |       12 |       15 |        5 |       17 |      12 |        1 |        3 |       23 |       13 |        8 |       17 |      10 |        0 |        4 |       18 |        9 |        8 |       19 |      22 |        4 |        3 |       11 |        3 |        5 |        5 |       3 |        5 |        8 |        8 |        6 |        3 |        3 |       0 |        0 |        1 |        1 |        0 |        0 |        2 |       0 |        0 |        2 |        2 |        1 |        1 |        1 |       0 |      0 |      1 |     12 |     19 |      7 |      1 |      9 |     79 |      0 |      0 |      0 |     13 |     17 |     15 |      4 |      6 |    100 |      0 |      0 |      0 |      8 |     12 |      4 |      3 |      1 |     39 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 2110100 |     310 |    114 |    142 |     3 |    0 |     3 |    2 |    0 |     1 |    0 |     45 |    0 |    0 |    0 |    0 |    137 |    173 |      15 |       3 |       1 |       0 |      7 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        8 |       11 |        5 |        4 |       12 |      10 |        3 |        5 |       10 |        9 |        9 |       20 |       7 |        1 |        4 |       25 |        8 |        6 |       11 |       7 |        3 |        5 |       12 |       10 |        7 |       22 |      21 |        3 |        1 |        3 |        4 |        3 |        5 |       0 |        3 |        5 |        8 |        3 |        4 |        3 |       0 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        2 |       0 |      0 |      0 |     11 |     12 |      7 |      1 |      3 |     80 |      0 |      0 |      0 |     11 |     15 |      8 |      9 |      6 |     93 |      0 |      0 |      1 |     10 |      7 |      1 |      2 |      0 |     24 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 2112000 |     285 |    100 |    135 |     5 |    0 |     3 |    3 |    0 |     3 |    0 |     36 |    0 |    0 |    0 |    0 |    133 |    152 |      14 |       0 |       2 |       2 |      4 |      8 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        4 |       11 |        8 |        9 |       6 |        4 |        4 |        7 |       10 |        9 |       12 |      11 |        4 |        5 |       15 |       16 |        6 |       11 |      11 |        4 |        5 |       11 |       13 |        6 |       16 |      12 |        2 |        1 |        5 |        1 |        1 |        0 |       4 |        3 |        6 |        2 |        6 |        3 |        0 |       2 |        1 |        2 |        2 |        0 |        1 |        1 |       1 |        0 |        2 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      9 |      6 |      4 |      8 |      4 |     69 |      0 |      0 |      1 |     12 |     17 |      3 |      3 |      7 |     92 |      0 |      0 |      1 |      2 |      5 |      0 |      1 |      0 |     27 |      0 |      0 |      0 |      3 |      3 |      1 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 2114000 |     651 |    239 |    230 |    16 |    0 |    13 |    9 |    4 |    12 |    0 |    128 |    0 |    0 |    0 |    0 |    337 |    314 |      24 |      13 |      10 |       4 |     14 |      6 |      8 |      3 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       1 |       2 |       1 |       0 |      2 |      1 |      2 |      0 |        5 |       20 |       17 |       22 |       21 |       14 |      13 |        7 |       14 |       22 |       25 |       22 |       22 |      15 |        8 |       15 |       27 |       20 |       23 |       22 |       7 |        4 |       21 |       12 |       20 |       18 |       17 |      16 |       13 |       16 |       17 |       18 |        5 |        3 |       1 |       11 |       12 |       14 |       10 |        4 |        3 |       1 |        3 |        6 |        5 |       11 |        2 |        3 |       0 |        3 |        4 |        5 |        8 |        1 |        3 |       0 |      0 |      2 |     22 |     30 |     11 |      8 |     10 |    156 |      0 |      0 |      3 |     28 |     26 |      9 |      8 |     12 |    144 |      0 |      0 |      3 |     21 |      7 |      5 |      1 |      1 |     90 |      0 |      0 |      1 |      4 |     14 |      0 |      2 |      0 |     33 |      0 |     37 | s03      | R    |
| 2118000 |     432 |    169 |    167 |     8 |    0 |     2 |    7 |    0 |     2 |    0 |     77 |    0 |    0 |    0 |    0 |    219 |    213 |      18 |      10 |       3 |       3 |      8 |      6 |      6 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      2 |      0 |        8 |        6 |       15 |       14 |        7 |       11 |      12 |        3 |       12 |       17 |       24 |       12 |       10 |      18 |        4 |       11 |       18 |       19 |       14 |       17 |       5 |        5 |        3 |       18 |       15 |       11 |       15 |      12 |        4 |        6 |       11 |       13 |        8 |        2 |       3 |        2 |       11 |        7 |        5 |        5 |        0 |       0 |        1 |        2 |        3 |        2 |        2 |        1 |       0 |        1 |        4 |        0 |        2 |        0 |        1 |       0 |      0 |      2 |     19 |     17 |      8 |      5 |      4 |    114 |      0 |      0 |      2 |     19 |     34 |      5 |      5 |      7 |     95 |      0 |      0 |      1 |     10 |      4 |      2 |      2 |      4 |     54 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2118100 |     556 |    185 |    247 |     8 |    0 |    15 |    7 |    0 |     4 |    0 |     90 |    0 |    0 |    0 |    0 |    278 |    278 |      15 |      11 |       6 |       3 |      9 |     10 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        5 |        9 |        7 |       22 |       10 |       11 |      20 |        3 |       11 |       20 |       16 |       14 |       22 |      15 |        5 |       13 |       35 |       24 |       17 |       17 |      16 |        3 |       10 |       23 |       26 |       14 |       23 |      21 |        5 |        8 |        9 |       10 |        5 |        5 |       2 |        6 |        4 |       10 |        9 |        9 |        5 |       3 |        2 |        4 |        9 |        3 |        2 |        3 |       0 |        1 |        2 |        1 |        2 |        2 |        3 |       0 |      0 |      0 |     15 |     14 |      7 |      6 |      7 |    136 |      0 |      0 |      0 |     23 |     45 |     11 |     14 |     10 |    144 |      0 |      0 |      2 |     11 |      6 |      6 |      2 |      2 |     61 |      0 |      0 |      0 |      2 |     16 |      2 |      1 |      1 |     12 |      0 |     37 | s03      | R    |
| 2120000 |     341 |    103 |    171 |     5 |    0 |     3 |    2 |    0 |     3 |    0 |     54 |    0 |    0 |    0 |    0 |    167 |    174 |       8 |       3 |       3 |       0 |      4 |      5 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        3 |        5 |       10 |        5 |        7 |        5 |       5 |        2 |        6 |       10 |       14 |       11 |        7 |      13 |        4 |        7 |       13 |       17 |       14 |       17 |      17 |        4 |        4 |       16 |       15 |        9 |       22 |      12 |        4 |        4 |        8 |        6 |        5 |        2 |       1 |        0 |        8 |        8 |        4 |        1 |        2 |       1 |        2 |        1 |        1 |        2 |        2 |        0 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      2 |     15 |     13 |      5 |      2 |      7 |     59 |      0 |      0 |      0 |     18 |     23 |      9 |      7 |      9 |    105 |      0 |      0 |      0 |      7 |      2 |      5 |      2 |      3 |     35 |      0 |      0 |      1 |      1 |      2 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 2121000 |     439 |    156 |    177 |     6 |    0 |     6 |    4 |    1 |     5 |    0 |     84 |    0 |    0 |    0 |    0 |    211 |    228 |      16 |       9 |       5 |       0 |     14 |      5 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      4 |      2 |      0 |      0 |        1 |        6 |       16 |       14 |        6 |       16 |      11 |        1 |       12 |       15 |       15 |       14 |       18 |      11 |        3 |       12 |       15 |       15 |       11 |       17 |      13 |        2 |       10 |       12 |       14 |        4 |       35 |      14 |        3 |        8 |        9 |       12 |        2 |        6 |       0 |        4 |        9 |       13 |        9 |        4 |        4 |       1 |        3 |        4 |        1 |        3 |        2 |        2 |       0 |        2 |        1 |        1 |        3 |        0 |        0 |       0 |      0 |      2 |     28 |     29 |      2 |      6 |      5 |     84 |      0 |      0 |      0 |     19 |     31 |      5 |     13 |      3 |    106 |      0 |      0 |      0 |     19 |     11 |      3 |      3 |      3 |     45 |      0 |      0 |      0 |      4 |      4 |      1 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 2123000 |     354 |    131 |    142 |     7 |    0 |     3 |    3 |    0 |     3 |    0 |     65 |    0 |    0 |    0 |    0 |    159 |    195 |      16 |       3 |       3 |       0 |      8 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      5 |      0 |      0 |        0 |        2 |       10 |       12 |        5 |        8 |       9 |        2 |        9 |       14 |       19 |       11 |       13 |      17 |        0 |        3 |       12 |       11 |       15 |       12 |      16 |        5 |        5 |       10 |        6 |        8 |       19 |      20 |        6 |        6 |       11 |        5 |        2 |        4 |       1 |        3 |       13 |        8 |        1 |        0 |        5 |       0 |        1 |        2 |        2 |        2 |        0 |        2 |       0 |        2 |        1 |        0 |        1 |        0 |        3 |       0 |      0 |      2 |     10 |     20 |      6 |      1 |      5 |     87 |      0 |      0 |      1 |     16 |     19 |      6 |      2 |      6 |     92 |      0 |      0 |      0 |     11 |      7 |      2 |      0 |      0 |     45 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2125000 |     282 |     98 |    115 |     8 |    0 |     2 |    7 |    0 |     3 |    0 |     49 |    0 |    0 |    0 |    0 |    130 |    152 |       7 |       5 |       6 |       2 |      4 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       1 |       0 |      0 |      1 |      0 |      0 |        1 |       13 |        6 |        5 |        5 |        3 |       4 |        3 |        9 |        7 |       16 |        8 |       13 |       5 |        2 |       12 |       13 |        9 |        9 |        6 |       4 |        3 |       10 |       11 |       14 |        6 |       10 |       6 |        3 |        7 |        4 |        4 |        3 |        0 |       1 |        2 |        9 |        9 |        1 |        3 |        2 |       1 |        3 |        7 |        4 |        1 |        1 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |     25 |      6 |      5 |      1 |      1 |     60 |      0 |      0 |      1 |     13 |      9 |      3 |      3 |      5 |     81 |      0 |      0 |      0 |      8 |      3 |      0 |      0 |      0 |     38 |      0 |      0 |      1 |      7 |      6 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2125100 |     413 |    166 |    148 |    13 |    0 |     6 |    3 |    4 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    172 |    241 |      10 |       5 |       5 |       3 |      7 |      8 |      3 |      2 |      2 |      1 |      1 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        4 |        7 |        8 |       11 |        5 |       21 |       0 |        0 |       22 |        9 |       18 |       16 |       44 |       1 |        7 |       13 |        9 |        9 |        8 |       23 |       1 |        3 |       12 |        9 |        5 |       10 |       38 |       1 |        2 |        5 |        8 |        3 |        3 |        9 |       0 |        4 |       12 |        7 |        4 |        2 |       12 |       0 |        0 |        6 |        2 |        2 |        1 |        5 |       0 |        1 |        0 |        2 |        4 |        0 |        5 |       0 |      0 |      1 |     22 |     25 |      3 |      4 |      5 |    106 |      0 |      0 |      2 |     24 |     26 |     10 |      3 |      2 |     81 |      0 |      0 |      0 |     11 |      6 |      1 |      3 |      2 |     48 |      0 |      0 |      0 |      4 |      6 |      1 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 2127000 |     258 |     74 |    113 |     2 |    0 |     4 |    3 |    1 |     3 |    0 |     58 |    0 |    0 |    0 |    0 |    133 |    125 |      11 |       7 |       8 |       1 |      4 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        5 |        5 |        9 |        4 |        6 |       1 |        2 |        9 |        9 |        7 |        9 |        6 |       1 |        3 |       15 |       12 |       13 |       10 |        4 |       2 |        5 |       17 |        9 |        7 |        8 |        6 |       2 |        4 |       15 |        5 |        5 |        2 |        2 |       0 |        2 |       11 |        4 |        3 |        1 |        3 |       1 |        2 |        7 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     10 |     12 |      1 |      0 |      0 |     51 |      0 |      0 |      2 |     19 |     19 |      3 |      1 |      3 |     66 |      0 |      0 |      0 |      8 |      6 |      0 |      2 |      2 |     40 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 2127100 |     207 |     72 |     77 |     2 |    0 |     2 |    1 |    0 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |     96 |    111 |       6 |       9 |       9 |       0 |      3 |      4 |      2 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        9 |        5 |        2 |        6 |       4 |        3 |        4 |       10 |        8 |        5 |        7 |       6 |        3 |        5 |       11 |        6 |        6 |        6 |       4 |        4 |        8 |       10 |        2 |        1 |        5 |       6 |        6 |        3 |        7 |        2 |        0 |        2 |       2 |        3 |        5 |       13 |        5 |        2 |        1 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |      7 |      8 |      1 |      2 |      1 |     53 |      0 |      0 |      0 |     10 |     10 |      3 |      0 |      0 |     54 |      0 |      0 |      2 |      6 |      3 |      2 |      0 |      2 |     36 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 2127500 |     364 |    115 |    147 |     9 |    0 |     4 |    6 |    2 |     4 |    0 |     77 |    0 |    0 |    0 |    0 |    163 |    201 |      19 |      14 |       7 |       1 |      3 |      4 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      2 |      3 |      0 |        8 |        8 |        7 |        6 |        2 |       10 |       1 |        5 |       15 |       10 |        8 |       12 |       19 |       4 |        4 |        7 |       17 |       19 |        6 |       12 |       3 |        6 |        9 |       11 |       14 |       10 |       27 |       2 |        8 |        8 |        7 |        8 |        1 |        6 |       0 |        7 |       14 |        4 |        4 |        3 |        6 |       1 |        3 |        2 |        6 |        2 |        1 |        1 |       0 |        4 |        1 |        2 |        0 |        1 |        2 |       0 |      0 |      0 |     15 |     20 |      0 |      5 |      3 |     72 |      0 |      0 |      1 |     10 |     12 |      7 |      3 |      8 |    106 |      0 |      0 |      0 |     11 |      4 |      0 |      0 |      0 |     62 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 2130000 |     337 |    124 |    131 |     4 |    0 |     2 |    3 |    0 |     1 |    0 |     72 |    0 |    0 |    0 |    0 |    144 |    193 |       2 |       6 |       6 |       0 |      8 |      2 |      3 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        6 |        4 |        9 |        5 |       10 |       6 |        4 |       17 |        4 |       15 |        8 |       28 |       7 |        3 |       14 |        7 |        6 |        9 |       13 |       5 |        4 |        9 |       12 |       14 |        8 |       24 |       3 |        3 |       10 |       10 |       11 |        1 |        3 |       1 |        2 |       10 |        9 |        4 |        2 |        5 |       1 |        0 |        4 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      1 |     14 |     20 |      8 |      5 |      4 |     72 |      0 |      0 |      0 |     16 |     13 |      6 |      3 |      9 |     84 |      0 |      0 |      2 |      4 |      9 |      1 |      1 |      0 |     55 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2130100 |     258 |     85 |    117 |     3 |    0 |     6 |    5 |    3 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |    128 |    130 |      16 |       5 |       1 |       1 |      4 |      6 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        0 |        4 |        8 |        9 |        6 |        5 |       9 |        1 |        4 |        8 |        7 |        7 |        6 |      11 |        2 |        6 |       11 |       15 |        8 |       16 |       3 |        3 |        4 |        7 |       14 |        8 |       11 |       9 |        5 |        4 |        4 |        1 |        3 |        0 |       0 |        3 |        3 |        4 |        5 |        5 |        1 |       0 |        1 |        1 |        3 |        1 |        1 |        2 |       0 |        0 |        0 |        3 |        2 |        0 |        4 |       0 |      0 |      1 |      5 |      5 |      2 |      1 |      3 |     68 |      0 |      0 |      0 |     14 |     12 |     10 |      4 |      7 |     70 |      0 |      0 |      1 |      1 |      2 |      1 |      1 |      2 |     30 |      0 |      0 |      0 |      1 |      8 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 2130200 |     470 |    176 |    194 |     4 |    0 |     2 |    4 |    1 |     5 |    0 |     84 |    0 |    0 |    0 |    0 |    226 |    244 |      12 |       6 |       6 |       0 |      9 |     13 |     10 |      1 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      2 |      0 |        4 |       10 |       11 |       10 |       14 |       18 |       6 |        2 |       17 |       15 |       16 |       22 |       24 |       7 |        7 |       19 |       19 |       15 |       19 |       16 |       8 |        4 |       20 |       10 |       15 |       15 |       16 |      11 |        6 |        3 |        9 |        5 |       10 |        6 |       1 |        9 |       14 |        4 |        7 |        4 |        5 |       1 |        0 |        2 |        1 |        3 |        3 |        1 |       0 |        0 |        3 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |     24 |     26 |      6 |      5 |      3 |    112 |      0 |      0 |      2 |     23 |     24 |     13 |      8 |      6 |    118 |      0 |      0 |      0 |      8 |      9 |      0 |      0 |      1 |     66 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 2131000 |     254 |     89 |    118 |     2 |    0 |     4 |    1 |    1 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |    119 |    135 |       7 |       6 |       1 |       0 |     10 |      6 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |       10 |        4 |        2 |        7 |       6 |        1 |        8 |        9 |       10 |        4 |       11 |      13 |        6 |        8 |        9 |        8 |        9 |       12 |       8 |        2 |        5 |       11 |       10 |        7 |       13 |      10 |        1 |        4 |        2 |        6 |        3 |        5 |       0 |        3 |        2 |        2 |        5 |        2 |        0 |       3 |        1 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |     13 |      7 |      4 |      2 |      3 |     59 |      0 |      0 |      0 |     17 |     15 |      1 |      6 |      0 |     79 |      0 |      0 |      0 |      5 |      6 |      3 |      0 |      1 |     23 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2131100 |     318 |    113 |    134 |     4 |    0 |     3 |    3 |    1 |     3 |    0 |     57 |    0 |    0 |    0 |    0 |    151 |    167 |      11 |       6 |      10 |       3 |      5 |      6 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        4 |        4 |        5 |        7 |       13 |       8 |        2 |        6 |       15 |       11 |       10 |       13 |      11 |        1 |       11 |       18 |       10 |       15 |       10 |       7 |        3 |        4 |       11 |       10 |        7 |       14 |      13 |        2 |        4 |        4 |        8 |        5 |        2 |       0 |        6 |       10 |        4 |        5 |        5 |        2 |       0 |        0 |        6 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        3 |        1 |        0 |        0 |       1 |      0 |      0 |     13 |     18 |      1 |      4 |      2 |     75 |      0 |      0 |      2 |     14 |     13 |      6 |      8 |      3 |     88 |      0 |      0 |      0 |      5 |     11 |      1 |      2 |      2 |     36 |      0 |      0 |      0 |      1 |      4 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 2131200 |     265 |     89 |    125 |     5 |    0 |     3 |    2 |    1 |     2 |    0 |     38 |    0 |    0 |    0 |    0 |    137 |    128 |      12 |       5 |       2 |       0 |     10 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        3 |        5 |        7 |        3 |       14 |       8 |        1 |        4 |       13 |        9 |        2 |       13 |       7 |        1 |       10 |       14 |       14 |        4 |       12 |       9 |        1 |        9 |       10 |       11 |        4 |       17 |       9 |        3 |        6 |        4 |        5 |        4 |        2 |       1 |        1 |        2 |        1 |        4 |        3 |        2 |       0 |        1 |        0 |        1 |        3 |        2 |        1 |       0 |        0 |        0 |        1 |        0 |        3 |        1 |       0 |      0 |      0 |      9 |     11 |      2 |      3 |      3 |     61 |      0 |      0 |      3 |      8 |     21 |      5 |      7 |      6 |     75 |      0 |      0 |      0 |      1 |      4 |      1 |      4 |      1 |     27 |      0 |      0 |      0 |      1 |      5 |      1 |      2 |      0 |      4 |      0 |     37 | s03      | R    |
| 2133000 |     490 |    198 |    175 |     9 |    0 |     4 |    6 |    2 |     7 |    0 |     89 |    0 |    0 |    0 |    0 |    215 |    275 |      25 |       7 |       5 |       7 |      7 |     11 |      2 |      1 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      2 |      0 |        4 |        5 |       10 |       20 |        9 |       15 |      13 |        5 |       16 |       20 |       27 |       13 |       25 |      16 |        2 |       16 |       13 |       32 |        9 |        9 |       7 |        8 |        9 |       14 |       18 |        8 |       15 |      15 |        9 |       10 |        9 |        2 |        2 |        2 |       3 |        7 |       22 |       13 |        5 |        1 |        3 |       1 |        0 |        5 |        3 |        3 |        1 |        2 |       0 |        1 |        4 |        4 |        4 |        1 |        0 |       0 |      0 |      1 |     28 |     25 |      5 |      5 |      5 |    129 |      0 |      0 |      0 |     23 |     19 |      9 |      6 |     15 |    103 |      0 |      0 |      1 |     17 |      4 |      2 |      1 |      2 |     62 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 2137000 |     610 |    204 |    172 |    23 |    0 |     5 |    3 |    0 |    11 |    0 |    192 |    0 |    0 |    0 |    0 |    267 |    343 |      22 |       9 |      18 |       4 |     13 |     11 |      7 |      2 |      3 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      4 |      1 |      3 |      0 |       11 |       25 |       16 |       12 |        7 |        4 |       0 |       22 |       50 |       14 |       24 |       10 |        8 |       1 |       16 |       35 |       17 |        6 |        5 |        5 |       0 |       17 |       28 |       12 |       16 |        6 |        9 |       0 |       24 |       34 |       12 |        9 |        1 |        4 |       0 |       27 |       45 |       20 |        8 |        2 |        6 |       0 |        3 |       13 |        4 |        4 |        0 |        0 |       0 |        7 |        5 |        3 |        2 |        0 |        1 |       0 |      0 |      1 |     20 |      7 |      4 |      4 |      1 |    167 |      0 |      0 |      0 |     15 |      5 |      3 |      1 |      1 |    147 |      0 |      0 |      1 |     13 |      5 |      1 |      1 |      0 |    171 |      0 |      0 |      1 |      6 |      4 |      1 |      0 |      0 |     30 |      0 |     37 | s03      | R    |
| 2137100 |     226 |     58 |     71 |     6 |    0 |     4 |    1 |    0 |     1 |    0 |     85 |    0 |    0 |    0 |    0 |    106 |    120 |       8 |       7 |       7 |       0 |      3 |      3 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      1 |        6 |        8 |        3 |        1 |        1 |        1 |       0 |       10 |       10 |        8 |        5 |        2 |        3 |       0 |        9 |       14 |        4 |        4 |        6 |        3 |       1 |        9 |       10 |        4 |        2 |        2 |        3 |       0 |       10 |       19 |        5 |        2 |        0 |        0 |       0 |       18 |       22 |        4 |        4 |        1 |        0 |       0 |        2 |        4 |        2 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      4 |      3 |      0 |      1 |      0 |     49 |      0 |      0 |      3 |      6 |      4 |      1 |      0 |      1 |     56 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     78 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 2139000 |     313 |    124 |    112 |     8 |    0 |     3 |    4 |    0 |     3 |    0 |     59 |    0 |    0 |    0 |    0 |    149 |    164 |      16 |       4 |       6 |       1 |      3 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        4 |        1 |       11 |       10 |        7 |        8 |       8 |        3 |        7 |       10 |       18 |        7 |       20 |      10 |        4 |        6 |       11 |       13 |        8 |        7 |       4 |        5 |        6 |        9 |       14 |        5 |       13 |       7 |        6 |        4 |        6 |        8 |        7 |        3 |       0 |        0 |        9 |        6 |        6 |        2 |        1 |       1 |        1 |        8 |        1 |        1 |        0 |        2 |       0 |        1 |        1 |        0 |        1 |        0 |        2 |       0 |      0 |      0 |     14 |     19 |      3 |      3 |      3 |     82 |      0 |      0 |      1 |     21 |     14 |      7 |      4 |      4 |     61 |      0 |      0 |      0 |      9 |      7 |      3 |      0 |      4 |     36 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2143000 |     326 |     97 |    153 |     7 |    0 |     5 |    1 |    1 |     2 |    0 |     60 |    0 |    0 |    0 |    0 |    155 |    171 |       8 |       8 |       4 |       0 |      7 |     12 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      2 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      1 |        3 |        2 |        6 |       10 |       10 |        3 |       5 |        1 |        4 |        4 |       17 |       17 |        9 |       6 |        2 |        8 |       10 |       17 |       17 |       17 |       8 |        3 |        4 |       15 |       19 |        4 |       17 |      12 |        2 |        7 |        7 |        9 |        1 |        2 |       2 |        1 |        7 |        8 |        8 |        3 |        3 |       0 |        1 |        2 |        1 |        2 |        0 |        0 |       1 |        1 |        3 |        3 |        1 |        1 |        0 |       0 |      0 |      0 |     14 |     11 |      5 |      7 |      2 |     58 |      0 |      0 |      0 |     15 |     18 |      5 |      9 |      2 |    104 |      0 |      0 |      1 |     10 |      9 |      2 |      1 |      0 |     37 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2143100 |     503 |    172 |    216 |     8 |    0 |     9 |    7 |    4 |     4 |    0 |     83 |    0 |    0 |    0 |    0 |    230 |    273 |      10 |      12 |       5 |       2 |      7 |      9 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      3 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        6 |        3 |       15 |       18 |        6 |        9 |      12 |        3 |       11 |       26 |       28 |        7 |       14 |      14 |        4 |        9 |       19 |       18 |       12 |       20 |      18 |        2 |       17 |       24 |       14 |       17 |       26 |      16 |        5 |        9 |       13 |        5 |        6 |        2 |       2 |        7 |       10 |       11 |        8 |        2 |        3 |       0 |        1 |        5 |        7 |        2 |        3 |        1 |       0 |        1 |        2 |        2 |        2 |        4 |        2 |       0 |      0 |      1 |     15 |     30 |     10 |      5 |     10 |    101 |      0 |      0 |      0 |     18 |     25 |     10 |     10 |     11 |    142 |      0 |      0 |      0 |     10 |     10 |      6 |      2 |      2 |     53 |      0 |      0 |      0 |      3 |      7 |      1 |      2 |      0 |     19 |      0 |     37 | s03      | R    |
| 2200000 |     697 |    236 |    228 |    26 |    0 |     5 |    5 |    2 |    12 |    0 |    183 |    0 |    0 |    0 |    0 |    335 |    362 |      33 |      25 |      20 |       4 |      9 |      9 |      5 |      2 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      1 |      3 |      1 |      0 |      2 |      0 |      1 |      1 |       1 |       3 |       3 |       0 |      4 |      4 |      0 |      1 |       13 |       38 |       15 |       22 |        6 |        7 |       2 |       32 |       50 |       12 |       15 |       13 |        6 |       5 |       15 |       46 |       29 |       16 |       12 |        6 |       1 |       22 |       42 |       20 |        9 |        2 |        5 |       3 |       15 |       34 |       12 |        8 |        5 |        2 |       0 |       37 |       38 |       13 |        7 |        8 |        4 |       0 |        8 |       16 |        1 |        1 |        3 |        2 |       0 |        3 |        9 |        4 |        3 |        0 |        0 |       0 |      0 |      1 |     22 |     21 |      6 |      1 |      1 |    184 |      0 |      0 |      0 |     19 |     11 |      4 |      5 |      3 |    186 |      0 |      0 |      2 |     18 |      9 |      0 |      0 |      0 |    154 |      0 |      0 |      0 |      8 |      5 |      0 |      0 |      0 |     37 |      0 |     37 | s03      | R    |
| 2200500 |      35 |      9 |     10 |     2 |    0 |     0 |    0 |    0 |     4 |    0 |     10 |    0 |    0 |    0 |    0 |     25 |     10 |       3 |       1 |       2 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        3 |        0 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        2 |        0 |        3 |        0 |        0 |        2 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        5 |        1 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2202000 |     408 |    130 |    156 |    10 |    0 |     1 |    2 |    0 |    10 |    0 |     99 |    0 |    0 |    0 |    0 |    188 |    220 |      14 |      13 |      12 |       2 |      9 |      6 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        7 |       21 |        9 |       10 |        4 |        2 |       1 |        7 |       34 |       10 |       12 |        6 |        4 |       3 |       10 |       32 |       16 |        5 |        3 |        2 |       2 |       14 |       39 |       15 |        6 |        5 |        5 |       2 |        2 |       27 |        9 |        7 |        2 |        2 |       0 |       12 |       23 |        8 |        4 |        2 |        1 |       0 |        1 |        5 |        8 |        1 |        0 |        0 |       0 |        0 |        6 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      9 |     14 |      3 |      3 |      1 |    100 |      0 |      0 |      0 |     15 |      9 |      3 |      2 |      0 |    127 |      0 |      0 |      0 |      9 |      3 |      1 |      2 |      1 |     83 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 2203000 |     323 |    113 |    143 |     3 |    0 |     5 |    2 |    1 |     2 |    0 |     54 |    0 |    0 |    0 |    0 |    167 |    156 |       7 |       9 |       2 |       0 |      8 |     11 |      4 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       2 |       0 |      2 |      1 |      0 |      2 |        2 |       10 |        9 |       12 |        8 |       10 |       3 |        4 |       12 |        6 |        8 |       13 |        9 |       7 |        2 |        8 |       19 |       13 |       10 |       19 |       6 |        4 |       11 |        8 |        8 |       14 |       15 |       6 |        3 |       11 |        6 |        2 |        3 |        4 |       2 |        1 |        2 |        6 |        4 |        3 |        7 |       0 |        0 |        0 |        1 |        3 |        0 |        1 |       0 |        1 |        1 |        1 |        3 |        1 |        1 |       0 |      0 |      0 |     10 |     15 |      6 |      3 |      5 |     74 |      0 |      0 |      0 |      7 |     26 |      5 |      4 |     11 |     90 |      0 |      0 |      0 |      4 |      5 |      3 |      2 |      0 |     40 |      0 |      0 |      0 |      3 |      5 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 2203100 |     318 |    104 |    130 |     4 |    0 |     4 |    0 |    1 |     5 |    0 |     70 |    0 |    0 |    0 |    0 |    151 |    167 |       6 |       3 |       0 |       1 |      6 |      5 |      6 |      3 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      1 |      2 |      0 |      0 |        3 |        8 |        7 |        9 |        3 |       10 |      11 |        4 |       15 |        5 |        7 |        9 |        9 |       4 |        4 |       12 |       16 |       11 |        5 |        9 |       3 |        3 |       11 |        9 |        8 |       12 |       16 |      11 |        1 |       11 |        8 |        2 |        5 |        4 |       0 |        8 |       11 |        3 |        5 |        5 |        5 |       2 |        0 |        1 |        2 |        1 |        1 |        4 |       0 |        0 |        3 |        1 |        0 |        0 |        1 |       0 |      0 |      1 |     11 |     16 |      1 |      2 |      1 |     72 |      0 |      0 |      1 |     24 |     15 |      4 |      4 |      1 |     81 |      0 |      0 |      0 |      6 |      6 |      2 |      0 |      0 |     56 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2204000 |     395 |    113 |    207 |     4 |    0 |     6 |    2 |    1 |     1 |    0 |     61 |    0 |    0 |    0 |    0 |    197 |    198 |       1 |       4 |       4 |       0 |     16 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        5 |        9 |        8 |        8 |       14 |       9 |        0 |        4 |        7 |       14 |       12 |       16 |       7 |        5 |        6 |       16 |       13 |       16 |       26 |      15 |        8 |        5 |       14 |       12 |       20 |       30 |      21 |        5 |        8 |        4 |        8 |        5 |        6 |       1 |        1 |        3 |        8 |        9 |        0 |        3 |       0 |        2 |        1 |        1 |        1 |        3 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        2 |       0 |      0 |      0 |      9 |     17 |      9 |      1 |      2 |     75 |      0 |      0 |      0 |     17 |     33 |     10 |      6 |      5 |    136 |      0 |      0 |      0 |     12 |     10 |      0 |      5 |      1 |     33 |      0 |      0 |      0 |      1 |      7 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 2204900 |     113 |     41 |     53 |     1 |    0 |     2 |    1 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     52 |     61 |       0 |       0 |       0 |       0 |     15 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        1 |        3 |        1 |        2 |       4 |        5 |        2 |        2 |        4 |        4 |        3 |       6 |        2 |        5 |        2 |        6 |        1 |        6 |       4 |        2 |        0 |        4 |        5 |        4 |        8 |       4 |        0 |        1 |        1 |        2 |        2 |        2 |       0 |        1 |        1 |        1 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      0 |      6 |      1 |     27 |      0 |      0 |      0 |      5 |      8 |      2 |      1 |      5 |     32 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2205000 |     270 |     85 |    137 |     5 |    0 |     0 |   11 |    0 |     1 |    0 |     31 |    0 |    0 |    0 |    0 |    128 |    142 |       3 |       2 |       0 |       1 |     11 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        5 |        7 |        5 |        9 |       3 |        3 |        4 |        6 |       12 |       10 |        9 |       9 |        3 |        4 |       10 |       12 |        6 |       23 |      14 |        0 |        3 |        9 |        8 |        9 |       15 |      21 |        1 |        2 |        1 |        4 |        2 |        3 |       1 |        2 |        2 |        2 |        4 |        3 |        3 |       1 |        4 |        1 |        2 |        2 |        1 |        0 |       0 |        1 |        1 |        3 |        0 |        1 |        1 |       0 |      0 |      0 |      8 |     10 |      8 |      2 |      4 |     53 |      0 |      0 |      0 |      6 |     16 |      3 |      2 |      9 |    101 |      0 |      0 |      0 |      4 |      7 |      2 |      0 |      0 |     18 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 2205100 |     302 |    112 |    142 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    127 |    175 |       3 |       2 |       1 |       1 |     15 |      7 |      5 |      1 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        0 |        5 |        4 |        6 |       22 |       1 |        1 |        2 |        9 |        5 |       11 |       36 |       9 |        0 |        2 |        6 |        5 |        7 |       39 |       5 |        0 |        2 |        4 |        7 |       19 |       34 |      12 |        1 |        3 |        1 |        2 |        3 |       11 |       1 |        2 |        1 |        1 |        2 |        5 |       10 |       2 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |      9 |     16 |      6 |      4 |      3 |     73 |      0 |      0 |      0 |     10 |     20 |      6 |      9 |     11 |     86 |      0 |      0 |      0 |      8 |      6 |      0 |      1 |      3 |     27 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2205200 |     211 |     52 |    120 |     3 |    0 |     2 |    0 |    0 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |    105 |    106 |       4 |       2 |       2 |       0 |      6 |      7 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        1 |        2 |        7 |        5 |        6 |       2 |        0 |        1 |        4 |        3 |        8 |        8 |       5 |        3 |        1 |        6 |       11 |       16 |       23 |       1 |        5 |        5 |        5 |        7 |       17 |       19 |       1 |        4 |        0 |        3 |        4 |        3 |        3 |       0 |        2 |        3 |        2 |        5 |        1 |        3 |       0 |        1 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      6 |      6 |      3 |      3 |      1 |     33 |      0 |      0 |      0 |     13 |     17 |      7 |     10 |      6 |     67 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      1 |     21 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 2207000 |     418 |    150 |    212 |     7 |    0 |     2 |    0 |    1 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |    137 |    281 |       1 |       3 |       1 |       1 |     24 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        2 |        2 |        2 |        5 |       32 |       6 |        1 |        3 |        4 |        3 |        6 |       77 |       7 |        0 |        2 |        7 |        2 |        5 |       42 |      11 |        0 |        0 |        3 |        3 |        3 |      124 |      10 |        0 |        1 |        1 |        2 |        3 |       10 |       1 |        0 |        1 |        0 |        0 |        1 |       26 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        7 |       0 |      0 |      0 |     21 |     24 |      8 |      4 |      4 |     89 |      0 |      0 |      1 |     33 |     17 |      6 |     13 |      5 |    137 |      0 |      0 |      0 |     11 |      7 |      1 |      1 |      0 |     26 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2208000 |     479 |    155 |    237 |     3 |    0 |     3 |    5 |    0 |     4 |    0 |     72 |    0 |    0 |    0 |    0 |    245 |    234 |       5 |       7 |       2 |       0 |     23 |     13 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      3 |      1 |      0 |        3 |        9 |        6 |       13 |       23 |       12 |       7 |        5 |        5 |       10 |       18 |       18 |       16 |      10 |        3 |       18 |       20 |       23 |       12 |       26 |      20 |        2 |       14 |       14 |       15 |       13 |       24 |      33 |        9 |        5 |        1 |        9 |       10 |        7 |       2 |        8 |        4 |        3 |        6 |        2 |        5 |       1 |        0 |        0 |        2 |        2 |        2 |        1 |       0 |        0 |        2 |        1 |        3 |        1 |        1 |       0 |      0 |      0 |      7 |     18 |      7 |      4 |     12 |    107 |      0 |      0 |      1 |     14 |     23 |     10 |     11 |     11 |    167 |      0 |      0 |      0 |      7 |      9 |      2 |      2 |      4 |     48 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2209000 |     406 |    107 |    198 |     8 |    0 |     4 |    4 |    0 |     0 |    0 |     85 |    0 |    0 |    0 |    0 |    167 |    239 |      11 |      19 |       6 |       2 |      6 |      9 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        5 |        5 |       10 |        7 |        3 |        4 |       0 |        5 |       22 |       12 |       11 |       11 |       10 |       2 |        7 |       25 |       30 |       18 |        4 |        6 |       1 |        2 |       29 |       51 |       15 |        3 |        6 |       1 |        4 |       11 |       12 |        7 |        1 |        2 |       0 |        9 |       16 |       13 |        7 |        0 |        3 |       0 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |        2 |        2 |        3 |        2 |        1 |        1 |       0 |      0 |      1 |     12 |      5 |      6 |      1 |      3 |     79 |      0 |      0 |      1 |     14 |     12 |      4 |      3 |      3 |    161 |      0 |      0 |      2 |      5 |      4 |      3 |      0 |      0 |     71 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2211000 |     608 |    198 |    214 |    16 |    0 |     3 |    4 |    2 |     8 |    0 |    163 |    0 |    0 |    0 |    0 |    300 |    308 |      35 |      25 |      17 |       3 |     14 |     14 |      6 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      4 |      0 |       12 |       28 |       19 |       12 |        5 |        6 |       2 |       23 |       40 |       22 |       10 |        4 |       13 |       2 |       14 |       53 |       23 |       18 |        3 |        2 |       1 |       24 |       31 |       22 |       12 |        4 |        6 |       1 |       14 |       41 |       15 |        6 |        5 |        1 |       0 |       21 |       40 |       11 |        6 |        3 |        0 |       0 |        4 |       10 |        2 |        1 |        2 |        1 |       0 |        3 |        6 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |     20 |     13 |      2 |      3 |      3 |    157 |      0 |      0 |      1 |     15 |      9 |      3 |      2 |      1 |    183 |      0 |      0 |      1 |      9 |      6 |      4 |      0 |      1 |    142 |      0 |      0 |      0 |      5 |      1 |      1 |      1 |      0 |     25 |      0 |     37 | s03      | R    |
| 2212000 |     301 |    101 |     95 |     9 |    0 |     3 |    0 |    0 |    11 |    0 |     82 |    0 |    0 |    0 |    0 |    126 |    175 |       5 |       1 |       1 |       0 |      4 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |       16 |        8 |        5 |        3 |        3 |       2 |        8 |       24 |        7 |        9 |        6 |        6 |       2 |        2 |       21 |        7 |        2 |        6 |        6 |       1 |        6 |       15 |        6 |        5 |       10 |        8 |       0 |        1 |       20 |        5 |        4 |        1 |        0 |       2 |       18 |       18 |        9 |        2 |        0 |        2 |       0 |        0 |        1 |        4 |        3 |        0 |        1 |       0 |        3 |        5 |        3 |        2 |        1 |        0 |       0 |      0 |      0 |      6 |      8 |      1 |      6 |      2 |     78 |      0 |      0 |      0 |     10 |     10 |      2 |      1 |      1 |     71 |      0 |      0 |      1 |      8 |      3 |      2 |      1 |      0 |     67 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 2212100 |     432 |    149 |    149 |     9 |    0 |     2 |    5 |    3 |    10 |    0 |    105 |    0 |    0 |    0 |    0 |    194 |    238 |       8 |       6 |       4 |       2 |     12 |      7 |      4 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |       1 |       0 |       1 |       0 |      1 |      1 |      1 |      0 |        4 |       31 |        7 |        4 |        2 |        6 |       4 |        6 |       44 |        7 |       11 |        9 |        9 |       5 |        5 |       36 |       10 |        7 |        3 |        9 |       2 |        8 |       26 |       14 |        2 |       11 |       12 |       4 |        3 |       32 |       12 |        2 |        1 |        0 |       1 |        7 |       31 |        9 |        2 |        3 |        2 |       0 |        2 |        6 |        4 |        0 |        1 |        0 |       0 |        2 |        9 |        2 |        3 |        0 |        0 |       0 |      0 |      1 |     10 |     14 |      5 |      1 |      2 |    116 |      0 |      0 |      0 |     14 |     10 |      2 |      3 |      0 |    120 |      0 |      0 |      1 |     16 |      4 |      0 |      0 |      2 |     82 |      0 |      0 |      1 |      2 |      1 |      2 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 2212200 |      56 |     17 |     24 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     25 |     31 |       0 |       2 |       0 |       0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        2 |        3 |        1 |        2 |        3 |       1 |        0 |        4 |        1 |        4 |        1 |        1 |       0 |        2 |        1 |        1 |        4 |        4 |        1 |       0 |        0 |        3 |        1 |        2 |        1 |        1 |       0 |        0 |        2 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |     12 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2213000 |     244 |     85 |     73 |    10 |    0 |     5 |    1 |    0 |     5 |    0 |     65 |    0 |    0 |    0 |    0 |    105 |    139 |       6 |       4 |       4 |       2 |      7 |      3 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        4 |       11 |        8 |        3 |        1 |        2 |       1 |       13 |       19 |        5 |        7 |        6 |        4 |       1 |        6 |       11 |        3 |        1 |        5 |        6 |       0 |       11 |       15 |        3 |        2 |        3 |        6 |       1 |        6 |       13 |        4 |        2 |        2 |        3 |       1 |       11 |       10 |        7 |        1 |        3 |        1 |       1 |        3 |        5 |        1 |        0 |        2 |        1 |       0 |        2 |        5 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     10 |      5 |      1 |      0 |      4 |     65 |      0 |      0 |      0 |     12 |     10 |      2 |      1 |      0 |     48 |      0 |      0 |      0 |     11 |      3 |      0 |      0 |      1 |     50 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 2213900 |     343 |    106 |    124 |    10 |    0 |     5 |    6 |    1 |     7 |    0 |     84 |    0 |    0 |    0 |    0 |    158 |    185 |       3 |      10 |       2 |       2 |      7 |      4 |      3 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       2 |       0 |       1 |       0 |      0 |      0 |      0 |      1 |        5 |       15 |        7 |        1 |        2 |        5 |       2 |       11 |       27 |        8 |        6 |        3 |        9 |       5 |        8 |       34 |        6 |        4 |        6 |        3 |       1 |       14 |       23 |        5 |        5 |        3 |       11 |       1 |        6 |       21 |        6 |        6 |        4 |        1 |       0 |       10 |       21 |        6 |        2 |        1 |        0 |       0 |        2 |        8 |        3 |        0 |        2 |        0 |       0 |        3 |        6 |        2 |        3 |        0 |        0 |       0 |      0 |      2 |      9 |     11 |      4 |      2 |      2 |     76 |      0 |      0 |      1 |     11 |      8 |      0 |      2 |      1 |    101 |      0 |      0 |      1 |      5 |      5 |      2 |      2 |      1 |     68 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 2214000 |     149 |     41 |     41 |     9 |    0 |     2 |    6 |    1 |     6 |    0 |     43 |    0 |    0 |    0 |    0 |     82 |     67 |       6 |       2 |       1 |       0 |      5 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        8 |        6 |        1 |        0 |        1 |       0 |        4 |        8 |        4 |        4 |        2 |        1 |       1 |        3 |       14 |        6 |        1 |        1 |        2 |       0 |        1 |        4 |        4 |        2 |        0 |        3 |       0 |        4 |       17 |        2 |        0 |        1 |        2 |       0 |        6 |        8 |        2 |        0 |        1 |        0 |       0 |        4 |        5 |        3 |        0 |        0 |        0 |       0 |        4 |        4 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |      3 |      2 |      0 |      1 |     30 |      0 |      0 |      0 |      3 |      5 |      2 |      1 |      0 |     30 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |     41 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 2214100 |     483 |    158 |    148 |    21 |    0 |     6 |    7 |    0 |    15 |    0 |    128 |    0 |    0 |    0 |    0 |    238 |    245 |      19 |      13 |      11 |       4 |      4 |      9 |      8 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      4 |      3 |      0 |      2 |        6 |       34 |        9 |        9 |        3 |        4 |       2 |       17 |       46 |       12 |        6 |        5 |        5 |       0 |        7 |       40 |       10 |        8 |        5 |        4 |       1 |       21 |       33 |        7 |        3 |        4 |        4 |       1 |       14 |       36 |        8 |        8 |        0 |        1 |       3 |       21 |       30 |        3 |        4 |        0 |        0 |       0 |        7 |       13 |        4 |        1 |        1 |        0 |       0 |        3 |       15 |        3 |        1 |        0 |        1 |       0 |      0 |      0 |     17 |     11 |      1 |      2 |      0 |    127 |      0 |      0 |      0 |     10 |      4 |      2 |      4 |      2 |    126 |      0 |      0 |      2 |      8 |      5 |      0 |      2 |      0 |    111 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     46 |      0 |     37 | s03      | R    |
| 2216000 |     657 |    186 |    223 |    24 |    0 |     5 |   15 |    4 |    14 |    0 |    186 |    0 |    0 |    0 |    0 |    305 |    352 |      11 |      10 |       3 |       1 |     13 |     12 |     13 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      2 |      0 |      0 |      1 |      1 |      1 |      0 |       1 |       1 |       0 |       1 |      2 |      1 |      5 |      0 |        5 |       30 |       19 |        9 |        3 |        4 |       0 |       22 |       50 |       19 |        7 |        5 |       10 |       3 |       11 |       52 |       18 |       14 |        4 |        8 |       2 |       12 |       65 |       16 |        7 |        3 |        5 |       6 |        9 |       48 |       15 |       11 |        5 |        4 |       0 |       17 |       55 |        9 |        5 |        5 |        3 |       0 |        5 |       16 |        5 |        5 |        2 |        1 |       0 |        3 |       13 |        4 |        5 |        1 |        2 |       0 |      0 |      0 |     18 |     16 |      3 |      3 |      1 |    145 |      0 |      0 |      1 |     14 |     16 |      3 |      7 |      4 |    178 |      0 |      0 |      1 |     15 |      7 |      2 |      0 |      0 |    161 |      0 |      0 |      0 |      8 |      4 |      1 |      0 |      0 |     49 |      0 |     37 | s03      | R    |
| 2218000 |     427 |    170 |    169 |     5 |    0 |     8 |    1 |    0 |     6 |    0 |     68 |    0 |    0 |    0 |    0 |    220 |    207 |      10 |       1 |       4 |       0 |     10 |      4 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        4 |       11 |       13 |       13 |       14 |       11 |       9 |        3 |       11 |       19 |       15 |       17 |       14 |      16 |        3 |       13 |       18 |       17 |       17 |       15 |      13 |        0 |        7 |       18 |       10 |        9 |       16 |      13 |        2 |       13 |        7 |        6 |        7 |        2 |       1 |        2 |       10 |       10 |        4 |        3 |        1 |       0 |        0 |        4 |        6 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        4 |        1 |        1 |       1 |      0 |      0 |     23 |     19 |     10 |      6 |     12 |    100 |      0 |      0 |      0 |     15 |     18 |      6 |      7 |      8 |    115 |      0 |      0 |      1 |     10 |     10 |      3 |      0 |      0 |     44 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2219000 |     373 |    129 |    128 |     9 |    0 |     8 |    4 |    0 |    12 |    0 |     83 |    0 |    0 |    0 |    0 |    174 |    199 |       6 |       4 |       3 |       0 |      6 |      4 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        5 |       11 |        7 |       15 |        6 |       10 |       3 |        7 |       20 |       11 |       17 |        4 |        9 |       4 |        4 |       15 |       12 |       11 |       10 |        5 |       2 |        3 |       27 |        8 |        3 |       10 |        6 |      12 |        6 |       16 |        7 |        6 |        3 |        1 |       0 |        5 |       21 |        8 |        5 |        3 |        1 |       1 |        1 |        8 |        4 |        4 |        0 |        2 |       0 |        2 |        7 |        0 |        4 |        1 |        0 |       0 |      0 |      0 |     15 |     15 |      7 |      2 |      1 |     89 |      0 |      0 |      1 |      8 |     12 |      3 |      0 |      2 |    102 |      0 |      0 |      1 |     10 |      6 |      2 |      0 |      1 |     63 |      0 |      0 |      1 |      5 |      7 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 2219200 |     149 |     52 |     68 |     2 |    0 |     3 |    8 |    1 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     66 |     83 |       3 |       0 |       1 |       0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        2 |        4 |        3 |        2 |        4 |       7 |        3 |        6 |        4 |        1 |        3 |        5 |       8 |        1 |        6 |        9 |        2 |        3 |        7 |       1 |        6 |        3 |        6 |        2 |        8 |        8 |       6 |        1 |        5 |        4 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        0 |        0 |        1 |       1 |        0 |        3 |        1 |        0 |        0 |        1 |       0 |        1 |        7 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      4 |      6 |      2 |      2 |      0 |     38 |      0 |      0 |      0 |      8 |      9 |      1 |      0 |      3 |     47 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 2220000 |    1047 |    315 |    387 |    38 |    0 |     6 |   12 |    2 |    19 |    0 |    268 |    0 |    0 |    0 |    0 |    543 |    504 |      23 |      12 |      16 |       1 |     25 |     23 |     17 |      3 |      2 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |      3 |      3 |      0 |       0 |       0 |       1 |       1 |      1 |      3 |      1 |      0 |       17 |       55 |       26 |       19 |       12 |       16 |       1 |       15 |       66 |       24 |       19 |       14 |       30 |       1 |       22 |       92 |       39 |       24 |       15 |       18 |       0 |       26 |       61 |       24 |       21 |       17 |       25 |       3 |       21 |       74 |       18 |       14 |        7 |        6 |       0 |       38 |       55 |       16 |        5 |        5 |        9 |       0 |       11 |       22 |        9 |        0 |        0 |        5 |       0 |        6 |       18 |        1 |        3 |        2 |        0 |       0 |      0 |      4 |     38 |     35 |      7 |      5 |      9 |    217 |      0 |      0 |      2 |     51 |     46 |     12 |      6 |      2 |    268 |      0 |      0 |      1 |     24 |     10 |      8 |      4 |      2 |    219 |      0 |      0 |      1 |      8 |      8 |      0 |      0 |      0 |     60 |      0 |     37 | s03      | R    |
| 2221000 |     660 |    222 |    211 |    13 |    0 |     8 |   11 |    0 |    19 |    0 |    176 |    0 |    0 |    0 |    0 |    327 |    333 |      15 |       7 |       9 |       1 |     12 |     10 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      2 |      1 |      1 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |       12 |       36 |       13 |       13 |        7 |        9 |       0 |       23 |       58 |       14 |       14 |       10 |       11 |       2 |       13 |       52 |       26 |        5 |       10 |        5 |       3 |       16 |       39 |       13 |       12 |        4 |       10 |       3 |       13 |       58 |       12 |        8 |        2 |        1 |       0 |       20 |       38 |       12 |        3 |        3 |        6 |       0 |        4 |       15 |        5 |        5 |        0 |        0 |       0 |        4 |        9 |        4 |        1 |        1 |        3 |       0 |      0 |      1 |     18 |     18 |      5 |      2 |      5 |    173 |      0 |      0 |      0 |     21 |     15 |      6 |      4 |      5 |    160 |      0 |      0 |      2 |     15 |      5 |      3 |      3 |      1 |    147 |      0 |      0 |      0 |      6 |     11 |      0 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 2221500 |     227 |     61 |     75 |     9 |    0 |     4 |    1 |    1 |     4 |    0 |     72 |    0 |    0 |    0 |    0 |    115 |    112 |       6 |       6 |       6 |       0 |      2 |      4 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |       12 |        4 |        0 |        3 |        3 |       0 |        4 |       26 |        1 |        2 |        2 |        2 |       0 |        9 |       20 |        8 |        2 |        4 |        0 |       0 |        6 |       18 |        4 |        1 |        0 |        3 |       0 |       11 |       20 |        4 |        2 |        0 |        0 |       0 |        8 |       18 |        5 |        1 |        1 |        2 |       0 |        1 |        9 |        0 |        0 |        1 |        0 |       0 |        2 |        6 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      4 |      1 |      1 |      0 |     47 |      0 |      0 |      0 |      8 |      6 |      0 |      0 |      0 |     61 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      1 |     62 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 2224000 |     872 |    279 |    285 |    25 |    0 |     8 |   10 |    5 |    12 |    0 |    248 |    0 |    0 |    0 |    0 |    424 |    448 |      16 |      10 |      13 |       4 |     14 |     13 |      9 |      4 |      1 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      6 |      2 |      6 |      1 |      0 |      2 |      1 |      2 |       0 |       1 |       0 |       0 |      1 |      3 |      4 |      1 |       16 |       45 |       29 |       14 |        7 |        7 |       1 |       36 |       65 |       17 |       17 |        8 |       12 |       5 |       21 |       59 |       31 |       13 |        9 |       12 |       5 |       26 |       47 |       27 |       10 |       11 |       10 |       4 |       22 |       68 |       15 |       10 |        7 |        0 |       1 |       38 |       61 |       11 |        6 |        5 |        3 |       1 |        7 |       18 |        3 |        3 |        1 |        0 |       0 |        7 |       13 |        6 |        2 |        0 |        0 |       0 |      0 |      0 |     18 |     17 |      5 |      0 |      6 |    233 |      0 |      0 |      1 |     18 |     15 |      4 |      2 |      4 |    241 |      0 |      0 |      1 |     14 |      8 |      0 |      0 |      2 |    223 |      0 |      0 |      1 |      1 |      6 |      1 |      0 |      0 |     51 |      0 |     37 | s03      | R    |
| 2227000 |     613 |    189 |    266 |    13 |    0 |     6 |   12 |    1 |     4 |    0 |    122 |    0 |    0 |    0 |    0 |    299 |    314 |      10 |      10 |       6 |       1 |     11 |     12 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      5 |      1 |      0 |      2 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |       20 |       17 |       10 |       12 |        8 |      10 |       12 |       22 |       19 |       12 |       11 |       23 |      11 |       10 |       29 |       31 |       17 |       17 |       13 |      14 |       16 |       37 |       21 |       18 |        8 |       19 |      16 |       12 |       32 |        8 |        5 |        6 |        2 |       0 |       17 |       21 |        8 |        8 |        1 |        2 |       0 |        2 |        7 |        7 |        5 |        0 |        3 |       0 |        3 |        3 |        2 |        2 |        0 |        2 |       0 |      0 |      2 |     16 |     17 |     10 |      1 |      0 |    143 |      0 |      0 |      3 |     27 |     28 |      4 |      7 |      1 |    196 |      0 |      0 |      0 |     10 |      5 |      1 |      1 |      1 |    104 |      0 |      0 |      0 |      3 |     11 |      0 |      1 |      0 |     21 |      0 |     37 | s03      | R    |
| 2229000 |     414 |    131 |    208 |     7 |    0 |     5 |    1 |    2 |     5 |    0 |     55 |    0 |    0 |    0 |    0 |    208 |    206 |      10 |       9 |       4 |       1 |      3 |     17 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      1 |        2 |       10 |       12 |       10 |        3 |       10 |       8 |        5 |        9 |       14 |       15 |       10 |       13 |      10 |        5 |       17 |       22 |       17 |       14 |       20 |      17 |        5 |       11 |       20 |       12 |       18 |       15 |      15 |        2 |        9 |        3 |        3 |        5 |        2 |       3 |        3 |       13 |        7 |        0 |        0 |        4 |       1 |        2 |        5 |        1 |        3 |        0 |        3 |       0 |        2 |        0 |        0 |        1 |        0 |        3 |       0 |      0 |      1 |     19 |     16 |      7 |      2 |      3 |     83 |      0 |      0 |      0 |     15 |     22 |     13 |     11 |     11 |    136 |      0 |      0 |      0 |      5 |      2 |      3 |      1 |      0 |     44 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 2231000 |     335 |    113 |    126 |     7 |    0 |     4 |    5 |    2 |     6 |    0 |     72 |    0 |    0 |    0 |    0 |    165 |    170 |      10 |       2 |       1 |       1 |     12 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        5 |       15 |       10 |        6 |        7 |        7 |       1 |        4 |       31 |        6 |        6 |        8 |        5 |       2 |        3 |       24 |       11 |        3 |       11 |        7 |       3 |        4 |       21 |       13 |        7 |        8 |        9 |       2 |        5 |       17 |        3 |        5 |        6 |        3 |       0 |        2 |       23 |        2 |        4 |        1 |        1 |       0 |        2 |        7 |        1 |        1 |        2 |        0 |       0 |        1 |        8 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |     10 |     17 |      2 |      0 |      0 |     84 |      0 |      0 |      1 |     13 |     20 |      2 |      3 |      0 |     87 |      0 |      0 |      1 |      7 |      3 |      1 |      0 |      0 |     60 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2231100 |     866 |    273 |    285 |    33 |    0 |     5 |   14 |    2 |    19 |    0 |    235 |    0 |    0 |    0 |    0 |    461 |    405 |      10 |      12 |      14 |       3 |     18 |     12 |     16 |      5 |      2 |      0 |      0 |      0 |      3 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |       14 |       54 |       11 |       16 |       11 |       11 |       5 |       23 |       64 |       11 |       19 |       15 |       15 |       4 |       21 |       64 |       24 |       19 |       16 |       15 |       4 |       17 |       42 |       17 |       12 |       11 |       20 |       3 |       16 |       81 |       19 |        5 |        6 |        5 |       1 |       27 |       50 |       14 |        6 |        4 |        1 |       0 |        6 |       25 |        7 |        2 |        3 |        0 |       0 |        8 |       15 |        3 |        0 |        1 |        3 |       0 |      0 |      0 |     26 |     14 |      5 |      5 |      1 |    222 |      0 |      0 |      1 |     22 |     23 |      7 |      6 |      5 |    221 |      0 |      0 |      2 |     23 |      9 |      0 |      0 |      1 |    200 |      0 |      0 |      0 |      3 |      5 |      2 |      0 |      0 |     63 |      0 |     37 | s03      | R    |
| 2233000 |     342 |    113 |    107 |    11 |    0 |     3 |    6 |    1 |     5 |    0 |     96 |    0 |    0 |    0 |    0 |    163 |    179 |      12 |       7 |       5 |       2 |      4 |      7 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |       24 |        8 |        7 |        1 |        0 |       0 |        6 |       39 |        7 |        6 |        4 |        2 |       3 |        8 |       21 |       11 |        6 |        2 |        2 |       0 |       10 |       26 |        7 |        7 |        1 |        4 |       2 |        7 |       27 |        7 |        3 |        2 |        0 |       0 |       13 |       24 |        6 |        5 |        2 |        0 |       0 |        4 |       12 |        1 |        2 |        2 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |      9 |      8 |      2 |      1 |      1 |     91 |      0 |      0 |      0 |      7 |     13 |      2 |      1 |      1 |     83 |      0 |      0 |      1 |     12 |      3 |      0 |      0 |      0 |     80 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 2234000 |     272 |     95 |     84 |     7 |    0 |     2 |    4 |    1 |    10 |    0 |     69 |    0 |    0 |    0 |    0 |    158 |    114 |       5 |       6 |       4 |       2 |      4 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        8 |       18 |       13 |        6 |        3 |        2 |       1 |        7 |       16 |        9 |        4 |        3 |        4 |       1 |        2 |       31 |        8 |        8 |        5 |        1 |       0 |        8 |       10 |        6 |        3 |        1 |        1 |       0 |        5 |       25 |        2 |        3 |        3 |        1 |       0 |       13 |       12 |        2 |        0 |        2 |        1 |       0 |        0 |       11 |        0 |        2 |        0 |        0 |       0 |        2 |        2 |        1 |        4 |        0 |        1 |       1 |      0 |      0 |     15 |      7 |      1 |      1 |      1 |     70 |      0 |      0 |      0 |     12 |      9 |      1 |      3 |      0 |     59 |      0 |      0 |      0 |      7 |      4 |      0 |      0 |      0 |     58 |      0 |      0 |      1 |      2 |      2 |      0 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 2235000 |     608 |    190 |    203 |    23 |    0 |    10 |    7 |    2 |    12 |    0 |    161 |    0 |    0 |    0 |    0 |    328 |    280 |      19 |       9 |       6 |       3 |     12 |      6 |      5 |      2 |      0 |      1 |      0 |      0 |      1 |      3 |      2 |      0 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      3 |      1 |      1 |      0 |       10 |       45 |        5 |       11 |        5 |        1 |       1 |       19 |       63 |        7 |        9 |        6 |        8 |       0 |       12 |       62 |       22 |       18 |        4 |        2 |       0 |       13 |       38 |       15 |        7 |        4 |        6 |       0 |       11 |       53 |       17 |       13 |        1 |        1 |       0 |       14 |       36 |        5 |        6 |        0 |        4 |       0 |        6 |       14 |        9 |        5 |        0 |        0 |       0 |        8 |       11 |        1 |        0 |        0 |        0 |       0 |      0 |      3 |     15 |     12 |      4 |      1 |      4 |    151 |      0 |      0 |      2 |     18 |     15 |      0 |      2 |      2 |    164 |      0 |      0 |      2 |     25 |      7 |      0 |      0 |      1 |    126 |      0 |      0 |      0 |      6 |      5 |      0 |      0 |      0 |     43 |      0 |     37 | s03      | R    |
| 2235100 |     148 |     45 |     59 |     7 |    0 |     0 |    2 |    0 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |     89 |     59 |       3 |       2 |       2 |       0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        2 |       12 |        4 |        3 |        1 |        2 |       0 |        2 |       13 |        4 |        2 |        0 |        0 |       0 |        2 |       16 |        3 |        8 |        4 |        3 |       0 |        2 |       15 |        0 |        2 |        3 |        1 |       0 |        2 |       12 |        5 |        2 |        3 |        1 |       0 |        0 |        6 |        2 |        1 |        0 |        1 |       0 |        0 |        4 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      7 |      0 |      0 |      0 |     32 |      0 |      0 |      1 |      0 |      6 |      0 |      2 |      1 |     49 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |     31 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 2237000 |     454 |    140 |    150 |    19 |    0 |     5 |    6 |    0 |     7 |    0 |    127 |    0 |    0 |    0 |    0 |    222 |    232 |      15 |       8 |       4 |       1 |     19 |      8 |      7 |      4 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        9 |       20 |        9 |        8 |        3 |        3 |       6 |       16 |       22 |       12 |       13 |        4 |        8 |       7 |        9 |       21 |       25 |        6 |        7 |        5 |       5 |       13 |       21 |       14 |        9 |        1 |        9 |       5 |       17 |       26 |       10 |        6 |        3 |        2 |       1 |       17 |       28 |        3 |        9 |        1 |        2 |       2 |        2 |       11 |        5 |        3 |        0 |        0 |       0 |        3 |        8 |        1 |        2 |        1 |        1 |       0 |      0 |      1 |     13 |     11 |      5 |      3 |      4 |    103 |      0 |      0 |      0 |     17 |     16 |      4 |      1 |      0 |    112 |      0 |      0 |      4 |     11 |      6 |      3 |      2 |      1 |    100 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      1 |     28 |      0 |     37 | s03      | R    |
| 2237500 |     361 |    115 |    128 |     7 |    0 |     4 |    4 |    0 |     5 |    0 |     98 |    0 |    0 |    0 |    0 |    181 |    180 |      10 |       3 |       4 |       0 |      6 |      6 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        6 |       12 |       11 |        8 |        2 |        4 |       3 |       13 |       30 |        4 |        5 |        4 |       11 |       2 |        4 |       37 |       11 |        9 |        5 |        7 |       1 |        4 |       21 |        6 |        4 |        3 |       16 |       0 |        7 |       26 |       12 |        2 |        3 |        1 |       1 |        8 |       21 |        5 |        5 |        2 |        4 |       1 |        0 |        5 |        1 |        1 |        1 |        1 |       0 |        1 |        7 |        0 |        0 |        0 |        3 |       0 |      0 |      0 |     14 |      9 |      0 |      1 |      1 |     90 |      0 |      0 |      1 |     14 |     12 |      2 |      1 |      2 |     96 |      0 |      0 |      1 |     10 |     10 |      1 |      1 |      0 |     75 |      0 |      0 |      1 |      3 |      4 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 2239000 |     428 |    150 |    179 |    10 |    0 |     3 |    3 |    2 |     6 |    0 |     75 |    0 |    0 |    0 |    0 |    193 |    235 |       9 |       7 |       4 |       0 |     11 |      9 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |        2 |       10 |       11 |       16 |        8 |        6 |       7 |        5 |       10 |       16 |       17 |        8 |       18 |      16 |        4 |       13 |       23 |       18 |       13 |       14 |       8 |        5 |       17 |       11 |       15 |       12 |       14 |      12 |        5 |        8 |        8 |        9 |        2 |        0 |       0 |       10 |        8 |       12 |        8 |        1 |        3 |       1 |        1 |        2 |        3 |        2 |        0 |        0 |       0 |        5 |        1 |        3 |        4 |        1 |        2 |       0 |      0 |      1 |     21 |     17 |      5 |      6 |      3 |     97 |      0 |      0 |      0 |     24 |     29 |      7 |      6 |      3 |    110 |      0 |      0 |      0 |     14 |      5 |      0 |      5 |      3 |     48 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2240000 |     349 |    102 |    180 |     4 |    0 |     4 |    4 |    0 |     1 |    0 |     54 |    0 |    0 |    0 |    0 |    163 |    186 |       3 |       1 |       2 |       1 |     19 |     11 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        3 |       16 |        5 |        6 |       5 |        4 |        4 |       11 |       15 |       10 |       12 |       8 |        8 |        8 |       18 |       11 |        9 |       25 |      13 |        0 |        8 |       14 |       13 |       13 |       16 |      24 |        0 |        4 |        6 |        8 |        4 |        2 |       1 |        5 |        8 |        6 |        4 |        2 |        4 |       0 |        1 |        1 |        1 |        2 |        1 |        2 |       0 |        1 |        1 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |     12 |     21 |      1 |      5 |      5 |     58 |      0 |      0 |      0 |     12 |     25 |      6 |      7 |      9 |    121 |      0 |      0 |      1 |      9 |      5 |      3 |      3 |      2 |     31 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2243000 |     208 |     63 |     86 |     9 |    0 |     7 |    1 |    0 |     3 |    0 |     39 |    0 |    0 |    0 |    0 |    105 |    103 |       4 |       0 |       2 |       0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        3 |        4 |        8 |        4 |        3 |       3 |        1 |        1 |       10 |        8 |        4 |        5 |       6 |        4 |        4 |        7 |       15 |        5 |        6 |       5 |        1 |        2 |        9 |        8 |        4 |       10 |       6 |        3 |        5 |        5 |        3 |        1 |        2 |       0 |        1 |       10 |        2 |        3 |        3 |        1 |       0 |        1 |        1 |        3 |        2 |        3 |        2 |       0 |        1 |        3 |        4 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      6 |      5 |      3 |      2 |     41 |      0 |      0 |      0 |      7 |     14 |      5 |      1 |      2 |     57 |      0 |      0 |      0 |      5 |      4 |      2 |      0 |      0 |     28 |      0 |      0 |      1 |      0 |      7 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2245100 |     850 |    276 |    232 |    29 |    0 |    17 |   14 |    5 |    18 |    0 |    259 |    0 |    0 |    0 |    0 |    473 |    377 |      23 |      15 |      15 |       8 |     19 |     14 |     10 |      4 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |      3 |      3 |      1 |      0 |      0 |      0 |      1 |      0 |       1 |       2 |       0 |       2 |      1 |      2 |      1 |      0 |        9 |       65 |       15 |       21 |       12 |        5 |       1 |       23 |       67 |       24 |       13 |        6 |       12 |       3 |       12 |       75 |       18 |       14 |        6 |       11 |       2 |       14 |       43 |       15 |        6 |        7 |        7 |       2 |       11 |       97 |       29 |       10 |        5 |        1 |       0 |       23 |       57 |       13 |        7 |        4 |        2 |       0 |        6 |       24 |       14 |        5 |        4 |        1 |       0 |        7 |       16 |        2 |        1 |        2 |        1 |       0 |      0 |      0 |     25 |     24 |      2 |      4 |      1 |    220 |      0 |      0 |      0 |     21 |     22 |      6 |      4 |      1 |    178 |      0 |      0 |      1 |     22 |      6 |      5 |      4 |      0 |    221 |      0 |      0 |      2 |     12 |     10 |      0 |      0 |      0 |     59 |      0 |     37 | s03      | R    |
| 2246000 |     919 |    280 |    326 |    27 |    0 |     8 |   18 |    5 |    30 |    0 |    225 |    0 |    0 |    0 |    0 |    526 |    393 |      20 |      16 |      11 |       3 |     17 |     19 |     12 |      2 |      1 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      1 |      0 |       16 |       54 |       22 |       19 |       11 |       14 |       3 |       14 |       52 |       18 |       24 |       16 |       12 |       5 |       12 |       68 |       49 |       21 |       26 |       21 |       1 |       14 |       37 |       23 |       14 |       13 |       21 |       6 |       12 |       71 |       24 |        9 |       16 |        8 |       1 |       16 |       41 |       11 |        8 |        6 |        1 |       1 |       12 |       26 |        3 |        3 |        2 |        2 |       0 |        9 |       15 |        6 |        4 |        3 |        3 |       0 |      0 |      2 |     34 |     28 |      9 |      7 |      6 |    194 |      0 |      0 |      2 |     30 |     47 |      5 |      3 |     12 |    227 |      0 |      0 |      0 |     21 |     22 |      1 |      2 |      1 |    178 |      0 |      0 |      1 |     10 |      8 |      0 |      1 |      0 |     68 |      0 |     37 | s03      | R    |
| 2247000 |     680 |    225 |    225 |    18 |    0 |    10 |   11 |    0 |    16 |    0 |    175 |    0 |    0 |    0 |    0 |    326 |    354 |      16 |      10 |      14 |       3 |     14 |     10 |     13 |      6 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      2 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      3 |      1 |      1 |      0 |        5 |       28 |       14 |       18 |        6 |        8 |       7 |       22 |       68 |       14 |       14 |        6 |       11 |       4 |       10 |       54 |       27 |        5 |       14 |        5 |       0 |       22 |       46 |       23 |        5 |        3 |        8 |       3 |        8 |       50 |       20 |        4 |        7 |        2 |       0 |       18 |       42 |       14 |        5 |        3 |        1 |       1 |        9 |       14 |        5 |        4 |        2 |        0 |       0 |        7 |        9 |        2 |        2 |        0 |        1 |       0 |      0 |      0 |     25 |     21 |      1 |      4 |      3 |    171 |      0 |      0 |      2 |     21 |     20 |      6 |      3 |      2 |    171 |      0 |      0 |      1 |     20 |     10 |      2 |      0 |      1 |    141 |      0 |      0 |      0 |      7 |      7 |      0 |      0 |      0 |     41 |      0 |     37 | s03      | R    |
| 2248000 |     698 |    244 |    216 |    23 |    0 |     6 |   10 |    1 |    16 |    0 |    182 |    0 |    0 |    0 |    0 |    344 |    354 |      13 |       8 |       8 |       2 |     20 |     15 |     10 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      4 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      4 |      1 |      0 |        6 |       50 |       21 |       16 |        5 |        7 |       1 |       23 |       67 |       15 |       10 |        9 |        7 |       7 |        9 |       65 |       28 |       11 |        6 |        6 |       3 |       22 |       40 |       10 |        6 |        3 |        5 |       2 |        6 |       52 |       17 |        6 |        3 |        2 |       1 |       24 |       59 |        4 |        3 |        4 |        1 |       0 |        6 |       13 |        2 |        2 |        0 |        0 |       0 |        8 |       15 |        6 |        0 |        3 |        1 |       0 |      0 |      0 |     22 |     19 |      5 |      4 |      4 |    190 |      0 |      0 |      0 |     11 |     16 |      7 |      3 |      1 |    178 |      0 |      0 |      0 |     19 |     11 |      1 |      2 |      0 |    149 |      0 |      0 |      0 |      8 |      1 |      0 |      0 |      0 |     47 |      0 |     37 | s03      | R    |
| 2248100 |     717 |    190 |    299 |    22 |    0 |     6 |    4 |    1 |    10 |    0 |    185 |    0 |    0 |    0 |    0 |    366 |    351 |       7 |      11 |       7 |       3 |     19 |     18 |      9 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       1 |       1 |       0 |       0 |      2 |      0 |      1 |      0 |        5 |       28 |       13 |       11 |        9 |       12 |       2 |        7 |       36 |       16 |       19 |       14 |       16 |       2 |       11 |       49 |       27 |       20 |       26 |       21 |       3 |       12 |       31 |       17 |       19 |       22 |       35 |       6 |       13 |       39 |       16 |       14 |        9 |       10 |       0 |       13 |       32 |       13 |        9 |        8 |        8 |       1 |        0 |       13 |        6 |        4 |        3 |        2 |       0 |        2 |        6 |        3 |        2 |        2 |        0 |       0 |      0 |      1 |     29 |     25 |      8 |      3 |      3 |    121 |      0 |      0 |      1 |     38 |     23 |      6 |      9 |     11 |    211 |      0 |      0 |      1 |     17 |     10 |      4 |      3 |      4 |    146 |      0 |      0 |      0 |      8 |      8 |      2 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2252000 |      42 |     12 |     26 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     23 |     19 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        0 |        0 |        2 |        2 |       0 |        1 |        0 |        0 |        1 |        1 |        1 |       1 |        1 |        0 |        2 |        2 |        5 |        1 |       3 |        0 |        0 |        2 |        1 |        3 |        3 |       3 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      4 |      0 |      1 |      1 |      5 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |      0 |     19 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2253000 |     915 |    266 |    310 |    29 |    0 |    14 |   12 |    4 |    24 |    0 |    256 |    0 |    0 |    0 |    0 |    527 |    388 |      10 |      11 |      17 |       3 |     12 |     15 |     12 |      6 |      1 |      1 |      0 |      0 |      2 |      0 |      2 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      3 |      2 |      1 |      0 |       16 |       58 |       23 |       16 |        3 |       17 |       2 |       20 |       53 |       11 |       11 |       10 |       19 |       7 |       14 |       88 |       38 |       21 |       12 |       12 |       1 |       17 |       47 |       15 |       11 |       17 |       14 |       3 |       19 |       83 |       32 |       10 |        4 |        2 |       0 |       29 |       52 |        9 |        6 |        7 |        3 |       0 |        4 |       29 |       12 |        7 |        1 |        3 |       0 |        1 |       20 |        2 |        1 |        3 |        0 |       0 |      0 |      0 |     24 |     20 |      4 |      4 |      4 |    210 |      0 |      0 |      0 |     30 |     32 |      9 |      4 |      5 |    230 |      0 |      0 |      1 |     33 |     10 |      5 |      4 |      1 |    202 |      0 |      0 |      0 |      8 |      8 |      2 |      2 |      0 |     63 |      0 |     37 | s03      | R    |
| 2254000 |     544 |    184 |    200 |    15 |    0 |     8 |    8 |    6 |     6 |    0 |    117 |    0 |    0 |    0 |    0 |    272 |    272 |       9 |       3 |       5 |       0 |     20 |     12 |      7 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      2 |      2 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        5 |       31 |       10 |        9 |       10 |       17 |       2 |        5 |       38 |       11 |        8 |        7 |       25 |       6 |        7 |       43 |       19 |       11 |        9 |       14 |       3 |        9 |       19 |       13 |        6 |       15 |       28 |       4 |        9 |       30 |       15 |        4 |        2 |        2 |       0 |        4 |       24 |        7 |        3 |        9 |        8 |       0 |        2 |       10 |        0 |        0 |        4 |        4 |       0 |        2 |       12 |        1 |        4 |        0 |        4 |       0 |      0 |      1 |     15 |     19 |      3 |     11 |      2 |    133 |      0 |      0 |      0 |     25 |     29 |      7 |      4 |      2 |    133 |      0 |      0 |      0 |     24 |      9 |      1 |      0 |      0 |     83 |      0 |      0 |      1 |      6 |     10 |      1 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2254100 |     517 |    166 |    171 |    10 |    0 |     8 |    9 |    2 |    10 |    0 |    141 |    0 |    0 |    0 |    0 |    287 |    230 |      11 |       5 |       4 |       0 |     12 |      9 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        3 |       31 |       12 |       11 |        5 |        6 |       6 |        5 |       36 |       16 |       15 |        4 |        9 |       7 |        5 |       38 |       21 |       11 |        9 |        8 |       5 |        2 |       25 |       15 |       10 |        3 |       14 |       5 |        8 |       50 |       18 |        9 |        3 |        1 |       1 |        8 |       27 |        7 |        4 |        1 |        3 |       1 |        1 |        9 |        5 |        7 |        2 |        2 |       0 |        0 |        8 |        1 |        1 |        0 |        3 |       0 |      0 |      1 |     15 |     27 |      4 |      3 |      4 |    112 |      0 |      0 |      1 |     26 |     11 |     10 |      5 |      4 |    114 |      0 |      0 |      1 |     16 |     13 |      2 |      2 |      0 |    107 |      0 |      0 |      0 |      9 |      4 |      1 |      1 |      0 |     24 |      0 |     37 | s03      | R    |
| 2256000 |     314 |    112 |     94 |    11 |    0 |     3 |    4 |    3 |     7 |    0 |     80 |    0 |    0 |    0 |    0 |    159 |    155 |      11 |       4 |       2 |       1 |      8 |      4 |      2 |      4 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |       21 |       12 |        2 |        3 |        1 |       1 |       10 |       26 |       14 |        4 |        6 |        7 |       3 |        3 |       33 |       17 |        2 |        2 |        0 |       1 |        5 |       17 |        4 |        5 |        1 |        2 |       2 |        6 |       26 |        8 |        4 |        0 |        1 |       1 |       10 |       21 |        1 |        0 |        0 |        2 |       0 |        1 |        7 |        1 |        1 |        2 |        1 |       0 |        2 |        9 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      8 |     14 |      2 |      1 |      0 |     87 |      0 |      0 |      1 |      6 |      5 |      1 |      1 |      2 |     78 |      0 |      0 |      1 |      7 |      4 |      0 |      1 |      0 |     67 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 2257000 |     257 |     85 |    123 |     3 |    0 |     1 |    0 |    0 |     2 |    0 |     43 |    0 |    0 |    0 |    0 |    126 |    131 |       2 |       7 |       2 |       0 |      6 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        2 |        7 |       10 |        7 |        3 |       3 |        5 |        3 |       10 |       13 |        5 |        8 |       9 |        4 |       10 |       13 |       12 |        7 |       10 |       8 |        0 |        8 |       10 |       12 |        5 |       15 |       9 |        2 |        7 |        5 |        5 |        2 |        3 |       3 |        1 |        2 |        5 |        3 |        2 |        3 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      9 |     14 |      4 |      4 |      1 |     53 |      0 |      0 |      0 |     15 |     22 |      4 |      4 |      4 |     74 |      0 |      0 |      0 |      6 |      8 |      1 |      0 |      1 |     27 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 2257100 |     178 |     70 |     66 |     1 |    0 |     3 |    3 |    0 |     2 |    0 |     33 |    0 |    0 |    0 |    0 |     90 |     88 |       1 |       0 |       0 |       0 |      5 |      5 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      2 |      0 |        0 |        3 |        4 |        7 |        4 |        4 |       4 |        4 |        9 |        5 |        7 |        7 |        8 |       4 |        0 |        4 |       14 |        3 |        1 |       11 |       6 |        1 |        1 |        5 |        2 |        4 |        9 |       5 |        4 |        6 |        1 |        4 |        6 |        0 |       0 |        3 |        3 |        1 |        3 |        1 |        1 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |      0 |      1 |      6 |     11 |      3 |      3 |      1 |     45 |      0 |      0 |      0 |      9 |     10 |      2 |      0 |      6 |     39 |      0 |      0 |      0 |      2 |      6 |      1 |      1 |      1 |     22 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 2259000 |     663 |    256 |    197 |    24 |    0 |     2 |   15 |    1 |    11 |    0 |    157 |    0 |    0 |    0 |    0 |    347 |    316 |      28 |       6 |       5 |       3 |     15 |      8 |      6 |      4 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |      3 |      2 |      0 |      0 |       1 |       0 |       1 |       0 |      1 |      3 |      1 |      0 |       10 |       53 |       31 |       11 |        9 |        5 |       3 |       17 |       55 |       21 |       11 |       10 |       14 |       6 |       12 |       59 |       19 |       12 |        5 |        5 |       2 |       14 |       42 |       10 |        7 |        1 |        4 |       5 |        7 |       61 |       12 |        2 |        1 |        0 |       0 |       11 |       42 |       11 |        7 |        2 |        1 |       0 |        2 |       16 |        5 |        2 |        0 |        1 |       2 |        5 |       15 |        4 |        1 |        0 |        0 |       0 |      0 |      2 |     38 |     24 |      3 |      1 |      2 |    186 |      0 |      0 |      1 |     23 |     15 |      3 |      3 |      0 |    152 |      0 |      0 |      2 |     17 |      9 |      2 |      0 |      1 |    126 |      0 |      0 |      1 |      9 |      4 |      0 |      0 |      0 |     39 |      0 |     37 | s03      | R    |
| 2259100 |     292 |     94 |     92 |    13 |    0 |     3 |    1 |    1 |     6 |    0 |     82 |    0 |    0 |    0 |    0 |    158 |    134 |       1 |       0 |       2 |       1 |      9 |      4 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        5 |       13 |       10 |        4 |        2 |        7 |       0 |        9 |       21 |        9 |        7 |        1 |        5 |       1 |        3 |       27 |       12 |        2 |        3 |        6 |       0 |        3 |       13 |        8 |        0 |        5 |        8 |       2 |        1 |       31 |       10 |        1 |        4 |        2 |       1 |        2 |       22 |        4 |        3 |        0 |        1 |       0 |        2 |        8 |        2 |        2 |        0 |        0 |       0 |        3 |        4 |        0 |        1 |        1 |        1 |       0 |      0 |      1 |      7 |     12 |      2 |      2 |      1 |     69 |      0 |      0 |      0 |     13 |      8 |      5 |      1 |      1 |     64 |      0 |      0 |      1 |     10 |      6 |      0 |      1 |      0 |     64 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 2260000 |     541 |    174 |    187 |    14 |    0 |     2 |    6 |    3 |    10 |    0 |    145 |    0 |    0 |    0 |    0 |    259 |    282 |       9 |      14 |       7 |       3 |     11 |      9 |     11 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       1 |       1 |       0 |      1 |      0 |      0 |      0 |        7 |       23 |       13 |       10 |        6 |        8 |       4 |        9 |       39 |       17 |       21 |        3 |        8 |       6 |        9 |       24 |       21 |       14 |        5 |       10 |       3 |       11 |       35 |       10 |       15 |        9 |       16 |       5 |        9 |       38 |       16 |        6 |        6 |        3 |       1 |       10 |       32 |        9 |        8 |        4 |        1 |       2 |        1 |       14 |        7 |        0 |        1 |        0 |       0 |        1 |        7 |        0 |        4 |        0 |        0 |       0 |      0 |      1 |     23 |     16 |      2 |      3 |      1 |    128 |      0 |      0 |      0 |     15 |     16 |      2 |      6 |      2 |    146 |      0 |      0 |      2 |     11 |     10 |      3 |      0 |      1 |    118 |      0 |      0 |      0 |      3 |      5 |      2 |      1 |      0 |     24 |      0 |     37 | s03      | R    |
| 2260100 |     193 |     57 |     68 |     6 |    0 |     2 |    1 |    3 |     3 |    0 |     53 |    0 |    0 |    0 |    0 |     86 |    107 |       2 |       1 |       1 |       0 |      7 |      6 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        7 |        6 |        1 |        1 |        1 |       1 |        6 |       15 |        6 |        5 |        0 |        5 |       1 |        3 |       26 |        3 |        0 |        3 |        0 |       1 |        4 |       20 |        1 |        2 |        0 |        4 |       1 |        1 |        9 |        4 |        3 |        1 |        1 |       0 |        6 |       17 |        3 |        3 |        3 |        2 |       0 |        1 |        9 |        1 |        1 |        0 |        0 |       0 |        0 |        3 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      7 |     10 |      2 |      0 |      1 |     36 |      0 |      0 |      1 |      9 |      8 |      1 |      0 |      1 |     48 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      1 |     45 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 2261000 |     363 |    136 |    110 |     9 |    0 |     1 |    6 |    1 |    13 |    0 |     87 |    0 |    0 |    0 |    0 |    157 |    206 |      10 |       5 |       3 |       1 |      9 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        8 |        9 |       10 |        6 |        8 |       1 |        5 |       18 |       15 |       12 |       15 |       24 |       3 |        0 |       16 |        9 |       11 |        4 |       11 |       3 |        3 |        6 |       10 |        3 |        6 |       22 |       6 |        4 |       10 |       10 |        5 |        4 |        8 |       0 |        2 |       12 |        7 |        5 |        7 |       13 |       0 |        0 |        8 |        5 |        2 |        1 |        2 |       0 |        1 |        3 |        5 |        0 |        2 |        1 |       0 |      0 |      0 |      9 |     27 |      6 |      6 |      3 |     85 |      0 |      0 |      1 |     10 |     11 |      5 |      4 |      1 |     78 |      0 |      0 |      2 |     14 |      6 |      2 |      2 |      3 |     58 |      0 |      0 |      1 |      4 |      2 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 2262000 |     369 |    105 |    195 |     4 |    0 |     3 |    2 |    1 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    169 |    200 |       3 |       1 |       2 |       0 |     15 |     10 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        2 |        2 |        4 |       12 |        7 |        6 |       5 |        6 |        9 |        5 |       15 |        8 |       19 |       5 |        1 |       10 |       17 |       19 |       16 |       26 |       7 |        3 |        7 |       10 |       19 |       17 |       32 |      11 |        2 |        4 |        6 |        6 |        4 |        3 |       1 |        3 |        6 |        8 |        6 |        4 |        3 |       1 |        1 |        3 |        2 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |      0 |      0 |      9 |      9 |      4 |      6 |      3 |     74 |      0 |      0 |      0 |     29 |     25 |      5 |      8 |      7 |    121 |      0 |      0 |      0 |      6 |      7 |      0 |      2 |      3 |     39 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 2262100 |     100 |     28 |     43 |     4 |    0 |     3 |    1 |    1 |     2 |    0 |     18 |    0 |    0 |    0 |    0 |     49 |     51 |       1 |       1 |       0 |       0 |      3 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        0 |        7 |        2 |        2 |        2 |       1 |        1 |        4 |        3 |        0 |        3 |        2 |       0 |        2 |        3 |        6 |        4 |        2 |        3 |       1 |        0 |        3 |        4 |        3 |        4 |        7 |       1 |        0 |        3 |        2 |        2 |        0 |        1 |       0 |        0 |        4 |        3 |        2 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |        0 |        4 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |      6 |      1 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      4 |      6 |      2 |      3 |      2 |     26 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |     13 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2264000 |     389 |    127 |    165 |     6 |    0 |     7 |    2 |    2 |     4 |    0 |     76 |    0 |    0 |    0 |    0 |    220 |    169 |       2 |       8 |       6 |       0 |      7 |     14 |      8 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       2 |       0 |      1 |      0 |      0 |      0 |        6 |       16 |       13 |       11 |       12 |        7 |       0 |        6 |       21 |       10 |       11 |        8 |        5 |       1 |        1 |       25 |       16 |       14 |       17 |       18 |       6 |        6 |       15 |        9 |       12 |        5 |       15 |       6 |        3 |       15 |       14 |        3 |        7 |        2 |       2 |        3 |       10 |        5 |        5 |        5 |        1 |       1 |        1 |        5 |        3 |        3 |        0 |        0 |       0 |        0 |        6 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |     14 |     15 |      6 |      6 |      4 |     82 |      0 |      0 |      0 |     21 |     19 |      6 |     10 |      6 |    103 |      0 |      0 |      0 |     11 |      6 |      1 |      0 |      0 |     58 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2300000 |     562 |    183 |    185 |    13 |    0 |     6 |    9 |    2 |    12 |    0 |    152 |    0 |    0 |    0 |    0 |    319 |    243 |      10 |       5 |       7 |       2 |     14 |     11 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |       1 |       0 |       1 |       0 |      2 |      0 |      3 |      0 |       11 |       25 |       19 |       11 |       10 |       10 |       0 |       17 |       31 |        6 |       12 |       14 |       16 |       1 |       22 |       30 |       20 |       16 |       15 |       13 |       2 |        7 |       22 |       11 |       13 |        7 |        7 |       0 |       13 |       46 |       14 |       10 |        5 |        0 |       0 |       21 |       19 |        6 |        8 |        8 |        2 |       0 |        3 |       15 |        4 |        3 |        2 |        0 |       0 |        4 |        6 |        0 |        1 |        4 |        0 |       0 |      0 |      1 |     17 |     26 |      9 |      5 |      2 |    123 |      0 |      0 |      1 |     33 |     21 |      9 |      5 |      2 |    114 |      0 |      0 |      3 |     16 |     11 |      1 |      1 |      0 |    120 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |      1 |     34 |      0 |     37 | s03      | R    |
| 2302100 |     518 |    158 |    177 |    15 |    0 |     5 |    9 |    4 |    12 |    0 |    138 |    0 |    0 |    0 |    0 |    280 |    238 |      12 |       6 |       6 |       3 |     13 |     10 |      6 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |       15 |       19 |       11 |       11 |        8 |        7 |       3 |       13 |       31 |       12 |        8 |        4 |       12 |       4 |        8 |       39 |       17 |       17 |        8 |       14 |       0 |       19 |       14 |        4 |       11 |       13 |       13 |       0 |       14 |       38 |       12 |        5 |        2 |        2 |       0 |       17 |       35 |        4 |        4 |        3 |        2 |       0 |        7 |       16 |        6 |        0 |        0 |        1 |       0 |        6 |        7 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     15 |     19 |      1 |      0 |      0 |    123 |      0 |      0 |      0 |     18 |     24 |      5 |      7 |      5 |    118 |      0 |      0 |      1 |     18 |      6 |      0 |      0 |      0 |    113 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     39 |      0 |     37 | s03      | R    |
| 2303000 |     352 |     89 |    147 |     9 |    0 |     1 |    4 |    0 |     6 |    0 |     96 |    0 |    0 |    0 |    0 |    210 |    142 |       4 |       5 |       4 |       1 |      6 |      6 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      0 |        3 |       23 |        7 |        7 |        6 |        3 |       0 |        4 |       15 |        4 |        7 |        1 |        8 |       1 |       11 |       28 |       10 |       14 |       15 |        9 |       3 |       11 |       15 |        7 |        2 |       12 |        8 |       2 |        9 |       28 |       12 |        6 |        4 |        0 |       0 |       15 |       12 |        3 |        3 |        3 |        1 |       0 |        1 |        9 |        1 |        1 |        0 |        0 |       0 |        2 |        3 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |     12 |      1 |      3 |      1 |     63 |      0 |      0 |      0 |     19 |     19 |     10 |      5 |      2 |     92 |      0 |      0 |      1 |      8 |      7 |      2 |      0 |      0 |     78 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2303100 |     588 |    171 |    219 |    20 |    0 |     9 |    6 |    1 |    24 |    0 |    138 |    0 |    0 |    0 |    0 |    350 |    238 |       7 |       7 |       1 |       1 |      6 |     12 |      6 |      3 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |       10 |       28 |       16 |       13 |       11 |        6 |       3 |       16 |       27 |       12 |       13 |        9 |        6 |       1 |       22 |       56 |       17 |       19 |       15 |       13 |       5 |        8 |       26 |        5 |       11 |       11 |        8 |       3 |       17 |       41 |       10 |        5 |        2 |        3 |       0 |       22 |       27 |        5 |        2 |        2 |        2 |       0 |       14 |       12 |        8 |        2 |        1 |        1 |       0 |        7 |        9 |        1 |        1 |        2 |        2 |       0 |      0 |      3 |     12 |     16 |      6 |      6 |      8 |    120 |      0 |      0 |      0 |     17 |     27 |      4 |      9 |      5 |    157 |      0 |      0 |      0 |      8 |      6 |      1 |      3 |      3 |    117 |      0 |      0 |      1 |      3 |      8 |      1 |      0 |      0 |     47 |      0 |     37 | s03      | R    |
| 2305900 |      17 |      3 |      5 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     10 |      7 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2306000 |      62 |     19 |     24 |     2 |    0 |     1 |    2 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     39 |     23 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        4 |        4 |        1 |       0 |        0 |        1 |        1 |        4 |        0 |        0 |       0 |        0 |        1 |        4 |        4 |        4 |        1 |       0 |        0 |        0 |        3 |        2 |        3 |        2 |       0 |        1 |        1 |        0 |        2 |        3 |        0 |       0 |        1 |        0 |        1 |        1 |        4 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      9 |      3 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |     19 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2306200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2306300 |      48 |     12 |     18 |     2 |    0 |     3 |    2 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     23 |     25 |       2 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        0 |        1 |       1 |        0 |        2 |        1 |        1 |        1 |        2 |       0 |        0 |        2 |        1 |        1 |        3 |        1 |       0 |        0 |        1 |        3 |        1 |        3 |        2 |       0 |        0 |        2 |        3 |        2 |        0 |        1 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        3 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |      1 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 2309000 |     538 |    182 |    211 |    19 |    0 |    10 |    6 |    2 |     6 |    0 |    102 |    0 |    0 |    0 |    0 |    246 |    292 |      13 |       7 |       7 |       5 |      9 |     11 |      6 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        9 |        5 |        5 |       20 |        9 |       23 |       3 |        1 |        7 |       19 |       29 |       21 |       27 |       4 |        5 |        8 |       15 |       14 |       10 |       38 |       4 |        3 |        6 |       21 |       17 |       16 |       50 |       4 |       10 |        6 |        9 |        9 |        8 |        7 |       1 |        6 |        8 |       10 |        5 |       14 |        9 |       0 |        2 |        7 |        5 |       10 |        1 |        3 |       0 |        2 |        1 |        4 |        2 |        2 |        4 |       0 |      0 |      4 |     29 |     23 |     10 |      6 |      5 |    105 |      0 |      0 |      0 |     30 |     22 |      7 |      9 |      6 |    137 |      0 |      0 |      2 |     21 |     10 |      1 |      1 |      1 |     66 |      0 |      0 |      2 |      6 |      7 |      1 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 2311000 |     324 |     72 |    145 |    12 |    0 |     5 |    7 |    2 |    10 |    0 |     71 |    0 |    0 |    0 |    0 |    175 |    149 |       4 |      11 |       4 |       2 |      6 |      5 |      4 |      3 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        7 |        4 |        9 |        5 |        4 |       2 |        8 |       10 |        4 |        2 |        5 |        5 |       2 |        7 |       21 |       10 |       10 |       21 |        9 |       1 |        9 |       11 |        9 |       15 |       15 |        6 |       1 |        5 |       18 |        8 |        3 |        4 |        2 |       0 |        8 |       11 |        4 |        6 |        2 |        0 |       0 |        3 |        6 |        4 |        2 |        2 |        3 |       0 |        6 |        3 |        0 |        3 |        1 |        3 |       0 |      0 |      0 |     11 |      6 |      1 |      1 |      2 |     51 |      0 |      0 |      2 |      9 |     14 |      8 |      6 |      4 |    102 |      0 |      0 |      1 |      6 |      2 |      3 |      0 |      0 |     59 |      0 |      0 |      0 |      4 |      8 |      1 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 2312000 |     262 |     71 |    114 |     5 |    0 |     3 |    3 |    1 |     5 |    0 |     60 |    0 |    0 |    0 |    0 |    147 |    115 |       5 |       2 |       2 |       0 |      2 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        9 |        5 |        7 |        7 |        0 |       1 |        7 |       10 |        3 |        5 |        7 |        4 |       2 |       15 |       17 |        5 |       12 |        7 |        9 |       1 |        9 |       12 |        2 |        6 |        9 |        9 |       1 |        4 |       16 |        6 |        6 |        5 |        2 |       1 |        3 |        8 |        5 |        2 |        1 |        1 |       0 |        2 |        2 |        0 |        2 |        2 |        0 |       0 |        1 |        2 |        2 |        2 |        2 |        0 |       0 |      0 |      0 |      9 |      5 |      2 |      0 |      2 |     53 |      0 |      0 |      0 |     16 |     15 |      2 |      2 |      3 |     76 |      0 |      0 |      2 |     10 |      4 |      3 |      3 |      1 |     37 |      0 |      0 |      0 |      4 |      4 |      0 |      2 |      0 |      7 |      0 |     37 | s03      | R    |
| 2313000 |     375 |    126 |    165 |     3 |    0 |     6 |    5 |    1 |     5 |    0 |     64 |    0 |    0 |    0 |    0 |    188 |    187 |       3 |       2 |       0 |       0 |     13 |      5 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |       11 |        8 |        6 |       16 |        6 |       5 |        6 |       18 |       10 |        9 |       13 |        9 |       3 |        2 |       17 |        8 |        8 |       25 |       14 |       6 |        4 |       16 |        6 |       17 |       26 |       10 |       6 |        4 |       14 |        7 |        6 |        5 |        1 |       0 |        7 |       10 |        5 |        2 |        2 |        1 |       0 |        1 |        4 |        3 |        2 |        2 |        1 |       0 |        2 |        1 |        0 |        0 |        2 |        2 |       0 |      0 |      0 |     22 |     17 |      2 |      4 |      2 |     79 |      0 |      0 |      1 |     19 |     28 |      6 |      6 |      4 |    101 |      0 |      0 |      1 |     14 |      4 |      0 |      0 |      1 |     44 |      0 |      0 |      0 |      1 |      6 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 2350000 |     324 |    113 |     73 |    10 |    0 |     8 |    5 |    2 |    20 |    0 |     93 |    0 |    0 |    0 |    0 |    183 |    141 |       6 |       3 |       6 |       2 |     11 |      2 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        4 |       25 |        8 |        6 |        8 |        2 |       1 |        8 |       19 |        5 |       12 |       10 |        5 |       0 |        1 |       24 |        4 |        8 |        3 |        2 |       1 |        6 |        9 |        5 |        3 |        2 |        4 |       1 |        5 |       36 |        8 |        6 |        3 |        1 |       0 |        7 |       20 |        4 |        2 |        1 |        0 |       0 |        1 |       19 |        2 |        4 |        1 |        0 |       0 |        5 |        7 |        3 |        3 |        0 |        0 |       0 |      0 |      2 |     13 |     12 |      2 |      3 |      1 |     80 |      0 |      0 |      1 |      5 |      8 |      0 |      1 |      1 |     57 |      0 |      0 |      1 |     11 |      5 |      1 |      0 |      0 |     75 |      0 |      0 |      1 |      6 |      3 |      0 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 2353000 |     575 |    214 |    108 |    22 |    0 |    10 |   15 |    3 |    27 |    0 |    176 |    0 |    0 |    0 |    0 |    298 |    277 |      12 |       4 |      11 |       2 |     11 |      3 |      9 |      3 |      1 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        3 |       43 |       25 |       17 |        9 |        2 |       0 |       10 |       53 |       20 |       13 |       11 |        6 |       2 |        3 |       29 |       17 |        5 |        4 |        4 |       1 |        3 |       18 |        5 |       12 |        4 |        2 |       1 |       11 |       40 |       21 |       16 |        2 |        1 |       0 |       11 |       50 |       12 |        7 |        5 |        0 |       0 |        6 |       23 |        7 |        7 |        2 |        0 |       0 |        4 |       18 |        5 |        2 |        2 |        1 |       0 |      0 |      0 |     20 |     23 |      7 |      2 |      2 |    160 |      0 |      0 |      0 |     15 |      8 |      1 |      0 |      1 |     83 |      0 |      0 |      1 |     12 |      8 |      3 |      0 |      1 |    151 |      0 |      0 |      0 |     16 |      3 |      0 |      0 |      0 |     58 |      0 |     37 | s03      | R    |
| 2353100 |     167 |     62 |     31 |     3 |    0 |     1 |    4 |    0 |    12 |    0 |     54 |    0 |    0 |    0 |    0 |     95 |     72 |      11 |       2 |       1 |       0 |      3 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |       10 |        9 |        9 |        2 |        2 |       0 |        2 |       10 |        4 |        4 |        6 |        2 |       0 |        2 |        7 |        2 |        4 |        1 |        1 |       1 |        5 |        3 |        3 |        0 |        1 |        1 |       0 |        2 |       21 |        3 |        3 |        1 |        3 |       0 |        4 |       10 |        3 |        2 |        2 |        0 |       0 |        2 |        6 |        1 |        0 |        1 |        0 |       0 |        3 |        4 |        2 |        0 |        1 |        0 |       0 |      0 |      1 |      5 |      9 |      4 |      1 |      2 |     40 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     50 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 2354900 |      57 |     15 |     11 |     4 |    0 |     0 |    0 |    0 |     3 |    0 |     24 |    0 |    0 |    0 |    0 |     27 |     30 |       2 |       1 |       0 |       2 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        5 |        2 |        2 |        1 |        1 |       0 |        0 |        1 |        2 |        0 |        2 |        0 |       0 |        0 |        2 |        1 |        1 |        2 |        0 |       0 |        1 |        7 |        4 |        2 |        0 |        0 |       0 |        2 |        5 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      1 |      1 |      0 |     10 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     19 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2355000 |     484 |    189 |    103 |    20 |    0 |     7 |    9 |    2 |    24 |    0 |    130 |    0 |    0 |    0 |    0 |    253 |    231 |      10 |       1 |       3 |       2 |      6 |      2 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      1 |      2 |        4 |       35 |       14 |       17 |        6 |        7 |       2 |       13 |       45 |        9 |       14 |       15 |        8 |       0 |        3 |       15 |       17 |       17 |        3 |        4 |       1 |        7 |       13 |        5 |        4 |        9 |        2 |       3 |        8 |       40 |       14 |        9 |        5 |        2 |       1 |       10 |       23 |        8 |        6 |        1 |        3 |       0 |        2 |       12 |       12 |        3 |        0 |        0 |       0 |        7 |       16 |        4 |        3 |        3 |        0 |       0 |      0 |      0 |     22 |     16 |     10 |      5 |      1 |    135 |      0 |      0 |      1 |     13 |     11 |      1 |      3 |      0 |     74 |      0 |      0 |      0 |     17 |      3 |      0 |      5 |      1 |    104 |      0 |      0 |      1 |      7 |      0 |      1 |      0 |      0 |     53 |      0 |     37 | s03      | R    |
| 2355100 |     354 |    123 |     61 |     5 |    0 |     8 |    7 |    1 |    16 |    0 |    133 |    0 |    0 |    0 |    0 |    203 |    151 |       5 |       4 |       6 |       0 |     11 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      2 |      1 |       0 |       0 |       0 |       0 |      2 |      0 |      3 |      0 |        8 |       27 |       11 |        9 |        7 |        2 |       1 |        6 |       24 |        7 |       12 |        5 |        3 |       1 |        3 |       16 |        8 |        7 |        4 |        1 |       0 |        1 |        9 |        5 |        2 |        1 |        4 |       0 |       11 |       35 |       15 |        5 |        4 |        3 |       0 |       16 |       33 |        6 |        2 |        2 |        1 |       0 |        5 |       16 |        1 |        3 |        1 |        0 |       0 |        0 |        4 |        1 |        3 |        2 |        1 |       0 |      0 |      0 |     14 |      6 |      2 |      0 |      1 |    100 |      0 |      0 |      0 |      5 |      8 |      2 |      1 |      0 |     45 |      0 |      0 |      0 |     13 |      6 |      2 |      0 |      0 |    112 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 2355200 |     423 |    156 |    128 |     9 |    0 |     3 |    7 |    2 |    12 |    0 |    106 |    0 |    0 |    0 |    0 |    220 |    203 |       8 |       7 |       5 |       3 |     10 |      3 |      7 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        8 |       17 |       11 |       18 |        3 |        8 |       3 |        5 |       31 |       15 |       11 |       10 |       12 |       4 |        3 |       23 |       14 |        7 |        9 |       11 |       3 |        6 |       10 |       13 |       10 |        2 |       12 |       5 |       10 |       27 |       17 |        7 |        2 |        0 |       0 |       10 |       17 |       10 |        5 |        1 |        0 |       0 |        1 |        9 |        3 |        4 |        2 |        0 |       0 |        1 |        6 |        5 |        1 |        0 |        1 |       0 |      0 |      0 |     17 |     28 |      4 |      0 |      5 |    102 |      0 |      0 |      0 |     11 |     13 |      4 |      6 |      4 |     90 |      0 |      0 |      1 |     13 |      6 |      2 |      0 |      0 |     84 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 2360000 |     361 |    139 |    103 |    16 |    0 |     2 |    3 |    3 |    13 |    0 |     82 |    0 |    0 |    0 |    0 |    175 |    186 |      10 |       7 |       3 |       1 |      6 |      3 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |       12 |        5 |       16 |        5 |        6 |       5 |        6 |       21 |       11 |       24 |       10 |       11 |       5 |        3 |       16 |       11 |       11 |       12 |        7 |       0 |        8 |        6 |        8 |       13 |        4 |        3 |       1 |        3 |       25 |        5 |        5 |        3 |        1 |       0 |        5 |       23 |        5 |        2 |        4 |        1 |       0 |        5 |       12 |        2 |        2 |        1 |        0 |       0 |        1 |        8 |        2 |        3 |        1 |        0 |       0 |      0 |      1 |     22 |     17 |      5 |      2 |      2 |     90 |      0 |      0 |      0 |     18 |      5 |      2 |      4 |      5 |     69 |      0 |      0 |      1 |      8 |      5 |      0 |      2 |      1 |     65 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |     31 |      0 |     37 | s03      | R    |
| 2363000 |     759 |    286 |    151 |    18 |    0 |     7 |   18 |    1 |    45 |    0 |    233 |    0 |    0 |    0 |    0 |    367 |    392 |      17 |       6 |      12 |       7 |     17 |      5 |     11 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      0 |      0 |       15 |       55 |       21 |       20 |        8 |        4 |       0 |       23 |       77 |       24 |       19 |       11 |        9 |       0 |       15 |       37 |        9 |       10 |        5 |        6 |       0 |       11 |       29 |       13 |        6 |        6 |        3 |       1 |       14 |       70 |        8 |       13 |        8 |        1 |       0 |       21 |       74 |       15 |        7 |        2 |        0 |       0 |       10 |       24 |       10 |        4 |        0 |        0 |       0 |        8 |       28 |        2 |        1 |        2 |        0 |       0 |      0 |      2 |     26 |     19 |      5 |      1 |      8 |    225 |      0 |      0 |      1 |     17 |     13 |      6 |      2 |      2 |    110 |      0 |      0 |      2 |     27 |      9 |      3 |      2 |      0 |    190 |      0 |      0 |      0 |      8 |      7 |      1 |      0 |      0 |     73 |      0 |     37 | s03      | R    |
| 2363100 |     737 |    266 |    170 |    21 |    0 |    11 |    6 |    3 |    36 |    0 |    224 |    0 |    0 |    0 |    0 |    374 |    363 |       9 |       6 |       4 |       4 |     16 |     12 |     18 |      8 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      6 |      0 |      0 |      1 |      1 |      0 |      2 |      1 |       0 |       0 |       0 |       0 |      4 |      2 |      1 |      0 |        5 |       36 |       22 |       23 |       16 |       11 |       2 |       20 |       54 |       18 |       32 |       12 |       12 |       3 |        4 |       37 |       22 |       11 |        9 |        7 |       3 |       11 |       23 |       11 |       13 |        6 |        8 |       5 |       18 |       46 |       29 |       19 |       11 |        1 |       0 |        9 |       61 |       13 |        9 |        7 |        1 |       0 |        5 |       20 |       10 |        4 |        1 |        2 |       0 |        2 |       19 |        6 |        5 |        2 |        1 |       0 |      0 |      0 |     34 |     29 |      5 |      8 |      4 |    186 |      0 |      0 |      1 |     15 |     17 |      2 |      3 |      3 |    129 |      0 |      0 |      1 |     20 |     14 |      5 |      1 |      0 |    183 |      0 |      0 |      1 |      5 |      8 |      1 |      0 |      1 |     61 |      0 |     37 | s03      | R    |
| 2364000 |     710 |    267 |    210 |    16 |    0 |    11 |    7 |    5 |    28 |    0 |    166 |    0 |    0 |    0 |    0 |    348 |    362 |      21 |       8 |       9 |       7 |     16 |      5 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        3 |       24 |       31 |       19 |       22 |        6 |       9 |        6 |       37 |       28 |       33 |       24 |       14 |      11 |        9 |       20 |       24 |       24 |       12 |       14 |       7 |       10 |       16 |       18 |       22 |        8 |       16 |      10 |        3 |       36 |       15 |       21 |       10 |        2 |       0 |        7 |       31 |       18 |       12 |        7 |        2 |       2 |        4 |       11 |        7 |       11 |        4 |        0 |       0 |        3 |       13 |        6 |        4 |        3 |        1 |       0 |      0 |      2 |     27 |     38 |      9 |      3 |      4 |    184 |      0 |      0 |      1 |     20 |     26 |      6 |      4 |      3 |    150 |      0 |      0 |      2 |     18 |     23 |      5 |      2 |      2 |    114 |      0 |      0 |      0 |      8 |     16 |      3 |      0 |      0 |     40 |      0 |     37 | s03      | R    |
| 2365000 |     427 |    132 |     89 |    21 |    0 |    10 |    5 |    1 |    32 |    0 |    137 |    0 |    0 |    0 |    0 |    203 |    224 |       9 |       5 |       7 |       2 |     11 |      0 |      8 |      2 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      1 |        4 |       25 |        9 |       15 |        4 |        3 |       0 |       14 |       35 |        7 |        8 |        3 |        5 |       0 |        4 |       20 |        8 |       10 |        2 |        3 |       2 |        6 |       20 |        6 |        4 |        1 |        2 |       1 |        7 |       31 |       12 |        6 |        4 |        1 |       0 |       16 |       40 |       10 |        6 |        4 |        0 |       0 |        3 |       23 |        4 |        2 |        1 |        0 |       0 |        5 |       20 |        8 |        1 |        1 |        1 |       0 |      0 |      0 |      8 |     17 |      5 |      2 |      3 |     97 |      0 |      0 |      0 |     12 |     10 |      1 |      0 |      4 |     62 |      0 |      0 |      0 |     10 |      5 |      2 |      0 |      0 |    120 |      0 |      0 |      2 |      7 |      5 |      1 |      0 |      0 |     54 |      0 |     37 | s03      | R    |
| 2366000 |     458 |    167 |    116 |    19 |    0 |    10 |    4 |    4 |    19 |    0 |    119 |    0 |    0 |    0 |    0 |    210 |    248 |      10 |       9 |       4 |       3 |     14 |      6 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |       29 |        7 |       15 |       12 |        4 |       1 |       11 |       29 |       15 |       21 |       11 |        5 |       1 |        4 |       14 |        9 |       12 |        7 |        7 |       0 |        3 |       29 |        7 |        8 |        6 |        8 |       2 |        6 |       30 |        6 |        5 |        3 |        4 |       0 |        8 |       30 |       10 |       12 |        1 |        4 |       0 |        2 |       16 |        6 |        2 |        0 |        0 |       3 |        3 |       13 |        7 |        1 |        1 |        2 |       0 |      0 |      2 |     19 |     21 |      8 |      2 |      6 |    109 |      0 |      0 |      0 |     11 |     19 |      1 |      1 |      2 |     82 |      0 |      0 |      1 |     11 |      4 |      4 |      1 |      0 |     98 |      0 |      0 |      0 |     11 |      8 |      1 |      1 |      0 |     35 |      0 |     37 | s03      | R    |
| 2369100 |     634 |    214 |    106 |    29 |    0 |     9 |   20 |    5 |    44 |    0 |    207 |    0 |    0 |    0 |    0 |    330 |    304 |      19 |       4 |      12 |       4 |     17 |      5 |      9 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      2 |       11 |       43 |       20 |       18 |       11 |        5 |       1 |       10 |       43 |       20 |       19 |        7 |        4 |       2 |       10 |       21 |       14 |       10 |        3 |        0 |       0 |       10 |       18 |        6 |        7 |        2 |        5 |       0 |       16 |       55 |       16 |        6 |        4 |        0 |       0 |       32 |       43 |       15 |       11 |        9 |        0 |       0 |       20 |       29 |       11 |        5 |        0 |        1 |       0 |       12 |       18 |        9 |        2 |        0 |        0 |       0 |      0 |      0 |     28 |     28 |      5 |      3 |      4 |    146 |      0 |      0 |      1 |     11 |      7 |      2 |      5 |      0 |     80 |      0 |      0 |      3 |     20 |      8 |      1 |      2 |      1 |    172 |      0 |      0 |      1 |      6 |      7 |      0 |      0 |      0 |     93 |      0 |     37 | s03      | R    |
| 2369300 |     521 |    194 |    116 |    22 |    0 |    10 |    6 |    4 |    28 |    0 |    141 |    0 |    0 |    0 |    0 |    275 |    246 |      13 |       9 |       6 |       3 |     10 |      3 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      0 |      1 |      0 |       12 |       23 |       10 |       21 |        9 |        3 |       4 |        7 |       57 |       15 |       16 |        8 |        6 |       3 |        4 |       25 |       21 |       13 |        7 |        5 |       1 |        6 |       13 |        4 |       10 |        1 |        5 |       1 |        7 |       45 |       14 |       10 |        0 |        0 |       0 |       17 |       33 |       10 |        4 |        0 |        1 |       0 |        9 |       17 |        7 |        7 |        1 |        0 |       0 |        6 |       15 |        2 |        5 |        0 |        0 |       1 |      0 |      1 |     18 |     19 |      4 |      2 |      3 |    147 |      0 |      0 |      2 |     18 |     15 |      6 |      3 |      2 |     70 |      0 |      0 |      1 |     13 |      7 |      0 |      0 |      1 |    119 |      0 |      0 |      1 |      7 |      5 |      1 |      0 |      1 |     55 |      0 |     37 | s03      | R    |
| 2371000 |     862 |    303 |    204 |    26 |    0 |    15 |   16 |   13 |    54 |    0 |    231 |    0 |    0 |    0 |    0 |    428 |    434 |      20 |      10 |      14 |       5 |     17 |      5 |     10 |      9 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      1 |       1 |       0 |       0 |       0 |      6 |      0 |      3 |      2 |        6 |       44 |       28 |       23 |       11 |       10 |       3 |       17 |       52 |       39 |       35 |       13 |       15 |       7 |       10 |       28 |       29 |       19 |       13 |        5 |       2 |       14 |       31 |       19 |       12 |        7 |       10 |       5 |        8 |       62 |       25 |       19 |        7 |        3 |       1 |       23 |       38 |       27 |        9 |        9 |        0 |       0 |        3 |       30 |       22 |       11 |        5 |        1 |       0 |        4 |       31 |        8 |        6 |        2 |        1 |       0 |      0 |      1 |     54 |     46 |      6 |      1 |      8 |    187 |      0 |      0 |      0 |     26 |     30 |     10 |      4 |      2 |    132 |      0 |      0 |      0 |     18 |     21 |      9 |      2 |      3 |    178 |      0 |      0 |      7 |     15 |     15 |      4 |      1 |      1 |     81 |      0 |     37 | s03      | R    |
| 2372000 |     415 |    151 |    147 |     8 |    0 |     1 |    6 |    1 |     9 |    0 |     92 |    0 |    0 |    0 |    0 |    199 |    216 |      11 |      10 |       6 |       2 |      7 |     12 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        0 |        8 |       13 |       14 |        7 |        4 |       9 |        4 |       14 |       19 |       27 |        9 |        8 |      15 |        5 |       10 |       17 |       20 |        7 |       14 |      10 |        3 |        6 |       17 |       13 |        5 |       11 |       9 |        4 |       15 |       12 |        7 |        5 |        2 |       0 |        6 |       13 |       13 |        9 |        3 |        3 |       0 |        1 |        1 |        6 |        5 |        3 |        0 |       0 |        1 |        2 |        3 |        1 |        2 |        0 |       0 |      0 |      1 |     22 |     22 |      5 |      4 |      5 |     92 |      0 |      0 |      0 |     16 |     24 |      9 |      6 |      8 |     84 |      0 |      0 |      0 |     12 |     10 |      1 |      0 |      1 |     68 |      0 |      0 |      0 |      6 |      6 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 2374000 |     547 |    205 |    207 |    14 |    0 |     3 |    2 |    2 |     8 |    0 |    106 |    0 |    0 |    0 |    0 |    242 |    305 |       7 |       4 |       2 |       2 |     10 |      7 |      7 |      1 |      0 |      1 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      3 |      1 |        5 |        9 |       12 |       20 |       12 |       14 |      13 |        5 |       13 |       16 |       36 |       18 |       22 |      10 |        4 |        8 |       18 |       25 |       14 |       13 |       9 |        8 |       12 |       20 |       23 |       20 |       19 |      14 |        7 |       11 |       16 |        8 |        7 |        2 |       1 |       15 |       15 |       12 |        4 |        6 |        2 |       0 |        2 |        1 |        4 |        2 |        3 |        2 |       0 |        1 |        6 |        2 |        1 |        3 |        2 |       0 |      0 |      3 |     20 |     34 |      5 |      9 |     12 |    122 |      0 |      0 |      1 |     17 |     35 |     15 |     14 |     10 |    115 |      0 |      0 |      0 |      8 |     14 |      2 |      2 |      3 |     77 |      0 |      0 |      2 |      3 |      2 |      2 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 2376100 |     570 |    210 |    235 |    13 |    0 |     5 |    5 |    4 |     5 |    0 |     93 |    0 |    0 |    0 |    0 |    278 |    292 |       8 |       6 |       5 |       0 |      9 |     11 |      6 |      0 |      0 |      0 |      1 |      1 |      2 |      2 |      1 |      0 |      3 |      1 |      2 |      0 |      0 |      2 |      1 |      0 |       0 |       1 |       0 |       0 |      4 |      2 |      0 |      0 |        5 |       12 |       17 |       25 |       15 |       10 |      12 |        3 |       19 |       19 |       25 |       19 |       15 |      14 |        4 |       12 |       24 |       31 |       19 |       14 |      14 |        4 |       10 |       22 |       17 |       19 |       22 |      23 |        7 |        4 |       11 |       10 |        4 |        4 |       1 |        7 |        4 |       20 |       10 |        4 |        5 |       2 |        1 |        7 |        5 |        5 |        2 |        3 |       0 |        1 |        4 |        4 |        0 |        0 |        0 |       0 |      0 |      0 |     26 |     26 |      6 |      9 |     12 |    131 |      0 |      0 |      1 |     27 |     25 |      4 |      4 |      8 |    166 |      0 |      0 |      1 |     13 |     14 |      1 |      0 |      1 |     63 |      0 |      0 |      1 |      8 |      7 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2377000 |     499 |    192 |    191 |    11 |    0 |     3 |   15 |    2 |     9 |    0 |     76 |    0 |    0 |    0 |    0 |    239 |    260 |      12 |       2 |       1 |       1 |     10 |     12 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        9 |       17 |       17 |       19 |        9 |       9 |        3 |       12 |       16 |       26 |       21 |       16 |      16 |        4 |        8 |       14 |       19 |       14 |       18 |      15 |        2 |        6 |       18 |       18 |       18 |       23 |      14 |        5 |        7 |        4 |       13 |        5 |        2 |       1 |        7 |        9 |       10 |        7 |        3 |        2 |       1 |        3 |        2 |        8 |        8 |        4 |        3 |       0 |        1 |        2 |        4 |        3 |        2 |        0 |       0 |      0 |      1 |     18 |     23 |     12 |      5 |      5 |    128 |      0 |      0 |      1 |     12 |     27 |      9 |     10 |      7 |    125 |      0 |      0 |      0 |      6 |      9 |      7 |      4 |      2 |     48 |      0 |      0 |      0 |      3 |     10 |      5 |      1 |      0 |     21 |      0 |     37 | s03      | R    |
| 2380000 |     396 |    138 |    187 |     2 |    0 |     1 |    2 |    2 |     3 |    0 |     61 |    0 |    0 |    0 |    0 |    183 |    213 |       5 |       7 |       3 |       2 |      9 |      9 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      1 |        2 |        4 |       12 |       16 |        6 |       10 |       9 |        3 |        7 |       17 |       20 |       10 |       11 |      11 |        5 |       11 |       10 |       24 |       16 |       20 |       7 |        4 |        6 |       15 |       20 |       12 |       20 |      17 |        5 |        6 |        3 |       10 |        4 |        0 |       0 |        5 |        9 |        5 |        8 |        5 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        4 |        0 |        2 |        1 |        0 |       0 |      0 |      1 |     14 |     13 |      7 |      3 |      4 |     96 |      0 |      0 |      0 |     22 |     26 |     13 |     10 |      5 |    111 |      0 |      0 |      0 |     14 |      9 |      7 |      2 |      1 |     28 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 2383000 |     565 |    192 |    174 |    17 |    0 |     4 |    7 |    5 |    16 |    0 |    150 |    0 |    0 |    0 |    0 |    283 |    282 |      19 |      14 |      10 |       7 |      7 |      8 |      3 |      5 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      5 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      2 |      0 |        6 |       28 |        8 |       24 |        9 |        8 |       0 |       17 |       27 |       18 |       20 |        9 |       10 |       8 |        9 |       21 |       20 |       24 |        8 |        8 |       4 |       12 |       17 |       22 |       13 |        8 |        4 |       4 |       16 |       36 |       10 |       11 |        2 |        3 |       1 |       19 |       31 |       11 |        6 |        3 |        1 |       0 |        1 |       15 |        5 |        2 |        2 |        2 |       0 |        6 |        9 |        2 |        4 |        0 |        1 |       0 |      0 |      1 |     21 |     20 |      4 |      4 |      7 |    135 |      0 |      0 |      0 |     12 |     27 |      8 |      2 |      5 |    120 |      0 |      0 |      0 |     14 |     12 |      1 |      0 |      1 |    122 |      0 |      0 |      0 |      7 |      6 |      2 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 2386000 |     435 |    176 |    120 |     7 |    0 |     5 |    4 |    2 |    15 |    0 |    106 |    0 |    0 |    0 |    0 |    202 |    233 |      11 |       8 |       4 |       3 |      7 |      5 |      3 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      1 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        7 |       14 |       16 |       14 |       12 |        9 |       3 |        8 |       18 |       22 |       18 |       14 |       17 |       4 |        4 |       16 |        8 |       15 |        9 |        5 |       3 |        9 |       14 |       13 |        9 |        8 |        6 |       1 |        6 |       28 |        8 |        4 |        3 |        3 |       0 |       11 |       20 |        7 |        9 |        2 |        4 |       1 |        2 |        7 |        1 |        4 |        0 |        1 |       0 |        1 |        5 |        6 |        4 |        0 |        2 |       0 |      0 |      3 |     20 |     25 |      8 |      2 |      8 |    110 |      0 |      0 |      0 |     12 |     21 |      5 |      4 |      1 |     77 |      0 |      0 |      0 |      8 |      8 |      2 |      1 |      0 |     87 |      0 |      0 |      1 |      4 |      4 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 2388000 |     460 |    154 |    140 |    27 |    0 |     1 |   11 |    1 |    12 |    0 |    114 |    0 |    0 |    0 |    0 |    215 |    245 |      16 |       4 |      11 |       4 |      6 |      3 |      5 |      4 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        8 |       19 |       13 |        8 |        6 |        3 |       1 |        9 |       32 |       19 |       19 |        9 |        4 |       4 |        8 |       25 |       18 |       10 |        7 |        3 |       1 |       13 |       26 |       14 |        6 |        6 |        3 |       0 |       10 |       26 |       10 |        7 |        4 |        2 |       2 |       13 |       26 |        6 |        6 |        1 |        1 |       0 |        4 |       12 |        4 |        3 |        1 |        0 |       0 |        5 |       17 |        2 |        2 |        1 |        1 |       0 |      0 |      0 |     13 |     12 |      4 |      2 |      3 |    120 |      0 |      0 |      0 |     15 |     10 |      1 |      6 |      0 |    108 |      0 |      0 |      3 |      4 |      3 |      1 |      0 |      0 |    103 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     47 |      0 |     37 | s03      | R    |
| 2389000 |     467 |    151 |    134 |    21 |    0 |     7 |    5 |    3 |    12 |    0 |    134 |    0 |    0 |    0 |    0 |    216 |    251 |      15 |       8 |       9 |       5 |      9 |      7 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |       10 |       25 |       11 |       11 |        5 |        1 |       0 |       11 |       42 |        8 |       11 |        5 |        8 |       3 |        8 |       23 |       19 |       11 |        4 |        6 |       0 |       10 |       21 |       17 |        8 |        3 |        1 |       3 |       17 |       27 |        9 |        9 |        1 |        0 |       0 |       22 |       30 |        7 |        6 |        4 |        2 |       0 |        7 |        6 |        5 |        1 |        0 |        0 |       0 |        6 |       16 |        4 |        2 |        0 |        1 |       0 |      0 |      1 |     11 |     13 |      1 |      3 |      0 |    122 |      0 |      0 |      0 |     11 |     20 |      2 |      4 |      1 |     96 |      0 |      0 |      1 |     10 |      5 |      2 |      2 |      0 |    114 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |     40 |      0 |     37 | s03      | R    |
| 2400000 |     400 |    143 |    174 |     9 |    0 |     6 |    4 |    1 |     2 |    0 |     61 |    0 |    0 |    0 |    0 |    179 |    221 |       8 |       2 |       0 |       1 |     13 |     12 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      2 |      2 |      0 |        2 |        4 |        9 |       10 |       14 |       12 |       6 |        1 |       14 |        6 |       12 |       16 |       31 |       6 |        4 |       10 |       10 |       18 |       14 |       19 |       7 |        5 |        8 |       10 |       15 |       18 |       23 |      13 |        1 |        6 |        3 |        5 |        6 |        7 |       1 |        3 |        5 |        4 |        6 |        9 |        5 |       0 |        1 |        1 |        1 |        3 |        2 |        2 |       1 |        4 |        2 |        1 |        3 |        0 |        1 |       0 |      0 |      2 |     20 |     21 |      7 |      3 |      8 |     82 |      0 |      0 |      0 |     13 |     27 |     13 |      7 |      3 |    111 |      0 |      0 |      0 |      8 |      9 |      2 |      2 |      0 |     40 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 2401000 |     389 |    128 |    151 |    13 |    0 |     5 |    6 |    2 |     3 |    0 |     81 |    0 |    0 |    0 |    0 |    179 |    210 |       7 |       5 |       5 |       1 |     15 |      9 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      1 |      0 |        1 |       12 |        9 |       13 |       11 |       12 |       1 |        6 |       11 |        9 |        5 |       19 |       18 |       1 |        2 |       17 |       10 |       12 |       15 |       20 |       0 |        6 |       11 |        8 |       19 |       13 |       14 |       4 |        2 |        7 |       11 |        4 |        3 |        5 |       0 |        9 |       16 |        8 |        7 |        3 |        6 |       0 |        2 |        5 |        0 |        1 |        2 |        2 |       0 |        0 |        7 |        4 |        2 |        1 |        3 |       0 |      0 |      0 |     20 |     15 |      3 |      8 |      3 |     79 |      0 |      0 |      0 |     10 |     17 |      6 |     10 |      0 |    108 |      0 |      0 |      0 |      7 |      6 |      1 |      3 |      1 |     63 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |     23 |      0 |     37 | s03      | R    |
| 2401100 |     807 |    299 |    275 |    22 |    0 |     5 |    5 |    2 |    25 |    0 |    174 |    0 |    0 |    0 |    0 |    381 |    426 |      35 |      25 |      18 |       2 |     13 |     10 |      6 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |       0 |       3 |       1 |       0 |      3 |      1 |      1 |      0 |       11 |       31 |       19 |       23 |       15 |       12 |       0 |       22 |       50 |       23 |       32 |       33 |       25 |       3 |       18 |       43 |       21 |       35 |       12 |       15 |       0 |       20 |       42 |       15 |       23 |       15 |       16 |       0 |       11 |       37 |       24 |       12 |        7 |        3 |       0 |       28 |       29 |        9 |        9 |        5 |        0 |       0 |        4 |       12 |        7 |        6 |        2 |        1 |       0 |        5 |       16 |        1 |        4 |        0 |        1 |       0 |      0 |      2 |     48 |     30 |      8 |      6 |      4 |    201 |      0 |      0 |      1 |     25 |     16 |      5 |      8 |      9 |    211 |      0 |      0 |      0 |     10 |     13 |      5 |      0 |      0 |    146 |      0 |      0 |      0 |      8 |      3 |      0 |      1 |      0 |     47 |      0 |     37 | s03      | R    |
| 2401200 |     621 |    228 |    201 |     7 |    0 |     6 |    8 |    1 |    18 |    0 |    152 |    0 |    0 |    0 |    0 |    279 |    342 |      31 |      12 |      15 |       3 |      8 |     10 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |       16 |       27 |        7 |       15 |        7 |        6 |       0 |       20 |       41 |       22 |       27 |       19 |       20 |       1 |       21 |       28 |       32 |       12 |        6 |        4 |       1 |       19 |       39 |       12 |       11 |        5 |       10 |       1 |       15 |       31 |       13 |        8 |        4 |        3 |       0 |       25 |       28 |        8 |        5 |        7 |        5 |       0 |        3 |       15 |        4 |        1 |        0 |        0 |       0 |        3 |        6 |        4 |        0 |        3 |        1 |       0 |      0 |      2 |     35 |     18 |      6 |      7 |      3 |    157 |      0 |      0 |      2 |      7 |     13 |      2 |      4 |      5 |    168 |      0 |      0 |      4 |     12 |      6 |      1 |      1 |      0 |    128 |      0 |      0 |      1 |      4 |      2 |      1 |      1 |      0 |     31 |      0 |     37 | s03      | R    |
| 2402100 |     560 |    211 |    169 |    11 |    0 |     7 |    8 |    5 |     8 |    0 |    141 |    0 |    0 |    0 |    0 |    246 |    314 |      22 |       5 |      11 |       3 |     15 |      7 |      5 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      2 |      0 |        6 |       28 |       15 |       19 |        6 |        5 |       3 |       17 |       31 |       19 |       28 |       14 |       16 |       4 |       14 |       21 |        7 |       14 |       11 |        4 |       3 |       10 |       18 |       16 |       13 |       14 |       23 |       1 |       10 |       24 |       11 |       15 |        6 |        2 |       2 |       16 |       24 |       17 |        6 |        6 |        2 |       0 |        2 |        4 |        5 |        6 |        2 |        1 |       0 |        0 |        6 |        7 |        4 |        2 |        0 |       0 |      0 |      0 |     34 |     22 |      4 |      3 |      2 |    146 |      0 |      0 |      0 |     15 |     19 |      4 |      4 |      4 |    123 |      0 |      0 |      0 |     10 |      8 |      5 |      3 |      1 |    114 |      0 |      0 |      0 |      4 |      9 |      1 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2404000 |     359 |    125 |    135 |    12 |    0 |     1 |    6 |    1 |     6 |    0 |     73 |    0 |    0 |    0 |    0 |    169 |    190 |      14 |       8 |       7 |       3 |      5 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       2 |       0 |      6 |      2 |      0 |      1 |        3 |        9 |        7 |        9 |        7 |       10 |       4 |        9 |       11 |       15 |        5 |       14 |       17 |       5 |        4 |       16 |        9 |       14 |        3 |       17 |       7 |        5 |        8 |        9 |        5 |        5 |       26 |       7 |        3 |       10 |       13 |        2 |        4 |        4 |       0 |        9 |        9 |        4 |        5 |        2 |        8 |       0 |        1 |        7 |        4 |        1 |        0 |        1 |       0 |        1 |        4 |        0 |        5 |        0 |        2 |       0 |      0 |      1 |     14 |     11 |      5 |      0 |      2 |     92 |      0 |      0 |      0 |     13 |     14 |      4 |      3 |      2 |     99 |      0 |      0 |      0 |      9 |      4 |      1 |      0 |      0 |     59 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 2404100 |     234 |     73 |     69 |     7 |    0 |     2 |    3 |    2 |     7 |    0 |     71 |    0 |    0 |    0 |    0 |    113 |    121 |       3 |       2 |       1 |       1 |      5 |      1 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |       10 |        6 |        3 |        1 |        1 |       0 |       15 |       20 |        7 |        5 |        2 |        3 |       0 |        7 |       25 |        8 |        3 |        1 |        3 |       0 |        2 |       11 |        3 |        1 |        3 |        2 |       0 |        4 |       24 |        3 |        0 |        1 |        1 |       0 |        7 |       26 |        3 |        0 |        2 |        0 |       0 |        2 |       10 |        0 |        0 |        0 |        0 |       0 |        5 |        3 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      5 |      4 |      2 |      1 |      0 |     61 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      3 |     61 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |     63 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 2405000 |     241 |     84 |    107 |     6 |    0 |     1 |    1 |    0 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |    112 |    129 |       3 |       1 |       1 |       0 |      2 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        5 |        8 |        8 |        4 |        7 |       5 |        1 |        8 |       12 |        9 |        5 |        6 |       5 |        3 |        3 |       17 |       11 |        5 |        8 |       5 |        1 |        5 |        9 |       11 |        4 |       19 |       6 |        4 |        1 |        4 |        5 |        1 |        4 |       0 |        1 |        7 |        8 |        1 |        2 |        2 |       2 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        3 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      7 |      8 |      5 |      2 |      7 |     55 |      0 |      0 |      0 |     15 |      9 |      7 |      7 |      6 |     63 |      0 |      0 |      2 |      9 |      3 |      0 |      1 |      2 |     25 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 2405100 |     235 |     85 |     75 |     6 |    0 |     2 |    3 |    0 |     2 |    0 |     62 |    0 |    0 |    0 |    0 |    111 |    124 |      14 |      11 |       7 |       1 |      1 |      3 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |       13 |        6 |        6 |        2 |        2 |       0 |       10 |       13 |        7 |       11 |        6 |        4 |       0 |        2 |       11 |        6 |        8 |        4 |        9 |       0 |        7 |        6 |        8 |        3 |        2 |        9 |       0 |        8 |        8 |        5 |        4 |        2 |        2 |       0 |        9 |       11 |        4 |        4 |        2 |        3 |       0 |        2 |        3 |        2 |        1 |        0 |        0 |       0 |        2 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     10 |      3 |      2 |      0 |      2 |     68 |      0 |      0 |      0 |     11 |      6 |      4 |      2 |      2 |     50 |      0 |      0 |      1 |      5 |      4 |      1 |      0 |      0 |     51 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2407000 |     444 |    127 |    160 |    23 |    0 |     5 |    2 |    1 |     5 |    0 |    121 |    0 |    0 |    0 |    0 |    185 |    259 |      29 |      36 |      27 |       6 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      3 |      1 |       19 |       19 |        6 |        3 |        1 |        0 |       0 |       26 |       35 |       11 |        3 |        1 |        3 |       0 |       19 |       43 |       13 |        1 |        0 |        1 |       0 |       37 |       34 |        7 |        3 |        2 |        0 |       0 |       18 |       17 |       12 |        0 |        1 |        0 |       0 |       26 |       36 |        8 |        2 |        1 |        0 |       0 |        4 |        6 |        1 |        1 |        0 |        0 |       0 |        6 |       17 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     11 |      6 |      0 |      0 |      0 |    109 |      0 |      0 |      0 |      9 |      4 |      5 |      0 |      0 |    142 |      0 |      0 |      1 |     15 |      4 |      0 |      0 |      0 |    101 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      0 |     30 |      0 |     37 | s03      | R    |
| 2450000 |     647 |    275 |    206 |    34 |    0 |    10 |    5 |    2 |     9 |    0 |    106 |    0 |    0 |    0 |    0 |    291 |    356 |      37 |      16 |      12 |       5 |     13 |      9 |      2 |      3 |      1 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |       0 |       1 |       1 |       0 |      8 |      2 |      1 |      0 |        3 |        5 |        8 |       13 |       20 |       45 |       1 |        5 |        6 |       10 |       13 |       26 |      118 |       2 |        5 |        7 |       14 |       14 |       20 |       46 |       1 |        5 |        4 |        5 |        4 |       14 |       67 |       0 |        4 |        8 |        7 |       12 |        4 |       22 |       0 |        3 |        6 |        2 |        3 |        7 |       27 |       1 |        2 |        3 |        3 |        5 |        7 |       12 |       0 |        2 |        2 |        0 |        4 |        5 |       15 |       0 |      0 |      1 |     44 |     47 |     11 |      4 |      4 |    164 |      0 |      0 |      2 |     30 |     35 |      6 |      2 |      3 |    128 |      0 |      0 |      1 |     24 |     10 |      3 |      2 |      1 |     65 |      0 |      0 |      0 |      7 |     14 |      3 |      2 |      0 |     34 |      0 |     37 | s03      | R    |
| 2452000 |     328 |    133 |     90 |    10 |    0 |     4 |    5 |    3 |     5 |    0 |     78 |    0 |    0 |    0 |    0 |    171 |    157 |      34 |      12 |      18 |       8 |      6 |      5 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |       10 |       12 |       13 |       10 |        9 |       3 |        7 |       17 |       15 |        7 |       15 |        7 |       5 |        3 |       18 |       12 |        9 |       10 |        3 |       2 |        4 |        6 |        6 |       10 |        2 |        4 |       1 |        4 |       13 |       13 |        5 |        3 |        4 |       0 |        7 |       14 |        7 |        7 |        0 |        1 |       0 |        1 |        1 |        3 |        5 |        2 |        0 |       0 |        2 |        9 |        3 |        0 |        0 |        1 |       0 |      0 |      1 |     22 |     16 |      6 |      4 |      3 |     81 |      0 |      0 |      1 |     10 |      9 |      5 |      0 |      0 |     65 |      0 |      0 |      1 |      8 |      8 |      1 |      1 |      1 |     58 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 2452100 |      51 |     17 |     19 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     42 |      9 |       2 |       3 |       2 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        1 |        5 |        6 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        5 |        8 |        1 |        2 |       0 |        2 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        8 |        2 |        1 |        0 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2453100 |       6 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2455000 |     164 |     56 |     56 |     7 |    0 |     2 |    0 |    1 |     2 |    0 |     40 |    0 |    0 |    0 |    0 |     82 |     82 |       4 |       5 |       6 |       3 |      6 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      0 |        3 |        2 |        2 |        5 |        9 |        2 |       3 |        2 |        4 |        7 |        4 |        5 |        7 |       1 |        1 |       13 |        2 |        5 |        4 |        4 |       1 |        0 |        9 |        6 |        4 |        4 |        1 |       2 |        0 |        4 |        8 |        2 |        3 |        1 |       0 |        4 |        7 |        3 |        3 |        2 |        3 |       0 |        0 |        1 |        4 |        1 |        2 |        0 |       0 |        0 |        1 |        0 |        2 |        1 |        0 |       0 |      0 |      1 |     11 |     11 |      1 |      0 |      0 |     32 |      0 |      0 |      0 |      4 |      8 |      2 |      2 |      1 |     39 |      0 |      0 |      1 |      6 |      4 |      1 |      0 |      0 |     28 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 2500000 |     420 |    180 |    177 |     8 |    0 |     5 |    2 |    0 |     0 |    0 |     48 |    0 |    0 |    0 |    0 |    199 |    221 |      15 |       6 |       3 |       3 |     13 |      9 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        4 |       21 |       25 |       15 |       11 |       9 |        6 |        3 |       19 |       21 |       21 |       13 |       8 |        1 |        6 |       11 |       17 |       12 |       17 |      17 |        6 |        2 |       12 |       25 |       13 |       22 |      16 |        0 |        2 |        6 |        3 |       11 |        0 |       1 |        5 |        3 |        8 |        1 |        4 |        3 |       1 |        0 |        0 |        1 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        3 |        3 |        3 |       0 |      0 |      1 |     20 |     30 |      8 |      6 |      8 |    107 |      0 |      0 |      3 |     22 |     16 |      4 |      8 |      6 |    118 |      0 |      0 |      1 |     10 |      5 |      2 |      1 |      2 |     27 |      0 |      0 |      1 |      3 |      3 |      1 |      1 |      1 |      5 |      0 |     37 | s03      | R    |
| 2501000 |     182 |     56 |     88 |     3 |    0 |     1 |    1 |    1 |     3 |    0 |     29 |    0 |    0 |    0 |    0 |     94 |     88 |       0 |       5 |       1 |       0 |      5 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |        2 |        7 |        9 |        4 |       1 |        0 |        2 |        4 |        6 |        4 |        7 |       4 |        0 |        3 |        9 |        4 |       13 |        7 |       7 |        4 |        1 |        3 |        2 |       14 |       12 |       9 |        2 |        1 |        3 |        4 |        3 |        2 |       1 |        1 |        2 |        2 |        5 |        1 |        1 |       1 |        0 |        3 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |      0 |      1 |      4 |      4 |      2 |      1 |      3 |     41 |      0 |      0 |      0 |      8 |     14 |      2 |      1 |      3 |     60 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 2503000 |     523 |    217 |    228 |     5 |    0 |     1 |    2 |    3 |     7 |    0 |     60 |    0 |    0 |    0 |    0 |    247 |    276 |      13 |       8 |       1 |       1 |     26 |     10 |      4 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        1 |        9 |       16 |       24 |       24 |       11 |       7 |        8 |        6 |       15 |       36 |       38 |       10 |      12 |        8 |        4 |       19 |       25 |       21 |       22 |      13 |        4 |        8 |       16 |       19 |       21 |       31 |      17 |        1 |        1 |       11 |        8 |        7 |        4 |       0 |        4 |        5 |        5 |        4 |        9 |        1 |       0 |        4 |        4 |        1 |        1 |        1 |        0 |       0 |        2 |        0 |        1 |        1 |        1 |        2 |       0 |      0 |      2 |     24 |     30 |     10 |     12 |      9 |    130 |      0 |      0 |      0 |     23 |     38 |      6 |     10 |      6 |    145 |      0 |      0 |      1 |      7 |      7 |      1 |      1 |      0 |     43 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2505000 |     290 |     79 |    155 |     3 |    0 |     0 |    2 |    0 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    149 |    141 |       3 |       6 |       1 |       0 |     13 |     11 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      1 |      1 |        2 |        1 |       12 |       10 |        8 |        4 |       2 |        2 |        1 |        6 |       10 |        9 |        4 |       8 |        4 |        4 |        8 |       11 |       27 |       16 |      13 |        4 |        5 |        9 |       10 |       22 |       13 |       9 |        2 |        3 |        2 |        9 |        1 |        2 |       2 |        6 |        4 |        4 |        7 |        3 |        2 |       2 |        3 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |     13 |     16 |      3 |      1 |      1 |     45 |      0 |      0 |      0 |     21 |     21 |      7 |      9 |      5 |     92 |      0 |      0 |      0 |      7 |      6 |      3 |      2 |      2 |     29 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2506000 |     234 |     90 |     78 |     6 |    0 |     0 |    1 |    0 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    114 |    120 |       7 |       2 |       5 |       0 |      5 |      3 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        3 |       14 |       11 |        3 |        4 |       1 |        2 |       12 |        8 |       13 |       12 |        6 |       1 |        4 |       11 |        7 |        6 |        6 |        8 |       0 |        0 |        7 |        7 |        7 |        5 |        7 |       3 |        0 |        8 |        8 |        3 |        8 |        4 |       0 |        5 |       10 |        4 |        3 |        4 |        0 |       0 |        1 |        2 |        1 |        0 |        1 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     12 |     16 |      4 |      3 |      3 |     52 |      0 |      0 |      1 |     14 |      5 |      1 |      7 |      5 |     45 |      0 |      0 |      0 |      6 |      7 |      2 |      2 |      4 |     36 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 2506100 |     135 |     50 |     68 |     3 |    0 |     1 |    1 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     75 |     60 |       4 |       1 |       0 |       0 |      4 |      3 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        2 |       12 |        4 |        4 |       2 |        0 |        0 |        5 |        9 |        1 |        3 |       4 |        0 |        7 |        3 |        5 |       10 |        4 |       8 |        0 |        3 |        3 |        6 |        6 |        8 |       5 |        1 |        2 |        1 |        4 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |      6 |      5 |      4 |      4 |     28 |      0 |      0 |      0 |     10 |      8 |      5 |      0 |      2 |     43 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 2507000 |     201 |     85 |     93 |     3 |    0 |     1 |    0 |    0 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     97 |    104 |       5 |       0 |       2 |       1 |      6 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        8 |       10 |        6 |        4 |       4 |        4 |        1 |       11 |       14 |        6 |        5 |      12 |        0 |        4 |       11 |       12 |        7 |        7 |       7 |        0 |        3 |        7 |        7 |        6 |       11 |      11 |        1 |        1 |        2 |        4 |        2 |        0 |       2 |        2 |        0 |        3 |        1 |        0 |        0 |       0 |        0 |        3 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     10 |     20 |      6 |      5 |      2 |     42 |      0 |      0 |      0 |      5 |     11 |      6 |      5 |      3 |     63 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |     13 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 2508000 |     459 |    228 |    148 |     5 |    0 |     5 |    1 |    0 |     6 |    0 |     66 |    0 |    0 |    0 |    0 |    216 |    243 |      18 |       3 |       1 |       0 |     29 |      8 |      7 |      2 |      0 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      0 |        5 |       15 |       14 |       28 |       26 |        3 |       8 |        7 |       13 |       22 |       39 |       22 |       10 |      16 |        3 |        7 |        9 |       21 |       17 |        8 |       8 |        5 |        7 |        8 |       13 |       19 |       11 |      12 |        5 |        7 |        5 |        9 |        6 |        2 |       0 |        3 |        4 |        7 |        9 |        6 |        3 |       0 |        1 |        2 |        4 |        2 |        1 |        0 |       0 |        0 |        1 |        2 |        1 |        2 |        0 |       1 |      0 |      0 |     24 |     35 |     11 |      7 |      7 |    144 |      0 |      0 |      1 |      8 |     29 |     10 |      8 |      2 |     90 |      0 |      0 |      0 |      9 |     12 |      4 |      2 |      1 |     38 |      0 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 2510000 |     469 |    207 |    165 |     6 |    0 |     0 |    5 |    1 |     6 |    0 |     79 |    0 |    0 |    0 |    0 |    200 |    269 |      19 |       4 |       7 |       0 |     14 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       1 |       1 |       0 |       0 |      2 |      0 |      1 |      0 |        1 |       12 |       16 |       24 |       19 |        9 |       7 |        3 |       25 |       20 |       26 |       20 |       16 |       9 |        3 |        7 |       11 |       16 |       11 |       10 |       4 |        1 |        9 |       22 |       15 |       23 |       26 |       7 |        2 |       13 |       10 |       13 |        2 |        3 |       0 |        4 |       10 |       11 |        7 |        2 |        2 |       0 |        1 |        2 |        3 |        1 |        0 |        0 |       0 |        0 |        5 |        4 |        1 |        1 |        0 |       0 |      0 |      1 |     12 |     28 |     14 |     11 |      8 |    133 |      0 |      0 |      1 |     13 |     26 |      4 |      5 |      3 |    113 |      0 |      0 |      1 |     10 |     10 |      3 |      1 |      2 |     52 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 2512000 |     443 |    184 |    128 |    10 |    0 |     4 |    2 |    4 |     6 |    0 |    105 |    0 |    0 |    0 |    0 |    216 |    227 |      12 |       7 |       8 |       1 |     16 |      7 |      6 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      2 |      1 |      2 |      0 |        1 |       22 |       14 |       25 |        6 |        8 |       5 |        6 |       18 |       31 |       18 |       10 |       15 |       5 |        2 |       12 |       11 |       13 |        7 |       15 |       6 |        0 |       11 |        7 |        9 |       16 |       11 |       8 |        5 |       16 |       15 |       10 |        8 |        5 |       0 |        6 |       17 |        9 |        5 |        6 |        1 |       2 |        1 |        3 |        3 |        0 |        3 |        0 |       0 |        1 |        3 |        3 |        4 |        1 |        4 |       0 |      0 |      1 |     18 |     22 |     11 |      4 |      5 |    123 |      0 |      0 |      1 |     15 |     17 |     10 |      3 |      1 |     81 |      0 |      0 |      1 |     16 |     10 |      4 |      0 |      4 |     70 |      0 |      0 |      1 |      4 |      4 |      2 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 2513000 |     438 |    187 |    167 |     6 |    0 |     3 |    3 |    1 |    11 |    0 |     60 |    0 |    0 |    0 |    0 |    214 |    224 |      18 |       5 |       3 |       2 |      8 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      1 |      1 |      0 |        1 |        3 |       22 |       21 |       13 |       11 |       8 |        3 |       10 |       21 |       23 |       21 |       12 |      18 |        3 |        7 |       14 |       19 |       14 |       24 |       7 |        1 |        5 |       13 |       17 |       11 |       17 |      15 |        2 |        6 |        6 |        6 |        7 |        4 |       1 |        2 |        4 |        8 |        2 |        7 |        4 |       1 |        3 |        4 |        3 |        2 |        0 |        3 |       0 |        1 |        3 |        3 |        2 |        0 |        0 |       0 |      0 |      6 |     22 |     19 |      6 |      5 |      7 |    122 |      0 |      0 |      3 |     13 |     27 |      4 |      3 |     12 |    105 |      0 |      0 |      0 |     11 |      7 |      3 |      1 |      4 |     34 |      0 |      0 |      2 |      6 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2513100 |     316 |    153 |     79 |     6 |    0 |     5 |    2 |    1 |     9 |    0 |     61 |    0 |    0 |    0 |    0 |    137 |    179 |       7 |       5 |       5 |       0 |      6 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |        5 |        6 |       14 |       15 |        8 |        6 |       6 |       10 |       15 |       16 |       19 |        9 |       17 |       7 |        2 |        4 |        9 |        9 |        7 |        2 |       2 |        1 |        5 |        6 |       14 |        6 |       10 |       2 |        1 |       10 |        7 |        5 |        5 |        2 |       1 |        5 |        9 |        6 |        4 |        3 |        2 |       1 |        1 |        2 |        3 |        3 |        2 |        0 |       0 |        4 |        3 |        0 |        2 |        1 |        2 |       0 |      0 |      1 |     22 |     27 |      3 |      3 |      3 |     94 |      0 |      0 |      1 |     14 |      9 |      4 |      3 |      4 |     44 |      0 |      0 |      0 |      7 |      5 |      3 |      0 |      0 |     46 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 2514000 |     438 |    157 |    127 |    11 |    0 |     4 |    5 |    0 |    18 |    0 |    116 |    0 |    0 |    0 |    0 |    232 |    206 |      21 |      10 |       7 |       1 |      8 |      7 |      5 |      1 |      1 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      1 |      1 |      1 |        3 |       23 |       22 |       13 |       10 |        8 |       0 |        6 |       21 |       19 |       13 |        8 |       10 |       1 |        3 |       12 |       17 |       17 |        5 |        9 |       3 |        2 |       12 |       13 |       11 |        7 |        8 |       8 |        3 |       25 |       19 |       10 |        3 |        4 |       1 |        7 |       27 |        7 |        6 |        1 |        2 |       1 |        2 |        7 |        8 |        4 |        0 |        1 |       0 |        2 |        8 |        2 |        3 |        1 |        0 |       0 |      0 |      0 |     19 |     14 |      6 |      2 |      5 |    111 |      0 |      0 |      0 |     12 |     18 |      6 |      2 |      6 |     83 |      0 |      0 |      0 |     12 |      4 |      4 |      1 |      2 |     93 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |     30 |      0 |     37 | s03      | R    |
| 2516000 |     411 |    212 |    107 |     7 |    0 |     4 |    6 |    0 |     6 |    0 |     69 |    0 |    0 |    0 |    0 |    197 |    214 |      16 |       7 |       7 |       5 |     11 |      5 |      6 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |       23 |       20 |       20 |       14 |        7 |       5 |       11 |       32 |       23 |       21 |       15 |       13 |       5 |        0 |       12 |       16 |        7 |        9 |        8 |       3 |        5 |       12 |        8 |        9 |        8 |        7 |       3 |        6 |       15 |       10 |        4 |        1 |        1 |       0 |        2 |       13 |        4 |        4 |        5 |        3 |       1 |        1 |        6 |        2 |        1 |        1 |        1 |       1 |        2 |        4 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |     15 |     29 |      8 |      2 |     11 |    147 |      0 |      0 |      1 |      8 |     17 |      2 |      1 |      6 |     72 |      0 |      0 |      1 |      2 |      3 |      3 |      1 |      0 |     59 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 2516100 |     563 |    259 |    149 |     9 |    0 |     4 |    3 |    3 |    11 |    0 |    125 |    0 |    0 |    0 |    0 |    269 |    294 |      26 |       6 |      10 |       1 |     14 |      6 |      7 |      3 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      5 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |        5 |       27 |       32 |       29 |       18 |        9 |       6 |        9 |       39 |       15 |       29 |       16 |       20 |       5 |        4 |       16 |       14 |       15 |        7 |       12 |       3 |        8 |       13 |       18 |       13 |        3 |       15 |       8 |        4 |       23 |       15 |       11 |        3 |        2 |       0 |        6 |       28 |       15 |        8 |        8 |        2 |       0 |        0 |        4 |        2 |        5 |        1 |        2 |       0 |        3 |        5 |        1 |        3 |        3 |        1 |       0 |      0 |      3 |     28 |     33 |      9 |      4 |      5 |    177 |      0 |      0 |      2 |      9 |     18 |      6 |      2 |      5 |    107 |      0 |      0 |      0 |     11 |     14 |      1 |      1 |      1 |     97 |      0 |      0 |      1 |      4 |      6 |      1 |      2 |      0 |     16 |      0 |     37 | s03      | R    |
| 2519100 |     373 |    172 |    105 |     7 |    0 |     4 |    3 |    0 |    11 |    0 |     71 |    0 |    0 |    0 |    0 |    168 |    205 |      22 |       8 |       6 |       0 |      7 |      3 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |       10 |       14 |       11 |        6 |       30 |       1 |        1 |       10 |        7 |        7 |       15 |       56 |       3 |        1 |        6 |        6 |        7 |        4 |       17 |       2 |        1 |       11 |        5 |        6 |        6 |       29 |       4 |        2 |       11 |        7 |        7 |        5 |        7 |       0 |        2 |        9 |        8 |        3 |        1 |        9 |       0 |        0 |        0 |        5 |        4 |        0 |        4 |       0 |        1 |        3 |        2 |        1 |        1 |        4 |       0 |      0 |      0 |     18 |     25 |     10 |      2 |      5 |    112 |      0 |      0 |      1 |     14 |     17 |      2 |      6 |      3 |     62 |      0 |      0 |      0 |     10 |      5 |      2 |      0 |      2 |     52 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2521000 |     415 |    200 |    131 |     1 |    0 |     6 |    5 |    1 |     3 |    0 |     68 |    0 |    0 |    0 |    0 |    205 |    210 |       4 |       3 |       4 |       3 |     21 |     11 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        6 |       16 |       21 |       16 |       12 |       9 |        2 |       14 |       28 |       23 |       24 |       14 |      12 |        1 |        6 |       16 |       10 |       18 |       10 |       6 |        1 |        4 |        8 |       10 |       16 |       18 |       7 |        3 |        9 |       11 |        7 |       10 |        2 |       2 |        2 |        5 |        6 |        7 |        4 |        0 |       0 |        2 |        1 |        3 |        3 |        1 |        1 |       0 |        0 |        2 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |     21 |     40 |     13 |      3 |      7 |    116 |      0 |      0 |      1 |     11 |     21 |      6 |      6 |      7 |     79 |      0 |      0 |      0 |      9 |     13 |      5 |      3 |      1 |     37 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 2550000 |     373 |    196 |     63 |     7 |    0 |     2 |    7 |    0 |    11 |    0 |     87 |    0 |    0 |    0 |    0 |    188 |    185 |      18 |       3 |       7 |       0 |     15 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |       1 |       0 |       2 |       0 |      1 |      1 |      2 |      0 |        6 |       27 |       25 |       18 |       15 |        4 |       0 |        8 |       22 |       24 |       18 |       20 |        7 |       2 |        0 |        9 |       10 |        3 |        4 |        3 |       1 |        1 |       14 |        7 |        4 |        1 |        4 |       2 |        4 |       20 |       20 |        3 |        0 |        1 |       0 |        5 |       24 |        8 |        2 |        0 |        0 |       0 |        0 |        6 |        8 |        1 |        0 |        0 |       0 |        0 |        9 |        2 |        0 |        1 |        0 |       0 |      0 |      2 |     22 |     18 |      9 |      6 |      4 |    135 |      0 |      0 |      0 |      6 |      5 |      1 |      1 |      2 |     48 |      0 |      0 |      1 |     11 |      3 |      1 |      0 |      0 |     71 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 2551000 |     526 |    291 |    104 |    14 |    0 |     2 |    4 |    0 |     6 |    0 |    105 |    0 |    0 |    0 |    0 |    259 |    267 |      27 |       5 |       6 |       1 |     21 |      3 |      9 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |       1 |       0 |       1 |       0 |      0 |      1 |      1 |      0 |        3 |       32 |       25 |       36 |       17 |       17 |       1 |        8 |       36 |       29 |       32 |       23 |       23 |       9 |        3 |        7 |       11 |       13 |        6 |       10 |       2 |        2 |        9 |        7 |        4 |       12 |       16 |       2 |        8 |       25 |       12 |        4 |        6 |        7 |       0 |        3 |       20 |        5 |        5 |        6 |        4 |       0 |        1 |        6 |        2 |        4 |        0 |        1 |       0 |        1 |        3 |        2 |        3 |        1 |        2 |       0 |      0 |      2 |     38 |     43 |     12 |      5 |     16 |    175 |      0 |      0 |      1 |     11 |     22 |      8 |      3 |      4 |     55 |      0 |      0 |      2 |     13 |      7 |      3 |      1 |      1 |     78 |      0 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2552100 |     712 |    346 |    182 |    14 |    0 |     3 |    6 |    4 |     9 |    0 |    148 |    0 |    0 |    0 |    0 |    349 |    363 |      37 |       5 |      10 |       1 |     31 |     10 |     11 |      2 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      1 |      0 |      2 |      0 |       1 |       0 |       0 |       0 |      4 |      3 |      2 |      0 |        2 |       34 |       27 |       29 |       29 |       32 |       1 |        6 |       52 |       26 |       27 |       27 |       42 |      12 |        4 |       15 |       14 |       16 |        9 |       34 |       2 |        1 |       16 |        8 |       17 |        8 |       33 |       5 |        4 |       16 |       22 |       16 |       16 |        7 |       0 |        1 |       32 |        9 |        6 |        4 |       15 |       0 |        1 |        4 |        5 |        4 |        4 |        2 |       0 |        0 |        7 |        4 |        4 |        1 |        0 |       0 |      0 |      4 |     42 |     37 |     12 |     12 |      7 |    232 |      0 |      0 |      1 |     17 |     26 |      6 |      5 |      8 |    119 |      0 |      0 |      1 |     10 |     17 |      2 |      1 |      2 |    115 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      1 |     26 |      0 |     37 | s03      | R    |
| 2553000 |     659 |    371 |    114 |    11 |    0 |     3 |    6 |    1 |    17 |    0 |    136 |    0 |    0 |    0 |    0 |    332 |    327 |      18 |       3 |      11 |       2 |     41 |      5 |     10 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      4 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        7 |       33 |       60 |       45 |       21 |       19 |       1 |        8 |       65 |       30 |       21 |       21 |       37 |       3 |        3 |       12 |       16 |        5 |        5 |       17 |       0 |        2 |        8 |        8 |        5 |        7 |       25 |       1 |        3 |       19 |       14 |       15 |        5 |       10 |       0 |        9 |       36 |        7 |        5 |        8 |        5 |       0 |        3 |        7 |        6 |        2 |        1 |        3 |       0 |        1 |        8 |        2 |        2 |        2 |        1 |       0 |      0 |      1 |     32 |     43 |     10 |      7 |      2 |    276 |      0 |      0 |      1 |     15 |     13 |      4 |      4 |      3 |     74 |      0 |      0 |      2 |      9 |      9 |      2 |      1 |      1 |    112 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     31 |      0 |     37 | s03      | R    |
| 2554000 |     478 |    249 |     78 |    11 |    0 |     7 |    2 |    2 |    13 |    0 |    116 |    0 |    0 |    0 |    0 |    234 |    244 |      19 |       5 |       5 |       2 |     20 |      2 |      5 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      4 |      0 |      0 |      0 |        3 |       35 |       44 |       23 |        9 |       11 |       2 |        7 |       47 |       31 |       12 |       12 |       12 |       1 |        1 |       10 |       10 |        8 |        2 |        5 |       1 |        3 |       16 |        2 |        3 |        4 |       10 |       3 |        3 |       26 |       11 |        6 |        4 |        0 |       0 |        7 |       46 |        4 |        3 |        4 |        2 |       0 |        3 |        7 |        5 |        2 |        1 |        2 |       0 |        4 |        5 |        3 |        2 |        1 |        0 |       0 |      0 |      2 |     37 |     31 |      8 |      6 |      2 |    163 |      0 |      0 |      0 |     13 |      4 |      4 |      3 |      1 |     53 |      0 |      0 |      0 |     14 |      8 |      0 |      0 |      0 |     94 |      0 |      0 |      0 |      4 |      3 |      3 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2556000 |     619 |    301 |    113 |    13 |    0 |     7 |   11 |    5 |    21 |    0 |    148 |    0 |    0 |    0 |    0 |    322 |    297 |      31 |       5 |       6 |       9 |     21 |      2 |      7 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |      1 |      0 |      3 |      0 |       0 |       1 |       2 |       0 |      3 |      0 |      4 |      0 |        2 |       49 |       44 |       31 |       14 |       10 |       6 |       24 |       50 |       24 |       15 |        8 |       21 |       3 |        6 |       18 |       10 |       11 |        8 |        8 |       2 |        3 |       25 |        4 |        1 |        7 |        8 |       2 |        8 |       37 |       13 |        7 |        3 |        3 |       0 |       13 |       43 |        9 |        9 |        0 |        3 |       0 |        8 |        8 |        7 |        5 |        1 |        3 |       0 |        4 |       13 |        4 |        3 |        0 |        0 |       1 |      0 |      0 |     30 |     20 |      7 |      4 |      2 |    238 |      0 |      0 |      2 |      6 |      9 |      2 |      2 |      0 |     92 |      0 |      0 |      1 |     13 |      2 |      3 |      1 |      1 |    127 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |     48 |      0 |     37 | s03      | R    |
| 2559000 |     615 |    333 |    116 |    10 |    0 |     3 |    5 |    4 |    14 |    0 |    130 |    0 |    0 |    0 |    0 |    304 |    311 |      21 |       9 |       6 |       4 |     27 |      4 |      7 |      3 |      0 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |       2 |       1 |       3 |       0 |      3 |      2 |      0 |      1 |        1 |       42 |       55 |       33 |       20 |       13 |       3 |        9 |       46 |       39 |       30 |       17 |       22 |       3 |        2 |       11 |       17 |        9 |        8 |       14 |       1 |        3 |       19 |        8 |        6 |        7 |       10 |       1 |        3 |       22 |       16 |        5 |        6 |        7 |       0 |        8 |       42 |        5 |        8 |        4 |        3 |       1 |        1 |        6 |        4 |        2 |        2 |        1 |       0 |        4 |       10 |        2 |        1 |        1 |        2 |       0 |      0 |      1 |     45 |     38 |     10 |      8 |      8 |    223 |      0 |      0 |      1 |     11 |     14 |      3 |      3 |      1 |     83 |      0 |      0 |      0 |     17 |     14 |      2 |      2 |      3 |     92 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 2560000 |     579 |    307 |     94 |    12 |    0 |     5 |    7 |    1 |    22 |    0 |    131 |    0 |    0 |    0 |    0 |    327 |    252 |      38 |      13 |       9 |       7 |     18 |      4 |      7 |      3 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      3 |      0 |      2 |      0 |      1 |      0 |       3 |       0 |       1 |       0 |      2 |      0 |      1 |      1 |        6 |       49 |       43 |       41 |       23 |        7 |       1 |       16 |       54 |       14 |       15 |       18 |       20 |       0 |        3 |       19 |        7 |       10 |        8 |        3 |       0 |        5 |       12 |        8 |        8 |        3 |        7 |       1 |        9 |       33 |       13 |        9 |        7 |        5 |       1 |        9 |       28 |        3 |       11 |        1 |        2 |       0 |        4 |       11 |        6 |        6 |        3 |        0 |       0 |        2 |       10 |        1 |        2 |        1 |        1 |       0 |      0 |      4 |     56 |     39 |      6 |      3 |      1 |    198 |      0 |      0 |      0 |     14 |      7 |      0 |      0 |      1 |     72 |      0 |      0 |      2 |     11 |      9 |      0 |      1 |      1 |    107 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      0 |     36 |      0 |     37 | s03      | R    |
| 2562100 |     722 |    353 |    175 |    20 |    0 |     4 |    7 |    4 |    13 |    0 |    146 |    0 |    0 |    0 |    0 |    404 |    318 |      29 |       8 |      10 |       3 |     30 |     12 |     11 |      3 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      0 |      2 |      1 |        4 |       31 |       59 |       30 |       22 |       36 |       4 |        9 |       45 |       31 |       19 |       23 |       36 |       4 |        3 |       10 |       19 |       10 |       16 |       47 |       2 |        1 |        9 |        6 |        5 |       12 |       33 |       2 |        5 |       23 |       16 |       20 |        4 |       12 |       1 |       13 |       19 |        7 |        5 |        9 |       12 |       0 |        1 |       10 |        7 |        1 |        4 |        7 |       0 |        2 |        8 |        4 |        1 |        2 |        1 |       0 |      0 |      4 |     47 |     43 |      6 |      5 |     13 |    235 |      0 |      0 |      1 |     22 |     34 |      9 |      6 |      4 |     99 |      0 |      0 |      1 |     21 |     14 |      4 |      1 |      1 |    104 |      0 |      0 |      0 |      6 |     12 |      0 |      1 |      0 |     29 |      0 |     37 | s03      | R    |
| 2567000 |     354 |    161 |    117 |     6 |    0 |     3 |    3 |    0 |     5 |    0 |     59 |    0 |    0 |    0 |    0 |    182 |    172 |      14 |       3 |       3 |       0 |     18 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        7 |       31 |       21 |       10 |        8 |       7 |        3 |        5 |       16 |       21 |       17 |       10 |       5 |        2 |        3 |        7 |        4 |       14 |       14 |      10 |        2 |        2 |        4 |       12 |       17 |       17 |       9 |        1 |        3 |       10 |       11 |        3 |        4 |       0 |        1 |        5 |        8 |        9 |        1 |        3 |       0 |        0 |        0 |        6 |        4 |        1 |        1 |       0 |        0 |        1 |        2 |        0 |        0 |        2 |       0 |      0 |      1 |     20 |     32 |      6 |      6 |      4 |     92 |      0 |      0 |      0 |     16 |     20 |      6 |      6 |      7 |     62 |      0 |      0 |      1 |      7 |     11 |      1 |      1 |      1 |     37 |      0 |      0 |      0 |      1 |      5 |      0 |      2 |      0 |      9 |      0 |     37 | s03      | R    |
| 2568000 |     244 |    120 |     53 |     7 |    0 |     2 |    3 |    1 |     7 |    0 |     51 |    0 |    0 |    0 |    0 |    121 |    123 |       6 |       1 |       2 |       0 |      6 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      2 |      0 |        0 |       11 |       16 |       15 |       10 |        4 |       4 |        3 |        9 |       13 |       19 |        6 |        9 |       1 |        2 |        6 |        4 |        6 |        1 |        4 |       2 |        2 |        4 |        4 |        3 |        3 |       10 |       2 |        3 |        7 |        7 |        7 |        2 |        0 |       0 |        3 |       12 |        2 |        5 |        1 |        2 |       0 |        0 |        2 |        3 |        3 |        1 |        1 |       0 |        0 |        5 |        2 |        1 |        1 |        1 |       0 |      0 |      0 |      9 |     19 |      6 |      7 |      2 |     77 |      0 |      0 |      0 |      3 |      7 |      2 |      1 |      4 |     36 |      0 |      0 |      0 |      8 |      1 |      2 |      0 |      1 |     39 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2570000 |     606 |    301 |    122 |    21 |    0 |    11 |    8 |    7 |    14 |    0 |    122 |    0 |    0 |    0 |    0 |    302 |    304 |      28 |       9 |       6 |       2 |     25 |      8 |      5 |      1 |      0 |      1 |      0 |      0 |      3 |      1 |      2 |      0 |      3 |      0 |      2 |      1 |      1 |      2 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        5 |       24 |       46 |       38 |       22 |        9 |       3 |        4 |       42 |       29 |       33 |       24 |       18 |       4 |        4 |       14 |       14 |       13 |        8 |       10 |       5 |        3 |       12 |        6 |        8 |        6 |       17 |       2 |        3 |       21 |       11 |       11 |        7 |        2 |       3 |        6 |       25 |       13 |        9 |        6 |        3 |       2 |        1 |        5 |        7 |        6 |        6 |        4 |       0 |        5 |       10 |        5 |        5 |        4 |        3 |       0 |      0 |      0 |     25 |     56 |     10 |      6 |      8 |    196 |      0 |      0 |      3 |     14 |      9 |      5 |      3 |      3 |     85 |      0 |      0 |      0 |     16 |      9 |      3 |      1 |      4 |     89 |      0 |      0 |      0 |      9 |     15 |      2 |      1 |      0 |     34 |      0 |     37 | s03      | R    |
| 2571000 |     859 |    467 |    144 |    23 |    0 |     7 |   10 |    4 |    14 |    0 |    190 |    0 |    0 |    0 |    0 |    463 |    396 |      45 |      10 |      17 |       4 |     42 |     11 |      8 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      9 |      2 |      3 |      3 |        4 |       45 |       84 |       64 |       24 |       29 |       1 |        8 |       57 |       29 |       39 |       19 |       63 |       1 |        1 |       23 |       21 |       16 |       10 |       13 |       0 |        0 |       21 |        9 |        3 |        5 |       17 |       5 |        1 |       34 |       24 |       21 |        5 |       15 |       0 |        6 |       33 |       16 |       14 |        8 |       13 |       0 |        2 |       13 |        4 |        8 |        1 |        0 |       0 |        5 |        8 |        4 |        4 |        4 |        5 |       0 |      0 |      3 |     56 |     60 |     25 |     10 |      2 |    311 |      0 |      0 |      0 |     20 |     17 |     11 |      8 |      1 |     87 |      0 |      0 |      3 |     23 |     17 |      4 |      1 |      0 |    142 |      0 |      0 |      0 |     10 |     10 |      1 |      0 |      0 |     37 |      0 |     37 | s03      | R    |
| 2572000 |     476 |    254 |     72 |    18 |    0 |     8 |    6 |    1 |    14 |    0 |    103 |    0 |    0 |    0 |    0 |    275 |    201 |      26 |      10 |       7 |       1 |     16 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      4 |      1 |      1 |      1 |        3 |       50 |       44 |       38 |       18 |       11 |       1 |        1 |       42 |       16 |       16 |        6 |        8 |       0 |        1 |       12 |        9 |        8 |        4 |        3 |       1 |        6 |        7 |        7 |        3 |        2 |        7 |       2 |        1 |       24 |       13 |        7 |        8 |        3 |       0 |        5 |       24 |       11 |        2 |        2 |        3 |       0 |        3 |        9 |        1 |        2 |        0 |        1 |       0 |        5 |       14 |        3 |        5 |        1 |        3 |       0 |      0 |      2 |     35 |     29 |      8 |      6 |      0 |    174 |      0 |      0 |      0 |      6 |      7 |      2 |      1 |      1 |     55 |      0 |      0 |      0 |     13 |      9 |      1 |      2 |      0 |     78 |      0 |      0 |      0 |      8 |      1 |      0 |      1 |      0 |     37 |      0 |     37 | s03      | R    |
| 2573000 |     480 |    257 |     57 |    10 |    0 |     0 |    6 |    2 |    18 |    0 |    130 |    0 |    0 |    0 |    0 |    250 |    230 |      20 |       4 |       5 |       1 |     11 |      2 |      8 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |       36 |       34 |       36 |       13 |       15 |       1 |        7 |       27 |       18 |       21 |        9 |       34 |       2 |        0 |       13 |        5 |        3 |        3 |        5 |       0 |        2 |        8 |        1 |        2 |        2 |       13 |       0 |        4 |       12 |       16 |       12 |       11 |        4 |       0 |        9 |       32 |       13 |        4 |        7 |        6 |       0 |        3 |       10 |        5 |        3 |        1 |        1 |       0 |        2 |        9 |        1 |        1 |        0 |        0 |       0 |      0 |      4 |     33 |     36 |      4 |      8 |      4 |    168 |      0 |      0 |      1 |     10 |      4 |      2 |      0 |      1 |     39 |      0 |      0 |      1 |     16 |     11 |      1 |      0 |      0 |    101 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     30 |      0 |     37 | s03      | R    |
| 2575000 |     514 |    272 |    111 |     9 |    0 |     8 |    5 |    2 |    14 |    0 |     93 |    0 |    0 |    0 |    0 |    263 |    251 |      12 |       9 |       7 |       0 |     26 |      7 |      5 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      3 |      1 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |       25 |       49 |       25 |       15 |        9 |       4 |        6 |       35 |       27 |       29 |       20 |       17 |       7 |        1 |        7 |       11 |       13 |        7 |       12 |       2 |        4 |       11 |        8 |        7 |        7 |       16 |       5 |        6 |       11 |       13 |       12 |        7 |        5 |       1 |        4 |       10 |        5 |        9 |        2 |        7 |       1 |        1 |        7 |        6 |        6 |        2 |        2 |       0 |        0 |        4 |        2 |        2 |        4 |        2 |       0 |      0 |      4 |     31 |     39 |     13 |      3 |      8 |    174 |      0 |      0 |      0 |     10 |     13 |      6 |      4 |      3 |     75 |      0 |      0 |      0 |     16 |     10 |      1 |      1 |      4 |     61 |      0 |      0 |      0 |      6 |     12 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 2576000 |     596 |    307 |    117 |    10 |    0 |     4 |    6 |    3 |    13 |    0 |    136 |    0 |    0 |    0 |    0 |    306 |    290 |      22 |       7 |       5 |       2 |     24 |      3 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        1 |       28 |       43 |       35 |       17 |       15 |       7 |        4 |       40 |       43 |       31 |       21 |       16 |       6 |        4 |       16 |       15 |        7 |        7 |       10 |       4 |        2 |       10 |       10 |        7 |        4 |       14 |       7 |        2 |       18 |       20 |       20 |        9 |        5 |       0 |        5 |       30 |       14 |        7 |        3 |        2 |       1 |        3 |        7 |        4 |        6 |        2 |        1 |       0 |        2 |        2 |        5 |        2 |        2 |        0 |       0 |      0 |      3 |     51 |     37 |     14 |      4 |      4 |    194 |      0 |      0 |      1 |     12 |     13 |      3 |      4 |      4 |     80 |      0 |      0 |      1 |     14 |     12 |      3 |      6 |      0 |    100 |      0 |      0 |      1 |      4 |      4 |      1 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 2580000 |     388 |    186 |     86 |     8 |    0 |     0 |    4 |    2 |    16 |    0 |     86 |    0 |    0 |    0 |    0 |    193 |    195 |      22 |       2 |       2 |       1 |     10 |      3 |      1 |      4 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      3 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      4 |      2 |      0 |        2 |       18 |       25 |       31 |        9 |        2 |       3 |        4 |       20 |       21 |       34 |        8 |        6 |       3 |        2 |        9 |       10 |        5 |        9 |        9 |       2 |        2 |        6 |        5 |        7 |        2 |       15 |       3 |        0 |       15 |       14 |        7 |        3 |        2 |       1 |        6 |       24 |        9 |        3 |        2 |        0 |       0 |        1 |        8 |        1 |        4 |        1 |        0 |       0 |        2 |        7 |        4 |        1 |        1 |        0 |       0 |      0 |      1 |     21 |     30 |      9 |      4 |      3 |    118 |      0 |      0 |      1 |      8 |     12 |      4 |      4 |      2 |     55 |      0 |      0 |      2 |     12 |      8 |      1 |      1 |      1 |     61 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2581000 |     543 |    273 |     97 |    15 |    0 |     5 |    7 |    3 |    23 |    0 |    120 |    0 |    0 |    0 |    0 |    269 |    274 |      36 |       7 |       7 |       4 |     18 |      2 |      6 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       1 |       1 |       1 |       0 |      4 |      0 |      1 |      0 |        5 |       27 |       48 |       33 |       11 |        8 |       2 |        6 |       54 |       31 |       23 |       13 |       10 |       2 |        1 |        7 |       11 |        9 |        5 |        9 |       2 |        4 |       17 |       13 |        6 |        3 |        8 |       2 |        7 |       21 |       19 |        9 |        5 |        1 |       0 |       10 |       18 |       14 |        9 |        4 |        3 |       0 |        2 |       11 |        8 |        5 |        3 |        0 |       0 |        4 |        3 |        6 |        7 |        3 |        1 |       0 |      0 |      3 |     35 |     42 |     11 |      3 |      6 |    173 |      0 |      0 |      1 |      8 |     11 |      4 |      1 |      1 |     71 |      0 |      0 |      2 |     16 |     12 |      3 |      0 |      1 |     86 |      0 |      0 |      1 |      9 |      4 |      2 |      0 |      0 |     37 |      0 |     37 | s03      | R    |
| 2582000 |     937 |    460 |    161 |    19 |    0 |    10 |   13 |    6 |    34 |    0 |    234 |    0 |    0 |    0 |    0 |    452 |    485 |      47 |       7 |      15 |       6 |     20 |      4 |     13 |      3 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      5 |      3 |      7 |      0 |      1 |      0 |      2 |      1 |       0 |       0 |       1 |       0 |      2 |      1 |      2 |      0 |        7 |       58 |       63 |       57 |       16 |       17 |       4 |        6 |       79 |       59 |       50 |       25 |       16 |       3 |        6 |       21 |       18 |       19 |       10 |       10 |       3 |        4 |       14 |       14 |        8 |       15 |       18 |       1 |        5 |       45 |       30 |       16 |        7 |        5 |       0 |        7 |       61 |       34 |       19 |        3 |        2 |       0 |        2 |       10 |       13 |        7 |        2 |        1 |       0 |        6 |       21 |       11 |        8 |        1 |        0 |       0 |      0 |      7 |     54 |     59 |     13 |      3 |      5 |    319 |      0 |      0 |      0 |     13 |     24 |      4 |      8 |      7 |    105 |      0 |      0 |      1 |     33 |     18 |      5 |      1 |      2 |    174 |      0 |      0 |      1 |     15 |     12 |      0 |      1 |      0 |     53 |      0 |     37 | s03      | R    |
| 2602000 |     306 |    154 |     49 |    12 |    0 |     3 |    2 |    0 |    12 |    0 |     74 |    0 |    0 |    0 |    0 |    139 |    167 |      21 |       6 |       0 |       2 |      9 |      1 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |       13 |       22 |       15 |        9 |        5 |       0 |        4 |       36 |       13 |       23 |        8 |        3 |       1 |        2 |        8 |        3 |        4 |        2 |        3 |       2 |        6 |        7 |        2 |        3 |        4 |        3 |       0 |        4 |       19 |        7 |        5 |        1 |        1 |       0 |        6 |       19 |        2 |        4 |        3 |        2 |       1 |        2 |        7 |        0 |        2 |        1 |        0 |       0 |        1 |        9 |        3 |        3 |        1 |        0 |       0 |      0 |      3 |     21 |     15 |      6 |      0 |      3 |    106 |      0 |      0 |      0 |      3 |      1 |      1 |      5 |      0 |     39 |      0 |      0 |      0 |      4 |      2 |      1 |      1 |      1 |     65 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 2602100 |     445 |    206 |    107 |     9 |    0 |     3 |    7 |    4 |    11 |    0 |     98 |    0 |    0 |    0 |    0 |    214 |    231 |      35 |       4 |      13 |       2 |      8 |      9 |      2 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |       20 |       29 |       16 |       10 |        9 |       2 |        5 |       39 |       22 |       19 |       12 |       11 |       9 |        6 |        5 |       18 |       12 |        9 |       11 |       2 |        6 |       13 |        9 |        3 |        5 |        5 |       3 |        4 |       17 |       12 |        9 |        2 |        4 |       0 |       12 |       20 |        9 |        6 |        2 |        1 |       0 |        1 |        8 |        1 |        4 |        0 |        0 |       0 |        2 |        9 |        5 |        2 |        2 |        0 |       0 |      0 |      3 |     18 |     22 |      5 |      5 |     11 |    142 |      0 |      0 |      0 |     10 |      9 |     10 |      2 |      0 |     76 |      0 |      0 |      1 |     13 |      7 |      2 |      1 |      0 |     74 |      0 |      0 |      0 |      5 |      4 |      0 |      1 |      0 |     24 |      0 |     37 | s03      | R    |
| 2604000 |     548 |    269 |    118 |     9 |    0 |     6 |   10 |    3 |    20 |    0 |    113 |    0 |    0 |    0 |    0 |    281 |    267 |      27 |      16 |      10 |       2 |     17 |      8 |     12 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      8 |      3 |      1 |      0 |       17 |       32 |       46 |       30 |       12 |        5 |       2 |       12 |       47 |       27 |       21 |       11 |        5 |       2 |        4 |       21 |       14 |        5 |        4 |        7 |       1 |        7 |       20 |       10 |        9 |        6 |        7 |       3 |        2 |       17 |       20 |        8 |        5 |        2 |       0 |       14 |       24 |        8 |        7 |        3 |        3 |       0 |        5 |       10 |        7 |        2 |        2 |        1 |       0 |        6 |        7 |        4 |        2 |        2 |        0 |       0 |      0 |      2 |     31 |     31 |      9 |      0 |      3 |    193 |      0 |      0 |      1 |     18 |      9 |      1 |      4 |      4 |     81 |      0 |      0 |      1 |     10 |      7 |      1 |      0 |      2 |     92 |      0 |      0 |      1 |      7 |      3 |      0 |      1 |      0 |     36 |      0 |     37 | s03      | R    |
| 2606000 |     504 |    273 |     70 |    18 |    0 |     8 |    4 |    3 |    13 |    0 |    115 |    0 |    0 |    0 |    0 |    258 |    246 |      39 |       3 |       9 |       5 |      9 |      1 |      4 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |       0 |       3 |       1 |       0 |      0 |      1 |      3 |      0 |        4 |       44 |       38 |       31 |        7 |        6 |       3 |        8 |       54 |       26 |       23 |       10 |       15 |       4 |        4 |       10 |       11 |        7 |        5 |        4 |       1 |        1 |        7 |        8 |        6 |        1 |        4 |       1 |        3 |       26 |       18 |        8 |        0 |        0 |       0 |        6 |       30 |       13 |        3 |        5 |        3 |       0 |        3 |       12 |        5 |        6 |        2 |        0 |       0 |        3 |       10 |        4 |        1 |        0 |        0 |       0 |      0 |      2 |     35 |     28 |      6 |      3 |      5 |    194 |      0 |      0 |      1 |      9 |      9 |      1 |      0 |      0 |     50 |      0 |      0 |      1 |     18 |      5 |      1 |      1 |      2 |     87 |      0 |      0 |      1 |      7 |      2 |      0 |      0 |      0 |     36 |      0 |     37 | s03      | R    |
| 2606100 |     566 |    312 |     88 |    20 |    0 |     7 |   11 |    5 |     5 |    0 |    118 |    0 |    0 |    0 |    0 |    290 |    276 |      59 |       7 |      15 |       8 |      9 |      3 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       4 |       0 |       0 |       0 |      7 |      3 |      0 |      1 |        5 |       35 |       43 |       32 |       15 |       10 |       3 |       23 |       49 |       40 |       25 |       17 |       13 |       2 |        6 |       21 |       13 |        6 |        2 |        3 |       0 |        5 |       13 |        3 |        8 |        2 |        6 |       0 |        6 |       25 |       21 |        7 |        2 |        5 |       0 |       10 |       31 |        7 |        2 |        1 |        1 |       0 |        1 |        7 |       16 |        3 |        1 |        1 |       1 |        2 |        8 |        4 |        4 |        0 |        0 |       0 |      0 |      1 |     46 |     29 |      7 |      4 |      5 |    220 |      0 |      0 |      1 |     14 |      7 |      2 |      3 |      1 |     60 |      0 |      0 |      3 |     13 |      7 |      0 |      1 |      1 |     93 |      0 |      0 |      0 |     10 |      6 |      0 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 2608000 |     768 |    392 |    141 |    26 |    0 |    11 |    3 |    5 |    22 |    0 |    168 |    0 |    0 |    0 |    0 |    341 |    427 |      43 |      16 |      12 |       6 |     23 |      5 |      5 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      3 |      2 |      2 |      1 |      1 |      0 |      0 |      0 |       2 |       1 |       2 |       0 |      3 |      5 |      0 |      1 |        7 |       39 |       36 |       25 |       12 |       62 |       0 |       13 |       44 |       28 |       14 |       12 |       98 |       2 |        1 |       10 |       13 |        9 |        5 |       22 |       1 |        5 |       13 |        6 |        4 |        0 |       50 |       2 |       10 |       29 |        9 |        9 |        1 |       15 |       0 |       14 |       36 |       11 |        5 |        6 |       23 |       0 |        0 |        9 |        9 |        0 |        4 |        4 |       0 |        4 |       10 |        6 |        2 |        4 |       15 |       0 |      0 |      6 |     50 |     55 |      8 |     13 |      6 |    254 |      0 |      0 |      2 |     15 |     12 |      6 |     10 |      2 |     94 |      0 |      0 |      2 |     16 |     13 |      4 |      1 |      0 |    132 |      0 |      0 |      0 |      8 |     12 |      0 |      0 |      0 |     47 |      0 |     37 | s03      | R    |
| 2612000 |     359 |    192 |     64 |    16 |    0 |     4 |    5 |    0 |     8 |    0 |     70 |    0 |    0 |    0 |    0 |    160 |    199 |      19 |       6 |       3 |       3 |      6 |      2 |      3 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |       23 |       29 |       13 |        7 |       22 |       0 |        5 |       24 |       12 |       12 |        6 |       36 |       2 |        0 |       10 |        3 |        5 |        2 |        3 |       0 |        0 |        6 |        5 |        2 |        2 |       26 |       0 |        0 |       10 |       11 |        1 |        1 |        3 |       0 |        5 |       16 |        9 |        3 |        2 |        8 |       1 |        1 |       10 |        3 |        1 |        0 |        1 |       0 |        0 |        5 |        5 |        1 |        1 |        5 |       0 |      0 |      2 |     29 |     21 |      2 |      4 |      3 |    131 |      0 |      0 |      0 |     13 |     10 |      0 |      0 |      2 |     39 |      0 |      0 |      0 |      7 |      7 |      1 |      2 |      0 |     53 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2612100 |     573 |    303 |    119 |    16 |    0 |     7 |    5 |    4 |    12 |    0 |    107 |    0 |    0 |    0 |    0 |    308 |    265 |      27 |       5 |       8 |       3 |      8 |      5 |      8 |      2 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      5 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        2 |       35 |       39 |       32 |       23 |       22 |       4 |        8 |       37 |       26 |       27 |       24 |       21 |       3 |        2 |       17 |        9 |       16 |        8 |       16 |       0 |        3 |       11 |        9 |        3 |       10 |       12 |       3 |        3 |       23 |       14 |        8 |        2 |        4 |       0 |        7 |       20 |        9 |        9 |        4 |        4 |       0 |        0 |       10 |        7 |        6 |        4 |        2 |       0 |        1 |        7 |        1 |        4 |        1 |        1 |       0 |      0 |      5 |     48 |     33 |     13 |      7 |      6 |    191 |      0 |      0 |      1 |      6 |     14 |      4 |      6 |      2 |     86 |      0 |      0 |      0 |     12 |      4 |      1 |      1 |      0 |     89 |      0 |      0 |      0 |      5 |      7 |      1 |      0 |      0 |     31 |      0 |     37 | s03      | R    |
| 2612200 |     588 |    335 |     79 |    12 |    0 |     4 |    5 |    3 |    21 |    0 |    129 |    0 |    0 |    0 |    0 |    341 |    247 |      33 |       5 |       8 |       2 |     22 |      6 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      0 |      1 |      1 |        6 |       45 |       64 |       40 |       19 |       18 |       3 |        4 |       39 |       30 |       17 |       15 |       32 |       3 |        0 |       17 |       13 |        4 |        8 |        6 |       1 |        2 |        8 |        5 |        6 |        2 |        7 |       0 |        4 |       25 |       23 |       12 |        6 |        4 |       1 |       11 |       25 |        6 |        3 |        3 |        6 |       0 |        2 |        9 |        5 |        3 |        1 |        2 |       0 |        1 |       12 |        7 |        1 |        1 |        1 |       0 |      0 |      2 |     47 |     40 |      7 |      7 |      6 |    226 |      0 |      0 |      2 |      7 |      8 |      6 |      4 |      0 |     52 |      0 |      0 |      1 |     20 |      6 |      2 |      1 |      1 |     98 |      0 |      0 |      0 |      5 |      3 |      0 |      1 |      0 |     36 |      0 |     37 | s03      | R    |
| 2613000 |     213 |    118 |     20 |     4 |    0 |     3 |    3 |    1 |     5 |    0 |     59 |    0 |    0 |    0 |    0 |    110 |    103 |      16 |       0 |       4 |       2 |      7 |      0 |      4 |      1 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      2 |      0 |      0 |      0 |        4 |       12 |       18 |       18 |       10 |        1 |       0 |        6 |       21 |        7 |        9 |        7 |        5 |       0 |        1 |        5 |        1 |        3 |        0 |        1 |       0 |        3 |        2 |        2 |        0 |        1 |        1 |       0 |        4 |       10 |        6 |        5 |        1 |        0 |       0 |        2 |       20 |        5 |        3 |        1 |        2 |       0 |        1 |        2 |        3 |        2 |        2 |        0 |       0 |        1 |        3 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |     15 |     10 |      4 |      5 |      2 |     81 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     16 |      0 |      0 |      2 |      5 |      4 |      1 |      0 |      0 |     47 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2614000 |     310 |    159 |     62 |     6 |    0 |     3 |    4 |    1 |     7 |    0 |     68 |    0 |    0 |    0 |    0 |    173 |    137 |      15 |       3 |       3 |       1 |     10 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        6 |       27 |       25 |       14 |        7 |       7 |        2 |       13 |       13 |       19 |        8 |       14 |       3 |        0 |        3 |        8 |        8 |        7 |        5 |       2 |        2 |        4 |        4 |        2 |        3 |        9 |       5 |        1 |       12 |       15 |        5 |        1 |        2 |       1 |        3 |       12 |        8 |        4 |        3 |        1 |       0 |        1 |        4 |        5 |        3 |        1 |        2 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     22 |     28 |     12 |      6 |      5 |     86 |      0 |      0 |      0 |      6 |     16 |      5 |      2 |      0 |     33 |      0 |      0 |      0 |     15 |      4 |      2 |      0 |      0 |     47 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2615000 |     389 |    204 |     75 |    14 |    0 |     3 |    1 |    1 |    10 |    0 |     81 |    0 |    0 |    0 |    0 |    199 |    190 |      27 |       3 |       8 |       2 |     11 |      2 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      2 |      0 |        4 |       31 |       28 |       21 |        7 |        7 |       2 |        4 |       34 |       28 |       13 |       12 |       10 |       3 |        1 |       15 |       15 |        2 |        4 |        7 |       4 |        2 |        9 |        4 |        3 |        3 |        5 |       1 |        4 |       11 |       11 |        6 |        3 |        2 |       1 |        6 |       15 |        9 |        6 |        3 |        4 |       0 |        0 |        6 |        4 |        2 |        0 |        1 |       0 |        2 |        8 |        0 |        2 |        3 |        1 |       0 |      0 |      2 |     20 |     21 |      6 |      5 |      0 |    150 |      0 |      0 |      1 |     11 |      7 |      1 |      2 |      0 |     53 |      0 |      0 |      0 |      9 |      4 |      5 |      4 |      0 |     59 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 2616000 |     503 |    257 |    102 |    13 |    0 |     6 |   10 |    2 |    14 |    0 |     99 |    0 |    0 |    0 |    0 |    265 |    238 |      38 |       8 |      10 |       5 |     11 |      5 |      7 |      4 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       0 |      2 |      2 |      0 |      0 |        2 |       24 |       30 |       22 |       20 |       23 |       2 |        8 |       18 |       26 |       17 |       22 |       41 |       2 |        3 |       13 |        8 |       10 |       10 |       17 |       1 |        2 |        6 |        5 |        4 |        5 |       17 |       1 |        6 |        9 |       13 |       10 |        8 |       12 |       1 |        5 |       14 |        4 |        4 |        4 |        9 |       0 |        4 |        6 |        5 |        0 |        2 |        4 |       0 |        2 |        5 |        3 |        4 |        3 |        7 |       0 |      0 |      1 |     43 |     45 |     11 |     10 |      1 |    146 |      0 |      0 |      1 |     21 |     11 |      2 |      4 |      1 |     62 |      0 |      0 |      1 |     11 |      8 |      3 |      1 |      2 |     73 |      0 |      0 |      0 |      6 |      8 |      2 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 2618000 |     458 |    239 |     87 |    16 |    0 |     7 |    6 |    2 |     9 |    0 |     92 |    0 |    0 |    0 |    0 |    228 |    230 |      45 |      16 |      12 |       4 |      7 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      1 |      0 |      0 |      0 |        5 |       33 |       43 |       30 |        9 |        9 |       0 |       10 |       32 |       21 |       26 |       14 |        7 |       0 |        1 |       10 |       18 |        8 |        5 |        1 |       0 |        6 |       15 |        4 |        6 |        4 |        8 |       1 |        6 |       21 |       11 |        3 |        0 |        0 |       0 |       10 |       27 |        3 |        9 |        2 |        0 |       0 |        1 |        4 |        5 |        3 |        2 |        0 |       0 |        1 |       11 |        7 |        4 |        1 |        1 |       0 |      0 |      7 |     36 |     31 |      7 |      3 |      1 |    154 |      0 |      0 |      1 |     10 |      6 |      0 |      0 |      2 |     68 |      0 |      0 |      0 |     10 |      1 |      1 |      0 |      0 |     80 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      1 |     31 |      0 |     37 | s03      | R    |
| 2620000 |     500 |    260 |    100 |    17 |    0 |     4 |    6 |    1 |     6 |    0 |    106 |    0 |    0 |    0 |    0 |    251 |    249 |      49 |      11 |      18 |       4 |     12 |      3 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      4 |      0 |      1 |      1 |        5 |       30 |       38 |       27 |       19 |       15 |       0 |        8 |       46 |       24 |       13 |       15 |       17 |       3 |        4 |       10 |        6 |        6 |        4 |        4 |       0 |        7 |       20 |       16 |        8 |        5 |        6 |       4 |        5 |       20 |       18 |        9 |        3 |        6 |       0 |        6 |       18 |       12 |        6 |        3 |        0 |       0 |        1 |        9 |        8 |        3 |        0 |        1 |       0 |        2 |        4 |        3 |        1 |        1 |        1 |       0 |      0 |      1 |     39 |     27 |      6 |      1 |      6 |    180 |      0 |      0 |      0 |     12 |     10 |      2 |      1 |      2 |     73 |      0 |      0 |      1 |     10 |      8 |      2 |      2 |      0 |     83 |      0 |      0 |      0 |      7 |      5 |      1 |      1 |      0 |     20 |      0 |     37 | s03      | R    |
| 2622000 |     587 |    269 |    134 |    20 |    0 |     3 |    4 |    2 |    17 |    0 |    138 |    0 |    0 |    0 |    0 |    246 |    341 |      45 |      20 |      15 |       1 |      4 |      4 |     11 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      2 |      0 |      3 |      1 |        6 |       26 |       37 |       21 |       13 |        1 |       0 |        8 |       55 |       46 |       26 |       12 |       14 |       4 |        9 |       18 |        9 |       15 |        8 |        3 |       1 |        6 |       17 |       12 |       13 |        8 |       12 |       3 |        7 |       28 |       15 |        4 |        2 |        0 |       0 |       11 |       39 |       18 |        7 |        4 |        3 |       0 |        0 |       16 |        2 |        2 |        1 |        2 |       0 |        5 |       11 |        5 |        2 |        0 |        0 |       0 |      0 |      3 |     30 |     22 |      8 |      4 |      4 |    198 |      0 |      0 |      0 |     16 |     16 |      4 |      1 |      2 |     95 |      0 |      0 |      0 |     12 |      2 |      3 |      0 |      0 |    121 |      0 |      0 |      2 |      5 |      4 |      0 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 2624000 |     604 |    305 |    120 |    20 |    0 |     4 |    7 |    4 |    13 |    0 |    131 |    0 |    0 |    0 |    0 |    284 |    320 |      37 |      11 |      13 |       6 |     12 |     10 |      5 |      4 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      4 |      3 |      2 |      1 |        2 |       31 |       43 |       38 |       11 |        7 |       1 |        8 |       45 |       40 |       33 |       30 |       13 |       3 |        7 |       20 |       15 |       16 |        4 |       10 |       2 |        2 |       12 |       11 |        5 |        7 |        5 |       4 |        4 |       20 |       12 |       13 |        3 |        1 |       0 |       12 |       35 |       13 |       10 |        6 |        2 |       0 |        2 |        8 |       10 |        1 |        2 |        1 |       0 |        4 |        8 |        6 |        5 |        1 |        0 |       0 |      0 |      3 |     39 |     40 |     13 |      9 |      9 |    192 |      0 |      0 |      0 |     15 |     13 |      6 |      0 |      9 |     77 |      0 |      0 |      0 |     16 |      7 |      3 |      2 |      0 |    103 |      0 |      0 |      0 |      6 |      6 |      2 |      1 |      0 |     33 |      0 |     37 | s03      | R    |
| 2626000 |     566 |    279 |    118 |    14 |    0 |     6 |   13 |    2 |    17 |    0 |    117 |    0 |    0 |    0 |    0 |    290 |    276 |      33 |      12 |      10 |       2 |     10 |      8 |      6 |      3 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      2 |      1 |      3 |      2 |      0 |      0 |       0 |       1 |       1 |       0 |      1 |      1 |      3 |      0 |        4 |       15 |       50 |       48 |       15 |       12 |       6 |        8 |       25 |       25 |       32 |       23 |       13 |       3 |        2 |       12 |       26 |       12 |        4 |        4 |       2 |        3 |       15 |        7 |        8 |        5 |        8 |      10 |        3 |       22 |       12 |       10 |        1 |        0 |       1 |        8 |       28 |       19 |        6 |        7 |        0 |       0 |        0 |       14 |        8 |        4 |        3 |        0 |       0 |        2 |        9 |        5 |        3 |        2 |        2 |       0 |      0 |      4 |     37 |     27 |     13 |      9 |      8 |    181 |      0 |      0 |      3 |      9 |     17 |      2 |      3 |      2 |     82 |      0 |      0 |      1 |     17 |     11 |      1 |      1 |      2 |     84 |      0 |      0 |      1 |      7 |      9 |      2 |      2 |      0 |     31 |      0 |     37 | s03      | R    |
| 2628100 |     342 |    141 |     80 |    11 |    0 |     2 |    6 |    1 |    10 |    0 |     91 |    0 |    0 |    0 |    0 |    180 |    162 |      18 |      10 |       7 |       2 |      6 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      3 |      0 |      0 |        4 |       27 |       17 |       10 |        7 |        6 |       2 |        7 |       17 |       19 |        9 |        9 |        6 |       1 |        4 |       15 |        9 |        6 |        4 |        5 |       3 |        7 |        9 |        4 |        8 |        0 |        3 |       3 |       10 |       19 |        7 |        6 |        1 |        2 |       1 |        9 |       19 |        5 |        9 |        3 |        0 |       0 |        2 |        4 |        4 |        1 |        4 |        0 |       0 |        5 |        5 |        1 |        3 |        1 |        0 |       0 |      0 |      0 |     12 |      8 |      6 |      0 |      1 |    114 |      0 |      0 |      0 |      5 |      3 |      0 |      4 |      1 |     67 |      0 |      0 |      0 |      7 |     10 |      0 |      1 |      0 |     73 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      0 |     23 |      0 |     37 | s03      | R    |
| 2630000 |     383 |    172 |    104 |     8 |    0 |     3 |    2 |    2 |     8 |    0 |     84 |    0 |    0 |    0 |    0 |    168 |    215 |      25 |       7 |       5 |       1 |      8 |      1 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       4 |       0 |       0 |      4 |      0 |      2 |      1 |        2 |       15 |       16 |       18 |       17 |        4 |       1 |        7 |       22 |       19 |       23 |       17 |       10 |       1 |        0 |       11 |       16 |       11 |        7 |        6 |       2 |        4 |       11 |       10 |        7 |        4 |       13 |       2 |        4 |       12 |        6 |        5 |        6 |        1 |       0 |        9 |       17 |        9 |        9 |        6 |        0 |       0 |        0 |        4 |        1 |        3 |        0 |        0 |       0 |        1 |        7 |        2 |        4 |        1 |        0 |       0 |      0 |      1 |     23 |     29 |      2 |      5 |      5 |    107 |      0 |      0 |      1 |     15 |     10 |      2 |      3 |      3 |     70 |      0 |      0 |      0 |     11 |      4 |      2 |      0 |      0 |     67 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2632000 |     434 |    213 |     90 |    11 |    0 |     4 |    4 |    6 |    12 |    0 |     94 |    0 |    0 |    0 |    0 |    209 |    225 |      23 |      14 |      10 |       1 |      4 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      2 |      3 |      0 |        7 |       28 |       28 |       19 |        8 |        6 |       1 |       10 |       29 |       28 |       18 |       18 |        8 |       5 |        1 |       12 |       13 |        7 |        5 |        3 |       2 |        3 |       16 |        9 |        9 |        2 |        7 |       1 |        6 |       15 |       15 |        6 |        2 |        1 |       1 |        6 |       16 |       16 |        6 |        1 |        3 |       0 |        4 |       14 |        2 |        1 |        1 |        1 |       0 |        0 |        5 |        5 |        3 |        1 |        0 |       0 |      0 |      0 |     31 |     27 |      3 |      1 |      2 |    149 |      0 |      0 |      0 |     11 |     10 |      3 |      0 |      2 |     64 |      0 |      0 |      2 |     10 |      4 |      1 |      0 |      0 |     77 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 2634000 |     556 |    290 |    103 |    18 |    0 |     5 |   13 |    4 |     9 |    0 |    114 |    0 |    0 |    0 |    0 |    280 |    276 |      64 |      15 |      17 |       4 |      8 |      1 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |      0 |      0 |      2 |      0 |       1 |       1 |       1 |       0 |      0 |      3 |      2 |      0 |       11 |       26 |       51 |       29 |       18 |        7 |       2 |        9 |       48 |       34 |       20 |       20 |       14 |       1 |        6 |       18 |        9 |       14 |        3 |        4 |       1 |        5 |       12 |       11 |        8 |        6 |        6 |       0 |        9 |       17 |       18 |        7 |        0 |        5 |       0 |       14 |       22 |        7 |        7 |        6 |        1 |       1 |        0 |       10 |        7 |        5 |        3 |        0 |       0 |        3 |       10 |        4 |        6 |        0 |        1 |       0 |      0 |      1 |     33 |     44 |      9 |      5 |      0 |    198 |      0 |      0 |      1 |     10 |     13 |      1 |      1 |      1 |     76 |      0 |      0 |      1 |      8 |      7 |      0 |      1 |      0 |     97 |      0 |      0 |      1 |      8 |      2 |      3 |      1 |      0 |     34 |      0 |     37 | s03      | R    |
| 2636000 |     589 |    281 |    110 |    16 |    0 |     7 |   16 |    6 |    14 |    0 |    139 |    0 |    0 |    0 |    0 |    299 |    290 |      56 |      14 |      17 |       7 |      6 |      7 |      4 |      2 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      3 |      0 |      0 |      0 |       5 |       1 |       1 |       0 |      2 |      2 |      0 |      1 |        7 |       32 |       43 |       22 |       17 |       15 |       2 |       14 |       37 |       25 |       27 |       15 |       21 |       4 |        6 |       10 |       10 |       13 |        8 |        7 |       1 |        4 |       12 |        8 |       12 |        7 |        9 |       3 |       11 |       26 |       17 |        9 |        4 |        4 |       1 |       18 |       21 |       12 |        8 |        5 |        3 |       0 |        6 |       17 |        5 |        4 |        1 |        1 |       0 |        5 |       13 |        1 |        4 |        2 |        0 |       0 |      0 |      1 |     26 |     35 |      5 |      1 |      3 |    210 |      0 |      0 |      1 |     20 |     12 |      3 |      3 |      0 |     71 |      0 |      0 |      0 |     13 |      9 |      3 |      2 |      0 |    112 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     50 |      0 |     37 | s03      | R    |
| 2638000 |     578 |    286 |    101 |    20 |    0 |     9 |    7 |    2 |    16 |    0 |    137 |    0 |    0 |    0 |    0 |    286 |    292 |      33 |      10 |      17 |       6 |     17 |      6 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        5 |       31 |       43 |       29 |       11 |        6 |       1 |       11 |       42 |       36 |       34 |       19 |       16 |       2 |        2 |       15 |       18 |       16 |        2 |        5 |       2 |        3 |        9 |       10 |        4 |        6 |        5 |       4 |        5 |       27 |       18 |       11 |        6 |        1 |       0 |        9 |       29 |        9 |       15 |        4 |        3 |       0 |        1 |       12 |        9 |        7 |        2 |        1 |       0 |        4 |        7 |        7 |        1 |        2 |        1 |       0 |      0 |      1 |     39 |     39 |      8 |      5 |      7 |    187 |      0 |      0 |      2 |     20 |      6 |      3 |      5 |      0 |     65 |      0 |      0 |      1 |     17 |     13 |      0 |      0 |      1 |    105 |      0 |      0 |      0 |      6 |     12 |      2 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 2640000 |     390 |    198 |     97 |     6 |    0 |     5 |    1 |    4 |     6 |    0 |     73 |    0 |    0 |    0 |    0 |    192 |    198 |      24 |       8 |      10 |       3 |     11 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        4 |       19 |       22 |       21 |       12 |       10 |       5 |        3 |       12 |       30 |       25 |       13 |       14 |       8 |        3 |        7 |       17 |        6 |        9 |        7 |       2 |        1 |        4 |       13 |       11 |        5 |        8 |       4 |        2 |       10 |       12 |        6 |        7 |        0 |       1 |        1 |        9 |        6 |       11 |        5 |        2 |       1 |        0 |        5 |        2 |        1 |        1 |        1 |       0 |        1 |        5 |        1 |        2 |        3 |        0 |       0 |      0 |      2 |     20 |     39 |     14 |      5 |      4 |    114 |      0 |      0 |      0 |     10 |     21 |      5 |      0 |      2 |     59 |      0 |      0 |      0 |      8 |     14 |      3 |      1 |      3 |     44 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2641000 |     113 |     68 |     20 |     2 |    0 |     3 |    1 |    0 |     3 |    0 |     16 |    0 |    0 |    0 |    0 |     62 |     51 |      13 |       3 |       2 |       0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        4 |       11 |        5 |        4 |        9 |       2 |        2 |       12 |        9 |        6 |        0 |        3 |       1 |        1 |        2 |        4 |        4 |        0 |        1 |       0 |        1 |        2 |        1 |        2 |        1 |        0 |       1 |        1 |        2 |        3 |        1 |        2 |        2 |       0 |        0 |        2 |        3 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     14 |      2 |      1 |      2 |      0 |     49 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      2 |     10 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |     13 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 2642000 |     353 |    198 |     80 |     5 |    0 |     4 |    2 |    4 |     3 |    0 |     57 |    0 |    0 |    0 |    0 |    172 |    181 |      26 |      10 |       3 |       1 |     10 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |       2 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        0 |       12 |       24 |       25 |       13 |        7 |       7 |        4 |       16 |       13 |       34 |       19 |       17 |       7 |        3 |       10 |       11 |       13 |        3 |        6 |       4 |        1 |        6 |        4 |        2 |        8 |        3 |       6 |        4 |        4 |        6 |        7 |        4 |        0 |       2 |        7 |        6 |       11 |        3 |        0 |        3 |       0 |        1 |        3 |        2 |        0 |        0 |        1 |       0 |        0 |        4 |        2 |        4 |        1 |        0 |       0 |      0 |      0 |     26 |     32 |     13 |      5 |      3 |    119 |      0 |      0 |      1 |      7 |     16 |      2 |      1 |      4 |     49 |      0 |      0 |      0 |      8 |      5 |      2 |      0 |      0 |     42 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2644000 |     539 |    262 |    126 |    13 |    0 |     4 |    5 |    8 |    14 |    0 |    107 |    0 |    0 |    0 |    0 |    301 |    238 |      45 |      16 |      17 |       3 |      7 |      4 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      8 |      1 |      3 |      2 |      0 |      1 |      1 |      0 |       5 |       1 |       0 |       1 |      2 |      2 |      0 |      0 |        7 |       30 |       47 |       28 |       16 |        7 |       1 |        6 |       38 |       32 |       22 |       11 |       11 |       6 |        4 |       12 |       14 |       18 |       16 |       10 |       0 |        7 |       13 |        8 |       11 |        5 |        5 |       3 |        7 |       28 |       15 |       11 |        5 |        0 |       0 |        5 |       12 |        8 |        9 |        6 |        1 |       0 |        2 |       11 |        5 |        4 |        2 |        1 |       0 |        2 |       10 |        2 |        1 |        4 |        0 |       0 |      0 |      1 |     29 |     28 |      6 |      4 |      9 |    185 |      0 |      0 |      1 |     13 |     14 |      2 |      4 |      6 |     86 |      0 |      0 |      1 |     12 |      6 |      3 |      0 |      2 |     83 |      0 |      0 |      0 |      7 |      4 |      0 |      1 |      0 |     32 |      0 |     37 | s03      | R    |
| 2646000 |     275 |    142 |     57 |     4 |    0 |     3 |    6 |    0 |     5 |    0 |     58 |    0 |    0 |    0 |    0 |    147 |    128 |      20 |       4 |      12 |       1 |     13 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       4 |       0 |       0 |      4 |      0 |      0 |      0 |        2 |       19 |       15 |       20 |        8 |       11 |       2 |        5 |       14 |       14 |       15 |        6 |       11 |       0 |        1 |       10 |        4 |        6 |        5 |        3 |       1 |        2 |        7 |        1 |        4 |        4 |        8 |       1 |        2 |       13 |        6 |        4 |        3 |        1 |       0 |        1 |       13 |        8 |        4 |        3 |        0 |       0 |        1 |        5 |        1 |        1 |        1 |        1 |       1 |        1 |        2 |        1 |        1 |        1 |        1 |       0 |      0 |      2 |     16 |     20 |      4 |      2 |      2 |     96 |      0 |      0 |      0 |      7 |      3 |      4 |      1 |      3 |     39 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      1 |     49 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 2648000 |     511 |    256 |    109 |    18 |    0 |     3 |    9 |    2 |     9 |    0 |    105 |    0 |    0 |    0 |    0 |    264 |    247 |      47 |      15 |      13 |       1 |      4 |      6 |      7 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |       1 |       1 |       3 |       0 |      0 |      1 |      2 |      0 |        5 |       35 |       38 |       27 |       20 |        4 |       1 |        6 |       24 |       23 |       33 |       19 |       18 |       3 |        4 |       21 |       15 |        6 |        4 |        5 |       0 |        9 |       15 |       10 |        4 |       10 |        4 |       2 |        6 |       13 |       12 |       17 |        5 |        2 |       0 |        4 |       23 |       10 |        8 |        2 |        3 |       0 |        3 |        5 |        8 |        4 |        3 |        1 |       0 |        2 |        5 |        4 |        3 |        3 |        0 |       0 |      0 |      3 |     50 |     32 |      3 |      3 |      3 |    162 |      0 |      0 |      2 |     16 |      6 |      2 |      1 |      1 |     81 |      0 |      0 |      2 |     12 |      3 |      2 |      2 |      0 |     84 |      0 |      0 |      0 |      4 |      8 |      0 |      1 |      0 |     28 |      0 |     37 | s03      | R    |
| 2650000 |     625 |    304 |    139 |    16 |    0 |     7 |   10 |    3 |    14 |    0 |    132 |    0 |    0 |    0 |    0 |    294 |    331 |      50 |       9 |      23 |       8 |     13 |      8 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       1 |       2 |      4 |      0 |      0 |      1 |        8 |       40 |       48 |       18 |        9 |       10 |       1 |       13 |       49 |       33 |       32 |       25 |       17 |       1 |        3 |       12 |       16 |       12 |        8 |        7 |       3 |        7 |       26 |       13 |       13 |        8 |        7 |       4 |        3 |       25 |       28 |       10 |        2 |        2 |       0 |       10 |       21 |        7 |       13 |        7 |        4 |       0 |        4 |       10 |        7 |        6 |        2 |        0 |       0 |        5 |        5 |        5 |        3 |        2 |        1 |       0 |      0 |      1 |     60 |     31 |      3 |      8 |      2 |    199 |      0 |      0 |      0 |     18 |     20 |      3 |      0 |      1 |     97 |      0 |      0 |      1 |     23 |      7 |      0 |      1 |      0 |    100 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      0 |     40 |      0 |     37 | s03      | R    |
| 2652000 |     518 |    227 |    112 |    15 |    0 |     1 |    7 |    7 |    14 |    0 |    135 |    0 |    0 |    0 |    0 |    271 |    247 |      44 |      11 |      18 |       6 |      8 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      1 |      1 |      1 |      0 |        7 |       27 |       33 |       23 |       10 |        7 |       2 |       12 |       29 |       18 |       33 |       14 |       12 |       0 |        5 |       16 |       20 |        9 |       13 |        2 |       1 |       13 |       11 |        8 |        9 |        3 |        1 |       1 |        7 |       35 |       14 |       11 |        2 |        1 |       0 |       12 |       27 |        8 |       12 |        5 |        1 |       0 |        1 |       16 |        4 |        4 |        0 |        1 |       0 |        8 |        5 |        4 |        0 |        0 |        1 |       0 |      0 |      0 |     47 |     25 |      4 |      2 |      3 |    146 |      0 |      0 |      2 |     17 |      7 |      1 |      0 |      1 |     84 |      0 |      0 |      3 |     16 |      9 |      0 |      0 |      0 |    107 |      0 |      0 |      0 |      8 |      1 |      0 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 2652100 |     324 |    166 |     56 |    10 |    0 |     5 |    4 |    2 |     8 |    0 |     73 |    0 |    0 |    0 |    0 |    161 |    163 |      24 |       7 |      11 |       1 |      9 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       1 |      0 |      0 |      1 |      0 |        5 |       17 |       18 |       18 |       10 |        9 |       1 |        6 |       21 |       15 |       19 |       14 |       12 |       1 |        2 |        7 |        8 |        3 |        6 |        2 |       0 |        1 |        8 |        5 |        2 |        4 |        8 |       0 |        5 |       12 |        7 |        6 |        4 |        3 |       0 |        4 |       13 |        6 |        7 |        3 |        3 |       0 |        2 |        6 |        5 |        2 |        2 |        1 |       0 |        3 |        4 |        2 |        1 |        0 |        1 |       0 |      0 |      1 |     19 |     12 |      3 |      1 |      3 |    127 |      0 |      0 |      1 |      3 |      5 |      0 |      0 |      0 |     47 |      0 |      0 |      1 |      6 |      7 |      1 |      0 |      0 |     58 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 2654000 |     486 |    220 |    119 |    17 |    0 |     6 |    4 |    6 |     9 |    0 |    105 |    0 |    0 |    0 |    0 |    235 |    251 |      37 |      11 |      18 |       2 |     13 |      5 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        6 |       24 |       26 |       22 |       10 |       13 |       5 |       13 |       34 |       21 |       20 |       12 |       12 |       2 |        3 |       17 |       18 |       12 |        7 |        4 |       0 |        9 |       14 |        8 |        9 |        7 |        9 |       2 |        3 |       23 |        8 |       10 |        4 |        2 |       0 |       11 |       20 |       12 |        5 |        3 |        4 |       0 |        3 |        4 |        4 |        4 |        3 |        0 |       0 |        3 |        8 |        5 |        5 |        3 |        0 |       0 |      0 |      1 |     20 |     26 |      2 |      0 |      1 |    170 |      0 |      0 |      0 |     17 |     11 |      2 |      1 |      3 |     85 |      0 |      0 |      2 |     18 |      7 |      1 |      0 |      0 |     77 |      0 |      0 |      1 |      6 |      7 |      1 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 2656000 |     497 |    247 |    108 |     8 |    0 |     7 |    5 |    7 |     7 |    0 |    108 |    0 |    0 |    0 |    0 |    236 |    261 |      38 |      10 |      15 |       4 |     10 |      1 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      5 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       6 |       3 |       1 |       1 |      1 |      3 |      0 |      0 |        8 |       25 |       29 |       22 |       20 |        9 |       1 |       14 |       28 |       29 |       23 |       22 |       15 |       2 |        8 |       19 |        8 |       10 |        1 |        7 |       1 |        8 |       13 |        8 |       10 |        4 |       10 |       1 |       12 |       16 |        7 |        4 |        6 |        1 |       1 |       12 |       19 |       11 |        6 |        6 |        7 |       0 |        3 |        7 |        4 |        4 |        2 |        1 |       0 |        3 |        6 |        1 |        2 |        1 |        0 |       0 |      0 |      3 |     25 |     36 |      7 |      2 |      2 |    172 |      0 |      0 |      0 |      8 |      5 |      2 |      1 |      1 |     91 |      0 |      0 |      2 |      9 |      3 |      3 |      1 |      0 |     90 |      0 |      0 |      0 |      7 |      2 |      1 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 2657000 |     342 |    155 |     84 |     3 |    0 |     2 |    2 |    1 |     2 |    0 |     93 |    0 |    0 |    0 |    0 |    173 |    169 |      22 |      11 |      13 |       3 |      7 |      2 |      7 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      1 |      1 |      1 |      1 |        4 |       22 |       19 |       13 |        8 |        5 |       2 |        3 |       14 |       16 |       17 |       12 |       18 |       2 |        1 |        9 |       12 |        7 |        4 |       12 |       0 |        7 |        6 |        2 |        6 |        2 |       14 |       2 |        5 |       20 |       11 |        8 |        5 |        1 |       0 |        8 |       18 |        5 |        6 |        1 |        5 |       0 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |        1 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      1 |     16 |     18 |      5 |      1 |      3 |    111 |      0 |      0 |      0 |      7 |      4 |      5 |      3 |      1 |     64 |      0 |      0 |      0 |     14 |      3 |      0 |      1 |      0 |     75 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2658000 |     441 |    209 |     93 |    19 |    0 |     3 |    4 |    3 |    12 |    0 |     98 |    0 |    0 |    0 |    0 |    222 |    219 |      37 |      14 |      11 |       6 |      3 |      4 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       0 |      3 |      0 |      1 |      0 |        1 |       26 |       28 |       17 |       13 |       13 |       0 |       12 |       23 |       22 |       30 |        8 |       16 |       0 |        3 |       12 |       12 |        4 |        7 |        5 |       2 |        5 |        8 |        9 |        9 |        6 |        9 |       2 |        6 |       24 |        7 |        8 |        5 |        2 |       0 |        8 |       22 |        6 |        9 |        1 |        0 |       0 |        2 |       13 |        5 |        2 |        3 |        2 |       0 |        1 |        8 |        3 |        2 |        0 |        0 |       0 |      0 |      2 |     35 |     24 |      7 |      4 |      2 |    135 |      0 |      0 |      0 |     15 |      5 |      5 |      1 |      0 |     67 |      0 |      0 |      1 |     15 |      4 |      1 |      0 |      0 |     77 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 2660000 |     549 |    276 |    116 |    16 |    0 |     2 |    7 |    2 |    14 |    0 |    116 |    0 |    0 |    0 |    0 |    237 |    312 |      45 |       9 |      33 |       3 |      9 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       3 |       3 |       1 |       1 |      3 |      2 |      1 |      0 |        9 |       25 |       39 |       26 |        9 |       11 |       2 |       13 |       33 |       27 |       37 |       19 |       23 |       3 |        2 |       13 |       13 |       11 |        5 |        6 |       2 |        7 |       18 |       12 |       12 |        4 |        7 |       4 |        7 |       16 |       12 |        6 |        2 |        1 |       0 |       14 |       33 |       12 |        8 |        2 |        2 |       1 |        3 |        7 |        4 |        6 |        0 |        0 |       0 |        4 |        7 |        5 |        2 |        1 |        2 |       0 |      0 |      1 |     39 |     37 |      7 |      3 |      2 |    187 |      0 |      0 |      1 |     18 |     11 |      1 |      0 |      3 |     82 |      0 |      0 |      0 |     14 |      5 |      1 |      0 |      0 |     96 |      0 |      0 |      2 |      8 |      3 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 2661000 |     581 |    315 |    108 |    19 |    0 |    10 |    7 |    2 |    15 |    0 |    105 |    0 |    0 |    0 |    0 |    282 |    299 |      71 |      13 |      14 |       8 |     18 |      5 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |      1 |      0 |      0 |       1 |       1 |       0 |       0 |      3 |      0 |      3 |      0 |       10 |       33 |       41 |       33 |       15 |       21 |       3 |       17 |       34 |       27 |       25 |       20 |       35 |       1 |        0 |       13 |       15 |        5 |        5 |        5 |       3 |        7 |       19 |        9 |        7 |        5 |       11 |       4 |        2 |       16 |       13 |        5 |        3 |        8 |       0 |       14 |       17 |        9 |        9 |        6 |        3 |       0 |        5 |        8 |        7 |        7 |        5 |        1 |       0 |        5 |        7 |        1 |        3 |        1 |        3 |       0 |      0 |      1 |     53 |     48 |      4 |      3 |      3 |    203 |      0 |      0 |      0 |     21 |      8 |      3 |      0 |      1 |     75 |      0 |      0 |      0 |     10 |      9 |      3 |      0 |      1 |     82 |      0 |      0 |      0 |      8 |      6 |      1 |      0 |      0 |     38 |      0 |     37 | s03      | R    |
| 2662000 |     258 |    145 |     47 |     4 |    0 |     2 |    2 |    1 |     4 |    0 |     53 |    0 |    0 |    0 |    0 |    126 |    132 |      22 |       2 |       5 |       0 |      7 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      4 |      1 |      2 |      0 |      1 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |       13 |       17 |       28 |        4 |        3 |       0 |        4 |       16 |       12 |       21 |       13 |       10 |       2 |        0 |        0 |        5 |        8 |        4 |        2 |       0 |        0 |        5 |        7 |        5 |        2 |        6 |       3 |        4 |       11 |       10 |        7 |        2 |        0 |       0 |        0 |        8 |        1 |        7 |        2 |        0 |       1 |        1 |        1 |        3 |        0 |        1 |        0 |       0 |        0 |        2 |        3 |        0 |        1 |        1 |       0 |      0 |      2 |     23 |     19 |      5 |      2 |      2 |     92 |      0 |      0 |      0 |     11 |      6 |      4 |      2 |      3 |     21 |      0 |      0 |      1 |      8 |      7 |      3 |      1 |      2 |     31 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 2663000 |     492 |    248 |    111 |    13 |    0 |     2 |    8 |    2 |     6 |    0 |    102 |    0 |    0 |    0 |    0 |    232 |    260 |      37 |      11 |      10 |       4 |     14 |      1 |      8 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      1 |      0 |        2 |       24 |       39 |       17 |        9 |        8 |       5 |        7 |       32 |       32 |       40 |       16 |        9 |       8 |        8 |        9 |       10 |       12 |        5 |        8 |       4 |        2 |       12 |       10 |       10 |        4 |       13 |       4 |        3 |       17 |       19 |       10 |        3 |        3 |       0 |        6 |       17 |        7 |       10 |        5 |        2 |       0 |        0 |        7 |        6 |        2 |        1 |        1 |       0 |        2 |        3 |        4 |        5 |        0 |        0 |       0 |      0 |      3 |     36 |     38 |     11 |      7 |      3 |    150 |      0 |      0 |      1 |     11 |      6 |      4 |      5 |      3 |     81 |      0 |      0 |      1 |     15 |     10 |      1 |      1 |      1 |     73 |      0 |      0 |      0 |      2 |      9 |      1 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 2664000 |     286 |    140 |     58 |     6 |    0 |     6 |    2 |    5 |    11 |    0 |     58 |    0 |    0 |    0 |    0 |    135 |    151 |      22 |       7 |      12 |       4 |      4 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      2 |        3 |        8 |       26 |       18 |        3 |        1 |       2 |        7 |       24 |        9 |       22 |        8 |        5 |       4 |        3 |        5 |        7 |        4 |        0 |        2 |       1 |        2 |        9 |        6 |        4 |        8 |        7 |       0 |        2 |       13 |       13 |        4 |        3 |        1 |       0 |        2 |        9 |        5 |        2 |        2 |        2 |       0 |        0 |        7 |        4 |        3 |        2 |        0 |       0 |        3 |        8 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     26 |     17 |      2 |      3 |      2 |     90 |      0 |      0 |      0 |      7 |      8 |      4 |      1 |      1 |     37 |      0 |      0 |      1 |      7 |      7 |      1 |      1 |      2 |     39 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 2665000 |     162 |    102 |     18 |     2 |    0 |     2 |    2 |    3 |     2 |    0 |     31 |    0 |    0 |    0 |    0 |     85 |     77 |      24 |       3 |       4 |       5 |      4 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      0 |      0 |      1 |      0 |        1 |        7 |       27 |        9 |        7 |        6 |       0 |        2 |       10 |       14 |        4 |        9 |        4 |       2 |        0 |        3 |        1 |        2 |        2 |        2 |       0 |        1 |        1 |        1 |        0 |        3 |        1 |       1 |        3 |        2 |        3 |        4 |        2 |        0 |       0 |        3 |        8 |        3 |        1 |        1 |        1 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        5 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |     12 |     24 |      6 |      0 |      3 |     57 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     12 |      0 |      0 |      0 |      6 |      5 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2666000 |     271 |    138 |     44 |     5 |    0 |     2 |    4 |    2 |    12 |    0 |     64 |    0 |    0 |    0 |    0 |    128 |    143 |      25 |       3 |       8 |       2 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        3 |        6 |       22 |       15 |        5 |        6 |       6 |        4 |       14 |       21 |       12 |        8 |        9 |       7 |        0 |        7 |        7 |        5 |        3 |        2 |       0 |        0 |        7 |        4 |        4 |        1 |        1 |       3 |        0 |        6 |       13 |        5 |        1 |        3 |       0 |        2 |       14 |        9 |        6 |        3 |        2 |       0 |        0 |        6 |        3 |        3 |        0 |        1 |       0 |        3 |        5 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |     24 |     11 |      5 |      2 |      2 |     94 |      0 |      0 |      1 |      5 |      5 |      2 |      1 |      4 |     26 |      0 |      0 |      0 |      8 |      7 |      2 |      0 |      1 |     46 |      0 |      0 |      1 |      3 |      5 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2700000 |     547 |    256 |    167 |    11 |    0 |     3 |    2 |    0 |    16 |    0 |     92 |    0 |    0 |    0 |    0 |    254 |    293 |      27 |      14 |       6 |       0 |      6 |      3 |      4 |      1 |      3 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      1 |      0 |       1 |       1 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        9 |       29 |       35 |       20 |        6 |       4 |        7 |       23 |       30 |       42 |       22 |       19 |       9 |        3 |       13 |       15 |       13 |       15 |       11 |       8 |        5 |        9 |       14 |       18 |       11 |       18 |      14 |        5 |       13 |       18 |       10 |        4 |        6 |       0 |        5 |        9 |        8 |        9 |        3 |        2 |       0 |        1 |        3 |        9 |        3 |        0 |        0 |       0 |        3 |        4 |        4 |        3 |        1 |        1 |       0 |      0 |      6 |     34 |     34 |     15 |     11 |     11 |    145 |      0 |      0 |      1 |     13 |     29 |      5 |     11 |      6 |    102 |      0 |      0 |      0 |     21 |      8 |      2 |      4 |      2 |     55 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2701000 |     584 |    279 |    120 |    12 |    0 |     7 |    3 |    5 |    14 |    0 |    144 |    0 |    0 |    0 |    0 |    281 |    303 |      47 |      20 |      19 |       6 |     14 |      3 |      9 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |        8 |       31 |       26 |       24 |       12 |        7 |       1 |       16 |       46 |       42 |       25 |       18 |       21 |       2 |       10 |       17 |       18 |       10 |        6 |        8 |       1 |        7 |       10 |       10 |       10 |        6 |        4 |       3 |        4 |       25 |       27 |       10 |        2 |        7 |       0 |       13 |       30 |       11 |        9 |        4 |        2 |       0 |        4 |       10 |        8 |        2 |        2 |        1 |       0 |        1 |        5 |        2 |        1 |        4 |        1 |       0 |      0 |      4 |     43 |     30 |      4 |      5 |      3 |    190 |      0 |      0 |      3 |     16 |      3 |      2 |      3 |      1 |     92 |      0 |      0 |      1 |     20 |      6 |      1 |      2 |      0 |    114 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      1 |     31 |      0 |     37 | s03      | R    |
| 2701100 |     532 |    256 |    118 |     9 |    0 |     5 |   10 |    2 |    14 |    0 |    118 |    0 |    0 |    0 |    0 |    244 |    288 |      24 |       4 |      12 |       2 |     21 |      4 |      7 |      1 |      0 |      2 |      1 |      0 |      3 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |       2 |       2 |       3 |       0 |      4 |      0 |      1 |      0 |        2 |       14 |       27 |       24 |       11 |       11 |       5 |        7 |       26 |       29 |       47 |       27 |       18 |       8 |        8 |       15 |       17 |        8 |        8 |        7 |       3 |        7 |        8 |        6 |       11 |        6 |        6 |       8 |        7 |       21 |       13 |       14 |        6 |        1 |       0 |       11 |       20 |       12 |        8 |        4 |        0 |       1 |        1 |        7 |        8 |        5 |        1 |        0 |       0 |        1 |        7 |        5 |        1 |        0 |        4 |       0 |      0 |      4 |     24 |     52 |     16 |     10 |      9 |    141 |      0 |      0 |      2 |     12 |     14 |      4 |      3 |      3 |     80 |      0 |      0 |      0 |     11 |     10 |      1 |      2 |      2 |     92 |      0 |      0 |      2 |      6 |      5 |      0 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 2704000 |     633 |    289 |    141 |    21 |    0 |    13 |    6 |    3 |    14 |    0 |    146 |    0 |    0 |    0 |    0 |    296 |    337 |      44 |      18 |      17 |       4 |     11 |      2 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      2 |      1 |       2 |       1 |       1 |       0 |      3 |      3 |      0 |      1 |        9 |       28 |       38 |       36 |       14 |        8 |       0 |       12 |       29 |       42 |       45 |       18 |        8 |       2 |        6 |       23 |       26 |       14 |        4 |        4 |       0 |       10 |       17 |       17 |        6 |        7 |        7 |       0 |        6 |       22 |       17 |       11 |        7 |        2 |       0 |       20 |       30 |       14 |       10 |        4 |        3 |       0 |        2 |        7 |        8 |        3 |        0 |        1 |       0 |        3 |       14 |        9 |        6 |        3 |        1 |       0 |      0 |      1 |     41 |     33 |      9 |      4 |      7 |    194 |      0 |      0 |      1 |     16 |     10 |      5 |      1 |      4 |    104 |      0 |      0 |      1 |     21 |     12 |      2 |      1 |      0 |    109 |      0 |      0 |      0 |      8 |      3 |      0 |      0 |      0 |     46 |      0 |     37 | s03      | R    |
| 2705000 |     653 |    304 |    125 |    14 |    0 |    10 |   15 |    6 |    24 |    0 |    155 |    0 |    0 |    0 |    0 |    335 |    318 |      47 |      14 |      14 |      10 |      6 |      3 |      6 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |       6 |       0 |       2 |       2 |      7 |      0 |      3 |      0 |        5 |       40 |       43 |       36 |       15 |        8 |       3 |       13 |       33 |       36 |       37 |       17 |       15 |       3 |        5 |       15 |       24 |       13 |       12 |        2 |       0 |        6 |       14 |        5 |       13 |       10 |        5 |       1 |       12 |       33 |       23 |       11 |        2 |        1 |       0 |       11 |       30 |       14 |        8 |        7 |        3 |       0 |        2 |        9 |       11 |        7 |        2 |        1 |       0 |        9 |       15 |       10 |        3 |        0 |        0 |       0 |      0 |      0 |     50 |     37 |      8 |      4 |      3 |    202 |      0 |      0 |      1 |     18 |     12 |      7 |      2 |      8 |     77 |      0 |      0 |      3 |     12 |      7 |      3 |      2 |      2 |    126 |      0 |      0 |      0 |     10 |     10 |      0 |      0 |      2 |     47 |      0 |     37 | s03      | R    |
| 2707000 |     500 |    233 |    110 |    16 |    0 |     2 |    7 |    7 |     7 |    0 |    118 |    0 |    0 |    0 |    0 |    254 |    246 |      62 |      17 |      33 |       2 |      7 |      2 |      1 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       3 |       5 |       3 |       0 |      2 |      3 |      3 |      0 |        6 |       28 |       32 |       26 |       10 |       11 |       0 |        8 |       31 |       25 |       26 |       19 |        8 |       3 |        7 |       15 |       11 |        8 |       15 |        6 |       1 |        8 |        9 |       10 |       12 |        2 |        5 |       1 |        9 |       19 |       18 |        8 |        3 |        2 |       1 |       14 |       24 |        7 |        6 |        5 |        2 |       0 |        1 |        8 |        4 |        4 |        0 |        1 |       0 |        3 |        8 |        4 |        4 |        2 |        0 |       0 |      0 |      3 |     46 |     31 |      3 |      6 |      2 |    142 |      0 |      0 |      0 |     13 |     16 |      4 |      3 |      2 |     72 |      0 |      0 |      0 |     10 |     11 |      1 |      0 |      0 |     96 |      0 |      0 |      0 |     11 |      5 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 2711000 |     753 |    373 |    148 |    16 |    0 |    10 |    8 |   12 |    12 |    0 |    174 |    0 |    0 |    0 |    0 |    356 |    397 |     106 |      29 |      47 |      11 |      9 |      7 |     12 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      1 |      4 |      0 |      1 |      0 |      0 |      0 |       4 |       5 |       2 |       0 |      3 |      3 |      0 |      0 |       21 |       32 |       39 |       33 |       15 |       14 |       4 |       28 |       46 |       47 |       51 |       20 |       17 |       6 |       11 |       21 |       21 |       14 |        9 |        7 |       0 |       10 |       15 |       10 |       15 |        7 |        7 |       1 |       12 |       25 |       22 |       11 |        7 |        1 |       0 |       15 |       36 |       17 |       19 |        8 |        1 |       0 |        2 |       17 |        9 |        3 |        4 |        2 |       0 |        4 |        7 |        4 |        5 |        1 |        0 |       0 |      0 |      3 |     54 |     46 |      3 |      2 |      3 |    262 |      0 |      0 |      0 |     17 |     10 |      3 |      2 |      0 |    116 |      0 |      0 |      2 |     31 |     21 |      2 |      0 |      1 |    117 |      0 |      0 |      0 |     11 |      8 |      0 |      0 |      1 |     38 |      0 |     37 | s03      | R    |
| 2712000 |     463 |    228 |    100 |    11 |    0 |     6 |    2 |    3 |    16 |    0 |     97 |    0 |    0 |    0 |    0 |    226 |    237 |      33 |      10 |      16 |       4 |      4 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       1 |      0 |      3 |      1 |      1 |        6 |       19 |       33 |       28 |       10 |       11 |       0 |        6 |       24 |       36 |       23 |       14 |       16 |       2 |        3 |        8 |       10 |       13 |        2 |        9 |       5 |        1 |        4 |       11 |       12 |        5 |       10 |       7 |        5 |       15 |       17 |        7 |        3 |        3 |       1 |        6 |       15 |        9 |       12 |        2 |        2 |       0 |        1 |        8 |        2 |        3 |        3 |        1 |       0 |        2 |        6 |        4 |        2 |        5 |        1 |       0 |      0 |      2 |     30 |     40 |      6 |      4 |      4 |    142 |      0 |      0 |      0 |     12 |     13 |      7 |      3 |      5 |     60 |      0 |      0 |      1 |     18 |      9 |      2 |      0 |      1 |     66 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 2718000 |     379 |    204 |    101 |     5 |    0 |     8 |    6 |    2 |     4 |    0 |     49 |    0 |    0 |    0 |    0 |    189 |    190 |      12 |       6 |       5 |       2 |      9 |      1 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        3 |       14 |       24 |       27 |       14 |        8 |       8 |        6 |       11 |       23 |       28 |       14 |       13 |      11 |        3 |        9 |       14 |        6 |        8 |        5 |       7 |        2 |        6 |        5 |        8 |        4 |       15 |       9 |        1 |        7 |       11 |        4 |        2 |        0 |       0 |        3 |        5 |        8 |        5 |        1 |        2 |       0 |        2 |        4 |        1 |        3 |        3 |        0 |       1 |        2 |        1 |        2 |        2 |        2 |        1 |       1 |      0 |      0 |     34 |     32 |     15 |      5 |      5 |    113 |      0 |      0 |      0 |      7 |     10 |      3 |      3 |      9 |     69 |      0 |      0 |      1 |      6 |      6 |      3 |      0 |      0 |     33 |      0 |      0 |      0 |      6 |      3 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 2720000 |     588 |    327 |    121 |    10 |    0 |     9 |    4 |    4 |    12 |    0 |    101 |    0 |    0 |    0 |    0 |    292 |    296 |      29 |      10 |       9 |       4 |     12 |      7 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      4 |      1 |      2 |      0 |        4 |       18 |       36 |       52 |       23 |       13 |       7 |        9 |       24 |       43 |       44 |       28 |       16 |      10 |        1 |        8 |       19 |       18 |        7 |        7 |       6 |        5 |       12 |        8 |        9 |        6 |       10 |       5 |        2 |       13 |       18 |       10 |        8 |        2 |       0 |        3 |       17 |       14 |        5 |        5 |        4 |       0 |        0 |        1 |       10 |        5 |        2 |        2 |       0 |        2 |        7 |        4 |        3 |        3 |        0 |       0 |      0 |      0 |     54 |     52 |     11 |     10 |      9 |    191 |      0 |      0 |      0 |     16 |     14 |      5 |      4 |      9 |     73 |      0 |      0 |      1 |     23 |      5 |      4 |      1 |      0 |     67 |      0 |      0 |      0 |      1 |     10 |      1 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 2722100 |     502 |    250 |    100 |     9 |    0 |     9 |   10 |    4 |     8 |    0 |    112 |    0 |    0 |    0 |    0 |    203 |    299 |      38 |      15 |      18 |       6 |      6 |      2 |      3 |      3 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      0 |      0 |      4 |      2 |        6 |       21 |       21 |       24 |        3 |       11 |       2 |       18 |       42 |       35 |       30 |       15 |       21 |       1 |        4 |       17 |       12 |        6 |        1 |        2 |       0 |        6 |       17 |       18 |        8 |        2 |        6 |       1 |        5 |       19 |       11 |       13 |        3 |        1 |       0 |       14 |       24 |       11 |        8 |        1 |        2 |       0 |        3 |        8 |        4 |        3 |        3 |        0 |       0 |        2 |       11 |        2 |        2 |        1 |        1 |       0 |      0 |      5 |     26 |     31 |      3 |      2 |      2 |    181 |      0 |      0 |      2 |      9 |     11 |      0 |      0 |      1 |     77 |      0 |      0 |      2 |      8 |     10 |      0 |      1 |      0 |     91 |      0 |      0 |      0 |      5 |      3 |      1 |      0 |      0 |     31 |      0 |     37 | s03      | R    |
| 2723000 |     509 |    250 |    122 |     9 |    0 |     4 |    6 |    9 |    21 |    0 |     88 |    0 |    0 |    0 |    0 |    259 |    250 |      42 |      14 |      15 |       3 |     11 |      6 |      9 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       8 |       2 |       2 |      1 |      0 |      1 |      0 |        6 |       21 |       41 |       27 |        7 |        5 |       5 |       11 |       25 |       37 |       30 |       17 |       13 |       5 |        4 |       18 |       13 |       17 |        7 |        7 |       7 |        2 |       13 |        9 |        8 |        3 |       10 |       4 |        5 |       17 |       11 |        7 |        6 |        0 |       0 |        9 |       17 |        7 |        4 |        3 |        2 |       0 |        6 |        8 |        5 |        6 |        3 |        0 |       0 |        2 |        5 |        6 |        6 |        2 |        0 |       0 |      0 |      2 |     38 |     32 |     12 |      8 |      6 |    152 |      0 |      0 |      2 |      9 |     13 |      6 |      4 |      2 |     86 |      0 |      0 |      1 |      6 |      6 |      3 |      0 |      0 |     72 |      0 |      0 |      1 |      7 |      4 |      2 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 2726000 |     477 |    237 |     92 |    12 |    0 |    10 |    1 |    2 |     4 |    0 |    119 |    0 |    0 |    0 |    0 |    221 |    256 |      81 |      21 |      40 |       6 |      4 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      10 |       8 |       9 |       0 |      1 |      1 |      0 |      0 |       10 |       21 |       35 |       29 |       11 |        7 |       2 |       16 |       34 |       23 |       28 |       10 |        8 |       3 |        7 |        3 |        9 |       17 |        5 |        6 |       0 |        5 |       15 |        9 |        5 |        8 |        3 |       0 |        8 |       16 |        8 |        7 |        3 |        3 |       0 |       19 |       17 |       24 |       11 |        2 |        1 |       0 |        3 |        4 |        1 |        5 |        1 |        0 |       0 |        1 |        8 |        1 |        3 |        0 |        2 |       0 |      0 |      3 |     47 |     25 |      1 |      3 |      3 |    155 |      0 |      0 |      0 |      9 |     15 |      5 |      5 |      3 |     55 |      0 |      0 |      1 |     19 |     12 |      5 |      0 |      0 |     82 |      0 |      0 |      1 |      5 |      4 |      1 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 2726100 |     190 |     78 |     49 |     9 |    0 |     5 |    1 |    1 |     2 |    0 |     45 |    0 |    0 |    0 |    0 |     92 |     98 |      26 |      11 |      16 |       2 |      2 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |       3 |      11 |       9 |       2 |      3 |      0 |      1 |      0 |        5 |        5 |        7 |        6 |        4 |        1 |       1 |        3 |       10 |       13 |       15 |        3 |        4 |       1 |        3 |        7 |        6 |        7 |        4 |        3 |       0 |        2 |        4 |        5 |        4 |        1 |        3 |       0 |        6 |        9 |        1 |        4 |        0 |        3 |       0 |        8 |        4 |        1 |        6 |        1 |        2 |       0 |        2 |        2 |        2 |        3 |        1 |        0 |       0 |        3 |        4 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     16 |     12 |      1 |      1 |      1 |     47 |      0 |      0 |      1 |     10 |      9 |      2 |      3 |      1 |     23 |      0 |      0 |      1 |      7 |      3 |      0 |      0 |      0 |     34 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2727000 |     535 |    282 |    102 |    11 |    0 |    11 |    9 |    5 |    15 |    0 |    100 |    0 |    0 |    0 |    0 |    250 |    285 |      59 |      24 |      19 |       7 |     11 |      1 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       3 |       7 |       2 |       1 |      6 |      3 |      1 |      0 |        8 |       23 |       33 |       32 |       16 |       11 |       3 |       14 |       45 |       34 |       31 |       15 |       14 |       3 |        5 |       16 |       13 |       10 |        3 |        5 |       1 |        9 |       10 |       10 |        5 |       10 |        5 |       0 |        3 |       15 |        9 |       14 |        2 |        1 |       0 |       11 |       11 |       15 |       15 |        3 |        1 |       0 |        4 |        9 |        4 |        7 |        3 |        0 |       0 |        5 |        6 |        5 |        5 |        1 |        2 |       0 |      0 |      3 |     37 |     34 |     11 |      4 |      4 |    189 |      0 |      0 |      1 |     12 |     16 |      1 |      1 |      1 |     70 |      0 |      0 |      0 |     14 |      3 |      2 |      0 |      2 |     79 |      0 |      0 |      1 |      4 |      8 |      1 |      0 |      0 |     37 |      0 |     37 | s03      | R    |
| 2729000 |     742 |    370 |    147 |    17 |    0 |    10 |    9 |    3 |    25 |    0 |    161 |    0 |    0 |    0 |    0 |    348 |    394 |      61 |      21 |      18 |       5 |     11 |      7 |      4 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       2 |       2 |       1 |       0 |      8 |      1 |      2 |      1 |        6 |       41 |       47 |       44 |       16 |        8 |       2 |       19 |       54 |       44 |       43 |       22 |       16 |       8 |        5 |       20 |       22 |       18 |       13 |        5 |       0 |        6 |       20 |        8 |       13 |        9 |        7 |       1 |       11 |       22 |       20 |       10 |        4 |        4 |       0 |       15 |       32 |       15 |       15 |        8 |        5 |       0 |        2 |       13 |        5 |        4 |        4 |        1 |       1 |       10 |        8 |        8 |        5 |        2 |        1 |       0 |      0 |      6 |     50 |     41 |      8 |      5 |      4 |    256 |      0 |      0 |      1 |     24 |     16 |      5 |      4 |      4 |     93 |      0 |      0 |      2 |     17 |     10 |      5 |      1 |      0 |    126 |      0 |      0 |      0 |     13 |      7 |      0 |      1 |      0 |     43 |      0 |     37 | s03      | R    |
| 2729100 |     597 |    294 |    131 |    16 |    0 |     4 |    6 |    3 |    18 |    0 |    125 |    0 |    0 |    0 |    0 |    290 |    307 |      45 |      17 |      17 |       4 |     14 |      5 |      4 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |      0 |      1 |      0 |       4 |       2 |       3 |       0 |      3 |      0 |      1 |      1 |        7 |       36 |       33 |       31 |       13 |        9 |       0 |       12 |       39 |       37 |       34 |       22 |       20 |       1 |        9 |       26 |       14 |       13 |        4 |        3 |       2 |        6 |        9 |       14 |       11 |        7 |       11 |       2 |        8 |       25 |       17 |        8 |        4 |        2 |       0 |        8 |       26 |       17 |        6 |        1 |        2 |       1 |        4 |       10 |        7 |        5 |        0 |        0 |       0 |        2 |       12 |        1 |        4 |        1 |        1 |       0 |      0 |      2 |     41 |     38 |     14 |      5 |      5 |    189 |      0 |      0 |      2 |     19 |      7 |      6 |      5 |      2 |     90 |      0 |      0 |      2 |      8 |      8 |      2 |      1 |      0 |    104 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |     38 |      0 |     37 | s03      | R    |
| 2735000 |     493 |    259 |     94 |    11 |    0 |     5 |    8 |    6 |     4 |    0 |    106 |    0 |    0 |    0 |    0 |    228 |    265 |      47 |       7 |      10 |       2 |     10 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       2 |       2 |       1 |      2 |      0 |      1 |      1 |        3 |       27 |       29 |       29 |       10 |       10 |       3 |       14 |       40 |       25 |       36 |       19 |       11 |       3 |        8 |        6 |       12 |        6 |        8 |        3 |       0 |        7 |       15 |       12 |       10 |        3 |        4 |       0 |        8 |       20 |       13 |        9 |        5 |        2 |       0 |        8 |       16 |       11 |        9 |        3 |        2 |       0 |        1 |        1 |        4 |        7 |        1 |        3 |       0 |        4 |        0 |        5 |        5 |        2 |        1 |       0 |      0 |      3 |     38 |     36 |      4 |      1 |      2 |    175 |      0 |      0 |      1 |     16 |      6 |      0 |      1 |      1 |     69 |      0 |      0 |      0 |     18 |      5 |      0 |      0 |      2 |     81 |      0 |      0 |      0 |      6 |      5 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 2739000 |     165 |     84 |     33 |     3 |    0 |     3 |    3 |    3 |     4 |    0 |     32 |    0 |    0 |    0 |    0 |     94 |     71 |      22 |       5 |       8 |       2 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |      0 |      0 |      1 |       9 |       7 |       5 |       1 |      0 |      1 |      1 |      0 |        4 |       11 |        6 |       10 |        6 |        3 |       0 |       11 |        4 |        9 |        9 |        4 |        6 |       1 |        3 |        3 |        8 |        6 |        2 |        2 |       0 |        1 |        3 |        1 |        1 |        0 |        3 |       0 |        2 |       10 |        2 |        5 |        1 |        2 |       0 |        6 |        0 |        2 |        0 |        2 |        0 |       0 |        2 |        1 |        3 |        2 |        0 |        0 |       0 |        0 |        3 |        2 |        2 |        0 |        0 |       1 |      0 |      3 |      5 |     15 |      1 |      1 |      1 |     58 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      1 |     22 |      0 |      0 |      2 |      3 |      3 |      1 |      0 |      0 |     23 |      0 |      0 |      2 |      0 |      4 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 2739100 |     176 |     92 |     36 |     5 |    0 |     4 |    0 |    5 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |     85 |     91 |      36 |       7 |      13 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      17 |       9 |       9 |       5 |      0 |      1 |      0 |      1 |        5 |       10 |       11 |        8 |        7 |        4 |       1 |        6 |        9 |       12 |        9 |        7 |        3 |       0 |        3 |        5 |        2 |        1 |        2 |        3 |       0 |        2 |        3 |        6 |        7 |        0 |        2 |       0 |        1 |        2 |        4 |        4 |        4 |        1 |       0 |        6 |        5 |        4 |        3 |        0 |        0 |       0 |        0 |        2 |        2 |        1 |        2 |        0 |       0 |        1 |        2 |        1 |        2 |        1 |        0 |       0 |      0 |      2 |     14 |     20 |      0 |      0 |      0 |     56 |      0 |      0 |      0 |      3 |      7 |      0 |      3 |      0 |     23 |      0 |      0 |      0 |      6 |      7 |      2 |      0 |      0 |     19 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 2741000 |     115 |     54 |     34 |     2 |    0 |     2 |    3 |    2 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     53 |     62 |      21 |       9 |       6 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       5 |       7 |       3 |       0 |      3 |      0 |      0 |      0 |        5 |        5 |        5 |        3 |        3 |        1 |       0 |        4 |       10 |        5 |        6 |        3 |        2 |       2 |        1 |        7 |        4 |        6 |        2 |        0 |       0 |        2 |        7 |        1 |        2 |        2 |        0 |       0 |        2 |        1 |        3 |        0 |        0 |        0 |       0 |        4 |        3 |        0 |        2 |        2 |        1 |       0 |        2 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |      0 |      1 |      6 |     10 |      1 |      0 |      1 |     35 |      0 |      0 |      0 |      9 |      6 |      0 |      0 |      0 |     19 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2741100 |     343 |    149 |     85 |    15 |    0 |     6 |    1 |    2 |    11 |    0 |     74 |    0 |    0 |    0 |    0 |    148 |    195 |      27 |       9 |       6 |       1 |      4 |      2 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      3 |      1 |      0 |      0 |      0 |       3 |       6 |       2 |       1 |      2 |      0 |      1 |      0 |        5 |       12 |       21 |       11 |        4 |        6 |       1 |        5 |       31 |       21 |       11 |       11 |        7 |       3 |        4 |       16 |       12 |        5 |        7 |        2 |       3 |        3 |       12 |        2 |        6 |        9 |        3 |       1 |        1 |        8 |        4 |        6 |        3 |        1 |       0 |        5 |       23 |        6 |        7 |        6 |        4 |       0 |        4 |        5 |        5 |        1 |        1 |        0 |       0 |        3 |        9 |        5 |        1 |        1 |        0 |       0 |      0 |      1 |     17 |     26 |      4 |      2 |      1 |     98 |      0 |      0 |      0 |      9 |     18 |      0 |      1 |      1 |     56 |      0 |      0 |      0 |      5 |      3 |      1 |      1 |      0 |     64 |      0 |      0 |      0 |      4 |      5 |      1 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2742000 |     571 |    283 |    119 |     9 |    0 |     8 |    4 |    4 |    18 |    0 |    126 |    0 |    0 |    0 |    0 |    263 |    308 |      30 |       9 |       8 |       1 |     19 |      4 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      2 |      0 |      3 |      1 |        6 |       21 |       33 |       36 |       11 |        8 |       5 |        5 |       28 |       35 |       48 |       25 |       15 |       7 |        1 |        9 |       18 |       11 |        7 |        6 |       5 |        4 |       15 |       12 |       11 |        5 |       12 |       3 |        5 |       26 |       17 |        9 |        6 |        2 |       1 |        6 |       18 |       13 |        9 |       10 |        4 |       0 |        1 |        6 |        5 |        6 |        1 |        1 |       0 |        3 |        7 |        7 |        3 |        1 |        2 |       0 |      0 |      0 |     34 |     43 |     11 |     12 |      8 |    175 |      0 |      0 |      0 |     13 |     12 |      5 |      5 |      2 |     82 |      0 |      0 |      1 |     15 |     15 |      4 |      0 |      0 |     91 |      0 |      0 |      0 |      7 |      8 |      1 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 2743000 |     415 |    187 |    134 |     8 |    0 |     1 |    6 |    1 |     2 |    0 |     76 |    0 |    0 |    0 |    0 |    187 |    228 |      13 |       4 |       0 |       0 |     12 |      6 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      0 |        3 |        6 |       25 |       18 |       11 |        9 |       3 |        6 |        7 |       23 |       30 |       21 |       16 |       9 |        0 |        7 |       11 |       12 |       11 |       14 |       8 |        4 |        1 |       11 |       12 |       11 |       21 |      11 |        3 |        3 |        6 |       16 |       10 |        2 |       1 |        2 |        4 |       12 |        9 |        4 |        3 |       1 |        0 |        0 |        4 |        1 |        2 |        1 |       0 |        1 |        4 |        2 |        0 |        1 |        2 |       0 |      0 |      2 |     18 |     37 |     10 |      8 |      3 |    109 |      0 |      0 |      3 |      8 |     23 |      6 |      5 |      7 |     82 |      0 |      0 |      1 |     10 |      9 |      2 |      1 |      0 |     53 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 2744000 |     397 |    181 |    153 |     2 |    0 |     2 |    1 |    1 |     4 |    0 |     53 |    0 |    0 |    0 |    0 |    197 |    200 |       2 |       2 |       4 |       0 |     13 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        7 |       20 |       22 |       15 |       11 |       7 |        1 |        6 |       13 |       31 |       25 |       15 |       6 |        1 |        8 |        9 |       14 |       13 |       23 |      10 |        4 |        0 |        8 |        9 |       16 |       21 |      17 |        2 |        2 |        4 |        8 |        7 |        1 |       2 |        5 |        3 |        6 |        7 |        4 |        1 |       1 |        1 |        1 |        2 |        4 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      3 |     29 |     25 |      7 |      4 |      7 |    106 |      0 |      0 |      1 |     12 |     23 |     11 |      1 |      5 |    100 |      0 |      0 |      1 |      8 |     11 |      2 |      2 |      1 |     28 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 2748000 |     444 |    190 |    166 |     5 |    0 |     4 |    2 |    0 |     3 |    0 |     74 |    0 |    0 |    0 |    0 |    225 |    219 |      17 |       2 |       1 |       0 |      7 |     14 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        4 |        9 |       20 |       21 |       21 |        7 |       7 |        3 |       11 |       22 |       27 |       18 |       12 |       8 |        2 |        8 |       12 |       18 |       14 |       16 |      15 |        1 |        7 |       17 |        6 |       12 |       20 |      18 |        1 |        7 |       12 |       12 |        9 |        1 |       0 |        2 |        5 |        6 |        9 |        6 |        3 |       1 |        0 |        1 |        3 |        3 |        1 |        1 |       0 |        1 |        1 |        1 |        0 |        2 |        0 |       0 |      0 |      2 |     28 |     32 |     13 |      9 |      4 |    102 |      0 |      0 |      0 |     14 |     20 |      8 |      4 |      7 |    113 |      0 |      0 |      1 |      9 |      9 |      3 |      3 |      4 |     45 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 2748100 |     216 |     83 |     95 |     4 |    0 |     0 |    1 |    1 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |    105 |    111 |       5 |       0 |       0 |       0 |     14 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        6 |        9 |        8 |       11 |       1 |        1 |        3 |        3 |        7 |       11 |       19 |       0 |        1 |        1 |        1 |        2 |        9 |       30 |       0 |        2 |        1 |        2 |        5 |       11 |       30 |       0 |        2 |        0 |        1 |        5 |        5 |        4 |       2 |        0 |        1 |        2 |        3 |        5 |        1 |       1 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      8 |     14 |      3 |      2 |      3 |     53 |      0 |      0 |      1 |     15 |      9 |      2 |      4 |      1 |     63 |      0 |      0 |      3 |      6 |      1 |      1 |      1 |      2 |     18 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 2751000 |     376 |    189 |    119 |    11 |    0 |     0 |    4 |    2 |     5 |    0 |     46 |    0 |    0 |    0 |    0 |    172 |    204 |       5 |       2 |       0 |       1 |     20 |      2 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        8 |       25 |       13 |       18 |        9 |       7 |        2 |       13 |       21 |       23 |       22 |       15 |       9 |        3 |        7 |        6 |       12 |        9 |       10 |      10 |        4 |        8 |        5 |        9 |        7 |       16 |      13 |        1 |        4 |        6 |        5 |        3 |        1 |       1 |        0 |        4 |        5 |        6 |        8 |        1 |       1 |        1 |        3 |        4 |        1 |        0 |        1 |       0 |        0 |        3 |        2 |        3 |        3 |        1 |       0 |      0 |      0 |     22 |     33 |      9 |      2 |      8 |    115 |      0 |      0 |      0 |      9 |     14 |      6 |      4 |      6 |     80 |      0 |      0 |      1 |      4 |      7 |      3 |      1 |      3 |     27 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 2752000 |     314 |    143 |    116 |     8 |    0 |     1 |    2 |    0 |     2 |    0 |     42 |    0 |    0 |    0 |    0 |    144 |    170 |      11 |       4 |       0 |       1 |     13 |      6 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        5 |       13 |       16 |       12 |       10 |       1 |        2 |       11 |       14 |       22 |       17 |       13 |       5 |        4 |        4 |        9 |        8 |       13 |       10 |       7 |        4 |        3 |       10 |       11 |       10 |        9 |      14 |        3 |        5 |        2 |        6 |        5 |        1 |       2 |        2 |        3 |        4 |        3 |        2 |        3 |       1 |        1 |        2 |        0 |        2 |        0 |        1 |       0 |        0 |        2 |        0 |        4 |        0 |        1 |       0 |      0 |      2 |     14 |     13 |      7 |      8 |      3 |     96 |      0 |      0 |      0 |     13 |     22 |      8 |      6 |      2 |     65 |      0 |      0 |      1 |      7 |      4 |      1 |      1 |      0 |     28 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 2753000 |     333 |    167 |    100 |     1 |    0 |     4 |    2 |    0 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    178 |    155 |      19 |      10 |       5 |       2 |      4 |      4 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        7 |       16 |       21 |       13 |        9 |       9 |        1 |       10 |       17 |       27 |       16 |        8 |       8 |        2 |        2 |       15 |       17 |        9 |        4 |       6 |        1 |        9 |        4 |        8 |        6 |        8 |       9 |        1 |       12 |       12 |        4 |        4 |        1 |       1 |        2 |        4 |        9 |        4 |        3 |        0 |       0 |        1 |        1 |        0 |        1 |        2 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |     22 |     27 |      8 |      4 |      6 |     99 |      0 |      0 |      0 |      8 |     15 |      5 |      1 |      8 |     63 |      0 |      0 |      0 |     10 |      0 |      3 |      4 |      0 |     40 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 2754000 |     206 |     97 |     36 |     5 |    0 |     5 |    3 |    2 |    10 |    0 |     48 |    0 |    0 |    0 |    0 |     94 |    112 |      20 |       1 |       8 |       5 |      2 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |       2 |       4 |       6 |       0 |      1 |      2 |      0 |      0 |        3 |        4 |       13 |       13 |        9 |        4 |       1 |        5 |       18 |        8 |       12 |        4 |        3 |       0 |        0 |        6 |        3 |        4 |        0 |        4 |       0 |        0 |        5 |        5 |        4 |        2 |        2 |       1 |        3 |        6 |        6 |        3 |        1 |        0 |       0 |        8 |        6 |        8 |        4 |        2 |        0 |       1 |        0 |        7 |        2 |        1 |        1 |        0 |       0 |        3 |        4 |        2 |        1 |        2 |        2 |       0 |      0 |      0 |      7 |     14 |      5 |      1 |      1 |     69 |      0 |      0 |      0 |      3 |      3 |      2 |      1 |      0 |     27 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |     39 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 2754100 |     199 |     80 |     63 |     5 |    0 |     0 |    1 |    5 |     2 |    0 |     43 |    0 |    0 |    0 |    0 |    102 |     97 |      19 |       2 |       2 |       1 |      1 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      13 |      14 |      10 |       4 |      0 |      0 |      2 |      0 |        6 |       11 |       10 |        6 |        5 |        6 |       1 |        5 |        5 |        8 |        9 |        6 |        1 |       1 |        2 |        3 |        9 |        7 |        3 |        5 |       1 |        4 |        8 |        8 |        4 |        6 |        3 |       0 |        3 |        8 |        2 |        3 |        1 |        2 |       0 |        4 |        8 |        7 |        3 |        1 |        1 |       0 |        2 |        2 |        0 |        3 |        1 |        0 |       0 |        0 |        2 |        2 |        0 |        1 |        0 |       0 |      0 |      2 |     11 |     13 |      0 |      1 |      2 |     51 |      0 |      0 |      1 |      4 |      9 |      2 |      1 |      1 |     45 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      1 |     32 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2757000 |     285 |    142 |     72 |    13 |    0 |     3 |    2 |    3 |     3 |    0 |     47 |    0 |    0 |    0 |    0 |    124 |    161 |      49 |      15 |      13 |       5 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      16 |      17 |      14 |       6 |      4 |      0 |      1 |      0 |        8 |       11 |       14 |        6 |        6 |       14 |       0 |        9 |       13 |       11 |       11 |        9 |       30 |       0 |        2 |       10 |        1 |        8 |        4 |        8 |       0 |        5 |        4 |        5 |        1 |        6 |       15 |       3 |        4 |        5 |        5 |        2 |        2 |        6 |       0 |        1 |        6 |        4 |        4 |        2 |        6 |       0 |        1 |        3 |        2 |        1 |        1 |        0 |       0 |        4 |        4 |        1 |        2 |        0 |        5 |       0 |      0 |      2 |     25 |     20 |      0 |      0 |      0 |     95 |      0 |      0 |      3 |      8 |     11 |      2 |      3 |      0 |     45 |      0 |      0 |      0 |      4 |      7 |      1 |      0 |      1 |     34 |      0 |      0 |      0 |      4 |      5 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2759000 |     191 |     80 |     54 |     6 |    0 |     2 |    3 |    2 |     3 |    0 |     41 |    0 |    0 |    0 |    0 |     91 |    100 |      30 |      11 |      11 |       1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |      18 |      18 |       0 |      1 |      0 |      0 |      0 |        5 |        4 |       10 |        8 |        2 |        2 |       0 |       14 |       10 |        7 |       10 |        5 |        3 |       0 |        0 |       10 |        7 |        7 |        2 |        4 |       2 |        3 |        6 |        3 |        4 |        1 |        2 |       3 |        4 |        6 |        4 |        2 |        2 |        3 |       0 |        6 |        7 |        5 |        0 |        2 |        0 |       0 |        1 |        2 |        1 |        3 |        0 |        0 |       0 |        0 |        4 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |     12 |      7 |      0 |      1 |      4 |     56 |      0 |      0 |      0 |      9 |      5 |      0 |      1 |      2 |     37 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |     35 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2761000 |     347 |    169 |     80 |    14 |    0 |     4 |    3 |    3 |     0 |    0 |     74 |    0 |    0 |    0 |    0 |    178 |    169 |      57 |      14 |      22 |       6 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      22 |      20 |      23 |       1 |      2 |      0 |      0 |      0 |       14 |       16 |       21 |       12 |       18 |        7 |       1 |       14 |       12 |       17 |       18 |       10 |        8 |       1 |        4 |        4 |        8 |        8 |        5 |        5 |       0 |        6 |        9 |        8 |       10 |        9 |        3 |       1 |        9 |       11 |        5 |        2 |        6 |        7 |       0 |        6 |       11 |        6 |        7 |        1 |        2 |       1 |        3 |        2 |        3 |        4 |        2 |        0 |       1 |        2 |        0 |        2 |        3 |        2 |        0 |       0 |      0 |      0 |     20 |     18 |      1 |      5 |      2 |    123 |      0 |      0 |      2 |     12 |      6 |      0 |      2 |      1 |     57 |      0 |      0 |      0 |     11 |      3 |      0 |      1 |      0 |     59 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 2762000 |     308 |    146 |     66 |     4 |    0 |     4 |    2 |    7 |     5 |    0 |     74 |    0 |    0 |    0 |    0 |    149 |    159 |      55 |      11 |      21 |       7 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      3 |      2 |      0 |      1 |      1 |      0 |      1 |      10 |      17 |      16 |       3 |      0 |      2 |      2 |      0 |       11 |       18 |       16 |       11 |        6 |        3 |       0 |       12 |       20 |       16 |       20 |        8 |        4 |       1 |        2 |        8 |       12 |        8 |        3 |        5 |       0 |        5 |        8 |        8 |        3 |        2 |        1 |       1 |        9 |        9 |        7 |       10 |        1 |        1 |       0 |        4 |       16 |        6 |        9 |        0 |        2 |       0 |        0 |        3 |        3 |        2 |        0 |        1 |       0 |        4 |        3 |        2 |        3 |        0 |        1 |       0 |      0 |      2 |     20 |     32 |      1 |      0 |      4 |     87 |      0 |      0 |      1 |      5 |      6 |      0 |      1 |      0 |     53 |      0 |      0 |      0 |      8 |      3 |      1 |      0 |      0 |     62 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2764000 |     549 |    290 |    125 |    11 |    0 |    10 |    0 |   10 |     2 |    0 |    101 |    0 |    0 |    0 |    0 |    248 |    301 |      86 |      16 |      17 |       5 |      5 |      5 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      4 |      5 |      2 |      2 |      0 |      0 |      0 |      32 |      24 |      25 |       2 |      6 |      2 |      3 |      0 |       13 |       14 |       32 |       22 |       18 |       24 |       0 |       21 |       33 |       22 |       36 |       24 |       27 |       4 |        7 |       15 |       15 |        6 |        9 |       11 |       1 |        8 |        9 |       13 |       12 |       10 |        6 |       3 |        9 |        6 |       10 |        9 |        8 |        5 |       0 |        8 |       13 |       11 |       10 |        6 |        6 |       0 |        2 |        2 |        4 |        3 |        0 |        3 |       0 |        3 |        2 |        4 |        6 |        2 |        2 |       0 |      0 |      4 |     55 |     37 |      6 |      4 |      4 |    180 |      0 |      0 |      2 |     14 |     13 |      3 |      2 |      3 |     88 |      0 |      0 |      1 |     14 |     13 |      1 |      1 |      3 |     68 |      0 |      0 |      0 |      8 |      4 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 2766000 |     272 |    122 |     80 |     9 |    0 |     1 |    2 |    2 |     2 |    0 |     54 |    0 |    0 |    0 |    0 |    111 |    161 |      11 |       5 |       5 |       0 |      4 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       1 |       3 |       0 |       1 |      1 |      0 |      1 |      0 |        3 |        9 |       10 |       11 |        6 |        3 |       3 |       16 |       14 |        9 |       16 |        9 |       11 |       2 |       13 |        4 |       11 |        3 |        3 |        3 |       2 |        9 |        5 |        6 |        9 |        3 |        6 |       3 |        6 |        5 |        5 |        3 |        1 |        0 |       0 |       18 |        8 |        5 |        1 |        2 |        0 |       0 |        1 |        3 |        2 |        1 |        0 |        0 |       0 |        4 |        2 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      9 |     18 |      5 |      3 |      4 |     83 |      0 |      0 |      0 |      8 |      5 |      1 |      1 |      2 |     63 |      0 |      0 |      0 |      6 |      5 |      1 |      0 |      0 |     42 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2767000 |     283 |    124 |     77 |     5 |    0 |     6 |    2 |    3 |     4 |    0 |     62 |    0 |    0 |    0 |    0 |    157 |    126 |      25 |      12 |       7 |       2 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      1 |      30 |      25 |      17 |       4 |      0 |      1 |      0 |      1 |       13 |       11 |       14 |       10 |        3 |       10 |       1 |       14 |       16 |        8 |        8 |       10 |        5 |       1 |        4 |       12 |        7 |       11 |        3 |        8 |       0 |        6 |        7 |        6 |        3 |        3 |        5 |       2 |       10 |       12 |        3 |        1 |        5 |        4 |       0 |        7 |        7 |        3 |        5 |        4 |        1 |       0 |        2 |        2 |        5 |        3 |        2 |        1 |       0 |        1 |        0 |        0 |        3 |        1 |        0 |       0 |      0 |      1 |     10 |      8 |      1 |      0 |      1 |    103 |      0 |      0 |      0 |      9 |      8 |      1 |      2 |      0 |     57 |      0 |      0 |      2 |      8 |      4 |      0 |      0 |      0 |     48 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2772000 |     373 |    162 |    145 |     5 |    0 |     3 |    1 |    1 |     4 |    0 |     52 |    0 |    0 |    0 |    0 |    181 |    192 |       6 |       2 |       4 |       0 |      9 |      6 |      2 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        6 |       28 |       21 |       12 |        6 |       2 |        3 |        7 |       20 |       29 |        9 |       10 |       8 |        0 |        8 |       16 |        8 |       15 |       12 |      14 |        2 |        8 |        8 |       15 |        8 |       19 |      12 |        1 |        4 |       10 |        4 |        5 |        0 |       1 |        1 |        5 |        7 |        6 |        7 |        1 |       0 |        0 |        0 |        2 |        4 |        1 |        0 |       0 |        0 |        0 |        6 |        1 |        0 |        0 |       0 |      0 |      4 |     17 |     26 |      6 |      4 |      3 |    102 |      0 |      0 |      2 |      9 |     19 |     11 |      6 |      3 |     95 |      0 |      0 |      0 |      6 |      3 |      0 |      2 |      1 |     40 |      0 |      0 |      0 |      2 |      4 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2772500 |     135 |     56 |     41 |     1 |    0 |     2 |    0 |    1 |     4 |    0 |     30 |    0 |    0 |    0 |    0 |     48 |     87 |       8 |       2 |       4 |       2 |      1 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       1 |      4 |      2 |      0 |      0 |       12 |        4 |        0 |        0 |        0 |        0 |       0 |       37 |        3 |        0 |        0 |        0 |        0 |       0 |       11 |        7 |        0 |        0 |        0 |        0 |       0 |       20 |        3 |        0 |        0 |        0 |        0 |       0 |        8 |        1 |        0 |        1 |        0 |        0 |       0 |       18 |        2 |        0 |        0 |        0 |        0 |       0 |        4 |        0 |        0 |        0 |        0 |        0 |       0 |        4 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     54 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     40 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     28 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2773000 |     350 |    179 |     94 |     8 |    0 |     3 |    3 |    1 |     3 |    0 |     59 |    0 |    0 |    0 |    0 |    170 |    180 |      18 |       4 |       7 |       0 |     21 |      4 |      4 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        9 |       27 |       35 |        7 |        3 |       4 |        1 |       13 |       25 |       21 |       15 |        6 |      11 |        1 |        2 |       14 |       13 |        9 |        3 |       4 |        2 |        4 |       13 |        1 |        2 |       12 |      14 |        2 |        4 |        7 |        7 |        6 |        2 |       0 |        5 |        4 |        9 |        3 |        5 |        4 |       1 |        1 |        2 |        5 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        3 |        1 |        3 |       0 |      0 |      1 |     20 |     35 |     11 |      5 |      6 |    101 |      0 |      0 |      0 |     11 |     11 |      5 |      3 |      1 |     63 |      0 |      0 |      0 |     15 |      2 |      3 |      0 |      1 |     38 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2776000 |     477 |    199 |    177 |     6 |    0 |     4 |    3 |    0 |    10 |    0 |     78 |    0 |    0 |    0 |    0 |    237 |    240 |       8 |       7 |       6 |       2 |     12 |      8 |      3 |      3 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |       6 |       2 |       0 |      1 |      0 |      0 |      1 |        1 |       10 |       23 |       24 |       14 |       12 |       7 |        5 |       12 |       20 |       29 |       18 |       13 |      11 |        3 |        9 |       34 |       12 |       11 |       15 |       6 |        1 |        7 |       17 |       13 |        6 |       25 |      18 |        2 |       10 |       12 |        9 |        5 |        3 |       0 |        7 |       10 |        7 |        6 |        5 |        2 |       0 |        0 |        2 |        6 |        4 |        1 |        2 |       0 |        0 |        2 |        4 |        1 |        1 |        0 |       0 |      0 |      1 |     20 |     38 |      4 |      1 |      6 |    129 |      0 |      0 |      0 |     20 |     24 |      3 |      3 |      4 |    123 |      0 |      0 |      1 |     16 |      6 |      3 |      1 |      1 |     50 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2781000 |     392 |    197 |    102 |     4 |    0 |     3 |    2 |    7 |     5 |    0 |     72 |    0 |    0 |    0 |    0 |    168 |    224 |      25 |       7 |      11 |       2 |      7 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      27 |      11 |       2 |       1 |      0 |      0 |      0 |      0 |        6 |       21 |       18 |       17 |        7 |        7 |       0 |       20 |       35 |       18 |       21 |       18 |        9 |       0 |        5 |       19 |        6 |       10 |        5 |        9 |       1 |        5 |       17 |       10 |        9 |        4 |        2 |       0 |        5 |       11 |        6 |        5 |        2 |        0 |       0 |        6 |       17 |       10 |        4 |        5 |        1 |       0 |        1 |        2 |        4 |        0 |        0 |        1 |       0 |        3 |        5 |        1 |        2 |        1 |        1 |       0 |      0 |      3 |     28 |     24 |      3 |      4 |      1 |    134 |      0 |      0 |      1 |     17 |     18 |      4 |      0 |      4 |     58 |      0 |      0 |      0 |      7 |      7 |      0 |      0 |      1 |     57 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 2800000 |     514 |    230 |    127 |    14 |    0 |     8 |    2 |    7 |     6 |    0 |    120 |    0 |    0 |    0 |    0 |    234 |    280 |      45 |      16 |      15 |       6 |      8 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      1 |      0 |      0 |      15 |      18 |      14 |       5 |      2 |      3 |      0 |      0 |        6 |       27 |       26 |       14 |        7 |       11 |       1 |       27 |       38 |       21 |       28 |       16 |        7 |       1 |       12 |       20 |       11 |       11 |        4 |        8 |       0 |        9 |       17 |       19 |        7 |        4 |        5 |       0 |        5 |       21 |       12 |       10 |        6 |        4 |       0 |       16 |       20 |       11 |        7 |        4 |        4 |       0 |        2 |        5 |        6 |        3 |        1 |        1 |       0 |        5 |        7 |        1 |        5 |        1 |        0 |       0 |      0 |      0 |     29 |     20 |      6 |      2 |      4 |    169 |      0 |      0 |      1 |     20 |     11 |      1 |      2 |      0 |     92 |      0 |      0 |      1 |     13 |      7 |      1 |      1 |      0 |     97 |      0 |      0 |      1 |      7 |      4 |      2 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 2801000 |      99 |     47 |     27 |     3 |    0 |     1 |    0 |    1 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     47 |     52 |       5 |       1 |       3 |       0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       4 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        7 |        8 |        1 |        3 |        0 |       4 |        3 |        5 |        4 |        4 |        3 |        2 |       1 |        3 |        4 |        3 |        1 |        2 |        0 |       0 |        0 |        2 |        5 |        2 |        2 |        2 |       1 |        2 |        4 |        1 |        0 |        0 |        0 |       0 |        6 |        3 |        3 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      6 |      1 |      3 |      2 |      2 |     33 |      0 |      0 |      1 |      6 |      2 |      2 |      1 |      0 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 2801100 |     144 |     73 |     40 |     0 |    0 |     0 |    1 |    1 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     59 |     85 |       6 |       4 |       0 |       0 |      4 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       2 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        0 |        0 |        0 |       21 |       0 |        3 |        5 |        1 |        2 |        2 |       37 |       0 |        2 |        2 |        2 |        1 |        1 |       11 |       0 |        4 |        1 |        2 |        1 |        1 |       11 |       1 |        0 |        2 |        1 |        2 |        1 |       11 |       0 |        2 |        1 |        1 |        0 |        1 |        7 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |      9 |     15 |      0 |      1 |      2 |     46 |      0 |      0 |      0 |      3 |      3 |      2 |      1 |      0 |     31 |      0 |      0 |      1 |      5 |      2 |      1 |      1 |      2 |     17 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2802000 |     605 |    261 |    172 |    13 |    0 |     9 |    7 |    5 |     9 |    0 |    129 |    0 |    0 |    0 |    0 |    293 |    312 |      51 |       7 |      15 |       3 |      9 |      6 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       5 |       9 |       2 |       0 |      0 |      0 |      3 |      0 |       11 |       27 |       29 |       27 |        9 |        9 |       4 |       16 |       41 |       26 |       24 |       14 |       11 |      13 |        7 |       17 |       27 |       21 |       11 |        6 |       3 |        8 |       20 |       13 |       14 |        8 |       11 |       6 |       10 |       24 |       11 |        9 |        5 |        3 |       0 |       15 |       20 |       19 |        9 |        3 |        1 |       0 |        3 |       10 |        5 |        2 |        2 |        1 |       0 |        4 |        6 |        7 |        3 |        0 |        0 |       0 |      0 |      1 |     30 |     27 |      8 |      6 |      2 |    187 |      0 |      0 |      0 |     16 |     16 |      7 |      4 |      5 |    124 |      0 |      0 |      1 |     14 |     14 |      2 |      1 |      2 |     95 |      0 |      0 |      1 |      5 |      4 |      0 |      0 |      0 |     33 |      0 |     37 | s03      | R    |
| 2804000 |     160 |     70 |     69 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     54 |    106 |       3 |       4 |       3 |       0 |     14 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |        0 |        1 |        3 |        3 |        3 |       15 |       1 |        2 |        1 |        1 |        5 |        7 |       25 |       3 |        1 |        0 |        0 |        4 |        4 |       12 |       2 |        0 |        1 |        2 |        4 |        5 |       23 |      11 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        3 |        0 |        1 |        2 |        1 |        7 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      1 |      8 |      9 |      1 |      1 |      4 |     46 |      0 |      0 |      0 |     13 |      6 |      0 |      4 |      4 |     42 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2804100 |     195 |     80 |     68 |     3 |    0 |     2 |    0 |    1 |     3 |    0 |     38 |    0 |    0 |    0 |    0 |     92 |    103 |      13 |       4 |       8 |       1 |      7 |      3 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        8 |       15 |        2 |        2 |        2 |        8 |       0 |       10 |       10 |        3 |        4 |        6 |        9 |       1 |        4 |        6 |        2 |        7 |        3 |        8 |       0 |        8 |       10 |        3 |        2 |        5 |        8 |       2 |        4 |        7 |        2 |        2 |        2 |        3 |       0 |        5 |        7 |        1 |        3 |        1 |        1 |       0 |        0 |        2 |        1 |        1 |        0 |        1 |       0 |        1 |        2 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |     10 |      7 |      3 |      1 |      3 |     55 |      0 |      0 |      0 |      8 |      7 |      0 |      3 |      1 |     49 |      0 |      0 |      0 |      7 |      2 |      0 |      1 |      0 |     28 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 2804200 |     208 |     82 |     66 |     4 |    0 |     4 |    2 |    0 |     2 |    0 |     48 |    0 |    0 |    0 |    0 |     87 |    121 |      10 |       2 |      10 |       1 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      0 |      0 |      2 |      0 |        7 |       11 |        5 |        3 |        3 |        1 |       0 |       18 |       14 |        3 |        3 |        6 |        6 |       2 |        8 |       14 |        3 |        0 |        4 |        4 |       0 |        8 |        8 |        3 |        4 |        2 |        7 |       1 |        5 |        9 |        4 |        1 |        1 |        1 |       0 |        7 |       12 |        2 |        1 |        3 |        2 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |        3 |        5 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      0 |      2 |      1 |      2 |     73 |      0 |      0 |      0 |      8 |      2 |      0 |      0 |      1 |     55 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2805000 |     360 |    157 |    122 |     9 |    0 |     2 |    4 |    0 |     4 |    0 |     62 |    0 |    0 |    0 |    0 |    192 |    168 |      12 |       9 |       6 |       0 |     25 |     18 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      2 |      1 |      1 |      0 |       3 |       2 |       3 |       2 |      1 |      1 |      0 |      0 |       12 |        9 |       13 |       11 |        9 |       10 |      11 |        8 |       12 |       12 |       10 |       10 |       13 |      17 |        6 |        6 |       15 |        7 |        3 |       18 |       9 |        2 |        7 |        9 |        7 |        3 |       13 |      17 |        9 |        4 |        8 |        3 |        8 |        4 |       2 |        3 |        3 |        3 |        4 |        3 |        7 |       1 |        3 |        5 |        5 |        0 |        0 |        2 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |      0 |      1 |     14 |     15 |      4 |      6 |      5 |    112 |      0 |      0 |      0 |     13 |     17 |      3 |      3 |      3 |     83 |      0 |      0 |      0 |      6 |      8 |      0 |      3 |      2 |     43 |      0 |      0 |      0 |      5 |      2 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 2805100 |     248 |     93 |    119 |     4 |    0 |     1 |    1 |    0 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |    121 |    127 |       1 |       1 |       3 |       0 |     23 |      8 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        4 |       10 |       10 |        7 |       6 |        2 |        2 |        4 |        4 |       13 |       15 |      11 |        5 |        7 |        2 |        9 |       12 |       16 |      11 |        1 |        2 |        4 |        9 |       11 |       17 |      13 |        0 |        0 |        3 |        1 |        6 |        1 |       1 |        3 |        1 |        3 |        4 |        3 |        3 |       0 |        1 |        0 |        1 |        1 |        0 |        2 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     14 |     10 |      6 |      2 |      2 |     59 |      0 |      0 |      0 |     13 |     13 |      7 |      3 |      8 |     75 |      0 |      0 |      1 |      2 |      5 |      4 |      0 |      1 |     16 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 2806000 |     259 |    125 |    103 |     1 |    0 |     1 |    1 |    0 |     3 |    0 |     25 |    0 |    0 |    0 |    0 |    137 |    122 |       8 |       4 |       0 |       1 |     24 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      0 |      0 |      2 |       2 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        3 |        4 |        9 |        9 |        8 |       18 |       9 |        3 |        2 |       11 |       11 |        8 |       19 |      11 |        3 |        7 |       15 |        7 |        9 |       13 |       5 |        4 |        2 |        4 |        4 |        4 |       16 |      10 |        2 |        3 |        0 |        6 |        1 |        1 |       2 |        2 |        0 |        3 |        3 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |     12 |     17 |      8 |      1 |      6 |     81 |      0 |      0 |      1 |     10 |     10 |      8 |      2 |      1 |     71 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      1 |     19 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 2808000 |     264 |    127 |     92 |     6 |    0 |     4 |    1 |    0 |     2 |    0 |     32 |    0 |    0 |    0 |    0 |    133 |    131 |       9 |       4 |       3 |       0 |     11 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       3 |       1 |       2 |       0 |      0 |      0 |      2 |      0 |        2 |        9 |       14 |       12 |        3 |       11 |      12 |        7 |        7 |       10 |        5 |        7 |       14 |      14 |        5 |        4 |        8 |       11 |        3 |        8 |       8 |        8 |        5 |        7 |        6 |        2 |        9 |       8 |        2 |        5 |        5 |        2 |        0 |        0 |       0 |        3 |        7 |        5 |        0 |        2 |        1 |       0 |        3 |        1 |        1 |        2 |        2 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |     12 |     14 |      0 |      2 |      5 |     94 |      0 |      0 |      4 |     13 |     10 |      1 |      2 |      4 |     58 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 2808100 |     208 |     85 |     62 |     4 |    0 |     3 |    3 |    1 |     3 |    0 |     47 |    0 |    0 |    0 |    0 |    128 |     80 |       7 |       0 |       3 |       2 |     19 |      8 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |       17 |        7 |        7 |        6 |        4 |        4 |       1 |       10 |        7 |        5 |        4 |        3 |        2 |       8 |       10 |       10 |        8 |        1 |        5 |        4 |       1 |        4 |        4 |        4 |        2 |        3 |        4 |       2 |       16 |        8 |        3 |        3 |        1 |        0 |       1 |        7 |        2 |        0 |        2 |        0 |        3 |       1 |        5 |        2 |        3 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      8 |     10 |      3 |      0 |      0 |     64 |      0 |      0 |      0 |     13 |      6 |      3 |      1 |      3 |     36 |      0 |      0 |      1 |      9 |      1 |      0 |      1 |      0 |     35 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 2810000 |     491 |    212 |    137 |    13 |    0 |     8 |    7 |    3 |    14 |    0 |     97 |    0 |    0 |    0 |    0 |    228 |    263 |      22 |       7 |      10 |       5 |     14 |      7 |      7 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |       3 |       3 |       1 |       0 |      1 |      0 |      2 |      0 |       10 |       15 |       22 |       22 |        9 |        7 |       8 |       11 |       26 |       19 |       22 |       17 |       13 |      11 |        9 |       17 |       13 |       13 |        5 |        8 |       3 |        6 |       18 |        9 |        9 |        4 |       15 |       8 |        4 |       14 |       10 |       10 |        6 |        3 |       0 |        8 |       10 |        9 |       14 |        3 |        6 |       0 |        2 |        5 |        3 |        6 |        3 |        1 |       0 |        7 |        6 |        7 |        4 |        0 |        1 |       0 |      0 |      0 |     21 |     26 |      8 |      5 |      1 |    151 |      0 |      0 |      1 |     18 |     19 |      7 |      3 |      0 |     89 |      0 |      0 |      2 |     10 |      8 |      8 |      0 |      3 |     66 |      0 |      0 |      0 |      5 |      6 |      2 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 2810100 |      71 |     19 |     34 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |     16 |    0 |    0 |    0 |    0 |     40 |     31 |       0 |       0 |       0 |       1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        1 |        2 |        0 |       1 |        0 |        1 |        3 |        4 |        1 |        1 |       0 |        0 |        2 |        5 |        2 |        2 |        2 |       5 |        0 |        3 |        4 |        2 |        1 |        1 |       5 |        3 |        1 |        4 |        3 |        0 |        0 |       0 |        2 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      2 |      6 |      1 |      1 |      0 |     24 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2813000 |     386 |    161 |    135 |     8 |    0 |     3 |    3 |    2 |     5 |    0 |     69 |    0 |    0 |    0 |    0 |    191 |    195 |       7 |       5 |       4 |       3 |     10 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |       0 |       6 |       1 |       0 |      2 |      0 |      0 |      1 |        4 |        8 |       25 |       12 |        9 |        9 |       8 |        8 |       12 |       17 |       18 |        7 |       13 |      11 |        5 |       12 |       12 |       14 |       11 |        7 |      10 |        5 |        9 |        8 |       11 |        4 |       17 |      10 |        7 |        2 |        9 |        6 |        7 |        0 |       2 |        7 |       11 |        5 |        7 |        4 |        1 |       1 |        3 |        1 |        2 |        5 |        0 |        1 |       0 |        1 |        2 |        3 |        0 |        2 |        1 |       0 |      0 |      1 |     24 |     18 |     15 |      1 |     11 |     91 |      0 |      0 |      0 |     12 |     19 |     10 |      4 |      8 |     82 |      0 |      0 |      1 |     15 |      9 |      2 |      0 |      2 |     40 |      0 |      0 |      1 |      1 |      4 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2815000 |     805 |    386 |    245 |    15 |    0 |     8 |    8 |    5 |     7 |    0 |    131 |    0 |    0 |    0 |    0 |    386 |    419 |      33 |      11 |      13 |       6 |     29 |     15 |      9 |      2 |      3 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      2 |      2 |      2 |      0 |      6 |      0 |      1 |      1 |       1 |       5 |       1 |       0 |      6 |      2 |      2 |      0 |      132 |        4 |        3 |        9 |        6 |        6 |       6 |      174 |        7 |        4 |       16 |        3 |        6 |      10 |       95 |        8 |        8 |        4 |        3 |        9 |       5 |       91 |        6 |        2 |        0 |        2 |        8 |       4 |       48 |        9 |        5 |        1 |        2 |        1 |       1 |       59 |        1 |        2 |        2 |        0 |        0 |       0 |       11 |        3 |        2 |        3 |        0 |        0 |       2 |       16 |        1 |        2 |        3 |        0 |        0 |       0 |      0 |      1 |     19 |     14 |      2 |      0 |      4 |    346 |      0 |      0 |     20 |     16 |      8 |      2 |      0 |      3 |    196 |      0 |      0 |      3 |     18 |      1 |      0 |      0 |      0 |    109 |      0 |      0 |      4 |      4 |      2 |      1 |      2 |      0 |     30 |      0 |     37 | s03      | R    |
| 2815100 |     670 |    271 |    206 |    12 |    0 |    11 |    6 |    0 |     8 |    0 |    156 |    0 |    0 |    0 |    0 |    337 |    333 |      53 |      17 |      17 |       2 |     12 |      7 |      7 |      1 |      2 |      1 |      2 |      0 |      3 |      0 |      0 |      0 |      5 |      2 |      2 |      0 |      3 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |       98 |       22 |        0 |        2 |        0 |        0 |       0 |      133 |       11 |        3 |        2 |        0 |        0 |       0 |       97 |       14 |        1 |        0 |        0 |        0 |       1 |       81 |        8 |        1 |        0 |        1 |        2 |       0 |       66 |       14 |        1 |        1 |        1 |        0 |       0 |       62 |        8 |        0 |        2 |        0 |        1 |       0 |       16 |        3 |        0 |        0 |        0 |        0 |       0 |       16 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      3 |      4 |      1 |      1 |      0 |      0 |    262 |      0 |      0 |      2 |     11 |      1 |      0 |      0 |      0 |    192 |      0 |      0 |      5 |     10 |      1 |      0 |      0 |      0 |    140 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 2817000 |     983 |    586 |    206 |    17 |    0 |    24 |   12 |    1 |    13 |    0 |    124 |    0 |    0 |    0 |    0 |    417 |    566 |     105 |      20 |      19 |      10 |     20 |      9 |      3 |      7 |      4 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      6 |      3 |      3 |      2 |      2 |      0 |      0 |      0 |       6 |       0 |       1 |       0 |     11 |      4 |      2 |      0 |      193 |       29 |        6 |        1 |        1 |        0 |       0 |      330 |       20 |        2 |        1 |        2 |        1 |       0 |       76 |       17 |        3 |        0 |        0 |        1 |       1 |       98 |        6 |        2 |        1 |        0 |        1 |       0 |       40 |        9 |        1 |        1 |        1 |        0 |       0 |       66 |        5 |        1 |        0 |        0 |        0 |       0 |       26 |        9 |        0 |        1 |        0 |        1 |       0 |       26 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      1 |     36 |      7 |      0 |      1 |      0 |    541 |      0 |      0 |      5 |     28 |      5 |      0 |      0 |      0 |    168 |      0 |      0 |      0 |     10 |      2 |      0 |      0 |      0 |    112 |      0 |      0 |      0 |      8 |      3 |      0 |      0 |      0 |     56 |      0 |     37 | s03      | R    |
| 2818000 |      10 |      4 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      5 |      5 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2821000 |     358 |    129 |    135 |     9 |    0 |     5 |    5 |    1 |     8 |    0 |     66 |    0 |    0 |    0 |    0 |    187 |    171 |      10 |       5 |       5 |       0 |     14 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      4 |      0 |      2 |      0 |      0 |      0 |       0 |       2 |       3 |       0 |      0 |      0 |      0 |      0 |        8 |        9 |       11 |       17 |        3 |        8 |       4 |        9 |        3 |       11 |       12 |        5 |       17 |      12 |        7 |       15 |        7 |       11 |        6 |       11 |      10 |       10 |        3 |        7 |       10 |       11 |       10 |      17 |       12 |        7 |        6 |        3 |        5 |        6 |       1 |        9 |        8 |        1 |        4 |        1 |        3 |       0 |        7 |        5 |        0 |        4 |        3 |        1 |       0 |        3 |        1 |        0 |        3 |        0 |        1 |       0 |      0 |      0 |      9 |     15 |      4 |      4 |      3 |     94 |      0 |      0 |      0 |     16 |     16 |      4 |      3 |      2 |     94 |      0 |      0 |      0 |      5 |      5 |      3 |      0 |      2 |     51 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      1 |     20 |      0 |     37 | s03      | R    |
| 2822000 |     412 |    199 |    126 |     9 |    0 |     6 |    3 |    3 |     7 |    0 |     59 |    0 |    0 |    0 |    0 |    204 |    208 |      37 |      10 |       2 |       3 |      8 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |       3 |       5 |       1 |       0 |      0 |      2 |      1 |      0 |        5 |       15 |       17 |       14 |       16 |       10 |       8 |       12 |       25 |       24 |       19 |       12 |       12 |      10 |        6 |       14 |       10 |       16 |       11 |       10 |       3 |        6 |        9 |        8 |        7 |        9 |       11 |       6 |        7 |       12 |        1 |        7 |        2 |        2 |       1 |        8 |        9 |        6 |        4 |        0 |        0 |       0 |        3 |        5 |        4 |        2 |        3 |        0 |       0 |        3 |        2 |        1 |        2 |        3 |        0 |       0 |      0 |      2 |     30 |     24 |      7 |      2 |      7 |    127 |      0 |      0 |      2 |     27 |     10 |      6 |      2 |      4 |     75 |      0 |      0 |      0 |      7 |      3 |      2 |      0 |      3 |     44 |      0 |      0 |      1 |      1 |      7 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 2824000 |     347 |    158 |    107 |    12 |    0 |    14 |    1 |    4 |     4 |    0 |     47 |    0 |    0 |    0 |    0 |    174 |    173 |      14 |       8 |       4 |       3 |      7 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       1 |       0 |      1 |      0 |      0 |      0 |        2 |        9 |       22 |       19 |       14 |        5 |       5 |        3 |        8 |       19 |       27 |        8 |       12 |       5 |        6 |        6 |       13 |       13 |        2 |       12 |       8 |        1 |        3 |       12 |        9 |        5 |       13 |       4 |        4 |        4 |        2 |        4 |        4 |        1 |       0 |        2 |        9 |        5 |        6 |        1 |        3 |       2 |        3 |        3 |        7 |        2 |        1 |        3 |       0 |        2 |        5 |        2 |        4 |        1 |        2 |       0 |      0 |      0 |      8 |     31 |      6 |      3 |      7 |    103 |      0 |      0 |      0 |      9 |     12 |      5 |      4 |      7 |     70 |      0 |      0 |      1 |      8 |      8 |      2 |      0 |      1 |     27 |      0 |      0 |      0 |      7 |     13 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 2824100 |     335 |    126 |    105 |     8 |    0 |     6 |    3 |    0 |     5 |    0 |     82 |    0 |    0 |    0 |    0 |    178 |    157 |      19 |      10 |      10 |       1 |     14 |      4 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      2 |      3 |      0 |      1 |       0 |       1 |       0 |       1 |      0 |      0 |      1 |      0 |       23 |       12 |        9 |        4 |        6 |        1 |       1 |       22 |       16 |       12 |        8 |        6 |        4 |       2 |       26 |       15 |        5 |        4 |        4 |        6 |       0 |       20 |        9 |        7 |        1 |        0 |        5 |       3 |       28 |        8 |        7 |        5 |        0 |        3 |       0 |       16 |        9 |        1 |        3 |        1 |        0 |       1 |        5 |        4 |        2 |        0 |        0 |        0 |       0 |        4 |        5 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |      7 |      5 |      6 |      1 |      0 |    106 |      0 |      0 |      1 |      8 |      5 |      2 |      0 |      0 |     89 |      0 |      0 |      2 |      4 |      4 |      0 |      1 |      1 |     70 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 2825000 |     501 |    193 |    175 |    13 |    0 |    10 |    5 |    3 |     8 |    0 |     94 |    0 |    0 |    0 |    0 |    246 |    255 |      14 |       7 |       9 |       2 |     30 |     23 |     10 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      2 |      2 |      1 |      1 |       0 |       3 |       0 |       2 |      0 |      2 |      1 |      0 |       23 |       13 |       13 |        8 |        9 |        9 |      10 |       23 |       15 |       11 |       22 |       11 |       15 |      11 |       22 |       24 |       12 |       13 |        5 |        6 |       8 |       20 |       17 |        8 |        7 |        8 |       15 |      10 |       21 |       10 |        5 |        8 |        1 |        3 |       0 |       24 |        7 |        6 |        3 |        4 |        2 |       0 |        6 |        3 |        7 |        3 |        1 |        3 |       0 |        3 |        4 |        2 |        3 |        0 |        4 |       0 |      0 |      0 |     21 |     15 |      7 |      1 |      6 |    143 |      0 |      0 |      1 |     14 |      7 |      4 |      1 |      7 |    141 |      0 |      0 |      1 |      5 |      7 |      3 |      0 |      0 |     78 |      0 |      0 |      0 |      4 |      6 |      0 |      2 |      2 |     25 |      0 |     37 | s03      | R    |
| 2826000 |     969 |    510 |    204 |    13 |    0 |    66 |    4 |    2 |    13 |    0 |    157 |    0 |    0 |    0 |    0 |    318 |    651 |      71 |      23 |      15 |      14 |     30 |      9 |     13 |      4 |      1 |      2 |      3 |      0 |      6 |      2 |      0 |      2 |      9 |      3 |      3 |      1 |      1 |      0 |      0 |      1 |       5 |       3 |       1 |       1 |      4 |      4 |      3 |      1 |      154 |        4 |        0 |        0 |        0 |        0 |       0 |      343 |        7 |        0 |        0 |        0 |        1 |       1 |       68 |        5 |        0 |        0 |        0 |        0 |       0 |      127 |        4 |        0 |        0 |        0 |        0 |       0 |       45 |        6 |        1 |        0 |        1 |        0 |       0 |       97 |        4 |        2 |        0 |        0 |        1 |       0 |       32 |        1 |        1 |        0 |        0 |        0 |       0 |       60 |        4 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      7 |      2 |      0 |      0 |      0 |    500 |      0 |      0 |      2 |      6 |      2 |      0 |      0 |      0 |    194 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |    150 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     95 |      0 |     37 | s03      | R    |
| 2826100 |     286 |    113 |    126 |     0 |    0 |     3 |    2 |    0 |     3 |    0 |     39 |    0 |    0 |    0 |    0 |    152 |    134 |       8 |       1 |       3 |       0 |     11 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        7 |        9 |        8 |        6 |        4 |        8 |       3 |       11 |        9 |        9 |       13 |        4 |       15 |       7 |       14 |       14 |       12 |       12 |        7 |       12 |       3 |        7 |        7 |        7 |        4 |        4 |       13 |      10 |       10 |       11 |        4 |        0 |        2 |        1 |       0 |        5 |        4 |        0 |        0 |        0 |        2 |       0 |        2 |        0 |        0 |        3 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      1 |     19 |     12 |      5 |      4 |      4 |     68 |      0 |      0 |      0 |     14 |     16 |      4 |      3 |      4 |     85 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |     29 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 2827000 |     446 |    168 |    147 |    16 |    0 |     8 |    8 |    1 |     5 |    0 |     93 |    0 |    0 |    0 |    0 |    217 |    229 |      19 |      14 |       7 |       4 |     12 |      9 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      2 |      2 |      1 |      1 |      1 |      0 |      0 |       0 |       0 |       1 |       1 |      2 |      1 |      2 |      0 |       26 |       19 |        6 |       13 |        1 |        8 |       1 |       41 |       12 |       11 |        6 |        4 |       11 |       9 |       33 |       17 |       10 |        5 |        0 |        5 |       2 |       31 |       13 |        8 |        3 |        3 |        8 |       9 |       18 |       21 |        5 |        4 |        1 |        2 |       0 |       21 |       12 |        3 |        2 |        1 |        3 |       0 |        8 |        6 |        2 |        2 |        1 |        1 |       0 |        9 |        5 |        4 |        0 |        0 |        0 |       0 |      0 |      0 |     10 |     10 |      5 |      3 |      7 |    133 |      0 |      0 |      2 |     18 |      8 |      5 |      1 |      1 |    112 |      0 |      0 |      1 |     15 |      7 |      1 |      0 |      0 |     69 |      0 |      0 |      1 |      2 |      2 |      1 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 2830000 |     740 |    327 |    244 |    11 |    0 |     9 |    6 |    2 |    12 |    0 |    129 |    0 |    0 |    0 |    0 |    420 |    320 |      51 |      28 |      11 |       6 |     22 |     11 |      8 |      0 |      2 |      1 |      1 |      0 |      1 |      1 |      1 |      0 |      5 |      2 |      2 |      0 |      2 |      2 |      0 |      0 |       1 |       1 |       1 |       0 |      1 |      1 |      1 |      0 |      100 |       38 |       13 |        8 |        4 |        7 |       0 |      101 |       21 |        5 |        9 |        6 |       11 |       4 |       80 |       40 |       14 |        5 |        2 |        6 |       4 |       57 |       20 |        3 |        4 |        2 |        2 |       5 |       41 |       21 |        3 |        5 |        2 |        0 |       0 |       38 |       13 |        1 |        3 |        1 |        0 |       1 |       17 |        7 |        1 |        1 |        0 |        1 |       0 |        9 |        3 |        0 |        0 |        1 |        0 |       0 |      0 |      2 |      9 |     10 |      1 |      1 |      1 |    303 |      0 |      0 |      1 |     14 |      7 |      4 |      0 |      0 |    218 |      0 |      0 |      2 |      4 |      2 |      1 |      0 |      0 |    120 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 2830100 |      93 |     43 |     27 |     4 |    0 |     1 |    0 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     32 |     61 |       8 |       1 |       3 |       0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      3 |      0 |        2 |        6 |        0 |        0 |        1 |        2 |       0 |        2 |        2 |        6 |        3 |        1 |       17 |       1 |        0 |        3 |        1 |        0 |        1 |        3 |       0 |        2 |        5 |        3 |        0 |        0 |        9 |       0 |        2 |        5 |        2 |        0 |        1 |        1 |       0 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     10 |      3 |      0 |      1 |      0 |     28 |      0 |      0 |      0 |      8 |      2 |      0 |      1 |      0 |     16 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 2832000 |     218 |     74 |     76 |     4 |    0 |     1 |    4 |    1 |     4 |    0 |     54 |    0 |    0 |    0 |    0 |    112 |    106 |       6 |       3 |       3 |       3 |      2 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        6 |        9 |        6 |        9 |        2 |        2 |       3 |        7 |        9 |        4 |        6 |        3 |        4 |       4 |        8 |       12 |        9 |        5 |        7 |        1 |       1 |        9 |        8 |        3 |        5 |        3 |        2 |       3 |        5 |       11 |        6 |        1 |        1 |        0 |       0 |       13 |        7 |        5 |        4 |        0 |        0 |       1 |        3 |        3 |        0 |        1 |        1 |        0 |       0 |        6 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      4 |      4 |      2 |      1 |      0 |     61 |      0 |      0 |      1 |      9 |     10 |      2 |      1 |      0 |     53 |      0 |      0 |      0 |      7 |      3 |      1 |      0 |      0 |     43 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2833000 |     320 |    131 |    122 |     6 |    0 |     2 |    0 |    5 |     5 |    0 |     49 |    0 |    0 |    0 |    0 |    140 |    180 |      16 |       7 |       5 |       2 |      4 |      7 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       6 |       1 |       1 |      1 |      0 |      0 |      0 |        3 |        3 |        6 |       14 |        5 |       11 |       8 |       12 |        9 |       19 |       13 |        7 |       10 |      11 |       12 |       10 |        9 |       15 |        3 |        4 |       3 |        8 |        5 |       10 |        8 |        8 |       12 |      15 |        8 |        5 |        4 |        4 |        2 |        4 |       2 |        8 |        4 |        1 |        2 |        2 |        3 |       0 |        0 |        3 |        0 |        2 |        0 |        0 |       0 |        3 |        6 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |     14 |     20 |      3 |      1 |      3 |     90 |      0 |      0 |      2 |     15 |      9 |      2 |      4 |      1 |     89 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      2 |     40 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 2834000 |     362 |    149 |    132 |     8 |    0 |     5 |    3 |    0 |     6 |    0 |     59 |    0 |    0 |    0 |    0 |    189 |    173 |       9 |      11 |       4 |       0 |     13 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      2 |      2 |      0 |      1 |      1 |      1 |      0 |       4 |       0 |       2 |       0 |      2 |      2 |      1 |      0 |       47 |        5 |        3 |        4 |        2 |        7 |       2 |       46 |       11 |        5 |        4 |        4 |        6 |       3 |       38 |       15 |        5 |        2 |        0 |        3 |       3 |       46 |        3 |        2 |        3 |        2 |        4 |       6 |       22 |        6 |        4 |        2 |        0 |        2 |       0 |       13 |        3 |        2 |        1 |        2 |        2 |       0 |        8 |        5 |        3 |        0 |        0 |        1 |       0 |        4 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      8 |      6 |      1 |      1 |      3 |    129 |      0 |      0 |      2 |      7 |      6 |      0 |      0 |      1 |    116 |      0 |      0 |      2 |      3 |      3 |      0 |      0 |      0 |     51 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      1 |     15 |      0 |     37 | s03      | R    |
| 2834100 |     109 |     44 |     37 |     1 |    0 |     0 |    2 |    1 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     48 |     61 |       3 |       4 |       7 |       1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        8 |        1 |        1 |        0 |        1 |        3 |       0 |        8 |        6 |        2 |        6 |        3 |        5 |       0 |        2 |        7 |        2 |        2 |        1 |        4 |       0 |        5 |        3 |        2 |        1 |        1 |        7 |       0 |        5 |        6 |        3 |        1 |        0 |        0 |       0 |        6 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |      2 |      3 |      5 |      0 |      2 |     31 |      0 |      0 |      0 |      6 |      0 |      2 |      3 |      0 |     26 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |     20 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2837000 |     576 |    249 |    183 |    11 |    0 |     4 |    6 |    1 |    11 |    0 |    111 |    0 |    0 |    0 |    0 |    270 |    306 |      37 |      13 |      16 |      10 |     25 |      9 |      7 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       1 |      3 |      2 |      2 |      0 |       28 |       26 |        7 |       14 |        5 |        7 |       5 |       49 |       29 |       13 |       19 |       18 |       18 |      11 |       25 |       31 |       18 |        7 |        5 |       11 |       8 |       25 |       12 |       11 |        1 |       10 |        7 |      12 |       19 |       18 |        9 |        5 |        2 |        2 |       1 |       25 |       11 |        7 |        7 |        1 |        4 |       0 |        5 |        7 |        2 |        1 |        1 |        1 |       0 |        9 |        1 |        1 |        4 |        1 |        0 |       0 |      0 |      1 |     26 |     18 |     15 |      2 |      4 |    183 |      0 |      0 |      0 |     16 |     13 |      7 |      1 |      3 |    143 |      0 |      0 |      0 |     20 |      7 |      2 |      0 |      0 |     82 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 2838000 |     120 |     44 |     38 |     3 |    0 |     1 |    0 |    0 |     3 |    0 |     31 |    0 |    0 |    0 |    0 |     53 |     67 |       6 |       4 |       5 |       2 |      2 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        3 |        1 |        4 |        1 |        0 |       0 |       17 |        7 |        4 |        1 |        0 |        2 |       0 |        9 |        8 |        0 |        1 |        1 |        0 |       0 |       15 |        3 |        0 |        1 |        0 |        0 |       0 |        8 |        3 |        3 |        1 |        1 |        0 |       0 |        9 |        5 |        0 |        1 |        0 |        0 |       0 |        4 |        1 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |     40 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     36 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2840000 |     469 |    206 |    145 |     9 |    0 |     6 |    4 |    2 |     8 |    0 |     89 |    0 |    0 |    0 |    0 |    219 |    250 |      23 |      17 |      12 |       2 |     11 |      5 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       4 |       0 |      5 |      1 |      0 |      1 |        6 |       15 |       21 |       17 |       18 |        7 |       5 |        6 |       15 |       23 |       28 |       20 |       14 |      11 |        3 |        9 |       21 |       16 |        8 |        8 |       2 |        6 |       16 |       17 |       14 |        7 |        9 |       9 |        5 |       10 |       19 |        7 |        2 |        1 |       1 |       10 |       14 |       10 |        6 |        4 |        0 |       0 |        4 |       10 |        2 |        1 |        0 |        1 |       0 |        1 |        4 |        4 |        0 |        2 |        0 |       0 |      0 |      0 |     30 |     27 |     12 |     10 |      8 |    119 |      0 |      0 |      1 |     24 |     24 |      3 |      2 |      6 |     85 |      0 |      0 |      0 |     19 |     13 |      5 |      0 |      0 |     52 |      0 |      0 |      0 |      4 |      8 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 2841000 |      33 |      9 |     14 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     16 |     17 |       1 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      1 |      0 |      0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        2 |        1 |        1 |       0 |        0 |        1 |        2 |        2 |        1 |        2 |       0 |        0 |        3 |        1 |        0 |        1 |        0 |       1 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 2842000 |     363 |    145 |    106 |    11 |    0 |     4 |    5 |    5 |     5 |    0 |     82 |    0 |    0 |    0 |    0 |    181 |    182 |      32 |       8 |      11 |       5 |      4 |      5 |      3 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |       1 |       3 |       2 |       0 |      0 |      1 |      0 |      0 |        9 |       16 |       17 |       11 |        8 |        4 |       3 |       12 |       22 |       10 |       15 |        4 |       11 |       3 |        9 |       13 |       12 |       10 |        9 |        5 |       2 |        9 |        6 |        8 |       10 |        5 |        6 |       2 |       11 |       15 |        7 |        5 |        1 |        1 |       0 |       15 |       10 |        9 |        4 |        4 |        0 |       0 |        3 |        4 |        1 |        2 |        1 |        1 |       1 |        4 |        8 |        1 |        1 |        2 |        1 |       0 |      0 |      2 |     19 |     17 |      3 |      0 |      3 |    101 |      0 |      0 |      1 |     23 |     13 |      3 |      3 |      0 |     63 |      0 |      0 |      2 |      8 |      7 |      0 |      0 |      2 |     63 |      0 |      0 |      2 |      5 |      7 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2843000 |     355 |    111 |    145 |    11 |    0 |    10 |    3 |    2 |     5 |    0 |     68 |    0 |    0 |    0 |    0 |    153 |    202 |      15 |      17 |       7 |       2 |     10 |      7 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        4 |       15 |        1 |        8 |        1 |        6 |       4 |       10 |       16 |       11 |       15 |        5 |       11 |       4 |       13 |       18 |       10 |        8 |        5 |        8 |       3 |       13 |       14 |       12 |       16 |        8 |       15 |       2 |        9 |        8 |        6 |        5 |        0 |        3 |       0 |        9 |       10 |        4 |        3 |        5 |        6 |       0 |        4 |        6 |        5 |        2 |        0 |        1 |       0 |        2 |        5 |        3 |        0 |        1 |        2 |       0 |      0 |      0 |     13 |     13 |      5 |      1 |      2 |     77 |      0 |      0 |      2 |     24 |     18 |      2 |      2 |      3 |     94 |      0 |      0 |      0 |      6 |      9 |      0 |      0 |      0 |     53 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2843100 |       9 |      5 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2843200 |      13 |      6 |      4 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |      7 |      6 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2900100 |     433 |    191 |    116 |    14 |    0 |     8 |    2 |   10 |     3 |    0 |     89 |    0 |    0 |    0 |    0 |    209 |    224 |      41 |      36 |      17 |       8 |      6 |      1 |      1 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |      0 |      1 |      0 |      15 |      21 |       9 |       2 |      0 |      2 |      2 |      0 |       14 |       22 |       16 |       20 |       12 |        3 |       1 |       15 |       33 |       15 |       21 |        8 |        9 |       2 |        8 |       13 |       16 |       10 |        7 |        7 |       0 |       18 |       14 |        7 |        1 |        5 |        7 |       3 |       10 |        6 |       13 |        6 |        1 |        1 |       0 |       11 |       11 |       13 |       13 |        3 |        1 |       0 |        4 |        6 |        7 |        3 |        1 |        1 |       1 |        3 |        3 |        3 |        3 |        1 |        0 |       1 |      0 |      3 |     33 |     22 |      2 |      2 |      0 |    129 |      0 |      0 |      1 |     13 |      7 |      1 |      0 |      2 |     92 |      0 |      0 |      1 |     17 |      4 |      1 |      1 |      0 |     65 |      0 |      0 |      1 |      6 |      8 |      1 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 2902000 |     423 |    214 |     95 |    17 |    0 |     7 |    1 |    6 |     0 |    0 |     83 |    0 |    0 |    0 |    0 |    213 |    210 |      67 |      20 |      22 |       7 |      2 |      3 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      3 |      1 |      2 |      3 |      1 |      1 |      1 |      24 |      18 |      15 |       4 |      1 |      1 |      0 |      0 |        6 |       21 |       29 |       20 |       14 |       14 |       1 |       17 |       26 |       15 |       24 |       16 |       10 |       1 |        5 |        8 |        8 |        9 |        7 |        8 |       0 |        7 |       19 |        6 |        6 |        6 |        4 |       2 |        9 |       14 |        5 |        7 |        6 |        4 |       0 |        9 |       10 |        8 |        6 |        4 |        1 |       0 |        6 |        6 |        1 |        2 |        1 |        2 |       0 |        2 |        5 |        2 |        3 |        1 |        0 |       0 |      0 |      1 |     35 |     25 |      2 |      1 |      4 |    146 |      0 |      0 |      0 |     12 |      8 |      1 |      2 |      0 |     72 |      0 |      0 |      0 |     16 |      8 |      0 |      1 |      0 |     58 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 2904100 |     412 |    199 |    103 |    11 |    0 |     7 |    2 |    4 |     1 |    0 |     85 |    0 |    0 |    0 |    0 |    203 |    209 |      53 |      15 |      20 |       5 |      3 |      7 |      2 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      4 |      2 |      1 |      1 |      0 |      1 |      0 |      10 |      10 |       4 |       3 |      1 |      0 |      0 |      1 |       12 |       20 |       28 |       16 |        6 |       14 |       4 |       17 |       27 |       16 |       14 |        3 |       19 |       3 |        6 |       12 |       12 |       12 |        4 |        5 |       2 |       17 |        9 |        4 |        6 |        3 |       10 |       1 |        5 |       10 |        8 |       10 |        4 |        3 |       0 |       13 |       10 |        9 |        5 |        0 |        8 |       0 |        3 |        2 |        2 |        2 |        1 |        0 |       0 |        3 |        5 |        3 |        3 |        0 |        1 |       0 |      0 |      3 |     30 |     24 |      4 |      2 |      1 |    135 |      0 |      0 |      4 |      9 |      9 |      3 |      2 |      1 |     75 |      0 |      0 |      4 |     11 |      5 |      2 |      0 |      0 |     63 |      0 |      0 |      1 |      8 |      2 |      0 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 2906000 |     197 |     97 |     39 |     2 |    0 |     5 |    1 |    1 |     2 |    0 |     50 |    0 |    0 |    0 |    0 |     92 |    105 |      41 |      13 |      14 |       2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       5 |       3 |       3 |       0 |      0 |      0 |      0 |      0 |        4 |       10 |       15 |        4 |        5 |        2 |       1 |        8 |       16 |       10 |       13 |        4 |        3 |       2 |        2 |        5 |        3 |        5 |        1 |        3 |       1 |        1 |        6 |        4 |        4 |        2 |        0 |       2 |        3 |        5 |        9 |        6 |        2 |        2 |       0 |        3 |        7 |        6 |        5 |        0 |        1 |       1 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        4 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     13 |      3 |      1 |      1 |      4 |     75 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |     34 |      0 |      0 |      0 |     10 |      8 |      0 |      0 |      0 |     32 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 2906100 |     171 |     89 |     34 |     8 |    0 |     2 |    0 |    2 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |     88 |     83 |      34 |       9 |       8 |       2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       3 |       2 |       7 |       0 |      0 |      0 |      0 |      0 |        3 |       10 |       11 |       10 |        5 |        2 |       1 |        4 |       13 |       11 |        7 |        4 |        8 |       0 |        2 |        6 |        4 |        6 |        1 |        1 |       0 |        5 |        4 |        2 |        2 |        0 |        0 |       1 |        4 |        8 |        6 |        0 |        1 |        2 |       0 |        4 |        4 |        2 |        1 |        2 |        1 |       0 |        1 |        3 |        1 |        0 |        0 |        0 |       0 |        0 |        4 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |     19 |      8 |      3 |      2 |      1 |     56 |      0 |      0 |      0 |      5 |      9 |      3 |      2 |      0 |     15 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 2906200 |      29 |     13 |      6 |     1 |    0 |     2 |    1 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     15 |     14 |       3 |       0 |       2 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        1 |        1 |        1 |       0 |        1 |        1 |        4 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       1 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 2908000 |     239 |    117 |     53 |     4 |    0 |     3 |    5 |    2 |     6 |    0 |     49 |    0 |    0 |    0 |    0 |    103 |    136 |      19 |       4 |      12 |       4 |      1 |      4 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       5 |       5 |       5 |       1 |      0 |      1 |      0 |      1 |        3 |        7 |       12 |       12 |        5 |        5 |       4 |        6 |       12 |       13 |       15 |       10 |        6 |       7 |        1 |        0 |        8 |        5 |        2 |        3 |       1 |        2 |        5 |        7 |        7 |        6 |        4 |       2 |        4 |        3 |        7 |        2 |        6 |        2 |       0 |        5 |        7 |        6 |        1 |        4 |        2 |       0 |        1 |        3 |        3 |        2 |        2 |        0 |       0 |        1 |        2 |        3 |        3 |        0 |        0 |       0 |      0 |      1 |     14 |     15 |      5 |      4 |      4 |     74 |      0 |      0 |      0 |      3 |      7 |      4 |      3 |      0 |     36 |      0 |      0 |      1 |      6 |      3 |      2 |      2 |      0 |     35 |      0 |      0 |      0 |      5 |      4 |      0 |      2 |      1 |      8 |      0 |     37 | s03      | R    |
| 2908100 |     138 |     58 |     48 |     6 |    0 |     4 |    0 |    2 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     62 |     76 |       7 |       1 |       2 |       0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |       9 |      12 |       2 |       1 |      0 |      0 |      0 |      0 |        0 |        6 |        1 |        5 |        2 |        2 |       5 |        3 |        8 |        7 |        3 |        5 |        3 |       8 |        2 |        6 |        8 |        1 |        5 |        3 |       0 |        5 |        4 |        4 |        3 |        1 |        4 |       2 |        1 |        2 |        2 |        1 |        1 |        3 |       1 |        0 |        2 |        2 |        1 |        2 |        2 |       0 |        1 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        3 |        1 |        1 |        0 |        2 |       0 |      0 |      1 |      8 |      4 |      2 |      1 |      1 |     41 |      0 |      0 |      2 |      6 |      6 |      4 |      3 |      1 |     26 |      0 |      0 |      0 |      3 |      8 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 2910000 |     462 |    254 |    117 |    10 |    0 |     3 |    3 |    7 |     0 |    0 |     68 |    0 |    0 |    0 |    0 |    198 |    264 |      43 |      14 |      10 |       2 |      9 |      2 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |      19 |      17 |      17 |       4 |      0 |      0 |      1 |      0 |        4 |        7 |       10 |       21 |       16 |       30 |       7 |       10 |       16 |       18 |       24 |       13 |       63 |      15 |        2 |        5 |       15 |        8 |        7 |       13 |       8 |        3 |        6 |       12 |        6 |        8 |       15 |       9 |        6 |        5 |        7 |        5 |        6 |        5 |       0 |       11 |        7 |        4 |        7 |        3 |        2 |       0 |        3 |        3 |        2 |        1 |        1 |        1 |       0 |        2 |        3 |        0 |        2 |        1 |        3 |       1 |      0 |      2 |     39 |     42 |     14 |     11 |      7 |    139 |      0 |      0 |      1 |     10 |     17 |      4 |      5 |      9 |     71 |      0 |      0 |      2 |      8 |      3 |      3 |      4 |      1 |     47 |      0 |      0 |      0 |      3 |      8 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2912000 |     454 |    247 |    117 |     9 |    0 |     4 |    3 |   10 |     4 |    0 |     60 |    0 |    0 |    0 |    0 |    210 |    244 |      35 |      13 |      15 |       7 |     15 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      1 |      1 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      13 |      27 |      13 |       6 |      0 |      0 |      0 |      0 |        1 |       17 |       17 |       29 |       12 |       12 |       9 |       13 |       19 |       23 |       36 |       24 |       17 |      18 |        6 |       14 |       14 |       10 |       10 |       10 |       3 |        1 |       10 |       12 |        8 |       10 |        4 |       5 |        6 |       10 |        5 |        9 |        2 |        1 |       0 |       12 |        5 |        3 |        5 |        1 |        1 |       0 |        4 |        1 |        1 |        3 |        3 |        1 |       0 |        1 |        7 |        1 |        5 |        3 |        0 |       0 |      0 |      1 |     34 |     39 |      9 |     11 |      5 |    148 |      0 |      0 |      1 |     15 |     16 |      7 |      1 |      0 |     77 |      0 |      0 |      2 |      8 |      4 |      1 |      0 |      1 |     44 |      0 |      0 |      0 |      1 |     13 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 2913000 |     277 |    143 |     70 |     7 |    0 |     0 |    2 |    2 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |    133 |    144 |      20 |       8 |       6 |       2 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      15 |      19 |      11 |       1 |      4 |      2 |      1 |      0 |        6 |        7 |        9 |       17 |       10 |       11 |       5 |        6 |        8 |       17 |       18 |       16 |        6 |       7 |        4 |        2 |        4 |       14 |        8 |        1 |       2 |        1 |        8 |        9 |        8 |        4 |        3 |       2 |        6 |        5 |        5 |        5 |        3 |        0 |       0 |        3 |       10 |        2 |        7 |        4 |        0 |       1 |        2 |        4 |        2 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |     15 |     26 |      7 |      0 |      8 |     87 |      0 |      0 |      0 |      7 |     15 |      5 |      4 |      2 |     37 |      0 |      0 |      1 |      6 |      6 |      1 |      0 |      2 |     35 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2913500 |     134 |     81 |     27 |     2 |    0 |     0 |    0 |    1 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     62 |     72 |      10 |       5 |       0 |       0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      11 |       6 |      11 |       1 |      2 |      0 |      1 |      0 |        9 |        4 |        6 |        1 |        6 |        7 |       0 |        3 |        8 |       11 |        7 |       10 |        9 |       0 |        2 |        1 |        3 |        3 |        2 |        3 |       0 |        2 |        3 |        2 |        5 |        0 |        1 |       0 |        6 |        1 |        4 |        2 |        1 |        1 |       0 |        3 |        3 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      5 |      9 |     10 |      6 |      1 |      2 |     48 |      0 |      0 |      1 |      3 |      3 |      2 |      2 |      0 |     16 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 2914000 |     326 |    150 |     92 |     6 |    0 |     4 |    1 |    5 |     3 |    0 |     65 |    0 |    0 |    0 |    0 |    151 |    175 |      39 |       8 |      17 |       6 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |       4 |      10 |       8 |       1 |      1 |      0 |      0 |      0 |        5 |        5 |       18 |       17 |        5 |        7 |       7 |        6 |       13 |       15 |       26 |        7 |        9 |      10 |        3 |        9 |        7 |       12 |        2 |       10 |       2 |        1 |        9 |        5 |       13 |        5 |        7 |       7 |        5 |        9 |        7 |        5 |        2 |        4 |       0 |        8 |        9 |        3 |        9 |        1 |        3 |       0 |        2 |        2 |        3 |        3 |        0 |        0 |       0 |        1 |        2 |        5 |        1 |        0 |        0 |       0 |      0 |      0 |     19 |     25 |     10 |      2 |      5 |     89 |      0 |      0 |      2 |      7 |     15 |      3 |      3 |      3 |     59 |      0 |      0 |      1 |      8 |      7 |      5 |      0 |      1 |     43 |      0 |      0 |      0 |      2 |      9 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 2916000 |     448 |    241 |    126 |    15 |    0 |     7 |    1 |    7 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    214 |    234 |      62 |       7 |      18 |       7 |      7 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |       8 |       2 |       3 |      0 |      1 |      1 |      0 |        5 |       11 |       17 |       21 |       17 |       22 |      13 |       11 |       12 |       24 |       30 |       17 |       29 |      12 |        6 |        9 |       12 |       15 |        6 |       12 |       7 |        7 |        9 |        7 |       11 |        4 |       15 |       6 |        3 |        9 |        4 |        4 |        3 |        2 |       0 |        7 |        6 |        6 |        3 |        1 |        1 |       0 |        2 |        7 |        3 |        1 |        2 |        1 |       0 |        1 |        5 |        4 |        1 |        3 |        2 |       0 |      0 |      1 |     25 |     31 |     15 |      9 |     10 |    150 |      0 |      0 |      0 |      8 |     10 |      6 |      2 |      1 |     99 |      0 |      0 |      0 |      8 |      5 |      3 |      3 |      3 |     27 |      0 |      0 |      0 |      5 |     10 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 2916500 |     451 |    259 |    105 |     6 |    0 |     5 |    1 |    8 |     2 |    0 |     65 |    0 |    0 |    0 |    0 |    201 |    250 |      52 |      25 |      20 |       4 |      4 |      6 |      2 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      1 |      4 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      2 |      0 |       12 |       28 |       27 |       15 |       12 |        8 |       0 |       24 |       34 |       28 |       23 |       18 |       27 |       3 |       13 |       20 |        4 |       13 |        2 |        4 |       0 |       14 |       13 |        9 |        8 |        4 |        1 |       0 |        6 |       12 |       11 |        6 |        0 |        0 |       0 |        8 |        8 |        7 |        3 |        3 |        1 |       0 |        0 |        2 |        2 |        4 |        0 |        0 |       0 |        1 |        7 |        1 |        3 |        0 |        2 |       0 |      0 |      3 |     36 |     22 |      3 |      8 |      2 |    185 |      0 |      0 |      3 |     20 |      4 |      3 |      1 |      1 |     73 |      0 |      0 |      2 |      9 |      3 |      0 |      0 |      0 |     51 |      0 |      0 |      1 |      3 |      9 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 2917500 |     329 |    163 |    109 |    11 |    0 |     2 |    2 |    1 |     1 |    0 |     40 |    0 |    0 |    0 |    0 |    141 |    188 |      25 |       7 |       3 |       2 |      3 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       2 |       0 |      0 |      1 |      0 |      0 |        2 |        1 |        5 |        8 |       13 |       37 |       1 |        1 |        0 |       11 |       12 |       28 |       41 |       3 |        2 |        3 |        9 |        3 |        7 |       16 |       4 |        3 |        4 |        6 |        7 |       13 |       28 |       4 |        4 |        2 |        1 |        7 |        2 |        5 |       0 |        3 |        0 |        2 |        3 |        4 |        6 |       1 |        0 |        2 |        1 |        2 |        2 |        2 |       0 |        0 |        0 |        0 |        1 |        3 |        4 |       0 |      0 |      0 |     15 |     29 |     15 |      7 |      3 |     94 |      0 |      0 |      0 |     16 |     10 |      3 |      5 |      7 |     68 |      0 |      0 |      0 |      2 |      7 |      2 |      0 |      0 |     29 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 2918000 |     592 |    372 |    125 |     7 |    0 |     6 |    0 |    7 |     7 |    0 |     68 |    0 |    0 |    0 |    0 |    263 |    329 |      44 |      18 |       7 |       3 |      1 |      3 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      1 |      1 |      0 |      7 |     10 |      3 |      0 |      0 |      0 |      0 |      0 |       5 |      17 |      11 |       2 |      1 |      0 |      0 |      0 |       11 |        9 |       24 |       24 |       14 |       40 |      25 |       10 |       14 |       32 |       35 |       34 |       63 |      37 |        7 |        8 |        8 |       11 |       13 |       18 |       5 |        2 |        8 |        9 |        7 |        4 |       14 |      11 |        4 |        7 |        6 |        2 |        4 |        7 |       1 |        9 |        7 |        6 |        4 |        6 |        5 |       0 |        3 |        2 |        0 |        3 |        3 |        4 |       0 |        0 |        2 |        5 |        2 |        3 |        0 |       0 |      0 |      3 |     32 |     53 |     17 |     18 |     13 |    236 |      0 |      0 |      0 |     15 |     26 |      4 |      4 |      0 |     76 |      0 |      0 |      1 |     14 |     13 |      1 |      1 |      0 |     38 |      0 |      0 |      0 |      4 |     10 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2918100 |     184 |     77 |     46 |     5 |    0 |     2 |    1 |    2 |     1 |    0 |     50 |    0 |    0 |    0 |    0 |     77 |    107 |      14 |      11 |       9 |       1 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |       10 |        6 |        7 |        2 |        5 |        1 |       0 |       14 |        8 |       10 |        8 |        4 |        2 |       0 |       16 |        8 |        2 |        1 |        0 |        0 |       0 |        9 |        5 |        3 |        1 |        1 |        0 |       0 |        8 |        3 |        1 |        3 |        1 |        0 |       0 |       20 |        7 |        4 |        1 |        2 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        5 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     10 |      7 |      1 |      0 |      2 |     57 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |     42 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |     46 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 2920000 |     297 |    140 |     94 |     5 |    0 |     2 |    0 |    1 |     2 |    0 |     53 |    0 |    0 |    0 |    0 |    155 |    142 |      24 |      11 |      11 |       1 |      6 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      2 |      1 |      0 |      0 |      16 |      24 |      15 |       3 |      0 |      0 |      0 |      0 |        2 |       11 |        8 |       15 |       11 |       11 |       5 |        4 |       10 |       21 |        8 |       11 |       12 |      11 |        2 |        8 |       12 |       10 |       12 |        7 |       3 |        3 |        7 |        3 |       11 |        5 |        8 |       3 |        6 |        4 |       10 |        5 |        2 |        1 |       1 |        7 |        5 |        3 |        7 |        2 |        0 |       0 |        0 |        2 |        3 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |     19 |     19 |      5 |      2 |      7 |     87 |      0 |      0 |      1 |     11 |     16 |      2 |      2 |      5 |     57 |      0 |      0 |      0 |      9 |      3 |      3 |      2 |      1 |     35 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2922000 |     419 |    204 |    117 |    10 |    0 |     2 |    2 |    1 |     3 |    0 |     80 |    0 |    0 |    0 |    0 |    202 |    217 |      40 |      21 |      15 |       3 |      9 |      4 |      1 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      4 |      5 |      1 |      2 |      0 |      1 |      0 |       7 |      10 |      11 |       0 |      5 |      2 |      1 |      0 |        8 |       15 |       10 |       12 |       13 |       19 |       5 |       12 |       27 |       15 |       32 |       13 |       16 |       7 |        9 |       14 |        9 |       18 |       10 |        7 |       1 |        9 |        6 |       12 |        8 |        7 |        5 |       2 |       10 |       14 |       11 |        3 |        3 |        2 |       0 |        6 |       11 |        8 |        7 |        4 |        1 |       0 |        2 |        2 |        3 |        2 |        0 |        0 |       0 |        1 |        0 |        5 |        1 |        1 |        1 |       0 |      0 |      0 |     23 |     32 |      4 |      3 |      5 |    137 |      0 |      0 |      2 |     14 |     18 |      5 |      0 |      4 |     74 |      0 |      0 |      0 |      4 |      8 |      0 |      1 |      3 |     64 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 2922100 |      32 |     13 |     10 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     20 |     12 |       2 |       3 |       1 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       2 |       0 |      0 |      1 |      0 |      0 |        2 |        2 |        0 |        0 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        3 |       0 |        0 |        2 |        2 |        1 |        1 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        2 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      8 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2922200 |      51 |     29 |      9 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     30 |     21 |       3 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       3 |       4 |       6 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        4 |        2 |        4 |        4 |       1 |        2 |        1 |        1 |        1 |        3 |        3 |       1 |        2 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        1 |        1 |        3 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      2 |      2 |      4 |      2 |     15 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 2924000 |     273 |    152 |     60 |     6 |    0 |     2 |    2 |    3 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    132 |    141 |      31 |       9 |       9 |       3 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      6 |      1 |      2 |      0 |       9 |       4 |       5 |       1 |      1 |      0 |      0 |      0 |       12 |       13 |       22 |       11 |        6 |        8 |       1 |       13 |       17 |       12 |       19 |       10 |        4 |       4 |        4 |        7 |        3 |       14 |        3 |        3 |       0 |        4 |        7 |        4 |        3 |        4 |        4 |       0 |        5 |        6 |        4 |        3 |        1 |        1 |       0 |       10 |        8 |        3 |        5 |        1 |        0 |       0 |        2 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        5 |        2 |        0 |        0 |       0 |      0 |      0 |     17 |     22 |      3 |      1 |      3 |    106 |      0 |      0 |      1 |      8 |      2 |      2 |      0 |      2 |     45 |      0 |      0 |      0 |     10 |      0 |      1 |      1 |      0 |     35 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 2924100 |     151 |     69 |     37 |     6 |    0 |     3 |    3 |    1 |     1 |    0 |     31 |    0 |    0 |    0 |    0 |     87 |     64 |      12 |       9 |       4 |       2 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      2 |      3 |      0 |       0 |       3 |       0 |       0 |      3 |      0 |      1 |      0 |        9 |       10 |       11 |        5 |        3 |        5 |       1 |        2 |        8 |        2 |        6 |        4 |        3 |       0 |        4 |        6 |        3 |        1 |        1 |        3 |       0 |        3 |        5 |        6 |        1 |        2 |        2 |       0 |        5 |        4 |        5 |        3 |        0 |        1 |       0 |        2 |        5 |        4 |        2 |        0 |        0 |       0 |        1 |        2 |        1 |        1 |        1 |        1 |       0 |        1 |        3 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      9 |     13 |      2 |      1 |      1 |     43 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2926000 |     321 |    151 |     76 |    19 |    0 |     1 |    3 |    2 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    152 |    169 |      19 |      10 |      12 |       2 |      9 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      4 |      1 |      1 |      0 |      0 |      1 |      0 |       9 |       8 |       5 |       4 |      1 |      0 |      0 |      1 |        7 |        8 |       12 |       11 |        8 |       19 |       1 |       13 |       16 |        9 |       12 |       11 |       23 |       1 |        8 |       12 |        9 |        8 |        1 |        2 |       0 |        8 |        6 |        4 |        9 |        2 |        7 |       0 |        9 |        8 |        7 |        3 |        3 |        3 |       0 |       12 |       10 |        4 |        3 |        5 |        1 |       0 |        2 |        6 |        1 |        1 |        1 |        2 |       0 |        1 |        2 |        3 |        3 |        1 |        3 |       0 |      0 |      1 |     20 |     12 |      2 |      3 |      6 |    107 |      0 |      0 |      0 |      6 |      8 |      1 |      0 |      1 |     60 |      0 |      0 |      2 |      6 |      3 |      2 |      0 |      0 |     55 |      0 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 2928000 |     160 |     64 |     49 |     5 |    0 |     1 |    2 |    2 |     2 |    0 |     35 |    0 |    0 |    0 |    0 |     79 |     81 |      18 |       8 |      10 |       7 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      10 |      11 |       6 |       0 |      0 |      0 |      0 |      0 |        3 |       10 |        3 |        7 |        5 |        4 |       1 |        8 |        8 |        9 |        4 |        0 |        2 |       0 |        4 |        7 |        7 |        6 |        2 |        3 |       1 |        3 |        7 |        3 |        2 |        1 |        3 |       0 |        1 |        5 |        3 |        3 |        0 |        1 |       0 |       13 |        5 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        2 |        5 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     10 |      4 |      0 |      1 |      1 |     48 |      0 |      0 |      2 |      7 |      4 |      2 |      0 |      1 |     33 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |     31 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 2932000 |     685 |    305 |    186 |    19 |    0 |     8 |   11 |    3 |    16 |    0 |    137 |    0 |    0 |    0 |    0 |    344 |    341 |      70 |      19 |      21 |       6 |     11 |      9 |      2 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      3 |      1 |      1 |      1 |      1 |      1 |       2 |       1 |       2 |       0 |      3 |      2 |      0 |      2 |       24 |       42 |       25 |       21 |        9 |        8 |       6 |       39 |       52 |       18 |       23 |       13 |       15 |      10 |       12 |       35 |       19 |       14 |        8 |        8 |       3 |       26 |       22 |       12 |        9 |        5 |       10 |       3 |       23 |       24 |       13 |        6 |        5 |        2 |       1 |       22 |       20 |        8 |        9 |        4 |        0 |       0 |       11 |       14 |        6 |        2 |        2 |        1 |       0 |        5 |        6 |        6 |        3 |        1 |        0 |       0 |      0 |      3 |     33 |     17 |      6 |      6 |      5 |    235 |      0 |      0 |      0 |     16 |     17 |      4 |      5 |      3 |    141 |      0 |      0 |      4 |     19 |      5 |      4 |      1 |      0 |    104 |      0 |      0 |      0 |      9 |      4 |      0 |      0 |      0 |     44 |      0 |     37 | s03      | R    |
| 2934000 |     535 |    266 |    127 |    11 |    0 |     6 |    3 |    3 |     4 |    0 |    115 |    0 |    0 |    0 |    0 |    233 |    302 |      51 |      16 |      21 |       4 |     14 |      7 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      7 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      10 |       5 |       7 |       3 |      2 |      7 |      4 |      0 |       14 |       20 |       23 |       14 |        9 |       19 |       3 |       27 |       38 |       19 |       19 |       20 |       31 |      10 |       12 |       13 |       16 |        6 |        7 |       10 |       3 |       20 |       12 |        9 |        2 |        3 |       12 |       2 |       18 |       10 |        9 |        8 |        1 |        4 |       0 |       17 |       22 |       10 |        7 |        1 |        8 |       0 |        1 |        6 |        3 |        1 |        2 |        1 |       0 |        3 |        3 |        3 |        3 |        0 |        1 |       0 |      0 |      0 |     37 |     24 |      6 |      1 |      1 |    197 |      0 |      0 |      0 |     11 |      8 |      2 |      1 |      1 |    104 |      0 |      0 |      1 |      8 |      8 |      2 |      1 |      0 |     95 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 2936000 |     503 |    241 |    142 |    14 |    0 |     8 |    3 |    3 |     6 |    0 |     86 |    0 |    0 |    0 |    0 |    252 |    251 |      58 |      27 |      17 |       8 |      6 |      1 |      1 |      1 |      1 |      0 |      1 |      0 |      3 |      0 |      2 |      0 |     10 |      3 |      1 |      2 |      0 |      1 |      0 |      0 |       4 |      20 |      11 |       2 |      3 |      5 |      2 |      0 |       21 |       18 |       24 |       19 |        8 |       14 |      11 |       15 |       23 |       26 |       24 |       14 |       16 |       8 |       10 |       12 |       21 |       11 |        7 |        8 |       4 |        7 |       10 |       14 |       16 |        7 |        6 |       9 |        8 |       10 |       10 |        8 |        3 |        2 |       1 |       10 |       17 |        8 |        5 |        1 |        3 |       0 |        4 |        8 |        3 |        4 |        1 |        2 |       0 |        2 |        2 |        1 |        4 |        1 |        2 |       0 |      0 |      1 |     27 |     36 |      9 |      1 |      5 |    162 |      0 |      0 |      2 |     20 |     13 |      1 |      1 |      4 |    101 |      0 |      0 |      2 |     12 |     10 |      0 |      1 |      1 |     60 |      0 |      0 |      0 |      6 |      8 |      0 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 2938000 |     492 |    262 |    123 |    15 |    0 |     5 |    5 |    8 |     0 |    0 |     74 |    0 |    0 |    0 |    0 |    237 |    255 |      68 |      14 |      19 |       8 |      9 |      3 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      26 |      13 |       9 |       1 |      2 |      1 |      0 |      0 |        8 |       14 |       24 |       26 |       17 |       18 |      17 |        9 |       18 |       20 |       31 |       15 |       31 |      14 |        3 |       11 |       12 |       13 |       10 |        7 |       4 |        3 |       14 |        9 |       14 |        3 |       10 |      10 |        6 |        8 |        8 |        5 |        9 |        1 |       0 |        8 |        8 |       11 |        6 |        2 |        2 |       0 |        2 |        3 |        5 |        4 |        2 |        0 |       0 |        3 |        3 |        6 |        2 |        2 |        0 |       1 |      0 |      0 |     29 |     35 |      9 |      8 |      7 |    174 |      0 |      0 |      1 |     11 |     15 |     11 |      4 |      5 |     76 |      0 |      0 |      0 |      7 |     18 |      3 |      1 |      0 |     45 |      0 |      0 |      0 |      8 |      8 |      1 |      0 |      1 |     15 |      0 |     37 | s03      | R    |
| 2938100 |      14 |      7 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |     10 |       5 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       2 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        2 |        0 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2940000 |     184 |     84 |     57 |     1 |    0 |     2 |    0 |    4 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |     84 |    100 |      15 |       3 |       6 |       1 |      2 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |       3 |      12 |       9 |       2 |      0 |      0 |      0 |      0 |        6 |        5 |        6 |        8 |       10 |        4 |       2 |        2 |        6 |        8 |       12 |        5 |        4 |       6 |        5 |        4 |        3 |        6 |        3 |        3 |       2 |        3 |        8 |        6 |        3 |        1 |        7 |       3 |        0 |        5 |        3 |        2 |        2 |        1 |       0 |        6 |        3 |        3 |        9 |        0 |        1 |       1 |        0 |        0 |        1 |        1 |        1 |        0 |       1 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      4 |      9 |     13 |      7 |      0 |      1 |     50 |      0 |      0 |      0 |      6 |     11 |      2 |      1 |      1 |     36 |      0 |      0 |      0 |     10 |      7 |      0 |      0 |      2 |     17 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2942000 |     678 |    295 |    205 |    14 |    0 |     7 |    5 |    6 |     6 |    0 |    140 |    0 |    0 |    0 |    0 |    303 |    375 |      40 |      25 |      16 |       6 |      7 |      5 |      3 |      4 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      1 |      3 |      1 |      0 |      1 |      2 |      2 |      0 |       5 |       6 |       8 |       2 |      6 |      2 |      0 |      2 |       15 |       28 |       21 |       22 |       22 |        8 |       2 |       22 |       51 |       30 |       36 |       19 |       15 |       4 |       11 |       29 |       24 |       17 |       13 |        2 |       2 |       22 |       30 |       19 |       16 |        9 |        6 |       5 |        9 |       26 |       19 |        9 |        7 |        2 |       0 |       19 |       21 |       14 |       10 |        3 |        1 |       0 |        4 |        4 |        7 |        0 |        0 |        0 |       0 |        6 |       11 |        2 |        2 |        1 |        1 |       0 |      0 |      2 |     36 |     43 |      7 |      3 |      2 |    202 |      0 |      0 |      0 |     25 |     18 |      3 |      5 |      3 |    151 |      0 |      0 |      2 |     25 |     11 |      0 |      2 |      2 |     98 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     31 |      0 |     37 | s03      | R    |
| 2944000 |     701 |    309 |    205 |    23 |    0 |     6 |    6 |    5 |     3 |    0 |    144 |    0 |    0 |    0 |    0 |    331 |    370 |      72 |      13 |      19 |       3 |     13 |      7 |      7 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      1 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |       7 |       6 |       3 |       2 |      2 |      0 |      3 |      1 |       32 |       26 |       21 |       18 |        5 |       20 |       8 |       38 |       44 |       16 |       30 |       15 |       20 |      16 |       19 |       24 |       19 |       16 |        7 |       13 |       3 |       15 |       29 |       18 |        8 |        2 |       19 |      13 |       30 |       23 |       10 |        4 |        3 |        3 |       1 |       24 |       25 |        7 |       10 |        1 |        3 |       0 |        5 |       10 |        6 |        3 |        1 |        1 |       0 |        6 |        2 |        3 |        6 |        0 |        0 |       0 |      0 |      2 |     38 |     30 |     17 |      9 |      5 |    208 |      0 |      0 |      1 |     27 |     12 |      5 |      5 |      5 |    150 |      0 |      0 |      1 |     19 |     12 |      3 |      1 |      1 |    107 |      0 |      0 |      0 |      7 |      2 |      1 |      0 |      1 |     32 |      0 |     37 | s03      | R    |
| 2946000 |     271 |    127 |     80 |     6 |    0 |     2 |    0 |    2 |     9 |    0 |     45 |    0 |    0 |    0 |    0 |    122 |    149 |      20 |       7 |       5 |       1 |      6 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       4 |       2 |       1 |       0 |      2 |      0 |      0 |      0 |        4 |       11 |        9 |       12 |        7 |        7 |       5 |        2 |       11 |       22 |       10 |        9 |        6 |      12 |        3 |        6 |        8 |        9 |        2 |        6 |       3 |        2 |       10 |        5 |        7 |        5 |       11 |       3 |        4 |        6 |        6 |        3 |        1 |        2 |       0 |        9 |        4 |        4 |        3 |        1 |        2 |       0 |        1 |        2 |        2 |        1 |        1 |        1 |       0 |        5 |        1 |        2 |        3 |        0 |        0 |       0 |      0 |      0 |     19 |      8 |     10 |      4 |      2 |     84 |      0 |      0 |      0 |     10 |      6 |      4 |      3 |      2 |     55 |      0 |      0 |      0 |      6 |      2 |      1 |      0 |      0 |     36 |      0 |      0 |      0 |      3 |      2 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2948000 |     385 |    158 |    117 |    10 |    0 |     6 |    5 |    0 |     7 |    0 |     82 |    0 |    0 |    0 |    0 |    190 |    195 |      36 |      16 |      13 |       3 |      6 |     10 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      1 |      1 |      0 |       23 |       16 |        9 |        6 |        7 |        3 |       2 |       24 |       22 |       11 |       12 |        8 |       11 |       4 |       11 |       23 |       13 |        5 |        5 |        5 |       1 |       14 |        9 |        4 |       11 |        4 |       10 |       2 |       18 |       22 |        3 |        3 |        1 |        2 |       0 |       12 |       11 |        5 |        2 |        0 |        3 |       0 |        4 |        5 |        2 |        0 |        1 |        0 |       0 |        7 |        8 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |     19 |     10 |      3 |      2 |      2 |    121 |      0 |      0 |      0 |     13 |     11 |      7 |      2 |      4 |     80 |      0 |      0 |      0 |      9 |      3 |      2 |      0 |      0 |     68 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 2950100 |     437 |    191 |    136 |     5 |    0 |     6 |    4 |    3 |     7 |    0 |     85 |    0 |    0 |    0 |    0 |    222 |    215 |      30 |      13 |      15 |       2 |      7 |      4 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       2 |       4 |       0 |       0 |      1 |      1 |      0 |      0 |        7 |       20 |       24 |       17 |        8 |        9 |       5 |       17 |       24 |       12 |       17 |        9 |       17 |       5 |        7 |       19 |       16 |        9 |        9 |        6 |       6 |       11 |       15 |       10 |        9 |        5 |        8 |       6 |        5 |       21 |       10 |        3 |        5 |        2 |       0 |        7 |       12 |       11 |        5 |        3 |        1 |       0 |        4 |        3 |        1 |        2 |        2 |        2 |       0 |        1 |        2 |        3 |        2 |        0 |        3 |       0 |      0 |      0 |     19 |     23 |      5 |      2 |      6 |    136 |      0 |      0 |      1 |     14 |      9 |      3 |      5 |      3 |    101 |      0 |      0 |      1 |     15 |      3 |      0 |      0 |      0 |     66 |      0 |      0 |      1 |      2 |      5 |      1 |      2 |      0 |     14 |      0 |     37 | s03      | R    |
| 2952000 |     681 |    313 |    201 |    19 |    0 |    14 |    4 |    3 |     6 |    0 |    121 |    0 |    0 |    0 |    0 |    331 |    350 |      71 |      32 |      12 |       6 |     13 |      5 |      2 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      2 |      3 |      1 |      2 |      0 |      0 |      1 |      0 |       9 |      10 |       5 |       1 |      1 |      2 |      0 |      0 |       16 |       23 |       24 |       29 |       13 |       24 |      14 |       10 |       22 |       30 |       25 |       19 |       39 |      25 |        6 |       18 |       29 |       20 |        7 |       15 |       8 |        6 |       21 |       19 |       21 |       10 |       14 |       7 |       10 |       18 |       12 |       11 |        3 |        3 |       0 |        7 |       21 |       11 |       16 |        5 |        3 |       1 |        1 |       11 |        7 |        6 |        1 |        2 |       0 |        2 |        7 |        4 |        1 |        4 |        0 |       0 |      0 |      1 |     34 |     38 |      9 |     16 |      9 |    206 |      0 |      0 |      3 |     25 |     26 |      9 |      6 |      6 |    126 |      0 |      0 |      1 |     12 |     15 |      3 |      1 |      6 |     83 |      0 |      0 |      1 |     10 |     12 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 2956000 |     511 |    199 |    182 |    12 |    0 |     4 |    5 |    2 |     4 |    0 |    103 |    0 |    0 |    0 |    0 |    242 |    269 |      43 |      15 |      16 |       1 |      2 |      1 |      1 |      1 |      0 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      2 |      3 |      1 |      1 |      1 |      0 |      0 |       7 |      18 |      12 |       0 |      3 |      3 |      0 |      0 |        4 |       18 |       10 |       23 |        7 |        7 |      17 |       10 |       15 |       16 |       26 |       14 |       14 |      18 |        9 |       15 |       11 |       25 |       10 |       11 |       7 |        7 |       18 |       13 |       17 |       10 |       17 |      12 |       10 |       11 |       16 |       11 |        3 |        0 |       1 |       12 |        8 |       17 |        7 |        3 |        3 |       1 |        3 |        4 |        3 |        5 |        0 |        1 |       0 |        2 |        3 |        2 |        4 |        0 |        0 |       0 |      0 |      1 |     14 |     13 |     12 |      7 |      2 |    150 |      0 |      0 |      2 |     18 |     24 |      6 |     13 |      5 |    114 |      0 |      0 |      0 |     27 |     14 |      1 |      2 |      0 |     59 |      0 |      0 |      0 |      2 |      8 |      3 |      2 |      0 |     12 |      0 |     37 | s03      | R    |
| 2956100 |      58 |     28 |     21 |     2 |    0 |     1 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     19 |     39 |       5 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        0 |        5 |        1 |        0 |        2 |       1 |        3 |        5 |        3 |        1 |        2 |        1 |       4 |        0 |        1 |        3 |        0 |        1 |        0 |       1 |        2 |        0 |        4 |        0 |        4 |        4 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     22 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 2958000 |     116 |     61 |     29 |     2 |    0 |     1 |    1 |    0 |     3 |    0 |     19 |    0 |    0 |    0 |    0 |     50 |     66 |      10 |       1 |       1 |       1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        3 |        7 |        3 |        4 |        3 |       0 |        0 |        8 |        8 |       16 |        4 |        5 |       0 |        2 |        3 |        4 |        6 |        0 |        1 |       0 |        0 |        8 |        3 |        1 |        0 |        0 |       1 |        1 |        4 |        1 |        4 |        0 |        0 |       0 |        1 |        1 |        5 |        0 |        1 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      8 |     12 |      5 |      2 |      1 |     33 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |     24 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 2958100 |     292 |    128 |     99 |     5 |    0 |     1 |    2 |    3 |     0 |    0 |     54 |    0 |    0 |    0 |    0 |     92 |    200 |      21 |      18 |      11 |       3 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      2 |      1 |      0 |        2 |       25 |        7 |        0 |        0 |        1 |       0 |       10 |       54 |       25 |        3 |        0 |        1 |       0 |        5 |       23 |        9 |        0 |        0 |        0 |       0 |       11 |       35 |       11 |        2 |        2 |        1 |       0 |        3 |       10 |        2 |        0 |        0 |        1 |       0 |        3 |       23 |       10 |        2 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        6 |        1 |        0 |        0 |        0 |       0 |      0 |      4 |     21 |      6 |      0 |      0 |      0 |     97 |      0 |      0 |      1 |      6 |      4 |      0 |      0 |      0 |     88 |      0 |      0 |      2 |     10 |      1 |      0 |      0 |      0 |     41 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 2958200 |      49 |     27 |     16 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     24 |     25 |       3 |       3 |       0 |       1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        1 |        3 |        1 |        4 |       1 |        0 |        3 |        2 |        3 |        3 |        2 |       1 |        0 |        1 |        3 |        1 |        1 |        1 |       1 |        1 |        2 |        2 |        0 |        1 |        0 |       2 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      2 |      2 |      1 |     17 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      1 |     10 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 2958300 |       3 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2964000 |      79 |     37 |     20 |     2 |    0 |     1 |    0 |    3 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     32 |     47 |       8 |       2 |       4 |       0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        4 |        4 |        4 |        1 |       0 |        4 |        2 |        1 |        5 |        1 |        7 |       0 |        1 |        0 |        4 |        0 |        0 |        2 |       0 |        0 |        5 |        2 |        2 |        1 |        2 |       1 |        1 |        2 |        1 |        0 |        2 |        0 |       0 |        1 |        3 |        2 |        1 |        2 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 2966000 |     372 |    157 |    118 |     9 |    0 |     5 |    3 |    2 |     0 |    0 |     78 |    0 |    0 |    0 |    0 |    164 |    208 |      29 |      16 |      19 |       8 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      5 |      0 |      0 |      0 |       3 |       3 |       5 |       0 |      6 |      1 |      1 |      1 |        4 |        7 |       13 |       18 |        8 |       10 |       2 |       10 |       20 |       10 |       26 |        7 |       18 |       4 |        5 |       11 |       12 |       17 |        4 |        4 |       4 |        8 |       11 |       15 |        9 |        6 |        7 |       5 |        8 |        4 |        9 |        9 |        3 |        2 |       0 |        7 |       14 |       10 |        6 |        3 |        2 |       1 |        5 |        1 |        4 |        0 |        0 |        0 |       0 |        1 |        0 |        4 |        3 |        1 |        0 |       0 |      0 |      2 |     29 |     21 |      7 |      4 |      6 |     88 |      0 |      0 |      3 |     16 |     13 |      3 |      1 |      3 |     79 |      0 |      0 |      3 |      9 |     12 |      0 |      0 |      1 |     53 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 2968000 |     737 |    353 |    233 |    16 |    0 |    12 |    6 |    2 |    10 |    0 |    105 |    0 |    0 |    0 |    0 |    330 |    407 |      54 |      21 |      14 |       6 |     10 |      7 |      2 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |      3 |      0 |      7 |      1 |      3 |      0 |      4 |      1 |      0 |      0 |       8 |       1 |       3 |       0 |      2 |      2 |      2 |      1 |       16 |       28 |       25 |       23 |       12 |       30 |      12 |       18 |       28 |       33 |       47 |       23 |       37 |      21 |        6 |       19 |       32 |       16 |        9 |       25 |       5 |        8 |       14 |       40 |       16 |        9 |       23 |      11 |        5 |        8 |       13 |       12 |        2 |        4 |       3 |       10 |       15 |       13 |       13 |        5 |        1 |       1 |        6 |        3 |        7 |        4 |        2 |        3 |       0 |        3 |        3 |        6 |        3 |        3 |        3 |       0 |      0 |      1 |     37 |     45 |     19 |      9 |      6 |    236 |      0 |      0 |      6 |     28 |     27 |      8 |      9 |     11 |    144 |      0 |      0 |      0 |     16 |     13 |      3 |      1 |      0 |     72 |      0 |      0 |      0 |     11 |      7 |      2 |      1 |      0 |     25 |      0 |     37 | s03      | R    |
| 2970000 |     459 |    205 |    150 |     5 |    0 |     6 |    3 |    5 |     3 |    0 |     82 |    0 |    0 |    0 |    0 |    229 |    230 |      18 |      13 |      12 |       3 |     10 |      8 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      5 |      1 |      2 |      0 |      0 |      0 |       4 |       5 |       0 |       1 |      4 |      0 |      0 |      0 |        5 |       12 |       20 |       21 |       11 |       11 |      10 |        6 |       18 |       20 |       23 |       13 |       21 |      14 |        9 |       17 |       16 |       13 |        9 |       11 |       1 |        3 |       10 |       18 |       15 |        7 |       14 |       7 |        4 |       15 |       14 |       11 |        3 |        2 |       1 |        5 |        9 |        8 |        2 |        4 |        4 |       0 |        3 |        3 |        1 |        5 |        1 |        0 |       0 |        0 |        3 |        4 |        0 |        1 |        1 |       0 |      0 |      1 |     23 |     24 |      7 |      6 |      7 |    137 |      0 |      0 |      0 |     24 |     16 |      0 |      8 |      7 |     95 |      0 |      0 |      0 |     15 |      7 |      4 |      1 |      3 |     52 |      0 |      0 |      1 |      1 |      6 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2971000 |     423 |    184 |    121 |     7 |    0 |     4 |    7 |    5 |     7 |    0 |     88 |    0 |    0 |    0 |    0 |    211 |    212 |      35 |      16 |      15 |       7 |     12 |      3 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      1 |      2 |      1 |        7 |       29 |       13 |       15 |        6 |        3 |      12 |       11 |       25 |       24 |       20 |        7 |        5 |       7 |       13 |       24 |        7 |        5 |        6 |        6 |       3 |        9 |       15 |        3 |        8 |        3 |       12 |       7 |        6 |       12 |       12 |        8 |        2 |        3 |       0 |       12 |       19 |        3 |        5 |        3 |        3 |       0 |        5 |        5 |        4 |        2 |        3 |        0 |       0 |        1 |        5 |        1 |        1 |        2 |        1 |       0 |      0 |      2 |     31 |     21 |      2 |      0 |      6 |    122 |      0 |      0 |      0 |     11 |      8 |      2 |      1 |      1 |     98 |      0 |      0 |      0 |      9 |      9 |      3 |      1 |      0 |     66 |      0 |      0 |      0 |      3 |     11 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 2972000 |     278 |    138 |     86 |     8 |    0 |     2 |    2 |    0 |     5 |    0 |     37 |    0 |    0 |    0 |    0 |    129 |    149 |       9 |       4 |       5 |       0 |      9 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |       13 |       19 |        8 |        8 |        3 |       6 |        5 |        9 |       18 |       21 |        7 |        6 |      11 |        3 |       10 |       10 |        7 |        5 |        7 |       0 |        2 |        7 |        9 |        7 |        4 |       10 |       5 |        2 |        3 |        4 |        3 |        0 |        1 |       1 |        7 |        7 |        6 |        1 |        0 |        2 |       0 |        3 |        1 |        2 |        5 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        2 |        0 |       0 |      0 |      0 |     17 |     18 |      2 |      7 |      3 |     91 |      0 |      0 |      1 |     13 |     13 |      5 |      4 |      2 |     48 |      0 |      0 |      2 |      3 |      7 |      2 |      1 |      0 |     22 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 2972100 |     271 |    102 |     83 |     9 |    0 |     4 |    6 |    1 |     3 |    0 |     63 |    0 |    0 |    0 |    0 |    126 |    145 |      12 |       7 |      11 |       6 |      5 |      5 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       0 |       2 |       0 |      1 |      1 |      2 |      0 |       10 |        7 |        4 |        7 |        4 |        4 |       2 |        9 |       28 |       11 |        8 |        2 |        3 |       3 |        6 |       13 |       12 |        3 |        5 |        4 |       0 |       10 |       10 |       10 |        6 |        1 |        3 |       0 |       10 |       12 |        2 |        3 |        3 |        0 |       0 |        7 |        9 |       11 |        6 |        0 |        0 |       0 |        6 |        5 |        2 |        2 |        0 |        0 |       0 |        1 |        5 |        2 |        0 |        0 |        0 |       0 |      0 |      1 |      9 |      5 |      0 |      1 |      3 |     83 |      0 |      0 |      0 |     15 |      9 |      3 |      1 |      4 |     51 |      0 |      0 |      1 |      9 |      5 |      0 |      0 |      1 |     47 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 2973000 |     603 |    245 |    216 |    10 |    0 |     8 |    7 |    2 |     9 |    0 |    106 |    0 |    0 |    0 |    0 |    266 |    337 |      36 |      19 |       9 |       1 |     11 |     10 |      5 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      2 |      1 |      0 |        4 |       13 |       28 |       15 |        8 |       15 |       6 |       10 |       23 |       29 |       31 |       19 |       22 |      22 |        3 |       18 |       27 |       21 |       15 |       14 |       6 |        3 |       27 |       22 |       20 |        9 |       17 |      14 |        5 |       15 |       17 |        5 |        8 |        3 |       0 |        5 |       12 |       19 |       10 |        6 |        1 |       0 |        2 |        4 |        9 |        2 |        0 |        3 |       0 |        0 |        2 |        2 |        5 |        1 |        6 |       0 |      0 |      3 |     29 |     34 |      5 |      6 |     17 |    151 |      0 |      0 |      2 |     23 |     35 |      5 |     19 |     13 |    119 |      0 |      0 |      1 |     18 |      9 |      4 |      5 |      1 |     68 |      0 |      0 |      0 |      7 |      7 |      2 |      3 |      0 |     17 |      0 |     37 | s03      | R    |
| 2975000 |     628 |    269 |    228 |    17 |    0 |     6 |    4 |    3 |     9 |    0 |     92 |    0 |    0 |    0 |    0 |    299 |    329 |      35 |      22 |      13 |       7 |      5 |     13 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       5 |       2 |       0 |      1 |      0 |      1 |      0 |       11 |       10 |       23 |       20 |       16 |       13 |      19 |       10 |       19 |       31 |       23 |       24 |       29 |      21 |       11 |       20 |       25 |       23 |       13 |       13 |      10 |        4 |       11 |       22 |       25 |       16 |       19 |      16 |        5 |       16 |       13 |        9 |        3 |        3 |       0 |        2 |       12 |       12 |        8 |        2 |        5 |       2 |        3 |        7 |        6 |        4 |        2 |        1 |       0 |        2 |        3 |        4 |        3 |        0 |        4 |       0 |      0 |      2 |     35 |     33 |     13 |      5 |     10 |    171 |      0 |      0 |      2 |     30 |     33 |     12 |     11 |     10 |    130 |      0 |      0 |      0 |     19 |      9 |      4 |      2 |      1 |     57 |      0 |      0 |      0 |      6 |      5 |      0 |      4 |      1 |     23 |      0 |     37 | s03      | R    |
| 2975100 |      28 |      6 |     16 |     0 |    0 |     0 |    1 |    1 |     1 |    0 |      3 |    0 |    0 |    0 |    0 |     12 |     16 |       0 |       0 |       2 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       1 |        0 |        2 |        2 |        0 |        0 |        1 |       1 |        0 |        2 |        4 |        2 |        0 |        1 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      2 |      9 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 2975200 |      32 |     16 |     12 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     18 |     14 |      10 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        2 |        0 |        0 |        1 |       0 |        1 |        3 |        1 |        2 |        1 |        1 |       0 |        1 |        3 |        1 |        3 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      1 |      3 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 2977000 |      70 |     24 |     28 |     1 |    0 |     1 |    2 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     32 |     38 |       4 |       5 |       1 |       0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       5 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        1 |        2 |        2 |       3 |        2 |        2 |        1 |        3 |        1 |        4 |       1 |        3 |        4 |        1 |        0 |        1 |        4 |       0 |        1 |        6 |        1 |        2 |        2 |        2 |       1 |        1 |        1 |        2 |        0 |        3 |        0 |       0 |        2 |        1 |        1 |        1 |        2 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      3 |      6 |      2 |      1 |      0 |     16 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      2 |      9 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3000000 |     409 |    209 |     93 |    14 |    0 |     6 |    5 |    2 |     1 |    0 |     79 |    0 |    0 |    0 |    0 |    198 |    211 |      80 |      39 |      28 |       7 |      4 |      5 |      6 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      1 |      0 |      0 |      0 |      27 |      10 |      17 |       4 |      7 |      0 |      1 |      2 |       19 |       16 |       21 |       23 |        7 |        6 |       4 |       22 |       17 |       21 |       20 |       16 |       15 |       2 |        8 |        8 |        9 |        8 |        6 |        7 |       1 |        7 |       14 |        8 |        5 |        7 |        3 |       2 |        8 |        6 |        9 |        6 |        5 |        5 |       0 |       15 |        9 |        8 |        4 |        3 |        1 |       0 |        2 |        4 |        6 |        3 |        1 |        0 |       0 |        4 |        2 |        4 |        1 |        1 |        0 |       0 |      0 |      1 |     30 |     26 |      6 |      0 |      4 |    142 |      0 |      0 |      0 |     21 |      9 |      3 |      2 |      0 |     58 |      0 |      0 |      1 |      6 |      7 |      4 |      2 |      0 |     59 |      0 |      0 |      2 |      2 |      3 |      1 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 3002000 |     263 |    136 |     65 |     8 |    0 |     1 |    3 |    1 |     5 |    0 |     44 |    0 |    0 |    0 |    0 |    129 |    134 |      55 |      14 |      15 |       4 |      4 |      2 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      11 |      11 |       2 |       3 |      2 |      2 |      0 |      0 |       10 |       13 |       12 |       13 |       10 |        8 |       1 |       21 |       14 |       12 |        7 |        8 |        5 |       2 |        5 |        5 |        9 |        1 |        6 |        7 |       0 |        4 |        7 |        9 |        7 |        1 |        4 |       0 |        4 |        5 |        4 |        4 |        3 |        2 |       0 |        7 |        3 |        3 |        4 |        3 |        2 |       0 |        2 |        3 |        1 |        1 |        0 |        0 |       0 |        1 |        3 |        2 |        2 |        2 |        1 |       0 |      0 |      0 |     25 |     16 |      4 |      3 |      1 |     87 |      0 |      0 |      0 |      3 |     11 |      1 |      4 |      2 |     44 |      0 |      0 |      2 |      9 |      2 |      0 |      0 |      1 |     30 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3002100 |     223 |    115 |     48 |     8 |    0 |     3 |    4 |    2 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |    109 |    114 |      57 |      17 |      19 |       8 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |       5 |       8 |       2 |       0 |      0 |      0 |      1 |      0 |        5 |        8 |       12 |       15 |       11 |        7 |       5 |       11 |        9 |       11 |        7 |        4 |        4 |       6 |        4 |        1 |        1 |        8 |        4 |        2 |       0 |        8 |        3 |        7 |        4 |        3 |        3 |       0 |        2 |        5 |        4 |        3 |        1 |        3 |       0 |        3 |        9 |        5 |        5 |        2 |        1 |       0 |        1 |        4 |        1 |        2 |        0 |        0 |       0 |        1 |        4 |        2 |        0 |        2 |        0 |       0 |      0 |      0 |     16 |     17 |      3 |      1 |      2 |     76 |      0 |      0 |      0 |      9 |      2 |      0 |      1 |      0 |     36 |      0 |      0 |      0 |      6 |      3 |      2 |      1 |      0 |     31 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3002500 |     335 |    177 |     82 |     6 |    0 |     2 |    1 |    4 |     5 |    0 |     58 |    0 |    0 |    0 |    0 |    163 |    172 |      71 |      27 |      23 |       4 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       5 |       8 |       2 |       0 |      4 |      3 |      1 |      0 |        8 |       17 |       15 |       20 |        9 |        6 |       3 |       17 |       18 |       25 |       20 |        9 |       10 |       0 |        5 |       12 |       13 |        5 |        7 |        2 |       0 |        8 |        5 |       11 |       10 |        2 |        2 |       0 |        6 |       10 |        5 |        6 |        2 |        1 |       0 |        4 |       14 |        6 |        3 |        1 |        0 |       0 |        2 |        3 |        3 |        1 |        2 |        0 |       0 |        0 |        2 |        1 |        3 |        1 |        0 |       0 |      0 |      3 |     27 |     23 |      5 |      0 |      3 |    116 |      0 |      0 |      3 |     18 |      8 |      0 |      0 |      0 |     53 |      0 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |     49 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3002600 |     227 |    124 |     56 |     9 |    0 |     2 |    2 |    0 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |    120 |    107 |      59 |      18 |      11 |       3 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       5 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |       12 |        9 |       14 |       12 |        8 |        9 |       0 |       11 |       14 |        8 |       11 |       11 |        3 |       2 |        4 |        6 |       10 |        3 |        3 |        1 |       0 |        4 |       10 |        6 |        3 |        1 |        4 |       1 |        0 |        4 |        6 |        6 |        3 |        1 |       0 |        2 |        3 |        6 |        2 |        0 |        0 |       0 |        2 |        1 |        1 |        3 |        0 |        2 |       0 |        0 |        1 |        0 |        2 |        1 |        1 |       0 |      0 |      0 |     16 |     22 |      4 |      3 |      2 |     77 |      0 |      0 |      0 |      8 |     10 |      2 |      0 |      2 |     34 |      0 |      0 |      0 |      7 |      2 |      0 |      1 |      0 |     23 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3004000 |     314 |    155 |     81 |     7 |    0 |     7 |    1 |    6 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    152 |    162 |      57 |      22 |      17 |       4 |      2 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |       2 |       3 |       3 |       1 |      0 |      2 |      1 |      0 |        9 |       19 |       13 |       18 |        7 |        4 |       2 |       15 |       22 |       14 |       16 |        8 |        6 |       2 |        6 |       10 |       10 |        7 |        4 |        1 |       1 |        6 |       11 |        8 |        8 |        4 |        3 |       2 |        6 |        7 |        7 |        1 |        6 |        2 |       1 |        6 |        4 |        5 |        4 |        5 |        1 |       0 |        1 |        4 |        2 |        3 |        0 |        1 |       0 |        2 |        4 |        1 |        4 |        0 |        1 |       0 |      0 |      3 |     24 |     26 |      2 |      2 |      3 |     95 |      0 |      0 |      1 |     10 |      6 |      1 |      1 |      1 |     61 |      0 |      0 |      0 |     12 |      6 |      2 |      1 |      0 |     34 |      0 |      0 |      0 |      3 |      8 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 3004100 |     456 |    271 |     80 |     8 |    0 |     5 |    2 |    6 |     4 |    0 |     80 |    0 |    0 |    0 |    0 |    210 |    246 |      94 |      23 |      30 |       7 |      2 |      4 |      2 |      2 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |       9 |      10 |       1 |       0 |      4 |      0 |      0 |      0 |       18 |       23 |       34 |       23 |       12 |       10 |       4 |       26 |       27 |       40 |       29 |        9 |       12 |       4 |        4 |        6 |        7 |        9 |        1 |        5 |       3 |        3 |       10 |       12 |        9 |        2 |        8 |       1 |       10 |        5 |        5 |        8 |        4 |        3 |       0 |       15 |       10 |       12 |        3 |        3 |        2 |       0 |        3 |        5 |        6 |        1 |        1 |        0 |       0 |        1 |        4 |        2 |        1 |        0 |        1 |       0 |      0 |      4 |     32 |     30 |      6 |      3 |      4 |    192 |      0 |      0 |      0 |     10 |      5 |      5 |      1 |      1 |     58 |      0 |      0 |      0 |     10 |      5 |      1 |      0 |      0 |     64 |      0 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 3009000 |     356 |    171 |     91 |    10 |    0 |     5 |    0 |    2 |     8 |    0 |     69 |    0 |    0 |    0 |    0 |    169 |    187 |      72 |      19 |      23 |       6 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      19 |      17 |       9 |       5 |      1 |      0 |      3 |      1 |       16 |        8 |       21 |       15 |        9 |        6 |       1 |       14 |       13 |       19 |       28 |       10 |        9 |       2 |        4 |        8 |        7 |       11 |       11 |        4 |       0 |        6 |       11 |       10 |        7 |        5 |        6 |       1 |        7 |       11 |        5 |        4 |        3 |        4 |       0 |       11 |       11 |        3 |        5 |        2 |        3 |       0 |        3 |        1 |        6 |        3 |        1 |        0 |       0 |        3 |        3 |        3 |        1 |        1 |        0 |       0 |      0 |      2 |     22 |     24 |      4 |      2 |      3 |    114 |      0 |      0 |      1 |     13 |     12 |      0 |      1 |      1 |     63 |      0 |      0 |      0 |      5 |      6 |      2 |      0 |      1 |     55 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 3012000 |     310 |    157 |     74 |     6 |    0 |     3 |    1 |    1 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    154 |    156 |      58 |      23 |      31 |       7 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |       4 |       4 |       7 |       0 |      5 |      3 |      0 |      0 |       17 |       18 |       12 |       17 |        8 |        6 |       1 |       14 |       10 |       20 |       13 |        6 |       10 |       5 |        6 |        6 |        8 |       10 |        3 |        1 |       1 |        6 |        9 |        5 |       13 |        1 |        4 |       1 |        2 |        3 |       11 |        6 |        8 |        3 |       0 |       17 |        7 |        2 |        1 |        2 |        5 |       0 |        2 |        1 |        1 |        0 |        2 |        1 |       0 |        0 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     22 |     11 |      1 |      3 |      1 |    118 |      0 |      0 |      0 |     10 |      8 |      2 |      0 |      0 |     54 |      0 |      0 |      0 |      9 |      6 |      0 |      0 |      0 |     52 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3013000 |     442 |    205 |    103 |    15 |    0 |     6 |    5 |    7 |     4 |    0 |     97 |    0 |    0 |    0 |    0 |    213 |    229 |      78 |      27 |      31 |      16 |      4 |      2 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      2 |      2 |      1 |      0 |      0 |      1 |      0 |      11 |      18 |      16 |       1 |      0 |      0 |      2 |      1 |       18 |       18 |       17 |       21 |       13 |        9 |       2 |       11 |       31 |       19 |       23 |       11 |       11 |       1 |        6 |       11 |       15 |       12 |        9 |       10 |       2 |       11 |        9 |        5 |        3 |        4 |        6 |       0 |        3 |       10 |        9 |        7 |        5 |        4 |       0 |       20 |       18 |        7 |        4 |        5 |        5 |       0 |        3 |        3 |        2 |        2 |        2 |        0 |       0 |        5 |        6 |        4 |        9 |        0 |        1 |       0 |      0 |      1 |     23 |     31 |      3 |      4 |      0 |    143 |      0 |      0 |      0 |     11 |     18 |      2 |      2 |      1 |     69 |      0 |      0 |      0 |      7 |     10 |      2 |      0 |      2 |     76 |      0 |      0 |      0 |      7 |      7 |      0 |      1 |      0 |     22 |      0 |     37 | s03      | R    |
| 3014000 |     394 |    199 |     95 |     8 |    0 |    10 |    3 |    5 |     2 |    0 |     72 |    0 |    0 |    0 |    0 |    183 |    211 |      64 |      34 |      18 |       6 |      6 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      1 |      0 |      0 |      2 |      10 |       9 |      11 |       2 |      5 |      1 |      1 |      0 |       13 |       14 |       18 |       19 |       10 |        9 |       0 |       15 |       29 |       30 |       15 |       16 |       10 |       1 |        6 |       13 |       11 |       11 |        4 |        3 |       2 |        8 |       11 |       13 |        4 |        4 |        4 |       1 |        6 |        9 |        9 |        7 |        2 |        4 |       0 |        8 |        9 |        8 |        5 |        2 |        3 |       0 |        1 |        7 |        4 |        1 |        0 |        0 |       0 |        4 |        4 |        3 |        1 |        2 |        1 |       0 |      0 |      3 |     25 |     28 |      5 |      3 |      1 |    134 |      0 |      0 |      1 |     15 |      6 |      2 |      0 |      3 |     68 |      0 |      0 |      1 |      8 |      3 |      1 |      0 |      0 |     59 |      0 |      0 |      0 |      3 |      8 |      0 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 3017000 |     269 |    135 |     64 |     5 |    0 |     7 |    1 |    6 |     1 |    0 |     50 |    0 |    0 |    0 |    0 |    131 |    138 |      60 |      25 |      21 |       6 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |       2 |       3 |       4 |       0 |      2 |      0 |      0 |      0 |        7 |       11 |       21 |        3 |        6 |       10 |       2 |       11 |       15 |       18 |       14 |       12 |        3 |       2 |        7 |        6 |        9 |       10 |        3 |        0 |       1 |        5 |        7 |        8 |        4 |        3 |        1 |       0 |        4 |        6 |        9 |        2 |        3 |        3 |       0 |        8 |        8 |        2 |        3 |        1 |        1 |       0 |        2 |        4 |        0 |        1 |        0 |        0 |       1 |        0 |        4 |        3 |        5 |        0 |        0 |       0 |      0 |      1 |     13 |     14 |      5 |      0 |      4 |     98 |      0 |      0 |      1 |     12 |      4 |      0 |      2 |      3 |     42 |      0 |      0 |      0 |      6 |      4 |      2 |      0 |      1 |     37 |      0 |      0 |      0 |      3 |      9 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3017100 |     277 |    150 |     62 |    11 |    0 |     4 |    1 |    3 |     2 |    0 |     44 |    0 |    0 |    0 |    0 |    135 |    142 |      67 |      17 |      17 |       6 |      2 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      13 |      15 |       8 |       4 |      1 |      0 |      0 |      0 |        8 |       12 |       23 |       16 |        8 |        5 |       1 |       14 |        5 |       17 |       13 |       12 |       12 |       4 |        4 |        3 |       10 |        8 |        2 |        3 |       0 |        3 |        9 |        5 |        6 |        3 |        5 |       1 |        5 |        6 |        6 |        2 |        1 |        1 |       0 |        5 |        9 |        5 |        3 |        0 |        1 |       0 |        2 |        0 |        5 |        3 |        0 |        1 |       0 |        1 |        2 |        3 |        1 |        2 |        1 |       0 |      0 |      1 |     13 |     27 |      4 |      2 |      4 |     99 |      0 |      0 |      0 |     11 |      9 |      2 |      1 |      1 |     38 |      0 |      0 |      1 |      8 |      4 |      1 |      0 |      1 |     29 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 3017200 |     351 |    187 |     65 |    10 |    0 |     5 |    4 |    6 |     4 |    0 |     70 |    0 |    0 |    0 |    0 |    174 |    177 |      67 |      21 |      24 |       9 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      4 |      1 |      0 |      0 |      1 |      0 |       4 |       4 |       9 |       1 |      1 |      1 |      0 |      0 |        9 |       14 |       10 |       27 |       13 |       12 |       7 |       15 |       15 |       17 |       11 |       11 |       14 |      12 |        6 |        8 |        8 |        6 |        3 |        3 |       0 |        5 |        8 |        5 |        5 |        6 |        2 |       0 |        7 |        9 |        5 |        7 |        3 |        0 |       0 |       10 |       10 |        4 |       10 |        2 |        2 |       1 |        3 |        3 |        5 |        5 |        0 |        1 |       0 |        3 |        5 |        1 |        0 |        0 |        2 |       1 |      0 |      4 |     24 |     38 |      3 |      1 |      2 |    115 |      0 |      0 |      0 |     10 |      5 |      2 |      3 |      1 |     44 |      0 |      0 |      0 |     10 |      9 |      2 |      0 |      0 |     49 |      0 |      0 |      1 |      2 |      6 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 3019000 |     180 |     90 |     39 |     4 |    0 |     5 |    3 |    6 |     3 |    0 |     30 |    0 |    0 |    0 |    0 |     93 |     87 |      38 |       9 |      16 |       5 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       3 |       2 |       1 |       0 |      0 |      1 |      0 |      2 |        7 |       10 |        8 |        9 |        8 |        5 |       0 |       10 |        8 |        8 |        9 |        6 |        2 |       0 |        4 |        2 |        3 |        6 |        4 |        0 |       0 |        2 |        7 |        2 |        6 |        0 |        2 |       1 |        6 |        4 |        2 |        2 |        1 |        0 |       0 |        2 |        6 |        2 |        3 |        2 |        0 |       0 |        0 |        6 |        2 |        2 |        2 |        0 |       0 |        2 |        3 |        2 |        0 |        2 |        0 |       0 |      0 |      1 |     12 |     12 |      0 |      0 |      1 |     64 |      0 |      0 |      0 |      8 |      5 |      1 |      2 |      0 |     23 |      0 |      0 |      1 |      6 |      3 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3021000 |     422 |    212 |     96 |     9 |    0 |     6 |    7 |    5 |    10 |    0 |     77 |    0 |    0 |    0 |    0 |    208 |    214 |      66 |      22 |      25 |       7 |      3 |      4 |      4 |      3 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       4 |       2 |       0 |      0 |      2 |      0 |      0 |        8 |       19 |       21 |       27 |       10 |       11 |       0 |       16 |       21 |       27 |       26 |       13 |       10 |       3 |        7 |        6 |       11 |       11 |        7 |        5 |       1 |        8 |       11 |        7 |        9 |        4 |        9 |       0 |        7 |       17 |        7 |        4 |        5 |        3 |       0 |        5 |       13 |        4 |        8 |        3 |        1 |       0 |        2 |        7 |        6 |        5 |        1 |        0 |       0 |        1 |        5 |        5 |        2 |        2 |        1 |       0 |      0 |      7 |     24 |     29 |      6 |      7 |      8 |    131 |      0 |      0 |      3 |     12 |     12 |      6 |      6 |      1 |     56 |      0 |      0 |      1 |      9 |      9 |      3 |      0 |      0 |     55 |      0 |      0 |      0 |      5 |      9 |      3 |      3 |      0 |     17 |      0 |     37 | s03      | R    |
| 3022000 |     496 |    258 |     99 |    11 |    0 |     8 |    7 |    3 |     7 |    0 |    103 |    0 |    0 |    0 |    0 |    231 |    265 |      80 |      27 |      25 |       9 |      9 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       2 |       2 |      3 |      0 |      1 |      0 |       19 |       26 |       30 |       21 |       12 |        8 |       2 |       22 |       27 |       33 |       29 |       12 |       15 |       2 |        7 |       15 |        9 |        8 |        3 |        5 |       4 |        7 |       13 |        9 |        2 |        7 |        7 |       3 |        8 |       10 |       15 |        6 |        3 |        2 |       0 |       12 |       24 |       10 |        7 |        4 |        2 |       0 |        1 |        8 |        0 |        5 |        2 |        2 |       0 |        6 |        5 |        5 |        2 |        0 |        0 |       0 |      0 |      3 |     38 |     17 |      3 |      2 |      4 |    191 |      0 |      0 |      0 |     12 |      7 |      1 |      3 |      0 |     76 |      0 |      0 |      1 |      9 |      8 |      1 |      1 |      1 |     82 |      0 |      0 |      0 |      5 |      6 |      2 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 3024000 |     240 |    114 |     59 |     6 |    0 |     4 |    0 |    1 |     5 |    0 |     51 |    0 |    0 |    0 |    0 |    132 |    108 |      26 |       6 |       7 |       4 |      3 |      2 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       7 |       0 |       0 |      2 |      0 |      2 |      0 |        0 |        9 |       18 |       17 |        8 |        8 |       3 |        0 |       11 |       13 |       14 |        4 |        8 |       1 |        1 |        5 |        9 |        4 |        5 |        4 |       1 |        1 |        5 |        9 |        7 |        4 |        3 |       1 |        3 |        6 |       12 |        8 |        1 |        0 |       1 |        3 |        7 |        3 |        7 |        0 |        0 |       0 |        3 |        1 |        2 |        2 |        1 |        0 |       0 |        0 |        2 |        1 |        3 |        1 |        0 |       0 |      0 |      1 |     12 |     19 |      7 |      1 |      5 |     69 |      0 |      0 |      1 |      4 |      5 |      3 |      3 |      4 |     39 |      0 |      0 |      1 |      5 |      4 |      2 |      0 |      1 |     38 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3026000 |     281 |    125 |     81 |     1 |    0 |     5 |    4 |    1 |     9 |    0 |     55 |    0 |    0 |    0 |    0 |    135 |    146 |      29 |      17 |      13 |       3 |      4 |      3 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       5 |       2 |       0 |      0 |      0 |      0 |      0 |        4 |       10 |       15 |       11 |        7 |        8 |       3 |        4 |       15 |       10 |       13 |       11 |       10 |       4 |        4 |        5 |       12 |        8 |       10 |        3 |       1 |        2 |        8 |       12 |        5 |        5 |        3 |       3 |        3 |        4 |        5 |        6 |        6 |        2 |       0 |        5 |        5 |        8 |        7 |        2 |        2 |       0 |        1 |        2 |        3 |        2 |        0 |        0 |       0 |        1 |        3 |        4 |        2 |        2 |        0 |       0 |      0 |      2 |     10 |     19 |      3 |      2 |      3 |     86 |      0 |      0 |      0 |     11 |      8 |      6 |      2 |      1 |     53 |      0 |      0 |      1 |      9 |      5 |      4 |      2 |      1 |     33 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 3026100 |     312 |    166 |     72 |     8 |    0 |     3 |    4 |    0 |     1 |    0 |     58 |    0 |    0 |    0 |    0 |    156 |    156 |      46 |      16 |      16 |       2 |     10 |      5 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       3 |       1 |       1 |      5 |      2 |      0 |      0 |        7 |       10 |       24 |       20 |        6 |        7 |       2 |        9 |       13 |       18 |       28 |       12 |        8 |       2 |        2 |        7 |       11 |       11 |        2 |        1 |       3 |        6 |        9 |        6 |        6 |        3 |        2 |       3 |        2 |       11 |        8 |        2 |        5 |        2 |       4 |        4 |        6 |        5 |        4 |        2 |        2 |       1 |        0 |        2 |        3 |        1 |        1 |        2 |       0 |        0 |        2 |        2 |        2 |        1 |        0 |       0 |      0 |      3 |     22 |     19 |      8 |      2 |      4 |    108 |      0 |      0 |      2 |     13 |      9 |      3 |      1 |      0 |     44 |      0 |      0 |      2 |      6 |      6 |      3 |      0 |      0 |     41 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 3028000 |     383 |    176 |    121 |     9 |    0 |     3 |    5 |    1 |     5 |    0 |     63 |    0 |    0 |    0 |    0 |    188 |    195 |      53 |      15 |      16 |       4 |      5 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       2 |       0 |       0 |      7 |      0 |      0 |      0 |        4 |        4 |       18 |       18 |       12 |       12 |      14 |       10 |       11 |       10 |       20 |       14 |       15 |      14 |        5 |        7 |       15 |        7 |        5 |       12 |       9 |        2 |        6 |        6 |       13 |       12 |       12 |      10 |        4 |       10 |        9 |        3 |        4 |        5 |       0 |        6 |        9 |        6 |        3 |        1 |        3 |       0 |        1 |        3 |        5 |        1 |        0 |        1 |       0 |        1 |        3 |        3 |        3 |        0 |        2 |       0 |      0 |      0 |     16 |     28 |      8 |      2 |      4 |    118 |      0 |      0 |      1 |     10 |      9 |      6 |      3 |     10 |     82 |      0 |      0 |      0 |      9 |      8 |      1 |      2 |      0 |     43 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      1 |     16 |      0 |     37 | s03      | R    |
| 3032000 |     359 |    183 |     97 |     6 |    0 |     3 |    4 |    2 |     3 |    0 |     61 |    0 |    0 |    0 |    0 |    166 |    193 |      51 |      18 |      15 |       2 |      8 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      2 |      0 |      0 |       1 |       4 |       2 |       0 |      1 |      0 |      1 |      0 |        3 |        9 |       20 |       14 |        6 |       11 |      18 |        5 |       11 |       23 |       17 |       10 |       15 |      21 |        4 |        7 |       11 |        7 |        4 |       11 |       5 |        3 |        9 |        8 |        7 |        4 |        6 |      11 |        5 |        3 |        6 |        3 |        4 |        6 |       1 |        6 |        8 |        4 |        3 |        9 |        3 |       0 |        0 |        1 |        2 |        4 |        1 |        0 |       0 |        3 |        5 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |     14 |     26 |      5 |      8 |      5 |    125 |      0 |      0 |      1 |      3 |     13 |      4 |      5 |      1 |     70 |      0 |      0 |      0 |      7 |      5 |      0 |      1 |      2 |     46 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 3032100 |     324 |    186 |     85 |     5 |    0 |     3 |    1 |    1 |     3 |    0 |     40 |    0 |    0 |    0 |    0 |    160 |    164 |      26 |      11 |       5 |       0 |      4 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |       2 |       5 |       4 |       2 |      1 |      0 |      0 |      0 |        2 |       18 |       24 |       21 |       13 |       15 |       1 |        7 |       10 |       22 |       25 |       14 |       12 |       2 |        2 |        8 |        9 |       10 |        8 |        5 |       0 |        7 |       10 |       12 |        9 |        3 |        1 |       1 |        3 |        3 |        7 |        2 |        2 |        1 |       0 |        1 |        7 |        6 |        3 |        3 |        1 |       1 |        0 |        2 |        1 |        1 |        0 |        2 |       0 |        2 |        1 |        2 |        1 |        1 |        0 |       0 |      0 |      1 |     18 |     33 |     11 |      7 |      3 |    113 |      0 |      0 |      1 |      5 |     10 |      7 |      1 |      5 |     56 |      0 |      0 |      0 |      5 |      9 |      2 |      0 |      0 |     24 |      0 |      0 |      0 |      4 |      2 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3032200 |      58 |     26 |     16 |     1 |    0 |     0 |    1 |    0 |     2 |    0 |     12 |    0 |    0 |    0 |    0 |     28 |     30 |       2 |       2 |       3 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        2 |        1 |        1 |       3 |        1 |        2 |        3 |        1 |        2 |        1 |       5 |        1 |        1 |        1 |        2 |        2 |        0 |       0 |        0 |        1 |        2 |        2 |        2 |        1 |       1 |        2 |        0 |        0 |        4 |        2 |        0 |       0 |        0 |        0 |        2 |        0 |        2 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      2 |      0 |      0 |     19 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      2 |      9 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3052000 |     595 |    295 |    145 |    16 |    0 |     6 |    7 |    1 |    13 |    0 |    112 |    0 |    0 |    0 |    0 |    309 |    286 |      43 |      13 |      13 |       8 |     19 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      0 |      3 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      2 |      0 |        6 |       15 |       28 |       34 |       24 |       14 |      14 |        5 |       20 |       32 |       46 |       25 |       18 |      14 |        5 |        9 |       17 |       13 |        7 |       21 |       7 |        3 |       10 |       10 |       14 |        6 |       12 |      11 |        6 |       19 |       18 |       17 |        8 |        4 |       0 |        5 |       10 |        8 |        8 |        3 |        4 |       2 |        2 |        6 |        6 |        3 |        4 |        2 |       0 |        1 |        5 |        7 |        5 |        1 |        1 |       0 |      0 |      2 |     38 |     42 |     14 |      7 |     10 |    182 |      0 |      0 |      2 |     13 |     19 |      8 |      3 |      6 |     94 |      0 |      0 |      1 |     17 |     16 |      5 |      3 |      3 |     67 |      0 |      0 |      0 |     10 |      6 |      3 |      2 |      1 |     21 |      0 |     37 | s03      | R    |
| 3054000 |     605 |    281 |    180 |    10 |    0 |     5 |    5 |    3 |     5 |    0 |    116 |    0 |    0 |    0 |    0 |    316 |    289 |      44 |      24 |      17 |       4 |     13 |     11 |      8 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |       0 |       0 |       1 |       0 |      5 |      0 |      0 |      0 |        6 |       21 |       38 |       33 |       20 |        8 |      10 |        8 |       24 |       37 |       34 |       16 |       11 |      15 |        4 |       15 |       30 |       17 |        8 |       11 |       6 |        3 |       17 |       21 |       16 |       10 |        7 |      15 |       11 |       16 |       21 |       16 |        6 |        2 |       0 |        6 |       16 |        8 |       10 |        2 |        0 |       2 |        2 |        4 |        5 |        3 |        2 |        1 |       0 |        1 |        8 |        1 |        1 |        0 |        0 |       0 |      0 |      5 |     41 |     34 |     13 |      8 |      8 |    172 |      0 |      0 |      1 |     24 |     25 |     10 |      8 |      5 |    107 |      0 |      0 |      6 |     19 |      8 |      3 |      0 |      4 |     76 |      0 |      0 |      1 |      2 |      7 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 3056000 |     278 |    140 |     63 |     7 |    0 |     7 |    1 |    2 |    11 |    0 |     47 |    0 |    0 |    0 |    0 |    129 |    149 |      26 |      11 |       5 |       7 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      2 |      0 |      2 |      1 |        3 |        9 |       12 |       18 |        3 |        5 |       3 |        4 |       17 |       15 |       22 |        9 |       11 |       9 |        0 |        7 |        4 |        8 |        2 |        6 |       3 |        1 |        2 |        8 |        6 |        3 |       10 |       3 |        2 |        9 |       10 |        7 |        0 |        1 |       0 |        1 |        9 |        3 |        3 |        1 |        1 |       0 |        3 |        6 |        5 |        3 |        0 |        0 |       0 |        0 |        4 |        3 |        2 |        0 |        2 |       0 |      0 |      1 |     17 |     10 |      4 |      5 |      2 |    101 |      0 |      0 |      1 |      7 |      6 |      0 |      2 |      1 |     46 |      0 |      0 |      0 |     12 |      4 |      0 |      0 |      0 |     31 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 3058000 |     736 |    368 |    183 |    18 |    0 |     9 |    7 |    6 |    15 |    0 |    130 |    0 |    0 |    0 |    0 |    330 |    406 |      42 |      13 |      15 |       4 |     22 |      7 |      5 |      5 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      2 |      2 |      1 |      2 |       1 |       0 |       1 |       0 |      2 |      2 |      4 |      0 |        4 |       24 |       40 |       38 |       16 |       15 |      12 |        9 |       39 |       54 |       53 |       27 |       22 |      15 |        5 |       12 |       25 |       16 |        9 |       17 |       7 |        2 |       14 |       17 |       13 |       13 |       20 |      13 |        7 |       15 |       20 |       15 |        5 |        2 |       0 |       13 |       15 |       19 |        8 |        9 |        2 |       0 |        3 |       11 |        3 |        7 |        2 |        0 |       0 |        3 |        7 |        6 |        8 |        3 |        2 |       0 |      0 |      5 |     54 |     50 |     13 |      9 |      9 |    228 |      0 |      0 |      0 |     20 |     27 |     15 |      4 |      5 |    112 |      0 |      0 |      2 |     18 |     12 |      5 |      0 |      3 |     90 |      0 |      0 |      0 |      3 |     21 |      2 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 3062000 |     405 |    172 |     95 |    13 |    0 |     7 |    2 |    6 |    16 |    0 |     94 |    0 |    0 |    0 |    0 |    207 |    198 |      19 |      10 |      13 |       7 |      9 |      4 |      7 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      3 |      0 |      2 |      0 |       0 |       0 |       0 |       1 |      1 |      3 |      1 |      1 |       10 |       12 |       22 |       23 |       13 |        1 |       1 |        5 |       20 |       18 |       27 |       12 |        5 |       3 |        1 |       12 |       14 |       12 |        6 |        7 |       5 |        1 |       10 |        6 |        6 |        3 |        6 |       6 |        6 |       20 |       13 |        6 |        3 |        0 |       0 |        8 |       20 |        9 |        4 |        4 |        1 |       0 |        2 |        6 |        7 |        4 |        1 |        0 |       0 |        2 |       10 |        5 |        4 |        3 |        0 |       0 |      0 |      1 |     26 |     24 |      6 |      5 |      1 |    109 |      0 |      0 |      2 |     10 |      4 |      3 |      2 |      3 |     71 |      0 |      0 |      1 |     11 |      5 |      2 |      1 |      0 |     74 |      0 |      0 |      1 |      4 |      5 |      2 |      0 |      1 |     31 |      0 |     37 | s03      | R    |
| 3064000 |     649 |    351 |    162 |    14 |    0 |     6 |    4 |    3 |    11 |    0 |     98 |    0 |    0 |    0 |    0 |    305 |    344 |      32 |      16 |       6 |       2 |     11 |      4 |      7 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       1 |      2 |      1 |      0 |      0 |        4 |       25 |       42 |       42 |       20 |       13 |      13 |        8 |       33 |       49 |       43 |       27 |       21 |      11 |        2 |       11 |       25 |       14 |        6 |       11 |       5 |        3 |       24 |       13 |       17 |        8 |       13 |      10 |        4 |       16 |       15 |       11 |        4 |        4 |       0 |        4 |       12 |       12 |        8 |        3 |        5 |       0 |        1 |        7 |        5 |        3 |        0 |        2 |       0 |        2 |        8 |        5 |        2 |        2 |        1 |       0 |      0 |      4 |     58 |     43 |     14 |      6 |     12 |    214 |      0 |      0 |      1 |     20 |     20 |      2 |      3 |      3 |    113 |      0 |      0 |      1 |     11 |     10 |      2 |      1 |      2 |     71 |      0 |      0 |      0 |      6 |      6 |      2 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 3066000 |     643 |    349 |    154 |    16 |    0 |     3 |    5 |    0 |    13 |    0 |    103 |    0 |    0 |    0 |    0 |    322 |    321 |      50 |      14 |      13 |       2 |     19 |      9 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      4 |      1 |      1 |        5 |       21 |       42 |       41 |       28 |       17 |       8 |        9 |       27 |       41 |       49 |       28 |       16 |      17 |        4 |       13 |       13 |       19 |       11 |       14 |       7 |        2 |        9 |       13 |       14 |        6 |       17 |      12 |        7 |       12 |       22 |       10 |        4 |        1 |       1 |        8 |        7 |       18 |       10 |        2 |        1 |       0 |        2 |        2 |        9 |        4 |        1 |        3 |       1 |        1 |        4 |        3 |        3 |        1 |        2 |       1 |      0 |      6 |     40 |     41 |     24 |     17 |      6 |    215 |      0 |      0 |      0 |     18 |     24 |      6 |      8 |      4 |     94 |      0 |      0 |      0 |     25 |     18 |      3 |      1 |      3 |     53 |      0 |      0 |      2 |      4 |      6 |      0 |      2 |      1 |     22 |      0 |     37 | s03      | R    |
| 3068000 |     350 |    149 |     79 |    11 |    0 |     7 |    8 |    6 |    17 |    0 |     73 |    0 |    0 |    0 |    0 |    162 |    188 |      26 |      14 |       9 |       5 |      2 |      1 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      1 |      1 |      0 |        5 |       15 |       16 |        9 |       10 |        3 |       0 |        9 |       24 |       20 |       22 |        8 |        7 |       1 |        6 |       10 |       11 |       10 |        1 |        4 |       1 |        5 |       10 |        7 |        4 |        5 |        5 |       0 |        7 |       13 |       11 |        5 |        2 |        1 |       0 |        7 |       15 |        5 |        2 |        5 |        0 |       0 |        2 |       14 |        2 |        4 |        0 |        0 |       0 |        8 |       13 |        3 |        3 |        0 |        0 |       0 |      0 |      1 |     20 |     13 |      5 |      3 |      0 |    107 |      0 |      0 |      0 |     13 |     10 |      5 |      0 |      3 |     48 |      0 |      0 |      0 |      7 |      5 |      0 |      1 |      0 |     60 |      0 |      0 |      0 |     10 |      3 |      1 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 3070000 |     565 |    264 |    121 |    15 |    0 |    14 |   10 |    8 |    15 |    0 |    118 |    0 |    0 |    0 |    0 |    283 |    282 |      45 |      23 |      24 |      10 |     13 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      5 |      2 |      1 |      0 |        3 |       24 |       39 |       29 |       11 |       11 |       5 |        5 |       37 |       29 |       32 |       17 |       11 |      11 |        6 |       13 |       11 |       12 |        9 |        7 |       4 |        5 |       18 |       10 |        6 |       11 |        7 |       2 |       10 |       16 |       20 |        7 |        4 |        2 |       0 |        9 |       13 |       13 |       12 |        7 |        5 |       0 |        2 |        8 |       15 |       10 |        3 |        2 |       0 |        3 |        7 |        3 |        3 |        5 |        1 |       0 |      0 |      3 |     41 |     37 |     19 |      9 |      6 |    149 |      0 |      0 |      0 |     16 |     14 |      3 |      2 |      1 |     85 |      0 |      0 |      1 |     23 |     12 |      6 |      1 |      1 |     74 |      0 |      0 |      0 |     12 |     14 |      1 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 3072000 |     479 |    252 |     88 |    12 |    0 |     5 |    9 |    4 |    12 |    0 |     97 |    0 |    0 |    0 |    0 |    232 |    247 |      58 |      15 |      22 |       3 |      9 |      3 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        7 |       21 |       23 |       25 |       18 |       10 |       7 |        7 |       33 |       27 |       35 |       23 |       12 |       4 |        1 |        6 |       19 |        9 |        7 |        5 |       2 |        0 |       10 |       13 |        6 |        5 |        4 |       1 |        7 |       15 |       15 |        6 |        7 |        0 |       0 |       13 |       14 |       13 |        6 |        1 |        0 |       0 |        1 |        7 |        8 |        2 |        3 |        1 |       0 |        1 |        7 |        4 |        2 |        1 |        4 |       1 |      0 |      6 |     27 |     38 |     10 |      5 |     10 |    156 |      0 |      0 |      3 |     13 |      9 |      4 |      0 |      3 |     56 |      0 |      0 |      0 |     11 |     10 |      3 |      0 |      1 |     72 |      0 |      0 |      1 |      6 |      5 |      2 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 3074000 |     675 |    321 |    141 |    16 |    0 |    13 |    6 |    6 |    20 |    0 |    152 |    0 |    0 |    0 |    0 |    335 |    340 |      97 |      41 |      36 |       8 |      5 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      2 |      4 |      0 |       13 |       41 |       40 |       28 |       13 |       14 |       7 |       20 |       46 |       31 |       24 |       21 |       10 |      13 |       12 |       28 |       20 |        7 |        7 |        3 |       3 |       10 |       18 |       10 |        9 |        6 |        5 |       3 |        6 |       33 |       15 |        6 |        2 |        3 |       1 |       21 |       29 |       18 |       11 |        6 |        1 |       0 |        4 |       13 |        9 |        2 |        5 |        0 |       0 |        1 |       11 |        7 |        5 |        1 |        3 |       0 |      0 |      3 |     54 |     39 |      7 |      5 |      3 |    210 |      0 |      0 |      4 |     13 |     14 |      3 |      1 |      4 |    102 |      0 |      0 |      2 |     22 |      8 |      2 |      2 |      0 |    116 |      0 |      0 |      1 |      9 |     10 |      1 |      0 |      0 |     40 |      0 |     37 | s03      | R    |
| 3074500 |     111 |     62 |     20 |     0 |    0 |     2 |    4 |    2 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     55 |     56 |       9 |       0 |       4 |       0 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |       12 |        8 |        4 |        1 |       1 |        1 |        3 |        9 |        9 |        7 |        4 |       2 |        0 |        4 |        5 |        1 |        1 |        1 |       1 |        0 |        2 |        0 |        2 |        1 |        2 |       0 |        0 |        3 |        3 |        5 |        2 |        0 |       0 |        1 |        3 |        0 |        3 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        3 |        1 |        1 |        0 |       0 |      0 |      0 |     10 |     11 |      2 |      3 |      1 |     35 |      0 |      0 |      0 |      5 |      3 |      0 |      1 |      0 |     11 |      0 |      0 |      0 |      3 |      3 |      0 |      2 |      0 |     13 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3075000 |     116 |     57 |     19 |     5 |    0 |     2 |    2 |    2 |     2 |    0 |     27 |    0 |    0 |    0 |    0 |     56 |     60 |      26 |      10 |      10 |       5 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        5 |        3 |        2 |        5 |       4 |        5 |        6 |        7 |        6 |        3 |        6 |       1 |        1 |        3 |        2 |        1 |        1 |        0 |       0 |        3 |        3 |        1 |        0 |        2 |        2 |       0 |        5 |        1 |        3 |        4 |        0 |        2 |       0 |        1 |        6 |        2 |        1 |        2 |        0 |       0 |        1 |        2 |        2 |        3 |        2 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |     10 |      3 |      3 |      0 |     37 |      0 |      0 |      1 |      4 |      5 |      1 |      2 |      0 |      6 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3076000 |     651 |    283 |    143 |    22 |    0 |     9 |   11 |    4 |    13 |    0 |    166 |    0 |    0 |    0 |    0 |    320 |    331 |      84 |      36 |      42 |      16 |     11 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      2 |      0 |        7 |       29 |       42 |       29 |       19 |       13 |       1 |       17 |       37 |       25 |       31 |       17 |       15 |       1 |        6 |       24 |       19 |       12 |        7 |        7 |       0 |       16 |       18 |       12 |       12 |        3 |        6 |       1 |        8 |       39 |       13 |        8 |        4 |        1 |       0 |       26 |       34 |       19 |        9 |        5 |        0 |       0 |        3 |       15 |        6 |        5 |        2 |        1 |       0 |        8 |       11 |        5 |        2 |        1 |        0 |       0 |      0 |      1 |     34 |     31 |      7 |      5 |      3 |    202 |      0 |      0 |      0 |     10 |      9 |      4 |      5 |      3 |    112 |      0 |      0 |      2 |     18 |     12 |      2 |      1 |      0 |    131 |      0 |      0 |      2 |      7 |      4 |      0 |      0 |      0 |     46 |      0 |     37 | s03      | R    |
| 3078000 |     572 |    256 |    162 |    11 |    0 |    12 |    9 |    1 |    18 |    0 |    103 |    0 |    0 |    0 |    0 |    281 |    291 |      59 |      26 |      18 |       6 |      8 |      4 |      5 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      5 |      0 |        5 |       14 |       27 |       26 |       16 |       12 |       7 |       17 |       24 |       30 |       35 |       20 |       15 |       8 |        4 |       15 |       22 |       16 |       13 |       14 |       5 |        5 |        8 |       17 |       11 |        6 |       21 |       5 |        5 |       17 |       11 |       16 |        3 |        1 |       1 |        3 |       18 |       17 |        3 |        4 |        4 |       0 |        1 |       10 |       12 |        7 |        0 |        0 |       1 |        2 |        9 |        4 |        1 |        3 |        1 |       0 |      0 |      2 |     36 |     37 |      8 |      3 |      3 |    167 |      0 |      0 |      0 |     21 |     27 |      6 |      4 |      7 |     97 |      0 |      0 |      0 |     13 |     10 |      4 |      1 |      1 |     74 |      0 |      0 |      1 |      5 |      5 |      1 |      0 |      0 |     39 |      0 |     37 | s03      | R    |
| 3080000 |     415 |    211 |     79 |    12 |    0 |     2 |    7 |    1 |    20 |    0 |     83 |    0 |    0 |    0 |    0 |    205 |    210 |      48 |      13 |       8 |       8 |      5 |      3 |      3 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        9 |       29 |       28 |       13 |       11 |       7 |        4 |       18 |       28 |       33 |        9 |        9 |      11 |        0 |        8 |       10 |       15 |        2 |        8 |       1 |        2 |       10 |        7 |        5 |        5 |        4 |       2 |        0 |       12 |        8 |        9 |        6 |        2 |       1 |       11 |        7 |        9 |       11 |        3 |        3 |       1 |        1 |       11 |        6 |        4 |        2 |        0 |       0 |        3 |        8 |        3 |        2 |        1 |        1 |       0 |      0 |      0 |     29 |     27 |      9 |      9 |      3 |    134 |      0 |      0 |      0 |     10 |     13 |      3 |      5 |      3 |     45 |      0 |      0 |      0 |      7 |      7 |      1 |      4 |      0 |     64 |      0 |      0 |      1 |     10 |      6 |      0 |      1 |      0 |     24 |      0 |     37 | s03      | R    |
| 3082000 |     326 |    179 |     58 |     6 |    0 |     4 |    2 |    3 |    12 |    0 |     62 |    0 |    0 |    0 |    0 |    161 |    165 |      20 |       6 |       8 |       0 |     12 |      1 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        2 |       11 |       32 |       21 |       12 |        5 |       2 |        3 |       27 |       21 |       21 |       11 |        3 |       8 |        1 |        4 |       10 |        6 |        4 |        6 |       1 |        5 |        5 |        3 |        6 |        3 |        1 |       3 |        2 |        9 |        7 |        8 |        3 |        2 |       0 |        5 |       16 |        4 |        2 |        3 |        1 |       0 |        1 |        4 |        5 |        1 |        0 |        1 |       1 |        1 |        5 |        5 |        0 |        2 |        1 |       0 |      0 |      1 |     23 |     28 |      9 |      6 |      2 |    110 |      0 |      0 |      0 |      6 |      8 |      1 |      2 |      3 |     38 |      0 |      0 |      1 |      7 |      3 |      2 |      2 |      0 |     47 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 3086000 |     663 |    336 |    141 |    14 |    0 |     9 |   12 |    2 |    21 |    0 |    128 |    0 |    0 |    0 |    0 |    341 |    322 |      33 |       7 |       9 |       2 |     15 |      9 |      4 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      1 |      0 |      3 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      3 |      2 |      0 |      0 |        6 |       22 |       42 |       41 |       28 |       10 |      12 |        7 |       34 |       37 |       43 |       22 |       23 |       9 |        5 |       12 |       20 |       18 |        9 |        9 |       1 |        8 |        4 |       18 |        9 |        7 |       17 |       4 |       13 |       22 |       11 |       16 |        8 |        1 |       2 |        9 |       16 |       13 |       15 |        0 |        0 |       2 |        4 |        8 |       10 |        4 |        3 |        4 |       0 |        2 |        7 |       11 |        3 |        0 |        2 |       0 |      0 |      3 |     46 |     58 |     16 |     11 |      9 |    193 |      0 |      0 |      0 |     26 |     24 |      5 |      5 |      4 |     77 |      0 |      0 |      1 |     16 |     16 |      5 |      4 |      5 |     81 |      0 |      0 |      0 |     11 |     10 |      2 |      1 |      0 |     34 |      0 |     37 | s03      | R    |
| 3088000 |     473 |    221 |    121 |    11 |    0 |     7 |    4 |    1 |    22 |    0 |     86 |    0 |    0 |    0 |    0 |    233 |    240 |      43 |      11 |       9 |       6 |     10 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      2 |      2 |      0 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      3 |      0 |      0 |      1 |        6 |       17 |       28 |       35 |       10 |        4 |       5 |        2 |       21 |       30 |       19 |       20 |       12 |      12 |        1 |        9 |       16 |       14 |        6 |        9 |       3 |        1 |        8 |       20 |       15 |        6 |        5 |       8 |        2 |       17 |       11 |       10 |        6 |        2 |       0 |        1 |       19 |        5 |        8 |        3 |        2 |       0 |        1 |        5 |       10 |        3 |        1 |        2 |       0 |        1 |       10 |        6 |        3 |        2 |        1 |       0 |      0 |      0 |     24 |     32 |      9 |      4 |      3 |    149 |      0 |      0 |      1 |     18 |     12 |      9 |      5 |      3 |     73 |      0 |      0 |      1 |      7 |      8 |      1 |      2 |      2 |     65 |      0 |      0 |      0 |      4 |      7 |      1 |      0 |      1 |     32 |      0 |     37 | s03      | R    |
| 3100000 |       4 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3101000 |      31 |     10 |     14 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     21 |     10 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        1 |        0 |        0 |        1 |        0 |       0 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |        3 |        4 |        1 |        2 |        0 |        0 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3102000 |       6 |      4 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      2 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3150000 |     372 |    179 |     84 |    11 |    0 |     3 |    4 |    2 |    14 |    0 |     75 |    0 |    0 |    0 |    0 |    209 |    163 |      11 |       7 |       4 |       3 |      8 |     11 |      6 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      1 |      0 |      0 |        1 |       31 |       27 |       16 |       15 |       11 |       2 |        3 |       21 |       15 |        7 |       12 |       15 |       3 |        4 |       10 |       12 |        7 |        4 |       10 |       0 |        2 |        6 |        5 |        5 |        8 |       11 |       0 |        2 |       13 |       14 |        5 |        2 |        2 |       0 |        4 |       12 |        8 |        8 |        1 |        3 |       1 |        3 |        8 |        8 |        0 |        2 |        0 |       0 |        1 |        5 |        0 |        6 |        1 |        0 |       0 |      0 |      2 |     19 |     27 |      5 |      3 |      5 |    118 |      0 |      0 |      1 |      9 |      7 |      1 |      2 |      0 |     64 |      0 |      0 |      1 |      9 |      2 |      1 |      0 |      0 |     62 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 3151000 |     783 |    332 |    195 |    16 |    0 |    15 |    9 |    3 |    16 |    0 |    197 |    0 |    0 |    0 |    0 |    392 |    391 |      29 |      11 |      12 |       4 |     18 |     11 |     11 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       1 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |       10 |       39 |       38 |       44 |       17 |       19 |       4 |       11 |       60 |       24 |       27 |       17 |       17 |       5 |        4 |       23 |       18 |       11 |       13 |       20 |       2 |        9 |       24 |       15 |       11 |       11 |       31 |       3 |       11 |       40 |       21 |       16 |        6 |        6 |       2 |       13 |       51 |       10 |       12 |        6 |        2 |       1 |        4 |       12 |        5 |        2 |        2 |        3 |       0 |        8 |       15 |        2 |        3 |        2 |        1 |       0 |      0 |      5 |     25 |     31 |      7 |      3 |      6 |    255 |      0 |      0 |      2 |     19 |     24 |      7 |      4 |      3 |    136 |      0 |      0 |      0 |     19 |     16 |      2 |      3 |      1 |    156 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      0 |     49 |      0 |     37 | s03      | R    |
| 3151100 |     240 |     83 |    100 |     2 |    0 |     2 |    3 |    0 |     2 |    0 |     48 |    0 |    0 |    0 |    0 |    133 |    107 |       6 |       2 |       4 |       2 |      1 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |       11 |       11 |        8 |       10 |        7 |       0 |        1 |        7 |        5 |        6 |        4 |       11 |       2 |        0 |        7 |        9 |        8 |       10 |       21 |       1 |        2 |        8 |        3 |        6 |        8 |       16 |       1 |        1 |        8 |        6 |        4 |        5 |        0 |       0 |        4 |        9 |        2 |        4 |        4 |        1 |       0 |        0 |        2 |        1 |        0 |        2 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      2 |     20 |      6 |      4 |      1 |      1 |     49 |      0 |      0 |      1 |     23 |     10 |     10 |      4 |      3 |     49 |      0 |      0 |      1 |      6 |      0 |      1 |      0 |      0 |     40 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 3152000 |     568 |    234 |    179 |    17 |    0 |     2 |    5 |    1 |    14 |    0 |    116 |    0 |    0 |    0 |    0 |    235 |    333 |      11 |       7 |      10 |       1 |     29 |      4 |     11 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        3 |       21 |       19 |       19 |       15 |       23 |       2 |        3 |       30 |       12 |       12 |       14 |       58 |       3 |        1 |       15 |        4 |        3 |        5 |       34 |       2 |        2 |        9 |        5 |        8 |        2 |       84 |       5 |        5 |       12 |       15 |        6 |        5 |        7 |       0 |        9 |       19 |        9 |       10 |        8 |       10 |       1 |        3 |        7 |        5 |        1 |        1 |        2 |       0 |        2 |       11 |        2 |        3 |        1 |        1 |       0 |      0 |      1 |     25 |     31 |      8 |      3 |      2 |    164 |      0 |      0 |      0 |     27 |     17 |      4 |      5 |      1 |    125 |      0 |      0 |      1 |     10 |      9 |      3 |      1 |      0 |     92 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 3153000 |     768 |    314 |    207 |    20 |    0 |    10 |    7 |    5 |    16 |    0 |    189 |    0 |    0 |    0 |    0 |    369 |    399 |      28 |       7 |      10 |       4 |     22 |      5 |     11 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      4 |      0 |      0 |      0 |      2 |      1 |      0 |       1 |       0 |       1 |       0 |      1 |      1 |      3 |      0 |        6 |       29 |       35 |       26 |       18 |       21 |       1 |        8 |       54 |       24 |       33 |       14 |       43 |       2 |        4 |       22 |       23 |       16 |       17 |       21 |       1 |        9 |       24 |        7 |       10 |       13 |       39 |       1 |        6 |       39 |       20 |       14 |       15 |        2 |       1 |       13 |       52 |        9 |        7 |        5 |        5 |       1 |        4 |       12 |        7 |        6 |        2 |        1 |       0 |        6 |        9 |        2 |        1 |        2 |        6 |       0 |      0 |      0 |     39 |     32 |      4 |      5 |      3 |    231 |      0 |      0 |      2 |     29 |      7 |      4 |      0 |      0 |    165 |      0 |      0 |      4 |     14 |     10 |      2 |      0 |      0 |    159 |      0 |      0 |      0 |      6 |      8 |      0 |      0 |      0 |     44 |      0 |     37 | s03      | R    |
| 3153100 |     770 |    331 |    185 |    23 |    0 |    12 |    7 |    9 |    17 |    0 |    186 |    0 |    0 |    0 |    0 |    394 |    376 |      49 |      17 |      14 |       6 |     11 |      5 |     17 |      4 |      5 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      4 |      2 |      3 |      1 |      0 |      0 |      2 |      0 |       2 |       0 |       0 |       0 |      3 |      3 |      2 |      0 |        6 |       31 |       25 |       24 |       21 |       46 |       2 |       17 |       53 |       27 |       26 |       17 |       34 |       2 |        9 |       24 |       19 |       12 |       10 |       37 |       2 |        8 |       18 |        5 |        9 |       13 |       18 |       1 |       11 |       33 |       19 |       11 |        2 |       16 |       0 |       14 |       39 |       15 |        6 |        7 |       13 |       0 |        2 |        7 |        7 |        7 |        4 |        7 |       0 |        3 |       16 |        2 |        2 |        5 |        5 |       1 |      0 |      2 |     29 |     36 |      2 |      5 |      2 |    255 |      0 |      0 |      0 |     18 |     24 |      4 |      4 |      6 |    129 |      0 |      0 |      0 |     13 |     11 |      0 |      0 |      2 |    160 |      0 |      0 |      0 |      8 |     11 |      2 |      0 |      0 |     47 |      0 |     37 | s03      | R    |
| 3154000 |     237 |    111 |     87 |     2 |    0 |     0 |    1 |    0 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |    117 |    120 |       6 |       1 |       0 |       0 |     12 |      2 |      4 |      1 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        2 |       10 |       12 |       14 |        8 |       2 |        2 |        7 |       10 |       15 |       11 |       11 |       6 |        4 |        2 |        9 |        7 |        7 |       13 |       3 |        0 |        0 |        8 |        8 |        8 |       16 |       2 |        2 |        5 |        3 |        5 |        4 |        0 |       0 |        2 |        3 |        3 |        1 |        4 |        1 |       1 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     11 |     14 |      3 |      6 |      6 |     71 |      0 |      0 |      0 |      5 |     12 |      2 |      7 |      3 |     58 |      0 |      0 |      0 |      3 |      4 |      2 |      1 |      1 |     23 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3156000 |     496 |    217 |    162 |     9 |    0 |     6 |    2 |    0 |    12 |    0 |     88 |    0 |    0 |    0 |    0 |    246 |    250 |      28 |       6 |       9 |       1 |      8 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        4 |        8 |       21 |       26 |       26 |       14 |      14 |        5 |       11 |       14 |       28 |       15 |       16 |      15 |        2 |       10 |       14 |       10 |       18 |       21 |       5 |        4 |       10 |       16 |       15 |       16 |        8 |      13 |        5 |        7 |       14 |        8 |        4 |        2 |       2 |        8 |        9 |        7 |       10 |        7 |        4 |       1 |        0 |        5 |        2 |        4 |        0 |        0 |       0 |        3 |        4 |        2 |        0 |        5 |        4 |       0 |      0 |      1 |     27 |     28 |     10 |      7 |     12 |    132 |      0 |      0 |      1 |     12 |     33 |      6 |      3 |      3 |    104 |      0 |      0 |      2 |     14 |     10 |      3 |      1 |      2 |     56 |      0 |      0 |      1 |      4 |      4 |      4 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 3157000 |     260 |    123 |     64 |     3 |    0 |     1 |    2 |    3 |     6 |    0 |     58 |    0 |    0 |    0 |    0 |    134 |    126 |       9 |       1 |       3 |       0 |     17 |      8 |     10 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      1 |      1 |      0 |        3 |        9 |       16 |       13 |       14 |        5 |       2 |        3 |       15 |        8 |        9 |       11 |       14 |       1 |        0 |        6 |        4 |        3 |        8 |       14 |       2 |        0 |        4 |        3 |        2 |        8 |        8 |       2 |        1 |        6 |        5 |        7 |        6 |        7 |       0 |        4 |        6 |        3 |        2 |        8 |        3 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        2 |        4 |        3 |        0 |        3 |        0 |       0 |      0 |      2 |     14 |     11 |      1 |      4 |      4 |     87 |      0 |      0 |      0 |      5 |      7 |      2 |      0 |      4 |     46 |      0 |      0 |      0 |     14 |      3 |      2 |      2 |      0 |     37 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3157100 |      16 |      9 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |      7 |      9 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3166000 |     312 |    108 |    111 |     9 |    0 |     4 |    4 |    0 |     7 |    0 |     69 |    0 |    0 |    0 |    0 |    176 |    136 |      10 |       8 |       4 |       1 |      6 |      4 |      4 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      1 |        5 |       11 |       15 |       15 |        5 |        6 |       0 |        5 |       19 |        7 |        7 |       10 |        3 |       0 |        6 |       19 |       17 |       14 |        8 |        5 |       0 |        6 |       11 |        8 |        7 |        7 |        3 |       0 |        2 |       21 |        9 |        4 |        2 |        1 |       0 |        7 |       12 |        5 |        3 |        2 |        1 |       0 |        3 |        2 |        2 |        1 |        1 |        2 |       0 |        3 |        6 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |      7 |      1 |      2 |      0 |      1 |     96 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |    100 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     63 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 3166100 |       4 |      3 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3167000 |     254 |     93 |     69 |     8 |    0 |     5 |    3 |    0 |     8 |    0 |     68 |    0 |    0 |    0 |    0 |    146 |    108 |      12 |       5 |       3 |       2 |      6 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |       20 |        6 |        5 |        6 |        1 |       1 |        6 |       19 |        5 |        8 |        4 |        6 |       2 |        3 |       20 |        9 |        8 |        3 |        1 |       0 |        4 |       11 |        6 |        2 |        1 |        1 |       0 |        5 |       21 |        4 |        5 |        5 |        1 |       0 |        7 |       11 |        5 |        3 |        1 |        0 |       0 |        1 |        9 |        5 |        2 |        1 |        0 |       0 |        2 |        4 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      5 |      6 |      1 |      0 |     74 |      0 |      0 |      0 |      4 |      6 |      0 |      1 |      0 |     58 |      0 |      0 |      0 |      4 |      3 |      1 |      1 |      0 |     59 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 3168000 |      71 |     31 |     14 |     6 |    0 |     1 |    0 |    0 |     3 |    0 |     16 |    0 |    0 |    0 |    0 |     43 |     28 |      13 |       2 |       2 |       2 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        5 |        4 |        4 |        3 |        4 |       0 |        1 |        3 |        2 |        3 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        2 |       1 |        0 |        4 |        0 |        0 |        1 |        1 |       0 |        0 |        2 |        5 |        0 |        1 |        0 |       0 |        4 |        4 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        1 |        0 |       0 |        1 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      2 |      1 |      0 |     23 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3169000 |       7 |      1 |      4 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      5 |      2 |       1 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     37 | s03      | R    |
| 3170000 |     222 |     97 |     71 |     2 |    0 |     1 |    1 |    1 |     0 |    0 |     49 |    0 |    0 |    0 |    0 |    115 |    107 |      10 |       3 |       8 |       0 |      6 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |       14 |       11 |        4 |        8 |       13 |       4 |        0 |       13 |        6 |        6 |        6 |        8 |       3 |        1 |        2 |        5 |        5 |        7 |       10 |       3 |        3 |       10 |        4 |        5 |        8 |        5 |       3 |        4 |        8 |        5 |        4 |        3 |        0 |       0 |        6 |        8 |        2 |        6 |        2 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      9 |     15 |      0 |      3 |      5 |     65 |      0 |      0 |      0 |      9 |     11 |      4 |      2 |      1 |     44 |      0 |      0 |      1 |      9 |      3 |      0 |      1 |      3 |     32 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 3170100 |     166 |     57 |     72 |     8 |    0 |     5 |    2 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     87 |     79 |       3 |       5 |       3 |       1 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      2 |        1 |        2 |        6 |        6 |        4 |        5 |       3 |        2 |        2 |        3 |        6 |        6 |        5 |       6 |        4 |        6 |        7 |        7 |        7 |        6 |       1 |        0 |        4 |        7 |        7 |        9 |        3 |       4 |        1 |        3 |        2 |        1 |        4 |        2 |       1 |        0 |        5 |        0 |        2 |        0 |        1 |       0 |        1 |        2 |        1 |        2 |        2 |        0 |       0 |        1 |        1 |        0 |        2 |        2 |        0 |       1 |      0 |      0 |      8 |      5 |      1 |      1 |      1 |     41 |      0 |      0 |      1 |      7 |      8 |      4 |      1 |      2 |     49 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     19 |      0 |      0 |      0 |      2 |      3 |      0 |      2 |      1 |      7 |      0 |     37 | s03      | R    |
| 3170200 |     200 |    109 |     48 |     4 |    0 |     1 |    2 |    2 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |    100 |    100 |      18 |       4 |       1 |       1 |      3 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |       10 |       16 |       12 |        8 |        6 |       3 |        1 |       12 |        9 |       12 |        7 |        8 |       4 |        1 |        5 |        7 |        6 |        3 |        3 |       1 |        3 |        7 |        4 |        3 |        1 |        2 |       2 |        0 |        4 |        4 |        4 |        0 |        1 |       0 |        8 |        8 |        2 |        1 |        0 |        1 |       0 |        2 |        1 |        0 |        0 |        2 |        0 |       0 |        1 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     13 |      6 |      4 |      2 |      5 |     78 |      0 |      0 |      0 |      6 |      5 |      2 |      1 |      1 |     33 |      0 |      0 |      1 |      5 |      1 |      0 |      3 |      1 |     22 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3172000 |     600 |    212 |    219 |    14 |    0 |     8 |    6 |    2 |     9 |    0 |    130 |    0 |    0 |    0 |    0 |    305 |    295 |      23 |       9 |       4 |       2 |      8 |     12 |     10 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      3 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        4 |       19 |       22 |       20 |       14 |       17 |       1 |        5 |       23 |       26 |       25 |       22 |        8 |       6 |        3 |       33 |       32 |       15 |       23 |       20 |       3 |        4 |       25 |       13 |       13 |       14 |       16 |       5 |        1 |       20 |       13 |       12 |        7 |        5 |       0 |        4 |       27 |       11 |       15 |        9 |        5 |       1 |        3 |        4 |        3 |        4 |        4 |        3 |       0 |        1 |        3 |        6 |        4 |        2 |        2 |       0 |      0 |      1 |     21 |     25 |     12 |      5 |      5 |    143 |      0 |      0 |      0 |     29 |     30 |     20 |      8 |      2 |    130 |      0 |      0 |      1 |     16 |      9 |      4 |      1 |      1 |     98 |      0 |      0 |      1 |      1 |     11 |      0 |      0 |      1 |     25 |      0 |     37 | s03      | R    |
| 3174000 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3200000 |       5 |      0 |      2 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      1 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3201700 |       5 |      0 |      2 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      5 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3201800 |      61 |     19 |     30 |     0 |    0 |     0 |    0 |    0 |     2 |    0 |     10 |    0 |    0 |    0 |    0 |     35 |     26 |       1 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        5 |        2 |       0 |        0 |        0 |        2 |        2 |        1 |        2 |       0 |        0 |        2 |        1 |        4 |        5 |        3 |       0 |        2 |        4 |        5 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        4 |        1 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      0 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3202000 |      78 |     25 |     23 |     0 |    0 |     0 |    1 |    1 |     2 |    0 |     26 |    0 |    0 |    0 |    0 |     56 |     22 |       1 |       0 |       3 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |       10 |        4 |        4 |        0 |        1 |        0 |       0 |        3 |        2 |        0 |        0 |        1 |        0 |       0 |        4 |        5 |        0 |        3 |        2 |        0 |       0 |        5 |        0 |        1 |        0 |        3 |        0 |       0 |        9 |        4 |        1 |        3 |        3 |        1 |       0 |        4 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3203100 |     177 |     63 |     50 |     7 |    0 |     1 |    2 |    1 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |    152 |     25 |      10 |       3 |       6 |       0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      1 |       41 |       14 |        1 |        0 |        0 |        0 |       0 |        5 |        2 |        0 |        0 |        0 |        0 |       0 |       27 |       15 |        0 |        3 |        0 |        0 |       0 |        5 |        0 |        0 |        0 |        0 |        0 |       0 |       23 |       14 |        4 |        0 |        0 |        0 |       0 |        8 |        1 |        0 |        1 |        0 |        0 |       0 |        5 |        5 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     60 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |     46 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |     43 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3207000 |     281 |     70 |    130 |     9 |    0 |     3 |    6 |    1 |     4 |    0 |     58 |    0 |    0 |    0 |    0 |    185 |     96 |       1 |       3 |       1 |       0 |      3 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        3 |        9 |       14 |        9 |        4 |       1 |        0 |        2 |        5 |       12 |        6 |        4 |       0 |        1 |        4 |        5 |       20 |       33 |       23 |       0 |        1 |        4 |        6 |       10 |       18 |        5 |       0 |        1 |        5 |        4 |       18 |        9 |        3 |       0 |        0 |        6 |        4 |        4 |        3 |        1 |       0 |        2 |        2 |        5 |        6 |        2 |        0 |       1 |        0 |        0 |        1 |        1 |        3 |        0 |       0 |      0 |      1 |      9 |     12 |      3 |      1 |      0 |     44 |      0 |      0 |      1 |     26 |     20 |      5 |      2 |      4 |     72 |      0 |      0 |      0 |      9 |      6 |      3 |      0 |      1 |     39 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 3207100 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3209000 |      27 |     10 |     13 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     21 |      6 |       2 |       3 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        2 |        2 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        3 |        2 |        3 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3209100 |       8 |      2 |      4 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      6 |      2 |       0 |       0 |       1 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3210000 |      67 |     25 |     26 |     5 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     25 |     42 |       4 |       4 |       3 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        3 |        1 |        2 |        0 |        0 |       0 |        3 |       10 |        2 |        2 |        1 |        0 |       0 |        3 |        4 |        0 |        0 |        2 |        0 |       0 |        7 |        6 |        0 |        2 |        1 |        1 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |        1 |        4 |        1 |        0 |        1 |        0 |       0 |        1 |        1 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3210100 |      63 |     13 |     31 |     4 |    0 |     1 |    0 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     49 |     14 |       0 |       6 |       5 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      1 |        5 |        6 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |       10 |       12 |        0 |        2 |        0 |        0 |       0 |        4 |        2 |        0 |        1 |        0 |        0 |       0 |        2 |        4 |        2 |        0 |        0 |        0 |       0 |        0 |        6 |        0 |        0 |        0 |        0 |       0 |        2 |        3 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3250000 |     532 |    147 |    275 |    13 |    0 |     7 |    2 |    1 |     4 |    0 |     83 |    0 |    0 |    0 |    0 |    247 |    285 |       9 |       7 |       2 |       0 |      8 |     15 |      2 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |        6 |       12 |       18 |       15 |        7 |       4 |        4 |        6 |       16 |       20 |       19 |       12 |       5 |       10 |       14 |       14 |       30 |       28 |       21 |      18 |        7 |       14 |       25 |       23 |       28 |       24 |      19 |        6 |        7 |        6 |        8 |        5 |        3 |       0 |       11 |        9 |        6 |        8 |       11 |        3 |       0 |        0 |        2 |        4 |        1 |        3 |        2 |       0 |        3 |        2 |        3 |        5 |        1 |        1 |       0 |      0 |      1 |     21 |     12 |      9 |      7 |     15 |     82 |      0 |      0 |      0 |     24 |     40 |      9 |     10 |     18 |    174 |      0 |      0 |      0 |     11 |     10 |      5 |      1 |      1 |     55 |      0 |      0 |      0 |      3 |      9 |      2 |      2 |      0 |     11 |      0 |     37 | s03      | R    |
| 3253000 |     492 |    124 |    288 |     4 |    0 |     4 |    2 |    2 |     4 |    0 |     64 |    0 |    0 |    0 |    0 |    230 |    262 |       9 |      10 |       3 |       2 |     11 |     14 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      5 |      1 |      0 |        5 |        8 |        8 |       13 |       12 |        4 |       3 |        1 |        4 |       19 |       20 |       16 |        7 |       4 |       11 |        6 |       21 |       24 |       25 |       30 |      15 |        7 |       10 |       31 |       30 |       23 |       33 |      22 |        4 |        6 |        3 |       10 |        9 |        4 |       2 |        4 |        4 |        5 |        5 |        6 |        2 |       0 |        0 |        1 |        1 |        2 |        1 |        2 |       0 |        0 |        3 |        1 |        4 |        1 |        0 |       0 |      0 |      1 |     23 |     19 |      4 |      5 |      4 |     68 |      0 |      0 |      1 |     21 |     46 |      7 |     13 |     20 |    180 |      0 |      0 |      0 |     11 |      8 |      2 |      2 |      3 |     38 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 3253100 |     571 |    188 |    260 |    12 |    0 |     6 |    6 |    2 |     5 |    0 |     92 |    0 |    0 |    0 |    0 |    268 |    303 |      14 |      10 |       5 |       1 |      7 |      8 |      9 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      6 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      0 |      0 |        7 |        9 |       14 |       15 |       12 |        9 |      12 |        3 |       15 |       17 |       26 |       15 |       18 |      16 |        9 |       11 |       20 |       32 |       13 |       24 |      14 |        8 |       11 |       20 |       29 |       13 |       28 |      28 |        5 |       13 |       11 |        9 |        7 |        2 |       1 |        5 |       13 |        7 |        9 |        5 |        5 |       0 |        3 |        2 |        5 |        3 |        4 |        2 |       0 |        0 |        3 |        2 |        3 |        2 |        2 |       0 |      0 |      2 |     27 |     26 |      4 |      4 |     10 |    115 |      0 |      0 |      0 |     23 |     42 |      6 |      9 |      7 |    173 |      0 |      0 |      2 |     16 |      7 |      2 |      2 |      4 |     59 |      0 |      0 |      1 |      5 |      7 |      1 |      2 |      1 |     14 |      0 |     37 | s03      | R    |
| 3255100 |     453 |    148 |    183 |    11 |    0 |     6 |    5 |    2 |     4 |    0 |     94 |    0 |    0 |    0 |    0 |    218 |    235 |      18 |      21 |       9 |       2 |      6 |      6 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      1 |       0 |       0 |       0 |       0 |      5 |      1 |      1 |      1 |        5 |       10 |       16 |       12 |        6 |       10 |       2 |        5 |       18 |       17 |       13 |       14 |       13 |       7 |        5 |       22 |       19 |       15 |        7 |       18 |       2 |        4 |       17 |       19 |       11 |       19 |       18 |       7 |        5 |       20 |        8 |        8 |        5 |        5 |       1 |        9 |       12 |        4 |        6 |        9 |        1 |       1 |        2 |        8 |        1 |        4 |        1 |        0 |       1 |        0 |        2 |        3 |        4 |        0 |        2 |       0 |      0 |      2 |     13 |     25 |      4 |      6 |      2 |     96 |      0 |      0 |      1 |     25 |     27 |      6 |      8 |      2 |    114 |      0 |      0 |      1 |     16 |     10 |      4 |      1 |      1 |     61 |      0 |      0 |      1 |      1 |      6 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 3256000 |     467 |    164 |    169 |    14 |    0 |     8 |    3 |    4 |     8 |    0 |     97 |    0 |    0 |    0 |    0 |    231 |    236 |      18 |      13 |       8 |       1 |      6 |      5 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      0 |      0 |      1 |       0 |       2 |       0 |       0 |      8 |      2 |      3 |      0 |        4 |        9 |       15 |       12 |        7 |       17 |       2 |       10 |       12 |       20 |       23 |        9 |       16 |       8 |        8 |       16 |       23 |       24 |        6 |        6 |       1 |       11 |       19 |       20 |       19 |        7 |        7 |       2 |        9 |       16 |       15 |       10 |        5 |        1 |       0 |        9 |       13 |        8 |        5 |        4 |        1 |       1 |        7 |        7 |        4 |        3 |        3 |        1 |       0 |        1 |        6 |        1 |        4 |        0 |        0 |       0 |      0 |      1 |     20 |     22 |      3 |      1 |      2 |    115 |      0 |      0 |      1 |     18 |     24 |      5 |      2 |      4 |    115 |      0 |      0 |      1 |     12 |      9 |      1 |      0 |      0 |     74 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 3258000 |     533 |    211 |    197 |    11 |    0 |     3 |    8 |    2 |     8 |    0 |     93 |    0 |    0 |    0 |    0 |    239 |    294 |      26 |       8 |       3 |       2 |      7 |      6 |      4 |      2 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      6 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |     19 |      2 |      1 |      0 |        4 |       18 |       14 |       15 |       12 |       13 |       8 |        4 |       17 |       17 |       18 |       17 |       32 |      22 |        3 |       17 |       19 |       21 |       15 |       18 |       2 |        8 |       17 |       16 |       15 |       15 |       28 |       3 |        3 |       16 |        7 |       12 |        5 |        3 |       0 |        8 |       15 |       10 |        8 |        3 |        3 |       0 |        3 |        4 |        3 |        3 |        1 |        0 |       0 |        2 |        4 |        3 |        6 |        3 |        0 |       0 |      0 |      1 |     27 |     22 |      5 |      3 |      7 |    146 |      0 |      0 |      1 |     19 |     35 |      7 |      6 |      5 |    124 |      0 |      0 |      0 |     13 |      6 |      3 |      0 |      0 |     71 |      0 |      0 |      0 |      7 |      3 |      2 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 3262000 |     426 |    107 |    245 |     3 |    0 |     2 |    4 |    2 |     1 |    0 |     62 |    0 |    0 |    0 |    0 |    208 |    218 |       7 |       7 |       2 |       2 |     12 |     10 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      2 |      0 |      0 |        4 |        4 |        8 |       10 |        9 |        4 |       7 |        2 |        6 |       15 |       12 |       11 |        7 |       8 |        5 |       13 |       20 |       21 |       21 |       27 |      17 |        7 |       15 |       16 |       23 |       16 |       26 |      18 |        6 |        3 |        5 |       12 |        1 |        4 |       1 |        4 |        4 |        7 |        7 |        4 |        3 |       1 |        0 |        0 |        4 |        1 |        0 |        1 |       0 |        1 |        1 |        1 |        1 |        0 |        2 |       0 |      0 |      1 |     14 |     16 |      7 |      5 |      7 |     57 |      0 |      0 |      0 |     21 |     29 |     17 |     12 |     15 |    151 |      0 |      0 |      0 |      8 |      7 |      3 |      0 |      2 |     42 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3263000 |     357 |    107 |    193 |     2 |    0 |     2 |    4 |    0 |     2 |    0 |     47 |    0 |    0 |    0 |    0 |    168 |    189 |       1 |       6 |       1 |       0 |      7 |      9 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        3 |       10 |       15 |        6 |        4 |       9 |        2 |        8 |        9 |       15 |        8 |        9 |       9 |        7 |        7 |       16 |       17 |       22 |       17 |      14 |        2 |       10 |       15 |       11 |       19 |       26 |      10 |        1 |        3 |        6 |        5 |        0 |        1 |       0 |        2 |        6 |       12 |        9 |        0 |        2 |       0 |        2 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        2 |       0 |      0 |      0 |     15 |     15 |      1 |      2 |      1 |     73 |      0 |      0 |      1 |     24 |     23 |     12 |      8 |     14 |    111 |      0 |      0 |      0 |      3 |      9 |      0 |      2 |      0 |     33 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3264000 |     253 |     81 |    121 |     4 |    0 |     3 |    1 |    2 |     3 |    0 |     38 |    0 |    0 |    0 |    0 |    122 |    131 |       4 |       5 |       0 |       2 |      4 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        3 |        1 |        5 |        7 |        4 |        3 |       6 |        2 |        2 |       10 |       19 |        7 |        8 |       4 |        4 |        7 |        7 |       18 |       16 |        8 |       5 |        4 |        4 |       12 |        9 |       16 |        6 |       5 |        3 |        4 |        6 |        2 |        3 |        1 |       0 |        4 |        5 |        5 |        1 |        4 |        0 |       0 |        0 |        2 |        1 |        5 |        0 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      1 |      8 |      7 |      5 |      3 |      2 |     55 |      0 |      0 |      1 |     15 |     15 |      2 |      9 |      7 |     72 |      0 |      0 |      0 |     12 |      1 |      3 |      0 |      0 |     22 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 3265000 |     395 |    159 |    158 |    10 |    0 |     2 |    2 |    1 |     4 |    0 |     59 |    0 |    0 |    0 |    0 |    192 |    203 |       9 |       7 |       2 |       2 |      8 |      5 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      3 |      1 |        0 |       13 |       16 |       16 |        9 |       12 |       7 |        5 |       10 |       14 |       17 |       16 |       13 |      11 |        5 |       10 |        9 |       24 |        6 |       17 |       8 |        3 |        9 |       15 |       18 |        6 |       20 |       8 |        5 |        7 |        4 |        6 |        2 |        5 |       1 |        6 |        7 |        7 |        5 |        0 |        4 |       0 |        1 |        3 |        3 |        2 |        0 |        0 |       1 |        2 |        2 |        2 |        0 |        2 |        1 |       0 |      0 |      2 |     20 |     19 |     10 |      1 |      4 |    103 |      0 |      0 |      2 |     16 |     21 |      5 |      5 |      5 |    104 |      0 |      0 |      0 |     12 |     12 |      0 |      1 |      2 |     32 |      0 |      0 |      1 |      3 |      2 |      1 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 3269000 |     635 |    212 |    225 |    18 |    0 |    16 |   13 |    4 |    11 |    0 |    136 |    0 |    0 |    0 |    0 |    289 |    346 |      24 |      18 |       7 |       2 |     11 |      9 |      8 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      5 |      1 |      1 |      2 |      3 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      4 |      2 |      3 |      1 |        7 |       12 |       18 |       16 |       11 |       10 |       5 |       15 |       28 |       21 |       33 |       12 |       16 |       8 |       15 |       37 |       19 |       22 |        8 |        5 |       5 |       19 |       30 |       17 |       15 |        5 |       16 |      12 |        7 |       29 |       22 |        8 |        1 |        1 |       0 |       10 |       22 |       15 |       10 |        7 |        3 |       1 |        2 |        8 |        7 |        7 |        4 |        3 |       0 |        5 |       12 |        8 |        3 |        1 |        2 |       0 |      0 |      1 |     25 |     25 |      2 |      7 |      7 |    145 |      0 |      0 |      3 |     22 |     21 |     10 |      1 |      2 |    166 |      0 |      0 |      0 |     22 |     18 |      1 |      0 |      1 |     94 |      0 |      0 |      0 |      6 |     13 |      1 |      0 |      0 |     42 |      0 |     37 | s03      | R    |
| 3269100 |     421 |    151 |    146 |    12 |    0 |     4 |    6 |    4 |    16 |    0 |     82 |    0 |    0 |    0 |    0 |    171 |    250 |      12 |      12 |       3 |       0 |      5 |      6 |      1 |      2 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      3 |      0 |      1 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      2 |        3 |       15 |        7 |       14 |        5 |        5 |       0 |        8 |       19 |       19 |       29 |       18 |        9 |       0 |        2 |       13 |       11 |       12 |       14 |       12 |       0 |        8 |       13 |       22 |       10 |       13 |       16 |       0 |        5 |       13 |       10 |        9 |        5 |        2 |       0 |        7 |        6 |        7 |        8 |        7 |        2 |       1 |        0 |        4 |        2 |        5 |        3 |        0 |       0 |        7 |        5 |        7 |        5 |        3 |        1 |       0 |      0 |      1 |     23 |     17 |     11 |      2 |      6 |     91 |      0 |      0 |      0 |      9 |     17 |      9 |      5 |      5 |    101 |      0 |      0 |      0 |     12 |     12 |      2 |      2 |      2 |     52 |      0 |      0 |      1 |      8 |      8 |      1 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 3269200 |     366 |    116 |    175 |    11 |    0 |     7 |    1 |    0 |     3 |    0 |     53 |    0 |    0 |    0 |    0 |    157 |    209 |      10 |       7 |       5 |       2 |      9 |      7 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      8 |      3 |      2 |        3 |        4 |        8 |        9 |        6 |       12 |       4 |        6 |        6 |        9 |       18 |       17 |       13 |       1 |        6 |       10 |       12 |        9 |        9 |       17 |       1 |        7 |       17 |       13 |       24 |       18 |       28 |       4 |        8 |        3 |        5 |       10 |        6 |        2 |       0 |        3 |        3 |        4 |        5 |        2 |        2 |       0 |        4 |        1 |        1 |        3 |        2 |        2 |       0 |        0 |        2 |        1 |        3 |        1 |        2 |       0 |      0 |      2 |     19 |     12 |      9 |      2 |      7 |     65 |      0 |      0 |      3 |     18 |     27 |     11 |      6 |      8 |    102 |      0 |      0 |      0 |      7 |      9 |      7 |      3 |      0 |     27 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3272000 |     447 |    170 |    193 |     0 |    0 |     6 |    4 |    0 |     6 |    0 |     68 |    0 |    0 |    0 |    0 |    206 |    241 |      12 |       6 |       6 |       0 |      9 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        5 |        5 |       14 |       17 |        5 |        7 |      14 |        6 |       11 |       19 |       22 |        8 |       23 |      14 |        6 |        4 |       23 |       12 |       23 |       14 |      10 |        5 |       11 |       15 |       13 |       25 |       13 |      19 |        5 |       10 |        6 |        9 |        6 |        3 |       0 |        4 |        7 |        8 |        3 |        4 |        2 |       1 |        0 |        2 |        4 |        1 |        0 |        1 |       0 |        0 |        3 |        1 |        0 |        1 |        3 |       0 |      0 |      1 |     20 |     16 |      7 |      3 |      6 |    117 |      0 |      0 |      2 |     25 |     25 |      8 |      6 |     13 |    114 |      0 |      0 |      0 |     10 |      6 |      5 |      1 |      1 |     45 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3274000 |     267 |    109 |    111 |     6 |    0 |     0 |    0 |    1 |     2 |    0 |     38 |    0 |    0 |    0 |    0 |    122 |    145 |      12 |       7 |       2 |       0 |      4 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      5 |      2 |      1 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        3 |        4 |       10 |       11 |        5 |        9 |       4 |        4 |        8 |        9 |       17 |        8 |       10 |       7 |        2 |        5 |       13 |        9 |       10 |        4 |       3 |        7 |       11 |        8 |       13 |       10 |       12 |       4 |        0 |       11 |        3 |        6 |        1 |        2 |       1 |        2 |        5 |        5 |        2 |        0 |        0 |       0 |        0 |        2 |        0 |        3 |        0 |        1 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      9 |     19 |      8 |      4 |      2 |     67 |      0 |      0 |      1 |      8 |     10 |      7 |      3 |      5 |     77 |      0 |      0 |      0 |      8 |      3 |      1 |      1 |      0 |     25 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3276000 |     373 |    112 |    183 |     4 |    0 |     7 |    3 |    3 |     2 |    0 |     59 |    0 |    0 |    0 |    0 |    172 |    201 |      10 |      12 |       2 |       0 |      9 |      9 |      7 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      3 |      0 |      1 |        2 |        4 |        5 |        8 |        8 |        9 |       8 |        1 |        5 |        6 |       12 |       16 |       16 |      12 |        4 |        7 |       12 |       11 |       19 |       26 |      13 |        2 |        4 |       14 |       12 |       13 |       29 |      17 |        0 |        4 |        4 |        4 |       10 |        3 |       3 |        6 |        4 |        5 |        6 |        5 |        3 |       2 |        1 |        2 |        0 |        0 |        1 |        4 |       0 |        3 |        3 |        0 |        0 |        4 |        1 |       0 |      0 |      0 |     11 |      4 |      6 |      2 |      2 |     87 |      0 |      0 |      0 |     18 |     30 |      8 |      6 |      4 |    117 |      0 |      0 |      1 |      8 |      9 |      5 |      0 |      3 |     33 |      0 |      0 |      0 |      3 |      9 |      0 |      1 |      1 |      5 |      0 |     37 | s03      | R    |
| 3278000 |     555 |    135 |    337 |     8 |    0 |     1 |    1 |    0 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    269 |    286 |       3 |       8 |       3 |       0 |     19 |     12 |      8 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      1 |      2 |      0 |        3 |        4 |        9 |       14 |        9 |       12 |       5 |        5 |        2 |       12 |       19 |       11 |       15 |      15 |       10 |        8 |       14 |       26 |       34 |       56 |      22 |        6 |        7 |       19 |       22 |       26 |       62 |      25 |        2 |        6 |        5 |       12 |        5 |        6 |       2 |        6 |        5 |        4 |        7 |        6 |        5 |       0 |        0 |        1 |        0 |        2 |        0 |        2 |       0 |        2 |        0 |        1 |        3 |        0 |        1 |       0 |      0 |      1 |     13 |      9 |      7 |      4 |      7 |     94 |      0 |      0 |      1 |     35 |     54 |     14 |      7 |     15 |    211 |      0 |      0 |      0 |     10 |     11 |      6 |      1 |      3 |     40 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 3280000 |     361 |    117 |    153 |     7 |    0 |     2 |    3 |    1 |     7 |    0 |     71 |    0 |    0 |    0 |    0 |    179 |    182 |      10 |       4 |       1 |       0 |     10 |      5 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      1 |      1 |        1 |        7 |        6 |       11 |        6 |        9 |       8 |        2 |        8 |       12 |       14 |       10 |       13 |      10 |        4 |        1 |       15 |       20 |        8 |       19 |      12 |        5 |        5 |       11 |       13 |        4 |       20 |      16 |        9 |        5 |        5 |       12 |        5 |        2 |       2 |       10 |        5 |        5 |        8 |        3 |        0 |       0 |        2 |        3 |        4 |        0 |        1 |        2 |       0 |        0 |        1 |        5 |        0 |        1 |        1 |       0 |      0 |      0 |     10 |     18 |      3 |      3 |      3 |     80 |      0 |      0 |      0 |     15 |     24 |     10 |      4 |      5 |     95 |      0 |      0 |      2 |     14 |      6 |      1 |      3 |      1 |     44 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3282000 |     367 |    128 |    167 |     6 |    0 |     3 |    3 |    2 |     3 |    0 |     55 |    0 |    0 |    0 |    0 |    175 |    192 |       9 |      11 |       2 |       3 |     13 |     11 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      1 |      1 |      0 |        2 |        5 |        6 |       10 |       12 |        7 |      12 |        1 |        4 |       10 |       18 |       18 |       11 |      12 |        4 |        9 |       17 |       21 |       10 |       13 |      13 |        6 |       10 |        5 |       17 |        3 |       20 |      19 |        1 |        5 |        7 |        2 |        4 |        3 |       1 |        5 |        9 |        9 |        5 |        1 |        1 |       2 |        1 |        3 |        0 |        4 |        3 |        0 |       0 |        2 |        2 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     10 |     16 |      7 |      4 |      3 |     88 |      0 |      0 |      0 |     22 |     23 |      8 |      6 |      4 |    104 |      0 |      0 |      0 |      5 |      8 |      3 |      1 |      0 |     38 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3301000 |     462 |    135 |    257 |     4 |    0 |     5 |    4 |    2 |     2 |    0 |     53 |    0 |    0 |    0 |    0 |    209 |    253 |       6 |       3 |       0 |       0 |     10 |     12 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        3 |       11 |       18 |        6 |        6 |       9 |        2 |        3 |       14 |       21 |        8 |       15 |      15 |        7 |       13 |       18 |       22 |       15 |       21 |      26 |        9 |        6 |       18 |       27 |       19 |       26 |      30 |        4 |        3 |        2 |        8 |        6 |        1 |       1 |        4 |        7 |        8 |        7 |        1 |        1 |       0 |        0 |        0 |        2 |        1 |        1 |        1 |       0 |        1 |        3 |        3 |        4 |        1 |        0 |       0 |      0 |      1 |      8 |     22 |      7 |      5 |      2 |     90 |      0 |      0 |      0 |     27 |     28 |      8 |      5 |     11 |    178 |      0 |      0 |      1 |     10 |      4 |      0 |      3 |      5 |     30 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3302000 |     570 |    243 |    212 |     8 |    0 |     8 |    7 |    2 |     9 |    0 |     81 |    0 |    0 |    0 |    0 |    292 |    278 |       9 |       8 |       6 |       0 |     15 |     10 |      6 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |       10 |        9 |       13 |       31 |       21 |       14 |      16 |        5 |        2 |       22 |       48 |       17 |       14 |      21 |       10 |       11 |       15 |       23 |       32 |       16 |       7 |        6 |        3 |       19 |       15 |       18 |       21 |      16 |        6 |       10 |        8 |       10 |        4 |        3 |       2 |        4 |        9 |        8 |       12 |        0 |        2 |       3 |        4 |        1 |        4 |        8 |        2 |        2 |       0 |        3 |        5 |        1 |        2 |        0 |        2 |       0 |      0 |      4 |     17 |     50 |     12 |      6 |      6 |    148 |      0 |      0 |      0 |     20 |     24 |     18 |     11 |      5 |    134 |      0 |      0 |      0 |     10 |      8 |      1 |      1 |      1 |     60 |      0 |      0 |      0 |      1 |      9 |      2 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 3305000 |     315 |    101 |    146 |     7 |    0 |     2 |    3 |    3 |     6 |    0 |     47 |    0 |    0 |    0 |    0 |    151 |    164 |      10 |       4 |       1 |       0 |     10 |     12 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        4 |       15 |        4 |       10 |       9 |        3 |        1 |        8 |       18 |       10 |       10 |       6 |        2 |        1 |       12 |       16 |       13 |       17 |       9 |        3 |        8 |       10 |       10 |       10 |       20 |      15 |        5 |        2 |        2 |        5 |        2 |        4 |       4 |        5 |        2 |        4 |        7 |        1 |        3 |       1 |        3 |        1 |        0 |        1 |        4 |        3 |       0 |        1 |        2 |        0 |        3 |        1 |        2 |       0 |      0 |      0 |     17 |     16 |      6 |      0 |      6 |     56 |      0 |      0 |      1 |     17 |     24 |      9 |      4 |      4 |     87 |      0 |      0 |      1 |      9 |      5 |      1 |      0 |      2 |     29 |      0 |      0 |      0 |      3 |      3 |      2 |      1 |      1 |     11 |      0 |     37 | s03      | R    |
| 3305100 |     366 |    114 |    170 |     4 |    0 |     6 |    2 |    1 |     7 |    0 |     62 |    0 |    0 |    0 |    0 |    179 |    187 |       5 |       2 |       4 |       1 |      8 |     10 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        3 |        4 |        3 |       17 |       13 |        6 |       6 |        2 |        5 |       11 |       18 |        7 |        8 |      11 |        4 |        2 |       21 |       11 |       20 |       19 |       8 |        5 |        5 |       12 |       14 |       11 |       26 |      12 |        6 |        5 |        5 |       11 |        0 |        3 |       2 |        2 |        8 |        7 |        7 |        5 |        1 |       0 |        4 |        1 |        1 |        0 |        3 |        1 |       0 |        1 |        1 |        3 |        3 |        0 |        2 |       0 |      0 |      1 |     13 |     14 |      7 |      4 |      7 |     68 |      0 |      0 |      1 |     21 |     31 |      4 |      7 |      3 |    103 |      0 |      0 |      0 |     11 |      8 |      3 |      0 |      2 |     38 |      0 |      0 |      0 |      3 |      5 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 3307000 |     549 |    180 |    273 |    11 |    0 |     2 |    2 |    2 |     5 |    0 |     74 |    0 |    0 |    0 |    0 |    266 |    283 |       7 |       2 |       4 |       2 |     21 |     18 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      3 |      2 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        4 |       12 |       24 |       14 |        8 |      18 |        3 |       10 |       19 |       22 |       14 |       14 |      18 |        7 |        6 |       11 |       19 |       22 |       40 |      28 |        3 |        6 |       10 |       20 |       17 |       53 |      31 |        3 |        5 |        6 |        9 |       11 |        4 |       2 |        3 |        5 |        3 |       14 |        7 |        2 |       0 |        1 |        3 |        6 |        1 |        0 |        2 |       0 |        1 |        1 |        1 |        3 |        0 |        3 |       0 |      0 |      2 |     18 |     27 |      5 |      8 |     13 |    107 |      0 |      0 |      0 |     16 |     37 |      7 |     11 |     10 |    192 |      0 |      0 |      0 |     13 |     11 |      3 |      1 |      0 |     46 |      0 |      0 |      1 |      2 |      3 |      4 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3309000 |     892 |     78 |    708 |     9 |    0 |     3 |    6 |    0 |     6 |    0 |     82 |    0 |    0 |    0 |    0 |    355 |    537 |       7 |      40 |       6 |       2 |      1 |     29 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      4 |      1 |      0 |       19 |        2 |        2 |        3 |        0 |        0 |       0 |       48 |        1 |        1 |        2 |        0 |        0 |       0 |      267 |       10 |        5 |        2 |        0 |        2 |       0 |      410 |        8 |        2 |        2 |        0 |        0 |       0 |       29 |        1 |        2 |        0 |        1 |        0 |       0 |       46 |        2 |        0 |        1 |        0 |        0 |       0 |        9 |        1 |        0 |        0 |        0 |        0 |       0 |       12 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |     72 |      0 |      0 |      1 |     10 |      4 |      0 |      0 |      0 |    693 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     81 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 3312000 |     627 |    185 |    331 |    11 |    0 |     8 |    6 |    1 |     3 |    0 |     82 |    0 |    0 |    0 |    0 |    293 |    334 |       3 |       4 |       1 |       2 |      8 |     11 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        8 |        3 |        9 |       23 |       10 |       16 |      14 |        3 |        3 |       18 |       23 |       18 |       20 |      17 |        8 |        8 |       31 |       36 |       21 |       23 |      21 |       10 |       14 |       24 |       35 |       19 |       46 |      35 |        5 |        7 |       12 |       10 |        6 |        5 |       2 |        3 |        4 |        8 |       12 |        1 |        7 |       0 |        3 |        1 |        4 |        3 |        2 |        2 |       0 |        3 |        1 |        5 |        3 |        1 |        1 |       0 |      0 |      0 |     15 |     26 |      6 |      9 |      3 |    126 |      0 |      0 |      1 |     42 |     52 |      7 |      9 |     11 |    209 |      0 |      0 |      0 |     16 |      9 |      2 |      1 |      6 |     48 |      0 |      0 |      0 |      6 |      6 |      1 |      1 |      2 |     13 |      0 |     37 | s03      | R    |
| 3313000 |     474 |    107 |    306 |     4 |    0 |     1 |    4 |    0 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    227 |    247 |      11 |       7 |       1 |       0 |     13 |     25 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      6 |      1 |      0 |        3 |        0 |        1 |       16 |        7 |        8 |       7 |        5 |        5 |       11 |       15 |        9 |       13 |       7 |        7 |       11 |       12 |       34 |       30 |       32 |      24 |        6 |        9 |       12 |       35 |       30 |       34 |      30 |        5 |        5 |        5 |        5 |        4 |        4 |       2 |        6 |        1 |        2 |        8 |        2 |        1 |       1 |        2 |        1 |        0 |        0 |        2 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        1 |       1 |      0 |      0 |     22 |     12 |      6 |      8 |      6 |     53 |      0 |      0 |      2 |     31 |     47 |     17 |     15 |     20 |    174 |      0 |      0 |      0 |      9 |      3 |      7 |      1 |      1 |     30 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 3315000 |     710 |    205 |    392 |    10 |    0 |     1 |   11 |    1 |     7 |    0 |     83 |    0 |    0 |    0 |    0 |    332 |    378 |       9 |       4 |       3 |       1 |     21 |     38 |      6 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      1 |      1 |      0 |      2 |      4 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        4 |        5 |        7 |       25 |       13 |       16 |      11 |        9 |       14 |       17 |       32 |       21 |       22 |       9 |        8 |       11 |       30 |       39 |       39 |       48 |      21 |        6 |        8 |       20 |       43 |       39 |       45 |      35 |        5 |        5 |        7 |        9 |        8 |        4 |       2 |        7 |        2 |       10 |       11 |        8 |        5 |       0 |        2 |        2 |        4 |        4 |        3 |        0 |       0 |        4 |        2 |        2 |        3 |        3 |        1 |       0 |      0 |      0 |     33 |     24 |      6 |      7 |     10 |    125 |      0 |      0 |      1 |     50 |     49 |     19 |     15 |     18 |    240 |      0 |      0 |      0 |     18 |     12 |      4 |      3 |      3 |     43 |      0 |      0 |      1 |      8 |      4 |      1 |      0 |      1 |     15 |      0 |     37 | s03      | R    |
| 3316000 |     673 |    199 |    357 |     3 |    0 |     5 |    1 |    2 |     7 |    0 |     99 |    0 |    0 |    0 |    0 |    309 |    364 |      10 |       6 |       3 |       0 |      5 |     17 |      2 |      2 |      0 |      1 |      1 |      0 |      1 |      3 |      0 |      1 |      1 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      4 |      0 |      1 |        4 |        7 |       11 |       26 |       13 |        7 |      13 |        4 |       10 |       15 |       34 |       17 |       23 |      15 |        8 |       17 |       24 |       38 |       25 |       31 |      25 |       10 |        9 |       28 |       38 |       24 |       48 |      32 |       10 |        2 |        4 |       16 |        7 |        8 |       1 |        8 |        7 |       12 |       17 |        3 |        4 |       0 |        0 |        3 |        2 |        2 |        2 |        3 |       0 |        3 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      2 |     14 |     38 |     13 |      7 |      6 |    119 |      0 |      0 |      1 |     38 |     36 |     17 |     12 |     16 |    237 |      0 |      0 |      2 |     13 |     12 |      1 |      2 |      3 |     66 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 3317000 |     158 |     54 |     75 |     0 |    0 |     1 |    1 |    0 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |     79 |     79 |       1 |       2 |       0 |       0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        1 |        4 |        7 |        6 |        3 |       4 |        0 |        5 |        3 |        6 |        4 |        7 |       3 |        2 |        1 |        6 |        6 |        7 |       11 |       3 |        1 |        2 |        5 |       11 |        8 |        6 |       6 |        2 |        3 |        2 |        3 |        4 |        1 |       0 |        2 |        2 |        3 |        2 |        2 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      4 |      7 |      4 |      2 |      0 |     37 |      0 |      0 |      0 |     12 |     15 |      1 |      4 |      2 |     41 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |     19 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3319000 |     417 |     79 |    266 |    10 |    0 |     2 |    0 |    2 |     6 |    0 |     52 |    0 |    0 |    0 |    0 |    194 |    223 |       7 |       9 |       2 |       0 |      8 |     14 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        3 |        3 |        6 |       11 |        5 |       4 |        1 |        3 |        4 |       12 |       10 |       14 |       2 |        4 |        2 |        8 |       18 |       30 |       49 |      16 |        2 |        4 |       16 |       20 |       36 |       38 |      23 |        4 |        3 |        3 |        5 |        4 |        4 |       1 |        4 |        4 |        4 |        5 |        4 |        5 |       2 |        3 |        2 |        1 |        3 |        1 |        0 |       0 |        2 |        2 |        1 |        2 |        3 |        0 |       0 |      0 |      1 |     15 |     12 |      1 |      4 |      4 |     42 |      0 |      0 |      1 |     24 |     31 |      7 |      7 |     10 |    186 |      0 |      0 |      0 |      8 |      5 |      4 |      0 |      1 |     34 |      0 |      0 |      1 |      3 |      6 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3320000 |     597 |    138 |    363 |     7 |    0 |     2 |    4 |    0 |     3 |    0 |     80 |    0 |    0 |    0 |    0 |    273 |    324 |       6 |      13 |       3 |       0 |     13 |     15 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        3 |        6 |       11 |       11 |       18 |       3 |        3 |        8 |        7 |       14 |       28 |       18 |       8 |        9 |       15 |       12 |       21 |       38 |       67 |      10 |        5 |       11 |       19 |       26 |       33 |       79 |      18 |        1 |        6 |        4 |        7 |       12 |        9 |       0 |        4 |        8 |        8 |        8 |        6 |        7 |       0 |        0 |        0 |        2 |        1 |        4 |        3 |       0 |        0 |        2 |        1 |        0 |        1 |        2 |       0 |      0 |      0 |     17 |     23 |      4 |      5 |      4 |     85 |      0 |      0 |      2 |     45 |     46 |     14 |     19 |     13 |    224 |      0 |      0 |      0 |     15 |     10 |      4 |      3 |      1 |     47 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3322000 |     383 |    102 |    186 |     4 |    0 |     5 |    5 |    0 |     9 |    0 |     72 |    0 |    0 |    0 |    0 |    214 |    169 |       2 |       3 |       1 |       1 |      9 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        4 |        9 |       12 |       15 |        9 |       2 |        2 |        5 |        6 |       14 |       14 |        9 |       1 |        4 |        5 |       13 |       21 |       24 |       43 |       1 |        0 |        2 |       13 |       11 |       15 |       31 |       3 |        7 |        5 |        4 |        5 |       11 |        6 |       0 |        2 |        7 |        4 |        9 |        7 |        5 |       0 |        1 |        1 |        4 |        1 |        5 |        2 |       0 |        2 |        1 |        1 |        1 |        4 |        0 |       0 |      0 |      1 |     19 |     12 |      0 |      1 |      3 |     66 |      0 |      0 |      1 |     22 |     28 |     10 |      5 |      6 |    114 |      0 |      0 |      1 |     14 |      5 |      2 |      0 |      0 |     50 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 3322100 |     259 |     70 |    131 |     5 |    0 |     1 |    2 |    1 |     6 |    0 |     43 |    0 |    0 |    0 |    0 |    133 |    126 |       4 |       5 |       4 |       0 |      2 |      7 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      0 |      1 |        2 |        2 |        4 |        9 |        5 |        5 |       2 |        2 |        8 |        3 |        8 |        9 |        7 |       4 |        2 |        7 |       13 |       12 |       10 |       23 |       5 |        4 |        8 |        8 |        8 |        9 |       17 |       5 |        2 |        8 |        5 |        5 |        5 |        2 |       0 |        2 |        3 |        4 |        3 |        2 |        2 |       0 |        1 |        0 |        3 |        1 |        0 |        0 |       0 |        1 |        3 |        3 |        2 |        0 |        1 |       0 |      0 |      0 |      7 |      9 |      4 |      1 |      5 |     44 |      0 |      0 |      2 |     20 |     13 |      8 |      4 |      5 |     79 |      0 |      0 |      1 |      3 |      3 |      1 |      2 |      1 |     32 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3402000 |     543 |    247 |    147 |    13 |    0 |     4 |    5 |    1 |     5 |    0 |    121 |    0 |    0 |    0 |    0 |    334 |    209 |      35 |       9 |      10 |       1 |     16 |      6 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |     20 |     21 |      3 |      1 |      0 |      0 |      0 |       0 |       2 |       1 |       0 |      1 |      0 |      3 |      0 |        2 |       12 |       32 |       25 |       24 |       43 |       0 |        3 |       16 |        6 |       10 |       18 |       55 |       1 |        2 |       18 |       17 |       23 |       15 |       28 |       0 |        1 |        7 |        5 |        6 |        6 |       18 |       1 |        3 |       12 |       10 |       26 |        6 |       17 |       0 |        1 |        2 |        5 |        3 |        7 |       29 |       0 |        0 |        4 |        3 |        7 |        2 |        3 |       0 |        0 |        1 |        0 |        2 |        2 |        4 |       0 |      0 |      3 |     31 |     36 |      2 |      5 |      3 |    167 |      0 |      0 |      0 |     16 |     26 |      7 |      0 |      2 |     96 |      0 |      0 |      0 |     17 |      9 |      4 |      0 |      1 |     90 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 3402100 |     797 |    304 |    298 |    12 |    0 |     7 |    9 |    0 |     8 |    0 |    159 |    0 |    0 |    0 |    0 |    416 |    381 |      34 |      11 |      10 |       2 |     26 |     16 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      4 |      7 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      6 |      2 |      0 |        4 |       12 |       29 |       43 |       29 |       38 |       0 |        5 |       19 |       13 |       28 |       25 |       59 |       0 |        3 |       19 |       37 |       19 |       27 |       47 |       1 |        1 |       22 |       10 |       26 |       26 |       59 |       1 |        7 |       21 |       16 |       15 |       10 |       22 |       0 |       11 |       16 |        6 |       10 |        5 |       20 |       0 |        0 |        6 |        3 |        3 |        2 |        3 |       0 |        0 |        7 |        2 |        4 |        2 |        4 |       0 |      0 |      2 |     38 |     38 |     14 |     11 |      8 |    193 |      0 |      0 |      1 |     24 |     48 |     13 |      9 |     11 |    192 |      0 |      0 |      0 |     15 |     12 |      2 |      2 |      1 |    127 |      0 |      0 |      0 |      5 |      6 |      1 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 3402200 |     910 |    285 |    374 |    23 |    0 |     7 |    4 |    0 |     6 |    0 |    211 |    0 |    0 |    0 |    0 |    465 |    445 |      17 |      15 |      13 |       2 |     26 |     28 |     18 |      3 |      0 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      4 |      6 |      1 |      0 |      0 |      2 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      1 |      0 |        6 |       13 |       24 |       26 |       35 |       26 |       0 |       10 |       30 |       21 |       30 |       32 |       32 |       0 |        9 |       40 |       28 |       38 |       49 |       41 |       0 |       11 |       25 |       30 |       29 |       40 |       33 |       1 |        2 |       32 |       21 |       25 |       20 |       14 |       0 |       10 |       26 |       10 |       21 |       21 |        9 |       0 |        3 |        1 |        3 |        4 |        3 |        2 |       0 |        2 |        6 |        5 |        8 |        2 |        1 |       0 |      0 |      2 |     25 |     27 |      7 |      2 |      0 |    222 |      0 |      0 |      4 |     19 |     28 |      9 |      3 |      5 |    306 |      0 |      0 |      1 |      7 |      8 |      2 |      2 |      0 |    191 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 3402300 |     369 |    121 |    164 |     6 |    0 |     7 |    2 |    0 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    193 |    176 |      10 |       7 |       1 |       1 |     19 |     20 |      3 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        9 |       10 |       11 |        8 |       21 |       0 |        4 |       11 |        8 |        9 |       12 |       16 |       1 |        2 |       17 |       13 |        6 |       19 |       34 |       0 |        1 |        6 |        9 |       14 |       17 |       25 |       1 |        2 |       10 |        7 |        3 |        6 |        5 |       0 |        0 |       10 |        4 |        6 |       10 |        5 |       0 |        1 |        2 |        1 |        2 |        2 |        1 |       0 |        0 |        3 |        0 |        2 |        2 |        0 |       0 |      0 |      0 |     14 |     17 |      4 |      8 |      1 |     77 |      0 |      0 |      1 |     15 |     15 |      7 |     13 |      8 |    105 |      0 |      0 |      0 |      8 |      7 |      1 |      0 |      2 |     50 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3402400 |      32 |      9 |     12 |     4 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     23 |      9 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        2 |        4 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3404000 |     101 |     34 |     38 |     2 |    0 |     0 |    0 |    1 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     55 |     46 |       1 |       2 |       5 |       0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        1 |        7 |        1 |        4 |        4 |        0 |       0 |        3 |        4 |        4 |        2 |        4 |        0 |       0 |        0 |        3 |        3 |        9 |        6 |        1 |       0 |        2 |        5 |        4 |        2 |        3 |        0 |       0 |        1 |        1 |        5 |        6 |        1 |        1 |       0 |        3 |        3 |        4 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     32 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3406000 |     344 |    149 |     86 |    10 |    0 |    12 |    5 |    8 |     4 |    0 |     70 |    0 |    0 |    0 |    0 |    233 |    111 |      12 |       6 |       2 |       4 |      6 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      1 |        1 |       12 |       24 |       24 |       24 |       17 |       1 |        0 |        9 |       11 |        9 |        8 |        9 |       0 |        2 |        9 |       15 |       14 |       16 |        7 |       0 |        2 |        3 |        8 |        4 |        2 |        4 |       0 |        1 |        6 |       12 |        5 |        9 |       10 |       1 |        1 |       11 |        3 |        4 |        4 |        3 |       0 |        0 |        5 |        5 |        4 |        5 |        4 |       0 |        1 |        4 |        3 |        3 |        1 |        4 |       0 |      0 |      1 |     30 |     26 |      3 |      1 |      3 |     85 |      0 |      0 |      1 |     18 |     11 |      1 |      1 |      0 |     54 |      0 |      0 |      1 |     11 |     10 |      0 |      0 |      2 |     46 |      0 |      0 |      0 |      3 |     12 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 3406100 |     655 |    270 |    182 |    20 |    0 |     3 |   12 |    8 |    19 |    0 |    141 |    0 |    0 |    0 |    0 |    441 |    214 |      34 |      21 |      12 |       3 |     14 |      8 |      7 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       1 |       1 |       0 |      5 |      1 |      1 |      0 |        4 |       33 |       30 |       46 |       27 |       36 |       0 |        4 |       15 |        9 |       24 |       13 |       29 |       0 |        5 |       26 |       22 |       22 |       23 |       29 |       0 |        8 |        8 |        5 |       13 |       11 |       10 |       0 |        3 |       28 |       23 |       27 |        9 |        7 |       0 |       10 |       13 |        6 |        5 |        4 |        6 |       0 |        1 |       10 |        7 |       10 |        7 |        4 |       2 |        3 |        6 |        2 |        5 |        1 |        4 |       0 |      0 |      2 |     41 |     33 |      5 |      1 |      9 |    179 |      0 |      0 |      1 |     27 |     27 |      3 |      2 |      1 |    121 |      0 |      0 |      4 |     22 |     10 |      2 |      0 |      1 |    102 |      0 |      0 |      0 |      6 |     12 |      1 |      0 |      0 |     43 |      0 |     37 | s03      | R    |
| 3408000 |     704 |    266 |    219 |    24 |    0 |     6 |    3 |    4 |     9 |    0 |    173 |    0 |    0 |    0 |    0 |    410 |    294 |      21 |      17 |       8 |       4 |     25 |      6 |     12 |      5 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      2 |      0 |      6 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      3 |      2 |      0 |      1 |        4 |       19 |       35 |       36 |       32 |       16 |       2 |        4 |       28 |       15 |       31 |       28 |       16 |       0 |        6 |       34 |       21 |       32 |       24 |       16 |       0 |        2 |       16 |       22 |       16 |       12 |       17 |       1 |        4 |       32 |       21 |       21 |       18 |        9 |       0 |        4 |       23 |        6 |       18 |       10 |        7 |       0 |        1 |        7 |        6 |        8 |        4 |        2 |       0 |        3 |        7 |        2 |        4 |        1 |        1 |       0 |      0 |      2 |     30 |     24 |     10 |      0 |      1 |    199 |      0 |      0 |      1 |     31 |     23 |      3 |      1 |      1 |    159 |      0 |      0 |      2 |     30 |      9 |      0 |      0 |      0 |    132 |      0 |      0 |      1 |      5 |      3 |      0 |      1 |      0 |     36 |      0 |     37 | s03      | R    |
| 3408100 |     296 |    101 |     75 |    12 |    0 |     5 |    6 |   19 |     5 |    0 |     73 |    0 |    0 |    0 |    0 |    226 |     70 |       6 |       9 |       7 |       8 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      0 |      0 |        3 |        9 |       19 |       14 |       18 |       12 |       1 |        1 |        4 |        1 |       12 |        5 |        1 |       1 |        2 |        8 |       19 |       17 |        6 |        6 |       0 |        1 |        2 |        4 |        4 |        3 |        3 |       0 |        7 |       17 |        9 |       17 |        5 |        2 |       0 |        1 |        5 |        4 |        3 |        2 |        1 |       0 |        1 |       10 |        6 |       15 |        2 |        1 |       0 |        0 |        3 |        3 |        3 |        3 |        0 |       0 |      0 |      1 |     22 |     15 |      1 |      1 |      4 |     57 |      0 |      0 |      3 |     17 |     20 |      1 |      2 |      0 |     32 |      0 |      0 |      0 |     11 |      8 |      0 |      0 |      1 |     53 |      0 |      0 |      0 |      9 |     26 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 3408200 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3410000 |     156 |     51 |     51 |     5 |    0 |     2 |    2 |    0 |     3 |    0 |     42 |    0 |    0 |    0 |    0 |    112 |     44 |       5 |       3 |       3 |       0 |      4 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        6 |        6 |       12 |        7 |        2 |       0 |        4 |        4 |        1 |        2 |        3 |        0 |       0 |        2 |       12 |        9 |        8 |        5 |        3 |       0 |        4 |        3 |        2 |        1 |        2 |        0 |       0 |        3 |        8 |        8 |        1 |        4 |        2 |       0 |        3 |        7 |        4 |        0 |        2 |        0 |       0 |        0 |        4 |        3 |        2 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      5 |      4 |      0 |      0 |     40 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     44 |      0 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |     33 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3412000 |     698 |    258 |    222 |    10 |    0 |     7 |   10 |    3 |    12 |    0 |    176 |    0 |    0 |    0 |    0 |    401 |    297 |      31 |      21 |      13 |       3 |      7 |      7 |      5 |      3 |      1 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      4 |      2 |      2 |      0 |      1 |      1 |      3 |      1 |       1 |       0 |       2 |       0 |      2 |      2 |      1 |      0 |        8 |       39 |       40 |       30 |       18 |       12 |       0 |       11 |       35 |       22 |       20 |       15 |        7 |       1 |       12 |       38 |       40 |       24 |       13 |        6 |       0 |        9 |       26 |       15 |       19 |       16 |        4 |       0 |       12 |       33 |       29 |        7 |        9 |        5 |       0 |       22 |       35 |        8 |        5 |        9 |        2 |       0 |        1 |        8 |        6 |        5 |        5 |        1 |       0 |        1 |        5 |        3 |        3 |        2 |        2 |       0 |      0 |      3 |     16 |     17 |      6 |      2 |      1 |    213 |      0 |      0 |      0 |     15 |     11 |      4 |      1 |      4 |    187 |      0 |      0 |      0 |      9 |      6 |      2 |      0 |      2 |    157 |      0 |      0 |      1 |      7 |      5 |      0 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 3412100 |     482 |    223 |    149 |    12 |    0 |     2 |    1 |    2 |     7 |    0 |     86 |    0 |    0 |    0 |    0 |    226 |    256 |      31 |      22 |      11 |       3 |     12 |      4 |      3 |      1 |      1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      2 |      3 |      0 |      1 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      7 |      9 |      5 |      0 |        1 |        6 |        4 |       13 |        5 |       58 |       0 |        1 |        3 |        5 |       14 |       17 |       96 |       0 |        2 |        1 |       10 |        6 |        9 |       59 |       0 |        4 |        3 |        4 |        8 |        4 |       38 |       1 |        1 |        5 |        3 |        3 |        3 |       27 |       0 |        3 |        4 |        3 |        4 |        3 |       26 |       1 |        0 |        1 |        1 |        1 |        1 |        6 |       0 |        1 |        2 |        0 |        0 |        4 |        7 |       0 |      0 |      2 |     34 |     36 |     12 |      6 |      6 |    127 |      0 |      0 |      3 |     18 |     25 |      9 |      6 |      7 |     81 |      0 |      0 |      1 |     15 |     10 |      1 |      0 |      1 |     58 |      0 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 3416000 |     469 |    214 |    105 |    20 |    0 |     5 |    8 |    3 |    12 |    0 |    102 |    0 |    0 |    0 |    0 |    242 |    227 |      35 |      16 |      10 |       5 |      6 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      1 |      0 |      0 |        9 |       18 |       23 |       19 |        6 |       29 |       0 |       14 |       15 |       11 |       12 |        9 |       49 |       0 |        6 |        8 |        9 |        9 |        7 |       14 |       0 |        9 |        7 |        3 |       11 |        4 |       17 |       1 |        6 |       14 |       10 |        9 |        6 |       11 |       0 |       12 |       10 |        4 |        7 |        3 |       10 |       0 |        4 |        7 |        5 |        3 |        3 |        7 |       0 |        4 |        4 |        2 |        4 |        0 |        5 |       0 |      0 |      2 |     26 |     21 |      7 |      5 |      8 |    145 |      0 |      0 |      1 |      9 |     16 |      3 |      2 |      0 |     74 |      0 |      0 |      0 |     10 |      5 |      3 |      0 |      2 |     82 |      0 |      0 |      0 |      6 |      7 |      3 |      1 |      0 |     31 |      0 |     37 | s03      | R    |
| 3418000 |     446 |    160 |    128 |    17 |    0 |     9 |    7 |    7 |     8 |    0 |    110 |    0 |    0 |    0 |    0 |    278 |    168 |      24 |      17 |      15 |       4 |      4 |      1 |      2 |      2 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       2 |       0 |      0 |      3 |      1 |      0 |        6 |       22 |       35 |       20 |       14 |        5 |       0 |        8 |        9 |       21 |       12 |        5 |        3 |       0 |        5 |       22 |       21 |       19 |       12 |        4 |       0 |        5 |        6 |       11 |       15 |        4 |        4 |       0 |        6 |       17 |       16 |       13 |       10 |        1 |       1 |        8 |       13 |       10 |       10 |        2 |        3 |       0 |        2 |        8 |        6 |       10 |        2 |        1 |       0 |        5 |        5 |        5 |        3 |        1 |        0 |       0 |      0 |      1 |     18 |     29 |      1 |      0 |      1 |    110 |      0 |      0 |      0 |     19 |     17 |      4 |      2 |      2 |     84 |      0 |      0 |      3 |     22 |      7 |      1 |      1 |      0 |     76 |      0 |      0 |      0 |      7 |      9 |      0 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 3418100 |     473 |    185 |    135 |    15 |    0 |    11 |    2 |    4 |     6 |    0 |    115 |    0 |    0 |    0 |    0 |    309 |    164 |      19 |      16 |       9 |       2 |      8 |      2 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      2 |      0 |        2 |       18 |       22 |       39 |       21 |       16 |       0 |        5 |       11 |       11 |       16 |       19 |        5 |       0 |        4 |       16 |       22 |       30 |       18 |        5 |       0 |        7 |        9 |        8 |       10 |        4 |        2 |       0 |        5 |       17 |       22 |        8 |       10 |        4 |       0 |        6 |       20 |        6 |       11 |        4 |        2 |       0 |        1 |        5 |        5 |        8 |        8 |        3 |       0 |        0 |        5 |        1 |        1 |        1 |        0 |       0 |      0 |      3 |     23 |     16 |      1 |      1 |      0 |    141 |      0 |      0 |      1 |     30 |      5 |      1 |      0 |      0 |     98 |      0 |      0 |      1 |     11 |      3 |      1 |      0 |      0 |     99 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 3418200 |     108 |     47 |     28 |     4 |    0 |     5 |    2 |    1 |     1 |    0 |     20 |    0 |    0 |    0 |    0 |     43 |     65 |       4 |       3 |       1 |       1 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        2 |        7 |        3 |        4 |       1 |        0 |        4 |        9 |        9 |        4 |        0 |       0 |        1 |        0 |        2 |        6 |        1 |        1 |       0 |        0 |        3 |        4 |        9 |        1 |        0 |       0 |        0 |        3 |        1 |        1 |        0 |        0 |       0 |        1 |        2 |        3 |        7 |        1 |        1 |       0 |        0 |        1 |        4 |        1 |        0 |        0 |       0 |        0 |        1 |        4 |        1 |        0 |        1 |       0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |     40 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     15 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3419000 |     454 |    176 |    105 |    19 |    0 |    12 |    5 |   22 |     8 |    0 |    107 |    0 |    0 |    0 |    0 |    341 |    113 |      25 |       6 |       5 |       6 |      2 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |        8 |       18 |       31 |       39 |       29 |        1 |       1 |        3 |        9 |       11 |       15 |        7 |        3 |       1 |        2 |       10 |       25 |       30 |       16 |        3 |       0 |        0 |        3 |        4 |        7 |        4 |        1 |       0 |        2 |       15 |       24 |       24 |       11 |        5 |       0 |        3 |        4 |        8 |        8 |        3 |        0 |       0 |        2 |        7 |       19 |       12 |        5 |        1 |       1 |        1 |        4 |        8 |        3 |        2 |        1 |       0 |      0 |      0 |     36 |     19 |      3 |      0 |      2 |    116 |      0 |      0 |      2 |     26 |     14 |      2 |      0 |      1 |     60 |      0 |      0 |      0 |     18 |     16 |      1 |      1 |      0 |     71 |      0 |      0 |      0 |      9 |     26 |      0 |      0 |      0 |     31 |      0 |     37 | s03      | R    |
| 3419100 |      47 |     12 |     21 |     0 |    0 |     0 |    0 |    1 |     1 |    0 |     12 |    0 |    0 |    0 |    0 |     25 |     22 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        0 |        0 |        2 |        3 |        1 |       0 |        2 |        1 |        2 |        0 |        1 |        0 |       0 |        0 |        3 |        4 |        2 |        5 |        0 |       0 |        1 |        1 |        2 |        2 |        1 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        1 |        5 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3419900 |     673 |    290 |    179 |    30 |    0 |    17 |    8 |   10 |     9 |    0 |    130 |    0 |    0 |    0 |    0 |    478 |    195 |      49 |      20 |      19 |       8 |      3 |      5 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |       2 |       1 |       1 |       0 |      4 |      2 |      2 |      1 |       12 |       25 |       48 |       68 |       37 |       13 |       0 |        8 |       21 |       13 |       22 |       13 |        9 |       1 |        5 |       20 |       44 |       37 |       15 |        4 |       0 |        8 |       11 |       12 |       14 |        6 |        2 |       1 |        7 |       17 |       29 |       25 |       11 |        8 |       0 |        9 |        6 |        7 |        6 |        3 |        2 |       0 |        0 |       13 |       17 |       13 |        8 |        2 |       0 |        2 |        3 |        7 |        7 |        1 |        1 |       0 |      0 |      3 |     63 |     39 |      0 |      0 |      2 |    183 |      0 |      0 |      5 |     49 |     13 |      1 |      2 |      0 |    109 |      0 |      0 |      8 |     29 |     10 |      1 |      0 |      0 |     82 |      0 |      0 |      1 |     16 |     12 |      1 |      0 |      0 |     44 |      0 |     37 | s03      | R    |
| 3420000 |     894 |    339 |    199 |    47 |    0 |    24 |   27 |   38 |    11 |    0 |    209 |    0 |    0 |    0 |    0 |    630 |    264 |      36 |      12 |      21 |      14 |      7 |      7 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      2 |      0 |        0 |       37 |       77 |       77 |       37 |       12 |       0 |        3 |       20 |       25 |       33 |       12 |        5 |       1 |        2 |       22 |       52 |       47 |       19 |        2 |       0 |        1 |       10 |       17 |       20 |        6 |        1 |       0 |        8 |       22 |       42 |       52 |       22 |        3 |       0 |        1 |       12 |       20 |       21 |        6 |        0 |       0 |        3 |       13 |       41 |       28 |       10 |        1 |       1 |        7 |       11 |       17 |        8 |        2 |        3 |       2 |      0 |      3 |     74 |     61 |      1 |      0 |      1 |    199 |      0 |      0 |      4 |     61 |     28 |      1 |      0 |      0 |    105 |      0 |      0 |      4 |     50 |     27 |      0 |      0 |      0 |    128 |      0 |      0 |      0 |     24 |     57 |      0 |      0 |      0 |     66 |      0 |     37 | s03      | R    |
| 3420100 |       7 |      2 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      5 |      2 |       2 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3420200 |      79 |     38 |     17 |     2 |    0 |     1 |    0 |    3 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     34 |     45 |      29 |      11 |       8 |       6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        3 |        2 |        1 |        2 |       0 |        3 |        2 |        6 |        6 |        1 |        6 |       0 |        0 |        4 |        3 |        0 |        1 |        2 |       0 |        3 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        2 |        1 |        3 |        0 |        0 |       0 |        3 |        4 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       1 |      0 |      0 |      9 |      4 |      2 |      0 |      0 |     23 |      0 |      0 |      0 |      3 |      2 |      1 |      1 |      1 |      9 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3420400 |       5 |      3 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      2 |       3 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3450000 |     466 |    258 |    111 |     9 |    0 |     2 |    8 |    3 |     8 |    0 |     67 |    0 |    0 |    0 |    0 |    224 |    242 |     151 |      52 |      26 |      11 |      3 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      0 |      0 |        7 |       20 |       23 |       18 |       19 |       29 |       1 |       16 |       21 |       30 |       29 |       11 |       28 |       6 |       11 |        7 |       16 |       11 |        7 |        1 |       1 |       11 |       15 |       15 |        6 |        2 |        7 |       1 |        6 |       15 |        7 |        1 |        3 |        4 |       0 |        9 |       10 |        2 |        3 |        6 |        1 |       0 |        2 |        7 |        4 |        2 |        1 |        1 |       0 |        3 |        5 |        1 |        2 |        2 |        0 |       0 |      0 |      0 |     43 |     51 |      6 |      8 |      7 |    143 |      0 |      0 |      2 |     23 |     10 |      5 |      1 |      5 |     65 |      0 |      0 |      0 |     10 |      7 |      1 |      1 |      2 |     46 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 3452000 |     101 |     58 |     12 |     3 |    0 |     3 |    2 |    0 |     2 |    0 |     21 |    0 |    0 |    0 |    0 |     53 |     48 |      29 |       3 |       3 |       3 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        4 |        9 |        5 |        4 |        4 |       0 |        5 |        3 |        7 |        8 |        3 |        3 |       0 |        0 |        4 |        3 |        1 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        5 |        1 |        1 |        1 |        0 |       0 |        4 |        6 |        1 |        0 |        0 |        1 |       0 |        0 |        2 |        3 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      2 |     10 |     14 |      4 |      0 |      1 |     27 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3452100 |     108 |     59 |     19 |     3 |    0 |     3 |    1 |    1 |     3 |    0 |     19 |    0 |    0 |    0 |    0 |     51 |     57 |      30 |       7 |       7 |       3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        7 |        5 |        3 |        2 |        3 |       3 |       10 |        3 |        6 |        9 |        0 |        4 |       1 |        3 |        2 |        2 |        0 |        0 |        1 |       0 |        1 |        4 |        1 |        4 |        0 |        1 |       0 |        2 |        4 |        4 |        1 |        0 |        0 |       0 |        3 |        4 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        3 |        0 |        0 |       0 |        2 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |     10 |      2 |      1 |      3 |     37 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |     14 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3454000 |     899 |    399 |    176 |    23 |    0 |    10 |   16 |    1 |    34 |    0 |    240 |    0 |    0 |    0 |    0 |    462 |    437 |      64 |      12 |      35 |      13 |     15 |      5 |      8 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      3 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      7 |      3 |      0 |       10 |       46 |       53 |       48 |       14 |       16 |       2 |       17 |       67 |       38 |       36 |       26 |       22 |       4 |       10 |       40 |       25 |       17 |       12 |        1 |       1 |       10 |       22 |       17 |        5 |        7 |        8 |       1 |       13 |       56 |       30 |       13 |        7 |        3 |       0 |       25 |       65 |       15 |        7 |        6 |        0 |       0 |        8 |       17 |        9 |        7 |        3 |        1 |       0 |        7 |       20 |        7 |        3 |        1 |        1 |       0 |      0 |      3 |     52 |     57 |      6 |      6 |      8 |    267 |      0 |      0 |      0 |     15 |     10 |      5 |      3 |      2 |    141 |      0 |      0 |      4 |     30 |      7 |      1 |      2 |      0 |    196 |      0 |      0 |      2 |      8 |      5 |      0 |      1 |      0 |     68 |      0 |     37 | s03      | R    |
| 3456000 |     255 |    122 |     63 |     7 |    0 |     2 |    1 |    0 |    11 |    0 |     49 |    0 |    0 |    0 |    0 |    115 |    140 |      19 |      11 |      11 |       0 |      8 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      2 |      1 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      3 |      0 |        5 |       12 |       10 |        7 |        6 |        6 |       2 |        5 |       23 |       12 |       15 |        9 |        6 |       4 |        3 |       10 |        8 |        2 |        5 |        5 |       0 |        3 |        9 |        3 |        0 |        6 |        8 |       1 |        2 |       12 |        7 |        3 |        0 |        0 |       0 |        3 |       13 |        5 |        3 |        1 |        0 |       0 |        1 |        4 |        3 |        0 |        0 |        1 |       1 |        1 |        4 |        3 |        1 |        1 |        0 |       1 |      0 |      1 |     17 |     18 |      2 |      1 |      3 |     80 |      0 |      0 |      0 |      4 |      7 |      2 |      0 |      2 |     48 |      0 |      0 |      1 |      7 |      4 |      0 |      0 |      0 |     37 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 3458000 |     771 |    381 |    130 |    20 |    0 |    14 |    7 |    8 |    35 |    0 |    176 |    0 |    0 |    0 |    0 |    364 |    407 |     130 |      28 |      37 |      12 |     13 |      4 |      5 |      3 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      5 |      3 |      1 |      1 |       18 |       31 |       48 |       35 |       21 |       17 |       0 |       25 |       60 |       47 |       26 |       34 |       16 |       3 |        4 |       20 |       17 |       11 |       10 |        3 |       0 |        6 |       24 |       13 |        9 |        5 |        6 |       2 |        6 |       29 |       19 |       19 |        5 |        2 |       0 |       19 |       40 |       21 |       11 |        5 |        0 |       0 |        8 |       20 |       10 |        6 |        4 |        1 |       0 |        8 |       18 |        5 |        3 |        1 |        0 |       0 |      0 |      4 |     55 |     46 |      4 |      5 |      1 |    266 |      0 |      0 |      1 |     25 |      9 |      2 |      1 |      1 |     91 |      0 |      0 |      2 |     29 |      9 |      1 |      2 |      0 |    133 |      0 |      0 |      2 |     10 |      6 |      0 |      0 |      0 |     66 |      0 |     37 | s03      | R    |
| 3460000 |     481 |    219 |     93 |    13 |    0 |     6 |    5 |    9 |    12 |    0 |    124 |    0 |    0 |    0 |    0 |    261 |    220 |      68 |      24 |      30 |       8 |      5 |      2 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |       10 |       23 |       31 |       20 |       13 |       12 |       2 |        7 |       25 |       23 |       17 |       14 |       16 |       6 |        3 |       11 |       13 |       12 |        5 |        8 |       1 |        6 |        9 |        8 |        6 |        3 |        6 |       2 |       13 |       21 |       18 |       10 |        3 |        2 |       0 |       12 |       28 |        8 |        4 |        4 |        1 |       0 |        4 |       10 |        1 |        9 |        3 |        3 |       0 |        3 |        7 |        1 |        2 |        1 |        1 |       0 |      0 |      2 |     30 |     29 |      3 |      1 |      9 |    145 |      0 |      0 |      0 |     14 |      7 |      1 |      2 |      2 |     67 |      0 |      0 |      2 |     16 |     14 |      1 |      2 |      0 |     89 |      0 |      0 |      1 |      8 |     11 |      1 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 3463000 |     461 |    271 |     79 |    15 |    0 |     4 |    6 |    4 |     7 |    0 |     75 |    0 |    0 |    0 |    0 |    231 |    230 |     176 |      36 |      43 |      14 |      2 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |      1 |      1 |      0 |       13 |       19 |       37 |       21 |       16 |       16 |       4 |       12 |       26 |       20 |       27 |       17 |       34 |       9 |        7 |        8 |       12 |        8 |        7 |        3 |       1 |        9 |        8 |        7 |        5 |        1 |        3 |       0 |        7 |        7 |       11 |        6 |        2 |        3 |       0 |       11 |       15 |        2 |        5 |        3 |        3 |       0 |        7 |        2 |        6 |        3 |        4 |        1 |       0 |        3 |        0 |        3 |        4 |        1 |        2 |       0 |      0 |      6 |     36 |     47 |      5 |      4 |      4 |    169 |      0 |      0 |      0 |     10 |     13 |      1 |      1 |      1 |     53 |      0 |      0 |      1 |     13 |      5 |      4 |      0 |      0 |     52 |      0 |      0 |      1 |      8 |      4 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 3465000 |     304 |    174 |     52 |     9 |    0 |     3 |    0 |    4 |     2 |    0 |     60 |    0 |    0 |    0 |    0 |    146 |    158 |      98 |      33 |      39 |      10 |      3 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      2 |      0 |      0 |      0 |       14 |        7 |       16 |       14 |       12 |       13 |       3 |       14 |       11 |       14 |       14 |        6 |       28 |       8 |        6 |        7 |        5 |        5 |        1 |        1 |       0 |        7 |        6 |        6 |        4 |        2 |        1 |       1 |       14 |        3 |        7 |        2 |        2 |        1 |       0 |       12 |        9 |        8 |        2 |        0 |        0 |       0 |        5 |        2 |        4 |        1 |        1 |        0 |       0 |        2 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |     28 |     34 |      3 |      1 |      8 |    100 |      0 |      0 |      0 |      9 |      3 |      1 |      0 |      0 |     39 |      0 |      0 |      1 |      8 |      1 |      1 |      0 |      1 |     48 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3500000 |     481 |    293 |     96 |    15 |    0 |     5 |    2 |    4 |     1 |    0 |     65 |    0 |    0 |    0 |    0 |    220 |    261 |     228 |      75 |      52 |      15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      1 |      2 |      1 |       16 |       23 |       21 |       18 |       16 |       23 |       9 |       18 |       34 |       25 |       34 |       17 |       34 |       5 |       11 |       10 |       10 |        6 |        1 |       11 |       0 |       14 |       12 |        8 |        6 |        4 |        3 |       0 |        9 |        6 |        8 |        5 |        3 |        0 |       0 |       11 |        7 |        8 |        2 |        3 |        3 |       0 |        5 |        5 |        0 |        1 |        2 |        1 |       0 |        3 |        3 |        3 |        4 |        0 |        0 |       0 |      0 |      2 |     46 |     49 |     12 |      2 |      6 |    176 |      0 |      0 |      0 |     18 |     18 |      0 |      0 |      3 |     57 |      0 |      0 |      1 |     10 |     13 |      3 |      0 |      0 |     38 |      0 |      0 |      1 |      2 |      9 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 3501000 |      35 |     10 |     11 |     1 |    0 |     2 |    0 |    1 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     18 |     17 |       6 |       3 |       2 |       1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        2 |        0 |        1 |        0 |        2 |       0 |        0 |        2 |        0 |        0 |        2 |        1 |       0 |        0 |        1 |        2 |        1 |        1 |        1 |       0 |        0 |        0 |        2 |        1 |        1 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |        1 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3502000 |     522 |    320 |     87 |     5 |    0 |     6 |    2 |   12 |     3 |    0 |     87 |    0 |    0 |    0 |    0 |    247 |    275 |     213 |      62 |      65 |      17 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      3 |      0 |       14 |       29 |       33 |       24 |       19 |       19 |       9 |       26 |       35 |       35 |       22 |       18 |       26 |      11 |       11 |        7 |       12 |        6 |        7 |        4 |       0 |        5 |       13 |       15 |        5 |        0 |        2 |       0 |       16 |       10 |        3 |        6 |        1 |        1 |       1 |       20 |       10 |        7 |        7 |        1 |        2 |       2 |        3 |        6 |        1 |        2 |        0 |        3 |       0 |        4 |        5 |        2 |        0 |        1 |        1 |       0 |      0 |      3 |     43 |     59 |     10 |      3 |      5 |    197 |      0 |      0 |      1 |     21 |     10 |      0 |      1 |      2 |     52 |      0 |      0 |      1 |     15 |      9 |      1 |      0 |      0 |     61 |      0 |      0 |      0 |      5 |     12 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3503000 |     984 |    652 |    147 |    17 |    0 |    11 |    3 |   31 |     2 |    0 |    121 |    0 |    0 |    0 |    0 |    412 |    572 |     314 |      83 |      84 |      31 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      1 |       23 |       57 |       44 |       33 |       33 |       62 |      15 |       39 |       60 |       60 |       73 |       42 |       88 |      23 |        9 |       17 |       10 |       12 |        5 |       11 |       1 |       14 |       28 |       21 |        6 |        3 |        9 |       1 |       14 |       11 |        9 |        6 |        6 |        7 |       0 |       21 |       23 |        8 |        7 |        4 |        5 |       0 |        6 |        4 |        9 |        4 |        2 |        2 |       0 |        7 |       10 |        6 |        3 |        5 |        6 |       0 |      0 |      9 |    100 |    120 |     24 |     11 |     14 |    374 |      0 |      0 |      2 |     33 |     26 |      1 |      1 |      3 |     81 |      0 |      0 |      2 |     20 |     17 |      2 |      2 |      2 |     76 |      0 |      0 |      0 |      6 |     35 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 3505000 |     456 |    256 |     89 |     8 |    0 |     6 |    6 |   22 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    186 |    270 |      98 |      37 |      34 |      15 |      3 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      5 |      0 |      0 |      0 |       10 |       13 |       17 |       21 |       11 |       20 |       9 |       25 |       19 |       28 |       24 |       11 |       28 |      20 |       15 |        5 |        6 |        7 |        1 |        3 |       0 |        9 |       11 |       12 |        8 |        2 |        6 |       4 |        6 |        5 |        6 |        3 |        2 |        6 |       0 |       12 |       12 |       10 |        2 |        4 |        0 |       0 |        1 |        5 |        6 |        3 |        3 |        2 |       0 |        2 |        8 |        2 |        5 |        1 |        4 |       1 |      0 |      3 |     26 |     44 |     11 |      5 |      6 |    161 |      0 |      0 |      0 |     24 |      6 |      9 |      1 |      0 |     49 |      0 |      0 |      2 |      7 |      9 |      3 |      0 |      0 |     47 |      0 |      0 |      0 |      5 |     24 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3506000 |     152 |    103 |     18 |     1 |    0 |     2 |    0 |    7 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     66 |     86 |      28 |       8 |      10 |       2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      1 |      0 |        4 |        9 |        4 |       11 |        6 |        4 |       2 |        6 |       16 |        9 |        9 |        8 |       12 |       3 |        0 |        1 |        2 |        2 |        1 |        0 |       0 |        3 |        2 |        3 |        3 |        1 |        0 |       0 |        8 |        2 |        1 |        3 |        0 |        1 |       0 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        2 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        1 |       0 |      0 |      1 |     14 |     20 |      2 |      3 |      3 |     60 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |     14 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3506100 |     189 |    120 |     26 |     5 |    0 |     2 |    1 |    8 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |     80 |    109 |      51 |      17 |      15 |       6 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |       10 |        8 |        7 |        4 |        9 |       1 |        6 |       12 |       11 |       12 |       12 |       15 |       8 |        7 |        5 |        1 |        2 |        1 |        0 |       0 |        4 |        1 |        4 |        0 |        1 |        0 |       0 |        0 |        1 |        5 |        4 |        0 |        0 |       0 |        2 |        3 |        3 |        4 |        1 |        3 |       0 |        1 |        1 |        3 |        2 |        1 |        2 |       0 |        2 |        0 |        2 |        1 |        1 |        1 |       0 |      0 |      0 |     17 |     24 |      1 |      6 |      6 |     66 |      0 |      0 |      0 |      6 |      3 |      0 |      1 |      0 |     16 |      0 |      0 |      1 |      6 |      2 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3510000 |     350 |    217 |     61 |     7 |    0 |     5 |    1 |    3 |     3 |    0 |     53 |    0 |    0 |    0 |    0 |    151 |    199 |     150 |      35 |      26 |      15 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        6 |       16 |       21 |       18 |       12 |       19 |       1 |       12 |       26 |       25 |       20 |       11 |       19 |      11 |        5 |       12 |        1 |        6 |        3 |        2 |       1 |        8 |        6 |        7 |        8 |        0 |        1 |       1 |        2 |        7 |        1 |        6 |        1 |        4 |       1 |        8 |        5 |        6 |        4 |        5 |        1 |       2 |        2 |        3 |        1 |        0 |        0 |        0 |       0 |        3 |        6 |        1 |        2 |        1 |        0 |       0 |      0 |      3 |     33 |     46 |     14 |      2 |      7 |    112 |      0 |      0 |      1 |     10 |      3 |      2 |      3 |      1 |     41 |      0 |      0 |      0 |      3 |      5 |      2 |      1 |      1 |     41 |      0 |      0 |      1 |      5 |      3 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3513000 |     602 |    373 |     97 |    13 |    0 |     6 |    1 |   11 |     2 |    0 |     99 |    0 |    0 |    0 |    0 |    289 |    313 |     240 |      56 |      66 |      18 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      5 |      6 |      0 |       18 |       36 |       30 |       29 |       14 |       30 |      13 |       20 |       35 |       35 |       29 |       22 |       44 |      18 |        8 |       14 |       10 |        6 |        5 |        2 |       1 |       16 |       18 |       10 |        2 |        2 |        3 |       0 |       18 |       10 |        9 |        8 |        0 |        5 |       2 |       15 |       10 |        8 |        8 |        1 |        5 |       0 |        4 |        3 |        2 |        6 |        2 |        4 |       0 |        4 |        5 |        1 |        2 |        0 |        0 |       0 |      0 |      5 |     53 |     63 |     10 |      4 |     11 |    227 |      0 |      0 |      1 |     19 |     12 |      1 |      1 |      2 |     61 |      0 |      0 |      0 |     16 |     11 |      1 |      0 |      1 |     70 |      0 |      0 |      1 |      3 |      9 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 3515000 |     353 |    201 |     72 |    10 |    0 |     7 |    3 |    5 |     2 |    0 |     53 |    0 |    0 |    0 |    0 |    165 |    188 |     120 |      37 |      28 |      12 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      8 |      1 |      5 |      0 |       12 |       18 |       24 |       17 |        8 |       13 |       1 |       20 |       18 |       22 |       17 |        7 |       16 |       8 |        9 |        6 |        7 |        8 |        1 |        6 |       1 |        4 |       13 |       12 |        2 |        0 |        3 |       0 |        6 |        5 |        6 |        5 |        0 |        0 |       1 |       10 |       10 |        2 |        3 |        3 |        1 |       1 |        4 |        3 |        1 |        2 |        1 |        0 |       0 |        2 |        7 |        2 |        4 |        0 |        1 |       0 |      0 |      2 |     39 |     39 |      3 |      2 |      1 |    115 |      0 |      0 |      2 |      7 |      8 |      0 |      3 |      1 |     51 |      0 |      0 |      0 |      8 |      3 |      0 |      1 |      1 |     40 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 3518000 |     151 |     82 |     33 |     2 |    0 |     2 |    1 |    2 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     63 |     88 |      35 |      19 |      15 |       4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |       10 |        5 |        9 |        5 |        1 |        2 |       0 |        9 |        9 |        7 |        9 |        7 |        7 |       2 |        4 |        5 |        5 |        2 |        1 |        1 |       0 |        8 |        1 |        4 |        2 |        0 |        0 |       0 |        2 |        3 |        3 |        0 |        0 |        1 |       0 |        6 |        9 |        1 |        4 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |     11 |      9 |      0 |      2 |      2 |     58 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     29 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     24 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3550000 |     478 |    300 |     72 |     7 |    0 |     6 |    9 |    6 |     2 |    0 |     76 |    0 |    0 |    0 |    0 |    237 |    241 |     240 |      54 |      60 |      19 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      2 |      0 |       19 |       25 |       26 |       26 |       12 |       30 |       4 |       22 |       25 |       23 |       29 |       18 |       32 |       9 |        8 |        8 |        7 |        7 |        4 |        6 |       0 |        7 |        7 |        3 |        6 |        4 |        5 |       0 |       13 |        7 |        6 |        4 |        6 |        3 |       1 |       11 |       11 |        2 |        3 |        1 |        8 |       0 |        6 |        4 |        1 |        1 |        2 |        0 |       1 |        3 |        4 |        3 |        4 |        1 |        0 |       0 |      0 |      4 |     40 |     55 |     10 |      7 |      8 |    176 |      0 |      0 |      1 |      7 |      8 |      1 |      0 |      1 |     54 |      0 |      0 |      0 |     12 |     10 |      5 |      0 |      1 |     48 |      0 |      0 |      0 |      5 |      6 |      1 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 3551000 |      52 |     26 |     13 |     0 |    0 |     1 |    0 |    1 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     31 |     21 |      20 |       9 |       8 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        1 |        3 |        1 |        2 |       1 |        0 |        7 |        1 |        0 |        1 |        3 |       0 |        0 |        2 |        1 |        2 |        3 |        0 |       0 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        2 |        1 |        0 |        2 |        1 |        0 |       0 |        2 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 3551100 |     263 |    168 |     31 |     1 |    0 |     7 |    2 |    1 |     0 |    0 |     53 |    0 |    0 |    0 |    0 |    124 |    139 |     134 |      22 |      42 |       9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        9 |       13 |       17 |       11 |        9 |       16 |       6 |       10 |       17 |       21 |       14 |        8 |       14 |       3 |        3 |        4 |        3 |        2 |        4 |        2 |       0 |        4 |        5 |        2 |        0 |        0 |        2 |       0 |        7 |        4 |        3 |        6 |        0 |        1 |       0 |        8 |        9 |        7 |        4 |        1 |        1 |       2 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |        2 |        1 |        2 |        1 |        1 |        0 |       0 |      0 |      3 |     31 |     25 |      2 |      1 |      3 |    103 |      0 |      0 |      0 |      7 |      4 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      1 |     43 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3551200 |      77 |     41 |     16 |     3 |    0 |     2 |    0 |    1 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     42 |     35 |      28 |      10 |       9 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      1 |      0 |        2 |        2 |        4 |        3 |        4 |        6 |       0 |        3 |        1 |        4 |        3 |        5 |        3 |       1 |        3 |        0 |        1 |        3 |        1 |        1 |       1 |        1 |        0 |        4 |        1 |        0 |        0 |       0 |        3 |        1 |        0 |        1 |        1 |        1 |       0 |        2 |        2 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |      6 |      2 |      0 |      0 |     26 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3552000 |      13 |      6 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      8 |      5 |       2 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        2 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3552100 |     135 |     65 |     31 |     3 |    0 |     1 |    1 |    3 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |     72 |     63 |      39 |      13 |      16 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      1 |      6 |      0 |        1 |        5 |       10 |       13 |        1 |        6 |       0 |        6 |        4 |        3 |        5 |        2 |        7 |       2 |        1 |        4 |        3 |        8 |        0 |        1 |       1 |        1 |        4 |        3 |        2 |        0 |        3 |       0 |        2 |        2 |        4 |        1 |        2 |        2 |       0 |        3 |        4 |        5 |        1 |        3 |        1 |       0 |        1 |        2 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      2 |      6 |     13 |      0 |      0 |      0 |     44 |      0 |      0 |      0 |      5 |      3 |      1 |      0 |      1 |     21 |      0 |      0 |      0 |      9 |      5 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3553000 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3553100 |      33 |     12 |     13 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     21 |     12 |       2 |       1 |       1 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        3 |        2 |        0 |        0 |        0 |       0 |        0 |        6 |        0 |        0 |        0 |        0 |       0 |        2 |        7 |        1 |        0 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3554000 |     256 |    144 |     43 |     4 |    0 |     5 |    2 |    4 |     6 |    0 |     48 |    0 |    0 |    0 |    0 |    122 |    134 |      84 |      28 |      31 |       9 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |       10 |       10 |       13 |       10 |        6 |       12 |       4 |        9 |       12 |       15 |       13 |        9 |       11 |      10 |        6 |        3 |        7 |        3 |        1 |        1 |       2 |        5 |        7 |        5 |        1 |        1 |        1 |       0 |        9 |        7 |        3 |        1 |        1 |        1 |       1 |        7 |        6 |        2 |        9 |        1 |        0 |       0 |        2 |        1 |        2 |        6 |        0 |        0 |       0 |        5 |        1 |        2 |        0 |        1 |        1 |       0 |      0 |      1 |     15 |     19 |      3 |      1 |      3 |    102 |      0 |      0 |      0 |      8 |      3 |      2 |      3 |      1 |     26 |      0 |      0 |      0 |      9 |      3 |      2 |      0 |      1 |     33 |      0 |      0 |      1 |      2 |      5 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3557000 |     300 |    191 |     47 |     2 |    0 |     3 |    0 |    6 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    150 |    150 |      81 |      20 |      33 |       4 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      1 |      0 |        9 |       10 |       16 |       18 |        9 |       23 |       3 |       15 |       15 |       16 |       18 |       19 |       13 |       7 |        8 |        5 |       12 |        3 |        2 |        1 |       0 |        4 |        5 |        4 |        1 |        0 |        2 |       0 |        8 |        2 |        7 |        3 |        5 |        1 |       0 |       12 |        7 |        2 |        0 |        2 |        0 |       0 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |        1 |        2 |        2 |        1 |        2 |        0 |       0 |      0 |      1 |     35 |     28 |      4 |      6 |      4 |    113 |      0 |      0 |      1 |      9 |      4 |      1 |      1 |      0 |     31 |      0 |      0 |      1 |     11 |      3 |      0 |      0 |      0 |     34 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3558000 |     342 |    220 |     51 |    13 |    0 |     6 |    1 |    2 |     1 |    0 |     48 |    0 |    0 |    0 |    0 |    157 |    185 |     142 |      28 |      32 |      11 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        7 |       20 |       22 |       13 |       11 |       19 |       5 |       14 |       18 |       18 |       19 |       18 |       24 |      12 |        7 |        7 |        1 |        5 |        1 |        2 |       0 |        7 |        4 |        4 |        7 |        3 |        1 |       2 |        6 |        4 |        5 |        6 |        1 |        0 |       0 |       11 |        7 |        4 |        3 |        0 |        1 |       0 |        4 |        4 |        4 |        2 |        1 |        0 |       0 |        1 |        3 |        2 |        0 |        1 |        0 |       1 |      0 |      5 |     28 |     20 |      8 |      5 |      8 |    146 |      0 |      0 |      0 |     11 |      1 |      0 |      0 |      0 |     39 |      0 |      0 |      2 |      4 |      4 |      1 |      1 |      0 |     36 |      0 |      0 |      0 |      4 |      4 |      1 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 3561000 |     498 |    310 |     69 |    12 |    0 |     6 |    2 |    4 |     7 |    0 |     88 |    0 |    0 |    0 |    0 |    224 |    274 |     202 |      45 |      64 |      19 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |       14 |       21 |       21 |       27 |       23 |       24 |       9 |       18 |       25 |       24 |       34 |       17 |       42 |      11 |        6 |        8 |        4 |        5 |        2 |        3 |       0 |       15 |        8 |        9 |        4 |        0 |        4 |       1 |       10 |       15 |        7 |        6 |        4 |        3 |       0 |       13 |       13 |        7 |        2 |        6 |        2 |       0 |        6 |        0 |        4 |        1 |        0 |        1 |       0 |        8 |        5 |        4 |        2 |        0 |        0 |       0 |      0 |      7 |     45 |     61 |     11 |      8 |     16 |    162 |      0 |      0 |      1 |     20 |      4 |      4 |      2 |      0 |     38 |      0 |      0 |      1 |     18 |      8 |      2 |      0 |      0 |     59 |      0 |      0 |      0 |      4 |      4 |      1 |      1 |      0 |     21 |      0 |     37 | s03      | R    |
| 3565000 |     460 |    292 |     67 |    10 |    0 |     6 |    1 |    7 |     2 |    0 |     75 |    0 |    0 |    0 |    0 |    213 |    247 |     133 |      28 |      35 |      11 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      1 |      0 |       10 |       19 |       23 |       20 |       21 |       33 |       4 |       21 |       24 |       31 |       23 |       23 |       28 |      12 |        5 |        8 |        9 |        7 |        2 |        2 |       0 |        4 |        6 |        8 |        5 |        8 |        2 |       1 |       10 |        7 |       10 |        6 |        3 |        2 |       0 |       11 |       11 |        7 |        4 |        3 |        1 |       0 |        3 |        2 |        2 |        3 |        2 |        0 |       0 |        3 |        3 |        2 |        4 |        2 |        0 |       0 |      0 |      5 |     41 |     50 |      7 |      4 |     10 |    175 |      0 |      0 |      0 |     20 |      8 |      2 |      0 |      1 |     36 |      0 |      0 |      0 |     12 |      8 |      1 |      0 |      0 |     54 |      0 |      0 |      0 |      5 |      6 |      0 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 3566000 |     446 |    264 |     97 |     6 |    0 |     1 |    1 |   10 |     2 |    0 |     65 |    0 |    0 |    0 |    0 |    199 |    247 |     144 |      50 |      45 |       7 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      0 |       16 |       16 |       25 |       21 |       13 |       19 |       5 |       24 |       23 |       28 |       20 |       18 |       27 |       9 |       12 |        7 |       12 |        9 |        5 |        4 |       0 |       21 |       14 |        4 |        4 |        2 |        3 |       0 |        8 |        3 |        8 |        2 |        2 |        4 |       1 |       14 |        7 |        5 |        3 |        4 |        4 |       0 |        0 |        2 |        3 |        0 |        1 |        0 |       1 |        3 |        3 |        4 |        0 |        1 |        2 |       0 |      0 |      2 |     44 |     34 |      8 |      2 |      9 |    165 |      0 |      0 |      1 |     15 |      6 |      1 |      0 |      0 |     74 |      0 |      0 |      0 |     13 |      7 |      0 |      0 |      1 |     44 |      0 |      0 |      1 |      3 |      8 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3569000 |     416 |    243 |     81 |     3 |    0 |     4 |    2 |   11 |     6 |    0 |     66 |    0 |    0 |    0 |    0 |    179 |    237 |     112 |      37 |      41 |      17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |       22 |       20 |       18 |       13 |       10 |       15 |       3 |       20 |       26 |       25 |       25 |       19 |       17 |      10 |        8 |        9 |        6 |        9 |        6 |        2 |       0 |        8 |        8 |        8 |        8 |        3 |        5 |       1 |        6 |        7 |        5 |        2 |        3 |        1 |       0 |       17 |       11 |        8 |        4 |        1 |        1 |       0 |        3 |        6 |        2 |        2 |        0 |        1 |       0 |        3 |        5 |        2 |        1 |        0 |        1 |       0 |      0 |      1 |     33 |     36 |      6 |      4 |      4 |    159 |      0 |      0 |      1 |     14 |      9 |      4 |      0 |      1 |     52 |      0 |      0 |      0 |     10 |      6 |      0 |      0 |      1 |     49 |      0 |      0 |      0 |      3 |     10 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3571000 |     266 |    159 |     42 |     6 |    0 |     5 |    1 |    2 |     0 |    0 |     51 |    0 |    0 |    0 |    0 |    110 |    156 |      86 |      25 |      32 |       6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      1 |        3 |       11 |       13 |       12 |        9 |       12 |       2 |        6 |       18 |       15 |       19 |       13 |       17 |       9 |        1 |        6 |        5 |        4 |        1 |        1 |       1 |        5 |        7 |        6 |        4 |        1 |        0 |       0 |        8 |        4 |        6 |        4 |        0 |        0 |       0 |       14 |        6 |        4 |        2 |        3 |        0 |       0 |        1 |        3 |        2 |        0 |        0 |        0 |       1 |        2 |        1 |        2 |        1 |        0 |        1 |       0 |      0 |      0 |     20 |     27 |      5 |      2 |      4 |    101 |      0 |      0 |      0 |     12 |      5 |      2 |      0 |      0 |     23 |      0 |      0 |      0 |      6 |      8 |      1 |      0 |      0 |     36 |      0 |      0 |      1 |      4 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3600000 |     479 |    318 |     81 |     5 |    0 |     7 |    3 |    7 |     0 |    0 |     58 |    0 |    0 |    0 |    0 |    206 |    273 |      36 |      15 |       8 |       0 |      9 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      2 |      1 |        9 |       15 |       29 |       30 |       20 |       20 |      10 |        9 |       22 |       39 |       39 |       30 |       24 |      22 |        4 |        6 |        8 |        8 |        3 |        5 |       2 |       11 |       10 |       12 |        9 |        2 |        1 |       0 |        2 |        4 |        7 |        9 |        2 |        1 |       0 |       10 |        7 |        6 |        6 |        3 |        1 |       0 |        2 |        5 |        1 |        1 |        3 |        0 |       0 |        0 |        5 |        1 |        2 |        2 |        0 |       0 |      0 |      3 |     34 |     50 |     18 |     12 |     15 |    186 |      0 |      0 |      1 |     16 |      9 |      3 |      2 |      2 |     48 |      0 |      0 |      2 |      9 |      2 |      3 |      1 |      1 |     40 |      0 |      0 |      1 |      6 |      9 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3601000 |     392 |    252 |     72 |     8 |    0 |     3 |    3 |    7 |     0 |    0 |     47 |    0 |    0 |    0 |    0 |    186 |    206 |      21 |      10 |       6 |       3 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |     10 |     11 |      7 |      1 |        4 |       10 |       25 |       23 |       15 |       23 |      11 |        8 |       18 |       33 |       18 |       23 |       22 |      19 |        8 |        5 |       13 |       11 |        0 |        3 |       0 |        3 |        3 |       10 |        9 |        5 |        2 |       0 |        6 |        3 |        6 |        4 |        4 |        1 |       0 |        7 |        3 |        4 |        3 |        2 |        4 |       0 |        2 |        0 |        3 |        2 |        1 |        3 |       0 |        3 |        4 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     30 |     25 |     13 |     11 |     12 |    161 |      0 |      0 |      1 |      9 |     11 |      2 |      3 |      4 |     42 |      0 |      0 |      0 |      7 |      5 |      0 |      1 |      0 |     34 |      0 |      0 |      1 |      3 |      6 |      0 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 3601500 |     591 |    272 |    196 |     3 |    0 |     5 |    3 |    4 |     0 |    0 |    108 |    0 |    0 |    0 |    0 |    297 |    294 |      42 |      74 |      30 |       1 |     10 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       3 |       1 |       2 |       0 |     34 |     38 |     30 |      3 |       21 |       15 |       20 |       41 |        9 |       21 |       7 |       12 |       15 |       31 |       41 |       15 |       15 |       9 |       16 |       15 |       16 |       32 |       14 |        5 |       1 |       13 |        9 |       20 |       38 |        9 |        7 |       1 |       11 |       12 |        8 |       16 |        6 |        1 |       1 |       20 |        8 |        7 |       13 |        4 |        1 |       0 |        2 |        1 |        3 |        1 |        0 |        2 |       0 |        1 |        1 |        1 |        2 |        1 |        0 |       0 |      0 |      1 |     28 |     55 |     12 |      9 |     12 |    155 |      0 |      0 |      1 |     26 |     34 |     19 |      7 |     10 |     99 |      0 |      0 |      1 |     17 |     12 |      8 |      4 |      1 |     65 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 3602000 |     305 |    146 |     93 |     5 |    0 |     2 |    1 |    3 |     0 |    0 |     55 |    0 |    0 |    0 |    0 |    155 |    150 |      52 |      29 |      23 |       4 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |     23 |     28 |      6 |      2 |       14 |        5 |        7 |       19 |       13 |       11 |       1 |        8 |        7 |       14 |       18 |       12 |       16 |       1 |        8 |        5 |        7 |       21 |        7 |        3 |       0 |        8 |        7 |        6 |       14 |        5 |        2 |       0 |        7 |        2 |        6 |        8 |        3 |        2 |       0 |        6 |        3 |        5 |        5 |        4 |        4 |       0 |        2 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      2 |     24 |     27 |      6 |      2 |      6 |     79 |      0 |      0 |      1 |     18 |     18 |      7 |      8 |      7 |     34 |      0 |      0 |      0 |      4 |      3 |      4 |      2 |      1 |     41 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3603000 |     206 |     63 |     83 |     4 |    0 |     1 |    0 |    3 |     0 |    0 |     52 |    0 |    0 |    0 |    0 |     98 |    108 |      16 |      21 |      16 |       3 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     17 |     32 |     21 |      4 |        1 |        6 |        3 |        4 |        5 |        7 |       0 |        2 |        5 |        9 |       10 |        5 |        6 |       0 |        3 |        4 |        7 |       13 |        8 |        5 |       1 |        3 |        3 |        5 |       18 |        9 |        4 |       0 |        9 |        1 |        6 |        9 |        2 |        1 |       0 |        4 |        3 |        5 |        6 |        4 |        2 |       0 |        2 |        0 |        0 |        0 |        0 |        1 |       0 |        2 |        0 |        2 |        0 |        0 |        1 |       0 |      0 |      3 |     11 |     14 |      2 |      4 |      3 |     26 |      0 |      0 |      1 |     11 |     15 |     11 |      5 |      8 |     32 |      0 |      0 |      0 |      4 |     14 |      1 |      1 |      0 |     32 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3603500 |     137 |     53 |     53 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     66 |     71 |      14 |      16 |      10 |       0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     16 |     15 |     14 |      0 |        4 |        4 |        2 |        8 |        6 |        2 |       0 |        3 |        6 |        2 |       11 |        4 |        1 |       0 |        3 |        2 |        2 |       10 |        5 |        2 |       0 |        6 |        3 |        2 |       12 |        1 |        5 |       0 |        4 |        1 |        2 |        4 |        3 |        1 |       0 |        5 |        1 |        2 |        1 |        4 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      1 |     12 |      2 |      3 |      1 |     32 |      0 |      0 |      1 |      8 |      7 |      2 |      1 |      3 |     31 |      0 |      0 |      1 |      1 |      5 |      4 |      1 |      2 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3604000 |     391 |    109 |    164 |    12 |    0 |     3 |    4 |    4 |     0 |    0 |     95 |    0 |    0 |    0 |    0 |    199 |    192 |      39 |      83 |      37 |       9 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       2 |       0 |     29 |     41 |     36 |      5 |        7 |        8 |        6 |       12 |        7 |        7 |       0 |       11 |        9 |       11 |       15 |        8 |        8 |       0 |       10 |       15 |        7 |       31 |       18 |        9 |       0 |        3 |        6 |       14 |       28 |       14 |        9 |       0 |       11 |       10 |        3 |       14 |        8 |        3 |       1 |       16 |        8 |        0 |       11 |        5 |        5 |       0 |        4 |        4 |        0 |        3 |        0 |        1 |       0 |        2 |        2 |        4 |        3 |        0 |        0 |       0 |      0 |      2 |     18 |     20 |      6 |      3 |      4 |     56 |      0 |      0 |      1 |     14 |     38 |     18 |      9 |     10 |     74 |      0 |      0 |      3 |     12 |      8 |      6 |      2 |      5 |     59 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 3604100 |     263 |     83 |    112 |     3 |    0 |     2 |    0 |    2 |     0 |    0 |     61 |    0 |    0 |    0 |    0 |    144 |    119 |      34 |      38 |      33 |       4 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |     35 |     13 |      1 |        1 |        8 |        7 |       12 |       12 |        6 |       1 |        3 |        4 |        7 |       11 |        6 |        5 |       0 |        7 |        7 |       10 |       19 |       11 |        6 |       1 |        5 |        7 |        8 |       13 |       11 |        7 |       0 |        5 |        8 |        4 |       11 |        3 |        2 |       0 |        6 |        6 |        3 |        7 |        6 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |     15 |     13 |      6 |      1 |      4 |     44 |      0 |      0 |      4 |     13 |     25 |      9 |      6 |      0 |     55 |      0 |      0 |      0 |     15 |      7 |      7 |      4 |      2 |     26 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      1 |      0 |      0 |     37 | s03      | R    |
| 3604200 |     331 |     90 |    140 |     4 |    0 |     3 |    0 |    5 |     2 |    0 |     87 |    0 |    0 |    0 |    0 |    167 |    164 |      27 |      45 |      27 |       3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |     27 |     54 |     41 |      4 |        6 |        7 |        4 |        9 |        6 |        8 |       1 |        4 |       11 |        5 |       11 |       10 |        8 |       0 |        4 |        9 |        7 |       22 |       17 |       10 |       1 |        9 |        5 |        9 |       22 |       12 |       12 |       1 |       13 |        6 |        6 |       14 |        8 |        2 |       0 |       10 |        6 |        6 |        8 |        5 |        3 |       0 |        2 |        1 |        1 |        0 |        0 |        3 |       0 |        2 |        1 |        1 |        1 |        0 |        2 |       0 |      0 |      0 |     15 |     18 |      5 |      3 |      2 |     47 |      0 |      0 |      0 |     17 |     23 |     13 |      9 |     11 |     67 |      0 |      0 |      2 |     19 |      8 |      3 |      0 |      1 |     54 |      0 |      0 |      0 |      7 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3605000 |     219 |     58 |     98 |     6 |    0 |     0 |    0 |    0 |     0 |    0 |     57 |    0 |    0 |    0 |    0 |    109 |    110 |      17 |      31 |      18 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |     12 |     36 |     16 |      2 |        1 |        6 |        1 |        9 |        4 |        2 |       0 |        4 |        2 |        6 |       11 |        5 |        7 |       0 |        4 |        7 |       11 |       20 |        4 |        8 |       0 |        5 |        5 |       11 |       16 |        5 |        2 |       0 |        4 |        7 |        3 |       10 |        1 |        3 |       0 |        5 |        4 |        4 |        6 |        7 |        3 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     15 |      8 |      6 |      1 |      3 |     24 |      0 |      0 |      2 |     13 |     20 |      9 |      1 |      4 |     49 |      0 |      0 |      0 |      9 |      8 |      3 |      1 |      3 |     33 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3605200 |     370 |    154 |    118 |     4 |    0 |     3 |    1 |    1 |     0 |    0 |     89 |    0 |    0 |    0 |    0 |    187 |    183 |      57 |      47 |      31 |       2 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     15 |     30 |     23 |      1 |       13 |       12 |       11 |       13 |        6 |       13 |       4 |        6 |       14 |       14 |       14 |       15 |       15 |       4 |        8 |        8 |       14 |       14 |        9 |        7 |       1 |        5 |        8 |       14 |       13 |        6 |       10 |       1 |        6 |       11 |        8 |       13 |        6 |        5 |       1 |        7 |        9 |        7 |       12 |        2 |        1 |       1 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |        2 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      5 |     22 |     17 |      7 |      4 |      2 |     97 |      0 |      0 |      1 |     12 |     24 |      5 |      7 |      8 |     61 |      0 |      0 |      1 |     10 |     14 |      5 |      1 |      3 |     55 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3605300 |     114 |     40 |     47 |     2 |    0 |     0 |    0 |    1 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     55 |     59 |      12 |      11 |       6 |       0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      6 |      2 |      1 |        2 |        4 |        0 |        4 |        4 |        4 |       0 |        0 |        3 |        4 |       10 |        5 |        0 |       0 |        5 |        3 |        2 |        9 |        3 |        4 |       0 |        2 |        1 |        3 |        7 |        3 |        5 |       0 |        3 |        2 |        1 |        3 |        2 |        0 |       0 |        2 |        2 |        2 |        5 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |     11 |      3 |      2 |      2 |     15 |      0 |      0 |      2 |      9 |     12 |      5 |      1 |      1 |     17 |      0 |      0 |      0 |      3 |      3 |      3 |      2 |      0 |     13 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3605400 |     309 |    113 |    123 |     6 |    0 |     5 |    2 |    3 |     0 |    0 |     57 |    0 |    0 |    0 |    0 |    149 |    160 |      38 |      35 |      22 |       5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     13 |     25 |     15 |      2 |        4 |        9 |        6 |       16 |        6 |        7 |       3 |        5 |        7 |        8 |       14 |        9 |       14 |       5 |       13 |        5 |       12 |       12 |        9 |       14 |       0 |        8 |        6 |        7 |       16 |        9 |       11 |       1 |        9 |        3 |        3 |        7 |        5 |        1 |       0 |        8 |        2 |        7 |        6 |        3 |        1 |       2 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        3 |        2 |        3 |        2 |        0 |       0 |      0 |      1 |     13 |      7 |      9 |      2 |      2 |     79 |      0 |      0 |      0 |     19 |     19 |      8 |      4 |      5 |     68 |      0 |      0 |      1 |      8 |      6 |      2 |      1 |      1 |     38 |      0 |      0 |      1 |      2 |      5 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3605500 |     160 |     38 |     74 |     2 |    0 |     1 |    1 |    1 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |     79 |     81 |       7 |      33 |      19 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |     24 |      5 |      1 |        4 |        1 |        3 |        5 |        7 |        1 |       0 |        6 |        1 |        1 |        8 |        0 |        1 |       0 |        3 |        4 |        5 |       12 |        6 |        5 |       0 |        3 |        5 |        7 |       14 |        5 |        5 |       0 |        7 |        4 |        2 |        5 |        2 |        0 |       0 |        4 |        3 |        2 |       10 |        3 |        1 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      1 |      3 |      0 |      2 |     28 |      0 |      0 |      0 |      5 |     18 |      8 |      4 |      3 |     36 |      0 |      0 |      1 |      4 |      9 |      0 |      1 |      3 |     25 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3605800 |     334 |     77 |    156 |     4 |    0 |     3 |    0 |    4 |     1 |    0 |     89 |    0 |    0 |    0 |    0 |    170 |    164 |      20 |      42 |      28 |       5 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |     24 |     53 |     32 |      3 |        7 |        4 |        8 |       10 |        5 |        3 |       0 |        8 |        9 |        7 |       11 |        3 |        2 |       0 |       10 |        6 |       17 |       27 |       14 |        4 |       0 |       11 |        9 |       14 |       17 |       17 |       10 |       0 |       14 |        4 |        6 |       14 |        9 |        2 |       0 |       10 |        6 |        7 |        8 |        7 |        2 |       0 |        3 |        1 |        1 |        0 |        1 |        0 |       0 |        2 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      1 |      6 |     18 |      1 |      4 |      5 |     42 |      0 |      0 |      1 |     17 |     35 |     12 |      6 |     17 |     68 |      0 |      0 |      0 |      5 |     14 |      9 |      9 |      5 |     47 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3606000 |     575 |    255 |    199 |    14 |    0 |     5 |   11 |    8 |     3 |    0 |     80 |    0 |    0 |    0 |    0 |    273 |    302 |      86 |      61 |      25 |       9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |     18 |     48 |     16 |      9 |       17 |       10 |       20 |       21 |       12 |       18 |      14 |       11 |       17 |       32 |       25 |       22 |       22 |      14 |       12 |       15 |       19 |       25 |       17 |       11 |       3 |        7 |       17 |       16 |       20 |       19 |       15 |       3 |        8 |        9 |        4 |       10 |        7 |        3 |       0 |        7 |        7 |        6 |        5 |        8 |        5 |       1 |        3 |        5 |        3 |        2 |        3 |        2 |       0 |        2 |        9 |        2 |        2 |        4 |        4 |       0 |      0 |      3 |     31 |     40 |      7 |      5 |      9 |    160 |      0 |      0 |      1 |     30 |     41 |     10 |     11 |     16 |     90 |      0 |      0 |      1 |     11 |     11 |      5 |      4 |      2 |     46 |      0 |      0 |      0 |      7 |     14 |      3 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 3606100 |     305 |    169 |     69 |     5 |    0 |     4 |    0 |    6 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    115 |    190 |      63 |      21 |      21 |       3 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |     26 |     15 |     11 |      4 |       18 |       11 |       10 |        9 |        4 |       11 |       0 |       19 |       21 |       23 |       23 |        6 |       13 |       1 |        8 |        5 |        0 |        6 |        1 |        9 |       0 |        6 |        9 |        9 |        8 |        1 |        7 |       0 |        3 |        2 |        3 |        2 |        2 |        8 |       0 |       11 |        2 |        3 |        5 |        1 |        9 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        4 |        2 |        1 |        2 |        1 |        2 |       1 |      0 |      1 |     28 |     31 |      3 |      3 |      0 |    103 |      0 |      0 |      2 |      9 |     13 |      3 |      4 |      0 |     38 |      0 |      0 |      0 |      8 |      7 |      0 |      0 |      1 |     35 |      0 |      0 |      1 |      4 |      2 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 3606500 |     488 |    258 |    128 |     5 |    0 |     7 |   12 |    6 |     1 |    0 |     71 |    0 |    0 |    0 |    0 |    228 |    260 |      95 |      43 |      25 |      15 |      4 |      8 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     17 |     14 |     10 |      2 |        7 |       23 |       12 |       20 |       20 |       20 |      12 |        8 |       18 |       33 |       16 |       33 |       23 |      13 |        6 |       11 |       16 |       17 |       11 |        9 |       1 |        7 |       17 |       10 |        9 |        6 |        5 |       3 |        6 |        3 |        5 |        6 |        1 |        7 |       0 |        7 |       11 |        5 |        9 |        7 |        4 |       0 |        1 |        3 |        4 |        3 |        1 |        2 |       1 |        2 |        7 |        3 |        0 |        1 |        3 |       0 |      0 |      0 |     32 |     43 |     13 |      5 |      8 |    157 |      0 |      0 |      1 |     20 |     27 |      9 |      6 |      3 |     62 |      0 |      0 |      0 |     10 |     14 |      3 |      0 |      0 |     44 |      0 |      0 |      0 |      4 |     16 |      1 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 3607000 |     763 |    498 |    127 |    14 |    0 |     7 |    0 |   19 |     1 |    0 |     97 |    0 |    0 |    0 |    0 |    342 |    421 |      70 |      24 |      21 |       6 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      6 |      4 |      6 |      1 |       29 |       29 |       34 |       51 |       32 |       33 |      11 |       22 |       41 |       58 |       61 |       40 |       45 |      12 |       17 |       16 |       13 |        8 |        9 |        2 |       1 |       13 |       14 |       11 |       17 |        5 |        1 |       0 |       10 |        8 |        8 |        8 |        5 |        3 |       0 |       10 |       18 |        9 |       10 |        4 |        4 |       0 |        2 |        6 |        4 |        2 |        0 |        1 |       0 |        3 |        9 |        6 |        7 |        1 |        0 |       0 |      0 |      2 |     54 |     74 |     21 |     11 |     22 |    314 |      0 |      0 |      1 |     21 |     14 |      6 |      0 |      3 |     82 |      0 |      0 |      2 |     16 |      8 |      3 |      0 |      2 |     66 |      0 |      0 |      1 |      1 |     20 |      0 |      0 |      1 |     18 |      0 |     37 | s03      | R    |
| 3608000 |     631 |    415 |    119 |     6 |    0 |     2 |    1 |   13 |     2 |    0 |     73 |    0 |    0 |    0 |    0 |    280 |    351 |      96 |      31 |      20 |       7 |      8 |      1 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      4 |      0 |      0 |       13 |       24 |       30 |       38 |       31 |       26 |      14 |       25 |       42 |       36 |       44 |       33 |       36 |      23 |        8 |       13 |       20 |       11 |        5 |        1 |       0 |        8 |       15 |       14 |       13 |        4 |        5 |       2 |        7 |        9 |        7 |        6 |        5 |        4 |       0 |       12 |        8 |        6 |        5 |        4 |        0 |       0 |        1 |        1 |        3 |        3 |        0 |        0 |       0 |        2 |        4 |        4 |        0 |        3 |        2 |       1 |      0 |      2 |     57 |     56 |     20 |     10 |      7 |    263 |      0 |      0 |      1 |     16 |     13 |      4 |      4 |      6 |     75 |      0 |      0 |      0 |     18 |      8 |      2 |      1 |      0 |     44 |      0 |      0 |      0 |      3 |     10 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 3610000 |     451 |    294 |     77 |    11 |    0 |     3 |    0 |    8 |     1 |    0 |     57 |    0 |    0 |    0 |    0 |    198 |    253 |      69 |      15 |      11 |       5 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      5 |      1 |      0 |       11 |       17 |       22 |       26 |       19 |       18 |       7 |       17 |       27 |       34 |       36 |       35 |       16 |       9 |        2 |        1 |       15 |        7 |        6 |        4 |       0 |        8 |        8 |        9 |       10 |        3 |        3 |       1 |        6 |        9 |        5 |        7 |        2 |        5 |       0 |        4 |        5 |        9 |        3 |        0 |        1 |       1 |        1 |        2 |        4 |        2 |        0 |        0 |       0 |        5 |        2 |        6 |        0 |        1 |        0 |       0 |      0 |      4 |     36 |     36 |     20 |     11 |      7 |    180 |      0 |      0 |      1 |     13 |      8 |      2 |      5 |      4 |     44 |      0 |      0 |      1 |      8 |      6 |      4 |      0 |      1 |     37 |      0 |      0 |      0 |      4 |      8 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 3611000 |     397 |    225 |     83 |     6 |    0 |     0 |    1 |    2 |     1 |    0 |     79 |    0 |    0 |    0 |    0 |    174 |    223 |      38 |      25 |      17 |       1 |      4 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       6 |       2 |       1 |      4 |      4 |     10 |      0 |       12 |       10 |       16 |       18 |       14 |       19 |       7 |       12 |       23 |       25 |       25 |       22 |       15 |       7 |        2 |        7 |       11 |       10 |        8 |        5 |       0 |        8 |        5 |        9 |       11 |        3 |        3 |       1 |        7 |        4 |        6 |        8 |        5 |        3 |       0 |        7 |        8 |       12 |       10 |        7 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        2 |        1 |        2 |        3 |        0 |        0 |       0 |      0 |      0 |     24 |     30 |     20 |      2 |      5 |    144 |      0 |      0 |      2 |     14 |     10 |      9 |      2 |      3 |     43 |      0 |      0 |      1 |      9 |      8 |     14 |      2 |      0 |     45 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 3611500 |      18 |     11 |      6 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      9 |      9 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        2 |        1 |       0 |        0 |        1 |        0 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3611900 |       8 |      1 |      2 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      3 |      5 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3612000 |     369 |    217 |     79 |     4 |    0 |     3 |    1 |    8 |     0 |    0 |     57 |    0 |    0 |    0 |    0 |    165 |    204 |      28 |      17 |      13 |       3 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       2 |       0 |       1 |       0 |      3 |      3 |      3 |      1 |        8 |       13 |       15 |       18 |       17 |       19 |       3 |        8 |       17 |       22 |       35 |       25 |       10 |       7 |        7 |        4 |        8 |        6 |        5 |        2 |       0 |       13 |        9 |        8 |        6 |        8 |        2 |       1 |       10 |        4 |        5 |        8 |        5 |        0 |       2 |        7 |        6 |        2 |        5 |        1 |        0 |       2 |        1 |        4 |        0 |        0 |        1 |        0 |       0 |        0 |        3 |        2 |        4 |        1 |        0 |       0 |      0 |      1 |     23 |     30 |     11 |      1 |      7 |    144 |      0 |      0 |      1 |     13 |      6 |      2 |      4 |      3 |     50 |      0 |      0 |      3 |     10 |      3 |      3 |      0 |      2 |     36 |      0 |      0 |      0 |      2 |      9 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3612100 |     496 |    270 |    128 |     7 |    0 |     3 |    3 |    9 |     1 |    0 |     75 |    0 |    0 |    0 |    0 |    235 |    261 |      27 |      12 |      19 |       3 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      1 |      0 |       7 |       2 |       1 |       1 |      4 |      5 |      1 |      1 |       11 |       14 |       20 |       26 |       24 |       20 |       6 |       16 |       14 |       33 |       44 |       24 |       14 |       4 |        7 |        4 |       22 |       21 |        9 |        7 |       2 |        8 |        5 |        9 |       20 |        8 |        6 |       0 |       10 |        6 |        4 |        5 |        3 |        3 |       0 |        7 |        7 |        5 |       10 |        6 |        5 |       4 |        2 |        1 |        2 |        2 |        2 |        2 |       0 |        2 |        2 |        0 |        6 |        2 |        0 |       0 |      0 |      1 |     28 |     43 |     21 |      7 |     16 |    154 |      0 |      0 |      0 |     15 |     21 |      8 |      8 |      5 |     71 |      0 |      0 |      1 |     10 |      5 |      4 |      1 |      2 |     52 |      0 |      0 |      0 |      4 |      9 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3614000 |     130 |     61 |     42 |     0 |    0 |     3 |    1 |    0 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     58 |     72 |      16 |       7 |       3 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        6 |        2 |        4 |        7 |        5 |        1 |       2 |        1 |        5 |        6 |       12 |        4 |        3 |       3 |        0 |        5 |        3 |        3 |        3 |        2 |       5 |        1 |        6 |        4 |        3 |        1 |        3 |       3 |        0 |        2 |        5 |        0 |        0 |        0 |       0 |        2 |        5 |        4 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     11 |     10 |      1 |      2 |      2 |     35 |      0 |      0 |      1 |      6 |      5 |      2 |      1 |      2 |     25 |      0 |      0 |      0 |      7 |      1 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3615000 |     238 |    133 |     58 |     7 |    0 |     2 |    1 |    4 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |    105 |    133 |      41 |      12 |       8 |       4 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      3 |      0 |      0 |        9 |        4 |       16 |        9 |        4 |       13 |       2 |        9 |        8 |       12 |       19 |       13 |       10 |       5 |        2 |        4 |        7 |        8 |        1 |        3 |       1 |        4 |        8 |        6 |        4 |        3 |        5 |       2 |        1 |        2 |        4 |        4 |        1 |        1 |       1 |        5 |        4 |        4 |        0 |        3 |        1 |       1 |        1 |        2 |        0 |        2 |        0 |        3 |       0 |        1 |        1 |        2 |        2 |        0 |        1 |       0 |      0 |      2 |     21 |     18 |      2 |      5 |      1 |     84 |      0 |      0 |      0 |      4 |      7 |      5 |      0 |      4 |     38 |      0 |      0 |      1 |      4 |      5 |      0 |      0 |      1 |     21 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3616000 |     400 |    215 |     94 |    11 |    0 |    11 |    2 |    5 |     1 |    0 |     61 |    0 |    0 |    0 |    0 |    181 |    219 |     103 |      37 |      32 |      11 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      4 |      3 |      2 |       16 |       11 |       14 |       15 |       17 |       14 |       5 |       14 |       26 |       18 |       28 |       13 |       19 |       5 |        9 |        7 |        3 |        9 |        4 |        6 |       1 |        8 |       12 |       11 |        7 |        8 |        9 |       0 |        6 |        7 |        9 |        6 |        3 |        2 |       0 |        8 |        6 |        4 |        5 |        4 |        1 |       0 |        0 |        7 |        3 |        4 |        2 |        1 |       0 |        0 |        6 |        2 |        2 |        2 |        1 |       0 |      0 |      2 |     26 |     29 |     15 |      5 |      3 |    135 |      0 |      0 |      0 |     16 |      8 |      2 |      3 |      3 |     62 |      0 |      0 |      0 |     13 |      4 |      4 |      1 |      2 |     37 |      0 |      0 |      0 |      5 |      9 |      0 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 3616100 |     274 |    127 |     75 |     7 |    0 |     4 |    2 |    6 |     5 |    0 |     48 |    0 |    0 |    0 |    0 |    125 |    149 |      47 |      21 |      21 |       8 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      9 |      9 |      8 |      1 |        9 |       11 |       11 |        8 |        9 |        6 |       1 |        9 |       13 |       16 |       15 |        7 |        7 |       5 |        5 |        4 |        7 |       11 |        1 |        3 |       0 |        4 |        8 |       10 |        8 |        9 |        5 |       0 |        8 |        6 |        6 |        2 |        2 |        2 |       0 |        6 |        3 |        5 |        6 |        2 |        0 |       0 |        4 |        3 |        2 |        3 |        1 |        0 |       0 |        2 |        3 |        3 |        3 |        0 |        0 |       0 |      0 |      1 |     19 |     15 |      6 |      2 |      2 |     82 |      0 |      0 |      1 |     13 |     10 |      3 |      3 |      3 |     42 |      0 |      0 |      0 |      2 |      4 |      5 |      1 |      3 |     33 |      0 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 3617000 |     453 |    190 |    164 |    17 |    0 |     4 |    2 |    5 |     1 |    0 |     70 |    0 |    0 |    0 |    0 |    235 |    218 |      63 |      31 |      22 |       9 |      8 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |     19 |     23 |      5 |      3 |       13 |       14 |       10 |       22 |       12 |       17 |       6 |       13 |       14 |       10 |       23 |       16 |       14 |       6 |       11 |       11 |       11 |       27 |       15 |       13 |       1 |        8 |       15 |       10 |       18 |       14 |        7 |       3 |        8 |        8 |        7 |        7 |        5 |        1 |       0 |       10 |       11 |        7 |        4 |        2 |        0 |       0 |        1 |        7 |        1 |        3 |        3 |        1 |       0 |        3 |        3 |        3 |        2 |        1 |        1 |       0 |      0 |      1 |     21 |     30 |      8 |      4 |      4 |    122 |      0 |      0 |      2 |     13 |     28 |     11 |     10 |     11 |     89 |      0 |      0 |      2 |     11 |      9 |      3 |      0 |      0 |     45 |      0 |      0 |      1 |      4 |      9 |      2 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 3620000 |     505 |    292 |    126 |    13 |    0 |     3 |    1 |    2 |     0 |    0 |     68 |    0 |    0 |    0 |    0 |    235 |    270 |     120 |      37 |      29 |       4 |      0 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     13 |      5 |      2 |      0 |       22 |       12 |       21 |       20 |       20 |       21 |       8 |       20 |       31 |       32 |       35 |       17 |       24 |       9 |       13 |       10 |       12 |       13 |        8 |        7 |       2 |        8 |       10 |       14 |        9 |        8 |        6 |       6 |        6 |       12 |        6 |        4 |        7 |        1 |       0 |        7 |        8 |        6 |        6 |        4 |        0 |       1 |        2 |        3 |        4 |        0 |        1 |        0 |       0 |        2 |        2 |        3 |        0 |        1 |        1 |       0 |      0 |      1 |     42 |     43 |      9 |      8 |     10 |    179 |      0 |      0 |      0 |     15 |     17 |      4 |      5 |      3 |     82 |      0 |      0 |      0 |      9 |      6 |      3 |      1 |      0 |     49 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 3621000 |     411 |    209 |    120 |     7 |    0 |     8 |    1 |    4 |     0 |    0 |     62 |    0 |    0 |    0 |    0 |    206 |    205 |     108 |      33 |      35 |       3 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       2 |       0 |       1 |       0 |      5 |     11 |      2 |      1 |       10 |       19 |       22 |       27 |       13 |        8 |       6 |        8 |       19 |       26 |       22 |       11 |       11 |       7 |        7 |       14 |       12 |       15 |        5 |        2 |       2 |       13 |       12 |        9 |       11 |        7 |       10 |       1 |        7 |        9 |        6 |        6 |        2 |        2 |       0 |        8 |        8 |        7 |        4 |        2 |        0 |       1 |        4 |        4 |        1 |        1 |        1 |        1 |       0 |        1 |        2 |        1 |        3 |        0 |        1 |       0 |      0 |      1 |     33 |     35 |      7 |      3 |      5 |    125 |      0 |      0 |      0 |     22 |     18 |      4 |      3 |      3 |     70 |      0 |      0 |      1 |      9 |      3 |      4 |      0 |      0 |     45 |      0 |      0 |      0 |      3 |      7 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 3623000 |     251 |    136 |     68 |     5 |    0 |     3 |    0 |    4 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |    118 |    133 |      37 |      18 |      15 |       4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      7 |      2 |      0 |        5 |        6 |       15 |       13 |        8 |       10 |       2 |        7 |       12 |       10 |       16 |       16 |        8 |       8 |        1 |        6 |        9 |        7 |        5 |        4 |       0 |        5 |        6 |        6 |       10 |        1 |        6 |       2 |        3 |        6 |        4 |        2 |        1 |        6 |       0 |        1 |        4 |        3 |        1 |        1 |        3 |       0 |        1 |        1 |        0 |        1 |        1 |        1 |       0 |        1 |        1 |        4 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |     17 |      6 |      1 |      4 |     99 |      0 |      0 |      0 |      7 |      9 |      6 |      5 |      4 |     37 |      0 |      0 |      0 |      5 |     11 |      1 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      6 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3625000 |     626 |    361 |    143 |    11 |    0 |     6 |    0 |    6 |     3 |    0 |     96 |    0 |    0 |    0 |    0 |    278 |    348 |      68 |      40 |      32 |       3 |      5 |      3 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |     16 |     13 |      1 |       16 |       18 |       17 |       23 |       33 |       30 |      10 |       20 |       31 |       34 |       44 |       48 |       21 |      16 |        8 |       12 |       12 |       14 |       16 |        8 |       1 |       10 |        6 |       18 |       15 |       10 |       13 |       0 |        8 |        9 |        5 |        7 |       11 |        6 |       0 |        9 |        8 |        6 |        9 |       13 |        5 |       0 |        1 |        6 |        5 |        0 |        1 |        1 |       0 |        0 |        3 |        4 |        2 |        3 |        0 |       0 |      0 |      3 |     32 |     45 |     12 |      6 |     14 |    249 |      0 |      0 |      0 |     18 |     25 |      5 |      7 |      8 |     80 |      0 |      0 |      0 |      7 |     15 |      6 |      2 |      4 |     62 |      0 |      0 |      1 |      5 |      8 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3626000 |     424 |    258 |     77 |    11 |    0 |     5 |    3 |    7 |     1 |    0 |     62 |    0 |    0 |    0 |    0 |    201 |    223 |      39 |      20 |      15 |       3 |      6 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      8 |      3 |      3 |        8 |        7 |       15 |       27 |       22 |       24 |       7 |       14 |       15 |       26 |       28 |       27 |       30 |       8 |        2 |       17 |       10 |        6 |        2 |        6 |       0 |        3 |        5 |       13 |        7 |        1 |        5 |       0 |        3 |        4 |        8 |        5 |        5 |        4 |       4 |       11 |        3 |        3 |        5 |        1 |        5 |       1 |        3 |        5 |        2 |        2 |        2 |        1 |       0 |        2 |        5 |        1 |        1 |        1 |        2 |       0 |      0 |      5 |     27 |     31 |     10 |      3 |      9 |    173 |      0 |      0 |      0 |      7 |      8 |      6 |      2 |      1 |     53 |      0 |      0 |      1 |      5 |      8 |      2 |      0 |      0 |     46 |      0 |      0 |      0 |      2 |      9 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 3650000 |     397 |    270 |     49 |     7 |    0 |     4 |    0 |   15 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    171 |    226 |      30 |       8 |      13 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        9 |       14 |       26 |       23 |        9 |       20 |      17 |       11 |       16 |       32 |       26 |       12 |       32 |      23 |        5 |        5 |        6 |        3 |        1 |        5 |       0 |        4 |        4 |        5 |        6 |        1 |        4 |       0 |        3 |        3 |        7 |        4 |        1 |        0 |       0 |        8 |        8 |        4 |        8 |        1 |        1 |       3 |        1 |        2 |        2 |        1 |        0 |        4 |       0 |        2 |        5 |        2 |        3 |        2 |        3 |       0 |      0 |      2 |     27 |     41 |      5 |      3 |      5 |    187 |      0 |      0 |      0 |      5 |      5 |      1 |      2 |      3 |     33 |      0 |      0 |      0 |      3 |      6 |      1 |      0 |      0 |     41 |      0 |      0 |      0 |      2 |     18 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3651000 |     249 |    141 |     62 |     4 |    0 |     0 |    0 |    6 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |    130 |    119 |      36 |      26 |      15 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      6 |      6 |      4 |      2 |        4 |        7 |       10 |       19 |        6 |       11 |       9 |        8 |       10 |       12 |       12 |        9 |       13 |      11 |        7 |        4 |        9 |        6 |        4 |        3 |       3 |        7 |        5 |        1 |        3 |        6 |        3 |       1 |        3 |        8 |        1 |        2 |        4 |        2 |       0 |        3 |        3 |        3 |        6 |        1 |        0 |       0 |        0 |        3 |        2 |        1 |        1 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     17 |     26 |      4 |      5 |      7 |     82 |      0 |      0 |      0 |      8 |     10 |      5 |      2 |      1 |     36 |      0 |      0 |      0 |      5 |      2 |      2 |      1 |      0 |     26 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 3651500 |      83 |     36 |     27 |     2 |    0 |     1 |    0 |    1 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     36 |     47 |      11 |      11 |       9 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      1 |      0 |        3 |        0 |        4 |        5 |        0 |        3 |       1 |        5 |        5 |        4 |        1 |        1 |        2 |       2 |        1 |        3 |        2 |        1 |        1 |        4 |       1 |        2 |        4 |        0 |        3 |        4 |        1 |       0 |        0 |        2 |        0 |        3 |        0 |        0 |       0 |        3 |        4 |        2 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      1 |      1 |      2 |      0 |     28 |      0 |      0 |      0 |      2 |      6 |      2 |      0 |      2 |     15 |      0 |      0 |      1 |      1 |      4 |      2 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3653000 |     582 |    392 |     81 |    11 |    0 |     5 |    0 |   28 |     0 |    0 |     65 |    0 |    0 |    0 |    0 |    251 |    331 |      69 |      18 |      17 |       4 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      1 |       17 |       19 |       31 |       28 |       21 |       32 |      18 |       21 |       25 |       30 |       37 |       28 |       47 |      38 |        6 |        4 |        9 |        9 |        5 |        4 |       1 |        6 |       13 |        9 |        4 |        4 |        3 |       4 |        5 |       10 |        7 |        6 |        2 |        2 |       2 |        6 |        8 |        5 |        6 |        3 |        2 |       1 |        2 |        1 |        2 |        6 |        2 |        0 |       0 |        3 |        4 |        4 |       10 |        6 |        4 |       0 |      0 |      7 |     48 |     49 |     11 |     13 |     12 |    252 |      0 |      0 |      1 |     11 |      7 |      5 |      1 |      1 |     55 |      0 |      0 |      0 |     11 |     11 |      1 |      1 |      1 |     40 |      0 |      0 |      0 |      3 |     28 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 3654000 |     302 |    209 |     41 |     4 |    0 |     1 |    3 |    8 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |    122 |    180 |      34 |      11 |      10 |       1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      1 |      1 |      0 |       10 |       15 |       13 |       11 |        6 |       19 |      12 |       11 |       13 |       21 |       22 |       17 |       22 |      17 |        3 |        2 |        7 |        1 |        1 |        2 |       0 |       11 |        3 |        4 |        4 |        0 |        1 |       2 |        5 |        3 |        4 |        3 |        0 |        0 |       0 |        3 |        7 |        3 |        5 |        1 |        1 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        2 |        4 |        2 |        2 |        1 |        1 |       0 |      0 |      3 |     26 |     22 |     11 |      3 |      8 |    136 |      0 |      0 |      0 |      6 |      2 |      0 |      3 |      1 |     29 |      0 |      0 |      1 |      5 |      6 |      2 |      1 |      0 |     20 |      0 |      0 |      1 |      1 |      8 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3654500 |     531 |    403 |     55 |     4 |    0 |    10 |    3 |   11 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    210 |    321 |      41 |      17 |       6 |       8 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      0 |      0 |      0 |       11 |       13 |       19 |       31 |       25 |       32 |      17 |       16 |       28 |       35 |       52 |       32 |       53 |      39 |        5 |        7 |        4 |        3 |        2 |        5 |       2 |        4 |        4 |        9 |        2 |        2 |        4 |       2 |        5 |        3 |        9 |        4 |        1 |        0 |       1 |        4 |        5 |        4 |        5 |        2 |        2 |       0 |        1 |        1 |        4 |        2 |        2 |        1 |       0 |        4 |        7 |        1 |        2 |        1 |        2 |       0 |      0 |      3 |     36 |     66 |     13 |      9 |     22 |    254 |      0 |      0 |      0 |     10 |      8 |      1 |      0 |      1 |     35 |      0 |      0 |      0 |      9 |      5 |      2 |      0 |      2 |     27 |      0 |      0 |      1 |      2 |     12 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3656000 |     407 |    246 |     77 |    12 |    0 |     4 |    1 |   11 |     2 |    0 |     54 |    0 |    0 |    0 |    0 |    184 |    223 |      55 |      20 |      18 |       3 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |       12 |       26 |       20 |       25 |       15 |       10 |       4 |       20 |       29 |       25 |       26 |        5 |       19 |      10 |       10 |       11 |        8 |        8 |        2 |        2 |       0 |       10 |        7 |       14 |        3 |        1 |        0 |       1 |        6 |        8 |        1 |        3 |        1 |        2 |       0 |        7 |        7 |       11 |        4 |        3 |        1 |       0 |        1 |        3 |        2 |        2 |        1 |        1 |       0 |        3 |        6 |        2 |        7 |        1 |        1 |       0 |      0 |      4 |     36 |     31 |      6 |      1 |      1 |    167 |      0 |      0 |      2 |      9 |      5 |      0 |      2 |      0 |     59 |      0 |      0 |      1 |      4 |      8 |      0 |      0 |      0 |     41 |      0 |      0 |      0 |      5 |      9 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 3656500 |     624 |    328 |    137 |     7 |    0 |    13 |    0 |   26 |     3 |    0 |    110 |    0 |    0 |    0 |    0 |    277 |    347 |      57 |      15 |      26 |       2 |      2 |      2 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      5 |      2 |      0 |      1 |      0 |      0 |      0 |       1 |      17 |       5 |       0 |      4 |      0 |      1 |      0 |       16 |       31 |       30 |       27 |       16 |       13 |       2 |       28 |       36 |       31 |       35 |       30 |       30 |       3 |        7 |       15 |       26 |        8 |       15 |        5 |       0 |       18 |       19 |       11 |        5 |        6 |        2 |       0 |       11 |       13 |       11 |        5 |        6 |        3 |       0 |       12 |       24 |       14 |        4 |        3 |        4 |       0 |        3 |        1 |        4 |        7 |        2 |        0 |       0 |        3 |        8 |        9 |        4 |        7 |        1 |       0 |      0 |      7 |     51 |     36 |      8 |      3 |      2 |    221 |      0 |      0 |      2 |     27 |      8 |      0 |      1 |      0 |     99 |      0 |      0 |      4 |     13 |      8 |      1 |      1 |      0 |     83 |      0 |      0 |      0 |     11 |     18 |      0 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 3657000 |     200 |    131 |     27 |     2 |    0 |     3 |    1 |    9 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |     78 |    122 |      37 |       8 |      12 |       4 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      0 |        2 |        7 |       12 |        4 |        8 |        9 |       5 |       11 |        8 |       20 |        9 |       14 |       12 |      10 |        1 |        4 |        1 |        4 |        1 |        0 |       1 |        3 |        3 |        2 |        4 |        2 |        1 |       0 |        6 |        5 |        1 |        0 |        0 |        1 |       1 |        3 |        2 |        2 |        2 |        3 |        0 |       1 |        1 |        0 |        1 |        1 |        2 |        0 |       0 |        1 |        2 |        2 |        1 |        1 |        3 |       0 |      0 |      1 |     15 |     24 |      5 |      1 |      2 |     83 |      0 |      0 |      0 |      6 |      5 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      0 |     20 |      0 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3657100 |     374 |    217 |     74 |     6 |    0 |     2 |    3 |   13 |     0 |    0 |     59 |    0 |    0 |    0 |    0 |    176 |    198 |      47 |      23 |      23 |       7 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |       12 |        8 |       22 |       18 |       13 |       11 |       7 |       18 |       14 |       21 |       29 |       14 |       16 |      14 |        6 |        8 |        9 |        9 |        4 |        3 |       1 |        8 |        6 |        6 |        7 |        2 |        2 |       3 |        9 |       10 |        4 |        8 |        1 |        3 |       0 |       10 |        5 |        4 |        4 |        0 |        0 |       1 |        2 |        2 |        2 |        2 |        1 |        1 |       0 |        1 |        1 |        5 |        3 |        0 |        4 |       0 |      0 |      2 |     28 |     33 |      8 |      3 |      7 |    136 |      0 |      0 |      0 |      5 |      6 |      1 |      4 |      2 |     56 |      0 |      0 |      0 |      7 |     10 |      5 |      1 |      0 |     36 |      0 |      0 |      1 |      2 |     15 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3659000 |     379 |    270 |     49 |     3 |    0 |     3 |    3 |   13 |     2 |    0 |     36 |    0 |    0 |    0 |    0 |    164 |    215 |       7 |       5 |       2 |       2 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        8 |       11 |       21 |       18 |       12 |       20 |      20 |       16 |       12 |       34 |       21 |       18 |       27 |      32 |        3 |        5 |        6 |        4 |        0 |        3 |       1 |        6 |        3 |        5 |        5 |        2 |        3 |       3 |        3 |        1 |        4 |        7 |        1 |        2 |       0 |        5 |        2 |        2 |        6 |        1 |        1 |       1 |        4 |        6 |        1 |        2 |        1 |        0 |       0 |        0 |        1 |        4 |        2 |        2 |        1 |       0 |      0 |      0 |     29 |     37 |     10 |      1 |      5 |    188 |      0 |      0 |      3 |      9 |      3 |      1 |      0 |      3 |     30 |      0 |      0 |      1 |      4 |      4 |      0 |      1 |      3 |     23 |      0 |      0 |      1 |      3 |     15 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3659100 |     310 |    226 |     36 |     7 |    0 |     4 |    0 |    6 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |    132 |    178 |       8 |       3 |       4 |       2 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        8 |        5 |       21 |       16 |       16 |       25 |       3 |       12 |       19 |       21 |       27 |       24 |       18 |      11 |        4 |        1 |        7 |        3 |        1 |        0 |       0 |        8 |        1 |        3 |        2 |        3 |        2 |       1 |        2 |        5 |        0 |        4 |        2 |        1 |       0 |        3 |        6 |        3 |        3 |        1 |        1 |       0 |        1 |        0 |        2 |        3 |        1 |        1 |       0 |        3 |        0 |        3 |        1 |        1 |        1 |       0 |      0 |      2 |     17 |     42 |     17 |      6 |      5 |    137 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      0 |     25 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     24 |      0 |      0 |      0 |      2 |      6 |      2 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 3661000 |     357 |    231 |     69 |     8 |    0 |     2 |    0 |   11 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |    151 |    206 |      31 |      20 |       9 |       2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |        9 |       19 |       18 |       10 |       22 |      14 |        6 |       20 |       22 |       24 |       18 |       29 |      14 |        4 |        5 |        5 |       13 |        5 |        0 |       2 |       10 |        7 |        6 |        3 |        5 |        2 |       2 |        6 |        2 |        3 |        1 |        2 |        0 |       0 |        2 |        4 |        7 |        2 |        3 |        4 |       0 |        1 |        1 |        0 |        0 |        2 |        1 |       0 |        3 |        5 |        3 |        2 |        1 |        2 |       0 |      0 |      1 |     21 |     44 |      7 |      4 |      9 |    145 |      0 |      0 |      0 |     14 |      4 |      2 |      0 |      1 |     48 |      0 |      0 |      0 |      8 |      3 |      1 |      2 |      0 |     22 |      0 |      0 |      0 |      3 |     10 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3663000 |     557 |    358 |     91 |     9 |    0 |     5 |    3 |   16 |     3 |    0 |     72 |    0 |    0 |    0 |    0 |    238 |    319 |      56 |      20 |      15 |       5 |      3 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      1 |      0 |      2 |      1 |      1 |      0 |      2 |      1 |      0 |      1 |       0 |       6 |       0 |       1 |      3 |      0 |      0 |      0 |       21 |       17 |       30 |       28 |       15 |       23 |       8 |       26 |       29 |       44 |       38 |       16 |       45 |      18 |        9 |        5 |       16 |        3 |        7 |        6 |       2 |       11 |       10 |        9 |        8 |        3 |        0 |       2 |        3 |        2 |        8 |       10 |        1 |        4 |       0 |       12 |        6 |       10 |        6 |        6 |        4 |       0 |        4 |        7 |        3 |        2 |        2 |        2 |       0 |        5 |        1 |        3 |        5 |        2 |        0 |       0 |      0 |      4 |     41 |     42 |      5 |      5 |      5 |    256 |      0 |      0 |      3 |     10 |      5 |      1 |      2 |      1 |     69 |      0 |      0 |      1 |      8 |      5 |      0 |      1 |      1 |     56 |      0 |      0 |      0 |      5 |     12 |      1 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 3663100 |     506 |    337 |     79 |     9 |    0 |     2 |    0 |   10 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    228 |    278 |      21 |       4 |      12 |       4 |     11 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      6 |      7 |      4 |      0 |       15 |       20 |       30 |       33 |       23 |       18 |       2 |       28 |       24 |       39 |       54 |       31 |       19 |       1 |        5 |        5 |       12 |        8 |        7 |        1 |       1 |        7 |        7 |        5 |        9 |        6 |        6 |       0 |        4 |        9 |        6 |       10 |        4 |        4 |       0 |        9 |        7 |        4 |        6 |        2 |        3 |       0 |        2 |        3 |        2 |        3 |        1 |        0 |       0 |        1 |        2 |        3 |        2 |        1 |        2 |       0 |      0 |      3 |     44 |     55 |     19 |     10 |     17 |    189 |      0 |      0 |      3 |      9 |     12 |      7 |      1 |      2 |     45 |      0 |      0 |      1 |      9 |      8 |      1 |      2 |      1 |     46 |      0 |      0 |      0 |      3 |     12 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3663200 |      17 |     16 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      8 |      9 |       3 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        1 |        1 |        2 |        2 |       0 |        2 |        2 |        0 |        0 |        2 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3666000 |     174 |     79 |     49 |     1 |    0 |     1 |    0 |    5 |     0 |    0 |     39 |    0 |    0 |    0 |    0 |     90 |     84 |      11 |      12 |      10 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     18 |     12 |     10 |      0 |        7 |        4 |        3 |       12 |        5 |        5 |       2 |        6 |        4 |       12 |        9 |        5 |        5 |       0 |        3 |        2 |        5 |        7 |        4 |        4 |       0 |        7 |        0 |        1 |        6 |        5 |        5 |       0 |        5 |        2 |        4 |        7 |        4 |        2 |       0 |        2 |        1 |        2 |        5 |        4 |        1 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |      0 |      1 |      9 |     16 |      0 |      4 |      5 |     44 |      0 |      0 |      1 |      5 |      5 |      7 |      0 |      2 |     29 |      0 |      0 |      1 |      4 |      5 |      1 |      0 |      2 |     26 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3666100 |     255 |    118 |     77 |     4 |    0 |     0 |    1 |    9 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |    116 |    139 |      31 |      22 |      14 |       1 |      3 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |     18 |      9 |      1 |        5 |        6 |        8 |       16 |        2 |        9 |       2 |       12 |       12 |       12 |       14 |        4 |       12 |       4 |        4 |        7 |        7 |       11 |        5 |        9 |       0 |        4 |        4 |        5 |       11 |        4 |        5 |       1 |        3 |        1 |        4 |        6 |        2 |        2 |       1 |        7 |        4 |        4 |        8 |        3 |        1 |       0 |        1 |        2 |        0 |        3 |        0 |        0 |       0 |        2 |        2 |        0 |        2 |        0 |        2 |       0 |      0 |      0 |     11 |     18 |      3 |      4 |      5 |     77 |      0 |      0 |      1 |      6 |     19 |      1 |      7 |     10 |     33 |      0 |      0 |      0 |      6 |      9 |      2 |      2 |      2 |     25 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3667000 |     646 |    305 |    202 |     6 |    0 |     5 |    0 |    9 |     2 |    0 |    117 |    0 |    0 |    0 |    0 |    320 |    326 |     107 |      68 |      42 |       4 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       1 |     37 |     53 |     26 |      4 |        9 |       19 |       21 |       19 |       28 |       27 |      10 |       17 |       19 |       18 |       32 |       37 |       30 |      19 |        8 |       21 |       19 |       22 |       18 |       18 |       1 |       13 |       14 |       14 |       16 |       22 |       16 |       0 |       11 |       11 |       12 |       14 |        8 |        9 |       1 |       14 |        6 |        4 |        9 |       10 |        7 |       1 |        3 |        3 |        3 |        3 |        1 |        0 |       1 |        0 |        6 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |     37 |     42 |      9 |      7 |     11 |    198 |      0 |      0 |      2 |     28 |     31 |     10 |     10 |     15 |    106 |      0 |      0 |      2 |     19 |     15 |      5 |      2 |      0 |     74 |      0 |      0 |      2 |      4 |      8 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 3667100 |     290 |    126 |     92 |     2 |    0 |     1 |    0 |    4 |     1 |    0 |     64 |    0 |    0 |    0 |    0 |    136 |    154 |      40 |      23 |      19 |       1 |      2 |      3 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      5 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |     17 |     43 |     22 |      2 |        8 |        4 |        5 |       13 |       12 |       10 |       2 |       10 |       10 |       10 |       19 |        8 |       13 |       2 |        5 |       11 |        5 |       10 |        8 |        8 |       0 |        4 |        6 |        9 |       17 |        4 |        5 |       0 |        6 |        4 |        6 |        6 |        6 |        4 |       0 |       10 |        7 |        5 |        2 |        4 |        4 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |     16 |     19 |      5 |      6 |     10 |     70 |      0 |      0 |      0 |     11 |     18 |      9 |      9 |      5 |     40 |      0 |      0 |      1 |      8 |      8 |      4 |      0 |      2 |     41 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 3667200 |     603 |    248 |    204 |    13 |    0 |     5 |    3 |    5 |     1 |    0 |    124 |    0 |    0 |    0 |    0 |    296 |    307 |      82 |      76 |      54 |       6 |      1 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       5 |       0 |       1 |     30 |     59 |     38 |      2 |        8 |       24 |       13 |       34 |       22 |       17 |       0 |       23 |       18 |       14 |       42 |       17 |       15 |       1 |       10 |       13 |       16 |       31 |       19 |       16 |       0 |        9 |       20 |       18 |       26 |       13 |       13 |       0 |        9 |       12 |        7 |       13 |       10 |        5 |       0 |       20 |       16 |        5 |       14 |        6 |        7 |       0 |        3 |        3 |        2 |        6 |        3 |        0 |       0 |        3 |        1 |        2 |        3 |        1 |        0 |       0 |      0 |      1 |     34 |     37 |      8 |      5 |     16 |    147 |      0 |      0 |      2 |     23 |     37 |     19 |     10 |      9 |    104 |      0 |      0 |      2 |     15 |     13 |     10 |      4 |      5 |     75 |      0 |      0 |      1 |      5 |     10 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 3667300 |      75 |     24 |     34 |     1 |    0 |     0 |    2 |    1 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     37 |     38 |       7 |      14 |       7 |       4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |     13 |      4 |      0 |        0 |        0 |        0 |        4 |        2 |        4 |       1 |        3 |        0 |        1 |        4 |        1 |        2 |       2 |        2 |        1 |        2 |        9 |        2 |        3 |       0 |        1 |        1 |        4 |        7 |        0 |        2 |       0 |        2 |        2 |        1 |        1 |        0 |        0 |       0 |        3 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      1 |      0 |      0 |      1 |     16 |      0 |      0 |      3 |      3 |      4 |      4 |      0 |      4 |     16 |      0 |      0 |      0 |      2 |      0 |      2 |      2 |      1 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3668000 |      23 |      9 |      7 |     1 |    0 |     0 |    0 |    1 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     12 |     11 |       0 |       4 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      3 |      0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 3668200 |      37 |     13 |     13 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     21 |     16 |       4 |       1 |       6 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        2 |        1 |        1 |        1 |       1 |        1 |        0 |        0 |        1 |        0 |        1 |       2 |        1 |        0 |        2 |        0 |        2 |        0 |       3 |        0 |        0 |        0 |        2 |        0 |        1 |       2 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        2 |        0 |        3 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3670000 |     427 |    295 |     51 |    10 |    0 |     7 |    3 |   16 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |    194 |    233 |      31 |       8 |      11 |       4 |      3 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      3 |      1 |       11 |       16 |       30 |       21 |       12 |       28 |      12 |       13 |       29 |       27 |       27 |       34 |       23 |      12 |        4 |        3 |        7 |        6 |        5 |        2 |       0 |        7 |        3 |        3 |        7 |        2 |        1 |       1 |        5 |        7 |        2 |        0 |        3 |        1 |       0 |        4 |        4 |        8 |        5 |        3 |        1 |       1 |        4 |        5 |        2 |        7 |        1 |        0 |       0 |        2 |        4 |        5 |        3 |        3 |        1 |       0 |      0 |      2 |     31 |     47 |     10 |      1 |     11 |    193 |      0 |      0 |      0 |      6 |      5 |      2 |      1 |      4 |     33 |      0 |      0 |      1 |      4 |      5 |      1 |      0 |      0 |     33 |      0 |      0 |      0 |      4 |     20 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3670100 |     152 |    100 |     24 |     0 |    0 |     1 |    1 |    2 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     74 |     78 |      17 |       4 |       2 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       3 |       0 |       2 |       0 |      3 |      0 |      0 |      0 |        5 |        8 |        9 |       10 |        5 |        5 |       2 |        4 |       10 |       13 |       10 |       10 |        7 |       2 |        2 |        1 |        1 |        5 |        3 |        2 |       0 |        3 |        0 |        3 |        1 |        1 |        2 |       0 |        3 |        4 |        4 |        3 |        1 |        0 |       0 |        3 |        1 |        2 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |     15 |     19 |      5 |      3 |      3 |     55 |      0 |      0 |      0 |      4 |      2 |      0 |      2 |      2 |     14 |      0 |      0 |      0 |      2 |      5 |      1 |      1 |      0 |     14 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3671000 |     448 |    226 |    125 |     4 |    0 |     6 |    3 |   10 |     2 |    0 |     72 |    0 |    0 |    0 |    0 |    215 |    233 |      84 |      36 |      15 |       6 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      3 |      1 |      0 |        8 |       11 |       29 |       19 |       21 |       11 |       5 |       20 |       21 |       20 |       26 |       19 |       12 |       4 |        8 |       13 |       12 |       16 |        5 |       12 |       1 |        4 |       12 |       12 |       15 |        5 |        9 |       1 |        6 |        4 |        8 |       10 |        5 |        1 |       0 |       10 |        6 |        5 |        8 |        5 |        4 |       0 |        1 |        4 |        1 |        2 |        1 |        1 |       0 |        2 |        5 |        6 |        0 |        1 |        1 |       0 |      0 |      3 |     33 |     36 |      9 |      4 |      3 |    138 |      0 |      0 |      0 |     17 |     24 |      7 |      3 |      3 |     71 |      0 |      0 |      1 |     11 |      9 |      2 |      2 |      3 |     44 |      0 |      0 |      1 |      3 |     10 |      0 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 3672000 |     481 |    273 |    107 |    11 |    0 |     9 |    4 |   14 |     2 |    0 |     61 |    0 |    0 |    0 |    0 |    214 |    267 |     134 |      58 |      37 |      16 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      6 |      1 |       19 |       13 |       13 |       26 |       16 |       20 |       7 |       21 |       34 |       31 |       23 |       19 |       21 |      10 |        4 |       17 |       13 |       11 |        5 |        4 |       0 |       13 |       17 |        9 |        8 |        3 |        2 |       1 |       12 |        6 |        4 |        3 |        0 |        2 |       1 |       11 |       15 |        4 |        1 |        0 |        2 |       0 |        3 |        5 |        3 |        4 |        1 |        2 |       0 |        1 |        8 |        8 |        3 |        2 |        0 |       0 |      0 |      3 |     43 |     37 |      7 |      6 |      7 |    170 |      0 |      0 |      1 |     17 |     14 |      7 |      2 |      6 |     60 |      0 |      0 |      0 |      9 |      3 |      0 |      0 |      0 |     49 |      0 |      0 |      0 |      5 |     17 |      2 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 3673000 |     581 |    288 |    176 |     9 |    0 |     3 |    2 |    5 |     2 |    0 |     96 |    0 |    0 |    0 |    0 |    294 |    287 |      48 |      48 |      18 |       7 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |       2 |       2 |       0 |     14 |     13 |     14 |      2 |       19 |       18 |       27 |       43 |       24 |       12 |       0 |       13 |       14 |       35 |       34 |       31 |       17 |       1 |       13 |       12 |       22 |       22 |       19 |       11 |       0 |       19 |       13 |        4 |       20 |       13 |        8 |       0 |       13 |        7 |        5 |        4 |        7 |        5 |       0 |       14 |       12 |        5 |       11 |       11 |        2 |       0 |        0 |        1 |        2 |        2 |        4 |        2 |       0 |        1 |        7 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     44 |     40 |     19 |     14 |     24 |    146 |      0 |      0 |      1 |     28 |     27 |      8 |      6 |      9 |     97 |      0 |      0 |      1 |     11 |     12 |      5 |      1 |      3 |     63 |      0 |      0 |      0 |      4 |      9 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3674000 |     282 |    157 |     50 |     4 |    0 |     2 |    3 |    3 |     6 |    0 |     57 |    0 |    0 |    0 |    0 |    124 |    158 |      30 |      10 |      13 |       3 |      6 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      2 |      1 |      1 |      1 |        5 |        5 |        6 |       17 |       13 |       10 |       4 |        8 |       16 |       21 |       23 |       14 |       11 |       4 |        4 |        4 |        7 |        5 |        1 |        2 |       1 |        4 |        6 |        3 |        7 |        2 |        4 |       0 |        7 |        5 |        7 |        6 |        4 |        1 |       0 |        4 |        5 |        6 |        9 |        2 |        1 |       0 |        1 |        2 |        2 |        5 |        0 |        0 |       0 |        1 |        2 |        1 |        3 |        0 |        1 |       0 |      0 |      0 |     17 |     22 |      8 |      3 |      4 |    103 |      0 |      0 |      0 |      3 |      7 |      3 |      0 |      1 |     36 |      0 |      0 |      0 |      7 |      5 |      3 |      0 |      4 |     38 |      0 |      0 |      0 |      2 |      4 |      2 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 3674100 |     358 |    202 |     80 |     8 |    0 |     5 |    3 |    8 |     3 |    0 |     49 |    0 |    0 |    0 |    0 |    169 |    189 |      75 |      33 |      18 |       8 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      0 |       12 |       19 |       15 |       13 |       13 |       12 |       9 |       10 |       22 |       15 |       23 |       12 |       14 |      13 |       12 |       10 |       10 |        4 |        3 |        3 |       1 |       10 |       11 |        4 |        5 |        1 |        6 |       0 |        8 |        3 |        5 |        1 |        0 |        1 |       0 |        9 |        9 |        6 |        4 |        2 |        0 |       1 |        2 |        5 |        3 |        3 |        1 |        1 |       0 |        3 |        0 |        5 |        2 |        2 |        0 |       0 |      0 |      1 |     30 |     28 |     11 |      4 |      5 |    123 |      0 |      0 |      0 |     10 |      6 |      3 |      1 |      1 |     59 |      0 |      0 |      2 |      6 |      5 |      0 |      0 |      0 |     36 |      0 |      0 |      0 |      4 |     11 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3675000 |     316 |    212 |     54 |     1 |    0 |     3 |    0 |    7 |     2 |    0 |     37 |    0 |    0 |    0 |    0 |    142 |    174 |      24 |      11 |       3 |       3 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      2 |      0 |      0 |        8 |        5 |       15 |       21 |       11 |       26 |       5 |        7 |       15 |       21 |       25 |       27 |       18 |       8 |        5 |        3 |        4 |        6 |        3 |        2 |       0 |        5 |        8 |        4 |        6 |        3 |        5 |       0 |        6 |        2 |        4 |        4 |        3 |        1 |       0 |        4 |        3 |        1 |        6 |        1 |        2 |       0 |        0 |        3 |        1 |        4 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      2 |     18 |     37 |     16 |      9 |     11 |    119 |      0 |      0 |      0 |      6 |      6 |      1 |      5 |      2 |     34 |      0 |      0 |      0 |      6 |      3 |      2 |      0 |      1 |     25 |      0 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3675900 |       1 |      0 |      0 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3676000 |     354 |    180 |     88 |    12 |    0 |    10 |    5 |    4 |     3 |    0 |     52 |    0 |    0 |    0 |    0 |    159 |    195 |      29 |       8 |       7 |       5 |      7 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      2 |      4 |      0 |      0 |        4 |       10 |       19 |       17 |        7 |       17 |       2 |        2 |       15 |       16 |       23 |       18 |       21 |       9 |        3 |        4 |        8 |        8 |        9 |        7 |       1 |        5 |        9 |        4 |       10 |       11 |        7 |       2 |        4 |        5 |        3 |        6 |        4 |        3 |       0 |        5 |        5 |        7 |        3 |        5 |        1 |       1 |        5 |        2 |        3 |        4 |        3 |        1 |       0 |        3 |        2 |        5 |        3 |        1 |        2 |       0 |      0 |      0 |     22 |     20 |     13 |      8 |      8 |    109 |      0 |      0 |      0 |     12 |     13 |      3 |      3 |      4 |     53 |      0 |      0 |      0 |      7 |      9 |      1 |      1 |      0 |     34 |      0 |      0 |      0 |      5 |     15 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 3676100 |     446 |    218 |    109 |    14 |    0 |     2 |   10 |    2 |     6 |    0 |     85 |    0 |    0 |    0 |    0 |    208 |    238 |      43 |      15 |      18 |       7 |      2 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      3 |      2 |      1 |      1 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      2 |      1 |      1 |      0 |       11 |       11 |       17 |       17 |       21 |       12 |       7 |        5 |       19 |       23 |       28 |       17 |       22 |       8 |        4 |        7 |       11 |       15 |        8 |        4 |       1 |        4 |        8 |       12 |       17 |        3 |       13 |       2 |        4 |        7 |        8 |       13 |        5 |        3 |       2 |        8 |        9 |       10 |        8 |        4 |        4 |       0 |        4 |        2 |        5 |        5 |        3 |        1 |       0 |        3 |        3 |        1 |        4 |        2 |        0 |       1 |      0 |      2 |     22 |     35 |     11 |     11 |      9 |    128 |      0 |      0 |      1 |     10 |     16 |      6 |      5 |      5 |     66 |      0 |      0 |      1 |     17 |      8 |      3 |      0 |      6 |     50 |      0 |      0 |      0 |      4 |     14 |      1 |      2 |      0 |     13 |      0 |     37 | s03      | R    |
| 3677000 |     341 |    214 |     62 |     9 |    0 |     4 |    1 |    3 |     3 |    0 |     45 |    0 |    0 |    0 |    0 |    149 |    192 |      28 |       4 |       4 |       1 |      3 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |       10 |        9 |       12 |       17 |       16 |       10 |       7 |       13 |       14 |       27 |       24 |       21 |       15 |      19 |        6 |        5 |        6 |       11 |        1 |        2 |       1 |        1 |        6 |        7 |        3 |        7 |        3 |       3 |        8 |        3 |        5 |        7 |        1 |        2 |       0 |        5 |        5 |        3 |        3 |        2 |        1 |       0 |        3 |        4 |        2 |        0 |        1 |        0 |       0 |        0 |        2 |        4 |        3 |        1 |        0 |       0 |      0 |      3 |     19 |     27 |      9 |      8 |     15 |    133 |      0 |      0 |      0 |      7 |      4 |      5 |      3 |      5 |     38 |      0 |      0 |      0 |      8 |      5 |      2 |      0 |      1 |     29 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3680000 |     664 |    342 |    159 |    20 |    0 |     9 |    5 |    8 |     5 |    0 |    116 |    0 |    0 |    0 |    0 |    306 |    358 |      94 |      40 |      31 |      15 |     12 |      3 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        7 |       21 |       32 |       40 |       19 |       25 |       7 |       14 |       30 |       44 |       41 |       24 |       26 |      12 |       11 |       12 |       14 |       18 |        6 |       11 |       3 |       11 |       13 |       22 |       22 |        6 |        7 |       3 |       10 |       11 |       13 |       14 |        5 |        3 |       1 |       14 |        7 |       13 |       11 |        9 |        5 |       0 |        4 |        7 |        3 |        4 |        1 |        4 |       0 |        5 |        8 |        6 |        2 |        1 |        2 |       0 |      0 |      1 |     39 |     41 |     12 |     10 |     10 |    229 |      0 |      0 |      2 |     28 |     21 |      6 |      8 |      4 |     90 |      0 |      0 |      0 |     16 |     11 |      5 |      1 |      3 |     80 |      0 |      0 |      0 |      4 |     13 |      2 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 3681000 |      63 |     33 |     14 |     2 |    0 |     3 |    0 |    0 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     26 |     37 |      12 |       3 |       6 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        0 |        2 |        1 |        4 |        2 |        1 |       2 |        1 |        2 |        4 |        7 |        1 |        3 |       3 |        1 |        2 |        3 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        3 |        0 |        2 |       1 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      1 |      0 |      2 |     24 |      0 |      0 |      0 |      2 |      1 |      2 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      8 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 3681100 |      52 |     33 |      9 |     1 |    0 |     1 |    1 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     30 |     22 |      19 |       2 |       5 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        6 |        4 |        1 |        2 |        3 |       1 |        1 |        3 |        4 |        2 |        2 |        1 |       2 |        0 |        0 |        1 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      7 |      8 |      0 |      0 |      2 |     16 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3682000 |     464 |    248 |    114 |    11 |    0 |    10 |    5 |   10 |     4 |    0 |     62 |    0 |    0 |    0 |    0 |    196 |    268 |     100 |      37 |      21 |      13 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      4 |      7 |      3 |      1 |       14 |       18 |       19 |       19 |        9 |        8 |       5 |       24 |       35 |       27 |       30 |       22 |       12 |       6 |        8 |        9 |       15 |       13 |        3 |       10 |       4 |       12 |       10 |        8 |       12 |        1 |        7 |       2 |        6 |        8 |        6 |        4 |        2 |        2 |       0 |        9 |        9 |        4 |        9 |        3 |        0 |       0 |        0 |        3 |        3 |        5 |        1 |        1 |       1 |        2 |       10 |        7 |        5 |        0 |        2 |       0 |      0 |      1 |     42 |     43 |      7 |      3 |      4 |    148 |      0 |      0 |      0 |     22 |     11 |      4 |      2 |      3 |     72 |      0 |      0 |      0 |     11 |      9 |      3 |      1 |      0 |     38 |      0 |      0 |      0 |      8 |     17 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 3682100 |      51 |     24 |      9 |     4 |    0 |     0 |    1 |    1 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     24 |     27 |      10 |       3 |       6 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        6 |        1 |        0 |       0 |        0 |        2 |        4 |        3 |        2 |        2 |       2 |        1 |        4 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        3 |        0 |        0 |       0 |        1 |        3 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     19 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 3700000 |     565 |    320 |    120 |    14 |    0 |     6 |    1 |   26 |     1 |    0 |     77 |    0 |    0 |    0 |    0 |    259 |    306 |     142 |      44 |      49 |      12 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      5 |      1 |      1 |       19 |       26 |       22 |       31 |       20 |       21 |       6 |       19 |       39 |       25 |       36 |       13 |       29 |      14 |        8 |       13 |       15 |       10 |        3 |        2 |       3 |       15 |       16 |       10 |       14 |        5 |        3 |       3 |        4 |        6 |        6 |        5 |        4 |        4 |       0 |       20 |       13 |        5 |        3 |        4 |        2 |       1 |        5 |        5 |        3 |        6 |        4 |        7 |       1 |        1 |        7 |        3 |        2 |        2 |        2 |       0 |      0 |      2 |     42 |     56 |      9 |      1 |      9 |    201 |      0 |      0 |      3 |     21 |     16 |      4 |      0 |      3 |     73 |      0 |      0 |      2 |      9 |     11 |      0 |      0 |      1 |     54 |      0 |      0 |      0 |      5 |     26 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 3702000 |     764 |    433 |    151 |    14 |    0 |    15 |    0 |   44 |     3 |    0 |    104 |    0 |    0 |    0 |    0 |    358 |    406 |     164 |      59 |      46 |      20 |      3 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      2 |      0 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      1 |      0 |      1 |       21 |       34 |       43 |       34 |       28 |       28 |      10 |       28 |       39 |       45 |       36 |       35 |       37 |      15 |       12 |       17 |       20 |       18 |        2 |        4 |       1 |       19 |       29 |       11 |       11 |        3 |        4 |       0 |       11 |       13 |       12 |       10 |        3 |        3 |       0 |       16 |       16 |        6 |        9 |        3 |        2 |       0 |        2 |        9 |        8 |        9 |        3 |        3 |       0 |        5 |       14 |       11 |        8 |        2 |        2 |       0 |      0 |      1 |     74 |     83 |     11 |      4 |     13 |    247 |      0 |      0 |      4 |     34 |     23 |      0 |      2 |      1 |     87 |      0 |      0 |      2 |     14 |     19 |      1 |      1 |      1 |     66 |      0 |      0 |      0 |      7 |     44 |      0 |      1 |      0 |     24 |      0 |     37 | s03      | R    |
| 3704000 |     480 |    285 |    103 |     2 |    0 |     4 |    2 |   10 |     1 |    0 |     73 |    0 |    0 |    0 |    0 |    224 |    256 |     136 |      44 |      43 |       6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      3 |      4 |      3 |      0 |       14 |       14 |       30 |       18 |       11 |       25 |      13 |       12 |       29 |       23 |       28 |       17 |       36 |      15 |        5 |        8 |       11 |       10 |        2 |        3 |       4 |       15 |       11 |       10 |        6 |       10 |        7 |       1 |       18 |       14 |        3 |        6 |        4 |        1 |       0 |       10 |        4 |        6 |        3 |        0 |        4 |       0 |        2 |        2 |        3 |        2 |        1 |        0 |       0 |        2 |        1 |        3 |        1 |        0 |        2 |       0 |      0 |      1 |     40 |     41 |      8 |      7 |      9 |    179 |      0 |      0 |      0 |     18 |     11 |      2 |      1 |      3 |     68 |      0 |      0 |      1 |      7 |      6 |      1 |      2 |      0 |     56 |      0 |      0 |      0 |      1 |     10 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 3704200 |       4 |      1 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3706000 |     445 |    303 |     60 |     6 |    0 |     4 |    2 |   13 |     1 |    0 |     56 |    0 |    0 |    0 |    0 |    189 |    256 |      70 |      23 |      16 |       5 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       1 |       1 |       0 |       1 |      0 |      1 |      3 |      0 |        6 |       15 |       32 |       28 |       12 |       21 |      14 |        8 |       28 |       33 |       31 |       20 |       38 |      17 |        3 |        5 |        9 |        2 |        1 |        3 |       1 |        1 |        8 |       11 |        6 |        3 |        5 |       2 |        3 |       10 |        4 |        5 |        2 |        2 |       0 |       10 |        9 |        3 |        4 |        1 |        2 |       1 |        1 |        2 |        5 |        2 |        1 |        0 |       0 |        2 |        5 |        4 |        2 |        0 |        1 |       1 |      0 |      4 |     52 |     46 |      5 |      7 |     13 |    176 |      0 |      0 |      1 |      9 |      7 |      1 |      2 |      1 |     39 |      0 |      0 |      0 |     11 |      2 |      1 |      0 |      1 |     41 |      0 |      0 |      1 |      2 |     16 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3708000 |     208 |    139 |     30 |     3 |    0 |     0 |    1 |   12 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     83 |    125 |      31 |      11 |      10 |       2 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        9 |        5 |        9 |       11 |        3 |        9 |       5 |        6 |       14 |       18 |       12 |        6 |       15 |      17 |        1 |        4 |        1 |        2 |        3 |        1 |       0 |        6 |        4 |        4 |        3 |        1 |        0 |       0 |        4 |        1 |        4 |        1 |        1 |        1 |       0 |        2 |        6 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        2 |        5 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        3 |        3 |       0 |      0 |      3 |     15 |     18 |      5 |      1 |      0 |     97 |      0 |      0 |      0 |     10 |      2 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      6 |      5 |      0 |      0 |      0 |     11 |      0 |      0 |      1 |      1 |     12 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3709700 |      12 |      6 |      5 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      7 |      5 |       2 |       4 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3709800 |     195 |    132 |     26 |     4 |    0 |     4 |    1 |    5 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     76 |    119 |      22 |       7 |       6 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       14 |       11 |        4 |       17 |        4 |        5 |       1 |       13 |       11 |       21 |       19 |        7 |        3 |       2 |        3 |        1 |        6 |        0 |        1 |        1 |       0 |        5 |        3 |        2 |        2 |        1 |        1 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        8 |        1 |        5 |        3 |        1 |        1 |       0 |        0 |        1 |        3 |        1 |        0 |        0 |       0 |        3 |        3 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |     21 |     21 |      4 |      3 |      2 |     80 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     15 |      0 |      0 |      1 |      2 |      3 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 3709900 |      90 |     61 |     16 |     2 |    0 |     2 |    0 |    1 |     1 |    0 |      7 |    0 |    0 |    0 |    0 |     50 |     40 |      34 |       9 |       5 |       5 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        5 |       10 |        5 |        2 |        6 |       1 |        1 |        5 |        4 |        8 |        4 |        2 |       4 |        2 |        0 |        4 |        3 |        0 |        1 |       0 |        1 |        2 |        2 |        0 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      1 |     13 |     12 |      2 |      1 |      1 |     31 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3710000 |     467 |    298 |     78 |     2 |    0 |     9 |    3 |    9 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    203 |    264 |      86 |      31 |      23 |       6 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      2 |      4 |      2 |      2 |       14 |       17 |       25 |       23 |       14 |       22 |       7 |       33 |       23 |       34 |       33 |       15 |       29 |       9 |       10 |        6 |        6 |        7 |        7 |        4 |       1 |        7 |       13 |        5 |        4 |        3 |        5 |       0 |        9 |       10 |        8 |        3 |        2 |        1 |       0 |        9 |       12 |        6 |        3 |        3 |        1 |       0 |        1 |        2 |        1 |        0 |        1 |        2 |       0 |        1 |        4 |        6 |        5 |        0 |        1 |       0 |      0 |      5 |     42 |     47 |      5 |      3 |      3 |    193 |      0 |      0 |      0 |     13 |      9 |      2 |      0 |      2 |     52 |      0 |      0 |      1 |     10 |      7 |      2 |      0 |      2 |     45 |      0 |      0 |      0 |      7 |      8 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3711000 |     172 |     90 |     39 |     5 |    0 |     5 |    1 |    3 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     86 |     86 |      59 |      22 |      21 |       8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        3 |        9 |       11 |       13 |        2 |        6 |       0 |        9 |       14 |        8 |        4 |        6 |        5 |       0 |        2 |        7 |       10 |        3 |        3 |        0 |       0 |        3 |        2 |        5 |        3 |        1 |        0 |       0 |        5 |        1 |        2 |        2 |        2 |        0 |       0 |        9 |        2 |        3 |        1 |        2 |        0 |       0 |        2 |        0 |        2 |        0 |        0 |        1 |       0 |        3 |        4 |        0 |        0 |        1 |        1 |       0 |      0 |      1 |     12 |     13 |      0 |      0 |      1 |     63 |      0 |      0 |      0 |      7 |      6 |      0 |      1 |      1 |     24 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3712000 |     581 |    294 |    163 |    11 |    0 |     9 |    2 |    2 |     6 |    0 |     94 |    0 |    0 |    0 |    0 |    254 |    327 |      75 |      16 |      19 |       4 |      5 |      8 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      3 |      0 |      1 |      0 |       5 |       2 |       7 |       0 |      2 |      0 |      0 |      1 |        7 |       17 |       25 |       18 |       24 |       33 |       9 |        6 |       14 |       24 |       24 |       26 |       58 |       9 |        3 |        5 |       13 |       15 |        9 |       23 |       5 |        3 |        5 |       11 |       12 |       13 |       35 |      11 |        3 |        3 |        8 |        7 |        6 |        4 |       3 |       10 |       10 |       10 |       16 |        7 |        6 |       1 |        1 |        2 |        2 |        4 |        1 |        4 |       0 |        2 |        3 |        0 |        3 |        6 |        2 |       0 |      0 |      1 |     37 |     39 |      7 |      5 |     13 |    192 |      0 |      0 |      3 |     15 |     25 |     12 |      4 |      3 |    101 |      0 |      0 |      1 |     13 |      8 |      2 |      3 |      1 |     66 |      0 |      0 |      0 |      4 |     10 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 3714000 |      91 |     45 |     26 |     1 |    0 |     1 |    2 |    1 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     42 |     49 |      16 |       7 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        4 |        6 |        2 |        2 |        2 |        3 |       0 |        9 |        9 |        2 |        1 |        3 |        2 |       0 |        5 |        5 |        1 |        1 |        0 |        0 |       1 |        4 |        6 |        1 |        0 |        0 |        1 |       1 |        1 |        1 |        2 |        0 |        1 |        1 |       0 |        7 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      6 |      0 |      2 |      0 |      0 |     36 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |     24 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3714100 |     405 |    201 |     98 |    12 |    0 |     6 |    3 |    5 |     4 |    0 |     76 |    0 |    0 |    0 |    0 |    184 |    221 |      31 |      17 |       8 |       4 |      5 |      2 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       5 |       3 |       4 |       0 |      3 |      0 |      2 |      0 |        8 |       15 |       10 |       21 |        7 |        9 |       6 |       18 |       14 |       23 |       41 |        7 |       15 |       7 |        6 |       11 |       11 |        8 |        4 |        5 |       6 |        6 |       11 |       16 |        2 |        4 |        5 |       3 |        6 |       16 |        5 |        9 |        3 |        3 |       1 |       11 |        8 |        8 |        4 |        1 |        1 |       0 |        1 |        3 |        5 |        3 |        2 |        0 |       0 |        7 |        1 |        3 |        4 |        0 |        1 |       0 |      0 |      1 |     21 |     36 |      9 |      5 |      4 |    125 |      0 |      0 |      0 |     10 |     12 |      3 |      2 |      1 |     70 |      0 |      0 |      2 |      8 |      7 |      1 |      0 |      2 |     56 |      0 |      0 |      1 |      4 |      8 |      1 |      2 |      0 |     14 |      0 |     37 | s03      | R    |
| 3718000 |     370 |    275 |     41 |     3 |    0 |     3 |    1 |   14 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |    166 |    204 |      22 |       5 |       6 |       4 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       1 |       0 |      4 |      0 |      0 |      0 |        7 |        6 |       21 |       21 |       14 |       24 |      20 |        4 |       13 |       47 |       20 |       24 |       33 |      21 |        5 |        6 |        6 |        8 |        1 |        1 |       2 |        4 |        0 |        2 |        4 |        1 |        0 |       1 |        4 |        4 |        3 |        3 |        2 |        1 |       0 |        5 |        3 |        4 |        3 |        0 |        1 |       0 |        1 |        1 |        3 |        1 |        0 |        1 |       0 |        1 |        3 |        3 |        2 |        2 |        3 |       0 |      0 |      0 |     23 |     36 |     12 |      9 |     10 |    185 |      0 |      0 |      0 |      5 |      5 |      2 |      2 |      1 |     26 |      0 |      0 |      0 |      4 |      2 |      1 |      1 |      2 |     23 |      0 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3720000 |     825 |    526 |    122 |    20 |    0 |     9 |    5 |   23 |     3 |    0 |    117 |    0 |    0 |    0 |    0 |    386 |    439 |      86 |      32 |      23 |      14 |      4 |      2 |      4 |      1 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      5 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      3 |      2 |      0 |       23 |       34 |       46 |       48 |       26 |       38 |      29 |       25 |       31 |       51 |       49 |       41 |       55 |      30 |        8 |       16 |       12 |       13 |        4 |        1 |       3 |       12 |        9 |       12 |       15 |        4 |        7 |       6 |        7 |        8 |       10 |        9 |        8 |        7 |       1 |       11 |       12 |       19 |       14 |        4 |        7 |       0 |        4 |        8 |        6 |       13 |        1 |        3 |       0 |        6 |        2 |        9 |        6 |        1 |        1 |       0 |      0 |      5 |     50 |     89 |     25 |     11 |     16 |    330 |      0 |      0 |      0 |     17 |      9 |      3 |      1 |      4 |     88 |      0 |      0 |      2 |     13 |     14 |      7 |      2 |      0 |     79 |      0 |      0 |      0 |     11 |     31 |      0 |      0 |      1 |     17 |      0 |     37 | s03      | R    |
| 3722000 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3724000 |     484 |    260 |    101 |    13 |    0 |     3 |    2 |   14 |     1 |    0 |     90 |    0 |    0 |    0 |    0 |    216 |    268 |      71 |      33 |      31 |       6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      3 |      3 |      0 |       14 |       15 |       18 |       16 |       11 |       20 |      10 |       13 |       28 |       27 |       30 |       25 |       22 |      11 |        7 |       11 |       16 |       11 |        1 |        3 |       2 |       15 |       17 |       12 |        3 |        0 |        1 |       2 |        8 |       12 |        9 |        7 |        4 |        4 |       0 |       19 |       13 |        7 |        4 |        1 |        2 |       0 |        2 |        3 |        3 |        5 |        4 |        0 |       0 |        3 |        5 |        3 |        2 |        3 |        0 |       0 |      0 |      2 |     23 |     45 |      7 |      8 |      5 |    170 |      0 |      0 |      0 |     16 |      9 |      0 |      0 |      6 |     70 |      0 |      0 |      2 |     11 |      9 |      1 |      0 |      0 |     67 |      0 |      0 |      0 |      5 |     14 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 3728000 |     678 |    430 |    120 |    12 |    0 |    11 |    3 |   20 |     0 |    0 |     82 |    0 |    0 |    0 |    0 |    291 |    387 |     120 |      30 |      29 |       9 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      3 |      1 |      0 |      0 |      10 |       2 |       1 |       1 |      5 |      3 |      1 |      1 |       13 |       17 |       43 |       37 |       24 |       39 |       6 |       33 |       34 |       56 |       36 |       23 |       43 |      26 |        5 |       10 |       15 |       12 |        9 |        5 |       1 |       10 |       16 |       17 |       13 |        5 |        2 |       0 |        6 |        9 |        8 |        2 |        6 |        4 |       1 |       10 |        9 |       10 |        5 |        6 |        6 |       0 |        1 |        4 |        2 |        5 |        1 |        6 |       0 |        6 |        5 |        6 |        7 |        2 |        1 |       0 |      0 |      9 |     43 |     66 |     14 |      7 |     14 |    277 |      0 |      0 |      0 |     14 |     22 |      2 |      2 |      3 |     77 |      0 |      0 |      0 |     13 |      8 |      0 |      2 |      2 |     57 |      0 |      0 |      0 |      4 |     22 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 3730000 |     440 |    289 |     60 |     7 |    0 |     7 |    0 |   19 |     0 |    0 |     58 |    0 |    0 |    0 |    0 |    150 |    290 |      30 |      12 |      17 |       8 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |       17 |       15 |       17 |       18 |       11 |       11 |       3 |       29 |       36 |       35 |       33 |       23 |       30 |      11 |        7 |        4 |        7 |        3 |        1 |        1 |       0 |        9 |       12 |       11 |        2 |        2 |        1 |       0 |        7 |       10 |        2 |        1 |        0 |        1 |       0 |       13 |       11 |        6 |        5 |        1 |        1 |       0 |        3 |        2 |        1 |        2 |        2 |        4 |       0 |        3 |        5 |        0 |        6 |        4 |        1 |       0 |      0 |      1 |     41 |     38 |      9 |      4 |      3 |    193 |      0 |      0 |      1 |     12 |      2 |      1 |      0 |      1 |     43 |      0 |      0 |      0 |      9 |      3 |      0 |      0 |      0 |     46 |      0 |      0 |      0 |      2 |     21 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3732000 |     433 |    292 |     61 |     4 |    0 |     5 |    0 |   10 |     0 |    0 |     61 |    0 |    0 |    0 |    0 |    175 |    258 |      58 |      16 |      20 |       2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      3 |      0 |       12 |       16 |       19 |       26 |       15 |       18 |      18 |       13 |       25 |       29 |       32 |       18 |       34 |      17 |        3 |        6 |        5 |        3 |        4 |        4 |       0 |        7 |       13 |        3 |        6 |        3 |        3 |       1 |        4 |        5 |        5 |        4 |        2 |        1 |       0 |       12 |        6 |        8 |        7 |        3 |        3 |       1 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        3 |        2 |        3 |        4 |        1 |       0 |      0 |      1 |     37 |     39 |      7 |      5 |      6 |    197 |      0 |      0 |      2 |     13 |      7 |      0 |      0 |      1 |     38 |      0 |      0 |      4 |      9 |      7 |      3 |      0 |      1 |     37 |      0 |      0 |      0 |      2 |     12 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3732100 |     408 |    261 |     59 |     3 |    0 |     5 |    4 |   26 |     1 |    0 |     49 |    0 |    0 |    0 |    0 |    166 |    242 |      51 |      13 |      15 |       1 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      1 |       14 |       11 |       16 |       19 |       10 |       18 |      11 |       16 |       31 |       26 |       26 |       27 |       19 |      17 |        2 |       11 |        3 |        4 |        3 |        3 |       0 |        8 |        9 |        7 |        3 |        4 |        2 |       0 |        6 |        2 |        4 |        5 |        7 |        1 |       0 |       10 |        4 |        5 |        2 |        2 |        1 |       0 |        0 |        4 |        7 |        2 |        1 |        2 |       0 |        3 |        6 |        2 |        6 |        3 |        3 |       0 |      0 |      2 |     29 |     33 |     16 |      3 |      8 |    170 |      0 |      0 |      0 |      9 |      7 |      3 |      1 |      0 |     39 |      0 |      0 |      1 |      5 |      6 |      3 |      2 |      3 |     29 |      0 |      0 |      0 |      1 |     22 |      2 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 3750900 |      52 |     18 |     15 |     1 |    0 |     0 |    1 |    2 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     26 |     26 |       7 |       9 |       4 |       1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        3 |        3 |        1 |        1 |        1 |        2 |       1 |        0 |        2 |        0 |        2 |        0 |        1 |       1 |        0 |        3 |        3 |        1 |        0 |        0 |       0 |        0 |        1 |        4 |        1 |        1 |        1 |       0 |        0 |        3 |        2 |        2 |        0 |        0 |       0 |        5 |        0 |        1 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3751000 |     633 |    222 |    231 |    10 |    0 |     6 |    2 |    5 |     0 |    0 |    157 |    0 |    0 |    0 |    0 |    304 |    329 |      55 |      56 |      48 |       5 |      5 |      2 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       4 |       3 |       1 |     26 |     46 |     29 |      3 |       12 |       20 |       21 |       19 |        7 |       10 |       1 |       31 |       24 |       27 |       17 |       20 |       12 |       1 |       16 |       24 |       35 |       23 |       17 |       14 |       0 |       17 |       21 |       22 |       23 |       11 |        8 |       0 |       11 |       22 |       14 |       18 |        4 |        5 |       0 |       20 |       21 |       13 |       16 |        8 |        4 |       1 |        1 |        4 |        2 |        2 |        1 |        1 |       0 |        2 |        5 |        2 |        3 |        0 |        0 |       0 |      0 |      4 |     33 |     23 |      7 |      0 |      3 |    152 |      0 |      0 |      3 |     34 |     23 |      7 |      7 |     11 |    146 |      0 |      0 |      1 |     24 |     21 |      1 |      5 |      1 |    104 |      0 |      0 |      1 |      3 |      5 |      1 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 3751100 |     451 |    190 |    169 |    10 |    0 |     7 |    1 |    1 |     1 |    0 |     72 |    0 |    0 |    0 |    0 |    210 |    241 |      86 |      41 |      24 |       7 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      9 |     19 |      9 |      0 |       11 |       10 |        9 |       17 |       12 |       15 |       9 |        1 |       15 |       25 |       24 |       11 |       19 |      12 |        6 |       10 |       24 |       13 |        8 |       16 |       6 |       11 |       16 |       16 |       17 |        7 |       14 |       5 |        7 |        8 |        6 |        7 |        3 |        4 |       0 |        8 |       11 |        4 |        5 |        8 |        1 |       0 |        2 |        1 |        4 |        0 |        2 |        0 |       0 |        3 |        4 |        1 |        0 |        1 |        2 |       0 |      0 |      1 |     28 |     27 |     12 |      7 |      3 |    112 |      0 |      0 |      1 |     23 |     22 |     14 |      8 |      5 |     96 |      0 |      0 |      0 |     13 |     10 |      2 |      0 |      1 |     46 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3751200 |     275 |    117 |     89 |     7 |    0 |     5 |    0 |    3 |     0 |    0 |     54 |    0 |    0 |    0 |    0 |    121 |    154 |      40 |      21 |      22 |       2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      5 |     12 |      5 |      2 |        3 |       10 |        8 |        7 |        8 |        7 |       5 |        6 |        9 |       10 |       16 |       12 |       11 |       5 |        2 |        6 |        5 |       11 |        9 |        6 |       3 |        6 |        6 |        7 |        8 |       10 |        7 |       3 |        5 |        1 |        6 |        5 |        4 |        1 |       2 |        6 |        3 |        4 |        7 |        5 |        4 |       1 |        0 |        2 |        1 |        3 |        0 |        1 |       0 |        1 |        2 |        1 |        1 |        0 |        3 |       0 |      0 |      0 |     14 |     15 |      3 |      4 |      7 |     74 |      0 |      0 |      0 |     12 |     14 |      3 |      1 |      4 |     55 |      0 |      0 |      0 |      9 |      8 |      3 |      2 |      1 |     31 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3751300 |     629 |    208 |    271 |    10 |    0 |     2 |    4 |    3 |     2 |    0 |    129 |    0 |    0 |    0 |    0 |    312 |    317 |      56 |      85 |      54 |       5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       4 |       1 |       0 |     58 |     65 |     35 |      7 |       20 |       15 |       10 |       23 |       17 |       10 |       1 |       18 |       19 |       13 |       35 |       17 |       10 |       0 |       18 |       13 |       13 |       50 |       23 |       19 |       0 |       18 |       14 |       20 |       49 |       22 |       11 |       1 |       15 |       14 |        7 |       15 |       16 |        3 |       0 |       10 |       12 |        7 |       15 |       11 |        3 |       1 |        2 |        3 |        2 |        2 |        0 |        1 |       0 |        4 |        4 |        0 |        1 |        2 |        0 |       0 |      0 |      8 |     31 |     26 |     12 |      2 |      7 |    122 |      0 |      0 |      1 |     29 |     43 |     24 |     18 |     12 |    144 |      0 |      0 |      2 |     10 |     17 |     13 |      6 |      2 |     79 |      0 |      0 |      5 |      0 |      4 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3751400 |      91 |     30 |     39 |     1 |    0 |     1 |    0 |    3 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     47 |     44 |       8 |      10 |       7 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |     15 |      4 |      1 |        0 |        2 |        2 |        6 |        4 |        0 |       0 |        1 |        2 |        6 |        5 |        2 |        0 |       0 |        2 |        4 |        5 |        8 |        2 |        2 |       0 |        1 |        5 |        3 |        5 |        1 |        1 |       0 |        2 |        3 |        2 |        2 |        0 |        0 |       0 |        1 |        1 |        2 |        3 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      7 |      2 |      1 |      1 |     15 |      0 |      0 |      0 |      2 |     10 |      2 |      2 |      2 |     21 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 3751500 |     337 |    139 |    105 |    12 |    0 |     3 |    1 |    5 |     1 |    0 |     71 |    0 |    0 |    0 |    0 |    165 |    172 |      43 |      27 |      25 |      11 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |     12 |     25 |     14 |      6 |        7 |        8 |        7 |        9 |        9 |       18 |       4 |        6 |       10 |       14 |       11 |       13 |       12 |      11 |        1 |       11 |        8 |       10 |       11 |       11 |       2 |        9 |        7 |        8 |       11 |        8 |        8 |       0 |       12 |        6 |        5 |        4 |        6 |        0 |       0 |        5 |       10 |        5 |        7 |        8 |        3 |       0 |        1 |        2 |        5 |        0 |        3 |        5 |       0 |        2 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      1 |     19 |     12 |      8 |      2 |      7 |     90 |      0 |      0 |      0 |     17 |     13 |      5 |      5 |      3 |     62 |      0 |      0 |      1 |      8 |      5 |      6 |      0 |      3 |     48 |      0 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3751600 |     802 |    288 |    299 |    16 |    0 |     7 |    1 |    7 |     3 |    0 |    181 |    0 |    0 |    0 |    0 |    383 |    419 |      85 |     109 |      72 |       7 |      3 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |       6 |       4 |       2 |       0 |     52 |     83 |     41 |      7 |       16 |       17 |       20 |       28 |       35 |       18 |       0 |       29 |       23 |       25 |       40 |       24 |       12 |       1 |       17 |       19 |       21 |       48 |       33 |       13 |       1 |       21 |       19 |       23 |       46 |       25 |       12 |       1 |       16 |       17 |       13 |       19 |        7 |        8 |       0 |       25 |       10 |       14 |       31 |       13 |        8 |       0 |        4 |        4 |        2 |        2 |        2 |        2 |       1 |        6 |        8 |        1 |        1 |        1 |        0 |       0 |      0 |      2 |     30 |     45 |     18 |      9 |     18 |    166 |      0 |      0 |      2 |     44 |     59 |     23 |     11 |     29 |    131 |      0 |      0 |      2 |     25 |     31 |      6 |      5 |     15 |     97 |      0 |      0 |      1 |      4 |      7 |      2 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 3751700 |     648 |    270 |    237 |    15 |    0 |     4 |    0 |    6 |     0 |    0 |    116 |    0 |    0 |    0 |    0 |    320 |    328 |      74 |      67 |      45 |       4 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      4 |      1 |      0 |      2 |      0 |      0 |      0 |       4 |       3 |       1 |       0 |     42 |     45 |     18 |      5 |       13 |       30 |       17 |       24 |       20 |       18 |       1 |       23 |       33 |       29 |       28 |       22 |       12 |       0 |       24 |       27 |       20 |       39 |       16 |        9 |       0 |       14 |       23 |       19 |       23 |       14 |        9 |       0 |       13 |       14 |        7 |       12 |        4 |        5 |       1 |       16 |       17 |        5 |       10 |        6 |        6 |       0 |        1 |        2 |        2 |        1 |        0 |        0 |       0 |        5 |        5 |        6 |        0 |        2 |        1 |       0 |      0 |      3 |     40 |     32 |      7 |      4 |      9 |    175 |      0 |      0 |      2 |     31 |     20 |      8 |      6 |     10 |    160 |      0 |      0 |      2 |     21 |     13 |      4 |      0 |      1 |     75 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 3751800 |      76 |     38 |     25 |     1 |    0 |     1 |    0 |    1 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     42 |     34 |      19 |      12 |       2 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      5 |      1 |      2 |        4 |        1 |        6 |        5 |        2 |        3 |       0 |        2 |        2 |        7 |        3 |        0 |        3 |       0 |        1 |        1 |        1 |        5 |        4 |        2 |       0 |        1 |        2 |        2 |        3 |        1 |        2 |       0 |        2 |        0 |        2 |        0 |        1 |        1 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     12 |      8 |      2 |      0 |      0 |     15 |      0 |      0 |      0 |      3 |      4 |      0 |      3 |      2 |     13 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 3751900 |      62 |     20 |     23 |     0 |    0 |     2 |    1 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     31 |     31 |      11 |      13 |       9 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      5 |      4 |      1 |        1 |        1 |        1 |        4 |        2 |        0 |       0 |        2 |        2 |        2 |        3 |        2 |        0 |       0 |        6 |        2 |        0 |        3 |        2 |        0 |       0 |        3 |        0 |        1 |        4 |        1 |        1 |       0 |        2 |        0 |        0 |        3 |        2 |        0 |       0 |        4 |        0 |        1 |        3 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      7 |      1 |      1 |      1 |      9 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |     16 |      0 |      0 |      0 |      7 |      1 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3752000 |     453 |    185 |    174 |     8 |    0 |     3 |    0 |    1 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    221 |    232 |      47 |      39 |      24 |       1 |      1 |      5 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |     15 |     23 |     16 |      0 |       13 |       18 |       18 |       23 |        8 |        3 |       1 |       14 |       16 |       31 |       23 |       12 |        4 |       1 |       12 |       12 |       24 |       25 |       15 |        6 |       0 |        6 |       21 |       23 |       15 |        7 |        7 |       1 |        6 |        8 |        8 |        9 |        4 |        2 |       0 |        3 |       13 |        7 |       14 |        4 |        3 |       0 |        2 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        3 |        2 |        1 |        1 |        0 |       0 |      0 |      1 |     23 |     30 |      4 |      5 |     11 |    111 |      0 |      0 |      2 |     23 |     30 |      6 |      9 |     13 |     91 |      0 |      0 |      0 |      8 |     10 |      4 |      5 |      4 |     50 |      0 |      0 |      0 |      4 |      1 |      3 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3752100 |     370 |    188 |    108 |     5 |    0 |     1 |    2 |    5 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    162 |    208 |      38 |      31 |      15 |       3 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      5 |      8 |     14 |      0 |       13 |       12 |       18 |       10 |       10 |        6 |       0 |        9 |       22 |       30 |       35 |       13 |        8 |       2 |        9 |       10 |       12 |       14 |        4 |        3 |       0 |        7 |       14 |        7 |       15 |        5 |        8 |       0 |        5 |        7 |        7 |        8 |        4 |        2 |       0 |        6 |        3 |        6 |        7 |        4 |        1 |       0 |        3 |        3 |        2 |        0 |        0 |        0 |       0 |        1 |        2 |        3 |        0 |        0 |        0 |       0 |      0 |      2 |     31 |     33 |     10 |      6 |      5 |    101 |      0 |      0 |      0 |     12 |     12 |      4 |      2 |     10 |     68 |      0 |      0 |      0 |      7 |      9 |      3 |      2 |      1 |     38 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3753000 |     327 |    170 |     92 |     7 |    0 |     5 |    2 |    0 |     3 |    0 |     48 |    0 |    0 |    0 |    0 |    153 |    174 |      69 |      19 |      16 |       9 |      2 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      7 |      3 |      0 |        5 |        8 |        9 |       12 |       12 |       16 |      13 |        8 |        7 |       12 |       24 |       11 |       18 |      15 |        6 |        7 |        7 |       11 |        8 |        8 |       3 |        5 |        3 |       11 |        6 |        4 |       12 |       1 |        3 |        2 |        5 |        6 |        3 |        2 |       1 |        8 |        1 |        4 |        4 |        6 |        2 |       1 |        0 |        3 |        0 |        2 |        1 |        0 |       0 |        4 |        3 |        2 |        1 |        0 |        1 |       0 |      0 |      0 |     14 |     18 |     10 |      5 |      9 |    114 |      0 |      0 |      0 |     15 |     19 |      5 |      5 |      6 |     42 |      0 |      0 |      0 |      4 |      5 |      2 |      0 |      0 |     37 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      2 |     11 |      0 |     37 | s03      | R    |
| 3753100 |     214 |     95 |     72 |    10 |    0 |     3 |    3 |    0 |     3 |    0 |     28 |    0 |    0 |    0 |    0 |    106 |    108 |      31 |      13 |      10 |       3 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      7 |      2 |      1 |        1 |        4 |        6 |       10 |        8 |        9 |       3 |        6 |        8 |        8 |       12 |        7 |        9 |       4 |        3 |       10 |        6 |        7 |        5 |        7 |       3 |        4 |        4 |        2 |        6 |        8 |        4 |       3 |        3 |        2 |        2 |        2 |        2 |        2 |       0 |        3 |        3 |        1 |        4 |        2 |        2 |       0 |        1 |        3 |        2 |        1 |        1 |        3 |       0 |        2 |        0 |        2 |        2 |        1 |        1 |       0 |      0 |      1 |     12 |     15 |      8 |      7 |      0 |     52 |      0 |      0 |      1 |     10 |     12 |      5 |      3 |      6 |     35 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      1 |     17 |      0 |      0 |      0 |      7 |      2 |      0 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 3754000 |     225 |    115 |     57 |     5 |    0 |     1 |    0 |    0 |     1 |    0 |     46 |    0 |    0 |    0 |    0 |    102 |    123 |      46 |      16 |      17 |       2 |      2 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      8 |      7 |      0 |        5 |        6 |        4 |       12 |        7 |        8 |       4 |        7 |       11 |        7 |       14 |        9 |       15 |       6 |        0 |        6 |        5 |       10 |        2 |        5 |       3 |        4 |        2 |        4 |        9 |        5 |        1 |       1 |        5 |        6 |        2 |        3 |        1 |        2 |       1 |        7 |        4 |        4 |        6 |        4 |        1 |       0 |        1 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     19 |     12 |      2 |      5 |      5 |     72 |      0 |      0 |      1 |      8 |      5 |      4 |      2 |      3 |     34 |      0 |      0 |      1 |      9 |      7 |      1 |      1 |      0 |     27 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3754100 |     706 |    334 |    232 |    10 |    0 |     7 |    5 |    5 |     3 |    0 |    110 |    0 |    0 |    0 |    0 |    329 |    377 |      93 |      63 |      34 |       4 |      9 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      9 |     29 |     10 |      0 |       18 |       34 |       28 |       32 |       13 |       18 |       0 |       11 |       37 |       35 |       60 |       29 |       17 |       2 |        8 |       19 |       27 |       33 |       17 |       14 |       3 |       11 |       13 |       31 |       26 |       10 |       19 |       1 |       10 |       12 |        4 |        9 |        5 |        4 |       0 |       13 |       19 |       11 |        8 |       11 |        4 |       0 |        3 |        5 |        5 |        5 |        1 |        2 |       0 |        2 |        3 |        2 |        0 |        1 |        1 |       0 |      0 |      3 |     58 |     42 |     15 |      3 |     15 |    198 |      0 |      0 |      0 |     30 |     41 |     11 |      8 |      7 |    135 |      0 |      0 |      2 |     17 |     13 |      2 |      1 |      2 |     73 |      0 |      0 |      0 |      5 |      8 |      2 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 3754200 |     457 |    158 |    176 |    10 |    0 |     2 |    0 |    4 |     1 |    0 |    106 |    0 |    0 |    0 |    0 |    218 |    239 |      55 |      64 |      34 |       9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       4 |       4 |       0 |     31 |     26 |     19 |      1 |        6 |       11 |       12 |       11 |       11 |       10 |       1 |       15 |       22 |       11 |       23 |       15 |        7 |       3 |       11 |       23 |       18 |       18 |       16 |        9 |       2 |       11 |       20 |       14 |       17 |        7 |       10 |       0 |        9 |       11 |        3 |       12 |       11 |        5 |       0 |       11 |       14 |        7 |        8 |        9 |        6 |       0 |        3 |        4 |        1 |        0 |        0 |        0 |       0 |        3 |        1 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |     26 |     26 |     14 |      4 |      2 |     86 |      0 |      0 |      1 |     15 |     24 |      8 |      9 |      4 |    115 |      0 |      0 |      1 |     10 |     10 |      7 |      4 |      5 |     69 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 3754300 |     629 |    290 |    215 |    15 |    0 |     6 |    3 |    4 |     2 |    0 |     94 |    0 |    0 |    0 |    0 |    293 |    336 |      62 |      45 |      13 |       5 |      5 |      8 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     19 |     18 |      6 |      0 |       17 |       19 |       38 |       25 |       11 |        6 |       0 |       13 |       26 |       49 |       38 |       31 |       17 |       0 |       16 |       23 |       23 |       31 |       17 |        9 |       1 |       10 |       23 |       28 |       16 |        9 |        7 |       2 |        7 |        9 |        9 |        9 |        6 |        1 |       0 |        5 |       13 |       12 |       15 |        6 |        2 |       0 |        2 |        5 |        5 |        1 |        2 |        1 |       0 |        1 |        5 |        3 |        1 |        2 |        2 |       0 |      0 |      1 |     58 |     47 |     18 |     10 |      6 |    150 |      0 |      0 |      0 |     26 |     19 |     16 |      8 |      9 |    137 |      0 |      0 |      1 |     20 |     10 |      1 |      4 |      2 |     56 |      0 |      0 |      0 |      7 |      8 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 3754400 |     399 |    189 |    111 |    11 |    0 |     4 |    1 |    9 |     0 |    0 |     74 |    0 |    0 |    0 |    0 |    176 |    223 |      60 |      35 |      28 |       6 |      2 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     11 |     17 |      8 |      1 |        9 |       12 |       14 |       16 |        9 |        9 |       0 |        7 |       19 |       34 |       26 |       20 |       14 |       0 |        9 |       16 |       15 |       15 |        3 |        3 |       1 |        4 |       12 |       17 |        8 |        7 |        1 |       0 |        2 |       11 |        7 |        7 |        1 |        1 |       0 |        8 |       13 |        9 |        7 |        5 |        3 |       0 |        3 |        3 |        5 |        4 |        1 |        0 |       0 |        1 |        2 |        5 |        1 |        0 |        0 |       0 |      0 |      3 |     21 |     29 |      4 |      5 |      3 |    124 |      0 |      0 |      1 |     14 |     10 |      3 |      2 |      3 |     78 |      0 |      0 |      1 |      7 |      4 |      1 |      1 |      1 |     59 |      0 |      0 |      0 |      6 |      7 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 3754500 |      97 |     40 |     36 |     1 |    0 |     2 |    0 |    1 |     1 |    0 |     16 |    0 |    0 |    0 |    0 |     49 |     48 |       6 |      10 |       7 |       1 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      2 |      0 |        0 |        7 |        2 |        8 |        5 |        1 |       0 |        5 |        4 |        3 |        3 |        0 |        1 |       1 |        2 |        6 |        4 |        2 |        1 |        1 |       0 |        6 |        3 |        7 |        2 |        0 |        2 |       0 |        1 |        5 |        0 |        1 |        0 |        0 |       0 |        4 |        3 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |     34 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3754600 |     276 |    121 |     92 |     5 |    0 |     2 |    1 |    2 |     3 |    0 |     50 |    0 |    0 |    0 |    0 |    112 |    164 |      44 |      21 |      18 |       3 |      2 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      8 |      1 |      0 |        8 |        5 |       10 |        8 |        6 |        5 |       0 |        8 |       14 |       14 |       26 |        8 |        9 |       0 |        7 |        5 |       14 |       10 |        4 |        2 |       0 |        7 |       12 |       12 |       11 |        5 |        3 |       0 |        3 |        7 |        3 |        5 |        3 |        1 |       0 |        6 |        5 |        5 |        7 |        3 |        2 |       0 |        2 |        1 |        2 |        1 |        0 |        0 |       0 |        1 |        1 |        3 |        1 |        0 |        1 |       0 |      0 |      0 |     16 |     16 |      4 |      6 |      2 |     77 |      0 |      0 |      0 |     18 |      7 |      7 |      1 |      0 |     59 |      0 |      0 |      0 |     10 |      4 |      0 |      2 |      0 |     34 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3756000 |     625 |    270 |    210 |    10 |    0 |     8 |    1 |    7 |     1 |    0 |    118 |    0 |    0 |    0 |    0 |    304 |    321 |     111 |      69 |      45 |       7 |      5 |      6 |      4 |      1 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      1 |      0 |      0 |       0 |       4 |       0 |       0 |     28 |     21 |     19 |      0 |        8 |       10 |       16 |       23 |       19 |       20 |      10 |       14 |       29 |       29 |       30 |       30 |       16 |      16 |       12 |       14 |       22 |       28 |       17 |       20 |       7 |        8 |       13 |       15 |       19 |       16 |       15 |       4 |       10 |        8 |       10 |        8 |       16 |       10 |       2 |       12 |        9 |        6 |        7 |        8 |       11 |       1 |        1 |        2 |        4 |        5 |        2 |        0 |       0 |        0 |        5 |        0 |        3 |        4 |        1 |       0 |      0 |      3 |     28 |     39 |     11 |     10 |      8 |    171 |      0 |      0 |      1 |     23 |     26 |     11 |      6 |     14 |    129 |      0 |      0 |      0 |     18 |     16 |      8 |      1 |      4 |     71 |      0 |      0 |      0 |      2 |     10 |      2 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 3756100 |     390 |    194 |    102 |     8 |    0 |     4 |    4 |    7 |     0 |    0 |     71 |    0 |    0 |    0 |    0 |    179 |    211 |      72 |      33 |      31 |       4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       3 |     19 |     18 |     16 |      2 |        8 |       13 |        8 |       14 |        9 |       22 |       5 |       14 |       21 |       18 |       16 |       18 |       15 |      13 |        9 |        6 |        3 |       17 |        8 |        8 |       0 |        8 |       10 |        9 |       10 |        8 |        6 |       0 |        8 |        4 |        6 |        8 |        7 |        4 |       0 |        7 |        3 |        5 |        9 |        6 |        3 |       1 |        2 |        4 |        2 |        3 |        1 |        0 |       0 |        0 |        4 |        2 |        3 |        0 |        2 |       0 |      0 |      0 |     26 |     29 |      8 |      9 |      8 |    114 |      0 |      0 |      0 |     14 |     16 |      6 |      5 |      1 |     60 |      0 |      0 |      2 |      5 |      8 |      3 |      1 |      4 |     48 |      0 |      0 |      0 |      3 |      5 |      1 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 3758000 |     325 |    150 |    112 |     4 |    0 |     5 |    0 |    3 |     0 |    0 |     51 |    0 |    0 |    0 |    0 |    158 |    167 |      67 |      32 |       9 |       5 |      4 |      9 |      7 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      4 |      3 |      0 |        4 |       11 |       10 |       15 |        9 |       11 |       9 |        2 |        8 |       15 |       20 |       13 |       13 |      10 |        5 |        9 |        6 |       20 |        7 |        9 |       3 |        3 |        7 |        9 |        9 |        4 |       11 |      10 |        2 |        3 |        4 |        2 |        7 |        4 |       0 |        3 |        5 |        4 |        7 |        4 |        4 |       2 |        0 |        3 |        2 |        0 |        2 |        1 |       0 |        2 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |     20 |     22 |      5 |      6 |      6 |     90 |      0 |      0 |      0 |     16 |     16 |      5 |      0 |      4 |     71 |      0 |      0 |      0 |      5 |      7 |      2 |      0 |      4 |     33 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3758100 |     171 |     63 |     57 |     6 |    0 |     0 |    0 |    1 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |     82 |     89 |      26 |      12 |      18 |       2 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      5 |      4 |      0 |        2 |        1 |        2 |        6 |        7 |        6 |       3 |        3 |        6 |        6 |        8 |        4 |        7 |       2 |        3 |        2 |        2 |        9 |        2 |        6 |       5 |        2 |        5 |        2 |        5 |        3 |        8 |       3 |        4 |        3 |        2 |        5 |        2 |        4 |       1 |        5 |        2 |        5 |        4 |        1 |        5 |       0 |        2 |        1 |        0 |        0 |        0 |        2 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |      8 |      1 |      4 |      2 |      2 |     45 |      0 |      0 |      0 |      8 |      7 |      1 |      2 |      1 |     38 |      0 |      0 |      0 |      2 |      8 |      4 |      3 |      1 |     25 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3761000 |     123 |     66 |     31 |     7 |    0 |     0 |    1 |    1 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     64 |     59 |      32 |       9 |       8 |       5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      5 |      3 |      1 |        4 |        2 |        2 |        4 |        4 |        7 |       6 |        4 |        0 |        4 |        4 |        8 |        9 |       8 |        2 |        2 |        6 |        4 |        3 |        4 |       1 |        0 |        2 |        2 |        2 |        1 |        1 |       1 |        2 |        1 |        2 |        2 |        1 |        2 |       0 |        1 |        1 |        1 |        2 |        0 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        2 |       0 |      0 |      0 |      8 |     11 |      1 |      1 |      0 |     45 |      0 |      0 |      0 |      4 |      6 |      0 |      0 |      3 |     18 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     12 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 3761100 |     546 |    235 |    167 |    11 |    0 |     7 |    2 |    6 |     1 |    0 |    117 |    0 |    0 |    0 |    0 |    221 |    325 |      82 |      51 |      32 |       6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |     13 |     26 |     22 |      2 |        9 |       26 |       15 |       15 |        7 |        7 |      11 |       18 |       48 |       30 |       14 |       12 |       13 |      10 |        6 |       24 |       19 |       15 |        8 |        1 |       4 |        8 |       41 |       17 |        8 |        6 |        5 |       5 |        7 |       18 |        5 |        7 |        2 |        4 |       0 |       18 |       36 |        6 |        5 |        5 |        4 |       0 |        2 |        5 |        2 |        1 |        0 |        1 |       0 |        1 |        7 |        4 |        4 |        0 |        0 |       0 |      0 |      1 |     33 |     17 |      3 |      2 |      3 |    176 |      0 |      0 |      0 |     25 |      7 |      6 |      6 |      3 |    120 |      0 |      0 |      0 |     18 |      5 |      1 |      0 |      2 |     91 |      0 |      0 |      1 |      7 |      7 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3763000 |     459 |    189 |    159 |     8 |    0 |     3 |    3 |    4 |     2 |    0 |     91 |    0 |    0 |    0 |    0 |    225 |    234 |      73 |      49 |      35 |       9 |      0 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |     33 |     46 |     31 |      3 |        6 |       15 |       10 |       11 |       12 |       25 |       7 |        5 |       14 |       18 |       16 |       19 |       23 |       8 |        5 |       12 |       16 |        9 |       17 |       18 |       3 |        4 |       13 |       13 |        8 |       17 |       22 |       2 |        5 |        8 |        6 |       10 |        9 |        6 |       3 |        6 |       14 |        4 |        6 |        6 |        8 |       0 |        0 |        4 |        0 |        3 |        0 |        4 |       1 |        2 |        2 |        1 |        0 |        2 |        1 |       0 |      0 |      1 |     18 |     26 |     13 |      2 |     10 |    119 |      0 |      0 |      1 |     21 |     18 |     10 |      6 |     14 |     89 |      0 |      0 |      0 |      6 |     12 |      5 |      2 |      6 |     60 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 3763100 |     273 |    137 |     78 |     9 |    0 |     1 |    0 |    3 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    129 |    144 |      75 |      20 |      20 |       7 |      5 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      0 |        8 |        6 |       10 |       14 |       13 |        7 |       5 |        5 |       15 |       10 |       17 |       10 |       10 |       7 |        4 |        7 |        8 |        6 |        6 |        7 |       3 |        3 |        5 |        5 |        7 |        8 |        4 |       5 |        2 |        3 |        6 |        4 |        1 |        2 |       0 |        8 |        3 |        9 |        3 |        0 |        4 |       0 |        1 |        2 |        3 |        0 |        1 |        0 |       0 |        0 |        2 |        2 |        1 |        0 |        1 |       0 |      0 |      2 |     17 |     21 |      3 |      1 |      1 |     92 |      0 |      0 |      0 |     14 |      7 |      0 |      4 |      2 |     51 |      0 |      0 |      0 |      4 |      7 |      2 |      0 |      0 |     32 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 3763200 |     255 |    111 |     87 |     5 |    0 |     5 |    1 |    1 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |    120 |    135 |      64 |      24 |      19 |       5 |      1 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      1 |      2 |      0 |        4 |        5 |       11 |        8 |        8 |        9 |       7 |       11 |        5 |       14 |       10 |        3 |        9 |       7 |        3 |        2 |        8 |       12 |        6 |        6 |       5 |        2 |        5 |        7 |       11 |        6 |        8 |       6 |        6 |        4 |        2 |        4 |        2 |        2 |       1 |        6 |        2 |        5 |        5 |        0 |        5 |       0 |        0 |        0 |        2 |        1 |        2 |        0 |       0 |        2 |        0 |        2 |        3 |        0 |        1 |       0 |      0 |      0 |     10 |     12 |      6 |      1 |      1 |     81 |      0 |      0 |      0 |      3 |     15 |      4 |      3 |      6 |     56 |      0 |      0 |      0 |      5 |      8 |      3 |      0 |      2 |     26 |      0 |      0 |      0 |      2 |      6 |      2 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 3764000 |     254 |    140 |     58 |     4 |    0 |     1 |    0 |    3 |     0 |    0 |     48 |    0 |    0 |    0 |    0 |    111 |    143 |      73 |      15 |      21 |       4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        7 |        8 |        7 |       11 |        6 |       14 |      11 |        9 |       16 |        9 |        9 |       11 |       14 |       8 |        6 |        3 |        5 |        3 |        4 |        4 |       4 |        1 |        4 |        7 |        5 |        3 |        9 |       0 |        1 |        2 |        7 |        3 |        1 |        2 |       0 |        7 |        5 |        8 |        5 |        3 |        4 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        5 |        0 |        0 |        0 |       0 |      0 |      0 |     17 |     27 |      3 |      4 |      3 |     86 |      0 |      0 |      2 |     10 |      9 |      3 |      2 |      0 |     32 |      0 |      0 |      0 |      7 |      6 |      0 |      0 |      1 |     34 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3764100 |     318 |    160 |    101 |     8 |    0 |     7 |    0 |    3 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |    146 |    172 |      62 |      22 |      18 |       7 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      2 |      1 |      0 |        2 |        9 |       11 |        9 |        5 |       15 |      10 |        7 |       10 |       20 |       17 |       14 |       13 |      18 |        0 |        8 |       15 |        8 |        7 |       10 |       8 |        3 |        5 |        6 |        6 |        3 |       16 |       6 |        1 |        1 |        7 |        4 |        3 |        2 |       2 |        1 |        4 |        3 |        5 |        0 |        4 |       1 |        1 |        3 |        1 |        3 |        0 |        1 |       0 |        0 |        1 |        4 |        1 |        0 |        4 |       0 |      0 |      0 |     18 |     25 |      6 |      4 |      7 |    100 |      0 |      0 |      0 |      8 |     17 |      2 |      6 |      2 |     66 |      0 |      0 |      0 |      9 |      2 |      0 |      2 |      1 |     24 |      0 |      0 |      0 |      3 |      9 |      0 |      0 |      2 |      5 |      0 |     37 | s03      | R    |
| 3767000 |     381 |    184 |    115 |     6 |    0 |     5 |    1 |    5 |     0 |    0 |     65 |    0 |    0 |    0 |    0 |    188 |    193 |     104 |      55 |      30 |       9 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     14 |      7 |      4 |      0 |        6 |       13 |       16 |       18 |       12 |       11 |       6 |        9 |       14 |       13 |       20 |       14 |       24 |       8 |        9 |       11 |       14 |       11 |        4 |        8 |       5 |        5 |        8 |       13 |       11 |        7 |        4 |       5 |        7 |       10 |        5 |        7 |        2 |        4 |       1 |        8 |        9 |        4 |        3 |        3 |        2 |       0 |        1 |        2 |        2 |        0 |        3 |        0 |       0 |        3 |        2 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |     27 |     35 |      3 |      3 |      4 |    111 |      0 |      0 |      1 |     18 |     20 |      1 |      2 |      2 |     71 |      0 |      0 |      1 |      7 |      8 |      0 |      1 |      2 |     46 |      0 |      0 |      1 |      2 |      3 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 3769000 |     336 |    169 |     97 |    11 |    0 |     1 |    0 |    3 |     1 |    0 |     54 |    0 |    0 |    0 |    0 |    148 |    188 |     105 |      23 |      30 |       7 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      8 |      3 |      2 |        6 |       13 |       16 |        4 |        5 |       10 |      11 |       11 |       17 |       20 |       17 |       10 |       17 |      12 |        2 |        4 |        4 |       15 |        7 |        7 |       4 |        6 |       11 |       11 |        8 |        7 |        7 |       4 |        4 |       11 |        6 |        5 |        2 |        0 |       0 |        6 |        5 |        7 |        4 |        2 |        2 |       0 |        1 |        2 |        2 |        2 |        2 |        2 |       1 |        0 |        1 |        2 |        0 |        0 |        1 |       0 |      0 |      2 |     19 |     24 |      4 |      2 |      7 |    111 |      0 |      0 |      0 |     14 |     14 |      3 |      5 |      7 |     54 |      0 |      0 |      1 |      5 |      7 |      1 |      0 |      3 |     37 |      0 |      0 |      0 |      2 |      7 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3769100 |     435 |    205 |    150 |     8 |    0 |     6 |    0 |    3 |     2 |    0 |     61 |    0 |    0 |    0 |    0 |    204 |    231 |      89 |      40 |      23 |       5 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |     13 |      6 |      2 |        5 |       15 |       14 |       16 |       13 |       20 |      10 |       10 |       11 |       22 |       12 |       18 |       31 |       8 |        8 |       14 |       14 |       10 |       13 |       12 |       6 |        7 |        9 |        9 |       15 |       13 |       15 |       5 |        1 |        9 |        1 |        8 |        5 |        3 |       0 |       11 |        9 |        3 |        4 |        4 |        2 |       1 |        2 |        1 |        1 |        0 |        1 |        2 |       0 |        1 |        5 |        1 |        3 |        0 |        2 |       0 |      0 |      0 |     32 |     36 |     13 |      6 |      3 |    115 |      0 |      0 |      0 |     18 |     28 |      6 |      6 |      5 |     87 |      0 |      0 |      0 |     14 |      7 |      2 |      0 |      2 |     36 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3850000 |     495 |    225 |    138 |    11 |    0 |    10 |    4 |    6 |     2 |    0 |     99 |    0 |    0 |    0 |    0 |    230 |    265 |     137 |      56 |      49 |      11 |      2 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      4 |      4 |      2 |      1 |        6 |       17 |       25 |       20 |       10 |       21 |       2 |       17 |       20 |       28 |       17 |       21 |       19 |       2 |        4 |        9 |       14 |       15 |       11 |       11 |       0 |       13 |       15 |       14 |       15 |        8 |        9 |       0 |        8 |       10 |        9 |        9 |        5 |        6 |       0 |       18 |       14 |        5 |        9 |        3 |        3 |       0 |        4 |        3 |        1 |        8 |        1 |        1 |       0 |        1 |        0 |        4 |        4 |        5 |        1 |       0 |      0 |      3 |     32 |     31 |      4 |      3 |      4 |    148 |      0 |      0 |      1 |     27 |     12 |      8 |      3 |      5 |     82 |      0 |      0 |      0 |     17 |     10 |      3 |      1 |      1 |     67 |      0 |      0 |      0 |      8 |      5 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 3850100 |     510 |    235 |    175 |    12 |    0 |     8 |    3 |    1 |     2 |    0 |     74 |    0 |    0 |    0 |    0 |    245 |    265 |     147 |      59 |      37 |      10 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      9 |      2 |      6 |      3 |       15 |       16 |       21 |       18 |        7 |       24 |       8 |       13 |       27 |       23 |       24 |       14 |       19 |       6 |        7 |       18 |       15 |       19 |       13 |       12 |       4 |       10 |       15 |       20 |       18 |        7 |       15 |       2 |        6 |        9 |        9 |        4 |        6 |        3 |       1 |       14 |        7 |        2 |        3 |        7 |        2 |       1 |        4 |        2 |        2 |        2 |        0 |        0 |       0 |        5 |        4 |        3 |        3 |        1 |        0 |       0 |      0 |      4 |     40 |     39 |      7 |      4 |      4 |    137 |      0 |      0 |      2 |     31 |     31 |      7 |      3 |      4 |     97 |      0 |      0 |      0 |     10 |      7 |      1 |      1 |      4 |     51 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 3851000 |     660 |    306 |    212 |    17 |    0 |    11 |    7 |    7 |     6 |    0 |     94 |    0 |    0 |    0 |    0 |    316 |    344 |     172 |      63 |      49 |      24 |     10 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |      8 |      1 |      1 |       10 |       32 |       22 |       21 |       13 |       29 |      11 |       14 |       22 |       29 |       27 |       26 |       37 |      13 |       10 |       17 |       21 |       29 |        7 |       17 |       4 |       18 |       22 |       23 |       15 |       11 |       14 |       4 |       11 |       13 |        9 |       10 |        5 |        3 |       0 |       11 |       12 |        7 |        5 |        7 |        1 |       0 |        1 |        8 |        4 |        6 |        2 |        1 |       0 |        4 |       12 |        6 |        2 |        2 |        0 |       0 |      0 |      5 |     47 |     53 |      7 |      7 |      2 |    185 |      0 |      0 |      2 |     46 |     23 |     12 |      3 |      4 |    122 |      0 |      0 |      2 |      9 |      5 |      3 |      0 |      1 |     74 |      0 |      0 |      2 |      8 |      5 |      1 |      0 |      1 |     31 |      0 |     37 | s03      | R    |
| 3853000 |     434 |    185 |    133 |     7 |    0 |     6 |    4 |    1 |     1 |    0 |     97 |    0 |    0 |    0 |    0 |    216 |    218 |      88 |      30 |      41 |       7 |      3 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     16 |      4 |      5 |      0 |       10 |        8 |       14 |       20 |       13 |       14 |       8 |        7 |       21 |       11 |       23 |       11 |       16 |       9 |        9 |        9 |       15 |       19 |        9 |       10 |       3 |        4 |        8 |       14 |        8 |        5 |       13 |       7 |        7 |       10 |        8 |       10 |        5 |        3 |       1 |        9 |       17 |        9 |        8 |        2 |        6 |       2 |        6 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        4 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |     20 |     28 |     11 |      1 |      7 |    117 |      0 |      0 |      0 |     16 |     23 |     11 |      3 |      5 |     75 |      0 |      0 |      1 |     16 |     13 |      4 |      2 |      2 |     59 |      0 |      0 |      0 |      3 |      5 |      3 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3853100 |     530 |    208 |    198 |    16 |    0 |     9 |    6 |    3 |     3 |    0 |     87 |    0 |    0 |    0 |    0 |    275 |    255 |      81 |      60 |      37 |      16 |      4 |      5 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |     23 |      8 |      0 |        5 |       19 |       14 |       15 |       14 |       31 |       1 |       11 |       21 |       17 |       20 |       15 |       23 |       2 |       12 |       14 |       21 |       21 |       16 |       16 |       0 |       11 |       19 |       13 |       10 |       19 |       24 |       2 |        7 |        8 |       16 |        3 |        6 |        6 |       0 |        9 |        4 |        9 |        8 |        6 |        5 |       0 |        5 |        7 |        5 |        5 |        6 |        2 |       0 |        1 |        0 |        2 |        1 |        2 |        1 |       0 |      0 |      1 |     31 |     34 |      7 |      7 |      4 |    124 |      0 |      0 |      0 |     27 |     28 |      7 |      4 |     12 |    120 |      0 |      0 |      0 |      9 |      4 |      1 |      1 |      3 |     69 |      0 |      0 |      1 |      5 |      4 |      2 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 3855000 |     519 |    184 |    215 |    13 |    0 |    10 |    3 |    1 |     2 |    0 |     91 |    0 |    0 |    0 |    0 |    249 |    270 |      46 |      32 |      19 |       7 |      7 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       2 |       0 |       0 |     10 |      4 |      1 |      0 |        6 |        3 |       18 |       19 |       10 |       11 |      12 |        9 |       12 |       18 |       20 |       11 |       18 |      17 |        9 |       15 |       15 |       18 |       14 |       25 |      13 |        8 |       10 |       18 |       18 |       11 |       30 |      11 |        9 |        5 |       11 |       11 |        6 |        2 |       2 |       12 |        7 |        6 |       13 |        4 |        2 |       1 |        1 |        3 |        3 |        4 |        1 |        3 |       0 |        3 |        2 |        1 |        3 |        1 |        4 |       0 |      0 |      1 |     25 |     15 |      9 |      1 |      4 |    129 |      0 |      0 |      2 |     24 |     27 |     16 |     13 |      5 |    128 |      0 |      0 |      0 |     11 |      4 |      6 |      1 |      6 |     63 |      0 |      0 |      0 |      4 |     10 |      4 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 3855900 |     515 |    204 |    177 |    13 |    0 |     5 |    0 |    5 |     0 |    0 |    111 |    0 |    0 |    0 |    0 |    240 |    275 |     107 |      91 |      48 |      13 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |     29 |     35 |     19 |      2 |       10 |       21 |       13 |       19 |       22 |       17 |       1 |       13 |       24 |       18 |       20 |       15 |       11 |       0 |       10 |       13 |       18 |       12 |       12 |       12 |       0 |       12 |       21 |       11 |       18 |       21 |       16 |       1 |       11 |        5 |        8 |       10 |        8 |        6 |       0 |       20 |       12 |        9 |       10 |        7 |        5 |       0 |        0 |        3 |        2 |        3 |        0 |        4 |       0 |        4 |        4 |        1 |        1 |        0 |        1 |       0 |      0 |      2 |     36 |     32 |      7 |      8 |      7 |    112 |      0 |      0 |      2 |     32 |     21 |     11 |      8 |      9 |     94 |      0 |      0 |      0 |     10 |     12 |      7 |      8 |      3 |     71 |      0 |      0 |      0 |      2 |      7 |      3 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 3856000 |     311 |    149 |     82 |     6 |    0 |     1 |    4 |    4 |     2 |    0 |     63 |    0 |    0 |    0 |    0 |    156 |    155 |      84 |      24 |      32 |       9 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      1 |      1 |      0 |        4 |        7 |        8 |       14 |        9 |       15 |      13 |        5 |       10 |       11 |       10 |        8 |       18 |      17 |        2 |        5 |        9 |       10 |        4 |        8 |       5 |        2 |        8 |        7 |        9 |        4 |        4 |       5 |       11 |        5 |        5 |        5 |        4 |        3 |       1 |        7 |        7 |        5 |        5 |        3 |        1 |       1 |        2 |        2 |        1 |        4 |        0 |        0 |       0 |        0 |        5 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |     18 |     21 |     12 |      1 |      5 |     92 |      0 |      0 |      0 |     14 |     12 |      4 |      3 |      2 |     47 |      0 |      0 |      0 |      8 |     10 |      3 |      2 |      1 |     39 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |      0 |     12 |      0 |     37 | s03      | R    |
| 3856100 |     513 |    178 |    216 |     8 |    0 |     3 |    1 |    5 |     1 |    0 |    101 |    0 |    0 |    0 |    0 |    275 |    238 |      97 |      84 |      51 |       5 |      2 |      2 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |     18 |     39 |     11 |      2 |       14 |       18 |       17 |       16 |       11 |       14 |       0 |        8 |       16 |       21 |       11 |       18 |       14 |       0 |       11 |       15 |       30 |       31 |       23 |       11 |       1 |        6 |       11 |       22 |       32 |       16 |        7 |       0 |       10 |       11 |        6 |        9 |       12 |        5 |       0 |       13 |       10 |        7 |        6 |        6 |        6 |       0 |        0 |        3 |        1 |        3 |        1 |        2 |       0 |        2 |        6 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |     34 |     28 |      6 |      3 |     11 |     94 |      0 |      0 |      2 |     43 |     38 |     15 |     10 |     18 |     90 |      0 |      0 |      0 |     19 |     13 |      7 |      2 |      2 |     58 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3856200 |     150 |     59 |     51 |     2 |    0 |     3 |    2 |    2 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |     74 |     76 |      36 |      21 |      18 |       8 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        8 |        5 |        8 |        0 |        4 |       0 |        2 |       10 |        6 |        8 |        3 |        1 |       0 |        0 |       10 |        7 |        6 |        1 |        1 |       0 |        7 |        5 |        7 |        1 |        3 |        2 |       1 |        9 |        4 |        1 |        3 |        0 |        1 |       0 |        5 |        3 |        2 |        3 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |     10 |      6 |      5 |      0 |      0 |     38 |      0 |      0 |      2 |      9 |     10 |      2 |      0 |      1 |     27 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |     26 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3856600 |       2 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3857000 |     394 |    166 |    149 |     8 |    0 |     2 |    0 |    1 |     2 |    0 |     66 |    0 |    0 |    0 |    0 |    174 |    220 |     114 |      56 |      40 |       6 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     11 |     13 |     12 |      0 |        9 |        7 |       12 |       11 |        9 |        7 |       3 |        8 |       19 |       28 |       17 |       13 |       20 |       3 |       10 |       13 |       12 |       17 |        7 |       12 |       4 |       10 |       13 |       16 |       16 |       10 |        9 |       0 |        7 |        2 |        5 |       10 |        3 |        5 |       0 |        7 |        9 |        3 |        4 |        4 |        6 |       1 |        3 |        2 |        3 |        0 |        0 |        1 |       0 |        1 |        0 |        2 |        0 |        1 |        0 |       0 |      0 |      3 |     28 |     36 |      1 |      1 |      6 |     91 |      0 |      0 |      2 |     30 |     32 |      6 |      6 |      5 |     68 |      0 |      0 |      1 |      8 |      8 |      1 |      1 |      1 |     46 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 3857100 |     642 |    274 |    211 |    15 |    0 |     3 |    2 |    7 |     3 |    0 |    127 |    0 |    0 |    0 |    0 |    327 |    315 |     164 |      93 |      47 |      18 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |     23 |     17 |      2 |       19 |       24 |       25 |       26 |       22 |       12 |       0 |       18 |       30 |       29 |       35 |       22 |       12 |       0 |       10 |       14 |       23 |       24 |       25 |       12 |       0 |       11 |       16 |       22 |       19 |       21 |       14 |       0 |       16 |       17 |        9 |        8 |       17 |        4 |       0 |       22 |        7 |       10 |        7 |        7 |        3 |       0 |        4 |        8 |        6 |        1 |        1 |        0 |       0 |        1 |        5 |        2 |        0 |        2 |        0 |       0 |      0 |      3 |     43 |     44 |     12 |      6 |      9 |    157 |      0 |      0 |      3 |     27 |     35 |     18 |     10 |     12 |    106 |      0 |      0 |      1 |     15 |     18 |      3 |      1 |      7 |     82 |      0 |      0 |      0 |      5 |      6 |      1 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 3857200 |     891 |    431 |    218 |    21 |    0 |     6 |    4 |    8 |     2 |    0 |    201 |    0 |    0 |    0 |    0 |    384 |    507 |     291 |     116 |     118 |      17 |      4 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      9 |      9 |      3 |       28 |       39 |       34 |       37 |       21 |       18 |       0 |       38 |       57 |       64 |       49 |       20 |       26 |       0 |       10 |       27 |       18 |       22 |       11 |        8 |       1 |       19 |       32 |       30 |       21 |       12 |        7 |       0 |       22 |       30 |       14 |        5 |       12 |        8 |       0 |       34 |       29 |       17 |       17 |        8 |        5 |       0 |        7 |        8 |        1 |        3 |        0 |        0 |       0 |        6 |        6 |        5 |        3 |        1 |        0 |       1 |      0 |      7 |     69 |     50 |     10 |      5 |      4 |    286 |      0 |      0 |      4 |     35 |     20 |      5 |      2 |      4 |    148 |      0 |      0 |      1 |     28 |     12 |      3 |      2 |      2 |    153 |      0 |      0 |      3 |      5 |      9 |      1 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 3857300 |      47 |     13 |     23 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     26 |     21 |       2 |       6 |       4 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        1 |        2 |        1 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       1 |        1 |        0 |        3 |        1 |        4 |        3 |       1 |        1 |        0 |        0 |        1 |        4 |        3 |       1 |        1 |        1 |        2 |        0 |        0 |        0 |       0 |        1 |        2 |        2 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      5 |      4 |      2 |      1 |      1 |     10 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3857400 |     705 |    294 |    245 |    15 |    0 |     7 |    0 |    9 |     4 |    0 |    131 |    0 |    0 |    0 |    0 |    350 |    355 |     199 |     123 |      71 |      26 |      2 |      5 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |       1 |       0 |       0 |       0 |     26 |     25 |     13 |      0 |       16 |       34 |       22 |       23 |       19 |       17 |       0 |       16 |       39 |       32 |       44 |       16 |       14 |       2 |       18 |       20 |       16 |       46 |       26 |       10 |       1 |        7 |       30 |       17 |       30 |       18 |        6 |       0 |       16 |       10 |       16 |       11 |        7 |        5 |       0 |       28 |        4 |        7 |       16 |        6 |        5 |       0 |        4 |        8 |        2 |        3 |        0 |        0 |       0 |        6 |        9 |        0 |        2 |        1 |        0 |       0 |      0 |      3 |     48 |     51 |     20 |      1 |      7 |    164 |      0 |      0 |      1 |     29 |     52 |     22 |      4 |     12 |    125 |      0 |      0 |      1 |     15 |     21 |      4 |      2 |      2 |     86 |      0 |      0 |      2 |      7 |     10 |      3 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3857500 |     592 |    215 |    251 |    15 |    0 |     8 |    1 |    2 |     3 |    0 |     97 |    0 |    0 |    0 |    0 |    294 |    298 |      90 |      55 |      23 |       3 |      7 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     13 |     13 |     11 |      2 |        5 |       13 |       14 |       18 |       17 |       14 |       8 |       14 |       19 |       24 |       20 |       20 |       22 |       7 |       11 |       24 |       32 |       30 |       20 |       16 |       7 |       15 |       17 |       20 |       20 |       12 |       16 |      11 |        3 |       13 |        5 |       12 |        5 |        9 |       1 |        7 |       13 |        4 |        7 |        6 |        9 |       3 |        4 |        2 |        6 |        0 |        4 |        1 |       0 |        3 |        4 |        2 |        3 |        0 |        0 |       0 |      0 |      2 |     19 |     39 |     10 |      8 |      6 |    131 |      0 |      0 |      3 |     38 |     40 |     10 |      8 |     10 |    142 |      0 |      0 |      1 |     11 |     14 |      6 |      3 |      5 |     57 |      0 |      0 |      0 |      6 |      6 |      1 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 3857600 |     287 |    140 |     84 |     3 |    0 |     0 |    2 |    2 |     0 |    0 |     56 |    0 |    0 |    0 |    0 |    133 |    154 |     102 |      51 |      39 |       6 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        3 |       14 |       12 |       19 |        4 |       10 |       0 |       10 |       20 |       17 |       14 |        4 |       13 |       0 |       10 |       12 |       15 |        6 |        5 |        1 |       0 |        6 |       12 |        8 |        3 |        4 |        2 |       0 |        4 |       10 |        3 |        1 |        2 |        0 |       0 |       10 |        6 |        9 |        8 |        2 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |      0 |      5 |     17 |     20 |      1 |      4 |      0 |     93 |      0 |      0 |      1 |     14 |     10 |      8 |      3 |      0 |     48 |      0 |      0 |      0 |      7 |      9 |      0 |      0 |      1 |     39 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3857700 |     222 |     76 |     83 |     4 |    0 |     3 |    4 |    1 |     1 |    0 |     50 |    0 |    0 |    0 |    0 |    109 |    113 |      43 |      35 |      24 |       5 |      1 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      8 |      3 |      0 |        3 |        7 |        5 |        8 |        5 |        3 |       0 |        2 |       10 |        7 |       12 |       10 |        4 |       0 |        7 |        7 |        9 |       20 |        4 |        3 |       0 |        2 |        6 |        6 |       11 |        4 |        4 |       0 |        4 |        2 |        3 |        9 |        2 |        1 |       0 |       10 |        5 |        3 |        7 |        2 |        1 |       1 |        0 |        2 |        0 |        2 |        1 |        2 |       0 |        0 |        1 |        2 |        0 |        1 |        2 |       0 |      0 |      1 |      8 |     16 |      4 |      1 |      6 |     40 |      0 |      0 |      2 |     15 |      9 |      5 |      3 |      7 |     42 |      0 |      0 |      1 |      4 |     10 |      1 |      0 |      3 |     31 |      0 |      0 |      0 |      2 |      0 |      1 |      2 |      1 |      7 |      0 |     37 | s03      | R    |
| 3857800 |       5 |      4 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      2 |       2 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3857900 |       1 |      0 |      0 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3858000 |     660 |    310 |    178 |    21 |    0 |     9 |    3 |    4 |     2 |    0 |    133 |    0 |    0 |    0 |    0 |    317 |    343 |     213 |      76 |      86 |      15 |      4 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |     11 |      4 |      9 |      0 |       17 |       28 |       31 |       22 |       21 |       22 |       4 |       20 |       30 |       26 |       40 |       22 |       22 |       5 |        7 |       16 |       14 |       18 |       14 |        9 |       1 |        8 |       16 |       23 |       22 |       13 |       13 |       4 |       15 |       25 |        8 |        8 |        7 |        8 |       0 |       13 |       13 |       12 |       12 |        4 |        8 |       0 |        5 |        8 |        5 |        1 |        2 |        1 |       0 |        4 |        6 |        4 |        2 |        1 |        0 |       0 |      0 |      9 |     48 |     52 |     14 |      2 |     11 |    174 |      0 |      0 |      2 |     28 |     28 |      6 |      4 |      6 |    104 |      0 |      0 |      2 |     19 |     17 |      5 |      2 |      3 |     85 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      1 |     27 |      0 |     37 | s03      | R    |
| 3858100 |     301 |    154 |     87 |     4 |    0 |     5 |    3 |    4 |     0 |    0 |     44 |    0 |    0 |    0 |    0 |    145 |    156 |      96 |      30 |      28 |       9 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      2 |      0 |      1 |        5 |       13 |       12 |       17 |        9 |        6 |       2 |       13 |       13 |       17 |       17 |       17 |       12 |       1 |        3 |        4 |       17 |        5 |        8 |        8 |       2 |        3 |        5 |        8 |        9 |        7 |        5 |       3 |        6 |        6 |        6 |        4 |        3 |        0 |       0 |        7 |        4 |        4 |        3 |        1 |        0 |       0 |        0 |        4 |        2 |        2 |        0 |        1 |       0 |        0 |        5 |        2 |        0 |        0 |        0 |       0 |      0 |      6 |     25 |     21 |      9 |      4 |      5 |     84 |      0 |      0 |      3 |     10 |     14 |      3 |      2 |      4 |     51 |      0 |      0 |      0 |      5 |      8 |      0 |      1 |      0 |     30 |      0 |      0 |      1 |      4 |      3 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3858200 |     438 |    207 |    131 |     6 |    0 |     6 |    1 |    5 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    221 |    217 |     127 |      44 |      34 |      12 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |     15 |      8 |      5 |      1 |       11 |       12 |       19 |       13 |       13 |       17 |       4 |       14 |       19 |       23 |       19 |       16 |       23 |       4 |        6 |       11 |       11 |       23 |       11 |        5 |       7 |        6 |       10 |        6 |       15 |       11 |        6 |       3 |       10 |       10 |        6 |       12 |        8 |        2 |       1 |        9 |        7 |        4 |        7 |        2 |        2 |       1 |        1 |        4 |        0 |        2 |        0 |        1 |       1 |        1 |        6 |        1 |        0 |        1 |        1 |       0 |      0 |      3 |     34 |     27 |      8 |      5 |      4 |    126 |      0 |      0 |      3 |     26 |     20 |      7 |      6 |      4 |     65 |      0 |      0 |      0 |      9 |     11 |      6 |      1 |      3 |     51 |      0 |      0 |      0 |      4 |      5 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 3858300 |     534 |    295 |    107 |    14 |    0 |     6 |    4 |    7 |     0 |    0 |    101 |    0 |    0 |    0 |    0 |    226 |    308 |     234 |      64 |      73 |      21 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      4 |      1 |      4 |      0 |       19 |       19 |       23 |       27 |       13 |       21 |       0 |       26 |       26 |       36 |       28 |       26 |       30 |       1 |        5 |        4 |       11 |        9 |       10 |        8 |       0 |        7 |       14 |       12 |        9 |       11 |        7 |       0 |       16 |        7 |        9 |        2 |        4 |        0 |       2 |       13 |       13 |       11 |       12 |        4 |        7 |       1 |        3 |        8 |        2 |        1 |        1 |        2 |       0 |        2 |        7 |        3 |        0 |        1 |        1 |       0 |      0 |      4 |     49 |     59 |     15 |      3 |      3 |    162 |      0 |      0 |      2 |     18 |     22 |      6 |      2 |      4 |     53 |      0 |      0 |      1 |     15 |      9 |      3 |      1 |      0 |     72 |      0 |      0 |      1 |      6 |      8 |      3 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3859000 |     592 |    260 |    203 |    13 |    0 |     6 |    2 |    1 |     1 |    0 |    106 |    0 |    0 |    0 |    0 |    279 |    313 |     122 |      48 |      50 |       8 |      3 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     16 |      9 |      8 |      0 |        5 |       21 |       16 |       14 |       20 |       25 |      13 |       16 |       24 |       15 |       16 |       34 |       28 |      13 |       14 |       18 |       19 |       21 |       20 |        9 |       6 |        5 |       12 |       24 |       21 |       14 |       17 |       3 |       14 |       10 |        6 |        7 |        4 |        5 |       0 |       19 |       11 |        7 |        6 |        8 |        7 |       2 |        4 |        1 |        3 |        2 |        2 |        0 |       0 |        3 |        1 |        1 |        3 |        1 |        2 |       0 |      0 |      1 |     30 |     39 |     11 |      7 |      6 |    166 |      0 |      0 |      1 |     28 |     33 |     18 |      5 |      8 |    110 |      0 |      0 |      2 |     17 |     15 |      2 |      2 |      3 |     65 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 3859100 |     245 |     90 |    100 |     6 |    0 |     0 |    0 |    2 |     2 |    0 |     45 |    0 |    0 |    0 |    0 |    126 |    119 |      53 |      35 |      17 |       5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     16 |     19 |     14 |      0 |        6 |        5 |       11 |       17 |        5 |        5 |       0 |        4 |        7 |       10 |       12 |        4 |        4 |       0 |        6 |        4 |        4 |       16 |       14 |        5 |       0 |        5 |        5 |        8 |       19 |        8 |        6 |       0 |        6 |        4 |        4 |        7 |        1 |        2 |       0 |        3 |        5 |        3 |        7 |        1 |        2 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        3 |        0 |        1 |       0 |      0 |      0 |     22 |     11 |     10 |      4 |      3 |     40 |      0 |      0 |      0 |     11 |     19 |      3 |      9 |     12 |     46 |      0 |      0 |      1 |      6 |      3 |      1 |      1 |      2 |     31 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3859900 |     412 |    199 |    125 |     9 |    0 |     3 |    2 |    4 |     3 |    0 |     67 |    0 |    0 |    0 |    0 |    199 |    213 |     126 |      50 |      41 |      14 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      6 |      0 |      0 |        7 |       19 |       13 |       20 |        7 |       20 |       3 |        7 |       17 |       14 |       22 |       19 |       28 |       3 |        3 |       10 |       10 |       14 |       11 |       18 |       1 |        2 |        7 |        8 |       11 |       10 |       17 |       3 |        4 |        5 |        8 |        5 |        7 |        3 |       0 |        7 |        6 |        9 |       10 |        3 |        0 |       0 |        4 |        2 |        0 |        2 |        2 |        1 |       0 |        1 |        5 |        1 |        1 |        1 |        1 |       0 |      0 |      4 |     26 |     40 |     10 |      3 |      3 |    113 |      0 |      0 |      0 |     17 |     15 |      5 |      2 |      1 |     85 |      0 |      0 |      0 |     10 |      9 |      1 |      1 |      1 |     45 |      0 |      0 |      0 |      2 |      8 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 3860000 |     561 |    299 |    122 |     8 |    0 |     4 |    3 |    2 |     0 |    0 |    123 |    0 |    0 |    0 |    0 |    256 |    305 |     243 |      80 |      98 |      10 |      1 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      2 |      4 |      0 |       20 |       28 |       23 |       25 |       14 |       11 |       1 |       29 |       47 |       32 |       33 |       19 |       16 |       1 |       10 |       16 |       19 |       10 |        3 |        5 |       1 |        6 |        9 |       11 |       18 |        9 |        5 |       0 |       17 |       12 |       17 |        6 |        6 |        1 |       0 |       23 |        9 |       13 |       13 |        4 |        2 |       0 |        4 |        3 |        2 |        1 |        1 |        0 |       0 |        1 |        3 |        1 |        0 |        0 |        1 |       0 |      0 |      3 |     52 |     39 |      9 |      4 |      6 |    186 |      0 |      0 |      2 |     17 |     15 |      8 |      4 |      5 |     71 |      0 |      0 |      0 |     19 |     14 |      2 |      0 |      2 |     86 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3860100 |     378 |    225 |     82 |     5 |    0 |     2 |    1 |    2 |     2 |    0 |     59 |    0 |    0 |    0 |    0 |    174 |    204 |     186 |      44 |      43 |       9 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     11 |     10 |      1 |      0 |       12 |       13 |       13 |       18 |       19 |       21 |       0 |       13 |       25 |       24 |       24 |       19 |       23 |       1 |        4 |        9 |        9 |        7 |        8 |        7 |       0 |        6 |       11 |        4 |        8 |        4 |        4 |       1 |       11 |        3 |        3 |        4 |        1 |        5 |       0 |       10 |        6 |        6 |        5 |        5 |        0 |       0 |        2 |        2 |        0 |        1 |        0 |        1 |       1 |        1 |        2 |        1 |        0 |        1 |        0 |       0 |      0 |      4 |     42 |     38 |     13 |      6 |      8 |    114 |      0 |      0 |      1 |     16 |     16 |      9 |      3 |      2 |     35 |      0 |      0 |      0 |     10 |      6 |      2 |      0 |      2 |     39 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 3860200 |     514 |    287 |    114 |     8 |    0 |     6 |    0 |    2 |     3 |    0 |     94 |    0 |    0 |    0 |    0 |    249 |    265 |     216 |      55 |      61 |      13 |      1 |      1 |      3 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      6 |      6 |      1 |       15 |       22 |       23 |       27 |       22 |       21 |       0 |       27 |       36 |       27 |       32 |       24 |       11 |       0 |        9 |       15 |       10 |       11 |       12 |        8 |       0 |        6 |        9 |       10 |       11 |       10 |        3 |       0 |        8 |       11 |       10 |        5 |        5 |        6 |       1 |       18 |        7 |       11 |        3 |        4 |        5 |       0 |        2 |        3 |        0 |        1 |        0 |        2 |       0 |        1 |        5 |        3 |        1 |        1 |        0 |       0 |      0 |      1 |     50 |     49 |      6 |      5 |      6 |    170 |      0 |      0 |      0 |     24 |     19 |      7 |      0 |      2 |     62 |      0 |      0 |      0 |     11 |      7 |      4 |      4 |      3 |     65 |      0 |      0 |      0 |      4 |      2 |      2 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 3861000 |     262 |    131 |     80 |     3 |    0 |     3 |    2 |    1 |     2 |    0 |     40 |    0 |    0 |    0 |    0 |    118 |    144 |      88 |      36 |      23 |       4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      2 |      1 |        5 |        7 |        9 |        8 |        5 |       10 |       8 |        7 |        7 |        7 |       21 |        9 |       23 |       5 |        5 |        3 |        4 |        8 |        6 |        7 |       6 |        6 |        5 |        9 |        5 |        5 |        8 |       3 |        6 |        6 |        4 |        1 |        3 |        0 |       0 |        5 |        4 |        5 |        1 |        3 |        2 |       0 |        1 |        3 |        1 |        1 |        0 |        1 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     13 |     26 |      9 |      2 |      1 |     80 |      0 |      0 |      1 |     20 |      8 |      2 |      0 |      2 |     47 |      0 |      0 |      1 |      8 |      5 |      1 |      1 |      0 |     24 |      0 |      0 |      0 |      1 |      4 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 3900000 |     552 |    296 |    159 |     4 |    0 |     5 |    2 |    3 |     0 |    0 |     83 |    0 |    0 |    0 |    0 |    263 |    289 |     186 |      64 |      40 |       8 |      4 |      6 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      9 |      7 |      3 |      0 |       18 |       22 |       28 |       23 |       13 |       23 |      14 |       19 |       27 |       31 |       28 |       19 |       21 |      10 |        9 |       11 |       17 |       22 |       13 |        8 |       1 |        9 |        8 |       16 |       14 |       14 |       15 |       2 |        5 |        8 |        9 |        6 |        4 |        5 |       0 |       14 |       12 |        7 |        3 |        5 |        5 |       0 |        1 |        0 |        1 |        0 |        1 |        1 |       0 |        3 |        4 |        0 |        2 |        1 |        0 |       0 |      0 |      1 |     52 |     35 |     18 |      2 |      5 |    183 |      0 |      0 |      1 |     20 |     18 |      3 |      8 |      9 |    100 |      0 |      0 |      1 |     13 |      7 |      1 |      3 |      3 |     55 |      0 |      0 |      1 |      1 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3901000 |     796 |    420 |    210 |    12 |    0 |    14 |    2 |    8 |     1 |    0 |    129 |    0 |    0 |    0 |    0 |    371 |    425 |     289 |      85 |      65 |      25 |      3 |      4 |      3 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     26 |     12 |      7 |      2 |       12 |       26 |       32 |       32 |       27 |       44 |       9 |       21 |       51 |       30 |       38 |       33 |       59 |       6 |        8 |       22 |       16 |       30 |       17 |       17 |       4 |        7 |       14 |       19 |       16 |       18 |       18 |       4 |        9 |       14 |       11 |        9 |        9 |        6 |       1 |       10 |       19 |       15 |       11 |        7 |        8 |       0 |        3 |        7 |        3 |        2 |        1 |        0 |       0 |        3 |        8 |        7 |        1 |        2 |        0 |       0 |      0 |      3 |     64 |     70 |     22 |     21 |     17 |    223 |      0 |      0 |      1 |     30 |     35 |     15 |      5 |      6 |    118 |      0 |      0 |      0 |     17 |     26 |      9 |      5 |      4 |     68 |      0 |      0 |      1 |      7 |     10 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 3901100 |     389 |    125 |    152 |     7 |    0 |     5 |    5 |    5 |     0 |    0 |     90 |    0 |    0 |    0 |    0 |    197 |    192 |      67 |      62 |      39 |       9 |      1 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       2 |       0 |     30 |     37 |     30 |      7 |        6 |       10 |        5 |       15 |       13 |        9 |       0 |       10 |       12 |       11 |       18 |        6 |        8 |       2 |        7 |       11 |       14 |       29 |       10 |        9 |       1 |        6 |       11 |        7 |       31 |       11 |        5 |       0 |       11 |        7 |        1 |       12 |        6 |        9 |       0 |        9 |        8 |        4 |       16 |        4 |        3 |       0 |        5 |        5 |        0 |        1 |        0 |        1 |       0 |        3 |        4 |        0 |        1 |        1 |        1 |       0 |      0 |      1 |     12 |     16 |     14 |      5 |      2 |     75 |      0 |      0 |      0 |     18 |     27 |     14 |     10 |     13 |     70 |      0 |      0 |      1 |     12 |     13 |     11 |      1 |      4 |     48 |      0 |      0 |      0 |      1 |      7 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 3902000 |     370 |    181 |    101 |     5 |    0 |     7 |    2 |    4 |     2 |    0 |     68 |    0 |    0 |    0 |    0 |    195 |    175 |     128 |      51 |      47 |      15 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      3 |      0 |      0 |        8 |       15 |       19 |       17 |       16 |       17 |       2 |       10 |       18 |       17 |        6 |       20 |       14 |       2 |        5 |        8 |       13 |       11 |       10 |        9 |       0 |        5 |        8 |        8 |        7 |       11 |        6 |       0 |       14 |        7 |        7 |        3 |        3 |        2 |       1 |        9 |        8 |        5 |        3 |        2 |        4 |       0 |        0 |        0 |        2 |        3 |        1 |        2 |       0 |        5 |        4 |        2 |        0 |        1 |        0 |       0 |      0 |      4 |     31 |     32 |     11 |      6 |      3 |     94 |      0 |      0 |      0 |     20 |     12 |      4 |      3 |      6 |     56 |      0 |      0 |      2 |     12 |      4 |      1 |      0 |      0 |     49 |      0 |      0 |      0 |      1 |      8 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3902100 |     580 |    257 |    206 |    13 |    0 |    12 |    1 |    3 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    263 |    317 |     113 |      30 |      33 |      10 |      4 |     10 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        9 |        6 |       13 |       22 |       17 |       40 |       0 |       10 |       12 |       16 |       24 |       23 |       62 |       3 |        2 |        4 |        9 |       15 |       21 |       43 |       2 |        7 |        6 |        7 |        8 |       27 |       54 |       1 |        3 |        8 |        8 |        5 |        4 |       13 |       0 |        8 |        4 |        3 |        8 |        8 |       15 |       0 |        3 |        2 |        2 |        4 |        2 |        6 |       0 |        1 |        4 |        0 |        1 |        2 |        3 |       0 |      0 |      1 |     37 |     41 |      6 |      8 |     10 |    154 |      0 |      0 |      1 |     30 |     23 |     12 |     13 |      9 |    118 |      0 |      0 |      0 |     20 |      9 |      5 |      3 |      3 |     47 |      0 |      0 |      0 |      2 |      8 |      0 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 3902200 |     452 |    232 |    121 |     6 |    0 |     2 |    0 |    4 |     2 |    0 |     85 |    0 |    0 |    0 |    0 |    228 |    224 |     151 |      41 |      52 |       7 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     20 |     26 |      8 |      1 |       12 |       16 |       24 |       16 |       21 |       24 |       1 |       14 |       20 |       19 |       21 |       22 |       20 |       2 |        2 |       12 |       14 |       13 |       12 |        9 |       1 |        8 |       10 |        7 |       16 |        8 |        8 |       1 |       14 |        9 |        4 |       10 |        4 |        2 |       1 |       13 |       12 |        1 |        7 |        5 |        3 |       0 |        3 |        3 |        0 |        1 |        0 |        0 |       0 |        0 |        4 |        1 |        0 |        0 |        2 |       0 |      0 |      1 |     33 |     37 |      9 |      1 |      9 |    142 |      0 |      0 |      2 |     11 |     17 |      7 |      6 |      9 |     69 |      0 |      0 |      1 |     12 |     14 |      6 |      1 |      2 |     49 |      0 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3902300 |     321 |    146 |     95 |    10 |    0 |     6 |    0 |    4 |     0 |    0 |     60 |    0 |    0 |    0 |    0 |    143 |    178 |      51 |      42 |      26 |       8 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     20 |     18 |      9 |      2 |        8 |       13 |       11 |       11 |        5 |        9 |       1 |        9 |       16 |       24 |       15 |        9 |       14 |       1 |        4 |        6 |       10 |        5 |       10 |       10 |       1 |        5 |        5 |        7 |       12 |       13 |        6 |       1 |        2 |        7 |        2 |        6 |        6 |        7 |       0 |        8 |        8 |        4 |        2 |        5 |        3 |       0 |        0 |        3 |        2 |        1 |        3 |        0 |       0 |        1 |        5 |        3 |        1 |        1 |        0 |       0 |      0 |      0 |     25 |     23 |      9 |      5 |      3 |     81 |      0 |      0 |      0 |      9 |      7 |      1 |      6 |     10 |     62 |      0 |      0 |      0 |      7 |     14 |      1 |      0 |      4 |     34 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3902400 |     195 |    108 |     45 |     4 |    0 |     1 |    0 |    3 |     3 |    0 |     31 |    0 |    0 |    0 |    0 |     90 |    105 |      84 |      17 |      14 |       7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      3 |      2 |      0 |        3 |        8 |        7 |        7 |        5 |       13 |       5 |        5 |        9 |        8 |       10 |        9 |       16 |       3 |        2 |        4 |        3 |        3 |        5 |        5 |       0 |        2 |        4 |        8 |        2 |        5 |        1 |       1 |        4 |        1 |        4 |        2 |        2 |        2 |       1 |        4 |        5 |        2 |        2 |        1 |        1 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        3 |        3 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |     25 |     15 |      7 |      3 |      3 |     54 |      0 |      0 |      0 |      9 |      3 |      5 |      1 |      7 |     20 |      0 |      0 |      2 |      1 |      3 |      3 |      1 |      1 |     20 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3902500 |     385 |    196 |    104 |     6 |    0 |     9 |    2 |    2 |     2 |    0 |     64 |    0 |    0 |    0 |    0 |    178 |    207 |     115 |      51 |      40 |       9 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      9 |      7 |      0 |      0 |       11 |       14 |       20 |       23 |       15 |        4 |       0 |        9 |       16 |       22 |       27 |       18 |       14 |       3 |       10 |        6 |        8 |       13 |        9 |        2 |       1 |        6 |        7 |       15 |       16 |        8 |        2 |       1 |        4 |        9 |        6 |        3 |        6 |        4 |       0 |        5 |        5 |        8 |        6 |        7 |        1 |       0 |        2 |        3 |        1 |        2 |        1 |        1 |       0 |        2 |        4 |        4 |        0 |        0 |        1 |       0 |      0 |      1 |     30 |     30 |      6 |      3 |      3 |    123 |      0 |      0 |      1 |     10 |     18 |     10 |      1 |      2 |     62 |      0 |      0 |      0 |     10 |     11 |      0 |      0 |      2 |     41 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 3903000 |     379 |    176 |    120 |     7 |    0 |     5 |    2 |    0 |     0 |    0 |     69 |    0 |    0 |    0 |    0 |    158 |    221 |      96 |      44 |      25 |       5 |      8 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |     15 |      7 |      3 |        7 |        9 |       12 |       15 |       12 |        6 |       5 |       19 |       15 |       21 |       20 |       12 |       13 |      10 |       11 |        8 |        4 |       14 |       10 |        4 |       4 |       11 |       14 |       11 |       10 |       10 |        7 |       2 |        6 |        7 |        2 |        7 |        4 |        1 |       2 |        9 |        4 |        7 |       11 |        4 |        3 |       2 |        1 |        3 |        2 |        1 |        1 |        0 |       0 |        2 |        0 |        1 |        0 |        1 |        2 |       0 |      0 |      1 |     27 |     24 |     10 |      3 |      3 |    108 |      0 |      0 |      1 |     23 |     18 |      8 |      5 |      1 |     64 |      0 |      0 |      1 |     10 |     10 |      0 |      1 |      0 |     47 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 3903100 |     220 |     98 |     70 |     1 |    0 |     0 |    1 |    4 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |    100 |    120 |      56 |      36 |      18 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |     19 |     17 |     15 |      1 |        5 |        3 |        9 |        4 |        5 |        8 |       1 |        8 |       13 |        7 |       15 |        6 |       14 |       0 |        6 |        7 |       11 |        4 |        5 |        7 |       2 |        3 |        6 |        4 |        7 |        4 |        4 |       0 |        5 |        2 |        2 |        3 |        6 |        2 |       0 |        4 |        5 |        6 |        3 |        6 |        2 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     12 |     15 |      3 |      1 |      2 |     64 |      0 |      0 |      1 |     13 |      4 |      1 |      5 |      4 |     42 |      0 |      0 |      0 |      6 |      6 |      2 |      1 |      0 |     31 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 3904000 |     452 |    205 |    149 |     5 |    0 |     3 |    1 |    0 |     5 |    0 |     84 |    0 |    0 |    0 |    0 |    215 |    237 |     101 |      58 |      43 |       9 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       0 |       1 |       0 |     16 |      5 |      6 |      0 |        6 |       18 |        9 |       16 |       15 |       24 |       8 |       13 |       16 |       18 |       19 |       13 |       19 |      11 |        4 |       13 |       10 |       14 |        8 |       20 |       5 |        4 |        9 |        9 |       20 |       11 |       19 |       3 |        9 |        7 |        2 |        9 |        6 |        4 |       0 |        8 |       10 |        3 |        9 |        8 |        7 |       2 |        1 |        3 |        2 |        2 |        0 |        0 |       0 |        3 |        0 |        0 |        2 |        0 |        1 |       0 |      0 |      1 |     26 |     29 |      7 |      4 |      6 |    132 |      0 |      0 |      3 |     11 |     26 |      6 |     10 |      8 |     85 |      0 |      0 |      3 |     14 |      6 |      8 |      2 |      3 |     48 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3904100 |     313 |    167 |     94 |     3 |    0 |     3 |    1 |    1 |     2 |    0 |     42 |    0 |    0 |    0 |    0 |    166 |    147 |     106 |      30 |      13 |       4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      5 |     10 |     11 |      1 |        8 |       16 |       16 |        6 |       17 |       14 |       9 |        9 |       12 |       12 |        6 |       18 |       15 |       9 |        3 |        6 |        9 |        8 |        7 |       13 |       4 |        3 |        6 |        9 |        5 |        8 |        9 |       4 |        2 |        3 |        6 |        3 |        7 |        1 |       0 |        5 |        3 |        1 |        5 |        4 |        1 |       1 |        1 |        4 |        2 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |     23 |     25 |      6 |      5 |      7 |    101 |      0 |      0 |      1 |     13 |     12 |      5 |      4 |      8 |     51 |      0 |      0 |      0 |      5 |      5 |      5 |      3 |      2 |     22 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3905000 |     611 |    275 |    203 |    12 |    0 |     9 |    1 |    4 |     2 |    0 |    105 |    0 |    0 |    0 |    0 |    291 |    320 |     148 |      64 |      47 |      10 |      5 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      1 |      2 |      6 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       2 |     16 |     23 |      8 |      1 |       10 |       18 |       22 |       15 |       16 |       29 |      11 |       16 |       23 |       30 |       22 |       28 |       28 |       7 |       12 |       12 |       16 |       22 |       21 |       12 |       9 |        9 |       21 |       14 |       18 |       17 |       11 |       9 |        9 |        7 |       13 |       11 |        7 |        4 |       1 |       12 |        8 |       13 |        4 |        8 |        7 |       1 |        2 |        2 |        4 |        1 |        2 |        3 |       0 |        5 |        2 |        5 |        0 |        0 |        2 |       0 |      0 |      1 |     34 |     50 |     13 |      2 |     11 |    164 |      0 |      0 |      2 |     18 |     28 |     15 |      9 |     12 |    119 |      0 |      0 |      1 |      9 |     16 |     11 |      2 |      2 |     64 |      0 |      0 |      0 |      5 |     11 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3905100 |       5 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      3 |       1 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3906000 |     613 |    288 |    202 |     8 |    0 |     6 |    3 |    5 |     2 |    0 |     99 |    0 |    0 |    0 |    0 |    296 |    317 |     166 |      73 |      47 |      13 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |     29 |     19 |      8 |      0 |       15 |       15 |       32 |       24 |       17 |       30 |       9 |       14 |       22 |       32 |       22 |       20 |       24 |      12 |        2 |       16 |       18 |       17 |       27 |       10 |       8 |       12 |       14 |       15 |       27 |       16 |       13 |       7 |       12 |       11 |        5 |        5 |        7 |        4 |       2 |       13 |        5 |        6 |       10 |        6 |       11 |       2 |        3 |        4 |        2 |        0 |        1 |        0 |       0 |        3 |        5 |        1 |        1 |        4 |        0 |       0 |      0 |      0 |     42 |     40 |      8 |      5 |     13 |    180 |      0 |      0 |      1 |     23 |     28 |     11 |      8 |     13 |    118 |      0 |      0 |      0 |      8 |     20 |      1 |      0 |      1 |     69 |      0 |      0 |      1 |      5 |      4 |      0 |      1 |      1 |     12 |      0 |     37 | s03      | R    |
| 3906100 |     464 |    215 |    140 |     5 |    0 |     6 |    7 |    3 |     2 |    0 |     86 |    0 |    0 |    0 |    0 |    231 |    233 |     126 |      55 |      46 |      11 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     22 |     21 |     14 |      2 |        6 |       12 |       14 |       14 |       24 |       18 |       7 |       12 |       20 |       25 |       13 |       27 |       14 |       9 |        4 |       13 |       14 |       13 |       19 |       17 |       2 |        7 |       12 |       12 |        7 |       11 |        6 |       3 |        9 |        6 |        7 |        6 |        6 |       10 |       0 |       10 |        7 |        7 |        2 |        8 |        7 |       1 |        3 |        3 |        3 |        0 |        1 |        0 |       0 |        4 |        3 |        3 |        1 |        1 |        1 |       0 |      0 |      3 |     25 |     38 |     12 |      2 |     11 |    124 |      0 |      0 |      0 |     10 |     33 |     11 |      6 |      7 |     73 |      0 |      0 |      1 |      9 |     12 |      3 |      1 |      1 |     59 |      0 |      0 |      1 |      1 |      7 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3907000 |     700 |    339 |    212 |    14 |    0 |     8 |    2 |    5 |     1 |    0 |    119 |    0 |    0 |    0 |    0 |    323 |    377 |     188 |      70 |      54 |       9 |      2 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |     29 |     29 |     14 |      3 |       10 |       19 |       45 |       26 |       15 |       24 |      17 |       16 |       32 |       45 |       28 |       19 |       32 |      11 |        9 |       13 |       20 |       17 |       19 |       16 |       7 |        7 |       17 |       28 |       22 |       17 |       18 |       2 |        5 |        8 |        9 |       14 |        7 |        9 |       0 |       16 |       13 |        9 |       15 |       10 |        4 |       0 |        3 |        1 |        1 |        1 |        3 |        4 |       1 |        2 |        7 |        1 |        3 |        1 |        2 |       0 |      0 |      3 |     58 |     54 |     18 |     12 |     11 |    183 |      0 |      0 |      2 |     29 |     37 |     13 |      9 |     12 |    110 |      0 |      0 |      1 |     17 |     14 |      8 |      3 |      4 |     72 |      0 |      0 |      0 |      0 |     11 |      1 |      1 |      2 |     15 |      0 |     37 | s03      | R    |
| 3907100 |     700 |    329 |    204 |    12 |    0 |     6 |    2 |    4 |     3 |    0 |    140 |    0 |    0 |    0 |    0 |    333 |    367 |     226 |      95 |      78 |      17 |      5 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |     24 |     21 |     19 |      0 |       16 |       23 |       20 |       20 |       26 |       30 |       8 |       17 |       35 |       37 |       34 |       27 |       29 |       7 |       12 |       15 |       18 |       23 |       16 |       20 |       0 |       14 |       18 |       18 |       16 |       17 |       14 |       3 |       22 |       14 |        8 |       10 |       10 |        8 |       0 |       18 |        8 |        6 |       14 |       11 |       11 |       0 |        5 |        6 |        1 |        2 |        0 |        0 |       0 |        5 |        5 |        1 |        2 |        0 |        0 |       0 |      0 |      4 |     44 |     54 |     30 |      5 |     15 |    177 |      0 |      0 |      4 |     26 |     34 |     13 |      7 |     14 |    106 |      0 |      0 |      4 |     15 |     18 |      9 |      3 |      4 |     87 |      0 |      0 |      1 |      5 |      6 |      0 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 3908000 |     453 |    230 |    126 |     8 |    0 |     5 |    2 |    5 |     0 |    0 |     77 |    0 |    0 |    0 |    0 |    222 |    231 |     154 |      74 |      51 |      12 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     11 |      3 |      2 |      1 |       10 |       14 |       19 |       27 |       15 |       19 |       3 |       14 |       23 |       27 |       22 |       16 |       16 |       5 |        5 |        6 |       19 |       14 |        9 |        9 |       1 |        8 |       16 |       13 |        9 |        6 |       10 |       1 |        9 |        9 |       11 |        7 |        3 |        3 |       1 |        9 |        4 |       10 |        6 |        4 |        1 |       0 |        4 |        3 |        1 |        0 |        1 |        0 |       0 |        3 |        5 |        0 |        1 |        1 |        1 |       0 |      0 |      0 |     29 |     37 |     14 |      7 |      8 |    135 |      0 |      0 |      1 |     24 |     25 |      4 |      6 |     10 |     56 |      0 |      0 |      2 |     10 |      9 |      4 |      5 |      3 |     44 |      0 |      0 |      1 |      7 |      2 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3908100 |     467 |    243 |    118 |     5 |    0 |     6 |    1 |    5 |     4 |    0 |     85 |    0 |    0 |    0 |    0 |    223 |    244 |     154 |      54 |      54 |      10 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      7 |      3 |      5 |      1 |       16 |       16 |       13 |       17 |       20 |       11 |      11 |       11 |       30 |       26 |       29 |       20 |       18 |       5 |        9 |       15 |       10 |       10 |        9 |        9 |       4 |        7 |        7 |       11 |       13 |        7 |        5 |       2 |       11 |       10 |        3 |        7 |        3 |        3 |       1 |       18 |       10 |        6 |        7 |        4 |        2 |       0 |        6 |        3 |        2 |        2 |        0 |        2 |       0 |        1 |        2 |        1 |        0 |        0 |        1 |       1 |      0 |      2 |     33 |     49 |     12 |      8 |     14 |    125 |      0 |      0 |      1 |     15 |     21 |      5 |      4 |      6 |     66 |      0 |      0 |      1 |     10 |     10 |      0 |      0 |      0 |     64 |      0 |      0 |      0 |      2 |      8 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3950000 |     738 |    414 |    161 |    14 |    0 |     6 |    3 |    4 |     1 |    0 |    135 |    0 |    0 |    0 |    0 |    352 |    386 |     315 |      91 |      89 |      19 |      2 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |     22 |     23 |     15 |      4 |       26 |       32 |       40 |       36 |       25 |       31 |       4 |       24 |       49 |       45 |       31 |       31 |       35 |       5 |        7 |       17 |       19 |       15 |       15 |       11 |       1 |        7 |       16 |       12 |       16 |       13 |       12 |       0 |       16 |       16 |       10 |        6 |        7 |        9 |       0 |       18 |       15 |       12 |        9 |        8 |        9 |       0 |        4 |        4 |        1 |        0 |        0 |        0 |       0 |        5 |        5 |        4 |        3 |        2 |        0 |       0 |      0 |      5 |     55 |     82 |     13 |      8 |     14 |    237 |      0 |      0 |      2 |     20 |     30 |     10 |      8 |     12 |     79 |      0 |      0 |      0 |     21 |     20 |      1 |      2 |      1 |     90 |      0 |      0 |      1 |      1 |      4 |      2 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 3950100 |     369 |    233 |     56 |     5 |    0 |     6 |    5 |    3 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    173 |    196 |     198 |      43 |      48 |      14 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      6 |      0 |       13 |       14 |       26 |       13 |       13 |       23 |       3 |       13 |       19 |       19 |       20 |       24 |       27 |       6 |        0 |       10 |        6 |        6 |        4 |        5 |       1 |        4 |        7 |        5 |        2 |        2 |        4 |       0 |        5 |        9 |        6 |        2 |        2 |        2 |       0 |        8 |        6 |       10 |        4 |        3 |        3 |       0 |        0 |        7 |        1 |        1 |        0 |        1 |       0 |        2 |        4 |        0 |        1 |        2 |        1 |       0 |      0 |      2 |     32 |     53 |     17 |      3 |      7 |    119 |      0 |      0 |      0 |      9 |      5 |      6 |      4 |      3 |     29 |      0 |      0 |      1 |      8 |      3 |      2 |      1 |      0 |     45 |      0 |      0 |      0 |      2 |      6 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3950200 |     438 |    260 |     73 |     6 |    0 |     5 |    6 |    2 |     3 |    0 |     83 |    0 |    0 |    0 |    0 |    196 |    242 |     218 |      44 |      66 |      18 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      5 |      3 |      0 |       17 |       20 |       21 |       18 |       10 |       19 |       0 |       25 |       24 |       27 |       29 |       24 |       25 |       1 |       11 |        8 |       11 |        8 |        3 |        0 |       0 |        4 |        6 |        6 |        7 |        7 |        2 |       0 |       11 |       13 |        3 |        6 |        2 |        3 |       0 |       10 |       14 |        9 |        6 |        2 |        4 |       0 |        6 |        3 |        3 |        0 |        0 |        0 |       0 |        2 |        5 |        1 |        1 |        1 |        0 |       0 |      0 |      2 |     39 |     58 |     13 |      5 |      7 |    136 |      0 |      0 |      0 |      7 |     13 |      4 |      3 |      4 |     42 |      0 |      0 |      0 |     10 |      9 |      5 |      2 |      2 |     55 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 3950300 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3950400 |     155 |     87 |     34 |     1 |    0 |     2 |    0 |    1 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     70 |     85 |      79 |      28 |      27 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        6 |        7 |        6 |        8 |        7 |        6 |       0 |        8 |       12 |       10 |        8 |        4 |        5 |       0 |        1 |        4 |        4 |        3 |        2 |        1 |       0 |        2 |        8 |        2 |        3 |        3 |        1 |       0 |        5 |        3 |        2 |        3 |        0 |        0 |       0 |        2 |        7 |        2 |        5 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     16 |     13 |      7 |      0 |      1 |     50 |      0 |      0 |      0 |      7 |      3 |      1 |      2 |      1 |     20 |      0 |      0 |      0 |      5 |      2 |      0 |      2 |      0 |     21 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 3950500 |     105 |     54 |     24 |     1 |    0 |     4 |    1 |    1 |     2 |    0 |     18 |    0 |    0 |    0 |    0 |     53 |     52 |      47 |      20 |      17 |       7 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        4 |       10 |        4 |        5 |        4 |       1 |        3 |        3 |        3 |        4 |        3 |        8 |       2 |        3 |        5 |        3 |        1 |        0 |        0 |       2 |        3 |        0 |        3 |        0 |        1 |        1 |       2 |        2 |        3 |        0 |        0 |        0 |        1 |       0 |        5 |        2 |        2 |        0 |        0 |        3 |       0 |        2 |        0 |        0 |        2 |        1 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |     10 |      8 |      2 |      0 |      0 |     32 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |     20 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 3950600 |       2 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3950700 |       3 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3950800 |      36 |     12 |     16 |     0 |    0 |     2 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     16 |     20 |       6 |       8 |       3 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        0 |        0 |        3 |       0 |        2 |        0 |        1 |        0 |        0 |        1 |       2 |        0 |        2 |        0 |        4 |        1 |        0 |       1 |        0 |        1 |        4 |        1 |        0 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 3950900 |     822 |    350 |    274 |    12 |    0 |     4 |    4 |    2 |     4 |    0 |    172 |    0 |    0 |    0 |    0 |    417 |    405 |     170 |      96 |      65 |      13 |      7 |      7 |      5 |      0 |      0 |      1 |      0 |      0 |      3 |      1 |      1 |      0 |      4 |      3 |      7 |      1 |      1 |      0 |      1 |      0 |       9 |       6 |       3 |       0 |     31 |     28 |     13 |      1 |       22 |       34 |       47 |       31 |       17 |       12 |       0 |       22 |       48 |       52 |       39 |       14 |       12 |       0 |       11 |       27 |       52 |       34 |       15 |       14 |       0 |       13 |       27 |       30 |       26 |       15 |       10 |       0 |       16 |       16 |       24 |       21 |        9 |        2 |       0 |       12 |       26 |       22 |       15 |        8 |        1 |       0 |        2 |        5 |        5 |        1 |        0 |        0 |       0 |        3 |        3 |        3 |        2 |        1 |        1 |       0 |      0 |      4 |     48 |      1 |      0 |      0 |      0 |    297 |      0 |      0 |      5 |     37 |      1 |      1 |      0 |      0 |    230 |      0 |      0 |      2 |      8 |      0 |      0 |      0 |      0 |    162 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 3951000 |     351 |    216 |     55 |     6 |    0 |     5 |    4 |    1 |     1 |    0 |     63 |    0 |    0 |    0 |    0 |    144 |    207 |     198 |      48 |      56 |      17 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |       15 |       15 |       13 |        8 |        9 |       23 |       3 |       18 |       26 |       23 |       16 |       12 |       31 |       4 |        3 |        5 |        7 |        4 |        2 |        4 |       0 |        7 |        6 |        7 |        3 |        2 |        4 |       1 |        6 |        8 |        3 |        2 |        1 |        6 |       1 |       15 |        6 |        3 |        2 |        3 |        7 |       0 |        1 |        3 |        1 |        0 |        1 |        0 |       0 |        3 |        6 |        1 |        1 |        0 |        0 |       0 |      0 |      2 |     34 |     36 |      3 |      5 |      1 |    135 |      0 |      0 |      0 |     12 |      4 |      4 |      0 |      1 |     34 |      0 |      0 |      0 |     14 |      7 |      1 |      0 |      0 |     41 |      0 |      0 |      0 |      3 |      2 |      1 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 3951100 |     838 |    339 |    279 |    13 |    0 |     3 |    5 |    8 |     5 |    0 |    186 |    0 |    0 |    0 |    0 |    430 |    408 |     176 |     100 |      78 |      14 |      4 |      9 |      4 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      4 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |       3 |       5 |       7 |       3 |     16 |     14 |     15 |      3 |       14 |       43 |       41 |       33 |       18 |        7 |       0 |       23 |       56 |       44 |       34 |       17 |        9 |       0 |        8 |       45 |       57 |       36 |       14 |        8 |       0 |       10 |       37 |       35 |       15 |        8 |        5 |       1 |       13 |       28 |       26 |       15 |        5 |        2 |       0 |       23 |       37 |       23 |        7 |        6 |        1 |       0 |        1 |       10 |        1 |        3 |        2 |        0 |       0 |        3 |        9 |        2 |        2 |        0 |        1 |       0 |      0 |      1 |      3 |      3 |      1 |      0 |      0 |    331 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |    276 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    186 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 3951200 |      88 |     46 |     20 |     1 |    0 |     1 |    1 |    1 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     47 |     41 |      33 |       8 |      12 |       3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      6 |      1 |      1 |        3 |        6 |        6 |        3 |        3 |        2 |       0 |        3 |        4 |        6 |        4 |        5 |        1 |       0 |        3 |        1 |        5 |        1 |        1 |        0 |       0 |        1 |        3 |        2 |        3 |        0 |        0 |       0 |        4 |        3 |        1 |        2 |        1 |        0 |       0 |        3 |        2 |        0 |        1 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     46 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 3951300 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3951400 |     515 |    328 |     97 |     6 |    0 |     4 |    2 |    5 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    201 |    314 |     281 |      76 |      59 |      14 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |       15 |       21 |       15 |       18 |       14 |       28 |       4 |       15 |       32 |       33 |       28 |       25 |       76 |       4 |        5 |       11 |       16 |        4 |        4 |        7 |       0 |        2 |       11 |        8 |       11 |        7 |       11 |       0 |       10 |       11 |        5 |        2 |        1 |        4 |       2 |       12 |        7 |        3 |        5 |        0 |        9 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |        2 |        6 |        4 |        2 |        0 |        1 |       0 |      0 |      2 |     57 |     77 |     12 |      4 |      9 |    167 |      0 |      0 |      2 |     12 |     13 |      9 |      8 |      2 |     51 |      0 |      0 |      2 |     10 |      6 |      2 |      1 |      1 |     49 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 3951500 |     298 |    199 |     35 |     3 |    0 |     2 |    0 |    6 |     1 |    0 |     52 |    0 |    0 |    0 |    0 |    102 |    196 |     190 |      32 |      50 |      11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |       11 |        8 |       14 |        8 |        2 |       16 |       1 |       14 |       24 |       16 |       19 |       25 |       40 |       1 |        3 |        5 |        2 |        1 |        2 |        0 |       0 |        5 |        7 |        2 |        2 |        4 |        2 |       0 |       10 |        6 |        3 |        3 |        2 |        2 |       0 |       12 |        1 |        2 |        4 |        2 |        5 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |        2 |        3 |        2 |        1 |        0 |        1 |       0 |      0 |      1 |     39 |     61 |      7 |      7 |      6 |     78 |      0 |      0 |      0 |      6 |      7 |      1 |      1 |      0 |     20 |      0 |      0 |      0 |      9 |      5 |      2 |      0 |      0 |     36 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 3951600 |     517 |    325 |     84 |     7 |    0 |    12 |    4 |    6 |     3 |    0 |     76 |    0 |    0 |    0 |    0 |    247 |    270 |     274 |      66 |      65 |      24 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      3 |      1 |       14 |       27 |       35 |       20 |       14 |       39 |       4 |       13 |       26 |       27 |       19 |       19 |       62 |       6 |       12 |       10 |        7 |        7 |        1 |        4 |       1 |        6 |       11 |        5 |        8 |        1 |       11 |       0 |       12 |        5 |        7 |        1 |        1 |        9 |       0 |       10 |       17 |        6 |        2 |        3 |        3 |       0 |        5 |        5 |        1 |        2 |        2 |        2 |       0 |        5 |        2 |        3 |        2 |        0 |        3 |       0 |      0 |      1 |     54 |     53 |      6 |      7 |      2 |    202 |      0 |      0 |      1 |     12 |     10 |      0 |      1 |      1 |     59 |      0 |      0 |      0 |      7 |      5 |      1 |      0 |      2 |     61 |      0 |      0 |      1 |      4 |      8 |      1 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 3952900 |     342 |    199 |     71 |     5 |    0 |     5 |    0 |    4 |     2 |    0 |     56 |    0 |    0 |    0 |    0 |    150 |    192 |     164 |      45 |      48 |      10 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      0 |       16 |        9 |       19 |       10 |        9 |       16 |       0 |       11 |       15 |       21 |       27 |       12 |       28 |       6 |        3 |       12 |       15 |        6 |        2 |        1 |       0 |        2 |       10 |        5 |        2 |        6 |        6 |       1 |        4 |        7 |        5 |        6 |        2 |        2 |       0 |       11 |        3 |       11 |        3 |        1 |        1 |       0 |        0 |        2 |        3 |        1 |        0 |        0 |       0 |        2 |        3 |        3 |        1 |        0 |        1 |       0 |      0 |      3 |     41 |     43 |      5 |      1 |      7 |     99 |      0 |      0 |      0 |     13 |     14 |      1 |      2 |      0 |     41 |      0 |      0 |      0 |     10 |      7 |      2 |      0 |      0 |     37 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 3953000 |     318 |    170 |     70 |     9 |    0 |     7 |    3 |    0 |     1 |    0 |     58 |    0 |    0 |    0 |    0 |    138 |    180 |     128 |      53 |      47 |      16 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      2 |      0 |        9 |       11 |       17 |       11 |        4 |       11 |       2 |       18 |       19 |       15 |       19 |       10 |       23 |       1 |        7 |        7 |        8 |        5 |        4 |        8 |       1 |        2 |        8 |       10 |        4 |        1 |        5 |       0 |        5 |        6 |        3 |        5 |        3 |        1 |       0 |        7 |       10 |        3 |        7 |        3 |        5 |       0 |        5 |        2 |        1 |        1 |        0 |        1 |       0 |        4 |        3 |        1 |        2 |        0 |        0 |       0 |      0 |      3 |     29 |     24 |      4 |      3 |      3 |    104 |      0 |      0 |      3 |      9 |      8 |      2 |      0 |      2 |     46 |      0 |      0 |      1 |      6 |      4 |      3 |      0 |      0 |     44 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 3953100 |     299 |    156 |     81 |     0 |    0 |     0 |    1 |    1 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    135 |    164 |     115 |      45 |      42 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |     10 |      5 |      0 |        8 |       10 |       15 |       14 |       15 |        6 |       0 |       10 |       23 |       15 |       16 |       17 |        7 |       0 |        3 |       12 |        8 |        7 |        6 |        6 |       0 |        4 |        7 |        6 |        7 |       13 |        2 |       0 |        9 |        4 |        2 |        2 |        6 |        1 |       0 |       11 |        6 |        5 |        8 |        4 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      4 |     15 |     30 |      9 |      7 |      4 |     87 |      0 |      0 |      0 |     17 |     13 |      4 |      0 |      5 |     42 |      0 |      0 |      0 |      5 |      6 |      1 |      1 |      6 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 3953200 |      65 |     28 |     18 |     0 |    0 |     1 |    1 |    1 |     1 |    0 |     15 |    0 |    0 |    0 |    0 |     32 |     33 |      21 |      10 |      12 |       3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        3 |        4 |        1 |        1 |       0 |        2 |        3 |        3 |        5 |        3 |        0 |       0 |        2 |        3 |        1 |        4 |        0 |        0 |       0 |        3 |        1 |        2 |        1 |        0 |        1 |       0 |        3 |        2 |        1 |        0 |        0 |        1 |       0 |        1 |        4 |        2 |        0 |        1 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 3953300 |     315 |    165 |     70 |     1 |    0 |     6 |    1 |    2 |     2 |    0 |     68 |    0 |    0 |    0 |    0 |    151 |    164 |     136 |      42 |      54 |       6 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      3 |      1 |      0 |       10 |       15 |       13 |       17 |       14 |       11 |       0 |       10 |       16 |       18 |       26 |        7 |        8 |       0 |        1 |        8 |       13 |        9 |        4 |        3 |       0 |        5 |       12 |        4 |        8 |        2 |        1 |       0 |        9 |        6 |        5 |        6 |        3 |        0 |       0 |       10 |       12 |        3 |        8 |        4 |        2 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        4 |        0 |        1 |        1 |        2 |       0 |      0 |      1 |     41 |     20 |      4 |      0 |      4 |     95 |      0 |      0 |      1 |     12 |      7 |      4 |      2 |      2 |     42 |      0 |      0 |      1 |     13 |      2 |      1 |      0 |      0 |     51 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 3953400 |     162 |     82 |     42 |     5 |    0 |     4 |    1 |    0 |     1 |    0 |     27 |    0 |    0 |    0 |    0 |     86 |     76 |      69 |      24 |      22 |       6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        5 |       11 |       15 |        5 |        4 |        4 |       0 |        9 |        4 |       11 |        5 |        5 |        4 |       0 |        6 |        9 |        3 |        5 |        0 |        1 |       0 |        7 |        2 |        5 |        2 |        2 |        0 |       0 |        3 |        4 |        3 |        3 |        0 |        0 |       0 |        4 |        3 |        4 |        2 |        0 |        1 |       0 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |        1 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     16 |     11 |      0 |      1 |      0 |     54 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      0 |     36 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 3953500 |      14 |      9 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      9 |      5 |       5 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        0 |        0 |        2 |       0 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 3956000 |     299 |    171 |     52 |     6 |    0 |     9 |    2 |    1 |     4 |    0 |     54 |    0 |    0 |    0 |    0 |    113 |    186 |     132 |      47 |      42 |      15 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |       11 |       11 |       10 |        8 |        7 |       13 |       2 |       22 |       25 |       20 |       17 |       11 |       11 |       3 |        4 |        2 |        6 |        2 |        2 |        3 |       0 |        4 |       13 |        8 |        5 |        1 |        2 |       0 |        5 |        8 |        6 |        1 |        2 |        2 |       0 |       10 |        9 |        6 |        3 |        1 |        1 |       0 |        3 |        2 |        1 |        1 |        0 |        1 |       0 |        5 |        7 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |     31 |     24 |      1 |      1 |      0 |    112 |      0 |      0 |      1 |      7 |      2 |      2 |      1 |      1 |     38 |      0 |      0 |      0 |      3 |      7 |      1 |      0 |      0 |     43 |      0 |      0 |      2 |      1 |      4 |      1 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 3956100 |    1006 |    505 |    250 |    13 |    0 |     4 |    5 |   10 |     5 |    0 |    214 |    0 |    0 |    0 |    0 |    494 |    512 |     396 |     131 |     150 |      29 |      2 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |     18 |     19 |     13 |      0 |       30 |       47 |       72 |       36 |       26 |       31 |       0 |       39 |       51 |       66 |       55 |       27 |       24 |       1 |       11 |       22 |       52 |       26 |       13 |       13 |       0 |       11 |       38 |       29 |       14 |       17 |        4 |       0 |       19 |       25 |       28 |       18 |        2 |        3 |       0 |       30 |       30 |       33 |       18 |        5 |        3 |       0 |        7 |        4 |        5 |        2 |        1 |        1 |       0 |        5 |        5 |        6 |        0 |        1 |        0 |       0 |      0 |      5 |     96 |     39 |      2 |      4 |     11 |    348 |      0 |      0 |      3 |     40 |     12 |      4 |      0 |      2 |    189 |      0 |      0 |      3 |     37 |      5 |      1 |      0 |      0 |    168 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |     30 |      0 |     37 | s03      | R    |
| 4002000 |       8 |      3 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4005000 |     121 |     28 |     66 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     65 |     56 |       4 |       8 |       1 |       0 |      1 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        3 |        4 |       0 |        1 |        1 |        2 |        2 |        4 |        7 |       0 |        1 |        2 |        3 |        6 |        7 |       14 |       1 |        4 |        1 |        7 |        4 |        6 |       10 |       0 |        1 |        2 |        4 |        6 |        5 |        2 |       0 |        0 |        1 |        0 |        1 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      5 |      2 |      0 |      2 |     15 |      0 |      0 |      0 |      3 |     12 |      7 |      5 |      6 |     33 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4005100 |      80 |     17 |     49 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     39 |     41 |       1 |       4 |       0 |       0 |      0 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        2 |        2 |       0 |        2 |        0 |        0 |        2 |        3 |        1 |       1 |        2 |        4 |        3 |        5 |        4 |        7 |       1 |        1 |        1 |        7 |        6 |        4 |        4 |       0 |        0 |        1 |        0 |        1 |        0 |        2 |       0 |        0 |        1 |        1 |        3 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      4 |      0 |      2 |      1 |      9 |      0 |      0 |      0 |      6 |      6 |      4 |      3 |      1 |     29 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4005200 |       2 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4005300 |       5 |      1 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      3 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4005500 |      18 |      7 |      6 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      9 |      9 |       4 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4005600 |      27 |     10 |     13 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     16 |     11 |       3 |       3 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        3 |        0 |        1 |       0 |        0 |        1 |        0 |        2 |        1 |        4 |       0 |        0 |        0 |        1 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4007000 |      37 |      9 |     22 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      5 |    0 |    0 |    0 |    0 |     20 |     17 |       4 |       3 |       1 |       0 |      0 |      3 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        0 |        4 |        1 |        0 |       0 |        2 |        2 |        1 |        3 |        1 |        3 |       0 |        0 |        0 |        3 |        1 |        5 |        1 |       0 |        0 |        0 |        0 |        1 |        4 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      2 |      4 |      1 |      2 |      2 |     11 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4007200 |      63 |     15 |     34 |     1 |    0 |     2 |    0 |    0 |     2 |    0 |      9 |    0 |    0 |    0 |    0 |     33 |     30 |       5 |       2 |       0 |       0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        1 |        2 |        1 |       0 |        1 |        0 |        2 |        2 |        1 |        2 |       0 |        0 |        3 |        1 |        3 |        3 |        8 |       1 |        1 |        1 |        0 |        6 |        3 |        4 |       0 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        1 |        0 |        0 |        1 |        3 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |     12 |      0 |      0 |      0 |      3 |      6 |      4 |      1 |      4 |     16 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4007300 |       6 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      2 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4015000 |     150 |     23 |     80 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |     89 |     61 |       4 |       9 |       6 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        9 |        4 |        1 |        0 |        0 |        1 |       0 |        2 |        2 |        3 |        1 |        0 |        0 |       0 |       29 |        8 |        9 |        2 |        1 |        0 |       0 |        3 |       10 |       13 |        5 |        0 |        0 |       0 |       10 |        8 |        3 |        1 |        0 |        1 |       0 |        6 |        8 |        6 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |     75 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |     41 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4015100 |     125 |     27 |     73 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |    116 |      9 |       9 |       7 |       4 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |       17 |        7 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |       56 |       12 |        0 |        0 |        0 |        0 |       0 |        4 |        1 |        0 |        0 |        0 |        0 |       0 |       21 |        2 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     68 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4015200 |     209 |     39 |    123 |     2 |    0 |     0 |    4 |    1 |     0 |    0 |     40 |    0 |    0 |    0 |    0 |    103 |    106 |       6 |      13 |      11 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      5 |      2 |      0 |        6 |        7 |        0 |        0 |        0 |        0 |       0 |        2 |        9 |       11 |        1 |        1 |        2 |       0 |       35 |       19 |       12 |        2 |        0 |        0 |       0 |        9 |       23 |       17 |        6 |        0 |        0 |       0 |       10 |        8 |        0 |        1 |        0 |        0 |       0 |        4 |        8 |        7 |        1 |        1 |        0 |       0 |        0 |        3 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     36 |      0 |      0 |      1 |      6 |      1 |      1 |      0 |      0 |    114 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     36 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4015300 |      75 |     14 |     45 |     4 |    0 |     0 |    1 |    0 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     74 |      1 |       3 |       8 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |       11 |        3 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |       36 |        7 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        8 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     43 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4015400 |      40 |      7 |     25 |     1 |    0 |     0 |    0 |    0 |     2 |    0 |      5 |    0 |    0 |    0 |    0 |     34 |      6 |       5 |       4 |       2 |       1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        0 |        0 |        0 |        0 |        0 |       0 |       17 |        3 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        3 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4015800 |     478 |    128 |    232 |    13 |    0 |     3 |    0 |    0 |     3 |    0 |     99 |    0 |    0 |    0 |    0 |    155 |    323 |      30 |      42 |      31 |       4 |      1 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      5 |      1 |      0 |        3 |       25 |       10 |        2 |        0 |        0 |       0 |       16 |       51 |       16 |        3 |        1 |        1 |       0 |       12 |       57 |       14 |        1 |        0 |        0 |       0 |       36 |       83 |       25 |        3 |        1 |        0 |       0 |        6 |       17 |        3 |        0 |        0 |        0 |       0 |       21 |       41 |       10 |        1 |        0 |        0 |       0 |        0 |        5 |        0 |        0 |        0 |        0 |       0 |        3 |        9 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     16 |      9 |      0 |      0 |      0 |    103 |      0 |      0 |      1 |     10 |      9 |      0 |      0 |      0 |    212 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     90 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4015900 |     111 |     19 |     64 |     6 |    0 |     1 |    0 |    0 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     64 |     47 |       4 |       1 |       6 |       1 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        5 |        0 |        0 |        0 |        0 |       0 |        0 |        8 |        3 |        0 |        0 |        0 |       0 |       19 |        8 |       10 |        2 |        0 |        0 |       0 |        2 |       16 |        6 |        1 |        0 |        0 |       0 |        5 |        5 |        1 |        1 |        0 |        0 |       0 |        0 |        3 |        5 |        1 |        0 |        0 |       0 |        3 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     63 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4016000 |     687 |    168 |    348 |    16 |    0 |     4 |    2 |    2 |     2 |    0 |    145 |    0 |    0 |    0 |    0 |    211 |    476 |      41 |      53 |      28 |       9 |      0 |      7 |      3 |      3 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      5 |      2 |      0 |       14 |       19 |        9 |        3 |        0 |        1 |       0 |       20 |       56 |       33 |       10 |        3 |        0 |       0 |       20 |       60 |       29 |        3 |        2 |        0 |       0 |       45 |      128 |       55 |        6 |        0 |        0 |       0 |       11 |       24 |        9 |        0 |        0 |        0 |       0 |       22 |       49 |       25 |        4 |        1 |        0 |       0 |        1 |        4 |        2 |        0 |        0 |        0 |       0 |        6 |        4 |        8 |        1 |        0 |        0 |       0 |      0 |      1 |     22 |      6 |      0 |      0 |      0 |    139 |      0 |      0 |      2 |      7 |      9 |      1 |      0 |      0 |    329 |      0 |      0 |      2 |     10 |      0 |      1 |      0 |      0 |    132 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 4016100 |     304 |     59 |    169 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     73 |    0 |    0 |    0 |    0 |     98 |    206 |      16 |      23 |      17 |       0 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        7 |        9 |        2 |        1 |        0 |        0 |       0 |       19 |       11 |        9 |        0 |        1 |        0 |       0 |       28 |       12 |        6 |        5 |        0 |        0 |       0 |       56 |       29 |       27 |        5 |        1 |        0 |       0 |       13 |       11 |        3 |        0 |        0 |        0 |       0 |       21 |       17 |        6 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |     54 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |    162 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      0 |     68 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4016200 |     201 |     33 |    120 |     7 |    0 |     0 |    1 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |     71 |    130 |      15 |      18 |       8 |       1 |      0 |      7 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        4 |        2 |        2 |        0 |        0 |       0 |        8 |       12 |        4 |        0 |        0 |        0 |       0 |       13 |       22 |        7 |        1 |        0 |        0 |       1 |       16 |       35 |       21 |        2 |        2 |        0 |       0 |        6 |        4 |        3 |        1 |        0 |        0 |       0 |        9 |       12 |        3 |        1 |        0 |        0 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |    109 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |     34 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4016300 |       3 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4016400 |      30 |      5 |     22 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      9 |     21 |       0 |       1 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        3 |        0 |        0 |        0 |       0 |        0 |       12 |        4 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4035200 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4036000 |     565 |    185 |    242 |    24 |    0 |     9 |    4 |    0 |     0 |    0 |    101 |    0 |    0 |    0 |    0 |    272 |    293 |      47 |      48 |      24 |       5 |      4 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      6 |      3 |      1 |        5 |       13 |       21 |       17 |       11 |       14 |       8 |        8 |       17 |       19 |       13 |       12 |       16 |      11 |       15 |       15 |       24 |       26 |       12 |       13 |      10 |       15 |       16 |       31 |       23 |       13 |       15 |      14 |       14 |        7 |        7 |        7 |        3 |        2 |       4 |       15 |       10 |       10 |       10 |        6 |        4 |       2 |        2 |        5 |        7 |        5 |        2 |        3 |       0 |        3 |        6 |        2 |        0 |        1 |        1 |       0 |      0 |      1 |     17 |     20 |     10 |      2 |      7 |    128 |      0 |      0 |      1 |     21 |     45 |     16 |      8 |      8 |    143 |      0 |      0 |      1 |     16 |      5 |      3 |      0 |      0 |     76 |      0 |      0 |      1 |      8 |      9 |      2 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 4036100 |     491 |    201 |    171 |    11 |    0 |     3 |    5 |    2 |     1 |    0 |     97 |    0 |    0 |    0 |    0 |    223 |    268 |      68 |      45 |      34 |       6 |     10 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      4 |      5 |      2 |      0 |        9 |       10 |       18 |       16 |       10 |       11 |       8 |       15 |       10 |       30 |       14 |       21 |       19 |      10 |       11 |       11 |       20 |       15 |        8 |        5 |       9 |       10 |       23 |       22 |       15 |        8 |        6 |       8 |       11 |        7 |        9 |        8 |        6 |        8 |       2 |       12 |       13 |       10 |        5 |        4 |        0 |       2 |        3 |        4 |        2 |        1 |        0 |        1 |       0 |        3 |        5 |        1 |        1 |        0 |        1 |       0 |      0 |      2 |     32 |     26 |      4 |      1 |      7 |    129 |      0 |      0 |      1 |     20 |     19 |     10 |      2 |      6 |    113 |      0 |      0 |      0 |     15 |      5 |      4 |      2 |      2 |     69 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4036200 |     246 |    112 |     74 |     5 |    0 |     0 |    0 |    2 |     1 |    0 |     52 |    0 |    0 |    0 |    0 |    106 |    140 |      74 |      28 |      22 |       5 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      4 |      2 |      1 |      0 |        6 |        8 |       18 |        7 |        2 |        5 |       0 |       12 |       18 |       12 |       11 |        2 |        9 |       2 |        7 |       15 |        3 |        8 |        2 |        1 |       0 |       16 |        7 |        6 |        6 |        2 |        1 |       0 |        5 |        3 |       11 |        1 |        1 |        0 |       1 |       13 |        7 |        3 |        2 |        2 |        3 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        3 |        2 |        0 |        0 |        0 |       0 |      0 |      4 |     15 |     14 |      3 |      2 |      3 |     71 |      0 |      0 |      0 |      4 |      4 |      0 |      1 |      2 |     63 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |      0 |     44 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4036300 |     447 |    134 |    223 |    14 |    0 |     4 |    2 |    0 |     2 |    0 |     68 |    0 |    0 |    0 |    0 |    231 |    216 |      18 |      26 |       9 |       1 |      5 |      9 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       3 |      0 |      3 |      0 |      0 |        7 |        3 |        7 |        7 |       10 |       28 |       0 |        2 |        2 |       12 |       18 |        8 |       30 |       0 |        6 |        8 |       20 |       26 |       21 |       34 |       3 |        6 |        5 |       11 |       24 |       20 |       39 |       0 |        2 |        5 |        6 |        5 |        8 |       10 |       0 |        3 |        3 |        6 |       12 |        2 |        6 |       0 |        7 |        0 |        2 |        2 |        2 |        2 |       0 |        1 |        0 |        3 |        2 |        0 |        1 |       0 |      0 |      0 |     17 |     54 |     16 |      3 |      0 |     44 |      0 |      0 |      5 |     25 |     86 |     11 |      4 |      0 |     92 |      0 |      0 |      0 |     20 |     18 |      4 |      1 |      0 |     25 |      0 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4036400 |     647 |    215 |    253 |    21 |    0 |    10 |    3 |    2 |     3 |    0 |    140 |    0 |    0 |    0 |    0 |    292 |    355 |      47 |      33 |      20 |       4 |      9 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      2 |      1 |      0 |        3 |       10 |       21 |       23 |       13 |       11 |       0 |        8 |       21 |       37 |       38 |       16 |       13 |       1 |       10 |       26 |       35 |       34 |       12 |       10 |       0 |       11 |       27 |       34 |       30 |       11 |       13 |       0 |       12 |       15 |       14 |       12 |        6 |        5 |       0 |       16 |       20 |       19 |       14 |        2 |        5 |       0 |        1 |        9 |        5 |        4 |        0 |        1 |       0 |        4 |        7 |        1 |        6 |        0 |        1 |       0 |      0 |      2 |     31 |     31 |     12 |     12 |      3 |    124 |      0 |      0 |      1 |     23 |     38 |      6 |      6 |      8 |    171 |      0 |      0 |      3 |     15 |     12 |      6 |      0 |      2 |    102 |      0 |      0 |      1 |      5 |      7 |      0 |      0 |      1 |     25 |      0 |     37 | s03      | R    |
| 4036500 |     570 |    236 |    197 |    17 |    0 |     4 |    4 |    0 |     2 |    0 |    110 |    0 |    0 |    0 |    0 |    269 |    301 |      84 |      45 |      34 |       6 |      5 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      8 |      6 |      2 |      1 |        8 |       16 |       28 |       20 |       12 |       19 |       0 |       18 |       22 |       27 |       17 |       15 |       34 |       0 |       10 |       21 |       33 |       19 |       11 |       13 |       0 |       10 |       17 |       23 |        9 |       14 |       16 |       1 |        7 |       17 |       11 |        6 |        4 |        3 |       0 |       11 |       20 |       13 |        9 |        4 |        5 |       0 |        1 |        4 |        2 |        4 |        0 |        0 |       0 |        1 |        8 |        4 |        2 |        1 |        0 |       0 |      0 |      5 |     38 |     32 |      9 |      4 |      8 |    140 |      0 |      0 |      1 |     24 |     18 |      6 |      7 |     10 |    131 |      0 |      0 |      4 |     11 |      6 |      5 |      0 |      3 |     81 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |     22 |      0 |     37 | s03      | R    |
| 4036600 |     419 |    156 |    150 |    13 |    0 |     9 |    3 |    1 |     0 |    0 |     87 |    0 |    0 |    0 |    0 |    185 |    234 |      43 |      27 |      18 |      13 |      3 |      4 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      3 |      3 |      2 |      0 |        7 |       13 |       14 |       11 |        8 |        4 |       1 |        8 |       13 |       26 |       30 |        8 |       12 |       1 |        5 |       13 |       20 |       17 |       12 |        9 |       2 |       13 |       11 |       17 |       19 |        7 |        5 |       0 |        8 |        7 |        8 |        6 |        3 |        2 |       1 |       15 |        8 |       12 |       10 |        2 |        4 |       1 |        3 |        5 |        1 |        1 |        4 |        0 |       0 |        2 |        7 |        0 |        2 |        0 |        1 |       0 |      0 |      2 |     15 |     26 |      6 |      5 |      5 |     97 |      0 |      0 |      1 |     22 |     18 |      7 |      4 |      6 |     92 |      0 |      0 |      0 |      8 |      4 |      2 |      4 |      2 |     67 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 4036700 |     421 |    124 |    198 |    13 |    0 |     5 |    2 |    0 |     1 |    0 |     78 |    0 |    0 |    0 |    0 |    202 |    219 |      35 |      21 |      10 |       1 |      0 |     11 |      3 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      1 |      0 |        2 |        0 |        8 |       20 |        6 |       14 |       0 |        6 |        5 |       16 |       21 |       11 |       15 |       0 |        5 |        7 |       21 |       34 |        9 |       14 |       0 |        7 |       13 |       35 |       29 |        7 |       16 |       1 |        5 |        6 |       12 |       12 |        6 |       10 |       0 |        9 |        5 |        6 |        5 |        0 |        2 |       0 |        1 |        2 |        3 |        2 |        2 |        1 |       0 |        4 |        0 |        3 |        2 |        0 |        1 |       0 |      0 |      1 |     17 |     34 |     11 |      5 |     11 |     45 |      0 |      0 |      0 |     29 |     46 |     21 |     10 |     12 |     80 |      0 |      0 |      2 |     15 |     16 |      3 |      2 |      0 |     40 |      0 |      0 |      0 |      2 |      5 |      1 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4036900 |     547 |    153 |    259 |    14 |    0 |     6 |    6 |    0 |     1 |    0 |    108 |    0 |    0 |    0 |    0 |    276 |    271 |      26 |      15 |      13 |       3 |      6 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |       1 |       0 |       2 |       0 |      2 |      2 |      2 |      0 |        5 |        8 |        9 |       20 |       14 |       16 |       1 |        4 |        9 |       13 |       28 |       11 |       14 |       1 |       10 |       17 |       32 |       32 |       29 |       17 |       0 |        6 |       20 |       27 |       28 |       23 |       18 |       0 |        4 |        8 |       10 |       13 |       12 |        9 |       0 |        5 |       10 |       15 |        7 |       14 |        1 |       0 |        0 |        6 |        0 |        1 |        1 |        2 |       0 |        3 |        5 |        5 |        2 |        0 |        2 |       0 |      0 |      0 |      9 |     32 |     23 |     18 |      0 |     71 |      0 |      0 |      0 |     23 |     38 |     23 |     14 |      0 |    161 |      0 |      0 |      0 |      7 |     13 |      1 |      4 |      0 |     83 |      0 |      0 |      0 |      2 |      6 |      3 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4037000 |     182 |     45 |     99 |     6 |    0 |     0 |    1 |    0 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |     88 |     94 |       7 |      18 |       5 |       1 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      2 |      1 |        0 |        3 |        4 |        3 |        5 |        3 |       0 |        3 |        2 |        5 |       10 |        5 |        1 |       1 |        5 |        6 |       14 |        7 |       11 |        8 |       2 |        0 |       14 |        9 |        7 |        7 |        7 |       2 |        2 |        2 |        3 |        2 |        4 |        0 |       0 |        2 |        4 |        2 |        5 |        4 |        1 |       0 |        0 |        1 |        1 |        0 |        1 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      2 |      8 |      0 |      0 |      0 |     35 |      0 |      0 |      0 |      3 |      9 |      3 |      4 |      2 |     78 |      0 |      0 |      1 |      3 |      0 |      2 |      0 |      1 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4037100 |     831 |    262 |    346 |    21 |    0 |    11 |    5 |    6 |     4 |    0 |    176 |    0 |    0 |    0 |    0 |    413 |    418 |     101 |      78 |      58 |       9 |      7 |      6 |      5 |      1 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      4 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |     11 |     20 |     14 |      1 |        8 |       20 |       26 |       20 |       18 |       18 |       1 |       21 |       21 |       26 |       39 |       21 |       22 |       1 |       14 |       29 |       45 |       47 |       33 |       18 |       2 |       17 |       30 |       38 |       28 |       25 |       18 |       2 |       22 |       12 |       20 |       14 |        8 |        6 |       0 |       20 |       30 |       18 |       19 |        3 |        4 |       0 |        2 |       13 |        8 |        4 |        3 |        2 |       0 |        2 |        5 |        4 |        3 |        1 |        0 |       0 |      0 |      4 |     33 |     33 |     11 |      6 |      5 |    170 |      0 |      0 |      3 |     37 |     50 |     17 |     15 |     11 |    213 |      0 |      0 |      1 |     26 |     23 |      5 |      5 |      4 |    112 |      0 |      0 |      1 |      2 |      9 |      3 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 4037200 |     582 |    214 |    236 |    20 |    0 |     4 |    3 |    0 |     2 |    0 |    103 |    0 |    0 |    0 |    0 |    261 |    321 |      43 |      40 |      11 |       7 |      8 |      9 |      0 |      1 |      0 |      2 |      0 |      0 |      2 |      3 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |       0 |       1 |       2 |       0 |      1 |      5 |      1 |      3 |        7 |       12 |       21 |       25 |       13 |       12 |       1 |        7 |       21 |       27 |       34 |       13 |       21 |       0 |        8 |       23 |       29 |       23 |       10 |       11 |       0 |       19 |       29 |       30 |       24 |       21 |        9 |       0 |        7 |       14 |       11 |       15 |        4 |        3 |       1 |        7 |       14 |       13 |        9 |        3 |        2 |       0 |        2 |        2 |        5 |        1 |        0 |        1 |       0 |        2 |        9 |        3 |        2 |        1 |        1 |       0 |      0 |      1 |     26 |     40 |      5 |     10 |      9 |    123 |      0 |      0 |      2 |     29 |     28 |      6 |      8 |     10 |    153 |      0 |      0 |      0 |     13 |     12 |      6 |      1 |      1 |     70 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |     22 |      0 |     37 | s03      | R    |
| 4037300 |     524 |    158 |    225 |    16 |    0 |     6 |   13 |    2 |     1 |    0 |    103 |    0 |    0 |    0 |    0 |    251 |    273 |      31 |      37 |      21 |       9 |      1 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       1 |       1 |       0 |       0 |      4 |     10 |      3 |      0 |        7 |       13 |       11 |       20 |        7 |        5 |       2 |        7 |       13 |       19 |       22 |       18 |       10 |       4 |       16 |       18 |       26 |       27 |       17 |       10 |       2 |       18 |       19 |       26 |       31 |        7 |        8 |       0 |       12 |        6 |       18 |       11 |        3 |        2 |       1 |       11 |       13 |        6 |       14 |        3 |        2 |       1 |        4 |        3 |        4 |        3 |        3 |        0 |       0 |        3 |       10 |        5 |        2 |        0 |        1 |       0 |      0 |      3 |     25 |     29 |      3 |      7 |      3 |     88 |      0 |      0 |      4 |     22 |     37 |     11 |      6 |      9 |    136 |      0 |      0 |      2 |     21 |      8 |      1 |      1 |      1 |     69 |      0 |      0 |      2 |     13 |      9 |      0 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4037500 |     103 |     22 |     66 |     2 |    0 |     0 |    3 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     54 |     49 |       4 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        3 |        2 |        3 |       0 |        0 |        0 |        0 |        3 |        3 |        4 |       0 |        3 |        1 |        4 |        4 |        8 |       12 |       1 |        0 |        1 |        2 |        4 |        7 |       19 |       0 |        0 |        0 |        0 |        2 |        1 |        2 |       0 |        1 |        1 |        0 |        2 |        1 |        0 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      4 |      0 |      2 |     12 |      0 |      0 |      0 |      2 |      3 |      7 |      3 |      6 |     45 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 4037700 |     340 |    106 |    164 |     6 |    0 |     3 |    0 |    0 |     4 |    0 |     57 |    0 |    0 |    0 |    0 |    158 |    182 |      13 |      13 |       4 |       0 |      5 |      7 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        5 |       10 |        8 |        4 |       16 |       0 |        2 |        9 |        6 |       17 |        5 |       23 |       0 |        6 |       13 |        9 |       24 |        9 |       18 |       0 |        6 |       15 |       21 |       17 |       12 |       14 |       0 |        4 |        9 |        6 |        5 |        1 |        2 |       1 |        3 |        7 |        8 |        2 |        5 |        4 |       0 |        0 |        1 |        2 |        2 |        1 |        1 |       0 |        1 |        2 |        2 |        0 |        0 |        1 |       0 |      0 |      1 |     14 |     19 |      7 |      4 |      6 |     55 |      0 |      0 |      1 |     28 |     15 |     14 |     13 |     16 |     77 |      0 |      0 |      1 |      4 |      3 |      2 |      2 |      3 |     42 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4037900 |      11 |      1 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      5 |      6 |       0 |       0 |       2 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4038000 |      16 |      6 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      8 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4038100 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4038200 |     165 |     47 |     77 |     1 |    0 |     3 |    2 |    1 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |     78 |     87 |       8 |      16 |       2 |       0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      1 |      0 |      2 |      0 |        0 |        0 |        6 |        4 |        6 |        3 |       0 |        2 |        5 |        7 |        4 |        6 |        4 |       0 |        3 |        8 |       10 |        6 |        5 |        8 |       0 |        1 |        7 |        9 |        6 |        6 |        8 |       0 |        5 |        2 |        3 |        2 |        0 |        3 |       0 |        2 |        6 |        5 |        3 |        2 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      1 |      1 |      3 |      0 |      1 |      0 |     41 |      0 |      0 |      0 |      3 |      6 |      1 |      1 |      0 |     66 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |     31 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      3 |      0 |     37 | s03      | R    |
| 4038600 |      60 |     18 |     31 |     1 |    0 |     0 |    2 |    0 |     1 |    0 |      7 |    0 |    0 |    0 |    0 |     30 |     30 |       5 |       1 |       1 |       1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        0 |        4 |       1 |        0 |        3 |        2 |        1 |        0 |        3 |       1 |        0 |        1 |        3 |        1 |        4 |        3 |       3 |        0 |        2 |        2 |        5 |        2 |        4 |       1 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      4 |      0 |      2 |      0 |      9 |      0 |      0 |      0 |      1 |      2 |      3 |      2 |      1 |     22 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4038900 |     776 |    207 |    427 |     3 |    0 |     6 |    5 |    1 |     6 |    0 |    121 |    0 |    0 |    0 |    0 |    367 |    409 |      24 |      22 |       7 |       0 |      6 |     18 |      7 |      1 |      0 |      0 |      0 |      0 |      4 |      6 |      4 |      0 |      1 |      5 |      0 |      1 |      1 |      1 |      1 |      0 |       0 |       1 |       2 |       0 |      2 |      0 |      2 |      0 |        5 |        3 |       20 |       26 |       16 |       25 |       0 |        6 |        5 |       25 |       28 |       26 |       22 |       0 |       12 |       16 |       65 |       50 |       25 |       42 |       1 |        6 |       22 |       73 |       43 |       30 |       41 |       1 |        6 |        9 |       11 |       10 |        7 |        9 |       0 |        8 |       11 |       21 |       13 |        6 |       10 |       0 |        0 |        2 |        1 |        2 |        4 |        0 |       0 |        4 |        1 |        3 |        3 |        0 |        0 |       1 |      0 |      0 |     52 |     54 |      8 |      3 |      5 |     85 |      0 |      0 |      5 |     95 |    121 |     15 |      4 |     11 |    176 |      0 |      0 |      1 |     28 |     15 |      2 |      0 |      9 |     66 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 4039000 |     610 |    144 |    309 |    16 |    0 |     3 |    8 |    2 |    13 |    0 |    115 |    0 |    0 |    0 |    0 |    283 |    327 |      20 |      22 |      20 |       1 |      7 |     11 |      3 |      5 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      4 |      0 |        0 |        7 |       14 |       12 |       11 |       20 |       0 |        0 |        7 |       18 |       23 |       12 |       19 |       1 |       14 |       19 |       31 |       38 |       21 |       17 |       0 |       16 |       22 |       43 |       46 |       26 |       16 |       0 |        3 |       10 |       14 |       20 |        7 |        6 |       0 |        8 |        5 |       23 |        8 |        6 |        5 |       0 |        2 |        3 |        4 |        5 |        3 |        2 |       0 |        5 |        6 |        8 |        3 |        1 |        0 |       0 |      0 |      0 |     15 |     26 |      7 |     11 |      9 |     76 |      0 |      0 |      1 |     39 |     43 |     22 |     10 |     18 |    176 |      0 |      0 |      0 |     16 |      9 |      6 |      4 |      2 |     78 |      0 |      0 |      0 |      6 |      7 |      1 |      1 |      0 |     27 |      0 |     37 | s03      | R    |
| 4039100 |     561 |    182 |    277 |     9 |    0 |     1 |    3 |    1 |     2 |    0 |     86 |    0 |    0 |    0 |    0 |    237 |    324 |      28 |      21 |       7 |       1 |      7 |      5 |      7 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      5 |      7 |      0 |        5 |        6 |       11 |       15 |        9 |       20 |       0 |        6 |       16 |       29 |       23 |       11 |       31 |       0 |        6 |       14 |       33 |       28 |       13 |       26 |       1 |        7 |       19 |       37 |       40 |       17 |       36 |       0 |        4 |        5 |        6 |        9 |        4 |       11 |       0 |        6 |        6 |        9 |       15 |        5 |        6 |       0 |        2 |        2 |        5 |        1 |        0 |        1 |       0 |        0 |        0 |        3 |        0 |        1 |        1 |       0 |      0 |      0 |     31 |     39 |     11 |      6 |     17 |     78 |      0 |      0 |      4 |     43 |     55 |      5 |     10 |     24 |    136 |      0 |      0 |      0 |     15 |     23 |      5 |      1 |      4 |     38 |      0 |      0 |      0 |      5 |      1 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4039200 |     742 |    212 |    377 |    10 |    0 |     6 |    4 |    1 |     4 |    0 |    128 |    0 |    0 |    0 |    0 |    347 |    395 |      23 |      34 |       7 |       1 |     11 |     17 |      5 |      1 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      4 |      4 |      0 |        5 |        3 |       17 |       33 |       13 |       20 |       1 |        6 |        7 |       24 |       40 |       18 |       24 |       1 |       18 |        7 |       53 |       48 |       27 |       37 |       1 |       17 |       15 |       53 |       39 |       23 |       39 |       0 |        9 |        5 |        9 |       14 |        5 |        9 |       0 |       16 |       11 |       18 |       17 |        7 |        8 |       0 |        3 |        2 |        2 |        4 |        1 |        1 |       0 |        2 |        1 |        2 |        5 |        1 |        1 |       0 |      0 |      1 |     30 |     42 |     19 |     17 |     23 |     80 |      0 |      0 |      2 |     59 |     72 |     25 |     32 |     37 |    150 |      0 |      0 |      1 |     23 |     20 |      6 |     13 |      5 |     60 |      0 |      0 |      0 |      3 |      5 |      4 |      0 |      2 |     11 |      0 |     37 | s03      | R    |
| 4039300 |     281 |     59 |    160 |     6 |    0 |     2 |    1 |    3 |     3 |    0 |     47 |    0 |    0 |    0 |    0 |    130 |    151 |       9 |      13 |      11 |       2 |      0 |      7 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        7 |        8 |        6 |        1 |       0 |        1 |        5 |       10 |       12 |        5 |        3 |       0 |        8 |        3 |       22 |       26 |       10 |       10 |       0 |        7 |        4 |       27 |       22 |        7 |       13 |       1 |        0 |        2 |        9 |        6 |        1 |        2 |       0 |        6 |        3 |        7 |        9 |        1 |        1 |       0 |        1 |        2 |        2 |        2 |        0 |        1 |       0 |        0 |        1 |        3 |        1 |        1 |        1 |       0 |      0 |      0 |      7 |     12 |      7 |      1 |     12 |     20 |      0 |      0 |      0 |     23 |     36 |      6 |     16 |     25 |     54 |      0 |      0 |      1 |      7 |      9 |      4 |      1 |      2 |     23 |      0 |      0 |      1 |      3 |      2 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4039400 |     285 |     89 |    135 |    12 |    0 |     2 |    0 |    2 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    122 |    163 |      10 |       6 |       4 |       0 |      0 |      6 |      4 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        5 |        5 |       10 |        9 |        4 |       0 |        4 |        9 |       11 |       12 |        6 |       10 |       0 |        5 |       10 |       17 |       11 |        6 |        8 |       0 |        6 |       11 |       19 |       25 |       12 |        5 |       0 |        3 |        4 |        4 |        6 |        3 |        1 |       0 |        1 |        7 |        7 |        8 |        1 |        0 |       0 |        0 |        1 |        2 |        4 |        0 |        0 |       0 |        1 |        2 |        2 |        2 |        1 |        1 |       0 |      0 |      0 |     12 |     12 |      2 |      4 |      5 |     54 |      0 |      0 |      4 |     15 |     14 |      5 |      9 |      9 |     79 |      0 |      0 |      2 |     12 |     11 |      2 |      3 |      1 |     14 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4039500 |     666 |    171 |    349 |    12 |    0 |     4 |    1 |    0 |     1 |    0 |    128 |    0 |    0 |    0 |    0 |    306 |    360 |      32 |      20 |       8 |       2 |      8 |     17 |      6 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      2 |      1 |        1 |        4 |       13 |       13 |       12 |       23 |       0 |        8 |       10 |       26 |       26 |       17 |       17 |       1 |        9 |       13 |       39 |       46 |       28 |       33 |       1 |        7 |       17 |       45 |       49 |       20 |       42 |       0 |        4 |        8 |       17 |       13 |       11 |        9 |       0 |       11 |       13 |       18 |       10 |        6 |        8 |       0 |        1 |        1 |        4 |        2 |        1 |        0 |       0 |        1 |        2 |        3 |        3 |        0 |        0 |       0 |      0 |      1 |     30 |     37 |     13 |      5 |     11 |     74 |      0 |      0 |      4 |     48 |     84 |     19 |     22 |     30 |    142 |      0 |      0 |      4 |     24 |     16 |      5 |      3 |      3 |     73 |      0 |      0 |      0 |      2 |      5 |      1 |      2 |      0 |      8 |      0 |     37 | s03      | R    |
| 4039600 |     245 |     66 |    127 |     7 |    0 |     5 |    3 |    1 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |    126 |    119 |       8 |      12 |       4 |       0 |      6 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        4 |        2 |        4 |        7 |        6 |        5 |       0 |        2 |        1 |       12 |       12 |        6 |        5 |       0 |       10 |        7 |       11 |       33 |        6 |        2 |       1 |        7 |        3 |       15 |       24 |        4 |        3 |       1 |        3 |        1 |        0 |       13 |        2 |        0 |       0 |        1 |        3 |        5 |        5 |        2 |        0 |       0 |        1 |        3 |        2 |        2 |        1 |        0 |       0 |        1 |        1 |        1 |        5 |        0 |        0 |       0 |      0 |      0 |      9 |     10 |      6 |      0 |     13 |     28 |      0 |      0 |      0 |     23 |     20 |     13 |      5 |     21 |     45 |      0 |      0 |      0 |      4 |      9 |      0 |      0 |      2 |     20 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      2 |      7 |      0 |     37 | s03      | R    |
| 4039700 |       4 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4039900 |       5 |      0 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4040000 |     417 |    174 |    145 |    17 |    0 |     4 |    3 |    1 |     1 |    0 |     72 |    0 |    0 |    0 |    0 |    189 |    228 |      78 |      28 |      31 |       7 |      4 |     10 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      3 |      2 |      4 |      1 |        4 |       14 |       18 |       13 |        7 |       16 |       1 |        4 |       12 |       25 |       26 |        9 |       21 |       4 |        4 |       14 |       15 |        7 |       10 |       13 |       0 |        7 |       11 |       16 |       17 |        8 |       22 |       1 |        4 |       12 |        8 |        8 |        5 |        3 |       0 |        2 |       12 |        5 |        6 |        4 |        3 |       0 |        2 |        4 |        3 |        1 |        1 |        2 |       0 |        2 |        2 |        3 |        3 |        1 |        2 |       0 |      0 |      0 |     26 |     26 |     10 |     10 |      7 |     95 |      0 |      0 |      1 |     12 |     23 |      5 |      5 |     16 |     83 |      0 |      0 |      1 |     15 |      7 |      1 |      1 |      1 |     46 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4040100 |     692 |    227 |    337 |     9 |    0 |     1 |    3 |    0 |     2 |    0 |    113 |    0 |    0 |    0 |    0 |    270 |    422 |      38 |      26 |      11 |       4 |      8 |     15 |      4 |      1 |      1 |      1 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |       2 |       1 |       1 |       0 |      2 |      3 |      2 |      1 |        9 |        9 |        9 |        4 |        8 |       52 |       0 |        5 |       12 |       16 |        7 |       16 |       80 |       0 |       10 |       14 |       22 |        5 |       10 |       63 |       0 |       18 |       23 |       20 |       12 |       21 |      118 |       1 |        6 |        7 |        6 |        7 |        9 |       14 |       0 |        3 |       11 |       13 |       11 |        7 |       19 |       0 |        0 |        1 |        0 |        0 |        0 |        5 |       0 |        3 |        2 |        2 |        1 |        0 |        1 |       0 |      0 |      2 |     26 |     32 |      9 |      4 |      6 |    148 |      0 |      0 |      3 |     39 |     36 |      7 |      7 |      8 |    237 |      0 |      0 |      1 |     25 |      9 |      3 |      0 |      0 |     75 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4040200 |     501 |    183 |    218 |     8 |    0 |     3 |    3 |    0 |     6 |    0 |     80 |    0 |    0 |    0 |    0 |    192 |    309 |      25 |      14 |      10 |       4 |     14 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |       10 |        6 |       12 |       11 |       23 |       0 |        7 |       17 |       23 |       17 |       17 |       39 |       0 |        3 |       22 |       23 |       11 |        5 |       22 |       1 |        3 |       27 |       18 |       15 |       21 |       47 |       0 |        4 |        8 |        6 |       10 |        1 |        5 |       0 |        3 |       16 |        9 |        4 |        3 |       11 |       0 |        2 |        3 |        1 |        1 |        1 |        0 |       0 |        1 |        3 |        1 |        2 |        2 |        3 |       0 |      0 |      1 |     22 |     19 |      7 |      5 |      9 |    120 |      0 |      0 |      0 |     14 |     24 |     14 |      7 |      2 |    157 |      0 |      0 |      0 |     10 |      6 |      1 |      0 |      3 |     60 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4040300 |     157 |     37 |     86 |     4 |    0 |     0 |    0 |    0 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     77 |     80 |       8 |       3 |       2 |       0 |      2 |      5 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        1 |        2 |        0 |        5 |        2 |        5 |       0 |        1 |        3 |        3 |        5 |        3 |        7 |       0 |        3 |        1 |       10 |        8 |        7 |       14 |       0 |        2 |        2 |       10 |       12 |        6 |       11 |       0 |        1 |        2 |        2 |        6 |        2 |        4 |       0 |        0 |        0 |        3 |        6 |        0 |        4 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      9 |      3 |     11 |      0 |     11 |      0 |      0 |      1 |      4 |     14 |     21 |     19 |      0 |     27 |      0 |      0 |      0 |      7 |      2 |      4 |      7 |      0 |     10 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4040400 |     454 |    123 |    255 |     3 |    0 |     2 |    0 |    1 |     0 |    0 |     70 |    0 |    0 |    0 |    0 |    226 |    228 |       7 |      16 |       8 |       0 |      5 |     10 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        4 |        7 |       17 |       11 |       20 |       0 |        4 |        4 |        7 |       18 |       16 |       14 |       1 |        4 |        4 |       28 |       36 |       25 |       35 |       0 |        7 |        7 |       32 |       31 |       18 |       28 |       0 |        6 |        2 |       10 |        8 |        3 |        2 |       0 |        5 |        6 |       10 |       11 |        5 |        2 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      3 |     24 |     31 |      4 |      3 |      0 |     58 |      0 |      0 |      4 |     43 |     60 |     15 |      8 |      0 |    125 |      0 |      0 |      4 |     11 |      8 |      3 |      1 |      0 |     43 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4040500 |     525 |    145 |    236 |    16 |    0 |     2 |    2 |    0 |     5 |    0 |    119 |    0 |    0 |    0 |    0 |    247 |    278 |      20 |      20 |      14 |       1 |      8 |     16 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      4 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |       0 |       4 |       0 |       0 |      0 |      2 |      2 |      1 |        3 |       14 |       11 |       14 |       12 |        5 |       1 |        5 |       19 |       18 |       26 |       13 |        4 |       0 |        9 |       33 |       24 |       19 |       15 |       19 |       0 |       11 |       32 |       28 |       20 |       13 |       13 |       0 |        6 |       13 |       15 |       17 |        7 |        2 |       0 |       14 |       13 |       12 |        8 |        8 |        4 |       0 |        1 |        4 |        2 |        1 |        0 |        0 |       0 |        5 |        9 |        0 |        2 |        0 |        1 |       0 |      0 |      2 |     19 |     17 |      2 |      5 |      1 |     99 |      0 |      0 |      0 |     20 |     21 |     11 |      8 |      4 |    172 |      0 |      0 |      0 |     11 |      6 |      1 |      4 |      0 |     97 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4040600 |     935 |    241 |    504 |    16 |    0 |     3 |    5 |    1 |     4 |    0 |    161 |    0 |    0 |    0 |    0 |    460 |    475 |      35 |      51 |      13 |       6 |      3 |     15 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      1 |      2 |      0 |      2 |      0 |      2 |      0 |       1 |       7 |       1 |       0 |      7 |     18 |      6 |      0 |        9 |       12 |       19 |       23 |       11 |       14 |       0 |        4 |       26 |       50 |       41 |       17 |       15 |       0 |       16 |       23 |      101 |       86 |       25 |       20 |       0 |       17 |       23 |       99 |       59 |       16 |       17 |       2 |       11 |       13 |       26 |       23 |        5 |        5 |       0 |       15 |        7 |       27 |       16 |        8 |        4 |       1 |        3 |        4 |        5 |        4 |        1 |        1 |       0 |        3 |        1 |        5 |        1 |        1 |        0 |       0 |      0 |      0 |     40 |     57 |     30 |     12 |      0 |    102 |      0 |      0 |      5 |     66 |    108 |     93 |     25 |      1 |    206 |      0 |      0 |      0 |     33 |     22 |     13 |      3 |      0 |     90 |      0 |      0 |      0 |      4 |      6 |      3 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4040700 |     744 |    160 |    453 |     8 |    0 |     7 |    3 |    5 |     4 |    0 |    104 |    0 |    0 |    0 |    0 |    374 |    370 |      16 |      16 |       7 |       2 |      9 |     27 |      2 |      0 |      1 |      1 |      1 |      1 |      0 |      7 |      0 |      1 |      1 |      1 |      1 |      0 |      3 |      1 |      0 |      0 |       2 |       7 |       0 |       2 |      4 |     11 |      4 |      0 |        3 |        4 |       16 |       14 |       13 |       24 |       0 |        5 |        6 |       14 |       22 |       13 |       26 |       0 |       18 |       11 |       55 |       64 |       34 |       52 |       0 |       13 |       13 |       52 |       57 |       29 |       55 |       0 |       11 |        4 |        8 |       14 |        6 |        8 |       0 |        7 |        7 |       13 |       11 |        6 |        9 |       0 |        3 |        2 |        3 |        4 |        0 |        3 |       0 |        2 |        3 |        1 |        3 |        2 |        1 |       0 |      0 |      2 |     14 |     39 |     25 |     17 |      8 |     55 |      0 |      0 |      0 |     48 |    137 |     31 |     47 |     11 |    179 |      0 |      0 |      0 |     12 |     18 |      9 |     12 |      2 |     51 |      0 |      0 |      0 |      0 |      8 |      0 |      4 |      2 |     13 |      0 |     37 | s03      | R    |
| 4040900 |     665 |    191 |    301 |    15 |    0 |     2 |    5 |    0 |     4 |    0 |    147 |    0 |    0 |    0 |    0 |    323 |    342 |      29 |      32 |      23 |       2 |      5 |      8 |      4 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      2 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      3 |      7 |      6 |      0 |        5 |       11 |       25 |       16 |       13 |        9 |       0 |        3 |       20 |       44 |       25 |       11 |        9 |       0 |        8 |       31 |       49 |       41 |       14 |       10 |       0 |        5 |       39 |       50 |       32 |       12 |       10 |       0 |       11 |       20 |       25 |       13 |        2 |        1 |       0 |        8 |       22 |       26 |       13 |        3 |        3 |       0 |        0 |        5 |        7 |        3 |        4 |        0 |       0 |        2 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     17 |     47 |      9 |      8 |      0 |    110 |      0 |      0 |      1 |     26 |     52 |     24 |     12 |      0 |    186 |      0 |      0 |      1 |     10 |     16 |      3 |      3 |      0 |    114 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4041000 |     317 |    129 |    151 |     6 |    0 |     4 |    0 |    0 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |    137 |    180 |      10 |       3 |       0 |       0 |      4 |      8 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        8 |       41 |       3 |        1 |        0 |        0 |        3 |        4 |       60 |       8 |        0 |        0 |        1 |        0 |        5 |       55 |       3 |        0 |        0 |        0 |        2 |        6 |       72 |       7 |        0 |        0 |        0 |        1 |        1 |       12 |       0 |        0 |        0 |        0 |        0 |        4 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        5 |       1 |        0 |        0 |        0 |        0 |        2 |        3 |       0 |      0 |      1 |     20 |     17 |      5 |     10 |      4 |     72 |      0 |      0 |      0 |     20 |     17 |      9 |      8 |      7 |     90 |      0 |      0 |      1 |      7 |      3 |      0 |      1 |      0 |     14 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4041100 |     576 |    162 |    298 |    12 |    0 |     3 |    3 |    0 |     3 |    0 |     95 |    0 |    0 |    0 |    0 |    299 |    277 |      32 |      22 |      21 |       8 |      4 |     15 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      1 |      1 |      1 |      2 |      1 |      0 |       1 |       6 |       3 |       0 |      7 |      3 |      2 |      0 |        2 |       15 |       19 |       15 |       11 |       16 |       3 |        4 |       10 |       26 |       12 |        9 |       12 |       8 |        7 |       34 |       50 |       23 |       18 |       21 |       3 |       11 |       45 |       30 |       25 |       12 |       18 |       1 |        7 |       12 |       12 |       10 |        6 |        5 |       0 |        6 |       17 |        8 |        6 |        3 |        3 |       0 |        0 |        5 |        2 |        3 |        0 |        0 |       0 |        0 |        3 |        5 |        3 |        0 |        0 |       0 |      0 |      1 |      8 |     12 |      3 |      7 |      2 |    129 |      0 |      0 |      1 |     14 |     12 |      9 |      1 |      6 |    255 |      0 |      0 |      0 |      3 |      4 |      6 |      1 |      1 |     80 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4041200 |     659 |    216 |    291 |    13 |    0 |     4 |    6 |    2 |     1 |    0 |    126 |    0 |    0 |    0 |    0 |    324 |    335 |      67 |      61 |      27 |       6 |      9 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |       3 |       1 |       1 |       0 |      3 |      5 |      0 |      0 |        6 |       19 |       16 |       31 |       17 |        6 |       0 |       12 |       31 |       34 |       29 |        5 |       10 |       0 |       10 |       24 |       55 |       34 |       14 |       13 |       0 |       10 |       33 |       46 |       28 |       14 |       10 |       0 |       10 |       16 |       15 |       10 |       11 |        2 |       0 |       11 |       15 |       19 |        6 |        8 |        3 |       0 |        4 |        3 |        4 |        4 |        0 |        0 |       0 |        1 |        3 |        4 |        2 |        1 |        0 |       0 |      0 |      1 |     39 |     20 |     12 |     12 |      3 |    129 |      0 |      0 |      5 |     32 |     39 |     17 |     23 |     11 |    164 |      0 |      0 |      2 |     16 |     11 |      7 |      5 |      1 |     84 |      0 |      0 |      0 |      5 |      4 |      0 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 4041300 |     576 |    164 |    273 |    10 |    0 |     0 |    7 |    0 |     0 |    0 |    122 |    0 |    0 |    0 |    0 |    258 |    318 |      19 |      18 |       9 |       1 |      7 |     17 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      4 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       2 |       1 |       0 |      5 |      6 |      2 |      1 |        4 |        9 |       18 |       13 |        9 |       14 |       0 |        7 |       15 |       23 |       18 |       10 |       23 |       1 |        5 |       27 |       27 |       18 |       16 |       31 |       1 |        6 |       40 |       27 |       21 |       16 |       38 |       0 |        5 |       14 |       14 |        9 |        6 |        5 |       0 |        8 |       19 |       16 |        9 |        6 |       11 |       0 |        1 |        4 |        4 |        3 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        1 |        1 |       0 |      0 |      1 |     48 |     16 |      0 |      0 |      0 |     99 |      0 |      0 |      1 |     47 |     20 |      0 |      0 |      0 |    205 |      0 |      0 |      2 |     27 |      6 |      0 |      0 |      0 |     87 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4041400 |     402 |    117 |    205 |    10 |    0 |     1 |    3 |    0 |     2 |    0 |     64 |    0 |    0 |    0 |    0 |    181 |    221 |      18 |      22 |       6 |       0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      0 |        4 |        2 |       14 |       14 |        2 |        5 |       0 |        5 |        4 |       27 |       21 |       13 |        6 |       0 |        4 |       10 |       20 |       34 |       17 |       14 |       0 |        5 |       14 |       32 |       29 |       14 |       12 |       0 |        5 |        4 |       14 |        6 |        3 |        3 |       0 |        5 |        3 |        6 |       10 |        2 |        3 |       0 |        1 |        1 |        1 |        1 |        2 |        0 |       0 |        0 |        2 |        2 |        4 |        1 |        1 |       0 |      0 |      3 |     21 |     18 |      7 |      7 |      1 |     60 |      0 |      0 |      5 |     31 |     46 |     14 |     17 |      1 |     91 |      0 |      0 |      2 |      8 |     16 |      1 |      0 |      1 |     36 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4041500 |     363 |    105 |    182 |     2 |    0 |     2 |    2 |    0 |     2 |    0 |     68 |    0 |    0 |    0 |    0 |    180 |    183 |      12 |      11 |       8 |       2 |      3 |      7 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |       6 |       2 |       2 |       0 |      0 |      1 |      1 |      0 |        6 |        5 |        3 |       15 |       10 |        8 |       0 |        5 |       11 |       11 |       14 |        5 |       11 |       1 |        7 |        9 |       27 |       23 |       14 |       11 |       0 |        4 |       12 |       24 |       29 |       14 |        7 |       1 |        4 |        6 |       10 |       13 |        2 |        3 |       0 |        6 |        4 |        6 |        8 |        2 |        4 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     13 |     14 |      5 |      8 |     17 |     48 |      0 |      0 |      2 |     16 |     29 |      5 |      6 |     34 |     90 |      0 |      0 |      0 |      6 |      6 |      4 |      2 |      7 |     43 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4041700 |     318 |     90 |    156 |     3 |    0 |     0 |    2 |    1 |     1 |    0 |     65 |    0 |    0 |    0 |    0 |    155 |    163 |      14 |      11 |      10 |       0 |      6 |      3 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       4 |       1 |       0 |      0 |      1 |      0 |      0 |        1 |       17 |       12 |        8 |        2 |        2 |       0 |        3 |       20 |       12 |        9 |        3 |        1 |       0 |        8 |       20 |       22 |       15 |        7 |        4 |       0 |        8 |       29 |       22 |       13 |        3 |        5 |       0 |        2 |       11 |       11 |        6 |        1 |        1 |       0 |        5 |       13 |        8 |        5 |        1 |        1 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     90 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    156 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     65 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4041800 |     370 |    143 |    140 |    10 |    0 |     3 |    3 |    0 |     2 |    0 |     69 |    0 |    0 |    0 |    0 |    152 |    218 |      19 |      10 |       3 |       0 |      5 |      7 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        0 |        5 |        6 |        5 |        6 |       26 |       1 |        5 |       19 |        7 |       14 |       12 |       36 |       1 |        5 |       18 |        6 |        5 |       10 |       23 |       0 |        4 |       10 |        6 |        2 |       14 |       37 |       0 |        5 |        5 |        2 |        1 |        6 |        9 |       0 |        6 |        6 |        3 |        7 |        7 |       12 |       0 |        0 |        3 |        0 |        1 |        1 |        3 |       0 |        1 |        4 |        0 |        0 |        2 |        3 |       0 |      0 |      0 |     18 |     15 |      7 |      5 |      5 |     93 |      0 |      0 |      0 |     15 |     13 |      7 |      5 |      4 |     96 |      0 |      0 |      0 |      4 |      3 |      4 |      1 |      3 |     54 |      0 |      0 |      0 |      7 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4041900 |     138 |     62 |     51 |     2 |    0 |     0 |    1 |    0 |     1 |    0 |     21 |    0 |    0 |    0 |    0 |     56 |     82 |      11 |       4 |       1 |       0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        0 |        1 |        1 |        3 |       11 |       1 |        0 |        1 |        0 |        0 |       10 |       30 |       3 |        1 |        1 |        1 |        1 |        3 |       17 |       1 |        0 |        0 |        0 |        0 |        5 |       20 |       1 |        1 |        1 |        0 |        1 |        1 |        5 |       0 |        0 |        1 |        0 |        1 |        3 |        7 |       0 |        0 |        0 |        0 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     13 |     14 |      3 |      3 |      3 |     25 |      0 |      0 |      0 |      1 |      3 |      3 |      2 |      8 |     34 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 4042000 |     195 |     70 |     92 |     2 |    0 |     1 |    2 |    2 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     81 |    114 |       4 |       5 |       2 |       0 |      0 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        3 |       22 |       1 |        1 |        0 |        0 |        2 |        5 |       32 |       2 |        0 |        1 |        0 |        2 |        5 |       29 |       1 |        0 |        1 |        1 |        1 |       11 |       40 |       0 |        0 |        0 |        1 |        1 |        1 |        7 |       0 |        0 |        0 |        1 |        1 |        4 |        9 |       0 |        0 |        0 |        0 |        2 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |      0 |      0 |     11 |     14 |      0 |      2 |      5 |     38 |      0 |      0 |      0 |     12 |     12 |      2 |      6 |      4 |     56 |      0 |      0 |      1 |      5 |      3 |      2 |      2 |      1 |     11 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      4 |      0 |     37 | s03      | R    |
| 4042100 |     775 |    253 |    313 |    22 |    0 |     5 |    5 |    4 |     6 |    0 |    167 |    0 |    0 |    0 |    0 |    362 |    413 |      57 |      41 |      26 |       6 |      5 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      7 |      3 |      0 |       11 |        9 |       35 |       24 |       15 |       16 |       0 |        8 |       20 |       28 |       44 |       16 |       26 |       1 |        7 |       26 |       39 |       46 |       20 |       22 |       1 |       14 |       17 |       31 |       41 |       23 |       25 |       1 |       15 |        8 |       18 |       14 |        9 |        9 |       0 |       11 |       16 |       26 |       19 |       13 |        9 |       0 |        4 |        3 |        3 |        3 |        4 |        1 |       0 |        4 |        4 |        9 |        4 |        1 |        2 |       0 |      0 |      5 |     30 |     38 |     16 |      5 |      5 |    154 |      0 |      0 |      1 |     33 |     44 |     16 |     17 |     15 |    187 |      0 |      0 |      5 |     25 |     15 |      8 |      1 |      3 |    110 |      0 |      0 |      1 |      8 |     10 |      4 |      0 |      1 |     18 |      0 |     37 | s03      | R    |
| 4042200 |     452 |    165 |    194 |     7 |    0 |     2 |    1 |    0 |     1 |    0 |     82 |    0 |    0 |    0 |    0 |    186 |    266 |       9 |       3 |       2 |       0 |      9 |     12 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        2 |        0 |        6 |       11 |       43 |       1 |        1 |        0 |        4 |        6 |       14 |       71 |       6 |        0 |        1 |        3 |        3 |       18 |       58 |       2 |        0 |        0 |        2 |        6 |       23 |       68 |      10 |        0 |        2 |        3 |        3 |       11 |       15 |       1 |        1 |        1 |        1 |        5 |       12 |       23 |       4 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        5 |       0 |      0 |      0 |     27 |     31 |      9 |     12 |     10 |     76 |      0 |      0 |      1 |     23 |     23 |      8 |     12 |      9 |    118 |      0 |      0 |      0 |     13 |     13 |      6 |      1 |      2 |     47 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4042300 |     906 |    297 |    389 |    22 |    0 |     2 |    9 |    6 |     5 |    0 |    176 |    0 |    0 |    0 |    0 |    410 |    496 |      42 |      50 |      25 |       3 |      6 |      4 |     10 |      3 |      1 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      2 |      5 |      0 |      2 |      1 |      0 |      0 |       1 |       1 |       1 |       0 |      6 |      4 |      2 |      1 |       13 |       19 |       26 |       23 |       10 |       21 |       0 |       15 |       36 |       57 |       34 |       21 |       22 |       0 |       19 |       40 |       46 |       34 |       22 |       28 |       2 |       30 |       47 |       45 |       42 |       15 |       19 |       0 |       13 |       25 |       23 |       16 |        7 |        4 |       0 |       18 |       19 |       24 |       12 |       10 |        5 |       0 |        3 |        5 |        7 |        2 |        0 |        2 |       0 |        5 |       10 |        5 |        4 |        1 |        0 |       0 |      0 |      4 |     54 |     12 |      2 |      0 |      0 |    225 |      0 |      0 |      7 |     61 |     10 |      0 |      2 |      0 |    309 |      0 |      0 |      1 |     27 |      0 |      1 |      0 |      0 |    147 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |     37 |      0 |     37 | s03      | R    |
| 4042400 |     447 |    170 |    199 |     9 |    0 |     0 |    3 |    0 |     2 |    0 |     64 |    0 |    0 |    0 |    0 |    180 |    267 |      23 |      13 |       8 |       2 |     13 |      8 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      3 |      1 |        4 |        8 |        1 |        6 |        2 |       43 |       0 |        5 |        3 |        8 |        9 |       10 |       71 |       0 |        5 |        8 |        8 |        6 |       10 |       44 |       0 |        5 |        4 |        5 |        9 |       26 |       68 |       1 |        0 |        2 |        3 |        3 |        6 |       15 |       0 |        4 |        4 |        2 |        4 |        5 |       16 |       0 |        0 |        3 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        1 |        2 |        1 |        2 |       0 |      0 |      0 |     24 |     25 |      4 |     14 |      8 |     95 |      0 |      0 |      1 |     27 |     29 |      5 |     13 |     11 |    113 |      0 |      0 |      0 |     16 |     11 |      0 |      1 |      1 |     35 |      0 |      0 |      0 |      2 |      4 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4042500 |     803 |    300 |    290 |    22 |    0 |     3 |    4 |    4 |     3 |    0 |    177 |    0 |    0 |    0 |    0 |    351 |    452 |      97 |      56 |      42 |       5 |      5 |      9 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |       2 |       1 |       0 |       0 |      2 |      9 |      2 |      0 |       12 |       27 |       28 |       33 |       11 |        9 |       4 |       21 |       33 |       31 |       42 |       22 |       20 |       7 |       15 |       32 |       29 |       26 |       17 |        5 |       3 |       26 |       41 |       23 |       30 |       22 |       16 |       5 |       14 |       18 |       25 |       14 |        5 |        4 |       0 |       29 |       29 |       16 |       14 |        4 |        2 |       3 |        6 |        5 |        4 |        2 |        1 |        2 |       0 |        3 |        6 |        0 |        6 |        1 |        0 |       0 |      0 |      7 |     41 |     38 |      8 |      7 |      7 |    192 |      0 |      0 |      4 |     34 |     19 |     12 |      9 |      7 |    205 |      0 |      0 |      4 |     24 |      8 |      4 |      1 |      1 |    135 |      0 |      0 |      1 |      5 |      4 |      2 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 4042600 |     317 |    100 |    140 |    11 |    0 |     5 |    1 |    1 |     1 |    0 |     58 |    0 |    0 |    0 |    0 |    137 |    180 |      12 |      11 |       3 |       0 |      3 |      8 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      2 |      1 |        0 |        3 |        9 |        8 |        8 |       12 |       0 |        0 |        8 |       13 |       14 |       12 |       13 |       0 |        1 |        4 |       20 |       12 |       10 |       13 |       1 |        4 |       14 |       20 |       14 |       11 |       16 |       0 |        1 |        8 |        6 |        4 |        4 |        4 |       0 |        3 |        9 |        2 |        9 |        3 |        5 |       0 |        1 |        2 |        0 |        2 |        0 |        4 |       0 |        0 |        1 |        5 |        1 |        1 |        2 |       0 |      0 |      1 |     11 |     39 |      6 |      0 |      0 |     43 |      0 |      0 |      0 |     17 |     43 |      6 |      0 |      0 |     74 |      0 |      0 |      0 |      4 |     15 |      0 |      0 |      0 |     39 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4043100 |    1140 |    335 |    525 |    24 |    0 |     8 |   10 |    3 |     3 |    0 |    232 |    0 |    0 |    0 |    0 |    574 |    566 |      63 |      38 |      32 |       6 |     13 |     20 |     13 |      4 |      1 |      0 |      1 |      1 |      4 |      4 |      5 |      0 |      3 |      4 |      2 |      0 |      0 |      2 |      0 |      0 |       6 |       6 |       3 |       0 |      1 |     13 |      6 |      0 |       11 |       17 |       20 |       45 |       25 |       27 |       1 |        7 |       25 |       46 |       52 |       31 |       27 |       1 |       16 |       39 |       81 |       75 |       35 |       38 |       1 |       17 |       28 |       57 |       54 |       43 |       41 |       0 |        9 |       22 |       28 |       31 |       12 |       13 |       0 |       11 |       30 |       27 |       18 |       15 |       16 |       0 |        4 |       10 |        4 |        4 |        4 |        2 |       0 |        1 |        4 |        3 |        9 |        1 |        2 |       0 |      0 |      1 |     67 |     49 |     16 |     12 |     14 |    176 |      0 |      0 |      5 |     75 |     85 |     17 |     39 |     36 |    268 |      0 |      0 |      5 |     38 |     29 |      8 |     11 |      6 |    135 |      0 |      0 |      0 |      8 |     13 |      0 |      0 |      1 |     26 |      0 |     37 | s03      | R    |
| 4044000 |     139 |     47 |     51 |     7 |    0 |     3 |    1 |    0 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |     75 |     64 |      13 |       6 |       2 |       3 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        5 |        4 |        4 |        2 |        2 |       0 |        1 |        3 |        6 |        9 |        6 |        2 |       1 |        2 |        2 |       12 |        7 |        6 |        3 |       0 |        3 |        2 |        5 |        4 |        4 |        1 |       0 |        0 |        2 |        6 |        6 |        3 |        0 |       0 |        1 |        1 |        3 |        3 |        3 |        1 |       0 |        1 |        3 |        1 |        2 |        0 |        0 |       0 |        3 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |     12 |      2 |      1 |      2 |      1 |     28 |      0 |      0 |      1 |      6 |      3 |      1 |      0 |      1 |     39 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4044100 |      21 |      6 |     10 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      4 |    0 |    0 |    0 |    0 |     20 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        2 |        3 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4044200 |      11 |      3 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      8 |      3 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4044300 |     313 |     95 |    161 |     7 |    0 |     2 |    2 |    0 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |    153 |    160 |      15 |       9 |       3 |       1 |      7 |      5 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |       0 |       2 |       2 |       0 |      0 |      1 |      0 |      0 |        3 |        3 |        7 |        7 |        5 |       16 |       0 |        3 |        1 |        8 |       14 |       12 |       16 |       0 |        5 |        3 |       15 |       16 |       18 |       26 |       0 |        2 |        4 |       17 |       16 |       14 |       25 |       0 |        2 |        0 |        7 |        9 |        3 |        3 |       0 |        3 |        2 |        4 |        4 |        3 |        6 |       0 |        0 |        0 |        2 |        2 |        1 |        0 |       0 |        1 |        3 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |     32 |     34 |      3 |      0 |      0 |     25 |      0 |      0 |      3 |     36 |     54 |      0 |      1 |      0 |     67 |      0 |      0 |      0 |     13 |     11 |      2 |      0 |      0 |     20 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4044400 |     253 |     61 |    143 |     4 |    0 |     3 |    0 |    0 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |    113 |    140 |       2 |       3 |       6 |       0 |      3 |      4 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        1 |        0 |        3 |        5 |        2 |        8 |       2 |        2 |        5 |       11 |        8 |        5 |        9 |       0 |        4 |        3 |       12 |       21 |       12 |       14 |       0 |        7 |        6 |       19 |       18 |       11 |       16 |       0 |        3 |        4 |        5 |        8 |        0 |        3 |       0 |        5 |        4 |        3 |        2 |        2 |        3 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     14 |      7 |      4 |      8 |      2 |     26 |      0 |      0 |      0 |     19 |     28 |     10 |      5 |      8 |     73 |      0 |      0 |      0 |      7 |      4 |      1 |      1 |      1 |     28 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4044500 |     377 |     99 |    230 |     8 |    0 |     4 |    2 |    0 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |    163 |    214 |       5 |       9 |       0 |       0 |      5 |     14 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        1 |        1 |        0 |       37 |       0 |        1 |        2 |        3 |        3 |        6 |       44 |       0 |        5 |        5 |        6 |        7 |        8 |       69 |       0 |        3 |        8 |        8 |        3 |       18 |       89 |       1 |        2 |        2 |        0 |        1 |        1 |        9 |       1 |        0 |        3 |        1 |        4 |        0 |       10 |       0 |        0 |        1 |        2 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        7 |       0 |      0 |      2 |     13 |      4 |      5 |      4 |     14 |     57 |      0 |      0 |      2 |     21 |     17 |      5 |      8 |     21 |    156 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      3 |     26 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4044700 |      11 |      4 |      2 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      6 |      5 |       4 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4044800 |     185 |     62 |     79 |     4 |    0 |     2 |    3 |    0 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |     76 |    109 |      28 |       9 |       6 |       1 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        3 |        0 |        7 |        2 |       10 |       0 |        2 |        7 |        5 |        7 |        4 |       15 |       0 |        2 |        4 |        7 |        6 |        7 |       10 |       1 |        5 |        6 |        5 |        8 |        7 |       10 |       1 |        0 |        5 |        0 |        4 |        2 |        3 |       0 |        5 |        5 |        3 |        4 |        0 |        4 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        2 |       0 |      0 |      0 |     10 |      7 |      4 |      2 |      6 |     33 |      0 |      0 |      0 |     13 |      3 |      2 |      6 |      2 |     53 |      0 |      0 |      0 |      7 |      1 |      0 |      1 |      0 |     26 |      0 |      0 |      1 |      2 |      3 |      1 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 4044900 |     453 |    132 |    214 |    14 |    0 |     6 |    2 |    0 |     1 |    0 |     84 |    0 |    0 |    0 |    0 |    205 |    248 |      21 |      36 |      18 |       4 |      5 |      3 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      5 |      1 |      1 |        2 |        5 |       11 |       20 |       10 |        7 |       0 |        7 |       14 |       18 |       19 |       16 |        3 |       0 |       11 |       12 |       21 |       27 |       13 |       15 |       0 |       12 |       18 |       34 |       25 |       14 |       12 |       0 |        6 |        7 |       12 |        9 |        6 |        1 |       0 |        7 |        6 |       16 |        9 |        4 |        1 |       0 |        1 |        2 |        2 |        4 |        1 |        0 |       0 |        3 |        2 |        5 |        2 |        1 |        0 |       0 |      0 |      0 |     21 |     24 |     12 |      4 |      4 |     67 |      0 |      0 |      0 |     16 |     32 |     14 |     24 |     15 |    113 |      0 |      0 |      1 |     14 |     12 |      9 |      1 |      0 |     47 |      0 |      0 |      2 |      5 |      7 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4045000 |     867 |    396 |    248 |    28 |    0 |    16 |   10 |    6 |     7 |    0 |    156 |    0 |    0 |    0 |    0 |    389 |    478 |     185 |      58 |      45 |      25 |      7 |      9 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      4 |      4 |      0 |       13 |       25 |       29 |       34 |       14 |       48 |      11 |       23 |       33 |       23 |       44 |       18 |       62 |      19 |       15 |       27 |       27 |       15 |       11 |       15 |       0 |       20 |       37 |       23 |       13 |        7 |       36 |       2 |        6 |       16 |       16 |       11 |        5 |       11 |       1 |       21 |       26 |       13 |       16 |        3 |       11 |       0 |        8 |        7 |        8 |        8 |        2 |        6 |       0 |        7 |        4 |       10 |        2 |        2 |        3 |       0 |      0 |      5 |     53 |     56 |     18 |      8 |      5 |    251 |      0 |      0 |      3 |     29 |     28 |      5 |      4 |      1 |    178 |      0 |      0 |      2 |     23 |     13 |      4 |      1 |      0 |    113 |      0 |      0 |      0 |     10 |     12 |      0 |      0 |      0 |     45 |      0 |     37 | s03      | R    |
| 4045100 |     379 |    182 |    100 |    10 |    0 |     5 |    3 |    4 |     3 |    0 |     72 |    0 |    0 |    0 |    0 |    182 |    197 |     120 |      39 |      37 |      12 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      3 |      2 |      0 |        2 |       11 |       10 |       23 |       13 |        9 |       7 |        5 |       20 |       18 |       15 |       11 |       27 |      11 |        9 |        7 |       13 |        8 |        9 |        4 |       3 |       10 |       11 |       10 |        4 |        5 |        6 |       1 |        7 |       10 |        6 |       12 |        0 |        4 |       0 |        5 |        9 |       10 |        2 |        3 |        4 |       0 |        0 |        7 |        3 |        3 |        0 |        2 |       0 |        3 |        3 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |     19 |     42 |      4 |     12 |      8 |     96 |      0 |      0 |      3 |      5 |     10 |      1 |      2 |      1 |     78 |      0 |      0 |      0 |     10 |      8 |      3 |      4 |      3 |     44 |      0 |      0 |      0 |      7 |      8 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4046000 |     578 |    188 |    226 |    19 |    0 |     6 |    6 |    0 |     6 |    0 |    127 |    0 |    0 |    0 |    0 |    271 |    307 |      63 |      40 |      30 |      12 |      3 |      7 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        9 |       15 |       14 |       20 |        4 |       11 |       9 |        8 |       20 |       21 |       25 |        9 |       11 |      12 |       13 |       20 |       30 |       17 |       13 |       11 |       3 |       12 |       23 |       31 |       21 |       13 |       10 |       9 |        5 |       17 |       20 |       16 |        2 |        1 |       1 |       13 |       17 |       16 |       11 |        5 |        2 |       1 |        1 |        7 |        3 |        7 |        2 |        0 |       0 |        5 |        2 |        3 |        6 |        0 |        1 |       0 |      0 |      1 |     18 |     34 |      8 |      4 |      4 |    119 |      0 |      0 |      2 |     21 |     34 |      7 |     11 |      6 |    145 |      0 |      0 |      1 |     13 |     14 |      1 |      6 |      1 |     91 |      0 |      0 |      0 |      4 |      5 |      1 |      3 |      0 |     24 |      0 |     37 | s03      | R    |
| 4047000 |     566 |    193 |    223 |    20 |    0 |     3 |    4 |    1 |     8 |    0 |    114 |    0 |    0 |    0 |    0 |    274 |    292 |      41 |      22 |      15 |       8 |      5 |      5 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        4 |        7 |       14 |       17 |       16 |       14 |       2 |        8 |       12 |       17 |       32 |       22 |       28 |       0 |       16 |       20 |       24 |       23 |       15 |       26 |       0 |       10 |       17 |       15 |       20 |       18 |       17 |       2 |        6 |       19 |       11 |       12 |        5 |        7 |       1 |       13 |       10 |       10 |        9 |        9 |        1 |       1 |        2 |        4 |        5 |        1 |        3 |        0 |       0 |        5 |        7 |        4 |        0 |        2 |        3 |       0 |      0 |      2 |     21 |     18 |      7 |      4 |      4 |    137 |      0 |      0 |      2 |     21 |     10 |      2 |      4 |      4 |    180 |      0 |      0 |      2 |     16 |      4 |      0 |      0 |      1 |     91 |      0 |      0 |      1 |      7 |      2 |      0 |      0 |      1 |     25 |      0 |     37 | s03      | R    |
| 4047100 |     616 |    163 |    309 |    11 |    0 |     9 |    7 |    1 |     6 |    0 |    110 |    0 |    0 |    0 |    0 |    311 |    305 |      13 |       9 |       7 |       4 |      9 |     21 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        6 |        7 |       21 |        7 |       32 |       1 |        4 |        8 |        8 |       23 |       16 |       28 |       0 |        5 |       12 |       15 |       27 |       35 |       60 |       0 |        3 |       14 |       16 |       28 |       37 |       57 |       0 |        9 |        8 |       11 |       12 |       12 |       11 |       0 |        4 |        7 |        4 |       12 |       10 |       10 |       0 |        2 |        1 |        3 |        6 |        1 |        5 |       0 |        0 |        1 |        1 |        4 |        4 |        6 |       0 |      0 |      1 |     28 |     21 |      4 |     12 |      5 |     92 |      0 |      0 |      7 |     44 |     39 |     14 |     14 |     16 |    175 |      0 |      0 |      1 |     14 |     12 |      0 |      2 |      1 |     80 |      0 |      0 |      0 |      6 |      3 |      2 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 4047200 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4048000 |     426 |    161 |    145 |    20 |    0 |     4 |    3 |    1 |     6 |    0 |     86 |    0 |    0 |    0 |    0 |    185 |    241 |      38 |      28 |      17 |       6 |      3 |      7 |      3 |      1 |      4 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      2 |        2 |       12 |        9 |       11 |        6 |       17 |       1 |        5 |       11 |       14 |       12 |       13 |       48 |       0 |        3 |       18 |       14 |       10 |        8 |       16 |       0 |        4 |        7 |        8 |       10 |        8 |       39 |       0 |        2 |       11 |        4 |       11 |        3 |        8 |       0 |        7 |       17 |        4 |        9 |        1 |        7 |       2 |        4 |        7 |        1 |        1 |        2 |        4 |       0 |        4 |        4 |        0 |        1 |        2 |        4 |       0 |      0 |      6 |     27 |     30 |      2 |      1 |      0 |     95 |      0 |      0 |      1 |     13 |     18 |      1 |      3 |      0 |    109 |      0 |      0 |      1 |     17 |      8 |      1 |      0 |      0 |     59 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 4049000 |     553 |    184 |    188 |    24 |    0 |     5 |    9 |    6 |    19 |    0 |    118 |    0 |    0 |    0 |    0 |    262 |    291 |      19 |      20 |      10 |      10 |      6 |      7 |      6 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |       11 |       16 |       22 |       10 |       10 |       3 |        6 |       23 |       21 |       27 |       14 |       14 |       6 |        6 |       21 |       27 |       22 |        7 |        6 |       3 |        8 |       14 |       20 |       25 |       12 |       13 |       4 |        2 |       19 |       18 |       15 |       10 |        2 |       0 |        7 |       17 |       13 |       10 |        5 |        0 |       0 |        4 |       13 |        8 |        4 |        1 |        1 |       0 |        3 |       16 |        3 |        6 |        2 |        2 |       0 |      0 |      1 |     29 |     28 |      6 |      5 |      4 |    111 |      0 |      0 |      6 |     24 |     18 |      4 |      4 |      3 |    129 |      0 |      0 |      5 |     22 |      7 |      3 |      2 |      1 |     78 |      0 |      0 |      0 |     12 |     10 |      1 |      0 |      0 |     40 |      0 |     37 | s03      | R    |
| 4049100 |     452 |    119 |    187 |    15 |    0 |     4 |   10 |    4 |    13 |    0 |    100 |    0 |    0 |    0 |    0 |    242 |    210 |      17 |      10 |      10 |       3 |      4 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        0 |       14 |       15 |       11 |       11 |        3 |       1 |        7 |       22 |       11 |       13 |        7 |        3 |       1 |       10 |       29 |       18 |       15 |       20 |       15 |       0 |        8 |       14 |       12 |       12 |       17 |       12 |       5 |        8 |       19 |       12 |        7 |        5 |        2 |       0 |       11 |       15 |        6 |        4 |        8 |        3 |       0 |        8 |        6 |        3 |        5 |        4 |        0 |       1 |        4 |        7 |        4 |        2 |        2 |        0 |       0 |      0 |      2 |     16 |     11 |      3 |      2 |      2 |     83 |      0 |      0 |      1 |     28 |     20 |      2 |      5 |      1 |    130 |      0 |      0 |      2 |     13 |      3 |      1 |      0 |      1 |     80 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     39 |      0 |     37 | s03      | R    |
| 4050000 |     597 |    247 |    174 |    21 |    0 |     4 |    3 |    1 |    10 |    0 |    137 |    0 |    0 |    0 |    0 |    280 |    317 |      86 |      28 |      23 |       8 |      7 |      5 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      4 |      2 |      0 |      0 |       10 |       13 |       27 |       19 |        9 |       27 |       3 |        9 |       21 |       29 |       26 |       11 |       36 |       7 |       13 |       12 |       16 |       12 |        9 |       20 |       5 |        9 |       12 |       17 |       14 |       11 |       22 |       2 |        9 |       13 |       17 |       13 |       11 |        3 |       0 |       12 |       14 |       15 |       10 |       12 |        8 |       0 |        7 |        5 |        4 |        0 |        1 |        2 |       0 |        5 |        6 |        2 |        2 |        1 |        4 |       0 |      0 |      7 |     42 |     28 |     10 |      5 |      4 |    151 |      0 |      0 |      2 |     24 |     21 |      3 |      2 |      2 |    120 |      0 |      0 |      2 |     29 |      9 |      4 |      4 |      1 |     88 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 4051000 |     606 |    211 |    218 |    18 |    0 |     6 |   11 |    3 |    14 |    0 |    125 |    0 |    0 |    0 |    0 |    300 |    306 |      46 |      15 |       8 |       7 |      9 |      4 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        9 |       15 |       17 |       28 |       13 |        9 |       7 |        8 |       17 |       18 |       23 |       17 |       17 |      13 |       14 |       14 |       23 |       24 |       13 |       15 |       6 |        7 |       15 |       15 |       30 |       12 |       22 |       8 |        7 |       19 |       16 |       11 |        6 |        4 |       1 |       11 |       18 |       10 |       12 |        3 |        7 |       0 |        3 |        7 |        9 |        6 |        3 |        1 |       0 |        5 |        5 |        5 |        3 |        3 |        2 |       0 |      0 |      4 |     30 |     19 |     10 |      3 |      4 |    141 |      0 |      0 |      2 |     29 |     25 |      8 |      5 |      7 |    142 |      0 |      0 |      1 |     19 |      8 |      2 |      0 |      0 |     95 |      0 |      0 |      1 |     12 |      3 |      1 |      0 |      1 |     34 |      0 |     37 | s03      | R    |
| 4051100 |     372 |     92 |    144 |    11 |    0 |     3 |    7 |    1 |    12 |    0 |    102 |    0 |    0 |    0 |    0 |    184 |    188 |      11 |       8 |       5 |       3 |      4 |      4 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |       15 |        5 |       12 |        6 |        4 |       0 |        4 |        6 |       13 |       12 |        8 |        6 |       0 |        4 |       15 |       20 |       13 |        6 |       12 |       2 |        5 |       16 |       10 |        6 |       15 |       19 |       1 |        6 |       15 |        9 |        8 |        6 |        3 |       0 |        7 |       27 |        7 |        4 |        5 |        5 |       0 |        2 |        8 |        7 |        2 |        3 |        0 |       0 |        1 |        5 |        1 |        3 |        2 |        0 |       0 |      0 |      0 |     12 |      6 |      4 |      3 |      0 |     67 |      0 |      0 |      0 |     14 |     17 |      7 |      4 |      2 |    100 |      0 |      0 |      2 |     12 |      3 |      1 |      3 |      0 |     81 |      0 |      0 |      1 |      2 |      3 |      0 |      1 |      0 |     27 |      0 |     37 | s03      | R    |
| 4051600 |     137 |     30 |     72 |     3 |    0 |     0 |    1 |    1 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     68 |     69 |       4 |      11 |       3 |       1 |      6 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        1 |        6 |        1 |        1 |       0 |        2 |        2 |        9 |        3 |        1 |        1 |       0 |        2 |        4 |       12 |       11 |        3 |        3 |       0 |        5 |        5 |       11 |       11 |        2 |        3 |       0 |        0 |        3 |        6 |        8 |        0 |        0 |       0 |        1 |        2 |        5 |        3 |        2 |        0 |       0 |        1 |        2 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      3 |      2 |      6 |      0 |     12 |      0 |      0 |      1 |     11 |     12 |      3 |      3 |      0 |     42 |      0 |      0 |      0 |      6 |      5 |      3 |      2 |      0 |     14 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4051700 |     466 |    114 |    248 |    12 |    0 |     2 |    3 |    0 |     1 |    0 |     86 |    0 |    0 |    0 |    0 |    212 |    254 |      18 |      23 |      11 |       2 |      5 |      5 |      2 |      1 |      0 |      2 |      0 |      0 |      1 |      1 |      2 |      1 |      0 |      4 |      0 |      0 |      1 |      3 |      1 |      0 |       2 |       3 |       1 |       0 |      4 |      3 |      1 |      1 |        2 |        4 |       12 |       15 |        6 |        6 |       1 |        3 |        3 |       25 |       20 |        6 |        9 |       2 |        7 |       11 |       46 |       32 |        8 |       14 |       0 |        5 |       25 |       53 |       19 |       19 |        9 |       0 |        4 |        3 |       15 |       10 |        7 |        2 |       0 |        6 |        7 |       15 |       11 |        4 |        2 |       0 |        1 |        0 |        4 |        1 |        1 |        0 |       0 |        2 |        1 |        5 |        3 |        0 |        0 |       0 |      0 |      1 |      9 |     36 |     13 |      5 |      0 |     50 |      0 |      0 |      2 |     27 |     66 |     22 |     25 |      0 |    106 |      0 |      0 |      2 |     15 |     23 |      7 |      3 |      0 |     36 |      0 |      0 |      1 |      2 |      6 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4051800 |     391 |    108 |    183 |     6 |    0 |     5 |    4 |    1 |     6 |    0 |     78 |    0 |    0 |    0 |    0 |    194 |    197 |      12 |      15 |       9 |       3 |     14 |     16 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      6 |      3 |      0 |        3 |        4 |       11 |       15 |        5 |        7 |       1 |        5 |        3 |       20 |       22 |        6 |        6 |       0 |        7 |       14 |       25 |       28 |        9 |       14 |       0 |        4 |        8 |       22 |       27 |       10 |       15 |       0 |        5 |        6 |       12 |       10 |        5 |        2 |       0 |        8 |        7 |       13 |        7 |        1 |        2 |       0 |        2 |        2 |        5 |        1 |        0 |        1 |       0 |        4 |        1 |        1 |        2 |        1 |        2 |       0 |      0 |      1 |     16 |     18 |      6 |      3 |     21 |     43 |      0 |      0 |      0 |     34 |     29 |     10 |      5 |     26 |     79 |      0 |      0 |      0 |     11 |      2 |      3 |      2 |      7 |     53 |      0 |      0 |      1 |      4 |      6 |      1 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 4051900 |      58 |     18 |     21 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     27 |     31 |       4 |       4 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        1 |        1 |        1 |       0 |        0 |        2 |        4 |        4 |        0 |        2 |       0 |        0 |        1 |        4 |        4 |        0 |        2 |       0 |        0 |        2 |        3 |        3 |        0 |        2 |       0 |        1 |        3 |        2 |        1 |        1 |        1 |       0 |        1 |        2 |        4 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      3 |      1 |      0 |     13 |      0 |      0 |      0 |      2 |      4 |      1 |      4 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4053000 |     201 |     73 |     84 |     2 |    0 |     5 |    2 |    3 |     1 |    0 |     31 |    0 |    0 |    0 |    0 |     90 |    111 |      21 |      16 |       7 |       3 |      2 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      1 |      0 |        1 |        2 |        6 |        7 |        1 |       10 |       2 |        0 |        6 |        8 |        9 |        1 |       17 |       3 |        5 |        8 |        7 |       10 |        5 |       11 |       1 |        7 |        4 |        6 |        8 |        4 |        8 |       0 |        3 |        1 |        2 |        2 |        0 |        3 |       0 |        9 |        3 |        2 |        4 |        1 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        3 |        3 |        2 |        0 |        2 |       0 |      0 |      1 |     16 |      8 |      1 |      3 |      0 |     44 |      0 |      0 |      2 |     10 |     13 |      7 |      1 |      2 |     49 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     25 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4053100 |     178 |     64 |     72 |     4 |    0 |     0 |    1 |    1 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |     83 |     95 |      14 |       6 |       7 |       2 |      1 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        2 |        3 |        6 |        6 |        4 |       6 |        1 |        1 |        3 |        6 |        4 |        8 |      13 |        3 |        5 |        7 |        3 |        6 |        9 |       3 |        1 |        3 |        5 |        5 |        7 |        8 |       7 |        3 |        2 |        5 |        2 |        2 |        2 |       2 |        5 |        2 |        5 |        2 |        2 |        1 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |      9 |      2 |      3 |      3 |     38 |      0 |      0 |      0 |      3 |     10 |      2 |      5 |      2 |     50 |      0 |      0 |      0 |      2 |      6 |      1 |      2 |      3 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4053200 |     291 |     90 |    137 |     4 |    0 |     4 |    1 |    0 |     2 |    0 |     53 |    0 |    0 |    0 |    0 |    129 |    162 |      21 |       8 |       8 |       4 |      2 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        0 |        2 |        6 |        3 |        5 |        7 |       7 |        4 |        5 |        6 |       12 |        7 |       17 |       9 |        8 |        5 |        9 |       10 |        3 |       12 |      13 |        5 |        8 |       11 |       13 |        7 |       25 |       8 |        3 |        5 |       10 |        5 |        2 |        3 |       2 |        5 |        5 |        7 |        3 |        2 |        1 |       0 |        1 |        2 |        2 |        2 |        0 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      7 |     10 |      5 |      5 |      4 |     59 |      0 |      0 |      1 |     11 |     23 |      8 |      4 |      4 |     86 |      0 |      0 |      0 |      7 |      1 |      8 |      2 |      0 |     35 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4054000 |     493 |    171 |    184 |    20 |    0 |     7 |    6 |    1 |     7 |    0 |     97 |    0 |    0 |    0 |    0 |    233 |    260 |      50 |      34 |      21 |       8 |      4 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      4 |      0 |       10 |       18 |       12 |       14 |        9 |        5 |       2 |       14 |       17 |       25 |       22 |        8 |        9 |       6 |       11 |       18 |       22 |       24 |        7 |       10 |       3 |       14 |       25 |        8 |       17 |        8 |       12 |       5 |        7 |       19 |       10 |        8 |        4 |        0 |       0 |       18 |       14 |        6 |        7 |        3 |        1 |       0 |        3 |        9 |        1 |        4 |        2 |        1 |       0 |        9 |        2 |        5 |        2 |        3 |        0 |       0 |      0 |      2 |     20 |     15 |      3 |      5 |      2 |    124 |      0 |      0 |      2 |     17 |     13 |      8 |      2 |      5 |    137 |      0 |      0 |      1 |      8 |      2 |      3 |      1 |      0 |     82 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      0 |     31 |      0 |     37 | s03      | R    |
| 4054100 |     337 |    115 |    142 |     5 |    0 |     6 |    3 |    2 |     2 |    0 |     62 |    0 |    0 |    0 |    0 |    176 |    161 |      26 |      12 |       8 |       2 |      1 |      6 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      3 |      1 |      1 |      0 |        2 |        7 |       11 |       16 |        9 |        4 |       4 |        4 |       13 |        6 |       19 |        8 |        6 |       6 |       11 |       13 |        8 |       22 |        8 |       13 |       8 |        6 |        8 |       10 |       10 |        6 |       14 |       5 |        5 |       12 |        3 |        8 |        2 |        5 |       0 |        7 |        7 |        4 |        5 |        2 |        2 |       0 |        2 |        2 |        1 |        0 |        0 |        0 |       0 |        2 |        0 |        6 |        1 |        2 |        2 |       0 |      0 |      0 |     10 |     15 |      7 |      3 |      4 |     76 |      0 |      0 |      0 |      6 |     16 |      3 |      6 |      3 |    108 |      0 |      0 |      0 |     12 |      2 |      1 |      0 |      1 |     46 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4054400 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4054500 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4055000 |     499 |    145 |    236 |    13 |    0 |     7 |    8 |    0 |     2 |    0 |     88 |    0 |    0 |    0 |    0 |    247 |    252 |      24 |      10 |      11 |       6 |      2 |     14 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |       1 |       5 |       0 |       0 |      2 |      0 |      1 |      0 |        1 |        5 |        9 |       14 |        8 |       14 |       7 |        4 |        6 |       12 |       23 |       11 |       17 |      14 |        9 |       18 |       23 |       22 |       14 |       23 |       9 |        6 |       17 |       19 |       19 |       21 |       24 |      12 |        4 |       16 |       11 |        7 |        8 |        4 |       2 |        3 |        8 |        7 |        9 |        8 |        1 |       0 |        1 |        3 |        3 |        9 |        2 |        1 |       0 |        2 |        0 |        3 |        4 |        2 |        0 |       0 |      0 |      3 |     16 |     15 |     15 |      7 |      7 |     82 |      0 |      0 |      1 |     12 |     33 |     11 |      8 |     16 |    155 |      0 |      0 |      1 |     13 |     11 |      4 |      2 |      1 |     56 |      0 |      0 |      1 |      1 |      7 |      2 |      1 |      1 |     17 |      0 |     37 | s03      | R    |
| 4055100 |      51 |      6 |     31 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     24 |     27 |       0 |       2 |       2 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       1 |        1 |        3 |        2 |        3 |        2 |        3 |       1 |        2 |        3 |        2 |        4 |        0 |        4 |       1 |        0 |        1 |        4 |        0 |        1 |        0 |       0 |        2 |        0 |        3 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      2 |      3 |      1 |      2 |     20 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 4056000 |     406 |    144 |    167 |     9 |    0 |     4 |    3 |    0 |     1 |    0 |     78 |    0 |    0 |    0 |    0 |    191 |    215 |      36 |       8 |      10 |       3 |      0 |      4 |      2 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      1 |      2 |      0 |      0 |        7 |       11 |       13 |       13 |        6 |        7 |       8 |        8 |        8 |        6 |       17 |       12 |       12 |      16 |        2 |        8 |       12 |       17 |        7 |       21 |      10 |        7 |        5 |       14 |       13 |       12 |       26 |      13 |        3 |        9 |        9 |       11 |        4 |        2 |       1 |        8 |       11 |        9 |        6 |        3 |        1 |       1 |        1 |        2 |        2 |        2 |        2 |        1 |       0 |        0 |        2 |        3 |        0 |        0 |        2 |       0 |      0 |      0 |     18 |     14 |      9 |      0 |      1 |    102 |      0 |      0 |      0 |     17 |     18 |      4 |      6 |      7 |    115 |      0 |      0 |      0 |      6 |      5 |      1 |      2 |      3 |     61 |      0 |      0 |      0 |      3 |      7 |      0 |      3 |      0 |      4 |      0 |     37 | s03      | R    |
| 4056100 |     206 |     73 |     83 |     6 |    0 |     0 |    2 |    1 |     4 |    0 |     37 |    0 |    0 |    0 |    0 |     86 |    120 |      18 |      12 |       6 |       1 |      3 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |        5 |        8 |        4 |        7 |        1 |        5 |       0 |       10 |       10 |        4 |        9 |        5 |        4 |       1 |        5 |       11 |        7 |        4 |        2 |        2 |       1 |       15 |       16 |        7 |        4 |        2 |        6 |       1 |        3 |        7 |        6 |        0 |        1 |        0 |       0 |        6 |        7 |        2 |        3 |        1 |        1 |       0 |        2 |        3 |        0 |        1 |        1 |        0 |       0 |        2 |        1 |        3 |        0 |        0 |        0 |       0 |      0 |      1 |     13 |      6 |      2 |      2 |      0 |     49 |      0 |      0 |      0 |      8 |      2 |      1 |      1 |      0 |     71 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     33 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4056200 |     608 |    187 |    260 |    18 |    0 |    11 |   11 |    0 |     4 |    0 |    117 |    0 |    0 |    0 |    0 |    271 |    337 |      34 |      24 |      13 |       6 |      9 |     11 |      3 |      1 |      0 |      0 |      2 |      0 |      4 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      4 |      0 |      0 |        5 |        4 |       18 |       23 |       15 |       12 |       1 |        6 |       17 |       20 |       25 |       21 |       19 |       1 |       15 |       13 |       22 |       31 |       21 |       22 |       0 |       16 |       17 |       18 |       42 |       20 |       22 |       1 |        8 |        7 |       11 |       13 |        5 |        4 |       1 |       17 |       14 |       17 |       14 |        2 |        4 |       0 |        2 |        4 |        4 |        6 |        2 |        2 |       0 |        7 |        3 |        5 |        4 |        3 |        2 |       0 |      0 |      3 |     15 |     19 |      4 |      4 |      9 |    133 |      0 |      0 |      0 |     28 |     35 |      4 |     11 |     13 |    169 |      0 |      0 |      2 |     12 |     16 |      3 |      1 |      0 |     83 |      0 |      0 |      1 |      4 |      6 |      2 |      0 |      1 |     30 |      0 |     37 | s03      | R    |
| 4056300 |       3 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4056400 |      56 |     25 |     16 |     2 |    0 |     1 |    0 |    0 |     1 |    0 |     11 |    0 |    0 |    0 |    0 |     23 |     33 |       6 |       3 |       1 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        2 |        0 |        1 |        1 |       0 |        3 |        2 |        4 |        5 |        1 |        1 |       0 |        0 |        1 |        3 |        2 |        0 |        0 |       0 |        1 |        2 |        2 |        2 |        2 |        1 |       0 |        1 |        0 |        2 |        2 |        0 |        0 |       0 |        1 |        3 |        1 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4057000 |     634 |    223 |    252 |    20 |    0 |     5 |    6 |    1 |     3 |    0 |    124 |    0 |    0 |    0 |    0 |    297 |    337 |      74 |      36 |      25 |       5 |     11 |      3 |      7 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       4 |       4 |       0 |       0 |      0 |      2 |      1 |      0 |        9 |       12 |       21 |       14 |       11 |       22 |      12 |       12 |       13 |       27 |       21 |       17 |       18 |      14 |       11 |       14 |       29 |       27 |        8 |       27 |       3 |       10 |       20 |       36 |       21 |       17 |       20 |       9 |        7 |        8 |       16 |       18 |        4 |        2 |       1 |       15 |       14 |       13 |       10 |       11 |        4 |       1 |        5 |        4 |        8 |        1 |        2 |        1 |       0 |        1 |        3 |        6 |        3 |        0 |        1 |       0 |      0 |      5 |     28 |     19 |      7 |      6 |      8 |    150 |      0 |      0 |      5 |     27 |     35 |     17 |      9 |      8 |    151 |      0 |      0 |      1 |     12 |      9 |      6 |      5 |      4 |     87 |      0 |      0 |      1 |      8 |      4 |      4 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 4058000 |     725 |    260 |    333 |    17 |    0 |     6 |    5 |    0 |     6 |    0 |     98 |    0 |    0 |    0 |    0 |    261 |    464 |      15 |      15 |       8 |       1 |     16 |     16 |     10 |      1 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      1 |        1 |        3 |        2 |        4 |       11 |       52 |       5 |        4 |        5 |        3 |        9 |       27 |      124 |      10 |        3 |        3 |        8 |        4 |       13 |       89 |       4 |        6 |        6 |        7 |        7 |       31 |      142 |      10 |        1 |        5 |        4 |        7 |        8 |       18 |       0 |        1 |        0 |        4 |        5 |       15 |       30 |       0 |        2 |        1 |        1 |        1 |        1 |       10 |       0 |        1 |        0 |        3 |        1 |        4 |        9 |       0 |      0 |      1 |     38 |     46 |      3 |     11 |      9 |    152 |      0 |      0 |      5 |     48 |     46 |      6 |     17 |     14 |    197 |      0 |      0 |      0 |     11 |     11 |      2 |      3 |      1 |     70 |      0 |      0 |      0 |      3 |      5 |      2 |      1 |      0 |     23 |      0 |     37 | s03      | R    |
| 4058900 |     224 |     72 |     83 |     8 |    0 |     0 |    2 |    1 |     1 |    0 |     57 |    0 |    0 |    0 |    0 |     85 |    139 |       2 |       6 |       9 |       1 |      3 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        8 |        7 |        3 |        0 |        0 |       0 |        7 |        9 |       16 |        9 |        8 |        2 |       0 |        8 |       11 |        4 |        4 |        3 |        2 |       0 |        7 |       25 |       10 |        8 |        1 |        0 |       0 |       10 |        6 |        4 |        4 |        2 |        0 |       0 |        5 |       12 |        8 |        2 |        3 |        1 |       0 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        3 |        2 |        0 |        0 |       0 |      0 |      1 |      6 |      3 |      0 |      0 |      0 |     62 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     80 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     52 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4059000 |     865 |    275 |    447 |    26 |    0 |     8 |    6 |    0 |     1 |    0 |    102 |    0 |    0 |    0 |    0 |    307 |    558 |       5 |      10 |       1 |       2 |     29 |     21 |      5 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      3 |      0 |      0 |        0 |        0 |        1 |        3 |        7 |       68 |       3 |        0 |        0 |        2 |       10 |       34 |      141 |       6 |        0 |        0 |        1 |        5 |       21 |      134 |       7 |        0 |        1 |        2 |        7 |       45 |      204 |      20 |        0 |        0 |        0 |        2 |        8 |       26 |       1 |        0 |        0 |        3 |        5 |       12 |       42 |       3 |        0 |        0 |        0 |        1 |        5 |       14 |       0 |        0 |        0 |        0 |        1 |        3 |       17 |       0 |      0 |      5 |     50 |     42 |     10 |     11 |      9 |    148 |      0 |      0 |      2 |     63 |     54 |     14 |     24 |     25 |    265 |      0 |      0 |      0 |     14 |     11 |      5 |      1 |      2 |     69 |      0 |      0 |      1 |      9 |      6 |      2 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 4059200 |     351 |    127 |    175 |     8 |    0 |     0 |    3 |    0 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |    123 |    228 |       8 |       2 |       1 |       0 |      8 |     15 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        0 |        0 |        0 |        2 |        3 |       36 |       1 |        0 |        0 |        2 |        2 |       12 |       64 |       5 |        0 |        1 |        1 |        1 |        7 |       51 |       0 |        0 |        0 |        1 |        3 |       17 |       91 |       2 |        0 |        0 |        0 |        2 |        4 |        8 |       0 |        0 |        0 |        0 |        0 |        7 |       16 |       1 |        0 |        0 |        0 |        2 |        1 |        3 |       0 |        0 |        1 |        0 |        0 |        0 |        4 |       0 |      0 |      0 |     20 |     20 |      2 |      2 |      2 |     81 |      0 |      0 |      2 |     30 |     20 |     10 |      4 |      9 |    100 |      0 |      0 |      0 |      7 |      3 |      0 |      1 |      2 |     25 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4059300 |     171 |     69 |     78 |     2 |    0 |     1 |    0 |    1 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     70 |    101 |       9 |       7 |       2 |       1 |      3 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        2 |        1 |        5 |       15 |       0 |        0 |        2 |        0 |        5 |       10 |       28 |       0 |        0 |        1 |        1 |        3 |        6 |       23 |       0 |        0 |        0 |        2 |        2 |        7 |       31 |       2 |        0 |        0 |        0 |        4 |        3 |        3 |       0 |        1 |        1 |        0 |        2 |        0 |        6 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      1 |      7 |      6 |      2 |      1 |      3 |     49 |      0 |      0 |      0 |      9 |     11 |      5 |      1 |      4 |     48 |      0 |      0 |      1 |      2 |      2 |      1 |      0 |      1 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 4059400 |     476 |    112 |    259 |     5 |    0 |     3 |    1 |    0 |     3 |    0 |     93 |    0 |    0 |    0 |    0 |    223 |    253 |      18 |      24 |      15 |       1 |     10 |      8 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |       1 |       5 |       2 |       1 |      2 |      4 |      3 |      0 |        3 |        0 |        9 |       16 |       12 |        6 |       0 |        5 |        8 |       19 |       16 |        8 |       10 |       0 |        8 |        6 |       45 |       29 |       18 |       19 |       0 |        6 |       14 |       37 |       38 |       21 |       18 |       0 |        3 |        3 |       17 |       12 |        6 |        5 |       0 |       10 |        7 |       13 |       10 |        5 |        2 |       0 |        0 |        1 |        3 |        1 |        0 |        1 |       0 |        1 |        1 |        2 |        1 |        0 |        1 |       0 |      0 |      2 |     18 |     25 |      2 |      1 |      0 |     64 |      0 |      0 |      5 |     26 |     53 |      3 |      8 |      1 |    163 |      0 |      0 |      2 |     15 |     13 |      2 |      2 |      0 |     59 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4059500 |     266 |     66 |    147 |     5 |    0 |     2 |    1 |    0 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    132 |    134 |       8 |      18 |       2 |       1 |      2 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      1 |      0 |        2 |        1 |        6 |       10 |        2 |        4 |       0 |        2 |        4 |       11 |       13 |        3 |        8 |       0 |        4 |        5 |       23 |       20 |       10 |       15 |       0 |        5 |       11 |       15 |       14 |       10 |       15 |       0 |        6 |        3 |        4 |        7 |        2 |        5 |       0 |        1 |        2 |        5 |        2 |        5 |        3 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        1 |        0 |       0 |      0 |      3 |     23 |      9 |      7 |      1 |      0 |     23 |      0 |      0 |      0 |     37 |     28 |     22 |      2 |      0 |     58 |      0 |      0 |      1 |     15 |      3 |      2 |      0 |      0 |     24 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4059600 |     452 |    140 |    215 |    11 |    0 |     3 |    0 |    0 |     3 |    0 |     80 |    0 |    0 |    0 |    0 |    191 |    261 |      24 |      32 |      11 |       2 |      4 |     11 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      3 |      2 |      0 |        4 |        8 |       11 |       14 |        8 |        7 |       0 |       10 |       17 |       15 |       29 |        6 |       11 |       0 |        7 |       16 |       20 |       28 |       16 |       10 |       0 |       18 |       22 |       29 |       24 |       13 |       11 |       1 |        6 |        8 |        8 |        7 |        4 |        1 |       0 |        9 |        8 |       11 |       11 |        5 |        2 |       0 |        1 |        4 |        2 |        0 |        0 |        1 |       0 |        0 |        1 |        4 |        2 |        0 |        2 |       0 |      0 |      2 |     28 |     15 |      4 |      4 |      7 |     80 |      0 |      0 |      0 |     27 |     31 |      6 |      8 |      8 |    135 |      0 |      0 |      1 |      9 |     10 |      1 |      4 |      4 |     51 |      0 |      0 |      1 |      5 |      4 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 4059700 |     447 |    138 |    204 |    12 |    0 |     4 |    4 |    0 |     0 |    0 |     85 |    0 |    0 |    0 |    0 |    206 |    241 |      19 |      25 |       7 |       0 |      2 |     10 |      2 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      1 |      6 |      2 |      0 |        2 |        7 |       12 |       17 |        5 |        6 |       0 |        5 |       14 |       22 |       30 |        8 |       10 |       0 |        9 |       25 |       29 |       29 |        6 |        7 |       0 |        8 |       21 |       24 |       31 |        8 |        7 |       0 |        7 |       13 |        9 |       11 |        0 |        1 |       0 |        8 |       10 |       13 |        6 |        3 |        4 |       0 |        1 |        1 |        4 |        3 |        2 |        0 |       0 |        2 |        2 |        0 |        4 |        1 |        0 |       0 |      0 |      0 |     17 |     30 |      5 |      7 |     15 |     64 |      0 |      0 |      4 |     29 |     30 |     16 |      4 |     20 |    101 |      0 |      0 |      0 |     15 |      4 |      0 |      2 |      8 |     56 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4059800 |       3 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4059900 |     130 |     47 |     52 |     3 |    0 |     2 |    0 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     59 |     71 |       5 |       2 |       1 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        1 |        1 |        6 |        7 |        3 |       1 |        2 |        3 |        7 |        5 |        7 |        2 |       1 |        4 |        5 |        6 |        3 |        6 |        3 |       0 |        0 |        4 |        7 |        7 |        4 |        3 |       0 |        2 |        4 |        2 |        0 |        0 |        2 |       0 |        2 |        4 |        2 |        2 |        3 |        3 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |      6 |      2 |      3 |      3 |     24 |      0 |      0 |      0 |      5 |      6 |      0 |      3 |      1 |     37 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |     20 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4060000 |     351 |    123 |    147 |    10 |    0 |     3 |    7 |    0 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    161 |    190 |      31 |      16 |       8 |       5 |      2 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      5 |      0 |      3 |      0 |        5 |        4 |       12 |       13 |        8 |        7 |       6 |        8 |       10 |        9 |       21 |        7 |        9 |       4 |        2 |        5 |       13 |       22 |       10 |       10 |       2 |       12 |       12 |       17 |       16 |        7 |       11 |       8 |        8 |        4 |        3 |        8 |        5 |        4 |       0 |        3 |        7 |        5 |        7 |        4 |        0 |       2 |        3 |        2 |        4 |        1 |        0 |        0 |       0 |        1 |        2 |        3 |        2 |        3 |        0 |       0 |      0 |      1 |     12 |     18 |      7 |     11 |      4 |     70 |      0 |      0 |      1 |     21 |     26 |      2 |     10 |      8 |     79 |      0 |      0 |      0 |      6 |      6 |      4 |      1 |      1 |     42 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 4060100 |     433 |    128 |    205 |     8 |    0 |     4 |    3 |    1 |     5 |    0 |     79 |    0 |    0 |    0 |    0 |    221 |    212 |      40 |      26 |      12 |       4 |      0 |     12 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        6 |        8 |       11 |       13 |       10 |       11 |       3 |        3 |        8 |       12 |       14 |       15 |       11 |       3 |       10 |       12 |       23 |       26 |       18 |       13 |       2 |       10 |        9 |       24 |       27 |       17 |       14 |       0 |        7 |       10 |        7 |       12 |        5 |        7 |       0 |        7 |        7 |        4 |        5 |        5 |        2 |       1 |        3 |        1 |        1 |        1 |        0 |        1 |       0 |        1 |        5 |        1 |        5 |        1 |        1 |       0 |      0 |      1 |     13 |     23 |      5 |      3 |      8 |     75 |      0 |      0 |      0 |     25 |     31 |      9 |     13 |     14 |    113 |      0 |      0 |      1 |     16 |      8 |      5 |      5 |      0 |     44 |      0 |      0 |      1 |      8 |      2 |      0 |      1 |      2 |      7 |      0 |     37 | s03      | R    |
| 4060200 |     850 |    242 |    437 |    14 |    0 |    10 |    5 |    0 |     4 |    0 |    138 |    0 |    0 |    0 |    0 |    374 |    476 |      38 |      29 |      16 |       5 |      8 |     19 |     10 |      2 |      0 |      1 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |       2 |       1 |       0 |       0 |      1 |      7 |      2 |      1 |        5 |        5 |        6 |       16 |       20 |       34 |       0 |        2 |        7 |       13 |       29 |       45 |       59 |       1 |       15 |       12 |       34 |       48 |       37 |       63 |       0 |       12 |       13 |       34 |       41 |       45 |       83 |       0 |       13 |        5 |        9 |       11 |       10 |       13 |       0 |       14 |        7 |       11 |       17 |       15 |       13 |       0 |        1 |        4 |        3 |        2 |        3 |        5 |       0 |        1 |        4 |        1 |        4 |        3 |        2 |       0 |      0 |      1 |     29 |     45 |     17 |     10 |     20 |    120 |      0 |      0 |      5 |     49 |     76 |     22 |     16 |     18 |    251 |      0 |      0 |      2 |     24 |     16 |      9 |      6 |      9 |     72 |      0 |      0 |      0 |      4 |      8 |      4 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4060400 |     803 |    235 |    394 |    16 |    0 |     5 |    4 |    1 |     3 |    0 |    145 |    0 |    0 |    0 |    0 |    377 |    426 |      65 |      39 |      30 |       4 |      8 |      5 |      4 |      2 |      1 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |      0 |      1 |      2 |       2 |       3 |       3 |       0 |      5 |      6 |      3 |      0 |        8 |       14 |       19 |       22 |       22 |        7 |       0 |        4 |       29 |       44 |       26 |       26 |       13 |       1 |       14 |       25 |       59 |       60 |       15 |       15 |       1 |       22 |       29 |       57 |       63 |       12 |       20 |       2 |       10 |       14 |       20 |       21 |        9 |        3 |       0 |        9 |       12 |       23 |       15 |        5 |        3 |       1 |        2 |        3 |        4 |        6 |        2 |        1 |       1 |        2 |        2 |        2 |        3 |        1 |        0 |       0 |      0 |      1 |     23 |     45 |     16 |      7 |     10 |    133 |      0 |      0 |      1 |     40 |     80 |     16 |      9 |     19 |    229 |      0 |      0 |      0 |     20 |     11 |      9 |      2 |      3 |    100 |      0 |      0 |      1 |      8 |      3 |      0 |      1 |      4 |     12 |      0 |     37 | s03      | R    |
| 4060500 |     254 |     95 |     89 |    12 |    0 |     5 |    1 |    2 |     0 |    0 |     50 |    0 |    0 |    0 |    0 |    119 |    135 |      56 |      24 |      22 |       8 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      3 |      3 |      0 |      1 |        4 |        8 |        6 |        8 |        4 |        4 |       4 |        5 |       14 |        8 |       12 |        7 |        6 |       5 |        7 |        8 |       10 |       13 |        5 |        2 |       1 |        6 |        7 |       13 |        7 |        5 |        5 |       0 |        6 |        7 |        6 |        3 |        0 |        3 |       0 |        6 |        3 |        6 |        5 |        1 |        4 |       0 |        1 |        4 |        2 |        0 |        3 |        0 |       0 |        2 |        1 |        3 |        0 |        4 |        0 |       0 |      0 |      0 |      9 |     21 |      8 |      2 |      2 |     53 |      0 |      0 |      2 |     15 |     11 |      2 |      1 |      8 |     50 |      0 |      0 |      1 |      7 |      5 |      0 |      0 |      1 |     36 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4060600 |     363 |    107 |    183 |     3 |    0 |     3 |    2 |    0 |     0 |    0 |     65 |    0 |    0 |    0 |    0 |    166 |    197 |      19 |      19 |      10 |       2 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        7 |        3 |        7 |       12 |        7 |        4 |       6 |        6 |        9 |        7 |       21 |        8 |        8 |       2 |       10 |       13 |       17 |       23 |       16 |        6 |       0 |       14 |       17 |       19 |       26 |        8 |       13 |       1 |        6 |        7 |        8 |        4 |        2 |        2 |       0 |       11 |        5 |        6 |        5 |        5 |        3 |       1 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |     11 |     12 |      7 |      1 |      8 |     68 |      0 |      0 |      0 |     25 |     35 |      7 |      7 |      8 |    101 |      0 |      0 |      3 |      8 |      6 |      0 |      3 |      1 |     44 |      0 |      0 |      0 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4060700 |     373 |    131 |    148 |    10 |    0 |     3 |    4 |    2 |     2 |    0 |     73 |    0 |    0 |    0 |    0 |    180 |    193 |      50 |      26 |      17 |       1 |      1 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |       2 |       1 |       2 |       0 |      6 |      4 |      0 |      0 |       10 |       14 |       10 |       12 |        2 |        7 |       3 |       12 |       16 |       13 |       12 |       11 |        6 |       3 |        9 |       11 |       26 |        5 |        9 |        7 |       2 |       14 |       16 |       20 |       15 |        7 |        6 |       1 |       11 |       11 |        8 |        4 |        4 |        0 |       0 |       10 |       11 |        6 |        5 |        1 |        1 |       1 |        0 |        6 |        3 |        4 |        0 |        1 |       1 |        5 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     13 |     16 |      6 |      2 |      2 |     91 |      0 |      0 |      1 |     11 |     21 |      8 |      3 |      1 |    103 |      0 |      0 |      0 |      3 |      3 |      2 |      1 |      1 |     63 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 4060800 |     441 |    167 |    186 |     8 |    0 |     7 |    0 |    2 |     5 |    0 |     66 |    0 |    0 |    0 |    0 |    160 |    281 |      17 |      11 |       3 |       2 |      6 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |        0 |        0 |        3 |        3 |       20 |       35 |       1 |        0 |        0 |        1 |        7 |       17 |       77 |       3 |        1 |        0 |        1 |        4 |       12 |       38 |       0 |        3 |        1 |        1 |        6 |       30 |       89 |       0 |        1 |        1 |        2 |        4 |       10 |       12 |       0 |        2 |        1 |        0 |        5 |       12 |       16 |       0 |        1 |        0 |        1 |        1 |        2 |        7 |       0 |        0 |        0 |        0 |        1 |        3 |        6 |       0 |      0 |      2 |     21 |     21 |      9 |      5 |     10 |     99 |      0 |      0 |      0 |     28 |     22 |      2 |      6 |     12 |    116 |      0 |      0 |      0 |      7 |      6 |      4 |      5 |      1 |     43 |      0 |      0 |      2 |      0 |      7 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4060900 |     480 |    145 |    244 |     4 |    0 |     8 |    0 |    0 |     0 |    0 |     79 |    0 |    0 |    0 |    0 |    222 |    258 |      23 |      13 |       9 |       2 |      2 |      7 |      3 |      1 |      2 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      3 |      2 |      0 |        5 |        2 |       14 |       17 |        8 |       14 |       0 |        8 |        7 |       26 |       27 |        7 |       10 |       0 |        9 |       19 |       27 |       26 |       21 |       16 |       0 |        4 |       25 |       38 |       29 |       12 |       18 |       0 |        8 |        4 |        8 |       10 |        5 |        0 |       0 |        5 |        8 |       15 |       11 |        3 |        2 |       0 |        1 |        2 |        2 |        1 |        1 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      2 |     27 |     21 |     13 |      3 |     31 |     48 |      0 |      0 |      1 |     34 |     32 |     11 |      8 |     43 |    115 |      0 |      0 |      1 |     12 |     10 |      5 |      2 |      1 |     48 |      0 |      0 |      0 |      1 |      8 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4061000 |      79 |     33 |     26 |     3 |    0 |     1 |    3 |    1 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     40 |     39 |      21 |       6 |       6 |       4 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        5 |        6 |        0 |        0 |       1 |        1 |        6 |        2 |        3 |        1 |        2 |       2 |        1 |        0 |        5 |        3 |        2 |        1 |       2 |        1 |        1 |        2 |        4 |        0 |        2 |       2 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        2 |        1 |        1 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      2 |      3 |      9 |      3 |      1 |      0 |     15 |      0 |      0 |      0 |      2 |      4 |      2 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4061100 |     292 |     96 |    124 |     8 |    0 |     2 |    3 |    1 |     1 |    0 |     57 |    0 |    0 |    0 |    0 |     98 |    194 |      16 |      13 |       8 |       1 |      3 |      9 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        5 |        4 |        6 |        3 |        1 |        3 |       0 |       16 |       17 |       22 |       11 |        3 |        5 |       0 |        8 |       23 |       14 |        6 |        1 |        2 |       0 |       17 |       27 |       11 |        7 |        3 |        5 |       0 |        2 |        8 |        5 |        2 |        1 |        0 |       0 |        7 |       17 |        7 |        6 |        1 |        1 |       0 |        2 |        0 |        0 |        1 |        0 |        1 |       0 |        2 |        4 |        5 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      5 |      2 |      1 |      0 |     82 |      0 |      0 |      0 |      6 |      1 |      0 |      1 |      0 |    116 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     53 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4061200 |      13 |      1 |      6 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |      3 |     10 |       0 |       1 |       0 |       1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4061300 |      54 |     17 |     27 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     28 |     26 |       5 |       0 |       2 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        3 |        0 |        1 |       0 |        0 |        3 |        2 |        3 |        1 |        1 |       0 |        2 |        4 |        6 |        2 |        1 |        1 |       0 |        0 |        2 |        6 |        3 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        3 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      3 |      0 |      1 |      1 |      9 |      0 |      0 |      0 |      5 |      3 |      2 |      1 |      4 |     12 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4061500 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4061600 |     264 |     92 |    114 |     7 |    0 |     2 |    1 |    1 |     1 |    0 |     46 |    0 |    0 |    0 |    0 |    127 |    137 |      31 |      14 |       5 |       0 |      2 |      7 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        1 |       14 |        8 |        9 |        6 |        3 |       0 |        5 |       11 |       11 |       18 |        5 |        1 |       0 |        3 |       14 |       12 |       13 |        9 |        4 |       0 |        5 |       16 |       22 |        8 |        5 |        3 |       0 |        5 |        6 |        2 |        8 |        2 |        2 |       0 |        3 |        3 |        7 |        1 |        5 |        2 |       0 |        0 |        4 |        2 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        2 |        1 |        0 |       0 |      0 |      1 |     22 |     19 |      5 |      2 |      1 |     42 |      0 |      0 |      2 |     12 |     17 |      3 |      4 |      3 |     73 |      0 |      0 |      2 |      7 |      2 |      3 |      2 |      0 |     30 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 4061900 |      74 |     28 |     32 |     0 |    0 |     0 |    1 |    1 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     38 |     36 |       9 |       4 |       4 |       0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        1 |        1 |        5 |        1 |       1 |        1 |        0 |        2 |        5 |        3 |        1 |       3 |        3 |        2 |        4 |        3 |        1 |        4 |       1 |        1 |        0 |        4 |        2 |        2 |        2 |       3 |        1 |        1 |        2 |        0 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        3 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      2 |      0 |      1 |     19 |      0 |      0 |      0 |      1 |      5 |      6 |      2 |      0 |     18 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4062000 |     702 |    238 |    286 |    16 |    0 |     8 |   14 |    0 |     3 |    0 |    137 |    0 |    0 |    0 |    0 |    321 |    381 |      72 |      49 |      36 |       6 |      4 |      7 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      2 |      3 |      1 |      0 |       0 |       2 |       1 |       0 |      0 |      2 |      4 |      0 |       11 |       10 |       18 |       26 |       13 |       18 |       5 |       12 |       19 |       29 |       27 |       17 |       25 |       8 |       12 |       27 |       30 |       37 |       17 |       17 |       3 |       19 |       26 |       24 |       28 |       16 |       21 |       9 |        8 |       21 |       10 |       12 |        2 |        4 |       2 |       18 |       19 |       24 |        9 |        5 |        2 |       1 |        3 |        4 |        3 |        6 |        1 |        1 |       0 |        5 |        8 |        5 |        3 |        0 |        2 |       0 |      0 |      0 |     23 |     42 |     10 |      4 |     16 |    143 |      0 |      0 |      1 |     33 |     44 |     14 |      6 |      7 |    181 |      0 |      0 |      3 |     22 |      6 |      4 |      2 |      3 |     97 |      0 |      0 |      0 |      8 |      9 |      1 |      0 |      1 |     22 |      0 |     37 | s03      | R    |
| 4062100 |     588 |    186 |    254 |    12 |    0 |    11 |    5 |    1 |     9 |    0 |    110 |    0 |    0 |    0 |    0 |    270 |    318 |      40 |      29 |      20 |       2 |     10 |     10 |      1 |      1 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      2 |      1 |      1 |      3 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        3 |       13 |       16 |       15 |        7 |        9 |      11 |        3 |       23 |       16 |       22 |       11 |       25 |      12 |       11 |       25 |       33 |       21 |       14 |       24 |       4 |       11 |       21 |       26 |       20 |       14 |       21 |       9 |        9 |       10 |       13 |       10 |        3 |        4 |       0 |       11 |       12 |       16 |       11 |        4 |        7 |       0 |        2 |        6 |        2 |        1 |        0 |        4 |       0 |        2 |        9 |        3 |        2 |        4 |        3 |       0 |      0 |      1 |     15 |     29 |      4 |      9 |      4 |    124 |      0 |      0 |      2 |     25 |     32 |     13 |      6 |     17 |    159 |      0 |      0 |      0 |     19 |     10 |      0 |      5 |      4 |     72 |      0 |      0 |      1 |      6 |      9 |      2 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4062200 |      38 |     15 |     15 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     17 |     21 |       3 |       1 |       2 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        3 |        2 |        0 |        0 |       0 |        0 |        2 |        2 |        1 |        1 |        1 |       0 |        0 |        0 |        4 |        2 |        1 |        0 |       0 |        2 |        2 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     14 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4062300 |     542 |    195 |    242 |    11 |    0 |     2 |    2 |    3 |     2 |    0 |     85 |    0 |    0 |    0 |    0 |    247 |    295 |      45 |      42 |      24 |       4 |      8 |     11 |      4 |      1 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      1 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      3 |      2 |      0 |      1 |        4 |       21 |       12 |       15 |        5 |       25 |       1 |        8 |       14 |       20 |       22 |       16 |       31 |       1 |        6 |       30 |       19 |       22 |        3 |       32 |       2 |        6 |       16 |       23 |       15 |       10 |       54 |       4 |        9 |       12 |        8 |        5 |        0 |        8 |       0 |        5 |       19 |        9 |        3 |        4 |        3 |       0 |        1 |        3 |        3 |        0 |        0 |        1 |       0 |        2 |        3 |        5 |        2 |        0 |        0 |       0 |      0 |      3 |     24 |     29 |      3 |      0 |      2 |    134 |      0 |      0 |      8 |     22 |     17 |      3 |      6 |      3 |    183 |      0 |      0 |      0 |     12 |      5 |      0 |      0 |      2 |     66 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4062700 |     379 |    125 |    190 |     8 |    0 |     5 |    1 |    0 |     1 |    0 |     49 |    0 |    0 |    0 |    0 |    162 |    217 |       7 |       1 |       5 |       1 |     10 |     10 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      3 |      3 |        0 |        2 |        5 |        7 |        8 |       29 |       1 |        4 |        4 |        6 |       11 |        6 |       42 |       0 |        4 |        5 |       10 |       10 |        8 |       46 |       0 |        2 |        2 |        7 |        8 |       11 |       77 |       0 |        4 |        1 |        6 |        2 |        4 |        4 |       0 |        1 |        2 |        5 |        4 |        2 |       14 |       0 |        0 |        0 |        1 |        0 |        2 |        3 |       0 |        1 |        1 |        2 |        1 |        2 |        2 |       0 |      0 |      1 |     15 |     13 |      6 |     18 |     17 |     55 |      0 |      0 |      0 |     17 |     32 |     11 |     11 |     26 |     93 |      0 |      0 |      0 |      3 |      9 |      6 |      0 |      3 |     28 |      0 |      0 |      0 |      1 |      7 |      0 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 4062800 |     323 |    128 |    157 |     5 |    0 |     1 |    0 |    0 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |    140 |    183 |       3 |       1 |       1 |       0 |     36 |     13 |     11 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |       42 |       0 |        0 |        0 |        0 |        2 |        6 |       76 |       0 |        0 |        0 |        0 |        0 |        6 |       68 |       0 |        0 |        1 |        0 |        1 |       10 |       71 |       0 |        0 |        0 |        0 |        0 |        0 |       18 |       0 |        0 |        0 |        0 |        0 |        2 |       12 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |     25 |     32 |     23 |     15 |      0 |     33 |      0 |      0 |      0 |     48 |     21 |     19 |     28 |      0 |     41 |      0 |      0 |      0 |      9 |      3 |      4 |      7 |      0 |      9 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4062900 |     422 |    161 |    214 |     1 |    0 |     1 |    2 |    0 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |    180 |    242 |       1 |       2 |       0 |       0 |     60 |     12 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        3 |       60 |       0 |        0 |        0 |        0 |        0 |        9 |       87 |       1 |        0 |        0 |        3 |        0 |        3 |       91 |       0 |        0 |        0 |        0 |        1 |       14 |      102 |       0 |        0 |        0 |        0 |        0 |        2 |       14 |       0 |        0 |        0 |        1 |        0 |        7 |       19 |       0 |        0 |        0 |        0 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |     11 |     20 |     20 |     44 |     28 |     37 |      0 |      0 |      1 |     12 |     34 |     21 |     45 |     43 |     58 |      0 |      0 |      0 |      8 |      5 |      3 |      5 |      1 |     21 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4063000 |     337 |    124 |    175 |     9 |    0 |     4 |    0 |    0 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |    127 |    210 |      16 |       6 |       2 |       1 |      4 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        4 |        6 |       31 |       2 |        0 |        0 |        2 |        2 |       15 |       60 |       1 |        1 |        0 |        0 |        1 |       12 |       50 |       1 |        1 |        1 |        1 |        4 |       20 |       79 |       4 |        0 |        0 |        2 |        0 |        4 |        5 |       0 |        0 |        0 |        0 |        1 |        2 |       10 |       0 |        1 |        0 |        0 |        1 |        2 |        3 |       0 |        1 |        0 |        0 |        0 |        2 |        4 |       0 |      0 |      3 |     11 |     21 |      8 |      5 |      6 |     70 |      0 |      0 |      1 |     15 |     32 |      3 |     11 |      9 |    104 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4063100 |     702 |    196 |    374 |    17 |    0 |     5 |    2 |    1 |     6 |    0 |    101 |    0 |    0 |    0 |    0 |    334 |    368 |      11 |      21 |       1 |       5 |     23 |     19 |      3 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        8 |        3 |       17 |       23 |       18 |       16 |       0 |       11 |        8 |       23 |       36 |       15 |       18 |       0 |       25 |       17 |       44 |       59 |       27 |       20 |       0 |       17 |       22 |       39 |       54 |       25 |       25 |       0 |       13 |        3 |        5 |       12 |        3 |        6 |       0 |       13 |        9 |       10 |       20 |        3 |        4 |       0 |        4 |        1 |        4 |        4 |        0 |        2 |       0 |        2 |        4 |        2 |        6 |        1 |        1 |       0 |      0 |      0 |     23 |     42 |     17 |      4 |     11 |     99 |      0 |      0 |      1 |     37 |     68 |     15 |     12 |     17 |    224 |      0 |      0 |      0 |     16 |     13 |      1 |      1 |      1 |     69 |      0 |      0 |      0 |      5 |      6 |      1 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 4063200 |     217 |     58 |    127 |     2 |    0 |     3 |    0 |    0 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |     80 |    137 |       2 |       1 |       0 |       0 |      4 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |       15 |       1 |        0 |        0 |        0 |        2 |        4 |       33 |       2 |        0 |        0 |        1 |        0 |        3 |       39 |       2 |        0 |        0 |        0 |        2 |        8 |       69 |       3 |        0 |        0 |        0 |        2 |        4 |        9 |       0 |        0 |        0 |        1 |        2 |        3 |        6 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      5 |     13 |      1 |      3 |      3 |     33 |      0 |      0 |      2 |     12 |     16 |      8 |      9 |      3 |     77 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |     23 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4063300 |     188 |     57 |     88 |     3 |    0 |     1 |    0 |    0 |     3 |    0 |     36 |    0 |    0 |    0 |    0 |     87 |    101 |       5 |       7 |       2 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        3 |        9 |        3 |        4 |       0 |        1 |        7 |        8 |        9 |        4 |        6 |       0 |        1 |        6 |       11 |       12 |        5 |        5 |       1 |        4 |        4 |       12 |       20 |        4 |        3 |       0 |        2 |        4 |        3 |       10 |        1 |        0 |       0 |        6 |        1 |        2 |        4 |        1 |        2 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      5 |     10 |      1 |      2 |      5 |     34 |      0 |      0 |      0 |     11 |     19 |      3 |      6 |      5 |     44 |      0 |      0 |      0 |      6 |      5 |      1 |      2 |      1 |     21 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4063400 |     457 |    162 |    258 |     3 |    0 |     3 |    0 |    0 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |    196 |    261 |       6 |       2 |       0 |       1 |     39 |     17 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        2 |       59 |       0 |        0 |        0 |        0 |        0 |        4 |       94 |       1 |        0 |        0 |        0 |        0 |        3 |      113 |       0 |        0 |        0 |        0 |        0 |       10 |      131 |       1 |        0 |        0 |        0 |        0 |        1 |       12 |       0 |        0 |        0 |        0 |        1 |        4 |       12 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        3 |       0 |      0 |      0 |     24 |     37 |      4 |     11 |     12 |     74 |      0 |      0 |      0 |     34 |     42 |     11 |     16 |     24 |    131 |      0 |      0 |      0 |      4 |      3 |      3 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 4063500 |     680 |    236 |    370 |     9 |    0 |     8 |    2 |    0 |     2 |    0 |     53 |    0 |    0 |    0 |    0 |    290 |    390 |       5 |       5 |       1 |       0 |     59 |     17 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        1 |        0 |        5 |       92 |       0 |        0 |        0 |        1 |        1 |       13 |      123 |       0 |        0 |        0 |        0 |        1 |        9 |      149 |       0 |        0 |        0 |        0 |        1 |       18 |      191 |       1 |        1 |        0 |        1 |        1 |        1 |       17 |       0 |        0 |        1 |        0 |        0 |        7 |       24 |       0 |        0 |        0 |        0 |        0 |        1 |       11 |       0 |        0 |        0 |        0 |        0 |        1 |        8 |       0 |      0 |      1 |     44 |     29 |     10 |     12 |     72 |     68 |      0 |      0 |      1 |    105 |     30 |     16 |      7 |     82 |    129 |      0 |      0 |      0 |     19 |      4 |      0 |      0 |      4 |     26 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 4063600 |     542 |    189 |    285 |     6 |    0 |     3 |    1 |    0 |     1 |    0 |     57 |    0 |    0 |    0 |    0 |    230 |    312 |       4 |       3 |       0 |       0 |     47 |     27 |     11 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        2 |       70 |       0 |        0 |        0 |        0 |        1 |       10 |      104 |       1 |        0 |        0 |        0 |        1 |        5 |      121 |       1 |        0 |        0 |        0 |        0 |       10 |      146 |       1 |        0 |        0 |        0 |        0 |        1 |       22 |       0 |        1 |        0 |        1 |        0 |        4 |       28 |       0 |        0 |        0 |        0 |        1 |        0 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        5 |       0 |      0 |      1 |     20 |     17 |      9 |      9 |     24 |    109 |      0 |      0 |      0 |     27 |     51 |     10 |     16 |     27 |    154 |      0 |      0 |      0 |     11 |      8 |      1 |      0 |      6 |     31 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4063700 |     782 |    183 |    431 |    18 |    0 |     3 |    4 |    0 |     2 |    0 |    141 |    0 |    0 |    0 |    0 |    391 |    391 |      16 |      15 |       8 |       2 |     20 |     22 |      6 |      2 |      0 |      0 |      1 |      0 |      2 |      3 |      1 |      0 |      2 |      0 |     13 |      1 |      0 |      3 |      0 |      0 |       0 |       4 |       4 |       0 |      1 |      4 |      0 |      0 |        1 |        4 |       11 |       23 |       16 |       28 |       1 |        4 |        5 |       15 |       26 |       25 |       24 |       0 |       17 |        8 |       46 |       55 |       37 |       60 |       0 |       11 |       11 |       47 |       57 |       30 |       52 |       0 |        5 |        6 |       16 |       16 |       11 |       17 |       0 |       11 |        4 |       21 |       19 |        7 |        8 |       0 |        4 |        1 |        3 |        2 |        1 |        2 |       0 |        1 |        1 |        6 |        3 |        0 |        3 |       0 |      0 |      0 |     38 |     49 |     11 |     11 |      6 |     68 |      0 |      0 |      7 |     61 |    141 |     22 |     35 |      7 |    158 |      0 |      0 |      1 |     35 |     29 |      5 |      6 |      3 |     62 |      0 |      0 |      1 |      2 |      9 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4063800 |     296 |     62 |    191 |     3 |    0 |     3 |    4 |    1 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |    135 |    161 |       6 |      14 |       3 |       0 |      9 |     14 |      3 |      0 |      1 |      0 |      0 |      1 |      1 |      3 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      1 |      0 |        1 |        1 |        8 |        4 |        5 |        8 |       0 |        3 |        2 |       10 |        6 |        7 |        7 |       0 |        2 |        4 |       20 |       15 |       13 |       31 |       0 |        3 |        8 |       29 |       15 |       19 |       31 |       1 |        3 |        2 |        3 |        5 |        0 |        3 |       0 |        2 |        2 |        3 |        3 |        2 |        4 |       0 |        1 |        1 |        2 |        1 |        0 |        2 |       0 |        1 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     40 |      1 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |    116 |      2 |      2 |      0 |      0 |     71 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4063900 |     261 |     76 |    108 |     8 |    0 |     1 |    1 |    0 |     1 |    0 |     66 |    0 |    0 |    0 |    0 |    120 |    141 |      11 |       8 |       7 |       1 |      6 |      6 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        3 |        4 |       10 |        3 |        3 |       1 |        4 |        6 |       18 |       11 |        6 |        6 |       0 |        3 |       13 |       18 |       12 |        6 |        4 |       0 |        4 |        9 |       13 |       17 |        7 |        2 |       0 |        5 |        8 |        7 |        6 |        6 |        1 |       0 |        4 |       10 |        6 |        4 |        4 |        5 |       0 |        2 |        0 |        1 |        3 |        0 |        0 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     11 |     10 |      1 |      8 |      1 |     45 |      0 |      0 |      0 |      9 |     14 |      7 |      9 |      4 |     65 |      0 |      0 |      1 |      8 |      5 |      2 |      4 |      1 |     45 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4064000 |     544 |    136 |    310 |     8 |    0 |     4 |    1 |    0 |     5 |    0 |     80 |    0 |    0 |    0 |    0 |    251 |    293 |      17 |      18 |       6 |       2 |      7 |     16 |      4 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |       10 |        8 |        3 |        9 |       23 |       0 |        4 |       11 |       13 |        8 |       15 |       27 |       3 |        7 |       19 |       23 |       21 |       18 |       50 |       3 |       17 |       14 |       16 |       23 |       28 |       64 |       7 |        8 |       10 |        2 |        8 |        6 |        8 |       0 |        4 |       10 |        3 |        5 |        6 |       10 |       0 |        1 |        6 |        1 |        1 |        2 |        2 |       0 |        1 |        2 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |     24 |     13 |      6 |      1 |      7 |     83 |      0 |      0 |      3 |     27 |     39 |      9 |      9 |      9 |    214 |      0 |      0 |      1 |     13 |      9 |      4 |      1 |      2 |     50 |      0 |      0 |      0 |      3 |      2 |      2 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4064100 |     581 |    156 |    333 |    15 |    0 |     1 |    3 |    0 |     4 |    0 |     69 |    0 |    0 |    0 |    0 |    257 |    324 |      14 |      21 |       9 |       1 |     17 |     13 |      5 |      1 |      0 |      0 |      1 |      0 |      4 |      2 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       9 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        3 |        7 |       13 |        8 |       31 |       0 |        7 |        7 |       10 |       13 |       11 |       44 |       1 |        5 |        7 |       19 |       27 |       20 |       68 |       1 |       10 |       13 |       23 |       36 |       28 |       75 |       1 |        1 |        3 |        6 |        6 |        7 |        9 |       0 |        3 |        5 |        3 |        6 |        8 |       12 |       0 |        3 |        3 |        2 |        2 |        2 |        3 |       0 |        1 |        1 |        1 |        1 |        0 |        4 |       0 |      0 |      2 |     20 |     46 |     13 |      8 |      9 |     58 |      0 |      0 |      4 |     33 |     77 |     30 |     15 |     32 |    142 |      0 |      0 |      1 |      6 |     10 |      2 |      2 |      6 |     42 |      0 |      0 |      0 |      3 |      4 |      0 |      2 |      0 |     14 |      0 |     37 | s03      | R    |
| 4064200 |     749 |    257 |    337 |    18 |    0 |     9 |    3 |    1 |     5 |    0 |    119 |    0 |    0 |    0 |    0 |    273 |    476 |      25 |      13 |       9 |       3 |      9 |     13 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      2 |      1 |        1 |        3 |        3 |        4 |       11 |       53 |       5 |        1 |        4 |        6 |        7 |       46 |      103 |      10 |        2 |        7 |        5 |       10 |       26 |       70 |       6 |       10 |        7 |        0 |        7 |       46 |      128 |      13 |        3 |        6 |        2 |        4 |        6 |       29 |       0 |        5 |        4 |        1 |        3 |       27 |       29 |       0 |        1 |        2 |        0 |        2 |        3 |        9 |       0 |        1 |        0 |        1 |        0 |        4 |       13 |       0 |      0 |      1 |     29 |     31 |     20 |      5 |      7 |    164 |      0 |      0 |      3 |     36 |     49 |      8 |     17 |     10 |    214 |      0 |      0 |      2 |     25 |     14 |      6 |      2 |      0 |     70 |      0 |      0 |      1 |      5 |      7 |      4 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 4064300 |      46 |     17 |     18 |     0 |    0 |     2 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     22 |     24 |       1 |       0 |       1 |       0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        3 |        0 |        1 |       0 |        1 |        0 |        3 |        3 |        2 |        1 |       0 |        1 |        0 |        0 |        4 |        1 |        2 |       0 |        3 |        1 |        2 |        2 |        1 |        1 |       0 |        1 |        4 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |      3 |      1 |      2 |      1 |      8 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      2 |     12 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4064400 |     540 |    141 |    271 |    15 |    0 |     4 |    2 |    1 |     1 |    0 |    105 |    0 |    0 |    0 |    0 |    254 |    286 |      15 |      12 |      12 |       1 |      2 |     11 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |      2 |      0 |       1 |       1 |       0 |       1 |      1 |      2 |      0 |      1 |        2 |        3 |       12 |       17 |        6 |       10 |       0 |        2 |        9 |       24 |       23 |       18 |       15 |       0 |        9 |       16 |       43 |       35 |       16 |       19 |       1 |        8 |       22 |       36 |       28 |       18 |       19 |       1 |        6 |       15 |       11 |        6 |        9 |        4 |       0 |        6 |       11 |       13 |       12 |        8 |        4 |       0 |        2 |        4 |        1 |        5 |        0 |        2 |       0 |        1 |        2 |        1 |        1 |        2 |        2 |       0 |      0 |      0 |     23 |     20 |      9 |     21 |      5 |     63 |      0 |      0 |      3 |     30 |     41 |     16 |     21 |      7 |    153 |      0 |      0 |      3 |     17 |      6 |      8 |      1 |      3 |     67 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 4064500 |     282 |     56 |    162 |     3 |    0 |     2 |    2 |    0 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    143 |    139 |      11 |      13 |       2 |       3 |      1 |      8 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        0 |        6 |        7 |        4 |        8 |       1 |        1 |        0 |        4 |        7 |        2 |       11 |       0 |        2 |        4 |       17 |       12 |       17 |       20 |       1 |        6 |        5 |       19 |       18 |       13 |       20 |       8 |        4 |        1 |        4 |        5 |        8 |        8 |       1 |        1 |        2 |        4 |       10 |        6 |        0 |       1 |        4 |        1 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      5 |      5 |      2 |      4 |     32 |      0 |      0 |      0 |     15 |     31 |     11 |     14 |      9 |     82 |      0 |      0 |      1 |     11 |      5 |      3 |      1 |      0 |     34 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4064600 |     509 |     99 |    311 |     6 |    0 |     7 |    2 |    2 |     2 |    0 |     80 |    0 |    0 |    0 |    0 |    239 |    270 |      10 |      12 |       6 |       0 |     10 |     16 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        2 |        1 |        8 |        4 |       11 |       13 |       0 |        1 |        3 |        9 |       14 |       18 |       15 |       0 |        6 |        8 |       21 |       37 |       42 |       37 |       3 |        6 |        9 |       20 |       29 |       45 |       44 |       4 |        6 |        2 |        2 |       10 |       10 |        7 |       0 |        5 |        5 |        6 |        8 |       13 |        5 |       1 |        3 |        1 |        0 |        0 |        2 |        3 |       0 |        0 |        2 |        3 |        3 |        0 |        2 |       0 |      0 |      0 |     10 |     12 |      4 |      5 |      7 |     61 |      0 |      0 |      1 |     26 |     52 |     10 |     17 |     28 |    177 |      0 |      0 |      0 |     10 |      9 |      3 |      1 |      3 |     54 |      0 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4064700 |     430 |    133 |    191 |    18 |    0 |     6 |    4 |    0 |     2 |    0 |     76 |    0 |    0 |    0 |    0 |    213 |    217 |      34 |      27 |      13 |       6 |      5 |      8 |      3 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      3 |      2 |      0 |      0 |      1 |       1 |       4 |       2 |       0 |      1 |      5 |      1 |      0 |        3 |       10 |       15 |       11 |       12 |        8 |       1 |        9 |        8 |       18 |       14 |       17 |        7 |       0 |        7 |       20 |       17 |       14 |       21 |       15 |       1 |        8 |       19 |       21 |       25 |       10 |       12 |       1 |        5 |       11 |       11 |       10 |        6 |        3 |       0 |        9 |        6 |        3 |        7 |        3 |        2 |       0 |        3 |        2 |        1 |        3 |        3 |        0 |       0 |        2 |        5 |        3 |        6 |        2 |        0 |       0 |      0 |      3 |     21 |     31 |      2 |      3 |      1 |     72 |      0 |      0 |      2 |     17 |     23 |      9 |      7 |      8 |    125 |      0 |      0 |      1 |      7 |      9 |      6 |      2 |      1 |     50 |      0 |      0 |      0 |      4 |      6 |      3 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4064800 |     183 |     49 |     82 |     3 |    0 |     5 |    0 |    0 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |     82 |    101 |       7 |       5 |       6 |       1 |      1 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       3 |       0 |      1 |      2 |      0 |      0 |        5 |        7 |        3 |        3 |        0 |        0 |       1 |        6 |        9 |        4 |        9 |        0 |        1 |       1 |        7 |       12 |       13 |        5 |        4 |        0 |       0 |       11 |       10 |       10 |        6 |        4 |        0 |       0 |        4 |        7 |        2 |        1 |        4 |        1 |       0 |        8 |       12 |        2 |        0 |        1 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |        2 |        2 |        1 |        0 |        0 |        1 |       0 |      0 |      1 |      3 |      2 |      2 |      0 |      1 |     40 |      0 |      0 |      0 |      7 |      6 |      0 |      1 |      0 |     68 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      0 |     38 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4064900 |     126 |     38 |     50 |     3 |    0 |     0 |    3 |    1 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |     55 |     71 |       6 |       6 |       3 |       0 |      3 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        1 |        3 |        1 |        3 |        1 |        2 |       1 |        0 |        3 |       10 |        4 |        4 |        5 |       0 |        4 |        9 |        3 |        3 |        3 |        5 |       0 |        1 |        5 |        2 |        5 |        6 |        3 |       1 |        1 |        5 |        3 |        2 |        1 |        2 |       0 |        3 |        4 |        6 |        3 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        1 |        0 |        1 |        1 |       0 |      0 |      0 |      5 |      5 |      2 |      1 |      0 |     25 |      0 |      0 |      0 |      4 |      5 |      3 |      2 |      0 |     36 |      0 |      0 |      1 |      3 |      1 |      0 |      3 |      0 |     22 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4065000 |     845 |    254 |    397 |    21 |    0 |     5 |    9 |    4 |     7 |    0 |    148 |    0 |    0 |    0 |    0 |    417 |    428 |      25 |      16 |      17 |       0 |     14 |     12 |      6 |      2 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      2 |      4 |      1 |      0 |      0 |      1 |      0 |       2 |       0 |       3 |       0 |      3 |      6 |      1 |      2 |        4 |       12 |       17 |       29 |       19 |       16 |       7 |        8 |        9 |       31 |       37 |       24 |       23 |      18 |       11 |       19 |       32 |       56 |       42 |       37 |      12 |        9 |       23 |       32 |       36 |       36 |       40 |      12 |       10 |        9 |       14 |       20 |       13 |       10 |       2 |       11 |       11 |       11 |       18 |       14 |        4 |       1 |        6 |        4 |        6 |        5 |        4 |        1 |       0 |        2 |        3 |        4 |        6 |        2 |        3 |       0 |      0 |      3 |     25 |     33 |     16 |      8 |     14 |    155 |      0 |      0 |      3 |     35 |     60 |     11 |     23 |     26 |    239 |      0 |      0 |      2 |     24 |     22 |      2 |      5 |      4 |     89 |      0 |      0 |      0 |      7 |     17 |      2 |      1 |      1 |     18 |      0 |     37 | s03      | R    |
| 4065100 |     384 |    112 |    200 |     4 |    0 |     3 |    1 |    0 |     2 |    0 |     62 |    0 |    0 |    0 |    0 |    179 |    205 |      13 |       9 |       4 |       0 |      5 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        4 |        9 |       11 |       12 |       11 |       3 |        4 |        7 |       10 |       11 |       16 |       11 |       2 |        6 |        6 |       14 |       17 |       19 |       19 |       9 |        8 |        3 |       15 |       26 |       18 |       30 |      10 |        4 |        4 |        8 |        7 |        5 |        3 |       3 |        1 |        6 |        4 |        6 |        7 |        2 |       2 |        2 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        2 |        2 |        0 |       0 |      0 |      0 |     12 |     18 |      6 |      3 |      5 |     68 |      0 |      0 |      1 |     12 |     29 |      8 |     14 |      8 |    128 |      0 |      0 |      0 |      7 |      5 |      1 |      3 |      4 |     42 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4065200 |     629 |    202 |    251 |    20 |    0 |     0 |   10 |    1 |     6 |    0 |    139 |    0 |    0 |    0 |    0 |    279 |    350 |      30 |      21 |      20 |       4 |      8 |      3 |      3 |      1 |      1 |      0 |      1 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        7 |       16 |       23 |       18 |        4 |       11 |       0 |        9 |       25 |       34 |       22 |       16 |       17 |       0 |       16 |       28 |       27 |       25 |       23 |        9 |       0 |       15 |       28 |       24 |       18 |       17 |       21 |       0 |        9 |       20 |        7 |        7 |        4 |        4 |       1 |       18 |       27 |       16 |       11 |        8 |        6 |       1 |        3 |        6 |        6 |        3 |        1 |        1 |       0 |        2 |        8 |        5 |        0 |        1 |        1 |       0 |      0 |      4 |     26 |     26 |      5 |      6 |      6 |    129 |      0 |      0 |      3 |     39 |     25 |      7 |      8 |      7 |    162 |      0 |      0 |      0 |     24 |     13 |      1 |      0 |      2 |     99 |      0 |      0 |      0 |      8 |      3 |      0 |      1 |      0 |     25 |      0 |     37 | s03      | R    |
| 4065300 |     134 |     32 |     74 |     1 |    0 |     1 |    2 |    0 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     64 |     70 |       2 |       4 |       2 |       0 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        0 |        3 |        4 |        0 |        2 |       0 |        1 |        1 |        5 |        7 |        0 |        8 |       0 |        4 |        1 |       15 |        8 |        6 |        3 |       0 |        1 |        1 |       22 |        4 |        5 |        4 |       0 |        0 |        1 |        8 |        2 |        1 |        0 |       0 |        3 |        0 |        4 |        3 |        1 |        0 |       0 |        1 |        0 |        3 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |     19 |      0 |      0 |      0 |     10 |      0 |      0 |      1 |     16 |     31 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4065400 |     463 |    131 |    216 |    10 |    0 |     2 |    4 |    0 |     7 |    0 |     93 |    0 |    0 |    0 |    0 |    225 |    238 |      19 |      16 |       6 |       0 |      6 |     14 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 |      2 |      6 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      3 |      2 |      3 |      1 |        3 |        3 |       15 |       19 |       10 |        9 |       0 |        3 |        9 |       21 |       19 |        8 |       12 |       0 |        9 |       10 |       27 |       33 |       14 |       15 |       0 |        6 |       11 |       28 |       37 |       14 |       12 |       0 |        7 |        6 |       12 |       14 |        4 |        3 |       0 |       12 |        5 |        8 |       13 |        6 |        3 |       0 |        4 |        2 |        2 |        3 |        1 |        0 |       0 |        2 |        2 |        3 |        2 |        0 |        2 |       0 |      0 |      0 |     18 |     24 |     11 |      5 |     12 |     61 |      0 |      0 |      0 |     22 |     40 |      8 |      9 |      8 |    129 |      0 |      0 |      0 |     16 |     15 |      5 |      0 |      2 |     55 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 4065500 |     159 |     45 |     79 |     6 |    0 |     1 |    0 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     79 |     80 |       5 |       6 |       1 |       0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        1 |        0 |        3 |        8 |        1 |       10 |       0 |        1 |        0 |        4 |        4 |        2 |       11 |       0 |        4 |        1 |        6 |       14 |        6 |       11 |       1 |        3 |        0 |        5 |       13 |        7 |        7 |       1 |        0 |        1 |        2 |        4 |        1 |        1 |       0 |        3 |        4 |        3 |        5 |        2 |        2 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |      7 |     18 |      9 |      1 |      0 |     10 |      0 |      0 |      0 |      8 |     27 |     17 |      3 |      0 |     24 |      0 |      0 |      0 |      4 |      6 |      4 |      0 |      0 |     14 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4065600 |     401 |    130 |    183 |    19 |    0 |     2 |    1 |    1 |     0 |    0 |     65 |    0 |    0 |    0 |    0 |    196 |    205 |      29 |       6 |       6 |       3 |      4 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |      1 |      2 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        7 |        3 |       11 |        8 |        8 |       22 |       1 |        5 |        1 |       13 |       17 |        8 |       25 |       1 |        5 |       11 |       13 |       25 |       15 |       23 |       0 |        7 |       10 |       20 |       17 |       11 |       25 |       1 |        5 |       10 |        5 |        7 |        3 |        2 |       0 |        2 |        5 |       10 |        6 |        7 |        3 |       0 |        2 |        1 |        0 |        3 |        2 |        4 |       0 |        1 |        2 |        3 |        1 |        1 |        3 |       0 |      0 |      0 |     25 |     28 |      7 |      8 |     10 |     52 |      0 |      0 |      1 |     28 |     33 |      9 |     10 |     10 |     92 |      0 |      0 |      0 |     10 |      6 |      2 |      0 |      7 |     40 |      0 |      0 |      2 |      2 |      4 |      3 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 4065700 |     213 |     69 |    100 |     5 |    0 |     1 |    2 |    0 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |     85 |    128 |       6 |       5 |       2 |       0 |      5 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        1 |        3 |        4 |        6 |       11 |       0 |        2 |        5 |        4 |        5 |        9 |       14 |       3 |        2 |        2 |       11 |        7 |        6 |       12 |       0 |        6 |        5 |       14 |        7 |        5 |       23 |       0 |        1 |        1 |        2 |        4 |        4 |        3 |       0 |        2 |        4 |        2 |        5 |        6 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        1 |        1 |        1 |       0 |      0 |      1 |      7 |     12 |      5 |      6 |      5 |     33 |      0 |      0 |      0 |     16 |     12 |      8 |      4 |      4 |     56 |      0 |      0 |      0 |      6 |      2 |      4 |      1 |      3 |     20 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 4065800 |     648 |    165 |    354 |     9 |    0 |     7 |    1 |    3 |     0 |    0 |    109 |    0 |    0 |    0 |    0 |    313 |    335 |      24 |      24 |       7 |       3 |      7 |      9 |      5 |      0 |      0 |      4 |      1 |      0 |      0 |      3 |      0 |      0 |      1 |      5 |      2 |      0 |      1 |      2 |      0 |      0 |       3 |       6 |       0 |       0 |      3 |      3 |      4 |      0 |        6 |        4 |       14 |       24 |        7 |       17 |       0 |        8 |        9 |       27 |       24 |       11 |       13 |       1 |       14 |       21 |       25 |       52 |       27 |       30 |       0 |       11 |       21 |       44 |       52 |       26 |       29 |       2 |        6 |        5 |       15 |       25 |       10 |        2 |       0 |        8 |        4 |       17 |        7 |        8 |        2 |       0 |        1 |        2 |        3 |        2 |        1 |        0 |       0 |        1 |        1 |        4 |        4 |        1 |        0 |       0 |      0 |      0 |     20 |     19 |     22 |      9 |     21 |     74 |      0 |      0 |      2 |     35 |     54 |     28 |     23 |     62 |    150 |      0 |      0 |      1 |     21 |     15 |      5 |      4 |     13 |     50 |      0 |      0 |      0 |      1 |      9 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4065900 |     332 |    102 |    150 |     8 |    0 |     0 |    2 |    2 |     4 |    0 |     64 |    0 |    0 |    0 |    0 |    143 |    189 |      11 |      12 |       3 |       2 |      6 |      6 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      2 |      0 |        1 |        9 |        8 |       10 |        6 |        6 |       0 |        6 |       16 |        9 |       18 |        9 |        4 |       0 |        4 |       23 |       14 |        7 |       10 |        7 |       1 |       10 |       25 |       19 |       13 |        9 |        8 |       0 |        2 |        7 |       13 |        4 |        1 |        2 |       0 |        7 |       11 |        7 |        5 |        1 |        4 |       0 |        1 |        1 |        2 |        2 |        2 |        0 |       0 |        1 |        4 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      9 |     11 |      7 |      4 |      0 |     71 |      0 |      0 |      0 |     11 |     15 |      9 |      3 |      0 |    112 |      0 |      0 |      1 |     12 |      3 |      2 |      2 |      0 |     44 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4066000 |     628 |    190 |    317 |     5 |    0 |     6 |    9 |    2 |     2 |    0 |     97 |    0 |    0 |    0 |    0 |    308 |    320 |      14 |      18 |       8 |       0 |     14 |     15 |      4 |      2 |      0 |      2 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      3 |      0 |        1 |        5 |       12 |       31 |        8 |       19 |       7 |        6 |        6 |       27 |       26 |       14 |       21 |       7 |       16 |        9 |       22 |       41 |       28 |       35 |       6 |       11 |       10 |       24 |       40 |       24 |       44 |       7 |       10 |        8 |        7 |       10 |       10 |        6 |       0 |        8 |        5 |        6 |       13 |       10 |        4 |       0 |        2 |        4 |        3 |        3 |        2 |        3 |       0 |        1 |        1 |        0 |        2 |        2 |        1 |       0 |      0 |      0 |     19 |     33 |     11 |      6 |     11 |    110 |      0 |      0 |      1 |     46 |     48 |      8 |     18 |     11 |    185 |      0 |      0 |      0 |     11 |     11 |      4 |      3 |      2 |     66 |      0 |      0 |      0 |      2 |      4 |      1 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 4066100 |     436 |    145 |    204 |    10 |    0 |     3 |    6 |    2 |     2 |    0 |     64 |    0 |    0 |    0 |    0 |    196 |    240 |      15 |      14 |       5 |       3 |      4 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        3 |        3 |        8 |       16 |        8 |       12 |       4 |        4 |       14 |       14 |       17 |       15 |       16 |      11 |        6 |       11 |       19 |       17 |       20 |       19 |       9 |        7 |        9 |       19 |       18 |       21 |       23 |       6 |        4 |        9 |        6 |        5 |        4 |        3 |       0 |        5 |        7 |        4 |        9 |        6 |        1 |       1 |        2 |        3 |        2 |        1 |        2 |        0 |       0 |        2 |        4 |        3 |        3 |        1 |        0 |       0 |      0 |      2 |     20 |     13 |      8 |      5 |      7 |     90 |      0 |      0 |      0 |     26 |     23 |     18 |     10 |      5 |    122 |      0 |      0 |      1 |      8 |     10 |      2 |      0 |      0 |     43 |      0 |      0 |      0 |      2 |      4 |      2 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 4066200 |       7 |      3 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4066300 |     773 |    214 |    367 |    11 |    0 |    11 |    8 |    2 |     4 |    0 |    156 |    0 |    0 |    0 |    0 |    337 |    436 |      21 |      41 |      14 |       3 |     13 |     12 |      5 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       1 |       1 |       0 |      4 |      7 |      1 |      0 |        9 |        8 |       23 |       23 |        8 |       10 |       0 |       10 |       16 |       35 |       30 |       21 |       21 |       0 |       15 |       27 |       44 |       44 |       17 |       23 |       0 |       24 |       27 |       48 |       44 |       23 |       31 |       0 |        9 |       14 |       23 |       12 |        4 |        6 |       1 |       14 |       17 |       30 |       15 |        7 |        4 |       0 |        2 |        4 |        3 |        5 |        1 |        2 |       0 |        0 |        5 |        8 |        2 |        3 |        1 |       0 |      0 |      2 |     28 |     31 |      9 |     14 |     12 |    118 |      0 |      0 |      1 |     49 |     47 |     26 |     15 |     29 |    200 |      0 |      0 |      2 |     19 |     23 |      7 |      4 |      2 |     99 |      0 |      0 |      0 |      8 |      9 |      2 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4066400 |      27 |      4 |     20 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      8 |     19 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        7 |       0 |        0 |        0 |        0 |        0 |        0 |       12 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4066500 |      30 |     14 |      7 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     15 |     15 |       8 |       4 |       4 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        3 |        0 |        1 |        2 |        0 |       0 |        0 |        3 |        2 |        1 |        0 |        1 |       0 |        1 |        3 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4066600 |     227 |     91 |     86 |     8 |    0 |     0 |    2 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |    100 |    127 |      37 |      20 |       8 |       4 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        6 |        9 |        7 |        5 |        5 |       1 |        6 |        7 |        9 |       15 |       12 |        7 |       2 |        3 |        7 |        9 |       14 |        3 |        2 |       6 |        5 |        7 |       11 |       11 |        4 |        1 |       3 |        2 |        4 |        2 |        3 |        2 |        2 |       2 |        3 |        7 |        4 |        5 |        2 |        1 |       0 |        1 |        0 |        1 |        2 |        1 |        1 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     18 |     20 |      7 |      2 |      1 |     43 |      0 |      0 |      0 |      9 |     12 |      2 |      1 |      2 |     60 |      0 |      0 |      2 |      9 |      2 |      3 |      0 |      1 |     22 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4066700 |      22 |      4 |      9 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     14 |      8 |       1 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       1 |        1 |        1 |        0 |        2 |        0 |        0 |       1 |        4 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4067000 |     619 |    201 |    275 |    15 |    0 |     6 |   10 |    0 |     4 |    0 |    108 |    0 |    0 |    0 |    0 |    287 |    332 |      27 |      11 |      13 |       3 |     12 |      9 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |        8 |       12 |       21 |       11 |       21 |       9 |        2 |       16 |       22 |       19 |       17 |       23 |      14 |        8 |       12 |       29 |       26 |       18 |       27 |      13 |        6 |       18 |       22 |       35 |       18 |       35 |       8 |        8 |        4 |       14 |       11 |        9 |        3 |       0 |       12 |        5 |       13 |       11 |       12 |        5 |       1 |        1 |        3 |        6 |        5 |        0 |        2 |       0 |        5 |        3 |        7 |        1 |        0 |        2 |       0 |      0 |      3 |     24 |     26 |     11 |     11 |      7 |    119 |      0 |      0 |      2 |     23 |     42 |     18 |     12 |     12 |    166 |      0 |      0 |      2 |     21 |      8 |      4 |      1 |      6 |     66 |      0 |      0 |      0 |      7 |      7 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 4068000 |     605 |    231 |    220 |    23 |    0 |     8 |    6 |    1 |     9 |    0 |    107 |    0 |    0 |    0 |    0 |    281 |    324 |      58 |      32 |      24 |       5 |      9 |      5 |      3 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      5 |      0 |      0 |      0 |        5 |       10 |       18 |       24 |       16 |       32 |       1 |        4 |       13 |       20 |       27 |       12 |       46 |       3 |        4 |       17 |       24 |       21 |       13 |       17 |       2 |       14 |       16 |       12 |       27 |       23 |       26 |       4 |        4 |       11 |       15 |        8 |        5 |        4 |       1 |        9 |       17 |        9 |       10 |        5 |        9 |       0 |        5 |        4 |        4 |       10 |        2 |        4 |       0 |        2 |        4 |        3 |        3 |        3 |        3 |       0 |      0 |      3 |     34 |     35 |      5 |     16 |     11 |    127 |      0 |      0 |      6 |     29 |     21 |      7 |      9 |      6 |    142 |      0 |      0 |      1 |     23 |     13 |      1 |      3 |      1 |     65 |      0 |      0 |      0 |      7 |      2 |      1 |      5 |      0 |     32 |      0 |     37 | s03      | R    |
| 4068100 |     270 |     96 |    109 |     7 |    0 |     0 |    4 |    0 |     3 |    0 |     51 |    0 |    0 |    0 |    0 |    131 |    139 |      10 |       9 |       5 |       0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      3 |      0 |      0 |        4 |        4 |        1 |        8 |        5 |        8 |      10 |        4 |        6 |        3 |       17 |        8 |        9 |       9 |        1 |       11 |        7 |       16 |        8 |        4 |       6 |        7 |        5 |        6 |       12 |        9 |        7 |      10 |        6 |        7 |        7 |        7 |        2 |        1 |       0 |        2 |        3 |        6 |        4 |        3 |        2 |       1 |        3 |        0 |        2 |        0 |        1 |        2 |       0 |        1 |        1 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |      8 |     15 |      0 |      4 |      2 |     67 |      0 |      0 |      0 |      8 |     20 |      2 |      3 |      6 |     70 |      0 |      0 |      0 |      6 |      5 |      3 |      0 |      5 |     32 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4069000 |     500 |    143 |    210 |    16 |    0 |     7 |    6 |    4 |     8 |    0 |    106 |    0 |    0 |    0 |    0 |    244 |    256 |      14 |      14 |      11 |       2 |      2 |      9 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      1 |      1 |      1 |        8 |       16 |        9 |       18 |        4 |        5 |       1 |        6 |       17 |       20 |       20 |        5 |        9 |       5 |       11 |       26 |       18 |       18 |       20 |       11 |       4 |       11 |       22 |       20 |       11 |       16 |       17 |       5 |        5 |       25 |       19 |        8 |        1 |        1 |       0 |        9 |       15 |       13 |        6 |        2 |        2 |       0 |        1 |        3 |        4 |        7 |        1 |        0 |       0 |        5 |       10 |        3 |        3 |        2 |        2 |       0 |      0 |      0 |     25 |     11 |      3 |      0 |      1 |    103 |      0 |      0 |      0 |     22 |     26 |      6 |      4 |      4 |    148 |      0 |      0 |      1 |     11 |      6 |      2 |      1 |      1 |     84 |      0 |      0 |      0 |      6 |      8 |      1 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 4070000 |     432 |    151 |    180 |    11 |    0 |     2 |    7 |    0 |     3 |    0 |     78 |    0 |    0 |    0 |    0 |    188 |    244 |      17 |      11 |       6 |       0 |      6 |      6 |      5 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      1 |        6 |        7 |        8 |       16 |       10 |       10 |       7 |        5 |       12 |       15 |       17 |       13 |       16 |       9 |        6 |       12 |       25 |       12 |       10 |       14 |       4 |        4 |       13 |       19 |       21 |       15 |       19 |       6 |        4 |        3 |        8 |        7 |        6 |        3 |       0 |        7 |        8 |       13 |       13 |        3 |        3 |       0 |        1 |        2 |        2 |        3 |        2 |        0 |       0 |        1 |        6 |        2 |        1 |        1 |        2 |       0 |      0 |      2 |     13 |     18 |      5 |      3 |      7 |    103 |      0 |      0 |      3 |     16 |     33 |     10 |      6 |      7 |    105 |      0 |      0 |      0 |     10 |     11 |      2 |      4 |      1 |     50 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4071000 |     468 |    153 |    197 |    11 |    0 |     7 |    3 |    2 |     8 |    0 |     87 |    0 |    0 |    0 |    0 |    202 |    266 |      11 |      17 |       5 |       3 |      9 |      5 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        8 |       16 |       16 |        2 |        8 |       9 |        3 |       11 |       20 |       20 |       11 |       16 |      13 |        8 |       14 |       25 |       24 |        8 |       10 |       5 |        4 |        8 |       23 |       24 |       11 |       27 |       6 |        1 |        8 |        9 |        8 |        8 |        0 |       1 |        7 |       11 |       13 |       14 |        3 |        3 |       1 |        2 |        6 |        1 |        4 |        0 |        1 |       0 |        2 |        5 |        3 |        3 |        1 |        3 |       0 |      0 |      1 |     21 |     20 |      9 |      7 |      0 |     95 |      0 |      0 |      3 |     19 |     24 |     24 |      3 |      1 |    123 |      0 |      0 |      1 |     12 |     11 |      6 |      1 |      1 |     55 |      0 |      0 |      0 |      4 |      5 |      3 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 4072000 |     291 |     83 |    118 |     6 |    0 |     3 |    4 |    0 |     4 |    0 |     73 |    0 |    0 |    0 |    0 |    143 |    148 |      10 |       7 |       9 |       2 |      4 |      8 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        6 |        6 |       12 |        5 |        6 |       1 |        3 |        9 |        8 |       12 |        5 |        5 |       3 |        9 |       16 |        5 |        9 |        9 |       15 |       2 |        8 |        6 |        6 |        9 |        6 |       16 |       2 |        2 |       12 |        9 |        5 |        0 |        1 |       0 |        6 |       13 |        8 |       10 |        5 |        2 |       0 |        2 |        2 |        2 |        3 |        0 |        2 |       0 |        0 |        3 |        3 |        0 |        0 |        0 |       0 |      0 |      1 |     10 |     10 |      1 |      2 |      4 |     55 |      0 |      0 |      2 |      9 |      9 |      5 |      6 |      1 |     86 |      0 |      0 |      1 |     11 |      6 |      1 |      1 |      0 |     53 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      1 |     12 |      0 |     37 | s03      | R    |
| 4073000 |     442 |    145 |    198 |     9 |    0 |     2 |    3 |    0 |    12 |    0 |     73 |    0 |    0 |    0 |    0 |    223 |    219 |      17 |      14 |       2 |       0 |     10 |      9 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        7 |       17 |        9 |       10 |       10 |       7 |        3 |       12 |       14 |       18 |       11 |       11 |      12 |       11 |       15 |       24 |       20 |       13 |       20 |       5 |        8 |       10 |       18 |       12 |       13 |       24 |       5 |        3 |        8 |        8 |        6 |        8 |        5 |       0 |        2 |       12 |        6 |        6 |        6 |        3 |       0 |        1 |        8 |        0 |        3 |        1 |        0 |       0 |        1 |        4 |        3 |        2 |        3 |        0 |       0 |      0 |      1 |     13 |     15 |     10 |      4 |      4 |     98 |      0 |      0 |      3 |     26 |     21 |     13 |      5 |      9 |    121 |      0 |      0 |      0 |      7 |      4 |      1 |      0 |      2 |     59 |      0 |      0 |      0 |      7 |      2 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4080000 |     518 |    130 |    249 |    17 |    0 |     5 |    3 |    1 |     7 |    0 |    106 |    0 |    0 |    0 |    0 |    233 |    285 |       9 |      12 |       3 |       3 |     17 |     12 |     14 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |       1 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        3 |        4 |       13 |       15 |        5 |       11 |       0 |        4 |       14 |       22 |       17 |       12 |       10 |       0 |        7 |       10 |       31 |       24 |       20 |       21 |       1 |       11 |       12 |       29 |       33 |       20 |       29 |       1 |        5 |        9 |        8 |       15 |        9 |        8 |       0 |        2 |       11 |        7 |       21 |        8 |        3 |       0 |        3 |        2 |        4 |        3 |        0 |        2 |       0 |        1 |        7 |        2 |        4 |        2 |        3 |       0 |      0 |      1 |     12 |     16 |     15 |      3 |      3 |     80 |      0 |      0 |      4 |     28 |     49 |     14 |     11 |     11 |    132 |      0 |      0 |      0 |     10 |     11 |      5 |      6 |      3 |     71 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4082000 |     166 |     53 |     75 |     5 |    0 |     0 |    0 |    0 |     4 |    0 |     29 |    0 |    0 |    0 |    0 |     63 |    103 |       2 |       1 |       1 |       0 |      2 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        4 |        7 |        9 |       0 |        0 |        1 |        2 |        4 |       11 |       12 |       2 |        2 |        4 |        4 |        5 |        4 |       11 |       0 |        1 |        1 |        1 |        7 |       13 |       20 |       2 |        0 |        1 |        2 |        2 |        1 |        4 |       0 |        3 |        3 |        1 |        4 |        2 |        6 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        2 |        2 |       0 |      0 |      0 |      4 |      8 |      2 |      5 |      1 |     33 |      0 |      0 |      0 |      9 |     14 |      2 |      4 |      6 |     40 |      0 |      0 |      0 |      6 |      2 |      2 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4082200 |     333 |     72 |    181 |     8 |    0 |     4 |    0 |    1 |     4 |    0 |     63 |    0 |    0 |    0 |    0 |    146 |    187 |       2 |      10 |       0 |       0 |      5 |     16 |      4 |      2 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        4 |        2 |        8 |        5 |       12 |       0 |        1 |        6 |        4 |        6 |        9 |       15 |       0 |        2 |        5 |        9 |       16 |       17 |       30 |       1 |        2 |        4 |        9 |       10 |       20 |       56 |       0 |        1 |        3 |        2 |        7 |        5 |        8 |       0 |        3 |        4 |        5 |        9 |        6 |        9 |       1 |        0 |        1 |        1 |        0 |        5 |        2 |       0 |        0 |        2 |        1 |        1 |        2 |        2 |       0 |      0 |      1 |      9 |     11 |      6 |      1 |      3 |     41 |      0 |      0 |      0 |     19 |     28 |      5 |      8 |      9 |    112 |      0 |      0 |      0 |      6 |      6 |      5 |      2 |      3 |     41 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4083000 |     348 |     86 |    205 |     3 |    0 |     1 |    2 |    0 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    146 |    202 |       3 |       3 |       3 |       0 |      6 |     10 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        3 |        3 |       10 |        6 |        9 |       0 |        1 |        2 |        4 |        7 |        4 |       33 |       4 |        2 |        4 |        6 |       10 |       14 |       49 |       2 |        3 |        4 |        5 |       13 |       11 |       80 |       2 |        0 |        6 |        3 |        5 |        4 |        6 |       0 |        4 |        2 |        3 |        4 |        3 |        8 |       1 |        0 |        0 |        2 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        3 |       0 |      0 |      0 |     32 |      4 |      4 |      4 |      2 |     40 |      0 |      0 |      2 |     73 |     21 |      9 |      4 |      2 |     94 |      0 |      0 |      0 |     12 |      6 |      2 |      1 |      0 |     28 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4083200 |     608 |    172 |    240 |    18 |    0 |     5 |   10 |    4 |    10 |    0 |    149 |    0 |    0 |    0 |    0 |    285 |    323 |       7 |      10 |       5 |       3 |      8 |      9 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      1 |      3 |      0 |        2 |       17 |       13 |        7 |        7 |       12 |       3 |        7 |       24 |       14 |       24 |       14 |       28 |       0 |        8 |       32 |       22 |       14 |       16 |       32 |       2 |        7 |       30 |       13 |       15 |        5 |       42 |       2 |        7 |       26 |       13 |       12 |        9 |        9 |       0 |        6 |       29 |        8 |       10 |        6 |       14 |       0 |        4 |        9 |        6 |        2 |        1 |        0 |       0 |        5 |       10 |        0 |        4 |        4 |        2 |       0 |      0 |      2 |     15 |     18 |      5 |      2 |      2 |    128 |      0 |      0 |      3 |     12 |     25 |      7 |      2 |      2 |    189 |      0 |      0 |      0 |     15 |     15 |      2 |      1 |      0 |    116 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |     37 |      0 |     37 | s03      | R    |
| 4083300 |      13 |      2 |      3 |     1 |    0 |     1 |    0 |    0 |     2 |    0 |      4 |    0 |    0 |    0 |    0 |     10 |      3 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4083600 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4084000 |     506 |    149 |    224 |    17 |    0 |     4 |    4 |    1 |     8 |    0 |     99 |    0 |    0 |    0 |    0 |    209 |    297 |      25 |      11 |       9 |       3 |     11 |     11 |      4 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      2 |      0 |        2 |        8 |        9 |        5 |        5 |       20 |       5 |        3 |       19 |       10 |       11 |       11 |       34 |       7 |        3 |       16 |       21 |       19 |        7 |       28 |       2 |       10 |       19 |       15 |       15 |        7 |       55 |       7 |        0 |        9 |        8 |        4 |        4 |       12 |       1 |        8 |       18 |       11 |        4 |        5 |       15 |       0 |        7 |        3 |        7 |        3 |        1 |        0 |       0 |        2 |        5 |        2 |        2 |        0 |        2 |       0 |      0 |      1 |     17 |     16 |      8 |      2 |      3 |    102 |      0 |      0 |      3 |     27 |     18 |      4 |      0 |      5 |    167 |      0 |      0 |      0 |     11 |     10 |      5 |      1 |      0 |     72 |      0 |      0 |      1 |      3 |      5 |      0 |      1 |      0 |     24 |      0 |     37 | s03      | R    |
| 4084100 |     497 |    144 |    190 |    16 |    0 |     3 |   11 |    3 |    13 |    0 |    117 |    0 |    0 |    0 |    0 |    231 |    266 |      25 |      11 |      10 |       6 |      6 |     14 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      2 |      1 |        5 |       10 |        5 |       15 |        6 |        9 |       6 |        8 |       18 |       18 |       22 |        9 |        8 |       5 |        7 |       17 |       29 |       16 |       16 |       15 |       2 |       10 |       19 |       14 |       12 |       11 |       19 |       3 |        6 |       20 |        7 |        7 |        2 |        5 |       0 |       11 |       25 |       16 |        7 |        7 |        4 |       0 |        3 |        8 |        4 |        4 |        3 |        4 |       0 |        1 |        5 |        4 |        2 |        3 |        5 |       0 |      0 |      1 |     16 |     18 |      2 |      2 |      2 |    103 |      0 |      0 |      3 |     12 |     27 |      2 |      4 |      4 |    138 |      0 |      0 |      2 |     10 |      7 |      0 |      1 |      0 |     97 |      0 |      0 |      1 |      4 |      6 |      2 |      2 |      0 |     31 |      0 |     37 | s03      | R    |
| 4085000 |     715 |    271 |    249 |    15 |    0 |     7 |    7 |    1 |    16 |    0 |    149 |    0 |    0 |    0 |    0 |    318 |    397 |      99 |      33 |      35 |       8 |     11 |     13 |      8 |      3 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       5 |       0 |      4 |      1 |      0 |      0 |        4 |       12 |       20 |       15 |       14 |       27 |       6 |        6 |       25 |       25 |       18 |       24 |       64 |      11 |        6 |       24 |       24 |       22 |       17 |       26 |       4 |        9 |       20 |       24 |       22 |       12 |       35 |       4 |       10 |       27 |       10 |       13 |        6 |        8 |       0 |       12 |       18 |        9 |       17 |        8 |        9 |       2 |        3 |        8 |        5 |        4 |        1 |        2 |       0 |        4 |        3 |        3 |        3 |        2 |        8 |       0 |      0 |      5 |     50 |     39 |     11 |      3 |      7 |    156 |      0 |      0 |      3 |     32 |     36 |      6 |      1 |      4 |    167 |      0 |      0 |      2 |     17 |     17 |      1 |      0 |      0 |    112 |      0 |      0 |      1 |     11 |      2 |      0 |      1 |      0 |     31 |      0 |     37 | s03      | R    |
| 4085100 |     172 |     56 |     60 |     6 |    0 |     2 |    1 |    1 |     3 |    0 |     43 |    0 |    0 |    0 |    0 |     76 |     96 |       7 |       5 |       4 |       1 |      3 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        6 |        0 |        7 |        3 |       0 |        1 |        6 |        6 |       10 |        6 |        5 |       0 |        0 |        8 |        4 |        6 |        3 |        6 |       0 |        2 |        7 |        4 |        7 |        4 |        9 |       0 |        1 |        7 |        3 |        3 |        4 |        2 |       0 |        0 |        9 |        5 |        5 |        1 |        3 |       0 |        0 |        2 |        1 |        2 |        0 |        2 |       0 |        0 |        3 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      8 |      1 |      2 |      4 |     37 |      0 |      0 |      0 |      8 |      5 |      3 |      2 |      1 |     41 |      0 |      0 |      1 |     10 |      1 |      1 |      0 |      0 |     30 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4085200 |      81 |     18 |     45 |     1 |    0 |     0 |    0 |    1 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     37 |     44 |       0 |       0 |       1 |       0 |      4 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        2 |       0 |        0 |        7 |        2 |        3 |        0 |        1 |       1 |        0 |        8 |        3 |        4 |        4 |        2 |       1 |        1 |        5 |        2 |        9 |        4 |        2 |       0 |        1 |        2 |        2 |        3 |        2 |        0 |       0 |        1 |        3 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      8 |      4 |      0 |      0 |      1 |     32 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4085300 |      29 |      7 |     13 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     13 |     16 |       2 |       2 |       2 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        2 |        0 |        1 |       1 |        0 |        0 |        2 |        3 |        2 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4085400 |      88 |     29 |     35 |     3 |    0 |     1 |    0 |    1 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     45 |     43 |       1 |       1 |       3 |       0 |      6 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      1 |      1 |      0 |        3 |        0 |        3 |        7 |        2 |        2 |       0 |        0 |        1 |        2 |        5 |        4 |        0 |       0 |        1 |        1 |        3 |        4 |        3 |        5 |       0 |        0 |        3 |        3 |        4 |        3 |        5 |       0 |        1 |        1 |        3 |        0 |        0 |        3 |       0 |        1 |        2 |        3 |        2 |        2 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      1 |      4 |      6 |      2 |      0 |      2 |     14 |      0 |      0 |      1 |      5 |      5 |      0 |      5 |      0 |     19 |      0 |      0 |      0 |      2 |      5 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4085600 |     369 |     78 |    207 |     8 |    0 |     2 |    0 |    1 |     0 |    0 |     73 |    0 |    0 |    0 |    0 |    169 |    200 |       0 |      14 |       3 |       0 |      7 |     15 |      3 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |      6 |      2 |      1 |      1 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        3 |        5 |       10 |        3 |        6 |       0 |        4 |        4 |       15 |       11 |        9 |        8 |       0 |        2 |        9 |       27 |       24 |       18 |       20 |       0 |        3 |       12 |       39 |       18 |       23 |       12 |       0 |        4 |        6 |       12 |        5 |        5 |        5 |       0 |        0 |        8 |        9 |        9 |        4 |        6 |       0 |        0 |        1 |        2 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        2 |        1 |        2 |       0 |      0 |      0 |     18 |      9 |      1 |      0 |      0 |     50 |      0 |      0 |      1 |     45 |     54 |      3 |      0 |      0 |    104 |      0 |      0 |      0 |     13 |     12 |      0 |      0 |      0 |     48 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4086000 |     485 |    145 |    204 |    12 |    0 |     2 |    7 |    1 |    10 |    0 |    104 |    0 |    0 |    0 |    0 |    215 |    270 |      20 |       8 |       5 |       3 |     14 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      1 |      1 |      1 |        4 |       12 |       12 |       13 |        4 |        3 |       1 |        7 |       31 |       11 |       23 |       12 |       10 |       2 |        4 |       27 |       23 |       21 |       15 |        9 |       0 |       11 |       28 |       23 |       19 |       15 |        8 |       1 |        3 |       23 |       11 |        8 |        2 |        1 |       0 |       10 |       20 |        6 |       12 |        4 |        3 |       1 |        3 |        8 |        7 |        1 |        0 |        0 |       0 |        1 |        6 |        1 |        1 |        4 |        0 |       0 |      0 |      1 |     28 |     15 |      4 |      1 |      2 |     94 |      0 |      0 |      0 |     21 |     16 |     12 |      1 |      3 |    151 |      0 |      0 |      1 |     10 |      5 |      1 |      3 |      2 |     82 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 4086100 |     400 |    118 |    172 |     8 |    0 |     2 |   11 |    1 |     5 |    0 |     83 |    0 |    0 |    0 |    0 |    198 |    202 |      15 |      10 |       5 |       1 |      3 |      8 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |       15 |        7 |       11 |        6 |        4 |       3 |        1 |       15 |       11 |       17 |       13 |        7 |       5 |        8 |        9 |       20 |       19 |       22 |       12 |       0 |        6 |       12 |       14 |       17 |       15 |       17 |       1 |        6 |       16 |        7 |        8 |        3 |        2 |       0 |        9 |       14 |        2 |       11 |        3 |        2 |       0 |        0 |        4 |        2 |        7 |        1 |        3 |       0 |        1 |        3 |        2 |        2 |        2 |        0 |       0 |      0 |      4 |     11 |     15 |      9 |      4 |      1 |     74 |      0 |      0 |      5 |     25 |     28 |      8 |      4 |      3 |     99 |      0 |      0 |      0 |      8 |      4 |      3 |      0 |      1 |     67 |      0 |      0 |      0 |      7 |      5 |      1 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4086200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4086700 |     272 |     60 |    185 |     8 |    0 |     1 |    1 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |    101 |    171 |       1 |       2 |       0 |       0 |      7 |     13 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |       18 |       0 |        0 |        0 |        0 |        0 |        0 |       41 |       1 |        0 |        0 |        0 |        1 |        0 |       72 |       0 |        0 |        0 |        0 |        0 |        0 |      111 |       1 |        0 |        0 |        0 |        0 |        0 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |       11 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        6 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    185 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4087000 |     384 |    148 |    123 |    13 |    0 |     4 |    3 |    2 |     5 |    0 |     86 |    0 |    0 |    0 |    0 |    181 |    203 |      55 |      23 |      21 |       6 |      9 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |       19 |        8 |       13 |        8 |        9 |       5 |        8 |       16 |       13 |       16 |        7 |       13 |       7 |        3 |        9 |       15 |       11 |        9 |        9 |       0 |        8 |       13 |       10 |       11 |       12 |        9 |       4 |        9 |       14 |       11 |        2 |        2 |        3 |       1 |        5 |       14 |        8 |       15 |        2 |        0 |       0 |        0 |        8 |        3 |        2 |        0 |        1 |       1 |        1 |        3 |        5 |        1 |        1 |        1 |       0 |      0 |      2 |     19 |     19 |      4 |      3 |      1 |    100 |      0 |      0 |      2 |     11 |     13 |      3 |      5 |      7 |     82 |      0 |      0 |      1 |      7 |      8 |      2 |      0 |      0 |     68 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4087100 |     539 |    168 |    235 |     6 |    0 |     6 |    4 |    1 |     5 |    0 |    114 |    0 |    0 |    0 |    0 |    254 |    285 |      24 |       8 |       6 |       3 |      8 |     13 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        2 |        7 |        6 |       19 |       22 |        8 |       5 |        4 |       11 |       17 |       18 |       23 |       16 |      10 |        5 |       19 |       23 |       25 |       18 |       25 |       3 |        3 |       21 |       23 |       19 |       28 |       18 |       5 |        6 |       15 |        9 |       10 |        8 |        5 |       2 |        1 |       14 |       11 |       20 |        9 |        4 |       0 |        0 |        6 |        4 |        2 |        0 |        0 |       0 |        1 |        3 |        1 |        2 |        1 |        2 |       0 |      0 |      1 |     15 |     26 |      3 |      3 |      2 |    118 |      0 |      0 |      2 |     28 |     22 |      6 |      7 |      6 |    164 |      0 |      0 |      1 |     15 |      7 |      4 |      1 |      5 |     81 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4087200 |     468 |    108 |    255 |    12 |    0 |     2 |    3 |    0 |     2 |    0 |     86 |    0 |    0 |    0 |    0 |    211 |    257 |       6 |      13 |       3 |       1 |      6 |     11 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      1 |      0 |        0 |        8 |       10 |        5 |        8 |       14 |       0 |        1 |        9 |       16 |       11 |        8 |       16 |       2 |        2 |       11 |       31 |       35 |       15 |       31 |       1 |        3 |        7 |       24 |       28 |       25 |       42 |       0 |        1 |        3 |        8 |        8 |        5 |        5 |       0 |        4 |       14 |       19 |        6 |        7 |        6 |       0 |        0 |        4 |        2 |        3 |        1 |        0 |       0 |        0 |        0 |        2 |        4 |        1 |        2 |       0 |      0 |      1 |     13 |     12 |      2 |      3 |     14 |     63 |      0 |      0 |      0 |     22 |     53 |     12 |     14 |     30 |    124 |      0 |      0 |      3 |     13 |      7 |      3 |      5 |      3 |     52 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 4087500 |     284 |     68 |    162 |     4 |    0 |     2 |    1 |    0 |     1 |    0 |     46 |    0 |    0 |    0 |    0 |    137 |    147 |       1 |       5 |       2 |       0 |      5 |     12 |      2 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        2 |        7 |        9 |        6 |        3 |       0 |        1 |        3 |       17 |        8 |        5 |        5 |       0 |        3 |        5 |       24 |       24 |       16 |       10 |       0 |        4 |        8 |       28 |       21 |       11 |        7 |       1 |        2 |        1 |        9 |        6 |        3 |        2 |       0 |        2 |        2 |        6 |        8 |        4 |        1 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        2 |        0 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |      1 |      4 |      5 |      0 |      0 |     58 |      0 |      0 |      0 |     16 |     34 |      4 |      0 |      0 |    108 |      0 |      0 |      1 |      5 |      3 |      1 |      0 |      0 |     36 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4087600 |     708 |    201 |    342 |    15 |    0 |     5 |    3 |    2 |     8 |    0 |    132 |    0 |    0 |    0 |    0 |    323 |    385 |       9 |       8 |      12 |       0 |     23 |     15 |      9 |      0 |      0 |      2 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        5 |        5 |       15 |       31 |       14 |       11 |       1 |        4 |       11 |       22 |       37 |       18 |       26 |       1 |       11 |       20 |       35 |       54 |       23 |       22 |       0 |        8 |       21 |       44 |       44 |       22 |       37 |       1 |        7 |        8 |       14 |       15 |        7 |        7 |       0 |       10 |       14 |       17 |       22 |        6 |        5 |       0 |        5 |        4 |        1 |        6 |        1 |        1 |       0 |        1 |        1 |        1 |        9 |        2 |        1 |       0 |      0 |      0 |     21 |     38 |     13 |      8 |     11 |    110 |      0 |      0 |      0 |     36 |     73 |     16 |      8 |     15 |    194 |      0 |      0 |      1 |     27 |      8 |     10 |      6 |      1 |     79 |      0 |      0 |      0 |      3 |      7 |      1 |      0 |      1 |     21 |      0 |     37 | s03      | R    |
| 4087700 |     365 |    115 |    154 |     9 |    0 |     6 |    1 |    2 |     2 |    0 |     76 |    0 |    0 |    0 |    0 |    157 |    208 |       4 |       8 |       3 |       0 |     11 |     12 |      4 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      3 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        8 |        8 |       11 |        5 |       11 |       0 |        2 |       13 |       16 |       10 |       13 |       16 |       0 |        0 |       13 |       21 |       20 |        7 |       13 |       0 |        2 |       16 |       16 |       14 |       11 |       21 |       0 |        5 |        8 |        4 |        6 |        5 |        1 |       0 |        3 |       16 |       10 |       10 |        5 |        3 |       0 |        1 |        3 |        0 |        4 |        1 |        0 |       0 |        1 |        6 |        1 |        0 |        2 |        1 |       0 |      0 |      1 |     14 |     17 |      4 |      2 |      6 |     71 |      0 |      0 |      2 |     19 |     22 |      3 |      5 |      3 |    100 |      0 |      0 |      0 |      4 |      6 |      1 |      1 |      1 |     63 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4087800 |     406 |     85 |    260 |     1 |    0 |     0 |    0 |    0 |     2 |    0 |     58 |    0 |    0 |    0 |    0 |    195 |    211 |       2 |       5 |       0 |       0 |     12 |     23 |      2 |      0 |      4 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      5 |      4 |      1 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      3 |      0 |        3 |        3 |        6 |        9 |        8 |       10 |       0 |        2 |        3 |       11 |       12 |       13 |        5 |       0 |        5 |        4 |       33 |       29 |       21 |       30 |       1 |        6 |        7 |       37 |       32 |       32 |       23 |       0 |        2 |        1 |        4 |        7 |       11 |        6 |       1 |        3 |        1 |        3 |       10 |        3 |        5 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     26 |     19 |      0 |      0 |      0 |     39 |      0 |      0 |      5 |     83 |     47 |      1 |      2 |      0 |    122 |      0 |      0 |      0 |     15 |      6 |      0 |      0 |      0 |     37 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4088100 |     154 |     47 |     75 |     5 |    0 |     0 |    2 |    1 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     65 |     89 |       3 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        2 |        2 |       13 |       0 |        2 |        0 |        3 |        6 |        7 |       11 |       0 |        1 |        0 |        4 |        4 |        5 |       19 |       1 |        0 |        1 |        6 |        1 |        6 |       24 |       3 |        0 |        1 |        0 |        1 |        2 |        5 |       0 |        0 |        1 |        2 |        3 |        2 |        7 |       0 |        0 |        0 |        1 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        3 |       0 |      0 |      1 |      9 |      4 |      2 |      3 |      5 |     23 |      0 |      0 |      0 |      9 |      7 |      2 |      4 |      4 |     49 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |     18 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4088200 |     945 |    263 |    515 |    20 |    0 |    10 |    5 |    0 |    10 |    0 |    122 |    0 |    0 |    0 |    0 |    395 |    550 |      14 |      15 |       7 |       2 |     24 |     24 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      5 |      2 |      0 |      1 |      0 |      0 |      0 |       2 |       0 |       2 |       0 |      1 |      2 |      0 |      0 |        5 |        4 |        3 |       17 |       16 |       50 |       3 |        4 |        7 |       14 |       20 |       31 |       86 |       3 |        7 |       17 |       26 |       31 |       42 |       96 |       9 |        5 |       26 |       28 |       33 |       41 |      141 |      13 |        9 |        5 |        7 |        8 |        6 |       13 |       1 |        6 |        9 |       10 |       19 |       10 |       19 |       0 |        3 |        1 |        1 |        6 |        3 |        6 |       0 |        1 |        2 |        1 |        6 |        2 |       13 |       0 |      0 |      0 |     25 |     33 |      9 |     13 |      8 |    175 |      0 |      0 |      3 |     51 |     40 |     15 |      9 |     10 |    387 |      0 |      0 |      1 |      9 |      7 |      2 |      1 |      0 |    102 |      0 |      0 |      1 |      5 |      6 |      0 |      1 |      2 |     30 |      0 |     37 | s03      | R    |
| 4088300 |     367 |     99 |    180 |    10 |    0 |     7 |    4 |    1 |     5 |    0 |     61 |    0 |    0 |    0 |    0 |    181 |    186 |       7 |       9 |       5 |       1 |      7 |      8 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        6 |       12 |        7 |        5 |       3 |        2 |        5 |       11 |       19 |        6 |       10 |       7 |        4 |        7 |       15 |       16 |       12 |       26 |       4 |        8 |        6 |       12 |       19 |       17 |       27 |       7 |        6 |        5 |        7 |        9 |        8 |        3 |       1 |        5 |        3 |        4 |        6 |        1 |        3 |       0 |        0 |        4 |        4 |        5 |        2 |        4 |       0 |        0 |        2 |        2 |        2 |        1 |        1 |       0 |      0 |      0 |     16 |     13 |      5 |      2 |      2 |     61 |      0 |      0 |      0 |     21 |     26 |     10 |     10 |      7 |    106 |      0 |      0 |      0 |     10 |      8 |      2 |      1 |      3 |     37 |      0 |      0 |      0 |      5 |      8 |      0 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4088400 |     413 |    128 |    181 |    10 |    0 |     1 |    0 |    0 |     3 |    0 |     90 |    0 |    0 |    0 |    0 |    158 |    255 |      23 |      13 |       9 |       3 |     14 |     10 |      6 |      1 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        8 |       12 |        7 |        4 |        7 |       0 |        8 |       13 |       19 |       17 |       16 |       15 |       0 |        6 |       15 |       20 |        8 |       16 |       14 |       0 |       12 |       19 |       30 |       12 |       14 |       15 |       0 |        4 |       12 |        9 |        6 |        0 |        3 |       0 |        7 |       15 |       14 |        7 |        4 |        8 |       1 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        1 |        2 |        2 |        3 |        0 |        1 |       0 |      0 |      1 |     27 |     21 |      0 |      0 |      0 |     79 |      0 |      0 |      3 |     43 |     14 |      0 |      0 |      0 |    121 |      0 |      0 |      0 |     16 |     12 |      0 |      0 |      0 |     62 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4088500 |     296 |     97 |    128 |     1 |    0 |     4 |    0 |    1 |     1 |    0 |     64 |    0 |    0 |    0 |    0 |    143 |    153 |       9 |       9 |       4 |       0 |      5 |      5 |      4 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      1 |      1 |      0 |        0 |        3 |        4 |       11 |        7 |       15 |       0 |        3 |        6 |       10 |       15 |        6 |       17 |       0 |        2 |        4 |       16 |       12 |        9 |       18 |       0 |        5 |        8 |       13 |       24 |        6 |       11 |       0 |        3 |        3 |       11 |        9 |        6 |        6 |       0 |        1 |        4 |        8 |        8 |        3 |        2 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |     12 |      8 |      3 |      6 |     62 |      0 |      0 |      1 |     20 |     22 |      6 |      2 |      5 |     72 |      0 |      0 |      0 |      8 |      5 |      0 |      0 |      3 |     48 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4088600 |     224 |     77 |     99 |     7 |    0 |     1 |    0 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |     84 |    140 |       2 |       5 |       5 |       1 |      4 |      5 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        6 |        5 |        2 |        6 |       4 |        0 |        6 |        7 |        9 |       13 |       15 |       4 |        1 |        5 |        9 |        2 |        8 |       13 |       1 |        0 |        5 |       16 |        3 |       10 |       23 |       3 |        2 |        2 |        8 |        2 |        2 |        3 |       0 |        0 |        6 |        3 |        2 |        5 |        3 |       1 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        3 |       0 |      0 |      1 |      7 |     11 |      3 |      3 |      2 |     50 |      0 |      0 |      1 |     12 |      6 |      2 |      1 |      8 |     69 |      0 |      0 |      0 |      4 |      5 |      3 |      1 |      0 |     26 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4088700 |     752 |    198 |    380 |    18 |    0 |     3 |    5 |    0 |     8 |    0 |    140 |    0 |    0 |    0 |    0 |    355 |    397 |      14 |       8 |       5 |       3 |     17 |     24 |     10 |      1 |      1 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      3 |     12 |      4 |      2 |      0 |      0 |      0 |      0 |       2 |       2 |       1 |       0 |      6 |      0 |      0 |      0 |        4 |        7 |       21 |       23 |       19 |       17 |       0 |        3 |       12 |       27 |       24 |       31 |       10 |       0 |        6 |       16 |       50 |       41 |       49 |       31 |       2 |        3 |       13 |       47 |       53 |       47 |       21 |       1 |        4 |       10 |       12 |       14 |       13 |        3 |       0 |       10 |       15 |       21 |       16 |       15 |        7 |       0 |        1 |        2 |        5 |        3 |        1 |        1 |       0 |        1 |        3 |       11 |        0 |        2 |        3 |       1 |      0 |      4 |     27 |      9 |      1 |      1 |      0 |    156 |      0 |      0 |      8 |     63 |     17 |      5 |      7 |      2 |    278 |      0 |      0 |      3 |     18 |      5 |      1 |      0 |      0 |    113 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 4088800 |     379 |    101 |    197 |     3 |    0 |     3 |    1 |    1 |     4 |    0 |     69 |    0 |    0 |    0 |    0 |    190 |    189 |       4 |       6 |       1 |       3 |      5 |      9 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        7 |       11 |       11 |        4 |        4 |       0 |        2 |       12 |       23 |       10 |        7 |        9 |       0 |        1 |       19 |       43 |       22 |       14 |        7 |       0 |        3 |       15 |       44 |       11 |       10 |        8 |       0 |        4 |       12 |       10 |        7 |        1 |        4 |       0 |        3 |        5 |       16 |        4 |        1 |        2 |       0 |        3 |        4 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      1 |      8 |     22 |      0 |      1 |      2 |     67 |      0 |      0 |      3 |     32 |     40 |      1 |      0 |      1 |    120 |      0 |      0 |      1 |      7 |      8 |      0 |      0 |      0 |     53 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4089000 |     484 |    147 |    231 |     9 |    0 |     1 |    4 |    2 |     4 |    0 |     86 |    0 |    0 |    0 |    0 |    235 |    249 |      18 |      12 |       7 |       0 |      7 |      8 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      0 |      0 |        4 |        8 |       10 |       11 |        9 |       10 |       5 |        4 |       18 |       16 |       18 |        7 |       22 |       5 |        7 |       17 |       25 |       26 |       21 |       22 |       9 |       11 |       12 |       17 |       24 |       15 |       18 |       7 |        9 |        7 |       11 |        7 |        2 |        4 |       0 |       10 |        8 |        8 |       10 |        6 |        4 |       0 |        0 |        4 |        2 |        3 |        0 |        2 |       0 |        1 |        5 |        2 |        0 |        0 |        1 |       0 |      0 |      2 |     13 |     26 |     10 |      4 |      9 |     83 |      0 |      0 |      1 |     24 |     35 |     15 |      6 |      7 |    143 |      0 |      0 |      1 |     14 |      6 |      4 |      0 |      1 |     60 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4089100 |     334 |    117 |    141 |     8 |    0 |     3 |    4 |    2 |     8 |    0 |     51 |    0 |    0 |    0 |    0 |    160 |    174 |      25 |       4 |       5 |       1 |      1 |      5 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        5 |        3 |       10 |       12 |        8 |        9 |       6 |        1 |        9 |        7 |       24 |        7 |        7 |       9 |        2 |        6 |       16 |        9 |       15 |       13 |       7 |        4 |        9 |       13 |       12 |        7 |       13 |      15 |        3 |        2 |        5 |        9 |        3 |        1 |       1 |        8 |        3 |        5 |       10 |        1 |        0 |       0 |        3 |        5 |        3 |        2 |        1 |        1 |       0 |        2 |        2 |        2 |        2 |        2 |        0 |       0 |      0 |      0 |     17 |      8 |      8 |      2 |      8 |     74 |      0 |      0 |      0 |     16 |     22 |     13 |      2 |     11 |     77 |      0 |      0 |      0 |     13 |      7 |      1 |      0 |      1 |     29 |      0 |      0 |      0 |     10 |      3 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4089200 |     393 |    124 |    195 |     6 |    0 |     7 |    1 |    0 |     8 |    0 |     52 |    0 |    0 |    0 |    0 |    186 |    207 |       7 |       7 |       1 |       0 |      9 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        4 |       15 |       12 |       11 |       5 |        2 |        3 |        9 |       23 |        9 |       16 |      10 |        2 |        5 |       18 |       14 |       20 |       30 |       9 |        6 |       14 |       17 |       10 |       15 |       25 |      10 |        1 |        4 |        6 |        9 |        1 |        4 |       0 |        5 |        3 |        4 |        5 |        2 |        8 |       0 |        0 |        1 |        3 |        3 |        1 |        3 |       0 |        1 |        2 |        3 |        3 |        1 |        1 |       0 |      0 |      1 |      6 |     25 |     14 |      4 |      2 |     72 |      0 |      0 |      1 |     12 |     39 |      8 |      9 |      7 |    119 |      0 |      0 |      0 |      8 |      6 |      4 |      1 |      2 |     31 |      0 |      0 |      0 |      3 |      5 |      0 |      1 |      1 |     12 |      0 |     37 | s03      | R    |
| 4089300 |     274 |     79 |    144 |     6 |    0 |     4 |    2 |    0 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |    127 |    147 |       5 |       5 |       2 |       1 |      7 |      8 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        3 |        3 |        1 |        9 |        5 |        7 |       3 |        1 |        5 |        8 |       12 |        9 |       10 |       3 |        5 |        7 |       11 |       14 |       10 |       20 |       4 |       11 |        2 |        8 |       16 |        7 |       24 |       5 |        1 |        2 |        4 |        6 |        3 |        1 |       1 |        5 |        1 |        3 |        6 |        1 |        2 |       2 |        0 |        0 |        2 |        2 |        2 |        1 |       0 |        2 |        0 |        3 |        0 |        1 |        0 |       0 |      0 |      0 |      8 |     14 |      7 |      2 |      4 |     44 |      0 |      0 |      1 |     16 |     20 |      8 |      0 |      7 |     92 |      0 |      0 |      0 |      5 |      3 |      1 |      2 |      3 |     24 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4089400 |     852 |    174 |    522 |    11 |    0 |     1 |    1 |    2 |     1 |    0 |    140 |    0 |    0 |    0 |    0 |    411 |    441 |       9 |      13 |       1 |       2 |     24 |     43 |     20 |      6 |      3 |      2 |      4 |      0 |      1 |      1 |      1 |      0 |      4 |      6 |      5 |      0 |      0 |      0 |      1 |      0 |       0 |       2 |       1 |       0 |      2 |      2 |      1 |      0 |        2 |        8 |       12 |       22 |       19 |       15 |       0 |        5 |        6 |       21 |       23 |       22 |       19 |       0 |        8 |       11 |       42 |       64 |       71 |       62 |       0 |       12 |       20 |       54 |       49 |       67 |       62 |       0 |        4 |        6 |       11 |       11 |       20 |       14 |       0 |        5 |        7 |       16 |       18 |       18 |       10 |       0 |        1 |        1 |        3 |        2 |        0 |        2 |       0 |        0 |        1 |        4 |        1 |        0 |        1 |       0 |      0 |      1 |     43 |     49 |      5 |      0 |      0 |     76 |      0 |      0 |      4 |    120 |    141 |     20 |      2 |      0 |    235 |      0 |      0 |      2 |     34 |     35 |      1 |      0 |      0 |     68 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4089500 |     657 |    184 |    325 |    12 |    0 |     6 |    1 |    1 |     4 |    0 |    124 |    0 |    0 |    0 |    0 |    313 |    344 |       7 |       8 |       2 |       0 |     12 |     24 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      1 |      2 |      2 |      1 |      0 |      0 |      7 |      1 |      5 |      1 |       1 |       0 |       2 |       0 |      0 |      3 |      0 |      0 |        5 |        2 |        8 |       25 |       18 |       17 |       1 |        6 |        8 |       20 |       30 |       28 |       16 |       0 |        9 |        9 |       30 |       37 |       37 |       36 |       2 |       10 |        7 |       35 |       31 |       31 |       47 |       4 |        8 |        8 |       10 |       17 |       15 |        4 |       0 |        4 |        6 |       13 |       16 |       15 |        8 |       0 |        2 |        2 |        3 |        7 |        1 |        0 |       0 |        0 |        1 |        4 |        3 |        1 |        0 |       0 |      0 |      1 |     37 |     19 |      6 |      7 |     13 |    101 |      0 |      0 |      3 |     51 |     53 |     11 |     12 |     14 |    181 |      0 |      0 |      2 |     26 |      7 |      2 |      2 |      3 |     82 |      0 |      0 |      0 |      6 |      6 |      3 |      2 |      0 |      7 |      0 |     37 | s03      | R    |
| 4089600 |     360 |    110 |    199 |     3 |    0 |     4 |    1 |    0 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |    143 |    217 |       2 |       3 |       0 |       0 |     15 |     14 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        0 |        3 |        1 |        5 |       12 |       31 |       0 |        1 |        4 |        2 |        5 |       11 |       35 |       0 |        1 |        2 |        3 |        6 |       12 |       54 |       0 |        0 |        1 |        5 |        4 |       27 |       82 |       2 |        0 |        0 |        0 |        3 |        1 |        5 |       0 |        1 |        1 |        1 |        7 |       11 |       13 |       0 |        0 |        1 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        2 |       0 |      0 |      0 |     13 |     14 |     15 |      5 |      6 |     57 |      0 |      0 |      2 |     38 |     30 |     15 |      5 |     22 |     87 |      0 |      0 |      0 |      4 |      8 |      2 |      0 |      5 |     24 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4089700 |    1018 |    209 |    597 |    17 |    0 |     2 |    7 |    0 |     6 |    0 |    180 |    0 |    0 |    0 |    0 |    488 |    530 |       9 |      13 |       8 |       0 |     18 |     25 |     13 |      3 |      2 |      3 |      1 |      0 |      0 |     10 |      0 |      0 |      2 |     14 |      1 |      0 |      1 |      1 |      2 |      0 |       2 |       6 |       0 |       0 |      0 |      5 |      2 |      0 |        3 |        3 |       22 |       18 |       16 |        9 |       2 |        4 |       18 |       43 |       34 |       23 |       14 |       0 |       11 |       17 |      107 |       84 |       29 |       54 |       2 |        9 |       36 |      110 |       57 |       39 |       42 |       0 |        5 |        9 |       29 |       26 |       16 |       10 |       0 |        5 |        9 |       32 |       19 |       11 |        9 |       0 |        3 |        1 |        6 |        4 |        1 |        1 |       0 |        1 |        3 |       10 |        1 |        1 |        0 |       0 |      0 |      1 |     70 |      2 |      1 |      0 |      1 |    134 |      0 |      0 |      5 |    225 |     12 |      2 |      4 |      6 |    343 |      0 |      0 |      1 |     64 |      1 |      0 |      0 |      0 |    114 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 4089800 |     885 |    206 |    473 |    10 |    0 |     2 |    6 |    0 |     1 |    0 |    187 |    0 |    0 |    0 |    0 |    409 |    476 |      15 |      10 |       5 |       0 |     20 |     28 |     16 |      0 |      2 |      5 |      4 |      0 |      2 |      3 |      1 |      1 |      3 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      3 |      5 |      0 |      0 |        4 |       11 |       11 |       21 |       13 |       17 |       0 |        4 |       13 |       29 |       42 |       20 |       21 |       0 |       11 |       29 |       63 |       33 |       42 |       49 |       0 |       10 |       49 |       53 |       50 |       42 |       41 |       1 |        9 |       16 |       20 |       26 |       15 |       11 |       0 |        5 |       17 |       26 |       19 |       11 |       12 |       0 |        0 |        2 |        2 |        1 |        2 |        1 |       0 |        1 |        3 |        4 |        2 |        1 |        0 |       0 |      0 |      1 |     19 |     39 |      0 |      0 |      0 |    147 |      0 |      0 |      2 |     37 |     87 |      0 |      0 |      0 |    347 |      0 |      0 |      1 |     15 |     19 |      0 |      0 |      0 |    152 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 4089900 |     435 |    135 |    204 |     6 |    0 |     5 |    3 |    1 |     1 |    0 |     80 |    0 |    0 |    0 |    0 |    190 |    245 |      10 |       5 |       4 |       1 |     10 |     10 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      4 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       3 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        3 |        9 |        6 |        7 |       19 |       0 |        2 |        7 |       15 |       14 |       13 |       37 |       1 |        2 |       16 |       20 |       20 |       16 |       26 |       0 |        2 |       11 |       16 |       17 |       25 |       33 |       0 |        2 |        9 |        8 |        8 |        5 |        4 |       0 |        3 |       11 |        6 |       11 |        6 |        7 |       0 |        1 |        0 |        2 |        2 |        2 |        1 |       0 |        0 |        3 |        2 |        1 |        2 |        0 |       0 |      0 |      0 |     11 |     27 |      9 |      3 |     18 |     67 |      0 |      0 |      3 |     29 |     26 |      8 |      7 |     23 |    108 |      0 |      0 |      0 |      6 |      8 |      3 |      1 |      3 |     59 |      0 |      0 |      1 |      3 |      6 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 4090000 |     343 |     89 |    167 |    10 |    0 |     4 |    2 |    1 |     4 |    0 |     66 |    0 |    0 |    0 |    0 |    158 |    185 |       6 |       8 |       4 |       3 |      7 |     12 |      4 |      1 |      0 |      0 |      0 |      0 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        5 |       15 |        3 |        6 |       3 |        4 |        6 |       10 |       15 |        6 |        7 |       5 |        7 |        7 |       18 |       26 |       10 |        6 |       4 |        8 |        8 |       17 |       20 |       13 |       20 |       3 |        7 |        5 |       13 |        5 |        1 |        2 |       0 |        7 |        8 |        6 |        7 |        3 |        2 |       0 |        1 |        4 |        1 |        4 |        1 |        0 |       0 |        2 |        1 |        3 |        2 |        2 |        0 |       0 |      0 |      0 |     12 |     20 |      2 |      2 |      4 |     49 |      0 |      0 |      0 |     19 |     20 |      3 |      4 |      7 |    114 |      0 |      0 |      0 |      8 |      6 |      3 |      1 |      3 |     45 |      0 |      0 |      0 |      8 |      4 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4090100 |     676 |    176 |    346 |    13 |    0 |     3 |    5 |    1 |     2 |    0 |    130 |    0 |    0 |    0 |    0 |    309 |    367 |      20 |      28 |      17 |       2 |     18 |     27 |      7 |      1 |      0 |      2 |      2 |      0 |      3 |      1 |      0 |      0 |      7 |      6 |      7 |      3 |      3 |      1 |      2 |      1 |       0 |       3 |       1 |       1 |      1 |      2 |      2 |      0 |        1 |       11 |       21 |       13 |       10 |        9 |       2 |        1 |       27 |       39 |       31 |        6 |        5 |       0 |        7 |       21 |       63 |       38 |       22 |       12 |       0 |       12 |       31 |       75 |       33 |       22 |       10 |       0 |        6 |        8 |       20 |       17 |        7 |        5 |       0 |        6 |       12 |       28 |       10 |        8 |        3 |       0 |        0 |        6 |        6 |        4 |        0 |        0 |       0 |        0 |        3 |        5 |        0 |        0 |        0 |       0 |      0 |      1 |     31 |      1 |      1 |      2 |      2 |    138 |      0 |      0 |      8 |     47 |      5 |      1 |      1 |      1 |    283 |      0 |      0 |      2 |     10 |      1 |      0 |      0 |      0 |    117 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 4090200 |     131 |     31 |     61 |     2 |    0 |     0 |    1 |    0 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |     52 |     79 |       3 |       3 |       5 |       0 |      2 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        2 |        2 |        1 |        1 |       0 |        0 |        3 |        7 |        8 |        4 |        1 |       0 |        2 |        8 |        7 |        5 |        3 |        2 |       0 |        2 |        8 |        9 |        5 |        5 |        5 |       0 |        1 |        6 |        5 |        1 |        1 |        1 |       0 |        3 |        7 |        5 |        4 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     60 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |     33 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4090600 |     132 |     48 |     54 |     3 |    0 |     0 |    1 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     55 |     77 |       4 |       2 |       1 |       0 |      5 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        2 |        1 |        4 |        3 |       0 |        1 |       10 |       12 |        5 |        3 |        2 |       0 |        2 |        2 |       11 |        9 |        0 |        2 |       0 |        4 |        6 |        8 |        6 |        2 |        2 |       0 |        0 |        3 |        5 |        2 |        0 |        2 |       0 |        2 |        6 |        5 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      3 |      6 |      4 |      0 |     32 |      0 |      0 |      0 |      6 |      5 |      2 |      6 |      0 |     35 |      0 |      0 |      0 |      3 |      0 |      3 |      0 |      0 |     19 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4090700 |     101 |     27 |     56 |     4 |    0 |     0 |    0 |    0 |     1 |    0 |     13 |    0 |    0 |    0 |    0 |     48 |     53 |       8 |       0 |       1 |       2 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        4 |        3 |       2 |        0 |        2 |        1 |        3 |        3 |        4 |       2 |        0 |        1 |        7 |        6 |        4 |        3 |       3 |        3 |        2 |        8 |        7 |        2 |        4 |       6 |        2 |        2 |        1 |        1 |        1 |        2 |       0 |        1 |        0 |        3 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |     21 |      0 |      0 |      0 |      8 |      9 |      0 |      0 |      1 |     38 |      0 |      0 |      0 |      1 |      2 |      3 |      0 |      1 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 4090800 |     230 |     77 |    112 |     1 |    0 |     2 |    0 |    0 |     1 |    0 |     37 |    0 |    0 |    0 |    0 |    109 |    121 |       7 |       6 |       1 |       0 |      7 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        3 |        5 |        8 |        7 |       10 |       1 |        0 |        0 |        3 |       18 |       10 |        5 |       2 |        5 |        3 |        3 |       15 |        7 |       17 |       0 |        3 |        4 |       10 |       10 |       11 |       24 |       0 |        1 |        3 |        4 |        4 |        3 |        3 |       0 |        2 |        4 |        1 |        5 |        4 |        3 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |      7 |     10 |      7 |      1 |      1 |     50 |      0 |      0 |      1 |      6 |     14 |      4 |      5 |      7 |     75 |      0 |      0 |      2 |      2 |      2 |      3 |      2 |      1 |     25 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4090900 |     247 |     68 |    130 |     6 |    0 |     0 |    1 |    0 |     1 |    0 |     41 |    0 |    0 |    0 |    0 |    111 |    136 |       6 |      11 |       2 |       1 |      5 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        1 |        3 |        5 |       12 |        3 |        3 |       0 |        0 |        2 |       12 |       17 |        2 |        8 |       0 |        7 |        7 |       11 |       15 |        6 |       14 |       0 |        1 |        6 |       21 |       12 |       11 |       19 |       0 |        5 |        1 |        6 |        6 |        0 |        4 |       0 |        5 |        3 |        4 |        2 |        3 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        2 |        0 |       0 |      0 |      0 |     13 |     13 |      1 |      2 |      3 |     36 |      0 |      0 |      0 |      8 |     34 |      3 |      2 |      4 |     79 |      0 |      0 |      2 |      7 |      5 |      1 |      0 |      4 |     22 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 4091000 |     439 |    113 |    243 |    16 |    0 |     4 |    3 |    0 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    214 |    225 |      15 |       5 |       3 |       4 |     11 |     12 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        4 |        6 |       15 |       11 |        3 |       7 |        3 |        5 |       10 |       18 |       14 |        6 |       8 |       14 |       10 |       20 |       34 |       22 |       17 |       7 |        5 |       12 |       23 |       27 |       16 |       26 |      10 |        7 |        6 |        2 |        9 |        2 |        2 |       1 |        8 |        3 |        8 |        5 |        3 |        1 |       2 |        0 |        1 |        4 |        5 |        1 |        1 |       0 |        2 |        1 |        4 |        2 |        2 |        1 |       0 |      0 |      0 |     15 |     16 |      5 |      6 |      5 |     66 |      0 |      0 |      2 |     24 |     44 |     10 |     12 |     10 |    141 |      0 |      0 |      1 |      8 |      6 |      3 |      1 |      1 |     39 |      0 |      0 |      0 |      3 |      4 |      0 |      2 |      0 |     15 |      0 |     37 | s03      | R    |
| 4091100 |     726 |    198 |    397 |    16 |    0 |     5 |    4 |    2 |     3 |    0 |    101 |    0 |    0 |    0 |    0 |    336 |    390 |       7 |       5 |       3 |       0 |     13 |     20 |      6 |      3 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      3 |      0 |      0 |       0 |       0 |       1 |       0 |      3 |      7 |      1 |      0 |        3 |        4 |        4 |       22 |       11 |       19 |      14 |        3 |        9 |       18 |       27 |       18 |       33 |      13 |       11 |       10 |       30 |       37 |       40 |       51 |      15 |       13 |       14 |       30 |       43 |       33 |       52 |      18 |        8 |        6 |        9 |        5 |       12 |       10 |       1 |        6 |        9 |        8 |       10 |        9 |        6 |       2 |        6 |        2 |        1 |        1 |        2 |        2 |       0 |        0 |        4 |        1 |        3 |        3 |        5 |       0 |      0 |      1 |     19 |     30 |     16 |      6 |     14 |    112 |      0 |      0 |      3 |     31 |     69 |     21 |      9 |     25 |    239 |      0 |      0 |      1 |     12 |     14 |      4 |      2 |      7 |     61 |      0 |      0 |      0 |      5 |      5 |      2 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4091200 |      13 |      4 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      8 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4091300 |     372 |     76 |    220 |     8 |    0 |     6 |    4 |    1 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    186 |    186 |       0 |       6 |       1 |       0 |      4 |     14 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        4 |        9 |        6 |        6 |       2 |        4 |        4 |        9 |       14 |        5 |        9 |       2 |        7 |        7 |       14 |       30 |       23 |       33 |       3 |        3 |        2 |       19 |       36 |       19 |       21 |       3 |        4 |        2 |        7 |       10 |        5 |        2 |       0 |        5 |        0 |        6 |        7 |        5 |        2 |       0 |        2 |        0 |        0 |        4 |        1 |        2 |       1 |        2 |        3 |        2 |        2 |        1 |        1 |       0 |      0 |      0 |      9 |     11 |      6 |      5 |     14 |     31 |      0 |      0 |      0 |     21 |     44 |     21 |     12 |     27 |     95 |      0 |      0 |      0 |      6 |      6 |      4 |      5 |      6 |     28 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      2 |      7 |      0 |     37 | s03      | R    |
| 4091400 |     356 |    112 |    172 |     6 |    0 |     3 |    1 |    1 |     3 |    0 |     58 |    0 |    0 |    0 |    0 |    166 |    190 |      20 |      12 |       2 |       0 |      5 |      7 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        5 |       13 |        8 |        9 |       5 |        8 |        5 |       11 |       20 |       10 |       11 |       5 |        5 |        6 |       15 |       20 |       22 |       16 |       2 |        3 |        8 |       19 |       22 |       15 |       18 |       1 |        2 |        4 |       10 |        4 |        3 |       10 |       0 |        4 |        2 |        6 |        3 |        3 |        5 |       2 |        1 |        2 |        0 |        0 |        1 |        1 |       0 |        2 |        2 |        2 |        1 |        1 |        1 |       0 |      0 |      1 |     15 |     18 |      6 |      1 |      2 |     69 |      0 |      0 |      1 |     10 |     32 |     11 |      6 |      9 |    103 |      0 |      0 |      0 |      0 |      8 |      4 |      4 |      2 |     40 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4091500 |      46 |     13 |     21 |     1 |    0 |     1 |    0 |    0 |     1 |    0 |      9 |    0 |    0 |    0 |    0 |      8 |     38 |       2 |       4 |       0 |       2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        2 |        5 |       0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |        1 |        2 |        3 |        1 |        5 |        5 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4091600 |     284 |     71 |    137 |     5 |    0 |     0 |    2 |    0 |     2 |    0 |     67 |    0 |    0 |    0 |    0 |    138 |    146 |       8 |       4 |       3 |       0 |      8 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        7 |       11 |        4 |        6 |       0 |        2 |        4 |        7 |       10 |       12 |        5 |       0 |        0 |        6 |       11 |       24 |       18 |       10 |       0 |        2 |        6 |       11 |       12 |       20 |       16 |       1 |        2 |        8 |        6 |        7 |        9 |        2 |       0 |        4 |        6 |        5 |        9 |        8 |        1 |       0 |        0 |        2 |        0 |        0 |        1 |        1 |       0 |        1 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      7 |      5 |      4 |      1 |     47 |      0 |      0 |      1 |     21 |     18 |      8 |      4 |      0 |     85 |      0 |      0 |      1 |      5 |      4 |      0 |      1 |      0 |     56 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 4091700 |      34 |      6 |     23 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     16 |     18 |       2 |       1 |       0 |       0 |      1 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        6 |        3 |        2 |        0 |       0 |        0 |        3 |        5 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |     20 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4091800 |     125 |     41 |     44 |     3 |    0 |     3 |    0 |    0 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |     42 |     83 |       4 |       3 |       5 |       0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        1 |        6 |        2 |        2 |       0 |        3 |        1 |        3 |        6 |        7 |        7 |       0 |        2 |        2 |        7 |        4 |        2 |        1 |       0 |        2 |        4 |        3 |        9 |        6 |        2 |       0 |        1 |        3 |        3 |        0 |        0 |        0 |       0 |        5 |        5 |        6 |        6 |        2 |        3 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      5 |      6 |      4 |      1 |      2 |     23 |      0 |      0 |      2 |      3 |      5 |      2 |      1 |      3 |     28 |      0 |      0 |      0 |      6 |      4 |      0 |      2 |      0 |     22 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4091900 |     453 |    126 |    233 |     7 |    0 |     3 |    2 |    0 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    218 |    235 |       4 |       8 |       5 |       0 |     10 |     11 |      3 |      3 |      3 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      3 |      3 |      4 |      1 |      2 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        0 |        5 |       10 |       11 |       13 |        8 |       0 |        6 |        6 |       21 |       26 |       13 |        7 |       0 |       10 |        5 |       24 |       41 |       17 |       20 |       0 |       11 |        8 |       25 |       37 |       16 |       19 |       0 |        4 |        1 |        9 |       18 |        9 |        4 |       0 |        3 |        6 |        8 |       10 |        6 |        3 |       0 |        3 |        0 |        2 |        2 |        1 |        1 |       0 |        0 |        1 |        0 |        2 |        0 |        1 |       0 |      0 |      1 |     15 |     11 |     12 |      9 |     15 |     63 |      0 |      0 |      0 |     25 |     35 |     18 |     13 |     46 |     96 |      0 |      0 |      1 |     17 |     10 |      7 |      2 |      6 |     38 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4092000 |     474 |    144 |    236 |    13 |    0 |     2 |    3 |    2 |     1 |    0 |     73 |    0 |    0 |    0 |    0 |    235 |    239 |      12 |       8 |       5 |       1 |     15 |      8 |      1 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        5 |        9 |        9 |       14 |       13 |        7 |       1 |        6 |        5 |       15 |       33 |       14 |       12 |       1 |        6 |       17 |       20 |       31 |       26 |       25 |       0 |       10 |       11 |       20 |       27 |       21 |       21 |       1 |        5 |        3 |        9 |       13 |        5 |        5 |       0 |        7 |        5 |        4 |        9 |        4 |        4 |       0 |        1 |        4 |        3 |        0 |        4 |        0 |       0 |        1 |        0 |        2 |        6 |        0 |        0 |       0 |      0 |      1 |     23 |     23 |      7 |     12 |      6 |     72 |      0 |      0 |      1 |     25 |     49 |     13 |      8 |     13 |    127 |      0 |      0 |      0 |      6 |      9 |      7 |      1 |      2 |     48 |      0 |      0 |      0 |      2 |      8 |      1 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 4092100 |     926 |    270 |    410 |    23 |    0 |    13 |    6 |    2 |     6 |    0 |    196 |    0 |    0 |    0 |    0 |    386 |    540 |      41 |      35 |      11 |       1 |     18 |     15 |     13 |      4 |      1 |      0 |      2 |      0 |      1 |      4 |      3 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |       2 |       3 |       0 |       0 |      1 |      5 |      3 |      0 |        8 |       11 |       21 |       29 |       11 |       20 |       1 |        8 |       23 |       27 |       42 |       28 |       40 |       1 |        8 |       19 |       26 |       42 |       30 |       38 |       1 |       18 |       38 |       47 |       47 |       32 |       63 |       1 |       14 |       22 |       20 |       15 |       11 |       13 |       0 |       19 |       21 |       15 |       15 |       13 |       18 |       0 |        6 |        6 |        2 |        7 |        4 |        1 |       0 |        1 |        5 |        4 |        3 |        6 |        5 |       0 |      0 |      1 |     42 |     26 |     14 |     11 |      2 |    174 |      0 |      0 |      7 |     47 |     43 |     21 |     12 |     12 |    268 |      0 |      0 |      3 |     27 |     18 |      3 |      5 |      5 |    135 |      0 |      0 |      0 |      8 |     10 |      4 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 4092200 |     491 |    156 |    225 |    12 |    0 |     6 |    5 |    1 |     2 |    0 |     84 |    0 |    0 |    0 |    0 |    219 |    272 |       6 |      12 |       3 |       1 |      8 |     16 |     12 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      0 |      1 |      1 |        1 |        3 |       11 |       20 |       14 |        8 |       0 |        5 |        8 |       21 |       28 |       16 |       21 |       0 |        3 |       11 |       22 |       35 |       17 |       23 |       0 |        7 |       12 |       33 |       32 |       13 |       17 |       0 |        1 |        8 |       13 |        5 |        8 |        2 |       0 |        2 |        5 |       11 |       15 |        5 |        9 |       0 |        2 |        2 |        3 |        4 |        1 |        2 |       0 |        3 |        4 |        3 |        2 |        0 |        0 |       0 |      0 |      1 |     25 |     22 |     12 |     17 |     12 |     67 |      0 |      0 |      3 |     25 |     41 |     16 |     14 |     20 |    106 |      0 |      0 |      0 |     19 |     13 |      0 |      3 |      6 |     43 |      0 |      0 |      0 |      3 |      6 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4092300 |     323 |     68 |    192 |     2 |    0 |     6 |    1 |    0 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    166 |    157 |       3 |       0 |       2 |       0 |      5 |     15 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        2 |        3 |        6 |        4 |       10 |       0 |        0 |        3 |        7 |       13 |        8 |       12 |       0 |        5 |        9 |       14 |       28 |       16 |       28 |       0 |        6 |        3 |       18 |       18 |       17 |       29 |       1 |        4 |        6 |       10 |        5 |        2 |        4 |       1 |        4 |        3 |        5 |        3 |        1 |        5 |       0 |        1 |        2 |        2 |        1 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      9 |      7 |      3 |      0 |      4 |     45 |      0 |      0 |      3 |     15 |     39 |      5 |      8 |     10 |    112 |      0 |      0 |      0 |     11 |      5 |      1 |      1 |      1 |     34 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4092400 |     381 |     98 |    192 |    13 |    0 |     3 |    3 |    1 |     3 |    0 |     68 |    0 |    0 |    0 |    0 |    182 |    199 |      10 |      13 |       7 |       3 |      7 |      9 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        8 |        6 |       10 |        7 |       2 |        4 |        7 |       10 |       16 |       13 |       10 |       1 |       13 |       10 |       19 |        8 |       22 |       23 |       2 |        7 |       17 |       18 |       16 |       17 |       15 |       5 |        4 |        6 |        7 |        9 |        6 |        2 |       0 |        7 |        7 |        6 |        6 |        5 |        2 |       1 |        4 |        4 |        3 |        1 |        0 |        2 |       0 |        1 |        0 |        2 |        3 |        1 |        2 |       0 |      0 |      2 |     12 |     12 |      7 |      1 |      4 |     60 |      0 |      0 |      1 |     16 |     20 |      2 |      9 |      5 |    139 |      0 |      0 |      2 |     12 |      6 |      7 |      3 |      1 |     37 |      0 |      0 |      0 |      1 |      5 |      4 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4092500 |     418 |    117 |    214 |     8 |    0 |     1 |    3 |    2 |     4 |    0 |     69 |    0 |    0 |    0 |    0 |    200 |    218 |      14 |      14 |       3 |       0 |      4 |     10 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      3 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        3 |        8 |       12 |        7 |        7 |      13 |        1 |        5 |       18 |       14 |        8 |       12 |       7 |        5 |        5 |       19 |       25 |       11 |       25 |      11 |        7 |        4 |       18 |       24 |       15 |       21 |      24 |        7 |       11 |        6 |        5 |        3 |        2 |       0 |        6 |        6 |        7 |       10 |        4 |        0 |       2 |        2 |        4 |        2 |        1 |        1 |        3 |       0 |        0 |        2 |        0 |        1 |        1 |        1 |       0 |      0 |      0 |     14 |     15 |      5 |     10 |      9 |     64 |      0 |      0 |      2 |     11 |     25 |     16 |      7 |     12 |    141 |      0 |      0 |      0 |     12 |     11 |      5 |      4 |      6 |     31 |      0 |      0 |      0 |      3 |      2 |      1 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 4092600 |     194 |     46 |    102 |     2 |    0 |     1 |    1 |    0 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |     89 |    105 |       3 |      14 |       5 |       0 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        1 |        6 |        3 |        4 |       0 |        1 |        3 |        4 |       10 |        3 |        6 |       0 |        4 |        6 |        8 |       10 |       11 |        7 |       0 |        3 |        7 |        9 |       12 |        4 |       21 |       0 |        2 |        6 |        2 |        5 |        4 |        3 |       0 |        2 |        3 |        6 |        6 |        3 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     10 |      3 |      2 |      1 |      2 |     28 |      0 |      0 |      2 |     11 |     11 |      4 |      1 |      2 |     71 |      0 |      0 |      1 |      9 |      4 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4093000 |     819 |    250 |    372 |    21 |    0 |     5 |    5 |    3 |     5 |    0 |    158 |    0 |    0 |    0 |    0 |    392 |    427 |      21 |      24 |      13 |       2 |     11 |     20 |      5 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      2 |      3 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      2 |       10 |       24 |       14 |       22 |       12 |       20 |       1 |       12 |       32 |       20 |       35 |       22 |       24 |       2 |       18 |       33 |       40 |       36 |       32 |       24 |       2 |       15 |       42 |       28 |       46 |       23 |       32 |       1 |       17 |       21 |        6 |       18 |       11 |        7 |       0 |       15 |       20 |        9 |       14 |       13 |        6 |       1 |        3 |       13 |        2 |        4 |        0 |        2 |       0 |        3 |        5 |        3 |        2 |        0 |        2 |       0 |      0 |      4 |     26 |     25 |     21 |      3 |      8 |    163 |      0 |      0 |      4 |     37 |     33 |     17 |      6 |      7 |    268 |      0 |      0 |      2 |     14 |      9 |      4 |      2 |      2 |    125 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 4093100 |     549 |    145 |    297 |     9 |    0 |     5 |    4 |    2 |     2 |    0 |     85 |    0 |    0 |    0 |    0 |    261 |    288 |      15 |       6 |       6 |       1 |      5 |      8 |      8 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        1 |        4 |        9 |       15 |       14 |       10 |       8 |        5 |        6 |       14 |       27 |       15 |       14 |       3 |       12 |        8 |       18 |       41 |       23 |       35 |       8 |       11 |       11 |       17 |       46 |       16 |       39 |      12 |        6 |        2 |        8 |       15 |        3 |        7 |       2 |        8 |        5 |        5 |       10 |        8 |        5 |       1 |        2 |        2 |        4 |        3 |        1 |        0 |       0 |        0 |        3 |        4 |        2 |        1 |        0 |       0 |      0 |      2 |     16 |     34 |      6 |      5 |      9 |     73 |      0 |      0 |      2 |     29 |     64 |     20 |     17 |     18 |    147 |      0 |      0 |      0 |     11 |     16 |      1 |      1 |      2 |     54 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4093200 |     176 |     29 |    117 |     1 |    0 |     2 |    0 |    0 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |     82 |     94 |       3 |       5 |       1 |       0 |      3 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        1 |        1 |        3 |        2 |       0 |        0 |        2 |        2 |        4 |        3 |        5 |       3 |        3 |        4 |       11 |        7 |        7 |       16 |      11 |        2 |        1 |        7 |        9 |        5 |       19 |      15 |        0 |        1 |        1 |        4 |        3 |        2 |       1 |        3 |        0 |        1 |        5 |        2 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      2 |      3 |      4 |      0 |      2 |     18 |      0 |      0 |      0 |      6 |     14 |      4 |      1 |      9 |     83 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      1 |     17 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4093300 |      72 |     15 |     42 |     5 |    0 |     1 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     37 |     35 |       1 |       0 |       0 |       0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        2 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        5 |       0 |        5 |        1 |        2 |        5 |        1 |        5 |       0 |        2 |        2 |        4 |        9 |        2 |        4 |       0 |        1 |        1 |        1 |        4 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      2 |      4 |      0 |      1 |      0 |      8 |      0 |      0 |      0 |      5 |      4 |      2 |      3 |      0 |     28 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4093400 |    1252 |    294 |    626 |    32 |    0 |     6 |    7 |    3 |     5 |    0 |    279 |    0 |    0 |    0 |    0 |    579 |    673 |      30 |      37 |      13 |       2 |     23 |     25 |     12 |      1 |      0 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |      6 |      3 |      3 |      0 |      2 |      6 |      5 |      0 |       6 |       2 |       5 |       0 |      2 |      4 |      4 |      0 |        2 |       27 |       36 |       23 |       11 |       12 |       0 |        9 |       57 |       51 |       30 |       26 |        9 |       1 |       12 |       86 |      102 |       34 |       40 |       35 |       0 |        9 |       90 |      100 |       42 |       46 |       30 |       0 |        7 |       44 |       38 |       20 |       13 |       11 |       0 |       10 |       45 |       45 |       28 |       10 |        8 |       0 |        3 |        9 |        9 |        1 |        4 |        0 |       0 |        2 |        8 |       11 |        5 |        0 |        1 |       0 |      0 |      5 |     12 |      0 |      0 |      0 |      0 |    277 |      0 |      0 |      4 |     25 |      6 |      0 |      1 |      0 |    590 |      0 |      0 |      2 |      4 |      2 |      0 |      2 |      0 |    269 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     52 |      0 |     37 | s03      | R    |
| 4093500 |     317 |     85 |    138 |    11 |    0 |     3 |    4 |    1 |     1 |    0 |     74 |    0 |    0 |    0 |    0 |    151 |    166 |       5 |       4 |       6 |       0 |      4 |      4 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      1 |      0 |        0 |        4 |       11 |       11 |        5 |        3 |       1 |        2 |        9 |       13 |       17 |        5 |        4 |       0 |        2 |        8 |       26 |       25 |       12 |        0 |       1 |        2 |       12 |       24 |       16 |        8 |        2 |       0 |        3 |        6 |       17 |        6 |        1 |        2 |       0 |        3 |       10 |       17 |        6 |        2 |        1 |       0 |        2 |        2 |        3 |        0 |        0 |        0 |       0 |        2 |        3 |        5 |        2 |        1 |        0 |       0 |      0 |      1 |     13 |     10 |      9 |      5 |      6 |     41 |      0 |      0 |      1 |     20 |     19 |      3 |      6 |     12 |     77 |      0 |      0 |      2 |     11 |      6 |      5 |      1 |      1 |     48 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4093700 |     292 |     76 |    144 |    10 |    0 |     2 |    2 |    0 |     2 |    0 |     56 |    0 |    0 |    0 |    0 |    141 |    151 |      12 |       9 |       3 |       3 |      8 |      6 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |       10 |        7 |        8 |        3 |        4 |       0 |        3 |       11 |        8 |       12 |        4 |        5 |       0 |       12 |        9 |       13 |       17 |        9 |        9 |       0 |       12 |       12 |       19 |       20 |        6 |        6 |       0 |        5 |        7 |        5 |       10 |        2 |        2 |       0 |        3 |        8 |        2 |        7 |        2 |        3 |       0 |        0 |        5 |        0 |        1 |        2 |        0 |       0 |        3 |        3 |        1 |        0 |        0 |        1 |       0 |      0 |      1 |      9 |      5 |      1 |      3 |     11 |     46 |      0 |      0 |      0 |     11 |     24 |      2 |      2 |     19 |     86 |      0 |      0 |      0 |      8 |      6 |      5 |      0 |      2 |     35 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4093900 |      53 |     19 |     28 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     25 |     28 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        3 |        1 |        1 |       0 |        0 |        1 |        6 |        2 |        1 |        1 |       1 |        2 |        1 |        1 |        2 |        6 |        3 |       1 |        0 |        1 |        1 |        3 |        3 |        4 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      5 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      1 |      0 |      4 |      2 |      1 |     20 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4094000 |     386 |    149 |    154 |     5 |    0 |     5 |    3 |    1 |     5 |    0 |     64 |    0 |    0 |    0 |    0 |    175 |    211 |      26 |      19 |       2 |       1 |      7 |      4 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      6 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      3 |      0 |      0 |        5 |        3 |       15 |       22 |       11 |        7 |       2 |        7 |       10 |       17 |       19 |       16 |        9 |       6 |        4 |        3 |       14 |       16 |       12 |       10 |       6 |        6 |        9 |       17 |       26 |        9 |       16 |       6 |        4 |        4 |       11 |       10 |        1 |        2 |       1 |        5 |        7 |        5 |        7 |        5 |        2 |       0 |        0 |        3 |        3 |        6 |        0 |        0 |       0 |        3 |        0 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |     14 |     27 |     12 |      5 |      6 |     85 |      0 |      0 |      2 |     12 |     25 |     17 |      5 |      3 |     90 |      0 |      0 |      1 |      8 |      6 |      2 |      5 |      1 |     41 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4094100 |     449 |    113 |    246 |    11 |    0 |     2 |    2 |    2 |     4 |    0 |     69 |    0 |    0 |    0 |    0 |    216 |    233 |      12 |       2 |       4 |       0 |      5 |     14 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        6 |        2 |        5 |       15 |        8 |        9 |       5 |        4 |        3 |       10 |       21 |        7 |        9 |       9 |       14 |        5 |       25 |       32 |       15 |       26 |      11 |        7 |       10 |       14 |       24 |       12 |       32 |      19 |        2 |        4 |        3 |        6 |        2 |        7 |       2 |        7 |        8 |        4 |        9 |        6 |        6 |       3 |        1 |        2 |        4 |        2 |        2 |        1 |       0 |        0 |        0 |        4 |        4 |        0 |        1 |       0 |      0 |      0 |     15 |     18 |      7 |      3 |      8 |     62 |      0 |      0 |      3 |     20 |     27 |     15 |      6 |      7 |    168 |      0 |      0 |      1 |      8 |      9 |      1 |      1 |      0 |     49 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4094200 |     403 |    141 |    182 |    10 |    0 |     0 |    3 |    1 |     3 |    0 |     63 |    0 |    0 |    0 |    0 |    191 |    212 |      21 |      13 |       3 |       3 |      7 |      1 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      2 |      0 |        1 |        7 |        4 |       15 |        9 |       10 |       7 |        3 |       10 |       11 |       22 |       15 |       13 |      14 |        7 |        8 |       17 |       24 |       17 |       16 |      10 |        4 |       11 |       12 |       17 |       13 |       19 |       7 |        7 |        6 |        4 |        7 |        2 |        4 |       0 |        8 |        8 |        6 |        5 |        3 |        3 |       0 |        3 |        1 |        2 |        0 |        2 |        1 |       0 |        2 |        1 |        2 |        0 |        2 |        1 |       0 |      0 |      2 |      8 |     20 |     10 |      0 |      4 |     97 |      0 |      0 |      2 |     13 |     22 |      8 |      1 |     11 |    125 |      0 |      0 |      1 |      7 |      6 |      4 |      1 |      0 |     44 |      0 |      0 |      0 |      3 |      2 |      1 |      2 |      0 |      9 |      0 |     37 | s03      | R    |
| 4094400 |     509 |    121 |    278 |    13 |    0 |     1 |    4 |    0 |     1 |    0 |     91 |    0 |    0 |    0 |    0 |    251 |    258 |      11 |      18 |       5 |       0 |      7 |     15 |      5 |      1 |      0 |      2 |      2 |      0 |      0 |      3 |      0 |      0 |      2 |      5 |      3 |      0 |      4 |      2 |      2 |      0 |       1 |       3 |       1 |       0 |      2 |      4 |      2 |      0 |        1 |        8 |       22 |       12 |        5 |        4 |       0 |        1 |       11 |       34 |       13 |        6 |        4 |       0 |        8 |       20 |       58 |       33 |       16 |       10 |       0 |        6 |       24 |       55 |       26 |       11 |       11 |       0 |        6 |        5 |       19 |        6 |        0 |        8 |       0 |        2 |        9 |       16 |       11 |        6 |        3 |       0 |        2 |        1 |        4 |        1 |        1 |        1 |       0 |        3 |        1 |        3 |        1 |        1 |        0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |    120 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |    277 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     91 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 4094600 |       9 |      3 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4094800 |     269 |     90 |    113 |     5 |    0 |     1 |    2 |    0 |     2 |    0 |     56 |    0 |    0 |    0 |    0 |     95 |    174 |       5 |       8 |       6 |       0 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        4 |        2 |        3 |        4 |        6 |       0 |        3 |        9 |       13 |       22 |       13 |        9 |       0 |        4 |        4 |       11 |        8 |        8 |        9 |       0 |        4 |       16 |       11 |       13 |       11 |       14 |       0 |        4 |        6 |        4 |        3 |        4 |        3 |       0 |        1 |        3 |        7 |       11 |        7 |        3 |       0 |        1 |        3 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     13 |     17 |      6 |      3 |      5 |     46 |      0 |      0 |      0 |     19 |     15 |      0 |      2 |      6 |     71 |      0 |      0 |      0 |     10 |      5 |      3 |      2 |      0 |     36 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4094900 |     667 |    192 |    322 |    15 |    0 |     8 |    3 |    1 |     5 |    0 |    121 |    0 |    0 |    0 |    0 |    314 |    353 |       9 |      13 |       3 |       0 |     15 |     11 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        3 |        6 |       13 |       27 |       24 |       10 |       0 |        4 |       12 |       22 |       31 |       21 |       18 |       1 |       15 |       12 |       30 |       48 |       31 |       20 |       0 |       13 |        7 |       47 |       45 |       21 |       33 |       0 |        9 |       10 |       17 |       11 |       11 |        2 |       0 |        6 |        9 |       20 |       15 |        8 |        3 |       0 |        3 |        3 |        6 |        1 |        2 |        0 |       0 |        0 |        4 |        3 |        6 |        1 |        3 |       0 |      0 |      1 |     38 |     25 |      6 |      9 |     18 |     95 |      0 |      0 |      5 |     20 |     58 |     19 |     16 |     23 |    181 |      0 |      0 |      1 |     19 |     19 |      6 |      0 |      5 |     71 |      0 |      0 |      0 |      7 |      7 |      4 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4095000 |     807 |    203 |    405 |    19 |    0 |     4 |    7 |    4 |     2 |    0 |    163 |    0 |    0 |    0 |    0 |    367 |    440 |      26 |      22 |      16 |       1 |      4 |      7 |      6 |      1 |      2 |      0 |      2 |      0 |      4 |      0 |      2 |      0 |      4 |      2 |      3 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      0 |      0 |        4 |        9 |       19 |       22 |       10 |       10 |       0 |        5 |       18 |       28 |       50 |       14 |       13 |       1 |       20 |       23 |       54 |       62 |       20 |       16 |       1 |       13 |       30 |       62 |       57 |       22 |       24 |       1 |        7 |       14 |       22 |       23 |       10 |        6 |       0 |        9 |       15 |       31 |       16 |        6 |        4 |       0 |        4 |        3 |        2 |        3 |        3 |        0 |       0 |        3 |        6 |        4 |        4 |        4 |        0 |       0 |      0 |      3 |     21 |     29 |      6 |      2 |     10 |    132 |      0 |      0 |      6 |     37 |     60 |     13 |     10 |     27 |    252 |      0 |      0 |      0 |     21 |     14 |      5 |      1 |      6 |    116 |      0 |      0 |      0 |      5 |      5 |      2 |      1 |      1 |     22 |      0 |     37 | s03      | R    |
| 4095100 |     530 |    158 |    270 |     2 |    0 |     8 |    3 |    2 |     7 |    0 |     80 |    0 |    0 |    0 |    0 |    266 |    264 |      20 |      17 |      12 |       1 |      6 |     11 |     12 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        7 |       10 |       17 |        8 |       11 |       9 |        1 |        8 |       12 |       29 |       12 |       16 |      15 |       11 |        9 |       29 |       39 |       18 |       25 |      11 |        3 |       12 |       28 |       32 |       15 |       21 |      17 |        5 |        2 |        5 |       25 |        4 |        2 |       2 |        5 |        5 |        9 |       12 |        1 |        2 |       1 |        6 |        2 |        3 |        2 |        0 |        1 |       0 |        1 |        3 |        2 |        1 |        0 |        1 |       0 |      0 |      1 |     18 |     21 |     15 |      7 |      4 |     92 |      0 |      0 |      2 |     40 |     33 |     10 |     10 |     20 |    155 |      0 |      0 |      1 |     13 |      8 |      5 |      2 |      2 |     49 |      0 |      0 |      1 |      2 |      7 |      1 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 4095200 |      52 |      9 |     34 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     25 |     27 |       0 |       0 |       0 |       0 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        3 |        3 |        0 |        0 |       0 |        0 |        0 |        8 |        5 |        2 |        3 |       0 |        1 |        0 |        8 |        3 |        1 |        3 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4095300 |     266 |     51 |    163 |     6 |    0 |     0 |    2 |    0 |     2 |    0 |     42 |    0 |    0 |    0 |    0 |    131 |    135 |       2 |       5 |       0 |       0 |     11 |     11 |      4 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        6 |       10 |        4 |        1 |       0 |        2 |        2 |        6 |       17 |        1 |        1 |       0 |        3 |        4 |       30 |       30 |        6 |        5 |       0 |        7 |        5 |       38 |       26 |        2 |        7 |       0 |        2 |        3 |        5 |        9 |        5 |        0 |       0 |        1 |        0 |        5 |        8 |        4 |        0 |       0 |        0 |        1 |        4 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     15 |      6 |      0 |      0 |      0 |     29 |      0 |      0 |      2 |     60 |     18 |      1 |      0 |      0 |     82 |      0 |      0 |      0 |     12 |      3 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4095600 |     176 |     51 |     89 |     5 |    0 |     1 |    0 |    0 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     90 |     86 |       7 |       6 |       5 |       0 |      2 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      2 |      0 |      0 |        1 |        5 |        5 |        3 |        6 |        2 |       1 |        0 |       11 |        9 |        3 |        2 |        3 |       0 |        2 |       14 |       14 |        8 |        5 |        3 |       0 |        2 |        9 |       16 |        4 |        3 |        9 |       0 |        1 |        7 |        7 |        2 |        1 |        0 |       0 |        2 |        5 |        3 |        1 |        1 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |     46 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |     85 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4095900 |     598 |    163 |    294 |    11 |    0 |    14 |    5 |    2 |     3 |    0 |    106 |    0 |    0 |    0 |    0 |    293 |    305 |       8 |      11 |       1 |       0 |      9 |      6 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      3 |      3 |      2 |      0 |      3 |      0 |      1 |      1 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        9 |        8 |       11 |       17 |        9 |       1 |        5 |        7 |       16 |       35 |       25 |       14 |       2 |       10 |        7 |       33 |       41 |       30 |       32 |       1 |        8 |       13 |       33 |       29 |       26 |       31 |       0 |        3 |        7 |       12 |       15 |        9 |       10 |       0 |        6 |        9 |       14 |        9 |       10 |        2 |       0 |        2 |        4 |        6 |        5 |        4 |        3 |       0 |        0 |        1 |        2 |        4 |        3 |        1 |       0 |      0 |      0 |     15 |     28 |     15 |      4 |      5 |     96 |      0 |      0 |      4 |     28 |     45 |     27 |      3 |     14 |    173 |      0 |      0 |      3 |     17 |     12 |      7 |      5 |      4 |     58 |      0 |      0 |      0 |      2 |     18 |      2 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4096000 |     784 |    215 |    428 |    14 |    0 |     6 |    7 |    1 |     5 |    0 |    108 |    0 |    0 |    0 |    0 |    376 |    408 |       9 |      13 |       4 |       1 |     14 |     18 |      7 |      4 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      3 |      7 |      1 |      0 |      1 |      3 |      0 |       1 |       0 |       0 |       0 |      2 |      3 |      2 |      0 |        4 |        3 |       22 |       20 |        7 |       27 |       0 |        3 |       10 |       34 |       27 |       15 |       42 |       1 |        7 |       10 |       68 |       58 |       19 |       55 |       0 |        5 |       24 |       58 |       43 |       17 |       64 |       0 |        6 |       10 |       18 |       13 |        9 |        4 |       0 |        2 |        8 |       16 |       10 |        7 |        5 |       0 |        1 |        1 |        4 |        3 |        1 |        6 |       0 |        0 |        5 |        6 |        2 |        0 |        4 |       0 |      0 |      0 |     47 |     36 |      9 |      2 |      5 |    116 |      0 |      0 |      3 |    107 |     60 |      4 |      6 |     10 |    238 |      0 |      0 |      0 |     23 |      8 |      2 |      0 |      1 |     74 |      0 |      0 |      1 |     10 |      5 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4096200 |     254 |     60 |    147 |     4 |    0 |     2 |    1 |    1 |     3 |    0 |     36 |    0 |    0 |    0 |    0 |    124 |    130 |       4 |       6 |       2 |       1 |      3 |      8 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        4 |        5 |        4 |        5 |        7 |       0 |        4 |        5 |        3 |       10 |       10 |        3 |       0 |        5 |       14 |       16 |       12 |       11 |       14 |       0 |        4 |        8 |       16 |       13 |       17 |       17 |       0 |        5 |        1 |        4 |        5 |        2 |        2 |       0 |        4 |        1 |        5 |        4 |        2 |        1 |       0 |        0 |        3 |        4 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      2 |      7 |      5 |      3 |      3 |      5 |     35 |      0 |      0 |      1 |     19 |     16 |     12 |      3 |      3 |     93 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      3 |     26 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4096400 |     903 |    247 |    459 |    26 |    0 |     7 |    5 |    1 |     2 |    0 |    156 |    0 |    0 |    0 |    0 |    395 |    508 |      14 |      14 |       5 |       0 |     31 |     26 |     14 |      2 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      1 |      0 |      1 |      5 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        3 |        6 |       17 |       29 |       29 |       1 |        5 |        9 |       19 |       32 |       47 |       46 |       0 |       10 |       12 |       29 |       47 |       59 |       58 |       2 |       13 |       18 |       28 |       53 |       53 |       77 |       0 |        7 |        5 |       11 |       12 |       18 |       13 |       1 |       16 |        8 |       19 |       14 |       15 |       17 |       0 |        3 |        2 |        5 |        4 |        5 |        3 |       0 |        2 |        4 |        1 |        3 |        8 |        1 |       0 |      0 |      1 |     27 |     38 |     18 |     17 |     17 |    129 |      0 |      0 |      3 |     71 |     78 |     21 |     20 |     31 |    235 |      0 |      0 |      1 |     27 |     21 |      2 |      0 |      6 |     99 |      0 |      0 |      0 |      4 |     12 |      3 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4096500 |     970 |    288 |    461 |    16 |    0 |     3 |    4 |    3 |     8 |    0 |    187 |    0 |    0 |    0 |    0 |    446 |    524 |      11 |      34 |      14 |       0 |     20 |     17 |     13 |      5 |      0 |      3 |      2 |      0 |      4 |      4 |      1 |      2 |      6 |      9 |      4 |      0 |      0 |      2 |      2 |      0 |       0 |       4 |       0 |       0 |      0 |      6 |      1 |      0 |       14 |       18 |       23 |       31 |       13 |       11 |       0 |       20 |       35 |       40 |       52 |       16 |       15 |       0 |       21 |       38 |       70 |       75 |       19 |       10 |       0 |       18 |       43 |       72 |       63 |       20 |       11 |       1 |       10 |       19 |       27 |       19 |        8 |        5 |       0 |       18 |       22 |       26 |       20 |        8 |        5 |       0 |        2 |        4 |        2 |        5 |        1 |        1 |       0 |        3 |        6 |        4 |        4 |        1 |        1 |       0 |      0 |      4 |     48 |     19 |      6 |      4 |     27 |    180 |      0 |      0 |      5 |     89 |     51 |     15 |     12 |     46 |    243 |      0 |      0 |      3 |     23 |     21 |      4 |      3 |     10 |    123 |      0 |      0 |      0 |      2 |      7 |      1 |      0 |      3 |     21 |      0 |     37 | s03      | R    |
| 4096600 |     607 |    206 |    235 |    23 |    0 |     5 |    2 |    1 |     3 |    0 |    132 |    0 |    0 |    0 |    0 |    287 |    320 |       9 |       7 |       4 |       1 |     30 |     10 |     10 |      2 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |      1 |      3 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      2 |      1 |      0 |        6 |        7 |       18 |       24 |       12 |       11 |       0 |        6 |       16 |       33 |       37 |       21 |       15 |       0 |       11 |       13 |       20 |       35 |       22 |       18 |       1 |        8 |        7 |       27 |       30 |       21 |       20 |       2 |        4 |       13 |       16 |       20 |       13 |        5 |       0 |        7 |       10 |       18 |       14 |        8 |        4 |       0 |        1 |        5 |        5 |        4 |        3 |        0 |       0 |        2 |        3 |        5 |        3 |        0 |        3 |       0 |      0 |      1 |     30 |     38 |     11 |      5 |     12 |    109 |      0 |      0 |      2 |     29 |     31 |     18 |     11 |     16 |    128 |      0 |      0 |      1 |     18 |     26 |      6 |      2 |      4 |     75 |      0 |      0 |      0 |      3 |      7 |      3 |      1 |      0 |     20 |      0 |     37 | s03      | R    |
| 4096700 |     587 |    153 |    287 |    12 |    0 |     3 |    2 |    2 |     4 |    0 |    124 |    0 |    0 |    0 |    0 |    284 |    303 |       9 |      14 |       2 |       0 |     10 |     18 |      5 |      2 |      0 |      2 |      2 |      0 |      5 |      4 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      2 |      0 |        2 |        9 |       14 |       18 |        9 |        8 |       1 |        1 |       12 |       22 |       25 |       18 |       14 |       0 |        7 |       16 |       30 |       37 |       36 |       27 |       1 |        1 |       15 |       31 |       36 |       28 |       22 |       0 |        4 |       10 |       13 |       14 |       12 |        5 |       0 |        8 |       12 |       17 |       11 |       12 |        6 |       0 |        1 |        1 |        3 |        4 |        0 |        2 |       0 |        2 |        1 |        3 |        4 |        1 |        1 |       0 |      0 |      1 |     29 |     23 |      7 |      4 |      4 |     85 |      0 |      0 |      2 |     33 |     48 |     18 |     17 |     11 |    158 |      0 |      0 |      0 |     18 |     14 |      3 |      4 |      1 |     84 |      0 |      0 |      1 |      3 |      7 |      3 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4096800 |     817 |    225 |    408 |    20 |    0 |     5 |    6 |    2 |     8 |    0 |    143 |    0 |    0 |    0 |    0 |    366 |    451 |       4 |       8 |       3 |       1 |     48 |     33 |     29 |      3 |      0 |      1 |      1 |      1 |      0 |      3 |      0 |      1 |      1 |      1 |      4 |      0 |      2 |      0 |      4 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        5 |       12 |       11 |       15 |       37 |       0 |        5 |       19 |       12 |       32 |       29 |       45 |       0 |        5 |       11 |       37 |       37 |       41 |       61 |       1 |        5 |       20 |       28 |       46 |       53 |       62 |       1 |        2 |       11 |       11 |       12 |       13 |       22 |       0 |        6 |        7 |       14 |        9 |       20 |       16 |       0 |        0 |        3 |        2 |        3 |        7 |        4 |       0 |        2 |        3 |        0 |        6 |        6 |        5 |       0 |      0 |      2 |     27 |     48 |     18 |      9 |     10 |    111 |      0 |      0 |      1 |     57 |     85 |     16 |     11 |     12 |    226 |      0 |      0 |      2 |     25 |     17 |      4 |      1 |      4 |     90 |      0 |      0 |      1 |      2 |      4 |      5 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 4096900 |     878 |    248 |    360 |    16 |    0 |     3 |    6 |    0 |    10 |    0 |    235 |    0 |    0 |    0 |    0 |    422 |    456 |      13 |      17 |      19 |       4 |     22 |     20 |     15 |      3 |      0 |      0 |      1 |      0 |      0 |      2 |      4 |      0 |      2 |      6 |      4 |      0 |      3 |      1 |      1 |      0 |       0 |       1 |       0 |       0 |      1 |      4 |      2 |      0 |        5 |       18 |       24 |       23 |       18 |       12 |       0 |        8 |       23 |       36 |       40 |       24 |       17 |       0 |        4 |       38 |       51 |       50 |       31 |       20 |       0 |        5 |       28 |       48 |       38 |       26 |       21 |       0 |        8 |       22 |       37 |       23 |       18 |        6 |       0 |       12 |       28 |       36 |       24 |       16 |        5 |       0 |        2 |        4 |        5 |        3 |        0 |        0 |       0 |        2 |        4 |        6 |        3 |        5 |        1 |       0 |      0 |      3 |     42 |     31 |     12 |      8 |      2 |    150 |      0 |      0 |      4 |     62 |     42 |     20 |     17 |      3 |    212 |      0 |      0 |      5 |     31 |     24 |     13 |      2 |      3 |    157 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     30 |      0 |     37 | s03      | R    |
| 4097100 |     136 |     21 |     81 |     3 |    0 |     0 |    1 |    1 |     1 |    0 |     28 |    0 |    0 |    0 |    0 |     70 |     66 |       0 |       3 |       1 |       0 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        0 |        1 |        5 |        0 |        1 |       0 |        0 |        0 |        5 |        6 |        2 |        0 |       0 |        1 |        1 |       11 |       15 |        6 |       11 |       0 |        4 |        4 |        6 |       10 |        4 |        8 |       0 |        1 |        6 |        2 |        1 |        2 |        2 |       0 |        1 |        2 |        5 |        3 |        1 |        2 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |     14 |      0 |      0 |      0 |      6 |     18 |      0 |      3 |      2 |     52 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |     20 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4097300 |     476 |    145 |    196 |    13 |    0 |     8 |    3 |    0 |     5 |    0 |    106 |    0 |    0 |    0 |    0 |    218 |    258 |       8 |       7 |       5 |       0 |     11 |      9 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        6 |        6 |       11 |       12 |       13 |       1 |        6 |        9 |       15 |       25 |       16 |       20 |       0 |        5 |       15 |       16 |       27 |       13 |       25 |       0 |        5 |       14 |       22 |       19 |       15 |       19 |       1 |        3 |       10 |       12 |       14 |        5 |        5 |       0 |        4 |        7 |       10 |       16 |        9 |       10 |       1 |        2 |        3 |        2 |        2 |        3 |        2 |       0 |        0 |        5 |        2 |        2 |        3 |        3 |       0 |      0 |      2 |     18 |     13 |      4 |      5 |      3 |    100 |      0 |      0 |      2 |     29 |     18 |      4 |      3 |      5 |    135 |      0 |      0 |      0 |     15 |      5 |      3 |      3 |      6 |     74 |      0 |      0 |      0 |      1 |      5 |      1 |      1 |      0 |     21 |      0 |     37 | s03      | R    |
| 4097400 |     275 |     96 |    111 |     3 |    0 |     0 |    1 |    0 |     1 |    0 |     63 |    0 |    0 |    0 |    0 |    125 |    150 |       5 |       8 |       0 |       0 |      9 |     12 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |      1 |      2 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        1 |        4 |        7 |       13 |       11 |       1 |        1 |        8 |        2 |       15 |       15 |       16 |       1 |        0 |        5 |        7 |       11 |       16 |       16 |       0 |        2 |        7 |       10 |        7 |       15 |       13 |       2 |        0 |        7 |       14 |        2 |        1 |        4 |       2 |        2 |        4 |        5 |        9 |        8 |        4 |       1 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      2 |      6 |     10 |      6 |      3 |      1 |     68 |      0 |      0 |      1 |     17 |     11 |      6 |      5 |      3 |     68 |      0 |      0 |      1 |      3 |      5 |      3 |      0 |      0 |     51 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4097500 |     118 |     45 |     37 |     3 |    0 |     0 |    2 |    1 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     42 |     76 |       2 |       0 |       3 |       0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        3 |        5 |        1 |        1 |       0 |        0 |        7 |        9 |        6 |        5 |        5 |       0 |        0 |        4 |        2 |        3 |        1 |        3 |       0 |        1 |        5 |        5 |        4 |        2 |        7 |       0 |        0 |        8 |        3 |        2 |        0 |        0 |       0 |        0 |        4 |        5 |        4 |        4 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      3 |      6 |      1 |      0 |     30 |      0 |      0 |      0 |      6 |      4 |      5 |      0 |      0 |     22 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |     22 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4097600 |     821 |    224 |    398 |    18 |    0 |     7 |    9 |    0 |     5 |    0 |    160 |    0 |    0 |    0 |    0 |    395 |    426 |      19 |       5 |      10 |       2 |     16 |     18 |      8 |      2 |      2 |      1 |      2 |      0 |      1 |      3 |      0 |      0 |      2 |      1 |      7 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      2 |      0 |      1 |       10 |        2 |       21 |       34 |       11 |        7 |       0 |       11 |        7 |       42 |       53 |       11 |       15 |       0 |        9 |        7 |       66 |       73 |       29 |       26 |       0 |       12 |       11 |       55 |       73 |       14 |       23 |       0 |       15 |        5 |       17 |       28 |       11 |        5 |       0 |       11 |        6 |       25 |       27 |        6 |        4 |       0 |        4 |        4 |        4 |        6 |        0 |        1 |       0 |        3 |        3 |        5 |        7 |        0 |        2 |       0 |      0 |      1 |     28 |     69 |      6 |      2 |      8 |    110 |      0 |      0 |      4 |     49 |    153 |      5 |      8 |     16 |    163 |      0 |      0 |      2 |     24 |     29 |      3 |      1 |      8 |     93 |      0 |      0 |      0 |      4 |     11 |      2 |      1 |      0 |     21 |      0 |     37 | s03      | R    |
| 4097700 |     599 |    188 |    271 |    10 |    0 |     7 |    8 |    1 |     4 |    0 |    110 |    0 |    0 |    0 |    0 |    265 |    334 |       9 |      13 |       5 |       0 |     16 |     14 |      7 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      4 |      1 |      0 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        3 |       13 |       13 |       12 |       16 |       15 |       0 |        1 |       21 |       17 |       35 |       17 |       25 |       0 |        3 |       23 |       29 |       24 |       13 |       29 |       0 |        3 |       28 |       37 |       23 |       25 |       33 |       1 |        3 |       20 |       10 |        7 |        5 |        7 |       0 |        1 |       19 |       15 |       10 |        9 |        4 |       0 |        2 |        3 |        5 |        5 |        4 |        1 |       0 |        0 |        2 |        4 |        0 |        1 |        3 |       0 |      0 |      1 |     18 |     23 |     12 |      2 |      9 |    123 |      0 |      0 |      2 |     23 |     34 |      5 |      8 |      5 |    194 |      0 |      0 |      0 |     15 |     12 |      1 |      1 |      1 |     80 |      0 |      0 |      1 |      6 |      4 |      0 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 4097800 |     671 |    156 |    347 |     8 |    0 |     1 |    4 |    1 |     2 |    0 |    152 |    0 |    0 |    0 |    0 |    323 |    348 |       9 |      16 |       8 |       2 |     13 |     21 |      9 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      2 |      0 |      6 |      7 |      8 |      0 |      1 |      3 |      5 |      0 |       1 |       2 |       0 |       0 |      2 |      4 |      2 |      0 |        4 |        7 |       22 |       21 |       10 |       10 |       0 |        4 |       16 |       23 |       16 |       16 |        7 |       0 |        3 |       39 |       50 |       34 |       29 |       17 |       0 |        8 |       44 |       52 |       35 |       22 |       14 |       0 |        7 |        9 |       25 |       16 |        8 |        2 |       0 |        6 |       23 |       21 |       25 |        8 |        2 |       0 |        0 |        5 |        3 |        1 |        1 |        0 |       0 |        2 |        0 |        4 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    156 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |    344 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |    147 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4097900 |     532 |    176 |    220 |    11 |    0 |     5 |    3 |    0 |     2 |    0 |    115 |    0 |    0 |    0 |    0 |    234 |    298 |       9 |       8 |       7 |       1 |     17 |     17 |      9 |      3 |      1 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      5 |      0 |      1 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |       12 |        9 |        9 |       13 |       22 |       0 |        9 |       18 |       10 |       21 |       19 |       29 |       0 |        1 |       13 |       27 |       23 |        8 |       21 |       1 |        4 |       14 |       34 |       27 |       20 |       27 |       0 |        2 |        9 |       13 |       14 |       10 |       11 |       0 |        3 |       12 |       12 |       15 |        9 |        5 |       0 |        1 |        4 |        2 |        1 |        3 |        0 |       0 |        2 |        2 |        3 |        0 |        0 |        3 |       0 |      0 |      1 |     29 |     23 |     10 |     11 |      7 |     95 |      0 |      0 |      3 |     31 |     26 |      2 |     12 |      3 |    143 |      0 |      0 |      2 |     20 |      6 |      5 |      2 |      6 |     74 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4098000 |     586 |    161 |    296 |    21 |    0 |     2 |    4 |    2 |     4 |    0 |     96 |    0 |    0 |    0 |    0 |    287 |    299 |      11 |       9 |       4 |       3 |      9 |     12 |      6 |      2 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      9 |      3 |     10 |      2 |      1 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      5 |      0 |      0 |      0 |        2 |        5 |       15 |       18 |       13 |        5 |       2 |        6 |       12 |       27 |       31 |       14 |        8 |       3 |       14 |       13 |       54 |       46 |       22 |       16 |       0 |        5 |       16 |       47 |       33 |       13 |       16 |       1 |        9 |        6 |       12 |        9 |        7 |        5 |       0 |        3 |        5 |       17 |       14 |        6 |        3 |       0 |        5 |        2 |        1 |        4 |        1 |        1 |       0 |        2 |        1 |        6 |        7 |        0 |        3 |       0 |      0 |      2 |     26 |     18 |      8 |      0 |      6 |    101 |      0 |      0 |      2 |     47 |     46 |      5 |      9 |     12 |    175 |      0 |      0 |      0 |     23 |     10 |      1 |      0 |      3 |     59 |      0 |      0 |      0 |      6 |      5 |      3 |      0 |      1 |     18 |      0 |     37 | s03      | R    |
| 4098100 |     711 |    160 |    398 |    14 |    0 |     1 |    5 |    1 |     3 |    0 |    129 |    0 |    0 |    0 |    0 |    350 |    361 |       8 |      19 |       3 |       1 |     17 |     11 |     11 |      1 |      0 |      1 |      0 |      0 |      1 |      4 |      1 |      0 |      3 |      6 |      6 |      0 |      0 |      0 |      2 |      0 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        4 |        5 |       15 |       22 |        9 |        4 |       0 |        4 |        9 |       40 |       29 |       12 |        7 |       0 |        7 |       13 |       89 |       62 |       18 |       17 |       0 |        9 |       21 |       96 |       46 |        9 |       11 |       0 |        3 |        2 |       31 |       26 |        4 |        5 |       0 |        3 |       11 |       20 |       13 |        6 |        5 |       0 |        1 |        2 |        6 |        3 |        2 |        0 |       0 |        0 |        2 |        5 |        2 |        0 |        1 |       0 |      0 |      3 |     45 |      3 |      0 |      1 |      0 |    108 |      0 |      0 |     11 |    128 |      7 |      2 |      0 |      0 |    250 |      0 |      0 |      1 |     37 |      1 |      1 |      0 |      0 |     89 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4098200 |     381 |    119 |    170 |     7 |    0 |     2 |    1 |    1 |     0 |    0 |     81 |    0 |    0 |    0 |    0 |    176 |    205 |       6 |       6 |       2 |       1 |      7 |      9 |      2 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      3 |      0 |      2 |      0 |      5 |      0 |      2 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      3 |      1 |      2 |      1 |        5 |        1 |        9 |       15 |       12 |        3 |       1 |        8 |        7 |       15 |       21 |       14 |        6 |       2 |        4 |        8 |       22 |       22 |       19 |        5 |       1 |        4 |        9 |       25 |       26 |       12 |       11 |       2 |        8 |       11 |        4 |       10 |        5 |        4 |       0 |        6 |        7 |        7 |       13 |        3 |        3 |       0 |        3 |        2 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      1 |     20 |     16 |      2 |      3 |      6 |     71 |      0 |      0 |      1 |     19 |     33 |      6 |      6 |      8 |     97 |      0 |      0 |      1 |     10 |     10 |      4 |      3 |      3 |     50 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4098300 |     567 |    169 |    279 |     9 |    0 |     2 |    3 |    3 |     8 |    0 |     94 |    0 |    0 |    0 |    0 |    273 |    294 |       8 |      10 |       5 |       2 |     11 |     13 |      8 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        5 |        4 |       11 |       25 |        7 |       10 |       1 |        8 |        7 |       20 |       34 |       16 |       20 |       1 |        6 |       11 |       29 |       34 |       35 |       27 |       3 |        9 |        8 |       25 |       27 |       27 |       36 |       2 |        4 |        2 |        8 |       14 |       12 |        8 |       1 |        6 |       10 |        6 |        7 |        9 |        7 |       0 |        2 |        5 |        2 |        4 |        2 |        1 |       0 |        0 |        0 |        2 |        5 |        0 |        2 |       0 |      0 |      0 |     18 |     28 |     17 |      4 |      8 |     94 |      0 |      0 |      0 |     28 |     51 |      9 |     16 |     20 |    155 |      0 |      0 |      0 |     18 |      8 |      2 |      0 |      5 |     61 |      0 |      0 |      0 |      9 |      3 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4098400 |     417 |    105 |    224 |     7 |    0 |     2 |    3 |    0 |     1 |    0 |     75 |    0 |    0 |    0 |    0 |    200 |    217 |       5 |       6 |       3 |       1 |     16 |     16 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        5 |        2 |        9 |       13 |        8 |        9 |       1 |        7 |        5 |        8 |       14 |       12 |       10 |       2 |        8 |        6 |       17 |       35 |       25 |       17 |       3 |        8 |        5 |       24 |       31 |       20 |       21 |       4 |        5 |        3 |        6 |        8 |        9 |        3 |       0 |        6 |        2 |       12 |        7 |        7 |        5 |       2 |        1 |        0 |        3 |        0 |        2 |        2 |       0 |        1 |        2 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     15 |     10 |     12 |      8 |      0 |     60 |      0 |      0 |      1 |     16 |     43 |     11 |      6 |     14 |    133 |      0 |      0 |      0 |     13 |     11 |      5 |      0 |      6 |     40 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4098500 |     552 |    165 |    264 |    11 |    0 |     3 |    2 |    3 |     2 |    0 |    102 |    0 |    0 |    0 |    0 |    254 |    298 |      15 |       7 |       4 |       1 |     19 |     15 |      9 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      3 |      1 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        1 |        8 |       20 |       12 |       15 |       0 |        9 |        9 |       23 |       31 |       17 |       14 |       1 |        8 |        5 |       19 |       43 |       31 |       26 |       1 |        3 |        5 |       31 |       35 |       23 |       34 |       0 |        7 |        4 |       10 |       18 |       12 |        0 |       0 |        9 |        6 |       12 |       16 |        7 |        1 |       0 |        1 |        2 |        0 |        2 |        2 |        2 |       0 |        1 |        2 |        4 |        3 |        2 |        0 |       0 |      0 |      0 |     18 |     21 |     14 |      4 |     15 |     93 |      0 |      0 |      0 |     33 |     57 |     29 |      9 |      8 |    128 |      0 |      0 |      2 |     15 |     20 |      3 |      3 |      0 |     59 |      0 |      0 |      0 |      4 |      4 |      2 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4098600 |      42 |      5 |     30 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     19 |     23 |       0 |       0 |       0 |       0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        3 |        1 |        0 |        0 |       0 |        0 |        1 |        7 |        4 |        2 |        0 |       0 |        0 |        0 |        9 |        6 |        0 |        1 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     30 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4098700 |     623 |    173 |    322 |    11 |    0 |     0 |    3 |    0 |     3 |    0 |    111 |    0 |    0 |    0 |    0 |    285 |    338 |      11 |       6 |       4 |       0 |     24 |     15 |      7 |      2 |      0 |      2 |      3 |      0 |      0 |      1 |      0 |      0 |      6 |      5 |      6 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      4 |      2 |      0 |        3 |        4 |       12 |       24 |       13 |        9 |       0 |        3 |        9 |       28 |       45 |       14 |        8 |       1 |        9 |       12 |       57 |       50 |       14 |       18 |       0 |       13 |       14 |       61 |       43 |       14 |       16 |       1 |        2 |        6 |       12 |       19 |        6 |        7 |       0 |        5 |        9 |       18 |       15 |        8 |        4 |       0 |        2 |        0 |        1 |        5 |        0 |        0 |       0 |        0 |        0 |        1 |        7 |        1 |        0 |       0 |      0 |      0 |     19 |     20 |      5 |      1 |      9 |    119 |      0 |      0 |      1 |     19 |     29 |     10 |      6 |     14 |    243 |      0 |      0 |      1 |      9 |      8 |      1 |      0 |      1 |     91 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |     12 |      0 |     37 | s03      | R    |
| 4098800 |     814 |    217 |    418 |    13 |    0 |     4 |    3 |    1 |     0 |    0 |    158 |    0 |    0 |    0 |    0 |    377 |    437 |      12 |      23 |       4 |       1 |     22 |     19 |      8 |      0 |      5 |      1 |      1 |      0 |      1 |      2 |      0 |      0 |      7 |      3 |     12 |      1 |      1 |      2 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      1 |      0 |        3 |        6 |       26 |       23 |       11 |       17 |       1 |        4 |       17 |       48 |       31 |       11 |       19 |       0 |        9 |       25 |       87 |       45 |       25 |       11 |       0 |        5 |       26 |       94 |       43 |       24 |       22 |       2 |        6 |        6 |       28 |       25 |        6 |        5 |       0 |        9 |       13 |       30 |       16 |        7 |        7 |       0 |        1 |        1 |        5 |        2 |        1 |        2 |       0 |        0 |        2 |        2 |        0 |        3 |        2 |       0 |      0 |      2 |     13 |     16 |      6 |      0 |      5 |    175 |      0 |      0 |      0 |     16 |     36 |     13 |      6 |      3 |    344 |      0 |      0 |      1 |      7 |     10 |      5 |      0 |      0 |    135 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4098900 |     522 |    113 |    310 |     5 |    0 |     3 |    0 |    2 |     1 |    0 |     88 |    0 |    0 |    0 |    0 |    251 |    271 |       8 |       9 |       5 |       1 |     12 |     15 |      9 |      0 |      0 |      1 |      0 |      0 |      1 |      6 |      3 |      1 |      0 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        2 |       12 |       19 |        6 |        1 |       0 |        3 |        6 |       21 |       30 |       10 |        0 |       0 |        8 |        9 |       69 |       50 |       15 |        7 |       0 |        6 |       12 |       72 |       46 |        9 |        5 |       2 |        6 |        7 |       18 |        9 |        5 |        1 |       0 |        7 |        5 |       18 |       11 |        0 |        1 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        2 |        0 |       0 |      0 |      1 |     33 |     14 |      0 |      0 |      0 |     65 |      0 |      0 |      1 |     67 |     37 |      1 |      0 |      0 |    204 |      0 |      0 |      0 |     17 |      9 |      0 |      0 |      0 |     62 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4099000 |     671 |    190 |    378 |    21 |    0 |     4 |    2 |    0 |     0 |    0 |     76 |    0 |    0 |    0 |    0 |    292 |    379 |       3 |       2 |       1 |       0 |     17 |     23 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      1 |        1 |        0 |        0 |        2 |       10 |       55 |       1 |        0 |        1 |        2 |        3 |       12 |      103 |       0 |        0 |        0 |        4 |        4 |       11 |      151 |       2 |        0 |        0 |        1 |        3 |       30 |      168 |       4 |        0 |        0 |        0 |        1 |       10 |       25 |       0 |        0 |        1 |        0 |        2 |        9 |       28 |       0 |        0 |        0 |        2 |        0 |        4 |        9 |       0 |        0 |        0 |        0 |        1 |        3 |        8 |       0 |      0 |      1 |     27 |     30 |     12 |     10 |     20 |     90 |      0 |      0 |      4 |     50 |     70 |     17 |     12 |     24 |    201 |      0 |      0 |      4 |     12 |     11 |      3 |      4 |      3 |     39 |      0 |      0 |      1 |      6 |      2 |      3 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 4099900 |     322 |     71 |    142 |    15 |    0 |     6 |    4 |    0 |     6 |    0 |     78 |    0 |    0 |    0 |    0 |    149 |    173 |       7 |       8 |       3 |       0 |      6 |     12 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        2 |        2 |        3 |        7 |        3 |        4 |       0 |        2 |        8 |       15 |        9 |        8 |        8 |       0 |        7 |       10 |       16 |        7 |       14 |       21 |       0 |        4 |       12 |       14 |       11 |        9 |       17 |       0 |        6 |        7 |        8 |        5 |        2 |        6 |       0 |        5 |       14 |        6 |       10 |        3 |        6 |       0 |        2 |        6 |        4 |        1 |        3 |        3 |       0 |        3 |        5 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |     12 |     14 |      2 |      3 |      1 |     38 |      0 |      0 |      0 |     20 |     20 |      3 |      8 |      3 |     88 |      0 |      0 |      0 |     11 |      4 |      3 |      2 |      0 |     58 |      0 |      0 |      1 |      1 |      5 |      1 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 4120000 |     635 |    204 |    258 |    16 |    0 |     9 |   14 |    0 |    12 |    0 |    122 |    0 |    0 |    0 |    0 |    306 |    329 |      19 |      18 |       7 |       3 |      9 |     13 |      9 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        5 |        8 |       13 |       32 |        9 |       13 |       5 |        6 |       16 |       30 |       33 |       21 |        8 |       5 |        2 |       19 |       22 |       23 |       29 |       32 |       3 |        7 |       11 |       18 |       22 |       29 |       36 |       5 |       12 |       18 |       13 |        9 |        8 |        5 |       0 |        8 |        7 |       15 |       11 |        9 |        7 |       0 |        1 |        5 |        8 |        6 |        3 |        3 |       0 |        2 |        5 |        4 |        8 |        2 |        4 |       0 |      0 |      1 |     28 |     27 |      8 |      5 |     10 |    125 |      0 |      0 |      0 |     36 |     30 |     18 |      7 |     14 |    153 |      0 |      0 |      1 |     14 |     14 |      6 |      1 |      2 |     84 |      0 |      0 |      1 |      3 |     14 |      3 |      1 |      2 |     27 |      0 |     37 | s03      | R    |
| 4120100 |     245 |     89 |     84 |     4 |    0 |     2 |    2 |    0 |    10 |    0 |     54 |    0 |    0 |    0 |    0 |    127 |    118 |       4 |       3 |       3 |       1 |      5 |      5 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        8 |       10 |        4 |        2 |       3 |        2 |        8 |       20 |       18 |        3 |        3 |       3 |        5 |        9 |        7 |       10 |        6 |        5 |       4 |        0 |        7 |       10 |       11 |        4 |        4 |       2 |        2 |        8 |        7 |       14 |        5 |        1 |       0 |        1 |        4 |        7 |        2 |        1 |        2 |       0 |        2 |        6 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |     13 |      6 |      9 |      3 |      1 |     57 |      0 |      0 |      1 |      8 |      7 |      3 |      4 |      7 |     54 |      0 |      0 |      1 |     12 |      4 |      2 |      2 |      0 |     33 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 4120200 |     391 |    129 |    133 |     7 |    0 |     5 |    8 |    3 |    19 |    0 |     87 |    0 |    0 |    0 |    0 |    184 |    207 |       7 |       3 |       3 |       3 |      4 |      7 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |       11 |       12 |       12 |        8 |        5 |       0 |        3 |       26 |       17 |       18 |        8 |        8 |       1 |        0 |        9 |       17 |       15 |       11 |       13 |       3 |        2 |        9 |       10 |       18 |        8 |       18 |       0 |        1 |       17 |        8 |        9 |       11 |        1 |       2 |        4 |        8 |       14 |        9 |        3 |        0 |       0 |        2 |        5 |        4 |        6 |        1 |        1 |       0 |        1 |       12 |        2 |        5 |        2 |        1 |       0 |      0 |      2 |     10 |     18 |      3 |      3 |      3 |     90 |      0 |      0 |      1 |     10 |     17 |      5 |      4 |      7 |     89 |      0 |      0 |      0 |      8 |      8 |      5 |      1 |      2 |     63 |      0 |      0 |      0 |      8 |      9 |      1 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 4120300 |      50 |     21 |     13 |     4 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     21 |     29 |       1 |       0 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        0 |        4 |        2 |        0 |       0 |        0 |        4 |        1 |        4 |        1 |        4 |       0 |        0 |        0 |        0 |        4 |        3 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        1 |       2 |        0 |        1 |        1 |        2 |        0 |        0 |       1 |        2 |        0 |        2 |        0 |        2 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4120600 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4120700 |     179 |     53 |     76 |     1 |    0 |     0 |    1 |    2 |    11 |    0 |     35 |    0 |    0 |    0 |    0 |     81 |     98 |       1 |       1 |       1 |       0 |      4 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      1 |      0 |      0 |        0 |        0 |        4 |        5 |        3 |        6 |       2 |        1 |        1 |        1 |       12 |        5 |        8 |       5 |        1 |        7 |        9 |        6 |        6 |        7 |       2 |        0 |        0 |        5 |       14 |        6 |        9 |       4 |        6 |        1 |        4 |        3 |        2 |        1 |       0 |        1 |        4 |        5 |        6 |        1 |        1 |       0 |        0 |        0 |        2 |        4 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        5 |        0 |       0 |      0 |      0 |      7 |     10 |      3 |      5 |      2 |     26 |      0 |      0 |      0 |      8 |      9 |      4 |      3 |      9 |     43 |      0 |      0 |      0 |      9 |      5 |      1 |      0 |      3 |     17 |      0 |      0 |      1 |      3 |      4 |      3 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4120800 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4120900 |       5 |      3 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4121000 |     562 |    203 |    191 |     8 |    0 |     9 |    8 |    1 |    11 |    0 |    131 |    0 |    0 |    0 |    0 |    275 |    287 |      16 |       7 |       6 |       1 |     12 |      2 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      5 |      3 |      0 |      1 |      1 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |       11 |       19 |       22 |       14 |        4 |       9 |        8 |       15 |       29 |       25 |       18 |       13 |      13 |        2 |       13 |       23 |       33 |       16 |       11 |       7 |        8 |       12 |       16 |       26 |        7 |       10 |       7 |        9 |       13 |       14 |       21 |        9 |        3 |       1 |        6 |       17 |       14 |       16 |        5 |        2 |       1 |        1 |        3 |        7 |        2 |        4 |        1 |       0 |        1 |        4 |        4 |        6 |        3 |        1 |       0 |      0 |      0 |     13 |     27 |     17 |      8 |      6 |    132 |      0 |      0 |      1 |     13 |     24 |      5 |      8 |      9 |    131 |      0 |      0 |      2 |     20 |      8 |      6 |      3 |      4 |     88 |      0 |      0 |      1 |      9 |      4 |      3 |      1 |      1 |     18 |      0 |     37 | s03      | R    |
| 4121100 |     114 |     45 |     40 |     3 |    0 |     4 |    0 |    0 |     2 |    0 |     20 |    0 |    0 |    0 |    0 |     58 |     56 |       0 |       0 |       0 |       0 |      5 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        4 |        6 |        6 |        0 |       1 |        1 |        1 |        5 |       11 |        5 |        2 |       2 |        0 |        1 |        3 |        7 |        2 |        6 |       2 |        0 |        2 |        4 |        1 |        3 |        5 |       4 |        1 |        3 |        3 |        2 |        1 |        1 |       0 |        1 |        2 |        1 |        2 |        3 |        0 |       0 |        2 |        2 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |     10 |      6 |      2 |      0 |     24 |      0 |      0 |      0 |      4 |      6 |      1 |      2 |      1 |     26 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4121300 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4121400 |       3 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4121600 |       5 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4121700 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4121800 |       4 |      3 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4122000 |     785 |    301 |    187 |    25 |    0 |    10 |   14 |    1 |    24 |    0 |    223 |    0 |    0 |    0 |    0 |    379 |    406 |      21 |      14 |      19 |       4 |     14 |     12 |      9 |      5 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        8 |       26 |       35 |       30 |       16 |        9 |       0 |        8 |       44 |       41 |       45 |       20 |       12 |       7 |        5 |       34 |       17 |       16 |       11 |        7 |       2 |        6 |       30 |       17 |       22 |        8 |       10 |       2 |        9 |       43 |       29 |       21 |       17 |        2 |       1 |       11 |       40 |       21 |       21 |        4 |        4 |       0 |        5 |       16 |       10 |        9 |        1 |        0 |       0 |        2 |       12 |        8 |        7 |        2 |        2 |       0 |      0 |      1 |     49 |     46 |     13 |     12 |      9 |    171 |      0 |      0 |      1 |     16 |     27 |      3 |      7 |      5 |    128 |      0 |      0 |      2 |     30 |     19 |      6 |      2 |      0 |    164 |      0 |      0 |      1 |     10 |      9 |      0 |      2 |      0 |     52 |      0 |     37 | s03      | R    |
| 4122100 |     354 |    137 |    128 |     7 |    0 |     7 |    1 |    1 |     6 |    0 |     67 |    0 |    0 |    0 |    0 |    162 |    192 |      11 |       5 |       2 |       1 |     11 |      8 |      5 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        2 |        4 |       10 |       22 |        8 |        5 |       6 |        3 |        6 |       11 |       24 |       20 |        9 |       7 |        2 |        3 |       13 |       14 |       10 |       10 |       4 |        3 |        4 |       17 |       10 |       15 |       14 |       9 |        4 |        4 |        6 |        9 |        7 |        5 |       1 |        4 |        4 |       11 |        7 |        2 |        3 |       0 |        0 |        4 |        5 |        3 |        0 |        1 |       0 |        0 |        1 |        2 |        3 |        2 |        1 |       0 |      0 |      1 |     11 |     20 |      7 |      4 |      7 |     87 |      0 |      0 |      0 |      5 |     18 |     10 |      9 |      5 |     81 |      0 |      0 |      1 |     10 |     10 |      2 |      3 |      3 |     38 |      0 |      0 |      1 |      3 |      4 |      1 |      2 |      2 |      9 |      0 |     37 | s03      | R    |
| 4122200 |     106 |     34 |     45 |     2 |    0 |     0 |    3 |    2 |     2 |    0 |     18 |    0 |    0 |    0 |    0 |     48 |     58 |       2 |       1 |       0 |       0 |      4 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        6 |        3 |        2 |       0 |        0 |        5 |        1 |        5 |        5 |        4 |       0 |        0 |        2 |        2 |        5 |        7 |        4 |       1 |        0 |        3 |        7 |        6 |        4 |        2 |       2 |        0 |        2 |        2 |        2 |        1 |        0 |       0 |        1 |        3 |        3 |        3 |        1 |        0 |       0 |        0 |        0 |        2 |        3 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |      4 |      5 |      4 |      1 |      4 |     15 |      0 |      0 |      0 |      4 |      6 |      3 |      0 |      0 |     32 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4122800 |     148 |     42 |     73 |     4 |    0 |     1 |    2 |    0 |     3 |    0 |     23 |    0 |    0 |    0 |    0 |     74 |     74 |       6 |       0 |       1 |       0 |      9 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        7 |        5 |        5 |        0 |       0 |        3 |        1 |        8 |        9 |        1 |        1 |       0 |        3 |        5 |       11 |        7 |       11 |        2 |       0 |        2 |        4 |       11 |        7 |       10 |        0 |       0 |        1 |        2 |        3 |        3 |        3 |        0 |       0 |        0 |        0 |        6 |        4 |        1 |        0 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        3 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     42 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     73 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4122900 |     391 |    138 |    167 |     6 |    0 |     2 |    2 |    0 |     6 |    0 |     70 |    0 |    0 |    0 |    0 |    194 |    197 |       3 |       5 |       1 |       0 |     12 |     11 |     12 |      3 |      0 |      2 |      1 |      0 |      4 |      0 |      0 |      0 |      5 |      2 |      3 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        3 |        8 |        8 |       29 |        9 |        3 |       1 |        3 |        8 |       14 |       36 |       11 |        5 |       0 |        7 |        4 |       19 |       23 |       22 |       14 |       0 |        5 |        6 |       17 |       21 |       13 |       16 |       0 |        6 |        1 |       11 |       11 |        3 |        3 |       0 |        1 |        8 |       10 |       11 |        2 |        3 |       0 |        0 |        2 |        4 |        2 |        1 |        0 |       0 |        2 |        3 |        0 |        0 |        1 |        1 |       0 |      0 |      1 |     18 |     11 |     13 |      9 |     18 |     68 |      0 |      0 |      0 |     14 |     27 |     10 |      9 |     23 |     84 |      0 |      0 |      1 |      9 |      9 |      1 |      4 |      1 |     45 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 4123000 |     521 |    182 |    205 |    11 |    0 |     5 |    8 |    4 |     5 |    0 |    101 |    0 |    0 |    0 |    0 |    249 |    272 |      20 |       8 |       4 |       0 |      9 |      6 |      6 |      4 |      0 |      2 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |      1 |      3 |      0 |      1 |      1 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        8 |        4 |        8 |       23 |       11 |       11 |      11 |        5 |        4 |       20 |       28 |       19 |       19 |      11 |        5 |        2 |       13 |       24 |       19 |       32 |       5 |        8 |        7 |       14 |       29 |       16 |       25 |       6 |        5 |        4 |       10 |       15 |       14 |        6 |       0 |       11 |        3 |        6 |       15 |        8 |        4 |       0 |        5 |        0 |        7 |        4 |        1 |        2 |       0 |        2 |        1 |        3 |        3 |        1 |        4 |       0 |      0 |      0 |     21 |     16 |     13 |      6 |     12 |    114 |      0 |      0 |      3 |     25 |     32 |      6 |      8 |     19 |    112 |      0 |      0 |      0 |     16 |      7 |      3 |      3 |      5 |     67 |      0 |      0 |      0 |     11 |      8 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4123100 |     402 |    137 |    165 |     8 |    0 |     5 |    3 |    1 |     9 |    0 |     74 |    0 |    0 |    0 |    0 |    188 |    214 |       8 |       4 |       5 |       3 |      7 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      3 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        8 |        7 |       15 |       17 |        5 |       3 |        3 |       10 |       14 |       24 |       15 |        7 |       7 |        4 |        6 |       21 |       16 |       15 |       14 |       6 |        8 |        8 |       21 |       23 |        7 |       10 |       6 |        4 |        3 |       12 |       12 |        5 |        2 |       1 |        9 |        6 |       10 |        5 |        5 |        0 |       0 |        0 |        3 |        3 |        2 |        2 |        0 |       0 |        5 |        1 |        5 |        2 |        0 |        2 |       1 |      0 |      1 |     15 |     18 |      8 |      5 |      5 |     85 |      0 |      0 |      0 |     27 |     18 |      6 |      4 |      3 |    107 |      0 |      0 |      1 |     13 |      8 |      1 |      1 |      1 |     49 |      0 |      0 |      0 |      6 |      6 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4124000 |     597 |    217 |    212 |    17 |    0 |    11 |    3 |    4 |     4 |    0 |    129 |    0 |    0 |    0 |    0 |    262 |    335 |      66 |      23 |      16 |       5 |     17 |      9 |      8 |      1 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       1 |      1 |      0 |      0 |      1 |        4 |       16 |       15 |       22 |       10 |       11 |      13 |        6 |       27 |       19 |       35 |       12 |       15 |      12 |        7 |       17 |       24 |       24 |       12 |       10 |       5 |        2 |       26 |       26 |       25 |       17 |       13 |       4 |        5 |       24 |       12 |        4 |        7 |        1 |       3 |        4 |       25 |       19 |        9 |       11 |        3 |       2 |        1 |        4 |        1 |        4 |        5 |        1 |       0 |        3 |        9 |        3 |        3 |        3 |        2 |       0 |      0 |      6 |     28 |     27 |      5 |      6 |     10 |    135 |      0 |      0 |      1 |     37 |     28 |      6 |      8 |      3 |    129 |      0 |      0 |      2 |     22 |     20 |      1 |      1 |      2 |     81 |      0 |      0 |      0 |      9 |      9 |      0 |      1 |      2 |     18 |      0 |     37 | s03      | R    |
| 4124100 |     225 |     81 |     98 |     4 |    0 |     1 |    3 |    0 |     3 |    0 |     35 |    0 |    0 |    0 |    0 |    112 |    113 |       2 |       2 |       1 |       0 |      8 |      6 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |        4 |       11 |       10 |        6 |       1 |        1 |        2 |       12 |        9 |        9 |        4 |       6 |        5 |        6 |        6 |        9 |       11 |       11 |       1 |        4 |        2 |        8 |       10 |       10 |       13 |       2 |        3 |        5 |        2 |        3 |        3 |        1 |       1 |        1 |        5 |        0 |        4 |        4 |        2 |       1 |        2 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     12 |     14 |      5 |      7 |      2 |     41 |      0 |      0 |      0 |      7 |     19 |      1 |      3 |      5 |     63 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      2 |     23 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      6 |      0 |     37 | s03      | R    |
| 4124300 |      26 |     16 |      6 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     12 |     14 |       9 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        3 |        0 |        0 |        0 |       1 |        1 |        3 |        1 |        2 |        2 |        1 |       1 |        0 |        0 |        0 |        2 |        1 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      5 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     37 | s03      | R    |
| 4124400 |     342 |     73 |    189 |    10 |    0 |     0 |    2 |    0 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    164 |    178 |       6 |       5 |       0 |       0 |      6 |     13 |      3 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |       0 |       2 |       0 |       0 |      0 |      4 |      1 |      0 |        3 |        2 |       10 |        9 |        6 |        1 |       0 |        1 |        5 |       14 |       14 |        6 |        2 |       0 |        2 |       17 |       33 |       24 |       17 |        3 |       0 |        6 |       16 |       36 |       21 |       12 |        2 |       0 |        3 |        4 |       10 |       10 |        1 |        4 |       0 |        2 |       11 |        9 |       11 |        0 |        2 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        3 |        1 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      2 |      0 |      0 |     64 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |    185 |      0 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4124500 |     200 |     74 |     75 |     7 |    0 |     1 |    0 |    0 |     2 |    0 |     41 |    0 |    0 |    0 |    0 |     96 |    104 |       8 |       4 |       2 |       0 |      3 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        6 |       14 |        6 |        1 |       1 |        3 |        5 |       10 |       11 |        5 |        4 |       4 |        0 |        9 |       10 |       10 |        6 |        1 |       4 |        1 |        3 |       11 |        5 |        5 |        6 |       4 |        2 |        1 |        4 |        6 |        2 |        1 |       1 |        3 |        4 |        7 |        3 |        4 |        2 |       1 |        2 |        1 |        2 |        2 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      1 |      7 |      6 |      3 |      5 |      3 |     49 |      0 |      0 |      0 |     10 |     12 |      4 |      4 |      2 |     43 |      0 |      0 |      0 |      6 |      2 |      4 |      1 |      1 |     27 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4124900 |     101 |     36 |     37 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |     41 |     60 |       2 |       2 |       1 |       0 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        1 |        8 |        0 |        2 |        1 |       0 |        0 |        3 |       10 |        6 |        2 |        2 |       0 |        0 |        7 |        4 |        3 |        3 |        2 |       0 |        0 |        5 |        6 |        3 |        3 |        1 |       0 |        0 |        3 |        1 |        2 |        0 |        2 |       0 |        2 |        6 |        6 |        4 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     33 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4125000 |     440 |    169 |    144 |    11 |    0 |     8 |    6 |    1 |     5 |    0 |     96 |    0 |    0 |    0 |    0 |    206 |    234 |      13 |       6 |       4 |       1 |     13 |      5 |      2 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        6 |       11 |       20 |        9 |       13 |       3 |        1 |       15 |       23 |       27 |       16 |       16 |       8 |        2 |       11 |       18 |       17 |       16 |       12 |       1 |        5 |       11 |        9 |       14 |       16 |       10 |       2 |        6 |       14 |        6 |        9 |        5 |        3 |       0 |        4 |       12 |       10 |       14 |        7 |        6 |       0 |        3 |        5 |        4 |        3 |        6 |        2 |       0 |        2 |        1 |        1 |        2 |        2 |        0 |       0 |      0 |      0 |     24 |     32 |      8 |      3 |      7 |     95 |      0 |      0 |      0 |     17 |     22 |      3 |      5 |     13 |     84 |      0 |      0 |      2 |     14 |     14 |      4 |      3 |      3 |     56 |      0 |      0 |      0 |      3 |     10 |      1 |      2 |      0 |     15 |      0 |     37 | s03      | R    |
| 4125100 |     156 |     54 |     55 |     6 |    0 |     3 |    0 |    0 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |     78 |     78 |       1 |       1 |       1 |       0 |      4 |      3 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        2 |        1 |        8 |        4 |        2 |       0 |        2 |        8 |        6 |        7 |        8 |        5 |       0 |        1 |        4 |        6 |       11 |        8 |        4 |       0 |        1 |        6 |        3 |        6 |        4 |        1 |       0 |        2 |        4 |        5 |        5 |        2 |        1 |       1 |        1 |        5 |        6 |        4 |        1 |        1 |       0 |        1 |        3 |        1 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      6 |      8 |      1 |      1 |      2 |     36 |      0 |      0 |      0 |      6 |      5 |      2 |      3 |      5 |     34 |      0 |      0 |      1 |      6 |      5 |      1 |      1 |      1 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4125300 |       5 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4125400 |       5 |      2 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4127000 |     326 |     90 |    161 |     6 |    0 |     3 |    1 |    1 |     2 |    0 |     62 |    0 |    0 |    0 |    0 |    155 |    171 |       7 |      10 |       3 |       0 |      5 |      5 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      2 |      0 |      2 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        3 |        5 |        4 |       13 |        6 |        4 |       2 |        3 |        5 |        6 |       25 |        7 |        6 |       1 |        3 |        6 |       18 |       25 |       14 |       11 |       2 |        4 |        3 |       22 |       34 |        8 |       10 |       1 |        4 |        7 |        7 |        8 |        7 |        0 |       0 |        4 |        3 |       13 |        4 |        4 |        1 |       0 |        2 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        3 |        2 |        2 |        0 |        0 |       0 |      0 |      2 |     10 |     14 |      5 |      3 |      4 |     52 |      0 |      0 |      0 |     17 |     25 |     10 |      8 |     12 |     89 |      0 |      0 |      0 |     12 |      3 |      7 |      0 |      0 |     40 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 4127100 |     361 |     96 |    204 |     6 |    0 |     2 |    0 |    1 |     0 |    0 |     52 |    0 |    0 |    0 |    0 |    173 |    188 |       4 |       8 |       3 |       0 |     14 |      6 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        7 |        4 |       10 |        7 |        3 |       1 |        6 |        5 |       21 |       19 |        4 |        7 |       0 |        6 |        5 |       37 |       38 |       12 |        7 |       1 |        5 |        3 |       36 |       35 |       11 |        6 |       2 |        3 |        1 |        4 |       14 |        5 |        2 |       0 |        4 |        5 |        5 |        5 |        2 |        2 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |     22 |     14 |      2 |      8 |      3 |     47 |      0 |      0 |      3 |     36 |     43 |     20 |     21 |      7 |     74 |      0 |      0 |      0 |     14 |      8 |      4 |      6 |      0 |     20 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4127200 |     442 |    147 |    205 |     5 |    0 |     3 |    3 |    4 |     2 |    0 |     73 |    0 |    0 |    0 |    0 |    209 |    233 |       9 |      10 |       3 |       1 |     10 |      4 |      5 |      0 |      0 |      3 |      0 |      0 |      4 |      1 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        5 |        5 |       12 |       29 |       14 |        3 |       1 |        6 |        4 |       16 |       29 |       11 |       12 |       0 |        6 |       10 |       20 |       38 |       17 |        7 |       0 |       13 |       10 |       24 |       44 |        7 |        9 |       0 |        4 |        0 |       12 |       11 |        3 |        1 |       0 |        4 |        5 |       12 |       13 |        3 |        5 |       0 |        2 |        3 |        2 |        2 |        0 |        2 |       0 |        1 |        0 |        0 |        2 |        2 |        1 |       0 |      0 |      3 |     17 |     25 |     13 |      5 |     15 |     69 |      0 |      0 |      0 |     25 |     39 |     15 |      5 |     14 |    107 |      0 |      0 |      1 |     11 |     11 |      4 |      3 |      3 |     40 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4127500 |     414 |    135 |    150 |    13 |    0 |     7 |    3 |    2 |     8 |    0 |     96 |    0 |    0 |    0 |    0 |    200 |    214 |      15 |       6 |       6 |       1 |      7 |      8 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        7 |       13 |       18 |        9 |        4 |       5 |        2 |        6 |       19 |       19 |       15 |        7 |       6 |        5 |       12 |       16 |       15 |       16 |        7 |       5 |        4 |        9 |       16 |       17 |       15 |        6 |       7 |       10 |        8 |        7 |       13 |        3 |        2 |       3 |        7 |        7 |       13 |       15 |        3 |        2 |       3 |        2 |        1 |        4 |        5 |        4 |        1 |       0 |        3 |        3 |        6 |        2 |        2 |        0 |       0 |      0 |      0 |     13 |     23 |     13 |      9 |      6 |     71 |      0 |      0 |      1 |     13 |     21 |      5 |      6 |      7 |     97 |      0 |      0 |      3 |     15 |     12 |      1 |      5 |      4 |     56 |      0 |      0 |      0 |      5 |      9 |      7 |      1 |      1 |     10 |      0 |     37 | s03      | R    |
| 4127600 |     311 |    117 |    111 |     6 |    0 |     1 |    5 |    0 |     5 |    0 |     66 |    0 |    0 |    0 |    0 |    143 |    168 |      15 |      10 |       6 |       0 |      4 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |        8 |        9 |       15 |        6 |        2 |       1 |        6 |       14 |       16 |       22 |        7 |        4 |       0 |        4 |       11 |       10 |       19 |        3 |        5 |       1 |        3 |       16 |       15 |       14 |        6 |        4 |       0 |        7 |        7 |        4 |        7 |        3 |        2 |       0 |        4 |       10 |        6 |        7 |        6 |        3 |       0 |        2 |        4 |        4 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        3 |        0 |        0 |       1 |      0 |      0 |     24 |     15 |      2 |      6 |      5 |     65 |      0 |      0 |      2 |     15 |     13 |      8 |      7 |      5 |     61 |      0 |      0 |      0 |      9 |      9 |      3 |      0 |      3 |     42 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4127700 |     897 |    333 |    351 |    10 |    0 |     9 |    6 |    1 |     7 |    0 |    180 |    0 |    0 |    0 |    0 |    398 |    499 |      34 |      14 |      12 |       1 |     33 |     25 |      9 |      1 |      0 |      0 |      0 |      0 |      4 |      2 |      4 |      0 |      0 |      1 |      2 |      2 |      4 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      3 |      2 |      1 |      0 |        6 |       10 |       21 |       47 |       23 |       19 |       4 |       15 |       15 |       41 |       69 |       33 |       27 |       3 |       15 |       18 |       34 |       36 |       28 |       25 |       6 |       16 |       17 |       45 |       45 |       31 |       30 |       5 |       11 |       16 |       14 |       36 |        9 |        4 |       0 |       20 |       13 |       18 |       25 |        9 |        5 |       0 |        2 |        7 |        3 |        2 |        1 |        1 |       0 |        3 |        1 |        3 |        5 |        3 |        2 |       0 |      0 |      2 |     38 |     60 |     21 |     18 |     15 |    179 |      0 |      0 |      1 |     45 |     62 |     19 |     14 |     15 |    195 |      0 |      0 |      1 |     32 |     13 |      4 |      5 |      7 |    118 |      0 |      0 |      1 |      4 |      8 |      0 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 4127800 |     437 |    158 |    168 |     4 |    0 |     4 |    5 |    1 |     5 |    0 |     92 |    0 |    0 |    0 |    0 |    196 |    241 |      11 |       7 |       2 |       0 |     10 |     13 |      6 |      1 |      0 |      2 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        8 |        7 |       27 |        9 |        6 |       1 |        2 |        9 |       20 |       33 |       19 |       12 |       1 |        8 |       19 |       11 |       20 |       14 |       10 |       1 |        6 |       14 |       15 |       26 |       14 |       10 |       0 |        4 |       12 |        8 |        5 |        9 |        2 |       0 |        6 |       15 |       10 |       15 |        3 |        3 |       0 |        3 |        2 |        0 |        2 |        2 |        2 |       0 |        1 |        3 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |     29 |     28 |     11 |      7 |      5 |     78 |      0 |      0 |      1 |     19 |     29 |      2 |     15 |      6 |     96 |      0 |      0 |      1 |     10 |     14 |      8 |      4 |      1 |     54 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4127900 |     401 |    130 |    174 |     8 |    0 |     4 |    1 |    1 |     5 |    0 |     78 |    0 |    0 |    0 |    0 |    189 |    212 |       8 |       5 |       4 |       1 |      2 |     19 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        3 |       11 |       17 |       12 |        7 |       3 |        4 |        8 |       17 |       22 |       11 |        7 |       2 |        9 |        9 |       15 |       28 |       12 |        9 |       2 |        4 |        5 |       18 |       31 |       17 |        9 |       6 |        3 |        8 |        9 |        8 |        5 |        1 |       0 |        7 |        5 |        8 |       11 |        7 |        6 |       0 |        4 |        1 |        0 |        5 |        1 |        1 |       0 |        1 |        1 |        3 |        1 |        1 |        0 |       0 |      0 |      3 |     18 |     16 |      6 |      5 |      5 |     77 |      0 |      0 |      1 |     21 |     33 |     13 |      7 |      8 |     91 |      0 |      0 |      0 |     13 |     13 |      7 |      0 |      1 |     44 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      3 |     10 |      0 |     37 | s03      | R    |
| 4128000 |     580 |    202 |    289 |     8 |    0 |     1 |    0 |    0 |     1 |    0 |     79 |    0 |    0 |    0 |    0 |    178 |    402 |       4 |       9 |       2 |       0 |     15 |     14 |      3 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      1 |      1 |      1 |      1 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        4 |        8 |       37 |       2 |        1 |        0 |        4 |       11 |       21 |      109 |       2 |        1 |        1 |        2 |        2 |       14 |       67 |       4 |        1 |        2 |        3 |        9 |       17 |      158 |       8 |        0 |        1 |        1 |        2 |        3 |       23 |       0 |        0 |        2 |        2 |        5 |       10 |       29 |       1 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        0 |        5 |       0 |      0 |      2 |     25 |     32 |     14 |      6 |      6 |    117 |      0 |      0 |      3 |     28 |     44 |     17 |     10 |     16 |    171 |      0 |      0 |      0 |      7 |     12 |      1 |      5 |      0 |     54 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4128100 |     106 |     30 |     47 |     1 |    0 |     1 |    0 |    2 |     2 |    0 |     23 |    0 |    0 |    0 |    0 |     57 |     49 |       2 |       2 |       0 |       0 |      4 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        0 |        1 |        5 |        4 |        2 |       0 |        1 |        2 |        2 |        7 |        4 |        1 |       0 |        1 |        3 |        3 |        7 |        7 |        4 |       1 |        1 |        1 |        4 |        6 |        4 |        3 |       2 |        4 |        0 |        2 |        5 |        0 |        2 |       0 |        2 |        0 |        1 |        6 |        1 |        0 |       0 |        1 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      9 |      1 |      2 |      0 |     15 |      0 |      0 |      0 |      3 |     12 |      1 |      2 |      2 |     27 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      1 |     16 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4128200 |     178 |     51 |     90 |     2 |    0 |     1 |    0 |    0 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |     89 |     89 |       3 |       2 |       1 |       0 |      8 |      8 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        3 |       13 |        2 |        3 |       0 |        3 |        0 |        4 |       14 |        1 |        5 |       0 |        3 |        0 |        7 |       25 |        6 |        3 |       1 |        2 |        2 |        8 |       22 |        6 |        5 |       0 |        6 |        1 |        2 |        7 |        2 |        1 |       0 |        5 |        0 |        2 |        5 |        2 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      7 |      9 |      4 |      3 |     10 |     18 |      0 |      0 |      2 |      5 |     24 |     11 |      9 |     19 |     20 |      0 |      0 |      0 |      4 |      7 |      2 |      0 |      4 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |     37 | s03      | R    |
| 4128300 |     371 |    133 |    132 |     9 |    0 |     6 |    2 |    2 |     8 |    0 |     79 |    0 |    0 |    0 |    0 |    170 |    201 |       2 |       3 |       2 |       1 |      2 |     10 |      4 |      1 |      0 |      0 |      0 |      0 |      2 |      3 |      3 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |        1 |        7 |       10 |       12 |        6 |        8 |       5 |        4 |        7 |       14 |       21 |       13 |       16 |       9 |        5 |        6 |       16 |       15 |       10 |        9 |       5 |        1 |        6 |       11 |       19 |       11 |       16 |       2 |        8 |        8 |        7 |        7 |        9 |        4 |       0 |        6 |        5 |        9 |        9 |        3 |        4 |       0 |        1 |        5 |        4 |        0 |        1 |        1 |       0 |        2 |        5 |        3 |        1 |        2 |        2 |       0 |      0 |      0 |     20 |     27 |      6 |      4 |      5 |     71 |      0 |      0 |      1 |     15 |     22 |     10 |      4 |      8 |     72 |      0 |      0 |      0 |     12 |     10 |      1 |      3 |      3 |     50 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4128400 |     347 |     85 |    186 |     7 |    0 |     0 |    1 |    0 |     4 |    0 |     64 |    0 |    0 |    0 |    0 |    165 |    182 |       2 |       6 |       0 |       0 |      6 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      4 |      6 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        4 |       13 |       10 |        5 |       2 |        4 |        2 |        5 |       20 |       10 |        8 |       1 |        6 |        8 |       19 |       28 |       17 |       12 |       5 |        6 |        9 |       12 |       25 |       24 |       10 |       5 |        9 |        2 |        4 |        7 |        6 |        1 |       0 |        4 |        6 |        9 |       10 |        3 |        2 |       1 |        1 |        2 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        1 |        2 |        0 |       0 |      0 |      0 |      8 |     14 |      3 |      1 |      4 |     55 |      0 |      0 |      0 |     14 |     35 |     10 |      5 |     12 |    110 |      0 |      0 |      0 |      9 |     13 |      1 |      1 |      3 |     37 |      0 |      0 |      0 |      3 |      1 |      0 |      2 |      0 |      6 |      0 |     37 | s03      | R    |
| 4128500 |       9 |      2 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4128900 |      81 |     13 |     56 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     40 |     41 |       3 |       2 |       0 |       0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        1 |        0 |       0 |        2 |        0 |        1 |        5 |        1 |        0 |       0 |        2 |        3 |        8 |        8 |        6 |        1 |       1 |        3 |        3 |        9 |        6 |        6 |        0 |       0 |        1 |        0 |        0 |        3 |        3 |        0 |       0 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |     16 |      8 |      2 |      0 |      1 |     29 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4129000 |     265 |     66 |    147 |     8 |    0 |     1 |    0 |    0 |     1 |    0 |     42 |    0 |    0 |    0 |    0 |    131 |    134 |       2 |       1 |       2 |       0 |      4 |     10 |      4 |      0 |      0 |      1 |      1 |      0 |      2 |      3 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        6 |        9 |        4 |        1 |       2 |        3 |        2 |        4 |       22 |        5 |        4 |       1 |        2 |        2 |       21 |       29 |       20 |        6 |       0 |        2 |        4 |       22 |       24 |       11 |        4 |       0 |        2 |        1 |        4 |       10 |        4 |        0 |       0 |        1 |        0 |        8 |       10 |        2 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        3 |       0 |        1 |        1 |        1 |        0 |        1 |        1 |       0 |      0 |      1 |      9 |      5 |      2 |      1 |      3 |     45 |      0 |      0 |      1 |     16 |     14 |      4 |      3 |      2 |    107 |      0 |      0 |      1 |      2 |      4 |      1 |      0 |      2 |     32 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4129100 |     422 |    122 |    217 |     4 |    0 |     5 |    2 |    3 |     4 |    0 |     65 |    0 |    0 |    0 |    0 |    194 |    228 |       4 |       2 |       2 |       1 |     18 |     15 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        5 |        2 |        5 |       20 |       14 |        3 |       1 |        8 |        5 |       12 |       26 |       12 |        6 |       3 |        5 |        8 |       19 |       30 |       22 |       11 |       6 |        7 |        7 |       32 |       40 |       14 |        8 |       8 |        8 |        3 |        8 |       10 |        4 |        1 |       0 |        8 |        3 |        6 |        7 |        4 |        3 |       0 |        0 |        1 |        3 |        4 |        1 |        0 |       0 |        0 |        2 |        2 |        3 |        1 |        1 |       0 |      0 |      4 |      9 |     25 |      6 |     14 |     11 |     53 |      0 |      0 |      1 |      7 |     35 |     16 |     16 |      9 |    133 |      0 |      0 |      0 |     12 |      6 |      2 |      2 |      0 |     43 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4129200 |     955 |    213 |    554 |    12 |    0 |     7 |    5 |    1 |     8 |    0 |    155 |    0 |    0 |    0 |    0 |    471 |    484 |      15 |      17 |       7 |       0 |     34 |     28 |     14 |      5 |      1 |      4 |      1 |      0 |      2 |      2 |      0 |      0 |      3 |     13 |      5 |      1 |      1 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |       10 |        3 |       11 |       36 |       16 |        7 |       4 |        8 |        8 |       35 |       43 |       21 |        7 |       4 |       18 |        8 |       66 |       93 |       66 |       29 |       5 |       22 |       12 |       79 |       89 |       43 |       22 |       2 |        8 |       10 |       12 |       36 |        9 |        7 |       0 |        8 |       13 |       18 |       23 |        6 |        5 |       0 |        4 |        2 |        4 |        4 |        1 |        2 |       0 |        2 |        3 |        2 |        8 |        1 |        0 |       0 |      0 |      1 |     28 |     27 |     19 |      7 |     13 |    118 |      0 |      0 |      0 |     76 |     91 |     40 |     25 |     28 |    294 |      0 |      0 |      5 |     17 |     33 |      5 |      3 |      7 |     85 |      0 |      0 |      0 |      4 |      9 |      2 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4129300 |     236 |     63 |    111 |     3 |    0 |     4 |    2 |    1 |     4 |    0 |     48 |    0 |    0 |    0 |    0 |    102 |    134 |       3 |       1 |       1 |       0 |      5 |      2 |      3 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        6 |        4 |        7 |       0 |        2 |        4 |        4 |       16 |        9 |        6 |       0 |        3 |        4 |        6 |       12 |       13 |       10 |       0 |        1 |        4 |       11 |       16 |       21 |       10 |       0 |        3 |        1 |        5 |        6 |        7 |        2 |       1 |        3 |        3 |        4 |        7 |        4 |        2 |       0 |        0 |        1 |        3 |        0 |        2 |        1 |       0 |        3 |        0 |        2 |        0 |        1 |        1 |       0 |      0 |      0 |     10 |     12 |      0 |      1 |      3 |     37 |      0 |      0 |      0 |     24 |     21 |      3 |      2 |      8 |     53 |      0 |      0 |      0 |      9 |      8 |      1 |      1 |      1 |     28 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4129400 |       4 |      1 |      0 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4129500 |      72 |     25 |     35 |     1 |    0 |     1 |    1 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     35 |     37 |       0 |       0 |       1 |       0 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        4 |        3 |        0 |       0 |        1 |        2 |        3 |        4 |        5 |        1 |       0 |        2 |        0 |        2 |        9 |        2 |        2 |       0 |        1 |        2 |        4 |        8 |        1 |        2 |       0 |        1 |        0 |        1 |        3 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      6 |      1 |      2 |      2 |     12 |      0 |      0 |      0 |      2 |      9 |      2 |      1 |      4 |     17 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      1 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4129600 |      20 |      7 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     13 |      7 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        0 |       1 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        3 |        2 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4134000 |     151 |     49 |     65 |     4 |    0 |     4 |    1 |    1 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |     76 |     75 |       2 |       2 |       0 |       0 |      3 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        4 |        9 |        3 |        2 |       1 |        6 |        2 |        8 |        6 |        4 |        1 |       0 |        3 |        2 |        7 |       11 |        9 |        3 |       1 |        1 |        1 |        8 |       12 |        5 |        1 |       1 |        5 |        1 |        3 |        2 |        0 |        1 |       0 |        2 |        1 |        5 |        6 |        1 |        0 |       0 |        1 |        2 |        0 |        3 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |     13 |      5 |      5 |      5 |     17 |      0 |      0 |      0 |      7 |     11 |      7 |      2 |      3 |     35 |      0 |      0 |      0 |      1 |      7 |      0 |      1 |      0 |     18 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4134100 |     377 |    108 |    181 |     7 |    0 |     2 |    0 |    0 |     6 |    0 |     73 |    0 |    0 |    0 |    0 |    165 |    212 |       7 |       1 |       6 |       0 |     22 |      6 |      8 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      4 |      4 |      1 |      0 |      3 |      1 |      0 |       0 |       2 |       0 |       0 |      1 |      3 |      2 |      0 |        5 |        3 |        8 |       16 |       10 |        4 |       0 |        3 |        5 |       11 |       20 |       15 |        7 |       1 |        5 |        5 |       18 |       21 |        7 |       16 |       0 |        8 |       13 |       18 |       42 |       13 |       15 |       0 |        3 |       10 |        9 |       11 |        3 |        2 |       0 |        5 |       10 |        4 |        9 |        6 |        1 |       0 |        1 |        0 |        0 |        4 |        3 |        1 |       0 |        0 |        0 |        2 |        2 |        2 |        0 |       0 |      0 |      1 |     20 |     20 |      3 |     10 |     11 |     43 |      0 |      0 |      0 |     24 |     35 |      6 |     10 |      6 |    100 |      0 |      0 |      0 |     16 |      7 |      1 |      3 |      3 |     43 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4134400 |     176 |     35 |     80 |     0 |    0 |     1 |    4 |    0 |     4 |    0 |     52 |    0 |    0 |    0 |    0 |     82 |     94 |       2 |       4 |       2 |       0 |      5 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        0 |        3 |        2 |        6 |        1 |        0 |       0 |        3 |        5 |        4 |        4 |        6 |        1 |       0 |        0 |       13 |       17 |        7 |        4 |        3 |       0 |        2 |        7 |        9 |        7 |        9 |        1 |       1 |        0 |        4 |       11 |        1 |        2 |        3 |       0 |        2 |       10 |        8 |        5 |        5 |        1 |       0 |        0 |        0 |        3 |        1 |        1 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      8 |      1 |      0 |      0 |      0 |     26 |      0 |      0 |      1 |     24 |      1 |      0 |      0 |      0 |     54 |      0 |      0 |      0 |     21 |      2 |      0 |      0 |      0 |     29 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4134500 |      33 |     12 |     20 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     16 |     17 |       5 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        3 |        2 |        2 |        1 |       0 |        2 |        0 |        2 |        6 |        3 |        0 |       0 |        0 |        0 |        1 |        4 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      6 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |      1 |      2 |      7 |      2 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4134600 |      23 |      7 |     11 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     11 |     12 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        1 |        3 |        0 |       0 |        1 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |     37 | s03      | R    |
| 4134700 |      47 |     17 |     24 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     25 |     22 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        0 |        3 |        3 |       0 |        0 |        1 |        2 |        1 |        2 |        0 |       0 |        2 |        1 |        3 |        4 |        2 |        0 |       0 |        0 |        3 |        4 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      6 |      5 |      1 |      0 |      2 |     10 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4134800 |      92 |     33 |     40 |     1 |    0 |     1 |    1 |    0 |     4 |    0 |     12 |    0 |    0 |    0 |    0 |     42 |     50 |       0 |       0 |       0 |       0 |      5 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        2 |        5 |        0 |        1 |       2 |        3 |        1 |        5 |        9 |        0 |        2 |       0 |        1 |        1 |        4 |        7 |        3 |        2 |       0 |        2 |        1 |        5 |        9 |        1 |        0 |       4 |        0 |        0 |        3 |        2 |        1 |        0 |       0 |        1 |        0 |        1 |        3 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        2 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      7 |      0 |      2 |      2 |     20 |      0 |      0 |      0 |      7 |      9 |      0 |      1 |      1 |     22 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      5 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      2 |      0 |     37 | s03      | R    |
| 4134900 |      51 |     13 |     24 |     2 |    0 |     0 |    0 |    0 |     1 |    0 |     11 |    0 |    0 |    0 |    0 |     23 |     28 |       1 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        4 |        0 |       0 |        0 |        2 |        0 |        1 |        1 |        3 |       0 |        1 |        0 |        6 |        1 |        1 |        1 |       2 |        0 |        0 |        4 |        3 |        2 |        2 |       1 |        2 |        1 |        0 |        0 |        1 |        0 |       0 |        2 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      8 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      2 |     17 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4135000 |     418 |    154 |    138 |    15 |    0 |     6 |    5 |    5 |     9 |    0 |     86 |    0 |    0 |    0 |    0 |    216 |    202 |       5 |       8 |       6 |       3 |     14 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        9 |       12 |       23 |       14 |        8 |       0 |        4 |       21 |       16 |       19 |        8 |       12 |       4 |        2 |       15 |       20 |       19 |        4 |       10 |       2 |        4 |       15 |       16 |       14 |        5 |       12 |       0 |        6 |       13 |       10 |       10 |        9 |        2 |       0 |        5 |       17 |        5 |        7 |        2 |        0 |       0 |        3 |        6 |        8 |        4 |        3 |        0 |       0 |        2 |        4 |        4 |        5 |        1 |        0 |       0 |      0 |      1 |     25 |     19 |      6 |      3 |      6 |     94 |      0 |      0 |      2 |     14 |     22 |      9 |      9 |      8 |     74 |      0 |      0 |      1 |      9 |      9 |      3 |      2 |      1 |     61 |      0 |      0 |      0 |      9 |      6 |      1 |      1 |      0 |     23 |      0 |     37 | s03      | R    |
| 4135100 |     385 |    142 |    129 |    12 |    0 |     3 |    4 |    2 |     9 |    0 |     84 |    0 |    0 |    0 |    0 |    196 |    189 |       9 |       3 |       2 |       1 |      7 |      5 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        8 |       17 |       15 |        9 |        5 |       1 |        6 |       18 |       16 |       21 |        9 |        9 |       2 |        8 |        9 |       16 |       15 |        6 |        9 |       4 |        3 |       10 |       13 |       13 |        2 |       15 |       6 |        5 |        8 |       15 |       17 |        4 |        3 |       0 |        2 |       11 |        9 |        5 |        4 |        1 |       0 |        1 |        4 |        4 |        3 |        3 |        1 |       0 |        0 |        8 |        1 |        2 |        2 |        1 |       0 |      0 |      1 |     16 |     25 |      3 |      4 |      3 |     90 |      0 |      0 |      0 |     20 |     11 |      4 |      4 |      5 |     85 |      0 |      0 |      0 |     16 |     11 |      4 |      0 |      1 |     52 |      0 |      0 |      0 |      5 |      5 |      4 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4135300 |     170 |     53 |     89 |     2 |    0 |     0 |    2 |    1 |     2 |    0 |     21 |    0 |    0 |    0 |    0 |     84 |     86 |       2 |       1 |       1 |       0 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        1 |        3 |        3 |        6 |        5 |       2 |        1 |        2 |        4 |       10 |        7 |        4 |       4 |        0 |        2 |        9 |        7 |        8 |       10 |      10 |        1 |        2 |        5 |        6 |       14 |        6 |       9 |        1 |        3 |        2 |        2 |        3 |        1 |       0 |        3 |        1 |        3 |        1 |        1 |        0 |       0 |        1 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |     47 |      0 |      0 |      0 |      4 |      6 |      5 |      3 |      3 |     68 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |      2 |     12 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4135400 |      30 |     10 |     16 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      7 |     23 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        6 |       0 |        0 |        0 |        0 |        0 |        0 |        9 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     13 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4135500 |      40 |     10 |     22 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     16 |     24 |       0 |       3 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        2 |       1 |        0 |        1 |        0 |        0 |        3 |        2 |       0 |        2 |        1 |        1 |        3 |        2 |        1 |       0 |        2 |        0 |        2 |        5 |        2 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        2 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      6 |      0 |      0 |      0 |      2 |      7 |      0 |      1 |      2 |     10 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4135600 |      24 |      3 |     13 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |      9 |     15 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        4 |        0 |       0 |        0 |        0 |        3 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      3 |      2 |      1 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4135700 |      51 |     20 |     15 |     3 |    0 |     1 |    1 |    0 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     24 |     27 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        2 |        1 |        2 |       1 |        0 |        1 |        3 |        3 |        2 |        2 |       1 |        0 |        0 |        1 |        0 |        1 |        3 |       2 |        0 |        0 |        0 |        1 |        2 |        3 |       2 |        0 |        2 |        0 |        1 |        2 |        0 |       1 |        0 |        1 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |      2 |      2 |      3 |      1 |      2 |     10 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |      2 |      1 |      2 |      1 |      0 |      4 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4135900 |      12 |      8 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      8 |      4 |       4 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4136000 |     254 |     79 |    109 |     2 |    0 |     4 |    7 |    2 |     3 |    0 |     48 |    0 |    0 |    0 |    0 |    107 |    147 |       3 |       2 |       0 |       0 |      7 |     10 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        3 |        6 |        5 |        7 |        5 |       1 |        2 |        4 |        7 |       13 |       15 |        7 |       0 |        1 |       11 |       13 |       11 |       10 |        3 |       2 |        1 |        8 |       16 |        8 |       15 |        8 |       2 |        2 |        3 |        7 |        2 |        2 |        0 |       0 |        3 |       10 |       11 |        7 |        1 |        0 |       0 |        0 |        1 |        4 |        1 |        0 |        3 |       0 |        1 |        1 |        1 |        4 |        1 |        1 |       0 |      0 |      1 |     18 |     18 |      3 |      2 |      3 |     34 |      0 |      0 |      3 |     13 |     28 |      5 |      2 |     11 |     47 |      0 |      0 |      0 |      3 |      7 |      1 |      1 |      3 |     33 |      0 |      0 |      0 |      4 |      4 |      3 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4136100 |     502 |    194 |    184 |     7 |    0 |     7 |    5 |    2 |     9 |    0 |     94 |    0 |    0 |    0 |    0 |    245 |    257 |      18 |       8 |       6 |       1 |     30 |     13 |      8 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      1 |      1 |      3 |      0 |      1 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        5 |        5 |        9 |       27 |       21 |       11 |       3 |       12 |        6 |       20 |       41 |       19 |       11 |       4 |        3 |        8 |       33 |       26 |       11 |       13 |       8 |        2 |        5 |       21 |       18 |       14 |       14 |       8 |        6 |        9 |       10 |       10 |        5 |        3 |       1 |        8 |        8 |       14 |       12 |        6 |        2 |       0 |        3 |        3 |        3 |        4 |        1 |        4 |       0 |        2 |        2 |        1 |        4 |        2 |        1 |       0 |      0 |      2 |     20 |     28 |     10 |      9 |      9 |    116 |      0 |      0 |      3 |     23 |     38 |      7 |      5 |      7 |    101 |      0 |      0 |      1 |     18 |     21 |      2 |      1 |      0 |     51 |      0 |      0 |      0 |      6 |      6 |      1 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 4136200 |      61 |     14 |     21 |     1 |    0 |     1 |    0 |    1 |     2 |    0 |     21 |    0 |    0 |    0 |    0 |     32 |     29 |       1 |       1 |       1 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        1 |        0 |        1 |       0 |        1 |        2 |        1 |        1 |        2 |        1 |       1 |        2 |        2 |        3 |        2 |        1 |        0 |       1 |        3 |        2 |        1 |        4 |        0 |        0 |       0 |        2 |        5 |        3 |        1 |        1 |        0 |       0 |        1 |        5 |        2 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |     16 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4136300 |      32 |     18 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     14 |     18 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        4 |        1 |        0 |       1 |        0 |        1 |        0 |        7 |        1 |        1 |       1 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        3 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      1 |      4 |      0 |      1 |      2 |      9 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4136400 |      14 |      6 |      3 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      6 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4136500 |       3 |      0 |      1 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4136600 |     132 |     35 |     51 |     2 |    0 |     0 |    0 |    1 |     8 |    0 |     35 |    0 |    0 |    0 |    0 |     54 |     78 |       4 |       2 |       0 |       0 |      2 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        2 |        1 |        3 |        2 |       0 |        2 |        5 |        5 |        8 |        0 |        3 |       0 |        1 |        9 |        4 |        5 |        2 |        3 |       0 |        2 |        7 |       10 |        4 |        0 |        4 |       0 |        3 |        3 |        6 |        2 |        0 |        0 |       0 |        6 |        7 |        3 |        1 |        3 |        1 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        3 |        2 |        0 |       0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      2 |     38 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |     31 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4136700 |     441 |    124 |    195 |    11 |    0 |     4 |    4 |    3 |     9 |    0 |     91 |    0 |    0 |    0 |    0 |    197 |    244 |       8 |       1 |       4 |       5 |     13 |      9 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        5 |        8 |       14 |        7 |       11 |       0 |        7 |        7 |        9 |       25 |       12 |       17 |       0 |        7 |        6 |       18 |       29 |       16 |       19 |       1 |        6 |        9 |       21 |       21 |       16 |       25 |       1 |        1 |        4 |       10 |        9 |        7 |        4 |       0 |       10 |       10 |       11 |       11 |        8 |        6 |       0 |        5 |        6 |        1 |        5 |        1 |        1 |       0 |        3 |        2 |        1 |        2 |        2 |        2 |       0 |      0 |      3 |     16 |     16 |      5 |      1 |      5 |     78 |      0 |      0 |      1 |     18 |     26 |      5 |      6 |      9 |    130 |      0 |      0 |      0 |      8 |      9 |      3 |      4 |      2 |     65 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 4136800 |     149 |     38 |     83 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     74 |     75 |       1 |       0 |       0 |       0 |     10 |     10 |      4 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        1 |        3 |        5 |        2 |       0 |        2 |        0 |        5 |       10 |        5 |        2 |       0 |        6 |        0 |        7 |       19 |        6 |        4 |       1 |        7 |        0 |        9 |       16 |        6 |        2 |       0 |        4 |        0 |        3 |        1 |        4 |        1 |       1 |        1 |        1 |        1 |        4 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      7 |      2 |      1 |      2 |     23 |      0 |      0 |      0 |      8 |     15 |      7 |      5 |      4 |     44 |      0 |      0 |      1 |      2 |      4 |      4 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4136900 |     389 |    144 |    155 |     7 |    0 |     3 |    5 |    0 |     2 |    0 |     73 |    0 |    0 |    0 |    0 |    164 |    225 |       5 |       1 |       4 |       1 |     11 |      6 |      3 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      4 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        4 |       10 |       13 |       14 |        7 |       1 |        5 |        7 |       19 |       32 |       18 |       10 |       1 |        9 |        2 |       13 |       22 |       13 |       11 |       0 |        7 |        7 |       20 |       19 |       20 |       12 |       0 |        2 |        5 |        5 |        8 |        9 |        1 |       0 |        7 |        7 |        7 |       13 |        7 |        2 |       0 |        2 |        2 |        1 |        4 |        3 |        0 |       0 |        0 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     19 |     19 |      9 |      7 |      8 |     82 |      0 |      0 |      1 |     23 |     28 |      5 |      8 |     11 |     79 |      0 |      0 |      0 |      7 |     12 |      1 |      5 |      7 |     41 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4137000 |     672 |    230 |    260 |    14 |    0 |     3 |    8 |    7 |     9 |    0 |    141 |    0 |    0 |    0 |    0 |    282 |    390 |      22 |      14 |      10 |       0 |     15 |     15 |      8 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      2 |      1 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        6 |       15 |       20 |       17 |        6 |       13 |       1 |        1 |       18 |       37 |       37 |       25 |       27 |       7 |        7 |       20 |       28 |       33 |       11 |       19 |       1 |       10 |       18 |       22 |       32 |       15 |       34 |      10 |        6 |       20 |       14 |       15 |        9 |        5 |       0 |        4 |       20 |       12 |       18 |        7 |       11 |       0 |        4 |        5 |        1 |        4 |        2 |        0 |       0 |        0 |        8 |        6 |        7 |        1 |        3 |       0 |      0 |      1 |     33 |     29 |     13 |      3 |      2 |    149 |      0 |      0 |      2 |     18 |     18 |      9 |      7 |      8 |    198 |      0 |      0 |      3 |     18 |     14 |      5 |      2 |      0 |     99 |      0 |      0 |      0 |      8 |      4 |      0 |      1 |      0 |     28 |      0 |     37 | s03      | R    |
| 4137100 |       3 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4137200 |     330 |    112 |    161 |     9 |    0 |     6 |    0 |    3 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |    114 |    216 |       5 |       3 |       1 |       0 |     11 |      5 |      3 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        3 |        4 |       25 |       2 |        0 |        0 |        3 |        3 |       15 |       53 |       3 |        2 |        1 |        2 |        5 |       13 |       30 |       0 |        2 |        1 |        1 |        9 |       21 |       70 |       4 |        0 |        0 |        1 |        4 |        5 |        6 |       0 |        1 |        3 |        2 |        1 |        5 |       10 |       0 |        0 |        0 |        0 |        1 |        3 |        6 |       0 |        0 |        0 |        0 |        0 |        3 |        6 |       0 |      0 |      0 |     19 |     15 |      3 |      8 |      9 |     58 |      0 |      0 |      2 |     13 |     31 |      8 |      8 |      9 |     90 |      0 |      0 |      0 |      7 |      5 |      4 |      0 |      0 |     22 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4137300 |     161 |     61 |     56 |     6 |    0 |     2 |    3 |    1 |     5 |    0 |     27 |    0 |    0 |    0 |    0 |     80 |     81 |       6 |       3 |       3 |       1 |      7 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        4 |        3 |        5 |        8 |        1 |       2 |        2 |        3 |        5 |       17 |        2 |        1 |       3 |        2 |        7 |        1 |        8 |        3 |        4 |       1 |        1 |        8 |        3 |        7 |        6 |        4 |       1 |        0 |        4 |        1 |        3 |        3 |        1 |       1 |        2 |        3 |        4 |        1 |        1 |        1 |       2 |        1 |        5 |        3 |        2 |        2 |        0 |       0 |        1 |        0 |        0 |        0 |        3 |        0 |       0 |      0 |      3 |      4 |     10 |      1 |      0 |      4 |     39 |      0 |      0 |      0 |      4 |      6 |      4 |      2 |      3 |     37 |      0 |      0 |      0 |      3 |      1 |      1 |      1 |      1 |     20 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4137400 |     620 |    216 |    271 |    11 |    0 |     6 |    6 |    2 |     6 |    0 |    102 |    0 |    0 |    0 |    0 |    287 |    333 |       4 |      13 |       6 |       2 |     20 |     23 |      6 |      1 |      1 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      6 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        6 |        5 |       21 |       27 |       19 |        6 |       1 |        4 |       11 |       40 |       41 |       20 |       14 |       1 |       15 |       13 |       31 |       45 |       20 |       13 |       0 |       12 |       20 |       29 |       41 |       16 |       16 |       0 |        8 |       10 |       11 |       13 |        6 |        2 |       0 |       10 |        3 |       16 |       15 |        5 |        3 |       0 |        3 |        1 |        3 |        4 |        4 |        0 |       0 |        2 |        0 |        5 |        5 |        2 |        2 |       0 |      0 |      0 |     32 |     34 |     13 |      4 |      7 |    126 |      0 |      0 |      1 |     46 |     36 |     12 |      6 |     19 |    151 |      0 |      0 |      0 |     14 |     14 |      3 |      1 |      3 |     67 |      0 |      0 |      0 |     10 |      6 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4137500 |     789 |    259 |    342 |    14 |    0 |     5 |    4 |    1 |     9 |    0 |    155 |    0 |    0 |    0 |    0 |    365 |    424 |       5 |      10 |       1 |       0 |     27 |     23 |     14 |      3 |      2 |      2 |      1 |      0 |      3 |      0 |      2 |      0 |      3 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      1 |      0 |       13 |        9 |       15 |       33 |       28 |       10 |       1 |       18 |       12 |       27 |       57 |       23 |       10 |       3 |        8 |       16 |       34 |       46 |       34 |       21 |       8 |       12 |        9 |       37 |       54 |       36 |       21 |       6 |       12 |        4 |       13 |       21 |       13 |        6 |       0 |       15 |       11 |       22 |       22 |        7 |        5 |       4 |        6 |        5 |        1 |        2 |        4 |        2 |       0 |        5 |        2 |        2 |        3 |        1 |        0 |       0 |      0 |      2 |     27 |     39 |     15 |     14 |     24 |    138 |      0 |      0 |      0 |     43 |     58 |      9 |     15 |     18 |    199 |      0 |      0 |      1 |     17 |     21 |      4 |      3 |      6 |    103 |      0 |      0 |      0 |      3 |      8 |      3 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 4137600 |      34 |     10 |     13 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     11 |     23 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        2 |        5 |       0 |        0 |        0 |        0 |        0 |        2 |        3 |       1 |        0 |        0 |        0 |        0 |        1 |        6 |       0 |        0 |        0 |        0 |        1 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      4 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      2 |      1 |      1 |      2 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4137700 |      36 |      7 |     17 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     21 |     15 |       0 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        0 |        1 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        2 |        1 |       3 |        0 |        0 |        2 |        2 |        0 |        6 |       0 |        1 |        0 |        3 |        0 |        2 |        1 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4137800 |     118 |     37 |     59 |     4 |    0 |     3 |    0 |    0 |     3 |    0 |     12 |    0 |    0 |    0 |    0 |     60 |     58 |       4 |       4 |       0 |       0 |      3 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        4 |        7 |        3 |       0 |        0 |        1 |        3 |        7 |        4 |        3 |       2 |        1 |        2 |        7 |       12 |        3 |        2 |       6 |        1 |        1 |        6 |        5 |        1 |        2 |      10 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        4 |        0 |        3 |        1 |        0 |       0 |        0 |        3 |        0 |        1 |        2 |        0 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      3 |      1 |      2 |      3 |     25 |      0 |      0 |      0 |      8 |      7 |      0 |      4 |      0 |     40 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      6 |      0 |     37 | s03      | R    |
| 4138000 |     373 |    131 |    149 |    10 |    0 |     2 |    2 |    0 |    10 |    0 |     69 |    0 |    0 |    0 |    0 |    164 |    209 |       9 |       6 |       5 |       0 |      9 |      5 |      3 |      3 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      2 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        3 |        6 |       22 |        4 |        4 |       5 |        2 |        4 |       10 |       26 |       11 |       25 |       7 |        5 |        1 |       11 |       16 |       14 |       18 |       7 |        3 |        4 |       12 |       13 |       10 |       25 |      10 |        5 |        2 |        5 |       13 |        6 |        1 |       1 |        7 |        3 |       10 |        8 |        0 |        8 |       0 |        1 |        3 |        2 |        6 |        1 |        0 |       0 |        2 |        3 |        1 |        3 |        1 |        1 |       0 |      0 |      0 |      8 |     23 |      7 |     12 |      6 |     75 |      0 |      0 |      1 |     17 |     14 |      9 |      7 |      3 |     98 |      0 |      0 |      1 |     11 |      9 |      6 |      2 |      1 |     39 |      0 |      0 |      0 |      2 |      3 |      2 |      2 |      0 |     15 |      0 |     37 | s03      | R    |
| 4138100 |     522 |    193 |    240 |     8 |    0 |     2 |    6 |    6 |     2 |    0 |     65 |    0 |    0 |    0 |    0 |    262 |    260 |      15 |       3 |       5 |       0 |      8 |     18 |      4 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        8 |       14 |       23 |       12 |       14 |       6 |        8 |        6 |       18 |       32 |       22 |       17 |       9 |       10 |       13 |       24 |       33 |       25 |       21 |       5 |        7 |       10 |       23 |       22 |       22 |       20 |       5 |        8 |        2 |        7 |        9 |        5 |        3 |       1 |        4 |        6 |        6 |       10 |        3 |        0 |       1 |        1 |        2 |        3 |        5 |        1 |        3 |       0 |        1 |        2 |        2 |        2 |        1 |        1 |       0 |      0 |      1 |     24 |     39 |     11 |      5 |     10 |    103 |      0 |      0 |      2 |     21 |     38 |     10 |      8 |     10 |    151 |      0 |      0 |      0 |     13 |      6 |      2 |      2 |      1 |     41 |      0 |      0 |      0 |      4 |      7 |      1 |      0 |      3 |      9 |      0 |     37 | s03      | R    |
| 4138200 |     239 |     85 |    103 |     3 |    0 |     2 |    0 |    0 |     5 |    0 |     41 |    0 |    0 |    0 |    0 |    115 |    124 |       3 |       5 |       4 |       0 |      9 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        1 |        6 |       13 |        5 |        3 |       1 |        5 |        5 |       11 |       19 |       10 |        4 |       0 |        4 |        1 |        7 |       17 |        7 |       11 |       2 |        4 |        2 |       12 |       16 |        9 |        9 |       2 |        0 |        3 |        9 |        9 |        6 |        1 |       1 |        2 |        1 |        6 |        0 |        2 |        1 |       0 |        0 |        2 |        3 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |     18 |      6 |      4 |      5 |     45 |      0 |      0 |      1 |     14 |     23 |      9 |      5 |      7 |     44 |      0 |      0 |      2 |      8 |      9 |      1 |      2 |      2 |     17 |      0 |      0 |      1 |      1 |      3 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4138300 |     398 |    104 |    178 |     9 |    0 |     2 |    1 |    4 |     1 |    0 |     99 |    0 |    0 |    0 |    0 |    180 |    218 |       7 |       5 |       5 |       2 |      2 |     16 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      5 |      1 |      0 |      1 |      0 |      1 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        6 |       10 |        7 |        5 |       4 |        2 |        6 |       12 |       20 |       17 |        7 |       3 |        4 |       11 |       13 |       24 |       21 |       15 |       4 |        4 |        8 |       22 |       17 |       15 |       16 |       4 |        4 |        6 |       16 |       12 |        4 |        4 |       2 |        4 |       13 |       10 |        8 |        6 |        7 |       3 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        4 |        1 |        4 |        3 |        1 |       0 |      0 |      1 |     11 |     17 |      4 |      3 |      6 |     62 |      0 |      0 |      2 |     17 |     26 |      3 |      8 |      9 |    113 |      0 |      0 |      0 |      7 |     15 |      4 |      6 |      6 |     61 |      0 |      0 |      0 |      4 |      2 |      0 |      1 |      1 |      9 |      0 |     37 | s03      | R    |
| 4138400 |     236 |     64 |    123 |     5 |    0 |     0 |    2 |    0 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |    114 |    122 |       7 |       8 |       2 |       0 |      7 |      9 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        3 |        2 |        7 |        6 |        7 |       0 |        3 |        2 |        5 |       10 |        6 |       10 |       1 |        3 |        4 |       10 |       14 |       14 |       16 |       1 |        1 |        3 |       16 |       15 |       14 |       12 |       0 |        3 |        3 |        7 |        6 |        1 |        1 |       0 |        3 |        3 |        7 |        3 |        4 |        1 |       0 |        2 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |     10 |      2 |      5 |      3 |     39 |      0 |      0 |      2 |     11 |     18 |     10 |      4 |      6 |     72 |      0 |      0 |      0 |      1 |      7 |      2 |      2 |      2 |     28 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4138500 |     222 |     67 |    107 |     2 |    0 |     5 |    1 |    2 |     2 |    0 |     36 |    0 |    0 |    0 |    0 |    108 |    114 |       5 |       7 |       7 |       0 |      5 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        5 |        9 |        8 |        4 |       1 |        1 |        1 |       14 |       12 |        9 |        3 |       0 |        4 |        1 |       10 |       18 |       12 |        6 |       3 |        3 |        3 |       13 |       13 |       10 |        8 |       3 |        4 |        6 |        4 |        4 |        3 |        0 |       0 |        2 |        2 |        2 |        6 |        0 |        2 |       1 |        1 |        0 |        1 |        2 |        1 |        1 |       0 |        1 |        2 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |      8 |     18 |      3 |      2 |     34 |      0 |      0 |      1 |     10 |     17 |     19 |      3 |      0 |     57 |      0 |      0 |      0 |      2 |      6 |      2 |      1 |      0 |     25 |      0 |      0 |      0 |      4 |      5 |      2 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4138600 |      20 |      7 |      7 |     2 |    0 |     0 |    0 |    0 |     1 |    0 |      3 |    0 |    0 |    0 |    0 |     13 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4138700 |      92 |     33 |     32 |     2 |    0 |     1 |    3 |    0 |     2 |    0 |     19 |    0 |    0 |    0 |    0 |     36 |     56 |       4 |       0 |       2 |       1 |      5 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        5 |        1 |        0 |       0 |        1 |        7 |        4 |        6 |        4 |        2 |       0 |        0 |        3 |        0 |        4 |        4 |        2 |       0 |        4 |        6 |        3 |        4 |        1 |        1 |       0 |        1 |        4 |        1 |        2 |        0 |        1 |       0 |        2 |        0 |        6 |        2 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |     24 |      0 |      0 |      2 |      2 |      3 |      0 |      1 |      2 |     22 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4138800 |     388 |    110 |    197 |    12 |    0 |     2 |    5 |    2 |     5 |    0 |     55 |    0 |    0 |    0 |    0 |    198 |    190 |       1 |       5 |       2 |       0 |     19 |     12 |      4 |      2 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        4 |        9 |       12 |       12 |        3 |       0 |        5 |        3 |       17 |       24 |       13 |        4 |       1 |        7 |       11 |       34 |       38 |       12 |        5 |       0 |        6 |        7 |       28 |       32 |       12 |        5 |       0 |        7 |        0 |        7 |       12 |        5 |        2 |       0 |        3 |        1 |        8 |        7 |        3 |        0 |       0 |        2 |        1 |        5 |        2 |        4 |        1 |       0 |        1 |        2 |        6 |        2 |        0 |        0 |       0 |      0 |      0 |      9 |     18 |      6 |      3 |      3 |     71 |      0 |      0 |      0 |     14 |     35 |     10 |     13 |     11 |    114 |      0 |      0 |      0 |      8 |      8 |      2 |      2 |      0 |     35 |      0 |      0 |      0 |      4 |      3 |      2 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4139000 |     447 |    157 |    141 |    11 |    0 |     9 |    4 |    1 |     8 |    0 |    116 |    0 |    0 |    0 |    0 |    198 |    249 |      21 |       9 |       9 |       4 |     13 |      7 |      6 |      0 |      0 |      0 |      1 |      0 |      3 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      1 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        4 |        7 |       12 |       19 |        8 |       11 |       3 |        4 |       16 |       22 |       20 |        9 |       16 |       6 |        6 |        7 |       24 |        6 |        9 |        9 |       3 |        4 |       13 |       21 |       13 |       10 |       12 |       4 |        4 |       15 |       22 |        7 |        2 |        3 |       1 |        9 |       16 |       11 |       15 |        7 |        4 |       0 |        2 |        3 |        3 |        5 |        2 |        1 |       0 |        4 |        3 |        3 |        4 |        1 |        2 |       0 |      0 |      6 |     24 |     19 |      9 |      3 |      6 |     90 |      0 |      0 |      3 |     12 |     22 |      5 |      2 |      6 |     91 |      0 |      0 |      1 |     17 |      6 |      2 |      3 |      2 |     85 |      0 |      0 |      0 |      4 |      6 |      3 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 4139100 |     448 |    172 |    154 |    12 |    0 |     4 |    6 |    3 |     6 |    0 |     91 |    0 |    0 |    0 |    0 |    218 |    230 |      36 |      16 |      12 |       2 |      9 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      1 |      2 |      2 |      0 |      1 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      6 |      2 |      1 |      0 |        5 |        5 |       11 |       32 |       10 |        9 |       4 |        8 |       13 |       18 |       33 |       11 |        8 |       5 |        3 |        7 |       19 |       21 |        7 |       12 |       3 |        2 |        4 |       13 |       31 |        9 |       11 |      12 |        9 |        7 |       13 |       13 |        7 |        0 |       2 |        7 |       12 |        8 |        7 |        2 |        3 |       1 |        1 |        3 |        6 |        6 |        2 |        1 |       0 |        4 |        3 |        2 |        1 |        1 |        1 |       0 |      0 |      2 |     21 |     31 |     12 |      4 |      7 |     95 |      0 |      0 |      1 |     15 |     17 |      8 |     12 |     11 |     90 |      0 |      0 |      0 |     19 |     14 |      2 |      1 |      1 |     54 |      0 |      0 |      0 |      3 |      4 |      2 |      1 |      0 |     21 |      0 |     37 | s03      | R    |
| 4139300 |     189 |     73 |     53 |     4 |    0 |     3 |    1 |    0 |     3 |    0 |     52 |    0 |    0 |    0 |    0 |     93 |     96 |      25 |      12 |      12 |       2 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        5 |        5 |       10 |        4 |        4 |       3 |        3 |        3 |        8 |       12 |        3 |        2 |       8 |        3 |        7 |        6 |        5 |        2 |        3 |       0 |        2 |        4 |        9 |        6 |        2 |        2 |       2 |        1 |       11 |        7 |        6 |        2 |        1 |       0 |        9 |        8 |        0 |        5 |        0 |        2 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       1 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      9 |     10 |      1 |      3 |      0 |     50 |      0 |      0 |      0 |      6 |     10 |      0 |      1 |      2 |     34 |      0 |      0 |      0 |      9 |      4 |      4 |      0 |      0 |     35 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4139400 |     292 |    106 |    112 |     9 |    0 |     4 |    1 |    3 |     8 |    0 |     49 |    0 |    0 |    0 |    0 |    136 |    156 |       4 |       5 |       6 |       0 |      8 |      6 |      4 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        4 |        9 |       10 |        4 |       16 |       2 |        5 |        4 |        9 |       15 |        6 |       19 |       1 |        3 |        9 |       16 |        5 |        5 |       13 |       3 |        3 |        5 |        5 |        8 |        5 |       30 |       2 |        5 |        2 |        7 |        6 |        2 |        1 |       0 |        5 |        4 |        4 |        4 |        1 |        8 |       0 |        1 |        1 |        2 |        0 |        4 |        4 |       0 |        0 |        2 |        3 |        2 |        2 |        4 |       0 |      0 |      0 |     11 |     15 |      6 |      3 |      4 |     67 |      0 |      0 |      0 |     17 |     17 |      3 |      3 |      3 |     69 |      0 |      0 |      0 |      6 |      7 |      0 |      0 |      0 |     36 |      0 |      0 |      1 |      6 |      4 |      0 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4139500 |     646 |    245 |    211 |    24 |    0 |     6 |    9 |    3 |    15 |    0 |    133 |    0 |    0 |    0 |    0 |    286 |    360 |      23 |       8 |       9 |       2 |     15 |      4 |      4 |      2 |      1 |      1 |      0 |      0 |      1 |      2 |      1 |      0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |       15 |       17 |       29 |       16 |        5 |       2 |       13 |       18 |       50 |       44 |       15 |       14 |       5 |        7 |       16 |       24 |       25 |       13 |       23 |       0 |        8 |       14 |       30 |       26 |       17 |        6 |       2 |        5 |       19 |       13 |       15 |        6 |        1 |       0 |       11 |       22 |       16 |       15 |        8 |        1 |       1 |        4 |       11 |       10 |        6 |        2 |        0 |       0 |        1 |       12 |        4 |        3 |        4 |        0 |       0 |      0 |      1 |     33 |     32 |     16 |     10 |      2 |    151 |      0 |      0 |      0 |     19 |     33 |     10 |      4 |     10 |    135 |      0 |      0 |      4 |     17 |     15 |      7 |      2 |      5 |     83 |      0 |      0 |      0 |     12 |      4 |      2 |      1 |      1 |     37 |      0 |     37 | s03      | R    |
| 4139600 |     307 |    139 |     69 |     6 |    0 |     5 |    6 |    5 |    11 |    0 |     66 |    0 |    0 |    0 |    0 |    141 |    166 |      27 |      11 |       9 |       4 |      9 |      3 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       2 |      0 |      0 |      0 |      0 |        5 |        9 |        7 |       18 |        7 |        3 |       5 |       13 |       12 |       19 |       19 |        6 |        9 |       7 |        2 |        4 |        9 |        7 |        5 |        6 |       2 |        5 |        2 |        4 |        7 |        1 |       13 |       2 |        5 |        7 |       12 |        6 |        6 |        2 |       0 |        6 |        2 |        7 |        8 |        3 |        2 |       0 |        3 |        3 |        6 |        1 |        1 |        0 |       0 |        1 |        2 |        4 |        9 |        2 |        1 |       0 |      0 |      0 |     19 |     13 |     10 |      5 |      4 |     88 |      0 |      0 |      0 |      9 |     13 |      2 |      1 |      2 |     42 |      0 |      0 |      1 |     14 |      3 |      2 |      3 |      2 |     41 |      0 |      0 |      0 |      8 |      2 |      4 |      3 |      0 |     16 |      0 |     37 | s03      | R    |
| 4139700 |     716 |    264 |    251 |    21 |    0 |     9 |    5 |    3 |    14 |    0 |    149 |    0 |    0 |    0 |    0 |    341 |    375 |      31 |      13 |      14 |       4 |     16 |     13 |      5 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      0 |      1 |        5 |       13 |       18 |       30 |       22 |        6 |      12 |        7 |       22 |       30 |       44 |       24 |       17 |      14 |        5 |       12 |       36 |       35 |       15 |       20 |       9 |        3 |       16 |       22 |       31 |       16 |       19 |      12 |       11 |       16 |       20 |       19 |        5 |        5 |       1 |       10 |       12 |       21 |       16 |        5 |        5 |       3 |        5 |        8 |        4 |        3 |        6 |        0 |       0 |        2 |        6 |        8 |        5 |        5 |        0 |       0 |      0 |      1 |     27 |     42 |     20 |     12 |     17 |    145 |      0 |      0 |      0 |     21 |     41 |      6 |     13 |     12 |    158 |      0 |      0 |      2 |     23 |     26 |     10 |      8 |      3 |     77 |      0 |      0 |      1 |      7 |      9 |      2 |      1 |      0 |     32 |      0 |     37 | s03      | R    |
| 4139800 |     363 |    137 |    131 |     7 |    0 |     3 |    3 |    0 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    190 |    173 |      18 |       3 |       5 |       0 |     10 |      5 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        1 |       10 |       12 |       13 |       11 |        9 |      10 |        2 |       11 |       12 |       18 |        9 |       11 |       8 |        2 |       11 |       11 |       15 |        8 |        7 |       9 |        1 |        7 |       14 |       17 |        7 |       10 |      12 |        7 |       12 |       18 |       14 |        3 |        0 |       0 |        0 |        8 |        6 |        7 |        3 |        2 |       1 |        0 |        1 |        2 |        3 |        1 |        0 |       0 |        2 |        4 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |     13 |     24 |      4 |      7 |      3 |     85 |      0 |      0 |      0 |     11 |     23 |      7 |      4 |      4 |     82 |      0 |      0 |      1 |     12 |     15 |      5 |      2 |      2 |     44 |      0 |      0 |      0 |      0 |      5 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 4139900 |     660 |    202 |    291 |    15 |    0 |     3 |    6 |    1 |     9 |    0 |    133 |    0 |    0 |    0 |    0 |    320 |    340 |      10 |       7 |       3 |       3 |     28 |     15 |      6 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      7 |      0 |      2 |      3 |      4 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        7 |       10 |       26 |       12 |       20 |       3 |       10 |        7 |       15 |       40 |       25 |       19 |       3 |        7 |       14 |       23 |       28 |       33 |       43 |       4 |        5 |        8 |       16 |       32 |       32 |       44 |       2 |        4 |        6 |        9 |       18 |       15 |       13 |       0 |        7 |        5 |        7 |       22 |       19 |        8 |       0 |        5 |        4 |        4 |        3 |        2 |        2 |       0 |        3 |        2 |        5 |        3 |        0 |        1 |       0 |      0 |      1 |     30 |     31 |     14 |      8 |     16 |    102 |      0 |      0 |      2 |     17 |     48 |     16 |     16 |     28 |    164 |      0 |      0 |      2 |     15 |     23 |     13 |      7 |      5 |     68 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |     27 |      0 |     37 | s03      | R    |
| 4140000 |     599 |    244 |    159 |    15 |    0 |     5 |    4 |    4 |    21 |    0 |    147 |    0 |    0 |    0 |    0 |    283 |    316 |      32 |       5 |       4 |       3 |     17 |      6 |      7 |      5 |      0 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      3 |      0 |        7 |        9 |       18 |       33 |       17 |       10 |       9 |        7 |       14 |       31 |       44 |       19 |       16 |      10 |        3 |       11 |       23 |       16 |       13 |        9 |       9 |        5 |       15 |       19 |       11 |        8 |        7 |      10 |        4 |       21 |       15 |       18 |       10 |        2 |       0 |        5 |       25 |       16 |       18 |        9 |        4 |       0 |        4 |        6 |        8 |        5 |        1 |        2 |       0 |        2 |        3 |        6 |        5 |        4 |        3 |       0 |      0 |      0 |     31 |     39 |     23 |      6 |     11 |    134 |      0 |      0 |      0 |     15 |     32 |      5 |      7 |      4 |     96 |      0 |      0 |      2 |     21 |     18 |      7 |      6 |      3 |     90 |      0 |      0 |      0 |      8 |     11 |      1 |      1 |      1 |     27 |      0 |     37 | s03      | R    |
| 4140100 |     297 |    125 |     96 |     3 |    0 |     2 |    4 |    1 |    10 |    0 |     56 |    0 |    0 |    0 |    0 |    152 |    145 |       2 |       0 |       2 |       1 |      7 |      5 |      1 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        5 |        3 |        8 |       19 |       14 |        3 |       7 |        1 |        7 |        8 |       21 |       19 |        6 |       4 |        4 |       10 |       13 |       11 |        9 |        6 |       0 |        2 |        5 |       13 |       13 |        4 |        3 |       3 |        2 |        6 |        8 |        7 |        4 |        1 |       0 |        5 |        2 |        7 |        9 |        3 |        2 |       0 |        1 |        5 |        1 |        2 |        2 |        1 |       0 |        0 |        2 |        2 |        3 |        0 |        1 |       0 |      0 |      0 |      5 |     20 |      6 |      2 |      8 |     84 |      0 |      0 |      0 |      5 |     15 |      8 |      1 |      5 |     62 |      0 |      0 |      0 |      9 |      7 |      0 |      1 |      1 |     38 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4140300 |     492 |    162 |    208 |    13 |    0 |     4 |    6 |    0 |    14 |    0 |     85 |    0 |    0 |    0 |    0 |    241 |    251 |       9 |       5 |       3 |       3 |     13 |     15 |      8 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        5 |        8 |       12 |       20 |       14 |        6 |       2 |        2 |        9 |       18 |       24 |       25 |       15 |       2 |        6 |       13 |       18 |       31 |       19 |       17 |       1 |        7 |       10 |       21 |       27 |       13 |       22 |       3 |        4 |        8 |        6 |       13 |       12 |        4 |       1 |        1 |        9 |        9 |       12 |        3 |        2 |       1 |        4 |        6 |        1 |        7 |        1 |        2 |       0 |        1 |        3 |        5 |        4 |        1 |        2 |       0 |      0 |      1 |     30 |     24 |     10 |      7 |      6 |     84 |      0 |      0 |      2 |     20 |     38 |      8 |      2 |     12 |    126 |      0 |      0 |      1 |     11 |      4 |      6 |      2 |      3 |     58 |      0 |      0 |      0 |      6 |      9 |      3 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 4140400 |     358 |    125 |    130 |     7 |    0 |     4 |    6 |    1 |     7 |    0 |     78 |    0 |    0 |    0 |    0 |    175 |    183 |       4 |       1 |       4 |       0 |      8 |      0 |      6 |      2 |      2 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        3 |       10 |       13 |        9 |        6 |       3 |        2 |       12 |       15 |       20 |       12 |       11 |       7 |        1 |       10 |       20 |       15 |       20 |       11 |       0 |        3 |        4 |       12 |       17 |        6 |       10 |       1 |        3 |        8 |        8 |       12 |        6 |        0 |       0 |        8 |        6 |       12 |        9 |        4 |        2 |       0 |        0 |        3 |        4 |        3 |        3 |        2 |       0 |        1 |        1 |        2 |        5 |        1 |        0 |       0 |      0 |      1 |     10 |     16 |      4 |      3 |      2 |     89 |      0 |      0 |      2 |     16 |     17 |      7 |      7 |      7 |     74 |      0 |      0 |      1 |     12 |      8 |      2 |      1 |      3 |     51 |      0 |      0 |      1 |      4 |      3 |      1 |      2 |      0 |     14 |      0 |     37 | s03      | R    |
| 4140500 |     762 |    266 |    270 |    28 |    0 |     7 |    9 |    4 |    12 |    0 |    166 |    0 |    0 |    0 |    0 |    352 |    410 |      20 |       9 |      10 |       2 |     20 |     10 |     11 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      4 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |       29 |       18 |       34 |       15 |        6 |       2 |        7 |       41 |       38 |       32 |       20 |       14 |       6 |        6 |       39 |       38 |       27 |       11 |       10 |       5 |        4 |       37 |       23 |       23 |       21 |       17 |       9 |        4 |       28 |       21 |       15 |        8 |        5 |       1 |       11 |       34 |       11 |       16 |        7 |        4 |       1 |        1 |        8 |        5 |        6 |        5 |        1 |       0 |        2 |       14 |        8 |        8 |        1 |        1 |       0 |      0 |      1 |     19 |     40 |      7 |      9 |      7 |    183 |      0 |      0 |      1 |     25 |     37 |     11 |      5 |      6 |    185 |      0 |      0 |      1 |     14 |     17 |      6 |      3 |      3 |    122 |      0 |      0 |      0 |      9 |      7 |      1 |      1 |      1 |     41 |      0 |     37 | s03      | R    |
| 4140600 |     300 |    113 |     85 |     4 |    0 |     1 |    4 |    1 |    10 |    0 |     82 |    0 |    0 |    0 |    0 |    159 |    141 |      15 |       2 |       4 |       1 |      5 |      4 |      3 |      3 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |       15 |       12 |        9 |        6 |        2 |       2 |        5 |       16 |       16 |       15 |        7 |        2 |       1 |        2 |       16 |       16 |        3 |       10 |        3 |       2 |        1 |        8 |        8 |        7 |        1 |        4 |       4 |        3 |       22 |       10 |        5 |        4 |        1 |       0 |        4 |       15 |        7 |        4 |        7 |        0 |       0 |        1 |        5 |        0 |        3 |        2 |        0 |       0 |        3 |        2 |        0 |        3 |        1 |        0 |       0 |      0 |      0 |     11 |     12 |      5 |      1 |      2 |     82 |      0 |      0 |      0 |      9 |      9 |      4 |      0 |      1 |     62 |      0 |      0 |      0 |      9 |      7 |      3 |      1 |      2 |     60 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4140700 |     399 |    120 |    143 |    11 |    0 |     3 |    8 |    3 |    13 |    0 |     98 |    0 |    0 |    0 |    0 |    200 |    199 |       6 |       5 |       3 |       2 |      4 |     13 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        5 |       10 |       19 |        7 |        4 |       2 |        4 |       12 |       15 |       20 |       11 |       10 |       1 |        1 |       12 |       15 |       18 |       12 |       13 |       1 |        3 |        5 |       15 |       21 |        7 |       16 |       4 |        4 |       20 |       12 |       14 |        7 |        2 |       0 |        6 |       13 |        7 |        6 |        4 |        3 |       0 |        1 |        6 |        8 |        4 |        2 |        1 |       0 |        1 |        9 |        3 |        2 |        1 |        0 |       0 |      0 |      0 |     20 |     13 |      5 |      3 |      4 |     75 |      0 |      0 |      0 |     24 |     25 |      6 |      4 |      3 |     81 |      0 |      0 |      1 |      7 |     16 |      2 |      1 |      1 |     70 |      0 |      0 |      0 |      4 |      8 |      0 |      1 |      0 |     25 |      0 |     37 | s03      | R    |
| 4140800 |     727 |    273 |    258 |    19 |    0 |    13 |    5 |    3 |    15 |    0 |    141 |    0 |    0 |    0 |    0 |    354 |    373 |      20 |       7 |       3 |       3 |     24 |     13 |     14 |      6 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      4 |      1 |      0 |      1 |      0 |      1 |      1 |      0 |       3 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        6 |       15 |       27 |       31 |       20 |       10 |       4 |        6 |       37 |       31 |       47 |       25 |        8 |       6 |        6 |       33 |       24 |       31 |       25 |       17 |       1 |        5 |       21 |       21 |       27 |       28 |       17 |       2 |        6 |       27 |       12 |       16 |        8 |        4 |       2 |        8 |       22 |       17 |       12 |        2 |        3 |       2 |        1 |        6 |        8 |        8 |        4 |        2 |       0 |        3 |        6 |        5 |       10 |        2 |        0 |       0 |      0 |      1 |     25 |     37 |     10 |      9 |     10 |    181 |      0 |      0 |      2 |     37 |     51 |      8 |     12 |      9 |    139 |      0 |      0 |      0 |     10 |     12 |      3 |      2 |      3 |    111 |      0 |      0 |      1 |      6 |     12 |      4 |      2 |      0 |     30 |      0 |     37 | s03      | R    |
| 4140900 |       4 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4141000 |     289 |     92 |     77 |    11 |    0 |     4 |    3 |    1 |    13 |    0 |     88 |    0 |    0 |    0 |    0 |    154 |    135 |       6 |       5 |       6 |       1 |      8 |      8 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        7 |        7 |       15 |        7 |        2 |       1 |        2 |        9 |        5 |       15 |       12 |        9 |       1 |        1 |        7 |        7 |       16 |        7 |       11 |       0 |        3 |        2 |        6 |        5 |        4 |        7 |       1 |        4 |       10 |        8 |       14 |        6 |        6 |       0 |        3 |       12 |        8 |        9 |        5 |        3 |       0 |        2 |        3 |        6 |        5 |        0 |        2 |       0 |        1 |        6 |        4 |        1 |        1 |        1 |       0 |      0 |      1 |     13 |     14 |      0 |      4 |      3 |     57 |      0 |      0 |      0 |     11 |     11 |      4 |      2 |     12 |     37 |      0 |      0 |      1 |     16 |     12 |      2 |      1 |      1 |     55 |      0 |      0 |      0 |      5 |      4 |      2 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 4141100 |     288 |     97 |     80 |    10 |    0 |     5 |    6 |    2 |     4 |    0 |     84 |    0 |    0 |    0 |    0 |    140 |    148 |       2 |       0 |       4 |       2 |      5 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |       10 |        6 |        9 |        6 |        4 |       2 |        2 |       23 |       11 |       12 |        7 |        4 |       1 |        2 |        9 |       11 |       12 |        1 |        7 |       0 |        7 |        3 |        8 |        8 |        6 |        6 |       0 |        3 |       18 |        9 |        7 |        6 |        0 |       0 |        8 |       17 |        8 |        7 |        1 |        0 |       0 |        2 |        8 |        5 |        3 |        0 |        0 |       0 |        0 |        4 |        2 |        1 |        1 |        1 |       0 |      0 |      0 |     13 |     14 |      0 |      2 |      1 |     67 |      0 |      0 |      3 |     10 |     10 |      0 |      2 |      2 |     53 |      0 |      0 |      2 |     14 |      5 |      1 |      1 |      0 |     61 |      0 |      0 |      0 |      7 |      4 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4141200 |     261 |     90 |     98 |    14 |    0 |     2 |    0 |    0 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    109 |    152 |       2 |       3 |       1 |       0 |      6 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        3 |       10 |       10 |        7 |        4 |       0 |        3 |        8 |       15 |       12 |       13 |        4 |       1 |        1 |        7 |        8 |       13 |       11 |        6 |       0 |        2 |       13 |        6 |       18 |        8 |        4 |       1 |        0 |        8 |        4 |        8 |        4 |        0 |       0 |        2 |       11 |        8 |        6 |        2 |        1 |       1 |        0 |        1 |        3 |        1 |        0 |        0 |       0 |        0 |        3 |        1 |        6 |        3 |        0 |       0 |      0 |      1 |     17 |     14 |      3 |      4 |      2 |     49 |      0 |      0 |      1 |     18 |      7 |      2 |      1 |      5 |     64 |      0 |      0 |      1 |      6 |      5 |      1 |      0 |      0 |     42 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 4142200 |     501 |    205 |    148 |     9 |    0 |     5 |    3 |    3 |     8 |    0 |    120 |    0 |    0 |    0 |    0 |    222 |    279 |       8 |       6 |       8 |       2 |     66 |     10 |     13 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      3 |      0 |      2 |      3 |      4 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        9 |       13 |        8 |        7 |       32 |       0 |        2 |       19 |       12 |       13 |        8 |       79 |       1 |        3 |       19 |       22 |       12 |       13 |        7 |       1 |        8 |       17 |       20 |       10 |        8 |        7 |       1 |        6 |       20 |       11 |       12 |        5 |        5 |       0 |        8 |       12 |        6 |       16 |        5 |       13 |       1 |        0 |        6 |        4 |        3 |        0 |        1 |       1 |        4 |        3 |        2 |        2 |        0 |        2 |       0 |      0 |      2 |     26 |     20 |      3 |      2 |      2 |    150 |      0 |      0 |      2 |     24 |     13 |      7 |      2 |      0 |    100 |      0 |      0 |      1 |     18 |      2 |      1 |      1 |      0 |     97 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 4142300 |      92 |     29 |     35 |     3 |    0 |     0 |    2 |    2 |     1 |    0 |     20 |    0 |    0 |    0 |    0 |     41 |     51 |       2 |       2 |       0 |       0 |      2 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        5 |        0 |       0 |        1 |        8 |        1 |        7 |        1 |        3 |       0 |        1 |        9 |        4 |        1 |        3 |        0 |       0 |        4 |        5 |        4 |        3 |        0 |        1 |       0 |        1 |        6 |        2 |        0 |        2 |        1 |       0 |        2 |        4 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |        1 |        2 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |      2 |      4 |      0 |      0 |     18 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     27 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4160000 |     246 |     59 |    139 |     3 |    0 |     1 |    2 |    0 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |    111 |    135 |       3 |       2 |       0 |       0 |     15 |      7 |      7 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        3 |        0 |        4 |       13 |       0 |        0 |        1 |        1 |        3 |        9 |       22 |       0 |        0 |        2 |        7 |        9 |        9 |       40 |       3 |        1 |        1 |        4 |        5 |       13 |       38 |       7 |        3 |        2 |        1 |        0 |        4 |        8 |       0 |        1 |        2 |        2 |        5 |        7 |        6 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        1 |        1 |       0 |      0 |      0 |      6 |      9 |      4 |      0 |      8 |     32 |      0 |      0 |      3 |     16 |     21 |      4 |      3 |     11 |     81 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      1 |     30 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4160200 |     130 |     31 |     78 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     62 |     68 |       1 |       3 |       1 |       0 |      6 |     10 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        6 |        0 |        6 |       0 |        0 |        1 |        3 |        3 |        3 |        5 |       1 |        0 |        3 |        2 |        6 |       10 |       12 |       1 |        2 |        0 |        4 |       11 |       10 |       15 |       2 |        2 |        1 |        2 |        2 |        3 |        0 |       1 |        5 |        0 |        0 |        0 |        1 |        1 |       1 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      7 |      5 |      1 |      1 |     16 |      0 |      0 |      0 |     12 |     16 |      8 |      4 |      4 |     34 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      2 |     12 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4160300 |     126 |     28 |     79 |     2 |    0 |     1 |    2 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     63 |     63 |       1 |       0 |       0 |       0 |      6 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        2 |        4 |        3 |        1 |       0 |        0 |        1 |        1 |        8 |        6 |        0 |       0 |        2 |        1 |        2 |        7 |       11 |       13 |       4 |        2 |        1 |        6 |        9 |        8 |       10 |       3 |        4 |        0 |        2 |        0 |        2 |        1 |       0 |        2 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      7 |      1 |      1 |      0 |     17 |      0 |      0 |      0 |      8 |     11 |      0 |      5 |      7 |     48 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4160400 |     538 |    140 |    267 |     8 |    0 |     4 |    4 |    4 |     3 |    0 |    108 |    0 |    0 |    0 |    0 |    244 |    294 |       7 |       5 |       4 |       1 |     24 |     27 |      8 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      1 |      0 |      2 |      0 |      2 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      3 |        1 |        8 |        6 |       11 |        6 |       17 |       3 |        4 |        6 |       15 |       23 |       17 |       20 |       3 |        3 |        6 |       16 |       26 |       32 |       35 |       4 |        8 |        7 |       18 |       28 |       35 |       43 |       6 |        5 |        5 |       18 |       11 |        8 |        8 |       1 |        5 |       10 |        6 |        9 |       12 |       10 |       0 |        3 |        3 |        4 |        0 |        1 |        3 |       0 |        0 |        1 |        2 |        1 |        2 |        3 |       0 |      0 |      1 |     16 |     24 |      7 |      6 |      4 |     82 |      0 |      0 |      0 |     34 |     55 |     14 |     12 |     16 |    136 |      0 |      0 |      0 |     18 |     13 |      8 |      5 |      3 |     61 |      0 |      0 |      1 |      4 |      5 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4161000 |     404 |    120 |    158 |    13 |    0 |     3 |    3 |    0 |     2 |    0 |    105 |    0 |    0 |    0 |    0 |    178 |    226 |       9 |       5 |       3 |       0 |     10 |      6 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      2 |      0 |        1 |       15 |        9 |       12 |        4 |        6 |       1 |        6 |       22 |       12 |       14 |       13 |        3 |       2 |        3 |       25 |       18 |       16 |        7 |       11 |       1 |        4 |       17 |       17 |       12 |       10 |       14 |       3 |        1 |       18 |        9 |        5 |        2 |        5 |       0 |        5 |       30 |        7 |        9 |        5 |        9 |       0 |        0 |        2 |        4 |        2 |        0 |        1 |       0 |        0 |        5 |        4 |        2 |        1 |        0 |       0 |      0 |      1 |      4 |     18 |      7 |      4 |      5 |     81 |      0 |      0 |      2 |     14 |     16 |      4 |      5 |      5 |    112 |      0 |      0 |      0 |      8 |      8 |      2 |      0 |      1 |     86 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4161200 |     748 |    291 |    242 |    25 |    0 |     3 |   10 |    1 |     2 |    0 |    174 |    0 |    0 |    0 |    0 |    350 |    398 |      95 |      25 |      32 |       7 |     10 |      7 |     13 |      4 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      1 |      1 |      3 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      4 |      1 |      1 |      0 |        8 |       27 |       27 |       20 |       16 |       18 |      12 |        7 |       46 |       28 |       32 |       21 |       15 |      14 |        8 |       19 |       28 |       22 |       24 |       15 |       6 |        5 |       23 |       29 |       21 |       13 |       21 |       8 |       10 |       31 |       14 |       11 |        9 |        4 |       1 |       16 |       33 |        9 |       15 |        8 |       10 |       3 |        1 |        9 |        4 |        3 |        0 |        3 |       0 |        2 |        7 |        4 |        5 |        1 |        2 |       0 |      0 |      0 |     34 |     29 |     12 |      6 |     10 |    200 |      0 |      0 |      4 |     29 |     36 |      5 |      7 |      6 |    155 |      0 |      0 |      1 |     24 |     10 |      6 |      1 |      0 |    132 |      0 |      0 |      0 |      3 |      5 |      4 |      1 |      3 |     25 |      0 |     37 | s03      | R    |
| 4162000 |     223 |     73 |    112 |     2 |    0 |     1 |    1 |    0 |     3 |    0 |     31 |    0 |    0 |    0 |    0 |    116 |    107 |       2 |       5 |       0 |       0 |      8 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        3 |        3 |        4 |        6 |       10 |        2 |       1 |        1 |        4 |        7 |       14 |       11 |        4 |       3 |        5 |        6 |        7 |       21 |        7 |       13 |       3 |        3 |        5 |       13 |       11 |        5 |        6 |       7 |        3 |        6 |        4 |        6 |        0 |        0 |       1 |        0 |        2 |        3 |        2 |        2 |        1 |       1 |        1 |        0 |        0 |        1 |        2 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |     12 |     10 |      3 |      5 |      3 |     40 |      0 |      0 |      0 |     10 |     13 |      8 |     13 |      4 |     64 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      2 |     21 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4162100 |     492 |    153 |    222 |     7 |    0 |     1 |    4 |    2 |     2 |    0 |    101 |    0 |    0 |    0 |    0 |    210 |    282 |       7 |       5 |       3 |       1 |     12 |      3 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        2 |        3 |       16 |       12 |        8 |       16 |       1 |        2 |        7 |        9 |       16 |       11 |       46 |       4 |        1 |       15 |       21 |       12 |       10 |       41 |       0 |        4 |       10 |       12 |        8 |       17 |       70 |       1 |        2 |       10 |       10 |       12 |        1 |        9 |       1 |        1 |       15 |       12 |       12 |        7 |        9 |       0 |        2 |        2 |        2 |        0 |        1 |        0 |       0 |        2 |        1 |        1 |        1 |        1 |        3 |       0 |      0 |      1 |     16 |     22 |      8 |      9 |      4 |     93 |      0 |      0 |      1 |     16 |     31 |     11 |     12 |      7 |    144 |      0 |      0 |      1 |     14 |     15 |      3 |      5 |      0 |     63 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 4162200 |     197 |     64 |     86 |     4 |    0 |     1 |    4 |    2 |     4 |    0 |     32 |    0 |    0 |    0 |    0 |     94 |    103 |       2 |       1 |       0 |       2 |      5 |      7 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |        6 |        7 |        3 |        4 |       2 |        2 |        6 |       12 |        8 |        2 |        2 |       4 |        0 |        7 |        6 |        6 |        7 |       12 |       1 |        2 |        5 |       12 |        8 |        9 |        9 |       2 |        1 |        2 |        7 |        4 |        2 |        1 |       1 |        1 |        3 |        4 |        3 |        2 |        0 |       1 |        1 |        0 |        4 |        1 |        1 |        2 |       0 |        1 |        3 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |     12 |      9 |      3 |      2 |      0 |     37 |      0 |      0 |      2 |     11 |     16 |      4 |      3 |      2 |     48 |      0 |      0 |      1 |      5 |      5 |      0 |      1 |      0 |     20 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4162300 |      73 |     25 |     32 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     34 |     39 |       1 |       0 |       0 |       0 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        3 |        0 |       4 |        1 |        0 |        3 |        3 |        4 |        0 |       4 |        0 |        0 |        5 |        4 |        3 |        1 |       3 |        1 |        1 |        4 |        2 |        2 |        3 |       3 |        1 |        0 |        1 |        3 |        1 |        1 |       0 |        1 |        1 |        2 |        0 |        1 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      2 |      1 |      1 |     16 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4162400 |      91 |     35 |     27 |     3 |    0 |     0 |    3 |    1 |     4 |    0 |     18 |    0 |    0 |    0 |    0 |     52 |     39 |       2 |       0 |       1 |       2 |      7 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        3 |        0 |        2 |        4 |        6 |        2 |       1 |        1 |        0 |        4 |        5 |        5 |        2 |       0 |        0 |        2 |        1 |        8 |        3 |        2 |       1 |        1 |        2 |        0 |        2 |        1 |        4 |       0 |        1 |        2 |        1 |        0 |        4 |        0 |       0 |        2 |        0 |        3 |        2 |        2 |        1 |       0 |        0 |        5 |        1 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |      3 |      6 |      3 |      3 |     13 |      0 |      0 |      0 |      1 |      6 |      3 |      2 |      1 |     14 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |      9 |      0 |      0 |      1 |      1 |      1 |      1 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 4166000 |     403 |    124 |    177 |     5 |    0 |     5 |    3 |    0 |    12 |    0 |     77 |    0 |    0 |    0 |    0 |    196 |    207 |       4 |       2 |       0 |       0 |      9 |     10 |      6 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        7 |       13 |       15 |       10 |        3 |       1 |        1 |       11 |       19 |       21 |       11 |        7 |       3 |        4 |       11 |       20 |       16 |       19 |       19 |       4 |        1 |        8 |       18 |       18 |       13 |       17 |       9 |        4 |       11 |        8 |       10 |        2 |        3 |       1 |        3 |       10 |       11 |        4 |        6 |        1 |       3 |        1 |        1 |        6 |        2 |        2 |        1 |       0 |        2 |        4 |        2 |        2 |        1 |        1 |       0 |      0 |      0 |     19 |     21 |      7 |      2 |      7 |     68 |      0 |      0 |      0 |     19 |     19 |      5 |      8 |      3 |    123 |      0 |      0 |      1 |     11 |      9 |      6 |      0 |      2 |     48 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4166100 |     418 |    128 |    173 |    11 |    0 |     5 |    7 |    3 |     5 |    0 |     86 |    0 |    0 |    0 |    0 |    210 |    208 |       7 |       3 |       4 |       1 |     13 |     11 |      7 |      2 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        7 |        9 |        7 |        6 |       17 |       2 |        4 |       14 |       12 |        8 |       23 |       17 |       1 |        3 |       18 |       12 |       16 |       22 |       27 |       1 |        0 |       12 |       10 |        6 |       24 |       21 |       1 |        2 |       12 |       11 |        5 |        4 |       10 |       0 |        5 |       10 |        6 |        7 |        8 |        6 |       0 |        0 |        3 |        8 |        3 |        3 |        1 |       0 |        0 |        3 |        2 |        3 |        4 |        1 |       0 |      0 |      1 |     18 |     10 |      8 |      5 |      4 |     82 |      0 |      0 |      3 |     24 |     22 |      5 |      5 |      5 |    109 |      0 |      0 |      0 |     11 |     10 |      3 |      2 |      3 |     57 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      1 |     20 |      0 |     37 | s03      | R    |
| 4166200 |     167 |     56 |     75 |     1 |    0 |     1 |    0 |    0 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |     82 |     85 |       1 |       1 |       1 |       0 |      8 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        6 |        3 |        2 |        3 |        4 |       3 |        2 |        8 |        5 |        7 |        4 |        6 |       2 |        3 |       11 |        6 |        1 |        8 |       14 |       1 |        0 |        1 |        4 |        6 |        6 |       13 |       1 |        2 |        2 |        2 |        3 |        4 |        1 |       1 |        1 |        6 |        3 |        2 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      6 |      4 |      3 |      1 |     39 |      0 |      0 |      1 |      9 |     11 |      2 |      1 |      0 |     51 |      0 |      0 |      1 |      2 |      4 |      2 |      1 |      1 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |     37 | s03      | R    |
| 4167000 |     470 |    166 |    176 |     9 |    0 |     7 |    3 |    5 |    12 |    0 |     92 |    0 |    0 |    0 |    0 |    245 |    225 |       3 |       5 |       5 |       1 |     17 |      6 |      7 |      2 |      0 |      1 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |       1 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        4 |       11 |       18 |       20 |        6 |       7 |        4 |        6 |       21 |       31 |       23 |        4 |       9 |        1 |        5 |       31 |       22 |       22 |       17 |       2 |        1 |        2 |       20 |       18 |       20 |       10 |       5 |        6 |        9 |       12 |       18 |        8 |        4 |       0 |        6 |        7 |        9 |       11 |        2 |        0 |       0 |        3 |        7 |        0 |        6 |        3 |        1 |       0 |        1 |        4 |        5 |        5 |        0 |        1 |       0 |      0 |      1 |     16 |     33 |      7 |      9 |      6 |     94 |      0 |      0 |      0 |     33 |     28 |      3 |      5 |      5 |    102 |      0 |      0 |      0 |     17 |      9 |      5 |      3 |      1 |     57 |      0 |      0 |      0 |      5 |     13 |      2 |      1 |      1 |     14 |      0 |     37 | s03      | R    |
| 4167100 |     245 |     95 |     85 |     4 |    0 |     7 |    3 |    0 |     9 |    0 |     42 |    0 |    0 |    0 |    0 |    119 |    126 |       4 |       5 |       0 |       1 |      6 |      5 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        2 |       14 |        8 |        8 |        6 |        7 |       4 |        1 |       15 |       12 |       12 |        5 |        1 |       0 |        1 |       10 |        7 |       11 |        1 |        9 |       0 |        1 |        8 |       16 |        4 |        4 |        8 |       5 |        2 |       10 |        4 |        3 |        0 |        0 |       0 |        2 |       13 |        6 |        0 |        2 |        0 |       0 |        1 |        5 |        3 |        1 |        2 |        0 |       0 |        1 |        4 |        1 |        1 |        2 |        2 |       0 |      0 |      1 |      5 |     17 |      5 |      5 |      3 |     59 |      0 |      0 |      0 |      6 |     17 |      4 |     10 |      1 |     47 |      0 |      0 |      0 |      7 |      5 |      0 |      0 |      1 |     29 |      0 |      0 |      0 |      2 |      4 |      1 |      1 |      1 |     14 |      0 |     37 | s03      | R    |
| 4168000 |     304 |    120 |    117 |     4 |    0 |     2 |    4 |    3 |     5 |    0 |     49 |    0 |    0 |    0 |    0 |    144 |    160 |       9 |       5 |       0 |       1 |     11 |      8 |      1 |      3 |      0 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       1 |       0 |      0 |      0 |      1 |      0 |        2 |        9 |        4 |       14 |       14 |        4 |       8 |        4 |        6 |        7 |       20 |       10 |        9 |       9 |        3 |        4 |       10 |        8 |        5 |       19 |       6 |        3 |        4 |       14 |       12 |        6 |       15 |       8 |        5 |        5 |        5 |        9 |        1 |        2 |       0 |        4 |        7 |        5 |        5 |        0 |        1 |       0 |        1 |        1 |        2 |        3 |        0 |        0 |       0 |        1 |        1 |        2 |        4 |        1 |        2 |       0 |      0 |      0 |     10 |     16 |      9 |      1 |      3 |     81 |      0 |      0 |      1 |     11 |     16 |      8 |      4 |      1 |     76 |      0 |      0 |      0 |      2 |      9 |      3 |      1 |      0 |     34 |      0 |      0 |      1 |      2 |      2 |      2 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4168100 |     264 |     84 |    110 |    11 |    0 |     2 |    2 |    2 |     4 |    0 |     49 |    0 |    0 |    0 |    0 |    135 |    129 |       1 |       1 |       0 |       0 |     10 |      4 |      4 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |       0 |       2 |       1 |       1 |      0 |      0 |      0 |      0 |        5 |        0 |        5 |       14 |        8 |        2 |       4 |        5 |        3 |        9 |       12 |       11 |        4 |       2 |        4 |        3 |       15 |       17 |       10 |       10 |       7 |        2 |        2 |        8 |       10 |        5 |       10 |       7 |        2 |        5 |        4 |        1 |        6 |        2 |       0 |        4 |        1 |        8 |       12 |        3 |        1 |       0 |        1 |        2 |        1 |        4 |        1 |        1 |       1 |        1 |        0 |        5 |        2 |        1 |        1 |       0 |      0 |      0 |      9 |     12 |      5 |      1 |      3 |     54 |      0 |      0 |      0 |      6 |     14 |      8 |      4 |      6 |     72 |      0 |      0 |      2 |      5 |      4 |      4 |      0 |      2 |     32 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 4168200 |     183 |     81 |     68 |     8 |    0 |     0 |    1 |    2 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     94 |     89 |       1 |       1 |       0 |       0 |     14 |      5 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        2 |        7 |        8 |        7 |        9 |       2 |        4 |        1 |       12 |        6 |       10 |        5 |       6 |        1 |        1 |        7 |        8 |        7 |        8 |       7 |        0 |        3 |        3 |        4 |        4 |       10 |       5 |        2 |        2 |        4 |        1 |        1 |        2 |       1 |        0 |        0 |        3 |        3 |        3 |        1 |       0 |        0 |        0 |        2 |        3 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      8 |     19 |      7 |      2 |      5 |     40 |      0 |      0 |      0 |      2 |      9 |      7 |      2 |      0 |     48 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      1 |     16 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4168900 |     526 |    137 |    251 |     9 |    0 |     4 |    3 |    0 |     5 |    0 |    117 |    0 |    0 |    0 |    0 |    232 |    294 |       6 |       5 |       2 |       0 |     19 |     10 |     10 |      1 |      0 |      2 |      1 |      0 |      1 |      3 |      1 |      0 |      0 |      1 |      4 |      0 |      1 |      3 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        2 |        7 |        7 |       12 |       13 |        8 |       0 |        3 |       13 |       16 |       27 |       15 |       14 |       0 |        9 |       10 |       14 |       20 |       31 |       32 |       1 |        3 |        8 |       21 |       23 |       39 |       40 |       0 |        6 |       13 |       12 |        6 |       15 |        7 |       0 |        3 |       11 |        7 |       13 |       15 |        9 |       0 |        4 |        1 |        0 |        1 |        0 |        1 |       0 |        3 |        3 |        3 |        2 |        3 |        0 |       0 |      0 |      0 |     18 |     19 |      9 |      6 |      8 |     77 |      0 |      0 |      1 |     16 |     41 |     15 |     15 |     12 |    151 |      0 |      0 |      0 |     19 |     19 |      1 |      1 |      5 |     72 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4169000 |     283 |     65 |    168 |     2 |    0 |     2 |    1 |    0 |     4 |    0 |     41 |    0 |    0 |    0 |    0 |    133 |    150 |       2 |       3 |       1 |       0 |      3 |     11 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        1 |        2 |        5 |       10 |        3 |        6 |       1 |        0 |        1 |        7 |       15 |        7 |        6 |       1 |        1 |        4 |        8 |       11 |       13 |       27 |      12 |        6 |        4 |        7 |       14 |       15 |       30 |      16 |        3 |        4 |        4 |        1 |        7 |        3 |       1 |        2 |        2 |        8 |        2 |        3 |        1 |       0 |        2 |        2 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      1 |     10 |     12 |      7 |      0 |      1 |     34 |      0 |      0 |      1 |     12 |     21 |     11 |      9 |      8 |    106 |      0 |      0 |      1 |      6 |      4 |      7 |      0 |      0 |     23 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4169100 |     507 |    129 |    297 |    11 |    0 |     1 |    2 |    0 |     1 |    0 |     66 |    0 |    0 |    0 |    0 |    225 |    282 |       3 |       9 |       5 |       0 |     18 |     13 |      6 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        4 |        6 |        6 |        7 |       22 |       1 |        2 |        5 |       10 |       15 |       19 |       28 |       2 |        2 |        3 |        9 |       11 |       32 |       68 |      12 |        3 |        6 |        8 |       17 |       41 |       78 |       7 |        2 |        2 |        6 |        9 |        8 |        5 |       1 |        4 |        3 |        5 |        3 |       10 |        7 |       1 |        0 |        1 |        0 |        2 |        3 |        1 |       0 |        0 |        2 |        1 |        1 |        2 |        2 |       0 |      0 |      0 |     15 |     21 |     12 |      6 |      7 |     68 |      0 |      0 |      5 |     36 |     38 |     20 |     12 |     14 |    172 |      0 |      0 |      2 |      5 |      7 |      2 |      1 |      1 |     48 |      0 |      0 |      1 |      2 |      1 |      1 |      1 |      1 |      8 |      0 |     37 | s03      | R    |
| 4169200 |     494 |    108 |    282 |     5 |    0 |     3 |    6 |    0 |     5 |    0 |     85 |    0 |    0 |    0 |    0 |    247 |    247 |       5 |       9 |       1 |       0 |      5 |     12 |      8 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      2 |      4 |      0 |      3 |      0 |      0 |      0 |       0 |       2 |       1 |       0 |      1 |      0 |      0 |      0 |        3 |        4 |        2 |        8 |       12 |       14 |       2 |        4 |        4 |        9 |       11 |       15 |       19 |       1 |        5 |       14 |       22 |       26 |       38 |       32 |       8 |        9 |        5 |       23 |       28 |       37 |       27 |       8 |        4 |       10 |        6 |        7 |       10 |       10 |       0 |        5 |        2 |        6 |        7 |       10 |        7 |       1 |        1 |        1 |        1 |        3 |        3 |        1 |       0 |        0 |        1 |        3 |        2 |        1 |        2 |       0 |      0 |      2 |     13 |     18 |      6 |      5 |      7 |     57 |      0 |      0 |      1 |     36 |     41 |     20 |     10 |     20 |    154 |      0 |      0 |      1 |     13 |      6 |      9 |      1 |      3 |     52 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      1 |     10 |      0 |     37 | s03      | R    |
| 4169300 |     317 |     84 |    177 |     5 |    0 |     1 |    4 |    0 |     1 |    0 |     45 |    0 |    0 |    0 |    0 |    145 |    172 |       1 |       2 |       0 |       0 |     15 |     17 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        5 |        6 |        8 |        8 |       1 |        2 |        6 |       12 |       12 |       15 |        7 |       0 |        3 |        2 |       12 |       11 |       24 |       32 |       4 |        4 |        2 |       18 |       19 |       18 |       24 |       4 |        3 |        4 |        2 |        1 |        8 |        3 |       0 |        4 |        1 |        3 |        4 |        8 |        3 |       1 |        1 |        0 |        2 |        3 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        0 |       0 |      0 |      2 |      7 |     23 |      5 |      0 |      1 |     46 |      0 |      0 |      3 |     15 |     22 |     11 |      9 |     10 |    107 |      0 |      0 |      1 |      6 |      2 |      4 |      2 |      1 |     29 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4176000 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4176400 |      70 |     26 |     37 |     1 |    0 |     0 |    0 |    0 |     2 |    0 |      4 |    0 |    0 |    0 |    0 |     37 |     33 |       1 |       0 |       0 |       0 |      5 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        0 |        2 |        2 |        3 |       1 |        0 |        0 |        0 |        4 |        6 |        4 |       0 |        0 |        2 |        4 |        2 |        6 |        7 |       1 |        0 |        1 |        2 |        1 |        5 |        4 |       2 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      4 |      2 |      5 |      0 |     14 |      0 |      0 |      2 |      2 |      9 |      1 |      1 |      2 |     20 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4176500 |     359 |    125 |    168 |     9 |    0 |     3 |    4 |    1 |     7 |    0 |     42 |    0 |    0 |    0 |    0 |    179 |    180 |       5 |       1 |       1 |       0 |     14 |     13 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        6 |        5 |        9 |       13 |        7 |       7 |        3 |        8 |        8 |       23 |       20 |        6 |       5 |        9 |        3 |        8 |       21 |       22 |       22 |       2 |       10 |        4 |       10 |       22 |       16 |       15 |       4 |        5 |        3 |        2 |        8 |        4 |        3 |       0 |        3 |        1 |        2 |        7 |        4 |        0 |       0 |        3 |        0 |        0 |        5 |        6 |        1 |       0 |        0 |        4 |        2 |        0 |        1 |        2 |       0 |      0 |      0 |     13 |     19 |      7 |      5 |      6 |     75 |      0 |      0 |      0 |     18 |     31 |     13 |      4 |      8 |     94 |      0 |      0 |      0 |      8 |      9 |      0 |      0 |      1 |     24 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4176600 |       8 |      0 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      4 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4176700 |      85 |     17 |     53 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     41 |     44 |       1 |       1 |       0 |       0 |      3 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        2 |        3 |       0 |        1 |        1 |        1 |        2 |        4 |        0 |       1 |        2 |        1 |        1 |       10 |        8 |        4 |       0 |        2 |        0 |        4 |        9 |        8 |        3 |       1 |        0 |        0 |        1 |        1 |        2 |        3 |       1 |        2 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |      3 |      3 |      1 |      5 |      1 |      4 |      0 |      0 |      0 |      6 |      6 |      1 |      4 |     11 |     25 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4176800 |     181 |     60 |     88 |     3 |    0 |     0 |    0 |    0 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |     79 |    102 |       1 |       3 |       1 |       0 |     13 |      8 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      3 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        2 |        1 |        1 |        8 |        7 |        3 |       2 |        6 |        2 |        1 |       13 |       12 |        2 |       0 |        2 |        0 |        3 |       13 |       15 |        9 |       2 |        0 |        2 |        7 |       12 |        8 |       14 |       1 |        1 |        2 |        1 |        4 |        2 |        0 |       0 |        2 |        2 |        1 |        9 |        4 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      7 |     10 |      2 |      4 |      6 |     31 |      0 |      0 |      0 |      9 |     14 |      7 |      3 |      7 |     48 |      0 |      0 |      0 |      1 |      5 |      1 |      3 |      1 |     18 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4182000 |     206 |     66 |     88 |     3 |    0 |     0 |    1 |    2 |     1 |    0 |     45 |    0 |    0 |    0 |    0 |     93 |    113 |       4 |       2 |       1 |       0 |     11 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        5 |        9 |        3 |        3 |        5 |       1 |        1 |       11 |        5 |        5 |        5 |        9 |       3 |        1 |        4 |       10 |       10 |        7 |       10 |       2 |        4 |        7 |        8 |        4 |        7 |       13 |       1 |        1 |        6 |        6 |        3 |        3 |        3 |       0 |        2 |        5 |        6 |        6 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        1 |        2 |        0 |        0 |       0 |      0 |      1 |      5 |      7 |      3 |      0 |      0 |     50 |      0 |      0 |      0 |      8 |     12 |      2 |      3 |      3 |     60 |      0 |      0 |      2 |      9 |      7 |      0 |      1 |      0 |     26 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4182100 |     271 |     76 |    107 |     7 |    0 |     4 |    4 |    2 |     3 |    0 |     68 |    0 |    0 |    0 |    0 |    160 |    111 |       1 |       5 |       1 |       0 |     10 |      4 |      6 |      0 |      2 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        3 |       13 |        8 |        8 |        3 |        4 |       3 |        3 |        8 |        1 |        6 |        6 |        7 |       3 |        5 |        8 |       14 |        7 |       15 |       10 |       2 |        3 |        5 |        8 |       12 |        6 |       10 |       2 |        6 |       11 |        8 |       10 |        8 |        5 |       0 |        1 |        4 |        4 |        5 |        4 |        2 |       0 |        1 |        2 |        4 |        2 |        0 |        0 |       0 |        2 |        4 |        5 |        0 |        0 |        0 |       0 |      0 |      0 |      9 |      7 |      3 |      0 |      3 |     54 |      0 |      0 |      1 |     12 |     15 |      7 |      4 |      6 |     62 |      0 |      0 |      0 |      8 |     10 |      1 |      2 |      3 |     44 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4182200 |     253 |     79 |    115 |     4 |    0 |     1 |    3 |    2 |     1 |    0 |     48 |    0 |    0 |    0 |    0 |    141 |    112 |       2 |       1 |       0 |       1 |      2 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        5 |        4 |        6 |        5 |        3 |        8 |       3 |        1 |        7 |        7 |       11 |        2 |       13 |       4 |        6 |       12 |       16 |       13 |       11 |       12 |       2 |        2 |        6 |        7 |        6 |       11 |       11 |       0 |        4 |        6 |        6 |        2 |        1 |        6 |       0 |        2 |        8 |        7 |        3 |        1 |        1 |       1 |        0 |        4 |        3 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     10 |      9 |      3 |      4 |      6 |     47 |      0 |      0 |      0 |     19 |     27 |      6 |      6 |      3 |     54 |      0 |      0 |      1 |      3 |      5 |      1 |      0 |      0 |     38 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4182300 |       8 |      3 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4183000 |     430 |    177 |    156 |    13 |    0 |     4 |    3 |    3 |     5 |    0 |     69 |    0 |    0 |    0 |    0 |    224 |    206 |       4 |       6 |       2 |       1 |     26 |      9 |     15 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      1 |      0 |      1 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      1 |        3 |        6 |       18 |        9 |       20 |       17 |      10 |        4 |        5 |       20 |       18 |       22 |       17 |       8 |        2 |        2 |       16 |       20 |       19 |       19 |       7 |        0 |        4 |       10 |       19 |       19 |       12 |       7 |        3 |        4 |       11 |       12 |        6 |        2 |       2 |        7 |        2 |        8 |        6 |        6 |        0 |       0 |        2 |        2 |        2 |        5 |        4 |        1 |       0 |        2 |        1 |        0 |        3 |        2 |        4 |       0 |      0 |      1 |     12 |     28 |     17 |     11 |      4 |    104 |      0 |      0 |      1 |     13 |     29 |      7 |     13 |      5 |     88 |      0 |      0 |      0 |     11 |      7 |      1 |      1 |      3 |     46 |      0 |      0 |      0 |      5 |      7 |      1 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 4183100 |     300 |     92 |    142 |     8 |    0 |     2 |    0 |    2 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    150 |    150 |       0 |       1 |       0 |       0 |     10 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        4 |        8 |       13 |        8 |       3 |        4 |        6 |        6 |       15 |        8 |       11 |       2 |        3 |        7 |        5 |       15 |       19 |       17 |       8 |        1 |        2 |        2 |       14 |       22 |       20 |       7 |        3 |        2 |        3 |        8 |        8 |        5 |       1 |        5 |        2 |        1 |        9 |        4 |        0 |       2 |        0 |        1 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        4 |        0 |        3 |       0 |      0 |      2 |      6 |     21 |      5 |      1 |      1 |     56 |      0 |      0 |      1 |     19 |     20 |      3 |      8 |      8 |     83 |      0 |      0 |      0 |      9 |      7 |      4 |      0 |      0 |     33 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4184000 |     262 |     84 |    105 |     4 |    0 |     1 |    2 |    1 |     5 |    0 |     60 |    0 |    0 |    0 |    0 |    124 |    138 |       2 |       1 |       0 |       0 |     11 |      7 |      7 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        5 |        2 |        3 |        9 |        8 |       4 |        1 |        5 |        3 |        9 |       12 |       10 |      11 |        3 |        2 |       11 |       11 |       14 |       10 |       6 |        0 |        0 |        6 |       12 |        9 |       16 |       5 |        4 |        5 |        4 |        9 |        5 |        3 |       1 |        7 |        1 |        7 |        5 |        5 |        3 |       1 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        3 |        2 |        0 |        1 |       0 |      0 |      0 |      7 |      8 |      8 |      1 |      3 |     57 |      0 |      0 |      0 |     16 |     18 |      3 |      6 |      3 |     59 |      0 |      0 |      0 |      5 |     11 |      0 |      1 |      2 |     41 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4184100 |     253 |    102 |     75 |     4 |    0 |     1 |    2 |    1 |     8 |    0 |     60 |    0 |    0 |    0 |    0 |    125 |    128 |       6 |       1 |       2 |       1 |      7 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        6 |        6 |       14 |       10 |        6 |       4 |        3 |        7 |        9 |       15 |       11 |        3 |       2 |        1 |        2 |       13 |        7 |       10 |        2 |       0 |        1 |        7 |        8 |        8 |       11 |        5 |       0 |        2 |        7 |        3 |        8 |        7 |        2 |       1 |        0 |       10 |        7 |        8 |        3 |        2 |       0 |        4 |        1 |        0 |        2 |        1 |        0 |       0 |        0 |        3 |        2 |        2 |        0 |        1 |       0 |      0 |      0 |      7 |     11 |      8 |      2 |      2 |     72 |      0 |      0 |      2 |     13 |     15 |      2 |      2 |      5 |     36 |      0 |      0 |      2 |      6 |      6 |      4 |      0 |      4 |     38 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 4184200 |     366 |    146 |    138 |     7 |    0 |     4 |    4 |    2 |     2 |    0 |     63 |    0 |    0 |    0 |    0 |    179 |    187 |       4 |       1 |       2 |       1 |     21 |     12 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        4 |       12 |        8 |       21 |       16 |        9 |       3 |        2 |        6 |        7 |       20 |       24 |        6 |       8 |        2 |        5 |       19 |       13 |       16 |       12 |       2 |        4 |        6 |       15 |       15 |       12 |        9 |       8 |        4 |        2 |        8 |        6 |        5 |        2 |       1 |        3 |        5 |        9 |        8 |        4 |        4 |       2 |        0 |        1 |        2 |        3 |        3 |        0 |       0 |        1 |        1 |        3 |        3 |        0 |        2 |       0 |      0 |      0 |     20 |     23 |      6 |      6 |      5 |     86 |      0 |      0 |      1 |     13 |     31 |      6 |      2 |      5 |     80 |      0 |      0 |      0 |      8 |     12 |      0 |      0 |      2 |     41 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4185000 |     356 |    115 |    121 |    10 |    0 |     4 |    3 |    1 |     6 |    0 |     96 |    0 |    0 |    0 |    0 |    167 |    189 |       7 |       4 |       2 |       1 |     17 |      5 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |       2 |       1 |       1 |       0 |      0 |      1 |      1 |      0 |        4 |        5 |        6 |       12 |        6 |        5 |       0 |        9 |       17 |       16 |        9 |        8 |       17 |       1 |        6 |       16 |       14 |        7 |       11 |       10 |       0 |        5 |       17 |        7 |        7 |        9 |       10 |       2 |        1 |       20 |       11 |        7 |        6 |        5 |       1 |        6 |       14 |        8 |       12 |        3 |        2 |       0 |        1 |        8 |        4 |        0 |        1 |        0 |       0 |        2 |        1 |        3 |        1 |        2 |        1 |       0 |      0 |      0 |      6 |     12 |      8 |      1 |      0 |     88 |      0 |      0 |      1 |      7 |     14 |      5 |      2 |      1 |     91 |      0 |      0 |      0 |     13 |      9 |      3 |      0 |      1 |     70 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4185100 |     188 |     64 |    100 |     2 |    0 |     1 |    0 |    0 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     92 |     96 |       0 |       2 |       2 |       0 |     12 |     12 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        6 |        6 |        2 |       4 |        1 |        2 |        5 |       14 |        9 |        7 |       3 |        1 |        1 |        2 |        7 |       20 |       16 |       8 |        1 |        2 |        1 |       13 |       15 |        8 |       5 |        0 |        3 |        2 |        3 |        2 |        1 |       0 |        1 |        0 |        3 |        4 |        2 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      8 |      6 |      3 |      1 |     43 |      0 |      0 |      3 |      6 |     13 |      4 |      5 |      5 |     64 |      0 |      0 |      0 |      0 |      6 |      3 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4185200 |     138 |     39 |     66 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |     71 |     67 |       1 |       4 |       1 |       0 |     10 |      7 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        0 |        6 |        2 |        7 |       1 |        1 |        1 |        4 |        6 |        4 |        6 |       0 |        2 |        3 |        6 |        6 |       10 |        8 |       0 |        1 |        3 |        3 |        3 |       12 |        9 |       0 |        1 |        3 |        1 |        5 |        4 |        5 |       0 |        0 |        2 |        1 |        4 |        5 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      7 |      2 |      2 |      2 |     22 |      0 |      0 |      0 |      7 |      8 |      5 |      5 |      2 |     39 |      0 |      0 |      0 |      5 |      6 |      3 |      0 |      1 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4195000 |     860 |    263 |    395 |    23 |    0 |     7 |   10 |    3 |     3 |    0 |    156 |    0 |    0 |    0 |    0 |    364 |    496 |      77 |      50 |      33 |      11 |      7 |      9 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      1 |        7 |        6 |       22 |       20 |       14 |       18 |       6 |       10 |       29 |       28 |       25 |       15 |       46 |      17 |       18 |       23 |       37 |       41 |       18 |       30 |       9 |       19 |       22 |       44 |       44 |       25 |       55 |      10 |       11 |       12 |       21 |       14 |       10 |       10 |       0 |       14 |       17 |       20 |        9 |       13 |        5 |       0 |        1 |        2 |        2 |        6 |        4 |        2 |       0 |        2 |        4 |        6 |        9 |        5 |        3 |       0 |      0 |      3 |     43 |     41 |     20 |      9 |      5 |    142 |      0 |      0 |      1 |     48 |     49 |     15 |     13 |     10 |    259 |      0 |      0 |      0 |     16 |     22 |     11 |      4 |      0 |    103 |      0 |      0 |      1 |      3 |      9 |      3 |      2 |      0 |     28 |      0 |     37 | s03      | R    |
| 4195100 |      44 |      7 |     32 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     19 |     25 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        2 |        0 |       1 |        2 |        1 |        1 |        4 |        1 |        5 |       0 |        0 |        0 |        3 |        8 |        1 |        6 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      2 |      5 |      2 |      4 |      2 |     17 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4195300 |      57 |     17 |     19 |     5 |    0 |     1 |    2 |    1 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     27 |     30 |       5 |       1 |       6 |       3 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        4 |        2 |        1 |        1 |       0 |        0 |        3 |        2 |        0 |        1 |        2 |       0 |        0 |        0 |        5 |        0 |        2 |        0 |       0 |        1 |        3 |        2 |        0 |        3 |        3 |       0 |        1 |        3 |        0 |        2 |        0 |        1 |       0 |        0 |        4 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        2 |        0 |        1 |        1 |       0 |      0 |      0 |      1 |      0 |      5 |      0 |      0 |     11 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     11 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4195800 |     176 |     27 |    120 |     0 |    0 |     2 |    1 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     90 |     86 |       1 |       3 |       1 |       0 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        0 |        0 |        4 |        2 |        3 |       0 |        0 |        0 |        1 |        7 |        4 |        5 |       0 |        4 |        3 |        6 |       12 |       10 |       24 |       0 |        4 |        2 |       10 |       15 |        8 |       22 |       0 |        2 |        1 |        3 |        5 |        4 |        3 |       0 |        1 |        0 |        0 |        2 |        3 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      3 |      5 |      3 |      6 |      1 |      8 |      0 |      0 |      0 |     21 |     27 |     10 |     10 |      4 |     48 |      0 |      0 |      0 |      3 |      1 |      0 |      4 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4195900 |     108 |     24 |     63 |     2 |    0 |     0 |    3 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     54 |     54 |       3 |       0 |       1 |       0 |      2 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        3 |        6 |        1 |       0 |        1 |        1 |        3 |        3 |        3 |        1 |       0 |        2 |        0 |        4 |        7 |       13 |        7 |       0 |        2 |        4 |        4 |        5 |       11 |        4 |       0 |        1 |        0 |        0 |        2 |        3 |        1 |       0 |        1 |        0 |        1 |        2 |        4 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |      0 |      0 |      3 |      3 |      2 |      1 |      0 |     15 |      0 |      0 |      0 |     13 |      3 |      4 |      6 |      5 |     32 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |      2 |      8 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4196000 |      55 |     10 |     36 |     1 |    0 |     0 |    1 |    0 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |     27 |     28 |       1 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        1 |        4 |        1 |       0 |        0 |        1 |        1 |        4 |        8 |        7 |       0 |        0 |        0 |        3 |        4 |        5 |        3 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      8 |      0 |      0 |      0 |      1 |      8 |      0 |      3 |      3 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4196100 |     337 |     75 |    212 |     3 |    0 |     3 |    0 |    0 |     2 |    0 |     42 |    0 |    0 |    0 |    0 |    156 |    181 |       4 |       5 |       2 |       0 |      4 |     14 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        4 |       12 |       10 |       1 |        4 |        0 |        3 |       11 |       13 |       12 |       2 |        3 |        1 |       11 |       24 |       20 |       40 |       4 |        6 |        3 |       13 |       20 |       21 |       42 |       4 |        2 |        2 |        4 |        2 |        4 |        5 |       0 |        3 |        4 |        2 |        7 |        4 |        3 |       0 |        2 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        2 |       0 |      0 |      2 |      9 |      9 |      5 |      5 |      2 |     43 |      0 |      0 |      1 |     18 |     20 |      8 |     13 |     15 |    137 |      0 |      0 |      0 |      7 |      3 |      2 |      2 |      1 |     27 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4196200 |     567 |    180 |    266 |    26 |    0 |     2 |    5 |    2 |     2 |    0 |     84 |    0 |    0 |    0 |    0 |    255 |    312 |      45 |      21 |      15 |       6 |      5 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        7 |        5 |        7 |       10 |       11 |       22 |       8 |        1 |       11 |       11 |       13 |       18 |       45 |      11 |        9 |       16 |       16 |       27 |       20 |       30 |       3 |       12 |       10 |       24 |       30 |       22 |       40 |       7 |        6 |        6 |       11 |       10 |        6 |        4 |       0 |        7 |        6 |        6 |       11 |        5 |        6 |       0 |        8 |        4 |        2 |        3 |        1 |        3 |       0 |        3 |        1 |        2 |        3 |        1 |        6 |       0 |      0 |      5 |     23 |     37 |      8 |      7 |      8 |     92 |      0 |      0 |      7 |     36 |     40 |     17 |     16 |     10 |    140 |      0 |      0 |      1 |     11 |     18 |      3 |      1 |      4 |     46 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 4196900 |       3 |      2 |      0 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4197000 |     502 |     85 |    331 |     7 |    0 |     1 |    4 |    0 |     1 |    0 |     73 |    0 |    0 |    0 |    0 |    244 |    258 |       4 |       9 |       2 |       1 |      3 |     18 |      3 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        0 |        1 |       10 |       14 |       11 |       2 |        1 |        2 |        4 |       12 |       15 |        9 |       3 |       11 |        9 |       12 |       29 |       40 |       62 |       4 |       11 |       13 |       17 |       27 |       42 |       51 |       3 |        3 |        4 |        5 |        8 |        6 |        5 |       0 |        4 |        5 |       12 |        7 |        9 |        5 |       0 |        0 |        1 |        0 |        4 |        0 |        2 |       0 |        1 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |      9 |     13 |     10 |      6 |      2 |     45 |      0 |      0 |      1 |     42 |     45 |     15 |      8 |     16 |    204 |      0 |      0 |      4 |     11 |     12 |      6 |      3 |      1 |     36 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4197100 |     440 |     85 |    260 |    13 |    0 |     2 |    4 |    0 |     3 |    0 |     73 |    0 |    0 |    0 |    0 |    222 |    218 |       5 |      10 |       5 |       0 |      7 |     15 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        0 |        5 |        7 |        5 |       18 |       1 |        1 |        3 |        6 |       11 |       15 |       10 |       0 |        5 |        2 |       18 |       27 |       24 |       48 |       7 |        7 |        1 |       14 |       23 |       26 |       49 |       9 |        4 |        2 |        6 |       16 |        4 |        7 |       0 |        4 |        4 |        7 |        8 |        7 |        4 |       0 |        1 |        4 |        3 |        2 |        0 |        3 |       0 |        0 |        0 |        3 |        1 |        4 |        1 |       0 |      0 |      0 |     10 |      8 |      8 |      2 |      3 |     54 |      0 |      0 |      1 |     27 |     41 |     13 |      8 |     14 |    156 |      0 |      0 |      1 |      9 |      7 |      2 |      2 |      4 |     48 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4197200 |     123 |     34 |     66 |     2 |    0 |     1 |    3 |    0 |     1 |    0 |     16 |    0 |    0 |    0 |    0 |     52 |     71 |       7 |       7 |       2 |       1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        3 |        3 |        2 |        2 |       1 |        3 |        0 |        3 |        5 |        2 |        8 |       1 |        4 |        3 |        5 |        4 |        7 |        6 |       1 |        4 |        2 |        7 |       10 |        7 |        6 |       0 |        0 |        3 |        2 |        0 |        0 |        1 |       0 |        2 |        3 |        1 |        2 |        1 |        1 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      4 |     12 |      4 |      4 |      0 |     10 |      0 |      0 |      2 |      5 |     12 |      4 |      5 |      6 |     32 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4198000 |     602 |    125 |    352 |    18 |    0 |     3 |   12 |    2 |     2 |    0 |     88 |    0 |    0 |    0 |    0 |    283 |    319 |      15 |      13 |       9 |       5 |     10 |     10 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        2 |        2 |       15 |       11 |       20 |       0 |        3 |        4 |        7 |       25 |       16 |       15 |       2 |        6 |       12 |       18 |       37 |       32 |       62 |       5 |       14 |       14 |       24 |       29 |       40 |       57 |       2 |        3 |        7 |        6 |       10 |       11 |        5 |       0 |        7 |        7 |       12 |       11 |        4 |        5 |       0 |        0 |        1 |        6 |        4 |        3 |        2 |       0 |        6 |        2 |        3 |        7 |        0 |        3 |       0 |      0 |      0 |     12 |     17 |     12 |      4 |      2 |     78 |      0 |      0 |      1 |     35 |     62 |     17 |     29 |     19 |    189 |      0 |      0 |      1 |      9 |      9 |      4 |      0 |      2 |     63 |      0 |      0 |      0 |      8 |      3 |      7 |      0 |      1 |     18 |      0 |     37 | s03      | R    |
| 4198100 |     698 |    132 |    445 |    11 |    0 |     2 |    6 |    0 |     4 |    0 |     98 |    0 |    0 |    0 |    0 |    324 |    374 |       5 |      15 |       7 |       5 |      6 |     17 |      9 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        8 |       10 |       12 |       17 |       2 |        6 |        5 |       11 |       16 |       13 |       23 |       4 |       16 |       11 |       34 |       36 |       46 |       61 |      15 |       12 |       14 |       30 |       48 |       53 |       56 |      13 |        7 |        2 |        6 |        6 |        6 |        5 |       2 |       12 |        9 |       13 |       17 |        5 |        7 |       1 |        4 |        1 |        2 |        5 |        2 |        3 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       1 |      0 |      1 |     27 |     15 |      6 |      4 |      9 |     70 |      0 |      0 |      1 |     72 |     70 |     25 |     21 |     21 |    235 |      0 |      0 |      2 |     22 |      9 |      3 |      3 |      7 |     52 |      0 |      0 |      0 |      2 |      5 |      2 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4198200 |     249 |     38 |    167 |     3 |    0 |     3 |    2 |    0 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |    121 |    128 |       3 |       3 |       1 |       0 |      3 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        2 |        3 |        7 |       0 |        0 |        2 |        6 |        7 |        6 |        4 |       0 |        1 |        6 |        9 |       25 |       17 |       26 |       3 |        3 |        2 |       15 |       16 |       18 |       26 |       0 |        2 |        0 |        1 |        3 |        4 |        6 |       0 |        2 |        3 |        1 |        5 |        3 |        6 |       0 |        0 |        0 |        0 |        1 |        3 |        1 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |      8 |      4 |      4 |      0 |      3 |     19 |      0 |      0 |      3 |     20 |     24 |     10 |     14 |     13 |     83 |      0 |      0 |      1 |      8 |      3 |      4 |      0 |      1 |     19 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4198300 |     389 |     84 |    240 |     8 |    0 |     2 |    5 |    0 |     2 |    0 |     48 |    0 |    0 |    0 |    0 |    180 |    209 |       6 |      15 |       5 |       0 |      3 |      9 |      3 |      2 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        4 |       11 |        3 |       11 |       1 |        2 |        2 |        6 |        9 |       14 |       14 |       5 |       10 |        3 |       14 |       26 |       27 |       34 |       3 |        9 |        4 |       20 |       39 |       21 |       25 |       5 |        2 |        1 |        5 |        7 |        3 |        4 |       0 |        6 |        2 |        2 |       10 |        3 |        3 |       0 |        0 |        1 |        2 |        2 |        1 |        3 |       0 |        3 |        0 |        1 |        2 |        1 |        1 |       0 |      0 |      0 |     11 |     12 |     13 |      6 |      1 |     41 |      0 |      0 |      1 |     37 |     38 |     10 |     27 |     13 |    114 |      0 |      0 |      0 |      2 |      3 |      3 |      4 |      3 |     33 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4198400 |      12 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      7 |    0 |    0 |    0 |    0 |      6 |      6 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4198500 |      81 |     16 |     52 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     43 |     38 |       0 |       0 |       2 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        4 |       0 |        0 |        0 |        1 |        4 |        2 |        2 |       1 |        0 |        1 |        5 |        6 |        7 |        8 |       1 |        1 |        0 |        6 |        2 |        6 |        8 |       1 |        2 |        0 |        1 |        3 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |     12 |      0 |      0 |      1 |      9 |      5 |      0 |      0 |      2 |     35 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4198600 |      11 |      3 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      6 |      5 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        3 |        1 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4198700 |      74 |     25 |     40 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     35 |     39 |       0 |       1 |       0 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        0 |        2 |        1 |        2 |       1 |        2 |        0 |        2 |        5 |        0 |        7 |       2 |        0 |        1 |        4 |        4 |        4 |        8 |       2 |        0 |        2 |        3 |        4 |        4 |        3 |       1 |        1 |        1 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      3 |      5 |      1 |      1 |      3 |     12 |      0 |      0 |      0 |      5 |     11 |      1 |      1 |      5 |     17 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4199000 |     713 |    180 |    371 |    21 |    0 |     4 |    3 |    1 |     2 |    0 |    131 |    0 |    0 |    0 |    0 |    323 |    390 |      30 |      20 |      17 |       1 |      6 |      7 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      1 |        6 |        5 |       16 |       18 |       13 |       13 |       3 |        3 |       13 |       16 |       31 |       18 |       20 |       5 |       14 |       19 |       33 |       33 |       41 |       35 |       5 |       18 |       15 |       38 |       48 |       28 |       42 |       2 |       10 |        7 |       12 |       13 |        6 |        6 |       1 |       18 |       14 |       21 |       13 |        2 |        7 |       1 |        4 |        0 |        2 |        1 |        3 |        4 |       0 |        1 |        2 |        4 |        2 |        3 |        4 |       1 |      0 |      2 |     16 |     31 |     13 |      9 |      8 |    101 |      0 |      0 |      5 |     53 |     69 |     22 |     26 |     13 |    183 |      0 |      0 |      4 |     23 |     13 |     10 |      3 |      2 |     76 |      0 |      0 |      2 |      4 |      4 |      3 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4199100 |     335 |     93 |    161 |     5 |    0 |     4 |    3 |    1 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    139 |    196 |      21 |      21 |       9 |       1 |      3 |     10 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        2 |        7 |        6 |        7 |        5 |        6 |       1 |        9 |        5 |        9 |       16 |        7 |       11 |       2 |        7 |        9 |       14 |       16 |        5 |       13 |       3 |        9 |       16 |       22 |       12 |        7 |       21 |       7 |        4 |        5 |        9 |        7 |        4 |        1 |       2 |        6 |        7 |       11 |        7 |        1 |        2 |       1 |        0 |        1 |        1 |        1 |        3 |        0 |       0 |        0 |        2 |        1 |        3 |        2 |        0 |       0 |      0 |      0 |     13 |      8 |      2 |      3 |      1 |     66 |      0 |      0 |      0 |     19 |     17 |      4 |      5 |      7 |    109 |      0 |      0 |      1 |      7 |      7 |      2 |      2 |      1 |     47 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4200000 |     442 |    118 |    237 |     8 |    0 |     7 |    1 |    1 |     3 |    0 |     67 |    0 |    0 |    0 |    0 |    188 |    254 |      53 |      22 |      20 |       7 |      2 |      9 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      0 |        1 |        6 |       10 |        7 |        7 |       14 |       3 |        4 |       11 |       11 |       12 |        7 |       24 |       1 |        7 |       10 |       14 |       16 |       14 |       35 |       5 |       12 |       20 |       16 |       17 |       14 |       51 |       6 |        3 |       14 |        3 |        7 |        1 |        4 |       0 |        8 |       10 |        5 |        3 |        4 |        4 |       1 |        0 |        2 |        0 |        1 |        2 |        2 |       0 |        1 |        4 |        1 |        3 |        1 |        3 |       0 |      0 |      1 |     13 |     18 |      5 |      1 |      5 |     75 |      0 |      0 |      2 |     33 |     19 |      9 |     11 |      6 |    157 |      0 |      0 |      0 |      5 |      7 |      3 |      0 |      0 |     52 |      0 |      0 |      0 |      6 |      5 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4200100 |     261 |     72 |    118 |     5 |    0 |     3 |    0 |    1 |     2 |    0 |     60 |    0 |    0 |    0 |    0 |    124 |    137 |      20 |      13 |      12 |       1 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        4 |        3 |        6 |        5 |        2 |        5 |       3 |        5 |        5 |        6 |       11 |        5 |       10 |       2 |        5 |        5 |       18 |       10 |       11 |        8 |       4 |        6 |        4 |       16 |       10 |        4 |       13 |       4 |        6 |        5 |        6 |        3 |        1 |        5 |       2 |        5 |        7 |        6 |        7 |        2 |        5 |       0 |        1 |        3 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      8 |      7 |      5 |      1 |      2 |     49 |      0 |      0 |      2 |      7 |     12 |      3 |      9 |      2 |     83 |      0 |      0 |      0 |      7 |      5 |      2 |      1 |      1 |     44 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4200900 |      67 |     24 |     28 |     4 |    0 |     0 |    0 |    0 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     24 |     43 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        2 |        0 |        1 |        2 |       0 |        0 |        1 |        1 |        1 |        2 |       10 |       0 |        0 |        0 |        0 |        1 |        1 |        6 |       0 |        2 |        1 |        1 |        2 |        1 |       13 |       0 |        1 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |      0 |      0 |      4 |      3 |      0 |      2 |      1 |     14 |      0 |      0 |      0 |      3 |      3 |      2 |      1 |      0 |     19 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4201000 |     554 |    153 |    262 |    20 |    0 |     5 |    8 |    0 |     2 |    0 |    104 |    0 |    0 |    0 |    0 |    279 |    275 |      85 |      42 |      39 |       7 |      0 |     10 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        4 |        9 |       19 |       20 |        8 |       18 |       1 |        6 |       12 |       12 |       22 |       10 |       11 |       1 |       13 |       19 |       31 |       31 |       14 |       19 |       1 |       11 |       18 |       37 |       22 |       13 |       32 |       1 |       11 |        9 |       15 |        6 |        7 |        4 |       1 |       11 |       14 |       12 |        6 |        4 |        4 |       0 |        3 |        3 |        7 |        4 |        1 |        1 |       0 |        4 |        4 |        3 |        2 |        1 |        2 |       0 |      0 |      3 |     26 |     26 |      9 |      4 |      8 |     77 |      0 |      0 |      0 |     19 |     45 |      7 |      8 |     12 |    171 |      0 |      0 |      0 |     19 |     14 |      0 |      2 |      2 |     67 |      0 |      0 |      1 |      7 |      1 |      0 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 4201100 |     707 |    197 |    353 |    16 |    0 |     6 |    3 |    1 |     3 |    0 |    128 |    0 |    0 |    0 |    0 |    321 |    386 |      59 |      49 |      34 |      10 |      4 |     14 |      2 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      1 |      3 |      0 |      0 |        9 |       18 |       14 |       12 |        6 |       23 |       1 |       19 |       17 |       18 |       18 |       19 |       21 |       2 |       13 |       22 |       29 |       34 |       29 |       37 |       2 |       26 |       33 |       30 |       30 |       24 |       42 |       2 |       15 |       13 |       14 |        4 |        1 |        4 |       0 |       16 |       17 |       15 |        9 |       11 |        9 |       0 |        4 |        5 |        6 |        3 |        2 |        1 |       0 |        2 |        2 |        2 |        2 |        0 |        0 |       0 |      0 |      2 |     25 |     26 |     10 |      5 |      6 |    123 |      0 |      0 |      1 |     48 |     51 |     21 |      5 |     19 |    208 |      0 |      0 |      1 |     12 |     11 |      5 |      1 |      2 |     96 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4201200 |     280 |     81 |    129 |     6 |    0 |     4 |    2 |    0 |     3 |    0 |     55 |    0 |    0 |    0 |    0 |    120 |    160 |      28 |      20 |      12 |       4 |      0 |      3 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       2 |       0 |       0 |      3 |      1 |      0 |      0 |        2 |        6 |        4 |        8 |        2 |        5 |       0 |       15 |        7 |       11 |       10 |        5 |        6 |       0 |       12 |       14 |       10 |       16 |        6 |        3 |       1 |       23 |       10 |       19 |        7 |        6 |        1 |       1 |       10 |        4 |        4 |        5 |        1 |        0 |       0 |       15 |        5 |        4 |        5 |        0 |        2 |       0 |        1 |        0 |        2 |        3 |        0 |        1 |       0 |        4 |        3 |        0 |        0 |        0 |        1 |       0 |      0 |      2 |     11 |     10 |      0 |      1 |      2 |     55 |      0 |      0 |      1 |     14 |     11 |      2 |      2 |      1 |     98 |      0 |      0 |      3 |      7 |      0 |      2 |      0 |      0 |     43 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 4201300 |     631 |    134 |    383 |    18 |    0 |     2 |    4 |    2 |     3 |    0 |     85 |    0 |    0 |    0 |    0 |    285 |    346 |      14 |      10 |       9 |       1 |      6 |     11 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        4 |        3 |        7 |       11 |       11 |       21 |       2 |        2 |        8 |        8 |       17 |       14 |       24 |       2 |       14 |       13 |       23 |       38 |       42 |       48 |       2 |       13 |       18 |       30 |       43 |       31 |       65 |       3 |       10 |        6 |        3 |        5 |        5 |        5 |       0 |        8 |        9 |        9 |       11 |        8 |        6 |       0 |        1 |        3 |        2 |        2 |        1 |        3 |       0 |        1 |        2 |        6 |        3 |        1 |        4 |       0 |      0 |      0 |     14 |     27 |      8 |      4 |     14 |     67 |      0 |      0 |      2 |     62 |     43 |     23 |     15 |     33 |    205 |      0 |      0 |      0 |      6 |     11 |      5 |      1 |      5 |     57 |      0 |      0 |      1 |      3 |      4 |      4 |      2 |      0 |     15 |      0 |     37 | s03      | R    |
| 4201400 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4202000 |     470 |    124 |    268 |     4 |    0 |     4 |    4 |    0 |     0 |    0 |     66 |    0 |    0 |    0 |    0 |    208 |    262 |      42 |      14 |      13 |       2 |      3 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        8 |        5 |       11 |        9 |       20 |       3 |        4 |       10 |        5 |       14 |       10 |       17 |       6 |        7 |       10 |       14 |       17 |       15 |       46 |       5 |        8 |       13 |       14 |       23 |       13 |       71 |      12 |        4 |        5 |        6 |        8 |        6 |        2 |       0 |        9 |        4 |        7 |        6 |        4 |        5 |       0 |        0 |        1 |        0 |        0 |        2 |        1 |       1 |        1 |        0 |        2 |        3 |        0 |        1 |       0 |      0 |      2 |     16 |     16 |      4 |      5 |      7 |     74 |      0 |      0 |      0 |     27 |     42 |     25 |     21 |     23 |    130 |      0 |      0 |      2 |      4 |     10 |      5 |      2 |      2 |     41 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4202100 |    1078 |    223 |    637 |    28 |    0 |     4 |   11 |    1 |     5 |    0 |    169 |    0 |    0 |    0 |    0 |    503 |    575 |      17 |      19 |      14 |       4 |     10 |     27 |      7 |      1 |      1 |      1 |      1 |      1 |      6 |      1 |      1 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        4 |        5 |       12 |       15 |       22 |       33 |       3 |        3 |        4 |       20 |       35 |       28 |       36 |       3 |       19 |       21 |       48 |       60 |       61 |       87 |       7 |       19 |       23 |       57 |       70 |       72 |       88 |       5 |       13 |        9 |       14 |       22 |       13 |       10 |       1 |       11 |       10 |       15 |       23 |       15 |       11 |       2 |        2 |        5 |        4 |        8 |        3 |        2 |       0 |        4 |        4 |        3 |        9 |        1 |        4 |       0 |      0 |      3 |     25 |     40 |      8 |      7 |      9 |    131 |      0 |      0 |      4 |     53 |     77 |     24 |     14 |     10 |    455 |      0 |      0 |      0 |     20 |      6 |      7 |      0 |      6 |    130 |      0 |      0 |      0 |      6 |      2 |      4 |      0 |      0 |     37 |      0 |     37 | s03      | R    |
| 4202200 |      91 |     29 |     41 |     3 |    0 |     0 |    0 |    0 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     42 |     49 |       3 |       1 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        1 |        2 |        2 |        3 |        3 |       2 |        0 |        0 |        3 |        2 |        2 |        7 |       2 |        2 |        1 |        4 |        2 |        2 |        6 |       3 |        0 |        1 |        2 |        3 |        4 |        8 |       3 |        0 |        0 |        1 |        1 |        3 |        1 |       0 |        2 |        2 |        3 |        1 |        3 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      4 |      1 |      1 |      4 |     16 |      0 |      0 |      0 |      1 |      4 |      1 |      1 |      1 |     33 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      1 |     10 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4202900 |      53 |     11 |     29 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     26 |     27 |       1 |       2 |       1 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       1 |        0 |        0 |        1 |        1 |        3 |        3 |       0 |        1 |        0 |        2 |        2 |        3 |        8 |       0 |        1 |        1 |        2 |        0 |        7 |        2 |       0 |        0 |        1 |        0 |        2 |        1 |        0 |       1 |        0 |        1 |        0 |        1 |        4 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      5 |      4 |      2 |      0 |      4 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4203000 |     176 |     27 |    118 |     0 |    0 |     1 |    2 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     87 |     89 |       4 |       2 |       0 |       0 |      0 |     12 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        3 |        4 |        5 |       0 |        0 |        0 |        4 |        5 |        3 |        3 |       0 |        5 |        0 |        6 |       16 |       17 |       20 |       1 |        1 |        1 |        4 |       15 |       16 |       11 |       5 |        0 |        1 |        1 |        3 |        1 |        2 |       0 |        1 |        2 |        0 |        6 |        7 |        4 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      2 |      1 |      1 |      6 |     12 |      0 |      0 |      2 |     14 |     25 |      2 |      8 |      6 |     61 |      0 |      0 |      1 |      2 |      5 |      1 |      5 |      3 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4203100 |     383 |     65 |    260 |     3 |    0 |     5 |    1 |    0 |     0 |    0 |     49 |    0 |    0 |    0 |    0 |    182 |    201 |       4 |       1 |       2 |       1 |      4 |     16 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      0 |      0 |        0 |        1 |        3 |        5 |        7 |        9 |       0 |        0 |        2 |        3 |       10 |       12 |       13 |       0 |        2 |        2 |       24 |       24 |       37 |       41 |       1 |        5 |        4 |       26 |       33 |       36 |       25 |       0 |        1 |        3 |        1 |        3 |        9 |        5 |       0 |        2 |        1 |        6 |        8 |        7 |        3 |       0 |        0 |        2 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        2 |       0 |      0 |      1 |     13 |      5 |      0 |      0 |      0 |     46 |      0 |      0 |      2 |     43 |     32 |      6 |      4 |      3 |    170 |      0 |      0 |      0 |      8 |      3 |      1 |      2 |      0 |     35 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 4203200 |      16 |      4 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      8 |      8 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        2 |        3 |       0 |        0 |        0 |        1 |        0 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4203300 |      47 |     13 |     23 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     23 |     24 |       7 |       3 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        0 |        2 |        0 |       0 |        0 |        1 |        2 |        3 |        1 |        1 |       0 |        1 |        1 |        2 |        1 |        1 |        3 |       0 |        2 |        1 |        3 |        3 |        2 |        3 |       0 |        2 |        1 |        0 |        4 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      6 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4203400 |     376 |     53 |    290 |     1 |    0 |     2 |    0 |    0 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |    173 |    203 |       1 |       2 |       0 |       0 |      4 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        3 |        5 |        3 |        8 |       1 |        1 |        1 |        3 |        4 |        8 |       14 |       1 |        3 |        6 |       13 |       15 |       26 |       71 |       4 |        7 |        8 |       10 |       27 |       24 |       68 |       8 |        1 |        1 |        1 |        2 |        2 |        5 |       0 |        0 |        6 |        2 |        3 |        0 |        6 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      4 |     10 |      3 |      4 |      3 |     29 |      0 |      0 |      2 |     38 |     49 |     15 |     24 |     19 |    143 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4203500 |     268 |     30 |    185 |     7 |    0 |     1 |    1 |    0 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |    131 |    137 |       0 |       2 |       5 |       0 |      3 |     12 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        1 |        5 |        2 |       1 |        0 |        1 |        3 |        3 |        4 |        6 |       0 |        2 |        5 |        7 |       23 |       24 |       27 |       0 |       10 |        0 |       14 |       20 |       28 |       21 |       4 |        5 |        1 |        2 |        5 |        6 |        3 |       1 |        3 |        1 |        1 |        6 |        6 |        2 |       1 |        1 |        0 |        1 |        2 |        1 |        2 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |      2 |      1 |      2 |      2 |     20 |      0 |      0 |      2 |     27 |     31 |     14 |      4 |      9 |     98 |      0 |      0 |      0 |      8 |      1 |      0 |      0 |      1 |     33 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4203600 |     101 |     25 |     56 |     2 |    0 |     2 |    0 |    0 |     1 |    0 |     15 |    0 |    0 |    0 |    0 |     51 |     50 |       2 |       1 |       0 |       0 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        3 |        6 |       0 |        1 |        0 |        1 |        1 |        1 |        9 |       0 |        2 |        4 |        0 |        8 |        3 |        8 |       1 |        3 |        2 |        2 |        7 |        3 |       12 |       1 |        0 |        0 |        2 |        2 |        3 |        3 |       0 |        1 |        1 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      3 |      4 |      3 |      1 |      2 |     12 |      0 |      0 |      0 |      1 |      8 |      2 |      6 |      3 |     36 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4203700 |     110 |     18 |     74 |     1 |    0 |     1 |    1 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     54 |     56 |       2 |       0 |       0 |       0 |      0 |      2 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        1 |        2 |        2 |       0 |        1 |        0 |        1 |        3 |        2 |        4 |       0 |        4 |        1 |        3 |        9 |        3 |       16 |       1 |        4 |        1 |        3 |        7 |        8 |       12 |       2 |        2 |        0 |        0 |        1 |        2 |        2 |       0 |        1 |        0 |        1 |        3 |        2 |        1 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      3 |      1 |      9 |      0 |      0 |      0 |      6 |      9 |     11 |      5 |      3 |     40 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4203800 |     281 |     78 |    141 |    10 |    0 |     3 |    2 |    1 |     3 |    0 |     43 |    0 |    0 |    0 |    0 |    115 |    166 |       3 |       2 |       0 |       0 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        4 |        3 |        2 |       18 |       0 |        0 |        1 |        3 |        9 |        6 |       31 |       0 |        1 |        3 |        7 |        9 |       11 |       27 |       0 |        2 |        3 |       13 |       10 |       12 |       39 |       4 |        0 |        5 |        1 |        5 |        3 |        5 |       0 |        2 |        0 |        7 |        5 |        4 |        6 |       0 |        1 |        1 |        0 |        2 |        2 |        4 |       0 |        0 |        1 |        0 |        4 |        1 |        3 |       0 |      0 |      0 |     18 |     11 |      5 |      3 |      4 |     37 |      0 |      0 |      2 |     21 |     23 |      7 |      3 |      6 |     79 |      0 |      0 |      2 |      5 |      6 |      6 |      3 |      0 |     21 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4203900 |       6 |      1 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4204000 |     611 |    124 |    382 |     9 |    0 |     2 |    2 |    1 |     1 |    0 |     90 |    0 |    0 |    0 |    0 |    289 |    322 |       8 |       4 |       3 |       0 |      5 |     18 |      4 |      1 |      1 |      4 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        2 |        2 |        3 |        5 |       14 |       25 |       0 |        0 |        6 |        8 |       13 |       22 |       24 |       0 |        9 |        9 |       20 |       25 |       33 |       83 |       2 |        3 |        6 |       16 |       35 |       54 |       82 |       5 |        6 |        5 |        5 |        7 |       15 |       10 |       0 |        6 |        3 |        5 |        7 |       12 |        9 |       0 |        2 |        1 |        2 |        1 |        1 |        2 |       0 |        0 |        1 |        0 |        3 |        1 |        1 |       0 |      0 |      2 |     30 |     14 |      4 |     11 |      1 |     62 |      0 |      0 |      5 |     56 |     57 |     18 |     15 |     17 |    214 |      0 |      0 |      1 |     19 |     12 |      1 |      3 |      1 |     53 |      0 |      0 |      0 |      1 |      5 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 4204200 |     211 |     40 |    128 |     6 |    0 |     1 |    0 |    0 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |     88 |    123 |       5 |       3 |       5 |       1 |      3 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        4 |        1 |        0 |        8 |       0 |        1 |        3 |        3 |        7 |        6 |        5 |       2 |        3 |        0 |        2 |       11 |       12 |       23 |       3 |        1 |        2 |        9 |       11 |       17 |       30 |       4 |        3 |        4 |        3 |        4 |        2 |        4 |       0 |        1 |        2 |        1 |        4 |        2 |        6 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        1 |       0 |      0 |      0 |      8 |      4 |      0 |      3 |      0 |     25 |      0 |      0 |      2 |     12 |     19 |      7 |     13 |      1 |     74 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      1 |     28 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4204300 |      58 |      8 |     38 |     4 |    0 |     0 |    1 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     31 |     27 |       2 |       0 |       2 |       0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        4 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        2 |        1 |        4 |        6 |        3 |        4 |       1 |        0 |        3 |        3 |        6 |        1 |        2 |       2 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      4 |      7 |      1 |      1 |      1 |     24 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4204400 |      21 |      2 |     17 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     11 |     10 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        1 |        2 |        2 |        3 |       0 |        1 |        0 |        0 |        3 |        1 |        3 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      2 |      0 |      3 |      2 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4204500 |      23 |      4 |     10 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     12 |     11 |       0 |       0 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        2 |       1 |        1 |        0 |        1 |        0 |        2 |        0 |       1 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4204900 |     348 |     55 |    246 |     6 |    0 |     2 |    3 |    0 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |    168 |    180 |       6 |       9 |       0 |       1 |      1 |     16 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        2 |        1 |        9 |        6 |        4 |       0 |        1 |        2 |        4 |       12 |        4 |        8 |       0 |        9 |        7 |       17 |       24 |       28 |       30 |       6 |        8 |        5 |       26 |       27 |       30 |       25 |       4 |        2 |        0 |        2 |        7 |        8 |        0 |       0 |        2 |        2 |        3 |        6 |        2 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        2 |        0 |        2 |        0 |        0 |        3 |       0 |      0 |      0 |     10 |      9 |      9 |      3 |      3 |     21 |      0 |      0 |      2 |     26 |     39 |     14 |     14 |     10 |    141 |      0 |      0 |      1 |      3 |      5 |      2 |      0 |      1 |     24 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4205000 |     469 |    107 |    270 |     5 |    0 |     5 |    0 |    0 |     4 |    0 |     78 |    0 |    0 |    0 |    0 |    228 |    241 |      13 |      12 |       7 |       1 |      3 |     16 |      5 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        3 |        6 |       12 |        9 |       11 |       1 |        4 |        2 |       13 |       18 |       12 |       13 |       1 |        5 |       15 |       26 |       31 |       25 |       36 |       2 |       13 |       12 |       25 |       25 |       24 |       28 |       3 |        6 |        5 |        9 |        5 |        6 |        5 |       1 |        5 |       11 |        7 |        8 |        4 |        6 |       0 |        4 |        0 |        2 |        0 |        0 |        1 |       0 |        2 |        0 |        1 |        2 |        1 |        1 |       0 |      0 |      1 |     10 |     21 |      3 |      4 |      4 |     64 |      0 |      0 |      3 |     30 |     39 |      7 |     11 |      4 |    176 |      0 |      0 |      0 |     11 |      5 |      4 |      3 |      1 |     54 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4205100 |     106 |     32 |     53 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     54 |     52 |       3 |       1 |       1 |       0 |      1 |      3 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        4 |        3 |        2 |       0 |        0 |        1 |        3 |        4 |        5 |        6 |       1 |        0 |        3 |        5 |        6 |        7 |        7 |       2 |        0 |        0 |        4 |        5 |        6 |        6 |       2 |        2 |        1 |        2 |        3 |        2 |        0 |       0 |        2 |        1 |        1 |        2 |        2 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      5 |      1 |      0 |      3 |     18 |      0 |      0 |      0 |      5 |      7 |      2 |      3 |      1 |     35 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4205200 |     925 |    173 |    575 |    14 |    0 |     4 |    7 |    3 |     7 |    0 |    142 |    0 |    0 |    0 |    0 |    438 |    487 |      15 |      18 |       6 |       0 |      5 |     15 |     10 |      1 |      2 |      2 |      1 |      1 |      0 |      6 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |       12 |       11 |       16 |       24 |       1 |        2 |        7 |        7 |       31 |       25 |       27 |       4 |       21 |       10 |       41 |       68 |       58 |       82 |       5 |       24 |       19 |       49 |       78 |       42 |       72 |       6 |       17 |        5 |        6 |       20 |        9 |       10 |       1 |       16 |        3 |        9 |       21 |       18 |        6 |       1 |        2 |        1 |        2 |        7 |        3 |        0 |       0 |        2 |        1 |        8 |        5 |        3 |        1 |       0 |      0 |      2 |     31 |     30 |     11 |     14 |      6 |     79 |      0 |      0 |      2 |     78 |     92 |     28 |     53 |     34 |    288 |      0 |      0 |      1 |     18 |     18 |      8 |      6 |      5 |     86 |      0 |      0 |      0 |      5 |      3 |      2 |      1 |      1 |     23 |      0 |     37 | s03      | R    |
| 4205300 |      35 |      5 |     26 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     16 |     19 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        3 |        3 |        0 |        2 |        4 |       0 |        0 |        3 |        3 |        1 |        5 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      2 |      3 |      0 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4205400 |      37 |      4 |     27 |     1 |    0 |     0 |    0 |    1 |     1 |    0 |      3 |    0 |    0 |    0 |    0 |     18 |     19 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |        2 |        0 |        2 |        1 |        3 |        4 |       2 |        0 |        2 |        1 |        3 |        2 |        3 |       2 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      5 |     18 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
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| 4207500 |      11 |      0 |      9 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      5 |      6 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4208300 |       6 |      0 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      4 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4210000 |     175 |     28 |    112 |     4 |    0 |     2 |    3 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     80 |     95 |       1 |       2 |       1 |       0 |      2 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        0 |        2 |        3 |        0 |       0 |        2 |        1 |        2 |        2 |        6 |        7 |       0 |        4 |        3 |       10 |       13 |        9 |       16 |       0 |        3 |        3 |       11 |       11 |       12 |       16 |       1 |        1 |        0 |        2 |        5 |        2 |        3 |       0 |        1 |        0 |        2 |        7 |        2 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        1 |        2 |        0 |        3 |        0 |        0 |       0 |      0 |      2 |      1 |      3 |      1 |      1 |      0 |     20 |      0 |      0 |      0 |     15 |     18 |      3 |      1 |      5 |     70 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |     22 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 4211000 |      95 |     17 |     58 |     2 |    0 |     2 |    1 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     45 |     50 |       4 |       4 |       0 |       0 |      1 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        3 |        2 |       1 |        1 |        0 |        2 |        3 |        3 |        0 |       0 |        5 |        0 |        5 |       10 |        5 |        5 |       0 |        0 |        5 |        5 |        5 |        5 |        7 |       1 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        1 |        4 |        4 |        0 |        2 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |     12 |      0 |      0 |      0 |      8 |     10 |      2 |      1 |      3 |     34 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4211100 |     150 |     38 |     84 |     9 |    0 |     1 |    1 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     67 |     83 |       6 |       1 |       4 |       2 |      2 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      1 |        0 |        1 |        1 |        6 |        3 |        4 |       0 |        0 |        1 |        2 |       10 |        4 |        6 |       0 |        4 |        0 |       11 |        9 |        8 |        8 |       0 |        0 |        7 |       12 |       10 |        6 |        9 |       0 |        1 |        0 |        2 |        2 |        0 |        3 |       0 |        2 |        0 |        2 |        2 |        0 |        3 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        1 |        0 |        5 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      5 |      3 |      5 |      0 |     19 |      0 |      0 |      0 |      9 |     21 |      3 |     13 |      0 |     38 |      0 |      0 |      0 |      4 |      0 |      0 |      2 |      0 |     11 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4211200 |       8 |      3 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      4 |       1 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4213000 |      41 |     17 |     15 |     0 |    0 |     0 |    1 |    2 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     18 |     23 |      12 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        0 |        0 |        2 |        0 |        3 |       1 |        0 |        1 |        2 |        3 |        1 |        1 |       1 |        1 |        0 |        1 |        1 |        0 |        2 |       1 |        1 |        0 |        2 |        1 |        1 |        3 |       1 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4213200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4213300 |      14 |      6 |      5 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      8 |       4 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4214000 |      37 |      2 |     28 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     17 |     20 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        2 |        2 |        2 |        7 |       0 |        0 |        1 |        2 |        0 |        6 |        5 |       1 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      2 |      0 |      3 |     17 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4214600 |       7 |      2 |      3 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      3 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4216000 |     715 |    119 |    464 |    13 |    0 |    10 |    8 |    0 |     5 |    0 |     96 |    0 |    0 |    0 |    0 |    343 |    372 |      12 |       6 |       5 |       3 |      9 |     26 |      1 |      7 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      1 |      3 |      3 |      0 |        3 |        1 |        5 |       15 |       10 |       10 |       1 |        1 |        3 |       14 |       19 |       13 |       22 |       2 |       15 |        9 |       20 |       38 |       59 |       88 |       2 |        9 |       11 |       27 |       49 |       47 |       86 |       4 |        3 |        5 |       10 |       10 |       12 |        8 |       1 |        3 |        5 |        9 |       12 |       14 |        4 |       0 |        1 |        2 |        1 |        6 |        6 |        2 |       0 |        0 |        4 |        5 |        2 |        2 |        5 |       0 |      0 |      2 |     15 |     15 |     11 |      3 |     10 |     63 |      0 |      0 |      3 |     61 |     64 |     25 |     27 |     21 |    263 |      0 |      0 |      1 |     11 |     16 |      4 |      5 |      3 |     56 |      0 |      0 |      0 |      5 |      9 |      0 |      3 |      0 |     19 |      0 |     37 | s03      | R    |
| 4216100 |     405 |    117 |    182 |    16 |    0 |     4 |    1 |    0 |     5 |    0 |     80 |    0 |    0 |    0 |    0 |    191 |    214 |      17 |      17 |       8 |       0 |      7 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      2 |        1 |       12 |        7 |       12 |        6 |       10 |       1 |        6 |       10 |       13 |       10 |       13 |       15 |       1 |        7 |       21 |       23 |       12 |        9 |       15 |       0 |        2 |       27 |       19 |       24 |       10 |       13 |       0 |        5 |        8 |       10 |        7 |        3 |        2 |       0 |        4 |       12 |        7 |        8 |       10 |        4 |       0 |        4 |        4 |        6 |        2 |        2 |        2 |       0 |        0 |        2 |        0 |        4 |        0 |        0 |       0 |      0 |      3 |     19 |     14 |      2 |      9 |      2 |     68 |      0 |      0 |      2 |     27 |     25 |      6 |      2 |      1 |    119 |      0 |      0 |      2 |     22 |      7 |      1 |      1 |      0 |     47 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4216200 |     154 |     40 |     90 |     1 |    0 |     1 |    1 |    0 |     1 |    0 |     20 |    0 |    0 |    0 |    0 |     80 |     74 |       8 |       4 |       2 |       1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        3 |        7 |        3 |        3 |       2 |        2 |        1 |        2 |        6 |        3 |        5 |       0 |        5 |        2 |        7 |       14 |        8 |       13 |       0 |        3 |        6 |        9 |        6 |        4 |       13 |       0 |        2 |        0 |        2 |        3 |        1 |        0 |       0 |        2 |        1 |        3 |        3 |        1 |        1 |       1 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      6 |      5 |      2 |      1 |      0 |     25 |      0 |      0 |      1 |     12 |     12 |      7 |      1 |      5 |     52 |      0 |      0 |      2 |      1 |      3 |      2 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4216500 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4216600 |     211 |     27 |    148 |     4 |    0 |     0 |    2 |    0 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |     95 |    116 |       5 |       5 |       2 |       0 |      1 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        4 |        1 |        2 |       0 |        2 |        0 |        1 |        7 |        1 |        6 |       0 |        4 |        8 |        4 |       12 |       23 |       17 |       2 |        6 |       11 |        8 |       17 |       19 |       15 |       2 |        1 |        4 |        1 |        3 |        0 |        4 |       0 |        2 |        2 |        2 |        6 |        2 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        1 |        1 |        0 |        1 |        1 |       0 |      0 |      0 |      2 |      5 |      3 |      0 |      0 |     17 |      0 |      0 |      2 |     19 |     30 |      5 |      7 |      5 |     80 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      1 |     19 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
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| 4217200 |     175 |     31 |    117 |     2 |    0 |     2 |    0 |    1 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     80 |     95 |       6 |       5 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        0 |        2 |        1 |        3 |       0 |        1 |        1 |        1 |        9 |        5 |        5 |       0 |        2 |        2 |        9 |       13 |       14 |       12 |       4 |        6 |        4 |        9 |       14 |       12 |       13 |       3 |        1 |        5 |        2 |        1 |        1 |        1 |       0 |        2 |        2 |        2 |        2 |        2 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |      8 |      7 |      1 |      0 |      3 |     11 |      0 |      0 |      2 |     16 |     13 |      3 |     12 |      4 |     67 |      0 |      0 |      0 |      5 |      2 |      1 |      1 |      0 |     13 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4217400 |      93 |     27 |     41 |     1 |    0 |     1 |    1 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     40 |     53 |       5 |       4 |       1 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        3 |        4 |        1 |       1 |        1 |        0 |        3 |        4 |        4 |        3 |       0 |        0 |        1 |        1 |        6 |        2 |        6 |       2 |        2 |        0 |        2 |        5 |        4 |        7 |       3 |        3 |        0 |        0 |        2 |        3 |        0 |       0 |        2 |        1 |        0 |        6 |        3 |        2 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      7 |      2 |      0 |      1 |     14 |      0 |      0 |      0 |      4 |      7 |      1 |      3 |      3 |     23 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4217500 |      24 |      6 |     15 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     12 |     12 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        2 |        2 |        0 |       0 |        2 |        0 |        1 |        3 |        0 |        1 |       1 |        1 |        0 |        1 |        2 |        2 |        0 |       1 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |     37 | s03      | R    |
| 4217600 |      30 |      5 |     19 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     12 |     18 |       0 |       2 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        2 |        2 |        3 |        2 |       0 |        1 |        1 |        1 |        1 |        4 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      4 |      1 |      2 |      4 |      7 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4217700 |      49 |     17 |     22 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     26 |     23 |       2 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        3 |        3 |       0 |        0 |        0 |        1 |        1 |        4 |        3 |       0 |        1 |        0 |        1 |        4 |        3 |        5 |       0 |        0 |        0 |        4 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      3 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     16 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
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| 4218100 |     215 |     29 |    155 |     4 |    0 |     1 |    0 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     98 |    117 |       0 |       0 |       1 |       0 |      4 |      6 |      1 |      0 |      1 |      1 |      6 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        7 |       0 |        0 |        0 |        0 |        3 |        6 |       11 |       0 |        1 |        0 |        1 |        4 |       10 |       56 |       1 |        0 |        1 |        3 |        3 |       17 |       58 |       0 |        0 |        0 |        0 |        0 |        3 |       10 |       0 |        0 |        1 |        0 |        1 |        4 |        6 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      8 |      5 |      2 |      1 |      1 |     12 |      0 |      0 |      0 |     26 |     25 |      9 |     17 |     21 |     57 |      0 |      0 |      0 |      5 |      0 |      3 |      0 |      0 |     17 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
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| 4218400 |      14 |      5 |      3 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      4 |    0 |    0 |    0 |    0 |      9 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4218500 |      61 |     13 |     36 |     0 |    0 |     5 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     32 |     29 |       1 |       0 |       0 |       0 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        2 |        1 |       0 |        0 |        1 |        0 |        5 |        1 |        1 |       0 |        0 |        0 |        2 |        5 |        7 |        7 |       0 |        1 |        1 |        2 |        3 |        4 |        4 |       0 |        2 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      3 |      7 |      4 |      2 |      0 |     20 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4229000 |     385 |    133 |    163 |     7 |    0 |     7 |    4 |    0 |     4 |    0 |     67 |    0 |    0 |    0 |    0 |    186 |    199 |      54 |      34 |      21 |       7 |      2 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |       10 |       12 |       10 |        9 |        7 |       5 |        3 |        8 |       18 |       13 |       15 |       12 |       5 |       12 |        5 |       26 |       17 |        6 |       11 |       4 |       11 |       10 |       16 |       19 |       15 |        4 |       7 |        4 |        5 |       10 |        7 |        4 |        3 |       1 |        7 |        8 |        8 |        5 |        2 |        3 |       0 |        4 |        2 |        2 |        4 |        0 |        0 |       0 |        1 |        1 |        2 |        3 |        1 |        2 |       0 |      0 |      1 |     25 |     22 |      2 |      3 |      6 |     74 |      0 |      0 |      1 |     25 |     21 |     15 |      1 |      7 |     93 |      0 |      0 |      0 |      9 |     14 |      3 |      0 |      2 |     39 |      0 |      0 |      0 |      8 |      6 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 4229100 |     231 |     78 |    110 |     4 |    0 |     4 |    0 |    1 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |    120 |    111 |      39 |      11 |       8 |       2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      2 |      6 |      1 |      0 |        5 |        5 |        8 |       12 |        5 |        9 |       0 |        2 |        5 |        7 |        5 |        6 |        7 |       2 |        4 |        8 |       12 |       13 |        7 |        9 |       4 |        2 |        7 |       11 |       19 |        5 |        8 |       1 |        2 |        2 |        3 |        2 |        3 |        2 |       0 |        5 |        6 |        3 |        1 |        0 |        3 |       2 |        1 |        0 |        2 |        0 |        0 |        2 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      2 |     10 |     10 |      4 |      5 |      3 |     44 |      0 |      0 |      0 |      8 |     20 |      8 |      3 |      8 |     63 |      0 |      0 |      0 |      5 |      6 |      1 |      1 |      0 |     21 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4229200 |      43 |      9 |     21 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     21 |     22 |       1 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        1 |        0 |        3 |        2 |       0 |        2 |        0 |        0 |        4 |        1 |        2 |       0 |        0 |        2 |        2 |        4 |        3 |        1 |       0 |        2 |        0 |        1 |        1 |        3 |        1 |       0 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4229300 |       4 |      2 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4229500 |     364 |    121 |    158 |    10 |    0 |     4 |    3 |    1 |     1 |    0 |     66 |    0 |    0 |    0 |    0 |    177 |    187 |      24 |      15 |      10 |       1 |      6 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      2 |      3 |      0 |        3 |        6 |       19 |        8 |       12 |       10 |       0 |        3 |        7 |       19 |       11 |       13 |       10 |       0 |        1 |       12 |       18 |       21 |       13 |       10 |       0 |        6 |       15 |       16 |       22 |       11 |       13 |       0 |        3 |        6 |        8 |       10 |        5 |        2 |       0 |        5 |        5 |        9 |        7 |        4 |        2 |       0 |        1 |        1 |        4 |        3 |        1 |        0 |       0 |        1 |        0 |        4 |        2 |        1 |        1 |       0 |      0 |      0 |     13 |     30 |      5 |      6 |     16 |     51 |      0 |      0 |      0 |     24 |     33 |     11 |      1 |     10 |     79 |      0 |      0 |      0 |     11 |     15 |      1 |      2 |      4 |     33 |      0 |      0 |      1 |      1 |      7 |      3 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4229600 |     124 |     37 |     57 |     4 |    0 |     1 |    0 |    1 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     61 |     63 |      14 |      12 |       6 |       2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        1 |        3 |        6 |        1 |        2 |       3 |        2 |        1 |        3 |        4 |        2 |        6 |       0 |        0 |        4 |        3 |        4 |        9 |        5 |       3 |        2 |        1 |        2 |        2 |        4 |        9 |       9 |        1 |        1 |        2 |        3 |        0 |        3 |       1 |        0 |        3 |        1 |        1 |        1 |        6 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      8 |      2 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      2 |      5 |      2 |      4 |      1 |     43 |      0 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |     16 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4230000 |     629 |    191 |    269 |    23 |    0 |     8 |    9 |    0 |     7 |    0 |    122 |    0 |    0 |    0 |    0 |    275 |    354 |      37 |      24 |      23 |       8 |      7 |      9 |      4 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |       2 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |       12 |        8 |       14 |       21 |       12 |        6 |       2 |       10 |       28 |       23 |       25 |       12 |       17 |       1 |       18 |       18 |       24 |       19 |       21 |       19 |       2 |       17 |       23 |       29 |       32 |       20 |       24 |       3 |        9 |       18 |       12 |        7 |        7 |        6 |       0 |       13 |       16 |       14 |        9 |        6 |        5 |       0 |        2 |        7 |        6 |        2 |        2 |        1 |       0 |        7 |        8 |        7 |        4 |        0 |        1 |       0 |      0 |      4 |     25 |     17 |      8 |      4 |      4 |    129 |      0 |      0 |      1 |     30 |     22 |     11 |      3 |     13 |    189 |      0 |      0 |      2 |     18 |      4 |      4 |      1 |      3 |     90 |      0 |      0 |      1 |     10 |      6 |      1 |      0 |      1 |     28 |      0 |     37 | s03      | R    |
| 4230100 |     770 |    191 |    398 |     8 |    0 |     6 |    8 |    1 |     8 |    0 |    150 |    0 |    0 |    0 |    0 |    377 |    393 |      34 |      33 |      18 |       1 |      9 |     11 |      7 |      1 |      0 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      9 |      2 |      0 |      2 |      2 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        4 |       14 |       20 |       10 |       19 |       6 |        4 |       13 |       19 |       38 |       12 |       17 |       9 |       16 |       24 |       40 |       50 |       29 |       37 |       5 |       14 |       22 |       45 |       45 |       29 |       34 |       8 |       14 |       13 |       10 |       24 |        8 |        5 |       0 |       15 |       10 |       18 |       16 |       10 |        7 |       0 |        3 |        4 |        3 |        9 |        3 |        1 |       0 |        1 |        1 |        1 |        3 |        0 |        2 |       0 |      0 |      2 |     27 |     22 |     20 |      5 |     14 |    101 |      0 |      0 |      2 |     47 |     67 |     18 |     15 |     23 |    226 |      0 |      0 |      0 |     24 |     17 |     13 |      4 |      5 |     87 |      0 |      0 |      0 |      8 |      6 |      3 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4230200 |     388 |    112 |    174 |    14 |    0 |     8 |    3 |    1 |     4 |    0 |     72 |    0 |    0 |    0 |    0 |    181 |    207 |      33 |      28 |      18 |       5 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       1 |       1 |      0 |      3 |      0 |      0 |        6 |        8 |       12 |        9 |        1 |        5 |       0 |       10 |        9 |       24 |       13 |        7 |        8 |       0 |       14 |       16 |       19 |       18 |       10 |       13 |       2 |       11 |        8 |       21 |       23 |        8 |        9 |       2 |        4 |        8 |        6 |        6 |        4 |        4 |       0 |       13 |       15 |        4 |        4 |        1 |        3 |       0 |        2 |        3 |        5 |        4 |        2 |        0 |       0 |        1 |        5 |        2 |        3 |        2 |        1 |       0 |      0 |      2 |     15 |     18 |      3 |      2 |      2 |     70 |      0 |      0 |      1 |     13 |     21 |      8 |      9 |      0 |    122 |      0 |      0 |      0 |      9 |      3 |      3 |      1 |      0 |     56 |      0 |      0 |      1 |      2 |      7 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 4230300 |     183 |     73 |     86 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     77 |    106 |       5 |       4 |       0 |       0 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        1 |        1 |        1 |        0 |        1 |       26 |       2 |        1 |        1 |        1 |        2 |        4 |       29 |       3 |        0 |        1 |        0 |        4 |        2 |       24 |       1 |        0 |        2 |        1 |        4 |        3 |       42 |       2 |        0 |        1 |        0 |        0 |        2 |        8 |       0 |        0 |        0 |        0 |        0 |        1 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |     18 |     12 |      1 |      1 |      2 |     39 |      0 |      0 |      0 |     12 |      8 |      6 |      2 |      5 |     53 |      0 |      0 |      0 |      5 |      2 |      2 |      0 |      0 |     12 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4230400 |     166 |     40 |     95 |     2 |    0 |     0 |    0 |    0 |     2 |    0 |     27 |    0 |    0 |    0 |    0 |     76 |     90 |       2 |       5 |       2 |       0 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      1 |      0 |      1 |      1 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        3 |        5 |        3 |        1 |       0 |        1 |        5 |        3 |        9 |        4 |        3 |       0 |        4 |        4 |       12 |       11 |        7 |        7 |       0 |        6 |        3 |       16 |        8 |        8 |        8 |       1 |        1 |        3 |        1 |        5 |        2 |        3 |       0 |        1 |        1 |        3 |        2 |        1 |        4 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        3 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      4 |      1 |      1 |      3 |     26 |      0 |      0 |      0 |     11 |     19 |      5 |      1 |      5 |     54 |      0 |      0 |      0 |      6 |      2 |      3 |      0 |      1 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4230500 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4230600 |       5 |      3 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4230900 |      76 |     24 |     38 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     37 |     39 |       4 |       3 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        4 |        2 |        4 |       0 |        0 |        1 |        4 |        2 |        2 |        3 |       0 |        4 |        0 |        2 |        4 |        2 |        6 |       3 |        2 |        0 |        3 |        3 |        2 |        4 |       3 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        2 |        0 |        6 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      4 |      4 |      2 |      1 |      0 |     12 |      0 |      0 |      0 |      5 |      7 |      3 |      0 |      2 |     21 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4231000 |     504 |    110 |    276 |    12 |    0 |     5 |    1 |    3 |     3 |    0 |     94 |    0 |    0 |    0 |    0 |    242 |    262 |      16 |      20 |      16 |       2 |      4 |     14 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |       1 |       3 |       0 |       0 |      2 |      1 |      1 |      0 |        4 |        5 |        3 |        8 |        7 |       11 |       5 |        0 |       10 |       11 |       13 |       15 |       15 |       3 |       10 |       15 |       23 |       36 |       20 |       37 |       2 |       10 |       14 |       22 |       27 |       23 |       34 |       3 |        7 |        6 |       11 |       10 |        3 |        9 |       0 |        8 |        8 |        6 |       13 |        6 |        6 |       1 |        2 |        3 |        1 |        2 |        0 |        2 |       0 |        2 |        2 |        1 |        5 |        2 |        2 |       0 |      0 |      1 |      9 |      8 |      5 |      8 |      9 |     70 |      0 |      0 |      2 |     36 |     25 |     12 |      9 |     25 |    167 |      0 |      0 |      1 |     20 |      7 |      7 |      5 |      3 |     51 |      0 |      0 |      0 |      6 |      7 |      2 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4231100 |      48 |     16 |     28 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     25 |     23 |       0 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        1 |        2 |        1 |       0 |        1 |        1 |        1 |        3 |        1 |        2 |       0 |        1 |        1 |        3 |        3 |        1 |        6 |       0 |        1 |        0 |        3 |        3 |        1 |        4 |       1 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      3 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      1 |     16 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4231200 |      45 |      7 |     25 |     3 |    0 |     0 |    0 |    1 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     20 |     25 |       2 |       0 |       1 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        4 |        1 |        2 |        3 |       0 |        0 |        3 |        4 |        1 |        2 |        3 |       2 |        0 |        0 |        2 |        1 |        1 |        1 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4232000 |     336 |    101 |    162 |     8 |    0 |     2 |    4 |    2 |     1 |    0 |     56 |    0 |    0 |    0 |    0 |    143 |    193 |      16 |      11 |      10 |       2 |      6 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        6 |        6 |       13 |        7 |        8 |       2 |        7 |        5 |        6 |       11 |        4 |       23 |       2 |        5 |        4 |       15 |       19 |       10 |       18 |       2 |       10 |       13 |       11 |       17 |        7 |       24 |       7 |        1 |        4 |        7 |        5 |        2 |        1 |       0 |        4 |        7 |       14 |        5 |        1 |        5 |       0 |        0 |        1 |        0 |        2 |        3 |        1 |       0 |        1 |        1 |        2 |        5 |        1 |        0 |       0 |      0 |      0 |     18 |      9 |      3 |      3 |      2 |     66 |      0 |      0 |      2 |     25 |     28 |      6 |      4 |      6 |     91 |      0 |      0 |      0 |      9 |      7 |      2 |      0 |      1 |     37 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4232800 |       3 |      2 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4232900 |      78 |     23 |     40 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     37 |     41 |       1 |       5 |       3 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        0 |        2 |        1 |        3 |       0 |        1 |        3 |        1 |        6 |        0 |        3 |       0 |        2 |        4 |        2 |        2 |        1 |        4 |       3 |        3 |        3 |       10 |        3 |        1 |        2 |       0 |        1 |        3 |        2 |        3 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      4 |      1 |      0 |      1 |     14 |      0 |      0 |      0 |      4 |      8 |      1 |      1 |      2 |     24 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4233000 |     283 |    103 |    125 |     6 |    0 |     1 |    0 |    0 |     0 |    0 |     48 |    0 |    0 |    0 |    0 |    119 |    164 |      26 |       9 |      12 |       0 |      7 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      2 |      0 |        2 |        2 |       11 |        5 |        4 |       19 |       0 |        2 |        2 |        9 |        7 |        8 |       31 |       1 |        3 |        4 |       13 |        8 |        5 |       15 |       4 |        4 |        6 |        7 |        7 |        8 |       34 |       7 |        2 |        4 |        5 |        3 |        0 |        9 |       0 |        0 |        7 |        5 |        4 |        3 |        6 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        3 |       0 |      0 |      1 |     21 |     24 |      3 |      0 |      2 |     52 |      0 |      0 |      0 |     26 |     14 |      3 |      4 |      1 |     77 |      0 |      0 |      1 |     10 |      5 |      0 |      1 |      0 |     31 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4233100 |     191 |     73 |     71 |     3 |    0 |     0 |    2 |    1 |     2 |    0 |     39 |    0 |    0 |    0 |    0 |     76 |    115 |      21 |      10 |       7 |       0 |      3 |      0 |      3 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        3 |        2 |        6 |        4 |        6 |        6 |       0 |        7 |        6 |        4 |       10 |        4 |       15 |       0 |        1 |        6 |        5 |        1 |        3 |        9 |       2 |        6 |        4 |       10 |        5 |        3 |       12 |       4 |        3 |        6 |        2 |        4 |        2 |        2 |       0 |        4 |        4 |        4 |        6 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      1 |      9 |     13 |      4 |      2 |      2 |     42 |      0 |      0 |      0 |      7 |      6 |      2 |      1 |      3 |     52 |      0 |      0 |      2 |      9 |      4 |      0 |      0 |      0 |     24 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4233200 |     580 |    188 |    268 |    18 |    0 |     4 |    2 |    1 |     5 |    0 |     94 |    0 |    0 |    0 |    0 |    229 |    351 |      31 |      18 |      14 |       2 |      2 |      4 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |      1 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       2 |      1 |      1 |      1 |      0 |        4 |       12 |       11 |       12 |       10 |       16 |       2 |        9 |       10 |       11 |       13 |       17 |       58 |       3 |       10 |       11 |       13 |       15 |       12 |       40 |       1 |       16 |       23 |       20 |       13 |       19 |       72 |       3 |        5 |       11 |        5 |        8 |        5 |       16 |       0 |        5 |        5 |       10 |        9 |        3 |       12 |       0 |        1 |        1 |        1 |        3 |        1 |        3 |       0 |        1 |        4 |        4 |        2 |        4 |        5 |       0 |      0 |      1 |     38 |     19 |      3 |      3 |      5 |    119 |      0 |      0 |      1 |     31 |     23 |      8 |      4 |      4 |    197 |      0 |      0 |      2 |     21 |      2 |      2 |      2 |      1 |     64 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |      1 |     21 |      0 |     37 | s03      | R    |
| 4233300 |     230 |     79 |    109 |     4 |    0 |     3 |    2 |    1 |     2 |    0 |     30 |    0 |    0 |    0 |    0 |     81 |    149 |      12 |       3 |       4 |       1 |      5 |      3 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        3 |        3 |        4 |        3 |       12 |       1 |        0 |        4 |        3 |        3 |       10 |       31 |       2 |        2 |        1 |        6 |        3 |        8 |       17 |       3 |        2 |        1 |        6 |        4 |       10 |       43 |       3 |        3 |        0 |        3 |        2 |        1 |        1 |       0 |        3 |        2 |        1 |        3 |        3 |        8 |       0 |        1 |        0 |        0 |        0 |        2 |        2 |       0 |        2 |        1 |        0 |        1 |        0 |        3 |       0 |      0 |      0 |     16 |      9 |      3 |      4 |      2 |     45 |      0 |      0 |      3 |     20 |     13 |      6 |      7 |      3 |     57 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     24 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4233400 |     203 |     57 |    110 |     4 |    0 |     2 |    0 |    0 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     97 |    106 |       9 |       4 |       4 |       0 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        2 |        0 |        1 |        4 |        4 |        8 |       3 |        4 |        0 |        6 |        9 |        8 |        8 |       0 |        5 |       10 |        4 |       13 |        6 |       16 |       1 |        2 |        3 |       10 |       12 |        8 |       19 |       1 |        3 |        2 |        1 |        5 |        3 |        2 |       0 |        3 |        5 |        3 |        1 |        0 |        2 |       0 |        2 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      2 |      8 |      6 |      3 |      3 |      1 |     34 |      0 |      0 |      2 |     14 |     19 |     10 |      4 |      2 |     59 |      0 |      0 |      0 |      6 |      3 |      2 |      1 |      1 |     17 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 4233500 |     303 |     90 |    151 |     3 |    0 |     3 |    2 |    2 |     2 |    0 |     50 |    0 |    0 |    0 |    0 |    110 |    193 |      11 |      14 |      10 |       1 |      4 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        3 |        4 |        4 |        1 |       24 |       1 |        3 |        3 |        3 |        7 |        5 |       28 |       3 |        2 |        4 |        6 |        4 |        6 |       22 |       3 |        4 |        7 |        5 |        9 |        9 |       65 |       5 |        2 |        3 |        1 |        4 |        4 |        6 |       0 |        4 |        6 |        4 |        4 |        2 |       10 |       0 |        1 |        0 |        0 |        2 |        0 |        2 |       0 |        0 |        1 |        1 |        1 |        2 |        2 |       0 |      0 |      3 |     16 |      6 |      2 |      2 |      4 |     57 |      0 |      0 |      2 |     28 |      9 |      4 |      3 |      2 |    103 |      0 |      0 |      1 |      7 |      7 |      2 |      0 |      0 |     33 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4234000 |     465 |    129 |    226 |    11 |    0 |     2 |    5 |    0 |     3 |    0 |     89 |    0 |    0 |    0 |    0 |    224 |    241 |      28 |      29 |      16 |       0 |      5 |      6 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      1 |      4 |      0 |      1 |        1 |        4 |       13 |       18 |        8 |        7 |       2 |        5 |        7 |       16 |       23 |       12 |       10 |       3 |        8 |       11 |       24 |       26 |       18 |       26 |       2 |        3 |       10 |       17 |       25 |       21 |       31 |       4 |        6 |        6 |       10 |        8 |        4 |        9 |       1 |        4 |        9 |       18 |        5 |        2 |        6 |       1 |        1 |        4 |        3 |        1 |        0 |        2 |       1 |        3 |        1 |        1 |        1 |        2 |        1 |       0 |      0 |      1 |     13 |     25 |     14 |      2 |      7 |     67 |      0 |      0 |      0 |     31 |     40 |     15 |     10 |     18 |    112 |      0 |      0 |      1 |     20 |     11 |      3 |      2 |      2 |     50 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4234100 |     238 |     90 |     90 |    11 |    0 |     0 |    2 |    1 |     0 |    0 |     44 |    0 |    0 |    0 |    0 |    109 |    129 |      42 |      15 |      17 |       3 |      1 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      3 |      3 |      0 |        3 |        5 |       10 |        6 |        5 |        4 |       6 |        4 |       11 |        8 |       10 |        4 |        9 |       5 |        4 |       10 |        8 |        8 |        7 |        4 |       1 |        5 |       12 |       11 |        8 |        6 |        3 |       3 |        7 |        1 |        6 |        2 |        2 |        2 |       0 |        7 |        5 |        5 |        3 |        2 |        2 |       0 |        0 |        1 |        4 |        2 |        0 |        1 |       0 |        2 |        0 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |     15 |      4 |      5 |      0 |      1 |     65 |      0 |      0 |      0 |     19 |      7 |      1 |      0 |      0 |     63 |      0 |      0 |      1 |     13 |      2 |      1 |      0 |      0 |     27 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4235000 |     326 |    100 |    160 |     5 |    0 |     4 |    1 |    0 |     0 |    0 |     56 |    0 |    0 |    0 |    0 |    146 |    180 |      29 |      37 |      13 |       2 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        2 |        5 |       12 |        9 |        7 |        4 |       1 |        8 |        7 |        9 |       15 |        7 |        9 |       5 |        7 |        9 |       17 |       18 |       12 |       11 |       2 |        7 |       13 |       19 |       15 |       10 |       16 |       4 |        5 |        5 |        5 |        6 |        0 |        1 |       1 |        6 |        9 |        5 |       11 |        1 |        1 |       0 |        2 |        0 |        1 |        2 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     21 |     20 |      3 |      1 |      2 |     53 |      0 |      0 |      1 |     23 |     34 |      5 |      9 |     11 |     77 |      0 |      0 |      0 |      8 |      5 |      0 |      3 |      1 |     39 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4235100 |     547 |    195 |    222 |     9 |    0 |     5 |    3 |    0 |     2 |    0 |    111 |    0 |    0 |    0 |    0 |    246 |    301 |      56 |      27 |      25 |       4 |      8 |     12 |      8 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       4 |       0 |       0 |      3 |      2 |      0 |      4 |        5 |       12 |        8 |       17 |        3 |       23 |       1 |       11 |       16 |       23 |       23 |       17 |       32 |       4 |       11 |       20 |       11 |       30 |       19 |       23 |       1 |        8 |       16 |       21 |       18 |       20 |       21 |       3 |       11 |        8 |        9 |        7 |        9 |        6 |       1 |       11 |       18 |        9 |        9 |        4 |        9 |       0 |        1 |        4 |        1 |        2 |        0 |        3 |       0 |        2 |        1 |        0 |        1 |        0 |        4 |       0 |      0 |      2 |     38 |     31 |     12 |      8 |      8 |     96 |      0 |      0 |      1 |     15 |     33 |      7 |      4 |     21 |    141 |      0 |      0 |      1 |     21 |     13 |      1 |      0 |      0 |     75 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4235200 |       3 |      1 |      0 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     37 | s03      | R    |
| 4235300 |       2 |      0 |      0 |     0 |    0 |     2 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4236000 |     460 |    184 |    151 |    15 |    0 |     3 |    8 |    3 |     3 |    0 |     93 |    0 |    0 |    0 |    0 |    245 |    215 |      94 |      43 |      37 |       9 |      1 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |       17 |       12 |       26 |       18 |        3 |       11 |       8 |        9 |       12 |       26 |       15 |        3 |       14 |      10 |       12 |       17 |       18 |       11 |        8 |       10 |       2 |       11 |        9 |       15 |       19 |        8 |       11 |       0 |        7 |        4 |       18 |       14 |        5 |        3 |       1 |       11 |       10 |        8 |        6 |        4 |        2 |       0 |        3 |        5 |        4 |        5 |        2 |        1 |       0 |        1 |        6 |        3 |        2 |        0 |        0 |       0 |      0 |      2 |     28 |     17 |      5 |      7 |      6 |    119 |      0 |      0 |      2 |     21 |     25 |      7 |      4 |      7 |     85 |      0 |      0 |      0 |     29 |      8 |      4 |      2 |      4 |     46 |      0 |      0 |      0 |      4 |      6 |      2 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 4237000 |     688 |    226 |    278 |    15 |    0 |     8 |    4 |    0 |     8 |    0 |    149 |    0 |    0 |    0 |    0 |    324 |    364 |      75 |      41 |      38 |       4 |      6 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |        6 |       14 |       18 |       18 |       20 |       12 |       8 |        7 |       29 |       20 |       28 |       20 |       17 |       9 |       15 |       18 |       22 |       35 |       15 |       23 |       7 |       10 |       20 |       36 |       35 |       11 |       23 |       8 |       16 |       14 |       13 |       16 |        6 |        6 |       1 |       16 |       20 |       17 |       14 |        2 |        8 |       0 |        1 |        7 |        3 |        5 |        3 |        2 |       0 |        5 |        1 |        4 |        3 |        0 |        1 |       0 |      0 |      3 |     37 |     29 |     10 |      4 |      9 |    134 |      0 |      0 |      1 |     44 |     47 |     10 |     11 |     16 |    149 |      0 |      0 |      0 |     29 |     14 |      5 |      1 |      2 |     98 |      0 |      0 |      0 |      8 |      9 |      3 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 4237100 |      81 |     36 |     33 |     1 |    0 |     1 |    0 |    1 |     1 |    0 |      8 |    0 |    0 |    0 |    0 |     37 |     44 |      24 |      15 |       5 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        3 |        3 |        4 |        1 |        1 |       2 |        2 |        7 |        2 |        2 |        0 |        4 |       3 |        2 |        1 |        5 |        2 |        2 |        3 |       1 |        1 |        2 |        6 |        3 |        3 |        2 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |      5 |      5 |      0 |      0 |      1 |     24 |      0 |      0 |      0 |      4 |      1 |      1 |      4 |      0 |     23 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4237200 |     102 |     31 |     43 |     3 |    0 |     1 |    3 |    0 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     50 |     52 |       7 |       5 |       8 |       3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        0 |        1 |        5 |        3 |        6 |       2 |        1 |        1 |        0 |        3 |        3 |        3 |       2 |        3 |        1 |        5 |        3 |        4 |        3 |       1 |        2 |        5 |        5 |        3 |        3 |        4 |       1 |        0 |        1 |        1 |        1 |        2 |        3 |       0 |        3 |        3 |        3 |        0 |        2 |        2 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      5 |      3 |      0 |      3 |     16 |      0 |      0 |      1 |      3 |      6 |      5 |      0 |      1 |     27 |      0 |      0 |      0 |      4 |      1 |      1 |      1 |      1 |     13 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4238000 |     264 |    106 |     83 |     7 |    0 |     8 |    1 |    0 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    118 |    146 |      73 |      32 |      29 |       7 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        4 |       12 |       12 |       10 |        2 |        3 |       3 |       10 |       14 |       10 |       11 |        4 |        8 |       3 |        4 |       14 |       11 |        7 |        5 |        4 |       0 |        3 |        9 |        8 |        9 |        5 |        4 |       0 |        6 |        3 |        4 |        7 |        0 |        1 |       0 |       10 |       12 |        7 |        5 |        2 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        2 |       0 |        3 |        2 |        3 |        3 |        0 |        1 |       0 |      0 |      4 |     24 |      7 |      4 |      3 |      2 |     62 |      0 |      0 |      0 |     15 |     11 |      5 |      3 |      5 |     44 |      0 |      0 |      2 |      6 |      6 |      1 |      0 |      1 |     41 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4239000 |     180 |     79 |     64 |     3 |    0 |     1 |    2 |    0 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |     97 |     83 |      51 |      36 |      22 |       3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        4 |       10 |       12 |       13 |        8 |        3 |       3 |        3 |        6 |        6 |        2 |        0 |        5 |       4 |        6 |        6 |        5 |        5 |        4 |        0 |       2 |        8 |        8 |        5 |        4 |        5 |        2 |       4 |        0 |        3 |        5 |        3 |        1 |        1 |       1 |        8 |        1 |        4 |        2 |        1 |        0 |       1 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      2 |     10 |     11 |      2 |      0 |      2 |     52 |      0 |      0 |      0 |      7 |      7 |      4 |      3 |      1 |     42 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4239100 |     116 |     54 |     33 |     1 |    0 |     0 |    1 |    3 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     58 |     58 |      36 |       8 |      13 |       5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        4 |        4 |        8 |        7 |        2 |        3 |       1 |        2 |        6 |        5 |        5 |        3 |        3 |       1 |        4 |        4 |        4 |        3 |        2 |        1 |       0 |        5 |        7 |        0 |        1 |        2 |        0 |       0 |        1 |        1 |        2 |        1 |        1 |        2 |       0 |        6 |        4 |        0 |        3 |        1 |        0 |       1 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      9 |      2 |      0 |      0 |     35 |      0 |      0 |      1 |      1 |      2 |      0 |      2 |      0 |     27 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4240000 |     403 |    132 |    148 |    22 |    0 |    10 |    8 |    1 |     2 |    0 |     80 |    0 |    0 |    0 |    0 |    173 |    230 |      44 |      30 |      25 |      10 |      4 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        6 |        4 |       15 |       12 |        4 |        1 |       3 |       13 |       16 |       17 |       20 |       10 |       10 |       1 |       11 |       17 |       14 |       17 |       10 |        9 |       0 |        9 |       13 |       18 |       14 |        7 |        8 |       1 |        6 |        4 |        8 |       11 |        2 |        1 |       0 |        8 |       18 |       11 |        6 |        1 |        4 |       0 |        4 |        5 |        2 |        4 |        1 |        2 |       0 |        2 |        8 |        5 |        7 |        1 |        2 |       0 |      0 |      4 |     26 |      9 |      8 |      0 |      2 |     83 |      0 |      0 |      1 |     21 |     16 |      5 |      2 |      3 |    100 |      0 |      0 |      0 |     13 |     10 |      1 |      0 |      2 |     54 |      0 |      0 |      0 |     12 |      3 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 4241000 |     711 |    214 |    320 |    14 |    0 |    12 |    7 |    1 |     5 |    0 |    138 |    0 |    0 |    0 |    0 |    316 |    395 |      40 |      18 |      17 |       3 |     10 |     13 |      3 |      1 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        4 |       14 |       24 |       19 |       14 |       11 |       5 |       10 |       19 |       14 |       31 |       19 |       22 |       8 |       16 |       14 |       35 |       39 |       18 |       24 |       7 |       14 |       18 |       34 |       38 |       17 |       38 |       8 |       10 |       16 |       10 |       16 |        2 |        6 |       0 |        8 |       20 |       19 |       12 |        7 |       12 |       0 |        2 |        5 |        0 |        4 |        1 |        0 |       0 |        1 |       10 |        8 |        6 |        1 |        1 |       0 |      0 |      0 |     44 |     19 |      9 |      4 |      7 |    131 |      0 |      0 |      0 |     45 |     43 |     12 |      9 |     12 |    199 |      0 |      0 |      1 |     30 |     23 |      3 |      0 |      2 |     79 |      0 |      0 |      0 |     10 |      9 |      0 |      2 |      0 |     18 |      0 |     37 | s03      | R    |
| 4241100 |     251 |     66 |    118 |     7 |    0 |     3 |    0 |    0 |     1 |    0 |     56 |    0 |    0 |    0 |    0 |    104 |    147 |       7 |      15 |       6 |       1 |      2 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        3 |        8 |        3 |        2 |        5 |       0 |        2 |        6 |       10 |        6 |        6 |       12 |       0 |        2 |        4 |        8 |       14 |        6 |       16 |       1 |        7 |        5 |       12 |        8 |        9 |       26 |       0 |        2 |        0 |        8 |        6 |        6 |        5 |       0 |        2 |        2 |        2 |       11 |        6 |        5 |       1 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        3 |        4 |       0 |      0 |      0 |     13 |      6 |      3 |      1 |      4 |     39 |      0 |      0 |      2 |     21 |     11 |      3 |      0 |      3 |     78 |      0 |      0 |      0 |      7 |      8 |      3 |      0 |      0 |     38 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4242000 |     442 |    122 |    220 |     7 |    0 |     6 |    1 |    1 |     6 |    0 |     79 |    0 |    0 |    0 |    0 |    211 |    231 |      11 |      10 |      10 |       2 |     14 |     13 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        6 |        2 |       11 |       11 |       13 |        9 |       2 |        0 |        7 |       13 |       16 |       10 |       18 |       4 |        2 |       10 |       30 |       17 |       11 |       21 |      14 |        8 |        8 |       26 |       20 |       17 |       19 |      17 |        2 |        7 |        3 |       14 |        9 |        5 |       0 |        4 |        5 |        8 |       12 |        6 |        3 |       1 |        1 |        0 |        3 |        5 |        2 |        1 |       0 |        2 |        0 |        3 |        1 |        1 |        2 |       0 |      0 |      1 |     13 |     14 |      7 |      3 |     10 |     74 |      0 |      0 |      0 |     27 |     22 |     14 |      5 |      7 |    145 |      0 |      0 |      0 |     18 |      8 |      3 |      2 |      1 |     47 |      0 |      0 |      0 |      1 |      7 |      2 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4243000 |     333 |     95 |    160 |    10 |    0 |     1 |    3 |    2 |     2 |    0 |     60 |    0 |    0 |    0 |    0 |    144 |    189 |       9 |      10 |       3 |       1 |      2 |      9 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      0 |        2 |        0 |        8 |        7 |        7 |        4 |       4 |        3 |        5 |       18 |       15 |        7 |       11 |       4 |        3 |       13 |       17 |       10 |        8 |       14 |      12 |        2 |       15 |       11 |       18 |        6 |       16 |      15 |        2 |        5 |        8 |        5 |        4 |        1 |       0 |        3 |        7 |        9 |       10 |        3 |        2 |       1 |        1 |        0 |        3 |        2 |        1 |        3 |       0 |        0 |        3 |        1 |        2 |        2 |        0 |       0 |      0 |      0 |     13 |     18 |      4 |      4 |      6 |     50 |      0 |      0 |      0 |     21 |     20 |      4 |     11 |      7 |     97 |      0 |      0 |      0 |      8 |      2 |      5 |      4 |      3 |     38 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4243100 |     138 |     24 |     90 |     4 |    0 |     2 |    1 |    1 |     3 |    0 |     13 |    0 |    0 |    0 |    0 |     61 |     77 |       2 |       8 |       2 |       1 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      2 |      0 |      0 |        0 |        0 |        2 |        1 |        2 |        0 |       0 |        0 |        1 |        2 |        4 |        7 |        5 |       0 |        2 |        5 |        8 |        9 |        9 |        6 |       4 |        3 |        4 |       12 |        9 |        6 |        6 |       7 |        2 |        0 |        0 |        2 |        2 |        2 |       0 |        0 |        1 |        2 |        2 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        3 |       0 |        0 |        1 |        2 |        0 |        1 |        2 |       0 |      0 |      0 |      4 |      6 |      1 |      2 |      1 |     10 |      0 |      0 |      1 |      9 |     12 |      1 |      1 |      2 |     64 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4244000 |     281 |     87 |    126 |     8 |    0 |     4 |    5 |    0 |     6 |    0 |     45 |    0 |    0 |    0 |    0 |    129 |    152 |      18 |      11 |       7 |       2 |      6 |      3 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      0 |      1 |      2 |      0 |        4 |        6 |        9 |        8 |        3 |       10 |       0 |        1 |        3 |       12 |       15 |        7 |        7 |       2 |        2 |       15 |       11 |       15 |        9 |        5 |       2 |        6 |       13 |       17 |        9 |        8 |        8 |       6 |        2 |        6 |        7 |        4 |        0 |        1 |       0 |        4 |        9 |        6 |        4 |        0 |        2 |       0 |        2 |        2 |        2 |        3 |        0 |        0 |       1 |        5 |        1 |        0 |        4 |        1 |        2 |       0 |      0 |      0 |     10 |     16 |      5 |      2 |      3 |     51 |      0 |      0 |      0 |     13 |     13 |      4 |      1 |      5 |     90 |      0 |      0 |      0 |     10 |      1 |      1 |      0 |      1 |     32 |      0 |      0 |      0 |      8 |      2 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4244100 |     260 |     82 |    125 |     8 |    0 |     4 |    4 |    1 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |    111 |    149 |      13 |      10 |       5 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        6 |        5 |        6 |        2 |        4 |       1 |        2 |       11 |        7 |       10 |        8 |       18 |       1 |        2 |        8 |       18 |       11 |        7 |        9 |       3 |        5 |       14 |       20 |       13 |        3 |        6 |       6 |        0 |        5 |        6 |        3 |        3 |        3 |       0 |        0 |        3 |        3 |        3 |        3 |        4 |       0 |        0 |        1 |        3 |        3 |        0 |        0 |       1 |        0 |        1 |        4 |        3 |        0 |        1 |       0 |      0 |      2 |      9 |     21 |      3 |      2 |      1 |     44 |      0 |      0 |      1 |     20 |     15 |      7 |      0 |      5 |     77 |      0 |      0 |      0 |      4 |      7 |      5 |      0 |      0 |     20 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 4245000 |     299 |     78 |    149 |     9 |    0 |     4 |    2 |    3 |     3 |    0 |     51 |    0 |    0 |    0 |    0 |    127 |    172 |       8 |      12 |       7 |       5 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        3 |        6 |        9 |        2 |        5 |       1 |        7 |        8 |        8 |       14 |        9 |        2 |       4 |        7 |        3 |       18 |       17 |        9 |        8 |       4 |        2 |       13 |       20 |       21 |        8 |       13 |       6 |        4 |        5 |        8 |        7 |        4 |        0 |       0 |        5 |        6 |        7 |        3 |        2 |        0 |       0 |        1 |        5 |        0 |        1 |        0 |        0 |       0 |        1 |        2 |        6 |        3 |        2 |        0 |       0 |      0 |      0 |     11 |     17 |      5 |      2 |      3 |     40 |      0 |      0 |      0 |     16 |     25 |     11 |      2 |      5 |     90 |      0 |      0 |      0 |      9 |      8 |      2 |      0 |      1 |     31 |      0 |      0 |      1 |      5 |      3 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4245100 |      82 |     14 |     36 |     1 |    0 |     2 |    2 |    2 |     2 |    0 |     23 |    0 |    0 |    0 |    0 |     36 |     46 |       3 |      11 |       3 |       1 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        2 |        2 |        0 |        1 |        2 |       0 |        1 |        1 |        3 |        1 |        0 |        1 |       0 |        1 |        3 |        3 |        5 |        3 |        1 |       0 |        3 |        3 |        4 |        6 |        3 |        1 |       0 |        2 |        0 |        3 |        0 |        0 |        0 |       0 |        1 |        6 |        5 |        5 |        0 |        1 |       0 |        1 |        2 |        2 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |      5 |      5 |      2 |      2 |      0 |     22 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4246000 |      80 |     20 |     31 |     4 |    0 |     0 |    0 |    1 |     2 |    0 |     22 |    0 |    0 |    0 |    0 |     41 |     39 |       5 |       2 |       2 |       1 |      1 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        4 |        1 |        1 |       0 |        0 |        1 |        4 |        4 |        2 |        0 |       0 |        2 |        6 |        7 |        3 |        1 |        0 |       1 |        3 |        1 |        1 |        2 |        0 |        3 |       1 |        0 |        3 |        1 |        1 |        3 |        0 |       0 |        2 |        4 |        3 |        1 |        4 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      5 |      4 |      1 |      1 |      1 |      8 |      0 |      0 |      0 |      4 |      4 |      3 |      0 |      1 |     19 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4247000 |     860 |    277 |    369 |    23 |    0 |    15 |    9 |    2 |     3 |    0 |    162 |    0 |    0 |    0 |    0 |    389 |    471 |      85 |      60 |      37 |       8 |      8 |     10 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      2 |      2 |      0 |      1 |      0 |       1 |       2 |       0 |       0 |      0 |      4 |      0 |      0 |       15 |       23 |       24 |       27 |       14 |       11 |       2 |       13 |       33 |       35 |       33 |       19 |       23 |       5 |       14 |       41 |       47 |       33 |       19 |       16 |       1 |       22 |       38 |       44 |       42 |       23 |       22 |       7 |       10 |       18 |       21 |       12 |        7 |        6 |       0 |       20 |       22 |       11 |       20 |       11 |        4 |       0 |        3 |        9 |        5 |        6 |        3 |        2 |       0 |        3 |        5 |        7 |        4 |        4 |        1 |       0 |      0 |      2 |     37 |     31 |     12 |      8 |      4 |    183 |      0 |      0 |      8 |     44 |     44 |     15 |     11 |     10 |    237 |      0 |      0 |      4 |     25 |      9 |      3 |      2 |      1 |    118 |      0 |      0 |      2 |     14 |     13 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 4247900 |     349 |    123 |    160 |     6 |    0 |     4 |    1 |    1 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    166 |    183 |      22 |      24 |       8 |       0 |      6 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      1 |      1 |      0 |      0 |        4 |        9 |       12 |        7 |        9 |       10 |       1 |        4 |        9 |       16 |       15 |        8 |       15 |       4 |        7 |        9 |       19 |       25 |        7 |       11 |       0 |        8 |       10 |       18 |       18 |        9 |       17 |       2 |        2 |        6 |        4 |       12 |        3 |        3 |       0 |        3 |        4 |        2 |        7 |        3 |        4 |       0 |        0 |        4 |        0 |        1 |        0 |        1 |       0 |        1 |        1 |        2 |        2 |        1 |        0 |       0 |      0 |      1 |     15 |     16 |     10 |      1 |      8 |     72 |      0 |      0 |      1 |     24 |     24 |     19 |      3 |     10 |     79 |      0 |      0 |      1 |      7 |      6 |      1 |      2 |      4 |     32 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 4248000 |     342 |    151 |    115 |    10 |    0 |     2 |    5 |    2 |     1 |    0 |     56 |    0 |    0 |    0 |    0 |    154 |    188 |      69 |      20 |      20 |       8 |      5 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      9 |      0 |      0 |        6 |        3 |       10 |        9 |        8 |       21 |       4 |        5 |       10 |       15 |        9 |        9 |       27 |      15 |        5 |        8 |       11 |       10 |        7 |        9 |       6 |        4 |       14 |       12 |        9 |        8 |        7 |       5 |        2 |        6 |        8 |        4 |        3 |        1 |       0 |        4 |       10 |        4 |        4 |        2 |        8 |       0 |        1 |        1 |        4 |        5 |        1 |        1 |       0 |        1 |        2 |        2 |        2 |        0 |        0 |       0 |      0 |      2 |     19 |     25 |      6 |      3 |      5 |     91 |      0 |      0 |      0 |      8 |     22 |      3 |      5 |      4 |     73 |      0 |      0 |      0 |     11 |      9 |      2 |      2 |      2 |     30 |      0 |      0 |      0 |      3 |      6 |      1 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4248100 |     642 |    196 |    283 |    12 |    0 |     3 |    2 |    3 |     3 |    0 |    140 |    0 |    0 |    0 |    0 |    277 |    365 |      54 |      40 |      21 |       3 |     10 |     12 |      8 |      1 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      4 |      2 |      0 |      1 |      0 |      1 |      0 |       2 |       0 |       0 |       0 |      3 |      3 |      3 |      0 |        8 |       12 |       14 |       16 |        9 |       10 |       2 |        5 |       16 |       36 |       29 |       14 |       22 |       3 |        5 |       27 |       25 |       30 |       17 |       15 |       4 |       14 |       35 |       47 |       34 |       17 |       11 |       2 |       12 |       18 |       14 |       15 |        3 |        5 |       2 |       14 |       18 |       19 |       11 |        7 |        1 |       1 |        3 |        3 |        4 |        2 |        2 |        0 |       0 |        2 |        1 |        3 |        1 |        1 |        1 |       0 |      0 |      4 |     26 |     35 |      5 |      6 |      2 |    118 |      0 |      0 |      3 |     33 |     39 |      3 |     10 |      7 |    188 |      0 |      0 |      0 |     28 |     14 |      1 |      3 |      3 |     91 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4248900 |     442 |    162 |    172 |    14 |    0 |     3 |    8 |    1 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    203 |    239 |      52 |      43 |      18 |       7 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      4 |      2 |      1 |      0 |       10 |       28 |       14 |        9 |        6 |        7 |       0 |       11 |       22 |       22 |       21 |        6 |        6 |       0 |       14 |       25 |       18 |       18 |        6 |        2 |       0 |       22 |       24 |       12 |       20 |        8 |        3 |       0 |        5 |       10 |       13 |        2 |        1 |        0 |       0 |       14 |       17 |       10 |        4 |        2 |        3 |       0 |        5 |        4 |        4 |        1 |        1 |        0 |       0 |        3 |        5 |        3 |        0 |        0 |        1 |       0 |      0 |      3 |     21 |     10 |      4 |      1 |      1 |    122 |      0 |      0 |      1 |     15 |      6 |      1 |      4 |      3 |    142 |      0 |      0 |      0 |      9 |      4 |      1 |      2 |      0 |     65 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4249000 |     483 |    156 |    226 |    13 |    0 |     2 |    5 |    2 |     2 |    0 |     77 |    0 |    0 |    0 |    0 |    230 |    253 |      43 |      26 |      12 |       6 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       6 |       0 |       0 |      3 |      3 |      0 |      0 |        3 |        5 |       13 |       22 |       14 |        8 |       1 |       15 |        8 |       16 |       24 |       15 |        8 |       4 |        9 |       19 |       22 |       33 |       17 |       12 |       1 |       15 |       14 |       24 |       30 |       15 |       11 |       4 |        6 |        9 |        7 |       11 |        3 |        0 |       0 |        6 |        9 |        6 |       13 |        5 |        2 |       0 |        0 |        2 |        4 |        5 |        2 |        2 |       0 |        1 |        3 |        1 |        2 |        2 |        0 |       0 |      0 |      2 |     26 |     20 |      8 |      9 |     14 |     77 |      0 |      0 |      1 |     22 |     26 |     16 |     10 |     16 |    135 |      0 |      0 |      0 |     21 |      4 |      3 |      1 |      3 |     45 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4249100 |     166 |     51 |     85 |     8 |    0 |     3 |    1 |    0 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     78 |     88 |      20 |      17 |       5 |       3 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        0 |        3 |        2 |        5 |        2 |        6 |       4 |        3 |        3 |        7 |        1 |        2 |        5 |       8 |        3 |        4 |        7 |       11 |        9 |        3 |       4 |        4 |        7 |        8 |        8 |        4 |        5 |       8 |        0 |        2 |        1 |        4 |        0 |        0 |       2 |        1 |        2 |        0 |        5 |        0 |        0 |       0 |        2 |        0 |        1 |        2 |        0 |        1 |       0 |        1 |        3 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |      5 |      7 |      2 |      0 |      2 |     35 |      0 |      0 |      1 |      7 |     14 |      5 |      8 |      2 |     48 |      0 |      0 |      0 |      5 |      2 |      0 |      1 |      1 |      8 |      0 |      0 |      0 |      4 |      3 |      3 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4249200 |     369 |    137 |    134 |    10 |    0 |     4 |    1 |    0 |     1 |    0 |     82 |    0 |    0 |    0 |    0 |    165 |    204 |      56 |      34 |      23 |       8 |      4 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      3 |      0 |      0 |      0 |       2 |       1 |       4 |       1 |      0 |      1 |      1 |      0 |        5 |        7 |        9 |       17 |        6 |       10 |       2 |       15 |       17 |       14 |       14 |        5 |       13 |       3 |        8 |       15 |       18 |       12 |        4 |       11 |       0 |        9 |       10 |       17 |       10 |        3 |       17 |       0 |        2 |       10 |        7 |       10 |        1 |        3 |       1 |        8 |       16 |       16 |        3 |        1 |        3 |       1 |        1 |        4 |        0 |        1 |        0 |        1 |       0 |        4 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     29 |     15 |      1 |      0 |      1 |     90 |      0 |      0 |      0 |     13 |     16 |      2 |      1 |      5 |     97 |      0 |      0 |      1 |     14 |      6 |      1 |      0 |      2 |     58 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4249300 |     170 |     72 |     62 |    10 |    0 |     4 |    3 |    0 |     2 |    0 |     17 |    0 |    0 |    0 |    0 |     61 |    109 |       3 |       0 |       1 |       0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        1 |        3 |       19 |       1 |        0 |        0 |        0 |        0 |        8 |       40 |       0 |        0 |        0 |        0 |        0 |        2 |       15 |       0 |        0 |        0 |        1 |        1 |        6 |       33 |       4 |        0 |        0 |        1 |        1 |        3 |        4 |       0 |        0 |        0 |        0 |        0 |        5 |        3 |       0 |        0 |        0 |        0 |        2 |        1 |        8 |       0 |        0 |        0 |        0 |        1 |        0 |        7 |       0 |      0 |      0 |      7 |     13 |      7 |      7 |      6 |     32 |      0 |      0 |      0 |      9 |      9 |      2 |      2 |      2 |     38 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |      8 |      2 |      3 |      0 |      6 |      0 |     37 | s03      | R    |
| 4250000 |     378 |    123 |    166 |     9 |    0 |     2 |    3 |    0 |     3 |    0 |     72 |    0 |    0 |    0 |    0 |    178 |    200 |      22 |      17 |       7 |       5 |      1 |      6 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        6 |        5 |       13 |        9 |        8 |       5 |        7 |       10 |        9 |       21 |        9 |       15 |       6 |        5 |       12 |       14 |       22 |       12 |        5 |       7 |        7 |       12 |       22 |       22 |       10 |        7 |       9 |        6 |        9 |       11 |       11 |        5 |        3 |       0 |        2 |        6 |        7 |        6 |        2 |        4 |       0 |        2 |        3 |        2 |        3 |        0 |        0 |       0 |        3 |        0 |        0 |        3 |        0 |        1 |       0 |      0 |      1 |     18 |     17 |     11 |      7 |      5 |     64 |      0 |      0 |      0 |     14 |     28 |      4 |      8 |     10 |    102 |      0 |      0 |      0 |      8 |     10 |      7 |      1 |      1 |     45 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4250100 |     150 |     40 |     60 |     3 |    0 |     4 |    1 |    1 |     1 |    0 |     40 |    0 |    0 |    0 |    0 |     58 |     92 |       9 |       6 |       6 |       2 |      2 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      0 |        2 |        1 |        6 |        1 |        3 |        0 |       0 |        1 |        4 |        7 |        8 |        4 |        3 |       0 |        2 |        7 |        6 |        6 |        3 |        2 |       0 |        2 |        7 |        8 |        9 |        5 |        3 |       0 |        2 |        4 |        6 |        3 |        0 |        0 |       0 |        4 |        5 |        8 |        6 |        2 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        1 |       0 |        1 |        0 |        1 |        3 |        1 |        0 |       0 |      0 |      0 |      9 |      6 |      1 |      2 |      0 |     22 |      0 |      0 |      0 |      9 |     11 |      1 |      1 |      0 |     38 |      0 |      0 |      0 |      6 |      2 |      2 |      0 |      0 |     30 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4251000 |     312 |    115 |    118 |     7 |    0 |     2 |    4 |    0 |     5 |    0 |     61 |    0 |    0 |    0 |    0 |    149 |    163 |      22 |       7 |      14 |       3 |     10 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      1 |      0 |        2 |        8 |        7 |       12 |        5 |       11 |       3 |        2 |        5 |       12 |       22 |        4 |       15 |       7 |        4 |        7 |       12 |       16 |        8 |        6 |       4 |        2 |       11 |       11 |       14 |        8 |       14 |       1 |        5 |        4 |        9 |        7 |        2 |        4 |       0 |        2 |        7 |        4 |       10 |        3 |        3 |       1 |        2 |        1 |        4 |        3 |        1 |        1 |       1 |        2 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      1 |     16 |     10 |      7 |      7 |      7 |     67 |      0 |      0 |      1 |     12 |     19 |      5 |      2 |      9 |     70 |      0 |      0 |      0 |     10 |      7 |      6 |      4 |      1 |     33 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4251600 |     227 |     53 |    125 |    10 |    0 |     1 |    4 |    1 |     2 |    0 |     31 |    0 |    0 |    0 |    0 |    107 |    120 |       9 |       7 |       4 |       3 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        9 |        5 |        5 |       0 |        1 |        3 |        8 |        6 |        2 |        8 |       3 |        4 |        1 |       12 |       17 |        6 |       14 |       2 |        5 |        5 |        9 |       19 |       11 |       16 |       4 |        2 |        2 |        7 |        1 |        3 |        2 |       0 |        2 |        3 |        2 |        2 |        3 |        2 |       0 |        2 |        3 |        1 |        3 |        2 |        1 |       0 |        0 |        0 |        1 |        1 |        2 |        1 |       1 |      0 |      0 |      6 |      4 |      4 |      9 |      1 |     29 |      0 |      0 |      0 |     21 |     20 |      6 |     13 |      3 |     62 |      0 |      0 |      0 |      7 |      3 |      3 |      1 |      0 |     17 |      0 |      0 |      0 |      3 |      1 |      2 |      1 |      2 |      9 |      0 |     37 | s03      | R    |
| 4251700 |     259 |     64 |    132 |    10 |    0 |     1 |    1 |    0 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    119 |    140 |       9 |      16 |       4 |       0 |      1 |     10 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      1 |      0 |      0 |       1 |       2 |       0 |       1 |      0 |      1 |      0 |      0 |        1 |        7 |        2 |        4 |        3 |       10 |       0 |        1 |        9 |        7 |        9 |        7 |        4 |       0 |        2 |       23 |       18 |        8 |        4 |        8 |       0 |        6 |       25 |       14 |        8 |        6 |       10 |       0 |        1 |        9 |        6 |        5 |        1 |        0 |       0 |        4 |        7 |        7 |        5 |        1 |        3 |       0 |        0 |        3 |        3 |        0 |        1 |        0 |       0 |        1 |        1 |        1 |        2 |        1 |        1 |       0 |      0 |      1 |     10 |      5 |      0 |      3 |      4 |     41 |      0 |      0 |      0 |      7 |      5 |      3 |      0 |      6 |    111 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     44 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4251800 |     477 |    113 |    243 |    10 |    0 |     6 |    2 |    0 |     2 |    0 |    101 |    0 |    0 |    0 |    0 |    246 |    231 |      20 |      23 |      17 |       2 |      4 |     10 |      9 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |       1 |       0 |       1 |       0 |      1 |      2 |      1 |      0 |       11 |       11 |       11 |       11 |        8 |        5 |       0 |        4 |        7 |       17 |       15 |        7 |        5 |       1 |       22 |       25 |       35 |       28 |        6 |       10 |       0 |       22 |       23 |       33 |       23 |        8 |        8 |       0 |        8 |       10 |       19 |        7 |        2 |        4 |       0 |        8 |       13 |       14 |        6 |        6 |        4 |       0 |        2 |        3 |        2 |        5 |        1 |        0 |       0 |        3 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      1 |     12 |     19 |     10 |      1 |      0 |     70 |      0 |      0 |      2 |     18 |     44 |     20 |      4 |      0 |    155 |      0 |      0 |      0 |     15 |      6 |      6 |      3 |      0 |     71 |      0 |      0 |      0 |      5 |      4 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4251900 |     626 |    179 |    281 |    13 |    0 |     6 |    5 |    4 |     4 |    0 |    134 |    0 |    0 |    0 |    0 |    265 |    361 |      22 |      33 |      19 |       4 |      3 |      4 |      6 |      2 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |       2 |       6 |       2 |       0 |      3 |      5 |      4 |      1 |        2 |       17 |       14 |       13 |       11 |        7 |       0 |       10 |       19 |       21 |       29 |       23 |       13 |       0 |       11 |       28 |       25 |       34 |       13 |       15 |       0 |       19 |       41 |       29 |       39 |       10 |       17 |       0 |       13 |       17 |        9 |       12 |        6 |        1 |       0 |       20 |       19 |       14 |       15 |        4 |        4 |       0 |        2 |        4 |        7 |        1 |        2 |        1 |       0 |        3 |        4 |        3 |        3 |        1 |        1 |       0 |      0 |      0 |     19 |     16 |      9 |     14 |     16 |    105 |      0 |      0 |      1 |     28 |     23 |     11 |     20 |     12 |    186 |      0 |      0 |      2 |     16 |      5 |      1 |      2 |      3 |    105 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      1 |     25 |      0 |     37 | s03      | R    |
| 4252000 |     364 |    122 |    191 |     3 |    0 |     1 |    0 |    1 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |    153 |    211 |      10 |       4 |       2 |       1 |      6 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        5 |       37 |       0 |        0 |        0 |        0 |        1 |        6 |       66 |       4 |        0 |        1 |        0 |        1 |        4 |       79 |       1 |        0 |        1 |        0 |        5 |       17 |       82 |       0 |        0 |        0 |        0 |        1 |        3 |       15 |       0 |        1 |        0 |        0 |        0 |        3 |       23 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      1 |     10 |     23 |      7 |     14 |     19 |     48 |      0 |      0 |      5 |     20 |     23 |     11 |     26 |     24 |     82 |      0 |      0 |      1 |     10 |     13 |      6 |      3 |      0 |     13 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4252100 |       6 |      0 |      3 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4252200 |     498 |    129 |    268 |    17 |    0 |     1 |    6 |    0 |     4 |    0 |     73 |    0 |    0 |    0 |    0 |    238 |    260 |       8 |      18 |       6 |       0 |      5 |      4 |      3 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        7 |        8 |       11 |       12 |       14 |       3 |        6 |        8 |        6 |       22 |       18 |        7 |       5 |        8 |        7 |       19 |       41 |       28 |       22 |       2 |        8 |       16 |       31 |       30 |       22 |       26 |       8 |        4 |        4 |       10 |       15 |        4 |        2 |       0 |        2 |        6 |        9 |       10 |        4 |        3 |       0 |        0 |        3 |        2 |        4 |        4 |        2 |       0 |        0 |        4 |        1 |        5 |        1 |        2 |       0 |      0 |      0 |     10 |     19 |      7 |      4 |      9 |     80 |      0 |      0 |      1 |     25 |     47 |     18 |     14 |      6 |    157 |      0 |      0 |      1 |     10 |      8 |      5 |      0 |      4 |     45 |      0 |      0 |      1 |      4 |     10 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4252300 |     476 |    133 |    230 |     6 |    0 |     5 |    9 |    2 |     4 |    0 |     87 |    0 |    0 |    0 |    0 |    220 |    256 |      19 |      13 |       6 |       5 |      8 |     11 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        1 |        2 |        6 |       20 |        9 |       11 |       5 |        7 |        3 |       18 |       22 |       14 |       11 |       4 |       11 |        8 |       24 |       22 |       15 |       21 |       4 |        8 |       15 |       22 |       30 |       20 |       19 |      11 |        9 |        7 |        8 |       10 |        7 |        5 |       0 |        3 |        5 |       11 |        7 |        9 |        5 |       1 |        3 |        3 |        4 |        5 |        0 |        0 |       0 |        0 |        3 |        3 |        5 |        0 |        0 |       0 |      0 |      3 |     17 |     10 |      4 |      6 |     10 |     83 |      0 |      0 |      2 |     24 |     35 |      7 |     12 |      7 |    143 |      0 |      0 |      0 |     10 |     13 |      6 |      6 |      2 |     50 |      0 |      0 |      1 |      6 |      4 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4252400 |      24 |      6 |     16 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     11 |     13 |       0 |       1 |       0 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        4 |        2 |        2 |       1 |        0 |        0 |        3 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |     12 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4253000 |     457 |    141 |    202 |    18 |    0 |     6 |    3 |    1 |     1 |    0 |     85 |    0 |    0 |    0 |    0 |    227 |    230 |      53 |      28 |      26 |       2 |      6 |      6 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        5 |       10 |       12 |       13 |        4 |        9 |       5 |        6 |       16 |       10 |       29 |        7 |       11 |       4 |        7 |       22 |       21 |       24 |       17 |        6 |       2 |       16 |       20 |       27 |       18 |       10 |       11 |       1 |        8 |       13 |       13 |       10 |        3 |        2 |       1 |       11 |        7 |        9 |        4 |        2 |        2 |       0 |        1 |        7 |        5 |        3 |        2 |        2 |       0 |        1 |        1 |        3 |        1 |        1 |        2 |       0 |      0 |      1 |     24 |     15 |      3 |      3 |      4 |     91 |      0 |      0 |      1 |     22 |     31 |      9 |     14 |      2 |    123 |      0 |      0 |      0 |     17 |      7 |      3 |      0 |      0 |     58 |      0 |      0 |      0 |      6 |      2 |      1 |      0 |      3 |     17 |      0 |     37 | s03      | R    |
| 4253100 |      60 |     24 |     21 |     4 |    0 |     1 |    1 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     26 |     34 |      10 |       6 |       5 |       1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        2 |        2 |        3 |        1 |       0 |        2 |        4 |        0 |        5 |        1 |        1 |       2 |        2 |        2 |        2 |        2 |        1 |        0 |       1 |        1 |        2 |        2 |        3 |        1 |        1 |       1 |        1 |        2 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      6 |      0 |      0 |      1 |      0 |     17 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4253200 |      42 |     15 |     14 |     3 |    0 |     0 |    0 |    1 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     17 |     25 |       8 |       8 |       4 |       2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        5 |        1 |        0 |        1 |       0 |        0 |        3 |        0 |        1 |        1 |        2 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        2 |        5 |        3 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        0 |       1 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     11 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4253900 |      98 |     30 |     56 |     1 |    0 |     1 |    1 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     51 |     47 |       2 |       1 |       1 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        2 |        2 |        0 |        5 |       0 |        1 |        0 |        5 |        4 |        4 |        4 |       0 |        7 |        0 |        8 |       11 |        2 |        3 |       0 |        3 |        2 |        4 |        8 |        2 |        5 |       1 |        1 |        0 |        1 |        1 |        2 |        1 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      0 |      2 |      3 |      1 |     20 |      0 |      0 |      0 |      8 |      3 |      1 |      1 |      0 |     43 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 4254000 |     540 |    129 |    311 |    14 |    0 |     3 |    1 |    1 |     0 |    0 |     81 |    0 |    0 |    0 |    0 |    253 |    287 |      17 |      33 |      12 |       1 |      4 |     21 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        7 |       19 |        8 |       11 |       5 |        2 |        3 |        8 |       23 |       15 |       20 |       3 |       10 |       15 |       29 |       39 |       26 |       24 |       7 |       17 |       18 |       33 |       34 |       24 |       24 |      11 |       10 |        7 |        6 |       10 |        5 |        2 |       1 |        7 |        8 |       11 |        9 |        2 |        2 |       1 |        0 |        1 |        0 |        3 |        2 |        1 |       0 |        3 |        2 |        1 |        2 |        3 |        1 |       0 |      0 |      1 |      9 |     21 |      8 |     11 |      4 |     75 |      0 |      0 |      2 |     27 |     43 |     17 |     12 |     28 |    182 |      0 |      0 |      0 |     10 |     16 |      6 |      2 |      3 |     44 |      0 |      0 |      0 |      4 |      2 |      2 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 4254100 |     426 |    110 |    237 |    14 |    0 |     2 |    2 |    2 |     4 |    0 |     55 |    0 |    0 |    0 |    0 |    201 |    225 |      11 |      11 |       1 |       2 |      4 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        5 |        5 |       21 |        7 |        9 |       2 |        2 |        6 |        8 |       12 |       14 |       13 |       3 |        5 |       11 |       18 |       24 |       15 |       31 |       8 |        2 |        7 |       18 |       22 |       19 |       36 |      21 |        3 |        4 |        5 |        6 |        2 |        5 |       1 |        5 |        5 |        9 |        4 |        1 |        5 |       0 |        0 |        3 |        3 |        2 |        1 |        1 |       1 |        2 |        1 |        3 |        4 |        1 |        1 |       1 |      0 |      0 |     17 |     14 |     11 |      2 |      5 |     61 |      0 |      0 |      3 |     28 |     49 |     13 |      6 |     10 |    128 |      0 |      0 |      0 |      4 |     13 |      5 |      2 |      0 |     31 |      0 |      0 |      1 |      2 |      6 |      2 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 4254200 |     151 |     47 |     80 |     1 |    0 |     3 |    0 |    1 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     74 |     77 |       8 |       7 |       1 |       0 |      3 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      1 |        1 |        1 |        1 |        6 |        6 |        3 |       2 |        0 |        3 |        4 |       13 |        4 |        1 |       2 |        3 |        3 |        6 |       13 |       10 |        7 |       1 |        5 |        4 |        2 |        8 |        9 |        9 |       0 |        2 |        0 |        1 |        1 |        2 |        1 |       0 |        0 |        3 |        2 |        4 |        1 |        2 |       0 |        0 |        2 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      7 |      6 |      2 |      0 |      2 |     30 |      0 |      0 |      0 |     14 |      8 |      4 |      4 |      4 |     46 |      0 |      0 |      0 |      5 |      2 |      0 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4254300 |     114 |     28 |     36 |     4 |    0 |     2 |    1 |    0 |     2 |    0 |     41 |    0 |    0 |    0 |    0 |     77 |     37 |       7 |      10 |      11 |       3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      1 |      0 |      0 |        1 |        3 |        6 |        4 |        0 |        1 |       0 |        2 |        2 |        2 |        5 |        0 |        1 |       1 |        3 |        3 |        5 |        7 |        3 |        1 |       0 |        2 |        3 |        2 |        4 |        3 |        0 |       0 |        6 |        7 |        8 |        8 |        3 |        0 |       0 |        0 |        4 |        4 |        1 |        0 |        0 |       0 |        2 |        0 |        4 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      2 |      1 |      0 |      0 |     21 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      0 |     26 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |     37 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4254500 |     746 |    201 |    356 |    26 |    0 |     7 |    8 |    3 |     3 |    0 |    142 |    0 |    0 |    0 |    0 |    342 |    404 |      21 |      28 |      15 |       1 |     10 |     15 |     11 |      4 |      1 |      1 |      2 |      1 |      3 |      2 |      2 |      0 |      0 |      1 |      5 |      2 |      2 |      3 |      1 |      0 |       0 |       2 |       0 |       0 |      2 |      1 |      0 |      0 |        3 |        7 |       19 |       21 |       11 |       12 |       0 |        9 |       21 |       37 |       32 |       16 |       13 |       0 |        9 |       36 |       54 |       40 |       15 |       25 |       0 |       10 |       34 |       60 |       23 |       23 |       26 |       1 |        4 |       21 |       21 |       10 |        6 |        5 |       0 |       12 |       17 |       13 |       19 |        8 |        6 |       0 |        2 |        7 |        9 |        3 |        2 |        0 |       0 |        3 |        5 |       10 |        4 |        2 |        0 |       0 |      0 |      2 |     51 |     25 |      8 |      4 |     13 |     98 |      0 |      0 |      1 |     70 |     46 |     15 |      8 |     23 |    193 |      0 |      0 |      1 |     24 |     13 |      7 |      1 |      5 |     91 |      0 |      0 |      0 |     12 |      3 |      2 |      0 |      5 |     25 |      0 |     37 | s03      | R    |
| 4254600 |      96 |     26 |     50 |     6 |    0 |     0 |    0 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     45 |     51 |       3 |       1 |       1 |       1 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        0 |        3 |        1 |        2 |       0 |        1 |        2 |        4 |        3 |        2 |        4 |       0 |        4 |        9 |        4 |        1 |        3 |        4 |       0 |        3 |        6 |       10 |        0 |        5 |        1 |       0 |        1 |        1 |        3 |        2 |        0 |        0 |       0 |        1 |        2 |        0 |        3 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     20 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      0 |     39 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4254700 |     379 |    103 |    219 |     8 |    0 |     1 |    4 |    0 |     3 |    0 |     41 |    0 |    0 |    0 |    0 |    176 |    203 |       7 |       6 |       2 |       1 |      7 |     13 |      5 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        4 |        4 |        7 |        4 |       25 |       1 |        0 |        2 |        5 |        9 |       10 |       31 |       1 |        1 |        1 |        3 |       13 |        5 |       73 |       0 |        1 |        7 |        5 |       11 |       13 |       86 |       0 |        2 |        1 |        6 |        2 |        1 |       10 |       0 |        1 |        4 |        5 |        2 |        2 |        5 |       0 |        0 |        6 |        4 |        0 |        1 |        2 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |     11 |     17 |     13 |      5 |     12 |     45 |      0 |      0 |      3 |     18 |     34 |     16 |      9 |     27 |    112 |      0 |      0 |      0 |      4 |      2 |      2 |      1 |      2 |     30 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4254800 |     132 |     40 |     54 |     7 |    0 |     0 |    1 |    0 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     67 |     65 |       7 |       8 |       1 |       0 |      3 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       3 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        9 |        7 |        3 |        1 |       0 |        3 |        1 |        5 |        4 |        3 |        2 |       0 |        1 |        3 |        6 |        5 |        5 |        5 |       1 |        1 |        6 |        7 |        8 |        2 |        4 |       0 |        3 |        3 |        5 |        2 |        1 |        0 |       0 |        1 |        3 |       10 |        1 |        1 |        0 |       0 |        1 |        1 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      8 |      1 |      0 |      0 |     25 |      0 |      0 |      1 |      6 |     15 |      1 |      0 |      1 |     30 |      0 |      0 |      1 |      5 |      4 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4254900 |     332 |     80 |    183 |     6 |    0 |     1 |    3 |    1 |     0 |    0 |     58 |    0 |    0 |    0 |    0 |    146 |    186 |       8 |       6 |       5 |       0 |      4 |      8 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        2 |        1 |        5 |        4 |        4 |       18 |       0 |        1 |        3 |        6 |        9 |        6 |       21 |       0 |        3 |        7 |        9 |       14 |       12 |       34 |       0 |        2 |        8 |       17 |       18 |       12 |       46 |       1 |        5 |        4 |        5 |        3 |        5 |        7 |       0 |        1 |        4 |        4 |        7 |        5 |        8 |       0 |        0 |        2 |        0 |        1 |        0 |        1 |       0 |        0 |        2 |        3 |        0 |        1 |        1 |       0 |      0 |      1 |     14 |      5 |      1 |      4 |      3 |     52 |      0 |      0 |      1 |     18 |     32 |      3 |     13 |      6 |    110 |      0 |      0 |      2 |      8 |      5 |      3 |      0 |      4 |     36 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4255000 |     356 |     89 |    188 |     4 |    0 |     5 |    3 |    1 |     3 |    0 |     63 |    0 |    0 |    0 |    0 |    171 |    185 |       9 |      10 |       8 |       3 |      4 |     10 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        5 |        2 |        7 |        7 |        9 |        6 |       5 |        1 |        3 |        9 |       15 |        7 |        9 |       4 |        8 |        7 |       26 |       19 |       14 |       17 |       3 |        1 |       11 |       17 |       24 |       19 |       18 |       4 |        6 |        7 |        5 |        4 |        6 |        1 |       1 |        5 |        5 |        4 |        9 |        3 |        6 |       1 |        2 |        0 |        3 |        0 |        0 |        1 |       0 |        2 |        1 |        4 |        1 |        0 |        2 |       0 |      0 |      2 |      8 |      9 |      9 |      2 |      4 |     55 |      0 |      0 |      0 |     31 |     27 |     15 |      7 |     14 |     94 |      0 |      0 |      0 |      7 |      8 |      9 |      0 |      4 |     35 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4255100 |     243 |     68 |    109 |     6 |    0 |     2 |    7 |    0 |     3 |    0 |     48 |    0 |    0 |    0 |    0 |    108 |    135 |      13 |      18 |       6 |       1 |      4 |      1 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        3 |        7 |        2 |        9 |        0 |        2 |       0 |       10 |       13 |       11 |        5 |        4 |        2 |       0 |        6 |       10 |       15 |       11 |        7 |        3 |       0 |       12 |       12 |       12 |       16 |        2 |        3 |       0 |        3 |       11 |        3 |        3 |        2 |        0 |       0 |        6 |        8 |        7 |        1 |        0 |        4 |       0 |        3 |        1 |        3 |        2 |        1 |        1 |       0 |        2 |        1 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |     11 |      3 |      3 |      0 |      0 |     50 |      0 |      0 |      0 |      9 |     11 |      2 |      4 |      1 |     82 |      0 |      0 |      0 |      5 |      3 |      2 |      0 |      0 |     38 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4255200 |     292 |     88 |    119 |    10 |    0 |     4 |    2 |    3 |     4 |    0 |     62 |    0 |    0 |    0 |    0 |    144 |    148 |       5 |       5 |       6 |       0 |      6 |      4 |      4 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |       0 |       1 |       0 |       0 |      3 |      2 |      1 |      0 |        3 |        4 |       11 |       11 |        5 |        4 |       3 |        3 |        5 |       13 |        9 |        8 |        8 |       1 |        1 |        8 |       19 |        8 |       12 |        5 |       3 |        5 |        8 |       17 |       13 |        5 |       11 |       4 |        5 |        6 |       10 |       11 |        5 |        0 |       0 |        6 |        3 |        5 |        7 |        3 |        1 |       0 |        1 |        2 |        1 |        1 |        4 |        1 |       0 |        1 |        3 |        3 |        3 |        1 |        2 |       0 |      0 |      0 |     10 |     13 |      7 |      0 |      1 |     57 |      0 |      0 |      0 |     14 |     20 |      3 |      3 |      0 |     79 |      0 |      0 |      0 |     13 |     11 |      2 |      0 |      0 |     36 |      0 |      0 |      1 |      9 |      2 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4255300 |     142 |     32 |     76 |     5 |    0 |     1 |    0 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     72 |     70 |       0 |       3 |       0 |       0 |      2 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        4 |        4 |        5 |        4 |       0 |        1 |        0 |        0 |       10 |        2 |        1 |       0 |        3 |        4 |        5 |       11 |        9 |        2 |       0 |        4 |        3 |       11 |       15 |        5 |        4 |       0 |        0 |        2 |        4 |        7 |        3 |        1 |       0 |        1 |        1 |        3 |        3 |        2 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |      6 |      7 |      0 |      2 |      3 |     13 |      0 |      0 |      1 |     11 |     14 |      1 |      4 |     11 |     34 |      0 |      0 |      0 |      3 |      2 |      4 |      0 |      6 |     13 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4255500 |     171 |     45 |     97 |     4 |    0 |     0 |    0 |    0 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |     82 |     89 |       8 |       7 |       1 |       0 |      5 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        5 |        7 |        1 |        3 |       0 |        4 |        0 |        7 |        5 |        6 |        3 |       0 |        7 |        5 |       14 |       13 |        4 |        6 |       0 |        5 |        9 |       14 |       13 |        3 |        4 |       0 |        1 |        4 |        4 |        2 |        1 |        0 |       0 |        3 |        4 |        2 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |     40 |      0 |      0 |      0 |      6 |      7 |      1 |      1 |      3 |     79 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4255700 |     243 |     52 |    145 |     2 |    0 |     2 |    4 |    1 |     3 |    0 |     34 |    0 |    0 |    0 |    0 |    119 |    124 |       6 |       9 |       3 |       1 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        5 |        3 |        5 |        5 |        3 |       3 |        1 |        1 |        5 |        7 |        9 |        3 |       2 |       10 |        2 |       10 |       19 |       16 |       13 |       1 |        6 |        5 |       18 |       18 |       10 |       14 |       3 |        4 |        1 |        3 |        3 |        4 |        1 |       0 |        4 |        1 |        4 |        4 |        2 |        3 |       0 |        1 |        1 |        1 |        4 |        0 |        1 |       0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |      0 |      0 |      5 |      3 |      3 |      2 |      4 |     35 |      0 |      0 |      2 |     15 |     23 |      4 |      5 |     10 |     86 |      0 |      0 |      0 |      4 |      3 |      2 |      2 |      0 |     23 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4255800 |     272 |     70 |    142 |     5 |    0 |     6 |    3 |    1 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    109 |    163 |       6 |       3 |       4 |       1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        5 |        6 |        5 |       1 |        2 |        3 |        7 |       11 |        9 |       17 |       1 |        2 |        6 |        9 |       14 |        8 |       21 |       1 |        2 |       13 |       10 |       11 |       13 |       29 |       3 |        2 |        3 |        4 |        4 |        3 |        3 |       0 |        1 |        4 |        4 |       10 |        5 |        2 |       0 |        0 |        2 |        3 |        0 |        1 |        3 |       0 |        0 |        1 |        2 |        2 |        0 |        1 |       0 |      0 |      0 |     10 |     13 |      1 |      1 |      6 |     39 |      0 |      0 |      3 |     13 |     25 |      7 |      6 |     23 |     65 |      0 |      0 |      0 |      8 |      4 |      3 |      1 |      1 |     28 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4255900 |     391 |     92 |    235 |     9 |    0 |     2 |    4 |    1 |     2 |    0 |     46 |    0 |    0 |    0 |    0 |    173 |    218 |       7 |       7 |       2 |       1 |     10 |      7 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      1 |      0 |      2 |        4 |        2 |        6 |        6 |        6 |        7 |       0 |        3 |        7 |       14 |       16 |        8 |       13 |       0 |        3 |       12 |       16 |       24 |       10 |       44 |       0 |        3 |       13 |       20 |       22 |       18 |       49 |       1 |        1 |        6 |        5 |        3 |        3 |        4 |       0 |        1 |        3 |        7 |        4 |        4 |        5 |       0 |        0 |        1 |        1 |        5 |        2 |        2 |       0 |        0 |        3 |        1 |        0 |        1 |        2 |       0 |      0 |      2 |     11 |      8 |      7 |      6 |      4 |     54 |      0 |      0 |      0 |     27 |     37 |     11 |     16 |     37 |    107 |      0 |      0 |      0 |     12 |      8 |      2 |      0 |      3 |     21 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      2 |     12 |      0 |     37 | s03      | R    |
| 4256000 |     371 |    101 |    190 |     7 |    0 |     3 |    3 |    0 |     4 |    0 |     63 |    0 |    0 |    0 |    0 |    158 |    213 |      15 |      10 |       8 |       3 |      0 |      6 |      4 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        2 |        2 |        7 |       12 |        3 |        6 |       4 |        3 |        8 |       12 |       16 |        6 |       12 |       8 |        7 |        9 |       16 |       27 |        8 |       13 |       6 |        9 |       14 |       22 |       26 |        9 |       14 |      10 |        3 |        6 |        5 |        9 |        2 |        2 |       0 |        5 |        4 |        8 |       11 |        6 |        2 |       0 |        1 |        1 |        2 |        3 |        2 |        0 |       0 |        1 |        4 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |     13 |      8 |      7 |      7 |     61 |      0 |      0 |      2 |     15 |     25 |      4 |      5 |      7 |    132 |      0 |      0 |      3 |      8 |      6 |      1 |      0 |      1 |     44 |      0 |      0 |      1 |      4 |      1 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4256100 |     727 |    188 |    419 |    11 |    0 |     4 |    3 |    0 |     2 |    0 |    100 |    0 |    0 |    0 |    0 |    333 |    394 |      18 |      21 |       7 |       2 |     10 |     22 |      3 |      0 |      1 |      3 |      0 |      0 |      1 |      5 |      2 |      0 |      1 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      4 |      5 |      0 |        3 |        6 |        9 |       20 |       11 |       22 |       0 |        5 |       10 |       19 |       27 |       25 |       30 |       1 |        9 |       11 |       42 |       54 |       30 |       53 |       1 |       16 |       11 |       45 |       59 |       32 |       56 |       0 |        5 |       14 |        8 |        7 |        8 |        9 |       0 |        8 |        9 |       11 |       10 |        5 |        6 |       0 |        0 |        1 |        2 |        2 |        3 |        3 |       0 |        0 |        2 |        2 |        3 |        1 |        1 |       0 |      0 |      0 |     31 |     34 |     11 |     12 |     28 |     72 |      0 |      0 |      1 |     57 |     63 |     39 |     21 |     76 |    162 |      0 |      0 |      0 |     11 |      8 |      7 |      4 |      5 |     65 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4256200 |     556 |    147 |    283 |    14 |    0 |     5 |    3 |    1 |     5 |    0 |     98 |    0 |    0 |    0 |    0 |    236 |    320 |      13 |       9 |       7 |       0 |      9 |     12 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |       0 |       0 |       1 |       0 |      4 |      1 |      0 |      0 |        4 |        6 |        9 |       10 |        7 |       15 |       1 |        6 |       19 |       13 |       18 |       14 |       25 |       0 |        9 |       11 |       20 |       18 |       15 |       49 |       0 |       11 |       23 |       22 |       29 |       16 |       59 |       1 |        3 |       13 |        6 |       13 |        2 |        8 |       0 |        9 |        9 |        7 |       13 |        6 |        8 |       1 |        3 |        5 |        2 |        5 |        0 |        2 |       0 |        1 |        5 |        1 |        0 |        0 |        4 |       0 |      0 |      3 |     25 |     23 |      4 |      3 |      7 |     82 |      0 |      0 |      2 |     27 |     48 |      9 |     13 |     19 |    165 |      0 |      0 |      0 |     10 |      9 |      5 |      3 |      0 |     71 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |     20 |      0 |     37 | s03      | R    |
| 4256300 |     647 |    161 |    325 |    13 |    0 |     7 |    3 |    0 |     3 |    0 |    135 |    0 |    0 |    0 |    0 |    294 |    353 |      20 |      19 |      15 |       1 |      7 |      6 |      6 |      2 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      2 |      0 |      0 |       0 |       3 |       0 |       0 |      2 |      5 |      1 |      0 |        5 |        5 |       16 |       22 |        6 |        9 |       0 |        5 |       11 |       21 |       37 |       10 |       14 |       0 |       16 |       14 |       53 |       38 |       20 |       14 |       0 |       14 |       22 |       52 |       51 |       14 |       16 |       1 |        7 |       13 |       17 |       10 |       10 |        5 |       1 |       19 |       18 |       16 |       14 |        3 |        2 |       0 |        3 |        2 |        4 |        2 |        0 |        2 |       0 |        2 |        2 |        4 |        3 |        1 |        1 |       0 |      0 |      1 |     23 |     28 |      7 |     11 |     20 |     71 |      0 |      0 |      2 |     38 |     61 |     11 |     18 |     38 |    157 |      0 |      0 |      0 |     22 |     16 |      3 |      3 |      8 |     83 |      0 |      0 |      0 |      2 |      7 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4256400 |     225 |     62 |     92 |     9 |    0 |     4 |    3 |    1 |     2 |    0 |     52 |    0 |    0 |    0 |    0 |     97 |    128 |      11 |      20 |      10 |       4 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        0 |        7 |        6 |        5 |        4 |        2 |       2 |        3 |        6 |       10 |        4 |        9 |        4 |       0 |        1 |        7 |       13 |       11 |        3 |        4 |       0 |       11 |       13 |       12 |        6 |        7 |        4 |       0 |        6 |        6 |        6 |        4 |        1 |        3 |       0 |        7 |        5 |        4 |        5 |        2 |        3 |       0 |        2 |        2 |        2 |        0 |        0 |        0 |       0 |        2 |        4 |        4 |        2 |        0 |        1 |       0 |      0 |      1 |     11 |      4 |      1 |      1 |      0 |     44 |      0 |      0 |      0 |     14 |      4 |      5 |      3 |      0 |     66 |      0 |      0 |      0 |      7 |      4 |      2 |      0 |      0 |     39 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4256600 |     635 |    141 |    379 |     9 |    0 |     3 |    2 |    2 |     0 |    0 |     99 |    0 |    0 |    0 |    0 |    299 |    336 |      21 |      15 |       3 |       0 |      7 |     18 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      7 |      3 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       1 |       0 |      1 |      2 |      1 |      0 |        5 |        8 |        9 |       21 |       11 |       11 |       0 |        2 |        7 |       13 |       27 |       13 |       14 |       0 |       13 |       10 |       39 |       59 |       30 |       28 |       0 |       20 |       18 |       43 |       70 |       22 |       25 |       2 |        5 |        7 |       10 |       17 |        7 |        3 |       1 |        5 |        7 |       12 |       12 |        7 |        6 |       0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |        0 |        4 |        2 |        1 |        1 |        3 |       0 |      0 |      0 |     29 |     28 |     14 |      6 |     25 |     39 |      0 |      0 |      1 |     43 |     74 |     38 |     12 |     74 |    137 |      0 |      0 |      2 |     31 |     13 |      8 |      1 |     12 |     32 |      0 |      0 |      0 |      2 |      6 |      0 |      2 |      0 |      6 |      0 |     37 | s03      | R    |
| 4256700 |     274 |     87 |    127 |     4 |    0 |     3 |    3 |    0 |     1 |    0 |     49 |    0 |    0 |    0 |    0 |    136 |    138 |       5 |       8 |       8 |       0 |      5 |      8 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        7 |        9 |        9 |        7 |        3 |       0 |        2 |       13 |       10 |       12 |        9 |        5 |       1 |        6 |        9 |       20 |       12 |       14 |        8 |       0 |        5 |        9 |       16 |       16 |        8 |        4 |       0 |        6 |        3 |        4 |        6 |        4 |        2 |       0 |        3 |        5 |        9 |        5 |        1 |        1 |       0 |        2 |        2 |        2 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        2 |       0 |      0 |      2 |     10 |     10 |      2 |     11 |      2 |     50 |      0 |      0 |      3 |     21 |     15 |      5 |      8 |      1 |     74 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      1 |     38 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4256800 |     392 |     82 |    202 |    13 |    0 |     9 |    4 |    0 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    196 |    196 |      13 |      17 |       5 |       3 |      3 |      8 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      1 |        4 |        3 |       10 |        9 |        5 |        3 |       0 |        4 |        5 |       23 |        8 |        3 |        5 |       0 |        6 |       13 |       42 |       31 |        9 |        7 |       1 |        8 |       14 |       34 |       27 |        6 |        4 |       0 |        6 |        4 |       12 |       12 |        3 |        2 |       0 |        6 |        5 |       11 |       14 |        2 |        4 |       0 |        1 |        0 |        9 |        3 |        1 |        0 |       0 |        1 |        1 |        5 |        5 |        1 |        0 |       0 |      0 |      0 |     13 |     23 |     13 |      0 |      0 |     33 |      0 |      0 |      0 |     25 |     68 |     15 |      7 |      0 |     87 |      0 |      0 |      0 |     14 |     15 |     10 |      2 |      0 |     40 |      0 |      0 |      1 |      5 |     11 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4256900 |     316 |     79 |    160 |     8 |    0 |     3 |    1 |    2 |     0 |    0 |     63 |    0 |    0 |    0 |    0 |    161 |    155 |       3 |       7 |       5 |       0 |      7 |      8 |      4 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      3 |      1 |      3 |      0 |       1 |       2 |       1 |       1 |      2 |      2 |      0 |      0 |        1 |        1 |        9 |        9 |        2 |        9 |       0 |        2 |        5 |       11 |       14 |        7 |        9 |       0 |        6 |        7 |       28 |       23 |       12 |       11 |       0 |        7 |        4 |       24 |       18 |        5 |       15 |       0 |        7 |        1 |        7 |       13 |        5 |        3 |       0 |        4 |        2 |        8 |        8 |        3 |        2 |       0 |        0 |        1 |        1 |        2 |        1 |        2 |       0 |        0 |        0 |        4 |        2 |        1 |        0 |       0 |      0 |      0 |      9 |     36 |      4 |      3 |      0 |     27 |      0 |      0 |      0 |     16 |     44 |     21 |      3 |      0 |     76 |      0 |      0 |      0 |      9 |      8 |      8 |      3 |      0 |     35 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4257100 |       7 |      0 |      6 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4257200 |      49 |     14 |     27 |     0 |    0 |     0 |    1 |    0 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |     22 |     27 |       1 |       6 |       0 |       0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        3 |        0 |        5 |        2 |        1 |        0 |       0 |        1 |        2 |        2 |        4 |        2 |        2 |       1 |        1 |        1 |        6 |        2 |        0 |        3 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |     11 |      0 |      0 |      0 |      1 |      5 |      0 |      2 |      1 |     18 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4257300 |      79 |     18 |     48 |     0 |    0 |     1 |    0 |    1 |     2 |    0 |      9 |    0 |    0 |    0 |    0 |     36 |     43 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        1 |        1 |       0 |        0 |        0 |        3 |        3 |        3 |        4 |       0 |        1 |        1 |        3 |        2 |        3 |       13 |       0 |        1 |        1 |        1 |        3 |        5 |       14 |       0 |        1 |        0 |        1 |        1 |        2 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |      5 |      0 |      1 |      1 |      8 |      0 |      0 |      0 |      5 |      4 |      6 |      1 |     11 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4257400 |       9 |      2 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4257500 |      39 |      8 |     24 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     17 |     22 |       3 |       0 |       0 |       1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        4 |        2 |        3 |        1 |        0 |       0 |        1 |        7 |        2 |        3 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4257600 |      77 |     31 |     31 |     0 |    0 |     1 |    0 |    0 |     2 |    0 |     12 |    0 |    0 |    0 |    0 |     31 |     46 |       2 |       0 |       1 |       1 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        5 |        2 |        1 |        2 |       0 |        1 |        1 |        3 |        5 |        4 |        7 |       0 |        0 |        0 |        1 |        2 |        2 |        6 |       0 |        0 |        1 |        3 |        4 |        4 |        8 |       0 |        0 |        1 |        0 |        3 |        2 |        2 |       0 |        0 |        0 |        0 |        2 |        0 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      7 |      1 |      4 |      1 |     13 |      0 |      0 |      0 |      3 |      7 |      2 |      4 |      2 |     13 |      0 |      0 |      0 |      3 |      1 |      1 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4257700 |      44 |      7 |     18 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     18 |     26 |       1 |       1 |       2 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        3 |        1 |        2 |        2 |       0 |        0 |        0 |        5 |        1 |        1 |        2 |       0 |        1 |        1 |        4 |        0 |        1 |        0 |       0 |        0 |        2 |        5 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      3 |      1 |      3 |      3 |      1 |      7 |      0 |      0 |      1 |      4 |      1 |      0 |      2 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4257800 |      12 |      0 |     12 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      7 |       0 |       1 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        2 |       0 |        2 |        0 |        3 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
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| 4258300 |      87 |     24 |     39 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     35 |     52 |       6 |       3 |       3 |       0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        2 |        2 |        1 |        2 |        2 |       0 |        3 |        1 |        6 |        4 |        0 |        0 |       0 |        3 |        4 |        8 |        5 |        0 |        0 |       0 |        2 |        5 |        2 |        5 |        1 |        4 |       0 |        3 |        1 |        1 |        0 |        0 |        0 |       0 |        3 |        3 |        7 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |     17 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
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| 4285000 |     414 |    110 |    218 |    10 |    0 |     0 |    6 |    1 |     5 |    0 |     64 |    0 |    0 |    0 |    0 |    213 |    201 |       9 |       4 |       3 |       2 |      4 |      9 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      1 |      0 |      1 |        6 |        4 |        7 |       15 |       12 |       13 |       3 |        3 |        3 |        7 |       15 |        8 |        8 |       6 |        6 |        6 |       20 |       23 |       18 |       30 |       8 |       10 |        9 |       18 |       22 |       16 |       24 |       8 |        8 |        8 |        4 |        7 |        1 |        3 |       2 |        8 |        4 |        7 |        4 |        1 |        5 |       2 |        3 |        1 |        0 |        2 |        1 |        2 |       0 |        2 |        2 |        6 |        2 |        1 |        0 |       0 |      0 |      0 |     12 |     15 |      6 |      5 |      5 |     67 |      0 |      0 |      0 |     29 |     36 |     12 |     12 |     13 |    116 |      0 |      0 |      0 |     10 |      8 |      0 |      0 |      0 |     46 |      0 |      0 |      0 |      2 |      5 |      1 |      2 |      0 |     12 |      0 |     37 | s03      | R    |
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| 4285200 |      50 |      7 |     27 |     1 |    0 |     1 |    2 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     26 |     24 |       3 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      1 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        1 |        1 |        2 |        0 |       0 |        2 |        0 |        3 |        2 |        4 |        5 |       0 |        0 |        1 |        2 |        4 |        1 |        3 |       0 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        1 |        2 |        2 |        1 |        2 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      2 |      1 |      0 |      5 |      0 |     19 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4285300 |      87 |     24 |     52 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     41 |     46 |       1 |       6 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        3 |        2 |       0 |        2 |        1 |        3 |        4 |        4 |        2 |       0 |        2 |        3 |        6 |        4 |        6 |        6 |       0 |        3 |        3 |        5 |        3 |        6 |        5 |       0 |        0 |        0 |        2 |        3 |        0 |        1 |       0 |        2 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      3 |      0 |      0 |      2 |     13 |      0 |      0 |      0 |      6 |      6 |      2 |      1 |      6 |     31 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4285400 |      73 |     23 |     39 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     36 |     37 |       6 |       2 |       2 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        5 |        4 |        0 |       0 |        1 |        2 |        3 |        4 |        1 |        1 |       0 |        3 |        0 |        4 |        4 |        3 |        5 |       1 |        2 |        1 |        7 |        1 |        4 |        3 |       1 |        1 |        0 |        1 |        0 |        0 |        0 |       1 |        4 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      5 |      2 |      0 |      0 |     12 |      0 |      0 |      0 |      5 |      5 |      1 |      2 |      3 |     23 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
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| 4286400 |     103 |     16 |     69 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     48 |     55 |       1 |       0 |       1 |       0 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        1 |       1 |        1 |        1 |        3 |        3 |        4 |        0 |       0 |        3 |        2 |        6 |        5 |        5 |       10 |       3 |        6 |        2 |        6 |        4 |        6 |       10 |       1 |        2 |        2 |        1 |        2 |        1 |        0 |       0 |        3 |        0 |        1 |        0 |        1 |        1 |       2 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      4 |     12 |      2 |      4 |      7 |     40 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4286900 |      47 |      6 |     27 |     0 |    0 |     1 |    1 |    2 |     2 |    0 |      8 |    0 |    0 |    0 |    0 |     29 |     18 |       2 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        4 |        0 |        0 |       0 |        3 |        0 |        1 |        7 |        3 |        2 |       0 |        0 |        1 |        0 |        4 |        2 |        4 |       0 |        0 |        0 |        0 |        3 |        2 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        3 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      4 |      3 |      3 |      1 |     14 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4287000 |     344 |    106 |    154 |     8 |    0 |     4 |    4 |    0 |     5 |    0 |     63 |    0 |    0 |    0 |    0 |    167 |    177 |      11 |      10 |       1 |       0 |      0 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        4 |        3 |       12 |       13 |       11 |       1 |        4 |        6 |        9 |       15 |        7 |       16 |       3 |        1 |        2 |       15 |       17 |       11 |       26 |       4 |        4 |        5 |       15 |       14 |        8 |       26 |       6 |        7 |        5 |        7 |        6 |        2 |        6 |       0 |        4 |        7 |        7 |        4 |        3 |        5 |       0 |        3 |        0 |        2 |        5 |        0 |        2 |       0 |        3 |        0 |        2 |        2 |        1 |        1 |       0 |      0 |      1 |     14 |     12 |      5 |      5 |     14 |     55 |      0 |      0 |      0 |     16 |     32 |      8 |      9 |      4 |     85 |      0 |      0 |      0 |      6 |      9 |      8 |      3 |      3 |     34 |      0 |      0 |      0 |      1 |      6 |      1 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4287100 |      75 |     28 |     36 |     5 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     35 |     40 |       5 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        5 |        1 |        3 |       1 |        1 |        0 |        2 |        6 |        3 |        4 |       1 |        1 |        0 |        4 |        2 |        5 |        5 |       2 |        1 |        1 |        0 |        6 |        3 |        4 |       2 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |      5 |      5 |      1 |      0 |      1 |     16 |      0 |      0 |      0 |      3 |      8 |      2 |      2 |      2 |     19 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4287200 |      92 |     17 |     50 |     2 |    0 |     0 |    2 |    2 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     45 |     47 |       0 |       0 |       2 |       1 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        3 |        3 |       1 |        1 |        1 |        0 |        2 |        1 |        4 |       1 |        1 |        0 |        5 |        7 |        3 |        8 |       2 |        3 |        0 |        5 |        7 |        3 |        5 |       1 |        1 |        0 |        1 |        4 |        1 |        1 |       0 |        0 |        1 |        2 |        4 |        2 |        1 |       0 |        2 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |      3 |      4 |      0 |      0 |      2 |      8 |      0 |      0 |      2 |      4 |      8 |      1 |      2 |      3 |     30 |      0 |      0 |      0 |      2 |      4 |      1 |      2 |      1 |      8 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4287300 |     111 |     24 |     68 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     53 |     58 |       1 |       2 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        5 |        1 |        2 |       2 |        1 |        0 |        2 |        4 |        2 |        2 |       1 |        1 |        0 |        1 |        7 |        9 |        8 |       4 |        5 |        2 |        3 |        7 |       12 |        7 |       2 |        0 |        1 |        0 |        4 |        1 |        4 |       0 |        1 |        1 |        0 |        1 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      4 |      2 |      1 |      0 |     16 |      0 |      0 |      0 |     14 |      8 |      3 |      0 |      9 |     34 |      0 |      0 |      0 |      1 |      0 |      3 |      1 |      2 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4287500 |      89 |     20 |     55 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     46 |     43 |       0 |       0 |       2 |       0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        3 |        2 |        1 |       1 |        0 |        1 |        3 |        1 |        2 |        3 |       0 |        3 |        1 |        2 |       10 |        4 |        5 |       2 |        0 |        2 |        4 |        9 |        6 |        5 |       2 |        0 |        1 |        1 |        3 |        1 |        2 |       0 |        2 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      3 |     12 |      4 |      1 |      3 |     32 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4288000 |      13 |      4 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      7 |      6 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4288200 |     116 |     20 |     78 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     55 |     61 |       1 |       2 |       2 |       0 |      1 |      1 |      2 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        2 |        2 |        2 |        1 |       0 |        1 |        1 |        1 |        1 |        3 |        1 |       2 |        2 |        4 |        9 |        9 |        4 |        9 |       2 |        1 |        7 |        7 |        7 |       10 |        6 |       1 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        2 |        2 |        3 |        3 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      7 |      8 |      6 |      4 |      3 |     50 |      0 |      0 |      0 |      3 |      2 |      2 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
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| 4290100 |      79 |     13 |     42 |     4 |    0 |     1 |    1 |    0 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     39 |     40 |       0 |       3 |       0 |       0 |      2 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        1 |        0 |        0 |       1 |        1 |        0 |        1 |        1 |        1 |        2 |       2 |        1 |        1 |        8 |        2 |        2 |        5 |       2 |        1 |        6 |        2 |        4 |        2 |        4 |       2 |        1 |        0 |        2 |        1 |        1 |        3 |       0 |        2 |        2 |        2 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      8 |      0 |      0 |      0 |      3 |      8 |      3 |      0 |      2 |     26 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4290200 |      20 |      5 |     13 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      9 |     11 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        1 |        1 |        2 |       0 |        0 |        0 |        2 |        0 |        1 |        2 |       2 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4290300 |      18 |      5 |     10 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      9 |      9 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        2 |        0 |        2 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4290400 |      32 |      3 |     18 |     1 |    0 |     1 |    0 |    1 |     1 |    0 |      7 |    0 |    0 |    0 |    0 |     14 |     18 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        3 |        2 |        1 |        1 |       0 |        1 |        1 |        4 |        3 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        2 |        2 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      6 |      1 |      3 |      0 |      7 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4290500 |      14 |      1 |      9 |     1 |    0 |     1 |    1 |    1 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      9 |      5 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        1 |       1 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4290600 |      96 |     21 |     55 |     2 |    0 |     1 |    0 |    1 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     45 |     51 |       1 |       2 |       1 |       0 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        2 |        3 |       0 |        0 |        2 |        2 |        3 |        3 |        3 |       2 |        3 |        1 |        2 |        5 |        8 |        6 |       3 |        2 |        1 |        4 |        8 |        6 |        4 |       2 |        2 |        1 |        0 |        1 |        2 |        2 |       1 |        0 |        0 |        1 |        0 |        2 |        1 |       3 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      3 |      1 |      2 |      0 |     13 |      0 |      0 |      1 |      9 |     13 |      3 |      2 |      0 |     27 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4290700 |       7 |      1 |      2 |     1 |    0 |     0 |    2 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4290900 |     144 |     57 |     53 |     6 |    0 |     3 |    2 |    0 |     2 |    0 |     21 |    0 |    0 |    0 |    0 |     73 |     71 |      14 |       3 |       5 |       2 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |        7 |        5 |        4 |        6 |       2 |        3 |        1 |        6 |        8 |        4 |        4 |       1 |        0 |        2 |        0 |        6 |        4 |        8 |       4 |        2 |        3 |        5 |        5 |        9 |        5 |       0 |        2 |        2 |        3 |        1 |        3 |        0 |       0 |        0 |        4 |        3 |        2 |        0 |        1 |       0 |        1 |        0 |        4 |        2 |        0 |        1 |       0 |        0 |        3 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      4 |      6 |      0 |      1 |     43 |      0 |      0 |      0 |      8 |     10 |      4 |      2 |      1 |     28 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     15 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4291000 |      34 |      6 |     24 |     0 |    0 |     1 |    2 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     16 |     18 |       3 |       2 |       0 |       0 |      1 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        3 |        3 |        0 |        5 |       0 |        1 |        2 |        2 |        4 |        4 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      5 |      8 |      0 |      1 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4291200 |       8 |      1 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4291400 |       8 |      1 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      6 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        3 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4291500 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4291600 |       9 |      3 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4291700 |       7 |      7 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      3 |       7 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        1 |        0 |       1 |        1 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4291800 |      21 |      8 |      8 |     0 |    0 |     1 |    0 |    1 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      9 |     12 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4292000 |     262 |     68 |    156 |     6 |    0 |     2 |    3 |    1 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |    126 |    136 |       7 |      13 |       3 |       0 |      2 |      9 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        3 |        1 |        2 |        7 |        3 |        7 |       4 |        3 |        3 |        5 |       13 |        2 |       10 |       5 |        6 |        4 |       19 |       19 |        9 |       13 |       8 |        4 |        6 |       16 |       14 |       11 |       18 |       9 |        3 |        0 |        4 |        2 |        2 |        2 |       1 |        1 |        0 |        3 |        5 |        0 |        2 |       0 |        2 |        0 |        0 |        3 |        1 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        2 |       0 |      0 |      0 |      9 |     14 |      1 |      0 |      2 |     42 |      0 |      0 |      0 |     16 |     18 |      8 |      3 |      7 |    104 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 4292100 |     247 |     56 |    136 |    11 |    0 |     1 |    1 |    1 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |    105 |    142 |       1 |       3 |       4 |       2 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        1 |        8 |        8 |       2 |        2 |        2 |        2 |       11 |        4 |        9 |       2 |        2 |        8 |        9 |        9 |       13 |       12 |       6 |        5 |       10 |        8 |       13 |       13 |       20 |       8 |        0 |        4 |        1 |        3 |        6 |        2 |       1 |        1 |        3 |        4 |        8 |        6 |        2 |       0 |        2 |        0 |        1 |        1 |        0 |        1 |       0 |        1 |        3 |        1 |        1 |        1 |        2 |       0 |      0 |      0 |      6 |      3 |      3 |      3 |      1 |     40 |      0 |      0 |      1 |     17 |     23 |      3 |      3 |      7 |     82 |      0 |      0 |      1 |      4 |      8 |      1 |      0 |      2 |     25 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4292200 |     584 |    129 |    320 |    17 |    0 |     8 |    5 |    0 |     3 |    0 |    102 |    0 |    0 |    0 |    0 |    288 |    296 |      17 |      14 |       3 |       4 |      9 |      8 |      5 |      3 |      0 |      3 |      2 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      1 |      0 |        8 |        4 |        4 |       14 |       15 |       10 |       4 |        2 |       13 |       10 |       18 |       12 |        8 |       7 |       11 |       13 |       27 |       45 |       28 |       31 |       4 |       16 |        7 |       33 |       49 |       23 |       28 |       5 |        7 |        6 |        7 |       19 |        9 |        7 |       1 |        3 |       11 |       13 |       10 |        6 |        3 |       0 |        3 |        3 |        2 |        6 |        0 |        0 |       0 |        3 |        2 |        6 |        6 |        1 |        1 |       0 |      0 |      1 |     25 |     17 |      2 |      8 |      7 |     69 |      0 |      0 |      2 |     40 |     49 |     15 |     21 |     19 |    174 |      0 |      0 |      0 |     13 |     13 |      6 |      1 |      6 |     63 |      0 |      0 |      1 |      7 |      6 |      0 |      1 |      1 |     17 |      0 |     37 | s03      | R    |
| 4292300 |      72 |     18 |     41 |     1 |    0 |     2 |    0 |    0 |     4 |    0 |      6 |    0 |    0 |    0 |    0 |     37 |     35 |       2 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        4 |        0 |        3 |       0 |        1 |        0 |        2 |        2 |        1 |        4 |       1 |        2 |        1 |        2 |       10 |        3 |        2 |       2 |        1 |        2 |        3 |        5 |        2 |        4 |       2 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        2 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |      2 |      2 |      2 |      1 |      0 |     10 |      0 |      0 |      0 |     10 |      6 |      1 |      0 |      1 |     23 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 4292400 |     462 |    108 |    254 |     8 |    0 |     2 |    1 |    1 |     5 |    0 |     83 |    0 |    0 |    0 |    0 |    223 |    239 |       3 |      20 |       2 |       2 |      4 |      8 |      6 |      1 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |        3 |        5 |       16 |        9 |        8 |       7 |        2 |        4 |       10 |       12 |       12 |       10 |       7 |       14 |        5 |       20 |       32 |       18 |       21 |       8 |       12 |        5 |       25 |       32 |       31 |       23 |       8 |        7 |        5 |       10 |        8 |        9 |        4 |       1 |        5 |        2 |        8 |       14 |        3 |        5 |       2 |        2 |        3 |        1 |        3 |        0 |        1 |       0 |        0 |        2 |        2 |        3 |        0 |        0 |       0 |      0 |      0 |     11 |     15 |      4 |      1 |     11 |     66 |      0 |      0 |      3 |     18 |     24 |     18 |     11 |     16 |    164 |      0 |      0 |      0 |     12 |     10 |      7 |      0 |      9 |     45 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 4292500 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4292600 |       8 |      2 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      2 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4292700 |       9 |      4 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      6 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4292800 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4292900 |      10 |      3 |      5 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      7 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4293000 |     194 |     55 |    101 |     3 |    0 |     1 |    2 |    0 |     1 |    0 |     31 |    0 |    0 |    0 |    0 |     92 |    102 |       7 |      10 |       1 |       1 |      4 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        4 |        6 |        7 |        2 |       0 |        1 |        4 |        2 |       12 |        5 |        7 |       2 |       10 |        5 |        7 |        8 |        7 |       16 |       4 |        3 |        5 |        9 |        8 |        7 |       11 |       1 |        0 |        2 |        4 |        1 |        2 |        1 |       0 |        3 |        4 |        4 |        6 |        0 |        4 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        2 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      8 |      2 |      1 |      3 |     36 |      0 |      0 |      0 |     17 |     10 |      5 |      5 |      2 |     62 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4293100 |     560 |    149 |    290 |    11 |    0 |     1 |    3 |    3 |     5 |    0 |     98 |    0 |    0 |    0 |    0 |    270 |    290 |      29 |      26 |      10 |       3 |      4 |     18 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      5 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        2 |        6 |        7 |       20 |       13 |       10 |       7 |        4 |        9 |       16 |       21 |       17 |       11 |       6 |       12 |       15 |       31 |       30 |       30 |       17 |       9 |       10 |       18 |       31 |       38 |       23 |       17 |       9 |       10 |        7 |       12 |        8 |        7 |        6 |       3 |        7 |        9 |        6 |       11 |        7 |        3 |       2 |        1 |        3 |        0 |        1 |        3 |        0 |       0 |        3 |        3 |        4 |        3 |        1 |        1 |       0 |      0 |      1 |     22 |     25 |      7 |      4 |      7 |     83 |      0 |      0 |      3 |     30 |     39 |     13 |     11 |     11 |    183 |      0 |      0 |      1 |      8 |     11 |      5 |      5 |      3 |     65 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 4293200 |       8 |      1 |      3 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      4 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4293700 |       9 |      1 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      6 |       0 |       4 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4293900 |     125 |     45 |     57 |     4 |    0 |     1 |    2 |    0 |     1 |    0 |     15 |    0 |    0 |    0 |    0 |     61 |     64 |      14 |       5 |       4 |       1 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        5 |        5 |        3 |        5 |       0 |        3 |        3 |        4 |        4 |        4 |        4 |       1 |        1 |        1 |        6 |        9 |        8 |        4 |       2 |        2 |        3 |        4 |        7 |        6 |        4 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       1 |        3 |        3 |        1 |        1 |        0 |        1 |       1 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |      7 |     10 |      3 |      0 |      3 |     22 |      0 |      0 |      0 |     10 |     10 |      2 |      1 |      7 |     27 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      2 |      9 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4294000 |     808 |    229 |    405 |    26 |    0 |     5 |    7 |    3 |     2 |    0 |    131 |    0 |    0 |    0 |    0 |    368 |    440 |      43 |      27 |      15 |       7 |      9 |     13 |      6 |      1 |      2 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |        9 |       12 |       27 |       27 |       14 |       13 |       2 |       10 |       17 |       26 |       33 |       13 |       24 |       2 |       18 |       28 |       33 |       44 |       29 |       25 |       4 |       19 |       37 |       47 |       57 |       29 |       30 |       5 |       10 |        9 |       15 |       15 |        5 |        4 |       0 |       17 |       19 |       11 |       16 |        4 |        5 |       1 |        5 |        2 |        8 |        4 |        4 |        2 |       0 |        4 |        5 |        2 |        4 |        3 |        0 |       0 |      0 |      5 |     29 |     36 |      5 |      5 |      8 |    141 |      0 |      0 |      5 |     49 |     70 |     26 |     19 |     10 |    226 |      0 |      0 |      1 |     12 |     10 |      6 |      2 |      4 |     96 |      0 |      0 |      1 |     10 |      2 |      3 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 4294100 |      43 |      6 |     23 |     0 |    0 |     1 |    2 |    0 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     22 |     21 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        3 |        0 |        0 |        1 |       0 |        1 |        1 |        1 |        3 |        1 |        3 |       1 |        0 |        0 |        3 |        1 |        3 |        3 |       2 |        1 |        0 |        0 |        1 |        3 |        0 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      2 |      8 |      1 |      1 |      1 |     10 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4294200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4294300 |      65 |     13 |     44 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     33 |     32 |       1 |       0 |       1 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        3 |        3 |        2 |       1 |        1 |        7 |        3 |        4 |        6 |        5 |       0 |        2 |        0 |        3 |        5 |        6 |        2 |       0 |        1 |        0 |        0 |        0 |        2 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      2 |      1 |      6 |      0 |      0 |      0 |     12 |      8 |      6 |      0 |      1 |     17 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4294600 |      16 |      4 |     10 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      6 |     10 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4294700 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4294800 |      10 |      5 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      5 |      5 |       2 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4295000 |     119 |     39 |     55 |     3 |    0 |     1 |    0 |    1 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     60 |     59 |      21 |      19 |       4 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        2 |        2 |        3 |        3 |        5 |        4 |       0 |        2 |        3 |        6 |        4 |        1 |        3 |       1 |        1 |        4 |        7 |        9 |        2 |        4 |       1 |        2 |        3 |        8 |        7 |        3 |        3 |       1 |        0 |        1 |        1 |        4 |        4 |        2 |       0 |        0 |        1 |        1 |        3 |        2 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        2 |        0 |       0 |      0 |      0 |      7 |     11 |      2 |      0 |      1 |     18 |      0 |      0 |      1 |      5 |      9 |      6 |      3 |      1 |     30 |      0 |      0 |      1 |      5 |      4 |      1 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4295100 |     632 |    166 |    310 |    23 |    0 |     3 |    7 |    1 |     9 |    0 |    113 |    0 |    0 |    0 |    0 |    295 |    337 |      29 |      40 |      13 |       4 |      9 |     18 |      5 |      0 |      0 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |       11 |       19 |       13 |        8 |      11 |        4 |       15 |       20 |       15 |       16 |       19 |      10 |       14 |       17 |       36 |       37 |       26 |       15 |       6 |       18 |       23 |       34 |       38 |       21 |       15 |      10 |        8 |        7 |        9 |       18 |       10 |        3 |       0 |       11 |       12 |       12 |       13 |        3 |        5 |       2 |        2 |        9 |        1 |        4 |        2 |        4 |       0 |        5 |        3 |        2 |        7 |        2 |        2 |       0 |      0 |      1 |     31 |     19 |      8 |      4 |      7 |     96 |      0 |      0 |      2 |     47 |     52 |     15 |      9 |     15 |    170 |      0 |      0 |      2 |     16 |     15 |      3 |      2 |      6 |     69 |      0 |      0 |      0 |      7 |      5 |      5 |      0 |      4 |     22 |      0 |     37 | s03      | R    |
| 4295200 |      65 |     30 |     17 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     35 |     30 |      10 |       1 |       9 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        3 |        5 |        2 |        4 |       3 |        3 |        1 |        1 |        3 |        0 |        3 |       2 |        2 |        1 |        2 |        3 |        0 |        1 |       0 |        2 |        1 |        1 |        2 |        1 |        1 |       0 |        2 |        1 |        1 |        1 |        2 |        1 |       0 |        2 |        0 |        2 |        4 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      7 |      1 |      0 |      1 |     17 |      0 |      0 |      0 |      7 |      1 |      1 |      0 |      2 |      6 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4295300 |     256 |     68 |    121 |     5 |    0 |     2 |    3 |    2 |     0 |    0 |     55 |    0 |    0 |    0 |    0 |    126 |    130 |      18 |      14 |      19 |       0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        2 |        3 |        3 |        8 |        6 |       2 |        5 |        4 |       10 |       12 |        4 |        8 |       0 |        4 |        9 |       14 |       12 |       13 |        6 |       4 |        2 |       11 |       10 |       13 |       12 |        6 |       5 |        6 |        5 |        8 |       10 |        3 |        0 |       0 |        5 |        4 |        2 |        6 |        3 |        1 |       2 |        1 |        3 |        1 |        2 |        0 |        0 |       0 |        1 |        3 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |     12 |      8 |      2 |      3 |     41 |      0 |      0 |      1 |      6 |     23 |      6 |      4 |      5 |     76 |      0 |      0 |      0 |      7 |      8 |      2 |      0 |      2 |     36 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4295400 |       9 |      6 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4296000 |     135 |     36 |     67 |     5 |    0 |     3 |    0 |    0 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     68 |     67 |       5 |       5 |       4 |       0 |      3 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        3 |        5 |        4 |        2 |       2 |        2 |        1 |        0 |        8 |        2 |        4 |       2 |        5 |        5 |        3 |        9 |        6 |        1 |       2 |        3 |        6 |        6 |        9 |        6 |        6 |       0 |        1 |        2 |        1 |        6 |        2 |        0 |       1 |        1 |        1 |        3 |        2 |        2 |        1 |       0 |        2 |        2 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |      4 |      0 |      1 |      2 |     25 |      0 |      0 |      1 |      7 |      8 |      4 |      1 |      4 |     42 |      0 |      0 |      0 |      6 |      1 |      4 |      0 |      1 |     11 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |      0 |      0 |     37 | s03      | R    |
| 4296200 |      13 |      7 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      4 |      9 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4297000 |     124 |     38 |     60 |     2 |    0 |     1 |    0 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     65 |     59 |      10 |       8 |       6 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      0 |      0 |        0 |        3 |        2 |        3 |        4 |        3 |       1 |        3 |        1 |        5 |        3 |        2 |        4 |       4 |        1 |        4 |        6 |        9 |        6 |        3 |       1 |        3 |        3 |        7 |       12 |        2 |        2 |       1 |        2 |        3 |        2 |        9 |        2 |        1 |       0 |        2 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      3 |      1 |      1 |     28 |      0 |      0 |      0 |      3 |     10 |      1 |      2 |      3 |     41 |      0 |      0 |      0 |      4 |      3 |      1 |      1 |      0 |     14 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4297100 |      21 |      4 |     13 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     11 |     10 |       2 |       3 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        5 |        0 |        0 |        2 |       0 |        0 |        1 |        2 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4297200 |      69 |     19 |     35 |     2 |    0 |     0 |    1 |    0 |     1 |    0 |     11 |    0 |    0 |    0 |    0 |     36 |     33 |       4 |       5 |       2 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        1 |        1 |        0 |        2 |        4 |       0 |        0 |        0 |        1 |        2 |        2 |        3 |       1 |        1 |        2 |        3 |        5 |        1 |        5 |       1 |        0 |        2 |        4 |        5 |        3 |        3 |       0 |        0 |        1 |        2 |        3 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |     16 |      0 |      0 |      1 |      7 |      3 |      8 |      0 |      2 |     14 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4297300 |      51 |     13 |     22 |     4 |    0 |     1 |    2 |    0 |     2 |    0 |      7 |    0 |    0 |    0 |    0 |     24 |     27 |       2 |       1 |       0 |       2 |      2 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        1 |        2 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        2 |       0 |        0 |        2 |        1 |        5 |        0 |        1 |       1 |        0 |        1 |        3 |        1 |        0 |        5 |       2 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        4 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      0 |      1 |      1 |      0 |      7 |      0 |      0 |      0 |      3 |      4 |      1 |      2 |      2 |     10 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4297400 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4299000 |     262 |     88 |    124 |     5 |    0 |     3 |    3 |    0 |     0 |    0 |     39 |    0 |    0 |    0 |    0 |    112 |    150 |       9 |       2 |       2 |       2 |      4 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        3 |        2 |        6 |       17 |       2 |        0 |        2 |        1 |        8 |       10 |       31 |       5 |        2 |        3 |        6 |        7 |        4 |       32 |       3 |        3 |        1 |        6 |        6 |       13 |       35 |       3 |        1 |        0 |        3 |        1 |        5 |        7 |       1 |        2 |        2 |        5 |        1 |        4 |        7 |       0 |        0 |        0 |        2 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        3 |        2 |       0 |      0 |      0 |     11 |      9 |      6 |      2 |      2 |     58 |      0 |      0 |      4 |     10 |     14 |      5 |      2 |      8 |     81 |      0 |      0 |      1 |      2 |      3 |      1 |      1 |      0 |     31 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      1 |      5 |      0 |     37 | s03      | R    |
| 4299100 |     286 |     81 |    122 |     7 |    0 |     6 |    2 |    0 |     0 |    0 |     68 |    0 |    0 |    0 |    0 |    135 |    151 |      19 |      14 |      11 |       5 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        4 |        5 |       13 |        9 |        5 |       1 |        3 |        5 |        8 |       13 |        3 |        7 |       2 |        2 |        9 |       14 |       18 |        6 |        7 |       2 |        9 |       12 |       11 |       13 |       10 |        6 |       3 |        2 |        5 |        6 |       14 |        2 |        0 |       0 |       10 |        6 |       12 |        7 |        4 |        0 |       0 |        1 |        0 |        0 |        4 |        2 |        1 |       0 |        2 |        1 |        0 |        2 |        2 |        0 |       0 |      0 |      1 |      7 |      9 |      5 |      3 |      6 |     50 |      0 |      0 |      0 |     12 |     15 |      0 |      5 |      8 |     82 |      0 |      0 |      1 |      9 |      7 |      2 |      0 |      6 |     43 |      0 |      0 |      0 |      2 |      4 |      0 |      1 |      1 |      7 |      0 |     37 | s03      | R    |
| 4299200 |       5 |      3 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4301000 |     580 |     89 |    413 |     4 |    0 |     3 |    5 |    2 |     2 |    0 |     62 |    0 |    0 |    0 |    0 |    261 |    319 |       2 |       6 |       0 |       0 |      8 |     29 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        0 |        2 |        7 |       19 |       0 |        0 |        0 |        1 |        4 |       13 |       38 |       2 |        1 |        2 |        3 |        9 |       26 |      137 |       8 |        3 |        1 |        4 |       16 |       26 |      159 |      18 |        0 |        1 |        0 |        8 |        2 |       22 |       0 |        1 |        1 |        1 |        2 |        9 |       15 |       0 |        1 |        1 |        0 |        0 |        2 |        7 |       0 |        0 |        0 |        1 |        1 |        0 |        3 |       0 |      0 |      2 |     15 |     15 |      5 |      3 |      9 |     40 |      0 |      0 |      1 |     38 |     62 |     31 |     21 |     47 |    213 |      0 |      0 |      1 |     19 |     11 |      1 |      0 |      6 |     24 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      2 |      7 |      0 |     37 | s03      | R    |
| 4302000 |     355 |     60 |    248 |     4 |    0 |     3 |    2 |    0 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |    153 |    202 |       1 |       4 |       2 |       0 |      2 |     13 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        7 |       15 |       1 |        0 |        0 |        3 |        2 |       12 |       20 |       0 |        0 |        4 |        2 |        3 |       12 |       86 |       3 |        0 |        3 |        3 |       11 |       20 |       95 |       6 |        1 |        1 |        1 |        3 |        4 |        6 |       0 |        0 |        1 |        1 |        0 |        5 |       15 |       0 |        0 |        0 |        0 |        1 |        0 |        3 |       0 |        1 |        0 |        0 |        0 |        0 |        4 |       0 |      0 |      0 |      9 |      6 |      1 |      2 |      2 |     40 |      0 |      0 |      0 |     27 |     28 |     21 |     14 |     19 |    139 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      2 |     25 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4302900 |     260 |     73 |    168 |     3 |    0 |     3 |    0 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |    110 |    150 |       0 |       5 |       0 |       0 |      5 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        1 |        0 |        3 |       21 |       0 |        1 |        1 |        0 |        2 |        9 |       35 |       0 |        0 |        1 |        0 |        2 |        5 |       67 |       0 |        0 |        0 |        1 |        2 |       15 |       74 |       1 |        0 |        0 |        0 |        1 |        1 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        7 |       0 |        0 |        0 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      2 |      3 |     14 |     10 |      9 |      4 |     31 |      0 |      0 |      1 |     31 |     37 |     25 |     18 |      6 |     50 |      0 |      0 |      0 |      3 |      1 |      2 |      4 |      0 |      3 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4303000 |     653 |    144 |    391 |    15 |    0 |     8 |    1 |    1 |     5 |    0 |     88 |    0 |    0 |    0 |    0 |    263 |    390 |       9 |       6 |       2 |       0 |     15 |     19 |      9 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        5 |       10 |       35 |       0 |        0 |        3 |        3 |        4 |       20 |       62 |       0 |        2 |        2 |        5 |        5 |       21 |      126 |       2 |        2 |        1 |        5 |        8 |       35 |      175 |       2 |        0 |        1 |        3 |        4 |        6 |       18 |       1 |        0 |        5 |        2 |        8 |        9 |       29 |       2 |        1 |        3 |        0 |        0 |        2 |        9 |       0 |        1 |        2 |        1 |        4 |        3 |        4 |       0 |      0 |      2 |     27 |     27 |      8 |      9 |      7 |     64 |      0 |      0 |      4 |     51 |     52 |     16 |     37 |     38 |    193 |      0 |      0 |      1 |     10 |     11 |      3 |      5 |      5 |     53 |      0 |      0 |      0 |      2 |      8 |      2 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 4303100 |     372 |     66 |    249 |     8 |    0 |     3 |    3 |    0 |     3 |    0 |     40 |    0 |    0 |    0 |    0 |    151 |    221 |       2 |       4 |       1 |       0 |      7 |     12 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        1 |        1 |        3 |        2 |       14 |       0 |        1 |        1 |        3 |        4 |       10 |       25 |       0 |        0 |        4 |        6 |        6 |       10 |       77 |       7 |        1 |        2 |        5 |        5 |       18 |      100 |       8 |        0 |        1 |        1 |        2 |        3 |        9 |       0 |        2 |        2 |        1 |        5 |        5 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        3 |       0 |        0 |        1 |        2 |        2 |        1 |        8 |       0 |      0 |      1 |     13 |      5 |      2 |      1 |      3 |     41 |      0 |      0 |      1 |     39 |     31 |     15 |      5 |      8 |    150 |      0 |      0 |      0 |      7 |      5 |      2 |      1 |      1 |     24 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4303200 |     561 |    128 |    359 |    11 |    0 |     3 |    1 |    1 |     0 |    0 |     58 |    0 |    0 |    0 |    0 |    210 |    351 |       8 |       5 |       3 |       0 |      9 |     17 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        6 |       35 |       0 |        1 |        0 |        2 |        5 |       13 |       63 |       1 |        0 |        7 |        3 |        3 |       15 |      105 |       1 |        0 |        3 |        8 |       12 |       19 |      175 |       8 |        1 |        3 |        1 |        2 |        1 |       14 |       2 |        2 |        1 |        1 |        0 |        5 |       24 |       1 |        0 |        0 |        0 |        0 |        1 |        8 |       0 |        0 |        0 |        0 |        1 |        2 |        4 |       0 |      0 |      0 |     31 |     18 |      4 |      6 |      4 |     65 |      0 |      0 |      5 |     65 |     51 |     17 |     15 |     20 |    186 |      0 |      0 |      0 |     10 |      6 |      3 |      2 |      0 |     37 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 4303300 |     170 |     50 |     87 |     4 |    0 |     1 |    2 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     84 |     86 |       9 |      13 |       5 |       0 |      1 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        3 |        8 |        6 |        1 |        6 |       0 |        0 |        6 |        6 |        3 |        2 |        7 |       0 |        3 |        6 |        9 |        6 |        2 |        9 |       5 |        5 |        5 |        6 |        9 |        4 |       11 |       7 |        1 |        3 |        3 |        0 |        3 |        3 |       0 |        3 |        2 |        2 |        3 |        1 |        1 |       0 |        0 |        1 |        2 |        1 |        0 |        1 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     11 |      5 |      4 |      1 |      3 |     26 |      0 |      0 |      0 |      7 |     10 |      4 |      4 |      4 |     58 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     19 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4303900 |       6 |      0 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      2 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4304000 |      61 |     12 |     36 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     33 |     28 |       0 |       0 |       0 |       0 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        3 |        1 |        1 |       1 |        0 |        0 |        1 |        3 |        2 |        0 |       0 |        0 |        4 |        4 |        2 |        6 |        2 |       2 |        0 |        0 |        0 |        5 |        6 |        2 |       3 |        0 |        0 |        1 |        1 |        1 |        3 |       0 |        2 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      3 |      4 |      7 |      1 |      1 |     20 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4304100 |      10 |      4 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      5 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4304200 |     109 |     28 |     62 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     47 |     62 |       1 |       3 |       0 |       0 |      2 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        0 |        2 |        1 |       2 |        2 |        1 |        2 |        5 |        4 |        3 |       3 |        1 |        0 |        9 |       10 |        7 |        1 |       0 |        4 |        0 |        9 |        5 |        5 |        5 |       6 |        2 |        3 |        2 |        4 |        0 |        0 |       0 |        2 |        2 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      5 |      3 |      1 |      2 |     16 |      0 |      0 |      0 |      3 |     15 |      2 |      3 |      4 |     35 |      0 |      0 |      0 |      1 |      4 |      0 |      2 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4304300 |      28 |      7 |     12 |     2 |    0 |     1 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     16 |     12 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        2 |        2 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        2 |        1 |       1 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      8 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4304400 |      16 |      7 |      3 |     0 |    0 |     1 |    1 |    0 |     1 |    0 |      3 |    0 |    0 |    0 |    0 |      6 |     10 |       0 |       1 |       1 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4320100 |     216 |     72 |     97 |     4 |    0 |     1 |    4 |    1 |     1 |    0 |     36 |    0 |    0 |    0 |    0 |    108 |    108 |      12 |      11 |       5 |       2 |      6 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        3 |        7 |        8 |        4 |        3 |       6 |        2 |        9 |        4 |       10 |        6 |        6 |       3 |        4 |        5 |       15 |        9 |       10 |        6 |       2 |        4 |        7 |        9 |        6 |        6 |        9 |       5 |        3 |        2 |        7 |        3 |        1 |        0 |       2 |        3 |        0 |        7 |        4 |        2 |        1 |       1 |        3 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |     13 |      5 |      2 |      2 |     46 |      0 |      0 |      0 |     16 |     11 |      4 |      2 |      4 |     60 |      0 |      0 |      0 |      4 |      6 |      2 |      0 |      0 |     24 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4320200 |     645 |    184 |    311 |    21 |    0 |     2 |    2 |    2 |     3 |    0 |    120 |    0 |    0 |    0 |    0 |    321 |    324 |      53 |      32 |      15 |       7 |      5 |      8 |      2 |      0 |      3 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      4 |      6 |      2 |      0 |      2 |      2 |      2 |       3 |       4 |       5 |       2 |      7 |     19 |      5 |      0 |        6 |       25 |       25 |       19 |        1 |        5 |       0 |       11 |       21 |       37 |       19 |       11 |        4 |       0 |        9 |       30 |       62 |       42 |       13 |        9 |       0 |        8 |       43 |       42 |       30 |       13 |       10 |       0 |        6 |       13 |       26 |       12 |        4 |        4 |       0 |       12 |       11 |       20 |        6 |        6 |        0 |       0 |        0 |        2 |        6 |        0 |        1 |        1 |       0 |        3 |        2 |        8 |        4 |        2 |        1 |       0 |      0 |      0 |     18 |     45 |      4 |      6 |      0 |    111 |      0 |      0 |      4 |     22 |     48 |      4 |      2 |      0 |    231 |      0 |      0 |      1 |     15 |     13 |      4 |      1 |      0 |     86 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4320300 |     521 |    128 |    235 |    18 |    0 |    10 |    1 |    1 |     1 |    0 |    127 |    0 |    0 |    0 |    0 |    253 |    268 |      26 |      27 |       9 |       2 |      5 |      6 |      3 |      1 |      0 |      2 |      1 |      0 |      3 |      0 |      1 |      0 |      2 |      1 |      3 |      0 |      5 |      1 |      4 |      0 |       1 |       1 |       5 |       0 |      8 |     12 |      5 |      1 |        8 |        4 |       15 |       16 |        7 |        5 |       0 |        4 |       21 |       18 |       15 |        8 |        7 |       0 |       11 |        8 |       44 |       20 |       19 |       11 |       0 |       10 |       14 |       42 |       26 |       15 |       15 |       0 |        6 |       16 |       15 |       12 |        8 |        7 |       0 |        8 |       16 |       18 |       14 |        5 |        2 |       0 |        1 |        5 |        9 |        4 |        1 |        1 |       0 |        3 |        3 |        1 |        1 |        2 |        0 |       0 |      0 |      0 |     10 |     12 |     17 |     14 |      0 |     75 |      0 |      0 |      2 |     21 |     43 |     25 |     24 |      0 |    120 |      0 |      0 |      0 |     12 |     15 |     10 |      5 |      0 |     85 |      0 |      0 |      0 |      7 |      4 |      3 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 4320500 |      53 |     19 |     16 |     0 |    0 |     4 |    1 |    1 |     4 |    0 |      8 |    0 |    0 |    0 |    0 |     24 |     29 |       0 |       4 |       2 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      2 |      0 |      1 |        0 |        1 |        2 |        1 |        1 |        2 |       1 |        0 |        1 |        4 |        1 |        1 |        2 |       2 |        1 |        2 |        1 |        2 |        0 |        1 |       0 |        1 |        0 |        1 |        3 |        1 |        2 |       1 |        1 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        1 |        1 |       0 |      0 |      0 |      5 |      4 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |     11 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4320800 |       9 |      3 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       0 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4320900 |       2 |      0 |      0 |     0 |    0 |     1 |    0 |    0 |     1 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4321000 |      38 |     12 |     18 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     18 |     20 |       5 |       2 |       1 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        1 |        2 |       1 |        1 |        1 |        2 |        0 |        0 |        2 |       0 |        0 |        1 |        1 |        1 |        3 |        2 |       0 |        0 |        1 |        0 |        3 |        4 |        1 |       1 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      4 |      3 |      0 |      4 |      3 |      4 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4321100 |       9 |      1 |      5 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4321200 |       9 |      3 |      3 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4321400 |       4 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4321500 |       4 |      1 |      2 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4321600 |     140 |     29 |     85 |     3 |    0 |     1 |    1 |    0 |     1 |    0 |     20 |    0 |    0 |    0 |    0 |     65 |     75 |       0 |       3 |       1 |       0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        2 |        4 |        2 |       0 |        3 |        0 |        2 |        5 |        7 |        2 |       0 |        5 |        1 |        4 |       11 |       10 |        7 |       1 |        3 |        2 |        5 |       16 |       11 |        8 |       1 |        4 |        0 |        0 |        5 |        2 |        2 |       0 |        5 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      6 |      3 |      4 |      0 |     14 |      0 |      0 |      1 |     12 |     15 |      6 |      4 |     10 |     37 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4321700 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4321800 |      72 |     20 |     47 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     34 |     38 |       3 |       2 |       0 |       0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        4 |        2 |        4 |       0 |        0 |        1 |        1 |        3 |        1 |        2 |       1 |        4 |        0 |        4 |        3 |        7 |        1 |       1 |        5 |        0 |        7 |        7 |        4 |        4 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      4 |      2 |      3 |      7 |      0 |      0 |      0 |      4 |      9 |      0 |      2 |      2 |     30 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4322000 |     544 |    212 |    203 |    15 |    0 |     3 |    3 |    1 |     4 |    0 |    103 |    0 |    0 |    0 |    0 |    254 |    290 |     105 |      56 |      43 |       6 |      5 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      3 |      2 |      0 |      0 |       11 |       14 |       26 |       22 |       11 |        8 |       1 |       23 |       21 |       25 |       27 |       11 |       10 |       2 |       12 |       19 |       33 |       25 |       12 |        3 |       0 |       11 |       22 |       29 |       21 |        8 |        6 |       2 |        5 |        4 |       22 |        9 |        2 |        4 |       0 |       13 |       10 |       20 |        7 |        4 |        3 |       0 |        1 |        2 |        4 |        2 |        1 |        1 |       0 |        3 |        5 |        4 |        2 |        0 |        1 |       0 |      0 |      3 |     19 |     30 |      2 |      2 |      5 |    151 |      0 |      0 |      3 |     18 |     37 |      9 |      3 |      3 |    130 |      0 |      0 |      1 |     22 |     11 |      6 |      2 |      1 |     60 |      0 |      0 |      2 |      6 |      4 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4322100 |      11 |      3 |      2 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |      7 |      4 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4322200 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4322300 |     983 |    261 |    510 |    22 |    0 |     5 |    5 |    0 |     4 |    0 |    176 |    0 |    0 |    0 |    0 |    481 |    502 |      35 |      38 |      18 |       6 |      7 |     17 |      6 |      1 |      0 |      0 |      2 |      0 |      3 |      2 |      0 |      0 |      0 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |       0 |       0 |       0 |      6 |      7 |      2 |      0 |        8 |       22 |       25 |       23 |       22 |       14 |       2 |       12 |       19 |       31 |       35 |       25 |       19 |       4 |       20 |       42 |       76 |       56 |       34 |       29 |       0 |       14 |       43 |       85 |       56 |       29 |       25 |       1 |        6 |       21 |       20 |       22 |       12 |        7 |       0 |       10 |       14 |       18 |       26 |       11 |        9 |       0 |        6 |        8 |        2 |        3 |        1 |        0 |       0 |        1 |        4 |        7 |        4 |        0 |        0 |       0 |      0 |      2 |     48 |     37 |     15 |     11 |      6 |    142 |      0 |      0 |      7 |     90 |     49 |     18 |     24 |     16 |    306 |      0 |      0 |      7 |     27 |     11 |     11 |      3 |      5 |    112 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      1 |     24 |      0 |     37 | s03      | R    |
| 4322400 |     466 |    119 |    236 |    13 |    0 |     7 |    4 |    1 |     4 |    0 |     82 |    0 |    0 |    0 |    0 |    227 |    239 |      18 |      12 |       8 |       1 |      8 |      9 |      9 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        5 |        9 |        9 |       13 |        8 |       1 |        4 |        4 |        8 |       18 |       13 |       24 |       1 |       11 |       17 |        8 |       26 |       28 |       29 |       0 |        1 |        8 |       22 |       23 |       28 |       31 |       4 |        5 |        5 |        9 |       10 |        8 |        7 |       0 |        3 |        8 |       10 |        5 |        8 |        4 |       0 |        1 |        3 |        4 |        4 |        4 |        1 |       0 |        1 |        4 |        0 |        2 |        3 |        2 |       0 |      0 |      1 |     11 |      7 |      8 |      9 |      7 |     76 |      0 |      0 |      1 |     35 |     38 |     11 |     10 |     15 |    126 |      0 |      0 |      0 |     12 |     15 |      4 |      0 |      1 |     50 |      0 |      0 |      0 |      5 |     10 |      1 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4322500 |     721 |    187 |    404 |    13 |    0 |     6 |    2 |    0 |     2 |    0 |    107 |    0 |    0 |    0 |    0 |    348 |    373 |      19 |      20 |      13 |       0 |      8 |     12 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |      3 |      0 |       1 |       1 |       0 |       0 |      2 |      9 |      3 |      0 |        2 |        8 |       19 |       23 |       11 |       13 |       0 |        5 |       10 |       34 |       34 |       13 |       15 |       0 |       11 |       18 |       63 |       48 |       28 |       33 |       1 |        8 |       27 |       57 |       48 |       28 |       34 |       0 |        2 |        5 |       14 |       16 |       10 |        8 |       0 |        5 |       14 |       14 |        8 |        6 |        5 |       0 |        2 |        4 |        4 |        1 |        2 |        2 |       0 |        0 |        1 |        4 |        0 |        2 |        1 |       0 |      0 |      4 |     44 |     53 |      1 |      0 |      0 |     85 |      0 |      0 |      3 |     61 |     85 |      6 |      0 |      1 |    248 |      0 |      0 |      1 |     24 |     13 |      0 |      0 |      0 |     69 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4322600 |     389 |    101 |    187 |    13 |    0 |     5 |    4 |    0 |     2 |    0 |     77 |    0 |    0 |    0 |    0 |    183 |    206 |      29 |      18 |       9 |       4 |      5 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      3 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      1 |      2 |      0 |      0 |        4 |        3 |        7 |       15 |        4 |        4 |       0 |        3 |        8 |       13 |       26 |        9 |        4 |       1 |        6 |       17 |       32 |       27 |       11 |        5 |       1 |        7 |       15 |       20 |       24 |       11 |       10 |       1 |        7 |        9 |        5 |        6 |        5 |        3 |       0 |       11 |       13 |        7 |        7 |        2 |        1 |       1 |        2 |        2 |        3 |        2 |        2 |        1 |       0 |        0 |        4 |        6 |        2 |        0 |        0 |       0 |      0 |      3 |     12 |     20 |      9 |     10 |      6 |     41 |      0 |      0 |      0 |     18 |     23 |     10 |      8 |     13 |    115 |      0 |      0 |      0 |     10 |      5 |      3 |      1 |      1 |     57 |      0 |      0 |      1 |      5 |      2 |      1 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 4322700 |    1007 |    265 |    467 |    27 |    0 |     7 |    9 |    1 |     9 |    0 |    222 |    0 |    0 |    0 |    0 |    484 |    523 |      66 |      57 |      29 |       5 |     14 |     29 |      8 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |      5 |      1 |      0 |      3 |      0 |      1 |      0 |       0 |       1 |       2 |       0 |      2 |      1 |      4 |      0 |       17 |       21 |       25 |       24 |       13 |       19 |       0 |       18 |       32 |       29 |       25 |       18 |       24 |       0 |       36 |       52 |       60 |       35 |       25 |       26 |       1 |       31 |       53 |       57 |       48 |       19 |       24 |       0 |       23 |       24 |       24 |       16 |       11 |        2 |       0 |       21 |       39 |       21 |       22 |       11 |        8 |       0 |        9 |        7 |        7 |        4 |        1 |        2 |       0 |       11 |        1 |        6 |        3 |        2 |        0 |       0 |      0 |      2 |     26 |     10 |      6 |      4 |      1 |    216 |      0 |      0 |      7 |     24 |     23 |      8 |      3 |      5 |    397 |      0 |      0 |      4 |     16 |     13 |      3 |      1 |      0 |    185 |      0 |      0 |      0 |      7 |      4 |      1 |      1 |      0 |     40 |      0 |     37 | s03      | R    |
| 4322800 |     460 |    130 |    231 |    10 |    0 |     3 |    1 |    3 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    216 |    244 |      26 |      14 |      10 |       3 |      8 |     10 |      2 |      0 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |       1 |       3 |       0 |       0 |      0 |      1 |      5 |      0 |        2 |        6 |       12 |        9 |        2 |       13 |       3 |        5 |       11 |       21 |       16 |       13 |       15 |       2 |        5 |       11 |       33 |       29 |       22 |       15 |       2 |       12 |        9 |       32 |       28 |       16 |       13 |       4 |        4 |        6 |       11 |        9 |        7 |        4 |       0 |        4 |        5 |       16 |        9 |        4 |        2 |       0 |        2 |        2 |        2 |        3 |        2 |        0 |       0 |        0 |        1 |        2 |        4 |        0 |        0 |       0 |      0 |      0 |     18 |     17 |      2 |      1 |      2 |     90 |      0 |      0 |      2 |     19 |     34 |      9 |      2 |      2 |    163 |      0 |      0 |      0 |     15 |      8 |      4 |      0 |      1 |     53 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4322900 |     249 |     85 |    109 |     5 |    0 |     2 |    2 |    1 |     2 |    0 |     43 |    0 |    0 |    0 |    0 |    101 |    148 |      13 |       9 |       1 |       2 |      4 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        2 |        4 |        4 |       15 |       1 |        2 |        2 |        2 |        7 |        5 |       35 |       4 |        0 |        4 |        3 |        7 |        6 |       27 |       2 |        1 |        3 |        1 |        6 |        7 |       37 |       5 |        0 |        0 |        2 |        4 |        2 |       12 |       0 |        1 |        1 |        4 |        5 |        6 |        6 |       0 |        0 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        1 |        1 |        0 |        3 |        3 |       0 |      0 |      2 |     12 |      8 |      3 |      6 |      1 |     53 |      0 |      0 |      1 |     13 |     16 |      4 |      6 |      5 |     64 |      0 |      0 |      0 |      5 |      7 |      2 |      0 |      1 |     28 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 4323000 |     385 |    142 |    189 |     7 |    0 |     0 |    3 |    0 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |    145 |    240 |       5 |       2 |       0 |       0 |      8 |      8 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        1 |        1 |        1 |        2 |        1 |       45 |       0 |        0 |        0 |        0 |        3 |       12 |       76 |       0 |        0 |        0 |        1 |        7 |       12 |       52 |       1 |        0 |        0 |        0 |        0 |       15 |       99 |       2 |        0 |        0 |        0 |        1 |        3 |       14 |       0 |        0 |        0 |        1 |        0 |       11 |       13 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        3 |        5 |       0 |      0 |      1 |     25 |     23 |      9 |      5 |      5 |     74 |      0 |      0 |      2 |     26 |     45 |      6 |      4 |      3 |    103 |      0 |      0 |      0 |      2 |      5 |      1 |      1 |      1 |     33 |      0 |      0 |      2 |      1 |      2 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4323100 |     429 |    142 |    208 |     7 |    0 |     3 |    5 |    1 |     0 |    0 |     63 |    0 |    0 |    0 |    0 |    179 |    250 |      16 |      17 |       9 |       0 |      7 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        3 |        1 |        6 |       10 |        5 |       25 |       2 |        4 |        6 |       10 |       17 |       13 |       38 |       2 |        6 |        7 |       13 |       17 |        8 |       42 |       1 |        3 |       12 |       11 |       15 |       20 |       52 |       1 |        3 |        2 |        5 |        6 |        4 |        6 |       0 |        4 |        5 |       14 |        3 |        6 |        4 |       1 |        0 |        2 |        2 |        2 |        0 |        1 |       0 |        2 |        1 |        2 |        1 |        1 |        2 |       0 |      0 |      2 |     20 |     22 |      5 |     16 |     13 |     64 |      0 |      0 |      0 |     31 |     34 |      7 |     13 |     16 |    107 |      0 |      0 |      0 |     11 |      7 |      7 |      2 |      2 |     34 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4323200 |     337 |     91 |    154 |    15 |    0 |     3 |    3 |    0 |     0 |    0 |     71 |    0 |    0 |    0 |    0 |    160 |    177 |      22 |      16 |      10 |       4 |      5 |      5 |      3 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      3 |      0 |        4 |       11 |       10 |        8 |        3 |        3 |       1 |        7 |       16 |        8 |       13 |        4 |        3 |       0 |        7 |       17 |       19 |       19 |        7 |        3 |       1 |       15 |       28 |       18 |       11 |        7 |        2 |       0 |       11 |       15 |        6 |        1 |        2 |        2 |       1 |        5 |       13 |        4 |        6 |        2 |        2 |       1 |        1 |        2 |        3 |        1 |        1 |        1 |       0 |        4 |        6 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |     14 |      8 |      0 |      0 |      1 |     68 |      0 |      0 |      0 |     14 |     20 |      4 |      5 |      2 |    109 |      0 |      0 |      0 |      7 |      5 |      3 |      0 |      2 |     54 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4323300 |      40 |     18 |     13 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     20 |     20 |       1 |       1 |       2 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        0 |        2 |        3 |        0 |       0 |        0 |        0 |        2 |        3 |        0 |        3 |       0 |        0 |        1 |        0 |        3 |        1 |        1 |       0 |        1 |        2 |        0 |        3 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        3 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      0 |      3 |     11 |      0 |      0 |      0 |      3 |      1 |      3 |      0 |      1 |      5 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4323400 |     701 |    191 |    341 |    14 |    0 |     3 |    6 |    5 |     7 |    0 |    134 |    0 |    0 |    0 |    0 |    317 |    384 |      38 |      25 |      16 |       5 |      6 |     12 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      2 |      4 |      1 |      0 |        7 |        8 |        7 |       10 |       18 |       29 |       3 |        9 |       10 |       10 |       24 |       20 |       32 |       4 |        6 |       19 |       31 |       33 |       27 |       33 |       2 |       12 |       25 |       31 |       35 |       33 |       50 |       4 |        9 |        9 |       13 |       17 |       14 |        6 |       0 |        8 |        8 |       10 |       16 |       17 |        7 |       0 |        2 |        3 |        7 |        2 |        1 |        1 |       0 |        1 |        3 |        2 |        6 |        2 |        5 |       0 |      0 |      0 |     19 |     31 |     20 |      8 |     10 |    103 |      0 |      0 |      0 |     39 |     58 |     19 |     14 |     18 |    193 |      0 |      0 |      0 |     21 |     14 |     15 |      2 |      5 |     77 |      0 |      0 |      1 |      9 |      9 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4323500 |     541 |    144 |    272 |    13 |    0 |     2 |    5 |    0 |     3 |    0 |    102 |    0 |    0 |    0 |    0 |    265 |    276 |      27 |      20 |      21 |       5 |      6 |      7 |      5 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      6 |      2 |      1 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        6 |        7 |        6 |       19 |       17 |        9 |       2 |       10 |       10 |        8 |       20 |       14 |       10 |       6 |       13 |       19 |       27 |       24 |       25 |       19 |       5 |        8 |       21 |       27 |       34 |       23 |       12 |      15 |        6 |       11 |       12 |       14 |       10 |        1 |       1 |        9 |        7 |       13 |        9 |        6 |        3 |       0 |        4 |        4 |        1 |        3 |        0 |        0 |       0 |        1 |        3 |        3 |        2 |        1 |        0 |       1 |      0 |      1 |     17 |     15 |     11 |      2 |     13 |     85 |      0 |      0 |      1 |     30 |     45 |      9 |      6 |     16 |    165 |      0 |      0 |      0 |     16 |     10 |      4 |      3 |      4 |     65 |      0 |      0 |      1 |      4 |      5 |      6 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4323600 |     653 |    233 |    227 |    15 |    0 |     8 |    7 |    4 |    15 |    0 |    144 |    0 |    0 |    0 |    0 |    348 |    305 |     121 |      45 |      53 |      10 |      3 |     12 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      4 |      1 |      0 |      0 |       0 |       5 |       0 |       0 |      7 |      5 |      0 |      1 |       16 |       24 |       35 |       34 |        8 |        6 |       3 |       26 |       34 |       16 |       23 |        7 |        1 |       0 |       21 |       31 |       25 |       27 |       10 |        4 |       0 |       31 |       29 |       20 |       18 |       10 |        1 |       0 |       19 |       28 |       17 |        7 |        4 |        3 |       0 |       23 |       19 |       12 |        8 |        2 |        1 |       1 |        9 |        9 |        4 |        4 |        0 |        0 |       0 |        6 |        9 |        1 |        5 |        1 |        1 |       0 |      0 |      3 |     34 |     22 |      3 |      2 |      2 |    167 |      0 |      0 |      4 |     17 |     23 |      3 |      0 |      0 |    180 |      0 |      0 |      3 |     11 |     11 |      2 |      0 |      0 |    117 |      0 |      0 |      2 |      4 |      4 |      1 |      1 |      0 |     37 |      0 |     37 | s03      | R    |
| 4323700 |     228 |     64 |    108 |     4 |    0 |     4 |    2 |    1 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |    103 |    125 |      16 |      11 |       6 |       0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        3 |        7 |       10 |        4 |        2 |       0 |        0 |        3 |       10 |        9 |        4 |       10 |       1 |        5 |        9 |        3 |       18 |        5 |        7 |       1 |        6 |        7 |        6 |       19 |        7 |       15 |       0 |        4 |        5 |        4 |        1 |        0 |        5 |       0 |        4 |        8 |        4 |        5 |        2 |        2 |       0 |        2 |        4 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |     10 |     12 |      2 |      2 |      1 |     37 |      0 |      0 |      1 |     24 |     13 |      1 |      4 |      2 |     63 |      0 |      0 |      2 |      3 |      8 |      3 |      1 |      0 |     27 |      0 |      0 |      0 |      3 |      2 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4324000 |     306 |     91 |    164 |     3 |    0 |     2 |    0 |    0 |     4 |    0 |     42 |    0 |    0 |    0 |    0 |    119 |    187 |       9 |       5 |       4 |       2 |      2 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        5 |        4 |       20 |       2 |        0 |        0 |        2 |        4 |       14 |       37 |       2 |        0 |        2 |        4 |        4 |       18 |       33 |       3 |        0 |        0 |        2 |        8 |       23 |       64 |       3 |        0 |        0 |        2 |        0 |        2 |       14 |       0 |        1 |        0 |        1 |        2 |        5 |       15 |       0 |        0 |        1 |        0 |        1 |        0 |        3 |       0 |        0 |        0 |        2 |        0 |        1 |        1 |       0 |      0 |      1 |      8 |     11 |      4 |      3 |      3 |     61 |      0 |      0 |      3 |     18 |     17 |      7 |      5 |      6 |    108 |      0 |      0 |      2 |      6 |      5 |      3 |      1 |      4 |     21 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4324100 |     334 |     92 |    187 |     5 |    0 |     1 |    2 |    1 |     4 |    0 |     42 |    0 |    0 |    0 |    0 |    159 |    175 |      13 |      17 |       6 |       2 |      5 |      7 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        9 |        7 |       10 |        6 |        4 |       4 |        2 |       10 |       12 |        9 |        7 |        4 |       6 |        9 |       13 |       26 |       16 |       17 |        8 |       2 |        9 |        9 |       27 |       24 |       16 |        7 |       4 |        7 |        4 |        4 |        3 |        1 |        1 |       0 |        4 |        4 |        6 |        5 |        0 |        3 |       0 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        4 |        0 |        1 |        0 |       0 |      0 |      0 |     11 |      5 |      4 |      2 |      6 |     64 |      0 |      0 |      1 |     24 |     24 |      7 |     15 |      7 |    109 |      0 |      0 |      0 |      7 |      3 |      2 |      0 |      2 |     28 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4324200 |     241 |     50 |    152 |     6 |    0 |     4 |    5 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     91 |    150 |       5 |       5 |       0 |       0 |      1 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        1 |        0 |        1 |        3 |       11 |       1 |        0 |        0 |        0 |        1 |        8 |       23 |       1 |        2 |        0 |        2 |        2 |       11 |       36 |       1 |        0 |        0 |        0 |        2 |       21 |       69 |       6 |        1 |        0 |        0 |        0 |        1 |        8 |       0 |        1 |        0 |        0 |        1 |        2 |       10 |       0 |        0 |        0 |        0 |        1 |        5 |        4 |       0 |        0 |        0 |        1 |        0 |        1 |        3 |       0 |      0 |      0 |     12 |      6 |      5 |      4 |      6 |     17 |      0 |      0 |      2 |     12 |     30 |      7 |      7 |      7 |     87 |      0 |      0 |      0 |      4 |      4 |      0 |      1 |      0 |     15 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4324300 |     607 |    188 |    285 |    14 |    0 |     4 |    3 |    3 |     2 |    0 |    108 |    0 |    0 |    0 |    0 |    297 |    310 |      53 |      34 |      21 |       2 |      3 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      5 |      0 |      1 |      0 |        5 |        7 |       15 |       20 |       18 |       20 |       7 |        7 |        5 |       18 |       27 |       12 |       15 |      12 |       15 |       16 |       32 |       35 |       26 |       12 |       6 |       19 |       22 |       30 |       31 |       18 |       14 |       9 |        5 |        8 |       12 |        9 |       10 |        4 |       0 |       13 |       13 |       13 |        7 |        8 |        4 |       2 |        3 |        3 |        2 |        3 |        1 |        3 |       0 |        3 |        1 |        4 |        3 |        0 |        0 |       0 |      0 |      2 |     15 |     27 |     13 |     11 |     10 |    110 |      0 |      0 |      1 |     35 |     45 |     16 |     11 |     17 |    160 |      0 |      0 |      4 |     11 |      9 |      6 |      1 |      2 |     75 |      0 |      0 |      0 |      7 |      3 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4324400 |      74 |     27 |     38 |     0 |    0 |     1 |    0 |    0 |     1 |    0 |      7 |    0 |    0 |    0 |    0 |     31 |     43 |      12 |       6 |       1 |       1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        0 |        1 |        0 |       3 |        2 |        3 |        1 |        2 |        1 |        3 |       7 |        0 |        1 |        5 |        5 |        3 |        3 |       1 |        2 |        1 |        5 |        7 |        1 |        1 |       3 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      6 |      6 |      1 |      4 |      0 |     21 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4324500 |     774 |    231 |    366 |    15 |    0 |     7 |    3 |    4 |     8 |    0 |    140 |    0 |    0 |    0 |    0 |    362 |    412 |      51 |      21 |      22 |       4 |     10 |     10 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       2 |       0 |       0 |       0 |      0 |      8 |      3 |      1 |        4 |       17 |       24 |       20 |       10 |       20 |       0 |       15 |       18 |       24 |       39 |       20 |       19 |       1 |       15 |       31 |       39 |       43 |       24 |       18 |       4 |       20 |       36 |       45 |       41 |       23 |       21 |       6 |        8 |       11 |       19 |       16 |        9 |        5 |       3 |       12 |       15 |       15 |        9 |       12 |        4 |       2 |        3 |        8 |        5 |        3 |        3 |        0 |       0 |        3 |        5 |        1 |        4 |        2 |        0 |       0 |      0 |      2 |     22 |     25 |     17 |      8 |      6 |    151 |      0 |      0 |      1 |     42 |     60 |     19 |     11 |     13 |    220 |      0 |      0 |      1 |     22 |      9 |      1 |      4 |      7 |     96 |      0 |      0 |      1 |      1 |      6 |      3 |      0 |      1 |     25 |      0 |     37 | s03      | R    |
| 4324600 |     285 |     89 |    122 |    10 |    0 |     0 |    5 |    2 |     0 |    0 |     57 |    0 |    0 |    0 |    0 |    139 |    146 |      20 |      19 |      12 |       3 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       4 |       2 |       0 |      0 |      0 |      0 |      0 |        7 |        9 |        5 |        6 |        8 |        1 |       2 |        4 |        6 |       13 |       11 |        8 |        6 |       3 |       10 |        9 |       17 |       18 |        6 |        4 |       0 |        4 |       11 |       20 |       15 |        4 |        3 |       1 |        3 |        5 |        7 |        5 |        4 |        1 |       1 |        5 |        4 |        9 |        8 |        3 |        2 |       0 |        2 |        2 |        4 |        1 |        2 |        0 |       0 |        1 |        3 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     13 |     11 |      8 |      1 |      3 |     53 |      0 |      0 |      1 |     19 |     19 |      9 |      2 |      6 |     66 |      0 |      0 |      0 |      7 |      9 |      2 |      1 |      2 |     36 |      0 |      0 |      2 |      2 |      2 |      3 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4324700 |     351 |     95 |    210 |     6 |    0 |     0 |    2 |    0 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |    150 |    201 |       2 |       3 |       0 |       2 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        3 |        3 |       34 |       0 |        0 |        0 |        0 |        1 |        8 |       41 |       4 |        0 |        0 |        1 |        0 |       12 |       75 |       1 |        0 |        0 |        1 |        0 |       17 |      102 |       1 |        0 |        0 |        0 |        0 |        3 |       12 |       0 |        0 |        0 |        0 |        0 |        7 |       16 |       0 |        0 |        0 |        0 |        0 |        2 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |      0 |      0 |     15 |     16 |      5 |      6 |      6 |     47 |      0 |      0 |      1 |     28 |     36 |      7 |      5 |      8 |    125 |      0 |      0 |      1 |      4 |      8 |      3 |      5 |      1 |     16 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4324800 |     425 |    128 |    209 |     6 |    0 |     4 |    6 |    1 |     1 |    0 |     70 |    0 |    0 |    0 |    0 |    206 |    219 |      32 |      12 |       8 |       3 |      3 |      9 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      2 |      0 |        7 |       10 |       12 |       11 |       12 |        1 |       3 |        5 |       11 |       16 |       23 |        6 |        9 |       2 |        8 |       15 |       21 |       32 |       18 |        8 |       4 |        9 |       13 |       23 |       27 |       19 |        9 |       3 |        6 |        6 |        4 |        9 |        6 |        3 |       0 |        9 |        4 |        8 |        8 |        6 |        1 |       0 |        0 |        2 |        2 |        4 |        0 |        2 |       0 |        1 |        2 |        2 |        3 |        0 |        0 |       0 |      0 |      1 |     13 |     19 |      7 |      3 |      3 |     82 |      0 |      0 |      1 |     18 |     42 |      5 |      9 |     15 |    119 |      0 |      0 |      1 |      6 |     10 |      3 |      1 |      3 |     46 |      0 |      0 |      0 |      5 |      6 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4324900 |    1119 |    306 |    541 |    20 |    0 |     4 |    5 |    0 |     4 |    0 |    239 |    0 |    0 |    0 |    0 |    554 |    565 |      54 |      71 |      31 |       6 |     13 |     14 |      4 |      2 |      2 |      0 |      5 |      1 |      1 |      2 |      0 |      0 |      1 |      5 |      6 |      0 |      7 |      7 |      1 |      1 |       9 |       8 |       7 |       1 |     15 |     26 |     17 |      1 |        5 |       40 |       39 |       22 |       17 |        7 |       0 |        6 |       60 |       64 |       24 |       13 |        9 |       0 |       11 |       95 |      112 |       40 |       13 |       10 |       0 |       12 |       99 |       99 |       30 |       13 |        7 |       0 |        7 |       37 |       53 |       17 |        9 |        5 |       0 |        8 |       31 |       41 |       20 |        6 |        5 |       0 |        3 |        8 |        2 |        2 |        0 |        0 |       0 |        3 |        7 |        7 |        0 |        1 |        0 |       0 |      0 |      4 |     30 |     31 |     10 |      1 |      0 |    230 |      0 |      0 |      3 |     47 |     63 |     19 |      0 |      0 |    409 |      0 |      0 |      3 |     19 |     26 |      3 |      0 |      0 |    188 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 4325000 |     100 |     41 |     38 |     3 |    0 |     0 |    2 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     47 |     53 |       8 |       2 |       0 |       1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        2 |       14 |       0 |        0 |        0 |        1 |        2 |        5 |       16 |       0 |        0 |        0 |        3 |        1 |        3 |       11 |       0 |        0 |        1 |        0 |        2 |        4 |       13 |       0 |        0 |        0 |        1 |        2 |        3 |        4 |       0 |        0 |        0 |        1 |        2 |        1 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |      0 |      0 |      4 |      5 |      5 |      3 |      1 |     23 |      0 |      0 |      1 |      2 |      4 |      3 |      1 |      2 |     25 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4325100 |       5 |      1 |      2 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4325200 |     455 |    171 |    192 |     8 |    0 |     8 |    4 |    1 |     2 |    0 |     69 |    0 |    0 |    0 |    0 |    202 |    253 |      69 |      35 |      29 |      10 |      2 |     10 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       4 |       2 |       0 |      4 |      1 |      0 |      0 |        7 |        6 |       23 |       12 |        9 |       10 |       0 |       10 |       16 |       15 |       29 |       10 |       22 |       2 |        7 |       18 |       20 |       16 |        9 |       11 |       1 |        7 |       20 |       19 |       29 |       12 |       22 |       1 |        7 |       15 |        7 |        6 |        4 |        3 |       0 |        4 |        9 |        3 |        5 |        4 |        1 |       1 |        0 |        5 |        3 |        0 |        0 |        3 |       0 |        2 |        2 |        3 |        2 |        1 |        2 |       0 |      0 |      1 |     22 |     23 |      5 |      7 |      3 |    110 |      0 |      0 |      1 |     15 |     39 |     11 |      6 |      2 |    118 |      0 |      0 |      0 |     13 |      7 |      1 |      1 |      0 |     47 |      0 |      0 |      0 |      7 |      5 |      0 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4325300 |     503 |    148 |    224 |    15 |    0 |     6 |    3 |    1 |     3 |    0 |    103 |    0 |    0 |    0 |    0 |    248 |    255 |      45 |      24 |      20 |       1 |      5 |      9 |      1 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       1 |       0 |      0 |      0 |      1 |      0 |        9 |        7 |       11 |       18 |        6 |        8 |       4 |        6 |       16 |       15 |       21 |        9 |       17 |       1 |       11 |       15 |       23 |       28 |        9 |       19 |       5 |       14 |       17 |       29 |       24 |       11 |       16 |       3 |        9 |       11 |       16 |       11 |        5 |        3 |       1 |       11 |        6 |       11 |       11 |        6 |        2 |       0 |        1 |        7 |        5 |        4 |        0 |        1 |       1 |        3 |        2 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     13 |     25 |      7 |      9 |      3 |     91 |      0 |      0 |      2 |     26 |     39 |     10 |     10 |     15 |    122 |      0 |      0 |      2 |     14 |     10 |      2 |      2 |      3 |     70 |      0 |      0 |      3 |      4 |      7 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4325400 |     252 |     98 |     88 |     5 |    0 |     4 |    3 |    1 |     0 |    0 |     53 |    0 |    0 |    0 |    0 |    122 |    130 |      60 |      25 |      15 |       4 |      0 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       3 |       0 |      0 |      0 |      3 |      0 |        5 |        8 |       10 |       11 |        4 |        5 |       4 |        7 |        6 |       12 |       13 |        3 |        7 |       3 |        4 |       11 |        9 |       11 |        6 |        3 |       0 |        9 |        7 |        9 |        9 |        5 |        5 |       0 |        4 |        4 |        5 |        4 |        4 |        2 |       0 |        6 |        4 |       11 |        6 |        3 |        0 |       0 |        0 |        3 |        1 |        4 |        0 |        0 |       0 |        2 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      1 |     10 |     24 |      5 |      2 |      3 |     53 |      0 |      0 |      4 |      9 |     15 |      1 |      0 |      2 |     57 |      0 |      0 |      0 |     11 |     11 |      1 |      0 |      2 |     28 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4325500 |     227 |     95 |     73 |     4 |    0 |     3 |    2 |    1 |     0 |    0 |     49 |    0 |    0 |    0 |    0 |    103 |    124 |      63 |      24 |      22 |       5 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |        0 |        5 |        9 |        9 |        7 |        7 |       1 |        7 |        7 |        9 |        9 |       12 |        9 |       4 |        5 |        8 |        6 |        9 |        3 |        4 |       4 |        5 |        5 |        5 |        8 |        3 |        4 |       4 |        4 |        3 |        4 |        6 |        3 |        1 |       1 |        3 |        7 |        7 |        7 |        1 |        2 |       0 |        0 |        1 |        0 |        0 |        1 |        2 |       0 |        2 |        1 |        0 |        0 |        3 |        0 |       0 |      0 |      0 |     22 |     15 |      3 |      4 |      4 |     47 |      0 |      0 |      1 |      5 |      7 |      5 |      1 |      4 |     50 |      0 |      0 |      0 |      8 |     11 |      0 |      0 |      1 |     29 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4325600 |     108 |     32 |     54 |     3 |    0 |     0 |    0 |    0 |     2 |    0 |     17 |    0 |    0 |    0 |    0 |     52 |     56 |      11 |       4 |       1 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      0 |      3 |      0 |      0 |        1 |        2 |        1 |        4 |        2 |        3 |       1 |        1 |        0 |        5 |        1 |        6 |        5 |       0 |        2 |        3 |        9 |        6 |        6 |        3 |       0 |        2 |        1 |        6 |        6 |        6 |        3 |       1 |        0 |        0 |        2 |        3 |        1 |        1 |       0 |        1 |        2 |        3 |        3 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |      8 |      3 |      2 |      3 |      2 |     14 |      0 |      0 |      1 |      5 |      9 |      6 |      6 |      2 |     25 |      0 |      0 |      0 |      5 |      3 |      4 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4325700 |     468 |    176 |    246 |     7 |    0 |     0 |    2 |    2 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |    182 |    286 |       9 |       2 |       1 |       0 |     16 |     11 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        1 |        1 |        9 |       53 |       1 |        0 |        0 |        0 |        3 |       23 |       81 |       3 |        1 |        1 |        2 |        2 |       17 |       77 |       1 |        2 |        1 |        0 |        8 |       26 |      102 |       6 |        0 |        1 |        2 |        1 |        2 |        5 |       0 |        0 |        0 |        1 |        4 |        3 |       16 |       0 |        1 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        6 |       0 |      0 |      0 |     33 |     27 |     10 |      7 |      5 |     94 |      0 |      0 |      1 |     26 |     40 |     11 |     12 |      9 |    147 |      0 |      0 |      0 |      6 |      2 |      1 |      2 |      0 |     24 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4325800 |     471 |    150 |    253 |    11 |    0 |     3 |    3 |    1 |     0 |    0 |     50 |    0 |    0 |    0 |    0 |    180 |    291 |      10 |      10 |       3 |       0 |      8 |     11 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |        1 |        1 |        0 |        4 |       39 |       1 |        0 |        2 |        0 |        4 |       12 |       81 |       5 |        0 |        1 |        1 |        7 |       14 |       73 |       1 |        1 |        0 |        2 |        3 |       18 |      123 |       9 |        1 |        1 |        3 |        0 |        4 |       15 |       0 |        0 |        0 |        0 |        0 |        7 |       19 |       0 |        0 |        2 |        1 |        0 |        4 |        6 |       0 |        0 |        0 |        0 |        1 |        1 |        3 |       0 |      0 |      0 |     10 |     31 |      8 |      3 |      9 |     89 |      0 |      0 |      1 |     32 |     38 |     14 |      6 |     13 |    149 |      0 |      0 |      1 |      6 |      6 |      1 |      0 |      1 |     35 |      0 |      0 |      1 |      2 |      2 |      2 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4325900 |     622 |    195 |    348 |    11 |    0 |     7 |    0 |    1 |     0 |    0 |     60 |    0 |    0 |    0 |    0 |    247 |    375 |       6 |       6 |       4 |       0 |     17 |     18 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        0 |        7 |       66 |       0 |        1 |        2 |        0 |        4 |       17 |       95 |       0 |        0 |        0 |        2 |        6 |       17 |      114 |       2 |        0 |        1 |        3 |        4 |       31 |      168 |       0 |        0 |        2 |        2 |        2 |        7 |       10 |       0 |        1 |        0 |        1 |        0 |       14 |       21 |       0 |        0 |        0 |        0 |        0 |        1 |        6 |       0 |        0 |        0 |        0 |        1 |        3 |        8 |       0 |      0 |      0 |     21 |     37 |     20 |     15 |      8 |     94 |      0 |      0 |      2 |     50 |     48 |     23 |     11 |     14 |    200 |      0 |      0 |      0 |     14 |      8 |      2 |      0 |      2 |     34 |      0 |      0 |      0 |      3 |      9 |      1 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 4326000 |     453 |     95 |    228 |     7 |    0 |     6 |    4 |    2 |     6 |    0 |    105 |    0 |    0 |    0 |    0 |    214 |    239 |      27 |      33 |      15 |       3 |      1 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       1 |       2 |       1 |       0 |      2 |      7 |      1 |      0 |        7 |       12 |        5 |        7 |        7 |        0 |       0 |       10 |       11 |       12 |       13 |        9 |        2 |       0 |       15 |       40 |       26 |       14 |        7 |        9 |       0 |       45 |       29 |       20 |        7 |        6 |        9 |       1 |       17 |       15 |        6 |        5 |        3 |        3 |       1 |       30 |       10 |        8 |        2 |        5 |        0 |       0 |        1 |        6 |        2 |        3 |        3 |        0 |       0 |        7 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      4 |      5 |      0 |      0 |      1 |     85 |      0 |      0 |      0 |      6 |     13 |      2 |      0 |      3 |    204 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      1 |     97 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 4326100 |     479 |    150 |    226 |    10 |    0 |     3 |    3 |    2 |     1 |    0 |     84 |    0 |    0 |    0 |    0 |    180 |    299 |      30 |      15 |      18 |       2 |     18 |     15 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |       10 |        9 |        8 |        3 |       18 |       1 |        9 |        7 |       15 |       11 |        3 |       54 |       2 |        4 |       26 |       15 |        5 |        5 |       29 |       0 |        4 |       21 |       10 |       11 |       11 |       83 |       2 |        6 |       11 |        6 |        8 |        1 |        6 |       0 |        4 |       15 |        7 |        6 |        3 |       10 |       1 |        3 |        1 |        3 |        0 |        1 |        1 |       0 |        3 |        4 |        0 |        1 |        0 |        2 |       0 |      0 |      1 |     23 |     19 |      3 |      1 |      0 |    103 |      0 |      0 |      1 |     29 |     15 |      3 |      0 |      2 |    176 |      0 |      0 |      1 |     12 |      3 |      1 |      0 |      0 |     67 |      0 |      0 |      2 |      2 |      2 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4326200 |     246 |     64 |    107 |     4 |    0 |     0 |    0 |    1 |     1 |    0 |     69 |    0 |    0 |    0 |    0 |    119 |    127 |       8 |       4 |       3 |       0 |      3 |      3 |      2 |      1 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      2 |      0 |      0 |       1 |       1 |       0 |       1 |      2 |      1 |      3 |      0 |        0 |        9 |        7 |        4 |        2 |        1 |       0 |        0 |       17 |       13 |        7 |        4 |        0 |       0 |        0 |       18 |       27 |        5 |        4 |        2 |       0 |        1 |       19 |       21 |        4 |        5 |        1 |       0 |        0 |       18 |       14 |        4 |        2 |        0 |       0 |        0 |       17 |        5 |        5 |        2 |        2 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     64 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    107 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     69 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4326600 |     329 |     89 |    182 |     6 |    0 |     4 |    1 |    0 |     1 |    0 |     46 |    0 |    0 |    0 |    0 |    138 |    191 |       7 |       1 |       3 |       1 |      3 |      9 |      2 |      2 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      2 |      1 |      0 |        2 |        6 |        2 |        3 |        2 |       21 |       0 |        0 |        3 |       10 |        8 |        8 |       24 |       0 |        1 |        8 |       14 |       11 |        6 |       33 |       1 |        0 |        7 |       11 |        8 |       14 |       68 |       0 |        2 |        3 |        4 |        2 |        0 |        9 |       0 |        2 |        7 |        3 |        0 |        4 |       10 |       0 |        1 |        1 |        0 |        2 |        1 |        3 |       0 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |      0 |      0 |      8 |     13 |      9 |      9 |      8 |     42 |      0 |      0 |      3 |     23 |     30 |     13 |     16 |     27 |     70 |      0 |      0 |      0 |      9 |      4 |      1 |      0 |      3 |     29 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4326700 |     603 |    194 |    243 |    17 |    0 |     6 |    7 |    1 |     8 |    0 |    127 |    0 |    0 |    0 |    0 |    285 |    318 |      13 |      26 |      10 |       3 |      7 |     11 |      4 |      1 |      1 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      0 |      0 |       1 |       0 |       1 |       0 |      3 |      2 |      0 |      0 |        1 |        4 |       19 |       32 |       12 |       11 |       2 |        7 |       23 |       17 |       38 |       16 |       11 |       1 |        9 |       25 |       34 |       24 |       22 |        9 |       0 |        7 |       22 |       30 |       33 |       14 |       14 |       0 |        8 |        9 |       16 |       16 |        6 |        4 |       0 |       11 |       10 |       13 |       20 |        9 |        5 |       0 |        1 |        3 |        6 |        9 |        1 |        2 |       0 |        1 |        2 |        4 |        7 |        3 |        0 |       0 |      0 |      3 |     38 |     35 |      3 |      1 |     14 |    100 |      0 |      0 |      1 |     31 |     34 |      8 |      7 |     15 |    147 |      0 |      0 |      0 |     19 |      8 |      7 |      3 |      5 |     85 |      0 |      0 |      0 |      9 |      6 |      1 |      0 |      2 |     21 |      0 |     37 | s03      | R    |
| 4326800 |     209 |     61 |    109 |     7 |    0 |     3 |    2 |    0 |     2 |    0 |     25 |    0 |    0 |    0 |    0 |     83 |    126 |      10 |       7 |       2 |       1 |      3 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        2 |        3 |        4 |        6 |        5 |       0 |        0 |        6 |        7 |       11 |        3 |        7 |       2 |        1 |        5 |        8 |        8 |        7 |       11 |       0 |        3 |        5 |        9 |        9 |       12 |       29 |       2 |        0 |        2 |        1 |        3 |        2 |        2 |       1 |        1 |        2 |        2 |        5 |        3 |        1 |       0 |        1 |        4 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        3 |        1 |        0 |        2 |       0 |      0 |      1 |     10 |      4 |      5 |      1 |      0 |     40 |      0 |      0 |      0 |     17 |     11 |      6 |      8 |      5 |     62 |      0 |      0 |      0 |      9 |      1 |      1 |      1 |      2 |     11 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4326900 |     290 |     68 |    160 |     5 |    0 |     1 |    3 |    1 |     0 |    0 |     52 |    0 |    0 |    0 |    0 |    136 |    154 |       8 |       9 |       3 |       0 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      3 |      0 |      0 |        2 |        0 |        6 |        9 |        2 |        5 |       0 |        2 |        1 |       10 |       13 |        8 |        9 |       1 |        5 |        2 |       18 |       26 |       17 |       17 |       0 |        1 |        9 |       24 |       22 |        9 |       10 |       0 |        1 |        1 |        8 |        6 |        4 |        3 |       0 |        3 |        5 |       10 |        8 |        3 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        2 |        1 |        2 |        0 |       0 |      0 |      0 |     10 |     23 |     10 |      2 |      0 |     23 |      0 |      0 |      1 |     25 |     61 |     19 |      2 |      0 |     52 |      0 |      0 |      0 |      9 |     10 |      7 |      0 |      1 |     25 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4327000 |     486 |     95 |    284 |     9 |    0 |     2 |    5 |    1 |     1 |    0 |     89 |    0 |    0 |    0 |    0 |    245 |    241 |      18 |      18 |      11 |       2 |      3 |     10 |      4 |      3 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       6 |       0 |       1 |      1 |      5 |      3 |      0 |        2 |        9 |        4 |       11 |        8 |        3 |       0 |        0 |        8 |        8 |       20 |       16 |        5 |       1 |       13 |       12 |       22 |       53 |       30 |       23 |       1 |       10 |       11 |       24 |       40 |       32 |       12 |       1 |        5 |        3 |       10 |       11 |        7 |        5 |       0 |       10 |       10 |        9 |        9 |        5 |        5 |       0 |        2 |        0 |        3 |        3 |        2 |        3 |       0 |        1 |        0 |        2 |        1 |        0 |        1 |       0 |      0 |      0 |     12 |     13 |      3 |      2 |      1 |     64 |      0 |      0 |      5 |     23 |     38 |     13 |     15 |     20 |    170 |      0 |      0 |      1 |     16 |      8 |      4 |      4 |      1 |     55 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4327100 |      12 |      2 |      4 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |      6 |      6 |       0 |       0 |       0 |       0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4327300 |       4 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4327500 |     256 |     71 |    125 |     8 |    0 |     0 |    0 |    1 |     0 |    0 |     51 |    0 |    0 |    0 |    0 |    121 |    135 |      11 |      10 |       7 |       1 |      6 |      8 |      3 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      1 |      9 |      1 |      0 |        2 |        8 |        7 |        9 |        3 |        0 |       0 |        4 |        4 |       16 |       10 |        4 |        4 |       0 |        9 |        5 |       18 |       11 |        9 |        8 |       0 |        6 |        7 |       16 |       20 |       11 |        5 |       0 |        3 |        5 |        8 |        7 |        3 |        1 |       0 |        1 |        5 |        9 |        6 |        3 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        1 |       0 |      0 |      1 |     18 |     11 |      4 |      6 |      1 |     30 |      0 |      0 |      1 |     17 |     35 |     11 |      8 |      0 |     53 |      0 |      0 |      1 |      8 |     10 |      4 |      1 |      0 |     27 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4327600 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4327800 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4327900 |     546 |    148 |    273 |    17 |    0 |     3 |    6 |    1 |     0 |    0 |     98 |    0 |    0 |    0 |    0 |    236 |    310 |      28 |      26 |      13 |       3 |      6 |     10 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      3 |      1 |      2 |      1 |      2 |      2 |      2 |      0 |       1 |       6 |       2 |       0 |      2 |      5 |      2 |      0 |        4 |        5 |       10 |       11 |       10 |       10 |       0 |       12 |       19 |       13 |       16 |       16 |       21 |       1 |        8 |       37 |       28 |       15 |       13 |       25 |       3 |       25 |       30 |       24 |       21 |       13 |       29 |       2 |        5 |       10 |       10 |        6 |        4 |        6 |       0 |       15 |       15 |        7 |        6 |        6 |        8 |       0 |        1 |        6 |        2 |        3 |        2 |        2 |       0 |        1 |        3 |        1 |        1 |        3 |        2 |       0 |      0 |      0 |     11 |     10 |      5 |      1 |      1 |    120 |      0 |      0 |      1 |     11 |     13 |      2 |      6 |      3 |    237 |      0 |      0 |      0 |      4 |      3 |      2 |      2 |      1 |     86 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 4328000 |     570 |    162 |    289 |     8 |    0 |     8 |    3 |    0 |     3 |    0 |     97 |    0 |    0 |    0 |    0 |    276 |    294 |      26 |      14 |       3 |       2 |      4 |     17 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      4 |      0 |      0 |      0 |        2 |       12 |       16 |       26 |        8 |        4 |       0 |        8 |       13 |       27 |       27 |       12 |        7 |       0 |       11 |       13 |       52 |       37 |       16 |       17 |       1 |        4 |       27 |       54 |       32 |       10 |       15 |       0 |        3 |        7 |       23 |        5 |       10 |        4 |       0 |        4 |        9 |       15 |       10 |        2 |        5 |       0 |        1 |        1 |        3 |        3 |        1 |        0 |       0 |        3 |        1 |        6 |        3 |        0 |        0 |       0 |      0 |      1 |     24 |     20 |     27 |      2 |      4 |     84 |      0 |      0 |      2 |     64 |     43 |     36 |      3 |      6 |    135 |      0 |      0 |      1 |     13 |      8 |     10 |      1 |      1 |     63 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4328100 |     502 |    122 |    275 |     6 |    0 |     1 |    2 |    0 |     1 |    0 |     95 |    0 |    0 |    0 |    0 |    251 |    251 |      18 |      20 |       2 |       0 |      6 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |      2 |      5 |      0 |      1 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        3 |       14 |       20 |        5 |        5 |       0 |        3 |       11 |       20 |       20 |       11 |        7 |       0 |        4 |       17 |       54 |       36 |       17 |       24 |       0 |        6 |       21 |       35 |       32 |       12 |       17 |       0 |        3 |        7 |       14 |        8 |        5 |        7 |       0 |        6 |        9 |       14 |       12 |        5 |        5 |       0 |        0 |        0 |        2 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        2 |        0 |       0 |      0 |      1 |     18 |     35 |     13 |      0 |      0 |     55 |      0 |      0 |      0 |     27 |    119 |     14 |      0 |      0 |    115 |      0 |      0 |      0 |      7 |     28 |      4 |      0 |      0 |     56 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4328200 |     633 |    165 |    319 |    12 |    0 |     1 |    5 |    3 |     6 |    0 |    122 |    0 |    0 |    0 |    0 |    285 |    348 |      24 |      27 |      11 |       4 |      6 |      8 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      7 |      5 |      5 |      0 |      3 |      3 |      1 |      0 |       1 |       5 |       0 |       0 |      1 |      3 |      1 |      0 |        5 |       16 |       18 |       11 |        6 |        5 |       0 |        8 |       20 |       36 |       26 |       10 |        4 |       0 |       12 |       31 |       61 |       31 |       16 |        7 |       0 |       18 |       53 |       41 |       27 |       14 |        8 |       0 |        5 |       19 |       17 |       10 |        2 |        1 |       0 |        4 |       23 |       24 |       11 |        4 |        2 |       0 |        1 |        2 |        5 |        2 |        1 |        1 |       0 |        2 |        1 |        5 |        5 |        1 |        1 |       0 |      0 |      0 |     37 |     36 |      0 |      0 |      0 |     92 |      0 |      0 |      2 |     68 |     48 |      0 |      0 |      0 |    201 |      0 |      0 |      0 |     33 |     12 |      0 |      0 |      0 |     77 |      0 |      0 |      0 |      9 |      9 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4328300 |     143 |     34 |     89 |     4 |    0 |     1 |    0 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     68 |     75 |       3 |       9 |       1 |       0 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        5 |        5 |        4 |        2 |        1 |       0 |        1 |        3 |        3 |        4 |        5 |        1 |       0 |        0 |       11 |       16 |        6 |        3 |        4 |       0 |        2 |       17 |       14 |       10 |        4 |        2 |       0 |        1 |        4 |        1 |        1 |        1 |        0 |       0 |        0 |        3 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     34 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     89 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4328500 |       4 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4328600 |       7 |      0 |      4 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4328700 |     749 |    162 |    404 |    13 |    0 |     3 |    2 |    0 |     2 |    0 |    163 |    0 |    0 |    0 |    0 |    377 |    372 |      17 |      11 |       8 |       2 |     16 |     16 |     10 |      0 |      1 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |      3 |      8 |      2 |      0 |      2 |      2 |      2 |      0 |       2 |       2 |       2 |       0 |      3 |      1 |      2 |      0 |        0 |       23 |       28 |        9 |        8 |        6 |       0 |        7 |       26 |       27 |       19 |        5 |        4 |       0 |        4 |       70 |       85 |       33 |       13 |       11 |       0 |        5 |       64 |       80 |       19 |       16 |        4 |       0 |        5 |       24 |       28 |        8 |       10 |        2 |       0 |        5 |       33 |       28 |       11 |        8 |        1 |       0 |        0 |        5 |        5 |        0 |        0 |        0 |       0 |        2 |        4 |        3 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    162 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |    403 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    163 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
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| 4329000 |     383 |    114 |    171 |     3 |    0 |     2 |    2 |    0 |     3 |    0 |     88 |    0 |    0 |    0 |    0 |    164 |    219 |       9 |      14 |       9 |       0 |      6 |     15 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        3 |        6 |        2 |        3 |       24 |       0 |        3 |        6 |        5 |        6 |        7 |       48 |       0 |        9 |       11 |       15 |       11 |        0 |       33 |       0 |        6 |        8 |        4 |        8 |        9 |       57 |       0 |        5 |        7 |        5 |        4 |        4 |       17 |       0 |        7 |        4 |        9 |        2 |        5 |       19 |       0 |        1 |        1 |        0 |        1 |        0 |        1 |       0 |        3 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |      5 |      9 |      4 |      1 |      0 |     93 |      0 |      0 |      0 |     21 |     16 |      3 |      2 |      0 |    129 |      0 |      0 |      0 |      6 |      9 |      0 |      0 |      0 |     73 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4329100 |      23 |      3 |     12 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      8 |     15 |       2 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        3 |        2 |        1 |        0 |        3 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      5 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4329200 |     271 |     63 |    138 |     7 |    0 |     2 |    1 |    0 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    128 |    143 |       7 |       7 |       4 |       0 |      6 |      7 |      2 |      1 |      2 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      2 |      0 |      0 |        4 |        6 |        6 |        5 |        5 |        1 |       0 |        0 |       15 |        9 |        3 |        8 |        1 |       0 |        3 |       15 |       29 |        9 |        9 |        6 |       1 |        2 |       14 |       24 |       14 |        6 |        6 |       0 |        0 |        5 |       12 |        4 |        4 |        1 |       0 |        0 |       15 |       14 |        3 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        2 |        3 |        0 |        2 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     63 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    138 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4329300 |     129 |     21 |     83 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     64 |     65 |       0 |       1 |       0 |       0 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        0 |        2 |        3 |        1 |        0 |       1 |        2 |        0 |        7 |        4 |        1 |        0 |       0 |        2 |        7 |       20 |        8 |        7 |        2 |       0 |        1 |        9 |       14 |        8 |        5 |        0 |       0 |        1 |        0 |        4 |        0 |        1 |        3 |       0 |        3 |        1 |        3 |        3 |        3 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     83 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4329400 |      12 |      0 |      5 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |      8 |      4 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        1 |        2 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4329600 |      44 |     12 |     26 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     20 |     24 |       3 |       3 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        3 |        0 |        0 |        1 |       0 |        0 |        2 |        5 |        0 |        0 |        1 |       0 |        0 |        3 |        7 |        2 |        1 |        0 |       0 |        0 |        4 |        6 |        1 |        1 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4329700 |     145 |     35 |     59 |     1 |    0 |     1 |    1 |    0 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |     69 |     76 |       3 |       4 |       3 |       0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        4 |        3 |        2 |        1 |        1 |       0 |        2 |       12 |        3 |        2 |        2 |        1 |       0 |        1 |       20 |       11 |        1 |        1 |        0 |       0 |        3 |       17 |        4 |        1 |        0 |        0 |       0 |        1 |        9 |        5 |        2 |        1 |        1 |       0 |        2 |       16 |        5 |        1 |        4 |        0 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     47 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4329800 |       3 |      3 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4330700 |     140 |     45 |     66 |     4 |    0 |     2 |    1 |    0 |     1 |    0 |     21 |    0 |    0 |    0 |    0 |     67 |     73 |      11 |       5 |       5 |       1 |      1 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      2 |      0 |        4 |        1 |        4 |        3 |        4 |        2 |       1 |        6 |        6 |        2 |        5 |        4 |        2 |       1 |        2 |        9 |        5 |        7 |        5 |        0 |       2 |        1 |        6 |        7 |        8 |        9 |        4 |       1 |        6 |        3 |        1 |        2 |        1 |        1 |       1 |        0 |        3 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |     10 |      1 |      1 |      1 |     27 |      0 |      0 |      1 |      9 |     10 |      0 |      1 |      3 |     42 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4330800 |     152 |     36 |     83 |     6 |    0 |     2 |    0 |    0 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     77 |     75 |       4 |       8 |       3 |       1 |      1 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        3 |        4 |        6 |        2 |        2 |       0 |        3 |        3 |        4 |        5 |        2 |        2 |       0 |        4 |        7 |        7 |       11 |        6 |        4 |       0 |        4 |        6 |       10 |       10 |        8 |        6 |       0 |        4 |        3 |        1 |        6 |        2 |        0 |       0 |        1 |        2 |        2 |        3 |        1 |        0 |       0 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      1 |      1 |      3 |     26 |      0 |      0 |      1 |      6 |     18 |      8 |      0 |      8 |     42 |      0 |      0 |      0 |      2 |      1 |      2 |      1 |      6 |     13 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4330900 |      30 |     11 |     16 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     15 |     15 |       9 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        2 |        0 |        2 |       0 |        1 |        0 |        1 |        0 |        0 |        3 |       1 |        1 |        0 |        3 |        1 |        1 |        3 |       0 |        1 |        1 |        1 |        3 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4331000 |      30 |      7 |     20 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     13 |     17 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        1 |        1 |        4 |        0 |        2 |       0 |        1 |        1 |        2 |        1 |        0 |        7 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      2 |      0 |      4 |      1 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
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| 4342400 |      56 |     15 |     29 |     1 |    0 |     2 |    0 |    0 |     2 |    0 |      7 |    0 |    0 |    0 |    0 |     26 |     30 |       4 |       4 |       2 |       1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        2 |        2 |        2 |        1 |       0 |        0 |        2 |        2 |        0 |        3 |        1 |       0 |        0 |        5 |        1 |        3 |        1 |        3 |       1 |        0 |        3 |        3 |        1 |        1 |        5 |       2 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      4 |      1 |      0 |      0 |      1 |      9 |      0 |      0 |      1 |      3 |      5 |      2 |      0 |      4 |     14 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4342500 |      13 |      8 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      6 |      7 |       4 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        0 |        0 |       1 |        1 |        1 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4342600 |      98 |     26 |     54 |     1 |    0 |     7 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     46 |     52 |       2 |       2 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        1 |        2 |        2 |        2 |       2 |        0 |        1 |        1 |        4 |        4 |        3 |       0 |        1 |        0 |        4 |        7 |        6 |        6 |       1 |        2 |        4 |        6 |        8 |        6 |        2 |       1 |        2 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        2 |        2 |        0 |        1 |       0 |      0 |      1 |      2 |     10 |      0 |      0 |      1 |     12 |      0 |      0 |      1 |      4 |     11 |      4 |      2 |      3 |     29 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |      5 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      2 |      1 |      0 |     37 | s03      | R    |
| 4342700 |       6 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4342800 |      84 |     26 |     46 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     38 |     46 |       1 |       1 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        1 |        4 |        5 |        0 |       0 |        1 |        1 |        1 |        2 |        6 |        3 |       0 |        3 |        1 |        4 |        4 |        5 |        4 |       0 |        3 |        4 |        5 |        7 |        3 |        2 |       1 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        2 |        1 |        1 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      3 |      2 |      0 |      3 |     11 |      0 |      0 |      1 |      5 |      7 |      2 |      2 |      2 |     27 |      0 |      0 |      0 |      1 |      2 |      3 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4342900 |     134 |     45 |     63 |     1 |    0 |     2 |    1 |    1 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     62 |     72 |       3 |       5 |       1 |       0 |      5 |      5 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        5 |        2 |        6 |       0 |        2 |        3 |        6 |        3 |        7 |        8 |       1 |        2 |        1 |        9 |        6 |        5 |        7 |       2 |        0 |        5 |        5 |        7 |        7 |        6 |       1 |        1 |        1 |        2 |        4 |        2 |        0 |       0 |        2 |        2 |        1 |        1 |        4 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      1 |      3 |      1 |     33 |      0 |      0 |      3 |      6 |     11 |      4 |      4 |      3 |     32 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      1 |     11 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4343000 |      20 |      3 |     13 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     11 |      9 |       2 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        1 |        3 |        2 |       0 |        0 |        0 |        1 |        0 |        3 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      3 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4351000 |      47 |     12 |     24 |     0 |    0 |     2 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     22 |     25 |       1 |       1 |       1 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        0 |        1 |        2 |        2 |       0 |        0 |        0 |        2 |        1 |        2 |        1 |       0 |        2 |        1 |        1 |        2 |        2 |        2 |       0 |        1 |        2 |        3 |        2 |        1 |        4 |       1 |        1 |        0 |        1 |        0 |        1 |        1 |       1 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      3 |      8 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4351100 |     124 |     23 |     80 |     5 |    0 |     1 |    1 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     60 |     64 |       1 |       1 |       1 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      3 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        5 |        0 |        3 |       0 |        0 |        0 |        1 |        4 |        4 |        4 |       0 |        1 |        1 |        9 |        7 |       16 |        9 |       0 |        1 |        4 |        8 |        9 |        9 |        6 |       0 |        0 |        1 |        0 |        1 |        2 |        0 |       0 |        1 |        3 |        1 |        1 |        4 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        2 |        0 |       0 |      0 |      0 |      3 |      0 |      3 |      2 |      3 |     12 |      0 |      0 |      2 |      7 |     13 |      2 |      2 |      7 |     47 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4351200 |      46 |     15 |     25 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     28 |     18 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        2 |        0 |       0 |        1 |        2 |        1 |        4 |        0 |        1 |       0 |        5 |        0 |        2 |        4 |        2 |        4 |       0 |        1 |        1 |        1 |        3 |        1 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      3 |      2 |      7 |      0 |      0 |      2 |      4 |      1 |      2 |      1 |      1 |     14 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4352100 |     197 |     79 |     52 |     8 |    0 |     5 |    1 |    0 |     8 |    0 |     44 |    0 |    0 |    0 |    0 |    101 |     96 |       4 |       2 |       4 |       1 |     10 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        8 |       15 |        5 |        3 |       1 |        3 |        0 |        7 |       19 |        5 |        5 |       2 |        1 |        3 |        4 |        6 |        9 |        5 |       0 |        1 |        3 |        3 |        7 |        7 |        2 |       1 |        0 |        5 |        3 |        7 |        2 |        3 |       0 |        3 |        5 |        6 |        5 |        3 |        2 |       0 |        1 |        1 |        3 |        6 |        4 |        0 |       0 |        0 |        1 |        0 |        2 |        3 |        1 |       0 |      0 |      1 |      8 |     13 |      6 |      4 |     12 |     35 |      0 |      0 |      0 |      1 |      9 |      4 |      1 |      4 |     33 |      0 |      0 |      1 |      7 |      2 |      2 |      1 |      2 |     29 |      0 |      0 |      0 |      4 |      5 |      3 |      2 |      0 |      8 |      0 |     37 | s03      | R    |
| 4352300 |      28 |      7 |     15 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     14 |     14 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        2 |        1 |        3 |        2 |       0 |        0 |        0 |        1 |        1 |        4 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      7 |      2 |      0 |      1 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4352400 |       3 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4352500 |      21 |      6 |      9 |     0 |    0 |     3 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      9 |     12 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        1 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        1 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4352800 |      25 |      3 |     19 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     13 |     12 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        4 |        1 |        3 |       0 |        0 |        0 |        1 |        4 |        1 |        3 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4353000 |       8 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      4 |    0 |    0 |    0 |    0 |      6 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4353100 |      69 |     10 |     39 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     35 |     34 |       0 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        3 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |        1 |        0 |        3 |        6 |        4 |        4 |       1 |        2 |        1 |        3 |       10 |        3 |        1 |       0 |        2 |        2 |        1 |        3 |        0 |        1 |       0 |        4 |        0 |        1 |        1 |        3 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      4 |      0 |      0 |      1 |      5 |     11 |      1 |      4 |      1 |     16 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      2 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4353400 |       7 |      2 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4353600 |     135 |     31 |     62 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |     40 |    0 |    0 |    0 |    0 |     65 |     70 |       0 |       1 |       0 |       0 |      3 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      5 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      2 |      0 |        0 |        0 |        6 |        6 |        0 |        0 |       0 |        1 |        4 |        7 |        7 |        0 |        0 |       0 |        1 |        3 |        9 |        9 |        8 |        2 |       0 |        1 |        4 |       13 |        8 |        4 |        0 |       0 |        2 |        0 |        5 |        7 |        3 |        2 |       0 |        0 |        4 |        7 |        5 |        3 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     31 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |     60 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4353800 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4354000 |       8 |      1 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      6 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        3 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4354400 |      12 |      3 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      6 |      6 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        4 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4354600 |     519 |    127 |    245 |    11 |    0 |     4 |    3 |    1 |     2 |    0 |    126 |    0 |    0 |    0 |    0 |    230 |    289 |      27 |      17 |      12 |       1 |      4 |     11 |      4 |      2 |      3 |      4 |      2 |      0 |      1 |      0 |      0 |      0 |      5 |      4 |     15 |      1 |      1 |      6 |      2 |      0 |       4 |      12 |       1 |       0 |      2 |      8 |      3 |      1 |        2 |        9 |       16 |       19 |        2 |        3 |       0 |        1 |       19 |       23 |       24 |        3 |        5 |       1 |       10 |       19 |       42 |       27 |       15 |        7 |       0 |       10 |       21 |       41 |       30 |       10 |       13 |       0 |        6 |       17 |       10 |       14 |        3 |        1 |       0 |        6 |       19 |       31 |       14 |        4 |        1 |       0 |        0 |        1 |        3 |        1 |        2 |        1 |       0 |        3 |        2 |        3 |        3 |        1 |        1 |       0 |      0 |      3 |     31 |     11 |      0 |      0 |      0 |     82 |      0 |      0 |      3 |     80 |     16 |      0 |      0 |      2 |    144 |      0 |      0 |      2 |     24 |      8 |      0 |      0 |      0 |     92 |      0 |      0 |      1 |      6 |      2 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4354800 |    1304 |    274 |    730 |    12 |    0 |     6 |    6 |    2 |     1 |    0 |    273 |    0 |    0 |    0 |    0 |    655 |    649 |      34 |      48 |      24 |       2 |     18 |     40 |      8 |      4 |      5 |      7 |      4 |      0 |      0 |      5 |      1 |      0 |      9 |     16 |     40 |      0 |      9 |      8 |      4 |      0 |      12 |      28 |      15 |       2 |      5 |     23 |      9 |      0 |        8 |       27 |       40 |       22 |       14 |        9 |       0 |        8 |       48 |       50 |       28 |       14 |        5 |       1 |       19 |       68 |      163 |       90 |       27 |        9 |       0 |       18 |       83 |      146 |       77 |       20 |        9 |       1 |        9 |       27 |       54 |       33 |       11 |        8 |       0 |        9 |       43 |       50 |       22 |        5 |        2 |       0 |        2 |        4 |       10 |        0 |        1 |        0 |       0 |        1 |        5 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |    272 |      0 |      0 |      2 |      2 |      3 |      1 |      2 |      1 |    719 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |    271 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 4355000 |      57 |      8 |     39 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      8 |    0 |    0 |    0 |    0 |     27 |     30 |       1 |       0 |       2 |       0 |      2 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        2 |        0 |        2 |        1 |        0 |       0 |        0 |        1 |        4 |       11 |        3 |        1 |       0 |        3 |        0 |        6 |        7 |        2 |        1 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      7 |      4 |      1 |      1 |      0 |     26 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 4355100 |     296 |     50 |    179 |     5 |    0 |     2 |    0 |    0 |     0 |    0 |     60 |    0 |    0 |    0 |    0 |    147 |    149 |       2 |       8 |       2 |       1 |      4 |      8 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      1 |      1 |      0 |       3 |       1 |       5 |       0 |      3 |      2 |      1 |      2 |        1 |        1 |        7 |        7 |        2 |        0 |       0 |        1 |        3 |       15 |        8 |        4 |        1 |       0 |        5 |        2 |       50 |       22 |       13 |        2 |       0 |        2 |        9 |       39 |       28 |        5 |        2 |       0 |        0 |        4 |       15 |        8 |        5 |        0 |       0 |        0 |        6 |       13 |        7 |        2 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     49 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    179 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     59 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4355200 |      13 |      3 |      9 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      8 |      5 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        2 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4355700 |       2 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4356000 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4356100 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4360000 |     679 |    139 |    457 |     6 |    0 |     1 |    2 |    2 |     2 |    0 |     70 |    0 |    0 |    0 |    0 |    301 |    378 |       4 |       4 |       0 |       0 |     25 |     28 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        1 |        2 |        8 |       11 |       33 |       0 |        4 |        4 |        3 |       19 |       19 |       32 |       0 |        3 |        5 |       15 |       30 |       50 |      100 |       2 |        2 |        7 |       22 |       35 |       62 |      119 |       5 |        3 |        2 |        3 |       10 |        8 |        8 |       0 |        2 |        3 |        4 |        9 |        7 |       11 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        2 |        3 |       0 |      0 |      0 |     17 |     20 |     10 |      3 |     16 |     73 |      0 |      0 |      3 |     62 |     84 |     22 |     16 |     29 |    241 |      0 |      0 |      0 |      8 |      5 |      6 |      2 |      2 |     47 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4360100 |       3 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      1 |       1 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4360500 |      64 |      9 |     43 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     33 |     31 |       0 |       0 |       0 |       0 |      5 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        3 |        1 |        1 |        0 |       0 |        1 |        0 |        2 |        5 |       10 |        4 |       0 |        0 |        1 |        4 |        5 |        9 |        1 |       1 |        0 |        1 |        0 |        0 |        2 |        3 |       0 |        1 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      1 |     15 |      3 |      0 |      0 |      0 |     24 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4360600 |     623 |    113 |    388 |     8 |    0 |     3 |    6 |    0 |     3 |    0 |    102 |    0 |    0 |    0 |    0 |    304 |    319 |       1 |       8 |       0 |       0 |     29 |     38 |     18 |      2 |      2 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      4 |      2 |      1 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      1 |      0 |        7 |        2 |        4 |       14 |       10 |       17 |       0 |        7 |        3 |        5 |       16 |       14 |       13 |       1 |        5 |        6 |       18 |       58 |       55 |       46 |       1 |        8 |       14 |       26 |       65 |       49 |       37 |       0 |        4 |        4 |        6 |       20 |        8 |        9 |       0 |        6 |        3 |       10 |       15 |       14 |        3 |       0 |        2 |        2 |        1 |        3 |        2 |        0 |       0 |        2 |        2 |        2 |        2 |        1 |        1 |       0 |      0 |      0 |     17 |     12 |      6 |      8 |     10 |     60 |      0 |      0 |      2 |     60 |     76 |     25 |     29 |     14 |    182 |      0 |      0 |      0 |     17 |      7 |      8 |      1 |      1 |     68 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4360700 |      19 |     13 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |     10 |      9 |       0 |       0 |       0 |       0 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        2 |        2 |        1 |       0 |        1 |        0 |        0 |        2 |        2 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      0 |      3 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4360800 |     160 |     35 |     91 |     2 |    0 |     1 |    2 |    2 |     2 |    0 |     25 |    0 |    0 |    0 |    0 |     79 |     81 |       0 |       2 |       0 |       0 |     12 |      6 |      4 |      4 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        3 |        7 |        2 |        0 |       0 |        1 |        2 |        2 |       13 |        2 |        1 |       0 |        5 |        2 |        7 |       15 |       15 |        5 |       0 |        4 |        4 |        7 |       11 |       10 |        6 |       0 |        3 |        1 |        3 |        2 |        3 |        0 |       0 |        4 |        0 |        4 |        4 |        1 |        0 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |      7 |      5 |      3 |      0 |      0 |     20 |      0 |      0 |      0 |     15 |      7 |      3 |      3 |      8 |     55 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |     19 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4360900 |      14 |      3 |      9 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      8 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        3 |        0 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4361200 |       4 |      0 |      0 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4361300 |       3 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4361500 |      17 |      3 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      9 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        3 |        1 |       0 |        1 |        0 |        1 |        0 |        2 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4361600 |      13 |      0 |      9 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      6 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4361700 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4362000 |     282 |     34 |    185 |     7 |    0 |     0 |    1 |    0 |     0 |    0 |     55 |    0 |    0 |    0 |    0 |    147 |    135 |       3 |       4 |       4 |       1 |      5 |     22 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |     14 |      3 |      5 |      2 |      4 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        0 |        4 |        3 |        3 |       0 |        3 |        3 |        0 |        7 |        7 |        0 |       0 |       11 |        2 |       11 |       28 |       31 |       18 |       0 |        5 |        3 |       18 |       31 |       16 |       11 |       0 |        2 |        3 |        4 |       13 |        5 |        3 |       0 |        2 |        3 |        2 |       12 |        4 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        2 |        0 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |      6 |      8 |      2 |      1 |      1 |     16 |      0 |      0 |      1 |     23 |     38 |     14 |     13 |     13 |     83 |      0 |      0 |      1 |      8 |     11 |      2 |      3 |      0 |     30 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 4362100 |      31 |      6 |     20 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     14 |     17 |       0 |       0 |       0 |       0 |      5 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        1 |        2 |        1 |        2 |        1 |        2 |       0 |        2 |        1 |        2 |        3 |        1 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      3 |      6 |      0 |      2 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4362200 |     698 |    103 |    462 |     7 |    0 |     4 |    4 |    1 |     1 |    0 |    116 |    0 |    0 |    0 |    0 |    321 |    377 |       1 |      14 |       3 |       0 |     24 |     56 |     17 |      0 |      0 |      0 |      3 |      0 |      1 |      4 |      0 |      0 |      1 |      9 |      1 |      1 |      1 |      2 |      5 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        3 |        6 |       17 |        6 |        3 |       0 |        5 |        4 |        9 |       27 |       12 |        8 |       0 |       15 |        9 |       22 |       47 |       69 |       54 |       1 |       23 |       13 |       37 |       69 |       63 |       40 |       0 |       12 |        6 |        4 |       14 |       18 |        5 |       0 |       14 |        4 |        8 |       17 |        8 |        6 |       0 |        0 |        3 |        1 |        2 |        1 |        0 |       0 |        4 |        0 |        2 |        2 |        2 |        0 |       0 |      0 |      0 |      7 |     27 |     10 |      9 |      7 |     43 |      0 |      0 |      3 |     46 |     91 |     44 |     30 |     35 |    213 |      0 |      0 |      0 |     20 |     18 |      8 |      4 |      3 |     63 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4363000 |       8 |      2 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      4 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4363100 |      87 |     22 |     50 |     0 |    0 |     1 |    0 |    0 |     1 |    0 |     13 |    0 |    0 |    0 |    0 |     46 |     41 |       1 |       0 |       0 |       0 |      7 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        3 |        5 |        2 |       1 |        1 |        3 |        0 |        3 |        2 |        0 |       1 |        0 |        1 |        3 |        7 |       10 |        3 |       0 |        0 |        1 |        5 |       12 |        3 |        5 |       0 |        1 |        0 |        4 |        0 |        1 |        2 |       0 |        0 |        1 |        1 |        1 |        2 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      7 |      5 |      2 |      2 |      3 |     31 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      9 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4363300 |     207 |     40 |    128 |     2 |    0 |     0 |    0 |    0 |     1 |    0 |     36 |    0 |    0 |    0 |    0 |    107 |    100 |       0 |       3 |       0 |       0 |      7 |     17 |      2 |      0 |      2 |      1 |      2 |      0 |      1 |      2 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        3 |        3 |        4 |        3 |       0 |        1 |        1 |        9 |        7 |        4 |        5 |       0 |        5 |        3 |       10 |       19 |       23 |       16 |       0 |        5 |        4 |        7 |       17 |       13 |        6 |       0 |        2 |        1 |        0 |        8 |        3 |        3 |       0 |        1 |        2 |        5 |        7 |        3 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      7 |     10 |      1 |      2 |      1 |     19 |      0 |      0 |      2 |     13 |     18 |      8 |      8 |      5 |     74 |      0 |      0 |      0 |      6 |      6 |      0 |      2 |      0 |     22 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4363500 |     373 |     44 |    248 |     8 |    0 |     1 |    1 |    0 |     0 |    0 |     71 |    0 |    0 |    0 |    0 |    189 |    184 |       2 |       5 |       0 |       0 |      4 |     20 |     14 |      0 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        0 |        2 |        7 |        5 |        3 |       0 |        1 |        1 |        1 |        7 |        7 |        7 |       0 |        7 |        7 |       19 |       28 |       30 |       30 |       2 |        5 |       10 |       22 |       38 |       24 |       25 |       1 |        9 |        1 |        3 |       12 |       12 |        7 |       0 |        3 |        2 |        2 |       12 |        7 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        4 |        1 |        1 |       0 |      0 |      0 |      8 |      6 |      3 |      0 |      2 |     25 |      0 |      0 |      2 |     30 |     42 |     11 |     13 |     16 |    134 |      0 |      0 |      1 |     12 |      9 |      3 |      2 |      1 |     43 |      0 |      0 |      0 |      2 |      1 |      1 |      2 |      0 |      4 |      0 |     37 | s03      | R    |
| 4363600 |       4 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
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| 4367500 |     127 |     12 |    103 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     56 |     71 |       0 |       0 |       0 |       0 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        0 |        0 |        1 |        2 |       0 |        0 |        1 |        0 |        0 |        2 |        2 |       0 |        1 |        1 |        4 |        6 |       15 |       19 |       1 |        3 |        2 |        6 |       12 |       10 |       21 |       2 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        2 |        1 |        1 |        2 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      2 |      0 |      6 |      0 |      0 |      0 |     11 |     19 |      4 |      2 |      5 |     62 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4367600 |       1 |      0 |      0 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4367700 |      10 |      0 |      6 |     0 |    0 |     0 |    0 |    2 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4367800 |      15 |      1 |     13 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      6 |      9 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        1 |        2 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      8 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4367900 |     131 |     12 |     95 |     2 |    0 |     1 |    0 |    1 |     1 |    0 |     19 |    0 |    0 |    0 |    0 |     61 |     70 |       0 |       1 |       0 |       0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        1 |        2 |        2 |        2 |        2 |       0 |        1 |        1 |        6 |        9 |       13 |       17 |       2 |        0 |        2 |        8 |        6 |        9 |       18 |       3 |        2 |        0 |        2 |        1 |        1 |        1 |       0 |        1 |        1 |        4 |        2 |        3 |        1 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |      7 |      0 |      0 |      2 |      7 |     19 |      7 |      3 |      2 |     55 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4368000 |     801 |    100 |    580 |    11 |    0 |     4 |    2 |    3 |     3 |    0 |     98 |    0 |    0 |    0 |    0 |    369 |    432 |       5 |      14 |       4 |       2 |      9 |     38 |      5 |      1 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      1 |      1 |        1 |        1 |        3 |       11 |       12 |        7 |       0 |        5 |        2 |        6 |       24 |       14 |       14 |       0 |       14 |       18 |       35 |       53 |       71 |       77 |       4 |       11 |       10 |       52 |       61 |       57 |      105 |      12 |       10 |        3 |        8 |       13 |       13 |        7 |       1 |        7 |        7 |        4 |        9 |        6 |        9 |       1 |        3 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        2 |        3 |        6 |        3 |        1 |       0 |      0 |      1 |     11 |     17 |      5 |      1 |      2 |     63 |      0 |      0 |      8 |     65 |     96 |     32 |     25 |     22 |    332 |      0 |      0 |      0 |     16 |     12 |      9 |      2 |      2 |     57 |      0 |      0 |      0 |      8 |      4 |      0 |      1 |      1 |      9 |      0 |     37 | s03      | R    |
| 4368100 |     142 |     22 |     96 |     0 |    0 |     0 |    2 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     70 |     72 |       0 |       0 |       0 |       0 |      3 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        1 |        2 |       0 |        1 |        2 |        2 |        3 |        1 |        6 |       1 |        5 |        4 |        5 |       11 |       14 |       10 |       1 |        0 |        2 |       10 |       13 |        7 |       14 |       0 |        4 |        0 |        0 |        3 |        3 |        3 |       0 |        1 |        1 |        3 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |      2 |      1 |      0 |      0 |     12 |      0 |      0 |      0 |     14 |     14 |      3 |      1 |      5 |     59 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4368200 |       5 |      3 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4368400 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4368600 |      48 |     14 |     22 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     25 |     23 |       0 |       0 |       0 |       0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        2 |        2 |        0 |       0 |        1 |        0 |        1 |        4 |        1 |        0 |       0 |        1 |        1 |        1 |        3 |        2 |        3 |       0 |        2 |        1 |        1 |        4 |        2 |        1 |       0 |        2 |        1 |        0 |        2 |        2 |        0 |       0 |        1 |        0 |        2 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      5 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      6 |      4 |      1 |      1 |      0 |     10 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4368700 |      10 |      3 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      4 |       0 |       0 |       1 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4369000 |     328 |     75 |    207 |     3 |    0 |     5 |    1 |    0 |     0 |    0 |     37 |    0 |    0 |    0 |    0 |    149 |    179 |       4 |       8 |       0 |       1 |      8 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        2 |        5 |        7 |        6 |       0 |        4 |        3 |        7 |       18 |       11 |        8 |       1 |        4 |        6 |       12 |       18 |       22 |       35 |       1 |        8 |        4 |       17 |       20 |       23 |       32 |       5 |        3 |        0 |        3 |        6 |        9 |        2 |       0 |        1 |        3 |        4 |        2 |        3 |        1 |       0 |        1 |        2 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        2 |        0 |        1 |       0 |      0 |      3 |     10 |     12 |      5 |      5 |      1 |     39 |      0 |      0 |      0 |     19 |     28 |     10 |      3 |      6 |    141 |      0 |      0 |      0 |      4 |      3 |      4 |      2 |      2 |     22 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4369100 |      13 |      5 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      7 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4369200 |       4 |      4 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4369300 |       2 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4369400 |      21 |      2 |     19 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |     11 |     10 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        2 |        1 |        4 |       0 |        0 |        2 |        2 |        1 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      6 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4369500 |      41 |      5 |     31 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     21 |     20 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        3 |        2 |        6 |        4 |       0 |        1 |        0 |        1 |        7 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |     10 |      3 |      2 |      0 |     13 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4369600 |      26 |      4 |     20 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     10 |     16 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        3 |        3 |        3 |       0 |        0 |        1 |        1 |        5 |        3 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      2 |      2 |      1 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4369700 |      24 |      6 |     14 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     11 |     13 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        1 |        0 |        0 |        3 |        2 |        1 |       0 |        1 |        0 |        0 |        3 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      4 |      2 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4369800 |      58 |     13 |     33 |     1 |    0 |     0 |    0 |    0 |     2 |    0 |      9 |    0 |    0 |    0 |    0 |     29 |     29 |       0 |       0 |       0 |       0 |      0 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        4 |        2 |        1 |       0 |        0 |        0 |        0 |        3 |        2 |        0 |       0 |        2 |        0 |        1 |        6 |        6 |        2 |       0 |        2 |        0 |        5 |        6 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        1 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      3 |      0 |      7 |      0 |      0 |      0 |      6 |      5 |      1 |      5 |      1 |     15 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4369900 |      16 |      3 |     12 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      7 |      9 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        3 |        2 |       0 |        0 |        0 |        2 |        0 |        3 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4380000 |     126 |     32 |     47 |     5 |    0 |     2 |    0 |    0 |     0 |    0 |     40 |    0 |    0 |    0 |    0 |     74 |     52 |       1 |       1 |       4 |       1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |       10 |        9 |        2 |        1 |        0 |        0 |       0 |        4 |        6 |        0 |        0 |        0 |        0 |       0 |       10 |       12 |        2 |        1 |        0 |        0 |       0 |        5 |        2 |        4 |        8 |        3 |        0 |       0 |       11 |        9 |        1 |        1 |        0 |        0 |       0 |        8 |        4 |        3 |        2 |        1 |        0 |       0 |        3 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |     24 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |      0 |     40 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |     35 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4381000 |     553 |    141 |    267 |     9 |    0 |     3 |    1 |    7 |     5 |    0 |    120 |    0 |    0 |    0 |    0 |    249 |    304 |       7 |       4 |      11 |       1 |      9 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        6 |        6 |       12 |       13 |       10 |       8 |        2 |        9 |       11 |       35 |        8 |       14 |       6 |        7 |        9 |       18 |       24 |       31 |       19 |      10 |        5 |        8 |       26 |       32 |       31 |       33 |      14 |       12 |       11 |       10 |       15 |       11 |        5 |       1 |        6 |        4 |       17 |       13 |        9 |        5 |       1 |        2 |        4 |        0 |        1 |        2 |        1 |       0 |        2 |        4 |        3 |        5 |        1 |        0 |       0 |      0 |      2 |     16 |     23 |      5 |      4 |      2 |     89 |      0 |      0 |      0 |     39 |     34 |     15 |      4 |     10 |    165 |      0 |      0 |      0 |     11 |     17 |      3 |      4 |      2 |     83 |      0 |      0 |      1 |      2 |     10 |      1 |      0 |      2 |      9 |      0 |     37 | s03      | R    |
| 4382000 |     507 |     93 |    320 |     7 |    0 |     1 |    0 |    0 |     2 |    0 |     84 |    0 |    0 |    0 |    0 |    222 |    285 |       7 |       6 |       5 |       1 |      5 |     10 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        4 |        1 |        2 |        8 |        9 |        8 |       6 |        3 |        6 |        9 |       12 |        8 |       14 |       3 |        5 |        8 |       17 |       20 |       25 |       62 |      10 |        8 |        8 |       21 |       35 |       30 |       55 |      16 |        6 |        2 |       10 |        5 |        7 |        3 |       1 |        7 |        2 |       15 |        9 |        5 |       10 |       2 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        3 |        1 |        1 |        1 |       0 |      0 |      0 |     14 |      8 |      1 |      5 |      1 |     64 |      0 |      0 |      0 |     49 |     59 |     13 |     11 |     18 |    170 |      0 |      0 |      0 |      6 |     14 |      2 |      1 |      0 |     61 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4382100 |     427 |     98 |    236 |     5 |    0 |     2 |    3 |    0 |     3 |    0 |     80 |    0 |    0 |    0 |    0 |    188 |    239 |       4 |      10 |       6 |       0 |      8 |     11 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        1 |        6 |        3 |       14 |        5 |        2 |       2 |        4 |        8 |       11 |       17 |        9 |        9 |       7 |        4 |       17 |       18 |       25 |       16 |       20 |       7 |        6 |       20 |       27 |       18 |       21 |       28 |       9 |        8 |       11 |        7 |        9 |        4 |        2 |       0 |        3 |       11 |       11 |       10 |        3 |        1 |       0 |        0 |        3 |        0 |        4 |        0 |        0 |       0 |        3 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |     17 |     11 |      3 |      4 |      3 |     60 |      0 |      0 |      1 |     22 |     51 |      5 |      3 |      8 |    146 |      0 |      0 |      0 |     12 |      8 |      0 |      0 |      0 |     60 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4382200 |      47 |     13 |     24 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     19 |     28 |       0 |       1 |       2 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        1 |       1 |        0 |        2 |        2 |        1 |        1 |        3 |       1 |        0 |        0 |        6 |        1 |        2 |        2 |       0 |        0 |        4 |        4 |        0 |        1 |        4 |       0 |        0 |        0 |        1 |        1 |        3 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      2 |      3 |      1 |      6 |      0 |      0 |      0 |      5 |      4 |      3 |      2 |      0 |     10 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4383000 |     752 |    210 |    362 |    11 |    0 |     4 |    3 |    0 |     7 |    0 |    155 |    0 |    0 |    0 |    0 |    327 |    425 |      13 |       4 |       9 |       2 |     21 |     18 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        6 |       12 |       18 |        7 |       26 |       3 |        8 |       18 |       14 |       22 |       23 |       48 |       4 |        7 |       21 |       14 |       26 |       31 |       64 |       7 |       11 |       15 |       25 |       23 |       27 |       78 |      13 |        8 |       14 |       13 |       13 |       16 |        8 |       1 |        6 |       25 |       14 |       17 |        8 |       11 |       1 |        0 |        4 |        1 |        2 |        1 |        3 |       0 |        1 |        2 |        2 |        2 |        2 |        5 |       0 |      0 |      0 |     38 |     23 |      6 |      5 |      3 |    135 |      0 |      0 |      2 |     54 |     62 |      5 |      8 |      9 |    222 |      0 |      0 |      1 |     25 |     13 |      0 |      0 |      0 |    116 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      1 |     20 |      0 |     37 | s03      | R    |
| 4385000 |     790 |    199 |    449 |    21 |    0 |     3 |    2 |    2 |     4 |    0 |    110 |    0 |    0 |    0 |    0 |    353 |    437 |      10 |      12 |       2 |       0 |     13 |     22 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      2 |      0 |      0 |       0 |       3 |       0 |       0 |      4 |      2 |      0 |      0 |        3 |        9 |        8 |       18 |       13 |       18 |       8 |        7 |       16 |       20 |       25 |       19 |       28 |       7 |       17 |       24 |       29 |       35 |       42 |       45 |      18 |       10 |       14 |       45 |       45 |       40 |       54 |      31 |       10 |        7 |        4 |       18 |       10 |        4 |       0 |        8 |       10 |       11 |        8 |        5 |       13 |       2 |        1 |        4 |        2 |        5 |        1 |        0 |       0 |        0 |        4 |        3 |        7 |        5 |        0 |       0 |      0 |      1 |     27 |     28 |      9 |      6 |      7 |    121 |      0 |      0 |      0 |     52 |     55 |     25 |     16 |     22 |    279 |      0 |      0 |      0 |     14 |     17 |      3 |      2 |      0 |     74 |      0 |      0 |      0 |      6 |      7 |      0 |      1 |      1 |     17 |      0 |     37 | s03      | R    |
| 4386000 |     616 |    167 |    305 |    12 |    0 |     7 |    4 |    2 |     7 |    0 |    112 |    0 |    0 |    0 |    0 |    269 |    347 |      14 |      10 |      12 |       2 |      9 |     13 |      6 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      2 |      0 |      0 |      1 |        3 |        8 |       12 |       11 |       13 |        7 |       2 |        6 |       12 |       26 |       27 |       16 |       18 |       6 |        7 |       24 |       30 |       28 |       22 |       26 |       1 |       14 |       20 |       26 |       39 |       27 |       36 |       5 |        5 |       11 |       16 |       10 |        8 |        1 |       3 |       10 |       19 |        9 |        4 |       12 |        4 |       0 |        1 |        8 |        3 |        7 |        1 |        0 |       1 |        4 |        1 |        3 |        1 |        2 |        0 |       0 |      0 |      2 |     22 |     24 |      2 |      2 |      3 |    112 |      0 |      0 |      7 |     46 |     41 |     15 |      9 |     12 |    175 |      0 |      0 |      1 |     13 |     10 |      4 |      1 |      0 |     83 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      1 |     23 |      0 |     37 | s03      | R    |
| 4387000 |     554 |     94 |    362 |    12 |    0 |     2 |    1 |    0 |     1 |    0 |     82 |    0 |    0 |    0 |    0 |    249 |    305 |       1 |       6 |       1 |       0 |      7 |     21 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      4 |      0 |        5 |        2 |        5 |       11 |        4 |        5 |       5 |        3 |        3 |       10 |       13 |        6 |       14 |       8 |        8 |        7 |       14 |       30 |       21 |       62 |      25 |        4 |        6 |       28 |       27 |       22 |       65 |      43 |        7 |        4 |        6 |        8 |        7 |        5 |       0 |        5 |        8 |       11 |        8 |        7 |        5 |       1 |        1 |        0 |        1 |        3 |        0 |        3 |       0 |        1 |        2 |        1 |        2 |        0 |        2 |       0 |      0 |      0 |     12 |     14 |      2 |      5 |      4 |     57 |      0 |      0 |      1 |     27 |     41 |     15 |     13 |     15 |    250 |      0 |      0 |      0 |     16 |     11 |      1 |      4 |      3 |     47 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4388000 |     169 |     26 |    106 |     3 |    0 |     0 |    2 |    0 |     1 |    0 |     31 |    0 |    0 |    0 |    0 |     81 |     88 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        2 |        2 |        1 |       2 |        1 |        0 |        3 |        4 |        4 |        1 |       2 |        0 |        3 |        4 |       14 |        6 |       19 |       4 |        5 |        1 |        5 |       12 |        5 |       24 |       4 |        5 |        2 |        1 |        3 |        2 |        4 |       0 |        1 |        2 |        3 |        2 |        2 |        4 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      5 |      4 |      3 |      0 |      0 |     14 |      0 |      0 |      0 |      7 |     16 |      4 |      4 |      9 |     66 |      0 |      0 |      0 |      7 |      1 |      1 |      0 |      0 |     22 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      1 |      0 |     37 | s03      | R    |
| 4389000 |     740 |    169 |    420 |     8 |    0 |     3 |    8 |    1 |     4 |    0 |    127 |    0 |    0 |    0 |    0 |    332 |    408 |       8 |       6 |       4 |       1 |     11 |     17 |      3 |      2 |      0 |      2 |      0 |      0 |      2 |      3 |      2 |      0 |      2 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        3 |        8 |        9 |       18 |        2 |       12 |       5 |        2 |       13 |       21 |       33 |       23 |        8 |      12 |       10 |       19 |       23 |       49 |       33 |       50 |      16 |       12 |       12 |       41 |       50 |       32 |       54 |      19 |        4 |       10 |       10 |       17 |       14 |        4 |       1 |       11 |        6 |       17 |       19 |        7 |        6 |       1 |        2 |        5 |        1 |        4 |        3 |        0 |       0 |        2 |        3 |        1 |        3 |        0 |        0 |       0 |      0 |      1 |     13 |     30 |      8 |      5 |      4 |    108 |      0 |      0 |      0 |     52 |     79 |     14 |     14 |     19 |    242 |      0 |      0 |      0 |     11 |     17 |      7 |      2 |      1 |     89 |      0 |      0 |      1 |      3 |      9 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4390000 |     508 |    149 |    278 |     8 |    0 |     1 |    1 |    1 |     1 |    0 |     69 |    0 |    0 |    0 |    0 |    223 |    285 |       3 |      12 |       8 |       1 |      7 |     13 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |        2 |       12 |       13 |       11 |       12 |       3 |        7 |        5 |        9 |       26 |       12 |       22 |       8 |       10 |        8 |       24 |       25 |       20 |       33 |       9 |        7 |       10 |       24 |       23 |       29 |       39 |      17 |        3 |        8 |        6 |        7 |        2 |        1 |       3 |        8 |        7 |        5 |        9 |        4 |        5 |       1 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        3 |       0 |      0 |      0 |     16 |     32 |      6 |      6 |      3 |     86 |      0 |      0 |      0 |     28 |     40 |     16 |     10 |      6 |    178 |      0 |      0 |      1 |      9 |      8 |      1 |      1 |      0 |     49 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 4391000 |     326 |     85 |    182 |     3 |    0 |     4 |    0 |    0 |     0 |    0 |     52 |    0 |    0 |    0 |    0 |    154 |    172 |       1 |       3 |       3 |       0 |      3 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        3 |        4 |        7 |        5 |        5 |       2 |        2 |        5 |        8 |       14 |       12 |       13 |       4 |        5 |        9 |       12 |       16 |       19 |       25 |       9 |        2 |        5 |       15 |       18 |       17 |       19 |      11 |        3 |        3 |        2 |        5 |        9 |        6 |       1 |        4 |        2 |        5 |        3 |        4 |        4 |       1 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |      0 |      1 |     11 |     15 |      4 |      8 |      0 |     46 |      0 |      0 |      1 |     12 |     30 |      4 |      9 |     12 |    114 |      0 |      0 |      0 |     11 |      4 |      1 |      1 |      3 |     32 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 4392000 |     749 |    188 |    378 |    20 |    0 |     5 |    3 |    0 |     7 |    0 |    148 |    0 |    0 |    0 |    0 |    300 |    449 |      14 |      13 |       8 |       2 |     11 |     26 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      0 |        3 |        7 |       10 |       14 |        7 |       13 |       2 |        8 |       16 |       19 |       31 |       21 |       31 |       6 |        8 |       22 |       20 |       41 |       24 |       37 |       1 |        9 |       29 |       42 |       49 |       39 |       53 |       4 |       10 |       13 |       17 |       13 |       14 |        6 |       2 |       11 |        6 |       18 |       13 |       14 |        9 |       2 |        2 |        5 |        2 |        3 |        2 |        2 |       0 |        1 |        4 |        5 |        1 |        3 |        5 |       0 |      0 |      1 |     26 |     31 |     12 |      6 |      2 |    110 |      0 |      0 |      1 |     58 |     54 |     16 |     24 |      8 |    217 |      0 |      0 |      1 |     20 |     19 |      5 |      1 |      1 |    101 |      0 |      0 |      0 |      5 |      7 |      0 |      2 |      0 |     21 |      0 |     37 | s03      | R    |
| 4394000 |     255 |     57 |    154 |     7 |    0 |     1 |    1 |    0 |     4 |    0 |     31 |    0 |    0 |    0 |    0 |    116 |    139 |       4 |       1 |       1 |       0 |      5 |     10 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        5 |        7 |        4 |       0 |        3 |        3 |        3 |       13 |        2 |        5 |       8 |        5 |        7 |        8 |       15 |        7 |       19 |      12 |        5 |        2 |       12 |       13 |       13 |       22 |      14 |        0 |        1 |        6 |        1 |        1 |        6 |       2 |        1 |        2 |        5 |        2 |        1 |        1 |       2 |        2 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        3 |        1 |        1 |        0 |        2 |       0 |      0 |      0 |      5 |     14 |      6 |      1 |      1 |     30 |      0 |      0 |      0 |     14 |     21 |     10 |      6 |      8 |     95 |      0 |      0 |      0 |      6 |      4 |      1 |      1 |      1 |     18 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4395000 |     455 |    109 |    273 |     7 |    0 |     0 |    3 |    1 |     2 |    0 |     60 |    0 |    0 |    0 |    0 |    214 |    241 |       7 |       7 |       2 |       0 |     10 |     16 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        1 |       19 |       10 |        9 |       0 |        3 |        3 |        7 |       29 |       13 |        7 |       5 |        9 |        7 |       17 |       26 |       29 |       33 |      10 |        6 |        6 |       16 |       29 |       20 |       43 |      22 |        6 |        4 |        6 |        6 |        8 |        2 |       0 |        4 |        5 |        5 |        5 |        5 |        4 |       0 |        4 |        3 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        3 |        0 |       0 |      0 |      0 |     17 |     19 |      4 |      3 |      4 |     62 |      0 |      0 |      3 |     33 |     47 |     16 |     10 |     11 |    153 |      0 |      0 |      1 |      6 |     11 |      1 |      4 |      0 |     37 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4396000 |     167 |     41 |     93 |     7 |    0 |     0 |    0 |    1 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     73 |     94 |       2 |       0 |       0 |       1 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        1 |        5 |        3 |        3 |       1 |        1 |        1 |        5 |        3 |        7 |        4 |       4 |        2 |        1 |        5 |        9 |        7 |       13 |       1 |        4 |        6 |        4 |       10 |       13 |       14 |       4 |        1 |        5 |        1 |        2 |        3 |        4 |       0 |        2 |        1 |        2 |        2 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        2 |        1 |       0 |      0 |      0 |      6 |      4 |      0 |      0 |      2 |     29 |      0 |      0 |      1 |      6 |      9 |      3 |      4 |      4 |     66 |      0 |      0 |      0 |      5 |      5 |      2 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4397100 |     242 |     54 |    126 |     6 |    0 |     4 |    3 |    1 |     2 |    0 |     46 |    0 |    0 |    0 |    0 |    111 |    131 |       6 |       3 |       1 |       0 |      5 |      6 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        2 |        6 |        3 |        6 |       0 |        4 |        5 |        2 |        7 |        6 |       11 |       1 |        0 |        4 |        5 |       14 |       18 |       18 |       2 |        2 |        9 |       10 |       11 |       13 |       19 |       1 |        3 |        3 |        4 |        3 |        4 |        6 |       0 |        2 |        6 |        1 |        6 |        4 |        4 |       0 |        0 |        3 |        0 |        3 |        0 |        3 |       0 |        1 |        0 |        1 |        2 |        0 |        3 |       0 |      0 |      0 |      5 |      5 |      6 |      3 |      2 |     33 |      0 |      0 |      3 |     10 |     22 |      5 |      9 |      4 |     73 |      0 |      0 |      0 |      6 |      4 |      4 |      1 |      2 |     29 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4397200 |     587 |    146 |    346 |     8 |    0 |     5 |    1 |    0 |     0 |    0 |     81 |    0 |    0 |    0 |    0 |    259 |    328 |       5 |       3 |       4 |       0 |     33 |     20 |     12 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        4 |        4 |        2 |        7 |       45 |       2 |        3 |        2 |        3 |        5 |        9 |       58 |       2 |        1 |        4 |        6 |        7 |       25 |      102 |       8 |        0 |        5 |        4 |       15 |       35 |      121 |      13 |        3 |        2 |        2 |        2 |        3 |       23 |       1 |        3 |        3 |        3 |        6 |        9 |       19 |       2 |        0 |        0 |        1 |        0 |        1 |        4 |       0 |        0 |        2 |        0 |        0 |        1 |        5 |       0 |      0 |      1 |     21 |     22 |      5 |      7 |      9 |     81 |      0 |      0 |      2 |     45 |     59 |     16 |     16 |     22 |    186 |      0 |      0 |      1 |     14 |     17 |      4 |      1 |      1 |     43 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4397300 |       3 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4397900 |      14 |      2 |      9 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      8 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4398000 |      11 |      3 |      6 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      9 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4398100 |     676 |    121 |    428 |    13 |    0 |     2 |    5 |    1 |     2 |    0 |    104 |    0 |    0 |    0 |    0 |    319 |    357 |      14 |      25 |      12 |       2 |     17 |     21 |     10 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      5 |      6 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |        3 |        2 |        7 |       13 |       15 |       0 |        1 |        5 |        8 |       21 |       25 |       18 |       0 |        7 |        6 |       14 |       37 |       60 |       87 |       3 |       12 |       15 |       25 |       41 |       40 |       77 |       4 |       10 |        5 |        7 |        7 |       14 |        6 |       0 |       12 |        4 |        8 |        7 |       16 |        8 |       0 |        2 |        0 |        1 |        2 |        2 |        6 |       0 |        1 |        1 |        0 |        2 |        5 |        1 |       0 |      0 |      0 |     20 |     12 |      9 |      8 |      6 |     66 |      0 |      0 |      3 |     63 |     69 |     41 |     39 |     28 |    185 |      0 |      0 |      0 |     11 |     11 |      5 |      1 |      2 |     74 |      0 |      0 |      1 |      4 |      4 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4398200 |     110 |     23 |     58 |     2 |    0 |     0 |    1 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     73 |     37 |       2 |       4 |       4 |       1 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |       10 |        2 |        2 |        0 |        0 |       0 |        3 |        1 |        3 |        0 |        0 |        0 |       0 |       15 |       12 |        6 |        4 |        1 |        0 |       0 |        3 |        1 |       10 |        6 |        0 |        0 |       0 |        5 |       10 |        1 |        0 |        0 |        1 |       0 |        2 |        0 |        3 |        3 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      1 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      9 |      7 |      1 |      0 |      0 |     41 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4398300 |     629 |     82 |    443 |     9 |    0 |     0 |    2 |    0 |     2 |    0 |     91 |    0 |    0 |    0 |    0 |    305 |    324 |       4 |       9 |       3 |       0 |     15 |     36 |      5 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        5 |        7 |        8 |       12 |       1 |        2 |        3 |        7 |       10 |       11 |       11 |       2 |        3 |        3 |       18 |       34 |       48 |       95 |      12 |       11 |        6 |       33 |       26 |       54 |       89 |      11 |        4 |        4 |        5 |       10 |        9 |       16 |       3 |        3 |        3 |        9 |       10 |        9 |        6 |       0 |        1 |        1 |        0 |        1 |        2 |        0 |       0 |        2 |        0 |        0 |        1 |        2 |        3 |       0 |      0 |      0 |     14 |     14 |      3 |      2 |      3 |     46 |      0 |      0 |      4 |     60 |     64 |     22 |     20 |     33 |    240 |      0 |      0 |      2 |     13 |     16 |      0 |      1 |      0 |     59 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4398400 |     243 |     51 |    134 |     6 |    0 |     0 |    2 |    0 |     3 |    0 |     47 |    0 |    0 |    0 |    0 |     89 |    154 |       2 |       9 |       6 |       3 |      1 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      2 |      0 |        4 |        3 |        7 |        2 |        0 |        0 |       0 |        3 |       11 |       18 |        3 |        0 |        0 |       0 |        8 |        8 |       30 |        2 |        0 |        0 |       0 |        9 |       27 |       48 |        2 |        0 |        0 |       0 |        3 |        6 |       10 |        1 |        0 |        0 |       0 |        1 |        8 |       14 |        4 |        0 |        0 |       0 |        3 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        4 |        1 |        0 |        0 |       0 |      0 |      0 |     13 |      2 |      0 |      0 |      0 |     36 |      0 |      0 |      2 |     29 |      8 |      0 |      0 |      0 |     95 |      0 |      0 |      0 |      7 |      4 |      0 |      0 |      0 |     36 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4416000 |     256 |     98 |     77 |    14 |    0 |     1 |    5 |    1 |     3 |    0 |     57 |    0 |    0 |    0 |    0 |    123 |    133 |      21 |       9 |       9 |       1 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      2 |      2 |        4 |        3 |        2 |       15 |       11 |        7 |       0 |        2 |       10 |        8 |       15 |        5 |        9 |       7 |        5 |        4 |        6 |        7 |        6 |        7 |       0 |        5 |        3 |        8 |       12 |        2 |       11 |       1 |        5 |        6 |        6 |        7 |        2 |        4 |       0 |        5 |        5 |        8 |        4 |        2 |        1 |       2 |        2 |        5 |        1 |        5 |        1 |        2 |       0 |        3 |        2 |        1 |        0 |        1 |        1 |       0 |      0 |      0 |      7 |     18 |      3 |      4 |      2 |     64 |      0 |      0 |      0 |     10 |      8 |      1 |      6 |      3 |     49 |      0 |      0 |      0 |      9 |      4 |      1 |      1 |      0 |     42 |      0 |      0 |      1 |      3 |      3 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4416100 |     489 |    143 |    189 |    19 |    0 |     2 |    5 |    6 |     8 |    0 |    117 |    0 |    0 |    0 |    0 |    245 |    244 |      31 |      26 |      22 |       7 |     10 |      8 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      5 |      1 |      0 |        6 |        9 |       14 |       12 |       12 |        7 |       2 |        6 |       15 |       13 |       17 |       20 |        9 |       1 |       13 |       25 |       24 |       15 |       17 |       12 |       2 |        6 |       17 |       14 |       16 |       11 |       11 |       6 |        4 |       21 |        7 |       16 |        8 |        2 |       0 |       12 |       19 |        8 |       10 |        6 |        4 |       0 |        2 |        8 |        1 |        3 |        2 |        1 |       0 |        6 |        6 |        0 |        3 |        6 |        2 |       0 |      0 |      3 |     17 |     13 |      5 |      2 |      1 |    102 |      0 |      0 |      2 |     22 |     12 |      3 |      3 |      2 |    145 |      0 |      0 |      1 |     15 |      8 |      2 |      1 |      2 |     88 |      0 |      0 |      0 |      6 |      4 |      3 |      1 |      1 |     25 |      0 |     37 | s03      | R    |
| 4416200 |     217 |     70 |     76 |     5 |    0 |     3 |    2 |    1 |     3 |    0 |     57 |    0 |    0 |    0 |    0 |    102 |    115 |      19 |      11 |      11 |       3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        1 |        5 |        7 |        8 |        5 |       0 |        4 |       11 |        7 |        8 |        6 |        3 |       2 |        1 |       14 |        6 |        8 |        6 |        5 |       1 |        2 |        8 |        4 |        9 |        7 |        4 |       1 |        4 |        9 |        4 |        5 |        2 |        2 |       0 |        6 |        9 |        3 |        6 |        4 |        3 |       0 |        0 |        0 |        1 |        4 |        1 |        0 |       0 |        2 |        4 |        1 |        0 |        1 |        0 |       0 |      0 |      3 |      9 |      9 |      1 |      0 |      1 |     47 |      0 |      0 |      1 |     12 |      7 |      2 |      0 |      0 |     54 |      0 |      0 |      3 |     10 |      1 |      3 |      0 |      0 |     40 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4417000 |     490 |    163 |    194 |    11 |    0 |     9 |    1 |    6 |     7 |    0 |     99 |    0 |    0 |    0 |    0 |    253 |    237 |      47 |      23 |      12 |      10 |      6 |     13 |      1 |      2 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      3 |      1 |      0 |        8 |        6 |       13 |       17 |       14 |       11 |      10 |        6 |        5 |       15 |       14 |       19 |        8 |      17 |        8 |       10 |       22 |       28 |       19 |       13 |       8 |        7 |       15 |       16 |       16 |        8 |       17 |       7 |        3 |        7 |       10 |        9 |        9 |        4 |       2 |        7 |        8 |       12 |       17 |        7 |        1 |       3 |        3 |        5 |        6 |        5 |        3 |        0 |       0 |        4 |        1 |        2 |        2 |        2 |        1 |       0 |      0 |      2 |     21 |     26 |      6 |      6 |      3 |     99 |      0 |      0 |      0 |     24 |     34 |      7 |      6 |     11 |    112 |      0 |      0 |      1 |     11 |      8 |      2 |      2 |      0 |     75 |      0 |      0 |      0 |      2 |      9 |      0 |      0 |      1 |     22 |      0 |     37 | s03      | R    |
| 4418000 |     552 |    214 |    177 |    16 |    0 |    10 |    6 |    4 |     6 |    0 |    119 |    0 |    0 |    0 |    0 |    245 |    307 |      74 |      38 |      37 |       8 |     14 |      6 |      4 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        4 |       18 |       19 |       22 |        9 |        9 |       4 |       24 |       26 |       22 |       31 |       14 |        7 |       5 |        4 |       15 |       16 |       25 |       16 |       11 |       1 |       15 |       18 |       16 |       19 |       13 |        7 |       1 |        7 |       15 |       10 |        6 |        2 |        7 |       1 |       20 |       22 |        9 |        7 |        8 |        4 |       1 |        2 |       10 |        7 |        3 |        1 |        0 |       1 |        1 |        4 |        7 |        5 |        0 |        1 |       0 |      0 |      1 |     36 |     29 |      8 |      4 |      6 |    130 |      0 |      0 |      4 |     18 |     22 |      8 |      5 |      0 |    120 |      0 |      0 |      0 |     10 |     11 |      7 |      2 |      0 |     89 |      0 |      0 |      0 |      9 |      6 |      1 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 4419000 |     728 |    293 |    215 |    34 |    0 |    10 |    9 |    9 |     5 |    0 |    153 |    0 |    0 |    0 |    0 |    335 |    393 |     150 |      58 |      43 |      18 |      8 |      3 |      9 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      4 |      7 |      5 |      2 |       15 |       29 |       20 |       31 |       15 |       16 |       4 |       17 |       32 |       43 |       28 |       17 |       21 |       5 |       11 |       24 |       26 |       17 |       13 |        9 |       1 |       13 |       23 |       29 |       18 |       15 |       15 |       1 |       10 |       14 |       15 |       23 |        7 |        7 |       0 |       19 |       12 |       18 |       17 |        8 |        2 |       1 |        4 |       12 |        5 |        4 |        2 |        1 |       0 |        3 |       16 |        9 |        5 |        3 |        3 |       0 |      0 |      3 |     49 |     44 |      5 |      6 |      3 |    183 |      0 |      0 |      1 |     34 |     28 |      6 |      4 |      5 |    137 |      0 |      0 |      1 |     19 |     12 |      2 |      1 |      1 |    117 |      0 |      0 |      0 |      8 |     11 |      3 |      0 |      0 |     45 |      0 |     37 | s03      | R    |
| 4420000 |     723 |    298 |    230 |    25 |    0 |     9 |   16 |    9 |     3 |    0 |    133 |    0 |    0 |    0 |    0 |    346 |    377 |     167 |      83 |      50 |      21 |      6 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      4 |      0 |       13 |       25 |       21 |       32 |       15 |       18 |       5 |       16 |       42 |       42 |       26 |       14 |       22 |       7 |        9 |       37 |       18 |       30 |        8 |       11 |       1 |       16 |       29 |       21 |       22 |       12 |       15 |       1 |       16 |       17 |       14 |       13 |        4 |        5 |       0 |       16 |       20 |       10 |       11 |        4 |        3 |       0 |        5 |       13 |        9 |        6 |        1 |        0 |       0 |       11 |        4 |        5 |        6 |        2 |        0 |       0 |      0 |      1 |     58 |     43 |     15 |      5 |      1 |    175 |      0 |      0 |      6 |     46 |     23 |      9 |      2 |      9 |    135 |      0 |      0 |      1 |     17 |     11 |      5 |      0 |      3 |     96 |      0 |      0 |      0 |      3 |     11 |      1 |      0 |      0 |     47 |      0 |     37 | s03      | R    |
| 4420100 |     133 |     47 |     48 |     1 |    0 |     4 |    0 |    0 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |     62 |     71 |      16 |      12 |      15 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      0 |        3 |        3 |        8 |        2 |        2 |        3 |       0 |        4 |        8 |        6 |        3 |        3 |        2 |       0 |        4 |        4 |        7 |        3 |        3 |        1 |       1 |        3 |        8 |        7 |        3 |        2 |        2 |       0 |        3 |        5 |        4 |        3 |        0 |        1 |       0 |        6 |        6 |        3 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      8 |      7 |      1 |      0 |      1 |     30 |      0 |      0 |      3 |     11 |      4 |      1 |      1 |      1 |     27 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4421000 |     490 |    209 |    164 |    13 |    0 |     5 |    6 |    5 |     0 |    0 |     88 |    0 |    0 |    0 |    0 |    241 |    249 |      77 |      29 |      16 |       3 |      6 |      4 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      5 |      2 |      1 |       10 |       21 |       22 |       16 |       10 |       14 |       6 |       10 |       20 |       18 |       28 |       10 |       16 |       8 |        6 |       20 |       21 |       19 |       10 |       10 |       2 |        7 |       13 |       24 |        8 |        8 |        9 |       7 |        8 |        8 |        3 |       17 |        0 |        1 |       1 |        9 |       11 |       12 |       10 |        4 |        4 |       0 |        3 |        3 |        2 |        4 |        2 |        2 |       0 |        3 |        2 |        3 |        4 |        0 |        1 |       0 |      0 |      2 |     28 |     23 |     11 |      3 |      3 |    139 |      0 |      0 |      2 |     31 |     12 |      8 |      2 |      6 |    103 |      0 |      0 |      1 |     11 |     11 |      3 |      0 |      2 |     60 |      0 |      0 |      0 |      3 |      8 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4421100 |     123 |     48 |     44 |     8 |    0 |     1 |    3 |    0 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     74 |     49 |      26 |      13 |       1 |       1 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        6 |        7 |        7 |        1 |        4 |       0 |        2 |        7 |        4 |        0 |        4 |        2 |       3 |        5 |        7 |        5 |        5 |        2 |        2 |       3 |        0 |        8 |        4 |        1 |        1 |        1 |       0 |        4 |        4 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        3 |        4 |        0 |        0 |       0 |        0 |        5 |        2 |        3 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     13 |      4 |      3 |      1 |      1 |     26 |      0 |      0 |      0 |      7 |      7 |      4 |      0 |      1 |     25 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4422000 |     328 |    123 |    120 |     4 |    0 |     4 |    3 |    3 |     9 |    0 |     62 |    0 |    0 |    0 |    0 |    146 |    182 |      29 |      21 |      10 |       5 |      3 |      4 |      6 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      2 |      0 |      1 |      0 |        2 |        7 |        6 |       12 |        5 |       10 |       4 |        8 |       10 |       13 |       17 |        9 |        9 |      11 |        5 |        8 |       11 |       16 |        6 |       10 |       4 |        8 |       10 |       12 |       11 |        6 |        8 |       5 |        6 |        9 |        8 |        6 |        2 |        2 |       0 |        7 |        4 |        5 |        8 |        2 |        1 |       2 |        1 |        3 |        1 |        0 |        1 |        1 |       0 |        2 |        9 |        2 |        1 |        1 |        1 |       0 |      0 |      1 |     14 |     15 |      4 |      2 |      6 |     81 |      0 |      0 |      0 |     12 |     11 |      5 |      6 |     12 |     74 |      0 |      0 |      1 |      7 |      6 |      3 |      2 |      0 |     43 |      0 |      0 |      0 |      5 |      6 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4422100 |     302 |    116 |    123 |     7 |    0 |     3 |    0 |    1 |     0 |    0 |     52 |    0 |    0 |    0 |    0 |    137 |    165 |      49 |      23 |      14 |       2 |      7 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      7 |      2 |      1 |        5 |        3 |       11 |       11 |        6 |        6 |       4 |        1 |       10 |        2 |       12 |        7 |       34 |       4 |        4 |       10 |       13 |       18 |        6 |        8 |       1 |       11 |        5 |       12 |        9 |        7 |       18 |       1 |        3 |        3 |        6 |        5 |        4 |        5 |       0 |        3 |        4 |        6 |        3 |        5 |        5 |       0 |        0 |        1 |        2 |        0 |        1 |        1 |       0 |        1 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |     25 |     15 |      6 |      2 |      3 |     65 |      0 |      0 |      2 |     20 |     20 |      4 |      7 |      5 |     65 |      0 |      0 |      0 |      7 |      9 |      6 |      1 |      0 |     29 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4423000 |     547 |    196 |    194 |    22 |    0 |     7 |    7 |    2 |     5 |    0 |    114 |    0 |    0 |    0 |    0 |    272 |    275 |      34 |      10 |      15 |       2 |      5 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      3 |      0 |      1 |        7 |        7 |        9 |       25 |        9 |       16 |      11 |       10 |       16 |       14 |       32 |       17 |       18 |       5 |        5 |       16 |       18 |       32 |       13 |       13 |       4 |       16 |        8 |       14 |       26 |       12 |       13 |       4 |       12 |       18 |        5 |       14 |        7 |        4 |       0 |       11 |       10 |       13 |       11 |        3 |        6 |       0 |        2 |        7 |        5 |        8 |        3 |        1 |       1 |        4 |        3 |        1 |        4 |        1 |        3 |       0 |      0 |      1 |     20 |     35 |     15 |      1 |      4 |    120 |      0 |      0 |      1 |     25 |     23 |      7 |      5 |      7 |    126 |      0 |      0 |      0 |     10 |      9 |      6 |      2 |      1 |     86 |      0 |      0 |      3 |      5 |     11 |      2 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4424000 |     345 |    118 |    141 |     8 |    0 |     2 |    5 |    0 |    10 |    0 |     61 |    0 |    0 |    0 |    0 |    168 |    177 |      12 |       5 |       4 |       3 |      8 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        5 |        3 |       11 |       16 |       14 |       0 |        4 |        5 |        7 |       16 |       16 |       14 |       1 |        2 |        9 |        8 |       12 |       18 |       17 |       2 |        5 |        7 |       13 |       12 |       15 |       18 |       3 |        5 |        8 |        2 |        3 |        9 |        5 |       0 |        3 |        6 |        6 |        2 |        7 |        5 |       0 |        0 |        1 |        3 |        3 |        4 |        2 |       0 |        6 |        1 |        0 |        4 |        0 |        1 |       0 |      0 |      0 |     17 |     10 |      3 |      2 |      4 |     82 |      0 |      0 |      2 |     23 |     18 |      5 |      7 |      3 |     83 |      0 |      0 |      1 |      8 |      2 |      3 |      2 |      1 |     44 |      0 |      0 |      0 |      3 |      1 |      2 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 4424100 |     316 |    104 |    106 |    15 |    0 |     1 |    2 |    0 |     5 |    0 |     83 |    0 |    0 |    0 |    0 |    146 |    170 |      38 |      25 |      18 |       2 |      5 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      2 |      1 |      0 |        5 |       10 |        8 |       12 |        6 |        1 |       0 |        8 |        9 |       18 |       11 |        8 |        7 |       1 |        7 |       13 |       12 |        6 |        5 |        4 |       0 |        5 |       16 |       16 |        8 |        5 |        7 |       2 |        9 |       11 |       11 |        6 |        5 |        1 |       0 |        5 |       16 |        7 |        7 |        4 |        1 |       0 |        4 |        1 |        7 |        2 |        0 |        0 |       0 |        5 |        2 |        1 |        0 |        0 |        1 |       0 |      0 |      3 |     16 |      8 |      0 |      1 |      1 |     75 |      0 |      0 |      3 |     13 |      4 |      0 |      1 |      1 |     84 |      0 |      0 |      2 |     12 |      2 |      0 |      1 |      0 |     66 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 4425000 |     273 |     87 |    119 |     9 |    0 |     3 |    2 |    4 |     1 |    0 |     48 |    0 |    0 |    0 |    0 |    139 |    134 |      13 |       9 |       5 |       2 |      3 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      6 |      2 |      2 |      3 |        3 |        7 |        6 |        7 |        9 |       13 |       2 |        5 |        1 |        4 |       12 |        7 |       10 |       1 |        4 |        4 |       13 |       11 |        9 |       17 |       2 |        2 |        5 |       13 |       10 |       11 |       16 |       2 |        1 |        3 |        2 |       10 |        4 |        3 |       1 |        5 |        2 |        2 |        7 |        5 |        2 |       1 |        1 |        3 |        3 |        1 |        0 |        0 |       0 |        4 |        3 |        4 |        0 |        0 |        0 |       0 |      0 |      1 |      4 |      8 |      8 |      4 |      8 |     54 |      0 |      0 |      0 |     19 |      9 |      5 |      8 |      7 |     71 |      0 |      0 |      0 |      5 |      9 |      0 |      3 |      2 |     29 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4425100 |     299 |    125 |    115 |     7 |    0 |     5 |    3 |    3 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |    147 |    152 |      24 |      11 |       5 |       3 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      2 |      3 |      0 |        3 |        5 |       10 |        8 |        6 |       13 |      13 |        4 |        6 |       13 |        9 |       10 |       14 |      11 |        5 |        5 |       13 |       11 |        6 |       10 |       4 |        2 |        2 |       16 |       14 |        8 |       12 |       7 |        3 |        2 |        5 |        4 |        5 |        6 |       0 |        1 |        2 |        5 |        5 |        0 |        3 |       0 |        2 |        0 |        3 |        4 |        0 |        1 |       0 |        2 |        0 |        2 |        0 |        2 |        2 |       0 |      0 |      0 |      5 |     15 |     14 |      4 |      1 |     86 |      0 |      0 |      1 |     20 |     17 |      3 |      8 |      2 |     64 |      0 |      0 |      0 |      9 |      5 |      2 |      1 |      1 |     23 |      0 |      0 |      0 |      2 |      7 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4425200 |     255 |    100 |    101 |     8 |    0 |     2 |    6 |    0 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |    117 |    138 |      26 |      16 |       7 |       2 |      3 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        7 |        7 |        5 |        4 |        5 |      10 |        3 |       10 |       13 |       11 |        8 |        7 |       9 |        1 |        7 |       10 |       15 |        7 |        3 |       7 |        1 |       10 |       11 |        7 |        9 |        6 |       7 |        5 |        3 |        4 |        4 |        3 |        0 |       0 |        2 |        5 |        2 |        5 |        3 |        0 |       2 |        1 |        1 |        2 |        3 |        2 |        0 |       0 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |     15 |     18 |      1 |      3 |      3 |     60 |      0 |      0 |      1 |     10 |     16 |      6 |      3 |      5 |     60 |      0 |      0 |      2 |      6 |      4 |      1 |      0 |      1 |     24 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4426000 |     234 |     74 |     94 |     7 |    0 |     5 |    1 |    0 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |    117 |    117 |      24 |      31 |      16 |       3 |      5 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      1 |      0 |      0 |        2 |        6 |        7 |        5 |        5 |        3 |       3 |        3 |        8 |        6 |        8 |        8 |        8 |       2 |        6 |        9 |       11 |       11 |        3 |        8 |       2 |        9 |       11 |        9 |        7 |        4 |        2 |       2 |        7 |        6 |        7 |        6 |        1 |        3 |       0 |        6 |        4 |        5 |        2 |        4 |        0 |       0 |        1 |        0 |        2 |        1 |        1 |        1 |       0 |        4 |        1 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |      8 |     11 |      2 |      1 |      2 |     50 |      0 |      0 |      1 |     13 |     13 |      0 |      3 |      4 |     60 |      0 |      0 |      1 |      7 |      4 |      0 |      0 |      0 |     39 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4426100 |     262 |    102 |     77 |    12 |    0 |    11 |    0 |    2 |     1 |    0 |     57 |    0 |    0 |    0 |    0 |    127 |    135 |      53 |      27 |      26 |      12 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      1 |      3 |      0 |        7 |        3 |       18 |        5 |        9 |        5 |       2 |        6 |       11 |        7 |       12 |        5 |       10 |       2 |        1 |        6 |        7 |       10 |        6 |        7 |       0 |        1 |       11 |       12 |        6 |        5 |        4 |       1 |        8 |        4 |        6 |        7 |        1 |        1 |       0 |        6 |        9 |        7 |        6 |        2 |        0 |       0 |        5 |        2 |        3 |        3 |        0 |        1 |       0 |        3 |        3 |        3 |        2 |        0 |        0 |       1 |      0 |      1 |     18 |     24 |      4 |      3 |      0 |     52 |      0 |      0 |      1 |     19 |      9 |      2 |      5 |      5 |     36 |      0 |      0 |      1 |      3 |      4 |      2 |      0 |      0 |     47 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4427000 |     775 |    324 |    253 |    15 |    0 |     9 |    8 |    9 |     5 |    0 |    152 |    0 |    0 |    0 |    0 |    352 |    423 |     166 |      85 |      60 |      15 |      5 |      7 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |      9 |      1 |      0 |       11 |       25 |       32 |       28 |       14 |       27 |       6 |       30 |       41 |       32 |       33 |       17 |       23 |       5 |       12 |       26 |       30 |       25 |       14 |       11 |       3 |       23 |       25 |       28 |       29 |        8 |       14 |       5 |       11 |       11 |       15 |       14 |        6 |        6 |       0 |       23 |       20 |       17 |       18 |        6 |        5 |       0 |        5 |        7 |        5 |        2 |        3 |        3 |       0 |        6 |        6 |        5 |        2 |        1 |        1 |       0 |      0 |      3 |     59 |     30 |      3 |      1 |      5 |    223 |      0 |      0 |      2 |     44 |     10 |      6 |      1 |      4 |    186 |      0 |      0 |      0 |     13 |      9 |      1 |      1 |      1 |    127 |      0 |      0 |      0 |      4 |     14 |      0 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 4427100 |     233 |     85 |     54 |    10 |    0 |     7 |    4 |    1 |     3 |    0 |     69 |    0 |    0 |    0 |    0 |    100 |    133 |      29 |      18 |      21 |       9 |      2 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |       31 |        6 |        0 |        0 |        0 |        0 |       0 |       44 |        3 |        0 |        0 |        1 |        0 |       0 |       23 |        3 |        0 |        0 |        0 |        0 |       0 |       26 |        2 |        0 |        0 |        0 |        0 |       0 |       17 |        9 |        0 |        0 |        0 |        1 |       0 |       29 |       12 |        0 |        0 |        0 |        0 |       1 |       10 |        0 |        0 |        0 |        0 |        0 |       0 |       13 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     10 |      0 |      1 |      0 |      0 |     73 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |     50 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |     60 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4428000 |     364 |    127 |    149 |     7 |    0 |     4 |    5 |    3 |     4 |    0 |     65 |    0 |    0 |    0 |    0 |    168 |    196 |      44 |      35 |      23 |       6 |      2 |      7 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |     11 |      4 |      0 |        3 |       11 |        8 |        9 |        5 |        8 |       4 |       17 |       10 |       14 |       16 |        6 |       10 |       6 |        3 |       10 |       13 |       32 |        5 |       11 |       1 |        7 |       10 |       16 |       20 |        6 |       10 |       5 |        3 |        8 |        5 |       10 |        3 |        2 |       0 |        8 |        7 |        5 |        6 |        4 |        4 |       0 |        1 |        3 |        4 |        5 |        0 |        1 |       0 |        0 |        4 |        1 |        3 |        0 |        1 |       0 |      0 |      0 |     12 |     13 |      7 |      0 |      2 |     93 |      0 |      0 |      1 |     17 |     31 |      8 |      1 |      8 |     83 |      0 |      0 |      2 |      5 |      7 |      6 |      1 |      1 |     43 |      0 |      0 |      3 |      5 |      2 |      1 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 4429000 |     589 |    187 |    288 |    11 |    0 |     5 |    2 |    5 |     3 |    0 |     88 |    0 |    0 |    0 |    0 |    282 |    307 |      29 |      31 |      16 |       4 |     12 |     12 |      3 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      5 |     10 |      3 |      1 |        7 |        9 |        9 |       11 |       10 |       19 |      11 |       10 |        9 |       16 |       31 |        7 |       25 |      13 |       13 |       13 |       38 |       34 |       12 |       22 |      14 |        6 |       19 |       23 |       24 |       24 |       25 |      21 |        6 |        5 |       11 |       11 |        5 |        4 |       3 |        8 |        3 |       10 |       11 |        5 |        4 |       2 |        1 |        4 |        3 |        3 |        2 |        1 |       1 |        2 |        4 |        4 |        1 |        0 |        0 |       0 |      0 |      2 |     27 |     26 |      3 |      2 |      7 |    120 |      0 |      0 |      2 |     32 |     43 |     12 |     15 |     13 |    171 |      0 |      0 |      0 |     11 |      8 |      2 |      1 |      2 |     64 |      0 |      0 |      0 |      4 |      8 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4431000 |       5 |      2 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      3 |       2 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4433000 |      35 |      9 |     19 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     16 |     19 |       0 |       0 |       0 |       0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        5 |       0 |        0 |        0 |        0 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        3 |        5 |       0 |        1 |        0 |        0 |        0 |        1 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |     37 | s03      | R    |
| 4433100 |     291 |     74 |    178 |     7 |    0 |     4 |    0 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |    122 |    169 |       5 |       0 |       0 |       0 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        3 |       27 |       1 |        0 |        1 |        1 |        1 |       10 |       30 |       0 |        1 |        0 |        0 |        1 |        5 |       65 |       0 |        0 |        1 |        0 |        1 |       12 |       87 |       5 |        0 |        1 |        0 |        0 |        4 |        8 |       0 |        0 |        1 |        0 |        2 |        2 |       10 |       0 |        0 |        0 |        0 |        0 |        0 |        6 |       0 |        0 |        0 |        1 |        0 |        0 |        4 |       0 |      0 |      0 |     13 |     13 |      3 |      0 |      5 |     40 |      0 |      0 |      2 |     29 |     31 |      7 |     10 |     14 |     85 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      3 |     19 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4433200 |     474 |    110 |    239 |    15 |    0 |     3 |    5 |    0 |     4 |    0 |     98 |    0 |    0 |    0 |    0 |    229 |    245 |      27 |      29 |      13 |       0 |      1 |     11 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       1 |       4 |       0 |      0 |      5 |      1 |      0 |        2 |        8 |       18 |       10 |        4 |        5 |       0 |        3 |       14 |       18 |       13 |       11 |        3 |       1 |        7 |       32 |       49 |       19 |       11 |        5 |       0 |        6 |       35 |       46 |       15 |        9 |        5 |       0 |        1 |       16 |       16 |       10 |        3 |        0 |       0 |        6 |       20 |       18 |        4 |        2 |        2 |       0 |        2 |        3 |        3 |        3 |        2 |        0 |       0 |        1 |        3 |        6 |        4 |        0 |        0 |       0 |      0 |      4 |     15 |      8 |      4 |      2 |      0 |     77 |      0 |      0 |      2 |     22 |     15 |      6 |      1 |      0 |    193 |      0 |      0 |      0 |      8 |      2 |      3 |      0 |      0 |     85 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4433400 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4433500 |     152 |     33 |     86 |     5 |    0 |     1 |    0 |    1 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     71 |     81 |       8 |       8 |       5 |       2 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        5 |        5 |        2 |        1 |       0 |        2 |        1 |        4 |        8 |        1 |        2 |       0 |        1 |        6 |       17 |        8 |        6 |        2 |       0 |        5 |       12 |       15 |        7 |        6 |        0 |       1 |        1 |        4 |        2 |        6 |        1 |        0 |       0 |        4 |        3 |        2 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      2 |     10 |      0 |      4 |      1 |      0 |     16 |      0 |      0 |      2 |     21 |      9 |      4 |      0 |      0 |     50 |      0 |      0 |      1 |      8 |      3 |      1 |      3 |      0 |      9 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
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| 4471800 |      23 |      6 |     13 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     11 |     12 |       1 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        2 |        1 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        3 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      1 |      2 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4471900 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4472000 |      34 |      5 |     25 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     19 |     15 |       1 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        3 |        8 |       0 |        0 |        0 |        1 |        2 |        2 |        8 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      3 |     10 |      0 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4472100 |      93 |      7 |     80 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     46 |     47 |       0 |       0 |       0 |       0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        2 |        3 |       0 |        0 |        0 |        3 |        0 |        4 |       32 |       1 |        0 |        0 |        0 |        2 |       10 |       28 |       0 |        0 |        0 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      9 |     13 |      8 |      4 |      6 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4472800 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4472900 |      72 |      2 |     66 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     30 |     42 |       1 |       0 |       0 |       0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        5 |       25 |       0 |        0 |        1 |        0 |        2 |        6 |       27 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      6 |      8 |      3 |     10 |      2 |     36 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4473200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4473400 |      24 |      7 |      9 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |      8 |     16 |       4 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        3 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4473500 |     243 |    118 |     71 |     9 |    0 |     4 |    0 |    4 |     0 |    0 |     37 |    0 |    0 |    0 |    0 |    108 |    135 |      55 |      26 |      12 |       6 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      1 |      0 |        3 |        6 |        7 |        4 |       14 |       11 |       2 |        5 |       12 |       10 |       19 |       11 |       11 |       3 |        4 |        2 |        7 |        6 |        6 |        4 |       0 |        6 |        6 |        9 |        7 |        3 |        6 |       5 |        6 |        3 |        4 |        3 |        2 |        3 |       0 |        2 |        4 |        4 |        4 |        1 |        0 |       1 |        1 |        4 |        3 |        2 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        2 |        0 |       0 |      0 |      2 |     22 |     23 |      3 |      5 |      3 |     60 |      0 |      0 |      1 |      8 |      7 |      5 |      2 |      4 |     44 |      0 |      0 |      2 |     10 |      4 |      2 |      0 |      1 |     18 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
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| 4480100 |      27 |     12 |     10 |     2 |    0 |     0 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     13 |     14 |       4 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        2 |        3 |       1 |        1 |        0 |        1 |        1 |        0 |        3 |       0 |        1 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
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| 4480400 |     805 |    139 |    524 |    17 |    0 |     2 |    4 |    0 |     0 |    0 |    119 |    0 |    0 |    0 |    0 |    386 |    419 |      10 |      26 |       3 |       2 |      7 |     18 |      6 |      3 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |       0 |       3 |       0 |       0 |      4 |      7 |      3 |      0 |        1 |        2 |        5 |       18 |       11 |       17 |       1 |        3 |        3 |        9 |       35 |       18 |       14 |       2 |       27 |       15 |       53 |       78 |       55 |       40 |       2 |       24 |       19 |       64 |       77 |       34 |       33 |       3 |       12 |        7 |        9 |       14 |        5 |        2 |       1 |       14 |        7 |       17 |       18 |        8 |        5 |       0 |        1 |        1 |        1 |        4 |        2 |        1 |       1 |        3 |        3 |        1 |        3 |        1 |        1 |       0 |      0 |      2 |     16 |     19 |      7 |     10 |      9 |     76 |      0 |      0 |      9 |     55 |     96 |     20 |     10 |     27 |    307 |      0 |      0 |      1 |     17 |     10 |      6 |      2 |      5 |     78 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      2 |     14 |      0 |     37 | s03      | R    |
| 4480600 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4481000 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4481100 |      32 |     12 |     17 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |     13 |     19 |       7 |       2 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        0 |        1 |        0 |        0 |       0 |        2 |        1 |        0 |        2 |        1 |        2 |       0 |        0 |        1 |        3 |        1 |        1 |        2 |       0 |        1 |        2 |        1 |        3 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4481500 |      64 |      9 |     39 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     32 |     32 |       3 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        2 |        0 |        0 |       1 |        1 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        3 |        1 |        3 |       10 |       1 |        0 |        0 |        4 |        6 |        2 |        8 |       1 |        0 |        1 |        1 |        2 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        3 |        2 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      2 |     11 |      1 |      2 |      2 |     21 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4481600 |     109 |     31 |     57 |     1 |    0 |     1 |    2 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     55 |     54 |       2 |       2 |       2 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        3 |        7 |        1 |        1 |       3 |        0 |        1 |        3 |        5 |        0 |        5 |       1 |        1 |        1 |        4 |        6 |        6 |        6 |       2 |        1 |        2 |        5 |        6 |        5 |        9 |       3 |        4 |        1 |        4 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        3 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      2 |      2 |      1 |      1 |     20 |      0 |      0 |      0 |      5 |      7 |      3 |      3 |      1 |     38 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4481800 |      17 |      3 |     13 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      6 |     11 |       0 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        2 |        2 |        2 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      4 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4481900 |      57 |      8 |     37 |     1 |    0 |     0 |    0 |    0 |     3 |    0 |      8 |    0 |    0 |    0 |    0 |     25 |     32 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       1 |        2 |        0 |        1 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        4 |        4 |        6 |       0 |        1 |        3 |        3 |        5 |        2 |        8 |       0 |        0 |        0 |        0 |        1 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        2 |        0 |       1 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      4 |      5 |      3 |      2 |      3 |     20 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4482200 |       4 |      4 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4482300 |      69 |     12 |     33 |     4 |    0 |     0 |    2 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     31 |     38 |       1 |       2 |       0 |       4 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        3 |        0 |       0 |        1 |        0 |        0 |        3 |        2 |        0 |       1 |        1 |        2 |        3 |        5 |        2 |        3 |       0 |        2 |        2 |        4 |        2 |        5 |        2 |       0 |        1 |        0 |        1 |        5 |        2 |        0 |       0 |        1 |        1 |        1 |        6 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        4 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      1 |      1 |      7 |      0 |      0 |      0 |      7 |      7 |      0 |      3 |      3 |     13 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4482400 |       9 |      2 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4482500 |     562 |    134 |    330 |    12 |    0 |     2 |    4 |    2 |     1 |    0 |     77 |    0 |    0 |    0 |    0 |    252 |    310 |      21 |      16 |       6 |       3 |      7 |      8 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |        3 |        5 |       12 |       11 |       22 |       0 |        6 |        4 |        8 |       24 |       18 |       15 |       3 |        9 |       10 |       37 |       42 |       20 |       31 |       2 |       16 |       13 |       46 |       35 |       35 |       26 |       8 |        3 |        2 |        6 |       12 |        5 |        7 |       0 |        8 |        5 |       10 |       10 |        8 |        1 |       0 |        2 |        1 |        1 |        3 |        2 |        1 |       0 |        1 |        2 |        2 |        4 |        2 |        0 |       0 |      0 |      0 |     21 |     24 |      7 |      9 |     20 |     53 |      0 |      0 |      5 |     44 |     60 |     26 |     10 |     15 |    170 |      0 |      0 |      1 |     16 |     10 |      4 |      1 |      5 |     40 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      2 |     12 |      0 |     37 | s03      | R    |
| 4482600 |      68 |     11 |     50 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     37 |     31 |       2 |       1 |       0 |       0 |      0 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        2 |        0 |        2 |        2 |        2 |       1 |        5 |        4 |        6 |        5 |        4 |        6 |       0 |        1 |        3 |        5 |        4 |        3 |        4 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      4 |     10 |      0 |      2 |      5 |     29 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4482700 |      30 |      6 |     20 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     18 |     12 |       2 |       0 |       0 |       0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        1 |        0 |        2 |        4 |        1 |        5 |       0 |        1 |        1 |        0 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      3 |      0 |      2 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4482800 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4482900 |      29 |      9 |     16 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     13 |     16 |       0 |       1 |       2 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        2 |        2 |        2 |       0 |        2 |        0 |        1 |        1 |        0 |        4 |       0 |        0 |        0 |        0 |        2 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4483000 |      34 |      5 |     26 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     18 |     16 |       1 |       1 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        2 |        0 |        3 |        2 |        5 |        1 |       1 |        0 |        0 |        1 |        2 |        6 |        2 |       1 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      4 |      5 |      2 |      3 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4483100 |      10 |      5 |      3 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      5 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4483200 |      25 |      5 |     17 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     10 |     15 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        2 |        1 |        0 |       0 |        1 |        0 |        0 |        2 |        1 |        4 |       0 |        0 |        1 |        3 |        0 |        2 |        3 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4483300 |      69 |     20 |     28 |     2 |    0 |     5 |    0 |    0 |     1 |    0 |     13 |    0 |    0 |    0 |    0 |     39 |     30 |       1 |       0 |       1 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        1 |        4 |        3 |        1 |       0 |        0 |        0 |        3 |        5 |        2 |        1 |       0 |        1 |        2 |        1 |        3 |        2 |        4 |       1 |        2 |        0 |        5 |        1 |        3 |        3 |       0 |        1 |        0 |        3 |        4 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      7 |      4 |      1 |      0 |      5 |      0 |      0 |      0 |     10 |      7 |      0 |      1 |      2 |      8 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4483400 |      59 |      9 |     41 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     29 |     30 |       2 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        2 |        0 |        1 |        2 |        1 |       0 |        1 |        3 |        8 |        4 |        3 |        1 |       0 |        3 |        2 |        6 |        5 |        3 |        2 |       0 |        0 |        0 |        1 |        3 |        1 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      9 |      2 |      2 |      4 |      0 |     24 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4483500 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4483600 |      45 |     12 |     25 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     25 |     20 |       4 |       0 |       2 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        1 |        1 |        5 |        0 |        0 |       0 |        0 |        1 |        2 |        2 |        7 |        2 |       0 |        0 |        1 |        2 |        3 |        2 |        3 |       0 |        0 |        0 |        1 |        2 |        1 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4483800 |      44 |     13 |     21 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     19 |     25 |       3 |       1 |       1 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        1 |        0 |        0 |        0 |        3 |        0 |       0 |        0 |        0 |        4 |        4 |        1 |        0 |       0 |        0 |        1 |        3 |        3 |        1 |        2 |       0 |        0 |        2 |        2 |        4 |        1 |        2 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |     10 |      0 |      0 |      0 |      2 |     11 |      0 |      0 |      0 |      8 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4483900 |     188 |     52 |    106 |     8 |    0 |     4 |    1 |    0 |     1 |    0 |     16 |    0 |    0 |    0 |    0 |     99 |     89 |       3 |       6 |       0 |       2 |      2 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        3 |        3 |        3 |        7 |        6 |       1 |        0 |        1 |        6 |        2 |        9 |        8 |       2 |        6 |        4 |       12 |       11 |       10 |        8 |       2 |        4 |        5 |       15 |       11 |        8 |        8 |       2 |        1 |        2 |        1 |        3 |        3 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        2 |       0 |        3 |        1 |        2 |        2 |        0 |        3 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |     12 |      1 |      3 |      7 |     26 |      0 |      0 |      0 |      7 |     16 |      4 |      0 |      8 |     71 |      0 |      0 |      0 |      2 |      5 |      2 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4484000 |     154 |     45 |     72 |     4 |    0 |     4 |    1 |    0 |     3 |    0 |     25 |    0 |    0 |    0 |    0 |     79 |     75 |      12 |       5 |       3 |       1 |      0 |      2 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        3 |        6 |        4 |        4 |       1 |        1 |        1 |        3 |        5 |        8 |        2 |       2 |        2 |        1 |        5 |       12 |        5 |       13 |       1 |        3 |        2 |       10 |        7 |        4 |        7 |       0 |        4 |        3 |        0 |        5 |        1 |        1 |       0 |        1 |        1 |        1 |        4 |        3 |        1 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        3 |        1 |        1 |        2 |       0 |      0 |      1 |      9 |      2 |      2 |      3 |      4 |     24 |      0 |      0 |      0 |      9 |      7 |      4 |      3 |      2 |     47 |      0 |      0 |      2 |      6 |      2 |      0 |      0 |      2 |     13 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4484100 |      61 |     15 |     35 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     29 |     32 |       3 |       2 |       1 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        1 |        0 |       0 |        1 |        0 |        2 |        4 |        0 |        1 |       1 |        0 |        0 |        8 |        2 |        3 |        2 |       2 |        0 |        3 |        3 |        4 |        3 |        4 |       1 |        1 |        1 |        0 |        0 |        1 |        2 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      5 |      2 |      0 |      1 |      2 |      5 |      0 |      0 |      0 |      7 |      7 |      0 |      2 |      0 |     19 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4484200 |      14 |      2 |      9 |     0 |    0 |     1 |    1 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      6 |      8 |       1 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        3 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4484300 |      27 |      8 |     12 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     15 |     12 |       2 |       1 |       1 |       0 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        3 |        2 |       0 |        0 |        0 |        1 |        3 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      9 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4484400 |     150 |     38 |     76 |     1 |    0 |     0 |    5 |    0 |     5 |    0 |     25 |    0 |    0 |    0 |    0 |     82 |     68 |       1 |       3 |       1 |       0 |      5 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        3 |        0 |        3 |        8 |        3 |       1 |        0 |        0 |        2 |        6 |        6 |        5 |       1 |        3 |        0 |        8 |       12 |        8 |       12 |       1 |        2 |        2 |        7 |        8 |        7 |        6 |       0 |        1 |        1 |        2 |        1 |        5 |        2 |       0 |        1 |        1 |        2 |        3 |        4 |        1 |       1 |        1 |        2 |        2 |        2 |        1 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      4 |      2 |      1 |      1 |     22 |      0 |      0 |      0 |     14 |     14 |      3 |      3 |      0 |     42 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      1 |     18 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4484500 |      22 |      7 |      8 |     2 |    0 |     0 |    2 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     11 |     11 |       3 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        2 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        3 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4484600 |      78 |     21 |     42 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     35 |     43 |       3 |       2 |       2 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |        0 |        0 |        1 |        3 |        2 |        2 |       0 |        2 |        2 |        2 |        5 |        1 |        0 |       1 |        1 |        0 |        4 |        5 |        5 |        3 |       0 |        1 |        1 |        7 |        6 |        5 |        3 |       1 |        3 |        0 |        0 |        3 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |     15 |      0 |      0 |      2 |      8 |     11 |      3 |      0 |      0 |     18 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |     37 | s03      | R    |
| 4484700 |      48 |      7 |     34 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     24 |     24 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        1 |        3 |        5 |        2 |        5 |       0 |        3 |        1 |        4 |        6 |        3 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      2 |      7 |      9 |      1 |      2 |      2 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4484800 |     126 |     21 |     88 |     1 |    0 |     3 |    1 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     73 |     53 |       4 |       5 |       1 |       0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        2 |        1 |        5 |        3 |       0 |        0 |        2 |        2 |        1 |        0 |        2 |       0 |        4 |        4 |       10 |       10 |       10 |       10 |       1 |        0 |        5 |        9 |        8 |        8 |        8 |       1 |        3 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        3 |        0 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      3 |      0 |      1 |      1 |     10 |      0 |      0 |      1 |     11 |      7 |      3 |      0 |      3 |     63 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4484900 |     522 |     99 |    319 |     7 |    0 |     4 |    4 |    0 |     3 |    0 |     86 |    0 |    0 |    0 |    0 |    243 |    279 |       7 |      12 |       9 |       2 |      4 |     12 |      3 |      0 |      2 |      1 |      1 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      1 |      1 |      0 |        2 |        7 |        6 |        4 |       12 |        9 |       0 |        2 |        7 |       11 |        8 |       16 |       15 |       0 |        3 |       17 |       26 |       29 |       24 |       51 |       2 |        6 |       11 |       21 |       29 |       37 |       62 |       1 |        2 |        6 |        6 |       12 |        6 |        8 |       0 |        4 |       16 |       10 |        5 |        4 |        7 |       0 |        2 |        0 |        2 |        2 |        3 |        2 |       0 |        1 |        3 |        2 |        0 |        0 |        1 |       0 |      0 |      1 |     19 |      5 |      0 |      4 |      1 |     69 |      0 |      0 |      3 |     52 |     32 |     12 |     13 |      9 |    198 |      0 |      0 |      0 |     18 |      3 |      1 |      0 |      2 |     62 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4485000 |     246 |     44 |    135 |     5 |    0 |     3 |    2 |    3 |     3 |    0 |     51 |    0 |    0 |    0 |    0 |    118 |    128 |       2 |       3 |      11 |       4 |      3 |      7 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        4 |        6 |        3 |        1 |       2 |        2 |        1 |        6 |       10 |        1 |        4 |       1 |        5 |        6 |       14 |       16 |        5 |       18 |       4 |        5 |        6 |       13 |       17 |        8 |       15 |       3 |        1 |        6 |        1 |        5 |        6 |        2 |       1 |        4 |        4 |        3 |       10 |        4 |        4 |       0 |        2 |        1 |        0 |        4 |        1 |        1 |       0 |        2 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |      4 |      9 |      1 |      2 |      1 |     27 |      0 |      0 |      4 |     14 |     24 |     12 |      8 |      6 |     67 |      0 |      0 |      4 |      8 |      3 |      2 |      1 |      1 |     32 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4485100 |     163 |     36 |     91 |     7 |    0 |     3 |    2 |    0 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     86 |     77 |       6 |       4 |       4 |       2 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        4 |        2 |        7 |       1 |        1 |        0 |        3 |       10 |        1 |        3 |       1 |        5 |        6 |        4 |       21 |        4 |       11 |       1 |        1 |        3 |       13 |       10 |        4 |        6 |       2 |        1 |        3 |        5 |        0 |        2 |        0 |       0 |        4 |        1 |        0 |        4 |        3 |        0 |       0 |        0 |        0 |        0 |        5 |        0 |        1 |       0 |        1 |        1 |        0 |        3 |        1 |        1 |       0 |      0 |      0 |      4 |      0 |      4 |      1 |      0 |     27 |      0 |      0 |      0 |     13 |     19 |      9 |      7 |      4 |     39 |      0 |      0 |      0 |      7 |      1 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4485200 |     100 |     28 |     47 |     5 |    0 |     0 |    1 |    0 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     47 |     53 |       2 |       4 |       2 |       0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        1 |        4 |        3 |       1 |        0 |        0 |        2 |        8 |        3 |        3 |       0 |        2 |        0 |        4 |        9 |        5 |        1 |       2 |        4 |        0 |        4 |        9 |        4 |        3 |       0 |        0 |        2 |        0 |        5 |        3 |        0 |       0 |        1 |        2 |        1 |        2 |        1 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |      2 |      3 |      1 |      1 |      3 |     18 |      0 |      0 |      1 |      3 |      7 |      3 |      3 |      2 |     28 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      1 |      9 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4485300 |      45 |      9 |     24 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     25 |     20 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        3 |        1 |        1 |       0 |        1 |        0 |        0 |        5 |        7 |        1 |       0 |        0 |        0 |        3 |        3 |        3 |        0 |       1 |        3 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      1 |      7 |      3 |      1 |      5 |      7 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4485400 |     143 |     28 |     83 |     2 |    0 |     0 |    1 |    0 |     3 |    0 |     26 |    0 |    0 |    0 |    0 |     61 |     82 |       0 |       3 |       0 |       0 |      1 |      5 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        3 |        2 |        0 |        2 |       0 |        2 |        4 |        3 |        6 |        5 |        0 |       0 |        2 |        1 |        8 |       10 |        8 |        9 |       0 |        2 |        2 |       14 |       10 |        9 |        8 |       0 |        2 |        0 |        1 |        7 |        1 |        1 |       0 |        3 |        1 |        3 |        3 |        2 |        2 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      1 |      1 |      2 |      0 |     21 |      0 |      0 |      1 |     14 |     13 |      3 |      4 |      1 |     47 |      0 |      0 |      0 |      2 |      3 |      3 |      1 |      2 |     15 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 4485500 |     141 |     39 |     70 |     0 |    0 |     1 |    2 |    1 |     1 |    0 |     27 |    0 |    0 |    0 |    0 |     66 |     75 |       6 |       2 |       1 |       1 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        1 |        3 |        7 |        3 |        3 |       0 |        0 |        2 |        7 |        5 |        2 |        4 |       1 |        2 |        0 |        7 |        5 |        8 |        7 |       0 |        2 |        2 |        8 |       11 |        7 |       11 |       0 |        3 |        2 |        1 |        3 |        3 |        3 |       1 |        1 |        2 |        1 |        3 |        1 |        2 |       1 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       1 |      0 |      0 |      4 |     12 |      4 |      3 |      1 |     15 |      0 |      0 |      1 |      4 |     16 |      1 |      4 |      3 |     41 |      0 |      0 |      0 |      1 |      8 |      0 |      0 |      1 |     17 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4485600 |     361 |     87 |    216 |    12 |    0 |     1 |    1 |    0 |     3 |    0 |     41 |    0 |    0 |    0 |    0 |    151 |    210 |      15 |       6 |       2 |       1 |      0 |      8 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |        2 |        3 |        5 |        5 |        7 |       10 |       0 |        4 |        2 |        5 |       13 |        9 |       20 |       2 |        4 |        4 |       15 |       18 |       23 |       30 |       1 |        4 |        3 |       20 |       28 |       22 |       41 |       3 |        2 |        1 |        1 |        5 |        6 |        2 |       0 |        1 |        1 |        5 |        5 |        6 |        6 |       0 |        0 |        0 |        1 |        2 |        3 |        1 |       0 |        1 |        1 |        2 |        1 |        1 |        4 |       0 |      0 |      1 |      9 |     12 |     10 |      2 |      6 |     47 |      0 |      0 |      0 |     26 |     42 |     27 |     14 |      8 |     99 |      0 |      0 |      0 |      7 |      4 |      1 |      2 |      2 |     25 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4485700 |     116 |     41 |     47 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     56 |     60 |       5 |       1 |       0 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        6 |        5 |        6 |       0 |        0 |        2 |        4 |        8 |        2 |        3 |       0 |        1 |        1 |        6 |        2 |        7 |        3 |       1 |        0 |        2 |        4 |        9 |        5 |        6 |       0 |        1 |        0 |        1 |        4 |        4 |        1 |       0 |        2 |        0 |        4 |        3 |        3 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      3 |      7 |      4 |      3 |      0 |      3 |     21 |      0 |      0 |      0 |     10 |      4 |      3 |      1 |      7 |     22 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4485800 |     100 |     15 |     61 |     4 |    0 |     0 |    0 |    1 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     48 |     52 |       2 |       2 |       1 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        2 |       1 |        0 |        2 |        1 |        5 |        1 |        0 |       0 |        1 |        0 |        6 |        8 |        5 |        8 |       1 |        4 |        1 |        6 |        9 |        2 |        9 |       1 |        2 |        1 |        1 |        4 |        1 |        0 |       0 |        1 |        1 |        4 |        3 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |      9 |      0 |      0 |      2 |     10 |      8 |      3 |      4 |      6 |     28 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     13 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4485900 |     384 |     85 |    223 |    10 |    0 |     1 |    0 |    0 |     4 |    0 |     61 |    0 |    0 |    0 |    0 |    178 |    206 |      20 |      14 |       5 |       1 |      6 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        2 |        8 |       13 |        7 |        5 |       0 |        4 |        3 |       11 |       13 |       11 |        5 |       2 |        7 |       11 |       23 |       24 |       25 |       19 |       1 |       10 |       10 |       31 |       29 |       11 |       17 |       5 |        4 |        5 |        1 |        8 |        4 |        3 |       0 |        7 |        3 |        4 |       11 |        6 |        5 |       0 |        4 |        1 |        0 |        1 |        0 |        1 |       0 |        4 |        0 |        0 |        2 |        0 |        2 |       0 |      0 |      1 |      8 |     15 |      4 |      0 |      7 |     50 |      0 |      0 |      2 |     26 |     40 |      2 |     11 |     14 |    128 |      0 |      0 |      1 |     11 |      8 |      2 |      0 |      4 |     35 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4486000 |     356 |    127 |    143 |    15 |    0 |     6 |    2 |    1 |     3 |    0 |     59 |    0 |    0 |    0 |    0 |    162 |    194 |      62 |      21 |      23 |       6 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        5 |       12 |       13 |        8 |       12 |       0 |        6 |       13 |        8 |       19 |        9 |       17 |       1 |        3 |       11 |       16 |       13 |       10 |       14 |       3 |        8 |        7 |       20 |        6 |       15 |       15 |       2 |        6 |        5 |        4 |        9 |        1 |        1 |       0 |        2 |       11 |        6 |        9 |        3 |        2 |       0 |        2 |        1 |        2 |        4 |        2 |        1 |       0 |        0 |        6 |        2 |        6 |        0 |        1 |       0 |      0 |      3 |     36 |     22 |     12 |      3 |      1 |     50 |      0 |      0 |      3 |     26 |     25 |      9 |      5 |     10 |     65 |      0 |      0 |      2 |     13 |      6 |      0 |      2 |      3 |     33 |      0 |      0 |      1 |      1 |     10 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4486100 |      24 |     12 |      2 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     10 |     14 |      10 |       1 |       6 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        3 |        1 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        3 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      2 |      1 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4486300 |      37 |     14 |     15 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     16 |     21 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        0 |        2 |       0 |        0 |        0 |        2 |        4 |        1 |        2 |       0 |        0 |        0 |        2 |        3 |        2 |        1 |       0 |        0 |        1 |        2 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      0 |      2 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     11 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4486400 |      38 |      4 |     25 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     19 |     19 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        3 |        2 |        6 |        3 |       0 |        0 |        0 |        3 |        4 |        2 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        3 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      8 |      4 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4486600 |     694 |    171 |    401 |    16 |    0 |     6 |    5 |    1 |     1 |    0 |     93 |    0 |    0 |    0 |    0 |    315 |    379 |       9 |       8 |       1 |       0 |      6 |     17 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        1 |        1 |        5 |       13 |        9 |       35 |       4 |        3 |        0 |       13 |       21 |       17 |       46 |       3 |        5 |        4 |       20 |       41 |       23 |       96 |       4 |        8 |        9 |       23 |       26 |       20 |      113 |       9 |        5 |        2 |        6 |       13 |        3 |        9 |       1 |        5 |        5 |        7 |       16 |        9 |       12 |       0 |        0 |        0 |        4 |        5 |        0 |        6 |       0 |        1 |        0 |        3 |        4 |        0 |        6 |       0 |      0 |      4 |     24 |     23 |     13 |     11 |     10 |     86 |      0 |      0 |      5 |     44 |     78 |     21 |     25 |     20 |    208 |      0 |      0 |      1 |      9 |     18 |      8 |      2 |      5 |     50 |      0 |      0 |      0 |      4 |     11 |      1 |      3 |      0 |     10 |      0 |     37 | s03      | R    |
| 4486700 |      26 |      6 |     12 |     0 |    0 |     0 |    0 |    1 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |     16 |     10 |       1 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        2 |        2 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        2 |        1 |        3 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4486900 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4487000 |     494 |    112 |    269 |     8 |    0 |     4 |    6 |    0 |     2 |    0 |     93 |    0 |    0 |    0 |    0 |    240 |    254 |      13 |      13 |      12 |       2 |      2 |      9 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      1 |        2 |        3 |        9 |       18 |        8 |       10 |       1 |        2 |        4 |       11 |       27 |       11 |        5 |       1 |        9 |        4 |       35 |       48 |       28 |        9 |       2 |       11 |       10 |       47 |       32 |       20 |       14 |       0 |        6 |        6 |        9 |       12 |        8 |        6 |       1 |        7 |        6 |        9 |       13 |        5 |        5 |       0 |        0 |        2 |        1 |        2 |        0 |        1 |       0 |        2 |        2 |        2 |        6 |        1 |        1 |       0 |      0 |      0 |     12 |     16 |     10 |      8 |      6 |     60 |      0 |      0 |      4 |     34 |     43 |     15 |     22 |     19 |    132 |      0 |      0 |      0 |     13 |     16 |      9 |      2 |      6 |     47 |      0 |      0 |      0 |      3 |      7 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4487100 |     397 |     82 |    234 |     8 |    0 |     4 |    2 |    0 |     1 |    0 |     66 |    0 |    0 |    0 |    0 |    188 |    209 |      15 |       7 |       6 |       0 |      0 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       4 |       1 |       0 |      2 |      0 |      1 |      0 |        1 |        5 |        2 |       12 |        7 |        5 |       1 |        0 |        6 |        8 |       14 |       10 |       10 |       1 |        9 |       11 |       15 |       34 |       26 |       20 |       4 |       10 |        4 |       24 |       34 |       24 |       17 |       2 |        4 |        3 |        7 |       10 |        2 |        2 |       1 |        5 |        6 |        8 |       14 |        1 |        2 |       1 |        0 |        1 |        1 |        3 |        2 |        0 |       0 |        1 |        1 |        3 |        2 |        0 |        1 |       0 |      0 |      0 |     10 |     12 |     11 |      0 |     10 |     39 |      0 |      0 |      4 |     26 |     30 |     13 |     13 |     18 |    130 |      0 |      0 |      2 |     13 |      8 |      4 |      2 |      4 |     33 |      0 |      0 |      0 |      0 |      7 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4487400 |     459 |     96 |    279 |     4 |    0 |     3 |    2 |    1 |     0 |    0 |     74 |    0 |    0 |    0 |    0 |    238 |    221 |      14 |       9 |       6 |       0 |      7 |     15 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       1 |      1 |      4 |      0 |      0 |        2 |        6 |        5 |        9 |        8 |        9 |       1 |        1 |        3 |        8 |       19 |       12 |       13 |       0 |       17 |        9 |       19 |       43 |       25 |       31 |       4 |       10 |        6 |       25 |       40 |       22 |       26 |       2 |        5 |        6 |        5 |       12 |        7 |        8 |       0 |        6 |        3 |       10 |        8 |        2 |        2 |       0 |        0 |        2 |        1 |        2 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     12 |     17 |      6 |      4 |      9 |     47 |      0 |      0 |      2 |     45 |     47 |     20 |     16 |     16 |    133 |      0 |      0 |      2 |     13 |      9 |      5 |      0 |      3 |     42 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 4487500 |      42 |     13 |     20 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     19 |     23 |       5 |       0 |       3 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        1 |        1 |       0 |        0 |        2 |        0 |        2 |        3 |        1 |       0 |        0 |        2 |        0 |        2 |        2 |        1 |       0 |        2 |        1 |        3 |        3 |        3 |        1 |       0 |        0 |        0 |        3 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      2 |      0 |      6 |      0 |      0 |      0 |      5 |      2 |      1 |      1 |      1 |     10 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4487700 |      42 |     11 |     23 |     4 |    0 |     0 |    0 |    0 |     1 |    0 |      3 |    0 |    0 |    0 |    0 |     21 |     21 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        2 |        1 |       0 |        2 |        0 |        2 |        1 |        0 |        1 |       0 |        2 |        0 |        5 |        5 |        0 |        1 |       0 |        1 |        0 |        3 |        3 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      1 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4487800 |      79 |     17 |     40 |     4 |    0 |     1 |    1 |    0 |     1 |    0 |     15 |    0 |    0 |    0 |    0 |     38 |     41 |       4 |       7 |       4 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        0 |        1 |        2 |        0 |        1 |       1 |        1 |        0 |        0 |        4 |        1 |        3 |       3 |        0 |        4 |        3 |        5 |        3 |        6 |       0 |        2 |        2 |        4 |        6 |        1 |        4 |       0 |        0 |        3 |        1 |        2 |        2 |        0 |       0 |        2 |        1 |        0 |        3 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      4 |     10 |      3 |      1 |      1 |     21 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4488000 |      42 |     12 |     19 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     21 |     21 |       7 |       2 |       1 |       0 |      1 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        1 |        1 |        3 |        2 |        1 |       0 |        0 |        0 |        1 |        4 |        2 |        3 |       2 |        0 |        1 |        0 |        1 |        1 |        3 |       1 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |      5 |      0 |      0 |      0 |      4 |      1 |      2 |      1 |      0 |     11 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      5 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4488100 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      2 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4488400 |       4 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4488500 |      65 |     18 |     34 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     29 |     36 |       1 |       1 |       0 |       0 |      1 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        1 |        2 |        1 |       0 |        0 |        0 |        5 |        2 |        2 |        2 |       0 |        0 |        0 |        7 |        5 |        1 |        1 |       0 |        2 |        1 |        8 |        5 |        2 |        2 |       0 |        0 |        0 |        1 |        3 |        2 |        0 |       0 |        2 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      0 |      0 |      5 |      0 |      9 |      0 |      0 |      1 |      4 |      3 |      3 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4488900 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4490000 |     133 |     22 |     91 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     68 |     65 |       0 |       0 |       2 |       0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        2 |        4 |       0 |        2 |        0 |        2 |        4 |        3 |        2 |       1 |        2 |        5 |        9 |       16 |       10 |        7 |       0 |        6 |        4 |        9 |       10 |        7 |        6 |       0 |        1 |        0 |        1 |        3 |        1 |        4 |       0 |        0 |        1 |        3 |        3 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      1 |      0 |      3 |     13 |      0 |      0 |      0 |     11 |     21 |      5 |      2 |      2 |     50 |      0 |      0 |      1 |      1 |      7 |      3 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4490100 |     152 |     23 |     95 |     3 |    0 |     1 |    4 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     75 |     77 |       5 |       7 |       3 |       0 |      5 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        4 |        4 |        2 |       0 |        0 |        2 |        2 |        3 |        3 |        3 |       0 |        5 |        6 |        9 |        9 |       10 |        8 |       0 |        4 |        2 |        9 |        9 |       11 |       13 |       0 |        2 |        3 |        1 |        2 |        4 |        1 |       0 |        2 |        3 |        3 |        2 |        2 |        0 |       1 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |      2 |      2 |      0 |      0 |     15 |      0 |      0 |      4 |      2 |     14 |      5 |      5 |      2 |     63 |      0 |      0 |      0 |      2 |      1 |      4 |      2 |      0 |     17 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4490300 |      42 |     10 |     27 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     19 |     23 |       1 |       0 |       0 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        2 |        0 |       1 |        0 |        0 |        0 |        1 |        1 |        3 |       1 |        1 |        0 |        2 |        3 |        1 |        6 |       0 |        1 |        0 |        1 |        4 |        3 |        5 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      2 |     17 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4490400 |      31 |      9 |     18 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     16 |     15 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        2 |        1 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        2 |        1 |        1 |        3 |        1 |       0 |        0 |        1 |        1 |        3 |        4 |        1 |       0 |        0 |        0 |        0 |        0 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4490700 |     142 |     46 |     62 |     6 |    0 |     1 |    0 |    1 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     74 |     68 |      10 |       5 |       1 |       0 |      3 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        2 |        5 |        5 |        8 |       0 |        1 |        3 |        1 |        7 |        4 |        7 |       1 |        2 |        2 |        6 |        7 |       12 |        5 |       1 |        0 |        0 |        5 |        9 |        6 |        6 |       1 |        1 |        1 |        2 |        4 |        0 |        3 |       0 |        1 |        2 |        4 |        4 |        1 |        2 |       0 |        1 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |      0 |      0 |      3 |      4 |      5 |      3 |      8 |     23 |      0 |      0 |      1 |     10 |     12 |      3 |      4 |      3 |     29 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      0 |     18 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 4490800 |     354 |     68 |    205 |     7 |    0 |     3 |    2 |    0 |     5 |    0 |     64 |    0 |    0 |    0 |    0 |    171 |    183 |      13 |      24 |       6 |       2 |      5 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        3 |        9 |        1 |        9 |        7 |       1 |        3 |        5 |        9 |        8 |        7 |        5 |       1 |        8 |       11 |       19 |       34 |       11 |       15 |       4 |       10 |       12 |       22 |       25 |       20 |       13 |       1 |        2 |        4 |       11 |        8 |        6 |        1 |       0 |        1 |        0 |       10 |       11 |        8 |        2 |       0 |        0 |        1 |        1 |        2 |        3 |        0 |       0 |        3 |        3 |        1 |        1 |        2 |        0 |       0 |      0 |      1 |      2 |     19 |      3 |      3 |      2 |     38 |      0 |      0 |      3 |     21 |     35 |     18 |      7 |      6 |    115 |      0 |      0 |      0 |     10 |      6 |      3 |      1 |      2 |     42 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4491000 |      41 |     12 |     22 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     22 |     19 |       0 |       0 |       1 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        2 |       1 |        0 |        0 |        0 |        1 |        2 |        3 |       0 |        2 |        0 |        1 |        2 |        1 |        4 |       1 |        1 |        0 |        1 |        4 |        3 |        2 |       0 |        0 |        0 |        0 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      4 |      0 |      1 |      5 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      2 |     14 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4491200 |       5 |      2 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4491300 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4491400 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4491500 |       4 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4491700 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4492100 |      53 |     14 |     35 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     23 |     30 |       1 |      10 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        1 |        1 |        2 |        2 |        2 |        2 |       0 |        0 |        3 |        4 |        4 |        2 |        2 |       0 |        1 |        6 |        3 |        5 |        3 |        2 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      9 |      0 |      0 |      0 |      3 |      7 |      6 |      0 |      2 |     17 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4492200 |      54 |     11 |     26 |     1 |    0 |     0 |    0 |    1 |     1 |    0 |     14 |    0 |    0 |    0 |    0 |     36 |     18 |       0 |       0 |       2 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        2 |        1 |       0 |        0 |        0 |        1 |        3 |        2 |        0 |       0 |        1 |        1 |        1 |        2 |        5 |        6 |       2 |        0 |        1 |        2 |        0 |        2 |        2 |       1 |        3 |        0 |        1 |        4 |        1 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      2 |      2 |      5 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      1 |     16 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4492400 |      19 |      3 |     15 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     11 |      8 |       0 |       4 |       0 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        1 |        2 |        2 |        1 |        1 |       1 |        0 |        2 |        0 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      5 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4493000 |      10 |      0 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      7 |      3 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4493100 |      12 |      2 |      5 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      3 |    0 |    0 |    0 |    0 |      6 |      6 |       1 |       0 |       1 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       1 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4493200 |       2 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4493300 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4500000 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4500100 |     708 |    149 |    439 |    15 |    0 |     5 |    5 |    1 |     3 |    0 |     91 |    0 |    0 |    0 |    0 |    339 |    369 |       9 |      12 |       3 |       0 |     17 |     15 |      3 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       0 |      0 |      1 |      0 |      1 |        2 |        3 |        7 |       12 |       15 |       26 |       1 |        0 |        4 |       10 |       16 |       23 |       28 |       2 |        6 |       12 |       25 |       47 |       48 |       73 |       5 |       12 |        8 |       24 |       46 |       51 |       75 |       7 |        2 |        6 |        5 |        7 |        8 |       10 |       2 |        5 |        7 |        8 |       11 |       12 |        7 |       1 |        3 |        4 |        3 |        3 |        2 |        2 |       0 |        0 |        2 |        3 |        2 |        2 |        3 |       0 |      0 |      0 |     30 |     15 |     10 |      8 |     12 |     74 |      0 |      0 |      3 |     52 |     79 |     28 |     22 |     30 |    225 |      0 |      0 |      0 |     11 |      9 |      5 |      2 |      2 |     62 |      0 |      0 |      0 |      6 |      5 |      1 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 4500200 |      36 |      8 |     21 |     2 |    0 |     1 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     16 |     20 |       3 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        1 |       1 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        2 |        1 |        2 |       0 |        0 |        1 |        3 |        2 |        3 |        3 |       1 |        2 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      1 |     13 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4500500 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4500600 |     772 |    138 |    480 |    14 |    0 |     4 |    6 |    0 |     2 |    0 |    128 |    0 |    0 |    0 |    0 |    370 |    402 |       7 |      11 |       6 |       1 |     10 |     27 |     14 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        4 |       17 |       13 |       19 |       1 |        2 |        2 |       12 |       19 |       22 |       23 |       2 |       15 |        7 |       31 |       49 |       55 |       83 |       3 |        9 |       18 |       34 |       44 |       57 |       71 |       4 |        2 |        3 |        6 |       16 |       10 |       18 |       1 |       10 |        7 |        9 |       16 |       12 |       18 |       0 |        1 |        1 |        3 |        4 |        1 |        5 |       0 |        1 |        0 |        1 |        1 |        4 |        4 |       0 |      0 |      3 |     16 |     21 |     11 |      6 |      7 |     74 |      0 |      0 |      3 |     54 |     77 |     21 |     22 |     29 |    274 |      0 |      0 |      4 |     22 |     21 |      2 |      7 |      3 |     69 |      0 |      0 |      0 |      2 |      8 |      3 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 4500700 |      31 |      7 |     14 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     13 |     18 |       0 |       1 |       2 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |        0 |        0 |        1 |        0 |        3 |        1 |       0 |        0 |        0 |        0 |        3 |        4 |        2 |       0 |        0 |        0 |        0 |        1 |        2 |        2 |       0 |        0 |        1 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      3 |      2 |      2 |      0 |      5 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4500800 |     455 |    115 |    275 |     8 |    0 |     4 |    0 |    0 |     0 |    0 |     53 |    0 |    0 |    0 |    0 |    192 |    263 |       2 |       5 |       1 |       0 |      8 |      7 |      7 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        4 |       39 |       1 |        0 |        1 |        1 |        0 |       10 |       56 |       3 |        0 |        1 |        0 |        1 |       10 |      104 |       2 |        0 |        1 |        1 |        1 |       17 |      133 |       4 |        0 |        0 |        0 |        0 |        5 |       20 |       0 |        0 |        0 |        0 |        1 |        7 |       19 |       1 |        0 |        0 |        0 |        0 |        0 |        5 |       0 |        0 |        0 |        0 |        0 |        2 |        5 |       0 |      0 |      2 |     11 |     19 |      7 |      4 |      7 |     65 |      0 |      0 |      3 |     46 |     26 |     12 |     13 |     22 |    153 |      0 |      0 |      1 |     10 |      5 |      4 |      0 |      1 |     32 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4500900 |     123 |     29 |     76 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     54 |     69 |       0 |       2 |       0 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |       12 |       0 |        0 |        0 |        0 |        0 |        1 |       14 |       1 |        0 |        0 |        0 |        0 |        5 |       27 |       0 |        0 |        0 |        0 |        0 |        9 |       31 |       4 |        0 |        0 |        0 |        1 |        1 |        5 |       0 |        0 |        0 |        0 |        0 |        1 |        7 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      5 |      8 |      4 |      0 |      1 |     11 |      0 |      0 |      2 |     18 |     11 |      8 |      1 |      8 |     28 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4501200 |      17 |      2 |     12 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      9 |      8 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        3 |        1 |        0 |       0 |        0 |        2 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4501400 |       5 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4501800 |       8 |      2 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4501900 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4502000 |     180 |     38 |    114 |     3 |    0 |     1 |    3 |    0 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     87 |     93 |       3 |       2 |       0 |       1 |      0 |      3 |      3 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        3 |        5 |        6 |       0 |        1 |        1 |        1 |        8 |        6 |        4 |       0 |        2 |        2 |        5 |       16 |       17 |       12 |       0 |        1 |        4 |        6 |       19 |       13 |       17 |       0 |        4 |        0 |        0 |        2 |        1 |        4 |       0 |        2 |        0 |        0 |        4 |        3 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      9 |      9 |      3 |      2 |      0 |     15 |      0 |      0 |      1 |     19 |     28 |      8 |      6 |      4 |     48 |      0 |      0 |      0 |      4 |      5 |      2 |      0 |      0 |     10 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4502100 |     130 |     21 |     82 |     3 |    0 |     3 |    1 |    0 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     60 |     70 |       0 |       6 |       0 |       0 |      1 |      9 |      4 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        0 |        1 |       2 |        1 |        0 |        1 |        4 |        5 |        2 |       1 |        2 |        2 |        4 |        9 |       11 |       11 |       0 |        5 |        0 |        3 |       10 |       13 |       12 |       0 |        1 |        1 |        1 |        3 |        3 |        2 |       0 |        3 |        1 |        0 |        3 |        2 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |      2 |      2 |      1 |      2 |      2 |     11 |      0 |      0 |      0 |      8 |      6 |      7 |      5 |     13 |     43 |      0 |      0 |      1 |      1 |      1 |      3 |      0 |      1 |     13 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4502200 |      25 |      5 |     16 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |     13 |     12 |       0 |       3 |       0 |       1 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        4 |        2 |       0 |        0 |        0 |        1 |        3 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4502600 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4503000 |     597 |    158 |    298 |     9 |    0 |     8 |    8 |    0 |    11 |    0 |    105 |    0 |    0 |    0 |    0 |    297 |    300 |      19 |       9 |      11 |       2 |      6 |     11 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        4 |        5 |       10 |       26 |       16 |        7 |       3 |        2 |       12 |       15 |       20 |       18 |       17 |       3 |        8 |       11 |       31 |       35 |       31 |       27 |       5 |       12 |       14 |       40 |       40 |       16 |       21 |       7 |        3 |        7 |       14 |       20 |        8 |        4 |       0 |        9 |        6 |       12 |       10 |        8 |        4 |       0 |        6 |        5 |        2 |        5 |        2 |        2 |       0 |        5 |        1 |        2 |        5 |        0 |        1 |       0 |      0 |      3 |     19 |     27 |      7 |      7 |     19 |     76 |      0 |      0 |      4 |     30 |     64 |     17 |      7 |     18 |    158 |      0 |      0 |      2 |     16 |     10 |      8 |      5 |      3 |     61 |      0 |      0 |      0 |      6 |      5 |      4 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 4503100 |      20 |      4 |     12 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      9 |     11 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        2 |        1 |       0 |        2 |        0 |        2 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4503200 |     135 |     27 |     74 |     4 |    0 |     3 |    0 |    0 |     2 |    0 |     25 |    0 |    0 |    0 |    0 |     70 |     65 |       5 |       3 |       1 |       0 |      1 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        2 |        2 |        2 |        1 |        4 |       0 |        1 |        3 |        2 |        1 |        4 |        3 |       2 |        0 |        6 |        7 |        8 |        5 |        6 |       3 |        4 |        3 |        9 |        7 |        9 |        5 |       2 |        3 |        5 |        5 |        1 |        1 |        0 |       0 |        1 |        3 |        2 |        2 |        2 |        0 |       0 |        1 |        2 |        2 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      1 |      1 |      2 |     17 |      0 |      0 |      1 |     12 |     11 |      7 |      6 |      2 |     35 |      0 |      0 |      0 |      5 |      1 |      3 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4503300 |     609 |    117 |    368 |    23 |    0 |     6 |    9 |    3 |     6 |    0 |     77 |    0 |    0 |    0 |    0 |    319 |    290 |      20 |      14 |       6 |       2 |      4 |     10 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        4 |        8 |       14 |       15 |        9 |       0 |        4 |        6 |        6 |       16 |       17 |       11 |       3 |       18 |       24 |       45 |       49 |       35 |       19 |       8 |       11 |       14 |       41 |       53 |       27 |       18 |       6 |        6 |        5 |        7 |        8 |        6 |        5 |       0 |        4 |        6 |        9 |       15 |        4 |        1 |       1 |        3 |        5 |        7 |        8 |        2 |        5 |       0 |        2 |        3 |        4 |        2 |        3 |        3 |       0 |      0 |      2 |     16 |     11 |      3 |      2 |     11 |     72 |      0 |      0 |      1 |     33 |     53 |     17 |     12 |     18 |    234 |      0 |      0 |      0 |      8 |      8 |      4 |      2 |      5 |     50 |      0 |      0 |      0 |      8 |     10 |      1 |      1 |      3 |     24 |      0 |     37 | s03      | R    |
| 4503400 |     300 |     64 |    159 |     6 |    0 |     2 |    1 |    1 |     1 |    0 |     66 |    0 |    0 |    0 |    0 |    149 |    151 |       1 |       4 |       5 |       1 |      2 |     13 |      7 |      1 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      4 |      1 |      0 |       1 |       2 |       0 |       0 |      0 |      2 |      0 |      1 |        3 |        5 |        3 |        6 |        6 |        3 |       0 |        2 |        4 |        7 |       14 |        8 |        2 |       1 |        6 |        6 |       10 |       25 |       16 |       13 |       2 |        7 |        5 |       20 |       22 |       15 |        8 |       4 |        8 |        3 |       11 |       11 |        5 |        1 |       0 |        4 |        4 |        9 |        5 |        5 |        0 |       0 |        2 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |      8 |      4 |      1 |      4 |     38 |      0 |      0 |      4 |     25 |     29 |      5 |      6 |      5 |     85 |      0 |      0 |      0 |     12 |     10 |      2 |      2 |      2 |     38 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4503500 |      29 |      3 |     21 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     16 |     13 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        2 |        2 |        4 |        2 |        2 |       0 |        0 |        0 |        2 |        2 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4503700 |      23 |      2 |     15 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     12 |     11 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        3 |        0 |        0 |        2 |        1 |       0 |        1 |        3 |        1 |        1 |        1 |        0 |       1 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      3 |      1 |      1 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4503800 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4503900 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4504000 |      77 |     21 |     43 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     37 |     40 |       6 |       1 |       1 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        2 |        0 |        1 |        3 |        0 |       2 |        0 |        0 |        1 |        4 |        1 |        3 |       3 |        2 |        1 |        2 |        7 |        4 |        1 |       5 |        3 |        0 |        6 |        4 |        3 |        5 |       0 |        0 |        1 |        3 |        0 |        0 |        1 |       0 |        2 |        1 |        3 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      2 |      1 |      0 |      2 |     12 |      0 |      0 |      1 |      7 |      9 |      0 |      0 |      3 |     23 |      0 |      0 |      1 |      0 |      2 |      0 |      2 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4504100 |      31 |      9 |     16 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     17 |     14 |       1 |       1 |       3 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        2 |        0 |        2 |       0 |        0 |        1 |        1 |        2 |        0 |        2 |       2 |        0 |        1 |        2 |        2 |        0 |        0 |       3 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      6 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      0 |     11 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4504200 |      24 |     10 |      8 |     1 |    0 |     0 |    1 |    0 |     1 |    0 |      3 |    0 |    0 |    0 |    0 |     10 |     14 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        1 |        2 |        0 |        2 |        0 |        1 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4504300 |       3 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4504400 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4504500 |      87 |     15 |     50 |     1 |    0 |     1 |    0 |    0 |     1 |    0 |     19 |    0 |    0 |    0 |    0 |     37 |     50 |       1 |       2 |       3 |       0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        1 |        1 |       0 |        1 |        1 |        3 |        4 |        0 |        0 |       1 |        1 |        1 |        4 |        6 |        3 |        6 |       1 |        5 |        1 |        4 |        6 |        7 |        5 |       0 |        2 |        1 |        3 |        2 |        2 |        0 |       0 |        2 |        2 |        4 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      5 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      4 |      5 |      3 |      1 |      3 |     34 |      0 |      0 |      0 |      9 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4504600 |      44 |     20 |     13 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     23 |     21 |       2 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        6 |        2 |        0 |       0 |        1 |        0 |        0 |        6 |        4 |        0 |       0 |        0 |        0 |        3 |        3 |        1 |        1 |       0 |        0 |        0 |        2 |        2 |        1 |        0 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      1 |      0 |      2 |     12 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      7 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4504800 |       4 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4504900 |       5 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4505000 |      79 |     26 |     28 |     1 |    0 |     2 |    0 |    0 |     1 |    0 |     21 |    0 |    0 |    0 |    0 |     38 |     41 |       3 |       2 |       0 |       1 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |       2 |       1 |       0 |       0 |      3 |      1 |      3 |      0 |        1 |        2 |        7 |        6 |        1 |        0 |       0 |        2 |        1 |        3 |        2 |        0 |        1 |       0 |        0 |        1 |        8 |        1 |        1 |        0 |       0 |        0 |        4 |        6 |        4 |        2 |        1 |       0 |        0 |        2 |        1 |        3 |        0 |        2 |       0 |        2 |        4 |        3 |        3 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      3 |      0 |      2 |      3 |     12 |      0 |      0 |      2 |      8 |      3 |      1 |      1 |      0 |     13 |      0 |      0 |      0 |      2 |      3 |      0 |      3 |      0 |     13 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4505100 |     275 |     70 |    133 |    11 |    0 |     2 |    4 |    2 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |    138 |    137 |      12 |      13 |       6 |       3 |      7 |      8 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      2 |      2 |      2 |        3 |        2 |        5 |        7 |        4 |        9 |       0 |        7 |        3 |        7 |        9 |        8 |        5 |       1 |        5 |       10 |       15 |       19 |        9 |        8 |       4 |        3 |       11 |       18 |       15 |        2 |       12 |       2 |        5 |        4 |        7 |        5 |        5 |        1 |       1 |        6 |        3 |        2 |        5 |        4 |        3 |       0 |        2 |        3 |        2 |        1 |        2 |        0 |       0 |        1 |        1 |        1 |        7 |        0 |        1 |       0 |      0 |      4 |      3 |     14 |      2 |      2 |      0 |     45 |      0 |      0 |      0 |     10 |     32 |      5 |      6 |      6 |     74 |      0 |      0 |      0 |     12 |      5 |      2 |      3 |      4 |     25 |      0 |      0 |      1 |      3 |      6 |      3 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4505200 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4505300 |     189 |     37 |    105 |     7 |    0 |     3 |    3 |    1 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |     92 |     97 |       8 |      10 |       5 |       1 |      0 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      2 |      1 |      0 |        1 |        0 |        5 |        3 |        4 |        0 |       0 |        1 |        1 |        5 |       11 |        4 |        2 |       0 |        8 |        5 |        8 |       18 |       10 |        3 |       0 |        4 |        6 |       14 |       13 |       10 |        5 |       1 |        1 |        1 |        4 |        5 |        2 |        4 |       0 |        3 |        4 |        0 |        7 |        2 |        0 |       0 |        1 |        2 |        2 |        2 |        2 |        1 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     30 |      0 |      0 |      2 |      0 |      2 |      2 |      2 |      0 |     97 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |     30 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4505400 |      70 |     11 |     37 |     0 |    0 |     2 |    1 |    0 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     31 |     39 |       5 |       0 |       1 |       0 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        2 |        1 |        4 |        1 |        1 |       0 |        3 |        2 |        4 |        6 |        2 |        1 |       0 |        3 |        2 |        5 |        6 |        1 |        2 |       0 |        2 |        2 |        1 |        4 |        0 |        0 |       0 |        3 |        2 |        1 |        3 |        0 |        0 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      2 |      1 |      9 |      1 |      1 |      4 |     19 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      1 |     12 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4505500 |      34 |      7 |     21 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      5 |    0 |    0 |    0 |    0 |     15 |     19 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        1 |        1 |        2 |       0 |        0 |        2 |        3 |        1 |        1 |        4 |       0 |        1 |        1 |        2 |        0 |        2 |        3 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4505600 |      23 |      9 |     12 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     12 |     11 |       1 |       0 |       1 |       0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        2 |        0 |        0 |       1 |        1 |        0 |        0 |        3 |        0 |        0 |       0 |        2 |        0 |        1 |        2 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4505700 |      47 |     14 |     19 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     25 |     22 |       3 |       4 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        2 |        3 |        0 |        1 |       1 |        0 |        2 |        0 |        4 |        0 |        0 |       1 |        1 |        1 |        4 |        3 |        2 |        0 |       0 |        2 |        0 |        2 |        2 |        1 |        1 |       0 |        0 |        2 |        1 |        2 |        1 |        0 |       1 |        0 |        1 |        0 |        3 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      1 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      5 |      8 |      0 |      0 |      0 |      6 |      3 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4505800 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4505900 |       7 |      1 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      5 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4506000 |      11 |      4 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      6 |      5 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4506100 |     189 |     55 |     97 |     3 |    0 |     3 |    0 |    1 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     92 |     97 |      18 |       9 |       7 |       2 |      1 |      4 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        8 |        3 |        6 |        4 |       0 |        3 |        1 |        8 |       10 |        4 |        4 |       2 |        1 |        4 |       19 |       11 |        6 |        9 |       1 |        2 |        5 |       12 |       10 |        9 |        7 |       1 |        3 |        3 |        3 |        8 |        0 |        0 |       0 |        2 |        2 |        4 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        3 |        0 |        1 |        0 |       0 |      0 |      1 |      6 |     11 |      6 |      1 |      1 |     29 |      0 |      0 |      0 |     13 |     21 |     11 |      6 |      0 |     46 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      1 |     20 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4506200 |     172 |     44 |     84 |     4 |    0 |     3 |    4 |    0 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |     87 |     85 |      10 |      10 |       7 |       0 |      0 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        3 |        8 |        3 |        2 |       1 |        0 |        2 |        4 |       10 |        4 |        3 |       1 |        1 |        5 |        8 |       10 |        9 |       10 |       2 |        1 |        3 |        6 |        8 |        5 |        8 |       8 |        2 |        4 |        1 |        7 |        2 |        1 |       0 |        4 |        2 |        5 |        2 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |        0 |        2 |        3 |        0 |        1 |        1 |       0 |      0 |      0 |      5 |      3 |      3 |      3 |      0 |     30 |      0 |      0 |      1 |      7 |     15 |      5 |      1 |      6 |     49 |      0 |      0 |      1 |      3 |      2 |      2 |      0 |      1 |     23 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4506300 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4506400 |      41 |     10 |     25 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     18 |     23 |       1 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        2 |        2 |        2 |        0 |       1 |        2 |        0 |        6 |        2 |        0 |        1 |       2 |        1 |        1 |        4 |        1 |        0 |        2 |       3 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      6 |      0 |      0 |      0 |      4 |      2 |      3 |      0 |      3 |     13 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4506500 |      19 |      6 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |      9 |     10 |       2 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        3 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        3 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4506600 |       7 |      0 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4506700 |      12 |      2 |      4 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      5 |      7 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4506800 |       5 |      5 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4508000 |      54 |     14 |     21 |     2 |    0 |     3 |    1 |    0 |     2 |    0 |     11 |    0 |    0 |    0 |    0 |     25 |     29 |       0 |       0 |       1 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        1 |        2 |        0 |       0 |        1 |        0 |        1 |        3 |        4 |        0 |       0 |        0 |        0 |        3 |        2 |        4 |        3 |       0 |        0 |        0 |        0 |        7 |        1 |        1 |       0 |        1 |        0 |        2 |        1 |        0 |        1 |       0 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        1 |        0 |        3 |        0 |       0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      1 |      7 |      0 |      1 |      0 |      0 |     12 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4508100 |      86 |     26 |     22 |     5 |    0 |     4 |    1 |    2 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     48 |     38 |       0 |       6 |       3 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        2 |        2 |        3 |        1 |        3 |       0 |        0 |        0 |        3 |        4 |        3 |        4 |       0 |        1 |        4 |        1 |        4 |        2 |        1 |       1 |        0 |        0 |        0 |        1 |        6 |        1 |       0 |        0 |        2 |        3 |        3 |        3 |        3 |       0 |        1 |        2 |        2 |        3 |        2 |        1 |       0 |        0 |        1 |        2 |        1 |        2 |        2 |       0 |        1 |        0 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |      3 |      6 |      2 |      1 |      0 |     14 |      0 |      0 |      1 |      3 |      2 |      2 |      0 |      0 |     14 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4508300 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4508500 |       9 |      4 |      3 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      6 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4508900 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4509000 |     152 |     32 |     94 |     0 |    0 |     2 |    1 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     77 |     75 |       3 |       4 |       1 |       0 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        1 |        0 |        4 |        2 |        3 |       1 |        0 |        1 |        4 |        6 |        4 |        3 |       1 |        4 |        4 |        4 |       10 |        6 |       14 |      10 |        4 |        3 |        6 |        8 |        5 |        8 |       8 |        1 |        2 |        4 |        2 |        0 |        1 |       0 |        5 |        1 |        1 |        1 |        3 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      3 |      2 |      1 |      0 |      3 |     22 |      0 |      0 |      0 |      6 |     23 |      4 |      2 |      2 |     57 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      1 |     16 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4509100 |      49 |     11 |     28 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     22 |     27 |       2 |       2 |       1 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        0 |        1 |       0 |        1 |        0 |        1 |        1 |        2 |        1 |       1 |        2 |        3 |        2 |        0 |        1 |        3 |       1 |        1 |        1 |        3 |        4 |        2 |        3 |       2 |        0 |        0 |        2 |        3 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      7 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      1 |     20 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     37 | s03      | R    |
| 4509200 |      30 |      8 |     17 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     13 |     17 |       1 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        2 |        1 |        0 |        0 |        3 |       0 |        1 |        3 |        0 |        1 |        1 |        3 |       0 |        1 |        1 |        0 |        2 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      2 |      3 |      1 |      9 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 4509300 |     205 |     60 |    115 |     1 |    0 |     1 |    1 |    0 |     2 |    0 |     25 |    0 |    0 |    0 |    0 |     99 |    106 |       3 |       0 |       3 |       0 |      7 |      9 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        6 |        2 |        7 |        5 |        0 |       4 |        2 |        6 |        5 |        5 |        9 |        4 |       4 |        7 |        6 |        8 |       15 |       11 |        7 |       5 |        2 |        6 |        7 |       16 |       13 |        8 |       4 |        1 |        0 |        2 |        6 |        3 |        0 |       0 |        2 |        3 |        2 |        3 |        2 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |     10 |     10 |      1 |      1 |      4 |     33 |      0 |      0 |      1 |     15 |     17 |      4 |      9 |      5 |     64 |      0 |      0 |      0 |      7 |      1 |      1 |      2 |      2 |     12 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4509400 |      17 |      1 |     16 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |     10 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        1 |        1 |        2 |       1 |        0 |        0 |        1 |        3 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      5 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4509500 |     141 |     26 |     86 |     4 |    0 |     5 |    0 |    0 |     1 |    0 |     19 |    0 |    0 |    0 |    0 |     70 |     71 |       3 |       6 |       3 |       2 |      1 |      9 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        4 |        0 |        0 |        1 |       3 |        2 |        1 |        1 |        4 |        2 |        4 |       3 |        5 |        2 |        8 |        7 |       11 |        7 |       5 |        2 |        3 |        6 |       12 |        6 |        7 |       5 |        3 |        2 |        1 |        2 |        1 |        0 |       0 |        1 |        1 |        3 |        5 |        0 |        0 |       0 |        1 |        0 |        0 |        3 |        2 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      5 |      0 |      0 |      3 |     18 |      0 |      0 |      1 |     14 |     11 |      6 |      1 |      2 |     51 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |     14 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4509600 |      25 |      5 |     10 |     2 |    0 |     0 |    2 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     17 |      8 |       1 |       1 |       1 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        2 |        0 |        3 |        2 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4510000 |     289 |     84 |    160 |     6 |    0 |     5 |    0 |    0 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |    138 |    151 |      25 |       8 |       4 |       2 |      5 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        2 |       11 |        7 |        8 |        8 |       1 |        2 |        5 |       11 |        9 |        9 |        8 |       2 |        2 |        7 |       10 |       15 |       12 |       21 |      11 |        6 |        7 |       10 |       20 |       14 |       18 |       7 |        4 |        2 |        7 |        1 |        3 |        0 |       0 |        2 |        2 |        4 |        4 |        1 |        3 |       1 |        0 |        1 |        0 |        2 |        0 |        2 |       0 |        2 |        2 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      8 |     16 |      6 |      1 |      2 |     51 |      0 |      0 |      1 |     17 |     27 |      8 |      5 |     11 |     91 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      1 |     23 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4510100 |     132 |     30 |     72 |     1 |    0 |     3 |    2 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     64 |     68 |       0 |       3 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        4 |        1 |        3 |       1 |        0 |        1 |        1 |        7 |        6 |        2 |       2 |        1 |        9 |        3 |        4 |        5 |        7 |       4 |        2 |        6 |        6 |       10 |        4 |        9 |       2 |        0 |        1 |        4 |        5 |        5 |        2 |       0 |        2 |        1 |        2 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      2 |      1 |      0 |      4 |     20 |      0 |      0 |      1 |     11 |     11 |      2 |      3 |      0 |     44 |      0 |      0 |      0 |      9 |      2 |      2 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4511000 |     459 |    100 |    267 |     9 |    0 |     2 |    6 |    3 |     1 |    0 |     71 |    0 |    0 |    0 |    0 |    217 |    242 |      10 |      10 |       5 |       1 |      3 |      8 |      7 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |        5 |        7 |        9 |       12 |       11 |       3 |        0 |        7 |        7 |       10 |       13 |        9 |       7 |        7 |        9 |       25 |       19 |       21 |       41 |       7 |        7 |       10 |       27 |       23 |       28 |       30 |      13 |        4 |        4 |        5 |        4 |        4 |        5 |       1 |        7 |        4 |        8 |       12 |        7 |        6 |       0 |        0 |        5 |        3 |        2 |        1 |        3 |       0 |        2 |        0 |        1 |        2 |        1 |        1 |       0 |      0 |      0 |     13 |      9 |      9 |      2 |      8 |     59 |      0 |      0 |      1 |     36 |     42 |      8 |      9 |     17 |    154 |      0 |      0 |      0 |     10 |     15 |      3 |      0 |      0 |     43 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4511100 |     105 |     34 |     48 |     4 |    0 |     2 |    0 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     52 |     53 |       6 |       4 |       1 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        2 |        4 |        2 |        3 |       0 |        2 |        2 |        2 |        8 |        2 |        4 |       0 |        3 |        1 |        4 |        4 |        3 |        6 |       2 |        0 |        2 |        6 |        2 |        3 |        8 |       4 |        2 |        4 |        2 |        2 |        0 |        1 |       0 |        1 |        2 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |     10 |      3 |      0 |      0 |     19 |      0 |      0 |      0 |      5 |     11 |      0 |      1 |      0 |     31 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4512000 |     139 |     30 |     83 |     1 |    0 |     3 |    0 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     63 |     76 |       3 |       2 |       2 |       0 |      2 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        0 |        4 |        1 |        5 |       1 |        0 |        2 |        2 |        5 |        0 |        5 |       3 |        2 |        4 |        6 |        9 |        6 |        8 |       1 |        4 |        2 |       10 |       11 |        6 |       11 |       3 |        2 |        2 |        3 |        3 |        1 |        2 |       0 |        0 |        2 |        3 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |      0 |      2 |      3 |      4 |      2 |      2 |      2 |     15 |      0 |      0 |      0 |     11 |     10 |      4 |      3 |      1 |     54 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4512100 |     310 |     66 |    176 |     6 |    0 |     4 |    2 |    0 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    150 |    160 |      10 |       7 |       6 |       0 |      4 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      1 |        2 |        1 |        4 |        7 |       10 |        7 |       5 |        1 |        3 |        6 |        7 |        7 |        3 |       3 |        4 |        9 |       14 |       19 |       11 |       17 |       9 |        2 |        7 |       18 |       17 |       11 |       20 |      18 |        1 |        3 |        6 |        6 |        6 |        1 |       1 |        5 |        3 |        9 |        6 |        3 |        4 |       1 |        1 |        1 |        1 |        1 |        2 |        1 |       0 |        1 |        0 |        1 |        1 |        1 |        2 |       0 |      0 |      2 |     11 |      2 |      3 |      1 |      3 |     44 |      0 |      0 |      0 |     26 |     21 |     14 |      0 |     12 |    103 |      0 |      0 |      0 |     13 |      4 |      3 |      3 |      1 |     31 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4512200 |      80 |     13 |     42 |     4 |    0 |     0 |    0 |    0 |     1 |    0 |     20 |    0 |    0 |    0 |    0 |     43 |     37 |       0 |       7 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        3 |        0 |        0 |       1 |        0 |        0 |        2 |        2 |        0 |        1 |       1 |        1 |        1 |        7 |        5 |        4 |        1 |       1 |        1 |        2 |        4 |        6 |        4 |        2 |       3 |        1 |        2 |        0 |        6 |        0 |        2 |       0 |        2 |        1 |        1 |        4 |        1 |        0 |       0 |        2 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      5 |      7 |      2 |      0 |      5 |     23 |      0 |      0 |      1 |      3 |      5 |      3 |      0 |      2 |      6 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4512300 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4512400 |      72 |     22 |     44 |     0 |    0 |     0 |    3 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     32 |     40 |       0 |       0 |       0 |       0 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        1 |        2 |        1 |        1 |       1 |        0 |        1 |        2 |        2 |        5 |        3 |       1 |        1 |        1 |        1 |        4 |        7 |        3 |       4 |        3 |        3 |        3 |        4 |        5 |        2 |       3 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      5 |      2 |      1 |      1 |      1 |     12 |      0 |      0 |      1 |      7 |      6 |      2 |      3 |      1 |     24 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4513000 |     378 |     80 |    224 |     6 |    0 |     5 |    2 |    1 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    188 |    190 |      13 |      10 |       7 |       2 |      3 |     11 |      3 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        7 |        9 |        8 |        8 |       2 |        2 |        9 |        4 |       11 |        6 |        6 |       5 |       11 |       11 |       13 |       22 |       20 |       26 |       9 |        7 |        6 |       11 |       23 |       23 |       34 |       8 |        8 |        4 |        6 |        7 |        2 |        4 |       0 |        2 |        5 |        9 |        6 |        6 |        0 |       0 |        0 |        2 |        0 |        3 |        0 |        3 |       0 |        1 |        1 |        1 |        3 |        1 |        0 |       0 |      0 |      0 |     11 |     16 |      3 |      1 |      3 |     46 |      0 |      0 |      2 |     28 |     35 |      8 |      2 |     14 |    135 |      0 |      0 |      0 |      9 |      7 |      1 |      3 |      2 |     37 |      0 |      0 |      0 |      4 |      2 |      3 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4513100 |      73 |     12 |     49 |     1 |    0 |     0 |    3 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     36 |     37 |       1 |       4 |       0 |       0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        0 |        1 |        1 |        1 |        0 |        0 |       1 |        0 |        1 |        3 |        3 |        0 |        1 |       0 |        2 |        3 |        6 |        9 |        2 |        3 |       0 |        0 |        2 |        7 |        8 |        2 |        2 |       3 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |     12 |     13 |      0 |      3 |      0 |     21 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4513200 |     632 |    136 |    376 |     9 |    0 |     6 |    6 |    1 |     0 |    0 |     98 |    0 |    0 |    0 |    0 |    299 |    333 |       5 |      10 |       2 |       0 |      8 |     27 |      6 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        5 |        3 |        5 |       15 |        9 |       11 |       3 |        1 |        6 |       16 |       26 |       18 |       14 |       4 |       13 |        7 |       30 |       43 |       56 |       30 |       5 |       14 |       16 |       37 |       41 |       47 |       29 |       8 |       11 |        8 |        9 |       12 |        9 |        1 |       0 |        9 |        6 |        8 |       10 |       10 |        5 |       0 |        2 |        3 |        2 |        2 |        3 |        2 |       0 |        0 |        1 |        4 |        1 |        0 |        2 |       0 |      0 |      0 |     22 |     19 |      3 |      6 |      6 |     80 |      0 |      0 |      1 |     50 |     66 |     16 |     18 |     18 |    207 |      0 |      0 |      2 |     16 |     15 |      3 |      3 |      1 |     58 |      0 |      0 |      0 |      9 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4513300 |      26 |      5 |     16 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     13 |     13 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        1 |        2 |        4 |        2 |        1 |       0 |        0 |        2 |        3 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4513600 |       3 |      2 |      0 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4513700 |       5 |      0 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4514000 |      49 |     13 |     29 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     23 |     26 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        1 |        1 |       0 |        0 |        0 |        2 |        3 |        1 |        1 |       0 |        0 |        0 |        1 |        4 |        4 |        4 |       0 |        0 |        0 |        1 |        7 |        4 |        4 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      3 |      1 |      0 |      1 |      5 |      0 |      0 |      0 |      2 |      8 |      1 |      0 |      6 |     12 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4514100 |     786 |    197 |    436 |    17 |    0 |     3 |    2 |    2 |     6 |    0 |    123 |    0 |    0 |    0 |    0 |    382 |    404 |       4 |       9 |       9 |       1 |     11 |     14 |      4 |      1 |      2 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      2 |      2 |      0 |      0 |        2 |        2 |       13 |       27 |       22 |       15 |       3 |        7 |        7 |       16 |       25 |       27 |       18 |      13 |       14 |       16 |       46 |       53 |       34 |       48 |      14 |       17 |       19 |       51 |       45 |       27 |       36 |      16 |        5 |        7 |       14 |       11 |       12 |        6 |       2 |       14 |        7 |       19 |       13 |       10 |        2 |       1 |        5 |        4 |        1 |        2 |        1 |        3 |       0 |        3 |        1 |        5 |        4 |        0 |        1 |       0 |      0 |      3 |     23 |     25 |     12 |      7 |     13 |    114 |      0 |      0 |      4 |     39 |     83 |     16 |     17 |     20 |    257 |      0 |      0 |      0 |     25 |      9 |      7 |      1 |      3 |     78 |      0 |      0 |      2 |      3 |      5 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 4514200 |     335 |     70 |    188 |    13 |    0 |     3 |    5 |    0 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    174 |    161 |       7 |       6 |       4 |       0 |      4 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        3 |        4 |       11 |        6 |        8 |       1 |        4 |        2 |        3 |        8 |        9 |        8 |       1 |        9 |        7 |       14 |       22 |       19 |       19 |       9 |        8 |        3 |       13 |       21 |       19 |       18 |       7 |        4 |        4 |        8 |        6 |        3 |        2 |       0 |        2 |        0 |        6 |       13 |        6 |        1 |       0 |        4 |        0 |        4 |        2 |        3 |        0 |       0 |        1 |        0 |        2 |        2 |        4 |        0 |       0 |      0 |      0 |      6 |      9 |      7 |      4 |      6 |     38 |      0 |      0 |      3 |     15 |     27 |      9 |      3 |     16 |    115 |      0 |      0 |      0 |      6 |      6 |      6 |      3 |      4 |     30 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4514300 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4516000 |     291 |     74 |    169 |     4 |    0 |     1 |    0 |    2 |     2 |    0 |     39 |    0 |    0 |    0 |    0 |    138 |    153 |       5 |       4 |       2 |       0 |      2 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        8 |        7 |        6 |        4 |       6 |        1 |        3 |        7 |       11 |        5 |        6 |       6 |        2 |        6 |       14 |       18 |       13 |       20 |       4 |        8 |        4 |       22 |       26 |        9 |       15 |       8 |        4 |        1 |        7 |        4 |        4 |        2 |       0 |        1 |        3 |        4 |        3 |        2 |        4 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        1 |       0 |      0 |      2 |      9 |      6 |      2 |      1 |      6 |     48 |      0 |      0 |      1 |     11 |     26 |      9 |     13 |      9 |    100 |      0 |      0 |      0 |      7 |      8 |      3 |      0 |      2 |     19 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4516100 |     361 |    113 |    193 |     6 |    0 |     9 |    2 |    0 |     2 |    0 |     36 |    0 |    0 |    0 |    0 |    175 |    186 |      13 |       5 |       3 |       0 |      4 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      0 |      6 |      0 |      0 |        4 |        3 |        2 |        8 |       13 |       12 |       7 |        4 |        3 |        9 |       20 |       11 |       12 |       5 |        3 |        6 |       14 |       25 |       21 |       16 |      13 |        5 |       11 |       10 |       17 |       22 |       17 |      13 |        2 |        2 |        3 |        6 |        3 |        1 |       0 |        2 |        2 |       10 |        5 |        0 |        0 |       0 |        0 |        2 |        4 |        1 |        2 |        2 |       0 |        2 |        2 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |     15 |     14 |      4 |      6 |      5 |     69 |      0 |      0 |      1 |     19 |     30 |      7 |      8 |      7 |    121 |      0 |      0 |      0 |      5 |      2 |      5 |      0 |      1 |     23 |      0 |      0 |      0 |      2 |      5 |      2 |      1 |      1 |      8 |      0 |     37 | s03      | R    |
| 4516200 |      99 |     20 |     62 |     3 |    0 |     0 |    2 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     49 |     50 |       4 |       7 |       0 |       1 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        3 |        2 |        2 |        1 |       3 |        0 |        1 |        0 |        3 |        2 |        2 |       1 |        1 |        8 |        7 |        5 |        5 |        3 |       0 |        1 |        5 |        9 |        6 |        7 |        4 |       1 |        1 |        3 |        0 |        1 |        0 |        1 |       0 |        3 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      5 |      0 |      0 |      3 |     12 |      0 |      0 |      1 |      2 |     13 |      3 |      0 |      5 |     38 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 4517000 |     194 |     54 |    102 |     4 |    0 |     2 |    3 |    2 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |     89 |    105 |       2 |       4 |       1 |       1 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      4 |      0 |        0 |        0 |        4 |        7 |        3 |        3 |       3 |        3 |        1 |        8 |       11 |        6 |        3 |       2 |        2 |        2 |        8 |       11 |       11 |       12 |       2 |        4 |        2 |        9 |        7 |       14 |       10 |       8 |        1 |        0 |        4 |        3 |        2 |        3 |       1 |        0 |        1 |        4 |        3 |        1 |        2 |       1 |        2 |        1 |        1 |        2 |        0 |        1 |       0 |        0 |        2 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      5 |      4 |      1 |      0 |      7 |     37 |      0 |      0 |      1 |      8 |     20 |      6 |      3 |     10 |     54 |      0 |      0 |      0 |      2 |      2 |      4 |      3 |      0 |     15 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4517100 |     678 |    165 |    374 |    18 |    0 |     7 |    5 |    3 |     6 |    0 |    100 |    0 |    0 |    0 |    0 |    346 |    332 |       5 |      11 |       0 |       0 |      5 |     20 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      1 |      0 |        5 |        2 |        6 |       22 |       20 |        8 |       7 |        0 |        7 |       16 |       31 |       24 |       12 |       5 |       11 |       14 |       30 |       39 |       56 |       38 |      12 |       16 |       11 |       21 |       43 |       34 |       39 |      10 |        1 |        6 |        9 |       15 |       12 |        9 |       2 |        4 |        4 |        5 |       16 |       13 |        3 |       1 |        6 |        5 |        2 |        3 |        0 |        6 |       0 |        2 |        0 |        6 |        3 |        3 |        3 |       0 |      0 |      5 |     23 |     21 |      6 |      2 |     15 |     93 |      0 |      0 |      1 |     28 |     66 |     16 |     15 |     35 |    213 |      0 |      0 |      2 |     13 |     14 |      6 |      3 |      7 |     55 |      0 |      0 |      0 |      5 |      8 |      5 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 4517300 |     110 |     29 |     61 |     3 |    0 |     2 |    1 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     53 |     57 |       6 |       3 |       0 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        3 |        1 |        2 |        0 |        3 |       0 |        0 |        6 |        5 |        5 |        2 |        1 |       1 |        3 |        0 |        6 |        9 |        3 |        6 |       3 |        4 |        2 |        7 |        7 |        3 |        3 |       5 |        0 |        3 |        1 |        1 |        2 |        1 |       1 |        0 |        0 |        1 |        1 |        2 |        0 |       1 |        1 |        2 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |     10 |      3 |      0 |      2 |      2 |     12 |      0 |      0 |      2 |     10 |      8 |      1 |      1 |      3 |     36 |      0 |      0 |      0 |      4 |      2 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4517400 |     104 |     32 |     54 |     1 |    0 |     0 |    0 |    1 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     48 |     56 |       3 |       3 |       0 |       0 |      1 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        3 |        3 |       3 |        1 |        1 |        2 |        6 |        5 |        2 |       3 |        0 |        2 |        4 |       10 |        4 |        6 |       1 |        1 |        2 |        3 |        6 |        3 |        9 |       3 |        0 |        1 |        1 |        4 |        1 |        1 |       0 |        0 |        0 |        2 |        1 |        3 |        1 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      1 |      8 |      2 |      3 |      0 |     17 |      0 |      0 |      1 |      6 |      8 |      1 |      2 |      3 |     33 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4518000 |     181 |     43 |    107 |     2 |    0 |     2 |    3 |    0 |     2 |    0 |     22 |    0 |    0 |    0 |    0 |     81 |    100 |       3 |       8 |       2 |       0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        1 |        0 |        2 |        3 |        8 |        1 |       1 |        0 |        4 |        4 |        6 |        7 |        5 |       1 |        2 |        5 |        6 |       17 |       12 |        3 |       2 |        5 |        4 |        7 |       22 |        9 |        7 |       6 |        2 |        0 |        2 |        7 |        1 |        0 |       0 |        5 |        0 |        2 |        2 |        0 |        1 |       0 |        3 |        1 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      2 |      2 |      4 |      2 |      0 |      4 |     29 |      0 |      0 |      1 |     10 |     17 |      8 |      2 |     13 |     56 |      0 |      0 |      0 |      6 |      1 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 4518100 |      16 |      9 |      4 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      8 |      8 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4519100 |       4 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4535000 |       2 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4535200 |       3 |      2 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4535300 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4535400 |       4 |      1 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4535500 |     111 |     30 |     65 |     2 |    0 |     0 |    2 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     63 |     48 |       2 |       2 |       2 |       0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        1 |        3 |        4 |        5 |       0 |        1 |        1 |        1 |        4 |        5 |        2 |       0 |        2 |        2 |        5 |        7 |        3 |       13 |       3 |        1 |        0 |        3 |        9 |        6 |       10 |       1 |        0 |        1 |        1 |        5 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      5 |      7 |      2 |      0 |      1 |     15 |      0 |      0 |      0 |      4 |     11 |      2 |      2 |      2 |     44 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4535600 |      74 |     16 |     46 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     34 |     40 |       1 |       1 |       1 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        0 |        1 |        2 |       0 |        0 |        1 |        1 |        2 |        5 |        2 |       0 |        3 |        1 |        4 |        3 |        4 |        5 |       3 |        1 |        2 |        8 |        5 |        2 |        3 |       2 |        2 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        2 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      5 |      0 |      2 |      1 |      8 |      0 |      0 |      0 |      5 |      5 |      2 |      3 |      1 |     30 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4535700 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4535800 |       5 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4536000 |      10 |      1 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      7 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4536100 |       3 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4536200 |      50 |     11 |     20 |     2 |    0 |     1 |    1 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     26 |     24 |       2 |       2 |       1 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        4 |        0 |        1 |        1 |        0 |       0 |        0 |        2 |        3 |        1 |        2 |        1 |       1 |        2 |        0 |        2 |        3 |        1 |        1 |       1 |        2 |        6 |        0 |        1 |        0 |        0 |       0 |        3 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      4 |      0 |      3 |      0 |      1 |     12 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4536900 |      37 |      4 |     24 |     0 |    0 |     0 |    0 |    0 |     2 |    0 |      7 |    0 |    0 |    0 |    0 |     24 |     13 |       0 |       5 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        5 |        4 |        2 |        3 |        4 |        0 |       0 |        2 |        0 |        1 |        3 |        0 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      4 |      6 |      1 |      4 |      0 |      9 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4537100 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4537300 |       8 |      0 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        0 |        0 |        2 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4545800 |       6 |      1 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        1 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4546000 |     446 |    120 |    240 |     6 |    0 |     8 |    2 |    0 |     0 |    0 |     70 |    0 |    0 |    0 |    0 |    177 |    269 |      14 |      14 |       3 |       0 |      8 |      9 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        1 |        6 |        2 |        7 |        5 |       16 |       0 |        2 |        7 |       10 |       15 |       11 |       38 |       0 |        3 |       17 |       19 |       12 |        8 |       44 |       2 |        7 |       12 |       14 |       16 |       17 |       59 |      10 |        1 |        4 |        6 |        4 |        5 |        6 |       0 |        2 |        8 |        4 |       12 |        8 |        9 |       1 |        1 |        3 |        1 |        1 |        2 |        1 |       0 |        1 |        1 |        1 |        2 |        1 |        1 |       0 |      0 |      0 |     12 |     22 |      5 |      4 |      7 |     70 |      0 |      0 |      2 |     20 |     39 |     12 |      2 |     12 |    153 |      0 |      0 |      1 |      7 |     12 |      1 |      3 |      3 |     43 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 4546100 |     662 |    173 |    351 |    18 |    0 |     8 |    6 |    2 |     5 |    0 |     99 |    0 |    0 |    0 |    0 |    307 |    355 |      14 |      27 |       3 |       3 |      7 |      8 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |       5 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |        2 |        9 |       19 |       12 |       13 |        7 |       6 |        8 |        8 |       23 |       27 |       17 |       19 |       3 |       16 |       29 |       39 |       36 |       31 |       21 |       0 |       16 |       28 |       37 |       38 |       18 |       38 |       4 |        5 |        4 |       11 |        8 |        8 |        6 |       1 |       15 |       10 |       10 |       12 |        3 |        6 |       0 |        3 |        7 |        2 |        7 |        2 |        3 |       0 |        5 |        3 |        2 |        2 |        2 |        1 |       0 |      0 |      3 |     21 |     30 |      6 |      2 |      8 |    103 |      0 |      0 |      3 |     51 |     50 |     11 |     11 |     16 |    209 |      0 |      0 |      0 |     12 |     15 |      5 |      2 |      7 |     58 |      0 |      0 |      0 |      5 |     11 |      2 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 4546200 |     298 |     51 |    197 |     4 |    0 |     3 |    3 |    0 |     2 |    0 |     38 |    0 |    0 |    0 |    0 |    133 |    165 |       4 |       3 |       0 |       1 |      0 |     10 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        1 |        2 |        2 |       11 |       0 |        2 |        0 |        2 |        6 |        6 |       14 |       2 |        2 |        5 |        6 |        8 |       16 |       45 |       3 |        2 |        9 |        8 |        9 |       19 |       56 |       9 |        2 |        3 |        2 |        5 |        2 |        7 |       0 |        1 |        4 |        1 |        4 |        1 |        6 |       0 |        0 |        0 |        1 |        0 |        2 |        5 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |      0 |      1 |      6 |      4 |      6 |      3 |      4 |     27 |      0 |      0 |      1 |     24 |     28 |      6 |      7 |      9 |    122 |      0 |      0 |      3 |      6 |      7 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4546300 |     719 |    160 |    427 |    14 |    0 |     1 |    1 |    2 |     5 |    0 |    109 |    0 |    0 |    0 |    0 |    342 |    377 |      25 |      22 |      12 |       3 |      6 |     20 |      7 |      1 |      0 |      1 |      1 |      0 |      1 |      3 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       4 |       5 |       1 |       0 |      3 |      1 |      3 |      1 |        1 |       11 |       13 |       25 |       10 |        8 |       0 |        4 |       18 |       17 |       26 |       15 |       12 |       0 |       13 |       32 |       61 |       54 |       32 |       16 |       1 |       20 |       36 |       60 |       47 |       31 |       24 |       0 |        6 |       10 |       10 |       11 |        9 |        7 |       0 |        4 |        6 |       18 |       17 |        1 |       10 |       0 |        2 |        3 |        3 |        1 |        3 |        0 |       0 |        0 |        1 |        4 |        3 |        1 |        2 |       0 |      0 |      1 |     16 |     21 |      7 |      4 |      6 |    105 |      0 |      0 |      3 |     59 |     55 |     18 |      5 |     28 |    259 |      0 |      0 |      3 |     15 |     15 |      8 |      1 |      5 |     62 |      0 |      0 |      2 |      3 |      1 |      2 |      0 |      3 |     12 |      0 |     37 | s03      | R    |
| 4546400 |     626 |    152 |    378 |     8 |    0 |     5 |    3 |    0 |     2 |    0 |     78 |    0 |    0 |    0 |    0 |    290 |    336 |      17 |      13 |       5 |       0 |      9 |     27 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |       2 |       0 |       1 |       0 |      1 |      4 |      0 |      0 |        0 |        6 |        8 |        7 |       11 |       32 |       2 |        0 |       10 |       12 |       17 |       15 |       31 |       1 |       13 |        9 |       19 |       31 |       27 |       68 |       5 |        9 |       17 |       26 |       39 |       19 |       88 |       8 |        3 |        3 |        8 |        9 |        8 |       12 |       0 |        3 |        3 |        6 |        8 |        3 |       12 |       0 |        0 |        3 |        2 |        1 |        1 |        2 |       0 |        3 |        0 |        2 |        0 |        3 |        1 |       0 |      0 |      1 |     21 |     17 |      6 |      4 |      7 |     96 |      0 |      0 |      0 |     35 |     56 |     21 |     16 |     36 |    214 |      0 |      0 |      2 |     12 |      9 |      1 |      1 |      3 |     50 |      0 |      0 |      0 |      0 |      7 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4546500 |     459 |    123 |    244 |    11 |    0 |     1 |    0 |    2 |     5 |    0 |     73 |    0 |    0 |    0 |    0 |    196 |    263 |      25 |      14 |       8 |       2 |      3 |     12 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |       11 |       10 |        8 |        3 |        5 |       2 |        9 |        9 |       17 |       19 |       11 |       13 |       4 |       10 |       20 |       24 |       35 |       12 |       11 |       2 |        8 |       21 |       29 |       35 |       12 |       21 |       4 |        8 |        7 |        6 |        7 |        3 |        2 |       0 |       10 |        8 |        6 |       11 |        1 |        3 |       1 |        2 |        0 |        6 |        0 |        0 |        0 |       0 |        0 |        2 |        3 |        1 |        3 |        2 |       0 |      0 |      1 |     14 |     22 |      8 |      6 |      6 |     66 |      0 |      0 |      5 |     37 |     29 |     14 |      8 |      5 |    146 |      0 |      0 |      0 |     14 |      4 |      2 |      2 |      1 |     50 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4546600 |     312 |     77 |    179 |     9 |    0 |     0 |    2 |    1 |     2 |    0 |     42 |    0 |    0 |    0 |    0 |    136 |    176 |       6 |       3 |       9 |       0 |      4 |      9 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       7 |       0 |       0 |      0 |      2 |      2 |      0 |        2 |        0 |        5 |        4 |        3 |       15 |       0 |        3 |        4 |        7 |        2 |        6 |       26 |       0 |        6 |        3 |       10 |       15 |       12 |       34 |       0 |        3 |        5 |       12 |       10 |       14 |       54 |       1 |        2 |        0 |        4 |        6 |        2 |        7 |       0 |        2 |        3 |        8 |        2 |        2 |        4 |       0 |        1 |        1 |        0 |        1 |        0 |        3 |       0 |        1 |        1 |        0 |        2 |        0 |        4 |       0 |      0 |      2 |      8 |     14 |      4 |      4 |      2 |     43 |      0 |      0 |      3 |     25 |     31 |     12 |     10 |      3 |     95 |      0 |      0 |      0 |      8 |      5 |      1 |      2 |      0 |     26 |      0 |      0 |      0 |      2 |      0 |      4 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4546700 |     520 |    102 |    332 |     5 |    0 |     0 |    1 |    0 |     0 |    0 |     80 |    0 |    0 |    0 |    0 |    247 |    273 |      14 |      13 |       4 |       0 |      2 |      7 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      5 |      4 |      2 |      0 |        3 |        5 |        6 |        7 |        7 |       10 |       5 |        2 |        5 |        9 |       17 |        8 |       14 |       4 |        5 |       17 |       21 |       32 |       31 |       51 |       3 |        7 |       24 |       17 |       31 |       43 |       44 |       6 |        3 |        5 |        7 |       13 |        5 |        6 |       1 |        5 |        6 |        6 |        7 |        0 |       13 |       3 |        0 |        0 |        0 |        2 |        0 |        2 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      3 |      9 |     14 |      6 |      4 |      5 |     61 |      0 |      0 |      3 |     48 |     63 |     28 |     13 |     33 |    144 |      0 |      0 |      1 |     14 |      8 |      6 |      4 |      0 |     47 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4546800 |     337 |     80 |    177 |    10 |    0 |     2 |    1 |    1 |     1 |    0 |     65 |    0 |    0 |    0 |    0 |    140 |    197 |       8 |      12 |       6 |       0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        8 |        3 |        4 |        6 |        8 |       0 |        6 |        8 |        8 |        8 |       10 |       10 |       1 |        9 |       16 |       13 |        9 |       15 |       14 |       0 |        5 |       14 |       10 |       22 |       25 |       24 |       1 |        2 |       10 |        4 |        7 |        2 |        0 |       0 |       11 |       10 |        6 |        6 |        4 |        3 |       0 |        0 |        6 |        0 |        2 |        2 |        0 |       0 |        3 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     12 |      4 |      1 |      0 |      7 |     56 |      0 |      0 |      1 |     15 |     27 |      8 |      3 |      7 |    116 |      0 |      0 |      0 |      6 |      3 |      0 |      1 |      0 |     55 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4546900 |     904 |    330 |    370 |    20 |    0 |    10 |    6 |    0 |     8 |    0 |    160 |    0 |    0 |    0 |    0 |    319 |    585 |      45 |      20 |      17 |       5 |     25 |     19 |      8 |      1 |      3 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       4 |       6 |       0 |      3 |      5 |      0 |      0 |        6 |       13 |       17 |       18 |        7 |       37 |       0 |       11 |       39 |       22 |       24 |       23 |      111 |       2 |       14 |       38 |       15 |       12 |       16 |       51 |       0 |       27 |       36 |       24 |       14 |       18 |      103 |       2 |        6 |       16 |        4 |        8 |        8 |       11 |       0 |       25 |       26 |       10 |        8 |       11 |       27 |       0 |        3 |        6 |        2 |        4 |        4 |        3 |       0 |        2 |        8 |        2 |        3 |        1 |        6 |       0 |      0 |      4 |     59 |     33 |      8 |      1 |      7 |    218 |      0 |      0 |      8 |     54 |     28 |     10 |      9 |      4 |    257 |      0 |      0 |      4 |     30 |      6 |      4 |      1 |      0 |    115 |      0 |      0 |      1 |      6 |      4 |      1 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 4547000 |     557 |    184 |    270 |     9 |    0 |     2 |    1 |    1 |     2 |    0 |     88 |    0 |    0 |    0 |    0 |    225 |    332 |      17 |      10 |       2 |       1 |     11 |     10 |      6 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      3 |      0 |        1 |        5 |        4 |        6 |        5 |       47 |       5 |        6 |       13 |        8 |        1 |       13 |       67 |       3 |        1 |       15 |        8 |        8 |       10 |       60 |       5 |       12 |       13 |        8 |        8 |       17 |       97 |       8 |        4 |        7 |        4 |        3 |        6 |       11 |       2 |        7 |        8 |        1 |        3 |        6 |       26 |       0 |        2 |        2 |        0 |        1 |        0 |        3 |       0 |        0 |        1 |        0 |        0 |        2 |        4 |       0 |      0 |      1 |     30 |     26 |      5 |      7 |     12 |    103 |      0 |      0 |      5 |     32 |     40 |     12 |      4 |     15 |    162 |      0 |      0 |      0 |     10 |     15 |      4 |      2 |      0 |     57 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4547100 |     541 |    140 |    267 |    16 |    0 |     9 |    4 |    2 |     3 |    0 |    100 |    0 |    0 |    0 |    0 |    268 |    273 |      49 |      28 |      21 |       6 |      1 |     11 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |       3 |       0 |       1 |       0 |      3 |      2 |      0 |      1 |        4 |        5 |       17 |       19 |        2 |       10 |       3 |        7 |       14 |       17 |       23 |        9 |        8 |       2 |       10 |       20 |       37 |       31 |       23 |       15 |       2 |       18 |       19 |       32 |       25 |       16 |       13 |       6 |        8 |       16 |       10 |        9 |        4 |        1 |       0 |       12 |       13 |       13 |        6 |        6 |        1 |       1 |        3 |        9 |        3 |        4 |        1 |        2 |       0 |        1 |        6 |        2 |        0 |        0 |        3 |       0 |      0 |      1 |     26 |      8 |      5 |      3 |      6 |     91 |      0 |      0 |      5 |     23 |     44 |     13 |      8 |     23 |    151 |      0 |      0 |      3 |     15 |      7 |      5 |      2 |      3 |     65 |      0 |      0 |      2 |      5 |      7 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4547200 |     737 |    239 |    316 |    17 |    0 |    11 |    5 |    6 |     3 |    0 |    140 |    0 |    0 |    0 |    0 |    311 |    426 |      37 |      23 |      14 |       5 |     13 |      9 |      9 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      2 |      0 |      0 |      0 |       1 |       1 |       5 |       0 |      1 |      3 |      0 |      0 |        5 |       22 |       15 |       13 |       13 |       19 |       1 |        8 |       21 |       20 |       21 |       28 |       49 |       4 |        7 |       24 |       19 |       31 |       17 |       36 |       2 |       11 |       21 |       13 |       28 |       32 |       73 |       2 |        8 |       19 |        9 |       12 |        8 |        8 |       0 |        9 |       20 |       15 |       11 |        7 |       14 |       0 |        2 |        6 |        5 |        6 |        3 |        1 |       0 |        0 |        6 |        4 |        5 |        2 |        2 |       0 |      0 |      0 |     37 |     32 |      6 |      5 |      4 |    155 |      0 |      0 |      3 |     55 |     35 |     14 |      6 |      6 |    197 |      0 |      0 |      2 |     20 |     12 |      4 |      1 |      2 |     99 |      0 |      0 |      2 |      7 |      7 |      0 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 4547300 |     110 |     22 |     56 |     4 |    0 |     1 |    1 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     44 |     66 |       3 |       4 |       0 |       0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        2 |        1 |       1 |        0 |        3 |        3 |        1 |        3 |        2 |       1 |        1 |        8 |        6 |        2 |        4 |        1 |       1 |        0 |        7 |        4 |        9 |        7 |        5 |       1 |        3 |        0 |        2 |        3 |        1 |        1 |       0 |        1 |        7 |        1 |        4 |        3 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |     19 |      0 |      0 |      1 |      8 |      5 |      1 |      0 |      0 |     41 |      0 |      0 |      0 |      5 |      1 |      2 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4547500 |       4 |      3 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4547600 |     601 |    122 |    358 |    13 |    0 |     2 |    9 |    1 |     3 |    0 |     93 |    0 |    0 |    0 |    0 |    285 |    316 |      13 |      20 |       2 |       3 |      3 |     12 |      9 |      0 |      1 |      1 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      1 |      1 |      0 |       1 |       0 |       1 |       0 |      8 |      8 |      4 |      1 |        2 |        2 |       10 |       21 |       10 |        6 |       0 |        5 |       14 |       14 |       15 |       16 |        6 |       1 |        3 |       15 |       54 |       40 |       27 |       35 |       0 |        7 |       22 |       58 |       44 |       30 |       23 |       0 |        4 |        3 |       12 |       16 |       13 |        1 |       0 |        5 |       10 |       16 |        7 |        6 |        0 |       0 |        4 |        3 |        1 |        0 |        2 |        1 |       0 |        0 |        3 |        4 |        7 |        2 |        1 |       0 |      0 |      1 |     20 |     43 |      5 |      0 |      0 |     53 |      0 |      0 |      6 |     57 |    139 |     15 |      2 |      2 |    137 |      0 |      0 |      2 |     13 |     24 |      1 |      0 |      0 |     53 |      0 |      0 |      1 |      2 |      8 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4547700 |     272 |     60 |    173 |     6 |    0 |     4 |    0 |    0 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |    116 |    156 |       4 |       6 |       4 |       0 |      3 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      0 |      4 |      2 |      0 |        0 |        0 |        0 |        4 |        0 |       17 |       2 |        1 |        1 |        2 |        6 |        3 |       24 |       0 |        5 |        1 |        9 |       17 |       10 |       36 |       1 |        2 |        4 |       10 |        5 |       11 |       59 |       3 |        1 |        0 |        0 |        2 |        0 |        6 |       0 |        2 |        2 |        4 |        4 |        2 |        6 |       0 |        1 |        1 |        1 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        2 |        0 |        2 |       0 |      0 |      0 |      4 |     14 |     11 |      1 |      9 |     21 |      0 |      0 |      0 |     18 |     34 |     16 |     11 |     12 |     82 |      0 |      0 |      1 |      5 |      5 |      5 |      2 |      0 |     11 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4547800 |     227 |     56 |     95 |     9 |    0 |     7 |    1 |    2 |     3 |    0 |     54 |    0 |    0 |    0 |    0 |     96 |    131 |       8 |       5 |       9 |       2 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        4 |        6 |        3 |        1 |        4 |        1 |       0 |        5 |       10 |        6 |        5 |        9 |        2 |       0 |        4 |       20 |       10 |        6 |        6 |        1 |       0 |       10 |       16 |       10 |        6 |        4 |        2 |       0 |        3 |        7 |        9 |        1 |        1 |        1 |       0 |        7 |       14 |        5 |        3 |        2 |        1 |       0 |        1 |        3 |        1 |        2 |        1 |        0 |       0 |        2 |        5 |        0 |        2 |        3 |        2 |       0 |      0 |      0 |      6 |     11 |      2 |      0 |      0 |     37 |      0 |      0 |      0 |     16 |      3 |      0 |      1 |      0 |     75 |      0 |      0 |      1 |      7 |      1 |      2 |      0 |      0 |     43 |      0 |      0 |      1 |      6 |      2 |      1 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 4547900 |     154 |     45 |     85 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     60 |     94 |       0 |       2 |       1 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        0 |        1 |        1 |        2 |       13 |       1 |        0 |        1 |        4 |        3 |        5 |       14 |       0 |        0 |        3 |        4 |        4 |        6 |       18 |       0 |        0 |        2 |        1 |        8 |       13 |       26 |       0 |        0 |        0 |        1 |        1 |        1 |        4 |       0 |        0 |        1 |        3 |        2 |        1 |        8 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      1 |      6 |      4 |      2 |      3 |      3 |     26 |      0 |      0 |      0 |     11 |     12 |      4 |      5 |      7 |     46 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4548000 |     392 |    108 |    180 |    15 |    0 |     4 |    5 |    2 |     2 |    0 |     76 |    0 |    0 |    0 |    0 |    185 |    207 |      17 |      15 |       8 |       1 |      1 |      2 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        8 |        7 |       12 |        6 |       10 |       2 |        6 |       10 |       11 |       16 |        6 |        8 |       5 |        8 |       17 |       19 |       25 |        9 |       12 |       2 |        6 |       12 |       19 |       24 |       10 |       13 |       4 |        2 |        9 |        8 |        7 |        3 |        5 |       0 |        7 |       10 |        6 |        9 |        4 |        5 |       1 |        2 |        3 |        5 |        2 |        0 |        1 |       0 |        3 |        2 |        4 |        5 |        1 |        0 |       0 |      0 |      1 |     14 |     12 |      6 |      6 |      3 |     66 |      0 |      0 |      1 |     27 |     30 |      3 |      8 |      8 |    103 |      0 |      0 |      1 |     18 |      4 |      5 |      1 |      3 |     44 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      2 |     18 |      0 |     37 | s03      | R    |
| 4548100 |     181 |     45 |     84 |     6 |    0 |     2 |    4 |    0 |     2 |    0 |     38 |    0 |    0 |    0 |    0 |     84 |     97 |      12 |       2 |       3 |       3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        4 |        8 |        3 |        3 |       1 |        2 |        2 |        5 |        7 |        4 |        4 |       0 |        0 |        2 |       10 |       11 |        9 |        7 |       2 |        2 |        7 |       11 |       11 |        4 |        5 |       3 |        3 |        0 |        4 |        7 |        0 |        1 |       0 |        7 |        5 |        6 |        2 |        2 |        1 |       0 |        1 |        2 |        2 |        2 |        0 |        0 |       0 |        3 |        1 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      2 |      3 |      1 |      2 |     36 |      0 |      0 |      1 |      6 |     15 |      3 |      3 |      7 |     49 |      0 |      0 |      2 |      3 |      6 |      1 |      2 |      1 |     23 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4548200 |     295 |     62 |    167 |     8 |    0 |     2 |    4 |    1 |     0 |    0 |     51 |    0 |    0 |    0 |    0 |    127 |    168 |      10 |       9 |       6 |       2 |      3 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |       1 |       3 |       1 |       0 |      0 |      4 |      2 |      2 |        1 |        5 |        2 |        3 |        3 |        8 |       0 |        1 |        5 |        4 |        2 |        6 |       22 |       0 |        8 |        8 |       13 |       12 |       10 |       27 |       0 |        8 |        9 |       19 |        7 |       13 |       32 |       1 |        1 |        4 |        5 |        6 |        3 |        2 |       0 |        3 |        9 |        5 |        3 |        4 |        6 |       0 |        0 |        3 |        0 |        0 |        1 |        2 |       0 |        0 |        1 |        1 |        2 |        1 |        4 |       0 |      0 |      0 |      7 |     10 |      3 |      2 |      6 |     34 |      0 |      0 |      7 |     22 |     26 |      9 |      8 |      8 |     87 |      0 |      0 |      2 |      8 |      9 |      2 |      4 |      0 |     26 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4548300 |     204 |     53 |    109 |     6 |    0 |     1 |    1 |    0 |     3 |    0 |     31 |    0 |    0 |    0 |    0 |     99 |    105 |       6 |      13 |       3 |       3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       5 |       0 |       1 |      2 |      1 |      0 |      1 |        3 |        4 |        2 |        7 |        5 |        3 |       0 |        3 |        7 |        6 |        7 |        4 |        2 |       0 |        6 |       16 |       14 |       12 |        5 |        2 |       0 |        7 |       12 |       12 |       12 |        9 |        2 |       0 |        4 |        3 |        0 |        3 |        2 |        2 |       0 |        6 |        4 |        2 |        3 |        1 |        1 |       0 |        1 |        3 |        1 |        0 |        0 |        1 |       0 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |      0 |      1 |      9 |      4 |      1 |      1 |      1 |     36 |      0 |      0 |      2 |     15 |      9 |      5 |      1 |      4 |     73 |      0 |      0 |      0 |      7 |      1 |      1 |      1 |      3 |     18 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 4548400 |     127 |     33 |     80 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     57 |     70 |       0 |       0 |       0 |       0 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        3 |       11 |       0 |        0 |        0 |        1 |        1 |        3 |       11 |       0 |        0 |        2 |        0 |        4 |        5 |       23 |       0 |        1 |        0 |        1 |        3 |        6 |       35 |       0 |        0 |        0 |        0 |        0 |        1 |        5 |       0 |        1 |        0 |        0 |        1 |        1 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      4 |      5 |      0 |      9 |     14 |      0 |      0 |      0 |     12 |     13 |      3 |      4 |     18 |     30 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4548500 |     246 |     58 |    142 |     5 |    0 |     2 |    1 |    0 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |    115 |    131 |       1 |       7 |       2 |       0 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        5 |       15 |       0 |        0 |        0 |        4 |        5 |        9 |       14 |       1 |        6 |        6 |        6 |        7 |        8 |       30 |       2 |        3 |        6 |        5 |       10 |       16 |       37 |       0 |        3 |        2 |        1 |        3 |        5 |        5 |       0 |        1 |        3 |        4 |        5 |        0 |        6 |       0 |        0 |        1 |        2 |        0 |        0 |        3 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |     10 |      7 |      7 |      3 |      2 |     28 |      0 |      0 |      1 |     12 |     21 |     11 |     14 |     18 |     65 |      0 |      0 |      0 |      2 |      3 |      2 |      2 |      5 |     24 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4548600 |     117 |     20 |     78 |     3 |    0 |     0 |    0 |    0 |     1 |    0 |     15 |    0 |    0 |    0 |    0 |     59 |     58 |       2 |       3 |       0 |       0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        2 |        5 |       0 |        0 |        5 |        2 |        0 |        0 |        3 |       0 |        2 |        5 |       10 |        8 |        7 |        6 |       2 |        4 |        7 |        6 |        5 |       11 |        4 |       1 |        0 |        0 |        2 |        4 |        1 |        1 |       0 |        0 |        2 |        3 |        0 |        2 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        1 |       0 |      0 |      2 |      1 |      2 |      1 |      0 |      0 |     14 |      0 |      0 |      1 |     10 |      7 |      5 |      0 |      2 |     53 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4548900 |      30 |     11 |     12 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     14 |     16 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        1 |        2 |       0 |        0 |        0 |        1 |        2 |        1 |        2 |       0 |        0 |        1 |        3 |        0 |        1 |        2 |       0 |        0 |        1 |        0 |        0 |        1 |        3 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      3 |      0 |      5 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4549000 |     379 |     94 |    204 |     3 |    0 |     4 |    3 |    0 |     4 |    0 |     67 |    0 |    0 |    0 |    0 |    196 |    183 |      16 |       5 |       7 |       0 |      4 |      9 |      3 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        3 |        6 |        6 |       12 |        6 |       3 |        5 |        6 |       16 |       14 |        6 |        7 |       2 |        6 |       11 |       33 |       25 |       14 |       12 |       7 |        6 |       10 |       30 |       17 |       15 |       12 |       6 |        4 |        3 |       15 |       11 |        4 |        1 |       0 |        5 |        7 |        7 |        3 |        6 |        1 |       0 |        5 |        1 |        1 |        2 |        1 |        1 |       1 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |     12 |     20 |      2 |      1 |      4 |     53 |      0 |      0 |      2 |     23 |     36 |     10 |     12 |     11 |    110 |      0 |      0 |      0 |     16 |     10 |      6 |      0 |      2 |     33 |      0 |      0 |      0 |      4 |      1 |      1 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4549100 |       6 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      5 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4549300 |      13 |      2 |      7 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      6 |      7 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4549400 |       7 |      3 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4549700 |     255 |     62 |    143 |     7 |    0 |     6 |    0 |    1 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |    124 |    131 |      16 |       5 |       6 |       0 |      0 |      3 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       2 |       1 |       0 |      0 |      1 |      2 |      0 |        0 |        6 |        4 |        4 |        4 |        3 |       2 |        4 |        4 |        6 |        9 |        6 |        7 |       3 |       10 |        8 |       19 |       15 |        9 |        6 |       7 |        1 |        9 |       18 |       19 |        9 |        6 |       7 |        3 |        0 |        4 |        6 |        3 |        2 |       0 |        0 |        5 |        4 |        3 |        2 |        1 |       1 |        0 |        1 |        0 |        3 |        2 |        3 |       0 |        1 |        0 |        4 |        0 |        0 |        2 |       0 |      0 |      2 |      6 |     14 |      1 |      3 |      2 |     34 |      0 |      0 |      1 |     20 |     19 |      7 |      3 |     10 |     83 |      0 |      0 |      0 |      2 |      5 |      2 |      2 |      1 |     22 |      0 |      0 |      0 |      3 |      6 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4549800 |      31 |      8 |     16 |     0 |    0 |     1 |    2 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     15 |     16 |       5 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        2 |        0 |        0 |        0 |        1 |       0 |        2 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        2 |        2 |        1 |        2 |        0 |       0 |        0 |        1 |        2 |        3 |        2 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4549900 |     217 |     46 |    126 |     4 |    0 |     4 |    1 |    0 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |    109 |    108 |       6 |      11 |       4 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        1 |        2 |        6 |       4 |        3 |        2 |        3 |        2 |        3 |        9 |       7 |        3 |       11 |       15 |       11 |        3 |       14 |       8 |        7 |        6 |        9 |        8 |       10 |        8 |      13 |        2 |        4 |        7 |        3 |        3 |        1 |       0 |        0 |        2 |        4 |        3 |        0 |        4 |       1 |        1 |        0 |        2 |        2 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      2 |      3 |      0 |      3 |      0 |     38 |      0 |      0 |      0 |     19 |      8 |      5 |      3 |      6 |     85 |      0 |      0 |      0 |      7 |      3 |      1 |      4 |      1 |     18 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4550000 |     494 |    150 |    216 |    16 |    0 |     7 |    3 |    0 |     0 |    0 |    102 |    0 |    0 |    0 |    0 |    229 |    265 |      45 |      26 |      17 |       2 |      5 |     14 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |       0 |       1 |       0 |       0 |      0 |      2 |      4 |      0 |        5 |        8 |       11 |       18 |        6 |        8 |       9 |        7 |       13 |       13 |       17 |       14 |       10 |      11 |       10 |       14 |       36 |       24 |        9 |        9 |       9 |        5 |       20 |       24 |       14 |       15 |       17 |      10 |        5 |       16 |        9 |        4 |        8 |        0 |       0 |        8 |       24 |       13 |        8 |        3 |        2 |       2 |        0 |        0 |        2 |        5 |        3 |        1 |       0 |        2 |        3 |        6 |        1 |        1 |        2 |       0 |      0 |      5 |     24 |     22 |      8 |      1 |      1 |     89 |      0 |      0 |      2 |     25 |     37 |     12 |      8 |      6 |    126 |      0 |      0 |      1 |     16 |     12 |      6 |      3 |      5 |     59 |      0 |      0 |      0 |      4 |      8 |      4 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4550100 |     620 |    181 |    304 |    29 |    0 |     4 |    1 |    4 |     3 |    0 |     94 |    0 |    0 |    0 |    0 |    284 |    336 |      27 |      15 |      16 |       1 |     10 |     13 |      6 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      2 |      1 |       0 |       6 |       0 |       0 |      2 |      1 |      0 |      0 |        4 |       10 |       12 |       18 |       15 |       21 |       2 |        4 |        7 |       19 |       27 |       11 |       26 |       5 |       11 |       14 |       32 |       38 |       24 |       21 |       3 |       17 |       15 |       32 |       35 |       25 |       35 |       2 |        6 |        9 |        9 |        8 |        6 |        4 |       2 |       10 |       10 |       12 |        5 |        7 |        4 |       2 |        1 |        1 |        5 |        6 |        1 |        1 |       0 |        1 |        6 |        4 |       10 |        2 |        3 |       0 |      0 |      3 |     20 |     28 |     10 |     14 |     10 |     96 |      0 |      0 |      7 |     41 |     52 |     12 |     19 |     28 |    145 |      0 |      0 |      0 |     15 |     11 |      4 |      3 |      2 |     59 |      0 |      0 |      1 |      6 |      8 |      2 |      1 |      0 |     23 |      0 |     37 | s03      | R    |
| 4550200 |     324 |    106 |    150 |     9 |    0 |     5 |    0 |    0 |     0 |    0 |     54 |    0 |    0 |    0 |    0 |    158 |    166 |      35 |      15 |       8 |       3 |      2 |      8 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        3 |        7 |       10 |       12 |        4 |        6 |       5 |        4 |       10 |       12 |       12 |        7 |        6 |       8 |        3 |       12 |       19 |       14 |       11 |        7 |       6 |        8 |       13 |       14 |       14 |       18 |        7 |       4 |        6 |        4 |        7 |        5 |        5 |        2 |       1 |        4 |        4 |        5 |        4 |        2 |        4 |       1 |        2 |        3 |        1 |        1 |        1 |        1 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |      0 |      2 |     11 |      9 |      4 |      4 |      1 |     75 |      0 |      0 |      4 |     23 |     18 |      3 |      3 |      5 |     94 |      0 |      0 |      0 |      6 |      8 |      6 |      0 |      2 |     32 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4550300 |     239 |     55 |    138 |     4 |    0 |     0 |    0 |    0 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |    112 |    127 |       5 |       8 |       3 |       0 |      3 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        2 |        0 |        2 |        7 |        3 |        1 |       1 |        6 |        3 |        7 |       10 |        6 |        5 |       2 |        3 |        9 |       15 |       23 |        8 |       12 |       2 |        3 |        2 |       22 |       20 |        8 |        7 |       4 |        3 |        2 |        6 |        4 |        4 |        1 |       0 |        6 |        3 |        6 |        3 |        3 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      5 |      2 |      0 |     12 |     31 |      0 |      0 |      0 |     12 |     26 |      5 |      5 |     22 |     68 |      0 |      0 |      0 |      4 |      4 |      2 |      1 |      3 |     28 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4550400 |     473 |    110 |    242 |    11 |    0 |     3 |    4 |    1 |     3 |    0 |     99 |    0 |    0 |    0 |    0 |    211 |    262 |      11 |      12 |      10 |       3 |      4 |      9 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      1 |      0 |        2 |        5 |        8 |       10 |        8 |        8 |       0 |        2 |       13 |       19 |       17 |       11 |        7 |       0 |        6 |       16 |       31 |       23 |       26 |       12 |       0 |        7 |       21 |       23 |       36 |       21 |       20 |       0 |        7 |        5 |       12 |       11 |        5 |        7 |       1 |       10 |        8 |       15 |       12 |        2 |        4 |       0 |        3 |        0 |        1 |        3 |        0 |        1 |       0 |        2 |        1 |        3 |        6 |        1 |        1 |       0 |      0 |      1 |     19 |     22 |      5 |      3 |      7 |     53 |      0 |      0 |      8 |     36 |     38 |     18 |      6 |     18 |    118 |      0 |      0 |      5 |     13 |      4 |      5 |      1 |      5 |     66 |      0 |      0 |      0 |      1 |      1 |      2 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 4550500 |      66 |     13 |     46 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     36 |     30 |       2 |       3 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        0 |        1 |        2 |        0 |        1 |       1 |        0 |        0 |        1 |        3 |        1 |        1 |       1 |        2 |        4 |        7 |        7 |        3 |        3 |       0 |        0 |        2 |        4 |        3 |        4 |        6 |       1 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      3 |      0 |      2 |      4 |      0 |      0 |      0 |      8 |      6 |      2 |      0 |      6 |     24 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4550600 |      85 |     31 |     38 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     42 |     43 |       7 |       3 |       4 |       0 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       3 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        8 |        5 |        2 |        0 |       0 |        2 |        4 |        6 |        1 |        1 |        1 |       0 |        3 |        2 |        7 |        7 |        0 |        2 |       0 |        3 |        1 |        6 |        4 |        1 |        2 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       1 |        2 |        0 |        2 |        1 |        1 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      7 |      3 |      0 |      0 |     19 |      0 |      0 |      2 |      4 |      5 |      1 |      4 |      0 |     22 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4550700 |     182 |     31 |    110 |     7 |    0 |     3 |    1 |    0 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     89 |     93 |       4 |      17 |       5 |       1 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        2 |        1 |        2 |        5 |        4 |        0 |       0 |        1 |        0 |        6 |        4 |        2 |        4 |       0 |        3 |        3 |       13 |       21 |       11 |        6 |       1 |        3 |        2 |       19 |       11 |        9 |        7 |       1 |        2 |        0 |        5 |        3 |        1 |        2 |       0 |        4 |        2 |        3 |        6 |        2 |        0 |       0 |        0 |        1 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        3 |        1 |        2 |        1 |       0 |      0 |      0 |      0 |     11 |      2 |      0 |      2 |     16 |      0 |      0 |      1 |     14 |     29 |      8 |      1 |      0 |     57 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |     23 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4550800 |     513 |    133 |    258 |    15 |    0 |     4 |    2 |    0 |     2 |    0 |     99 |    0 |    0 |    0 |    0 |    237 |    276 |      15 |      31 |      13 |       2 |      8 |     11 |      4 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      3 |      9 |      2 |      0 |        0 |        7 |       13 |       13 |        7 |        9 |       0 |        2 |       14 |       22 |       24 |       13 |        9 |       0 |        6 |       18 |       40 |       28 |       22 |       17 |       0 |        8 |       24 |       33 |       28 |       17 |       17 |       0 |        1 |        6 |       11 |       12 |        4 |       10 |       0 |        3 |       12 |       16 |       11 |        8 |        5 |       0 |        2 |        0 |        7 |        0 |        3 |        1 |       0 |        2 |        3 |        0 |        3 |        1 |        1 |       0 |      0 |      1 |     27 |     31 |     10 |      0 |      0 |     64 |      0 |      0 |      4 |     44 |     73 |     25 |      0 |      0 |    112 |      0 |      0 |      1 |     20 |     23 |      8 |      0 |      0 |     47 |      0 |      0 |      0 |      7 |      5 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4550900 |      59 |      9 |     35 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     30 |     29 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        2 |        0 |        0 |        1 |       0 |        2 |        4 |        8 |        2 |        1 |        1 |       0 |        2 |        3 |        5 |        2 |        3 |        2 |       0 |        2 |        0 |        2 |        1 |        1 |        0 |       0 |        2 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      6 |      3 |      1 |      2 |      1 |     22 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4551000 |     399 |    130 |    176 |     6 |    0 |     7 |    7 |    1 |     2 |    0 |     70 |    0 |    0 |    0 |    0 |    196 |    203 |      41 |      21 |      14 |       7 |      8 |      9 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      5 |      1 |      0 |        2 |        9 |       11 |       18 |        6 |        6 |       4 |        5 |       10 |       13 |       20 |       10 |       11 |       5 |        8 |       10 |       28 |       20 |        9 |       10 |       9 |        4 |       11 |       22 |       18 |       10 |       10 |       7 |        6 |        5 |        7 |       11 |        3 |        1 |       1 |        7 |       10 |        2 |        9 |        6 |        2 |       0 |        3 |        2 |        2 |        2 |        2 |        1 |       0 |        2 |        3 |        4 |        1 |        1 |        0 |       0 |      0 |      0 |     28 |     22 |      4 |      2 |      6 |     68 |      0 |      0 |      2 |     19 |     31 |      7 |      7 |      9 |    101 |      0 |      0 |      0 |     12 |      7 |      2 |      1 |      4 |     44 |      0 |      0 |      0 |      8 |      3 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4551100 |     356 |     89 |    198 |     4 |    0 |     2 |    2 |    0 |     0 |    0 |     61 |    0 |    0 |    0 |    0 |    168 |    188 |      12 |      17 |       6 |       0 |      5 |      4 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      3 |      2 |      1 |      0 |        1 |        5 |       11 |        9 |        6 |        5 |       0 |        3 |        7 |        8 |       19 |       10 |        5 |       0 |       11 |        8 |       15 |       30 |       16 |        9 |       3 |        4 |       13 |       29 |       29 |       13 |       14 |       4 |        7 |        8 |        9 |        3 |        5 |        3 |       1 |        4 |        3 |        8 |        3 |        5 |        2 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        3 |        0 |        1 |        1 |        0 |       0 |      0 |      3 |     17 |      7 |      2 |      8 |      6 |     46 |      0 |      0 |      3 |     40 |     26 |     16 |      5 |      9 |     99 |      0 |      0 |      3 |     10 |      6 |      1 |      2 |      4 |     35 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4551600 |       3 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4551700 |      60 |     13 |     28 |     2 |    0 |     1 |    1 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     32 |     28 |       0 |       0 |       0 |       0 |      0 |      0 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |        0 |        1 |        2 |        1 |        2 |       2 |        0 |        0 |        0 |        3 |        1 |        1 |       0 |        1 |        1 |        3 |        4 |        2 |        2 |       1 |        1 |        2 |        4 |        1 |        1 |        4 |       1 |        0 |        1 |        3 |        2 |        2 |        0 |       0 |        0 |        1 |        1 |        3 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      3 |      1 |      1 |      7 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      1 |     19 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      3 |      8 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4551800 |     138 |     36 |     70 |     3 |    0 |     1 |    1 |    0 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |     60 |     78 |       2 |       4 |       5 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      7 |      3 |      0 |        0 |        1 |        3 |        5 |        1 |        2 |       0 |        1 |        2 |        4 |        6 |        8 |        3 |       0 |        3 |        5 |        4 |       12 |        5 |        4 |       0 |        4 |        3 |        5 |       15 |        6 |        4 |       0 |        1 |        3 |        3 |        2 |        3 |        0 |       0 |        5 |        1 |        3 |        6 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |      7 |      3 |      6 |      2 |     13 |      0 |      0 |      2 |     13 |     10 |      8 |     10 |      8 |     19 |      0 |      0 |      0 |      1 |      4 |      3 |      5 |      1 |     13 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4551900 |     266 |     86 |    111 |     8 |    0 |     2 |    2 |    0 |     4 |    0 |     53 |    0 |    0 |    0 |    0 |     97 |    169 |      16 |       3 |       8 |       2 |      6 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |       2 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        4 |        3 |        5 |        2 |        7 |        6 |       0 |        5 |       13 |        7 |        6 |        4 |       24 |       0 |        3 |       10 |       10 |        6 |        3 |       13 |       1 |        6 |        7 |        6 |        9 |        8 |       29 |       0 |        6 |        4 |        2 |        2 |        1 |        4 |       0 |        6 |       14 |        5 |        3 |        4 |        1 |       1 |        0 |        1 |        2 |        0 |        0 |        2 |       0 |        1 |        1 |        2 |        2 |        2 |        3 |       0 |      0 |      0 |     15 |      5 |      6 |      1 |      0 |     59 |      0 |      0 |      2 |      7 |     13 |      6 |      1 |      6 |     76 |      0 |      0 |      0 |     13 |      3 |      0 |      1 |      0 |     36 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4552000 |     403 |    119 |    192 |     8 |    0 |     6 |    2 |    1 |     2 |    0 |     73 |    0 |    0 |    0 |    0 |    165 |    238 |      29 |      22 |      16 |       5 |      5 |     12 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       3 |       0 |       0 |      5 |      1 |      1 |      0 |        1 |        6 |        9 |       10 |        2 |       10 |       6 |        9 |        5 |       14 |       13 |        9 |       11 |      14 |       10 |        9 |       11 |       19 |        9 |       18 |       4 |       13 |       17 |       19 |       26 |       12 |       18 |       7 |        7 |        7 |        5 |        9 |        2 |        1 |       1 |       12 |        3 |       14 |        6 |        0 |        5 |       1 |        2 |        0 |        4 |        2 |        0 |        1 |       0 |        1 |        3 |        1 |        2 |        1 |        2 |       0 |      0 |      2 |     20 |     18 |      6 |      3 |      4 |     66 |      0 |      0 |      0 |     21 |     28 |      6 |      6 |     16 |    115 |      0 |      0 |      0 |     15 |     11 |      0 |      1 |      2 |     44 |      0 |      0 |      1 |      5 |      6 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4552100 |      12 |      6 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      5 |      7 |       4 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4552200 |     272 |     57 |    153 |     5 |    0 |     0 |    2 |    1 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    133 |    139 |       8 |       9 |       9 |       1 |      1 |      7 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |     11 |      6 |      0 |        1 |        1 |        5 |        5 |        4 |        5 |       0 |        4 |        2 |        9 |       13 |        4 |        4 |       0 |        8 |       10 |       26 |       16 |       11 |        7 |       0 |        4 |        6 |       24 |       23 |       10 |        8 |       0 |        4 |        3 |        6 |       10 |        5 |        1 |       0 |        3 |        2 |       11 |        2 |        5 |        1 |       0 |        3 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        3 |        0 |        0 |        1 |       0 |      0 |      2 |      6 |     20 |      3 |      2 |      0 |     24 |      0 |      0 |      0 |     24 |     50 |     11 |      2 |      1 |     65 |      0 |      0 |      1 |     12 |     11 |      3 |      2 |      0 |     24 |      0 |      0 |      1 |      0 |      3 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4553000 |     272 |     95 |    112 |     8 |    0 |     7 |    1 |    0 |     1 |    0 |     48 |    0 |    0 |    0 |    0 |    126 |    146 |      35 |      22 |      16 |       4 |      2 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        3 |        5 |       13 |        4 |        2 |        7 |       5 |        4 |       15 |        6 |       10 |        5 |        8 |       8 |        7 |        7 |       10 |       14 |        5 |        7 |       5 |        6 |       11 |        8 |        7 |        6 |       10 |       9 |        6 |        1 |        4 |        5 |        4 |        0 |       1 |        9 |        1 |        8 |        3 |        4 |        2 |       0 |        1 |        4 |        2 |        1 |        2 |        1 |       0 |        1 |        2 |        0 |        1 |        1 |        1 |       0 |      0 |      0 |     16 |     13 |      5 |      3 |      0 |     58 |      0 |      0 |      4 |      8 |     20 |      3 |      3 |      2 |     72 |      0 |      0 |      1 |     13 |      3 |      0 |      1 |      3 |     27 |      0 |      0 |      2 |      2 |      4 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4554000 |     257 |     85 |    128 |     8 |    0 |     0 |    0 |    0 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |    118 |    139 |      20 |      11 |       6 |       3 |      1 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        4 |        3 |        8 |        6 |        4 |        7 |       3 |        6 |        7 |        9 |        7 |        7 |        9 |       5 |        6 |        6 |       14 |       16 |        9 |        4 |       4 |        5 |        5 |       14 |       20 |       12 |        8 |       5 |        3 |        4 |        3 |        7 |        2 |        1 |       0 |        1 |        5 |        4 |        1 |        1 |        1 |       1 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        4 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |     12 |      6 |      2 |      2 |     54 |      0 |      0 |      0 |     24 |     26 |      6 |      5 |      8 |     59 |      0 |      0 |      0 |      8 |      2 |      1 |      0 |      3 |     20 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4554100 |     256 |     83 |     99 |     8 |    0 |     2 |    4 |    3 |     0 |    0 |     57 |    0 |    0 |    0 |    0 |    122 |    134 |      38 |      22 |      18 |       4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       1 |       1 |      1 |      2 |      2 |      0 |        4 |       13 |        5 |        6 |        4 |        3 |       1 |        3 |       10 |        7 |        9 |        9 |        7 |       2 |        8 |        8 |       17 |        6 |        6 |        7 |       3 |        1 |        9 |       12 |        7 |        6 |        8 |       1 |        4 |        8 |        4 |        6 |        3 |        1 |       0 |       10 |        5 |        2 |        8 |        4 |        2 |       0 |        1 |        3 |        1 |        0 |        0 |        0 |       0 |        3 |        1 |        2 |        4 |        2 |        0 |       0 |      0 |      1 |     13 |     13 |      1 |      2 |      1 |     52 |      0 |      0 |      0 |     21 |     16 |      3 |      3 |      8 |     48 |      0 |      0 |      1 |     14 |      4 |      3 |      2 |      1 |     32 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4555000 |     369 |    100 |    192 |     9 |    0 |     6 |    0 |    3 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    183 |    186 |      34 |      19 |      11 |       3 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       5 |       2 |       1 |      0 |      6 |      2 |      1 |        4 |        4 |        6 |        8 |        4 |        6 |       2 |        7 |        6 |       13 |       12 |       16 |        8 |       4 |       10 |       16 |       22 |       30 |       13 |        5 |       6 |       16 |       14 |       22 |       19 |        7 |        9 |       3 |        4 |        8 |        7 |        6 |        6 |        3 |       0 |        4 |        4 |        5 |        5 |        3 |        1 |       1 |        2 |        3 |        3 |        2 |        1 |        2 |       0 |        0 |        1 |        1 |        2 |        2 |        1 |       0 |      0 |      2 |     17 |     10 |      4 |      4 |      4 |     59 |      0 |      0 |      7 |     12 |     23 |     10 |      2 |     22 |    116 |      0 |      0 |      1 |      8 |      7 |      4 |      1 |      2 |     34 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4555100 |     325 |     80 |    150 |     9 |    0 |     3 |    1 |    1 |     0 |    0 |     81 |    0 |    0 |    0 |    0 |    162 |    163 |      21 |      11 |      14 |       0 |      2 |      8 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |       2 |      10 |       3 |       1 |      2 |      3 |      4 |      0 |        2 |        5 |        4 |       16 |        3 |        3 |       1 |        3 |       13 |        7 |        9 |        4 |        6 |       4 |        4 |       10 |       32 |       17 |        8 |        4 |       3 |        3 |       11 |       33 |       10 |        4 |        8 |       3 |        2 |       12 |        9 |        9 |        6 |        2 |       0 |        8 |        9 |       13 |        5 |        4 |        2 |       0 |        1 |        4 |        1 |        2 |        2 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      2 |     13 |     11 |      3 |      3 |      4 |     44 |      0 |      0 |      3 |     26 |     21 |      9 |      6 |      4 |     81 |      0 |      0 |      1 |      9 |      6 |      3 |      4 |      4 |     54 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4556000 |     448 |    166 |    173 |    21 |    0 |     7 |    8 |    3 |     1 |    0 |     69 |    0 |    0 |    0 |    0 |    218 |    230 |      63 |      30 |      18 |      10 |      6 |     10 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       3 |       2 |       0 |      2 |      1 |      1 |      1 |        8 |        6 |       22 |        6 |        6 |       16 |       6 |        6 |       14 |       17 |       22 |       11 |       21 |       5 |        5 |       12 |       27 |       23 |       11 |        5 |       8 |        3 |       14 |       13 |       21 |       17 |        7 |       7 |        3 |        5 |        8 |       12 |        4 |        2 |       2 |        8 |        8 |        4 |        5 |        3 |        3 |       2 |        1 |        2 |        5 |        7 |        4 |        2 |       0 |        2 |        7 |        4 |        1 |        3 |        2 |       0 |      0 |      2 |     22 |     22 |      7 |      4 |      5 |    104 |      0 |      0 |      1 |     19 |     27 |      7 |      7 |      7 |    105 |      0 |      0 |      1 |     10 |     11 |      2 |      1 |      0 |     44 |      0 |      0 |      2 |      7 |      7 |      2 |      1 |      1 |     20 |      0 |     37 | s03      | R    |
| 4557000 |     249 |    108 |     76 |     6 |    0 |     5 |    2 |    1 |     0 |    0 |     51 |    0 |    0 |    0 |    0 |    120 |    129 |      70 |      27 |      24 |       5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       2 |       1 |       2 |       0 |      1 |      3 |      1 |      0 |        9 |        8 |       11 |        6 |        8 |        8 |       0 |        5 |       11 |       14 |       14 |        7 |        6 |       1 |        6 |        9 |       11 |        7 |        2 |        2 |       1 |        6 |        8 |        8 |        7 |        4 |        3 |       2 |        7 |        4 |        7 |        7 |        0 |        1 |       0 |        8 |        5 |        6 |        4 |        0 |        1 |       1 |        0 |        2 |        1 |        3 |        0 |        0 |       0 |        1 |        0 |        3 |        3 |        0 |        1 |       0 |      0 |      1 |     23 |      9 |      0 |      2 |      1 |     72 |      0 |      0 |      2 |     13 |      3 |      2 |      1 |      1 |     54 |      0 |      0 |      0 |     14 |      4 |      0 |      0 |      0 |     33 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4557100 |     663 |    231 |    254 |    24 |    0 |     6 |    5 |    4 |     3 |    0 |    136 |    0 |    0 |    0 |    0 |    295 |    368 |      75 |      26 |      30 |       6 |      8 |     12 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |       0 |       8 |       0 |       0 |      4 |      3 |      2 |      0 |       10 |       21 |       26 |        7 |       16 |       21 |       0 |       17 |       32 |       24 |       24 |        8 |       24 |       1 |        6 |       25 |       23 |       13 |       13 |       31 |       1 |       18 |       25 |       28 |       12 |        5 |       53 |       1 |       14 |       20 |        9 |        9 |        4 |        9 |       0 |       14 |       12 |       20 |        8 |        4 |       13 |       0 |        0 |        5 |        4 |        3 |        0 |        5 |       0 |        7 |        4 |        5 |        2 |        0 |        7 |       0 |      0 |      6 |     40 |     24 |      4 |      1 |      0 |    156 |      0 |      0 |      5 |     24 |     23 |      2 |      0 |      5 |    195 |      0 |      0 |      0 |     17 |      5 |      1 |      0 |      1 |    112 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 4558100 |     313 |    121 |    107 |     2 |    0 |     3 |    5 |    1 |     2 |    0 |     72 |    0 |    0 |    0 |    0 |    151 |    162 |      58 |      29 |      16 |       1 |      3 |      3 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      1 |      2 |      0 |        5 |        8 |       15 |       14 |        7 |        7 |       1 |        4 |       15 |       15 |       16 |        5 |        7 |       2 |        7 |       14 |       15 |       10 |        4 |        5 |       0 |        7 |        6 |       15 |       12 |        5 |        5 |       2 |        6 |        8 |        9 |        5 |        2 |        2 |       0 |       17 |        9 |        7 |        3 |        1 |        2 |       1 |        1 |        4 |        1 |        1 |        0 |        0 |       0 |        1 |        4 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     20 |     19 |      4 |      2 |      1 |     75 |      0 |      0 |      5 |      9 |      8 |      4 |      0 |      5 |     76 |      0 |      0 |      1 |     14 |      2 |      0 |      0 |      0 |     55 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4559000 |      76 |     22 |     26 |     5 |    0 |     1 |    1 |    0 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     39 |     37 |       8 |       2 |       4 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       4 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        2 |        2 |        1 |        2 |       0 |        1 |        1 |        3 |        2 |        2 |        1 |       1 |        1 |        1 |        4 |        1 |        3 |        3 |       0 |        0 |        2 |        3 |        1 |        5 |        2 |       0 |        3 |        1 |        3 |        4 |        1 |        1 |       0 |        2 |        2 |        3 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        1 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |      6 |      6 |      0 |      0 |      2 |      8 |      0 |      0 |      0 |      2 |      2 |      5 |      2 |      0 |     15 |      0 |      0 |      0 |      4 |      3 |      1 |      2 |      1 |     10 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |      1 |      0 |     37 | s03      | R    |
| 4560000 |     386 |    117 |    179 |     9 |    0 |     4 |    3 |    0 |     1 |    0 |     73 |    0 |    0 |    0 |    0 |    184 |    202 |      38 |      16 |      24 |       2 |      4 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      4 |      0 |      1 |      0 |        7 |        6 |        8 |        7 |        7 |        7 |       8 |        1 |       10 |        6 |       21 |       11 |       11 |       7 |        8 |       11 |       18 |       20 |       13 |        7 |       5 |       15 |       10 |       16 |       21 |       16 |       15 |       4 |        9 |        5 |       12 |        7 |        5 |        1 |       0 |        7 |        9 |        4 |       10 |        1 |        3 |       0 |        3 |        1 |        3 |        4 |        1 |        1 |       0 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |      0 |      2 |     21 |     17 |      8 |      4 |      7 |     58 |      0 |      0 |      2 |     24 |     30 |     15 |      5 |     10 |     93 |      0 |      0 |      0 |     13 |      7 |      2 |      0 |      2 |     49 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4560100 |     301 |     75 |    152 |     7 |    0 |     3 |    3 |    1 |     0 |    0 |     60 |    0 |    0 |    0 |    0 |    142 |    159 |      17 |      18 |      10 |       3 |      2 |      7 |      7 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      3 |      0 |      1 |      0 |        0 |        5 |        7 |        7 |        4 |        8 |       1 |        3 |        4 |       13 |        5 |       10 |        5 |       3 |        2 |       13 |       12 |       12 |       13 |       10 |       7 |        7 |        9 |       15 |       20 |       13 |       17 |       2 |        7 |        3 |       12 |        4 |        4 |        3 |       0 |        2 |        4 |        7 |        5 |        4 |        2 |       3 |        1 |        2 |        0 |        3 |        1 |        1 |       0 |        0 |        2 |        1 |        1 |        1 |        1 |       0 |      0 |      1 |     12 |     14 |      5 |      1 |      5 |     37 |      0 |      0 |      0 |     15 |     37 |      6 |      5 |     24 |     65 |      0 |      0 |      0 |      6 |      5 |      2 |      2 |      8 |     37 |      0 |      0 |      0 |      2 |      2 |      2 |      2 |      2 |      4 |      0 |     37 | s03      | R    |
| 4560200 |      66 |     20 |     35 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     31 |     35 |       3 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        5 |        3 |        0 |        2 |       1 |        0 |        2 |        4 |        2 |        0 |        0 |       1 |        1 |        2 |        7 |        2 |        2 |        1 |       0 |        3 |        2 |        6 |        3 |        2 |        4 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        4 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     33 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4561000 |     301 |     98 |    135 |    11 |    0 |     3 |    1 |    1 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    137 |    164 |      47 |      25 |      16 |       3 |      1 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       1 |       0 |      1 |      2 |      0 |      0 |        3 |        7 |        6 |       13 |        5 |        4 |       3 |        5 |       10 |        9 |       12 |        9 |       11 |       1 |        3 |       11 |       11 |       16 |        5 |        5 |       8 |        8 |       17 |       13 |       13 |        4 |       11 |      10 |        3 |        8 |        5 |        4 |        2 |        3 |       0 |        8 |        3 |        6 |        6 |        2 |        1 |       0 |        0 |        3 |        2 |        3 |        1 |        2 |       1 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      2 |     13 |     15 |      6 |      0 |      4 |     58 |      0 |      0 |      3 |     15 |     32 |      7 |      3 |      5 |     70 |      0 |      0 |      1 |     12 |      4 |      1 |      1 |      0 |     32 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4562000 |     383 |    144 |    135 |     6 |    0 |     3 |    8 |    2 |     3 |    0 |     82 |    0 |    0 |    0 |    0 |    180 |    203 |      69 |      25 |      37 |       6 |      3 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      2 |      4 |      1 |      1 |        1 |       10 |       22 |       11 |       10 |        9 |       9 |       10 |        8 |       10 |       17 |        5 |       14 |       8 |        6 |        7 |       12 |       14 |        6 |        9 |       3 |        6 |        7 |       21 |       11 |        9 |       14 |      10 |        5 |       11 |       12 |        6 |        1 |        3 |       4 |       12 |       13 |       10 |        3 |        1 |        1 |       0 |        1 |        4 |        1 |        0 |        1 |        2 |       0 |        2 |        2 |        3 |        0 |        6 |        0 |       0 |      0 |      2 |     19 |     19 |      5 |      0 |      7 |     92 |      0 |      0 |      1 |     20 |     18 |      4 |      2 |      6 |     84 |      0 |      0 |      1 |     16 |      9 |      1 |      0 |      1 |     54 |      0 |      0 |      0 |      5 |      5 |      2 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 4563000 |     440 |    166 |    154 |    16 |    0 |     3 |    4 |    0 |     5 |    0 |     92 |    0 |    0 |    0 |    0 |    192 |    248 |      60 |      30 |      27 |       3 |      4 |      3 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |       1 |       1 |       1 |       0 |      2 |      1 |      0 |      0 |        4 |       11 |       19 |       14 |       11 |       17 |       3 |        4 |       14 |       18 |       14 |       19 |       13 |       5 |        3 |       11 |       13 |       13 |        9 |       14 |       0 |        8 |       13 |       14 |       10 |       17 |       25 |       4 |        4 |        7 |        3 |        7 |        5 |        8 |       0 |        8 |       16 |       11 |        8 |        6 |        9 |       0 |        1 |        3 |        3 |        4 |        3 |        2 |       0 |        4 |        1 |        1 |        2 |        3 |        1 |       0 |      0 |      5 |     40 |     12 |      6 |      2 |      6 |     95 |      0 |      0 |      5 |     15 |     16 |      7 |      4 |      3 |    104 |      0 |      0 |      4 |     15 |      3 |      1 |      1 |      1 |     67 |      0 |      0 |      2 |      3 |      1 |      1 |      1 |      0 |     20 |      0 |     37 | s03      | R    |
| 4564000 |     428 |    168 |    151 |    15 |    0 |     6 |    2 |    1 |     4 |    0 |     81 |    0 |    0 |    0 |    0 |    176 |    252 |      44 |      20 |      20 |       3 |      3 |      4 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      1 |      0 |        4 |        6 |       14 |        9 |        7 |       21 |       1 |        9 |        6 |       10 |        9 |       13 |       57 |       2 |        3 |        7 |        7 |       13 |       11 |       25 |       2 |        5 |        3 |       12 |        7 |       10 |       45 |       1 |        3 |        8 |        6 |        5 |        2 |       13 |       0 |        6 |        9 |        4 |        5 |        6 |       14 |       0 |        2 |        3 |        1 |        2 |        0 |        1 |       0 |        1 |        3 |        2 |        1 |        1 |       11 |       0 |      0 |      3 |     22 |     27 |      5 |      2 |      1 |    108 |      0 |      0 |      2 |     22 |     20 |      6 |      1 |      3 |     97 |      0 |      0 |      1 |     18 |      8 |      0 |      0 |      1 |     53 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 4565000 |     161 |     74 |     55 |     3 |    0 |     2 |    0 |    1 |     3 |    0 |     23 |    0 |    0 |    0 |    0 |     64 |     97 |       6 |       3 |       0 |       1 |      3 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        0 |        0 |        2 |        1 |        3 |       17 |       0 |        0 |        1 |        1 |        1 |        6 |       41 |       1 |        0 |        1 |        4 |        6 |        3 |       13 |       0 |        0 |        0 |        2 |        2 |        3 |       21 |       0 |        0 |        0 |        2 |        1 |        2 |        6 |       0 |        0 |        1 |        2 |        2 |        0 |        7 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        4 |       0 |      0 |      3 |     10 |     12 |      6 |      3 |      1 |     39 |      0 |      0 |      0 |      8 |      7 |      5 |      1 |      3 |     31 |      0 |      0 |      0 |      8 |      3 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4565200 |     219 |     49 |    126 |     2 |    0 |     3 |    3 |    0 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |    113 |    106 |       4 |      11 |       1 |       1 |      1 |      5 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |       11 |        4 |        2 |       0 |        2 |        0 |        7 |       15 |        2 |        4 |       0 |        3 |        8 |       18 |       24 |       12 |        9 |       0 |        3 |        4 |       16 |       14 |        9 |        6 |       0 |        3 |        1 |        1 |        6 |        1 |        2 |       0 |        3 |        2 |        5 |        8 |        1 |        1 |       0 |        2 |        1 |        0 |        2 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        2 |        0 |       0 |      0 |      0 |     10 |      9 |      4 |      2 |     11 |     13 |      0 |      0 |      0 |     23 |     28 |     14 |      4 |     12 |     45 |      0 |      0 |      0 |      5 |      2 |      4 |      1 |      2 |     20 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4565300 |     140 |     49 |     57 |     5 |    0 |     1 |    3 |    1 |     2 |    0 |     22 |    0 |    0 |    0 |    0 |     74 |     66 |      14 |       9 |       7 |       0 |      1 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        5 |        5 |        8 |        5 |        0 |       0 |        5 |        2 |        5 |        5 |        4 |        5 |       0 |        3 |       13 |        6 |        7 |        4 |        2 |       0 |        3 |        8 |        4 |        1 |        3 |        2 |       1 |        0 |        1 |        4 |        4 |        1 |        1 |       0 |        5 |        2 |        1 |        1 |        2 |        0 |       0 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |        2 |        2 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |     10 |      7 |      2 |      0 |      0 |     30 |      0 |      0 |      0 |      8 |      2 |      1 |      1 |      0 |     45 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4565400 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4565700 |       6 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      5 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4566000 |     215 |     76 |     74 |     7 |    0 |     5 |    2 |    1 |     5 |    0 |     45 |    0 |    0 |    0 |    0 |    116 |     99 |      43 |      17 |      12 |       5 |      3 |      6 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      0 |      1 |      0 |        5 |       10 |       10 |        7 |        6 |        4 |       1 |        5 |        8 |        8 |        4 |        4 |        3 |       1 |        5 |        7 |       15 |        8 |        6 |        1 |       0 |        8 |        6 |        7 |        4 |        2 |        4 |       1 |        4 |        4 |        7 |        3 |        2 |        2 |       0 |        3 |        5 |        5 |        5 |        4 |        1 |       0 |        0 |        4 |        2 |        1 |        0 |        1 |       1 |        1 |        5 |        1 |        1 |        0 |        3 |       0 |      0 |      5 |     13 |      8 |      2 |      1 |      2 |     45 |      0 |      0 |      4 |      9 |      6 |      1 |      1 |      1 |     52 |      0 |      0 |      4 |     11 |      2 |      1 |      0 |      0 |     27 |      0 |      0 |      1 |      2 |      3 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4566100 |      69 |     28 |     23 |     5 |    0 |     0 |    2 |    0 |     3 |    0 |      8 |    0 |    0 |    0 |    0 |     32 |     37 |      13 |       5 |       2 |       2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        5 |        0 |        5 |        0 |        0 |       0 |        1 |        4 |        4 |        5 |        2 |        1 |       0 |        0 |        3 |        2 |        4 |        1 |        0 |       0 |        1 |        1 |        5 |        4 |        1 |        1 |       0 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      7 |      2 |      1 |      0 |      0 |     17 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4566300 |     136 |     39 |     82 |     3 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     34 |    102 |       1 |       1 |       0 |       0 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        9 |       0 |        0 |        1 |        0 |        0 |        0 |       29 |       0 |        0 |        0 |        0 |        0 |        0 |       23 |       0 |        0 |        0 |        0 |        0 |        0 |       57 |       2 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        9 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |      0 |      0 |      5 |     10 |      0 |      0 |      0 |     24 |      0 |      0 |      0 |     10 |     11 |      0 |      0 |      2 |     59 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4566400 |      14 |      5 |      5 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      9 |      5 |       3 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        1 |       0 |        2 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4567000 |     284 |     97 |     96 |    14 |    0 |     7 |    1 |    0 |     4 |    0 |     65 |    0 |    0 |    0 |    0 |    123 |    161 |      45 |      22 |      32 |       6 |      3 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        2 |       15 |        9 |        4 |        2 |        3 |       1 |        2 |        7 |       22 |       13 |        6 |        9 |       2 |        6 |       14 |       16 |        7 |        7 |        2 |       2 |        3 |        5 |       13 |       12 |        5 |        3 |       1 |        7 |        5 |        6 |        3 |        2 |        3 |       0 |        6 |       19 |        7 |        6 |        1 |        0 |       0 |        2 |        2 |        1 |        1 |        0 |        1 |       0 |        6 |        3 |        2 |        4 |        2 |        2 |       0 |      0 |      4 |     18 |     15 |      0 |      1 |      0 |     59 |      0 |      0 |      3 |      6 |      8 |      3 |      1 |      1 |     74 |      0 |      0 |      3 |     13 |      3 |      0 |      0 |      1 |     45 |      0 |      0 |      0 |      5 |      7 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4568000 |     867 |    275 |    346 |    27 |    0 |     9 |   11 |    5 |     9 |    0 |    185 |    0 |    0 |    0 |    0 |    387 |    480 |      57 |      30 |      34 |      12 |     10 |     15 |     10 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      1 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |       2 |       1 |       0 |       0 |      3 |      1 |      3 |      0 |        9 |       22 |       19 |       33 |       18 |        8 |       2 |       20 |       34 |       32 |       33 |       16 |       29 |       0 |       20 |       45 |       36 |       29 |       17 |       18 |       1 |       30 |       39 |       32 |       28 |       20 |       30 |       1 |       21 |       24 |       11 |        9 |       15 |        2 |       0 |       27 |       28 |       16 |        7 |       13 |       12 |       0 |        9 |        6 |        7 |        4 |        2 |        0 |       0 |        8 |        7 |        4 |       10 |        1 |        3 |       0 |      0 |      5 |     35 |     30 |      8 |      5 |      3 |    189 |      0 |      0 |      2 |     42 |     31 |     10 |      5 |      7 |    249 |      0 |      0 |      1 |     22 |      7 |      3 |      0 |      1 |    151 |      0 |      0 |      1 |      4 |      5 |      0 |      0 |      0 |     51 |      0 |     37 | s03      | R    |
| 4568100 |     135 |     52 |     66 |     3 |    0 |     1 |    0 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     46 |     89 |       7 |       8 |       2 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        2 |        0 |        0 |        7 |       0 |        2 |        1 |        1 |        1 |        2 |       32 |       0 |        2 |        2 |        3 |        3 |        0 |       15 |       0 |        1 |        0 |        4 |        2 |        0 |       34 |       0 |        0 |        1 |        1 |        0 |        1 |        1 |       1 |        1 |        2 |        2 |        1 |        0 |        1 |       1 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      6 |      5 |      1 |      1 |      0 |     39 |      0 |      0 |      3 |      7 |      3 |      4 |      0 |      3 |     46 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4569000 |     213 |     80 |     77 |     9 |    0 |     1 |    0 |    1 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |    102 |    111 |      38 |      14 |      17 |       1 |      2 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      1 |        1 |        6 |       18 |        7 |        4 |        1 |       0 |        3 |        9 |       13 |        9 |        4 |        4 |       1 |        6 |        5 |       10 |        7 |        7 |        2 |       0 |        7 |       12 |       13 |        7 |        1 |        0 |       0 |        5 |        3 |       11 |        4 |        0 |        0 |       0 |       13 |        2 |        2 |        3 |        1 |        0 |       0 |        0 |        1 |        2 |        0 |        1 |        1 |       0 |        2 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      5 |     11 |      8 |      0 |      0 |      1 |     55 |      0 |      0 |      1 |     11 |      7 |      2 |      0 |      0 |     56 |      0 |      0 |      0 |      7 |      3 |      0 |      1 |      0 |     33 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4569100 |     127 |     53 |     35 |     8 |    0 |     1 |    1 |    0 |     3 |    0 |     26 |    0 |    0 |    0 |    0 |     68 |     59 |      32 |      11 |       7 |       4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      1 |      0 |        2 |        4 |        7 |        7 |        5 |        0 |       0 |        6 |        8 |        8 |        5 |        1 |        0 |       0 |        2 |        5 |        4 |        1 |        3 |        2 |       0 |        1 |        5 |        8 |        1 |        3 |        0 |       0 |        4 |        5 |        2 |        3 |        2 |        0 |       0 |        1 |        5 |        2 |        1 |        1 |        0 |       0 |        4 |        2 |        1 |        3 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      9 |      6 |      0 |      1 |      2 |     35 |      0 |      0 |      2 |      3 |      7 |      1 |      0 |      0 |     22 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      1 |     18 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4570000 |     268 |    123 |     84 |     8 |    0 |     4 |    1 |    1 |     1 |    0 |     46 |    0 |    0 |    0 |    0 |    104 |    164 |      11 |       2 |       5 |       1 |      7 |      6 |      0 |      0 |      3 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |        0 |        1 |        3 |        3 |        6 |       31 |       1 |        1 |        1 |        1 |        3 |        7 |       63 |       2 |        4 |        1 |        2 |        3 |        3 |       20 |       0 |        0 |        1 |        2 |        1 |       10 |       34 |       3 |        0 |        2 |        1 |        2 |        3 |       10 |       1 |        2 |        3 |        1 |        2 |        2 |       17 |       0 |        1 |        0 |        1 |        1 |        2 |        2 |       0 |        1 |        0 |        0 |        0 |        1 |        6 |       0 |      0 |      0 |     20 |     24 |      9 |      0 |      4 |     66 |      0 |      0 |      0 |     14 |     16 |      4 |      0 |      2 |     48 |      0 |      0 |      2 |     10 |      5 |      0 |      0 |      1 |     28 |      0 |      0 |      0 |      2 |      7 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4571000 |     393 |    142 |    172 |    12 |    0 |    10 |    0 |    1 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    166 |    227 |      18 |       2 |       4 |       3 |      3 |     12 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |       0 |       0 |       1 |       0 |      1 |      1 |      1 |      0 |        0 |        3 |        4 |        5 |        8 |       32 |       2 |        0 |        2 |        7 |       11 |       15 |       50 |       3 |        1 |        4 |        6 |        7 |       12 |       38 |       0 |        1 |        9 |        6 |       11 |       16 |       59 |       2 |        6 |        0 |        5 |        2 |        3 |       12 |       0 |        2 |        2 |        7 |        0 |        5 |       11 |       0 |        3 |        4 |        0 |        0 |        2 |        7 |       0 |        0 |        3 |        1 |        1 |        2 |        1 |       0 |      0 |      2 |     21 |     23 |      5 |      4 |      4 |     83 |      0 |      0 |      0 |     10 |     24 |      5 |      6 |      9 |    118 |      0 |      0 |      1 |     12 |      6 |      2 |      0 |      0 |     34 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4571100 |      92 |     24 |     45 |     4 |    0 |     1 |    0 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     48 |     44 |       7 |       6 |       7 |       1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        1 |        2 |        2 |        1 |       2 |        0 |        1 |        1 |        5 |        3 |        1 |       1 |        1 |        7 |        5 |        4 |        1 |        2 |       4 |        0 |        5 |        3 |        5 |        3 |        3 |       2 |        2 |        2 |        1 |        4 |        1 |        0 |       1 |        1 |        3 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      2 |      2 |      3 |      0 |      1 |      3 |     13 |      0 |      0 |      0 |      3 |      7 |      2 |      0 |      2 |     31 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4571200 |     257 |     61 |    138 |     9 |    0 |     0 |    2 |    2 |     2 |    0 |     43 |    0 |    0 |    0 |    0 |    107 |    150 |       5 |       3 |       8 |       3 |      8 |      4 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        4 |        3 |        3 |        6 |        5 |       1 |        1 |        5 |        6 |        7 |        8 |       11 |       0 |        2 |       14 |       12 |       16 |        2 |       13 |       0 |        7 |        9 |       13 |       17 |       11 |       22 |       0 |        3 |        4 |        3 |        2 |        4 |        0 |       0 |        4 |        6 |        3 |        9 |        2 |        2 |       1 |        1 |        3 |        2 |        0 |        1 |        2 |       0 |        2 |        0 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |      9 |      7 |      2 |      1 |      2 |     40 |      0 |      0 |      3 |     18 |     16 |      7 |      3 |      9 |     82 |      0 |      0 |      0 |      5 |      2 |      2 |      0 |      1 |     33 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4571700 |     185 |     47 |    108 |     4 |    0 |     1 |    2 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     88 |     97 |      12 |      10 |       3 |       3 |      3 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        3 |        6 |        4 |        3 |       1 |        3 |        2 |        3 |        8 |        5 |        3 |       1 |        6 |        4 |       10 |       14 |        7 |        9 |       2 |        6 |        4 |       10 |       13 |        8 |       11 |       4 |        3 |        0 |        2 |        5 |        0 |        1 |       0 |        5 |        1 |        2 |        2 |        1 |        1 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |      3 |      5 |      6 |      1 |     25 |      0 |      0 |      1 |      9 |     19 |     12 |      9 |      4 |     54 |      0 |      0 |      0 |      8 |      2 |      2 |      1 |      1 |      9 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4571900 |     136 |     26 |     73 |     2 |    0 |     0 |    0 |    1 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |     70 |     66 |       1 |       1 |       0 |       0 |      1 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        3 |        3 |        2 |        3 |       0 |        0 |        2 |        5 |        4 |        2 |        0 |       0 |        1 |        3 |       16 |        7 |        3 |        8 |       0 |        1 |        4 |       13 |        4 |        7 |        6 |       0 |        2 |        1 |        1 |        2 |        5 |        6 |       0 |        0 |        0 |        5 |        6 |        2 |        3 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      1 |     25 |     10 |      0 |      0 |      0 |     37 |      0 |      0 |      0 |      7 |      7 |      0 |      0 |      0 |     19 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4572000 |     462 |    170 |    191 |    21 |    0 |     6 |    5 |    0 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    177 |    285 |      28 |      14 |      12 |       1 |      8 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |        2 |        5 |        8 |       10 |        7 |       29 |       0 |        4 |        3 |        7 |       13 |       16 |       63 |       3 |        3 |       14 |       13 |       12 |        9 |       26 |       4 |        7 |       10 |       16 |        7 |        7 |       57 |       6 |        2 |        6 |        0 |        5 |        5 |        5 |       0 |        4 |       10 |        7 |        7 |        8 |        9 |       0 |        0 |        1 |        2 |        3 |        2 |        4 |       0 |        1 |        1 |        3 |        5 |        4 |        7 |       0 |      0 |      3 |     33 |     36 |     11 |      6 |      7 |     74 |      0 |      0 |      3 |     30 |     40 |     11 |      5 |      1 |    101 |      0 |      0 |      1 |     12 |     12 |      0 |      1 |      0 |     42 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 4572200 |     753 |    216 |    346 |    21 |    0 |     5 |    4 |    0 |     1 |    0 |    160 |    0 |    0 |    0 |    0 |    360 |    393 |      65 |      43 |      34 |       4 |      6 |     15 |      1 |      0 |      1 |      1 |      1 |      0 |      1 |      3 |      1 |      0 |      5 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       6 |       4 |       2 |      4 |      3 |      5 |      0 |        6 |       21 |       26 |       12 |       10 |        5 |       2 |       15 |       31 |       33 |       29 |       12 |       13 |       1 |       16 |       35 |       55 |       45 |       19 |       14 |       1 |       15 |       35 |       46 |       29 |       25 |       11 |       0 |        9 |       28 |       18 |       21 |        5 |        0 |       0 |       15 |       23 |       28 |       11 |        1 |        0 |       1 |        3 |        3 |        0 |        3 |        3 |        0 |       0 |        1 |        8 |        5 |        2 |        2 |        1 |       0 |      0 |      0 |     29 |     23 |      4 |      2 |      6 |    152 |      0 |      0 |      3 |     47 |     43 |     18 |     11 |     15 |    209 |      0 |      0 |      1 |     23 |     11 |      6 |      1 |      8 |    110 |      0 |      0 |      1 |      8 |      2 |      1 |      0 |      2 |     17 |      0 |     37 | s03      | R    |
| 4572300 |     296 |    106 |    123 |     7 |    0 |     5 |    2 |    0 |     1 |    0 |     52 |    0 |    0 |    0 |    0 |    108 |    188 |      10 |       8 |       7 |       2 |      9 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      1 |      0 |      0 |        3 |        2 |        4 |        2 |        5 |       10 |       0 |        5 |        3 |        6 |        3 |       13 |       49 |       1 |        3 |        5 |        6 |        8 |        9 |       17 |       0 |        4 |       10 |        9 |        9 |       10 |       32 |       1 |        0 |        6 |        5 |        5 |        5 |        6 |       0 |        4 |        6 |        3 |        4 |        5 |        3 |       0 |        0 |        1 |        2 |        2 |        0 |        2 |       0 |        1 |        1 |        2 |        1 |        0 |        3 |       0 |      0 |      2 |     19 |     15 |      5 |      1 |      2 |     62 |      0 |      0 |      2 |     14 |      9 |      5 |      2 |      3 |     88 |      0 |      0 |      2 |      3 |      3 |      0 |      0 |      0 |     44 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4572400 |     845 |    176 |    498 |    11 |    0 |     2 |    4 |    2 |     2 |    0 |    150 |    0 |    0 |    0 |    0 |    401 |    444 |      12 |      19 |       4 |       1 |     11 |     31 |     14 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      5 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      0 |      0 |        1 |        5 |       24 |       13 |       12 |        9 |       0 |        3 |       15 |       36 |       26 |       21 |       11 |       0 |        7 |       21 |       90 |       53 |       35 |       46 |       0 |       11 |       29 |       93 |       45 |       38 |       30 |       0 |        7 |       12 |       23 |       18 |        7 |        4 |       0 |       12 |        9 |       29 |       14 |        8 |        7 |       0 |        0 |        1 |        6 |        6 |        0 |        1 |       0 |        2 |        2 |        2 |        0 |        1 |        0 |       0 |      0 |      2 |     62 |      7 |      0 |      1 |      0 |    104 |      0 |      0 |      9 |    182 |     35 |      0 |      0 |      1 |    271 |      0 |      0 |      0 |     60 |      5 |      0 |      0 |      0 |     85 |      0 |      0 |      1 |      9 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4572500 |     587 |    164 |    309 |    15 |    0 |     3 |    7 |    1 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    276 |    311 |      17 |      13 |       8 |       1 |     11 |     20 |      2 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        4 |        4 |       13 |       18 |       15 |        8 |       2 |        5 |       13 |       17 |       38 |       14 |        8 |       5 |        8 |       17 |       37 |       39 |       20 |       24 |       8 |       10 |       17 |       36 |       40 |       22 |       23 |       8 |        7 |        7 |        8 |       17 |        4 |        2 |       2 |        3 |        8 |       13 |        9 |        6 |        1 |       0 |        2 |        2 |        1 |        3 |        2 |        2 |       0 |        1 |        3 |        2 |        3 |        2 |        3 |       1 |      0 |      0 |     25 |     17 |      9 |     10 |     11 |     92 |      0 |      0 |      5 |     43 |     47 |     25 |     11 |     10 |    168 |      0 |      0 |      2 |     17 |      9 |      2 |      2 |      8 |     47 |      0 |      0 |      0 |      2 |      5 |      3 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4572600 |     319 |    101 |    163 |     5 |    0 |     5 |    5 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |    167 |    152 |      24 |      26 |      10 |       2 |      3 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |       10 |       12 |       16 |        4 |        5 |       2 |        3 |        6 |       12 |       11 |        8 |        8 |       4 |        7 |       17 |       28 |       20 |        6 |        5 |       4 |        5 |        5 |       31 |       15 |        6 |        9 |       5 |        3 |        1 |        4 |        8 |        1 |        2 |       1 |        3 |        5 |        6 |        2 |        2 |        1 |       0 |        0 |        2 |        3 |        3 |        3 |        0 |       0 |        2 |        0 |        1 |        0 |        2 |        0 |       0 |      0 |      1 |     15 |     18 |      5 |      5 |      4 |     53 |      0 |      0 |      0 |     25 |     34 |     10 |      5 |      9 |     80 |      0 |      0 |      0 |     13 |      6 |      1 |      1 |      1 |     17 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 4572700 |     210 |     55 |    115 |     5 |    0 |     4 |    0 |    1 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |    101 |    109 |       9 |       8 |       2 |       0 |      5 |     12 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       4 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        6 |        3 |        3 |        5 |       2 |        5 |        2 |        8 |        9 |        2 |        2 |       4 |        7 |        4 |       18 |       17 |        7 |        6 |       1 |        6 |        4 |       12 |       13 |        7 |        9 |       4 |        1 |        0 |        4 |        4 |        1 |        0 |       0 |        5 |        1 |        3 |        6 |        3 |        1 |       0 |        0 |        0 |        2 |        3 |        1 |        2 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |      8 |      8 |      2 |      2 |      1 |     34 |      0 |      0 |      1 |      9 |     26 |      1 |      1 |      7 |     70 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      2 |     21 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4572800 |     185 |     43 |     95 |     5 |    0 |     3 |    0 |    1 |     2 |    0 |     36 |    0 |    0 |    0 |    0 |     87 |     98 |      12 |      10 |       3 |       2 |      1 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       1 |       0 |       3 |       0 |      0 |      0 |      1 |      0 |        0 |        4 |        6 |        6 |        2 |        1 |       0 |        3 |        4 |        2 |        9 |        4 |        2 |       0 |        4 |       10 |        6 |        5 |        9 |        8 |       0 |        6 |        7 |       14 |       10 |        8 |        7 |       1 |        5 |        6 |        4 |        3 |        3 |        1 |       0 |        0 |        2 |        7 |        3 |        2 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        2 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     43 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |     90 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     35 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4572900 |     183 |     39 |    104 |     5 |    0 |     4 |    2 |    1 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     90 |     93 |       3 |       3 |       1 |       2 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        3 |        3 |        3 |        4 |       0 |        1 |        2 |        5 |        8 |        2 |        5 |       0 |        5 |        3 |       10 |       12 |       11 |        6 |       1 |        7 |        4 |       10 |       14 |       14 |        6 |       1 |        2 |        4 |        3 |        4 |        4 |        0 |       0 |        1 |        0 |        2 |        6 |        1 |        1 |       0 |        1 |        1 |        4 |        2 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      5 |      1 |      0 |      1 |     28 |      0 |      0 |      1 |     18 |     13 |      4 |      5 |      9 |     54 |      0 |      0 |      0 |      5 |      1 |      2 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4573000 |     209 |     67 |     93 |     4 |    0 |     0 |    2 |    0 |     2 |    0 |     41 |    0 |    0 |    0 |    0 |     93 |    116 |      14 |      12 |       4 |       1 |      2 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        4 |        5 |        5 |        9 |        8 |       2 |        0 |        4 |        7 |        7 |        5 |        7 |       3 |        2 |        8 |        8 |        7 |        5 |        9 |       2 |        3 |        7 |       11 |        9 |        5 |        8 |       9 |        6 |        0 |        4 |        2 |        3 |        0 |       0 |        4 |        7 |        5 |        6 |        2 |        1 |       1 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        1 |        1 |       0 |      0 |      0 |      9 |      5 |      3 |      1 |      5 |     44 |      0 |      0 |      1 |     11 |     13 |      6 |      1 |     10 |     51 |      0 |      0 |      0 |      7 |      5 |      2 |      0 |      0 |     27 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4573100 |     419 |    137 |    168 |    17 |    0 |     5 |    5 |    3 |     2 |    0 |     82 |    0 |    0 |    0 |    0 |    195 |    224 |      32 |      17 |      20 |       4 |      5 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       1 |      2 |      4 |      2 |      0 |        9 |        9 |       10 |       12 |        9 |        9 |       3 |        5 |       13 |       18 |       17 |       10 |        8 |       5 |        9 |       17 |       17 |       22 |        9 |        3 |       2 |        8 |       17 |       18 |       24 |       15 |        6 |       1 |        8 |       10 |        8 |        4 |        4 |        2 |       0 |        7 |       16 |        4 |       11 |        4 |        3 |       1 |        3 |        4 |        8 |        3 |        1 |        0 |       0 |        2 |        4 |        4 |        3 |        0 |        0 |       0 |      0 |      1 |     20 |     13 |      9 |      2 |      3 |     89 |      0 |      0 |      0 |     21 |     25 |      5 |      3 |      6 |    108 |      0 |      0 |      0 |     18 |      6 |      0 |      1 |      0 |     57 |      0 |      0 |      0 |      7 |      1 |      2 |      1 |      2 |     19 |      0 |     37 | s03      | R    |
| 4573200 |     405 |    165 |    148 |    11 |    0 |     7 |    2 |    0 |     3 |    0 |     69 |    0 |    0 |    0 |    0 |    177 |    228 |      30 |      16 |      14 |       4 |      7 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        7 |       10 |        6 |       11 |       28 |       1 |        4 |       15 |        5 |       11 |       15 |       50 |       1 |        5 |        7 |       11 |       11 |       12 |       22 |       1 |       10 |        7 |        6 |       11 |        9 |       36 |       0 |        5 |       10 |        3 |        3 |        4 |        6 |       0 |        4 |       12 |        3 |        3 |        7 |        9 |       0 |        2 |        4 |        3 |        3 |        0 |        1 |       0 |        0 |        3 |        0 |        1 |        3 |        3 |       0 |      0 |      3 |     30 |     24 |      9 |      6 |      3 |     90 |      0 |      0 |      3 |     19 |     17 |      6 |      6 |      3 |     94 |      0 |      0 |      0 |     13 |      7 |      0 |      2 |      1 |     46 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 4573300 |     160 |     34 |     80 |     8 |    0 |     0 |    3 |    1 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |     73 |     87 |      12 |       7 |       4 |       3 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        0 |        4 |        5 |        4 |        2 |       0 |        2 |        2 |        4 |        1 |        4 |        1 |       2 |        1 |        4 |       10 |       10 |        4 |        3 |       3 |        6 |        8 |        7 |        9 |        7 |        5 |       3 |        4 |        1 |        4 |        4 |        1 |        2 |       0 |        4 |        3 |        4 |        6 |        1 |        0 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |        2 |        3 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |     10 |      4 |      1 |      2 |      1 |     16 |      0 |      0 |      4 |      8 |     10 |      6 |      0 |      4 |     48 |      0 |      0 |      1 |      7 |      4 |      0 |      2 |      0 |     20 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4573400 |     260 |     71 |    147 |     3 |    0 |     1 |    4 |    0 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |    123 |    137 |       9 |       9 |       3 |       1 |      2 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       2 |       0 |      1 |      0 |      1 |      0 |        3 |        2 |        4 |        6 |        7 |        4 |       3 |        5 |        3 |       10 |        6 |        7 |        9 |       2 |        5 |        3 |       18 |       24 |        9 |       12 |       2 |        8 |       10 |       18 |       18 |        6 |       11 |       3 |        3 |        1 |        5 |        5 |        1 |        1 |       0 |        5 |        5 |        4 |        1 |        3 |        0 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      3 |      7 |      7 |      3 |      2 |      4 |     45 |      0 |      0 |      1 |     15 |     19 |     14 |      9 |      6 |     83 |      0 |      0 |      2 |      6 |      6 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4573500 |     230 |     44 |    148 |     3 |    0 |     5 |    1 |    0 |     1 |    0 |     28 |    0 |    0 |    0 |    0 |    110 |    120 |       5 |       6 |       4 |       1 |      1 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        5 |        2 |        5 |        3 |       2 |        0 |        4 |        4 |        7 |        6 |        4 |       1 |       10 |        9 |       16 |       15 |        8 |       12 |       3 |        7 |       11 |        9 |       23 |       10 |       11 |       4 |        2 |        1 |        1 |        5 |        1 |        2 |       0 |        3 |        3 |        4 |        2 |        2 |        1 |       1 |        0 |        0 |        3 |        3 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      6 |      7 |      2 |      1 |      0 |     28 |      0 |      0 |      1 |     25 |     15 |      4 |     11 |      9 |     83 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      1 |     20 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4574000 |     280 |    107 |     94 |     4 |    0 |     9 |    5 |    1 |     4 |    0 |     56 |    0 |    0 |    0 |    0 |    126 |    154 |      36 |      21 |      16 |       5 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      2 |      1 |      0 |        5 |        7 |       19 |       16 |        5 |        3 |       0 |        4 |       11 |       10 |       11 |        9 |        5 |       2 |        6 |        8 |        7 |       11 |        6 |        2 |       0 |        7 |        9 |       13 |       10 |        8 |        7 |       0 |        4 |        5 |        3 |        5 |        1 |        2 |       0 |        5 |       10 |        9 |        9 |        2 |        1 |       0 |        1 |        2 |        2 |        3 |        1 |        2 |       0 |        2 |        1 |        3 |        2 |        2 |        2 |       0 |      0 |      4 |     16 |      9 |      6 |      2 |      4 |     66 |      0 |      0 |      2 |      8 |      9 |      5 |      1 |      4 |     65 |      0 |      0 |      0 |      4 |      3 |      1 |      2 |      1 |     45 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4575000 |     385 |    153 |    134 |    12 |    0 |     9 |    2 |    2 |     3 |    0 |     70 |    0 |    0 |    0 |    0 |    157 |    228 |      41 |      28 |      17 |       3 |      4 |      5 |      3 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      3 |      0 |      0 |        3 |        6 |       16 |        6 |        6 |       24 |       1 |        2 |       12 |       13 |       19 |       13 |       32 |       0 |        6 |       13 |       13 |        5 |        8 |       13 |       0 |        4 |       12 |       15 |        7 |       16 |       20 |       2 |        5 |        3 |        9 |        4 |        1 |        1 |       0 |       15 |        4 |        6 |        6 |        4 |       10 |       2 |        1 |        3 |        5 |        3 |        1 |        1 |       0 |        1 |        0 |        2 |        2 |        3 |        6 |       0 |      0 |      3 |     30 |     25 |      7 |      1 |      4 |     83 |      0 |      0 |      2 |     19 |     19 |      6 |      1 |      3 |     84 |      0 |      0 |      3 |     14 |      3 |      1 |      1 |      2 |     46 |      0 |      0 |      0 |      5 |      6 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4576000 |     347 |    112 |    139 |    19 |    0 |     7 |    4 |    0 |     2 |    0 |     64 |    0 |    0 |    0 |    0 |    172 |    175 |      49 |      23 |      18 |      11 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      0 |      2 |        2 |        9 |       14 |        8 |       10 |        1 |       3 |        7 |       13 |       14 |       12 |        6 |       10 |       3 |        3 |       21 |       25 |       13 |        5 |        8 |       2 |        6 |       16 |       11 |        9 |        7 |        9 |       4 |        4 |       10 |        4 |       10 |        1 |        3 |       2 |        3 |       11 |        8 |        3 |        3 |        2 |       0 |        3 |        4 |        3 |        4 |        0 |        0 |       0 |        2 |        7 |        3 |        4 |        1 |        1 |       0 |      0 |      1 |     24 |     13 |      3 |      2 |      5 |     64 |      0 |      0 |      4 |     13 |     17 |      6 |      2 |      1 |     96 |      0 |      0 |      1 |     16 |      5 |      3 |      2 |      0 |     37 |      0 |      0 |      0 |     10 |      4 |      3 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4576100 |     201 |     43 |     98 |    14 |    0 |     6 |    2 |    0 |     3 |    0 |     35 |    0 |    0 |    0 |    0 |    100 |    101 |       9 |       5 |       4 |       2 |      2 |      7 |      4 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      4 |      0 |      0 |        2 |        0 |        1 |        6 |        3 |        4 |       2 |        2 |        5 |        9 |        3 |        2 |        4 |       0 |        1 |       17 |       13 |        9 |       10 |        2 |       1 |        2 |        9 |       10 |        7 |        9 |        6 |       2 |        1 |        1 |       10 |        4 |        1 |        1 |       0 |        7 |        3 |        4 |        2 |        1 |        0 |       0 |        0 |        0 |        4 |        0 |        0 |        7 |       0 |        0 |        4 |        1 |        3 |        1 |        5 |       0 |      0 |      0 |      8 |      5 |      1 |      1 |      1 |     27 |      0 |      0 |      2 |     15 |     17 |      1 |      0 |      2 |     61 |      0 |      0 |      1 |      7 |      5 |      1 |      0 |      0 |     21 |      0 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4576200 |      29 |      6 |     15 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      7 |    0 |    0 |    0 |    0 |     11 |     18 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       1 |        1 |        2 |        2 |        2 |        2 |        0 |       2 |        1 |        0 |        3 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4577000 |     668 |    206 |    272 |    31 |    0 |    12 |    9 |    1 |    12 |    0 |    125 |    0 |    0 |    0 |    0 |    277 |    391 |      26 |      27 |      18 |       8 |      3 |     15 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      3 |      0 |      0 |      0 |        7 |       12 |       20 |       15 |        8 |        5 |       2 |       10 |       27 |       30 |       30 |       16 |       20 |       4 |        6 |       36 |       13 |       30 |       12 |       13 |       8 |       13 |       38 |       26 |       27 |       20 |       21 |       9 |       10 |       11 |       16 |       10 |        4 |        3 |       0 |       13 |       16 |       10 |       14 |       12 |        6 |       0 |        5 |        9 |       10 |        4 |        4 |        4 |       0 |        4 |       15 |        4 |        3 |        2 |        1 |       0 |      0 |      8 |     34 |     17 |      8 |      2 |     11 |    126 |      0 |      0 |      4 |     40 |     21 |      2 |      3 |      5 |    197 |      0 |      0 |      2 |     25 |     11 |      3 |      2 |      1 |     81 |      0 |      0 |      2 |      9 |      9 |      1 |      1 |      0 |     43 |      0 |     37 | s03      | R    |
| 4578000 |     122 |     46 |     35 |     6 |    0 |     0 |    0 |    2 |     3 |    0 |     30 |    0 |    0 |    0 |    0 |     49 |     73 |       9 |       2 |       4 |       4 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        2 |        2 |        4 |        2 |        0 |        1 |       2 |        2 |        3 |       11 |        8 |        6 |        2 |       1 |        0 |        4 |        1 |        5 |        2 |        3 |       1 |        1 |        5 |        1 |        1 |        4 |        4 |       3 |        3 |        1 |        4 |        1 |        2 |        2 |       0 |        1 |        4 |        5 |        2 |        4 |        1 |       0 |        2 |        2 |        1 |        2 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |     11 |      1 |      1 |      2 |     28 |      0 |      0 |      1 |      4 |      2 |      1 |      0 |      1 |     26 |      0 |      0 |      0 |      7 |      3 |      3 |      0 |      0 |     17 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4579000 |     316 |    116 |    116 |     7 |    0 |     8 |    3 |    4 |     5 |    0 |     57 |    0 |    0 |    0 |    0 |    141 |    175 |      56 |      25 |      20 |      10 |      4 |      5 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        6 |        7 |       14 |        9 |        6 |        5 |       5 |        8 |       12 |       10 |       14 |        7 |        8 |       5 |        4 |       11 |       15 |        9 |        9 |        3 |       1 |        4 |       11 |       14 |       11 |       10 |       11 |       3 |        3 |        5 |        4 |        6 |        3 |        2 |       0 |       11 |        8 |        8 |        4 |        3 |        0 |       0 |        3 |        3 |        5 |        3 |        0 |        0 |       0 |        2 |        5 |        3 |        1 |        1 |        1 |       0 |      0 |      1 |     14 |     24 |      2 |      0 |      3 |     72 |      0 |      0 |      2 |     21 |     22 |      2 |      1 |      3 |     65 |      0 |      0 |      1 |      6 |      9 |      4 |      0 |      0 |     37 |      0 |      0 |      0 |      7 |      5 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4580000 |     420 |    133 |    177 |    16 |    0 |     8 |    5 |    5 |     4 |    0 |     72 |    0 |    0 |    0 |    0 |    201 |    219 |      54 |      38 |      24 |      13 |      5 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      4 |      0 |        5 |        7 |       16 |        9 |        7 |        7 |       4 |        4 |       15 |       15 |       19 |       11 |       11 |       3 |        9 |       14 |       20 |       19 |       13 |       12 |       8 |        7 |       16 |       20 |       12 |        7 |       11 |       9 |        4 |        6 |        7 |        9 |        2 |        0 |       1 |        6 |       14 |        9 |        9 |        2 |        2 |       1 |        1 |        8 |        5 |        1 |        3 |        3 |       1 |        4 |        5 |        3 |        3 |        0 |        1 |       0 |      0 |      2 |     21 |     23 |      2 |      5 |      8 |     72 |      0 |      0 |      4 |     21 |     17 |      5 |      7 |      5 |    118 |      0 |      0 |      0 |     12 |     12 |      6 |      0 |      0 |     42 |      0 |      0 |      2 |     10 |      9 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4581000 |     284 |     94 |    121 |     4 |    0 |     4 |    6 |    3 |     3 |    0 |     49 |    0 |    0 |    0 |    0 |    123 |    161 |      18 |      17 |      11 |       0 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |      3 |      0 |      1 |        4 |        8 |        6 |        7 |        5 |       10 |       4 |        1 |       10 |        3 |       11 |        4 |       17 |       4 |        5 |        9 |        8 |        6 |        7 |        8 |       4 |        6 |       11 |       12 |        8 |       12 |       21 |       4 |        2 |        5 |        5 |        9 |        2 |        1 |       1 |        5 |        6 |        4 |        4 |        2 |        3 |       0 |        0 |        0 |        1 |        2 |        1 |        3 |       0 |        2 |        5 |        4 |        1 |        0 |        1 |       0 |      0 |      4 |     18 |      6 |      1 |      3 |      4 |     58 |      0 |      0 |      0 |     15 |     17 |      6 |      2 |      4 |     77 |      0 |      0 |      0 |     10 |      8 |      1 |      1 |      2 |     27 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4581100 |     242 |     48 |    128 |     6 |    0 |     7 |    3 |    0 |     1 |    0 |     49 |    0 |    0 |    0 |    0 |    123 |    119 |       1 |       6 |       4 |       3 |      2 |      9 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      5 |      0 |      0 |        0 |        1 |        2 |        8 |        4 |        4 |       1 |        2 |        5 |        3 |       11 |        6 |        1 |       0 |        5 |        3 |       12 |       18 |       17 |       14 |       0 |        4 |        3 |       10 |       19 |       12 |       11 |       0 |        5 |        0 |        3 |        4 |       10 |        3 |       0 |        3 |        2 |        4 |        5 |        7 |        3 |       0 |        1 |        2 |        1 |        3 |        1 |        1 |       0 |        1 |        2 |        3 |        0 |        2 |        0 |       0 |      0 |      0 |      8 |      6 |      2 |      4 |      9 |     19 |      0 |      0 |      0 |     17 |     20 |      5 |      6 |     26 |     54 |      0 |      0 |      0 |      7 |      6 |      2 |      1 |      7 |     26 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4581200 |     464 |    128 |    223 |    11 |    0 |     3 |    3 |    1 |     1 |    0 |     94 |    0 |    0 |    0 |    0 |    204 |    260 |      23 |      26 |      11 |       3 |      4 |      4 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |       3 |       3 |       3 |       0 |      0 |      1 |      2 |      0 |        3 |        6 |       13 |       16 |        7 |        5 |       0 |       10 |       16 |       22 |       14 |        9 |        5 |       2 |       10 |       29 |       21 |       25 |       10 |       10 |       2 |       20 |       35 |       12 |       25 |       14 |        7 |       3 |        6 |       15 |        9 |        6 |        2 |        2 |       0 |        8 |       16 |       12 |       13 |        3 |        2 |       0 |        2 |        0 |        2 |        1 |        2 |        0 |       0 |        4 |        4 |        1 |        2 |        1 |        0 |       0 |      0 |      3 |     32 |      4 |      4 |      0 |      1 |     84 |      0 |      0 |      2 |     44 |     25 |      6 |      4 |      0 |    142 |      0 |      0 |      2 |     13 |      2 |      1 |      0 |      1 |     75 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4581300 |     494 |    159 |    209 |    22 |    0 |     4 |    3 |    0 |     5 |    0 |     92 |    0 |    0 |    0 |    0 |    217 |    277 |      36 |      20 |      11 |       4 |      4 |      5 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |       1 |       1 |       0 |       0 |      2 |      1 |      1 |      0 |       10 |       16 |       13 |       14 |       10 |        5 |       0 |       18 |       29 |       13 |       17 |        5 |        8 |       1 |       15 |       31 |       20 |       16 |        5 |        5 |       1 |       25 |       40 |       17 |       19 |        7 |        7 |       1 |        8 |       14 |        8 |        4 |        3 |        1 |       0 |        8 |       24 |        6 |       10 |        3 |        3 |       0 |        5 |        6 |        2 |        4 |        0 |        1 |       0 |        4 |        6 |        5 |        0 |        1 |        0 |       0 |      0 |      3 |     17 |     12 |      8 |      1 |      4 |    114 |      0 |      0 |      1 |     27 |     18 |      2 |      5 |      4 |    152 |      0 |      0 |      1 |     12 |      6 |      2 |      0 |      0 |     71 |      0 |      0 |      1 |      5 |      3 |      0 |      2 |      0 |     23 |      0 |     37 | s03      | R    |
| 4581500 |      15 |      7 |      5 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      7 |      8 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4582000 |     802 |    215 |    408 |    23 |    0 |    11 |    6 |    1 |     6 |    0 |    132 |    0 |    0 |    0 |    0 |    372 |    430 |      29 |      30 |      16 |       4 |      7 |     25 |      9 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      2 |      1 |      1 |      0 |       1 |       4 |       2 |       0 |      5 |      0 |      3 |      0 |        7 |       16 |       21 |       28 |       11 |       10 |       2 |        9 |       16 |       31 |       32 |       12 |       20 |       0 |       16 |       27 |       42 |       60 |       25 |       19 |       2 |       22 |       28 |       52 |       56 |       29 |       30 |       0 |        9 |        9 |       16 |       24 |        7 |        2 |       0 |        9 |       14 |       13 |       16 |       11 |        2 |       0 |        3 |        5 |        5 |        2 |        1 |        2 |       1 |        2 |        5 |        2 |       11 |        4 |        4 |       0 |      0 |      0 |     35 |     23 |     17 |      7 |     20 |    113 |      0 |      0 |      2 |     61 |     69 |     11 |     15 |     49 |    201 |      0 |      0 |      1 |     22 |     13 |     10 |      4 |     15 |     67 |      0 |      0 |      0 |     11 |      9 |      0 |      1 |      1 |     25 |      0 |     37 | s03      | R    |
| 4582100 |     334 |    118 |    140 |    15 |    0 |     5 |    1 |    1 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    124 |    210 |      16 |       5 |       9 |       1 |      3 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        5 |        5 |        7 |        5 |       14 |       3 |        2 |       11 |        8 |       13 |        8 |       33 |       2 |        2 |        7 |        8 |       14 |        5 |       20 |       2 |        4 |        9 |       11 |       10 |       11 |       34 |       3 |        3 |        3 |        1 |        3 |        2 |        4 |       0 |        4 |        2 |        7 |        8 |        5 |       11 |       0 |        0 |        2 |        3 |        0 |        1 |        3 |       0 |        0 |        2 |        3 |        2 |        1 |        6 |       0 |      0 |      2 |     16 |     17 |      4 |      4 |      6 |     69 |      0 |      0 |      0 |     13 |     23 |     10 |      7 |      5 |     82 |      0 |      0 |      1 |     10 |      6 |      2 |      1 |      2 |     31 |      0 |      0 |      0 |      3 |      6 |      0 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 4582200 |     707 |    218 |    321 |    18 |    0 |     6 |    6 |    2 |     3 |    0 |    133 |    0 |    0 |    0 |    0 |    316 |    391 |      42 |      21 |      19 |       2 |      5 |      9 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      1 |      3 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        4 |       11 |       18 |       21 |       15 |       12 |       1 |        8 |       18 |       20 |       34 |       20 |       24 |      12 |       11 |       24 |       36 |       32 |       27 |       19 |       7 |       12 |       26 |       36 |       35 |       27 |       25 |       4 |        8 |       18 |       13 |       13 |        7 |        1 |       0 |        8 |       23 |       17 |       14 |        7 |        4 |       0 |        3 |        2 |        6 |        4 |        1 |        2 |       0 |        2 |        3 |        4 |        2 |        5 |        1 |       0 |      0 |      0 |     39 |     26 |     12 |     17 |      8 |    116 |      0 |      0 |      2 |     37 |     43 |     11 |     16 |     18 |    194 |      0 |      0 |      1 |     21 |      9 |      7 |      1 |      3 |     91 |      0 |      0 |      2 |      3 |      6 |      1 |      1 |      0 |     22 |      0 |     37 | s03      | R    |
| 4582300 |     637 |    184 |    332 |    15 |    0 |     6 |    7 |    2 |     7 |    0 |     84 |    0 |    0 |    0 |    0 |    263 |    374 |      34 |      32 |       6 |       6 |      9 |     11 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      1 |     12 |      2 |      1 |        2 |        9 |       12 |       17 |        9 |       24 |       2 |        2 |        7 |       20 |       27 |       19 |       32 |       2 |        6 |       12 |       32 |       30 |       21 |       38 |       1 |        9 |       15 |       30 |       35 |       31 |       70 |       2 |        3 |        2 |        6 |        5 |        5 |       11 |       1 |        5 |        5 |        9 |       11 |        8 |       12 |       1 |        4 |        1 |        0 |        5 |        4 |        1 |       0 |        4 |        3 |        4 |        1 |        3 |        7 |       0 |      0 |      2 |     25 |     35 |     12 |     12 |      6 |     92 |      0 |      0 |      2 |     34 |     49 |     23 |     27 |     18 |    179 |      0 |      0 |      0 |      9 |      7 |      7 |      1 |      2 |     58 |      0 |      0 |      0 |      2 |     12 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4582400 |     243 |     88 |    111 |     2 |    0 |     1 |    2 |    0 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |    108 |    135 |      23 |      11 |       4 |       1 |      2 |     13 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       3 |       1 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |        5 |        3 |        6 |        4 |        7 |       0 |        4 |        8 |        3 |        9 |       11 |       25 |       0 |        0 |       11 |        8 |       15 |        4 |       16 |       0 |        0 |       10 |       10 |        8 |        9 |       18 |       2 |        1 |        2 |        3 |        7 |        6 |        3 |       1 |        2 |        4 |        5 |        0 |        0 |        4 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     14 |     22 |      4 |      2 |      2 |     43 |      0 |      0 |      0 |     17 |     24 |      2 |      6 |      3 |     59 |      0 |      0 |      0 |      6 |      8 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4582600 |     454 |    104 |    257 |    12 |    0 |     6 |    4 |    1 |     2 |    0 |     68 |    0 |    0 |    0 |    0 |    223 |    231 |       4 |       9 |       1 |       2 |      8 |     12 |      3 |      1 |      0 |      1 |      1 |      1 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       4 |       0 |       0 |      0 |      4 |      0 |      0 |        1 |        8 |        6 |       10 |       10 |        5 |       0 |        0 |        5 |       21 |       21 |       10 |        6 |       1 |        8 |       14 |       11 |       49 |       30 |       14 |       1 |       11 |       12 |       32 |       36 |       28 |       11 |       0 |        8 |        5 |        9 |       12 |        4 |        2 |       0 |        2 |        6 |        5 |        6 |        6 |        3 |       0 |        2 |        6 |        1 |        5 |        2 |        0 |       0 |        3 |        0 |        2 |        2 |        0 |        2 |       0 |      0 |      0 |     19 |     15 |      5 |      3 |      5 |     57 |      0 |      0 |      1 |     35 |     35 |     15 |     12 |      9 |    150 |      0 |      0 |      0 |     11 |     11 |      2 |      1 |      2 |     41 |      0 |      0 |      0 |      5 |      4 |      2 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4582800 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4582900 |      15 |      4 |      8 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |      8 |      7 |       1 |       0 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4583000 |     250 |     65 |    126 |     2 |    0 |     4 |    3 |    2 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    127 |    123 |      13 |       4 |       8 |       1 |      4 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        3 |        7 |        3 |        6 |       10 |       1 |        2 |        5 |        7 |        4 |        4 |        9 |       4 |        4 |        6 |       18 |       11 |        8 |        7 |       9 |        3 |       12 |        6 |       11 |        9 |        8 |      14 |        2 |        7 |        2 |        4 |        2 |        6 |       2 |        2 |        6 |        3 |        5 |        2 |        3 |       1 |        3 |        1 |        1 |        1 |        1 |        2 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      9 |      4 |      0 |      1 |     43 |      0 |      0 |      2 |     13 |     23 |      5 |      6 |      4 |     73 |      0 |      0 |      0 |     11 |      2 |      0 |      1 |      0 |     33 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4583100 |     545 |     95 |    343 |    12 |    0 |     2 |    2 |    1 |     3 |    0 |     87 |    0 |    0 |    0 |    0 |    276 |    269 |       6 |      11 |       3 |       0 |      9 |     22 |     11 |      3 |      0 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      5 |      1 |      0 |        5 |        2 |        3 |       12 |       12 |        6 |       0 |        3 |        3 |        8 |       17 |       15 |        9 |       0 |       13 |        6 |       21 |       34 |       48 |       51 |       4 |        6 |       12 |       25 |       37 |       50 |       34 |       2 |        7 |        3 |        4 |        9 |       19 |        9 |       0 |        4 |        2 |        2 |       17 |        8 |        3 |       0 |        1 |        3 |        0 |        1 |        1 |        2 |       0 |        1 |        3 |        1 |        4 |        2 |        1 |       0 |      0 |      1 |     20 |     13 |      6 |      5 |      9 |     41 |      0 |      0 |      4 |     73 |     59 |     19 |     19 |     19 |    150 |      0 |      0 |      0 |     19 |      8 |      0 |      6 |      4 |     50 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      2 |     10 |      0 |     37 | s03      | R    |
| 4583200 |     431 |     64 |    299 |     2 |    0 |     1 |    3 |    0 |     2 |    0 |     60 |    0 |    0 |    0 |    0 |    216 |    215 |       5 |      14 |       4 |       0 |      5 |     26 |      8 |      0 |      5 |      0 |      1 |      0 |      1 |      1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      6 |      3 |      0 |        1 |        0 |        2 |        6 |       12 |        9 |       0 |        1 |        1 |        9 |        9 |        7 |        7 |       0 |       11 |        7 |       19 |       34 |       47 |       34 |       1 |       12 |        9 |       15 |       43 |       32 |       35 |       0 |        5 |        3 |        5 |        6 |        3 |        4 |       1 |        6 |        3 |        7 |        3 |        9 |        5 |       0 |        0 |        2 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |     11 |      8 |      9 |      6 |      6 |     23 |      0 |      0 |      1 |     32 |     56 |     12 |     21 |     23 |    154 |      0 |      0 |      5 |      9 |     15 |      1 |      1 |      2 |     27 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4583300 |     210 |     28 |    146 |     3 |    0 |     3 |    0 |    0 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |    108 |    102 |       3 |       4 |       1 |       0 |      7 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       1 |       0 |      2 |      6 |      2 |      0 |        1 |        0 |        2 |        4 |        1 |        2 |       0 |        0 |        0 |        2 |        9 |        4 |        3 |       0 |        9 |        2 |       14 |       25 |       20 |       10 |       0 |        5 |        3 |       14 |       24 |        8 |       11 |       1 |        2 |        0 |        1 |        6 |        2 |        2 |       0 |        1 |        1 |        4 |        7 |        1 |        2 |       0 |        1 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      2 |      7 |      0 |     11 |      0 |      0 |      0 |     31 |     31 |     14 |     17 |      3 |     50 |      0 |      0 |      0 |      9 |      3 |      4 |      2 |      2 |      9 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4583400 |      37 |      7 |     18 |     0 |    0 |     0 |    1 |    1 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     17 |     20 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        3 |        1 |       0 |        0 |        1 |        1 |        2 |        2 |        2 |       0 |        2 |        0 |        1 |        4 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        3 |        1 |       0 |        1 |        0 |        1 |        2 |        2 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     17 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4583500 |       2 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4584000 |     722 |    250 |    325 |    22 |    0 |    14 |    5 |    2 |     5 |    0 |     99 |    0 |    0 |    0 |    0 |    315 |    407 |      98 |      49 |      36 |      11 |      7 |      9 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      4 |      1 |      0 |      1 |        6 |       11 |       29 |       11 |       12 |       21 |       9 |        6 |       30 |       30 |       24 |       11 |       35 |      15 |       10 |       21 |       22 |       19 |       11 |       49 |      10 |       10 |       21 |       21 |       24 |        9 |       85 |      13 |       11 |       14 |       10 |        6 |        3 |        4 |       1 |       10 |       12 |        9 |        7 |        1 |       11 |       0 |        4 |        2 |        4 |       10 |        1 |        4 |       0 |        3 |        5 |        9 |        2 |        2 |        2 |       0 |      0 |      6 |     41 |     35 |     10 |      8 |      6 |    144 |      0 |      0 |      3 |     46 |     60 |      8 |     10 |     14 |    184 |      0 |      0 |      3 |     25 |     12 |      3 |      1 |      2 |     53 |      0 |      0 |      0 |     14 |     11 |      2 |      1 |      1 |     19 |      0 |     37 | s03      | R    |
| 4585000 |      92 |     27 |     37 |     2 |    0 |     4 |    0 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     51 |     41 |      14 |       9 |       7 |       0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        1 |        5 |        4 |        1 |        2 |       0 |        0 |        2 |        3 |        2 |        3 |        3 |       0 |        0 |        1 |        6 |        7 |        6 |        5 |       0 |        0 |        2 |        2 |        2 |        1 |        5 |       0 |        0 |        2 |        2 |        3 |        1 |        0 |       0 |        4 |        2 |        1 |        5 |        1 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      6 |      1 |      0 |      1 |      1 |     18 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      1 |     28 |      0 |      0 |      0 |      3 |      1 |      1 |      1 |      0 |     16 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4586000 |     437 |    160 |    162 |    18 |    0 |     7 |    4 |    4 |     2 |    0 |     80 |    0 |    0 |    0 |    0 |    215 |    222 |      73 |      22 |      27 |       5 |      1 |      8 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      1 |      1 |      0 |        3 |       13 |       16 |       17 |       15 |        8 |       3 |        8 |       12 |       18 |       17 |       14 |       13 |       3 |        7 |       13 |       20 |       15 |       18 |        5 |       5 |        3 |       16 |       12 |       22 |       14 |       11 |       1 |        4 |        9 |       11 |        7 |        4 |        4 |       1 |        6 |       12 |        7 |       12 |        3 |        0 |       0 |        2 |        2 |        5 |        2 |        4 |        2 |       0 |        3 |        3 |        3 |        8 |        0 |        1 |       0 |      0 |      5 |     31 |     27 |      9 |      5 |      3 |     80 |      0 |      0 |      0 |     22 |     27 |      7 |      4 |      4 |     98 |      0 |      0 |      2 |     26 |      9 |      2 |      2 |      1 |     38 |      0 |      0 |      0 |      9 |      8 |      0 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 4587000 |     328 |     86 |    160 |    10 |    0 |     8 |    1 |    0 |     4 |    0 |     59 |    0 |    0 |    0 |    0 |    152 |    176 |      26 |      16 |      15 |       3 |      3 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        1 |        5 |       13 |        4 |        6 |       10 |       4 |        4 |        5 |        7 |       15 |        3 |        6 |       3 |        8 |       14 |       15 |       19 |        6 |       12 |       2 |        7 |       18 |       19 |       13 |        6 |       14 |       7 |        6 |        7 |        5 |        3 |        1 |        2 |       0 |        6 |       12 |        5 |        5 |        4 |        3 |       0 |        3 |        1 |        4 |        0 |        0 |        1 |       0 |        1 |        3 |        4 |        0 |        2 |        4 |       0 |      0 |      0 |     20 |     11 |      9 |      1 |      0 |     45 |      0 |      0 |      1 |     25 |     15 |      4 |      4 |      4 |    107 |      0 |      0 |      1 |     11 |      6 |      5 |      0 |      1 |     35 |      0 |      0 |      0 |      2 |      7 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4588000 |     504 |    132 |    257 |    11 |    0 |     2 |    2 |    2 |     5 |    0 |     93 |    0 |    0 |    0 |    0 |    231 |    273 |      21 |      13 |       8 |       1 |      5 |     18 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      1 |      0 |      0 |        2 |        4 |       11 |       13 |        6 |        9 |       3 |        2 |        7 |       16 |       24 |       12 |       17 |       6 |        4 |       18 |       31 |       24 |       18 |       22 |       8 |       10 |       24 |       29 |       21 |       18 |       19 |      11 |        6 |        7 |        9 |       14 |        8 |        3 |       0 |        6 |        9 |        8 |       10 |       10 |        2 |       1 |        2 |        1 |        3 |        4 |        0 |        1 |       0 |        4 |        2 |        3 |        1 |        0 |        1 |       0 |      0 |      0 |     23 |     19 |     11 |      2 |      7 |     70 |      0 |      0 |      1 |     21 |     44 |     12 |     13 |     11 |    155 |      0 |      0 |      1 |     13 |     23 |      3 |      1 |      2 |     50 |      0 |      0 |      0 |      5 |      4 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4590000 |     146 |     40 |     68 |     4 |    0 |     3 |    0 |    0 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |     70 |     76 |       4 |       8 |       3 |       0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       5 |       0 |       1 |       1 |      0 |      1 |      2 |      0 |        3 |        1 |        3 |        2 |        2 |        0 |       1 |        0 |        6 |        5 |        8 |        3 |        3 |       3 |        3 |        5 |       10 |       11 |        6 |        4 |       0 |        1 |        6 |        8 |        4 |        4 |        6 |       0 |        2 |        1 |        7 |        4 |        1 |        1 |       1 |        4 |        4 |        4 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        1 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      5 |      6 |      2 |      0 |      2 |     25 |      0 |      0 |      0 |     13 |     10 |      7 |      1 |      2 |     35 |      0 |      0 |      1 |      3 |      3 |      3 |      0 |      0 |     21 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4591000 |     388 |    101 |    202 |    11 |    0 |     1 |    1 |    0 |     4 |    0 |     68 |    0 |    0 |    0 |    0 |    175 |    213 |      22 |       6 |       7 |       2 |      2 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        5 |        3 |        5 |        7 |        8 |        8 |       1 |        3 |        5 |       13 |       12 |       11 |       16 |       4 |       12 |       10 |       23 |       17 |       12 |       16 |       7 |        7 |       13 |       18 |       20 |       20 |       17 |      10 |        3 |        8 |        5 |        7 |        4 |        4 |       1 |        9 |        6 |        4 |        9 |        6 |        1 |       1 |        1 |        1 |        0 |        4 |        2 |        1 |       0 |        1 |        4 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |     12 |     16 |      4 |      3 |      3 |     63 |      0 |      0 |      1 |     20 |     44 |      4 |      3 |      6 |    124 |      0 |      0 |      0 |     13 |      6 |      5 |      1 |      3 |     40 |      0 |      0 |      1 |      3 |      1 |      2 |      1 |      1 |      8 |      0 |     37 | s03      | R    |
| 4591100 |     472 |    115 |    248 |     8 |    0 |     3 |    2 |    0 |     2 |    0 |     94 |    0 |    0 |    0 |    0 |    225 |    247 |      24 |      13 |       8 |       1 |      3 |      8 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |       2 |       2 |       0 |       0 |      0 |      1 |      2 |      0 |        4 |        4 |       12 |       10 |        8 |        8 |       3 |        1 |        5 |       17 |       16 |        8 |       14 |       5 |        9 |       15 |       32 |       30 |       15 |       15 |       7 |       13 |       18 |       31 |       23 |       12 |       20 |       8 |        9 |       13 |        8 |        8 |        5 |        2 |       1 |        9 |        7 |       11 |       10 |        5 |        3 |       3 |        1 |        2 |        2 |        0 |        0 |        2 |       0 |        0 |        0 |        4 |        0 |        3 |        1 |       0 |      0 |      2 |     15 |     20 |      5 |      3 |      8 |     62 |      0 |      0 |      3 |     29 |     35 |      7 |      7 |     18 |    149 |      0 |      0 |      1 |     20 |     10 |      1 |      0 |      3 |     59 |      0 |      0 |      1 |      3 |      4 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4591200 |     355 |     80 |    214 |    14 |    0 |     1 |    1 |    1 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |    165 |    190 |      19 |       6 |       4 |       1 |      4 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      2 |      2 |      0 |        2 |        4 |        4 |        8 |        5 |        7 |       6 |        3 |        2 |        9 |        7 |        6 |       10 |       7 |        6 |        9 |       19 |       23 |       11 |       23 |      12 |        6 |       11 |       21 |       27 |       11 |       22 |      13 |        2 |        4 |        5 |        4 |        1 |        4 |       0 |        7 |        3 |        3 |        3 |        3 |        4 |       0 |        1 |        0 |        2 |        2 |        0 |        1 |       0 |        2 |        3 |        0 |        2 |        3 |        2 |       0 |      0 |      0 |     15 |      5 |      3 |      0 |      8 |     49 |      0 |      0 |      3 |     27 |     25 |      9 |     11 |      8 |    131 |      0 |      0 |      0 |      7 |      6 |      1 |      0 |      2 |     27 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4591300 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4591400 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4592000 |     633 |    172 |    318 |    23 |    0 |     8 |    5 |    0 |     2 |    0 |    105 |    0 |    0 |    0 |    0 |    267 |    366 |      30 |      22 |      18 |       4 |      5 |     11 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       3 |       1 |       0 |      4 |      2 |      1 |      0 |        2 |       11 |        8 |       10 |       16 |        9 |       5 |        7 |       19 |       19 |       29 |       16 |       19 |       2 |        7 |       31 |       31 |       31 |       22 |       19 |       4 |       19 |       34 |       33 |       40 |       19 |       22 |       6 |        9 |        9 |       12 |        8 |        3 |        3 |       2 |       12 |       12 |       17 |       10 |        2 |        5 |       1 |        2 |        8 |        3 |        0 |        2 |        0 |       0 |        4 |        9 |        5 |        1 |        2 |        2 |       0 |      0 |      2 |     26 |     17 |      6 |      5 |      2 |    114 |      0 |      0 |      5 |     34 |     41 |     11 |     16 |     17 |    194 |      0 |      0 |      1 |     19 |      8 |      4 |      1 |      2 |     70 |      0 |      0 |      1 |     11 |      1 |      0 |      1 |      0 |     24 |      0 |     37 | s03      | R    |
| 4592100 |     219 |    105 |     52 |     3 |    0 |     4 |    0 |    2 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |     96 |    123 |      52 |      17 |      18 |       2 |      1 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        4 |        3 |        7 |       12 |        2 |        6 |       5 |        6 |        9 |       12 |       12 |       10 |       13 |       4 |        3 |        8 |        6 |        5 |        1 |        1 |       1 |        2 |        5 |        8 |        5 |        3 |        2 |       2 |        1 |        7 |        5 |        9 |        1 |        1 |       0 |        5 |       12 |        7 |        3 |        0 |        0 |       0 |        3 |        2 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     11 |     20 |      3 |      1 |      1 |     69 |      0 |      0 |      1 |      5 |      6 |      2 |      1 |      0 |     37 |      0 |      0 |      0 |      6 |      9 |      2 |      2 |      0 |     32 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4593000 |     575 |    173 |    279 |    14 |    0 |     3 |    6 |    4 |     5 |    0 |     91 |    0 |    0 |    0 |    0 |    275 |    300 |      44 |      29 |       6 |       7 |      7 |     11 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       1 |       0 |      1 |      6 |      1 |      1 |        6 |        6 |       21 |       11 |       13 |       13 |       6 |       15 |        7 |       23 |       19 |        8 |       16 |       9 |       16 |       14 |       27 |       34 |       19 |       21 |       8 |        7 |       19 |       28 |       40 |       17 |       24 |       5 |        8 |        6 |        7 |       15 |        2 |        2 |       3 |        9 |        6 |        9 |       12 |        4 |        5 |       3 |        5 |        2 |        6 |        1 |        2 |        1 |       0 |        2 |        5 |        3 |        3 |        1 |        1 |       0 |      0 |      0 |     22 |     23 |     10 |      5 |     13 |    100 |      0 |      0 |      6 |     29 |     53 |     14 |     10 |     32 |    135 |      0 |      0 |      2 |     17 |     10 |      6 |      3 |      5 |     48 |      0 |      0 |      1 |      4 |      8 |      3 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4593500 |     292 |     69 |    157 |    11 |    0 |     6 |    3 |    1 |     3 |    0 |     42 |    0 |    0 |    0 |    0 |    135 |    157 |       8 |       6 |       2 |       4 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        1 |        2 |        7 |        7 |        9 |       4 |        3 |        2 |        6 |        8 |        8 |        7 |       4 |        4 |        8 |       17 |       26 |        9 |        9 |       4 |        5 |       10 |       13 |       19 |       11 |       18 |       4 |        2 |        1 |        3 |        7 |        3 |        1 |       2 |        3 |        1 |       10 |        4 |        1 |        1 |       3 |        2 |        0 |        2 |        3 |        1 |        0 |       0 |        3 |        1 |        3 |        5 |        1 |        3 |       0 |      0 |      1 |      4 |     11 |      2 |      4 |      3 |     44 |      0 |      0 |      1 |     23 |     20 |     11 |     13 |      6 |     83 |      0 |      0 |      1 |     10 |      7 |      3 |      4 |      0 |     17 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      1 |     15 |      0 |     37 | s03      | R    |
| 4594000 |     499 |    136 |    224 |    16 |    0 |     6 |    8 |    0 |     4 |    0 |    105 |    0 |    0 |    0 |    0 |    231 |    268 |      21 |      15 |      18 |       1 |      4 |      6 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       4 |       2 |       1 |       1 |      2 |      4 |      0 |      0 |        4 |        7 |        5 |       20 |        7 |        3 |       1 |        6 |       17 |       26 |       11 |       17 |        8 |       4 |       12 |       30 |       29 |       19 |       15 |        7 |       6 |       10 |       20 |       28 |       26 |        5 |       10 |       7 |        9 |       15 |        7 |       13 |        3 |        4 |       0 |       10 |       10 |       13 |       11 |        6 |        3 |       1 |        1 |        7 |        2 |        4 |        1 |        0 |       0 |        7 |        3 |        1 |        6 |        0 |        2 |       0 |      0 |      1 |     17 |     22 |      8 |      2 |      1 |     85 |      0 |      0 |      3 |     29 |     26 |      8 |      2 |      8 |    148 |      0 |      0 |      2 |     10 |     13 |      1 |      2 |      0 |     77 |      0 |      0 |      0 |      5 |      4 |      2 |      0 |      1 |     22 |      0 |     37 | s03      | R    |
| 4594100 |     146 |     32 |     77 |     2 |    0 |     4 |    3 |    0 |     1 |    0 |     27 |    0 |    0 |    0 |    0 |     71 |     75 |       5 |       3 |       3 |       3 |      3 |      7 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        4 |        5 |        2 |        3 |       2 |        0 |        2 |        1 |        4 |        4 |        2 |       2 |        4 |        0 |        8 |        5 |        6 |       10 |       2 |        6 |        3 |        9 |        9 |        3 |       10 |       2 |        1 |        4 |        6 |        1 |        1 |        1 |       0 |        1 |        1 |        5 |        5 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        2 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      4 |      2 |      4 |      3 |     17 |      0 |      0 |      0 |      7 |      9 |      5 |      2 |     18 |     36 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      3 |     18 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4594200 |       6 |      3 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4594300 |     271 |     60 |    153 |     5 |    0 |     1 |    4 |    0 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    121 |    150 |       6 |       3 |       4 |       2 |      2 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        0 |        8 |        2 |        3 |        3 |       2 |        0 |        3 |       13 |        7 |        9 |        7 |       2 |        4 |       10 |       19 |       15 |       11 |       12 |       4 |        5 |       11 |       14 |       17 |        8 |       17 |       6 |        3 |        3 |        6 |        5 |        1 |        4 |       0 |        4 |        6 |        6 |        6 |        1 |        2 |       0 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        2 |        1 |        1 |       0 |      0 |      0 |      8 |     12 |      3 |      2 |      3 |     32 |      0 |      0 |      0 |     16 |     24 |     11 |      4 |      6 |     92 |      0 |      0 |      0 |     10 |      0 |      0 |      1 |      2 |     34 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      2 |      5 |      0 |     37 | s03      | R    |
| 4594400 |      24 |      4 |     13 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     10 |     14 |       1 |       2 |       3 |       0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        2 |        1 |        1 |        2 |       1 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      2 |      2 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4594500 |      31 |      9 |     15 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     16 |     15 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        3 |        0 |       1 |        1 |        0 |        1 |        2 |        0 |        0 |       1 |        2 |        1 |        2 |        2 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        2 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4594600 |       3 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4594900 |     315 |     63 |    181 |     8 |    0 |     2 |    0 |    2 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    148 |    167 |       6 |       3 |       4 |       0 |      1 |      7 |      2 |      0 |      1 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |       0 |       1 |       4 |       1 |      0 |      1 |      2 |      1 |        2 |        1 |        3 |        6 |        8 |        3 |       0 |        1 |        0 |        9 |       13 |       10 |        6 |       1 |        4 |        4 |       16 |       20 |       22 |       24 |       0 |        4 |        3 |       22 |       19 |       25 |       18 |       0 |        4 |        1 |       13 |        4 |        2 |        4 |       0 |        4 |        5 |        7 |        4 |        5 |        4 |       0 |        2 |        1 |        2 |        2 |        0 |        0 |       0 |        2 |        2 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |      9 |     20 |      6 |      2 |      0 |     26 |      0 |      0 |      3 |     41 |     50 |      7 |      3 |      1 |     76 |      0 |      0 |      0 |     13 |      9 |      1 |      0 |      0 |     34 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4595000 |     512 |    145 |    263 |    12 |    0 |     4 |    4 |    0 |     5 |    0 |     79 |    0 |    0 |    0 |    0 |    238 |    274 |      19 |      15 |       9 |       1 |      7 |     10 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       4 |       0 |       0 |      0 |      3 |      0 |      0 |        4 |        8 |       16 |       12 |        7 |        7 |       5 |        3 |        7 |       21 |       16 |       18 |       17 |       4 |        9 |       12 |       27 |       32 |       26 |       17 |       8 |       10 |       13 |       28 |       34 |       19 |       16 |      12 |        5 |        8 |        7 |        6 |        7 |        1 |       2 |        6 |        6 |       11 |        6 |        6 |        4 |       4 |        1 |        2 |        3 |        5 |        1 |        0 |       0 |        1 |        2 |        4 |        3 |        2 |        1 |       0 |      0 |      1 |     22 |     22 |      8 |      1 |      7 |     84 |      0 |      0 |      4 |     32 |     48 |     10 |     14 |     16 |    139 |      0 |      0 |      1 |      8 |      8 |      2 |      1 |      0 |     59 |      0 |      0 |      0 |      2 |      4 |      2 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 4595100 |     712 |    151 |    430 |    14 |    0 |     4 |    4 |    3 |     4 |    0 |    102 |    0 |    0 |    0 |    0 |    336 |    376 |      14 |      20 |       3 |       1 |      8 |     19 |      7 |      0 |      0 |      3 |      2 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |      3 |      0 |      2 |      5 |      0 |      0 |       0 |       3 |       1 |       0 |      0 |      5 |      0 |      0 |        1 |        2 |        9 |       15 |       19 |       15 |       0 |        4 |        6 |        9 |       30 |       23 |       18 |       0 |       10 |       15 |       28 |       39 |       59 |       57 |       1 |       10 |       15 |       32 |       47 |       65 |       50 |       2 |        9 |        5 |        8 |       13 |       13 |        6 |       0 |        5 |        7 |        8 |       10 |       14 |        4 |       0 |        2 |        2 |        2 |        2 |        2 |        2 |       0 |        2 |        2 |        2 |        7 |        4 |        0 |       0 |      0 |      0 |     16 |     25 |      9 |      7 |     14 |     80 |      0 |      0 |      1 |     54 |     76 |     17 |     16 |     51 |    215 |      0 |      0 |      0 |     13 |     17 |      6 |      2 |      1 |     63 |      0 |      0 |      0 |      3 |      7 |      3 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 4595200 |      36 |     11 |     20 |     0 |    0 |     0 |    2 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     19 |     17 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        0 |        1 |       0 |        0 |        0 |        2 |        1 |        2 |        1 |       0 |        1 |        0 |        1 |        1 |        5 |        2 |       0 |        0 |        0 |        1 |        4 |        3 |        2 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      0 |      0 |      3 |      0 |      3 |      0 |      0 |      0 |      6 |      1 |      1 |      3 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4595300 |      72 |     16 |     42 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     32 |     40 |       0 |       0 |       1 |       0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        4 |        0 |       0 |        0 |        2 |        3 |        3 |        1 |        0 |       1 |        0 |        1 |        2 |        6 |        5 |        5 |       1 |        3 |        2 |        5 |        6 |        3 |        3 |       0 |        2 |        0 |        1 |        1 |        2 |        0 |       0 |        1 |        1 |        1 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |     13 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      3 |     32 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4595400 |     159 |     20 |     99 |     2 |    0 |     2 |    2 |    0 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |     78 |     81 |       0 |       4 |       1 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        2 |        1 |       0 |        0 |        1 |        5 |        2 |        1 |        3 |       0 |        5 |        1 |        9 |       18 |       11 |        4 |       0 |        7 |        2 |       11 |       18 |       11 |        2 |       0 |        2 |        1 |        5 |        6 |        3 |        0 |       0 |        2 |        3 |        3 |        5 |        3 |        0 |       0 |        0 |        0 |        0 |        3 |        2 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      4 |      1 |      1 |      0 |      9 |      0 |      0 |      2 |     22 |     21 |      5 |      4 |      3 |     42 |      0 |      0 |      1 |      7 |      6 |      0 |      1 |      0 |     18 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4595600 |     514 |    143 |    253 |     8 |    0 |     5 |    4 |    3 |     5 |    0 |     93 |    0 |    0 |    0 |    0 |    246 |    268 |      18 |      17 |      11 |       1 |      6 |      6 |      6 |      0 |      4 |      0 |      0 |      0 |      2 |      3 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |       1 |       1 |       1 |       0 |      3 |      6 |      1 |      0 |        1 |        3 |       12 |       17 |        7 |       13 |       7 |        3 |        9 |        6 |       27 |       19 |       15 |       4 |        7 |       15 |       21 |       33 |       25 |       20 |       6 |        6 |       10 |       19 |       27 |       29 |       29 |       6 |        5 |        6 |       12 |       13 |       10 |        3 |       0 |        4 |       11 |       10 |        5 |        8 |        5 |       1 |        1 |        0 |        4 |        2 |        1 |        2 |       0 |        3 |        6 |        2 |        2 |        0 |        2 |       0 |      0 |      0 |     16 |     11 |      4 |     10 |      8 |     94 |      0 |      0 |      4 |     31 |     37 |     16 |     14 |     13 |    138 |      0 |      0 |      1 |      6 |     19 |      5 |      5 |      4 |     53 |      0 |      0 |      0 |      1 |      6 |      3 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4595800 |     190 |     35 |    123 |     4 |    0 |     0 |    1 |    0 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |     89 |    101 |       4 |       2 |       1 |       0 |      3 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        2 |        2 |        2 |        2 |       0 |        3 |        3 |        3 |        8 |        5 |        2 |       0 |        2 |        3 |       10 |       20 |       14 |       13 |       1 |        4 |        4 |        9 |       22 |        9 |       11 |       1 |        5 |        0 |        3 |        2 |        2 |        1 |       0 |        2 |        0 |        4 |        5 |        2 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |      0 |      1 |      1 |      9 |      2 |      1 |      8 |     13 |      0 |      0 |      0 |     13 |     25 |      8 |      3 |     25 |     49 |      0 |      0 |      2 |      3 |      5 |      1 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 4595900 |     443 |     98 |    258 |     4 |    0 |     1 |    4 |    3 |     1 |    0 |     74 |    0 |    0 |    0 |    0 |    213 |    230 |       9 |      14 |       4 |       1 |      5 |     15 |      6 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      2 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      7 |      2 |      0 |        2 |        0 |       10 |       12 |       13 |        7 |       0 |        5 |        2 |       11 |       15 |       10 |       11 |       0 |       11 |        9 |       15 |       36 |       28 |       27 |       0 |       13 |        6 |       21 |       38 |       21 |       33 |       0 |        5 |        3 |        7 |        8 |        9 |        5 |       0 |        5 |        3 |        7 |       11 |        6 |        5 |       0 |        0 |        1 |        0 |        2 |        1 |        2 |       0 |        4 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     15 |     13 |      7 |      8 |      7 |     48 |      0 |      0 |      0 |     33 |     46 |     14 |     14 |     13 |    138 |      0 |      0 |      0 |     11 |      9 |      4 |      2 |      2 |     46 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4596000 |     577 |    103 |    359 |    13 |    0 |     5 |    5 |    0 |     5 |    0 |     87 |    0 |    0 |    0 |    0 |    294 |    283 |       3 |      14 |       4 |       2 |     13 |     10 |     10 |      3 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      1 |      5 |      2 |      0 |      0 |      2 |      0 |      0 |       0 |       6 |       2 |       1 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |       13 |       15 |       11 |       0 |        1 |        4 |        8 |       20 |       15 |       10 |       1 |       12 |        8 |       20 |       44 |       50 |       57 |       3 |        7 |        3 |       19 |       48 |       39 |       49 |       0 |        7 |        1 |        5 |       10 |        8 |        8 |       0 |        9 |        2 |        8 |       12 |        6 |       11 |       0 |        4 |        2 |        4 |        4 |        2 |        1 |       0 |        2 |        0 |        2 |        5 |        1 |        1 |       0 |      0 |      0 |     15 |     15 |      7 |      5 |     11 |     50 |      0 |      0 |      1 |     36 |     70 |     17 |     15 |     30 |    190 |      0 |      0 |      0 |     17 |     11 |      6 |      2 |      6 |     45 |      0 |      0 |      0 |      7 |      5 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4596100 |      86 |     16 |     45 |     1 |    0 |     0 |    1 |    0 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     45 |     41 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |        1 |        0 |        0 |        3 |        1 |        1 |       1 |        0 |        0 |        1 |        1 |        3 |        3 |       1 |        1 |        2 |        2 |        6 |        5 |        7 |       0 |        0 |        0 |        3 |        7 |        6 |        6 |       0 |        3 |        1 |        1 |        2 |        3 |        2 |       1 |        2 |        1 |        1 |        2 |        2 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      3 |      0 |      0 |      6 |      0 |      0 |      0 |      7 |      8 |      2 |      3 |      5 |     20 |      0 |      0 |      1 |      2 |      3 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4596200 |     452 |     98 |    274 |     6 |    0 |     2 |    6 |    0 |     0 |    0 |     66 |    0 |    0 |    0 |    0 |    222 |    230 |       8 |       4 |       2 |       0 |      3 |     15 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      6 |      0 |      2 |      0 |      1 |      2 |      0 |       0 |       1 |       1 |       0 |      1 |      4 |      0 |      0 |        1 |        3 |        3 |        5 |       12 |       10 |       2 |        5 |        3 |        7 |       15 |       15 |       16 |       1 |        5 |        6 |       19 |       22 |       31 |       53 |       1 |        0 |       10 |       16 |       28 |       32 |       51 |       0 |        2 |        3 |        4 |        5 |       14 |       10 |       0 |        0 |        1 |        8 |        5 |        8 |        5 |       1 |        0 |        1 |        3 |        3 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |      0 |      0 |     24 |     11 |      3 |      0 |      0 |     60 |      0 |      0 |      5 |     65 |     41 |     11 |      2 |      0 |    150 |      0 |      0 |      0 |      8 |      9 |      3 |      0 |      0 |     46 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4611800 |      15 |      0 |     12 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      7 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        3 |       0 |        1 |        0 |        2 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4611900 |      15 |      2 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      9 |       1 |       0 |       1 |       0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        1 |        2 |       0 |        0 |        2 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4612000 |     622 |    132 |    365 |     8 |    0 |     2 |    3 |    0 |     0 |    0 |    112 |    0 |    0 |    0 |    0 |    309 |    313 |       7 |      10 |       7 |       0 |     13 |     29 |      9 |      2 |      0 |      1 |      2 |      0 |      0 |      5 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      1 |      1 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        1 |        6 |       17 |        9 |       13 |       5 |        2 |        3 |       17 |       23 |       11 |       13 |       7 |       14 |        6 |       37 |       58 |       35 |       27 |      15 |       18 |       11 |       32 |       50 |       29 |       20 |      13 |       10 |        5 |       11 |       14 |        5 |        7 |       1 |       12 |        1 |       16 |       14 |        9 |        6 |       1 |        0 |        2 |        1 |        1 |        3 |        1 |       0 |        1 |        1 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |     16 |     23 |     10 |      8 |      2 |     73 |      0 |      0 |      4 |     49 |     59 |     18 |     16 |     16 |    203 |      0 |      0 |      1 |     18 |     14 |      7 |      6 |      1 |     65 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |      4 |      0 |     37 | s03      | R    |
| 4612100 |     608 |    152 |    333 |    12 |    0 |     4 |    1 |    0 |     2 |    0 |    104 |    0 |    0 |    0 |    0 |    298 |    310 |       0 |       9 |       3 |       0 |     16 |     18 |     12 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      3 |      8 |      0 |      2 |      0 |      0 |      0 |       0 |       2 |       0 |       1 |      1 |      3 |      0 |      0 |        5 |        4 |        7 |       22 |       17 |        8 |       1 |        7 |        8 |       14 |       30 |       24 |        4 |       1 |       12 |        8 |       34 |       45 |       42 |       33 |       0 |        9 |       10 |       31 |       40 |       36 |       33 |       0 |        9 |        7 |        5 |       11 |       12 |        4 |       0 |        9 |        9 |        8 |       13 |        9 |        8 |       0 |        7 |        2 |        0 |        3 |        0 |        0 |       0 |        2 |        1 |        0 |        4 |        0 |        0 |       0 |      0 |      0 |     12 |     30 |      9 |      7 |     10 |     84 |      0 |      0 |      2 |     32 |     44 |     28 |     16 |     17 |    194 |      0 |      0 |      2 |      9 |      7 |      5 |      5 |      5 |     71 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4612200 |     147 |     27 |     87 |     1 |    0 |     3 |    0 |    0 |     1 |    0 |     28 |    0 |    0 |    0 |    0 |     69 |     78 |       0 |       1 |       0 |       0 |      1 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        0 |        2 |        2 |        2 |        1 |       0 |        1 |        2 |        5 |        5 |        4 |        2 |       0 |        5 |        4 |        7 |       14 |        5 |        6 |       6 |        6 |        3 |        8 |        8 |        4 |        3 |       8 |        2 |        0 |        3 |        3 |        2 |        2 |       0 |        4 |        2 |        1 |        6 |        0 |        1 |       2 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      2 |      4 |     18 |      0 |      0 |      0 |     14 |      5 |      6 |      3 |      3 |     56 |      0 |      0 |      1 |      5 |      2 |      2 |      1 |      1 |     16 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4612300 |     312 |     80 |    154 |    10 |    0 |     3 |    3 |    1 |     3 |    0 |     58 |    0 |    0 |    0 |    0 |    145 |    167 |       5 |       7 |       2 |       0 |      8 |     12 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       3 |       0 |      1 |      0 |      0 |      0 |        1 |        0 |        4 |        8 |        6 |        5 |       5 |        3 |        5 |        5 |       21 |        6 |        8 |       3 |        2 |        9 |       17 |       24 |       17 |        5 |       2 |        9 |       10 |       18 |       15 |       16 |        8 |       2 |        1 |        4 |        7 |        6 |        4 |        5 |       1 |        1 |        6 |       10 |        5 |        5 |        3 |       0 |        3 |        0 |        3 |        2 |        3 |        1 |       0 |        2 |        0 |        1 |        4 |        1 |        0 |       0 |      0 |      0 |      8 |     14 |      1 |      3 |      3 |     51 |      0 |      0 |      1 |     22 |     30 |      5 |      8 |      9 |     79 |      0 |      0 |      0 |      7 |      8 |      7 |      1 |      2 |     33 |      0 |      0 |      1 |      1 |      5 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4612400 |     298 |     38 |    198 |     6 |    0 |     1 |    1 |    0 |     0 |    0 |     54 |    0 |    0 |    0 |    0 |    154 |    144 |       2 |       7 |       2 |       0 |      1 |      9 |      5 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      3 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        2 |        2 |        1 |        4 |        5 |        1 |       0 |        2 |        1 |        2 |       11 |        5 |        1 |       1 |       11 |        5 |       13 |       37 |       25 |       12 |       1 |        9 |        5 |       22 |       37 |       13 |        8 |       0 |        5 |        1 |        7 |        8 |        4 |        5 |       0 |        5 |        5 |        5 |        5 |        0 |        4 |       0 |        2 |        0 |        0 |        1 |        1 |        1 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     14 |      1 |      1 |      2 |      0 |     20 |      0 |      0 |      1 |     50 |      8 |      3 |      2 |      9 |    125 |      0 |      0 |      1 |     15 |      2 |      2 |      0 |      1 |     33 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 4612500 |     368 |     54 |    230 |     8 |    0 |     1 |    1 |    0 |     1 |    0 |     73 |    0 |    0 |    0 |    0 |    187 |    181 |       3 |       4 |       2 |       0 |      9 |     19 |      5 |      1 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      2 |      0 |      0 |       0 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        2 |        7 |        5 |        1 |       0 |        3 |        0 |        4 |       16 |        7 |        4 |       0 |       10 |        5 |       14 |       50 |       23 |       17 |       0 |       16 |        5 |       23 |       43 |       14 |        9 |       1 |        9 |        4 |        7 |        9 |       10 |        2 |       0 |        8 |        0 |        4 |       11 |        8 |        1 |       0 |        1 |        0 |        2 |        3 |        1 |        0 |       0 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      6 |     10 |     10 |      2 |      3 |     22 |      0 |      0 |      1 |     39 |     52 |     12 |     12 |     10 |    104 |      0 |      0 |      0 |     14 |      8 |      2 |      1 |      1 |     47 |      0 |      0 |      1 |      1 |      3 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4612600 |     900 |    192 |    524 |    15 |    0 |     4 |    4 |    2 |     5 |    0 |    154 |    0 |    0 |    0 |    0 |    412 |    488 |       7 |       5 |       5 |       2 |     29 |     20 |     20 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      2 |      1 |        8 |        1 |        5 |       20 |       12 |       23 |       6 |        9 |        4 |       15 |       27 |       21 |       33 |       8 |        8 |        9 |       27 |       42 |       57 |       81 |      14 |        8 |       11 |       35 |       55 |       58 |      101 |      18 |       10 |        6 |       14 |       19 |       13 |       18 |       5 |        8 |        3 |       10 |       19 |        8 |       19 |       2 |        2 |        2 |        3 |        2 |        2 |        3 |       0 |        2 |        0 |        4 |        4 |        4 |        2 |       0 |      0 |      0 |     20 |     34 |     11 |      4 |     14 |    109 |      0 |      0 |      1 |     54 |     75 |     32 |     13 |     32 |    317 |      0 |      0 |      0 |     25 |     19 |      8 |      3 |      0 |     99 |      0 |      0 |      0 |      2 |      7 |      0 |      1 |      0 |     20 |      0 |     37 | s03      | R    |
| 4612700 |     436 |     96 |    254 |     5 |    0 |     1 |    1 |    0 |     0 |    0 |     79 |    0 |    0 |    0 |    0 |    222 |    214 |       0 |       1 |       0 |       0 |     25 |     13 |      7 |      2 |      0 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      0 |        6 |        4 |        6 |       16 |        5 |        1 |       2 |        3 |        3 |       11 |       22 |       11 |        6 |       0 |       15 |        8 |       10 |       29 |       41 |       23 |       7 |       12 |        9 |       16 |       34 |       28 |       17 |       5 |        5 |        3 |        6 |       17 |        8 |        6 |       0 |       11 |        3 |        2 |       10 |        5 |        2 |       1 |        1 |        0 |        0 |        2 |        0 |        0 |       1 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      8 |     21 |      4 |      3 |      6 |     54 |      0 |      0 |      2 |     31 |     51 |     22 |      3 |      9 |    136 |      0 |      0 |      1 |     10 |      7 |      7 |      2 |      0 |     52 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4612900 |     388 |     92 |    224 |     6 |    0 |     3 |    3 |    0 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    185 |    203 |       2 |       5 |       1 |       1 |     13 |      6 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        6 |       18 |        9 |        3 |       0 |        5 |        0 |        9 |       29 |        7 |        2 |       0 |       13 |       10 |       21 |       47 |       19 |        2 |       0 |       15 |        6 |       25 |       45 |       14 |        7 |       0 |        2 |        3 |        5 |        9 |        7 |        3 |       0 |        8 |        1 |        5 |       10 |        4 |        2 |       0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        2 |        2 |        0 |        5 |        0 |        0 |       0 |      0 |      2 |      8 |     17 |     12 |      1 |      8 |     44 |      0 |      0 |      1 |     25 |     38 |     22 |      7 |     24 |    107 |      0 |      0 |      0 |      8 |     16 |      4 |      0 |      1 |     30 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4613000 |     525 |    137 |    276 |     8 |    0 |     4 |    2 |    3 |     0 |    0 |     95 |    0 |    0 |    0 |    0 |    262 |    263 |       8 |       2 |       5 |       1 |     11 |     17 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      0 |      1 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        4 |        7 |       17 |        7 |        9 |      10 |        3 |        4 |       11 |       19 |       17 |       10 |      13 |        9 |        2 |       30 |       30 |       34 |       21 |      18 |        6 |        5 |       21 |       33 |       29 |       13 |      25 |        5 |        9 |       10 |       11 |        8 |        3 |       6 |        5 |        4 |        9 |       12 |        4 |        5 |       4 |        1 |        2 |        1 |        0 |        1 |        1 |       0 |        1 |        2 |        2 |        1 |        2 |        2 |       1 |      0 |      1 |     16 |     18 |      5 |      7 |      7 |     83 |      0 |      0 |      2 |     40 |     37 |     15 |      8 |     15 |    159 |      0 |      0 |      0 |     13 |      9 |      6 |      2 |      3 |     62 |      0 |      0 |      1 |      2 |      5 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4613100 |     484 |    126 |    250 |     3 |    0 |     0 |    6 |    1 |     1 |    0 |     97 |    0 |    0 |    0 |    0 |    246 |    238 |       4 |       0 |       3 |       0 |     12 |     17 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      1 |       3 |       4 |       2 |       0 |      3 |      0 |      0 |      0 |        7 |        3 |        6 |       18 |       16 |        7 |       1 |        8 |        1 |       11 |       25 |       14 |        6 |       3 |        8 |        3 |       14 |       35 |       39 |       28 |       4 |        5 |        4 |       25 |       29 |       29 |       22 |       5 |        8 |        6 |        7 |       14 |        7 |        7 |       2 |        9 |        5 |        8 |       13 |        5 |        6 |       0 |        1 |        3 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |      0 |      1 |     19 |     23 |     10 |      4 |      3 |     66 |      0 |      0 |      0 |     23 |     38 |     17 |     11 |     13 |    148 |      0 |      0 |      0 |     22 |     14 |      3 |      0 |      2 |     56 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4613200 |     614 |    113 |    361 |     9 |    0 |     5 |    1 |    0 |     1 |    0 |    124 |    0 |    0 |    0 |    0 |    305 |    309 |       7 |      16 |       2 |       3 |     11 |     26 |     13 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      3 |      4 |      8 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        1 |        8 |       16 |        8 |        2 |       1 |        7 |        5 |       15 |       26 |       13 |        7 |       0 |       22 |        6 |       28 |       91 |       28 |       15 |       0 |       19 |        4 |       40 |       68 |       25 |       12 |       3 |       17 |        5 |        7 |       29 |       11 |        1 |       0 |       10 |        1 |       18 |       21 |        4 |        0 |       0 |        2 |        0 |        0 |        2 |        1 |        0 |       0 |        2 |        0 |        3 |        5 |        1 |        0 |       0 |      0 |      0 |     25 |     22 |     13 |      9 |     10 |     34 |      0 |      0 |      3 |     20 |    100 |     38 |     16 |     35 |    149 |      0 |      0 |      4 |     14 |     22 |      7 |      6 |      8 |     63 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 4613300 |     265 |     84 |    126 |     3 |    0 |     3 |    3 |    0 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |     94 |    171 |       3 |       5 |       1 |       0 |     12 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        3 |        6 |        2 |       18 |       0 |        1 |        0 |        2 |        7 |        3 |       40 |       1 |        0 |        0 |        8 |       10 |        9 |       16 |       0 |        1 |        3 |        5 |       10 |        6 |       56 |       2 |        2 |        0 |        4 |        2 |        1 |        8 |       1 |        7 |        1 |        3 |        4 |        1 |       12 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        1 |        1 |        1 |        3 |       0 |      0 |      1 |     17 |     11 |      2 |      1 |      1 |     51 |      0 |      0 |      1 |     16 |     22 |      5 |      1 |      2 |     79 |      0 |      0 |      0 |      9 |     11 |      0 |      1 |      1 |     24 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4613400 |     407 |     66 |    257 |     6 |    0 |     0 |    2 |    0 |     2 |    0 |     74 |    0 |    0 |    0 |    0 |    197 |    210 |       5 |       4 |       1 |       0 |      6 |     19 |      5 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        7 |        3 |        6 |        8 |        4 |        1 |       0 |        6 |        2 |        5 |       18 |        5 |        1 |       0 |       10 |        5 |       21 |       45 |       33 |       13 |       0 |        8 |        5 |       31 |       55 |       24 |        7 |       0 |        3 |        2 |        5 |       18 |        4 |        3 |       1 |        9 |        2 |        8 |       11 |        4 |        4 |       0 |        1 |        0 |        2 |        0 |        2 |        0 |       0 |        2 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      1 |     13 |     11 |      2 |      1 |      3 |     35 |      0 |      0 |      1 |     46 |     46 |     27 |     12 |     10 |    115 |      0 |      0 |      0 |     11 |      9 |      8 |      0 |      6 |     40 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 4613800 |     264 |     75 |    140 |     5 |    0 |     0 |    1 |    0 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |    137 |    127 |       7 |      13 |       1 |       0 |      4 |      3 |      6 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |      1 |      1 |      0 |       2 |       2 |       1 |       0 |      0 |      9 |      0 |      0 |        3 |        2 |        3 |       16 |        6 |        3 |       1 |        1 |        8 |        3 |       18 |        6 |        4 |       1 |        8 |        4 |       17 |       22 |       20 |        5 |       0 |        7 |        2 |       19 |       20 |       10 |        6 |       0 |        6 |        3 |        1 |        7 |        3 |        4 |       0 |        2 |        2 |        5 |        6 |        3 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      7 |      7 |      8 |      3 |     23 |     27 |      0 |      0 |      0 |     17 |     22 |     16 |      5 |     39 |     41 |      0 |      0 |      0 |      8 |      2 |      1 |      1 |     10 |     21 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4613900 |     155 |     24 |     84 |     3 |    0 |     2 |    1 |    0 |     2 |    0 |     39 |    0 |    0 |    0 |    0 |     76 |     79 |       1 |       2 |       0 |       0 |      3 |      3 |      5 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      4 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       5 |       0 |      0 |      1 |      1 |      0 |        1 |        1 |        1 |        5 |        1 |        3 |       0 |        1 |        1 |        2 |        4 |        1 |        3 |       0 |        2 |        2 |        6 |        9 |       12 |       11 |       0 |        0 |        1 |        7 |       11 |       11 |       12 |       0 |        3 |        0 |        1 |        4 |        6 |        3 |       0 |        4 |        0 |        1 |       10 |        1 |        6 |       0 |        2 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      7 |      0 |      0 |      4 |      9 |      0 |      0 |      0 |     12 |     19 |      2 |      4 |      7 |     40 |      0 |      0 |      0 |     10 |      7 |      4 |      0 |      1 |     17 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4614000 |     318 |     75 |    170 |     3 |    0 |     2 |    1 |    1 |     1 |    0 |     65 |    0 |    0 |    0 |    0 |    151 |    167 |       1 |       4 |       2 |       0 |     12 |      5 |     13 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      5 |      4 |      5 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        2 |        2 |       11 |        8 |        1 |       1 |        4 |        4 |        7 |       20 |        9 |        4 |       0 |       11 |        5 |       15 |       42 |       10 |        5 |       0 |        8 |        4 |       26 |       31 |        9 |        4 |       0 |        8 |        3 |        2 |       13 |        4 |        2 |       0 |        9 |        2 |        1 |       17 |        3 |        1 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     11 |     14 |      8 |     18 |      1 |     23 |      0 |      0 |      0 |     23 |     44 |     32 |     23 |      0 |     48 |      0 |      0 |      4 |      9 |      9 |     12 |      5 |      0 |     26 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4614100 |     481 |    135 |    222 |    12 |    0 |     2 |    6 |    0 |     6 |    0 |     98 |    0 |    0 |    0 |    0 |    239 |    242 |      12 |      19 |       7 |       1 |      7 |      7 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      3 |      0 |      1 |      0 |      3 |      0 |       3 |       4 |       2 |       0 |      4 |      7 |      5 |      0 |        7 |        3 |        8 |       18 |        9 |        5 |       1 |       10 |        8 |       12 |       28 |        7 |       13 |       6 |        9 |        9 |       23 |       45 |       14 |       11 |       6 |        8 |        4 |       25 |       31 |       17 |       17 |       3 |       10 |        7 |        7 |       18 |        9 |        5 |       0 |        9 |        1 |        5 |       19 |        3 |        5 |       0 |        4 |        2 |        3 |        5 |        0 |        1 |       0 |        2 |        2 |        0 |        4 |        1 |        1 |       1 |      0 |      2 |      9 |     23 |     17 |      6 |      5 |     73 |      0 |      0 |      2 |     32 |     41 |     24 |     10 |      9 |    104 |      0 |      0 |      0 |     15 |     18 |      7 |      3 |      7 |     48 |      0 |      0 |      0 |      2 |      3 |      2 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 4614200 |     350 |    111 |    147 |     4 |    0 |     6 |    5 |    1 |     3 |    0 |     73 |    0 |    0 |    0 |    0 |    144 |    206 |      11 |       1 |       3 |       0 |     25 |      9 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      2 |      0 |        2 |        3 |        4 |        7 |        1 |       14 |       1 |        4 |        6 |        7 |       19 |        2 |       39 |       2 |        7 |        8 |       16 |       16 |        9 |       11 |       1 |        4 |        6 |       21 |       19 |       10 |       18 |       1 |        6 |        3 |        8 |        6 |        4 |        3 |       2 |       10 |        7 |        9 |        4 |        3 |        8 |       0 |        1 |        4 |        4 |        1 |        1 |        1 |       0 |        3 |        0 |        1 |        1 |        0 |        2 |       0 |      0 |      0 |     20 |     13 |      3 |      1 |      1 |     73 |      0 |      0 |      0 |     24 |     16 |     11 |      6 |      4 |     86 |      0 |      0 |      0 |      9 |      9 |      2 |      4 |      3 |     46 |      0 |      0 |      0 |      0 |      9 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4614300 |     955 |    240 |    507 |    12 |    0 |     2 |    2 |    0 |     3 |    0 |    189 |    0 |    0 |    0 |    0 |    480 |    475 |       4 |      13 |      14 |       0 |     29 |     26 |     11 |      1 |      3 |      6 |      1 |      0 |      4 |      1 |      1 |      0 |      1 |      1 |      1 |      0 |     10 |      3 |      3 |      0 |       2 |       0 |       1 |       0 |      2 |      2 |      0 |      1 |       10 |        7 |       18 |       34 |       14 |       11 |       2 |       11 |        8 |       33 |       59 |       22 |        9 |       2 |       31 |       20 |       58 |       94 |       58 |       18 |       1 |       18 |       19 |       54 |       92 |       32 |       11 |       1 |       22 |       14 |       14 |       18 |       16 |       11 |       0 |       21 |        8 |       16 |       31 |       13 |        5 |       0 |        2 |        0 |        1 |        6 |        0 |        0 |       0 |        3 |        1 |        2 |        4 |        0 |        0 |       0 |      0 |      0 |     38 |     42 |     15 |      6 |     25 |    114 |      0 |      0 |      7 |     53 |    104 |     39 |     19 |     49 |    236 |      0 |      0 |      3 |     29 |     34 |     14 |      4 |     21 |     84 |      0 |      0 |      0 |      1 |      2 |      3 |      0 |      2 |     11 |      0 |     37 | s03      | R    |
| 4614400 |     516 |    118 |    264 |    11 |    0 |     8 |    4 |    0 |     2 |    0 |    109 |    0 |    0 |    0 |    0 |    257 |    259 |      15 |      21 |      11 |       1 |      2 |      8 |      1 |      3 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      0 |      1 |      3 |      1 |      1 |       0 |       0 |       0 |       0 |      2 |     15 |      2 |      0 |        1 |        5 |        6 |       15 |       14 |        5 |       1 |       10 |        7 |       13 |       25 |        5 |        7 |       4 |       19 |       18 |       39 |       23 |       25 |       10 |       1 |       11 |       15 |       44 |       27 |       18 |       11 |       3 |        8 |       11 |       14 |       16 |        6 |        3 |       1 |        8 |        4 |       17 |       12 |        6 |        1 |       2 |        2 |        5 |        4 |        2 |        2 |        1 |       0 |        1 |        1 |        4 |        1 |        2 |        0 |       0 |      0 |      0 |      5 |     14 |      9 |      8 |      4 |     78 |      0 |      0 |      0 |     27 |     51 |     22 |      9 |     11 |    144 |      0 |      0 |      2 |     22 |     13 |      8 |      1 |      8 |     55 |      0 |      0 |      0 |      3 |      7 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4614500 |     120 |     10 |     84 |     1 |    0 |     1 |    0 |    0 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     62 |     58 |       0 |       0 |       0 |       0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        0 |        3 |        0 |        1 |        3 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        5 |        2 |        1 |       11 |       13 |       10 |       0 |        4 |        1 |        5 |       16 |       10 |        6 |       0 |        2 |        0 |        1 |        6 |        1 |        2 |       0 |        0 |        1 |        1 |        6 |        2 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      3 |      1 |      3 |      0 |      0 |      0 |     15 |     13 |      6 |     11 |     13 |     26 |      0 |      0 |      0 |      3 |      7 |      0 |      6 |      3 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4615000 |     555 |    153 |    290 |     7 |    0 |     6 |    6 |    0 |     1 |    0 |     92 |    0 |    0 |    0 |    0 |    265 |    290 |       6 |       6 |       2 |       0 |     10 |     17 |      7 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        5 |        4 |        6 |       22 |       16 |       10 |       6 |        4 |        4 |       15 |       31 |       12 |       11 |       7 |        7 |       10 |       16 |       43 |       36 |       22 |       7 |       17 |        6 |       23 |       47 |       26 |       21 |       9 |        8 |        4 |        7 |        9 |        8 |        7 |       1 |       10 |        4 |       10 |       13 |        5 |        4 |       2 |        0 |        2 |        2 |        6 |        1 |        0 |       0 |        3 |        0 |        1 |        4 |        0 |        1 |       0 |      0 |      1 |     19 |     21 |      8 |      5 |      7 |     92 |      0 |      0 |      0 |     35 |     33 |     13 |     10 |     12 |    187 |      0 |      0 |      2 |     20 |      7 |      7 |      0 |      0 |     56 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4615100 |     433 |    102 |    231 |     5 |    0 |     7 |    5 |    0 |     1 |    0 |     82 |    0 |    0 |    0 |    0 |    212 |    221 |       5 |       2 |       7 |       0 |      6 |      7 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        4 |        2 |        6 |       17 |        9 |        6 |       3 |        6 |        2 |       12 |       20 |        5 |        9 |       1 |       11 |        8 |       20 |       35 |       24 |       13 |       5 |        9 |       10 |       23 |       33 |       26 |       11 |       3 |       10 |        3 |       10 |        8 |        6 |        2 |       0 |       12 |        4 |        7 |       10 |        7 |        3 |       0 |        1 |        1 |        3 |        3 |        2 |        0 |       0 |        0 |        1 |        2 |        4 |        1 |        0 |       0 |      0 |      0 |     13 |     23 |      9 |      6 |      7 |     44 |      0 |      0 |      2 |     27 |     37 |     14 |      8 |     12 |    131 |      0 |      0 |      0 |     13 |     12 |      2 |      1 |      7 |     47 |      0 |      0 |      0 |      4 |      6 |      0 |      1 |      2 |      5 |      0 |     37 | s03      | R    |
| 4615300 |     418 |     95 |    247 |     2 |    0 |     2 |    0 |    0 |     1 |    0 |     71 |    0 |    0 |    0 |    0 |    203 |    215 |       0 |       0 |       0 |       0 |     20 |     14 |      7 |      2 |      1 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        0 |        7 |       14 |        9 |        5 |       1 |       10 |        3 |       11 |       19 |       13 |        1 |       1 |       10 |        5 |       23 |       47 |       27 |        8 |       2 |        7 |        4 |       31 |       45 |       23 |       13 |       2 |        8 |        5 |       11 |        9 |        7 |        1 |       0 |        9 |        1 |        7 |        8 |        4 |        1 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      2 |     11 |     14 |      7 |      1 |      4 |     56 |      0 |      0 |      1 |     36 |     46 |     14 |     16 |     17 |    117 |      0 |      0 |      0 |     17 |      7 |      3 |      2 |      0 |     42 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4615400 |     326 |     83 |    180 |     7 |    0 |     4 |    3 |    1 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    163 |    163 |       6 |       6 |       0 |       1 |      4 |      7 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        1 |        2 |       14 |        7 |        4 |       0 |        5 |        4 |        7 |       22 |        9 |        2 |       2 |        8 |        9 |       15 |       27 |       21 |       14 |       3 |        6 |        3 |       22 |       23 |       17 |        9 |       3 |        4 |        2 |        1 |        8 |        7 |        1 |       0 |        4 |        2 |        0 |       10 |        4 |        4 |       0 |        1 |        0 |        3 |        3 |        3 |        1 |       0 |        2 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      8 |     15 |      4 |      7 |     10 |     39 |      0 |      0 |      1 |     17 |     26 |      6 |     14 |     22 |     94 |      0 |      0 |      0 |      6 |     10 |      1 |      3 |      4 |     23 |      0 |      0 |      1 |      2 |      6 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4615500 |     157 |     53 |     65 |     5 |    0 |     6 |    3 |    0 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |     70 |     87 |       4 |       2 |       0 |       2 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      2 |      0 |      0 |        3 |        2 |        2 |       10 |        2 |        1 |       0 |        0 |        3 |        8 |       13 |        4 |        4 |       1 |        2 |        4 |       11 |       10 |        5 |        2 |       0 |        3 |        3 |       13 |        7 |        3 |        2 |       0 |        3 |        0 |        3 |        3 |        1 |        0 |       0 |        2 |        5 |        3 |        2 |        1 |        0 |       1 |        0 |        2 |        1 |        1 |        2 |        0 |       0 |        3 |        2 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |      6 |      7 |      3 |      2 |      8 |     27 |      0 |      0 |      0 |      9 |     16 |      5 |      2 |      3 |     30 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      5 |     10 |      0 |      0 |      2 |      3 |      3 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 4616000 |     566 |    150 |    274 |    12 |    0 |    13 |    9 |    0 |     3 |    0 |    105 |    0 |    0 |    0 |    0 |    269 |    297 |      14 |      18 |       6 |       4 |      9 |     15 |      1 |      2 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      3 |      1 |      1 |      0 |        2 |        3 |       14 |       14 |       10 |       11 |       9 |        5 |       13 |       17 |       27 |       11 |       10 |       4 |       14 |       15 |       38 |       39 |       21 |        6 |       4 |        8 |       17 |       40 |       39 |       14 |       13 |       6 |        3 |        7 |       13 |       12 |        6 |        4 |       0 |        7 |       13 |       16 |       16 |        6 |        0 |       2 |        6 |        6 |        6 |        5 |        0 |        1 |       0 |        1 |        3 |        2 |        4 |        0 |        3 |       0 |      0 |      1 |     15 |     25 |     15 |      5 |      4 |     85 |      0 |      0 |      0 |     26 |     60 |     17 |     12 |     16 |    143 |      0 |      0 |      1 |     17 |     14 |      3 |      4 |      3 |     63 |      0 |      0 |      0 |     10 |      8 |      1 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 4616100 |     373 |     93 |    190 |     5 |    0 |     1 |    1 |    0 |     0 |    0 |     83 |    0 |    0 |    0 |    0 |    174 |    199 |      13 |      14 |       1 |       1 |      3 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      7 |      1 |      1 |        3 |        4 |        5 |       12 |        8 |        2 |       5 |        6 |        4 |       10 |       12 |       16 |        2 |       4 |        4 |       11 |       34 |       27 |       11 |        9 |       2 |        9 |       11 |       22 |       29 |        9 |        6 |       6 |        4 |        1 |       10 |       12 |        5 |        1 |       0 |        7 |        8 |       11 |       12 |        6 |        5 |       1 |        1 |        0 |        0 |        1 |        1 |        1 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      8 |     20 |     10 |      2 |      1 |     52 |      0 |      0 |      2 |     24 |     43 |     17 |      9 |      8 |     87 |      0 |      0 |      0 |     10 |     10 |      9 |      2 |      3 |     49 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4616200 |      56 |      8 |     44 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     30 |     26 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        2 |        2 |        2 |       10 |        6 |        1 |       0 |        2 |        1 |        5 |        5 |        5 |        3 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      7 |      3 |      1 |      2 |      4 |     27 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4616300 |      61 |     13 |     31 |     2 |    0 |     0 |    1 |    0 |     2 |    0 |     12 |    0 |    0 |    0 |    0 |     29 |     32 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        0 |        1 |        0 |        2 |        2 |        1 |       0 |        1 |        0 |        2 |        3 |        1 |        0 |       0 |        1 |        3 |        3 |        4 |        4 |        0 |       0 |        1 |        1 |        2 |        5 |        5 |        2 |       0 |        2 |        0 |        1 |        2 |        0 |        0 |       0 |        2 |        3 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      2 |      1 |      5 |      0 |      0 |      0 |      1 |      6 |      2 |      5 |      2 |     15 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4616400 |     705 |    194 |    311 |    15 |    0 |    10 |   11 |    1 |     6 |    0 |    157 |    0 |    0 |    0 |    0 |    336 |    369 |      18 |      16 |       9 |       6 |      9 |     22 |     13 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      4 |      5 |      1 |      4 |      0 |      4 |      0 |       0 |       0 |       0 |       0 |      4 |      6 |      0 |      0 |        8 |        6 |       17 |       25 |       19 |        3 |       1 |       19 |       10 |       23 |       31 |       22 |        9 |       1 |       18 |       12 |       44 |       60 |       16 |        8 |       0 |       10 |       13 |       58 |       54 |        8 |        9 |       1 |        9 |        9 |       15 |       27 |        7 |        8 |       1 |       10 |       17 |       24 |       18 |        4 |        7 |       1 |        4 |        8 |        2 |        7 |        1 |        1 |       0 |        6 |        2 |        2 |        8 |        1 |        1 |       0 |      0 |      1 |     27 |     42 |     16 |     11 |      7 |     90 |      0 |      0 |      2 |     35 |     66 |     27 |     33 |     16 |    132 |      0 |      0 |      2 |     18 |     27 |      9 |      8 |      6 |     87 |      0 |      0 |      0 |      7 |     16 |      5 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4617000 |     560 |    148 |    266 |    16 |    0 |     7 |    6 |    0 |     1 |    0 |    116 |    0 |    0 |    0 |    0 |    221 |    339 |      18 |      15 |       9 |       4 |      8 |     11 |      3 |      0 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      4 |      2 |      0 |        1 |        9 |        7 |        7 |       15 |        9 |       0 |        5 |        3 |       13 |       21 |       23 |       29 |       6 |        6 |        9 |       35 |       20 |       19 |       18 |       2 |        9 |       18 |       37 |       38 |       18 |       29 |       8 |        6 |        5 |       15 |        9 |        7 |        7 |       2 |        7 |        9 |       15 |        8 |        9 |       15 |       2 |        0 |        4 |        0 |        6 |        0 |        3 |       0 |        3 |        1 |        0 |        6 |        4 |        3 |       0 |      0 |      0 |     27 |     21 |      6 |      6 |      9 |     79 |      0 |      0 |      1 |     31 |     35 |     15 |      8 |     16 |    160 |      0 |      0 |      0 |     20 |     18 |      6 |      5 |      2 |     65 |      0 |      0 |      2 |      5 |      6 |      4 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4617100 |     876 |    202 |    458 |    23 |    0 |    12 |   10 |    0 |     7 |    0 |    164 |    0 |    0 |    0 |    0 |    418 |    458 |      17 |      24 |      14 |       4 |      9 |     12 |      9 |      2 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |       0 |       2 |       1 |       0 |      3 |      3 |      4 |      0 |        8 |        6 |       13 |       19 |       15 |       11 |       4 |       12 |       25 |       23 |       37 |       15 |       11 |       3 |       24 |       29 |       43 |       63 |       39 |       23 |       9 |       25 |       29 |       48 |       53 |       25 |       31 |      17 |        9 |       18 |       17 |       26 |        8 |        1 |       3 |       17 |       16 |       21 |       20 |        2 |        4 |       2 |        7 |        8 |        4 |        3 |        5 |        3 |       0 |        3 |        4 |        5 |        5 |        3 |        2 |       0 |      0 |      2 |     27 |     25 |     11 |      2 |      6 |    129 |      0 |      0 |      1 |     53 |     70 |     26 |     19 |     25 |    264 |      0 |      0 |      0 |     18 |     17 |     10 |      2 |      3 |    114 |      0 |      0 |      0 |      6 |     11 |      2 |      0 |      0 |     33 |      0 |     37 | s03      | R    |
| 4617200 |     780 |    229 |    379 |    12 |    0 |     6 |    2 |    1 |     3 |    0 |    148 |    0 |    0 |    0 |    0 |    364 |    416 |      17 |      17 |       7 |       0 |     18 |     19 |     12 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       1 |       4 |       0 |       0 |      1 |      7 |      2 |      0 |        5 |       11 |       16 |       24 |       15 |       11 |      11 |       10 |       11 |       30 |       34 |       28 |        7 |      16 |       17 |       18 |       44 |       50 |       36 |       18 |      10 |       11 |       22 |       39 |       48 |       32 |       20 |      14 |       16 |        7 |       12 |       14 |       16 |        1 |       0 |       10 |       16 |       21 |       15 |       17 |        1 |       2 |        1 |        2 |        3 |        2 |        3 |        1 |       0 |        3 |        3 |        2 |        1 |        1 |        2 |       0 |      0 |      1 |     17 |     42 |     20 |      3 |     15 |    131 |      0 |      0 |      3 |     51 |     58 |     22 |     17 |     23 |    205 |      0 |      0 |      3 |     16 |     18 |     10 |      1 |      4 |     96 |      0 |      0 |      0 |      5 |      8 |      0 |      1 |      2 |      8 |      0 |     37 | s03      | R    |
| 4618000 |     683 |    164 |    375 |    12 |    0 |     8 |    2 |    0 |     4 |    0 |    118 |    0 |    0 |    0 |    0 |    330 |    353 |      17 |      16 |       4 |       1 |     11 |     12 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      3 |      0 |        5 |        4 |       17 |       22 |       11 |        3 |       6 |        8 |       12 |       22 |       23 |       18 |        5 |       8 |       20 |       20 |       43 |       52 |       30 |       19 |       7 |       18 |       12 |       45 |       51 |       33 |       16 |       9 |       14 |        9 |        6 |       13 |       10 |        2 |       1 |        6 |       10 |       12 |       19 |       12 |        1 |       3 |        3 |        2 |        3 |        3 |        0 |        5 |       0 |        3 |        1 |        2 |        1 |        1 |        2 |       0 |      0 |      2 |     22 |     24 |      8 |      2 |     14 |     92 |      0 |      0 |      1 |     44 |     59 |     34 |     14 |     22 |    201 |      0 |      0 |      1 |     17 |     12 |     10 |      0 |      4 |     74 |      0 |      0 |      0 |      7 |      8 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4618100 |      40 |     13 |     23 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     20 |     20 |       0 |       0 |       0 |       0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        2 |        3 |        1 |        1 |        0 |       0 |        0 |        0 |        3 |        3 |        0 |        0 |       0 |        0 |        0 |        7 |        2 |        2 |        0 |       0 |        0 |        1 |        8 |        2 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4618200 |     670 |    189 |    318 |    17 |    0 |     7 |    6 |    2 |     2 |    0 |    129 |    0 |    0 |    0 |    0 |    302 |    368 |      26 |      18 |      12 |       1 |      7 |     14 |      5 |      1 |      0 |      1 |      4 |      0 |      1 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      1 |     10 |      3 |      3 |        5 |        5 |       16 |       22 |       12 |        9 |       3 |        7 |       10 |       38 |       31 |       18 |        9 |       4 |       10 |       20 |       42 |       41 |       27 |        9 |       2 |       19 |       33 |       40 |       31 |       22 |       18 |       4 |       11 |       16 |       12 |       13 |        9 |        1 |       1 |       16 |       12 |       13 |       15 |        4 |        6 |       0 |        4 |        4 |        1 |        5 |        1 |        1 |       0 |        6 |        4 |        2 |        5 |        0 |        1 |       0 |      0 |      1 |     15 |     32 |     11 |      7 |      5 |    118 |      0 |      0 |      2 |     38 |     47 |     20 |      9 |     12 |    190 |      0 |      0 |      0 |     13 |      6 |     12 |      4 |      3 |     91 |      0 |      0 |      0 |      4 |     10 |      2 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4618300 |     727 |    200 |    330 |    18 |    0 |    10 |    5 |    2 |     4 |    0 |    158 |    0 |    0 |    0 |    0 |    333 |    394 |       7 |      13 |      10 |       1 |      8 |     18 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |       0 |       1 |       4 |       0 |      1 |      2 |      2 |      0 |        5 |       10 |       14 |       23 |       12 |        7 |       2 |        5 |       15 |       38 |       38 |       20 |        9 |       2 |        9 |       28 |       40 |       44 |       22 |        9 |       1 |       17 |       25 |       48 |       37 |       30 |       16 |       4 |       17 |       16 |       18 |       17 |        9 |        7 |       2 |       13 |        9 |       19 |       23 |        4 |        4 |       0 |        0 |        6 |        8 |        4 |        3 |        0 |       0 |        2 |        3 |        6 |        3 |        2 |        2 |       0 |      0 |      1 |     32 |     32 |      7 |     11 |      7 |    110 |      0 |      0 |      3 |     35 |     48 |     11 |     20 |     19 |    194 |      0 |      0 |      0 |     29 |     15 |      3 |      4 |      7 |    100 |      0 |      0 |      0 |      3 |     15 |      2 |      1 |      2 |     16 |      0 |     37 | s03      | R    |
| 4619000 |     564 |    167 |    238 |    19 |    0 |     6 |    5 |    2 |     4 |    0 |    123 |    0 |    0 |    0 |    0 |    252 |    312 |      19 |      19 |      11 |       5 |      8 |      5 |      3 |      1 |      2 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |      1 |      3 |      1 |      0 |      4 |      1 |      1 |      0 |       4 |       5 |       2 |       1 |     12 |      8 |      1 |      0 |        9 |        8 |       16 |       13 |        6 |        8 |       5 |        6 |       20 |       15 |       26 |       17 |       12 |       6 |       11 |       18 |       26 |       39 |       15 |        5 |       3 |        6 |       20 |       32 |       27 |       20 |       10 |       6 |       10 |       12 |       11 |       11 |        8 |        1 |       1 |        9 |       12 |       18 |       18 |        9 |        3 |       0 |        2 |        3 |        5 |        3 |        1 |        2 |       0 |        4 |        4 |        2 |        6 |        1 |        3 |       0 |      0 |      2 |     24 |     20 |      6 |      5 |      9 |    101 |      0 |      0 |      0 |     33 |     43 |     12 |     13 |      5 |    132 |      0 |      0 |      2 |     15 |      9 |      7 |      1 |      1 |     88 |      0 |      0 |      0 |      2 |      8 |      4 |      0 |      1 |     21 |      0 |     37 | s03      | R    |
| 4619100 |     600 |    153 |    279 |    20 |    0 |     6 |    5 |    1 |     7 |    0 |    129 |    0 |    0 |    0 |    0 |    289 |    311 |      14 |      21 |      11 |       2 |      8 |      5 |      2 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      0 |        5 |        3 |       15 |       12 |       13 |       12 |       4 |        6 |       11 |       20 |       20 |       12 |       12 |       8 |       20 |       11 |       36 |       33 |       15 |       12 |       9 |       10 |       25 |       36 |       30 |       17 |       15 |      10 |        9 |       12 |       14 |       10 |       14 |        4 |       0 |        9 |       11 |       18 |       11 |       10 |        5 |       2 |        4 |        6 |        7 |        5 |        2 |        2 |       0 |        2 |        1 |        0 |        5 |        2 |        3 |       0 |      0 |      1 |     14 |     20 |      8 |      8 |      8 |     94 |      0 |      0 |      1 |     26 |     42 |     18 |      9 |     10 |    173 |      0 |      0 |      1 |     23 |     20 |      4 |      7 |      4 |     70 |      0 |      0 |      1 |      2 |      8 |      2 |      1 |      0 |     25 |      0 |     37 | s03      | R    |
| 4620000 |     543 |    184 |    225 |    22 |    0 |     9 |    5 |    1 |     2 |    0 |     95 |    0 |    0 |    0 |    0 |    254 |    289 |      23 |      17 |       4 |       1 |      7 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      2 |      0 |      0 |      0 |       2 |       2 |       0 |       1 |      1 |      6 |      3 |      1 |        2 |       10 |       14 |       17 |        8 |       17 |      16 |        3 |       14 |       19 |       21 |       16 |       15 |      12 |        6 |       14 |       27 |       27 |       18 |       11 |       6 |       10 |        9 |       30 |       26 |       18 |        8 |      15 |        7 |       12 |       13 |        8 |        2 |        4 |       1 |        5 |        8 |        8 |       14 |        5 |        5 |       3 |        2 |        2 |        4 |        2 |        1 |        3 |       0 |        5 |        6 |        6 |        5 |        2 |        1 |       0 |      0 |      0 |     24 |     21 |     10 |      6 |     10 |    113 |      0 |      0 |      2 |     25 |     40 |     14 |     11 |     10 |    123 |      0 |      0 |      0 |     15 |      9 |      9 |      1 |      5 |     56 |      0 |      0 |      0 |      7 |     12 |      0 |      1 |      1 |     18 |      0 |     37 | s03      | R    |
| 4620200 |     509 |    139 |    273 |     9 |    0 |     1 |    1 |    0 |     2 |    0 |     84 |    0 |    0 |    0 |    0 |    219 |    290 |      15 |      15 |       7 |       1 |     12 |     19 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      3 |      5 |      4 |      0 |      1 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      3 |      0 |        3 |        1 |        5 |       13 |        8 |       10 |       4 |        6 |        3 |       16 |       17 |       17 |       31 |       5 |       12 |        5 |       33 |       40 |       20 |       17 |       7 |       12 |       14 |       22 |       38 |       18 |       25 |      10 |        4 |        4 |        7 |       12 |        4 |        3 |       0 |       10 |        4 |       11 |       10 |        5 |       10 |       0 |        2 |        1 |        1 |        0 |        1 |        2 |       0 |        1 |        0 |        0 |        2 |        2 |        1 |       0 |      0 |      3 |     12 |     28 |      7 |      5 |      3 |     81 |      0 |      0 |      0 |     23 |     74 |     14 |      5 |     15 |    142 |      0 |      0 |      0 |      9 |     17 |      4 |      0 |      2 |     52 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4620300 |     225 |     61 |    109 |     6 |    0 |     4 |    2 |    0 |     1 |    0 |     42 |    0 |    0 |    0 |    0 |    112 |    113 |       6 |       7 |       3 |       2 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      1 |      1 |      1 |       0 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        2 |        1 |        7 |        2 |        8 |       3 |        4 |        0 |        9 |       11 |        7 |        5 |       1 |        5 |        3 |       13 |       18 |       12 |        4 |       4 |        5 |        6 |       13 |       10 |        5 |        7 |       4 |        4 |        0 |        5 |        9 |        4 |        0 |       0 |        2 |        3 |        4 |        8 |        2 |        1 |       0 |        1 |        2 |        2 |        0 |        1 |        1 |       0 |        0 |        0 |        4 |        0 |        1 |        1 |       0 |      0 |      0 |      8 |     16 |      3 |      2 |      3 |     29 |      0 |      0 |      1 |     18 |     14 |      4 |      1 |      5 |     66 |      0 |      0 |      0 |      6 |      5 |      0 |      2 |      3 |     26 |      0 |      0 |      1 |      0 |      3 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4620400 |     237 |     42 |    137 |     5 |    0 |     0 |    4 |    1 |     0 |    0 |     48 |    0 |    0 |    0 |    0 |    116 |    121 |       2 |       3 |       2 |       1 |      3 |      6 |      4 |      0 |      0 |      1 |      0 |      0 |      4 |      2 |      2 |      0 |      1 |      4 |      0 |      0 |      2 |      2 |      5 |      0 |       0 |      11 |       2 |       0 |      0 |      1 |      0 |      0 |        1 |        0 |        7 |        5 |        0 |        0 |       0 |        1 |        3 |       10 |       10 |        2 |        2 |       1 |        4 |        6 |       29 |       20 |       15 |        3 |       0 |        1 |        6 |       32 |       12 |        7 |        2 |       0 |        3 |        4 |        8 |        6 |        3 |        1 |       0 |        3 |        4 |        6 |        6 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        6 |        0 |        0 |        1 |       0 |      0 |      1 |     16 |      0 |      0 |      0 |      0 |     25 |      0 |      0 |      3 |     59 |      3 |      1 |      2 |      0 |     69 |      0 |      0 |      2 |     10 |      0 |      0 |      0 |      0 |     36 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4620900 |     252 |     82 |    120 |    10 |    0 |     2 |    0 |    0 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |    126 |    126 |       9 |       7 |       4 |       0 |      3 |     11 |      7 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        1 |        3 |        4 |        6 |        7 |       12 |       4 |        4 |        2 |       12 |       12 |        5 |        5 |       5 |        8 |        3 |       15 |        9 |        8 |       16 |       3 |        0 |        5 |        8 |       15 |       13 |       10 |       7 |        2 |        3 |        4 |        6 |        3 |        3 |       0 |        3 |        1 |        5 |        2 |        4 |        2 |       0 |        0 |        2 |        1 |        1 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        2 |        1 |       0 |      0 |      0 |     15 |     13 |      2 |      0 |      1 |     51 |      0 |      0 |      1 |      6 |     11 |     16 |      7 |      3 |     76 |      0 |      0 |      0 |      5 |      6 |      1 |      3 |      2 |     21 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4621000 |     259 |     74 |    137 |     8 |    0 |     2 |    0 |    0 |     1 |    0 |     37 |    0 |    0 |    0 |    0 |    129 |    130 |      12 |       7 |       2 |       1 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       1 |       0 |      0 |      4 |      0 |      0 |        2 |        1 |        6 |        6 |        5 |        7 |       2 |        1 |        9 |       11 |        4 |       13 |        4 |       3 |        6 |       10 |       17 |       14 |       13 |        8 |       9 |        7 |        6 |       13 |        9 |       14 |        7 |       4 |        3 |        3 |        6 |        1 |        1 |        3 |       1 |        0 |        6 |        6 |        3 |        1 |        3 |       0 |        2 |        1 |        1 |        0 |        0 |        1 |       0 |        1 |        1 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |     10 |     11 |      6 |      1 |      4 |     42 |      0 |      0 |      1 |     13 |     30 |      7 |      3 |      8 |     75 |      0 |      0 |      0 |      2 |      8 |      2 |      0 |      1 |     24 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 4621100 |     433 |    114 |    203 |    10 |    0 |     1 |    6 |    2 |     3 |    0 |     94 |    0 |    0 |    0 |    0 |    200 |    233 |      17 |      17 |      12 |       2 |      4 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      4 |      5 |      1 |      1 |        5 |        6 |       13 |       10 |        4 |        8 |       1 |        3 |       14 |       11 |       14 |       15 |        8 |       2 |        4 |       18 |       30 |       21 |        9 |       13 |       2 |        6 |       18 |       31 |       26 |        9 |       14 |       2 |        6 |       15 |        9 |        6 |        5 |        5 |       0 |        7 |        8 |       15 |       12 |        4 |        2 |       0 |        2 |        2 |        0 |        2 |        2 |        2 |       0 |        2 |        3 |        2 |        4 |        1 |        0 |       0 |      0 |      2 |     15 |     17 |      7 |      4 |      5 |     64 |      0 |      0 |      0 |     28 |     34 |      8 |      5 |      7 |    121 |      0 |      0 |      1 |     11 |     18 |      2 |      3 |      3 |     56 |      0 |      0 |      0 |      5 |      1 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4621200 |     574 |    160 |    257 |    20 |    0 |     6 |    5 |    5 |     3 |    0 |    118 |    0 |    0 |    0 |    0 |    272 |    302 |      19 |      29 |      13 |       7 |      4 |     13 |      4 |      1 |      0 |      1 |      2 |      0 |      0 |      2 |      2 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       1 |       0 |      7 |      6 |      3 |      2 |        6 |        6 |       13 |       13 |       11 |       10 |       2 |        6 |       16 |       22 |       18 |       20 |       12 |       5 |       14 |       21 |       29 |       32 |       16 |       13 |       7 |        6 |       16 |       38 |       31 |       15 |       16 |       3 |        5 |       11 |       16 |       14 |        4 |        5 |       1 |       10 |        8 |       16 |        8 |       11 |        6 |       3 |        6 |        8 |        2 |        5 |        1 |        1 |       0 |        1 |        6 |        2 |        3 |        3 |        1 |       0 |      0 |      0 |     15 |     22 |      5 |      7 |      5 |    106 |      0 |      0 |      0 |     26 |     50 |     12 |      6 |      8 |    155 |      0 |      0 |      0 |     20 |     14 |      5 |      1 |      1 |     77 |      0 |      0 |      1 |      2 |     10 |      5 |      0 |      1 |     20 |      0 |     37 | s03      | R    |
| 4622000 |     410 |    113 |    191 |    15 |    0 |     5 |    6 |    0 |     3 |    0 |     77 |    0 |    0 |    0 |    0 |    185 |    225 |       8 |       8 |       7 |       1 |      2 |      6 |      6 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       1 |      2 |      4 |      0 |      0 |        3 |        4 |       10 |       12 |       10 |       10 |       2 |        2 |        6 |       13 |       17 |       13 |        6 |       5 |        5 |        7 |       26 |       19 |       19 |       10 |       3 |        7 |       16 |       27 |       30 |       15 |        6 |       1 |        2 |        5 |       10 |       13 |        3 |        0 |       0 |        6 |        8 |       16 |        9 |        4 |        1 |       0 |        0 |        5 |        4 |        1 |        0 |        2 |       0 |        2 |        4 |        5 |        2 |        3 |        1 |       0 |      0 |      0 |     10 |     15 |     10 |      4 |      3 |     71 |      0 |      0 |      1 |     28 |     34 |      6 |     12 |      9 |    101 |      0 |      0 |      0 |      7 |     10 |      3 |      1 |      3 |     53 |      0 |      0 |      0 |      6 |      5 |      3 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 4623000 |       4 |      2 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4623100 |     906 |    263 |    399 |    19 |    0 |    13 |    9 |    3 |     3 |    0 |    197 |    0 |    0 |    0 |    0 |    432 |    474 |      24 |      22 |      14 |       2 |     10 |     14 |      7 |      3 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      1 |      3 |      1 |       12 |        5 |       25 |       30 |       14 |        3 |       8 |       16 |       16 |       39 |       50 |       18 |       12 |      15 |       19 |       27 |       52 |       72 |       21 |       19 |       8 |       23 |       18 |       42 |       58 |       18 |       14 |       8 |       18 |       17 |       25 |       18 |        8 |        3 |       3 |       15 |       28 |       27 |       20 |        8 |        4 |       3 |        4 |        5 |        5 |        8 |        1 |        2 |       0 |        4 |        1 |        4 |        9 |        3 |        1 |       0 |      0 |      1 |     44 |     33 |     27 |      6 |     11 |    141 |      0 |      0 |      3 |     53 |     58 |     41 |     15 |     20 |    209 |      0 |      0 |      2 |     25 |     20 |     11 |      7 |      2 |    130 |      0 |      0 |      2 |      8 |     11 |      1 |      3 |      4 |     18 |      0 |     37 | s03      | R    |
| 4624000 |     377 |    101 |    191 |    10 |    0 |     3 |    3 |    0 |     3 |    0 |     66 |    0 |    0 |    0 |    0 |    185 |    192 |       9 |       7 |       4 |       2 |      6 |     13 |      4 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      2 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      1 |      1 |      0 |        0 |        3 |       11 |       15 |        6 |        6 |       0 |        3 |        8 |       14 |       16 |       12 |        4 |       3 |       10 |       10 |       23 |       23 |       18 |       10 |       3 |        5 |       17 |       19 |       22 |       16 |        8 |       7 |        6 |        5 |       12 |       10 |        3 |        3 |       0 |        5 |        0 |       12 |        5 |        4 |        0 |       1 |        0 |        3 |        2 |        0 |        1 |        2 |       0 |        0 |        6 |        3 |        1 |        1 |        0 |       0 |      0 |      0 |     13 |     15 |      7 |      6 |      5 |     55 |      0 |      0 |      1 |     21 |     30 |     15 |      5 |     14 |    105 |      0 |      0 |      2 |      7 |      5 |      4 |      2 |      6 |     40 |      0 |      0 |      1 |      5 |      3 |      2 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 4624100 |     473 |    154 |    213 |    12 |    0 |     4 |    7 |    1 |     3 |    0 |     79 |    0 |    0 |    0 |    0 |    202 |    271 |      12 |      14 |       6 |       2 |      5 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      2 |      0 |        4 |        3 |        9 |       17 |       12 |       17 |       2 |        3 |        6 |       12 |       12 |       15 |       37 |       5 |        8 |        8 |       21 |       19 |       17 |       16 |       1 |        8 |        6 |       31 |       28 |       17 |       29 |       4 |        6 |        2 |        8 |        9 |        4 |        5 |       0 |        4 |        5 |        9 |       11 |        8 |        8 |       0 |        5 |        4 |        0 |        4 |        0 |        1 |       0 |        3 |        1 |        1 |        1 |        2 |        5 |       0 |      0 |      1 |     24 |     21 |     13 |      4 |      8 |     83 |      0 |      0 |      0 |     31 |     28 |      7 |     12 |      6 |    129 |      0 |      0 |      0 |      5 |     13 |      7 |      3 |      2 |     49 |      0 |      0 |      0 |      4 |      6 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4624200 |      53 |     24 |     13 |     1 |    0 |     0 |    0 |    1 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     22 |     31 |       5 |       1 |       4 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       1 |      2 |      1 |      0 |      0 |        1 |        3 |        2 |        0 |        3 |        1 |       0 |        0 |        3 |        3 |        3 |        2 |        3 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |        1 |        1 |        2 |        0 |        2 |        2 |       0 |        0 |        1 |        3 |        0 |        0 |        2 |       0 |        1 |        2 |        2 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      3 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      9 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4624300 |     220 |     74 |     81 |     7 |    0 |     4 |    0 |    2 |     0 |    0 |     52 |    0 |    0 |    0 |    0 |     83 |    137 |      10 |      17 |       8 |       1 |      4 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      0 |        4 |        4 |        4 |        3 |        1 |        4 |       0 |        4 |        8 |       13 |       13 |        6 |        9 |       1 |        8 |        7 |        8 |        8 |        4 |        4 |       0 |        2 |        7 |       18 |        5 |        5 |        4 |       1 |        5 |        7 |        3 |        1 |        5 |        2 |       0 |        6 |        6 |        5 |        6 |        3 |        3 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        2 |        6 |        0 |        2 |        1 |        1 |       0 |      0 |      0 |     15 |      6 |      2 |      2 |      3 |     46 |      0 |      0 |      0 |     12 |      6 |      1 |      2 |      1 |     59 |      0 |      0 |      0 |      9 |      3 |      1 |      4 |      0 |     35 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4625000 |     495 |    126 |    219 |    13 |    0 |     4 |    3 |    1 |     3 |    0 |    126 |    0 |    0 |    0 |    0 |    213 |    282 |      21 |      16 |      14 |       5 |      5 |      5 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      2 |      1 |      0 |       1 |       2 |       1 |       0 |      3 |     12 |      5 |      0 |        6 |        9 |       13 |       13 |        3 |        4 |       0 |        9 |       18 |       13 |       15 |       13 |        8 |       2 |       11 |       24 |       30 |       20 |       13 |        5 |       1 |        9 |       26 |       36 |       25 |       12 |        7 |       0 |        7 |       14 |        9 |       10 |        4 |        3 |       0 |       19 |       28 |       11 |       12 |        5 |        4 |       0 |        1 |        4 |        3 |        4 |        1 |        1 |       0 |        1 |        3 |        3 |        0 |        2 |        1 |       0 |      0 |      0 |     12 |     11 |      4 |      0 |      3 |     96 |      0 |      0 |      1 |     22 |     21 |      5 |      5 |      2 |    163 |      0 |      0 |      2 |      9 |      6 |      1 |      0 |      1 |    107 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 4625200 |     391 |    115 |    201 |    13 |    0 |     5 |    2 |    1 |     2 |    0 |     52 |    0 |    0 |    0 |    0 |    186 |    205 |      11 |      15 |       4 |       2 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |       2 |       7 |       5 |       1 |      2 |      0 |      2 |      0 |        2 |        4 |        7 |       13 |        8 |        6 |       7 |        9 |        9 |        7 |       16 |        7 |       13 |       7 |        8 |       15 |       20 |       26 |       14 |       14 |       5 |        7 |       14 |       20 |       22 |       10 |       14 |      12 |       11 |        4 |        6 |        6 |        0 |        0 |       1 |        2 |        5 |        5 |        8 |        3 |        1 |       0 |        1 |        1 |        5 |        1 |        0 |        1 |       0 |        5 |        2 |        4 |        2 |        0 |        1 |       0 |      0 |      2 |     12 |     10 |     11 |      3 |      6 |     71 |      0 |      0 |      0 |     20 |     19 |     10 |     14 |     22 |    116 |      0 |      0 |      0 |     10 |      8 |      1 |      1 |      1 |     31 |      0 |      0 |      2 |      1 |      5 |      2 |      1 |      2 |     10 |      0 |     37 | s03      | R    |
| 4626000 |      97 |     24 |     46 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     47 |     50 |       5 |       7 |       1 |       0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |        0 |        3 |        3 |        1 |        1 |        0 |       1 |        1 |        3 |        5 |        3 |        2 |        1 |       0 |        0 |        8 |        9 |        3 |        3 |        2 |       0 |        2 |        9 |        4 |        2 |        3 |        1 |       0 |        1 |        3 |        3 |        2 |        4 |        0 |       0 |        1 |        7 |        0 |        3 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      2 |      2 |      2 |      3 |      0 |      0 |     37 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |     22 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4626100 |     671 |    181 |    322 |    15 |    0 |     9 |    4 |    4 |     3 |    0 |    133 |    0 |    0 |    0 |    0 |    333 |    338 |      14 |      21 |      11 |       0 |      9 |     11 |      1 |      3 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      1 |      2 |      0 |      0 |      2 |      4 |      1 |       2 |       1 |       4 |       0 |      3 |      7 |      1 |      1 |        5 |        8 |       15 |       21 |       10 |       13 |       7 |        7 |       13 |       21 |       27 |       16 |       11 |       7 |       17 |       20 |       53 |       42 |       21 |       13 |       4 |       10 |       18 |       41 |       43 |       16 |       17 |       7 |       10 |       11 |        7 |       14 |       15 |        6 |       2 |        6 |       18 |       15 |       16 |        6 |        6 |       1 |        2 |        6 |        1 |        4 |        5 |        1 |       0 |        3 |        3 |        3 |        4 |        3 |        0 |       0 |      0 |      1 |     23 |     38 |     14 |      5 |      2 |     98 |      0 |      0 |      4 |     49 |     73 |     23 |     18 |     10 |    145 |      0 |      0 |      1 |     13 |     19 |      2 |      1 |      6 |     91 |      0 |      0 |      0 |      2 |     14 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 4626200 |      53 |     10 |     26 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     25 |     28 |       3 |       4 |       3 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        2 |        1 |        0 |        1 |       2 |        0 |        1 |        0 |        0 |        0 |        1 |       1 |        1 |        4 |        4 |        1 |        2 |        1 |       0 |        0 |        2 |        3 |        5 |        1 |        1 |       1 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        2 |        0 |        5 |        3 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |     17 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4630000 |      13 |      2 |      6 |     0 |    0 |     0 |    2 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      4 |      9 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 4640000 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4663000 |     849 |    248 |    404 |    20 |    0 |    13 |    7 |    4 |     8 |    0 |    145 |    0 |    0 |    0 |    0 |    399 |    450 |      26 |      20 |       6 |       0 |     10 |      9 |      2 |      3 |      1 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       2 |       1 |       0 |      6 |      1 |      1 |      1 |        6 |        9 |       20 |       34 |       13 |       10 |       4 |       16 |       14 |       42 |       42 |       10 |       19 |       9 |       19 |       26 |       52 |       61 |       24 |       14 |       4 |       20 |       27 |       62 |       56 |       13 |       17 |       9 |       18 |        4 |       19 |       21 |        5 |        2 |       1 |       17 |        9 |       27 |       16 |        4 |        2 |       0 |        5 |        7 |        6 |        9 |        4 |        2 |       0 |        4 |        4 |        5 |        4 |        1 |        1 |       0 |      0 |      0 |     36 |     39 |     17 |     13 |      5 |    138 |      0 |      0 |      5 |     46 |     96 |     20 |     15 |     30 |    192 |      0 |      0 |      6 |     28 |     13 |     11 |      2 |      8 |     77 |      0 |      0 |      3 |     11 |     13 |      9 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 4663100 |     301 |     89 |    117 |     9 |    0 |     3 |    4 |    1 |     2 |    0 |     76 |    0 |    0 |    0 |    0 |    150 |    151 |      10 |       6 |       9 |       1 |      2 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        6 |        5 |        6 |        6 |        8 |       2 |        3 |       11 |       13 |        6 |        9 |        5 |       6 |        5 |        8 |       18 |       16 |        5 |        2 |       3 |        8 |        8 |       19 |       13 |        7 |        4 |       1 |        8 |       10 |       15 |        8 |        4 |        2 |       0 |        1 |        4 |       13 |        4 |        6 |        1 |       0 |        1 |        1 |        4 |        3 |        0 |        1 |       0 |        3 |        1 |        2 |        1 |        0 |        2 |       0 |      0 |      0 |     14 |     13 |      7 |      3 |      5 |     47 |      0 |      0 |      2 |     15 |     13 |      3 |     11 |      5 |     68 |      0 |      0 |      1 |     15 |     11 |      1 |      1 |      5 |     42 |      0 |      0 |      0 |      5 |      2 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4663900 |     685 |    193 |    299 |    29 |    0 |    13 |    8 |    3 |     3 |    0 |    137 |    0 |    0 |    0 |    0 |    279 |    406 |      20 |      16 |      17 |       5 |      7 |      8 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      3 |      3 |      2 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      2 |      1 |      1 |       10 |        8 |       10 |       14 |        8 |        7 |       1 |       19 |       18 |       37 |       24 |       24 |       13 |       0 |       15 |       26 |       49 |       28 |       17 |        6 |       1 |       16 |       36 |       40 |       32 |       21 |       12 |       0 |       14 |       13 |       13 |       10 |        8 |        0 |       0 |       10 |       14 |       28 |       16 |        7 |        4 |       0 |        2 |        7 |        4 |        4 |        1 |        2 |       1 |        6 |        8 |       10 |        6 |        4 |        1 |       0 |      0 |      1 |     34 |     27 |     16 |      9 |      1 |    105 |      0 |      0 |      1 |     43 |     32 |     13 |      9 |      6 |    195 |      0 |      0 |      3 |     15 |     11 |      6 |      3 |      2 |     97 |      0 |      0 |      1 |      9 |     13 |      2 |      0 |      0 |     31 |      0 |     37 | s03      | R    |
| 4664000 |     830 |    234 |    406 |    25 |    0 |    12 |    5 |    1 |     5 |    0 |    142 |    0 |    0 |    0 |    0 |    405 |    425 |      25 |      14 |      10 |       0 |      8 |      9 |      6 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      5 |      8 |      1 |      1 |       17 |       10 |       10 |       31 |       13 |        4 |       6 |       23 |       18 |       29 |       41 |       15 |       12 |       5 |       25 |       18 |       56 |       77 |       30 |        8 |       5 |       22 |       19 |       50 |       65 |       15 |       13 |       3 |       10 |       12 |       25 |       14 |        4 |        0 |       1 |       15 |        8 |       27 |       15 |        9 |        1 |       1 |        6 |        4 |        5 |        8 |        4 |        2 |       0 |        2 |        4 |        8 |        5 |        0 |        0 |       0 |      0 |      1 |     30 |     30 |     20 |      9 |     11 |    133 |      0 |      0 |      0 |     56 |     73 |     37 |     20 |     15 |    205 |      0 |      0 |      0 |     29 |     24 |      6 |      1 |      6 |     76 |      0 |      0 |      3 |     10 |     12 |      3 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 4664200 |     874 |    258 |    422 |    23 |    0 |     7 |    7 |    1 |     5 |    0 |    151 |    0 |    0 |    0 |    0 |    422 |    452 |      34 |      17 |       9 |       3 |     11 |      9 |      3 |      0 |      2 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      3 |      0 |       14 |       18 |        9 |       30 |       15 |        6 |      12 |       17 |       24 |       27 |       39 |       21 |       11 |      15 |       24 |       35 |       62 |       44 |       43 |        7 |       7 |       17 |       23 |       62 |       48 |       27 |       12 |      11 |       11 |        8 |       20 |       20 |        9 |        1 |       2 |       15 |       14 |       21 |       14 |       12 |        2 |       2 |        5 |        5 |        5 |        6 |        3 |        1 |       0 |        0 |        4 |        7 |        5 |        1 |        1 |       0 |      0 |      2 |     38 |     38 |     12 |     11 |     11 |    146 |      0 |      0 |      4 |     44 |     70 |     30 |     21 |     15 |    238 |      0 |      0 |      2 |     22 |     22 |      7 |      1 |      5 |     92 |      0 |      0 |      1 |      6 |     13 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4664300 |     417 |    127 |    204 |     8 |    0 |     5 |    0 |    0 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    205 |    212 |      23 |      14 |       1 |       1 |      6 |      4 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |       15 |       15 |       10 |        8 |       3 |        8 |        8 |       23 |       15 |       12 |        3 |       3 |       10 |       12 |       27 |       26 |       17 |        6 |       0 |        5 |       17 |       33 |       29 |       14 |        6 |       2 |        7 |        4 |       16 |        8 |        6 |        0 |       0 |        3 |        2 |       13 |        9 |        2 |        1 |       0 |        0 |        2 |        5 |        1 |        3 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |     27 |     15 |      3 |      1 |      2 |     77 |      0 |      0 |      4 |     62 |     34 |      4 |      6 |      4 |     90 |      0 |      0 |      2 |     19 |      1 |      1 |      1 |      0 |     47 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4664400 |     155 |     49 |     70 |     3 |    0 |     0 |    4 |    0 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     57 |     98 |       7 |       5 |       0 |       1 |      1 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        1 |        4 |        6 |        5 |        1 |        1 |       0 |        4 |        4 |        7 |       10 |        5 |        1 |       0 |        3 |        8 |        9 |        8 |        0 |        0 |       0 |        6 |        8 |       16 |        7 |        2 |        3 |       0 |        1 |        3 |        4 |        1 |        1 |        0 |       0 |        4 |        3 |        8 |        1 |        2 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      1 |     10 |      5 |      2 |      0 |      1 |     30 |      0 |      0 |      0 |     14 |      5 |      0 |      1 |      0 |     50 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4664500 |     307 |     97 |    130 |     8 |    0 |     2 |    5 |    3 |     4 |    0 |     58 |    0 |    0 |    0 |    0 |    131 |    176 |      15 |       7 |       6 |       0 |      5 |      3 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        5 |        5 |        4 |       11 |        6 |        2 |       2 |       11 |       10 |       16 |       16 |        5 |        2 |       2 |       13 |       20 |       13 |       12 |        6 |        1 |       1 |        4 |       16 |       10 |       23 |        6 |        4 |       1 |        6 |        6 |        4 |        3 |        3 |        1 |       0 |        6 |        9 |        7 |        7 |        6 |        0 |       0 |        1 |        3 |        2 |        1 |        0 |        0 |       0 |        3 |        4 |        1 |        4 |        3 |        0 |       0 |      0 |      0 |     10 |     11 |      4 |      4 |      1 |     67 |      0 |      0 |      0 |     14 |     13 |      7 |      2 |      2 |     92 |      0 |      0 |      1 |      6 |      6 |      2 |      1 |      0 |     42 |      0 |      0 |      0 |      2 |      6 |      1 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4664600 |      39 |      6 |     21 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     18 |     21 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      1 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        4 |        1 |        5 |        0 |       0 |        0 |        0 |        4 |        2 |        2 |        3 |       0 |        1 |        0 |        1 |        2 |        0 |        2 |       0 |        1 |        0 |        3 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4664900 |     790 |    204 |    425 |    15 |    0 |     6 |    8 |    5 |     1 |    0 |    126 |    0 |    0 |    0 |    0 |    390 |    400 |      15 |      17 |       3 |       2 |      8 |     13 |      9 |      4 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       5 |       0 |       0 |      1 |      1 |      1 |      0 |       10 |       16 |       11 |       23 |       20 |        4 |       3 |       21 |       16 |       16 |       37 |       18 |        7 |       2 |       41 |       39 |       54 |       45 |       33 |       11 |       0 |       34 |       31 |       43 |       43 |       34 |       14 |       3 |        8 |       10 |       16 |       11 |       12 |        4 |       1 |        7 |       13 |       17 |       17 |        6 |        2 |       2 |        4 |        8 |        2 |        2 |        1 |        1 |       0 |        3 |        4 |        5 |        3 |        2 |        0 |       0 |      0 |      0 |     29 |     30 |      5 |      4 |      6 |    130 |      0 |      0 |      2 |     49 |     54 |     25 |     11 |     15 |    269 |      0 |      0 |      1 |     20 |      7 |      6 |      1 |      7 |     84 |      0 |      0 |      1 |      6 |      6 |      1 |      0 |      2 |     19 |      0 |     37 | s03      | R    |
| 4665000 |     781 |    225 |    398 |    20 |    0 |     3 |    3 |    2 |     4 |    0 |    126 |    0 |    0 |    0 |    0 |    370 |    411 |      21 |      12 |      10 |       2 |      8 |     21 |      2 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      2 |      0 |      0 |      1 |      1 |      1 |      2 |      0 |      3 |      0 |       0 |       2 |       2 |       0 |      1 |      0 |      0 |      0 |       12 |        7 |       15 |       29 |       13 |       11 |       7 |       13 |        6 |       31 |       40 |       19 |       14 |       8 |       25 |       28 |       56 |       60 |       26 |       11 |       4 |       27 |       21 |       53 |       55 |       19 |       10 |       3 |        7 |        3 |        8 |       20 |        8 |        4 |       0 |       16 |        6 |       26 |       17 |        4 |        6 |       1 |        2 |        6 |        3 |        3 |        2 |        0 |       0 |        3 |        2 |        3 |        5 |        3 |        0 |       0 |      0 |      2 |     29 |     35 |     15 |     10 |     10 |    124 |      0 |      0 |      5 |     38 |     78 |     36 |     15 |     13 |    213 |      0 |      0 |      1 |     21 |     19 |      4 |      3 |      6 |     72 |      0 |      0 |      1 |      4 |      4 |      4 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 4665100 |     166 |     33 |     95 |     5 |    0 |     3 |    1 |    1 |     1 |    0 |     27 |    0 |    0 |    0 |    0 |     80 |     86 |       2 |      12 |       4 |       0 |      0 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        4 |        5 |        0 |        0 |       0 |        0 |        5 |        6 |        4 |        2 |        1 |       1 |        1 |        7 |       20 |        8 |        7 |        5 |       0 |        3 |        5 |       21 |        7 |        4 |        7 |       0 |        1 |        2 |        7 |        2 |        0 |        0 |       0 |        1 |        2 |        4 |        7 |        0 |        0 |       1 |        0 |        0 |        2 |        1 |        1 |        2 |       0 |        0 |        1 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      6 |      2 |      3 |      0 |     17 |      0 |      0 |      2 |     14 |      8 |      1 |      2 |      0 |     68 |      0 |      0 |      0 |      7 |      1 |      0 |      1 |      0 |     18 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4665200 |     458 |    138 |    228 |    12 |    0 |     5 |    5 |    2 |     2 |    0 |     66 |    0 |    0 |    0 |    0 |    219 |    239 |      11 |      14 |       3 |       0 |      8 |      6 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        8 |        3 |       11 |       11 |       10 |        7 |       5 |        8 |        8 |       16 |       26 |       12 |        8 |       5 |       15 |       10 |       30 |       37 |       21 |        9 |       6 |        9 |       11 |       28 |       24 |       15 |        8 |       5 |        5 |        5 |        5 |        9 |        1 |        1 |       0 |        5 |       11 |       13 |        7 |        4 |        0 |       0 |        2 |        1 |        3 |        3 |        0 |        1 |       0 |        1 |        4 |        6 |        4 |        0 |        1 |       0 |      0 |      0 |     17 |     28 |      7 |      5 |      8 |     73 |      0 |      0 |      0 |     33 |     29 |     29 |     10 |     13 |    114 |      0 |      0 |      2 |     10 |      9 |      6 |      1 |      1 |     37 |      0 |      0 |      1 |      6 |      4 |      3 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 4665300 |     416 |    105 |    213 |     8 |    0 |     4 |    2 |    2 |     0 |    0 |     82 |    0 |    0 |    0 |    0 |    201 |    215 |       5 |       4 |       3 |       1 |      3 |     10 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      2 |      0 |      0 |      0 |        4 |        4 |        6 |       14 |        7 |        3 |       2 |        5 |        9 |       14 |       17 |       11 |        6 |       3 |       12 |       14 |       30 |       33 |       20 |        7 |       2 |        9 |       12 |       28 |       24 |       13 |        6 |       3 |        6 |        5 |        9 |       12 |        4 |        2 |       0 |        9 |        9 |       10 |       10 |        5 |        1 |       0 |        1 |        0 |        2 |        0 |        1 |        1 |       0 |        3 |        1 |        4 |        3 |        0 |        0 |       0 |      0 |      2 |     18 |      7 |      5 |      4 |      5 |     64 |      0 |      0 |      1 |     29 |     32 |     22 |     12 |      5 |    112 |      0 |      0 |      0 |     12 |     12 |     14 |      2 |      1 |     41 |      0 |      0 |      1 |      2 |      5 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4665800 |     123 |     48 |     40 |     3 |    0 |     2 |    1 |    0 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     49 |     74 |       9 |       2 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        5 |        2 |        3 |        3 |        1 |       0 |        2 |       11 |       10 |        7 |        1 |        1 |       0 |        3 |        4 |        6 |        2 |        2 |        0 |       0 |        4 |        5 |        4 |        6 |        4 |        0 |       0 |        4 |        2 |        1 |        1 |        2 |        3 |       0 |        5 |        2 |        5 |        1 |        2 |        1 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      2 |      8 |      5 |      3 |      2 |      3 |     25 |      0 |      0 |      0 |      5 |      2 |      0 |      1 |      2 |     30 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      2 |     22 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4665900 |       5 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4666000 |     514 |    148 |    248 |    11 |    0 |     7 |    6 |    5 |     3 |    0 |     86 |    0 |    0 |    0 |    0 |    251 |    263 |      13 |       6 |       4 |       4 |      8 |      4 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      2 |        7 |        7 |        9 |       12 |       13 |        5 |       5 |        6 |        8 |       18 |       20 |       13 |        9 |      16 |       16 |       17 |       41 |       35 |       14 |       11 |       3 |        9 |       11 |       37 |       24 |       15 |       11 |       4 |        7 |        6 |        9 |        8 |        4 |        2 |       0 |        5 |        7 |       18 |        9 |        8 |        1 |       2 |        8 |        4 |        2 |        0 |        4 |        2 |       0 |        4 |        2 |        4 |        1 |        1 |        0 |       0 |      0 |      1 |     17 |     26 |      9 |      2 |      7 |     86 |      0 |      0 |      1 |     45 |     53 |     21 |     12 |      8 |    108 |      0 |      0 |      2 |     18 |     16 |      3 |      4 |      1 |     42 |      0 |      0 |      0 |      7 |      8 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4666100 |     496 |    177 |    259 |    16 |    0 |     5 |    0 |    0 |     0 |    0 |     39 |    0 |    0 |    0 |    0 |    193 |    303 |      10 |       4 |       1 |       0 |     14 |     15 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        0 |        1 |        4 |        7 |       45 |       2 |        0 |        1 |        1 |        8 |       27 |       79 |       1 |        0 |        2 |        0 |        3 |       14 |       87 |       3 |        0 |        1 |        2 |        9 |       23 |      114 |       1 |        0 |        0 |        1 |        0 |        6 |        9 |       0 |        0 |        0 |        1 |        1 |        7 |       14 |       0 |        0 |        0 |        0 |        0 |        1 |        7 |       0 |        0 |        1 |        0 |        0 |        1 |       11 |       0 |      0 |      0 |     27 |     28 |     13 |     11 |     13 |     85 |      0 |      0 |      1 |     36 |     52 |     14 |     20 |      9 |    127 |      0 |      0 |      0 |      6 |      5 |      0 |      2 |      0 |     26 |      0 |      0 |      0 |      5 |      7 |      3 |      1 |      2 |      3 |      0 |     37 | s03      | R    |
| 4666200 |     489 |    151 |    224 |    16 |    0 |     8 |    4 |    2 |     2 |    0 |     82 |    0 |    0 |    0 |    0 |    230 |    259 |      19 |       9 |       6 |       4 |      3 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      2 |      2 |      4 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |       10 |       16 |       18 |        8 |        5 |       2 |       12 |        9 |       22 |       19 |        8 |       13 |       4 |       18 |       28 |       22 |       26 |       14 |        4 |       2 |       17 |       20 |       29 |       31 |        5 |        6 |       2 |        6 |        6 |        7 |       11 |        3 |        1 |       0 |        6 |       15 |       16 |        8 |        2 |        1 |       0 |        3 |        2 |        4 |        7 |        1 |        0 |       1 |        2 |        2 |        3 |        4 |        3 |        0 |       0 |      0 |      1 |     13 |     28 |     11 |      6 |      6 |     86 |      0 |      0 |      2 |     28 |     32 |     13 |      5 |      5 |    139 |      0 |      0 |      2 |     11 |      4 |      3 |      2 |      2 |     58 |      0 |      0 |      0 |      2 |     12 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4666300 |     595 |    173 |    308 |     8 |    0 |     7 |   11 |    0 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    288 |    307 |      15 |      20 |       7 |       1 |      5 |     17 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |       11 |        5 |        7 |       15 |       17 |        4 |      16 |        7 |       14 |       16 |       29 |       12 |        6 |      14 |       22 |       21 |       30 |       35 |       31 |        9 |       5 |       17 |       24 |       32 |       47 |       24 |        5 |       6 |        7 |       10 |       10 |       10 |        5 |        4 |       0 |        4 |        8 |       10 |       16 |        2 |        1 |       0 |        6 |        1 |        3 |        2 |        2 |        0 |       0 |        0 |        5 |        2 |        4 |        2 |        0 |       0 |      0 |      0 |     15 |     25 |     10 |      8 |     10 |    105 |      0 |      0 |      1 |     33 |     50 |     25 |     12 |     18 |    169 |      0 |      0 |      0 |     13 |     12 |      6 |      2 |      1 |     53 |      0 |      0 |      1 |     10 |      4 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4666400 |     645 |    183 |    332 |     8 |    0 |     3 |    3 |    7 |     3 |    0 |    106 |    0 |    0 |    0 |    0 |    317 |    328 |      22 |      15 |       5 |       2 |      5 |     17 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |       0 |       0 |       3 |       0 |      2 |      0 |      2 |      0 |       16 |        8 |       15 |       23 |        9 |        6 |       0 |       15 |       11 |       22 |       35 |       10 |       11 |       2 |       21 |       20 |       38 |       48 |       33 |        6 |       1 |       17 |       19 |       45 |       52 |       20 |       11 |       1 |        6 |        7 |       12 |       18 |       11 |        3 |       1 |        9 |        7 |       12 |       11 |        6 |        2 |       1 |        3 |        4 |        3 |        1 |        2 |        2 |       0 |        2 |        3 |        1 |        1 |        1 |        1 |       0 |      0 |      1 |     35 |     34 |     10 |      8 |      9 |     86 |      0 |      0 |      5 |     33 |     57 |     16 |     26 |     24 |    171 |      0 |      0 |      2 |     13 |     11 |     10 |      2 |      3 |     65 |      0 |      0 |      0 |      6 |     10 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4666500 |     243 |     80 |    106 |     4 |    0 |     3 |    3 |    1 |     1 |    0 |     45 |    0 |    0 |    0 |    0 |    105 |    138 |       9 |       7 |       1 |       0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      1 |        2 |        7 |        3 |        3 |        5 |        6 |       0 |        4 |        7 |        8 |       11 |       13 |       11 |       0 |        8 |       10 |        7 |        9 |        8 |        8 |       2 |        7 |       13 |        8 |       14 |        7 |        5 |       0 |        4 |        4 |        4 |        7 |        2 |        0 |       0 |        3 |        4 |        7 |        5 |        4 |        1 |       0 |        0 |        4 |        2 |        0 |        0 |        0 |       0 |        1 |        1 |        4 |        0 |        0 |        0 |       0 |      0 |      0 |     15 |      5 |      4 |      4 |      2 |     50 |      0 |      0 |      0 |      6 |     10 |      1 |      2 |      6 |     81 |      0 |      0 |      2 |      9 |      1 |      2 |      0 |      3 |     28 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4666600 |     287 |     87 |    135 |     9 |    0 |     1 |    0 |    1 |     2 |    0 |     52 |    0 |    0 |    0 |    0 |    125 |    162 |       8 |       9 |       1 |       0 |     11 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        5 |        4 |        9 |        6 |        5 |       0 |        7 |        7 |        7 |       16 |        2 |       14 |       1 |        5 |       11 |       14 |       16 |       11 |        8 |       0 |        6 |       10 |       13 |       17 |       12 |       12 |       0 |        3 |        4 |        5 |        2 |        7 |        2 |       0 |        6 |        5 |        4 |        6 |        4 |        4 |       0 |        0 |        2 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        4 |        1 |        1 |        1 |       0 |      0 |      0 |     17 |     11 |      5 |      3 |      2 |     49 |      0 |      0 |      2 |     23 |     17 |      7 |      3 |      4 |     79 |      0 |      0 |      0 |     12 |      3 |      3 |      2 |      0 |     32 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 4666800 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4667000 |     437 |    137 |    209 |    10 |    0 |     4 |    1 |    1 |     1 |    0 |     74 |    0 |    0 |    0 |    0 |    211 |    226 |      17 |      13 |       6 |       2 |      5 |     12 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      4 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |       11 |        9 |       14 |        5 |        7 |       8 |        3 |        9 |       16 |       24 |        7 |        9 |      11 |       11 |       16 |       24 |       24 |       14 |       11 |      10 |       10 |       15 |       18 |       15 |       17 |       11 |      13 |        2 |        8 |       11 |        9 |        3 |        3 |       0 |        2 |        9 |       12 |        7 |        5 |        3 |       0 |        2 |        2 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        3 |        2 |        3 |        1 |       0 |      0 |      1 |     17 |      9 |      3 |     11 |      0 |     96 |      0 |      0 |      1 |     23 |     35 |      6 |      7 |     10 |    127 |      0 |      0 |      2 |     12 |      8 |      4 |      4 |      3 |     41 |      0 |      0 |      0 |      8 |      3 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4667100 |     124 |     45 |     53 |     2 |    0 |     0 |    2 |    3 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     52 |     72 |       6 |       0 |       1 |       0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        4 |        1 |        1 |       3 |        3 |        3 |        6 |        9 |        5 |        2 |       5 |        2 |        2 |        5 |        8 |        3 |        4 |       1 |        3 |        4 |        9 |        6 |        3 |        3 |       0 |        3 |        1 |        3 |        2 |        1 |        1 |       0 |        0 |        0 |        2 |        3 |        1 |        1 |       1 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      8 |      1 |      1 |      1 |     31 |      0 |      0 |      0 |      9 |      7 |      0 |      3 |      1 |     33 |      0 |      0 |      1 |      1 |      1 |      1 |      1 |      2 |     12 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4668000 |     454 |    150 |    181 |    18 |    0 |     8 |    3 |    4 |     0 |    0 |     90 |    0 |    0 |    0 |    0 |    214 |    240 |      13 |      17 |       8 |       3 |     13 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      2 |      2 |      0 |        7 |       10 |       17 |       14 |       13 |        7 |       6 |       10 |        5 |       19 |       18 |       10 |       11 |       3 |        8 |       18 |       24 |       23 |        5 |        4 |       4 |       12 |       14 |       25 |       24 |       11 |        5 |       4 |        9 |        5 |        9 |       10 |        2 |        2 |       1 |       10 |        8 |       14 |       13 |        3 |        3 |       1 |        4 |        2 |        4 |        6 |        0 |        0 |       0 |        4 |        3 |        3 |        3 |        2 |        2 |       0 |      0 |      4 |     17 |     24 |      5 |      0 |      4 |     96 |      0 |      0 |      2 |     33 |     26 |      6 |      1 |     11 |    102 |      0 |      0 |      5 |     20 |      4 |     11 |      2 |      1 |     47 |      0 |      0 |      0 |      8 |      6 |      2 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 4669000 |     343 |    120 |    165 |     6 |    0 |     5 |    1 |    0 |     1 |    0 |     45 |    0 |    0 |    0 |    0 |    169 |    174 |      15 |       9 |       2 |       0 |      1 |      9 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        8 |       10 |       11 |        8 |        6 |       9 |        6 |        6 |        7 |       17 |        8 |       11 |      12 |        4 |       17 |       19 |       18 |       11 |       11 |       5 |        3 |        7 |       26 |       18 |       14 |        9 |       3 |        4 |        3 |        4 |        7 |        2 |        2 |       1 |        4 |        6 |        4 |        5 |        2 |        1 |       0 |        2 |        3 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        3 |        0 |       0 |      0 |      0 |     10 |     14 |      7 |      1 |      5 |     83 |      0 |      0 |      2 |     13 |     31 |     14 |      7 |      7 |     91 |      0 |      0 |      2 |      5 |      6 |      1 |      3 |      3 |     25 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 4669100 |     647 |    175 |    332 |     9 |    0 |     3 |    3 |    2 |     1 |    0 |    122 |    0 |    0 |    0 |    0 |    317 |    330 |       8 |      10 |       6 |       1 |      6 |     15 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      1 |      0 |        5 |        4 |       14 |       15 |       21 |        5 |       8 |        6 |        9 |       22 |       28 |       22 |        5 |      11 |       14 |       14 |       46 |       55 |       30 |        9 |       9 |       10 |       15 |       43 |       42 |       19 |       15 |      11 |        7 |        8 |       11 |       18 |        7 |        5 |       0 |       15 |        8 |       16 |       20 |        6 |        1 |       0 |        4 |        2 |        0 |        4 |        2 |        0 |       0 |        2 |        0 |        2 |        2 |        0 |        0 |       0 |      0 |      3 |     18 |     33 |     15 |      5 |      5 |     96 |      0 |      0 |      1 |     41 |     71 |     25 |     15 |      8 |    171 |      0 |      0 |      1 |     15 |     21 |      7 |      1 |      5 |     72 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4670000 |     506 |    160 |    232 |    12 |    0 |     7 |    3 |    5 |     2 |    0 |     85 |    0 |    0 |    0 |    0 |    249 |    257 |      16 |      10 |       5 |       4 |      3 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      4 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      2 |      2 |      0 |        6 |        5 |       15 |       11 |        8 |       15 |       8 |        9 |       11 |       11 |       23 |       17 |       12 |       9 |        7 |       18 |       30 |       25 |       20 |       12 |       8 |        8 |       13 |       23 |       26 |       20 |       14 |       8 |       11 |        6 |        7 |       10 |        7 |        4 |       0 |        5 |        8 |       11 |        8 |        6 |        2 |       0 |        1 |        3 |        3 |        5 |        3 |        1 |       0 |        3 |        4 |        1 |        3 |        1 |        1 |       0 |      0 |      1 |     15 |     16 |     14 |      4 |      8 |    102 |      0 |      0 |      2 |     35 |     32 |     14 |     11 |      9 |    129 |      0 |      0 |      2 |     18 |     14 |      5 |      0 |      5 |     41 |      0 |      0 |      0 |      3 |     10 |      2 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 4670100 |     498 |    146 |    240 |    18 |    0 |     1 |    2 |    5 |     2 |    0 |     84 |    0 |    0 |    0 |    0 |    237 |    261 |      15 |       8 |       5 |       2 |      7 |     17 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      2 |      1 |        5 |        2 |        7 |       16 |       13 |        5 |       5 |       14 |       11 |       13 |       24 |       17 |        6 |       8 |       15 |       15 |       34 |       37 |       15 |        8 |       4 |       13 |       16 |       24 |       31 |       15 |        9 |       4 |       10 |        3 |        9 |       11 |        5 |        4 |       2 |        8 |        6 |       11 |        8 |        5 |        1 |       1 |        1 |        3 |        3 |        1 |        2 |        2 |       0 |        3 |        3 |        4 |        3 |        1 |        2 |       0 |      0 |      0 |     14 |     20 |      7 |      9 |      3 |     93 |      0 |      0 |      3 |     28 |     40 |     13 |      7 |     13 |    136 |      0 |      0 |      0 |     17 |     13 |      3 |      2 |      1 |     48 |      0 |      0 |      0 |      9 |      7 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4670200 |     396 |    102 |    221 |     6 |    0 |     7 |    3 |    3 |     2 |    0 |     52 |    0 |    0 |    0 |    0 |    200 |    196 |      11 |      16 |       3 |       2 |      3 |     19 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |        5 |       15 |        9 |        8 |       6 |        4 |        3 |       11 |       11 |        9 |       10 |       5 |       14 |       10 |       23 |       30 |       20 |        9 |       6 |        9 |       12 |       24 |       28 |       18 |       11 |       7 |        2 |        5 |        5 |        8 |        4 |        1 |       0 |        9 |        2 |        6 |        3 |        2 |        5 |       0 |        2 |        3 |        3 |        3 |        2 |        1 |       0 |        2 |        0 |        1 |        4 |        0 |        0 |       0 |      0 |      0 |      6 |      9 |      8 |      2 |      4 |     73 |      0 |      0 |      2 |     31 |     26 |     15 |      7 |     11 |    129 |      0 |      0 |      1 |      6 |      3 |      2 |      1 |      3 |     36 |      0 |      0 |      0 |      3 |      9 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4670300 |     388 |    130 |    168 |     5 |    0 |     8 |    5 |    0 |     1 |    0 |     71 |    0 |    0 |    0 |    0 |    170 |    218 |      12 |       9 |      10 |       1 |      9 |      3 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      2 |      1 |      1 |        2 |        5 |        9 |       13 |       13 |        8 |       5 |        7 |        6 |        7 |       25 |       12 |        8 |      10 |        6 |       10 |       18 |       17 |       12 |        6 |       1 |       14 |        9 |       26 |       26 |       11 |        7 |       5 |        7 |        4 |        6 |        8 |        5 |        0 |       2 |        6 |        7 |       12 |        7 |        5 |        2 |       0 |        2 |        1 |        3 |        2 |        4 |        1 |       0 |        0 |        1 |        3 |        2 |        0 |        0 |       0 |      0 |      1 |      7 |     20 |      7 |      6 |      5 |     84 |      0 |      0 |      0 |     17 |     35 |     13 |      3 |      7 |     93 |      0 |      0 |      0 |     18 |     10 |      2 |      2 |      1 |     38 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4670400 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4671000 |     660 |    215 |    284 |    17 |    0 |     4 |    6 |    2 |     5 |    0 |    127 |    0 |    0 |    0 |    0 |    313 |    347 |      22 |      17 |       9 |       2 |      5 |     10 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        8 |        9 |       20 |       19 |        9 |       19 |       7 |        6 |       10 |       31 |       28 |       17 |       22 |      10 |       19 |       21 |       41 |       34 |       15 |        9 |       4 |        7 |       25 |       38 |       38 |       14 |       11 |       8 |       11 |       10 |       15 |       15 |        6 |        5 |       0 |       11 |       11 |       25 |       11 |        4 |        3 |       0 |        1 |        3 |        4 |        2 |        4 |        3 |       0 |        2 |        3 |        5 |        4 |        2 |        1 |       0 |      0 |      2 |     21 |     30 |     12 |     10 |      6 |    134 |      0 |      0 |      1 |     33 |     44 |     21 |     10 |     18 |    157 |      0 |      0 |      5 |     28 |     12 |      4 |      1 |      4 |     73 |      0 |      0 |      0 |      6 |      9 |      3 |      0 |      3 |     13 |      0 |     37 | s03      | R    |
| 4671100 |      79 |     24 |     29 |     1 |    0 |     1 |    1 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     47 |     32 |       1 |       0 |       2 |       0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        4 |        1 |        3 |        2 |       1 |        1 |        4 |        1 |        2 |        0 |        1 |       1 |        1 |        5 |        5 |        1 |        4 |        1 |       0 |        3 |        5 |        3 |        1 |        0 |        0 |       0 |        3 |        4 |        5 |        2 |        0 |        0 |       0 |        1 |        1 |        6 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |     22 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     19 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4671500 |     328 |    107 |    154 |    13 |    0 |     3 |    2 |    1 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    158 |    170 |      15 |      12 |       3 |       0 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        5 |        4 |        9 |       15 |        8 |        4 |       0 |        5 |       11 |       14 |       13 |        6 |       12 |       1 |        4 |        7 |       21 |       25 |       13 |        7 |       0 |        4 |        9 |       25 |       28 |        6 |        5 |       0 |        3 |        2 |       11 |        6 |        1 |        1 |       0 |        3 |        3 |        9 |        4 |        2 |        2 |       0 |        3 |        5 |        2 |        2 |        0 |        0 |       0 |        2 |        3 |        1 |        2 |        0 |        0 |       0 |      0 |      1 |     14 |     20 |      7 |      5 |      4 |     56 |      0 |      0 |      2 |     20 |     28 |     17 |     10 |      8 |     69 |      0 |      0 |      0 |      9 |      7 |      7 |      0 |      1 |     23 |      0 |      0 |      1 |      3 |      4 |      4 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4672000 |     362 |    123 |    144 |    10 |    0 |     3 |    1 |    1 |     4 |    0 |     76 |    0 |    0 |    0 |    0 |    149 |    213 |      26 |      14 |       5 |       2 |      6 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      3 |      1 |        7 |        7 |        8 |        8 |        4 |        5 |       7 |        6 |       15 |       17 |       14 |        5 |       15 |       5 |        2 |       18 |       22 |       11 |        6 |        4 |       0 |        5 |       20 |       28 |       13 |        5 |        7 |       3 |        4 |        7 |        8 |        7 |        1 |        2 |       0 |        7 |       18 |        9 |        7 |        3 |        3 |       0 |        1 |        2 |        4 |        2 |        1 |        1 |       0 |        1 |        1 |        4 |        1 |        0 |        1 |       0 |      0 |      0 |     23 |     10 |      4 |      1 |      2 |     83 |      0 |      0 |      0 |     19 |     22 |     10 |      2 |      6 |     85 |      0 |      0 |      1 |     19 |      9 |      6 |      0 |      2 |     39 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4672100 |     309 |     87 |    156 |     8 |    0 |     5 |    5 |    0 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    142 |    167 |      19 |       8 |       5 |       0 |      3 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      1 |      0 |      0 |        5 |        2 |        9 |        9 |        6 |        5 |       4 |        3 |        4 |        7 |       14 |        6 |        5 |       8 |       12 |       12 |       19 |       17 |        3 |        6 |       6 |        5 |       16 |       26 |       10 |       12 |        7 |       5 |        3 |        4 |        4 |        9 |        0 |        1 |       1 |        3 |        9 |        7 |        4 |        2 |        0 |       0 |        0 |        0 |        2 |        2 |        1 |        0 |       0 |        1 |        3 |        4 |        4 |        2 |        0 |       0 |      0 |      0 |     11 |      9 |      6 |      1 |      3 |     57 |      0 |      0 |      5 |     15 |     19 |      5 |     13 |      4 |     95 |      0 |      0 |      0 |      9 |      3 |      0 |      1 |      3 |     31 |      0 |      0 |      0 |      3 |      5 |      1 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4673000 |     332 |    114 |    146 |     4 |    0 |     3 |    3 |    1 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    164 |    168 |      10 |       8 |       8 |       1 |      2 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |        3 |        9 |       11 |        8 |        8 |       6 |        9 |       11 |        9 |       12 |        8 |        5 |       8 |       13 |        9 |        8 |       29 |        9 |        3 |       5 |        8 |        4 |       20 |       20 |       10 |        3 |       5 |        2 |       10 |        4 |        6 |        3 |        2 |       0 |        7 |        6 |       10 |        4 |        3 |        3 |       0 |        0 |        0 |        6 |        2 |        0 |        1 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |     14 |     15 |      1 |      5 |      5 |     74 |      0 |      0 |      2 |     23 |     20 |     12 |      9 |      7 |     73 |      0 |      0 |      2 |     14 |     14 |      5 |      2 |      3 |     20 |      0 |      0 |      0 |      5 |      4 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 4674000 |     597 |    163 |    310 |     3 |    0 |     8 |    4 |    2 |     4 |    0 |    103 |    0 |    0 |    0 |    0 |    279 |    318 |      11 |      11 |       6 |       0 |      6 |     14 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       4 |       0 |       0 |      2 |      8 |      1 |      0 |        2 |       11 |       14 |       19 |        8 |        4 |       0 |        5 |       10 |       35 |       30 |       14 |       11 |       0 |       14 |       24 |       57 |       37 |       16 |        8 |       0 |       15 |       28 |       52 |       35 |       10 |       14 |       0 |        5 |        8 |       19 |       18 |        4 |        0 |       0 |        7 |        8 |       16 |       13 |        5 |        0 |       0 |        2 |        4 |        1 |        3 |        0 |        1 |       0 |        2 |        4 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |     49 |     64 |      1 |      0 |      0 |     49 |      0 |      0 |      2 |     61 |    121 |      1 |      0 |      3 |    122 |      0 |      0 |      1 |     27 |     21 |      0 |      0 |      0 |     54 |      0 |      0 |      1 |      4 |      8 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4674100 |     344 |     92 |    181 |     7 |    0 |     7 |    6 |    1 |     2 |    0 |     48 |    0 |    0 |    0 |    0 |    163 |    181 |      16 |      12 |       5 |       1 |      1 |     16 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        3 |        3 |        8 |        9 |        6 |        6 |       4 |        4 |        4 |       13 |       11 |        6 |        8 |       7 |        7 |       11 |       29 |       13 |       12 |       10 |       5 |        3 |       17 |       25 |       16 |       11 |       15 |       7 |        3 |        3 |        8 |        8 |        0 |        1 |       0 |        5 |        5 |        8 |        3 |        3 |        0 |       1 |        2 |        5 |        3 |        3 |        1 |        0 |       0 |        1 |        1 |        5 |        2 |        0 |        0 |       0 |      0 |      0 |     14 |     11 |      7 |      5 |      3 |     52 |      0 |      0 |      3 |     25 |     24 |     14 |      4 |      8 |    103 |      0 |      0 |      0 |      9 |      6 |      3 |      1 |      1 |     28 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4674200 |     424 |    117 |    202 |    11 |    0 |     5 |    7 |    1 |     2 |    0 |     79 |    0 |    0 |    0 |    0 |    192 |    232 |      13 |      26 |       6 |       0 |      8 |      8 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        9 |        5 |        4 |       18 |        1 |        4 |       2 |        7 |       15 |       14 |       23 |        6 |        8 |       1 |       12 |       18 |       27 |       21 |       15 |        5 |       1 |       11 |       23 |       27 |       25 |        7 |        7 |       3 |        3 |       15 |        4 |        8 |        5 |        1 |       0 |       10 |       12 |        5 |       11 |        3 |        2 |       0 |        1 |        6 |        1 |        5 |        1 |        0 |       0 |        1 |        4 |        1 |        4 |        2 |        0 |       0 |      0 |      0 |     17 |     12 |     10 |      4 |      2 |     72 |      0 |      0 |      0 |     30 |     19 |     14 |     11 |      1 |    127 |      0 |      0 |      1 |      5 |      5 |      5 |      3 |      1 |     59 |      0 |      0 |      1 |      1 |      7 |      2 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 4675000 |     227 |     65 |    106 |     8 |    0 |     3 |    0 |    2 |     1 |    0 |     42 |    0 |    0 |    0 |    0 |    100 |    127 |       8 |      10 |       7 |       3 |      0 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        5 |        7 |        6 |        6 |       2 |        2 |        5 |        7 |        7 |        7 |        3 |       3 |        4 |        5 |       10 |        7 |       10 |        5 |       6 |        5 |        5 |       22 |       13 |        6 |        5 |       3 |        2 |        2 |        7 |        5 |        2 |        0 |       0 |        5 |        5 |        5 |        5 |        3 |        1 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |        3 |        2 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |     10 |      4 |      4 |      6 |     37 |      0 |      0 |      0 |     17 |     14 |      6 |      4 |      8 |     57 |      0 |      0 |      0 |     12 |      4 |      3 |      0 |      5 |     18 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4675100 |      82 |     22 |     38 |     4 |    0 |     1 |    2 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     36 |     46 |       7 |       2 |       2 |       0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        2 |        1 |        1 |       1 |        0 |        3 |        5 |        1 |        2 |        0 |       3 |        0 |        1 |        8 |        3 |        2 |        2 |       0 |        1 |        1 |       10 |        6 |        2 |        1 |       1 |        0 |        2 |        4 |        2 |        0 |        0 |       0 |        1 |        1 |        2 |        0 |        1 |        2 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      1 |      3 |      4 |      0 |      0 |      0 |     14 |      0 |      0 |      2 |     10 |      4 |      2 |      5 |      3 |     12 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 4675900 |      31 |     11 |     10 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     14 |     17 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        4 |       0 |        0 |        0 |        0 |        0 |        1 |        5 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        1 |        5 |       0 |        0 |        0 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        3 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      0 |      1 |      6 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4676000 |     369 |    149 |    165 |     4 |    0 |     6 |    3 |    1 |     1 |    0 |     40 |    0 |    0 |    0 |    0 |    150 |    219 |       2 |       1 |       4 |       1 |     16 |      8 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        9 |       42 |       2 |        1 |        0 |        2 |        5 |       19 |       59 |       8 |        0 |        1 |        1 |        5 |       11 |       51 |       4 |        0 |        0 |        1 |        3 |        7 |       72 |       9 |        1 |        0 |        1 |        0 |        3 |       11 |       0 |        0 |        0 |        1 |        2 |       11 |        9 |       1 |        0 |        0 |        0 |        0 |        1 |        5 |       0 |        1 |        0 |        0 |        3 |        2 |        3 |       0 |      0 |      2 |     16 |     23 |     12 |      9 |      3 |     84 |      0 |      0 |      0 |     22 |     36 |      8 |     15 |      4 |     80 |      0 |      0 |      0 |      6 |     11 |      1 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4676100 |     362 |    118 |    154 |     9 |    0 |     4 |    6 |    1 |     5 |    0 |     65 |    0 |    0 |    0 |    0 |    150 |    212 |      12 |       7 |       3 |       1 |      6 |     11 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |        4 |        4 |       10 |       12 |        2 |        9 |       2 |        7 |       14 |       21 |        8 |       11 |       12 |       2 |        2 |       16 |       26 |       14 |        3 |        5 |       1 |        7 |       13 |       26 |       15 |       18 |        8 |       0 |        4 |       10 |        4 |        6 |        3 |        3 |       0 |        5 |        9 |        5 |        9 |        3 |        4 |       0 |        2 |        4 |        0 |        0 |        1 |        3 |       0 |        4 |        4 |        0 |        3 |        3 |        1 |       0 |      0 |      1 |     12 |     13 |      6 |      4 |      5 |     77 |      0 |      0 |      2 |     14 |     25 |      5 |      9 |      3 |     96 |      0 |      0 |      3 |      3 |      9 |      0 |      2 |      1 |     47 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 4676200 |     493 |    147 |    191 |    15 |    0 |     7 |    7 |    3 |     1 |    0 |    122 |    0 |    0 |    0 |    0 |    207 |    286 |       8 |       6 |       8 |       3 |      7 |      5 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      1 |        2 |       11 |        9 |       11 |        7 |        5 |       1 |        9 |       18 |       19 |       24 |       16 |       14 |       1 |        9 |       20 |       28 |       24 |        6 |        8 |       2 |        6 |       24 |       30 |       19 |        5 |        8 |       2 |       11 |        6 |       13 |        7 |        7 |        6 |       0 |        6 |       14 |       21 |       17 |        6 |        8 |       0 |        1 |        5 |        4 |        3 |        1 |        0 |       0 |        1 |        3 |        3 |        8 |        1 |        3 |       0 |      0 |      0 |     17 |     22 |      4 |      9 |      8 |     87 |      0 |      0 |      4 |     32 |     16 |     15 |      6 |     11 |    107 |      0 |      0 |      2 |     24 |     11 |      4 |      6 |     10 |     65 |      0 |      0 |      0 |      9 |      5 |      0 |      0 |      1 |     18 |      0 |     37 | s03      | R    |
| 4677000 |     439 |    141 |    175 |    16 |    0 |     8 |    6 |    3 |     1 |    0 |     89 |    0 |    0 |    0 |    0 |    195 |    244 |       9 |      10 |       8 |       1 |     10 |      5 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        4 |        8 |       18 |        7 |        6 |       7 |        6 |       11 |       19 |       25 |       10 |        7 |      10 |       10 |       11 |       20 |       20 |       16 |        8 |       2 |        8 |       15 |       21 |       20 |       10 |        9 |       5 |        3 |        4 |       11 |       10 |        5 |        4 |       1 |        8 |       10 |       14 |        9 |        6 |        3 |       1 |        3 |        5 |        5 |        3 |        0 |        1 |       0 |        3 |        0 |        7 |        4 |        1 |        2 |       0 |      0 |      0 |     23 |     19 |     13 |      5 |      9 |     72 |      0 |      0 |      4 |     16 |     22 |     13 |      3 |      5 |    112 |      0 |      0 |      2 |     14 |     12 |      3 |      1 |      4 |     53 |      0 |      0 |      2 |      3 |      6 |      4 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 4677100 |       7 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |      5 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4677200 |     100 |     44 |     32 |     3 |    0 |     4 |    2 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     43 |     57 |       3 |       4 |       1 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        5 |        3 |        3 |        4 |       1 |        2 |        4 |        2 |        8 |        2 |        8 |       0 |        0 |        6 |        6 |        3 |        1 |        1 |       0 |        2 |        0 |        3 |        7 |        0 |        2 |       1 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        1 |        2 |        3 |        4 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        3 |       0 |        0 |        1 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |      5 |      5 |      5 |      0 |      3 |     26 |      0 |      0 |      1 |      5 |      2 |      2 |      1 |      2 |     19 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4678000 |     443 |    164 |    220 |     5 |    0 |     3 |    3 |    2 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |    172 |    271 |       7 |       7 |       1 |       0 |      7 |     22 |      2 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        4 |        3 |        7 |       45 |       4 |        0 |        1 |        2 |        4 |        8 |       76 |      10 |        0 |        3 |        5 |        6 |       15 |       52 |       3 |        0 |        1 |        2 |        7 |       28 |       89 |       9 |        0 |        3 |        1 |        0 |        2 |       15 |       0 |        1 |        0 |        1 |        3 |        4 |       16 |       0 |        0 |        0 |        0 |        1 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        4 |        5 |       0 |      0 |      0 |     22 |     26 |     10 |      7 |      7 |     92 |      0 |      0 |      0 |     37 |     40 |      8 |      4 |      5 |    126 |      0 |      0 |      3 |      9 |      6 |      1 |      2 |      1 |     24 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4679000 |     170 |     60 |     82 |     3 |    0 |     2 |    1 |    1 |     1 |    0 |     20 |    0 |    0 |    0 |    0 |     65 |    105 |       9 |       5 |       1 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        3 |        5 |        3 |        8 |       1 |        1 |        2 |        5 |        7 |        8 |       15 |       1 |        1 |        2 |        6 |        7 |        6 |       11 |       3 |        4 |        5 |        6 |        5 |        7 |       15 |       4 |        1 |        0 |        3 |        1 |        1 |        1 |       0 |        1 |        1 |        2 |        5 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        2 |        1 |        1 |        1 |       0 |      0 |      0 |      9 |     14 |      3 |      1 |      1 |     32 |      0 |      0 |      0 |     10 |     14 |      9 |      3 |      1 |     45 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      2 |     14 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4679200 |     263 |     78 |    124 |    10 |    0 |     4 |    3 |    0 |     0 |    0 |     44 |    0 |    0 |    0 |    0 |    127 |    136 |       2 |      16 |       4 |       1 |      3 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       1 |      0 |      1 |      0 |      0 |        6 |        4 |        3 |        7 |        3 |        2 |       3 |        4 |        8 |       13 |       11 |       10 |        3 |       1 |        5 |       16 |       21 |       18 |        4 |        5 |       0 |        6 |       14 |       15 |       12 |        4 |        1 |       3 |        5 |        0 |        1 |        8 |        5 |        0 |       0 |        4 |        6 |        5 |        7 |        2 |        1 |       0 |        2 |        1 |        3 |        3 |        2 |        0 |       0 |        3 |        0 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |     15 |      7 |      3 |      1 |      3 |     49 |      0 |      0 |      0 |     25 |     14 |      3 |      9 |     10 |     63 |      0 |      0 |      2 |      2 |      3 |      6 |      2 |      4 |     25 |      0 |      0 |      0 |      1 |      6 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4679300 |     134 |     67 |     46 |     1 |    0 |     1 |    1 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     43 |     91 |       2 |       3 |       2 |       0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        4 |       16 |       2 |        0 |        0 |        0 |        1 |       11 |       31 |       2 |        0 |        0 |        1 |        0 |        5 |        9 |       0 |        0 |        0 |        1 |        0 |        6 |       23 |       1 |        0 |        0 |        0 |        0 |        3 |        2 |       0 |        0 |        0 |        0 |        0 |        2 |       11 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |     13 |      6 |      9 |      1 |      2 |     36 |      0 |      0 |      0 |      5 |      7 |      3 |      2 |      5 |     24 |      0 |      0 |      0 |      5 |      2 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4679400 |      96 |     24 |     42 |     4 |    0 |     0 |    0 |    1 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     44 |     52 |       3 |       4 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        4 |        0 |       0 |        0 |        2 |        3 |        4 |        4 |        1 |       2 |        3 |        4 |        5 |        5 |        2 |        1 |       0 |        3 |        2 |        2 |        9 |        4 |        2 |       0 |        3 |        1 |        4 |        4 |        1 |        0 |       0 |        2 |        0 |        3 |        4 |        0 |        3 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      5 |      0 |      0 |      3 |     12 |      0 |      0 |      0 |      4 |      0 |      3 |      3 |      1 |     31 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 4679500 |      11 |      2 |      7 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        3 |        0 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4679600 |      46 |     17 |     17 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     14 |     32 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        2 |        5 |        2 |        2 |        2 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |        2 |        1 |        3 |        2 |        3 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        5 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      0 |      1 |      0 |      0 |     12 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4679700 |      97 |     29 |     39 |     7 |    0 |     0 |    0 |    0 |     3 |    0 |     19 |    0 |    0 |    0 |    0 |     44 |     53 |       0 |       0 |       1 |       2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       1 |       2 |       0 |      0 |      1 |      0 |      0 |        0 |        2 |        2 |        1 |        1 |        1 |       0 |        1 |        2 |        5 |        8 |        3 |        2 |       1 |        3 |        5 |        7 |        2 |        2 |        1 |       0 |        2 |        4 |        5 |        5 |        2 |        1 |       0 |        2 |        2 |        5 |        2 |        0 |        0 |       0 |        2 |        4 |        0 |        2 |        0 |        0 |       0 |        1 |        4 |        0 |        1 |        0 |        0 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      0 |      4 |      0 |     17 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      0 |     28 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4680000 |     207 |     49 |    102 |     8 |    0 |     2 |    3 |    0 |     2 |    0 |     41 |    0 |    0 |    0 |    0 |     96 |    111 |       7 |       5 |       2 |       3 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        3 |        7 |        0 |        7 |        1 |       4 |        3 |        5 |        3 |        5 |        4 |        4 |       1 |        1 |        8 |       12 |       16 |        2 |        1 |       0 |        6 |       12 |       13 |       16 |        9 |        5 |       1 |        4 |        7 |        2 |        4 |        3 |        1 |       1 |        5 |        1 |        4 |        6 |        2 |        1 |       0 |        1 |        5 |        1 |        3 |        0 |        0 |       0 |        2 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     11 |      3 |      1 |      2 |      1 |     31 |      0 |      0 |      0 |     23 |     20 |      3 |      2 |      5 |     49 |      0 |      0 |      0 |      6 |      4 |      4 |      0 |      0 |     27 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      1 |      9 |      0 |     37 | s03      | R    |
| 4680200 |     242 |     75 |     91 |     6 |    0 |     4 |    4 |    0 |     5 |    0 |     57 |    0 |    0 |    0 |    0 |    110 |    132 |       6 |       7 |       2 |       1 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |        3 |        7 |        7 |        6 |        4 |        4 |       1 |        6 |        4 |       10 |        5 |        6 |       11 |       1 |        4 |       14 |       13 |        4 |        8 |        3 |       0 |        7 |       14 |       15 |        2 |        3 |        3 |       1 |        6 |        4 |        7 |        4 |        2 |        0 |       0 |        4 |       11 |        9 |        3 |        6 |        1 |       0 |        3 |        3 |        1 |        2 |        0 |        0 |       0 |        2 |        4 |        3 |        1 |        0 |        0 |       0 |      0 |      2 |     17 |      5 |      2 |      1 |      2 |     46 |      0 |      0 |      1 |     12 |      5 |      2 |      1 |      0 |     70 |      0 |      0 |      0 |     12 |      4 |      0 |      1 |      2 |     38 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4680300 |     112 |     48 |     43 |     2 |    0 |     0 |    2 |    0 |     3 |    0 |     14 |    0 |    0 |    0 |    0 |     33 |     79 |       2 |       0 |       1 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        4 |        6 |       1 |        0 |        0 |        1 |        1 |        5 |       29 |       0 |        0 |        0 |        1 |        1 |        3 |       10 |       0 |        1 |        0 |        0 |        1 |        4 |       20 |       2 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        2 |        0 |        0 |        5 |        3 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        5 |        0 |       0 |      0 |      1 |      8 |      6 |      6 |      2 |      2 |     23 |      0 |      0 |      0 |      5 |      4 |      4 |      5 |      1 |     24 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4681000 |     245 |     76 |    107 |     7 |    0 |     2 |    3 |    1 |     1 |    0 |     48 |    0 |    0 |    0 |    0 |     92 |    153 |       7 |       6 |       6 |       0 |      5 |      5 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        3 |        2 |        8 |        1 |        3 |       1 |        4 |        6 |       14 |       10 |       12 |        7 |       2 |        2 |       17 |        6 |       11 |        5 |        4 |       0 |       11 |       18 |        8 |       11 |        6 |        8 |       0 |        4 |        5 |        4 |        2 |        4 |        2 |       0 |        3 |        6 |        6 |        6 |        2 |        3 |       1 |        0 |        4 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        3 |        2 |       0 |      0 |      0 |      6 |     10 |      2 |      8 |      3 |     47 |      0 |      0 |      0 |     17 |      9 |      6 |      2 |      1 |     72 |      0 |      0 |      0 |      8 |      1 |      0 |      1 |      0 |     38 |      0 |      0 |      1 |      1 |      1 |      1 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4681100 |     151 |     60 |     57 |     6 |    0 |     0 |    1 |    2 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |     63 |     88 |      11 |       4 |       3 |       3 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        3 |        1 |        5 |        3 |        5 |        7 |       0 |        4 |        3 |        8 |        5 |        7 |        9 |       0 |        3 |        2 |        8 |        4 |        3 |        5 |       0 |        3 |        3 |        8 |       10 |        3 |        4 |       1 |        1 |        1 |        0 |        1 |        3 |        2 |       0 |        3 |        2 |        6 |        3 |        1 |        1 |       0 |        1 |        0 |        0 |        2 |        0 |        3 |       0 |        0 |        1 |        2 |        0 |        0 |        1 |       0 |      0 |      1 |      9 |     10 |      2 |      1 |      2 |     35 |      0 |      0 |      0 |      6 |      7 |      2 |      3 |      1 |     38 |      0 |      0 |      1 |      3 |      2 |      2 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4681200 |     112 |     50 |     48 |     3 |    0 |     2 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     48 |     64 |       2 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        4 |       14 |       1 |        0 |        1 |        0 |        1 |        3 |       24 |       1 |        0 |        1 |        2 |        0 |        6 |       12 |       1 |        0 |        0 |        0 |        0 |        2 |       24 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        3 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      5 |      9 |      4 |      0 |      1 |     31 |      0 |      0 |      0 |      7 |      4 |      4 |      1 |      1 |     31 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4682000 |     166 |     51 |     77 |     1 |    0 |     1 |    0 |    1 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |     74 |     92 |       6 |      11 |       2 |       0 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      1 |      0 |        0 |        3 |        5 |        4 |        6 |        1 |       0 |        4 |        2 |        9 |        9 |        6 |        2 |       0 |        2 |       12 |        8 |        7 |        3 |        6 |       0 |        5 |       12 |       10 |        6 |        5 |        1 |       0 |        2 |        8 |        0 |        3 |        1 |        3 |       0 |        4 |        5 |        2 |        4 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      4 |      8 |      2 |      2 |      2 |     32 |      0 |      0 |      1 |      9 |     10 |      5 |      1 |      1 |     50 |      0 |      0 |      2 |      3 |      3 |      0 |      0 |      3 |     24 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4682100 |     200 |     57 |     91 |     8 |    0 |     4 |    1 |    1 |     1 |    0 |     37 |    0 |    0 |    0 |    0 |     85 |    115 |      10 |       5 |       4 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       2 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        1 |        2 |        1 |        7 |        3 |       3 |        5 |        1 |       10 |        6 |        8 |        6 |       3 |        4 |        4 |       16 |        5 |        5 |        3 |       2 |        8 |        5 |       19 |        6 |        7 |        4 |       3 |        4 |        3 |        7 |        1 |        2 |        0 |       0 |        2 |        4 |        7 |        5 |        2 |        0 |       0 |        1 |        2 |        3 |        2 |        3 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      2 |      6 |      4 |      5 |     35 |      0 |      0 |      1 |     16 |     13 |      3 |      1 |      6 |     51 |      0 |      0 |      0 |      9 |      4 |      0 |      2 |      2 |     20 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4682200 |      39 |     22 |      8 |     2 |    0 |     0 |    0 |    0 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |     18 |     21 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        0 |        1 |        4 |        1 |        2 |       0 |        0 |        0 |        0 |        6 |        5 |        3 |       0 |        0 |        0 |        1 |        3 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4682300 |      72 |     29 |     29 |     5 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     27 |     45 |       6 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        4 |        3 |        0 |        2 |       3 |        2 |        1 |        3 |        3 |        1 |        5 |       2 |        1 |        3 |        1 |        3 |        0 |        0 |       2 |        5 |        3 |        4 |        4 |        0 |        3 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        2 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      3 |      3 |      3 |      2 |      0 |      1 |     17 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4682400 |       3 |      3 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4682500 |     373 |    172 |    155 |    12 |    0 |     3 |    0 |    0 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |    136 |    237 |       5 |       2 |       0 |       0 |      6 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        6 |       46 |       2 |        0 |        0 |        0 |        2 |       10 |       94 |       9 |        1 |        2 |        0 |        4 |        6 |       51 |       1 |        0 |        1 |        2 |        1 |       11 |       72 |       3 |        0 |        1 |        0 |        0 |        1 |        6 |       0 |        0 |        0 |        0 |        0 |        1 |       22 |       0 |        0 |        0 |        1 |        0 |        1 |        4 |       0 |        0 |        0 |        2 |        0 |        2 |        5 |       0 |      0 |      0 |     25 |     36 |     10 |      5 |     10 |     86 |      0 |      0 |      2 |     22 |     25 |     10 |      8 |      5 |     83 |      0 |      0 |      1 |      4 |     10 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      1 |      7 |      3 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4682900 |     368 |     93 |    172 |    13 |    0 |     9 |    1 |    1 |     2 |    0 |     77 |    0 |    0 |    0 |    0 |    163 |    205 |      11 |       4 |       4 |       2 |      4 |     11 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      1 |      0 |        3 |        3 |        2 |       11 |        6 |        2 |       1 |       11 |        8 |        9 |       23 |       10 |        3 |       1 |       17 |        9 |       17 |       27 |       12 |        3 |       2 |        7 |        6 |       23 |       28 |       11 |        9 |       1 |        8 |        3 |       10 |        8 |        4 |        3 |       3 |       10 |        3 |       15 |        6 |        2 |        1 |       1 |        2 |        2 |        1 |        4 |        0 |        0 |       0 |        3 |        3 |        5 |        5 |        1 |        0 |       0 |      0 |      0 |     15 |     15 |      5 |      4 |      2 |     52 |      0 |      0 |      1 |     20 |     34 |      6 |     14 |      6 |     91 |      0 |      0 |      1 |     10 |      9 |      8 |      1 |      3 |     45 |      0 |      0 |      2 |      3 |     11 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4683000 |     696 |    211 |    329 |    18 |    0 |     2 |    8 |    7 |     2 |    0 |    119 |    0 |    0 |    0 |    0 |    340 |    356 |      33 |      13 |       6 |       1 |     10 |     15 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |       0 |       3 |       0 |       0 |      3 |      3 |      1 |      1 |       12 |       14 |       19 |       19 |        8 |       13 |      11 |        8 |       20 |       21 |       28 |       16 |       12 |      10 |       17 |       23 |       42 |       36 |       30 |       21 |       3 |       12 |       22 |       47 |       36 |       24 |       13 |       3 |        9 |       14 |       16 |       12 |        3 |        2 |       1 |       13 |       15 |       20 |        8 |        4 |        2 |       0 |        1 |        2 |        4 |        6 |        2 |        0 |       0 |        5 |        5 |        4 |        6 |        0 |        2 |       0 |      0 |      1 |     23 |     35 |     19 |      7 |      4 |    122 |      0 |      0 |      3 |     38 |     51 |     28 |     10 |     16 |    183 |      0 |      0 |      1 |     28 |     17 |      5 |      4 |      3 |     61 |      0 |      0 |      2 |     15 |      3 |      1 |      4 |      1 |     11 |      0 |     37 | s03      | R    |
| 4683100 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4683200 |     348 |     98 |    152 |     9 |    0 |     3 |    5 |    0 |     7 |    0 |     74 |    0 |    0 |    0 |    0 |    148 |    200 |      10 |       8 |       9 |       1 |      2 |     10 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      3 |      0 |      1 |      0 |       12 |       13 |        7 |        6 |        3 |        1 |       0 |        7 |       20 |        7 |       13 |        6 |        3 |       0 |        9 |       23 |       20 |        8 |        6 |        2 |       0 |       17 |       30 |       17 |        9 |        9 |        1 |       1 |        6 |        9 |        6 |        5 |        1 |        0 |       0 |       10 |       19 |       12 |        4 |        1 |        1 |       0 |        3 |        4 |        3 |        1 |        0 |        0 |       0 |        2 |        5 |        2 |        3 |        1 |        0 |       0 |      0 |      0 |     12 |      8 |      1 |      0 |      1 |     76 |      0 |      0 |      0 |     12 |     11 |      1 |      3 |      1 |    124 |      0 |      0 |      0 |      8 |      1 |      0 |      0 |      0 |     65 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4683500 |      52 |     16 |     25 |     0 |    0 |     1 |    0 |    0 |     1 |    0 |      9 |    0 |    0 |    0 |    0 |     22 |     30 |       2 |       3 |       2 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        0 |        1 |        1 |        1 |       0 |        0 |        3 |        1 |        0 |        2 |        3 |       0 |        1 |        2 |        2 |        4 |        0 |        1 |       1 |        2 |        4 |        1 |        3 |        1 |        2 |       1 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        5 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      2 |      1 |      9 |      0 |      0 |      0 |      3 |      1 |      2 |      1 |      3 |     15 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4685900 |     114 |     33 |     57 |     6 |    0 |     0 |    0 |    1 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     51 |     63 |       3 |       0 |       1 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        3 |        1 |        0 |        3 |       0 |        2 |        3 |        3 |        3 |        3 |        9 |       1 |        1 |        5 |        7 |        6 |        2 |        7 |       0 |        1 |        4 |        3 |        6 |        4 |        8 |       3 |        1 |        3 |        3 |        0 |        0 |        1 |       0 |        2 |        1 |        2 |        2 |        0 |        2 |       0 |        0 |        1 |        0 |        3 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     24 |      0 |      0 |      1 |     13 |      7 |      1 |      2 |      2 |     31 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4686000 |     246 |     70 |    113 |    12 |    0 |     2 |    2 |    0 |     0 |    0 |     47 |    0 |    0 |    0 |    0 |    124 |    122 |       8 |      10 |       6 |       1 |      2 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        5 |       10 |        3 |        2 |       1 |        5 |        7 |       10 |        9 |        6 |        4 |       2 |        6 |        9 |       14 |       15 |       10 |        5 |       2 |        4 |        9 |       12 |       16 |        6 |        3 |       2 |        2 |        5 |        6 |        7 |        2 |        2 |       0 |        3 |        3 |        6 |        8 |        2 |        1 |       0 |        3 |        3 |        3 |        2 |        1 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |      8 |      5 |      0 |      0 |     48 |      0 |      0 |      4 |     16 |     16 |      5 |      2 |      5 |     65 |      0 |      0 |      1 |      9 |      7 |      3 |      0 |      0 |     27 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4686100 |      33 |     11 |     16 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      4 |    0 |    0 |    0 |    0 |     14 |     19 |       2 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        3 |        2 |        0 |       1 |        0 |        0 |        3 |        2 |        2 |        1 |       0 |        1 |        1 |        0 |        4 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |      9 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4687000 |     840 |    271 |    361 |    19 |    0 |     9 |    4 |    9 |     4 |    0 |    163 |    0 |    0 |    0 |    0 |    365 |    475 |      31 |      17 |      11 |       8 |      8 |      8 |      6 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       3 |       1 |      2 |      2 |      1 |      0 |        9 |       10 |       17 |       27 |       16 |       21 |       4 |       15 |       17 |       37 |       49 |       23 |       15 |      11 |       17 |       29 |       56 |       48 |       22 |        7 |       2 |       22 |       21 |       47 |       48 |       20 |       18 |       4 |       17 |        8 |        9 |       19 |        5 |        3 |       2 |       23 |       18 |       24 |       14 |       11 |        7 |       3 |        1 |        3 |        4 |        5 |        3 |        1 |       0 |        7 |        9 |        4 |        2 |        3 |        3 |       0 |      0 |      2 |     46 |     35 |     27 |     11 |     11 |    139 |      0 |      0 |      5 |     48 |     52 |     36 |     10 |     17 |    193 |      0 |      0 |      0 |     22 |     13 |     10 |      1 |      1 |    116 |      0 |      0 |      1 |      5 |     12 |      1 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 4687100 |     454 |    138 |    197 |    12 |    0 |     3 |    1 |    6 |     1 |    0 |     96 |    0 |    0 |    0 |    0 |    223 |    231 |      11 |      14 |      14 |       6 |      2 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       1 |       0 |      0 |      0 |      1 |      0 |        6 |        6 |       10 |       14 |       15 |        9 |       4 |        5 |       10 |       12 |       18 |       15 |        9 |       5 |       10 |       10 |       27 |       28 |       18 |       11 |       1 |        9 |       10 |       24 |       23 |       11 |       12 |       3 |        8 |        6 |       10 |       12 |        4 |        3 |       0 |       14 |        9 |       12 |       12 |        2 |        3 |       1 |        0 |        5 |        2 |        2 |        2 |        0 |       0 |        0 |        4 |        4 |        3 |        1 |        0 |       0 |      0 |      0 |     12 |     21 |     11 |     13 |      4 |     77 |      0 |      0 |      3 |     24 |     25 |     14 |     20 |     12 |     99 |      0 |      0 |      2 |     11 |     11 |     10 |      3 |      3 |     56 |      0 |      0 |      0 |      1 |      6 |      1 |      1 |      1 |     13 |      0 |     37 | s03      | R    |
| 4687300 |     145 |     44 |     51 |     4 |    0 |     1 |    2 |    0 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |     74 |     71 |       5 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       3 |       0 |       0 |      0 |      0 |      2 |      0 |        3 |        3 |        9 |        0 |        1 |        3 |       1 |        2 |        2 |        8 |        3 |        3 |        5 |       1 |        2 |        2 |        9 |        6 |        2 |        3 |       2 |        2 |        2 |        8 |        5 |        3 |        2 |       3 |        4 |        4 |        4 |        3 |        4 |        3 |       1 |        1 |        2 |        8 |        3 |        2 |        4 |       0 |        0 |        1 |        2 |        0 |        2 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      8 |      3 |      3 |      2 |     24 |      0 |      0 |      0 |      3 |      8 |      4 |      0 |      2 |     34 |      0 |      0 |      1 |      8 |      4 |      3 |      0 |      0 |     27 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4688000 |     405 |    103 |    197 |    17 |    0 |     5 |    2 |    1 |     6 |    0 |     74 |    0 |    0 |    0 |    0 |    189 |    216 |       3 |       9 |       1 |       0 |      3 |     12 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        0 |        9 |        8 |        6 |        7 |       7 |        3 |        4 |       12 |       14 |       14 |        5 |       8 |       10 |        7 |       22 |       27 |       15 |        8 |       6 |        8 |       14 |       29 |       22 |       15 |        4 |      10 |        6 |        4 |       11 |        7 |        3 |        3 |       0 |        5 |        2 |       13 |       15 |        2 |        3 |       0 |        5 |        3 |        4 |        1 |        3 |        1 |       0 |        3 |        2 |        7 |        2 |        0 |        0 |       0 |      0 |      1 |     11 |     11 |      5 |      5 |      8 |     62 |      0 |      0 |      0 |     20 |     26 |     16 |      3 |     10 |    122 |      0 |      0 |      1 |     15 |      9 |      8 |      1 |      2 |     38 |      0 |      0 |      1 |      6 |      5 |      1 |      0 |      3 |     15 |      0 |     37 | s03      | R    |
| 4704000 |     465 |    117 |    260 |     8 |    0 |     5 |    4 |    1 |     0 |    0 |     70 |    0 |    0 |    0 |    0 |    213 |    252 |       3 |      14 |       3 |       0 |      7 |     12 |     11 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       3 |       2 |       0 |      0 |      2 |      0 |      0 |        1 |        2 |        3 |        8 |       11 |       11 |       4 |        6 |        6 |       11 |       19 |       12 |       19 |       4 |       15 |       12 |       21 |       30 |       26 |       20 |       2 |       10 |       15 |       20 |       33 |       35 |       19 |       2 |        6 |        6 |        6 |        8 |        7 |        2 |       1 |        6 |        6 |        5 |       12 |        5 |        0 |       0 |        4 |        1 |        1 |        1 |        1 |        3 |       0 |        2 |        2 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |      6 |     21 |      4 |      8 |      5 |     73 |      0 |      0 |      3 |     32 |     40 |     13 |     18 |      8 |    146 |      0 |      0 |      1 |      8 |     11 |      5 |      2 |      4 |     39 |      0 |      0 |      1 |      3 |      5 |      1 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 4704300 |     590 |    185 |    319 |     5 |    0 |     6 |    5 |    2 |     6 |    0 |     62 |    0 |    0 |    0 |    0 |    277 |    313 |      18 |       7 |       1 |       1 |     15 |     16 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        4 |        7 |        8 |       18 |       17 |       14 |       8 |        8 |        8 |       16 |       25 |       28 |       17 |       7 |       10 |       14 |       29 |       25 |       41 |       19 |      22 |       12 |        8 |       28 |       31 |       31 |       31 |      18 |        9 |        2 |        3 |        5 |        6 |        6 |       0 |        4 |        7 |        3 |        6 |        7 |        4 |       0 |        1 |        2 |        2 |        2 |        3 |        0 |       0 |        5 |        2 |        1 |        2 |        3 |        1 |       0 |      0 |      0 |     14 |     17 |     13 |      9 |     13 |    119 |      0 |      0 |      1 |     36 |     40 |     18 |     16 |     20 |    188 |      0 |      0 |      1 |      8 |      4 |      1 |      1 |      2 |     45 |      0 |      0 |      1 |      5 |      7 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4704400 |     294 |     71 |    159 |     6 |    0 |     2 |    0 |    2 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    137 |    157 |       7 |       6 |       5 |       1 |      2 |      2 |      0 |      2 |      2 |      1 |      1 |      0 |      3 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        5 |        3 |        9 |        6 |        6 |       0 |        3 |        7 |        4 |       14 |        8 |        4 |       1 |       10 |        9 |       10 |       20 |       15 |       11 |       1 |        9 |        8 |       19 |       20 |        6 |       20 |       1 |        5 |        3 |        3 |        9 |        4 |        1 |       0 |        8 |        5 |        3 |        6 |        4 |        2 |       0 |        2 |        0 |        1 |        2 |        1 |        0 |       0 |        2 |        0 |        2 |        0 |        1 |        0 |       0 |      0 |      3 |     16 |      3 |      9 |      2 |      4 |     34 |      0 |      0 |      2 |     22 |     23 |     11 |      8 |     12 |     81 |      0 |      0 |      1 |      6 |      3 |      5 |      5 |      2 |     31 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 4704500 |      94 |     40 |     40 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     43 |     51 |       3 |       2 |       0 |       0 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        0 |        9 |        1 |        5 |       0 |        1 |        1 |        1 |        7 |        3 |        8 |       1 |        0 |        4 |        1 |        4 |        5 |        4 |       2 |        1 |        2 |        1 |        1 |        8 |        5 |       2 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        3 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      5 |      3 |      1 |      4 |      2 |     25 |      0 |      0 |      0 |      1 |      6 |      3 |      0 |      2 |     28 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4704700 |     226 |     75 |    122 |     3 |    0 |     1 |    0 |    0 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |    107 |    119 |      12 |       3 |       0 |       0 |      9 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      1 |      0 |        3 |        3 |        3 |       12 |        8 |        3 |       3 |        3 |        2 |        2 |       15 |        8 |        6 |       4 |        3 |        8 |        9 |       13 |       13 |       13 |       1 |        7 |        3 |       10 |       21 |        9 |       12 |       0 |        5 |        0 |        0 |        2 |        2 |        3 |       0 |        5 |        1 |        4 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |      8 |     11 |      7 |      1 |      3 |     44 |      0 |      0 |      0 |     18 |     22 |      9 |      4 |      5 |     64 |      0 |      0 |      1 |      5 |      2 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4705000 |     237 |     79 |    115 |     6 |    0 |     1 |    2 |    1 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |    122 |    115 |       6 |       7 |       5 |       2 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        2 |        3 |        5 |        5 |       12 |       6 |        4 |        5 |        4 |        6 |        7 |       10 |       8 |        2 |        3 |       10 |       18 |        7 |       17 |       7 |        0 |        9 |        9 |        8 |        5 |       14 |       6 |        4 |        2 |        7 |        1 |        1 |        2 |       0 |        1 |        0 |        5 |        2 |        4 |        3 |       0 |        1 |        2 |        1 |        2 |        0 |        0 |       0 |        2 |        0 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |      8 |      6 |      1 |      1 |      3 |     60 |      0 |      0 |      0 |     14 |     16 |      7 |      3 |      5 |     70 |      0 |      0 |      0 |      4 |      1 |      3 |      1 |      2 |     21 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4706000 |     634 |    166 |    366 |    12 |    0 |     4 |    2 |    1 |     2 |    0 |     81 |    0 |    0 |    0 |    0 |    271 |    363 |      13 |      18 |       1 |       1 |      9 |     14 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        6 |       18 |       11 |       10 |       6 |        7 |       11 |       13 |       19 |       26 |       21 |      13 |       14 |        9 |       29 |       30 |       35 |       30 |      17 |       13 |       28 |       31 |       37 |       32 |       38 |      23 |        6 |       10 |        4 |       11 |        7 |        1 |       0 |       11 |        7 |        8 |       12 |        3 |        1 |       0 |        3 |        2 |        3 |        0 |        3 |        1 |       0 |        1 |        1 |        1 |        4 |        1 |        1 |       0 |      0 |      0 |     19 |     23 |     17 |      4 |     20 |     83 |      0 |      0 |      0 |     54 |     43 |     19 |     10 |     27 |    213 |      0 |      0 |      0 |      9 |      8 |      7 |      3 |      5 |     49 |      0 |      0 |      1 |      2 |      5 |      1 |      0 |      2 |     10 |      0 |     37 | s03      | R    |
| 4707000 |     342 |    106 |    182 |     5 |    0 |     5 |    0 |    0 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |    160 |    182 |       9 |       3 |       1 |       0 |      5 |      7 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        6 |        7 |       14 |        8 |        7 |       6 |        1 |        4 |        9 |       14 |       10 |       12 |       8 |        6 |        4 |        6 |       12 |       15 |       22 |      19 |        2 |        7 |       13 |       14 |       18 |       21 |      23 |        1 |        4 |        3 |        3 |        3 |        4 |       1 |        3 |        5 |        3 |        4 |        4 |        3 |       2 |        2 |        1 |        2 |        0 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      0 |     22 |      6 |      8 |      2 |      5 |     63 |      0 |      0 |      1 |     12 |     24 |     14 |      9 |     12 |    110 |      0 |      0 |      1 |      5 |      4 |      4 |      1 |      0 |     28 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4707100 |     209 |     60 |    112 |     3 |    0 |     2 |    0 |    1 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |    106 |    103 |       1 |       9 |       0 |       0 |     14 |      7 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        3 |        0 |        8 |        4 |        7 |       1 |        4 |        2 |        3 |       12 |        4 |        8 |       0 |        4 |        7 |        4 |        9 |       14 |       18 |       0 |        4 |        0 |        8 |       13 |       15 |       14 |       2 |        4 |        4 |        1 |        2 |        7 |        1 |       0 |        3 |        0 |        2 |        4 |        2 |        1 |       0 |        2 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      8 |      7 |      5 |      1 |      2 |     37 |      0 |      0 |      0 |     14 |     11 |      6 |     13 |     10 |     58 |      0 |      0 |      0 |      6 |      2 |      2 |      0 |      1 |     20 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4708000 |     422 |    126 |    208 |    13 |    0 |     4 |    3 |    4 |     1 |    0 |     63 |    0 |    0 |    0 |    0 |    198 |    224 |       7 |      12 |       2 |       2 |      7 |     10 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       2 |       0 |       1 |      0 |      1 |      0 |      0 |        7 |        5 |        6 |       10 |        6 |       14 |       9 |        1 |        9 |       12 |       16 |       12 |       13 |       6 |       11 |       13 |       20 |       24 |       12 |       19 |       6 |       12 |       13 |       19 |       19 |       17 |       12 |      11 |        8 |        2 |        5 |        4 |        4 |        1 |       0 |        9 |       13 |        6 |        5 |        5 |        1 |       0 |        3 |        4 |        2 |        1 |        0 |        2 |       0 |        3 |        3 |        3 |        1 |        1 |        2 |       0 |      0 |      0 |     13 |     18 |      5 |      1 |      5 |     84 |      0 |      0 |      0 |      9 |     37 |     12 |     12 |     12 |    126 |      0 |      0 |      0 |      8 |      7 |      3 |      3 |      0 |     42 |      0 |      0 |      1 |      3 |      5 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4708100 |      10 |      3 |      5 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      1 |    0 |    0 |    0 |    0 |      6 |      4 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4708200 |      10 |      1 |      5 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      5 |      5 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4708300 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4709000 |     342 |    100 |    199 |     4 |    0 |     6 |    2 |    2 |     1 |    0 |     28 |    0 |    0 |    0 |    0 |    155 |    187 |       4 |       6 |       2 |       1 |      6 |     14 |      4 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        4 |        6 |        6 |        7 |        8 |       5 |        2 |        4 |        4 |       16 |       12 |       15 |       5 |        5 |       12 |       19 |       16 |       12 |       24 |       8 |        5 |        5 |       16 |       16 |       13 |       33 |      15 |        3 |        2 |        1 |        3 |        0 |        1 |       1 |        0 |        3 |        4 |        6 |        0 |        2 |       2 |        1 |        0 |        2 |        1 |        2 |        0 |       0 |        1 |        1 |        2 |        1 |        2 |        2 |       0 |      0 |      0 |     11 |     17 |      8 |      4 |      4 |     56 |      0 |      0 |      1 |     21 |     28 |     14 |     15 |      6 |    114 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      1 |     19 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4709100 |     304 |     86 |    151 |    10 |    0 |     3 |    3 |    1 |     1 |    0 |     49 |    0 |    0 |    0 |    0 |    136 |    168 |       4 |       8 |       7 |       1 |      5 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      3 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        1 |        5 |        8 |        8 |        7 |       2 |        5 |        9 |        6 |        9 |       11 |        4 |       7 |        3 |       11 |       15 |       17 |        6 |       14 |       4 |        8 |       13 |       17 |       19 |        5 |       15 |       4 |        4 |        4 |        4 |        6 |        3 |        3 |       0 |        5 |        3 |        4 |        5 |        6 |        2 |       0 |        3 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        3 |        4 |        3 |        1 |        0 |       0 |      0 |      1 |      6 |     12 |      4 |      3 |      8 |     52 |      0 |      0 |      0 |     19 |     28 |      7 |      5 |      8 |     84 |      0 |      0 |      0 |      7 |      3 |      1 |      5 |      2 |     31 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 4709200 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4711100 |       3 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4713000 |     355 |     99 |    184 |     9 |    0 |     2 |    1 |    0 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    169 |    186 |      11 |      11 |       6 |       2 |      7 |      3 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      3 |      1 |      0 |        6 |        3 |        9 |        9 |        5 |        7 |       5 |        7 |        4 |        9 |       13 |        6 |        6 |      10 |        8 |        9 |       24 |       28 |       14 |        3 |       4 |       11 |       15 |       24 |       21 |        9 |       11 |       3 |        4 |        8 |        8 |        6 |        2 |        1 |       0 |        6 |        3 |       12 |        4 |        2 |        3 |       0 |        0 |        2 |        2 |        2 |        0 |        0 |       0 |        2 |        2 |        0 |        2 |        0 |        1 |       0 |      0 |      1 |     13 |     10 |      5 |      5 |      4 |     61 |      0 |      0 |      1 |     22 |     28 |     15 |      6 |      6 |    106 |      0 |      0 |      2 |     15 |      6 |      4 |      0 |      2 |     30 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4713100 |     156 |     46 |     71 |     3 |    0 |     1 |    1 |    1 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |     69 |     87 |       9 |       2 |       6 |       1 |      2 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       3 |       1 |       0 |      2 |      0 |      2 |      0 |        1 |        2 |        2 |        5 |        0 |        4 |       3 |        3 |        1 |        3 |        5 |        7 |        4 |       6 |        1 |        5 |       10 |        5 |        3 |        4 |       2 |        7 |        9 |        8 |        5 |        2 |        2 |       8 |        2 |        2 |        7 |        6 |        0 |        0 |       0 |        3 |        3 |        4 |        1 |        1 |        3 |       0 |        0 |        2 |        0 |        2 |        1 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      7 |      4 |      2 |      1 |      1 |     30 |      0 |      0 |      0 |      7 |      7 |      1 |      3 |      3 |     50 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      3 |     20 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4713200 |      24 |      8 |     14 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     12 |     12 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       1 |        1 |        0 |        1 |        0 |        0 |        3 |       0 |        1 |        1 |        2 |        4 |        0 |        0 |       1 |        0 |        1 |        2 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4715000 |     427 |    145 |    183 |    10 |    0 |     5 |    1 |    1 |     5 |    0 |     77 |    0 |    0 |    0 |    0 |    203 |    224 |      30 |      18 |      11 |       4 |      3 |      1 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      1 |      0 |        5 |       17 |        6 |       11 |        3 |        8 |       4 |       14 |       14 |       19 |       12 |       10 |       13 |       9 |       14 |       26 |       24 |       16 |        7 |       12 |       1 |       10 |       15 |       15 |       14 |       12 |       15 |       2 |        6 |       13 |        7 |        5 |        3 |        3 |       0 |        8 |       12 |        7 |        7 |        5 |        1 |       0 |        0 |        4 |        4 |        3 |        0 |        1 |       0 |        1 |        3 |        2 |        2 |        0 |        2 |       0 |      0 |      2 |     20 |     13 |      3 |      3 |      1 |    103 |      0 |      0 |      2 |     28 |     29 |      7 |      2 |      1 |    114 |      0 |      0 |      2 |     15 |      3 |      0 |      0 |      2 |     55 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4715100 |     267 |     80 |    106 |     7 |    0 |     4 |    2 |    1 |     0 |    0 |     67 |    0 |    0 |    0 |    0 |    118 |    149 |      11 |       9 |       8 |       3 |      3 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        6 |        8 |        8 |        4 |        1 |       0 |        7 |        9 |       12 |       13 |        6 |        3 |       0 |        8 |       13 |        8 |       10 |        6 |        4 |       1 |        4 |       12 |       16 |        8 |        7 |        8 |       1 |        8 |        8 |        8 |        6 |        1 |        0 |       0 |        6 |       11 |        9 |        6 |        2 |        2 |       0 |        1 |        1 |        1 |        1 |        2 |        1 |       0 |        3 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     15 |      7 |      6 |      2 |      1 |     49 |      0 |      0 |      2 |     17 |     14 |      0 |      2 |      2 |     69 |      0 |      0 |      3 |      8 |      3 |      2 |      0 |      1 |     50 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4715200 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4715300 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4715400 |      15 |      3 |      9 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      7 |      8 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4717900 |     158 |     49 |     78 |     2 |    0 |     3 |    0 |    1 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     79 |     79 |       8 |       3 |       0 |       0 |      1 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      1 |        0 |        1 |        4 |        5 |        6 |        4 |       1 |        2 |        3 |        4 |        6 |        8 |        2 |       3 |        1 |        4 |       12 |        9 |        2 |        9 |       6 |        5 |        4 |        7 |        5 |        4 |        6 |       4 |        4 |        0 |        0 |        2 |        3 |        2 |       0 |        2 |        2 |        3 |        2 |        2 |        3 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      6 |      7 |      3 |      1 |      3 |     29 |      0 |      0 |      0 |     10 |     12 |      5 |      2 |      2 |     47 |      0 |      0 |      0 |      5 |      3 |      1 |      1 |      0 |     15 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4718000 |     235 |     66 |    131 |     3 |    0 |     3 |    4 |    1 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |    124 |    111 |       7 |       6 |       3 |       1 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      0 |        0 |        4 |        6 |        4 |        3 |        8 |       4 |        4 |        4 |        5 |       10 |        6 |        4 |       4 |        5 |       10 |       15 |       13 |       14 |       12 |       3 |        3 |        7 |       19 |        7 |        4 |       14 |       5 |        1 |        8 |        3 |        4 |        2 |        1 |       0 |        3 |        2 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |        2 |        2 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |     12 |      5 |      4 |      1 |     40 |      0 |      0 |      2 |     20 |     20 |      2 |      1 |      4 |     82 |      0 |      0 |      0 |     10 |      3 |      0 |      0 |      1 |     12 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4718100 |     374 |    118 |    170 |    10 |    0 |     2 |    4 |    0 |     1 |    0 |     69 |    0 |    0 |    0 |    0 |    169 |    205 |      21 |      15 |       7 |       2 |      2 |     10 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      1 |      1 |      0 |      0 |        2 |        9 |        7 |        7 |        5 |        6 |       4 |        3 |       14 |       13 |       16 |       13 |       11 |       8 |       17 |       10 |       19 |       16 |        9 |        9 |       1 |        8 |       15 |       26 |       13 |       13 |       11 |       3 |        7 |       10 |        7 |       10 |        1 |        2 |       0 |        8 |        8 |        7 |        6 |        2 |        1 |       0 |        3 |        0 |        3 |        2 |        2 |        1 |       0 |        2 |        1 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |     26 |      9 |      5 |      1 |      7 |     70 |      0 |      0 |      0 |     30 |     12 |      4 |      6 |      7 |    111 |      0 |      0 |      0 |      8 |      4 |      1 |      0 |      1 |     55 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 4719000 |     562 |    172 |    281 |    13 |    0 |     0 |    2 |    4 |     1 |    0 |     89 |    0 |    0 |    0 |    0 |    256 |    306 |      17 |      14 |       8 |       2 |      5 |      9 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      5 |      1 |      0 |       10 |        8 |       13 |       13 |        6 |       10 |       6 |        3 |        9 |       23 |       18 |       19 |       24 |      10 |        6 |       18 |       39 |       30 |       14 |       23 |      13 |       10 |       14 |       34 |       18 |       16 |       32 |      14 |        7 |        7 |        9 |        8 |        2 |        5 |       2 |        5 |       11 |       12 |       11 |        5 |        4 |       1 |        1 |        1 |        2 |        2 |        0 |        1 |       0 |        1 |        3 |        1 |        3 |        1 |        4 |       0 |      0 |      1 |     16 |     21 |      8 |      8 |      8 |    110 |      0 |      0 |      2 |     29 |     45 |      7 |     10 |      8 |    180 |      0 |      0 |      1 |     11 |      9 |      5 |      2 |      2 |     59 |      0 |      0 |      0 |      1 |      8 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4720000 |     458 |    111 |    241 |    13 |    0 |     3 |    2 |    0 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    219 |    239 |      14 |       7 |       8 |       1 |      3 |     10 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        6 |        4 |        4 |       11 |        9 |        7 |       2 |        6 |        9 |       11 |       16 |       14 |        9 |       3 |       12 |       19 |       30 |       24 |       18 |       20 |       4 |       13 |       17 |       22 |       24 |       17 |       15 |       6 |        8 |        4 |        7 |       11 |        4 |        4 |       0 |       10 |       10 |       14 |        7 |        5 |        3 |       0 |        5 |        0 |        1 |        3 |        2 |        0 |       0 |        0 |        3 |        3 |        2 |        0 |        0 |       0 |      0 |      1 |     15 |     15 |      4 |      2 |      4 |     70 |      0 |      0 |      0 |     36 |     37 |     10 |      9 |      9 |    140 |      0 |      0 |      1 |     10 |      5 |      3 |      4 |      0 |     64 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4720200 |     547 |    146 |    299 |    17 |    0 |     8 |    2 |    2 |     1 |    0 |     72 |    0 |    0 |    0 |    0 |    257 |    290 |      11 |       7 |       5 |       3 |      6 |     17 |      4 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      6 |      0 |      0 |        2 |        4 |        7 |       12 |        7 |       11 |      15 |        5 |        7 |       10 |       18 |       11 |       19 |      18 |       14 |       20 |       19 |       35 |       19 |       25 |      19 |       15 |       12 |       19 |       34 |       26 |       21 |      21 |        5 |        2 |        6 |       10 |        1 |        7 |       3 |       11 |        8 |        7 |        7 |        2 |        3 |       0 |        2 |        2 |        2 |        4 |        3 |        1 |       0 |        0 |        4 |        5 |        2 |        2 |        3 |       0 |      0 |      1 |     17 |     12 |     12 |      1 |      5 |     98 |      0 |      0 |      0 |     34 |     31 |     16 |     14 |     14 |    190 |      0 |      0 |      2 |      9 |      9 |      3 |      1 |      3 |     45 |      0 |      0 |      0 |      8 |      7 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4720300 |     159 |     44 |     79 |     3 |    0 |     1 |    0 |    0 |     1 |    0 |     31 |    0 |    0 |    0 |    0 |     75 |     84 |       6 |       1 |       4 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |       0 |       2 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        5 |        4 |        2 |        4 |        2 |       0 |        2 |        5 |        5 |        7 |        6 |        1 |       0 |        4 |       10 |        8 |        8 |        7 |        2 |       0 |        5 |       13 |        6 |        7 |        6 |        3 |       0 |        5 |        0 |        6 |        0 |        3 |        1 |       0 |        2 |        6 |        2 |        3 |        3 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      5 |      0 |      0 |      2 |     36 |      0 |      0 |      0 |     11 |      3 |      2 |      1 |      2 |     60 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      0 |     24 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4720400 |      63 |     28 |     22 |     2 |    0 |     0 |    0 |    1 |     1 |    0 |      9 |    0 |    0 |    0 |    0 |     30 |     33 |       2 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        5 |        4 |       1 |        0 |        1 |        0 |        3 |        6 |        8 |       0 |        0 |        1 |        2 |        4 |        2 |        5 |       0 |        0 |        1 |        0 |        0 |        2 |        5 |       0 |        0 |        1 |        0 |        0 |        2 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      4 |      8 |      3 |      0 |      1 |     12 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |      2 |     15 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4721000 |     235 |     61 |    127 |     9 |    0 |     2 |    1 |    3 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |    112 |    123 |       3 |       3 |       2 |       0 |      1 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        4 |        2 |        8 |        6 |       3 |        4 |        1 |        5 |        7 |        8 |        7 |       3 |       10 |        6 |       11 |       15 |       12 |        8 |       1 |        5 |        4 |       10 |       11 |       18 |       14 |       2 |        5 |        1 |        3 |        2 |        3 |        0 |       1 |        4 |        0 |        3 |        5 |        2 |        2 |       1 |        2 |        2 |        2 |        1 |        0 |        1 |       0 |        1 |        1 |        3 |        1 |        1 |        0 |       0 |      0 |      1 |     13 |      5 |      4 |      3 |      6 |     29 |      0 |      0 |      2 |     15 |     15 |      7 |      7 |      5 |     76 |      0 |      0 |      1 |      5 |      2 |      0 |      1 |      1 |     22 |      0 |      0 |      0 |      2 |      5 |      1 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 4722000 |     323 |     91 |    139 |     9 |    0 |     2 |    2 |    3 |     0 |    0 |     77 |    0 |    0 |    0 |    0 |    152 |    171 |      22 |      20 |      10 |       1 |      6 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        2 |       14 |        6 |       10 |        6 |        4 |       2 |        5 |       11 |        8 |       12 |        3 |        4 |       4 |       12 |       13 |       16 |        8 |        2 |        8 |       2 |       11 |       15 |       21 |       12 |        8 |       10 |       1 |        7 |       10 |        5 |       12 |        2 |        1 |       0 |        9 |        9 |        7 |        8 |        5 |        2 |       0 |        3 |        2 |        3 |        1 |        0 |        1 |       0 |        0 |        1 |        2 |        1 |        1 |        0 |       1 |      0 |      0 |     17 |      8 |      7 |      2 |      0 |     57 |      0 |      0 |      3 |     22 |     17 |      2 |      2 |      4 |     89 |      0 |      0 |      0 |     12 |      8 |      3 |      0 |      0 |     54 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4722100 |     304 |    105 |    123 |     5 |    0 |     2 |    3 |    0 |     0 |    0 |     66 |    0 |    0 |    0 |    0 |    129 |    175 |      20 |      12 |      17 |       0 |      2 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      3 |      1 |      0 |      1 |      0 |      0 |       2 |       2 |       3 |       0 |      1 |      1 |      2 |      0 |        3 |        6 |       11 |        6 |        5 |       11 |       0 |        2 |        7 |        7 |       18 |        8 |       20 |       1 |        3 |        6 |        9 |       15 |        9 |        8 |       1 |        8 |       10 |       15 |       17 |        8 |       14 |       0 |        3 |        9 |        4 |        9 |        4 |        3 |       0 |        8 |        8 |        3 |        9 |        3 |        3 |       0 |        0 |        1 |        1 |        0 |        2 |        0 |       0 |        2 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      1 |     14 |     13 |      2 |      1 |      2 |     72 |      0 |      0 |      3 |     18 |     13 |      2 |      2 |      3 |     82 |      0 |      0 |      0 |      6 |      2 |      3 |      0 |      0 |     55 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4723000 |     375 |     97 |    204 |     9 |    0 |     4 |    2 |    0 |     1 |    0 |     58 |    0 |    0 |    0 |    0 |    183 |    192 |      11 |      13 |       5 |       0 |      2 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        4 |        5 |        5 |        9 |        4 |       13 |       4 |        6 |        2 |       11 |       12 |        9 |        7 |       6 |       14 |       14 |       15 |       20 |       17 |        6 |      14 |        3 |       11 |       25 |       25 |       12 |       14 |      14 |        7 |        6 |        4 |        9 |        4 |        2 |       0 |        6 |        5 |        8 |        4 |        2 |        0 |       1 |        1 |        2 |        3 |        0 |        0 |        1 |       0 |        2 |        3 |        1 |        1 |        0 |        2 |       0 |      0 |      0 |     21 |      8 |      6 |      1 |      5 |     56 |      0 |      0 |      0 |     29 |     26 |     13 |      8 |      9 |    119 |      0 |      0 |      0 |     14 |      3 |      0 |      1 |      0 |     40 |      0 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 4723100 |      36 |      8 |     16 |     2 |    0 |     0 |    0 |    1 |     1 |    0 |      8 |    0 |    0 |    0 |    0 |     13 |     23 |       1 |       3 |       3 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |        1 |        1 |        3 |        0 |        0 |        1 |       0 |        2 |        0 |        4 |        2 |        1 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        2 |        2 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4724000 |     340 |    122 |    127 |    10 |    0 |     4 |    5 |    1 |     4 |    0 |     67 |    0 |    0 |    0 |    0 |    161 |    179 |      26 |      17 |       5 |       2 |      7 |     11 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      1 |      2 |      1 |        7 |       12 |       10 |       13 |        5 |        5 |       2 |        9 |       11 |       12 |       14 |       12 |        8 |       2 |       13 |       12 |       17 |        8 |       11 |        6 |       1 |       11 |       13 |       17 |        8 |        6 |        3 |       1 |        4 |        9 |        6 |        5 |        3 |        0 |       0 |       13 |        8 |        7 |        5 |        6 |        0 |       1 |        5 |        4 |        1 |        1 |        0 |        1 |       0 |        3 |        2 |        3 |        3 |        0 |        1 |       0 |      0 |      1 |     19 |     11 |      2 |      0 |      0 |     89 |      0 |      0 |      0 |     26 |     14 |      4 |      0 |      1 |     82 |      0 |      0 |      1 |     11 |      2 |      1 |      0 |      1 |     51 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4724100 |     194 |     72 |     77 |    14 |    0 |     3 |    0 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     89 |    105 |      14 |      16 |       4 |       1 |      3 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        3 |        3 |        4 |       10 |        4 |        5 |       1 |        6 |        5 |        7 |       11 |        7 |        6 |       0 |        8 |        3 |       11 |       10 |        4 |        4 |       1 |        3 |        9 |        5 |        6 |        2 |       10 |       1 |        2 |        3 |        2 |        3 |        2 |        2 |       0 |        4 |        1 |        3 |        4 |        1 |        1 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        5 |        1 |        4 |        1 |        1 |        1 |       0 |      0 |      0 |     13 |      6 |      2 |      0 |      5 |     46 |      0 |      0 |      1 |     13 |     11 |      5 |      2 |      4 |     41 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |     23 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4725000 |     420 |    146 |    182 |     7 |    0 |     4 |    2 |    0 |     4 |    0 |     75 |    0 |    0 |    0 |    0 |    200 |    220 |      17 |      15 |      14 |       0 |      2 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        8 |        4 |       13 |       14 |        9 |        6 |       5 |        6 |       13 |       20 |       21 |        9 |        9 |       9 |        6 |       13 |       25 |       22 |       15 |        9 |       0 |        8 |       18 |       22 |       25 |        4 |       11 |       4 |        6 |        8 |       15 |        7 |        5 |        1 |       0 |        4 |        8 |       10 |        9 |        1 |        1 |       0 |        3 |        2 |        1 |        3 |        0 |        0 |       0 |        0 |        4 |        1 |        1 |        2 |        0 |       0 |      0 |      0 |     33 |     18 |      8 |      2 |      3 |     82 |      0 |      0 |      3 |     28 |     25 |      7 |      8 |      4 |    107 |      0 |      0 |      1 |     11 |      8 |      6 |      1 |      1 |     47 |      0 |      0 |      0 |      2 |      3 |      4 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4725100 |      52 |     21 |     22 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     28 |     24 |       2 |       1 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        3 |        4 |        4 |       0 |        0 |        0 |        2 |        3 |        2 |        2 |       0 |        0 |        1 |        1 |        2 |        4 |        3 |       0 |        0 |        2 |        2 |        3 |        3 |        0 |       1 |        0 |        0 |        2 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      4 |      1 |      0 |      1 |      8 |      0 |      0 |      0 |      2 |      7 |      1 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4726000 |     331 |    106 |    140 |    13 |    0 |     2 |    6 |    5 |     1 |    0 |     58 |    0 |    0 |    0 |    0 |    150 |    181 |      23 |      11 |      12 |       5 |      5 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        5 |        7 |        7 |        7 |        3 |        3 |       1 |        8 |       19 |       10 |       17 |       11 |        7 |       1 |        7 |       19 |       17 |       19 |        6 |        8 |       1 |        8 |       20 |       10 |        5 |        7 |        9 |       4 |        5 |        7 |        7 |        5 |        5 |        1 |       1 |        7 |        8 |        5 |        4 |        3 |        0 |       0 |        1 |        3 |        4 |        0 |        1 |        0 |       0 |        3 |        3 |        4 |        2 |        2 |        4 |       0 |      0 |      2 |     22 |     13 |      3 |      1 |      1 |     64 |      0 |      0 |      1 |     10 |     19 |      1 |      3 |      1 |    105 |      0 |      0 |      0 |      8 |      5 |      1 |      1 |      1 |     42 |      0 |      0 |      2 |      2 |      4 |      2 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4726100 |     640 |    242 |    243 |    20 |    0 |     5 |    9 |    7 |     4 |    0 |    110 |    0 |    0 |    0 |    0 |    273 |    367 |      51 |      30 |      15 |      13 |      4 |      5 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |       0 |       3 |       0 |       0 |      1 |      3 |      0 |      0 |       13 |       18 |       17 |       17 |       10 |       11 |       2 |       25 |       29 |       30 |       30 |       23 |       14 |       3 |       20 |       39 |       25 |       12 |       12 |        6 |       0 |       32 |       43 |       22 |        7 |       14 |        9 |       2 |        9 |       19 |       12 |        6 |        1 |        1 |       0 |       17 |       12 |       20 |        9 |        2 |        1 |       1 |        7 |        3 |        5 |        6 |        2 |        0 |       0 |        4 |        6 |        8 |        2 |        2 |        0 |       0 |      0 |      3 |     36 |     24 |      2 |      3 |      1 |    173 |      0 |      0 |      0 |     20 |     14 |      4 |      6 |      4 |    195 |      0 |      0 |      1 |      9 |      8 |      1 |      2 |      0 |     89 |      0 |      0 |      1 |      9 |      5 |      0 |      0 |      0 |     30 |      0 |     37 | s03      | R    |
| 4727000 |     405 |    141 |    183 |    10 |    0 |     8 |    2 |    5 |     5 |    0 |     51 |    0 |    0 |    0 |    0 |    199 |    206 |      20 |      17 |       8 |       4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      1 |      2 |      0 |        2 |        8 |       13 |       15 |        6 |        9 |       6 |        5 |       11 |       12 |       16 |       11 |       16 |      11 |       10 |       14 |       24 |       15 |       10 |       15 |       8 |        5 |       12 |       26 |       10 |        7 |       16 |      11 |        2 |        6 |        9 |        5 |        3 |        2 |       1 |        2 |        6 |        4 |        6 |        2 |        3 |       0 |        5 |        3 |        4 |        3 |        1 |        0 |       0 |        3 |        1 |        6 |        2 |        2 |        0 |       0 |      0 |      2 |     21 |     12 |      6 |      5 |      6 |     89 |      0 |      0 |      0 |     15 |     21 |      9 |      9 |      7 |    122 |      0 |      0 |      0 |      2 |      3 |      3 |      1 |      0 |     42 |      0 |      0 |      0 |      7 |      4 |      5 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4728000 |      47 |     18 |     19 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     20 |     27 |       1 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        4 |        0 |        0 |       0 |        3 |        1 |        2 |        2 |        2 |        0 |       0 |        2 |        1 |        2 |        1 |        1 |        0 |       0 |        2 |        4 |        2 |        2 |        2 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       1 |        1 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      1 |      1 |      2 |      1 |      7 |      0 |      0 |      0 |      1 |      8 |      1 |      0 |      0 |      9 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4728900 |       3 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4729000 |     542 |    163 |    275 |    13 |    0 |     6 |    4 |    1 |     0 |    0 |     80 |    0 |    0 |    0 |    0 |    249 |    293 |      30 |      20 |       6 |       1 |      9 |     11 |      4 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        8 |       10 |        7 |       14 |       12 |        8 |       5 |        9 |        9 |       21 |       20 |       12 |       18 |      10 |        6 |       22 |       29 |       33 |       24 |       19 |       6 |       10 |       20 |       24 |       30 |       25 |       17 |      10 |        4 |       11 |        8 |        7 |        3 |        3 |       0 |        4 |       14 |       13 |        8 |        3 |        0 |       2 |        0 |        5 |        1 |        2 |        2 |        0 |       0 |        2 |        4 |        5 |        1 |        1 |        1 |       0 |      0 |      1 |     15 |     22 |     10 |      2 |      9 |    104 |      0 |      0 |      2 |     23 |     44 |     20 |      6 |     17 |    163 |      0 |      0 |      1 |      8 |      8 |      5 |      0 |      2 |     56 |      0 |      0 |      0 |      1 |      7 |      2 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4729100 |     300 |    108 |    119 |     9 |    0 |     2 |    2 |    3 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    126 |    174 |      25 |      10 |       8 |       1 |      5 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        3 |       11 |       13 |        4 |        4 |        3 |       0 |       10 |       23 |        8 |       14 |        7 |        8 |       0 |        8 |       19 |       12 |        8 |        6 |        1 |       0 |       13 |       18 |        9 |       13 |        4 |        7 |       1 |        4 |       11 |        2 |        5 |        0 |        1 |       0 |       13 |        8 |        7 |        3 |        0 |        1 |       0 |        3 |        5 |        2 |        0 |        1 |        0 |       0 |        2 |        2 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |     11 |     11 |      2 |      1 |      1 |     82 |      0 |      0 |      1 |     17 |      5 |      5 |      2 |      1 |     88 |      0 |      0 |      0 |      4 |      6 |      2 |      0 |      0 |     43 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4729200 |     237 |     88 |     90 |     7 |    0 |     2 |    2 |    1 |     0 |    0 |     47 |    0 |    0 |    0 |    0 |    100 |    137 |      23 |       9 |       7 |       0 |      2 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      2 |      2 |      0 |        5 |       13 |       11 |        2 |        3 |        3 |       0 |        8 |       20 |        7 |        7 |        2 |        7 |       0 |        7 |        9 |       11 |        6 |        4 |        2 |       0 |       13 |       14 |       10 |        5 |        4 |        4 |       1 |        6 |        5 |        3 |        4 |        0 |        0 |       0 |        9 |       13 |        0 |        4 |        3 |        0 |       0 |        2 |        4 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        3 |        1 |        0 |        1 |       0 |      0 |      1 |      9 |      5 |      2 |      1 |      0 |     70 |      0 |      0 |      1 |     12 |      8 |      2 |      0 |      4 |     63 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     40 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4729300 |     427 |    165 |    185 |    13 |    0 |     3 |    6 |    1 |     0 |    0 |     54 |    0 |    0 |    0 |    0 |    204 |    223 |      26 |      18 |       7 |       1 |      5 |      9 |      3 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        6 |       13 |       15 |        9 |       13 |      10 |        6 |        9 |       14 |       23 |        9 |       15 |      18 |        5 |       11 |       23 |       21 |       11 |       13 |       7 |       11 |       14 |       22 |       13 |       13 |       16 |       5 |        4 |        6 |        7 |        7 |        2 |        3 |       0 |        4 |        2 |        8 |        5 |        4 |        1 |       1 |        1 |        3 |        2 |        4 |        2 |        1 |       0 |        1 |        2 |        4 |        1 |        2 |        0 |       0 |      0 |      0 |     21 |     23 |     10 |      7 |      8 |     96 |      0 |      0 |      3 |     21 |     25 |      6 |      8 |      7 |    115 |      0 |      0 |      0 |     11 |      5 |      2 |      0 |      3 |     33 |      0 |      0 |      0 |      8 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4729400 |      24 |     11 |      7 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     12 |     12 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        2 |        0 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       1 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4729500 |      76 |     21 |     44 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     35 |     41 |       2 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        3 |        3 |       0 |        2 |        0 |        0 |        6 |        1 |        3 |       0 |        0 |        1 |        6 |        4 |        7 |        4 |       1 |        1 |        0 |        5 |        6 |        2 |        5 |       2 |        2 |        0 |        0 |        0 |        1 |        0 |       0 |        2 |        1 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      5 |      1 |      2 |     13 |      0 |      0 |      0 |      3 |     10 |      5 |      0 |      3 |     23 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4730000 |     379 |     96 |    236 |     7 |    0 |     1 |    1 |    0 |     1 |    0 |     37 |    0 |    0 |    0 |    0 |    176 |    203 |       4 |       4 |       0 |       0 |      9 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        1 |        5 |        4 |        4 |        9 |      10 |        3 |        0 |        4 |       15 |       13 |       15 |       9 |        4 |        6 |       20 |       20 |       18 |       28 |      20 |        2 |        7 |       17 |       19 |       19 |       33 |      23 |        0 |        4 |        3 |        5 |        3 |        2 |       1 |        2 |        4 |        4 |        4 |        3 |        1 |       1 |        0 |        0 |        1 |        3 |        0 |        1 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |     11 |      8 |      5 |      7 |     56 |      0 |      0 |      1 |     21 |     37 |     15 |      5 |     20 |    137 |      0 |      0 |      1 |      7 |      8 |      2 |      1 |      1 |     17 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4730100 |     185 |     55 |    100 |     0 |    0 |     1 |    0 |    0 |     2 |    0 |     27 |    0 |    0 |    0 |    0 |     92 |     93 |       4 |       3 |       4 |       1 |      1 |      5 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        4 |        4 |        4 |        5 |       6 |        1 |        6 |        5 |        6 |        1 |        5 |       5 |        2 |        3 |        7 |        9 |       11 |       11 |       8 |        2 |        3 |        1 |       13 |        8 |       15 |       7 |        1 |        0 |        2 |        2 |        5 |        0 |       2 |        1 |        1 |        3 |        4 |        3 |        2 |       1 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      4 |      1 |      3 |      3 |     41 |      0 |      0 |      0 |      6 |     13 |      8 |      5 |      6 |     62 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      2 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4731000 |     271 |     71 |    142 |     5 |    0 |     3 |    2 |    1 |     1 |    0 |     46 |    0 |    0 |    0 |    0 |    118 |    153 |       6 |       4 |       2 |       2 |      3 |     10 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        4 |        9 |        3 |        6 |       7 |        2 |        3 |       11 |        7 |        6 |        7 |       5 |        5 |        7 |       16 |        8 |        6 |       14 |       7 |        5 |        6 |       13 |       10 |       10 |       24 |      11 |        4 |        1 |        8 |        3 |        1 |        2 |       1 |        2 |        2 |        9 |        5 |        6 |        2 |       0 |        1 |        2 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        3 |        1 |        1 |        2 |       0 |      0 |      1 |      7 |     12 |      3 |      5 |      2 |     41 |      0 |      0 |      0 |     17 |     23 |      7 |      4 |      5 |     86 |      0 |      0 |      1 |     10 |      4 |      1 |      2 |      1 |     27 |      0 |      0 |      1 |      0 |      4 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4732000 |     541 |    182 |    251 |    12 |    0 |     4 |    3 |    1 |     3 |    0 |     85 |    0 |    0 |    0 |    0 |    256 |    285 |      20 |      27 |       7 |       5 |     11 |     21 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       2 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |       10 |        5 |       12 |       17 |        8 |       10 |      13 |        7 |       12 |       15 |       22 |       12 |       28 |      11 |       10 |       24 |       19 |       17 |       19 |       25 |      15 |       14 |       18 |       29 |       17 |        8 |       17 |      19 |        7 |        7 |        9 |        9 |        3 |        2 |       1 |        4 |        8 |       15 |        9 |        2 |        7 |       2 |        4 |        5 |        2 |        1 |        1 |        1 |       0 |        3 |        2 |        2 |        1 |        1 |        0 |       0 |      0 |      4 |     29 |     12 |     12 |      8 |      5 |    112 |      0 |      0 |      1 |     19 |     40 |     11 |      4 |     10 |    166 |      0 |      0 |      1 |      7 |     12 |      6 |      1 |      4 |     54 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4733000 |     218 |     72 |     98 |     4 |    0 |     0 |    1 |    0 |     1 |    0 |     42 |    0 |    0 |    0 |    0 |    101 |    117 |       4 |       3 |       4 |       0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      1 |      1 |      1 |      0 |        2 |        3 |        3 |        4 |        4 |       10 |       3 |        1 |        3 |        6 |        7 |        7 |       10 |       9 |        4 |       12 |       15 |        6 |        9 |        2 |       1 |        3 |        9 |        8 |        9 |        6 |        8 |       6 |        1 |        2 |        7 |        4 |        5 |        1 |       1 |        3 |        5 |        6 |        1 |        3 |        2 |       1 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |     10 |      4 |      2 |      1 |      2 |     53 |      0 |      0 |      1 |      9 |     12 |      5 |      1 |      1 |     69 |      0 |      0 |      1 |      4 |      2 |      2 |      0 |      1 |     32 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4734000 |     223 |     83 |     84 |     5 |    0 |     4 |    4 |    2 |     1 |    0 |     40 |    0 |    0 |    0 |    0 |    109 |    114 |       8 |       0 |       0 |       0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      3 |      0 |        2 |        4 |        7 |        8 |        6 |        3 |       5 |        2 |        8 |        6 |        9 |        7 |        6 |      10 |        0 |        7 |        7 |       18 |        6 |        5 |       2 |        2 |        4 |       11 |        9 |        9 |        0 |       4 |        3 |        3 |        4 |        3 |        5 |        1 |       0 |        5 |        5 |        3 |        4 |        2 |        1 |       1 |        3 |        1 |        2 |        1 |        3 |        0 |       0 |        0 |        0 |        2 |        2 |        1 |        1 |       0 |      0 |      0 |      9 |      5 |      5 |      4 |      6 |     54 |      0 |      0 |      0 |      8 |     17 |      5 |      3 |      3 |     48 |      0 |      0 |      0 |      8 |      2 |      5 |      0 |      0 |     25 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4735000 |     263 |     91 |    132 |     3 |    0 |     2 |    1 |    0 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |    123 |    140 |       4 |       3 |       4 |       0 |      4 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        3 |        4 |        5 |        5 |       12 |        3 |       5 |        4 |        6 |        5 |       14 |        7 |        6 |      12 |       10 |       10 |       14 |        9 |       10 |        6 |       8 |        4 |       13 |       10 |       13 |        8 |        9 |       8 |        5 |        3 |        2 |        2 |        1 |        1 |       1 |        4 |        5 |        5 |        1 |        0 |        3 |       1 |        1 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |     16 |      6 |      2 |      6 |     53 |      0 |      0 |      0 |     10 |     27 |      4 |      7 |      3 |     81 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |     28 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4735100 |     128 |     42 |     59 |     3 |    0 |     0 |    4 |    0 |     1 |    0 |     19 |    0 |    0 |    0 |    0 |     57 |     71 |       2 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        7 |        5 |        3 |       2 |        2 |        2 |        5 |        2 |        5 |        6 |       2 |        2 |        0 |        5 |        3 |        7 |        4 |       5 |        3 |        2 |        5 |        5 |        4 |        6 |       8 |        3 |        0 |        2 |        0 |        2 |        2 |       0 |        1 |        2 |        2 |        1 |        1 |        3 |       0 |        2 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |      8 |      8 |      1 |      0 |      0 |     25 |      0 |      0 |      0 |      9 |      9 |      3 |      1 |      1 |     36 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |     15 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      4 |      0 |     37 | s03      | R    |
| 4736000 |     368 |     99 |    217 |    12 |    0 |     0 |    1 |    1 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |    170 |    198 |       6 |       7 |       3 |       1 |      2 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      2 |        3 |        2 |        4 |        9 |        5 |        5 |       8 |        7 |        4 |        9 |       16 |       11 |        7 |       9 |        6 |       12 |       19 |       28 |       12 |       24 |       9 |        7 |        6 |       24 |       20 |        8 |       28 |      14 |        4 |        3 |        3 |        2 |        0 |        3 |       1 |        3 |        3 |        5 |        7 |        2 |        2 |       0 |        1 |        0 |        2 |        3 |        0 |        2 |       0 |        1 |        0 |        2 |        2 |        0 |        1 |       0 |      0 |      2 |     10 |     17 |      5 |      1 |      4 |     60 |      0 |      0 |      1 |      8 |     46 |     12 |     11 |     13 |    126 |      0 |      0 |      1 |      6 |      3 |      0 |      3 |      2 |     23 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4736100 |     108 |     28 |     47 |     2 |    0 |     1 |    1 |    0 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     47 |     61 |       2 |       3 |       6 |       2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        1 |        3 |        2 |        1 |        0 |       0 |        3 |        2 |        6 |        5 |        2 |        3 |       0 |        0 |        5 |        5 |        3 |        5 |        4 |       1 |        3 |        6 |        2 |        2 |        5 |        6 |       0 |        0 |        5 |        6 |        2 |        0 |        1 |       1 |        2 |        0 |        3 |        4 |        3 |        2 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       1 |      0 |      1 |      4 |      9 |      1 |      0 |      1 |     12 |      0 |      0 |      0 |      5 |      4 |      2 |      0 |      3 |     33 |      0 |      0 |      1 |      2 |      2 |      1 |      2 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4737000 |     329 |     91 |    136 |     8 |    0 |    11 |    8 |    2 |     0 |    0 |     73 |    0 |    0 |    0 |    0 |    151 |    178 |      18 |      25 |      17 |       0 |      0 |      7 |      3 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        7 |        9 |        9 |        7 |        5 |        0 |       0 |        7 |       12 |       12 |       11 |        5 |        6 |       1 |       14 |       13 |       14 |       10 |       12 |        2 |       2 |       14 |       13 |       19 |       11 |        7 |        4 |       1 |        4 |       11 |        5 |        5 |        4 |        0 |       2 |       10 |       13 |        7 |        8 |        4 |        0 |       0 |        1 |        3 |        4 |        3 |        3 |        2 |       0 |        3 |        2 |        3 |        3 |        2 |        0 |       0 |      0 |      1 |      8 |     11 |      3 |      0 |      4 |     64 |      0 |      0 |      4 |     24 |     14 |      2 |      2 |      0 |     90 |      0 |      0 |      1 |     17 |      4 |      1 |      0 |      0 |     50 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4737100 |     432 |    149 |    177 |    17 |    0 |     3 |    6 |    2 |     3 |    0 |     75 |    0 |    0 |    0 |    0 |    194 |    238 |      28 |      17 |       6 |       4 |      6 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |       13 |       10 |        9 |        8 |        6 |        5 |       1 |       24 |       27 |       17 |       12 |        7 |        7 |       3 |       15 |       30 |       12 |       14 |        5 |       10 |       0 |       16 |       30 |       20 |       10 |        5 |        9 |       1 |       11 |       13 |        9 |        4 |        3 |        1 |       0 |        9 |       11 |        3 |        4 |        4 |        3 |       0 |        2 |        4 |        6 |        1 |        1 |        1 |       0 |        0 |        7 |        5 |        1 |        2 |        1 |       0 |      0 |      1 |     29 |     15 |      1 |      1 |      2 |    100 |      0 |      0 |      1 |     39 |     14 |      5 |      2 |      0 |    116 |      0 |      0 |      0 |     14 |      3 |      2 |      0 |      0 |     56 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 4738000 |     306 |    125 |    110 |     5 |    0 |     4 |    5 |    1 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    137 |    169 |      22 |      12 |      13 |       2 |      3 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      1 |      0 |      0 |        5 |       12 |       10 |        9 |        4 |        5 |       0 |       14 |       17 |       13 |       16 |       11 |        8 |       1 |        6 |       19 |       15 |       13 |        2 |        4 |       0 |       11 |       15 |       12 |        6 |        5 |        2 |       0 |        3 |       10 |        8 |        1 |        2 |        2 |       0 |        7 |       15 |        3 |        1 |        2 |        1 |       0 |        1 |        1 |        3 |        2 |        0 |        0 |       0 |        1 |        3 |        3 |        2 |        0 |        0 |       0 |      0 |      2 |     17 |     19 |      6 |      3 |      1 |     77 |      0 |      0 |      2 |     19 |      9 |      2 |      0 |      3 |     75 |      0 |      0 |      1 |     12 |      3 |      0 |      0 |      0 |     39 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4739000 |     515 |    191 |    221 |    10 |    0 |     5 |    2 |    1 |     5 |    0 |     80 |    0 |    0 |    0 |    0 |    225 |    290 |      33 |      26 |      11 |       4 |      6 |     11 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        9 |       12 |       15 |        9 |        7 |       10 |       1 |       18 |       26 |       21 |       23 |       22 |       15 |       3 |       27 |       26 |       19 |       20 |       11 |       11 |       2 |       22 |       20 |       26 |       15 |        7 |       15 |       0 |       10 |       10 |        5 |        6 |        0 |        3 |       0 |       12 |       12 |        8 |        5 |        4 |        5 |       0 |        1 |        4 |        3 |        2 |        1 |        1 |       0 |        4 |        2 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |     25 |     25 |      4 |      2 |      6 |    129 |      0 |      0 |      4 |     33 |     12 |      1 |      3 |      0 |    168 |      0 |      0 |      3 |     10 |      6 |      1 |      0 |      0 |     60 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 4740000 |     436 |    184 |    129 |    22 |    0 |     5 |    6 |    1 |     5 |    0 |     84 |    0 |    0 |    0 |    0 |    183 |    253 |      39 |      18 |      18 |       3 |      3 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      4 |      2 |      1 |      1 |       11 |       20 |       21 |       14 |        1 |        3 |       2 |       15 |       37 |       16 |       23 |        6 |       14 |       1 |       11 |       13 |       18 |        7 |        3 |        2 |       0 |       16 |       16 |       15 |       14 |        4 |       10 |       0 |        6 |       11 |        9 |        9 |        3 |        0 |       0 |       16 |       15 |        8 |        4 |        2 |        1 |       0 |        3 |       11 |        3 |        1 |        1 |        0 |       0 |        4 |        7 |        4 |        2 |        2 |        1 |       0 |      0 |      1 |     32 |     14 |      0 |      0 |      0 |    137 |      0 |      0 |      3 |     21 |     13 |      2 |      1 |      0 |     89 |      0 |      0 |      0 |      9 |      2 |      1 |      2 |      0 |     70 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 4740100 |     269 |     86 |    118 |     7 |    0 |     1 |    3 |    2 |     0 |    0 |     52 |    0 |    0 |    0 |    0 |    140 |    129 |      15 |      20 |      10 |       3 |      5 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      1 |      2 |      0 |        1 |        4 |       10 |       11 |        5 |        4 |       7 |        5 |        3 |        8 |        7 |        8 |        7 |       6 |        9 |        5 |       16 |       10 |        9 |       10 |       1 |        6 |        6 |       13 |       12 |        5 |        8 |       8 |        7 |        9 |        4 |        6 |        3 |        2 |       0 |        5 |        2 |        5 |        4 |        5 |        0 |       0 |        1 |        1 |        2 |        1 |        1 |        1 |       0 |        1 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      8 |      9 |      2 |      0 |      0 |     67 |      0 |      0 |      1 |     14 |     17 |      0 |      3 |      9 |     74 |      0 |      0 |      2 |      7 |      3 |      2 |      2 |      0 |     36 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 4741000 |     248 |     96 |     99 |     4 |    0 |     3 |    2 |    3 |     1 |    0 |     40 |    0 |    0 |    0 |    0 |    110 |    138 |      26 |      19 |      14 |       2 |      3 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       4 |       0 |      0 |      0 |      0 |      0 |        7 |       13 |        8 |        9 |        1 |        1 |       1 |       13 |        9 |        9 |       14 |        5 |        6 |       0 |        7 |       17 |        8 |        7 |        6 |        3 |       1 |       12 |       13 |       11 |       11 |        1 |        0 |       2 |        6 |        2 |        2 |        0 |        3 |        1 |       0 |       11 |        6 |        6 |        2 |        0 |        1 |       0 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |        2 |        1 |        2 |        0 |        1 |        0 |       0 |      0 |      1 |     15 |      8 |      0 |      0 |      1 |     71 |      0 |      0 |      0 |     22 |      9 |      1 |      2 |      0 |     65 |      0 |      0 |      1 |      4 |      6 |      0 |      0 |      0 |     29 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4741100 |     108 |     45 |     35 |     2 |    0 |     2 |    0 |    1 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     38 |     70 |       3 |       2 |       2 |       1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        2 |        3 |        4 |        2 |       0 |        1 |        1 |        1 |        3 |        4 |       24 |       0 |        2 |        5 |        3 |        5 |        0 |        1 |       0 |        0 |        1 |        3 |        2 |        1 |       12 |       0 |        1 |        1 |        0 |        5 |        0 |        2 |       0 |        1 |        0 |        2 |        0 |        3 |        8 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        3 |       0 |      0 |      1 |      3 |      6 |      3 |      1 |      0 |     31 |      0 |      0 |      1 |      9 |      6 |      2 |      1 |      0 |     16 |      0 |      0 |      0 |      6 |      2 |      1 |      0 |      1 |     13 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4741200 |     433 |    143 |    171 |    22 |    0 |     1 |    2 |    6 |     3 |    0 |     85 |    0 |    0 |    0 |    0 |    186 |    247 |      27 |      21 |       8 |       3 |      3 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      1 |      1 |      0 |        6 |       13 |       15 |       10 |        9 |        6 |       1 |       15 |       19 |       19 |        7 |       13 |        9 |       1 |       16 |       21 |       13 |       19 |        7 |        3 |       0 |       22 |       24 |       20 |       16 |        4 |        6 |       0 |        5 |       14 |        6 |        7 |        2 |        1 |       0 |       13 |       16 |        8 |        9 |        2 |        2 |       0 |        4 |        2 |        2 |        4 |        0 |        0 |       0 |        3 |        5 |        3 |        7 |        3 |        1 |       0 |      0 |      1 |     26 |     12 |      2 |      0 |      1 |    101 |      0 |      0 |      0 |     20 |      9 |      3 |      0 |      0 |    139 |      0 |      0 |      1 |      9 |      1 |      0 |      1 |      1 |     72 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |     27 |      0 |     37 | s03      | R    |
| 4742000 |     339 |    110 |    145 |    10 |    0 |     6 |    6 |    1 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    148 |    191 |      19 |      22 |      15 |       3 |      2 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      1 |        8 |        9 |        7 |       13 |        6 |        4 |       5 |        6 |       18 |        8 |       15 |        4 |        5 |       2 |        5 |       13 |       15 |       14 |        7 |        6 |       2 |       16 |       17 |       16 |       14 |        5 |        9 |       6 |        5 |        4 |        8 |        4 |        1 |        0 |       0 |       12 |        9 |        5 |        7 |        2 |        2 |       1 |        3 |        4 |        2 |        2 |        0 |        1 |       0 |        2 |        3 |        3 |        2 |        1 |        1 |       0 |      0 |      2 |     15 |     10 |      3 |      0 |      1 |     79 |      0 |      0 |      1 |     22 |     13 |      4 |      2 |      2 |    101 |      0 |      0 |      2 |      9 |      1 |      1 |      0 |      1 |     46 |      0 |      0 |      1 |      5 |      3 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4742100 |     448 |    162 |    161 |    18 |    0 |     4 |    1 |    2 |     5 |    0 |     95 |    0 |    0 |    0 |    0 |    188 |    260 |      35 |      16 |      20 |       5 |      4 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |        7 |       13 |       15 |       12 |        6 |       11 |       1 |        9 |       17 |       11 |       20 |       19 |       21 |       0 |        6 |       25 |       13 |       11 |        7 |        8 |       0 |       15 |       19 |       21 |       12 |       13 |       11 |       0 |        9 |       13 |        5 |        9 |        5 |        0 |       0 |       16 |       17 |        7 |        5 |        6 |        3 |       0 |        4 |        1 |        3 |        2 |        1 |        1 |       0 |        3 |        5 |        4 |        3 |        2 |        1 |       0 |      0 |      1 |     27 |     21 |      3 |      2 |      2 |    106 |      0 |      0 |      1 |     18 |      8 |      6 |      5 |      0 |    123 |      0 |      0 |      0 |     14 |      5 |      2 |      0 |      2 |     72 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 4743000 |     252 |     96 |    101 |     5 |    0 |    10 |    2 |    2 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |    119 |    133 |      13 |       8 |       4 |       2 |      0 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        3 |        4 |       11 |        6 |       16 |       5 |        5 |        2 |        7 |       10 |        7 |       17 |       2 |        5 |        6 |        8 |       13 |        6 |        8 |       1 |        4 |        5 |        8 |        9 |        7 |       18 |       3 |        0 |        1 |        5 |        1 |        0 |        5 |       0 |        3 |        2 |        5 |        5 |        3 |        5 |       0 |        2 |        0 |        3 |        1 |        5 |        3 |       0 |        1 |        1 |        0 |        2 |        1 |        1 |       0 |      0 |      0 |     14 |     16 |      5 |      2 |      2 |     57 |      0 |      0 |      1 |     11 |     13 |      2 |      9 |      2 |     63 |      0 |      0 |      0 |      3 |      2 |      0 |      4 |      1 |     25 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4743100 |     139 |     51 |     70 |     1 |    0 |     3 |    1 |    1 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     68 |     71 |       9 |       8 |       1 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        3 |        4 |        1 |        5 |        3 |       4 |        1 |        0 |        5 |        7 |        6 |        8 |       2 |        2 |        3 |        5 |        9 |        4 |        9 |       4 |        0 |        9 |        6 |        4 |        3 |       10 |       2 |        1 |        0 |        2 |        3 |        0 |        0 |       0 |        1 |        2 |        0 |        2 |        0 |        1 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      8 |      8 |      2 |      0 |      3 |     30 |      0 |      0 |      1 |     12 |      4 |      3 |      7 |      4 |     39 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4744000 |     316 |    121 |    130 |    12 |    0 |     5 |    1 |    1 |     1 |    0 |     45 |    0 |    0 |    0 |    0 |    134 |    182 |      23 |      27 |       4 |       3 |      2 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      1 |      0 |        1 |       14 |       12 |        7 |        3 |       12 |       1 |       17 |        7 |       10 |       15 |        8 |       13 |       1 |        6 |        6 |       15 |        9 |        8 |        7 |       1 |       14 |       17 |       11 |       12 |        5 |       18 |       1 |        5 |        5 |        7 |        1 |        2 |        2 |       0 |        4 |        3 |        5 |        2 |        5 |        3 |       1 |        1 |        4 |        1 |        4 |        0 |        0 |       0 |        1 |        2 |        2 |        1 |        1 |        3 |       0 |      0 |      2 |     17 |     14 |      0 |      0 |      2 |     86 |      0 |      0 |      1 |     19 |     11 |      0 |      0 |      2 |     97 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |     38 |      0 |      0 |      3 |      0 |      3 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4744100 |     131 |     37 |     50 |     6 |    0 |     2 |    2 |    2 |     1 |    0 |     31 |    0 |    0 |    0 |    0 |     58 |     73 |       3 |       3 |       5 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        1 |        3 |        6 |        0 |        2 |       0 |        4 |        2 |        5 |        8 |        4 |        0 |       0 |        1 |        8 |        7 |        5 |        1 |        4 |       0 |        6 |        3 |        6 |        3 |        3 |        3 |       0 |        0 |        1 |        5 |        3 |        2 |        0 |       0 |        5 |        6 |        2 |        2 |        3 |        2 |       0 |        1 |        0 |        3 |        1 |        1 |        1 |       0 |        0 |        4 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      4 |      2 |      2 |      2 |      0 |     27 |      0 |      0 |      1 |      8 |      4 |      2 |      0 |      0 |     35 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4745000 |     327 |    129 |    126 |    17 |    0 |     3 |    1 |    1 |     2 |    0 |     48 |    0 |    0 |    0 |    0 |    125 |    202 |      21 |       8 |      14 |       3 |      7 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        2 |        4 |        6 |        4 |        9 |       10 |       2 |        6 |       11 |       14 |       12 |       13 |       36 |       0 |        3 |        9 |        8 |        5 |        7 |       23 |       0 |        5 |        7 |       12 |        5 |        8 |       32 |       2 |        5 |        6 |        3 |        4 |        2 |        2 |       0 |        4 |        9 |        1 |        4 |        2 |        6 |       0 |        0 |        0 |        2 |        1 |        3 |        5 |       0 |        1 |        2 |        1 |        3 |        1 |        5 |       0 |      0 |      2 |     23 |     22 |      4 |      2 |      3 |     73 |      0 |      0 |      0 |     17 |     19 |      2 |      1 |      2 |     85 |      0 |      0 |      0 |      9 |      4 |      2 |      0 |      0 |     33 |      0 |      0 |      1 |      4 |      3 |      3 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4746000 |     218 |     72 |     87 |    10 |    0 |     1 |    1 |    1 |     1 |    0 |     45 |    0 |    0 |    0 |    0 |     92 |    126 |      11 |      10 |       6 |       0 |      6 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        3 |        8 |        8 |        9 |        3 |        1 |       0 |        9 |       10 |        5 |        7 |        4 |        4 |       1 |        7 |       10 |       14 |        3 |        4 |        2 |       0 |        7 |       14 |        5 |        9 |        2 |        9 |       1 |        3 |       10 |        0 |        2 |        0 |        1 |       0 |        8 |        9 |        1 |        5 |        2 |        4 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |        3 |        2 |        3 |        1 |        0 |        1 |       0 |      0 |      0 |      9 |      2 |      1 |      0 |      0 |     60 |      0 |      0 |      0 |     13 |      4 |      0 |      1 |      1 |     68 |      0 |      0 |      0 |      8 |      4 |      0 |      0 |      0 |     33 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4746100 |     100 |     38 |     42 |     3 |    0 |     2 |    1 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     48 |     52 |       3 |       5 |       2 |       0 |      2 |      5 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        3 |        4 |        1 |        8 |       0 |        1 |        1 |        3 |        6 |        5 |        4 |       0 |        0 |        1 |        4 |        6 |        3 |        4 |       0 |        3 |        2 |        5 |        5 |        4 |        5 |       0 |        1 |        4 |        1 |        1 |        0 |        3 |       0 |        0 |        1 |        1 |        0 |        2 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        3 |        0 |       0 |      0 |      0 |      9 |      5 |      2 |      1 |      0 |     21 |      0 |      0 |      0 |      3 |      5 |      0 |      2 |      0 |     32 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4747000 |     268 |     98 |    115 |     7 |    0 |     5 |    3 |    2 |     1 |    0 |     37 |    0 |    0 |    0 |    0 |    122 |    146 |      13 |      11 |       3 |       0 |      1 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      2 |      0 |        0 |        3 |        6 |        4 |       10 |       11 |       4 |        2 |        2 |        6 |       11 |       13 |       20 |       6 |        5 |        3 |        9 |       12 |        8 |       10 |       9 |        3 |        4 |        9 |       14 |        9 |       14 |       6 |        1 |        1 |        2 |        4 |        4 |        4 |       0 |        5 |        1 |        4 |        1 |        6 |        4 |       0 |        2 |        4 |        1 |        0 |        3 |        2 |       0 |        1 |        2 |        0 |        0 |        1 |        2 |       0 |      0 |      1 |      6 |     21 |      2 |      2 |      3 |     63 |      0 |      0 |      1 |     14 |     17 |      4 |      2 |      2 |     75 |      0 |      0 |      1 |      5 |      5 |      0 |      1 |      0 |     25 |      0 |      0 |      0 |      2 |      8 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4748000 |     204 |     54 |    102 |    10 |    0 |     2 |    2 |    1 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |     88 |    116 |      11 |      18 |       9 |       1 |      2 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        1 |        0 |        7 |        2 |        3 |       3 |        2 |        5 |        4 |        7 |        4 |        4 |      11 |        6 |        9 |       12 |       10 |        3 |        5 |       2 |        7 |        7 |       11 |        6 |        9 |       11 |       4 |        4 |        2 |        4 |        2 |        2 |        1 |       0 |        4 |        3 |        3 |        6 |        0 |        1 |       0 |        2 |        2 |        0 |        2 |        2 |        1 |       0 |        0 |        2 |        1 |        4 |        0 |        0 |       0 |      0 |      0 |      8 |      2 |      4 |      1 |      3 |     36 |      0 |      0 |      2 |     16 |     16 |      2 |      3 |      2 |     61 |      0 |      0 |      0 |      4 |      5 |      2 |      2 |      1 |     18 |      0 |      0 |      1 |      3 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4749000 |     305 |     45 |    202 |     7 |    0 |     0 |    3 |    1 |     0 |    0 |     47 |    0 |    0 |    0 |    0 |    139 |    166 |       7 |       4 |       3 |       0 |      5 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       1 |       0 |      1 |      1 |      0 |      0 |        2 |        3 |        6 |        3 |        4 |        2 |       1 |        3 |        2 |        6 |        7 |        2 |        2 |       2 |       34 |       17 |       10 |       13 |       10 |        8 |       1 |       57 |        6 |       15 |       14 |        9 |        7 |       1 |       10 |        4 |        0 |        3 |        4 |        0 |       0 |       17 |        2 |        0 |        4 |        2 |        0 |       1 |        2 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        3 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      5 |      8 |      1 |      4 |      0 |     27 |      0 |      0 |      6 |     18 |     29 |      4 |      7 |      4 |    134 |      0 |      0 |      2 |      4 |      4 |      1 |      0 |      0 |     36 |      0 |      0 |      2 |      2 |      1 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4749200 |      40 |      7 |     28 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     21 |     19 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        3 |        1 |        0 |        7 |        4 |        0 |       0 |        3 |        0 |        3 |        4 |        3 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      5 |      5 |      0 |      2 |     14 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4749300 |       5 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      1 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4750000 |     295 |     74 |    186 |     3 |    0 |     4 |    0 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |    134 |    161 |       7 |       2 |       0 |       1 |      1 |     12 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        1 |        2 |        9 |        8 |        9 |       2 |        2 |        3 |        6 |       11 |        7 |        5 |       8 |        6 |        6 |       15 |       24 |       12 |       13 |       8 |       16 |        9 |       16 |       26 |       11 |       15 |       9 |        4 |        0 |        6 |        1 |        0 |        1 |       1 |        4 |        2 |        4 |        1 |        1 |        2 |       1 |        1 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |     12 |     11 |      3 |      1 |      9 |     38 |      0 |      0 |      0 |     24 |     27 |     13 |      4 |      3 |    115 |      0 |      0 |      0 |      9 |      3 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4750100 |      36 |      9 |     24 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     16 |     20 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        4 |        1 |        0 |        1 |       0 |        0 |        0 |        4 |        5 |        1 |        1 |       0 |        3 |        1 |        3 |        3 |        2 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      4 |     15 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4750200 |      19 |      3 |     13 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      9 |     10 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        1 |        1 |       0 |        1 |        1 |        1 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4752000 |     320 |    108 |    152 |     7 |    0 |     3 |    1 |    3 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |    132 |    188 |      33 |      26 |      15 |       2 |      0 |      9 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        6 |        9 |       10 |        8 |        3 |       1 |       13 |        9 |       14 |       13 |        8 |        9 |       4 |        6 |       15 |       16 |       15 |        7 |        3 |       0 |       15 |       19 |       23 |       12 |       11 |        7 |       3 |        7 |        5 |        4 |        5 |        0 |        2 |       1 |        8 |        4 |        3 |        3 |        3 |        0 |       1 |        1 |        3 |        2 |        1 |        0 |        1 |       0 |        1 |        1 |        2 |        1 |        0 |        1 |       0 |      0 |      0 |     12 |     15 |      6 |      0 |      0 |     75 |      0 |      0 |      1 |     25 |     18 |      9 |      3 |      0 |     96 |      0 |      0 |      1 |      7 |      3 |      2 |      1 |      0 |     32 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 4752100 |     215 |     69 |     95 |     8 |    0 |     0 |    2 |    0 |     2 |    0 |     39 |    0 |    0 |    0 |    0 |    109 |    106 |      12 |       8 |       7 |       1 |      2 |      4 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        4 |       11 |        8 |        6 |       0 |        1 |        2 |        8 |       13 |        3 |        8 |       1 |        6 |        4 |       14 |       12 |        8 |        6 |       0 |        6 |        7 |       15 |        9 |        3 |        5 |       0 |        2 |        6 |        5 |        2 |        3 |        3 |       1 |        4 |        4 |        4 |        1 |        4 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        3 |        2 |        2 |        0 |       0 |      0 |      3 |      8 |     16 |      5 |      1 |      1 |     35 |      0 |      0 |      0 |     17 |     17 |      5 |      3 |      8 |     45 |      0 |      0 |      0 |      6 |      7 |      4 |      1 |      0 |     21 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 4753000 |     584 |    169 |    293 |    16 |    0 |     5 |    0 |    0 |     3 |    0 |     98 |    0 |    0 |    0 |    0 |    255 |    329 |      25 |      34 |      12 |       5 |      6 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       2 |       0 |      1 |      4 |      0 |      0 |        7 |       12 |       11 |       12 |        6 |        8 |       5 |       16 |       23 |       21 |       18 |       15 |       10 |       5 |       18 |       39 |       36 |       20 |       15 |       12 |       1 |       32 |       38 |       26 |       31 |       14 |        8 |       3 |        6 |        8 |       14 |        8 |        3 |        2 |       0 |       14 |       18 |       10 |        7 |        3 |        4 |       1 |        4 |        4 |        3 |        0 |        1 |        0 |       0 |        2 |        2 |        5 |        1 |        1 |        1 |       0 |      0 |      0 |     25 |     17 |      8 |      1 |      0 |    118 |      0 |      0 |      0 |     32 |     36 |      7 |      6 |      6 |    206 |      0 |      0 |      3 |     10 |      4 |      1 |      1 |      0 |     79 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4753100 |     289 |    101 |    113 |     9 |    0 |     3 |    3 |    3 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    138 |    151 |      22 |      11 |      10 |       0 |      2 |      3 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        3 |        4 |       11 |        8 |        6 |       11 |       1 |        4 |        5 |        8 |        8 |        9 |       21 |       2 |        4 |        5 |       15 |       15 |        4 |       13 |       1 |        3 |       12 |        9 |       10 |       12 |        9 |       1 |        2 |       10 |        0 |        5 |        4 |        5 |       0 |        2 |        5 |        9 |        3 |        4 |        6 |       0 |        2 |        2 |        1 |        2 |        2 |        2 |       0 |        2 |        1 |        1 |        1 |        1 |        3 |       0 |      0 |      0 |     20 |     13 |      5 |      3 |      1 |     59 |      0 |      0 |      1 |     19 |     20 |      3 |      2 |      2 |     66 |      0 |      0 |      1 |     16 |      5 |      2 |      0 |      1 |     30 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4754000 |     285 |     99 |    112 |    12 |    0 |     5 |    4 |    3 |     1 |    0 |     49 |    0 |    0 |    0 |    0 |    135 |    150 |      13 |      10 |       6 |       3 |      6 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        4 |        3 |        7 |       12 |        5 |        7 |       4 |        2 |        4 |       13 |       14 |        9 |       11 |       4 |        9 |        6 |       15 |       15 |        4 |        6 |       1 |        2 |        9 |       13 |       12 |        8 |        8 |       4 |        2 |        6 |        4 |        5 |        4 |        1 |       1 |        4 |        4 |        8 |        2 |        6 |        1 |       1 |        1 |        4 |        4 |        4 |        0 |        1 |       0 |        2 |        0 |        5 |        2 |        2 |        0 |       0 |      0 |      1 |     16 |     16 |      8 |      3 |      2 |     53 |      0 |      0 |      1 |     17 |     20 |      5 |      4 |      0 |     65 |      0 |      0 |      1 |      7 |      7 |      3 |      0 |      2 |     29 |      0 |      0 |      1 |      7 |      5 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4755000 |     457 |    183 |    165 |    19 |    0 |     9 |    3 |    4 |     2 |    0 |     72 |    0 |    0 |    0 |    0 |    198 |    259 |      39 |      24 |      12 |       2 |      6 |     10 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |       1 |       1 |       0 |       0 |      0 |      3 |      2 |      0 |        5 |       10 |       19 |       19 |        7 |       12 |       2 |       12 |       14 |       25 |       22 |        8 |       27 |       1 |        9 |       20 |       17 |       13 |       10 |        6 |       0 |       10 |       19 |       22 |        8 |       11 |       19 |       1 |        7 |        9 |        6 |        3 |        4 |        4 |       0 |       11 |       14 |        3 |        4 |        4 |        3 |       0 |        2 |        3 |        5 |        3 |        2 |        1 |       0 |        6 |        4 |        2 |        2 |        2 |        5 |       0 |      0 |      0 |     25 |     19 |      8 |      0 |      0 |    131 |      0 |      0 |      2 |     32 |     13 |      4 |      1 |      0 |    113 |      0 |      0 |      1 |     11 |      3 |      0 |      0 |      1 |     56 |      0 |      0 |      0 |      7 |      5 |      0 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 4755100 |     327 |    125 |    127 |    10 |    0 |     3 |    5 |    1 |     2 |    0 |     54 |    0 |    0 |    0 |    0 |    135 |    192 |      24 |      20 |      12 |       1 |      2 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      0 |      1 |      0 |        5 |       12 |       10 |        9 |        3 |        9 |       0 |       11 |       13 |       15 |       14 |        3 |       21 |       0 |       17 |       17 |        6 |        5 |        4 |        4 |       0 |       14 |       18 |       13 |       11 |        0 |       17 |       1 |        5 |        8 |        4 |        4 |        0 |        1 |       0 |        8 |       12 |        6 |        2 |        3 |        1 |       0 |        1 |        2 |        1 |        4 |        0 |        4 |       0 |        3 |        3 |        1 |        2 |        0 |        0 |       0 |      0 |      2 |     22 |     15 |      1 |      1 |      1 |     83 |      0 |      0 |      1 |     21 |      9 |      1 |      3 |      0 |     92 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      0 |     44 |      0 |      0 |      1 |      3 |      3 |      0 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4756000 |     462 |    167 |    168 |    12 |    0 |     3 |    6 |    5 |     7 |    0 |     94 |    0 |    0 |    0 |    0 |    190 |    272 |      41 |      17 |      22 |       2 |      7 |      3 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |       0 |       2 |       0 |       0 |      1 |      2 |      1 |      0 |       11 |       13 |       10 |       11 |        2 |       10 |       3 |       11 |       23 |       18 |       19 |       14 |       21 |       1 |       14 |       20 |       17 |       12 |        9 |        9 |       1 |       17 |       20 |       29 |        5 |        8 |        5 |       2 |        7 |       12 |        8 |        8 |        2 |        1 |       0 |       10 |       18 |        9 |       11 |        5 |        3 |       0 |        1 |        3 |        3 |        1 |        0 |        2 |       0 |        3 |        9 |        4 |        4 |        3 |        0 |       0 |      0 |      3 |     17 |     10 |      5 |      2 |      0 |    130 |      0 |      0 |      5 |     23 |     10 |      5 |      1 |      0 |    124 |      0 |      0 |      2 |     22 |      2 |      0 |      0 |      0 |     68 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 4756100 |     607 |    257 |    210 |    20 |    0 |     4 |    2 |    2 |     2 |    0 |    110 |    0 |    0 |    0 |    0 |    263 |    344 |      48 |      23 |      19 |       5 |      3 |      9 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      3 |      3 |      0 |      0 |       15 |       22 |       28 |       17 |       16 |        8 |       0 |       25 |       34 |       24 |       31 |       20 |       14 |       3 |       19 |       25 |       21 |       20 |       11 |        8 |       0 |       16 |       32 |       24 |       20 |        5 |        9 |       0 |        7 |       15 |        8 |        4 |        3 |        5 |       0 |       18 |       17 |       15 |        8 |        6 |        3 |       1 |        1 |        4 |        3 |        1 |        2 |        0 |       0 |        8 |        4 |        1 |        2 |        1 |        3 |       0 |      0 |      2 |     30 |     20 |      0 |      2 |      0 |    203 |      0 |      0 |      3 |     32 |     17 |      6 |      5 |      1 |    146 |      0 |      0 |      1 |     15 |      7 |      4 |      0 |      1 |     82 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 4757000 |     645 |    226 |    310 |    20 |    0 |     6 |    3 |    2 |     1 |    0 |     77 |    0 |    0 |    0 |    0 |    254 |    391 |      27 |      26 |      11 |       3 |      6 |     16 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      2 |      0 |      0 |        5 |        6 |       11 |       11 |       15 |       27 |       6 |        4 |       23 |       16 |       17 |       12 |       66 |       7 |       13 |       20 |       25 |       15 |       11 |       29 |       5 |       20 |       31 |       24 |       22 |       11 |       74 |      10 |        4 |       13 |       11 |        3 |        4 |        4 |       0 |        3 |       14 |        6 |        4 |        4 |        6 |       1 |        3 |        2 |        2 |        4 |        1 |        4 |       0 |        2 |        2 |        4 |        1 |        3 |        4 |       0 |      0 |      1 |     28 |     35 |      5 |      4 |      2 |    151 |      0 |      0 |      1 |     43 |     44 |      1 |      6 |      4 |    211 |      0 |      0 |      0 |     18 |      5 |      1 |      1 |      0 |     52 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 4758000 |     317 |    123 |    128 |     7 |    0 |     3 |    4 |    0 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    153 |    164 |      41 |      19 |      11 |       2 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      4 |      0 |      1 |      0 |        5 |       11 |       18 |       13 |        5 |        6 |       1 |        9 |       11 |       11 |       17 |        3 |       10 |       3 |        5 |       11 |       21 |       10 |        6 |        8 |       1 |        5 |       11 |       20 |       13 |        4 |       10 |       3 |        2 |        8 |        6 |        7 |        0 |        0 |       1 |        4 |       10 |        4 |        6 |        2 |        1 |       0 |        2 |        4 |        0 |        2 |        0 |        0 |       0 |        2 |        2 |        0 |        1 |        2 |        0 |       0 |      0 |      2 |     13 |     13 |      4 |      3 |      2 |     86 |      0 |      0 |      0 |     26 |     12 |      6 |      1 |      1 |     82 |      0 |      0 |      1 |      6 |      5 |      2 |      1 |      1 |     35 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4759000 |     758 |    274 |    294 |    20 |    0 |     8 |    6 |    8 |     4 |    0 |    144 |    0 |    0 |    0 |    0 |    340 |    418 |      51 |      49 |      20 |       6 |     10 |      9 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       2 |       1 |       1 |       1 |      9 |      4 |      2 |      0 |       19 |       28 |       14 |       19 |       14 |       10 |       1 |       26 |       35 |       37 |       45 |       16 |        8 |       2 |       20 |       50 |       31 |       30 |       10 |       13 |       0 |       27 |       39 |       33 |       26 |        6 |        9 |       0 |       10 |       13 |       13 |       13 |       10 |        3 |       0 |       17 |       20 |       22 |       13 |        6 |        3 |       1 |        4 |        4 |        6 |        3 |        2 |        0 |       0 |        6 |       11 |        4 |        4 |        2 |        0 |       0 |      0 |      8 |     46 |     21 |      5 |      0 |      1 |    193 |      0 |      0 |     10 |     42 |     19 |      4 |      1 |      4 |    214 |      0 |      0 |      3 |     32 |      6 |      1 |      0 |      0 |    102 |      0 |      0 |      0 |      9 |      4 |      0 |      0 |      0 |     33 |      0 |     37 | s03      | R    |
| 4759100 |     141 |     58 |     53 |     3 |    0 |     2 |    0 |    0 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |     60 |     81 |       5 |       2 |       1 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        3 |        1 |        1 |        4 |       6 |        1 |        5 |        8 |        6 |        5 |        4 |       9 |        2 |        4 |        4 |        8 |        4 |        3 |       4 |        1 |        5 |        4 |        3 |        4 |        3 |       4 |        1 |        3 |        2 |        0 |        1 |        1 |       0 |        1 |        3 |        5 |        3 |        0 |        3 |       1 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      3 |      9 |      2 |      0 |      3 |     41 |      0 |      0 |      0 |      3 |      7 |      1 |      1 |      0 |     41 |      0 |      0 |      0 |      4 |      4 |      0 |      2 |      0 |     14 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4760000 |     367 |    100 |    180 |    11 |    0 |     2 |    5 |    1 |     4 |    0 |     64 |    0 |    0 |    0 |    0 |    168 |    199 |       8 |       7 |       6 |       0 |      2 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        3 |        5 |        5 |        8 |       6 |        1 |        8 |        2 |       17 |        9 |       17 |      13 |        7 |        8 |       17 |       29 |        9 |       14 |      10 |        4 |        6 |       15 |       23 |       10 |       19 |       9 |        2 |        4 |        4 |        6 |        3 |        8 |       3 |        7 |        3 |        5 |       11 |        3 |        3 |       2 |        1 |        2 |        2 |        3 |        2 |        1 |       0 |        1 |        3 |        2 |        2 |        3 |        1 |       0 |      0 |      0 |     10 |     10 |      2 |      4 |      4 |     70 |      0 |      0 |      0 |     21 |     40 |     11 |      3 |      9 |     96 |      0 |      0 |      1 |      8 |      5 |      3 |      1 |      0 |     46 |      0 |      0 |      1 |      3 |      2 |      0 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 4760900 |       4 |      3 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4761000 |     361 |     99 |    182 |    12 |    0 |     4 |    7 |    1 |     3 |    0 |     53 |    0 |    0 |    0 |    0 |    177 |    184 |      11 |       9 |       3 |       2 |      4 |     10 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       3 |       0 |      6 |      3 |      0 |      0 |        2 |        6 |        7 |        9 |        8 |        7 |       5 |        2 |        2 |        9 |       16 |       14 |        4 |       8 |        8 |        8 |       19 |       22 |       17 |       12 |       6 |       11 |        2 |       19 |       23 |       14 |       11 |      10 |        6 |        6 |        5 |        2 |        4 |        1 |       0 |        7 |        8 |        7 |        3 |        2 |        1 |       1 |        2 |        3 |        3 |        2 |        6 |        1 |       0 |        1 |        2 |        2 |        1 |        3 |        1 |       0 |      0 |      2 |      6 |      9 |      5 |      2 |      2 |     73 |      0 |      0 |      0 |     19 |     18 |      7 |      6 |     11 |    121 |      0 |      0 |      0 |     10 |      2 |      3 |      2 |      1 |     35 |      0 |      0 |      0 |      4 |      7 |      3 |      1 |      1 |     11 |      0 |     37 | s03      | R    |
| 4761100 |     222 |     86 |     91 |     5 |    0 |     1 |    1 |    1 |     1 |    0 |     36 |    0 |    0 |    0 |    0 |    109 |    113 |      17 |      11 |       6 |       2 |      3 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      1 |      0 |        3 |        9 |        7 |        5 |        3 |        6 |       2 |        3 |        8 |       12 |       10 |        9 |        7 |       2 |        6 |       11 |        8 |       14 |        6 |        3 |       1 |        2 |       10 |        6 |       13 |        6 |        3 |       2 |        2 |        4 |        9 |        3 |        2 |        0 |       0 |        5 |        5 |        1 |        5 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |     11 |     17 |      3 |      1 |      2 |     52 |      0 |      0 |      2 |     14 |     15 |      2 |      4 |      0 |     54 |      0 |      0 |      1 |      7 |      2 |      0 |      0 |      0 |     26 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4762000 |     414 |    144 |    183 |    14 |    0 |     2 |    1 |    1 |     2 |    0 |     67 |    0 |    0 |    0 |    0 |    185 |    229 |      31 |       7 |       4 |       3 |      4 |      8 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        6 |       10 |       14 |        7 |        9 |       8 |        2 |        9 |       12 |       15 |       14 |       17 |      20 |        6 |        3 |       29 |       22 |       12 |        9 |       8 |        6 |       11 |       21 |       19 |       13 |       11 |      13 |        6 |        4 |       12 |        6 |        3 |        0 |       0 |        6 |       14 |       10 |        3 |        1 |        1 |       1 |        3 |        2 |        2 |        2 |        1 |        0 |       0 |        3 |        3 |        2 |        1 |        0 |        1 |       0 |      0 |      0 |      9 |      9 |      9 |      5 |      3 |    109 |      0 |      0 |      5 |     26 |     25 |      8 |      8 |      9 |    102 |      0 |      0 |      2 |      9 |     16 |      1 |      3 |      0 |     36 |      0 |      0 |      0 |      3 |      5 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4763000 |     708 |    227 |    321 |    23 |    0 |     8 |    4 |    3 |     4 |    0 |    118 |    0 |    0 |    0 |    0 |    323 |    385 |      35 |      22 |      15 |       6 |      5 |     13 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |       1 |       1 |       0 |       1 |      0 |      4 |      1 |      0 |       10 |        8 |       11 |       22 |       11 |       18 |       6 |       11 |       18 |       23 |       29 |       20 |       27 |      13 |       18 |       15 |       36 |       30 |       23 |       26 |      11 |       12 |       22 |       33 |       31 |       22 |       29 |      13 |       11 |        7 |        9 |       12 |       12 |        4 |       0 |       13 |       13 |       12 |       17 |        4 |        3 |       1 |        3 |        8 |        5 |        3 |        2 |        2 |       0 |        4 |        4 |        4 |        6 |        0 |        1 |       0 |      0 |      3 |     24 |     23 |     12 |      4 |      7 |    154 |      0 |      0 |      1 |     26 |     40 |     11 |      6 |     14 |    223 |      0 |      0 |      2 |     14 |      8 |      7 |      3 |      3 |     81 |      0 |      0 |      0 |      5 |      6 |      3 |      1 |      1 |     26 |      0 |     37 | s03      | R    |
| 4766000 |     411 |    138 |    169 |    18 |    0 |     1 |    4 |    5 |     4 |    0 |     72 |    0 |    0 |    0 |    0 |    167 |    244 |      21 |      15 |      23 |       8 |      3 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       2 |       1 |       0 |      2 |      0 |      0 |      0 |        6 |        4 |       11 |        7 |        9 |        8 |       1 |        8 |        7 |       10 |       25 |       15 |       19 |       8 |       13 |       17 |       11 |       13 |       10 |       10 |       6 |       12 |       16 |       13 |       15 |        8 |       19 |       6 |        7 |        7 |        3 |        7 |        0 |        2 |       2 |        8 |       12 |       12 |        6 |        1 |        5 |       0 |        3 |        3 |        3 |        2 |        0 |        2 |       0 |        5 |        3 |        5 |        3 |        2 |        1 |       0 |      0 |      1 |     18 |     21 |      6 |      1 |      0 |     91 |      0 |      0 |      2 |     15 |     34 |      5 |      0 |      0 |    113 |      0 |      0 |      3 |     11 |     11 |      2 |      0 |      2 |     43 |      0 |      0 |      1 |      2 |      5 |      1 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 4766100 |     575 |    210 |    228 |    19 |    0 |     9 |    4 |    3 |     2 |    0 |    100 |    0 |    0 |    0 |    0 |    256 |    319 |      45 |      24 |      23 |       6 |     10 |      9 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |       11 |       17 |       14 |       18 |        7 |        3 |       2 |       22 |       22 |       27 |       35 |       16 |       15 |       1 |       14 |       25 |       31 |       20 |       11 |       10 |       0 |       17 |       26 |       20 |       19 |       18 |       17 |       0 |        9 |       19 |       11 |        9 |        4 |        0 |       0 |        7 |       20 |        5 |       10 |        2 |        2 |       2 |        3 |        6 |        4 |        5 |        3 |        0 |       0 |        4 |        5 |        3 |        2 |        1 |        1 |       0 |      0 |      7 |     22 |     17 |      2 |      1 |      0 |    161 |      0 |      0 |      3 |     33 |      9 |      8 |      5 |      8 |    162 |      0 |      0 |      0 |     13 |      2 |      2 |      0 |      0 |     83 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 4767000 |     355 |    138 |    136 |     7 |    0 |     3 |    3 |    1 |     1 |    0 |     66 |    0 |    0 |    0 |    0 |    163 |    192 |      29 |       6 |       9 |       0 |      3 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       1 |       2 |       0 |       0 |      2 |      3 |      0 |      1 |        7 |       12 |       13 |       10 |        7 |        8 |       6 |        5 |       12 |       16 |       12 |        9 |       16 |       5 |        8 |       14 |       16 |       20 |        6 |        7 |       0 |        7 |        9 |       14 |       17 |        6 |       10 |       2 |        3 |        4 |        6 |        4 |        3 |        3 |       0 |        8 |       11 |        9 |        6 |        5 |        3 |       1 |        2 |        1 |        1 |        1 |        0 |        1 |       0 |        2 |        3 |        1 |        2 |        1 |        0 |       0 |      0 |      3 |     19 |     11 |      4 |      3 |      2 |     96 |      0 |      0 |      2 |     23 |     25 |      3 |      2 |      3 |     78 |      0 |      0 |      0 |      9 |      2 |      3 |      0 |      0 |     52 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4767100 |     340 |    123 |    136 |    12 |    0 |     1 |    5 |    1 |     3 |    0 |     59 |    0 |    0 |    0 |    0 |    156 |    184 |      30 |      20 |       7 |       5 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      1 |      1 |        7 |       10 |        4 |       10 |        4 |        7 |       9 |        5 |        5 |        9 |       12 |       12 |       15 |      14 |        4 |       13 |       12 |       17 |       10 |        4 |       4 |       10 |       14 |       21 |       12 |        5 |        6 |       4 |        3 |        5 |        8 |        6 |        3 |        2 |       0 |        7 |       11 |        6 |        4 |        3 |        1 |       0 |        1 |        4 |        7 |        1 |        0 |        1 |       0 |        0 |        2 |        3 |        1 |        1 |        1 |       0 |      0 |      3 |     11 |      7 |      6 |      2 |      6 |     88 |      0 |      0 |      2 |     15 |     19 |      6 |      2 |      4 |     88 |      0 |      0 |      1 |     10 |      4 |      4 |      0 |      1 |     39 |      0 |      0 |      0 |      8 |      1 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4768000 |     348 |     89 |    208 |     5 |    0 |     3 |    2 |    0 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |    145 |    203 |       9 |       6 |       5 |       1 |      2 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        5 |        5 |       16 |       4 |        0 |        1 |        4 |        3 |        4 |       33 |      11 |        6 |        6 |       13 |       10 |       10 |       36 |       8 |        4 |        6 |       11 |       13 |       10 |       65 |      10 |        0 |        3 |        3 |        3 |        2 |        6 |       0 |        2 |        2 |        5 |        1 |        3 |       10 |       1 |        1 |        2 |        1 |        0 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        2 |        1 |       0 |      0 |      2 |     16 |      4 |      6 |      4 |      3 |     54 |      0 |      0 |      0 |     22 |     31 |     10 |     12 |     11 |    122 |      0 |      0 |      1 |      8 |      7 |      3 |      0 |      0 |     22 |      0 |      0 |      0 |      2 |      4 |      0 |      2 |      0 |      2 |      0 |     37 | s03      | R    |
| 4769000 |     111 |     33 |     65 |     0 |    0 |     0 |    1 |    0 |     1 |    0 |     11 |    0 |    0 |    0 |    0 |     50 |     61 |       1 |       2 |       1 |       0 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        5 |        2 |        4 |       1 |        0 |        0 |        2 |        4 |        5 |        7 |       2 |        0 |        1 |        3 |        3 |        7 |        8 |       7 |        2 |        1 |        3 |        5 |        2 |       12 |      11 |        1 |        0 |        0 |        0 |        1 |        3 |       1 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      7 |      2 |      0 |      1 |     19 |      0 |      0 |      0 |      4 |     10 |      6 |      4 |      5 |     36 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4769100 |     165 |     55 |     75 |     5 |    0 |     1 |    0 |    1 |     1 |    0 |     27 |    0 |    0 |    0 |    0 |     82 |     83 |       3 |      12 |       4 |       1 |      6 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      1 |        1 |        3 |        4 |        8 |        4 |        3 |       1 |        2 |        1 |        1 |       14 |        8 |        3 |       2 |        5 |        3 |        4 |        5 |       13 |        7 |       0 |        4 |        4 |        6 |        8 |        9 |        5 |       2 |        1 |        3 |        4 |        2 |        4 |        1 |       0 |        2 |        2 |        3 |        3 |        2 |        0 |       0 |        2 |        2 |        0 |        0 |        0 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     13 |      8 |      1 |      0 |     12 |     21 |      0 |      0 |      0 |     13 |     13 |      5 |      4 |     14 |     26 |      0 |      0 |      0 |      1 |      1 |      5 |      0 |      2 |     18 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      4 |      0 |     37 | s03      | R    |
| 4769200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4769300 |       8 |      0 |      5 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4769400 |       1 |      0 |      0 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4770100 |     254 |     85 |    125 |    10 |    0 |     3 |    4 |    1 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |    122 |    132 |      16 |      13 |       3 |       2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      0 |        4 |        3 |        8 |        7 |        3 |        5 |       6 |        2 |        6 |       12 |       10 |        3 |        8 |       8 |        4 |        9 |       17 |       12 |        7 |        9 |       5 |        6 |        7 |        8 |       15 |        7 |       10 |       9 |        1 |        5 |        1 |        4 |        0 |        0 |       0 |        4 |        4 |        4 |        2 |        1 |        0 |       0 |        0 |        4 |        2 |        3 |        3 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        1 |       0 |      0 |      1 |     14 |     12 |      7 |      2 |      3 |     46 |      0 |      0 |      1 |     12 |     17 |     10 |      6 |      3 |     76 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      1 |     12 |      0 |     37 | s03      | R    |
| 4770200 |     213 |     67 |     98 |     9 |    0 |     1 |    1 |    0 |     1 |    0 |     36 |    0 |    0 |    0 |    0 |     87 |    126 |       7 |       6 |       1 |       0 |      3 |      5 |      2 |      1 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        1 |        5 |        5 |        3 |        5 |       6 |        4 |        5 |        6 |        8 |        3 |        8 |       7 |        4 |        6 |        9 |       12 |        5 |        4 |       5 |        7 |        5 |       15 |        7 |        7 |        9 |       3 |        1 |        3 |        5 |        2 |        0 |        0 |       0 |        5 |        8 |        5 |        2 |        1 |        4 |       0 |        1 |        1 |        0 |        2 |        1 |        0 |       0 |        2 |        1 |        3 |        1 |        0 |        0 |       0 |      0 |      1 |      4 |      9 |      3 |      2 |      6 |     42 |      0 |      0 |      2 |     11 |     14 |      9 |      1 |      4 |     57 |      0 |      0 |      0 |      4 |      2 |      1 |      1 |      0 |     28 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4770800 |     343 |    116 |    134 |    12 |    0 |     3 |    2 |    5 |     2 |    0 |     69 |    0 |    0 |    0 |    0 |    153 |    190 |      14 |       5 |       4 |       4 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       4 |       3 |       1 |       0 |      0 |      6 |      0 |      0 |        6 |       13 |       11 |        4 |        9 |        7 |       0 |        7 |       27 |       10 |       10 |        9 |        3 |       0 |       10 |       22 |        9 |       11 |        6 |        4 |       1 |       10 |       15 |       14 |       14 |        9 |        9 |       0 |        6 |       10 |        8 |        2 |        2 |        2 |       0 |        6 |        7 |        5 |       10 |        4 |        7 |       0 |        2 |        3 |        3 |        1 |        0 |        1 |       0 |        2 |        5 |        3 |        1 |        2 |        0 |       1 |      0 |      0 |     23 |     12 |      1 |      1 |      3 |     76 |      0 |      0 |      0 |     21 |     16 |      2 |      3 |      1 |     91 |      0 |      0 |      4 |      9 |      4 |      0 |      0 |      1 |     51 |      0 |      0 |      3 |      2 |      1 |      2 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4771100 |     157 |     39 |     87 |     2 |    0 |     2 |    0 |    0 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |     78 |     79 |       4 |       8 |       3 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      2 |      2 |      0 |        3 |        2 |        1 |        1 |        8 |        4 |       2 |        1 |        2 |        0 |        5 |        5 |        4 |       1 |        4 |        5 |        8 |        2 |        8 |        9 |       3 |        4 |        7 |        7 |        4 |       11 |       11 |       4 |        3 |        3 |        2 |        6 |        2 |        1 |       0 |        1 |        2 |        2 |        3 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      1 |      6 |      5 |      4 |      2 |      3 |     18 |      0 |      0 |      0 |     11 |     13 |      5 |      6 |      4 |     48 |      0 |      0 |      0 |      3 |      6 |      2 |      0 |      0 |     16 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4771200 |     643 |    210 |    288 |    12 |    0 |     9 |    4 |    3 |     2 |    0 |    115 |    0 |    0 |    0 |    0 |    287 |    356 |      20 |      19 |      11 |       6 |      7 |     12 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       1 |       1 |      1 |      5 |      2 |      1 |        9 |       15 |       10 |       13 |        9 |       14 |       4 |       11 |       33 |       22 |       25 |       24 |       13 |       8 |       21 |       29 |       27 |       26 |       19 |       16 |       7 |       11 |       21 |       37 |       30 |       16 |       19 |       9 |       16 |       15 |        7 |        9 |        5 |        3 |       0 |       18 |       16 |        8 |        7 |        6 |        5 |       0 |        3 |        5 |        1 |        2 |        2 |        0 |       0 |        5 |        3 |        2 |        2 |        4 |        1 |       0 |      0 |      2 |     29 |     20 |      8 |      5 |      3 |    143 |      0 |      0 |      4 |     33 |     30 |     17 |      9 |     13 |    182 |      0 |      0 |      1 |     11 |      5 |      1 |      0 |      0 |     97 |      0 |      0 |      2 |      3 |      2 |      3 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4771300 |      34 |      7 |     21 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      5 |    0 |    0 |    0 |    0 |     21 |     13 |       3 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        2 |        0 |       0 |        1 |        2 |        3 |        6 |        0 |        1 |       0 |        2 |        1 |        3 |        2 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      3 |      0 |      0 |      0 |      2 |      2 |      1 |      2 |      5 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4772000 |     369 |    167 |    121 |    23 |    0 |     5 |    0 |    0 |     0 |    0 |     53 |    0 |    0 |    0 |    0 |    141 |    228 |      20 |      13 |       5 |       5 |      2 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        4 |        5 |        2 |        4 |        4 |       36 |       1 |        2 |        9 |        8 |        9 |        6 |       73 |       4 |        3 |        9 |        3 |        3 |        8 |       24 |       1 |        3 |        8 |        4 |        6 |       10 |       37 |       2 |        1 |        3 |        6 |        1 |        1 |        5 |       0 |        2 |        6 |        5 |        3 |        4 |       16 |       0 |        1 |        3 |        1 |        1 |        4 |        7 |       0 |        0 |        0 |        2 |        1 |        4 |        3 |       1 |      0 |      0 |     34 |     34 |      6 |      4 |      4 |     85 |      0 |      0 |      1 |     24 |     24 |      2 |      2 |      1 |     67 |      0 |      0 |      0 |     11 |      7 |      1 |      0 |      1 |     33 |      0 |      0 |      1 |     11 |      6 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4772100 |     171 |     47 |     83 |     9 |    0 |     0 |    0 |    3 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     70 |    101 |       5 |       5 |       5 |       0 |      1 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        6 |        3 |        4 |        2 |        1 |       2 |        1 |        8 |        6 |        5 |        2 |        6 |       1 |        4 |        7 |        8 |        8 |        5 |        2 |       1 |        6 |        9 |       11 |        8 |        9 |        5 |       0 |        1 |        3 |        3 |        1 |        1 |        0 |       0 |        3 |        5 |        3 |        3 |        3 |        3 |       0 |        3 |        2 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      7 |      2 |      0 |      2 |     31 |      0 |      0 |      1 |      9 |      9 |      2 |      3 |      3 |     56 |      0 |      0 |      0 |      9 |      2 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4773000 |     306 |    117 |    120 |    12 |    0 |     3 |    0 |    3 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    138 |    168 |      28 |       8 |       3 |       2 |      3 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       2 |       2 |       1 |      1 |      0 |      0 |      0 |        4 |        8 |        7 |       13 |        4 |        8 |       6 |        7 |        5 |       12 |       12 |        7 |       15 |       9 |        6 |        5 |       13 |       12 |        8 |        4 |       5 |        2 |       13 |       14 |       18 |        8 |        7 |       5 |        5 |        4 |        7 |        3 |        3 |        0 |       1 |        6 |        3 |        8 |        4 |        4 |        0 |       1 |        1 |        2 |        6 |        3 |        0 |        0 |       0 |        1 |        2 |        3 |        1 |        1 |        0 |       0 |      0 |      1 |     20 |     11 |      6 |      1 |      2 |     76 |      0 |      0 |      0 |     13 |     18 |      9 |      5 |      1 |     74 |      0 |      0 |      0 |     10 |      4 |      0 |      0 |      1 |     34 |      0 |      0 |      0 |      4 |      6 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4774000 |     339 |    103 |    161 |    10 |    0 |     3 |    2 |    4 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    140 |    199 |      10 |       8 |       5 |       2 |      5 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |        3 |        6 |        7 |       18 |       1 |        7 |        4 |        4 |        8 |        7 |       32 |       0 |        5 |        8 |        8 |        3 |        5 |       36 |       3 |        5 |        5 |        7 |        9 |       14 |       50 |       3 |        5 |        1 |        3 |        3 |        7 |        7 |       0 |        4 |        5 |        6 |        2 |        3 |        9 |       0 |        2 |        0 |        1 |        1 |        0 |        1 |       0 |        3 |        0 |        1 |        3 |        1 |        7 |       0 |      0 |      0 |     12 |     26 |      2 |      1 |      4 |     58 |      0 |      0 |      0 |     25 |     16 |      6 |      6 |      4 |    104 |      0 |      0 |      0 |      7 |      3 |      5 |      0 |      3 |     37 |      0 |      0 |      0 |      7 |      1 |      0 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 4774100 |      15 |      5 |      4 |     2 |    0 |     1 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      7 |      8 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       1 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4775000 |     374 |    118 |    192 |     7 |    0 |     5 |    2 |    1 |     1 |    0 |     48 |    0 |    0 |    0 |    0 |    166 |    208 |      16 |       8 |       5 |       1 |      3 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        4 |        4 |        7 |       10 |        8 |       10 |       1 |        1 |        6 |       12 |       23 |       14 |       15 |       3 |        8 |       11 |       15 |       19 |       22 |       18 |       0 |        8 |       14 |       18 |       22 |       20 |       16 |       1 |        3 |        7 |        8 |        3 |        3 |        1 |       0 |        5 |        4 |        4 |        5 |        3 |        2 |       0 |        2 |        0 |        0 |        0 |        1 |        0 |       1 |        2 |        2 |        2 |        5 |        0 |        1 |       0 |      0 |      1 |     16 |     17 |     11 |      5 |      6 |     62 |      0 |      0 |      0 |     25 |     30 |     10 |     17 |      8 |    102 |      0 |      0 |      0 |      4 |      6 |      3 |      3 |      0 |     32 |      0 |      0 |      1 |      1 |      3 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4775100 |     135 |     48 |     66 |     0 |    0 |     2 |    0 |    1 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     63 |     72 |       8 |       2 |       1 |       0 |      4 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        2 |        2 |        6 |        4 |        5 |       1 |        1 |        4 |        1 |        8 |        3 |        5 |       3 |        5 |        0 |       10 |        1 |        7 |        5 |       3 |        3 |        3 |        8 |        7 |        5 |        5 |       4 |        2 |        2 |        1 |        1 |        0 |        0 |       1 |        1 |        0 |        3 |        0 |        4 |        1 |       1 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      2 |      6 |      4 |      2 |      3 |     31 |      0 |      0 |      0 |     12 |     15 |      2 |      2 |      3 |     32 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |     37 | s03      | R    |
| 4775200 |     101 |     12 |     66 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     45 |     56 |       1 |       4 |       3 |       1 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        1 |        0 |       0 |        1 |        0 |        2 |        3 |        1 |        0 |       0 |        0 |        8 |        2 |        8 |        8 |        5 |       0 |        4 |        5 |        5 |       10 |        9 |        2 |       0 |        0 |        0 |        2 |        4 |        2 |        1 |       0 |        2 |        3 |        3 |        2 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      5 |     20 |      3 |      4 |      3 |     31 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4775300 |       8 |      2 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      4 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4775400 |      61 |     17 |     34 |     1 |    0 |     0 |    0 |    2 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     27 |     34 |       7 |       2 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        1 |        3 |       0 |        0 |        2 |        0 |        1 |        3 |        2 |       2 |        1 |        4 |        2 |        3 |        1 |        3 |       0 |        4 |        2 |        2 |        5 |        3 |        3 |       1 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      1 |      1 |      1 |      9 |      0 |      0 |      0 |      3 |      4 |      1 |      4 |      0 |     22 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4776000 |     696 |    196 |    337 |    19 |    0 |    13 |    3 |    4 |     0 |    0 |    124 |    0 |    0 |    0 |    0 |    337 |    359 |      34 |      11 |      11 |       8 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        9 |        8 |       10 |       23 |       11 |       16 |      17 |        5 |       16 |       19 |       17 |       21 |       15 |       9 |       32 |       19 |       38 |       21 |       21 |       12 |       8 |       17 |       20 |       51 |       39 |       26 |       14 |      19 |       13 |       11 |       20 |       11 |       13 |        2 |       0 |        9 |        8 |       17 |       15 |        5 |        0 |       0 |        3 |        6 |        6 |        4 |        1 |        2 |       0 |        1 |        2 |        8 |        4 |        1 |        1 |       0 |      0 |      1 |     17 |     22 |      9 |      5 |     11 |    131 |      0 |      0 |      3 |     33 |     68 |     17 |     16 |     14 |    186 |      0 |      0 |      1 |     25 |      9 |      6 |      4 |      4 |     75 |      0 |      0 |      0 |      9 |     15 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4776100 |     453 |    153 |    196 |     4 |    0 |     5 |    2 |    2 |     1 |    0 |     90 |    0 |    0 |    0 |    0 |    196 |    257 |      22 |      25 |      17 |       1 |      5 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |       2 |       5 |       1 |       0 |      0 |      5 |      0 |      0 |       11 |       11 |       13 |       11 |       10 |        4 |       3 |        5 |       15 |       16 |       25 |       13 |       12 |       4 |       10 |       17 |       29 |       15 |        8 |        2 |       4 |       17 |       21 |       26 |       29 |        6 |        8 |       4 |       12 |        3 |        9 |        9 |        3 |        6 |       1 |        9 |       14 |       14 |        5 |        1 |        3 |       1 |        1 |        1 |        0 |        2 |        0 |        1 |       0 |        0 |        4 |        1 |        1 |        2 |        1 |       0 |      0 |      2 |     19 |     19 |      3 |      4 |      1 |    105 |      0 |      0 |      1 |     32 |     29 |      3 |      1 |      4 |    126 |      0 |      0 |      1 |     16 |      6 |      1 |      4 |      1 |     61 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4777000 |     350 |    100 |    169 |     8 |    0 |     5 |    4 |    2 |     2 |    0 |     60 |    0 |    0 |    0 |    0 |    152 |    198 |      14 |      10 |       4 |       6 |      4 |      5 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      0 |      3 |      1 |      0 |        5 |        4 |        6 |       11 |        7 |        7 |       0 |        3 |        8 |       12 |       11 |       12 |       13 |       1 |       12 |       12 |       13 |       17 |        7 |        7 |       1 |       16 |       12 |       24 |       25 |       11 |       10 |       2 |        5 |        7 |       10 |        5 |        3 |        3 |       0 |        7 |        6 |        4 |        6 |        4 |        0 |       0 |        1 |        2 |        1 |        5 |        1 |        0 |       0 |        1 |        4 |        3 |        2 |        1 |        0 |       0 |      0 |      1 |      9 |     23 |      6 |      2 |      4 |     55 |      0 |      0 |      2 |     18 |     33 |      3 |      3 |      1 |    109 |      0 |      0 |      1 |     10 |      2 |      4 |      0 |      0 |     43 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4778000 |     311 |     84 |    146 |     7 |    0 |     1 |    2 |    3 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    120 |    191 |      10 |       3 |       4 |       1 |      6 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      1 |      0 |        1 |        3 |        4 |        7 |        5 |        8 |       0 |        2 |        7 |       13 |       15 |        8 |       11 |       0 |        7 |       12 |       10 |        8 |       14 |        8 |       0 |        6 |       15 |       17 |       17 |       12 |       19 |       1 |        4 |        7 |        6 |        4 |        0 |        4 |       0 |       10 |        9 |        6 |        6 |        5 |        6 |       0 |        1 |        4 |        2 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        3 |        1 |        0 |       0 |      0 |      0 |     13 |      9 |      3 |      5 |      3 |     51 |      0 |      0 |      1 |     19 |     16 |      6 |      9 |      1 |     94 |      0 |      0 |      0 |      5 |      4 |      0 |      1 |      4 |     53 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4779000 |     173 |     47 |     93 |     6 |    0 |     1 |    3 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     79 |     94 |       9 |      13 |       4 |       0 |      0 |      3 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        2 |        2 |        2 |        2 |        4 |        2 |       4 |        0 |        5 |        5 |        3 |        5 |        6 |       5 |        4 |        9 |        5 |        6 |        6 |        8 |       3 |        5 |        8 |        8 |        7 |        9 |       10 |       5 |        2 |        4 |        3 |        1 |        1 |        2 |       1 |        3 |        1 |        1 |        3 |        0 |        1 |       0 |        2 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |      1 |      5 |      2 |      1 |      5 |     33 |      0 |      0 |      0 |     11 |      9 |      9 |      7 |      5 |     52 |      0 |      0 |      0 |      2 |      4 |      3 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4780000 |     475 |    140 |    247 |    18 |    0 |     4 |    1 |    1 |     3 |    0 |     61 |    0 |    0 |    0 |    0 |    231 |    244 |      30 |      21 |       2 |       2 |      5 |     11 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        5 |        1 |       12 |       11 |        8 |       13 |      10 |        5 |        9 |       16 |       17 |        4 |       15 |      14 |       22 |       15 |       21 |       25 |       21 |       14 |       9 |       15 |       16 |       22 |       30 |       19 |        7 |      11 |        7 |        6 |        7 |        9 |        2 |        1 |       2 |        5 |        2 |        7 |        6 |        3 |        2 |       2 |        1 |        1 |        6 |        2 |        0 |        0 |       0 |        2 |        5 |        3 |        4 |        0 |        3 |       0 |      0 |      0 |     13 |     17 |      8 |      2 |     12 |     88 |      0 |      0 |      1 |     20 |     28 |      7 |     10 |     14 |    167 |      0 |      0 |      0 |      8 |      7 |      1 |      0 |      1 |     44 |      0 |      0 |      0 |      4 |      7 |      3 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4781000 |     282 |     92 |    143 |     8 |    0 |     6 |    0 |    2 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |    131 |    151 |       8 |      16 |       2 |       1 |     10 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |       4 |       0 |       0 |       0 |      1 |      3 |      1 |      1 |        2 |        4 |        7 |       17 |        1 |        2 |       2 |        4 |       13 |       15 |       12 |        5 |        6 |       2 |        8 |        6 |       20 |       14 |       10 |        6 |       2 |       17 |       11 |       22 |       17 |        4 |        3 |       3 |        4 |        5 |        3 |        1 |        3 |        2 |       0 |        0 |        4 |        4 |        5 |        0 |        0 |       0 |        1 |        4 |        2 |        1 |        3 |        1 |       0 |        0 |        1 |        1 |        0 |        2 |        0 |       0 |      0 |      1 |     17 |     13 |      0 |      0 |      0 |     61 |      0 |      0 |      2 |     30 |     13 |      1 |      1 |      0 |     96 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      0 |      7 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4790000 |     555 |    206 |    228 |    12 |    0 |     2 |    8 |    2 |     3 |    0 |     94 |    0 |    0 |    0 |    0 |    217 |    338 |      26 |      16 |      12 |       2 |      5 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |       0 |       1 |       0 |       0 |      7 |      5 |      1 |      0 |        6 |       14 |       10 |       15 |        8 |       16 |       2 |       20 |       24 |       25 |       20 |       15 |       30 |       1 |       10 |       24 |       17 |       16 |        9 |       16 |       1 |       22 |       22 |       26 |       25 |       11 |       27 |       2 |        7 |        8 |       10 |        6 |        4 |        0 |       0 |       10 |       22 |       11 |        9 |        3 |        4 |       0 |        6 |        5 |        4 |        3 |        0 |        0 |       0 |        3 |        1 |        4 |        1 |        0 |        0 |       0 |      0 |      1 |     29 |     20 |      7 |      2 |      1 |    146 |      0 |      0 |      0 |     23 |     22 |      9 |      8 |      5 |    161 |      0 |      0 |      0 |     18 |      3 |      1 |      0 |      2 |     70 |      0 |      0 |      0 |      6 |      0 |      1 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4790100 |     513 |    151 |    216 |    19 |    0 |     4 |    1 |    5 |     2 |    0 |    115 |    0 |    0 |    0 |    0 |    247 |    266 |      28 |      23 |      13 |       6 |      2 |      8 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      0 |       11 |       17 |       14 |       19 |        7 |        5 |       0 |       12 |       24 |       15 |       12 |       10 |        4 |       1 |       13 |       31 |       25 |       25 |        5 |        3 |       0 |       25 |       34 |       26 |       17 |        9 |        2 |       1 |       12 |       22 |       12 |        8 |        3 |        0 |       0 |       18 |       20 |       11 |        6 |        3 |        0 |       0 |        4 |        3 |        4 |        2 |        0 |        2 |       0 |        4 |        6 |        3 |        1 |        2 |        0 |       0 |      0 |      0 |     21 |     20 |      4 |      0 |      2 |    104 |      0 |      0 |      0 |     22 |     16 |      3 |      0 |      1 |    174 |      0 |      0 |      1 |     16 |      8 |      1 |      0 |      0 |     89 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 4790200 |     516 |    200 |    210 |    10 |    0 |     5 |    6 |    2 |     1 |    0 |     82 |    0 |    0 |    0 |    0 |    216 |    300 |      23 |      13 |       5 |       2 |      6 |      9 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      0 |        5 |        9 |        5 |       11 |        8 |       26 |       3 |        8 |       18 |       11 |       25 |       23 |       47 |       1 |        7 |       20 |        9 |       13 |       16 |       40 |       1 |        4 |       14 |       10 |       14 |       18 |       38 |       6 |        2 |       11 |        6 |        6 |        5 |        4 |       1 |       10 |        9 |        9 |        9 |        3 |        7 |       0 |        1 |        2 |        2 |        0 |        0 |        3 |       0 |        3 |        4 |        0 |        0 |        2 |        7 |       0 |      0 |      1 |     23 |     30 |     11 |      4 |      5 |    126 |      0 |      0 |      1 |     28 |     25 |      4 |      6 |     10 |    136 |      0 |      0 |      2 |     11 |     11 |      0 |      0 |      2 |     56 |      0 |      0 |      0 |      4 |      6 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4790300 |     504 |    169 |    247 |    12 |    0 |     0 |    4 |    2 |     1 |    0 |     69 |    0 |    0 |    0 |    0 |    228 |    276 |      24 |      11 |       7 |       1 |      4 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        3 |       10 |       13 |       18 |        8 |        7 |       8 |       11 |       12 |       19 |       22 |       15 |       18 |       5 |       16 |       17 |       29 |       28 |       11 |       14 |       4 |        7 |       21 |       32 |       34 |       19 |       12 |       3 |        2 |        5 |       13 |        7 |        1 |        2 |       0 |        6 |        9 |       10 |        6 |        4 |        4 |       0 |        3 |        5 |        3 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        3 |        1 |        0 |       0 |      0 |      1 |     23 |     20 |      9 |      8 |      4 |    104 |      0 |      0 |      3 |     27 |     27 |     12 |      7 |     12 |    159 |      0 |      0 |      1 |      9 |     12 |      4 |      4 |      1 |     38 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4790400 |       2 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4790500 |     826 |    239 |    433 |    16 |    0 |     7 |    0 |    2 |     2 |    0 |    127 |    0 |    0 |    0 |    0 |    403 |    423 |      17 |      12 |       8 |       5 |      7 |     31 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      0 |      2 |      1 |      0 |       10 |       15 |       24 |       20 |        9 |       15 |      17 |        9 |       12 |       25 |       23 |       17 |       22 |      21 |       18 |       20 |       60 |       51 |       28 |       28 |      11 |       20 |       18 |       60 |       43 |       21 |       32 |      23 |       10 |        6 |       27 |       12 |        5 |        3 |       2 |       12 |        9 |       22 |       11 |        4 |        3 |       1 |        2 |        0 |        2 |        3 |        4 |        1 |       0 |        2 |        2 |        4 |        3 |        4 |        0 |       0 |      0 |      1 |     22 |     36 |      7 |      3 |     19 |    151 |      0 |      0 |      4 |     41 |     88 |     23 |     15 |     26 |    236 |      0 |      0 |      2 |     22 |     13 |     11 |      4 |      1 |     74 |      0 |      0 |      2 |      2 |      8 |      4 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4790600 |      28 |     14 |     11 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     12 |     16 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        0 |        1 |        1 |       1 |        1 |        1 |        0 |        1 |        1 |        1 |       2 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4790900 |     279 |     85 |    125 |    13 |    0 |     4 |    5 |    2 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |    109 |    170 |       7 |      10 |       6 |       5 |      3 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        0 |        3 |        1 |        8 |        1 |        6 |       1 |        5 |       10 |       18 |       10 |        5 |       14 |       3 |        7 |        9 |       16 |       12 |        5 |        4 |       4 |        6 |       16 |       13 |        6 |        7 |       20 |       0 |        2 |        8 |        4 |        4 |        0 |        2 |       0 |        4 |        8 |        4 |        2 |        2 |        4 |       0 |        2 |        3 |        3 |        3 |        0 |        1 |       0 |        2 |        3 |        5 |        1 |        1 |        1 |       0 |      0 |      1 |     10 |     10 |      3 |      1 |      0 |     60 |      0 |      0 |      3 |     16 |      9 |      5 |      3 |      3 |     86 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     37 |      0 |      0 |      2 |      2 |      3 |      0 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 4791000 |     649 |    231 |    255 |    26 |    0 |     5 |    5 |    2 |     5 |    0 |    120 |    0 |    0 |    0 |    0 |    264 |    385 |      35 |      24 |      10 |       4 |      9 |     11 |      4 |      2 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |       0 |       1 |       1 |       0 |      1 |      1 |      1 |      0 |       10 |        8 |       10 |       28 |       11 |       13 |       3 |       20 |       18 |       26 |       23 |       14 |       41 |       6 |       13 |       19 |       23 |       22 |       13 |       12 |       3 |       12 |       32 |       31 |       26 |       17 |       28 |       4 |       11 |       13 |       11 |        5 |        6 |        8 |       2 |        7 |       19 |       20 |        9 |        2 |        7 |       0 |        2 |        7 |        2 |        5 |        3 |        1 |       0 |        4 |        3 |        6 |        5 |        2 |        3 |       0 |      0 |      2 |     35 |     33 |      4 |      2 |      8 |    147 |      0 |      0 |      2 |     37 |     34 |      8 |      9 |      3 |    162 |      0 |      0 |      0 |     18 |     11 |      1 |      1 |      1 |     88 |      0 |      0 |      3 |      5 |      6 |      2 |      1 |      0 |     26 |      0 |     37 | s03      | R    |
| 4791100 |     327 |    106 |    143 |     8 |    0 |     3 |    6 |    1 |     0 |    0 |     60 |    0 |    0 |    0 |    0 |    153 |    174 |      19 |       7 |       7 |       1 |      5 |      5 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        4 |        7 |       10 |       11 |        4 |        5 |       4 |        6 |       10 |       14 |       13 |        8 |        8 |       2 |        2 |       18 |       11 |       19 |       11 |        7 |       3 |        6 |       17 |       16 |       15 |        7 |        7 |       4 |        3 |        8 |        6 |        7 |        2 |        1 |       0 |        7 |        7 |        7 |       10 |        2 |        0 |       0 |        2 |        2 |        2 |        4 |        0 |        0 |       0 |        1 |        1 |        3 |        3 |        0 |        0 |       0 |      0 |      3 |     11 |      8 |      5 |      1 |      2 |     76 |      0 |      0 |      1 |     20 |     27 |      1 |      4 |      5 |     85 |      0 |      0 |      3 |     10 |      1 |      1 |      3 |      1 |     41 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 4791200 |     242 |     68 |    126 |     3 |    0 |     2 |    1 |    0 |     1 |    0 |     41 |    0 |    0 |    0 |    0 |    111 |    131 |       7 |      11 |       4 |       2 |      4 |     10 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        5 |        6 |        7 |        9 |       2 |        2 |        3 |        6 |        5 |        4 |       13 |       5 |        5 |        4 |       12 |        9 |       10 |        9 |       7 |        8 |        5 |       11 |       20 |        9 |        5 |      12 |        1 |        7 |        2 |       10 |        0 |        0 |       0 |        6 |        0 |        5 |        7 |        2 |        1 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |     10 |      2 |      0 |      3 |     47 |      0 |      0 |      2 |     10 |     12 |      8 |      6 |      7 |     81 |      0 |      0 |      1 |      4 |      2 |      5 |      0 |      1 |     28 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4791300 |     240 |     86 |    109 |     4 |    0 |     1 |    1 |    1 |     1 |    0 |     37 |    0 |    0 |    0 |    0 |    109 |    131 |      11 |       7 |       4 |       0 |      6 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        6 |        3 |        8 |        2 |      10 |        0 |        3 |       13 |       13 |        5 |       10 |       9 |        2 |        7 |       17 |        9 |        6 |        8 |       5 |        5 |        8 |       21 |        5 |        5 |        7 |       4 |        3 |        4 |        3 |        5 |        0 |        1 |       1 |        7 |        4 |        4 |        2 |        2 |        1 |       0 |        1 |        1 |        0 |        1 |        0 |        2 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      2 |      7 |     11 |      6 |      1 |      2 |     57 |      0 |      0 |      2 |     14 |     27 |      7 |      5 |      3 |     51 |      0 |      0 |      0 |      6 |      4 |      2 |      1 |      1 |     23 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4791500 |     234 |     84 |    109 |     5 |    0 |     5 |    1 |    0 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     89 |    145 |       3 |       2 |       2 |       1 |      8 |     12 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        8 |       16 |       3 |        0 |        0 |        0 |        5 |       12 |       37 |       2 |        1 |        0 |        2 |        7 |        9 |       25 |       1 |        0 |        1 |        1 |        6 |       19 |       35 |       2 |        0 |        1 |        1 |        1 |        2 |        7 |       0 |        0 |        0 |        0 |        2 |        5 |       10 |       1 |        0 |        0 |        0 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        2 |        1 |        4 |       0 |      0 |      0 |     10 |     16 |      3 |      3 |      2 |     50 |      0 |      0 |      0 |     15 |     11 |      3 |      2 |      4 |     74 |      0 |      0 |      0 |      7 |      4 |      2 |      1 |      1 |     15 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4791600 |     244 |     78 |    123 |     3 |    0 |     0 |    3 |    0 |     2 |    0 |     35 |    0 |    0 |    0 |    0 |     98 |    146 |       7 |       7 |       4 |       1 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        5 |        7 |        4 |        4 |       5 |        3 |        4 |       11 |        8 |        9 |       10 |       5 |        3 |       10 |        7 |       17 |        7 |        5 |       5 |        7 |       11 |       12 |       12 |       11 |       12 |       4 |        4 |        2 |        3 |        1 |        1 |        0 |       0 |        5 |        4 |        5 |        7 |        1 |        2 |       0 |        0 |        3 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      2 |      6 |     12 |      4 |      2 |      2 |     50 |      0 |      0 |      1 |     19 |     12 |      6 |      1 |      4 |     80 |      0 |      0 |      1 |      8 |      0 |      3 |      0 |      0 |     23 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4791700 |     437 |    148 |    223 |    13 |    0 |     4 |    2 |    2 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    197 |    240 |      20 |      13 |       9 |       0 |      6 |      9 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        2 |       15 |        6 |       10 |       10 |       10 |       6 |       12 |       17 |       13 |       18 |        8 |        9 |      12 |       14 |       16 |       32 |       17 |       13 |        9 |       4 |       12 |       25 |       25 |       27 |       10 |       17 |       2 |        5 |        8 |        5 |        4 |        1 |        0 |       0 |        4 |        7 |        5 |        0 |        3 |        3 |       0 |        2 |        0 |        2 |        2 |        3 |        1 |       0 |        2 |        2 |        3 |        2 |        1 |        1 |       0 |      0 |      1 |     12 |     16 |      4 |      3 |      4 |    108 |      0 |      0 |      2 |     19 |     33 |      6 |      8 |     13 |    142 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      0 |     36 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      2 |     14 |      0 |     37 | s03      | R    |
| 4792000 |     611 |    189 |    313 |    13 |    0 |     9 |    2 |    2 |     1 |    0 |     82 |    0 |    0 |    0 |    0 |    277 |    334 |      20 |      15 |       7 |       2 |     11 |     16 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      0 |        8 |        0 |        7 |       17 |       16 |       20 |       9 |        8 |        6 |       10 |       24 |       25 |       32 |       7 |        7 |        8 |       25 |       24 |       27 |       38 |      12 |       20 |       14 |       38 |       24 |       25 |       27 |      24 |        6 |        4 |       12 |        9 |        2 |        9 |       1 |        9 |        6 |        3 |        7 |        7 |        7 |       0 |        2 |        2 |        3 |        4 |        2 |        3 |       0 |        0 |        1 |        8 |        0 |        2 |        0 |       0 |      0 |      0 |     23 |     20 |     13 |      9 |      8 |    116 |      0 |      0 |      2 |     33 |     50 |     18 |      6 |     11 |    193 |      0 |      0 |      0 |     18 |     10 |      6 |      4 |      1 |     43 |      0 |      0 |      0 |      8 |      3 |      3 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4792100 |      89 |     28 |     43 |     4 |    0 |     1 |    1 |    1 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     43 |     46 |       5 |       3 |       2 |       0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        0 |        2 |        1 |        3 |        4 |       0 |        0 |        1 |        2 |        7 |        3 |        1 |       0 |        1 |        0 |        4 |        6 |        4 |        2 |       2 |        3 |        3 |        3 |        4 |        4 |        5 |       2 |        2 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        2 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        2 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |      2 |      3 |      2 |      3 |      2 |     15 |      0 |      0 |      0 |      1 |      9 |      3 |      3 |      1 |     26 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4792300 |      64 |     30 |     19 |     0 |    0 |     1 |    1 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     28 |     36 |       5 |       2 |       2 |       0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        3 |        0 |        3 |        1 |        0 |       6 |        4 |        2 |        3 |        1 |        1 |        1 |       3 |        1 |        3 |        2 |        2 |        0 |        0 |       0 |        2 |        2 |        1 |        1 |        1 |        2 |       2 |        1 |        0 |        1 |        2 |        1 |        0 |       0 |        1 |        1 |        4 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     28 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |     14 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4792400 |      47 |      8 |     24 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     24 |     23 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        4 |        3 |        2 |        1 |       1 |        1 |        1 |        2 |        4 |        0 |        2 |       1 |        2 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        2 |        4 |        0 |        1 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      7 |      3 |      1 |      2 |      1 |     10 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4792500 |       9 |      5 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       2 |        0 |        1 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4792600 |       4 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4792700 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4792800 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4792900 |     464 |    147 |    205 |    17 |    0 |     3 |    5 |    3 |     5 |    0 |     79 |    0 |    0 |    0 |    0 |    207 |    257 |      14 |      16 |      11 |       4 |      4 |     10 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      5 |      1 |      0 |       12 |        6 |       13 |       10 |       10 |       14 |       0 |        8 |        6 |       16 |       13 |       16 |       21 |       2 |       12 |       14 |       16 |       16 |       18 |       13 |       3 |       18 |       16 |       17 |       20 |       14 |       22 |       6 |        6 |        8 |        6 |        5 |        4 |        5 |       0 |       16 |        4 |        3 |        4 |       10 |        8 |       0 |        2 |        7 |        1 |        2 |        2 |        2 |       0 |        3 |        5 |        2 |        1 |        3 |        3 |       0 |      0 |      2 |     20 |     10 |      4 |      4 |      7 |    100 |      0 |      0 |      0 |     19 |     14 |      9 |      1 |      5 |    157 |      0 |      0 |      1 |      9 |      6 |      1 |      2 |      2 |     58 |      0 |      0 |      1 |      6 |      2 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 4793000 |     214 |     73 |     90 |     1 |    0 |     1 |    3 |    3 |     1 |    0 |     42 |    0 |    0 |    0 |    0 |     97 |    117 |       7 |       1 |       3 |       1 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        1 |        4 |        7 |        2 |        6 |       6 |        1 |        2 |        8 |        6 |       10 |       15 |       3 |        2 |        5 |        8 |        4 |       12 |        4 |       6 |        1 |        5 |        6 |       10 |        7 |       17 |       3 |        3 |        1 |        3 |        7 |        2 |        5 |       1 |        2 |        4 |        2 |        2 |        4 |        6 |       0 |        0 |        3 |        2 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |      5 |     10 |      5 |      2 |      2 |     49 |      0 |      0 |      2 |     11 |     12 |      3 |      3 |      4 |     55 |      0 |      0 |      2 |      7 |      3 |      3 |      3 |      0 |     24 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4793100 |      45 |     25 |     16 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |     21 |     24 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        4 |        1 |        1 |       1 |        2 |        0 |        1 |        5 |        3 |        2 |       4 |        1 |        1 |        2 |        4 |        1 |        2 |       0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      2 |      0 |      5 |     15 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      2 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4793200 |      54 |     14 |     31 |     0 |    0 |     2 |    0 |    0 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |     28 |     26 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        3 |       1 |        0 |        1 |        0 |        2 |        0 |        3 |       2 |        1 |        2 |        2 |        4 |        3 |        3 |       2 |        1 |        1 |        1 |        7 |        2 |        0 |       2 |        2 |        0 |        0 |        0 |        2 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4793500 |     587 |    170 |    276 |    21 |    0 |     6 |    2 |    5 |     4 |    0 |    103 |    0 |    0 |    0 |    0 |    267 |    320 |       6 |       5 |       6 |       0 |     14 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        2 |       12 |       22 |       14 |       12 |      12 |        5 |        7 |       17 |       28 |       17 |       12 |       9 |       12 |       16 |       25 |       34 |       22 |       13 |       3 |       20 |       17 |       28 |       37 |       25 |       20 |       4 |        6 |        8 |       13 |       13 |        6 |        1 |       1 |        9 |        7 |       19 |        9 |        8 |        3 |       0 |        6 |        5 |        4 |        2 |        1 |        1 |       0 |        2 |        5 |        5 |        2 |        3 |        2 |       0 |      0 |      1 |     13 |     27 |     18 |     10 |      4 |     97 |      0 |      0 |      4 |     29 |     45 |     16 |     12 |     10 |    160 |      0 |      0 |      0 |     15 |      5 |      6 |      5 |      4 |     68 |      0 |      0 |      0 |      6 |     10 |      1 |      1 |      0 |     20 |      0 |     37 | s03      | R    |
| 4793900 |     128 |     35 |     65 |     6 |    0 |     2 |    0 |    2 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     56 |     72 |       9 |       9 |       4 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        2 |        2 |        2 |        2 |        2 |       1 |        2 |        4 |        4 |        4 |        3 |        7 |       0 |        3 |        1 |        7 |        8 |        6 |        5 |       0 |        1 |        5 |        6 |        9 |        5 |        5 |       4 |        2 |        3 |        2 |        2 |        0 |        1 |       0 |        1 |        2 |        3 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        3 |       0 |        0 |        0 |        2 |        1 |        1 |        1 |       0 |      0 |      1 |     10 |      3 |      3 |      0 |      0 |     18 |      0 |      0 |      1 |      5 |     14 |      2 |      0 |      0 |     43 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4794000 |     110 |     31 |     65 |     2 |    0 |     0 |    1 |    0 |     1 |    0 |     10 |    0 |    0 |    0 |    0 |     51 |     59 |       2 |       3 |       1 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        3 |        3 |        1 |        3 |       1 |        1 |        3 |        7 |        2 |        1 |        2 |       2 |        2 |        1 |        2 |        5 |        7 |        7 |       4 |        1 |        3 |        7 |       10 |        5 |        8 |       3 |        2 |        0 |        1 |        0 |        2 |        1 |       0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      7 |      2 |      0 |      1 |     20 |      0 |      0 |      0 |      7 |      8 |      0 |      4 |      2 |     44 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4794100 |     149 |     58 |     68 |     2 |    0 |     2 |    2 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     61 |     88 |       8 |       0 |       1 |       0 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        6 |        4 |        4 |        6 |       0 |        2 |        1 |        6 |        7 |        7 |       12 |       1 |        0 |        1 |        7 |        6 |        5 |        7 |       2 |        1 |        3 |        8 |        4 |        4 |       15 |       5 |        0 |        2 |        3 |        0 |        1 |        1 |       0 |        0 |        0 |        2 |        5 |        2 |        1 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |      0 |      2 |      8 |      5 |      6 |      1 |      2 |     34 |      0 |      0 |      0 |     10 |      6 |      6 |      1 |      7 |     38 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4794200 |     252 |     77 |    131 |     7 |    0 |     4 |    0 |    1 |     1 |    0 |     31 |    0 |    0 |    0 |    0 |    110 |    142 |      14 |      10 |       4 |       0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        8 |        4 |        2 |        7 |       2 |        4 |        5 |        5 |        8 |       11 |       14 |       2 |        2 |        5 |       13 |       12 |       12 |       13 |       2 |        7 |       10 |        9 |       16 |       17 |       11 |       2 |        2 |        2 |        2 |        4 |        3 |        3 |       0 |        0 |        0 |        4 |        4 |        5 |        2 |       0 |        0 |        1 |        1 |        3 |        0 |        2 |       0 |        0 |        0 |        3 |        2 |        1 |        0 |       0 |      0 |      0 |      9 |      8 |      8 |      0 |      4 |     48 |      0 |      0 |      1 |     15 |     16 |      7 |      0 |      3 |     89 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     27 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4812000 |     392 |    158 |    166 |     5 |    0 |     9 |    4 |    0 |     4 |    0 |     46 |    0 |    0 |    0 |    0 |    195 |    197 |      23 |       9 |       4 |       1 |     18 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       3 |       1 |       1 |      0 |      2 |      0 |      0 |        7 |        4 |       14 |        9 |        3 |       16 |      15 |        5 |        8 |       13 |       23 |        9 |       17 |      15 |        1 |        8 |       19 |       14 |        5 |       28 |      14 |        2 |        2 |       14 |        8 |       12 |       24 |      15 |        2 |        2 |        4 |        6 |        7 |        2 |       2 |        2 |        2 |        3 |        6 |        4 |        3 |       1 |        3 |        1 |        6 |        0 |        2 |        1 |       0 |        3 |        1 |        2 |        3 |        0 |        0 |       0 |      0 |      1 |     19 |     17 |     12 |      3 |      5 |    101 |      0 |      0 |      0 |      7 |     21 |     17 |      4 |      9 |    108 |      0 |      0 |      0 |      4 |      8 |      7 |      1 |      3 |     23 |      0 |      0 |      0 |      3 |      7 |      1 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 4814000 |     388 |    134 |    181 |     9 |    0 |     3 |    1 |    0 |     5 |    0 |     55 |    0 |    0 |    0 |    0 |    179 |    209 |      22 |      15 |       3 |       2 |     11 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       3 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        4 |        7 |       15 |        6 |        7 |       6 |        9 |        7 |       13 |       16 |        7 |       17 |      14 |        3 |       10 |       14 |       19 |        6 |       21 |      12 |        9 |       10 |       18 |       14 |        8 |       19 |      18 |        5 |        6 |        3 |        5 |        2 |        5 |       6 |        3 |        4 |        1 |        5 |        5 |        4 |       1 |        4 |        1 |        1 |        2 |        1 |        2 |       0 |        4 |        0 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |     21 |      8 |      7 |      3 |      5 |     90 |      0 |      0 |      1 |     12 |     23 |     13 |      6 |      3 |    123 |      0 |      0 |      0 |      8 |      5 |      2 |      1 |      1 |     38 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4815000 |      81 |     39 |     27 |     1 |    0 |     1 |    0 |    1 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     37 |     44 |       8 |       2 |       0 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        3 |        5 |        2 |        3 |       1 |        3 |        2 |        3 |        6 |        2 |        1 |       5 |        1 |        2 |        2 |        2 |        2 |        3 |       0 |        2 |        1 |        3 |        2 |        2 |        4 |       1 |        0 |        0 |        1 |        2 |        2 |        1 |       0 |        0 |        1 |        0 |        3 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      8 |      1 |      2 |      1 |     25 |      0 |      0 |      1 |      2 |      1 |      3 |      2 |      0 |     18 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4817000 |     501 |    180 |    213 |    13 |    0 |    13 |    1 |    2 |     1 |    0 |     78 |    0 |    0 |    0 |    0 |    227 |    274 |      22 |       5 |       5 |       3 |      5 |      7 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |      4 |      1 |      1 |      0 |       0 |       0 |       1 |       0 |      1 |      2 |      0 |      0 |        4 |        8 |       11 |       11 |       10 |       10 |      16 |        2 |       12 |       22 |       31 |       10 |       16 |      17 |        5 |       10 |       26 |       19 |       11 |       22 |       9 |        8 |       15 |       17 |       18 |       11 |       22 |      20 |        5 |        5 |       15 |        3 |        2 |        8 |       2 |        5 |       12 |        8 |        5 |        1 |        4 |       3 |        1 |        0 |        6 |        4 |        2 |        2 |       0 |        1 |        0 |        5 |        3 |        4 |        2 |       0 |      0 |      0 |     21 |     30 |     11 |      7 |      4 |    107 |      0 |      0 |      1 |     16 |     39 |     13 |      4 |      8 |    132 |      0 |      0 |      2 |     15 |      5 |      2 |      1 |      0 |     53 |      0 |      0 |      0 |      7 |     14 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 4818000 |     129 |     42 |     55 |     4 |    0 |     0 |    1 |    1 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     57 |     72 |       1 |       5 |       3 |       1 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        3 |        3 |        4 |        1 |       1 |        8 |        3 |        3 |        6 |        2 |        5 |       0 |        5 |        8 |       10 |        4 |        1 |        0 |       0 |        2 |        4 |        9 |        4 |        4 |        1 |       3 |        3 |        5 |        2 |        3 |        0 |        0 |       0 |        3 |        2 |        4 |        3 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      9 |      4 |      1 |      1 |      1 |     26 |      0 |      0 |      0 |      3 |      5 |      3 |      2 |      2 |     40 |      0 |      0 |      1 |      5 |      3 |      0 |      0 |      1 |     16 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4819000 |     395 |    135 |    174 |     7 |    0 |     3 |    4 |    0 |     5 |    0 |     67 |    0 |    0 |    0 |    0 |    166 |    229 |      11 |       7 |       8 |       0 |      4 |      7 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      3 |      0 |        4 |        4 |        7 |       12 |        8 |        8 |      10 |        4 |       11 |       16 |       15 |        7 |       15 |      14 |        4 |       14 |       22 |       14 |        9 |       10 |       6 |       10 |        7 |       15 |       26 |       12 |       15 |      10 |        1 |        3 |        7 |        6 |        3 |        3 |       1 |        7 |       11 |        7 |        9 |        5 |        2 |       2 |        1 |        1 |        3 |        4 |        0 |        1 |       0 |        3 |        0 |        2 |        1 |        1 |        2 |       0 |      0 |      1 |     15 |     10 |     12 |      2 |      4 |     91 |      0 |      0 |      3 |     21 |     24 |      8 |     11 |      4 |    103 |      0 |      0 |      0 |     10 |     11 |      1 |      3 |      0 |     42 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 4820000 |     443 |    146 |    189 |    10 |    0 |    12 |    2 |    1 |     1 |    0 |     82 |    0 |    0 |    0 |    0 |    214 |    229 |      20 |      11 |       5 |       5 |      1 |      7 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      5 |      0 |      0 |      0 |        5 |       11 |       14 |       14 |        3 |        7 |       9 |        7 |       12 |       17 |       18 |        7 |       11 |      11 |        6 |       17 |       28 |       17 |        9 |        9 |       8 |        3 |       23 |       23 |       13 |        7 |       11 |      15 |        5 |        5 |       15 |        9 |        3 |        4 |       0 |        9 |        7 |        8 |        8 |        4 |        5 |       0 |        2 |        4 |        4 |        4 |        1 |        1 |       0 |        2 |        2 |        1 |        3 |        1 |        1 |       0 |      0 |      0 |     20 |     21 |      3 |      4 |      7 |     91 |      0 |      0 |      0 |     15 |     21 |      7 |     10 |      8 |    128 |      0 |      0 |      0 |     13 |     10 |      5 |      1 |      1 |     52 |      0 |      0 |      0 |      2 |      7 |      2 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 4821000 |     364 |    109 |    189 |     3 |    0 |     5 |    5 |    0 |     6 |    0 |     47 |    0 |    0 |    0 |    0 |    163 |    201 |       9 |       4 |       3 |       1 |     10 |      4 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |        2 |        6 |        9 |        6 |        8 |      13 |        1 |        3 |        8 |       11 |       17 |       15 |      10 |        6 |        7 |       16 |       14 |       11 |       23 |      12 |        5 |       10 |       11 |       15 |        9 |       32 |      18 |        2 |        1 |        3 |        7 |        3 |        6 |       0 |        5 |        3 |        4 |        9 |        0 |        4 |       0 |        1 |        1 |        3 |        2 |        0 |        1 |       0 |        1 |        1 |        3 |        2 |        0 |        3 |       1 |      0 |      0 |     15 |     13 |      5 |      6 |      3 |     67 |      0 |      0 |      1 |     17 |     25 |      6 |     12 |      8 |    120 |      0 |      0 |      1 |      4 |      7 |      4 |      3 |      4 |     24 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4822000 |     363 |    135 |    185 |     5 |    0 |     1 |    2 |    2 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |    158 |    205 |      16 |       3 |       0 |       2 |      5 |     10 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        3 |        3 |        6 |       13 |        5 |        6 |      13 |        5 |        6 |       11 |       20 |        9 |       17 |      18 |        4 |        8 |       13 |       14 |        6 |       23 |      19 |        8 |        4 |       14 |       16 |        8 |       22 |      26 |        1 |        3 |        7 |        5 |        0 |        0 |       1 |        4 |        2 |        5 |        4 |        1 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     17 |     17 |      8 |      3 |      4 |     86 |      0 |      0 |      0 |     12 |     22 |      4 |      4 |     13 |    130 |      0 |      0 |      0 |      8 |      4 |      2 |      1 |      0 |     18 |      0 |      0 |      1 |      2 |      2 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4823000 |     341 |    106 |    176 |     1 |    0 |     7 |    2 |    1 |     2 |    0 |     46 |    0 |    0 |    0 |    0 |    148 |    193 |       9 |       8 |       4 |       1 |      3 |      7 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        8 |        6 |        5 |        6 |        5 |       7 |        2 |        9 |       11 |       10 |       12 |       10 |      11 |        6 |        9 |       19 |       13 |       11 |       10 |      13 |        6 |       12 |       18 |       15 |       11 |       15 |      18 |        1 |        7 |        5 |        4 |        2 |        0 |       0 |        3 |        9 |        4 |        6 |        2 |        1 |       2 |        1 |        0 |        1 |        2 |        1 |        2 |       0 |        1 |        0 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |     15 |     11 |      6 |      4 |      4 |     66 |      0 |      0 |      0 |     24 |     21 |     13 |      5 |      7 |    106 |      0 |      0 |      0 |      5 |      3 |      0 |      3 |      3 |     32 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4824000 |     355 |    130 |    134 |    10 |    0 |     3 |    5 |    0 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    123 |    232 |      16 |       9 |       1 |       2 |      4 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |        6 |        6 |        8 |        6 |        4 |       0 |       11 |       16 |       15 |       18 |       13 |       20 |       1 |        5 |       11 |        8 |        5 |        5 |        9 |       2 |        3 |       11 |       13 |        9 |       18 |       30 |       5 |        2 |        9 |        8 |        5 |        2 |        5 |       0 |        6 |        9 |       10 |        7 |        4 |        4 |       0 |        2 |        1 |        4 |        2 |        0 |        2 |       0 |        2 |        3 |        1 |        1 |        2 |        0 |       0 |      0 |      0 |     13 |     18 |      4 |      1 |      4 |     90 |      0 |      0 |      2 |     15 |     16 |      9 |      3 |      1 |     88 |      0 |      0 |      0 |     13 |      6 |      2 |      1 |      1 |     48 |      0 |      0 |      0 |      7 |      4 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 4824100 |     140 |     48 |     61 |     2 |    0 |     2 |    0 |    1 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     65 |     75 |       2 |       2 |       0 |       1 |      2 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        5 |        3 |        3 |        4 |       0 |        9 |        3 |        4 |        5 |        2 |        5 |       0 |        1 |        8 |        5 |        3 |        6 |        5 |       0 |        8 |        5 |        3 |        1 |        4 |       12 |       0 |        1 |        8 |        1 |        2 |        2 |        0 |       0 |        2 |        3 |        1 |        3 |        0 |        2 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      6 |      2 |      1 |      0 |     36 |      0 |      0 |      0 |      5 |      0 |      3 |      0 |      0 |     53 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4825000 |     396 |    152 |    167 |    10 |    0 |     7 |    1 |    1 |     4 |    0 |     54 |    0 |    0 |    0 |    0 |    170 |    226 |       8 |       6 |       1 |       0 |      4 |      9 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       1 |       1 |       0 |      1 |      0 |      0 |      0 |        4 |        4 |       11 |       11 |        9 |        5 |      13 |       12 |       10 |       22 |       12 |       11 |       18 |      10 |        5 |       12 |       14 |       25 |        5 |       12 |      10 |        8 |        8 |       20 |       14 |        7 |       14 |      13 |        4 |        3 |        5 |        6 |        5 |        0 |       0 |        2 |        5 |        6 |        8 |        4 |        6 |       0 |        1 |        0 |        2 |        2 |        1 |        1 |       0 |        2 |        3 |        2 |        4 |        1 |        3 |       1 |      0 |      0 |     20 |     13 |     10 |      7 |      6 |     96 |      0 |      0 |      0 |     14 |     28 |      5 |      8 |      4 |    108 |      0 |      0 |      0 |      2 |     11 |      5 |      2 |      2 |     32 |      0 |      0 |      0 |      3 |      8 |      2 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4826000 |     212 |     87 |     74 |     7 |    0 |     2 |    2 |    1 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |     91 |    121 |      12 |       4 |       5 |       3 |      0 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        8 |        8 |        2 |        3 |        4 |       1 |        9 |        8 |       13 |        8 |        9 |        8 |       3 |        6 |        9 |        7 |        3 |        2 |        5 |       1 |        7 |       11 |        8 |        5 |        3 |        3 |       4 |        4 |        4 |        6 |        4 |        2 |        0 |       1 |        2 |        5 |        5 |        1 |        3 |        0 |       1 |        1 |        2 |        3 |        0 |        1 |        1 |       0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |      6 |     13 |      5 |      1 |      3 |     59 |      0 |      0 |      0 |     10 |     10 |      2 |      0 |      1 |     51 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     30 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4827000 |     784 |    293 |    320 |    18 |    0 |    10 |    9 |    6 |     4 |    0 |    124 |    0 |    0 |    0 |    0 |    385 |    399 |      22 |      16 |      14 |       5 |     14 |     14 |      9 |      3 |      0 |      0 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |       1 |       1 |       0 |       0 |      1 |      2 |      1 |      0 |       12 |       19 |       13 |       17 |       14 |       19 |      19 |       10 |       30 |       31 |       34 |       19 |       28 |      28 |       18 |       21 |       46 |       31 |       16 |       16 |      22 |       13 |       18 |       35 |       24 |       11 |       32 |      17 |       17 |       20 |        7 |       18 |        3 |        3 |       1 |       18 |       11 |        6 |       11 |        6 |        1 |       2 |       12 |        6 |       10 |        4 |        1 |        0 |       0 |        1 |        5 |        5 |        0 |        3 |        0 |       0 |      0 |      3 |     24 |     27 |     12 |      2 |     12 |    213 |      0 |      0 |      1 |     45 |     47 |     16 |     12 |     22 |    177 |      0 |      0 |      2 |      9 |     11 |      6 |      1 |      5 |     90 |      0 |      0 |      0 |      8 |      7 |      2 |      0 |      1 |     29 |      0 |     37 | s03      | R    |
| 4828000 |     399 |    142 |    158 |    14 |    0 |     8 |    1 |    2 |     4 |    0 |     70 |    0 |    0 |    0 |    0 |    186 |    213 |       9 |      11 |       2 |       2 |      8 |      7 |      5 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        9 |        9 |       12 |       11 |       12 |      11 |        6 |        7 |       11 |       19 |        3 |       13 |      15 |        3 |       19 |       16 |       12 |        9 |       15 |       5 |        9 |       10 |       15 |       17 |       10 |       13 |       5 |        5 |        6 |        4 |        6 |        1 |        3 |       1 |       12 |       12 |        6 |        7 |        1 |        3 |       3 |        2 |        2 |        3 |        4 |        0 |        2 |       0 |        1 |        3 |        4 |        4 |        3 |        1 |       0 |      0 |      0 |     10 |     13 |      3 |      8 |      7 |    101 |      0 |      0 |      0 |     16 |     23 |      4 |      5 |      6 |    104 |      0 |      0 |      2 |      6 |      3 |      3 |      1 |      1 |     54 |      0 |      0 |      1 |      3 |      7 |      1 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 4829000 |     390 |    140 |    163 |    14 |    0 |     2 |    2 |    2 |     4 |    0 |     63 |    0 |    0 |    0 |    0 |    187 |    203 |      11 |       2 |       2 |       1 |      5 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        5 |        6 |       12 |       16 |        9 |        7 |       8 |        4 |        5 |       13 |       19 |       10 |        9 |      17 |        5 |       10 |       17 |       15 |        9 |       10 |      11 |        9 |        5 |       15 |       12 |        9 |       18 |      18 |        7 |        2 |        6 |        5 |        7 |        5 |       3 |        3 |        5 |        7 |        2 |        5 |        3 |       3 |        1 |        4 |        1 |        4 |        0 |        2 |       0 |        1 |        1 |        3 |        4 |        1 |        2 |       0 |      0 |      3 |     18 |     16 |      8 |      5 |      5 |     85 |      0 |      0 |      0 |     18 |     24 |      7 |      7 |      7 |    100 |      0 |      0 |      0 |      4 |      3 |      4 |      1 |      0 |     51 |      0 |      0 |      1 |      1 |      4 |      0 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 4830000 |     730 |    300 |    304 |    17 |    0 |     5 |    2 |    1 |     4 |    0 |     97 |    0 |    0 |    0 |    0 |    290 |    440 |      25 |      11 |       7 |       3 |     31 |     14 |      6 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      1 |      0 |      0 |      2 |      2 |      0 |      1 |      1 |       1 |       2 |       1 |       0 |      0 |      1 |      2 |      0 |        4 |       12 |        8 |       17 |       16 |       27 |      15 |        9 |       11 |       27 |       28 |       27 |       69 |      30 |        5 |       11 |       22 |       21 |       12 |       45 |      20 |        6 |       10 |       19 |       17 |       22 |       71 |      23 |        9 |       12 |        5 |        7 |        4 |        5 |       4 |        8 |        8 |        9 |        6 |        7 |       13 |       0 |        2 |        3 |        2 |        1 |        0 |        1 |       0 |        1 |        3 |        4 |        3 |        2 |        7 |       0 |      0 |      1 |     29 |     37 |     14 |     11 |      9 |    199 |      0 |      0 |      4 |     35 |     55 |     18 |      9 |      8 |    175 |      0 |      0 |      1 |     14 |     10 |      3 |      3 |      0 |     66 |      0 |      0 |      0 |      7 |      5 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 4831000 |     263 |    115 |    104 |     3 |    0 |     0 |    0 |    0 |     1 |    0 |     40 |    0 |    0 |    0 |    0 |    106 |    157 |       6 |       9 |       6 |       0 |     10 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        8 |        9 |       13 |        7 |        6 |       0 |        4 |       10 |        9 |       16 |       11 |       20 |       1 |        3 |        8 |        4 |       10 |       14 |        8 |       0 |        6 |        6 |        4 |       13 |       12 |       16 |       0 |        3 |        4 |        4 |        0 |        1 |        2 |       0 |        5 |        6 |        5 |        2 |        3 |        5 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     17 |     15 |      9 |      2 |      2 |     70 |      0 |      0 |      1 |      9 |     16 |      3 |      1 |     10 |     64 |      0 |      0 |      0 |      3 |      2 |      3 |      1 |      1 |     30 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4831100 |     441 |    194 |    153 |     6 |    0 |     2 |    5 |    1 |     7 |    0 |     73 |    0 |    0 |    0 |    0 |    190 |    251 |      14 |       5 |       6 |       1 |     33 |     13 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        5 |        9 |        6 |       15 |       11 |       25 |       0 |        7 |        8 |       18 |       19 |       17 |       49 |       5 |        3 |        8 |       11 |       17 |       15 |       18 |       3 |        4 |       11 |        8 |        7 |       12 |       34 |       2 |        4 |       11 |        5 |        3 |        5 |        2 |       0 |        6 |        5 |        3 |        9 |       11 |        8 |       1 |        2 |        2 |        2 |        5 |        1 |        2 |       0 |        0 |        2 |        1 |        1 |        1 |        2 |       0 |      0 |      1 |     23 |     24 |     10 |      8 |     10 |    118 |      0 |      0 |      0 |     18 |     21 |      6 |      8 |     13 |     87 |      0 |      0 |      0 |      5 |      7 |      8 |      0 |      3 |     50 |      0 |      0 |      0 |      3 |      4 |      0 |      2 |      0 |     12 |      0 |     37 | s03      | R    |
| 4831200 |     201 |     69 |     88 |     1 |    0 |     5 |    1 |    1 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |     94 |    107 |       4 |       2 |       1 |       0 |      6 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        5 |        6 |        3 |        0 |        1 |       4 |        7 |       11 |        3 |        8 |        7 |        8 |       3 |        4 |        9 |        6 |        7 |        8 |        6 |       2 |        4 |        7 |        4 |        7 |        9 |       11 |       4 |        2 |        6 |        5 |        7 |        1 |        1 |       0 |        1 |        4 |        1 |        3 |        3 |        0 |       0 |        1 |        0 |        3 |        3 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |      6 |      3 |      0 |      1 |     56 |      0 |      0 |      0 |      6 |     10 |      4 |      2 |      4 |     62 |      0 |      0 |      1 |      7 |      2 |      0 |      0 |      0 |     24 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4832000 |      30 |     21 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     16 |     14 |       5 |       0 |       2 |       0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        3 |        2 |       2 |        0 |        1 |        4 |        2 |        1 |        0 |       3 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      4 |      3 |      0 |      0 |     11 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4833000 |     298 |     99 |    132 |     8 |    0 |     6 |    0 |    1 |     0 |    0 |     52 |    0 |    0 |    0 |    0 |    141 |    157 |      12 |       5 |       3 |       0 |      6 |      6 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        7 |        1 |        7 |        8 |       10 |        2 |       9 |        2 |        7 |        5 |       12 |       11 |        6 |      12 |        7 |       11 |       10 |        8 |        9 |        5 |      10 |        3 |        8 |        6 |       10 |       10 |       15 |      20 |        4 |        8 |        8 |        1 |        6 |        1 |       0 |        4 |        3 |        4 |        5 |        4 |        4 |       0 |        0 |        4 |        2 |        2 |        0 |        1 |       0 |        0 |        3 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |     12 |     15 |      5 |      2 |      0 |     65 |      0 |      0 |      1 |     13 |     15 |      5 |      1 |      3 |     94 |      0 |      0 |      0 |      8 |     11 |      2 |      1 |      1 |     29 |      0 |      0 |      0 |      0 |      6 |      1 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 4834000 |     361 |    133 |    143 |     3 |    0 |     9 |    2 |    3 |     4 |    0 |     64 |    0 |    0 |    0 |    0 |    158 |    203 |      12 |       7 |       4 |       1 |     10 |     11 |      8 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      3 |      0 |      0 |      0 |        2 |        7 |       10 |       13 |        1 |       17 |       5 |        4 |        5 |        8 |       19 |        8 |       24 |      10 |        5 |        7 |       12 |       11 |        8 |       13 |       9 |        3 |        9 |       20 |       12 |        7 |       16 |      11 |        4 |        6 |        7 |        5 |        5 |        0 |       0 |        8 |        6 |       10 |        6 |        5 |        2 |       0 |        2 |        2 |        2 |        1 |        2 |        2 |       0 |        2 |        2 |        2 |        2 |        0 |        2 |       0 |      0 |      1 |     11 |     17 |      4 |      2 |      8 |     90 |      0 |      0 |      0 |     18 |     15 |      9 |      6 |     10 |     85 |      0 |      0 |      1 |      7 |      4 |      2 |      0 |      5 |     45 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 4835000 |     541 |    185 |    215 |    25 |    0 |     7 |    4 |    2 |     8 |    0 |     95 |    0 |    0 |    0 |    0 |    263 |    278 |      24 |      18 |       7 |       5 |     16 |      7 |      8 |      3 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       1 |       0 |      0 |      1 |      2 |      0 |       12 |       17 |        9 |       12 |       11 |       10 |       3 |       21 |       16 |       24 |       13 |       13 |       22 |       2 |       12 |       30 |       20 |       22 |       12 |       16 |       3 |       14 |       17 |       17 |       25 |       11 |       12 |       4 |       10 |       12 |       10 |       10 |        3 |        1 |       0 |        9 |       20 |        6 |        7 |        5 |        2 |       0 |        6 |        6 |        9 |        3 |        3 |        1 |       0 |       10 |        2 |        0 |        3 |        2 |        1 |       0 |      0 |      4 |     17 |     24 |      5 |      6 |      1 |    128 |      0 |      0 |      1 |     24 |     25 |      5 |      5 |      8 |    147 |      0 |      0 |      2 |      5 |      8 |      0 |      1 |      1 |     78 |      0 |      0 |      1 |      3 |      7 |      0 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 4836000 |     517 |    203 |    170 |    14 |    0 |     4 |    3 |    4 |     9 |    0 |    110 |    0 |    0 |    0 |    0 |    220 |    297 |      31 |      16 |      15 |       8 |     12 |      6 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      0 |      0 |       0 |       4 |       1 |       0 |      0 |      1 |      0 |      1 |        7 |       13 |       13 |       15 |       13 |        9 |       5 |       22 |       29 |       20 |       19 |       14 |       14 |      10 |        8 |       17 |       12 |       17 |        7 |       16 |       6 |       16 |       17 |       15 |       10 |        8 |       14 |       7 |       13 |       17 |        7 |        8 |        3 |        1 |       0 |       18 |       19 |       10 |        3 |        7 |        4 |       0 |        2 |        8 |        0 |        1 |        2 |        0 |       0 |        6 |        7 |        4 |        2 |        1 |        1 |       0 |      0 |      1 |     28 |     10 |      4 |      6 |      9 |    145 |      0 |      0 |      3 |     15 |     16 |      6 |      3 |      6 |    121 |      0 |      0 |      1 |     12 |      7 |      0 |      0 |      4 |     86 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 4836100 |     460 |    164 |    185 |     7 |    0 |     5 |    4 |    0 |     0 |    0 |     95 |    0 |    0 |    0 |    0 |    173 |    287 |      17 |      11 |       5 |       0 |     11 |      4 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      2 |      0 |        4 |        4 |       10 |       12 |       10 |        9 |       1 |        4 |       10 |       21 |       21 |       22 |       32 |       4 |        3 |       16 |       10 |       19 |       12 |       13 |       4 |        8 |       21 |       12 |       18 |       22 |       23 |       4 |        7 |       11 |        7 |        8 |        3 |        2 |       1 |       11 |       11 |        8 |       10 |        8 |        7 |       1 |        1 |        1 |        0 |        1 |        2 |        2 |       0 |        0 |        0 |        1 |        5 |        2 |        1 |       0 |      0 |      0 |     23 |     24 |     13 |      6 |      7 |     91 |      0 |      0 |      1 |     32 |     14 |      6 |      8 |      5 |    119 |      0 |      0 |      1 |      9 |     14 |      4 |      3 |      4 |     60 |      0 |      0 |      0 |      4 |      3 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4837000 |     392 |    133 |    199 |    11 |    0 |     2 |    0 |    0 |     1 |    0 |     46 |    0 |    0 |    0 |    0 |    145 |    247 |      12 |       4 |       3 |       0 |     15 |      9 |      5 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        7 |        3 |        3 |       18 |       5 |        5 |        8 |        8 |        7 |        8 |       54 |       2 |        9 |       10 |        8 |       13 |        5 |       30 |       5 |        5 |       12 |        7 |       12 |        9 |       65 |       9 |        2 |        5 |        3 |        2 |        3 |        5 |       0 |        3 |        6 |        4 |        2 |        4 |        7 |       0 |        1 |        0 |        0 |        0 |        0 |        3 |       0 |        0 |        2 |        1 |        1 |        1 |        5 |       0 |      0 |      1 |     17 |     19 |      3 |      4 |      1 |     88 |      0 |      0 |      0 |     28 |     22 |     10 |      2 |      5 |    132 |      0 |      0 |      0 |      9 |      9 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4837100 |     126 |     49 |     54 |     2 |    0 |     0 |    1 |    0 |     1 |    0 |     19 |    0 |    0 |    0 |    0 |     45 |     81 |       8 |       4 |       2 |       2 |      4 |      1 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        2 |        5 |        0 |        5 |       0 |        2 |        7 |        4 |        4 |        3 |       11 |       0 |        1 |        4 |        3 |        2 |        2 |        4 |       1 |        2 |        5 |        5 |        4 |        5 |       16 |       0 |        0 |        4 |        1 |        1 |        0 |        2 |       0 |        2 |        5 |        2 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      9 |      2 |      1 |      2 |     30 |      0 |      0 |      0 |     13 |      5 |      2 |      4 |      0 |     30 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4838000 |     351 |    145 |    145 |     9 |    0 |     2 |    3 |    4 |     1 |    0 |     42 |    0 |    0 |    0 |    0 |    148 |    203 |       9 |       7 |       3 |       3 |      6 |      7 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        8 |        5 |        9 |       11 |       11 |        9 |       5 |        7 |       14 |        8 |       16 |       19 |       14 |       9 |        4 |        7 |        9 |       10 |        9 |       19 |      10 |        5 |        8 |       10 |       18 |       11 |       17 |       8 |        4 |        4 |        3 |        3 |        1 |        1 |       0 |        8 |        8 |        3 |        4 |        2 |        1 |       0 |        2 |        0 |        3 |        1 |        0 |        0 |       0 |        4 |        2 |        3 |        2 |        0 |        2 |       0 |      0 |      2 |     17 |     16 |      7 |      3 |      5 |     95 |      0 |      0 |      3 |     16 |     14 |     10 |      4 |      4 |     94 |      0 |      0 |      0 |      3 |      1 |      3 |      1 |      1 |     33 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 4838100 |     280 |    117 |     96 |     4 |    0 |     1 |    1 |    0 |     3 |    0 |     58 |    0 |    0 |    0 |    0 |    121 |    159 |      12 |       6 |       5 |       0 |      7 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        2 |       16 |        7 |        6 |        4 |       12 |       1 |        4 |       16 |        6 |       14 |        9 |       20 |       0 |        3 |       19 |        9 |        7 |        3 |        3 |       0 |        7 |       14 |        5 |        5 |        5 |       16 |       0 |        5 |        9 |        4 |        2 |        4 |        4 |       0 |        2 |        9 |        6 |        5 |        5 |        3 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        0 |        1 |        2 |        1 |       0 |      0 |      0 |     15 |     18 |      6 |      1 |      2 |     75 |      0 |      0 |      1 |      7 |     12 |      7 |      2 |      2 |     65 |      0 |      0 |      0 |      8 |      6 |      1 |      0 |      2 |     41 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4839000 |     580 |    167 |    265 |    12 |    0 |     7 |    9 |    4 |     5 |    0 |    111 |    0 |    0 |    0 |    0 |    219 |    361 |      20 |      13 |      16 |       4 |     10 |     14 |      7 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       1 |      0 |      1 |      2 |      0 |        8 |       14 |       12 |       12 |        3 |       18 |       0 |       15 |       20 |        4 |        8 |        9 |       40 |       4 |       10 |       22 |        7 |        7 |        6 |       26 |       3 |       22 |       22 |       10 |        4 |        9 |      103 |      14 |        7 |       20 |       10 |        1 |        6 |        6 |       0 |       16 |       15 |        7 |        3 |        6 |       14 |       0 |        3 |        7 |        4 |        1 |        2 |        4 |       0 |        3 |        5 |        1 |        2 |        1 |        4 |       0 |      0 |      0 |     20 |     26 |      3 |      1 |      0 |    117 |      0 |      0 |      5 |     19 |     26 |      5 |      2 |      2 |    206 |      0 |      0 |      1 |     12 |      5 |      1 |      0 |      2 |     90 |      0 |      0 |      2 |      3 |      3 |      1 |      0 |      0 |     28 |      0 |     37 | s03      | R    |
| 4841000 |     266 |     62 |    166 |     2 |    0 |     2 |    0 |    0 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |    123 |    143 |       6 |       3 |       2 |       0 |      1 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      2 |        1 |        0 |        2 |        9 |        4 |        5 |       5 |        3 |        3 |        6 |       10 |        4 |        7 |       3 |        5 |        2 |        9 |       17 |       13 |       15 |      15 |        2 |        3 |       12 |       15 |       11 |       29 |      18 |        4 |        0 |        3 |        5 |        3 |        4 |       0 |        1 |        1 |        7 |        0 |        4 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      7 |     10 |      2 |      2 |      3 |     38 |      0 |      0 |      0 |     15 |     23 |      4 |     10 |      8 |    106 |      0 |      0 |      1 |      7 |      6 |      3 |      1 |      3 |     13 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4842000 |     514 |    183 |    211 |    16 |    0 |     4 |    4 |    5 |     6 |    0 |     85 |    0 |    0 |    0 |    0 |    221 |    293 |      26 |      16 |      11 |       3 |      7 |     15 |      4 |      1 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      0 |      1 |      0 |        7 |        6 |       13 |        9 |       10 |       16 |       4 |       15 |       24 |       21 |       29 |        6 |       19 |       4 |       16 |       28 |       14 |       19 |       14 |        9 |       4 |       18 |       13 |       20 |       18 |        6 |       22 |      10 |       11 |       11 |        8 |        3 |        1 |        1 |       0 |       18 |       13 |        7 |        4 |        2 |        6 |       0 |        5 |        5 |        5 |        2 |        0 |        0 |       0 |        4 |        1 |        5 |        2 |        2 |        4 |       0 |      0 |      0 |     19 |     16 |      1 |      3 |      4 |    140 |      0 |      0 |      0 |     22 |     17 |      6 |      4 |      5 |    157 |      0 |      0 |      1 |      8 |      8 |      2 |      1 |      0 |     65 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 4842100 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4843000 |      69 |     23 |     23 |     2 |    0 |     3 |    1 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     38 |     31 |       5 |       1 |       2 |       1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        2 |        6 |        1 |        1 |        0 |       0 |        5 |        3 |        1 |        1 |        2 |        0 |       0 |        1 |        2 |        4 |        1 |        3 |        3 |       0 |        2 |        1 |        2 |        1 |        2 |        1 |       0 |        1 |        5 |        1 |        0 |        3 |        0 |       0 |        3 |        3 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     16 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4844000 |     441 |    174 |    167 |     8 |    0 |     4 |    2 |    1 |     6 |    0 |     79 |    0 |    0 |    0 |    0 |    199 |    242 |      21 |      17 |       8 |       0 |      9 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       2 |       0 |      1 |      1 |      1 |      0 |        7 |       12 |       12 |       17 |       14 |       14 |       2 |        7 |       15 |       13 |       19 |       11 |       27 |       4 |        4 |       16 |       17 |       13 |        9 |       13 |       2 |        7 |       12 |       10 |       17 |        7 |       37 |       3 |        2 |       11 |        4 |        6 |        5 |        5 |       1 |        7 |       12 |        7 |        7 |        3 |        9 |       0 |        0 |        1 |        2 |        3 |        2 |        5 |       0 |        1 |        3 |        2 |        1 |        0 |        1 |       0 |      0 |      0 |     18 |     26 |      7 |      5 |      5 |    113 |      0 |      0 |      1 |     21 |     27 |      5 |      5 |      0 |    108 |      0 |      0 |      1 |     19 |      0 |      2 |      0 |      2 |     55 |      0 |      0 |      2 |      4 |      0 |      0 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 4845000 |     311 |    131 |     89 |     9 |    0 |     1 |    3 |    6 |     2 |    0 |     70 |    0 |    0 |    0 |    0 |    131 |    180 |      22 |       6 |       9 |       3 |      5 |      2 |      1 |      2 |      0 |      1 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       3 |       0 |      0 |      2 |      0 |      0 |        5 |       12 |        9 |       12 |        4 |        7 |       0 |       16 |       21 |        9 |       15 |       15 |        6 |       0 |        3 |       10 |       10 |       13 |        6 |        5 |       0 |        8 |       12 |        7 |        4 |        6 |        5 |       0 |        7 |        5 |        6 |        3 |        2 |        1 |       0 |        5 |        9 |       15 |        7 |        5 |        4 |       1 |        4 |        2 |        2 |        1 |        2 |        0 |       0 |        7 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |     11 |     12 |      5 |      3 |      1 |     98 |      0 |      0 |      1 |     15 |     11 |      2 |      1 |      0 |     59 |      0 |      0 |      0 |     10 |      1 |      2 |      0 |      0 |     57 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4846000 |      40 |     13 |     16 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     24 |     16 |       3 |       2 |       2 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        1 |        1 |        0 |        0 |       0 |        2 |        2 |        0 |        3 |        0 |        0 |       0 |        4 |        3 |        2 |        1 |        0 |        1 |       0 |        1 |        1 |        1 |        0 |        2 |        0 |       0 |        1 |        2 |        2 |        1 |        0 |        1 |       0 |        2 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     10 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4847000 |     130 |     48 |     43 |     3 |    0 |     2 |    0 |    0 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |     54 |     76 |       4 |       8 |       6 |       1 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        4 |        5 |        3 |        4 |        4 |       0 |        2 |        5 |        3 |        8 |        7 |        3 |       0 |        1 |        4 |        7 |        3 |        3 |        0 |       0 |        7 |        5 |        1 |        7 |        2 |        3 |       0 |        1 |        4 |        3 |        3 |        1 |        0 |       0 |        7 |        4 |        5 |        4 |        0 |        1 |       0 |        1 |        1 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      8 |      4 |      3 |      2 |      1 |     30 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      2 |     33 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     27 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4848000 |     420 |    177 |    166 |     5 |    0 |     3 |    2 |    1 |     4 |    0 |     62 |    0 |    0 |    0 |    0 |    185 |    235 |      27 |      12 |       4 |       0 |      7 |      6 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       2 |       0 |      3 |      0 |      1 |      0 |        2 |       10 |       14 |       10 |       11 |       11 |       9 |        6 |       17 |       19 |       18 |       10 |       23 |      17 |        6 |        8 |       18 |       24 |        6 |       10 |       3 |       12 |       10 |       12 |       17 |       12 |       19 |       9 |        6 |        7 |        8 |        7 |        6 |        3 |       0 |        2 |       10 |        7 |        4 |        1 |        1 |       0 |        1 |        1 |        1 |        2 |        0 |        1 |       0 |        0 |        4 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |     20 |     21 |      4 |      4 |      6 |    122 |      0 |      0 |      1 |     28 |     16 |      7 |      7 |      3 |    104 |      0 |      0 |      2 |     10 |      8 |      1 |      0 |      0 |     41 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 4849000 |     440 |    180 |    152 |     9 |    0 |     5 |    2 |    2 |     7 |    0 |     83 |    0 |    0 |    0 |    0 |    188 |    252 |      28 |      16 |      11 |       3 |      7 |      7 |      5 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      3 |      1 |      1 |      1 |        3 |       18 |       15 |       10 |        7 |       10 |       4 |       15 |       21 |       16 |       15 |       19 |       21 |       6 |        6 |       18 |       11 |        7 |        8 |        9 |       0 |       15 |       17 |       19 |       14 |        9 |       15 |       4 |        9 |       14 |       15 |        5 |        0 |        5 |       0 |        9 |       11 |        5 |        6 |        2 |        1 |       1 |        3 |        5 |        2 |        2 |        1 |        1 |       0 |        2 |        3 |        3 |        1 |        0 |        2 |       0 |      0 |      3 |     16 |     20 |      6 |      1 |      6 |    128 |      0 |      0 |      2 |     24 |      8 |      1 |      2 |      2 |    113 |      0 |      0 |      0 |     10 |      2 |      2 |      0 |      0 |     69 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4849100 |     452 |    143 |    213 |     6 |    0 |     3 |    2 |    1 |     7 |    0 |     77 |    0 |    0 |    0 |    0 |    208 |    244 |      12 |      19 |      10 |       4 |      3 |      4 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        4 |        5 |        6 |       21 |        9 |        9 |       8 |        5 |       13 |       15 |       23 |        7 |        9 |       9 |        8 |       22 |       26 |       21 |       11 |       11 |       3 |       10 |       14 |       22 |       25 |       12 |       19 |       9 |        3 |        5 |       13 |        9 |        3 |        1 |       0 |        2 |       14 |       13 |        6 |        4 |        4 |       0 |        1 |        1 |        2 |        4 |        1 |        1 |       0 |        2 |        4 |        1 |        2 |        0 |        0 |       0 |      0 |      2 |     20 |     13 |      6 |      2 |      7 |     93 |      0 |      0 |      0 |     41 |     27 |     11 |      7 |      4 |    123 |      0 |      0 |      1 |     11 |     11 |      1 |      1 |      3 |     49 |      0 |      0 |      0 |      3 |      2 |      1 |      2 |      0 |     11 |      0 |     37 | s03      | R    |
| 4850000 |     166 |     73 |     55 |     5 |    0 |     1 |    1 |    0 |     3 |    0 |     28 |    0 |    0 |    0 |    0 |     76 |     90 |       5 |       1 |       2 |       0 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |        1 |        6 |        3 |        3 |        5 |        4 |       2 |        0 |        6 |       14 |       13 |        6 |        8 |       2 |        1 |        4 |        4 |        7 |        6 |        3 |       0 |        4 |        5 |        4 |        8 |        5 |        3 |       1 |        4 |        5 |        5 |        1 |        2 |        3 |       0 |        2 |        3 |        2 |        1 |        0 |        0 |       0 |        1 |        1 |        2 |        2 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     11 |      9 |      7 |      0 |      0 |     46 |      0 |      0 |      0 |      9 |      5 |      0 |      1 |      3 |     37 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4850100 |     383 |    134 |    163 |    13 |    0 |     3 |    8 |    3 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    164 |    219 |      17 |      10 |       1 |       4 |      0 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      1 |      1 |      0 |       1 |       5 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        7 |        8 |       13 |        7 |        9 |       2 |        3 |       13 |       14 |       16 |       12 |       19 |      10 |        2 |       15 |       20 |       16 |        7 |       13 |       6 |        7 |       12 |       13 |       22 |        9 |       14 |       7 |        2 |       10 |        1 |        6 |        4 |        1 |       1 |        4 |        6 |        9 |        8 |        0 |        5 |       0 |        2 |        3 |        2 |        4 |        2 |        0 |       0 |        2 |        3 |        3 |        2 |        5 |        1 |       0 |      0 |      0 |     24 |     12 |      9 |      2 |      6 |     81 |      0 |      0 |      1 |     26 |     16 |      8 |      6 |      2 |    104 |      0 |      0 |      1 |      8 |      5 |      0 |      0 |      2 |     41 |      0 |      0 |      0 |      7 |      3 |      2 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4850900 |     239 |     80 |    121 |     4 |    0 |     3 |    2 |    1 |     3 |    0 |     25 |    0 |    0 |    0 |    0 |     75 |    164 |       6 |       3 |       0 |       0 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        2 |       10 |       0 |        0 |        0 |        0 |        0 |        8 |       58 |       0 |        0 |        2 |        3 |        4 |        2 |       31 |       0 |        1 |        3 |        0 |        3 |        5 |       64 |       3 |        0 |        1 |        2 |        0 |        0 |        9 |       0 |        0 |        1 |        1 |        1 |        1 |        9 |       0 |        0 |        1 |        4 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        5 |       0 |      0 |      1 |      9 |     18 |      7 |      2 |      3 |     40 |      0 |      0 |      0 |     18 |     23 |     12 |      6 |      2 |     60 |      0 |      0 |      1 |      3 |      5 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4851000 |     323 |    113 |    122 |    12 |    0 |     6 |    9 |    0 |     5 |    0 |     56 |    0 |    0 |    0 |    0 |    137 |    186 |      19 |      15 |       8 |       5 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        5 |        5 |        4 |       10 |        6 |        7 |       1 |       11 |       11 |       12 |       16 |        9 |       13 |       3 |        7 |       11 |       13 |       13 |        5 |       10 |       0 |        7 |       10 |       11 |       13 |        7 |       12 |       3 |        5 |        4 |        6 |        4 |        2 |        0 |       1 |        9 |       10 |        6 |        7 |        1 |        1 |       0 |        5 |        6 |        2 |        5 |        0 |        0 |       0 |        4 |        2 |        2 |        4 |        1 |        1 |       0 |      0 |      0 |     12 |     11 |      8 |      4 |      3 |     75 |      0 |      0 |      0 |     23 |     12 |      3 |      4 |      2 |     78 |      0 |      0 |      0 |      7 |      3 |      1 |      0 |      0 |     45 |      0 |      0 |      0 |      4 |      4 |      0 |      2 |      1 |     21 |      0 |     37 | s03      | R    |
| 4852000 |     409 |    169 |    134 |     8 |    0 |    12 |    3 |    0 |     2 |    0 |     81 |    0 |    0 |    0 |    0 |    181 |    228 |      24 |      12 |       6 |       1 |      2 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        4 |       15 |       22 |        9 |        2 |       13 |       6 |        5 |       19 |       18 |       17 |       13 |       20 |       6 |        7 |        9 |       13 |       14 |        7 |        7 |       3 |        3 |       15 |       11 |       15 |       11 |       15 |       4 |        4 |        8 |        9 |        9 |        5 |        2 |       0 |        6 |       19 |       11 |        5 |        1 |        2 |       0 |        0 |        5 |        4 |        1 |        2 |        1 |       0 |        1 |        4 |        0 |        3 |        4 |        0 |       0 |      0 |      1 |     23 |     26 |     10 |      2 |      4 |    103 |      0 |      0 |      0 |     22 |     14 |      8 |      3 |      2 |     85 |      0 |      0 |      0 |      6 |      9 |      2 |      1 |      1 |     62 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |     17 |      0 |     37 | s03      | R    |
| 4853000 |     323 |    106 |    155 |     5 |    0 |     6 |    2 |    1 |     4 |    0 |     44 |    0 |    0 |    0 |    0 |    145 |    178 |       3 |       7 |       1 |       1 |      7 |     13 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      0 |      0 |        3 |        1 |        8 |       15 |        4 |        8 |       1 |        4 |        7 |       15 |       17 |        9 |        9 |       5 |        0 |        9 |       15 |       20 |        9 |       12 |       8 |        8 |        7 |       14 |       14 |        7 |       29 |       3 |        4 |        5 |        1 |        5 |        4 |        2 |       0 |        2 |        2 |        8 |        4 |        4 |        2 |       1 |        2 |        2 |        3 |        2 |        1 |        1 |       0 |        1 |        1 |        2 |        1 |        1 |        1 |       0 |      0 |      0 |     11 |     20 |      7 |      5 |      5 |     58 |      0 |      0 |      1 |     27 |     27 |     10 |      6 |      5 |     79 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      1 |     32 |      0 |      0 |      0 |      4 |      3 |      1 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4854000 |     141 |     36 |     64 |     3 |    0 |     4 |    2 |    1 |     2 |    0 |     29 |    0 |    0 |    0 |    0 |     57 |     84 |       3 |       0 |       0 |       2 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        3 |        4 |        1 |       1 |        0 |        5 |        4 |        3 |        4 |        6 |       1 |        1 |        7 |        5 |        5 |        6 |        2 |       1 |        3 |        7 |        6 |        7 |        4 |        7 |       3 |        1 |        3 |        1 |        4 |        1 |        1 |       0 |        1 |        3 |        6 |        1 |        4 |        2 |       1 |        0 |        1 |        3 |        0 |        1 |        1 |       0 |        0 |        0 |        3 |        1 |        2 |        0 |       0 |      0 |      0 |      5 |      6 |      2 |      0 |      0 |     23 |      0 |      0 |      0 |     14 |      5 |      3 |      2 |      4 |     36 |      0 |      0 |      1 |      6 |      6 |      0 |      1 |      0 |     15 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 4855000 |     453 |    168 |    189 |     8 |    0 |     5 |    5 |    3 |     2 |    0 |     73 |    0 |    0 |    0 |    0 |    194 |    259 |      25 |      19 |      17 |       2 |      2 |     10 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        5 |       17 |       11 |       13 |        7 |        5 |       7 |       11 |       16 |       17 |       17 |       15 |       19 |       8 |        9 |       24 |       16 |       18 |        7 |       11 |       3 |       12 |       24 |       21 |       14 |        5 |       20 |       5 |        4 |        6 |        5 |        7 |        2 |        3 |       1 |       11 |       12 |        6 |       12 |        4 |        0 |       0 |        2 |        5 |        3 |        1 |        2 |        0 |       0 |        3 |        3 |        2 |        0 |        0 |        2 |       0 |      0 |      1 |     28 |     21 |      7 |      6 |      5 |    100 |      0 |      0 |      0 |     25 |     25 |      9 |      2 |      2 |    126 |      0 |      0 |      0 |     11 |      5 |      1 |      0 |      1 |     55 |      0 |      0 |      1 |      4 |      5 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4856000 |     322 |    103 |    154 |     6 |    0 |     3 |    1 |    3 |     4 |    0 |     48 |    0 |    0 |    0 |    0 |    153 |    169 |       7 |       4 |       2 |       0 |      8 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        3 |        2 |        6 |        7 |       10 |        8 |       6 |        2 |        4 |        8 |       14 |       15 |        7 |      11 |        4 |        6 |       12 |       20 |       13 |       11 |       6 |        9 |        9 |       15 |       14 |       14 |        8 |      13 |        4 |        3 |        8 |        7 |        4 |        2 |       0 |        6 |        2 |        7 |        2 |        1 |        1 |       1 |        3 |        1 |        1 |        1 |        2 |        3 |       0 |        0 |        2 |        0 |        3 |        1 |        0 |       0 |      0 |      0 |      8 |     16 |      4 |      7 |      5 |     63 |      0 |      0 |      2 |     20 |     18 |     10 |      9 |      7 |     88 |      0 |      0 |      1 |     11 |      7 |      1 |      1 |      0 |     27 |      0 |      0 |      0 |      1 |      7 |      3 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4857000 |     308 |    108 |    151 |     5 |    0 |     3 |    0 |    0 |     3 |    0 |     38 |    0 |    0 |    0 |    0 |    149 |    159 |       7 |      16 |       4 |       3 |     10 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        2 |        6 |       10 |        9 |        6 |       4 |        5 |        3 |       18 |       16 |        8 |        9 |       9 |        2 |       12 |       14 |       19 |       11 |       10 |      14 |        5 |        3 |       11 |       11 |       13 |       18 |       8 |        5 |        3 |        1 |        4 |        3 |        4 |       0 |        4 |        4 |        3 |        4 |        3 |        0 |       0 |        1 |        2 |        2 |        0 |        2 |        0 |       0 |        2 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      2 |     15 |     14 |      7 |      3 |     10 |     57 |      0 |      0 |      0 |     21 |     25 |      7 |      9 |      7 |     82 |      0 |      0 |      0 |      5 |      5 |      4 |      0 |      1 |     23 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 4857100 |     318 |    105 |    155 |    10 |    0 |     3 |    3 |    0 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |    157 |    161 |       8 |       4 |       1 |       2 |     12 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |        3 |        6 |       10 |       11 |       14 |       1 |        3 |        1 |        8 |       15 |       14 |       10 |       6 |       10 |        6 |       10 |       12 |       14 |       13 |       9 |        4 |        2 |       15 |       19 |       11 |       13 |      17 |        6 |        2 |        4 |        4 |        5 |        3 |       0 |        1 |        4 |        4 |        3 |        4 |        2 |       0 |        1 |        1 |        1 |        4 |        3 |        1 |       0 |        1 |        0 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      9 |     22 |     10 |      5 |      5 |     54 |      0 |      0 |      0 |     22 |     25 |     13 |      5 |      7 |     83 |      0 |      0 |      1 |      3 |      8 |      2 |      2 |      0 |     26 |      0 |      0 |      1 |      6 |      3 |      1 |      2 |      0 |      3 |      0 |     37 | s03      | R    |
| 4858000 |     562 |    185 |    263 |    17 |    0 |     5 |    5 |    1 |     2 |    0 |     84 |    0 |    0 |    0 |    0 |    261 |    301 |      26 |       9 |       7 |       2 |     15 |     15 |      3 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        9 |        6 |       10 |       16 |       10 |       10 |      11 |        8 |        7 |       21 |       31 |       16 |       15 |      15 |       14 |       17 |       22 |       29 |       18 |       19 |      19 |       10 |       14 |       18 |       27 |       16 |       18 |      22 |        3 |        2 |       13 |       11 |        6 |        5 |       1 |        7 |       10 |       13 |        6 |        4 |        3 |       0 |        3 |        1 |        1 |        2 |        0 |        3 |       0 |        2 |        4 |        4 |        6 |        3 |        1 |       0 |      0 |      0 |     23 |     29 |      9 |      7 |     11 |    106 |      0 |      0 |      3 |     34 |     39 |     11 |      8 |     13 |    155 |      0 |      0 |      3 |     13 |     15 |      2 |      1 |      7 |     43 |      0 |      0 |      1 |      4 |      5 |      3 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4858100 |       6 |      2 |      2 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      5 |       0 |       0 |       0 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4859000 |     358 |    125 |    130 |    11 |    0 |     4 |    2 |    0 |     6 |    0 |     80 |    0 |    0 |    0 |    0 |    137 |    221 |      24 |      11 |       6 |       5 |      8 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        6 |       10 |        8 |        2 |        9 |       4 |        1 |       16 |       13 |       12 |       11 |       25 |       6 |        2 |       12 |        7 |        8 |        7 |       13 |       0 |        8 |       11 |        6 |       12 |       12 |       32 |       0 |        2 |       14 |        5 |        4 |        4 |        7 |       0 |        7 |       10 |        4 |        4 |        6 |       10 |       3 |        1 |        3 |        4 |        1 |        0 |        2 |       0 |        1 |        5 |        1 |        3 |        0 |        2 |       0 |      0 |      3 |     28 |     15 |      6 |      1 |      2 |     70 |      0 |      0 |      0 |     24 |     15 |      5 |      3 |      2 |     81 |      0 |      0 |      0 |      8 |     10 |      5 |      1 |      0 |     56 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4859100 |     580 |    202 |    214 |    10 |    0 |     6 |    6 |    3 |     4 |    0 |    135 |    0 |    0 |    0 |    0 |    235 |    345 |      14 |       6 |       9 |       3 |     11 |     13 |      3 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        8 |       11 |       19 |       10 |       23 |       7 |        4 |        9 |       27 |       22 |       14 |       37 |       6 |        3 |       16 |       19 |       15 |        9 |       23 |      12 |        8 |       13 |       16 |       15 |       17 |       35 |      13 |        2 |        6 |       10 |       11 |        4 |        8 |       0 |        9 |       14 |       12 |       15 |        6 |       38 |       0 |        1 |        2 |        3 |        3 |        2 |        3 |       0 |        2 |        2 |        2 |        2 |        2 |        5 |       0 |      0 |      3 |     38 |     22 |      7 |     11 |      6 |    115 |      0 |      0 |      2 |     28 |     40 |      5 |      3 |      6 |    130 |      0 |      0 |      1 |     14 |      7 |      7 |      0 |      3 |    103 |      0 |      0 |      1 |      8 |      3 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4860000 |     362 |    127 |    168 |     6 |    0 |     1 |    1 |    1 |     4 |    0 |     54 |    0 |    0 |    0 |    0 |    172 |    190 |       6 |       6 |       4 |       1 |     12 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        5 |        6 |        3 |       26 |       13 |        8 |       3 |        2 |        8 |       10 |       15 |       15 |        6 |       7 |        8 |        7 |       10 |       21 |        7 |       17 |       4 |        8 |        5 |       13 |       26 |       10 |       20 |      12 |        4 |        3 |        7 |        4 |        7 |        1 |       1 |        5 |        6 |        8 |        6 |        0 |        2 |       0 |        2 |        1 |        1 |        1 |        2 |        0 |       0 |        0 |        4 |        0 |        2 |        0 |        0 |       0 |      0 |      1 |     11 |     21 |      9 |      6 |     13 |     66 |      0 |      0 |      0 |      9 |     22 |     13 |      8 |     10 |    106 |      0 |      0 |      0 |     10 |      5 |      3 |      1 |      4 |     31 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      8 |      0 |     37 | s03      | R    |
| 4861000 |     442 |    156 |    167 |    13 |    0 |     6 |    1 |    4 |    11 |    0 |     84 |    0 |    0 |    0 |    0 |    176 |    266 |      20 |      12 |       8 |       4 |      6 |      7 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      3 |      1 |        6 |        5 |       11 |       14 |        6 |        8 |       1 |        5 |       20 |       17 |       29 |       13 |       20 |       1 |        1 |       16 |       17 |       13 |       11 |       15 |       5 |        7 |       21 |       15 |       12 |       10 |       19 |       5 |        5 |       10 |        5 |        5 |        5 |        3 |       0 |        9 |       12 |        4 |       12 |        7 |        6 |       1 |        2 |        6 |        4 |        1 |        0 |        1 |       0 |        1 |       10 |        0 |        3 |        3 |        4 |       0 |      0 |      1 |     20 |     17 |      3 |      4 |      8 |    103 |      0 |      0 |      2 |     16 |     23 |      9 |      4 |      5 |    108 |      0 |      0 |      0 |     10 |      6 |      1 |      1 |      1 |     65 |      0 |      0 |      1 |      3 |      6 |      1 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 4863000 |     526 |    179 |    219 |    15 |    0 |     2 |   13 |    2 |     8 |    0 |     88 |    0 |    0 |    0 |    0 |    232 |    294 |      22 |       6 |       6 |       2 |      5 |      3 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |       16 |       14 |       15 |       12 |       14 |       3 |        7 |       17 |       19 |       25 |       14 |       18 |       4 |        8 |       14 |       16 |       21 |       20 |       15 |       2 |        9 |       20 |       20 |       21 |       22 |       21 |      10 |        5 |        7 |       10 |       11 |        3 |        5 |       2 |        6 |       13 |       13 |        6 |        4 |        2 |       1 |        4 |        3 |        4 |        2 |        3 |        2 |       0 |        3 |        6 |        5 |        5 |        2 |        1 |       0 |      0 |      0 |     16 |     30 |     12 |      5 |      2 |    114 |      0 |      0 |      0 |     38 |     31 |      8 |      4 |      6 |    132 |      0 |      0 |      1 |      4 |     12 |      3 |      1 |      5 |     62 |      0 |      0 |      0 |      8 |      3 |      3 |      0 |      0 |     26 |      0 |     37 | s03      | R    |
| 4863100 |      95 |     34 |     35 |     1 |    0 |     2 |    2 |    1 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     36 |     59 |       5 |       1 |       2 |       0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        5 |        1 |        3 |        0 |        3 |       0 |        2 |        2 |        6 |        2 |        4 |        4 |       1 |        1 |        3 |        4 |        3 |        1 |        2 |       0 |        1 |        5 |        3 |        2 |        2 |        7 |       1 |        0 |        4 |        2 |        1 |        1 |        0 |       0 |        2 |        1 |        3 |        3 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |     30 |      0 |      0 |      1 |      6 |      2 |      1 |      1 |      0 |     24 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 4864000 |     567 |    240 |    225 |     6 |    0 |     9 |   10 |    1 |     4 |    0 |     72 |    0 |    0 |    0 |    0 |    271 |    296 |      13 |       6 |       5 |       1 |     17 |      6 |      3 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        6 |       10 |       10 |       35 |       19 |       13 |       9 |       11 |       11 |       29 |       37 |       23 |       10 |      17 |        4 |        8 |       20 |       22 |       18 |       26 |      12 |        7 |        4 |       23 |       21 |       13 |       28 |      19 |        7 |        8 |        7 |        7 |        4 |        4 |       2 |        5 |        8 |        6 |        7 |        3 |        4 |       0 |        3 |        2 |        5 |        4 |        3 |        2 |       1 |        0 |        5 |        1 |        3 |        1 |        0 |       0 |      0 |      1 |     23 |     46 |     12 |     13 |     15 |    130 |      0 |      0 |      2 |     26 |     22 |      9 |      4 |     11 |    151 |      0 |      0 |      0 |     13 |     10 |      1 |      0 |      2 |     46 |      0 |      0 |      0 |      4 |      8 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 4864100 |     144 |     49 |     63 |     4 |    0 |     4 |    2 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     56 |     88 |       6 |       2 |       2 |       0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      2 |      0 |      0 |        3 |        5 |        1 |        0 |        2 |        3 |       1 |        5 |        4 |        7 |        8 |        3 |        6 |       1 |        1 |        3 |       11 |        5 |        4 |        2 |       1 |        2 |        3 |       11 |        9 |        5 |        5 |       1 |        1 |        3 |        0 |        4 |        1 |        0 |       0 |        3 |        4 |        2 |        4 |        0 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      6 |     11 |      0 |      2 |      0 |     30 |      0 |      0 |      0 |     17 |     13 |      3 |      0 |      2 |     28 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4865000 |     451 |    183 |    140 |    10 |    0 |     8 |    2 |    2 |     8 |    0 |     98 |    0 |    0 |    0 |    0 |    186 |    265 |      32 |      10 |      12 |       3 |     11 |      8 |      5 |      3 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       3 |       0 |       2 |       0 |      2 |      2 |      1 |      0 |       12 |       15 |       14 |       15 |        6 |       10 |       2 |       15 |       23 |       14 |       26 |        9 |       15 |       7 |        5 |       15 |       14 |       13 |        5 |        4 |       2 |        9 |       12 |       21 |       25 |        3 |        8 |       4 |        8 |       16 |        6 |        4 |        2 |        3 |       1 |       15 |       23 |        7 |        8 |        3 |        1 |       1 |        4 |        6 |        1 |        2 |        1 |        0 |       0 |        5 |        6 |        1 |        3 |        0 |        1 |       0 |      0 |      1 |     20 |     15 |      6 |      0 |      5 |    136 |      0 |      0 |      0 |     24 |     18 |      5 |      0 |      2 |     91 |      0 |      0 |      2 |     10 |      4 |      1 |      0 |      2 |     79 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 4867000 |     518 |    191 |    222 |    10 |    0 |     5 |    4 |    2 |     8 |    0 |     76 |    0 |    0 |    0 |    0 |    235 |    283 |      27 |      15 |       8 |       1 |     12 |      8 |      7 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |        4 |       11 |       18 |       15 |       11 |        7 |      12 |        3 |       12 |       26 |       29 |        8 |       14 |      21 |        8 |       13 |       27 |       31 |        7 |       16 |      10 |        4 |        8 |       26 |       23 |        9 |       23 |      17 |        3 |        4 |       10 |        8 |        4 |        0 |       2 |        4 |       11 |        7 |       12 |        7 |        4 |       0 |        3 |        2 |        4 |        4 |        1 |        0 |       0 |        3 |        3 |        6 |        2 |        1 |        0 |       0 |      0 |      5 |     24 |     27 |     11 |      2 |     10 |    112 |      0 |      0 |      1 |     22 |     27 |     10 |     14 |      8 |    140 |      0 |      0 |      0 |      9 |      9 |      4 |      1 |      0 |     53 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      1 |     20 |      0 |     37 | s03      | R    |
| 4868000 |     465 |    181 |    180 |    13 |    0 |     3 |    3 |    0 |     4 |    0 |     81 |    0 |    0 |    0 |    0 |    196 |    269 |      20 |       9 |       6 |       2 |     12 |      9 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      1 |      4 |      0 |        5 |       13 |        6 |       15 |        8 |       10 |      11 |        7 |       14 |       16 |       32 |        6 |       18 |      20 |        9 |       13 |       22 |       15 |        6 |       11 |       9 |        7 |        7 |       23 |       11 |        9 |       24 |      14 |        3 |        7 |        7 |        5 |        3 |        3 |       0 |        7 |       13 |       12 |        8 |        8 |        3 |       2 |        2 |        2 |        2 |        4 |        4 |        1 |       0 |        0 |        2 |        1 |        1 |        1 |        3 |       0 |      0 |      0 |     12 |     20 |     12 |      6 |      8 |    123 |      0 |      0 |      1 |     25 |     25 |      7 |      7 |      3 |    112 |      0 |      0 |      0 |      9 |      3 |      4 |      2 |      4 |     59 |      0 |      0 |      0 |      2 |      3 |      4 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 4869000 |     366 |    135 |    130 |     7 |    0 |     5 |    6 |    1 |     3 |    0 |     79 |    0 |    0 |    0 |    0 |    177 |    189 |      19 |      11 |       7 |       1 |     10 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       1 |       3 |       1 |       0 |      0 |      1 |      0 |      0 |       10 |        9 |        8 |       11 |        8 |        5 |       5 |       14 |        9 |       15 |       11 |        8 |       16 |       6 |       11 |        6 |       13 |       16 |        4 |        8 |       8 |       12 |        4 |       12 |        7 |        6 |       13 |      10 |       12 |       10 |        9 |        5 |        5 |        0 |       0 |       10 |        8 |       10 |        4 |        5 |        1 |       0 |        2 |        4 |        2 |        2 |        2 |        2 |       0 |        1 |        2 |        1 |        1 |        2 |        1 |       0 |      0 |      0 |     19 |     12 |      3 |      2 |      0 |     99 |      0 |      0 |      0 |     17 |     13 |      4 |      1 |      5 |     90 |      0 |      0 |      0 |     10 |      2 |      2 |      2 |      4 |     59 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4869100 |     141 |     57 |     56 |     3 |    0 |     1 |    2 |    0 |     1 |    0 |     21 |    0 |    0 |    0 |    0 |     64 |     77 |       3 |       1 |       0 |       0 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      0 |      1 |      0 |        3 |        3 |        6 |        7 |        3 |        2 |       3 |        2 |        5 |        7 |        7 |        1 |        6 |       2 |        0 |        5 |        8 |        2 |        2 |        5 |       2 |        4 |        4 |        6 |        4 |        3 |        6 |       5 |        0 |        1 |        3 |        1 |        1 |        1 |       1 |        2 |        3 |        5 |        1 |        1 |        1 |       0 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      7 |      2 |      3 |      1 |     36 |      0 |      0 |      0 |      8 |      5 |      0 |      6 |      0 |     37 |      0 |      0 |      0 |      6 |      2 |      1 |      1 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4869200 |     242 |     86 |    106 |     8 |    0 |     2 |    3 |    3 |     2 |    0 |     32 |    0 |    0 |    0 |    0 |    115 |    127 |      12 |       4 |       1 |       0 |      3 |      1 |      2 |      1 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        5 |        8 |        7 |        2 |        4 |      10 |        4 |        8 |       12 |        5 |        5 |        3 |       7 |        0 |        8 |        7 |       13 |        7 |        6 |       6 |        4 |        9 |        4 |       12 |        5 |        9 |      16 |        2 |        2 |        2 |        3 |        3 |        1 |       0 |        3 |        6 |        2 |        4 |        2 |        2 |       0 |        1 |        2 |        5 |        1 |        1 |        2 |       1 |        0 |        0 |        4 |        0 |        0 |        1 |       0 |      0 |      0 |     14 |      5 |      5 |      4 |      0 |     58 |      0 |      0 |      3 |     11 |     14 |      5 |      3 |      3 |     67 |      0 |      0 |      0 |      6 |      2 |      2 |      0 |      0 |     22 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 4869300 |     443 |    152 |    197 |    10 |    0 |     6 |    4 |    0 |     6 |    0 |     68 |    0 |    0 |    0 |    0 |    202 |    241 |      14 |      10 |       8 |       2 |      3 |     10 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        4 |        6 |       10 |       11 |        4 |       12 |       8 |        7 |       16 |       15 |       28 |        7 |       11 |      13 |        9 |       12 |       25 |       25 |       10 |       13 |       5 |        7 |       15 |       26 |       19 |        7 |       16 |       8 |        3 |        6 |       11 |        7 |        3 |        4 |       2 |        7 |        7 |        6 |        4 |        4 |        2 |       2 |        3 |        1 |        2 |        2 |        1 |        3 |       0 |        1 |        3 |        3 |        5 |        1 |        1 |       0 |      0 |      2 |     11 |     21 |     10 |      5 |      4 |     99 |      0 |      0 |      2 |     31 |     15 |     11 |     11 |      7 |    120 |      0 |      0 |      2 |      9 |      4 |      4 |      1 |      1 |     47 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 4870000 |     369 |    140 |    145 |     7 |    0 |     0 |    2 |    2 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    166 |    203 |      14 |       6 |      13 |       0 |      8 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      3 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        8 |       13 |       11 |        8 |        7 |       7 |        3 |       16 |       15 |       17 |        9 |       14 |       9 |        3 |       14 |       13 |       17 |        5 |       12 |       7 |        2 |       10 |       17 |       17 |        8 |       10 |      10 |        5 |        7 |        8 |        8 |        2 |        0 |       1 |        5 |       12 |       12 |        3 |        4 |        3 |       1 |        2 |        0 |        2 |        1 |        1 |        1 |       0 |        1 |        1 |        3 |        0 |        1 |        0 |       0 |      0 |      0 |     16 |     20 |     10 |      7 |      9 |     78 |      0 |      0 |      0 |     25 |     23 |      3 |      6 |      6 |     82 |      0 |      0 |      0 |      7 |     12 |      4 |      3 |      1 |     44 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4870100 |     519 |    207 |    165 |    13 |    0 |     6 |    5 |    3 |     7 |    0 |    113 |    0 |    0 |    0 |    0 |    238 |    281 |      40 |      20 |      12 |       3 |     13 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       2 |       4 |      2 |      0 |      1 |      0 |        4 |        4 |       19 |       19 |        7 |       14 |      11 |       14 |       25 |       28 |       21 |       12 |       18 |      11 |        5 |       19 |       14 |       17 |        9 |        9 |      10 |        8 |       18 |       14 |       11 |        7 |       13 |      11 |        6 |       16 |       19 |       11 |        4 |        5 |       1 |        9 |       18 |       10 |        9 |        2 |        2 |       1 |        2 |        4 |        2 |        5 |        1 |        1 |       0 |        1 |        7 |        3 |        4 |        2 |        2 |       0 |      0 |      0 |     31 |     21 |     11 |      4 |      6 |    134 |      0 |      0 |      0 |     22 |     28 |      4 |      1 |      5 |    105 |      0 |      0 |      0 |     17 |     10 |      4 |      3 |      3 |     76 |      0 |      0 |      0 |      8 |     10 |      2 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 4870200 |     272 |    117 |    108 |    10 |    0 |     1 |    4 |    1 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |    123 |    149 |      16 |       6 |       3 |       0 |      6 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      1 |      0 |      1 |      0 |        6 |        3 |        7 |       11 |        9 |        6 |       5 |        4 |        7 |       11 |       17 |       12 |       10 |       9 |        4 |       10 |       14 |        9 |        4 |        7 |       2 |        4 |       10 |       10 |        9 |       13 |        7 |       5 |        3 |        4 |        6 |        3 |        0 |        1 |       0 |        4 |        5 |        2 |        2 |        0 |        1 |       0 |        1 |        3 |        2 |        2 |        0 |        1 |       0 |        1 |        4 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |     12 |     15 |      4 |      3 |      7 |     76 |      0 |      0 |      0 |     19 |     15 |      9 |      6 |      0 |     59 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 4870300 |     383 |    146 |    145 |     9 |    0 |     7 |    0 |    2 |     1 |    0 |     73 |    0 |    0 |    0 |    0 |    177 |    206 |      28 |      12 |       8 |       0 |      4 |     10 |      4 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       2 |       0 |      1 |      0 |      2 |      0 |        8 |       11 |       11 |       14 |        5 |        7 |       4 |       10 |       15 |       20 |       15 |        4 |       16 |       6 |        6 |        8 |       19 |       12 |        9 |       10 |       3 |        4 |       11 |       21 |       11 |       10 |       14 |       7 |        6 |       10 |        7 |        5 |        4 |        4 |       0 |        6 |       14 |        6 |        8 |        3 |        0 |       0 |        1 |        3 |        5 |        2 |        3 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      2 |     18 |     21 |      7 |      2 |      3 |     93 |      0 |      0 |      0 |     22 |     22 |      5 |      4 |      1 |     91 |      0 |      0 |      0 |     13 |      5 |      0 |      3 |      0 |     52 |      0 |      0 |      2 |      2 |      5 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 4870400 |     365 |    145 |    132 |    13 |    0 |     2 |    5 |    0 |     4 |    0 |     64 |    0 |    0 |    0 |    0 |    154 |    211 |      25 |       7 |       8 |       1 |      4 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       1 |       3 |       1 |       0 |      0 |      0 |      0 |      0 |        3 |        8 |       10 |       10 |        8 |        7 |       9 |        5 |        7 |       18 |       15 |       13 |       22 |      10 |        6 |       10 |        9 |       16 |        4 |        7 |       8 |        9 |       13 |       12 |       15 |        7 |        9 |       7 |        3 |        4 |        9 |        6 |        3 |        3 |       1 |        5 |       10 |        5 |        7 |        2 |        5 |       1 |        2 |        1 |        3 |        1 |        3 |        0 |       0 |        1 |        1 |        6 |        5 |        1 |        0 |       0 |      0 |      0 |     13 |     17 |      3 |      9 |      1 |    102 |      0 |      0 |      1 |      9 |     10 |      5 |      6 |      5 |     96 |      0 |      0 |      1 |     14 |      6 |      2 |      3 |      2 |     36 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4870900 |      87 |     38 |     37 |     2 |    0 |     2 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     43 |     44 |       1 |       2 |       0 |       0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        5 |        1 |        2 |       4 |        0 |        1 |        1 |        4 |        7 |        6 |       4 |        0 |        0 |        3 |        3 |        5 |        4 |       2 |        1 |        1 |        6 |        4 |        2 |        4 |       2 |        0 |        2 |        2 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      6 |      4 |      3 |      2 |     22 |      0 |      0 |      0 |      5 |      7 |      0 |      0 |      0 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4871000 |     144 |     48 |     71 |     6 |    0 |     1 |    0 |    0 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     68 |     76 |       4 |       6 |       2 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        2 |        2 |        4 |        3 |        4 |        4 |       4 |        1 |        1 |        2 |        7 |        3 |        6 |       5 |        3 |        2 |        4 |        8 |        5 |        6 |       6 |        3 |        7 |        2 |        5 |        1 |       13 |       6 |        2 |        2 |        1 |        2 |        0 |        1 |       0 |        2 |        2 |        3 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     10 |      2 |      4 |      0 |      1 |     31 |      0 |      0 |      0 |      7 |     10 |      6 |      1 |      2 |     45 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4871100 |      44 |     17 |     14 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     19 |     25 |       3 |       4 |       1 |       0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        0 |        1 |        2 |       1 |        2 |        3 |        1 |        1 |        2 |        1 |       1 |        3 |        0 |        1 |        4 |        0 |        0 |       2 |        0 |        1 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        3 |        0 |        1 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      5 |      0 |      1 |      0 |      2 |      6 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4872000 |     286 |    108 |    101 |     6 |    0 |     4 |    3 |    3 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    126 |    160 |      21 |      12 |      10 |       1 |      1 |      4 |      3 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       1 |      4 |      4 |      0 |      0 |       10 |        9 |        9 |        5 |        3 |        6 |       3 |        8 |        7 |       15 |       15 |        4 |       10 |       4 |        4 |        8 |       10 |       10 |        6 |        6 |       3 |       11 |        7 |       13 |        9 |        4 |        8 |       2 |        2 |        4 |        5 |       10 |        2 |        2 |       1 |        7 |        6 |        6 |        8 |        6 |        0 |       1 |        0 |        1 |        3 |        0 |        3 |        1 |       0 |        1 |        3 |        3 |        1 |        0 |        1 |       0 |      0 |      1 |     18 |     16 |      2 |      3 |      0 |     68 |      0 |      0 |      0 |     18 |     11 |      3 |      3 |      1 |     65 |      0 |      0 |      0 |     12 |      2 |      3 |      2 |      0 |     41 |      0 |      0 |      1 |      3 |      6 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4873000 |     276 |    120 |     92 |    10 |    0 |     1 |    2 |    0 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    120 |    156 |      15 |      10 |       8 |       5 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       5 |       1 |      0 |      0 |      0 |      0 |        5 |       10 |        6 |        8 |        4 |        3 |       4 |        8 |       19 |       16 |       14 |        8 |        6 |       9 |        5 |        5 |        8 |       15 |        8 |        0 |       4 |        4 |        5 |        8 |       11 |        6 |        8 |       5 |        7 |        7 |        0 |        7 |        3 |        1 |       1 |        5 |        7 |        4 |        6 |        0 |        1 |       0 |        3 |        3 |        1 |        2 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |     13 |     14 |      4 |      3 |      5 |     80 |      0 |      0 |      1 |     18 |      9 |      4 |      1 |      2 |     57 |      0 |      0 |      0 |     12 |      3 |      3 |      0 |      1 |     30 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 4874000 |     305 |     88 |    176 |     5 |    0 |     5 |    0 |    0 |     2 |    0 |     29 |    0 |    0 |    0 |    0 |    148 |    157 |       8 |       8 |       0 |       0 |      5 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        2 |        5 |        5 |        9 |        9 |       7 |        3 |        1 |        6 |       11 |       14 |        9 |       5 |        3 |        5 |       12 |       19 |       13 |       27 |       9 |        3 |        3 |        9 |       15 |       16 |       27 |      15 |        4 |        1 |        2 |        1 |        3 |        3 |       0 |        3 |        1 |        1 |        5 |        1 |        4 |       0 |        0 |        0 |        2 |        1 |        2 |        2 |       0 |        2 |        0 |        0 |        0 |        2 |        1 |       0 |      0 |      1 |      9 |     13 |      4 |      6 |      3 |     52 |      0 |      0 |      0 |     17 |     35 |      1 |      7 |      4 |    112 |      0 |      0 |      2 |      3 |      8 |      1 |      0 |      2 |     13 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4874100 |     274 |    103 |    138 |     3 |    0 |     0 |    0 |    0 |     2 |    0 |     28 |    0 |    0 |    0 |    0 |    123 |    151 |      11 |       6 |       3 |       0 |      6 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        1 |       18 |        6 |        6 |       1 |        5 |        5 |        8 |       19 |        3 |       14 |      11 |        3 |        2 |        7 |       14 |       12 |       19 |      11 |        2 |        2 |        6 |       10 |       17 |       14 |      19 |        3 |        2 |        1 |        3 |        2 |        1 |       2 |        4 |        0 |        3 |        3 |        2 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     11 |     15 |      7 |      7 |      3 |     60 |      0 |      0 |      0 |     13 |     12 |      9 |      5 |      5 |     94 |      0 |      0 |      0 |      4 |      5 |      1 |      1 |      3 |     14 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4875000 |     438 |    173 |    156 |    12 |    0 |     4 |    2 |    2 |     8 |    0 |     81 |    0 |    0 |    0 |    0 |    178 |    260 |      28 |      14 |       4 |       3 |      9 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |       12 |       10 |       13 |       22 |        5 |        5 |       1 |       16 |       27 |       20 |       14 |       16 |        7 |       5 |        9 |       14 |       10 |        7 |        5 |        6 |       3 |       15 |       14 |       28 |       13 |       12 |       12 |       8 |        9 |       11 |       10 |        6 |        3 |        2 |       0 |        9 |       18 |        8 |        1 |        1 |        3 |       0 |        1 |        8 |        4 |        1 |        1 |        0 |       0 |        4 |        5 |        1 |        1 |        1 |        1 |       0 |      0 |      1 |     18 |     26 |      4 |      1 |      0 |    123 |      0 |      0 |      1 |     25 |     18 |      2 |      4 |      1 |    105 |      0 |      0 |      0 |     10 |      5 |      1 |      0 |      0 |     65 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 4875200 |     274 |    112 |    115 |     3 |    0 |     4 |    1 |    2 |     2 |    0 |     35 |    0 |    0 |    0 |    0 |    126 |    148 |      16 |       9 |       0 |       2 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        5 |        9 |       14 |        9 |        8 |       3 |        1 |       11 |       12 |        9 |       15 |        8 |       6 |        5 |        7 |        9 |        4 |       14 |        6 |       8 |        3 |        5 |        7 |       16 |       12 |       12 |       7 |        3 |        1 |        5 |        3 |        2 |        2 |       0 |        7 |        5 |        2 |        2 |        3 |        0 |       0 |        0 |        3 |        1 |        0 |        2 |        1 |       0 |        0 |        2 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      8 |     19 |      7 |      1 |     12 |     65 |      0 |      0 |      0 |     10 |     11 |      8 |      3 |      5 |     78 |      0 |      0 |      1 |      4 |      3 |      2 |      0 |      2 |     23 |      0 |      0 |      1 |      1 |      5 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4877000 |      45 |     18 |     17 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     20 |     25 |       1 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        2 |        0 |        0 |        2 |       1 |        0 |        1 |        3 |        1 |        1 |        4 |       3 |        2 |        0 |        2 |        2 |        2 |        0 |       0 |        3 |        0 |        1 |        3 |        1 |        1 |       0 |        1 |        3 |        0 |        3 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |     10 |      0 |      0 |      0 |      1 |      1 |      1 |      3 |      0 |     11 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4877100 |      91 |     44 |     26 |     1 |    0 |     0 |    1 |    0 |     3 |    0 |     16 |    0 |    0 |    0 |    0 |     45 |     46 |       5 |       3 |       0 |       0 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        5 |        6 |        0 |        4 |       1 |        4 |        2 |        7 |        6 |        0 |        2 |       3 |        2 |        4 |        4 |        1 |        3 |        1 |       1 |        0 |        1 |        4 |        1 |        2 |        2 |       0 |        1 |        2 |        1 |        3 |        0 |        0 |       0 |        3 |        2 |        2 |        0 |        1 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      7 |      0 |      0 |      2 |     28 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      4 |     15 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4877200 |      20 |      9 |      4 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |      8 |     12 |       3 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        3 |        1 |       1 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4877300 |     106 |     42 |     42 |     3 |    0 |     0 |    1 |    2 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     23 |     83 |       6 |       8 |       5 |       2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |        8 |       18 |        8 |        3 |        0 |        0 |       1 |        4 |        5 |        4 |        0 |        0 |        0 |       0 |        9 |       17 |        3 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        4 |        8 |        2 |        0 |        0 |        0 |       0 |        0 |        4 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     34 |      0 |      0 |      0 |      6 |      1 |      0 |      0 |      0 |     35 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4878000 |     181 |     56 |     79 |     8 |    0 |     1 |    1 |    1 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |     85 |     96 |       8 |       9 |       1 |       0 |      2 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        5 |        3 |        4 |        5 |        4 |       1 |        2 |        3 |        7 |       11 |        5 |        3 |       1 |        3 |       10 |        7 |        5 |        7 |        5 |       3 |        3 |       10 |        6 |        4 |        5 |        8 |       3 |        1 |        3 |        1 |        6 |        1 |        2 |       0 |        3 |        5 |        5 |        4 |        3 |        1 |       0 |        2 |        0 |        1 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        4 |        0 |       0 |      0 |      0 |      8 |      5 |      3 |      3 |      4 |     33 |      0 |      0 |      1 |      8 |     10 |      6 |      3 |      2 |     49 |      0 |      0 |      1 |      7 |      4 |      3 |      0 |      0 |     20 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4906200 |       6 |      2 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      4 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4928000 |     163 |     49 |     92 |     2 |    0 |     0 |    1 |    0 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     78 |     85 |       3 |       0 |       1 |       0 |      6 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        4 |        1 |        9 |       5 |        1 |        4 |        2 |        6 |        6 |        5 |       5 |        3 |        2 |        2 |        9 |       10 |       14 |       9 |        1 |        2 |        5 |       12 |        5 |       17 |       1 |        0 |        0 |        2 |        2 |        1 |        2 |       0 |        0 |        2 |        4 |        5 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      7 |      8 |      1 |      1 |      3 |     28 |      0 |      0 |      0 |     13 |     20 |      4 |      2 |      4 |     49 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      2 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4928100 |     102 |     25 |     54 |     1 |    0 |     1 |    1 |    0 |     2 |    0 |     18 |    0 |    0 |    0 |    0 |     45 |     57 |       1 |       1 |       2 |       0 |      2 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        1 |        2 |        2 |       1 |        0 |        1 |        5 |        2 |        3 |        2 |       2 |        1 |        3 |        0 |        6 |        2 |        8 |       2 |        2 |        3 |        8 |        5 |        2 |        8 |       4 |        3 |        1 |        1 |        2 |        3 |        1 |       0 |        1 |        1 |        1 |        2 |        1 |        0 |       1 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      0 |      1 |      2 |     17 |      0 |      0 |      0 |      7 |      5 |      1 |      1 |      3 |     37 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4929000 |     668 |    207 |    351 |    12 |    0 |     2 |    2 |    1 |     4 |    0 |     89 |    0 |    0 |    0 |    0 |    321 |    347 |       9 |       5 |       6 |       1 |     19 |     10 |     11 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      4 |      1 |        6 |        8 |        9 |       26 |       17 |       19 |      12 |        3 |        2 |       17 |       27 |       28 |       19 |      14 |       10 |       15 |       33 |       31 |       22 |       39 |      20 |        6 |       18 |       22 |       30 |       32 |       40 |      33 |        6 |        4 |        7 |       14 |        7 |        5 |       0 |       10 |        4 |       11 |       12 |        4 |        4 |       1 |        2 |        1 |        4 |        1 |        0 |        3 |       0 |        0 |        2 |        4 |        1 |        3 |        0 |       0 |      0 |      0 |     18 |     34 |     12 |     11 |     11 |    121 |      0 |      0 |      1 |     31 |     47 |      8 |     13 |     14 |    237 |      0 |      0 |      0 |      8 |     17 |      2 |      6 |      1 |     55 |      0 |      0 |      0 |      6 |      6 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4930000 |      85 |     26 |     43 |     1 |    0 |     1 |    1 |    0 |     3 |    0 |     10 |    0 |    0 |    0 |    0 |     43 |     42 |       3 |       3 |       1 |       0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        4 |        3 |        3 |       1 |        2 |        0 |        3 |        1 |        4 |        2 |       1 |        2 |        1 |        3 |        3 |        4 |        8 |       1 |        0 |        0 |        1 |        5 |        2 |        8 |       5 |        2 |        0 |        1 |        2 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        2 |       0 |      0 |      0 |      1 |      3 |      3 |      1 |      3 |     15 |      0 |      0 |      0 |      6 |      6 |      2 |      5 |      2 |     22 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4930100 |       4 |      3 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4931000 |     306 |     84 |    177 |     6 |    0 |     1 |    1 |    0 |     0 |    0 |     37 |    0 |    0 |    0 |    0 |    155 |    151 |       3 |       0 |       1 |       1 |     12 |     17 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        5 |        5 |        9 |       11 |       4 |        1 |        5 |        3 |       13 |       14 |        9 |       4 |       10 |        6 |       14 |       18 |       22 |       14 |      14 |        1 |        3 |        8 |       21 |       15 |       19 |      12 |        1 |        3 |        1 |        6 |        2 |        3 |       1 |        3 |        2 |        4 |        7 |        3 |        0 |       1 |        1 |        0 |        2 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      1 |     12 |     18 |      2 |      4 |      5 |     42 |      0 |      0 |      0 |     20 |     35 |     11 |      7 |      5 |     99 |      0 |      0 |      0 |      5 |      4 |      3 |      0 |      1 |     24 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4931100 |     281 |     74 |    155 |     3 |    0 |     1 |    5 |    0 |     2 |    0 |     41 |    0 |    0 |    0 |    0 |    143 |    138 |       4 |       6 |       1 |       0 |      3 |     10 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        3 |       11 |        8 |        3 |       5 |        2 |        2 |       10 |       12 |        6 |        4 |       5 |        3 |        4 |       11 |       18 |       20 |       16 |       7 |        0 |        3 |        9 |       16 |       14 |       23 |      11 |        1 |        2 |        8 |       11 |        3 |        0 |       1 |        1 |        0 |        5 |        5 |        2 |        0 |       2 |        0 |        3 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        2 |        2 |        0 |       0 |      0 |      0 |     13 |     15 |      4 |      1 |      5 |     36 |      0 |      0 |      0 |     20 |     27 |      6 |      6 |     10 |     86 |      0 |      0 |      1 |      4 |      3 |      6 |      2 |      3 |     22 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4931900 |      31 |      4 |     23 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     13 |     18 |       1 |       2 |       0 |       0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        3 |        2 |        0 |       3 |        2 |        0 |        2 |        3 |        2 |        3 |       2 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |     19 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4932000 |     118 |     27 |     68 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     60 |     58 |       3 |       1 |       2 |       0 |      5 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        1 |        4 |        2 |        3 |        1 |       0 |        0 |        1 |        3 |        5 |        3 |        2 |       2 |        2 |        3 |        6 |        6 |       10 |       12 |       1 |        1 |        3 |        1 |        4 |        6 |        7 |       6 |        1 |        3 |        2 |        1 |        1 |        0 |       0 |        3 |        3 |        3 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |      3 |      0 |      2 |      2 |     15 |      0 |      0 |      0 |      8 |     11 |      2 |      1 |      2 |     44 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      1 |     14 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4932100 |      24 |      9 |     15 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |     10 |     14 |       1 |       1 |       0 |       0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        1 |        1 |        0 |        2 |        0 |        2 |       1 |        1 |        0 |        0 |        2 |        1 |        3 |       1 |        0 |        1 |        1 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4932200 |       5 |      1 |      2 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4932300 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4933000 |     268 |     67 |    170 |     2 |    0 |     1 |    1 |    0 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |    135 |    133 |       1 |       1 |       2 |       0 |      7 |      5 |      5 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        1 |        8 |        4 |        3 |       6 |        3 |        1 |        4 |       13 |        4 |        6 |       8 |        6 |        5 |       11 |       16 |       15 |       19 |      15 |        6 |        5 |       14 |       16 |       16 |       13 |      13 |        6 |        3 |        3 |        2 |        2 |        2 |       0 |        0 |        2 |        3 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      6 |      7 |      2 |      1 |      3 |     48 |      0 |      0 |      1 |     17 |     35 |      6 |      2 |      6 |    103 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      2 |     16 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
| 4933100 |      94 |     33 |     34 |     1 |    0 |     1 |    4 |    0 |     3 |    0 |     18 |    0 |    0 |    0 |    0 |     47 |     47 |       5 |       2 |       2 |       0 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        3 |        3 |        2 |        3 |       3 |        0 |        3 |        1 |        5 |        2 |        3 |       2 |        0 |        1 |        2 |        5 |        6 |        4 |       1 |        0 |        2 |        2 |        4 |        2 |        4 |       1 |        2 |        1 |        0 |        1 |        3 |        1 |       0 |        2 |        1 |        0 |        3 |        2 |        0 |       2 |        2 |        0 |        0 |        0 |        0 |        1 |       0 |        3 |        1 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      0 |     10 |      2 |      1 |      3 |     17 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |     30 |      0 |      0 |      0 |      2 |      5 |      3 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 4933200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4933300 |      13 |      1 |      9 |     0 |    0 |     0 |    0 |    0 |     2 |    0 |      1 |    0 |    0 |    0 |    0 |      5 |      8 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4933400 |      22 |      7 |     12 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     13 |      9 |       0 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        2 |        0 |       1 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        2 |        2 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      4 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4939800 |      63 |     28 |     28 |     2 |    0 |     0 |    1 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     27 |     36 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        4 |        2 |        2 |       1 |        4 |        2 |        1 |        4 |        3 |        2 |       0 |        0 |        1 |        0 |        1 |        3 |        4 |       4 |        1 |        2 |        1 |        4 |        3 |        4 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      6 |      6 |      2 |      1 |      1 |     12 |      0 |      0 |      0 |      1 |      9 |      2 |      0 |      1 |     15 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4939900 |     163 |     55 |     86 |     0 |    0 |     0 |    1 |    0 |     2 |    0 |     19 |    0 |    0 |    0 |    0 |     71 |     92 |       0 |       1 |       1 |       0 |      6 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        0 |        2 |        5 |        4 |        6 |       3 |        5 |        2 |        5 |       10 |        6 |        2 |       4 |        2 |        2 |        6 |        8 |        8 |        4 |       7 |        3 |        3 |        7 |       10 |       10 |        9 |       7 |        0 |        2 |        5 |        1 |        2 |        2 |       0 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      9 |      5 |      2 |      3 |     29 |      0 |      0 |      0 |     14 |     16 |      4 |      0 |      5 |     47 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      1 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4940000 |     215 |     70 |    105 |     1 |    0 |     1 |    1 |    1 |     3 |    0 |     33 |    0 |    0 |    0 |    0 |    105 |    110 |       4 |       3 |       5 |       1 |      5 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        2 |        4 |       10 |        4 |        9 |       2 |        2 |        4 |        3 |       13 |        9 |        5 |       2 |        3 |        3 |        6 |       16 |       11 |        6 |       7 |        2 |        3 |       11 |       17 |        7 |        5 |       8 |        2 |        2 |        3 |        5 |        3 |        2 |       0 |        1 |        3 |        4 |        4 |        3 |        0 |       1 |        2 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |     14 |      5 |      4 |      2 |      3 |     41 |      0 |      0 |      0 |     15 |     16 |      7 |      2 |      8 |     57 |      0 |      0 |      0 |      3 |      6 |      5 |      0 |      0 |     19 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4940900 |      95 |     30 |     50 |     2 |    0 |     0 |    1 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     51 |     44 |       2 |       3 |       0 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        3 |        3 |        2 |        3 |       1 |        0 |        1 |        1 |        5 |        1 |        6 |       3 |        0 |        3 |        5 |        6 |        3 |        8 |       4 |        1 |        0 |        3 |        5 |        2 |        6 |       4 |        2 |        0 |        0 |        2 |        2 |        1 |       0 |        1 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |      6 |      0 |      0 |      1 |     16 |      0 |      0 |      0 |      3 |     11 |      3 |      4 |      1 |     28 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4941000 |     210 |     64 |    109 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |     97 |    113 |       3 |       2 |       0 |       0 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      0 |        3 |        3 |        4 |        6 |        1 |        7 |       2 |        3 |        1 |        7 |       12 |        4 |        8 |       3 |        4 |        1 |        7 |       15 |       12 |        9 |       6 |        4 |        3 |       10 |       13 |        4 |       14 |       7 |        5 |        0 |        3 |        4 |        2 |        0 |       0 |        6 |        1 |        4 |        6 |        0 |        2 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |     14 |      2 |      0 |      1 |     39 |      0 |      0 |      1 |     12 |     17 |      6 |      4 |     11 |     58 |      0 |      0 |      0 |      7 |      4 |      2 |      4 |      2 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 4941100 |      51 |     12 |     31 |     1 |    0 |     4 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     29 |     22 |       0 |       0 |       0 |       1 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        1 |        1 |       4 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        1 |        1 |        2 |        6 |        2 |        3 |       1 |        0 |        0 |        2 |        3 |        4 |        4 |       2 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      8 |      0 |      0 |      0 |      4 |      3 |      1 |      3 |      2 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4942000 |     375 |     95 |    231 |    10 |    0 |     1 |    1 |    0 |     1 |    0 |     36 |    0 |    0 |    0 |    0 |    176 |    199 |       6 |       1 |       1 |       1 |     11 |     23 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        4 |        6 |       10 |       10 |       6 |        2 |        4 |        7 |       10 |       10 |       14 |       8 |        6 |        8 |        9 |       23 |       21 |       27 |      16 |        7 |       10 |       13 |       22 |       25 |       28 |      16 |        1 |        2 |        4 |        6 |        4 |        4 |       0 |        5 |        2 |        1 |        4 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        2 |       0 |        1 |        1 |        0 |        5 |        1 |        0 |       0 |      0 |      0 |      7 |     15 |      2 |      5 |      5 |     61 |      0 |      0 |      2 |     28 |     37 |      8 |      4 |     13 |    139 |      0 |      0 |      0 |      4 |      3 |      5 |      0 |      2 |     22 |      0 |      0 |      0 |      1 |      4 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4945000 |      73 |     22 |     38 |     1 |    0 |     0 |    1 |    0 |     2 |    0 |      9 |    0 |    0 |    0 |    0 |     41 |     32 |       1 |       1 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        3 |        1 |       2 |        0 |        1 |        3 |        3 |        2 |        3 |       1 |        1 |        2 |        3 |        4 |        3 |        9 |       1 |        1 |        1 |        2 |        6 |        1 |        3 |       1 |        1 |        0 |        1 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |        2 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |     16 |      0 |      0 |      0 |      2 |      9 |      3 |      2 |      0 |     22 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4946000 |     217 |     75 |    106 |     6 |    0 |     5 |    1 |    1 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |    100 |    117 |       0 |       8 |       1 |       1 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        3 |       10 |        5 |        5 |       8 |        2 |        5 |        7 |        5 |        8 |        5 |       9 |        1 |        8 |        7 |       11 |        7 |       10 |       5 |        4 |        5 |       10 |       10 |        8 |       11 |       9 |        0 |        0 |        3 |        5 |        4 |        0 |       0 |        2 |        1 |        0 |        3 |        4 |        0 |       0 |        1 |        0 |        0 |        2 |        1 |        1 |       0 |        2 |        0 |        2 |        2 |        0 |        3 |       0 |      0 |      0 |      7 |      6 |      5 |      0 |      9 |     48 |      0 |      0 |      1 |     12 |     18 |      7 |      0 |      6 |     62 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      2 |     12 |      0 |      0 |      0 |      1 |      7 |      3 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4946100 |     557 |    160 |    285 |    15 |    0 |     9 |    3 |    1 |     9 |    0 |     75 |    0 |    0 |    0 |    0 |    270 |    287 |       7 |      14 |       7 |       1 |      9 |     12 |      4 |      1 |      2 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       1 |      2 |      0 |      0 |      0 |        0 |        7 |        5 |       23 |       12 |        6 |      13 |        5 |        7 |       12 |       21 |       18 |       10 |      21 |       10 |       14 |       29 |       27 |       20 |       21 |      20 |       11 |       11 |       27 |       31 |       16 |       20 |      28 |        4 |        7 |        9 |       10 |        5 |        7 |       0 |        5 |        2 |        8 |       11 |        3 |        2 |       2 |        2 |        5 |        4 |        7 |        2 |        1 |       0 |        3 |        1 |        4 |        4 |        3 |        1 |       0 |      0 |      1 |     16 |     17 |      5 |     10 |      7 |    104 |      0 |      0 |      2 |     19 |     48 |     14 |     14 |     10 |    178 |      0 |      0 |      1 |     14 |      9 |      5 |      3 |      1 |     42 |      0 |      0 |      0 |      6 |      8 |      2 |      1 |      0 |     20 |      0 |     37 | s03      | R    |
| 4946200 |       3 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4946300 |      28 |     13 |      8 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      5 |    0 |    0 |    0 |    0 |     11 |     17 |       3 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        3 |       0 |        0 |        0 |        1 |        1 |        0 |        7 |       0 |        0 |        0 |        2 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4946400 |     106 |     41 |     38 |     3 |    0 |     4 |    1 |    1 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     44 |     62 |       4 |       5 |       4 |       2 |      0 |      3 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        1 |        0 |        0 |        2 |        4 |        8 |       0 |        0 |        0 |        3 |        6 |        1 |       12 |       4 |        0 |        2 |        2 |        3 |        4 |        7 |       0 |        1 |        1 |        2 |        3 |        6 |        4 |       3 |        1 |        2 |        3 |        3 |        0 |        1 |       0 |        0 |        1 |        0 |        2 |        3 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        2 |        2 |        2 |        1 |       0 |      0 |      0 |     11 |      7 |      3 |      0 |      3 |     17 |      0 |      0 |      0 |      6 |      6 |      1 |      3 |      1 |     21 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |     12 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4946500 |      12 |     10 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      7 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        3 |        1 |        1 |        0 |        1 |       1 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4946600 |       6 |      3 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      2 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4947000 |     176 |     48 |     90 |     2 |    0 |     0 |    2 |    0 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |     80 |     96 |       2 |       5 |       2 |       2 |      1 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        0 |        1 |        4 |        4 |        5 |       5 |        0 |        3 |        3 |       10 |        3 |        4 |       5 |        6 |        4 |        6 |       12 |       10 |        2 |       6 |        2 |        2 |        4 |        9 |       12 |       11 |       4 |        1 |        3 |        1 |        2 |        3 |        2 |       0 |        3 |        4 |        2 |        5 |        2 |        5 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     11 |      4 |      2 |      0 |      1 |     30 |      0 |      0 |      0 |      7 |     11 |      5 |      3 |      2 |     62 |      0 |      0 |      1 |      6 |      1 |      2 |      0 |      0 |     23 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4947100 |      87 |     33 |     43 |     0 |    0 |     1 |    1 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     46 |     41 |       4 |       0 |       1 |       0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        2 |        1 |        1 |        5 |       2 |        0 |        4 |        0 |        4 |        2 |        3 |       6 |        3 |        1 |        5 |        6 |        6 |        4 |       1 |        1 |        2 |        3 |        4 |        6 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       1 |        0 |        3 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      3 |      1 |      2 |     27 |      0 |      0 |      0 |      7 |      7 |      2 |      2 |      3 |     22 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4947200 |     190 |     52 |    113 |     3 |    0 |     0 |    0 |    1 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     95 |     95 |       5 |       1 |       0 |       0 |      5 |      8 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        3 |        4 |        7 |        5 |       3 |        0 |        3 |        3 |        6 |       10 |        5 |       3 |        4 |        2 |       11 |        7 |        9 |       21 |       9 |        1 |        2 |        8 |        7 |        8 |       11 |      13 |        0 |        2 |        1 |        4 |        2 |        1 |       0 |        2 |        3 |        3 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |      6 |      5 |      2 |      5 |     31 |      0 |      0 |      1 |     11 |     10 |      3 |      4 |      3 |     81 |      0 |      0 |      0 |      4 |      1 |      1 |      2 |      2 |     11 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4948000 |     550 |    234 |    192 |    17 |    0 |     3 |    2 |    1 |     3 |    0 |     98 |    0 |    0 |    0 |    0 |    230 |    320 |      22 |      22 |      11 |       2 |      6 |     14 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |       10 |       12 |       20 |       18 |        8 |       11 |       8 |       16 |       22 |       22 |       36 |       20 |       19 |      12 |       12 |       18 |       18 |       18 |       12 |        6 |       6 |       15 |       17 |       19 |       25 |       12 |        8 |       6 |        6 |       10 |       10 |       10 |        2 |        0 |       1 |       22 |       13 |       11 |       10 |        2 |        1 |       0 |        0 |        2 |        6 |        4 |        1 |        1 |       0 |        3 |        2 |        2 |        1 |        3 |        0 |       1 |      0 |      0 |     23 |     32 |     11 |      3 |      4 |    161 |      0 |      0 |      1 |     22 |     22 |      9 |      1 |      8 |    129 |      0 |      0 |      0 |      8 |      9 |      0 |      1 |      0 |     80 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 4948100 |     177 |     68 |     79 |     5 |    0 |     0 |    1 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     85 |     92 |      11 |       5 |       2 |       2 |      2 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        5 |        3 |        8 |        1 |        6 |       3 |        4 |        1 |        9 |        5 |        6 |        6 |       9 |        3 |        3 |        4 |        9 |        6 |       10 |       3 |        2 |        5 |        5 |       11 |        7 |        6 |       5 |        2 |        3 |        5 |        3 |        3 |        1 |       0 |        0 |        2 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      8 |      7 |      2 |      0 |      1 |     50 |      0 |      0 |      0 |      4 |     24 |      7 |      3 |      7 |     34 |      0 |      0 |      0 |      2 |      4 |      3 |      0 |      1 |     14 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4949000 |     557 |    173 |    297 |     9 |    0 |     3 |    4 |    2 |     3 |    0 |     66 |    0 |    0 |    0 |    0 |    257 |    300 |      16 |      14 |       5 |       2 |      4 |     11 |      4 |      4 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      2 |      1 |      1 |      0 |       1 |       2 |       1 |       0 |      1 |      1 |      0 |      0 |        1 |        1 |        5 |       20 |       13 |       21 |      11 |        6 |        2 |       12 |       24 |       19 |       23 |      15 |        4 |       12 |       22 |       27 |       18 |       39 |      12 |       12 |        6 |       26 |       23 |       34 |       46 |      16 |        5 |        1 |        6 |       13 |        6 |        3 |       2 |        5 |        3 |        5 |        4 |        4 |        7 |       2 |        2 |        3 |        4 |        3 |        3 |        0 |       0 |        1 |        1 |        2 |        2 |        0 |        0 |       0 |      0 |      4 |     16 |     21 |     11 |      7 |     10 |    104 |      0 |      0 |      2 |     40 |     36 |     18 |      6 |     16 |    179 |      0 |      0 |      1 |     15 |      5 |      1 |      1 |      1 |     42 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 4949100 |     106 |     21 |     69 |     1 |    0 |     2 |    0 |    0 |     1 |    0 |     12 |    0 |    0 |    0 |    0 |     52 |     54 |       0 |       0 |       0 |       0 |      0 |      9 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      4 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        0 |        2 |       1 |        2 |        2 |        2 |        3 |        3 |        2 |       2 |        3 |        3 |        4 |        7 |        7 |        8 |       7 |        1 |        4 |        2 |        5 |        5 |        8 |       5 |        2 |        1 |        1 |        1 |        0 |        1 |       0 |        2 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      5 |      0 |      0 |      1 |     12 |      0 |      0 |      1 |     10 |     11 |      1 |      0 |      1 |     45 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4949800 |     157 |     48 |     73 |     4 |    0 |     2 |    1 |    2 |     2 |    0 |     25 |    0 |    0 |    0 |    0 |     73 |     84 |       7 |       4 |       1 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        5 |        7 |        2 |        4 |       0 |        1 |        1 |        8 |        8 |        7 |        2 |       0 |        2 |        5 |        2 |        4 |       10 |        5 |       3 |        2 |        5 |        3 |        7 |       12 |       11 |       2 |        0 |        2 |        3 |        3 |        2 |        2 |       0 |        2 |        2 |        2 |        3 |        2 |        2 |       0 |        1 |        2 |        1 |        2 |        3 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      2 |      6 |      8 |      2 |      3 |      3 |     24 |      0 |      0 |      0 |      6 |     15 |      3 |      0 |      0 |     49 |      0 |      0 |      0 |      3 |      2 |      3 |      0 |      0 |     17 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 4949900 |     194 |     61 |    102 |     4 |    0 |     2 |    1 |    1 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     98 |     96 |       1 |       1 |       1 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        4 |        4 |        6 |        4 |        7 |       3 |        0 |        2 |        3 |        9 |        5 |        8 |       6 |        3 |        7 |       10 |        3 |       10 |       15 |       6 |        1 |        1 |       10 |       12 |        5 |       14 |       5 |        1 |        1 |        1 |        7 |        0 |        1 |       1 |        2 |        2 |        2 |        2 |        2 |        0 |       0 |        1 |        3 |        0 |        0 |        0 |        0 |       0 |        0 |        3 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |      3 |     11 |      1 |      4 |      1 |     39 |      0 |      0 |      0 |      9 |     10 |      5 |      6 |      4 |     68 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |     18 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 4950000 |     232 |     81 |    125 |     0 |    0 |     2 |    1 |    0 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |    100 |    132 |       5 |       4 |       4 |       0 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        3 |        9 |        8 |        3 |       8 |        3 |        4 |        9 |       13 |        9 |        6 |       5 |        2 |        7 |       13 |       13 |        6 |       10 |       6 |        2 |        9 |       11 |       16 |        9 |       11 |      10 |        1 |        1 |        5 |        0 |        0 |        0 |       1 |        1 |        3 |        7 |        3 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      6 |      3 |      4 |     10 |      6 |     51 |      0 |      0 |      0 |      7 |     28 |      5 |      3 |      7 |     75 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |     17 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 4950100 |     175 |     65 |     84 |     6 |    0 |     1 |    1 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     82 |     93 |      16 |       3 |       0 |       0 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        4 |        3 |        4 |        9 |        4 |       4 |        1 |        2 |        9 |        9 |        6 |        7 |       2 |        0 |        4 |        6 |        8 |        7 |        7 |       9 |        2 |        3 |        6 |        8 |        8 |        9 |       7 |        0 |        0 |        3 |        3 |        1 |        0 |       1 |        1 |        0 |        4 |        2 |        1 |        1 |       1 |        1 |        1 |        2 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      3 |      8 |      8 |      3 |      0 |      1 |     42 |      0 |      0 |      1 |      7 |     12 |      6 |      3 |     11 |     44 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      1 |     12 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4950200 |      55 |     14 |     30 |     0 |    0 |     2 |    1 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     29 |     26 |       1 |       0 |       0 |       1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        0 |        2 |        1 |        1 |        0 |       2 |        0 |        1 |        0 |        2 |        2 |        1 |       1 |        1 |        0 |        2 |        3 |        3 |        4 |       2 |        1 |        0 |        1 |        3 |        2 |        6 |       2 |        1 |        0 |        1 |        0 |        2 |        1 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |     10 |      0 |      0 |      1 |      5 |      5 |      3 |      2 |      3 |     11 |      0 |      0 |      0 |      2 |      1 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4950300 |      30 |      7 |     20 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     10 |     20 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       2 |        0 |        0 |        1 |        1 |        1 |        1 |       4 |        2 |        0 |        0 |        3 |        2 |        1 |       4 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      3 |      1 |      0 |      2 |      1 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4951100 |     107 |     37 |     56 |     0 |    0 |     2 |    1 |    0 |     2 |    0 |      9 |    0 |    0 |    0 |    0 |     51 |     56 |       1 |       2 |       2 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      1 |        0 |        0 |        3 |        4 |        3 |        3 |       2 |        1 |        1 |        3 |        7 |        4 |        3 |       3 |        0 |        2 |        3 |        6 |        8 |        5 |       4 |        0 |        3 |        1 |        8 |        5 |        5 |       6 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        2 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      7 |      3 |      1 |      3 |     18 |      0 |      0 |      0 |      4 |      7 |      1 |      7 |      1 |     36 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4952000 |     542 |    191 |    243 |    11 |    0 |     3 |    3 |    3 |     6 |    0 |     82 |    0 |    0 |    0 |    0 |    247 |    295 |      13 |      10 |       6 |       1 |      7 |     14 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        7 |        5 |       20 |       16 |       13 |      11 |       10 |        6 |       12 |       28 |       23 |       15 |      19 |       10 |       11 |       12 |       25 |       20 |       23 |      15 |        8 |       10 |       19 |       26 |       19 |       28 |      17 |        4 |        4 |        7 |       12 |        9 |        2 |       0 |        5 |        6 |       10 |       11 |        7 |        5 |       0 |        1 |        6 |        1 |        5 |        1 |        1 |       0 |        3 |        3 |        1 |        3 |        1 |        0 |       0 |      0 |      0 |     29 |     20 |     10 |      7 |     12 |    113 |      0 |      0 |      0 |     22 |     33 |      4 |     12 |     18 |    154 |      0 |      0 |      0 |     16 |     10 |      8 |      2 |      6 |     40 |      0 |      0 |      0 |      3 |      8 |      4 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 4952100 |     100 |     39 |     38 |     0 |    0 |     2 |    0 |    2 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     49 |     51 |       8 |       0 |       3 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        2 |        3 |        3 |        3 |       2 |        0 |        2 |        5 |        4 |        1 |        3 |       8 |        1 |        3 |        1 |        9 |        5 |        0 |       1 |        3 |        2 |        1 |        6 |        2 |        2 |       2 |        1 |        1 |        2 |        3 |        0 |        1 |       1 |        1 |        0 |        2 |        2 |        2 |        2 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      0 |      1 |      1 |     30 |      0 |      0 |      0 |      7 |      7 |      0 |      1 |      1 |     22 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4952200 |      48 |     18 |     19 |     2 |    0 |     0 |    0 |    1 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     17 |     31 |       4 |       3 |       0 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        3 |        6 |        3 |        2 |        0 |       0 |        1 |        2 |        1 |        3 |        1 |        0 |       0 |        3 |        2 |        1 |        2 |        2 |        1 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      7 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4953000 |     251 |    106 |     94 |     5 |    0 |     5 |    0 |    0 |     3 |    0 |     38 |    0 |    0 |    0 |    0 |    121 |    130 |      26 |      18 |      10 |       2 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        8 |        5 |       13 |        9 |        4 |        4 |       2 |        8 |       19 |        9 |       12 |        6 |        4 |       3 |        6 |       10 |        8 |        7 |       14 |        5 |       1 |        8 |       11 |        8 |        6 |        2 |        6 |       2 |        0 |        8 |        3 |        5 |        0 |        3 |       0 |        3 |        5 |        5 |        3 |        3 |        0 |       0 |        1 |        0 |        2 |        2 |        1 |        0 |       0 |        1 |        1 |        4 |        1 |        0 |        0 |       0 |      0 |      1 |      9 |     13 |      8 |      2 |      1 |     72 |      0 |      0 |      0 |     15 |      5 |      4 |      0 |      3 |     67 |      0 |      0 |      1 |      6 |      4 |      0 |      0 |      1 |     26 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 4953300 |     195 |     82 |     67 |     5 |    0 |     3 |    0 |    0 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |     83 |    112 |      22 |       7 |       7 |       1 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        4 |       12 |        7 |       10 |        1 |        1 |       0 |        8 |       16 |        7 |        7 |        7 |        1 |       1 |        4 |       10 |        7 |        4 |        2 |        2 |       0 |        5 |       11 |       13 |        6 |        1 |        2 |       0 |        2 |        4 |        3 |        4 |        2 |        0 |       0 |        7 |       10 |        2 |        2 |        2 |        0 |       0 |        1 |        0 |        3 |        0 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     10 |     10 |      2 |      0 |      2 |     58 |      0 |      0 |      0 |     14 |      4 |      1 |      1 |      1 |     46 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      0 |     28 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4991000 |     351 |    122 |    168 |     9 |    0 |     1 |    2 |    1 |     2 |    0 |     46 |    0 |    0 |    0 |    0 |    158 |    193 |      19 |      18 |       4 |       2 |      4 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        5 |       13 |       14 |        5 |        9 |       4 |        0 |       10 |       16 |       17 |        4 |       12 |      13 |        7 |       15 |       19 |       12 |        9 |       12 |       6 |       10 |       13 |       20 |       16 |       10 |       12 |       7 |        3 |        5 |        4 |        8 |        2 |        0 |       1 |        3 |        8 |        5 |        4 |        2 |        1 |       0 |        1 |        0 |        3 |        1 |        0 |        0 |       0 |        4 |        1 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |     21 |     13 |      4 |      0 |      4 |     80 |      0 |      0 |      1 |     14 |     17 |      9 |      1 |      7 |    119 |      0 |      0 |      0 |      9 |      7 |      2 |      2 |      1 |     25 |      0 |      0 |      1 |      2 |      5 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 4992000 |     373 |    127 |    175 |     5 |    0 |     2 |    6 |    3 |     3 |    0 |     52 |    0 |    0 |    0 |    0 |    175 |    198 |      19 |       7 |       5 |       2 |      8 |      8 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       1 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        6 |        7 |        7 |       13 |       10 |      10 |        5 |        5 |       19 |        8 |        9 |       14 |      12 |        8 |       12 |       20 |       12 |       13 |        9 |       9 |        7 |       10 |       19 |       21 |       10 |       16 |       9 |        4 |        3 |       11 |        5 |        1 |        4 |       0 |        4 |        5 |        4 |        4 |        6 |        0 |       1 |        1 |        2 |        1 |        2 |        3 |        0 |       0 |        1 |        1 |        3 |        2 |        3 |        0 |       0 |      0 |      1 |      7 |     12 |      8 |      2 |      5 |     92 |      0 |      0 |      1 |     17 |     23 |     11 |     13 |      5 |    105 |      0 |      0 |      0 |      8 |      5 |      2 |      4 |      1 |     32 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      2 |     11 |      0 |     37 | s03      | R    |
| 4992100 |     471 |    169 |    199 |    14 |    0 |     3 |    3 |    3 |     3 |    0 |     77 |    0 |    0 |    0 |    0 |    224 |    247 |      30 |      18 |      13 |       6 |      2 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      1 |      0 |        4 |        9 |       17 |       18 |       15 |       14 |       7 |        4 |       16 |       12 |       18 |       15 |       13 |       7 |        4 |        6 |       21 |       23 |       13 |       13 |       6 |       15 |       13 |       15 |       24 |       16 |       18 |      12 |        8 |        8 |        9 |        8 |        7 |        1 |       0 |        4 |        7 |        6 |        9 |        7 |        3 |       0 |        1 |        3 |        4 |        3 |        1 |        1 |       0 |        0 |        3 |        1 |        6 |        1 |        2 |       0 |      0 |      0 |     24 |     16 |      4 |      5 |      3 |    117 |      0 |      0 |      1 |     26 |     21 |      8 |      5 |     12 |    126 |      0 |      0 |      1 |     13 |     10 |      4 |      1 |      2 |     46 |      0 |      0 |      1 |      7 |      5 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 4993000 |     297 |    119 |    124 |     3 |    0 |     5 |    2 |    0 |     3 |    0 |     41 |    0 |    0 |    0 |    0 |    147 |    150 |      14 |      12 |       7 |       4 |      6 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      2 |      0 |        0 |        8 |       15 |        8 |        3 |        6 |       7 |        2 |       13 |       18 |       13 |        4 |       11 |      11 |        5 |       11 |       17 |       16 |       10 |        8 |       2 |        3 |       11 |       15 |        2 |        9 |        9 |       6 |        3 |        5 |        4 |        4 |        2 |        1 |       1 |        2 |        5 |        5 |        4 |        3 |        2 |       0 |        1 |        2 |        2 |        4 |        0 |        1 |       1 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      1 |     20 |     21 |      6 |      1 |      2 |     68 |      0 |      0 |      1 |     14 |     17 |     12 |      2 |      8 |     70 |      0 |      0 |      0 |      6 |      6 |      0 |      1 |      0 |     28 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 4994000 |     378 |    147 |    141 |     7 |    0 |     7 |    1 |    2 |     3 |    0 |     70 |    0 |    0 |    0 |    0 |    168 |    210 |      39 |      22 |      15 |       4 |      4 |      5 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        4 |        7 |       12 |       13 |        6 |       10 |       4 |       10 |       16 |       20 |       15 |       13 |       13 |       4 |        8 |       12 |       19 |       12 |        6 |        3 |       4 |       10 |       21 |       24 |        7 |        4 |        9 |       2 |        5 |        7 |        9 |        9 |        6 |        0 |       0 |        8 |       10 |        7 |        4 |        5 |        0 |       0 |        2 |        4 |        3 |        3 |        0 |        0 |       0 |        2 |        2 |        1 |        2 |        1 |        0 |       0 |      0 |      3 |     27 |      9 |      3 |      3 |      5 |     97 |      0 |      0 |      1 |     26 |     19 |      1 |      1 |      2 |     91 |      0 |      0 |      1 |     16 |      2 |      4 |      1 |      0 |     46 |      0 |      0 |      1 |      5 |      4 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 4994100 |     130 |     55 |     50 |     2 |    0 |     1 |    0 |    1 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     51 |     79 |       7 |       5 |       2 |       0 |      3 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        6 |        2 |        4 |        5 |       1 |        3 |        3 |        5 |       12 |        3 |        6 |       2 |        2 |        2 |        2 |        4 |        5 |        1 |       1 |        6 |        6 |        6 |        6 |        3 |        6 |       0 |        2 |        3 |        4 |        2 |        0 |        0 |       0 |        2 |        4 |        2 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      8 |      7 |      0 |      0 |      0 |     39 |      0 |      0 |      0 |      2 |      3 |      3 |      0 |      2 |     40 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4994200 |      97 |     25 |     50 |     0 |    0 |     4 |    0 |    0 |     2 |    0 |     16 |    0 |    0 |    0 |    0 |     53 |     44 |       7 |       6 |       7 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        3 |        3 |        1 |        3 |       2 |        1 |        1 |        1 |        2 |        2 |        0 |       3 |        1 |        2 |        7 |        7 |        7 |        3 |       0 |        3 |        3 |        8 |        3 |        3 |        2 |       1 |        5 |        0 |        4 |        0 |        0 |        0 |       0 |        1 |        3 |        0 |        3 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     20 |      0 |      0 |      1 |     10 |      7 |      1 |      0 |      3 |     28 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4995000 |     378 |    149 |    146 |    14 |    0 |     2 |    3 |    0 |     0 |    0 |     64 |    0 |    0 |    0 |    0 |    171 |    207 |      28 |      12 |       9 |       6 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      2 |      0 |      1 |      0 |        2 |       15 |       11 |       19 |        9 |        7 |       3 |        9 |       16 |       13 |       18 |       10 |        9 |       8 |        7 |       13 |       11 |       15 |        9 |        7 |       3 |       14 |       12 |       18 |       13 |       10 |       11 |       3 |        4 |        8 |        7 |        5 |        4 |        2 |       0 |        9 |        6 |        6 |        8 |        3 |        1 |       1 |        2 |        2 |        3 |        3 |        0 |        0 |       0 |        2 |        1 |        2 |        2 |        0 |        2 |       0 |      0 |      2 |     19 |     18 |      4 |      1 |      7 |     98 |      0 |      0 |      1 |     13 |     18 |     11 |      2 |      6 |     95 |      0 |      0 |      0 |      7 |     10 |      0 |      0 |      0 |     47 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4995100 |     526 |    171 |    244 |     6 |    0 |     5 |    1 |    5 |     2 |    0 |     92 |    0 |    0 |    0 |    0 |    244 |    282 |      24 |      17 |      15 |       2 |      2 |      9 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      10 |       8 |       3 |       1 |      9 |      9 |      6 |      0 |        6 |       10 |        4 |       19 |       20 |       10 |       5 |        9 |       13 |       13 |       32 |       14 |       13 |       3 |        5 |       14 |       28 |       26 |       24 |       19 |       0 |       14 |       15 |       26 |       33 |       19 |       18 |       3 |        7 |        5 |        7 |       14 |        5 |        7 |       0 |       10 |       10 |       11 |        7 |        7 |        2 |       0 |        0 |        4 |        2 |        2 |        1 |        0 |       0 |        3 |        2 |        3 |        2 |        0 |        0 |       0 |      0 |      1 |     38 |     13 |     12 |      4 |     17 |     86 |      0 |      0 |      1 |     37 |     25 |     16 |     16 |     37 |    112 |      0 |      0 |      0 |     24 |     13 |      3 |      0 |      6 |     46 |      0 |      0 |      3 |      6 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 4996000 |     146 |     63 |     49 |     4 |    0 |     3 |    1 |    1 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     68 |     78 |       7 |       8 |       6 |       3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        2 |        8 |        8 |        3 |       3 |        1 |        2 |        3 |       12 |       10 |        6 |       4 |        1 |        3 |        7 |        2 |        3 |        5 |       3 |        2 |        3 |        5 |        5 |        1 |        9 |       0 |        2 |        4 |        3 |        2 |        2 |        0 |       0 |        2 |        3 |        2 |        5 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        2 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     13 |     10 |      4 |      2 |      5 |     29 |      0 |      0 |      1 |      2 |      4 |      3 |      1 |      5 |     33 |      0 |      0 |      0 |      5 |      1 |      2 |      0 |      0 |     17 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 4996100 |     140 |     49 |     72 |     1 |    0 |     1 |    1 |    0 |     1 |    0 |     15 |    0 |    0 |    0 |    0 |     69 |     71 |       4 |       8 |       0 |       1 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       4 |       0 |       1 |      1 |      2 |      0 |      0 |        4 |        0 |        3 |        4 |        6 |        2 |       3 |        3 |        4 |        4 |        8 |        2 |        3 |       3 |        3 |        3 |        4 |       12 |        6 |        6 |       3 |        4 |        5 |        3 |       12 |        3 |        8 |       0 |        0 |        3 |        2 |        0 |        1 |        2 |       0 |        2 |        3 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      1 |      2 |      3 |      4 |     34 |      0 |      0 |      3 |      9 |      8 |      4 |      7 |      7 |     34 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4996200 |       4 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4996300 |     118 |     46 |     35 |     2 |    0 |     0 |    0 |    2 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |     56 |     62 |       8 |       3 |       1 |       2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        5 |        6 |        3 |        3 |       1 |        3 |        2 |        3 |        9 |        5 |        3 |       2 |        1 |        4 |        2 |        3 |        4 |        3 |       0 |        1 |        1 |        4 |        4 |        3 |        4 |       1 |        1 |        1 |        2 |        4 |        4 |        5 |       0 |        3 |        2 |        5 |        2 |        3 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      5 |      8 |      2 |      3 |      1 |     26 |      0 |      0 |      0 |      3 |      5 |      4 |      2 |      2 |     19 |      0 |      0 |      0 |      8 |      4 |      0 |      0 |      2 |     18 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 4996400 |      27 |     10 |     10 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     10 |     17 |       1 |       0 |       1 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        3 |        1 |        1 |       0 |        0 |        0 |        0 |        3 |        0 |        1 |       0 |        1 |        1 |        1 |        2 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      5 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4996500 |      61 |     21 |     29 |     1 |    0 |     0 |    1 |    0 |     1 |    0 |      8 |    0 |    0 |    0 |    0 |     33 |     28 |       2 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        0 |        0 |        3 |        3 |        1 |       1 |        0 |        0 |        1 |        2 |        4 |        0 |       3 |        2 |        0 |        3 |        2 |        2 |        6 |       0 |        1 |        0 |        2 |        2 |        2 |        4 |       3 |        0 |        1 |        1 |        2 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      0 |      0 |      0 |      2 |     14 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 4996600 |     100 |     19 |     59 |     3 |    0 |     1 |    0 |    0 |     2 |    0 |     16 |    0 |    0 |    0 |    0 |     48 |     52 |       0 |       0 |       2 |       0 |      1 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        1 |        3 |        3 |       0 |        0 |        1 |        1 |        1 |        3 |        2 |       1 |        0 |        5 |        5 |        8 |        2 |        8 |       2 |        1 |        2 |        4 |        4 |        3 |       12 |       3 |        0 |        1 |        0 |        0 |        3 |        2 |       0 |        1 |        2 |        1 |        2 |        2 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |     13 |      0 |      0 |      0 |      5 |      7 |      4 |      2 |      1 |     40 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 4996800 |     115 |     44 |     50 |     4 |    0 |     0 |    1 |    0 |     2 |    0 |     14 |    0 |    0 |    0 |    0 |     62 |     53 |      10 |       3 |       2 |       1 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        4 |        3 |        3 |        4 |        3 |       1 |        0 |        1 |        6 |        7 |        6 |        3 |       0 |        1 |        1 |        5 |        6 |        8 |        5 |       2 |        1 |        0 |        5 |        3 |        3 |        7 |       3 |        1 |        1 |        1 |        3 |        3 |        0 |       0 |        2 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       1 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      8 |      0 |      1 |      1 |     30 |      0 |      0 |      0 |      8 |      7 |      0 |      7 |      5 |     23 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 4996900 |      25 |      4 |     20 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     10 |     15 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        1 |        1 |        3 |       2 |        2 |        0 |        3 |        3 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      3 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4997000 |     221 |     86 |     92 |     7 |    0 |     3 |    0 |    1 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |     96 |    125 |      26 |      13 |       4 |       2 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        8 |        7 |        9 |        3 |        4 |        6 |       0 |        5 |       17 |        7 |        6 |        7 |        4 |       3 |        0 |       15 |        8 |        5 |        5 |        2 |       2 |       13 |       16 |       10 |        9 |        5 |        1 |       1 |        3 |        5 |        5 |        2 |        1 |        0 |       0 |        4 |        5 |        3 |        2 |        2 |        0 |       0 |        0 |        1 |        2 |        0 |        1 |        2 |       0 |        0 |        1 |        2 |        1 |        0 |        1 |       0 |      0 |      1 |     16 |      7 |      0 |      0 |      0 |     62 |      0 |      0 |      1 |     11 |      6 |      4 |      3 |      0 |     67 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      0 |     26 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 4997100 |      16 |     10 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |     11 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        3 |        1 |        4 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4997200 |     452 |    157 |    180 |    24 |    0 |     7 |    5 |    1 |     1 |    0 |     77 |    0 |    0 |    0 |    0 |    193 |    259 |      36 |      24 |      13 |       6 |      3 |     14 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      1 |        6 |       14 |       11 |       13 |        9 |        7 |       5 |       11 |       19 |       13 |       25 |        8 |       11 |       5 |        8 |       17 |       18 |       21 |       10 |        3 |       1 |       11 |       17 |       28 |       19 |       12 |       10 |       5 |        5 |        4 |        6 |        5 |        5 |        3 |       0 |        7 |       14 |       11 |       11 |        5 |        1 |       0 |        3 |        4 |        7 |        4 |        3 |        1 |       0 |        1 |        4 |        5 |        3 |        1 |        2 |       0 |      0 |      1 |     20 |     18 |      5 |      6 |      4 |    103 |      0 |      0 |      1 |     29 |     30 |      6 |      6 |      6 |    102 |      0 |      0 |      1 |      9 |      6 |      2 |      3 |      1 |     55 |      0 |      0 |      1 |      9 |      4 |      2 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 4997300 |      73 |     26 |     25 |     4 |    0 |     0 |    1 |    1 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     36 |     37 |       3 |       2 |       2 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        1 |        3 |        2 |        0 |       1 |        2 |        1 |        0 |        7 |        2 |        0 |       1 |        1 |        1 |        1 |        4 |        3 |        0 |       2 |        1 |        3 |        2 |        3 |        2 |        1 |       1 |        1 |        1 |        2 |        1 |        4 |        0 |       0 |        0 |        3 |        0 |        2 |        2 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      8 |      3 |      4 |      0 |      0 |     11 |      0 |      0 |      0 |      2 |      1 |      3 |      1 |      1 |     17 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 4997400 |      31 |     10 |     16 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     16 |     15 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        1 |        2 |       1 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        0 |        2 |        4 |        2 |       0 |        0 |        1 |        0 |        1 |        3 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      4 |      2 |      4 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4998000 |     770 |    328 |    241 |    24 |    0 |     8 |    5 |    9 |     6 |    0 |    149 |    0 |    0 |    0 |    0 |    347 |    423 |      88 |      53 |      33 |       8 |      8 |      4 |      4 |      3 |      1 |      1 |      0 |      0 |      3 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       5 |       0 |       3 |       1 |      6 |      6 |      3 |      1 |       20 |       27 |       40 |       24 |       13 |       13 |       7 |       17 |       33 |       54 |       36 |       25 |       19 |       0 |        9 |       28 |       27 |       25 |       10 |        8 |       4 |       20 |       35 |       35 |       14 |       15 |        7 |       4 |       11 |       13 |       16 |       18 |        7 |        1 |       3 |       19 |       25 |       14 |       14 |        5 |        2 |       1 |        6 |        4 |        6 |        6 |        1 |        0 |       0 |        7 |        9 |        8 |        4 |        1 |        0 |       0 |      0 |      1 |     54 |     39 |     14 |      3 |      5 |    212 |      0 |      0 |      0 |     36 |     37 |      9 |      2 |      5 |    152 |      0 |      0 |      4 |     16 |     11 |      6 |      0 |      2 |    110 |      0 |      0 |      2 |      3 |      5 |      0 |      2 |      0 |     40 |      0 |     37 | s03      | R    |
| 4998200 |      12 |      8 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      6 |      6 |       2 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        1 |        0 |       1 |        1 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 4999000 |     329 |    132 |    124 |     5 |    0 |     7 |    2 |    3 |     3 |    0 |     53 |    0 |    0 |    0 |    0 |    142 |    187 |      32 |      27 |      11 |       3 |      2 |      5 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      2 |      0 |        6 |        6 |       11 |       14 |       11 |        1 |       5 |        9 |       11 |       19 |       20 |        9 |        3 |       7 |        8 |        3 |       13 |       13 |        6 |        3 |       1 |       12 |       13 |       15 |       20 |        6 |       10 |       1 |        4 |        6 |        8 |        4 |        5 |        1 |       0 |        9 |        2 |        7 |        4 |        3 |        0 |       0 |        4 |        2 |        3 |        3 |        1 |        0 |       0 |        2 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     22 |     14 |      4 |      1 |      5 |     86 |      0 |      0 |      1 |     18 |     13 |      6 |      2 |      6 |     78 |      0 |      0 |      2 |      7 |      8 |      2 |      4 |      0 |     30 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 4999100 |     594 |    245 |    221 |    15 |    0 |     8 |    2 |    3 |     4 |    0 |     96 |    0 |    0 |    0 |    0 |    250 |    344 |      44 |      30 |      14 |       4 |     12 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |       0 |       7 |       0 |       0 |      1 |      2 |      1 |      0 |        8 |       14 |       19 |       24 |       17 |       10 |       5 |       15 |       20 |       35 |       26 |       26 |       16 |      10 |       12 |        9 |       26 |       25 |       10 |       10 |       3 |       20 |       15 |       36 |       19 |       17 |       10 |       9 |        6 |        5 |        8 |       13 |        8 |        0 |       1 |       14 |        1 |       13 |       16 |        7 |        4 |       0 |        1 |        3 |        5 |        3 |        4 |        1 |       0 |        3 |        2 |        4 |        4 |        1 |        1 |       0 |      0 |      1 |     29 |     28 |     18 |      9 |      4 |    156 |      0 |      0 |      0 |     18 |     30 |     12 |     11 |      6 |    144 |      0 |      0 |      0 |     16 |     11 |      4 |      5 |      2 |     58 |      0 |      0 |      0 |      5 |      9 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 5000000 |     620 |    197 |    288 |    17 |    0 |     4 |    2 |    5 |     4 |    0 |    103 |    0 |    0 |    0 |    0 |    270 |    350 |      26 |      26 |      16 |       3 |      8 |      7 |      1 |      1 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      1 |      4 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      9 |      4 |      1 |        8 |       11 |       18 |       26 |       10 |        8 |       1 |        9 |       24 |       25 |       28 |       17 |       11 |       1 |       16 |       25 |       26 |       25 |       28 |       11 |       0 |       23 |       31 |       36 |       38 |       18 |       11 |       0 |        9 |       14 |        8 |        8 |        3 |        5 |       0 |       19 |       13 |        9 |       10 |        3 |        1 |       1 |        1 |        5 |        3 |        0 |        1 |        0 |       0 |        6 |       11 |        2 |        0 |        3 |        0 |       0 |      0 |      1 |     20 |     21 |      7 |      8 |      2 |    138 |      0 |      0 |      1 |     33 |     39 |     11 |     12 |     15 |    177 |      0 |      0 |      0 |      6 |      9 |      2 |      2 |      2 |     82 |      0 |      0 |      0 |      6 |      5 |      1 |      0 |      1 |     19 |      0 |     37 | s03      | R    |
| 5000100 |     384 |    147 |    155 |     6 |    0 |     1 |    2 |    3 |     2 |    0 |     68 |    0 |    0 |    0 |    0 |    178 |    206 |      11 |      10 |       4 |       0 |      5 |      6 |      4 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      3 |      0 |       0 |       1 |       2 |       0 |      1 |      2 |      1 |      0 |        3 |       13 |       12 |       19 |       13 |        8 |       3 |        6 |        8 |       10 |       20 |       12 |       16 |       4 |        7 |       11 |       13 |       19 |       10 |       13 |       1 |       12 |       11 |        9 |       16 |       13 |       18 |       2 |        6 |        4 |        4 |        4 |        4 |        4 |       0 |        5 |        6 |       13 |        8 |        3 |        6 |       1 |        3 |        2 |        0 |        1 |        1 |        0 |       0 |        1 |        2 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |     11 |     22 |      3 |      4 |      9 |     98 |      0 |      0 |      2 |     17 |     16 |      7 |      9 |      9 |     95 |      0 |      0 |      0 |     12 |      9 |      0 |      3 |      1 |     43 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5000200 |     358 |    114 |    171 |     9 |    0 |     2 |    3 |    1 |     4 |    0 |     54 |    0 |    0 |    0 |    0 |    174 |    184 |      15 |      11 |       9 |       3 |      5 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        5 |        2 |       12 |       12 |       12 |        4 |       0 |        7 |        7 |       10 |       22 |       14 |        5 |       2 |        9 |       10 |       18 |       16 |       19 |       13 |       2 |        2 |        9 |       19 |       23 |       15 |       14 |       2 |        7 |        4 |        5 |        4 |        5 |        4 |       0 |        4 |        6 |        3 |        4 |        3 |        3 |       2 |        3 |        5 |        1 |        2 |        0 |        0 |       0 |        1 |        2 |        2 |        1 |        2 |        0 |       0 |      0 |      0 |     14 |     15 |      5 |      5 |      5 |     70 |      0 |      0 |      0 |     18 |     28 |      7 |     11 |     15 |     92 |      0 |      0 |      0 |      5 |      3 |      3 |      1 |      1 |     41 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5000300 |     177 |     48 |     91 |     3 |    0 |     2 |    0 |    1 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |     88 |     89 |       7 |      10 |       2 |       2 |      0 |      7 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       1 |       0 |      0 |      3 |      1 |      0 |        1 |        6 |        4 |        6 |        3 |        2 |       0 |        2 |        4 |        7 |        4 |        8 |        1 |       0 |        2 |        4 |       22 |       10 |        4 |        3 |       0 |        2 |       13 |       13 |       13 |        1 |        4 |       0 |        0 |        5 |        3 |        5 |        2 |        2 |       0 |        1 |        4 |        2 |        4 |        3 |        1 |       0 |        0 |        0 |        3 |        0 |        0 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |     39 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |     74 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5000400 |     276 |     92 |    125 |     7 |    0 |     3 |    0 |    1 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    119 |    157 |      16 |      14 |       5 |       2 |      3 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        3 |        5 |        8 |        7 |        5 |       1 |        5 |       11 |       13 |       11 |        9 |       10 |       0 |        1 |       10 |        9 |       12 |       16 |       15 |       1 |        3 |       12 |       11 |        7 |       15 |       12 |       1 |        3 |        2 |        6 |        3 |        3 |        1 |       0 |        5 |        5 |        8 |        5 |        2 |        4 |       0 |        1 |        0 |        2 |        0 |        0 |        1 |       0 |        1 |        2 |        0 |        3 |        2 |        0 |       0 |      0 |      1 |      9 |     14 |      7 |      1 |      1 |     59 |      0 |      0 |      1 |     15 |     15 |      5 |      3 |      3 |     83 |      0 |      0 |      1 |      4 |      3 |      3 |      0 |      2 |     34 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5000500 |     175 |     55 |     89 |     2 |    0 |     1 |    0 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     88 |     87 |      12 |       6 |       5 |       0 |      3 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       1 |       1 |      0 |      0 |      0 |      0 |        2 |        0 |        5 |        6 |        2 |        3 |       2 |        2 |        4 |        7 |       11 |        6 |        5 |       0 |        2 |        7 |       14 |       14 |        6 |        6 |       2 |        7 |        4 |       10 |       10 |        3 |        2 |       2 |        2 |        3 |        4 |        2 |        2 |        1 |       1 |        1 |        4 |        3 |        4 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      4 |      4 |      3 |      3 |     36 |      0 |      0 |      1 |      9 |     10 |      3 |      4 |      2 |     60 |      0 |      0 |      0 |      7 |      1 |      0 |      2 |      0 |     18 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5000600 |     513 |    167 |    258 |    15 |    0 |     3 |    0 |    1 |     5 |    0 |     64 |    0 |    0 |    0 |    0 |    230 |    283 |      24 |      17 |       9 |       6 |      1 |      4 |      1 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      3 |      1 |      0 |        4 |        5 |        7 |       12 |       18 |       12 |       5 |        6 |       14 |       16 |       29 |       14 |       17 |       8 |       10 |       13 |       28 |       31 |       18 |       15 |       8 |       12 |       15 |       27 |       27 |       22 |       25 |       7 |        6 |        6 |        4 |        9 |        3 |        3 |       0 |        8 |        4 |        5 |        8 |        4 |        4 |       0 |        2 |        3 |        1 |        3 |        3 |        1 |       0 |        2 |        3 |        2 |        2 |        1 |        1 |       0 |      0 |      0 |     19 |     24 |     14 |      5 |     11 |     94 |      0 |      0 |      2 |     31 |     30 |     13 |      9 |     14 |    159 |      0 |      0 |      1 |     10 |      3 |      6 |      0 |      3 |     41 |      0 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 5000700 |     336 |     94 |    172 |     5 |    0 |     3 |    2 |    0 |     2 |    0 |     58 |    0 |    0 |    0 |    0 |    162 |    174 |       9 |      14 |       8 |       0 |      1 |      4 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |        3 |        3 |        5 |        8 |       10 |        7 |       6 |        2 |        3 |        3 |       11 |       14 |       15 |       4 |        4 |        6 |       12 |       18 |       16 |       12 |       7 |        8 |       12 |       12 |       26 |       16 |       11 |      12 |        4 |        4 |        7 |       12 |        9 |        1 |       0 |        4 |        4 |        1 |        9 |        2 |        1 |       0 |        1 |        1 |        1 |        3 |        2 |        0 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     10 |     10 |      3 |      3 |      4 |     64 |      0 |      0 |      0 |     13 |     45 |      7 |      1 |     12 |     94 |      0 |      0 |      0 |     11 |      6 |      3 |      1 |      0 |     37 |      0 |      0 |      0 |      1 |      3 |      0 |      1 |      2 |      5 |      0 |     37 | s03      | R    |
| 5000800 |     222 |     81 |     81 |     4 |    0 |     2 |    2 |    4 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    110 |    112 |      16 |       7 |       7 |       1 |      2 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      0 |      1 |      0 |        3 |        5 |        9 |       11 |        7 |        1 |       2 |        5 |        9 |        9 |       13 |        4 |        1 |       2 |        9 |        9 |        6 |        9 |        5 |        2 |       0 |        8 |        7 |        5 |       14 |        4 |        2 |       1 |        4 |        7 |        5 |        5 |        3 |        0 |       0 |        4 |       10 |        4 |        3 |        2 |        0 |       0 |        2 |        2 |        3 |        1 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     10 |      6 |      2 |      4 |      3 |     56 |      0 |      0 |      0 |      9 |     13 |      0 |      3 |      1 |     55 |      0 |      0 |      1 |      6 |      2 |      3 |      0 |      1 |     34 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5000900 |     501 |    179 |    223 |    11 |    0 |     2 |    2 |    0 |     4 |    0 |     80 |    0 |    0 |    0 |    0 |    221 |    280 |      29 |      20 |      16 |       0 |      8 |     11 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |      3 |      0 |      0 |      0 |        4 |        7 |       13 |       16 |       11 |       14 |      10 |        5 |       14 |       13 |       23 |       15 |       21 |      13 |        8 |       13 |       23 |       17 |       12 |       20 |       9 |        8 |       11 |       21 |       24 |       15 |       23 |      19 |        6 |        4 |        7 |        7 |        4 |        5 |       2 |        6 |       12 |       12 |        9 |        2 |        4 |       0 |        2 |        2 |        1 |        2 |        1 |        1 |       0 |        1 |        2 |        5 |        1 |        1 |        0 |       0 |      0 |      0 |     19 |     26 |     10 |      9 |      4 |    111 |      0 |      0 |      2 |     22 |     31 |      8 |     11 |     10 |    139 |      0 |      0 |      1 |     13 |      8 |      3 |      1 |      4 |     50 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5001000 |      57 |     22 |     31 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     20 |     37 |       1 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        6 |       0 |        1 |        1 |        1 |        1 |        2 |        5 |       3 |        0 |        0 |        1 |        1 |        3 |        6 |       0 |        0 |        0 |        0 |        2 |        4 |       14 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      1 |      1 |      4 |      0 |     13 |      0 |      0 |      1 |      3 |      1 |      1 |      2 |      2 |     21 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5001100 |     238 |     84 |    111 |     4 |    0 |     2 |    2 |    0 |     4 |    0 |     31 |    0 |    0 |    0 |    0 |    107 |    131 |      18 |      13 |       6 |       3 |      1 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        3 |        6 |       10 |        2 |        3 |       2 |        5 |        9 |        7 |       17 |        3 |        6 |       7 |        9 |        5 |       16 |       13 |        5 |        3 |       7 |        3 |        7 |       13 |       12 |        3 |        6 |       9 |        0 |        2 |        4 |        3 |        3 |        0 |       0 |        6 |        1 |        3 |        6 |        1 |        0 |       2 |        1 |        3 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |      0 |      1 |      5 |      6 |      6 |      5 |      6 |     55 |      0 |      0 |      0 |      8 |     13 |      6 |      2 |      4 |     78 |      0 |      0 |      0 |      5 |      3 |      3 |      1 |      2 |     17 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5001200 |     523 |    173 |    241 |    13 |    0 |     6 |    6 |    3 |     2 |    0 |     79 |    0 |    0 |    0 |    0 |    233 |    290 |      23 |      16 |       9 |       4 |      5 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      1 |      0 |        6 |        3 |        8 |       18 |       12 |       11 |      11 |        9 |        8 |       15 |       20 |       14 |       13 |      25 |        7 |        6 |       19 |       29 |       22 |       10 |      14 |       14 |       11 |       33 |       25 |       15 |       22 |      14 |        6 |        7 |        9 |        7 |        5 |        4 |       6 |        6 |        6 |        7 |        6 |        5 |        3 |       2 |        0 |        4 |        2 |        0 |        2 |        4 |       1 |        2 |        4 |        6 |        3 |        2 |        0 |       0 |      0 |      0 |     11 |     20 |      8 |      5 |      6 |    123 |      0 |      0 |      1 |     23 |     30 |     15 |      8 |     13 |    151 |      0 |      0 |      0 |     11 |      8 |      3 |      2 |      2 |     53 |      0 |      0 |      0 |      4 |     10 |      1 |      2 |      1 |     12 |      0 |     37 | s03      | R    |
| 5001300 |     383 |    113 |    208 |     5 |    0 |     3 |    2 |    0 |     2 |    0 |     50 |    0 |    0 |    0 |    0 |    194 |    189 |       6 |       5 |       1 |       0 |      5 |      4 |      2 |      2 |      1 |      3 |      1 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        4 |        3 |        6 |       13 |       10 |        9 |       1 |        2 |        6 |       13 |       15 |       16 |       13 |       2 |       17 |       13 |       22 |       33 |       17 |       14 |       1 |       11 |        6 |       14 |       31 |       13 |       16 |       0 |        4 |        4 |        1 |        8 |        6 |        1 |       0 |        3 |        1 |        6 |        7 |        5 |        4 |       0 |        1 |        2 |        2 |        2 |        0 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     15 |     16 |      3 |      5 |      9 |     65 |      0 |      0 |      1 |     21 |     37 |      9 |      8 |     14 |    118 |      0 |      0 |      2 |      6 |      5 |      6 |      3 |      5 |     23 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5001400 |     128 |     39 |     71 |     1 |    0 |     0 |    1 |    1 |     1 |    0 |     14 |    0 |    0 |    0 |    0 |     58 |     70 |       6 |       0 |       0 |       0 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      0 |      1 |        0 |        1 |        1 |        2 |        3 |        4 |       4 |        2 |        3 |        1 |        5 |        3 |        4 |       6 |        0 |        5 |        5 |        6 |        8 |       10 |       3 |        0 |        4 |        4 |        8 |        5 |        6 |       7 |        2 |        0 |        0 |        1 |        1 |        1 |       0 |        5 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     30 |      0 |      0 |      0 |      4 |      8 |      2 |      2 |      4 |     51 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5001800 |     176 |     74 |     81 |     2 |    0 |     1 |    0 |    1 |     1 |    0 |     16 |    0 |    0 |    0 |    0 |     82 |     94 |       6 |       3 |       2 |       1 |      3 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        3 |        5 |        6 |       15 |       4 |        0 |        3 |        3 |        7 |       12 |       12 |       2 |        3 |        1 |        3 |        7 |        7 |        9 |       4 |        3 |        3 |        8 |        4 |        7 |       19 |       3 |        1 |        0 |        1 |        1 |        1 |        6 |       0 |        1 |        0 |        0 |        0 |        2 |        3 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     11 |     12 |      1 |      3 |      3 |     43 |      0 |      0 |      0 |     10 |     16 |      4 |      2 |      3 |     46 |      0 |      0 |      1 |      1 |      4 |      2 |      0 |      1 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5001900 |     389 |    151 |    151 |    11 |    0 |     4 |    1 |    1 |     0 |    0 |     70 |    0 |    0 |    0 |    0 |    132 |    257 |      23 |      10 |       9 |       2 |      5 |      7 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        3 |       10 |       10 |        6 |       10 |        4 |       2 |        8 |       18 |       22 |       31 |       17 |        7 |       3 |        3 |       11 |       12 |       10 |        8 |        7 |       0 |       10 |       24 |       19 |       22 |       16 |        9 |       0 |        7 |        9 |        8 |        5 |        1 |        0 |       0 |        8 |       10 |       11 |        7 |        3 |        1 |       0 |        1 |        2 |        1 |        1 |        0 |        1 |       0 |        2 |        2 |        3 |        2 |        1 |        1 |       0 |      0 |      0 |     18 |     26 |     10 |      2 |      9 |     86 |      0 |      0 |      1 |     15 |     19 |      5 |      4 |      7 |    100 |      0 |      0 |      0 |      8 |      5 |      1 |      0 |      3 |     53 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5002000 |     346 |    133 |    134 |     5 |    0 |     8 |    2 |    0 |     0 |    0 |     64 |    0 |    0 |    0 |    0 |    154 |    192 |      26 |      25 |      11 |       2 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      6 |      7 |      7 |      0 |        2 |       10 |        8 |       19 |        9 |        8 |       1 |        8 |        9 |       21 |       11 |       13 |       13 |       1 |        6 |        5 |        8 |       20 |       16 |        8 |       0 |        3 |        6 |       14 |       22 |       15 |       10 |       1 |        4 |        4 |        8 |        5 |        6 |        0 |       0 |        8 |        7 |       10 |        7 |        3 |        2 |       0 |        3 |        0 |        0 |        2 |        1 |        1 |       0 |        2 |        2 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |     19 |     28 |      7 |     14 |      8 |     57 |      0 |      0 |      0 |      9 |     28 |     10 |     11 |     11 |     65 |      0 |      0 |      0 |      8 |      9 |      1 |      4 |      1 |     41 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5002100 |     458 |    217 |    136 |    12 |    0 |     5 |    2 |    3 |     3 |    0 |     80 |    0 |    0 |    0 |    0 |    203 |    255 |      70 |      32 |      21 |       4 |      6 |      6 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     11 |      4 |      2 |      0 |        8 |       10 |       12 |       24 |       12 |       16 |       3 |       10 |       21 |       25 |       29 |       20 |       22 |       5 |        6 |       11 |       15 |       10 |        7 |       11 |       1 |        8 |       13 |       18 |       12 |       12 |        9 |       3 |       10 |        7 |        9 |        7 |        7 |        3 |       0 |        5 |        5 |        7 |       10 |        5 |        5 |       0 |        3 |        6 |        1 |        2 |        1 |        1 |       0 |        1 |        3 |        1 |        2 |        3 |        1 |       0 |      0 |      1 |     39 |     31 |      8 |      6 |     10 |    122 |      0 |      0 |      0 |     26 |     13 |     11 |      4 |      0 |     82 |      0 |      0 |      1 |     17 |     10 |      6 |      2 |      2 |     42 |      0 |      0 |      1 |      3 |      6 |      3 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5002200 |     290 |    110 |    123 |     6 |    0 |     5 |    3 |    1 |     2 |    0 |     40 |    0 |    0 |    0 |    0 |    139 |    151 |      21 |      10 |       5 |       0 |      3 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        5 |        3 |       10 |        5 |        4 |       12 |       6 |        7 |        6 |       10 |       16 |       10 |        8 |       8 |        3 |       10 |       15 |       14 |        8 |        6 |       3 |        8 |        7 |       15 |       14 |        9 |        4 |       7 |        5 |        3 |        6 |        5 |        4 |        1 |       0 |        0 |        4 |        7 |        2 |        1 |        2 |       0 |        0 |        4 |        2 |        1 |        3 |        1 |       0 |        1 |        1 |        1 |        1 |        2 |        0 |       0 |      0 |      0 |      7 |     17 |      4 |      1 |      6 |     75 |      0 |      0 |      0 |     20 |     18 |      6 |      6 |      9 |     64 |      0 |      0 |      1 |      7 |      2 |      1 |      5 |      1 |     23 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 5002400 |      13 |      6 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      7 |      6 |       2 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5003000 |     567 |    273 |    168 |    17 |    0 |     8 |    7 |    4 |     5 |    0 |     85 |    0 |    0 |    0 |    0 |    228 |    339 |      77 |      41 |      23 |       9 |      7 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       2 |       0 |      3 |      2 |      0 |      2 |       19 |       18 |       21 |       23 |        8 |       16 |       1 |       34 |       40 |       32 |       27 |       23 |       11 |       0 |        8 |       10 |       19 |       15 |        7 |        8 |       1 |       15 |       32 |       25 |       11 |        6 |        9 |       2 |        6 |        7 |        9 |       12 |        1 |        2 |       1 |       11 |       15 |       12 |        6 |        3 |        0 |       0 |        5 |        5 |        3 |        2 |        1 |        0 |       0 |        4 |        6 |        5 |        4 |        6 |        0 |       0 |      0 |      1 |     35 |     22 |      4 |      6 |      6 |    199 |      0 |      0 |      1 |     32 |     22 |      2 |      2 |      4 |    105 |      0 |      0 |      0 |     11 |      6 |      3 |      1 |      0 |     64 |      0 |      0 |      0 |      6 |      9 |      1 |      2 |      0 |     23 |      0 |     37 | s03      | R    |
| 5003100 |     433 |    179 |    152 |    13 |    0 |     5 |    4 |    3 |     2 |    0 |     75 |    0 |    0 |    0 |    0 |    201 |    232 |      33 |      18 |      10 |       5 |      5 |      1 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      4 |      1 |      0 |       10 |       10 |       15 |       19 |       14 |       12 |       0 |        6 |       21 |       21 |       23 |       18 |       10 |       0 |        4 |        7 |       20 |       18 |       12 |        6 |       0 |        7 |       15 |       23 |       17 |       16 |        7 |       0 |        3 |        8 |        8 |       12 |        1 |        6 |       0 |        8 |        6 |       11 |        7 |        3 |        2 |       0 |        0 |        6 |        3 |        4 |        3 |        0 |       0 |        2 |        5 |        3 |        0 |        1 |        0 |       0 |      0 |      0 |     36 |     20 |      9 |      9 |     11 |     94 |      0 |      0 |      0 |     16 |     22 |      8 |      6 |      8 |     92 |      0 |      0 |      0 |     20 |      9 |      6 |      0 |      3 |     37 |      0 |      0 |      0 |      8 |      5 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5003200 |     579 |    234 |    212 |    13 |    0 |     8 |    6 |    2 |     5 |    0 |     99 |    0 |    0 |    0 |    0 |    271 |    308 |      67 |      30 |      15 |       5 |      5 |      4 |      4 |      0 |      0 |      3 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      5 |      4 |      0 |       10 |        9 |       28 |       20 |       20 |        8 |       3 |       13 |       22 |       32 |       33 |       20 |       15 |       1 |       14 |       17 |       22 |       30 |       14 |        9 |       2 |       16 |       25 |       21 |       21 |       14 |        5 |       2 |        7 |        9 |       12 |       16 |        4 |        2 |       0 |        8 |        8 |       14 |       14 |        1 |        4 |       0 |        1 |        7 |        3 |        1 |        1 |        2 |       0 |        3 |        4 |        6 |        5 |        1 |        0 |       0 |      0 |      2 |     32 |     32 |     13 |      6 |     10 |    139 |      0 |      0 |      1 |     26 |     25 |     14 |      7 |      7 |    132 |      0 |      0 |      2 |     12 |     14 |      5 |      4 |      2 |     60 |      0 |      0 |      1 |      5 |      8 |      3 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 5003300 |      74 |     27 |     29 |     1 |    0 |     1 |    3 |    2 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     40 |     34 |       2 |       1 |       2 |       0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        2 |        1 |        3 |        1 |        6 |        0 |       0 |        0 |        3 |        7 |        2 |        1 |        1 |       0 |        0 |        4 |        3 |        5 |        0 |        3 |       0 |        0 |        1 |        3 |        3 |        3 |        4 |       0 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      7 |      1 |      3 |      0 |     13 |      0 |      0 |      0 |      1 |      4 |      7 |      2 |      0 |     15 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5003400 |     137 |     52 |     57 |     1 |    0 |     2 |    1 |    1 |     3 |    0 |     20 |    0 |    0 |    0 |    0 |     71 |     66 |       7 |       7 |       3 |       0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        6 |        5 |        7 |        1 |        4 |       0 |        5 |        4 |        5 |        8 |        2 |        4 |       0 |        2 |        4 |        8 |        6 |        6 |        3 |       0 |        2 |        5 |        3 |       10 |        3 |        5 |       0 |        1 |        2 |        3 |        4 |        0 |        1 |       0 |        2 |        1 |        2 |        4 |        0 |        0 |       0 |        0 |        4 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      7 |      3 |      0 |      0 |     34 |      0 |      0 |      0 |     11 |     16 |      2 |      3 |      0 |     25 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      0 |     15 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5003500 |      20 |      4 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     10 |     10 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        2 |        3 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5003600 |      72 |     31 |     28 |     2 |    0 |     0 |    1 |    1 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     31 |     41 |       1 |       1 |       3 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        7 |        1 |        0 |        1 |       0 |        2 |        2 |        7 |        6 |        2 |        1 |       0 |        2 |        3 |        3 |        3 |        1 |        2 |       0 |        0 |        4 |        4 |        1 |        1 |        4 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        4 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      6 |      1 |      1 |      0 |     19 |      0 |      0 |      0 |      3 |      3 |      0 |      3 |      2 |     17 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5004000 |     363 |    160 |    141 |     8 |    0 |     2 |    2 |    2 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    154 |    209 |      26 |       8 |       7 |       2 |      6 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      2 |      1 |      1 |        4 |        3 |        3 |        9 |        7 |       28 |       7 |        2 |        7 |       10 |       12 |       15 |       39 |      14 |        3 |        8 |        9 |       12 |        6 |       22 |       6 |        5 |        3 |        4 |        9 |       10 |       39 |       5 |        4 |        1 |        3 |        3 |        5 |        2 |       1 |        4 |        5 |        4 |        1 |        7 |        6 |       1 |        0 |        4 |        0 |        1 |        0 |        3 |       0 |        1 |        3 |        1 |        0 |        0 |        2 |       0 |      0 |      4 |     16 |     22 |     11 |      3 |      4 |    100 |      0 |      0 |      3 |     20 |     25 |      7 |      3 |      4 |     79 |      0 |      0 |      0 |      7 |      4 |      2 |      4 |      0 |     30 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5004100 |     364 |    181 |    113 |     6 |    0 |     1 |    0 |   10 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |    159 |    205 |      49 |      20 |      13 |       4 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      5 |      2 |      1 |        9 |       12 |       11 |       21 |       11 |        9 |       2 |       11 |       21 |       16 |       23 |        8 |       20 |       7 |        7 |        6 |        6 |       16 |        6 |        9 |       3 |        5 |       10 |       13 |       12 |        6 |        9 |       5 |        4 |        6 |        5 |        3 |        2 |        2 |       1 |        8 |        7 |        5 |        3 |        1 |        3 |       1 |        2 |        2 |        1 |        3 |        0 |        0 |       0 |        4 |        4 |        0 |        0 |        2 |        1 |       0 |      0 |      0 |     26 |     14 |      8 |      4 |      6 |    123 |      0 |      0 |      0 |     19 |      9 |      4 |      3 |      9 |     69 |      0 |      0 |      0 |     10 |      2 |      2 |      0 |      0 |     37 |      0 |      0 |      2 |      0 |      4 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5004200 |     358 |    139 |    132 |     8 |    0 |     4 |    5 |    6 |     3 |    0 |     61 |    0 |    0 |    0 |    0 |    166 |    192 |      46 |      28 |      17 |       4 |      3 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      6 |      3 |      2 |        8 |        3 |       12 |        7 |       11 |       13 |       1 |       11 |        7 |       17 |       13 |        9 |       23 |       4 |        8 |       11 |       19 |        7 |        3 |       14 |       4 |        3 |        9 |       16 |        7 |        6 |       20 |       5 |        3 |        4 |       10 |        4 |        6 |        6 |       1 |        9 |        4 |        2 |        2 |        5 |        4 |       1 |        0 |        5 |        1 |        1 |        0 |        4 |       0 |        0 |        6 |        1 |        2 |        3 |        3 |       0 |      0 |      0 |     21 |     15 |      5 |      2 |      3 |     93 |      0 |      0 |      0 |     22 |     21 |      3 |      3 |      5 |     78 |      0 |      0 |      1 |      6 |      4 |      0 |      1 |      0 |     49 |      0 |      0 |      1 |      7 |      7 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5004900 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5005000 |     193 |     89 |     67 |     4 |    0 |     4 |    1 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |    100 |     93 |      28 |      20 |       8 |       3 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        2 |       11 |        7 |        5 |        6 |        8 |       1 |        2 |       11 |       11 |       12 |        5 |        5 |       3 |       11 |        4 |        7 |       12 |        2 |        4 |       1 |        2 |        3 |        5 |        7 |        3 |        6 |       0 |        4 |        1 |        2 |        4 |        3 |        1 |       0 |        4 |        3 |        0 |        2 |        0 |        3 |       1 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      1 |     18 |     11 |      4 |      1 |      3 |     51 |      0 |      0 |      1 |     12 |      9 |      1 |      3 |      2 |     39 |      0 |      0 |      0 |      5 |      1 |      2 |      0 |      1 |     19 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5005100 |     139 |     60 |     51 |     6 |    0 |     2 |    0 |    1 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     67 |     72 |      16 |       8 |       3 |       0 |      2 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        9 |        6 |        7 |        4 |        1 |       2 |        5 |        5 |        8 |        5 |        5 |        0 |       2 |        4 |        2 |        4 |        7 |        1 |        5 |       1 |        1 |        6 |        6 |        6 |        2 |        5 |       1 |        1 |        0 |        5 |        1 |        2 |        1 |       0 |        0 |        2 |        0 |        3 |        1 |        3 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        1 |        2 |        0 |        2 |        0 |       0 |      0 |      1 |      4 |      8 |      3 |      0 |      1 |     43 |      0 |      0 |      0 |     12 |      7 |      1 |      1 |      1 |     29 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5006000 |     282 |    106 |    111 |     9 |    0 |     5 |    2 |    4 |     2 |    0 |     43 |    0 |    0 |    0 |    0 |    141 |    141 |      28 |       9 |       9 |       3 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      3 |      0 |      0 |        7 |        7 |        6 |        9 |        7 |        9 |       8 |        5 |        8 |        7 |        7 |        7 |       10 |       9 |        5 |        9 |       15 |        8 |        6 |       12 |       3 |        4 |        7 |       17 |        6 |        1 |       13 |       5 |        1 |        2 |        2 |        6 |        3 |        2 |       0 |        7 |        6 |        7 |        4 |        0 |        2 |       1 |        1 |        2 |        6 |        4 |        0 |        1 |       0 |        1 |        2 |        1 |        3 |        1 |        0 |       0 |      0 |      0 |     11 |     13 |      4 |      3 |      4 |     71 |      0 |      0 |      0 |     17 |     10 |      9 |      2 |      4 |     69 |      0 |      0 |      0 |      3 |      2 |      0 |      2 |      1 |     35 |      0 |      0 |      0 |      2 |      6 |      2 |      1 |      1 |     10 |      0 |     37 | s03      | R    |
| 5006100 |     152 |     66 |     52 |     5 |    0 |     2 |    1 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     72 |     80 |      18 |       9 |       6 |       1 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |        3 |        3 |        5 |        9 |        2 |       2 |        4 |        4 |        8 |        7 |        6 |        5 |       1 |        2 |        3 |        6 |        6 |        1 |        3 |       0 |        3 |        6 |        7 |        6 |        3 |        4 |       2 |        0 |        0 |        4 |        4 |        5 |        2 |       0 |        0 |        6 |        4 |        1 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |      0 |      2 |      6 |      5 |      3 |      1 |      0 |     49 |      0 |      0 |      0 |      7 |      7 |      5 |      0 |      2 |     31 |      0 |      0 |      0 |      2 |      1 |      2 |      1 |      0 |     20 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5007000 |     289 |    135 |     96 |     5 |    0 |     7 |    1 |    1 |     0 |    0 |     44 |    0 |    0 |    0 |    0 |    137 |    152 |      49 |      20 |      12 |       4 |      3 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |       0 |       1 |       0 |       0 |      6 |      1 |      0 |      0 |        9 |        5 |       12 |       12 |       11 |        6 |       6 |        9 |       12 |       14 |       16 |        9 |        5 |       9 |        6 |        2 |       14 |       11 |        7 |        2 |       6 |        5 |        5 |       13 |        8 |       11 |        4 |       2 |        2 |        5 |        5 |        2 |        4 |        1 |       0 |        6 |        4 |        7 |        3 |        2 |        0 |       3 |        1 |        1 |        2 |        1 |        2 |        2 |       0 |        0 |        2 |        2 |        0 |        1 |        0 |       0 |      0 |      1 |     14 |     18 |      6 |      3 |      4 |     89 |      0 |      0 |      0 |     12 |     13 |      1 |      4 |      3 |     63 |      0 |      0 |      0 |      8 |      5 |      1 |      0 |      1 |     29 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5007100 |     142 |     60 |     33 |     6 |    0 |     4 |    2 |    0 |     0 |    0 |     37 |    0 |    0 |    0 |    0 |     74 |     68 |      26 |       5 |       9 |       3 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        7 |        6 |        4 |        5 |       2 |        4 |        3 |        8 |        3 |        3 |        5 |       4 |        3 |        2 |        2 |        5 |        2 |        1 |       1 |        1 |        2 |        2 |        5 |        1 |        4 |       2 |        4 |        3 |        4 |        5 |        2 |        2 |       1 |        2 |        1 |        6 |        5 |        1 |        0 |       1 |        2 |        0 |        1 |        2 |        1 |        1 |       0 |        0 |        0 |        4 |        0 |        0 |        1 |       0 |      0 |      0 |     14 |     15 |      1 |      2 |      1 |     27 |      0 |      0 |      0 |      6 |      7 |      1 |      2 |      1 |     16 |      0 |      0 |      1 |      2 |      4 |      3 |      2 |      0 |     25 |      0 |      0 |      0 |      2 |      4 |      3 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5007200 |      69 |     35 |     18 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     39 |     30 |      13 |       3 |       4 |       0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        3 |        7 |        6 |        1 |        1 |       2 |        3 |        3 |        4 |        1 |        0 |        1 |       1 |        1 |        1 |        2 |        2 |        0 |        1 |       1 |        0 |        3 |        2 |        2 |        1 |        1 |       1 |        0 |        1 |        5 |        2 |        0 |        1 |       0 |        1 |        1 |        3 |        0 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      5 |      1 |      3 |      0 |     21 |      0 |      0 |      0 |      2 |      0 |      3 |      0 |      1 |     12 |      0 |      0 |      1 |      3 |      2 |      1 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5008000 |     230 |     95 |     72 |     9 |    0 |     7 |    3 |    1 |     0 |    0 |     43 |    0 |    0 |    0 |    0 |    125 |    105 |      34 |      21 |       9 |       8 |      1 |      2 |      4 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      1 |      0 |        5 |        9 |       11 |       13 |        6 |        6 |       6 |        5 |        2 |        6 |        7 |        3 |        8 |       8 |        5 |        2 |        5 |        9 |        9 |        4 |       2 |        3 |        4 |        6 |       10 |        6 |        4 |       3 |        6 |        8 |        3 |        0 |        2 |        2 |       0 |        7 |        6 |        4 |        3 |        1 |        1 |       0 |        0 |        2 |        2 |        6 |        2 |        0 |       0 |        1 |        0 |        3 |        1 |        2 |        1 |       0 |      0 |      0 |      8 |     12 |      5 |      1 |      3 |     66 |      0 |      0 |      0 |     12 |      3 |      3 |      1 |      2 |     51 |      0 |      0 |      0 |      4 |      3 |      2 |      1 |      1 |     32 |      0 |      0 |      0 |      2 |      8 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5009000 |     186 |     81 |     65 |     5 |    0 |     0 |    2 |    0 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |     91 |     95 |      32 |      14 |      11 |       3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      5 |      1 |      0 |        4 |        1 |        3 |       10 |        5 |        9 |       5 |        1 |        2 |        7 |       13 |        4 |       13 |       4 |        4 |        2 |        9 |        8 |        1 |        5 |       6 |        3 |        5 |        5 |        6 |        3 |        5 |       3 |        1 |        2 |        6 |        4 |        3 |        3 |       0 |        2 |        3 |        4 |        2 |        1 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        4 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |     19 |      3 |      2 |      3 |     48 |      0 |      0 |      1 |      5 |     13 |      2 |      1 |      3 |     40 |      0 |      0 |      0 |      4 |      8 |      0 |      1 |      0 |     20 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5009100 |     425 |    191 |    136 |    11 |    0 |     9 |    2 |    5 |     0 |    0 |     71 |    0 |    0 |    0 |    0 |    188 |    237 |      58 |      28 |      31 |       6 |      4 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      3 |      0 |      0 |       16 |       10 |       15 |       11 |       10 |       10 |       7 |       13 |       19 |       15 |       24 |       15 |       16 |      10 |        6 |        6 |       17 |       12 |        5 |       11 |       4 |        7 |       10 |       23 |        7 |       11 |       10 |       7 |        3 |       12 |        7 |        9 |        3 |        0 |       0 |        7 |       14 |        3 |        5 |        4 |        4 |       0 |        1 |        1 |        5 |        4 |        1 |        2 |       0 |        1 |        4 |        3 |        3 |        1 |        1 |       0 |      0 |      4 |     14 |     16 |     13 |      1 |      4 |    139 |      0 |      0 |      0 |     18 |     10 |      7 |      3 |      6 |     92 |      0 |      0 |      1 |      7 |     10 |      1 |      2 |      1 |     49 |      0 |      0 |      0 |      2 |     10 |      0 |      1 |      1 |     13 |      0 |     37 | s03      | R    |
| 5009200 |      35 |     16 |     10 |     1 |    0 |     0 |    1 |    1 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     16 |     19 |       8 |       2 |       3 |       1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        2 |        0 |        1 |       0 |        1 |        0 |        5 |        1 |        1 |        3 |       0 |        1 |        1 |        1 |        1 |        0 |        2 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |     11 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5009300 |     112 |     55 |     24 |     5 |    0 |     2 |    2 |    1 |     2 |    0 |     21 |    0 |    0 |    0 |    0 |     44 |     68 |      25 |       8 |       9 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        4 |        5 |        2 |        2 |       0 |        7 |        7 |       10 |        6 |        5 |        5 |       1 |        1 |        3 |        5 |        0 |        1 |        0 |       1 |        1 |        5 |        2 |        1 |        3 |        1 |       0 |        3 |        5 |        2 |        1 |        0 |        0 |       0 |        6 |        0 |        3 |        1 |        0 |        0 |       0 |        3 |        0 |        2 |        2 |        1 |        0 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |     16 |      2 |      2 |      0 |      0 |     35 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5009500 |      50 |     21 |     17 |     3 |    0 |     2 |    0 |    0 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |     29 |     21 |       6 |       3 |       1 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        2 |        0 |        3 |        1 |        3 |       0 |        0 |        1 |        0 |        2 |        3 |        2 |       2 |        1 |        2 |        1 |        4 |        1 |        1 |       0 |        0 |        0 |        2 |        2 |        1 |        1 |       1 |        1 |        1 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        2 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      1 |      1 |      0 |     14 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      0 |     12 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5010000 |     239 |    103 |     76 |     9 |    0 |     3 |    1 |    2 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |    107 |    132 |      44 |      19 |      14 |       1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      1 |      1 |      0 |        6 |        8 |        7 |        6 |        7 |        4 |       4 |       10 |       12 |       10 |        6 |        6 |        9 |       8 |        2 |        6 |        8 |       14 |        5 |        1 |       0 |        3 |       13 |        7 |        9 |        6 |        2 |       0 |        5 |        1 |        1 |        6 |        6 |        2 |       0 |        4 |        3 |        9 |        3 |        3 |        1 |       0 |        1 |        1 |        0 |        4 |        2 |        0 |       0 |        1 |        1 |        3 |        3 |        0 |        0 |       0 |      0 |      0 |      9 |      3 |      3 |      3 |      5 |     80 |      0 |      0 |      0 |     13 |      7 |      4 |      4 |      3 |     45 |      0 |      0 |      0 |     10 |      3 |      1 |      0 |      0 |     30 |      0 |      0 |      1 |      5 |      3 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5010500 |     380 |    174 |    125 |    14 |    0 |     7 |    2 |    5 |     1 |    0 |     52 |    0 |    0 |    0 |    0 |    176 |    204 |      76 |      28 |      17 |       5 |      3 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      3 |      0 |      1 |      1 |       13 |        8 |       18 |       15 |       11 |        9 |       8 |        7 |       17 |       20 |       15 |       19 |       10 |       4 |        5 |       12 |       16 |       10 |        7 |        4 |       2 |        7 |        9 |       13 |       15 |        5 |       11 |       9 |        3 |        6 |        6 |        4 |        1 |        2 |       1 |        9 |        9 |        5 |        2 |        0 |        4 |       0 |        2 |        2 |        5 |        4 |        1 |        1 |       0 |        1 |        5 |        4 |        2 |        0 |        2 |       0 |      0 |      0 |     26 |     19 |     17 |      1 |      5 |    106 |      0 |      0 |      0 |     15 |     15 |      6 |      1 |     10 |     78 |      0 |      0 |      0 |      4 |     10 |      3 |      2 |      0 |     33 |      0 |      0 |      0 |      1 |     11 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 5010900 |      21 |     10 |      6 |     0 |    0 |     1 |    0 |    1 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      8 |     13 |       4 |       4 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        3 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5011000 |     218 |     86 |     85 |     3 |    0 |     4 |    1 |    2 |     3 |    0 |     34 |    0 |    0 |    0 |    0 |     94 |    124 |      16 |      16 |       5 |       4 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       1 |       1 |       0 |       0 |      3 |      4 |      3 |      0 |        4 |        4 |        3 |       11 |        7 |        6 |       0 |        6 |        8 |        8 |       16 |        8 |        5 |       0 |        3 |        7 |       12 |        6 |        6 |        4 |       0 |        4 |        5 |        9 |       14 |       10 |        4 |       1 |        1 |        4 |        1 |        4 |        2 |        2 |       1 |        5 |        1 |        4 |        6 |        2 |        1 |       0 |        1 |        0 |        3 |        1 |        1 |        0 |       0 |        1 |        2 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |      6 |     26 |      9 |      0 |      2 |     42 |      0 |      0 |      0 |     17 |     22 |     10 |      0 |      4 |     32 |      0 |      0 |      1 |      4 |      6 |      5 |      0 |      0 |     18 |      0 |      0 |      1 |      2 |      5 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5011100 |     724 |    322 |    244 |    17 |    0 |     9 |   11 |    5 |     0 |    0 |    116 |    0 |    0 |    0 |    0 |    343 |    381 |     143 |      58 |      36 |       4 |      6 |      7 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |     10 |      9 |      0 |      1 |       20 |       29 |       25 |       30 |       17 |       19 |       4 |       21 |       30 |       36 |       39 |       19 |       26 |       7 |       14 |       22 |       30 |       25 |       15 |        6 |       4 |       14 |       18 |       29 |       28 |       21 |       11 |       7 |        8 |       12 |       13 |       18 |        8 |        3 |       2 |        8 |       12 |       10 |       13 |        7 |        2 |       0 |        3 |        5 |        3 |        7 |        1 |        0 |       0 |        4 |        4 |        5 |        5 |        3 |        2 |       0 |      0 |      2 |     33 |     42 |      8 |      5 |      5 |    227 |      0 |      0 |      2 |     27 |     40 |     12 |      5 |     12 |    146 |      0 |      0 |      2 |     13 |     13 |      5 |      3 |      4 |     76 |      0 |      0 |      0 |      5 |      9 |      0 |      1 |      1 |     26 |      0 |     37 | s03      | R    |
| 5011900 |     479 |     76 |    363 |     5 |    0 |     4 |    0 |    2 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |    173 |    306 |       5 |       7 |       2 |       2 |      3 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        4 |        1 |       25 |       1 |        2 |        0 |        3 |        1 |        2 |       36 |       0 |        0 |        3 |        3 |        1 |        4 |      112 |       1 |        1 |        3 |        0 |        3 |        3 |      224 |       5 |        0 |        2 |        0 |        0 |        0 |        9 |       0 |        1 |        1 |        0 |        1 |        1 |       14 |       0 |        0 |        0 |        1 |        0 |        3 |        2 |       0 |        0 |        0 |        0 |        2 |        1 |        2 |       0 |      0 |      0 |     12 |     19 |      8 |      4 |      3 |     30 |      0 |      0 |      4 |     68 |     97 |     25 |     26 |     15 |    128 |      0 |      0 |      0 |      6 |      7 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5012000 |     175 |     69 |     65 |     5 |    0 |     5 |    0 |    1 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |     90 |     85 |       9 |      12 |      13 |       3 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      8 |      2 |      1 |        3 |        3 |        3 |        5 |        7 |        3 |       5 |        4 |        5 |        5 |       13 |        6 |        3 |       4 |        3 |        4 |        6 |        7 |        7 |       14 |       0 |        4 |        2 |        3 |        6 |        5 |        3 |       1 |        1 |        0 |        4 |        2 |        2 |        2 |       0 |        3 |        4 |        2 |        5 |        2 |        2 |       0 |        2 |        3 |        0 |        0 |        1 |        3 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      1 |      7 |      9 |      2 |      1 |      1 |     48 |      0 |      0 |      1 |      9 |     10 |      3 |      1 |      3 |     38 |      0 |      0 |      1 |      4 |      5 |      0 |      0 |      1 |     18 |      0 |      0 |      1 |      1 |      6 |      0 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 5012100 |     126 |     66 |     39 |     2 |    0 |     1 |    2 |    1 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     59 |     67 |      14 |       8 |       2 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      1 |      0 |        1 |        8 |        3 |        8 |        1 |        5 |       0 |        2 |        3 |        8 |        6 |        7 |       14 |       0 |        1 |        1 |        6 |        3 |        2 |        8 |       0 |        0 |        0 |        4 |        5 |        5 |        2 |       2 |        3 |        2 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        1 |        3 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      6 |      4 |      5 |      4 |     41 |      0 |      0 |      0 |      4 |      5 |      2 |      6 |      2 |     20 |      0 |      0 |      1 |      2 |      4 |      3 |      0 |      0 |      5 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5012500 |     224 |     86 |     93 |     2 |    0 |     5 |    0 |    1 |     2 |    0 |     35 |    0 |    0 |    0 |    0 |    105 |    119 |      10 |      11 |       7 |       1 |      2 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |     13 |      5 |      1 |        3 |        4 |        3 |       12 |        8 |        3 |       1 |        5 |        5 |        6 |       20 |        7 |        9 |       0 |        4 |        5 |        6 |        9 |       12 |       11 |       1 |        4 |        6 |        6 |       11 |        7 |       11 |       0 |        1 |        2 |        7 |        2 |        4 |        1 |       0 |        2 |        2 |        6 |        4 |        3 |        1 |       0 |        0 |        2 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |      4 |     16 |      5 |      5 |      2 |     54 |      0 |      0 |      1 |      6 |      8 |      9 |      2 |      2 |     65 |      0 |      0 |      2 |      6 |      6 |      3 |      0 |      2 |     16 |      0 |      0 |      0 |      1 |      4 |      0 |      1 |      0 |      4 |      0 |     37 | s03      | R    |
| 5013000 |     584 |    263 |    189 |    13 |    0 |     6 |    7 |    4 |     1 |    0 |    101 |    0 |    0 |    0 |    0 |    260 |    324 |      76 |      36 |      30 |       4 |      3 |      1 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      5 |      4 |      2 |      1 |       11 |       21 |       20 |       24 |       17 |       18 |       5 |       14 |       23 |       23 |       42 |       19 |       15 |      11 |        9 |        9 |       21 |       20 |        7 |        9 |       5 |       20 |       19 |       25 |       17 |       11 |       14 |       3 |        4 |       10 |       14 |        9 |        5 |        4 |       0 |       18 |       10 |       12 |        7 |        5 |        1 |       2 |        1 |        5 |        7 |        0 |        2 |        3 |       0 |        5 |        0 |        3 |        5 |        0 |        0 |       0 |      0 |      0 |     31 |     35 |      7 |      7 |     14 |    169 |      0 |      0 |      0 |     23 |     25 |      4 |      3 |      9 |    125 |      0 |      0 |      1 |     14 |      9 |      3 |      1 |      2 |     71 |      0 |      0 |      0 |      3 |      6 |      0 |      1 |      0 |     21 |      0 |     37 | s03      | R    |
| 5013200 |     228 |    111 |     69 |     5 |    0 |     0 |    2 |    3 |     2 |    0 |     36 |    0 |    0 |    0 |    0 |     98 |    130 |      47 |      16 |      12 |       3 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      2 |      3 |      0 |        3 |        6 |       12 |        8 |        5 |        7 |       5 |        9 |        3 |       13 |       19 |       11 |        5 |       5 |        3 |        4 |        8 |        8 |        5 |        2 |       0 |        2 |        7 |       10 |        7 |        5 |        6 |       2 |        2 |        4 |        4 |        6 |        0 |        0 |       0 |        5 |        6 |        2 |        3 |        3 |        1 |       0 |        2 |        4 |        0 |        0 |        0 |        0 |       0 |        4 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      8 |     15 |      3 |      2 |      6 |     77 |      0 |      0 |      1 |      8 |      9 |      3 |      1 |      6 |     41 |      0 |      0 |      1 |      4 |      6 |      1 |      2 |      2 |     20 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5013400 |      65 |     34 |     19 |     0 |    0 |     1 |    1 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     30 |     35 |      11 |       4 |       2 |       0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      0 |      0 |      1 |      0 |        0 |        3 |        3 |        0 |        4 |        3 |       2 |        2 |        2 |        2 |        2 |        4 |        1 |       6 |        0 |        1 |        2 |        1 |        1 |        3 |       1 |        0 |        0 |        5 |        1 |        1 |        2 |       1 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      6 |      1 |      0 |      1 |     22 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      2 |     11 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |     37 | s03      | R    |
| 5013600 |      38 |     13 |     13 |     1 |    0 |     1 |    1 |    1 |     2 |    0 |      6 |    0 |    0 |    0 |    0 |     20 |     18 |       7 |       2 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        0 |        2 |        0 |        1 |       0 |        0 |        1 |        2 |        1 |        4 |        0 |       0 |        1 |        3 |        0 |        3 |        1 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        2 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        1 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5013700 |      24 |     13 |      8 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     12 |     12 |      11 |       4 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        3 |        0 |        0 |       2 |        0 |        1 |        2 |        1 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        5 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5013800 |      46 |     19 |     16 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     25 |     21 |      11 |       1 |       1 |       1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        3 |        2 |        0 |        1 |       1 |        1 |        3 |        0 |        4 |        1 |        2 |       0 |        0 |        1 |        1 |        3 |        1 |        2 |       1 |        0 |        1 |        1 |        3 |        1 |        0 |       1 |        2 |        1 |        0 |        2 |        0 |        1 |       1 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      3 |      1 |      0 |      2 |     11 |      0 |      0 |      0 |      2 |      3 |      2 |      1 |      0 |      8 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5013900 |      26 |     15 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     11 |     15 |       4 |       3 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |        1 |        3 |       0 |        0 |        2 |        3 |        0 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        4 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5014000 |     318 |    139 |    110 |     7 |    0 |     3 |    4 |    3 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    155 |    163 |      36 |      20 |      10 |       5 |      1 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        6 |       11 |       11 |        8 |        8 |       11 |       5 |       11 |        8 |       13 |       20 |        3 |       11 |      13 |        5 |        6 |       15 |       12 |        8 |        7 |       3 |        8 |        7 |       14 |       11 |        2 |        6 |       6 |       12 |        3 |        3 |       10 |        2 |        0 |       0 |        4 |        6 |        4 |        1 |        3 |        3 |       0 |        3 |        0 |        3 |        3 |        0 |        0 |       0 |        0 |        3 |        2 |        3 |        1 |        0 |       0 |      0 |      1 |     10 |     16 |      6 |      5 |      2 |     99 |      0 |      0 |      0 |     21 |     16 |      4 |      1 |      5 |     63 |      0 |      0 |      1 |      9 |     10 |      1 |      2 |      0 |     28 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 5015000 |     171 |     83 |     55 |     2 |    0 |     1 |    3 |    1 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     79 |     92 |      26 |       8 |       9 |       2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       2 |       0 |       1 |      1 |      1 |      2 |      0 |        4 |        7 |        7 |        6 |        4 |        6 |       3 |        2 |        8 |       12 |        5 |        5 |        9 |       5 |        3 |        4 |        6 |        5 |        3 |        5 |       1 |        5 |        4 |        7 |        2 |        5 |        3 |       2 |        0 |        4 |        3 |        1 |        2 |        2 |       0 |        3 |        2 |        5 |        2 |        1 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       1 |      0 |      2 |     10 |     12 |      2 |      0 |      2 |     55 |      0 |      0 |      1 |      2 |      5 |      4 |      1 |      3 |     39 |      0 |      0 |      0 |     10 |      5 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      4 |      0 |     37 | s03      | R    |
| 5015100 |     144 |     78 |     46 |     1 |    0 |     0 |    1 |    2 |     1 |    0 |     15 |    0 |    0 |    0 |    0 |     66 |     78 |      15 |      16 |       2 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |     14 |      5 |      1 |        6 |        3 |        4 |        6 |        6 |        7 |       0 |        6 |        4 |       10 |        8 |        7 |        9 |       2 |        4 |        2 |        1 |        4 |        4 |        6 |       1 |        0 |        3 |        5 |        7 |        5 |        4 |       0 |        2 |        1 |        0 |        4 |        0 |        0 |       0 |        2 |        0 |        2 |        3 |        1 |        0 |       0 |        0 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     16 |      8 |      1 |      0 |      1 |     52 |      0 |      0 |      1 |     10 |      6 |      1 |      3 |      1 |     24 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      9 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5015200 |     149 |     60 |     60 |     5 |    0 |     1 |    0 |    1 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     72 |     77 |      12 |      15 |      10 |       5 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      0 |        3 |        3 |        3 |        9 |        3 |        6 |       5 |        0 |        6 |        0 |        6 |        2 |        8 |       6 |        1 |        7 |        4 |        5 |        3 |        3 |       4 |        5 |        5 |        7 |        5 |        2 |        4 |       5 |        2 |        2 |        3 |        1 |        2 |        0 |       0 |        4 |        2 |        1 |        2 |        3 |        0 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |      6 |      7 |      2 |      2 |      1 |     42 |      0 |      0 |      0 |      8 |      5 |      1 |      1 |      1 |     44 |      0 |      0 |      0 |      5 |      1 |      3 |      0 |      0 |     13 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5015300 |      74 |     30 |     25 |     1 |    0 |     1 |    0 |    0 |     2 |    0 |     15 |    0 |    0 |    0 |    0 |     32 |     42 |       4 |      11 |       6 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        0 |        1 |        3 |        2 |        2 |        2 |       3 |        1 |        4 |        3 |        0 |        3 |        2 |       4 |        3 |        1 |        1 |        3 |        0 |        1 |       0 |        1 |        5 |        1 |        5 |        1 |        3 |       0 |        1 |        2 |        0 |        3 |        2 |        1 |       0 |        3 |        0 |        0 |        1 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |      1 |      1 |      0 |      3 |     22 |      0 |      0 |      0 |      4 |      3 |      3 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 5015400 |     168 |     70 |     62 |     5 |    0 |     4 |    0 |    2 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     80 |     88 |      37 |      14 |      13 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      9 |      2 |      1 |        4 |       11 |        6 |        5 |        1 |        5 |       0 |        1 |        7 |        7 |       11 |        2 |       10 |       0 |        2 |        4 |        6 |        7 |        4 |        6 |       2 |        3 |        6 |        7 |        7 |        3 |        4 |       1 |        1 |        3 |        3 |        2 |        1 |        1 |       0 |        4 |        2 |        2 |        5 |        1 |        0 |       0 |        2 |        1 |        2 |        1 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        2 |        0 |       0 |      0 |      0 |      9 |     14 |      5 |      3 |      1 |     38 |      0 |      0 |      0 |     13 |     15 |      6 |      0 |      3 |     25 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |     18 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5016000 |     200 |     69 |     88 |     2 |    0 |     3 |    1 |    0 |     1 |    0 |     36 |    0 |    0 |    0 |    0 |     92 |    108 |      18 |      16 |       7 |       0 |      1 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      3 |      0 |        0 |        5 |        5 |        8 |        1 |        4 |       4 |        1 |        6 |        6 |       11 |        5 |        6 |       7 |        2 |        9 |       13 |        9 |        7 |        5 |       2 |        1 |        5 |       14 |        9 |        6 |        4 |       2 |        1 |        3 |        0 |        6 |        1 |        2 |       0 |        2 |        6 |        6 |        6 |        3 |        0 |       0 |        0 |        2 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      7 |      9 |      1 |      1 |      2 |     49 |      0 |      0 |      0 |     14 |     18 |      1 |      2 |      2 |     51 |      0 |      0 |      0 |      4 |      4 |      0 |      2 |      0 |     26 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 5016100 |     371 |    203 |     98 |     4 |    0 |     2 |    3 |    2 |     2 |    0 |     57 |    0 |    0 |    0 |    0 |    152 |    219 |      36 |      19 |      14 |       5 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      9 |     15 |      5 |      0 |        6 |       21 |       13 |       16 |        9 |        9 |       1 |       14 |       34 |       31 |       22 |       17 |       10 |       0 |        5 |       12 |       12 |        8 |        8 |        6 |       0 |        5 |       10 |        6 |        9 |       11 |        6 |       0 |        2 |        8 |        5 |        4 |        0 |        1 |       0 |       14 |       13 |        6 |        1 |        1 |        2 |       0 |        0 |        1 |        1 |        2 |        1 |        1 |       0 |        3 |        3 |        0 |        0 |        1 |        0 |       0 |      0 |      2 |     39 |     18 |      6 |      6 |      3 |    129 |      0 |      0 |      0 |     22 |     10 |      5 |      2 |      5 |     54 |      0 |      0 |      0 |      7 |      1 |      1 |      2 |      0 |     46 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5016200 |     430 |    202 |    131 |    10 |    0 |     1 |    2 |    6 |     0 |    0 |     78 |    0 |    0 |    0 |    0 |    189 |    241 |      54 |      35 |      23 |       3 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       3 |       2 |       0 |      7 |     21 |     10 |      1 |       10 |        6 |       13 |       18 |       19 |       11 |       1 |        5 |       14 |       24 |       38 |       25 |       16 |       2 |        4 |        9 |       15 |       12 |       11 |        9 |       0 |       11 |       10 |       13 |       15 |       11 |       11 |       0 |        8 |        7 |        9 |       14 |        3 |        3 |       0 |        5 |       11 |        8 |        5 |        4 |        1 |       0 |        2 |        2 |        2 |        0 |        1 |        0 |       0 |        3 |        5 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |     33 |     34 |      5 |      9 |      4 |    117 |      0 |      0 |      1 |     11 |     23 |      8 |      5 |      6 |     77 |      0 |      0 |      1 |      6 |     14 |      4 |      0 |      4 |     49 |      0 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5016300 |      29 |     12 |      8 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     10 |     19 |       2 |       1 |       2 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        2 |        5 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        1 |        0 |       0 |        0 |        2 |        0 |        2 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      4 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5016400 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5016600 |     175 |     69 |     87 |     4 |    0 |     2 |    0 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     64 |    111 |       7 |       1 |       0 |       0 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      0 |      1 |        0 |        0 |        1 |        1 |        9 |       13 |       0 |        1 |        0 |        0 |        1 |       14 |       29 |       0 |        0 |        0 |        0 |        1 |        6 |       24 |       0 |        0 |        1 |        0 |        2 |       10 |       43 |       0 |        1 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        0 |        0 |        0 |        4 |        4 |       0 |        0 |        0 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |     11 |     10 |      4 |      1 |      2 |     41 |      0 |      0 |      0 |     15 |     11 |      7 |      9 |      3 |     42 |      0 |      0 |      1 |      1 |      2 |      1 |      2 |      0 |      6 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5016700 |      11 |      3 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |      5 |      6 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5016800 |      17 |     10 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |     13 |       5 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        0 |       1 |        0 |        3 |        1 |        0 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      2 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5020000 |     281 |    110 |    102 |    10 |    0 |     9 |    2 |    0 |     2 |    0 |     46 |    0 |    0 |    0 |    0 |    124 |    157 |      31 |      15 |      13 |       4 |      1 |      3 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        2 |        5 |       13 |        9 |        3 |       10 |       1 |        2 |        4 |       11 |       12 |       13 |       17 |       8 |        6 |        6 |       11 |       12 |        7 |        7 |       0 |        6 |        4 |       11 |        8 |        6 |       12 |       6 |        5 |        5 |        1 |        4 |        4 |        2 |       0 |        8 |        2 |        1 |       10 |        2 |        2 |       0 |        3 |        0 |        4 |        0 |        4 |        0 |       0 |        0 |        2 |        3 |        1 |        0 |        6 |       0 |      0 |      1 |     17 |     16 |      4 |      5 |      1 |     66 |      0 |      0 |      1 |      9 |     20 |      3 |      2 |      4 |     63 |      0 |      0 |      2 |     11 |      2 |      3 |      0 |      2 |     26 |      0 |      0 |      1 |      3 |      3 |      3 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5020100 |     284 |    102 |    129 |     5 |    0 |     2 |    3 |    2 |     1 |    0 |     40 |    0 |    0 |    0 |    0 |    134 |    150 |      11 |      18 |       8 |       0 |      3 |      3 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |       2 |       0 |       1 |       0 |      3 |      5 |      5 |      1 |        5 |        5 |        9 |       12 |        7 |        3 |       0 |        7 |       10 |       20 |       12 |        7 |        5 |       0 |        5 |       17 |       18 |       11 |       13 |        1 |       0 |        7 |        9 |       18 |       18 |        9 |        3 |       0 |        5 |        4 |        3 |        7 |        2 |        0 |       0 |        8 |        2 |        6 |        2 |        1 |        0 |       0 |        0 |        1 |        2 |        2 |        2 |        0 |       0 |        1 |        2 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    102 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    129 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     40 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5020400 |       4 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5022000 |     517 |    184 |    242 |     7 |    0 |     2 |    3 |    6 |     0 |    0 |     73 |    0 |    0 |    0 |    0 |    252 |    265 |      29 |      27 |      11 |       2 |      2 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      1 |      0 |        5 |        9 |       12 |       16 |       14 |       10 |      10 |        8 |       13 |       23 |       25 |       18 |       10 |      11 |       16 |       16 |       24 |       36 |       24 |        7 |       6 |       11 |       15 |       20 |       26 |       24 |       10 |       7 |        7 |       10 |        4 |        6 |        6 |        5 |       3 |        1 |        8 |        7 |        9 |        4 |        2 |       1 |        0 |        0 |        1 |        2 |        2 |        1 |       0 |        2 |        5 |        2 |        1 |        1 |        1 |       0 |      0 |      0 |     13 |     38 |     11 |      7 |      7 |    108 |      0 |      0 |      1 |     25 |     41 |     16 |      8 |     18 |    133 |      0 |      0 |      1 |     11 |      8 |      5 |      1 |      3 |     44 |      0 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5023000 |       7 |      4 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      5 |      2 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       1 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5023100 |     311 |    128 |    119 |    11 |    0 |     5 |    2 |    1 |     0 |    0 |     45 |    0 |    0 |    0 |    0 |    133 |    178 |      33 |       5 |       8 |       3 |      4 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        3 |        5 |        8 |       10 |       12 |       11 |       4 |        8 |        3 |        7 |       18 |        9 |       26 |       4 |        2 |        6 |        8 |       13 |       11 |       13 |       1 |        1 |        8 |        9 |       11 |        9 |       25 |       2 |        5 |        3 |        2 |        1 |        2 |        5 |       1 |        3 |        5 |        5 |        6 |        2 |        5 |       0 |        1 |        0 |        3 |        0 |        2 |        1 |       0 |        3 |        2 |        2 |        4 |        1 |        0 |       0 |      0 |      1 |     21 |     10 |      8 |      6 |      8 |     74 |      0 |      0 |      3 |     17 |     10 |      2 |      6 |     12 |     69 |      0 |      0 |      0 |     12 |      7 |      1 |      1 |      1 |     23 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5045000 |     489 |    268 |    113 |    12 |    0 |     4 |    9 |    5 |     3 |    0 |     75 |    0 |    0 |    0 |    0 |    174 |    315 |      57 |      18 |      16 |       5 |      5 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |       2 |       0 |       0 |       1 |      3 |      0 |      1 |      0 |       17 |       15 |       12 |       18 |        8 |       10 |       0 |       19 |       35 |       35 |       29 |       25 |       41 |       4 |        5 |        4 |       12 |       14 |        6 |        5 |       0 |        7 |       13 |        8 |       10 |        5 |       24 |       0 |        2 |       11 |        8 |        7 |        2 |        4 |       0 |       10 |       13 |        6 |        3 |        3 |        6 |       0 |        2 |        2 |        8 |        2 |        0 |        0 |       0 |        2 |        6 |        6 |        1 |        0 |        3 |       1 |      0 |      1 |     40 |     32 |      7 |      2 |      0 |    186 |      0 |      0 |      2 |     13 |     12 |      2 |      0 |      1 |     83 |      0 |      0 |      0 |     11 |      1 |      2 |      0 |      0 |     61 |      0 |      0 |      2 |      6 |      4 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 5045100 |     120 |     54 |     35 |     4 |    0 |     0 |    2 |    1 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     49 |     71 |      13 |       7 |       6 |       1 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      2 |      1 |        4 |        2 |        6 |        4 |        1 |        0 |       0 |        3 |        6 |        8 |       12 |        5 |        3 |       0 |        1 |        5 |        2 |        6 |        2 |        1 |       0 |        2 |        5 |        2 |        5 |        1 |        3 |       0 |        1 |        1 |        5 |        1 |        2 |        1 |       0 |        2 |        6 |        2 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      6 |      1 |      0 |      0 |     41 |      0 |      0 |      0 |      4 |      1 |      0 |      1 |      0 |     29 |      0 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |     14 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5046000 |     270 |    138 |     74 |     7 |    0 |     1 |    0 |    3 |     4 |    0 |     43 |    0 |    0 |    0 |    0 |    126 |    144 |      39 |      13 |      11 |       5 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        7 |        8 |       13 |       10 |       10 |       2 |        8 |       11 |       13 |       20 |       11 |       16 |       3 |        5 |        5 |        9 |        6 |        7 |        4 |       0 |        5 |        4 |       11 |        4 |        4 |        9 |       1 |        7 |        6 |        3 |        3 |        3 |        0 |       0 |        1 |        6 |        3 |        3 |        4 |        4 |       0 |        3 |        3 |        3 |        2 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      3 |     28 |     13 |      3 |      2 |      3 |     86 |      0 |      0 |      2 |      8 |     10 |      2 |      1 |      2 |     49 |      0 |      0 |      2 |      3 |      3 |      2 |      0 |      1 |     32 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5046100 |     183 |     86 |     56 |     6 |    0 |     0 |    2 |    3 |     2 |    0 |     28 |    0 |    0 |    0 |    0 |     76 |    107 |      18 |      16 |       8 |       3 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      1 |      0 |        4 |        5 |        6 |        7 |        6 |        5 |       1 |        4 |        9 |       11 |       13 |        9 |        3 |       3 |        2 |        5 |        5 |        3 |        6 |        0 |       2 |        5 |        5 |        5 |        4 |        4 |        7 |       3 |        4 |        3 |        4 |        1 |        2 |        2 |       0 |        0 |        3 |        2 |        6 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        2 |        4 |        2 |        0 |       0 |      0 |      1 |     13 |      8 |      0 |      1 |      0 |     63 |      0 |      0 |      1 |      5 |      9 |      1 |      0 |      2 |     38 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5047000 |     287 |    133 |     88 |    10 |    0 |     0 |    4 |    0 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    139 |    148 |      34 |      11 |      12 |       2 |      5 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |       10 |       10 |        5 |       17 |        3 |        7 |       4 |       11 |       10 |       18 |       17 |        8 |       10 |       3 |        7 |       13 |       10 |       12 |        6 |        3 |       0 |        3 |        9 |        4 |        8 |        4 |        5 |       4 |        5 |        7 |        2 |        7 |        3 |        1 |       0 |        7 |        3 |        3 |        9 |        3 |        1 |       0 |        0 |        1 |        3 |        1 |        2 |        0 |       0 |        2 |        3 |        3 |        0 |        0 |        0 |       0 |      0 |      2 |     15 |     12 |      0 |      3 |      3 |     98 |      0 |      0 |      0 |     11 |      5 |      5 |      2 |      3 |     62 |      0 |      0 |      0 |      7 |      3 |      2 |      1 |      0 |     38 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 5047100 |      78 |     30 |     32 |     3 |    0 |     0 |    1 |    0 |     1 |    0 |     11 |    0 |    0 |    0 |    0 |     39 |     39 |       7 |       8 |       3 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        1 |        4 |        2 |        2 |        1 |       0 |        5 |        5 |        1 |        2 |        2 |        4 |       0 |        4 |        6 |        2 |        0 |        3 |        1 |       0 |        3 |        4 |        1 |        3 |        3 |        2 |       0 |        2 |        2 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      3 |      1 |      0 |      0 |     20 |      0 |      0 |      0 |     11 |      1 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5048000 |     423 |    221 |    113 |     8 |    0 |     0 |    3 |    6 |     6 |    0 |     66 |    0 |    0 |    0 |    0 |    156 |    267 |      48 |      14 |       8 |       1 |      7 |      4 |      5 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      1 |      0 |      0 |      5 |      1 |      1 |      1 |       1 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        8 |       14 |       12 |       13 |        7 |       11 |       1 |       18 |       21 |       25 |       27 |       13 |       51 |       0 |        2 |        8 |       11 |        9 |        8 |        8 |       0 |        8 |       16 |       11 |       11 |        7 |       12 |       2 |        7 |        5 |        2 |        6 |        6 |        3 |       0 |        6 |       10 |        4 |        7 |        2 |        8 |       0 |        0 |        3 |        5 |        4 |        3 |        0 |       0 |        2 |        3 |        1 |        2 |        0 |        0 |       0 |      0 |      1 |     37 |     29 |      9 |      6 |      2 |    137 |      0 |      0 |      0 |     15 |      6 |      5 |      3 |      0 |     84 |      0 |      0 |      0 |     11 |      2 |      1 |      0 |      0 |     52 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 5049000 |     168 |     80 |     59 |     4 |    0 |     2 |    0 |    0 |     2 |    0 |     21 |    0 |    0 |    0 |    0 |     77 |     91 |      16 |       1 |       6 |       1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        4 |        2 |        7 |        5 |        6 |       6 |        6 |        3 |        6 |        9 |        7 |       10 |       6 |        1 |        2 |        6 |        7 |        6 |        6 |       2 |        0 |        3 |        5 |        5 |        6 |        7 |       3 |        2 |        1 |        3 |        2 |        1 |        1 |       0 |        1 |        2 |        4 |        2 |        1 |        1 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        2 |        0 |       0 |      0 |      1 |      9 |     11 |      7 |      3 |      3 |     46 |      0 |      0 |      0 |      4 |      9 |      2 |      7 |      0 |     37 |      0 |      0 |      0 |      3 |      5 |      1 |      2 |      0 |     10 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5051000 |     320 |    143 |    104 |     7 |    0 |     2 |    3 |    1 |     3 |    0 |     57 |    0 |    0 |    0 |    0 |    142 |    178 |      34 |      17 |      11 |       3 |      1 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      7 |      6 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        2 |       10 |       18 |       11 |        6 |        3 |       7 |        6 |       12 |       16 |       17 |        9 |       15 |      11 |        3 |        6 |       13 |        5 |        8 |        8 |       4 |        4 |        7 |        8 |       14 |        6 |       11 |       7 |        5 |        8 |        7 |        3 |        7 |        1 |       1 |        4 |        2 |        7 |        5 |        2 |        5 |       0 |        1 |        1 |        2 |        2 |        0 |        0 |       0 |        1 |        3 |        1 |        3 |        2 |        0 |       0 |      0 |      0 |     23 |     22 |      8 |      4 |      2 |     84 |      0 |      0 |      0 |     13 |     11 |      4 |      8 |      6 |     62 |      0 |      0 |      2 |     11 |     12 |      0 |      0 |      0 |     32 |      0 |      0 |      0 |      3 |      0 |      1 |      1 |      1 |     10 |      0 |     37 | s03      | R    |
| 5051100 |     239 |    104 |     85 |     4 |    0 |     0 |    0 |    1 |     2 |    0 |     43 |    0 |    0 |    0 |    0 |    127 |    112 |      30 |      13 |      16 |       2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       1 |       0 |      1 |      1 |      0 |      0 |        2 |        7 |       11 |        7 |        5 |       13 |       4 |        5 |        8 |        6 |       11 |        8 |       10 |       7 |        2 |        9 |        7 |       14 |        4 |       10 |       1 |        5 |        5 |       11 |        9 |        3 |        4 |       1 |        5 |        9 |        4 |        5 |        3 |        0 |       0 |        6 |        3 |        3 |        3 |        2 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      7 |     10 |      4 |      4 |      2 |     77 |      0 |      0 |      1 |     11 |     15 |      5 |      6 |      5 |     42 |      0 |      0 |      0 |      5 |      3 |      0 |      2 |      0 |     33 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 5052000 |     352 |    115 |    167 |     6 |    0 |     4 |    3 |    5 |     3 |    0 |     49 |    0 |    0 |    0 |    0 |    153 |    199 |      25 |      13 |       8 |       7 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      1 |        3 |       11 |        8 |       10 |        2 |        4 |       8 |        8 |       12 |       13 |       12 |        5 |       10 |       9 |        5 |        7 |       16 |       17 |        9 |       13 |       8 |        6 |        4 |       18 |       23 |        9 |       18 |      14 |        3 |        3 |        3 |        3 |        7 |        2 |       0 |        7 |        8 |        9 |        2 |        1 |        1 |       0 |        0 |        4 |        5 |        0 |        1 |        0 |       1 |        4 |        4 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     24 |     11 |      3 |      2 |      3 |     71 |      0 |      0 |      2 |     26 |     25 |      7 |      6 |      8 |     93 |      0 |      0 |      0 |     10 |      3 |      2 |      2 |      0 |     32 |      0 |      0 |      0 |      6 |      1 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5053000 |     254 |    108 |     87 |     5 |    0 |     4 |    2 |    0 |     3 |    0 |     45 |    0 |    0 |    0 |    0 |    110 |    144 |      36 |      16 |      13 |       1 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      1 |      0 |        5 |        5 |        5 |       14 |        5 |        8 |       4 |        3 |       12 |       10 |       14 |        8 |        8 |       7 |        3 |        7 |        7 |       13 |        4 |        7 |       0 |        3 |        9 |        9 |       10 |        7 |        5 |       3 |        3 |        5 |        6 |        2 |        0 |        0 |       0 |        5 |        8 |        2 |        4 |        3 |        5 |       2 |        0 |        2 |        4 |        1 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        3 |        0 |       0 |      0 |      0 |     18 |     11 |      5 |      3 |      3 |     68 |      0 |      0 |      0 |     11 |     16 |      1 |      5 |      6 |     48 |      0 |      0 |      1 |      5 |      3 |      0 |      1 |      0 |     35 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5053100 |      27 |     10 |     11 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     15 |     12 |       1 |       5 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        2 |        1 |        1 |        0 |       0 |        2 |        2 |        0 |        2 |        1 |        1 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5053500 |     193 |     67 |     85 |     0 |    0 |     0 |    3 |    0 |     1 |    0 |     37 |    0 |    0 |    0 |    0 |     91 |    102 |      18 |       5 |      12 |       1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        7 |        5 |        3 |        4 |       2 |        4 |        4 |        8 |       12 |        1 |        8 |       6 |        2 |        6 |       13 |       12 |        3 |        2 |       6 |        5 |        8 |        9 |        5 |        4 |        2 |       8 |        3 |        8 |        5 |        2 |        3 |        0 |       0 |        2 |        6 |        4 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     12 |      8 |      3 |      4 |      3 |     37 |      0 |      0 |      0 |     12 |      6 |      5 |      1 |      1 |     60 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      0 |     30 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5054000 |     377 |    151 |    143 |     7 |    0 |     3 |    1 |    5 |     1 |    0 |     66 |    0 |    0 |    0 |    0 |    173 |    204 |      30 |      18 |      14 |       2 |      9 |     11 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        6 |       12 |       14 |       12 |        8 |       6 |        3 |       13 |       10 |       13 |       10 |       21 |      20 |        4 |       15 |       13 |       15 |        9 |        8 |      10 |        3 |        7 |       14 |       17 |        8 |       11 |       9 |        3 |        8 |        6 |        4 |        6 |        1 |       1 |        7 |        8 |       12 |        6 |        1 |        3 |       0 |        0 |        3 |        2 |        2 |        0 |        1 |       1 |        1 |        2 |        2 |        0 |        2 |        0 |       1 |      0 |      2 |     15 |     23 |      8 |      8 |      9 |     86 |      0 |      0 |      1 |     16 |     20 |      5 |     11 |      3 |     87 |      0 |      0 |      0 |     12 |      7 |      0 |      1 |      4 |     42 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 5055000 |     291 |    119 |    119 |     6 |    0 |     3 |    4 |    3 |     2 |    0 |     35 |    0 |    0 |    0 |    0 |    127 |    164 |      23 |      10 |       8 |       2 |      1 |      3 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        1 |        5 |        3 |       12 |        7 |        8 |       8 |        5 |       10 |       14 |       16 |        9 |        9 |      12 |        3 |        8 |        9 |       12 |        6 |       14 |       8 |        5 |        5 |       10 |       12 |        7 |       12 |       8 |        3 |        2 |        4 |        2 |        0 |        0 |       1 |        4 |        2 |        7 |        5 |        2 |        3 |       0 |        0 |        2 |        3 |        3 |        2 |        1 |       0 |        3 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     15 |     21 |      3 |      2 |      6 |     72 |      0 |      0 |      1 |      9 |     13 |      8 |      4 |      3 |     81 |      0 |      0 |      0 |      4 |      2 |      2 |      1 |      0 |     26 |      0 |      0 |      2 |      3 |      5 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5056000 |     354 |    121 |    143 |     9 |    0 |     5 |    3 |    2 |     1 |    0 |     70 |    0 |    0 |    0 |    0 |    163 |    191 |      21 |       6 |      12 |       4 |      0 |      9 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       1 |       0 |       1 |       0 |      1 |      0 |      0 |      0 |        4 |        5 |        5 |       12 |        7 |       14 |       4 |        5 |       10 |        8 |       16 |       12 |       11 |       8 |        6 |        9 |       11 |       16 |       15 |        8 |       5 |        5 |        6 |       10 |       14 |       17 |       12 |       9 |        6 |        8 |        3 |       11 |        5 |        2 |       1 |        7 |        7 |        4 |        6 |        6 |        3 |       1 |        3 |        1 |        1 |        0 |        0 |        1 |       0 |        3 |        3 |        3 |        3 |        1 |        1 |       0 |      0 |      1 |     13 |     14 |     14 |      7 |      2 |     70 |      0 |      0 |      0 |     20 |     21 |     11 |      4 |      8 |     79 |      0 |      0 |      0 |     10 |      4 |      4 |      1 |      2 |     49 |      0 |      0 |      0 |      2 |      7 |      3 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5056100 |      92 |     51 |     15 |     3 |    0 |     1 |    0 |    0 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     39 |     53 |      18 |       0 |       4 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        3 |        3 |        6 |        1 |        6 |       0 |        2 |        3 |        4 |       12 |        3 |        5 |       1 |        1 |        2 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        1 |        3 |        1 |        0 |       2 |        3 |        2 |        2 |        2 |        0 |        0 |       0 |        3 |        4 |        2 |        1 |        1 |        2 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |     12 |      4 |      1 |      4 |     23 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |     11 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5057000 |     199 |     80 |     74 |    10 |    0 |     2 |    1 |    3 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     98 |    101 |      23 |      10 |      10 |       4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       1 |      2 |      7 |      2 |      0 |        3 |        4 |        7 |       13 |        5 |        0 |       6 |        4 |        3 |       10 |       13 |        0 |        5 |       7 |        2 |        5 |        9 |        8 |        5 |        2 |       6 |        1 |        9 |        7 |        8 |        1 |        4 |       7 |        4 |        5 |        2 |        2 |        2 |        0 |       0 |        3 |        0 |        2 |        5 |        3 |        1 |       0 |        1 |        2 |        1 |        2 |        2 |        0 |       0 |        3 |        2 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |     10 |      8 |      5 |      3 |      5 |     49 |      0 |      0 |      0 |      8 |     12 |      4 |      2 |      4 |     44 |      0 |      0 |      1 |      2 |      4 |      0 |      2 |      1 |     19 |      0 |      0 |      0 |      3 |      2 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5057100 |     425 |    169 |    178 |     4 |    0 |     8 |    5 |    2 |     1 |    0 |     58 |    0 |    0 |    0 |    0 |    184 |    241 |      28 |      11 |       8 |       6 |      3 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       1 |       2 |       0 |       0 |      5 |      2 |      2 |      2 |       10 |        8 |       16 |       12 |        4 |       10 |       8 |       13 |       15 |       16 |       17 |       12 |       15 |      13 |        8 |        8 |       20 |       12 |       12 |       17 |       6 |        8 |       14 |       18 |       18 |       10 |       18 |       9 |        4 |        5 |        3 |        7 |        3 |        1 |       0 |        9 |        7 |       12 |        4 |        3 |        0 |       0 |        3 |        1 |        2 |        0 |        2 |        2 |       0 |        2 |        2 |        2 |        2 |        1 |        1 |       0 |      0 |      2 |     23 |     28 |      7 |      0 |      5 |    104 |      0 |      0 |      2 |     18 |     16 |     14 |      6 |      4 |    118 |      0 |      0 |      0 |      8 |      6 |      1 |      1 |      1 |     41 |      0 |      0 |      3 |      0 |      9 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5058000 |     387 |    167 |    146 |     9 |    0 |     7 |    1 |    2 |     0 |    0 |     55 |    0 |    0 |    0 |    0 |    162 |    225 |      28 |      31 |      11 |       3 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |       6 |       6 |       3 |       1 |      8 |      3 |      3 |      1 |        5 |        6 |       13 |       16 |       13 |        9 |       8 |        7 |       15 |       14 |       19 |       19 |       11 |      12 |        9 |        9 |       14 |       13 |        9 |       11 |       3 |       10 |        7 |       11 |       27 |       11 |        4 |       8 |        3 |        4 |        2 |        5 |        1 |        1 |       0 |        8 |        4 |       10 |       11 |        3 |        3 |       0 |        0 |        0 |        2 |        6 |        0 |        0 |       0 |        0 |        4 |        4 |        1 |        1 |        1 |       0 |      0 |      0 |     22 |     23 |      2 |      4 |      6 |    110 |      0 |      0 |      1 |     18 |     30 |      5 |      3 |     12 |     77 |      0 |      0 |      0 |      9 |      4 |      2 |      2 |      2 |     36 |      0 |      0 |      0 |      4 |      2 |      2 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5058100 |     116 |     50 |     45 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     51 |     65 |      10 |       0 |       3 |       0 |      2 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        5 |        2 |        2 |        3 |       3 |        1 |        4 |        8 |        5 |        1 |        6 |       9 |        2 |        4 |        1 |        3 |        1 |        4 |       8 |        1 |        3 |        5 |        1 |        2 |        6 |       4 |        2 |        0 |        4 |        3 |        1 |        0 |       0 |        2 |        0 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      8 |      2 |      0 |      1 |     37 |      0 |      0 |      0 |      1 |      5 |      1 |      1 |      2 |     35 |      0 |      0 |      0 |      3 |      3 |      3 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5060000 |     711 |    302 |    273 |    14 |    0 |     7 |    7 |    3 |     5 |    0 |    100 |    0 |    0 |    0 |    0 |    317 |    394 |      49 |      21 |      13 |       2 |     15 |      5 |     12 |      5 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      2 |      1 |      0 |      0 |        6 |       17 |       20 |       16 |       14 |       37 |      19 |        9 |       20 |       25 |       29 |       17 |       51 |      22 |       11 |       10 |       21 |       30 |       12 |       25 |      11 |       10 |        7 |       20 |       26 |       16 |       59 |      15 |        9 |        9 |       13 |        8 |        1 |       10 |       0 |        6 |        8 |       13 |       12 |        1 |        9 |       1 |        2 |        4 |        3 |        4 |        2 |        3 |       0 |        5 |        2 |        2 |        3 |        2 |        4 |       0 |      0 |      1 |     35 |     32 |      7 |      7 |      6 |    214 |      0 |      0 |      0 |     20 |     42 |      7 |      7 |      9 |    188 |      0 |      0 |      2 |     15 |      8 |      4 |      2 |      4 |     65 |      0 |      0 |      1 |      5 |     10 |      2 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 5061000 |     309 |    122 |    120 |    10 |    0 |     1 |    3 |    2 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    159 |    150 |      31 |      22 |      12 |       2 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       1 |       2 |       4 |       0 |      5 |      1 |      1 |      0 |       10 |        8 |       11 |       13 |       10 |        9 |       3 |        8 |        4 |        7 |       19 |        4 |       10 |       6 |        9 |        2 |       12 |       19 |        7 |        6 |       1 |        6 |        5 |       19 |       16 |        5 |       10 |       3 |        5 |        6 |        5 |        9 |        3 |        1 |       0 |        4 |        3 |        6 |        4 |        2 |        0 |       1 |        0 |        2 |        6 |        2 |        0 |        0 |       0 |        3 |        1 |        2 |        1 |        1 |        0 |       0 |      0 |      1 |     16 |      9 |      7 |      8 |      8 |     73 |      0 |      0 |      1 |     22 |     15 |      5 |      9 |      5 |     63 |      0 |      0 |      2 |      6 |      3 |      1 |      4 |      1 |     32 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5062000 |     608 |    283 |    172 |    14 |    0 |     8 |    5 |    5 |     3 |    0 |    118 |    0 |    0 |    0 |    0 |    284 |    324 |      69 |      33 |      18 |       2 |      6 |      7 |      9 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       2 |       4 |       2 |       1 |      5 |      3 |      3 |      1 |       19 |       12 |       28 |       26 |       12 |       13 |       6 |       12 |       31 |       37 |       42 |       20 |       14 |      11 |       11 |       19 |       17 |       23 |       15 |        4 |       2 |        5 |       19 |       16 |       18 |       11 |        9 |       3 |        5 |       15 |       12 |       13 |        8 |        4 |       0 |        8 |       16 |       18 |       14 |        4 |        1 |       0 |        2 |        5 |        3 |        6 |        4 |        0 |       0 |        2 |        1 |        4 |        5 |        3 |        0 |       0 |      0 |      3 |     29 |     40 |     18 |     13 |      8 |    172 |      0 |      0 |      0 |     17 |     39 |      7 |      7 |      5 |     97 |      0 |      0 |      3 |     22 |     16 |      5 |      4 |      3 |     65 |      0 |      0 |      0 |      4 |     14 |      1 |      2 |      0 |     14 |      0 |     37 | s03      | R    |
| 5063000 |     367 |    155 |    129 |     9 |    0 |     4 |    1 |    4 |     3 |    0 |     62 |    0 |    0 |    0 |    0 |    166 |    201 |      38 |      22 |      10 |       4 |      2 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      1 |      0 |        5 |       15 |       16 |       19 |        7 |        6 |       2 |        9 |       12 |       21 |       18 |        9 |       13 |       3 |        4 |       13 |       16 |       11 |        9 |        6 |       1 |       12 |        9 |       18 |       11 |        7 |        8 |       4 |        4 |        3 |        7 |        5 |        3 |        1 |       2 |        8 |        7 |        9 |        7 |        6 |        0 |       0 |        1 |        3 |        4 |        0 |        2 |        1 |       0 |        3 |        1 |        1 |        3 |        1 |        1 |       0 |      0 |      1 |     22 |     28 |      9 |      5 |      4 |     86 |      0 |      0 |      0 |     19 |     14 |      6 |      8 |      5 |     77 |      0 |      0 |      0 |      9 |      6 |      0 |      1 |      2 |     44 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5064000 |     342 |    155 |    104 |    14 |    0 |     4 |    2 |    2 |     4 |    0 |     57 |    0 |    0 |    0 |    0 |    160 |    182 |      32 |      20 |       9 |       1 |      5 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        8 |        6 |       10 |       21 |        5 |        7 |       8 |        3 |       10 |       17 |       25 |       11 |       12 |      12 |        3 |        7 |       14 |       12 |        6 |        1 |       7 |        2 |        9 |       11 |       13 |        4 |        8 |       7 |        4 |        7 |       10 |        5 |        2 |        0 |       2 |        4 |        6 |        5 |        4 |        3 |        2 |       3 |        4 |        3 |        3 |        2 |        1 |        2 |       0 |        2 |        1 |        3 |        4 |        1 |        0 |       0 |      0 |      0 |     11 |     20 |      7 |      2 |      4 |    111 |      0 |      0 |      1 |      9 |     17 |      9 |      3 |      2 |     63 |      0 |      0 |      0 |      7 |      7 |      1 |      2 |      2 |     38 |      0 |      0 |      1 |      4 |      5 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5065000 |     596 |    278 |    196 |    15 |    0 |     8 |    0 |    2 |     3 |    0 |     94 |    0 |    0 |    0 |    0 |    279 |    317 |      83 |      18 |      25 |       2 |      7 |      9 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      0 |      0 |       12 |        7 |       20 |       27 |       13 |       19 |      18 |        9 |       26 |       29 |       36 |       21 |       24 |      17 |        8 |       19 |       32 |       15 |       10 |       10 |      14 |        6 |       14 |       20 |       15 |       11 |       11 |      11 |        7 |        8 |        9 |       17 |        2 |        2 |       0 |        8 |       11 |       14 |        9 |        4 |        3 |       0 |        1 |        1 |        2 |        3 |        0 |        1 |       2 |        2 |        5 |        4 |        6 |        0 |        1 |       0 |      0 |      4 |     38 |     29 |     20 |      8 |     10 |    169 |      0 |      0 |      0 |     23 |     21 |     13 |      7 |      7 |    125 |      0 |      0 |      1 |     21 |     10 |      4 |      0 |      0 |     58 |      0 |      0 |      0 |      7 |      3 |      0 |      0 |      1 |     17 |      0 |     37 | s03      | R    |
| 5066000 |     397 |    167 |    144 |     9 |    0 |     5 |    4 |    3 |     1 |    0 |     64 |    0 |    0 |    0 |    0 |    194 |    203 |      41 |      24 |       6 |       3 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |       6 |       9 |       4 |       1 |      1 |      7 |      5 |      0 |        6 |       13 |        8 |       15 |       14 |       10 |       5 |        6 |       18 |       19 |       22 |       20 |        7 |       4 |        9 |       11 |       16 |       21 |       16 |        6 |       1 |        8 |       13 |       10 |       12 |       13 |        7 |       1 |        6 |        6 |        5 |        6 |        6 |        2 |       0 |       13 |        4 |        6 |        3 |        5 |        2 |       0 |        1 |        2 |        5 |        0 |        3 |        1 |       0 |        3 |        2 |        1 |        3 |        1 |        0 |       0 |      0 |      3 |     25 |     26 |      9 |      7 |      4 |     93 |      0 |      0 |      0 |     15 |     28 |      6 |      6 |      5 |     84 |      0 |      0 |      1 |      8 |      4 |      4 |      1 |      3 |     43 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 5067000 |     466 |    165 |    180 |    10 |    0 |     5 |    7 |    8 |     4 |    0 |     87 |    0 |    0 |    0 |    0 |    196 |    270 |      32 |      35 |      18 |       6 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       0 |      6 |     10 |      5 |      1 |        5 |       10 |        8 |        8 |       17 |        6 |       8 |        8 |       13 |       16 |       21 |       20 |       13 |      12 |        9 |       11 |       11 |       26 |       17 |        8 |       1 |       12 |       12 |       27 |       23 |       11 |        6 |       6 |        3 |       10 |        3 |       10 |        3 |        4 |       2 |       10 |       11 |       14 |       12 |        0 |        4 |       1 |        4 |        2 |        5 |        3 |        2 |        0 |       0 |        2 |        6 |        3 |        6 |        0 |        1 |       0 |      0 |      1 |     27 |     20 |      9 |      7 |      5 |     96 |      0 |      0 |      3 |     20 |     30 |     11 |     10 |      4 |    102 |      0 |      0 |      1 |     19 |     16 |      3 |      3 |      1 |     44 |      0 |      0 |      0 |      6 |     10 |      0 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 5069000 |     649 |    314 |    194 |    15 |    0 |     6 |    6 |    2 |     9 |    0 |    103 |    0 |    0 |    0 |    0 |    289 |    360 |      66 |      19 |      16 |       7 |      7 |      6 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      2 |      1 |       16 |       17 |       19 |       25 |       11 |       16 |      25 |       18 |       29 |       32 |       30 |       18 |       36 |      22 |       10 |       14 |       19 |       13 |        3 |       17 |      13 |        7 |       23 |       16 |       21 |        8 |       16 |      14 |        4 |        6 |        9 |       18 |        9 |        3 |       0 |       11 |        5 |       11 |       12 |        7 |        7 |       1 |        6 |        6 |        3 |        5 |        1 |        1 |       0 |        3 |        2 |        3 |        4 |        2 |        2 |       0 |      0 |      3 |     24 |     38 |     13 |      8 |      9 |    219 |      0 |      0 |      2 |     19 |     27 |      4 |     12 |      2 |    128 |      0 |      0 |      3 |     14 |     11 |     10 |      1 |      3 |     61 |      0 |      0 |      1 |      3 |      8 |      1 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 5069100 |      36 |     19 |     10 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     16 |     20 |       3 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        0 |        3 |        1 |        2 |        1 |        0 |       0 |        1 |        2 |        1 |        5 |        1 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        1 |        1 |        0 |        1 |        3 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5070000 |     371 |    151 |    128 |     7 |    0 |     5 |    4 |    1 |     4 |    0 |     71 |    0 |    0 |    0 |    0 |    177 |    194 |      47 |      15 |      12 |       4 |      6 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       4 |       5 |       2 |       2 |      0 |      4 |      0 |      0 |        4 |       13 |       14 |       14 |       11 |       11 |       6 |        2 |        9 |       17 |       13 |       11 |       13 |      13 |        3 |        5 |       12 |       15 |       10 |        8 |       5 |        4 |       10 |       15 |       12 |       12 |       11 |       6 |        5 |        4 |        8 |       15 |        3 |        1 |       1 |       10 |        7 |        5 |        8 |        3 |        1 |       0 |        2 |        1 |        2 |        0 |        3 |        0 |       1 |        1 |        2 |        4 |        2 |        2 |        1 |       0 |      0 |      1 |     17 |     36 |     11 |      7 |      5 |     74 |      0 |      0 |      1 |     17 |     22 |     11 |      3 |      4 |     70 |      0 |      0 |      1 |      6 |      5 |      5 |      0 |      5 |     49 |      0 |      0 |      0 |      0 |      3 |      6 |      0 |      1 |     11 |      0 |     37 | s03      | R    |
| 5071000 |     505 |    233 |    173 |     9 |    0 |     7 |    3 |    0 |     3 |    0 |     77 |    0 |    0 |    0 |    0 |    241 |    264 |      41 |      16 |      16 |       5 |      7 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |       16 |       15 |       18 |       14 |       20 |      14 |        7 |       20 |       21 |       27 |       19 |       29 |      10 |        7 |        8 |       13 |       25 |       16 |       10 |       8 |        7 |        7 |       18 |       15 |       12 |       16 |      11 |        7 |        9 |        4 |       13 |        5 |        2 |       1 |        7 |       10 |        5 |        9 |        3 |        2 |       0 |        5 |        3 |        1 |        3 |        0 |        1 |       0 |        1 |        4 |        3 |        1 |        0 |        0 |       0 |      0 |      4 |     21 |     32 |     10 |      8 |     10 |    148 |      0 |      0 |      2 |     13 |     23 |      4 |      6 |     12 |    113 |      0 |      0 |      1 |     11 |      4 |      6 |      1 |      5 |     49 |      0 |      0 |      0 |      5 |      3 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5072000 |      31 |     13 |      9 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     15 |     16 |       2 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        0 |        0 |       2 |        0 |        0 |        3 |        3 |        0 |        0 |       1 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        1 |       0 |        1 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5073000 |      21 |      7 |      6 |     2 |    0 |     1 |    1 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      9 |     12 |       4 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       1 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5074000 |     141 |     56 |     58 |     3 |    0 |     2 |    1 |    0 |     3 |    0 |     18 |    0 |    0 |    0 |    0 |     65 |     76 |      17 |       4 |       1 |       1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        4 |        9 |        4 |        4 |       3 |        2 |        3 |        6 |        6 |        5 |        7 |       2 |        6 |        4 |        5 |        6 |        3 |        3 |       1 |        7 |        2 |        5 |        6 |        3 |        5 |       2 |        0 |        0 |        4 |        3 |        0 |        0 |       0 |        3 |        2 |        2 |        2 |        2 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |     14 |     11 |      5 |      1 |      1 |     24 |      0 |      0 |      1 |      8 |      7 |      2 |      4 |      4 |     32 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |     14 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5102000 |     293 |     91 |    154 |     5 |    0 |     2 |    3 |    2 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |    132 |    161 |      26 |      16 |       7 |       0 |      3 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      1 |        1 |        2 |        6 |        9 |        7 |        5 |       7 |        3 |        5 |        5 |       15 |        7 |        7 |      12 |        6 |        9 |        9 |       15 |       12 |       13 |      11 |        7 |        8 |        7 |       17 |       12 |       17 |      11 |        4 |        3 |        2 |        4 |        0 |        1 |       0 |        4 |        3 |        4 |        6 |        0 |        3 |       1 |        2 |        0 |        3 |        0 |        0 |        1 |       0 |        0 |        1 |        2 |        2 |        2 |        0 |       0 |      0 |      0 |      8 |      8 |      4 |      4 |      6 |     61 |      0 |      0 |      1 |     14 |     25 |     10 |      5 |      8 |     91 |      0 |      0 |      0 |      7 |      5 |      2 |      0 |      0 |     21 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5102100 |      92 |     26 |     42 |     2 |    0 |     1 |    0 |    0 |     1 |    0 |     20 |    0 |    0 |    0 |    0 |     48 |     44 |       2 |       4 |       5 |       0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        4 |        1 |        3 |       3 |        0 |        1 |        1 |        3 |        4 |        2 |       2 |        0 |        2 |        4 |        3 |        2 |        7 |       2 |        1 |        0 |        4 |        2 |        3 |        7 |       5 |        6 |        0 |        2 |        1 |        3 |        1 |       0 |        1 |        0 |        1 |        2 |        1 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      3 |      2 |      1 |      2 |     16 |      0 |      0 |      0 |      3 |     10 |      1 |      1 |      4 |     23 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5102200 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5102500 |      95 |     34 |     46 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     42 |     53 |      18 |       9 |       6 |       2 |      2 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        4 |        1 |        2 |       0 |        1 |        3 |        5 |        6 |        4 |        3 |       3 |        2 |        4 |        3 |        3 |        3 |        6 |       3 |        1 |        4 |        1 |        3 |        4 |        4 |       5 |        2 |        1 |        1 |        1 |        1 |        2 |       0 |        2 |        2 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      8 |      7 |      3 |      2 |      0 |     14 |      0 |      0 |      0 |      5 |      4 |      4 |      0 |      0 |     33 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5102700 |      32 |      7 |     13 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     16 |     16 |       4 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        0 |        0 |        2 |        0 |        2 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        5 |        0 |        1 |       0 |        0 |        0 |        0 |        3 |        1 |        1 |       1 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |        3 |        0 |        2 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      4 |      0 |      3 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      9 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5102800 |      16 |      1 |     13 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      7 |      9 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        1 |        1 |        0 |        2 |        1 |       1 |        0 |        1 |        1 |        0 |        2 |        3 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5102900 |      20 |      3 |     15 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |     14 |       3 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       2 |        0 |        0 |        1 |        1 |        3 |        4 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5103000 |     372 |    115 |    181 |    10 |    0 |     7 |    2 |    1 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    149 |    223 |      32 |      20 |      18 |       1 |      3 |      8 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      3 |      1 |      1 |      0 |        2 |        7 |        5 |        5 |        7 |        5 |       4 |       10 |       12 |        7 |       13 |        6 |       28 |       4 |        5 |        5 |       13 |       17 |       10 |       20 |       8 |        5 |       12 |       16 |       13 |       12 |       30 |      15 |        4 |        6 |        2 |        7 |        3 |        4 |       0 |        6 |        4 |        7 |        4 |        3 |        4 |       1 |        0 |        3 |        1 |        2 |        1 |        3 |       0 |        0 |        1 |        2 |        3 |        1 |        4 |       0 |      0 |      1 |     12 |     17 |      3 |      2 |      1 |     79 |      0 |      0 |      1 |     21 |     10 |      5 |      3 |      1 |    140 |      0 |      0 |      1 |      4 |      2 |      2 |      0 |      1 |     45 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 5103100 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5103200 |     172 |     37 |    102 |     3 |    0 |     1 |    2 |    1 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     88 |     84 |       9 |       7 |       3 |       0 |      1 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |     10 |      1 |      0 |        1 |        2 |        0 |        3 |        3 |        5 |       4 |        2 |        2 |        2 |        5 |        3 |        4 |       1 |        4 |        7 |        3 |        6 |       19 |        7 |       5 |        4 |        3 |        6 |        8 |       13 |       10 |       7 |        2 |        5 |        2 |        1 |        0 |        4 |       1 |        2 |        1 |        2 |        4 |        1 |        1 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |      3 |      4 |      0 |      0 |     26 |      0 |      0 |      0 |     10 |     16 |      4 |      4 |      6 |     62 |      0 |      0 |      1 |      1 |      0 |      1 |      2 |      0 |     21 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5104000 |     409 |    143 |    187 |     5 |    0 |     2 |    6 |    2 |     4 |    0 |     60 |    0 |    0 |    0 |    0 |    192 |    217 |      31 |      11 |      16 |       3 |      6 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        3 |        6 |        5 |       16 |       13 |        9 |       7 |        3 |        8 |        9 |       20 |       16 |       10 |      18 |        8 |        4 |       15 |       14 |       18 |       17 |      14 |        3 |       10 |       13 |       16 |       16 |       23 |      16 |        2 |        9 |        8 |        7 |        5 |        0 |       1 |        6 |        4 |        6 |        5 |        6 |        0 |       1 |        6 |        1 |        1 |        1 |        1 |        1 |       0 |        1 |        0 |        2 |        1 |        0 |        3 |       1 |      0 |      0 |     13 |     12 |      6 |      7 |      7 |     98 |      0 |      0 |      0 |     22 |     23 |      6 |      7 |     10 |    119 |      0 |      0 |      0 |      6 |      7 |      3 |      0 |      4 |     40 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5105000 |     260 |     98 |    114 |     2 |    0 |     1 |    0 |    0 |     1 |    0 |     44 |    0 |    0 |    0 |    0 |    117 |    143 |      21 |      21 |      14 |       2 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        3 |        4 |        2 |       12 |        6 |        3 |       6 |        4 |        4 |       11 |       13 |       14 |        6 |      10 |        2 |        4 |        5 |       13 |        8 |       14 |       6 |        2 |       10 |        7 |       15 |        7 |       14 |       7 |       10 |        3 |        4 |        3 |        5 |        1 |       0 |        6 |        2 |        5 |        2 |        2 |        1 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     15 |     14 |      3 |      6 |      2 |     57 |      0 |      0 |      0 |     11 |     17 |      6 |      4 |      8 |     68 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      4 |     33 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5105100 |      61 |     21 |     36 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     31 |     30 |       3 |       6 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        2 |        1 |       4 |        0 |        0 |        1 |        2 |        2 |        2 |       3 |        0 |        1 |        2 |        4 |        2 |        6 |       3 |        0 |        0 |        3 |        1 |        1 |       10 |       3 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      3 |      2 |      0 |      2 |     11 |      0 |      0 |      0 |      6 |      5 |      1 |      0 |      1 |     23 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5105200 |     717 |    215 |    367 |     6 |    0 |    10 |    4 |    4 |     2 |    0 |    109 |    0 |    0 |    0 |    0 |    343 |    374 |      78 |      57 |      33 |       6 |      6 |     10 |      4 |      1 |      1 |      0 |      1 |      0 |      2 |      7 |      1 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       5 |       1 |       0 |     16 |     10 |     10 |      1 |       11 |       11 |        9 |       18 |       16 |       17 |       5 |       15 |       15 |       19 |       29 |       24 |       19 |       7 |       13 |       17 |       12 |       43 |       47 |       38 |      17 |        8 |       16 |       29 |       31 |       39 |       34 |      23 |       11 |        8 |       10 |       10 |       11 |        7 |       1 |        9 |        6 |       10 |       15 |        6 |        4 |       1 |        0 |        0 |        2 |        5 |        2 |        2 |       0 |        0 |        4 |        5 |        2 |        2 |        2 |       0 |      0 |      3 |     25 |     38 |     15 |     12 |      9 |    113 |      0 |      0 |      4 |     34 |     40 |     23 |     33 |     32 |    201 |      0 |      0 |      0 |     13 |     12 |      8 |      8 |      5 |     63 |      0 |      0 |      0 |      3 |     11 |      2 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 5105300 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5106000 |     527 |    195 |    233 |     4 |    0 |     5 |    2 |    5 |     3 |    0 |     80 |    0 |    0 |    0 |    0 |    254 |    273 |      46 |      41 |      21 |       2 |      6 |     11 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      5 |      3 |      5 |      0 |        7 |        9 |        8 |       20 |        9 |       15 |       9 |        6 |       11 |       16 |       27 |       21 |       23 |      14 |        9 |       12 |       13 |       26 |       25 |       28 |       5 |        7 |       10 |       14 |       26 |       26 |       18 |      14 |        9 |        8 |       11 |        8 |       11 |        2 |       0 |        9 |        3 |        7 |        4 |        5 |        1 |       2 |        3 |        2 |        1 |        0 |        1 |        3 |       0 |        2 |        2 |        1 |        1 |        1 |        2 |       0 |      0 |      0 |     12 |     34 |     12 |      9 |      9 |    119 |      0 |      0 |      2 |     15 |     36 |     19 |      7 |     17 |    137 |      0 |      0 |      0 |     13 |     10 |      2 |      2 |      1 |     52 |      0 |      0 |      0 |      5 |      6 |      1 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 5106200 |     562 |    232 |    218 |     7 |    0 |     5 |    6 |    1 |     5 |    0 |     88 |    0 |    0 |    0 |    0 |    239 |    323 |      54 |      34 |      30 |       3 |      4 |      6 |      6 |      0 |      0 |      0 |      2 |      0 |      4 |      0 |      1 |      0 |      3 |      2 |      1 |      1 |      4 |      0 |      1 |      0 |       1 |       0 |       0 |       0 |      7 |      5 |      0 |      0 |        5 |        9 |       15 |       13 |       17 |       19 |       7 |        9 |       17 |       22 |       38 |       25 |       28 |       8 |       12 |       15 |       18 |       17 |       20 |       18 |       3 |        2 |       12 |       23 |       20 |       19 |       32 |       7 |        4 |        5 |       16 |        4 |        5 |        8 |       0 |        6 |        9 |       10 |       11 |        7 |        2 |       1 |        2 |        1 |        1 |        2 |        2 |        1 |       0 |        1 |        4 |        1 |        3 |        3 |        3 |       0 |      0 |      2 |     28 |     20 |     15 |     11 |      2 |    154 |      0 |      0 |      1 |     21 |     20 |      9 |     13 |     10 |    144 |      0 |      0 |      0 |     11 |     10 |      7 |      1 |      3 |     56 |      0 |      0 |      1 |      3 |      7 |      1 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 5106300 |     413 |    165 |    159 |     6 |    0 |     3 |    0 |    5 |     2 |    0 |     73 |    0 |    0 |    0 |    0 |    181 |    232 |      52 |      35 |      22 |       4 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        8 |       11 |        9 |        6 |        8 |        8 |       1 |        9 |       22 |       26 |       18 |       20 |       18 |       1 |        9 |       13 |       17 |       14 |       18 |       13 |       2 |       10 |       10 |       15 |       13 |       14 |       10 |       1 |       11 |        6 |        6 |        5 |        4 |        4 |       0 |       14 |        3 |        9 |        7 |        4 |        0 |       0 |        0 |        3 |        2 |        2 |        0 |        1 |       0 |        2 |        3 |        0 |        2 |        1 |        0 |       0 |      0 |      1 |     13 |     16 |      6 |      5 |      6 |    118 |      0 |      0 |      2 |     22 |     21 |      4 |      5 |     10 |     95 |      0 |      0 |      0 |     10 |      7 |      0 |      1 |      1 |     54 |      0 |      0 |      2 |      1 |      8 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5107100 |     441 |    157 |    173 |    10 |    0 |     7 |    1 |    6 |     4 |    0 |     83 |    0 |    0 |    0 |    0 |    206 |    235 |      58 |      16 |      20 |       7 |      6 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        7 |        4 |        9 |       17 |        9 |        7 |       9 |        8 |       13 |       20 |       12 |       15 |       13 |      14 |        2 |       12 |       11 |       21 |       15 |       14 |      11 |        5 |       11 |       11 |       20 |       17 |       14 |       9 |        8 |        8 |        9 |        8 |        7 |        6 |       0 |        8 |        4 |        7 |        9 |        6 |        2 |       1 |        0 |        4 |        2 |        3 |        1 |        2 |       0 |        1 |        4 |        5 |        2 |        2 |        2 |       0 |      0 |      0 |     12 |     20 |     12 |      0 |      9 |    104 |      0 |      0 |      2 |     16 |     25 |      9 |      5 |      7 |    109 |      0 |      0 |      1 |     10 |      7 |      5 |      2 |      3 |     55 |      0 |      0 |      1 |      2 |      9 |      1 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 5107200 |     270 |     86 |    134 |     3 |    0 |     1 |    0 |    2 |     4 |    0 |     40 |    0 |    0 |    0 |    0 |    127 |    143 |      18 |      15 |       9 |       3 |      3 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      6 |      3 |      2 |      0 |        1 |        5 |        3 |        5 |       10 |        9 |       0 |        4 |        3 |       10 |       12 |       11 |       12 |       1 |        3 |       10 |       12 |        8 |       18 |       12 |       1 |        3 |        5 |       13 |       11 |       21 |       15 |       2 |        4 |        2 |        5 |        5 |        2 |        6 |       1 |        5 |        3 |        2 |        2 |        0 |        2 |       1 |        2 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        2 |        1 |       0 |      0 |      0 |      6 |     16 |      7 |      2 |      4 |     51 |      0 |      0 |      0 |     22 |     21 |     11 |      8 |      7 |     65 |      0 |      0 |      0 |      6 |      5 |      1 |      1 |      0 |     27 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5107300 |     177 |     63 |     85 |     3 |    0 |     1 |    0 |    0 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |     91 |     86 |      19 |      10 |       4 |       0 |      1 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |        2 |        1 |        1 |       11 |        2 |        4 |       3 |        2 |        2 |        5 |       11 |        8 |        8 |       3 |        3 |        3 |       10 |        7 |        9 |       14 |       5 |        0 |        3 |        7 |        4 |        7 |        8 |       5 |        3 |        0 |        1 |        5 |        3 |        1 |       0 |        3 |        0 |        2 |        2 |        1 |        2 |       1 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      9 |     10 |      0 |      1 |      1 |     42 |      0 |      0 |      0 |      9 |      5 |      5 |      4 |      4 |     58 |      0 |      0 |      0 |      5 |      4 |      0 |      1 |      0 |     14 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5107400 |     449 |    162 |    198 |     8 |    0 |     7 |    0 |    2 |     4 |    0 |     68 |    0 |    0 |    0 |    0 |    223 |    226 |      49 |      28 |      16 |       2 |      9 |      8 |      6 |      1 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      4 |      5 |      7 |      2 |       10 |        2 |        9 |       17 |       19 |       12 |       3 |        9 |        8 |        8 |       22 |       21 |       19 |       3 |       11 |       10 |       13 |       20 |       20 |       24 |       6 |        1 |        8 |       16 |       27 |       19 |       18 |       5 |        7 |        6 |        6 |        8 |        5 |        3 |       1 |        5 |        4 |        4 |       10 |        6 |        3 |       0 |        1 |        2 |        4 |        2 |        1 |        1 |       0 |        2 |        1 |        3 |        2 |        0 |        2 |       0 |      0 |      1 |     18 |     25 |     10 |     11 |     14 |     83 |      0 |      0 |      4 |     17 |     35 |      6 |      7 |     12 |    117 |      0 |      0 |      0 |      8 |      9 |      9 |      0 |      2 |     40 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5107500 |     142 |     47 |     69 |     0 |    0 |     6 |    0 |    0 |     1 |    0 |     19 |    0 |    0 |    0 |    0 |     66 |     76 |      18 |       6 |       4 |       0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        1 |        1 |        2 |        7 |        4 |        4 |       0 |        2 |        3 |        1 |       11 |        3 |        5 |       3 |        2 |        3 |        2 |        7 |        8 |        6 |       4 |        3 |        4 |        6 |       11 |        5 |        4 |       4 |        2 |        1 |        3 |        4 |        1 |        1 |       0 |        0 |        1 |        2 |        0 |        3 |        1 |       0 |        2 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |      0 |      0 |      8 |      9 |      5 |      1 |      1 |     23 |      0 |      0 |      0 |      6 |     13 |      4 |      4 |      1 |     41 |      0 |      0 |      0 |      2 |      1 |      3 |      1 |      0 |     12 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5107600 |     104 |     43 |     43 |     2 |    0 |     0 |    1 |    0 |     1 |    0 |     14 |    0 |    0 |    0 |    0 |     47 |     57 |       6 |       3 |       3 |       1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      0 |      0 |        2 |        1 |        3 |        3 |        5 |        3 |       0 |        3 |        2 |        4 |        6 |        6 |        2 |       3 |        1 |        2 |        2 |        5 |        5 |        3 |       1 |        2 |        1 |        4 |        6 |        8 |        2 |       1 |        1 |        0 |        2 |        4 |        1 |        0 |       0 |        1 |        0 |        2 |        3 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      9 |      0 |      0 |      2 |     29 |      0 |      0 |      0 |      5 |      8 |      2 |      1 |      3 |     24 |      0 |      0 |      0 |      7 |      2 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 5107700 |     202 |     62 |    104 |     5 |    0 |     2 |    1 |    2 |     2 |    0 |     24 |    0 |    0 |    0 |    0 |     95 |    107 |      19 |       5 |       6 |       3 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      1 |        1 |        3 |        3 |        4 |        6 |        6 |       1 |        3 |        3 |        6 |        7 |       14 |        3 |       2 |        3 |        1 |        7 |       13 |        9 |       15 |       6 |        2 |        3 |        5 |       10 |       13 |       10 |       7 |        4 |        2 |        1 |        4 |        1 |        1 |       0 |        4 |        1 |        3 |        2 |        1 |        0 |       0 |        0 |        2 |        0 |        0 |        1 |        1 |       0 |        4 |        2 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      5 |      3 |      4 |      5 |      2 |     43 |      0 |      0 |      0 |     15 |      8 |      6 |      6 |     11 |     58 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5108000 |     110 |     27 |     59 |     3 |    0 |     0 |    0 |    0 |     3 |    0 |     18 |    0 |    0 |    0 |    0 |     53 |     57 |       6 |       5 |       0 |       1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        2 |        0 |        1 |        3 |        2 |       1 |        1 |        3 |        2 |        5 |        2 |        4 |       0 |        2 |        6 |        8 |        1 |       11 |        5 |       1 |        1 |        4 |        2 |        5 |        7 |        5 |       1 |        0 |        3 |        0 |        0 |        1 |        1 |       0 |        1 |        3 |        1 |        1 |        5 |        2 |       0 |        0 |        1 |        0 |        1 |        2 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      2 |      1 |      0 |      1 |     19 |      0 |      0 |      0 |      9 |      8 |      1 |      2 |      4 |     35 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5108100 |       6 |      2 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5110000 |     603 |    218 |    283 |    12 |    0 |     5 |    1 |    4 |     2 |    0 |     78 |    0 |    0 |    0 |    0 |    300 |    303 |      70 |      44 |      24 |       3 |      9 |     12 |      6 |      1 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      1 |      1 |      0 |       0 |       1 |       1 |       0 |      6 |      5 |      2 |      0 |        4 |        5 |       13 |       23 |       19 |       17 |       8 |       14 |       11 |       18 |       30 |       19 |       19 |      18 |        9 |        8 |       28 |       25 |       22 |       38 |      22 |        5 |        9 |       30 |       24 |       18 |       25 |      20 |       11 |        6 |        9 |       10 |        1 |        7 |       1 |        8 |        4 |        2 |        6 |        7 |        5 |       1 |        1 |        3 |        5 |        3 |        1 |        1 |       0 |        1 |        1 |        5 |        0 |        1 |        2 |       0 |      0 |      3 |     32 |     33 |     10 |      6 |     12 |    122 |      0 |      0 |      1 |     38 |     36 |     10 |      4 |     13 |    181 |      0 |      0 |      1 |      9 |     11 |      4 |      0 |      3 |     50 |      0 |      0 |      0 |      6 |      7 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5110100 |     437 |    128 |    216 |     6 |    0 |     4 |    2 |    1 |     7 |    0 |     73 |    0 |    0 |    0 |    0 |    211 |    226 |      31 |      28 |      20 |       5 |     10 |      6 |      2 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      5 |      4 |      5 |      1 |        2 |        9 |        5 |       13 |        9 |        7 |       4 |       11 |        4 |        6 |       32 |        8 |       10 |       8 |        9 |        5 |       17 |       32 |       21 |       18 |       6 |        4 |        5 |       22 |       37 |       13 |       20 |       7 |        8 |        2 |        6 |       10 |        6 |        8 |       1 |       10 |        4 |        5 |        2 |        6 |        5 |       0 |        2 |        1 |        2 |        4 |        4 |        0 |       0 |        5 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      2 |      6 |     17 |     11 |     10 |     15 |     67 |      0 |      0 |      2 |     26 |     27 |     13 |     14 |      9 |    125 |      0 |      0 |      0 |      8 |      6 |      6 |      7 |      2 |     44 |      0 |      0 |      0 |      3 |      2 |      1 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 5126000 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5156000 |      17 |     12 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      6 |     11 |       8 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        1 |        1 |       0 |        1 |        0 |        1 |        1 |        2 |        2 |       1 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5156200 |      19 |     15 |      0 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      7 |     12 |      12 |       0 |       1 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        2 |        1 |        0 |        0 |        1 |       0 |        2 |        3 |        4 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5157000 |     412 |    231 |     75 |     6 |    0 |     8 |    1 |    5 |     2 |    0 |     84 |    0 |    0 |    0 |    0 |    203 |    209 |     167 |      49 |      51 |      16 |      3 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |      3 |      4 |      0 |       11 |       16 |       22 |       10 |       13 |       19 |       9 |       12 |       31 |       15 |       27 |       16 |       21 |       9 |        2 |        7 |       11 |       12 |        2 |        4 |       0 |        7 |       12 |        2 |        7 |        5 |        3 |       1 |       12 |       13 |       10 |        8 |        3 |        3 |       3 |       11 |        5 |        5 |        5 |        5 |        1 |       0 |        1 |        7 |        0 |        3 |        2 |        0 |       0 |        1 |        0 |        3 |        3 |        1 |        1 |       0 |      0 |      0 |     27 |     37 |     10 |      3 |      8 |    146 |      0 |      0 |      1 |     11 |     12 |      2 |      0 |      3 |     46 |      0 |      0 |      3 |      8 |      9 |      3 |      0 |      0 |     61 |      0 |      0 |      1 |      3 |      5 |      2 |      1 |      1 |      9 |      0 |     37 | s03      | R    |
| 5158000 |     453 |    241 |    120 |     5 |    0 |     6 |    4 |    3 |     1 |    0 |     73 |    0 |    0 |    0 |    0 |    220 |    233 |     176 |      65 |      50 |      15 |      7 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      9 |      1 |      4 |      1 |       13 |       22 |       17 |       19 |       15 |       25 |       5 |       13 |       27 |       17 |       25 |       10 |       28 |       5 |        4 |       15 |       13 |       11 |        5 |       11 |       0 |        9 |        8 |       17 |       14 |        7 |        4 |       2 |        8 |       10 |        6 |        4 |        2 |        2 |       2 |       14 |        5 |        5 |        9 |        3 |        3 |       0 |        2 |        2 |        3 |        2 |        0 |        2 |       0 |        2 |        4 |        1 |        0 |        0 |        1 |       0 |      0 |      4 |     45 |     56 |      6 |      5 |      4 |    121 |      0 |      0 |      0 |     22 |     18 |      6 |      7 |      2 |     65 |      0 |      0 |      0 |      7 |     10 |      6 |      0 |      3 |     47 |      0 |      0 |      1 |      3 |      5 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5159000 |     459 |    282 |     80 |     8 |    0 |     6 |    5 |    7 |     1 |    0 |     70 |    0 |    0 |    0 |    0 |    179 |    280 |     174 |      39 |      34 |      10 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      4 |      4 |      0 |      1 |       15 |       28 |       22 |       18 |        9 |       17 |       3 |       31 |       33 |       31 |       26 |       23 |       18 |       8 |        7 |        5 |       11 |        7 |        2 |        2 |       1 |       14 |        8 |       11 |        1 |        5 |        5 |       1 |        7 |        8 |        3 |        5 |        1 |        2 |       0 |       15 |       12 |        6 |        4 |        4 |        2 |       1 |        1 |        4 |        1 |        0 |        0 |        0 |       0 |        6 |       10 |        3 |        2 |        0 |        0 |       0 |      0 |      2 |     54 |     35 |     12 |      3 |      5 |    171 |      0 |      0 |      0 |     16 |      6 |      3 |      3 |      1 |     51 |      0 |      0 |      0 |     13 |      2 |      1 |      0 |      0 |     54 |      0 |      0 |      2 |      2 |      6 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 5159100 |     231 |    108 |     68 |     4 |    0 |     4 |    1 |    2 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |    120 |    111 |      70 |      33 |      25 |       6 |      2 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      3 |     11 |      4 |      1 |        9 |       10 |        9 |       10 |       10 |        7 |       2 |        4 |        4 |        9 |        9 |        9 |       14 |       2 |        5 |        5 |        6 |        6 |        6 |        3 |       3 |        4 |        4 |        7 |        6 |        3 |        7 |       3 |        3 |        6 |        4 |        6 |        3 |        3 |       0 |        4 |        5 |        3 |        2 |        1 |        3 |       0 |        2 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        3 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |     16 |     18 |      2 |      0 |      3 |     68 |      0 |      0 |      0 |      8 |     11 |      2 |      1 |      1 |     45 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      2 |     33 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5159200 |     201 |    110 |     51 |     4 |    0 |     0 |    1 |    0 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |    100 |    101 |      72 |      28 |      17 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |     11 |      6 |      6 |      0 |        8 |        7 |        7 |        8 |        6 |       11 |       4 |        7 |        9 |       11 |        9 |        7 |       14 |       2 |        4 |        8 |        5 |        8 |        2 |        3 |       0 |        2 |        4 |        3 |        3 |        5 |        4 |       0 |        4 |        4 |        1 |        0 |        2 |        2 |       1 |        3 |        7 |        3 |        4 |        2 |        2 |       0 |        2 |        1 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     13 |     28 |      8 |      1 |      4 |     55 |      0 |      0 |      0 |      7 |     12 |      0 |      0 |      0 |     32 |      0 |      0 |      0 |      5 |      9 |      1 |      1 |      0 |     19 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |     37 | s03      | R    |
| 5160000 |     449 |    268 |    102 |     4 |    0 |     3 |    0 |    3 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    197 |    252 |     144 |      36 |      41 |       5 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |     12 |     12 |      2 |      0 |       14 |       15 |       17 |       21 |       10 |       16 |      18 |       11 |       34 |       25 |       28 |       13 |       28 |      18 |        3 |        9 |        8 |       12 |        4 |        7 |       5 |        4 |        5 |       12 |        9 |        8 |       10 |       6 |        6 |        6 |        7 |        5 |        3 |        4 |       0 |        9 |        8 |        3 |        6 |        3 |        6 |       2 |        2 |        2 |        0 |        1 |        0 |        2 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       0 |      0 |      1 |     26 |     46 |     16 |      5 |     12 |    162 |      0 |      0 |      0 |     14 |     20 |      9 |      1 |      5 |     53 |      0 |      0 |      0 |      9 |      6 |      3 |      1 |      0 |     49 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 5161000 |     422 |    242 |     99 |     7 |    0 |     5 |    0 |    6 |     3 |    0 |     60 |    0 |    0 |    0 |    0 |    202 |    220 |     140 |      34 |      29 |       6 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |     13 |     15 |      6 |      1 |        6 |       14 |       21 |       21 |       13 |       20 |      11 |       18 |       20 |       15 |       17 |       16 |       26 |      24 |        4 |        8 |        6 |       11 |        8 |       11 |       6 |        3 |        7 |        5 |        9 |        8 |        7 |       6 |        7 |        6 |        7 |        5 |        3 |        3 |       0 |        5 |        6 |        4 |        9 |        2 |        3 |       0 |        2 |        4 |        3 |        0 |        1 |        1 |       0 |        1 |        3 |        1 |        1 |        1 |        3 |       0 |      0 |      0 |     36 |     26 |     11 |      6 |      9 |    154 |      0 |      0 |      1 |      9 |     15 |      8 |      2 |      8 |     56 |      0 |      0 |      1 |     10 |      8 |      5 |      1 |      0 |     35 |      0 |      0 |      0 |      3 |      8 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5162000 |     490 |    243 |    166 |     6 |    0 |     6 |    2 |    6 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    226 |    264 |     135 |      61 |      33 |      13 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       0 |     20 |     20 |      8 |      1 |       12 |       15 |       11 |       18 |       11 |       27 |      11 |       14 |       21 |       19 |       27 |       10 |       34 |      13 |        6 |        9 |       19 |       18 |        9 |       10 |       8 |        7 |        8 |       15 |       18 |       10 |       20 |       9 |        6 |        7 |        2 |        5 |        5 |        5 |       3 |        8 |        7 |        3 |        1 |        4 |        4 |       0 |        1 |        1 |        2 |        4 |        1 |        0 |       0 |        3 |        5 |        1 |        2 |        1 |        0 |       0 |      0 |      4 |     26 |     29 |      9 |      8 |     10 |    157 |      0 |      0 |      0 |     18 |     37 |      9 |      6 |      7 |     89 |      0 |      0 |      0 |      9 |      8 |      3 |      3 |      0 |     37 |      0 |      0 |      0 |      3 |      7 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5163000 |     150 |     81 |     36 |     2 |    0 |     1 |    1 |    2 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |     67 |     83 |      53 |      13 |      13 |       5 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      4 |      0 |        3 |        8 |        4 |        8 |        6 |        3 |       5 |        3 |        8 |        8 |       10 |        4 |        5 |       6 |        3 |        3 |        3 |        5 |        0 |        1 |       1 |        3 |        4 |        1 |        2 |        2 |        3 |       5 |        0 |        3 |        2 |        1 |        4 |        0 |       0 |        3 |        5 |        1 |        4 |        2 |        1 |       0 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      2 |     18 |      6 |      3 |      3 |     49 |      0 |      0 |      0 |      6 |      4 |      0 |      1 |      2 |     23 |      0 |      0 |      0 |      2 |      7 |      3 |      1 |      1 |     12 |      0 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 5165000 |     432 |    231 |    113 |     7 |    0 |     3 |    4 |    2 |     3 |    0 |     69 |    0 |    0 |    0 |    0 |    219 |    213 |     132 |      51 |      39 |       9 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     27 |     23 |      8 |      1 |        6 |       12 |       10 |       18 |       12 |       30 |      13 |        7 |       15 |       19 |       24 |       18 |       30 |      17 |       10 |       10 |        8 |       18 |        7 |       12 |       5 |        1 |       11 |        3 |        6 |        3 |       11 |       8 |       10 |        4 |       10 |        5 |        3 |        2 |       1 |        7 |        6 |       10 |        6 |        5 |        0 |       0 |        3 |        3 |        4 |        2 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      2 |     28 |     49 |     13 |      6 |      7 |    126 |      0 |      0 |      2 |     12 |     23 |      4 |      7 |      4 |     61 |      0 |      0 |      0 |     13 |     13 |      3 |      0 |      2 |     38 |      0 |      0 |      0 |      2 |      8 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5165100 |      37 |      9 |     15 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     22 |     15 |       5 |       9 |       6 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      2 |      1 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        4 |        1 |       0 |        0 |        1 |        0 |        1 |        3 |        3 |       0 |        0 |        2 |        1 |        5 |        0 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      4 |      3 |      3 |      0 |      5 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5166000 |     314 |    133 |     94 |     8 |    0 |     2 |    2 |    5 |     1 |    0 |     69 |    0 |    0 |    0 |    0 |    142 |    172 |      70 |      28 |      27 |       8 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      9 |     12 |     18 |      2 |        5 |        5 |       17 |        6 |        5 |       16 |       3 |        7 |       10 |       11 |        9 |       15 |       18 |       6 |        2 |        8 |        7 |       11 |       10 |        8 |       2 |        9 |        7 |       10 |        8 |        4 |        7 |       1 |        5 |        8 |        5 |        4 |        3 |        4 |       0 |        7 |       10 |        7 |        5 |        1 |        9 |       1 |        0 |        1 |        3 |        1 |        3 |        0 |       0 |        1 |        2 |        1 |        5 |        0 |        1 |       0 |      0 |      3 |     26 |     27 |      2 |      1 |      3 |     71 |      0 |      0 |      2 |     14 |     12 |      2 |      0 |      2 |     62 |      0 |      0 |      2 |      9 |      8 |      1 |      0 |      1 |     48 |      0 |      0 |      1 |      1 |      7 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5167000 |     228 |    114 |     64 |     4 |    0 |     8 |    1 |    3 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |    120 |    108 |      54 |      21 |      13 |      10 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     22 |     15 |      3 |      2 |        2 |        5 |        8 |        9 |       10 |       19 |       5 |        3 |        7 |        7 |        5 |        8 |       17 |       9 |        4 |        5 |        6 |        4 |        2 |       11 |       3 |        0 |        4 |        5 |        6 |        2 |       10 |       2 |        4 |        3 |        3 |        6 |        0 |        3 |       0 |        1 |        4 |        3 |        4 |        0 |        3 |       0 |        1 |        2 |        0 |        3 |        1 |        0 |       1 |        1 |        5 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |     15 |     21 |      6 |      3 |      3 |     66 |      0 |      0 |      0 |     10 |     12 |      1 |      2 |      1 |     38 |      0 |      0 |      0 |      4 |      3 |      3 |      1 |      1 |     22 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5168000 |     594 |    341 |    126 |     6 |    0 |    10 |    2 |    9 |     2 |    0 |     98 |    0 |    0 |    0 |    0 |    299 |    295 |     237 |      63 |      57 |      14 |      5 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     21 |     12 |      7 |      1 |       15 |       29 |       28 |       27 |       16 |       45 |       7 |       26 |       22 |       27 |       30 |       22 |       32 |      15 |        6 |       14 |       10 |       14 |        8 |       11 |       3 |        8 |       10 |       16 |       13 |        5 |        6 |       2 |        8 |       12 |        9 |        5 |        4 |       10 |       1 |       15 |       14 |        8 |        4 |        5 |        3 |       0 |        0 |        7 |        5 |        1 |        3 |        1 |       0 |        4 |        5 |        1 |        2 |        0 |        0 |       0 |      0 |      2 |     60 |     65 |     16 |     12 |      3 |    183 |      0 |      0 |      0 |     22 |     17 |      4 |      5 |      5 |     73 |      0 |      0 |      2 |     18 |     14 |      1 |      1 |      3 |     59 |      0 |      0 |      1 |      7 |      9 |      0 |      2 |      0 |     10 |      0 |     37 | s03      | R    |
| 5169000 |     413 |    233 |     81 |     2 |    0 |     7 |    3 |    5 |     3 |    0 |     79 |    0 |    0 |    0 |    0 |    200 |    213 |     176 |      38 |      55 |      15 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      5 |      5 |      0 |       18 |       24 |       18 |       17 |       12 |       19 |       6 |       15 |       24 |       21 |       18 |       16 |       18 |       7 |        7 |        5 |        6 |        8 |        3 |       10 |       1 |        5 |        8 |        7 |        7 |        3 |        9 |       2 |        5 |        7 |       10 |        4 |        6 |        4 |       1 |       16 |       13 |        4 |        5 |        0 |        2 |       2 |        1 |        2 |        0 |        2 |        2 |        1 |       1 |        0 |        4 |        2 |        3 |        1 |        0 |       1 |      0 |      1 |     39 |     39 |     10 |      3 |      2 |    139 |      0 |      0 |      0 |     10 |      7 |      4 |      3 |      5 |     52 |      0 |      0 |      1 |     11 |     18 |      3 |      0 |      0 |     46 |      0 |      0 |      0 |      4 |     11 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5170000 |     213 |    114 |     49 |     6 |    0 |     2 |    2 |    6 |     1 |    0 |     33 |    0 |    0 |    0 |    0 |    119 |     94 |      68 |      25 |      15 |      10 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     13 |      5 |      6 |      0 |        4 |       13 |        8 |        9 |        7 |       20 |       4 |        6 |        5 |        3 |        9 |        8 |       14 |       4 |        2 |        1 |        4 |        5 |        4 |        7 |       0 |        0 |        5 |        3 |        6 |        3 |        7 |       2 |        1 |        5 |        2 |        2 |        5 |        7 |       0 |        0 |        4 |        3 |        0 |        2 |        2 |       0 |        0 |        5 |        1 |        1 |        0 |        2 |       0 |        0 |        1 |        2 |        4 |        0 |        1 |       0 |      0 |      0 |     19 |     24 |      3 |      3 |      0 |     65 |      0 |      0 |      0 |     13 |     10 |      3 |      0 |      1 |     22 |      0 |      0 |      1 |      2 |      7 |      2 |      0 |      0 |     21 |      0 |      0 |      0 |      4 |     10 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5170100 |     205 |    103 |     61 |     3 |    0 |     3 |    1 |    4 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     96 |    109 |      74 |      23 |      19 |       5 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      7 |      6 |      1 |      1 |        2 |        8 |       10 |        9 |        7 |        8 |       2 |        5 |       12 |       15 |        4 |       12 |        7 |       2 |        6 |        4 |        4 |        5 |        4 |        4 |       1 |        3 |        5 |        7 |        7 |        1 |        5 |       5 |        3 |        4 |        4 |        3 |        0 |        2 |       0 |        5 |        4 |        1 |        2 |        2 |        0 |       0 |        0 |        4 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        2 |        1 |        0 |       0 |      0 |      1 |     14 |     20 |      4 |      1 |      1 |     62 |      0 |      0 |      1 |      8 |      7 |      4 |      2 |      2 |     37 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5170200 |     218 |    108 |     48 |     4 |    0 |     5 |    3 |    2 |     0 |    0 |     48 |    0 |    0 |    0 |    0 |    106 |    112 |      56 |      20 |      20 |       6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     13 |      6 |      8 |      0 |        3 |        7 |       16 |       11 |        7 |       10 |       0 |        7 |       10 |       12 |       11 |        9 |        5 |       0 |        4 |        1 |        7 |        4 |        4 |        4 |       0 |        2 |        2 |        3 |        6 |        9 |        2 |       0 |        8 |        3 |        3 |        0 |        2 |        7 |       0 |        5 |        4 |        7 |        4 |        2 |        3 |       0 |        1 |        1 |        0 |        1 |        1 |        1 |       0 |        3 |        4 |        0 |        2 |        0 |        0 |       0 |      0 |      1 |     19 |     21 |      6 |      2 |      1 |     58 |      0 |      0 |      1 |      7 |      5 |      1 |      0 |      0 |     34 |      0 |      0 |      1 |     11 |      5 |      1 |      1 |      1 |     28 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5171000 |     360 |    169 |    104 |     8 |    0 |     5 |    1 |    3 |     2 |    0 |     68 |    0 |    0 |    0 |    0 |    171 |    189 |      96 |      49 |      37 |      14 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     13 |     12 |      9 |      0 |        9 |       17 |       11 |       15 |        9 |       11 |       1 |       16 |       17 |       16 |       24 |       11 |       11 |       1 |        4 |       12 |        7 |       16 |        6 |        7 |       0 |        9 |       11 |        9 |       11 |        3 |        9 |       0 |        7 |        7 |        7 |        9 |        0 |        4 |       1 |       11 |        8 |        6 |        4 |        0 |        3 |       1 |        3 |        3 |        1 |        1 |        1 |        2 |       0 |        3 |        2 |        1 |        0 |        1 |        1 |       0 |      0 |      1 |     35 |     22 |      5 |      4 |      2 |    100 |      0 |      0 |      0 |     17 |     14 |      5 |      2 |      3 |     63 |      0 |      0 |      0 |     15 |      3 |      1 |      0 |      1 |     48 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5172000 |     701 |    366 |    195 |    10 |    0 |     6 |    1 |    4 |     1 |    0 |    118 |    0 |    0 |    0 |    0 |    294 |    407 |     166 |      79 |      50 |      11 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |     51 |     52 |     26 |      5 |       15 |       15 |       14 |       30 |        9 |       64 |       4 |       19 |       29 |       29 |       34 |       27 |       71 |       6 |        9 |        5 |       14 |       13 |        5 |       35 |       4 |       11 |       11 |       17 |       16 |        3 |       49 |       3 |        8 |        5 |        4 |       10 |        4 |       18 |       0 |       12 |        9 |        6 |        8 |        8 |       26 |       0 |        0 |        2 |        2 |        2 |        0 |        3 |       0 |        2 |        2 |        5 |        0 |        2 |        2 |       0 |      0 |      2 |     56 |     72 |     17 |      6 |     18 |    195 |      0 |      0 |      3 |     29 |     34 |     12 |      6 |      7 |    104 |      0 |      0 |      1 |     16 |     18 |      3 |      3 |      4 |     73 |      0 |      0 |      0 |      2 |      7 |      2 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 5172100 |     304 |    142 |     96 |     4 |    0 |     1 |    2 |    3 |     2 |    0 |     54 |    0 |    0 |    0 |    0 |    159 |    145 |      73 |      36 |      21 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     18 |     22 |     18 |      2 |        5 |        8 |        9 |       10 |       12 |       17 |       5 |        4 |        9 |        9 |       18 |        8 |       23 |       5 |        5 |        8 |        9 |       13 |        5 |       15 |       2 |        1 |        5 |        6 |       11 |        7 |        9 |       0 |        4 |        5 |        2 |        5 |        3 |        6 |       0 |        6 |        4 |        5 |        2 |        7 |        4 |       1 |        0 |        6 |        2 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     20 |     30 |      4 |      2 |      3 |     82 |      0 |      0 |      1 |     14 |     20 |      9 |      1 |      3 |     48 |      0 |      0 |      0 |      9 |      8 |      2 |      2 |      2 |     31 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5173000 |     331 |    161 |    107 |     2 |    0 |     4 |    1 |    1 |     0 |    0 |     55 |    0 |    0 |    0 |    0 |    154 |    177 |      72 |      24 |      21 |       6 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      8 |      2 |      4 |      0 |        8 |       10 |        7 |        9 |       10 |       21 |       5 |        9 |        9 |        6 |       17 |       11 |       28 |      11 |        9 |        3 |        7 |       13 |       10 |        5 |       8 |        8 |        4 |        4 |        8 |        6 |       11 |      11 |        4 |        6 |        5 |        6 |        1 |        1 |       1 |        4 |        8 |        6 |        9 |        2 |        2 |       0 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     19 |     27 |      7 |      7 |      5 |     95 |      0 |      0 |      0 |     16 |      9 |      3 |      6 |      0 |     73 |      0 |      0 |      1 |     10 |      9 |      4 |      1 |      0 |     30 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5174000 |     547 |    268 |    152 |    10 |    0 |    10 |    1 |    3 |     2 |    0 |    101 |    0 |    0 |    0 |    0 |    253 |    294 |     141 |      51 |      47 |      12 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      1 |      2 |      0 |      1 |       0 |       0 |       1 |       0 |     17 |     27 |     15 |      1 |       16 |       12 |       15 |       21 |       17 |       18 |      14 |       18 |       20 |       27 |       29 |       17 |       26 |      18 |        7 |       15 |       12 |       12 |        8 |       16 |       9 |        8 |       12 |        9 |       11 |        8 |       14 |      11 |       11 |        7 |        8 |       11 |        5 |        4 |       1 |       15 |       10 |        7 |        8 |        5 |        9 |       0 |        4 |        5 |        2 |        1 |        1 |        0 |       1 |        3 |        5 |        1 |        2 |        0 |        1 |       0 |      0 |      2 |     25 |     28 |      8 |      6 |     14 |    185 |      0 |      0 |      1 |     21 |     17 |     11 |      5 |      5 |     92 |      0 |      0 |      0 |     18 |      9 |      4 |      2 |      3 |     65 |      0 |      0 |      0 |      3 |      6 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 5175000 |     382 |    206 |     96 |     6 |    0 |     4 |    0 |    6 |     4 |    0 |     60 |    0 |    0 |    0 |    0 |    186 |    196 |     122 |      38 |      37 |      14 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      4 |      2 |      1 |        9 |       18 |       15 |       16 |        7 |       14 |       8 |       12 |       17 |       12 |       19 |       15 |       28 |      16 |        4 |       12 |       13 |        8 |        6 |        6 |       5 |        6 |        7 |        7 |        4 |        5 |        9 |       4 |       10 |        1 |        7 |        6 |        1 |        7 |       1 |        3 |        5 |        7 |        4 |        3 |        4 |       1 |        4 |        3 |        2 |        0 |        1 |        2 |       0 |        0 |        7 |        1 |        0 |        0 |        0 |       0 |      0 |      2 |     32 |     27 |      7 |      4 |      4 |    130 |      0 |      0 |      1 |     17 |     13 |      3 |      7 |      5 |     50 |      0 |      0 |      0 |      9 |     13 |      0 |      1 |      1 |     36 |      0 |      0 |      2 |      2 |      7 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5176000 |     884 |    517 |    197 |    17 |    0 |     8 |    1 |    6 |     1 |    0 |    137 |    0 |    0 |    0 |    0 |    393 |    491 |     311 |      84 |      69 |      22 |      5 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |     50 |     31 |      9 |      3 |       15 |       25 |       27 |       33 |       16 |      102 |       5 |       16 |       35 |       24 |       28 |       24 |      162 |       5 |        4 |        6 |        9 |       10 |       11 |       43 |       1 |        8 |       16 |       13 |        6 |        8 |       61 |       1 |       11 |        9 |        9 |       10 |        8 |       20 |       0 |        8 |       13 |        9 |       10 |        2 |       28 |       0 |        2 |        8 |        1 |        4 |        2 |        2 |       0 |        2 |        5 |        1 |        1 |        1 |        4 |       0 |      0 |      7 |     95 |    104 |     18 |      8 |     16 |    269 |      0 |      0 |      0 |     34 |     38 |      8 |      5 |      8 |    104 |      0 |      0 |      4 |     20 |     20 |      4 |      3 |      2 |     84 |      0 |      0 |      2 |      5 |      5 |      0 |      0 |      1 |     20 |      0 |     37 | s03      | R    |
| 5177000 |      97 |     61 |     23 |     1 |    0 |     0 |    1 |    1 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     47 |     50 |      52 |      12 |      10 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        1 |        6 |        6 |        5 |        8 |       1 |        3 |        9 |        4 |        5 |        1 |       10 |       2 |        1 |        6 |        3 |        1 |        2 |        1 |       0 |        1 |        2 |        0 |        2 |        1 |        3 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        3 |        1 |        1 |        0 |        0 |        1 |       1 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      7 |      5 |      1 |      3 |      3 |     41 |      0 |      0 |      1 |      4 |      4 |      1 |      1 |      1 |     11 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5177100 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5178000 |     546 |    321 |    121 |     4 |    0 |     5 |    0 |    8 |     3 |    0 |     84 |    0 |    0 |    0 |    0 |    244 |    302 |     233 |      69 |      60 |      12 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     13 |      4 |      1 |      0 |       24 |       31 |       27 |       31 |       12 |       18 |       2 |       24 |       35 |       27 |       40 |       20 |       22 |       8 |        2 |       11 |        6 |       15 |        4 |       10 |       1 |       15 |       10 |       13 |       12 |        9 |       11 |       2 |       11 |        9 |        9 |        2 |        4 |        5 |       0 |       16 |        9 |        3 |        9 |        2 |        5 |       0 |        2 |        6 |        0 |        0 |        0 |        2 |       0 |        4 |        3 |        2 |        1 |        0 |        0 |       0 |      0 |      5 |     56 |     67 |     23 |      3 |      8 |    159 |      0 |      0 |      2 |     24 |     16 |      7 |      5 |      5 |     62 |      0 |      0 |      1 |     17 |     12 |      0 |      1 |      0 |     53 |      0 |      0 |      0 |      4 |      8 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5179000 |     508 |    279 |    108 |    13 |    0 |     7 |    1 |    6 |     1 |    0 |     93 |    0 |    0 |    0 |    0 |    223 |    285 |     189 |      62 |      52 |      11 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     22 |      6 |      5 |      2 |       24 |       16 |       28 |       23 |       14 |       15 |       3 |       26 |       32 |       26 |       35 |       15 |       18 |       4 |        4 |       11 |        9 |       12 |        1 |        4 |       0 |        8 |       17 |       12 |       14 |        8 |        6 |       2 |       10 |       14 |        6 |       12 |        3 |        2 |       1 |       13 |        9 |        7 |        6 |        6 |        4 |       0 |        1 |        4 |        2 |        1 |        3 |        0 |       0 |        3 |        6 |        2 |        3 |        2 |        1 |       0 |      0 |      2 |     52 |     40 |      8 |      6 |      4 |    167 |      0 |      0 |      1 |     21 |     13 |      6 |      2 |      4 |     61 |      0 |      0 |      2 |     14 |     13 |      1 |      1 |      2 |     60 |      0 |      0 |      2 |      5 |      7 |      1 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 5180000 |     337 |    170 |     79 |     8 |    0 |     9 |    1 |    3 |     0 |    0 |     67 |    0 |    0 |    0 |    0 |    162 |    175 |     122 |      31 |      40 |      11 |      1 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      3 |      1 |      3 |      0 |       12 |       11 |       13 |       14 |       11 |       12 |       4 |       12 |       22 |       11 |       12 |       14 |       18 |       4 |        4 |        6 |       11 |        7 |        6 |        4 |       4 |        7 |        5 |        5 |       10 |        0 |        7 |       3 |        4 |        6 |        4 |        8 |        4 |        6 |       0 |       10 |        8 |        4 |        6 |        2 |        5 |       0 |        2 |        3 |        2 |        2 |        0 |        2 |       0 |        1 |        2 |        2 |        1 |        2 |        2 |       0 |      0 |      1 |     25 |     26 |      4 |      2 |      5 |    107 |      0 |      0 |      1 |     12 |     13 |      2 |      1 |      2 |     48 |      0 |      0 |      3 |     10 |      7 |      1 |      0 |      1 |     45 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      1 |     10 |      0 |     37 | s03      | R    |
| 5181000 |     359 |    202 |     86 |     8 |    0 |     2 |    3 |    4 |     3 |    0 |     51 |    0 |    0 |    0 |    0 |    158 |    201 |     132 |      46 |      31 |      15 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      9 |      2 |      0 |        7 |       13 |       15 |       22 |        6 |       19 |       9 |       15 |       18 |       18 |       14 |        7 |       33 |       6 |        8 |        8 |        6 |        4 |        6 |       10 |       0 |        7 |        4 |        9 |        9 |        7 |        8 |       0 |        7 |        2 |        2 |        4 |        0 |        3 |       0 |       10 |        7 |        2 |        3 |        2 |        8 |       1 |        1 |        2 |        2 |        2 |        0 |        0 |       0 |        3 |        2 |        4 |        2 |        1 |        1 |       0 |      0 |      1 |     30 |     50 |      9 |      4 |      7 |    101 |      0 |      0 |      2 |     15 |     12 |      3 |      2 |      0 |     52 |      0 |      0 |      1 |      9 |     10 |      1 |      0 |      0 |     30 |      0 |      0 |      1 |      2 |      3 |      0 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 5181100 |     330 |    196 |     76 |     5 |    0 |     4 |    2 |    5 |     1 |    0 |     41 |    0 |    0 |    0 |    0 |    147 |    183 |     128 |      28 |      23 |       8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      6 |      4 |      0 |        8 |       11 |       18 |       17 |       11 |       16 |       5 |       16 |       23 |       18 |       21 |       11 |       14 |       7 |        4 |        7 |       11 |        8 |        3 |        3 |       1 |        6 |        6 |        4 |        8 |        3 |        6 |       6 |        2 |        4 |        4 |        4 |        0 |        3 |       0 |        7 |        7 |        4 |        3 |        3 |        0 |       0 |        2 |        3 |        0 |        2 |        0 |        0 |       0 |        2 |        5 |        0 |        2 |        0 |        1 |       0 |      0 |      1 |     33 |     36 |      4 |      2 |      7 |    113 |      0 |      0 |      1 |     20 |      8 |      0 |      0 |      4 |     43 |      0 |      0 |      0 |      8 |      7 |      2 |      0 |      2 |     22 |      0 |      0 |      0 |      3 |      5 |      1 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 5181900 |     186 |     96 |     55 |     2 |    0 |     0 |    1 |    2 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |     93 |     93 |      46 |      14 |      14 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      5 |      0 |      0 |        5 |        8 |       10 |       10 |        8 |        5 |       0 |        3 |       10 |       10 |       13 |        7 |        7 |       0 |        2 |        5 |        9 |        8 |        2 |        3 |       1 |        4 |        5 |        5 |        6 |        3 |        1 |       1 |        1 |        4 |        4 |        1 |        2 |        1 |       0 |        3 |        4 |        4 |        2 |        3 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      3 |     15 |     16 |      2 |      5 |      4 |     51 |      0 |      0 |      0 |      8 |      9 |      2 |      1 |      4 |     31 |      0 |      0 |      3 |      3 |      4 |      1 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5182000 |     426 |    203 |    149 |    13 |    0 |     2 |    1 |    4 |     0 |    0 |     54 |    0 |    0 |    0 |    0 |    208 |    218 |      95 |      33 |      28 |       7 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      6 |      0 |      1 |       10 |       13 |       21 |       10 |       16 |       17 |       8 |        7 |       11 |       19 |       18 |       14 |       24 |      15 |        6 |        8 |       15 |       11 |       11 |       17 |       9 |        4 |        8 |       13 |       12 |       10 |       16 |       9 |        3 |        4 |        7 |        4 |        1 |        4 |       0 |        6 |        8 |        4 |        7 |        3 |        2 |       1 |        3 |        5 |        0 |        2 |        2 |        0 |       1 |        0 |        2 |        1 |        1 |        1 |        2 |       0 |      0 |      1 |     40 |     25 |     11 |      2 |      4 |    120 |      0 |      0 |      1 |     20 |     20 |     10 |      2 |      9 |     87 |      0 |      0 |      0 |     12 |      8 |      3 |      0 |      2 |     29 |      0 |      0 |      0 |      2 |      7 |      2 |      1 |      1 |      7 |      0 |     37 | s03      | R    |
| 5182300 |       4 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5182400 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5183000 |     308 |    154 |     74 |     6 |    0 |     4 |    4 |    5 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    141 |    167 |      93 |      35 |      27 |       9 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      9 |     18 |     10 |      1 |       10 |        7 |       13 |       14 |        8 |        9 |       4 |       11 |       15 |       23 |       11 |        9 |       13 |       7 |        2 |        4 |       11 |        9 |        4 |        7 |       2 |        3 |        7 |        8 |        6 |        4 |        5 |       2 |        7 |        3 |        3 |        3 |        4 |        5 |       0 |        7 |       10 |        6 |        5 |        2 |        5 |       0 |        5 |        2 |        1 |        3 |        0 |        1 |       0 |        0 |        4 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |     19 |     23 |     10 |      7 |      5 |     90 |      0 |      0 |      1 |      8 |     12 |      8 |      2 |      0 |     43 |      0 |      0 |      0 |      6 |      6 |      3 |      0 |      3 |     42 |      0 |      0 |      2 |      3 |      5 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 5183100 |     353 |    208 |     77 |     4 |    0 |     5 |    4 |    4 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    161 |    192 |     144 |      34 |      20 |      14 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      6 |      6 |      2 |       12 |       20 |       16 |       17 |       10 |       10 |       6 |       13 |       21 |       22 |       23 |        9 |       17 |      12 |        2 |        7 |        9 |        9 |        0 |       10 |       4 |        6 |        7 |        6 |        6 |        5 |        4 |       2 |        7 |        5 |        1 |        4 |        5 |        0 |       1 |        5 |        8 |        5 |        4 |        3 |        1 |       0 |        1 |        3 |        0 |        1 |        0 |        1 |       0 |        4 |        7 |        1 |        0 |        0 |        1 |       0 |      0 |      2 |     37 |     47 |      9 |      4 |      2 |    107 |      0 |      0 |      0 |     13 |     13 |      4 |      4 |      3 |     40 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      0 |     38 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 5184000 |     454 |    253 |    112 |    12 |    0 |    11 |    1 |    2 |     0 |    0 |     63 |    0 |    0 |    0 |    0 |    204 |    250 |     166 |      52 |      43 |      14 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      4 |      1 |      2 |       11 |       18 |       20 |       18 |       13 |       19 |       9 |       16 |       26 |       24 |       25 |       24 |       19 |      11 |        2 |        8 |       14 |        9 |        9 |        7 |       3 |        8 |        5 |       12 |        9 |        8 |       11 |       7 |        8 |        7 |        1 |        5 |        4 |        3 |       3 |       12 |        5 |        6 |        4 |        3 |        1 |       1 |        2 |        2 |        4 |        3 |        1 |        1 |       0 |        1 |        4 |        4 |        3 |        1 |        0 |       0 |      0 |      0 |     36 |     38 |     14 |      3 |     11 |    151 |      0 |      0 |      0 |     23 |     16 |      4 |      3 |      5 |     61 |      0 |      0 |      1 |      8 |      5 |      0 |      0 |      3 |     46 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 5184100 |     123 |     60 |     29 |     4 |    0 |     0 |    1 |    1 |     1 |    0 |     27 |    0 |    0 |    0 |    0 |     52 |     71 |      38 |      10 |      18 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        3 |        3 |        2 |        3 |        6 |        3 |       3 |        5 |        8 |        7 |        6 |        3 |        4 |       4 |        2 |        0 |        4 |        4 |        1 |        4 |       0 |        2 |        1 |        6 |        1 |        3 |        1 |       0 |        3 |        2 |        5 |        1 |        1 |        1 |       0 |        1 |        3 |        5 |        3 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      9 |      3 |      1 |      1 |     42 |      0 |      0 |      0 |     10 |      3 |      0 |      2 |      2 |     12 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5186000 |     288 |    152 |     73 |     6 |    0 |     1 |    5 |    1 |     0 |    0 |     50 |    0 |    0 |    0 |    0 |    133 |    155 |     102 |      37 |      31 |      11 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |      1 |      2 |      0 |       10 |        8 |       14 |       15 |        4 |       15 |       2 |       16 |       15 |       16 |       17 |       10 |        8 |       2 |        2 |       12 |       10 |       10 |        2 |        4 |       0 |        4 |        8 |        8 |        5 |        1 |        6 |       1 |        3 |        5 |        6 |        3 |        1 |        0 |       1 |       10 |        4 |        5 |        7 |        3 |        2 |       0 |        1 |        2 |        0 |        1 |        1 |        1 |       0 |        2 |        1 |        2 |        2 |        0 |        0 |       0 |      0 |      2 |     28 |     30 |      5 |      2 |      1 |     84 |      0 |      0 |      0 |     15 |     10 |      1 |      1 |      3 |     43 |      0 |      0 |      0 |      8 |      7 |      0 |      0 |      0 |     35 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5186100 |     339 |    172 |     79 |     8 |    0 |     4 |    3 |    1 |     8 |    0 |     64 |    0 |    0 |    0 |    0 |    171 |    168 |      84 |      23 |      37 |      10 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     11 |      7 |      1 |      0 |        6 |       17 |        8 |       16 |       12 |       24 |       1 |        9 |       14 |        9 |       21 |       13 |       17 |       5 |        5 |        8 |        4 |        7 |        7 |       10 |       1 |        7 |        4 |        5 |        4 |        5 |        7 |       5 |        9 |        6 |        6 |        6 |        3 |        1 |       0 |        8 |        9 |        6 |        3 |        2 |        5 |       0 |        3 |        5 |        1 |        3 |        1 |        1 |       0 |        4 |        3 |        1 |        1 |        1 |        0 |       0 |      0 |      3 |     25 |     26 |      2 |      4 |      3 |    109 |      0 |      0 |      3 |      6 |      7 |      3 |      1 |      2 |     57 |      0 |      0 |      1 |     11 |      7 |      0 |      0 |      2 |     43 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 5186200 |      95 |     42 |     23 |     4 |    0 |     0 |    0 |    3 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     45 |     50 |      29 |      11 |      12 |       6 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        1 |        5 |        1 |        3 |        4 |       1 |        0 |        6 |        5 |        9 |        2 |        2 |       2 |        1 |        3 |        2 |        3 |        3 |        2 |       0 |        0 |        0 |        3 |        4 |        1 |        0 |       1 |        2 |        1 |        1 |        3 |        1 |        1 |       0 |        3 |        3 |        3 |        1 |        1 |        1 |       1 |        1 |        1 |        2 |        1 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      7 |      9 |      0 |      1 |      1 |     23 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      6 |      1 |      1 |      0 |     13 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5186500 |      69 |     37 |     14 |     0 |    0 |     4 |    1 |    1 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     33 |     36 |      25 |      13 |      10 |       3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        3 |        2 |        3 |        5 |        2 |       0 |        4 |        2 |        5 |        4 |        3 |        1 |       0 |        1 |        4 |        1 |        0 |        1 |        1 |       0 |        1 |        1 |        2 |        0 |        0 |        2 |       0 |        0 |        2 |        3 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        3 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |     10 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |     10 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5187900 |      78 |     38 |     30 |     1 |    0 |     0 |    0 |    2 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     33 |     45 |      29 |      14 |       4 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        3 |        5 |        2 |        2 |       1 |        4 |        5 |        2 |        2 |        6 |        2 |       1 |        2 |        4 |        3 |        0 |        3 |        1 |       1 |        4 |        0 |        5 |        3 |        0 |        2 |       2 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      4 |      6 |      4 |      1 |      0 |      0 |     23 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     25 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5188000 |     390 |    188 |    111 |    11 |    0 |     8 |    3 |    8 |     0 |    0 |     61 |    0 |    0 |    0 |    0 |    193 |    197 |     122 |      51 |      38 |      18 |      3 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      7 |      8 |      4 |      0 |        6 |       14 |        9 |       17 |       12 |       14 |      12 |       10 |       13 |       19 |       23 |       15 |       15 |       9 |        4 |        9 |       15 |        9 |       10 |       12 |       2 |        5 |        6 |       12 |        8 |        8 |       10 |       1 |       13 |        3 |        3 |        3 |        4 |        4 |       1 |        6 |        7 |        4 |        7 |        3 |        3 |       0 |        5 |        4 |        3 |        0 |        3 |        2 |       0 |        5 |        4 |        2 |        1 |        0 |        1 |       0 |      0 |      3 |     34 |     48 |     15 |      3 |      1 |     84 |      0 |      0 |      0 |     10 |     22 |      8 |      5 |      4 |     62 |      0 |      0 |      0 |     12 |      9 |      1 |      2 |      2 |     35 |      0 |      0 |      1 |      4 |      9 |      1 |      1 |      0 |     14 |      0 |     37 | s03      | R    |
| 5188200 |     208 |    106 |     57 |     4 |    0 |     2 |    1 |    0 |     2 |    0 |     36 |    0 |    0 |    0 |    0 |    101 |    107 |      49 |      16 |      17 |       4 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      1 |      0 |        3 |        7 |        8 |        5 |       11 |       14 |       3 |        5 |        1 |       10 |       16 |       10 |        9 |       4 |        1 |        5 |        3 |        7 |        0 |        8 |       0 |        1 |        4 |        4 |        9 |        4 |        8 |       3 |        4 |        2 |        3 |        4 |        4 |        5 |       0 |        4 |        3 |        2 |        2 |        2 |        1 |       0 |        2 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        2 |        0 |        3 |        0 |        0 |       0 |      0 |      2 |     21 |     18 |      7 |      3 |      2 |     53 |      0 |      0 |      0 |      5 |      5 |      3 |      1 |      2 |     41 |      0 |      0 |      1 |      2 |      3 |      1 |      1 |      1 |     27 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5188300 |     218 |     92 |     80 |     4 |    0 |     1 |    0 |    0 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |     93 |    125 |      36 |      16 |      14 |       0 |      2 |      4 |      3 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      3 |      0 |        6 |        4 |        7 |        5 |        8 |        7 |       1 |        3 |        9 |       11 |       15 |        8 |        8 |       0 |        5 |        1 |        6 |        8 |        3 |        6 |       4 |        2 |        5 |        9 |        5 |        9 |       12 |       5 |        7 |        0 |        7 |        2 |        4 |        1 |       1 |        5 |        0 |        5 |        3 |        2 |        2 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        3 |        0 |       0 |      0 |      2 |     12 |     15 |     13 |      0 |      3 |     47 |      0 |      0 |      1 |     10 |     17 |      3 |      0 |      1 |     48 |      0 |      0 |      0 |      6 |      5 |      0 |      2 |      1 |     27 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      3 |      0 |     37 | s03      | R    |
| 5188700 |      91 |     33 |     34 |     0 |    0 |     2 |    0 |    2 |     1 |    0 |     19 |    0 |    0 |    0 |    0 |     34 |     57 |      10 |      12 |       5 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      0 |      0 |        2 |        4 |        3 |        1 |        0 |        0 |       0 |        5 |       11 |        3 |        3 |        0 |        1 |       0 |        1 |        4 |        5 |        1 |        4 |        0 |       0 |        2 |        6 |        6 |        2 |        3 |        0 |       0 |        1 |        1 |        2 |        0 |        1 |        0 |       0 |        5 |        4 |        2 |        1 |        1 |        1 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |     29 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |     30 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5188800 |      22 |      4 |      8 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      8 |    0 |    0 |    0 |    0 |      9 |     13 |       4 |       1 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      4 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        2 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        2 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5233000 |     695 |    325 |    193 |    21 |    0 |     6 |   10 |    6 |     4 |    0 |    130 |    0 |    0 |    0 |    0 |    329 |    366 |     199 |      65 |      58 |      15 |      4 |      7 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       1 |       0 |      5 |      2 |      4 |      2 |       18 |       19 |       26 |       33 |       14 |       22 |      11 |       23 |       31 |       33 |       30 |       30 |       21 |      14 |       10 |       16 |       22 |       17 |       13 |       12 |       3 |        8 |       20 |       20 |       19 |       12 |       13 |       8 |       14 |       23 |       12 |       10 |        8 |        4 |       1 |       16 |       19 |        8 |       10 |        2 |        2 |       1 |        2 |        6 |        4 |        4 |        4 |        1 |       0 |        7 |        5 |        7 |        2 |        2 |        3 |       0 |      0 |      5 |     37 |     37 |     11 |      5 |      7 |    223 |      0 |      0 |      2 |     21 |     28 |      7 |      6 |      6 |    123 |      0 |      0 |      1 |     13 |     16 |      4 |      3 |      3 |     90 |      0 |      0 |      0 |      8 |      8 |      2 |      0 |      2 |     27 |      0 |     37 | s03      | R    |
| 5233100 |      65 |     33 |     16 |     3 |    0 |     0 |    0 |    0 |     1 |    0 |     12 |    0 |    0 |    0 |    0 |     31 |     34 |      21 |       8 |       5 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        2 |        2 |        6 |        2 |        2 |       0 |        3 |        2 |        2 |        5 |        1 |        2 |       0 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |        1 |        1 |        1 |        2 |        1 |        2 |       1 |        1 |        1 |        0 |        0 |        2 |        0 |       0 |        2 |        4 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      3 |      7 |      1 |      0 |      3 |     17 |      0 |      0 |      0 |      2 |      3 |      1 |      1 |      0 |      9 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |     37 | s03      | R    |
| 5251000 |     399 |    179 |    113 |     7 |    0 |     4 |    1 |    2 |     2 |    0 |     91 |    0 |    0 |    0 |    0 |    195 |    204 |      81 |      38 |      39 |       4 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     11 |      2 |      4 |      1 |        7 |       19 |        9 |       13 |       15 |       20 |       0 |        8 |       24 |       13 |       10 |        8 |       29 |       4 |        5 |       10 |       10 |       18 |        6 |        9 |       0 |        9 |       11 |        8 |       11 |        5 |        8 |       3 |        5 |       12 |        9 |       10 |        5 |        6 |       1 |       11 |       13 |        6 |        2 |        6 |        5 |       0 |        0 |        4 |        1 |        0 |        0 |        1 |       0 |        1 |        2 |        4 |        1 |        0 |        2 |       0 |      0 |      3 |     14 |     37 |      4 |      1 |      2 |    118 |      0 |      0 |      0 |     20 |      7 |      2 |      1 |      1 |     82 |      0 |      0 |      0 |      8 |     10 |      0 |      1 |      0 |     72 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5252000 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5253000 |     533 |    268 |    156 |    15 |    0 |     3 |    5 |    6 |     3 |    0 |     77 |    0 |    0 |    0 |    0 |    221 |    312 |     136 |      57 |      37 |      11 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      4 |      1 |      1 |        9 |       28 |       20 |       20 |        9 |       16 |       2 |       21 |       34 |       39 |       25 |       17 |       23 |       5 |        5 |       21 |       15 |       12 |        6 |        7 |       3 |       19 |       27 |       17 |        9 |        6 |        7 |       2 |        1 |       11 |       11 |        4 |        5 |        0 |       0 |       14 |       13 |        6 |        8 |        0 |        4 |       0 |        3 |        3 |        6 |        2 |        2 |        0 |       0 |        2 |        2 |        6 |        3 |        0 |        3 |       0 |      0 |      6 |     55 |     20 |      7 |      2 |      4 |    174 |      0 |      0 |      1 |     34 |     12 |      5 |      0 |      2 |    102 |      0 |      0 |      3 |     11 |      1 |      0 |      0 |      1 |     61 |      0 |      0 |      1 |      5 |      4 |      3 |      1 |      0 |     18 |      0 |     37 | s03      | R    |
| 5253900 |      52 |     27 |     17 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     24 |     28 |      10 |       3 |       4 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        2 |        5 |       2 |        1 |        0 |        0 |        1 |        6 |        5 |       3 |        0 |        0 |        1 |        0 |        0 |        7 |       0 |        0 |        0 |        1 |        1 |        3 |        4 |       0 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      5 |      1 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5254000 |     344 |    131 |    134 |     9 |    0 |     3 |    4 |    0 |     1 |    0 |     62 |    0 |    0 |    0 |    0 |    152 |    192 |      34 |      28 |      14 |       3 |      3 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      9 |      3 |      0 |        4 |        6 |        6 |        8 |       13 |        9 |       4 |        3 |        7 |        7 |       12 |       10 |       32 |      10 |        2 |        7 |        7 |       10 |       17 |       13 |       5 |        1 |        5 |        9 |       14 |       20 |       20 |       4 |        1 |        9 |        9 |        3 |        4 |        5 |       2 |        3 |       10 |        2 |        6 |        4 |        3 |       1 |        1 |        1 |        1 |        3 |        1 |        1 |       0 |        3 |        1 |        2 |        1 |        1 |        1 |       0 |      0 |      1 |     22 |     23 |      8 |      4 |      5 |     68 |      0 |      0 |      1 |     21 |     16 |     10 |      4 |      3 |     79 |      0 |      0 |      1 |     11 |      7 |      2 |      0 |      0 |     41 |      0 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 5255000 |     282 |    113 |    111 |     5 |    0 |     0 |    1 |    0 |     3 |    0 |     49 |    0 |    0 |    0 |    0 |    146 |    136 |      38 |      24 |      16 |       4 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      3 |      3 |      0 |        5 |        5 |        9 |       15 |        7 |        7 |       3 |        4 |        9 |       15 |       13 |       11 |        6 |       4 |        6 |        6 |       14 |       13 |       10 |       10 |       1 |        2 |        7 |       12 |       16 |        4 |        7 |       3 |        6 |        5 |        5 |        8 |        3 |        3 |       0 |        6 |        1 |        6 |        4 |        1 |        1 |       0 |        3 |        0 |        0 |        2 |        0 |        0 |       0 |        2 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      2 |     12 |     17 |      6 |     10 |      1 |     65 |      0 |      0 |      1 |     11 |     20 |     10 |      4 |      1 |     64 |      0 |      0 |      0 |      8 |      5 |      3 |      3 |      1 |     29 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5255200 |       7 |      3 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5255300 |      25 |     15 |      6 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     12 |     13 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        4 |       1 |        0 |        0 |        0 |        1 |        1 |        5 |       1 |        0 |        0 |        0 |        0 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      4 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5256000 |     407 |    158 |    163 |     9 |    0 |     1 |    4 |    2 |     3 |    0 |     67 |    0 |    0 |    0 |    0 |    190 |    217 |      58 |      49 |      23 |       2 |      6 |      6 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |     10 |      1 |      2 |      0 |        6 |       10 |       12 |       15 |        9 |        9 |       3 |        9 |       15 |       25 |       17 |       13 |       12 |       3 |        9 |       18 |       14 |       22 |       13 |       10 |       2 |       10 |       18 |        9 |       13 |       10 |       12 |       3 |        5 |       11 |       10 |        3 |        1 |        0 |       0 |       10 |        8 |       10 |        6 |        2 |        1 |       0 |        1 |        2 |        1 |        1 |        1 |        2 |       0 |        3 |        4 |        0 |        3 |        0 |        1 |       0 |      0 |      1 |     24 |     25 |      5 |     11 |      3 |     89 |      0 |      0 |      1 |     18 |     16 |     10 |      5 |      9 |    104 |      0 |      0 |      1 |      8 |      5 |      3 |      1 |      0 |     49 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5256100 |     180 |     78 |     71 |     2 |    0 |     1 |    1 |    1 |     3 |    0 |     23 |    0 |    0 |    0 |    0 |     80 |    100 |      35 |       7 |       9 |       2 |      2 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      0 |      0 |      2 |        3 |        4 |        5 |        7 |        4 |        3 |       5 |        5 |        4 |        6 |        9 |       12 |        8 |       3 |        2 |        0 |        5 |        9 |        4 |        9 |       3 |        1 |        2 |        4 |       11 |        9 |       10 |       2 |        2 |        2 |        4 |        2 |        1 |        1 |       0 |        1 |        2 |        1 |        3 |        3 |        1 |       0 |        0 |        3 |        0 |        1 |        0 |        1 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |     11 |      7 |      0 |      3 |      4 |     52 |      0 |      0 |      0 |     12 |     12 |      2 |      4 |      2 |     39 |      0 |      0 |      1 |      3 |      3 |      4 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 5257000 |     352 |    112 |    195 |     7 |    0 |     1 |    1 |    0 |     3 |    0 |     33 |    0 |    0 |    0 |    0 |    111 |    241 |       5 |       1 |       0 |       0 |      5 |     11 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        1 |        0 |        0 |        1 |       30 |       2 |        2 |        0 |        0 |        0 |        0 |       72 |       3 |        0 |        1 |        0 |        0 |        0 |       53 |       4 |        0 |        0 |        1 |        0 |        0 |      126 |      10 |        0 |        0 |        0 |        1 |        0 |       12 |       1 |        0 |        0 |        0 |        0 |        2 |       16 |       1 |        0 |        0 |        0 |        0 |        0 |        3 |       1 |        0 |        0 |        0 |        0 |        0 |        8 |       0 |      0 |      1 |     14 |     16 |      2 |      1 |      0 |     78 |      0 |      0 |      2 |     25 |     21 |      7 |      6 |      3 |    131 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |     24 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5257100 |     563 |    242 |    217 |    11 |    0 |     3 |    2 |    4 |     4 |    0 |     80 |    0 |    0 |    0 |    0 |    253 |    310 |      79 |      38 |      25 |       4 |      6 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      5 |      0 |      0 |        3 |        9 |        8 |       11 |       20 |       34 |       3 |        6 |       13 |       19 |       19 |       22 |       64 |      11 |        6 |       15 |       20 |       19 |       14 |       24 |       9 |        0 |       11 |       11 |       20 |       17 |       44 |       7 |        6 |        6 |        5 |        7 |        6 |        8 |       1 |        6 |        7 |        6 |       11 |        2 |        9 |       0 |        3 |        5 |        3 |        3 |        1 |        4 |       0 |        2 |        0 |        0 |        1 |        1 |        1 |       0 |      0 |      2 |     26 |     32 |     10 |     10 |      6 |    156 |      0 |      0 |      1 |     33 |     23 |     10 |     14 |      2 |    134 |      0 |      0 |      0 |     10 |      9 |      5 |      1 |      3 |     52 |      0 |      0 |      0 |      4 |      3 |      1 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 5258000 |     142 |     50 |     50 |     5 |    0 |     3 |    4 |    2 |     1 |    0 |     27 |    0 |    0 |    0 |    0 |     74 |     68 |      22 |      10 |      11 |       5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      5 |      0 |        3 |        5 |        6 |        5 |        4 |        2 |       0 |        1 |        5 |        5 |        7 |        4 |        1 |       2 |        2 |        2 |        3 |        5 |        6 |        5 |       2 |        3 |        2 |        5 |        2 |        3 |        7 |       3 |        1 |        5 |        2 |        4 |        1 |        1 |       1 |        3 |        4 |        1 |        2 |        0 |        1 |       1 |        2 |        3 |        2 |        0 |        1 |        1 |       0 |        1 |        3 |        2 |        0 |        0 |        0 |       0 |      0 |      2 |      7 |      6 |      1 |      1 |      1 |     32 |      0 |      0 |      1 |      5 |      8 |      1 |      2 |      1 |     32 |      0 |      0 |      1 |      0 |      1 |      1 |      1 |      0 |     23 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 5258100 |     339 |    149 |    124 |     7 |    0 |     3 |    1 |    2 |     3 |    0 |     50 |    0 |    0 |    0 |    0 |    144 |    195 |      70 |      27 |      26 |       6 |      0 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      0 |      0 |        3 |        8 |       10 |       15 |        6 |       12 |       3 |        7 |       14 |       14 |       23 |       11 |       19 |       4 |        4 |       11 |       15 |       14 |        7 |        2 |       2 |        5 |        7 |       22 |       15 |       10 |        9 |       1 |        5 |        5 |        8 |        1 |        6 |        1 |       0 |        2 |        8 |        8 |        4 |        2 |        0 |       0 |        0 |        3 |        2 |        0 |        1 |        0 |       0 |        2 |        3 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |     30 |     20 |      3 |      4 |      4 |     88 |      0 |      0 |      0 |     22 |     11 |      7 |      2 |      4 |     78 |      0 |      0 |      0 |      7 |      3 |      2 |      0 |      0 |     38 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5258200 |     434 |    185 |    138 |    18 |    0 |     7 |    1 |    2 |     4 |    0 |     79 |    0 |    0 |    0 |    0 |    183 |    251 |      75 |      37 |      38 |       4 |      3 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      1 |        2 |       12 |       14 |       11 |        6 |       15 |       5 |        8 |       22 |       17 |       20 |       16 |       29 |       8 |       11 |       12 |       10 |       10 |        5 |       21 |       1 |        3 |       21 |        6 |        8 |        5 |       23 |       2 |        7 |       10 |        5 |        8 |        3 |        4 |       1 |       10 |       14 |        5 |        2 |        5 |        5 |       0 |        0 |        4 |        2 |        0 |        1 |        3 |       0 |        6 |        4 |        5 |        2 |        0 |        5 |       0 |      0 |      2 |     24 |     23 |      3 |      2 |      1 |    130 |      0 |      0 |      2 |     10 |     13 |      2 |      2 |      3 |    106 |      0 |      0 |      1 |      7 |      2 |      1 |      0 |      0 |     68 |      0 |      0 |      0 |      5 |      4 |      1 |      1 |      0 |     21 |      0 |     37 | s03      | R    |
| 5259000 |     407 |    188 |    117 |    12 |    0 |     5 |    2 |    4 |     2 |    0 |     77 |    0 |    0 |    0 |    0 |    187 |    220 |     103 |      41 |      31 |      11 |      2 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      1 |      5 |      0 |        8 |       24 |       14 |       20 |       12 |        8 |       1 |       11 |       24 |       20 |       15 |       11 |       19 |       1 |        5 |       13 |       14 |        6 |       12 |        5 |       0 |        9 |       14 |       12 |       13 |        8 |        6 |       0 |       10 |        8 |        4 |        7 |        1 |        2 |       1 |       18 |       12 |        6 |        5 |        2 |        1 |       0 |        0 |        3 |        3 |        3 |        1 |        1 |       1 |        3 |        3 |        4 |        1 |        2 |        0 |       0 |      0 |      2 |     33 |     13 |      2 |      1 |      6 |    131 |      0 |      0 |      0 |     23 |      7 |      4 |      3 |      3 |     77 |      0 |      0 |      0 |      9 |      5 |      0 |      0 |      1 |     62 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 5260000 |     276 |    140 |     74 |     7 |    0 |     3 |    1 |    2 |     0 |    0 |     49 |    0 |    0 |    0 |    0 |    128 |    148 |      94 |      32 |      28 |       8 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      3 |      0 |        7 |        6 |       16 |       18 |        5 |       11 |       2 |        7 |       12 |       19 |       17 |       12 |        7 |       1 |        3 |        4 |       11 |        6 |        9 |        7 |       0 |        4 |        6 |       13 |        3 |        0 |        7 |       1 |        6 |        3 |        4 |        3 |        1 |        1 |       0 |       13 |        7 |        5 |        1 |        2 |        3 |       0 |        0 |        1 |        0 |        2 |        1 |        1 |       0 |        1 |        0 |        1 |        2 |        1 |        3 |       0 |      0 |      3 |     29 |     20 |      4 |      4 |      4 |     76 |      0 |      0 |      0 |     13 |     14 |      0 |      1 |      2 |     44 |      0 |      0 |      0 |     12 |      2 |      0 |      0 |      1 |     34 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5261000 |     290 |    144 |     70 |    10 |    0 |     2 |    1 |    1 |     2 |    0 |     60 |    0 |    0 |    0 |    0 |    150 |    140 |      74 |      27 |      31 |       3 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        9 |       11 |       10 |       11 |       10 |       18 |       2 |       11 |       17 |        7 |       12 |       12 |       11 |       3 |        7 |        8 |        9 |        8 |        3 |        4 |       0 |        8 |        7 |        3 |        3 |        3 |        6 |       1 |        4 |        6 |        8 |        7 |        3 |        5 |       0 |       10 |        5 |        7 |        3 |        1 |        1 |       0 |        1 |        1 |        2 |        2 |        1 |        0 |       0 |        3 |        1 |        1 |        3 |        1 |        0 |       0 |      0 |      2 |     22 |     12 |      6 |      1 |      2 |     99 |      0 |      0 |      0 |      5 |      6 |      1 |      3 |      1 |     54 |      0 |      0 |      2 |      8 |      2 |      1 |      0 |      0 |     47 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5262000 |     245 |    109 |     80 |     6 |    0 |     4 |    3 |    1 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |    112 |    133 |      49 |      19 |      20 |      11 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      0 |      1 |      0 |      1 |        7 |       11 |        3 |        7 |        5 |        8 |       3 |        7 |        7 |        8 |       14 |       13 |       10 |       6 |        1 |        7 |        7 |        8 |        8 |        9 |       1 |        2 |        5 |        6 |        9 |        7 |        8 |       2 |        5 |        5 |        4 |        2 |        2 |        1 |       0 |        6 |        4 |        3 |        4 |        2 |        3 |       1 |        1 |        2 |        2 |        0 |        1 |        2 |       0 |        2 |        1 |        0 |        0 |        1 |        2 |       0 |      0 |      1 |     13 |     15 |      1 |      2 |      3 |     74 |      0 |      0 |      2 |      9 |     17 |      3 |      2 |      0 |     47 |      0 |      0 |      0 |     12 |      2 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5263000 |     296 |    118 |    109 |     4 |    0 |     1 |    4 |    3 |     3 |    0 |     54 |    0 |    0 |    0 |    0 |    131 |    165 |      51 |      34 |      22 |       5 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      3 |      2 |      0 |        3 |       11 |        8 |        9 |        1 |       11 |       1 |        8 |       12 |       10 |       15 |       12 |       13 |       4 |        4 |       10 |       10 |        9 |        5 |       10 |       4 |        5 |        9 |       10 |       11 |        6 |       11 |       5 |        6 |        7 |        6 |        4 |        3 |        2 |       0 |        7 |        5 |        5 |        5 |        2 |        2 |       0 |        0 |        4 |        1 |        1 |        1 |        0 |       0 |        2 |        2 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |     12 |     14 |      3 |      3 |      2 |     84 |      0 |      0 |      0 |     14 |     15 |      1 |      5 |      4 |     70 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     47 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5264000 |      71 |     28 |     22 |     2 |    0 |     0 |    1 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     35 |     36 |      14 |       7 |       5 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        3 |        4 |        3 |        2 |        1 |       1 |        2 |        3 |        2 |        4 |        2 |        1 |       0 |        0 |        2 |        3 |        1 |        1 |        3 |       0 |        0 |        1 |        0 |        4 |        3 |        4 |       0 |        1 |        2 |        2 |        1 |        0 |        3 |       0 |        1 |        3 |        2 |        0 |        3 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      0 |      1 |      1 |     20 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      1 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 5264100 |     109 |     39 |     46 |     1 |    0 |     0 |    1 |    0 |     2 |    0 |     20 |    0 |    0 |    0 |    0 |     50 |     59 |      16 |      18 |      13 |       1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        1 |        3 |        5 |        5 |        5 |        1 |       0 |        2 |        2 |        2 |        6 |        2 |        5 |       0 |        1 |        5 |        4 |        4 |        2 |        2 |       1 |        3 |        5 |        7 |        4 |        2 |        5 |       1 |        1 |        2 |        2 |        2 |        2 |        0 |       0 |        4 |        2 |        4 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      9 |      1 |      1 |      1 |     21 |      0 |      0 |      0 |      5 |      6 |      1 |      0 |      1 |     33 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5265000 |     508 |    201 |    208 |     9 |    0 |     1 |    7 |    1 |     1 |    0 |     80 |    0 |    0 |    0 |    0 |    223 |    285 |      79 |      41 |      24 |       2 |      7 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      5 |      5 |      3 |      0 |        6 |       12 |       13 |       16 |        5 |       14 |      11 |        8 |       23 |       21 |       20 |       18 |       22 |      12 |        4 |       13 |       22 |       15 |       16 |       20 |       7 |        8 |       18 |       15 |       14 |       25 |       18 |      13 |        7 |        8 |        5 |        8 |        6 |        4 |       1 |        5 |        6 |       13 |        6 |        5 |        5 |       1 |        1 |        1 |        2 |        3 |        3 |        0 |       0 |        1 |        2 |        2 |        1 |        2 |        1 |       0 |      0 |      0 |     23 |     32 |      7 |      2 |      4 |    133 |      0 |      0 |      2 |     24 |     26 |     12 |      5 |      6 |    133 |      0 |      0 |      0 |     12 |      8 |      4 |      1 |      0 |     55 |      0 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5266000 |     572 |    214 |    252 |    11 |    0 |     7 |    1 |    2 |     3 |    0 |     82 |    0 |    0 |    0 |    0 |    259 |    313 |      66 |      32 |      21 |       7 |     10 |     16 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      1 |      0 |        3 |       21 |       15 |       23 |       11 |       13 |      11 |       16 |       18 |       21 |       18 |       10 |       22 |      12 |        8 |       11 |       17 |       22 |       16 |       20 |      16 |       15 |       22 |       11 |       26 |       17 |       33 |      18 |        4 |       13 |       12 |        7 |        3 |        2 |       0 |       12 |        8 |        7 |        6 |        6 |        2 |       0 |        3 |        2 |        2 |        2 |        1 |        1 |       0 |        3 |        4 |        3 |        2 |        0 |        1 |       0 |      0 |      0 |     22 |     36 |      7 |      3 |      5 |    141 |      0 |      0 |      0 |     33 |     28 |     12 |      5 |     10 |    164 |      0 |      0 |      1 |     12 |      2 |      4 |      0 |      3 |     60 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 5267000 |     459 |    166 |    186 |    17 |    0 |     4 |    0 |    2 |     4 |    0 |     80 |    0 |    0 |    0 |    0 |    204 |    255 |      51 |      28 |      18 |       7 |      6 |     11 |      1 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      1 |      0 |        3 |        4 |       10 |       13 |       11 |       10 |      12 |        7 |        8 |       21 |       18 |       15 |       19 |      15 |        5 |       14 |       16 |       18 |       12 |       13 |      11 |        7 |        8 |       17 |       12 |       11 |       26 |      16 |        7 |        8 |        6 |        6 |       10 |        3 |       2 |        5 |        8 |        9 |        6 |        3 |        6 |       1 |        2 |        3 |        2 |        1 |        0 |        2 |       0 |        4 |        4 |        0 |        4 |        2 |        3 |       0 |      0 |      3 |     19 |     23 |     11 |      7 |      8 |     95 |      0 |      0 |      0 |     22 |     29 |     15 |      4 |      3 |    113 |      0 |      0 |      2 |      5 |     13 |      2 |      0 |      5 |     53 |      0 |      0 |      0 |      6 |      9 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5267100 |      44 |     12 |     22 |     0 |    0 |     0 |    0 |    1 |     1 |    0 |      8 |    0 |    0 |    0 |    0 |     24 |     20 |       6 |       6 |       6 |       1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        1 |        1 |        1 |        0 |       0 |        1 |        2 |        0 |        1 |        1 |        0 |       0 |        3 |        1 |        2 |        2 |        0 |        4 |       0 |        1 |        0 |        2 |        1 |        1 |        4 |       1 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |        2 |        2 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      2 |      0 |      0 |      5 |      0 |     15 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5268100 |     220 |    105 |     67 |     7 |    0 |     0 |    1 |    1 |     3 |    0 |     36 |    0 |    0 |    0 |    0 |     89 |    131 |      47 |      11 |       9 |       4 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      5 |      8 |      3 |      0 |        1 |        4 |        1 |        8 |        4 |       27 |       0 |        2 |        2 |        4 |        4 |        6 |       42 |       0 |        1 |        2 |        1 |        5 |        2 |       12 |       1 |        3 |        4 |        4 |        7 |        1 |       23 |       1 |        3 |        3 |        2 |        1 |        1 |        4 |       0 |        1 |        7 |        1 |        3 |        1 |        9 |       0 |        0 |        1 |        0 |        2 |        1 |        2 |       0 |        1 |        0 |        1 |        0 |        1 |        3 |       0 |      0 |      0 |     31 |     20 |      6 |      0 |      2 |     46 |      0 |      0 |      0 |      8 |     11 |      5 |      1 |      2 |     40 |      0 |      0 |      0 |      3 |      7 |      0 |      2 |      1 |     23 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5268200 |     254 |    116 |     90 |     3 |    0 |     2 |    1 |    2 |     2 |    0 |     38 |    0 |    0 |    0 |    0 |    110 |    144 |      32 |      19 |      17 |       2 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      1 |      0 |      0 |        2 |        4 |        3 |       10 |        9 |       13 |       2 |        5 |        8 |        7 |       19 |       12 |       20 |       2 |        4 |        5 |       12 |        6 |        7 |       10 |       0 |        5 |        0 |        7 |       11 |        6 |       16 |       1 |        0 |        7 |        4 |        2 |        2 |        3 |       0 |        3 |        4 |        4 |        5 |        2 |        2 |       0 |        0 |        3 |        1 |        0 |        1 |        0 |       0 |        0 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      3 |     15 |     11 |      9 |      8 |      3 |     67 |      0 |      0 |      1 |      9 |     12 |      9 |      4 |      1 |     54 |      0 |      0 |      0 |      2 |      3 |      5 |      2 |      0 |     26 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5269000 |     353 |    163 |    109 |    11 |    0 |     6 |    4 |    5 |     2 |    0 |     53 |    0 |    0 |    0 |    0 |    153 |    200 |      59 |      19 |       8 |       4 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      2 |      0 |        7 |        6 |       16 |       11 |       12 |       12 |       2 |        8 |       13 |       11 |       14 |       12 |       36 |       3 |        2 |        3 |        9 |        6 |        7 |       19 |       2 |        2 |        7 |        6 |       11 |       11 |       20 |       4 |        2 |        3 |        7 |        8 |        3 |        3 |       0 |        2 |        6 |        6 |        4 |        3 |        5 |       1 |        0 |        6 |        2 |        1 |        2 |        2 |       0 |        0 |        4 |        3 |        3 |        1 |        4 |       0 |      0 |      0 |     31 |     26 |      5 |      2 |      5 |     94 |      0 |      0 |      0 |     15 |     15 |      5 |      3 |      7 |     64 |      0 |      0 |      1 |      5 |      9 |      1 |      2 |      1 |     34 |      0 |      0 |      1 |      1 |      9 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 5269100 |     211 |     96 |     63 |     8 |    0 |     3 |    3 |    2 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |     81 |    130 |      58 |      26 |      17 |       5 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      0 |        2 |        3 |        7 |        6 |        4 |       11 |       2 |        8 |        9 |       11 |        9 |        9 |       13 |       2 |        4 |        4 |        2 |        5 |        1 |        0 |       4 |        5 |        5 |        8 |        8 |        9 |        7 |       1 |        4 |        3 |        1 |        4 |        2 |        2 |       0 |        4 |        5 |        3 |        0 |        3 |        4 |       0 |        1 |        4 |        0 |        0 |        2 |        3 |       0 |        0 |        3 |        0 |        1 |        1 |        2 |       0 |      0 |      2 |     15 |     17 |      0 |      0 |      0 |     62 |      0 |      0 |      0 |     11 |      2 |      1 |      2 |      3 |     44 |      0 |      0 |      1 |      4 |      5 |      0 |      0 |      1 |     24 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5270000 |     577 |    278 |    165 |    18 |    0 |    10 |    4 |    1 |     2 |    0 |     99 |    0 |    0 |    0 |    0 |    277 |    300 |      93 |      41 |      32 |       4 |     10 |      7 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        8 |       11 |       14 |       17 |       19 |       58 |       2 |        7 |       11 |        6 |       19 |       34 |       65 |       7 |        6 |        9 |        9 |       15 |       11 |       27 |       5 |        6 |        9 |       10 |        4 |       12 |       36 |       6 |        5 |        4 |       10 |        9 |       11 |       14 |       0 |        7 |        8 |        8 |        2 |        7 |       12 |       2 |        0 |        2 |        1 |        3 |        3 |        4 |       0 |        3 |        4 |        2 |        4 |        1 |        8 |       0 |      0 |      4 |     44 |     44 |     13 |      4 |      5 |    164 |      0 |      0 |      2 |     20 |     14 |      3 |      7 |      4 |    115 |      0 |      0 |      0 |     16 |      9 |      5 |      2 |      3 |     64 |      0 |      0 |      0 |      8 |      6 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 5272000 |     515 |    258 |    128 |    12 |    0 |     9 |    2 |    9 |     6 |    0 |     91 |    0 |    0 |    0 |    0 |    259 |    256 |     145 |      42 |      50 |      15 |      4 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      3 |      4 |      1 |      3 |        9 |       17 |       32 |       24 |       15 |       25 |       2 |       14 |       33 |       26 |       26 |       17 |       17 |       1 |        3 |       15 |       14 |       15 |       10 |       10 |       1 |        7 |       13 |        9 |        7 |        7 |       15 |       2 |        7 |       17 |        4 |        7 |        5 |        5 |       0 |       14 |       11 |       11 |        2 |        1 |        7 |       0 |        4 |       10 |        3 |        1 |        3 |        1 |       0 |        4 |        4 |        2 |        2 |        2 |        2 |       0 |      0 |      2 |     40 |     40 |      6 |      8 |      5 |    157 |      0 |      0 |      0 |     18 |     18 |      2 |      5 |      2 |     83 |      0 |      0 |      1 |     11 |     10 |      5 |      0 |      0 |     64 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |      0 |     31 |      0 |     37 | s03      | R    |
| 5273000 |     424 |    197 |    115 |     6 |    0 |     9 |    1 |    5 |     3 |    0 |     88 |    0 |    0 |    0 |    0 |    183 |    241 |     120 |      49 |      48 |       9 |      2 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      2 |      0 |       11 |       17 |       22 |       13 |       13 |       10 |       5 |        9 |       24 |       16 |       23 |       15 |       16 |       3 |       10 |        4 |        8 |        7 |        9 |       11 |       0 |        4 |       13 |       12 |       10 |        8 |       17 |       2 |       11 |        8 |        5 |        5 |        3 |        4 |       0 |       14 |       12 |        9 |        2 |        8 |        7 |       0 |        2 |        3 |        0 |        1 |        0 |        1 |       0 |        1 |        7 |        3 |        4 |        2 |        0 |       0 |      0 |      4 |     32 |     24 |      7 |      3 |      3 |    124 |      0 |      0 |      1 |     14 |     18 |     10 |      2 |      2 |     68 |      0 |      0 |      1 |     15 |      5 |      5 |      2 |      1 |     59 |      0 |      0 |      1 |      3 |      7 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5274000 |     429 |    199 |    134 |     5 |    0 |     4 |    4 |    2 |     2 |    0 |     79 |    0 |    0 |    0 |    0 |    190 |    239 |     110 |      52 |      31 |       4 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      4 |      1 |      0 |        6 |       15 |       21 |       20 |       11 |       17 |       2 |       10 |       14 |       23 |       15 |       11 |       30 |       4 |        8 |       12 |       12 |       14 |        4 |        7 |       0 |       11 |       17 |       12 |       11 |        9 |       16 |       1 |        9 |        8 |        5 |       10 |        2 |        0 |       0 |        8 |        6 |        7 |       12 |        4 |        7 |       1 |        1 |        1 |        1 |        2 |        0 |        2 |       0 |        4 |        2 |        1 |        2 |        0 |        1 |       0 |      0 |      2 |     28 |     35 |      8 |      2 |      1 |    123 |      0 |      0 |      0 |     20 |     14 |      5 |      0 |      2 |     93 |      0 |      0 |      1 |     14 |     12 |      2 |      1 |      2 |     47 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5275000 |     451 |    211 |    167 |    13 |    0 |     2 |    2 |    3 |     4 |    0 |     49 |    0 |    0 |    0 |    0 |    183 |    268 |      78 |      37 |      18 |       7 |      4 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      6 |      3 |      0 |        7 |       10 |        8 |        9 |       12 |       21 |       6 |        7 |       18 |       15 |       18 |       17 |       48 |      15 |        3 |        6 |       19 |       18 |       10 |       15 |       6 |        6 |        7 |       22 |       13 |        7 |       27 |       8 |        3 |        5 |        4 |        2 |        5 |        4 |       0 |        2 |        7 |        6 |        4 |        2 |        3 |       2 |        2 |        1 |        2 |        2 |        1 |        2 |       0 |        2 |        1 |        2 |        4 |        1 |        4 |       0 |      0 |      2 |     33 |     47 |      1 |      3 |      3 |    122 |      0 |      0 |      2 |     28 |     22 |      5 |      5 |      5 |    100 |      0 |      0 |      1 |      3 |      5 |      1 |      0 |      0 |     39 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     20 |      0 |     37 | s03      | R    |
| 5276000 |     353 |    126 |    155 |     6 |    0 |     2 |    6 |    4 |     0 |    0 |     54 |    0 |    0 |    0 |    0 |    159 |    194 |      36 |      33 |      17 |       5 |      3 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        7 |        9 |       10 |        7 |       12 |       4 |        3 |        9 |       14 |       18 |        6 |       13 |      12 |        8 |        8 |       13 |       15 |       16 |        6 |       8 |        6 |       10 |       15 |        7 |       12 |       16 |      15 |        2 |        7 |        4 |        7 |        0 |        1 |       1 |       11 |        6 |        5 |        5 |        2 |        1 |       2 |        0 |        5 |        3 |        3 |        0 |        1 |       0 |        4 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |     25 |     16 |      1 |      2 |      4 |     78 |      0 |      0 |      0 |     14 |     16 |      6 |      6 |      7 |    106 |      0 |      0 |      1 |      6 |      3 |      2 |      0 |      2 |     40 |      0 |      0 |      0 |      3 |      5 |      0 |      1 |      1 |      8 |      0 |     37 | s03      | R    |
| 5277000 |     309 |    133 |    126 |     1 |    0 |     3 |    2 |    1 |     2 |    0 |     41 |    0 |    0 |    0 |    0 |    130 |    179 |      36 |      15 |      12 |       1 |     13 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |        1 |       10 |        6 |        9 |        9 |       5 |        3 |        6 |       17 |       13 |       13 |       24 |      11 |        5 |        3 |        9 |        8 |        9 |       16 |      10 |        7 |        5 |        7 |        9 |        9 |       20 |       9 |        3 |        5 |        5 |        6 |        0 |        1 |       0 |        8 |        4 |        3 |        1 |        3 |        2 |       0 |        0 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        2 |        0 |        2 |        1 |        0 |       0 |      0 |      2 |     25 |     20 |      6 |      1 |      7 |     72 |      0 |      0 |      0 |     11 |     18 |      8 |      1 |     10 |     78 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      1 |     31 |      0 |      0 |      2 |      0 |      4 |      0 |      0 |      1 |      2 |      0 |     37 | s03      | R    |
| 5277100 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5278000 |     425 |    157 |    193 |     4 |    0 |     4 |    2 |    3 |     4 |    0 |     58 |    0 |    0 |    0 |    0 |    190 |    235 |      52 |      23 |      14 |       2 |      3 |     10 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        4 |        6 |        9 |       18 |       11 |        8 |       8 |        8 |       10 |       18 |       18 |        9 |       17 |      13 |        6 |        6 |       22 |       12 |        9 |       20 |      13 |        6 |       10 |       17 |       17 |       13 |       26 |      16 |        3 |        3 |       10 |        5 |        5 |        3 |       0 |        3 |        6 |        8 |        7 |        2 |        3 |       0 |        0 |        5 |        3 |        0 |        1 |        0 |       0 |        2 |        2 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |     21 |     13 |      8 |      5 |      3 |    106 |      0 |      0 |      0 |     20 |     23 |      7 |     10 |      7 |    126 |      0 |      0 |      3 |      6 |      5 |      5 |      2 |      1 |     36 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5279000 |     294 |    132 |     95 |     8 |    0 |     2 |    2 |    3 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    141 |    153 |      72 |      32 |      25 |       4 |      2 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      2 |        4 |        6 |       13 |       16 |       11 |       10 |       4 |       10 |       17 |        8 |       13 |        5 |       10 |       5 |        2 |        9 |        9 |       10 |        5 |        7 |       3 |        7 |        8 |        9 |       12 |        5 |        8 |       1 |        5 |        5 |        3 |        8 |        1 |        2 |       0 |        6 |        5 |       10 |        3 |        0 |        3 |       0 |        2 |        2 |        2 |        0 |        1 |        1 |       0 |        2 |        2 |        1 |        1 |        2 |        0 |       0 |      0 |      3 |     16 |     14 |      2 |      1 |      4 |     92 |      0 |      0 |      1 |     20 |      8 |      3 |      5 |      2 |     56 |      0 |      0 |      2 |      6 |      2 |      1 |      0 |      0 |     40 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5280000 |     197 |     92 |     60 |     7 |    0 |     0 |    0 |    2 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |     82 |    115 |      46 |      24 |      13 |       6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        3 |        1 |        4 |        8 |        4 |       10 |       4 |        7 |        8 |        7 |        9 |        9 |       16 |       2 |        3 |        2 |        6 |        3 |        4 |        8 |       0 |        0 |       10 |        6 |        5 |        1 |       11 |       1 |        1 |        6 |        3 |        2 |        1 |        3 |       0 |        3 |        3 |        3 |        5 |        1 |        3 |       0 |        4 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |      0 |      0 |     16 |     19 |      5 |      2 |      1 |     49 |      0 |      0 |      0 |      9 |     10 |      5 |      0 |      1 |     35 |      0 |      0 |      0 |      7 |      0 |      1 |      0 |      2 |     24 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5280100 |     125 |     56 |     39 |     0 |    0 |     4 |    1 |    1 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     62 |     63 |      34 |      11 |      13 |       3 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      3 |      4 |      0 |        2 |        6 |        3 |        4 |        1 |        5 |       5 |        4 |        6 |        4 |        3 |        6 |        1 |       6 |        1 |        4 |        3 |        3 |        4 |        5 |       0 |        1 |        4 |        2 |        2 |        4 |        5 |       1 |        1 |        3 |        6 |        1 |        0 |        0 |       0 |        1 |        3 |        4 |        0 |        1 |        2 |       1 |        1 |        1 |        0 |        0 |        2 |        1 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |     11 |      2 |      1 |      1 |     35 |      0 |      0 |      0 |      7 |     12 |      3 |      2 |      2 |     13 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |     17 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5281000 |     513 |    231 |    159 |    13 |    0 |     6 |    7 |    2 |     4 |    0 |     91 |    0 |    0 |    0 |    0 |    262 |    251 |      85 |      46 |      20 |       5 |      8 |      2 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      2 |      2 |      2 |      1 |        6 |       10 |       13 |       21 |       25 |       27 |       3 |        6 |       25 |       12 |       22 |       27 |       31 |       3 |        5 |        9 |        7 |       17 |       28 |       22 |       0 |        5 |        9 |        7 |       18 |       17 |       13 |       2 |        7 |        6 |        6 |       10 |       14 |        6 |       1 |        8 |        4 |        8 |       11 |        4 |        5 |       1 |        2 |        6 |        0 |        3 |        5 |        3 |       0 |        1 |        1 |        4 |        5 |        2 |        0 |       0 |      0 |      5 |     44 |     31 |     15 |      5 |      1 |    130 |      0 |      0 |      1 |     24 |     18 |      8 |      4 |      2 |    102 |      0 |      0 |      0 |     13 |      6 |      2 |      2 |      0 |     68 |      0 |      0 |      2 |      7 |      2 |      0 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 5282000 |     334 |    167 |     95 |     5 |    0 |     9 |    0 |    1 |     0 |    0 |     57 |    0 |    0 |    0 |    0 |    165 |    169 |      86 |      23 |      24 |       5 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      3 |      1 |      1 |      0 |       10 |       11 |        6 |       14 |       12 |       18 |      15 |        2 |       11 |       12 |       16 |       10 |       19 |      11 |        3 |        6 |       13 |        6 |        5 |        7 |       7 |        2 |        8 |        9 |        9 |        3 |        7 |      10 |        3 |        6 |        3 |        7 |        5 |        1 |       1 |        5 |        5 |        4 |        8 |        5 |        3 |       1 |        2 |        0 |        2 |        0 |        0 |        2 |       0 |        3 |        1 |        2 |        0 |        1 |        2 |       0 |      0 |      0 |     21 |     17 |      9 |      4 |      3 |    113 |      0 |      0 |      0 |     13 |     20 |      4 |      3 |      1 |     54 |      0 |      0 |      3 |      5 |      6 |      2 |      1 |      2 |     38 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5283000 |     416 |    195 |    159 |     5 |    0 |     2 |    1 |    1 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |    180 |    236 |      87 |      36 |      18 |       1 |      4 |     10 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       4 |       1 |      5 |      3 |      0 |      0 |        6 |        6 |       20 |       12 |       11 |       19 |       6 |        4 |       11 |       19 |       25 |       16 |       23 |      17 |        2 |       10 |       13 |       14 |       11 |       10 |      16 |        5 |        6 |       11 |       15 |       12 |       17 |      17 |        5 |        2 |        7 |        3 |        2 |        0 |       0 |        3 |        8 |        6 |        4 |        3 |        8 |       0 |        0 |        2 |        2 |        0 |        1 |        0 |       0 |        0 |        3 |        0 |        2 |        0 |        1 |       0 |      0 |      1 |     31 |     32 |      5 |      7 |      9 |    110 |      0 |      0 |      1 |     18 |     18 |      6 |      7 |      5 |    104 |      0 |      0 |      0 |      5 |      6 |      1 |      0 |      3 |     36 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 5284000 |     289 |    134 |     95 |     4 |    0 |     3 |    1 |    0 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    110 |    179 |      52 |      28 |      30 |       1 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        3 |        6 |        8 |        1 |       15 |       9 |        6 |        5 |        6 |        9 |        6 |       48 |      11 |        0 |        5 |        5 |        5 |        5 |       10 |       5 |        2 |        9 |        8 |        6 |        3 |       26 |       6 |        5 |        4 |        5 |        0 |        3 |        8 |       1 |        1 |        7 |        3 |        0 |        3 |        9 |       2 |        0 |        0 |        2 |        2 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |     13 |     28 |      6 |      4 |      4 |     79 |      0 |      0 |      0 |     13 |     16 |      1 |      3 |      2 |     60 |      0 |      0 |      0 |      9 |      6 |      2 |      2 |      0 |     32 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 5285000 |     392 |    159 |    154 |     3 |    0 |     6 |    5 |    4 |     2 |    0 |     59 |    0 |    0 |    0 |    0 |    163 |    229 |      69 |      31 |      23 |       7 |      1 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      5 |      0 |      1 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        2 |       10 |        7 |       15 |        6 |       13 |       8 |        3 |       14 |       28 |       15 |       12 |       14 |      12 |        6 |       11 |       14 |       14 |        8 |       11 |       4 |        3 |       10 |       13 |       19 |       13 |       16 |      12 |        2 |        9 |        7 |        4 |        2 |        2 |       0 |        5 |        4 |        5 |       11 |        4 |        3 |       1 |        2 |        2 |        2 |        1 |        1 |        0 |       0 |        1 |        7 |        1 |        1 |        2 |        0 |       0 |      0 |      1 |     27 |     27 |      9 |      3 |      2 |     90 |      0 |      0 |      1 |     22 |     23 |      5 |      2 |     15 |     86 |      0 |      0 |      1 |     11 |      6 |      2 |      0 |      1 |     38 |      0 |      0 |      2 |      4 |      5 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5286000 |     188 |     64 |     85 |     3 |    0 |     1 |    6 |    5 |     2 |    0 |     22 |    0 |    0 |    0 |    0 |     86 |    102 |      20 |      13 |       4 |       6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        1 |        4 |        2 |        2 |        7 |       8 |        3 |        5 |        1 |       10 |        2 |        5 |      11 |        1 |        3 |       11 |        6 |        7 |        7 |       6 |        6 |        1 |        8 |       10 |        5 |        8 |       6 |        2 |        2 |        1 |        3 |        1 |        2 |       0 |        3 |        2 |        3 |        2 |        0 |        1 |       0 |        0 |        1 |        1 |        3 |        1 |        1 |       0 |        5 |        1 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |      2 |     11 |      1 |      1 |      3 |     46 |      0 |      0 |      0 |      6 |     13 |      4 |      5 |      8 |     49 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      1 |     13 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5286100 |     130 |     65 |     45 |     3 |    0 |     1 |    0 |    0 |     2 |    0 |     14 |    0 |    0 |    0 |    0 |     65 |     65 |      36 |       8 |       5 |       2 |      3 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        2 |        5 |        8 |        3 |        6 |       3 |        3 |        2 |       10 |        9 |        5 |        3 |       3 |        1 |        3 |        5 |        5 |        5 |        2 |       4 |        2 |        2 |        5 |        3 |        2 |        4 |       2 |        1 |        0 |        2 |        1 |        2 |        0 |       0 |        1 |        0 |        1 |        2 |        2 |        2 |       0 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     11 |     10 |      6 |      0 |      3 |     34 |      0 |      0 |      1 |      4 |      5 |      3 |      0 |      2 |     30 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5287000 |     150 |     71 |     62 |     4 |    0 |     2 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     70 |     80 |      28 |       8 |       5 |       0 |      0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        0 |        2 |        8 |        4 |        6 |       6 |        1 |        2 |        5 |       12 |        7 |        6 |       6 |        2 |        4 |        7 |        3 |        5 |        6 |       4 |        8 |        0 |        4 |        7 |        3 |        6 |       3 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        3 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |      0 |      1 |      6 |      7 |      5 |      1 |      2 |     49 |      0 |      0 |      1 |      8 |      2 |      1 |      3 |      0 |     47 |      0 |      0 |      0 |      3 |      1 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      4 |      0 |     37 | s03      | R    |
| 5287100 |     171 |     77 |     60 |     6 |    0 |     3 |    0 |    2 |     2 |    0 |     21 |    0 |    0 |    0 |    0 |     79 |     92 |      26 |      13 |       6 |       1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        8 |        6 |        3 |        9 |       5 |        3 |        5 |        9 |        4 |        2 |       12 |       7 |        0 |        2 |        7 |        7 |        2 |        2 |       6 |        3 |        1 |        5 |       10 |        1 |       11 |       3 |        3 |        4 |        2 |        0 |        1 |        0 |       0 |        2 |        4 |        3 |        1 |        0 |        1 |       0 |        1 |        3 |        1 |        2 |        0 |        1 |       0 |        2 |        1 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |     11 |     13 |      6 |      2 |      2 |     43 |      0 |      0 |      0 |     10 |      3 |      4 |      3 |      1 |     39 |      0 |      0 |      1 |      1 |      3 |      2 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5288000 |     308 |    122 |    135 |     5 |    0 |     1 |    2 |    2 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |    144 |    164 |      32 |      17 |       7 |       0 |      2 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        4 |        4 |        7 |       12 |        7 |       13 |      10 |        4 |        3 |        8 |       12 |       12 |       19 |       7 |        3 |       11 |        8 |       12 |        9 |        9 |      12 |        6 |        7 |        8 |       15 |        7 |       13 |      15 |        3 |        2 |        2 |        6 |        3 |        1 |       1 |        6 |        2 |        3 |        4 |        2 |        4 |       2 |        0 |        2 |        1 |        1 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        2 |        0 |       0 |      0 |      2 |     13 |     14 |      3 |      4 |      3 |     83 |      0 |      0 |      1 |     11 |     21 |      2 |      5 |      4 |     91 |      0 |      0 |      0 |      3 |      7 |      1 |      2 |      1 |     27 |      0 |      0 |      0 |      1 |      4 |      0 |      1 |      0 |      4 |      0 |     37 | s03      | R    |
| 5288100 |     317 |    141 |    131 |     8 |    0 |     4 |    0 |    0 |     3 |    0 |     30 |    0 |    0 |    0 |    0 |    139 |    178 |      56 |      27 |      10 |       5 |      5 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      2 |      0 |        4 |        6 |       11 |       11 |        5 |       10 |      12 |        8 |        7 |       15 |       15 |       11 |       10 |      16 |        5 |       10 |        7 |       15 |        4 |       13 |       5 |        4 |        7 |       11 |       18 |        4 |       16 |      12 |        3 |        5 |        2 |        1 |        0 |        0 |       1 |        3 |        6 |        3 |        4 |        0 |        1 |       1 |        2 |        0 |        2 |        3 |        0 |        2 |       0 |        1 |        0 |        3 |        0 |        1 |        1 |       0 |      0 |      0 |     18 |     14 |      8 |      5 |      7 |     89 |      0 |      0 |      3 |     18 |     16 |      7 |      6 |      5 |     76 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      1 |     22 |      0 |      0 |      0 |      3 |      1 |      3 |      2 |      0 |      6 |      0 |     37 | s03      | R    |
| 5288200 |     176 |     83 |     51 |     2 |    0 |     1 |    1 |    2 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |     82 |     94 |      31 |      11 |      10 |       2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      0 |      2 |      1 |        5 |       13 |        9 |        1 |        2 |        3 |       0 |        7 |       11 |       12 |        9 |        5 |        6 |       0 |        2 |        5 |        9 |        4 |        2 |        2 |       0 |        8 |        8 |        4 |        2 |        1 |        4 |       0 |        7 |        6 |        4 |        3 |        3 |        0 |       0 |        6 |        3 |        2 |        1 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |     10 |      5 |      0 |      0 |      0 |     68 |      0 |      0 |      0 |      5 |      2 |      0 |      1 |      0 |     43 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     35 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5289000 |     583 |    233 |    215 |     9 |    0 |    11 |    1 |    0 |     1 |    0 |    113 |    0 |    0 |    0 |    0 |    265 |    318 |      64 |      33 |      14 |       4 |      8 |     10 |      1 |      1 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      3 |      0 |      0 |        6 |        9 |       16 |       20 |       10 |       17 |      12 |        7 |       21 |       23 |       28 |       22 |       19 |      23 |        7 |       17 |       20 |       17 |       15 |       20 |      11 |        9 |       16 |       23 |       15 |       13 |       20 |      12 |        7 |       12 |        9 |        5 |        9 |        8 |       4 |        8 |       12 |       12 |       13 |        8 |        5 |       1 |        3 |        0 |        4 |        2 |        0 |        5 |       0 |        3 |        1 |        1 |        0 |        1 |        2 |       0 |      0 |      3 |     27 |     29 |     11 |      9 |      9 |    145 |      0 |      0 |      2 |     17 |     33 |     11 |      5 |      5 |    142 |      0 |      0 |      0 |     10 |      9 |      4 |      3 |      0 |     87 |      0 |      0 |      0 |      2 |     10 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5289100 |     458 |    178 |    180 |     5 |    0 |     3 |    4 |    3 |     2 |    0 |     83 |    0 |    0 |    0 |    0 |    225 |    233 |      68 |      31 |      21 |       6 |      7 |      4 |      3 |      0 |      4 |      4 |      1 |      0 |      1 |      3 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       4 |       2 |       1 |       0 |      7 |     10 |      6 |      0 |       10 |        9 |       15 |       16 |       14 |       15 |       1 |        6 |       10 |       19 |       25 |       26 |       10 |       2 |        3 |        8 |       21 |       20 |       18 |       22 |       1 |        1 |        8 |       21 |       14 |       18 |       25 |       0 |        7 |        8 |       10 |        7 |        5 |        7 |       0 |        6 |        5 |        7 |        8 |        7 |        6 |       0 |        2 |        1 |        1 |        1 |        1 |        2 |       0 |        2 |        3 |        2 |        0 |        0 |        2 |       0 |      0 |      1 |     32 |     24 |     11 |      3 |     12 |     95 |      0 |      0 |      1 |     33 |     28 |      9 |     14 |     10 |     85 |      0 |      0 |      1 |     10 |     15 |      4 |      2 |      2 |     49 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5289200 |     754 |    312 |    281 |    19 |    0 |     4 |    2 |    6 |     4 |    0 |    126 |    0 |    0 |    0 |    0 |    349 |    405 |     149 |      84 |      36 |      13 |      3 |      8 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      3 |      6 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |     18 |     14 |      7 |      2 |       14 |        8 |       23 |       38 |       21 |       27 |       1 |       11 |       23 |       29 |       56 |       27 |       32 |       2 |       17 |       14 |       21 |       36 |       35 |       25 |       1 |       10 |       17 |       28 |       28 |       30 |       18 |       1 |        5 |       11 |        9 |       11 |        8 |        6 |       1 |       16 |       13 |       12 |       15 |        8 |       11 |       0 |        7 |        2 |        3 |        0 |        2 |        2 |       1 |        3 |        7 |        2 |        2 |        3 |        1 |       0 |      0 |      2 |     28 |     45 |     19 |      7 |     25 |    186 |      0 |      0 |      0 |     34 |     59 |     13 |     10 |     22 |    143 |      0 |      0 |      1 |     20 |     21 |      9 |      8 |      2 |     65 |      0 |      0 |      0 |      5 |     13 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 5289300 |     342 |    147 |    118 |     7 |    0 |     6 |    6 |    2 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    160 |    182 |      66 |      30 |      15 |       9 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        7 |        6 |        7 |       20 |       10 |       15 |       0 |       13 |        7 |       14 |       20 |       17 |       10 |       1 |        3 |        5 |        7 |       13 |       16 |       12 |       1 |        3 |        6 |       17 |       11 |       12 |       12 |       0 |        5 |        2 |        6 |        3 |        6 |        4 |       0 |        5 |        4 |        5 |        8 |        3 |        4 |       0 |        3 |        1 |        4 |        1 |        1 |        2 |       0 |        2 |        3 |        1 |        0 |        2 |        2 |       0 |      0 |      1 |     21 |     18 |      7 |      3 |      5 |     92 |      0 |      0 |      0 |     17 |     19 |      5 |      7 |     11 |     59 |      0 |      0 |      0 |     11 |      5 |      6 |      0 |      1 |     32 |      0 |      0 |      0 |      2 |      5 |      4 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5289400 |     380 |    140 |    145 |     9 |    0 |     3 |    2 |    1 |     3 |    0 |     77 |    0 |    0 |    0 |    0 |    177 |    203 |      64 |      33 |      26 |       7 |      5 |      6 |      6 |      0 |      0 |      5 |      6 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |     11 |     14 |      5 |      1 |        8 |       10 |       24 |       16 |        4 |        1 |       0 |        7 |       21 |       17 |       21 |        5 |        6 |       0 |        5 |        5 |       19 |       21 |       10 |        9 |       0 |        5 |       17 |       29 |       12 |        6 |        7 |       0 |        6 |        8 |       15 |        5 |        2 |        1 |       0 |        3 |        9 |       17 |        7 |        3 |        1 |       0 |        1 |        1 |        1 |        1 |        2 |        2 |       0 |        2 |        3 |        2 |        1 |        2 |        0 |       0 |      0 |      4 |     55 |      2 |      0 |      0 |      1 |     78 |      0 |      0 |      4 |     49 |      8 |      0 |      0 |      0 |     84 |      0 |      0 |      1 |     25 |      2 |      0 |      0 |      0 |     49 |      0 |      0 |      1 |     10 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5289500 |     606 |    227 |    235 |     8 |    0 |     4 |    2 |    2 |     7 |    0 |    121 |    0 |    0 |    0 |    0 |    283 |    323 |      90 |      51 |      45 |       4 |      6 |      7 |      7 |      1 |      0 |      0 |      2 |      0 |      1 |      5 |      2 |      0 |      1 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      6 |     10 |      5 |      0 |        7 |       12 |       10 |       29 |       24 |        9 |       2 |       12 |       18 |       24 |       50 |       18 |       11 |       1 |        9 |       10 |       21 |       41 |       29 |       12 |       2 |        6 |       17 |       27 |       29 |       19 |       12 |       1 |       12 |        5 |       13 |       14 |        7 |        2 |       0 |       17 |        7 |       18 |       14 |       10 |        1 |       1 |        5 |        3 |        3 |        2 |        0 |        0 |       0 |        3 |        5 |        0 |        1 |        1 |        0 |       0 |      0 |      3 |     23 |     42 |     16 |      5 |     11 |    127 |      0 |      0 |      1 |     33 |     44 |     17 |      9 |     18 |    113 |      0 |      0 |      2 |     27 |     17 |      3 |      2 |      5 |     65 |      0 |      0 |      0 |      1 |      5 |      2 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 5289600 |     128 |     49 |     32 |     4 |    0 |     1 |    0 |    2 |     0 |    0 |     40 |    0 |    0 |    0 |    0 |     59 |     69 |      22 |      10 |      14 |       3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       2 |       0 |      2 |      4 |      2 |      0 |        1 |        3 |        8 |        0 |        3 |        2 |       0 |        1 |       10 |       14 |        5 |        1 |        1 |       0 |        1 |        1 |        7 |        4 |        2 |        0 |       0 |        0 |        3 |        4 |        6 |        3 |        1 |       0 |        3 |        3 |        9 |        7 |        1 |        0 |       0 |        4 |        4 |        6 |        2 |        1 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |     29 |      0 |      0 |      0 |     14 |      1 |      0 |      0 |      0 |     17 |      0 |      0 |      1 |      9 |      1 |      0 |      0 |      0 |     29 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5289700 |     329 |    126 |    144 |     1 |    0 |     1 |    3 |    0 |     4 |    0 |     50 |    0 |    0 |    0 |    0 |    153 |    176 |      33 |      40 |      22 |       3 |      3 |      3 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       6 |       1 |       0 |     14 |     11 |      4 |      0 |        7 |        7 |        8 |       14 |       11 |        6 |       0 |        8 |       10 |       17 |       21 |        7 |       10 |       0 |        7 |       12 |       16 |       14 |       15 |       10 |       0 |        4 |       14 |       17 |       15 |       13 |        7 |       0 |        0 |        2 |        5 |        8 |        4 |        3 |       0 |        8 |        5 |        5 |        5 |        2 |        3 |       0 |        2 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |     16 |     12 |      8 |      9 |      1 |     79 |      0 |      0 |      2 |     24 |     11 |      5 |     13 |      3 |     86 |      0 |      0 |      0 |     14 |      2 |      2 |      4 |      0 |     28 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5290000 |     277 |    100 |    128 |     5 |    0 |     3 |    1 |    0 |     0 |    0 |     40 |    0 |    0 |    0 |    0 |    132 |    145 |      38 |      18 |       7 |       1 |      3 |      8 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      0 |        3 |        4 |        9 |        7 |        5 |        5 |       9 |        2 |        6 |       13 |       11 |        7 |        9 |      10 |        3 |        0 |       10 |       12 |        9 |       20 |      12 |        3 |        2 |        9 |        7 |        7 |       16 |      18 |        4 |        4 |        1 |        2 |        4 |        4 |       1 |        3 |        4 |        3 |        3 |        5 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        3 |        0 |       0 |      0 |      1 |     16 |     16 |      6 |      4 |      4 |     53 |      0 |      0 |      0 |     10 |     13 |      9 |      6 |      8 |     82 |      0 |      0 |      0 |      4 |      1 |      2 |      0 |      2 |     31 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5290100 |     173 |     52 |     85 |     1 |    0 |     2 |    1 |    0 |     2 |    0 |     30 |    0 |    0 |    0 |    0 |     78 |     95 |      10 |       3 |       4 |       2 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        2 |        1 |        3 |        3 |        3 |        3 |       8 |        1 |        2 |        5 |        2 |        5 |        9 |       5 |        3 |        4 |        8 |        4 |        8 |        7 |       4 |        1 |        5 |       10 |        6 |       11 |        9 |       5 |        1 |        0 |        4 |        2 |        5 |        0 |       1 |        2 |        2 |        5 |        4 |        0 |        3 |       1 |        0 |        0 |        0 |        1 |        0 |        3 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      4 |      6 |      1 |      1 |      6 |     33 |      0 |      0 |      0 |     12 |      7 |      5 |      3 |      4 |     54 |      0 |      0 |      0 |      5 |      8 |      0 |      1 |      3 |     13 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5291000 |     377 |    116 |    188 |     4 |    0 |     2 |    0 |    2 |     1 |    0 |     64 |    0 |    0 |    0 |    0 |    178 |    199 |      30 |      30 |      13 |       1 |      4 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        9 |        7 |        7 |       11 |       6 |        3 |        8 |       17 |       15 |        6 |       16 |       9 |        5 |       10 |       19 |       11 |        8 |       27 |      15 |        2 |        7 |       18 |       11 |       13 |       23 |      19 |        3 |        3 |       11 |       11 |        2 |        3 |       1 |        2 |        6 |        5 |       11 |        2 |        1 |       3 |        1 |        1 |        0 |        2 |        1 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |     18 |     20 |      8 |      1 |      3 |     65 |      0 |      0 |      3 |     25 |     18 |     15 |      9 |      4 |    114 |      0 |      0 |      0 |      6 |     16 |      7 |      0 |      2 |     33 |      0 |      0 |      0 |      2 |      3 |      3 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5291100 |     360 |    158 |    120 |     4 |    0 |     8 |    2 |    1 |     1 |    0 |     66 |    0 |    0 |    0 |    0 |    182 |    178 |      70 |      29 |      20 |       3 |      1 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        9 |        8 |       17 |       19 |       11 |       1 |        8 |        4 |       17 |       24 |       21 |       14 |       1 |        7 |        7 |       13 |       14 |       18 |       10 |       0 |        4 |       12 |        5 |       11 |        9 |        9 |       1 |        7 |        7 |        3 |        9 |        5 |        2 |       0 |        6 |        7 |        6 |        7 |        6 |        1 |       0 |        2 |        6 |        1 |        0 |        1 |        1 |       0 |        3 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      1 |     24 |     25 |     13 |      5 |      5 |     85 |      0 |      0 |      1 |     12 |     17 |      7 |      2 |      7 |     74 |      0 |      0 |      1 |     13 |      7 |      4 |      3 |      1 |     37 |      0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5292000 |     263 |    106 |    115 |     5 |    0 |     4 |    0 |    0 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |    110 |    153 |      34 |      20 |       4 |       1 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        4 |        5 |        6 |       10 |       16 |       4 |        2 |        3 |       12 |       13 |       11 |       13 |       7 |        4 |        3 |        9 |        5 |        7 |       13 |       5 |        8 |        4 |       11 |        7 |        5 |       24 |      10 |        2 |        2 |        4 |        1 |        4 |        2 |       2 |        0 |        2 |        1 |        4 |        2 |        5 |       2 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        1 |        1 |        1 |        0 |        2 |       1 |      0 |      1 |     15 |      9 |      6 |      5 |      2 |     68 |      0 |      0 |      0 |     12 |     10 |      5 |      2 |      3 |     83 |      0 |      0 |      0 |      8 |      2 |      0 |      1 |      0 |     22 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5293000 |     304 |    106 |    140 |     6 |    0 |     2 |    1 |    0 |     2 |    0 |     47 |    0 |    0 |    0 |    0 |    133 |    171 |      31 |      15 |      13 |       1 |      3 |     10 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      1 |      0 |        7 |        5 |        3 |        8 |        6 |        6 |       8 |        6 |        5 |        9 |       13 |        9 |       11 |      10 |        0 |        8 |       15 |       14 |        7 |       16 |       5 |        5 |        9 |       11 |        7 |       12 |       21 |      10 |        4 |        3 |        4 |        2 |        5 |        1 |       0 |        4 |        3 |       10 |        7 |        4 |        0 |       0 |        0 |        1 |        0 |        1 |        2 |        1 |       1 |        1 |        0 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |     14 |     13 |      7 |      4 |      1 |     67 |      0 |      0 |      0 |     16 |     18 |     10 |      5 |      4 |     87 |      0 |      0 |      0 |      3 |      4 |      2 |      3 |      2 |     33 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 5294000 |     395 |    148 |    177 |     6 |    0 |     7 |    1 |    2 |     2 |    0 |     52 |    0 |    0 |    0 |    0 |    183 |    212 |      49 |      22 |      12 |       6 |      5 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        5 |       10 |        7 |        9 |       16 |       5 |        4 |        8 |       15 |       21 |       16 |       14 |      16 |        5 |        4 |       17 |       21 |       12 |       21 |      10 |        8 |        5 |       16 |       15 |       11 |       20 |      12 |        5 |        4 |        6 |       10 |        2 |        1 |       0 |        3 |        3 |        5 |        9 |        1 |        3 |       0 |        1 |        4 |        0 |        2 |        1 |        3 |       0 |        1 |        4 |        1 |        0 |        1 |        0 |       0 |      0 |      1 |     17 |     19 |     11 |      7 |      4 |     89 |      0 |      0 |      1 |     24 |     38 |      8 |      4 |      5 |     97 |      0 |      0 |      0 |      8 |      9 |      5 |      4 |      1 |     25 |      0 |      0 |      0 |      1 |      9 |      1 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 5295000 |     381 |    185 |    108 |     9 |    0 |     6 |    2 |    2 |     2 |    0 |     67 |    0 |    0 |    0 |    0 |    178 |    203 |     100 |      30 |      27 |       6 |      3 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      4 |      1 |      0 |      0 |        7 |       16 |       15 |       15 |       12 |        7 |       9 |       12 |       14 |       14 |       25 |       11 |       17 |      11 |        2 |       10 |        7 |       12 |        7 |        7 |       6 |        4 |        7 |        6 |       14 |        5 |       15 |       6 |        8 |       10 |        6 |        4 |        2 |        3 |       3 |       10 |        3 |        9 |        5 |        1 |        2 |       1 |        1 |        3 |        3 |        0 |        1 |        2 |       0 |        1 |        2 |        2 |        2 |        1 |        3 |       0 |      0 |      2 |     28 |     17 |      5 |      5 |      3 |    125 |      0 |      0 |      0 |     18 |     13 |      1 |      4 |      3 |     69 |      0 |      0 |      3 |     12 |      8 |      0 |      1 |      0 |     43 |      0 |      0 |      1 |      2 |      6 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5295100 |     287 |    135 |     86 |     3 |    0 |     2 |    0 |    1 |     1 |    0 |     59 |    0 |    0 |    0 |    0 |    126 |    161 |      51 |      14 |      27 |       4 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |        5 |       11 |       12 |        8 |       13 |       6 |       10 |        8 |       11 |       13 |        6 |       19 |       6 |        3 |        5 |        6 |       11 |        5 |        6 |       5 |        5 |        6 |        8 |        4 |        4 |       13 |       5 |        7 |        4 |        2 |        6 |        0 |        1 |       1 |       10 |        8 |        5 |        6 |        7 |        2 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |     19 |     15 |      4 |      4 |      5 |     88 |      0 |      0 |      0 |      4 |      9 |      4 |      6 |      1 |     62 |      0 |      0 |      0 |      8 |      8 |      0 |      1 |      1 |     41 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5295200 |     159 |     66 |     47 |     8 |    0 |     3 |    0 |    3 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |     75 |     84 |      47 |      24 |      16 |      10 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        7 |       11 |        3 |        5 |        0 |        4 |       0 |        6 |        8 |        7 |        9 |        3 |        3 |       0 |        1 |       12 |        5 |        5 |        1 |        2 |       1 |        3 |        7 |        4 |        2 |        3 |        1 |       0 |        0 |        5 |        4 |        4 |        0 |        0 |       0 |        5 |        7 |        5 |        2 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        1 |        1 |       0 |        0 |        5 |        2 |        0 |        0 |        2 |       0 |      0 |      0 |     21 |      5 |      4 |      2 |      0 |     34 |      0 |      0 |      0 |      4 |      1 |      2 |      1 |      0 |     39 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |     24 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5296000 |     331 |    155 |    112 |     4 |    0 |     2 |    0 |    4 |     2 |    0 |     52 |    0 |    0 |    0 |    0 |    146 |    185 |      71 |      33 |      17 |       6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      1 |      0 |        4 |       10 |       10 |       14 |        3 |       15 |      10 |        4 |       13 |       14 |       17 |        9 |       18 |      14 |        6 |        3 |       12 |       11 |        4 |       11 |       2 |        4 |       10 |       13 |        8 |        9 |       13 |       6 |        6 |        5 |        3 |        4 |        1 |        4 |       1 |        6 |       11 |        0 |        3 |        3 |        3 |       2 |        1 |        2 |        1 |        1 |        1 |        1 |       0 |        1 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      1 |     21 |     18 |      5 |      2 |      3 |    105 |      0 |      0 |      0 |     18 |      9 |      4 |      1 |      2 |     78 |      0 |      0 |      1 |      6 |      4 |      3 |      1 |      0 |     37 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5297000 |     410 |    168 |    145 |    13 |    0 |     3 |    3 |    3 |     3 |    0 |     72 |    0 |    0 |    0 |    0 |    187 |    223 |     112 |      57 |      37 |       6 |      2 |      4 |      2 |      2 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |       18 |       23 |        4 |       12 |       10 |       1 |       11 |       17 |       18 |       17 |        9 |       18 |       3 |        9 |       11 |       14 |       16 |        6 |        6 |       1 |       14 |       16 |       20 |       11 |        8 |        9 |       4 |        6 |       10 |        7 |        5 |        4 |        0 |       0 |        8 |       10 |        7 |       11 |        3 |        1 |       0 |        6 |        3 |        3 |        3 |        0 |        2 |       0 |        2 |        2 |        1 |        1 |        0 |        2 |       0 |      0 |      0 |     21 |     22 |      5 |      2 |      3 |    115 |      0 |      0 |      1 |     27 |     20 |      3 |      3 |      2 |     89 |      0 |      0 |      0 |     10 |      8 |      4 |      0 |      0 |     50 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 5298000 |     422 |    243 |    103 |    10 |    0 |     4 |    4 |    5 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |    203 |    219 |     161 |      36 |      32 |       9 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      1 |      0 |      0 |       14 |       14 |       18 |       15 |       15 |       22 |       9 |       12 |       20 |       31 |       29 |       15 |       25 |       4 |        4 |        8 |       14 |       14 |        5 |       11 |       1 |        4 |        9 |       13 |        7 |        6 |        7 |       0 |        4 |        7 |        7 |        5 |        3 |        2 |       0 |        1 |        8 |        3 |        5 |        4 |        2 |       0 |        1 |        1 |        3 |        2 |        4 |        0 |       0 |        3 |        5 |        1 |        2 |        1 |        2 |       0 |      0 |      3 |     38 |     24 |      9 |      1 |      9 |    159 |      0 |      0 |      0 |     19 |      8 |      3 |      4 |      4 |     65 |      0 |      0 |      0 |     10 |      3 |      2 |      1 |      0 |     35 |      0 |      0 |      1 |      4 |      4 |      0 |      2 |      1 |     13 |      0 |     37 | s03      | R    |
| 5298100 |     528 |    244 |    187 |     7 |    0 |     8 |    3 |    4 |     2 |    0 |     73 |    0 |    0 |    0 |    0 |    231 |    297 |     129 |      66 |      26 |      14 |      7 |      8 |      5 |      1 |      0 |      0 |      1 |      0 |      0 |      5 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      1 |      3 |      0 |        8 |       18 |       18 |       20 |       12 |       15 |       9 |       14 |       30 |       29 |       20 |       24 |       17 |      10 |        9 |       17 |       16 |       15 |        9 |       13 |       7 |        9 |       19 |       16 |       15 |        8 |       21 |      13 |        7 |        8 |        8 |        4 |        4 |        1 |       2 |       12 |        8 |        7 |        6 |        4 |        2 |       0 |        3 |        5 |        0 |        2 |        0 |        1 |       0 |        2 |        5 |        3 |        2 |        0 |        1 |       0 |      0 |      2 |     31 |     29 |      7 |      4 |      5 |    166 |      0 |      0 |      0 |     28 |     14 |     10 |      7 |      3 |    125 |      0 |      0 |      1 |      9 |      4 |      2 |      1 |      2 |     54 |      0 |      0 |      0 |      6 |      6 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5299000 |     254 |    136 |     68 |     3 |    0 |     7 |    0 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |    116 |    138 |      94 |      28 |      17 |       3 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      3 |      0 |        4 |       12 |        8 |        8 |       11 |       15 |       2 |        7 |       11 |       14 |       10 |       16 |       14 |       4 |        4 |        4 |        6 |        9 |        3 |        8 |       0 |        1 |        6 |        7 |        8 |        6 |        6 |       0 |        2 |        5 |        3 |        3 |        4 |        2 |       1 |        1 |        7 |        5 |        3 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        2 |        1 |        2 |        2 |        0 |        2 |       0 |      0 |      1 |     28 |     15 |      3 |      2 |      3 |     84 |      0 |      0 |      2 |     10 |      7 |      1 |      0 |      0 |     48 |      0 |      0 |      1 |      7 |      3 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5300000 |     171 |     67 |     72 |     7 |    0 |     0 |    1 |    1 |     2 |    0 |     21 |    0 |    0 |    0 |    0 |     77 |     94 |      19 |      11 |       6 |       2 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        2 |        4 |        4 |        3 |        7 |       7 |        2 |        0 |       11 |        6 |        5 |        5 |       9 |        2 |        6 |        5 |        4 |        4 |        8 |       6 |        5 |        2 |        2 |        6 |        2 |       12 |       8 |        1 |        1 |        3 |        0 |        0 |        0 |       1 |        0 |        2 |        3 |        3 |        0 |        4 |       3 |        3 |        1 |        2 |        1 |        0 |        0 |       0 |        1 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      6 |      5 |      2 |      0 |     53 |      0 |      0 |      0 |      9 |      2 |      2 |      4 |      4 |     51 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |     14 |      0 |      0 |      0 |      1 |      6 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5301000 |     246 |     97 |     92 |     7 |    0 |     6 |    0 |    3 |     2 |    0 |     39 |    0 |    0 |    0 |    0 |    104 |    142 |      36 |      16 |      10 |       6 |      3 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        4 |        6 |        5 |        3 |       12 |       6 |        3 |        2 |        9 |       10 |        9 |       20 |       5 |        3 |        3 |       12 |        8 |        3 |       13 |       2 |        0 |        4 |        6 |        8 |        4 |       19 |       7 |        2 |        1 |        3 |        3 |        1 |        4 |       0 |        6 |        3 |        3 |        5 |        3 |        5 |       0 |        1 |        3 |        1 |        0 |        1 |        1 |       0 |        2 |        1 |        2 |        1 |        0 |        5 |       0 |      0 |      0 |     13 |     16 |      8 |      2 |      2 |     56 |      0 |      0 |      0 |     11 |     11 |      6 |      2 |      2 |     60 |      0 |      0 |      0 |      2 |      6 |      6 |      1 |      1 |     23 |      0 |      0 |      0 |      1 |      8 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5301100 |      45 |     22 |     16 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      5 |    0 |    0 |    0 |    0 |     25 |     20 |      11 |       6 |       2 |       1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        5 |        0 |        1 |        3 |       1 |        0 |        3 |        1 |        3 |        1 |        1 |       1 |        1 |        0 |        2 |        3 |        0 |        2 |       0 |        0 |        1 |        3 |        3 |        0 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      1 |      6 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      2 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5302000 |     364 |    152 |    148 |     9 |    0 |     4 |    3 |    1 |     2 |    0 |     45 |    0 |    0 |    0 |    0 |    162 |    202 |      45 |      27 |      17 |       2 |      4 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      1 |      1 |      0 |        7 |        5 |        9 |       15 |        8 |       13 |       9 |        3 |       19 |       10 |       15 |       15 |       14 |      10 |        3 |        9 |       15 |       11 |        9 |       13 |       8 |        8 |       11 |       12 |        9 |       11 |       14 |      15 |        6 |        1 |        4 |        2 |        2 |        4 |       1 |        7 |        4 |        5 |        3 |        0 |        3 |       3 |        2 |        1 |        1 |        2 |        2 |        0 |       0 |        1 |        4 |        1 |        2 |        2 |        1 |       0 |      0 |      0 |     22 |     24 |      5 |      3 |      3 |     95 |      0 |      0 |      0 |     15 |     17 |     11 |      7 |      1 |     97 |      0 |      0 |      0 |      4 |      3 |      3 |      1 |      1 |     33 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5303000 |     465 |    211 |    160 |     8 |    0 |     4 |    4 |    2 |     0 |    0 |     76 |    0 |    0 |    0 |    0 |    208 |    257 |      80 |      36 |      29 |       5 |      7 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |       2 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        3 |       11 |       11 |       19 |       11 |       19 |       9 |       14 |       22 |       16 |       20 |       17 |       22 |      17 |        4 |        8 |       17 |       21 |        6 |       16 |       6 |        6 |        9 |       13 |       16 |        5 |       17 |      16 |       12 |        3 |       12 |        8 |        1 |        4 |       1 |       10 |        8 |        5 |        7 |        5 |        0 |       0 |        0 |        3 |        1 |        1 |        0 |        1 |       0 |        5 |        1 |        3 |        0 |        0 |        3 |       0 |      0 |      1 |     31 |     29 |     12 |      5 |      7 |    126 |      0 |      0 |      0 |     15 |     19 |     11 |      4 |      6 |    105 |      0 |      0 |      0 |      7 |     13 |      3 |      0 |      4 |     49 |      0 |      0 |      0 |      1 |      5 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5304000 |     233 |     89 |     93 |     3 |    0 |     2 |    0 |    2 |     0 |    0 |     44 |    0 |    0 |    0 |    0 |    107 |    126 |      26 |      10 |      20 |       1 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        7 |        8 |        4 |        6 |       6 |        5 |        5 |       12 |        7 |        6 |       13 |       5 |        6 |        4 |        8 |       10 |        3 |        3 |       9 |        5 |        3 |        8 |       13 |        7 |        6 |       8 |        5 |        3 |        5 |        7 |        1 |        2 |       1 |        4 |        4 |        5 |        4 |        2 |        1 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      4 |      9 |      5 |      2 |      4 |     64 |      0 |      0 |      0 |     12 |     18 |      4 |      4 |      2 |     53 |      0 |      0 |      0 |      5 |      2 |      4 |      0 |      2 |     31 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5304100 |     232 |     98 |     90 |     4 |    0 |     7 |    0 |    2 |     0 |    0 |     31 |    0 |    0 |    0 |    0 |    101 |    131 |      47 |      13 |      10 |       7 |      5 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        2 |        6 |        4 |        5 |        9 |       6 |        2 |        6 |       17 |       13 |        5 |        9 |      10 |        1 |        1 |       13 |        7 |        7 |        4 |       9 |        3 |        3 |       14 |        6 |        4 |        7 |      11 |        6 |        1 |        7 |        0 |        0 |        2 |       0 |        3 |        3 |        5 |        1 |        1 |        1 |       1 |        1 |        2 |        2 |        0 |        1 |        1 |       0 |        1 |        2 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |     10 |     15 |      5 |      5 |      4 |     59 |      0 |      0 |      0 |      9 |      9 |      2 |      2 |      0 |     68 |      0 |      0 |      1 |      7 |      4 |      1 |      1 |      0 |     17 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5305000 |     271 |    102 |    110 |     9 |    0 |     2 |    4 |    2 |     1 |    0 |     41 |    0 |    0 |    0 |    0 |    122 |    149 |      33 |      20 |       8 |       7 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |      0 |       0 |       2 |       0 |       0 |      0 |      1 |      2 |      0 |        4 |        2 |        7 |        4 |        6 |        8 |       1 |        6 |        7 |       11 |       16 |       10 |       12 |       8 |        5 |       13 |       10 |        6 |        8 |       14 |       4 |        2 |        6 |       10 |        6 |        9 |       11 |       6 |        2 |        5 |        4 |        5 |        3 |        3 |       0 |        2 |        6 |        4 |        4 |        2 |        1 |       0 |        1 |        4 |        0 |        2 |        1 |        0 |       0 |        2 |        2 |        1 |        2 |        2 |        1 |       0 |      0 |      0 |     13 |     13 |      3 |      3 |      3 |     67 |      0 |      0 |      0 |     15 |     14 |      5 |      2 |      6 |     68 |      0 |      0 |      0 |      7 |      9 |      0 |      2 |      3 |     20 |      0 |      0 |      1 |      1 |      8 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5305100 |     316 |    111 |    130 |     3 |    0 |     2 |    1 |    2 |     1 |    0 |     66 |    0 |    0 |    0 |    0 |    135 |    181 |      33 |      26 |      12 |       3 |      2 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        9 |        9 |        4 |        7 |       2 |        7 |       11 |       12 |       16 |        9 |       10 |      10 |        5 |       10 |       17 |       14 |        8 |       10 |       2 |        6 |        5 |       18 |        8 |       10 |       12 |       5 |        7 |        3 |       13 |        4 |        3 |        1 |       0 |        6 |        9 |        3 |        7 |        4 |        6 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        4 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     20 |     15 |      8 |      2 |      4 |     62 |      0 |      0 |      2 |     11 |     19 |      4 |      3 |      6 |     85 |      0 |      0 |      0 |      7 |     10 |      2 |      0 |      1 |     46 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5306000 |     387 |    143 |    158 |     8 |    0 |     7 |    1 |    4 |     0 |    0 |     66 |    0 |    0 |    0 |    0 |    180 |    207 |      82 |      37 |      24 |       6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        6 |        4 |       16 |       11 |        7 |       15 |       7 |        7 |       11 |       13 |       18 |        8 |       10 |      10 |        8 |       12 |       13 |       16 |        6 |       12 |       6 |        7 |        9 |       23 |       16 |        6 |       18 |       6 |        8 |        4 |        6 |        6 |        3 |        4 |       1 |        5 |        9 |        5 |        6 |        4 |        5 |       0 |        0 |        4 |        2 |        1 |        1 |        1 |       0 |        0 |        3 |        4 |        2 |        0 |        2 |       0 |      0 |      0 |     21 |     27 |      5 |      0 |      2 |     88 |      0 |      0 |      0 |     23 |     19 |     11 |      7 |      9 |     89 |      0 |      0 |      0 |      7 |      7 |      3 |      1 |      3 |     45 |      0 |      0 |      0 |      5 |      5 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5307000 |     211 |     95 |     74 |     5 |    0 |     1 |    0 |    3 |     2 |    0 |     31 |    0 |    0 |    0 |    0 |     94 |    117 |      40 |      16 |       9 |       3 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      2 |      1 |        2 |        1 |        7 |        8 |        6 |        7 |       9 |        5 |        8 |       12 |        9 |        3 |       12 |       6 |        2 |        7 |        9 |        6 |        3 |        2 |       5 |        2 |        5 |       10 |        8 |        3 |        9 |       3 |        4 |        3 |        2 |        4 |        2 |        0 |       2 |        6 |        1 |        3 |        3 |        0 |        0 |       1 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        3 |        2 |        0 |        1 |        1 |        1 |       0 |      0 |      1 |     11 |     14 |      4 |      6 |      2 |     57 |      0 |      0 |      1 |     12 |     12 |      2 |      4 |      5 |     38 |      0 |      0 |      1 |      3 |      5 |      1 |      1 |      0 |     20 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5307100 |     164 |     76 |     65 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     89 |     75 |      31 |       7 |       5 |       0 |      1 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      5 |      0 |      0 |        3 |        1 |        5 |        6 |       11 |        7 |       7 |        2 |        1 |        3 |        5 |       11 |       10 |       4 |        6 |        1 |       10 |        7 |        5 |        4 |       5 |        1 |        5 |        3 |        3 |        3 |        5 |       7 |        1 |        0 |        2 |        4 |        1 |        2 |       0 |        4 |        0 |        0 |        4 |        1 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      9 |      2 |      4 |      0 |     56 |      0 |      0 |      1 |      7 |      1 |      2 |      2 |      3 |     49 |      0 |      0 |      1 |      2 |      4 |      1 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5308000 |     424 |    192 |    137 |    15 |    0 |     4 |    1 |    5 |     3 |    0 |     67 |    0 |    0 |    0 |    0 |    190 |    234 |      98 |      34 |      24 |      11 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      6 |      1 |      2 |        4 |       12 |       10 |       13 |       15 |       14 |       8 |       10 |       11 |       23 |       28 |       10 |       20 |      14 |        7 |       11 |       19 |       12 |       10 |       10 |       3 |        3 |        6 |       18 |       14 |        4 |       17 |       3 |        8 |        2 |       11 |        5 |        1 |        1 |       1 |       11 |        9 |       11 |        3 |        1 |        2 |       1 |        3 |        2 |        3 |        1 |        3 |        1 |       0 |        0 |        5 |        3 |        3 |        1 |        3 |       0 |      0 |      0 |     34 |     28 |     13 |      1 |      2 |    114 |      0 |      0 |      0 |     19 |     23 |     11 |      6 |      6 |     72 |      0 |      0 |      1 |      9 |      6 |      1 |      0 |      1 |     49 |      0 |      0 |      1 |      8 |      7 |      4 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5309000 |     820 |    370 |    264 |    21 |    0 |    11 |    8 |   10 |     3 |    0 |    133 |    0 |    0 |    0 |    0 |    370 |    450 |     163 |      61 |      51 |      21 |      7 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      5 |      3 |      1 |       14 |       20 |       31 |       32 |       16 |       27 |      12 |       16 |       30 |       53 |       39 |       18 |       42 |      20 |       15 |       21 |       17 |       27 |       17 |       21 |      12 |        9 |       16 |       22 |       26 |       17 |       31 |      13 |       11 |       14 |       21 |        4 |        4 |        9 |       0 |       15 |       16 |       14 |       11 |        7 |        4 |       3 |        5 |        7 |        4 |        6 |        2 |        1 |       0 |        2 |        7 |        7 |        7 |        4 |        1 |       0 |      0 |      3 |     50 |     72 |     14 |      6 |      7 |    218 |      0 |      0 |      1 |     28 |     44 |     22 |      5 |     13 |    151 |      0 |      0 |      2 |     19 |     15 |      5 |      1 |      2 |     89 |      0 |      0 |      1 |      8 |     15 |      0 |      2 |      1 |     26 |      0 |     37 | s03      | R    |
| 5310000 |     556 |    269 |    171 |     9 |    0 |     7 |    5 |    8 |     1 |    0 |     86 |    0 |    0 |    0 |    0 |    258 |    298 |     164 |      64 |      40 |      17 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |     10 |      5 |      1 |        8 |       13 |       23 |       29 |       11 |       22 |      18 |       14 |       22 |       22 |       35 |       21 |       20 |      11 |        8 |       15 |       17 |       19 |        7 |       10 |       4 |       12 |       15 |       20 |       11 |       12 |       13 |       8 |        7 |        4 |        3 |       15 |        7 |        6 |       0 |       10 |       11 |        4 |        7 |        5 |        6 |       1 |        1 |        3 |        4 |        1 |        3 |        0 |       0 |        7 |        3 |        4 |        1 |        2 |        1 |       0 |      0 |      1 |     28 |     41 |     21 |     11 |     12 |    155 |      0 |      0 |      1 |     22 |     30 |      7 |      5 |      7 |     99 |      0 |      0 |      0 |     13 |      9 |      3 |      2 |      2 |     57 |      0 |      0 |      0 |      3 |     12 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5310900 |     101 |     43 |     40 |     0 |    0 |     0 |    2 |    1 |     2 |    0 |     13 |    0 |    0 |    0 |    0 |     48 |     53 |      22 |      15 |       6 |       3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      2 |      0 |        3 |        2 |        2 |        3 |        1 |        6 |       2 |        1 |        2 |        7 |        3 |        1 |        5 |       5 |        0 |        2 |        7 |        5 |        3 |        1 |       2 |        3 |        2 |        7 |        2 |        2 |        3 |       1 |        0 |        2 |        1 |        2 |        0 |        1 |       0 |        1 |        0 |        3 |        1 |        1 |        1 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      2 |      7 |      2 |      0 |      3 |     28 |      0 |      0 |      0 |      3 |     10 |      1 |      4 |      1 |     21 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5311000 |     432 |    199 |    141 |    10 |    0 |     2 |    3 |    4 |     3 |    0 |     70 |    0 |    0 |    0 |    0 |    202 |    230 |     101 |      47 |      34 |      11 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       0 |      8 |      6 |      3 |      0 |        4 |        9 |       12 |       22 |        7 |       21 |       9 |       13 |       17 |       23 |       25 |       10 |       12 |      15 |        5 |       14 |       19 |       14 |        6 |       11 |       2 |        3 |       11 |       15 |       14 |        7 |       17 |       3 |        7 |        5 |       13 |        3 |        4 |        2 |       1 |       10 |        7 |        6 |        6 |        4 |        2 |       0 |        6 |        4 |        2 |        0 |        0 |        0 |       0 |        3 |        1 |        3 |        3 |        0 |        0 |       0 |      0 |      3 |     23 |     24 |     10 |      3 |      8 |    128 |      0 |      0 |      2 |     19 |     19 |      5 |      8 |      8 |     80 |      0 |      0 |      0 |     12 |      8 |      0 |      1 |      2 |     47 |      0 |      0 |      2 |      4 |      3 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 5311100 |      43 |     14 |     24 |     1 |    0 |     0 |    1 |    1 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     22 |     21 |       5 |       2 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        0 |        0 |        2 |       2 |        0 |        2 |        3 |        2 |        1 |        0 |       0 |        0 |        1 |        3 |        2 |        5 |        3 |       0 |        0 |        0 |        1 |        2 |        1 |        2 |       4 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |      0 |      1 |      1 |      2 |      2 |      8 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |     19 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5311200 |     179 |     67 |     77 |     6 |    0 |     4 |    0 |    0 |     3 |    0 |     22 |    0 |    0 |    0 |    0 |     92 |     87 |      36 |      13 |       9 |       3 |      0 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      5 |      0 |      0 |        4 |        3 |        4 |       12 |        3 |        3 |       2 |        4 |        1 |        9 |        8 |        6 |        5 |       3 |        3 |        3 |        4 |        6 |        6 |        8 |       8 |        2 |        5 |        9 |        8 |        3 |        5 |       7 |        7 |        4 |        0 |        1 |        0 |        1 |       0 |        5 |        0 |        2 |        1 |        0 |        1 |       0 |        2 |        3 |        1 |        2 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     10 |      9 |      6 |      1 |      1 |     40 |      0 |      0 |      0 |     11 |     15 |      2 |      0 |      3 |     46 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |      3 |      4 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5312000 |     402 |    162 |    161 |     9 |    0 |     4 |    1 |    4 |     1 |    0 |     60 |    0 |    0 |    0 |    0 |    184 |    218 |      57 |      38 |      27 |       4 |      3 |      9 |      4 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |       0 |       2 |       2 |       0 |      2 |      0 |      1 |      0 |        4 |        2 |       11 |       10 |        5 |       18 |      15 |        6 |        9 |       21 |       15 |       11 |       19 |      16 |        5 |       11 |       13 |       15 |       10 |       19 |       8 |        6 |       11 |       13 |       15 |       12 |       14 |       9 |        3 |        6 |        4 |        6 |        4 |        3 |       2 |        5 |        6 |        6 |        7 |        2 |        4 |       2 |        1 |        5 |        2 |        0 |        1 |        0 |       1 |        2 |        3 |        1 |        2 |        1 |        0 |       0 |      0 |      1 |     22 |     21 |      7 |      3 |      6 |    102 |      0 |      0 |      0 |     15 |     30 |      8 |      3 |     10 |     95 |      0 |      0 |      0 |      8 |     10 |      6 |      0 |      0 |     36 |      0 |      0 |      0 |      2 |      6 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5313000 |     443 |    191 |    141 |    13 |    0 |     4 |    0 |    3 |     3 |    0 |     88 |    0 |    0 |    0 |    0 |    205 |    238 |      96 |      56 |      47 |      12 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |       0 |       2 |       0 |       0 |      6 |      6 |      5 |      1 |        8 |        7 |       12 |       12 |       12 |       17 |      13 |        9 |       12 |       12 |       17 |       19 |       30 |      11 |        6 |        9 |       23 |       14 |       10 |       11 |       3 |        5 |       14 |       13 |       11 |       10 |        9 |       3 |        8 |       12 |        4 |        4 |        4 |        4 |       1 |       13 |       11 |       13 |        5 |        8 |        1 |       0 |        2 |        2 |        4 |        2 |        1 |        0 |       0 |        3 |        3 |        3 |        2 |        1 |        0 |       0 |      0 |      0 |     31 |     28 |      6 |      6 |      5 |    115 |      0 |      0 |      0 |     25 |     17 |      7 |      1 |      4 |     87 |      0 |      0 |      1 |     14 |     10 |      0 |      2 |      1 |     60 |      0 |      0 |      0 |      2 |      6 |      2 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5313100 |     232 |    129 |     65 |     2 |    0 |     2 |    0 |    5 |     2 |    0 |     27 |    0 |    0 |    0 |    0 |    109 |    123 |     100 |      35 |      16 |       5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        9 |        4 |       15 |        9 |        6 |        7 |       6 |        6 |       11 |       14 |       14 |        9 |       15 |       4 |        6 |        6 |        7 |        9 |        4 |        0 |       2 |        1 |        4 |       11 |        5 |        4 |        3 |       3 |        3 |        3 |        2 |        0 |        1 |        6 |       0 |        5 |        3 |        2 |        2 |        0 |        0 |       0 |        3 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        2 |        3 |        0 |        0 |        0 |       1 |      0 |      0 |     19 |     22 |      4 |      2 |      3 |     79 |      0 |      0 |      1 |     11 |      7 |      5 |      3 |      5 |     33 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5313900 |     284 |    128 |     91 |     4 |    0 |     2 |    4 |    7 |     0 |    0 |     48 |    0 |    0 |    0 |    0 |    124 |    160 |      85 |      33 |      24 |       9 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      5 |      0 |      0 |        6 |        5 |        3 |       12 |        6 |       15 |       5 |        7 |        9 |        7 |       19 |       17 |       12 |       5 |        4 |       10 |        9 |       12 |        6 |        5 |       4 |        5 |       10 |        4 |        5 |        9 |        6 |       2 |        4 |        3 |        2 |        5 |        2 |        2 |       0 |       11 |        3 |        3 |        5 |        4 |        4 |       0 |        0 |        1 |        0 |        0 |        2 |        1 |       0 |        5 |        6 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     20 |     19 |     10 |      2 |      5 |     72 |      0 |      0 |      1 |     10 |     19 |      2 |      3 |      7 |     49 |      0 |      0 |      1 |      6 |      2 |      7 |      2 |      2 |     28 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5314000 |     429 |    197 |    133 |    10 |    0 |     9 |    0 |    3 |     3 |    0 |     74 |    0 |    0 |    0 |    0 |    208 |    221 |     113 |      60 |      35 |      10 |      1 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      4 |     10 |      6 |      0 |        8 |       15 |       20 |       14 |        8 |       16 |       4 |       16 |       25 |       17 |       19 |        8 |       24 |       3 |        6 |       16 |       14 |       17 |        6 |       10 |       2 |        7 |       18 |        9 |        9 |        8 |       11 |       0 |        5 |        8 |       11 |        5 |        5 |        5 |       0 |       11 |       12 |        4 |        3 |        3 |        2 |       0 |        5 |        3 |        1 |        2 |        1 |        1 |       0 |        3 |        1 |        2 |        2 |        2 |        2 |       0 |      0 |      2 |     35 |     20 |      5 |      1 |      4 |    130 |      0 |      0 |      2 |     29 |     15 |      2 |      1 |      3 |     81 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     65 |      0 |      0 |      1 |      2 |      6 |      4 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5314100 |     387 |    187 |    112 |     7 |    0 |     6 |    2 |    8 |     2 |    0 |     63 |    0 |    0 |    0 |    0 |    169 |    218 |     130 |      59 |      32 |      10 |      0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      4 |      4 |      3 |      0 |       14 |       10 |       19 |       10 |       10 |        9 |       1 |       22 |       18 |       26 |       20 |       21 |        6 |       1 |        4 |       15 |       14 |        9 |        3 |        6 |       0 |       14 |       14 |       12 |        8 |        5 |        6 |       2 |        8 |        5 |        7 |       10 |        4 |        1 |       0 |       10 |        6 |        5 |        3 |        3 |        1 |       0 |        6 |        2 |        1 |        0 |        1 |        0 |       0 |        3 |        6 |        4 |        2 |        0 |        0 |       0 |      0 |      1 |     28 |     28 |      9 |      5 |      3 |    113 |      0 |      0 |      1 |     18 |     12 |      2 |      0 |      2 |     77 |      0 |      0 |      0 |      6 |      6 |      2 |      1 |      2 |     46 |      0 |      0 |      1 |      5 |      5 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5315000 |     305 |    170 |     87 |     5 |    0 |     5 |    3 |    0 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |    132 |    173 |      55 |      23 |       8 |       2 |      8 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        3 |        2 |        2 |        9 |       47 |       6 |        0 |        3 |        4 |        2 |       15 |       67 |       9 |        0 |        2 |        6 |        3 |        3 |       30 |       2 |        0 |        1 |        1 |        3 |        5 |       30 |       1 |        1 |        0 |        0 |        0 |        2 |        7 |       0 |        1 |        1 |        0 |        1 |        4 |       18 |       0 |        0 |        0 |        1 |        0 |        2 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        6 |       0 |      0 |      1 |     19 |     25 |      4 |     12 |     10 |     99 |      0 |      0 |      1 |      8 |      9 |      2 |      5 |      6 |     56 |      0 |      0 |      0 |      9 |      2 |      4 |      0 |      0 |     20 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5315100 |     245 |    128 |     63 |     5 |    0 |     1 |    1 |    6 |     1 |    0 |     40 |    0 |    0 |    0 |    0 |    120 |    125 |      98 |      38 |      27 |      11 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      1 |      0 |      0 |        9 |       12 |       18 |        8 |        5 |        3 |       2 |       13 |       12 |       14 |       13 |       13 |        6 |       0 |        6 |       13 |        7 |        7 |        2 |        0 |       0 |       10 |        9 |        5 |        2 |        1 |        1 |       0 |        4 |        8 |        4 |        5 |        1 |        1 |       0 |        4 |        5 |        4 |        3 |        1 |        0 |       0 |        3 |        1 |        0 |        1 |        0 |        0 |       0 |        2 |        4 |        1 |        1 |        1 |        0 |       0 |      0 |      2 |     21 |     13 |      0 |      0 |      1 |     91 |      0 |      0 |      0 |     17 |      6 |      1 |      0 |      0 |     39 |      0 |      0 |      1 |      8 |      1 |      0 |      0 |      0 |     30 |      0 |      0 |      3 |      1 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5316000 |     501 |    283 |    124 |    11 |    0 |     5 |    0 |    6 |     1 |    0 |     71 |    0 |    0 |    0 |    0 |    238 |    263 |     167 |      47 |      33 |      14 |      4 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     14 |      7 |      1 |      0 |       13 |       18 |       18 |       28 |       17 |       23 |      12 |       13 |       25 |       20 |       37 |       16 |       21 |      22 |        6 |       12 |       20 |       11 |        5 |        8 |       6 |        6 |       10 |        8 |       14 |        7 |        8 |       3 |        4 |       12 |        4 |        5 |        4 |        1 |       0 |       11 |        6 |        5 |       11 |        6 |        2 |       0 |        3 |        4 |        1 |        2 |        0 |        1 |       0 |        3 |        4 |        1 |        4 |        0 |        0 |       0 |      0 |      2 |     40 |     44 |     18 |      6 |      8 |    165 |      0 |      0 |      1 |     15 |     17 |      6 |      3 |      6 |     76 |      0 |      0 |      1 |     14 |     10 |      3 |      2 |      1 |     40 |      0 |      0 |      0 |      8 |      3 |      0 |      0 |      2 |     10 |      0 |     37 | s03      | R    |
| 5316100 |     162 |     81 |     48 |     2 |    0 |     1 |    0 |    1 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     69 |     93 |      45 |      19 |      14 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      3 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        8 |        3 |        2 |       11 |        3 |        2 |       2 |        9 |        6 |        6 |       13 |        6 |        5 |       5 |        4 |        1 |        7 |        4 |        1 |        4 |       1 |        4 |        3 |        7 |        4 |        0 |        6 |       2 |        3 |        2 |        2 |        5 |        0 |        0 |       1 |        3 |        3 |        4 |        1 |        3 |        1 |       1 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     18 |     14 |      1 |      2 |      1 |     44 |      0 |      0 |      0 |      7 |      5 |      3 |      1 |      0 |     32 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5317000 |     427 |    198 |    151 |     5 |    0 |     9 |    2 |    1 |     3 |    0 |     58 |    0 |    0 |    0 |    0 |    196 |    231 |     106 |      46 |      32 |       7 |      4 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      9 |      2 |      1 |      0 |        9 |        5 |       14 |       14 |        7 |       19 |       8 |       10 |       17 |       25 |       28 |       16 |       16 |      10 |        7 |       12 |       22 |       17 |        9 |        7 |       3 |        2 |        8 |       17 |       16 |       10 |       18 |       3 |        8 |        4 |        7 |        3 |        4 |        5 |       0 |        6 |        5 |        5 |        6 |        4 |        1 |       0 |        2 |        0 |        2 |        3 |        3 |        2 |       0 |        1 |        1 |        2 |        1 |        1 |        1 |       1 |      0 |      0 |     28 |     36 |     10 |      5 |      7 |    112 |      0 |      0 |      1 |     20 |     23 |      9 |      0 |      9 |     89 |      0 |      0 |      0 |      8 |      8 |      1 |      0 |      4 |     37 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5317100 |     271 |    116 |     79 |     7 |    0 |     2 |    1 |    2 |     3 |    0 |     61 |    0 |    0 |    0 |    0 |    132 |    139 |      73 |      40 |      35 |       4 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      3 |      0 |      0 |        2 |       13 |        5 |       11 |       11 |        6 |       3 |        2 |       20 |       21 |        7 |        9 |        5 |       1 |        4 |        9 |        9 |        8 |        3 |        3 |       3 |        5 |       13 |        6 |        5 |        6 |        4 |       1 |        9 |        6 |        9 |        7 |        4 |        1 |       0 |        8 |        4 |        5 |        5 |        2 |        1 |       0 |        1 |        1 |        1 |        0 |        1 |        2 |       0 |        0 |        6 |        0 |        1 |        0 |        2 |       0 |      0 |      1 |     13 |     15 |      7 |      3 |      1 |     76 |      0 |      0 |      1 |      4 |     11 |      4 |      2 |      5 |     52 |      0 |      0 |      0 |     12 |      8 |      2 |      0 |      0 |     39 |      0 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5318000 |     293 |    116 |    102 |    10 |    0 |     8 |    4 |    2 |     2 |    0 |     49 |    0 |    0 |    0 |    0 |    144 |    149 |      61 |      22 |      19 |       8 |      0 |      9 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      1 |      0 |       10 |        3 |        5 |       14 |        7 |        9 |       4 |        1 |        7 |       13 |       15 |       13 |        8 |       7 |        5 |        3 |       16 |       13 |        4 |        9 |       1 |        4 |        7 |       13 |        8 |        7 |        7 |       5 |        2 |        6 |        7 |        5 |        3 |        1 |       0 |        6 |        7 |        4 |        2 |        2 |        4 |       0 |        3 |        4 |        4 |        2 |        3 |        0 |       1 |        2 |        4 |        0 |        1 |        1 |        1 |       0 |      0 |      2 |     14 |     21 |      4 |      1 |      4 |     70 |      0 |      0 |      0 |     10 |     24 |      3 |      0 |      4 |     61 |      0 |      0 |      1 |      9 |      8 |      2 |      2 |      2 |     25 |      0 |      0 |      0 |      5 |      6 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5318200 |     637 |    237 |    261 |     9 |    0 |     5 |    0 |    2 |     2 |    0 |    121 |    0 |    0 |    0 |    0 |    307 |    330 |     113 |      99 |      51 |      12 |      0 |      3 |      1 |      0 |      1 |      0 |      2 |      0 |      2 |      1 |      0 |      0 |      3 |      3 |      1 |      0 |      3 |      0 |      3 |      0 |       3 |       2 |       2 |       0 |     16 |     24 |     12 |      1 |       10 |       31 |       23 |       21 |       13 |        3 |       0 |       21 |       39 |       30 |       28 |       10 |        8 |       0 |        8 |       27 |       53 |       34 |       13 |        6 |       0 |       17 |       27 |       36 |       24 |        7 |        8 |       1 |       12 |       14 |       13 |       10 |        5 |        1 |       0 |       13 |       24 |       14 |       11 |        4 |        0 |       0 |        1 |        7 |        1 |        0 |        1 |        0 |       0 |        2 |        1 |        1 |        2 |        1 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |    235 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    261 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    121 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 5318300 |     290 |    141 |     97 |     8 |    0 |     3 |    1 |    1 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |    149 |    141 |      63 |      39 |      21 |       7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      4 |      1 |      2 |      1 |        8 |       11 |        8 |       13 |        9 |       14 |       2 |        7 |        6 |       12 |       20 |       14 |       17 |       0 |        5 |        4 |       13 |       17 |        8 |        8 |       1 |        4 |        6 |        7 |       10 |        7 |        6 |       1 |        4 |        3 |        6 |        2 |        2 |        2 |       0 |        3 |        5 |        3 |        3 |        2 |        2 |       1 |        1 |        2 |        3 |        0 |        3 |        0 |       0 |        2 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     20 |     18 |      7 |      2 |      6 |     88 |      0 |      0 |      0 |     14 |     16 |      7 |      2 |      1 |     57 |      0 |      0 |      1 |      7 |      2 |      2 |      0 |      1 |     25 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5318400 |     746 |    290 |    272 |    19 |    0 |     8 |    3 |    3 |     3 |    0 |    148 |    0 |    0 |    0 |    0 |    414 |    332 |      99 |      53 |      36 |       5 |      5 |      5 |      3 |      1 |      0 |      1 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      2 |      2 |      0 |      1 |      0 |      2 |      0 |       0 |       1 |       1 |       0 |     11 |     10 |     17 |      1 |        9 |       18 |       25 |       14 |       13 |       76 |       0 |        2 |       33 |       25 |       15 |       10 |       50 |       0 |        5 |       23 |       27 |       20 |        9 |       79 |       1 |       10 |       29 |       23 |       14 |        8 |       24 |       0 |        7 |       19 |       11 |        3 |        6 |       25 |       0 |       10 |       18 |       16 |       14 |        6 |       13 |       0 |        2 |        3 |        3 |        3 |        2 |       11 |       0 |        2 |        1 |        0 |        1 |        1 |        7 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |    289 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |      0 |    265 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |    146 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     35 |      0 |     37 | s03      | R    |
| 5318500 |     674 |    245 |    256 |    11 |    0 |     2 |    1 |    4 |     2 |    0 |    153 |    0 |    0 |    0 |    0 |    318 |    356 |     112 |      71 |      63 |       4 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |       3 |       2 |       1 |       0 |     35 |     51 |     28 |      8 |       14 |       14 |       13 |       24 |       22 |       17 |       0 |       16 |       21 |       29 |       42 |       17 |       15 |       1 |        7 |       20 |       21 |       43 |       27 |       18 |       0 |        8 |       19 |       21 |       31 |       22 |       19 |       0 |       13 |       17 |       14 |       14 |        7 |        3 |       0 |       18 |       14 |       12 |       18 |       18 |        5 |       0 |        0 |        1 |        3 |        3 |        1 |        2 |       0 |        2 |        2 |        2 |        2 |        1 |        1 |       0 |      0 |      3 |     41 |     27 |     19 |     37 |      7 |    111 |      0 |      0 |      0 |     41 |     28 |     28 |     60 |     12 |     87 |      0 |      0 |      2 |     25 |     19 |     12 |     25 |      1 |     69 |      0 |      0 |      1 |      4 |      6 |      2 |      2 |      0 |      5 |      0 |     37 | s03      | R    |
| 5318600 |     435 |    196 |    145 |    12 |    0 |     3 |    3 |    1 |     0 |    0 |     75 |    0 |    0 |    0 |    0 |    214 |    221 |      86 |      40 |      26 |       3 |      0 |      5 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       6 |       0 |       2 |       2 |     15 |     18 |      3 |      3 |        6 |       11 |       34 |       18 |        9 |       14 |       0 |        7 |       23 |       29 |       19 |       13 |       13 |       0 |        2 |       11 |       28 |       19 |        6 |        3 |       0 |        4 |       13 |       24 |       18 |        7 |        9 |       1 |        6 |        5 |       13 |       14 |        4 |        1 |       0 |        4 |        5 |       11 |        6 |        3 |        3 |       0 |        3 |        2 |        3 |        2 |        0 |        0 |       0 |        2 |        2 |        1 |        3 |        0 |        1 |       0 |      0 |      4 |     18 |      3 |      0 |      0 |      0 |    171 |      0 |      0 |      2 |      9 |      5 |      2 |      0 |      1 |    126 |      0 |      0 |      1 |      7 |      1 |      1 |      0 |      0 |     65 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 5318700 |     626 |    232 |    230 |    14 |    0 |     5 |    2 |    1 |     0 |    0 |    142 |    0 |    0 |    0 |    0 |    292 |    334 |      84 |      62 |      46 |       8 |      4 |      3 |      3 |      0 |      1 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |       1 |       1 |       3 |       1 |     16 |     13 |     11 |      0 |       13 |       12 |       33 |       17 |        7 |        9 |       0 |        5 |       31 |       57 |       24 |       10 |       12 |       2 |        8 |       16 |       49 |       34 |       13 |        5 |       0 |        8 |       22 |       41 |       19 |        9 |        6 |       0 |       12 |       17 |       19 |       13 |        5 |        0 |       0 |       13 |       20 |       20 |       12 |        7 |        3 |       1 |        2 |        4 |        3 |        0 |        1 |        0 |       0 |        1 |        4 |        3 |        3 |        1 |        0 |       0 |      0 |      4 |     21 |      1 |      0 |      0 |      0 |    206 |      0 |      0 |      4 |     17 |      4 |      1 |      0 |      0 |    204 |      0 |      0 |      0 |      9 |      2 |      3 |      0 |      0 |    128 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 5318800 |     448 |    155 |    189 |     5 |    0 |     0 |    0 |    3 |     1 |    0 |     95 |    0 |    0 |    0 |    0 |    215 |    233 |      59 |      64 |      41 |       4 |      0 |      1 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       2 |       0 |     15 |     26 |     16 |      1 |        6 |       24 |       19 |       15 |        7 |        4 |       0 |        4 |       24 |       22 |       20 |        7 |        3 |       0 |       10 |       20 |       29 |       16 |        9 |        8 |       0 |        9 |       24 |       30 |       22 |        4 |        8 |       0 |        4 |       14 |       13 |        8 |        3 |        2 |       0 |       15 |       14 |       11 |        7 |        4 |        0 |       0 |        0 |        4 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    155 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    189 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     95 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5318900 |     860 |    293 |    337 |    17 |    0 |     3 |    5 |    3 |     4 |    0 |    198 |    0 |    0 |    0 |    0 |    406 |    454 |     126 |     116 |      71 |       7 |      7 |      5 |      2 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       5 |       1 |       0 |     30 |     32 |     16 |      4 |        8 |       35 |       46 |       19 |       10 |        4 |       0 |       16 |       51 |       58 |       27 |       10 |        9 |       0 |       12 |       38 |       60 |       34 |       15 |        4 |       0 |       11 |       64 |       50 |       29 |       15 |        5 |       0 |        8 |       28 |       38 |       20 |        6 |        2 |       0 |        7 |       36 |       35 |       14 |        3 |        1 |       0 |        2 |       10 |        4 |        2 |        0 |        1 |       0 |        2 |        4 |        5 |        0 |        1 |        1 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |    292 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    337 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    198 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 5319000 |     325 |    138 |    114 |     7 |    0 |     4 |    1 |    4 |     2 |    0 |     55 |    0 |    0 |    0 |    0 |    162 |    163 |      72 |      38 |      19 |       5 |      2 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      2 |      0 |        9 |        7 |        6 |       18 |        7 |       14 |       1 |        8 |       12 |       10 |       17 |       13 |       12 |       4 |        7 |        5 |       11 |       14 |        7 |       10 |       5 |        6 |        8 |        9 |       15 |        5 |        8 |       4 |        5 |        4 |        6 |        2 |        7 |        4 |       1 |        4 |        5 |        4 |        7 |        4 |        2 |       0 |        2 |        5 |        3 |        0 |        0 |        2 |       0 |        1 |        2 |        0 |        2 |        1 |        0 |       0 |      0 |      6 |     15 |     31 |      5 |      3 |      2 |     76 |      0 |      0 |      1 |     13 |     10 |      9 |      4 |      6 |     71 |      0 |      0 |      0 |      7 |      7 |      2 |      3 |      2 |     34 |      0 |      0 |      3 |      4 |      5 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5319100 |     237 |    107 |    100 |     3 |    0 |     0 |    1 |    0 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |    116 |    121 |      33 |      20 |       4 |       2 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        5 |        5 |       10 |        8 |       12 |       5 |        3 |       10 |        9 |       12 |       12 |        8 |       5 |        4 |        6 |       10 |       15 |        9 |        7 |       5 |        5 |        6 |       11 |        7 |        7 |        4 |       4 |        0 |        1 |        1 |        2 |        1 |        4 |       0 |        1 |        5 |        3 |        3 |        3 |        0 |       1 |        0 |        2 |        0 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |     18 |     12 |     10 |      3 |      4 |     60 |      0 |      0 |      0 |      9 |     15 |      8 |      6 |      6 |     56 |      0 |      0 |      0 |      4 |      4 |      0 |      0 |      1 |     16 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5319200 |     156 |     69 |     51 |     5 |    0 |     2 |    1 |    3 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     72 |     84 |      24 |      14 |      12 |       3 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |        2 |        1 |        7 |       10 |        3 |        7 |       4 |        4 |        3 |        4 |        6 |        4 |       11 |       3 |        1 |        2 |        6 |        6 |        5 |        1 |       2 |        5 |        2 |        3 |        5 |        7 |        3 |       3 |        1 |        0 |        4 |        4 |        2 |        1 |       1 |        2 |        4 |        2 |        1 |        1 |        0 |       2 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        2 |        2 |        3 |        2 |        0 |        0 |       0 |      0 |      1 |     11 |      5 |      5 |      2 |      0 |     45 |      0 |      0 |      0 |      7 |     11 |      1 |      0 |      2 |     30 |      0 |      0 |      0 |      5 |      1 |      0 |      1 |      0 |     18 |      0 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5319300 |      87 |     26 |     37 |     0 |    0 |     3 |    0 |    0 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     42 |     45 |      11 |       9 |       5 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      1 |      2 |      0 |        0 |        7 |        4 |        2 |        0 |        0 |       0 |        0 |        8 |        2 |        1 |        2 |        0 |       0 |        1 |        5 |        6 |        3 |        0 |        2 |       0 |        0 |        8 |        7 |        3 |        0 |        2 |       0 |        0 |        8 |        2 |        1 |        0 |        0 |       0 |        2 |        6 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5321000 |     242 |    105 |     97 |     6 |    0 |     0 |    0 |    0 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |    120 |    122 |      62 |      39 |      20 |       4 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      4 |      4 |      1 |        6 |        5 |        6 |        7 |        5 |       13 |      10 |        2 |       11 |        9 |        5 |        8 |       15 |       3 |        4 |        6 |       12 |        3 |        7 |       10 |       2 |        5 |        9 |        6 |       10 |        9 |        5 |       9 |        2 |        6 |        7 |        4 |        0 |        3 |       1 |        3 |        3 |        3 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     20 |     10 |      6 |      1 |      4 |     64 |      0 |      0 |      0 |     15 |     10 |      6 |      4 |      5 |     57 |      0 |      0 |      0 |      3 |      1 |      4 |      0 |      1 |     25 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5321100 |     342 |    158 |    100 |     7 |    0 |     4 |    2 |    6 |     2 |    0 |     63 |    0 |    0 |    0 |    0 |    179 |    163 |     108 |      49 |      36 |       9 |      2 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |       1 |       1 |       2 |       0 |      9 |      6 |      1 |      1 |        8 |       13 |       12 |        5 |       15 |       14 |       0 |       15 |       17 |       17 |       18 |       12 |       10 |       2 |        8 |       16 |        8 |       14 |        9 |        5 |       0 |        7 |        4 |        8 |       12 |        3 |        4 |       2 |        8 |       11 |        5 |        9 |        2 |        4 |       1 |        3 |        6 |        2 |        7 |        2 |        3 |       0 |        5 |        4 |        1 |        0 |        1 |        1 |       0 |        1 |        3 |        3 |        1 |        0 |        1 |       0 |      0 |      1 |     31 |     27 |      5 |      3 |      6 |     85 |      0 |      0 |      1 |     17 |     17 |      2 |      7 |      3 |     53 |      0 |      0 |      1 |      8 |     12 |      5 |      0 |      1 |     36 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5321200 |     327 |    131 |    119 |     4 |    0 |     6 |    0 |    0 |     4 |    0 |     63 |    0 |    0 |    0 |    0 |    163 |    164 |      76 |      44 |      28 |       6 |      1 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      9 |      4 |      0 |        4 |       12 |        8 |        9 |       10 |        9 |       5 |       14 |       13 |        8 |       18 |       11 |        9 |       1 |        5 |        9 |       15 |       12 |       11 |        8 |       5 |        7 |        8 |        7 |        9 |        9 |       10 |       4 |       10 |        4 |       11 |        5 |        1 |        2 |       0 |        7 |       11 |        2 |        4 |        4 |        2 |       0 |        1 |        4 |        0 |        1 |        1 |        1 |       0 |        1 |        0 |        2 |        1 |        2 |        0 |       0 |      0 |      5 |     18 |     15 |      9 |      4 |      3 |     77 |      0 |      0 |      0 |     21 |     17 |      6 |      5 |      4 |     66 |      0 |      0 |      1 |      8 |      7 |      5 |      0 |      2 |     40 |      0 |      0 |      0 |      2 |      8 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5321300 |     187 |     81 |     59 |     3 |    0 |     1 |    0 |    2 |     5 |    0 |     36 |    0 |    0 |    0 |    0 |     84 |    103 |      37 |      10 |      18 |       4 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       2 |      4 |      6 |      3 |      1 |        2 |        7 |        7 |        5 |        2 |        4 |       1 |        5 |        7 |        7 |       14 |        5 |       11 |       4 |        4 |        4 |        5 |        4 |        6 |        7 |       1 |        2 |        5 |        3 |        4 |        8 |        6 |       0 |        2 |        2 |        6 |        3 |        2 |        2 |       0 |        4 |        7 |        3 |        3 |        0 |        2 |       0 |        2 |        4 |        2 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |     16 |      5 |      3 |      2 |     51 |      0 |      0 |      0 |      4 |     14 |      5 |      1 |      4 |     31 |      0 |      0 |      0 |      5 |      7 |      1 |      1 |      0 |     22 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5321900 |     316 |    156 |     92 |     5 |    0 |     6 |    0 |    1 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    145 |    171 |      96 |      42 |      25 |       5 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        4 |       11 |       20 |       12 |        5 |       11 |       5 |        2 |       12 |       20 |       19 |       14 |       10 |      11 |        6 |        7 |       14 |        7 |        8 |        5 |       1 |        4 |        7 |       10 |       10 |        8 |        4 |       1 |        2 |        6 |        4 |        2 |        5 |        3 |       0 |        4 |        5 |        7 |        9 |        4 |        3 |       1 |        1 |        3 |        1 |        2 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      2 |     28 |     18 |      4 |      2 |      0 |    102 |      0 |      0 |      1 |     11 |     12 |      1 |      4 |      8 |     55 |      0 |      0 |      2 |     12 |      5 |      3 |      2 |      0 |     31 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5322000 |     630 |    274 |    216 |     7 |    0 |     4 |    3 |    8 |     5 |    0 |    113 |    0 |    0 |    0 |    0 |    291 |    339 |     143 |      81 |      45 |      11 |      5 |      8 |      2 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |       0 |       5 |       0 |       0 |      6 |      3 |      9 |      0 |       14 |       18 |       24 |       24 |       11 |       15 |      13 |       14 |       28 |       30 |       24 |       22 |       20 |      17 |        9 |       16 |       24 |       17 |       13 |       20 |       7 |       12 |       20 |       22 |       17 |       16 |       18 |       5 |       14 |        6 |       14 |       10 |        6 |        5 |       3 |       11 |       17 |        4 |        8 |        8 |        6 |       1 |        1 |        3 |        1 |        2 |        1 |        0 |       0 |        4 |        4 |        3 |        7 |        1 |        0 |       0 |      0 |      2 |     22 |     39 |     11 |      5 |      5 |    190 |      0 |      0 |      1 |     36 |     28 |     15 |      4 |      9 |    123 |      0 |      0 |      0 |     10 |     15 |      1 |      0 |      2 |     85 |      0 |      0 |      1 |      3 |      5 |      0 |      0 |      0 |     18 |      0 |     37 | s03      | R    |
| 5322100 |     668 |    308 |    188 |    17 |    0 |     4 |    4 |    8 |     1 |    0 |    138 |    0 |    0 |    0 |    0 |    301 |    367 |     191 |      82 |      79 |      19 |      1 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      2 |      2 |      0 |       16 |       28 |       22 |       30 |       18 |       10 |       0 |       20 |       31 |       48 |       41 |       28 |       15 |       1 |        8 |       32 |       22 |       25 |        4 |        9 |       0 |       12 |       19 |       27 |       15 |        9 |        6 |       0 |       12 |       15 |       17 |       10 |        3 |        2 |       0 |       23 |       20 |       14 |       15 |        4 |        1 |       2 |        8 |        2 |        3 |        3 |        2 |        0 |       0 |        3 |        6 |        3 |        4 |        0 |        0 |       0 |      0 |      5 |     48 |     43 |      7 |      8 |      9 |    188 |      0 |      0 |      1 |     24 |     20 |     12 |      5 |      5 |    121 |      0 |      0 |      1 |     19 |     11 |      9 |      0 |      0 |     98 |      0 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 5322900 |     309 |    150 |     86 |     5 |    0 |     4 |    0 |    2 |     0 |    0 |     62 |    0 |    0 |    0 |    0 |    133 |    176 |      85 |      24 |      28 |       4 |      6 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |       10 |       12 |       13 |       15 |        8 |        5 |       0 |        8 |       13 |       28 |       19 |       11 |        7 |       1 |        1 |        9 |       14 |       10 |        2 |        1 |       0 |        7 |       11 |       10 |       10 |        3 |        8 |       0 |        2 |        8 |       10 |        6 |        1 |        1 |       0 |        6 |        6 |       11 |        6 |        2 |        3 |       0 |        1 |        1 |        0 |        1 |        1 |        1 |       0 |        1 |        2 |        3 |        0 |        0 |        0 |       0 |      0 |      2 |     29 |     19 |      4 |      4 |      3 |     89 |      0 |      0 |      0 |     11 |      8 |      3 |      2 |      3 |     59 |      0 |      0 |      0 |      7 |      5 |      1 |      2 |      2 |     45 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5323000 |     294 |    129 |    105 |     5 |    0 |     1 |    0 |    2 |     2 |    0 |     50 |    0 |    0 |    0 |    0 |    134 |    160 |      60 |      50 |      29 |       8 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      3 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |     12 |      2 |      0 |        5 |        9 |        6 |       12 |        6 |       11 |       1 |       11 |       10 |       13 |       13 |       16 |       14 |       2 |        2 |        7 |       10 |        8 |       12 |       15 |       0 |        4 |       13 |       14 |        7 |        9 |        4 |       0 |        4 |        7 |        5 |        4 |        2 |        2 |       0 |        9 |        4 |        1 |        5 |        7 |        0 |       0 |        2 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        2 |       0 |      0 |      1 |     21 |     15 |      6 |      2 |      3 |     81 |      0 |      0 |      0 |     17 |     18 |      9 |      4 |      4 |     53 |      0 |      0 |      0 |      3 |      6 |      2 |      0 |      1 |     38 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5323100 |     297 |    117 |    105 |     7 |    0 |     1 |    3 |    1 |     2 |    0 |     61 |    0 |    0 |    0 |    0 |    143 |    154 |      49 |      42 |      23 |       4 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      1 |      3 |      1 |      0 |        4 |        6 |       12 |       10 |       10 |        8 |       6 |        5 |        6 |       11 |       12 |        7 |       11 |       9 |        2 |       10 |       17 |        7 |        8 |        7 |       1 |        6 |        7 |       14 |        9 |        4 |        8 |       5 |        4 |        3 |        9 |        3 |        1 |        4 |       2 |        8 |        5 |        9 |        5 |        5 |        2 |       1 |        1 |        1 |        1 |        3 |        2 |        1 |       0 |        3 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      8 |     21 |      5 |      8 |      4 |     70 |      0 |      0 |      1 |      9 |     20 |      5 |      2 |      3 |     65 |      0 |      0 |      0 |      9 |      3 |      2 |      0 |      1 |     46 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 5323900 |     237 |    104 |     78 |     5 |    0 |     0 |    2 |    2 |     0 |    0 |     46 |    0 |    0 |    0 |    0 |    117 |    120 |      73 |      31 |      30 |       4 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      3 |      1 |      0 |        1 |       10 |       13 |        8 |        8 |        7 |       2 |        8 |        4 |       12 |       17 |        9 |        3 |       2 |        6 |        7 |       10 |        7 |        2 |        4 |       0 |        8 |       10 |       11 |        5 |        6 |        1 |       1 |        7 |        5 |        4 |        6 |        3 |        1 |       0 |        7 |        7 |        5 |        1 |        0 |        0 |       0 |        3 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      3 |     19 |     17 |      5 |      4 |      2 |     54 |      0 |      0 |      0 |      9 |     10 |      2 |      0 |      4 |     53 |      0 |      0 |      0 |      9 |      2 |      0 |      0 |      0 |     35 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5324000 |     203 |    100 |     60 |     4 |    0 |     1 |    2 |    1 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |    101 |    102 |      38 |      17 |      16 |       5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     19 |      9 |      5 |      0 |        5 |        9 |        9 |        6 |        5 |        7 |       0 |        4 |       11 |       13 |       12 |       13 |        6 |       0 |        4 |        9 |        5 |        8 |        7 |        5 |       0 |        2 |        2 |        4 |        7 |        3 |        4 |       0 |        3 |        4 |        1 |        5 |        4 |        3 |       0 |        3 |        4 |        1 |        2 |        1 |        4 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        3 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     12 |      9 |      3 |      2 |      7 |     66 |      0 |      0 |      0 |      4 |      5 |      3 |      1 |      2 |     45 |      0 |      0 |      0 |      7 |      6 |      1 |      0 |      0 |     21 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5324100 |     292 |    132 |     84 |     6 |    0 |     5 |    1 |    1 |     3 |    0 |     60 |    0 |    0 |    0 |    0 |    145 |    147 |      61 |      18 |      24 |       8 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      6 |      4 |      6 |      0 |        4 |       11 |       12 |        9 |        7 |       12 |       6 |        9 |       14 |       11 |        6 |        8 |       15 |       8 |        1 |        8 |       11 |        4 |        8 |        8 |       4 |        6 |        6 |        6 |        6 |        8 |        5 |       3 |        4 |        4 |        7 |        6 |        5 |        2 |       0 |        7 |        4 |        8 |        5 |        5 |        3 |       0 |        2 |        4 |        3 |        1 |        0 |        2 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |      0 |      2 |      9 |     16 |      4 |      4 |      3 |     94 |      0 |      0 |      0 |     17 |     10 |      6 |      1 |      2 |     48 |      0 |      0 |      1 |      6 |      6 |      8 |      1 |      1 |     37 |      0 |      0 |      0 |      0 |      6 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5324200 |       4 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      1 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5324300 |     402 |    164 |    153 |     4 |    0 |     1 |    0 |    1 |     4 |    0 |     75 |    0 |    0 |    0 |    0 |    197 |    205 |      76 |      23 |      28 |       4 |      3 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       3 |       0 |       0 |       0 |      9 |      8 |      5 |      0 |        9 |        7 |       16 |       16 |       14 |        9 |       1 |       11 |        8 |       16 |       25 |       19 |       13 |       0 |       12 |        6 |       13 |       13 |       17 |       14 |       1 |        4 |        4 |       13 |       20 |       16 |       20 |       0 |        7 |        8 |        9 |        9 |        5 |        4 |       0 |        7 |        7 |        5 |        7 |        6 |        1 |       0 |        0 |        3 |        1 |        2 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     22 |     24 |      5 |      3 |     12 |     97 |      0 |      0 |      1 |     14 |     29 |      4 |      6 |      8 |     91 |      0 |      0 |      0 |     13 |      8 |      2 |      2 |      1 |     49 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5324600 |       2 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5324700 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5324900 |      44 |     14 |     22 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     25 |     19 |       0 |       5 |       3 |       1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        1 |       1 |        1 |        1 |        1 |        4 |        1 |        1 |       0 |        1 |        2 |        3 |        2 |        0 |        4 |       0 |        1 |        0 |        0 |        3 |        2 |        3 |       1 |        1 |        2 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      1 |      0 |      1 |      9 |      0 |      0 |      0 |      5 |      3 |      1 |      1 |      1 |     11 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5325000 |     415 |    133 |    201 |    12 |    0 |     2 |    2 |    1 |     2 |    0 |     62 |    0 |    0 |    0 |    0 |    205 |    210 |      54 |      21 |      15 |       6 |      4 |     10 |      3 |      1 |      1 |      3 |      1 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      3 |      2 |      0 |        7 |        5 |        8 |       16 |       13 |        5 |       2 |        7 |       12 |       12 |       21 |       14 |        5 |       6 |       10 |        9 |       17 |       19 |       25 |       26 |       6 |        3 |        4 |       15 |       24 |       20 |       17 |       6 |        3 |        7 |        7 |        4 |        2 |        1 |       1 |        3 |        8 |       13 |        4 |        5 |        3 |       1 |        2 |        1 |        3 |        2 |        0 |        4 |       0 |        2 |        2 |        1 |        1 |        0 |        1 |       0 |      0 |      3 |     11 |     23 |      5 |      3 |      6 |     82 |      0 |      0 |      1 |     23 |     28 |      8 |      7 |     11 |    123 |      0 |      0 |      0 |      8 |     14 |      0 |      0 |      0 |     40 |      0 |      0 |      0 |      4 |      5 |      1 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 5325100 |     253 |     73 |    129 |     9 |    0 |     1 |    0 |    0 |     1 |    0 |     40 |    0 |    0 |    0 |    0 |    108 |    145 |      19 |       9 |       5 |       0 |      3 |      1 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |        6 |        6 |        4 |        8 |        4 |       2 |        2 |        5 |        4 |        4 |       13 |       15 |       0 |        5 |        7 |        6 |        8 |        8 |       17 |       3 |        5 |        4 |        3 |       12 |       15 |       32 |       4 |        4 |        4 |        1 |        2 |        2 |        4 |       0 |        2 |        6 |        4 |        3 |        5 |        3 |       0 |        0 |        1 |        4 |        0 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        0 |        3 |       0 |      0 |      0 |      8 |     11 |      5 |      2 |      0 |     47 |      0 |      0 |      1 |     11 |     16 |      7 |      9 |     12 |     73 |      0 |      0 |      0 |      6 |      2 |      3 |      0 |      1 |     28 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5325200 |     292 |    115 |    121 |     9 |    0 |     2 |    1 |    2 |     3 |    0 |     39 |    0 |    0 |    0 |    0 |    142 |    150 |      47 |      30 |       8 |       6 |      5 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      3 |      2 |      0 |        3 |        8 |       10 |       12 |        3 |        9 |       5 |        6 |       11 |       12 |       16 |       12 |        4 |       4 |        5 |        5 |       19 |       11 |       14 |        6 |       3 |        9 |        8 |       14 |       11 |       10 |        3 |       3 |        3 |        3 |        3 |        5 |        3 |        1 |       0 |        4 |        2 |        5 |        5 |        3 |        1 |       1 |        5 |        4 |        0 |        2 |        0 |        0 |       0 |        2 |        1 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |     24 |     17 |      1 |      4 |      3 |     66 |      0 |      0 |      0 |     18 |     19 |      4 |      3 |      4 |     73 |      0 |      0 |      1 |     10 |      6 |      1 |      0 |      2 |     19 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5325300 |     326 |     98 |    172 |     3 |    0 |     2 |    0 |    1 |     1 |    0 |     49 |    0 |    0 |    0 |    0 |    148 |    178 |      24 |      14 |      16 |       0 |      4 |      7 |      6 |      0 |      1 |      0 |      1 |      0 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        1 |        3 |        7 |       11 |        8 |       7 |        4 |        7 |        6 |       18 |       10 |       11 |       5 |        4 |        3 |       13 |       14 |       17 |       22 |      13 |        2 |        6 |       11 |        9 |       20 |       26 |      12 |        2 |        3 |        2 |        5 |        3 |        4 |       1 |        7 |        6 |        4 |        5 |        3 |        3 |       1 |        1 |        0 |        3 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     13 |     18 |      5 |      1 |      8 |     53 |      0 |      0 |      0 |     22 |     26 |      7 |     11 |      7 |     99 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      2 |     36 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 5325500 |     248 |     83 |    118 |     2 |    0 |     2 |    3 |    0 |     2 |    0 |     38 |    0 |    0 |    0 |    0 |    124 |    124 |      20 |      13 |       7 |       5 |      6 |      2 |      1 |      1 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       1 |       0 |      3 |      8 |      0 |      0 |        3 |        5 |        5 |        8 |        9 |        8 |       0 |        4 |        5 |        9 |        5 |       14 |        7 |       1 |        4 |       12 |        7 |       14 |       13 |        8 |       3 |        2 |        2 |        7 |       16 |       18 |       12 |       0 |        3 |        3 |        2 |        2 |        3 |        4 |       0 |        3 |        2 |        3 |        5 |        5 |        3 |       0 |        2 |        2 |        0 |        2 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     16 |     16 |      2 |      4 |      2 |     43 |      0 |      0 |      0 |     15 |     28 |      6 |      5 |      5 |     59 |      0 |      0 |      0 |      3 |      4 |      4 |      2 |      3 |     22 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5325600 |       5 |      1 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      1 |       1 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5325700 |     137 |     37 |     73 |     1 |    0 |     2 |    1 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     64 |     73 |      11 |      10 |       3 |       0 |      3 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      4 |      1 |        0 |        2 |        1 |        3 |        7 |        1 |       0 |        1 |        2 |        2 |        7 |        6 |        4 |       1 |        1 |        3 |        3 |        6 |        4 |       13 |       3 |        1 |        0 |        4 |        5 |       12 |       16 |       2 |        2 |        1 |        2 |        3 |        2 |        4 |       0 |        1 |        0 |        2 |        2 |        2 |        2 |       0 |        0 |        1 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |      4 |      2 |      7 |      1 |     21 |      0 |      0 |      0 |      3 |     14 |      2 |      4 |      4 |     46 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5325800 |     462 |    193 |    157 |     7 |    0 |     2 |    4 |    1 |     6 |    0 |     92 |    0 |    0 |    0 |    0 |    206 |    256 |      87 |      40 |      38 |       3 |      6 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       0 |      5 |      9 |      3 |      1 |        7 |       13 |       15 |       24 |        8 |        7 |       0 |       11 |       26 |       16 |       33 |        8 |       24 |       1 |        2 |        9 |       25 |       21 |       12 |        8 |       0 |        8 |       11 |       18 |       28 |        9 |        5 |       1 |        8 |       12 |        9 |        7 |        6 |        1 |       0 |        6 |       18 |       11 |        8 |        4 |        2 |       0 |        1 |        3 |        4 |        3 |        0 |        1 |       0 |        3 |        1 |        0 |        0 |        3 |        1 |       0 |      0 |      1 |     24 |     25 |     11 |      9 |     10 |    113 |      0 |      0 |      1 |     15 |     12 |      9 |      6 |     19 |     95 |      0 |      0 |      2 |     13 |      4 |      8 |      0 |      2 |     63 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5325900 |     656 |    273 |    248 |    12 |    0 |     3 |    3 |    3 |     3 |    0 |    111 |    0 |    0 |    0 |    0 |    296 |    360 |     126 |      62 |      46 |       8 |      7 |      6 |      3 |      0 |      2 |      1 |      0 |      0 |      3 |      4 |      1 |      0 |      7 |     11 |      2 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |     18 |     30 |      8 |      1 |       13 |       17 |       24 |       23 |       18 |        8 |       1 |       16 |       22 |       37 |       48 |       20 |       25 |       1 |       10 |       17 |       27 |       38 |       19 |       10 |       2 |        7 |       25 |       30 |       36 |       16 |       11 |       0 |        4 |        9 |       16 |       14 |        7 |        9 |       0 |        9 |       14 |       12 |       12 |        1 |        4 |       0 |        2 |        2 |        4 |        1 |        1 |        0 |       0 |        4 |        2 |        4 |        2 |        1 |        1 |       0 |      0 |      3 |     40 |     55 |     27 |      3 |      2 |    143 |      0 |      0 |      2 |     35 |     52 |     28 |      5 |      5 |    121 |      0 |      0 |      0 |     14 |     21 |      7 |      2 |      0 |     67 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 5326100 |     426 |    167 |    154 |     7 |    0 |     6 |    1 |    3 |     2 |    0 |     86 |    0 |    0 |    0 |    0 |    215 |    211 |      70 |      57 |      39 |       8 |      8 |      2 |      2 |      0 |      1 |      3 |      1 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     22 |     19 |     12 |      1 |        9 |        7 |       19 |       24 |       11 |        9 |       0 |        6 |        8 |       23 |       24 |       15 |       10 |       2 |        7 |        7 |       21 |       18 |       16 |        8 |       1 |        7 |        7 |       19 |       18 |       15 |       10 |       0 |        8 |        4 |       17 |       15 |        5 |        1 |       0 |       12 |        3 |       10 |        6 |        3 |        2 |       0 |        3 |        2 |        2 |        0 |        1 |        0 |       0 |        1 |        2 |        5 |        3 |        0 |        0 |       0 |      0 |      2 |     14 |     34 |     25 |     12 |      0 |     80 |      0 |      0 |      1 |     24 |     27 |     30 |     15 |      0 |     57 |      0 |      0 |      3 |     12 |     15 |      9 |      6 |      1 |     40 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5326200 |     447 |    154 |    190 |    10 |    0 |     2 |    1 |    2 |     4 |    0 |     84 |    0 |    0 |    0 |    0 |    211 |    236 |      66 |      20 |      22 |       3 |      1 |     10 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       3 |       0 |       1 |      4 |      1 |      2 |      0 |        7 |        9 |        9 |       16 |        9 |        9 |       5 |        5 |        8 |       12 |       28 |       17 |       17 |       3 |        7 |        9 |       18 |       20 |       24 |       11 |       2 |        6 |       10 |       20 |       18 |       28 |       16 |       1 |        4 |        6 |       12 |       10 |        7 |        4 |       0 |        7 |        7 |       11 |        9 |        2 |        5 |       0 |        2 |        5 |        1 |        3 |        1 |        1 |       0 |        1 |        1 |        1 |        3 |        0 |        0 |       0 |      0 |      1 |     17 |     27 |     11 |     11 |      8 |     79 |      0 |      0 |      0 |     22 |     39 |     10 |      6 |      9 |    104 |      0 |      0 |      0 |     16 |     17 |      3 |      2 |      0 |     46 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5326300 |     373 |    174 |    115 |     6 |    0 |     2 |    2 |    3 |     3 |    0 |     68 |    0 |    0 |    0 |    0 |    154 |    219 |      73 |      29 |      29 |       4 |      6 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      9 |      4 |      2 |      1 |        2 |       19 |       16 |        9 |        5 |        7 |       1 |        7 |       27 |       26 |       29 |       17 |        9 |       0 |        2 |       20 |       12 |       10 |        6 |        7 |       0 |        5 |       12 |       12 |       12 |        8 |        9 |       0 |        6 |        7 |        5 |        2 |        7 |        2 |       0 |        4 |       10 |       11 |        9 |        3 |        2 |       0 |        1 |        4 |        2 |        1 |        1 |        0 |       0 |        2 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     30 |     23 |      4 |      6 |      3 |    107 |      0 |      0 |      0 |     13 |     15 |      4 |      3 |      6 |     74 |      0 |      0 |      0 |      3 |      9 |      4 |      0 |      1 |     51 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5326400 |     478 |    173 |    195 |     8 |    0 |     3 |    4 |    3 |     7 |    0 |     85 |    0 |    0 |    0 |    0 |    226 |    252 |      72 |      42 |      29 |       8 |      4 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      4 |      9 |      6 |      0 |        7 |       12 |       11 |       13 |       15 |       15 |       4 |        8 |       15 |       14 |       29 |       17 |       12 |       1 |        9 |       13 |       14 |       26 |       16 |       13 |       2 |        7 |       14 |       26 |       24 |       18 |       11 |       2 |       10 |        6 |        9 |       15 |        3 |        3 |       0 |        6 |        5 |        4 |       13 |        6 |        4 |       1 |        1 |        3 |        3 |        1 |        0 |        1 |       1 |        2 |        6 |        2 |        3 |        1 |        1 |       0 |      0 |      2 |     23 |     32 |     12 |      4 |      8 |     92 |      0 |      0 |      3 |     26 |     33 |     23 |      7 |      4 |     99 |      0 |      0 |      0 |     20 |     13 |      7 |      1 |      0 |     44 |      0 |      0 |      1 |      4 |      5 |      3 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5326500 |     696 |    252 |    287 |     8 |    0 |     7 |    1 |    3 |     4 |    0 |    134 |    0 |    0 |    0 |    0 |    335 |    361 |      83 |      69 |      38 |       5 |     12 |      6 |      2 |      0 |      2 |      3 |      0 |      0 |      2 |      1 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |     12 |      9 |      2 |       10 |       20 |       22 |       36 |       13 |       11 |       0 |        6 |       19 |       44 |       35 |       26 |       10 |       0 |        5 |       18 |       54 |       41 |       20 |       14 |       1 |        9 |       26 |       41 |       31 |       21 |        6 |       0 |       14 |       13 |       15 |        8 |        5 |        5 |       0 |       11 |       24 |       13 |       12 |        9 |        5 |       0 |        0 |        4 |        2 |        3 |        0 |        1 |       0 |        1 |        1 |        4 |        4 |        1 |        2 |       0 |      0 |      2 |     46 |     54 |     17 |      0 |      0 |    133 |      0 |      0 |      0 |     36 |     74 |     14 |      0 |      0 |    163 |      0 |      0 |      0 |     22 |     20 |      3 |      0 |      0 |     89 |      0 |      0 |      0 |      4 |      8 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5326600 |     850 |    283 |    359 |    14 |    0 |     6 |    4 |    4 |     3 |    0 |    177 |    0 |    0 |    0 |    0 |    406 |    444 |     113 |      93 |      70 |       6 |     14 |     10 |      8 |      0 |      0 |      1 |      1 |      0 |      2 |      3 |      0 |      0 |      4 |     10 |      2 |      3 |      0 |      1 |      0 |      0 |       0 |       0 |       1 |       1 |     21 |     38 |     14 |      2 |       12 |       15 |       18 |       41 |       19 |       17 |       0 |       16 |       22 |       25 |       49 |       26 |       22 |       1 |       17 |       19 |       19 |       58 |       53 |       24 |       2 |       26 |       12 |       30 |       49 |       36 |       14 |       0 |       16 |       13 |       12 |       22 |       11 |        5 |       0 |       17 |       16 |       24 |       24 |       15 |        2 |       0 |        0 |        2 |        2 |        2 |        4 |        3 |       0 |        1 |        5 |        6 |        3 |        3 |        0 |       0 |      0 |      4 |     39 |     47 |     33 |     23 |     12 |    125 |      0 |      0 |      1 |     43 |     57 |     46 |     39 |     28 |    145 |      0 |      0 |      2 |     28 |     23 |     11 |     17 |      5 |     91 |      0 |      0 |      0 |      3 |      8 |      6 |      2 |      2 |     10 |      0 |     37 | s03      | R    |
| 5326700 |     390 |    166 |    133 |     5 |    0 |     0 |    1 |    1 |     2 |    0 |     82 |    0 |    0 |    0 |    0 |    190 |    200 |      66 |      32 |      29 |       2 |      3 |      4 |      3 |      1 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      6 |      2 |      0 |        9 |       16 |        8 |       19 |       13 |       10 |       0 |       15 |       20 |       15 |       27 |       11 |        3 |       0 |        9 |       15 |       17 |       11 |       10 |        2 |       0 |        0 |       24 |       14 |       15 |        8 |        8 |       0 |        9 |       10 |       10 |        9 |        7 |        2 |       0 |        9 |       10 |       10 |        3 |        3 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |        1 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      1 |     15 |     17 |      8 |      5 |      2 |    118 |      0 |      0 |      1 |      9 |     10 |     12 |      2 |      0 |     99 |      0 |      0 |      1 |      5 |      4 |      4 |      1 |      0 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5326800 |     641 |    255 |    285 |     8 |    0 |     2 |    2 |    1 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    298 |    343 |      77 |      49 |      23 |       4 |     10 |     13 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     23 |     10 |      2 |      2 |       13 |       18 |        8 |       27 |       25 |        9 |       8 |       17 |       14 |       18 |       41 |       30 |       18 |       9 |        9 |       21 |       22 |       45 |       20 |       21 |       6 |       18 |       13 |       20 |       42 |       25 |       20 |       3 |       10 |        6 |        5 |        8 |        7 |        3 |       0 |       10 |       12 |       12 |        6 |        6 |        2 |       0 |        3 |        2 |        0 |        1 |        1 |        0 |       0 |        3 |        1 |        0 |        2 |        0 |        1 |       0 |      0 |      1 |     26 |     39 |     16 |     15 |     18 |    140 |      0 |      0 |      2 |     35 |     43 |     17 |     11 |     29 |    148 |      0 |      0 |      1 |      6 |     11 |      5 |      2 |      4 |     58 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5326900 |      57 |     23 |     21 |     1 |    0 |     0 |    0 |    1 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     26 |     31 |      14 |      10 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      1 |      1 |        1 |        1 |        1 |        0 |        4 |        3 |       0 |        1 |        0 |        1 |        3 |        3 |        5 |       0 |        0 |        2 |        2 |        1 |        1 |        3 |       0 |        1 |        1 |        4 |        2 |        3 |        1 |       0 |        2 |        0 |        1 |        0 |        3 |        1 |       0 |        3 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      6 |      2 |      3 |      0 |      7 |      0 |      0 |      0 |      0 |      3 |      1 |      7 |      1 |      9 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |      1 |      5 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5327000 |     648 |    223 |    309 |    15 |    0 |     8 |    2 |    1 |     1 |    0 |     89 |    0 |    0 |    0 |    0 |    310 |    338 |      65 |      49 |      20 |       2 |      4 |     10 |      2 |      3 |      0 |      0 |      0 |      0 |      2 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        7 |        9 |       19 |       14 |       17 |       19 |       9 |        7 |       13 |       22 |       20 |       29 |       19 |      19 |       12 |       18 |       27 |       31 |       29 |       27 |      17 |       10 |       11 |       31 |       25 |       23 |       25 |      23 |        6 |        9 |        9 |       11 |        3 |        4 |       0 |       13 |        3 |       11 |        8 |        3 |        8 |       1 |        3 |        2 |        2 |        2 |        2 |        2 |       0 |        2 |        4 |        4 |        3 |        1 |        0 |       0 |      0 |      5 |     13 |     37 |     14 |     10 |      5 |    139 |      0 |      0 |      2 |     21 |     50 |      9 |     17 |     15 |    195 |      0 |      0 |      1 |     14 |      9 |      5 |      3 |      2 |     55 |      0 |      0 |      1 |      2 |     10 |      0 |      1 |      1 |     12 |      0 |     37 | s03      | R    |
| 5327100 |     745 |    291 |    270 |    19 |    0 |     7 |    6 |    4 |     4 |    0 |    144 |    0 |    0 |    0 |    0 |    351 |    394 |     114 |      53 |      43 |      10 |     10 |      5 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      3 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |     16 |     24 |     10 |      2 |       13 |       19 |       25 |       21 |       18 |       32 |       2 |       12 |       18 |       28 |       33 |       21 |       46 |       3 |        8 |       11 |       28 |       32 |       20 |       35 |       0 |       10 |       13 |       32 |       23 |       21 |       33 |       4 |        8 |        8 |       20 |       21 |        4 |        8 |       0 |       11 |        7 |       18 |       11 |       12 |       16 |       0 |        3 |        4 |        1 |        3 |        2 |        5 |       0 |        2 |        5 |        5 |        5 |        0 |        5 |       0 |      0 |      2 |     54 |     71 |      3 |      4 |      6 |    151 |      0 |      0 |      4 |     59 |     59 |      6 |      1 |     11 |    130 |      0 |      0 |      1 |     34 |     36 |      1 |      1 |      2 |     69 |      0 |      0 |      0 |      3 |     10 |      0 |      0 |      0 |     27 |      0 |     37 | s03      | R    |
| 5327200 |     450 |    172 |    181 |    12 |    0 |     2 |    1 |    2 |     1 |    0 |     79 |    0 |    0 |    0 |    0 |    215 |    235 |      63 |      37 |      21 |       7 |      6 |      5 |      5 |      2 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      0 |      2 |      1 |        5 |       11 |       11 |       16 |       15 |       14 |       1 |       16 |       12 |       14 |       24 |       19 |       10 |       4 |        4 |       15 |       18 |       16 |       29 |        8 |       0 |        7 |        8 |       19 |       17 |       30 |        9 |       1 |        9 |        8 |        6 |       11 |        3 |        1 |       0 |        9 |        5 |        9 |       10 |        5 |        2 |       1 |        4 |        3 |        3 |        3 |        1 |        0 |       0 |        3 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |     19 |     21 |      3 |      7 |      9 |    112 |      0 |      0 |      1 |     20 |     26 |      9 |     11 |     13 |    101 |      0 |      0 |      0 |      8 |      5 |      4 |      3 |      1 |     58 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5327300 |      85 |     37 |     29 |     5 |    0 |     0 |    0 |    1 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     31 |     54 |       4 |       2 |       4 |       2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      4 |      0 |      0 |        3 |        5 |        2 |        1 |        0 |        0 |       0 |        7 |       14 |        2 |        3 |        0 |        0 |       0 |        2 |        6 |        2 |        2 |        1 |        0 |       0 |        8 |        5 |        2 |        1 |        0 |        0 |       0 |        0 |        3 |        0 |        0 |        0 |        0 |       0 |        5 |        4 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     31 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5327400 |     360 |    138 |    146 |     5 |    0 |     6 |    1 |    0 |     0 |    0 |     64 |    0 |    0 |    0 |    0 |    157 |    203 |      41 |      23 |      16 |       3 |      7 |      8 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      2 |      0 |        3 |        2 |       13 |       16 |       10 |        8 |       0 |        2 |       10 |       17 |       25 |       16 |       15 |       1 |        6 |       11 |       12 |       15 |       16 |       15 |       0 |        1 |        9 |       12 |       18 |       15 |       14 |       2 |        5 |        2 |        2 |        8 |        5 |        2 |       0 |       10 |        5 |        7 |        7 |        7 |        4 |       0 |        0 |        2 |        0 |        0 |        2 |        2 |       0 |        1 |        0 |        1 |        2 |        0 |        2 |       0 |      0 |      1 |     14 |     29 |      7 |      0 |      3 |     84 |      0 |      0 |      1 |     18 |     21 |      5 |      7 |      4 |     90 |      0 |      0 |      0 |     12 |      5 |      3 |      0 |      1 |     43 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5327500 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5327700 |     763 |    278 |    308 |    10 |    0 |     4 |    4 |    2 |     6 |    0 |    151 |    0 |    0 |    0 |    0 |    364 |    399 |     100 |      60 |      55 |       7 |      8 |     10 |      2 |      1 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      4 |      0 |      1 |      0 |      0 |      0 |       2 |       0 |       0 |       0 |      9 |     14 |      8 |      0 |       23 |       12 |       10 |       39 |       27 |       10 |       0 |       19 |       16 |       32 |       55 |       21 |       12 |       2 |       10 |       13 |       26 |       51 |       35 |       15 |       2 |        8 |       13 |       32 |       60 |       26 |       14 |       3 |       17 |        7 |       10 |       21 |       14 |        5 |       0 |       20 |       15 |       12 |       13 |       11 |        5 |       1 |        3 |        3 |        1 |        2 |        7 |        1 |       0 |        3 |        1 |        1 |        0 |        3 |        1 |       0 |      0 |      4 |     25 |     39 |     11 |     13 |     39 |    147 |      0 |      0 |      2 |     32 |     48 |     17 |     22 |     48 |    139 |      0 |      0 |      1 |     18 |     21 |      9 |      7 |     10 |     85 |      0 |      0 |      0 |      1 |      6 |      1 |      1 |      1 |     16 |      0 |     37 | s03      | R    |
| 5327800 |     803 |    325 |    294 |     7 |    0 |     5 |    4 |    6 |     4 |    0 |    158 |    0 |    0 |    0 |    0 |    380 |    423 |     150 |      99 |      70 |      15 |      6 |      4 |      5 |      0 |      0 |      4 |      1 |      0 |      1 |      5 |      0 |      0 |      8 |      9 |      6 |      0 |      0 |      0 |      0 |      0 |       1 |       2 |       0 |       0 |     17 |     16 |     12 |      4 |       14 |       24 |       37 |       36 |       21 |       16 |       0 |       19 |       30 |       53 |       33 |       26 |       16 |       0 |        9 |       25 |       51 |       37 |       20 |        9 |       0 |       11 |       24 |       55 |       31 |       10 |       12 |       0 |       10 |       15 |       22 |       14 |        5 |        6 |       1 |       19 |       22 |       22 |       14 |        6 |        2 |       0 |        4 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |       12 |        1 |        4 |        1 |        0 |       0 |      0 |      3 |     62 |    106 |      1 |      0 |      0 |    153 |      0 |      0 |      0 |     54 |     92 |      7 |      1 |      2 |    138 |      0 |      0 |      2 |     30 |     35 |      0 |      0 |      0 |     91 |      0 |      0 |      0 |      3 |      8 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 5327900 |     938 |    374 |    378 |    13 |    0 |     3 |    2 |    3 |     6 |    0 |    159 |    0 |    0 |    0 |    0 |    462 |    476 |     128 |      86 |      47 |       3 |     10 |      5 |      4 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       2 |       0 |     30 |     17 |      9 |      1 |        9 |       33 |       56 |       33 |       15 |       23 |       0 |        6 |       53 |       66 |       41 |       22 |       16 |       1 |        9 |       41 |       84 |       35 |       22 |       11 |       0 |        8 |       50 |       67 |       29 |       13 |        8 |       1 |        9 |       21 |       24 |       18 |        7 |        1 |       0 |        9 |       24 |       32 |        8 |        5 |        1 |       0 |        1 |        5 |        3 |        1 |        0 |        1 |       0 |        2 |        6 |        4 |        3 |        1 |        0 |       0 |      0 |      6 |     63 |      3 |      0 |      0 |      0 |    302 |      0 |      0 |      3 |     69 |      1 |      1 |      0 |      2 |    302 |      0 |      0 |      3 |     21 |      0 |      0 |      0 |      0 |    135 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |     24 |      0 |     37 | s03      | R    |
| 5328000 |    1246 |    423 |    543 |    20 |    0 |     2 |    3 |    4 |     3 |    0 |    248 |    0 |    0 |    0 |    0 |    602 |    644 |     160 |     146 |      79 |       6 |      8 |     33 |      3 |      1 |      2 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      5 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |       1 |       3 |       0 |       0 |     24 |     24 |     12 |      2 |       16 |       46 |       51 |       38 |       14 |       13 |       0 |       14 |       76 |       78 |       57 |       11 |        9 |       0 |       14 |       79 |      110 |       52 |       14 |       13 |       0 |       10 |       83 |       89 |       52 |       19 |        8 |       0 |       13 |       41 |       35 |       20 |        6 |        5 |       0 |       16 |       44 |       39 |       12 |       13 |        3 |       1 |        3 |        6 |        8 |        2 |        1 |        2 |       0 |        0 |        3 |        4 |        3 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |    421 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |    538 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |    245 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     32 |      0 |     37 | s03      | R    |
| 5328100 |     357 |    112 |    144 |     8 |    0 |     3 |    2 |    3 |     1 |    0 |     84 |    0 |    0 |    0 |    0 |    192 |    165 |      43 |      35 |      30 |       7 |      2 |      3 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      9 |     13 |      8 |      0 |        4 |        7 |        6 |       17 |       11 |        5 |       1 |        6 |        8 |        6 |       26 |       13 |        2 |       0 |        4 |        8 |       10 |       23 |       24 |       10 |       0 |        3 |        5 |        9 |       20 |       22 |        5 |       1 |       10 |       11 |        3 |       11 |        9 |        6 |       0 |        9 |        3 |        7 |        7 |        6 |        2 |       0 |        3 |        1 |        3 |        2 |        3 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |     12 |     26 |      9 |      6 |     10 |     49 |      0 |      0 |      0 |     21 |     18 |     11 |     17 |     31 |     46 |      0 |      0 |      0 |     10 |      7 |      7 |      5 |     11 |     44 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      1 |      9 |      0 |     37 | s03      | R    |
| 5328200 |     631 |    230 |    271 |     5 |    0 |     2 |    0 |    0 |     1 |    0 |    122 |    0 |    0 |    0 |    0 |    318 |    313 |     100 |      74 |      38 |       3 |     10 |     14 |      2 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       3 |       0 |     15 |     26 |     12 |      0 |        9 |       16 |       20 |       31 |       19 |        8 |       0 |        6 |       12 |       40 |       34 |       24 |       11 |       0 |       10 |       11 |       43 |       30 |       29 |       16 |       0 |        6 |       15 |       44 |       34 |       22 |        9 |       2 |       16 |       12 |       18 |       17 |        7 |        3 |       0 |        6 |        7 |       17 |       10 |        6 |        3 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        3 |        0 |        0 |       0 |      0 |      2 |     78 |     27 |      1 |      0 |      0 |    122 |      0 |      0 |      4 |     75 |     36 |      3 |      1 |      0 |    152 |      0 |      0 |      0 |     26 |     10 |      0 |      0 |      0 |     86 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5328300 |     319 |    117 |    126 |     3 |    0 |     1 |    2 |    4 |     0 |    0 |     66 |    0 |    0 |    0 |    0 |    157 |    162 |      48 |      32 |      29 |       3 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |     11 |      6 |      1 |        4 |        6 |       11 |       15 |        9 |        4 |       1 |        5 |        8 |       17 |       21 |        7 |        9 |       0 |        5 |        4 |       32 |       18 |       10 |        2 |       0 |        4 |        5 |       21 |       17 |        5 |        3 |       0 |        8 |        4 |        5 |        8 |        4 |        1 |       0 |        7 |        6 |       11 |        6 |        2 |        3 |       1 |        1 |        3 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |      0 |      2 |     16 |     51 |      8 |      0 |      0 |     40 |      0 |      0 |      2 |     19 |     42 |     18 |      0 |      0 |     45 |      0 |      0 |      1 |     20 |     15 |      2 |      0 |      0 |     28 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5328500 |     442 |    138 |    224 |     7 |    0 |     0 |    1 |    0 |     0 |    0 |     72 |    0 |    0 |    0 |    0 |    207 |    235 |      43 |      54 |      18 |       1 |      2 |      2 |      1 |      0 |      3 |      3 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       2 |       0 |      7 |      8 |      3 |      0 |        3 |       10 |       14 |       17 |        7 |        4 |       0 |        5 |       12 |       28 |       20 |       11 |        7 |       0 |        4 |       15 |       46 |       31 |       16 |        5 |       0 |        5 |       23 |       39 |       23 |       10 |        7 |       0 |        3 |        5 |        8 |        7 |        4 |        1 |       0 |        8 |        5 |       16 |        9 |        4 |        2 |       0 |        1 |        3 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     25 |      0 |      0 |      0 |      0 |    112 |      0 |      0 |      1 |     32 |      0 |      0 |      0 |      0 |    191 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |     63 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5328600 |     825 |    312 |    325 |    11 |    0 |     3 |    4 |    1 |     4 |    0 |    165 |    0 |    0 |    0 |    0 |    395 |    430 |     127 |      94 |      48 |       6 |     10 |     11 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      1 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |       3 |       0 |       1 |       0 |     19 |     27 |     18 |      1 |       14 |       18 |       33 |       40 |       22 |       15 |       0 |       15 |       19 |       47 |       41 |       30 |       18 |       0 |       10 |       14 |       42 |       43 |       24 |       24 |       0 |       11 |       18 |       44 |       40 |       28 |       27 |       0 |        9 |       13 |       27 |       22 |       10 |        2 |       0 |       19 |       16 |       17 |       18 |        8 |        4 |       0 |        2 |        3 |        1 |        4 |        2 |        1 |       0 |        0 |        5 |        1 |        2 |        2 |        0 |       0 |      0 |      2 |     54 |     71 |     26 |      3 |      0 |    156 |      0 |      0 |      6 |     41 |     73 |     40 |      4 |      1 |    160 |      0 |      0 |      6 |     25 |     28 |     18 |      0 |      0 |     88 |      0 |      0 |      0 |      2 |      7 |      2 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 5328700 |     699 |    238 |    293 |     8 |    0 |     5 |    4 |    3 |     4 |    0 |    144 |    0 |    0 |    0 |    0 |    339 |    360 |      80 |      80 |      36 |       7 |      8 |      9 |      3 |      2 |      1 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      2 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |       5 |       0 |       0 |       0 |     17 |     21 |     23 |      1 |       12 |       12 |       31 |       29 |       11 |        8 |       0 |        9 |       20 |       43 |       39 |       12 |       12 |       0 |        9 |       22 |       64 |       33 |       16 |        9 |       0 |        8 |       19 |       61 |       32 |       11 |        9 |       0 |       14 |        8 |       22 |       18 |        4 |        4 |       0 |       13 |        7 |       23 |       19 |        9 |        3 |       0 |        3 |        3 |        4 |        2 |        0 |        1 |       0 |        3 |        1 |        3 |        3 |        1 |        0 |       0 |      0 |      1 |     55 |     47 |      1 |      0 |      0 |    134 |      0 |      0 |      3 |     74 |     70 |      0 |      0 |      0 |    146 |      0 |      0 |      2 |     33 |     22 |      0 |      0 |      0 |     87 |      0 |      0 |      0 |      5 |      7 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5328900 |     711 |    253 |    285 |    11 |    0 |     0 |    1 |    3 |     2 |    0 |    156 |    0 |    0 |    0 |    0 |    330 |    381 |     131 |      86 |      65 |       9 |      4 |     13 |      3 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      3 |      0 |      1 |      3 |      4 |      0 |      1 |      0 |      0 |      1 |       2 |       0 |       0 |       1 |     13 |     23 |     21 |      0 |        7 |       23 |       27 |       17 |        9 |       16 |       0 |       19 |       25 |       37 |       45 |       19 |        8 |       1 |        8 |       20 |       52 |       40 |       18 |       11 |       0 |       14 |       18 |       39 |       32 |       20 |       12 |       1 |       11 |       11 |       12 |       21 |       13 |        5 |       0 |       17 |       11 |       23 |       21 |        9 |        2 |       0 |        2 |        2 |        2 |        2 |        1 |        0 |       0 |        2 |        2 |        1 |        2 |        0 |        1 |       0 |      0 |      5 |     44 |     50 |     22 |     11 |      0 |    121 |      0 |      0 |      3 |     36 |     61 |     21 |     16 |      0 |    148 |      0 |      0 |      1 |     25 |     31 |     10 |     11 |      0 |     78 |      0 |      0 |      0 |      1 |      6 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 5329000 |     613 |    211 |    273 |     8 |    0 |     4 |    3 |    0 |     0 |    0 |    114 |    0 |    0 |    0 |    0 |    303 |    310 |      78 |      53 |      35 |       6 |      6 |     11 |      4 |      1 |      0 |      0 |      2 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       2 |       0 |       1 |      8 |     21 |      8 |      1 |        9 |        6 |       28 |       23 |       14 |       12 |       2 |       16 |       11 |       37 |       31 |       15 |        6 |       1 |        7 |       15 |       55 |       34 |       21 |        7 |       0 |        8 |       16 |       55 |       29 |       16 |       10 |       0 |       12 |        5 |       15 |       17 |        8 |        1 |       1 |       10 |       10 |       18 |        7 |        7 |        2 |       1 |        4 |        2 |        2 |        2 |        1 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |     52 |     63 |      1 |      0 |      0 |     95 |      0 |      0 |      0 |     58 |     57 |      3 |      0 |      0 |    155 |      0 |      0 |      1 |     17 |     13 |      3 |      0 |      0 |     80 |      0 |      0 |      0 |      3 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5329100 |     446 |    157 |    193 |     7 |    0 |     1 |    1 |    5 |     0 |    0 |     82 |    0 |    0 |    0 |    0 |    220 |    226 |      61 |      39 |      33 |       7 |      3 |      8 |      1 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |     10 |     17 |      9 |      1 |        5 |       20 |       24 |       11 |        2 |        5 |       0 |        7 |       24 |       30 |       17 |        7 |        5 |       0 |        2 |       16 |       53 |       16 |       11 |        3 |       0 |        2 |       28 |       41 |       12 |        5 |        4 |       0 |        8 |       11 |       18 |        6 |        1 |        0 |       1 |        6 |        7 |       17 |        5 |        2 |        0 |       0 |        1 |        3 |        2 |        1 |        0 |        0 |       0 |        1 |        4 |        1 |        1 |        0 |        0 |       0 |      0 |      2 |     43 |      8 |      0 |      0 |      0 |    104 |      0 |      0 |      2 |     45 |     12 |      0 |      0 |      0 |    134 |      0 |      0 |      2 |     16 |      2 |      0 |      0 |      0 |     62 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5329200 |     187 |     94 |     69 |     3 |    0 |     1 |    1 |    1 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     85 |    102 |      18 |      16 |       8 |       3 |      4 |      7 |      1 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        3 |        8 |        4 |        3 |       16 |       0 |        1 |        2 |        4 |        5 |       16 |       31 |       1 |        3 |        5 |        8 |        3 |        8 |       11 |       0 |        0 |        3 |        4 |        5 |        6 |       13 |       0 |        0 |        3 |        2 |        2 |        1 |        2 |       0 |        1 |        0 |        1 |        2 |        1 |        3 |       0 |        2 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |     93 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |     67 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5329400 |     680 |    271 |    236 |    10 |    0 |     3 |    2 |    3 |     1 |    0 |    154 |    0 |    0 |    0 |    0 |    326 |    354 |     105 |      73 |      66 |       6 |      5 |      6 |      1 |      1 |      2 |      1 |      2 |      1 |      1 |      2 |      0 |      0 |      2 |      5 |      3 |      0 |      1 |      0 |      0 |      1 |       2 |       1 |       0 |       0 |     17 |     21 |     10 |      1 |       14 |       25 |       37 |       19 |       15 |        7 |       0 |       10 |       38 |       42 |       37 |       15 |       11 |       1 |        7 |       27 |       42 |       25 |       12 |       11 |       0 |       12 |       20 |       42 |       22 |       11 |        5 |       0 |       16 |       15 |       26 |       10 |        3 |        5 |       0 |       15 |       20 |       25 |       11 |        6 |        2 |       0 |        2 |        3 |        3 |        1 |        0 |        1 |       0 |        3 |        3 |        3 |        0 |        0 |        0 |       0 |      0 |      2 |     88 |     15 |      2 |      0 |      1 |    163 |      0 |      0 |      3 |     77 |     15 |      0 |      0 |      0 |    141 |      0 |      0 |      5 |     30 |      5 |      0 |      0 |      0 |    114 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5329500 |     196 |     66 |     83 |     3 |    0 |     3 |    0 |    0 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |     87 |    109 |      25 |      22 |      12 |       0 |      7 |      0 |      2 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      2 |      0 |        1 |        3 |        4 |        8 |        7 |        2 |       0 |        6 |        8 |        9 |       11 |        5 |        2 |       0 |        4 |        2 |       13 |       12 |       10 |        2 |       0 |        3 |        7 |        9 |       12 |        6 |        3 |       0 |        6 |        1 |        2 |        3 |        3 |        2 |       0 |        9 |        1 |        2 |        6 |        4 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        1 |        0 |       0 |      0 |      1 |     15 |     14 |      0 |      1 |      0 |     35 |      0 |      0 |      1 |     16 |     21 |      0 |      1 |      0 |     44 |      0 |      0 |      1 |      4 |      8 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5329600 |      56 |     19 |     19 |     2 |    0 |     2 |    0 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     31 |     25 |       7 |      10 |       5 |       4 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        0 |        3 |        2 |        3 |       0 |        1 |        1 |        2 |        3 |        0 |        2 |       0 |        2 |        1 |        1 |        3 |        3 |        1 |       0 |        2 |        0 |        1 |        3 |        1 |        0 |       1 |        2 |        0 |        1 |        2 |        1 |        0 |       0 |        3 |        1 |        3 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      8 |      2 |      2 |      0 |      0 |      7 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5329700 |     297 |    117 |    108 |     8 |    0 |     2 |    1 |    2 |     1 |    0 |     58 |    0 |    0 |    0 |    0 |    135 |    162 |      54 |      28 |      22 |       6 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      7 |      8 |      7 |      1 |        5 |        9 |       12 |        8 |        6 |        5 |       0 |        6 |        6 |       24 |       22 |        8 |        5 |       1 |        3 |       10 |       16 |       11 |       10 |        6 |       0 |        5 |        7 |       10 |       20 |        7 |        3 |       0 |        5 |        9 |        3 |        4 |        6 |        1 |       0 |        1 |        4 |       10 |       10 |        3 |        2 |       0 |        2 |        4 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        2 |        0 |        1 |        1 |       0 |      0 |      0 |     13 |     24 |      8 |      1 |      8 |     63 |      0 |      0 |      0 |     11 |     13 |      6 |      7 |      8 |     63 |      0 |      0 |      1 |      6 |      3 |      4 |      2 |      5 |     37 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5329800 |     268 |    106 |     92 |     6 |    0 |     1 |    0 |    2 |     2 |    0 |     59 |    0 |    0 |    0 |    0 |    130 |    138 |      60 |      35 |      25 |       4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |      0 |       0 |       2 |       0 |       0 |      5 |      5 |      6 |      0 |        4 |       10 |       12 |       15 |        6 |        3 |       1 |        8 |       12 |       16 |       12 |        6 |        1 |       0 |        2 |        8 |       15 |       12 |        4 |        1 |       0 |        4 |       14 |       13 |       11 |        6 |        2 |       0 |        2 |        8 |        7 |        9 |        4 |        1 |       0 |        5 |        4 |       10 |        5 |        3 |        1 |       0 |        0 |        2 |        1 |        1 |        1 |        1 |       0 |        0 |        3 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |     12 |     14 |      8 |      5 |      2 |     65 |      0 |      0 |      0 |     13 |      7 |      6 |     11 |      3 |     52 |      0 |      0 |      1 |      8 |      3 |      9 |      3 |      0 |     35 |      0 |      0 |      0 |      5 |      1 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5329900 |     258 |     88 |    119 |     8 |    0 |     0 |    1 |    3 |     4 |    0 |     35 |    0 |    0 |    0 |    0 |    133 |    125 |      24 |      17 |      11 |       7 |      4 |      5 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        3 |        7 |        3 |        9 |        9 |        6 |       2 |        3 |        4 |        6 |       12 |       10 |        8 |       6 |        5 |       15 |       11 |       14 |        8 |        7 |       5 |        5 |        5 |        6 |       14 |        7 |       13 |       4 |        4 |        2 |        1 |        8 |        5 |        1 |       0 |        2 |        3 |        5 |        3 |        0 |        0 |       1 |        2 |        1 |        1 |        1 |        3 |        0 |       0 |        1 |        2 |        0 |        1 |        3 |        0 |       1 |      0 |      0 |      6 |     18 |      8 |      2 |      3 |     51 |      0 |      0 |      0 |     15 |     21 |      6 |      2 |      6 |     69 |      0 |      0 |      0 |      7 |      5 |      3 |      1 |      0 |     19 |      0 |      0 |      0 |      2 |      4 |      2 |      0 |      2 |      6 |      0 |     37 | s03      | R    |
| 5330000 |     407 |    190 |    127 |    10 |    0 |     3 |    4 |    0 |     2 |    0 |     71 |    0 |    0 |    0 |    0 |    178 |    229 |      86 |      36 |      30 |       5 |      4 |     10 |      5 |      2 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      0 |      3 |      1 |        3 |       19 |       26 |       16 |       14 |        4 |       0 |       11 |       24 |       41 |       15 |       12 |        5 |       0 |        6 |       17 |       25 |        3 |        3 |        5 |       0 |        3 |       20 |       20 |       13 |        7 |        4 |       1 |        4 |       12 |        7 |        4 |        1 |        1 |       0 |        6 |       14 |       11 |        7 |        4 |        0 |       0 |        3 |        3 |        2 |        0 |        0 |        0 |       0 |        1 |        2 |        5 |        2 |        1 |        0 |       0 |      0 |      3 |     46 |     43 |      0 |      0 |      0 |     98 |      0 |      0 |      0 |     17 |     28 |      0 |      0 |      0 |     82 |      0 |      0 |      1 |      7 |      9 |      0 |      0 |      1 |     53 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5330200 |     152 |     54 |     57 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |     37 |    0 |    0 |    0 |    0 |     84 |     68 |      27 |      13 |       6 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      5 |      4 |      0 |        2 |       10 |       10 |        5 |        3 |        1 |       0 |        0 |        8 |        8 |        6 |        1 |        0 |       0 |        4 |        7 |       13 |        7 |        1 |        0 |       0 |        0 |       15 |        6 |        1 |        3 |        0 |       0 |        1 |        8 |        2 |        5 |        3 |        0 |       0 |        6 |        3 |        3 |        4 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     54 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     57 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5330400 |     404 |    136 |    166 |    11 |    0 |     0 |    0 |    1 |     0 |    0 |     90 |    0 |    0 |    0 |    0 |    211 |    193 |      41 |      45 |      24 |       1 |      3 |      4 |      3 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |       1 |       1 |       2 |       1 |     12 |      8 |      4 |      0 |        4 |        7 |       25 |       13 |        6 |        3 |       0 |        4 |       27 |       18 |       13 |       10 |        6 |       0 |        8 |       25 |       34 |       15 |       10 |        5 |       0 |        2 |       21 |       24 |       14 |        6 |        1 |       1 |        5 |       10 |       21 |        8 |        5 |        1 |       0 |        4 |       11 |       16 |        4 |        3 |        2 |       0 |        0 |        2 |        1 |        2 |        0 |        1 |       0 |        0 |        2 |        1 |        1 |        1 |        1 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |    133 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |    162 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |     87 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5330500 |     477 |    181 |    185 |     6 |    0 |     2 |    2 |    2 |     3 |    0 |     96 |    0 |    0 |    0 |    0 |    235 |    242 |      90 |      62 |      36 |       9 |      5 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      4 |      4 |      3 |      0 |      1 |      0 |      0 |      0 |       3 |       1 |       0 |       1 |     14 |     19 |      8 |      0 |        4 |       27 |       25 |        9 |        7 |        6 |       0 |       11 |       42 |       25 |       16 |        6 |        3 |       0 |       10 |       40 |       32 |        6 |        4 |        4 |       0 |        6 |       37 |       25 |       10 |        8 |        3 |       0 |        6 |       21 |       14 |        5 |        3 |        3 |       0 |        8 |       19 |       12 |        2 |        1 |        2 |       0 |        0 |        4 |        2 |        1 |        1 |        1 |       0 |        2 |        0 |        3 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    181 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    185 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     96 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 5330600 |     395 |    145 |    172 |     2 |    0 |     3 |    2 |    0 |     0 |    0 |     71 |    0 |    0 |    0 |    0 |    180 |    215 |      47 |      46 |      15 |       1 |      1 |      4 |      3 |      1 |      3 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |       3 |       1 |       0 |       0 |      9 |     13 |      7 |      0 |        4 |        7 |       14 |       17 |        8 |        1 |       0 |        9 |       25 |       29 |       19 |        8 |        4 |       0 |        2 |       15 |       33 |       17 |       19 |        4 |       0 |        4 |       20 |       24 |       23 |        7 |        3 |       1 |        8 |       11 |        9 |        5 |        2 |        1 |       0 |        6 |       12 |       13 |        2 |        0 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |    144 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |    170 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     71 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5330700 |     520 |    188 |    201 |     5 |    0 |     3 |    2 |    3 |     0 |    0 |    118 |    0 |    0 |    0 |    0 |    265 |    255 |      58 |      50 |      32 |       3 |      5 |      7 |      7 |      1 |      0 |      2 |      3 |      0 |      0 |      0 |      1 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |      1 |      0 |       5 |       3 |       1 |       0 |     14 |     12 |     20 |      1 |        9 |       23 |       30 |       16 |        4 |        7 |       0 |        9 |       28 |       34 |       13 |        9 |        5 |       1 |        8 |       37 |       34 |       18 |        4 |        5 |       0 |       10 |       43 |       25 |       11 |        6 |        0 |       0 |        6 |       23 |       15 |       17 |        4 |        1 |       0 |        9 |       16 |       13 |       11 |        2 |        1 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |        3 |        1 |        4 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |    185 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |    201 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |    116 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5330800 |    1118 |    407 |    414 |    33 |    0 |     3 |    5 |    2 |     6 |    0 |    248 |    0 |    0 |    0 |    0 |    519 |    599 |     148 |      97 |      86 |      16 |     10 |     13 |      7 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      5 |      1 |      2 |      4 |      2 |      0 |      0 |       2 |       3 |       1 |       0 |     18 |     16 |     17 |      5 |        9 |       52 |       55 |       30 |        8 |       11 |       0 |       22 |       78 |       81 |       37 |       13 |       11 |       0 |       17 |       70 |       59 |       39 |       10 |        9 |       1 |       18 |       74 |       63 |       32 |       13 |        9 |       0 |       19 |       51 |       28 |       15 |        9 |        5 |       0 |       21 |       39 |       27 |       23 |        5 |        6 |       0 |        3 |        8 |        7 |        2 |        2 |        0 |       0 |        8 |        8 |        2 |        9 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      1 |      1 |    401 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |    410 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |    245 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |     44 |      0 |     37 | s03      | R    |
| 5330900 |      81 |     33 |     23 |     2 |    0 |     0 |    0 |    2 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     36 |     45 |      19 |      10 |      11 |       1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        6 |        3 |        3 |        0 |        0 |       0 |        2 |        9 |        4 |        2 |        2 |        2 |       0 |        1 |        8 |        3 |        0 |        0 |        0 |       0 |        3 |        4 |        1 |        3 |        0 |        0 |       0 |        3 |        5 |        2 |        0 |        0 |        1 |       0 |        1 |        4 |        4 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     33 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     21 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5331000 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5376000 |     474 |    252 |    127 |    11 |    0 |     3 |    2 |    2 |     1 |    0 |     76 |    0 |    0 |    0 |    0 |    217 |    257 |     151 |      58 |      41 |      13 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      1 |      3 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      6 |      1 |      0 |       20 |       15 |       20 |       11 |        9 |       21 |       9 |       17 |       26 |       21 |       27 |       15 |       25 |      16 |        5 |       12 |       14 |       18 |        6 |        6 |       3 |       12 |       17 |        5 |       11 |        9 |        7 |       2 |        4 |       12 |        6 |        8 |        7 |        3 |       0 |        8 |        9 |        9 |        6 |        3 |        1 |       0 |        1 |        3 |        2 |        2 |        0 |        0 |       0 |        1 |        4 |        2 |        2 |        2 |        0 |       0 |      0 |      0 |     32 |     35 |      5 |      4 |      8 |    168 |      0 |      0 |      2 |     25 |     14 |      3 |      2 |      3 |     78 |      0 |      0 |      1 |      9 |     13 |      4 |      0 |      0 |     49 |      0 |      0 |      2 |      3 |      4 |      1 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 5377000 |     250 |    125 |     59 |     1 |    0 |     2 |    1 |    2 |     3 |    0 |     57 |    0 |    0 |    0 |    0 |    117 |    133 |      68 |      19 |      27 |       2 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      1 |        9 |       10 |       16 |        5 |        6 |        8 |       0 |       15 |       10 |       11 |       17 |       10 |        8 |       0 |        6 |        6 |        9 |        1 |        8 |        4 |       0 |        8 |        6 |        3 |        5 |        1 |        2 |       0 |        8 |        5 |        5 |        7 |        1 |        0 |       0 |        7 |        8 |        8 |        4 |        2 |        1 |       1 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        2 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      1 |     18 |     16 |      2 |      1 |      2 |     85 |      0 |      0 |      0 |      6 |      5 |      2 |      1 |      1 |     44 |      0 |      0 |      2 |      8 |      5 |      1 |      0 |      0 |     41 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5377100 |     480 |    247 |    127 |    15 |    0 |     3 |    3 |    0 |     4 |    0 |     81 |    0 |    0 |    0 |    0 |    216 |    264 |     131 |      53 |      41 |       8 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      3 |       14 |       16 |       14 |       12 |       10 |       19 |       2 |       13 |       30 |       26 |       18 |       21 |       50 |       2 |        5 |       22 |       18 |       12 |        7 |       12 |       1 |        5 |       11 |        9 |        7 |        7 |       10 |       1 |        7 |       11 |        8 |        6 |        4 |        4 |       1 |        9 |       16 |        7 |        3 |        1 |        4 |       0 |        1 |        4 |        0 |        3 |        3 |        0 |       0 |        4 |        4 |        1 |        2 |        2 |        1 |       0 |      0 |      3 |     44 |     22 |      5 |      0 |      2 |    171 |      0 |      0 |      1 |     26 |     14 |      1 |      1 |      3 |     81 |      0 |      0 |      2 |     13 |      1 |      1 |      2 |      1 |     61 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |     20 |      0 |     37 | s03      | R    |
| 5379000 |     422 |    217 |    134 |    12 |    0 |     3 |    0 |    2 |     0 |    0 |     54 |    0 |    0 |    0 |    0 |    194 |    228 |      91 |      32 |      27 |       3 |      5 |      9 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |       1 |       0 |       0 |       0 |      3 |      1 |      0 |      1 |       11 |        8 |       15 |       26 |        9 |       13 |      12 |       14 |       14 |       22 |       28 |       13 |       18 |      14 |        4 |        3 |       14 |       11 |       13 |        9 |       9 |        3 |       13 |        8 |       16 |       11 |       14 |       6 |        6 |        3 |        8 |        7 |        1 |        3 |       2 |       10 |        1 |        4 |        7 |        2 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        2 |       0 |        3 |        0 |        2 |        1 |        1 |        2 |       1 |      0 |      1 |     36 |     26 |     10 |      6 |      5 |    133 |      0 |      0 |      2 |     16 |     19 |     12 |      8 |      3 |     74 |      0 |      0 |      0 |      5 |      5 |      1 |      1 |      0 |     42 |      0 |      0 |      0 |      1 |      7 |      2 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 5380000 |     384 |    188 |    105 |     7 |    0 |     6 |    4 |    2 |     1 |    0 |     71 |    0 |    0 |    0 |    0 |    161 |    223 |      89 |      38 |      29 |       4 |      4 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |       0 |       1 |       0 |       0 |      2 |      1 |      3 |      0 |       12 |       12 |       15 |       13 |        7 |       16 |       2 |       11 |       14 |       23 |       27 |       18 |       17 |       1 |        7 |       11 |       10 |        6 |        3 |        6 |       0 |        8 |       19 |       14 |       12 |        4 |        5 |       0 |        3 |        9 |        6 |        6 |        3 |        2 |       0 |       14 |        8 |       12 |        3 |        3 |        2 |       0 |        2 |        6 |        1 |        1 |        1 |        1 |       0 |        2 |        1 |        1 |        3 |        0 |        1 |       0 |      0 |      1 |     30 |     16 |      4 |      0 |      2 |    135 |      0 |      0 |      0 |     16 |     10 |      0 |      0 |      0 |     79 |      0 |      0 |      1 |     10 |      0 |      1 |      2 |      1 |     56 |      0 |      0 |      2 |      4 |      3 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5381000 |     632 |    301 |    182 |     8 |    0 |    10 |    3 |   10 |     2 |    0 |    116 |    0 |    0 |    0 |    0 |    277 |    355 |     184 |      58 |      71 |      16 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      4 |      3 |      0 |       10 |       23 |       21 |       19 |        9 |       36 |       4 |       11 |       33 |       32 |       30 |       23 |       44 |       6 |       13 |       16 |       14 |       16 |        9 |       16 |       2 |       13 |       15 |       15 |       15 |       14 |       19 |       5 |        9 |       13 |       10 |        7 |        6 |        4 |       1 |       19 |       13 |       10 |       11 |        7 |        5 |       1 |        3 |        8 |        3 |        1 |        0 |        3 |       1 |        2 |        4 |        3 |        2 |        0 |        3 |       0 |      0 |      0 |     56 |     54 |     10 |      4 |      5 |    172 |      0 |      0 |      0 |     30 |     26 |      2 |      7 |      5 |    112 |      0 |      0 |      3 |     18 |     13 |      1 |      0 |      1 |     80 |      0 |      0 |      4 |      7 |      3 |      1 |      1 |      0 |     17 |      0 |     37 | s03      | R    |
| 5383000 |     594 |    303 |    170 |    15 |    0 |     7 |    2 |    4 |     2 |    0 |     91 |    0 |    0 |    0 |    0 |    255 |    339 |     172 |      77 |      61 |      17 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      0 |      0 |       3 |       1 |       0 |       0 |     12 |      3 |      1 |      1 |       11 |       21 |       25 |       18 |       19 |       27 |       5 |       19 |       31 |       28 |       31 |       31 |       30 |       7 |        9 |       11 |       24 |        9 |       12 |        9 |       1 |       11 |       12 |       19 |       20 |       11 |       20 |       2 |        8 |        9 |       11 |        1 |        7 |        2 |       0 |       19 |       20 |        8 |        1 |        1 |        3 |       1 |        5 |        5 |        3 |        1 |        1 |        1 |       0 |        3 |        4 |        2 |        3 |        1 |        1 |       0 |      0 |      5 |     52 |     57 |     10 |     10 |      4 |    165 |      0 |      0 |      0 |     32 |     28 |      9 |      3 |      3 |     95 |      0 |      0 |      0 |     15 |     12 |      3 |      0 |      0 |     61 |      0 |      0 |      3 |      2 |      8 |      0 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 5384000 |     157 |     79 |     46 |     4 |    0 |     0 |    0 |    2 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     74 |     83 |      38 |      10 |       5 |       3 |      2 |      3 |      1 |      0 |      1 |      2 |      2 |      0 |      7 |      3 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      3 |      0 |        5 |        4 |        6 |        8 |        2 |       11 |       0 |        5 |        4 |        5 |        7 |        3 |       17 |       2 |        4 |        3 |        6 |        1 |        2 |        9 |       0 |        4 |        5 |        3 |        1 |        3 |        5 |       0 |        0 |        2 |        1 |        0 |        1 |        5 |       0 |        0 |        3 |        3 |        1 |        1 |        7 |       1 |        0 |        0 |        1 |        0 |        1 |        2 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      1 |     16 |      9 |      0 |      0 |      0 |     53 |      0 |      0 |      0 |      6 |      2 |      2 |      1 |      1 |     34 |      0 |      0 |      0 |      0 |      5 |      2 |      1 |      0 |     17 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5384100 |     252 |    134 |     67 |     6 |    0 |     2 |    3 |    2 |     1 |    0 |     37 |    0 |    0 |    0 |    0 |    119 |    133 |      89 |      23 |      21 |       6 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        9 |        8 |       13 |        7 |       16 |       5 |        7 |        2 |        9 |       15 |       12 |       22 |       3 |        0 |        6 |        3 |        7 |        6 |        9 |       1 |        0 |        5 |        4 |        9 |        8 |        6 |       3 |        3 |        2 |        3 |        4 |        2 |        2 |       1 |        4 |        4 |        7 |        2 |        1 |        2 |       0 |        1 |        0 |        2 |        1 |        0 |        2 |       0 |        1 |        3 |        0 |        1 |        0 |        3 |       0 |      0 |      1 |     24 |     20 |      6 |      3 |      4 |     76 |      0 |      0 |      0 |     11 |     11 |      5 |      4 |      3 |     33 |      0 |      0 |      0 |      3 |      5 |      2 |      0 |      1 |     26 |      0 |      0 |      1 |      3 |      1 |      1 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 5385000 |     438 |    223 |    108 |    11 |    0 |     8 |    1 |    6 |     3 |    0 |     78 |    0 |    0 |    0 |    0 |    203 |    235 |     138 |      48 |      42 |      13 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      4 |      2 |      2 |      0 |       11 |       13 |       30 |       15 |       10 |       20 |       0 |       17 |       20 |       26 |       25 |       12 |       21 |       3 |        2 |       15 |       13 |       12 |        3 |       10 |       0 |        4 |       12 |       17 |        4 |        6 |       10 |       0 |        5 |       13 |        6 |        4 |        2 |        2 |       0 |       17 |       10 |        5 |        7 |        3 |        4 |       0 |        1 |        6 |        2 |        5 |        1 |        2 |       0 |        3 |        2 |        1 |        2 |        0 |        4 |       0 |      0 |      1 |     32 |     43 |      5 |      1 |      2 |    139 |      0 |      0 |      0 |     19 |     13 |      2 |      0 |      6 |     68 |      0 |      0 |      0 |      7 |      4 |      1 |      1 |      0 |     65 |      0 |      0 |      0 |      5 |      7 |      4 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 5386000 |     418 |    179 |    162 |     9 |    0 |     3 |    2 |    1 |     1 |    0 |     61 |    0 |    0 |    0 |    0 |    194 |    224 |      61 |      35 |      20 |       4 |      8 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        7 |        5 |        2 |        9 |       49 |       6 |        2 |        7 |       10 |        6 |       14 |       53 |       8 |        5 |        2 |       11 |       10 |        7 |       37 |       5 |        2 |        3 |        8 |        6 |       13 |       46 |       7 |        4 |        2 |        3 |        3 |        6 |       13 |       0 |        2 |        4 |        3 |        2 |        7 |       12 |       0 |        0 |        0 |        2 |        1 |        0 |        4 |       0 |        1 |        1 |        1 |        0 |        0 |        6 |       0 |      0 |      1 |     29 |     30 |     11 |      6 |      3 |     99 |      0 |      0 |      3 |     21 |     22 |      6 |     12 |      3 |     95 |      0 |      0 |      2 |     12 |      5 |      4 |      1 |      1 |     36 |      0 |      0 |      1 |      1 |      4 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5387000 |     522 |    250 |    154 |    11 |    0 |     6 |    3 |    6 |     6 |    0 |     86 |    0 |    0 |    0 |    0 |    254 |    268 |     164 |      65 |      51 |      18 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      8 |      3 |      5 |      0 |        8 |       15 |       19 |       19 |       14 |       27 |       5 |       16 |       20 |       25 |       27 |       21 |       30 |       4 |        8 |       22 |       18 |       19 |        4 |       14 |       3 |        5 |       15 |        9 |       17 |        8 |       11 |       1 |        8 |        9 |        9 |        4 |        6 |        5 |       0 |       11 |       12 |       12 |        5 |        1 |        4 |       0 |        3 |        7 |        4 |        2 |        1 |        1 |       0 |        5 |        1 |        3 |        1 |        3 |        1 |       0 |      0 |      2 |     44 |     32 |     12 |      3 |      1 |    156 |      0 |      0 |      0 |     30 |     15 |      3 |      4 |      1 |    101 |      0 |      0 |      0 |     12 |      3 |      4 |      0 |      2 |     65 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      0 |     23 |      0 |     37 | s03      | R    |
| 5387100 |      39 |     26 |      4 |     1 |    0 |     0 |    1 |    1 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     22 |     17 |      23 |       1 |       3 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        3 |        4 |        2 |        4 |       1 |        1 |        2 |        4 |        1 |        1 |        2 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      5 |      3 |      3 |      1 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |     37 | s03      | R    |
| 5388000 |     213 |     81 |     88 |     5 |    0 |     1 |    2 |    3 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |    107 |    106 |      52 |      33 |      14 |       5 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      4 |      3 |        5 |        5 |       10 |        9 |        3 |        8 |       2 |        6 |        4 |        8 |        6 |        1 |       11 |       3 |        5 |        5 |        5 |        7 |        6 |        9 |       3 |        5 |        9 |        9 |        7 |        7 |        8 |       3 |        4 |        2 |        2 |        2 |        1 |        4 |       1 |        2 |        2 |        2 |        4 |        2 |        3 |       1 |        4 |        2 |        2 |        0 |        0 |        1 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     11 |      8 |      2 |      0 |      0 |     60 |      0 |      0 |      0 |     13 |     10 |      4 |      3 |      6 |     52 |      0 |      0 |      0 |      5 |      3 |      3 |      1 |      1 |     19 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5388100 |     224 |     97 |     94 |     5 |    0 |     2 |    1 |    0 |     0 |    0 |     25 |    0 |    0 |    0 |    0 |     96 |    128 |      22 |       6 |       1 |       1 |      3 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        1 |        0 |        1 |       10 |       26 |       3 |        0 |        2 |        0 |        5 |        7 |       36 |       5 |        0 |        0 |        2 |        2 |        6 |       24 |       1 |        0 |        0 |        1 |        4 |       13 |       39 |       2 |        0 |        0 |        0 |        1 |        0 |       11 |       2 |        0 |        0 |        0 |        1 |        4 |        6 |       0 |        0 |        0 |        0 |        0 |        2 |        3 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |      0 |      0 |     18 |     13 |      9 |      3 |      5 |     49 |      0 |      0 |      0 |     13 |     21 |      4 |      7 |      2 |     47 |      0 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |     19 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 5388200 |     171 |     82 |     50 |     3 |    0 |     0 |    3 |    1 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |     76 |     95 |      50 |      14 |      19 |       3 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      1 |        0 |        5 |        6 |       11 |        0 |        8 |       7 |        2 |        6 |        9 |        9 |        4 |       11 |       4 |        1 |        4 |        3 |        2 |        3 |        2 |       2 |        4 |        5 |        7 |        3 |        3 |        6 |       5 |        5 |        2 |        3 |        4 |        3 |        1 |       1 |        4 |        2 |        3 |        2 |        0 |        2 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |     11 |      9 |      1 |      2 |      5 |     54 |      0 |      0 |      0 |      4 |      2 |      3 |      1 |      1 |     39 |      0 |      0 |      0 |      9 |      3 |      0 |      0 |      0 |     20 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5389000 |     257 |    125 |     70 |     6 |    0 |     2 |    1 |    1 |     2 |    0 |     50 |    0 |    0 |    0 |    0 |    124 |    133 |      80 |      28 |      19 |       6 |      0 |      4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      5 |      1 |      1 |      1 |        4 |        8 |       14 |        5 |       11 |       14 |       0 |        7 |       14 |        6 |       15 |       11 |       12 |       4 |        6 |        7 |       10 |        9 |        2 |        7 |       1 |        3 |        4 |        2 |        4 |        6 |        7 |       2 |        3 |        4 |        3 |        4 |        4 |        2 |       1 |        6 |        5 |        3 |        4 |        3 |        8 |       0 |        2 |        0 |        0 |        1 |        0 |        2 |       0 |        2 |        3 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |     26 |     20 |      2 |      5 |      4 |     68 |      0 |      0 |      0 |      9 |     14 |      1 |      4 |      3 |     39 |      0 |      0 |      0 |      8 |      4 |      1 |      3 |      1 |     33 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5390000 |     445 |    228 |    144 |    10 |    0 |     2 |    3 |    6 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    204 |    241 |     124 |      42 |      28 |      10 |      3 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      1 |        4 |        8 |       10 |       14 |       11 |       43 |       7 |       10 |       16 |       10 |       13 |       23 |       54 |       5 |        5 |        6 |       10 |       11 |       11 |       29 |       1 |        6 |        4 |        5 |        4 |        9 |       36 |       7 |        3 |        2 |        2 |        5 |        3 |       10 |       1 |        2 |        4 |        6 |        5 |        2 |        6 |       0 |        2 |        0 |        2 |        0 |        1 |        3 |       0 |        2 |        3 |        4 |        1 |        1 |        3 |       0 |      0 |      0 |     35 |     43 |      4 |      4 |      3 |    139 |      0 |      0 |      1 |     17 |     19 |      6 |     11 |      5 |     85 |      0 |      0 |      0 |      8 |      7 |      2 |      0 |      3 |     31 |      0 |      0 |      0 |      6 |      3 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5390900 |      60 |     30 |     13 |     2 |    0 |     0 |    0 |    2 |     1 |    0 |     12 |    0 |    0 |    0 |    0 |     27 |     33 |      22 |       6 |       7 |       3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        3 |        4 |        1 |        3 |       1 |        4 |        5 |        2 |        0 |        0 |        5 |       0 |        1 |        2 |        1 |        2 |        1 |        0 |       0 |        2 |        0 |        2 |        2 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        3 |        1 |        2 |        1 |        2 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      6 |      1 |      2 |      3 |     15 |      0 |      0 |      0 |      3 |      0 |      1 |      1 |      1 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5391000 |     488 |    262 |    128 |     9 |    0 |     6 |    3 |    3 |     4 |    0 |     73 |    0 |    0 |    0 |    0 |    222 |    266 |     228 |      96 |      57 |      20 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      6 |      3 |      0 |       13 |       16 |       27 |       21 |       10 |       19 |       4 |       15 |       32 |       24 |       20 |       24 |       28 |       9 |       10 |       20 |       12 |        7 |        9 |        7 |       0 |        5 |       16 |       15 |        8 |       10 |        9 |       0 |       12 |        4 |        8 |        4 |        3 |        1 |       0 |       11 |       10 |        6 |        6 |        3 |        5 |       0 |        5 |        1 |        9 |        0 |        0 |        0 |       0 |        2 |        4 |        2 |        0 |        0 |        0 |       2 |      0 |      2 |     46 |     41 |     12 |      4 |      1 |    156 |      0 |      0 |      3 |     22 |     24 |      6 |      1 |      2 |     70 |      0 |      0 |      1 |      8 |     10 |      6 |      0 |      1 |     47 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 5391100 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5392000 |     458 |    227 |    123 |    11 |    0 |     6 |    0 |    6 |     2 |    0 |     83 |    0 |    0 |    0 |    0 |    211 |    247 |     157 |      54 |      46 |      15 |      1 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      6 |      0 |      0 |       10 |       14 |       17 |       30 |        9 |       21 |       4 |       12 |       20 |       21 |       23 |       12 |       29 |       5 |        6 |        8 |       10 |       12 |        5 |       12 |       0 |       15 |        7 |       11 |       12 |        3 |       21 |       1 |       14 |        4 |        8 |        9 |        4 |        2 |       0 |        9 |        6 |       12 |       10 |        0 |        4 |       1 |        1 |        3 |        4 |        3 |        0 |        1 |       0 |        1 |        3 |        6 |        1 |        0 |        2 |       0 |      0 |      3 |     39 |     33 |     13 |      4 |      4 |    131 |      0 |      0 |      0 |     13 |     21 |      4 |      0 |      1 |     84 |      0 |      0 |      2 |     11 |     10 |      2 |      2 |      2 |     54 |      0 |      0 |      0 |      3 |      8 |      1 |      2 |      0 |     11 |      0 |     37 | s03      | R    |
| 5392100 |     131 |     72 |     46 |     0 |    0 |     0 |    0 |    1 |     2 |    0 |     10 |    0 |    0 |    0 |    0 |     52 |     79 |      31 |      12 |       1 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        1 |        2 |        3 |        4 |       14 |       1 |        1 |        1 |        2 |        3 |        9 |       30 |       0 |        0 |        1 |        1 |        0 |        1 |       14 |       1 |        0 |        2 |        0 |        2 |        6 |       17 |       1 |        0 |        0 |        0 |        0 |        3 |        3 |       0 |        0 |        0 |        0 |        0 |        1 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      1 |      9 |     13 |      3 |      3 |      4 |     39 |      0 |      0 |      0 |      9 |      6 |      3 |      2 |      0 |     26 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5392900 |     193 |     96 |     57 |     2 |    0 |     1 |    1 |    1 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |     98 |     95 |      65 |      31 |      13 |       2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      5 |      3 |      0 |        3 |        6 |       10 |       12 |        3 |        5 |       4 |        5 |        7 |       14 |       11 |        9 |        5 |       2 |        4 |        1 |       11 |        3 |        6 |        3 |       3 |        4 |        6 |        2 |        4 |        4 |        4 |       2 |        5 |        5 |        2 |        2 |        2 |        4 |       1 |        3 |        1 |        4 |        3 |        0 |        2 |       1 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |     20 |     13 |      2 |      3 |      1 |     56 |      0 |      0 |      0 |     10 |      2 |      5 |      2 |      0 |     38 |      0 |      0 |      0 |      4 |      3 |      1 |      0 |      0 |     27 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5393000 |      16 |      5 |      8 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     10 |      6 |       3 |       3 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        2 |        0 |        3 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5393100 |     290 |    153 |     69 |    10 |    0 |     4 |    0 |    6 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    134 |    156 |     124 |      49 |      37 |      16 |      3 |      2 |      1 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        5 |       13 |       16 |       16 |       13 |        9 |       1 |       14 |       11 |       10 |       16 |       10 |       17 |       2 |        2 |        4 |       10 |        5 |        2 |        4 |       2 |        7 |       13 |        5 |        8 |        2 |        5 |       0 |        3 |        8 |        8 |        3 |        0 |        0 |       0 |        9 |        6 |        5 |        2 |        0 |        2 |       1 |        4 |        2 |        0 |        2 |        1 |        1 |       0 |        3 |        4 |        2 |        1 |        1 |        0 |       0 |      0 |      1 |     22 |     37 |      3 |      1 |      4 |     85 |      0 |      0 |      0 |     13 |      7 |      2 |      2 |      2 |     43 |      0 |      0 |      1 |      7 |      4 |      1 |      1 |      0 |     33 |      0 |      0 |      1 |      4 |      8 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5393300 |     217 |    114 |     47 |     5 |    0 |     6 |    0 |    1 |     2 |    0 |     42 |    0 |    0 |    0 |    0 |    102 |    115 |      73 |      21 |      26 |       8 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |        5 |        8 |       11 |       12 |        5 |       10 |       2 |        6 |        8 |       13 |        8 |        5 |       15 |       6 |        2 |        5 |        7 |        1 |        2 |        3 |       2 |        5 |        4 |        6 |        5 |        1 |        2 |       2 |        4 |        2 |        8 |        4 |        1 |        2 |       0 |        4 |        5 |        4 |        3 |        3 |        1 |       1 |        2 |        1 |        2 |        0 |        0 |        1 |       0 |        2 |        3 |        2 |        0 |        1 |        0 |       0 |      0 |      3 |     23 |     16 |      4 |      3 |      2 |     63 |      0 |      0 |      0 |      7 |      5 |      3 |      2 |      1 |     29 |      0 |      0 |      0 |      8 |      4 |      2 |      1 |      1 |     26 |      0 |      0 |      0 |      2 |      5 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5393400 |     154 |     66 |     55 |     2 |    0 |     0 |    1 |    1 |     2 |    0 |     27 |    0 |    0 |    0 |    0 |     67 |     87 |      37 |      11 |      10 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      1 |      0 |        2 |        7 |        4 |        5 |        4 |        5 |       0 |        0 |        9 |        4 |       10 |        8 |        8 |       0 |        1 |        4 |        5 |        7 |        2 |        9 |       0 |        1 |        4 |        3 |        5 |        6 |        8 |       0 |        2 |        0 |        1 |        0 |        4 |        2 |       0 |        1 |        4 |        4 |        3 |        2 |        4 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     11 |      9 |      1 |      7 |      0 |     38 |      0 |      0 |      0 |      6 |     12 |      4 |      0 |      4 |     29 |      0 |      0 |      0 |      3 |      5 |      1 |      0 |      2 |     16 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5401000 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5401900 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5405100 |       7 |      5 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      3 |       5 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5405200 |       2 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5415000 |     183 |     41 |     94 |     5 |    0 |     0 |    3 |    0 |     6 |    0 |     34 |    0 |    0 |    0 |    0 |     80 |    103 |       8 |       5 |       2 |       0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       1 |      0 |      1 |      1 |      0 |        1 |        0 |        1 |        6 |        0 |        6 |       1 |        3 |        0 |        3 |        6 |        7 |        6 |       1 |        0 |        2 |        4 |        8 |       12 |       15 |       0 |        3 |        6 |        7 |       14 |       10 |       13 |       0 |        2 |        3 |        1 |        4 |        3 |        2 |       1 |        4 |        2 |        5 |        4 |        2 |        1 |       0 |        1 |        0 |        2 |        3 |        0 |        1 |       1 |        1 |        0 |        4 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      9 |      0 |      0 |      3 |     27 |      0 |      0 |      1 |     11 |     23 |      8 |      0 |      3 |     48 |      0 |      0 |      0 |      4 |      3 |      2 |      1 |      2 |     22 |      0 |      0 |      0 |      4 |      1 |      3 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 5415200 |      70 |     14 |     50 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     36 |     34 |       4 |       5 |       0 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        0 |        2 |       0 |        1 |        0 |        1 |        1 |        3 |        3 |       0 |        1 |        2 |        3 |        5 |        7 |        8 |       0 |        3 |        1 |        6 |        3 |        3 |        6 |       2 |        0 |        1 |        1 |        0 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      1 |      1 |      1 |      7 |      0 |      0 |      0 |      3 |     15 |      1 |      3 |      2 |     26 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5425000 |      84 |     27 |     35 |     4 |    0 |     2 |    1 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     45 |     39 |       2 |       1 |       1 |       0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        4 |        4 |        0 |       0 |        1 |        0 |        2 |       11 |        1 |        1 |       0 |        1 |        0 |        4 |        4 |        4 |        4 |       2 |        1 |        1 |        2 |        6 |        4 |        2 |       0 |        0 |        1 |        0 |        6 |        1 |        2 |       0 |        0 |        1 |        1 |        0 |        2 |        1 |       0 |        1 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |      1 |      4 |      4 |      2 |      1 |     14 |      0 |      0 |      0 |      6 |      8 |      0 |      1 |      0 |     20 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |     10 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5425100 |     178 |     63 |     66 |     6 |    0 |     2 |    1 |    0 |     2 |    0 |     38 |    0 |    0 |    0 |    0 |     75 |    103 |      25 |       7 |       8 |       2 |      2 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        1 |        9 |        3 |        5 |       1 |        4 |        4 |        5 |       14 |        8 |        4 |       0 |        1 |        2 |        7 |        7 |        5 |        9 |       1 |        0 |        6 |        6 |        8 |        7 |        7 |       0 |        3 |        1 |        3 |        1 |        5 |        3 |       0 |        2 |        5 |        2 |       11 |        2 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |        2 |        1 |        1 |        4 |        0 |        0 |       0 |      0 |      0 |      9 |     16 |      3 |      7 |      3 |     25 |      0 |      0 |      0 |      9 |     10 |      1 |      4 |      3 |     39 |      0 |      0 |      0 |      5 |      9 |      2 |      0 |      0 |     22 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 5425200 |       3 |      0 |      2 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5425400 |       3 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5425500 |      99 |     25 |     50 |     4 |    0 |     0 |    2 |    0 |     2 |    0 |     16 |    0 |    0 |    0 |    0 |     55 |     44 |       0 |       2 |       0 |       1 |      1 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        4 |        2 |        2 |       1 |        1 |        0 |        3 |        3 |        2 |        4 |       0 |        3 |        1 |        4 |       10 |        6 |        7 |       0 |        1 |        0 |        0 |        7 |        8 |        3 |       0 |        1 |        1 |        1 |        2 |        2 |        0 |       0 |        1 |        0 |        4 |        2 |        1 |        1 |       0 |        0 |        1 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      2 |      0 |      4 |     15 |      0 |      0 |      0 |      3 |     10 |      7 |      1 |      2 |     27 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 5433000 |     192 |     47 |     91 |     4 |    0 |     2 |    4 |    0 |     5 |    0 |     39 |    0 |    0 |    0 |    0 |    100 |     92 |       8 |       2 |       1 |       0 |      2 |      5 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        4 |        7 |        5 |        8 |       0 |        1 |        1 |        4 |        6 |        4 |        5 |       0 |        3 |        2 |        7 |       12 |       10 |        7 |       4 |        3 |        3 |        9 |        5 |       14 |       11 |       1 |        1 |        1 |        3 |        6 |        6 |        3 |       0 |        3 |        2 |        6 |        4 |        2 |        2 |       0 |        0 |        2 |        2 |        3 |        0 |        2 |       0 |        0 |        0 |        3 |        2 |        1 |        0 |       0 |      0 |      1 |      2 |      8 |      4 |      5 |      2 |     25 |      0 |      0 |      0 |      7 |     15 |      4 |      3 |      3 |     59 |      0 |      0 |      1 |      8 |      5 |      3 |      2 |      0 |     20 |      0 |      0 |      1 |      4 |      3 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5433100 |      33 |     10 |     16 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     17 |     16 |       1 |       2 |       0 |       0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        3 |        1 |        2 |       0 |        0 |        0 |        2 |        1 |        3 |        2 |       0 |        0 |        0 |        1 |        4 |        3 |        0 |       0 |        1 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5433200 |       5 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5434000 |     115 |     23 |     65 |     1 |    0 |     1 |    1 |    1 |     2 |    0 |     21 |    0 |    0 |    0 |    0 |     49 |     66 |       3 |       1 |       1 |       0 |      1 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |        1 |        1 |        1 |        2 |        6 |       0 |        0 |        0 |        2 |        4 |        2 |        3 |       1 |        4 |        1 |        3 |        2 |        6 |       10 |       1 |        0 |        3 |       10 |        5 |        5 |       14 |       1 |        0 |        1 |        2 |        1 |        4 |        0 |       0 |        0 |        0 |        2 |        4 |        4 |        2 |       1 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |      2 |      2 |      1 |      2 |     11 |      0 |      0 |      0 |     11 |      8 |      6 |      5 |      5 |     30 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      2 |      9 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5435400 |      38 |     13 |     19 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     16 |     22 |       0 |       0 |       0 |       0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        1 |        6 |        2 |        2 |       0 |        1 |        0 |        0 |        6 |        3 |        2 |       0 |        0 |        2 |        1 |        1 |        2 |        0 |       1 |        0 |        0 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      1 |      6 |      1 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
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| 5445000 |     114 |     26 |     67 |     5 |    0 |     0 |    0 |    1 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     56 |     58 |       4 |       7 |       3 |       2 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        3 |        2 |        2 |       1 |        0 |        3 |        0 |        5 |        3 |        2 |       2 |        2 |        3 |        2 |        4 |        7 |       11 |       4 |        0 |        0 |        2 |       13 |        7 |       10 |       2 |        1 |        1 |        0 |        2 |        3 |        0 |       0 |        1 |        2 |        1 |        4 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        2 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      3 |      2 |      4 |      0 |     13 |      0 |      0 |      1 |      2 |      8 |      9 |      2 |      5 |     40 |      0 |      0 |      0 |      2 |      0 |      1 |      1 |      1 |     10 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
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| 5464100 |      22 |      8 |     11 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     11 |     11 |       0 |       0 |       0 |       1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        0 |        0 |       2 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       1 |        0 |        1 |        1 |        1 |        1 |        1 |       1 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5464300 |      35 |     12 |     16 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     16 |     19 |       5 |       2 |       0 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       1 |        1 |        0 |        2 |        4 |        0 |        2 |       0 |        1 |        0 |        1 |        2 |        1 |        4 |       1 |        0 |        0 |        1 |        2 |        1 |        1 |       1 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        3 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      2 |     10 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5464400 |       3 |      0 |      2 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5464600 |      29 |      9 |     12 |     0 |    0 |     2 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     16 |     13 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        0 |        1 |       0 |        0 |        1 |        0 |        2 |        1 |        1 |       0 |        1 |        0 |        2 |        3 |        2 |        1 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5464700 |      42 |      2 |     31 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     21 |     21 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        2 |        6 |        2 |        4 |       1 |        0 |        2 |        4 |        4 |        2 |        2 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      3 |      1 |      5 |      1 |     17 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5465000 |     363 |     85 |    208 |     8 |    0 |     3 |    5 |    1 |     2 |    0 |     51 |    0 |    0 |    0 |    0 |    173 |    190 |      10 |      10 |       9 |       1 |      9 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      1 |        0 |        3 |       10 |        8 |       10 |        5 |       2 |        4 |        3 |       13 |       10 |        7 |        7 |       3 |        7 |       10 |       15 |       31 |       14 |       16 |       7 |        4 |       10 |       22 |       30 |       18 |       17 |       7 |        5 |        4 |        6 |        5 |        6 |        2 |       0 |        3 |        7 |        3 |        8 |        2 |        0 |       0 |        3 |        0 |        2 |        1 |        1 |        0 |       0 |        2 |        3 |        2 |        3 |        2 |        0 |       0 |      0 |      2 |     10 |     13 |      7 |      4 |      3 |     46 |      0 |      0 |      0 |     30 |     31 |     16 |     10 |      4 |    117 |      0 |      0 |      0 |     11 |      5 |      1 |      1 |      0 |     33 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 5465100 |     346 |     70 |    208 |     4 |    0 |     8 |    1 |    0 |     1 |    0 |     54 |    0 |    0 |    0 |    0 |    153 |    193 |       6 |      11 |       2 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        3 |        4 |        1 |        2 |        7 |       11 |       3 |        0 |        2 |        5 |        7 |        8 |       15 |       2 |        5 |        9 |       14 |       19 |       16 |       32 |       0 |        7 |       12 |       26 |       20 |        8 |       39 |       1 |        1 |        3 |        3 |        8 |        3 |        4 |       0 |        2 |        6 |        6 |        9 |        7 |        1 |       1 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |        2 |        1 |        1 |        3 |        2 |        0 |       0 |      0 |      1 |      5 |     11 |      9 |      5 |     12 |     27 |      0 |      0 |      2 |     20 |     22 |     15 |     15 |     21 |    113 |      0 |      0 |      1 |     10 |      7 |      2 |      0 |      1 |     33 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5465200 |      44 |      8 |     28 |     1 |    0 |     0 |    1 |    0 |     1 |    0 |      5 |    0 |    0 |    0 |    0 |     20 |     24 |       0 |       2 |       0 |       2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        1 |        1 |        0 |        4 |        4 |        3 |       0 |        2 |        1 |        0 |        5 |        5 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      1 |     22 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5465300 |      91 |     25 |     55 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     46 |     45 |       2 |       2 |       0 |       1 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        4 |        3 |       0 |        0 |        0 |        2 |        5 |        5 |        2 |       1 |        2 |        2 |        7 |       11 |        3 |        3 |       2 |        1 |        3 |        4 |       12 |        2 |        3 |       0 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |        1 |        1 |        0 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      6 |      2 |      2 |      0 |      3 |     10 |      0 |      0 |      0 |      6 |     10 |      3 |      1 |      4 |     31 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5465400 |     234 |     51 |    132 |    15 |    0 |     1 |    2 |    0 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |    114 |    120 |       7 |       6 |       4 |       3 |      3 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        3 |        5 |        7 |        4 |       0 |        1 |        4 |        8 |        5 |        7 |        5 |       1 |        7 |        8 |        8 |       22 |       14 |        7 |       1 |        6 |        6 |       14 |       15 |       15 |        8 |       1 |        5 |        2 |        4 |        4 |        2 |        1 |       0 |        2 |        0 |        7 |        3 |        2 |        0 |       0 |        0 |        3 |        3 |        2 |        1 |        0 |       0 |        1 |        1 |        6 |        2 |        0 |        0 |       0 |      0 |      1 |      8 |     13 |      3 |      1 |      8 |     17 |      0 |      0 |      1 |     14 |     21 |      7 |      7 |      3 |     79 |      0 |      0 |      1 |      7 |      2 |      1 |      0 |      0 |     21 |      0 |      0 |      0 |      3 |      5 |      0 |      1 |      2 |      8 |      0 |     37 | s03      | R    |
| 5465900 |     112 |     17 |     73 |     4 |    0 |     1 |    1 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     55 |     57 |       0 |       0 |       1 |       1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        2 |        2 |       0 |        0 |        0 |        2 |        5 |        2 |        1 |       0 |        3 |        5 |        8 |        9 |        6 |        3 |       0 |        2 |        5 |       12 |        9 |        6 |        5 |       0 |        0 |        2 |        2 |        1 |        3 |        1 |       0 |        0 |        2 |        2 |        2 |        0 |        1 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      4 |      2 |      1 |      0 |      9 |      0 |      0 |      0 |      9 |      9 |      2 |      4 |      7 |     42 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5466000 |     562 |    136 |    307 |    18 |    0 |     5 |    8 |    4 |     3 |    0 |     81 |    0 |    0 |    0 |    0 |    263 |    299 |      14 |      10 |       5 |       1 |      4 |     10 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       1 |       0 |      1 |      2 |      1 |      0 |        3 |        4 |        4 |       15 |       10 |        9 |       5 |        4 |        6 |       13 |       25 |       23 |       10 |       5 |       13 |        8 |       35 |       36 |       35 |       26 |       2 |        6 |       12 |       36 |       43 |       27 |       26 |       2 |        4 |        1 |        7 |       11 |        8 |        5 |       1 |        7 |        6 |        8 |       14 |        7 |        2 |       0 |        5 |        3 |        4 |        2 |        6 |        1 |       0 |        3 |        4 |        3 |        3 |        3 |        1 |       0 |      0 |      3 |     29 |     18 |      6 |      1 |      5 |     74 |      0 |      0 |      2 |     43 |     56 |     17 |      7 |      8 |    174 |      0 |      0 |      2 |     20 |      8 |      3 |      3 |      2 |     43 |      0 |      0 |      2 |      2 |      5 |      0 |      1 |      0 |     28 |      0 |     37 | s03      | R    |
| 5466100 |     126 |     27 |     79 |     1 |    0 |     3 |    0 |    0 |     1 |    0 |     15 |    0 |    0 |    0 |    0 |     60 |     66 |       1 |       4 |       0 |       0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        5 |        2 |       0 |        1 |        0 |        2 |        6 |        2 |        6 |       1 |        5 |        6 |        7 |        9 |        6 |        4 |       2 |        2 |        3 |        7 |       16 |        5 |        7 |       0 |        1 |        0 |        1 |        5 |        0 |        2 |       0 |        0 |        0 |        2 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      4 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |     12 |     20 |      3 |      0 |      3 |     41 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      2 |      9 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5466300 |     660 |    154 |    365 |    20 |    0 |     4 |    5 |    0 |     7 |    0 |    105 |    0 |    0 |    0 |    0 |    308 |    352 |      11 |      14 |       4 |       5 |      5 |     16 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        3 |        9 |       19 |       16 |        6 |       0 |        6 |       11 |       22 |       30 |       13 |       13 |       0 |       13 |       15 |       43 |       51 |       30 |       28 |       1 |       19 |       21 |       47 |       54 |       18 |       23 |       2 |        8 |        8 |       10 |       14 |        6 |        6 |       0 |        7 |        4 |       13 |       15 |        7 |        7 |       0 |        4 |        4 |        1 |        4 |        3 |        0 |       0 |        4 |        2 |        6 |        5 |        3 |        0 |       0 |      0 |      2 |     37 |     22 |      6 |      7 |     11 |     69 |      0 |      0 |      8 |     41 |     63 |     18 |     19 |     24 |    192 |      0 |      0 |      2 |     20 |     17 |      0 |      7 |      2 |     57 |      0 |      0 |      1 |      7 |      7 |      1 |      2 |      0 |     18 |      0 |     37 | s03      | R    |
| 5466400 |     172 |     48 |     89 |     2 |    0 |     0 |    0 |    2 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |     87 |     85 |       1 |       1 |       1 |       0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        4 |        2 |        2 |        5 |        5 |        7 |       0 |        2 |        2 |        6 |        5 |        4 |        4 |       0 |        6 |        3 |       11 |       11 |        9 |        3 |       0 |        7 |        3 |       14 |       11 |        7 |        3 |       1 |        0 |        6 |        5 |        4 |        1 |        0 |       1 |        1 |        3 |        4 |        3 |        2 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |      7 |      3 |      6 |     10 |     20 |      0 |      0 |      3 |      4 |     10 |      2 |      7 |      2 |     61 |      0 |      0 |      0 |      3 |      9 |      0 |      1 |      0 |     17 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5466500 |     152 |     28 |     88 |     4 |    0 |     1 |    2 |    1 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     76 |     76 |       1 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        4 |        2 |        4 |        2 |       0 |        1 |        0 |        2 |        3 |        6 |        3 |       0 |        2 |        8 |        7 |        4 |       15 |        5 |       1 |        3 |        1 |       10 |       12 |       13 |        5 |       2 |        3 |        2 |        2 |        7 |        3 |        0 |       0 |        0 |        2 |        4 |        2 |        3 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |      4 |      2 |      0 |      1 |     16 |      0 |      0 |      0 |      4 |     11 |      5 |      4 |      7 |     57 |      0 |      0 |      3 |      4 |      3 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 5466700 |       2 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5466800 |      75 |     10 |     45 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     36 |     39 |       2 |       6 |       1 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        0 |        0 |        0 |        1 |        3 |        0 |       1 |        0 |        1 |        1 |        2 |        1 |        0 |       0 |        1 |        5 |        3 |        5 |        6 |        2 |       0 |        0 |        1 |        5 |        8 |        7 |        2 |       0 |        1 |        0 |        1 |        3 |        3 |        1 |       0 |        1 |        0 |        1 |        2 |        4 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |      9 |      8 |      5 |      2 |      3 |     17 |      0 |      0 |      1 |      2 |      0 |      2 |      1 |      1 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5466900 |      45 |      9 |     27 |     2 |    0 |     1 |    0 |    1 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     22 |     23 |       2 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        2 |        0 |        1 |       1 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        1 |        2 |        5 |        4 |        1 |       0 |        0 |        0 |        4 |        4 |        3 |        3 |       0 |        3 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      9 |      3 |      1 |      1 |     13 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5467000 |     517 |    128 |    287 |    11 |    0 |     1 |    3 |    2 |     4 |    0 |     81 |    0 |    0 |    0 |    0 |    242 |    275 |      14 |       5 |       7 |       0 |      0 |     15 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        5 |        2 |       10 |       17 |       10 |        8 |       1 |        1 |        8 |       12 |       24 |       11 |       13 |       6 |       13 |       11 |       22 |       48 |       26 |       23 |       2 |       19 |       11 |       34 |       36 |       22 |       16 |       4 |        2 |        5 |        7 |        8 |       11 |        0 |       0 |        7 |       10 |       11 |        9 |        7 |        3 |       1 |        3 |        1 |        1 |        5 |        0 |        1 |       0 |        0 |        2 |        1 |        3 |        2 |        2 |       0 |      0 |      0 |     17 |     13 |      7 |      7 |      5 |     79 |      0 |      0 |      3 |     33 |     51 |     25 |      5 |     16 |    154 |      0 |      0 |      0 |     18 |      9 |      4 |      6 |      5 |     39 |      0 |      0 |      0 |      5 |      2 |      2 |      2 |      0 |     10 |      0 |     37 | s03      | R    |
| 5467100 |     819 |    159 |    511 |    15 |    0 |     7 |    7 |    1 |     3 |    0 |    116 |    0 |    0 |    0 |    0 |    386 |    433 |      12 |      14 |       8 |       0 |      6 |     28 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        4 |        8 |       18 |       21 |       28 |       0 |        5 |        4 |       12 |       19 |       17 |       22 |       1 |        8 |       10 |       28 |       50 |       39 |       97 |       2 |       15 |       11 |       42 |       49 |       50 |      108 |       2 |        5 |        5 |        6 |       16 |       14 |       10 |       1 |       10 |        6 |       16 |       10 |       10 |        7 |       0 |        2 |        3 |        6 |        3 |        2 |        0 |       0 |        0 |        5 |        6 |        5 |        1 |        0 |       0 |      0 |      0 |     17 |     28 |      3 |     15 |      7 |     89 |      0 |      0 |      1 |     53 |     78 |     29 |     34 |     46 |    270 |      0 |      0 |      1 |     15 |     10 |      4 |      2 |      2 |     82 |      0 |      0 |      0 |      4 |      7 |      3 |      0 |      0 |     19 |      0 |     37 | s03      | R    |
| 5467200 |     557 |    129 |    303 |    19 |    0 |     4 |    4 |    1 |     1 |    0 |     96 |    0 |    0 |    0 |    0 |    273 |    284 |      19 |      21 |       6 |       4 |      4 |      9 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        3 |        9 |       13 |       16 |       12 |       3 |        5 |        6 |       15 |       25 |       10 |        8 |       2 |       15 |       13 |       34 |       41 |       27 |       14 |       5 |       20 |       15 |       38 |       38 |       21 |       16 |       6 |        6 |        2 |        9 |       13 |       12 |        4 |       0 |        9 |        5 |       13 |       15 |        4 |        4 |       0 |        3 |        6 |        4 |        5 |        2 |        0 |       0 |        0 |        4 |        1 |        2 |        1 |        1 |       0 |      0 |      1 |     21 |     31 |      7 |      3 |      7 |     59 |      0 |      0 |      0 |     42 |     43 |     12 |      7 |     12 |    187 |      0 |      0 |      0 |     18 |      8 |     11 |      3 |      4 |     52 |      0 |      0 |      1 |      3 |      2 |      5 |      0 |      2 |     16 |      0 |     37 | s03      | R    |
| 5467300 |     554 |    124 |    301 |    16 |    0 |     5 |    2 |    2 |     2 |    0 |    102 |    0 |    0 |    0 |    0 |    265 |    289 |      10 |      13 |       8 |       2 |      9 |     18 |      2 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        3 |        7 |       21 |        6 |        5 |       0 |        7 |        5 |       23 |       23 |        9 |       10 |       1 |       16 |       12 |       39 |       46 |       17 |       20 |       4 |        7 |       19 |       45 |       36 |       18 |       22 |       0 |        8 |        9 |       13 |       17 |        4 |        4 |       0 |        8 |        5 |       15 |       15 |        3 |        0 |       1 |        2 |        0 |        5 |        2 |        1 |        0 |       0 |        1 |        5 |        4 |        6 |        1 |        0 |       0 |      0 |      1 |     25 |     11 |     11 |      4 |      6 |     66 |      0 |      0 |      4 |     61 |     51 |     10 |     14 |     18 |    143 |      0 |      0 |      4 |     19 |     14 |      4 |      1 |      3 |     57 |      0 |      0 |      0 |      6 |      8 |      1 |      0 |      0 |     12 |      0 |     37 | s03      | R    |
| 5467400 |     587 |    134 |    334 |    16 |    0 |     4 |    4 |    1 |     1 |    0 |     93 |    0 |    0 |    0 |    0 |    273 |    314 |      12 |      21 |       9 |       7 |      6 |     15 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        3 |       12 |       18 |        9 |       10 |       2 |        7 |        9 |       22 |       22 |       10 |        7 |       1 |       16 |       17 |       53 |       47 |       22 |        7 |       0 |       18 |       17 |       57 |       48 |       20 |       12 |       0 |        8 |        1 |        8 |       14 |        4 |        3 |       0 |        7 |        5 |       19 |       16 |        4 |        4 |       0 |        2 |        3 |        7 |        3 |        2 |        0 |       0 |        0 |        1 |        6 |        1 |        1 |        0 |       0 |      0 |      0 |     17 |     27 |     10 |     10 |      8 |     62 |      0 |      0 |      2 |     48 |     51 |     16 |     17 |     22 |    178 |      0 |      0 |      3 |     14 |     12 |      4 |      2 |      3 |     55 |      0 |      0 |      1 |      4 |      6 |      0 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 5467500 |     557 |    103 |    320 |    17 |    0 |     4 |    5 |    1 |     1 |    0 |    106 |    0 |    0 |    0 |    0 |    273 |    284 |      16 |       6 |       6 |       1 |      0 |     14 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       2 |      2 |      1 |      1 |      0 |        7 |        3 |        5 |        9 |        8 |        3 |       0 |        3 |        6 |       14 |       29 |        9 |        6 |       1 |        9 |       13 |       46 |       55 |       24 |       16 |       0 |       14 |       15 |       55 |       38 |       19 |       16 |       0 |        7 |        8 |       18 |       14 |       10 |        3 |       0 |        5 |        5 |       16 |       12 |        8 |        0 |       0 |        4 |        3 |        2 |        3 |        2 |        1 |       0 |        2 |        1 |        5 |        3 |        0 |        2 |       0 |      0 |      0 |     13 |     12 |      7 |      8 |      9 |     54 |      0 |      0 |      0 |     31 |     66 |     19 |     18 |     19 |    167 |      0 |      0 |      0 |     13 |      8 |      6 |      1 |     13 |     65 |      0 |      0 |      0 |      3 |      3 |      4 |      3 |      0 |     15 |      0 |     37 | s03      | R    |
| 5467600 |     505 |    107 |    287 |    16 |    0 |     4 |    1 |    1 |     3 |    0 |     86 |    0 |    0 |    0 |    0 |    242 |    263 |       7 |      21 |       2 |       4 |      6 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      0 |      0 |        3 |        1 |        6 |       18 |        9 |        2 |       0 |        6 |        4 |       17 |       23 |        8 |        9 |       1 |       12 |        8 |       45 |       54 |       14 |       20 |       1 |       10 |       13 |       43 |       37 |       13 |       16 |       1 |        5 |        2 |       13 |        7 |        4 |        3 |       0 |       10 |        2 |       17 |       14 |        3 |        5 |       1 |        2 |        3 |        3 |        4 |        3 |        0 |       0 |        1 |        1 |        1 |        4 |        2 |        1 |       0 |      0 |      1 |     15 |     19 |     10 |      7 |      7 |     48 |      0 |      0 |      1 |     33 |     52 |     14 |     21 |     28 |    138 |      0 |      0 |      2 |     16 |     10 |      3 |      0 |      7 |     48 |      0 |      0 |      0 |      1 |      7 |      2 |      0 |      2 |     13 |      0 |     37 | s03      | R    |
| 5467700 |     423 |     99 |    235 |    10 |    0 |     3 |    5 |    1 |     1 |    0 |     69 |    0 |    0 |    0 |    0 |    202 |    221 |       5 |      13 |       5 |       1 |      7 |     11 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        4 |        2 |        3 |       12 |       11 |        4 |       1 |        6 |        4 |       18 |       15 |       10 |        8 |       1 |        8 |        7 |       21 |       35 |       24 |       22 |       2 |       13 |        5 |       29 |       27 |       24 |       17 |       1 |        6 |        2 |        8 |        7 |        5 |        6 |       0 |        5 |        2 |       15 |       11 |        1 |        1 |       0 |        2 |        5 |        2 |        1 |        1 |        1 |       0 |        1 |        1 |        3 |        3 |        0 |        0 |       0 |      0 |      0 |      7 |     17 |     13 |      5 |      6 |     51 |      0 |      0 |      0 |     32 |     38 |     13 |     17 |     16 |    119 |      0 |      0 |      0 |     13 |      6 |      4 |      6 |      2 |     38 |      0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5467800 |     563 |    128 |    318 |    18 |    0 |     3 |    7 |    0 |     0 |    0 |     89 |    0 |    0 |    0 |    0 |    264 |    299 |      14 |      19 |       5 |       0 |      5 |      7 |      6 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        9 |        2 |        4 |       16 |        9 |       10 |       0 |       10 |        5 |       18 |       21 |       10 |       14 |       0 |       11 |       19 |       48 |       45 |       15 |       20 |       1 |       14 |       16 |       49 |       38 |       15 |       26 |       1 |        2 |        1 |       12 |       19 |        3 |        1 |       1 |        9 |        8 |       12 |       12 |        6 |        3 |       0 |        0 |        4 |        2 |        6 |        1 |        3 |       0 |        2 |        2 |        1 |        5 |        2 |        0 |       0 |      0 |      0 |     23 |     13 |     12 |      5 |      7 |     68 |      0 |      0 |      0 |     28 |     44 |     25 |     14 |     27 |    180 |      0 |      0 |      0 |     17 |     12 |      4 |      7 |      6 |     43 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      2 |     17 |      0 |     37 | s03      | R    |
| 5467900 |     120 |     22 |     67 |     2 |    0 |     0 |    2 |    1 |     1 |    0 |     25 |    0 |    0 |    0 |    0 |     56 |     64 |       3 |       2 |       4 |       0 |      0 |      3 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        1 |        2 |        1 |       0 |        1 |        1 |        3 |        8 |        2 |        0 |       0 |        1 |        2 |        9 |        8 |        7 |        6 |       0 |        4 |        2 |        9 |        5 |        4 |       10 |       0 |        1 |        3 |        2 |        5 |        2 |        0 |       0 |        2 |        0 |        6 |        4 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |     15 |      0 |      0 |      0 |     11 |     11 |      7 |      1 |      7 |     30 |      0 |      0 |      0 |      4 |      3 |      4 |      1 |      0 |     13 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5468000 |     470 |    116 |    222 |    18 |    0 |     7 |    6 |    0 |     4 |    0 |     97 |    0 |    0 |    0 |    0 |    214 |    256 |      24 |      12 |       9 |       1 |      8 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        4 |        7 |       10 |        8 |        8 |       3 |        4 |        8 |       18 |       19 |       10 |        7 |       7 |       10 |       17 |       22 |       25 |       19 |       12 |       3 |       13 |       18 |       23 |       27 |       16 |       13 |       4 |        4 |       10 |       11 |       12 |        6 |        1 |       0 |       11 |       11 |        8 |       16 |        3 |        3 |       1 |        1 |        5 |        4 |        5 |        4 |        0 |       0 |        3 |        5 |        6 |        1 |        1 |        0 |       0 |      0 |      2 |     16 |     15 |      7 |      3 |      3 |     70 |      0 |      0 |      3 |     25 |     30 |     14 |      6 |      3 |    141 |      0 |      0 |      2 |     24 |     12 |      4 |      3 |      1 |     51 |      0 |      0 |      0 |      6 |      5 |      2 |      1 |      2 |     19 |      0 |     37 | s03      | R    |
| 5468100 |     263 |     76 |    126 |     8 |    0 |     3 |    1 |    1 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    120 |    143 |      14 |       5 |       5 |       1 |      2 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        5 |        7 |        9 |        5 |       2 |        5 |        4 |        6 |       15 |        5 |        5 |       3 |        1 |        7 |       15 |       16 |       13 |        2 |       3 |        3 |       16 |       14 |       15 |        9 |       10 |       2 |        4 |        5 |        5 |        4 |        1 |        0 |       1 |        7 |        5 |        4 |        5 |        2 |        3 |       1 |        1 |        2 |        2 |        2 |        2 |        1 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |     10 |     23 |      1 |      3 |      3 |     36 |      0 |      0 |      0 |     13 |     17 |     11 |      2 |      3 |     80 |      0 |      0 |      2 |      9 |      5 |      1 |      2 |      2 |     26 |      0 |      0 |      0 |      3 |      4 |      0 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 5468200 |      26 |      8 |     11 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     15 |     11 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        2 |        2 |        1 |        1 |       0 |        0 |        0 |        3 |        0 |        0 |        2 |       0 |        1 |        1 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5468300 |      31 |      4 |     18 |     2 |    0 |     0 |    1 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     17 |     14 |       0 |       3 |       0 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        1 |        0 |        2 |        6 |        1 |        0 |       0 |        1 |        1 |        2 |        2 |        1 |        0 |       1 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      1 |      3 |      1 |      8 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5468400 |     424 |     78 |    248 |     6 |    0 |     1 |    2 |    0 |     2 |    0 |     87 |    0 |    0 |    0 |    0 |    203 |    221 |       4 |      15 |       8 |       0 |      7 |      8 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      5 |      0 |      0 |        1 |        2 |        5 |        5 |        7 |        6 |       0 |        1 |        7 |        9 |       13 |       14 |        8 |       0 |        6 |       16 |       40 |       30 |       24 |       13 |       2 |        3 |       23 |       36 |       25 |       20 |       10 |       0 |        5 |        7 |       12 |        6 |        5 |        3 |       0 |        8 |        8 |       16 |        9 |        6 |        2 |       0 |        2 |        1 |        2 |        1 |        2 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      2 |      6 |      3 |      0 |      0 |      0 |     67 |      0 |      0 |      6 |     15 |      4 |      2 |      2 |      1 |    218 |      0 |      0 |      2 |      7 |      1 |      0 |      0 |      0 |     77 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5468500 |      94 |     31 |     43 |     2 |    0 |     1 |    0 |    0 |     1 |    0 |     16 |    0 |    0 |    0 |    0 |     42 |     52 |       7 |       7 |       2 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        3 |        3 |        2 |       2 |        0 |        3 |        4 |        3 |        5 |        2 |       1 |        4 |        3 |        2 |        4 |        5 |        1 |       0 |        2 |        4 |        2 |        9 |        6 |        1 |       0 |        0 |        2 |        3 |        2 |        1 |        1 |       0 |        2 |        0 |        2 |        1 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      0 |      1 |      4 |      0 |      2 |     24 |      0 |      0 |      1 |      2 |      3 |      6 |      1 |      0 |     30 |      0 |      0 |      0 |      3 |      1 |      2 |      1 |      3 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5468600 |     181 |     45 |     96 |     1 |    0 |     2 |    4 |    0 |     3 |    0 |     30 |    0 |    0 |    0 |    0 |     88 |     93 |       0 |       4 |       3 |       0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        4 |        5 |        2 |        5 |       1 |        1 |        2 |        4 |        7 |        5 |        5 |       1 |        4 |        5 |       10 |       17 |        4 |       10 |       2 |        3 |        1 |        8 |       18 |        4 |       10 |       0 |        1 |        1 |        4 |        1 |        3 |        2 |       0 |        1 |        2 |        8 |        5 |        1 |        1 |       0 |        1 |        1 |        0 |        0 |        2 |        0 |       0 |        1 |        2 |        1 |        0 |        2 |        0 |       0 |      0 |      0 |      6 |      7 |      1 |      1 |      3 |     27 |      0 |      0 |      0 |      8 |     24 |      3 |      5 |      2 |     54 |      0 |      0 |      0 |      3 |      8 |      1 |      0 |      1 |     17 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 5468700 |      97 |     29 |     48 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     48 |     49 |       7 |       0 |       2 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        2 |        2 |        5 |        0 |       0 |        0 |        3 |        2 |        5 |        2 |        3 |       1 |        1 |        6 |        5 |        6 |        2 |        2 |       0 |        3 |        1 |        7 |        7 |        7 |        0 |       1 |        1 |        1 |        2 |        4 |        0 |        0 |       2 |        1 |        1 |        2 |        3 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      6 |      2 |      3 |      0 |      0 |     17 |      0 |      0 |      0 |      9 |     10 |      0 |      1 |      4 |     24 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |     13 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5468800 |     239 |     70 |    121 |     6 |    0 |     1 |    2 |    1 |     0 |    0 |     38 |    0 |    0 |    0 |    0 |    115 |    124 |       3 |       6 |       0 |       1 |      1 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        2 |        6 |        5 |        4 |        4 |       3 |        3 |        3 |        7 |       14 |        7 |        6 |       4 |        6 |        6 |       17 |       15 |       11 |        7 |       4 |        4 |        6 |       20 |       10 |        5 |        8 |       2 |        3 |        5 |        1 |        4 |        2 |        1 |       1 |        3 |        3 |        5 |        4 |        3 |        2 |       1 |        1 |        3 |        1 |        0 |        1 |        0 |       0 |        0 |        3 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      7 |     12 |      4 |      2 |      3 |     42 |      0 |      0 |      2 |     10 |     22 |      4 |      0 |      8 |     75 |      0 |      0 |      1 |      5 |      5 |      0 |      2 |      1 |     24 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5468900 |     163 |     48 |     73 |     8 |    0 |     2 |    3 |    1 |     1 |    0 |     27 |    0 |    0 |    0 |    0 |     77 |     86 |      16 |       7 |       6 |       1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        3 |        3 |        4 |        5 |        4 |       0 |        2 |        3 |        3 |        9 |        3 |        4 |       2 |        2 |        9 |        8 |        6 |        2 |        3 |       4 |        7 |       10 |        8 |        6 |        5 |        2 |       1 |        3 |        1 |        4 |        2 |        1 |        0 |       0 |        3 |        3 |        7 |        1 |        1 |        0 |       1 |        6 |        2 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        3 |        0 |        0 |        1 |       0 |      0 |      0 |      7 |      8 |      1 |      2 |      1 |     29 |      0 |      0 |      1 |     12 |     12 |      1 |      1 |      1 |     45 |      0 |      0 |      0 |      6 |      3 |      0 |      1 |      1 |     16 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      1 |     11 |      0 |     37 | s03      | R    |
| 5469000 |     415 |    101 |    220 |    19 |    0 |     0 |    5 |    1 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    203 |    212 |      20 |      14 |      10 |       1 |      4 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        5 |        5 |        7 |       11 |        7 |       0 |        6 |        6 |       14 |       16 |       12 |        7 |       2 |       10 |       16 |       38 |       24 |       15 |       11 |       7 |        6 |       15 |       30 |       22 |       13 |       10 |       3 |        5 |        6 |       11 |        6 |        7 |        0 |       0 |        3 |        9 |        8 |       10 |        2 |        1 |       0 |        1 |        2 |        4 |        1 |        0 |        1 |       0 |        4 |        3 |        5 |        4 |        1 |        0 |       0 |      0 |      0 |     16 |     20 |      5 |      4 |      4 |     52 |      0 |      0 |      0 |     28 |     28 |     20 |      8 |     11 |    125 |      0 |      0 |      0 |     15 |      5 |      3 |      1 |      2 |     42 |      0 |      0 |      1 |      2 |      3 |      0 |      1 |      0 |     19 |      0 |     37 | s03      | R    |
| 5469100 |     566 |    154 |    272 |    18 |    0 |     5 |    5 |    2 |     3 |    0 |    107 |    0 |    0 |    0 |    0 |    244 |    322 |      37 |      28 |      16 |       6 |      6 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      3 |      0 |        4 |        6 |       14 |       10 |       10 |       11 |       2 |        6 |       14 |       24 |       22 |       10 |       20 |       1 |       15 |       29 |       27 |       26 |        9 |       15 |       3 |       19 |       37 |       28 |       24 |       20 |       19 |       1 |        8 |       10 |       14 |        8 |        5 |        3 |       0 |        8 |       19 |       15 |        8 |        5 |        2 |       2 |        1 |        2 |        8 |        4 |        0 |        0 |       0 |        4 |        4 |        6 |        0 |        1 |        3 |       0 |      0 |      1 |     25 |     22 |      8 |      4 |      5 |     89 |      0 |      0 |      6 |     46 |     26 |      6 |      6 |      9 |    173 |      0 |      0 |      0 |     14 |     10 |      2 |      0 |      1 |     80 |      0 |      0 |      0 |      5 |      6 |      1 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 5469200 |     575 |    157 |    330 |    15 |    0 |     4 |    2 |    0 |     0 |    0 |     67 |    0 |    0 |    0 |    0 |    240 |    335 |      11 |      13 |       3 |       5 |      6 |      9 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      1 |        3 |        2 |        5 |        5 |        9 |       28 |       3 |        2 |        3 |        6 |       16 |       18 |       54 |       3 |       10 |       14 |       29 |       26 |       14 |       49 |       3 |       10 |       10 |       27 |       27 |       23 |       82 |       6 |        3 |        2 |        3 |        6 |        7 |       10 |       0 |        6 |        8 |        4 |        3 |        7 |        8 |       0 |        0 |        4 |        2 |        0 |        1 |        2 |       0 |        5 |        1 |        1 |        1 |        1 |        3 |       0 |      0 |      2 |     23 |     21 |     13 |     10 |     14 |     74 |      0 |      0 |      2 |     34 |     63 |     20 |     14 |     17 |    180 |      0 |      0 |      1 |      6 |      9 |      4 |      0 |      2 |     45 |      0 |      0 |      0 |      1 |      2 |      2 |      1 |      0 |     15 |      0 |     37 | s03      | R    |
| 5469300 |     191 |     42 |    120 |     6 |    0 |     2 |    2 |    0 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     98 |     93 |       4 |       5 |       0 |       0 |      0 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        3 |        8 |        4 |        4 |       1 |        3 |        1 |        2 |        5 |        6 |        1 |       3 |        7 |       10 |       14 |       12 |       11 |        5 |       1 |        3 |        7 |       20 |       15 |        8 |        4 |       3 |        2 |        1 |        3 |        2 |        2 |        1 |       0 |        2 |        1 |        1 |        3 |        0 |        1 |       0 |        0 |        3 |        1 |        0 |        0 |        1 |       1 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      6 |      4 |      2 |      1 |      0 |     29 |      0 |      0 |      0 |     11 |     22 |     10 |      3 |      4 |     70 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 5469400 |     232 |     45 |    137 |     6 |    0 |     3 |    1 |    1 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |    115 |    117 |       8 |       5 |       1 |       1 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        3 |        4 |        3 |        4 |       1 |        0 |        2 |        6 |        9 |        4 |        2 |       2 |        6 |       12 |       21 |       17 |       10 |        6 |       2 |        2 |        8 |       17 |       16 |       11 |        9 |       0 |        2 |        2 |        3 |        5 |        2 |        0 |       0 |        5 |        3 |        4 |       10 |        1 |        1 |       0 |        0 |        2 |        2 |        1 |        1 |        1 |       0 |        1 |        2 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      6 |      7 |      4 |      2 |      2 |     24 |      0 |      0 |      0 |     24 |     21 |      3 |      7 |      9 |     73 |      0 |      0 |      0 |      4 |      4 |      2 |      0 |      1 |     27 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5469500 |     510 |    137 |    239 |    20 |    0 |     6 |    1 |    0 |     2 |    0 |    105 |    0 |    0 |    0 |    0 |    224 |    286 |      25 |      23 |      12 |       2 |      4 |      5 |      4 |      1 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        4 |       12 |       14 |        8 |       11 |       0 |        7 |       10 |       22 |       18 |       13 |       12 |       2 |       10 |       12 |       28 |       32 |       18 |       15 |       1 |        9 |       20 |       29 |       33 |       13 |       16 |       3 |       13 |        5 |       13 |       10 |        2 |        2 |       0 |       14 |       10 |       18 |       11 |        4 |        3 |       0 |        1 |        2 |        4 |        1 |        1 |        1 |       0 |        4 |        4 |        6 |        4 |        1 |        0 |       0 |      0 |      1 |     22 |     13 |      3 |      6 |      3 |     89 |      0 |      0 |      1 |     34 |     39 |      9 |     11 |      7 |    138 |      0 |      0 |      1 |     14 |      8 |      0 |      5 |      3 |     74 |      0 |      0 |      0 |      5 |      8 |      0 |      0 |      1 |     15 |      0 |     37 | s03      | R    |
| 5469700 |      47 |     15 |     28 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     24 |     23 |       1 |       1 |       0 |       0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        2 |        3 |        0 |        0 |       0 |        1 |        0 |        1 |        4 |        0 |        1 |       1 |        1 |        1 |        2 |        3 |        4 |        2 |       0 |        2 |        0 |        1 |        8 |        2 |        2 |       0 |        2 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      4 |      2 |      2 |      0 |      1 |     19 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5469800 |     126 |     33 |     70 |     4 |    0 |     2 |    1 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     63 |     63 |       9 |       1 |       2 |       0 |      1 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        5 |        0 |        2 |        5 |        1 |       1 |        2 |        2 |        1 |        5 |        4 |        3 |       2 |        6 |        3 |        8 |        8 |        6 |        5 |       2 |        0 |        3 |        6 |        9 |        4 |        7 |       3 |        3 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        3 |        1 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      6 |     10 |      2 |      2 |      0 |     13 |      0 |      0 |      0 |      5 |     13 |      3 |      4 |      5 |     40 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 5469900 |     288 |     44 |    172 |     9 |    0 |     2 |    4 |    1 |     1 |    0 |     55 |    0 |    0 |    0 |    0 |    137 |    151 |       0 |       6 |       1 |       1 |      0 |      5 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        1 |        3 |        6 |        3 |        4 |       1 |        1 |        1 |        5 |        6 |        7 |        4 |       2 |        3 |        6 |       15 |       21 |       19 |       10 |       6 |        3 |       13 |       19 |       26 |       14 |       15 |       2 |        2 |        3 |        7 |        9 |        5 |        3 |       0 |        1 |        4 |        8 |        8 |        3 |        2 |       0 |        2 |        1 |        1 |        2 |        3 |        1 |       0 |        0 |        2 |        0 |        3 |        2 |        0 |       0 |      0 |      1 |      1 |      4 |      3 |      4 |      5 |     26 |      0 |      0 |      0 |     24 |     26 |      7 |      6 |     10 |     99 |      0 |      0 |      1 |      5 |     10 |      2 |      3 |      1 |     33 |      0 |      0 |      0 |      3 |      2 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5470000 |     172 |     44 |     84 |     6 |    0 |     1 |    1 |    0 |     2 |    0 |     34 |    0 |    0 |    0 |    0 |     74 |     98 |       2 |       6 |       7 |       1 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        4 |        4 |        3 |        4 |       1 |        1 |        5 |        6 |        9 |        5 |        1 |       0 |        3 |        8 |       10 |       11 |        4 |        4 |       0 |        4 |       10 |        9 |       11 |        1 |        8 |       1 |        3 |        4 |        6 |        2 |        0 |        0 |       0 |        5 |        5 |        6 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        4 |        1 |        0 |        1 |       1 |      0 |      1 |      7 |     12 |      0 |      0 |      1 |     23 |      0 |      0 |      1 |     14 |      9 |      2 |      1 |      2 |     55 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5470100 |     221 |     71 |    108 |     6 |    0 |     4 |    1 |    0 |     2 |    0 |     29 |    0 |    0 |    0 |    0 |    104 |    117 |       1 |       8 |       8 |       0 |      1 |      7 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        2 |        3 |        9 |        4 |        4 |       5 |        1 |        7 |       12 |        8 |        5 |        5 |       4 |        2 |        6 |       10 |       16 |       10 |        9 |       0 |        6 |        3 |       12 |       11 |        9 |       12 |       2 |        2 |        2 |        1 |        6 |        2 |        0 |       1 |        2 |        1 |        4 |        3 |        2 |        2 |       1 |        1 |        1 |        2 |        2 |        2 |        0 |       0 |        3 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      9 |     10 |      6 |      3 |      1 |     42 |      0 |      0 |      0 |     10 |     22 |      3 |      6 |     10 |     57 |      0 |      0 |      0 |      4 |      3 |      0 |      1 |      1 |     20 |      0 |      0 |      1 |      4 |      1 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 5470200 |     182 |     47 |     74 |    11 |    0 |     8 |    3 |    0 |     0 |    0 |     39 |    0 |    0 |    0 |    0 |     79 |    103 |      12 |       8 |      12 |       4 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        2 |        0 |        8 |        4 |        2 |        0 |       0 |        2 |        3 |        4 |        7 |        6 |        9 |       0 |        4 |       11 |        5 |        6 |        3 |        2 |       0 |        3 |       10 |       10 |        9 |        1 |        9 |       1 |        5 |        3 |        6 |        3 |        0 |        2 |       0 |        5 |        4 |        4 |        1 |        2 |        4 |       0 |        3 |        4 |        2 |        3 |        1 |        0 |       0 |        3 |        3 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |     11 |      4 |      0 |      0 |      0 |     32 |      0 |      0 |      0 |      5 |     10 |      1 |      1 |      0 |     57 |      0 |      0 |      1 |      8 |      2 |      1 |      0 |      1 |     26 |      0 |      0 |      0 |      7 |      2 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5470300 |       6 |      4 |      0 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5470400 |     319 |     63 |    196 |     4 |    0 |     1 |    3 |    0 |     0 |    0 |     52 |    0 |    0 |    0 |    0 |    159 |    160 |       2 |       5 |       1 |       0 |      8 |      6 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        4 |       13 |        7 |        1 |       0 |        0 |        2 |       11 |       18 |        5 |        0 |       0 |        6 |        8 |       35 |       19 |       21 |       14 |       0 |        2 |        9 |       24 |       29 |       22 |        6 |       1 |        2 |        1 |        7 |        8 |        5 |        2 |       0 |        1 |        5 |        5 |       10 |        5 |        1 |       0 |        0 |        0 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        2 |        2 |        0 |        0 |       0 |      0 |      0 |     11 |     20 |      0 |      0 |      0 |     32 |      0 |      0 |      0 |     27 |     73 |      6 |      0 |      0 |     90 |      0 |      0 |      0 |      9 |     17 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5470500 |     222 |     61 |     82 |    11 |    0 |     4 |    3 |    2 |     0 |    0 |     59 |    0 |    0 |    0 |    0 |     98 |    124 |      22 |       5 |      11 |       3 |      5 |      4 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        2 |        2 |        6 |        5 |        5 |        0 |       0 |        6 |        9 |        8 |        8 |        4 |        4 |       2 |        5 |        5 |       12 |        6 |        4 |        1 |       2 |        3 |       11 |       18 |        6 |        3 |        4 |       2 |        5 |       11 |        6 |        5 |        1 |        1 |       0 |        8 |       10 |        5 |        3 |        2 |        2 |       0 |        2 |        4 |        4 |        1 |        2 |        1 |       0 |        0 |        1 |        4 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      8 |      2 |      0 |      2 |     43 |      0 |      0 |      0 |     13 |     10 |      1 |      1 |      2 |     55 |      0 |      0 |      1 |      7 |      5 |      0 |      0 |      2 |     44 |      0 |      0 |      0 |      8 |      2 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5470600 |       7 |      1 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       2 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5470700 |      67 |     12 |     35 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     32 |     35 |       2 |       2 |       1 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        3 |        2 |        2 |        2 |        0 |       0 |        2 |        3 |        6 |        6 |        3 |        0 |       0 |        0 |        0 |        5 |        7 |        2 |        1 |       0 |        2 |        1 |        1 |        1 |        1 |        1 |       0 |        2 |        1 |        3 |        3 |        2 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      1 |      2 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      5 |      7 |      5 |      3 |      1 |     14 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5470800 |      20 |      3 |     14 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     12 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        3 |        1 |        1 |        3 |        0 |        1 |       0 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5470900 |      59 |      9 |     40 |     2 |    0 |     0 |    2 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     29 |     30 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        3 |        0 |        2 |       0 |        0 |        0 |        6 |        9 |        3 |        3 |       0 |        1 |        1 |        4 |        7 |        4 |        2 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      3 |      3 |      1 |      0 |     31 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |     37 | s03      | R    |
| 5471000 |     133 |     30 |     74 |     5 |    0 |     0 |    1 |    0 |     0 |    0 |     23 |    0 |    0 |    0 |    0 |     64 |     69 |       1 |       4 |       2 |       0 |      3 |      1 |      2 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        7 |        1 |        4 |       0 |        0 |        2 |        1 |        7 |        1 |        3 |       2 |        3 |        2 |        7 |        6 |        7 |        6 |       2 |        3 |        7 |        7 |        8 |        8 |        6 |       2 |        2 |        2 |        4 |        1 |        1 |        1 |       1 |        2 |        3 |        2 |        4 |        0 |        0 |       0 |        0 |        3 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      1 |      0 |      1 |      3 |     22 |      0 |      0 |      0 |      5 |     15 |      6 |      4 |      2 |     42 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |     18 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 5471100 |      23 |      8 |     11 |     1 |    0 |     1 |    0 |    0 |     1 |    0 |      1 |    0 |    0 |    0 |    0 |     12 |     11 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        1 |        1 |       1 |        0 |        0 |        0 |        1 |        0 |        1 |       1 |        0 |        0 |        1 |        1 |        2 |        0 |       0 |        0 |        1 |        2 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5471200 |     152 |     38 |     74 |     5 |    0 |     3 |    0 |    0 |     0 |    0 |     32 |    0 |    0 |    0 |    0 |     70 |     82 |       7 |       2 |       6 |       0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        1 |        3 |       1 |        1 |        4 |        6 |        6 |        5 |        5 |       2 |        0 |        4 |        6 |       11 |       10 |        5 |       0 |        1 |        4 |        9 |       11 |        8 |        3 |       2 |        1 |        1 |        7 |        6 |        4 |        1 |       0 |        0 |        0 |        6 |        5 |        1 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |      0 |      0 |      3 |      5 |      3 |      4 |      0 |     23 |      0 |      0 |      0 |     10 |     14 |      8 |      2 |      4 |     36 |      0 |      0 |      0 |      7 |      8 |      1 |      0 |      2 |     14 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5471300 |      21 |      4 |     14 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |     10 |     11 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        2 |        1 |       0 |        1 |        1 |        3 |        4 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5471400 |      16 |      4 |     10 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      7 |      9 |       1 |       1 |       0 |       0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        2 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5471600 |     424 |     88 |    244 |     6 |    0 |     2 |    2 |    0 |     2 |    0 |     80 |    0 |    0 |    0 |    0 |    208 |    216 |       2 |       8 |       2 |       0 |      3 |     14 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      3 |      0 |        1 |        1 |        2 |       18 |        5 |        7 |       0 |        6 |        3 |        8 |       19 |       13 |        5 |       0 |        8 |       11 |       31 |       42 |       19 |       16 |       2 |        9 |       10 |       23 |       39 |       24 |        8 |       2 |        4 |        4 |        7 |       15 |        7 |        2 |       0 |        8 |        6 |       10 |       10 |        5 |        2 |       0 |        1 |        2 |        2 |        1 |        0 |        0 |       0 |        0 |        1 |        3 |        2 |        0 |        0 |       0 |      0 |      2 |     11 |      8 |      4 |      3 |      6 |     54 |      0 |      0 |      5 |     33 |     19 |      8 |      4 |      7 |    168 |      0 |      0 |      1 |     19 |      2 |      1 |      3 |      2 |     52 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5471700 |     124 |     27 |     64 |     3 |    0 |     1 |    1 |    0 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |     61 |     63 |       6 |       2 |       1 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |        1 |        0 |        6 |        1 |        0 |       1 |        0 |        0 |        4 |        5 |        6 |        2 |       1 |        3 |        1 |        7 |        8 |        7 |        7 |       2 |        1 |        2 |        5 |       10 |        2 |        7 |       2 |        5 |        2 |        0 |        3 |        1 |        3 |       1 |        5 |        0 |        2 |        4 |        1 |        1 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      6 |      3 |      2 |      2 |     11 |      0 |      0 |      1 |      9 |     11 |      6 |      0 |      2 |     35 |      0 |      0 |      1 |      3 |      2 |      0 |      1 |      0 |     21 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5471800 |      23 |      3 |     16 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     10 |     13 |       0 |       1 |       1 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        3 |        2 |        1 |        1 |       0 |        1 |        1 |        2 |        3 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |     14 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5471900 |      98 |     22 |     46 |     1 |    0 |     1 |    1 |    0 |     3 |    0 |     24 |    0 |    0 |    0 |    0 |     52 |     46 |       1 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        4 |        3 |        1 |       0 |        1 |        0 |        1 |        4 |        2 |        2 |       0 |        1 |        0 |        3 |        7 |        6 |        2 |       3 |        2 |        1 |        4 |        4 |        4 |        7 |       2 |        4 |        1 |        1 |        4 |        3 |        2 |       0 |        1 |        0 |        2 |        3 |        2 |        1 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      0 |      0 |      1 |     13 |      0 |      0 |      0 |      5 |     12 |      1 |      3 |      1 |     24 |      0 |      0 |      0 |      6 |      4 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5472000 |     106 |     19 |     66 |     1 |    0 |     1 |    1 |    0 |     2 |    0 |     16 |    0 |    0 |    0 |    0 |     51 |     55 |       3 |       5 |       0 |       0 |      2 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        1 |        2 |        3 |       0 |        1 |        1 |        2 |        2 |        4 |        0 |       0 |        3 |        2 |        3 |       13 |        5 |        3 |       1 |        2 |        5 |        7 |       13 |        2 |        6 |       1 |        0 |        0 |        2 |        4 |        4 |        0 |       0 |        1 |        0 |        2 |        2 |        0 |        1 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      4 |      4 |      1 |      1 |      0 |      9 |      0 |      0 |      1 |      8 |     16 |      4 |      0 |      5 |     32 |      0 |      0 |      2 |      1 |      3 |      2 |      1 |      0 |      7 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5472100 |     107 |     27 |     57 |     3 |    0 |     2 |    0 |    0 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     56 |     51 |       0 |       5 |       3 |       1 |      1 |      2 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        5 |        2 |        3 |       0 |        0 |        2 |        0 |        7 |        3 |        3 |       0 |        3 |        4 |        5 |       10 |        5 |        6 |       1 |        6 |        0 |        6 |        6 |        2 |        3 |       0 |        1 |        0 |        2 |        1 |        2 |        2 |       0 |        1 |        2 |        0 |        2 |        3 |        1 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |      0 |      0 |      7 |      5 |      1 |      0 |      2 |     12 |      0 |      0 |      1 |      4 |     17 |      6 |      1 |      4 |     24 |      0 |      0 |      0 |      3 |      1 |      2 |      4 |      1 |      6 |      0 |      0 |      0 |      1 |      2 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 5472200 |      17 |      1 |     14 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      9 |      8 |       0 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        3 |        0 |       1 |        1 |        0 |        1 |        2 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5472300 |     275 |     63 |    147 |     7 |    0 |     3 |    0 |    1 |     2 |    0 |     52 |    0 |    0 |    0 |    0 |    130 |    145 |       6 |       6 |       2 |       0 |      6 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        1 |        3 |        1 |       12 |        7 |        2 |       1 |        5 |        1 |        5 |       11 |       10 |        3 |       1 |        5 |        5 |        9 |       20 |       19 |        6 |       4 |        7 |        5 |       17 |       23 |       14 |       10 |       3 |        4 |        4 |        6 |        9 |        3 |        1 |       0 |        3 |        3 |       10 |        7 |        2 |        0 |       0 |        1 |        0 |        1 |        4 |        0 |        2 |       0 |        1 |        1 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |     14 |      9 |      4 |      1 |      1 |     34 |      0 |      0 |      1 |     19 |     25 |      4 |     11 |      5 |     82 |      0 |      0 |      0 |      3 |      9 |      4 |      0 |      1 |     35 |      0 |      0 |      0 |      1 |      7 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5472400 |     156 |     24 |     91 |     5 |    0 |     1 |    1 |    7 |     0 |    0 |     27 |    0 |    0 |    0 |    0 |     78 |     78 |       4 |       3 |       1 |       0 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      1 |        0 |        0 |        3 |        1 |        2 |        1 |       0 |        2 |        1 |        2 |        6 |        2 |        4 |       0 |        3 |        2 |       17 |       19 |        7 |        2 |       0 |        2 |        2 |       17 |       13 |        5 |        2 |       0 |        2 |        0 |        2 |        7 |        2 |        0 |       0 |        1 |        3 |        2 |        8 |        0 |        0 |       0 |        1 |        0 |        3 |        2 |        1 |        1 |       0 |        0 |        1 |        0 |        5 |        0 |        0 |       0 |      0 |      0 |      1 |      6 |      3 |      0 |      0 |     14 |      0 |      0 |      1 |      4 |     16 |      0 |      1 |      1 |     68 |      0 |      0 |      0 |      2 |      5 |      0 |      1 |      0 |     19 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5472500 |     529 |     95 |    336 |     9 |    0 |     0 |    5 |    1 |     1 |    0 |     82 |    0 |    0 |    0 |    0 |    259 |    270 |       4 |       3 |       4 |       1 |      8 |     13 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      5 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      0 |      0 |      0 |        1 |        0 |        4 |       16 |       13 |        3 |       3 |        4 |        2 |       12 |       15 |       16 |        4 |       2 |       21 |       10 |       34 |       54 |       35 |       19 |       1 |       16 |        7 |       38 |       49 |       32 |       14 |       6 |        1 |        3 |       11 |       11 |        7 |        4 |       1 |        6 |        2 |       18 |        8 |        8 |        2 |       0 |        2 |        0 |        0 |        2 |        1 |        2 |       0 |        0 |        0 |        2 |        5 |        1 |        1 |       0 |      0 |      1 |     10 |     12 |      6 |      4 |      7 |     55 |      0 |      0 |      2 |     65 |     42 |     15 |      7 |     10 |    195 |      0 |      0 |      3 |     16 |     12 |      3 |      1 |      4 |     43 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 5472600 |      13 |      5 |      3 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      7 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5472700 |     131 |     32 |     54 |    11 |    0 |     1 |    8 |    1 |     2 |    0 |     22 |    0 |    0 |    0 |    0 |     59 |     72 |       3 |       1 |       1 |       1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        3 |        4 |        1 |        1 |       2 |        0 |        1 |        2 |        5 |        7 |        2 |       2 |        0 |        2 |        5 |        5 |        5 |        4 |       2 |        2 |        1 |       11 |        4 |        4 |        5 |       4 |        1 |        0 |        4 |        2 |        1 |        2 |       0 |        4 |        1 |        1 |        4 |        1 |        1 |       0 |        1 |        2 |        4 |        3 |        2 |        1 |       0 |        2 |        2 |        2 |        4 |        0 |        0 |       0 |      0 |      0 |      2 |      9 |      1 |      1 |      2 |     17 |      0 |      0 |      0 |      5 |      9 |      6 |      1 |      5 |     28 |      0 |      0 |      2 |      1 |      1 |      2 |      0 |      0 |     16 |      0 |      0 |      0 |      3 |      6 |      1 |      0 |      1 |     12 |      0 |     37 | s03      | R    |
| 5472800 |       7 |      1 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5474500 |      60 |      9 |     32 |     3 |    0 |     1 |    1 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     31 |     29 |       3 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        0 |        0 |        2 |        2 |        0 |        1 |       0 |        0 |        0 |        3 |        7 |        6 |        2 |       1 |        0 |        0 |        5 |        3 |        3 |        2 |       0 |        1 |        1 |        1 |        1 |        1 |        1 |       0 |        2 |        1 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      5 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     26 |      0 |      0 |      1 |      1 |      0 |      3 |      0 |      1 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5474600 |      23 |      6 |     10 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     14 |      9 |       0 |       1 |       0 |       0 |      3 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        2 |        1 |       0 |        0 |        1 |        1 |        3 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5474700 |      33 |     11 |     12 |     4 |    0 |     1 |    2 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |     18 |     15 |       5 |       2 |       1 |       0 |      0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        0 |        1 |        1 |       0 |        0 |        1 |        2 |        0 |        1 |        2 |       0 |        0 |        1 |        1 |        3 |        0 |        2 |       1 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |      0 |      2 |      1 |      1 |      1 |      6 |      0 |      0 |      0 |      2 |      3 |      0 |      3 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5474800 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
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| 5487100 |      37 |     14 |     15 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     17 |     20 |       1 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        3 |        2 |       0 |        0 |        0 |        1 |        4 |        0 |        2 |       1 |        0 |        1 |        2 |        3 |        2 |        0 |       1 |        0 |        1 |        0 |        2 |        0 |        3 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        1 |        1 |        3 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |     13 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
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| 5487500 |      22 |      4 |     13 |     1 |    0 |     0 |    0 |    0 |     2 |    0 |      2 |    0 |    0 |    0 |    0 |      9 |     13 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       1 |        0 |        0 |        2 |        3 |        0 |        2 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
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| 5488500 |      29 |      9 |      6 |     4 |    0 |     1 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     11 |     18 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        3 |        0 |        1 |       2 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        2 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      1 |      2 |      0 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5488600 |     163 |     52 |     68 |     9 |    0 |     0 |    4 |    0 |     1 |    0 |     29 |    0 |    0 |    0 |    0 |     53 |    110 |       6 |      11 |       7 |       2 |      1 |      3 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |       11 |        3 |        0 |        1 |        0 |       0 |        2 |       20 |       11 |        3 |        0 |        0 |       0 |        1 |       15 |        5 |        1 |        0 |        0 |       0 |        5 |       30 |       10 |        1 |        0 |        0 |       0 |        2 |        6 |        2 |        0 |        0 |        0 |       0 |        1 |       12 |        3 |        3 |        0 |        0 |       0 |        0 |        5 |        0 |        0 |        0 |        0 |       0 |        1 |        8 |        0 |        0 |        0 |        0 |       0 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |     43 |      0 |      0 |      2 |     21 |      1 |      0 |      0 |      0 |     44 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5488700 |     198 |     56 |     93 |     8 |    0 |     0 |    0 |    0 |     0 |    0 |     41 |    0 |    0 |    0 |    0 |     87 |    111 |       8 |       8 |       3 |       0 |      1 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        3 |        2 |        9 |        3 |        3 |       1 |        3 |        6 |        6 |        4 |       10 |        3 |       1 |        7 |        5 |       11 |        7 |        5 |        6 |       0 |        3 |        9 |       11 |       16 |        7 |        5 |       1 |        3 |        4 |        1 |        6 |        3 |        0 |       0 |        4 |        1 |        8 |        9 |        1 |        1 |       0 |        3 |        1 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      3 |      7 |      6 |      6 |      0 |      1 |     33 |      0 |      0 |      0 |     16 |     12 |      2 |      3 |      2 |     58 |      0 |      0 |      1 |      6 |      5 |      5 |      0 |      0 |     24 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5488900 |     284 |     69 |    149 |     7 |    0 |     2 |    5 |    3 |     0 |    0 |     49 |    0 |    0 |    0 |    0 |    132 |    152 |       5 |      10 |       3 |       0 |      8 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        3 |        8 |        5 |        5 |       4 |        2 |        4 |       12 |        8 |        5 |        3 |       7 |        7 |        9 |       17 |       15 |       10 |        1 |       6 |        6 |       12 |       24 |       13 |       13 |        8 |       8 |        4 |        3 |        8 |        6 |        4 |        2 |       0 |        4 |        4 |        6 |        4 |        4 |        0 |       0 |        2 |        3 |        4 |        2 |        0 |        1 |       0 |        2 |        2 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      8 |      6 |      4 |      3 |     42 |      0 |      0 |      0 |     11 |     33 |     12 |      9 |      6 |     78 |      0 |      0 |      1 |      9 |      6 |      4 |      4 |      3 |     22 |      0 |      0 |      1 |      2 |      2 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5489000 |     310 |     93 |    155 |     7 |    0 |     7 |    2 |    2 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |    156 |    154 |       2 |       3 |       3 |       2 |      2 |      7 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        1 |        5 |        7 |        8 |       10 |       3 |        5 |        3 |        2 |       18 |       11 |       14 |       5 |        3 |        9 |       14 |       25 |       14 |       12 |       7 |        4 |       10 |       12 |       18 |       10 |        8 |       9 |        2 |        6 |        4 |        8 |        5 |        1 |       0 |        2 |        0 |        6 |        4 |        3 |        2 |       0 |        0 |        1 |        2 |        5 |        2 |        1 |       0 |        1 |        3 |        0 |        2 |        1 |        1 |       0 |      0 |      0 |      4 |     11 |      5 |      3 |      6 |     64 |      0 |      0 |      0 |      9 |     22 |     13 |      6 |      8 |     97 |      0 |      0 |      0 |      3 |      4 |      6 |      2 |      3 |     25 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5489100 |     245 |     64 |    142 |     3 |    0 |     0 |    0 |    2 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |    129 |    116 |       7 |       1 |       0 |       0 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        4 |        3 |        4 |        7 |        8 |       3 |        1 |        1 |        4 |        7 |       11 |        7 |       2 |       11 |        6 |       10 |       23 |        9 |        9 |       5 |        5 |        6 |       10 |       18 |       13 |       12 |       5 |        4 |        2 |        6 |        6 |        2 |        1 |       1 |        1 |        1 |        4 |        1 |        2 |        3 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |      0 |      0 |      6 |      7 |      2 |      3 |      7 |     39 |      0 |      0 |      1 |     12 |     34 |      8 |      3 |      8 |     76 |      0 |      0 |      0 |      6 |      6 |      3 |      1 |      2 |     16 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5489200 |      10 |      0 |      9 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      6 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        2 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5489300 |      56 |     13 |     34 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     27 |     29 |       3 |       2 |       0 |       0 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        0 |        1 |        1 |        1 |       1 |        1 |        0 |        2 |        1 |        1 |        1 |       2 |        1 |        3 |        3 |        4 |        3 |        2 |       1 |        0 |        0 |        5 |        6 |        3 |        2 |       1 |        2 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      2 |      0 |      1 |      5 |      0 |      0 |      0 |      3 |     14 |      0 |      1 |      0 |     16 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5489400 |     246 |     85 |    112 |     6 |    0 |     2 |    1 |    1 |     1 |    0 |     38 |    0 |    0 |    0 |    0 |    111 |    135 |       8 |       8 |       2 |       1 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        4 |        3 |        9 |        8 |        3 |        2 |       0 |        4 |       10 |       13 |       15 |        7 |        2 |       5 |       10 |        6 |       13 |       10 |        5 |        4 |       4 |       14 |        4 |       19 |       12 |        7 |        3 |       1 |        2 |        6 |        8 |        5 |        1 |        0 |       0 |        4 |        3 |        5 |        3 |        1 |        0 |       0 |        4 |        2 |        0 |        1 |        0 |        0 |       1 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     11 |      3 |      2 |      1 |      3 |     65 |      0 |      0 |      0 |     10 |     14 |      3 |      5 |      3 |     77 |      0 |      0 |      1 |      4 |      1 |      2 |      0 |      0 |     30 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5489900 |      98 |     22 |     63 |     2 |    0 |     1 |    0 |    1 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     44 |     54 |       2 |       2 |       0 |       0 |      2 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        1 |        2 |        4 |        1 |        0 |       0 |        1 |        1 |        2 |        6 |        1 |        2 |       0 |        1 |        2 |        5 |        9 |        6 |        7 |       0 |        4 |        3 |        6 |       11 |        5 |        4 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        2 |        1 |        1 |        3 |        0 |        0 |       0 |        2 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |     11 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      5 |     34 |      2 |      0 |      0 |     22 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5490100 |     423 |    117 |    202 |     6 |    0 |     7 |    2 |    4 |     4 |    0 |     81 |    0 |    0 |    0 |    0 |    194 |    229 |      15 |      16 |       4 |       2 |      4 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      4 |      0 |        3 |       10 |        4 |       12 |        9 |        7 |       6 |        5 |       11 |       12 |       12 |       12 |        6 |       8 |       10 |       17 |       25 |       16 |        9 |       16 |       5 |        9 |       16 |       26 |       22 |       15 |       10 |       6 |        1 |        8 |       10 |        5 |        7 |        3 |       0 |       12 |       10 |        7 |        8 |        7 |        3 |       0 |        0 |        5 |        2 |        1 |        2 |        0 |       1 |        2 |        1 |        5 |        3 |        0 |        0 |       1 |      0 |      0 |     10 |     18 |      5 |      2 |      2 |     80 |      0 |      0 |      0 |     25 |     28 |     12 |      8 |      8 |    121 |      0 |      0 |      0 |      6 |      7 |      4 |      2 |      3 |     59 |      0 |      0 |      0 |      4 |      9 |      1 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 5490300 |     234 |     64 |    110 |     3 |    0 |     0 |    4 |    4 |     2 |    0 |     47 |    0 |    0 |    0 |    0 |    114 |    120 |       5 |       5 |       3 |       0 |      2 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        4 |        2 |        5 |        6 |        5 |        1 |       4 |        5 |        4 |        8 |        6 |        5 |        3 |       6 |        4 |        8 |       13 |       12 |       11 |        4 |       2 |        6 |       11 |       13 |       16 |        5 |        3 |       2 |        1 |        2 |        6 |        8 |        3 |        1 |       1 |        6 |        6 |        4 |        6 |        2 |        1 |       0 |        1 |        5 |        1 |        2 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      8 |      7 |      8 |      1 |      3 |     36 |      0 |      0 |      1 |     11 |     16 |      7 |      9 |      7 |     59 |      0 |      0 |      0 |      8 |      5 |      2 |      0 |      1 |     31 |      0 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5490400 |     253 |     58 |    148 |     6 |    0 |     5 |    0 |    0 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |    122 |    131 |       6 |       4 |       2 |       1 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        7 |       10 |        4 |        4 |        1 |       0 |        0 |        9 |       10 |        9 |        1 |        1 |       1 |        5 |       18 |       23 |       17 |        5 |        3 |       0 |        6 |       19 |       32 |       11 |        7 |        2 |       0 |        1 |        3 |        8 |        4 |        1 |        0 |       0 |        2 |        6 |        3 |        5 |        1 |        2 |       0 |        1 |        1 |        1 |        3 |        0 |        1 |       0 |        2 |        1 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      4 |      5 |      2 |      3 |     40 |      0 |      0 |      0 |     11 |     11 |      3 |      3 |      4 |    116 |      0 |      0 |      0 |      5 |      5 |      0 |      0 |      1 |     25 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 5490500 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5490600 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       2 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5490700 |       7 |      5 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      3 |       5 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5490800 |     625 |    189 |    312 |    20 |    0 |     3 |    3 |    2 |     0 |    0 |     96 |    0 |    0 |    0 |    0 |    275 |    350 |       6 |       9 |       1 |       0 |     13 |     16 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        4 |       10 |        9 |       42 |       4 |        4 |        3 |        3 |       13 |       26 |       58 |      10 |        7 |       10 |       18 |       15 |       29 |       61 |       6 |        4 |       12 |       15 |       20 |       38 |       67 |      10 |        6 |        4 |        5 |        6 |       12 |        8 |       0 |        4 |        7 |        9 |        3 |       17 |       13 |       2 |        1 |        1 |        3 |        0 |        4 |        7 |       0 |        0 |        1 |        2 |        0 |        3 |        6 |       0 |      0 |      3 |     18 |     25 |      6 |      7 |      8 |    122 |      0 |      0 |      5 |     57 |     43 |     10 |      6 |     16 |    175 |      0 |      0 |      2 |     16 |     12 |      2 |      1 |      2 |     61 |      0 |      0 |      0 |      5 |      6 |      0 |      0 |      2 |     15 |      0 |     37 | s03      | R    |
| 5490900 |     279 |     65 |    150 |     9 |    0 |     0 |    3 |    0 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    133 |    146 |       6 |       8 |       2 |       2 |      3 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      2 |      2 |      0 |        1 |        3 |        2 |        4 |        9 |        4 |       1 |        4 |        2 |       12 |       12 |        6 |        4 |       1 |        4 |       16 |       22 |       23 |        6 |        6 |       1 |        9 |       12 |       20 |       18 |        8 |        2 |       3 |        6 |        2 |        7 |        8 |        2 |        0 |       1 |        8 |        2 |        6 |        5 |        2 |        2 |       0 |        0 |        2 |        2 |        1 |        0 |        0 |       0 |        2 |        4 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      8 |      5 |      7 |      4 |      7 |     34 |      0 |      0 |      1 |     21 |     25 |      6 |      4 |     16 |     77 |      0 |      0 |      0 |      6 |      7 |      3 |      0 |      3 |     32 |      0 |      0 |      1 |      4 |      3 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5491000 |     181 |     46 |    104 |     3 |    0 |     1 |    1 |    1 |     5 |    0 |     20 |    0 |    0 |    0 |    0 |     83 |     98 |       5 |       2 |       0 |       0 |      4 |      4 |      2 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |        3 |        0 |        3 |        5 |       3 |        1 |        0 |        5 |        7 |        3 |        5 |       6 |        2 |        3 |        9 |       13 |       11 |       10 |       2 |        7 |        5 |        7 |       14 |        9 |        9 |       3 |        1 |        2 |        3 |        0 |        1 |        1 |       0 |        3 |        4 |        4 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        3 |        1 |        0 |       0 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      5 |      5 |      1 |      0 |      2 |     33 |      0 |      0 |      0 |      8 |     17 |      5 |      6 |      9 |     59 |      0 |      0 |      0 |      5 |      2 |      1 |      2 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5491100 |     584 |    168 |    307 |    10 |    0 |     7 |    7 |    1 |     3 |    0 |     81 |    0 |    0 |    0 |    0 |    271 |    313 |      14 |      19 |       5 |       2 |      3 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |        7 |        3 |        6 |       15 |       14 |       12 |      13 |       13 |        3 |       16 |       21 |       17 |       14 |      14 |       11 |       12 |       28 |       42 |       21 |       22 |      14 |       19 |       14 |       26 |       31 |       25 |       28 |      14 |        6 |        6 |        7 |       10 |        5 |        3 |       0 |        6 |        2 |       10 |       15 |        5 |        5 |       1 |        2 |        3 |        2 |        4 |        3 |        0 |       0 |        2 |        1 |        4 |        5 |        1 |        1 |       0 |      0 |      1 |     10 |     24 |     12 |      3 |     16 |    102 |      0 |      0 |      1 |     29 |     38 |     14 |     14 |     13 |    198 |      0 |      0 |      3 |     14 |      3 |      4 |      2 |      3 |     52 |      0 |      0 |      0 |      2 |      9 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 5491200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5491300 |       3 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5491800 |       9 |      3 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      7 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5491900 |     398 |    100 |    185 |    16 |    0 |     3 |    2 |    3 |    10 |    0 |     79 |    0 |    0 |    0 |    0 |    163 |    235 |      14 |      11 |       6 |       3 |      2 |      5 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        3 |        5 |        6 |       13 |        2 |        3 |       0 |        7 |        8 |       23 |       16 |        8 |        5 |       1 |       12 |       13 |       20 |       19 |       13 |        5 |       0 |       17 |       19 |       22 |       24 |       11 |       10 |       0 |        7 |        7 |        7 |        9 |        2 |        0 |       0 |       13 |       11 |       13 |        7 |        3 |        0 |       0 |        4 |        8 |        1 |        3 |        1 |        0 |       0 |        7 |        4 |        5 |        1 |        0 |        0 |       0 |      0 |      1 |     14 |      7 |      4 |      2 |      3 |     69 |      0 |      0 |      2 |     30 |     19 |     11 |      2 |      3 |    118 |      0 |      0 |      1 |      7 |      3 |      1 |      1 |      0 |     66 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |      0 |     29 |      0 |     37 | s03      | R    |
| 5492000 |     187 |     37 |    101 |     6 |    0 |     0 |    0 |    1 |     2 |    0 |     40 |    0 |    0 |    0 |    0 |     88 |     99 |       6 |       6 |       3 |       0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       3 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        5 |        4 |        2 |        2 |       0 |        1 |        4 |        9 |        4 |        2 |        2 |       0 |        2 |        6 |       29 |        8 |        4 |        0 |       0 |        5 |        6 |       29 |        6 |        3 |        3 |       0 |        2 |        4 |        9 |        2 |        0 |        1 |       0 |        3 |        9 |        8 |        2 |        0 |        0 |       0 |        1 |        0 |        2 |        2 |        1 |        0 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |     25 |      0 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |     51 |      0 |      0 |      0 |      0 |     50 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5492100 |      62 |     11 |     32 |     0 |    0 |     3 |    1 |    0 |     0 |    0 |     15 |    0 |    0 |    0 |    0 |     29 |     33 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        3 |        2 |        2 |       1 |        1 |        1 |        3 |        5 |        3 |        2 |       3 |        0 |        1 |        1 |        6 |        2 |        2 |       2 |        1 |        0 |        2 |        1 |        0 |        2 |       0 |        0 |        0 |        2 |        3 |        1 |        3 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      1 |      0 |      3 |      0 |      2 |      5 |      0 |      0 |      0 |      1 |      9 |      1 |      0 |      0 |     21 |      0 |      0 |      0 |      3 |      2 |      1 |      2 |      0 |      7 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5492200 |     498 |    134 |    236 |    17 |    0 |     6 |    4 |    1 |     2 |    0 |     98 |    0 |    0 |    0 |    0 |    223 |    275 |      11 |      20 |       7 |       0 |      3 |      6 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      1 |      1 |        7 |        8 |       13 |       12 |        8 |        4 |       3 |        7 |       16 |       17 |       22 |       12 |        1 |       4 |       18 |       24 |       34 |       20 |       10 |        4 |       2 |       19 |       28 |       36 |       28 |        9 |        3 |       1 |       13 |       14 |        7 |        4 |        1 |        2 |       0 |        8 |       21 |       12 |       14 |        2 |        0 |       0 |        4 |        1 |        9 |        1 |        0 |        0 |       0 |        2 |        3 |        3 |        5 |        2 |        0 |       0 |      0 |      0 |      7 |     20 |      6 |      2 |      3 |     96 |      0 |      0 |      4 |     27 |     22 |      5 |      3 |      4 |    171 |      0 |      0 |      2 |     13 |      6 |      2 |      0 |      1 |     74 |      0 |      0 |      2 |      6 |      0 |      1 |      0 |      0 |     21 |      0 |     37 | s03      | R    |
| 5492300 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5492500 |      32 |      7 |     16 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     16 |     16 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       1 |        0 |        1 |        1 |        0 |        0 |        1 |       1 |        0 |        0 |        4 |        1 |        0 |        2 |       2 |        1 |        0 |        1 |        2 |        0 |        1 |       2 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        3 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |     12 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5492800 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5492900 |      48 |     14 |     27 |     1 |    0 |     1 |    0 |    0 |     1 |    0 |      4 |    0 |    0 |    0 |    0 |     23 |     25 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        0 |        1 |        1 |       1 |        0 |        1 |        2 |        3 |        0 |        0 |       3 |        1 |        0 |        3 |        6 |        1 |        2 |       1 |        1 |        1 |        4 |        2 |        0 |        3 |       2 |        2 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      1 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      7 |      1 |      1 |      0 |     17 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5493000 |     149 |     49 |     70 |     2 |    0 |     3 |    0 |    3 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     68 |     81 |       7 |       2 |       2 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        6 |        3 |        5 |        4 |       6 |        1 |        0 |        3 |        3 |        6 |        4 |       6 |        3 |        6 |        5 |        6 |        1 |        6 |       4 |        2 |        4 |       11 |        4 |        5 |        9 |       4 |        3 |        3 |        0 |        2 |        0 |        0 |       0 |        4 |        2 |        4 |        2 |        1 |        1 |       0 |        1 |        1 |        0 |        0 |        0 |        1 |       0 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      7 |      4 |      2 |      5 |     31 |      0 |      0 |      0 |      3 |     10 |      2 |      1 |     12 |     42 |      0 |      0 |      0 |      3 |      3 |      3 |      0 |      1 |     12 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5493100 |     392 |    142 |    211 |     5 |    0 |     1 |    0 |    0 |     0 |    0 |     33 |    0 |    0 |    0 |    0 |    167 |    225 |       8 |       6 |       4 |       1 |      6 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        2 |        1 |       10 |       44 |       2 |        0 |        0 |        1 |        2 |       19 |       54 |       7 |        0 |        1 |        2 |        2 |       13 |       71 |       4 |        0 |        1 |        1 |        5 |       25 |       79 |       7 |        0 |        1 |        0 |        0 |        4 |        7 |       1 |        0 |        0 |        0 |        2 |        4 |       14 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        3 |        1 |       0 |      0 |      1 |     22 |     27 |      7 |      6 |      8 |     71 |      0 |      0 |      1 |     32 |     33 |     13 |     17 |     11 |    104 |      0 |      0 |      0 |      6 |      3 |      2 |      6 |      1 |     15 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5493500 |      24 |      3 |     16 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     12 |     12 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        1 |        1 |        1 |       2 |        0 |        1 |        1 |        1 |        1 |        1 |       3 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      2 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |     37 | s03      | R    |
| 5493800 |     205 |     42 |    118 |     5 |    0 |     1 |    1 |    1 |     0 |    0 |     37 |    0 |    0 |    0 |    0 |    104 |    101 |       1 |       5 |       0 |       1 |      1 |      1 |      1 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        2 |        6 |        2 |        1 |       4 |        1 |        4 |        1 |       10 |        3 |        1 |       1 |        2 |       10 |       17 |       21 |        5 |        2 |       1 |        9 |       12 |       16 |       13 |        5 |        1 |       4 |        6 |        2 |        3 |        5 |        3 |        1 |       0 |        2 |        1 |        4 |        8 |        2 |        0 |       0 |        1 |        3 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |      8 |      1 |      3 |      3 |     23 |      0 |      0 |      1 |     10 |     23 |      8 |      4 |      8 |     64 |      0 |      0 |      0 |      4 |      9 |      3 |      0 |      1 |     20 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 5493900 |     238 |     71 |    119 |     6 |    0 |     0 |    2 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |    110 |    128 |      12 |       8 |       0 |       1 |      1 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        4 |       13 |        4 |        2 |        7 |       5 |        1 |        5 |        5 |        9 |        4 |        6 |       5 |        7 |        7 |       18 |       10 |        5 |        5 |       2 |        2 |       13 |       15 |       15 |        4 |        9 |       7 |        2 |        3 |        3 |        5 |        3 |        1 |       0 |        8 |        1 |        8 |        5 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        3 |        3 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |     11 |      7 |     10 |      3 |      3 |     37 |      0 |      0 |      2 |     18 |     19 |      5 |      6 |      8 |     61 |      0 |      0 |      0 |      7 |      8 |      2 |      1 |      2 |     19 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5494000 |     406 |    121 |    201 |     4 |    0 |     5 |    6 |    0 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    197 |    209 |      28 |      10 |       9 |       0 |      7 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        7 |        9 |        5 |       15 |        7 |        6 |       6 |        2 |       10 |       14 |       13 |       11 |        9 |       7 |        7 |       14 |       26 |       29 |       10 |        8 |       4 |        8 |       10 |       28 |       27 |       10 |       14 |       6 |        9 |        4 |        7 |        8 |        4 |        3 |       0 |        9 |        7 |        6 |        7 |        4 |        0 |       0 |        2 |        0 |        2 |        4 |        0 |        1 |       0 |        2 |        1 |        0 |        2 |        2 |        0 |       0 |      0 |      1 |     15 |     19 |      6 |      3 |      5 |     72 |      0 |      0 |      0 |     27 |     42 |      9 |     10 |      7 |    106 |      0 |      0 |      1 |     10 |     13 |      0 |      1 |      1 |     42 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5494100 |      76 |     15 |     55 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      6 |    0 |    0 |    0 |    0 |     37 |     39 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        2 |        2 |        2 |        2 |        0 |       0 |        0 |        1 |        4 |        1 |        1 |        0 |       0 |        1 |        3 |       12 |        6 |        3 |        1 |       0 |        1 |        7 |       15 |        2 |        2 |        2 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      6 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |     18 |     11 |      0 |      0 |      0 |     26 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5494300 |      72 |     19 |     34 |     3 |    0 |     3 |    0 |    1 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     35 |     37 |       0 |       2 |       0 |       2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        1 |        0 |       2 |        1 |        0 |        0 |        3 |        1 |        3 |       3 |        3 |        1 |        5 |        4 |        1 |        4 |       0 |        3 |        1 |        3 |        5 |        0 |        3 |       1 |        2 |        1 |        0 |        2 |        0 |        0 |       0 |        1 |        3 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      1 |      0 |      3 |      0 |      0 |      4 |     11 |      0 |      0 |      0 |      3 |      3 |      4 |      0 |      1 |     23 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5494400 |       8 |      2 |      2 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5494500 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5494600 |      28 |      6 |     15 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     13 |     15 |       0 |       5 |       2 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        1 |        4 |        1 |        0 |        1 |       0 |        0 |        3 |        3 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5494800 |     253 |     65 |    127 |     9 |    0 |     1 |    3 |    2 |     2 |    0 |     44 |    0 |    0 |    0 |    0 |    115 |    138 |      10 |       4 |       1 |       0 |      4 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        6 |        7 |        4 |        1 |       1 |        5 |        5 |       13 |       11 |        4 |        4 |       0 |        5 |       17 |       14 |       23 |        2 |        5 |       1 |        1 |       13 |       17 |       21 |        2 |        6 |       0 |        3 |        3 |        3 |        4 |        2 |        0 |       1 |        8 |        0 |       13 |        6 |        0 |        1 |       0 |        2 |        2 |        2 |        2 |        1 |        0 |       0 |        2 |        2 |        1 |        0 |        2 |        1 |       0 |      0 |      0 |      7 |      2 |      5 |      4 |      5 |     42 |      0 |      0 |      1 |     23 |     17 |      9 |      8 |      7 |     62 |      0 |      0 |      2 |      5 |      5 |      4 |      1 |      3 |     24 |      0 |      0 |      0 |      5 |      3 |      1 |      3 |      0 |      5 |      0 |     37 | s03      | R    |
| 5494900 |     117 |     32 |     62 |     2 |    0 |     0 |    0 |    2 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     53 |     64 |       0 |       0 |       0 |       0 |      1 |      4 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        4 |        1 |        4 |        0 |       2 |        2 |        1 |        3 |        6 |        4 |        2 |       0 |        1 |        2 |       10 |       10 |        4 |        0 |       1 |        3 |        4 |       12 |        6 |        4 |        4 |       1 |        1 |        1 |        0 |        6 |        1 |        1 |       0 |        4 |        1 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        1 |        0 |        0 |       0 |      0 |      2 |      4 |      3 |      4 |      1 |      5 |     13 |      0 |      0 |      0 |      5 |     14 |      5 |      4 |     10 |     24 |      0 |      0 |      0 |      2 |      2 |      0 |      2 |      1 |     11 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5495000 |     440 |    128 |    219 |     7 |    0 |     7 |    1 |    1 |     3 |    0 |     74 |    0 |    0 |    0 |    0 |    203 |    237 |       4 |       5 |       4 |       0 |      3 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        5 |        4 |        5 |        9 |        9 |       13 |       5 |        3 |        2 |       10 |       16 |       16 |       25 |       6 |        4 |       11 |       17 |       26 |       21 |       21 |       7 |        5 |       10 |       16 |       26 |       22 |       26 |       7 |        5 |        3 |        7 |        9 |        8 |        3 |       1 |       10 |        2 |        8 |        6 |        6 |        6 |       0 |        2 |        0 |        2 |        3 |        0 |        3 |       0 |        1 |        0 |        2 |        1 |        3 |        2 |       0 |      0 |      1 |     12 |     28 |     10 |      2 |      5 |     70 |      0 |      0 |      2 |     24 |     41 |      5 |     17 |      9 |    121 |      0 |      0 |      2 |     11 |      7 |      7 |      1 |      1 |     45 |      0 |      0 |      1 |      3 |      5 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 5495100 |     541 |    146 |    285 |    14 |    0 |     6 |    4 |    0 |     4 |    0 |     82 |    0 |    0 |    0 |    0 |    261 |    280 |      15 |       9 |       7 |       2 |      4 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      0 |      3 |      0 |      0 |        9 |        3 |        8 |       19 |       10 |       10 |       4 |        7 |        7 |       15 |       27 |       13 |       11 |       3 |       14 |       15 |       37 |       48 |       22 |        9 |       2 |       12 |       16 |       42 |       43 |       14 |        8 |       3 |        6 |        7 |        9 |        5 |        6 |        3 |       0 |        7 |        7 |       12 |        7 |       10 |        3 |       0 |        3 |        1 |        2 |        5 |        3 |        1 |       0 |        3 |        3 |        4 |        2 |        1 |        0 |       0 |      0 |      0 |     17 |     18 |     11 |      6 |      6 |     88 |      0 |      0 |      3 |     38 |     43 |     28 |     11 |     21 |    141 |      0 |      0 |      0 |     12 |     16 |      4 |      2 |      3 |     45 |      0 |      0 |      0 |      2 |      7 |      2 |      0 |      2 |     15 |      0 |     37 | s03      | R    |
| 5495200 |     194 |     62 |     82 |     7 |    0 |     3 |    2 |    2 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |     97 |     97 |       6 |       5 |       4 |       0 |      2 |      6 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        1 |        3 |        9 |        5 |        5 |       0 |        3 |        2 |        4 |       11 |       12 |        5 |       0 |        3 |        3 |        9 |       16 |        7 |        4 |       0 |        2 |        3 |       15 |       13 |        5 |        2 |       0 |        8 |        1 |        3 |        5 |        2 |        0 |       1 |        2 |        0 |        5 |        4 |        4 |        0 |       0 |        3 |        2 |        0 |        5 |        0 |        0 |       0 |        1 |        0 |        3 |        0 |        1 |        0 |       0 |      0 |      1 |      5 |     15 |      4 |      4 |      4 |     29 |      0 |      0 |      0 |      5 |     13 |      7 |     10 |      6 |     41 |      0 |      0 |      1 |      8 |      2 |      2 |      0 |      2 |     20 |      0 |      0 |      1 |      4 |      3 |      1 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 5495300 |      39 |     17 |     16 |     0 |    0 |     0 |    0 |    0 |     3 |    0 |      3 |    0 |    0 |    0 |    0 |     18 |     21 |       1 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        2 |        1 |       0 |        0 |        0 |        1 |        5 |        2 |        2 |       0 |        1 |        0 |        1 |        2 |        1 |        2 |       1 |        2 |        0 |        2 |        1 |        0 |        3 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      4 |      2 |      2 |      1 |      1 |      7 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      1 |     12 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |     37 | s03      | R    |
| 5495500 |       7 |      2 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5495600 |       3 |      1 |      0 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5495700 |      39 |     13 |     18 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |     21 |     18 |       1 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        0 |        1 |       1 |        1 |        0 |        3 |        1 |        0 |        0 |       2 |        2 |        1 |        4 |        2 |        0 |        1 |       0 |        1 |        2 |        2 |        1 |        0 |        2 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      5 |      8 |      0 |      1 |      1 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 5495900 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5496000 |     320 |    110 |    133 |     9 |    0 |     7 |    7 |    0 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    140 |    180 |      12 |       8 |       3 |       3 |      4 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        5 |        9 |       12 |       11 |       10 |       3 |        6 |        4 |        7 |       12 |        5 |       20 |       4 |        3 |        5 |       11 |       20 |       10 |        5 |       1 |        4 |       13 |       10 |       14 |        6 |       29 |       2 |        1 |        6 |        4 |        3 |        5 |        1 |       0 |        5 |        8 |        4 |        5 |        4 |        7 |       0 |        1 |        4 |        3 |        0 |        1 |        4 |       0 |        0 |        1 |        3 |        5 |        1 |        1 |       0 |      0 |      0 |     12 |     25 |      7 |      0 |      1 |     65 |      0 |      0 |      2 |     16 |     17 |      2 |      6 |      3 |     87 |      0 |      0 |      2 |     10 |      4 |      3 |      1 |      0 |     33 |      0 |      0 |      0 |      3 |      7 |      0 |      2 |      1 |     11 |      0 |     37 | s03      | R    |
| 5496100 |     191 |     54 |    104 |     3 |    0 |     1 |    2 |    1 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     86 |    105 |      14 |       1 |       3 |       0 |      3 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        3 |        2 |        4 |        2 |        5 |       1 |        4 |        4 |        7 |        8 |        4 |        4 |       3 |        2 |        8 |       15 |       11 |        7 |        6 |       4 |        2 |        6 |       15 |        5 |        9 |       11 |       3 |        2 |        4 |        1 |        2 |        1 |        0 |       0 |        6 |        3 |        2 |        4 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      5 |     12 |      2 |      3 |      1 |     31 |      0 |      0 |      0 |     17 |     19 |      5 |      3 |      7 |     53 |      0 |      0 |      0 |      3 |      3 |      3 |      0 |      1 |     16 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5496200 |     548 |    169 |    238 |    17 |    0 |    12 |    5 |    2 |     2 |    0 |    103 |    0 |    0 |    0 |    0 |    247 |    301 |      18 |      14 |      15 |       3 |      6 |      8 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      2 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      4 |      0 |      0 |        5 |        8 |       10 |       14 |        7 |       12 |       3 |        5 |       15 |       15 |       27 |       16 |       29 |       3 |       11 |       26 |       34 |       28 |       14 |        9 |       3 |        6 |       19 |       31 |       14 |       16 |       23 |       4 |        9 |        9 |       12 |        4 |        7 |        3 |       0 |       16 |       14 |       11 |        8 |        9 |        1 |       0 |        2 |        4 |        5 |        7 |        1 |        0 |       0 |        2 |        5 |        6 |        6 |        0 |        0 |       0 |      0 |      1 |     28 |     25 |     11 |      5 |      4 |     95 |      0 |      0 |      2 |     28 |     39 |     15 |      9 |      5 |    140 |      0 |      0 |      2 |     13 |      9 |      5 |      0 |      1 |     73 |      0 |      0 |      1 |      8 |     12 |      0 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 5496300 |     210 |     54 |    126 |     4 |    0 |     2 |    1 |    1 |     0 |    0 |     22 |    0 |    0 |    0 |    0 |     95 |    115 |       6 |       9 |       4 |       1 |      1 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      1 |        0 |        1 |        3 |        5 |        9 |        5 |       0 |        1 |        3 |        3 |       10 |        6 |        7 |       1 |        5 |        3 |       22 |       19 |        5 |        4 |       1 |        6 |        5 |       25 |       20 |        7 |        4 |       0 |        0 |        3 |        2 |        2 |        2 |        0 |       0 |        3 |        2 |        5 |        2 |        1 |        0 |       0 |        0 |        2 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |      4 |     22 |      4 |      3 |     10 |     10 |      0 |      0 |      1 |     14 |     35 |     10 |     10 |     15 |     41 |      0 |      0 |      0 |      3 |      1 |      4 |      0 |      2 |     12 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5496400 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5496500 |     156 |     37 |     80 |     5 |    0 |     2 |    2 |    0 |     0 |    0 |     30 |    0 |    0 |    0 |    0 |     58 |     98 |       4 |       7 |       3 |       0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        2 |        2 |        1 |        3 |        2 |        2 |       0 |        1 |        5 |        6 |        7 |        3 |        3 |       0 |        4 |       10 |       10 |        6 |        3 |        0 |       0 |        7 |       12 |       10 |       10 |        2 |        5 |       1 |        1 |        3 |        3 |        1 |        0 |        2 |       0 |        2 |        8 |        2 |        6 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        2 |       0 |        3 |        2 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      5 |      6 |      0 |      0 |      1 |     25 |      0 |      0 |      2 |      9 |     12 |      0 |      0 |      0 |     57 |      0 |      0 |      1 |      6 |      4 |      1 |      1 |      0 |     17 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5496600 |     152 |     43 |     82 |     1 |    0 |     1 |    2 |    2 |     2 |    0 |     19 |    0 |    0 |    0 |    0 |     76 |     76 |       5 |       7 |       4 |       0 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        4 |        7 |        2 |       0 |        0 |        1 |        5 |        8 |        7 |        4 |       1 |        5 |        5 |        6 |       14 |        9 |        3 |       1 |        5 |        2 |       12 |        9 |        5 |        3 |       3 |        4 |        1 |        1 |        4 |        0 |        0 |       0 |        3 |        3 |        3 |        0 |        0 |        0 |       0 |        2 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      9 |      9 |      1 |      2 |     17 |      0 |      0 |      0 |      9 |     22 |     11 |      0 |      1 |     39 |      0 |      0 |      2 |      2 |      1 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5496700 |     216 |     75 |     98 |     6 |    0 |     2 |    2 |    2 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |    106 |    110 |      11 |       0 |       0 |       3 |      1 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        6 |        3 |        5 |        5 |        3 |       1 |        7 |        4 |        9 |       10 |       10 |        5 |       3 |        2 |        9 |       12 |       18 |        8 |        5 |       1 |        4 |        8 |        9 |        9 |        6 |        5 |       2 |        3 |        4 |        2 |        2 |        2 |        4 |       0 |        1 |        2 |        4 |        3 |        1 |        2 |       0 |        4 |        2 |        1 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |     10 |      8 |      3 |      2 |      2 |     49 |      0 |      0 |      1 |      9 |     13 |      8 |      1 |      7 |     59 |      0 |      0 |      3 |      3 |      4 |      4 |      1 |      1 |     14 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5496800 |      25 |      7 |     16 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     14 |     11 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       1 |        0 |        0 |        4 |        3 |        1 |        1 |       1 |        0 |        0 |        1 |        3 |        1 |        0 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      2 |      0 |      3 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5496900 |      26 |      7 |      8 |     0 |    0 |     1 |    0 |    0 |     1 |    0 |      9 |    0 |    0 |    0 |    0 |     10 |     16 |       3 |       2 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        2 |        0 |        2 |        1 |        1 |       0 |        1 |        0 |        3 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      6 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5497000 |     824 |    238 |    366 |    32 |    0 |    13 |   12 |    3 |     4 |    0 |    156 |    0 |    0 |    0 |    0 |    351 |    473 |      26 |      29 |      16 |       5 |      6 |      6 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |       11 |       15 |       20 |       21 |       14 |       14 |       1 |       15 |       19 |       26 |       35 |       18 |       19 |      10 |       21 |       38 |       39 |       28 |       20 |       11 |       3 |       24 |       49 |       44 |       39 |       23 |       25 |       2 |       15 |       18 |        9 |       17 |        4 |        2 |       0 |       17 |       26 |       17 |       17 |        6 |        8 |       0 |        5 |        6 |        5 |       11 |        1 |        2 |       0 |        5 |        6 |        7 |       10 |        2 |        4 |       0 |      0 |      2 |     37 |     35 |      5 |      0 |      2 |    157 |      0 |      0 |      6 |     47 |     41 |     11 |      5 |      6 |    250 |      0 |      0 |      2 |     18 |     10 |      3 |      1 |      4 |    118 |      0 |      0 |      2 |      9 |     13 |      0 |      1 |      0 |     39 |      0 |     37 | s03      | R    |
| 5497100 |     163 |     43 |     72 |    10 |    0 |     2 |    0 |    0 |     0 |    0 |     36 |    0 |    0 |    0 |    0 |     91 |     72 |       3 |      10 |       5 |       0 |      5 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        1 |        9 |        3 |        2 |       0 |        0 |        6 |        6 |        5 |        6 |        0 |       0 |        8 |        9 |       12 |       12 |        3 |        1 |       0 |        4 |       11 |        3 |        4 |        4 |        1 |       0 |        5 |        6 |        2 |        4 |        2 |        1 |       0 |        1 |        8 |        4 |        3 |        0 |        0 |       0 |        2 |        1 |        2 |        0 |        1 |        0 |       0 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      7 |      0 |      1 |      3 |      2 |     30 |      0 |      0 |      1 |     14 |      4 |      2 |      0 |      2 |     49 |      0 |      0 |      0 |      8 |      2 |      2 |      0 |      0 |     24 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5497200 |     131 |     40 |     59 |     3 |    0 |     2 |    2 |    0 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |     54 |     77 |       3 |       0 |       2 |       0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        4 |        3 |        0 |        3 |        1 |        2 |       0 |        3 |        5 |        4 |        4 |        6 |        5 |       0 |        1 |        2 |        6 |        5 |        1 |        6 |       2 |        6 |        6 |       11 |        6 |        3 |        3 |       1 |        3 |        2 |        5 |        0 |        0 |        2 |       0 |        0 |        3 |        4 |        1 |        3 |        0 |       1 |        1 |        2 |        0 |        2 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      1 |      6 |      5 |      1 |      2 |      0 |     25 |      0 |      0 |      0 |      8 |      6 |      3 |      0 |      0 |     42 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     23 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5497900 |      43 |      8 |     25 |     1 |    0 |     0 |    0 |    0 |     3 |    0 |      6 |    0 |    0 |    0 |    0 |     24 |     19 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        1 |       0 |        0 |        2 |        0 |        1 |        1 |        0 |       1 |        0 |        1 |        4 |        2 |        3 |        3 |       1 |        1 |        1 |        3 |        0 |        3 |        2 |       1 |        1 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      6 |      0 |      1 |      1 |     15 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5498000 |     407 |    106 |    212 |    10 |    0 |     7 |    4 |    0 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    198 |    209 |       4 |       9 |       6 |       1 |      4 |     13 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        2 |        2 |        8 |       13 |        8 |      10 |        2 |        7 |        2 |       13 |        9 |       14 |      14 |        7 |       14 |       19 |       29 |       19 |       11 |       7 |       12 |       11 |       23 |       24 |       19 |       10 |       7 |        3 |        6 |        8 |        8 |        5 |        5 |       0 |        6 |        4 |        7 |       10 |        2 |        3 |       0 |        3 |        2 |        3 |        3 |        1 |        0 |       0 |        0 |        1 |        4 |        3 |        0 |        2 |       0 |      0 |      0 |     18 |     10 |      8 |      0 |      2 |     68 |      0 |      0 |      1 |     19 |     20 |     13 |      6 |      5 |    148 |      0 |      0 |      1 |      8 |      5 |      1 |      3 |      1 |     48 |      0 |      0 |      1 |      6 |      6 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5498100 |     410 |    149 |    175 |     9 |    0 |     6 |    3 |    0 |     1 |    0 |     67 |    0 |    0 |    0 |    0 |    207 |    203 |       8 |       3 |       3 |       1 |      6 |      8 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        4 |        6 |       19 |        7 |       15 |      16 |        1 |        7 |       14 |       20 |       13 |       18 |       7 |        4 |        8 |       28 |       25 |       10 |       13 |       7 |        0 |       15 |       20 |       10 |       15 |       13 |       7 |        6 |        6 |        6 |       11 |        3 |        3 |       0 |        3 |        6 |        8 |        8 |        2 |        4 |       1 |        0 |        0 |        2 |        3 |        2 |        1 |       0 |        1 |        2 |        4 |        2 |        1 |        1 |       0 |      0 |      0 |     10 |     22 |      9 |      9 |     10 |     89 |      0 |      0 |      0 |     27 |     22 |      6 |      6 |      6 |    108 |      0 |      0 |      2 |      9 |      7 |      3 |      2 |      2 |     42 |      0 |      0 |      0 |      1 |      5 |      1 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 5498200 |     221 |     53 |    112 |     7 |    0 |     2 |    3 |    1 |     1 |    0 |     42 |    0 |    0 |    0 |    0 |    108 |    113 |       2 |       4 |       3 |       1 |      2 |     11 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      0 |        0 |        2 |        5 |        6 |        7 |        3 |       0 |        1 |        3 |        6 |        6 |        7 |        3 |       4 |        3 |        3 |        9 |       15 |        7 |        9 |       8 |        7 |        3 |        9 |       13 |       10 |       10 |       6 |        1 |        4 |        6 |        6 |        3 |        0 |       2 |        1 |        2 |        7 |        4 |        2 |        3 |       1 |        1 |        3 |        1 |        1 |        3 |        0 |       0 |        1 |        2 |        0 |        2 |        0 |        0 |       0 |      0 |      1 |      4 |      4 |      2 |      2 |      6 |     34 |      0 |      0 |      0 |     12 |     14 |      8 |      4 |      6 |     68 |      0 |      0 |      1 |     11 |      6 |      1 |      0 |      0 |     23 |      0 |      0 |      1 |      3 |      2 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5499000 |     557 |    184 |    244 |    15 |    0 |    12 |   12 |    2 |     6 |    0 |     82 |    0 |    0 |    0 |    0 |    269 |    288 |      28 |      22 |      11 |       2 |     10 |     12 |      5 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       1 |       0 |       0 |      1 |      1 |      0 |      0 |        6 |       11 |       19 |       16 |       12 |        8 |       9 |        8 |       17 |       12 |       21 |       14 |       20 |      11 |       17 |       28 |       34 |       25 |        9 |        8 |       5 |       11 |       26 |       17 |       32 |       13 |       15 |       4 |        4 |        6 |        7 |       12 |        4 |        3 |       1 |        6 |       12 |        9 |       11 |        4 |        3 |       0 |        4 |        4 |        4 |        9 |        1 |        3 |       0 |        3 |        7 |        5 |        5 |        0 |        2 |       0 |      0 |      2 |     15 |     15 |     11 |     10 |      7 |    124 |      0 |      0 |      3 |     22 |     32 |     10 |      5 |     12 |    160 |      0 |      0 |      0 |     17 |     11 |      3 |      1 |      2 |     48 |      0 |      0 |      0 |      4 |      7 |      2 |      0 |      0 |     34 |      0 |     37 | s03      | R    |
| 5499100 |      48 |      9 |     20 |     4 |    0 |     1 |    0 |    1 |     2 |    0 |     11 |    0 |    0 |    0 |    0 |     20 |     28 |       1 |       3 |       1 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        3 |        0 |        0 |        1 |       0 |        2 |        5 |        1 |        1 |        0 |        0 |       0 |        3 |        4 |        1 |        2 |        1 |        0 |       0 |        0 |        2 |        2 |        0 |        0 |        0 |       0 |        0 |        3 |        0 |        1 |        2 |        1 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     16 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5499200 |     184 |     46 |     99 |     4 |    0 |     0 |    0 |    0 |     0 |    0 |     35 |    0 |    0 |    0 |    0 |     86 |     98 |       4 |       5 |       4 |       0 |      1 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        5 |        4 |        2 |        1 |       1 |        3 |        2 |        4 |       11 |        5 |        4 |       1 |        3 |        9 |        9 |       16 |        6 |        3 |       2 |        4 |        6 |        8 |       17 |        5 |        7 |       4 |        3 |        5 |        2 |        4 |        2 |        3 |       0 |        6 |        2 |        6 |        2 |        0 |        0 |       0 |        2 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      8 |      1 |      0 |      1 |     30 |      0 |      0 |      0 |     13 |     19 |     10 |      2 |      7 |     48 |      0 |      0 |      0 |      4 |      1 |      0 |      2 |      0 |     28 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5500000 |     338 |     84 |    173 |     8 |    0 |     3 |    1 |    1 |     2 |    0 |     66 |    0 |    0 |    0 |    0 |    174 |    164 |       6 |       5 |       3 |       0 |      0 |     11 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        2 |        3 |        3 |        8 |       10 |        4 |       4 |        4 |       10 |        5 |       11 |        8 |        9 |       3 |        8 |        7 |       22 |       19 |       17 |        9 |       7 |        1 |        8 |       15 |       25 |       13 |       15 |       7 |        9 |        5 |       11 |        7 |        6 |        2 |       1 |        7 |        5 |        9 |        2 |        0 |        0 |       2 |        4 |        0 |        3 |        1 |        2 |        0 |       0 |        1 |        1 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |     13 |     13 |      4 |      2 |      3 |     49 |      0 |      0 |      1 |     19 |     16 |      9 |      7 |     12 |    109 |      0 |      0 |      3 |     14 |      3 |      2 |      1 |      0 |     43 |      0 |      0 |      1 |      4 |      1 |      0 |      1 |      1 |      7 |      0 |     37 | s03      | R    |
| 5500100 |     562 |    163 |    294 |    10 |    0 |     9 |    2 |    2 |     3 |    0 |     79 |    0 |    0 |    0 |    0 |    243 |    319 |      25 |      14 |       8 |       1 |      4 |     13 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      1 |      2 |      0 |      0 |        6 |        9 |        5 |       16 |       11 |        9 |       5 |        6 |        5 |       11 |       20 |       20 |       31 |       9 |       10 |       14 |       28 |       37 |       22 |       28 |       2 |       16 |       21 |       22 |       38 |       25 |       30 |       1 |        7 |        5 |        8 |        4 |        2 |        5 |       0 |       11 |        9 |       10 |        4 |        7 |        5 |       2 |        3 |        3 |        1 |        2 |        0 |        1 |       0 |        5 |        3 |        2 |        3 |        1 |        2 |       0 |      0 |      1 |     20 |     18 |      7 |     12 |      5 |    100 |      0 |      0 |      3 |     38 |     43 |     13 |     13 |     21 |    163 |      0 |      0 |      4 |      7 |      5 |      2 |      1 |      2 |     58 |      0 |      0 |      0 |      1 |      7 |      0 |      0 |      1 |     17 |      0 |     37 | s03      | R    |
| 5500200 |     148 |     33 |     83 |     6 |    0 |     1 |    0 |    1 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     73 |     75 |       7 |       0 |       1 |       1 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        2 |        2 |        4 |        4 |        1 |       2 |        0 |        5 |        4 |        4 |        3 |        1 |       1 |        2 |        4 |       11 |       13 |        4 |        3 |       6 |        1 |        6 |       10 |       10 |        3 |        6 |       4 |        1 |        3 |        4 |        2 |        1 |        0 |       0 |        4 |        1 |        4 |        3 |        1 |        0 |       0 |        1 |        0 |        2 |        1 |        0 |        0 |       0 |        2 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      1 |      2 |      8 |      4 |      0 |      2 |     16 |      0 |      0 |      2 |      8 |      8 |      3 |     11 |      1 |     50 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |     18 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5500300 |       8 |      5 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      5 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        1 |        0 |        1 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5500500 |     174 |     46 |     84 |     9 |    0 |     2 |    1 |    1 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |     80 |     94 |       1 |       2 |       3 |       1 |      2 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        1 |        2 |        2 |        3 |        7 |       1 |        1 |        2 |        2 |        4 |        6 |       14 |       1 |        4 |        4 |        7 |        8 |       12 |        2 |       4 |        2 |        6 |        7 |        6 |        4 |       13 |       5 |        2 |        3 |        2 |        4 |        2 |        1 |       0 |        1 |        0 |        5 |        4 |        2 |        4 |       0 |        2 |        2 |        0 |        4 |        1 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        2 |       0 |      0 |      0 |     10 |      5 |      3 |      2 |      1 |     25 |      0 |      0 |      4 |     10 |     12 |      6 |      0 |      3 |     49 |      0 |      0 |      0 |     11 |      5 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5501100 |     224 |     62 |     90 |    19 |    0 |     4 |    2 |    2 |     2 |    0 |     43 |    0 |    0 |    0 |    0 |     90 |    134 |       9 |       7 |       3 |       1 |      2 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        6 |        1 |        6 |        1 |        5 |       0 |        3 |        9 |        7 |        8 |        6 |        8 |       0 |        3 |       13 |        6 |        5 |        5 |        2 |       1 |        7 |       17 |        9 |        8 |        7 |        5 |       2 |        3 |        4 |        4 |        7 |        1 |        1 |       0 |        3 |        6 |        4 |        4 |        2 |        4 |       0 |        4 |        2 |        3 |        3 |        1 |        1 |       0 |        2 |        2 |        4 |        5 |        1 |        1 |       0 |      0 |      0 |     10 |      6 |      3 |      1 |      1 |     41 |      0 |      0 |      2 |     10 |      7 |      3 |      0 |      1 |     67 |      0 |      0 |      3 |      8 |      3 |      1 |      0 |      0 |     28 |      0 |      0 |      1 |      5 |      6 |      0 |      0 |      0 |     17 |      0 |     37 | s03      | R    |
| 5515000 |     473 |    114 |    246 |    10 |    0 |     8 |    7 |    0 |     1 |    0 |     87 |    0 |    0 |    0 |    0 |    225 |    248 |       7 |      11 |      10 |       2 |      5 |     11 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        1 |        1 |       13 |       12 |        9 |        3 |       5 |        2 |        7 |       15 |       15 |       12 |       11 |       8 |       17 |        9 |       33 |       27 |       14 |       14 |       6 |       13 |       12 |       25 |       33 |       15 |       12 |      16 |        9 |        6 |        9 |       11 |        7 |        1 |       2 |        6 |        8 |       14 |       10 |        3 |        1 |       0 |        3 |        3 |        1 |        4 |        3 |        2 |       0 |        1 |        1 |        4 |        2 |        2 |        0 |       0 |      0 |      0 |     14 |     19 |     14 |      7 |      8 |     52 |      0 |      0 |      1 |     28 |     28 |     16 |     14 |     12 |    147 |      0 |      0 |      0 |      9 |     13 |      9 |      1 |      6 |     49 |      0 |      0 |      0 |      7 |      5 |      0 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 5515100 |     566 |    172 |    281 |    20 |    0 |     2 |    7 |    4 |     3 |    0 |     77 |    0 |    0 |    0 |    0 |    254 |    312 |      16 |      14 |       7 |       1 |     10 |      8 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      1 |      0 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        5 |       11 |        9 |       19 |       10 |       6 |        4 |        6 |       13 |       28 |       24 |       26 |       7 |        9 |       14 |       26 |       33 |       22 |       26 |       5 |        7 |       10 |       29 |       30 |       35 |       27 |       8 |        4 |        5 |       10 |       12 |        9 |        3 |       1 |        4 |        3 |        6 |       11 |        1 |        8 |       0 |        2 |        0 |        2 |        4 |        0 |        3 |       0 |        4 |        7 |        5 |        5 |        1 |        3 |       0 |      0 |      0 |     24 |     32 |     10 |      4 |      8 |     94 |      0 |      0 |      2 |     39 |     44 |     16 |     13 |      9 |    158 |      0 |      0 |      1 |      5 |     15 |      5 |      2 |      2 |     47 |      0 |      0 |      0 |      7 |     12 |      1 |      2 |      1 |     13 |      0 |     37 | s03      | R    |
| 5515200 |     153 |     38 |     87 |     5 |    0 |     1 |    0 |    0 |     1 |    0 |     21 |    0 |    0 |    0 |    0 |     67 |     86 |       3 |       5 |       2 |       1 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        2 |        5 |        2 |        1 |       4 |        0 |        1 |        3 |        8 |        2 |        4 |       3 |        4 |        2 |       11 |       10 |        6 |        3 |       3 |        8 |        3 |       14 |       12 |        4 |        3 |       4 |        1 |        1 |        2 |        2 |        0 |        1 |       0 |        4 |        2 |        4 |        3 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      5 |      2 |      2 |      3 |     22 |      0 |      0 |      0 |     11 |     12 |      6 |      2 |      4 |     52 |      0 |      0 |      1 |      4 |      2 |      1 |      0 |      0 |     13 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5516000 |     241 |     58 |    115 |     9 |    0 |     4 |    2 |    1 |     1 |    0 |     51 |    0 |    0 |    0 |    0 |    112 |    129 |       9 |      10 |       6 |       2 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |        3 |        4 |        9 |        3 |        6 |       1 |        2 |        8 |        3 |        8 |        3 |        8 |       0 |        8 |        5 |       14 |        9 |       13 |        1 |       0 |       12 |        9 |       14 |       11 |        8 |        8 |       3 |        2 |        4 |        9 |        9 |        2 |        1 |       0 |        4 |        4 |        3 |        8 |        4 |        1 |       0 |        1 |        3 |        1 |        1 |        3 |        0 |       0 |        2 |        1 |        4 |        0 |        0 |        1 |       0 |      0 |      1 |      6 |      4 |      1 |      1 |      1 |     44 |      0 |      0 |      2 |     12 |      9 |      1 |      2 |      2 |     87 |      0 |      0 |      0 |     11 |      2 |      2 |      0 |      1 |     35 |      0 |      0 |      1 |      3 |      3 |      0 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 5516100 |     426 |     91 |    234 |    12 |    0 |     5 |    4 |    4 |     0 |    0 |     76 |    0 |    0 |    0 |    0 |    199 |    227 |      13 |       6 |       7 |       1 |      3 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      1 |        0 |        3 |        6 |       10 |        7 |        8 |       4 |        3 |        4 |        8 |       15 |       12 |        6 |       5 |        8 |       14 |       27 |       36 |       18 |       11 |       3 |        7 |       20 |       30 |       32 |       14 |       11 |       3 |        4 |        5 |        6 |       11 |        6 |        1 |       0 |       11 |        8 |        8 |       11 |        3 |        2 |       0 |        2 |        2 |        3 |        3 |        1 |        0 |       0 |        0 |        4 |        7 |        1 |        2 |        0 |       0 |      0 |      0 |     11 |     14 |      8 |      8 |      4 |     46 |      0 |      0 |      3 |     20 |     34 |     11 |     11 |      6 |    149 |      0 |      0 |      0 |     16 |      1 |      5 |      2 |      0 |     52 |      0 |      0 |      0 |      3 |      9 |      0 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
| 5516200 |     185 |     47 |     94 |     2 |    0 |     1 |    1 |    0 |     1 |    0 |     39 |    0 |    0 |    0 |    0 |     81 |    104 |       6 |       6 |       6 |       0 |      1 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      2 |      0 |        0 |        1 |        2 |        1 |        4 |        4 |       1 |        3 |        5 |        3 |       14 |        3 |        5 |       1 |        2 |       14 |        9 |       16 |        3 |        1 |       0 |        4 |        9 |       14 |       11 |        6 |        4 |       1 |        3 |        2 |        5 |        6 |        2 |        0 |       0 |        3 |        6 |        7 |        3 |        2 |        0 |       0 |        1 |        0 |        1 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      7 |      8 |      1 |      2 |     27 |      0 |      0 |      0 |      6 |     21 |      5 |      0 |      1 |     61 |      0 |      0 |      1 |     10 |      5 |      5 |      0 |      0 |     18 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5516900 |      93 |     24 |     47 |     1 |    0 |     0 |    1 |    0 |     2 |    0 |     18 |    0 |    0 |    0 |    0 |     46 |     47 |       3 |       2 |       2 |       0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        2 |        2 |        3 |        1 |       1 |        0 |        2 |        3 |        3 |        3 |        2 |       0 |        1 |        2 |        5 |        3 |        8 |        0 |       1 |        2 |        2 |       10 |        1 |        7 |        3 |       2 |        3 |        5 |        3 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |      3 |      0 |      4 |      1 |     11 |      0 |      0 |      0 |     10 |      5 |      1 |      2 |      0 |     29 |      0 |      0 |      0 |      2 |      2 |      2 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5517000 |     412 |    127 |    204 |    12 |    0 |     3 |    3 |    1 |     4 |    0 |     58 |    0 |    0 |    0 |    0 |    180 |    232 |       7 |       8 |       0 |       4 |      3 |      8 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        2 |        3 |        7 |        8 |        5 |       27 |       1 |        1 |        5 |        5 |       15 |        9 |       35 |       4 |        6 |        8 |        7 |       12 |       11 |       44 |       2 |        7 |        9 |        8 |       14 |       21 |       51 |       4 |        5 |        0 |        5 |        7 |        4 |        5 |       0 |        5 |        1 |        6 |        9 |        6 |        5 |       0 |        2 |        0 |        2 |        3 |        2 |        2 |       0 |        0 |        0 |        3 |        2 |        3 |        4 |       0 |      0 |      1 |     14 |     19 |      8 |      7 |      4 |     74 |      0 |      0 |      0 |     39 |     28 |      5 |      3 |      9 |    120 |      0 |      0 |      1 |     10 |      6 |      5 |      0 |      2 |     34 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      1 |     13 |      0 |     37 | s03      | R    |
| 5517100 |     282 |     69 |    145 |    10 |    0 |     5 |    5 |    4 |     1 |    0 |     43 |    0 |    0 |    0 |    0 |    117 |    165 |       7 |       6 |       3 |       3 |      1 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      1 |      0 |        1 |        3 |        2 |       12 |        3 |        3 |       2 |        3 |        6 |        7 |       16 |        9 |        2 |       0 |        6 |        4 |       18 |       22 |        7 |        3 |       0 |       11 |       11 |       23 |       23 |        8 |        7 |       2 |        2 |        5 |        4 |        6 |        2 |        0 |       0 |        6 |        8 |        5 |        4 |        1 |        0 |       0 |        3 |        4 |        3 |        1 |        0 |        1 |       0 |        5 |        1 |        3 |        3 |        0 |        1 |       0 |      0 |      0 |      7 |     12 |      3 |      1 |      8 |     38 |      0 |      0 |      0 |     21 |     34 |      8 |      8 |      8 |     66 |      0 |      0 |      1 |     10 |      9 |      0 |      0 |      1 |     22 |      0 |      0 |      1 |      2 |      8 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5517200 |     273 |     94 |    122 |     5 |    0 |     5 |    4 |    0 |     1 |    0 |     42 |    0 |    0 |    0 |    0 |    128 |    145 |       8 |       4 |       5 |       0 |      4 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        5 |        7 |        8 |        5 |        3 |       5 |        4 |        5 |       10 |       15 |        7 |        9 |       6 |        5 |        4 |       20 |        9 |       10 |       11 |       2 |        7 |        7 |       20 |       11 |        5 |        7 |       4 |        4 |        1 |        5 |        6 |        4 |        2 |       0 |        4 |        4 |        4 |        6 |        2 |        0 |       0 |        1 |        1 |        2 |        2 |        0 |        1 |       0 |        1 |        0 |        4 |        2 |        0 |        1 |       0 |      0 |      1 |     11 |      5 |      7 |      1 |      6 |     63 |      0 |      0 |      2 |     16 |     17 |      8 |      4 |      7 |     68 |      0 |      0 |      0 |      4 |      3 |      3 |      0 |      1 |     31 |      0 |      0 |      0 |      2 |      6 |      1 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 5517300 |      77 |     28 |     28 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     35 |     42 |       0 |       3 |       1 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        3 |        2 |       2 |        1 |        1 |        4 |        4 |        0 |        3 |       3 |        2 |        1 |        4 |        2 |        2 |        0 |       0 |        1 |        1 |        7 |        2 |        1 |        4 |       1 |        0 |        3 |        4 |        1 |        2 |        0 |       0 |        1 |        1 |        2 |        3 |        0 |        1 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      6 |      4 |      1 |     12 |      0 |      0 |      1 |      3 |      5 |      1 |      1 |      0 |     17 |      0 |      0 |      1 |      2 |      3 |      1 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5518000 |     474 |    137 |    248 |    16 |    0 |     6 |    4 |    1 |     2 |    0 |     60 |    0 |    0 |    0 |    0 |    210 |    264 |      19 |      18 |       5 |       0 |      8 |     15 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        5 |       12 |       10 |        7 |       19 |       4 |        4 |        7 |       16 |       14 |        8 |       26 |       1 |        4 |       10 |       33 |       20 |       16 |       25 |       4 |        7 |       22 |       24 |       22 |       27 |       32 |       2 |        3 |        5 |        4 |        6 |        4 |        3 |       0 |       10 |       10 |        4 |        3 |        2 |        6 |       0 |        0 |        1 |        3 |        6 |        1 |        1 |       0 |        0 |        2 |        3 |        5 |        1 |        6 |       0 |      0 |      2 |     22 |     19 |      8 |      8 |      8 |     70 |      0 |      0 |      0 |     38 |     41 |     13 |     10 |     16 |    130 |      0 |      0 |      0 |     11 |     10 |      3 |      0 |      1 |     35 |      0 |      0 |      1 |      6 |      6 |      2 |      1 |      1 |     12 |      0 |     37 | s03      | R    |
| 5518100 |     340 |    101 |    153 |    10 |    0 |     5 |    4 |    1 |     0 |    0 |     66 |    0 |    0 |    0 |    0 |    160 |    180 |       6 |       8 |       1 |       3 |      2 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        9 |        5 |       10 |        6 |        3 |       4 |        3 |       10 |        8 |       12 |        8 |        7 |      14 |        4 |       14 |       21 |       12 |       13 |        9 |       8 |        4 |       12 |       23 |        8 |        8 |        9 |       8 |        4 |       10 |        6 |        5 |        3 |        1 |       2 |        8 |        9 |        5 |        5 |        4 |        1 |       3 |        1 |        2 |        1 |        3 |        2 |        0 |       0 |        0 |        3 |        5 |        1 |        1 |        1 |       0 |      0 |      0 |     12 |     15 |      9 |      0 |      4 |     61 |      0 |      0 |      1 |     18 |     22 |     12 |      8 |      6 |     86 |      0 |      0 |      0 |      9 |     10 |      2 |      2 |      1 |     42 |      0 |      0 |      2 |      2 |      4 |      2 |      1 |      0 |      9 |      0 |     37 | s03      | R    |
| 5519100 |     423 |    103 |    219 |    14 |    0 |     7 |    6 |    1 |     4 |    0 |     69 |    0 |    0 |    0 |    0 |    199 |    224 |       8 |      12 |       8 |       1 |      8 |     10 |      2 |      3 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      3 |      1 |        3 |        3 |        2 |       10 |        6 |        7 |       2 |        3 |        5 |       16 |       14 |       16 |       14 |       2 |        9 |       15 |       29 |       24 |       16 |       13 |       4 |       12 |       17 |       29 |       18 |       14 |       13 |       6 |        8 |        8 |        6 |        5 |        7 |        3 |       3 |        3 |        7 |        8 |        5 |        3 |        3 |       0 |        6 |        2 |        2 |        5 |        0 |        1 |       0 |        5 |        1 |        2 |        7 |        0 |        1 |       0 |      0 |      0 |     17 |     15 |      5 |      2 |      0 |     64 |      0 |      0 |      2 |     39 |     28 |      8 |      6 |      9 |    127 |      0 |      0 |      0 |      7 |     10 |      2 |      2 |      0 |     48 |      0 |      0 |      0 |      6 |      3 |      1 |      0 |      0 |     22 |      0 |     37 | s03      | R    |
| 5520100 |     565 |    144 |    320 |     9 |    0 |     5 |    4 |    1 |     1 |    0 |     81 |    0 |    0 |    0 |    0 |    271 |    294 |      12 |      14 |       2 |       0 |      2 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        7 |        8 |       23 |       18 |        7 |       1 |        4 |        9 |       10 |       34 |        8 |        7 |       4 |       15 |       18 |       26 |       67 |       14 |       12 |       2 |       24 |       12 |       43 |       56 |       21 |       10 |       0 |        9 |        3 |        9 |       12 |        4 |        2 |       0 |       13 |        4 |        8 |       13 |        3 |        1 |       0 |        2 |        1 |        4 |        2 |        0 |        1 |       0 |        2 |        0 |        4 |        3 |        0 |        1 |       0 |      0 |      0 |     21 |     23 |     14 |     10 |     12 |     64 |      0 |      0 |      1 |     40 |     55 |     18 |     16 |     23 |    167 |      0 |      0 |      2 |     11 |      7 |      8 |      1 |      3 |     49 |      0 |      0 |      1 |      3 |      5 |      2 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5520200 |     407 |    145 |    182 |    12 |    0 |     4 |    3 |    1 |     2 |    0 |     58 |    0 |    0 |    0 |    0 |    166 |    241 |       7 |       5 |       1 |       2 |      6 |      8 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        4 |        4 |        9 |       19 |       16 |       2 |        3 |        6 |        8 |       17 |       28 |       25 |       3 |        2 |       13 |       10 |       21 |       14 |       15 |       1 |        3 |       11 |       20 |       14 |       25 |       32 |       1 |        2 |        3 |        8 |        4 |        5 |        3 |       0 |        9 |        1 |        5 |        8 |        6 |        4 |       0 |        1 |        0 |        4 |        2 |        2 |        1 |       0 |        2 |        3 |        3 |        2 |        2 |        0 |       0 |      0 |      1 |     28 |     17 |      7 |      6 |      9 |     77 |      0 |      0 |      3 |     31 |     22 |      9 |     10 |      5 |    102 |      0 |      0 |      3 |     16 |      5 |      4 |      2 |      1 |     27 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     15 |      0 |     37 | s03      | R    |
| 5520300 |     588 |    107 |    375 |    10 |    0 |     3 |    6 |    3 |     1 |    0 |     83 |    0 |    0 |    0 |    0 |    280 |    308 |      11 |      14 |       1 |       1 |      3 |     15 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      2 |      4 |      0 |      0 |        9 |        4 |        1 |       13 |       17 |        6 |       2 |        6 |        4 |        6 |       23 |        7 |        6 |       3 |       19 |       11 |       27 |       52 |       45 |       23 |       5 |       22 |       20 |       37 |       55 |       35 |       19 |       5 |       10 |        0 |        9 |       10 |        6 |        3 |       0 |       14 |        6 |        9 |        6 |        9 |        1 |       0 |        3 |        1 |        0 |        2 |        2 |        0 |       0 |        3 |        4 |        3 |        2 |        3 |        0 |       0 |      0 |      2 |     19 |     22 |      5 |      5 |      9 |     45 |      0 |      0 |      1 |     34 |     77 |     29 |     28 |     27 |    179 |      0 |      0 |      0 |      9 |      8 |      7 |      4 |      5 |     50 |      0 |      0 |      1 |      7 |      5 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5520400 |     196 |     59 |     99 |     2 |    0 |     4 |    2 |    2 |     0 |    0 |     28 |    0 |    0 |    0 |    0 |    100 |     96 |       3 |       6 |       0 |       0 |      5 |      3 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        1 |        2 |        6 |        5 |        4 |       0 |        2 |        2 |        6 |       10 |        5 |        8 |       3 |        4 |        6 |       12 |       13 |       10 |       11 |       0 |        6 |        3 |       10 |        9 |        9 |        6 |       0 |        0 |        1 |        3 |        6 |        2 |        3 |       0 |        4 |        0 |        2 |        0 |        4 |        3 |       0 |        0 |        1 |        0 |        2 |        2 |        1 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       1 |      0 |      1 |     14 |      5 |      5 |     10 |      5 |     19 |      0 |      0 |      3 |      9 |     26 |      4 |     12 |     10 |     35 |      0 |      0 |      0 |      5 |      3 |      3 |      4 |      1 |     12 |      0 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5520500 |     110 |     27 |     56 |     3 |    0 |     0 |    1 |    0 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     50 |     60 |       3 |       1 |       1 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        3 |        4 |        2 |       2 |        0 |        2 |        7 |        1 |        0 |        1 |       4 |        6 |        2 |        3 |        3 |        7 |        2 |       4 |        2 |        1 |        3 |        5 |        7 |        6 |       5 |        2 |        0 |        3 |        2 |        1 |        0 |       0 |        3 |        2 |        3 |        3 |        3 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |      2 |      0 |      2 |      0 |     21 |      0 |      0 |      0 |      4 |      9 |      3 |      5 |      0 |     35 |      0 |      0 |      0 |      4 |      0 |      1 |      0 |      0 |     17 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5521000 |     128 |     33 |     62 |     5 |    0 |     1 |    0 |    0 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |     65 |     63 |       3 |       1 |       0 |       0 |      7 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        1 |        0 |        3 |        2 |        2 |       2 |        2 |        4 |        3 |        6 |        2 |        4 |       1 |        2 |        2 |       10 |        6 |        6 |        5 |       1 |        1 |        5 |        9 |        7 |        6 |        2 |       0 |        2 |        1 |        6 |        6 |        1 |        2 |       0 |        0 |        0 |        4 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |      0 |      0 |      6 |      2 |      3 |      0 |      0 |     22 |      0 |      0 |      2 |      7 |      3 |      2 |      0 |      1 |     47 |      0 |      0 |      0 |      4 |      2 |      1 |      0 |      0 |     19 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5521100 |     365 |    141 |    187 |     6 |    0 |     5 |    1 |    1 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |    148 |    217 |       5 |       3 |       0 |       0 |      4 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        0 |        0 |        3 |        1 |        4 |       41 |       4 |        0 |        0 |        0 |        1 |       15 |       71 |       1 |        0 |        0 |        1 |        2 |       15 |       60 |       1 |        0 |        1 |        0 |        3 |       21 |       81 |       2 |        0 |        1 |        0 |        1 |        3 |        4 |       0 |        0 |        0 |        0 |        1 |        4 |       10 |       0 |        0 |        0 |        0 |        0 |        2 |        5 |       0 |        0 |        1 |        0 |        1 |        1 |        3 |       0 |      0 |      0 |     24 |     11 |     12 |      5 |      9 |     80 |      0 |      0 |      1 |     20 |     36 |      6 |      7 |      6 |    111 |      0 |      0 |      2 |      3 |      5 |      1 |      0 |      2 |     11 |      0 |      0 |      0 |      3 |      3 |      0 |      2 |      0 |      5 |      0 |     37 | s03      | R    |
| 5521200 |     364 |     75 |    216 |     5 |    0 |     9 |    3 |    0 |     2 |    0 |     54 |    0 |    0 |    0 |    0 |    186 |    178 |       6 |       3 |       2 |       0 |      0 |     10 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        3 |        4 |       12 |        7 |        6 |       3 |        1 |        0 |       10 |       16 |        7 |        3 |       3 |        9 |        5 |       17 |       28 |       37 |       17 |       2 |        7 |        7 |       22 |       28 |       24 |       10 |       3 |        3 |        4 |        6 |        9 |        5 |        2 |       0 |        3 |        1 |        4 |        8 |        4 |        5 |       0 |        1 |        2 |        2 |        1 |        1 |        0 |       0 |        1 |        0 |        3 |        7 |        0 |        1 |       0 |      0 |      0 |      9 |     24 |      5 |      2 |      1 |     34 |      0 |      0 |      2 |     35 |     53 |     12 |     11 |      6 |     97 |      0 |      0 |      0 |     13 |      6 |      5 |      3 |      2 |     25 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5521500 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5521700 |       2 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5521800 |       2 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5522000 |     239 |     56 |    128 |     4 |    0 |     4 |    4 |    1 |     5 |    0 |     37 |    0 |    0 |    0 |    0 |    105 |    134 |       6 |       7 |       1 |       1 |      2 |      7 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        2 |        4 |        6 |        2 |        5 |       2 |        1 |        2 |        6 |        7 |       10 |        5 |       3 |        7 |        8 |       10 |       12 |       12 |        3 |       4 |        3 |        8 |       16 |       16 |       15 |        8 |       6 |        3 |        2 |        4 |        3 |        3 |        0 |       0 |        6 |        3 |        7 |        3 |        2 |        1 |       0 |        2 |        4 |        3 |        1 |        1 |        1 |       0 |        3 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      2 |      2 |      9 |      5 |      0 |      1 |     37 |      0 |      0 |      3 |      9 |     21 |      5 |      4 |      6 |     80 |      0 |      0 |      0 |      6 |      2 |      2 |      0 |      2 |     25 |      0 |      0 |      0 |      3 |      3 |      0 |      1 |      0 |     11 |      0 |     37 | s03      | R    |
| 5522100 |     560 |    152 |    273 |    13 |    0 |     5 |    8 |    2 |     7 |    0 |    100 |    0 |    0 |    0 |    0 |    257 |    303 |      18 |      11 |       7 |       4 |      0 |     11 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        6 |       17 |        7 |       13 |       20 |       1 |        5 |        8 |       20 |       10 |       17 |       23 |       3 |        8 |       10 |       31 |       29 |       20 |       22 |       3 |       16 |       24 |       32 |       28 |       16 |       31 |       3 |        9 |       12 |        9 |       14 |        6 |        4 |       0 |        6 |        8 |       16 |        7 |        8 |        1 |       0 |        0 |        3 |        6 |        3 |        0 |        2 |       0 |        5 |        2 |        6 |        7 |        0 |        1 |       0 |      0 |      3 |     16 |     24 |      5 |      7 |      8 |     89 |      0 |      0 |      2 |     36 |     16 |      7 |      8 |     13 |    191 |      0 |      0 |      1 |     18 |      3 |      2 |      4 |      0 |     72 |      0 |      0 |      1 |      5 |     12 |      1 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 5522200 |      15 |      2 |      9 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      8 |      7 |       1 |       1 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        4 |       0 |        0 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5531000 |     604 |    190 |    250 |    14 |    0 |    10 |    8 |    3 |     9 |    0 |    120 |    0 |    0 |    0 |    0 |    285 |    319 |      12 |      25 |      11 |       2 |     16 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      2 |      0 |        7 |        2 |       13 |       29 |       16 |        9 |       4 |       10 |        7 |       26 |       31 |       16 |       16 |       4 |        8 |       18 |       38 |       36 |       17 |       11 |       5 |        9 |       18 |       37 |       24 |       13 |       13 |       3 |        6 |       11 |       15 |       13 |        5 |        1 |       0 |        8 |       16 |       23 |       13 |        7 |        1 |       1 |        6 |        4 |        3 |        4 |        4 |        0 |       0 |        1 |        8 |        4 |        8 |        2 |        0 |       0 |      0 |      1 |     28 |     18 |     17 |     12 |      3 |    111 |      0 |      0 |      0 |     28 |     54 |     10 |     12 |     11 |    135 |      0 |      0 |      3 |     25 |     14 |      8 |      4 |      2 |     64 |      0 |      0 |      0 |      6 |     15 |      1 |      1 |      2 |     19 |      0 |     37 | s03      | R    |
| 5531100 |      36 |     10 |     23 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     15 |     21 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        2 |        2 |       0 |        0 |        0 |        2 |        5 |        2 |        2 |       0 |        1 |        0 |        3 |        5 |        0 |        3 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      2 |      1 |      3 |      0 |      0 |      1 |      0 |      6 |      6 |      0 |      4 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5531200 |     243 |     49 |    140 |     2 |    0 |     3 |    0 |    1 |     3 |    0 |     45 |    0 |    0 |    0 |    0 |    118 |    125 |       3 |       6 |       3 |       0 |      1 |      8 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      3 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        1 |        1 |        3 |        6 |        5 |        1 |       1 |        3 |        2 |        9 |        6 |        7 |        3 |       1 |        1 |        6 |       17 |       28 |       10 |       10 |       1 |        3 |        3 |       23 |       22 |        8 |        6 |       2 |        6 |        2 |        6 |        3 |        4 |        2 |       0 |        4 |        3 |        6 |        3 |        3 |        3 |       0 |        0 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        2 |        3 |        0 |        0 |       0 |      0 |      0 |      5 |     12 |     10 |      4 |      1 |     17 |      0 |      0 |      1 |     17 |     29 |     37 |     21 |      0 |     35 |      0 |      0 |      1 |      4 |      8 |      2 |      3 |      3 |     24 |      0 |      0 |      0 |      3 |      3 |      2 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5531300 |       4 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5531400 |     237 |     53 |    154 |     4 |    0 |     1 |    0 |    0 |     1 |    0 |     24 |    0 |    0 |    0 |    0 |    124 |    113 |       6 |      10 |       3 |       0 |      3 |     11 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        3 |        9 |        5 |        1 |       2 |        3 |        0 |        7 |       13 |        6 |        0 |       2 |       11 |        4 |       20 |       33 |       13 |        6 |       0 |        5 |        4 |       23 |       20 |       11 |        4 |       0 |        1 |        3 |        2 |        4 |        2 |        0 |       0 |        1 |        1 |        3 |        7 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      4 |      8 |     10 |     16 |      0 |     15 |      0 |      0 |      1 |     30 |     31 |     18 |     22 |      6 |     46 |      0 |      0 |      0 |      4 |      4 |      5 |      3 |      0 |      8 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      2 |      0 |     37 | s03      | R    |
| 5531500 |      15 |      1 |      9 |     0 |    0 |     2 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      6 |      9 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      2 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        3 |        0 |        0 |        2 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
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| 5543000 |     807 |    197 |    456 |    16 |    0 |     3 |    3 |    6 |     1 |    0 |    125 |    0 |    0 |    0 |    0 |    380 |    427 |      22 |      25 |      10 |       2 |     11 |     15 |      2 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        4 |       10 |        9 |       20 |       17 |       24 |       3 |        4 |       12 |       21 |       20 |       28 |       23 |       2 |       11 |       23 |       58 |       42 |       44 |       41 |       3 |       16 |       30 |       50 |       40 |       46 |       47 |       5 |        5 |        6 |        9 |       13 |       11 |       14 |       2 |       10 |        6 |       16 |       11 |       15 |        5 |       2 |        2 |        4 |        1 |        2 |        1 |        1 |       0 |        0 |        1 |        5 |        4 |        7 |        1 |       0 |      0 |      5 |     53 |     58 |      3 |      1 |      3 |     74 |      0 |      0 |      5 |     95 |    134 |     16 |      8 |      1 |    197 |      0 |      0 |      4 |     29 |     24 |      3 |      2 |      0 |     63 |      0 |      0 |      1 |      0 |     13 |      2 |      1 |      0 |     12 |      0 |     37 | s03      | R    |
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| 5543300 |     575 |    167 |    268 |    19 |    0 |     9 |    6 |    0 |     8 |    0 |     98 |    0 |    0 |    0 |    0 |    261 |    314 |      21 |      14 |       9 |       1 |      5 |     23 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      0 |      1 |        4 |        5 |       13 |       11 |       14 |       24 |       2 |        3 |       10 |       12 |       17 |       14 |       37 |       1 |        5 |       17 |       30 |       16 |       14 |       37 |       2 |       11 |       23 |       20 |       16 |       27 |       46 |       4 |        2 |        9 |       15 |       10 |        6 |        4 |       2 |        5 |        9 |        9 |       13 |        8 |        5 |       1 |        1 |        5 |        1 |        5 |        2 |        5 |       0 |        1 |        2 |        6 |        4 |        5 |        5 |       0 |      0 |      3 |     46 |     16 |      5 |      2 |      7 |     88 |      0 |      0 |      0 |     71 |     27 |      9 |      4 |      7 |    150 |      0 |      0 |      4 |     26 |      8 |      0 |      1 |      0 |     59 |      0 |      0 |      2 |      9 |      4 |      0 |      2 |      0 |     25 |      0 |     37 | s03      | R    |
| 5543500 |      15 |      2 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      7 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        2 |        0 |        1 |       0 |        0 |        1 |        2 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      4 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5543900 |     198 |     95 |     49 |    10 |    0 |     2 |    1 |    2 |     2 |    0 |     37 |    0 |    0 |    0 |    0 |     90 |    108 |      34 |       6 |       8 |       6 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        3 |        7 |       10 |        5 |        4 |        6 |       3 |        1 |       10 |        9 |       11 |        6 |       16 |       4 |        6 |        4 |        7 |        6 |        3 |        4 |       0 |        2 |        2 |        6 |        5 |        4 |        0 |       0 |        1 |        4 |        4 |        4 |        2 |        0 |       0 |        3 |        8 |        4 |        5 |        1 |        1 |       0 |        2 |        3 |        1 |        1 |        0 |        0 |       0 |        4 |        1 |        2 |        1 |        2 |        0 |       0 |      0 |      2 |     33 |     13 |      7 |      1 |      0 |     39 |      0 |      0 |      2 |      6 |      5 |      0 |      1 |      3 |     32 |      0 |      0 |      1 |     14 |      8 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      6 |      2 |      0 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 5544000 |     178 |     47 |     84 |     6 |    0 |     5 |    1 |    1 |     0 |    0 |     34 |    0 |    0 |    0 |    0 |     88 |     90 |       3 |       5 |       4 |       0 |      2 |      4 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        2 |        3 |        4 |        3 |        5 |       1 |        1 |        0 |        6 |       12 |        2 |        8 |       0 |        2 |        6 |        6 |       15 |        7 |        8 |       1 |        4 |        1 |        8 |        6 |       11 |        7 |       2 |        2 |        0 |        1 |        7 |        4 |        2 |       1 |        2 |        3 |        4 |        4 |        3 |        1 |       0 |        1 |        3 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        3 |        0 |       0 |      0 |      0 |     12 |     14 |      2 |      3 |      0 |     16 |      0 |      0 |      1 |     12 |     11 |      6 |      4 |      2 |     48 |      0 |      0 |      0 |      6 |      7 |      1 |      0 |      0 |     20 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5544100 |     100 |     33 |     42 |     3 |    0 |     1 |    1 |    0 |     0 |    0 |     20 |    0 |    0 |    0 |    0 |     49 |     51 |       1 |       0 |       1 |       1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      0 |        0 |        1 |        0 |        3 |        6 |        3 |       0 |        0 |        2 |        2 |        9 |        4 |        1 |       2 |        1 |        2 |        5 |        5 |        5 |        3 |       1 |        1 |        1 |        6 |        5 |        3 |        3 |       1 |        1 |        1 |        1 |        5 |        1 |        0 |       0 |        0 |        3 |        4 |        1 |        3 |        0 |       0 |        1 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      4 |      5 |      3 |      4 |      2 |     15 |      0 |      0 |      0 |      8 |      0 |      1 |      2 |      1 |     30 |      0 |      0 |      0 |      2 |      4 |      0 |      1 |      2 |     11 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5544200 |      13 |      7 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      9 |      4 |       1 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5544300 |       9 |      1 |      7 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5544400 |       9 |      4 |      4 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5544500 |      84 |     15 |     45 |     6 |    0 |     1 |    1 |    0 |     5 |    0 |     11 |    0 |    0 |    0 |    0 |     42 |     42 |       2 |       3 |       1 |       1 |      0 |      2 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        0 |        1 |        1 |        3 |       0 |        0 |        2 |        1 |        1 |        3 |        1 |       0 |        1 |        4 |        7 |        6 |        1 |        5 |       0 |        3 |        1 |        5 |        8 |        2 |        2 |       0 |        2 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        4 |        1 |        0 |        0 |       1 |        1 |        0 |        3 |        2 |        0 |        0 |       0 |        0 |        2 |        2 |        2 |        1 |        0 |       0 |      0 |      0 |      3 |      1 |      1 |      0 |      2 |      8 |      0 |      0 |      0 |      3 |      6 |      1 |      3 |      1 |     31 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      9 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      1 |      8 |      0 |     37 | s03      | R    |
| 5544900 |     523 |    155 |    261 |    12 |    0 |    13 |    6 |    1 |     1 |    0 |     74 |    0 |    0 |    0 |    0 |    248 |    275 |      21 |      15 |       1 |       1 |      1 |      8 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      4 |      0 |        6 |       10 |        8 |       16 |       16 |       12 |       3 |        5 |       10 |       16 |       22 |       14 |       12 |       5 |        6 |       18 |       32 |       23 |       25 |       20 |       4 |       11 |       19 |       31 |       22 |       22 |       24 |       4 |        6 |        3 |        4 |        5 |        9 |        4 |       1 |        4 |        4 |       11 |        9 |       10 |        4 |       0 |        5 |        1 |        2 |        3 |        2 |        4 |       0 |        0 |        3 |        3 |        3 |        4 |        3 |       0 |      0 |      1 |     19 |     26 |     13 |      4 |      8 |     84 |      0 |      0 |      0 |     28 |     39 |     14 |     13 |      7 |    160 |      0 |      0 |      1 |      9 |     12 |      0 |      2 |      2 |     48 |      0 |      0 |      1 |      4 |     13 |      0 |      0 |      1 |     14 |      0 |     37 | s03      | R    |
| 5545000 |     628 |    146 |    341 |    16 |    0 |     1 |    1 |    0 |     4 |    0 |    119 |    0 |    0 |    0 |    0 |    298 |    330 |      14 |      18 |      12 |       5 |      6 |     12 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      0 |      3 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      0 |      0 |        1 |        6 |       10 |       22 |        8 |        8 |       0 |        7 |       10 |       16 |       24 |       19 |       11 |       4 |        9 |       30 |       49 |       38 |       25 |       21 |       2 |       10 |       39 |       39 |       33 |       26 |       17 |       3 |        5 |       12 |       19 |        5 |       16 |        1 |       0 |       13 |       14 |       20 |        8 |        2 |        4 |       0 |        2 |        1 |        2 |        4 |        1 |        1 |       0 |        2 |        2 |        3 |        3 |        0 |        1 |       0 |      0 |      2 |     15 |     22 |     11 |      8 |      5 |     83 |      0 |      0 |      1 |     45 |     72 |     19 |     18 |      6 |    180 |      0 |      0 |      4 |     20 |      6 |      7 |      0 |      1 |     81 |      0 |      0 |      0 |      3 |      6 |      2 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5545100 |     866 |    170 |    543 |    19 |    0 |     2 |    4 |    1 |     1 |    0 |    126 |    0 |    0 |    0 |    0 |    422 |    444 |       9 |       9 |       4 |       0 |      4 |     35 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      5 |      0 |      1 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      3 |      0 |        9 |        4 |       10 |       19 |        8 |       12 |       3 |        5 |       10 |       17 |       27 |       19 |       20 |       7 |       19 |       17 |       63 |       68 |       57 |       45 |       9 |       14 |       18 |       57 |       75 |       59 |       34 |       8 |        5 |        5 |       14 |       18 |       13 |        9 |       1 |        6 |        9 |        9 |       12 |       16 |        9 |       0 |        3 |        0 |        1 |        7 |        1 |        2 |       0 |        2 |        3 |        3 |        4 |        1 |        0 |       0 |      0 |      2 |     26 |     27 |      8 |      6 |      5 |     96 |      0 |      0 |      5 |     85 |     74 |     24 |     29 |     20 |    306 |      0 |      0 |      2 |     26 |     15 |      6 |      2 |      3 |     72 |      0 |      0 |      0 |      4 |      6 |      0 |      1 |      0 |     16 |      0 |     37 | s03      | R    |
| 5545300 |       1 |      0 |      0 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5545600 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5545900 |      10 |      1 |      3 |     0 |    0 |     0 |    2 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      4 |      6 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5546000 |     605 |    143 |    298 |    16 |    0 |    11 |    5 |    3 |     7 |    0 |    122 |    0 |    0 |    0 |    0 |    271 |    334 |      20 |      21 |      13 |       2 |      4 |     11 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |       1 |       1 |       0 |       0 |      1 |      2 |      1 |      1 |        1 |        9 |       11 |       12 |       13 |        7 |       0 |        7 |       16 |       18 |       21 |       13 |       15 |       0 |       13 |       23 |       36 |       38 |       24 |       15 |       1 |       16 |       23 |       42 |       29 |       23 |       13 |       2 |        5 |        9 |       14 |        8 |        7 |        6 |       1 |       11 |       21 |       13 |       12 |        8 |        6 |       1 |        1 |        3 |        1 |        7 |        5 |        1 |       0 |        2 |        6 |        7 |        8 |        0 |        1 |       0 |      0 |      2 |     29 |     13 |     12 |      4 |      5 |     78 |      0 |      0 |      1 |     36 |     35 |     12 |      8 |      4 |    202 |      0 |      0 |      2 |     16 |     10 |      2 |      3 |      0 |     89 |      0 |      0 |      0 |      7 |      6 |      0 |      1 |      0 |     28 |      0 |     37 | s03      | R    |
| 5546100 |     323 |     80 |    178 |     9 |    0 |     5 |    2 |    0 |     2 |    0 |     47 |    0 |    0 |    0 |    0 |    160 |    163 |       8 |      15 |       2 |       0 |      3 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      0 |      0 |      0 |        0 |        5 |        9 |        6 |       11 |        7 |       1 |        1 |        6 |        7 |        8 |        7 |       10 |       2 |        5 |       14 |       22 |       14 |       15 |       14 |       3 |        5 |       17 |       22 |       21 |       13 |       10 |       3 |        4 |        9 |        5 |        3 |        3 |        1 |       0 |        2 |       10 |        4 |        4 |        2 |        0 |       0 |        1 |        1 |        2 |        1 |        4 |        0 |       0 |        3 |        2 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      7 |     14 |      2 |      4 |      4 |     49 |      0 |      0 |      1 |     13 |     39 |     11 |      4 |      3 |    107 |      0 |      0 |      0 |      5 |      5 |      1 |      1 |      0 |     35 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5546300 |       2 |      1 |      0 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5546400 |       3 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5546500 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5547000 |     606 |    139 |    348 |    16 |    0 |     7 |    5 |    0 |     4 |    0 |     87 |    0 |    0 |    0 |    0 |    297 |    309 |       4 |      13 |       6 |       2 |      6 |      6 |      3 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        4 |        2 |        2 |       21 |       17 |       10 |       3 |        3 |        7 |       12 |       19 |       19 |       15 |       5 |       19 |       13 |       33 |       49 |       34 |       26 |       5 |       12 |       18 |       38 |       48 |       26 |       23 |       4 |        7 |        3 |        9 |        8 |        9 |        3 |       2 |       11 |        4 |       11 |       12 |        4 |        3 |       1 |        2 |        4 |        1 |        5 |        3 |        3 |       0 |        2 |        3 |        4 |        2 |        1 |        2 |       0 |      0 |      2 |     19 |     11 |     17 |     13 |      8 |     69 |      0 |      0 |      2 |     38 |     87 |     19 |     20 |     20 |    162 |      0 |      0 |      1 |      8 |     12 |      4 |      5 |      0 |     57 |      0 |      0 |      0 |      5 |      6 |      1 |      2 |      2 |     16 |      0 |     37 | s03      | R    |
| 5547200 |       9 |      5 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      6 |      3 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5547300 |      28 |      6 |     15 |     1 |    0 |     1 |    0 |    0 |     1 |    0 |      4 |    0 |    0 |    0 |    0 |     14 |     14 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       1 |        1 |        0 |        2 |        2 |        3 |        0 |       0 |        1 |        0 |        4 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      2 |      9 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5547400 |      61 |     12 |     39 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     29 |     32 |       1 |       1 |       1 |       0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        2 |        4 |        2 |        0 |       0 |        1 |        1 |        4 |       10 |        3 |        1 |       0 |        1 |        0 |        7 |        6 |        4 |        1 |       0 |        0 |        0 |        1 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      5 |      3 |      0 |      0 |      4 |      0 |      0 |      0 |      3 |     10 |     10 |      0 |      0 |     16 |      0 |      0 |      0 |      2 |      4 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5547500 |      22 |      8 |     11 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     11 |     11 |       1 |       1 |       0 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        4 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5547800 |       7 |      2 |      2 |     0 |    0 |     2 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5548000 |     668 |    202 |    308 |    19 |    0 |     7 |    4 |    3 |     9 |    0 |    116 |    0 |    0 |    0 |    0 |    278 |    390 |       7 |      11 |       2 |       2 |      9 |      7 |      5 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      2 |      0 |      1 |      0 |      0 |      1 |       0 |       0 |       1 |       0 |      4 |      0 |      2 |      0 |        1 |        3 |        7 |       15 |       21 |       21 |       4 |        3 |        7 |       16 |       31 |       16 |       50 |       7 |        9 |        7 |       31 |       27 |       21 |       37 |       2 |        8 |       10 |       34 |       35 |       24 |       61 |       2 |        7 |        4 |        6 |       16 |        7 |        7 |       2 |       15 |        6 |        6 |       20 |        8 |       11 |       1 |        2 |        6 |        3 |        1 |        8 |        3 |       0 |        3 |        4 |        2 |        3 |        2 |        5 |       0 |      0 |      2 |     25 |     44 |     13 |      2 |     14 |    102 |      0 |      0 |      2 |     31 |     53 |     18 |     13 |     13 |    178 |      0 |      0 |      3 |     17 |     13 |      8 |      3 |      1 |     71 |      0 |      0 |      0 |      6 |     10 |      3 |      0 |      1 |     22 |      0 |     37 | s03      | R    |
| 5548200 |       9 |      5 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5548300 |     313 |     78 |    175 |     6 |    0 |     2 |    2 |    3 |     1 |    0 |     46 |    0 |    0 |    0 |    0 |    144 |    169 |      11 |       5 |       2 |       0 |      2 |      6 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        0 |        1 |        5 |       13 |        5 |        2 |       4 |        1 |        2 |        9 |       18 |        6 |        6 |       6 |        1 |        7 |       16 |       31 |       18 |       14 |       3 |       10 |        6 |       18 |       27 |       13 |        5 |       6 |        3 |        2 |        4 |        4 |        4 |        0 |       0 |        5 |        5 |        7 |        4 |        5 |        3 |       0 |        2 |        0 |        0 |        2 |        1 |        2 |       0 |        1 |        0 |        2 |        2 |        0 |        2 |       0 |      0 |      0 |      7 |     15 |      7 |      2 |      3 |     44 |      0 |      0 |      3 |     30 |     44 |     16 |      6 |      3 |     73 |      0 |      0 |      0 |      8 |     12 |      2 |      0 |      0 |     24 |      0 |      0 |      1 |      0 |      5 |      0 |      1 |      0 |      7 |      0 |     37 | s03      | R    |
| 5548400 |     324 |     79 |    184 |     4 |    0 |     6 |    1 |    2 |     2 |    0 |     46 |    0 |    0 |    0 |    0 |    153 |    171 |       6 |       2 |       3 |       1 |      2 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        8 |        6 |        7 |       2 |        7 |        2 |        4 |       18 |        6 |       12 |       4 |        5 |        9 |       20 |       24 |       22 |       15 |       1 |        6 |        5 |       20 |       29 |       14 |       13 |       1 |        5 |        2 |        4 |        5 |        3 |        5 |       2 |        4 |        2 |        7 |        2 |        2 |        1 |       2 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        1 |        1 |        2 |        5 |        0 |        1 |       0 |      0 |      0 |     14 |     13 |      5 |      9 |      7 |     31 |      0 |      0 |      2 |     27 |     42 |     19 |     16 |     13 |     65 |      0 |      0 |      0 |     11 |      1 |      4 |      0 |      3 |     27 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5548500 |      98 |     27 |     54 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     14 |    0 |    0 |    0 |    0 |     48 |     50 |       3 |       0 |       1 |       0 |      0 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        3 |        4 |        1 |        2 |       1 |        0 |        2 |        5 |        3 |        2 |        2 |       0 |        3 |        1 |       10 |        7 |        4 |        2 |       0 |        5 |        4 |        9 |        4 |        3 |        1 |       1 |        2 |        1 |        2 |        1 |        1 |        0 |       0 |        3 |        0 |        3 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |     21 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      1 |     48 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5558000 |     324 |     94 |    154 |     6 |    0 |     8 |   10 |    1 |     0 |    0 |     51 |    0 |    0 |    0 |    0 |    154 |    170 |       4 |       3 |       3 |       1 |      3 |      7 |      2 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        2 |        3 |        4 |       11 |       10 |        6 |       4 |        2 |        4 |       13 |       16 |        8 |        6 |       5 |        3 |        6 |        9 |       23 |       18 |       13 |       4 |        6 |        8 |       13 |       21 |       17 |       11 |       2 |        3 |        3 |        4 |        4 |        5 |        5 |       1 |        4 |        5 |        5 |        4 |        5 |        2 |       1 |        0 |        1 |        1 |        3 |        1 |        6 |       1 |        3 |        1 |        3 |        3 |        1 |        1 |       0 |      0 |      0 |     14 |     18 |      9 |      4 |      2 |     47 |      0 |      0 |      1 |     27 |     19 |      8 |      3 |     10 |     86 |      0 |      0 |      0 |      7 |      7 |      1 |      2 |      2 |     32 |      0 |      0 |      0 |      5 |     13 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
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| 5574100 |     319 |     91 |    167 |     8 |    0 |     3 |    0 |    0 |     2 |    0 |     48 |    0 |    0 |    0 |    0 |    144 |    175 |       6 |       8 |       1 |       1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      3 |      0 |        3 |        3 |        1 |        9 |        8 |        7 |       2 |        3 |        5 |        9 |       18 |        7 |       12 |       4 |        4 |        6 |       15 |       16 |       12 |       20 |       4 |        6 |        8 |       15 |       26 |       12 |       21 |       2 |        6 |        2 |        3 |        8 |        3 |        2 |       1 |        5 |        3 |        5 |        3 |        4 |        2 |       1 |        4 |        1 |        2 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        2 |        0 |       0 |      0 |      0 |      8 |     12 |      8 |      4 |      7 |     52 |      0 |      0 |      1 |     15 |     42 |      9 |     10 |      4 |     86 |      0 |      0 |      1 |     10 |      3 |      1 |      4 |      3 |     26 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5574400 |       9 |      0 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5574500 |     107 |     22 |     63 |     2 |    0 |     2 |    0 |    0 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     52 |     55 |       0 |       3 |       2 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        4 |        2 |       1 |        1 |        0 |        1 |        2 |        6 |        3 |       1 |        2 |        4 |        5 |        6 |       10 |        5 |       1 |        3 |        4 |        5 |        6 |        6 |        5 |       1 |        0 |        0 |        2 |        0 |        2 |        2 |       0 |        2 |        0 |        2 |        4 |        2 |        0 |       1 |        1 |        0 |        1 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     16 |      0 |      0 |      1 |      5 |     18 |      3 |      0 |      3 |     33 |      0 |      0 |      2 |      1 |      4 |      0 |      2 |      2 |      6 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5574600 |     148 |     27 |     86 |     3 |    0 |     1 |    2 |    0 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |     74 |     74 |       0 |       4 |       3 |       0 |      3 |      5 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        2 |        5 |       0 |        1 |        2 |        3 |        6 |        4 |        3 |       0 |        7 |        4 |        5 |       20 |        6 |        5 |       0 |        4 |        1 |       12 |       13 |        4 |        5 |       0 |        2 |        6 |        1 |        4 |        2 |        2 |       0 |        1 |        1 |        2 |        8 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        2 |       0 |      0 |      0 |      4 |      8 |      0 |      0 |      0 |     15 |      0 |      0 |      1 |     11 |     18 |     13 |      4 |      0 |     39 |      0 |      0 |      1 |      5 |      4 |      5 |      0 |      2 |     12 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5574900 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5575000 |     573 |    173 |    256 |    16 |    0 |     5 |    9 |    0 |     6 |    0 |    108 |    0 |    0 |    0 |    0 |    290 |    283 |       9 |      14 |       5 |       1 |      3 |      8 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      0 |      0 |      0 |        7 |        6 |        8 |       20 |       19 |       16 |       2 |        5 |       14 |       21 |       21 |       14 |       13 |       7 |       15 |       18 |       28 |       36 |       24 |       14 |       7 |       10 |       14 |       23 |       34 |       12 |       13 |       8 |        6 |        8 |       11 |        8 |       12 |        3 |       0 |       14 |        7 |       10 |       16 |        7 |        6 |       0 |        1 |        4 |        6 |        4 |        6 |        1 |       0 |        2 |        3 |        6 |        2 |        1 |        0 |       0 |      0 |      0 |     19 |     24 |     10 |     17 |     11 |     92 |      0 |      0 |      0 |     33 |     36 |     16 |     15 |     11 |    145 |      0 |      0 |      3 |     17 |     16 |      6 |      1 |      2 |     63 |      0 |      0 |      0 |      5 |     11 |      2 |      2 |      0 |     16 |      0 |     37 | s03      | R    |
| 5575100 |      26 |     10 |     10 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     17 |      9 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        1 |        2 |        0 |        0 |       1 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |        2 |        0 |        0 |        2 |        3 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5576000 |     614 |    166 |    282 |    24 |    0 |     5 |   16 |    4 |     9 |    0 |    108 |    0 |    0 |    0 |    0 |    303 |    311 |       7 |      12 |       5 |       3 |      2 |     10 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      3 |      1 |        4 |        5 |        7 |       22 |        9 |       12 |       9 |        3 |        5 |       14 |       37 |       12 |       16 |      11 |       14 |        8 |       26 |       48 |       24 |       15 |       8 |       13 |       11 |       35 |       37 |       22 |       13 |       8 |       13 |        5 |       16 |       18 |        6 |        2 |       0 |        6 |        6 |       12 |       21 |        3 |        0 |       0 |        2 |        3 |        3 |       13 |        9 |        2 |       0 |        3 |        2 |        6 |        9 |        5 |        1 |       0 |      0 |      2 |     21 |     29 |     15 |      8 |     14 |     77 |      0 |      0 |      2 |     34 |     47 |     18 |     13 |     18 |    150 |      0 |      0 |      2 |     11 |     17 |     12 |      5 |      6 |     55 |      0 |      0 |      1 |      8 |     13 |      5 |      4 |      2 |     25 |      0 |     37 | s03      | R    |
| 5576100 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5576200 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5584900 |      59 |      8 |     43 |     2 |    0 |     0 |    0 |    0 |     2 |    0 |      4 |    0 |    0 |    0 |    0 |     28 |     31 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        2 |        0 |        1 |       1 |        3 |        2 |        1 |        3 |        6 |        3 |       2 |        2 |        4 |        5 |        5 |        5 |        1 |       1 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      4 |      2 |      4 |      8 |      5 |     20 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5585000 |     575 |    180 |    275 |     8 |    0 |     4 |    5 |    0 |     0 |    0 |    103 |    0 |    0 |    0 |    0 |    241 |    334 |      22 |       4 |       4 |       3 |      7 |      7 |      3 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      4 |      0 |       0 |       0 |       0 |       0 |      3 |      4 |      0 |      1 |        3 |        6 |        9 |       21 |       19 |        8 |       1 |        8 |       11 |       19 |       36 |       27 |       11 |       1 |       11 |       11 |       26 |       36 |       24 |       12 |       0 |       16 |       19 |       27 |       50 |       18 |       24 |       1 |        7 |        8 |        6 |       16 |        6 |        3 |       0 |       15 |        5 |       11 |       10 |        6 |       10 |       0 |        3 |        2 |        0 |        1 |        1 |        1 |       0 |        5 |        0 |        1 |        1 |        2 |        0 |       0 |      0 |      2 |     24 |     23 |     13 |      5 |     16 |     97 |      0 |      0 |      0 |     25 |     47 |     13 |     19 |     21 |    150 |      0 |      0 |      1 |     22 |     15 |      2 |      0 |      7 |     56 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |     13 |      0 |     37 | s03      | R    |
| 5585100 |     262 |     90 |    106 |    11 |    0 |     3 |    1 |    0 |     1 |    0 |     50 |    0 |    0 |    0 |    0 |    105 |    157 |      16 |       8 |       7 |       2 |      7 |      5 |      1 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        0 |        8 |        4 |        4 |        3 |        4 |       1 |       10 |       15 |       11 |       15 |       10 |        5 |       0 |       10 |       16 |        7 |       11 |        2 |        4 |       0 |       11 |        9 |        8 |       13 |        8 |        7 |       0 |        5 |        8 |        3 |        3 |        1 |        0 |       0 |       11 |       10 |        4 |        3 |        2 |        0 |       0 |        1 |        4 |        3 |        2 |        1 |        0 |       0 |        2 |        1 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     12 |      6 |      5 |      4 |      1 |     62 |      0 |      0 |      0 |      9 |      5 |      7 |      4 |      4 |     77 |      0 |      0 |      1 |      3 |      3 |      0 |      0 |      0 |     43 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5585200 |     490 |    132 |    251 |    10 |    0 |     4 |    3 |    1 |     3 |    0 |     86 |    0 |    0 |    0 |    0 |    202 |    288 |      17 |      19 |       5 |       1 |      5 |      6 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |       1 |       3 |       1 |       0 |      3 |      1 |      4 |      0 |        6 |        5 |        7 |        6 |        5 |       18 |       1 |        4 |       12 |       11 |       16 |       10 |       30 |       1 |        8 |       22 |       19 |       16 |       17 |       21 |       0 |        9 |       36 |       33 |       28 |       15 |       27 |       0 |        5 |        6 |       11 |        5 |        3 |        7 |       0 |        7 |       12 |        7 |       10 |        5 |        8 |       0 |        0 |        5 |        4 |        2 |        2 |        1 |       0 |        2 |        1 |        0 |        2 |        1 |        1 |       0 |      0 |      0 |     25 |     26 |      3 |      0 |      0 |     78 |      0 |      0 |      2 |     46 |     31 |      2 |      1 |      0 |    169 |      0 |      0 |      1 |     11 |      5 |      1 |      0 |      0 |     68 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5585300 |     189 |     65 |     73 |     4 |    0 |     2 |    0 |    0 |     3 |    0 |     42 |    0 |    0 |    0 |    0 |     68 |    121 |       8 |       4 |       4 |       2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |       2 |       0 |       0 |       0 |      1 |      2 |      1 |      0 |        1 |        3 |        2 |        3 |        0 |        6 |       0 |        6 |        8 |        7 |        9 |        2 |       17 |       1 |        2 |        5 |        5 |        4 |        3 |        7 |       0 |        3 |        8 |        6 |        4 |        4 |       21 |       1 |       10 |        4 |        2 |        1 |        1 |        4 |       0 |        5 |        6 |        1 |        1 |        4 |        3 |       0 |        1 |        3 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        1 |       0 |      0 |      0 |      5 |      8 |      2 |      0 |      0 |     50 |      0 |      0 |      0 |      8 |      5 |      1 |      0 |      2 |     57 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     37 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5585400 |      91 |     33 |     35 |     0 |    0 |     3 |    0 |    0 |     2 |    0 |     18 |    0 |    0 |    0 |    0 |     44 |     47 |       5 |       1 |       1 |       0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        2 |        0 |        5 |        2 |        0 |       1 |        0 |        2 |        4 |       10 |        2 |        2 |       0 |        0 |        1 |        6 |        6 |        4 |        1 |       0 |        2 |        2 |        3 |        6 |        3 |        1 |       0 |        1 |        1 |        1 |        3 |        1 |        2 |       0 |        5 |        0 |        3 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      2 |      3 |      1 |      1 |      2 |     24 |      0 |      0 |      0 |      9 |      6 |      3 |      1 |      3 |     13 |      0 |      0 |      3 |      4 |      2 |      0 |      1 |      0 |      8 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5585500 |     175 |     46 |     98 |     2 |    0 |     1 |    0 |    1 |     1 |    0 |     26 |    0 |    0 |    0 |    0 |     91 |     84 |       5 |       3 |       1 |       2 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        3 |        3 |        4 |        6 |        4 |        1 |       2 |        0 |        2 |        4 |       13 |        2 |        2 |       0 |        7 |        4 |       10 |       12 |       12 |        7 |       0 |        1 |        5 |       10 |       13 |        8 |        9 |       0 |        4 |        1 |        3 |        2 |        2 |        1 |       1 |        4 |        1 |        2 |        3 |        2 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        3 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      9 |      5 |      4 |      6 |      2 |     20 |      0 |      0 |      2 |     15 |      9 |     15 |     17 |      7 |     33 |      0 |      0 |      1 |      2 |      3 |      2 |      0 |      1 |     17 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5585600 |     276 |     75 |    146 |     2 |    0 |     2 |    2 |    2 |     0 |    0 |     47 |    0 |    0 |    0 |    0 |    137 |    139 |       9 |       6 |       2 |       0 |      4 |      8 |      5 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        1 |        2 |       10 |       11 |        6 |       0 |        3 |        4 |        7 |       11 |        8 |        4 |       4 |        3 |       11 |        8 |       17 |       15 |       16 |       8 |        5 |        3 |        7 |       21 |       10 |       13 |       9 |        1 |        5 |        2 |        5 |        4 |        4 |       0 |        5 |        2 |        6 |        6 |        5 |        2 |       0 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |     16 |     14 |      1 |      1 |      4 |     39 |      0 |      0 |      2 |      9 |     17 |      9 |      3 |     13 |     93 |      0 |      0 |      0 |      5 |      3 |      3 |      2 |      3 |     31 |      0 |      0 |      0 |      1 |      4 |      1 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 5585700 |      47 |     11 |     31 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      3 |    0 |    0 |    0 |    0 |     23 |     24 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        2 |        1 |       0 |        1 |        0 |        1 |        3 |        1 |        0 |       0 |        1 |        2 |        4 |        3 |        2 |        3 |       0 |        1 |        2 |        1 |        3 |        5 |        3 |       1 |        1 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      6 |      0 |      0 |      0 |      7 |      6 |      0 |      0 |      2 |     16 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5585800 |      93 |     23 |     57 |     2 |    0 |     1 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     45 |     48 |       0 |       0 |       1 |       0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        1 |        3 |        3 |        2 |        1 |       1 |        0 |        1 |        1 |        3 |        4 |        3 |       0 |        1 |        1 |        6 |        5 |        0 |       11 |       4 |        2 |        2 |        4 |        4 |        2 |        8 |       7 |        0 |        1 |        2 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      4 |      1 |      1 |      2 |      3 |     12 |      0 |      0 |      0 |      9 |     10 |      3 |      0 |      5 |     30 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      7 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5586000 |     398 |    122 |    207 |     6 |    0 |     5 |    0 |    3 |     2 |    0 |     53 |    0 |    0 |    0 |    0 |    196 |    202 |       9 |      12 |       5 |       0 |      8 |      9 |      2 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      2 |      0 |        7 |        7 |        4 |       13 |       12 |        6 |       2 |        7 |        6 |       14 |       24 |       13 |        6 |       1 |        8 |        6 |       21 |       29 |       25 |        9 |       3 |       12 |        8 |       22 |       30 |       15 |       16 |       3 |        7 |        5 |        2 |       10 |        4 |        5 |       0 |        6 |        3 |        3 |        4 |        4 |        0 |       0 |        0 |        3 |        1 |        5 |        1 |        0 |       1 |        0 |        3 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     18 |     14 |     16 |     10 |     16 |     48 |      0 |      0 |      1 |     25 |     41 |     12 |     15 |     27 |     86 |      0 |      0 |      0 |     10 |      2 |      5 |      3 |      9 |     24 |      0 |      0 |      0 |      2 |      5 |      2 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5586100 |     261 |     86 |    131 |     4 |    0 |     0 |    2 |    0 |     2 |    0 |     36 |    0 |    0 |    0 |    0 |    113 |    148 |      16 |      10 |       5 |       2 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        3 |        4 |        6 |       12 |        6 |        1 |       0 |        7 |        6 |       11 |       21 |        8 |        1 |       0 |        6 |       11 |       24 |       17 |        3 |        4 |       0 |        5 |       15 |       30 |        9 |        3 |        4 |       0 |        1 |        1 |        2 |        3 |        3 |        1 |       0 |        2 |        6 |        9 |        4 |        3 |        1 |       0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     14 |     21 |      6 |      2 |      5 |     38 |      0 |      0 |      3 |     21 |     22 |      9 |      4 |      7 |     65 |      0 |      0 |      0 |      5 |     10 |      1 |      2 |      1 |     17 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 5586200 |     412 |    116 |    203 |    11 |    0 |     4 |    3 |    0 |     1 |    0 |     74 |    0 |    0 |    0 |    0 |    196 |    216 |      22 |      33 |      12 |       1 |      2 |      9 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      4 |      0 |      4 |      2 |      2 |      2 |       0 |       1 |       1 |       0 |      1 |     13 |      4 |      0 |        8 |        4 |        8 |       11 |       12 |        3 |       2 |       11 |        8 |       17 |       23 |        7 |        1 |       1 |       11 |       12 |       23 |       34 |       14 |        7 |       0 |        8 |       10 |       28 |       42 |        8 |        6 |       0 |       12 |        3 |        7 |        9 |        4 |        2 |       0 |       10 |        5 |        7 |       10 |        3 |        2 |       0 |        2 |        0 |        4 |        3 |        1 |        0 |       0 |        1 |        3 |        1 |        3 |        1 |        0 |       0 |      0 |      0 |     10 |     20 |     13 |      4 |      8 |     61 |      0 |      0 |      2 |     25 |     27 |     14 |     14 |     16 |    105 |      0 |      0 |      0 |     16 |      4 |      6 |      1 |      3 |     44 |      0 |      0 |      0 |      4 |      4 |      0 |      1 |      1 |      9 |      0 |     37 | s03      | R    |
| 5586300 |     521 |    156 |    261 |     9 |    0 |     5 |    4 |    1 |     0 |    0 |     85 |    0 |    0 |    0 |    0 |    233 |    288 |      18 |      27 |       8 |       0 |      6 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      6 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |       1 |       2 |       1 |       0 |      2 |     11 |      3 |      0 |        5 |        6 |       15 |       18 |        8 |        6 |       0 |       14 |       11 |       19 |       29 |       14 |       10 |       1 |        6 |       20 |       39 |       33 |       17 |        9 |       1 |       13 |       31 |       43 |       37 |        5 |        7 |       0 |        9 |       11 |        7 |        5 |        6 |        2 |       0 |        9 |        7 |        9 |       15 |        2 |        3 |       0 |        4 |        1 |        3 |        2 |        0 |        0 |       0 |        1 |        3 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |     20 |     22 |      9 |     15 |     13 |     77 |      0 |      0 |      0 |     22 |     41 |     19 |     20 |     10 |    149 |      0 |      0 |      0 |      5 |      8 |      5 |      5 |      1 |     61 |      0 |      0 |      0 |      4 |      5 |      2 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5586400 |     431 |    142 |    183 |     9 |    0 |     2 |    3 |    3 |     3 |    0 |     86 |    0 |    0 |    0 |    0 |    175 |    256 |      19 |      16 |      11 |       1 |      5 |      7 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |       1 |       0 |       0 |       0 |      2 |      4 |      0 |      1 |        3 |       10 |       14 |       10 |       10 |        3 |       0 |        4 |       10 |       24 |       28 |       16 |       10 |       0 |        5 |       14 |       21 |       21 |        6 |       14 |       0 |        6 |       14 |       27 |       21 |       16 |       18 |       0 |        4 |       11 |        9 |        9 |        4 |        0 |       0 |        9 |        9 |        9 |       12 |        8 |        2 |       0 |        0 |        4 |        2 |        1 |        0 |        0 |       0 |        1 |        7 |        1 |        3 |        1 |        0 |       0 |      0 |      0 |     20 |     33 |      9 |      8 |      8 |     64 |      0 |      0 |      1 |     24 |     33 |      7 |     15 |      6 |     97 |      0 |      0 |      0 |     12 |      9 |      6 |      3 |      2 |     54 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      1 |     15 |      0 |     37 | s03      | R    |
| 5586500 |     488 |    165 |    203 |    14 |    0 |     4 |    6 |    4 |     2 |    0 |     90 |    0 |    0 |    0 |    0 |    205 |    283 |      27 |      23 |      10 |       3 |      4 |      3 |      3 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |       0 |       1 |       0 |       0 |      3 |      1 |      1 |      1 |        6 |       21 |        7 |       10 |       13 |        7 |       0 |       16 |       28 |       24 |       17 |        8 |        8 |       0 |       18 |       35 |       19 |       12 |        8 |        5 |       0 |       20 |       25 |       28 |       21 |        5 |        7 |       0 |        5 |       10 |        4 |        8 |        1 |        1 |       0 |       13 |       25 |       11 |        9 |        1 |        1 |       1 |        1 |        8 |        3 |        3 |        0 |        0 |       0 |        6 |        3 |        4 |        1 |        1 |        0 |       0 |      0 |      0 |     24 |      8 |      3 |      0 |      1 |    129 |      0 |      0 |      3 |     20 |     21 |      6 |      1 |      2 |    150 |      0 |      0 |      0 |      8 |      2 |      2 |      0 |      0 |     78 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      0 |     25 |      0 |     37 | s03      | R    |
| 5586600 |     367 |    116 |    192 |     5 |    0 |     4 |    1 |    0 |     0 |    0 |     49 |    0 |    0 |    0 |    0 |    182 |    185 |       9 |       6 |       8 |       0 |      4 |      5 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      3 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      3 |      1 |      0 |        2 |        2 |        7 |       18 |       13 |        7 |       3 |        7 |        6 |       14 |       22 |        8 |        6 |       1 |        6 |       11 |       32 |       33 |       11 |        6 |       0 |        8 |       10 |       23 |       29 |       10 |       13 |       0 |        0 |        4 |        9 |        6 |        4 |        1 |       0 |        4 |        3 |        5 |       11 |        2 |        0 |       0 |        0 |        1 |        2 |        2 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      0 |     11 |     24 |      8 |     10 |      8 |     55 |      0 |      0 |      0 |     16 |     33 |     16 |      5 |     31 |     91 |      0 |      0 |      0 |      7 |      5 |      6 |      1 |      0 |     30 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5586700 |     927 |    260 |    481 |    15 |    0 |     5 |    8 |    8 |     2 |    0 |    148 |    0 |    0 |    0 |    0 |    453 |    474 |      16 |      31 |       5 |       4 |     17 |     13 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      7 |      2 |      1 |        6 |        8 |       18 |       33 |       20 |       13 |       2 |       16 |       11 |       22 |       57 |       34 |       18 |       2 |       30 |       28 |       49 |       70 |       46 |       30 |       2 |       14 |       24 |       56 |       66 |       35 |       30 |       1 |       16 |       12 |       12 |       20 |       11 |        5 |       1 |       17 |        6 |       13 |       18 |       11 |        6 |       0 |        5 |        4 |        1 |        8 |        2 |        1 |       0 |        2 |        5 |        3 |        7 |        0 |        0 |       0 |      0 |      1 |     31 |     38 |     22 |     13 |     12 |    143 |      0 |      0 |      3 |     53 |     83 |     27 |     18 |     33 |    264 |      0 |      0 |      0 |     28 |     11 |      7 |      3 |      8 |     91 |      0 |      0 |      1 |      5 |      8 |      3 |      0 |      1 |     20 |      0 |     37 | s03      | R    |
| 5586800 |     755 |    223 |    405 |    14 |    0 |     4 |    3 |    5 |     2 |    0 |     99 |    0 |    0 |    0 |    0 |    364 |    391 |      28 |      23 |       8 |       2 |      5 |     11 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      3 |      0 |      0 |      2 |      0 |      3 |      0 |       0 |       2 |       0 |       0 |      4 |      2 |      1 |      0 |       13 |        8 |       10 |       29 |       23 |       12 |       4 |        8 |       12 |       15 |       49 |       26 |        9 |       5 |       20 |       21 |       33 |       77 |       36 |       11 |       2 |       18 |       19 |       50 |       68 |       29 |       19 |       2 |       12 |        2 |        6 |       13 |       11 |        4 |       1 |       15 |        5 |        5 |       17 |        5 |        2 |       1 |        4 |        4 |        3 |        3 |        1 |        1 |       0 |        5 |        2 |        2 |        3 |        0 |        0 |       0 |      0 |      0 |     27 |     19 |     11 |     12 |     27 |    127 |      0 |      0 |      4 |     46 |     77 |     29 |     26 |     28 |    195 |      0 |      0 |      1 |     15 |     15 |      4 |      4 |      2 |     58 |      0 |      0 |      0 |      7 |      3 |      1 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 5586900 |     384 |    118 |    199 |     4 |    0 |     3 |    1 |    2 |     3 |    0 |     54 |    0 |    0 |    0 |    0 |    182 |    202 |       6 |      12 |       6 |       0 |      4 |      9 |      5 |      0 |      0 |      2 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        5 |       12 |        7 |        9 |       10 |       6 |        5 |        5 |       13 |        9 |       17 |       15 |       4 |       11 |       12 |       23 |       18 |       18 |       13 |       4 |       13 |        8 |       17 |       18 |       14 |       18 |      12 |        6 |        4 |        3 |        3 |        7 |        2 |       1 |       12 |        4 |        4 |        4 |        2 |        2 |       0 |        2 |        1 |        0 |        1 |        2 |        1 |       0 |        1 |        3 |        0 |        0 |        1 |        1 |       0 |      0 |      2 |      8 |      7 |     10 |      3 |      6 |     82 |      0 |      0 |      4 |     26 |     37 |      9 |      1 |      3 |    119 |      0 |      0 |      0 |      9 |      5 |      2 |      0 |      1 |     37 |      0 |      0 |      2 |      0 |      3 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 5587000 |     145 |     31 |     80 |     4 |    0 |     2 |    2 |    2 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     71 |     74 |       3 |       3 |       7 |       1 |      0 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        3 |        1 |        5 |        1 |        4 |       3 |        1 |        1 |        3 |        4 |        1 |        2 |       1 |        1 |        3 |        7 |        5 |        5 |        8 |       5 |        3 |        6 |        7 |        6 |        6 |        8 |      10 |        1 |        3 |        4 |        3 |        0 |        0 |       1 |        5 |        0 |        0 |        4 |        0 |        2 |       1 |        1 |        0 |        2 |        2 |        0 |        2 |       0 |        0 |        2 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      4 |      0 |      0 |      2 |      4 |     20 |      0 |      0 |      0 |      7 |      7 |      4 |      0 |      6 |     56 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      0 |     20 |      0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5587100 |     188 |     52 |    109 |     3 |    0 |     1 |    1 |    0 |     2 |    0 |     20 |    0 |    0 |    0 |    0 |     96 |     92 |       9 |       9 |       2 |       1 |      3 |      7 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        5 |        1 |        9 |        6 |        5 |       2 |        1 |        0 |        2 |        8 |        3 |        6 |       3 |        2 |        5 |       11 |        9 |        7 |       10 |      11 |        5 |        5 |        6 |       15 |        6 |       10 |       7 |        1 |        0 |        1 |        1 |        2 |        2 |       0 |        5 |        1 |        4 |        0 |        2 |        1 |       0 |        2 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      5 |     14 |      5 |      2 |      4 |     22 |      0 |      0 |      0 |     14 |     16 |      2 |      5 |      6 |     66 |      0 |      0 |      0 |      4 |      0 |      2 |      1 |      0 |     13 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5587200 |      35 |      6 |     17 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     17 |     18 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        1 |        1 |        0 |        1 |        0 |        0 |       2 |        2 |        1 |        1 |        2 |        0 |        5 |       0 |        0 |        1 |        1 |        1 |        1 |        2 |       0 |        0 |        1 |        0 |        1 |        2 |        0 |       1 |        1 |        1 |        1 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      3 |      4 |      1 |      2 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      1 |      2 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5587400 |     117 |     38 |     59 |     1 |    0 |     1 |    2 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     61 |     56 |       1 |       0 |       0 |       0 |      1 |      4 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |       0 |       4 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        1 |        3 |        8 |        3 |        4 |       1 |        0 |        1 |        0 |       11 |        1 |        3 |       1 |        2 |        2 |        7 |        6 |        5 |        6 |       1 |        2 |        1 |        7 |        4 |        6 |        5 |       5 |        2 |        0 |        1 |        2 |        2 |        0 |       0 |        1 |        1 |        2 |        4 |        1 |        0 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      4 |      0 |      2 |      2 |     23 |      0 |      0 |      1 |      7 |     12 |      1 |      4 |      2 |     32 |      0 |      0 |      0 |      2 |      3 |      2 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5587500 |     560 |    160 |    325 |     7 |    0 |     1 |    3 |    2 |     5 |    0 |     57 |    0 |    0 |    0 |    0 |    259 |    301 |       2 |       9 |       3 |       2 |     13 |     20 |      6 |      2 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      1 |      0 |        3 |        2 |        4 |       16 |       15 |       13 |      10 |        2 |        3 |       12 |       22 |       21 |       20 |      17 |        6 |        5 |       24 |       33 |       26 |       41 |      29 |        3 |        4 |       26 |       27 |       22 |       46 |      33 |        7 |        1 |        7 |        3 |        1 |        3 |       0 |        7 |        7 |        6 |        5 |        5 |        5 |       0 |        1 |        2 |        1 |        2 |        1 |        2 |       1 |        3 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      1 |      8 |     28 |      8 |     10 |     12 |     93 |      0 |      0 |      2 |     37 |     44 |     21 |      7 |     20 |    194 |      0 |      0 |      0 |      9 |      5 |      4 |      3 |      0 |     36 |      0 |      0 |      0 |      2 |      4 |      1 |      2 |      0 |      9 |      0 |     37 | s03      | R    |
| 5587600 |     501 |    146 |    284 |    10 |    0 |     4 |    2 |    0 |     4 |    0 |     51 |    0 |    0 |    0 |    0 |    245 |    256 |      10 |       8 |       2 |       2 |     11 |      9 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        1 |       11 |       14 |       13 |       11 |      13 |        2 |        3 |       16 |       26 |       16 |       12 |       7 |        2 |        9 |       25 |       24 |       32 |       30 |      24 |        4 |       12 |       27 |       22 |       18 |       36 |      19 |       10 |        2 |        6 |        1 |        4 |        2 |       1 |        3 |        5 |        6 |        5 |        3 |        3 |       0 |        3 |        0 |        0 |        4 |        0 |        2 |       0 |        2 |        1 |        2 |        3 |        0 |        3 |       0 |      0 |      1 |     20 |     21 |      7 |      4 |     10 |     83 |      0 |      0 |      2 |     27 |     41 |     20 |     12 |     24 |    158 |      0 |      0 |      0 |      8 |      5 |      1 |      0 |      3 |     34 |      0 |      0 |      1 |      2 |      7 |      0 |      0 |      2 |      8 |      0 |     37 | s03      | R    |
| 5587700 |      92 |     32 |     40 |     1 |    0 |     0 |    0 |    1 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     47 |     45 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       2 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        3 |        2 |        2 |       3 |        2 |        2 |        4 |        6 |        3 |        1 |       2 |        2 |        6 |        2 |        8 |        4 |        2 |       1 |        0 |        2 |        2 |        4 |        2 |        3 |       2 |        0 |        1 |        1 |        2 |        2 |        1 |       0 |        2 |        1 |        3 |        1 |        0 |        2 |       1 |        0 |        0 |        3 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      1 |      3 |      1 |     21 |      0 |      0 |      0 |      3 |      9 |      2 |      2 |      3 |     21 |      0 |      0 |      0 |      4 |      4 |      1 |      0 |      1 |      7 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5587800 |     417 |    105 |    221 |     7 |    0 |     5 |    2 |    1 |     3 |    0 |     73 |    0 |    0 |    0 |    0 |    211 |    206 |      15 |       6 |       7 |       0 |      8 |     10 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        7 |        3 |        6 |       17 |        4 |       3 |        2 |        8 |       11 |       13 |       15 |        8 |       5 |       14 |       16 |       19 |       31 |       20 |       12 |       3 |       15 |       10 |       19 |       32 |       21 |        4 |       5 |       10 |        7 |        7 |       10 |        3 |        4 |       1 |        6 |        5 |        3 |        9 |        3 |        5 |       0 |        3 |        3 |        2 |        0 |        0 |        3 |       0 |        4 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     14 |     12 |      2 |      1 |     14 |     61 |      0 |      0 |      2 |     27 |     34 |     15 |      5 |     17 |    121 |      0 |      0 |      1 |      9 |     11 |      8 |      0 |     10 |     34 |      0 |      0 |      1 |      3 |      4 |      0 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5587900 |      11 |      0 |      9 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      5 |       0 |       1 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        2 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5588000 |     257 |     59 |    149 |     7 |    0 |     6 |    1 |    0 |     2 |    0 |     33 |    0 |    0 |    0 |    0 |    127 |    130 |       2 |       5 |       2 |       1 |      1 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        2 |       10 |        5 |        5 |       6 |        1 |        2 |        8 |        7 |        4 |        4 |       3 |        8 |        7 |       10 |       22 |       11 |        9 |       9 |        4 |        6 |       15 |       18 |       14 |        8 |       8 |        1 |        4 |        1 |        6 |        1 |        0 |       0 |        3 |        2 |        4 |        8 |        2 |        1 |       0 |        1 |        1 |        1 |        3 |        0 |        2 |       0 |        1 |        0 |        2 |        3 |        0 |        1 |       1 |      0 |      0 |      6 |      3 |      2 |      2 |      2 |     44 |      0 |      0 |      0 |     12 |     34 |      5 |      8 |      6 |     84 |      0 |      0 |      1 |      2 |      4 |      3 |      0 |      0 |     23 |      0 |      0 |      0 |      3 |      6 |      1 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5588100 |     585 |    151 |    331 |    13 |    0 |     6 |    3 |    1 |     1 |    0 |     79 |    0 |    0 |    0 |    0 |    285 |    300 |       8 |      16 |       3 |       0 |      8 |     19 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        2 |        8 |       13 |        7 |       14 |       7 |        9 |        5 |       19 |       19 |       11 |       16 |      17 |       11 |       17 |       23 |       33 |       37 |       27 |      24 |        7 |       14 |       20 |       38 |       32 |       31 |      17 |        3 |        5 |       11 |       13 |        9 |        0 |       3 |        9 |        4 |        6 |        8 |        4 |        2 |       2 |        1 |        3 |        2 |        4 |        1 |        3 |       0 |        1 |        1 |        5 |        2 |        0 |        1 |       0 |      0 |      1 |     21 |     17 |      6 |      4 |      5 |     97 |      0 |      0 |      2 |     36 |     56 |     21 |      9 |     18 |    189 |      0 |      0 |      0 |     12 |     10 |      1 |      2 |      0 |     54 |      0 |      0 |      1 |      7 |      4 |      2 |      0 |      0 |     10 |      0 |     37 | s03      | R    |
| 5588200 |      93 |     26 |     53 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     11 |    0 |    0 |    0 |    0 |     44 |     49 |       2 |       2 |       2 |       0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        3 |        5 |        0 |       0 |        0 |        0 |        1 |        5 |        6 |        5 |       0 |        2 |        2 |        5 |        5 |        8 |        2 |       3 |        0 |        1 |        3 |        9 |        5 |        4 |       4 |        2 |        0 |        2 |        1 |        1 |        0 |       0 |        1 |        2 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      4 |      3 |      0 |      1 |      2 |     16 |      0 |      0 |      2 |      8 |      7 |      3 |      1 |      1 |     31 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5588300 |      27 |     10 |     11 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     11 |     16 |       1 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        3 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5588400 |     184 |     59 |     91 |     0 |    0 |     2 |    4 |    0 |     2 |    0 |     26 |    0 |    0 |    0 |    0 |     86 |     98 |       6 |       3 |       1 |       0 |      4 |      6 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        0 |        3 |        2 |        6 |        5 |        4 |       3 |        0 |        7 |        5 |        6 |        9 |        5 |       4 |        6 |        3 |        6 |       13 |        9 |        4 |       6 |        3 |        2 |        7 |        6 |       13 |        8 |       5 |        3 |        0 |        2 |        2 |        3 |        1 |       0 |        3 |        0 |        5 |        5 |        2 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |      0 |      0 |      4 |      9 |      3 |      4 |      5 |     34 |      0 |      0 |      1 |      7 |     12 |      6 |      2 |      4 |     59 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      1 |     20 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5588500 |      52 |      8 |     39 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     24 |     28 |       0 |       4 |       2 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        2 |        0 |        2 |        0 |       0 |        1 |        1 |        2 |        6 |        3 |        3 |       2 |        2 |        2 |        3 |        7 |        4 |        2 |       1 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      4 |      4 |      5 |      2 |      3 |     21 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5588700 |       2 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5589000 |     438 |     99 |    257 |     7 |    0 |     1 |    4 |    3 |     4 |    0 |     63 |    0 |    0 |    0 |    0 |    222 |    216 |      11 |       9 |       0 |       0 |      3 |      5 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      2 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        6 |        4 |        5 |       11 |        7 |       10 |       1 |        2 |        6 |       12 |       11 |       12 |       11 |       1 |        6 |       18 |       39 |       27 |       13 |       13 |      11 |        6 |       23 |       34 |       28 |       19 |       15 |       5 |        9 |        5 |        6 |        6 |        9 |        1 |       0 |        4 |        4 |        3 |        7 |        6 |        2 |       1 |        0 |        6 |        3 |        3 |        2 |        1 |       0 |        0 |        1 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |     10 |      7 |      7 |      0 |      1 |     74 |      0 |      0 |      0 |     11 |     19 |      6 |      5 |      5 |    211 |      0 |      0 |      0 |      8 |      5 |      1 |      1 |      0 |     48 |      0 |      0 |      1 |      4 |      6 |      0 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5589200 |      41 |      9 |     30 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     18 |     23 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        2 |        2 |        0 |        1 |       0 |        0 |        1 |        2 |        4 |        3 |        3 |       0 |        2 |        3 |        1 |        4 |        4 |        3 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      1 |      0 |      6 |      0 |      0 |      0 |      1 |      6 |      9 |      0 |      6 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5589300 |     264 |     57 |    163 |     4 |    0 |     2 |    0 |    1 |     1 |    0 |     36 |    0 |    0 |    0 |    0 |    111 |    153 |       3 |       5 |       3 |       0 |      5 |     14 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        0 |        3 |        4 |        3 |        7 |       1 |        4 |        3 |        2 |        5 |       10 |       13 |       0 |        4 |        2 |        7 |        7 |       16 |       35 |       2 |        4 |        5 |        5 |       14 |       21 |       36 |       5 |        1 |        3 |        3 |        3 |        0 |        5 |       0 |        3 |        4 |        1 |        6 |        4 |        3 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        2 |       0 |      0 |      0 |      5 |     10 |      2 |      5 |      2 |     33 |      0 |      0 |      1 |     30 |     25 |     10 |     28 |     10 |     59 |      0 |      0 |      0 |      2 |      3 |      3 |      3 |      1 |     24 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5589400 |       7 |      0 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
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| 5594000 |     355 |     92 |    198 |     5 |    0 |     1 |    4 |    1 |     1 |    0 |     53 |    0 |    0 |    0 |    0 |    177 |    178 |       3 |       7 |       6 |       0 |     10 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        6 |        3 |        5 |        8 |        5 |        5 |       5 |        6 |        4 |       10 |       11 |       10 |        8 |       6 |       14 |       11 |       15 |       30 |       12 |       16 |       9 |        6 |        8 |       19 |       22 |       14 |       14 |       8 |        6 |        3 |        5 |        5 |        5 |        4 |       1 |        2 |        3 |        6 |        7 |        3 |        3 |       0 |        1 |        1 |        2 |        0 |        0 |        0 |       0 |        1 |        1 |        3 |        2 |        0 |        1 |       0 |      0 |      1 |     11 |     11 |      5 |      0 |      6 |     58 |      0 |      0 |      1 |     22 |     25 |      8 |      7 |      9 |    126 |      0 |      0 |      0 |      6 |      9 |      2 |      1 |      2 |     33 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
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| 5594900 |      71 |     20 |     40 |     3 |    0 |     0 |    1 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     29 |     42 |       5 |       6 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        0 |        1 |        3 |        0 |       0 |        0 |        2 |        1 |        4 |        2 |        5 |       0 |        0 |        1 |        1 |        8 |        3 |        5 |       1 |        2 |        2 |        5 |        2 |        2 |        5 |       3 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |      0 |      1 |      3 |      3 |      1 |      2 |      0 |     10 |      0 |      0 |      0 |      1 |      8 |      7 |      2 |      3 |     19 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5595000 |     352 |     69 |    235 |    14 |    0 |     2 |    2 |    1 |     0 |    0 |     29 |    0 |    0 |    0 |    0 |    171 |    181 |       2 |       7 |       0 |       0 |      1 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      0 |      0 |      0 |        4 |        1 |        1 |        2 |        6 |        5 |       9 |        2 |        4 |        4 |        6 |        9 |        5 |      11 |       13 |       17 |       18 |       24 |       13 |       18 |      16 |       11 |       12 |       19 |       22 |       25 |       12 |      15 |        3 |        2 |        2 |        3 |        0 |        1 |       2 |        6 |        2 |        4 |        1 |        2 |        0 |       1 |        1 |        1 |        2 |        5 |        1 |        1 |       0 |        2 |        0 |        2 |        3 |        0 |        1 |       0 |      0 |      0 |      7 |      8 |      5 |      1 |      4 |     44 |      0 |      0 |      3 |     28 |     37 |     12 |      7 |      6 |    142 |      0 |      0 |      1 |      3 |      3 |      1 |      0 |      1 |     20 |      0 |      0 |      0 |      4 |      6 |      1 |      0 |      2 |      6 |      0 |     37 | s03      | R    |
| 5595100 |      50 |     16 |     24 |     1 |    0 |     0 |    1 |    0 |     1 |    0 |      7 |    0 |    0 |    0 |    0 |     20 |     30 |       3 |       0 |       2 |       2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        0 |        1 |        1 |        1 |        0 |       2 |        0 |        1 |        1 |        1 |        1 |        3 |       3 |        1 |        0 |        1 |        1 |        1 |        2 |       3 |        2 |        1 |        2 |        2 |        2 |        4 |       2 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      5 |      1 |      2 |      0 |      2 |     14 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
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| 5595400 |      27 |      3 |     18 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     14 |     13 |       0 |       0 |       2 |       0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        0 |        6 |        1 |       0 |        1 |        0 |        1 |        0 |        5 |        1 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      2 |      6 |      2 |      1 |      6 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5595500 |       5 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5596000 |     363 |     69 |    240 |     3 |    0 |     3 |    1 |    1 |     3 |    0 |     43 |    0 |    0 |    0 |    0 |    175 |    188 |       2 |       6 |       3 |       1 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        6 |        4 |        4 |       4 |        4 |        3 |        7 |        9 |       15 |        5 |       5 |       14 |        8 |       10 |       36 |       35 |       13 |      12 |       14 |        7 |       21 |       29 |       22 |       10 |       9 |        3 |        0 |        3 |        4 |        6 |        3 |       1 |        5 |        2 |        6 |        6 |        3 |        0 |       1 |        2 |        1 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        3 |        2 |        0 |       0 |      0 |      0 |      9 |     14 |      6 |      1 |      5 |     34 |      0 |      0 |      2 |     29 |     36 |      4 |      5 |     14 |    150 |      0 |      0 |      0 |     11 |      4 |      0 |      1 |      1 |     26 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 5596100 |     280 |     56 |    186 |     8 |    0 |     1 |    2 |    1 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |    135 |    145 |       1 |      10 |       1 |       0 |      6 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      2 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        3 |        0 |        5 |        3 |       10 |        3 |       2 |        2 |        2 |        6 |        8 |        9 |        2 |       1 |       13 |        4 |       17 |       20 |       18 |       18 |       2 |       13 |        8 |       12 |       27 |       15 |       15 |       4 |        1 |        0 |        5 |        5 |        0 |        0 |       0 |        3 |        8 |        1 |        3 |        0 |        0 |       0 |        0 |        1 |        3 |        1 |        1 |        0 |       0 |        2 |        0 |        1 |        3 |        0 |        0 |       0 |      0 |      1 |      7 |      9 |      3 |      1 |      2 |     33 |      0 |      0 |      0 |     30 |     17 |     12 |     11 |     22 |     94 |      0 |      0 |      1 |      7 |      3 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 5596200 |      77 |     25 |     37 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |     13 |    0 |    0 |    0 |    0 |     42 |     35 |       3 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        3 |        2 |        3 |        2 |       1 |        1 |        1 |        5 |        0 |        3 |        0 |       0 |        0 |        2 |        4 |        4 |        6 |        4 |       0 |        0 |        2 |        6 |        1 |        4 |        4 |       0 |        2 |        0 |        2 |        1 |        0 |        1 |       0 |        2 |        2 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |     19 |      0 |      0 |      1 |      2 |      2 |      0 |      3 |      1 |     28 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5596300 |      93 |     18 |     59 |     1 |    0 |     1 |    1 |    0 |     1 |    0 |     12 |    0 |    0 |    0 |    0 |     44 |     49 |       2 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        2 |        1 |        3 |        1 |       1 |        0 |        0 |        0 |        4 |        0 |        5 |       0 |        0 |        2 |        5 |        8 |        4 |        7 |       2 |        0 |        2 |        4 |        5 |        7 |       10 |       3 |        0 |        0 |        2 |        3 |        0 |        0 |       0 |        1 |        1 |        3 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       1 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      1 |      0 |     13 |      0 |      0 |      0 |      2 |      9 |      2 |      2 |      4 |     40 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5596400 |      23 |      4 |     17 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     10 |     13 |       2 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        1 |        1 |        0 |        1 |        4 |        0 |       0 |        0 |        1 |        2 |        4 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5596500 |     110 |     30 |     65 |     3 |    0 |     0 |    1 |    1 |     1 |    0 |      9 |    0 |    0 |    0 |    0 |     50 |     60 |       0 |       1 |       0 |       0 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        1 |        1 |        3 |        2 |       4 |        0 |        1 |        0 |        2 |        4 |        5 |       4 |        0 |        2 |        4 |        6 |        6 |        7 |       5 |        2 |        0 |        8 |       10 |        6 |        7 |       2 |        1 |        0 |        0 |        1 |        0 |        0 |       1 |        0 |        2 |        0 |        1 |        2 |        0 |       1 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        1 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      3 |      3 |      2 |      2 |      0 |     20 |      0 |      0 |      0 |     10 |      9 |      3 |      1 |      1 |     41 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      6 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5596600 |      51 |      8 |     36 |     2 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     22 |     29 |       1 |       0 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        0 |       0 |        2 |        0 |        4 |        8 |        0 |        1 |       0 |        2 |        2 |        6 |        6 |        3 |        2 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |     18 |      0 |      0 |      0 |     14 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5596700 |     421 |    129 |    209 |     7 |    0 |     6 |    1 |    3 |     1 |    0 |     65 |    0 |    0 |    0 |    0 |    207 |    214 |      18 |      10 |       1 |       4 |      4 |     16 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        7 |        6 |        6 |       16 |       14 |        8 |       2 |        9 |        6 |        6 |       20 |       19 |        7 |       3 |       18 |        5 |       17 |       21 |       26 |       15 |       3 |        7 |        5 |       33 |       22 |       20 |       16 |       1 |        7 |        8 |        3 |        5 |        7 |        3 |       0 |        7 |        3 |        3 |       12 |        2 |        3 |       2 |        2 |        3 |        1 |        1 |        1 |        2 |       0 |        0 |        3 |        2 |        0 |        2 |        1 |       0 |      0 |      1 |     17 |     14 |      8 |      4 |     11 |     74 |      0 |      0 |      4 |     23 |     33 |      6 |     15 |     11 |    117 |      0 |      0 |      1 |      8 |      7 |      4 |      1 |      6 |     38 |      0 |      0 |      1 |      1 |      6 |      0 |      0 |      2 |      8 |      0 |     37 | s03      | R    |
| 5597000 |     130 |     49 |     56 |     4 |    0 |     1 |    0 |    1 |     0 |    0 |     19 |    0 |    0 |    0 |    0 |     66 |     64 |       1 |       0 |       1 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      1 |      2 |        1 |        4 |        2 |        7 |        5 |        5 |       3 |        0 |        1 |        3 |        2 |       10 |        5 |       1 |        3 |        1 |        5 |        4 |        5 |        9 |       1 |        3 |        1 |        6 |        5 |        5 |        4 |       4 |        1 |        0 |        2 |        2 |        1 |        2 |       0 |        3 |        0 |        2 |        1 |        1 |        3 |       1 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |      0 |      1 |      6 |      7 |      4 |      6 |      4 |     21 |      0 |      0 |      0 |      6 |     11 |      0 |      1 |      1 |     37 |      0 |      0 |      1 |      3 |      1 |      1 |      0 |      1 |     12 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5598000 |     112 |     41 |     60 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     56 |     56 |       4 |       0 |       1 |       0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        4 |        4 |        2 |        5 |       1 |        0 |        3 |        4 |        4 |        1 |        8 |       4 |        1 |        2 |        5 |        7 |        7 |        6 |       5 |        1 |        2 |        1 |        7 |        6 |        6 |       4 |        1 |        2 |        0 |        1 |        0 |        1 |       1 |        1 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      3 |      5 |      1 |      3 |      3 |     26 |      0 |      0 |      0 |      8 |     11 |      0 |      1 |      0 |     40 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5599000 |     233 |     47 |    154 |     3 |    0 |     2 |    3 |    0 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |    110 |    123 |       3 |       6 |       1 |       1 |      0 |      8 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      1 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        2 |        3 |        5 |        5 |        2 |       4 |        1 |        3 |        4 |        9 |        2 |        4 |       2 |        3 |        7 |       12 |       12 |       11 |       15 |      13 |        3 |        7 |       17 |       15 |       11 |       14 |      14 |        2 |        1 |        3 |        3 |        2 |        0 |       0 |        4 |        1 |        4 |        0 |        3 |        0 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |        2 |        0 |        0 |        3 |        0 |        0 |       0 |      0 |      0 |      6 |      7 |      1 |      2 |      4 |     27 |      0 |      0 |      1 |     21 |     15 |      8 |      1 |      5 |    103 |      0 |      0 |      0 |      7 |      0 |      0 |      1 |      0 |     15 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5599100 |     202 |     45 |    116 |     4 |    0 |     1 |    2 |    1 |     1 |    0 |     32 |    0 |    0 |    0 |    0 |     90 |    112 |       6 |       2 |       2 |       1 |      5 |      7 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        0 |        2 |        2 |        6 |        5 |       2 |        3 |        1 |        3 |        7 |        7 |        5 |       1 |        1 |        8 |       11 |       12 |       16 |        9 |       0 |        3 |        2 |        7 |       18 |       18 |        7 |       4 |        4 |        0 |        2 |        0 |        5 |        0 |       0 |        6 |        2 |        2 |        5 |        3 |        3 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |        1 |        1 |        2 |        0 |        1 |        0 |       0 |      0 |      0 |      8 |      4 |      2 |      3 |      4 |     24 |      0 |      0 |      0 |     13 |     16 |      4 |     10 |      5 |     68 |      0 |      0 |      1 |      3 |      6 |      1 |      1 |      1 |     19 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5599200 |     228 |     61 |    145 |     2 |    0 |     1 |    2 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |    110 |    118 |       1 |       6 |       0 |       0 |      8 |     15 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        4 |        1 |        6 |       10 |        3 |       0 |        2 |        2 |        5 |        8 |        9 |        3 |       5 |        1 |       16 |        3 |        6 |       18 |       23 |       2 |        8 |        9 |        8 |       14 |       19 |       15 |       3 |        2 |        2 |        1 |        2 |        3 |        0 |       1 |        1 |        2 |        0 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      7 |      4 |      4 |      5 |      7 |     34 |      0 |      0 |      0 |     14 |     27 |      8 |      8 |     11 |     77 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |     12 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5599300 |       4 |      2 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5600000 |     492 |    119 |    291 |     8 |    0 |     6 |    2 |    1 |     0 |    0 |     65 |    0 |    0 |    0 |    0 |    229 |    263 |       9 |       9 |       4 |       2 |      3 |     11 |      1 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |       0 |       1 |       0 |       0 |      2 |      1 |      0 |      0 |        4 |        4 |        4 |        7 |        8 |       13 |       8 |        4 |        5 |       13 |       14 |        9 |       17 |       9 |       12 |       10 |       29 |       34 |       20 |       23 |      12 |        7 |       15 |       29 |       29 |       29 |       25 |      17 |        8 |        3 |        5 |       11 |        5 |        1 |       1 |        7 |        2 |        8 |        8 |        3 |        2 |       1 |        2 |        0 |        1 |        1 |        2 |        1 |       0 |        3 |        0 |        2 |        2 |        0 |        3 |       0 |      0 |      1 |     15 |     11 |     10 |      2 |      4 |     76 |      0 |      0 |      0 |     36 |     43 |     11 |      9 |     11 |    181 |      0 |      0 |      1 |     16 |      7 |      2 |      2 |      2 |     35 |      0 |      0 |      0 |      3 |      4 |      0 |      3 |      0 |      7 |      0 |     37 | s03      | R    |
| 5600100 |      17 |      1 |      8 |     0 |    0 |     2 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |      9 |      8 |       0 |       1 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        1 |        1 |       0 |        1 |        2 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      1 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5600400 |      16 |      2 |     12 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      8 |      8 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        4 |        1 |        1 |       0 |        3 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5600500 |     237 |     64 |    139 |     5 |    0 |     1 |    0 |    1 |     4 |    0 |     23 |    0 |    0 |    0 |    0 |    110 |    127 |       7 |       3 |       3 |       0 |      1 |      6 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        2 |        5 |        8 |        7 |        8 |       0 |        1 |        3 |        2 |       10 |        4 |        6 |       6 |        1 |        8 |        6 |       17 |       19 |        7 |       6 |        5 |        6 |       13 |       24 |       15 |        9 |       3 |        3 |        2 |        2 |        1 |        0 |        0 |       0 |        5 |        0 |        8 |        1 |        1 |        0 |       0 |        1 |        0 |        1 |        3 |        1 |        0 |       0 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |      0 |      0 |      6 |     17 |      2 |      4 |      1 |     34 |      0 |      0 |      0 |     14 |     15 |      7 |     10 |      9 |     84 |      0 |      0 |      3 |      0 |      3 |      0 |      0 |      0 |     17 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      0 |      5 |      0 |     37 | s03      | R    |
| 5600600 |      29 |      6 |     22 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     14 |     15 |       0 |       1 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        1 |        2 |        4 |        3 |       0 |        0 |        1 |        2 |        2 |        4 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      4 |      1 |      0 |      4 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5600700 |      35 |      5 |     22 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     20 |     15 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        4 |        4 |        2 |       0 |        1 |        1 |        1 |        3 |        3 |        1 |       0 |        0 |        1 |        0 |        2 |        0 |        1 |       0 |        0 |        1 |        0 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      3 |      7 |      0 |      0 |      2 |     10 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5601000 |      14 |      2 |      8 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      7 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5601400 |     314 |     60 |    193 |     7 |    0 |     1 |    2 |    0 |     1 |    0 |     50 |    0 |    0 |    0 |    0 |    143 |    171 |       2 |       6 |       2 |       1 |      3 |     13 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        1 |        5 |        6 |        7 |        3 |        1 |       0 |        3 |        7 |       10 |        8 |        7 |        2 |       0 |        5 |       15 |       41 |       20 |       11 |        4 |       0 |        6 |       16 |       37 |       21 |        7 |        9 |       1 |        2 |        6 |        3 |        6 |        2 |        1 |       0 |        3 |       10 |        7 |        6 |        3 |        1 |       0 |        0 |        1 |        2 |        1 |        0 |        0 |       0 |        2 |        2 |        2 |        1 |        0 |        0 |       0 |      0 |      2 |     21 |      8 |      0 |      0 |      0 |     29 |      0 |      0 |      3 |     94 |     17 |      1 |      0 |      0 |     78 |      0 |      0 |      0 |     20 |      1 |      0 |      0 |      0 |     29 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5601500 |     770 |    232 |    382 |    19 |    0 |     4 |    6 |    3 |     4 |    0 |    120 |    0 |    0 |    0 |    0 |    367 |    403 |      26 |      18 |      15 |       1 |     11 |     21 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      2 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        8 |       10 |       14 |       20 |       19 |       15 |       8 |       16 |       16 |       27 |       28 |       22 |       15 |      14 |       16 |       30 |       32 |       51 |       32 |       21 |      12 |       22 |       22 |       35 |       50 |       24 |       21 |      14 |       11 |        7 |       16 |       15 |        8 |        2 |       0 |       13 |       11 |       18 |       13 |        3 |        3 |       0 |        2 |        7 |        2 |        3 |        3 |        3 |       0 |        3 |        3 |        3 |        3 |        4 |        0 |       0 |      0 |      0 |     28 |     36 |     19 |      3 |      5 |    141 |      0 |      0 |      2 |     48 |     60 |     31 |     18 |     18 |    205 |      0 |      0 |      3 |     15 |     15 |     12 |      0 |      3 |     72 |      0 |      0 |      0 |      4 |      9 |      1 |      0 |      1 |     21 |      0 |     37 | s03      | R    |
| 5601600 |      10 |      1 |      5 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      6 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        2 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5601700 |      26 |      5 |     17 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     12 |     14 |       5 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        2 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        4 |        0 |       0 |        0 |        0 |        1 |        3 |        3 |        2 |       0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      3 |      0 |      1 |      1 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5601800 |      41 |     10 |     26 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |     20 |     21 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        0 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        1 |       1 |        2 |        3 |        1 |        2 |        5 |        0 |       0 |        2 |        1 |        1 |        4 |        4 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      7 |      1 |      1 |      0 |     16 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5601900 |      14 |      5 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      7 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        1 |        0 |        0 |        0 |        0 |       1 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       1 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5602000 |     550 |    167 |    241 |    18 |    0 |     6 |   14 |    3 |     4 |    0 |     97 |    0 |    0 |    0 |    0 |    245 |    305 |      26 |      13 |      13 |       1 |      3 |      8 |      4 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      2 |      1 |        7 |        6 |       15 |       18 |        8 |        8 |       5 |        3 |        8 |       19 |       26 |       21 |       17 |       6 |       11 |       15 |       37 |       23 |       12 |        9 |       0 |       14 |       26 |       34 |       32 |       15 |       11 |       2 |        5 |       12 |       10 |       10 |        7 |        3 |       1 |        9 |       11 |        8 |       14 |        3 |        3 |       1 |        3 |        3 |        6 |        5 |        3 |        3 |       0 |        5 |        1 |        6 |        8 |        1 |        1 |       0 |      0 |      1 |     28 |     33 |      6 |      2 |      6 |     91 |      0 |      0 |      3 |     36 |     61 |     14 |      7 |      8 |    112 |      0 |      0 |      0 |     16 |     10 |      7 |      1 |      0 |     63 |      0 |      0 |      0 |      7 |      6 |      2 |      0 |      1 |     29 |      0 |     37 | s03      | R    |
| 5602100 |      11 |      4 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      6 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        1 |       0 |        1 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5602200 |     231 |     66 |    121 |     4 |    0 |     3 |    0 |    1 |     1 |    0 |     35 |    0 |    0 |    0 |    0 |    118 |    113 |       8 |       7 |       1 |       0 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        1 |        1 |        2 |        8 |        3 |       10 |       4 |        3 |        1 |        9 |        8 |        4 |        6 |       6 |        3 |        7 |       11 |       14 |        8 |        9 |       7 |        7 |        3 |       14 |       16 |        4 |       11 |       7 |        5 |        6 |        5 |        8 |        2 |        1 |       0 |        2 |        2 |        1 |        1 |        2 |        0 |       0 |        0 |        3 |        0 |        0 |        0 |        0 |       0 |        2 |        0 |        0 |        0 |        2 |        2 |       0 |      0 |      1 |      8 |      4 |      4 |      7 |      2 |     40 |      0 |      0 |      2 |      8 |     21 |      6 |      9 |      3 |     72 |      0 |      0 |      1 |      2 |      3 |      4 |      0 |      0 |     25 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5602300 |      35 |      7 |     15 |     2 |    0 |     3 |    2 |    1 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     16 |     19 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        0 |        0 |        1 |        0 |        0 |        1 |       2 |        1 |        2 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        4 |        1 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       1 |        1 |        0 |        1 |        0 |        0 |        0 |       1 |        0 |        0 |        0 |        1 |        1 |        2 |       0 |        1 |        0 |        0 |        0 |        2 |        1 |       0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      5 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      2 |      9 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      2 |      2 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5602500 |     312 |     90 |    157 |     6 |    0 |     5 |    0 |    1 |     0 |    0 |     53 |    0 |    0 |    0 |    0 |    145 |    167 |       9 |      10 |       3 |       1 |      6 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        4 |       10 |        8 |        7 |        4 |       2 |        3 |        4 |        7 |       18 |        7 |       10 |       3 |        4 |       11 |       11 |       23 |       10 |       14 |       2 |       12 |        9 |       17 |       21 |       10 |       10 |       3 |        5 |        3 |        4 |        7 |        5 |        2 |       0 |        5 |        5 |        5 |        7 |        3 |        2 |       0 |        0 |        2 |        2 |        0 |        1 |        1 |       0 |        0 |        3 |        2 |        0 |        0 |        1 |       0 |      0 |      0 |     14 |     24 |      2 |      0 |      4 |     46 |      0 |      0 |      1 |     30 |     33 |     11 |      0 |      3 |     79 |      0 |      0 |      0 |      4 |      9 |      2 |      0 |      1 |     37 |      0 |      0 |      1 |      2 |      3 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5603000 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5603100 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5615000 |     316 |     71 |    198 |     4 |    0 |     0 |    0 |    1 |     0 |    0 |     42 |    0 |    0 |    0 |    0 |    145 |    171 |       7 |       4 |       2 |       1 |      3 |     10 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        2 |        1 |        7 |       11 |        1 |       1 |        8 |        2 |        7 |       15 |       10 |        5 |       0 |       10 |        6 |       15 |       28 |       27 |       13 |       0 |       10 |       11 |       16 |       34 |       18 |       10 |       0 |        6 |        3 |        2 |        4 |        5 |        2 |       0 |        4 |        0 |        2 |        4 |        8 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        2 |        0 |        1 |       0 |      0 |      1 |     22 |     11 |      1 |      2 |      5 |     29 |      0 |      0 |      3 |     54 |     35 |      5 |      3 |     11 |     87 |      0 |      0 |      0 |     11 |      3 |      0 |      0 |      0 |     28 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5615100 |     128 |     41 |     63 |     3 |    0 |     3 |    1 |    0 |     1 |    0 |     16 |    0 |    0 |    0 |    0 |     59 |     69 |       5 |      10 |       1 |       1 |      3 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        2 |        1 |        1 |        4 |        5 |        3 |       1 |        3 |        1 |        8 |        3 |        3 |        5 |       1 |        3 |        2 |        8 |        2 |        5 |        8 |       3 |        4 |        1 |        6 |        5 |       10 |        2 |       4 |        3 |        2 |        0 |        4 |        0 |        0 |       0 |        1 |        0 |        2 |        3 |        0 |        0 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        2 |        0 |        2 |        0 |        1 |        1 |       0 |      0 |      0 |      3 |      8 |      1 |      2 |      3 |     24 |      0 |      0 |      0 |     15 |      5 |      7 |      1 |      0 |     35 |      0 |      0 |      1 |      3 |      1 |      2 |      1 |      1 |      7 |      0 |      0 |      0 |      1 |      2 |      1 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
| 5615300 |     264 |     84 |    125 |     2 |    0 |     2 |    0 |    0 |     4 |    0 |     47 |    0 |    0 |    0 |    0 |    121 |    143 |      12 |       8 |       3 |       0 |      4 |      5 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        1 |        5 |       10 |        5 |        9 |       3 |        4 |        1 |       10 |        9 |        8 |       12 |       4 |        1 |        5 |       16 |       12 |       10 |       13 |       9 |        5 |        4 |       14 |       12 |       11 |        8 |       5 |        0 |        3 |        4 |        5 |        2 |        3 |       0 |        4 |        5 |        8 |        3 |        7 |        2 |       1 |        0 |        2 |        0 |        0 |        0 |        0 |       0 |        2 |        1 |        2 |        1 |        0 |        0 |       0 |      0 |      0 |      9 |     13 |      3 |      9 |      7 |     43 |      0 |      0 |      2 |      8 |     20 |      7 |      8 |      6 |     74 |      0 |      0 |      0 |      2 |      4 |      6 |      3 |      5 |     27 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5615500 |       5 |      0 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5615600 |      25 |      2 |     13 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     10 |    0 |    0 |    0 |    0 |     12 |     13 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       1 |        0 |        2 |        1 |        0 |        1 |        2 |       1 |        1 |        1 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        2 |        1 |        0 |       0 |        1 |        5 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      1 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5615700 |      12 |      4 |      4 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      7 |      5 |       0 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5615800 |      99 |     20 |     59 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     54 |     45 |       0 |       3 |       1 |       0 |      1 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      2 |      0 |      3 |      1 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      0 |        3 |        1 |        3 |        3 |        1 |        1 |       0 |        1 |        1 |        1 |        3 |        0 |        2 |       0 |        2 |        2 |       13 |       10 |        7 |        0 |       0 |        4 |        0 |       13 |        7 |        0 |        1 |       0 |        1 |        1 |        3 |        0 |        2 |        1 |       0 |        4 |        0 |        2 |        2 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      7 |      1 |      0 |      3 |      0 |      9 |      0 |      0 |      1 |      7 |      7 |      7 |     10 |      3 |     24 |      0 |      0 |      1 |      0 |      1 |      4 |      1 |      0 |     11 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5616100 |     106 |     20 |     68 |     3 |    0 |     1 |    0 |    0 |     1 |    0 |     13 |    0 |    0 |    0 |    0 |     57 |     49 |       0 |       6 |       0 |       0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        0 |        1 |        2 |        3 |        1 |       1 |        3 |        0 |        0 |        1 |        2 |        2 |       1 |        9 |        0 |        6 |       10 |        5 |        6 |       0 |        1 |        0 |       12 |       11 |        4 |        4 |       0 |        4 |        0 |        1 |        4 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        1 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      1 |      2 |     13 |      0 |      0 |      0 |      9 |     14 |      3 |      7 |      6 |     29 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      5 |      0 |     37 | s03      | R    |
| 5616300 |     360 |     86 |    197 |    10 |    0 |     4 |    0 |    3 |     0 |    0 |     60 |    0 |    0 |    0 |    0 |    182 |    178 |      17 |      16 |       6 |       0 |      4 |      6 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      9 |      8 |      4 |      0 |        4 |        4 |        4 |       10 |       13 |        4 |       0 |        5 |        6 |       11 |       12 |       12 |        1 |       0 |       11 |       15 |       18 |       34 |       24 |        4 |       0 |        9 |        5 |       24 |       30 |       15 |        7 |       1 |        5 |        3 |        6 |       11 |        2 |        0 |       0 |        8 |        8 |        5 |        7 |        2 |        2 |       1 |        2 |        4 |        2 |        2 |        0 |        0 |       0 |        1 |        2 |        2 |        2 |        0 |        0 |       0 |      0 |      1 |      9 |     22 |     13 |     16 |      0 |     25 |      0 |      0 |      2 |     21 |     50 |     13 |     31 |      4 |     76 |      0 |      0 |      0 |     10 |     14 |      0 |      6 |      0 |     30 |      0 |      0 |      0 |      1 |      4 |      1 |      2 |      0 |      9 |      0 |     37 | s03      | R    |
| 5616800 |      62 |     13 |     36 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |     13 |    0 |    0 |    0 |    0 |     32 |     30 |       0 |       2 |       0 |       0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        1 |        2 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        1 |        4 |        1 |        0 |       0 |        0 |        1 |        1 |        8 |        5 |        3 |       1 |        2 |        1 |        0 |        5 |        5 |        2 |       2 |        1 |        0 |        1 |        2 |        1 |        0 |       1 |        3 |        0 |        0 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      5 |      7 |      2 |      1 |      2 |     19 |      0 |      0 |      0 |      1 |      0 |      3 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5617000 |       9 |      2 |      4 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      5 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5629000 |     365 |    129 |    149 |     6 |    0 |     1 |   12 |    1 |     0 |    0 |     67 |    0 |    0 |    0 |    0 |    170 |    195 |      19 |      12 |       4 |       1 |      5 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |        0 |        6 |        5 |       18 |       10 |        7 |       3 |        3 |        5 |       19 |       24 |       17 |        9 |       3 |        8 |        3 |       11 |       22 |       11 |       14 |       5 |        7 |        5 |       21 |       10 |       15 |       15 |       2 |        7 |        5 |        9 |        6 |        5 |        3 |       0 |        7 |        3 |        7 |       11 |        3 |        1 |       0 |        3 |        5 |        2 |        2 |        0 |        0 |       0 |        3 |        1 |        1 |        1 |        1 |        1 |       0 |      0 |      0 |     14 |     12 |      6 |      7 |     10 |     80 |      0 |      0 |      1 |     18 |     18 |      7 |      9 |      7 |     89 |      0 |      0 |      3 |     12 |      6 |      1 |      3 |      5 |     37 |      0 |      0 |      0 |      2 |      2 |      2 |      1 |      0 |     13 |      0 |     37 | s03      | R    |
| 5629100 |     117 |     18 |     70 |     3 |    0 |     2 |    0 |    0 |     0 |    0 |     24 |    0 |    0 |    0 |    0 |     64 |     53 |       4 |       6 |       5 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        1 |        2 |        3 |        2 |        0 |       0 |        0 |        0 |        3 |        4 |        1 |        1 |       0 |        4 |        1 |        7 |       10 |        9 |        7 |       0 |        1 |        1 |        8 |       11 |        6 |        5 |       0 |        1 |        1 |        3 |        3 |        6 |        1 |       0 |        2 |        1 |        3 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |      0 |      0 |      2 |      4 |      2 |      0 |      0 |     10 |      0 |      0 |      0 |      5 |      6 |      8 |      2 |      3 |     46 |      0 |      0 |      0 |      0 |      6 |      3 |      2 |      0 |     13 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5629200 |     439 |    132 |    220 |     8 |    0 |     2 |    3 |    0 |     3 |    0 |     71 |    0 |    0 |    0 |    0 |    219 |    220 |      16 |      18 |      14 |       3 |      2 |     11 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |       0 |       2 |       0 |       0 |      0 |      3 |      0 |      0 |        4 |        4 |        7 |       20 |       13 |       10 |       5 |        8 |        4 |        7 |       19 |       16 |       11 |       4 |        8 |       13 |       17 |       34 |       18 |       18 |       4 |       11 |       15 |       18 |       22 |       25 |       14 |       3 |        4 |        3 |        9 |        8 |        6 |        3 |       0 |        7 |        4 |       11 |       11 |        3 |        2 |       0 |        2 |        3 |        1 |        2 |        1 |        2 |       0 |        1 |        2 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |     24 |     11 |     11 |     11 |      5 |     70 |      0 |      0 |      1 |     15 |     34 |     21 |     12 |      9 |    128 |      0 |      0 |      0 |     10 |     19 |      4 |      1 |      1 |     36 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      3 |      7 |      0 |     37 | s03      | R    |
| 5629300 |      82 |     14 |     55 |     0 |    0 |     0 |    0 |    1 |     1 |    0 |     11 |    0 |    0 |    0 |    0 |     45 |     37 |       4 |       2 |       1 |       0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        1 |        0 |        0 |       0 |        0 |        3 |        0 |        3 |        1 |        1 |       1 |        4 |        4 |        6 |        7 |       10 |        2 |       0 |        4 |        2 |        7 |        8 |        0 |        1 |       0 |        0 |        2 |        1 |        0 |        3 |        0 |       0 |        1 |        2 |        1 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      6 |      0 |      0 |      1 |      7 |      0 |      0 |      0 |      2 |     18 |      3 |      0 |      0 |     32 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5629500 |      14 |      2 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      5 |      9 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        5 |        0 |        2 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5629600 |     268 |     73 |    145 |     2 |    0 |     5 |    1 |    0 |     2 |    0 |     40 |    0 |    0 |    0 |    0 |    131 |    137 |       5 |       6 |       1 |       1 |      2 |      9 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |       0 |       0 |       0 |       0 |      1 |      2 |      0 |      0 |        1 |        0 |        2 |       10 |        9 |        6 |       0 |        2 |        1 |        6 |       16 |       10 |        9 |       1 |        8 |        3 |       20 |       18 |       13 |       11 |       0 |        6 |        8 |       21 |       20 |       10 |        5 |       2 |        3 |        6 |        4 |        7 |        2 |        2 |       0 |        5 |        2 |        6 |        2 |        1 |        0 |       0 |        3 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |      0 |      0 |      5 |     12 |      2 |      3 |      6 |     45 |      0 |      0 |      1 |     40 |     11 |      5 |      6 |      3 |     79 |      0 |      0 |      0 |      5 |      3 |      2 |      1 |      2 |     27 |      0 |      0 |      0 |      3 |      4 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5629700 |       8 |      2 |      5 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      4 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        1 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5629800 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5630000 |     475 |    115 |    253 |    12 |    0 |     4 |    3 |    1 |     4 |    0 |     83 |    0 |    0 |    0 |    0 |    222 |    253 |       4 |       8 |       4 |       1 |      2 |      7 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        5 |       14 |       11 |        9 |       3 |        1 |        7 |        8 |       26 |       16 |        9 |       4 |        8 |        8 |       23 |       39 |       29 |       17 |       6 |       11 |        7 |       28 |       35 |       22 |       18 |       2 |        1 |        5 |        9 |       13 |        8 |        2 |       1 |        8 |        7 |       12 |       13 |        2 |        1 |       1 |        1 |        1 |        1 |        3 |        2 |        1 |       0 |        0 |        3 |        3 |        5 |        2 |        2 |       0 |      0 |      0 |      8 |     27 |      7 |      7 |     10 |     56 |      0 |      0 |      1 |     27 |     45 |     13 |     10 |     18 |    139 |      0 |      0 |      1 |     13 |     19 |      5 |      4 |      3 |     38 |      0 |      0 |      0 |      4 |     10 |      2 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 5630300 |      16 |      3 |      8 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |      8 |      8 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        2 |        1 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      6 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5630400 |     395 |    112 |    194 |     9 |    0 |    10 |    1 |    0 |     1 |    0 |     68 |    0 |    0 |    0 |    0 |    191 |    204 |      20 |      21 |       9 |       2 |      4 |      4 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      2 |      2 |      0 |      2 |        4 |        7 |        9 |       14 |       11 |        7 |       1 |        4 |        3 |       20 |       16 |        8 |        5 |       3 |       11 |        4 |       17 |       28 |       16 |       13 |       4 |        3 |        9 |       22 |       30 |       15 |       14 |       8 |        3 |        5 |        6 |        9 |        7 |        1 |       0 |        8 |        7 |        8 |        9 |        5 |        0 |       0 |        2 |        1 |        6 |        5 |        0 |        0 |       0 |        1 |        0 |        3 |        2 |        0 |        1 |       0 |      0 |      1 |      9 |     18 |     13 |      8 |      1 |     62 |      0 |      0 |      1 |     23 |     33 |     10 |     12 |     11 |    104 |      0 |      0 |      0 |     15 |     11 |      4 |      3 |      3 |     32 |      0 |      0 |      0 |      4 |      3 |      3 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5630700 |     370 |    105 |    176 |    16 |    0 |     5 |    5 |    0 |     5 |    0 |     58 |    0 |    0 |    0 |    0 |    196 |    174 |       8 |       3 |       5 |       0 |      8 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      3 |      0 |      0 |        0 |        2 |       13 |       18 |        8 |        9 |       2 |        1 |        0 |       11 |       24 |        7 |        8 |       2 |        9 |       11 |       16 |       30 |       20 |       17 |       1 |        9 |        5 |       18 |       22 |        8 |       10 |       0 |        3 |        2 |        6 |        7 |        3 |        2 |       1 |        5 |        6 |        8 |        7 |        6 |        2 |       0 |        4 |        2 |        1 |        6 |        2 |        1 |       0 |        1 |        0 |        3 |        7 |        4 |        0 |       0 |      0 |      1 |     12 |     12 |      5 |      5 |     13 |     57 |      0 |      0 |      0 |     26 |     25 |     11 |      7 |     11 |     96 |      0 |      0 |      0 |      4 |      9 |      4 |      1 |      4 |     36 |      0 |      0 |      0 |      5 |      7 |      2 |      0 |      1 |     16 |      0 |     37 | s03      | R    |
| 5630800 |      10 |      4 |      3 |     0 |    0 |     1 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5631000 |      42 |     18 |      9 |     1 |    0 |     0 |    1 |    0 |     2 |    0 |     11 |    0 |    0 |    0 |    0 |     20 |     22 |       0 |       2 |       2 |       0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        3 |        0 |       0 |        1 |        1 |        3 |        4 |        2 |        0 |       0 |        1 |        0 |        0 |        4 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       1 |        1 |        2 |        1 |        1 |        1 |        0 |       0 |        0 |        2 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      7 |      2 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      3 |      2 |      0 |      1 |      2 |      0 |      0 |      0 |      3 |      4 |      1 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5631200 |       2 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5631400 |     174 |     46 |    102 |     3 |    0 |     0 |    0 |    0 |     1 |    0 |     22 |    0 |    0 |    0 |    0 |     84 |     90 |      10 |      14 |       4 |       0 |      4 |     11 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       1 |      0 |      3 |      0 |      0 |        2 |        1 |        3 |        6 |        5 |        2 |       0 |        1 |        3 |        5 |        8 |        7 |        2 |       1 |        6 |        1 |        9 |       15 |       17 |        4 |       0 |        5 |        4 |       12 |       17 |       11 |        1 |       0 |        4 |        0 |        2 |        3 |        2 |        0 |       0 |        2 |        0 |        3 |        3 |        2 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      4 |      5 |      6 |      5 |      0 |     26 |      0 |      0 |      4 |     15 |     26 |     12 |      7 |      3 |     35 |      0 |      0 |      0 |      2 |      1 |      2 |      1 |      0 |     16 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5631500 |      37 |      9 |     18 |     1 |    0 |     0 |    2 |    0 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |     22 |     15 |       0 |       0 |       1 |       0 |      1 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        1 |        0 |        1 |        2 |        0 |        2 |       1 |        3 |        0 |        3 |        2 |        0 |        4 |       1 |        0 |        0 |        2 |        0 |        0 |        3 |       0 |        0 |        0 |        0 |        3 |        2 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5632000 |     148 |     38 |     86 |     5 |    0 |     0 |    0 |    2 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     66 |     82 |       8 |       7 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        0 |        0 |        4 |        2 |        4 |        1 |       1 |        3 |        2 |        6 |        6 |        5 |        2 |       2 |        2 |        4 |       14 |        7 |        7 |        7 |       1 |        3 |        5 |        7 |       12 |        9 |        7 |       1 |        2 |        0 |        1 |        2 |        2 |        2 |       0 |        1 |        2 |        2 |        1 |        1 |        1 |       0 |        0 |        2 |        0 |        1 |        0 |        0 |       0 |        0 |        2 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      5 |      6 |      6 |      0 |      0 |     21 |      0 |      0 |      0 |      6 |     15 |      8 |      1 |      3 |     53 |      0 |      0 |      0 |      4 |      3 |      0 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      5 |      0 |     37 | s03      | R    |
| 5633000 |     610 |    166 |    298 |    17 |    0 |     7 |    9 |    4 |     7 |    0 |    102 |    0 |    0 |    0 |    0 |    299 |    311 |      25 |      18 |      12 |       4 |      6 |     12 |      6 |      4 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      1 |      1 |      1 |        2 |        7 |       10 |       19 |       12 |       14 |       4 |        3 |        8 |       13 |       33 |       19 |       20 |       2 |       11 |       12 |       26 |       38 |       28 |       28 |       5 |       10 |       10 |       38 |       43 |       26 |       15 |       8 |       13 |        7 |        8 |       13 |       12 |        7 |       0 |        4 |        6 |       15 |        8 |        7 |        2 |       0 |        3 |        2 |        5 |        7 |        5 |        1 |       0 |        6 |        3 |        1 |        7 |        3 |        1 |       0 |      0 |      2 |     18 |     24 |     16 |     10 |     11 |     85 |      0 |      0 |      3 |     26 |     47 |     25 |     14 |      8 |    175 |      0 |      0 |      0 |     16 |     10 |      3 |      3 |      6 |     64 |      0 |      0 |      0 |      6 |      8 |      4 |      1 |      1 |     24 |      0 |     37 | s03      | R    |
| 5633100 |       6 |      2 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      3 |      3 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5633200 |      25 |      6 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      8 |    0 |    0 |    0 |    0 |     12 |     13 |       1 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        3 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        3 |        1 |        1 |       0 |        0 |        1 |        0 |        2 |        0 |        1 |       1 |        1 |        0 |        1 |        3 |        0 |        0 |       0 |        0 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      4 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5633400 |       6 |      2 |      3 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      2 |       2 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5633500 |      18 |     10 |      3 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      9 |      9 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        1 |        0 |        1 |        0 |        3 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      0 |      1 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      1 |      0 |     37 | s03      | R    |
| 5633800 |      72 |     31 |     27 |     1 |    0 |     0 |    0 |    1 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     37 |     35 |       2 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        1 |        2 |        6 |        3 |       0 |        0 |        1 |        6 |        4 |        6 |        1 |       0 |        2 |        1 |        3 |        4 |        2 |        4 |       0 |        0 |        2 |        2 |        3 |        3 |        1 |       0 |        0 |        0 |        1 |        3 |        2 |        1 |       0 |        0 |        0 |        2 |        2 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |      0 |      0 |      5 |      2 |      4 |      2 |      0 |     18 |      0 |      0 |      0 |      3 |      2 |      2 |      5 |      1 |     14 |      0 |      0 |      0 |      3 |      2 |      2 |      1 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5633900 |     471 |     99 |    261 |     8 |    0 |     4 |    2 |    3 |     3 |    0 |     91 |    0 |    0 |    0 |    0 |    231 |    240 |       8 |       7 |       5 |       0 |      6 |      7 |      7 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        1 |        3 |        2 |        9 |       18 |        8 |       3 |        2 |        7 |        6 |       15 |       14 |        8 |       3 |       19 |        8 |       25 |       36 |       27 |       18 |       2 |       10 |        5 |       37 |       31 |       18 |       20 |       5 |        5 |        4 |        6 |       12 |        8 |        6 |       0 |       14 |        7 |        7 |       11 |        7 |        4 |       0 |        1 |        2 |        4 |        0 |        1 |        3 |       0 |        1 |        1 |        2 |        2 |        0 |        3 |       0 |      0 |      2 |     10 |      8 |      2 |      2 |     10 |     65 |      0 |      0 |      1 |     39 |     56 |     14 |     18 |     16 |    117 |      0 |      0 |      3 |     13 |     11 |      7 |      2 |      3 |     52 |      0 |      0 |      0 |      3 |      6 |      1 |      1 |      1 |      8 |      0 |     37 | s03      | R    |
| 5634200 |     110 |     35 |     51 |     1 |    0 |     2 |    0 |    0 |     0 |    0 |     21 |    0 |    0 |    0 |    0 |     53 |     57 |       6 |       2 |       6 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      3 |      3 |      1 |      0 |        0 |        1 |        5 |        4 |        4 |        0 |       1 |        2 |        0 |        2 |        5 |        5 |        4 |       2 |        0 |        3 |        5 |        7 |        5 |        5 |       0 |        2 |        2 |        7 |        6 |        5 |        4 |       0 |        5 |        2 |        2 |        1 |        2 |        0 |       0 |        2 |        0 |        1 |        4 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      5 |      1 |      0 |      3 |     24 |      0 |      0 |      0 |      3 |     12 |      6 |      1 |      2 |     27 |      0 |      0 |      0 |      3 |      3 |      3 |      2 |      0 |     10 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5634400 |     340 |     91 |    182 |     5 |    0 |     3 |    2 |    1 |     3 |    0 |     53 |    0 |    0 |    0 |    0 |    173 |    167 |      21 |      23 |      11 |       1 |      1 |      9 |      2 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        3 |        6 |       12 |        8 |        9 |       4 |        2 |        3 |        6 |       17 |        7 |        6 |       4 |        9 |        3 |       18 |       27 |       18 |       16 |       3 |       14 |        5 |       24 |       19 |       16 |        8 |       2 |        2 |        5 |        4 |        9 |        2 |        2 |       0 |        8 |        4 |        7 |        6 |        3 |        1 |       0 |        3 |        2 |        2 |        2 |        0 |        0 |       0 |        1 |        1 |        0 |        2 |        1 |        0 |       0 |      0 |      1 |     14 |     13 |     10 |      4 |      4 |     45 |      0 |      0 |      1 |     18 |     28 |      1 |     23 |      4 |    107 |      0 |      0 |      0 |      6 |      6 |      6 |      0 |      2 |     33 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |      0 |      8 |      0 |     37 | s03      | R    |
| 5634600 |      18 |      3 |     11 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      7 |     11 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        3 |       0 |        0 |        0 |        1 |        1 |        3 |        2 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5634900 |      14 |      1 |     10 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      7 |      7 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       2 |        0 |        0 |        2 |        1 |        0 |        1 |       2 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      2 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5635000 |      17 |     11 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      6 |     11 |       7 |       1 |       1 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        1 |        0 |        0 |        0 |       1 |        1 |        2 |        2 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      3 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5643000 |       9 |      6 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      4 |      5 |       6 |       1 |       2 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5644000 |     135 |     33 |     61 |     5 |    0 |     1 |    3 |    1 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |     68 |     67 |       5 |       7 |       6 |       0 |      3 |      2 |      4 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        3 |        1 |        2 |        3 |        4 |       0 |        1 |        0 |        4 |        6 |        4 |        4 |       0 |        4 |        4 |        4 |        7 |        8 |        7 |       1 |        0 |        5 |        6 |        9 |        5 |        1 |       0 |        1 |        0 |        6 |        3 |        3 |        1 |       0 |        3 |        4 |        5 |        2 |        0 |        2 |       0 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        1 |        2 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      6 |      3 |      1 |      0 |      5 |     18 |      0 |      0 |      0 |     13 |      9 |      6 |      1 |      2 |     30 |      0 |      0 |      0 |      2 |      2 |      5 |      0 |      1 |     20 |      0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5644500 |      84 |     22 |     35 |     2 |    0 |     2 |    0 |    0 |     3 |    0 |     20 |    0 |    0 |    0 |    0 |     47 |     37 |       2 |       3 |       2 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        1 |        2 |        2 |        5 |       0 |        1 |        0 |        0 |        4 |        2 |        4 |       0 |        1 |        1 |        2 |        1 |        9 |        5 |       1 |        0 |        0 |        2 |        3 |        3 |        6 |       1 |        2 |        1 |        3 |        3 |        1 |        1 |       1 |        1 |        1 |        0 |        5 |        0 |        1 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        0 |       0 |      0 |      0 |      3 |      5 |      7 |      0 |      3 |      4 |      0 |      0 |      0 |      3 |     11 |      3 |      1 |      3 |     14 |      0 |      0 |      1 |      4 |      4 |      0 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      3 |      0 |      1 |      0 |      3 |      0 |     37 | s03      | R    |
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| 5654400 |     342 |    154 |    111 |    10 |    0 |     5 |    2 |    0 |     5 |    0 |     55 |    0 |    0 |    0 |    0 |    170 |    172 |      25 |      12 |      13 |       6 |      8 |      9 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      0 |      0 |        1 |        2 |        5 |       12 |       16 |       29 |       3 |        1 |        3 |       11 |       21 |       19 |       30 |       1 |        1 |        6 |        4 |        7 |       14 |       26 |       0 |        2 |        3 |        6 |        9 |        8 |       22 |       3 |        3 |        3 |        2 |        7 |       10 |        4 |       1 |        1 |        2 |        3 |        9 |        7 |        3 |       0 |        3 |        1 |        2 |        4 |        1 |        3 |       0 |        1 |        1 |        3 |        1 |        0 |        2 |       0 |      0 |      1 |     19 |     38 |      6 |      5 |      9 |     76 |      0 |      0 |      1 |     20 |     23 |     13 |      4 |      3 |     47 |      0 |      0 |      0 |      6 |      6 |      3 |      3 |      2 |     35 |      0 |      0 |      2 |      1 |      8 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5654500 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5654700 |     107 |     37 |     49 |     3 |    0 |     0 |    0 |    0 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     51 |     56 |       2 |       3 |       2 |       0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        3 |        0 |        8 |       0 |        0 |        0 |        3 |        3 |        7 |       10 |       0 |        0 |        1 |        1 |        4 |        4 |       17 |       1 |        1 |        0 |        1 |        3 |        3 |       12 |       1 |        0 |        0 |        1 |        0 |        1 |        5 |       0 |        1 |        1 |        0 |        0 |        4 |        4 |       1 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      6 |      5 |      5 |      0 |      1 |     20 |      0 |      0 |      0 |      6 |      9 |      7 |      0 |      2 |     25 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5654800 |     353 |    108 |    193 |     7 |    0 |     2 |    1 |    1 |     2 |    0 |     39 |    0 |    0 |    0 |    0 |    170 |    183 |      20 |       6 |       6 |       2 |      2 |      6 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        4 |        1 |        7 |        7 |       23 |       3 |        1 |        4 |        5 |        7 |       16 |       28 |       1 |        2 |        3 |        4 |        8 |       22 |       57 |       3 |        1 |        0 |        5 |        8 |       16 |       58 |       6 |        1 |        1 |        4 |        4 |        5 |        3 |       0 |        0 |        1 |        1 |        5 |       10 |        3 |       1 |        0 |        0 |        1 |        2 |        1 |        3 |       0 |        0 |        0 |        1 |        1 |        2 |        2 |       0 |      0 |      1 |     13 |     20 |      4 |      1 |      4 |     65 |      0 |      0 |      1 |     25 |     29 |      6 |     13 |      8 |    111 |      0 |      0 |      2 |      2 |      6 |      0 |      1 |      0 |     28 |      0 |      0 |      0 |      1 |      1 |      2 |      1 |      0 |      8 |      0 |     37 | s03      | R    |
| 5655500 |      81 |     18 |     54 |     1 |    0 |     0 |    1 |    0 |     0 |    0 |      7 |    0 |    0 |    0 |    0 |     43 |     38 |       1 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        4 |        4 |       0 |        0 |        0 |        0 |        1 |        2 |        5 |       0 |        0 |        0 |        1 |        1 |        5 |       19 |       0 |        0 |        0 |        1 |        5 |        5 |       17 |       0 |        0 |        0 |        1 |        2 |        0 |        2 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      3 |      3 |      1 |      0 |     11 |      0 |      0 |      0 |      3 |     16 |      5 |      3 |      2 |     25 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5655600 |      11 |      3 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      7 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5655700 |      70 |     35 |     24 |     1 |    0 |     0 |    0 |    1 |     0 |    0 |      9 |    0 |    0 |    0 |    0 |     36 |     34 |       5 |       2 |       2 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        2 |        7 |        6 |       0 |        0 |        0 |        2 |        3 |        3 |        8 |       1 |        0 |        1 |        3 |        5 |        1 |        3 |       0 |        0 |        0 |        3 |        0 |        2 |        6 |       0 |        0 |        0 |        0 |        1 |        1 |        2 |       0 |        1 |        1 |        0 |        1 |        0 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      7 |      7 |      1 |      1 |     17 |      0 |      0 |      0 |      2 |      4 |      4 |      4 |      0 |     10 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5665000 |     181 |     59 |     79 |     8 |    0 |     3 |    1 |    0 |     1 |    0 |     30 |    0 |    0 |    0 |    0 |     95 |     86 |       1 |       1 |       0 |       1 |      2 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        4 |        1 |        4 |        6 |        5 |       10 |       0 |        0 |        1 |        7 |        6 |        5 |        9 |       1 |        1 |        3 |        2 |       11 |        9 |       10 |       0 |        3 |        3 |       10 |        6 |        8 |       12 |       1 |        3 |        2 |        2 |        3 |        5 |        3 |       1 |        1 |        1 |        1 |        5 |        2 |        1 |       0 |        0 |        1 |        1 |        4 |        3 |        0 |       1 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      9 |     11 |      3 |      4 |      5 |     27 |      0 |      0 |      0 |      6 |     16 |     10 |      4 |      5 |     38 |      0 |      0 |      0 |      6 |      2 |      2 |      0 |      0 |     20 |      0 |      0 |      0 |      1 |      5 |      0 |      0 |      1 |      6 |      0 |     37 | s03      | R    |
| 5670200 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5670300 |     181 |     44 |     94 |     3 |    0 |     3 |    1 |    0 |     4 |    0 |     32 |    0 |    0 |    0 |    0 |     86 |     95 |       2 |       4 |       0 |       0 |      0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        1 |        3 |        6 |       1 |        1 |        1 |        1 |       10 |        7 |        8 |       1 |        1 |        3 |       10 |       10 |       10 |       14 |       0 |        0 |        2 |        9 |       12 |       13 |        9 |       1 |        0 |        0 |        1 |       10 |        5 |        2 |       0 |        1 |        1 |        1 |        7 |        2 |        2 |       0 |        0 |        1 |        3 |        1 |        0 |        0 |       0 |        2 |        0 |        2 |        0 |        2 |        0 |       0 |      0 |      0 |      3 |     12 |      4 |      4 |      0 |     21 |      0 |      0 |      0 |     11 |     13 |     15 |      3 |      5 |     47 |      0 |      0 |      0 |     10 |      6 |      1 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      7 |      0 |     37 | s03      | R    |
| 5670500 |     104 |     21 |     61 |     3 |    0 |     2 |    0 |    0 |     0 |    0 |     17 |    0 |    0 |    0 |    0 |     49 |     55 |       1 |       4 |       0 |       0 |      2 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        2 |        2 |        3 |       0 |        1 |        0 |        2 |        5 |        2 |        3 |       0 |        0 |        0 |        7 |        7 |        6 |        9 |       0 |        1 |        3 |        4 |        7 |        7 |        9 |       1 |        0 |        1 |        2 |        2 |        3 |        1 |       0 |        2 |        0 |        2 |        4 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |      3 |      3 |      0 |      0 |      2 |     13 |      0 |      0 |      1 |      6 |      9 |      7 |      4 |      3 |     31 |      0 |      0 |      0 |      4 |      2 |      0 |      0 |      0 |     11 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5670700 |       1 |      0 |      0 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5670800 |       9 |      4 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      5 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5670900 |     219 |     58 |    112 |     4 |    0 |     2 |    2 |    0 |     6 |    0 |     35 |    0 |    0 |    0 |    0 |    103 |    116 |       3 |       2 |       1 |       1 |      4 |      6 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |        3 |        1 |        2 |        5 |        5 |        7 |       1 |        0 |        1 |        3 |        9 |       15 |        6 |       0 |        3 |        4 |        2 |        8 |       15 |       19 |       1 |        3 |        4 |        5 |       16 |       14 |       16 |       2 |        2 |        4 |        2 |        3 |        5 |        2 |       0 |        1 |        0 |        3 |        7 |        3 |        3 |       0 |        2 |        0 |        2 |        2 |        1 |        2 |       0 |        1 |        1 |        0 |        1 |        0 |        2 |       0 |      0 |      0 |      3 |     12 |      7 |      4 |      4 |     28 |      0 |      0 |      0 |     18 |     18 |      8 |      9 |      7 |     52 |      0 |      0 |      1 |      2 |      8 |      6 |      1 |      1 |     16 |      0 |      0 |      0 |      1 |      1 |      3 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5671000 |     123 |     21 |     80 |     5 |    0 |     1 |    0 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     63 |     60 |       0 |       0 |       1 |       0 |      2 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        3 |        2 |        2 |       0 |        1 |        2 |        1 |        4 |        4 |        2 |       0 |        0 |        0 |       10 |       11 |        7 |       14 |       0 |        1 |        1 |        6 |        7 |        8 |       14 |       1 |        1 |        2 |        0 |        5 |        0 |        2 |       0 |        1 |        0 |        0 |        1 |        2 |        2 |       0 |        1 |        1 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |      0 |      0 |      5 |      4 |      2 |      1 |      0 |      9 |      0 |      0 |      0 |      5 |     21 |      9 |      3 |      4 |     38 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5671500 |     189 |     56 |     85 |     7 |    0 |     1 |    2 |    0 |     3 |    0 |     35 |    0 |    0 |    0 |    0 |     85 |    104 |       3 |       2 |       4 |       0 |      6 |      4 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |       1 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |        1 |        0 |        2 |        3 |        7 |        7 |       2 |        1 |        4 |        3 |        9 |        8 |        9 |       0 |        1 |        1 |        7 |       12 |        8 |        7 |       3 |        4 |        2 |        7 |       12 |       10 |        9 |       2 |        1 |        4 |        3 |        7 |        4 |        0 |       0 |        4 |        3 |        3 |        3 |        2 |        1 |       0 |        0 |        1 |        2 |        0 |        1 |        1 |       0 |        1 |        2 |        2 |        1 |        2 |        0 |       0 |      0 |      0 |      7 |      5 |      4 |      1 |      3 |     36 |      0 |      0 |      0 |      8 |     12 |      9 |      2 |      4 |     50 |      0 |      0 |      0 |      8 |      2 |      3 |      0 |      0 |     22 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |      9 |      0 |     37 | s03      | R    |
| 5671800 |       4 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5672100 |     459 |    142 |    211 |     8 |    0 |     6 |    7 |    1 |     7 |    0 |     77 |    0 |    0 |    0 |    0 |    228 |    231 |       9 |       2 |       8 |       2 |      4 |      9 |      5 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        1 |        3 |        1 |       20 |       17 |        5 |       2 |        7 |        4 |       16 |       27 |       20 |       17 |       2 |        7 |       14 |       20 |       28 |       31 |       20 |       2 |        8 |        3 |       14 |       27 |       21 |       14 |       2 |        8 |        2 |        7 |       14 |        9 |        1 |       0 |        4 |       11 |        5 |       10 |        4 |        2 |       0 |        1 |        3 |        3 |        3 |        4 |        2 |       0 |        1 |        3 |        0 |        3 |        3 |        3 |       0 |      0 |      0 |     10 |     19 |     12 |     10 |      9 |     82 |      0 |      0 |      1 |     20 |     28 |     16 |     11 |     12 |    123 |      0 |      0 |      0 |      9 |      9 |      3 |      2 |      3 |     51 |      0 |      0 |      0 |      4 |      9 |      4 |      1 |      1 |     10 |      0 |     37 | s03      | R    |
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| 5674100 |     203 |     73 |     98 |     2 |    0 |     1 |    2 |    0 |     3 |    0 |     24 |    0 |    0 |    0 |    0 |     93 |    110 |       1 |       4 |       2 |       0 |      6 |      5 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        3 |       14 |        6 |        6 |       0 |        3 |        6 |        6 |       10 |       12 |        4 |       2 |        1 |        0 |        7 |       13 |        7 |       17 |       2 |        4 |        5 |        6 |       11 |        6 |       17 |       2 |        0 |        1 |        1 |        5 |        2 |        1 |       0 |        0 |        1 |        3 |        5 |        4 |        1 |       0 |        0 |        0 |        3 |        0 |        1 |        1 |       1 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |      0 |      0 |     15 |     15 |      9 |      3 |      2 |     29 |      0 |      0 |      0 |      7 |     19 |      7 |      3 |      6 |     56 |      0 |      0 |      0 |      3 |      4 |      1 |      1 |      4 |     11 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5674200 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5675000 |     108 |     25 |     53 |     3 |    0 |     1 |    2 |    0 |     1 |    0 |     23 |    0 |    0 |    0 |    0 |     52 |     56 |       2 |       1 |       1 |       1 |      2 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        2 |        3 |        2 |       1 |        2 |        1 |        3 |        3 |        3 |        2 |       0 |        0 |        0 |        4 |        5 |        5 |        8 |       3 |        1 |        2 |        3 |        5 |        5 |        8 |       4 |        0 |        2 |        2 |        4 |        0 |        3 |       0 |        2 |        2 |        2 |        4 |        0 |        2 |       0 |        0 |        1 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      6 |      0 |      0 |      2 |     13 |      0 |      0 |      0 |      9 |      3 |      5 |      4 |      4 |     28 |      0 |      0 |      0 |      6 |      4 |      0 |      0 |      0 |     13 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 5675200 |       2 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5675300 |      69 |     18 |     30 |     2 |    0 |     0 |    1 |    0 |     6 |    0 |     12 |    0 |    0 |    0 |    0 |     32 |     37 |       0 |       0 |       0 |       0 |      2 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        5 |        2 |        0 |       1 |        0 |        1 |        0 |        3 |        2 |        3 |       1 |        3 |        0 |        2 |        1 |        3 |        5 |       0 |        1 |        0 |        4 |        3 |        5 |        2 |       1 |        0 |        1 |        1 |        3 |        0 |        0 |       0 |        3 |        1 |        1 |        2 |        0 |        0 |       0 |        0 |        1 |        2 |        0 |        2 |        0 |       0 |        0 |        3 |        1 |        0 |        0 |        0 |       0 |      0 |      1 |      3 |      2 |      2 |      1 |      1 |      8 |      0 |      0 |      0 |      3 |      1 |      2 |      2 |      2 |     20 |      0 |      0 |      0 |      3 |      2 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |      6 |      0 |     37 | s03      | R    |
| 5675400 |      32 |      4 |     14 |     1 |    0 |     1 |    1 |    0 |     2 |    0 |      9 |    0 |    0 |    0 |    0 |     18 |     14 |       1 |       0 |       1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        0 |       1 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        4 |        1 |       0 |        0 |        1 |        1 |        1 |        3 |        1 |       0 |        2 |        0 |        1 |        1 |        1 |        0 |       0 |        2 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      1 |      0 |      0 |      0 |      2 |      3 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5675700 |      58 |     19 |     25 |     1 |    0 |     3 |    0 |    0 |     1 |    0 |      9 |    0 |    0 |    0 |    0 |     27 |     31 |       1 |       1 |       0 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        1 |        4 |       0 |        0 |        1 |        2 |        3 |        2 |        4 |       0 |        2 |        1 |        1 |        5 |        1 |        3 |       0 |        0 |        1 |        2 |        5 |        0 |        4 |       0 |        0 |        0 |        2 |        1 |        1 |        0 |       0 |        0 |        0 |        1 |        2 |        1 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      3 |      1 |      0 |      1 |     12 |      0 |      0 |      3 |      2 |      1 |      2 |      1 |      4 |     12 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5675900 |     106 |     17 |     68 |     1 |    0 |     0 |    1 |    1 |     0 |    0 |     18 |    0 |    0 |    0 |    0 |     57 |     49 |       1 |       1 |       0 |       1 |      2 |      8 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        2 |        1 |        0 |        3 |        3 |        2 |       1 |        0 |        0 |        0 |        4 |        0 |        1 |       0 |        2 |        2 |        7 |        6 |        5 |       15 |       0 |        2 |        1 |        1 |        6 |        9 |       12 |       0 |        2 |        1 |        1 |        1 |        2 |        0 |       0 |        0 |        1 |        1 |        4 |        4 |        1 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |      0 |      0 |      0 |      9 |      0 |      0 |      0 |      8 |      0 |      0 |      1 |     11 |     12 |      3 |      0 |      4 |     37 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      1 |     13 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
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| 5682000 |       3 |      2 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      3 |       0 |       0 |       0 |       0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5683000 |       6 |      0 |      4 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      3 |      3 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5683200 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5691500 |       8 |      5 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      5 |      3 |       2 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5691600 |       4 |      2 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5691700 |      16 |      7 |      6 |     1 |    0 |     1 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      8 |      8 |       0 |       0 |       0 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        3 |        0 |       2 |        1 |        0 |        1 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      0 |      2 |      1 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      2 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5691800 |      11 |      5 |      3 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      5 |      6 |       0 |       1 |       0 |       0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        3 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5691900 |     450 |    116 |    208 |    16 |    0 |     3 |    3 |    2 |     5 |    0 |     97 |    0 |    0 |    0 |    0 |    229 |    221 |       6 |       7 |       9 |       1 |      8 |      6 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        3 |        3 |        7 |       13 |       10 |       13 |       5 |        0 |        6 |        7 |       18 |       14 |       14 |       3 |       10 |       19 |       13 |       25 |       22 |       15 |       1 |        7 |       10 |       18 |       30 |       21 |       16 |       1 |        3 |        6 |        8 |       20 |        9 |        4 |       0 |        5 |        9 |        6 |       19 |        3 |        5 |       0 |        2 |        3 |        7 |        2 |        6 |        0 |       0 |        1 |        3 |        4 |        1 |        0 |        0 |       0 |      0 |      2 |     17 |     19 |      5 |      4 |      8 |     61 |      0 |      0 |      0 |     31 |     38 |     16 |     17 |      7 |     99 |      0 |      0 |      2 |     15 |      8 |     11 |      3 |      3 |     55 |      0 |      0 |      1 |      5 |      3 |      4 |      2 |      0 |     14 |      0 |     37 | s03      | R    |
| 5692000 |     452 |    127 |    240 |    13 |    0 |     5 |    4 |    0 |     6 |    0 |     57 |    0 |    0 |    0 |    0 |    220 |    232 |       9 |       8 |       2 |       3 |      4 |      7 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      2 |      1 |      0 |        1 |        0 |        3 |       15 |       13 |        9 |       9 |        3 |        3 |       10 |       25 |       18 |       11 |       7 |        9 |        9 |       19 |       34 |       23 |       20 |       4 |        7 |       12 |       27 |       39 |       23 |       10 |       4 |        5 |        3 |        7 |        9 |        9 |        4 |       0 |        2 |        1 |        4 |       10 |        2 |        1 |       0 |        3 |        2 |        2 |        4 |        4 |        0 |       0 |        1 |        2 |        3 |        6 |        0 |        1 |       0 |      0 |      1 |     13 |     25 |     13 |      6 |      9 |     60 |      0 |      0 |      0 |     26 |     40 |     16 |     11 |     19 |    128 |      0 |      0 |      0 |     12 |      8 |      3 |      3 |      3 |     28 |      0 |      0 |      2 |      1 |      8 |      4 |      2 |      0 |     11 |      0 |     37 | s03      | R    |
| 5692100 |      67 |     20 |     31 |     0 |    0 |     3 |    0 |    0 |     2 |    0 |     11 |    0 |    0 |    0 |    0 |     37 |     30 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        4 |        2 |        1 |        3 |       0 |        1 |        0 |        1 |        3 |        3 |        2 |       0 |        1 |        1 |        3 |        3 |        6 |        1 |       1 |        1 |        0 |        3 |        6 |        3 |        2 |       0 |        1 |        1 |        0 |        1 |        3 |        1 |       0 |        2 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      1 |      3 |      1 |      1 |      1 |      4 |      9 |      0 |      0 |      0 |      5 |      2 |      1 |      1 |      0 |     22 |      0 |      0 |      0 |      2 |      1 |      0 |      1 |      0 |      7 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5692300 |      23 |      7 |      9 |     1 |    0 |     2 |    2 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     11 |     12 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        3 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        3 |        0 |        1 |       0 |        0 |        1 |        1 |        2 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      6 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5692400 |      83 |     27 |     35 |     4 |    0 |     0 |    1 |    1 |     1 |    0 |     14 |    0 |    0 |    0 |    0 |     42 |     41 |       1 |       2 |       0 |       0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        1 |        2 |        6 |        1 |        5 |       0 |        1 |        1 |        3 |        3 |        2 |        2 |       0 |        1 |        4 |        3 |        3 |        4 |        2 |       1 |        0 |        1 |        6 |        4 |        4 |        2 |       0 |        0 |        0 |        2 |        1 |        2 |        1 |       0 |        1 |        2 |        1 |        3 |        1 |        0 |       0 |        1 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        1 |       0 |      0 |      0 |      6 |      3 |      2 |      1 |      1 |     14 |      0 |      0 |      0 |      7 |      7 |      0 |      3 |      0 |     18 |      0 |      0 |      0 |      3 |      2 |      0 |      0 |      2 |      7 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |     37 | s03      | R    |
| 5692500 |       7 |      1 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      3 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5692900 |      84 |     11 |     58 |     2 |    0 |     0 |    1 |    0 |     0 |    0 |     12 |    0 |    0 |    0 |    0 |     46 |     38 |       0 |       4 |       1 |       0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        0 |        2 |       1 |        0 |        0 |        0 |        1 |        1 |        4 |       0 |        1 |        7 |        4 |       11 |        5 |        5 |       0 |        4 |        4 |        1 |        8 |        6 |        2 |       0 |        1 |        1 |        1 |        1 |        1 |        1 |       0 |        1 |        1 |        2 |        2 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      4 |      4 |      0 |      0 |      0 |      7 |     11 |      6 |      1 |      2 |     31 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5693000 |      13 |      3 |      9 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      0 |    0 |    0 |    0 |    0 |      7 |      6 |       0 |       0 |       0 |       1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        1 |       0 |        0 |        3 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
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| 5702300 |      56 |     16 |     21 |     0 |    0 |     2 |    0 |    0 |     1 |    0 |     16 |    0 |    0 |    0 |    0 |     28 |     28 |       1 |       0 |       0 |       0 |      3 |      3 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        2 |        1 |        1 |        1 |       1 |        1 |        0 |        3 |        0 |        3 |        0 |       1 |        0 |        1 |        2 |        3 |        1 |        2 |       1 |        1 |        1 |        1 |        5 |        1 |        2 |       0 |        3 |        1 |        3 |        1 |        0 |        0 |       1 |        1 |        1 |        4 |        0 |        1 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        2 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      2 |      3 |      1 |      0 |     10 |      0 |      0 |      0 |      7 |      0 |      1 |      1 |      0 |     12 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |     12 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5703000 |      66 |     10 |     38 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |     17 |    0 |    0 |    0 |    0 |     33 |     33 |       0 |       0 |       1 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        0 |        0 |        2 |        1 |        0 |       1 |        1 |        0 |        2 |        0 |        1 |        1 |       0 |        3 |        2 |        3 |        4 |        6 |        0 |       1 |        1 |        5 |        6 |        4 |        1 |        1 |       1 |        0 |        3 |        0 |        4 |        1 |        0 |       1 |        0 |        0 |        5 |        3 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      2 |      1 |      0 |      1 |      4 |      0 |      0 |      0 |      1 |      5 |      3 |      1 |      1 |     27 |      0 |      0 |      0 |      2 |      1 |      2 |      0 |      1 |     11 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5703100 |     205 |     49 |     94 |     8 |    0 |     1 |    3 |    2 |     2 |    0 |     46 |    0 |    0 |    0 |    0 |    102 |    103 |       0 |       5 |       2 |       0 |      1 |      4 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      0 |      0 |      0 |        1 |        2 |        1 |        8 |        7 |        1 |       0 |        2 |        2 |        6 |        5 |       11 |        2 |       1 |        8 |        3 |       10 |       16 |        8 |        7 |       0 |        5 |        4 |       10 |       14 |        7 |        2 |       0 |        1 |        2 |        8 |        6 |        3 |        1 |       0 |        0 |        3 |        8 |       11 |        3 |        0 |       0 |        1 |        3 |        0 |        2 |        2 |        1 |       0 |        2 |        0 |        1 |        3 |        1 |        0 |       0 |      0 |      0 |     11 |      5 |      5 |      1 |      3 |     24 |      0 |      0 |      1 |     12 |     19 |      4 |      5 |      3 |     50 |      0 |      0 |      0 |      6 |      6 |      1 |      2 |      1 |     30 |      0 |      0 |      0 |      2 |      6 |      0 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 5705000 |      21 |      6 |      8 |     0 |    0 |     0 |    1 |    0 |     4 |    0 |      2 |    0 |    0 |    0 |    0 |     10 |     11 |       0 |       0 |       1 |       1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        2 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        1 |        1 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        2 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        2 |        0 |       0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      1 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |     37 | s03      | R    |
| 5705100 |      15 |      3 |      9 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |      8 |      7 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       1 |        0 |        0 |        1 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        5 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      2 |      3 |      0 |      2 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5706100 |       3 |      1 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5706200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5715000 |      15 |      6 |      9 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      7 |      8 |       0 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        0 |        0 |        1 |        1 |        1 |        1 |       0 |        0 |        0 |        1 |        1 |        2 |        0 |       1 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5716000 |      39 |     12 |     22 |     2 |    0 |     0 |    2 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     22 |     17 |       0 |       2 |       0 |       0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        3 |       2 |        1 |        0 |        0 |        2 |        0 |        2 |       0 |        1 |        1 |        1 |        1 |        4 |        4 |       1 |        0 |        0 |        1 |        2 |        4 |        2 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      4 |      5 |      0 |      0 |      0 |      7 |      4 |      0 |      0 |      2 |      9 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      4 |      0 |     37 | s03      | R    |
| 5716100 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
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| 5718000 |     401 |    113 |    216 |     9 |    0 |     2 |    1 |    0 |     3 |    0 |     57 |    0 |    0 |    0 |    0 |    188 |    213 |       4 |       1 |       1 |       0 |      4 |      6 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      1 |      1 |      0 |      0 |        2 |        1 |        4 |       23 |        8 |       10 |       2 |        5 |        4 |        7 |       21 |       14 |       12 |       0 |        5 |       10 |       17 |       19 |       23 |       32 |       3 |        7 |       13 |       18 |       22 |       16 |       26 |       5 |        2 |        3 |        4 |        6 |        6 |        2 |       0 |        5 |        2 |        5 |       11 |        9 |        2 |       0 |        2 |        0 |        1 |        2 |        1 |        0 |       0 |        3 |        0 |        1 |        4 |        1 |        0 |       0 |      0 |      0 |     13 |     16 |     15 |      9 |      9 |     51 |      0 |      0 |      0 |     40 |     33 |     14 |     13 |     19 |     97 |      0 |      0 |      0 |     14 |      5 |      7 |      1 |      0 |     30 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5718200 |     198 |     50 |    119 |     1 |    0 |     1 |    1 |    0 |     0 |    0 |     26 |    0 |    0 |    0 |    0 |     89 |    109 |       5 |       5 |       0 |       0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        3 |        7 |        5 |        4 |       0 |        1 |        0 |        8 |        7 |       10 |        4 |       0 |        5 |        4 |       11 |       16 |        9 |       11 |       0 |        7 |        2 |       12 |       14 |       14 |       11 |       3 |        2 |        1 |        5 |        1 |        3 |        0 |       0 |        1 |        2 |        4 |        5 |        1 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      5 |      5 |      1 |      7 |     28 |      0 |      0 |      1 |     15 |     28 |     10 |      4 |      6 |     55 |      0 |      0 |      0 |      4 |      3 |      1 |      1 |      2 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |     37 | s03      | R    |
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| 5718400 |     223 |     39 |    152 |     5 |    0 |     1 |    5 |    0 |     1 |    0 |     20 |    0 |    0 |    0 |    0 |    110 |    113 |       0 |       4 |       2 |       2 |      4 |      5 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        1 |        1 |        1 |        4 |        5 |        2 |       1 |        0 |        5 |        3 |        7 |        6 |        3 |       0 |        5 |        7 |       14 |       15 |       17 |       15 |       2 |        4 |        8 |       15 |       20 |       13 |       14 |       3 |        0 |        3 |        1 |        2 |        3 |        2 |       0 |        1 |        1 |        2 |        3 |        1 |        1 |       0 |        2 |        0 |        1 |        4 |        0 |        2 |       0 |        0 |        0 |        1 |        2 |        0 |        0 |       0 |      0 |      0 |      3 |      3 |      7 |      3 |      3 |     20 |      0 |      0 |      1 |     18 |     22 |      7 |      9 |      8 |     87 |      0 |      0 |      0 |      2 |      0 |      2 |      0 |      0 |     16 |      0 |      0 |      0 |      6 |      1 |      0 |      0 |      1 |      4 |      0 |     37 | s03      | R    |
| 5718500 |       3 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5719000 |     148 |     41 |     85 |     4 |    0 |     0 |    2 |    0 |     0 |    0 |     16 |    0 |    0 |    0 |    0 |     74 |     74 |       5 |       5 |       0 |       2 |      1 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      4 |      0 |      0 |        2 |        0 |        2 |        6 |        2 |        3 |       2 |        3 |        0 |        4 |       11 |        5 |        1 |       0 |        3 |        5 |        8 |       15 |       12 |        3 |       1 |        0 |        4 |       10 |       12 |        9 |        3 |       0 |        1 |        0 |        0 |        2 |        1 |        2 |       0 |        3 |        1 |        1 |        2 |        2 |        1 |       0 |        0 |        0 |        1 |        1 |        0 |        2 |       0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |      0 |      0 |     11 |      9 |      1 |      2 |      1 |     17 |      0 |      0 |      1 |     11 |     15 |      5 |      2 |      3 |     48 |      0 |      0 |      0 |      5 |      2 |      0 |      0 |      1 |      8 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      2 |      2 |      0 |     37 | s03      | R    |
| 5719100 |       5 |      3 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      2 |      3 |       3 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5719200 |      11 |      3 |      6 |     0 |    0 |     0 |    0 |    1 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      7 |      4 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        1 |       0 |        1 |        0 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5720000 |       2 |      1 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5720100 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5730000 |     602 |    194 |    262 |    22 |    0 |     9 |    4 |    2 |     6 |    0 |    103 |    0 |    0 |    0 |    0 |    286 |    316 |      18 |      18 |      11 |       1 |      9 |     15 |      4 |      5 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      2 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        5 |        7 |       13 |       21 |       11 |       20 |       5 |        2 |        6 |       17 |       31 |       23 |       30 |       3 |        7 |       19 |       31 |       33 |       23 |       20 |       3 |        9 |       16 |       31 |       25 |       25 |       17 |       3 |        4 |        9 |        8 |       15 |        7 |        4 |       0 |        8 |       12 |       13 |       13 |        8 |        2 |       0 |        2 |        4 |        5 |        6 |        1 |        2 |       1 |        2 |        2 |        5 |        8 |        3 |        2 |       0 |      0 |      1 |     36 |     30 |     20 |      5 |      6 |     96 |      0 |      0 |      4 |     36 |     41 |     15 |      8 |      7 |    151 |      0 |      0 |      3 |     16 |     14 |      0 |      0 |      1 |     69 |      0 |      0 |      1 |      4 |     10 |      5 |      1 |      0 |     22 |      0 |     37 | s03      | R    |
| 5730100 |       3 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |      3 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5730400 |      13 |      5 |      6 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |      6 |      7 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        2 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        2 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5730500 |      74 |     19 |     34 |     2 |    0 |     2 |    2 |    0 |     1 |    0 |     14 |    0 |    0 |    0 |    0 |     39 |     35 |       5 |       1 |       0 |       1 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        1 |        2 |        1 |        3 |        2 |       0 |        1 |        0 |        1 |        3 |        2 |        3 |       0 |        1 |        4 |        3 |        5 |        2 |        2 |       0 |        1 |        4 |        2 |        4 |        5 |        1 |       0 |        2 |        0 |        3 |        1 |        2 |        0 |       0 |        3 |        1 |        1 |        1 |        0 |        0 |       0 |        1 |        1 |        0 |        1 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |      0 |      0 |      4 |      2 |      0 |      1 |      2 |     10 |      0 |      0 |      0 |      6 |      5 |      2 |      0 |      3 |     18 |      0 |      0 |      0 |      2 |      0 |      0 |      1 |      0 |     11 |      0 |      0 |      0 |      2 |      2 |      0 |      1 |      0 |      2 |      0 |     37 | s03      | R    |
| 5731000 |     310 |     99 |    138 |    12 |    0 |     5 |    7 |    1 |     1 |    0 |     47 |    0 |    0 |    0 |    0 |    145 |    165 |      28 |       7 |      11 |       4 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |        2 |        2 |        4 |        6 |       12 |       12 |       1 |        2 |        7 |        6 |       15 |       11 |       17 |       2 |        9 |        2 |       11 |       16 |        9 |       13 |       1 |        6 |        7 |       11 |       26 |       13 |       13 |       1 |        5 |        1 |        6 |        8 |        4 |        4 |       0 |        3 |        3 |        3 |        7 |        2 |        1 |       0 |        2 |        2 |        6 |        1 |        3 |        3 |       0 |        1 |        1 |        1 |        3 |        2 |        1 |       0 |      0 |      0 |     17 |     20 |      8 |      4 |      4 |     46 |      0 |      0 |      0 |     10 |     28 |      6 |      4 |      6 |     84 |      0 |      0 |      0 |      8 |      4 |      4 |      0 |      1 |     30 |      0 |      0 |      0 |      4 |      6 |      2 |      0 |      0 |     14 |      0 |     37 | s03      | R    |
| 5731100 |      27 |      7 |     19 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |     13 |     14 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       1 |        1 |        1 |        0 |        1 |        3 |        3 |       0 |        1 |        2 |        1 |        1 |        1 |        4 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      2 |      2 |      0 |      0 |      0 |     15 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5731200 |       2 |      0 |      2 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
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| 5731400 |     276 |     72 |    143 |    14 |    0 |     5 |    5 |    0 |     1 |    0 |     36 |    0 |    0 |    0 |    0 |    138 |    138 |      15 |       4 |       8 |       4 |      2 |      6 |      3 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      2 |      1 |      0 |      0 |        2 |        2 |        5 |        5 |        5 |        7 |       0 |        3 |        4 |        7 |       13 |       10 |        8 |       1 |        4 |        4 |       18 |       25 |       23 |        9 |       3 |        3 |        5 |       12 |       14 |        6 |       13 |       4 |        5 |        3 |        4 |        2 |        3 |        0 |       1 |        3 |        4 |        3 |        2 |        3 |        2 |       1 |        0 |        2 |        1 |        3 |        1 |        1 |       0 |        2 |        2 |        3 |        6 |        3 |        1 |       0 |      0 |      0 |      7 |     14 |      7 |      0 |      2 |     42 |      0 |      0 |      0 |     20 |     26 |      9 |      4 |      7 |     77 |      0 |      0 |      0 |      8 |      4 |      4 |      0 |      0 |     20 |      0 |      0 |      0 |      9 |      6 |      2 |      0 |      1 |      7 |      0 |     37 | s03      | R    |
| 5741000 |     429 |    148 |    201 |     7 |    0 |     4 |    2 |    0 |     3 |    0 |     64 |    0 |    0 |    0 |    0 |    221 |    208 |      62 |      45 |      21 |       3 |      3 |     15 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        9 |       10 |       12 |       20 |        4 |       21 |       0 |        6 |       12 |       10 |       18 |       13 |       12 |       1 |       14 |        6 |       13 |       25 |       21 |       24 |       1 |        2 |        7 |       18 |       21 |       18 |       29 |       2 |        6 |        4 |        6 |        5 |        7 |        4 |       0 |        7 |        7 |        7 |        5 |        4 |        2 |       0 |        2 |        1 |        0 |        2 |        2 |        2 |       0 |        2 |        3 |        1 |        1 |        0 |        0 |       0 |      0 |      1 |     18 |     33 |      7 |      5 |      4 |     80 |      0 |      0 |      1 |     43 |     44 |      8 |     11 |      6 |     88 |      0 |      0 |      3 |     11 |      8 |      3 |      1 |      0 |     38 |      0 |      0 |      0 |      1 |      3 |      3 |      1 |      1 |      7 |      0 |     37 | s03      | R    |
| 5741100 |       1 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       1 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5741200 |       4 |      1 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        1 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5742000 |      85 |     32 |     34 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |     18 |    0 |    0 |    0 |    0 |     56 |     29 |      24 |      16 |      10 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |        0 |        3 |        4 |        3 |        4 |        2 |       0 |        3 |        4 |        1 |        4 |        4 |        0 |       0 |        2 |        6 |        4 |        7 |        4 |        2 |       1 |        0 |        0 |        4 |        1 |        1 |        2 |       0 |        3 |        2 |        4 |        2 |        1 |        1 |       0 |        0 |        3 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      6 |     10 |      2 |      0 |      1 |     13 |      0 |      0 |      0 |      4 |      6 |      3 |      0 |      0 |     21 |      0 |      0 |      0 |      2 |      5 |      1 |      0 |      0 |     10 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5742100 |      10 |      2 |      7 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      4 |      6 |       0 |       0 |       0 |       0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        2 |        2 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5742200 |      16 |      8 |      4 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      2 |    0 |    0 |    0 |    0 |      7 |      9 |       7 |       3 |       1 |       2 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        0 |        1 |       0 |        0 |        0 |        3 |        3 |        0 |        0 |       0 |        2 |        0 |        0 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |      0 |      0 |      1 |      1 |      2 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5742300 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5750400 |       8 |      2 |      2 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      3 |    0 |    0 |    0 |    0 |      4 |      4 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        1 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5750500 |       2 |      1 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      1 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5750600 |       6 |      2 |      4 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      4 |      2 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        1 |        0 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5750800 |       3 |      0 |      3 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      2 |      1 |       0 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        1 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5750900 |      24 |      5 |     15 |     0 |    0 |     2 |    0 |    0 |     0 |    0 |      2 |    0 |    0 |    0 |    0 |     11 |     13 |       1 |       1 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        1 |       1 |        0 |        0 |        0 |        1 |        0 |        2 |       0 |        0 |        2 |        0 |        1 |        2 |        1 |       0 |        0 |        2 |        3 |        1 |        1 |        2 |       0 |        0 |        0 |        1 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      1 |      0 |      3 |      0 |     10 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      0 |     37 | s03      | R    |
| 5751000 |     357 |    104 |    150 |    19 |    0 |     0 |    4 |    5 |     2 |    0 |     73 |    0 |    0 |    0 |    0 |    169 |    188 |      23 |       8 |       9 |       0 |      3 |      4 |      3 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      2 |      0 |      0 |        2 |        0 |        4 |       14 |        8 |       12 |       2 |        6 |        6 |       10 |        9 |       18 |       13 |       0 |        0 |        7 |       21 |       14 |       13 |       20 |       1 |        1 |        8 |       10 |       13 |       16 |       25 |       1 |        3 |        4 |       13 |        6 |       11 |        1 |       0 |        5 |        5 |       14 |        5 |        6 |        0 |       0 |        1 |        2 |        5 |        3 |        1 |        1 |       0 |        2 |        3 |        4 |        4 |        3 |        1 |       0 |      0 |      3 |     12 |     20 |      8 |      7 |      6 |     48 |      0 |      0 |      3 |     14 |     21 |      6 |     10 |      6 |     90 |      0 |      0 |      0 |     15 |      8 |      2 |      0 |      1 |     47 |      0 |      0 |      0 |      5 |     13 |      1 |      1 |      0 |     10 |      0 |     37 | s03      | R    |
| 5751100 |      20 |      8 |      5 |     0 |    0 |     0 |    0 |    0 |     1 |    0 |      6 |    0 |    0 |    0 |    0 |     10 |     10 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        1 |        0 |        2 |        0 |       0 |        0 |        1 |        0 |        2 |        1 |        1 |       0 |        0 |        2 |        0 |        2 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        1 |        0 |        1 |        0 |        1 |       0 |        1 |        1 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      2 |      1 |      0 |      0 |      0 |      5 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      4 |      0 |      0 |      1 |      1 |      1 |      0 |      0 |      0 |      3 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5751300 |       1 |      0 |      0 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      1 |    0 |    0 |    0 |    0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        1 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 5751600 |     306 |     73 |    146 |    11 |    0 |     9 |    6 |    1 |     3 |    0 |     57 |    0 |    0 |    0 |    0 |    160 |    146 |      11 |      15 |       8 |       3 |      1 |      6 |      5 |      2 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      1 |      0 |      0 |        1 |        2 |        4 |       10 |        6 |       11 |       2 |        1 |        2 |        2 |       12 |        9 |       10 |       1 |        4 |        4 |       11 |       19 |       20 |       14 |       2 |        5 |        3 |       19 |       18 |       17 |        8 |       2 |        3 |        1 |        7 |        9 |        5 |        5 |       0 |        4 |        1 |        9 |        6 |        1 |        6 |       0 |        1 |        1 |        5 |        2 |        8 |        3 |       0 |        1 |        2 |        1 |        1 |        2 |        2 |       1 |      0 |      0 |     15 |     13 |      6 |      1 |      2 |     36 |      0 |      0 |      0 |     17 |     20 |      7 |      0 |      6 |     96 |      0 |      0 |      1 |      9 |      8 |      5 |      0 |      1 |     33 |      0 |      0 |      0 |      8 |      4 |      2 |      0 |      0 |     16 |      0 |     37 | s03      | R    |
| 5760000 |      22 |      7 |     10 |     1 |    0 |     0 |    0 |    0 |     0 |    0 |      4 |    0 |    0 |    0 |    0 |      9 |     13 |       1 |       1 |       1 |       1 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        1 |        1 |        1 |       0 |        0 |        0 |        0 |        2 |        1 |        1 |       0 |        0 |        1 |        0 |        2 |        0 |        1 |       0 |        1 |        1 |        0 |        2 |        0 |        2 |       0 |        0 |        1 |        0 |        0 |        1 |        0 |       0 |        0 |        1 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        1 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      1 |      1 |      2 |      0 |      6 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |     37 | s03      | R    |
| 5760700 |     222 |     85 |     81 |     6 |    0 |     0 |    4 |    2 |     4 |    0 |     40 |    0 |    0 |    0 |    0 |    101 |    121 |      14 |      10 |       7 |       5 |      4 |      7 |      3 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        2 |        6 |        4 |       10 |       11 |       1 |        3 |        3 |        5 |       13 |       10 |       14 |       3 |        4 |        3 |       10 |        6 |        4 |       13 |       0 |        1 |        4 |        6 |       10 |        9 |        9 |       2 |        6 |        3 |        3 |        2 |        1 |        3 |       1 |        3 |        3 |        3 |        3 |        6 |        3 |       0 |        3 |        0 |        2 |        0 |        3 |        0 |       0 |        2 |        1 |        3 |        2 |        0 |        0 |       0 |      0 |      0 |      8 |     12 |      4 |      6 |      0 |     55 |      0 |      0 |      0 |     10 |      9 |      4 |      5 |      1 |     52 |      0 |      0 |      0 |      8 |      7 |      3 |      2 |      1 |     19 |      0 |      0 |      0 |      4 |      1 |      0 |      0 |      0 |     11 |      0 |     37 | s03      | R    |
| 5760900 |      22 |      8 |      8 |     1 |    0 |     0 |    0 |    0 |     1 |    0 |      4 |    0 |    0 |    0 |    0 |     12 |     10 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        2 |       0 |        0 |        0 |        0 |        1 |        2 |        2 |       0 |        0 |        0 |        0 |        1 |        4 |        0 |       0 |        0 |        0 |        1 |        1 |        1 |        0 |       0 |        0 |        0 |        0 |        1 |        2 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      8 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      7 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      1 |      2 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      2 |      0 |     37 | s03      | R    |
| 5761000 |      22 |      7 |      9 |     0 |    0 |     0 |    1 |    0 |     0 |    0 |      5 |    0 |    0 |    0 |    0 |     12 |     10 |       3 |       2 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        1 |        1 |       0 |        0 |        1 |        0 |        0 |        3 |        0 |       1 |        0 |        2 |        0 |        1 |        0 |        3 |       0 |        0 |        0 |        0 |        2 |        1 |        0 |       0 |        0 |        0 |        2 |        1 |        0 |        0 |       0 |        1 |        0 |        0 |        0 |        0 |        0 |       1 |        1 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      6 |      0 |      0 |      0 |      0 |      3 |      1 |      0 |      0 |      5 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      4 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| 7011800 |       1 |      0 |      1 |     0 |    0 |     0 |    0 |    0 |     0 |    0 |      0 |    0 |    0 |    0 |    0 |      1 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |       0 |       0 |       0 |       0 |      0 |      0 |      0 |      0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        1 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |        0 |        0 |        0 |        0 |        0 |        0 |       0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      1 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |      0 |     37 | s03      | R    |
| CNTYTOT | 1292120 | 448439 | 539896 | 28497 |    0 | 12304 | 9645 | 5793 | 10551 |    0 | 236995 |    0 |    0 |    0 |    0 | 607243 | 684877 |   87981 |   48687 |   33713 |    8340 |  22329 |  22257 |  10682 |   2697 |    918 |   1100 |    840 |    109 |   1742 |   1798 |    971 |    183 |   3497 |   4076 |   4117 |    482 |   1812 |   1245 |   1270 |    214 |    2788 |    4069 |    2682 |     540 |   7779 |   9215 |   5225 |    823 |    15761 |    27245 |    34797 |    40802 |    27166 |    32704 |   10415 |    22021 |    39116 |    45916 |    54972 |    36619 |    46358 |   14547 |    20778 |    37145 |    55315 |    56257 |    39752 |    47300 |   10591 |    22353 |    36727 |    53140 |    52972 |    37926 |    55625 |   14015 |    17410 |    25866 |    24283 |    23154 |    13553 |    10636 |    1355 |    22238 |    27655 |    24265 |    21727 |    12618 |    11001 |    1234 |     5319 |     8918 |     7210 |     6536 |     3555 |     3288 |     132 |     5283 |     7987 |     6369 |     5826 |     3063 |     3220 |      84 |      0 |   3260 |  57462 |  61443 |  19960 |  12076 |  14866 | 279372 |      0 |      0 |   3553 |  64761 |  76979 |  25148 |  18706 |  21935 | 328814 |      0 |      0 |   2276 |  32342 |  23335 |   8288 |   4084 |   4726 | 161944 |      0 |      0 |    865 |   9573 |  13095 |   2257 |    829 |    640 |  39531 |      0 |     37 | s03      | R    |
+---------+---------+--------+--------+-------+------+-------+------+------+-------+------+--------+------+------+------+------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+---------+---------+---------+---------+--------+--------+--------+--------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+----------+----------+----------+----------+----------+----------+---------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+--------+----------+------+
